Safety Precautions• Important Notes on exporting this product or equipment containing this product;
If the end-user or application of this product is related to military affairs or weapons, its export may be controlled by"Foreign
Exchange and Foreign Trade Control Law" of Japan where export license will be required before product can be exported
from Japan.
• This product is designed and manufactured for use in General Purpose Industrial Equipment and it is not intended to be usedin equipment or system that may cause personal injury or death.
• All servicing such as installation, wiring, operation, maintenance and etc., should be performed by qualified personnel only.
• Tighten mounting screws with an adequate torque by taking into consideration strength of the screws and the characteristics
of material to which the product will be mounted. Over tightening can damage the screw and/or material; under tightening
can result in loosening.
• Install safety equipment to prevent serious accidents or loss that is expected in case of failure of this product.
• Consult us before using this product under such special conditions and environments as nuclear energy control, aerospace,transportation, medical equipment, various safety equipments or equipments which require a lesser air contamination.
• We have been making the best effort to ensure the highest quality of our products, however, some applications with exceptionally large external noise disturbance and static electricity, or failure in input power, wiring and components may result in
unexpected action. It is highly recommended that you make a fail-safe design and secure the safety in the operative range.
• If the motor shaft is not electrically grounded, it may cause an electrolytic corrosion to the bearing, depending on the conditionof the machine and its mounting environment, and may result in the bearing noise. Checking and verification by customer isrequired.
• Failure of this product depending on its content may generate smoke of about one cigarette. Take this into consideration
when the application of the machine is clean room related.
• Please be careful when using the product in an environment with high concentrations of sulfur or sulfuric gases, as sulfuration
can lead to disconnection from the chip resistor or a poor contact connection.
• Do not input a supply voltage which significantly exceeds the rated range to the power supply of this product. Failure to heed
this caution may lead to damage of the internal parts, causing smoke and/ or fire and other troubles.
• The user is responsible for matching between machine and components in terms of configuration, dimensions, life
expectancy, characteristics, when installing the machine or changing specification of the machine. The user is also
responsible for complying with applicable laws and regulations.
• Manufacturer's warranty will be invalid if the product has been used outside its stated specifications.
• Component parts are subject to minor change to improve performance.
• Read and observe the instruction manual to ensure correct use of the product.

RepairURL

NEW

Servo System
MINAS A7 Family

MINAS
Industry-leading motion performance* for quick
and intuitive adaptation to demanding situations*As of September 2023, according to in-house research.

Consult to the dealer from whom you have purchased this product for details of repair work.
When the product is incorporated to the machine you have purchased, consult to the machine manufacturer or its dealer.
Electronic data of this product (Instruction Manual, CAD data) can be downloaded from the following web site;industrial. panason ic.com/ac/e/• MINAS, TUNE COMPASS, Realtime Express and RTEX, the RTEX logo are registered trademarks or trademarks of Panasonic Holdings Corporation in Japan andother countries.
• Realtime Express is a high-speed synchronous motion network developed by Panasonic Holdings Corporation.
• EtherCAT is a patented technology and registered trademark licensed by Beckhoff Automation GmbH in Germany.

● Contact to :Panasonic Industry Co., Ltd.,
Industrial Device Business Division
1-1 Morofuku 7-chome, Daito, Osaka, 574-0044, Japan

Panasonic Industrial© Panasonic Industry Co., Ltd.

SearchUnauthorized reproduction from this document is strictly prohibited.
No.AQCTB1101E-2 202406-y2024.62024.6This product is for industrial machines. It cannot be used in general households.

giledaptability
Increase the productivity of machine, people and applications byadapting quickly and intuitively to demanding situations.

Agile Adaptability to Machines

Immediate response to commands and disturbances
Industry-leading* basic motion performance is faithful tocommands and has strong resistance to disturbances. *As of September 2023, according to in-house research.
Encoder resolution

27 bit ,Speed response frequency

4.0kHz or more ,Max. motor rotational speed

7150r/min**For MHMG022

Agile Adaptability to People

Immediate response at start-up and when trouble occurs
Expanded auto tuning, from easy start-up to automation of high level tuning.
Quick response with drive recorder function when trouble occurs.
Ultra-high precision

precAIse TUNING High precision One Minute TUNING Easy Drive recorder
Under development

Agile Adaptability to Applications

Basic servo performance that further enhances machine performance

Immediate adaptation to specif ic applications

The MINAS A7 achieves the industry’s highest motion performance*, follows commands faithfully

Application-specific functions are achieved without a controller.
Sensor direct input system contributes to highly responsive control.

and provides strong resistance against disturbances.

Displacement control Pressure control High-precision gantry control

Increased responsiveness to machines enables higher speed and higher precision.

(Auto-focus control, meandering control)

Under development

Under development*As of September 2023, according to in-house research.

Optimization of man-machine operations through servo intelligence
Making the servo intelligent simplifies setup, which used to take long hours ofdevelopment, through auto-tuning functions, maintenance functions,and application optimization.
Increase the productivity of machines, people and applications by allowing
them to adapt quickly and intuitively to more demanding situations.

Machines

Agile
Adaptability
PeopleApplications

MINAS
2

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

3

gile
daptability
Increase the productivity of machine, people and applications byadapting quickly and intuitively to demanding situations.

Agile Adaptability to Machines

Immediate response to commands and disturbances
Industry-leading* basic motion performance is faithful tocommands and has strong resistance to disturbances. *As of September 2023, according to in-house research.
Encoder resolution

27 bit ,Speed response frequency

4.0kHz or more ,Max. motor rotational speed

7150r/min**For MHMG022

Agile Adaptability to People

Immediate response at start-up and when trouble occurs
Expanded auto tuning, from easy start-up to automation of high level tuning.
Quick response with drive recorder function when trouble occurs.
Ultra-high precision

precAIse TUNING High precision One Minute TUNING Easy Drive recorder
Under development

Agile Adaptability to Applications

Basic servo performance that further enhances machine performance

Immediate adaptation to specif ic applications

The MINAS A7 achieves the industry’s highest motion performance*, follows commands faithfully

Application-specific functions are achieved without a controller.
Sensor direct input system contributes to highly responsive control.

and provides strong resistance against disturbances.

Displacement control Pressure control High-precision gantry control

Increased responsiveness to machines enables higher speed and higher precision.

(Auto-focus control, meandering control)

Under development

Under development*As of September 2023, according to in-house research.

Optimization of man-machine operations through servo intelligence
Making the servo intelligent simplifies setup, which used to take long hours ofdevelopment, through auto-tuning functions, maintenance functions,and application optimization.
Increase the productivity of machines, people and applications by allowing
them to adapt quickly and intuitively to more demanding situations.

Machines

Agile
Adaptability
PeopleApplications

MINAS
2

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

3

MINAS A7 Line-up
MINAS

Servo system supporting various system configurations

SERVO DRIVER

Rotation typeLinear/DD motor typeSpecial order productAnalog/pulse train
Modbus communication
Open network
EtherCAT-compatible
servo driver

High-speed
Realtime Express-compatible
network servo driver

MINAS A7B

MINAS A7N

Position control typeMulti-function typeMulti-function typeMulti-function type

Application specialized type

Application specialized type

Application specialized type

A7NF

A7BR

A7NL
Multi-function type
A7NM
Application specialized type A7NV
Standard type

A7SE

A7NE

A7BF

Multi-function type

MINAS A7S

Standard type

A7BE

A7BL
A7BM
Application specialized type A7BV
Standard type

Under development

Standard type

A7NR

Under development

A7SF

Analog/pulse train
Modbus communication

A7SR

A7SL
Multi-function type
A7SM
Application specialized type A7SV
Position control type

SERVO MOTOR
Low-speed torqueHigh inertia

Medium inertia

Medium inertia

Low inertia

MHMG

MDMG Under development

MGMG Under development

MSMG Under development

200 W, 400 W*50 W to 100 W ( □40) , 750 W (□80) to 5.0 kW ( □180)

EtherCAT/RTEX Controller

1.0 kW to 5.0 kW

Panasonic Industry Co., Ltd.

50 W to 5.0 kW

Under development

PLC programming standardization• Conforms to IEC61131-3, PLCopen, LD/ST/FBD/SFC/IL/CFC

4850 W to 4.4 kW

MotionController

Integration of PLC and motor

GM1

Expansive communication interface• Fastest cycle 500 μs, multi-task control• RTEX, EtherCAT• OPC UA server, FTP server• Ethernet/IP, Modbus, CodesysV3 communication

Support Tools
Servo motor set-up support software
With full featured tuning functions andmore, servo motor set up support isavailable for everything from set up to
PANATERM test operation, operation status verification, maintenance and troubleshooting.

Coming soon

Servo motor selection softwareThis is a tool for selecting
motor capacity by combining
machine elements. Optionalparts can also be selected.

Panasonic Industry Co., Ltd.

5

MINAS A7 Line-up
MINAS

Servo system supporting various system configurations

SERVO DRIVER

Rotation typeLinear/DD motor typeSpecial order productAnalog/pulse train
Modbus communication
Open network
EtherCAT-compatible
servo driver

High-speed
Realtime Express-compatible
network servo driver

MINAS A7B

MINAS A7N

Position control typeMulti-function typeMulti-function typeMulti-function type

Application specialized type

Application specialized type

Application specialized type

A7NF

A7BR

A7NL
Multi-function type
A7NM
Application specialized type A7NV
Standard type

A7SE

A7NE

A7BF

Multi-function type

MINAS A7S

Standard type

A7BE

A7BL
A7BM
Application specialized type A7BV
Standard type

Under development

Standard type

A7NR

Under development

A7SF

Analog/pulse train
Modbus communication

A7SR

A7SL
Multi-function type
A7SM
Application specialized type A7SV
Position control type

SERVO MOTOR
Low-speed torqueHigh inertia

Medium inertia

Medium inertia

Low inertia

MHMG

MDMG Under development

MGMG Under development

MSMG Under development

200 W, 400 W*50 W to 100 W ( □40) , 750 W (□80) to 5.0 kW ( □180)

EtherCAT/RTEX Controller

1.0 kW to 5.0 kW

Panasonic Industry Co., Ltd.

50 W to 5.0 kW

Under development

PLC programming standardization• Conforms to IEC61131-3, PLCopen, LD/ST/FBD/SFC/IL/CFC

4850 W to 4.4 kW

MotionController

Integration of PLC and motor

GM1

Expansive communication interface• Fastest cycle 500 μs, multi-task control• RTEX, EtherCAT• OPC UA server, FTP server• Ethernet/IP, Modbus, CodesysV3 communication

Support Tools
Servo motor set-up support software
With full featured tuning functions andmore, servo motor set up support isavailable for everything from set up to
PANATERM test operation, operation status verification, maintenance and troubleshooting.

Coming soon

Servo motor selection softwareThis is a tool for selecting
motor capacity by combining
machine elements. Optionalparts can also be selected.

Panasonic Industry Co., Ltd.

5

MINAS

MDMG

Medium inertia

MHMG

High inertia

Motor List
50 W

100 W

200 W

400 W

100 V

40

40

60

60

200 V

40

3000 r/min (7150 r/min)

40

750 W

850 W

1.3 kW

1.5 kW

60

3000 r/min (7150 r/min)

60

3000 r/min
80 (6700
r/min)

80

130

3000 r/min (6700 r/min) 3000 r/min (6000 r/min)

130

2000 r/min(3000 r/min)

MGMG
MSMG

Low inertia

2.0 kW

2.4 kW

2.9 kW

130

200 V

180

130

130

2000 r/min (3000 r/min)

130

200 V

130

130

180

5.0 kW

180

180

180

130

180

180

180

180

1500 r/min (3000 r/min)

100 V

38

200 V

38

38

60

3000 r/min (7150 r/min)

38

60
3000 r/min (6700 r/min)

60

3000 r/min (7150 r/min)

60

80

80 1003000 r/min (6700 r/min) 3000 r/min (6000 r/min)

100

100

120

3000 r/min (6700 r/min)

130

Rotation type

130

60

Flange angle

3000 r/min (6700 r/min)Open network EtherCAT-compatible servo driver

130

3000 r/min (5000 r/min)

Driver List

Rated rotation speed (maximum rotation speed)

Under development

Analog/pulse train Modbus communication
Linear/DD motor type

Under development

Rotation typeSpecial order product

Under development

Linear/DD motor type

Under development

Special order productStandard typeMulti-function type

Application specialized type

Standard typeMulti-function type

Application specialized type

Position control typeMulti-function type

Application specialized type

Position control typeMulti-function type

Application specialized type

A7BE Series

A7BF Series

A7BR Series

A7BL Series

A7BM Series

A7BV Series

A7SE Series

A7SF Series

A7SR Series

A7SL Series

A7SM Series

A7SV Series

External contact only

External contact or
Modbus communication

External contact or
Modbus communication

External contact only

External contact or
Modbus communication

External contact or
Modbus communication

External contact only

External contact or
Modbus communication

External contact or
Modbus communication

External contact only

External contact or
Modbus communication

External contact or
Modbus communication

External contact or
Modbus communication

External contact or
Modbus communication

External contact or
Modbus communication

External contact or
Modbus communication

Position control

Position/Velocity/Torque control
Full-closed control

Block operation

Control method

Control method

4.0 kW 4.4 kW

2000 r/min (3000 r/min)(How to read the table)

Interface

3.0 kW

2000 r/min (3000 r/min)Underdevelopment

Under
development

1.8 kW

3000 r/min (6700 r/min)Underdevelopment
Medium inertia/
Low-speed torque1.0 kW

External scale
Safety connector
Sensor feedback

Velocity control
Internal velocity
commandTorque control
Full-closed control

High-speed communication Realtime Express-compatible network servo driverInterface6

Linear/DD motor type

Under development

Special order productStandard typeMulti-function type

Application specialized type

Standard typeMulti-function type

Application specialized type

A7NE Series

A7NF Series

A7NR Series

A7NL Series

A7NM Series

A7NV Series

Pulse
AnalogPosition/Velocity/Torque control
Full-closed control

InterfaceControl method

Rotation type

Block operation

ModbusExternal scale

External scale

RS-232, RS-485

Safety connector

Safety connector

Sensor feedback

Sensor feedback

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

7

MINAS

MDMG

Medium inertia

MHMG

High inertia

Motor List
50 W

100 W

200 W

400 W

100 V

40

40

60

60

200 V

40

3000 r/min (7150 r/min)

40

750 W

850 W

1.3 kW

1.5 kW

60

3000 r/min (7150 r/min)

60

3000 r/min
80 (6700
r/min)

80

130

3000 r/min (6700 r/min) 3000 r/min (6000 r/min)

130

2000 r/min(3000 r/min)

MGMG
MSMG

Low inertia

2.0 kW

2.4 kW

2.9 kW

130

200 V

180

130

130

2000 r/min (3000 r/min)

130

200 V

130

130

180

5.0 kW

180

180

180

130

180

180

180

180

1500 r/min (3000 r/min)

100 V

38

200 V

38

38

60

3000 r/min (7150 r/min)

38

60
3000 r/min (6700 r/min)

60

3000 r/min (7150 r/min)

60

80

80 1003000 r/min (6700 r/min) 3000 r/min (6000 r/min)

100

100

120

3000 r/min (6700 r/min)

130

Rotation type

130

60

Flange angle

3000 r/min (6700 r/min)Open network EtherCAT-compatible servo driver

130

3000 r/min (5000 r/min)

Driver List

Rated rotation speed (maximum rotation speed)

Under development

Analog/pulse train Modbus communication
Linear/DD motor type

Under development

Rotation typeSpecial order product

Under development

Linear/DD motor type

Under development

Special order productStandard typeMulti-function type

Application specialized type

Standard typeMulti-function type

Application specialized type

Position control typeMulti-function type

Application specialized type

Position control typeMulti-function type

Application specialized type

A7BE Series

A7BF Series

A7BR Series

A7BL Series

A7BM Series

A7BV Series

A7SE Series

A7SF Series

A7SR Series

A7SL Series

A7SM Series

A7SV Series

External contact only

External contact or
Modbus communication

External contact or
Modbus communication

External contact only

External contact or
Modbus communication

External contact or
Modbus communication

External contact only

External contact or
Modbus communication

External contact or
Modbus communication

External contact only

External contact or
Modbus communication

External contact or
Modbus communication

External contact or
Modbus communication

External contact or
Modbus communication

External contact or
Modbus communication

External contact or
Modbus communication

Position control

Position/Velocity/Torque control
Full-closed control

Block operation

Control method

Control method

4.0 kW 4.4 kW

2000 r/min (3000 r/min)(How to read the table)

Interface

3.0 kW

2000 r/min (3000 r/min)Underdevelopment

Under
development

1.8 kW

3000 r/min (6700 r/min)Underdevelopment
Medium inertia/
Low-speed torque1.0 kW

External scale
Safety connector
Sensor feedback

Velocity control
Internal velocity
commandTorque control
Full-closed control

High-speed communication Realtime Express-compatible network servo driverInterface6

Linear/DD motor type

Under development

Special order productStandard typeMulti-function type

Application specialized type

Standard typeMulti-function type

Application specialized type

A7NE Series

A7NF Series

A7NR Series

A7NL Series

A7NM Series

A7NV Series

Pulse
AnalogPosition/Velocity/Torque control
Full-closed control

InterfaceControl method

Rotation type

Block operation

ModbusExternal scale

External scale

RS-232, RS-485

Safety connector

Safety connector

Sensor feedback

Sensor feedback

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

7

Agile Adaptability to Machines
Improved basic performance directly linked to equipment performance*

Servo system boasting industry-leading motion performance*As of September 2023, according to in-house research.

Increasing gain by improving basic performance allows for

immediate response to commands and disturbances
Control performance that achieves smoother and more accurate operation

High precision

Increased speed for a shorter takt timeHigh speed

Improved machining quality
through high response control

Improved positioning
performance

Increased output withoutchanging the size of the motor

High precision withdetailed command output

Speed response frequency

Encoder resolution

Max. motor rotational speed

Minimum communication cycle (Conventional product)

4.0 kHz

3.2 kHz(Conventional product)

Industryleading*or moreVelocity response frequency has been increased to 125%
compared to conventional models. As gain can be increased,
an immediate response to both commands and disturbances
is possible, improving machining quality.

27bit

23bit

10

Conventional product
MINAS A7-30

16x

MINAS A7

Encoder resolution-10

Industryleading*Thanks to the industry’s highest* resolution, positioning
performance is greatly improved with smooth movement to
the target position and accurate stopping.

3.2 kHz 4.0 kHz

Gain (dB)(Conventional product)

Encoder resolution

23 bit 8.3million pulses

27 bit 134.2million pulses

100

1000

2000

3000

Speed - torque characteristics*2

Output range
moved into thehigh speed range

3.0
2.5
2.0

110%

Conventional product

4000

0

Frequency (Hz)Increased durability

1000

2000

3000

4000

5000

6000

More flexible installation

7000

Stop precisely at the target position

Improved positioning setting time

Reducing the heat generation of the motor extends operatingtime during overload by 1.9 times compared to conventionalmodels. This contributes to the stable operation of equipmentthat operates for long periods of time in high-load areas, suchas press machines and robots.

Both servo motors and amplifiers have been further miniaturized.
The motors contribute to improved control performance byreducing the size, weight, and inertia of robots and equipment inwhich the motors are used.

In addition to improved motor and encoder performanceand an evolution of our proprietary positioning algorithm,
resonance and mechanical vibration are automaticallyremoved for highly accurate positioning.

Time(sec)

MINAS A7
Conventional product
150

200

250

Torque(%)

350
300

350

0.5
0

1.1

Reduction of amplifier installation space
Driver width

1.9x

1.5
1

Smaller and lighter motors

Conventional
product

55mm

Minimum installation
clearance

10mm

3

2.1

Conventional
MINAS A7
product*Example of 350% load (while rotating) with a 200 W motor

unitsLighter-0.4kgSmaller-7.5mmCompared to 1 kW motor

MINAS
A7

Driver width

Minimum installation
clearance

40mm 1mm

4

units

Compared to 400W driver

Controller

Panasonic Industry Co., Ltd.

Controller

Mounting of micro parts

Servo driver

30%

10

reduction

MINAS A7

Pick & place

0

-10
-10

Ultra precise machining

High precision

MINAS

High
speed

Stableoperation

Large pressmachines

Conventional product
0

10

20

30

40

50

60

70

80

Elapsed time after command completion [ms]Winding machines

8

Servo driver

Belt device

20

Command position deviation [command unit]

2

10

0.1
100

Industry's
smallest
class

2.5

100

1

Time(sec)

Detailedcommands

Contributing to
improved equipment performance

Further miniaturization and weight reduction

1000

MINAS A7*2

8000 Rotation speed (r/min)

Extending overload operation time

Overload protection time characteristics

Conventional product*1: For MHMG022*2: Compared to 200 W motor*As of September 2023, according to in-house research.

Space saving

The minimum communication cycle is 1/2 that of conventionalmodels. It can respond to the control cycle of controllers thatare becoming ever faster, allowing for more detailed control.

expansion

0.5*As of September 2023, according to in-house research.

Stable operation

The MINAS A7 is smaller than conventional models, and theoperation range has beenexpanded to 110%*2. By expanding
output to the high speed range, equipment velocity has been
improved without changing to a larger motor.
Torque (Nm)
3.5

62.5 µs

RTEX

125 µs 62.5 µs/

1.0

improvement-506500 r/min

*1

1.5

Conventional product125%7150 r min

EtherCAT(Conventional product)

Assembly/welding robots

Panasonic Industry Co., Ltd.

9

Agile Adaptability to Machines
Improved basic performance directly linked to equipment performance*

Servo system boasting industry-leading motion performance*As of September 2023, according to in-house research.

Increasing gain by improving basic performance allows for

immediate response to commands and disturbances
Control performance that achieves smoother and more accurate operation

High precision

Increased speed for a shorter takt timeHigh speed

Improved machining quality
through high response control

Improved positioning
performance

Increased output withoutchanging the size of the motor

High precision withdetailed command output

Speed response frequency

Encoder resolution

Max. motor rotational speed

Minimum communication cycle (Conventional product)

4.0 kHz

3.2 kHz(Conventional product)

Industryleading*or moreVelocity response frequency has been increased to 125%
compared to conventional models. As gain can be increased,
an immediate response to both commands and disturbances
is possible, improving machining quality.

27bit

23bit

10

Conventional product
MINAS A7-30

16x

MINAS A7

Encoder resolution-10

Industryleading*Thanks to the industry’s highest* resolution, positioning
performance is greatly improved with smooth movement to
the target position and accurate stopping.

3.2 kHz 4.0 kHz

Gain (dB)(Conventional product)

Encoder resolution

23 bit 8.3million pulses

27 bit 134.2million pulses

100

1000

2000

3000

Speed - torque characteristics*2

Output range
moved into thehigh speed range

3.0
2.5
2.0

110%

Conventional product

4000

0

Frequency (Hz)Increased durability

1000

2000

3000

4000

5000

6000

More flexible installation

7000

Stop precisely at the target position

Improved positioning setting time

Reducing the heat generation of the motor extends operatingtime during overload by 1.9 times compared to conventionalmodels. This contributes to the stable operation of equipmentthat operates for long periods of time in high-load areas, suchas press machines and robots.

Both servo motors and amplifiers have been further miniaturized.
The motors contribute to improved control performance byreducing the size, weight, and inertia of robots and equipment inwhich the motors are used.

In addition to improved motor and encoder performanceand an evolution of our proprietary positioning algorithm,
resonance and mechanical vibration are automaticallyremoved for highly accurate positioning.

Time(sec)

MINAS A7
Conventional product
150

200

250

Torque(%)

350
300

350

0.5
0

1.1

Reduction of amplifier installation space
Driver width

1.9x

1.5
1

Smaller and lighter motors

Conventional
product

55mm

Minimum installation
clearance

10mm

3

2.1

Conventional
MINAS A7
product*Example of 350% load (while rotating) with a 200 W motor

unitsLighter-0.4kgSmaller-7.5mmCompared to 1 kW motor

MINAS
A7

Driver width

Minimum installation
clearance

40mm 1mm

4

units

Compared to 400W driver

Controller

Panasonic Industry Co., Ltd.

Controller

Mounting of micro parts

Servo driver

30%

10

reduction

MINAS A7

Pick & place

0

-10
-10

Ultra precise machining

High precision

MINAS

High
speed

Stableoperation

Large pressmachines

Conventional product
0

10

20

30

40

50

60

70

80

Elapsed time after command completion [ms]Winding machines

8

Servo driver

Belt device

20

Command position deviation [command unit]

2

10

0.1
100

Industry's
smallest
class

2.5

100

1

Time(sec)

Detailedcommands

Contributing to
improved equipment performance

Further miniaturization and weight reduction

1000

MINAS A7*2

8000 Rotation speed (r/min)

Extending overload operation time

Overload protection time characteristics

Conventional product*1: For MHMG022*2: Compared to 200 W motor*As of September 2023, according to in-house research.

Space saving

The minimum communication cycle is 1/2 that of conventionalmodels. It can respond to the control cycle of controllers thatare becoming ever faster, allowing for more detailed control.

expansion

0.5*As of September 2023, according to in-house research.

Stable operation

The MINAS A7 is smaller than conventional models, and theoperation range has beenexpanded to 110%*2. By expanding
output to the high speed range, equipment velocity has been
improved without changing to a larger motor.
Torque (Nm)
3.5

62.5 µs

RTEX

125 µs 62.5 µs/

1.0

improvement-506500 r/min

*1

1.5

Conventional product125%7150 r min

EtherCAT(Conventional product)

Assembly/welding robots

Panasonic Industry Co., Ltd.

9

Agile Adaptability to People
From simple tuning to ultra-high precision tuning that require expert skill

Automatic tuning reduces startup engineering man-hours
Optimal man-machine coordination during tunig is achieved
through servo intelligence

Immediate response even at start-up

Ultra-high precision

Three tuning settings can be selected according to whether you wish to prioritize tuning time or control precision

TUNE COMPASSHigh

precAIse
TUNING
One Minute
TUNING

Priority on control precision Ultra-high precision From half a day

Ultra-high precision automatic tuning that exceeds
the abilities of experts

Balance on accuracy and timeHigh precision

precAIse
TUNING

Control precision

It is possible to select the optimal tuning method to match customer requests,
from situations that require tuning difficult for even expert engineers to thosethat require immediate operation.

The AI uses expert judgment to easily achieve ultra-high precision tuning

precAIse TUNING
Complex tuning that take several days even for expert
engineers are automatically optimized by AI just by
setting the conditions, making µm level ultra-highprecision tuning easily achievable.

AI achieves high-precision tuning that exceeds the abilities of experts.

One Minute
TUNING

Conventional

precAIse TUNING

Approx. 1 min.

High precision automatic tuning according to equipment
characteristics

Priority on tuning time
0 sec.
TUNINGLESS Simple real-time automatic tuning according to

TUNINGLESS
Low

equipment load

Short

Long

Tuning completion timeComplex

SimpleConfirmation

Default settings

STEP.1Unique algorithm

Equipment characteristics measurement≪Configuration items≫

Optimized to fit the equipment in a short time with a 3-step operation.
Adjustment margins for aging and individual differences can also be considered.

STEP.2

Unique algorithm

Control parameter optimization

STEP.3
Response confirmation

Automatic tuning of parameters
taking control margins into consideration

・Purpose・Operating range etc.

Tuning complete

Approx. 1 min.

*Adjustable margin level

Automatic re-tuning of specific items with pinpoint accuracy in response to material and location changes
Already tuned

Design change
Vibration !

Immediate operation

Tuning complete

Select and recalibrate only the functions that reduce vibration.

Automatic tuning according to the equipment load during operation, toeffortlessly achieve stable operation

TUNINGLESS
Tuning work

Automatic re-tuning of only specified items

Positioning operation

Every time the equipment is moved, the servo driver automatically carries out simple real-timetuning according to the equipment load.

Tuning when operation is completed

Confirmation

Automatic tuning

Confirmation

Expert engineer
Parameter adjustment

AdjusterServo tuning tool

Operation instructions

Repeated by workers hundreds of times

Results confirmation

Panasonic Industry Co., Ltd.

Operation
instructions

Results
confirmation

Parameter adjustment

Automatically repeat work hundreds of times

High level of automatic tuning satisfies performance requirements for all locations and operations
Multiple locations
Tuning that meet therequired performance at
all locations with a single
parameter tuning

Multiple operations

15 mm movement
10 mm movement
5 mm movement

Tuning that meet therequired performance forall operations with a single
parameter tuning

Precise!

5 mm movement

5 mm movement

Precise !

メリット①

メリット②

Achieves positioning accuracy exceeding that of an expert

90% reduction in work time and significant reduction in tuning period
Setting

45% shorter

Operation instructions

Results confirmation

Experttuningin positioning settling time

precAIse TUNING

90% reduction in tuning work time

Expert tuning
Time

precAIse
TUNINGStart* Measured in our experimental environment. Measurement of the settling time required forthe position deviation to settle within a specified settling range.

10

Default settings• Oscilloscope waveform• Servo waveform*When using a Displacement sensor to detect vibration at the tip of the device

Position deviation

Automatic processing

Oscilloscope

The driver understands equipment characteristics and implements
tuning while taking control margins into consideration.

One Minute TUNING

Displacement
sensor*

Displacement
sensor*Immediate operation

High precision[Applicable equipment] Equipment such as mounters, coating equipment and processing machines
which require ultra-precise positioning accuracy

Automated

Tuning period : Significant reduction(No human operation)
FinishFinish* Measured in our experimental environment. Measured time required for tuning work to bring
the position deviation within the specified settling range.

Panasonic Industry Co., Ltd.

11

Agile Adaptability to People
From simple tuning to ultra-high precision tuning that require expert skill

Automatic tuning reduces startup engineering man-hours
Optimal man-machine coordination during tunig is achieved
through servo intelligence

Immediate response even at start-up

Ultra-high precision

Three tuning settings can be selected according to whether you wish to prioritize tuning time or control precision

TUNE COMPASSHigh

precAIse
TUNING
One Minute
TUNING

Priority on control precision Ultra-high precision From half a day

Ultra-high precision automatic tuning that exceeds
the abilities of experts

Balance on accuracy and timeHigh precision

precAIse
TUNING

Control precision

It is possible to select the optimal tuning method to match customer requests,
from situations that require tuning difficult for even expert engineers to thosethat require immediate operation.

The AI uses expert judgment to easily achieve ultra-high precision tuning

precAIse TUNING
Complex tuning that take several days even for expert
engineers are automatically optimized by AI just by
setting the conditions, making µm level ultra-highprecision tuning easily achievable.

AI achieves high-precision tuning that exceeds the abilities of experts.

One Minute
TUNING

Conventional

precAIse TUNING

Approx. 1 min.

High precision automatic tuning according to equipment
characteristics

Priority on tuning time
0 sec.
TUNINGLESS Simple real-time automatic tuning according to

TUNINGLESS
Low

equipment load

Short

Long

Tuning completion timeComplex

SimpleConfirmation

Default settings

STEP.1Unique algorithm

Equipment characteristics measurement≪Configuration items≫

Optimized to fit the equipment in a short time with a 3-step operation.
Adjustment margins for aging and individual differences can also be considered.

STEP.2

Unique algorithm

Control parameter optimization

STEP.3
Response confirmation

Automatic tuning of parameters
taking control margins into consideration

・Purpose・Operating range etc.

Tuning complete

Approx. 1 min.

*Adjustable margin level

Automatic re-tuning of specific items with pinpoint accuracy in response to material and location changes
Already tuned

Design change
Vibration !

Immediate operation

Tuning complete

Select and recalibrate only the functions that reduce vibration.

Automatic tuning according to the equipment load during operation, toeffortlessly achieve stable operation

TUNINGLESS
Tuning work

Automatic re-tuning of only specified items

Positioning operation

Every time the equipment is moved, the servo driver automatically carries out simple real-timetuning according to the equipment load.

Tuning when operation is completed

Confirmation

Automatic tuning

Confirmation

Expert engineer
Parameter adjustment

AdjusterServo tuning tool

Operation instructions

Repeated by workers hundreds of times

Results confirmation

Panasonic Industry Co., Ltd.

Operation
instructions

Results
confirmation

Parameter adjustment

Automatically repeat work hundreds of times

High level of automatic tuning satisfies performance requirements for all locations and operations
Multiple locations
Tuning that meet therequired performance at
all locations with a single
parameter tuning

Multiple operations

15 mm movement
10 mm movement
5 mm movement

Tuning that meet therequired performance forall operations with a single
parameter tuning

Precise!

5 mm movement

5 mm movement

Precise !

メリット①

メリット②

Achieves positioning accuracy exceeding that of an expert

90% reduction in work time and significant reduction in tuning period
Setting

45% shorter

Operation instructions

Results confirmation

Experttuningin positioning settling time

precAIse TUNING

90% reduction in tuning work time

Expert tuning
Time

precAIse
TUNINGStart* Measured in our experimental environment. Measurement of the settling time required forthe position deviation to settle within a specified settling range.

10

Default settings• Oscilloscope waveform• Servo waveform*When using a Displacement sensor to detect vibration at the tip of the device

Position deviation

Automatic processing

Oscilloscope

The driver understands equipment characteristics and implements
tuning while taking control margins into consideration.

One Minute TUNING

Displacement
sensor*

Displacement
sensor*Immediate operation

High precision[Applicable equipment] Equipment such as mounters, coating equipment and processing machines
which require ultra-precise positioning accuracy

Automated

Tuning period : Significant reduction(No human operation)
FinishFinish* Measured in our experimental environment. Measured time required for tuning work to bring
the position deviation within the specified settling range.

Panasonic Industry Co., Ltd.

11

Agile Adaptability to People
Increase productivity from start-up to maintenanceMonitoring/diagnostic function

Optimal man-machine coordination during maintenance work is achieved
through servo intelligence

Immediate response even for maintenance work
Before trouble occurs

Understand the cause and resolve

Prevent trouble from occurring

By recording data before and after trouble occurs, thecause can be analyzed and the issue quickly solved.

Detects signs of abnormal equipment characteristics,
notifying the user before an error occurs. The timing of
mechanical adjustments and parts replacement can beunderstood before equipment stops due to an error.

When signs are detected/
during periodic maintenance

Equipment in operation
Catch signs of changes to characteristics

Deterioration diagnosis function

Load characteristics estimation
Are there any changes inload characteristics?

Torque command diagnosis
Is there torque outside theexpected range?

Record signal waveforms and error information before and after trouble occurs,on a single servo driver
Under development *If an error occurs

Servo driver withlogging function• Simple setup• High-speed logging• Transmission to a host system not required• Data security ensured

Under development

Is there any deterioration of the ball screw mechanism, etc.,
for the specified servo axis?

Torque command diagnosis

Continuously diagnoses changes in load characteristics todetect signs that a motor is not moving as smoothly as usual.

Constantly diagnoses torque commands during operation at aconstant speed to detect issues in drive parts and the motor
itself before a malfunction occurs.

1 Monitor servo data in real time

Real-time monitoring of torque command data at constant speed
Torque command
Torque command value

BeforeComplete functionality
inside the servo

Abnormal noise risk estimation

Load characteristics estimation

Servo drivers are equipped with a logging function. Since data canbe recorded and saved in the servo itself, it is possible to collectdata in detailed cycles, allowing for a detailed analysis of what
happened when an error occurs.

Up to 32 data sets
can be saved

Mechanical adjustment/parts replacement for Immediatesuspect areas
response

After

Records data before and after errors

Analysis is possible on multiple axes together
with time series data
The time stamp function can be used to understand thedetails of alarm occurrence times for each axis, making
it possible to identify the axis on which the alarm
occurred first, the axis with the accompanying alarm,etc., allowing for an analysis of the root cause of the
problem.

Torque command

Motor speed
Upper limit

NormalLower limit
Torque command average value

Time

Torque command value

Drive recorder function

Proactive maintenance of detectedsuspect areas

Motor speed

Error

Upper limit
Lower limit
Torque command average valueTime

2 Estimate the load characteristics• Inertia ratio estimate• Offset load estimate• Dynamic friction estimate• Viscous friction estimate

Abnormal noise risk estimation
Under development

3 Warn if an estimate is out of the set range
Upper
limit

The risk of abnormal noise due to oscillation can be estimatedand diagnosed before it occurs.
Without abnormal noise
Deterioration

NormalAbnormal noise

Deterioration

Estimate
Lower
limit

Error
Estimate

Abnormalnoise risk

When trouble occurs

Under development*

Catch unusual equipment/motor characteristics during operation

Caution

ERROR

Monitor servo motor status in real time to predict and prevent trouble before it occurs

Deterioration diagnosis function

When trouble occurs

Drive recorder function

Before trouble occurs*Release schedule will vary depending on the series and capacity. Please contact us for details.

12

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

13

Agile Adaptability to People
Increase productivity from start-up to maintenanceMonitoring/diagnostic function

Optimal man-machine coordination during maintenance work is achieved
through servo intelligence

Immediate response even for maintenance work
Before trouble occurs

Understand the cause and resolve

Prevent trouble from occurring

By recording data before and after trouble occurs, thecause can be analyzed and the issue quickly solved.

Detects signs of abnormal equipment characteristics,
notifying the user before an error occurs. The timing of
mechanical adjustments and parts replacement can beunderstood before equipment stops due to an error.

When signs are detected/
during periodic maintenance

Equipment in operation
Catch signs of changes to characteristics

Deterioration diagnosis function

Load characteristics estimation
Are there any changes inload characteristics?

Torque command diagnosis
Is there torque outside theexpected range?

Record signal waveforms and error information before and after trouble occurs,on a single servo driver
Under development *If an error occurs

Servo driver withlogging function• Simple setup• High-speed logging• Transmission to a host system not required• Data security ensured

Under development

Is there any deterioration of the ball screw mechanism, etc.,
for the specified servo axis?

Torque command diagnosis

Continuously diagnoses changes in load characteristics todetect signs that a motor is not moving as smoothly as usual.

Constantly diagnoses torque commands during operation at aconstant speed to detect issues in drive parts and the motor
itself before a malfunction occurs.

1 Monitor servo data in real time

Real-time monitoring of torque command data at constant speed
Torque command
Torque command value

BeforeComplete functionality
inside the servo

Abnormal noise risk estimation

Load characteristics estimation

Servo drivers are equipped with a logging function. Since data canbe recorded and saved in the servo itself, it is possible to collectdata in detailed cycles, allowing for a detailed analysis of what
happened when an error occurs.

Up to 32 data sets
can be saved

Mechanical adjustment/parts replacement for Immediatesuspect areas
response

After

Records data before and after errors

Analysis is possible on multiple axes together
with time series data
The time stamp function can be used to understand thedetails of alarm occurrence times for each axis, making
it possible to identify the axis on which the alarm
occurred first, the axis with the accompanying alarm,etc., allowing for an analysis of the root cause of the
problem.

Torque command

Motor speed
Upper limit

NormalLower limit
Torque command average value

Time

Torque command value

Drive recorder function

Proactive maintenance of detectedsuspect areas

Motor speed

Error

Upper limit
Lower limit
Torque command average valueTime

2 Estimate the load characteristics• Inertia ratio estimate• Offset load estimate• Dynamic friction estimate• Viscous friction estimate

Abnormal noise risk estimation
Under development

3 Warn if an estimate is out of the set range
Upper
limit

The risk of abnormal noise due to oscillation can be estimatedand diagnosed before it occurs.
Without abnormal noise
Deterioration

NormalAbnormal noise

Deterioration

Estimate
Lower
limit

Error
Estimate

Abnormalnoise risk

When trouble occurs

Under development*

Catch unusual equipment/motor characteristics during operation

Caution

ERROR

Monitor servo motor status in real time to predict and prevent trouble before it occurs

Deterioration diagnosis function

When trouble occurs

Drive recorder function

Before trouble occurs*Release schedule will vary depending on the series and capacity. Please contact us for details.

12

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

13

Agile Adaptability to Applications
Specialized for applications

Simple installation with no need for a host controller program

Application
specialized
type

Sensor direct feedback (Displacement control)

Sensor direct feedback

Sensor direct feedback (Pressure control) Under development

Pressure control

High-precision gantry control Under development

Analog, pulse train,
ModbusSimplifies complex control programs for stable, highly precise pressure control
Under development*

High response and stable operation control is achieved through full-closed control that is completed within
the driver by directly inputting the pressure sensor output signal to the servo driver.

Block operation editor

High responsiveness and smooth
control not dependent on a controller

Sensor direct feedback

Analog data from sensors, etc., is directly input to the servo
driver, allowing high-speed response control simply by
setting up the servo driver. This makes it possible toeliminate complex host controller programs required in thepast.

Conventional system
Analog sensors

1

Measurement2

3

4Controller

Controller

Servo driver

Sensordirectconnection

Servo driver

Sensor direct feedback

8Servo motor

1

Measurement

Accuracy
depends on
Commandcontroller cycle

2

3

4

5

1

2

3

4

Output to motor

Measurement
6

7

8

5

6

7

8

Smooth, highly
responsive control

Output to motor

Accurate position correction according to workpiece variation

Achieves high-quality
processing/coating witha constant clearance,even for workpieces withvarying heights

Height variation
amountScribing devices

Assembly equipment

High-precision gantry control
Gantry torsion correction (table)

PreciseY2 axis+0.05mm correction

Meandering amountNo special unit is required formeandering correction,
as high-precision meandering
control is achieved withthe servo

Laser processing machines Lithium-ion battery winding machines Packing machines

Press fitting equipment

3000-0.02mm correction
No correction

Screw tightening equipment

Under development*

Gantry torsion correction (real-time)

FasterTorque interference is reduced by detecting and correcting
torsion between axes in real time, enabling high speed
operation.

Coordinated communication
between axes

0

0

1000

999.950.05

2000

2000.02

-0.02

3000

3000

0

Torsion(misalignment of two axes)
No function

positionY1 axis position Y2 axis position Y2axis
correction amount
(mm)
(mm)
(mm)
0

2000

Capping devices

Advanced coordination control, ease of use andsafety functions ideal for gantry mechanisms

Gantry control modelY1 axisMeandering correction

Display bonding equipment

Bonding equipment

Correct by creating and operating
a position correction table in advanceAF

ExampleDispensers
applications

Press machines

1000

Meandering control

Displacement
sensorExampleapplications

Measure positional deviation between two axes beforehandand save as a table to correct torsion and improve positioning
accuracy.

Full-closed control that is completed within the driver through direct input of the displacement
sensor to the servo driver. The high-speed feedback control is not dependent on a host controller,
providing a high-speed response to workpiece variations.
Height variation
correction

Load cell

Agileadaptability

Displacement control (Auto-focus control, meandering control)
Auto-focus control

Load value

7

Output to motor

Analog sensors

Servo driver

7

3

Servo motor

Sensor direct feedback

Displacement
sensor6

CommandServo driver

Displacement
sensor5

The simple block operation editor
allows for immediate configurationof motion patterns with intuitive
operation. High response pressure
control is achieved simply by
selecting control mode switching.

Correction value fortarget load

Unnecessary
torque isgenerated due topulling byother axes

Y1 axisWith function

Y2 axis

Time

(mm)

SimplerGain tuning optimization

Safer

Gantry mechanism tuning, which used to require complex
tuning, is now quicker and easier.
Exampleapplications

Bonding equipment

Substrate inspection equipment

Coordinated stoppage during an alarm

When an alarm occurs on one axis, the two axes are stopped in acoordinated manner to prevent mechanical damage.

Scribing devices

Grinding equipment

Mounters

Laser processing machines*Response time will vary depending on the series and capacity. Please contact us for details.

14

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

15

Agile Adaptability to Applications
Specialized for applications

Simple installation with no need for a host controller program

Application
specialized
type

Sensor direct feedback (Displacement control)

Sensor direct feedback

Sensor direct feedback (Pressure control) Under development

Pressure control

High-precision gantry control Under development

Analog, pulse train,
ModbusSimplifies complex control programs for stable, highly precise pressure control
Under development*

High response and stable operation control is achieved through full-closed control that is completed within
the driver by directly inputting the pressure sensor output signal to the servo driver.

Block operation editor

High responsiveness and smooth
control not dependent on a controller

Sensor direct feedback

Analog data from sensors, etc., is directly input to the servo
driver, allowing high-speed response control simply by
setting up the servo driver. This makes it possible toeliminate complex host controller programs required in thepast.

Conventional system
Analog sensors

1

Measurement2

3

4Controller

Controller

Servo driver

Sensordirectconnection

Servo driver

Sensor direct feedback

8Servo motor

1

Measurement

Accuracy
depends on
Commandcontroller cycle

2

3

4

5

1

2

3

4

Output to motor

Measurement
6

7

8

5

6

7

8

Smooth, highly
responsive control

Output to motor

Accurate position correction according to workpiece variation

Achieves high-quality
processing/coating witha constant clearance,even for workpieces withvarying heights

Height variation
amountScribing devices

Assembly equipment

High-precision gantry control
Gantry torsion correction (table)

PreciseY2 axis+0.05mm correction

Meandering amountNo special unit is required formeandering correction,
as high-precision meandering
control is achieved withthe servo

Laser processing machines Lithium-ion battery winding machines Packing machines

Press fitting equipment

3000-0.02mm correction
No correction

Screw tightening equipment

Under development*

Gantry torsion correction (real-time)

FasterTorque interference is reduced by detecting and correcting
torsion between axes in real time, enabling high speed
operation.

Coordinated communication
between axes

0

0

1000

999.950.05

2000

2000.02

-0.02

3000

3000

0

Torsion(misalignment of two axes)
No function

positionY1 axis position Y2 axis position Y2axis
correction amount
(mm)
(mm)
(mm)
0

2000

Capping devices

Advanced coordination control, ease of use andsafety functions ideal for gantry mechanisms

Gantry control modelY1 axisMeandering correction

Display bonding equipment

Bonding equipment

Correct by creating and operating
a position correction table in advanceAF

ExampleDispensers
applications

Press machines

1000

Meandering control

Displacement
sensorExampleapplications

Measure positional deviation between two axes beforehandand save as a table to correct torsion and improve positioning
accuracy.

Full-closed control that is completed within the driver through direct input of the displacement
sensor to the servo driver. The high-speed feedback control is not dependent on a host controller,
providing a high-speed response to workpiece variations.
Height variation
correction

Load cell

Agileadaptability

Displacement control (Auto-focus control, meandering control)
Auto-focus control

Load value

7

Output to motor

Analog sensors

Servo driver

7

3

Servo motor

Sensor direct feedback

Displacement
sensor6

CommandServo driver

Displacement
sensor5

The simple block operation editor
allows for immediate configurationof motion patterns with intuitive
operation. High response pressure
control is achieved simply by
selecting control mode switching.

Correction value fortarget load

Unnecessary
torque isgenerated due topulling byother axes

Y1 axisWith function

Y2 axis

Time

(mm)

SimplerGain tuning optimization

Safer

Gantry mechanism tuning, which used to require complex
tuning, is now quicker and easier.
Exampleapplications

Bonding equipment

Substrate inspection equipment

Coordinated stoppage during an alarm

When an alarm occurs on one axis, the two axes are stopped in acoordinated manner to prevent mechanical damage.

Scribing devices

Grinding equipment

Mounters

Laser processing machines*Response time will vary depending on the series and capacity. Please contact us for details.

14

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

15

Meeting the need for further miniaturization and increased processing accuracy

MINAS

Contributing to improved equipment performance

Semiconductor manufacturing process

Processing machinery

In response to the demand for miniaturization and multi-layering of semiconductor chips, higher speed and higher
precision control is required in each manufacturing process.

As products become denser and more sophisticated, higher precision control is required for all machines, eventhose that process the individual parts making up the product.

Spin coaters

Dicing saws

Metal processing machines

Laser processing machines

Chemical solutions are evenly spread by rotating the wafer.
The high-speed rotation contributes to increased thinness.

By improving positioning accuracy, micro IC chips can beformed from wafers.

Improved basic performance can increase the gain, enabling
ultra-precise, nanometer-order machining.

High-quality machining is achieved by correcting unevenness
with regard to height with a high level of responsiveness.

Max. motor rotational speed 7150 r/min

Improved positioning accuracy

Encoder resolution 27 bit

Chip transfer machines

Bonding equipment

Press machines

Velocity response frequency 4.0 kHz or more

Sensor direct connection auto-focus control

Injection molding machines
Operation patterns forhigh-response pressure control
can easily be constructedwithout a host program.

Block operation function

Suppresses minute tip vibrations and realizes high-speed
pick & place of microscopic IC chips.

precAIs TUNING

IC handlers

High-response load control prevents mounting failures anddamage to microchips during substrate mounting.

High-response pressure control stabilizes filling pressure
and suppresses filling defects and burrs.

Sensor direct feedback (Pressure control)

Sensor direct feedback (Pressure control)

Substrate inspection equipment

Pipe bending machines
Both position control andpressure control are fully
closed within the servo system,
achieving high speed andaccurate bending.

Sensor direct feedback(Pressure control)

16

Abnormal stops due to overloading are reduced, even when quick
acceleration/deceleration is repeated under high load conditions.

The dual axes of the gantry mechanism allow for smooth,high-speed operation, enabling high-speed inspection.

Extending overload operation timeHigh-precision gantry control

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

17

Meeting the need for further miniaturization and increased processing accuracy

MINAS

Contributing to improved equipment performance

Semiconductor manufacturing process

Processing machinery

In response to the demand for miniaturization and multi-layering of semiconductor chips, higher speed and higher
precision control is required in each manufacturing process.

As products become denser and more sophisticated, higher precision control is required for all machines, eventhose that process the individual parts making up the product.

Spin coaters

Dicing saws

Metal processing machines

Laser processing machines

Chemical solutions are evenly spread by rotating the wafer.
The high-speed rotation contributes to increased thinness.

By improving positioning accuracy, micro IC chips can beformed from wafers.

Improved basic performance can increase the gain, enabling
ultra-precise, nanometer-order machining.

High-quality machining is achieved by correcting unevenness
with regard to height with a high level of responsiveness.

Max. motor rotational speed 7150 r/min

Improved positioning accuracy

Encoder resolution 27 bit

Chip transfer machines

Bonding equipment

Press machines

Velocity response frequency 4.0 kHz or more

Sensor direct connection auto-focus control

Injection molding machines
Operation patterns forhigh-response pressure control
can easily be constructedwithout a host program.

Block operation function

Suppresses minute tip vibrations and realizes high-speed
pick & place of microscopic IC chips.

precAIs TUNING

IC handlers

High-response load control prevents mounting failures anddamage to microchips during substrate mounting.

High-response pressure control stabilizes filling pressure
and suppresses filling defects and burrs.

Sensor direct feedback (Pressure control)

Sensor direct feedback (Pressure control)

Substrate inspection equipment

Pipe bending machines
Both position control andpressure control are fully
closed within the servo system,
achieving high speed andaccurate bending.

Sensor direct feedback(Pressure control)

16

Abnormal stops due to overloading are reduced, even when quick
acceleration/deceleration is repeated under high load conditions.

The dual axes of the gantry mechanism allow for smooth,high-speed operation, enabling high-speed inspection.

Extending overload operation timeHigh-precision gantry control

Panasonic Industry Co., Ltd.

Panasonic Industry Co., Ltd.

17

Servo system MINAS A6 Family

SDG Initiatives/ Website
Sustainability

An extensive lineup of high-speed, high-torque, compact and lightweight servo system

Panasonic Industry practices sustainable management, contributing
to the future of the earth and the development of society

A6 Family
Encoder resolution

23 bitEncoder

Absolute, Incremental,
Battery-less absolute

The Panasonic Group has established “Panasonic GREEN IMPACT”, a long-term environmental
vision aimed at achieving better living and a sustainable global environment.Through this vision we
aim to reduce CO2 emissions associated with our business to virtually zero by 2030, and by 2050,
we aim to create a reduce contributions by* 300 million tons, or roughly 1% of current global
emissions (approx. 33 billion tons).
*Energy-related CO2 emissions in 2019: 33.6 billion tons (source: IEA). 300 million tons calculated using 2020 emission factors

Velocity response frequency 3.2 kHz
Motor capacity

50 W to 22 kW

Reducing ourenvironmental impact

Servo driver[ Rotation type ]High speed communication
For Realtime Express Network
servo driver

MINAS A6S

Open network
EtherCAT communication
servo driver

MINAS A6N

A6SE
General-purpose communication type A6SGSpecial orderMultifunction type
A6SF

Standard type

Standard typeMultifunction type

A6BE
A6BF

Application-optimized type Special order[ DC 24 V /DC 48 V ][ Dual-axis servo driver ]Special orderSpecial order

MINAS A6LMINAS A6 Frame V

Pulse train/Modbus
RTEX-compatible
EtherCAT-compatible

Pulse train/Modbus
RTEX-compatible
EtherCAT-compatible

Medium inertia
Flat typeMedium inertia

Website Information
Medium inertia
Low-speed,high torquePanasonic Industry
Automation Controls website

High inertia

G

100 W to 750 W

MSMF

MQMF

MDMF

MGMF

MHMF

100 V 50 W to 400 W
200 V 50 W to 5.0 kW

100 V 100 W to 400 W
200 V 100 W to 400 W

200 V 1.0 kW to 22.0 kW

200 V 850 W to 5.5 kW

100 V 50 W to 400 W
200 V 50 W to 7.5 kW

Panasonic Industry Co., Ltd.

URL

industrial.panasonic.com/ac/

We provide extensive technical information that ranges from motor selection tomaterials useful for design.

GG A lineup of geared motors is also available

18• RoHS (China)• Toxic Substances Control Act (TSCA, United States)• K-Reach (South Korea)• RoHS (Europe)*Compared with 1.0 kW motors

Servo motor
Low inertia• Front panel model nameplate changed
to laser printing(Responding to overseas environmental regulations)This conserves model nameplate stamps, taking the environmental
impact into consideration.

*: Linear motors supported

Special order

All solder used at our manufacturing sites is free of lead andconforms to the regulations preventing the inclusion of the six
substances in the EU RoHS directive 2011/65/EU and the four
substances in the EU RoHS directive 2015/863/EU. We have also
confirmed that there is no intentional use exceeding the thresholdfor said substances.

We have reviewed packaging materials from the ground up, and areswitching to paper materials with a low environmental impact.

• Displacement control A6BU
• Gantry control*
A6BN[ Linear and DD motor types ]• Lead-free and RoHS-compliant

Achieves a 15% reduction compared to previous models• Reducing the environmental impact of
packaging materials

MINAS A6B

A6NE
Multifunction type A6NF

Position control type

• Compact and lightweight
The MINAS A7 Family of AC servo motors, used in industrial machineryand industrial robots, have achieved industry-leading high speeds andlarge torques while reducing weight by 15% (500 g) compared to ourconventional models.

Special order

Analog/Pulse train input/
Modbus communication

Chemical substance-based
initiatives

Product What's new
information • New product information• Motor news
• Software
version upgrade information

DesignDownload• Manuals• Technical documents• Standard specifications• CAD• Software

Selection

OnlineServo motor
selection software tool
Automatically selects items ranging frommachine elements and operation patterns,
to motors, drivers and optional products!

*We offer a connector type and a lead wire type.

Panasonic Industry Co., Ltd.

19

Servo system MINAS A6 Family

SDG Initiatives/ Website
Sustainability

An extensive lineup of high-speed, high-torque, compact and lightweight servo system

Panasonic Industry practices sustainable management, contributing
to the future of the earth and the development of society

A6 Family
Encoder resolution

23 bitEncoder

Absolute, Incremental,
Battery-less absolute

The Panasonic Group has established “Panasonic GREEN IMPACT”, a long-term environmental
vision aimed at achieving better living and a sustainable global environment.Through this vision we
aim to reduce CO2 emissions associated with our business to virtually zero by 2030, and by 2050,
we aim to create a reduce contributions by* 300 million tons, or roughly 1% of current global
emissions (approx. 33 billion tons).
*Energy-related CO2 emissions in 2019: 33.6 billion tons (source: IEA). 300 million tons calculated using 2020 emission factors

Velocity response frequency 3.2 kHz
Motor capacity

50 W to 22 kW

Reducing ourenvironmental impact

Servo driver[ Rotation type ]High speed communication
For Realtime Express Network
servo driver

MINAS A6S

Open network
EtherCAT communication
servo driver

MINAS A6N

A6SE
General-purpose communication type A6SGSpecial orderMultifunction type
A6SF

Standard type

Standard typeMultifunction type

A6BE
A6BF

Application-optimized type Special order[ DC 24 V /DC 48 V ][ Dual-axis servo driver ]Special orderSpecial order

MINAS A6LMINAS A6 Frame V

Pulse train/Modbus
RTEX-compatible
EtherCAT-compatible

Pulse train/Modbus
RTEX-compatible
EtherCAT-compatible

Medium inertia
Flat typeMedium inertia

Website Information
Medium inertia
Low-speed,high torquePanasonic Industry
Automation Controls website

High inertia

G

100 W to 750 W

MSMF

MQMF

MDMF

MGMF

MHMF

100 V 50 W to 400 W
200 V 50 W to 5.0 kW

100 V 100 W to 400 W
200 V 100 W to 400 W

200 V 1.0 kW to 22.0 kW

200 V 850 W to 5.5 kW

100 V 50 W to 400 W
200 V 50 W to 7.5 kW

Panasonic Industry Co., Ltd.

URL

industrial.panasonic.com/ac/

We provide extensive technical information that ranges from motor selection tomaterials useful for design.

GG A lineup of geared motors is also available

18• RoHS (China)• Toxic Substances Control Act (TSCA, United States)• K-Reach (South Korea)• RoHS (Europe)*Compared with 1.0 kW motors

Servo motor
Low inertia• Front panel model nameplate changed
to laser printing(Responding to overseas environmental regulations)This conserves model nameplate stamps, taking the environmental
impact into consideration.

*: Linear motors supported

Special order

All solder used at our manufacturing sites is free of lead andconforms to the regulations preventing the inclusion of the six
substances in the EU RoHS directive 2011/65/EU and the four
substances in the EU RoHS directive 2015/863/EU. We have also
confirmed that there is no intentional use exceeding the thresholdfor said substances.

We have reviewed packaging materials from the ground up, and areswitching to paper materials with a low environmental impact.

• Displacement control A6BU
• Gantry control*
A6BN[ Linear and DD motor types ]• Lead-free and RoHS-compliant

Achieves a 15% reduction compared to previous models• Reducing the environmental impact of
packaging materials

MINAS A6B

A6NE
Multifunction type A6NF

Position control type

• Compact and lightweight
The MINAS A7 Family of AC servo motors, used in industrial machineryand industrial robots, have achieved industry-leading high speeds andlarge torques while reducing weight by 15% (500 g) compared to ourconventional models.

Special order

Analog/Pulse train input/
Modbus communication

Chemical substance-based
initiatives

Product What's new
information • New product information• Motor news
• Software
version upgrade information

DesignDownload• Manuals• Technical documents• Standard specifications• CAD• Software

Selection

OnlineServo motor
selection software tool
Automatically selects items ranging frommachine elements and operation patterns,
to motors, drivers and optional products!

*We offer a connector type and a lead wire type.

Panasonic Industry Co., Ltd.

19

Safety Precautions• Important Notes on exporting this product or equipment containing this product;
If the end-user or application of this product is related to military affairs or weapons, its export may be controlled by"Foreign
Exchange and Foreign Trade Control Law" of Japan where export license will be required before product can be exported
from Japan.
• This product is designed and manufactured for use in General Purpose Industrial Equipment and it is not intended to be usedin equipment or system that may cause personal injury or death.
• All servicing such as installation, wiring, operation, maintenance and etc., should be performed by qualified personnel only.
• Tighten mounting screws with an adequate torque by taking into consideration strength of the screws and the characteristics
of material to which the product will be mounted. Over tightening can damage the screw and/or material; under tightening
can result in loosening.
• Install safety equipment to prevent serious accidents or loss that is expected in case of failure of this product.
• Consult us before using this product under such special conditions and environments as nuclear energy control, aerospace,transportation, medical equipment, various safety equipments or equipments which require a lesser air contamination.
• We have been making the best effort to ensure the highest quality of our products, however, some applications with exceptionally large external noise disturbance and static electricity, or failure in input power, wiring and components may result in
unexpected action. It is highly recommended that you make a fail-safe design and secure the safety in the operative range.
• If the motor shaft is not electrically grounded, it may cause an electrolytic corrosion to the bearing, depending on the conditionof the machine and its mounting environment, and may result in the bearing noise. Checking and verification by customer isrequired.
• Failure of this product depending on its content may generate smoke of about one cigarette. Take this into consideration
when the application of the machine is clean room related.
• Please be careful when using the product in an environment with high concentrations of sulfur or sulfuric gases, as sulfuration
can lead to disconnection from the chip resistor or a poor contact connection.
• Do not input a supply voltage which significantly exceeds the rated range to the power supply of this product. Failure to heed
this caution may lead to damage of the internal parts, causing smoke and/ or fire and other troubles.
• The user is responsible for matching between machine and components in terms of configuration, dimensions, life
expectancy, characteristics, when installing the machine or changing specification of the machine. The user is also
responsible for complying with applicable laws and regulations.
• Manufacturer's warranty will be invalid if the product has been used outside its stated specifications.
• Component parts are subject to minor change to improve performance.
• Read and observe the instruction manual to ensure correct use of the product.

RepairURL

NEW

Servo System
MINAS A7 Family

MINAS
Industry-leading motion performance* for quick
and intuitive adaptation to demanding situations*As of September 2023, according to in-house research.

Consult to the dealer from whom you have purchased this product for details of repair work.
When the product is incorporated to the machine you have purchased, consult to the machine manufacturer or its dealer.
Electronic data of this product (Instruction Manual, CAD data) can be downloaded from the following web site;industrial. panason ic.com/ac/e/• MINAS, TUNE COMPASS, Realtime Express and RTEX, the RTEX logo are registered trademarks or trademarks of Panasonic Holdings Corporation in Japan andother countries.
• Realtime Express is a high-speed synchronous motion network developed by Panasonic Holdings Corporation.
• EtherCAT is a patented technology and registered trademark licensed by Beckhoff Automation GmbH in Germany.

● Contact to :Panasonic Industry Co., Ltd.,
Industrial Device Business Division
1-1 Morofuku 7-chome, Daito, Osaka, 574-0044, Japan

Panasonic Industrial© Panasonic Industry Co., Ltd.

SearchUnauthorized reproduction from this document is strictly prohibited.
No.AQCTB1101E-2 202406-y2024.62024.6This product is for industrial machines. It cannot be used in general households.