Business in
MEMS CoreMEMS Core Co., Ltd.
1

Background of MEMS CORE
Founded by the collaboration ofuniversity and company
Esashi Laboratory, Tohoku University
Prof. Masayoshi Esashi
Abundant experiences in
MEMS R&D:
technologies accumulated over 35 years

Chemitronics Group
CEO: Koji Homma

Abundant experiences in
Semiconductor manufacture equipments :technologies accumulated over 25 years

Cooperation of technology
Establishment ofMEMS Core Co., Ltd.

Original MEMS products

End of 2001

2

The company profile
Founded: December 2001
Capital: 610 million yen
Chairman： Koji Homma
President: Yoshiteru Keikoin (CEO)Employees: ４５Sites: Head office and Izumi Factory
3-11-1 Ake-dori, Izumi-ku, Sendai City, MiyagiPrefecture
Tel: 022-777-8717, Fax: 022-777-8718

3

Business field
MEMS“Turn ideas into products”
Using

Realizing
Manufacturing
Ideas(user’s)
DesignDevelopment/
Prototype

Products

Trialproduction,
small-lotproduction

MEMS Core Co., Ltd.

Massproduction

External foundry

4

MEMS facility
As a group of hands-on makers creating new-generation MEMS, we turn dreams into reality by flexible
development capabilities and creative strengths through keeping a very close relation with the users.
We are at your services with various MEMS devices for prototype development.
Annealing and doping•Oxidation furnacesDeposition•Low-pressure plasma CVD•Low-pressure plasma CVD•Metal—organic CVD•EB deposition•Three-source sputtering•Sputtering
Dry etching•RIE•Deep RIE
•Equipment for dry-etching ofsacrificial film
•Ion-milling•Laser-processing machines•Plasma ashing•Glass RIE

Photolithography•Two-plane mask aligner•Spin coaters•Pattern generators•CAD•Clean ovens•HMDS coating equipment
Inspection and measurement•FTIR•SEM•Measuring microscopes•Non-contact profilometers•Optical thickness meters•Stylus-type profilometers•Metallurgical microscopes•Stereoscopic microscopes•Wafer probers•Stress meters•Sheet-resistance meters

Wet processes•Ozone—water etching•Draft chambers for inorganic work
•Draft chambers for organic work
Others•Equipment for room-temperature plasma
processing of surfaces•UV-cleaning equipment•Anodic bonding equipment•Polishing machines•Dicers•Plating equipment•Thermo-compressive bonding equipment•Sand-blasters
Utilities•Water purification equipment•Abatement equipment (scrubbers)•Water scrubber

5

Development experience
Items
Technology
Optical accelerometer Laser interference

Application
Seismic monitoring

RF switch

Magnetic driveElectric device

Interposer

Through Silicon Via

3D IC Technology

Blood glucose sensor Micro pump

Medical apparatus

Mirror device

Scanner, Switch

Electric device

Ultrasonic probe

Capacitive type

Medical apparatus

Gyro Sensor

Capacitive type

Electric device

Tactile sensor

Piezo sensor

Robot

Accelerometer

Capacitive type

Oil Exploration

Magnetic Heads

Coil

Disk device

Probe pin

Deep RIEIC tester

Nerve electrode

Minute needle processing Medical apparatus
7

Technology (1) Dry etching of sacrificial layers
Example of processing to etch a sacrificial layer of oxide film

Water repellent treatment
Can be processed continuously with etching8Technology (2)Si DRIE

9

Laser Dicing

STEALTH DICING
Blade Dicing

Laser processing
STEALTH DICINGSTEALTHDICING/SDE are registered trademarks of HAMAMATSU PHOTONICS K.K.

10

Stance in MEMS CORE
Basic stance
Responds to a system maker's needs quickly

GeneralCustomers

Makers ofmachinery& equipment

Customers(Set & System makers)
Systemfabrication &sale(instruments &devices)

OrderPartners inenterprise

MEMS CORE

University

BasicAdvice• Device designtechnology• Prototype
verification
System house• MEMS fabrication
SystemCooperates(prototype)development• Evaluation

Universities(experimentation)

Order

Products & Delivery

External fab.
Massproduction11Summary

Advantages of MEMS Core；
1. Development Experience of various
MEMS devices
2. Using of the accumulated knowledge
3. Support from Tohoku University
4. Exact Quick Customer Service

12Access to MEMS CORE
MEMS CORE

By Sendai Subway Namboku Line
from SENDAI to Izumi-chuo(about 16 min)Izumi-chuo

By taxi
from Izumi-chuo to MEMS CORE
(about 10 min)Sendai Subway
Namboku LineSendai

3-11-1 Akedori Izumi-ku Sendai-shi Miyagi-ken 981-3206 Japan
TEL:+81-22-777-8717

13