Assembly Type
Square Wave Output
Linear Scale
AT211

User's Manual- Instructions for use Read this document thoroughly before operating
the product. After reading, retain it close at hand for
future reference.

No. 99MBE011A7
Date of publication: January 1, 2021 (1)*99MBE011A7*

 Correspondence of product names and model numbers
Product name
Assembly Type Square Wave Output Linear Scale

Model number
AT211

 Notice regarding this documenty Mitutoyo Corporation assumes no responsibilities for any damage to the product, caused by its use
not conforming to the procedure described in this document.
y Upon loan or transfer of this product, be sure to attach this document to the product.
y In the event of loss or damage to this document, immediately contact a Mitutoyo sales office or
your dealer.
y Before operation of the product, thoroughly read this document to comprehend its contents.
y Particularly, for full understanding of information, carefully read "Safety Precautions" and "Precautions for Use" at the outset of this document before using the product.
y The contents in this document are based on the information current as of January, 2021.
y No part or whole of this document may be transmitted or reproduced by any means without priorwritten permission of Mitutoyo Corporation.
y Some screen displays in this document may be highlighted, simplified or partially omitted for convenience of explanation. In addition, some of them may differ from actual ones to the extent that nouser will misunderstand the functions and operations.
y The corporation, organization and product names that appear in this document are their trademarks or registered trademarks.
©2019-2021 Mitutoyo Corporation. All rights reserved.

No. 99MBE011A

CONVENTIONS USED IN MANUALSConventions used in Mitutoyo's User's Manual are roughly divided into three types (safety reminders,prohibited and mandatory actions, and referential information and locations). Moreover, these conventions include general warnings and specific warnings. Specific warning symbols are provided with concrete pictograms inside of them.

 Safety reminder conventions and wording warning against potential hazards

DANGER

Indicates an immediately hazardous situation which, if not avoided, will result
in serious injury or death.

WARNING

Indicates a potentially hazardous situation which, if not avoided, could result
in serious injury or death.

CAUTION

Indicates a potentially hazardous situation which, if not avoided, may result inminor injury.

NOTICE

Indicates a potentially hazardous situation which, if not avoided, may result inproperty damage.
Alerts the user to a specific hazardous situation that means "Caution, risk ofelectric shock".

 Conventions and wording indicating prohibited and mandatory actions
Indicates concrete information about prohibited actions.

Indicates concrete information about mandatory actions.

Indicates that grounding needs to be implemented.

 Conventions and wording indicating referential information or referential
locations
Tips

Indicates referential information such as that for when the operating methods and procedures which
are printed in these sentences are to be applied to specific conditions.
Indicates referential locations if there is information that should be referred to in this document or an
extraneous User's Manual.
E.g.: For details about XX, see"1.2 Name and Functions of Each Part" (Page 2)i

No. 99MBE011A

Safety Precautions
Observe the following descriptions to make full use of the performance of this product:

NOTICE• Read this document thoroughly before operating the system to use it properly.
• Before connecting this product to the machine main unit, make sure that the power for the control unit isturned off.
• To maintain the shielding effect, firmly tighten the screws on the connectors of each connecting cable.
• To prevent defective contacts, do not touch the connecting terminals of the connectors with bare hands.

Precautions for Use

 General safety precautionsz This product is a measuring instrument.
Do not use this product for any other purpose than measuring.

z This is an industrial product.
Do not use this product for any other purpose than industrial use.

z This product is a precision instrument.
Handle this product with extra care. Do not apply any strong impact or excessive force to the parts
during use.

 Required environment for installationz Vibration
To install this product onto the machine main unit, select a location where there is as little vibration as
possible.
If the scale unit is used for an extended period of time on a machine where there is a substantial amountof vibration, the built-in precision parts may be damaged, thereby adversely influencing the performanceof the unit.

z Shock, dust, water protection
To protect the scale main unit from being directly exposed to machining oil and chips, or from being
bumped by a workpiece, etc., prepare a cover that protects the entire scale main unit.

z Ambient temperature and humidity
This product should be operated in an environment where the temperature is 0 °C–45 °C and where therelative humidity is between 20 %–80 %RH. Do not use this product in a place where sudden changes
in temperature or humidity are observed.

ii

No. 99MBE011A

Electromagnetic Compatibility (EMC)
This product complies with the EU EMC Directive. Note that in environments where electromagnetic
interference exceeds EMC requirements defined in this directive, appropriate countermeasures are
required to ensure product performance.
This is an industrial product. Not intended for use in a residential environment. Use of this product in a
residential environment may cause an electromagnetic interference with other instruments. In such acase, appropriate measures against electromagnetic interference are required.

Export Control ComplianceThis product falls into the Catch-All-Controlled Goods and/or Catch-All-Controlled Technologies (including Programs) under Category 16 of Appended Table 1 of the Export Trade Control Order or under Category 16 of the Appended Table of Foreign Exchange Control Order, based on the Foreign Exchange
and Foreign Trade Act of Japan.
If you intend re-export of the product from a country other than Japan, re-sale of the product in a country other than Japan, or re-provision of the technology (including program), you are obligated to observe
the regulations of your country.
Also, if an option is added or modified to add a function to this product, this product may fall under the
category of List-Control Goods and/or List-Control Technology (including Programs) under Category1 - 15 of Appended Table 1 of the Export Trade Control Order or under Category 1 - 15 of the Appended
Table of Foreign Exchange Control Order, based on Foreign Exchange and Foreign Trade Act of Japan.
In that case, if you intend re-export of the product from a country other than Japan, re-sale of the product in a country other than Japan, or re-provision of the technology (including program), you are obligated to observe the regulations of your country. Please contact Mitutoyo in advance.

Notes on Export to EU Member Countries
When you intend to export this product to any of the EU member countries, you may be required toprovide User's Manual(s) in English and EU Declaration of Conformity in English (under certain circumstances, User's Manual(s) in the destination country's official language and EU Declaration of Conformity in the destination country's official language). For detailed information, please contact Mitutoyo in
advance.

Disposal of Products outside the European Union andOther European Countries
Please follow the official instruction in each community and country.

iii

No. 99MBE011A

Disposal of Old Electrical & Electronic Equipment (Applicable in the European Union and Other European Countries with Separate Collection Systems)
This symbol on the product or on its packaging is based on the WEEE Directive (Directive on
Waste Electrical and Electronic Equipment), which is a regulation in EU member countries, andindicates that this product shall not be treated as household waste.
To reduce environmental impact and minimize the volume of landfill, please cooperate in reuse
and recycling.
For how to dispose of the product, please contact your dealer or the nearest Mitutoyo sales
office.

China RoHS Compliance Information
This product meets China RoHS requirements. See the table below.
产品中有害物质的名称及含量部件名称本体电气设备部分
配件

铅
(Pb)
○
×
○

汞
(Hg)
○
○
○

有害物质
镉
六价铬
(Cd)
(Cr(VI))
○
○
○
○
○
○

多溴联苯
(PBB)
○
○
○

多溴二苯醚
(PBDE)○○○

本表格依据 SJ/T 11364 的规定编制。
○：表示该有害物质在该部件所有均质材料中的含量均在 GB/T 26572 规定的限量要求以下。
×：表示该有害物质至少在该部件的某一均质材料中的含量超出 GB/T 26572 规定的限量要求。

环保使用期限标识是根据《电器电子产品有害物质限制使用管理办法》以及《电子电气产品有害物质限制使用标识要求(SJ/T11364-2014)》制定的,适用于中国境内销售的电子电气产品的标识。
电器电子产品只要按照安全及使用说明内容在正常使用情况下,从生产日期算起,在此期限内产
品中含有的有毒有害物质不致发生外泄或突变,不致对环境造成严重污染或对其人身、财产造成严重损害。
产品使用后,要废弃在环保使用年限内或者刚到年限的产品,请根据国家标准采取适当的方法
进行处置。
另外,此期限不同于质量/功能的保证期限。

iv

No. 99MBE011A

Warranty
In the event that this product should prove defective in workmanship or material, within one year fromthe date of original purchase for use, it will be repaired or replaced, at Mitutoyo’s option, free of charge
upon its prepaid return to Mitutoyo, without prejudice to the provisions of the Mitutoyo Software End
User License Agreement.
If this product fails or is damaged for any of the following reasons, it will be subject to a repair charge,
even if it is still under warranty.
y Failure or damage owing to fair wear and teary Failure or damage owing to inappropriate handling, maintenance or repair, or to unauthorized modificationy Failure or damage owing to transport, dropping, or relocation of the instrument after purchasey Failure or damage owing to fire, salt, gas, abnormal voltage, lightning surge, or natural disastery Failure or damage owing to use in combination with hardware or software other than those designated or permitted by Mitutoyo
y Failure or damage owing to use in ultra-hazardous activities
This warranty is effective only where the instrument is properly installed and operated in conformancewith the instructions in this manual within the original country of the installation.
EXCEPT AS SPECIFIED IN THIS WARRANTY, ALL EXPRESS OR IMPLIED CONDITIONS, REPRESENTATIONS, AND WARRANTIES OF ANY NATURE WHATSOEVER INCLUDING, WITHOUT
LIMITATION, ANY IMPLIED WARRANTY OF MERCHANTABILITY, FITNESS FOR A PARTICULARPURPOSE, NONINFRINGEMENT OR WARRANTY ARISING FROM A COURSE OF DEALING, USAGE, OR TRADE PRACTICE, ARE HEREBY EXCLUDED TO THE MAXIMUM EXTENT ALLOWED BYAPPLICABLE LAW.
You assume all responsibility for all results arising out of its selection of this product to achieve its intended results.

v

No. 99MBE011A

Disclaimer
IN NO EVENT WILL MITUTOYO, ITS AFFILIATED AND RELATED COMPANIES AND SUPPLIERSBE LIABLE FOR ANY LOST REVENUE, PROFIT, OR DATA, OR FOR SPECIAL, DIRECT, INDIRECT,CONSEQUENTIAL, INCIDENTAL, OR PUNITIVE DAMAGES HOWEVER CAUSED AND REGARDLESS OF THE THEORY OF LIABILITY ARISING OUT OF THE USE OF OR INABILITY TO USE THISPRODUCT EVEN IF MITUTOYO OR ITS AFFILIATED AND RELATED COMPANIES AND/ OR SUPPLIERS HAVE BEEN ADVISED OF THE POSSIBILITY OF SUCH DAMAGES.
If, notwithstanding the foregoing, Mitutoyo is found to be liable to you for any damage or loss whicharises out of or is in any way connected with use of this product by you, in no event shall Mitutoyo's and/or its affiliated and related companies' and suppliers' liability to you, whether in contract, tort (including
negligence), or otherwise, exceed the price paid by you for the product only.
The foregoing limitations shall apply even if the above-stated warranty fails in its essential purpose.
BECAUSE SOME COUNTRIES, STATES OR JURISDICTIONS DO NOT ALLOW THE EXCLUSION
OR THE LIMITATION OF LIABILITY FOR CONSEQUENTIAL OR INCIDENTAL DAMAGES, IN SUCH
COUNTRIES, STATES OR JURISDICTIONS, MITUTOYO'S LIABILITY SHALL BE LIMITED TO THE
EXTENT PERMITTED BY LAW.

vi

No. 99MBE011A

About This Document

 Positioning of this document in document map
z Linear scale related
AT211
Assembly Type Square Wave
Output Linear Scale
User's Manual (This Document)

 Intended readers and purpose of this documentz Intended readersThis document is intended for beginners of AT211 Assembly Type Square Wave Output Linear Scale.
They are also assumed to be able to understand individual instructions by reading dimensional schematics.

z Purpose
This document is aimed at understanding a basic knowledge of AT211 Assembly Type Square Wave
Output Linear Scale.

vii

No. 99MBE011A

Contents
CONVENTIONS USED IN MANUALS………………………………………………………… i
Safety Precautions……………………………………………………………………………… ii
Precautions for Use……………………………………………………………………………… ii
Electromagnetic Compatibility (EMC)……………………………………………………… iii
Export Control Compliance…………………………………………………………………… iii
Notes on Export to EU Member Countries………………………………………………… iii
Disposal of Products outside the European Union and Other European Countries……………………………………………………………………………………………………… iii
Disposal of Old Electrical & Electronic Equipment (Applicable in the European
Union and Other European Countries with Separate Collection Systems)…………… iv
China RoHS Compliance Information………………………………………………………… iv
Warranty…………………………………………………………………………………………… v
Disclaimer………………………………………………………………………………………… vi
About This Document……………………………………………………………………………vii
Contents………………………………………………………………………………………… viii
1

2

3

Overview……………………………………………………………………………………… 1
1.1

Features………………………………………………………………………………… 1

1.2

System Configuration and Name of Each Part…………………………………… 2

1.3

The Flow of Main Tasks……………………………………………………………… 4

Setup for Installation……………………………………………………………………… 5
2.1

Checking the Equipment Model……………………………………………………… 5

2.2

Designing the Installation of the Scale Unit………………………………………… 8
2.2.1

Scale Main Unit Mounting Directions and Cover Preparations…………………………… 8

2.2.2

Checking the Maximum Travel Distance and Effective Length…………………………… 11

2.2.3

Checking the Mounting Direction…………………………………………………………… 12

2.2.4

Installing the Intermediate Support………………………………………………………… 13

2.2.5

Precautions on Designing the Mounting Surface………………………………………… 14

Installation onto the Machine Main Unit…………………………………………………15
3.1

Checking the Package Contents……………………………………………………15

3.2

Mounting the Scale Main Unit and Adjusting the Position…………………………16ix

No. 99MBE011A

3.3

3.2.1

Temporarily Fixing the Scale Main Unit……………………………………………………… 16

3.2.2

Checking and Adjusting the Parallelism…………………………………………………… 18

3.2.3

Fully Fixing the Scale Main Unit……………………………………………………………… 19

Mounting the Detector and Adjusting the Position…………………………………20
3.3.1

3.4

4

Mounting the Detector…………………………………………………………………………20Connecting and Fixing the Signal Cable……………………………………………22
3.4.1

Connecting the Signal Cable…………………………………………………………………22

3.4.2

Handling the Cables……………………………………………………………………………23

Specification…………………………………………………………………………………25
4.1

Specifications…………………………………………………………………………25

4.2

Cable Specifications……………………………………………………………………26
4.2.1

Signal Cable……………………………………………………………………………………26

4.2.2

One Detector Cable Type……………………………………………………………………27

4.3

DIP Switch Settings……………………………………………………………………28

4.4

Production of Feedback Cable………………………………………………………29

4.5

4.6

4.4.1

Appearance Image of Feedback Cable and Grounding to Ground Bar…………………29

4.4.2

Assembly of D-Sub Connector………………………………………………………………30

4.4.3

Calculation of Feedback Cable Length………………………………………………………32

Air Purging………………………………………………………………………………34
4.5.1

Input Air Specification…………………………………………………………………………34

4.5.2

Air Flow Supplied to the Scale………………………………………………………………34

4.5.3

Air Supply Unit…………………………………………………………………………………35

4.5.4

Connection Method……………………………………………………………………………37

External View and Dimensional Drawings of the Scale Main Unit………………38
4.6.1

Fixing at Multiple Points………………………………………………………………………38

4.6.2

Fixing at Both Ends……………………………………………………………………………40

5

Troubleshooting……………………………………………………………………………43

6

Appendix………………………………………………………………………………………45
6.1

Quantity of the Supplied Accessories for Installation………………………………45
6.1.1

Fixing at multiple points………………………………………………………………………45

6.1.2

Fixing at both ends……………………………………………………………………………46

SERVICE NETWORK……………………………………………………………………… App-1

x

No. 99MBE011A

xi

No. 99MBE011A

1 Overview

1

Overview

1.1

FeaturesThis chapter describes the features of this product, names and functions of each part, and the flow of
the main tasks to use this product.

The assembly type linear scale uses the glass scales as the unit of length, to detect changes in theamount of light using light emitting elements and light receiving elements based on the grids, and to
output the amount of changes as a square wave (pulse).
This can precisely measure moving amounts of various instruments including printed board drill
punching machines, laser machines, and surface grinding machines.
This product is a slim shield-type scale that can be connected directly to a control unit. It supports awide range of resolutions from 0.1 μm–5 μm and delivers high-speed response of up to 120 m/min(2000 mm/s). This scale is also equipped with the scale alarm indication function for easy maintenance.
This product has the following two types and specifications with different effective measuring lengths.
y Type for fixing at multiple points with excellent vibration resistance or impact resistancey Type for fixing at both ends for space-saving installation

1

No. 99MBE011A

1 Overview

1.2

System Configuration and Name of Each Part

NC device

The system configuration and the name of each part are shown below.

Feedback cable
and NC device(prepared by user)

AT211 (scale unit and signal cable)

Tips
The one detector cable type (without connector) does not include the signal cable.

 Fixing at multiple points

②

⑧

①
⑤

③
⑦
No.

①
②
③
④
⑤
⑥
⑦
⑧

⑥

④
Name

Scale unit
Scale main unit
Detector
Detector cable
Signal cable
Scale alarm indication LED
Air supply inlet
Detector fixing block2

No. 99MBE011A

1 Overview

 Fixing at both ends

⑦
②
①

⑤

③
⑥

④
No.

①
②
③
④
⑤
⑥
⑦

Name
Scale unit
Scale main unit
Detector
Detector cable
Signal cable
Scale alarm indication LED
Detector fixing block3

No. 99MBE011A

1 Overview

1.3

The Flow of Main Tasks

The following chart shows the flow of preliminary preparation and installation onto the machine main
unit as tasks to use this product.

 Preliminary preparation
Checking the Equipment Model

Designing the Installation of the Scale Unit

"2.1 Checking the Equipment Model" (page 5)8)"2.2 Designing the Installation of the Scale Unit" (page Installation onto the machine main unit
Checking the Package Contents"3.1 Checking the Package Contents" (page 15)

Mounting the Scale Main Unit andAdjusting the Position"3.2 Mounting the Scale Main Unit and Adjusting the
Position" (page 16)

Mounting the Detector andAdjusting the Position"3.3 Mounting the Detector and Adjusting the Position"(page 20)

Connecting and Fixing
the Signal Cable"3.4 Connecting and Fixing the Signal Cable" (page22)

4

No. 99MBE011A

2 Setup for Installation2

Setup for Installation

2.1

Checking the Equipment Model

This chapter describes the preliminary preparation for installing this product onto the machine mainunit.

The AT211 model number is determined based on the effective length, installation method, scale reference point, indication accuracy, resolution/minimum edge interval/response speed, direction, detector cable, and signal cable.
Make sure that your scale unit model satisfies desired specifications.

AT211---

Effective
lengthInstallation method

Signal cable

Scale origin

Detector cable

Indication accuracy

Direction

Resolution/
Minimum edge interval/
Response speed

 Effective length
Symbol
0100
0150
0200
0250
0300
0350
0400
0450
0500
0600
0700
0750
0800
0900
1000
1100

Effective length
(mm)
100
150
200
250
300
350
400
450
500
600
700
750
800
900
1000
1100

Symbol
1200
1300
1400
1500

5

Effective length
(mm)
1200
1300
1400
1500

No. 99MBE011A

2 Setup for Installation

 Installation method
SymbolA
B

Installation method
Fixing at multiple
pointsFixing at both ends

 Scale reference point
Symbol12
3
4

Scale referencepoint
50-mm pitch
Center point
Left edge point
Right edge point Indication accuracy
SymbolS
H

Indication accuracy(3+3L0/1000) μm(2+2L0/1000) μm

Tips• L0 refers to the effective length (mm).
• Type H applies to a scale unit with an effective length of 500 mm or less.

 Specification combination
Minimum edge
interval (ns)Resolution (μm)
0.1
0.2
0.5
1.0
2.5
5.0

125

250

333

A: 43 (710)
F: 86 (1400)
L: 120 (2000)-

B: 22 (360)
G: 43 (710)
M: 110 (1800)
R: 120 (2000)
-

500

1000

C: 16 (260)
D: 11 (180)
E: 5.4 (90)
H: 32 (530)
J: 22 (360)
K: 11 (180)
N: 81 (1300)
P: 54 (900)
Q: 27 (450)
S: 120 (2000) T: 110 (1800)
U: 54 (900)
W: 120 (2000) X: 120 (2000)
Y: 120 (2000)

Tips• The numbers for symbols A to Y refer to the maximum response speed (m/min). The unit of a number enclosed in parentheses is mm/s.
• The minimum edge interval varies within the range between 0% and -10% depending on the operating condition.

6

No. 99MBE011A

2 Setup for Installation

 Direction
Symbol1
2

Direction
Forward: PA phaseadvance
Reverse: PB phaseadvance Detector cable
Symbol
A
B
C
D
E
F
H
J
K

Length
(m)
0.3
0.3
1
3
4
5
7
8
9

Coil spring
Available
Not available

Not available

Connector
Self-waterproof

Not available

Tips
Non-coil spring cables are vinyl coated.

 Signal cable
Symbol
A
B
C
D
E
F
G
H
J
X

LengthMetal flexible(m)3
Available
3
Not available
5
Available
5
Not available
7
Available
7
Not available
3
Not available
5
Not available
7
Not available
No signal cable

Tips• Non-metal flexible cables are vinyl coated.
• A half-pitch connector is used on the feedback cable side for G, H, and J.

7

No. 99MBE011A

2 Setup for Installation

2.2

Designing the Installation of the Scale Unit

2.2.1

Scale Main Unit Mounting Directions and Cover Preparations

When installing this product, be sure to install the cover so that cutting oil, chips, etc. do not splatter
onto the scale main unit.
Only the dust proof-rubber lips are used to protect the opening side of the scale main unit from the intrusion of foreign objects. Therefore, when deciding the mounting direction of the scale main unit, giveconsideration to the splattering directions of the cutting oil, chips, etc., since the opening side poses agreater hazard of foreign matter intrusion than the other sides.

 The direction from which the cutting oil, chips, etc. tend to intrude
Cutting oil, chips, etc.

Detector

Scale main unit
Dust proof-rubber lip

 The direction from which the cutting oil, chips, etc. tend not to intrude
Cutting oil, chips, etc.

Scale main unit

Detector8

No. 99MBE011A

2 Setup for Installation

 Mounting direction of the scale main unitz Longitudinal direction
Cutting oil, chips, etc.

Cutting oil, chips, etc.

Cover
(NG)

Recommendedz Horizontal direction
Cutting oil, chips, etc.

Cutting oil, chips, etc.

Cover

Cover
(OK)

Recommended9

No. 99MBE011A

2 Setup for Installationz Vertical direction

Cuttingoil, chips,
etc.

Cuttingoil, chips,
etc.

(NG)

Recommended• If the scale unit is directly exposed to machining oil and chips, prepare a cover that protects theentire scale unit regardless of the mounting direction. When deciding the cover shape, give consideration to the splattering of the cutting oil and chips on the opening side.
• Fully take the actual movement of the scale unit into account and make sure that the cover does
not touch other objects across the entire stroke.

10

No. 99MBE011A

2 Setup for Installation

2.2.2

Checking the Maximum Travel Distance and Effective Length

Make sure that the scale's maximum travel distance (L1) is greater than the maximum travel distanceof the machine.
For details about the effective length (L0) and the maximum moving amount (L1), see"4.6 External
View and Dimensional Drawings of the Scale Main Unit" (page 38)

Effective length: L0

Effective
lengthmark

Maximum
travel lengthmark

Maximum travel distance: L1

NOTICEBe sure to check the maximum travel distance of the scale unit, but not the automatic feed rate of the machine.
Failure to do so will result in damage to the scale unit.

Tips• The specified accuracy guaranteed range is limited to within the effective length.
• When checking the travel range of the scale main unit installed on the machine, make sure that the maximum travel range of the machine main unit does not exceed the L1 shown above, and that the required
accuracy range is within the L0 shown above.
• If the maximum travel distance or the effective length of the scale main unit is insufficient, one of the following actions is required:- Reduce the travel distance of the machine by installing a mechanical stopper or changing the limit switch
position.
- Change the scale size.

11

No. 99MBE011A

2 Setup for Installation

2.2.3

Checking the Mounting Direction

Install the scale unit in the direction shown in the figure below. During installation, pay attention to theunmounting direction of the detector cable. To reverse the unmounting direction of the detector cable,
reverse the scale unit itself.

 Fixing at multiple points
Normal mounting direction

Reverse unmounting direction
Cable pulling direction

180-degree rotation

Cable pulling direction

 Fixing at both ends
Normal mounting direction

Reverse unmounting direction
Cable pulling direction

180-degree rotation

Cable pulling direction

12

No. 99MBE011A

2 Setup for Installation

2.2.4

Installing the Intermediate Support

Tips
Install the intermediate support for a scale unit that is fixed at both ends and has an effective length of 500 mm
or more.
Use the following procedure to install the intermediate support on the scale main unit.

 To fix the scale main unit using mounting hole A
Intermediate support mounting screw (M3 countersunk screw)

Mounting hole A

Intermediate
support To fix the scale main unit using mounting hole B
Intermediate support mounting screw (M3 countersunk screw)
Mounting hole B
Intermediate
support13

No. 99MBE011A

2 Setup for Installation

2.2.5

Precautions on Designing the Mounting Surface

The following describes precautions on designing the mounting surface.
For details about the mounting specifications, see"4.6 External View and Dimensional Drawings of
the Scale Main Unit" (page 38)
For details about the mounting procedures, see"3 Installation onto the Machine Main Unit" (page15)

 Precautionsy The mounting surfaces of the scale main unit and the Detector must be machine-processed to be
that. The following shows tolerances on the machine surfaces.

z Fixing at multiple points
Mounting hole position

Mounting hole position

Mounting hole position

G: Machine guidez Fixing at both ends

G: Machine guidey Use the detector fixing block to adjust the clearance between the scale main unit and the Detector.
y If there is a gap between the Detector and the mounting surface, select the most appropriate spacer from the supplied ones (thickness = 0.3/0.4/0.5/0.6 mm) and insert it in between them.

14

No. 99MBE011A

3 Installation onto the Machine Main Unit

3

Installation onto the Machine
Main Unit

This chapter describes the procedures, methods, and precautions required when mounting this product onto the machine main unit.

3.1

Checking the Package Contents

Before installation, make sure that the product package contains the following items.
If your scale unit does not satisfy the specified specifications or you have any questions or concerns
about the product, please contact your dealer or the nearest Mitutoyo sales office/service center.

Tips
The accessories of this product are different depending on the specifications of the scale main unit.
Item
Scale unit

Quantity
One axis

Signal cable

One cable

Accessories

One setConnector set

One setUser's Manual
Warranty card
Inspection certificate

One copy
One copy
One copy

Note
3 m, 5 m, or 7 m. This is not supplied for the one
detector cable type (without connector).
Mounting screws, spacers, and intermediate supports. For details about the quantity of each accessory, see"6.1 Quantity of the Supplied Accessories for Installation" (pages 45 and 46)
This is not supplied for the one detector cable type(without connector).
This document15

No. 99MBE011A

3 Installation onto the Machine Main Unit

3.2
3.2.1

Mounting the Scale Main Unit and Adjusting the
Position
Temporarily Fixing the Scale Main Unit
• The mounting surface of the scale main unit must be machine-processed to be that.
• The detector fixing block that fixes the Detector defines the positional relationship between thescale main unit and the Detector. When mounting the scale unit on the machine main unit, do notremove the detector fixing block in order to keep the positional relationship.

Detector fixing block

1 Punch holes for fixing screws on the mounting surface of the scale main unit.
For details about the locations of fixing screw holes, see
Drawings of the Scale Main Unit" (page 38)"4.6 External View and Dimensional

2 Temporarily fix the scale main unit with the supplied fixing screws.
Tips
Tighten the fixing screws so that the scale main unit does not move even when you release the hand from thescale.

 Fixing at multiple points
Hatched area: Machined surface

Fixing screw M4 x 25
Use a spring washer and plain washer.

16

No. 99MBE011A

3 Installation onto the Machine Main Unit

 Fixing at both ends
Hatched area: Machined surface

Hatched area: Machined
surface (when installingintermediate support)

Hatched area: Machined surface

Fixing screw M6 x 25
Use a spring washer and plain washer.

Install the intermediate support for a scale unit that is fixed at both ends and has an effective length of
500 mm or more.
Intermediate support mounting screw (M3 countersunk screw) (fully fixing)

Intermediate
supportFixing screw M4 x 8
Use a spring washer and plain washer(temporarily fixing).

17

No. 99MBE011A

3 Installation onto the Machine Main Unit

3.2.2

Checking and Adjusting the Parallelism

1 Place a dial indicator or some other measuring instrument near the effective length mark (▽) on thescale main unit and check and adjust the parallelism of the scale against the machine guide.
Item
Measurement
location
Check direction

Description
Two locations near the effective length marks
Forward, backward, upward, and downward directions of the mounting surface ofthe scale main unit

Parallelism allow"4.6 External View and Dimensional Drawings of the Scale Main Unit" (pageance38)
Dial indicator

Near effective length markUpward anddownward
directions

Forward andbackward directions

Lever type dial indicator

Tips• Check the parallelism of the scale main unit by moving the machine's movable parts, such as the slide table,with your hand.
• The check directions are the same for both fixing at multiple points and fixing at both ends.

 Checking the intermediate support• You need to check the intermediate support for a scale unit that is fixed at both ends and has aneffective length of 500 mm or more.
• If the intermediate support touches the dial indicator when you move the slide table or some otherpart, release the spindle by pushing it up.
Dial indicator

Slide table moving direction
Release spindle

SpindleIntermediate
support18

No. 99MBE011A

3 Installation onto the Machine Main Unit

1 Move the dial indicator to near the intermediate support and check the parallelism of the scale main
unit against the machine guide.
Item
Measurement
location
Check direction

Description
Scale main unit near the intermediate support
Forward, backward, upward, and downward directions of the mounting surface ofthe scale main unit

Parallelism allow"4.6 External View and Dimensional Drawings of the Scale Main Unit" (pageance
38)
Near intermediate support
Upward anddownward
directions

Forward andbackward
directions

3.2.3

Fully Fixing the Scale Main Unit

1 After checking and adjusting the parallelism of the scale main unit, fully tighten the fixing screws on thescale.
• When the intermediate support is used, tighten the fixing screws on the support as well.
• The tightening torque for fixing screws is as follows:- M4 screw (for fixing at multiple points and intermediate support): 3 N•m- M6 screw (for fixing at both ends) 9 N•m

19

No. 99MBE011A

3 Installation onto the Machine Main Unit

3.3

Mounting the Detector and Adjusting the Position

After completing the steps described in "Mounting the Scale Main Unit and Adjusting the Position",
follow the procedures below to install the Detector.

3.3.1

Mounting the Detector

1 Check the parallelism of the Detector mounting surface.
For details, see"4.6 External View and Dimensional Drawings of the Scale Main Unit" (page 38)

2 Temporarily fix the Detector with the supplied detector fixing screws.

 Fixing at multiple points

Fixing screw M4 x 25
Use a spring washer and plain washer.

 Fixing at both ends

Fixing screw M4 x 25
Use a spring washer and plain washer.

20

No. 99MBE011A

3 Installation onto the Machine Main Unit

If there is a gap between the Detector and the mounting surface, select the most appropriate spacerfrom the supplied ones (thickness = 0.3/0.4/0.5/0.6 mm) and insert it in between the Detector and themounting surface.

Detector

Mounting surface

SpacerGap

3 Remove the screws (three locations) that fix the detector fixing block.
Detector fixing block

Detector fixing block Fixing screw

4 Fully fix the Detector with the supplied screws.

NOTICE
If you fully tighten the screws for fixing the Detector without inserting the spacer although there is a gap between the Detector and the mounting surface, the scale unit may be damaged.

5 Make sure that the detector fixing block can be smoothly removed and inserted and there is no gap
between the Detector and the mounting surface.
Scale main unit

Keep these surfaces inabsolute contact

Detector

Detector fixing block21

No. 99MBE011A

3 Installation onto the Machine Main Unit

3.4

Connecting and Fixing the Signal Cable

3.4.1

Connecting the Signal Cable

Tips• Make sure that the connecting direction of the connector is correct.
• The connector is waterproof, but if it is not fully plugged, it may cause malfunctions.

1 Connect the detector cable and the signal cable.
Connect to NC device orsome other device

Signal cable
Connect
Detector cable

2 Connect the signal cable to the NC device.
For details, see"4.4 Production of Feedback Cable" (page 29)

3 Make sure the screws on the connector plug are fully tightened.
4 After connection of cables etc. is completed, turn on the power and check the operations, functions,and performance of the scale unit.
Tips• After turning on the power, if the scale unit does not operate normally, check the connections first. If thescale does not operate normally even after the status of connections is checked and the power is supplied
again, investigate the cause.
"5 Troubleshooting" (page 43)
For details, see• When checking the scale unit operations, be very careful that no cables are being pinched by the machinery.
• When connecting the connectors, if chips or other foreign objects are sandwiched in, that may cause malfunctions.

22

No. 99MBE011A

3 Installation onto the Machine Main Unit

3.4.2

Handling the Cables

Be sure to note the following content when fixing the cables.

1 Wire the detector cable and signal cable while paying attention to the twisting or bends of the cables.

NOTICE
Note that the detector cable, signal cable, and feed back cable may malfunction if bundled with other cables
that may cause electrical noise, or if they are located near a switching relay dealing with a large current.

2 Fix the plug between the detector cable and signal cable (self-waterproof connector part), and the signal cable itself with the supplied cable clamps.

NOTICEThe bend radius of the signal cable must be greater than the following value. If the bend radius exceeds theallowable range, it could result in breakage of the wires or other problems. Also, note with caution that the scale
is no longer guaranteed in such a case.
• Fixing the signal cable (the Detector is fixed): Bend radius = 50 mm or more
Scale main unit moves

R = 50 or more
Detector is fixed

When even signal cable is fixed• Repeatedly bending the signal cable (the Detector moves): Bend radius = 100 mm or more
Scale main unit is fixed

R = 100 or more
Detector moves
When signal cable is repeatedly bent

3 Wire the feedback cable (prepared by the user) with some allowances and fix it with cable clamps.

23

No. 99MBE011A

3 Installation onto the Machine Main Unit

Tips
• Check that excessive force is not applied to the detector cable, signal cable, and feedback cable throughout
the entire stroke. In particular, make sure that they are not in contact with the parts such as the cover attached to protect the scale unit.
• Consider the shake due to vibration, etc. given to connectors.
Connector
Shake given toconnector
Cable

Clamp

Clamp

• Do not bend the cables.
• If the cables are going to be repeatedly bent, try to reduce stress applied to near the root of the clamping
part.
Clamp

Clamp

Cable

Cable

Clamp

Clamp

Clamp

Cable

Cushioning

24

No. 99MBE011A

4 Specification

4

Specification

4.1

Specifications
Item

Effective length (L0)
Scale reference point

Indication accuracy (20 °C)
Vibration resistance (55 Hz—
2000 Hz)
Shock resistance (1/2 sin, 11
ms)
Air supply
Type
Output signal
Electrical
specification
Main scale grid pitch
Minimum resolution
Minimum edge interval
Maximum response speed
Power supply voltage
Maximum current consumption
Sliding force
Used temperature range
Storage temperature range
Used/storage humidity range
Direction switch
Alarm detection
Alarm function Alarm output
Alarm indication
CE Marking

Specification
100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 750, 800,
900, 1000, 1100, 1200, 1300, 1400, 1500 mm
50-mm pitch, center point, left edge point, or right edge point (determined when shipped)(3 + 3L0/1000) µm(When L0 ≦ 500 mm, a high precision type with (2+2L0/1000) µm
can also be produced.)
L0: Effective length (mm)200 m/s2 * Only for fixing at multiple points
250 m/s2 * Only for fixing at multiple points
Available * Only for fixing at multiple points
PA/PA, PB/PB, PZ/PZ
Compliance with RS422
20 µm0.1, 0.2, 0.5, 1, 2.5, 5 µm (fixed when shipped)
125, 250, 333, 500, 1000 ns (fixed when shipped)
5.4 m/min—120 m/min(Determined based on minimum resolution and minimum edge
interval)
5 VDC ±5 %200 mA
5 N or less
0 °C—45 °C-20 °C—70 °C
20 %—80 % RH (non condensation)
Forward/reverse (set when shipped)
Over speed, scale signal error
High impedance for all PA/PA, PB/PB, and PZ/PZ output
Steady red LED on signal cable NC connector (D-sub connector)* Except for one detector cable type (without connector)
EMC Directive: EN 61326-1
Immunity test requirement: Clause6.2 Table 2
Emission limit: Class B
RoHS Directive: EN IEC 63000

25

No. 99MBE011A

4 Specification

4.2

Cable Specifications

4.2.1

Signal Cable Connection diagram
D-sub connector

6

1

10

5

1

3,4
11
1,2
13
5
6
7
8
9
10

8

15

9

Pin No.

D-sub connector

Waterproof squareconnector

Cable material

Waterproof square connector

Signal nameSignal namePin No.

+5V

+5V

10

GND

GND

5

PA
PA
PB
PB
PZ
PZ

PA
PA
PB
PB
PZ
PZ
ALM

4
3
8
7
2
9
1,6

15

Connector main unit

F.G.
F.G.

Housing

Connector case
Shielded wire

External view of signal cable

Connection diagram of signal cable D-sub connector
Applicable connector: HDAB-15S (Hirose Electric product or equivalent product (D-sub series) can be
used)
1

8

9

15

Pin No.

SignalPin No.

Signal

1, 2, 13

0V

8

PB

3, 4, 11

+5 V

9

PZ

5

PA

10

PZ

6

PA

12, 14

Unused

7

PB

15

F.G.

26

No. 99MBE011A

4 Specification

 Output diagram
PA

PA

A-phase

PA

PA
PB

PB

B-phasePB

PB

AM26C31

t

PZ

PZ

PZ

PZ

Z-phaset t

t Minimum edge interval: t = 125 ns—1000 ns

60 μm ±10 μm

4.2.2

One Detector Cable Type Connection diagram
Discrete wire

Detector
Detector Cable

Wire color
White,
black

SignalWire color

SignalBlue

PB

Brown, red +5 V

PurplePZ

Orange

PA

Gray

PZ

Yellow

PA

Pink

ALM

Green

PB

0V

 Output circuit specifications
ALM signal
Alarm circuit

1 kΩ

High
ALM

LOW (when an alarm occurs)

Equivalent to TC7S08 (Toshiba C-MOS)27

No. 99MBE011A

4 Specification

4.3

DIP Switch Settings

You can switch the direction with the DIP switch on the Detector board.

1 Remove the screws (four locations) that fix the Detector cover.
2 Change the switch 4 setting with DIP switch 1 on the board.
Detector(when the cover is removed)

DIP switch 1

DIP switch 2: Fixed when shipped(unable to be set by user)

Fixed when shipped (unable to be set byuser)
Direction setting (switch 4)

Tips• Do not change the switch 1—3 setting with the DIP switch 1 (fixed when shipped). If you changed the setting by mistake but do not know the default setting, please contact the nearest Mitutoyo sales office/service
center before turning on the system.
• Do not change the switch 2 setting (fixed when shipped). If you changed the setting by mistake but do notknow the default setting, please contact the nearest Mitutoyo sales office/service center before turning on
the system.

Tips
When you turn on switch 4 on DIP switch 1, the PA phase is set to phase advance as follows.
When switch 4 is ON: PA phase: Phase advancePA
PB

When switch 4 is OFF: PB phase: Phase advancePA

Detector move direction

PB

3 Fix the Detector cover with the screws (four locations). (Screw tightening torque: 0.18 N･m)

28

No. 99MBE011A

4 Specification

4.4

Production of Feedback Cable

A feedback cable is required (prepared by the user) to connect this product to an NC device or some otherdevice.

Tips
A feedback cable is unnecessary for the one detector cable type (without connector). Attach a connector specified by the NC device or some other device you want to connect to the top end (discrete-wire part) of the cable.
For the connection diagram for the one detector cable type, refer to"4.2.2 One Detector Cable Type" (page27)
The parts required to make a feedback cable are shown below.
Name
Connector for signal cable
Connector for NC device
Cable material (recommended)

Specification
This is supplied with this product (socket contact, 15 pins).
This part is unnecessary for the one detector cable type (without
connector).
This is not supplied with this product. Prepare a connector specified by the NC device you want to connect.
Model number: A66L-0001-0286
Manufacturer: Hitachi Cable or Oki Electric Cable• When using any cable other than the above recommended cable, make sure to use a shield cablewith the total amount of the impedance of the power supply line (+5 V and 0 V) to "0.65 Ω or less/total length".
• Install the signal cable so that cutting oil, chips, etc. do not splatter onto the D-sub connector plug.
The D-sub connector of the signal cable has the scale alarm indicator LED (steady red on alarm).
Wire the cable so that the LED indication can be seen.
• Use the feedback cable at a location where no repeated bending occurs.

4.4.1

Appearance Image of Feedback Cable and Grounding to
Ground Bar
Connector on the NC device
Shielded wireNC
deviceGrounding to the ground bar

Output cable(D-sub connector: socket contact, 15 pins)

29

No. 99MBE011A

4 Specification

When assembling the D-sub connector, make sure to conduct electricity from the cable shielded wire
to the metal shell. Also, peel part of the sheath (coating) of the cable on the NC device and make sure
to use the ground bar to ground the shielded wire.
Ground bar etc.

Shielded wire (mesh wire)
Partially cut coating of the cableFeedback cable

4.4.2

Assembly of D-Sub Connector

1 Cut the sheath (coating) of the cable material into the length of the following figure.
Make sure not to damage the internal shielded wire.

Cable material (coating)

Shielded wire

2 Untangle the exposed shielded wire to spread radially and cut it against the sheath.
Shielded wire

3 Peel the tip of the coating of the wire about 3 mm, and make a preliminary solder after twisting the
conducting wires.
Pre-soldering the tip

4 Solder each line to D-sub connector (socket contact, 15 pins/supplied accessory).

30

No. 99MBE011A

4 Specification

Insert a vinyl tube (ø2 mm, L = 6 mm—8 mm) or heat shrinkable tube into each terminal part.
Bend the shielded wire to the sheath.
Bending the shielded wire

D-sub connector

Vinyl tube (or heat shrinkable tube)

Tips
Control unit etc.
Line receiver
AM26C32 : TI
A-phaseFeedback cable

R1
R2

A-phase
R2
R1

B-phaseR2Z-phaseLine driver
AM26C31 : TI

R2

B-phaseR2

R1

Z-phaseR2• For power: 0.5 mm2, three black wires, three red wires• For signal: 0.18 mm2, black x red, black x white, red x white (twisted wire)• If the shield has a drain wire, connect it to the 15th pin.

5 Set the connector on the plug case (supplied accessory).
6 Screw the shielded wire folded back at step 4 with a cable clamp material (supplied accessory).
7 Set the hex nuts (supplied accessory) in the plug case.
8 Insert the hexagonal joint stand (supplied accessory) from the connector and tighten the screws (temporary fixing).

31

No. 99MBE011A

4 Specification
Cable clamp material

Hexagonal joint standHexagonal nut

9 Place the other plug case (supplied accessory) and fix it with screws (M2.6 x 14, hex nut/supplied
accessory).

10 Tighten the hexagonal joint stand temporarily fixed in step 8.

TightenPlug case fixing screw

Apply screw locking glue for the screw units.

4.4.3

Calculation of Feedback Cable Length

When making a feedback cable, refer to the following calculation method of maximum cable length.

NC device Configuration

Feedback cable
and NC device

AT211 (scale unit and signal cable)

Relay connector unit
voltage32

No. 99MBE011A

4 Specification

 Condition: When the signal cable length is 1 m
Name

Specifications andsymbols

Unit

L

m

a
b

Ω/m
Wires

4.95 *1V

0.2
4.5 + 0.035 *2, *3

AV

Maximum cable length(detector cable length + signal cable length +feedback cable length)
Wire resistance of used wire material
Number of pairs used for power supply line
Supply voltage (minimum value) from the NC
deviceCurrent consumption value
Relay connector unit voltage (minimum value)*1 It is usually the standard supply voltage of the NC device.
*2 When the detector cable length + signal cable length is 1 m or more, a voltage drop of 0.035 V per
1 m occurs.
Consider the voltage drop in the detector cable + signal cable.
*3 Confirm that the input voltage of the relay connector unit is the minimum value or more in the table
above.

 Calculation formula
Allowable voltage drop ≥ (Current consumption x wire material resistance x 2 x max cable length) ÷
Number of pairs used for power supply line (1)Applying the conditions in the above table to formula (1) gives the following result.
(4.95 - (4.5 + 0.035)) [V] ≧ (0.2 [A] x a [Ω/m] x 2 x L [m]) ÷ b [wires]			

(2)

Modify formula (2) above to the following one.
L [m] ≦b ( 4.95 - 4.535 )									(3)0.4 aProduce the feedback cable of the max cable length (L[m]), wire resistance of used wire material(a[Ω/m]) and number of pairs used for power supply line (b[wires]) satisfying formula (3) above.

33

No. 99MBE011A

4 Specification

4.5

Air Purging

There is a method to improve environmental resistance (coolant resistance, dust resistance) of assembly type linear scale by supplying clean compressed air into the scale main unit. Set up pipe to
one of the M5 screw holes on both sides of the scale main unit and supply compressed air.

Tips
• Air purging can be performed for a scale unit that is fixed at multiple points.
• Air supply is an auxiliary method for cleaning inside the scale main unit.
• For air supply, mounting posture is important. Follow the instructions in this manual.
• When supplying air, it is necessary to periodically replace the air filter due to the contamination of the air
source. If you continue to use the dirty filter, dirt will enter the scale and cause trouble, so pay attention tothis issue.

4.5.1

Input Air Specification

The table below shows the input air specification.
This specification corresponds to ISO8573-1 Class 1.4.1.
Item
Specification
Maximum particle diam0.1
eter (μm)
Lowest pressure dew+3
point (°C)
Oil concentration (mg/
0.01
m3)

4.5.2

Air Flow Supplied to the Scale

Supply air of 10 L/min—20 L/min per scale axis.
Air should slightly come out from the closed part of the dust-proof rubber lips.
Adjust the air flow referring to the table below.
Conditions
Using Mitutoyo's fixed diaphragm (ID: ø0.9)

Using other fixed diaphragms

Air flow rate
Make adjustment with the air pressure, so that the air flow becomes 10
L/min—20 L/min (per scale unit).
Reference values when supplying air to one axis are as follows.
y If air pressure is 0.1 MPa: Approx. 12.7 L/miny If air pressure is 0.2 MPa: Approx. 19 L/min
Make adjustment with the air pressure, so that the air flow becomes 10
L/min—20 L/min (per scale unit).
For information on the air flow and pressure relationships, refer to theflow characteristics (ID of the fixed diaphragm and flow-pressure relations) provided by each pneumatic component manufacturer.

34

No. 99MBE011A

4 Specification
Make adjustment with the air pressure, so that the air flow becomes 10
L/min—20 L/min (per scale unit).
Using flow rate adjustable
valves

4.5.3

NOTICE
Make sure not to supply a large amount of air before making adjustments. Otherwise, it may cause components to break thereby
resulting in malfunctions.

Air Supply Unit

The specifications for recommended air devices and the manufacturer models are described in thefollowing.
If the specifications are the same, you can use air equipment made by another company.
Estimated time of element replacement for each filter is one year.
Air dryer, andmain line air filter(1)

Compressor side

No.

Component(1)

Air filter(2)

Oil mist filter

(2)

(3)

(4)

(5)

Air device

Appearance

Specificationy Fluid: Compressed air
y Maximum operating pressure: 1.0
MPay Proof pressure: 1.5 MPa
y Maximum particle diameter (filtration): 5 µm
y Secondary oil concentration: y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPay Proof pressure: 1.5 MPa
y Maximum particle diameter (filtration): 0.01 µm
y Secondary oil concentration: 0.01
mg/m3 or below
y Element replacement: One year
(6000 hours) or when pressure islowered to 0.1 MPa or lower

35

Scale

Part No.
Part No.
Manufac(Mitutoyo) turer model--

F1000-8-W(CKD)

M1000-8-W(CKD)

No. 99MBE011A

4 Specification(3)

High performance oil
mist filter(4)

Regulator(5)

Fixed diaphragm(1) toAir unit(4)y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPay Proof pressure: 1.5 MPa
y Maximum particle diameter (filtration): 0.01 µm
y Secondary oil concentration: 0.001
mg/m3 or below
y Element replacement: One year
(6000 hours) or when pressure islowered to 0.1 MPa or lower
y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPay Proof pressure: 1.5 MPa
y Set pressure range: 0.1 MPa—0.7
MPay Oil proof treatment typey Fluid: Airy Used pressure range: 0.1 MPa—0.9
MPay Screw tightening torque: 1.0 N･m—
06ACJ155
1.5 N･my Flow rate at pressure 0.1 MPa:
Approx. 12.7 L/min (per axis)y Flow rate at pressure 0.2 MPa:
Approx. 19 L/min (per axis)
Equivalent to ISO-8573-1 Class 1.4.1
y Maximum particle diameter (filtration): 0.01 µm
y Lowest pressure dew point: y Oil concentration (oil mist concentration): 0.001 mg/m3 or lessSee the
06ACJ154
next figure. y Flow rate at pressure 0.1 MPa: 12.7
L/min (per axis)
y Insertable flow rate (maximum): 75
L/min
y When to replace each element: One
year

IN

MX10008-W(CKD)

RA-050-L(CKD)

PC6M5M-0.9(Pisco custom order)-

OUT(1) Air filter(2) O il mist filter(3) H igh performance oil mist filter(4) Regulator
(1)

(2)

(3)

(4)

Appearance of air unit

36

No. 99MBE011A

4 Specification

4.5.4

Connection Method

Do not directly supply air from the compressor to the air unit. Make sure to use dry compressed air
through the air dryer or main line air filter.
Attach the fixed diaphragm to the scale side.

 When supplying air to two linear scales (two axes)
T-joint

ø6 tubeFixed
diaphragm

Linear scale (option)

Pressure on output side

Air unit (main unit)(Part No.06ACJ154)

Option set for two linear scales (two axes) (optional: Part
No.06ACJ162)

 When supplying air to three linear scales (three axes)
T-joint
Linear scale (option)
ø6 tubePressure on output side

Air unit (main unit)(Part No.06ACJ154)

Fixed
diaphragm

Option set for three linear scales (three axes) (optional: Part No.06ACJ163)

Tips• For each air unit, air can be supplied up to five axes.
• You can connect up to four to five axes by combining option sets for two axes (No.06ACJ162) and three axes
(No.06ACJ163).
A ø6 air tube (length: 20 m) is included in each option set.
• For information on maintenance, refer to the manual supplied with the unit.

37

No. 99MBE011A

Scale alarm indication LED

Signal cable

38

Scale unit mounting surface(normal mounting direction)

Scale unit mountable surface(rear mounting direction)

Coil spring

Detector cable

Effective length
Maximum travel distanceThroughboth sides

Machine guide

4.6.1

Metal flexible type

Full length

Through hole
both side
Fixing screw: hex socket
head cap screw

4.6

Air supply inlet
on the both sides

Scale unit mounting surface

4 Specification

External View and Dimensional Drawings of the
Scale Main Unit
Fixing at Multiple Points

 Dimensional drawings

No. 99MBE011A

4 Specification

 Dimensional drawings table
Unit: mm
Code No.
539-701A
539-702A
539-703A
539-704A
539-705A
539-706A
539-707A
539-708A
539-709A
539-711A
539-713A
539-714A
539-715A
539-716A
539-717A
539-718A
539 719A
539-720A
539-721A
539-722A

Model number
AT211-100A
AT211-150A
AT211-200A
AT211-250A
AT211-300A
AT211-350A
AT211-400A
AT211-450A
AT211-500A
AT211-600A
AT211-700A
AT211-750A
AT211-800A
AT211-900A
AT211-1000A
AT211-1100A
AT211-1200A
AT211-1300A
AT211-1400A
AT211-1500A

Effective
length
L0
100
150
200
250
300
350
400
450
500
600
700
750
800
900
1000
1100
1200
1300
1400
1500

Maximum
travel distance
L1
120
170
220
270
330
380
430
480
540
640
740
780
840
940
1040
1140
1240
1340
1440
1540

39

End face
size
L2
19.5
44.5
19.5
44.5
24.5
49.5
24.5
49.5
29.5
29.5
29.5
49.5
29.5
29.5
29.5
29.5
29.5
29.5
29.5
29.5

L3

Scale unit
Number of
fixing holes

239
289
339
389
449
499
549
599
659
759
859
899
959
1059
1159
1259
1359
1459
1559
1659

3
3
4
4
5
5
6
6
7
8
9
9
10
11
12
13
14
15
16
17

Full length

No. 99MBE011A

Intermediate support

Signal cable

Scale alarm indication LED

Metal flexible type

40
Fix

Coil spring

Fix

Effective length
Maximum travel length

Fix

Mounting hole pitch

Detector cable

Intermediate support

both sides Depth:

Fix

Hole

Hole

Intermediate support

Intermediate support

Fix

Machine guide

Scale unit mounting surface

Throughboth sides

Throughboth sides

Fix

Scale unit mounting surface

4.6.2

Intermediate support

Intermediate support

Full length
Mounting hole pitch

4 Specification

Fixing at Both Ends

 Dimensional drawings

No. 99MBE011A

4 Specification

 Dimensional drawings table
Unit: mm
Code No.

Model No.

539-701B

AT211-100B

539-702B

AT211-150B

539-703B

Effective
lengthL0

Maximum
travel distance L1

100

Mountinghole pitch

Full Intermediate support
length
L4
L5
L6
L7

L2

L3

120

258

242

276

150

170

308

292

326

AT211-200B

200

220

358

342

376

539-704B

AT211-250B

250

270

408

392

426

539-705B

AT211-300B

300

330

468

452

486

539-706B

AT211-350B

350

380

518

502

536

539-707B

AT211-400B

400

430

568

552

586

539-708B

AT211-450B

450

480

618

602

636

539-709B

AT211-500B

500

540

678

662

696

339

331

539-711B

AT211-600B

600

640

778

762

796

389

381

539-713B

AT211-700B

700

740

878

862

896

439

431

539-714B

AT211-750B

750

780

918

902

936

459

451

539-715B

AT211-800B

800

840

978

962

996

489

481

539-716B

AT211-900B

900

940

1078

1062

1096

539

531

539-717B

AT211-1000B

1000

1040

1178

1162

1196

589

581

539-718B

AT211-1100B

1100

1140

1278

1262

1296

430

539-719B

AT211-1200B

1200

1240

1378

1362

1396

460

539-720B

AT211-1300B

1300

1340

1478

1462

1496

539-721B

AT211-1400B

1400

1440

1578

1562

1596

530

539-722B

AT211-1500B

1500

1540

1678

1662

1696

560

-

-

-

-

-

490

Tips
The number of intermediate supports to be supplied varies depending on the effective length.
Effective length (mm)500 to 1000
1100 to 1500

Intermediate support
A (one location)
B, C (two locations)41

No. 99MBE011A

4 Specification

MEMO

42

No. 99MBE011A

5 Troubleshooting

5

TroubleshootingThis chapter describes how to check for the reasons why problems occur when initially powering on,
or for when alarms are generated during operation.
Trouble occurs
A

Trouble cleared

NO

YES

Complete

NC devicedisconnection alarm is
not displayedNO

Check settings of the NC device
and scale unit (minimum
resolution, minimum edge
interval and direction etc.)

YES

Alarm indication
LED of the signal cable connector
part is turned off

Connection of the
feedback cable is correct (including
the shielded wire)NO

NO

Adjust the
feedback cable

YES

A

YES

Shielded wire of the
feedback cable is grounded to
the ground bar

NO

YES

YES

A

YES

Installation position
relationship between the Detector
and scale main unit iscorrect

Signal cable iscorrectly conducted

AdjustNONO

Replace the signal cable(contact our service center ornearest sales office)A

Re-installA

Contact our service
center or nearest sales
office43

No. 99MBE011A

5 Troubleshooting

MEMO

44

No. 99MBE011A

6 Appendix

6

Appendix

6.1
6.1.1

Quantity of the Supplied Accessories for Installation
Fixing at multiple points
Accessory

Effective
lengthPart No.

Hex
socket
head
cap
screw
M4 x 10

100
to
600
700
to
1500

06AFU826A

Hex
socket
head
cap
screw

Plain
washer, Spring
nominal washer,4
nominal
4Small
M4 x 25
round

10

10

19

19

45

Nylon
clip

Nylon
clip

HP-4N

HP-6N

HP-10N

Thickness =0.3, 0.4,
0.5, 0.6
mm

5

5

2

1 for
each

10

7
06AFU826B

Nylon
clip

19

Spacerset

No. 99MBE011A

6 Appendix

6.1.2

Fixing at both ends
Accessory

Effective
length

100
to
450
500
to
1000
1100
to
1500

Part No.

Hex
Hex
Plain
Hex
Plain
socketsocketwasher,socketSpringwasher,Springhead cap head cap head cap nominal 4 nominal 6 washer,washer,
screw
screw
screw
Small
nominal 4 nominal 6
Small
M4
x
25
M6
x
25
round
M4 x 10
round

06AFU825A
06AFU825B

7

2

2

2

2

2

06AFU825C
Accessory

Effective
length

100
to
450
500
to
1000
1100
to
1500

2

Part No.

Nylon
clip
HP-4N

Nylon
clip
HP-6N

Nylon
clip
HP-10N

06AFU825A
06AFU825B

552

06AFU825C

46Intermediate support

Countersunkscrew
M3 x 5Hex
sockethead capscrew
M4 x 8

0

0

0

1

2

1

2

4

2

Spacerset
Thickness =0.3, 0.4,
0.5, 0.6mm

1 for eachNo. 99MBE011A

SERVICE NETWORK*As of October 2020
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App-1

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App-2

ACC Branch / M³ Solution Center
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showroom
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App-3

Bengaluru Region Head office / M³ Solution Center
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App-4

Dalian Office / M³ Solution Center China(Dalian)
Room A-106 Shuijing SOHO，No.16 Harbin Road,Economic Development Zone,Dalian, 116600 CHINA
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Room1801,18/F,Unit1,Building No.23, Shangwu Inner
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Henan 450018, CHINA
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No.26, Chang'an Section Guanchang Road,
Chang'an Town, Dongguan City, Guangdong
523855, CHINA
TEL:86(769)8541 7715 FAX:86(769)-8541 7745
Fuzhou Office
Room 2104, City Commercial Centre, No.129 Wu Yi
Road N., Fuzhou City, Fujian 350005, CHINATEL 86 (591) 8761 8095
FAX 86 (591) 8761 8096
Changsha Office
Room 2207, Building 1, Shiner International Plaza,No. 88, Kaiyuan Middle Road, Changsha City, Hunan
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FAX 86 (731) 8401 9376

M³ Solution Center-Ohio
6220 Hi-Tek Ct., Mason, OH 45040, U.S.A.
TEL:1-(888)-648-8869 FAX:1-(513)754-0718
M³ Solution Center-Michigan
46850 Magellan Drive, Suite 100 Novi, MI 48377, U.S.A.
TEL:1-(888)-648-8869 FAX: 1-(248)-926-0928
M³ Solution Center-California
16925 E. Gale Ave., City of Industry, CA 91745, U.S.A.
TEL:1-(888)-648-8869 FAX:1-(626)369-3352
M³ Solution Center-North Carolina
11515 Vanstory Dr., Suite 140, Huntersville, NC
28078, U.S.A.
TEL:1-(888)-648-8869 FAX:1-(704)875-9273
M³ Solution Center-Alabama
2100 Riverchase Center Suite 106, Birmingharm,
AL 35244, U.S.A
TEL:1-(888)-648-8869 FAX:1-(205)-988-3423
M³ Solution Center-Washington
1000 SW 34th St. Suite G, Renton,
WA 98057 U.S.A.
TEL:1-(888)-648-8869
M³ Solution Center-Texas4560 Kendrick Plaza Drive Suite 120 Houston,
TX 77032, U.S.A.
TEL:1-(888)-648-8869 FAX:1-(281)227-0937

Mitutoyo Leeport Metrology (Hong Kong) Limited
Room 818, 8/F, Vanta Industrial Centre, No.21-33, Tai
Lin Pai Road, Kwai Chung, NT, HONG KONG
TEL:(852)2992-2088 FAX:(852)2670-2488

M³ Solution Center-Massachusetts
753 Forest Street, Suite 110, Marlborough,MA 01752, U.S.A.
TEL:1-(888)648-8869 FAX:1-(508)485-0782

Mitutoyo Measuring Instruments (Suzhou) Co., Ltd.
No. 46 Baiyu Road, Suzhou 215021, CHINA
TEL:86(512)6252-2660 FAX:86(512)6252-2580

Mitutoyo America Corporation Calibration Lab
965 Corporate Blvd., Aurora, IL 60502, U.S.A.
TEL:1-(888)-648-8869 FAX:1-(630)978-6477

U.S.A.
Mitutoyo America Corporation
965 Corporate Blvd., Aurora, IL 60502, U.S.A.
TEL:1-(630)820-9666 Toll Free No. 1-888-648-8869
FAX:1-(630)978-3501
M³ Solution Center-Illinois
965 Corporate Blvd., Aurora, IL 60502, U.S.A.

Micro Encoder, Inc.
11533 NE 118th St., Kirkland,
WA 98034-7111, U.S.A.
TEL:1-(425)821-3906 FAX:1-(425)821-3228
Micro Encoder Los Angeles, Inc.
16925 Gale Ave. City of Industry,
CA 91745-1806 U.S.A.
TEL: 1-626-961-9661 FAX:1-626-333-8019
Mituotyo America Corporation CT-Lab Chicago
965 Corporate Blvd., Aurora, IL 60502, U.S.A.
TEL: 1-(888)-648-8869 FAX: 1-(630)-820-3418

App-5

CanadaMitutoyo Mexicana, S.A. de C.V. Querétaro
Calibration Laboratory
Av. Cerro Blanco 500 30 Centro Sur,
Querétaro, Querétaro, C.P. 76090, MÉXICOTEL: 52 (01-442) 340-8018, 340-8019 and 340-8020
FAX: 52 (01-442) 340-8017

Mitutoyo Canada Inc.
2121 Meadowvale Blvd., Mississauga,
Ont. L5N 5N1., CANADA
TEL:1-(905)821-1261 FAX:1-(905)821-4968
Montreal Office7075 Place Robert-Joncas Suite 129, Montreal,
Quebec H4M 2Z2, CANADA
TEL:1-(514)337-5994 FAX:1-(514)337-4498

Aguascalientes Office / M³ Solution Center
Av. Aguascalientes No. 622, Local 15 Centro Comercial El Cilindro Fracc. Pulgas Pandas Norte, C.P.
20138, Aguascalientes, Ags. MÉXICOTEL: 52 (01-449) 174-4140 and 174-4143

BrazilIrapuato Office / M³ Solution Center
Boulevard a Villas de Irapuato No. 1460 L.1 Col. Ejido
Irapuato C.P. 36643
Irapuato, Gto., MÉXICOTEL: 52 (01-462) 144-1200 and 144-1400

Mitutoyo Sul Americana Ltda.
Head office / M³ Solution Center / Factory
Rodovia Índio Tibiriçá 1555, CEP 08655-000 Vila Sol Nascente - Suzano - SP - BRASIL
TEL:55 (11)5643-0040
Argentina
Mitutoyo Sul Americana Ltda.
Argentina Branch / M³ Solution Center
Av. B. Mitre 891/899 – C.P. (B1603CQI)
Vicente López –Pcia. Buenos Aires – ARGENTINA
TEL:54(11)4730-1433 FAX:54(11)4730-1411
Sucursal Cordoba / M³ Solution Center
Av. Amadeo Sabattini, 1296, esq. Madrid Bº
Crisol Sur – CP 5000, Cordoba, ARGENTINATEL/FAX:54 (351) 456-6251
MexicoMitutoyo Mexicana, S.A. de C.V.
Industria Elēctrica No.15, Parque Industrial, Naucalpan de Juārez, Estado de Mēxico C.P.53370,
MÉXICO
TEL: 52 (01-55) 5312-5612
FAX: 52 (01-55) 5312-3380
Monterrey Office / M³ Solution Center
Blv. Interamericana No. 103, Parque Industrial
FINSA, C.P. 66636 Apodaca, N.L., MÉXICOTEL: 52(01-81) 8398-8227/8228/8242/8244
FAX: 52(01-81) 8398-8226
Tijuana Office / M³ Solution Center
Calle José María Velazco 10501-C, Col. Cd. Industrial
Nueva Tijuana, C.P. 22500 Tijuana, B.C., MÉXICOTEL: 52 (01-664) 647-5024
Querétaro Office / M³ Solution Center
Av. Cerro Blanco No.500-1, Colonia Centro Sur,
Querétaro, Querétaro, C.P. 76090, MÉXICOTEL: 52 (01-442) 340-8018, 340-8019 and 340-8020
FAX: 52 (01-442) 340-8017

App-6

Revision Record
Date of publication
January 1, 2019
January 1, 2021

Revision status
Sixth edition
Seventh edition

Details of revision
Completely revised and issued
Revision due to changes of theharmonized European standards, etc.

No. 99MBE011A

Mitutoyo Corporation
20-1, Sakado 1-Chome, Takatsu-ku, Kawasaki-shi, Kanagawa 213-8533, Japan
Tel: +81 (0)44 813-8230 Fax: +81 (0)44 813-8231
Home page: http://www.mitutoyo.co.jp/global.html
For the EU Directive, Authorized representative and importer in the EU:
Mitutoyo Europe GmbH
Borsigstrasse 8-10, 41469 Neuss, Germany
Printed in Japan
No. 99MBE011A