4

6

8

© H - S Q U A R E C O R P O R AT I O N 2 02 0

8Cleanroom Handling ToolsVacuum Wand Sets StandardsH-Square o ers an extraordinary number of di erent vacuum wand component options.
These six prepackaged vacuum wand sets are considered by most the industry standard vacuum wandcombinations. Set includes everything needed to start handling wafers safely using house vacuum. H-Squarerecommends house vacuum greater than 22  Hg for best performance.
These are xed sets; no part substitutions.
SMALL DEVICE50mm76mm

100mm

125mm

150mm

200mm

300mm

S,G

VWSET-AVWSET-B

S,G

S,G

S,G

S,G

VWSET-C

S,G,C,T

S,G,C,T

S,G,C,T

S,G,C,TVWSET-D

S,G,C,T

S,G,C,T

S,G,C,TVWSET-E

S,G,C,T

S,G,C,T

S,G,C,TVWSET-FSD(SD) Small Device; (S) Silicon; (G) Glass; (C) Compound - GaAs, InP, SiC, GaN; (T) Thin < 350 microns

VWSET-A

An H-Square standard, the VWSET-A vacuum wand set is used for handling300mm wafers. Set includes everything needed to start handling waferssafely using house vacuum.
This is a xed set; no part substitutions. Kit includes:T3PKAS1NO3AS1HSU3CTA12CC11SDS

ESD PEEK Tip (1)Normally Open Vacuum Wand (1)Vacuum Wand Shut-o Holder (1)Adapter Assembly for grounding coil cord (1)ESD Coiled Tubing (1)

VWSET-B

An H-Square standard, the VWSET-B vacuum wand set is used for handling200mm and smaller silicon and glass wafers. Set includes everything neededto start handling wafers safely using house vacuum.
This is a xed set; no part substitutions. Kit includes:T693PKAS3NOASPF2HSUCTA12CC11SDS

ESD PEEK Tip (1)Normally Open Vacuum Wand (1)Vacuum Wand Shut-o Holder (1)Adapter Assembly for grounding coil cord (1)ESD Coiled Tubing (1)Visit www.h-square.com for additional product informationVWSET-C

An H-Square standard, the VWSET-C vacuum wand set is used for handling200mm and smaller compound (GaAs, InP, GaN) and thin wafers. Setincludes everything needed to start handling wafers safely using housevacuum.
This is a xed set; no part substitutions. Kit includes:T793PKAS3NOASPF2HSUCTA12CC11SDS

ESD PEEK Tip (1)Normally Open Vacuum Wand (1)Vacuum Wand Shut-o Holder (1)Adapter Assembly for grounding coil cord (1)ESD Coiled Tubing (1)

VWSET-DAn H-Square standard, the VWSET-D vacuum wand set is used for handling100mm and smaller compound (GaAs, InP, GaN) wafers. Set includeseverything needed to start handling wafers safely using house vacuum.
This is a xed set; no part substitutions. Kit includes:T75072PKASNOASQ2HSUCTA12CC9SDS

ESD PEEK Tip (1)Normally Open Vacuum Wand (1)Vacuum Wand Shut-o Holder (1)Adapter Assembly for grounding coil cord (1)ESD Coiled Tubing (1)

VWSET-E

An H-Square standard, the VWSET-E vacuum wand set is used forhandling 150mm and smaller compound (GaAs, InP, GaN) and thinwafers. Set includes everything needed to start handling wafers safelyusing house vacuum.

This is a xed set; no part substitutions. Kit includes:T794PKASNOASPF2HSUCTA12CC9SDS

ESD PEEK Tip (1)Normally Open Vacuum Wand (1)Vacuum Wand Shut-o Holder (1)Adapter Assembly for grounding coil cord (1)ESD Coiled Tubing (1)

VWSET-F

An H-Square standard, the VWSET-F vacuum wand set is used forhandling small device substrates, die, packages, and optics 4-15mm insize. Set includes everything needed to start handling wafers safely usinghouse vacuum.

This is a xed set; no part substitutions. Kit includes:VCA125DPNOASLAHSUCTA06CC4SDSBCHN-16(0.12 diameter) Vinyl Vacuum Cup (1)Normally Open Vacuum Wand (1)Vacuum Wand Shut-o Holder (1)Adapter Assembly for grounding coil cord (1)ESD Coiled Tubing (1)Bent Hub Needle (1)10HSUPT holder and vacuum cord CC11SDSshown; purchased separately

12T3PKAS1 *300mm standard vacuum tip,straight,antistatic PEEKT3PKAS45

45° 300mm tip / adapter assembly, offset, antistatic PEEKT3PKUTF

300mm vacuum tip, straight, PEEK with UHMW touchpad

T3PK45UTF

NO3AS1*

45° 300mm tip / adapter assembly,offset, PEEK with UHMW touchpad

press-ﬁt, wand handle, normally-open ﬂow, antistatic PVDF

HSU3 *table / wall mount, normally-open wand shutoff holder, Polypropylene

HSU3PT

tabletop weighted pedestal, normally-open wand shutoff holder, Polypropylene

CC11SDS *heavy-duty, vacuum coil cord, wire, antistatic Polyurethane

CC11ESD1

heavy-duty, vacuum coil cord, wire + ground adapter, antistatic Polyurethane

CC11S

heavy-duty, vacuum coil cord, internal spring, antistatic Polyurethane

SRTAS

straight 6’ (1829mm), vacuum cord, internal spring + ground adapter, Silicone

CTA12 *

dual hose barb with grounding wire

HBQDM

quick-disconnect, male, metal

CQDM

quick-disconnect, female, metal* common selection for 300mm wafer handling

14

16

Visit www.h-square.com for additional product information

VACUUM TIP PART NUMBERSDESCRIPTION

T693PKAS3 *standard vacuum tip - silicon / glass,3°straight,antistatic PEEK

T693PKAS3D / T693PKAS3U (not pictured)

3D - 30°down bend; 3U - 30°up bend T693PKAS3T793PKAS3 *standard vacuum tip - compound / thin,3°straight,antistatic PEEK

T793PKAS3D / T793PKAS3U (not pictured)T796PK

3D - 30°down bend; 3U - 30°up bend T793PKAS3

vacuum tip - silicon / compound / thin,3°straight,antistatic PEEK with UHMW touchpad

T796PK3D / T796PK3U (not pictured)

3D - 30°down bend; 3U - 30°up bend T796PK

T695PKAS

vacuum tip - silicon / glass / bonded / heavy,4°straight,antistatic PEEK

T695PKAS3D / T695PKAS3U (not pictured)T696PK

3D - 30°down bend; 3U - 30°up bend T695PKASvacuum tip - silicon/glass,3°straight,antistatic PEEK with UHMW touchpad

T696PK3D / T696PK3U (not pictured)

3D - 30°down bend; 3U - 30°up bend T696PK

T693PKAS3-B

vacuum tip - silicon/glass,3°straight, with backside bump, antistatic PEEK

T75051PKAS

vacuum tip - silicon / glass / compound,quicklock, lift spatula, antistatic PEEK

T75051V

vacuum tip - silicon / glass / compound,quicklock, lift spatula, Vespel SP1®

T75083PKAS **vacuum tip - 150mm, silicon / glass,quicklock, knife-edge, antistatic PEEK

T75040V **T75082Q (not pictured)vacuum tip - 150mm,silicon / glass,quicklock, knife-edge, Vespel SP1®
vacuum tip - high temperature, silicon / glass,quicklock, with tubing, quartz

WAND HANDLE PART NUMBERSDESCRIPTIONNOASPF2 *press-t, wand handle, normally-open ow, antistatic

NOASQ2

quick-lock, wand handle, normally-open ow, antistatic

HOLDER PART NUMBERSDESCRIPTION

HSU *table / wall mount, normally-open wand shutoff holder

HSUPT

tabletop pedestal, normally-open wand shutoff holder

VACUUM CORD PART NUMBERSDESCRIPTION

CC11SDS *heavy-duty, vacuum coil cord, wire

CC11ESD1heavy-duty, vacuum coil cord, wire + ground adapter

CC11S

heavy-duty, vacuum coil cord, internal spring

CC9SDS

medium-duty, vacuum coil cord, wire

CC9ESD1

heavy-duty, vacuum coil cord, wire + ground adapter

SRTASGROUND ADAPTER PART NUMBERS

straight 6 (1829mm), vacuum cord, spring + ground adapterDESCRIPTION

CTA12 *

dual hose barb with grounding wire

HBQDM

quick-disconnect, male, metal

CQDM

quick-disconnect, female, metal* common selection for 125-200mm vacuum wand installations* * not compatible with 200mm wafers

18

20

Visit www.h-square.com for additional product information

VACUUM TIP PART NUMBERST75072PKAS *DESCRIPTION

standard vacuum tip - silicon / glass / compound,quicklock, lift spatula, antistatic PEEK

T75072V *standard vacuum tip - silicon / glass / compound,quicklock, lift spatula, Vespel SP1®

T791PKAS

vacuum tip - compound / thin,straight,antistatic PEEK

T791PKAS3D / T791PKAS3UT794PKAS *3D - 30°down bend; 3U - 30°up bend T791PKASstandard 76-100mm GaAs vacuum tip - compound / thin,straight,antistatic PEEK

T794PKAS3D / T794PKAS3UT691PK

3D - 30°down bend; 3U - 30°up bend T794PKASvacuum tip - silicon / compound / thin,straight,antistatic PEEK with UHMW touchpad

T691PK3D / T691PK3U

3D - 30°down bend; 3U - 30°up bend T691PK

T75070V

vacuum tip - high temperature, quicklock, with knife-edge,Vespel SP1®

T75055V

vacuum tip - high-temperature, quicklock, with long-blade spatula,Vespel SP1®

T75049V

vacuum tip - high-temperature, quicklock, with short-blade Spatula,Vespel SP1®

T75033QV

vacuum tip - high-temperature, quicklock, with tubing, quartz with Vespel SP1®

T694PKAS

vacuum tip - silicon / glass,straight,antistatic PEEK

T694PKAS3D and T694PKAS3U

3D - 30°down bend; 3U - 30°up bend T694PKAS

WAND HANDLE PART NUMBERSDESCRIPTIONNOASPF2 *press-t, wand handle, normally-open ow, antistatic

NOASQ2 *quick-lock, wand handle, normally-open ow, antistatic

HOLDER PART NUMBERSDESCRIPTIONHSU *table / wall mount, normally-open wand shutoff holder

HSUPTtabletop pedestal, normally open wand shutoff holder

VACUUM CORD PART NUMBERSDESCRIPTION

CC9SDS *medium-duty, vacuum coil cord, wire

CC9ESD1heavy-duty, vacuum coil cord, wire + ground adapter

SRTASGROUND ADAPTER PART NUMBERS

straight 6 (1829mm), vacuum cord, internal spring + ground adapterDESCRIPTION

CTA12 *

dual hose barb with grounding wire

HBQDM

quick-disconnect, male, metal

CQDM

quick-disconnect, female, metal* common selection for 50-100mm vacuum wand installations

2224

VCAS1255-pack antistatic rubber vinyl cup, use 16-gauge hub needle

VCAS1605-pack antistatic rubber vinyl cup, use 16-gauge hub needle

VCAS1965-pack antistatic rubber vinyl cup, use 16-gauge hub needle

VCAS199

5-pack antistatic rubber vinyl cup, use 16-gauge hub needle

VCAS585-pack antistatic rubber vinyl cup, use NST vacuum wand

MPCSD-06

10-pack Antistatic rubber polyurethane tip, use 21-gauge hub needle

MBNCSD-12

10-pack antistatic rubber Nitrile Buna-N cup, use 18-gauge hub needle

BNCSD-25

10-pack antistatic rubber Nitrile Buna-N cup, use 16-gauge hub needle

BNCSD-38

10-pack antistatic rubber Nitrile Buna-N cup, use 16-gauge hub needle

BNCSD-50

10-pack antistatic rubber Nitrile Buna-N cup, use 16-gauge hub needle

BNCSD-62

10-pack antistatic rubber Nitrile Buna-N cup, use 16-gauge hub needle

BNCSD-75

10-pack antistatic rubber Nitrile Buna-N cup, use 16-gauge hub needle

VCC-015

1-pack antistatic Vespel® tip, use 16-gauge hub needle

VCC-020

1-pack antistatic Vespel® tip, use 16-gauge hub needle

VCC-040

1-pack antistatic Vespel® tip, use 16-gauge hub needle

VCC-060

1-pack antistatic Vespel® tip, use 16-gauge hub needle

VCC-121-pack antistatic Vespel® tip, use 16-gauge hub needle

VCC-251-pack antistatic Vespel® tip, use 16-gauge hub needle

VCC-31

1-pack antistatic Vespel® tip, use 16-gauge hub needle

TC-19

1-pack PTFE Teﬂon® tip, use 15-gauge hub needle

TC-25

1-pack PTFE Teﬂon® tip, use 15-gauge hub needle

BNHD-195-pack, bent, plastic hub needle with epoxy mounted PFA Teﬂon® tube tip

BHHD-245-pack, bent, plastic hub needle with epoxy mounted PFA Teﬂon® tube tip

SRC-2510-pack rubber silicone cup, high-temperature, use 16-gauge hub needle

SRC-3810-pack rubber silicone cup, high-temperature, use 16-gauge hub needle

DPNOAS2LA *luer-lock ﬁtting, wand handle, normally-open ﬂow

DPNOAS2NA

NST ﬁtting, wand handle, normally-open ﬂow

HSU *table / wall mount, normally-open wand shutoff holder

HSUPT

tabletop pedestal, normally-open wand shutoff holder

CC4SDS *light-duty, vacuum coil cord, wire

CTA06 *

dual hose barb with grounding wire

AASPFLLHNF

adapter , convert press ﬁt wand / Freedom Wand™ to hub needle mount

26

28

30

32

34

Visit www.h-square.com for additional product informationBright Light Macro InspectionH-Squares second generation BLIS solution is a table-top macro-inspection station that utilizes a bright white3995 Lumens programmable LED light to detect subtle, low-contrast defects on complex assemblies, likesemiconductor wafers, photomasks, and opto-electronic assemblies. The stray light capturing BLIS can be easilyadded to the production line to accommodate real-time inspection for scratches, defects, particles and haze withgreater accuracy and repeatability than human inspectors with standard ambient lighting conditions.

Bright-Light InspectionMedium Boxes

BLIS

Tabletop automatic on / o motion detectionbright light view box. Light absorbing matteblack anodized nish 18 x 18 x 18 box withadjustable pure white LED bulb. Optional yellow lter lens included with the order. Ideal forphotomask or macro-wafer inspections.
Designed for ISO Class 5 (FS209E Class 10)Wafer sizes to 300mm; Mask sizes to 9 x 9Ordering Part Number

110-240VAC

BLISThe 4000-color temperature LED lighting is ideal in applications requiring macro-inspection of highly complexelectromechanical assemblies for sub- and nal assembly verication for detection of subtle aws in highvalue components. A sub-420nm light lter is included with the system for macro inspection applications in thephotolithography area. The long-life 50,000-hour rated light source only illuminates the inspection area whenoperator motion is detected. The BLIS a is fully adjustable for the light intensity and the length of time the lightstays on after no-motion is detected inside the box.

36

38

40

42

44

46

48

50

ANFEZQ8 main roller

PRA8

ANFEZQ8 notch catch roller

NFNRQ

ST-2.5KQ

ANFEZ all roller bearing,UHMW

A000-730

NOASQ2tubing 2.5”

NOASQ2button assembly

BPVPASNO

ANFEZ all switch bulb, LED,12V

600433-12

NOASPF2 button assembly

BPVPASNO

ANFEZQ6 main roller

PRA23456

NO3AS1

BPVPNO3AS

ANFEZQ6 notch catch roller

A000-1078

401979AFEZ allroller bearing,UHMW

A000-730

BPVPNO3AS

AFEZ allswitch bulb, LED,12V

600433-12

DPNOAS2LA button assembly

BPVPASNO

AFEZ-3

main roller

PRA23456

DPNOAS2NA button assembly

BPVPASNO

AFEZ-4main roller

PRA23456

FWCR3

ﬁlter change kit

FWCR2FA

AFEZ-5main roller

PRA23456

FWCR2

ﬁlter change kit

FWCR2FA

AFEZ-6

main roller

PRA23456

FWCR-4ﬁlter change kit

FWCR2FA

AFEZ-8main roller

PRA8

MFEZ allroller bearing,UHMW

A000-730

MFEZ-3

main roller

PRA23456

MFEZ-4main roller

PRA23456

MFEZ-6

main roller

PRA23456

MFEZ-8main roller

PRA8

NFEZ allroller bearing,UHMW

NFEZQ8main roller

NFEZQ8notch catch roller

NFEZQ6

main roller

PRA23456

NFEZQ6notch catch roller

A000-1078

button assembly

NO3AS1 male wand / tip adapterT3PKAS1

female wand / tip adapter

MISC2500 bulb, halogen,MR16603258

FWCR3

power supply, 18V

602726

FWCR2

power supply, 18V

602726

FWCR-4power supply, 18V

602726

FWTTA1

power supply, 12V

603280

SQ22949

power supply, 12V603280

FWA3AS2 battery 10V,NIMH

602526

FWAHAS2 battery 10V,NIMH

602526

ANFEZ

power supply, 12V

603280

AFEZ

power supply, 12V

603280AWT

power supply, 12V

603280AET

power supply, 12V

603280

LCT

power supply, 24V

603898WPR

power supply, 24V

603898

SMIFPO

power supply, 24V

603898AFO

power supply, 24V

603898AVT

power supply, 24V

603898AWM2

power supply, 24V

603898alloutlet cord,AC602298

alloutlet cord,EUR 220V

602299alloutlet cord,UK 220V

602300A000-730PRA8NFNRQFFTBAS-456 main roller

A000-379-2

FFTB1-2

main roller

A000-152-1

FFTB1-2

wafer support

A000-103-1

FFTB1-3

main roller

A000-152-1

FFTB1-3

wafer support

A000-103-1

FFTB1-4

main roller

FFTB1-4

wafer support

A000-116-1

FFTB1-5

main roller

PRS5/6

FFTB1-5

wafer support

A000-116-2

FFTB1-6

main roller

PRS5/6

FFTB1-6

wafer support

A000-116-3

FFTB1-8

main roller

B000-464

FFTB1-8

wafer support,left

B000-470

FFTB1-8

wafer support,rightB000-471

PRS4---°©

-

M A T E R I A L S------°-

----

©

-

M A T E R I A L S------

----

©

-

C A R E-&M A I N T E N A N C