TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 1

TABLE OF CONTENTSTECHNICAL PROGRAM
Technical Program Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Sunday Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Monday Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Tuesday Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Wednesday Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Thursday Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
Poster Presentations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Late News . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87

Garden of irises and water lilies in Kyoto (Image by JFBRUNEAU; AdobeStock).

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TECHNICAL PROGRAM INFORMATION
Parallel Oral Sessions
Each day papers will be presented in 4 parallel sessions. There will be a total of
40 oral sessions throughout the 4 days of the Conference.

Poster Sessions
The 3 poster sessions will be held in Event Hall. Posters will be on display from
Monday at 10:15 through Wednesday at 16:15. All poster papers are listed with
their assigned number and presentation day. Authors will be available for questions
during their appointed time.

Guide to Understanding
Paper/Session Numbering
Each paper is assigned a unique number which clearly indicates when and where
the paper is presented. The number of each paper is shown before the paper title.
Typical Paper Number: M4B.003• The first letter (i.e., M) indicates the day of the Conference:
M = Monday
T = Tuesday

W = Wednesday
Th = Thursday• The second number (i.e., 4) indicates what time during the day thesession is being presented:
1 = Early Morning
2 = Mid Morning

3 = Early Afternoon
4 = Late Afternoon• The third letter (i.e., B) shows the room location of the paper:
A = New Hall
B = Event HallC = Room A
D = Room D

E = Room E
F = Room B-1
P = Event Hall• The number after the point (.) shows the number of the paper in thesession in sequence starting at 001 (with the exception of posters).

Berlin Potsdam and its surroundings

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SUNDAY PROGRAM
25 JUNE
Special Event – Future Visions for Transducers Part I
Session Chair:
Taeko Ando, Ritsumeikan University, JAPANEvent Hall
13:00 – 16:30
Poster Presentation and Workshop

Conference Registration and Check-In
New Hall Foyer
17:00 – 20:00

Welcome Reception
Swan Room and outside in the Garden
18:00 – 20:00

Cherry blossoms at Hokongo-in Temple in Kyoto (Image by Route16; AdobeStock).

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MONDAY AT A GLANCE
08:45 – 09:15

Welcome Address and Technical Program Information

09:15 – 10:00

Plenary Presentation 1
Masayo Takahashi, Vision Care Inc., JAPAN

10:00 – 10:15

2023 Transducers Early Career Award Presentation
Recipient – Azadeh Ansari, Georgia Tech, USA

10:15 – 11:00

11:00 – 12:30

Break and Exhibit Inspection
Session M3A
Medical
Devices I

Session M3B
Polymer
Fabrication
Process

Session M3C
EnergyHarvesters I

Session M3D
Inertial
Sensors

INVITED SPEAKER INVITED SPEAKER

12:30 – 14:00

Lunch

14:00 – 16:00

Poster Session M4P and Exhibit Inspection

16:00 – 17:30

Session M5A
Microﬂuidics I

Session M5B
Pressure
Sensors

Session M5C
pMUT

Session M5D
Bio Sensors

INVITED SPEAKER INVITED SPEAKER

17:45 – 19:00

Special Event – Future Visions for Transducers Part II
Panel Discussion

19:00 – 20:00

Monday Evening Reception

MONDAY PROGRAM
26 JUNE
Welcome Address and Technical Program Information
New Hall
08:45 – 09:15
Conference Chair:
Satoshi Konishi, Ritsumeikan University, JAPAN
Executive Program Chair:
Shuji Tanaka, Tohoku University, JAPAN
Organizing Committee Chair:
Osamu Tabata, Kyoto University of Advanced Science, JAPAN4

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Plenary Presentation 1
Session Chair:
Shuji Tanaka, Tohoku University, JAPANNew Hall
M1A.P1

09:15 – 10:00
RETINAL REGENERATION USING IPS CELLS – WITH
ROBOTIC BIOLOGY
Masayo Takahashi1,21Vision Care Inc., JAPAN and 2Ritsumeikan University, JAPAN2023 Transducers Early Career Award Presentation
New Hall
10:00 – 10:15
Award Recipient:
Azadeh Ansari, Georgia Tech, USA
10:15 – 11:00

Break and Exhibit Inspection

Session M3A – Medical Devices I
Session Chairs:
Lourdes Basabe, University of the Basque Country, SPAIN
Tao Li, University of Cincinnati, USA
New Hall
M3A.01

M3A.02

M3A.03

11:00 – 11:15
SELF-POWERED WEARABLE BITE FORCE SENSOR FOR
CONTINUOUS BRUXISM MONITORING
Kenta Ichikawa and Wataru Hijikata
Tokyo Institute of Technology, JAPAN
11:15 – 11:30
A SEMI-PASSIVE SMART CONTACT LENS WITH ON-LENS
STORAGE ELEMENT
Shun-Hsi Hsu, Cheng-Wei Tsai, Yu-Chieh Huang, Guan-Ting Yeh,
Cheng-Yu Hsu, Chun-Yu Wu, Jhu-Jyun Yang, Xuan-Wei Zhang,
Yu-Hsuan Huang, and Jin-Chern Chiou
National Yang Ming Chiao Tung University, TAIWAN
11:30 – 11:45
AN TISSUE-ADHESIVE PIEZOELECTRIC SOFT SENSOR FOR
IN VIVO HEALTHCARE
Chan Wang1, Zhuo Liu2, Ying Liu2, Yizhu Shan2, Xuecheng Qu2,
Jiangtao Xue2, Tianyiyi He1, Hong Zhou1, Weixin Liu1,
Zhou Li2, and Chengkuo Lee1
1
National University of Singapore, SINGAPORE and2
Chinese Academy of Sciences, CHINA

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Session M3A – Medical Devices I
Continued
New Hall
M3A.04

M3A.05

M3A.06

11:45 – 12:00
BALLOON CATHETER WITH IN SITU PRESSURE SENSINGFUNCTION FOR EVALUATING HEMODYNAMICS
Yizhou Wang1,2,3, Chengxu Wang1,2,3, Jianrong Wang1, Lei Geng2,3,
Xiangyu Cao4, and Xing Chen1
1
Beihang University, CHINA, 2Tiangong University, CHINA,
3
Tianjin Key Laboratory of Optoelectronic Detection Technology
and Systems, CHINA, and 4Chinese PLA General Hospital, CHINA
12:00 – 12:15
DEVELOPMENT OF HOLLOW TYPED MICRONEEDLES PATCH
WITH CONTINUOUS GLUCOSE MONITORING SENSOR BASEDON POLYLACTIC ACID
Shicheng Zhou1, Yutaro Chino2, Toshihiro Kasama1, Ryo Miyake1,
Takehiro Sato1, Shigenobu Mitsuzawa3, and Madoka Takai1
1
University of Tokyo, JAPAN, 2Sanyo Chemical Industries, Ltd., JAPAN,
and 3Honda Motor Co., Ltd., JAPAN
12:15 – 12:30
HYDROGEL MICRONEEDLE ARRAY WITH ARRANGEDCOLURIMETRIC GLUCOSE-SENSING MICROBEADSFOR TRANSDERMAL PATCH TESTING
Mayu Omote, Tomomi Murayama, Shuhei Takatsuka,
and Hiroaki Onoe
Keio University, JAPANSession M3B – Polymer Fabrication Process
Session Chairs:
Jing-Quan Liu, Shanghai Jiao Tong University, CHINA
Hiroaki Onoe, Keio University, JAPANEvent Hall
M3B.01

M3B.03

11:00 – 11:30
INVITED PRESENTATIONDIRECT INK WRITING 3D PRINTING FOR FABRICATINGMICROFLUIDIC ELECTRONIC DEVICES
Michinao HashimotoSingapore University of Technology and Design (SUTD), SINGAPORE
11:30 – 11:45
MULTILEVEL MICROCHANNEL-BASED, 3D PRINTED AND
LIQUID-METAL FILLED MICROELECTRODE ARRAY WITHINA MULTIPHASE CONTROLLED MICROCHAMBER FOR
ELECTROPHYSIOLOGICAL STUDIES
Jorge Manrique Castro, Isaac Johnson,
and Swaminathan Rajaraman
University of Central Florida, USA

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Session M3B – Polymer Fabrication Process
Continued
Event Hall
M3B.04

M3B.05

M3B.06

11:45 – 12:00
STRETCHABLE HEATER WITH ENTANGLED VERTICALLYALIGNED CARBON NANOTUBES
Kyubin Bae, Sangjun Sim, and Jongbaeg Kim
Yonsei University, KOREA
12:00 – 12:15
BILAYER SELF-FOLDING METHOD WITH HIGH FOLDINGFORCE AND ANGLE BY SUPPRESSING DELAMINATIONOF SHRINK LAYER
Yusuke Sato, Takashi Sato, and Eiji Iwase
Waseda University, JAPAN
12:15 – 12:30
PAVING SMART ROADS: ROLL-TO-ROLL LASER MANUFACTURING
OF TAR-BASED STRAIN SENSOR NETWORKS
Man Zhang, Jincai Huang, and Xining Zang
Tsinghua University, CHINA

Session M3C – Energy Harvesters I
Session Chairs:
Hiroshi Toshiyoshi, University of Tokyo, JAPANFei Wang, Southern University of Science and Technology (SUSTech), CHINA
Room A
M3C.01

M3C.03

M3C.0411:00 – 11:30
INVITED PRESENTATIONTRIBOELECTRIC NANOSENSOR: A PROTOTYPE OF SELF-POWEREDSENSOR BASED ON CONTACT ELECTRIFICATION
Zong-Hong Lin
National Taiwan University, TAIWAN
11:30 – 11:45
MONOLITHIC INTEGRATION OF THICK NDFEB MICRO-MAGNETSINTO MEMS: APPLICATION TO ELECTROMAGNETIC
ENERGY HARVESTING
Elías Angulo-Cervera1, Frederico Orlandini-Keller2, Ilona Lecerf1,3,
Pierre Moritz1,3, Fabrice Mathieu1, David Bourrier1, Samuel Charlot1,
Richard Haettel2, Thibaut Devillers2, Liviu Nicu1, Thomas Blon3,
Lise-Marie Lacroix3,4, Nora M. Dempsey2, and Thierry Leïchlé1,5
1
LAAS-CNRS, FRANCE, 2Institut NEEL, FRANCE, 3LPCNO, FRANCE,4
IUF, FRANCE, and 5IRL Georgia Tech-CNRS, USA
11:45 – 12:00
OUTPUT CHARACTERISTICS ON KIRIGAMI THERMOELECTRIC
GENERATOR BY THREE-DIMENSIONAL DEFORMATION AND
GEOMETRIC SHAPES
Shingo Terashima and Eiji Iwase
Waseda University, JAPAN7

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Session M3C – Energy Harvesters I
Continued
Room A
M3C.05

M3C.06

12:00 – 12:15
SELF-POWERED WEARABLE LIMB MOTION MONITORING SYSTEMUSING FLEXIBLE THERMOELECTRIC POWER GENERATOR
Jinfeng Yuan, Yuzhong Zhang, Caise Wei, and Rong Zhu
Tsinghua University, CHINA
12:15 – 12:30
TRIBOELECTRIC PRESSURE SENSOR WITH SURFACE CHARGEDENSITY CALIBRATION
Chankyu Han, Jungrak Choi, and Inkyu Park
Korea Advanced Institute of Science and Technology (KAIST), KOREA

Session M3D – Inertial Sensors
Session Chairs:
Behraad Bahreyni, Simon Fraser University, CANADA
Heng Yang, Chinese Academy of Sciences (CAS), CHINA
Room D
M3D.01

M3D.02

M3D.03

M3D.0411:00 – 11:15
ELECTROCHEMICAL SEISMOMETER BASED ON ONE SINGLE
SILICON CHIP WITH FOUR ELECTRODES
Zhenyu Sun1,2, Tian Liang1,2, Lintao Hu1,2, Maoqi Zhu1,2,
Mingbo Zhang1,2, Junbo Wang1,2, Deyong Chen1,2, and Jian Chen1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA
11:15 – 11:30
ULTRA-HIGH SENSITIVITY PULL-IN TIME MEMS ACCELEROMETERFOR SATELLITE GRAVIMETRYInês S. Garcia1, Dimitri E. Santos1, José B. Queiroz1,
João T. da Encarnação2,3, Tiago Hormigo4, Jorge Cabral5,
Filipe S. Alves1, and Rosana A. Dias1
1
International Iberian Nanotechnology Laboratory (INL), PORTUGAL,
2Delft University of Technology, NETHERLANDS, 3University of Texas,
Austin, USA, 4Spin.Works S.A., PORTUGAL, and 5University of Minho,
PORTUGAL
11:30 – 11:45
FREQUENCY-MODULATED MEMS ACCELEROMETER WITH
DUAL-LAYER PROCESS FOR MINIMUM AREA OCCUPATIONOF ANCHOR POINTS
Christian Padovani1, Riccardo Nastri1, Leonardo Pagani Gaffuri1,
Gabriele Gattere2, Francesco Rizzini2, and Giacomo Langfelder1
1
Politecnico di Milano, ITALY and 2STMicroelectronics, ITALY
11:45 – 12:00
ELECTROTHERMALLY TUNABLE ACCELEROMETER WITH
SMALL TUNING VOLTAGE AND VERY LARGE SENSITIVITY
TUNING RANGE
Yu-Chi Chuang, Yuan-Chieh Lee, and Yi Chiu
National Yang Ming Chiao Tung University, TAIWAN

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Session M3D – Inertial Sensors
Continued
Room D
M3D.05

M3D.06

12:00 – 12:15
DEMONSTRATION OF WIDE DYNAMIC RANGE MEASUREMENT
OF A MICROCONTROLLER-BASED MEMS GYRO MODULE BYFUSING THE OUTPUTS OF TWO DIFFERENT OPERATION MODES
Yasushi Tomizawa, Fumito Miyazaki, Daiki Ono, Hideaki Murase,
Jumpei Ogawa, Tazuko Tomioka, Kei Masunishi, Etsuji Ogawa,Fumitaka Ishibashi, and Kengo UchidaToshiba Corporation, JAPAN
12:15 – 12:30
HIGH-SENSITIVITY ELECTROCHEMICAL ANGULARACCELEROMETER RELYING ON SOI-BASEDMICROELECTRODES
Tian Liang1,2, Mingbo Zhang1,2, Lintao Hu1,2, Zhenyu Sun1,2,
Maoqi Zhu1,2, Deyong Chen1,2, Jian Chen1,2, and Junbo Wang1,21Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

12:30 – 14:00

Lunch and Exhibit Inspection

Poster Session M4P and Exhibit Inspection
Event Hall
14:00 – 16:00
Poster presentations are listed by topic category with theirassigned number starting on page 51.

Session M5A – Microfluidics I
Session Chairs:
Irene Fernandez-Cuesta, Universität Hamburg, GERMANY
Sung Kwon Cho, University of Pittsburgh, USA
New Hall
M5A.01

M5A.03

16:00 – 16:30
INVITED PRESENTATIONNEW OPPORTUNITIES TO DETECT DISEASE AND PROBE
MICROBIALS USING LAB-ON-A-CHIP DEVICES
Amy Q. Shen
Okinawa Institute of Science and Technology Graduate
University, JAPAN
16:30 – 16:45
SYNTHESIS AND DIRECT INSERTION OF MEMBRANE
PROTEIN INTO MONODISPERSE GUVS FABRICATEDBY A MICROFLUIDIC DEVICE
Satoshi Nanjo1, Mamiko Tsugane1, Ryotaro Yoneyama1,
Ryota Ushiyama1, Tomoaki Matsuura2, and Hiroaki Suzuki1
1
Chuo University, JAPAN and 2Tokyo Institute of Technology, JAPAN9TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 10

Session M5A – Microfluidics I
Continued
New Hall
M5A.04

M5A.05

M5A.06

16:45 – 17:00
HIGH EFFICIENCY CELL-BEAD PAIRING VIADIELECTROPHORESIS-CONTROLLED QUEUINGPROCESS FOR SINGLE-CELL ANALYSIS
Yao Cai1, Zhuzhu Liu1, Shijia Yang2, Fei Su3, Duli Yu1,
Xiaoxing Xing1, and Yuan Luo2,41
Beijing University of Chemical Technology, CHINA,
2
Chinese Academy of Sciences (CAS), CHINA,
3
China-Japan Friendship Hospital, CHINA, and4
University of Chinese Academy of Sciences, CHINA
17:00 – 17:15
CONTINUOUS PRODUCTION OF CELL-ENCAPSULATEDDROPLETS FOR MEMBRANE FUSION OF CELLSUTILIZING A MICROFLUIDIC DEVICE
Hiroki Fukunaga1, Naotomo Tottori1, Shinya Sakuma1,
Tomomi Tsubouchi2, and Yoko Yamanishi1
1
Kyushu University, JAPAN and
2
National Institute for Basic Biology, JAPAN
17:15 – 17:30
OPTIMIZING SCREENING PROCESS OF APTAMERS ON A
MICROFLUIDIC SYSTEM BY SHEAR FORCE CONTROL FOR
APTAMERS SPECIFIC TO FOLATE RECEPTOR ALPHA
Yi-Cheng Tsai, Yang-Sheng Shao, Hung-Bin Wu, and Gwo-Bin Lee
National Tsing Hua University, TAIWAN

Session M5B – Pressure Sensors
Session Chairs:
Chang-Jin “CJ” Kim, University of California, Los Angeles, USA
Junbo Wang, Chinese Academy of Sciences (CAS), CHINA
Event Hall
M5B.01

M5B.03

16:00 – 16:30
INVITED PRESENTATIONELECTRO-ACTIVE MATERIALS FOR SOFT ROBOTS
AND WEARABLES
Vito Cacucciolo
Omnigrasp Srl, ITALY, Politecnico di Bari, ITALY, andMassachusetts Institute of Technology, USA
16:30 – 16:45
A RESONANT MICROSENSOR FOR MULTI-PARAMETER
MEASUREMENT OF DIFFERENTIAL PRESSURE,TEMPERATURE AND STATIC PRESSURE
Chao Cheng1,2, Jiahui Yao1,2, Han Xue1,2, Yulan Lu1, Junbo Wang1,2,
Deyong Chen1,2, and Jian Chen1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

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Session M5B – Pressure Sensors
Continued
Event Hall
M5B.04

M5B.05

M5B.06

16:45 – 17:00
A RESONANT HIGH-PRESSURE SENSOR WITH AN H-CAVITY
Jie Yu1,2, Zongze Yu1,2, Pan Qian1,2, Yulan Lu1, Jian Chen1,2,
Junbo Wang1,2, and Deyong Chen1,2
1
Chinese Academy of Sciences (CAS) and2
University of Chinese Academy of Sciences, CHINA
17:00 – 17:15
NOVEL THERMAL MEMS DYNAMIC PRESSURE SENSOR
Akash Gupta1, Achim Bittner1, and Alfons Dehé1,2
1Hahn-Schickard-Gesellschaft für Angewandte Forschung e.V.,
GERMANY and 2University of Freiburg, GERMANY
17:15 – 17:30
NONLINEARITY COMPENSATION FOR MEMS PRESSURESENSORS WITH PIEZORESISTORS AT THE NEUTRAL POSITION
Grim Keulemans1, Appo van der Wiel2, Ben Maes2,
Maliheh Ramezani2, Michael Kraft1, and Chen Wang1
1
KU Leuven, BELGIUM and 2Melexis, BELGIUM

Session M5C – pMUT
Session Chairs:
Annalisa De-Pastina, Silicon Austria Labs GmbH, AUSTRIA
Tao Wu, ShanghaiTech University, CHINA
Room A
M5C.01

M5C.02

M5C.03

16:00 – 16:15
CHARACTERIZATION OF PIEZOELECTRIC MICROMACHINEDULTRASONIC TRANSDUCERS FOR BIOMEDICAL APPLICATIONS
Bruno Fain, François Blard, Jean-Rémi Chatroux,
Romain Liechti, Fabrice Casset, Antoine Hamelin,
Jean-Claude Bastien, and Hélène Lhermet
University Grenoble Alpes, FRANCE
16:15 – 16:30
FLEXIBLE ULTRASONIC TRANSDUCER FOR RF-DATA AND
ENERGY TRANSMISSION THROUGH THE METAL PIPE
Javad Abbaszadeh, Vladimir Pashchenko,
Lukas Rauter, and Mohssen Moridi
Silicon Austria Labs GmbH (SAL), AUSTRIA
16:30 – 16:45
HIGH-SPL PMUT ARRAY FOR MID-AIR HAPTIC INTERFACE
Fan Xia1, Yande Peng1, Wei Yue1, Chun-Ming Chen1, Sedat Pala1,
Ryuichi Arakawa1,2, and Liwei Lin1
1
University of California, Berkeley, USA and2
NGK Spark Plug Co., JAPAN11

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Session M5C – pMUT
Continued
Room A
M5C.04

M5C.05

M5C.06

16:45 – 17:00
IN-AIR LONG-RANGE ENVIRONMENTAL TEMPERATURESENSING WITH A SINGLE SCANDIUM-DOPED ALUMINUMNITRIDE PMUT ARRAY
Mantalena Saraﬁanou1, Daniel Ssu-Han Chen1,
David Sze Wai Choong1, Duan Jian Goh1, Jihang Liu1,
Srinivas Merugu1, Qing Xin Zhang1, Huamao Lin1,
Steven H.J. Lee1, Peter H.K. Chang1, Yee Lung Lee3,
Carlo L. Prelini2, Filippo D'Ercoli2, Dao Hao Sim3,
Alberto Leotti3, Laura Castoldi2, Domenico Giusti2,
and Joshua E.-Y. Lee1
1
Agency for Science, Technology and Research (A*STAR), SINGAPORE,
2
STMicroelectronics, ITALY and 3STMicroelectronics, SINGAPORE
17:00 – 17:15
TILTABLE CANTILEVER-PLATE BASED PIEZOELECTRIC
MICROMACHINED ULTRASONIC TRANSDUCERS (PMUT)
WITH LARGE LINEAR VIBRATION RANGE AND HIGHOUTPUT POWER
Tingzhong Xu, Javad Abbaszadeh, Claire Bourquard,
Angela Darie, and Mohssen Moridi
Silicon Austria Labs GmbH (SAL), AUSTRIA
17:15 – 17:30
A SINGLE-CHIP CMOS-MEMS CMUT ARRAY TRANSCEIVER
WITH LOW BIAS
Hung-Yu Chen, Yung-Shun Chan, Tzu-Hsuan Hsu,
Ming-Huang Li, and Sheng-Shian Li
National Tsing Hua University, TAIWAN

Session M5D – Bio Sensors
Session Chairs:
Minghao Nie, University of Tokyo, JAPANYoko Yamanishi, Kyushu University, JAPAN
Room D
M5D.01

M5D.02

16:00 – 16:15
NANOPLASMONIC BIOSENSOR FOR CYTOKINE PROFILING
IN PATIENT PLASMA
Lip Ket Chin1, Hyungsoon Im2, Sung-Gyu Park3,
and Benjamin Chousterman4
1
City University of Hong Kong, HONG KONG, 2Massachusetts General
Hospital, USA, 3Korea Institute of Materials Science, KOREA, and4
Hôpital Lariboisière, FRANCE
16:15 – 16:30
LAB-ON-CMOS RESONANT MICRO-CALORIMETER
Rafel Perelló-Roig1,2, Jaume Verd1,2, Sebastià Bota1,2,
Toshikazu Nishida3, and Jaume Segura1,2
1
University of the Balearic Islands, SPAIN, 2Health Research Instituteof the Balearic Islands, SPAIN, and 3University of Florida, USA

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Session M5D – Bio Sensors
Continued
Room D
M5D.03

M5D.04

M5D.05

M5D.06

16:30 – 16:45
A NOVEL RADIAL CHIP FOR COLLECTION OF EXHALED BREAT
TO DETECT COVID-19
James D. Morris, Zhenzhen Xie, Jiapeng Huang,
Michael H. Nantz, and Xiao-An Fu
University of Louisville, USA
16:45 – 17:00
IN-VITRO REAL-TIME IDENTIFICATION OF CORONAVIRUS
SPIKE PROTEINS VIA ULTRASENSITIVE MID-INFRAREDHOOK NANOANTENNAS ARRAY
Zhihao Ren, Hong Zhou, Zixuan Zhang, Cheng Xu,
and Chengkuo Lee
National University of Singapore, SINGAPORE
17:00 – 17:15
A FLEXIBLE GLUCOSE SENSOR WITH ANTI-SWELLINGAND CONDUCTIVITY ZWITTERIONIC HYDROGELENZYME MEMBRANE
Chengcheng Li, Zhihua Pu, Hao Zheng, Zijing Guo,
Wangwang Zhu, and Dachao Li
Tianjin University, CHINA
17:15 – 17:30
DUAL METHYLATED BRCA1/BRCA2 DETECTION ON AN
APTAMER-BASED INTEGRATED MICROFLUIDIC SYSTEM
Chih-Hung Wang1, Keng-Fu Hsu2, and Gwo-Bin Lee1
1
National Tsing Hua University, TAIWAN and
2
National Cheng Kung University, TAIWAN

17:30 – 17:45

Transition

Special Event – Future Visions for Transducers Part II
Session Chair:
Taeko Ando, Ritsumeikan University, JAPANNew Hall
17:45 – 19:00
Panel Discussion

Monday Evening Reception
New Hall
19:00 – 20:00
20:00

End of Day

13

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TUESDAY AT A GLANCE
08:30 – 09:15

Plenary Presentation 2
Jörg Wrachtrup, University of Stuttgart, GERMANY

09:15 – 09:30

Transducers 2025 Announcement

09:30 – 09:45

Transition Break

09:45 – 10:45

Session T2A
Cell

Session T2B
Actuators I

Session T3A
TissueEngineering I

Session T3B
Nanoscale
Materials &Fabrication

10:45 – 11:15

11:15 – 12:45

Session T2C
Environmental
Sensors

Session T2D
Functional
Materials &Fabrication I

Break and Exhibit Inspection
Session T3C
EnergyHarvesters II

INVITED SPEAKER

Session T3D
Force
Sensors
INVITED SPEAKER

12:45 – 14:15

Lunch

14:15 – 16:15

Poster Session T4P and Exhibit Inspection

16:15 – 17:30

Session T5A
Medical
Devices II

Session T5B
Micromirrors

Session T5C
Acoustic
Devices

17:30 – 17:40

Transition Break

17:40 – 19:10

Special Event – Industry

19:10 – 20:00

Tuesday Wine and Cheese Reception

Session T5D
Microﬂuidics II

TUESDAY PROGRAM
27 JUNE
Plenary Presentation 2
Session Chair:
Xinxin Li, SIMIT-CASI, CHINA
New Hall
T1A.P2

08:30 – 09:15
MINIATURIZED QUANTUM SENSORS
Michelle Schweizer1, Jixing Zhang1, Michael Kübler1,
Magnus Benke1, and Jörg Wrachtrup1,2
1
University of Stuttgart, GERMANY and2
Max Planck Institute for Solid State Research, GERMANY

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TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 15

Transducers 2025 Announcement
New Hall
09:15 – 09:30
09:30 – 09:45

Transition

Session T2A – Cell
Session Chairs: Ioana Voiculescu, City University of New York, USA
José Antonio Plaza, Instituto de Microelectrónica de Barcelona(IMB-CNM (CSIC)), SPAIN
New HallT2A.01

T2A.02

T2A.03

T2A.0409:45 – 10:00
CYTOTRANSDUCERS VISUALIZE FUNCTIONS OF LIVING CELLS
Niko Kimura and Shinya Sakuma
Kyushu University, JAPAN
10:00 – 10:15
DIRECT MONITORING OF NEUROTRANSMITTER EXOCYTOSISIN LIVING CELLS USING ELECTROCHEMICAL SENSORSFABRICATED WITH MIXED-DIMENSIONAL BIOSENSINGNANOSTRUCTURES
Pengcheng Xu1,2, Xuefeng Wang1, Hao Jia1,2,
Yuan Zhang3, and Xinxin Li1,2
1
Chinese Academy of Sciences (CAS), CHINA,
2
University of Chinese Academy of Sciences, CHINA, and3
Shanghai University, CHINA
10:15 – 10:30
THE SEARCH FOR THE MAXIMUM 2D-PARTICLE SIZE
THAT CAN BE INTERNALIZED BY LIVING CELLS
Marta Duch1, Ana Fernández-Escribano2, Maria Isabel Arjona1,
Patricia Vázquez2, Juan Pablo Agusil1, Mariano Redondo-Horcajo2,
Adrian Rodríguez-Lau1, Ana Sánchez1, Sergi Sánchez1,
Teresa Suárez2, and José Antonio Plaza1
1
Institute of Microelectronics of Barcelona, SPAIN and2
Centre for Biological Research Margarita Salas (CSIC), SPAIN
10:30 – 10:45
A MICIROFLUIDIC FLOW CYTOMETRY ENABLINGHIGH-THROUGHPUT CHARACTERIZATION OF
SINGLE-CELL IMPEDANCE AND IMAGING BASEDON CONSTRICTIONAL MICROCHANNELS COUPLED
WITH DEEP NEURAL NETWORKS
Xiao Chen1,2, Xukun Huang1,2, Huiwen Tan1,2, Minruihong Wang1,2,
Yimin Li1,2, Yuanchen Wei1, Jie Zhang1, Deyong Chen1,2,
Yueying Li1, Junbo Wang1,2, and Jian Chen1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

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Session T2B – Actuators I
Session Chairs:
Takeshi Hayakawa, Chuo University, JAPAN
Rong Zhu, Tsinghua University, CHINA
Event Hall
T2B.01

T2B.02T2B.03

T2B.0409:45 – 10:00
DESIGN AND EXPERIMENTAL VALIDATION OF A NEW MEMS
LONG-STROKE ACTUATOR BASED ON TUNNEL-COMB FINGERS
Valentina Zega1, Andrea Opreni1, Yassine Banani1,
Andrea Buffoli1, Flavia D. Mauri1, Gabriele Gattere2,
Manuel Riani2, Giacomo Langfelder1, and Attilio Frangi1
1
Politecnico di Milano, ITALY and 2STMicroelectronics, ITALY
10:00 – 10:15
DOWNSCALING AND TEMPERATURE HOMOGENIZATIONOF TINIHF/SI SHAPE MEMORY MICROACTUATORS
Gowtham Arivanandhan1, Zixiong Li1, Sabrina M. Curtis2,3,Eckhard Quandt2, and Manfred Kohl1
1
Karlsruhe Institute of Technology (KIT), GERMANY,
2
Kiel University (CAU), GERMANY, and3
University of Maryland, USA
10:15 – 10:30
3D ELECTRON-BEAM WRITING OF NANOACTUATORS IN
GENETICALLY ENGINEERED SPIDER SILK PROTEINSNan Qin1,2, Xiawei Yue1,2, Jiachuang Wang1,2,
Zening Li1,2, and Tiger H. Tao1,2,3,4,5
1
Chinese Academy of Science (CAS), CHINA, 2University ofChinese Academy of Sciences, CHINA, 3Neuroxess Co.,
Ltd., CHINA, 4Guangdong Institute of Intelligence Scienceand Technology, CHINA, and 5Tianqiao and Chrissy Chen
Institute for Translational Research, CHINA
10:30 – 10:45
SELF-ASSEMBLED NANOSCALE CILIARY ACTUATORS
Minsu Kang1, Hosup Jung3, Moon Kyu Kwak3,
and Hoon Eui Jeong1
1
Ulsan National Institute of Science & Technology (UNIST), KOREA,
2
Seoul National University, KOREA, and3
Kyungpook National University, KOREA

Session T2C – Environmental Sensors
Session Chairs:
Andreas Hierlemann, ETH Zurich, SWITZERLAND
Chung Hoon Lee, Marquette University, USA
Room A
T2C.01

09:45 – 10:00
HIGH-PERFORMANCE SILICON CARBIDE-ON-INSULATOR
THERMORESISTIVE HIGH-TEMPERATURE SENSORUP TO 750 °C
Baoyun Sun, Jiarui Mo, Willem D. van Driel, and Guoqi Zhang
Delft University of Technology, NETHERLANDS

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Session T2C – Environmental Sensors
Continued
Room A
T2C.02T2C.03T2C.0410:00 – 10:15
MOSFET-BASED AND P-N DIODE BASED TEMPERATURESENSORS IN A 4H-SIC CMOS TECHNOLOGY
Jiarui Mo1, Jinglin Li1, Yaqian Zhang1, Alexander May2,
Tobias Erlbacher2, Guoqi Zhang1, and Sten Vollebregt1
1
Delft University of Technology, NETHERLANDS and
2
Fraunhofer Institute for Integrated System andDevices Technology IISB, GERMANY
10:15 – 10:30
DEVELOPMENT OF A HIGH SENSITIVITY PELTIER TYPE
SOIL WATER CONTENT SENSOR FOR MONITORINGAGRICULTURAL MEDIA
Masato Futagawa, Haruki Sato, Kisho Sakamoto,and Satoshi Ota
Shizuoka University, JAPAN
10:30 – 10:45
ALGAN/GAN SPLIT-ELECTRODE SECTORIAL SENSOR ARRAYFOR ULTRA-LOW MAGNETIC FIELD DETECTION AT 8 μT
Lingxi Xia1,2 and Yung C. Liang1,21National University of Singapore, SINGAPORE and2
National University of Singapore, Suzhou, CHINA

Session T2D – Functional Materials & Fabrication I
Session Chairs:
Naoki Inomata, Tohoku University, JAPAN
Da-Jeng Yao, National Tsing Hua University, TAIWAN
Room DT2D.01

T2D.02

09:45 – 10:00
HYBRID MICROFABRICATION, AND ELECTROCHEMICALANALYSIS OF NONAGONAL 2D/3D MICROELECTRODE
ARRAYS, WITH MULTI-METALLIC INTERFACESCharles M. Didier1, Maria Corina Garcia-Chaulbad2,
Julia F. Orrico1, Jorge Manrique Castro1,
and Swaminathan Rajaraman1
1
University of Central Florida, USA and2
Polytechnic University of Puerto Rico, PUERTO RICO
10:00 – 10:15
MANUFACTURING OF FLEXIBLE METALLIC AEROGELBY ICE-TEMPLATED ASSEMBLY OF NANOWIRESAND ITS APPLICATIONS
Donghyun Lee and Jungwook Choi
Chung-Ang University, KOREA

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Session T2D – Functional Materials & Fabrication I
Continued
Room DT2D.03

T2D.04

10:15 – 10:30
SIMPLE FABRICATION OF PARYLENE-BASED SLIPPERYLIQUID-INFUSED POROUS SURFACES FORHEALTHCARE APPLICATIONS
Kuang-Ming Shang1, Haixu Shen1, Hiroyuki Kato2,
Suhash Aravindan1, Hirotake Komatsu2,
and Yu-Chong Tai1
1
California Institute of Technology, USA and 2Arthur Riggs Diabetes& Metabolism Research Institute at City of Hope, USA
10:30 – 10:45
APPLYING GRAYSCALE DIGITAL MASKS AND DEFOCUSINGMETHOD TO DIGITAL LIGHT PROCESSING STEREOLITHOGRAPHYFOR RAPID MANUFACTURE OF MICROLENS ARRAYS
Chih-Yu Hsieh1, Pin-Chuan Chen1, Pai-Shan Chen2, and Yi-Hsin Liu3
1
National Taiwan University of Science and Technology, TAIWAN,
2
National Taiwan University, TAIWAN, and 3National Taiwan
Normal University, TAIWAN

Session T3A – Tissue Engineering I
Session Chairs:
Fernando Benito-Lopez, University of the Basque Country, SPAIN
Frank Niklaus, KTH – Royal Institute of Technology, SWEDEN
New HallT3A.01

T3A.03

T3A.04

11:15 – 11:45
INVITED PRESENTATIONORGAN-ON-CHIP FOR PHYSIOLOGY AND DEVELOPMENT
OF NEW THERAPIES
Karen Cheung
University of British Columbia, CANADA
11:45 – 12:00
TARGETING NANOCARRIERS COMBINED WITH PHOTOTHERMAL
THROMBOLYTIC THERAPY TESTED FROM IN VITRO, AND
THROMBOSIS VESSEL-ON-A-CHIP, TO IN VIVO
Kuan-Ting Liu1, Er-Yuan Chuang2, Yu-Jui Fan2, and Jiashing Yu1
1
National Taiwan University, TAIWAN and2
Taipei Medical University, TAIWAN
12:00 – 12:15
A HIGHLY SENSITIVE CAPACITIVE DISPLACEMENT SENSOR
FOR FORCE MEASUREMENT INTEGRATED IN AN ENGINEEREDHEART TISSUE PLATFORM
Milica Dostanić1,2, Filippo Pfaiffer1, Mahdieh Shojaei-Baghini1,
Laura M. Windt2, Maury Wiendels2, Berend J. van Meer2,
Christine L. Mummery2,3, Pasqualina M. Sarro1,
and Massimo Mastrangeli1
1
TU Delft, NETHERLANDS, 2Leiden University Medical Center,
NETHERLANDS, and 3University of Twente, NETHERLANDS

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Session T3A – Tissue Engineering I
Continued
New HallT3A.05

T3A.06

12:15 – 12:30
HIGH THROUGHPUT, MULTIMODAL, MICROCHAMBER
BIOSENSORS FOR IN VITRO SELECTIVE LOCALIZATION
OF KILLIFISH CARDIAC MODELS
Andre Childs1, Isaac Johnson1, Benjamin Dubansky2,
and Swaminathan Rajaraman1
1
University of Central Florida, USA and
2
Louisiana State University, USA
12:30 – 12:45
REAL-TIME ASSESSMENT OF MATURITY BY
MICROFIBER-SHAPED IPSCS-DERIVED
CARDIAC TISSUE
Akari Masuda1, Shun Itai1, Yuta Kurashina2,
Shugo Tohyama1, and Hiroaki Onoe1
1
Keio University, JAPAN and 2Tokyo Universityof Agriculture and Technology, JAPANSession T3B – Nanoscale Materials & Fabrication
Session Chairs: Inkyu Park, Korea Advanced Institute of
Science and Technology (KAIST), KOREA
Michael Kraft, KU Leuven, BELGIUM
Event Hall
T3B.01

T3B.02

T3B.03

11:15 – 11:30
SILICON-NANODOT-INDUCED STRENGTH CONTROLFOR SILICON MEMS
Abbhiraj Singh, Shingo Kammachi, and Takahiro Namazu
Kyoto University of Advanced Science, JAPAN
11:30 – 11:45
DISSIPATION AND LOSS ANGLE IN TWO-DIMENSIONAL
MOLYBDENUM DITELLURIDE NANOELECTROMECHANICALRESONATORS
Pengcheng Zhang1, Yueyang Jia1, Zuheng Liu1, and Rui Yang1,2
1
University of Michigan – Shanghai Jiao Tong University Joint
Institute, Shanghai Jiao Tong University, CHINA and 2Shanghai
Jiao Tong University (SJTU), CHINA
11:45 – 12:00
LONG-WAVE INFRARED GRAPHENE PHOTODETECTORS FOR
POLARIZATION DETECTION AND GAS SENSING
Junsheng Xie, Zhihao Ren, Jingxuan Wei, Weixin Liu,
Jingkai Zhou, and Chengkuo Lee
National University of Singapore, SINGAPORE

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Session T3B – Nanoscale Materials & Fabrication
Continued
Event Hall
T3B.04

T3B.05

T3B.06

12:00 – 12:15
DEMONSTRATION OF A NON-VOLATILE ANTIFERROELECTRICPYROELECTRIC SWITCH
Patrick D. Lomenzo1, Songrui Li1, Thomas Mikolajick1,2,
and Uwe Schroeder1
1
NaMLab gGmbH, GERMANY and 2TU Dresden, GERMANY
12:15 – 12:30
HIGH-SA/V-RATIO TIO2-NANOPARITCLE-ENCAPSULATINGHYDROGEL UNIT PROMOTES EFFICIENT LIGHT-DRIVENSELF-ASSEMBLY
Natsumi Watanabe and Hiroaki Onoe
Keio University, JAPAN
12:30 – 12:45
TITANIUM/SILICA BIOCOMPATIBLE NANOPARTICLES WITHTUNABLE EXOTHERMIC CHARACTERISTICS FOR FUTURE
HYPERTHERMIA TECHNOLOGY
Kingkarn Khotchasing, Michiko Shindo, and Takahiro Namazu
Kyoto University of Advanced Science, JAPANSession T3C – Energy Harvesters II
Session Chairs:
Philippe Basset, Université Gustave Eiffel, FRANCEPeter Woias, University of Freiburg, GERMANY
Room A
T3C.01

T3C.02

T3C.03

11:15 – 11:30
MEMS ELECTROSTATIC ENERGY HARVESTER WITH
RECHARGEABLE ELECTRET BY BUILT-IN CORONA TIPS
Anxin Luo, Mingjie Li, Wenxin Luo, Xiaojiang Liu, and Fei Wang
Southern University of Science and Technology, CHINA
11:30 – 11:45
DUAL-PHASE ROPE-SPUN ELECTRET ROTARY GENERATORFOR MORPHING WING ENERGY HARVESTING AND
DEFORMATION MONITORING
Huipeng Zhou, Xinhui Mao, Zhe Zhao, Yu Liu,
Weizheng Yuan, Honglong Chang, and Kai Tao
Northwestern Polytechnical University, CHINA
11:45 – 12:00
ORIGAMI-INSPIRED TRANSFORMABLE ELECTRET GENERATORFOR FLAPPING-LEAF WIND ENERGY HARVESTING
Boming Lyu1, Yangyang Gao1, Zhaoshu Yang2, Jin Wu3,
Honglong Chang1, Weizheng Yuan1, and Kai Tao1
1
Northwestern Polytechnical University, CHINA
2China Astronaut Research and Training Center, CHINA, and3
Sun Yat-sen University, CHINA

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Session T3C – Energy Harvesters II
Continued
Room A
T3C.04

T3C.05

T3C.06

12:00 – 12:15
SELF-POWERED DUST REMOVAL SYSTEM FOR SOLAR PANELSDRIVEN BY A ROTARY FREESTANDING-ELECTRET GENERATOR
Rong Ding, Junchi Teng, Zeyuan Cao, Zibo Wu, Kang Deng,
Xiangzhu Yuan, Yujia Cao, and Xiongying Ye
Tsinghua University, CHINA
12:15 – 12:30
FREQUENCY TRACKING OF VIBRATIONAL ENERGY HARVESTERUSING PHASE-LOCKED LOOP (PLL)
Yuto Akai, Hiroaki Honma, and Hiroshi Toshiyoshi
University of Tokyo, JAPAN
12:30 – 12:45
SUPPRESSING THE AIR-BREAKDOWN PHENOMENON
OF ELECTROSTATIC GENERATOR FOR EFFICIENT
ENERGY HARVESTING
Zeyuan Cao, Rong Ding, Junchi Teng, Zibo Wu, and Xiongying Ye
Tsinghua University, CHINA

Session T3D – Force Sensors
Session Chairs:
Honglong Chang, Northwestern Polytechnical University, CHINA
Valentina Zega, Politecnico di Milano, ITALY
Room DT3D.01

T3D.03T3D.04

11:15 – 11:45
INVITED PRESENTATIONMEMS SENSOR DRIFT COMPENSATION WITH ON-CHIP
STRESS SENSING
Erdinc Tatar
Bilkent University, TURKEY
11:45 – 12:00
AN ACTIVE-MATRIX PIEZOELECTRIC TACTILE SENSORARRAY WITH IN-PIXEL AMPLIFIER AND
NON-UNIFORMITY COMPENSATION
Tengteng Lei, Yushen Hu, Xinying Xie, and Man Wong
Hong Kong University of Science and Technology, HONG KONG
12:00 – 12:15
MONOLITHICALLY VERTICAL INTEGRATION WITH CAPACITIVEPROXIMITY AND INDUCTIVE FORCE SENSOR WITH SENSING
RANGE ENHANCEMENT
Ruei-Cing Mai1, Fuchi Shih1, Yuanyuan Huang1, Yu-Hsuan Li1,
I-Yu Huang2, Yu-Cheng Lin3, and Weileun Fang1
1
National Tsing Hua University, TAIWAN, 2National Sun Yat-sen
University, TAIWAN, and 3National Cheng Kung University, TAIWAN

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Session T3D – Force Sensors
Continued
Room DT3D.05

T3D.06

12:15 – 12:30
A LOW POWER AND ULTRATHIN FLEXIBLE SHEAR STRESSSENSOR WITH HIGH SENSITIVITY SUSPENDED OVER A
FLEXIBLE SUBSTRATE
Xiangyu Song, Ke Xiao, and Wei Xu
Shenzhen University, CHINA
12:30 – 12:45
A STRAIN-INSENSITIVE STRETCHABLE PATCH SENSORFOR SIMULTANEOUS MONITORING OF BODYTEMPERATURE AND ECG
Sudeep Sharma, Ashok Chhetry, Seonghoon Jeong,and Jae Yeong Park
Kwangwoon University, KOREA

12:45 – 14:15

Lunch and Exhibit Inspection

Poster Session T4P and Exhibit Inspection
Event Hall
14:15 – 16:15
Poster presentations are listed by topic category with theirassigned number starting on page 51.

Session T5A – Medical Devices II
Session Chairs:
Eiji Iwase, Waseda University, JAPAN
Michael Kraft, KU Leuven, BELGIUM
New Hall
T5A.01

T5A.02

16:15 – 16:30
HYBRID BIODEGRADABLE POLYMER STENT FABRICATIONUSING 3D PRINTERS AND INTEGRATION WITH WIRELESSSENSORS FOR REAL-TIME PRESSURE MONITORINGIN BLOOD VESSELS
Jin-liang Wei, Nomin-Eredne Oyunbaatar,
Dong-Su Kim, and Dong-Weon Lee
Chonnam National University, KOREA
16:30 – 16:45
A SENSOR-INTEGRATED “SMART” URETERAL STENT
AND WIRELESS IN-VITRO TEST FOR REAL-TIME
OBSTRUCTION DETECTION
Mohammad Reza Youseﬁ Darestani, Dirk Lange,
Ben H. Chew, and Kenichi Takahata
University of British Columbia, CANADA

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Session T5A – Medical Devices II
Continued
New Hall
T5A.03

T5A.04

T5A.05

16:45 – 17:00
ULTRA-SOFT NEURAL PROBE WITH A TEMPORARY
HIGH-STRENGTH U-SECTION COATING BYPICOSECOND LASER MICROMACHINING
Fanqi Sun1, Xiaoli You1, Yuhao Zhou1, Minghao Wang2,
Mengfei Xu3, Xichen Yuan1, Honglong Chang1,
Jingquan Liu3, and Bowen Ji1
1
Northwestern Polytechnical University, CHINA,
2
Hangzhou Dianzi University, CHINA, and3
Shanghai Jiao Tong University, CHINA
17:00 – 17:15
SELF-STRETCHABLE CHRISTMAS-TREE-SHAPEDULTRAFLEXIBLE NEURAL PROBES
Ye Tian1,2, Cunkai Zhou1, Kuikui Zhang4, Huiran Yang1,
Zhaohan Chen5, Zhitao Zhou1,2, Xiaoling Wei1,2,
Tiger H. Tao1,2,6,7,8, and Liuyang Sun1,3
1Chinese Academy of Sciences (CAS), CHINA, 2University ofChinese Academy of Sciences, CHINA, 3Shanghai University
of Electric Power, CHINA, 4Nanjing Tech University, CHINA,
5
Shanghai Normal University, CHINA, 6Neuroxess Co., Ltd.
(Jiangxi), CHINA, 7Guangdong Institute of Intelligence
Science and Technology, CHINA, and 8Tianqiao and Chrissy
Chen Institute for Translational Research, CHINA
17:15 – 17:30
BIOMIMETIC FLEXIBLE NEURO-PROBE SYSTEM FOR
EARLY WARNING WITH FORCE FEEDBACK TO AVOIDVASCULAR DAMAGE
Yu Zhou1,2, Huiran Yang1,2, Xueying Wang1,2, Heng Yang1,2,
Ke Sun1,2, Zhitao Zhou1,2, Liuyang Sun1,2, Meng Li1,2,
Jianlong Zhao1,2, Tiger H. Tao1,2,3,4,5, and Xiaoling Wei1,21Chinese Academy of Sciences (CAS), CHINA, 2University ofChinese Academy of Sciences, CHINA, 3Neuroxess Co., Ltd.
(Jiangxi), CHINA, 4Guangdong Institute of Intelligence Scienceand Technology, CHINA, and 5Tianqiao and Chrissy Chen
Institute for Translational Research, CHINA

Session T5B – Micromirrors
Session Chairs:
Jaka Pribosek, Silicon Austria Labs GmbH, AUSTRIA
Huikai Xie, Beijing Institute of Technology, CHINA
Event Hall
T5B.01

16:15 – 16:30
INTEGRATED THERMAL CONVECTION-BASED POSITIONSENSING FOR ELECTROTHERMAL MICROMIRRORS
Anrun Ren, Yingtao Ding, Hengzhang Yang, Teng Pan,and Huikai Xie
Beijing Institute of Technology, CHINA

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Session T5B – Micromirrors
Continued
Event Hall
T5B.02

T5B.03

T5B.04

T5B.05

16:30 – 16:45
MEMS SCANNING GRATING BASED COMPACT DIFFUSE
REFLECTANCE SPECTROSCOPIC MODULE FOR
SKIN ANALYSIS
Jaehun Jeon, Jung-Woo Park, Gi Beom Kim, and Ki-Hun Jeong
Korea Advanced Institute of Science and Technology (KAIST), KOREA
16:45 – 17:00
NOVEL BOW-SHAPE TRANSMISSION SPRINGS FORPIEZOELECTRIC MEMS MIRROR WITH 180-DEGREESOPTICAL SCANNING ANGLE
Si-Han Chen1, Shih-Chi Liu1, Hung-Yu Lin1,
Jerwei Hsieh2, and Weileun Fang1
1
National Tsing Hua University, TAIWAN and2
Asia Pacific Microsystems, Inc., TAIWAN
17:00 – 17:15
DESIGN OF A BI-AXIAL PIEZOELECTRIC MEMS SCANNER
WITH TRI-GIMBAL STRUCTURE FOR SCANNING
PATTERN ENHANCEMENT
Chih-Chen Hsu1, Hao-Chien Cheng1,2, Shi-Chi Liu1,
Hung-Yu Lin1, Mingching Wu2, Kai-Chih Liang2,
and Weileun Fang1
1
National Tsing Hua University, TAIWAN and
2
Coretronic MEMS Corporation, TAIWAN
17:15 – 17:30
FABRICATION AND CHARACTERIZATION OF A NOVELPIEZOELECTRIC MEMS MIRROR WITH HIGH FILL
FACTOR AND HIGH SPEED
Yang Wang1,4, LiHao Wang1, Hao Zhang5, YiChen Liu1,
YuYao Zhang3, WeiHong Zhu3, YongGui Zhang1,
and Zhenyu Wu1,2,3,4
1
Shanghai Institute of Microsystem and Information
Technology, CHINA, 2Shanghai Industrial μtechnology
Research Institute, CHINA, 3Shanghai University, CHINA,
4
University of Chinese Academy of Sciences, CHINA, and5
Chinese Academy of Sciences (CAS), CHINA

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Session T5C – Acoustic Devices
Session Chairs:
Sid Ghosh, Northeastern University, USA
Göran Stemme, KTH – Royal Institute of Technology, SWEDEN
Room A
T5C.01

T5C.02

T5C.03

T5C.04

T5C.05

16:15 – 16:30
LOW DIELECTRIC LOSS TANGENT, HIGHLY SCANDIUM DOPEDALUMINUM NITRIDE THIN FILM FOR ACOUSTIC DEVICES
Takahiro Higuchi1, Akihiko Teshigahara1, Kenji Kijima1,
Takashi Kakefuda2, Takahide Usui2, Yusuke Kawai1,
Takashi Omichi2, and Hiroyuki Wado1
1
MIRISE Technologies Corporation, JAPAN and2
Nisshinbo Micro Devices Inc., JAPAN
16:30 – 16:45
HOW TO TURN A MEMS MICROPHONE INTO A PHOTOACOUSTICSENSOR: AN EXPERIMENTAL STUDY
Thomas Strahl1,2, Jonas Steinebrunner2, Christian Weber1,2,
Jürgen Wöllenstein1,2, and Katrin Schmitt1,2
1
University of Freiburg, GERMANY and 2Fraunhofer Institutefor Physical Measurement Techniques IPM, GERMANY
16:45 – 17:00
WAFER-SCALE TRANSFER-FREE GRAPHENE MEMSCONDENSER MICROPHONES
Roberto Pezone, Gabriele Baglioni, Leonardo di Paola,
Pasqualina M. Sarro, Peter G. Steeneken,
and Sten Vollebregt
Delft University of Technology, NETHERLANDS
17:00 – 17:15
A NOVEL HIGH-SNR FULL BANDWIDTH PIEZOELECTRIC
MEMS MICROPHONE BASED ON A FULLY CLAMPEDALUMINUM NITRIDE CORRUGATED MEMBRANE
Gabriele Bosetti1, Christian Bretthauer2, Andreas Bogner2,
Michael Krenzer2, Karolina Gierl2, Hans-Joerg Timme2,
Heinrich Heiss2, and Gabriele Schrag1
1
Technical University of Munich, GERMANY and2
Infineon Technologies AG, GERMANY
17:15 – 17:30
DUAL-FREQUENCY ALUMINUM SCANDIUM NITRIDEPIEZOELECTRIC MICROPHONES WITH WIDEBANDWIDTH, LARGE DYNAMIC RANGE, AND
HIGH SENSITIVITY FOR WIND TUNNEL TESTING
Yanfen Zhai1, Thai Anh Tuan Nguyenand2,
Lokesh Kumar Reddy Onteru1, Claire Bourquard1,
Annalisa De-Pastina1, Alexander Shatalov1,
Nikolai Andrianov1, Xuyuan Chen2, and Lixiang Wu1
1
Silicon Austria Labs GmbH (SAL), AUSTRIA and2
University of South-Eastern Norway, NORWAY

25

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 26

Session T5D – Microfluidics II
Session Chairs:
Boris Stoeber, University of British Columbia, CANADA
Yi-Kuen Lee, Hong Kong University of Science and Technology, HONG KONG
Room D
T5D.01

T5D.02

T5D.03

T5D.04

T5D.05

16:15 – 16:30
OPENABLE DOUBLE-MICROTUBES STRUCTURE DRIVEN BY
PNEUMATIC BALLOON ACTUATOR ARRAYS FOR TUBULAR
ORGAN-ON-A-CHIP
Shiho Shimizu, Keiichiro Nishizaki, and Satoshi Konishi
Ritsumeikan University, JAPAN
16:30 – 16:45
ACOUSTOFLUIDIC MICROMANIPULATION SYSTEM WITH
AN OPEN MICROFLUIDIC CHIP
Natsumi Hirata and Takeshi Hayakawa
Chuo University, JAPAN
16:45 – 17:00
SPERM ENRICHMENT AND FOULING MITIGATIONIN BUBBLE-BASED ACOUSTOFLUIDICFILTRATION MICRODEVICE
Ting-Yu Wan, Tsui-Ting Lee, Hsiao-Lin Hwa, and Yen-Wen Lu
National Taiwan University, TAIWAN
17:00 – 17:15
ACOUSTIC TWEEZERS USING BISYMMETRIC COHERENT
SURFACE ACOUSTIC WAVES FOR RECONFIGURABLE
MODULATION OF PARTICLE MULTIMERS
Hemin Pan, Deqing Mei, and Yancheng Wang
Zhejiang University, CHINA
17:15 – 17:30
LASER-WRITTEN CONDUCTIVE TRACKS FOR THE INTEGRATIONOF SURFACE-MOUNT DEVICES ONTO PMMA
Tina Mitteramskogler, Andreas Fuchsluger, Rafael Ecker,
Andreas Tröls, and Bernhard Jakoby
Johannes Kepler University Linz, AUSTRIA

17:30 – 17:40

Transition

26

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 27

Special Event – Industry
Session Chair:
Shuji Tanaka, Tohoku University, JAPANNew Hall
17:40 – 18:10
FROM MEMS-SENSORS TO BIOMEMS – INVENTED FOR LIFE
Presenter: Franz Lärmer
Robert Bosch GmbH, GERMANY
18:10 – 18:40
EPSON’S MEMS TECHNOLOGY: PRECISION CORE A NEXT-GENERATIONINKJET PRINTING TECHNOLOGY CREATED BY EPSON
Presenter: Eiju Hirai
Seiko Epson Corporation, JAPAN
18:40 – 19:10
MARKET DEVELOPMENT IN THE WORLD OF MEMS AND SENSORS
Presenter: Paul Carey
SEMI MEMS & Sensors Industry Group, USA
19:10

End of Day

Tuesday Wine and Cheese Reception
New Hall
19:10 – 20:00

Tō-ji Temple and Lotus Flowers in Kyoto (Image by Route16; AdobeStock).

27

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 28

WEDNESDAY AT A GLANCE
08:30 – 09:15

Plenary Presentation 3
Molly S. Shoichet, University of Toronto, CANADA

09:15 – 09:30

Transition Break

09:30 – 10:45

Session W2A
Fluidic
Control

10:45 – 11:15

11:15 – 12:45

Session W2B
Optical
Devices

Session W2C
Packaging &Fabrication

Session W2D
Non-Linear
Resonators

Break and Exhibit Inspection
Session W3A
Microﬂuidics III

Session W3B
ChemicalSensors I

Session W3C
Resonating
Devices

INVITED SPEAKER

Session W3D
Logic Devices& Switches
INVITED SPEAKER

12:45 – 14:15

Lunch

14:15 – 16:15

Poster Session W4P and Exhibit Inspection

16:15 – 17:45

Session W5B
ChemicalSensors II

Session W5C
RF Resonators

INVITED SPEAKER

18:00 – 21:00

Session W5E
Functional
Materials &Fabrication II

Session W5DIntelligent
Bio-Chemical
Sensors

INVITED SPEAKERCONFERENCE BANQUETWEDNESDAY PROGRAM
28 JUNE
Plenary Presentation 3
Session Chair:
Ellis Meng, University of Southern California, USA
New Hall
W1A.P308:30 – 09:15
MIMICKING THE CELLULAR MICROENVIRONMENT WITH
3D HYDROGELS ENABLES TARGET DISCOVERYAND DRUG SCREENING
Molly S. Shoichet, Arianna Skyrzinska, Laura Bahlmann,
Laura Smith, Amber Xue, Roger Tam, Alexander Baker,
and Aleczandria Tiffany
University of Toronto, CANADA

09:15 – 09:30

Transition

28

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 29

Session W2A – Fluidic Control
Session Chairs:
Hanseup Kim, University of Utah, USA
Daisuke Yamane, Ritsumeikan University, JAPANNew Hall
W2A.01

W2A.02

W2A.03

W2A.04

W2A.0509:30 – 09:45
MICRODROPLET REACTIONS BY HYPERBRANCHED,SPACE-FILLING OPEN MICROFLUIDIC CHANNELS
Hiroyuki Kai
Toyo University, JAPAN
09:45 – 10:00
CHIRALITY SENSING MECHANISM USING VERTICAL CONTACTCONTROL OF LIQUID CRYSTAL MICRO-DROPLETS
Shinji Bono1,2,3 and Satoshi Konishi1,2,3
1
Ritsumeikan University, JAPAN, 2Ritsumeikan Advanced Research
Academy, JAPAN, and 3Ritsumeikan Global Innovation Research
Organization, JAPAN
10:00 – 10:15
LOCALIZED ELECTROCHEMICAL DEPOSITION OF MULTI- METALSTRUCTURES BY HYDRODYNAMIC FLOW CONFINEMENT
Daniel Widerker1, Govind Kaigala1, and Moran Bercovici2
1
Technion, Israel Institute of Technology, ISRAEL and2
University of British Columbia, CANADA
10:15 – 10:30
LENS-LESS ACOUSTIC TWEEZERS BASED ON SPIRAL-ARM
VORTEX-BEAM TRANSDUCERS CAPABLE OF LEVITATING,
TRAPPING, AND MANIPULATING LARGE AND HEAVY PARTICLES
Jaehoon Lee, Kianoush Sadeghian Esfahani,
Matin Barekatain, and Eun S. Kim
University of Southern California, USA
10:30 – 10:45
FLUORESCENCE-ACTIVATED MULTI-SORTING OF SINGLE CELLSUTILIZING HIGH-SPEED ON-CHIP FLOW CONTROL
Makoto Saito1, Niko Kimura1, Shigeo S. Sugano2, Yoko Yamanishi1,
Fumihito Arai3, and Shinya Sakuma1
1
Kyushu University, JAPAN, 2National Institute of Advanced
Industrial Science and Technology (AIST), JAPAN, and3
University of Tokyo, JAPAN29

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 30

Session W2B – Optical Devices
Session Chairs:
Victor Javier Cadarso Busto, Monash University, AUSTRALIA
Ulrike Wallrabe, University of Freiburg, GERMANY
Event Hall
W2B.01

W2B.02W2B.03

W2B.04

W2B.0509:30 – 09:45
METAMATERIAL-ENHANCED VIBRATIONAL CIRCULARDICHROISM FOR MID-INFRARED SPECTROSCOPIC
NANOSENSORSCheng Xu1,2, Zhihao Ren1,2, Hong Zhou1,2, Jingkai Zhou1,
Chong Pei Ho2, Nan Wang2, and Chengkuo Lee1
1
National University of Singapore, SINGAPORE and 2Agency for
Science, Technology and Research (A*STAR), SINGAPORE
09:45 – 10:00
MULTIFUNCTIONAL METASURFACE FOR A MINIATURIZEDREFLECTION-TYPE ATOMIC VAPOR CELL
Ponrapee Prutphongs1, Katsuma Aoki1, Satoshi Ikezawa1,
Motoaki Hara2, and Kentaro Iwami1
1
Tokyo University of Agriculture and Technology, JAPAN and
2
National Institute of Information and Communication
Technology, JAPAN
10:00 – 10:15
AN ALL-METAL METASURFACE FOR HIGH-EFFICIENCYREFRACTIVE INDEX SENSING BASED ON REFLECTIONTYPE SURFACE LATTICE RESONANCE
Liye Li1, Lijun Ma1, Yifan Ouyang1, Hongshun Sun1,
Shengxiao Jin1, Senyong Hu1, Meizhang Wu2,
Zhimei Qi3, and Wengang Wu1
1
Peking University, CHINA, 2University of Science andTechnology Beijing, CHINA, and 3University of Chinese
Academy of Sciences, CHINA
10:15 – 10:30
AN INTEGRATED PLATFORM FOR CAVITY OPTOMECHANICS
WITH VACUUM-SEALED SILICON PHOTONIC MEMS
Pierre Edinger1, Gaehun Jo1, Simon J. Bleiker1,
Alain Y. Takabayashi2, Niels Quack2, Peter Verheyen3,
Umar Khan3,4, Wim Bogaerts3,4, Cleitus Antony5,Frank Niklaus1, and Kristinn B. Gylfason1
1
KTH Royal Institute of Technology, SWEDEN, 2École PolytechniqueFédérale de Lausanne (EPFL), SWITZERLAND, 3IMEC, BELGIUM,
4
Ghent University, BELGIUM, and 5Tyndall National Institute, IRELAND
10:30 – 10:45
FIRST DEMONSTRATION OF SELF-POWERED ALGAN/GANUV PHOTODETECTOR ENABLED BY NON-PLANARSCHOTTKY DEPLETION
Yuhan Pu1,2 and Yung C. Liang1,21National University of Singapore, SINGAPORE and2
National University of Singapore (Suzhou) ResearchInstitute, CHINA

30

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 31

Session W2C – Packaging & Fabrication
Session Chairs:
Chun Wen “Emerson” Cheng, TSMC, TAIWAN
Hiromasa Yagyu, Kanto Gakuin University, JAPAN
Room A
W2C.01

W2C.02W2C.03W2C.04

W2C.0509:30 – 09:45
3D PRINTING OF SILICA-HSQ COMPOSITES WITH
SUB-MICROMETER RESOLUTION AND SELECTIVELY
GENERATED SILICON NANOCRYSTALS
Po-Han Huang1, Miku Laakso1, Oliver Hartwig2,
Georg S. Duesberg2, Göran Stemme1,
Kristinn B. Gylfason1, and Frank Niklaus1
1
KTH Royal Institute of Technology, SWEDEN and2
Universität der Bundeswehr Munich, GERMANY
09:45 – 10:00
A TIME-MATCHED SIO2-LAYER ETCH FOR ADVANCED MEMS
FOUNDRY PROCESSESD MULTI-PROJECT CHIP (MPC)
Sushil Kumar, Khanjan Joshi, and Pushpapraj Singh
Indian Institute of Technology Delhi, INDIA
10:00 – 10:15
LIQUID-IN-A-MEMS: ENCAPSULATION OF LIQUID IN A
MICROCAPSULE BY INKJET PRINTING
Jongeon Park, Arnaud Bertsch, and Juergen Brugger
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND
10:15 – 10:30
DOUBLE-LEVEL TEMPORARY PROTECTIVE PACKAGING
OF TSV-BASED MICRO-MIRROR ARRAY FOR OPTICALWINDOW-FREE VERTICAL INTEGRATION
Yuhu Xia1,2, Biyun Ling1, Xiaoyue Wang1,
Minli Cai1,2, and Yaming Wu1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA
10:30 – 10:45
THE HETEROGENEOUS PACKAGING OF A 3 × 3 MINI-LED
ARRAY FOR SMART CONTACT LENS APPLICATIONS
Cheng-Wei Tsai, Guan-Ting Yeh, Shun-Hsi Hsu, Shin-Ho Wu,
Yu-Hsuan Huang, Her-Ming Chiueh, and Jin-Chern Chiou
National Yang Ming Chiao Tung University, TAIWAN

31

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Session W2D – Non-Linear Resonators
Session Chairs:
Cristina Consani, Silicon Austria Labs GmbH, AUSTRIA
Hao Jia, Chinese Academy of Sciences (CAS), CHINA
Room DW2D.01

W2D.02

W2D.03

W2D.04

W2D.0509:30 – 09:45
OPERATION OF ARRAYED LOGIC ELEMENTS FOR
MEMS ISING MACHINE
Shun Yasunaga, Motohiko Ezawa, Keigo Tsuji, Kei Misumi,
Tomoki Sawamura, Shinji Tsuboi, Ayako Mizushima,
Yukinori Ochiai, Akio Higo, and Yoshio Mita
University of Tokyo, JAPAN
09:45 – 10:00
EFFICIENT RESERVOIR COMPUTING BY NONLINEARLY COUPLEDPIEZOELECTRIC MEMS RESONATORS
Takeshi Yoshimura1, Taiki Haga1, Norifumi Fujimura1,
Kensuke Kanda2, and Isaku Kanno3
1
Osaka Metropolitan University, JAPAN, 2University of Hyogo, JAPAN,
and 3Kobe University, JAPAN
10:00 – 10:15
CONSTRUCTING MICROMECHANICAL FREQUENCY COMBS
IN BIFURCATING ATTRACTOR BRANCHES FOR EVENTTRIGGERED SENSORS
Ting-Yi Chen, Chun-Pu Tsai, and Wei-Chang Li
National Taiwan University, TAIWAN
10:15 – 10:30
VIBRO-IMPACT PERTURBATION BASED ATTRACTOR EXCHANGERFOR OPEN-LOOP NONLINEAR RESONATORS
Chun-Pu Tsai and Wei-Chang Li
National Taiwan University, TAIWAN
10:30 – 10:45
IMPROVING THE DYNAMIC RANGE AND RESOLUTION OF MEMSRESONANT SENSORS UTILIZING NONLINEAR CANCELLATION
Chengxin Li1, Aojie Quan1, Hemin Zhang2, Chen Wang1,
Mustafa Mert Torunbalci3, Linlin Wang1, Chenxi Wang1,
Yangyang Guan1, Yuan Wang4, and Michael Kraft1
1
KU Leuven, BELGIUM, 2Northwestern Polytechnical University, CHINA,
3
Broadcom, USA, and 4University of Macau, CHINA

10:45 – 11:15

Break and Exhibit Inspection

32

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Session W3A – Microfluidics III
Session Chairs:
Andreu Llobera, Silicon Austria Labs GmbH, AUSTRIA
Göran Stemme, KTH – Royal Institute of Technology, SWEDEN
New Hall
W3A.01

W3A.03W3A.04

W3A.05

W3A.06

11:15 – 11:45
INVITED PRESENTATIONFUNCTIONAL MATERIALS FOR SENSING AND ACTUATIONIN MICROFLUIDICS
Sandra Garcia-Rey, Udara Bimendra Gunatilake, Yara Alvarez-Braña,
Lourdes Basabe-Desmonts, and Fernando Benito-Lopez
University of the Basque Country, SPAIN
11:45 – 12:00
A HIGH-THROUGHPUT UNIFORM-SIZED DROPLET GENERATORWITH A TRIANGULAR CROSS-SECTION CHANNEL FABRICATEDBY SIMPLE MEMS PROCESS AND SELF-ALIGNMENT
Byeolnim Oh1, Youngseo Cho2, Jaewon Park3,
Younghak Cho2, and Hyun Soo Kim1
1
Kwangwoon University, KOREA, 2Seoul National University of
Science and Technology, KOREA, and 3Korea University, KOREA
12:00 – 12:15
IONIC SIGNAL AMPLIFICATION ACTUATED BY GAS DISSOLUTION
Sangjin Seo and Taesung Kim
Ulsan National Institute of Science and Technology (UNIST), KOREA
12:15 – 12:30
ALGINATE HYDROGEL MICROBEADS WITH DIFFERENT MESH
STRUCTURES ENABLE CONTROLLED RELEASE OF
ADENO-ASSOCIATED VIRUS FOR GENE THERAPY
Aiki Hioki1, Shuhei Takatsuka1, Yuta Kurashina2,
and Hiroaki Onoe1
1
Keio University, JAPAN and
2
Tokyo University of Agriculture and Technology, JAPAN
12:30 – 12:45
MECHANISM OF DRUG RELEASING UNIT VIA OSCILLATING
BUBBLES AND INTEGRATION WITH 3-D MICROSWIMMER
Wenbo Li, Fang-Wei Liu, and Sung Kwon Cho
University of Pittsburgh, USA

33

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 34

Session W3B – Chemical Sensors I
Session Chairs:
Mehdi Javanmard, Rutgers University New Brunswick, USA
Roland Zengerle, Hahn-Schickard-Gesellschaft e.V., GERMANY
Event Hall
W3B.01

W3B.02

W3B.03W3B.04

W3B.05

11:15 – 11:30
HYDROGEN-SENSING PROPERTIES AND REDUCTION-INDUCEDSENSING MECHANISM OF NICKEL OXIDE NANOPLATESTao Zhang1,2, Ying Chen1, Ming Li1, Pengcheng Xu1,3,
Xinxin Li1,3, and Dan Zheng2
1
Chinese Academy of Sciences (CAS), CHINA,
2
Shanghai Institute of Technology, CHINA, and3
University of Chinese Academy of Sciences, CHINA
11:30 – 11:45
QUANTITATIVE MEASUREMENTS OF ADSORBED OXYGENSPECIES ON MATERIAL SURFACE FOR HIGH-PERFORMANCEGAS SENSOR DESIGN
Ruomeng Guo1,2, Xinyu Li1,3, Ming Li1,3, Ying Chen1,3,Pengcheng Xu1,3, and Xinxin Li1,3
1
Chinese Academy of Sciences (CAS), CHINA,
2
ShanghaiTech University, CHINA, and3
University of Chinese Academy of Sciences, CHINA
11:45 – 12:00
FAST AND SIMULTANEOUS GAS SENSING METHOD INMIXED GASES USING MULTIPLE MICROMACHINEDTHERMAL CONDUCTIVITY DETECTORS FOR
FUTURE CARBON-NEUTRAL SOCIETY
Hiroaki Yamazaki, Ping Wang, Naoya Fujiwara, Yoshihiko Kurui,
Naoki Hiramatsu, Fumitaka Ishibashi, Ryota Kitagawa,and Akihiro Kojima
Toshiba Corporation, JAPAN
12:00 – 12:15
A CHAMELEON–INSPIRED FLEXIBLE HUMIDITY SENSOR BASEDON PEDOT: PSS–MEDIATED THERMOCHROMIC LIQUID CRYSTALCOMPOSITE MATERIALS
Chong-Ren Sun, Yu-Hsuan Cheng, and Ching-Te Kuo
National Sun Yat-sen University, TAIWAN
12:15 – 12:30
MONOLITHIC INTEGRATION OF GAS/HUMIDITY/TEMPERATURESENSORS WITH THERMAL COUPLING EFFECT REDUCTION
Chi-Te Fang1, Tung-Lin Chien1, Yung-Chen Li1, Yuanyuan Huang1,
Yu-Cheng Lin2, I-Yu Huang3, and Weileun Fang1
1
National Tsing Hua University, TAIWAN, 2National Cheng Kung
University, TAIWAN, and 3National Sun Yat-sen University, TAIWAN34

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 35

Session W3B – Chemical Sensors I
Continued
Event Hall
W3B.06

12:30 – 12:45
FABRICATION OF HIGH-RESOLUTION MULTI-ION IMAGE SENSOR
USING RUBBER-BASED NEGATIVE RESIST AND EXTRACELLULAR
ION IMAGING IN THE HIPPOCAMPAL SLICE
Moe Kato1, Jumpei Otsuka1, Hideo Doi1, Bijay Parajuli2,
Tomoko Horio1, Eiji Shigetomi2, Youichi Shinozaki2,
Yong Joon Choi1, Kazuhiro Takahashi1, Toshiaki Hattori1,
Toshihiko Noda1, Schuichi Koizumi2, and Kazuaki Sawada1
1
Toyohashi University of Technology, JAPAN and2
University of Yamanashi, JAPANSession W3C – Resonating Devices
Session Chairs:
Sheng-Shian Li, National Tsing Hua University, TAIWAN
Mohssen Moridi, Silicon Austria Labs GmbH, AUSTRIA
Room A
W3C.01

W3C.02

W3C.03W3C.04

11:15 – 11:30
TEMPERATURE COMPENSATION IN CMOS-MEMS OSCILLATORSVIA FOLDED-ANCHOR RESONATOR GEOMETRICAL TUNING
Rafel Perelló-Roig1,2, Salvador Barceló1,2, Jaume Verd1,2,
Sebastià Bota1,2, and Jaume Segura1,2
1
University of the Balearic Islands, SPAIN and 2Health ResearchInstitute of the Balearic Islands, SPAIN
11:30 – 11:45
COMPACT MEMS TEMPERATURE SENSOR EXPLOITINGA DUAL-MODE POLYSILICON RESONATOR AND
PHASE-LOCKED-LOOP MULTIPLICATION
Paolo Frigerio1, Andrea Fagnani1, Valentina Zega1, Gabriele Gattere2,
Attilio Frangi1, and Giacomo Langfelder1
1
Politecnico di Milano, ITALY and 2STMicroelectronics, ITALY
11:45 – 12:00
LISSAJOUS-FM RESONANT MAGNETOMETER
Linxin Zhang, Takashiro Tsukamoto, and Shuji Tanaka
Tohoku University, JAPAN
12:00 – 12:15
EXPLOITING BLUE SIDEBAND EXCITATION TO ENHANCE
MODE LOCALIZATION IN A RESONANT DOUBLE-ENDED
TUNING FORK MAGNETOMETER
Yuan Wang1, Chun Zhao2, Jingqian Xi4, Huafeng Liu4,
Chen Wang3, Linlin Wang3, Shaolin Zhang4, Qiu Wang4,
Fangjing Hu4, and Michael Kraft3
1
University of Macau, CHINA, 2University of York, UK,3
KU Leuven, BELGIUM, and 4Huazhong University of
Science and Technology, CHINA

35

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 36

Session W3C – Resonating Devices
Continued
Room A
W3C.05

W3C.06

12:15 – 12:30
A FREQUENCY COMB WITH HIGH RESOLUTION AND
LOW THRESHOLD POWER BASED ON A SINGLE
MODE CIRCULAR RESONATOR
Hongyu Chen, Dongyang Chen, Ronghua Huan, and Jin Xie
Zhejiang University, CHINA
12:30 – 12:45
A MASS SENSOR BASED ON 3-DOF MODE LOCALIZED BAWRESONATORS WITH ENHANCED QUALITY FACTOR
AND RESOLUTION
Linlin Wang1, Chen Wang1, Aojie Quan1, Yuan Wang2, Chenxi Wang1,
Bernardo P. Madeira1, Chengxin Li1, and Michael Kraft1
1
KU Leuven, BELGIUM and 2University of Macau, CHINA

Session W3D – Logic Devices & Switches
Session Chairs:
Deyong Chen, University of Chinese Academy of Sciences, CHINA
Caroline Coutier, CEA Leti, FRANCE
Room DW3D.01

W3D.03W3D.04

11:15 – 11:45
INVITED PRESENTATIONHARDWARE PLATFORM FOR EDGE COMPUTING BASEDON NANOELECTROMECHANICAL RELAYS
Dinesh Pamunuwa1, Elliott Worsey1, Qi Tang1,
Mukesh K. Kulsreshath1, Victor Marot1,
Yingying Li2, and Simon Bleiker2
1
University of Bristol, UK and2
Royal Institute of Technology (KTH), SWEDEN
11:45 – 12:00
CORRECTION OF TRANSMITTERS’ PIXEL VALUES IN ANULTRASONIC FOURIER TRANSFORM ANALOGCOMPUTING APPARATUS
Xing Haw Marvin Tan1, Daniel Ssu-Han Chen1, Zaifeng Yang1,
Viet Phuong Bui1, Kevin Tshun Chuan Chai1, Ching Eng Png1,
and Amit Lal2
1
Agency of Science Technology and Research (A*STAR),SINGAPORE and 2Cornell University, USA
12:00 – 12:15
ADIABATIC LOGIC GATES FOR ULTRA-LOW-POWER OPERATIONUSING CONTACTLESS CAPACITIVE MEMS
Aleksandra Marković1, Laurent Mazenq1, Adrian Laborde1,
Hervé Fanet2, Gaël Pillonnet2, and Bernard Legrand1
1
Université de Toulouse, FRANCE and2
Université Grenoble Alpes, FRANCE

36

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Session W3D – Logic Devices & SwitchesContinued
Room DW3D.05

W3D.06

12:15 – 12:30
FULLY 3D-PRINTED, SEMICONDUCTOR-FREE,
TRANSISTOR-LIKE LOGIC DEVICES
Jorge Cañada and Luis Fernando Velásquez-García
Massachusetts Institute of Technology, USA
12:30 – 12:45
ROBUST MEMS WAVEGUIDE SWITCH FOR THZ
SPECTROSCOPY IN SPACE
Soﬁa Rahiminejad, Sven van Berkel, Robin H. Lin,
Cecile Jung-Kubiak, Goutam Chattopadhyay,
and Mina Rais-Zadeh
California Institute of Technology, USA

12:45 – 14:15

Lunch and Exhibit Inspection

Poster Session W4P and Exhibit Inspection
Event Hall
14:15 – 16:15
Poster presentations are listed by topic category with theirassigned number starting on page 51.

Session W5B – Chemical Sensors II
Session Chairs:
Markus Graf, Karlsruhe University of Applied Sciences, GERMANY
Shinya Sakuma, Kyushu University, JAPANEvent Hall
W5B.01

W5B.03

16:15 – 16:45
INVITED PRESENTATIONGAS SENSING MECHANISMS REVEALED WITH EMERGING
IN-SITU CHARACTERIZATION TECHNIQUES
Pengcheng Xu1,2 and Xinxin Li1,2
1
Chinese Academy of Sciences, CHINA and2
University of Chinese Academy of Sciences, CHINA
16:45 – 17:00
HIGH-RESPONSIVITY SINGLE-CRYSTAL SILICON
MEMS THERMOPILES FOR DIFFERENTIAL
THERMAL ANALYSIS (DTA)
Haozhi Zhang1,2, Hao Jia1,2, Weiwen Feng1,2,
Pengcheng Xu1,2, and Xinxin Li1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

37

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Session W5B – Chemical Sensors II
Continued
Event Hall
W5B.04W5B.05W5B.0617:00 – 17:15
A NON-ENZYMATIC ELECTROCHEMICAL SENSOR BASED ON
CERIUM OXIDE NANOCUBES FOR THE RAPID DETECTION
OF HYDROGEN PEROXIDE RESIDUES IN FOOD SAMPLES
Xuefeng Wang1,2, Jiaci Shi1,3, Wei Shen1,3, Pengcheng Xu1,2,
and Xinxin Li1,2
1
Chinese Academy of Sciences (CAS), CHINA,
2
University of Chinese Academy of Sciences, CHINA, and3
Shanghai Normal University, CHINA
17:15 – 17:30
LONG-LIFE SENSING FILM STRUCTURE AND RELIABILITYEVALUATION OF PD-CU-SI-METALLIC GLASS FOR
HYDROGEN SENSOR
Yumi Hayashi, Naoki Hiramatsu, Hiroaki Yamazaki,
and Akihiro Kojima
Toshiba Corporation, JAPAN
17:30 – 17:45
CMOS GAS-SENSING ARRAY BY NOVEL SENSING APPROACH
USING MIXED-PIXEL- ARCHITECTURE FOR DETECTION OF
VARIOUS RESPONSE OF GAS-SENSITIVE MEMBRANES
Takeru Wada, Tomoki Kamijo, Yoshiko Noda, Daisuke Akai,
Takeshi Hizawa, Yasuyuki Kimura, Yong-Joon Choi,
Kazuhiro Takahasi, Kazuaki Sawada, and Toshihiko Noda
Toyohashi University of Technology, JAPANSession W5C – RF Resonators
Session Chairs:
Azadeh Ansari, Georgia Institute of Technology, USA
Ming-Huang Li, National Tsing Hua University, TAIWAN
Room A
W5C.01

W5C.02

16:15 – 16:30
AN INTRINSICALLY TEMPERATURE-COMPENSATED FULLYDIFFERENTIAL CMOS-MEMS RESONATOR WITH
DUAL-RESISTOR PIEZORESISTIVE DETECTION
Zhi-Qiang Lee, Jie-Sheng Jiang, Hung-Yu Chen,
Sheng-Shian Li, and Ming-Huang Li
National Tsing Hua University, TAIWAN
16:30 – 16:45
VERY HIGH FREQUENCY STABILITY OF SINGLE-CRYSTALSILICON THERMAL-PIEZORESISTIVE RESONATORSWITH PHASE-LOCKED LOOP
Connor A. Watkins1, Jaesung Lee1, Jonathan P. McCandless2,3,Harris J. Hall2, and Philip X.-L. Feng1,3
1
University of Florida, USA, 2Air Force Research Laboratory, USA, and3Case Western Reserve University, USA

38

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 39

Session W5C – RF Resonators
Continued
Room A
W5C.03

W5C.04

W5C.05W5C.06

16:45 – 17:00
REDUCED ORDER MODELING OF PIEZOELECTRIC RESONATORSWITH MULTI-FREQUENCY IMPEDANCE ESTIMATION
Kuan-Ting Chen, Tzu-Hsuan Hsu, Guan-Lin Wu, and Ming-Huang Li
National Tsing Hua University, TAIWAN
17:00 – 17:15
EXPERIMENTAL STUDY OF THE ORIGIN OF NONLINEAR DAMPINGIN VERY HIGH FREQUENCY CONTOUR MODE RESONATORSYi Chan1, Xuetian Wang1, Juan S. Gomez-Diaz2,
and Jeronimo Segovia-Fernandez3
1
Beijing Institute of Technology, CHINA, 2University of California,
Davis, USA, and 3Texas Instruments, USA
17:15 – 17:30
MICRO-TO-NANOACOUSTIC SCALN LAMB WAVE RESONATORS:FREQUENCY SCALING TOWARDS THE MM-WAVE SPECTRUM
Gabriel Giribaldi, Luca Colombo, Pietro Simeoni, and Matteo Rinaldi
Northeastern University, USA
17:30 – 17:45
NONLINEAR PERFORMANCE OF MONOLITHICALLY INTEGRATEDSCALN-BASED GHZ ACOUSTIC FILTERS WITH RFSOI SWITCHES
Chen Liu, Ying Zhang, Xinghua Wang, Wenjia Yang,
Eugene Yi Zhun Woo, Danlei Yan, Raja M. Kumarasamy,
Nan Wang, and Yao Zhu
Agency of Science Technology and Research (A*STAR), SINGAPORE

Session W5D – Intelligent Bio-Chemical Sensors
Session Chairs:
Paddy French, TU Delft, NETHERLANDS
Bruno Le Pioufle, ENS Paris-Saclay, FRANCE
Room DW5D.01

W5D.02

16:15 – 16:30
A MICROSYSTEM FOR NON-INVASIVE IMAGING ANDSIMULTANEOUS MULTI-BIOMARKER 3D IMAGING
Erick J. Vargas-Ordaz, Terrance Lam, Bonan Liu,
Fabrizzio Horta, Michelle L. Halls, Adrian Neild,and Victor J. Cadarso
Monash University, AUSTRALIA
16:30 – 16:45
FABRICATION AND DEMONSTRATION OF FILTER-FREE
WAVELENGTH IMAGE SENSOR FOR VISUALIZATION OF
WAVELENGTH INFORMATION
Tomoya Ide, Yong-Joon Choi, Nakano Kakeru, Tsugumi Sakae,
Ryoya Matsubara, Yasuyuki Kimura, Kensuke Murakami,
Yoshiko Noda, Daisuke Akai, Takashi Hizawa, Hiromu Ishii,
Kazuhiro Takahashi, Toshihiko Noda, and Kazuaki Sawada
Toyohashi University of Technology, JAPAN39

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 40

Session W5D – Intelligent Bio-Chemical Sensors
Continued
Room DW5D.03

W5D.04

W5D.05W5D.06

16:45 – 17:00
WIRELESS SOIL PH SENSING USING FULLY-DEGRADABLESPRIT-RING-RESONATOR ARRAY WITH ISOTROPICELECTROMAGNETIC RESPONSE
Ken Sakabe1, Tetsuo Kan2, and Hiroaki Onoe1
1
Keio University, JAPAN and 2University ofElectro-Communications, JAPAN
17:00 – 17:15
MOF-INTEGRATED ULTRA-BROADBAND NANOANTENNAS FOR
MACHINE-LEARNING-ENABLED VOC GAS IDENTIFICATION
Hong Zhou, Dongxiao Li, Zhihao Ren, Cheng Xu,
Chan Wang, and Chengkuo Lee
National University of Singapore, SINGAPORE
17:15 – 17:30
TACTILE-OLFACTORY FUSION HUMANOID HAND FOR
ENVIRONMENTAL SENSING WITH FAST NONLINEARDECISION-MAKING
Jiachuang Wang1,2, Xiawei Yue1,2, Shuai Wei1,2,
Pingping Zhang3, Nan Qin1,2, and Tiger H. Tao1,2,4,5,6
1
Chinese Academy of Sciences (CAS), CHINA, 2University ofChinese Academy of Sciences, CHINA, 3Suzhou Huiwen
Nanotechnology Co., Ltd, Suzhou, CHINA, 4Neuroxess Co.,
Ltd. (Jiangxi), CHINA, 5Guangdong Institute of Intelligence
Science and Technology, CHINA, and 6Tianqiao and Chrissy
Chen Institute for Translational Research, CHINA
17:30 – 17:45
A GAS SENSOR ARRAY PACKAGED WITH A HIERARCHICALNEURAL NETWORK FOR GAS SPECIES IDENTIFICATIONAND CONCENTRATION ESTIMATION
Zong Liu1,2, Gabriel E. Carranza1, Yushen Hu1,
Fei Wang2, and Man Wong1
1
Hong Kong University of Science and Technology, CHINA and
2
Southern University of Science and Technology, CHINA

Session W5E – Functional Materials & Fabrication II
Session Chairs:
Olivier Paul, University of Freiburg, GERMANY
Yi Chiu, National Yang Ming Chiao Tung University, TAIWAN
Room E
W5E.01

16:15 – 16:45
INVITED PRESENTATIONADVANCED MICROFABRICATION OF PIEZOMEMS SENSORSAND ACTUATORS
Annalisa De-Pastina
Silicon Austria Labs GmbH, AUSTRIA

40

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Session W5E – Functional Materials & Fabrication II
Continued
Room E
W5E.03

W5E.04

W5E.05W5E.06

16:45 – 17:00
STUDY ON THE POLAR ORIENTATION OF PLASMA-DEPOSITEDPIEZOELECTRIC MATERIALS
Jan-Willem Burssens1, Chen Wang1, Xinyu Wu1,
Jesus Gandaro-Loe1, Appo Van der Wiel2,
and Michael Kraft1
1
KU Leuven, BELGIUM and 2Melexis, BELGIUM
17:00 – 17:15
MEASURING LIGHT PENETRATION FOR SPECTRALANALYSIS WITH INTERCALATED GRAPHENE/QUANTUM
DOT PHOTODETECTORS
Seungbae Ahn, Ju Ying Shang, and Oscar Vazquez Mena
University of California, San Diego, USA
17:15 – 17:30
ISOTROPIC DEGRADABLE METAMATERIAL FORENVIRONMENTAL SENSING
Tatsuya Yano1, Gaku Furusawa1, Hiroaki Onoe2,
and Tetsuo Kan1
1
University of Electro-Communications, JAPAN and
2
Keio University, JAPAN
17:30 – 17:45
LIGHT-DRIVEN FLAGELLATED MICRO-GEL ROBOT MADE OF
TEMPERATURE-RESPONSIVE HYDROGEL ACTUATOR
Hinako Sato1, Yoshiyuki Yokoyama2, and Takeshi Hayakawa1
1
Chuo University, JAPAN and 2Toyama Industrial Technology
Research and Development Center, JAPAN

Conference Banquet
New Hall
18:00 – 21:00

Wednesday Banquet – Calligraphy (at KICC).

41

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 42

THURSDAY AT A GLANCE
08:30 - 09:15

Plenary Presentation 4
Chunhai Fan, Shanghai Jiao Tong University (SJTU), CHINA

09:15 - 09:30

Transition Break

09:30 - 10:45

Session Th2C
TissueEngineering II

Session Th2DSoft
Actuators

10:45 - 11:15

11:15 - 12:45

Session Th2E
Fluidic
Sensors

Session Th2F
Wearable
Devices

Break
Session Th3C
Agricultural
Applications

Session Th3D
Actuators II

Session Th3E
ChemicalSensors III

Session Th3F
Flexible
Devices &Fabrication

INVITED SPEAKER INVITED SPEAKER

12:45 - 13:00

Transition Break

13:00 - 13:30

Best Paper Award Ceremony and Closing Remarks

THURSDAY PROGRAM
29 JUNE
Plenary Presentation 4
Session Chair:
Andreu Llobera, Silicon Austria Labs GmbH, AUSTRIA
Room A
Th1A.P4

08:30 - 09:15
NUCLEIC ACIDS-BASED INFORMATION MATERIALS
Chunhai Fan
Shanghai Jiao Tong University (SJTU), CHINA

09:15 – 09:30

Transition

42

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 43

Session Th2C – Tissue Engineering II
Session Chairs:
Paddy French, TU Delft, NETHERLANDS
Swaminathan Rajaraman, University of Central Florida, USA
Room A
Th2C.01

Th2C.02

Th2C.03

Th2C.04

Th2C.05

09:30 – 09:45
ON-CHIP DIFFERENTIATION OF RADIALLY VASCULARIZEDHEPATIC CORDS MIMICKING THE LIVER LOBULE
Alan Raj Jeffrey Rajendran1,2, Sakina Chantoiseau-Bensalem1,
Antonietta Messina2, Nassima Benzoubir2,3, Rasta Ghasemi4,Jean-Charles Duclos-Vallée2,3, and Bruno Le Piouﬂe1,4
1
Université Paris-Saclay, FRANCE, 2Université Paris-Saclay, FRANCE,
3
Hôpital Paul Brousse, FRANCE, and 4Université Paris-Saclay, FRANCE
09:45 – 10:00
EXPLORING AUTONOMOUS OPTIMAL EXPERIMENTAL
CONDITIONS FOR IN VITRO TISSUE MATURATIONWITH BATCH BAYESIAN OPTIMIZATION
Daiki Miyata1, Keitaro Kasahara1, Takahiro Yamada1,
Yuta Tokuoka1, Yujin Taguchi1, Yuta Kurashina2,
Akira Funahashi1, and Hiroaki Onoe1
1
Keio University, JAPAN and 2Tokyo University ofAgriculture and Technology, JAPAN
10:00 – 10:15
AUTOMATED LARGE-SCALE SPHEROID GENERATIONVIA HANGING-DROP AND EFFICIENT TRANSFER INTO
PHYSIOLOGICAL MIMICKING MICROENVIRONMENT
Viktoria Zieger1, Ellen Woehr2,3, Stefan Zimmermann1,
Daniel Frejek3, Peter Koltay3, Roland Zengerle1,3,
and Sabrina Kartmann3
1
University of Freiburg, GERMANY, 2University of Furtwangen,
GERMANY, and 3Hahn-Schickard, GERMANY
10:15 – 10:30
MICROFLUIDIC CO-CULTURES OF CANCER SPHEROIDS
AND NK CELLS FOR TESTING IMMUNOTHERAPY
Alan M. Gonzalez-Suarez, Michael Medlyn, Daheui Choi,
Gulnaz Stybayeva, Daniel D. Billadeau, and Alexander Revzin
Mayo Clinic, USA
10:30 – 10:45
APICAL MICROVILLI OF A HYBRID HIPSC-DERIVED PROXIMALTUBULE MICROTISSUE REACT TO FLOW-INDUCED SHEAR
STRESS IN A MICROPHYSIOLOGICAL SYSTEM
Ramin Banan Sadeghian1, Cheng Ma1, Akihiko Kawakami1,
Minoru Takasato1,2,3, and Ryuji Yokokawa1
1
Kyoto University, JAPAN, 2Institute of Physical and Chemical
Research (RIKEN), JAPAN, and 3Osaka University, JAPAN43

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 44

Session Th2D – Soft Actuators
Session Chairs:
Vincent C. Lee, National University of Singapore, SINGAPORE
Yong Kyu Yoon, University of Florida, USA
Room DTh2D.01

Th2D.02

Th2D.03

Th2D.04

Th2D.05

09:30 – 09:45
HIGH EFFICIENCY ACTUATION CONVERSION MECHANISM
FOR HIGH-OUTPUT BENDING MOTION OF A SOFT
INFLATABLE MICROACTUATOR
Yuto Hori, Seiji Suzuki, Tatsumi Katsura, and Satoshi Konishi
Ritsumeikan University, JAPAN
09:45 – 10:00
SELF-SENSING SOFT PNEUMATIC MICRO ACTUATORS FOR
HAPTIC FEEDBACK AND HUMAN-MACHINE INTERFACES
Xiayu Wang1, Fade Hu1, Zheng You1, and Chuan Luo1,2
1Tsinghua University, CHINA and 2Beijing Innovation
Center for Future Chips, CHINA
10:00 – 10:15
DEPLOYABLE SOFT MICROACTUATOR WITH WATER CIRCULATIONCHANNEL AND SHAPE MEMORY POLYMER
Toshiro Yamanaka, Taosong Yu, Yuta Taniguchi,
Satoshi Amaya, and Fumihito Arai
University of Tokyo, JAPAN
10:15 – 10:30
MAGNETIC CONTROLLED MULTIFUNCTIONAL
THREE-DIMENSIONAL SOFT ROBOT WITH
SELF-PERCEPTIVE CAPABILITY
Chen Xu, Ji Wan, Haobin Wang, Zehua Xiang,
Pengcheng Zhao, Mengdi Han, and Haixia Zhang
Peking University, CHINA
10:30 – 10:45
UNTETHERED SWARM ROBOTS WITH INDEPENDENTCRAWLING AND ROLLING MOTIONSWei Yue1, Xinyu Zhou2, Fanping Sui1, Mingzheng Duan1,and Liwei Lin1
1
University of California, Berkeley, USA and2
Peking University, CHINA

Session Th2E – Fluidic Sensors
Session Chairs:
Qiao Lin, Columbia University, USA
Ravi Selvaganapathy, McMaster University, CANADA
Room ETh2E.01

09:30 – 09:45
A UNIVERSAL GAS SENSING CONCEPT THROUGH ACOUSTICCOUPLING IN A CAVITY
Derin Erkan, Ahmet A. Derin, and Erdinc Tatar
Bilkent University, TURKEY44

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 45

Session Th2E – Fluidic Sensors
Continued
Room ETh2E.02

Th2E.03

Th2E.04

Th2E.05

09:45 – 10:00
HIGH QUALITY FACTOR SUSPENDED NANOCHANNEL RESONATOR
DEVICES, WITH SELF-OSCILLATION CAPACITY
Katell Aldrin1, Thomas Furcatte1, Georgios Katsikis2,
Guillaume Jourdan1, Selim Olcum3, Aurélien Lepoetre1,
Jean-François Beche1, François Boizot1, Marc Sansa1,
Fabrice Navarro1, Scott Manalis2, and Vincent Agache11
Université Grenoble Alpes, FRANCE, 2Massachusetts
Institute of Technology, USA, and 3TRAVERA, USA
10:00 – 10:15
DROPLET AS A MECHANICAL COUPLING FOR A VIBRATIONALSYSTEM AND ITS APPLICATION IN FLUID PROPERTY SENSING
Saravanakumar Dharmaraj and Prosenjit Sen
Indian Institute of Science, INDIA
10:15 – 10:30
AN ULTRALOW-POWER FLEXIBLE THERMAL FLOW SENSORBASED ON ELECTROCHEMICAL IMPEDANCEKe Xiao1, Xiangyu Song1, Mingzheng Duan2, and Wei Xu1
1
Shenzhen University, CHINA and2
University of California, Berkeley, USA
10:30 – 10:45
PITOT-TYPE WATERFLOW SENSOR LOGGER FOR RELATIVEWATERFLOW VELOCITY MEASUREMENT OF A SEA TURTLE
Takuto Kishimoto1, Ryosuke Saito2, Hiroto Tanaka2, Yu Naruoka3,
Kenta Kuroda4, Katsufumi Sato4, and Hidetoshi Takahashi11Keio University, JAPAN, 2Tokyo Institute of Technology, JAPAN,
3
Japan Aerospace Exploration (JAXA), JAPAN, and4
University of Tokyo, JAPANSession Th2F – Wearable Devices
Session Chairs:
Eun Sok Kim, University of Southern California, USA
Andreas Weltin, University of Freiburg, GERMANY
Room B-1
Th2F.01

09:30 – 09:45
A BRAIN-TO-BRAIN INTERFACE WITH A FLEXIBLE NEURALPROBE FOR MOUSE TURNING CONTROL BY HUMAN MIND
Yifei Ye1, Zhenyu Wang1, Ye Tian1,2, Han Wang1, Cunkai Zhou1,
Honglin Hu1, Ting Zhou3, Zhitao Zhou1,2, Xiaoling Wei1,2,
Jianlong Zhao1,2, Tiger H. Tao1,2,4,5,6,7, and Liuyang Sun1,2
1Chinese Academy of Sciences, Shanghai, CHINA,
2
University of Chinese Academy of Sciences, CHINA,
3
Shanghai University, CHINA, 4ShanghaiTech University,
CHINA, 5Neuroxess Co., Ltd. (Jiangxi), CHINA,
6
Guangdong Institute of Intelligence Scienceand Technology, CHINA, and 7Tianqiao and Chrissy
Chen Institute for Translational Research, CHINA

45

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Session Th2F – Wearable Devices
Continued
Room B-1
Th2F.02

Th2F.03

Th2F.04

Th2F.05

09:45 – 10:00
ULTRA-CONFORMAL TONGUE ELECTRODE ARRAY FORTASTE PERCEPTION DECODING
Xiner Wang1,2, Guo Bai3, Zhaohan Chen4, Jizhi Liang1,2,
Qianyang Xie3, Meng Li1,2, Xiaoling Wei1,2, Liuyang Sun1,2,Zhitao Zhou1,2, and Tiger H. Tao1,2,5,6,7
1
Chinese Academy of Sciences (CAS), CHINA,
2
University of Chinese Academy of Sciences, CHINA,
3
Shanghai Ninth People’s Hospital, Shanghai JiaoTong
University School of Medicine, CHINA, 4Shanghai Normal
University, CHINA, 5Neuroxess Co., Ltd. (Jiangxi), CHINA,
6
Guangdong Institute of Intelligence Science and Technology,
CHINA, and 7Tianqiao and Chrissy Chen Institute forTranslational Research, CHINA
10:00 – 10:15
A WEARABLE MULTISENSORY PULSE SENSOR BASED ON
PIEZO-THERMIC TRANSDUCTION
Shuo Tian and Rong Zhu
Tsinghua University, CHINA
10:15 – 10:30
GAIT EVENT DETECTION USING PIEZOELECTRIC FIBEREMBEDDED SMART-SOCK
Jarred W. Fastier-Wooller1,2, Nathan Lyons1, Trung-Hieu Vu1,
Claudio Pizzolato1, Toshihiro Itoh2, Dzung Viet Dao1,
Jayishni Maharaj1, and Van Thanh Dau1
1
Griffith University, AUSTRALIA and 2University of Tokyo, JAPAN
10:30 – 10:45
CONTINUOUS CUFFLESS MONITORING OF ARTERIAL
BLOOD PRESSURE BASED ON HIGH-DENSITYFLEXIBLE SENSOR ARRAYFang Wang1,2, Heng Yang1,2, Ke Sun1, Yi Sun1, and Xinxin Li1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

10:45 – 11:15

Break and Exhibit Inspection

Session Th3C – Agricultural Applications
Session Chairs:
Xiao-An “Sean” Fu, University of Louisville, USA
Min Wang, Southern University of Science and Technology, CHINA
Room A
Th3C.01

11:15 – 11:45
INVITED PRESENTATIONPLANT-ON-A-CHIP TECHNOLOGIES AND ITS APPLICATIONS
Hirotaka Hida
Kobe University, JAPAN46

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 47

Session Th3C – Agricultural Applications
Continued
Room A
Th3C.03

Th3C.04

Th3C.05

Th3C.06

11:45 – 12:00
DEVELOPMENT OF PLANT GROWTH MONITORING SENSOR TO
VISUALIZE ION DYNAMICS IN PLANTS AND ITS FUNCTIONALVALIDATION IN LONG-TERM MEASUREMENTS
Taichi Yoshida, Yusuke Matsushita, Naoki Sakaguchi,
Yong-Joon Choi, Kazuhiro Takahashi, Kotaro Takayama,
Kazuaki Sawada, and Toshihiko Noda
Toyohashi University of Technology, JAPAN
12:00 – 12:15
COMPACT CHLOROPHYLL MEASUREMENT SYSTEMFOR QUANTITATIVE ANALYSIS OF LEAF
PHOTOSYNTHESIS IN AGRICULTURE
Ryoma Mibu, Ryosuke Ichikawa, Yong-Joon Choi,
Tomoya Ide, Seitaro Toda, Kazuhiro Takahashi,
Kotaro Takayama, Toshihiko Noda, and Kazuaki Sawada
Toyohashi University of Technology, JAPAN
12:15 – 12:30
A PASSIVE, WIRELESS GAS SENSOR BASED ON LASER INDUCEDGRAPHENE FOR SOIL AMMONIA LEVEL MONITORING
Chao Liang1, Wei Zhou1, Ziqi Mei2, Wenqiang Zhang1,
and Xiaoguang Zhao2
1China Agricultural University, CHINA and2
Tsinghua University, CHINA
12:30 – 12:45
HIGH-SPEED ON-CHIP IN-LIQUID DISPENSING BY UTILIZINGON-DEMAND VORTX GENERAIONS
Makoto Saito, Yoko Yamanishi, and Shinya Sakuma
Kyushu University, JAPANSession Th3D – Actuators II
Session Chair:Rakesh Chand, Vanguard International Semiconductor Corporation, SINGAPORE
Jungyul Park, Sogang University, KOREA
Room DTh3D.01

Th3D.03

11:15 – 11:45
INVITED PRESENTATION
ZERO-POWER OPTOMECHANICAL ACTUATORS
Behraad Bahreyni
Simon Fraser University, CANADA
11:45 – 12:00
DESIGN OF BI-DIRECTIONAL VO2-KIRIGAMI ELECTROTHERMALMICROACTUATOR WITH MILLIMETER LARGE STROKE
Masaaki Hashimoto, Tomoya Tsutsui, and Yoshihiro Taguchi
Keio University, JAPAN47

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 48

Session Th3D – Actuators II
Continued
Room DTh3D.04

Th3D.05

Th3D.06

12:00 – 12:15
BANDWIDTH ENHANCEMENT OF PIEZOELECTRIC MEMS
MICROSPEAKER BY MULTIPLE PISTON-MODES ANDNOVEL CROSSOVER DRIVING METHOD
Ting-Chou Wei1, Hsu-Hsiang Cheng1, Sung-Cheng Lo2,
Yu-Chen Chen1, Shu-Wei Chang1, Zih-Song Hu1,
Jerwei Hsieh3, Ruey-Shing Huang3,4, and Weileun Fang1
1
National Tsing Hua University, TAIWAN, 2Upbeat Technology
Co., Ltd., TAIWAN, 3Asia Pacific Microsystem Inc., TAIWAN,
and 4National Sun Yat-sen University, TAIWAN
12:15 – 12:30
A MECHANICALLY-OPEN AND ACOUSTICALLY-CLOSEDPIEZO-MEMS SPEAKER FOR IN-EAR APPLICATIONS
Chiara Gazzola1, Valentina Zega1, Fabrizio Cerini2,
Silvia Adorno2, and Alberto Corigliano1
1
Politecnico di Milano, ITALY and 2STMicroelectronics, ITALY
12:30 – 12:45
WIRELESS ACOUSTIC AIRBORNE JET PROPELLER
Akash Roy, Matin Barekatain, Jaehoon Lee,
Baptiste Neff, and Eun Sok Kim
University of Southern California, USA

Session Th3E – Chemical Sensors III
Session Chair:
Luis Velasquez-Garcia, Massachusetts Institute of Technology, USA
Pengcheng Xu, Chinese Academy of Sciences (CAS), CHINA
Room ETh3E.01

Th3E.02

11:15 – 11:30
MICROFLUIDIC-BASED DIFFRACTED X-RAY TRACKING METHODFOR REAL-TIME OBSERVATION OF ION CHANNEL TWIST MOTIONUNDER SEQUENTIAL CHEMICAL STIMULI
Kentaro Kotoya1, Ikkei Yamauchi1, Hirofumi Shimizu2,
and Yoshikazu Hirai1
1
Kyoto University, JAPAN and 2University of Fukui, JAPAN
11:30 – 11:45
A METAL ORGANIC FRAMEWORK DERIVED NANO POROUS
CARBON (NPC)-MWCNT HETEROSTRUCTUREDNANOCOMPOSITE-BASED ELECTROCHEMICALSENSING PATCH FOR SWEAT Ca ION AND
pH MONITORING
Md Asaduzzaman, Md Abu Zahed, Md Selim Reza,
Seong Hoon Jeong, Hyesu Song, and Jae Yeong Park
Kwangwoon University, KOREA

48

TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:52 AM Page 49

Session Th3E – Chemical Sensors III
Continued
Room ETh3E.03

Th3E.04

Th3E.05

Th3E.06

11:45 – 12:00
HIGHLY CONDUCTIVE AND ENVIROMENTALLY STABLE
MXENE-TI3C2TX NANOSHEETS FOR MULTIPLEXEDDISEASE INFLAMMATORY BIOMARKER DETECTION
Md Selim Reza, Md Sharifuzzaman, Md Asaduzzaman,
Seong Hoon Jeong, Hye Su Song, and Jae Yeong Park
Kwangwoon University, KOREA
12:00 – 12:15
ELECTRICAL DETECTION OF DNA NANOBALLS USING
IMPEDANCE SPECTROSCOPY IN A MICROFLUIDIC CHIP
Muhammad Tayyab1, Donal Barrett2, Gijs van Riel2,
Shujing Liu2, Björn Reinius2, Curt Scharfe3, Peter Grifﬁn4,
Lars Steinmetz4, Vicent Pelechano2, and Mehdi Javanmard1
1
Rutgers, State University of New Jersey, USA,
2
Karolinska Institute, SWEDEN, 3Yale University, USA, and4
Stanford University, USA
12:15 – 12:30
MONOLITHIC FABRICATION OF NANO GAP ELECTRODESFOR SINGLE-MOLECULE BIOSENSING
Ashesh Ray Chaudhuri1, Chulmin Choi2, Raymond Lobaton2,
Drew A. Hall3, Prem Sinha2, Manoj Jaysankar1, Philippe Helin1,
Carl W. Fuller2, Paul W. Mola2, Barry Merriman2, and Simone Severi1
1
IMEC, BELGIUM, 2Roswell ME, USA, and 3University of California,
San Diego, USA
12:30 – 12:45
DEVELOPMENT OF AC NANOPORE MESUREMENT METHOD
AND MICROBIAL IDENTIFICATION CONBINATED WITH
MACHINE LEARNING
Maami Sakamoto, Kosuke Hori, Ayaka Nakama,
and Takatoki Yamamoto
Tokyo Institute of Technology, JAPANSession Th3F – Flexible Devices & Fabrication
Session Chair:
Xiaomei Yu, Peking University, CHINA
Erdinç Tatar, Bilkent University, TURKEY
Room B-1
Th3F.01

11:15 – 11:30
HIGHLY SENSITIVE AND STRETCHABLE STRAIN SENSORBASED ON SILVER NANOWIRE/GRAPHENE HYBRID WITH
A NEAR-ZERO THERMAL CROSSTALK
Leilei Wang and Jungwook Choi
Chung-Ang University, KOREA

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Session Th3F – Flexible Devices & Fabrication
Continued
Room B-1
Th3F.02

Th3F.03

Th3F.04

Th3F.05

Th3F.06

11:30 – 11:45
LOCALIZED BIOMECHANICAL STRAIN SENSING WITH HIGHLYFLEXIBLE PIEZORESISTIVE GRAPHENE/SU-8 NANOCOMPOSITE
ACTIVE LAYER
Faizan Tariq Beigh1, Shivam Jaisawal2, Mujeeb Yousuf3,
Nadeem Tariq Beigh1, Pushpapraj Singh3, and Dhiman Mallick1
1
Indian Institute of Technology Delhi, INDIA, 2Defense Instituteof Advanced Technology (DIAT), INDIA, and 3Centre for Applied
Research in Electronics (CARE), INDIA
11:45 – 12:00
STRETCHABLE PEDOT: PSS-PRINTED FABRIC STRAIN SENSOR
FOR HUMAN MOVEMENT MONITORING AND RECOGNITION
Caise Wei, Jinfeng Yuan, Yuzhong Zhang, and Rong Zhu
Tsinghua University, CHINA
12:00 – 12:15
PLANAR METASTRUCTURE-BASED GAS SENSORS FOR HIGH
STRETCHABILITY AND STABLE NO2 SENSING
Jeonheyong Park, Hyeoncheol Lim, Chaehyun Ryu,
Soon In Jung, Il Ryu Jang, and Hoe Joon Kim
Daegu Gyeongbuk Institute of Science and Technology (DGIST), KOREA
12:15 – 12:30
MULTIFUNCTIONAL STRETCHABLE SENSOR FOR MONITORINGHUMAN MOTION
Yuzhong Zhang, Jinfeng Yuan, Caise Wei, and Rong Zhu
Tsinghua University, CHINA
12:30 – 12:45
IN-TUBE-CENTER PACKAGING OF FLEXIBLEMEMS AIRFLOW-RATE SENSOR AND ITSSENSITIVITY ENHANCEMENT
Muhammad Salman Al Farisi1, Yang Wang1, Yoshihiro Hasegawa1,
Miyoko Matsushima2, Tsutomu Kawabe2, and Mitsuhiro Shikida1
1
Hiroshima City University, JAPAN and 2Nagoya University, JAPAN

12:45 – 13:00

Transition

Best Paper Award Ceremony and Closing Remarks
Room A
13:00 – 13:30
13:30

Conference Adjourns

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POSTER PRESENTATIONSEVENT HALLMONDAY
14:00 – 16:00

TUESDAY
14:15 – 16:15

WEDNESDAY
14:15 – 16:15

POSTER CATEGORIES
Actuators and Microsystems
Bio-Sensors and Microsystems Including In-Vitro Medical Applications
Chemical Sensors and Microsystems
Composite Materials, Polymers, and Fabrication Processes
Energy, Power and Thermal Management
Microfluidics Platform Technologies
Nanoscale Materials and Fabrication
Optical and Atomic Transducers
Packaging & Solid-State Materials and Fabrication Processes
Physical Sensors and Microsystems
RF MEMS, Resonators and Oscillators
Wearable and In-Vivo Medical Devices and Microsystems
Late News

MONDAY - Actuators and Microsystems
M4P.001

ALN-BASED PMUT ARRAYS FOR DEXTEROUS CELL HANDLING
Bart P. Weekers1,2, Liesbet Lagae1,2, Xavier Rottenberg2,
and Veronique Rochus2
1
KU Leuven, BELGIUM and 2imec, BELGIUM

M4P.002

ASYMMETRICAL PMUTS FOR FOCUSED ACOUSTIC PRESSURE
BY REINFORCEMENT LEARNING
Wei Yue1, Fanping Sui1, Yande Peng1, Fan Xia1, Peggy Tsao1,
Megan Teng1, Hanxiao Liu2, and Liwei Lin1
1
University of California, Berkeley, USA and2
Tsinghua University, CHINA

M4P.003

DEVELOPMENT, REALIZATION AND VALIDATION OF APIEZOELECTRIC FLEXIBLE HAPTIC INTERFACE
Romain Le Magueresse1,2, Fabrice Casset1,
Frédéric Giraud2, Munique Kazar Mendes1,
Sébastien Brulais1, Laure Peris Y Saborit1,
Anis Kaci2, and Mikael Colin1
1
Université Grenoble Alpes, FRANCE and2
Université de Lille, FRANCE

M4P.004

FABRICATION AND PERFORMANCE EVALUATION OF
61-ELECTRODE PIEZOELECTRIC MEMS DEFORMABLE
MIRROR BASED ON PZT FILM
Junhua Wang, Cao Xia, Yuanlin Xia, Liang He, and Zhuqing Wang
Sichuan University, CHINA

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M4P.005

HIGH OUTPUT TACTILE DISPLAY USING SMA THICK FILMACTUATOR ARRAY WITH IMPROVED THERMAL AND
FREQUENCY RESPONSE
Ryo Saito, Haruto Amano, and Takashi Mineta
Yamagata University, JAPAN

M4P.006

DESIGN AND FABRICATION OF A 4-TERMINAL IN-PLANE
NANOELECTROMECHANICAL RELAY
Yingying Li1, Simon J. Bleiker1, Pierre Edinger1,
Elliott Worsey2, Mukesh Kumar Kulsreshath2,
Qi Tang2, Alain Yuji Takabayashi3, Niels Quack3,
Peter Verheyen4, Wim Bogaerts4,5, Kristinn B. Gylfason1,
Dinesh Pamunuwa2, and Frank Niklaus1
1
KTH Royal Institute of Technology, SWEDEN,
2
University of Bristol, UK, 3École Polytechnique Fédérale
de Lausanne (EPFL), SWITZERLAND, 4IMEC, BELGIUM,
and 5University of Ghent, BELGIUM

M4P.007

LESS RESONANT FREQUENCY SHIFT AND MINOR SPL
ATTENUATION OF PZT MEMS SPEAKER ACHIEVED BY
RIB-REINFORCED DIAPHRAGM
Hsu-Hsiang Cheng1, Sung-Cheng Lo1, Ting-Chou Wei1,
Mingching Wu2, and Weileun Fang1
1
National Tsing Hua University, TAIWAN and
2
CoretronicMEMS Co., Ltd., TAIWAN

M4P.008

ORIGAMI-INSPIRED FLEXURE-BASED ROBOT FOR
ENDOMICROSCOPY PROBE MANIPULATION
Xu Chen, Jinshi Zhao, Khushi Vyas,
Michail E. Kiziroglou, and Eric M. Yeatman
Imperial College London, UK

M4P.009

PZT MEMS TUNABLE LIQUID LENS WITH INTEGRATEDPIEZORESISTIVE POSITION SENSORS
Zhengnan Tang1, Leo Soda1,2, Taiyu Okatani1,
Andrea Vergara1, Yukio Suzuki1, and Shuji Tanaka1
1
Tohoku University, JAPAN and2
École des Mines de Saint-Étienne, FRANCETUESDAY - Actuators and Microsystems

T4P.001

2-DOF MEMS MIRROR WITH LARGE MECHANICAL ANGLESUSING ONE MAGNETIC FIELD FOR CLOSE RANGESCANNING APPLICATIONSDang D.H. Tran1, Ludovic Rapp2, Steve Madden2,
Laurence J. Walsh3,5, Heiko Spallek4, Lee Walsh6,
Andrew Sutton2, Omar Zuaiter5, Alaa Habeb5,
and Timothy R. Hirst5
1
Griffith University, AUSTRALIA, 2Australian National University,
AUSTRALIA, 3University of Queensland School of Dentistry,
AUSTRALIA, 4University of Sydney School of Dentistry, AUSTRALIA,
5
Dentroid (Emudent Technologies Pty Ltd), AUSTRALIA, and6
Platypus Technical Consultants Pty Ltd, AUSTRALIA

52

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T4P.002

3D-PRINTED MICRO-MANIPULATOR WITH COMPLIANTMECHANISM FOR BIOLOGICAL APPLICATION
Masaru Mukai1, Yukihito Moritoki1, Takayuki Yamada2,
Shinji Nishiwaki3, Tomoyuki Shimono1, Tatsuto Kageyama1,4,
Junji Fukuda1,4, and Shoji Maruo1
1
Yokohama National University, JAPAN, 2University of Tokyo, JAPAN,
3
Kyoto University, JAPAN, and 4Kanagawa Institute of Industrial
Science and Technology (KISTEC), JAPANT4P.003

A 3D SELF-ROLL INDUCTOR BASED ON AL-SIO2 BIMORPHS
Hengzhang Yang1, Jian Gao1, Yingtao Ding1, Yuwen Su1,YangYang Yan2, and Huikai Xie1,2
1
Beijing Institute of Technology, CHINA and 2BIT Chongqing
Institute of Microelectronics and Microsystems, CHINA

T4P.004

BENDABLE POLYMER-BASED HIGH-FREQUENCY PMUTSON TRANSPARENT SU8 AND POLYIMIDE SUBSTRATES
Sanjog V. Joshi, Sina Sadeghpour, and Michael Kraft
KU Leuven, BELGIUM

T4P.005

CROSSTALK EFFECTS IN PMUT ARRAYS
Omer M. O. Abdalla1, Gianluca Massimino1,
Cristina D'Argenzio1, Matteo Colosio1,
Marco Soldo2, Fabio Quaglia2,
and Alberto Corigliano1
1
Politecnico di Milano, ITALY and 2STMicroelectronics, ITALY

T4P.006

DEVELOPMENT OF PIEZOELECTRIC MICROMACHINEDULTRASONIC TRANSDUCER WITH DUAL HETEROGENEOUSPIEZOELECTRIC THIN FILM STACKING
Xuanmeng Qi1, Shinya Yoshida2, Mohssen Moridi3,
Sarah Risquez3, Anirban Ghosh3, and Shuji Tanaka1
1
Tohoku University, JAPAN, 2Shibaura Institute of Technology,
JAPAN, and 3Silicon Austria Labs, AUSTRIA

T4P.007

ELECTRO-FORCE DISPLAY FOR NANO ROBOTICS
Kain Ichinohe, Ken Sasaki, and Takayuki Hoshino
Hirosaki University, JAPANT4P.008

HIGHLY MINIATURIZED IN-EAR MEMS LOUDSPEAKERFEATURING HIGH SPL
Fabian Stoppel, Johannes Fankhänel, Thorsten Giese,
Christian Eisermann, Isa Pieper, Dirk Kaden,
Lenny Castellanos, and Sven Gruenzig
Fraunhofer Institute for Silicon Technology, GERMANY

T4P.009

MICRO-FABRICATED BI-STABLE MECHANICAL SWITCHACTUATED BY SINGLE THERMAL ACTUATOR
Jiacheng Liu1, Yuma Ohara2, Zerui Xu2, Ruizi Liu1,
Zhangshanhao Li2, Xiaohong Wang3, Toshiyuki Tsuchiya2,and Man Wong1
1
Hong Kong University of Science and Technology, Hong Kong, CHINA,
2
Kyoto University, JAPAN, and 3Tsinghua University, CHINA

T4P.010

ON THE USE OF 3D-PRINTED ULTRASONIC HORNS TO TUNE THE
FREQUENCY RESPONSE OF AIRBORNE MEMS TRANSDUCERS
Gabriele Bosetti, Stefan Hofstetter-Spona, and Gabriele SchragTechnical University of Munich, GERMANY

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WEDNESDAY - Actuators and Microsystems
W4P.002

CENTIMETER-SCALE CULTURED WHOLE-CUT CHICKEN MEATFABRICATED USING A MICROFABRICATED HOLLOWFIBER BIOREACTOR
Minghao Nie, Ai Shima, and Shoji Takeuchi
University of Tokyo, JAPANW4P.003

DEVELOPMENT OF HAPTIC BIO-FEEDBACK RING USINGULTRA-THIN HAPTIC MEMS FILM
Toshihiro Takeshita, Zymelka Daniel,
Yusuke Takei, and Takeshi Kobayashi
National Institute of Advanced Industrial Science andTechnology (AIST), JAPANW4P.004

FABRICATION PROCESS OF CONVENTIONAL AND
UNCONVENTIONAL 3D MICROCOILS BASED ON
2D ARRAY OF SU-8 MICROPOSTS STRUCTURE
Emil R. Mamleyev1, Manfred Kohl1,
Jan G. Korvink1, and Kirill V. Poletkin2
1
Karlsruhe Institute of Technology (KIT), GERMANY and2
Hefei University of Technology, CHINA

W4P.005

HAPTIC INTERFACE BASED ON AN INNOVATIVE “PIEZO-IN-FLEX”
PIEZOELECTRIC PATCH TECHNOLOGY
Fabrice Casset, Munique Kazar Mendes, Nadine David,
Rémi Franiatte, Daniel Mermin, Marc Zussy,
Jérôme Dechamp, Laetitia Castagné,
Jean-Charles Souriau, Kevin Benedetto,and Mikael Colin
University Grenoble Alpes, FRANCE

W4P.006

LEAD FREE KNN THIN FILMS BASED ACTUATOR DEVICESREALIZED IN A 200 MM SILICON TECHNOLOGY FORPIEZOELECTRIC TRANSDUCER APPLICATIONS
Hugo Kuentz1,2, Alain Campo1, Christel Dieppedale1,
Christophe Poulain1, Maryline Guilloux-Viry2,
and Gwenael Le Rhun1
1
Université Grenoble Alpes, FRANCE and2
Université de Rennes, FRANCE

W4P.007

MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATIONIN RESONANT SCANNING OPERATION
Markus Bainschab, Rodrigo T. Rocha, Clément Fleury,
Takashi Sasaki, Sara Guerreiro, Anton Lagosh,
and Adrien Piot
Silicon Austria Labs GmbH (SAL), AUSTRIA

W4P.008

ON MEMS WAFER ASSESSMENT FOR SWITCHING DEVICESEXPOSED TO DIRECT METAL-CONTACTS AND
THERMAL HISTORIES
Sushil Kumar1, Dhairya Singh Arya2, Manu Garg1,
and Pushpapraj Singh1
1
Indian Institute of Technology Delhi, INDIA and2
CSIR – Central Scientific Instruments Organisation (CSIO), INDIA

54

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W4P.009

PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERENABLES BUBBLE-BASED STIRRING AND RECONFIGURABLE
PARTICLE PATTERNING
Xianbin Li1, Jingui Qian1,2, Junjie Zhang1, Bowei Zhang1,
Joshua E.-Y. Lee2, and Wei Zhang1
1
Hefei University of Technology, CHINA and
2
City University of Hong Kong, HONG KONG

W4P.010WIRELESS CRAWLING OF INCHWORM-LIKE ROBOTBY INDUCTION HEATING
Woojun Jung, Seonghyeon Lee, and Yongha Hwang
Korea University, KOREAMONDAY
Bio-Sensors and Microsystems Including In-Vitro Medical Applications
M4P.010A MICROFLUIDIC FLOW CYTOMETRY WITH A UNIFORM OPTICALFIELD ENABLING QUANTITATIVE ANALYSIS OF SINGLE-CELL
PROTEINS WITH ARBITRARY DISTRIBUTIONS
Ting Zhang1,2, Lixing Liu1,2, Yuanchen Wei1, Chiyuan Gao1,2,
Liangliang Ma3, Mengge Gao4, Xiaosu Zhao4, Yixiang Wang5,
Deyong Chen1,2, Lichao Sun3, Junbo Wang1,2, and Jian Chen1,2
1
Chinese Academy of Sciences (CAS), CHINA, 2University of Chinese
Academy of Sciences, CHINA, 3Cancer Hospital Chinese Academy ofMedical Sciences, CHINA, 4National Clinical Research Center for
Hematologic Disease, CHINA, and 5Peking University Hospital of
Stomatology, CHINA

M4P.011A ZnO-BASED AUTOMATED ELECTRONIC NOSE FOR VOCs
DETECTION WITH HIGH-SENSITIVITY MODULATEDFRONT-END ELECTRONICS
Bianca Di Diodoro1, Carmen Bax1, Roberto Bernasconi1,
Alessandro Ticozzi1, Luca Magagnin1, Gianluigi Taverna2,
Fabio Grizzi3, Giacomo Langfelder1, and Laura Capelli11Politecnico di Milano, ITALY, 2Humanitas Mater Domini Hospital, ITALY,
and 3IRCCS Humanitas Research Hospital, ITALY

M4P.012ASYMMETRICAL TITANIUM OXIDE PATTERNS FORUNIDIRECTIONAL CELL GUIDANCE
Yijun Cheng and Stella W. Pang
City University of Hong Kong, CHINA

M4P.013

AUTOMATIC VASCULAR LOCALIZATION WITH A FLEXIBLE TACTILESENSING DENSE-ARRAYYi Sun1, Fang Wang1,2, Ke Sun1, Heng Yang1,2, and Xinxin Li1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

M4P.014

COMPACT LSPR BIOSENSOR SYSTEM FOR EARLY VIRUS
DETECTION INTEGRATED WITH A FILTER-FREE
WAVELENGTH SENSOR AND LED
Tsugumi Sakae, Yong-Joon Choi, Tomoya Ide, Kazuhiro Takahashi,
Toshihiko Noda, and Kazuaki Sawada
Toyohashi University of Technology, JAPAN

M4P.015

DEVELOPMENT OF A HIGH SENSITIVITY, WIDE RANGE CMOSCAPACITIVE DNA SENSOR ARRAY
Po-Hsuan Lai, Lien-Sing Tseng, Chia-Min Yang, and Michael S.-C. Lu
National Tsing Hua University, TAIWAN

55

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M4P.016

ELECTROCHEMICAL BIOSENSOR BASED ON DISPOSABLE
PAPER-BASED LASER-INDUCED GRAPHENE
Panpan Gao, Toshihiro Kasama, Jungchan Shin, Yixuan Huang,
Madoka Takai, and Ryo Miyake
University of Tokyo, JAPAN

M4P.017

IN-VITRO TUMOR AND MICROENVIRONMENT RECONSTRUCTIONLABCHIP APPLIED TO HIPEC DRUG SCREENING
Jing-Wen Guo1, Chin-Yung Hsu1, Zhi-Yin Chao1, Mao-Chih Hsieh2,
Yu-ting Tai2, Hwan-You Chang1, Si-Jin Dong1, and Cheng-Hsien Liu1
1
National Tsing Hua University, TAIWAN and2
Taipei Medical University, TAIWAN

M4P.018

LUNG ON CHIP WITH AIR-LIQUID INTERFACE FOR STUDYING
AIR POLLUTION AND IDIOPATHIC PULMONARY FIBROSIS
Tsan-Yang Tsai1, Yi-Ting Ke1, Yu-Che Chueh1, Kang-Yun Lee2,
Hsiao-Chi Chuang2, Wei-Lun Sun1, and Cheng-Hsien Liu1
1
National Tsing Hua University, TAIWAN and2
Taipei Medical University, TAIWAN

M4P.019

MACHINE LEARNING ASSISTED LARGE AREA CELL TRACTIONSTRESS MEASUREMENTS OF CONTINUOUS CELL SHEETS
Xing Haw Marvin Tan1,2, Tomohiro Yokota1,
Arjun Deb1, and Pei-Yu Chiou1
1
University of California, Los Angeles, USA and 2Agency for Science,
Technology and Research (A*STAR), SINGAPORE

M4P.020

MICROFLUIDIC THERMAL MODEL FOR EARLY DETECTION OF
INFECTION IN AORTIC GRAFTS
Signe L.K. Vehusheia1, Cosmin I. Roman1,
Nikola Cesarovic1,2, and Christofer Hierold1
1
ETH Zürich, SWITZERLAND and2
German Heart Center Berlin, GERMANY

M4P.021

MULTI-WAVELENGTH OPTOELECTRONIC SYSTEM WITH MACHINELEARNING FOR ONLINE HEMODIALYSIS MONITORING
Yao-Te Wang1, Yi-Ting Chen2, Fong-Shung Huang2, Shuei-Liong Lin2,
Yu-Hsiang Chou2, Cheng-Che Hsu1, and Yen-Wen Lu1
1
National Taiwan University, TAIWAN and
2
National Taiwan University Hospital, TAIWAN

M4P.022

MULTIFUNCTIONAL WOUND DRESSING PATCH FOR ADVANCEDWOUND CARE
Ji-Hwan Ha1,2, Junseong Ahn1,2, Yongrok Jeong1, Byeongmin Kang1,
Jun-Ho Jeong2, and Inkyu Park1
1
Korea Advanced Institute of Science and Technology (KAIST), KOREA
and 2Korea Institute of Machinery and Materials, KOREA

M4P.023OXYGEN DETECTION OF SINGLE CELLS WITH GUIDED MOVEMENTS
Muting Wang and Stella W. Pang
City University of Hong Kong, CHINA

M4P.024NOVEL MICROFLUDIC DEVICE FOR EFFECTIVE ISOLATIONOF CIRCULATING TUMOR CELLS BY USING MAGNETICPEARL-LIKE BEAD-CHAIN STRUCTURES
Sasi Kiran Boilla, Yi-Cheng Tsai, and Gwo-Bin Lee
National Tsing Hua University, TAIWAN56

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TUESDAY
Bio-Sensors and Microsystems Including In-Vitro Medical Applications
T4P.011

A 3D ENGINEERED PLATFORM FOR FUNCTIONAL MONITORINGOF IN VITRO BRAIN MODELSAli Maziz1, Eduardo Martinez Marin1, Venkata Suresh Vajrala1,
Asma Eddarir1, Sophie Pautot2, and Christian Bergaud1
1
CNRS, FRANCE and 2SYNAXYS Neuro Engineering Systems, FRANCE

T4P.012A NOVEL SPECTRAL PLATFORM FOR QUANTIFYING UROBILINOGEN
USING A URINE DIPSTICK
Ciao-Ming Tsai1, Jyun-Wei Wen1, Wei-Yi Kong2, Wei-Huai Chiu2,
Weileun Fang1, and Cheng-Hao Ko2
1
National Tsing Hua University, TAIWAN and 2National Taiwan
University of Science and Technology, TAIWAN

T4P.013QUANTITATIVE CELL MIGRATION MONITORING METHOD USINGRETROREFLECTIVE JANUS PARTICLES
Eun Kyeong Yang, Kyung Won Lee, and Hyun Chul Yoon
Ajou University, KOREA

T4P.014ACTIVE STROBE IMAGER THAT CAN MEASURE MECHANICALIMPEDANCE BY USING INPHASE OPERATIONAL MODE
Taiki Yamaguchi1, Osamu Fukuda1, Hideaki Ito1, Kensuke Harada2,
Koji Mizoue4, and Makoto Kaneko3
1
Saga University, JAPAN, 2Osaka University, JAPAN, 3Meijo University,
JAPAN, and 4Mizoue Project Japan Corp., JAPANT4P.015AN SPR MICROFLUIDIC DEVICES FOR IDENTIFICATION OF HUMANHERPESVIRUS 4 AND SARS-COV-2
Han-Yun Hsieh1, Ray Chang1, Er-Yuan Chuang2, Yu-Jui Fan2,
Pei-Kuen Wei3, and Horn-Jiunn Sheen1
1
National Taiwan University, TAIWAN, 2Taipei Medical University,
TAIWAN, and 3Academia Sinica, TAIWAN

T4P.016FILLING SYSTEM OF CELL-LADEN HYDROGELS IN A PDMSMICROARRAY FOR ANALYZING MULTIPLE WELLS IN
ONE-SHOT OF A MICROSCOPE
Kazuki Nishimoto, Haruka Oda, and Shoji Takeuchi
University of Tokyo, JAPANT4P.017ULTRASOUND TRIGGERED BUBBLE-INDUCED BLOOD-BRAINBARRIER OPENING: A MONODISPERSE MICROBUBBLE AND
ORGAN ON-CHIP STUDYMariia Zakharova, Martin R.P. van den Broek,
Loes I. Segerink, and Tim Segers
University of Twente, NETHERLANDS

T4P.018

INVESTIGATION OF FLOW-INDUCED INTRACELLULAR
Ca2+ INCREASE IN PROXIMAL TUBULE CELLS ON A
MICROPHYSIOLOGICAL SYSTEM FOR ADPKD MODELING
Cheng Ma, Ramin Banan Sadeghian, Kazuya Fujimoto,
Akihiko Kawakami, Toshikazu Araoka, and Ryuji Yokokawa
Kyoto University, JAPAN57

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T4P.019

LOCAL REMOVAL TECHNIQUE OF MICROBUBBLES IN
MICROFLUIDIC DEVICE THROUGH PDMS THIN WALL
FOR TISSUE CULTURE
Yasunori Tokuoka1, Noboru Nakaigawa2, Keiichi Kondo2,
and Tadashi Ishida1
1Tokyo Institute of Technology, JAPAN and 2Yokohama City
University, JAPANT4P.020

MEMS-BASED ULTRA-HIGH FREQUENCY WIRELESS 10X10 QCM
BIOSENSOR ARRAY CHIP
Fumihito Kato1, Junki Shinohara1, Manabu Yoshino1,
Manabu Suzuki1, and Hirotsugu Ogi2
1
Nippon Institute of Technology, JAPAN and 2Osaka University, JAPANT4P.021

MICROFLUIDIC DETECTION OF < 400 CFU/ML E. COLI IN WHOLE
BLOOD WITHIN ONE HOUR
Henar Marino Miguélez1, Sara Cabanas Altarriba1, Jimmy Larsson2,
Johan Elf2, and Wouter M. van der Wijngaart1
1
KTH Royal Institute of Technology, SWEDEN and2
Uppsala University, SWEDEN

T4P.022

MICROWELLS WITH CONNECTING CHANNEL TO MODELMETASTATIC BEHAVIOR OF NASOPHARYNGEALCARCINOMA CELLS
Xiao Hong, Yuanhao Xu, and Stella W. Pang
City University of Hong Kong, CHINA

T4P.023SERS DETECTION OF SINGLE METHYLATED ANDENINE IN
A DNA OLIGOMER
Hiroki Ito, Tomoya Shinabe, Akio Uesugi, Koji Sugano,
and Yoshitada Isono
Kobe University, JAPANT4P.024SENSING BEYOND THE DEBYE LENGTH: DEVELOPMENT OF AHIGHLY SENSITIVE, WIDE-RANGE CMOS DNA SENSOR ARRAY
Lien-Sing Tseng, Po-Hsuan Lai, Chia-Min Yang, and Michael S.-C. Lu
National Tsing Hua University, TAIWAN

T4P.025

PERITONEAL TUMOR MICROENVIRONMENT LABCHIP FOR
THE SELECTION OF HIPEC DRUGS
Yin-Shan Chien1, Chia-Peng Wang1, Mao-Chih Hsieh2, Yu-Ting Tai2,
Jen-Tsan Ashley Chi3, Si-Jin Don1, and Cheng-Hsien Liu1
1
National Tsing Hua University, TAIWAN, 2Taipei Medical University,
TAIWAN, and 3Duke University, USA

WEDNESDAY
Bio-Sensors and Microsystems Including In-Vitro Medical Applications
W4P.011A CORAL-ON-A-CHIP MICROFLUIDIC PLATFORM ENABLINGMETABOLIC ANALYSIS OF A SINGLE CORAL POLYPSChien-Ting Kuo, Pei-Heng Tai, and Shih-hao Huang
National Taiwan Ocean University, TAIWAN

W4P.012A FULLY PACKAGED MICROFLUIDIC THERMAL BIOSENSOR
DESIGNED BASED ON MEMS TECHNOLOGY AND ITSENZYME IMMOBILIZATION
Zhen Peng, Cao Xia, Yuanlin Xia, Liang He, and Zhuqing Wang
Sichuan University, CHINA

58

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W4P.013

A HIGHLY EFFICIENT MICROFLUIDIC U–WELL ARRAY DEVICEFACILITATING HIGH-THROUGHPUT METASTATIC TUMORSPHEROID CULTURE AND DRUG EVALUATION
Yu-Hsuan Cheng, Yi-Shan Huang, Meng-Hsun Wu,
Ming-Hong Tai, and Ching-Te Kuo
National Sun Yat-sen University, TAIWAN

W4P.014A NOVELTY ULTRA-MICRO SPECTRUM MEASUREMENT PLATFORM
FOR MELAMINE DETECTION IN BIO-CHEMICAL APPLICATION
Wei-Yi Kong1, Wei-Huai Chiu1, Ciao-Ming Tsai2, Guan-Yi Lin3,
Weileun Fang2, Chitsung Hong3, and Cheng-Hao Ko1
1
National Taiwan University of Science and Technology, TAIWAN,
2
National Tsing Hua University, TAIWAN, and 3SpectroChip Inc., TAIWAN

W4P.015CYLINDRICAL NEURAL ELECTRODES USING PRE-SHAPEDFLEXIBLE PRINTED CIRCUIT MADE OF LIQUID
CRYSTAL POLYMERTaichi Ishikawa1, Yoshiaki Sakai1, Noriko Tsuruoka1,
Hajime Mushiake1, Tomokazu Ohshiro1,
Makoto Osanai2, and Yoichi Haga1
1
University of Tohoku, JAPAN and 2Osaka University, JAPANW4P.016

ELECTROPHYSIOLOGICAL CHARACTERIZATON OF A NOVEL,
TRANSWELL-TRANSFERRED, HUMAN NEURAL NOCICEPTIVEMICROPHYSIOLOGICAL CIRCUIT ATOP POLYMER/STEEL
3D MICROELECTRODE ARRAYSCharles M. Didier1, Kevin J. Pollard2, Alexander Bosak2,
Nisha Iyer3, Randolph S. Ashton3, Michael J. Moore2,
and Swaminathan Rajaraman1
1
University of Central Florida, USA, 2Tulane University, USA, and3
University of Wisconsin-Madison, USA

W4P.017

HIGH-DENSITY NEURAL MICROELECTRODE ARRAYS WITHCOMPLEMENTARY WEDGE-SHAPED 3D ASSEMBLY
INTERFACES FOR BRAIN ACTIVITY RECORDING
Liang Geng, Yujie Yang, Dongcheng Xie, Dongliang Chen,
Lei Xu, and Feng Wu
University of Science and Technology of China, CHINA

W4P.018

HIGHLY STABLE PIEZOELECTRIC RESONATOR BASED AIRFLOWSENSOR USING TIME OF FLIGHT TECHNIQUE
Parvin Akhkandi, Kevin Chan, Yasaman Majd,
Hakhamanesh Mansoorzare, and Reza Abdolvand
University of Central Florida, USA

W4P.019

IN-VITRO MICROFLUIDIC MODEL OF SEPSIS-ASSOCIATED ACUTEKIDNEY INJURY WITH SINGLE CELL IMAGING
Yuya Araki, Tetsuya Koyama, Hidekuni Takao, Fusao Shimokawa,
Daisuke Nakano, and Kyohei Terao
Kagawa University, JAPANW4P.020

MICROFLUIDIC BLOOD PLASMA EXTRACTOR FROMWHOLE BLOOD SAMPLE
Hogi Hartanto and Ting-Hsuan Chen
City University of Hong Kong, HONG KONG

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W4P.021MINIATURE TRANSPARENT DOPAMINE SENSOR BASED ON
NANOSPHERE LITHOGRAPHY
Yoojeong Kim, Eunyoung Jang, and Hyunjoo J. Lee
Korea Advanced Institute of Science and Technology (KAIST), KOREA

W4P.022

SARS-COV-2 INFECTION CAUSED A DAMAGE ON VASCULARBED CO-CULTURED WITH BRONCHIAL ORGANOIDS IN
MICROFLUIDIC DEVICE
Kazuya Fujimoto, Yuta Nagano, Yoshikazu Kameda, Sayaka Deguchi,
Kazuo Takayama, and Ryuji Yokokawa
Kyoto University, JAPANW4P.023

DEVELOPMENT OF NON-CONTACT ELECTRICALLY INDUCUEDMICROBUBBLE MICRON DISTANCE SENSOR
Yibo Ma, Wenjing Huang, Keita Ichikawa, and Yoko Yamanishi
Kyushu University, JAPANW4P.024

SUB-SKIN TEMPERATURE PREDICTION FROM SKIN TEMPERATURE
DISTRIBUTION FOR FROSTBITE-FREE CRYO-ANESTHESIA
Juhee Ko1, Hyunjoon Son2, Seongjin Lee2, Gun-Ho Kim2,
and Jungchul Lee1
1
Korea Advanced Institute of Science and Technology (KAIST),KOREA and 2Ulsan National Institute of Science and Technology(UNIST), KOREA

W4P.025WIRELESS POWER-UP AND READOUT FROM A LABEL-FREE
SENSOR RFID
Hassan Raji, Pengfei Xie, Seyed Reza Mahmoodi,
and Mehdi Javanmard
Rutgers University, USA
MONDAY - Chemical Sensors and Microsystems

M4P.025

A BREATHEABLE CAPACITIVE HUMIDITY SENSOR BASED ON
ELECTROSPUN PVDF/GO COMPOSITES
Yize Liu, Long Chen, Qian Zhang, and Jianqiu Huang
Southeast University, CHINA

M4P.026DISPOSABLE IMPEDANCE SENSOR USING LASER-INDUCEDGRAPHENE FOR HYDRAULIC OIL CONTAMINATION MONITORING
Yuki Okamoto1, Tomoya Muaramoto1, Yasuyuki Yamamoto1,
Ryo Matsuura2, Nobuki Sasaki2, Yusuke Takei1,
Toshihiro Takeshita1, Masaaki Ichiki1,
and Takeshi Kobayashi11National Institute of Advanced Industrial Science and Technology(AIST), JAPAN and 2Yamashin-Filter Corp., JAPAN

M4P.027

FLEXIBLE NH3 SENSOR BASED ON POLYANILINE/CARBON
NANOTUBES WITH DETECTION LIMIT DOWN TO PPB-LEVEL
Xue Wang1, Changhui Zhao2, Gaoqiang Niu1, and Fei Wang1
1
Southern University of Science and Technology, CHINA and2
Anhui University, CHINA

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M4P.27b

LOCALIZATION OF CROP DAMAGES UTILIZING A WAKE-UP
GAS SENSOR NETWORK
Seungbeom Noh1, Sayali Tope1, Farhan Sadik Sium1,
Shakir-ul Haque Khan1, Mohit Karkhanis1, Leo Wang1,
Adwait Deshpande1, Rana Dalapati1, Ravi V. Mural2,
Carlos H. Mastrangelo1, Mingyu Ji1, Ling Zang1,
James C. Schnable2, and Hanseup Kim1
1
University of Utah, USA and 2University of Nebraska, Lincoln, USA

M4P.029NOVEL 3D PRINTING PAPER-BASED MICROFLUIDIC DEVICES FOR
PAPER SPRAY IONIZATIONS (μPAD-MS) AND CHROMATOGRAPHY
ANALYSIS OF ILLICIT DRUGS
Muhammad Faizul Zaki1, Yi-Xin Wu2, Pin-Chuan Chen1,
Pai-Shan Chen2, and Yi-Hsin Liu3
1
National Taiwan University of Science and Technology, TAIWAN,
2
National Taiwan University, TAIWAN, and 3National Taiwan
Normal University, TAIWAN

M4P.030SIMPLE AND SMART FLOW INJECTION TYPE WATER QUALITY
METER DRIVEN BY BRILLIANT COLORED REAGENT
Masayuki Kawakami1,2, Toshihiro Kasama1, Tomomi Sato1,
Madoka Takai1, Daisaku Yano2, Hidekatsu Tazawa3,
Kaito Maehara4, Hiroshi Murakami4, and Ryo Miyake1
1
University of Tokyo, JAPAN, 2Organo Corporation, JAPAN,
3
Institute of Microchemical Technology Co., Ltd., JAPAN, and4
Next Computer System Engineering Co., Ltd., JAPAN

M4P.031STATIC AND DYNAMIC MEMS INERTIAL GAS SENSORS
Matthew Ou1, Yasser S. Shama1,2, Bhoomi Mavani1,
Mohamed Arabi1, Resul Saritas1, Rana Abdelrahman1,
Sasan Rahmanian1, Alaaeldin Elhady1, Raafat Mansour1,
Alexander Penlidis1, and Eihab M. Abdel-Rahman1
1
University of Waterloo, CANADA and 2Benha University, EGYPT

M4P.032

VISUALIZATION OF FLUID MIXING USING GHZULTRASONIC IMAGING
Anuj Baskota, Justin Kuo, Serhan Ardanuç, and Amit Lal
Geegah Inc, USA
TUESDAY - Chemical Sensors and Microsystems

T4P.026

A PPT LEVEL PFOS (PERFLUOROOCTANESULFONIC ACID) SENSORBASED ON AN ECO-FRIENDLY CHITOSAN BIOPOLYMER
Pawan Pathak, Pouya Borjian, Mohammadreza Chimerad,and Hyoung J. Cho
University of Central Florida, USA

T4P.027

A SINGLE-CHIP 4-CHANNEL QUADRILATERAL MOX GASSENSOR WITH DIFFERENT SENSING MATERIALS FOR
FOOD DISCRIMINATION
Ruichen Liu, Ruoyu Zhang, Dongcheng Xie, Chong Xing,
Yujie Yang, Muhammad Mustafa, Lei Xu, and Feng Wu
University of Science and Technology of China, CHINA

T4P.028

COLORIMETRIC READOUT BASED PHOTOIONIZATION DETECTORFOR GAS CHROMATOGRAPHS
Jingqin Mao1, Longze Liu1, Yahya Atwa1,
Junming Hou2, and Hamza Shakeel1
1
Queen's University Belfast, UK and 2Southeast University, CHINA

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T4P.029

DEVELOPMENT OF A STRIPED GATE POTASSIUM IONSENSOR WITHOUT ANION EXCLUSION MATERIALFOR LONG-TERM MONITORING
Md Muztahidul Islam1, Satoshi Tsuruta1, Satoshi Ota1,
Satoshi Koike2, Madoka Takai3, and Masato Futagawa1
1
Shizuoka University, JAPAN, 2Vegetalia, Inc., JAPAN, and3
University of Tokyo, JAPANT4P.030FREQUENCY RESPONSE OF UNCOATED-MICROCANTILEVERSTO GAS FLOW AT DIFFERENT TEMPERATURES AND ITSAPPLICATION IN MOISTURE SENSING
Hemant K. Verma1, Faizan T. Beigh1, Darkasha Khan1,
Manoj Kandpal2, Satya N. Behra2, Jaspreet Singh2,
and Akshay Naik1
1
Indian Institute of Science, Bangalore, INDIA and2
Semi-Conductor Laboratory, INDIA

T4P.031PROPOSAL AND EVALUATION OF DISSOLVED OXYGEN IMAGESENSOR USING IRIDIUM OXIDE AS SENSING MEMBRANE
Rena Ueda, Ryosuke Iwatsuchi, Tomoko Horio, Yoshiko Noda,
Daisuke Akai, Takeshi Hizawa, Hideo Doi, Yong-Joon Choe,
Kazuhiro Takahashi, Toshihiko Noda, and Kazuaki Sawada
Toyohashi University of Technology, JAPANT4P.032

MULTIPLE GAS SPECTROSCOPY USING A GOLD GRATING
PLASMONIC PHOTODETECTOR
Utana Yamaoka1, Masaaki Oshita1, Yuuki Kaneda1,
Shiro Saito2, and Tetsuo Kan1
1
University of Electro-Communications, JAPAN and
2
IMRA JAPAN CO., LTD., JAPANWEDNESDAY - Chemical Sensors and Microsystems

W4P.026

A CMOS-MEMS BASED MUTIPIXEL GAS SENSOR DESIGN
Nishit Goel, Ilya Gurin, Stephen F. Bart, and Peter Hartwell
InvenSense Inc., USA

W4P.027

A STUDY OF GRAPHENE HYSTERESIS EFFECT IN DIFFERENTSOLVENT ENVIRONMENT WITH SUSPENDED/SUPPORTED
GRAPHENE DEVICE
Yu-Xuan Lu, Ming-Hsiu Tsai, and Chih-Ting Lin
National Taiwan University, TAIWAN

W4P.028

DEVELOPING OF PORTABLE UV-STIMULATED FLOURSECENCE
SPECTRUM MEASUREMENT SYSTEM USING SPECTRAL CHIP
Ciao-Ming Tsai1, Wei-Yi Kong2, Wei-Huai Chiu2, Chitsung Hong1,
Cheng-Hao Ko2, and Weileun Fang1
1
National Tsing Hua University, TAIWAN and
2
National Taiwan University of Science and Technology, TAIWAN

W4P.029

ELECTROCHEMICAL SENSOR WITH 4-MERCAPTOPYRIDINE
MODIFICATION FOR TRACE MERCURY DETECTION
Mingjie Han1,2, Yong Xie1,2, Ri Wang1,2, Yang Li1,
Chao Bian1, and Shanhong Xia1
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

62

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W4P.030FABRICATION OF AC-DRIVEN VARIABLE GAS PERMEATIONCONTROL DEVICES AND VERIFICATION OF
CONTROLLABILITY IMPROVEMENT
Naho Minowa1, Manase Mizutani1,2, Yoshihisa Suzuki2,
Yong-Joon Choi1, Kazuhiro Takahashi1, Kazuaki Sawada1,
and Toshihiko Noda1
1
Toyohashi University of Technology, JAPAN and
2
Sintokogio, LTD., JAPANW4P.031

IN SITU INVESTIGATION OF SMALL MOLECULE MASS TRANSPORT
IN SENSOR-BASED ORGAN-ON-CHIP SYSTEMS
Johannes Dornhof, Kevin Ali Beltran Ramirez, Jochen Kieninger,
Stefan J. Rupitsch, Gerald A. Urban, and Andreas Weltin
University of Freiburg, GERMANY

W4P.032

MOF/PDMS HYBRID NANOFILM-BASED QCM FOR VOC SELECTIVE
VIRTUAL SENSING IN HIGH-HUMIDITY ENVIRONMENTS
Mengyao Fu, Dongsheng Li, Chenyang Gao, Jin Xie,
Dibo Hou, and Yunqi Cao
Zhejiang University, CHINA

W4P.033

MULTI-ION SENSOR CHIP FOR HEALTHCARE APPLICATIONS
Van Anh T. Dam and Marcel A.G. Zevenbergen
Holst Centre / Imec, NETHERLANDSMONDAY - Composite Materials, Polymers, and Fabrication Processes
M4P.033

IN-SITU FABRICATION PROCESS OF BACTERIAL CELLULOSECOMPOSITES FOR SOFT ROBOTS
Motonori Uchimura and Fujio Tsumori
Kyushu University, JAPAN

M4P.034

MICRO ADHESIVE STRUCTURE BIOINSPIRED BY TREE FROGTOE PAD -FEMTOSECOND LASER FABRICATION ON SPONGE
AND FORCE EVALUATIONToshihiro Shiratori, Jinya Sakamoto, Yuki Kumokita, Masato Suzuki,
Tomokazu Takahashi, and Seiji Aoyagi
Kansai University, JAPAN

M4P.035

MICROWAVE CHARACTERIZATION OF PARYLENE C DIELECTRIC
AND BARRIER PROPERTIES
Nikolas D. Barrera1, Jacob T. Pawlik2, Eugene J. Yoon1,
James C. Booth2, Christian J. Long2, Nathan D. Orloff2,
Ellis Meng1, and Angela C. Stelson2
1
University of Southern California, USA and 2National Instituteof Standards and Technology, USA

M4P.036

NEAR- ZERO POISSON’S RATIO AND LARGE-AREA METAMATERIALMADE OF UV-PDMS USING 3D BACKSIDE EXPOSURE
Riku Ito1, Ten Sekiguchi1, Vivek Menon2, Ryo Ichige1, Yuya Tanaka1,
Hiroshi Toshiyoshi2, and Takaaki Suzuki1
1
Gunma University, JAPAN and 2University of Tokyo, JAPAN

M4P.037

SPONTANEOUS ADAPTATION OF TOPOGRAPHY IN IMPLANTABLE
DEVICES BY KIRIGAMI-INSPIRED SHAPE MEMORY POLYMERBASED MICROELECTRODES
Yuanhao Xu and Stella W. Pang
City University of Hong Kong, CHINA

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TUESDAY - Composite Materials, Polymers, and Fabrication Processes
T4P.034

3D PRINTED FLUIDIC OSCILLATOR CIRCUITS FOR AUTONOMOUSFLOW DRIVING AND SWITCHING
Liang-Yen Liu, Cheng-Hao Sun, Cheng-Lun Shih, and Yu-Chuan Su
National Tsing Hua University, TAIWAN

T4P.035

A NOVEL NORMAL TACTILE FORCE SENSOR USING ANISOTROPICMAGNETO-RESISTIVE (AMR) SENSING CHIP
Shihwei Lin, Yuanyuan Huan, Fuchi Shih,
Meifeng Lai, and Weileun Fang
National Tsing Hua University, TAIWAN

T4P.036

AUTONOMOUS SELF-HEALING, HIGHLY STRETCHABLE,
AND ELASTIC CONDUCTIVE COMPOSITES FORARTIFICIAL SOFT ELECTRONICS
Yu-Chia Lin, Kuan-Yu Tu, Lung-Hao Hu, and Ching-Te Kuo
National Sun Yat-sen University, TAIWANWEDNESDAY - Composite Materials, Polymers, and Fabrication Processes
W4P.035

MULTI-MODAL NANOWRINKLES ON TRANSPARENT AND FLEXIBLEFILMS FOR COVERT-OVERT STRUCTURAL COLORATION ACTIVELYMODULATED BY MECHANICAL BENDING
Sungjoon Ji, Jun Gyu Park, Yeong Hoon Jeong, and Taesung Kim
Ulsan National Institute of Science and Technology (UNIST), KOREA

W4P.037

POROUS PDMS MICROREACTOR ARRAY CHIP FOR
DE NOVO DNA SYNTHESIS
Xiao Su, Xiaoping Li, Chunjie Sun, Duo Fu, Jiaming Ma,
and Dachao Li
Tianjin University, CHINA

W4P.038SYNTHESIS OF TIO2/MOSX/AG NANOCOMPOSITES VIAPHOTODEPOSITION FOR ENHANCED PHOTOCATALYSISAND FOULING RESISTANT MEMBRANE
Teayeop Kim, Yoonkyung Lee, and Kyunghoon Kim
Sungkyunkwan University, KOREAMONDAY - Energy, Power and Thermal Management

M4P.038

3D STACKED MICRO THIN-FILM LITHIUM-ION BATTERIES FOR
IMPROVING BOTH SPECIFIC CAPACITY AND CYCLING LIFE
Xinru Wu1, Lihao Wang1, Yonghe Zhuang2, Hanzi Sun2, Junfu Liu2,
Chao Wang2, Nian Shi2, and Xiaodong Huang11Southeast University, CHINA and 2Anhui Province Key Laboratoryof Microsystem, CHINA

M4P.039

A FLEXIBLE PIEZOELECTRIC ENERGY HARVESTERSIMULTANEOUSLY SCAVENGING MECHANICAL
ENERGY OF FISH MOVEMENT AND IMPACT
ENERGY OF WATER FLOW
Tianyu Sheng1, Yonggang Jiang1, Qipei He1,
Wenqiang Zhang2, and Kensuke Kanda3
1
Beihang University, CHINA, 2China Agricultural University, CHINA,and 3University of Hyogo, JAPAN64

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M4P.040CIRCUIT SIMULATOR IMPLEMENTATION OF AN EQUIVALENTCIRCUIT MODEL OF SELF-ASSEMBLED ELECTRETVIBRATIONAL ENERGY HARVESTERS BASED ON
AN ENERGY DIAGRAM
Kyosuke Tokuno1, Shohei Kinoshita1, Hideyuki Kayaguchi2,
Keisuke Kurihara2, Hisao Ishii2, Yuya Tanaka3,and Daisuke Yamane1
1
Ritsumeikan University, JAPAN, 2Chiba University, JAPAN, and3
Gunma University, JAPAN

M4P.041

EYE-TEAR-DRIVEN ELECTRET ENERGY HARVESTERFOR SMART CONTACT LENSES
Adwait Deshpande, Erfan Pourshaban, Mohit U. Karkhanis,
Md. Rabiul Hasan, Chayanjit Ghosh, Hanseup Kim,
and Carlos H. Mastrangelo
University of Utah, USA

M4P.042

MEMS-BASED BROAD BAND MICRO VIBRATION ENERGYHARVESTERS UTILIZING (MgHf)0.1AL0.9N
Hung H Nguyen1,2, Le V. Minh1, and Hiroki Kuwano1,2
1
Tohoku University, JAPAN and 2Sendai Smart Machines
Co., Ltd., JAPAN

M4P.043

METAL-ORGANIC FRAMEWORK AND MOLYBDENUM OXIDEHYBRIDIZED NANOCOMPOSITE-BASED TRIBOELECTRIC
BIOMOTION SENSOR FOR WEARABLE SELF-POWEREDHUMAN IOT APPLICATIONSS M Sohel Rana, Omar Faruk, M. Robiul Islam,
HongSeok Kim, Md Abu Zahed, and Jae Y. Park
Kwangwoon University, KOREA

M4P.044MONOLITHIC INTEGRATION OF SCALN MEMS FILTERON RFSOI USING ALD AL2O3 AS VHF BARRIER
Xinghua Wang, Ying Zhang, Chen Liu, Eugene Yi, Zhun Woo,
Wenjia Yang, Nan Wang, Yao Zhu, and Qingxin Zhang
Agency for Science, Technology and Research (A*STAR), SINGAPORETUESDAY - Energy, Power and Thermal Management

T4P.038

A HIGHLY SENSITIVE TRIBOELECTRIC QUASI-ZERO STIFFNESSVIBRATION SENSOR WITH WIDE BANDWIDTH
Pengfan Wu, Fayang Wang, Shiwei Xu, Tao Liu, and Xiaojing Mu
Chongqing University, CHINA

T4P.039

A LIQUID METAL TRIBOELECTRIC NANOGENERATOR (LM-TENG)USING CF4/O2 PLASMA TREATED NONWETTING POLYMERFRICTION LAYER AND GALLIUM ALLOY LIQUID METAL
Jinwon Jeong and Jeong Bong (JB) Lee
University of Texas, Dallas, USA

T4P.040

A MEMS VIBRATIONAL ENERGY HARVESTER CAPABLE
OF RESTLESS CHARGING CAPACITOR FROMRANDOM VIBRATIONS
Hiroaki Honma, Yukiya Tohyama, and Hiroshi Toshiyoshi
University of Tokyo, JAPAN65

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T4P.041

ELECTROSPINNING OF CANDLE SOOT NANOPARTICLESFOR SUPERCAPACITOR APPLICATION
Sparsh Gupta1, Ankur Gupta2, Dario Mager3,
Jan G. Korvink3, and Monsur Islam3
1
Punjab Engineering College, INDIA, 2Indian Institute of Technology
Jodhpur, INDIA, and 3Karlsruhe Institute of Technology, GERMANY

T4P.042

LIGHT-CONTROLLED PYROELECTRIC EFFECT:DIRECT CONVERSION OF LIGHT-INDUCEDHEAT TO PHYSICAL ACTUATION
Rui M.R. Pinto, Mohammadmahdi Faraji, and K. B. Vinayakumar
INL - International Iberian Nanotechnology Laboratory, PORTUGAL

T4P.043

ZERO-POWER WIRELESS SENSING SYSTEM BASED ON
PIEZOELECTRIC ENERGY HARVESTING TOWARDSBATTERY-FREE IOT APPLICATIONS
Fangzhi Li, Zhao Chen, Tianyu Zhang, Yongqi Cao,
Honglong Chang, Weizheng Yuan, and Kai Tao
Northwestern Polytechnical University, CHINAWEDNESDAY - Energy, Power and Thermal Management

W4P.040HYBRID 3D-PRINTING OF MOLTEN METAL MICRODROPLETSAND POLYMERS FOR PROTOTYPING OF PRINTED CIRCUIT
BOARDS WITH INTEGRATED ELECTRICAL ENERGYSTORAGE SYSTEMS
Zeba Khan1,2, Dheepesh Gururajan1, Daniel Straubinger2,
Peter Koltay1, Sabrina Kartmann1,2, Roland Zengerle1,2,
and Zhe Shu1,2
1
University of Freiburg, GERMANY and 2Hahn-Schickard, GERMANY

W4P.041

NON-RESONANT VIBRATION ENERGY HARVESTER WITH WOUNDMICRO-COIL ARRAYS
Matin Barekatain, Junyi Wang, Akash Roy,
Kianoush Sadeghian Esfahani, Jaehoon Lee,and Eun S. Kim
University of Southern California, USA

W4P.042OPTIMIZATION OF THE ENERGY HARVESTED BY A
TRIBOELECTRIC GENERATOR EXCITED WITH A
SMALL NUMBER OF ACTUATIONS
Ahmad Delbani1, Naida Hodzic2, Dimitri Galayko3, Armine Karami2,
Tarik Bourouina2, Malal Kane1, and Philippe Basset2
1
Université Gustave Eiffel, FRANCE and2
Sorbonne Université, FRANCE

W4P.043PIEZOELECTRIC ENERGY HARVESTER WITH ANTI-INTERFERENCEABILITY FOR POWER LINE MONITORING APPLICATION
Shanghao Gu, Kunling Xi, Anxin Luo, and Fei Wang
Southern University of Science and Technology, CHINA

W4P.044

STRETCHABLE FLUORINATED ELECTRET FOR SKIN-ATTACHABLE
ENERGY HARVESTER
Rui Wang, Kuniko Suzuki, Masaya Takebe, Yucheng Zhang,
Tomoya Miyoshi, and Yuji Suzuki
University of Tokyo, JAPAN66

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MONDAY - Microfluidics Platform Technologies
M4P.045A LABCHIP WITH CO-CULTURED SPHEROIDS APPLIED FOR
HIPEC CANCER DRUG SCREENING
Chang-Hung Hsieh1, Wei-Yu Huang1, Mao-Chih Hsieh2, Yu-ting Tai2,
Jen-Tsan Ashley Chi3, Si-Jin Dong1, and Cheng-Hsien Liu1
1
National Tsing Hua University, TAIWAN, 2Taipei Medical University,
TAIWAN, and 3Duke University, USA

M4P.046

HIGH-THROUGHPUT GENERATION OF GIANT LIPOSOMESUTILIZING STEP EMULSIFICATION AND PARALLELIZEDDROPLET TRANSFER CHANNELS
Shota Nakagawa, Naotomo Tottori,
Sakuma Shinya, and Yoko Yamanishi
Kyushu University, JAPAN

M4P.047LIQUID METAL DROPLETS FIBER FABRICATION BY THE
CO-FLOW MICROFLUIDIC SYSTEM
Xu Gao and Wei Wang
Peking University, CHINA

M4P.048

LIGHT-FIELD MICROSCOPY-BASED COUNTING OF PARTICLESMOVING IN A MICROFLUIDIC VOLUME
Xinglong Huang1,2, Xing Cheng2, and Boris Stoeber1
1
University of British Columbia, CANADA and 2Southern Universityof Science and Technology, CHINA

M4P.049

NEW EWOD PLATFORM FOR FREELY TRANSPORTING DROPLET
IN DOUBLE-PLATES AND SINGLE-PLATE STRUCTURES
Ting-Rui Huang1, Yii-Nuoh Chang1, Yi-Wei Lin1,2, and Da-Jeng Yao1
1
National Tsing Hua University, TAIWAN and2
Industrial Technology Research Institute, TAIWAN

M4P.050PROGRAMMABLE ACTIVE FLOW CONTROL SYSTEM FOR
MICROFLUIDIC PAPER-BASED ANALYTICAL DEVICES(μPADS) BY SIMPLE SCREW DRIVE
Chia-Wen Tsao, Po-Heng Lee, Yi-Fang Lai, and Wen-Yih Chen
National Central University, TAIWAN

M4P.051

TUNABLE ACOUSTIC TWEEZERS FOR DROPLET CARRIER
TRANSPORTATION AND PRETREATMENT OF LOADEDMICRO-ANALYTES
Huaize Lan1, Jingui Qian1, Hongyu Chen2, Yong Wang3,
Liang Huang1, Xuefeng Hu1, and Wei Zhang1
1
Hefei University of Technology, CHINA, 2Zhejiang University, CHINA,and 3Hangzhou City University, CHINATUESDAY - Microfluidics Platform Technologies

T4P.044

3D-PRINTED, INTERNALLY FED MEMS ELECTROSPRAY
THRUSTER WITH PRECISE FLOW RATE CONTROL FOR
HIGH-IMPULSE CUBESAT MISSIONS
Hyeonseok Kim and Luis F. Velásquez-García
Massachusetts Institute of Technology, USA

67

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T4P.045

DUAL-GATE AND OTHER CAPILLARY FIELD EFFECT TRANSISTORDESIGN IMPROVEMENTS FOR INCREASED SWITCHING SPEED,SEALING EFFICACY, AND LIQUID VISCOSITY RANGE
Daniel Mak1, Azadeh Hashemi1, Claude Meffan1,2, Julian Menges1,
Henrieke Meijer3, Fabien Abeille3, Marko T. Blom3, Renwick Dobson1,
and Volker Nock1
1
University of Canterbury, NEW ZEALAND, 2Kyoto University, JAPAN,
and 3Micronit B.V., NETHERLANDS

T4P.046

FRACTION COLLECTORS FOR CONDUCTING CHROMATOGRAPHY
ON A CENTRIFUGAL PLATFORM
Yi-Hui Chen, Yuan-Ting Cheng, and Chih-Hsin ShihFeng Chia University, TAIWAN

T4P.047

LATE-STAGE ZEBRAFISH EMBRYO MANIPULATION AND IMAGING
WITH ACOUSTIC TWEEZERS BASED ON BESSEL BEAM TRAPPING
Baptiste Neff, Kianoush Sadeghian Esfahani, Matin Barekatain,
Akash Roy, Jaehoon Lee, and Eun S. Kim
University of Southern California, USA

T4P.048

LOW-COST AND RAPID FABRICATION OF MICROCHANNELSBY KIRIGAMI-BASED SOOT COATING FOR THE DETECTION
OF EXPLOSIVESWei Yue1, Hanxiao Liu1,2, Xinyu Zhou3, Chun-ming Chen4,
Yande Peng1, Fanping Sui1, Ying Dong2, and Liwei Lin1
1
University of California, Berkeley, USA, 2Tsinghua University, CHINA,
3
Peking University, CHINA, and 4National Tsinghua University, TAIWAN

T4P.049

ULTRA-FAST ACOUSTOFLUIDIC PARTICLE FOCUSING USINGLATERAL MODES OF A PLATE TRANSDUCER
Andreas Fuchsluger1, Annalisa De-Pastina2, Tina Mitteramskogler1,
Rafael Ecker1, Thomas Voglhuber-Brunnmaier1, Nikolai Andrianov2,
Alexander Shatalov2, Norbert Cselyuszka2, Mohssen Moridi2,
and Bernhard Jakoby1
1
Johannes Kepler Universität Linz, AUSTRIA and2
Silicon Austria Labs, AUSTRIAWEDNESDAY - Microfluidics Platform Technologies

W4P.045

3D-PRINTED POROUS MICRONEEDLES FOR WOUND HEALING
Esraa A. Fakeih, Andrés A. Aguirre-Pablo, Dana Z. Al Sulaiman,
Sigurdur T. Thoroddsen, and Khaled N. Salama
King Abdullah University of Science and Technology(KAUST), SAUDI ARABIA

W4P.046

A FACILE APPROACH FOR FABRICATING ORDEREDSUBMICROMETER-WIDE SURFACE PATTERNS BYIMPRINTING POLYDIMETHYLSILOXANE CRACKS
Yang Bu, Sheng Ni, and Levent Yobas
Hong Kong University of Science and Technology, HONG KONG

W4P.047

COCKTAIL DRUGS DELIVERY CHIP WITH SELECTIVELYCROSSLINKING HYDROGEL FOR COLON CANCERDRUG SCREENING
HsinYu Yang1,2 and FanGang Tseng1,21National Tsing Hua University, TAIWAN and2
Acdamia Sinica, TAIWAN68

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W4P.048

FABRICATION AND EVALUATION OF HIERARCHICAL
SUPERHYDROPHOBIC AND SALVINIA SURFACES
Zhaohui R. Li, Xiaojie Tao, and Chang-Jin “CJ” Kim
University of California, Los Angeles, USA

W4P.049

MICROFLUIDIC THORMBUS ANALYSIS SYSTEM
Ji-Seob Choi1, Dong-Hwi Ham1, Jin-Ho Choi2, and Woo-Tae Park1
1
Seoul National University of Science and Technology, KOREA and2
Samsung Medical Center, KOREAMONDAY - Nanoscale Materials and Fabrication

M4P.052

ELECTRETIZATION OF NANO-THICK AL2O3 FILMS DURING
ATOMIC LAYER DEPOSITION
Yoshito Iguchi, Momoko Narasaki, Akio Uesugi,
Koji Sugano, and Yoshitada Isono
Kobe University, JAPAN

M4P.053

FABRICATION METHOD OF VERSATILE MICRO/NANO
HIERARCHICAL STRUCTURE AND ITS USAGE AS
SUPERHYDROPHOBIC FLEXIBLE FILM
Yongrok Jeong1, Junseong Ahn1, Byeongmin Kang2,
Ji-Hwan Ha1,2, Jiwoo Ko1, Soon Hyoung Hwang2,
Sohee Jeon2, Jun-Ho Jeong2, and Inkyu Park1
1
Korea Advanced Institute of Science and Technology (KAIST),KOREA and 2Korea Institute of Machinery and Materials, KOREA

M4P.054

RESIDUE-FREE TRANSFER OF VERTICALLY ALIGNED CARBON
NANOTUBE ARRAYS USING THIN ICE FILM
Hyunjun Han, Kyuhyun Hwang, Eunhwan Jo,
Daeyeon Koh, and Jongbaeg Kim
Yonsei University, KOREA

M4P.055

TWO-DIMENSIONAL MOS2-BASED FLEXIBLE SENSOR FORSENSITIVE, REAL-TIME MONITORING OF LITHIUM-ION
BATTERY TEMPERATURE
Dianhong Huo and Jungwook Choi
Chung-Ang University, KOREATUESDAY - Nanoscale Materials and Fabrication

T4P.050

FLOW BEHAVIOR CHARACTERIZATION OF DNA MOLECULESIN PASSIVE NANOFLUIDIC DEVICES
Franziska M. Esmek1, Phil Grzybeck1, Rukan Nasri1,2,
Dennis H.B. Mors1, Sadhana Tiwari1,
and Irene Fernandez-Cuesta1,2
1
Universität Hamburg, GERMANY and 2Hamburg Centre
for Ultrafast Imaging, GERMANY

T4P.051

FORMATION DYNAMICS OF DNA CONDENSATES IN
MONODISPERSE GUVS TOWARD CONSTRUCTION
OF ARTIFICIAL CELLS WITH NUCLEUS
Ryotaro Yoneyama1, Ryota Ushiyama1, Tomoya Maruyama2,Masahiro Takinoue2, and Hiroaki Suzuki1
1
Chuo University, JAPAN and 2Tokyo Institute of Technology, JAPAN69

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T4P.052

INDIVIDUALLY ADDRESSABLE, 3D-PRINTED CARBON
NANOTUBE FIELD EMITTER ARRAYS FOR LARGE-AREA
VACUUM ELECTRONICS
Crystal E. Owens, Alex Kachkine, Gareth H. McKinley,
Luis F. Velásquez-Garcia, and A. John Hart
Massachusetts Institute of Technology, USA

T4P.053

NANO-WIDTH ZIGZAG FLEXURE STRUCTURES FOR HIGHLY
TUNABLE GRATING PITCH
Kiryu Atsuya, Gaku Furusawa, Oshita Masaaki, and Tetsuo Kan
University of Electro-Communications, JAPANT4P.054NANOSCALE STENCILS FABRICATED BY FOCUSEDION BEAM MILLING AND DRY TRANSFER OF
SILICON-ON-NOTHING MEMBRANES
Taeyeong Kim and Jungchul Lee
Korea Advanced Institute of Science and Technology (KAIST), KOREAWEDNESDAY - Nanoscale Materials and Fabrication

W4P.050

CONTROLLABLY CONSTRUCTING GOLD NANOSTRUCTURES ON
ELECTRODES THROUGH GROWTH OF ZINC OXIDE NANORODSAND TWO-STEP ELECTROPLATING
Shengsen Zhang, Shengjie Chen, Kunru Yu, and Rong Zhu
Tsinghua University, CHINA

W4P.051

DNA CROSS-LINKED MODULAR STIMULI-RESPONSIVEGEL SENSOR UTILIZING NUCLEIC ACID REACTION FORMICROFLUIDIC SYSTEMSSatofumi Kato1, Yurika Ishiba1, Masahiro Takinoue2, and Hiroaki Onoe1
1
Keio University, JAPAN and 2Tokyo Institute of Technology, JAPANW4P.052

INVESTIGATION OF ELASTIC SOFTENING AND STIFFENING
EFFECT OF ALUMINUM NITRIDE UNDER STRESS LOADINGBY BORN-LANDE EQUATION
Cong Chen1, Yuwen Lu1, Jie Zhang1, Libing Bai1, Jiahao Wang1,
Yuhua Cheng1, and Hong Zhou2
1
University of Electronic Science and Technology of China, CHINA and2
National University of Singapore, SINGAPORE

W4P.053

NANOGAP CONTROL OF GOLD NANOPARTICLE DIMERTOWARD ELECTRICAL AND OPTICAL SINGLE
MOLECULE MEASUREMENTS
Yuanzhi Chang, Takayuki Sumitomo, Akio Uesugi,
Koji Sugano, and Yoshitada Isono
Kobe University, JAPANW4P.054

NEMS PRESSURE GAUGE BASED ON 2D TI3C2TX RESONATORSBo Xu, Jiankai Zhu, Fei Xiao, Na Liu, Hujie Wan, Xu Xiao,
Juan Xia, and Zenghui Wang
University of Electronic Science and Technology of China, CHINA

W4P.055

VISUALIZATION OF GAS SPATIOTEMPORAL DISTRIBUTION
USING 2D LSPR GAS SENSOR
Masato Matsuoka, Ge Lingpu, Fumihiro Sassa, and Kenshi Hayashi
Kyushu University, JAPAN70

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MONDAY - Optical and Atomic Transducers
M4P.056

A NOVEL WATER-IMMERSIBLE METAL MICRO SCANNING
MIRROR BASED ON ZIGZAG BEAM STRUCTURE
Er-Qi Tu, Xin-Lu Deng, Xiao-Yong Fang, Sen-Yuan Yu,
Xiang-Hao Kong, Jia-Zhe Liang, and Wen-Ming Zhang
Shanghai Jiao Tong University (SJTU), CHINA

M4P.057

A RESONANT PIEZOELECTRIC MEMS MIRROR WITH 180-DEGREE
OPTICAL SCAN ANGLE UNDER ATMOSPHERE PRESSURE
Hung-Yu Lin1, Hao-Chien Cheng1,2, Shih-Chi Liu1,
Chih-Chen Hsu1, Si-Han Chen1, Jerwei Hsieh3,
Ruey-Shing Huang3,4, Mei-Feng Lai1,
and Weileun Fang1
1
National Tsing Hua University, TAIWAN, 2Coretronic MEMS
Corporation, TAIWAN, 3Asia Pacific Microsystems, Inc., TAIWAN,
and 4National Sun Yat-sen University, TAIWAN

M4P.058

ABSOLUTE PRESSURE MEASUREMENT OF SUB-MILLIPASCALORDER USING LASER RADIATION FORCE
Yuki Takei, Yuki Okamoto, Masaaki Ichiki,and Hiromitsu Furukawa
National Institute of Advanced Industrial Science andTechnology (AIST), JAPAN

M4P.059COMBINING PIEZORESISTIVE AND PIEZOELECTRIC SENSINGIN PZT-DRIVEN RESONANT MEMS MICROMIRRORS FOR
OPTIMAL STABILITY
Paolo Frigerio1, Andrea Bertazzoni1, Roberto Carminati2,
Luca Molinari2, Gianluca Mendicino2, and Giacomo Langfelder2
1
Politecnico di Milano, ITALY and 2STMicroelectronics, ITALY

M4P.060

MEMS TE0-TEN MODE SELECTIVE SWITCH FOR MODE DIVISIONMULTIPLEXING SYSTEMS
Haoyang Sun1, Qifeng Qiao1,2, and Guangya Zhou1
1
National University of Singapore, SINGAPORE and2
Shanghai Industrial μTechnology Research Institute, CHINA

M4P.061

MICROAPERTURE MODULATED ULTRATHIN ARRAY CAMERAFOR HIGH DYNAMIC RANGE (HDR) IMAGING
Young-Gil Cha, Hyun-Kyung Kim, Jae-Myeong Kwon,
and Ki-Hun Jeong
Korea Advanced Institute of Science and Technology (KAIST), KOREATUESDAY - Optical and Atomic Transducers

T4P.055

A 2-AXIS SCANNING COMB-DRIVE MICROMIRROR WITH
POLYMER-FILLED ISOLATION TRENCHES
Yingchao Cao, Yingtao Ding, Yangyang Yan, and Huikai Xie
Beijing Institute of Technology, CHINA

T4P.056

A LIGHTWEIGHT MICROMIRROR MADE OFATOMIC-LAYER-DEPOSITION ALUMINA AND
SILICON WITH A HIGH ASPECT-RATIOSTIFFENING STRUCTURE
Nguyen Thanh Tung1, Takashi Sasaki1, Daniel Greif2, Katie Smyth2,
Sergey Lamansky2, and Kazuhiro Hane1
1
Tohoku University, JAPAN and 2Meta, USA

71

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T4P.057

CURRENT SENSING BASED ON MICROFABRICATED DIAMONDQUANTUM MAGNETOMETER
Qihui Liu1,2, Hao Chen1,2, Fei Xie1,2, Yuqiang Hu3,4, Nan Wang1,2,
Lihao Wang1, Yichen Liu1, Yang Wang1, Zhichao Chen1,2,
Lingyun Li1,2, Jiangong Cheng1,2, and Zhenyu Wu1,2
1
Chinese Academy of Sciences (CAS), CHINA, 2University of Chinese
Academy of Sciences, CHINA, 3Shanghai University, CHINA, and4
Shanghai Industrial μTechnology Research Institute, CHINA

T4P.058

LARGE STROKE PIEZO MEMS MIRROR FOR HIGH-SPEED
FOURIER TRANSFORM SPECTROSCOPY
Jaka Pribošek, Anton Lagosh, and Gerald Auböck
Silicon Austria Labs GmbH (SAL), AUSTRIA

T4P.059

MONOLITHIC CMOS-COMPATIBLE CO2 SENSOR WITH THERMALSOURCE AND DETECTOR
Cristina Consani1, Nathanael Barlier1, Gerald Stocker2,
Florian Dubois1, Thang Duy Dao1, Khaoula-Farah Ourak1,
Pooja Thakkar1, Ulf Bartl2, Christoph Kovatsch2,
Thomas Ostermann2, Andreas Tortschanoff1,
Thomas Grille2, and Clement Fleury1
1
Silicon Austria Labs GmbH (SAL), AUSTRIA and2
Infineon Technologies Austria AG, AUSTRIA

T4P.060

OVER-COUPLED MODE BASED ON METAMATERIAL ABSORBER
FOR ENHANCED MOLECULAR DETECTION
Dongxiao Li, Hong Zhou, Zhihao Ren, and Chengkuo Lee
National University of Singapore, SINGAPOREWEDNESDAY - Optical and Atomic Transducers

W4P.056

A MEMS RECONFIGURABLE TERAHERTZ METAMATERIAL
ABSORBER BASED ON THE TUNABLE AIR GAP
Zhenci Sun1, Chen Chen1, Xiaomeng Bian2, Yuanmu Yang1,
Rui You2, Xiaoguang Zhao1, and Jiahao Zhao1
1
Tsinghua University, CHINA and 2Beijing Information Scienceand Technology University, CHINA

W4P.057

CHIP-SCALE DIGITAL MID-INFRARED COMPUTATIONAL
SPECTROMETER POWERED BY MEMS TECHNOLOGY
Haoyang Sun1, Qifeng Qiao1,2, and Guangya Zhou1
1
National University of Singapore, SINGAPORE and2
Shanghai Industrial μTechnology Research Institute, CHINA

W4P.058

INTEGRATION OF (POLY-SILICON/AIR)N DISTRIBUTED BRAGG
REFLECTORS IN A 150 MM BULK MICROMACHINEDWAFER-LEVEL MOEMS FABRICATION PROCESS FOR
THE USAGE IN IR-SPECTROMETRY
Christian Helke1,2, Jan Seiler1,2, Marco Meinig1, Toni Großmann1,2,Thomas Werner1, Jens Bonitz1, Micha Haase1,2, Sven Zimmermann1,2,Martin Ebermann3, Steffen Kurth1, Danny Reuter1,2, and Karla Hiller1,21
Fraunhofer ENAS, GERMANY, 2Technische Universität Chemnitz,
GERMANY, and 3InfraTec GmbH, GERMANY

W4P.059

NOVEL TERRACED CAVITIES DESIGN ON IR-ABSORBER SURFACEFOR CMOS-MEMS THERMOELECTRIC INFRARED SENSOR
Yung-Chen Li, Yuanyuan Huang, You-An Lin, Da-Jen Yen,
Mei-Feng Lai, and Weileun Fang
National Tsing Hua University, TAIWAN72

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W4P.060

PIEZO-ACTUATED HIGHER ORDER WAVEFRONT CORRECTION LENS
Hitesh G.B. Gowda1, Matthias C. Wapler1,2, and Ulrike Wallrabe1
1
University of Freiburg, GERMANY and 2Otto von Guericke University
Magdeburg, GERMANY

W4P.061

WIDE ANGLE AND HIGH FREQUENCY RESONANT PIEZOELECTRIC
MEMS MIRROR FOR LASER BEAM SCANNING APPLICATION
Hung-Yu Lin1, Hao-Chien Cheng1,2, Shi-Chi Liu1, Chih-Chen Hsu1,
Si-Han Chen1, Mingching Wu2, Kai-Chih Liang2, Mei-Feng Lai1,
and Weileun Fang1
1
National Tsing Hua University, TAIWAN and
2
Coretronic MEMS Corporation, TAIWANMONDAY - Packaging & Solid-State Materials and Fabrication Processes
M4P.062

CROSS-SECTIONAL SHAPE CONTROL OF MICROCHANNEL ON
MICROPOWDER BLASTING WITH NOZZLE TILTING ANGLE
Hiromasa Yagyu, Mikinari Takada, and Mao Hamamoto
Kanto Gakuin University, JAPAN

M4P.063

FABRICATION OF HIGH-DENSITY MICRO-BUMP ARRAYS
FOR 3D INTEGRATION OF MEMS AND CMOS
Yunfan Shi1, Zilin Wang1, Rutian Huang1, Jin Kang2,
Kai Zheng2, Weihai Bu2, and Zheyao Wang1,31Tsinghua University, CHINA, 2Semiconductor Technology
Innovation Center Corporation, CHINA, and 3Beijing
Innovation Center for Future Chips, CHINA

M4P.064FABRICATION OF ULTRA-LOW RESONANCE FREQUENCYINERTIAL MEMS USING THROUGH-SILICON DEEP-RIEAPPLIED TO SILICON-ON-GLASS
Jun Wu, Hui Zhang, and Tamio Ikehashi
Waseda University, JAPAN

M4P.065

ON-CHIP LASER BEAM DELIVERY FOR INTEGRATED ION TRAPS
Mario Grüneberg1, Jaka Pribošek1, Andreu Llobera1,
Alexander Zesar2, Jakob Wahl2, Matthias Preidl2, Yves Colombe2,
Klemens Schüppert2, Clemens Rössler2, Philipp Hurdax3,
Bernhard Lamprecht3, and Matteo Montagnese1
1
Silicon Austria Labs GmbH (SAL), AUSTRIA, 2Infineon Technologies,
AUSTRIA, and 3Joanneum Research Forschungsgesellschaft
GmbH, AUSTRIA

M4P.066

ULTRASONIC TEST STRUCTURES FOR NON-DESTRUCTIVE
MEASUREMENT OF TRAPEZOIDAL ANGLE INBOSCH PROCESSES
Lucrezia Maini1, Roman Furrer2, Vicente Genovés1,
and Cosmin Roman1
1
ETH Zürich, SWITZERLAND and 2EMPA Dübendorf, SWITZERLAND

M4P.067ULTRATHICK LOW-STRESS POLY-SILICON FILM FOR MEMS
PREPARED BY LPCVD PROCESSGen Shikida1, Hideharu Itatani1, Toshio Kudo1, Shuntaro Machida1,
Yukio Suzuki2, Shuji Tanaka2, and Manabu Izumi1
1
Kokusai Electric Corporation, JAPAN and 2Tohoku University, JAPAN73

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TUESDAY - Packaging & Solid-State Materials and Fabrication Processes
T4P.061

200MM WAFER RECONSTITUTION FOR SENSOR APPLICATION
Wei Wei1, Yunlong Li2, Gauri Karve1, Lei Zhang1,
Tim Stakenborg1, and Deniz S. Tezcan1
1
IMEC, BELGIUM and 2Zhejiang University, CHINA

T4P.062

A NOVEL ANISOTROPIC WET ETCHING PROCESS OF(100)-SILICON WITH AREA EFFICIENCY ON CONVEXCORNER COMPENSATION PATTERNS
Shaoxiao Nie, Xu Ma, Fanrui Meng, Cong Zhou,
Jie Wang, Yunfei Liu, Wenhua Xu, Zhenchuan Yang,
Yilong Hao, and Chengchen Gao
Peking University, CHINA

T4P.063

DESIGN AND FABRICATION OF A SMART VAPORASING LIQUIDMICROTHRUSTER FOR CUBESAT APPLICATIONS
Georgios Spernovasilis, Henk W. van Zeijl, and Pasqualina M. Sarro
Delft University of Technology, NETHERLANDS

T4P.064GAS PERMEABLE ENVIRONMENTAL PROTECTION CAPS
FOR WAFER LEVEL CAPPING OF MEMS GAS AND
PRESSURE SENSORS
Ole Behrmann1, Thomas Lisec1, Stefan Schröder2, and Björn Gojdka1
1
Fraunhofer Institute for Silicon Technology ISIT, GERMANY and2
Kiel University, GERMANY

T4P.065

LARGE-SCALE AND HIGH-ASPECT-RATIO MICRO/NANO GLASSSTRUCTURES VIA A REFLOW PROCESSMinjie Zhu, Xiaohui Du, Shuai Liu, and Fanhong Chen
Instrumentation Technology and Economy Institute, CHINA

T4P.066

SINGLE-CRYSTALLINE-SILICON TSV BASED ON DRY FILLINGAND OXIDATION OF SUBMICRON SILICON PARTICLES
Biyun Ling1, Biqing Zhou1,2, Xiaoyue Wang1,
Yaming Wu1, and Gang Quan1
1Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINAWEDNESDAY - Packaging & Solid-State Materials and Fabrication Processes
W4P.062DESIGN AND FABRICATION OF A PASSIVE PRESSURE SENSORBASED ON BIOCOMPATIBLE ORMOCOMPYi Chiu1, Chun-Hsiang Liao1, Gianmario Scotti1,
Parvaneh Sardarabadi2, and Cheng-Hsien Liu2
1
National Yang Ming Chiao Tung University, TAIWAN and
2
National Tsing Hua University, TAIWAN

W4P.063

PLASMA-BASED ADDITIVE MANUFACTURING METHOD FOR
MEMS USING APSLD (ATMOSPHERIC PRESSURE SPUTTERINGLAYER DEPOSITION) TECHNOLOGYJan Bickel1, Roland Gesche2, Martin Fieber2, Joachim Scherer3,
Reinhold Kovacs3, Xiaodong Hu4, and Ha Duong Ngo1
1
University of Applied Sciences Berlin, GERMANY, 2BEAPLAS GmbH,GERMANY, 3Aurion Anlagentechnik GmbH, GERMANY, and4
MSG Lithoglas GmbH, GERMANY

74

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W4P.064

SINGLE PASCAL VACUUM SEALING OF MEMS RESONATOR
BY SILICON MIGRATION WAFER-LEVEL PACKAGINGWITIOUT GETTER
Yukio Suzuki1, Muhammad Jehanzeb Khan1, Munehiro Honda2,
Hidetoshi Miyashita2, Tianjiao Gong1, Takashiro Tsukamoto1,
and Shuji Tanaka1
1
Tohoku University, JAPAN and 2Sony Semiconductor Manufacturing
Corporation, JAPANW4P.065ULTRAFAST DIRECT WRITING OF POLYMERS AS ASIMPLE FABRICATION METHOD FOR ORGANICELECTROCHEMICAL TRANSISTORS
Alessandro Enrico1, Sebastian Buchmann1,2, Fabio De Ferrari1,
Yazhou Wang3, Wan Yue4, Göran Stemme1, Frank Niklaus1,
Anna Herland1,2, and Erica Zeglio1,2
1
KTH Royal Institute of Technology, SWEDEN, 2Karolinska Institute,
SWEDEN, 3King Abdullah University of Science and Technology(KAUST), SAUDI ARABIA, and 4Sun Yat-sen University, CHINA
MONDAY - Physical Sensors and Microsystems

M4P.068

A CMOS-MEMS THREE-AXIS MAGNETIC SENSOR WITH A
FERROMAGNETIC CONCENTRATOR
Yun-Wen Lai, Yu-Lin Yang, and Shih-Jui Chen
National Central University, TAIWAN

M4P.069

A FAST CHARACTERIZATION METHOD FOR PRESSURESENSORS WITH CONTINUOUSLY RAMPING PRESSURE
AND TEMPERATURE
Chen Wang1, Appo van der Wie2, Grim Keulemans1,
Ben Maes2, Maliheh Ramezani2, and Michael Kraft1
1
University of Leuven, BELGIUM and 2Melexis, BELGIUM

M4P.070

A MINIATURIZED LEAF CUVETTE FOR VOLATILE ORGANICCOMPOUND MEASUREMENT ON BROAD LEAVES
Yasmina Frey, Simon Haberstroh, Mirjam Meischner,
Christiane Werner, and Ulrike Wallrabe
University of Freiburg, GERMANY

M4P.071

A RESONANT-BASED HIGHLY SENSITIVE GAS SENSOR
WITH A FUNCTIONAL COMPOSITE MEMBRANE
Na Ling, Wei Zhang, Jiajia Xiang, Jiayang Chen, Lijia Zhang,
Cao Xia, Yuanlin Xia, and Zhuqing Wang
Sichuan University, CHINA

M4P.072

A RESONANT PRESSURE SENSOR WITH SUPER HIGH RESOLUTION
AND STABILITY BASED ON NOVEL VOLUME SHRINKAGE METHOD
Toshiki Mitsuhashi1, Ken Kanno2, Shigeto Iwai1, Atsushi Yumoto1,
Daisuke Hatori1, and Ryuuichirou Noda1
1
Yokogawa Electric Corporation, JAPAN and2
PT Yokogawa Indonesia, INDONESIA

M4P.073

A THREE-AXIS CO-OSCILLATING VECTOR HYDROPHONE
BASED ON MEMS ELECTROCHEMISTRY
Lintao Hu1,2, Tian Liang1,2, Zhenyu Sun1,2, Maoqi Zhu1,2,
Mingbo Zhang1,2, Junbo Wang1,2, Deyong Chen1,2,
and Jian Chen1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

75

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M4P.074

AN ALL-SILICON RESONANT DIFFERENTIAL PRESSURE
MICROSENSOR WITH TEMPERATURE COMPENSATION
Jiahui Yao1,2, Chao Cheng1,2, Han Xue1,2, Zongze Yu1,2, Yulan Lu1,Bo Xie1, Junbo Wang1,2, Deyong Chen1,2, and Jian Chen2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

M4P.075

DEVELOPMENT OF FLEXIBLE PIEZOELECTRIC HAIR-LIKE
DUAL-MODE SENSOR FOR DETECTION OF AIRFLOW AND
ACOUSTIC PARTICLE VELOCITY
Biao Jin, Hongchao Cao, Tianyu Sheng, Qipei He,
Yansong Gai, and Yonggang Jiang
Beihang University, CHINA

M4P.076

DOUBLE-PROOF MASS SOI-BASED MATRYOSHKA-LIKE 3-AXIS
MEMS ACCELEROMETERInês S. Garcia1, José Fernandes1, José B. Queiroz1, Carlos Calaza1,
José Moreira2, Rosana A. Dias1, and Filipe S. Alves1
1
International Iberian Nanotechnology Laboratory (INL), PORTUGAL
and 2Redes Energéticas Nacionais (REN), PORTUGAL

M4P.077

FIRST DEMONSTRATION OF A PRINTABLE FUSED-SILICA GLASSBASED MILLI-METER SIZED RESONATOR
Yahya Atwa and Hamza Shakeel
Queen’s University Belfast, UK

M4P.078

IMPROVED REPRODUCIBILITY OF DEFLECTION CONTROLPROCESS FOR CANTILEVER-TYPE MEMS TACTILE SENSORSHarufumi Hosokawa, Yuki Kawasaki, Yingquan Zheng,
Takashi Abe, and Masayuki Sohgawa
Niigata University, JAPAN

M4P.079

NEST BOX FOR MONITORING THE MASS AND HEART RATECHANGES OF A GROWING SEABIRD CHICK
Daiki Uematsu1, Takuto Kishimoto1, Kazuki Harada2,
Shinichi Watanabe3, Katsufumi Sato2,
and Hidetoshi Takahashi11Keio University, JAPAN, 2University of Tokyo, JAPAN, and3
Research Institute of Rare Birds Japan, JAPAN

M4P.080

OPTICALLY PUMPED SOLID STATE QUANTUM MAGNETOMETERS
FOR SPACE APPLICATIONSAndreas Gottscholl, Hannes Kraus, and Corey J. CochraneCalifornia Institute of Technology, USA

M4P.081

PARAMETER OPTIMIZATION FOR AMPLITUDE-MODULATEDRESONANT MEMS SENSORS FEATURING BLUESIDEBAND EXCITATION
Jingqian Xi1, Lei Xu1, Xingyin Xiong4, Xudong Zou4, Chengxin Li5,
Fangjing Hu1, Yuan Wang2, Huafeng Liu1, and Chun Zhao3
1
Huazhong University of Science and Technology, CHINA,
2
University of Macau, CHINA, 3University of York, UK,
4
Chinese Academy of Sciences (CAS), CHINA, and5
University of Leuven, BELGIUM

M4P.082

PRESSURE SENSOR WITH A CORRUGATED STRUCTURE
UTILIZING LIG SENSING ELEMENT
Ryo Oda, Rihachiro Nakashima, and Hidetoshi Takahashi
Keio University, JAPAN76

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M4P.083

SLIP DETECTION USING A HEAT-FLOW-TYPE WARMTH SENSOR
Hiro Kanamori and Yoshiyuki Hata
Meijo university, JAPAN

M4P.084

TEMPERATURE BEHAVIOUR OF RAYLEIGH, SEZAWA
AND LAMB MODE RESONANCE FREQUENCIES OF
30% SCALN/SI SAW DEVICES
Alexandra Nicoloiu1, George Boldeiu1, Claudia Nastase1,
Monica Nedelcu1, Cristina Ciornei1, Ioana Zdru1,
George Stavrinidis2, Dan Vasilache1, Antonis Stavrinidis2,
Adrian Dinescu1, George Konstantinidis2, and Alexandru Müller1
1
IMT Bucharest, ROMANIA and 2FORTH IESL Heraklion, GREECE

M4P.085TEXTILE-BASED STRETCHABLE STRAIN SENSOR FOR HUMAN
ACTIVITY AND HEALTH MONITORING
Rui M.R. Pinto, Mohammadmahdi Faraji, and K.B. Vinayakumar
INL - International Iberian Nanotechnology Laboratory, PORTUGAL

M4P.086

UNIVERSAL CONCEPT FOR FABRICATING LOW RESIDUAL
STRESS PZT FILM-BASED PMUT ON SILICON WAFER
USING BOTTOM-UP METHOD
Yuh-Cherng Lai and Guo-Hua Feng
National Tsing Hua University, TAIWAN

M4P.087

UNIVERSAL OPTIMIZATION SOLUTION FOR DIELECTRICGEOMETRY ON SENSITIVITY MAXIMIZATION IN FLEXIBLECAPACITIVE TACTILE SENSORS
Tzu-Yi Hsu1, Chieh-Cheng Wang1, Padmanabh P. Pancham1,
Wen-Hsin Chiu1, Daisuke Yamane2, and Cheng-Yao Lo1
1
National Tsing Hua University, TAIWAN and
2
Ritsumeikan University, JAPANTUESDAY - Physical Sensors and Microsystems

T4P.067

4.51 MILLION QUALITY FACTOR IN MICRO HEMISPHERICALRESONATOR FABRICATED FROM LASER ABLATION
AND WELDING
Weiyu Zhu, Yan shi, Xiang Xi, Kun Lu, Zhanqiang Hou,
Dingbang Xiao and Xuezhong Wu
National University of Defense Technology, CHINA

T4P.068

A BIODEGRADABLE STACKED-INDUCTORS LC SENSOR FOR
INTERNAL BODY TEMPERATURE MONITORING
Li-Feng Wang, Jing-Jing Lu, Lei Dong, Qing-An Huang,
and ZhenXiang YiSoutheast University, CHINA

T4P.069

A MEMS RESONANT PRESSURE SENSOR BASED ON CAVITY-SOI
Han Xue1,2, Jiahui Yao1,2, Chao Cheng1,2, Zongze Yu1,2, Yulan Lu1,Bo Xie1,2, Junbo Wang1,2, Deyong Chen1,2, and Jian Chen1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

T4P.070

A SELF-ADAPTIVE PHASE DIFFERENCE MEASUREMENT SYSTEMFOR MEMS RESONANT ACCELEROMETER
Liangbo Ma1,2, Xingyin Xiong1, Zheng Wang1, Kunfeng Wang1,2,
Zhaoyang Zhai1,2, and Xudong Zou1,21Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

77

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T4P.071

AI-ENABLED E-SKIN WITH HIGH-ACCURACY MATERIAL
AND TEXTURE RECOGNITION VIA STICK-SLIP AND
CONTACT ELECTRIFICATION
Jiahao Yu1, Jiyuan Zhang1, Aocheng Bao1, Jin Wu2, Bowen Ji1,
Honglong Chang1, Weizheng Yuan1, and Kai Tao1
1
Northwestern Polytechnical University, CHINA and2
Sun Yat-sen University, CHINA

T4P.072

A STRUCTURE-OPTIMIZED ACOUSTIC PARTICLE VELOCITYSENSOR WITH IMPROVED SENSITIVITY AND SELF-NOISE
Wangnan Chen, Zhezheng Zhu, Xu Ma, Lingmeng Yang, Lihao Ma,
Wenhua Xu, Chengchen Gao, Yilong Hao, and Zhenchuan Yang
Peking University, CHINA

T4P.073

EVERYTHING AT ONCE-LINEARIZING SYSTEM RESPONSE
AND ENHANCING SENSITIVITY IN PHOTOACOUSTIC GASSENSORS BY DEDICATED DEMODULATION AND FILTERTUNING METHODS
Simon Essing1, David Tumpold2, Guillaume Dumas2,
Andrey Kravchenko3, Mohammadamir Ghaderi2,
and Gabriele Schrag1
1
Technical University of Munich, GERMANY, 2Infineon Technologies
AG, GERMANY, and 3Infineon Technologies Dresden GmbH, GERMANY

T4P.074

FLEXIBLE CENTRALIZED TRI-AXIS FORCE SENSOR BASEDON CAPACITANCE AND INTRINSIC RESISTANCE OF
BUMP STRUCTURE
Jie Jin, Yancheng Wang, and Deqing Mei
Zhejiang University, CHINA

T4P.075

FPGA-BASED ASYNCHRONOUS SPIKE PERCEPTRON FOR TINY
MEMS TACTILE SENSORS
Masanori Aoki1, Tatsuya Saito1, Mitsuhito Ando1, Masayuki Sohgawa2,
Tomonori Izumi1, Junichi Akita3, and Haruo Noma1
1
Ritsumeikan University, JAPAN, 2Niigata University, JAPAN, and3Kanazawa University, JAPANT4P.076

HIGH-SENSITIVE SLIP SENSOR FEATURING HIGH ASPECTRATIO MICROWALLS AND ITS MEASURING PRINCIPLE
USING CONVOLUTIONAL NEURAL NETWORKS
Motoki Ohashi, Shoki Kotani, Yusuke Tanaka, Masato Suzuki,
Tomokazu Takahashi, and Seiji Aoyagi
Kansai University, JAPANT4P.077

HUMAN ACTIVITY RECOGNITION USING INTELLIGENT RESONANT
ACCELEROMETER EMPLOYING MEMS RESERVOIR COMPUTING
Takahiro Mizumoto, Amit Banerjee, Jun Hirotani,
and Toshiyuki Tsuchiya
Kyoto University, JAPANT4P.078

MICRO-SENSORS WITH GIANT MAGNETOELECTRICAL
COEFFICIENTKeLi Zhao, Peng Pang, Zhonggang Zhang, Guangyao Pei,
Yunzhe Liu, Tao Zhang, Xingxu Zhang, Jian Luo, and Binghe Ma
Northwestern Polytechnical University, CHINA

78

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T4P.079

MICROSCOPIC BLOOD VISCOSITY MEASUREMENT USING
OPTICAL FIBER TWEEZERS IMAGING SYSTEM
Wei-Yu Chen, Ching-Jung Hung, and Cheng-Yang Liu
National Yang Ming Chiao Tung University, TAIWAN

T4P.080

MONOLITHIC INTEGRATION OF GAS, HUMIDITY,ACCELERATION, MICROPHONE, TEMPERATURE
AND PRESSURE COMPOSITE MICROCHIP
Xiaohui Li1,2, Xiawei Yue1,2, Pingping Zhang3, Heng Yang1,
Tiger H. Tao1,2,4,5,6, and Nan Qin1,2
1Chinese Academy of Sciences (CAS), CHINA, 2University of Chinese
Academy of Sciences, CHINA, 3Suzhou Huiwen Nanotechnology Co.,
Ltd, CHINA, 4Neuroxess Co., Ltd. (Jiangxi), CHINA, 5Guangdong Instituteof Intelligence Science and Technology, CHINA, and 6Tianqiao andChrissy Chen Institute for Translational Research, CHINA

T4P.081

MULTI-MODE PIEZOELECTRIC MICROMACHINED TRANDUCERS
FOR MULTI-CHANNEL ACOUSTIC POWER TRANSFER AND
DATA TELEMETRY
Teng Zhang and Ashwin A. Seshia
University of Cambridge, UK

T4P.082

NEAR ZERO-POWER ENVIRONMENT TEMPERATURE
MICROMECHANICAL SENSOR-SWITCH ENABLED
BY SUB-MICRON GAP
Duan Jian Goh1, Yul Koh1, Sagnik Ghosh1, Jaibir Sharma1,
Yong Shun Teo1, Amit Lal2, and Joshua E.Y. Lee1
1
Agency of Science Technology and Research (A*STAR), SINGAPORE
and 2Cornell University, USA

T4P.083

ON-LINE LASER POWER MEASUREMENT BASED ON
MICROFABRICATED SENSOR DEVICE
Yuqiang Hu1,2,3, Fei Xie2,4, Qihui Liu2,4, Nan Wang2,4, Jin Zhang2,
Yichen Liu2, Yongquan Su1,2,3, Lihao Wang2,4, Hao Chen2,4,
and Zhenyu Wu1,2,3,4
1
Shanghai University, CHINA, 2Chinese Academy of Sciences (CAS),CHINA, 3Shanghai Industrial μTechnology Research Institute, CHINA,
and 4University of Chinese Academy of Sciences, CHINA

T4P.084

PIEZOELECTRIC MEMS ACOUSTIC EMISSION SENSOR MODULE
WITH A BUILT-IN PREAMPLIFIER
Yongfang Li, Yuki Ueda, Takashi Usui, and Kazuo Watabe
Toshiba Corporation, JAPANT4P.085

SAW PRESSURE SENSOR ON LITHIUM NIOBATE USING A
TRANFER OF SEPERATELY FABRICATED CAVITIES
Sagun Shekhar, Ebinesh Abraham, and Prosenjit Sen
Indian Institute of Science, INDIA

T4P.086

STIFFNESS IMBALANCE ERRORS TRIMMING FOR SILICON
MEMS TUNING-FORK GYROSCOPES WITH LOW COSTPICOSECOND LASERS
Yuxian Liu, Qiancheng Zhao, Dacheng Zhang, and Jian Cui
Peking University, CHINA

79

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T4P.087

ULTRA-SENSITIVE PIEZORESISTIVE STRAIN SENSORUTILISING LATERAL PHOTOVOLTAIC EFFECT IN
3C-SIC/SI HETEROJUNCTION
Tuan-Hung Nguyen1, Cong Thanh Nguyen1, Dang D.H. Tran1,
Trung-Hieu Vu1, Dinh Gia Ninh1, Toan Dinh2, Van T. Dau1,
and Dzung V. Dao1
1
Griffith University, AUSTRALIA and 2University of Southern
Queensland, AUSTRALIAWEDNESDAY - Physical Sensors and Microsystems

W4P.066

3D ANISOTROPIC TACTILE SENSORS FOR NORMAL AND
SHEAR FORCE DISCRIMINATION
Kai-Ming Hu, Yi-Hang Xin, Xin-Lu Deng, Zhi-Qi Dong,
Jing-Lin Ye, and Wen-Ming Zhang
Shanghai Jiao Tong University (SJTU), CHINA

W4P.067

A FLEXIBLE, EMBROIDERED STRAIN SENSOR FOR USE
WITH TEXTILES
Yoshiki Kondo, Satoko Honda, and Kuniharu Takei
Osaka Metropolitan University, JAPANW4P.068

A HIGHLY SENSITIVE ELECTROMECHANICAL SMALL
CURRENT AMMETER
Xuecui Zou, Usman Yaqoob, Khaled Salama,and Hossein Fariborzi
King Abdullah University of Science and Technology(KAUST), SAUDI ARABIA

W4P.069

A NOVEL WALL-SHEAR STRESS SENSOR WITH A COVERINGFLOATING ELEMENT FOR HARSH ENVIRONMENTS
Yunzhe Liu, Guanghui Ding, Tao Zhang, Peng Pang, Keli Zhao,
Guangyao Pei, Jian Luo, and Binghe Ma
Northwestern Polytechnical University, CHINA

W4P.070

A SINGLE-INPUT SINGLE-OUTPUT SENSING SCHEME
FOR MULTIPLE TRACES VIA HIGH-ORDER NONLINEAR
MODE LOCALIZATION
Wei Zhang, Jiajia Xiang, Na Ling, Jiayang Chen, Lijia Zhang,
Cao Xia, Yuanlin Xia, and Zhuqing Wang
Sichuan University, CHINA

W4P.071

A SELF-POWERED TACTILE SENSING INTERFACE FOR
HUMAN-MACHINE INTERACTION
Yuyang Sun, Hanyang Li, Kaiyao Wang, Xiaowei Feng,
Cheng Hou, Tao Chen, and Huicong Liu
Soochow University, CHINA

W4P.072

AN ULTRA-SENSITIVE HYDROGEL TACTILE SENSOR WITH
MICRO-CONE STRUCTURES FOR HUMAN–MACHINE INTERFACE
Aocheng Bao1, Jiahao Yu1, Jiyuan Zhang1, Jin Wu2, Bowen Ji1,
Honglong Chang1, Weizheng Yuan1, and Kai Tao1
1
Northwestern Polytechnical University, CHINA and2
Sun Yat-sen University, CHINA

80

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W4P.073

BY VARYING THE DISTANCE OF NI FLUX-GUIDE FOR
OUT-OF-PLANE MAGNETIC FIELD SENSITIVITY
ENHANCEMENT OF AMR SENSOR
Shihwei Lin, Meifeng Lai, and Weileun Fang
National Tsing Hua University, TAIWAN

W4P.074

DESIGN AND VALIDATION OF THE FIRST Z-AXIS MEMSACCELEROMETER WITH IN-PLANE READOUT
Gabriele Gattere1, Valentina Zega2, Manuel Riani1,
Francesco Rizzini1, and Federico Maspero2
1
STMicroelectronics, ITALY and 2Politecnico di Milano, ITALY

W4P.075

DEVELOPMENT OF THE NASA MINI/MEMS TRI-AXISSENSOR SYSTEM
Kenneth G. Toro1 and Jonathon D. Ponder2
1
NASA Langley Research Center, USA and2
NASA Glenn Research Center, USA

W4P.076

ENHANCING LOW-FREQUENCY ACCELERATION RESOLUTION
OF RESONANT ACCELEROMETERS BY MANIPULATING THE
BIAS VOLTAGE NOISE
Kunfeng Wang1,2, Zheng Wang1, Liangbo Ma1,2,
Zhaoyang Zhai1,2, and Xudong Zou1,21Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

W4P.077

LARGE VERTICAL PIEZO-OPTOELECTRONIC EFFECT
IN SIC/SI HETEROSTRUCTURE
Cong Thanh Nguyen, Gia-Ninh Dinh, Tuan-Hung Nguyen,
Trung-Hieu Vu, Dang D.H. Tran, Emily Lakis, Braiden Tong,
Nam-Trung Nguyen, Van Thanh Dau, and Dzung Viet Dao
Griffith University, AUSTRALIA

W4P.078

MICROSTRUCTURE-ENHANCED VISION-BASED TACTILE SENSOR
Mayue Shi, Yongqi Zhang, Xiaotong Guo, and Eric M. Yeatman
Imperial College London, UK

W4P.079

ONE STEP FABRICATION OF TRIAXIAL FORCE PLATE USING
A FDM 3D PRINTER
Yukitake Nakahara and Hidetoshi Takahashi
Keio University, JAPANW4P.080QUALITY FACTOR MODULATION IN MEMS RESONATORS BY
ELASTIC WAVE INTERFERENCE IN THE ANCHOR REGION
Daniel Platz, Marco Stixenberger, Andre Gesing, Ioan Igant,Hendrik Kähler, and Ulrich Schmid
TU Wien, AUSTRIA

W4P.081

SELF-HEALING METAL INTERCONNECT USING SILICONE OILDISPERSED WITH COPPER NANOPARTICLESAkane Umeda, Naoki Suetsugu, Wakana Akema, and Eiji Iwase
Waseda University, JAPANW4P.082

SELF-OSCILLATING CALORIMETER BASED ON
THERMAL-PIEZORESISTIVE RESONATOR
Aojie Quan1, Hemin Zhang2, Chengxin Li1,
Chen Wang1, Xinyu Wu1, and Michael Kraft1
1
KU Leuven, BELGIUM and 2Northwestern Polytechnical
University, CHINA

81

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W4P.083TENSION-INDUCED MOEMS GRAPHENE RESONANT
PRESSURE SENSOR
Yujian Liu1, Cheng Li1,2, Zhengwei Wu3, Shangchun Fan2,
Zhen Wan1, and Song Han4
1
Beihang University, CHINA, 2Shenzhen Institute of Beihang
University, CHINA, 3Chinese Academy of Sciences (CAS), CHINA,
and 4Southern University of Science and Technology, CHINA

W4P.084

UNCERTAINTY QUANTIFICATION OF MEMS DEVICES WITH
HIGH-DIMENSIONAL CORRELATED PROCESS VARIATIONS
Lin-Feng Zhao, Zai-Fa Zhou, and Qing-An Huang
Southeast University, CHINA

W4P.085

UNCLOSED HEXAGONAL PIEZOELECTRIC MEMS HYDROPHONE
BASED ON RIGID-FLEXIBLE COMPOSITE MEMBRANE
Zhiyong Hu, Qi Wang, Qingda Xu, Tao Ruan,
Bin Yang, and Jingquan Liu
Shanghai Jiao Tong University (SJTU), CHINA
MONDAY - RF MEMS, Resonators and Oscillators

M4P.088

FULLY IMPEDANCE-MATCHED HIGH-OVERTONE BULK ACOUSTICWAVE RESONATORS USING 2DEG ELECTRODES
Jingjie Cheng, Jiahao Wu, Yan Qiao, Penghui Song,
Wenming Zhang, and Lei Shao
Shanghai Jiao Tong University (SJTU), CHINA

M4P.089

HIGH QUALITY FACTOR ALSCN LAMB WAVE RESONATORS USING
NBN/AL TOP ELECTRODES AT CRYOGENIC TEMPERATURE
Zhifang Luo1,2,3,5, Shuai Shao1,2,3, Peng Dong1, Haowen Guo1,4,
Xinbo Zou1,4, Jun Li1, Chengkuo Lee5, and Tao Wu1,2,3,4
1
ShanghaiTech University, CHINA, 2Chinese Academy of Sciences (CAS),CHINA, 3University of Chinese Academy of Sciences, CHINA, 4Shanghai
Engineering Research Center of Energy Efficient and Custom AI IC,CHINA, and 5National University of Singapore, SINGAPORE

M4P.090

INVESTIGATION OF QUALITY FACTOR VARIATION BASED ON
TAILORED MODE SHAPE ENGINEERING FOR PIEZOELECTRIC
CONTOUR MODE RESONATORS
Wei Lin and Sheng-Shian Li
National Tsing Hua University, TAIWAN

M4P.091

STRESS INDUCED GAP CLOSING ELECTRODES FOR SILICONRESONATORS ENABLING LOW BIAS VOLTAGE AND
EQUIVALENT RESISTANCE
Hao Yu1,2, Ke Sun1, Chaoyue Zheng1,2, Fang Wang1,2,Heng Yang1,2, and Xinxin Li1,2
1
Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINATUESDAY - RF MEMS, Resonators and Oscillators

T4P.088

ALUMINUM SCANDIUM NITRIDE LAMB WAVE ACOUSTIC DELAY
LINES WITH OVER 6% FRACTIOINAL BANDWIDTH
Zhifang Luo1,2,3,5, Shuai Shao1,2,3, Chengkuo Lee5, and Tao Wu1,2,3,4
1
ShanghaiTech University, CHINA, 2Chinese Academy of Sciences (CAS),CHINA, 3University of Chinese Academy of Sciences, CHINA, 4Shanghai
Engineering Research Center of Energy Efficient and Custom AI IC,CHINA, and 5National University of Singapore, SINGAPORE

82

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T4P.089

AN 18GZ ALSCN FILM BULK ACOUSTIC WAVE RESONATORWITH EPITAXIAL METAL ELECTRODES
Mingyo Park, Jialin Wang, and Azadeh Ansari
Georgia Institute of Technology, USA

T4P.090

PARAMETRIC IMPEDANCE MODULATION IN DEPLETION LAYER
TRANSDUCED MICROMECHANICAL RESONATOR
Satish K. Verma and Bhaskar Mitra
Indian Institute of Technology Delhi, INDIA

T4P.091

SHEAR BULK MODE RESONATOR WITH HIGH
ELECTROMECHANICAL COUPLING USING
X-CUT LITHIUM NIOBATE THIN FILM FOR
WIDE BAND RF APPLICATIONS
Seniz E. Kucuk Eroglu, Soumya Yandrapalli,
Victor Plessky, and Luis Guillermo Villanueva
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND

T4P.092

TEMPERATURE-COMPENSATED PURE SILICON CANTILEVERRESONATOR WITH COUPLED TORSIONAL STRUCTURE
AT ANCHOR
Shunsuke Yamada and Shuji Tanaka
Tohoku University, JAPANWEDNESDAY - RF MEMS, Resonators and Oscillators

W4P.086

A MECHANICALLY COUPLED PIEZOELECTRIC MEMS FILTERBASED ON SUPPORT TRANSDUCER TOPOLOGY
Ken-Wei Tang1, Anurag Zope1, Zhong-Wei Lin1,
Gayathri Pillai2, and Sheng-Shian Li1
1
National Tsing Hua University, TAIWAN and2
Indian Institute of Science, INDIA

W4P.087

A PIEZOELECTRIC WIDTH-FLEXURAL MODE MEMS RESONATORWITH HIGH QUALITY FACTOR AND LOW MOTIONAL RESISTANCE
Yuhao Xiao1, Wen Chen1, Jinzhao Han1, Kewen Zhu1,
and Guoqiang Wu1,2
1
Wuhan University, CHINA and 2Hubei Yangtze Memory
Laboratories, CHINA

W4P.088

A THERMO-PIEZORESISTIVE RESONATOR WITH F-Q PRODUCTS
OVER 4.5E14
Chaowei Si1, Yongmei Zhao1,2, Guowei Han1, Jin Ning1,2,
Xiaodong Wang1,2, and Fuhua Yang1,21Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

W4P.089

GRAPHENE OXIDE INTEGRATED SURFACE ACOUSTICWAVE HUMIDITY SENSOR WITH SIMULTANEOUS
MULTI-FREQUENCY OPERATIONIl Ryu Jang1, Soon In Jung1, Chaehyun Ryu1, Jaeonhyung Park1,
Aneeta Padhan1, Jaesok Yu1, Hohyun Keum2, and Hoe Joon Kim1
1
Daegu Gyeongbuk Institute of Science and Technology (DGIST),KOREA and 2Korea Institute of Industrial Technology (KITECH), KOREA

83

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W4P.090

NON-LINEARITY CORRECTIONS OF TAPERED BAW TRANSDUCERS
FOR ACCURATE FFT COMPUTATION USING ULTRASONICWAVEFRONT COMPUTING
Zaifeng Yang1, Xing Haw Marvin Tan1, Daniel Ssu-Han Chen1,
Bui Viet Phuong1, Kevin Tshun Chuan Chai1, Ching Eng Png1,
and Amit Lal2
1
Agency of Science Technology and Research (A*STAR),SINGAPORE and 2Cornell University, USA

MONDAY - Wearable and In-Vivo Medical Devices and Microsystems
M4P.092

A FLEXIBLE LC-TYPE PASSIVE WIRELESS PRESSURE SENSOR
FOR ATMOSPHERIC PRESSURE DETECTION
Yifei Pan1, Xilin Qian1, Bowen Tian1, Boshuai Sheng1, Haonan Yang1,
Zhe Wu1, Zefang Chen1, Jiacheng Tu1, Chengxi Guo1, Huiyang Yu1,
and Jianqiu Huang2
1
Nanjing Tech University, CHINA and 2Southeast University, CHINA

M4P.093

A UNIVERSAL CAVITY-BASED FORCE SENSOR WITH
RECONFIGURABLE PERFORMANCE FOR INTEGRATIONWITH THIN FILM DEVICES
Zehua Xiang, Haobin Wang, Ji Wan, Chen Xu, Pengcheng Zhao,
Mengdi Han, and Haixia Zhang
Peking University, CHINA

M4P.094

A WIRELESS BACKSCATTER, BLUETOOTH LOW ENERGY(BLE)-COMPATIBLE BIOSIGNAL ACQUISITION SYSTEMFOR INTEGRATED BIOELECTRONICS
Yashwanth Vyza, James D. Rosenthal, Alix Trouillet,
Ivan Furfaro, and Stéphanie P. Lacour
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND

M4P.095

A WIRELESS HEADSET BIOSENSOR MEASURING VOLATILECHEMICALS EMITTED FROM THE AURIS EXTERNA FOR
MONITORING METABOLISMS
Kenta Iitani1, Huang Di1, Geng Zhang1, Koji Toma2,
Takahiro Arakawa3, and Kohji Mitsubayashi1
1Tokyo Medical and Dental University, JAPAN, 2Shibaura Institute ofTechnology, JAPAN, and 3Tokyo University of Technology, JAPAN

M4P.096

AN IMPLANTABLE PASSIVE WIRELESS TEMPERATURE SENSOR
FOR MULTI-NODE MONITORING OF ARTIFICIAL KNEE JOINTS
Zi-Ang Qi, Lei Dong, Qing-An Huang, Lei Han, and Meng Nie
Southeast University, CHINA

M4P.097

IMPLANTABLE BIOSENSOR FOR CONTINUOUS SEROTONIN
DETECTION IN FREELY MOVING CRAYFISH
Jinjing Han, Tawen Ho, Justin M. Stine, Michael A. Straker,
Jens Herberholz, and Reza Ghodssi
University of Maryland, USA

TUESDAY - Wearable and In-Vivo Medical Devices and Microsystems
T4P.093

A TETRAPOLAR BIOIMPEDANCE SENSOR-INTEGRATEDCAPSULE TOWARD TARGETED REAL-TIME MONITORINGOF INTESTINAL TISSUES
Brian M. Holt, Justin M. Stine, Luke A. Beardslee, and Reza Ghodssi
University of Maryland, USA

84

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T4P.094

A WEARABLE TRIPLE-SPIRAL SENSOR FOR IN-SITU REAL TIME
SWEAT ANALYSIS BASED ON LASER INDUCED GRAPHENE
Yaozheng Wang, Haobin Wang, Zehua Xiang, Pengchen Zhao,
Yexing Fang, Ji Wan, Chen Xu, and Haixia Zhang
Peking University, CHINA

T4P.095

CALIBRATION METHOD FOR WEARABLE SENSOR USING
AIRFLOW AT MOUTH FOR QUANTITATIVE MONITORING
OF RESPIRATION AND HEARTBEAT
Kenta Horie1, Muhammad Salman Al Farisi1, Yoshihiro Hasegawa1,
Miyoko Matsushima2, Tsutomu Kawabe2, and Mitsuhiro Shikida1
1
Hiroshima City University, JAPAN and 2Nagoya University, JAPANT4P.096CANTILEVER ACTUATOR MODULE FOR ON-COMMAND DRUG
DEPLOYMENT FROM INGESTIBLE CAPSULES
Joshua A. Levy, Michael A. Straker, Luke A. Beardslee,
and Reza Ghodssi
University of Maryland, USA

T4P.097

DEVELOPMENT OF FLEX-TO-RIGID CAPACITIVE MICROMACHINEDULTRASOUND TRANSDUCER (CMUT) WITH BENDING MODULATION
Sang-Mok Lee, Taemin Lee, Chaerin Oh, and Hyunjoo J. Lee
Korea Advanced Institute of Science and Technology (KAIST), KOREA

T4P.098

SEROPILL: NOVEL MINIMALLY INVASIVE INGESTIBLE CAPSULEFOR SEROTONIN SENSING IN THE GI TRACT
Michael A. Straker, Joshua A. Levy, Justin M. Stine, Jinjing Han,
Luke A. Beardslee, and Reza Ghodssi
University of Maryland, USA

T4P.099

SIMULTANEOUS AIRFLOW AND PRESSURE MEASUREMENTS
BASED ON PITOT TUBE FOR EVALUATION OF EXPIRED AIR
INSIDE LUNG AIRWAY
Aoi Miyawaki1, Muhammad Salman Al Farisi1, Yoshihiro Hasegawa1,
Miyoko Matsushima2, Tsutomu Kawabe2, and Mitsuhiro Shikida1
1
Hiroshima City University, JAPAN and 2Nagoya University, JAPANWEDNESDAY - Wearable and In-Vivo Medical Devices and Microsystems
W4P.091

HIGH-DENSITY ULTRA-FLEXIBLE NEURAL PROBE FOR
MONITORING ELECTROPHYSIOLOGICAL SIGNALS OF
FREE-MOVING MICE WITH EPILEPSY
Han Wang1,2, Qian Cheng1,2, Cunkai Zhou1,3, Ye Tian1,2,
Chengjian Xu1,8, Xiaoling Wei1,2, Zhitao Zhou1,2,
Tiger H. Tao1,2,4,5,6,7, and Liuyang Sun1,2
1Chinese Academy of Sciences (CAS), CHINA, 2University ofChinese Academy of Sciences, CHINA, 3Shanghai University
of Electric Power, CHINA, 4ShanghaiTech University, CHINA,
5
Neuroxess Co., Ltd. (Jiangxi), CHINA, 6Guangdong Instituteof Intelligence Science and Technology, CHINA, 7Tianqiao
and Chrissy Chen Institute for Translational Research, CHINA,and 8University of Science and Technology of China, CHINA

85

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W4P.092

IMPLANTABLE IN-VIVO PH IMAGE SENSOR WITH INTEGRATEDREFERENCE ELECTRODE FOR BIOLOGICAL EXPERIMENTS
ON AWAKE MOUSE
Mai Madokoro1, Yuto Nakamura1, Hiroshi Horiuchi2,
Tomoko Kobayashi2, Junko Ishida2, Tomoko Horio1,
Yasuyuki Kimura1, Takeshi Hizawa1, Daisuke Akai1,
Hideo Doi1, Yong-Joon Choi1, Kazuhiro Takahashi1,
Toshihiko Noda1, Junichi Nabekura2, and Kazuaki Sawada1
1
Toyohashi University of Technology, JAPAN and
2
National Institute for Physiological Sciences, JAPANW4P.093

MAGNETOELECTRIC NANOPARTICLE BASED WEARABLE ENERGYHARVESTER FOR POWERING BIO-MEDICAL DEVICES
Nandan Murali1, Dibyajyoti Mukherjee1, G Vijay Malhaar2,
Dhiman Mallick1, and Soutik Betal1
1
Indian Institute of Technology Delhi, INDIA and2
Birla Institute of Technology and Science-Pilani (BITS–Pilani), INDIA

W4P.094

MULTIFUNCTIONAL NEURAL PROBE FOR SYNCHRONIZEDSTIMULATION AND MONITORING MULTIPLE SIGNALS
Jiawei Cao, Longchun Wang, Zhejun Guo, Zhuo Wang,
Kejun Tu, Qingda Xu, Mengfei Xu, Junyu Xiao,
Bin Yang, and Jingquan Liu
Shanghai Jiao Tong University (SJTU), CHINA

W4P.095

STRETCHABLE HYBRID ELECTRONICS BASED ON AUXETICSTRUCTURES
Daniel Zymelka, Toshihiro Takeshita, Yusuke Takei,
and Takeshi Kobayashi
National Institute of Advanced Industrial Science andTechnology (AIST), JAPANW4P.096UTILIZING ORIGAMI INTEGRATED PIEZOELECTRIC FOIL
ACOUSTIC EMISSION AND ACCELERATION SENSORFUSED WITH OMNIDIRECTIONAL MOTION DETECTORFOR KNEE JOINT HEALTH MONITORING
Cheng-Da Lin and Guo-Hua Feng
National Tsing Hua University, TAIWAN

W4P.097

WIRELESS URINE MONITORING FOR DIAPERS WITH PASSIVE
ANNTENA USING SPLIT RING METAMATERIAL
Ashitaka Kurita1, Gaku Furusawa1, Hiroaki Onoe2, and Tetsuo Kan1
1
University of Electro-Communications, JAPAN and
2
Keio University, JAPAN86

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MONDAY - Late News
M4P.098

A 0.6 METER LONG LARGE-AREA FLEXIBLE PRESSURE SENSORSWITH OUTSTANDING UNIFORMITY AND THERMOSTABILITY
Shoulu Gong, Ding Zhe Gan, Xinlu Deng,
Wenming Zhang, and Lei Shao
Shanghai Jiao Tong University, CHINA

M4P.099

A MICROFLUIDIC PLATFORM FOR ENHANCED LABELLINGAND DETECTION OF EXTRACELLULAR VESICLESShi Hu, Rui Hao, Zitong Yu, Huitao Zhang, Qisang Zuo, and Hui Yang
Chinese Academy of Sciences (CAS), CHINA

M4P.100

A PLASMONIC-PHOTONIC HYBRID FIBER-OPTIC SENSOR
FOR TUMOR MARKER DETECTION AND
HETEROGENEITY CHARACTERIZING
Nanxi Wang1,2, Xin Li1,2, Yimin Shi1,2, Fei Wang1,2, Lina Zhang3,
Mingxiao Li1, Hongyao Liu1, Yang Zhao1, Lingqian Zhang1,
and Chengjun Huang1,21Chinese Academy of Sciences, CHINA, 2University of Chinese
Academy of Sciences, CHINA, and 3Beijing Chest Hospital,
Capital Medical University, CHINA

M4P.101

A STUDY OF FERROELECTRIC POLARIZATION SWITCHING AND
NEGATIVE CAPACITANCE EFFECT FOR ENHANCED ENERGYSTORAGE IN ON-CHIP ELECTROSTATIC SUPERCAPACITORS
Sadegh Kamaei, Michele Ghini, Ali Gilani,
Carlotta Gastaldi, and Adrian M. Ionescu
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND

M4P.102

ACTIVE CONTROL OF VIBRATION-INDUCED FLOW USING A
PNEUMATICALLY DRIVEN MICROBALLOON DEVICE
Taku Sato, Kanji Kaneko, Takeshi Hayakawa, and Hiroaki Suzuki
Chuo University, JAPANM4P.103

BEOL COMPATIBLE (< 400 °C) NOVEL CROSS-POINT RRAM
BASED RESISTIVE HYDROGEN SENSOR FOR DOWNSTREAM
HYDROGEN USE
Subhranu Samanta, Zhixian Chen, Doris K.T. Ng, Weiguo Chen,
Linfang Xu, Fuu Ming Kai, and Yao Zhu
Agency for Science, Technology and Research (A*STAR), SINGAPORE

M4P.104

CRYSTALLIZATION OF DNA-FUNCTIONALIZED NANOPARTICLE
IN GIANT UNILAMELLAR VESICLES
Ryuta Tetsuya1, Naotomo Tottori1, Azusa Takao1,
Maasa Yokomori1, Miho Tagawa2, Shigeo S. Sugano3,
Shinya Sakuma1, and Yoko Yamanishi1
1
Kyushu University, JAPAN, 2Nagoya University, JAPAN, and3
National Institute of Advanced Industrial Science andTechnology (AIST), JAPANM4P.105

EFFECT OF VAN DER WAALS FORCES ON DYNAMIC PROPERTIESOF GRAPHENE-BASED NEMS RESONATORS
Zhi-Qi Dong, Kai-Ming Hu, Xin-Lu Deng, Yi-Hang Xin,
You-Lang He, and Jing-Lin Ye
Shanghai Jiao Tong University, CHINA

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M4P.106

EVALUATION METHOD OF OUT-OF-PLANE DEFORMATIONON KIRIGAMI STRUCTURE WITH REPETITIVE SLITPATTERNS ON CONCENTRIC CIRCLES
Miyako Mizuna and Eiji Iwase
Waseda University, JAPANM4P.107

FABRICATION OF A MOVING-COIL-TYPE PDMS-BASEDMEMBRANE ELECTROMAGNETIC MICRO-ACTUATOR
BY DOUBLE-SIDED SCREEN PRINTING TECHNOLOGY
Chao Qi, Naohiro Sugita, and Tadahiko Shinshi
Tokyo Institute of Technology, JAPANM4P.108

FLEXIBLE THERMOPILE-TYPE WARMTH SENSOR
Minoru Sasaki1, Yoshiyuki Hata2, and Yae Ito1
1
Toyota Technological Institute, JAPAN and 2Meijo University, JAPANM4P.109

HIGH CRYSTALLINE QUALITY A-AXIS ORIENTED AL0.56SC0.44N
FILMS FOR HIGH COUPLING SAW APPLICATIONS
Weipeng Xuan1, Weilun Xie1, Xiwei Huang1, Xingli He2, Zhen Cao3,
Hao Jin3, Shurong Dong3, and Jikui Luo3
1
Hangzhou Dianzi Univerisity, CHINA, 2Soochow University, CHINA and3
Zhejiang University, CHINA

M4P.110

HIGH-THROUGHPUT SPERM SORTING MICROFLUIDIC DEVICE
FOR LIVESTOCK’S SPERM MOTILITY ENHENCEMENT
Nian-Je Wu1, Hsien-Chih Peng1, I-Jui Chen1,
Ren-Guei Wu1, and Fan-Gang Tseng1,21National Tsing Hua University, TAIWAN and
2
Academia Sinica, TAIWAN

M4P.111IMAGING RESONANT MEMS WITH ULTRA-BROAD SPECTRALVIBROMETRY FROM 1000 HZ TO 10 GHZ
Zhao-Liang Peng, Jing-Jie Cheng, Jia-Hao Wu,
Lei Shao, and Wen-Ming Zhang
Shanghai Jiao Tong University, CHINA

M4P.112LITHIUM NIOBATE THIN FILM RESONANT INFRARED DETECTOR
Mingye Du1, Kangfu Liu1,2,3, Jiawei Li1, Yuxi Wang1,2,3,
Yushuai Liu1,2,3, Fengyu Liu1, and Tao Wu1,2,3,4
1
ShanghaiTech University, CHINA, 2Chinese Academy of Sciences(CAS), CHINA, 3University of Chinese Academy of Sciences, CHINA,
and 4Shanghai Engineering Research Center of Energy Efficientand Custom AI IC, CHINA

M4P.113

MACHINE LEARNING ASISTED WAFER LEVEL BATCH FABRICATIONOF AN MRI-COMPATIBLE MUNTIFUNCTIONAL NEURAL PROBE
Ziqi Jia, Shuyu Shi, and Yong-Kyu “YK” Yoon
University of Florida, USA

M4P.114

MICROFLUIDIC 3D HEPATIC CULTURES INTEGRATED WITHDROPLET-BASED BIOANALYSIS UNIT FOR MONITORINGGLUCOSE METABOLISM UPON HORMONAL STIMULATIONJose M. de Hoyos-Vega1, Alan M. Gonzalez-Suarez1,
Diana F. Cedillo-Alcantar1, Gulnaz Stybayeva1,
Aleksey Matveyenko1, Harmeet Malhi1,
Jose L. Garcia-Cordero2, and Alexander Revzin1
1
Mayo Clinic, USA and 2Centro de Investigación y de Estudios
Avanzados del IPN, MEXICO

88

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M4P.115

MULTIFUNCTIONAL SENSING AND ACTUATION MINIATURIZEDSYSTEM FOR BLOOD BIOMARKERS ON A BEAD
Udara B. Gunatilake1, Adriana Caballe-Abalos1, Sandra Garcia-Rey1,
Jon Mercader-Ruiz1,2, Lourdes Basabe-Desmonts1,3,
and Fernando Benito-Lopez1
1
University of the Basque Country, SPAIN, 2Arthroscopic Surgery
Unit-UCA, SPAIN, and 3Basque Foundation of Science,
IKERBASQUE, SPAIN

M4P.116

PIEZOELECTRIC MEMS OSCILLATORS BASED ON FLEXURAL MODEMEMBRANE RESONATOR ARRAY FOR RESONANT SENSORSHexu Luo, Menglun Zhang, Yi Gong, Yuan Ning, Xuejiao Chen,
Quanning Li, and Wei Pang
Tianjin University, CHINA

M4P.117

SELF-POWERED INTRUSION DETECTING SYSTEM USINGA SPRAY-PAINT COATING BASED TRIBOELECTRIC
NANOGENERATOR
Jonghyeon Yun and Daewon Kim
Kyung Hee University, KOREA

M4P.118

SIZE-BASED SEPARATION OF E. COLI USINGVISCOELASTIC MICROFLUIDICS
Tianlong Zhang1,2, Ling Liu1, David W. Inglis1, Yoichiroh Hosokawa2,
Yaxiaer Yalikun2, and Ming Li1
1
Macquarie University, AUSTRALIA and 2Nara Institute of
Science and Technology, JAPANM4P.119TEXTURING TO DRAMATICALLY INCREASE THERMALDEFORMATION OF FILM AND APPLYING TO ACTUATOR
Daisuke Yamaguchi, Yuki Takahara, Shuichi Wakimoto,and Takefumi Kanda
Okayama University, JAPANM4P.120

THERMAL RECOVERY OF PALLADIUM NANOWIRE SENSOR
FOR LONG-TERM RELIABLE HYDROGEN GAS DETECTION
Ki-Hoon Kim1, Min-Seung Jo2, Jun-Bo Yoon2, and Min-Ho Seo1
1
Pusan National University, KOREA and 2Korea Advanced Instituteof Science and Technology (KAIST), KOREA

M4P.121

WEARABLE AND HYBRID POWER SOURCES FOR SMARTCONTACT LENSES
Shiqi Wu, Yi Ding, Lunjie Hu, Daniella Gatus,
Wakutaka Nakagawa, and Takeo Miyake
Waseda University, JAPANTUESDAY - Late News

T4P.100

A BIMODAL “SENSOR CHIPLET” PLATFORM APPLIED FOR
ALBUMIN AND PH MULTI-CHEMICAL SENSING
Ryugo Shimamura1, Shun Yasunaga1, Kei Misumi1, Anne-Claire Eiler1,
Akio Higo1, Gilgueng Hwang1,2, Ayako Mizushima1, Dongchen Zhu1,
Kikuo Komori3, Yasuyuki Sakai1, Hiroshi Toshiyoshi1,
Agnès Tixier-Mita1, and Yoshio Mita1
1
University of Tokyo, JAPAN, 2Paris-Saclay University, FRANCE, and3
Kindai University, JAPAN89

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T4P.101

A MOLECULARLY IMPRINTED POLYMER /METHYLENE
BLUE/ANODIC ALUMINUM OXIDE (MIP/MB/AAO)
NANOCOMPOSITE ELECTRODE FOR THE DETECTIONOF ULTRA-LOW CONCENTRATION TROPONIN T IN URINE
Chieh Chen1, Yu-Ting Cheng1, and Hsiao-En Tsai2,31National Yang Ming Chiao Tung University, TAIWAN,
2
National Taiwan University Hospital, TAIWAN, and3
National Taiwan University College of Medicine, TAIWAN

T4P.102

A SMART REAL-TIME HUMAN RESPIRATORY MONITORINGSYSTEM BASED ON A HIGH-PERFORMANCE FLOWSENSOR AND AN ACCURATE BREATHING RATERECOGNITION ALGORITHM
Shiqian Cai, Zhongyi Liu, Gai Yang, Houbo Ding,
Huikai Xie, and Xiaoyi Wang
Beijing Institute of Technology, CHINA

T4P.103

ELECTROCHEMICAL SENSOR FOR INGESTIBLE CAPSULE-BASEDIN-VIVO DETECTION OF HYDROGEN SULFIDE
Justin M. Stine, Katie L. Ruland, Joshua A. Levy,
Luke A. Beardslee, and Reza Ghodssi
University of Maryland, USA

T4P.104

ADEPT - AN EMBEDDED MICROSYSTEMS MULTI-ELECTRODECONTROL PLATFORM FOR VERSATILE μm-PRECISIONPOSITIONAL TRAPPING AND ELECTROROTATION
Lourdes Albina Nirupa Julius, Dora Akgül, Gowri Krishnan,
Henrik Scheidt, Omar Nassar, Sarai M. Torres-Delgado,
Dario Mager, Vlad Badilita, and Jan G. Korvink
Karlsruhe Institute of Technology, GERMANY

T4P.105

BROADBAND POWER GENERATION FROM ARM SWING DURING
WALKING BY REPULSIVE-TORQUE-ENHANCED ROTATIONAL
ELECTRET ENERGY HARVESTER
Tomoya Miyoshi and Yuji Suzuki
University of Tokyo, JAPANT4P.106

DEVELOPMENT OF DIGITAL NANOPLASMONMETRY METHOD
FOR LABEL-FREE DETECTIONS OF SMALL BIOMOLECULES
Ting-Wei Chang, Sheng-Hann Wang, and Pei-Kuen Wei
Academia Sinica, TAIWAN

T4P.107

ELECTRICAL IMPEDANCE SPECTROSCOPY OF SINGLEPARTICLES BY AC NANOPORE METHOD -TOWARD
EVALUATION OF DIELECTRIC PROPERTIES OFSINGLE NANOPARTICLES
Kosuke Hori, Ryusei Kowaka, Maami Sakamoto,and Takatoki Yamamoto
Tokyo Institute of Technology, JAPANT4P.108

EXTREMELY SMALL LIMITING-CURRENT-TYPE OXYGENSENSOR WITH A WIDE RANGE PROPORTIONALITY OF
THE OXYGEN CONCENTRATION
Shunsuke Akasaka1 and Isaku Kanno2
1
ROHM Co. Ltd, JAPAN and 2Kobe University, JAPAN90

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T4P.109

FABRICATION OF MEMS BULK SIC-BASED ACCELEROMETER
AND ITS APPLICATION IN GROUND TEST OF AERO-ENGINE
Yanxin Zhai1,2, Tiantong Xu1,2, Guoqiang Xu1,2, Hengyi Wang1,2,
Xiaoda Cao1,2, and Haiwang Li1,2
1
Beihang University, CHINA and 2National Key Laboratory of Scienceand Technology on Aero Engine Aero-Thermodynamics, CHINA

T4P.110FLUORESCENT POLYMERIC NANO-THERMOMETER FOR 3D
TEMPERATURE DISTRIBUTION AND DYNAMIC MONITORING
OF CHIMERIC TUMOR MICROENVIRONMENT
Ashish Kumar1, Venkanagouda S. Goudar1, Kiran Kaladharan1,
Tuhin Subhra Santra2, and Fan-Gang Tseng1,31National Tsing Hua University, TAIWAN, 2Indian Institute ofTechnology Madras, INDIA, and 3Academia Sinica, TAIWAN

T4P.111

HIGH-PERFORMANCE PIEZOELECTRIC BIOMATERIALS FOR
BIOCOMPATIBLE ENERGY HARVESTERS AND SENSORS
Zhuomin Zhang1,2, Xuemu Li1,2, Zhenqi Wang1, and Zhengbao Yang1,2
1City University of Hong Kong, HONG KONG and
2Hong Kong University of Science and Technology, HONG KONG

T4P.112HIGHLY STRETCHABLE, SUPER-TOUGH AND
ANTI-BACTERIAL DEEP EUTECTIC SOLVENTIONIC GEL FOR HUMAN MOTION SENSING
Jia-Yu Yang and Cheng-Hsin Chuang
National Sun Yat-sen University, TAIWAN

T4P.113IMMUNOGENICITY MONITORING SYSTEM INCORPORATINGMICROFLUIDIC CELL CHIP AND PAPER-BASEDANALYTICAL DEVICE
Kyung Won Lee, Eun Kyeong Yang, and Hyun Chul Yoon
Ajou University, KOREA

T4P.114LOW ELASTIC SPIN TORQUE SENSOR BASED ON ANGULAR
MOMENTUM CONSERVATION LAW
Masaya Toda, Kohei Oka, and Takahito Ono
Tohoku University, JAPANT4P.115

MICRO PLASMA GENE TRANSFECTION SYSTEM FOR
UNIFORM EXPRESSION
Seiya Kato1, Yuto Ando1, Kiichiro Tomoda2,
Mime Kobayashi3, and Shinya Kumagai1
1
Meijo University, JAPAN, 2Gladstone Institutes, USA, and3
Osaka Medical and Pharmaceutical University, JAPANT4P.116

MODE-MATCHED MULTI-RING DISK RESONATOR USING (100)SINGLE CRYSTAL SILICON WITH 2 PPM FREQUENCY MISMATCH
Shihe Wang, Jianlin Chen, Takashiro Tsukamoto, and Shuji Tanaka
Tohoku University, JAPANT4P.117

ON-CHIP DIAMOND MEMS RESONATORS MAGNETICSENSING UP TO 500°C
Zilong Zhang1, Guo Chen1, Guangchao Chen2, Satoshi Koizumi1,
Yasuo Koide1, and Meiyong Liao1
1
National Institute for Materials Science (NIMS), JAPAN and2
University of Chinese Academy of Sciences, CHINA91

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T4P.118

RESIDUAL STRESS ANALYSIS OF THIN FILM MATERIALSFOR FABRICATING SUSPENDED LOW STRESS SI3N4WAVEGUIDES ON SAPPHIRE
Erwin Berenschot, Simen Martinussen, Kai Wang,
Sonia García-Blanco, Niels Tas, and Roald Tiggelaar
University of Twente, NETHERLANDS

T4P.119

SELF-POWERED WIRELESS WIND SPEED SENSOR BASED ON
AN ELECTRET GENERATOR
Junchi Teng, Zeyuan Cao, Zibo Wu, Rong Ding, and Xiongying Ye
Tsinghua University, CHINA

T4P.120

SOLIDLY MOUNTED TWO-DIMENSIONAL GUIDED MODES
IN 30% SCANDIUM ALUMINUM NITRIDE ON SAPPHIRE
Jack Guida, Gabriel Giribaldi, Luca Colombo,
Matteo Rinaldi, and Siddhartha Ghosh
Northeastern University, USA

T4P.121

THE MAXIMUM ELECTROWETTING FORCE ON DROPLETS
Robert M. Hennig1, Vito Cacucciolo2, and Herbert Shea1
1
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND and
2
Politecnico di Bari, ITALY

T4P.122

VIRTUAL PARTICLE VALVE TOWARD GENERATION OF
DOUBLE-CELLS ENCAPSULATED MICRODROPLET
Yuma Kadomura, Naotomo Tottori, Shinya Sakuma,
and Yoko Yamanishi
Kyushu University, JAPANT4P.123

WSE2/SNSE2 HETEROSTRUCTURE TUNNEL FIELD-EFFECT
TRANSISTOR FOR PH SENSING
Xian Wu1,2, Haojie Zhao1,2, and Peng Li1,2
1
Tsinghua University, CHINA and 2Beijing Advanced
Innovation Center for Integrated Circuits, CHINAWEDNESDAY - Late News

W4P.098

A MICROFLUIDIC CHIP TO BOOST SECRETION OF
EXTRACELLULAR VESICLES VIA CELL SQUEEZING
Shi Hu, Rui Hao, Xi Chen, Huitao Zhang, Zitong Yu,
Yi Zhang, Lin Zeng, and Hui Yang
Chinese Academy of Sciences (CAS), CHINA

W4P.099

A MONOLITHIC INTEGRATED MEMS ACOUSTIC DYADIC SENSOR
Lingmeng Yang, Zhezheng Zhu, Wangnan Chen, Xu Ma,
Lihao Ma, Chengchen Gao, Yilong Hao, and Zhenchuan Yang
Peking University, CHINA

W4P.100

A STRETCHABLE RESISTIVE STRAIN SENSOR BASED ON
CRACK PROPAGATION, OPENING AND BLUNTING:
DEVICE AND MECHANICS
Katherine Moody, Shuang Wu, and Yong Zhu
North Carolina State University, USA

92

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W4P.101

A TWO DEGREE-OF-FREEDOM MEMS MIRROR DRIVEN BY
INTERNAL RESONANCE USING PIEZOELECTRIC TRANSDUCERS
Changhao Wang1,2, Jianlin Chen1,2, Nan Wang1,3, and Yuandong Gu1
1
Shanghai University, CHINA, 2State Key Laboratory of Transducer
Technology, CHINA, and 3Shanghai Key Laboratory of Chips andSystems for Intelligent Connected Vehicle, CHINA

W4P.102

ADVANCING INFRARED SENSING WITH HIGH-TCF 30%-DOPEDSCALN RESONATORS AND ALN METAMATERIAL ABSORBERS
Farah ben Ayed, Aurelio Venditti, Gabriel Giribaldi,
Ryan Tetro, Sila Deniz Calisgan, Pietro Simeoni,
Zhenyun Qian, and Matteo Rinaldi
Northeastern University, USA

W4P.103

CRYSTAL ORIENTATION AND SPECIMEN SIZE DEPENDENCES
OF CREEP PROPERTIES OF MICRON-THICK SILICON FOR
3D MICROSTRUCTURED MEMS
Takanori Horikawa, Kazuma Sawada, Akio Uesugi,
Koji Sugano, and Yoshitada Isono
Kobe University, JAPANW4P.104

DUAL-MODE SURFACE LATTICE RESONANCES IN ASYMMETRICOPTICAL METASURFACES FOR REFRACTIVE INDEX SENSING
Liye Li1 and Wengang Wu1,2
1
Peking University, CHINA and 2Beijing Advanced Innovation
Center for Integrated Circuits, CHINA

W4P.105

ENCAPSULATION OF MICRORNAS IN EXOSOMES FOR EFFICIENT
INTRACELLULAR DELIVERY BY A NANOFLUIDIC PLATFORM
Zitong Yu1, Rui Hao1, Sihui Chen2, Huitao Zhang1, Shi Hu1,
Jingyi Ren1, Yanhang Hong1, Bingrun Liu2, Qisang Zuo1,
and Hui Yang1
1
Chinese Academy of Sciences (CAS), CHINA and
2
SomesTech Co., Ltd., CHINA

W4P.106

FABRICATION AND CHARACTERIZATION OF POLYCARBONATE
SUBSTRATES FOR HIGH YIELD ASSEMBLY OF
MULTICOMPONENT BIOHYBRID MICROROBOTS
Taryn Imamura, Utku M. Sonmez, Matthew Travers,
Sarah Bergbreiter, and Rebecca E. Taylor
Carnegie Mellon University, USA

W4P.107

FABRICATION OF STRAIN-INDUCED GRAPHENE RESONANT
MASS SENSOR USING ELASTOMER NANOSHEET FOR
MOLECULAR DETECTION
Motoki Kato1, Ken Arano1, Masato Saito2, Toshinori Fujie2,
Tatsuro Goda3, Yong Joon Choi1, Toshihiko Noda1,
Kazuaki Sawada1, and Kazuhiro Takahashi1
1
Toyohashi University of Technology, JAPAN,
2
Tokyo Institute of Technology, JAPAN, and3
Toyo University, JAPANW4P.108

A NOVEL THERMAL NOISE ACTUATED PRESSURE SENSOR
Yan Qiao1, Alaaeldin Elhady2, Mohamed Arabi3,
Eihab Abdel-Rahman2, and Wen-Ming Zhang1
1
Shanghai Jiao Tong University, CHINA, 2University of Waterloo,
CANADA, and 3Applied Science University, BAHRAIN

93

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W4P.109

HIGH-SENSITIVITY FIBER TIP SENSOR BASED ON DARKPLASMONIC RESONANCE MODE
Fei Wang1,2, Xin Li1,2, Siyuan Wang1,2, Yitao Cao1,2,
Xuqing Sun1,2, Nanxi Wang1,2, Lingqian Zhang1,
Hongyao Liu1, Xinchao Lu1, and Chengjun Huang1,21Chinese Academy of Sciences (CAS), CHINA and2
University of Chinese Academy of Sciences, CHINA

W4P.110HYDROTHERMALLY MODIFIED Pd NANOPARTICLES DECORATED
TiO2 NANOSPHERES FOR VISIBLE LIGHT INDUCED ROOMTEMPERATURE HYDROGEN SENSING
Thilini Thathsara, Christopher J. Harrison,
Rosalie K. Hocking, and Mahnaz Shaﬁei
Swinburne University of Technology, AUSTRALIA

W4P.111

INFLUENCE OF PERMANENT MAGNETIC PROPERTIES ON
MAGNETIC PATTERN TRANSFER FOR MAGNETIC MEMS
Keita Nagai, Naohiro Sugita, and Tadahiko Shinshi
Tokyo Institute of Technology, JAPANW4P.112LOW-POWER CO2 GAS SENSOR BASED ON
ELECTROLYSIS-INDUCED BUBBLESSteven Tran, Seungbeom Noh, and Hanseup Kim
University of Utah, USA

W4P.113

MICROFABRICATED PLATFORM FOR DIRECTIONAL NEURALMICROCIRCUITS IN SILICON-GLASS
Dean de Boer1, Torben W. van Voorst2, Erwin J.W. Berenschot1,
L. Niels Cornelisse2, and Niels R. Tas1
1
University of Twente, NETHERLANDS and
2
Vrije Universiteit Amsterdam, NETHERLANDS

W4P.114

MULTI HEAT-SINK CMOS-BEOL INTEGRATED MEMSPIRANI GAUGE FOR VACUUM DETECTION IN
PACKAGED MICROSENSORSManu Garg1,2, Fang Wei Tsai2, Sushil Kumar1,
Yi Chiu2, and Pushpapraj Singh1
1
Indian Institute of Technology Delhi (IITD), INDIA and2
National Yang Ming Chiao Tung University, TAIWAN

W4P.115

ON-CHIP MAGNETOTHERMAL SYSTEM FOR SINGLE
MICRO-PARTICLE HEATING
Lin Zeng1, Shengyu Wang1, Hongwei Guan2, Qisang Zuo1,
Yi Zhang1, and Hui Yang1
1
Chinese Academy of Sciences (CAS), CHINA and
2
Dalian Maritime University, CHINA

W4P.116

SELF-HEATING GAS SENSOR USING HETEROJUNCTION
NANOWIRE ARRAY FOR HIGH SENSITIVITY AND LOW
POWER CONSUMPTION
Sung-Ho Kim1, Min-Seung Jo1, So-Yoon Park1,
Kwang-Wook Choi1,2, Sang-Hee Kim1,2,
Jae-Young Yoo3, Beom-Jun Kim1,
and Jun-Bo Yoon1
1
Korea Advanced Institute of Science and Technology(KAIST), KOREA, 2Samsung Electronics Co., Ltd, KOREA,
and 3Northwestern University, USA

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TRANS23 TechPROG-WEB.qxp_TRANSDUCERS 6/19/23 11:53 AM Page 95

W4P.117SENSING THE POINT DEFECTS BY SINGLE-CRYSTAL DIAMONDMEMS RESONATORS
Guo Chen1,2, Zilong Zhang1, Liwen Sang1, Yasuo Koide1,
Satoshi Koizumi1, Zhaohui Huang2, and Meiyong Liao1
1
National Institute for Materials Science, JAPAN and
2
China University of Geosciences, CHINA

W4P.118

STEP-AND-REPEAT UV NANOIMPRINT USING PFP GAS FORREALIZING MICRONEEDLE ARRAY WITH JAGGED TIP SHAPE
BIOINSPIRED BY MOSQUITO
Seiji Aoyagi, Hiroki Hamada, Tomokazu Takahashi,
and Masato Suzuki
Kansai University, JAPANW4P.119

THE MICROFLUIDIC MICROWELL ARRAY INTEGRATINGSURFACE ENHANCED RAMAN SCATTERING (SERS)PLATFORM ASSISTED WITH MACHINE LEARNINGFOR BACTERIA STRAIN IDENTIFICATION
Po-Hsuan Chao and Nien-Tsu Huang
National Taiwan University, TAIWAN

W4P.120

VISUALIZATION OF ODOR SOURCE LOCALIZATION REALIZEDBY SERS GAS SENSOR
Lin Chen, Hao Guo, Takuya Matsuo,
Fumihiro Sassa, and Kenshi Hayashi
Kyushu University, JAPAN

京都

三千院

シャクナゲ (Sanzen-in Temple garden in Kyoto)(Image by Route16; AdobeStock).

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