Materials

Inspection Items
Quality assurance

Every our products undergoes a close scrutiny when factory shipping. Capable of obtaining traceability for each serial number. Please contact us if you
need it.

Inspection instruction

Inspections

JIS B6191,
B6201-compliant

Inspection room
Environment temperature

Room temperature: 22±5˳
Humidity: under 60%

Inspection items

We check based on below items for our inspections.
ӖDifference of positioning

ӖParallelism

Positioning error is that a difference between a targeted position and an

There are parallelisms about shape and traveling motion to the base of line or

actual location of a selected point after traveling.

surface.

մӳ Uni-directional positioningմӳ Parallelism

մӳ Repeatabilityմӳ Motion parallelismմӳ Lost motion(reversal positioning accuracy)մӳ VerticallyӖTravel accuracy

ӖEccentricity amount

When a traveling part moves linearly, there will be angle deviation around crossing 3-axis. At
the same time, there will be linear deviation in 2-axis crossing in driving directions. Includingthese, it is described as traveling accuracy.

ӖRunout
ӖHeights of the center of rotationWork distanceմӳ Pitching

ӖSquarenessմӳ YawingӖBacklashմӳ StraightnessHorizontal, vertical directionӖCheck the stroke and limit motion

ӲAmount shows a performance in each specification.

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Quality Assurance
Quality assuranceӖProduct quality
Suruga Seiki conducts measuring inspection of static and dynamic accuracies at the time of stage assembly completion. Only the products that passed
our strict inspection standards are to be delivered to customers.
Please see P.2-187~ for more details.

Inspection instruction

ӖGuarantee certificate
Guarantee certificate is attached to all the products.
Please let us know the both of product number and serial number if you havequestion.

ӖMarking
The serial number is marked on all of our products.

ӖInspection data
When requiring the measured inspection data, please make a request at the time of ordering so that we can attach it to a product by the time of delivery.
When requiring the data after delivery, please contact us with model number and serial number of the product. We will send it for free of charge.
All accuracy of specifications are based on a single-axis data.

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Technical Information

Linear Stage Inspection Instruction
Quality assurance
Inspection instruction

ӖThe uni-directional positioning accuracy [Unit:μ]
Measuring equipment: Laser interferometer
Positioning from a reference point (stroke end) to the point that is devided equally aneffective stroke. Then, the gap between an actual measurement (an actual position
reached after traveling from a reference point) and a theoretical measurement (atargeted position with the motion command) will be measured within a full stroke
range. The maximum difference of those measurements shall be the “uni-directional
positioning accuracy”.

Laser interferometer

Positioning accuracy

Reference point

ӖRepeatability positioning accuracy [Unit:±μm]
Measuring equipment: Laser interfeometer
Targeted toward an arbitrary point, positioning operations are repeated 7 times in one
direction in order to measure stopping positions. The largest reading differential is multipliedby 1/2. As a rule, this measurement process is repeated at the midpoint of the stroke, andthen in the vicinity of either stroke extremity. The largest of all obtained values is taken as
measurement data of Repeatability.

Laser interferometerMax.gap

A selected point

YawӖMoment rigidity [Unit: ”/N٬cm]
Measuring equipment: Auto-collimator
Regarding the rigidity at the time when a moment load indicated from the center
position of traveling surface is applied, angle of inclination slope per 1N٬cm indirections of pitching, yawing and rolling shall be the “moment rigidity.”

Roll

Load

AutocollimatorӖLost motion (Reversal positioning accuracy) [Unit:μm]
Measuring equipment: Laser interferometer
Positioning in the positive direction, and measure its position (ℓ1). And let the pulse move tosame direction, then positioning the pulse from its position to the negative direction, and thatis measured (ℓ’1). Move to the negative direction with the same pulse, then give the same
pulse to the positive direction from that position for measuring the position. (ℓ2). Repeat thesame measurement process for seven times in both positive and negative directions, andcalculate the difference between the average values of each direction. This process is to bedone at three points (the center of stroke and both ends) and the maximum value shall be the“lost motion”.
վLost motion measuring valueտ

Laser interferometer

A selected point

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Pitch

Measuring equipment: Laser interferometer
Set the position where upper surface of a stage traveled to the motor side andstopped as a rederence point, add a fixed amount of load in the same direction. The
difference between measured data after removing the load and the reference point
shall be the backlash data.
ӖParallelism [Unit:μm]

Quality assuranceӖBacklash [Unit:μm]

Laser interferometer

Load

Displacement gauge

Inspection instruction

Measuring equipment: Displacement gauge
Fix a stage on a base surface, measure parallelism of a whole traveling surface
against a base surface. Calculate the maximum difference amont the values and it
shall be the “Parallelism”.
ӖDriving parallelism [Unit:μm]
Measuring value

Measuring equipment: Displacement gauge
Fix a stage on a base surface, and positioning from a reference point (stroke end) at a
fixed interval in one direction. Measure displacement values between a base surface and agauge fixed on a traveling surface at every location of positioning. The maximum difference
among the values shall be the “Driving parallelism”.

Full travel range▲Displacement gauge

AutocollimatorӖPitching [Unit:"]
Measuring equipment: Auto-collimator
Positioning shall conducted from the reference point (stroke end) at fixed intervals ina single direction. Indication in the vertical direction at each positioning point shall bemeasured over a full-stroke range. The maximum angular gap shall be the pitchingmeasured value.

AutocollimatorӖYawing [Unit:"]
Measuring equipment: Auto-collimator
Positioning shall be conducted from the reference point (stroke end) at fixed intervals
in a direction. indication in the horizontal direction at each positioning point shall bemeasured over a full-stroke range. The maximum angular gap shall be the yawing
measured value.
Displacement gauge

ӖSquareness [Unit:μm]
Measuring equpiment: Displacement gauge and right-angle standard
Set a right-angle standard and XY-axis stage on a base surface properly. Adjust the setting sothat trajectory of one traveling axis and the right-angle standard become parallel. Positioningof other axis stage from a reference point (stroke end) at a fixed interval in one direction.
Measure displacement values between a right-angle standard and a gauge fixed on a travlingsurface at every location of positioning. The maximum difference among the values shall be
the “Squareness”.

right-angled referenceӖPerpendicularity [Unit:μm/Full stroke]
Measuring equipment: Displacement gauge
Fix a Z-axis stage or right-angle standard on the surface. The displacement gauge will
be put to the right-angle standard. Move the effective stroke based on the stroke end.
The maximum difference among the values shall be the “Perpendicularity”.

Displacement gauge
right-angled referenceӖLimit motion check
Check if the display panel of Suruga Seiki standard stage controller indicates Limit
detection sign and a stage stops when the stage traveled to the stroke end.

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Technical Information

Linear Stage Inspection Instruction
Quality assuranceӖStraightness [Unit: μm]
Measuring eqipment: Straightness measuring tool or dial gauge+linear ruler
Straightness indicates how much it winds its way against ideal traveing when a linear stage travels in a range of full-stroke.
The maixmum shifting value of either in the horizontal and vertical direction from the ideal axis shall be the measured data for straightness.

ӖStraightness at single axis
Mechanism

Inspection instruction

Linear ball guide°45

Gothic arc groove

Model

Stroke(mm)

Straightness (Within μm)
1

2

3

5

7

9

10

15

Slide guide30

KXT04015

15

10 [98]

KXT06015

15

10 [98]PG413

13

10 [98]PG513

13

10 [98]PG615

15

10 [98]PG715

15

10 [98]PG430

30

10 [98]PG530

30

10 [98]PG650

50

10 [98]PG750

50

10 [98]

KXG0602020

5 [49]

KXG0603030

5 [49]

KXL0603030

12 [117.6]

KXL0605050

12 [117.6]

KXL0607575

12 [117.6]

KXL06100

100

12 [117.6]

KXL06150

150

12 [117.6]

KXL06200

200

12 [117.6]

KXL06300

300

12 [117.6]

KXC04015

15

5 [49]KXC0602020

5 [49]

KS101-30

30

5 [49]

KX072525

10 [98]

KX083030

15 [147]

KX104040

20 [196]

KX125050

25 [245]

KXS18100

100

30 [294]

KXS18200

200

30 [294]

KXS18300

300

30 [294]

KXS18400

400

30 [294]

KXS18500

500

30 [294]NoteXY-axis, Z-axis and XYZ-axis are combinations of the above single axis(X-axis) stages. Refer to the value of single axis for straightness.

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25

Gothic arc groove

Cross roller guide

189

20

Horizontal load
capacity
kgf [N]Sample Measuring Data
Quality assurance

The charts below are graphical plots of KS102-70 Cross-roller type linear stage’s actual measured data for following items.
Uni-directional positioning accuracy
Lost motion
Repeatability positioning accuracy
Measurement of lost motion and repeatability were conducted at three points near the center of stroke and both ends of stroke (near CW limit and CCW limit).
These measurements are conducted for each single axis stage of all ordered motorized stages and the obtained data is stored.
CCW-limit is a limit when a stage travels towards motor side.
CW-limit is a limit when a stage travels away from motor.

Inspection instruction■Uni-directional positioning accuracy
Measurement result：0.99
（μm）
（μm）
2

0

5.4

27.0
（mm）

54.0

−2

■Lost motion■Repeatability positioning accuracy
Measurement result：±0.06（μm）

Measurement result：0.3（μm）
Near the center of stroke

（μm）
0.5

0
1

Near the center of stroke

（μm）
0.5

7

0
1

0.03
（μm）

±0.03
（μm）

−0.5

−0.5

（μm）
0.5

Near CCW-limit

（μm）
0.5

0
1

7

Near CCW-limit

0
1

0.30
（μm）

7

±0.02
（μm）

−0.5

−0.5

（μm）
0.5

Near CW-limit

1

Near CW-limit

（μm）
0.5

0

−0.5

7

7

0
1

0.12
（μm）

7

±0.06
（μm）
−0.5

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Technical Information

Horizontal Z-axis Stage Inspection Instruction
Quality assurance
Inspection instruction
ӖUni-directional positioning accuracy [Unit:μm]
Measuring equipment: Laser interferometer
Positioning shall be conducted from the reference point (stroke end) at fixed intervals
in a single direction. Then the gaps between the actual measurements (actual positions
reached by movement from the reference point) and the theoretical values (command
positions specified for movement) at each positioning point shall be measured within
the full-stroke range. Finally the maximum value of them shall be the positioning
accuracy measured value.

Laser interferometer

Positioning accuracy

Reference point

ӖRepeatability positioning accuracy [Unit:±μm]
Measuring equipment: Laser interferometer
Positioning from the same direction shall be repeated seven times on a selected point
and the deviation of the stop position shall measured. The maximum deviation gap
shall be halved. The step shall be conducted repeatedly at the center position andtwo end positions. The maximum value obtained shall be the repeatability positioning
accuracy measured value.

Laser interferometerMax.gap
A selected point

ӖLost motion (Reversal positioning accuracy) [Unit:μm]
Measuring equipment: Laser interferometer
Positioning in the positive direction, and measure its position (ℓ1). And let the pulse move tosame direction, then positioning the pulse from its position to the negative direction, and thatis measured (ℓ’1). Move to the negative direction with the same pulse, then give the same
pulse to the positive direction from that position for measuring the position. (ℓ2). Repeat thesame measurement process for seven times in both positive and negative directions, andcalculate the difference between the average values of each direction. This process is to bedone at three points (the center of stroke and both ends) and the maximum value shall be the“lost motion”.
վLost motion measuring valueտ2191

Laser interferometer

A selected point

Quality assuranceӖStraightness (2 crossing directions in traveling direction) [Unit:μm]
Measuring equipment: Straightness measurement instruments or displacementgauge and straightness standard
Positioning from a reference point (stroke end) at the fixed interval in one direction.
Measure straightness deviations of vertical and horizontal direction at every
location of the positioning within a full stroke range. The maximum difference from
representative line shall be the “straightness”.

Inspection instruction

ӖParallelism of stage surface [Unit:μm]
Parallelism

Measuring equipment: Displacement gauge
Fix the stage on a base surface, and measure parallelism of a whole stage surface
against a base surface. Calculate the maximum difference among the values and it
shall be the “Parallelism”.

ӖPerpendicularity [Unit:μm/Full stroke]
Measuring equipment: Displacement gauge and right-angle standard
Fix a stage or right-angle standard on the surface. Positioning from a reference point(stroke end) in one direction. Measure displacement values between a right-angle
standard and a gauge fixed on a stage surface. The maximum difference among thevalues shall be the "Perpendicularity".

ӖMoment rigidity [Unit:"N٬cm]
Measuring equipment: Auto collimator

Yaw
Pitch

Regarding the rigidity at the time when a moment load indicated from the center
position of a stage is applied, angle of inclination slope per 1Ncm in directions ofpitching, yawing and rolling shall be the “moment rigidity”.

ӖLimit motion check
Check if the display panel of Suruga Seiki's standard stage controller indicates limit
detection sign and a stage stops when the stage traveled to the stroke end.

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Technical Information

Goniometer Stage Inspection Instruction
Quality assurance
Inspection instructionӖRepeatability positioning accuracy [Unit:±°]Measuring equipment: Rotary encoder
The maximum difference of measuring value will be calculated the positioning fromthe same direction for a selected point and repeat positioning for 7 times on thecenter of the stroke and both sides. The calculated half of maximum value with±mark shall be the “repeatability positioning accuracy”.

Max.gap
A selected point

ӖLost motion (Reversal positioning accuracy) [Unit:°]
Measuring equipment: Laser interferometer
Positioning in the positive direction, and measure its position (ℓ1). And let the pulse move tosame direction, then positioning the pulse from its position to the negative direction, and thatis measured (ℓ’1). Move to the negative direction with the same pulse, then give the same
pulse to the positive direction from that position for measuring the position. (ℓ2). Repeat thesame measurement process for seven times in both positive and negative directions, andcalculate the difference between the average values of each direction. This process is to bedone at three points (the center of stroke and both ends) and the maximum value shall be the“lost motion”.
վLost motion measuring valueտ2

193

A selected point

Quality assurance

ӖRunout accuracy of rotation center [Unit: mm]
Measuring equipment: Displacement gauge
Place a rigid sphere at the height r rotation center (the actual rotatin center, not atheoretical one). When there is a full stroke motion, the amount of deflection of arigid sphere shall be the “Accuracy of rotation center tilt”.

Actual height of rotation center

Inspection instruction

Measuring equipment: Hight gauge
When the runout accuracy of rotation center (the actual rotation center, not atheoretical one) is being measured, it is conducting positioning of a rigid spheretoward the height of actual rotation center. The height of the rigit sphere’s center
point measuring from a surface that a stage is placed shall be the “height ofrotatio center”.

height of center rotation

ӖHeight of rotation center [Unit: mm]

−20
−10
0

10−

ӖMoment rigidity [ "/N٬cm]
Autocollimator

20−

Load

Measuring equipment: Autocollimator
Regarding the rigidity at the time when a moment load indicated from the center
position of a stage is applied, angle of inclination slope per 1N٬cm in directions ofpitching, yawing and rolling shall be the “moment rigidity”.

ӖLimit motion check
Check if the display panel of Suruga Seiki’s standard stage controller indicates limit
detection sign and a stage stops when the stage traveled to the stroke end.

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Technical Information

Rotary Stage Inspection Instruction
Quality assurance
Inspection instruction
ӖUni-directional positioning accuracy [Unit:°]Positioning accuracy

Measuring equipment: Autocollimator and polyhedron mirror
Positioning each 30 degree based on 0 degree. Measuring difference for polyhedronmirror and the maximum difference of those measurements shall be the “unidirectional positioning accuracy”.

Reference point

ӖRepeatability positioning accuracy [Unit:±°]Measuring equipment: Autocollimator and polyhedron mirror
Positioning the same rotary direction shall be repeated seven times on a selected
point and the deviation of the stop position shall measured. The maximum deviation
gap shall be halved. The step shall be conducted repeatedly at four different positions
along the periphery. The calculated half of maximum value with ±mark shall be the“repeatability positioning accuracy”.

A selected point
Max.gap

ӖLost motion(Reversal positioning accuracy) [Unit:°]
Measuring equipment: Autocollimator and polyhedron mirror
Positioning in the positive direction, and measure its position (ℓ1). And let the pulse move tosame direction, then positioning the pulse from its position to the negative direction, and thatis measured (ℓ’1). Move to the negative direction with the same pulse, then give the same
pulse to the positive direction from that position for measuring the position. (ℓ2). Repeat thesame measurement process for seven times in both positive and negative directions, andcalculate the difference between the average values of each direction. This process is to bedone at three points (the center of stroke and both ends) and the maximum value shall be the“lost motion”.
վLost motion measuring valueտ2

195

A selected point

Quality assuranceӖParallelism [Unit:μm]
Measuring equipment: Displacement gauge
Fix a stage on a base surface, and measure parallelism of a whole traveling surface
against a base surface. Calculate the maximum difference among the values and it
shall be the “parallelism”. At the time of measurement, set the position of surface sothat an inclination of traveling surface becomes the maximum against a base surface.

Parallelism

Inspection instruction

ӖRunout [Unit:μm]
Measuring equipment: Displacement gauge
The circumference of stage traveling that is fixed on the standard surface is being
the measurement point. The maximum difference per shaft revolution of traveling forstandard surface shall be the “runout”.

RunoutӖEccentricity [Unit:μm]
Measuring equipment: Displacement gauge
Displacement of center axis of rotation in horizontal direction shall be “eccentricity”.
ӖBacklash [Unit:°]
Measuring equipment: Autocollimator and polyhedron mirror
A force of positive (negative) direction shall be applied to a selected point on the
periphery first the tangent line direction clockwise. This particular point of force
application shall be considered as the reference point. Next, a force of positive(negative) shall be applied in the tangent line direction counterclockwise thistime. Then, the angle from the reference point shall be measured. The step shallbe conducted at four different positions along the periphery. The maximum value
obtained shall be the backlash measured value. The unit of the measurement isangular degrees.

1kg（Negative direction）

A selected point
Backlush
1kg（Positive direction）

ӖMoment rigidity [Unit: "/N٬cm]
Measuring equipment: Autocollimator
Regarding the rigidity at the time when a moment load indicated from the center
position of traveling surface is applied, angle of inclination slope per 1N٬cm indirections of pitching, yawing and rolling shall be the “moment rigidity”.

Autocollimator

LoadӖLimit and origin motion check
Check if the display panel of Suruga Seiki's standard stage controller indicates limit
detection sign and a stage stops when the stage traveled to the stroke end or to thelimit dog that was installed at a selected point.

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