Coordinate Measuring Machines

Probes for Coordinate Measuring Machines

Catalog No. E16005(5)A wide range of probes supports various kindsof your measurement applications
Probes for Coordinate Measuring Machines
Scanning Probes■■■

Page No.

28, 29●Page No.

Application of the
Touch-trigger Probe

8, 9

30

Application of the
Touch-trigger Probe▲●

Page No.

PH1

Manual Probe Head
▲

6, 7

●

■

▲

Page No.

SP25M

Compact High-accuracy
Scanning Probe

PH10M/PH10MQ

Motorized Probe Head
▲

●

■

▲

4, 5

▲

Page No.

SP80

High-accuracy
Scanning Probe Can
Use Very Long Styli

Ultra High-Accuracy
Scanning▲●

MPP-310Q

Probe Heads

Page 4~33

5-axis Control System Probes■

SP600Q■

High-accuracy
Scanning Probe

SurfaceMeasure

Non-contact Laser
Probe

●

Page No.

31

QVP

Quick Vision Probe

CF20

Centering Microscope for
Coordinate Measuring Machines

Page No.

●●16, 17

Rotary Tables for CNC CMM

ACR3

■

■

●

Automatic Probe
Changer▲

Page No.

32

MRT240/MRT320/
QS600/800

Rotary table●

Page No.

▲

Page No.
14, 15■

Probe Changer▲

12, 13■▲

Page No.

▲

●

31

PH20

5-axis Control
Touch-trigger System

10, 11

Non-contact Probes■

Page No.

■▲▲

Page No.

▲●●

REVO-2High-speed 5-axis
Control Scanning Head

33

Special-purpose Probes■

Page No.

▲●SURFTEST PROBE

Surface Roughness
Probe
18, 19

Touch-trigger Probes■

2Page No.

22, 23■●

TP20

Compact Touch-trigger
Probe

Page No.

24, 25

MH20i

Touch-trigger Probewith Manual Probe Head

Page No.

▲

●

●

TP200

Compact High-Accuracy
Touch-trigger Probe▲■20, 21■▲Page No.

▲

●

TP7M

High-Accuracy
Touch-trigger Probe

Quick Guide to Styli· ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  · Page 34
Product Identification on Styli for Coordinate Measuring Machines ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  ·  · Page 36
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26, 273

MPP-310Q Ultra High-Accuracy Scanning

MPP-310Q Ultra High-Accuracy Scanning

42 mm

50 mm

175.5 mm147.5 mm

50 mm

ø46 mm
ø92 mm

MPP-310

MPP-310Q

Set configuration
Unit

Ref. No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18

MPP-310Q(S)Probe set

Fast scanning
MPP-310Q
System (S)Clamp set

Description
MPP-310Q probe main unit
Damping oil
Allen wrench / GXL-20
Allen wrench / GXL-30
Storage box
MS4-4R13.5-S
MS4-4R33-S
MS4-EXT30C
MS4-EXT50C
MS4-EXT100C
MS4-stylus knuckle
MS4-stylus center
stylus tool
MPP-310Q Hardware Guide
EXT CONTOUR cable A
EXT CONTOUR short cableAC cable
MPP-310 Clamp unit

1

2

5

7
4

6

*1 Increase in stylus length or stylus mass may reduce accuracy.
*2 Note that some probes are subjected to the limitation of mounting or unable to mount.

4- 4 standard units [Port 1 is dedicated for the standard stylus (for calibration purpose)]- Expandable to max. 10 ports. Note, all styli should be arranged on the same axis.

Optional units

M4-M4 ceramics Extension L=30 mm
M4-M4 ceramics Extension L=50 mm
M4-M4 ceramics Extension L=100 mm
For attaching/detaching M4 stylus
EnglishFor overseas specification
Desktop unit

9

50

600
60

80

20

28

DetailRef. No.
Description Qty
Remarks
Auto-stylus change rack 1 Supplied with 4 ports for replacement.
1
Automatic
Stylus mount assembly 3 Used for installing a rack on the CMM base.
2stylus3
Auxiliary plate
14
MS4-4R13.5-S3change5MS4-stylus center 3
system6
Reference sphere 1 For re-calibration

115
80

New rack

5

6
1

20
ø50

18

Unit

33
60

15
12

Unit: mm80

14

Sø4 ruby ball

Measuring range

60

17

100

11

Dimensions

80

13

Automatic Stylus Changer

200

Automatic stylus
change system(optional)±1 mm
0.01 μm
1.1 μm (60 sec) (LEGEX500/700/900: when the ø4×18 mm stylus is used.)
0.4 μm (LEGEX500/700/900: when the ø4×18 mm stylus is used.)
0.2 N/mm
200 mm for both vertical and horizontal *1
75 g *1
M4 thread
120 mm/s [for known geometry scanning]
30 NL/min
N/A
CNC CMM*230

3

Sø4 ruby ball

Measuring range
Resolution
Scanning error MPETHP (JISB 7440-4: 2003)
Single stylus shape error PFTU.MPE (JIS B 7440-5: 2013)
Spring rate
Max. stylus lengthMax. stylus mass
Stylus mountMax. tracing speed
Air flow rate
Probe head
Applicable models
No. of mountable stylus modules

Wooden box for storing MPP-310Q

16

8

10

Optional units

MPP-310Q

Remarks
Including one stylus mount assembly
Silicon oil (2000CS)

Note: Some items cannot be ordered separately.

A wide variety of optional units, including rotary table for synchronized scanning and theautomatic stylus change system, is available.

MPP-310Q Specifications

Qty
1
1
1
1
1
1
5
2
1
1
1
1
2
1
1
1
1
1

50

For a scanning measurement, either of the following scanning methods can be selected:
one in which scanning progresses while automatically following an unknown geometry(unknown geometry scanning), or one in which scanning progresses based on the locusof the probe tip given beforehand (known geometry scanning). With known geometry
scanning it is possible to perform fast scanning at 120 mm/s.
Conventionally, it is normal to evaluate geometries such as a line or a circle through point
measurement. However, for evaluating the flatness or roundness of an extra precisionmachined workpiece, it is better to improve the reliability of the measurement result by
evaluating the object at more measurement points.
Naturally, it takes an extended amount of time for a touch-trigger
probe to measure such an object point by point if very many
points are involved. In contrast, the MPP-310Q can, for example,
complete a measurement in just a few seconds even if it is required
to measure an inside diameter of 100 mm using 1000 measurement
points. In addition, measurement can be pursued effectively while
Centering point changing the scanning speed, depending on the measurement
measurement accuracy required.

An example scanning measurement of a ring gage with the LEGEX series and MPP-310Q

ø46 mmø88 mm18

Low measuring force
The ordinary touch-trigger probe, even if it needs only a small force to generate a trigger
signal the moment the stylus actually comes into contact with the workpiece, may be apply
several tens to several hundred grams of force in the over-travel period that immediately
follows contact. In addition, some scanning probes from other manufacturers employ such astructure that the motor drive mechanism forcibly determines the probing position in orderto permit the use of a longer stylus, necessitating the probe to actually produce a greatermeasuring force.
In contrast, the MPP-310Q can reduce its measuring force to a minimum of 0.03 N so thatit can even measure elastic workpieces such as resins, etc., without damaging them at all.

32 mm

Omni-directional scanning
The MPP-310Q has internal high-accuracy scales with a minimum resolution of 0.01 µm
for each direction (X, Y, and Z axes), which makes it possible to read the stylus displacement
in any direction.
The air bearing employed in the sliding section of each axis helps enable this probe withminimum directionality.

96 mm
82 mm

50 mm

Fast scanning
The MPP-310Q is a multi-functional probe designed for CNC coordinate measuringmachines. It can not only perform a continuous path contact-type scanning measurement[a measurement method that implements a collection of a large amount of coordinate
data while traveling along a continuous path in contact with the workpiece] at V2≤0.3 µm(reference value when the LEGEX series is installed), but also high-accuracy point
measurement of ≤0.1 µm (on the LEGEX CMM series), and data collection from a centering
point measurement.

Dimensions
96 mm
ø14 mm5

28

ø50

Unit: mm

2
M4

110

Measuring range

90

3

108
720

5

SP80 High-accuracy Scanning Probe Can Use Very Long Styli

SP80 High-accuracy Scanning Probe with Long Stylus Carrying Capacity
Dimensions
6 mm

High accuracy achieved even with very long styli
The SP80 scanning probe is designed to achieve high measurement accuracy even whenusing styli up to 500 mm (in both the horizontal and vertical directions) in length. It is amulti-function probe for CNC coordinate measuring machines that undertakes not only
scanning measurement (a measurement method that collects a large amount of coordinate
data while traveling along a path in contact with the workpiece) but also high-accuracy point
measurement as well as data collection from a centering point measurement.

KM80

106 mmOptional units
A wide variety of optional units, including rotary table MRT320 for
synchronized scanning and the automatic stylus change system,
is available.

SH80

11 mm

21 mm

41 mm

For scanning measurement, either of the following scanning methods can be selected: one inwhich scanning progresses while automatically following an unknown geometry (unknown
geometry scanning), or one in which scanning progresses based on the locus of the probe
tip given beforehand (known geometry scanning). With known geometry scanning it ispossible to perform fast scanning at 120 mm/s. Conventionally, it is normal to evaluate
geometries such as a line or circle through point measurement. However, for evaluating theflatness or roundness of an extra precision-machined workpiece, it is better to improve thereliability of the measurement result by evaluating the object at more measurement points.
Naturally, it takes an extended amount of time for a touch-trigger probe to measure suchan object point by point. In contrast, the SP80 can, for example, complete a measurementin just a few seconds, even if it is required to measure an inside diameter of 100 mm using
1000 measurement points. In addition, any measurement can be pursued effectively whilechanging the scanning speed, depending on the measurement
accuracy required.

Centering point
measurement

SP80 main unit

150 mmFast scanning

5 x M522 mm

Set configuration
SP80 main unit
Description
SP80 Probe kit #1

Mass (kg)Remarks
2.6
One SP80 main unit, SH80, KM80, and ø8X60 mm stylus

Parts for SP80

KM80

Description

Qty
1
1
1
1
1
1
1
1
1

SP80 adapter
SP80 Probe cable
SP80 EXT cable
IU 80
SP80 Power Supply BOX
OPT200S-MPP2
OPT200 attachment
Control ROM (MAIN)
Control ROM (OPT)SP80 main
unit

SH80

Note: Some items cannot be ordered separately.

Optional units

Automatic Stylus Changer
MRS

SP80 stylus change set 1 (600 mm-rail specifications)
Description
MRS kit #2
SH80
SCP80
Rack plate (auxiliary plate)
ACR3 attachment screw

SP80 Specifications
SP80

Measuring range
Scanning error
Spring rate
Max. stylus lengthMax. stylus mass
Stylus mountMax. scanning speed
Probe head
Applicable models*1 Increase in stylus length or stylus mass may reduce accuracy.
*2 Note that some probes are subjected to the limitation of mounting or unable to mount.

±2.5 mm
MPETHP<–2.0 μm (CRYSTA-Apex V700/900: when the ø4x50 mm stylus is used.)
1.8 N/mm
500 mm *1
500 g *1
M5 thread
120 mm/s [for known geometry scanning]
N/A
CNC coordinate measuring machines *2

SCP80
SCP80
34 mm

Unit
1
1
2
1
1

SP80 stylus change set 2 (1000 mm-rail specifications)
Description
MRS kit #3
SH80
SCP80
Rack plate (auxiliary plate)
ACR3 attachment screw

Unit
1
3
4
1
1

230 mm
128 mm6

7

SP25M Compact High-accuracy Scanning Probe

Dimensions

SP25M

Configuration

Description
SP25M full combination kit
SP25M probe kit #1
SP25M probe kit #2
SP25M probe kit #3
SP25M probe kit #4
SP25M probe kit #5
SM25M scanning module kit #1
SM25M scanning module kit #2
SM25M scanning module kit #3
SM25M scanning module kit #4
SM25M scanning module kit #5
Stylus holder SH25-1
Stylus holder SH25-2
Stylus holder SH25-3
Stylus holder SH25-4
Stylus holder SH25-5
TM25-20 TP20 adapter kit
TM25-20 TP20 adapter

Enhancing the setup and measurement efficiency throughautomatic change of probe orientations
Since the SP25M can be mounted on a probe head such as the PH10M/PH10MQ that
automatically changes the probe orientation, it can greatly reduce the preparation time formeasurement and for actual measurement in comparison to a conventional-type scanning probe
whose position is fixed downward. In addition, the use of other probes, as advantaged by theprobe change system, makes it possible to realize full automation in measuring various forms ofmachined parts.

Optional units
An automatic stylus change system is available.

Centering point
measurement

38.8

63.05

ø4

86.7

SM25-5

Mountable stylus:
20 to 100 mm long

310.85

SM25-448.05

SM25-3

ø5.5
Mountable stylus:
20 to 200 mm long(Overall stylus length 220 to 400)

195.85

SM25-2
33.85

SM25-1

Mountable stylus:
20 to 100 mm long(Overall stylus length 120 to 200)

74.05

TP20 module

Fast scanning

Mountable stylus:
26.25
20 to 75 mm long(Overall stylus length 50 to 105)111.65

ø13.25

16.95

ø25

The SP25M is a compact high-accuracy scanning probe with an outside diameter of ø25 mm.
This is a multi-functional probe designed for CNC coordinate measuring machines that can
not only perform a continuous path contact-type scanning measurement [a measurement
method that implements collection of a large amount of coordinate data while traveling along acontinuous path in contact with the workpiece], but also high-accuracy point measurement anddata collection from a centering point measurement.
For a scanning measurement either of the following scanning methods can be selected: onein which the scanning progresses while automatically following an unknown geometry(unknown geometry scanning), and one in which scanning progresses based on the locus of
the probe tip given beforehand (known geometry scanning). With known geometry scanning
it is possible to perform fast scanning at a maximum of 120 mm/s. Conventionally, it is normal
to evaluate geometries such as a line or a circle through point measurement. However, forevaluating the flatness or roundness of an extra precision-machined workpiece, it is better toimprove the reliability of a measurement result by evaluating the object at more measurement
points. Naturally, it takes an extended amount of time for a touch-trigger probe to measuresuch an object point by point if very many points are involved. In contrast, the SP25M can,for example, complete a measurement in just a few seconds even if it is required to measure
an inside diameter of 100 mm using 1000 measurement points. In addition, it can pursue any
measurement effectively while changing the scanning speed, depending on the measurement
accuracy required.

TM25-20

Mountable stylus:
20 to 50 mm long

Compact high-accuracy scanning probes

Unit: mm
62.50

45.55

SP25M Compact High-accuracy Scanning Probe

Remarks
A complete set of SP25M, SM25-1/2/3, SH25-1/2/3, and TM25-20
A complete set of SP25M, SM25-1, and SH25-1
A complete set of SP25M, SM25-2, and SH25-2
A complete set of SP25M, SM25-3, and SH25-3
A complete set of SP25M, SM25-4, and SH25-4
A complete set of SP25M, SM25-5, and SH25-5
A complete set of SM25-1 and SH25-1
A complete set of SM25-2 and SH25-2
A complete set of SM25-3 and SH25-3
A complete set of SM25-4 and SH25-4
A complete set of SM25-5 and SH25-5

A set of TP20 standard force module and TM25-20

Note: TTP module (TP20module) will be supported for MCOSMOS V2.4 or later releases.

Auto module changer/Automatic Stylus Changer
39

21.6 mm

Measuring range
Scanning error
Spring rate
Amount of over travel
Max. stylus length
Stylus mountMax. scanning speed
Probe head
Applicable models±0.5 mm
MPETHP ≤2.3 μm (CRYSTA-Apex V700/900: when the ø4x50 mm stylus is used.)
0.2~0.6 N/mm
XY: ±2 mm Z: +1.7 mm/-1.2 mm
200 mm (When SM25-3 or SH25-3 is used.)*M3 threaded
120 mm/s [for known geometry scanning]
Essential: PH10M/PH10MQ
CNC coordinate measuring machines

113.8 m
m

.5
74

FCR25

mm

PA25-20219.5 mm

PA25-5H
113.8 mm

166 mm

SP25M

35 m mmm

166 mm

SP25M Specifications

.5

28 mm

Optional units* Increase in stylus length or stylus mass may deteriorate the accuracy.
FCR25-L6 (6 PORT)* SP25M internally uses the high-power LED light source.
Exercise caution when handing, in accordance with the User's Manual.

8

FCR25-L3* Can be mounted on the MRS rack.

9

SP600Q Compact High-accuracy Scanning Probe

SP600Q High-accuracy Scanning Probe
Compact high-accuracy scanning probes
SP600Q is a high-accuracy scanning probe which can be mounted on the CRSTA-Apex
V500 series. It performs not only scanning measurement (measurement method thatcollects a large amount of coordinate data while traveling along a path in contact with theworkpiece), but also high-accuracy point measurement. Direct-mount of this probe on the Z
spindle of CRYSTA-Apex V500 allows more effective usage of measurement space.

Dimensions

Fast scanning
For a scanning measurement either of the following scanning methods can be selected:
one in which the scanning progresses while automatically following an unknown geometry(unknown geometry scanning), and one in which scanning progresses based on the locusof the probe tip given beforehand (known geometry scanning). With known geometry
scanning it is possible to perform fast scanning at a maximum of 120 mm/s. Conventionally,
it is normal to evaluate geometries such as a line or a circle through point measurement.
However, for evaluating the flatness or roundness of an extra precision-machined workpiece,
it is better to improve the reliability of a measurement result by evaluating the object at moremeasurement points. Naturally, it takes an extended amount of time for a touch-trigger
probe to measure such an object point by point if very many points are involved. In contrast,
the SP600Q can, for example, complete a measurement in just a few seconds even if it
is required to measure an inside diameter of 100 mm using 1000 measurement points. In
addition, it can pursue any measurement effectively while changing the scanning speed,
depending on the measurement accuracy required.

Optional units

Set (No. 06ADV933) configuration

An automatic stylus change system is available.
Description

Part No.

Qty

SP600Q Probe kit

06ADV5971

Spacer A for SP600Q

06ADU577

1

Spacer B for SP600Q

06ADU578

1

SP600Q Head cable

06ADU687

1

SP600 IF cable

06AAS624A

1

ø4L50 stylus (MS4-4R33C)

06ABQ149

1

L50 Extension (MS4-EXT50C)

06ABN8491

Stylus center (MS4-stylus center)

06ABN857

1

Knuckle joint (MS4-stylus knuckle)

06AAD460

1

SP600Q User’s Manual

99MCA562A

1

Optional units

Stylus Changer SCR600

SP600Q Specifications
SP600Q

Measuring range
Min. reference displacement
Spring rate
Measuring force
Max. stylus mass
Max. stylus length
Stylus mount
Probe head
Applicable models

235 mm±1 mm (X, Y, Z)
0.15 mm
1.2 N/mm
0.17~1.18 N (18~120 gf) Varies depending on the probe displacement.
Max. 20 g *1
Max. 200 mm *1
M4 thread
Unnecessary
CNC coordinate measuring machine *2

31.50 mm

*1 Increase in stylus length or stylus mass may reduce the accuracy.
*2 Note that some probes are subjected to the limitation of mounting or unable to mount.

225 mm

ø55 mm10

11

SurfaceMeasure Non-contact Line-Laser Probe

SurfaceMeasure Non-contact Laser Probe

MSURF-S/MSURF-I

Scanning (MSURF-S)
High-speed scanning
SurfaceMeasure is a probe that captures coordinates data from a workpiece by shining alaser on the surface. This method allows ultra-fast data acquisition of 300,000 points/sec*.
* When SurfaceMeasure 1110 is used

Scanning paths can be created by simply defining three items: thescanning starting point, the scanning length, and the scanning width.
These three items can be easily defined by using the joystick while
checking the camera preview.

Advantage of non-contact measurement
Non-contact measurement makes it possible to measure elastic bodies such as resin andthin-walled parts which are not suitable for contact measurement.

Powder-sprayless measurement
By automatically adjusting the laser intensity and camera sensitivity according to theenvironment and the workpiece material, the SurfaceMeasure has achieved powder-spraylessmeasurement, providing a simpler and more comfortable laser-scanning environment.

Application examples• MSURF PLANNER (optional)
MSURF PLANNER software automatically generates measurement macros (surface shape,element shape) for line laser probes from 3D CAD data.
The optimized measurement path (movement path, number of probe head rotations, etc.) helps
increase productivity.

Obtained point-cloud data can be used for various purposes with optional software, such as
editing, surface generation, comparing with CAD data, creating CAD data, etc.

Automatic generation of measurement macros by MSURF
PLANNER

Since MSURF-S can be started from MCOSMOS, automatic measurementsthat merge “contact” and “non-contact” measurements can be executed.

Measurement of color sample plate

Measurement of shiny workpiece* If the work coordinate system created in MCOSMOS is used, positioning by the software programs designed forprocessing point-cloud data is not required.

SurfaceMeasure403

Item/Model

SurfaceMeasure 403

Laser irradiation method
Max. scan width
Max. scan depthWorking distance
Scanning error *1
Probing dispersion value*2 (95%) P form.Sph.D95%:Tr:ODS
Max. Acquisition rate
Mass
EN/IEC
Laser ClassJIS
Laser Type
Wave length
Line Laser
Output

1110

201FS

SurfaceMeasure 1110

40 mm
30 mm
66 mm
8 µm
− *3
60,000 points/sec
430 g• Planar shape comparison
Point-cloud data or mesh data can be compared with CAD data, and the planar shape errors displayed on a color map.

Flying spot
23 mm
15 mm
57.5 mm−
8.0 µm25,000 points/sec.
500 g

110 mm
100 mm156.5 mm9 µm
36 µm
300,000 points/sec
440 gClass2 [ IEC 60825-1: 2014/ EN 60825-1: 2014+A11:2021 ]Class2 [ JIS C 6802: 2014 ]Semiconductor
660 nm
2.5 mW

4 mW

Inspection (MSURF-I)

SurfaceMeasure 201FS

Beam expansion

Color map of errors

670 nm
1 mW

606T

171

289

57.5

60

50
15

170

12

100

110 6060

100• Feature-by-feature comparison
Various features can be detected from point-cloud data or mesh data andcompare them to the design data.

140

60

Cross-sectional evaluation (dimension computation)
60

Evaluation of steps and gaps

TDS-H
286

147.5
100

100

60

201FS

High-sensitivity, generalpurpose measurement

65

170

140

203.5

282

115

15

286

147.5

50

165

93

106.5
171 282
165

57.5

100
65

100

100

40

1010TDS-H

purpose measurement

60

（68）

610
201FS
High-sensitivity, general115

606
606T
1110

General-purpose
General-purpose
measurement
measurement

115 240267.5
123156.5289
203.5

51
30

66
282
165

165

115

282

183

403
1010

General-purpose
measurement

Color map of wall thickness• Comparison of cross-sectional shapes
Point-cloud data / mesh data and CAD data can be cut at the specified
position to compare cross-sectional shapes or compute angles, distances,
radii, etc.

*1 According to Mitutoyo’s test procedure. (1σ/sphere measurement, probe alone)*2 According to ISO10360-8:2013 test procedure. (probe alone)*3 Please contact your local Mitutoyo office.

610* Note: If ACR3 is not used, the probemust be manually changed.

Various kinds of elements
computation

60

13

QVP Quick Vision ProbeQVP Quick Vision Probe

Dimensions

Optional accessories

Provides image measuring capability for coordinate measuring machines

26

66

40

32

50
ø25

Calibration gage (02AQC310)

・Gage for sharing the coordinates
between the QVP and contact-type
probe
182.7

113

The QVP probe performs form measurement by image processing micro geometry thatcannot be measured by a contact type probe, or elastic bodies that are easily deformed byslight measuring forces. Although the method of microscopic measurement with a centering
microscope mounted on the coordinate measuring machine has been used since coordinate
measuring machines came into use in the industry, they have an inherent disadvantage inthat the operation of identifying positions is dependent on the operator’s eye, resulting
in possible measurement errors. Even with a CNC coordinate measuring machine
manual measurement must be performed sometimes, such as with an installed centering
microscope. The QVP probe is a vision probe dedicated for coordinate measuring machines
and was developed based on Mitutoyo’s state-of-the-art technology, in order to enable fullautomation of image measurement with a CNC coordinate measuring machine.

Objective ML1X (375-036-2)
Objective ML5X (375-034-1)
Objective ML10X (375-039)

ø70Standard provision of white LED illumination
Since the QVP is equipped with the standard co-axial light running through the lens system
as well as white-light LED ring illumination, which is bright and has a long service life, noauxiliary illumination is required. The light volume can be set to between 0 and 100% in
1% increments.

Use with an Automatic Probe Changer
The QVP can also be mounted on an automatic probe changer, allowing full-automatic
measurement with both contact and non-contact probes.

W.D.=72.3

The QVP-captured image will have various automatic edge detections performed by
the dedicated software, VISIONPAK, and then various calculation processes (calculationof dimensions and geometrical deviations) will be performed by the general-purpose
measurement program, Geopak.

37.7

Automatic detection of workpiece edge
Calibration chart(02AKN020)

QVP-A(Auto joint type)・Gage for calibrating a single
QVP unit

Unit: mm

Data processing unit
• Dedicated data processing software VISIONPAKVISIONPAK operates under the Microsoft Windows operating system and is a generalpurpose measurement program for coordinate measuring machines. It displays theimage window when it detects a workpiece edge. After detecting an edge, it undertakes
various calculations with the regular general-purpose measurement programs.
• Wide variety of image processing functions
With its powerful image processing functions (tools), it can detect various forms ofedges at high speed. It can measure in the height direction by means of its auto-focus
function, and save the captured image as the image data (bitmap format).
• Outlier removal function
In ordinary micro-form measurement it is often difficult to remove burrs and dusts
from the objective workpiece, resulting in an inevitable measurement error. In contrast,
VISIONPAK can recognize, for example, the obstruction as an "outlier" and bypass it
during measurement.

VISIONPAK Image Processing ToolQVP Specifications
QVP main unit

Objective

QVP
I/F BOX

14

CCD size
Optical tube magnification
Co-axial
Illuminating
function
Ring
Mass
Optical magnification
Observation range (mm)Working distance (mm)Magnification
Numerical Aperture (N.A.)
Depth of focus (μm)
MassSupply voltage
Frequency
Power capacity
Mass

Simple tool

0.375×9.6×12.8
61
ML1x
Optional
0.03
306
80 g

1/3 inch (B/W)
0.375×White light LED source (built-in): Power dissipation 5 W or lessWhite light LED source: Power dissipation 10 W or less
Automatic-joint type: 315 g, shank type: 390 g
1.125×1.875×3.2×4.3
1.9×2.6
72.3
61
ML3×
ML5×
Standard
Optional
0.09
0.13
34
16.3
55 g
60 g
AC100 to 240 V
50/60 Hz
30 W
3800 gUsed for detecting a single point on the edge
pointed to by the arrow.
3.75×
1×1.3
51
ML10×
Optional
0.21
6.2
95 g

Box tool
Used for multiple-point line measurement of anedge caught in the box

Circle tool
Used for multiple-point measurement of a circle
for the objective circular edge. As with the box
tool, it can collect data that is free from theeffect of burrs and dust.

Manual tool
Used for detecting an optional position pointed
to (clicked on) by the mouse.

Centroid tool
Used for detecting the center of gravity of an
optional form.

Edge self-tracing tool
By simply specifying the start point andmeasurement interval, the objective edge canbe detected while automatically tracing an
unknown geometry.

15

CF20 Centering Microscope for Coordinate Measuring Machines

CF20 Centering Microscope for Coordinate Measuring Machines

12

77.8
(working distance)
110(parfocal distance)

5

ø25

ø30

ø25
32.2

37.5
5

77
(working distance)
110(parfocal distance)

ML 10X

50.5

ø30

ML 5X

92
(working distance)
110(parfocal distance)

Unit: mm

ML 3X

ø30

ø25
18

ø30
ø14.5

5

10.5

CCTV Monitor System for CMM with CF20 (optional)

ø30
ø22

73.7
(working distance)
110(parfocal distance)

ø30
ø17

CCTV Monitor System for CMM with CF20 (optional)

CF 3X

36.3

To cope with the size and form of a workpiece to be observed and measured, lenses ofvarious magnifications and reticles for form comparison are provided.
CCD camera (optional) to be installed on model CF20. The image can be viewed on themonitor of the PC on which the dedicated software is installed.
This is a great aid in relieving eye stress, especially if several hours of work must be done.

CF 2X
ø25

Optional accessories to implement various evaluations

CF 1X

ø25
ø28

The CF20 is a centering microscope that enables measurement of small holes and elastic
bodies which are difficult for a touch-trigger probe to measure. With the CF20 the coordinate
measuring machine can be used as a large microscope.

Objectives (optional)

ø30
ø26

Use the coordinate measuring machine as a large microscope

61(working distance)

110(parfocal distance)

Code No.

Description

375-031375-032375-033
375-037-1
375-034-1
375-039

CF 1X
CF 2X
CF 3X
ML 3X
ML 5X
ML 10X

59
10

51(working distance)

110(parfocal distance)

Numerical
Aperture (N.A.)
0.03
0.06
0.07
0.09
0.13
0.21

Working distance
W.D. (mm)
73.7
92
77.8
77
61
51

Resolution
R (µm)
9.2
4.6
3.9
3.06
2.12
1.31

Depth of focus of single objective lens
±D.F. (µm)
306
76
56
34
16.3
6.2

Mass
(g)
45
35
35
55
60
95

* Values for resolution and depth of focus of a single objective lens are calculated based on the reference wavelength (λ=0.55 μm).
* The real field of view (mm) can be obtained from Field number/Objective magnification.

CF20 monocular set dimensions

Unit: mm

ø14 mmFiber optic circular illumination unit
(176-366)

1

mm

10

211

50 mm

1

Eyepiece

0.2 0.2

Twin-fiber optic illumination unit (176-344)

ø18(cross hair andconcentric circle)
No. 375-021
10X eyepiece A

30˚

22.5 mm
117 mm

CF20 main unit

Monocular unit

51 mm

Objective(optional)
Illumination unit

CF20 monocular set (375-201)

No. 375-022
10X eyepiece B

No. 375-023
10X eyepiece C

No. 375-024
10X eyepiece D(1) Camera system (CC-1000V)

Binocular unit

Monocular unit

Lamp-house

Main unit

Main unit

DonglePowersupply box

CF20

Specification

CF20 monocularset (375-201)

CF10X eyepiece, field number 22
Cross hair and concentric circle reticle

CF20 binocularset (375-202)

CF10X eyepiece, field number 22 / Cross hair and concentric circle reticle (right)
Pupil distance adjustment: 51 - 76 mm

Objective−−

Software (CD)User’s Manual

CF20 main unit

16

(grid)

Shank (ø14mm)

Shank (ø14mm)

Description

10(90º/60º dash-dot line)

CCTV Monitor System for CMM with CF20 [Code No. 320-055]

Illumination unit (375-071)

CF20 binocular set (375-202)

60º(cross hair)

1. Illumination unit (375-071)
2. Spare lamp (162151)
3. Lens cap
4. Tools
5. Power cable
6. User's Manual
7. Storage box

USB cable (5 m)

CameraAccessory(2) C-mount adapter (C)PC

MonitorCCTV Monitor System for CMM with CF20

Ref. No.
1
2

Description
Camera system
C-mount adapter (C)

Qty
1
1

17

SURFTEST PROBE Surface Roughness Probe

SURFTEST PROBE Surface Roughness Probe
Roughness measurement function added to CNC CMM

Dimensions

The SURFTEST PROBE is a probe that can measure surface roughness while mounted on
a CNC coordinate measuring machine.
This probe uses a skid-type roughness detector that allows roughness measurement using
a linear drive inside the probe. Dedicated software SURFPAK-SP is used for roughness
measurement and analysis.

41
22

Unit: mm26.5

Options
Thanks to the knowhow accumulated in the portable surface roughness tester SJ series,
several types of surface roughness detectors are available to suit various types of workpiece.
A cleaning unit (option) is also available to clean the roughness detector should it becomecontaminated with coolant, etc. This allows improvement in reliability of roughness
measurement.

(1.45) (26.4)

165
(193)

28

11.5

ø25
59.7

This probe allows contact roughness measurement without changing a workpiece setup on
a CMM. If a SURFTEST probe is mounted on the PH10M/PH10MQ, roughness measurementof tilted surfaces is enabled by changing the probe orientation. The CMM can also use other
CMM probes along with a SURFTEST probe, thus allowing fully automatic measurementfrom dimensions to surface roughness using the Auto Probe Changer ACR3, etc.

(1.1)

Batch processing from dimensional measurement to roughness
measurement

31

121.5

Configuration
Qty

Description

SURFTEST PROBE Set
SURFTEST PROBE main unit
Storage box
SURFTEST PROBE Interface unit
USB CBL
Hardware guide

1
1
1
1

Optional units
Essential options

SURFTEST PROBE Specifications
SURFTEST PROBE

18

Measuring range
Drive range
Measuring speed
Stylus tip radius
Measuring force

AUTO, 25, 100, 360 µm
17.5 mm0.25, 0.5, 0.75 mm/s
2 µm
0.75 mN

Optional parts
Part No.
Name
02AQJ101 Cleaning unit
02AQJ207 Calibration stage
02AQJ210 Support magnet (ACR3)

70.8
60.3

(10.5)(10.5)

1.5
4.8

ø6.6

2
3.5

Deep groove detector（178-274/178-284）(10.5)

60º

0.6
1.4

ø6.6

.4
ø2

12.6

ø9

（mass）:8.2 g

70.6
60.1

ø13.6
R40

Extra small hole detector（178-273/178-283）

9

ø6.6

0.8
1.6

71.5
61

（mass）:8.3 g
16.4

ø9

1.8

4

ø6.6

Small hole detector（178-272/178-282）

12.8
ø2.

ø9

1.2
4.5

ø9

（mass）:8.2 g(10.5)

16.2

10

ø6
R40

ø3.8
R40
ø6.6

ø9

2.4

3.5

Roughness detector（178-270/178-280/178-281）

0.4

Name
Roughness detector (0.75 mN, 60º R2 µm)
Roughness detector (4 mN, 90º R5 µm)
Roughness detector (4 mN, 90º R10 µm)
Small hole detector (0.75 mN, 60º R2 µm)
Small hole detector (4 mN, 90º R5 µm)
Extra small hole detector (0.75 mN, 60º R2 µm)
Extra small hole detector (4 mN, 90º R5 µm)
Deep groove detector (0.75 mN, 60º R2 µm)
Deep groove detector (4 mN, 90º R5 µm)
Gear-tooth surface detector (0.75 mN, 60º R2µm)
Gear-tooth surface detector (4 mN, 90º R5 µm)

1.5
4.8

71.2
60.7

（mass）:7.6 g

1.8

SURFPAK-SP is a software program specific to the SURFTEST surface
roughness probe for a CMM, and allows surface roughness analysis
conforming to standards such as ISO, JIS, ANSI and VDA. Working
with MCOSMOS, fully automatic dimensional measurement andsurface roughness measurement are enabled.

3.5(10.5)

16.4

0.4

SURFPAK-SP

OptionPart No.
178-270
178-280
178-281178-272
178-282
178-273
178-283
178-274
178-284
178-275
178-28571.5
61（mass）:7.8 g

R40②Roughness specimen

178-270 (0.75 mN, 60º R2 µm)
178-280 (4 mN, 90º R5 µm)
178-601 (mm)178-602 (inch/mm)

R40
0.9

①Roughness detector

Gear-tooth surface detector（178-275/178-285）

19

TP7M High-Accuracy Touch-trigger Probe

TP7M High-Accuracy Touch-trigger Probe
High-accuracy touch-trigger probes

TP7M Specifications

This is a high-accuracy touch-trigger probe with a maximum repeatability of 2σ≤ 0.25 µm.

TP7MMeasuring direction
Standard stylus
Repeatability (σ)
Directionality (XY: 2D)
Required force to generate
trigger signal

Enhancing the setup and measurement efficiency throughautomatic change of probe orientations
Since the TP7M can be mounted on a probe head, such as the PH10M/PH10MQ that
automatically changes the probe orientation, it can greatly reduce the preparation time formeasurement and for actual measurement in comparison to a conventional-type scanningprobe with a position that is fixed downward. In addition, the use of other probes, as
advantaged by the probe change system, makes it possible to realize full automation inmeasuring various forms of machined parts.

Amount of over-travel
Required force to achieve
over-travel
Maximum stylus length
Stylus mounting method
Mass of a single unit
Durability
Probe head
Applicable models

Suitable for use with long styli
The TP7M can mount a stylus up to 150 mm long*. In combination with the longest
extension of 200 mm equipped for the PH10M/PH10MQ, it can reach a position at a
maximum distance of 350 mm.
* T his maximum length may vary with the coordinate measuring machine main unit being used and/or thematerial/diameter of the stylus itself.

XY
Z
XY
Z
XY
Z

±X, ±Y, +Z
ø4x18 mm
0.125 μm or less (When the standard stylus is used.)±0.25 μm or less0.02 N (When the 50 mm stylus is used.)
0.15 N (When the 50 mm stylus is used.)
±16°
±5 mm
0.49 N (When the 50 mm stylus is used.)
2.94 N (When the 50 mm stylus is used.)
150 mm*M4 thread85 g
10,000,000 times
Essential: PH10M/PH10MQ
CNC coordinate measuring machines* Increase in stylus length or stylus mass may deteriorate the accuracy.

Dimensions

TP7M Set
Ref. No.
1
TP7M main unit
2
Joint key S10
3
M4 Stylus tool

Description

Qty
1
1
2

18 mm

3 mm

50 mm

ø25 mm

Sø4 mm20

21

TP200 Compact High-Accuracy Touch-trigger Probe

TP200 Compact High-Accuracy Touch-trigger Probe
Compact high-accuracy touch-trigger probes

Dimensions

This touch-trigger probe has an outside diameter as small as ø13.5 mm, which greatly
contributes to probing complex portions of a workpiece. With the combined use of an
appropriate probe extension it can probe even deeper locations.

M8ø13.5 mmEnhancing the setup and measurement efficiency throughthe automatic change of probe orientations

Probe main unit

30 mm

Since the TP200 can be mounted on a probe head, such as the PH10M/PH10MQ that
automatically changes the probe orientation, it can drastically reduce the time required toprepare for measurement and for actual measurement in comparison to a conventional-type
scanning probe with a position that is fixed downward.

Automatic stylus change
13 mm

Stylus module

M2X0.410 mm

If the measurement cannot be performed by merely changing the probe orientation (suchas when it is impossible to measure without replacing the normal stylus with one that has adifferent diameter or unique form), this automatic stylus change via the stylus change systemallows fully automatic measurement to be completed without being interrupted mid-course.
In addition, working with other probes, as advantaged by the probe change system, makes
it possible to realize full automation in measuring various forms of machined parts.

Sø4 mm

Set configuration

40

Unit

Ref. No.
123
4
506AAL251
6
Touch-trigger
7
probe
8
TP200 set
9
Stylus set
06AAL268
10
for TP200
11
06AAL252
12

Description
TP200 probe
Stylus module (standard)
Cleaning toolTwin-ended wrench
Double-ended wrench
Stylus toolMS2-4R10
MS2-6R10
MS2-4R20
MS2-EXT40G
MS2-EXT50G
Carbon extension
attachment tool
Wooden box
User's ManualA
completeset of
TP200
probe

TP200 Specifications
TP200

Measuring direction
Repeatability (2σ)
Directionality (XY: 2D)
Directionality (XYZ: 3D)
Required force to generate
trigger signal
Amount of over-travel
Required force to achieve
over-travel

XY
Z
XY
Z
XY
Z

Maximum stylus length
Maximum stylus mass
Stylus mounting method
Mass of a single unit
Durability
Probe head
Applicable models
Note:

SCR200(optional)

Stylus module replacement
accuracy
Number of stylus modules thatcan be mounted±X, ±Y, ±Z
0.3 μm or less (with 10 mm stylus), 0.4 μm or less (with the 50 mm stylus)±0.4 μm or less (with 10 mm stylus), ±0.8 μm or less (with the 50 mm stylus)±0.65 μm or less (with 10 mm stylus), ±1 μm or less (with the 50 mm stylus)
0.02 N (STANDARD/LOW FORCE), where a 50 mm stylus is used.
0.07 N (STANDARD/LOW FORCE), where a 50 mm stylus is used.
XY±14°+4.5 mm (with 0.07 N), +3 mm (with 0.15 N)
0.35 N (STANDARD FORCE)
0.1 N (LOW FORCE)
1.5 N (STANDARD FORCE)
1 N (LOW FORCE)
70 mm (STANDARD FORCE)*
30 mm (LOW FORCE)*
STANDARD FORCE : 4.5 g, LOW FORCE : 1.5 g
M2 thread
22 g
10,000,000 times
Essential: PH10M/PH10MQ/MIH/PH1
CNC coordinate measuring machines
Any stylus less than ø1mm should be used with the LOW FORCE module. Not suitable for use in strong
magnetic fields.
Repeated positioning accuracy: 1.0 mm or less (through automatic change), when a 50 mm stylus is used.
*2.0 mm or less at a manual replacement: when a 50 mm stylus is used.

13
14

Qty
1
1
1
1
1
1
1
1
1
1
1

Remarks

1

10Standard measuring force (at over-travel)
For cleaning the stylus module
For attaching/detaching the probe (S1)
For attaching/detaching the probe (S9)For attaching/detaching the stylus (S7)Standard stylus Sø4X10 (M2)
Sø6×10 (M2)
Sø4×20 (M2)
Extension 40 mm Carbon fiber
Extension 50 mm Carbon fiber

2

11

Stylus storage box

6

50

3

4
5

12

13

14

1
1
1

Note: Some items cannot be ordered separately.

15

7
8
9

Optional accessories

Unit: mm

Stylus module automatic changer SCR200

Automatic stylus change system kit (Code No. 06AAL540)
No.
Description
Qty
Specification (use)Mass (kg)
1 Stylus module (low measuring force)
1 For ball stylus less than ø1
0.01
2 Stylus module (standard)
3 Standard measuring force (at over-travel)
0.04
3 SCR200 kit
1 With a rack mount kit
0.93
4 PL63
1 PI200-SCR200 connection cable
0.15* Depending on the stylus to be equipped, the stylus and SCR200 may interfere.

Maximum 6 units* ø1 mm stylus should be used with the LOW FORCE module as well.

22

23

TP20 Compact Touch-trigger Probe

TP20 Compact Touch-trigger Probe

Dimensions
ø13.2 mm

M8

Compact touch-trigger probes

Probe main unit

19 mm

This touch-trigger probe has an outside diameter as small as ø13.2 mm, which greatly contributes
to probing complex portions of a workpiece. With the combined use of an appropriate probe
extension it can probe even deeper locations.

Enhancing the setup and measurement efficiency
through the automatic change of probe orientations

3 mm

19 mm

Probe module

Since the TP20 can be mounted on a probe head such as the PH10M/PH10MQ that
automatically changes the probe orientation, it can drastically reduce the time required to prepare
for measurement and for actual measurement in comparison to a conventional-type scanningprobe that has a position fixed downward (when it is mounted on the CNC coordinate measuringmachine).

10 mm

Automatic stylus change
If the measurement cannot be achieved by simply changing the probe orientation (such as when
it is not possible to make measurements without replacing the normal stylus with one having a
different diameter or unique form), automatic stylus change via the stylus change system allows
fully automatic measurement to be completed without mid-course interruption. In addition,
the use of other probes as advantaged by the probe change system makes it possible to realize
full automation in measuring various forms of machined parts (when it is mounted on the CNC
coordinate measuring machine).

M2X0.4Sø4 mm

Set configuration
Ref. No.

Description

Qty

1
2
3
4
5
6
7
8
9

TP20 probe main unit
Probe module [STANDARD]
Probe module [MEDIUM]
Cleaning tool
Single-ended wrench
Double-ended wrench
Stylus tool
User's Manual
Certificate

1
1
1
1
1
2
1
1
1

Touchtrigger
probe
TP20 set
06AAV547

Specification (use)Measuring force (small)
Measuring force (medium)For cleaning stylus module
For attaching/detaching probe
For attaching/detaching probe
For attaching/detaching stylus

1

4

2

5

7

8

9

6

3

Total mass including package
Note: Some items cannot be ordered separately.

Optional accessories

Stylus module

TP20 Specifications
TP20

Measuring direction
Repeatability (2σ)
Directionality (XY: 2D)
Directionality (XYZ: 3D)
Required force togenerate trigger signal

Amount of over-travel
Required force to achieve
over-travel

XY
Z
XY
Z
XY
Z

Maximum stylus length

MCR20(optional)

Stylus mounting method
Mass of a single unit
Durability
Probe head
Applicable models
Note:
Probe module replacement
accuracy
Number of stylus modules thatcan be mounted±X, ±Y, +Z
0.35 μm or less (with the STANDARD FORCE 10 mm stylus)±0.8 μm or less (with the STANDARD FORCE 10 mm stylus), ±2.5 μm or less (with the 50 mm stylus)±1 μm or less (with the STANDARD FORCE 10 mm stylus), ±4 μm or less (with the 50 mm stylus)
0.08 N (STANDARD FORCE), with 10 mm stylus
0.1 N (MEDIUM FORCE), with 25 mm stylus
0.75 N (STANDARD FORCE)
1.9 N (MEDIUM FORCE)±14º+4.0 mm (STANDARD FORCE)+3.7 mm (MEDIUM FORCE)
0.2 to 0.3 N (STANDARD FORCE)
0.2 to 0.4 N (MEDIUM FORCE)
3.5 N (STANDARD FORCE)
7 N (MEDIUM FORCE)
50 mm (STANDARD FORCE)*
60 mm (MEDIUM FORCE)*
M2 thread
22 g (probe body: 13 g, probe module: 9 g)
1,000,000 times
Essential: PH10M/PH10MQ/MIH/PH1
Manual/CNC coordinate measuring machines
Not suitable for use in strong magnetic fields.
Repeatability positioning accuracy: 1.0 µm or less (through automatic change), when a 10 mm stylus is used.
*2.0 µm or less at a manual replacement: when a 50 mm stylus is used.
Maximum 6 units

Standard force module
Medium force module
EM1 (Standard force module with extension)

The extension andprobe module areintegrated and cannot
be separated.

EM2 (Standard force module with extension)
10 mm

50 mm

100 mmProbe module automatic changing system MCR20200 mm

MCR20
set

1

Accessories• ø2X30 mm stylus
1.3 kg • Probe module(standard force)• Mounting kit

1
2

15 mm
60 mm

145 mm1

55 mm* Increase in stylus length or stylus mass may deteriorate the accuracy.

24

25

MH20i Touch-trigger Probe with Manual Probe Head

MH20i Touch-trigger Probe with Manual Probe Head

Dimensions

ø14 mm

ø48 mmTouch-trigger probe with manual probe headThis series of touch-trigger probes has a manually operable probe head for coordinate
measuring machines. The probe module has an outside diameter as small as ø13.2 mm,
which greatly aids in probing complex portions of a workpiece. Other probe modules
employing an extension either 50 mm long or 70 mm long are also provided.
53 mm

Capable of positioning its orientation

10 mm 19.5 mm

77 mm

The probe head of the MH20i has a structure that not only permits its position (probe
orientation) to be manually changed but also provides a maximum of 168 orientations (at apositioning repeatability σ≤1.5 µm). Even for measurement of a complex three-dimensional
form that requires repeated changes in the probe orientation, preliminary registration ofrequired positions can eliminate re-calibration after each positional change, thereby broadly
improving the measurement efficiency.

Probe module
5.7 mm

Set Configuration
Unit
MH20i single unit
Code No.
06ABN436
MH20i set
Code No.
06ABN470

Ref. No.
Description
1
MH20i
2
Probe module3
Cleaning tool
4
MS2-stylus tool5
Positioning shank6
Stylus7
Allen key (2 mm)
8
Allen key (3 mm)
9User's Manual

Qty Mass (kg)
1
0.25
1
0.01
1
0.05
1
0.003
1
0.15
1
0.001
1
0.001
1
0.001
1
0.1

Remarks
STANDARD TYPE
For cleaning the stylus module
For attaching/detaching the stylus
ø4X10 (standard stylus)

Note: Some items cannot be ordered separately.

MH20i Specifications
MH20i

Measuring direction
Position change
Repeated positioning accuracy
Repeatability (2σ)
Directionality (XY: 2D)
Directionality (XYZ: 3D)
Required force togenerate trigger
signalXY
Z
XY

Amount of over-travel

Required force to achieve
over-travel

Z
XY
Z

Maximum stylus length
Stylus mounting method
Mass of a single probe unit
Durability
Probe head
Applicable models
Note* Increase in stylus length or stylus mass may deteriorate the accuracy.

±X, ±Y, +Z
Manually for A axis (vertical direction): 0 to 90º (at 15º increments),
and for B axis (horizontal direction): ±180º (at 15º increments)
σ<–1.5 μm
0.35 μm or less (with the STANDARD FORCE 10 mm stylus)±0.8 μm or less (with the STANDARD FORCE 10 mm stylus), ±2.5 μm or less (with the 50 mm stylus)±1 μm or less (with the STANDARD FORCE 10 mm stylus), ±4 μm or less (with the 50 mm stylus)
0.08 N (STANDARD FORCE), with the 10 mm stylus
0.1 N (MEDIUM FORCE), with the 25 mm stylus
0.75 N (STANDARD FORCE)
1.9 N (MEDIUM FORCE)±14º+4.0 mm (STANDARD FORCE)+3.7 mm (MEDIUM FORCE)
0.2 to 0.3 N (STANDARD FORCE)
0.2 to 0.4 N (MEDIUM FORCE)
3.5 N (STANDARD FORCE)
7 N (MEDIUM FORCE)
10 N (EXTENDED FORCE)
50 mm (STANDARD FORCE)*
60 mm (MEDIUM FORCE)*
M2 thread
250 g
1,000,000 times
N/A
Manual/CNC coordinate measuring machines
Not suitable for use in strong magnetic fields.

5

7

3

8

1
4
2

9

6

Optional accessories

Stylus modules

Standard force module
Medium force module
EM1 (Standard force module with extension)

The extension andprobe module areintegrated and cannot
be separated.

EM2 (Standard force module with extension)
10 mm

26

50 mm

100 mm27

PH10M/PH10MQ Motorized Probe Head

PH10M/PH10MQ Motorized Probe Head

PH10M dimensions

PH10MQ dimensions

62 mm
ø14 mm

38 mm

130 mmThis probe head can automatically control the position of a probe attached at the end.
Automatic position change can be performed by simply specifying the angle through the
supplied control box or the dedicated software during teaching and setting it to recall the
position from memory.
Moreover, this automatic position change allows for measurement to be completed in muchless time than the automatic stylus change method, reducing the total number of man-hours
required to perform measurement with the coordinate measuring machine.

High-accuracy indexing to 720 positions

Possible to mount various kinds of probe
This head can mount various probes including, but not limited to, a touch-trigger probe,
scanning probe, vision probe, laser probe, and thread depth measuring probe.
Furthermore, these probes can be easily interchanged by means of the probe changer(optional), which enables fully automatic measurement on a wide range of measurement
objects.

38 mm

Since the PH10M/PH10MQ can set the attached probe to a maximum of 720 different
positions, even one stylus can function as if 720 styli are attached. In addition, since thisprobe head has a repeatability to the same position as high as 2σ≤0.4 µm, it does not
require re-calibration for measurement in which the same position must be repeatedly called.

80 mm

PH10MQ adapter

73 mm

73 mm

 nhancing measurement efficiency through automatic probe
Eindexing

Autojoint section

Autojoint section

Extensions
Model

Dimension

Remarks

32 mm

PAA1

For TP200/TP20* Note that some probes are not compatible with this automatic probe change.

50 mm

PECF1

For TP200/TP20

100 mmPECF2

For TP200/TP20
200 mmPECF3

For TP200/TP20
300 mmPAA3

For TP200/TP20
50 mm

PEM1

For SP25M/TP7M
100 mmPEM2

For SP25M/TP7M
200 mmPEM3

For TP7M

Set configuration
No.

1

PH10M
head set

PH10M/PH10MQ Specifications
PH10M/PH10MQ

Position change
Repeated positioning accuracy
Extension

Applicable models
Durability

Horizontal direction±180º (at 7.5º increments, 48 positions)
Vertical direction
0 to 105º (at 7.5º increments, 15 positions)
2σ<–0.4 μm (when the PAA1+TP20+L10 mm stylus is used.)
PEM1, PEM2, PEM3, PAA1, PAA2, PAA3
More than one extension cannot be joined for use. However, combined use of PAA+PECF1, PAA1+PECF2, andPAA1+PECF3 are permitted.
Use on an extension is not permitted for the SurfaceMeasure/QVP.
CNC coordinate measuring machines
1,000,000 times

PH10MQ
2
head set3
4
5
6

Description
PH10M head
Joint key S10
Allen key (nominal 1.5)
Allen key (nominal 2)
Allen key (nominal 2.5)
PH10MQ head
Joint key S10
Allen key (nominal 1.5)
Allen key (nominal 2.5)

HCU-1
PHC10-2 (RS232C)
PAA1
User's Manual

1

Qty

2

Remarks

1

1
1
2
1
1
1
1
1

3

Controller for positioning the probe headInterface with the machine-side CPU (for error display)
Adapter for mounting the TP200 onto the PH10M
User's Manual for PH10M head

4

5

6

Note: Some items cannot be ordered separately.

28

29

PH1 Manual Probe Head

PH1 Manual Probe Head

REVO-2 High-speed 5-axis Control Scanning Head

Manual probe head

Ultra-high-speed 5-axis scanning

Manual probe head for use with the TP200 and TP20.

This scanning head allows ultra-high-speed scanning at up to 500 mm/s. With simultaneouscontrol of a total of 5 axes (3 axes <X, Y and Z> on a CMM and 2 axes <A and B> on REVO2), the CMM can perform non-step scanning of complex forms on a workpiece.
Various measurement operations specific to REVO-2 are also available.
The use of a rotary encoder allows unlimited angle positioning (at a resolution of 0.08 sec).
This enables easy access to a complicated workpiece, leading to a reduction of programmingand measuring time periods.
The REVO-2 probe is only available on the dedicated CRYSTA-Apex EX 1200R series.

Easy position change
The operator can change the probe orientation by hand.

Extension
It is possible to insert a probe extension that is a maximum of 200 mm long.

REVO-2 Specifications

PH1 Specifications
PH1

Horizontal direction

Position change

360º (at 15º increments)
Possible in a non-stop manner, if the head is rotated along withthe ø14 mm shank unit.
±115º (non-step)

Vertical direction
TP200, TP20
PECF1, PECF2, PECF3
Manual/CNC coordinate measuring machines

Mountable probe
Extension
Applicable models

Dimensions

Optional accessories

REVO-2

Rotation angle(Pitch angle)
Maximum stylus length

Vertical (A-axis)
Horizontal (B-axis)* An increase in the length and mass of a stylus may reduce the accuracy.

PH20 5-axis Control Touch-trigger Probe System
Effective measurement of a complex workpiece using stylus movement

Extensions

The PH20 head can position a touch-trigger probe at any angle, allowing unique "headtouch" probing. This system has the advantage of measuring tilted surfaces and small, deepholes. There is no fear of interference from the stylus shank during measurement of a deephole.
5-axis operation reduces the time required for probe rotational movements andsupports 'head touch' operation for quick point
measurement.
The system also supports the module changer using
TP20 standard modules.
By combining optional software, a measurement
program can be created on a PC using 3D CAD
data.

Unit: mm
50 mm

PECF1
100 mmPECF2

ø14

200 mm

PECF3

50

36

ø41

−5°～+120° (0.08 sec)
∞ (0.08 sec)
500 mm (Distance from probe rotation center to stylus tip)*

PH20 Specifications
17
30

PH20

M8
ø30

48

Rotation angle(Pitch angle)
Maximum stylus length

Vertical (A-axis)
Horizontal (B-axis)−115º~+115º (0.08 sec)
∞ (0.08 sec)
50 mm** An increase in the length and mass of a stylus may deteriorate the accuracy.
An example connection of PECF3

30

ø41mm
ø14mm

31

ACR3 Automatic Probe Changer

Rotary Tables for CNC CMM
These optional rotary tables allow highly-accurate and efficient measurements of workpieces
like rotationally symmetrical parts (gears, impellers and cylindrical cams). When used with ascanning probe, synchronized scanning measurements can be performed, enabling various
contour measurements and advanced measurements.

The need for an automatic probe changer
The ACR3 is an automatic probe changer for use with the PH10M/PH10MQ. It is essential
for fully automatic measurements where the currently employed probe does not have thecapability of automatic stylus change but the stylus diameter or length must be occasionallychanged, and where the contact-type probe and non-contact type probe are switched as
required.

Releasing
the lock

MRT240Compact and light weight but capable of supporting a workpiece of up to 40 kg. Can also be
used with shop-floor type CNC coordinate measuring machine, MiSTAR555.

MRT320

MRT240A ø60 mm through hole on the center of the table allows measurements of long axial
workpieces like long drive shafts.

QS600/QS800
Suitable for measurements of large workpieces.

MRT320Engaging
the lock

Dimensions

QS600/800
Unit: mm

610
147

185

Specifications
88.7

106

333

Free area
UNLOCKED

Free area
LOCKEDSet configuration
Unit

ACR3 4-portsystem

ACR3 8-portsystemRef. No.
Description
1
ACR3
2
MRS KIT2
3
Auxiliary plate4
ACR3 attachment
5
User's Manual
6
Control ROM
1
ACR3
2
MRS KIT2
3
Auxiliary plate4
ACR3 attachment
5
User's Manual
6
Control ROM

Depth
Width
HeightTable diameter [mm]
Mass [kg]Max. load [kg]AccuracyMax. drive speed[rpm]16

CENTER POSITION

Model
Dimensions [mm]Indexing accuracy [ º ]MRT320
470
400
150
320
120
100
±0.00019
9

QS600
1000
720

QS800
1200
920
160

600
370
1700

800
530
3000
0.0006

5

4

Customized special applications
Qty
1
1
1
1
1
1
2
1
1
1
1
1

Remarks
4-port rack
Rack baseFor fixture
Attachment
Adaptive to ACR3
4-port rack
Rack baseFor fixture
Attachment

1

3

2

4

Adaptive to ACR3
Embedded in measuring table

32

MRT240
327
250
105
240
20
40
±0.00019
6

Air suspension

33

Quick guide to styli
The choice of stylus has an important effect on the accuracy of measurement obtainable from a CMM. Here is a quick guide on how to selecta stylus.
The stylus is the part of a probe that makes contact with a workpiece, generally consisting of a stem and a ball tip. The probe functions bybringing the ball into contact with a workpiece to acquire a measurement from the resulting signal. The form and dimensions of a stylus need to
be selected depending on the workpiece. In any case, it is important that a stylus has high rigidity and its tip shape is a practically perfect sphere.

n CeramicBecause it is light and has the same level of rigidity as stainless steel, ceramic is mainly used with a stylus with a large ball size
and a long axis. It has excellent thermal stability and is not affected by the temperature environment, thereby allowing higher
accuracy measurement.
n Carbon fiber
Carbon fiber is a material appropriate for long styli since the mass of a carbon fiber stylus is approximately 20% of that of a
carbide stylus. Thanks to excellent thermal stability, a carbon fiber stylus is little affected by the operating environment.
2. Ball Tip
Selection of the most suitable ball tip material involves taking the measuring procedure and workpiece material into account.
n RubyA ruby ball provides a particularly hard, smooth surface, featuring high compressive strength and excellent mechanical wiping.
Ruby is appropriate as a ball material for scanning diverse workpieces, but may cause abrasion during the scanning measurement ofaluminum and cast iron. When measuring aluminum and cast iron, it is advisable to use other ball materials as listed below.

n Selection of a stylus
It is recommended that a stylus be selected on the basis of the following factors to ensure the high accuracy of measurement.
1. Choose the shortest stylus possible.
The longer a stylus, the more it will flex, and lower accuracy will result. We recommend using the shortest possible stylus for measurement,
regardless of the configuration of the stylus.

n Silicone nitride
Silicon nitride, which is similar to ruby, is a ceramic material that provides high hardness and strong resistance to abrasion. Since silicon nitride
will not fuse with aluminum, it will not cause adhesive wear like ruby. Since silicon nitride will not fuse with aluminum, it will not cause adhesive
wear like ruby. However, it is recommended that a silicon nitride ball be used only for aluminum workpieces due to a marked susceptibility toabrasion on steel surfaces.
n Zirconia
Zirconia is a ceramic material that demonstrates a particularly outstanding hardness and has hardness and abrasion characteristics
equivalent to a ruby. It is ideal for scanning cast iron parts.

n Calibration
2. Reduce the number of joints wherever possible.
The combination of styli and use of extensions will increase the possibility flexure. We recommend using as few parts as possible to make up
the stylus.

Even if a stylus appropriate for a workpiece is selected, an accurate measurement result will not be obtained unless the probe to be used iscalibrated prior to measurement, which involves probing a master reference sphere in a defined sequence so that the CMM software canestablish the ball tip and probe/stylus characteristics.

3. Use a ball tip as large as possible.
The use of a larger ball increases the clearance between the ball and stem, thus reducing the possibility of contact between the stem andworkpiece (shanking). A larger ball also reduces the influence of the surface finish of a workpiece on measurement accuracy.

n Calibration mechanismn Material
A stylus uses an appropriate material for its shaft, ball and other accessories according to the application. The following introduces the featuresand merits of commonly used materials.
1. Stem
To minimize flexure, the stem needs to be as stiff as possible. Mitutoyo offers the following materials:
n Tungsten carbide
This material provides excellent rigidity for small stem diameters, thus being optimal for most standard applications. Consideration
should be given to the stylus mass in the case of large stem diameter and long stylus length.
n Stainless steel
Non-magnetic stainless steel stems offer the best stiffness to mass ratio.

34

The CMM calculates the center position and diameter of each stylus ball using the specific probe calibration program.
This program uses CMM measurements made of the reference sphere with each configured stylus ball to determine the true diameters of
the balls and stores the measured data in the software. The precise diameter of the reference sphere is known from a previous calibration
measurement and is also stored for use in the calculations. As a workpiece may be measured from every direction, a stylus is calibrated withmeasurements at multiple points on the reference sphere. A scanning system needs to obtain a large number of points for calibration. With
these procedures observed, the effective diameter for each stylus ball and the center positions of the stylus balls in the machine coordinate
system are set to enable accurate measurement.

n Notes on using stylin Inaccuracies can occur depending on the stylus length and mass and the drive speed and acceleration of the probe. Due consideration should

be given to the type of probe when setting measuring speed for long and/or heavy styli for scanning measurements.
n A disk stylus consists of the center section of a sphere and is used to measure edges and undercuts on a workpiece. This type of stylus isactually used only for X- and Y-direction measurement due to its shape. It cannot be used for Z-direction measurement. Also, this stylus must
be used in conjunction with a stylus changer.
n T here are restrictions on the use of a cylinder stylus, again because of its shape.
n F or details about restrictions, contact a Mitutoyo sales office.
n S
 tyli are classified in M2 to M5 series, which refers to the fixing thread size of a probe.
The use of a conversion adapter, etc. may allow a stylus with a different thread size to be mounted. In this case, refer to the instruction
manual of the probe on which to mount the stylus to select the stylus configuration compatible with the probe specification. Contact yourlocal Mitutoyo sales office if you have any questions about the mounting method.

35

Code No.
Description

06ABN751
MS2-0.3R2

ø0.2

From each Mitutoyo styli the approximate form can be identified (see below).

Stylus (Mounting Thread M2)

10

EWL

Effective length(EWL)
Material of probe tip

Mitutoyomanufactured stylus

Thickness of disc

Diameter ofmounting screw

Diameter of
disc

Sø1
Mass: 0.3 g
Carbide

Sø1

ø0.3
ø0.5
ø0.7

7

20
ø0.8

Mass: 0.6 g
Carbide

Sø1

12.5
20

M2X0.4

Code No.
06ABN757 06AFG324
06AFG396
DescriptionMS2-1R20.5 MS2-1SN20.5 MS2-1Z20.5
Material of probe tip Ruby
Silicon nitride Zirconia

Mass: 0.41 g
Carbide

Sø1

20.5
27.5

M2X0.4Mass: 0.4 g

Disc thickness

Material of probe tip

Code No.
Description

R: ruby- : material other than ruby

Disc

ø3

Code No.
06ABN756 06AFG323
06AFG395
DescriptionMS2-1R12.5 MS2-1SN12.5 MS2-1Z12.5
Material of probe tip Ruby
Silicon nitride Zirconia

Disc dia.

Stainless steel

ø0.67

MS 2 - DISC 12 - 2

06AFG322
06AFG394
MS2-1SN7
MS2-1Z7
Silicon nitride Zirconia

M2X0.43 Disc styli

Mass: 0.3 g

4.5
10

M2X0.4

Code No.
06ABN755
DescriptionMS2-1R7
Material of probe tip Ruby

R: ruby
H: Carbide- : other

Cylinder06AFG321
06AFG393
MS2-1SN4.5 MS2-1Z4.5
Silicon nitride Zirconia

Sø0.7

4
10

06ABF409
MS2-1R37

M2X0.4

Carbideø0.7

Diameter ofcylinder• This stylus may have a short life compared withnormal styli.
• The use of a ceramic master ball (high precision type)
Sø10 mm is recommended.

Carbideø0.7

EWL

Code No.
06ABN754
DescriptionMS2-1R4.5
Material of probe tip Ruby

Mass: 0.3 g

ø3

MS 2 - CY 3 R 6
Diameter ofmounting screw

06AFG392
MS2-0.7Z4
Zirconia

M2X0.42 Cylindrical styli

Mitutoyomanufactured stylus

Code No.
06ABN753
DescriptionMS2-0.7R4
Material of probe tip Ruby

10

ø3

Effective length(EWL)

Note: Even if the measuring depth is less than EWL, interference with aworkpiece may occur. Use of a stylus with a long EWL or a narrow
diameter of EWL may result in greater measurement errors due toflexing caused by the measuring force (force that brings the ball into
contact with a workpiece). Always handle a ball stylus with care. If
the ball impacts a workpiece too strongly, the stylus may bedamaged.

Sø0.5

3

M2X0.4

ø3

Diameter ofball tip

Material ofprobe tip
R: ruby
SN: Silicon nitride
Z: Zirconia• This stylus may have a short life compared withnormal styli.
• Not recommended for mounting on TP200,
otherwise an input error may result.
• The use of a ceramic master ball (high precision type)
Sø10 mm is recommended.

Carbideø3

Diameter ofmounting screw

EWL: Effective working length is the distance from the centre of theball to the point on the stem that is the same diameter as the ball.

06AFG320
06AFG391
MS2-0.5SN3 MS2-0.5Z3
Silicon nitride Zirconia

Sø1 ruby ballø3

Material of bar
C: Ceramic
None: Other

Mitutoyomanufactured stylus

Code No.
06ABN752
DescriptionMS2-0.5R3
Material of probe tip Ruby

Mass: 0.3 g

ø3

MS 2 - 0.5 R 3 C

Sø0.3 ruby ball2

M2X0.4

1 Ball styli• Use with a measuring force 0.4 N or less.
• Cannot be mounted on TP200.
• This stylus may have a short life compared withnormal styli.
• The use of a ceramic master ball (high precision type)
Sø10 mm is recommended.

Carbideø3

Product Identification on Styli for Coordinate Measuring Machines• Cannot be mounted on TP200.* Not recommended
for mounting on TP20, otherwise an input error
may result.

37
52

4 Cross-styli

R: ruby- : material other than ruby

5 Other accessories①Point stylus
MS2-PO ("-H" will be added when the probe tip is carbide.)②Extension	MS2-EXT10 (the figure at the end represents the length. "G" is appended if the bar is carbon fiber, and "C" is appended if
the bar is ceramic.)③Stylus knuckle
MS2-stylus knuckle (an adapter for turning the stylus to the optional angle.)④Stylus center
MS-stylus center (an adapter to allow the styli to be mounted so they can be oriented in directions crossing each other.)

Code No.
06ABN760 06AFG327
06AFG399
MS2-1.5R22.5 MS2-1.5SN22.5 MS2-1.5Z22.5
Description
Material of probe tip Ruby
Silicon nitride Zirconia

06AFG328
MS2-2SN6
Silicon nitride

06AFG400
MS2-2Z6
Zirconia

ø0.7

12.5
20

M2X0.4

Sø1.5
Mass: 0.46 g
Carbide

Sø1.5

22.5

M2X0.4

Code No.
06ABN761
DescriptionMS2-2R6
Material of probe tip Ruby

Carbideø1

Code No.
06ABN759 06AFG326
06AFG398
MS2-1.5R12.5 MS2-1.5SN12.5 MS2-1.5Z12.5
Description
Material of probe tip Ruby
Silicon nitride Zirconia

ø1

Cross-stylus

Material of probe tip

ø3

Diameter ofball

Mass: 0.3 g

ø3Diameter ofmounting screw

Sø1.5

4.5
10

M2X0.4

Effective length
(EWL)

30

Mass: 0.58 g

ø1

Mitutoyomanufactured stylus

Stainless steel

ø3

MS 2 - STAR 2 R 2.5

Code No.
06ABN758 06AFG325
06AFG397
DescriptionMS2-1.5R4.5 MS2-1.5SN4.5 MS2-1.5Z4.5
Material of probe tip Ruby
Silicon nitride Zirconia

Stainless steel

6
10

Sø2

ø3

EWL

Mass: 0.9 g

M2X0.4Mass: 0.3 g

Note: For a stylus longer than 30 mm, select a product with its axis made from carbon fiber or ceramic.

36

37

Code No.
Description
Material ofprobe tip

06ABN771 06AFG349
06AFG410
MS2-3R27.5 MS2-3SN27.5 MS2-3Z27.5

06ABN773 06AFG351
06AFG412
MS2-3R47.5 MS2-3SN47.5 MS2-3Z47.5

ø1.5
ø3

ø1.5
ø3

Zirconia

M2X0.4

Code No.
Description
Material ofprobe tip

06ABN779 06AFG357
MS2-4R50C MS2-4SN50C
SiliconRuby
nitride

06AFG418
MS2-4Z50C
Zirconia

M2X0.4Mass: 0.5 g

Code No.
Description
Material ofprobe tip

06ABQ341 06AFG358 06AFG419
MS2-4R50.5G MS2-4SN50.5G MS2-4Z50.5G
SiliconRuby
Zirconia
nitride

Sø3

Code No.
Description

06ABF404
MS2-4R68

Mass: 0.4 g
Stainless steel

ø1.5
ø3

ø1.5

Sø3

Sø3

ø2

Carbideø3

Zirconia

M2X0.4Sø420

Mass: 0.6 g

Carbideø2

Zirconia

M2X0.4

Stainless steel

30

Sø4

ø2

ø2
ø3

Stainless steel

Mass: 0.44 g

ø3

ø1.4
ø3
ø3

Mass: 1.95 g

Sø4 ruby ball

12.15

ø1.5

06AFG417
MS2-4Z50

Mass: 1.49 g

CarbideM2X0.4Mass: 1.57 g

Sø4

40

Mass: 2.04 g• Not recommended for mounting on TP 20, otherwise
an input error may result.

CarbideSø450

Mass: 2.52 g

Ceramic

50

Sø4
Mass: 0.91 g
Carbon fiber

M2X0.4Sø4

50.5

Mass: 1.0 g

Stainless steel

Sø4 ruby ball

68

Carbide37.5
40

M2X0.4

ø1.5

06ABN778 06AFG356
MS2-4R50 MS2-4SN50
SiliconRuby
nitride27.5
30

M2X0.4

ø3

Code No.
Description
Material ofprobe tip

Sø2.5

17.5
20

M2X0.4

Silicon nitride Zirconia

Silicon nitride Zirconia

7.5
10

M2X0.4

Silicon nitride Zirconia

Code No.
Description
Material ofprobe tip

Ruby

M2X0.4Mass: 1.48 g

32.5
40

Silicon nitride Zirconia

06ABN772 06AFG350
06AFG411
MS2-3R37.5 MS2-3SN37.5 MS2-3Z37.5

Zirconia

Sø2.5

CarbideM2X0.4

06AFG408
MS2-3Z7.5

Code No.
Description
Material ofprobe tip

06AFG416
MS2-4Z40

22.5
30

M2X0.4

ø2

Ruby

06ABN777 06AFG355
MS2-4R40 MS2-4SN40
SiliconRuby
nitrideø3

Ruby

Code No.
Description
Material ofprobe tip

CarbideMass: 0.4 g

Stainless steel

ø2

06ABN770 06AFG348
06AFG409
MS2-3R17.5 MS2-3SN17.5 MS2-3Z17.5

06AFG415
MS2-4Z30

Mass: 0.4 g

Sø4

ø2

Code No.
Description
Material ofprobe tip

Ruby

06ABN776 06AFG354
MS2-4R30 MS2-4SN30
SiliconRuby
nitrideø3

06ABN769 06AFG347
MS2-3R7.5 MS2-3SN7.5

Silicon nitride Zirconia

Code No.
Description
Material ofprobe tip

Sø2.5

ø2

Code No.
Description
Material ofprobe tip

Ruby

06AFG414
MS2-4Z20

ø3

06ABN768 06AFG346
06AFG407
MS2-2.5R32.5 MS2-2.5SN32.5 MS2-2.5Z32.5

06ABN775 06AFG353
MS2-4R20 MS2-4SN20
SiliconRuby
nitrideStainless steel

16.4
20

M2X0.4

Silicon nitride Zirconia

Code No.
Description
Material ofprobe tip

Code No.
Description
Material ofprobe tip

Mass: 0.3 g

Stainless steel

10

M2×0.4

Code No.
Description

ø3

Ruby

Silicon nitride Zirconia

Code No. 06AFZ463
Description MS2-4R12.15

ø3

06ABN767 06AFG345
06AFG406
MS2-2.5R22.5 MS2-2.5SN22.5 MS2-2.5Z22.5

Sø2.5• Cannot be mounted on TP200. Not recommended
for mounting on TP20, otherwise an input error
may result.

Mass: 1.6 g

M2X0.4

ø3

Code No.
Description
Material ofprobe tip

6
10

M2X0.4

Zirconia

Mass: 1.5 g
Stainless steel

Sø3 ruby ball

ø3

06ABN766 06AFG344
06AFG405
MS2-2.5R16.4 MS2-2.5SN16.4 MS2-2.5Z16.4

Silicon nitride Zirconia

06AFG413
MS2-4Z10

ø2

Code No.
Description
Material ofprobe tip

Ruby

06AFG404
MS2-2.5Z6• Cannot be mounted on TP200.* Not recommended
for mounting on TP20, otherwise an input error
may result.

06ABN774 06AFG352
MS2-4R10 MS2-4SN10
SiliconRuby
nitride52

ø1

06ABN765 06AFG343
MS2-2.5R6 MS2-2.5SN6
Ruby

Sø2 ruby ballø3

Code No.
Description
Material ofprobe tip

Code No.
Description
Material ofprobe tip

Mass: 1.29 g

Carbide

58

ø2

ø1.5
M2X0.4

Ceramic• Not recommended for mounting on TP20, otherwise
an input error may result.

ø3

06ABF406
MS2-2R52

M2X0.4

68.5

Sø2

32.5
40

M2X0.4• Not recommended for mounting on TP20, otherwise
an input error may result.

Mass: 1.3 g

83.5

Carbideø1.5

Code No.
Description

Silicon nitride Zirconia

06ABF405
MS2-3R68.5C

Mass: 0.99 g

ø3

Ruby

ø3

06ABN764 06AFG342 06AFG403
MS2-2R32.5 MS2-2SN32.5 MS2-2Z32.5

Code No.
Description
Sø2

22.5
30

Sø3 ruby ball

64
68

CarbideM2X0.4

Stainless steel

Mass: 0.4 g

ø3Code No.
Description
Material ofprobe tip

Silicon nitride Zirconia

M2X0.4Sø2

14
20

M2×0.4

ø1.4

Ruby

Silicon nitride Zirconia

06ABF402
MS2-3R64

ø3

06ABN763 06AFG330 06AFG402
MS2-2R22.5 MS2-2SN22.5 MS2-2Z22.5

Code No.
Description

Stainless steel

Sø3
Mass: 1.97 g

06ABF410
MS2-4R98C

M2X0.4Mass: 2.0 g

Sø4 ruby ball

Ceramic

ø3

Code No.
Description
Material ofprobe tip

Ruby

06AFG401
MS2-2Z14

ø1.4

06ABN762 06AFG329
MS2-2R14 MS2-2SN14

ø3

Code No.
Description
Material ofprobe tip

• Cannot be mounted on TP200. Not recommended
for mounting on TP20, otherwise an input error
may result.

98

Silicon nitride Zirconia

ø2
ø3
M2X0.4

47.5
50

Sø3
Mass: 2.44 g

Code No.
Description
Material ofprobe tip

06ABN780 06AFG359
MS2-5R10 MS2-5SN10
SiliconRuby
nitride

06AFG420
MS2-5Z10
Zirconia

Stainless steel

ø3

Ruby

Carbideø2.5

Mass: 2.5 g• Not recommended for mounting on TP20, otherwise
an input error may result.

M2X0.410

Sø5
Mass: 0.7 g

Note: For a stylus longer than 30 mm, select a product with its axis made from carbon fiber or ceramic.
Note: For a stylus longer than 30 mm, select a product with its axis made from carbon fiber or ceramic.

38

39

Stylus (Mounting thread M2)

Carbideø2.5

06AFG421
MS2-5Z20

ø3
M2X0.406ABN782 06AFG361
MS2-5R30 MS2-5SN30
SiliconRuby
nitride

06AFG422
MS2-5Z30

Code No.
Description
Material ofprobe tip

06ABN783 06AFG362
MS2-5R40 MS2-5SN40
SiliconRuby
nitride

06AFG423
MS2-5Z40
Zirconia

M2X0.4Mass: 1.98 g

Code No.
Description

135399MS2-19.05C 3/4inch

ø3Zirconia

18.05
13.05

3

Carbon fiber.05
ø19 ")(3/4

Carbideø2.5

Code No.
Description
Material ofprobe tip

Sø5

20

30

Sø5

ø2.5

M2X0.4

M2X0.4Mass: 2.57 g

CarbideCode No.
Description
Sø5

ø18
ø4

M2X0.4Mass: 3.17 g

1140160225MS2-18C

Mass: 4.4 g

0.4
2.2

Zirconia

ø3

06ABN781 06AFG360
MS2-5R20 MS2-5SN20
SiliconRuby
nitrideø3

Code No.
Description
Material ofprobe tip

10
5

2.5

Ceramic

Sø5

50

M2X0.4

M2X0.4

Carbon fiber

M2X0.4

ø3

Mass: 1.0 g

Code No.
Description

Sø5

50.5

06ABN796
MS2-STAR2R5.25

Mass: 0.5 g

18
5.5 5.25

M2X0.4Sø2 ruby ball

Mass: 1.1 g

Sø5 ruby ball

Ceramic

M2X0.4• Cannot be mounted on TP200. Not recommended
for mounting on TP20, otherwise an input error
may result.

Mass: 1.3 g

Code No.
Description

ø3

Description

M2X0.4
Sø1 ruby ball

3
7.5

06ABF411
MS25R97.5C

06ABN795
MS2-STAR1R2.5

97.5

18

Code No.

Code No.
Description

Mass: 3.75 g

10.7

06ABQ342 06AFG365 06AFG426
MS2-5R50.5G MS2-5SN50.5G MS2-5Z50.5G
SiliconRuby
Zirconia
nitrideMass: 3.3 g

ø0.67

Code No.
Description
Material ofprobe tip

Zirconia

Ceramic

ø1.4
ø206AFG425
MS2-5Z50C

ø2.5

06ABN785 06AFG364
MS2-5R50C MS2-5SN50C
SiliconRuby
nitride

Sø5

50

M2X0.4

ø2.5

Code No.
Description
Material ofprobe tip

Zirconia

Carbideø3

06AFG424
MS2-5Z50

ø3

06ABN784 06AFG363
MS2-5R50 MS2-5SN50
SiliconRuby
nitrideø18

ø3

Code No.
Description
Material ofprobe tip

• Not recommended for mounting on TP20, otherwise
an input error may result.

06ABN797
MS2-STAR2R10.75

30
5.5

M2X0.4Sø2 ruby ball

10.75

Zirconia

06ABN789
MS2-CY1.5-1.7

Sø6

18

ø2
Stainless steel

ø3

M2X0.450.5

M2X0.4

Note: For a stylus longer than 30 mm, select a product with its axis made from carbon fiber or ceramic.

11

ø1.5

Carbon fiber

Mass: 0.3 g

Mass: 1.2 g

Stainless steel

Code No.
Description

06ABN790
MS2-CY3-4

Stainless steel

Sø8

M2X0.4Mass: 1.5 g

Code No.
Description

06ABN791
MS2-CY1R7.5• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

Mass: 0.6 g• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

Sø1

7.5
14.5

ø1

06ABN792
MS2-CY2R6.5

4

Mass: 0.3 g

6.5
M2×0.420• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

Ruby

ø3

Code No.
Description

13

Ruby

M2X0.440• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

1.7

11

ø3

M2X0.4

Code No.
Description

ø1

Mass: 0.9 g

ø1.5

06AFG429
MS2-8Z11

M2X0.4

ø3

06ABN788 06AFG368
MS2-8R11 MS2-8SN11
SiliconRuby
nitrideMass: 1.8 g

ø3Code No.
Description
Material ofprobe tip

10

Sø6

ø3

06ABN787 06AFG367 06AFG428
MS2-6R50.5G MS2-6SN50.5G MS2-6Z50.5G
SiliconRuby
Zirconia
nitrideZirconiaø2.5

Code No.
Description
Material ofprobe tip

Stainless steel

10.7

06AFG427
MS2-6Z10

ø3

06ABN786 06AFG366
MS2-6R10 MS2-6SN10
SiliconRuby
nitrideø3

Code No.
Description
Material ofprobe tip

ø2.5

ø1.4

Mass: 2.1 g

Sø2
Mass: 0.5 g

41

06ABN793
MS2-CY2H31

CarbideSø2

ø3

Code No.
Description

M2X0.4• Cannot be mounted on TP200.*• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

31

39

Stylus (Mounting thread M2)
Code No.
Description

06ABP853
MS2-EXT5

Stainless steel

ø3

Mass: 2.0 g• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

Ruby

ø2

06ABN794
MS2-CY4R8.5

M2X0.4

5

M2X0.4Mass: 0.2 g

Sø4

ø3

Code No.
Description

Code No.
Description

8.5
M2X0.420

06ABN804
MS2-EXT10

Stainless steel

ø3

Mass: 0.9 g

06ABN799
MS2-PO

M2X0.4

10

M2X0.4Mass: 0.4 g

Steel

ø3

Code No.
Description

M2X0.415

Code No.
Description

06ABN805
MS2-EXT20

Stainless steel

ø3

Mass: 0.7 g

06ABN800
MS2-PO-H

M2X0.420

M2X0.4 Mass: 0.9 g

CarbideR0.

10

Code No.
Description

Mass: 0.7 g

908884
MS2-EXT20C

Ceramicø3

1

M2X0.4

ø1.4

ø3

Code No.
Description

10

rub

yb

all

Code No.
Description

ø3

1.2

8.2
Stainless steel

Mass: 0.6 g

2.5

06ABN807
MS2-EXT40

M2X0.4• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

2.2

Code No.
Description

ø18908885
MS2-EXT40C

40

Mass: 2.7 g

8.2

M2×0.4• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

1.5

Code No.
Description

06AAL257
MS2-EXT40G

Mass: 1.8 g

M2×0.4Mass: 1.0 g

M2×0.42.5
2.5• For TP200• For mounting stylus, attachment tools for carbon
extension is required. (refer to page 62)

ø3

ø3

40

Carbon fiber

ø25

Stainless steel

40

11.55

M2×0.4 Mass: 0.9 g

Mass: 4.0 g• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

3

Code No.
Description

06AAL258
MS2-EXT50G

Carbon fiber• For TP200• For mounting stylus, attachment tools for carbon
extension is required. (refer to page 62)

ø25

ø3

160226
MS2-DISC25-3

M2X0.4

Ceramic

M2X0.4

Code No.
Description

Mass: 1.4 g

ø3
3

06AAL517
MS2-DISC25-2.5

M2X0.4

ø3

Mass: 3.0 g

2.6

30

Stainless steel

M2X0.4

Code No.
Description

Mass: 0.7 g

ø3.55

160215
MS2-DISC18-3

M2×0.4

Stainless steel

M2X0.4

Code No.
Description

M2X0.4

Code No.
Description

06ABN806
MS2-EXT30• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

1.5

ø18

06AAL516
MS2-DISC18-2.5

ø3Code No.
Description

20

ø3

M2X0.4

M2×0.4Sø6

2• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

ø3.55

160214
MS2-DISC6R-2

ø2

Code No.
Description

M2×0.450

11.55

M2×0.4Mass: 1.0 g

M2X0.4Mass: 3.8 g* For a stylus longer than 30 mm, select a product with its axis made from carbon fiber or ceramic.

42

43

908886
MS2-EXT60C

Stylus (Mounting thread dia.: M3)

Ceramic

ø3

06ABN809
MS2-EXT70G

Carbon fiberø3

Code No.
Description

ø3.55

Mass: 1.3 g

11.55

70

M2×0.4

M2×0.4• Not recommended for mounting onTP200, otherwise
an input error may result.
• Also for other probes it isrecommended to use in thevertical direction. Otherwise an input error may result
depending on the drive speed or acceleration.
• For mounting stylus, attachment tools for carbon
extension is required. (refer to page 62)

Mass: 1.3 g

908887
MS2-EXT80C

06ABN816 06AFG369 06AFG430
MS3-0.5R2 MS3-0.5SN2 MS3-0.5Z2
SiliconRuby
Zirconia
nitrideCode No. A (mm)M3X0.506ABN817 06AFG370
MS3-1SN4
MS3-1R4
SiliconRuby
nitride

06ABN816 20
06AFG369 21
06AFG430 21

06AFG431
MS3-1Z4

M3X0.5

Zirconia

Carbide2A

Code No.
Description
Material ofprobe tip

Sø0.5

• Use with a measuring force 0.4 N or less.
• This stylus may have a short life compared withnormal styli.
• The use of a ceramic master ball (high precision type)
Sø10 mm is recommended.

Mass: 1.0 g

Stainless steel Sø1

Ceramic

421

Mass: 1.0 g

ø3Code No.
Description

Code No.
Description
Material ofprobe tipø0.7

M2×0.4

ø0.35

60

ø4

M2×0.4ø4

Code No.
Description

80

Code No.
Description

M2×0.4

06ABF414
MS3-1R12

M3X0.5

CarbideSø1 ruby ballø4

Mass: 1.6 g

ø0.8

M2×0.412

ø3.55

Carbon fiber

22

M2×0.411.55

90

Code No.
Description

M2×0.4

06ABF412
MS3-1R25

M3X0.5

Carbide25• Adapter for turning the stylus in the desired direction.

153142MS2-stylus knuckle

4.5

Sø1 ruby ballø4

Mass: 1.5 g

Code No.
Description

Mass: 1.0 g

ø0.8

06ABN810
MS2-EXT90G

ø3

Code No.
Description

32

M2X0.4Mass: 0.9 g

8Stainless steel• Adapter for turning the stylus in the desired direction.

06AFA210MS2-stylus knuckle rotary

06ABN818 06AFG371 06AFG432
MS3-1.5R12.5 MS3-1.5SN12.5 MS3-1.5Z12.5
SiliconRuby
Zirconia
nitrideCarbide12.5
20

Steel Stainless steel M2

M2

Sø1.5
ø1

M3X0.5
ø4

Code No.
Description
Material ofprobe tip

Mass: 0.8 g

43Code No.
Description

Mass: 1.6 g

Stainless steel

M2X0.47• This is an adapter for a probe, whose stylus
attachment section is threaded to M2, to accept
M3-threaded stylus.

Stainless steel

M3X0.506ABN820 06AFG373
MS3-2R9.6 MS3-2SN9.6
SiliconRuby
nitrideø1

06AFG434
MS3-2Z9.6

M3X0.5

Zirconia

Stainless steel

Mass: 0.4 g

Mass: 0.93 g

Sø2

9.6
21

M2
M3

7

Code No.
Description
Material ofprobe tip

Code No.
Description
Material ofprobe tip

06ABN821 06AFG374 06AFG435
MS3-2R22.5 MS3-2SN22.5 MS3-2Z22.5
SiliconRuby
Zirconia
nitrideM3X0.5Mass: 1.0 g

Carbideø1.5

06ABN813
MS2-M3 female-adapter

M2X0.4

22.5
30

ø4

4-M2X0.4
Mass: 0.8 g
M2X0.4

Sø1.5

CarbideM2X0.4
Stainless steel

ø4

Code No.
Description

M3X0.5

ø1.4• Adapter for turning the stylus in one of the five
directions.

06ABN819 06AFG372 06AFG433
MS3-1.5R22.5 MS3-1.5SN22.5 MS3-1.5Z22.5
SiliconRuby
Zirconia
nitride

22.5
30

44

M3X0.5

Carbideø1.5

06ABN822 06AFG375 06AFG436
MS3-2R32.5 MS3-2SN32.5 MS3-2Z32.5
SiliconRuby
Zirconia
nitrideMass: 1.32 g

Sø2

ø4

Code No.
Description
Material ofprobe tip

Sø2

ø4

06ABN812
MS2-stylus center
7.5
6Code No.
Description

Code No.
Description
Material ofprobe tip

ø4

6
16.5

32.5
40

Mass: 1.58 g

45

06ABN826 06AFG379
MS3-3R43.7 MS3-3SN43.7
SiliconRuby
nitride

ø4

Sø3

23.7
30

M3X0.5

Zirconia

Sø3

Carbideø2

06AFG439
MS3-3Z33.7

Mass: 1.83 g

33.7
40

06AFG440
MS3-3Z43.7

M3X0.5

Zirconia

Mass: 2.3 g

Carbide

Sø3

43.7
50

M3X0.5Mass: 2.78 g

ø2
ø4

M3X0.5 Stainless steel

Zirconia

Code No.
Description
Material ofprobe tip

163874MS3-5R31

06AFG446
MS3-5Z31

Code No.
Description
Material ofprobe tip

06ABN832 06AFG386 06AFG447
MS3-5R50C MS3-5SN50C MS3-5Z50C
SiliconRuby
Zirconia
nitrideCode No.
Description
Material ofprobe tip

06ABS911 06AFG387 06AFG448
MS3-6R75G MS3-6SN75G MS3-6Z75G
SiliconRuby
Zirconia
nitride

06AFG385
MS3-5SN31
SiliconnitrideRuby

21

M3X0.5

Sø5

Zirconia

31

M3X0.5Mass: 3.0 g

Sø5

Ceramic

Mass: 1.33 g

50.6

Carbon fiber

M3X0.5

Sø6

Code No.
Description
Material ofprobe tip

Mass: 2.4 g• For SP25M• SM25-3 is required for use with SP25M.
• For the applicable length for each P25M module,
refer to the specifications for SP25M (page 8).

06ABS912 06AFG388 06AFG449
MS3-6R100G MS3-6SN100G MS3-6Z1000G
SiliconRuby
Zirconia
nitride
Sø6

Carbon fiber

M3X0.517
21

Code No.
Description
Material ofprobe tip

06ABS913
MS3-8R75G

06AFG389
MS3-8SN75G
SiliconnitrideCode No.
Description
Material ofprobe tip

06ABS914 06AFG390 06AFG451
MS3-8R100G MS3-8SN100G MS3-8Z100G
SiliconRuby
Zirconia
nitrideRuby

06AFG450
MS3-8Z75G
Zirconia

Mass: 1.3 g

Stainless steel Sø427
31

Mass: 2.98 g• For SP25M• SM25-3 is required for use with SP25M.
• For the applicable length for each P25M module,
refer to the specifications for SP25M (page 8).

Sø8

Carbon fiber

Code No.

06ABF407
M3X0.5• Cannot be mounted on the old scanning probe
models including MPP-2, MPP-2H, and MPP-5.
• Strongly recommended to use in the vertical position
for touch-trigger probes. Otherwise an input
error may result dependingon the drive speed or
acceleration.

Description MS3-8R130C
Sø8 ruby ball

Ceramic

ø6

Mass: 2.5 g

Mass: 3.47 g

06AFG443
MS3-4Z36

M3X0.5

Zirconia

Carbide130

Sø4

Mass: 9.4 g

ø2
36
40

Code No.
Description

916492MS3-30C

M3X0.5

ø30• Cannot be mounted on SP25M.

Mass: 2.38 g

17

06ABN829 06AFG382
MS3-4R36
MS3-4SN36
SiliconRuby
nitrideø4

Code No.
Description
Material ofprobe tip

• For SP25M• SM25-2 or SM25-3 is required for use with SP25M.
• For the applicable length for each P25M module,
refer to the specifications for SP25M (page 8).

75

100

ø4

Zirconia

Sø8

ø4

M3X0.5

Carbon fiber

M3X0.5

M3X0.506AFG442
MS3-4Z27

Mass: 2.89 g

Sø4

ø4

ø2.5

M3X0.5 Stainless steel

Zirconia• For SP25M• SM25-2 or SM25-3 is required for use with SP25M.
• For the applicable length for each P25M module,
refer to the specifications for SP25M (page 8).

75

ø4Mass: 3.5 g

ø2.5

06ABN828 06AFG381
MS3-4R27
MS3-4SN27
SiliconRuby
nitride

06AFG441
MS3-4Z17

ø4

Code No.
Description
Material ofprobe tip

Stainless steel

ø464

06ABN827 06AFG380
MS3-4R17
MS3-4SN17
SiliconRuby
nitrideMass: 1.5 g

100
50

Code No.
Description
Material ofprobe tip

Sø5

ø2.5

06AFG445
MS3-5Z21

Sø3 ruby ball

Carbideø2

06ABF415
MS3-3R50

06ABN831 06AFG384
MS3-5R21 MS3-5SN21
SiliconRuby
nitrideø4

Code No.
Description

Code No.
Description
Material ofprobe tip

Mass: 3.0 g

ø3Zirconia

CarbideSø4 ruby ball

Carbideø2.5

Mass: 1.0 g

ø2

M3X0.5

M3X0.5Mass: 2.85 g

ø2Code No.
Description
Material ofprobe tip

06ABN825 06AFG378
MS3-3R33.7 MS3-3SN33.7
SiliconRuby
nitride

06AFG438
MS3-3Z23.7

ø4

Code No.
Description
Material ofprobe tip

06ABN824 06AFG377
MS3-3R23.7 MS3-3SN23.7
SiliconRuby
nitride

46
50

53
57

12

ø4

Code No.
Description
Material ofprobe tip

Zirconia

Sø3

21

Sø4

Carbideø4

Zirconia

06ABF403
MS3-4R53

M3X0.5

ø4

M3X0.5 Stainless steel

Code No.
Description

06AFG444
MS3-4Z46

ø4

06AFG437
MS3-3Z12

ø1.5

06ABN823 06AFG376
MS3-3R12 MS3-3SN12
SiliconRuby
nitrideø4

Code No.
Description
Material ofprobe tip

Mass: 2.2 g

06ABN830 06AFG383
MS3-4R46 MS3-4SN46
SiliconRuby
nitride

ø2

62.5
69

Code No.
Description
Material ofprobe tipø4

Sø2 ruby ball

Carbideø4

M3X0.5

ø1.5

06ABF416
MS3-2R62.5

ø4

Code No.
Description

Ceramic

46

Mass: 18 g

47

ø12.7

ø3

Stylus (Mounting thread M4)• The use may be restricted depending on theapplication. Please contact your local Mitutoyo sales
office.

2

Stainless steel

M3X0.531

Code No.
Description

06ABN840
MS4-1R4.5

M4X0.7

Stainless steel
Sø1 ruby ballø7

Mass: 4.0 g

ø0.7

169011
MS3-DISC12.7-2

ø4Code No.
Description

06ABN833
MS3-EXT10

Stainless steel

M3X0.5

Code No.
Description

Mass: 0.9 g

06ABN841
MS4-2R8

Stainless steel
Sø2 ruby ball

M4X0.7
ø7

10

8

06ABN834
MS3-EXT20

M3X0.5Mass: 1.6 g

Stainless steel
Sø4 ruby ball

M4X0.713.5
18

Code No.
Description

35

M3X0.506ABQ149
MS4-4R33C

M4X0.7

Ceramic

M3X0.5 Mass: 2.9 g

50

Code No.
Description

Ceramic50

M3X0.5

6 3.5

M3X0.5

ø4.5

M4X0.7Mass: 6.6 g

Carbon fiber

Sø6 ruby ball88
Mass: 6.2 g• Adapter for turning the stylus in the desired direction.

Code No.
Description

06ABN846
MS4-6R138G
M4X0.7

Carbon fiber

Sø6 ruby ball

ø7

3.8
M3X0.506ABN845
MS4-6R88G

100

M3X0.5Mass: 3.7 g

150• Adapter for turning the stylus in one of the five
directions.

10
Stainless steel

Code No.
Description138

Mass: 7.5 g• Cannot be mounted on
SP25M.

06ABN847
MS4-6R188G

M3X0.5M3

167234MS3-ø4.5-adapter

M2X0.4 Mass: 0.6 g

5Stainless steel• This is an adapter for a probe, whose stylus
attachment section is threaded to M3, to accept
straight-shank type stylus.
ø4.5 straight

10

ø4.5

M3X0.5

48

M2

M3

ø9

Code No.
Description• This is an adapter for a probe, whose stylus
attachment section is threaded to M3, to accept
M2-threaded stylus.

Mass: 2.3 g

200

Code No.
Description

06ABN848
MS4-EXT30C

188

Ceramic

M4X0.7

Code No.
Description

06ABN849
MS4-EXT50C

Mass: 8.7 g

ø7Stainless steel

Sø6 ruby ballCarbon fiber

30

M4X0.7Mass: 5.1 g

Ceramic

ø7

Description

06ABN837
MS3-M2 femaleadapter

ø4

Code No.

M4X0.7Mass: 3.2 g
ø7

M3X0.5

ø4.5

5.5

13

06ABN839
MS3-stylus center

Sø8 ruby ball100

Stainless steel

ø4

Code No.
Description

Mass: 5.1 g

Ceramic

13100

Stainless steel

Code No.
Description

8

06ABN838
MS3-stylus knuckle

M4X0.7

ø4.4• For SP25M• SM25-3 is required for use with SP25M.
• For the applicable length for each P25M module,
refer to the specifications for SP25M (page 8).

Mass: 3.02 g

Code No.
Description

06ABN844
MS4-8R100C

ø4.4

ø4

ø4.55

Carbon fiber

11.5

Code No.
Description

13

75

ø4
M3X0.5

Sø8 ruby ballø7

• For SP25M• SM25-3 is required for use with SP25M.
• For the applicable length for each P25M module,
refer to the specifications for SP25M (page 8).

M3X0.5Mass: 2.53 g

06ABS916
MS3-EXT100G

Ceramic

ø7

ø4

ø4.55

Carbon fiber

11.5

M3X0.5

Code No.
Description

M4X0.7

M3X0.5 Mass: 2.95 g

ø4

06ABS915
MS3-EXT75G

06ABN843
MS4-8R50C

Mass: 4.8 g

ø750

M3X0.5

Code No.
Description

Sø4 ruby ball

33

ø4.5

06ABN836
MS3-EXT50C
ø4

Code No.
Description

Mass: 2.1 g

ø3

Stainless steel

ø7

06ABN835
MS3-EXT35
ø4

Code No.
Description

20

06ABN842
MS4-4R13.5

ø3

Code No.
Description

ø7

M3X0.5Mass: 2.3 g

19

Stainless steel

ø4

Code No.
Description

Mass: 2.5 g

ø1.35

M3X0.5

4.5

19.5

ø4

Code No.
Description

M4X0.750

M4X0.7Mass: 6.7 g

49

Stylus (Mounting thread M5)

Ceramic

M4X0.7

100

Code No.
Description

Mass: 10.6 g

Code No.
Description

06AAD457
MS4-EXT200C

06ABS917
MS5-0.5R4

20

M5×0.8

4

CarbideCeramic

Code No.
Description

ø7
M4×0.706ABS918
MS5-0.7R5

5

M5×0.8

CarbideM3X0.5Mass: 5.2 g

Code No.
Description

ø0.7
ø1

ø1

Mass: 4.70 g

21

Sø2 ruby ball

M4X0.7

Code No.
Description

Stainless steel

ø59

M3X0.5Mass: 1.4 g• This is an adapter fora probe, whose stylus
attachment section isthreaded to M4, accept
M2-threaded stylus.

Stainless steel

5

M2X0.4• This is an adapter fora probe, whose stylus
attachment sectionis threaded to M4,
accept M3-threaded
stylus.

06ABS927
MS5-2.5R41

CarbideMass: 4.93 g

ø1
40
M5X0.8• Adapter for
mounting

the stylus
in the fivepositions.

Sø2 ruby ball31

Sø2.5 ruby ball

CarbideMass: 5.40 g

50

Sø2.5 ruby ball

41

M5X0.8

CarbideM4
M3

Code No.
Description

06ABS928
MS5-3R11

Mass: 6.48 g

20

M5X0.8Sø3 ruby ball11
ø2

M4X0.7
4-M4X0.7

06ABS926
MS5-2.5R31

31

ø1.5

15

Stainless steel

Code No.
Description

Mass: 14.5 g

40
M5X0.8

Carbide Mass: 5.12 g
M4
M2

Code No.

06ABS929

Description

MS5-3R2130

M5X0.821

Sø3 ruby ball

CarbideMass: 5.58 g

ø2

M4X0.7
Stainless steel• Adapter for
turning the stylus
in the desired
direction.

06ABS925
MS5-2R31

Mass: 1.5 g

Code No.
Description

Code No.
Description

06ABS930
MS5-3R31

06ABS931
MS5-3R41

40

M5X0.831

Sø3 ruby ball

CarbideMass: 6.04 g

ø2

Stainless steel

4.5

Code No.
Description

50
M5X0.841

Sø3 ruby ball

CarbideMass: 6.50 gø2

9

Mass: 6.3 g

Mass: 4.81 g

ø2

100

M4X0.750

M5X0.8

Carbideø7

M3X0.5

ø7

Description

06ABN856
MS4-M2 femaleadapter

Sø2 ruby ball

CarbideM4X0.7

Code No.

1130

06ABS924
MS5-2R21

Ceramic

ø7

Description

06ABN855
MS4-M3 femaleadapter

20

M5X0.8Mass: 4.68 g

ø175

Mass: 12.1 g

Code No.

06ABS923
MS5-2R11

ø7

Ceramic

1612.5
906ABN857
MS4-stylus center

Sø1.5 ruby ball

11

M5X0.8

CarbideCode No.
Description

M4X0.7

Code No.
Description

20

06ABS921
MS5-1.5R11

Mass: 4.4 g

15

06AAD460
MS4-stylus knuckle

Code No.
Description
M3X0.550

M4X0.7

Code No.
Description

Sø1 ruby ball

ø7

06ABN853
MS4-M3EXT75C

06ABN854
MS4-M3EXT100C

5

M5X0.8Mass: 6.5 g

Carbide Mass: 6.52 g

Ceramic

M4X0.7

Code No.
Description

06ABS920
MS5-1R5

ø5

ø7

06ABN852
MS4-M3EXT50C

20

M3X0.5 Mass: 3.2 g

20

M4X0.7

Code No.
Description

Code No.
Description

Stainless steel

M4X0.7

Code No.
Description

ø0.7 ruby ballM4×0.7200

06ABN851
MS4-M3EXT20

Mass: 6.5 g

20

Mass: 16.6 g

Code No.
Description

ø0.5 ruby ball

ø0.4

M4X0.7

ø0.5

06ABN850
MS4-EXT100C

ø7

Code No.
Description

51

100
M5X0.8

Code No.
Description

55

Carbide75

06ABS945
MS5-6R64G

M5X0.8Sø3 ruby ball
Mass: 16.30 g

20

Code No.
Description

Sø4 ruby ball

11

M5X0.8

M5X0.806ABS946
MS5-6R89G

Sø4 ruby ball

CarbideMass: 6.55 g

Code No.
Description

06ABS948
MS5-8R62G

Sø4 ruby ballø3

65

Code No.
Description

06ABS950
MS5-10R37G

Carbon fiber50

M5X0.8ø6

ø3
ø3

06ABS941
MS5-5R50

50

41

Sø5 ruby ball

CarbideMass: 9.19 g

Code No.
Description

M5X0.8100

Code No.
Description

Mass: 8.91 g
Sø10 ruby ball62

Carbon fiber

Mass: 10.01 g

100

06ABS952
MS5-10R87G

87

M5X0.850

Carbon fiber

M5X0.8Mass: 7.10 g

ø3

M5X0.8

Sø10 ruby ballCarbon fiber

Sø10 ruby ball

Mass: 11.11 g

M5X0.806ABS953
MS5-16C

65

Carbide06ABS943
MS5-5R91

06ABS944
MS5-6R39G

91

Carbide50

M5X0.8

ø1

6

Mass: 7.0 g

M5X0.806ABS954
MS5-22C

Mass: 11.80 g

100

Code No.
Description
Sø5 ruby ball39

Sø6 ruby ballCarbon fiber

Mass: 6.10 g

06ABS955
MS5-EXT40G

M5X0.8Mass: 14.40 g

ø22

Mass: 10.0 g

40Carbon fiber

Mass: 7.6 g

Code No.
Description

06ABS956
MS5-EXT50G

M5X0.850
Carbon fiber
M5X0.8ø11

ø4.3

Code No.
Description

Code No.
Description

Ceramic

M5X0.8ø3

Code No.
Description

Sø5 ruby ball

Ceramic

9.575

M5X0.8Mass: 23.31 g

ø1106ABS942
MS5-5R65

Sø5 ruby ballø3

Code No.
Description

Carbide2

ø32

Code No.
Description

06ABS940
MS5-5R41

37

Mass: 10.17 g

75

06ABS951
MS5-10R62G

ø6

CarbideCode No.
Description

Code No.
Description

Sø5 ruby ball21

Sø8 ruby ball

11.5

30

M5X0.8

ø6

06ABS939
MS5-5R21

Mass: 9.06 g

87

Carbide Mass: 6.06 g

Code No.
Description

Carbon fiber
100

M5X0.8

Code No.
Description

Sø5 ruby ball11

Sø8 ruby ball

62

06ABS949
MS5-8R87G

Mass: 11.61 g

20

Mass: 30 g

Sø4 ruby ball

Carbide75

M5X0.8Sø8 ruby ball75

M5X0.8Mass: 23.07 g

M5X0.806ABS938
MS5-5R11

M5X0.838

50

CarbideCode No.
Description

06ABU673
MS5-8R38C

Mass: 7.96 g
Ceramic

60

100

06ABS936
MS5-4R50

06ABS937
MS5-4R65

Code No.
Description

ø2

41

M5X0.8

Code No.
Description

Carbon fiber

ø650

M5X0.8Sø8 ruby ball37

M5X0.8

ø6

06ABS935
MS5-4R41

Mass: 7.08 g

50

06ABS947
MS5-8R37G

Mass: 5.64 g

ø3Code No.
Description

ø4

ø2
CarbideCode No.
Description

Code No.
Description

Sø4 ruby ball21

Sø6 ruby ballCarbon fiber

ø630

M5X0.8100

ø1906ABS934
MS5-4R21

Mass: 6.59 g

89

Carbide Mass: 5.19 g

Code No.
Description

Carbon fiber

ø606ABS933
MS5-4R11

ø2

Code No.
Description

Sø6 ruby ball64

ø4

06ABS932
MS5-3R55

ø1.5

Code No.
Description

Mass: 8.3 g

52

53

60
Carbon fiber

M5X0.8

Attachment Tools

M5X0.8

Code No.
Description

Mass: 9.0 g

06ABS958
MS5-EXT70G

70
Carbon fiber

M5X0.8

ø11

3

M5X0.8

ø1

Code No.
Description

Mass: 9.7 g
Carbon fiber

M5X0.8Mass: 10.4 g

06ABS960
MS5-EXT90G

M5X0.8Carbon fiber

Code No.
Description

M5X0.8
ø11

Description

120
M5X0.8Carbon fiber

Description

MS5-EXT150G

Carbon fiber

150

ø11

M5X0.8Mass: 15.4 g

Code No.

06ABS964

Description

MS5-EXT180G

M5X0.8Carbon fiber

M5X0.8ø11

180

Mass: 17.5 g

Code No.

06ABS965

Description

Mass: 18.9 g

MS5-EXT200G
200

Carbon fiber

M5X0.8

ø11

M5X0.8

Code No.

06ABS966

Description

Mass: 22.4 g

MS5-EXT250G
250

Carbon fiber

300

Carbon fiber

400

Carbon fiber

M5X0.8

ø11

M5X0.8

Code No.

06ABS967

Description

Mass: 20.0 g

Stylus Set [Code No. 06ABT114]
Ref. No.
Description
1 MS4-1R4.5-S
2 MS4-2R8-S
3 MS4-4R13.5-S
4 MS4-4R33-S
5 MS4-8R50C-S
6 MS4-8R100C-S
7 MS3-30C
8 MS4-EXT50C
9 MS4-EXT30C
10 MS4-M3EXT20
11 MS4-M3EXT75C
12 MS4-stylus center
13 MS3-stylus center
14 MS2-stylus center
15 MS4-stylus tool
16 MS2-stylus tool
17 MS4-M3 female-adapter
18 MS3-M2 female-adapter
19 Storage box

Specifications
ø1×20 mm (M4)
ø2×20 mm (M4)
ø4×20 mm (M4)
ø4×50 mm (M4)
Sø8×50 mm (M4)
Sø8×100 mm (M4)Sø30 Ceramic ball (M3)
L50 Extension (M4-M4)
L30 Extension (M4-M4)
L20 Extension (M4-M4)
L75 Extension (M4-M3)
M4 Stylus center
M3 Stylus center
M2 Stylus center
M4 Stylus tool
M2, M3 Stylus tool
M4-M3 adapter (L9)M3-M2 adapter (L5)

Qty
2
2
2
1
1
1
1
2
1
1
1
1
1
1
2
2
2
5
1

Remarks
High-accuracy specifications
High-accuracy specifications
High-accuracy specifications
High-accuracy specifications
High-accuracy specifications
High-accuracy specifications

Note: Some items cannot be ordered separately.
・For other necessary styli, please select from the styli list at the end of this document.
・For probe extensions, refer to PH10M/PH10MQ (pages 30-31).

Mass: 25.9 g

MS5-EXT300G

M5X0.8

ø11

M5X0.8• Attachment/detachment tool for
carbon-fiber extensions whose mounting
thread is M2.

06AAL264
Attachment tool for
carbon-fiber extensions

M5X0.8

ø11

06ABS963

8

M5X0.8

Code No.

M5X0.8• Stylus attachment/detachment tool forM4 mounting screws.

35

Mass: 3.5 g

Carbon fiber

Mass: 13.2 g

Code No.

181279MS4-stylus tool

100

06ABS961
MS5-EXT100G

06ABS962
MS5-EXT120G

5

Mass: 0.7 g

Mass: 11.8 g

Code No.
Description• Stylus attachment/detachment tool forM2 and M3 mounting screws.

23

M5X0.8Mass: 11.1 g

Code No.
Description

153140M2-stylus tool

90

ø11

Code No.
Description

Mass: 5.0 g

M5X0.8

Code No.
Description• Attachment tool for probes with the body
diameter of ø13 mm or 18 mm and probe
extensions.

ø13

ø18

80

06ABS959
MS5-EXT80G

ø11

Code No.
Description

161535
Double-ended wrench

Mass: 5.0 g

ø2Code No.
Description• Attachment tool for probes with the
body diameter of ø13 mm and probe
extensions.

161534Single-ended wrench

ø1.2

06ABS957
MS5-EXT60G

ø11

Code No.
Description

Code No.

Description

Mass: 33.0 g

MS5-EXT400G

M5X0.8

ø11

M5X0.806ABS968

54

55

Stylus Set

Stylus Cleaner

Set No. 06AGG825*
Description
Stylus CF-ruby M2
Stylus tungsten M3
Stylus tungsten M2
Stylus tungsten M2
Long adapt M3/M2 CF
Knuckle Joint steel M2
5-way stylus holder M2
Pin spanner
Hexagon wrenchø (mm)
4
3
2
1
ー
ー
ー
1.2
ー

L (mm)
50
40
30
27.5
30
17.2
8
23
ー

Qty
5
1
2
1
1
1
1
2
1

P reventing inaccurate measurements caused by an unclean
stylus
The stylus cleaner removes dust and debris adhering to the stylus of a CNC coordinate measuringmachine.
It removes dirt from the stylus in only about 30 seconds, due to the combination of cleaning fluid andcompressed air.
Stylus cleaner:• Eliminates the hassle of manual stylus cleaning.
• Avoids the risk of inaccurate measurements caused by an unclean stylus.
• Allows accurate calibration by conducting stylus cleaning before calibration.
A stylus cleaner improves the efficiency and reliability of your quality assurance!

* Only available as a set.

①②

Set No. 06AGG826*
Description
Stylus steel-ruby M2
Stylus steel-ruby M2
Stylus steel-ruby M2
Stylus steel-ruby M2
Extension steel M2
Extension steel M2
Extension steel M2
5-way stylus holder M2
Pin spannerø (mm)
4
3
2
1
ー
ー
ー
ー
1.2

L (mm)
20
20
20
10
30
20
10
8
23

Qty
1
1
5
1
1
1
4
1
2

Unclean stylus

The probe moves to the sensor of the stylus cleaner.

④

The probe moves to above the cleaner.

③* Only available as a set.

Stylus after cleaning

Set No. 06AGG827*
Description
Stylus tungsten M2
Stylus tungsten M2
Stylus steel-ruby M2
Stylus steel-ruby M2
Stylus steel-ruby M2
Adaptor M3/M2
5-way stylus holder M2
Extension steel M2
Pin spannerø (mm)
0.5
0.7
1
1
2
ー
ー
ー
1.2

L (mm)
10
10
10
20
20
5
8
20
23

Qty
1
1
1
1
4
1
1
1
2

Cleaning complete

Applicable with down-facing styli
Applicable stylus length: 20 mm or more
Applicable stylus diameter: 8 mm or less

By registering the cleaner position in advance, these operations can be performed
as CNC part programs.
Automatic cleaning operation can be added after probe replacement or during
workpiece measurement.
(The CNC part program for stylus cleaning is provided by Mitutoyo.)

20 seconds
Time(number oftimes) can be
set arbitrarily.
The probe moves the cleaning unit up and down
several times to clean the stylus with cleaning fluidand compressed air.

* Only available as a set.

56

57

Joystick Box

Ceramic Master Ball
Ceramic master ball (standard type)

Ceramic master ball (high-accuracy type)

Blue Line

ø7.5

M8X1.25

8.4

30

ø23

ø23

ø15

M8X1.25

manually. Three types are available to suit your purpose.

Unit: mm

Sø20 ceramic ball[Material: AI2O3 (99.9%)]

ø7 drill through[Material: AI2O3 (99.9%)]

ø7.5

Unit: mm

Sø20 ceramic ball

ø7 drill through• Ball sphericity: 0.08 μm or less0
• Ball diameter dimensional tolerance: Sø20-0.1 mm

ø15• Ball sphericity: 0.13 μm or less• Ball diameter dimensional tolerance: Sø200-0.1 mm

The joystick box allows users to easily operate their CMM from a remote location when creating a part program in teaching mode or operating the machine

(12)

8.4

141
163

30
(12)

141
163

Ceramic master ball (high-accuracy type)• Ball sphericity: 0.08 μm or less• Ball diameter dimensional tolerance: Sø10±0.05 mm

ø6

Unit: mm

ø7 drill through

JSBOX-M2

Blue Line
C1

Sø10 ceramic ball

ø3.5

ø15

M8X1.25[Material: AI2O3 (99.9%)]

ø23

100

JSBOX-V2

JSBOX-HANDY2

C1

Wrench (rod)
33

8.4
(12)

141

Base

Master ball cover (Part No. 06AFJ091)

Base for a ceramic master ball

Safety Laser Scanner

Cover for a ceramic master ball

Unit: mm

The safety of CNC CMM can be enhanced by attaching the device to the machine.
141

191

When a person enters the set hazardous area, the machine will reduce speed and stop
automatically.

20

90.5

32

Installation image
Base appearance

Ceramic ball attachment figure

Set break-downs
Set code No.
06AFK288A
06AFK288B
06AFK288D
06AFK289A
06AFK289B
06AFK289D
06AFK290A
06AFK290B
06AFK290D
06AFK291A
06AFK291B
06AFK291D
06AFK292A
06AFK292B
06AFK292D

Ball diameter
(mm)
20
20
20
20
20
20
20
20
20
20
20
20
10
10
10

Type

Master ball cover

BaseStandard
Standard
Standard
Standard
Standard
Standard
High-accuracy
High-accuracy
High-accuracy
High-accuracy
High-accuracy
High-accuracy
High-accuracy
High-accuracy
High-accuracy

✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓

−
−
−
✓
✓
✓
−
−
−
✓
✓
✓
−
−
−

Inspection
certificate
✓
✓
−
✓
✓
−
✓
✓
−
✓
✓
−
✓
✓
−

Calibration
certificate
−
✓
−
−
✓
−
−
✓
−
−
✓
−
−
✓
−

Traceability
Calibration
system diagram certificate (JCSS)
−
−
✓
−
✓
−
−
−
✓
−
✓
−
−
−
✓
−
✓
−
−
−
✓
−
✓
−
−
−
✓
−
✓
−

Optional accessory for the Ceramic Master Ball
Operation of safety laser scanners

SpacerSpacer for the base

191

241

Unit: mm

90.5

Spacer appearance

58

20

Installation of safety laser scanners
Two safety laser scanners are attached to both sides of front of MACH-3A.

Hazardous area
forbidden area
warned area
outside the hazardous area

Speed
stop
low speed
fast movement speed

32

Attaching Spacer to Ceramic Master Ball + Base592308 (JP15), Printed in Japan

Coordinate Measuring Machines

Vision Measuring Systems

Form Measurement

Optical Measuring

Whatever your challenges are, Mitutoyo
supports you from start to finish.
Mitutoyo is not only a manufacturer of top quality
measuring products but one that also offers qualified
support for the lifetime of the equipment, backed up
by comprehensive services that ensure your staff canmake the very best use of the investment.
Sensor Systems

Test Equipment

Digital Scale and DRO Systems

Small Tool Instruments
and Data Management

Apart from the basics of calibration and repair,
Mitutoyo offers product and metrology training,as well as IT support for the sophisticated software
used in modern measuring technology. We can also
design, build, test and deliver measuring solutions
and even, if deemed cost-effective, take your criticalmeasurement challenges in-house on a sub-contract
basis.

Find additional product literatureand our product catalogue
https://www.mitutoyo.co.jp/global.html
Mitutoyo Corporation
Our products are classified as regulated items under Japanese Foreign Exchange and Foreign Trade Law.
Please consult us in advance if you wish to export our products to any other country.
If the purchased product is exported, even though it is not a regulated item (Catch-All controls item), the customer service
available for that product may be affected. If you have any questions, please consult your local Mitutoyo sales office.
Note: Product illustrations are without obligation. Product descriptions, in particular any and all technicalspecifications, are only binding when explicitly agreed upon.
MITUTOYO and MiCAT are either registered trademarks or trademarks of Mitutoyo Corp. in Japan and/or other countries/regions.
Other product, company and brand names mentioned herein are for identification purposes only and may be thetrademarks of their respective holders.
All product information contained in this brochure is current as of August 2023.

20-1, Sakado 1-Chome,
Takatsu-ku, Kawasaki-shi,
Kanagawa 213-8533, Japan
T +81 (0) 44 813-8230
F +81 (0) 44 813-8231
https://www.mitutoyo.co.jp