Stage Guidance

How To Use The Stage
ӖAbout the use environment of the stage.
Use environment : 10~50˳, 20~70%RH(non-dew condensation)
Recommendation use environment: 22±5˳, 20~70%RH(non-dew condensation)

Temperature will be change due to species of the stage, motion, performance conditions.
*Don't use in following place.
ӳUnder dust
ӳAround the fireӳAround the water or oil
ӳNo salt and organic solvent

ӳNo direct sunlithg and radiation heatӳNo corrosive gases and flammable gases
ӳNo vibration

ӖTravel distance
ռMotorized stageսռManual stageս'+(CW) direction・・・step away from motor'-(CCW) direction・・・come close to motor＋（CW）

10mm

10mm−（CCW）
50mm

50mm

Travel distance of motorized stage indicated in SPEC table means
fullstroke.For example, travel distance 100mm means that, bycounting a tracing diagram as the center position, a stage can travelfor 50mm in + (CW) direction and for 50mm in - (CCW) direction.

Travel distance of manual stage is described with ±.
For example, ±10mm means that a stage can travel for 10mm inone the direction(+),and for 10mm in the other direction (-) when atracing diagram means travel distance 0mm.(Full stroke is 20mm).

ӖSupplied screws
ӳOur standard hexagon socket setscrews for assembly are attached.

ӖScrew tightening torqueӖHandling of the sensor board

Tightening torque reference list
Screw to be used are selected in accordance with SUS cap bolt.

Our sensor boards operate at 5 to 24 VDC, except for some models, if
voltage or current exceeding the operating range is applied, or if there
is incorrect wiring, risk of component burnout increases.
Please note the following when using.

Structure

SUS, Aluminum, Steel,Brass
SUS, Aluminum, Steel,Brassnominal diameter019

kgf٬cmcN٬m

M1.6

1.5

15

2

3.1

30

2.52.6

6.1

60

3

10.2

100

4

23.5

230

5

46.9

460

6

81.6

800

մӳDo not use the voltage and current exceeding the catalog
description.
մӳPlease be careful of miswiring, such as the wrong polarity of thevoltage and connecting the power supply to the signal line.
In addition, when using the product as an embedded device,switching noise or surge voltage (electrostatic discharge, switchingsurge, etc.) may occur depending on the device configuration, which
may cause the sensor to malfunction or burn out. If noise is expected,
take measures recommended for general industrial equipment beforeuse.

How To Mount The Stage■Mounting motorized stage
There is a stage that is moved its stage table depending on a model.Turn a motor knob to slide a surface.

X-axis motorized stage

Motorized goniometer stage

Motorized rotation stagef

Motorized Z-axis stage■Mounting manual stage
There is a stage that is moved its stage table depending on a model.
X-asis stage
Slide the upper plate back and forward to clamp the screw.

Z-axis stage (horizontal type)
Use the four screw holes toclamp the plate and stage.
(There are only 3 screw holes
for 40X40mm stages).

XY-axis stage
Clamp is the same as the X-axis stage clamp.

Z-axis stage (bracket mount)
Use the four screw holes to clamp
the bracket onto the stage.
(In case of the screw holes mightbe 2 places)■About the object that is mounted upper or lower the stage
When a stage is mounted on uneven or an object that is uneven, the stage table may deformed, and may also affeted the accuracy.

■Mounting surface & direction
The function is not satisfied due to a stage model and mouting direction. Please refer as belows for upper and side mounting.

Linear-ball guide/Crossed-roller guide & etc.

Motorized X-axis stage

Available to use
mouting on upper
because load that is
applied to a guide.
The catalog
specification is notsatisfied.

Moment load affects the amountof load applying to a guide andmotor.When the power is off
and a drop-prevention method isneeded, we recommend a stage
with electromagnetic brake forthat purpose.

Manual horizontal Z-axis stage

Manual Z-axis stage

B33-KGA and etc.
Since the direction ofspring is the same as
gravity, the weight ofstage affects the stage
performance.

There is a model that canchange a mounting methodof micrometer head so thata stage will not descendwith its weight.

020

Stage GuidanceGrease for stages
Optimum grease is applied for all of our products for smooth operation.
Below list shows the standard grease.
Grease for vaccum is available depending on the model.
GreaseChange P.027〜

Grease list
Viscosity increasing agentBase oilFeatures

Universal grease
Lithium soap
Mineral oil
For precisionapparatus

Cross roller guide●Linear ball guide(manual)Linear guide CAVE-X(motorized)
Linear ball guide(motorized)●Slide guide●
Dovetail groove
Slide guide
Slideways
Deep-groove bearing●Bearing
Angular contact ball bearing●
Cross roller bearing(sealded)*
Micrometer headFeeding screw
Driving part
Precision feeding screw
Ball screw●
Worm gear
Fulcrum part of a lever●Center bearing
Contact partTop of the micrometer headTop of the feeding screw
Screw part
Clamp knob
*Cross roller bearing that is sealed is free from mentainance.

Clean grease
Optical grease
Lithium soap
Lithium soap
Synthetic fluid
Synthetic fluid
Low-viscous resistance value Special grease for
Low-dusting
opticalFretting resistance Prevent oozing
●
●
●
●
●

●
●
●
●

Maintenance●Frequency of maintenanceNo specific regularly independent of grease type.
Please check grease condition at lease per month, and apply as needed.

●How to grease up
1.Wipe off old grease the area within view.
2.Apply grease to the guide・ball screw with syringes.
3.To move full stroke for two or more times .
4.Wipe away excess grease.

021

For screw driving
For feeding screw Molybdenum grease Damper grease
Lithium soap
Urea group
Li/Ca mixed
Lithium soap
Mineral oil─
Mineral oil
Synthetic fluid
For precision apparatus Mitsutoyo standard Molybdenum dioxide
Long term lubrication
Prevent oozing
High lubrication property Superior in wear resistance additive
Low torqueOxidation stability High extreme pressure

●
●

●●

Stage Dust Emergence Test
Considering clean room-use, we have implemented a dust emergence test with stepping motor controller, which composes of Suruga Seiki's automaticalignment system.
*Judging the applicability to clean room-use may vary depending on entire equipment configuration, frequency of use and operating condition.
This data can be used as reference value for purpose of product selection.
With this test, Suruga Seiki's standard grease was applied.
We can change a grease to clean room-use grease (AFF grease manufactured by THK).

To Clean booth

Air Dust Remover

Air Flow
Oriﬁce Mater for
ﬂow Measurament

HEPA＋ULPA

Sampling Nozzle forConcetration Measurament

Test Object Installation Part

From Air-FanMeasuring partHatch
500×700

PaticalCounter
Contraction &Mixture Part

1. Test Type: Test for Dust Emergence Amount
2. Ambient Condition: Temperature (24~28℃), Humidity (48~54%)
3. Location of Test: Japan Air Cleansing Association Lab 5-27-1, Inari, Kusakacity, Saitama
4. Test Object: Description <6-axis motorized stage ES6200>
Dimension (H×W×D) 450×300×250
5. Test Subject: Amount of Particle Dust
6. Test Method: JIS B 9926 Clean room-Measuring method for dust amount
generated from motion mechanism of application instrument
Test Equipment:
Vertical type test equipment for dust amount (figure 1)
Light scattering particle measuring instrument:
metOne205
7. Motion Terms: Details of one cycle (3 minutes)
I. Origin return process of each of 6-axis
II. Each of 6-axis travels from mechanical origin to initialposition
III. Excute virtual contact sensing
Repeat the following process five times.
(Travel θ_x to left 0.4°and to right by 0.2°
, travel θ_y to left
0.2°and to right by 0.2°
, forward Z by 5μｍ )IV. Execute virtual peak search
Repeat the following process five times.
(Travel X by 10μｍ, travel Y by 10μｍ, travel X by -10μｍ,travel Y by -10μｍ)
8. Result of Test: Test Object: 6-axis motorized stage
Test Airflow (Q): 1.0[m3/min](Suction Acount：1cf/min)

Range of Particle Diameter[μｍ]

Concentration of Particles in
Background [pcs/m3] (Cb)
(95% two-sided confidence limit)

Average Concentration of Particles
when electricity is on [pcs/m3] (C)(95% two-sided confidence limit)

0.16 and higher, l
ess than 0.3

8.8（6.0〜12.6）

13.0（8.1〜19.6）

0.3−0.5

2.4（1.0〜4.6）

2.9（1.0〜6.9）

0.5−1.0

0.0（0.0〜1.1）

2.9（1.0〜6.9）

1.0−5.0

0.0（0.0〜1.1）

4.1（1.7〜8.5）

5.0−10.0

0.0（0.0〜1.1）

0.6（0.0〜3.3）

10.0 and higher

0.0（0.0〜1.1）

0.0（0.0〜2.2）

Average Amount of Particle Emergence
P=(C-Cb)Q [pcs/min] (P)Since the zone of 95% two-sided confidence limit
at the time when electricity is on is overlapping withbackground (when it's stopped) and does not separate
from it, it indicates that there was no significant dustemergence that can be differentiated from background.

4.1
Since the zone of 95% two-sided confidence limit
at the time when electricity is on is overlapping withbackground (when it's stopped) and does not separate
from it, it indicates that there was no significant dust
emergence that can be differentiated from background.

022

Stage GuidanceGreace Change
Grease used for a positioning stage can be exchaged with greace applicable for a clean room and vacuum use.

〈Motorrized Stage〉
Ordering with using option code may customize grease-changed for only SS manual Stage.
You may receive a product of which grease is changed【Number of model and handling fee】
Model number ending code
Name
Model numberMaker
Range or usable temperature-J
Grease for Clean room
AFF
THK
−40〜120℃-K
Grease for Clean room
LG2
NSK
−20〜70℃-L
Grease for vaccum
FOMBLIN
Solvay Specialty Polymers Japan K.K.
−20〜250℃*KXT/CAVE-X(linear ball guide) series, KXS(slide guide) series apply Clean environment grease(AFF) in standard.

■Not-eligible products・Motorized gonio stage, motorized rotation stage and horizontal Z-axis stage is not available changing.

[Grease Change Spot]●Guiding surface (surface-sliding part, rubbing part, bearing part)●Motion transmission direction converting spot (ball screw, worm and gearwheel part)*Ball screw, guide and bearing are processed with coating after cleansing in plant.
Separate quote may be prepared for cleansing, coating and surface treatment processes operated by manufacturers.
*Grease change of stepping motor is not available.

[Accuracy Guarantee (Grease for Clean room)]
Since viscous resistance of grease increases, it becomes difficult for this grease to fulfill the same specification of standard grease type described oncatalog. Furthermore, it tends to have bad tracking of micro-step feeding.
Having done accuracy measurement of all products that have changed grease, the following is the accuracy guarantee.
<Linear motion type> Halt performance data is 1.5 times of standard grease type described catalog<Rotary motion type> Halt performance data is 2.0 times of standard grease type described catalog

Linear ball guide PG615
Positioning Accuracy
Repeatablity
Lost Motion
BacklashTransversal Deviation
Surface Wobbling AmountCataolg Product（Standard Product） Grease-changed Product(Custom)Within 6μm
Within 9μm
Within ±0.5μm
Within ±0.75μm
Within 1μm
Within 1.5μm
Within 0.5μm
Within 0.75μm
Within 15μm
Within 22.5μm
Within 5μm
Within 7.5μm[Accuracy Guarantee [Grease for vacuum]
Shipping accuracy may vary due to viscous resistance of grease and etc. Also, it becomes difficult to maintain the MAX speed described in catalog.
Please contact us for details.

023

〈Manual stage〉
Ordering with using option code may customize grease-changed for only SS manual stage.
You may receive a product of which grease is changed by ordering with a model number ending with –CRG1, 2 or 3."【Model number ending code】
Model number ending code
Name
Model numberMaker
Range or usable temperature-J
Grease for Clean room
AFF
THK
−40〜120℃-L
Grease for vaccum
FOMBLIN
Solvay Specialty Polymers Japan K.K.
−20〜250℃■Not-eligible products
・Available only SS stage (BSS/BSB/BSL series)[Grease Change Spot]
Guiding surface (surface-sliding part, guide part)
Motion transmission direction converting spot (Micrometer head, Feeding screw, Leverage axis, Pin top)
*Micrometer head is processed with coating after cleansing in plant.

[Accuracy Guarantee (Grease for vacuum)]
Shipping accuracy may vary due to viscous resistance of grease and etc.
Please contact us for details.

024