SD-MSS-1K series
Device information
SD-MSS-1K2G

SD-MSS-1K2GP

for Gas/Odor sensing

Version 5.2

Specifications

Passivation

CodeAlSD-MSS-1K2G

SD-MSS-1K2GP

Membrane size [μm]1000 round

Membrane thickness [μm]2.8 (typical)

Chip dimensions [mm]5.5 x 2.5 x 0.3

Resistance value [kΩ]

2–6Electric configuration

Full bridge, 4 pads
0.5 mm pitchNo

Coating
Passivation

NoYes

Handling of chips
To remove the chip from gel sheet, it is recommended to use a sharp plastic tweezers.
(1) Carefully push the tips of tweezers into the gel sheet, like tocreate a little space in between the chip back and the gelsheet. Don’t clamp the chip at this step.
(2) Slowly move the tips laterally and clamp the chip. Carefully
pick up the chip.

Example: SIPEL 1315-SA

If the tips are too sharp, make them blunt.

Dimensions

SD-MSS-1K2G SD-MSS-1K2GP
Al electrodes
1.05

nitrideoxide
Silicon

1.48

oxide

5.5

Silicon
oxide

0.33

0.24

0.36

nitrideCross-section

0.5
2.5

The chip thickness is approximately 0.3 mm.
Approximate values, Unit [mm]

Device structure

SD-MSS-1K2G SD-MSS-1K2GP
Silicon membrane:
No oxide (only native oxide) at both
top and back surfaces

1 mmPiezoresitors:
The piezoresistors are covered withsilicon nitride.

Device structure

ONLY SD-MSS-1K2GP
Passivation
AlThe aluminum electrodes excepts thepads are covered with an oxide layer.

For any “liquid” or “wet” applications,please use SD-MSS-1K2GP.

Basic read-out configuration
ExampleThe bridge voltage should be a NEGATIVE voltage, if
the substrate has to be the ground potential (0V).

100kV-V+V+Offset
Compensation
1M

100n
1n

V-BRIDGE

10kPC
731 RG+A+ VDD A- VSS
10n

6AD6278 RG
210k1nDAQ

54LP filter

Typical values▪ V+ = +10V, V- = -10V
▪ AD627 (Instrumentation amplifier)▪ Gain = 100 ~ 500▪ V-BRIDGE = -1V▪ Resistance between VDD-VSS: approximately 2.0 kΩ - 15.0 kΩ
▪ Filter frequency = 760 Hz▪ Connecter: FH34S-4S-0.5SH (Hirose Electric Co Ltd)▪ DAQ (National Instruments), Microcontroller, or similar

100nV-• Don’t apply too high voltage. Maximum voltage = -1V• This is an example and all components should be carefully
selected according to your own application.
• All specifications are subjected to change without notice.

Commercial connectors

SD-MSS-1K2G SD-MSS-1K2GP❑ Hirose FH34(S) series, e.g., FH34SRJ-4S-0.5SH (4 pin) : Back rotary clamp, easy to use. Although it does notstrongly clamp the chip, this connector is good for most of the E-nose applications.
https://www.digikey.ch/product-detail/en/hirose-electric-co-ltd/FH34SRJ-4S-0.5SH-50/H125780CT-ND/9216315❑ Molex 54550-0471 (4 pin) : Front slider type. Not simple to fix the chip, but the chip can be strongly
clamped. The alignment between the pads on the chip and the connector pins is highly visible. The footprintof the connector is relatively large. This connector is good for Torque Magnetometry applications.
http://www.digikey.ch/product-detail/en/molex-llc/0545500471/WM8825CT-ND/3197255❑ Panasonic AYF530435 (4 pin) : Back rotary clamp, easy to mount the chip. This is almost the same features
as Hirose FH34. An advantage is its compact size.
https://www.digikey.ch/product-detail/en/panasonic-electric-works/AYF530435/255-3056-1-ND/2504454❑ Other bland are of course usable if the following conditions are met.

Gently insert the chip.
Don’t push too much.

• FPC (Flexible Printed Circuit)/ FFC(Flexible Flat Cable) connectors• 0.5 mm pitch• For 0.3 mm-thick cable• Top, or top&bottom, contact

Receptor layers❑ Receptor Materials (Only Polymer Examples):❑ Manual Coating Setup▪ CMC = carboxy methyl cellulose▪ PEO = poly-(2-ethyl-2-oxazoline)▪ PEGMEMA = polyethylene glycol methyl ether methacrylatemacromere▪ HPC = hydroxypropyl cellulose▪ PAA-AA = poly(acrylic acid)-acetic acid
▪ PVPy = poly(vinylpyridine)▪ PIB = butyl rubber▪ PEI = polyethylenimine
Hans Peter Lang, et al, “Piezoresistive Membrane Surface Stress Sensors for
Characterization of Breath Samples of Head and Neck Cancer Patients”,
Sensors (Basel). 2016 Jul; 16(7): 1149, doi: 10.3390/s16071149

XYZ-stage

Simple coating method(1) The drop in the photo isabout 0.85 mm in diameter.
That corresponds
approximately 0.32 µL.

(2) Slowly move down the tip
until the drop touches themembrane.

(3) Fix the tip position and suck- (4) A small amount in the order ofout extra volume.
0.1 µL is left on the membrane.

Used pipette tip: no bland, described 0.1-10 µL,
external diameter = about 0.7 mm, internal hole = about 0.4 mm in diameter.

MSS 8ch Readout Module

MSS-8RMAVAILABLE