Ta k u m iCatalog No.E16034(2)Coordinate Measuring Machines

Ultra-high Accuracy CNC Coordinate Measuring MachineAn artisan’s touch,for ultimate
accuracy

Mitutoyo provides quality through craftsmanship.
When tracing a surface,
only an artisan can feel even the slightest imperfection
and can hone it to a straightness unattainable by machine.
Inheriting the techniques and history of Mitutoyo,
our master artisans, known as “Takumi”*,
have created the ultimate measuring machine.

Ta k u m iToday, the world standards are changing.

Click here for a video
introduction to the
LEGEX Takumi model* Takumi is a Japanese word meaning ”artisan” with superb craftmasnship.

2

3

Gear molds
As forged products are becoming more sophisticated, complex, and diverse, there isdemand for molds that have precision on the micron level.
The LEGEX Takumi model contributes to mold manufacturing that requires
ultra-high precision by combining outstandingly high-accuracy measurement with aGear Mold
variety of applications.

Lens Mold
Lens molds
With the global spread of smartphones and the dramatic improvement in the performance of
cameras mounted on mobile devices accompanying the increasing number of social media
users, mass-produced compact lenses are now required to have the precision and stability tomatch. The potential of the LEGEX Takumi model can be fully demonstrated even whenmeasuring lens molds that require dimensions and forms to be grasped with high accuracy.

Point cloud data obtained through scanningmeasurements can be compared with 3D CAD. By
displaying a color map on the CAD surface, errors canbe intuitively detected, allowing quick feedback to themachining process.

Provided courtesy of ZENO TECH Co., LTD.

45

Accuracy that only a craftsman can achieve

A machine base that thoroughly eliminates error factors

The ultimate ultra-high-accuracy CNC coordinate measuring machine, which builds on the innovative design and

In order to achieve ultra-high accuracy, we have paid special attention to the material of the machine base,advanced parts processing and assembly technologies of LEGEX and perfects it with outstanding craftsmanship.

and also thoroughly pursued high rigidity and high damping performance.

That is the LEGEX Takumi model.

Freely lapping over a wide range andpolishing to outstanding precision

Utilizing cast iron ideal for the pursuit ofmeasurement accuracy

A structure that integrates
the Y-axis guide rails and baseIn a typical lapping process, the workpiece is rubbed
and polished on top of a lapping surface plate, butwith the LEGEX Takumi model, because the area tobe polished is large, a lapping surface plate is placed
on top of the fixed frame. The amount of polishingdepends on the amount of pressure applied, thelapping material used, and the surface property ofthe polished surface. The technique of freely
polishing a selected area by only the desired amountdemands a high level of skill backed by a deep levelof experience and know-how.

The machine base is made of ductile cast iron FCD600, which has a highlevel of hardness and great toughness, giving it the properties of goodmachinability and wear resistance. Furthermore, it utilizes cast ironmanufactured through a method that eliminates cavities and pinholes(defects) of 0.1 mm or more.

In order to further improve rigidity and thermal stability, this model utilizes
a structure that integrates the Y-axis rails and the machine base.

After lapping

100
100

150

200

250

300

350

400

450

A1 result6

Y-axis guide rails integrated
with base

500

550

600

650

A2 result

700

750

800

B1 result

850

900

150

200

250

300

350

400

450

500

550

600

650

700

750

800

850

900

950 1000 1050 1100 1150

950 1000 1050 1100 1150

B2 resultA1 resultA2 result

B1 result

B2 result

Perfecting the straightness
for straight sliding

Assembled with a thorough eye for right angles tocreate a distortion-free measurement space

The straightness of the base guide surface, which is essential to Y-axis drive,is improved by repeatedly measuring the worked surface and lapping overthe uneven areas to increase accuracy. There are guides on both the left
and right sides of the base (p6: Figure 1) and each have differences inheight, inclination, and undulations. To make the table slide straight, acraftsmanʼs skill is required, with consideration of the straightness andparallelism of both guide surfaces, as well as the deflection caused byassembly of the measuring table.

A distortion-free measuring space cannot be achieved simply by assemblinga collection of high-precision parts. Assembly and adjustment work that
improves accuracy beyond what can be achieved with mechanical assemblyis a process that is only possible through skilled craftsmanship.

High rigidity and high damping properties
improve the accuracy of scanning measurement

0.6

0.08s

0.4

ζ=0.0280.2
m/s2

Before lapping

Figure 1

The machine base is made highly rigid through thorough stress analysis
using FEM structural analysis, and as a result, load fluctuation deformation
caused by table movement is kept to a minimum, ensuring excellent
geometric motion accuracy.
Additionally, the sealed structure improves rigidity, and by having molding
sand retained inside the structure, the friction of the sand acts to quickly
damp vibrations.

-0
-0.2
-0.4
-0.6

0.5

0.6

0.7

0.8

0.9

Time (s)FEM structural analysis simulation

Low

N/mm 2 (MPa)

High

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Mechanism and control technology that thoroughly eliminates dynamic error factors
We have achieved the worldʼs highest level of accuracy by thoroughly eliminating dynamic error factors such as deformation, vibration, andThrough improvements in algorithms, we have adjusted the timing ofswitching from probe movement to probe stopping during measurement
and of reading measured values relative to probe motion, so as to minimize
deviations in three-dimensional coordinate values and therefore reducenoise factors in the acquisition of measured values.

wobbling that occur with sliding motion, and by adopting an ultra-high-accuracy measuring unit that we have developed and manufactured
ourselves.

Elimination of pitching and yawing errors
with a fixed-bridge structure

Adopts a center drive system
for all axes

With a moving-bridge structure, the X beam and columns are integrated
into a bridge, which is actuated by the columns, and thus, pitching andyawing errors occur during movement.
The LEGEX Takumi model adopts a fixed-bridge, moving-table structure toeliminate these error factors and achieve higher accuracy.

Since the drive system for each axis is located at the center of gravity ofeach moving part, moments of inertia around the drive axis are reduced,
and there is almost no structural deformation during acceleration or
deceleration.
Additionally, the X-axis guide uses an original structure with Mitutoyoʼsproprietary high-rigidity air bearings placed on all surfaces of the X-axis
beam, enabling high-speed and high-acceleration/deceleration drive.

● Independence of X-axis motion and Y-axis motion

By adopting a fixed-bridge, moving-table structure, the XZ and Y axes of
movement are completely independent, making them less susceptible tothe effects of each otherʼs movements.
X
Z

Z-axis ram
Drive axis
Air bearings

X
Z

Improved control of measuring operations forkeener measuring accuracy

Drive axis

A vibration isolator that controls external
vibration and keeps the main unit horizontal

Auto-leveling pneumatic vibration
isolation platform

When performing ultra-high-accuracy measuring, even the slightest
external vibration can affect accuracy. The LEGEX Takumi model comes witha dedicated high-performance auto-leveling pneumatic vibration isolator asa standard feature. This eliminates external vibrations, and detects
movement of the measuring table or load movement from the object being
measured, so as to promptly restore the main unit to a horizontal position.

Vibration isolation
platform arrangement

Y

Internal vibration countermeasures

Y
X-axis beamMoving-bridge structure

Base

Fixed-bridge, moving-table structure

Utilizes a high-accuracy glass scalewith a linear expansion coefficient of ≃0
Each axis sliding part coatedwith ceramic plasma thermal spray
The sliding parts of the Y-axis guide rails and X-axis beam are coated with aceramic plasma thermal spray to create a surface that is ideal for air
bearing sliding.
It also has excellent rust and corrosion resistance.

The machine is equipped with an ultra-high-accuracy measuring unit thatcombines an ultra-high-accuracy crystallized glass scale that has almost no
thermal expansion, having a linear expansion coefficient of 0.01×10 -6/ °C,
and a high-performance reflective linear encoder with a minimum
resolution of 1/100 µm.
This scaleʼs unique fixing method minimizes hysteresis errors caused bydifferences in thermal expansion with the mounting surface.
Ultra-high accuracy
crystallized glass
scale

0

20∞C
25∞C

<Zero glass, special fixation>
0

50 100 150 200 250 300 350 400 450 500

Position (mm)8

20∞C-1

Error (mm)Error (mm)

0

15∞C

15∞C

20∞C-2
20∞C-3<General-purpose scale, normal fixation>

20∞C
0

25∞C
30∞C

The drive system uses ball screws (X-axis and Y-axis) and a DC servo motor.
In addition, a special ball screw with a floating mechanism located at thenut is used as a countermeasure against conical motion around the ballscrew axis and vibration in the plane perpendicular to the axis.
The floating mechanism absorbs ball screw runout, allowing high-speed
drive without affecting motion accuracy.
Furthermore, various internal vibration countermeasures have been
implemented, including our proprietary high-rigidity, low-vibration air
bearings that suppress vibrations and a special vibration damping
mechanism on each axis guide rail.

Diagram of ball screw
structure with floating
mechanism
Ball screw

Pulse generator
Servo motor
Floating mechanism
Guide block
Nut

Newly developed calibrator that ensures accuracy in previously uncharted
territory
In order to guarantee ultra-high accuracy with a CMM, it is important not only to push advances in the main unit
to the maximum extent, but also to reduce uncertainty in inspections.
The LEGEX Takumi model uses a low-expansion ceramic gauge block calibrated with the newly developed longgauge block optical interferometer LGBI Ⅱ to perform inspections, reducing measurement uncertainty byapproximately 55% compared with conventional models.
Supported by these core technologies possessed by Mitutoyo, this model achieves world-class accuracy.

100 200 300 400 500 600 700 800 900 1000

Position (mm)9Performance evaluation (first mass production unit)

Measurement examples

Combining the skills of master craftsmen (“Takumi Meister” skills) and a number of technologies, we have achieved highly stablemeasurement results.

Maximum permissible length measurement error (E 0,MPE)
measurement results in each direction
1st time

2nd time

3rd time

Maximum permissible length measurement error (E 150,MPE)
measurement results

Standard value

E04

E150 -

1.50

1.50

0.23+0.7L/1000

1.00

0.50

0.00

0.00

-0.50

-0.50

-1.00

-1.00

-1.50

2nd time

3rd time

Standard value

400

600

800

1000

Lens molds

GaugesFor scroll compressors, managing the gap
between the orbiting scroll and fixed scroll isimportant in order to improve compression
performance, and high-accuracy contour
evaluation is required.
The LEGEX Takumi model enables highly accuratecontour evaluation using original scanningtechnology.

When measuring lens molds that require highprecision at a level of 1 µm, the LEGEX Takumi
model is the essential choice of machine,
guaranteeing submicron precision.

The LEGEX Takumi model is ideal for calibrating
various gauges.
Mitutoyo has established a system that is
traceable to national standards not only in Japanbut also in overseas locations, so 'any' gauges
you are using will also be traceable.

0.33+0.7L/1000

1.00

0.50

1st time

Scroll compressors

-1.50
0

200

400

600

800

1000

1200

0

200

E07

E150 +

1.50

1.50

1.00

1.00

0.50

0.50

0.00

0.00

-0.50

-0.50

-1.00

-1.00

-1.50

1200

Gear molds by electrode machining

-1.50
0

200

400

600

800

1000

1200

0

200

400

600

800

1000

1200

Ring gauge scanning measurement results
CW
22. 505135 ‒22. 50445 ‒22. 503
22. 502
0‒

180 ‒

Z

225 ‒

[mm]

Magnification: 18228

Y

10

315 ‒

Die-sinking electric discharge machining can transfer contours to thin objects, long-axis objects, andirregularly shaped molds such as for helical gears that are otherwise difficult to machine at a level ranging
from just a few µm to 20 µm.
The LEGEX Takumi model is capable of measuring complex-shaped molds produced by die-sinking
electrical discharge machining with high accuracy.

270 ‒Courtesy of Mitsubishi Electric Corporation, MST Corporation, and Toyo Tanso Co., Ltd.

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Interv iew

Leading the way and carrying on the traditionof high accuracy with outstanding skills thatcannot be mechanized or standardized

Software
Visit here for details
on the Takumi
Meister system

There are over 600 unique techniques that support the high measurement accuracy of Mitutoyo products. Although the majority of these aremechanized and standardized to eliminate dependence on specific workers, there are some that require outstanding individual skills. These
are considered to be the skills of craftsmen, and among them are some outstanding skills that cannot be mechanized. At Mitutoyo, we haveinstitutionalized a system for our highly skilled craftsmen to pass on their skills to their successors, from the perspectives of “skills that shouldbe passed on” and “skills that must be passed on,” thereby contributing to both the company and society.

A Meister who refines precision impossible for machines
Medal with Yellow Ribbon
Master craftsman

Fusa Ogane

Visit here for detailsof the Takumi Meisterinterview

Skill: FinishingRole: High Precision Lap
Manufacturing Section 1
Production Engineering Development Center Headquarters

MCOSMOS

Lapping is a processing method for achieving a flat-surface finish by placing an abrasive
material between the lapping tool and the finishing surface and rubbing them together, andwhen this process is performed manually it is called “hand lapping.” This hand lapping
technique is one of the most outstanding skills of Fusa Ogane, who has been involved in thedevelopment and assembly of CMMs and in-house production equipment for over 30 years.
With machining, the heat generated by the process alters the finished surface, making it
impossible to meet the required accuracy of straightness to 0.1 µm. In the manufacturing ofCMMs, as the required level of accuracy becomes higher, the need for sophisticated and skilled
hand-lapping techniques becomes all the more essential.
Start by accurately measuring the surface to ascertain its condition; lap with an aim for half thetarget value; measure to ascertain its condition; repeat lapping, aiming for half the target
value. By steadily increasing surface accuracy little by little, relying on experience and touch,
our craftsmen are able to achieve a straightness accuracy of 0.1 µm, impossible for machines.

The Meister who introduced LEGEX to the world and madethe Takumi model a reality
Takumi master

Masao Suzuki(Data processing software for 3D measuring instruments)（Automatic measurement program generation software for CMMs)

Processing program family for 3D measuring instruments, running on
Windows. The wide-ranging lineup of optional software supports various
probes, enabling fully automated measurement of all kinds of workpieces.

Tolerance information from a 3D CAD model is read todetermine which features of the part should bemeasured to verify conformance to specification.
Compared to conventional methods (teaching), thismethod creates more efficient measurement programs
as well as saving time.

Use this QR codefor details

Visit here for detailsof the Takumi Meisterinterview

Skill: FinishingRole: CMM Assembly
Production Engineering Section 2 Production Engineering Department
Microcord plant

For more than 40 years since joining the company in 1980, this craftsman has been primarily
involved in prototyping three-dimensional measuring machines and overseeing assemblability
evaluation and process design for mass production.
He is one of the members of the LEGEX series development and mass production project(1998), which pursued unprecedented accuracy. Looking back on his experiences, he explains,“With the single-minded desire to supply our customers with the worldʼs best CMM withunsurpassed accuracy, Iʼve been engaged in new development evaluation, renewal, and theassembly of custom-ordered products. By solving the many problems that have arisen in theseareas, one by one, Iʼve been able to deepen my knowledge and hone my skills.”
In an area where cutting starting at an accuracy of 1 µm alone is difficult, LEGEX has proudly
boasted the highest level of accuracy for Mitutoyo, achieving an unprecedented starting
accuracy value of 0.3 µm or less. In order to surpass this conventional LEGEX, the LEGEXTakumi Development Project challenged the limits of human skill. The LEGEX Takumi model
was created using the experience and technology cultivated through this project to create theultimate machine that pushes mechanical accuracy to the limit.

12

MiCAT Planner

GEARPAK Express(Gear Measurement and Evaluation Software for CNC Coordinate Measuring Machines)
A 3D model created from the provided gear specifications enables you to visually and easily check whether measurement will be performed as intended.
Furthermore, automatic program creation and on-screen measurement guidance help quick and easy setting of the coordinate system.

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Specifications
Ta k u m i

Rotary table

Model

Guide method

Drive speed

Model

MRT240

MRT320

Depth

327

470

Width

250

400

Height105

150

Table diameter [mm]

240

320

Mass [kg]*

20

120

Max. load [kg]

40

100

± 0.7"± 0.7"

6

9

Accuracy

Indexing accuracy [º]Max. drive speed [rpm]

LEGEX774

CNC MODECNC MODE（Key selector switch: MANUAL）

J/S MODE
Drive acceleration
Measuring method
Resolution

Material
Size (table surface)
Tapped inserts
Maximum height
Workpiece
Maximum mass
Machine mass (includes the vibration-damping platform andcontroller, but not workpiece)
Power supply voltage
Power supply
power supply capacity（Probe and PC not
specifications
included）
Pressure
Air supply
Consumption
Guaranteed accuracy temperature range

Work table

LEGEX776
700 mm

700 mm

450 mm（Key selector switch: AUTO）

Specifications
Dimensions[mm]

X axis
Y axisZ axisMeasuring range

By synchronizing the movement of the CMM andthe rotational movement of the rotary table, evenobjects that would have been conventionallymeasured using multiple probe positions can bemeasured in a short time and with high accuracy
using fewer positions. It is ideal for measuring
rotating workpieces (gears, rotors, shafts,
impellers, blisks, cylindrical cams).

LEGEX574
500 mm

600 mmAir bearings on all axes
Moving Speed: Max. 120 mm/s for each axis (maximum combined speed: 200 mm/s)
Measuring Speed 1 – 3 mm/s
Moving Speed: Max. 120 mm/s for each axis (maximum combined speed: 200 mm/s)
Measuring Speed 1 – 3 mm/s
Moving Speed 0 – 80 mm/s
Measuring Speed 0 – 3 mm/s
Fine Speed 0 – 0.01 mm/s
0.588 m/s2 for each axis (maximum combined acceleration: 0.98 m/s2)
Linear encoder
0.00001 mm
Cast iron
550 mm × 750 mm
750 mm × 750 mm
950 mm × 1050 mm
M8×1.25700 mm
850 mm
250 kg
500 kg
800 kg
3500 kg

5000 kg

5100 kg
Max. 1.5 kW

0.5 MPa (5 kgf/cm2)
120 L/min under normal conditions (air source: 160 L/min or less)
10 to 30 C

SymbolMaximum permissible error of length
measurement

E 150,MPE

Maximum permissible limit of the
R 0,MPL
repeatability range
Maximum permissible scanning mode
P Form.Sph.Scan:PP:Tact,MPE
form error on a sphere
Maximum permissible scanning modeτ Sph.Scan:PP:Tact,MPL
time
Maximum permissible single-stylus
P Form.Sph.1×25:SS:Tact,MPE
form error* Main unit

Guaranteed accuracy temperature environment

unit: µm

E 0,MPE

6500 kg

AC100-120/200-240 V ±10 % (50Hz or 60Hz)

Accuracy
Title

LEGEX9106
900 mm1000 mmStandard
ISO 10360-2:2009
JIS B 7440-2:2013
ISO 10360-2:2009
JIS B 7440-2:2013
ISO 10360-2:2009
JIS B 7440-2:2013
ISO 10360-5:2020
JIS B 7440-5:2022
ISO 10360-5:2020
JIS B 7440-5:2022
ISO 10360-5:2020
JIS B 7440-5:2022

MPP-310Q

SP25M

0.23 ＋ 0.7L/1000

0.38 ＋ 0.7L/1000

0.33 ＋ 0.7L/1000

0.48 ＋ 0.7L/1000

0.20

0.38

0.8

1.1

60sec

60sec

0.35

0.45

Temperature range
Temperature Per hourchangePer 24 hours
Temperature Vertical/
gradient
horizontal

19 to 21 C
0.5 C
1.0 C
1.0 C/m

The E 0,MPE, E 150,MPE, and R 0,MPL testing and evaluation methods comply with ISO 10360-2:2009 (JIS B 7440-2:2013).
The P Form.Sph.Scan:PP:Tact,MPE, τ Sph.Scan:PP:Tact,MPL, and P Form.Sph.1×25:SS:Tact,MPE testing and evaluation methods comply with ISO 10360-5:2020 (JIS B 7440-5: 2022).
L = given measurement length (unit: mm)

Dimensions

unit: mmModel
LEGEX574 LEGEX774 LEGEX776 LEGEX9106
W (Width)
1470
1670
1870
H (Height)
2630
2930
3050
D (Depth)2430
3030
A（Support position）
445
550
660
B（Support position）
1390
1410
1795
C
745
895
E
600
720
F
1311
1461

F

H

Measuringrange

Measuring
range

Y

E

712

251

C

Z

X

A

A
W

14

760

B

570

D

15

2406(JP3), Printed in Japan

Coordinate Measuring Machines

Vision Measuring Systems

Form Measurement

Optical Measuring

Whatever your challenges are, Mitutoyo
supports you from start to finish.
Mitutoyo is not only a manufacturer of top quality
measuring products but one that also offers qualified
support for the lifetime of the equipment, backed up
by comprehensive services that ensure your staff canmake the very best use of the investment.
Sensor Systems

Test Equipment

Digital Scale and DRO Systems

Small Tool Instruments
and Data Management

Apart from the basics of calibration and repair,
Mitutoyo offers product and metrology training,as well as IT support for the sophisticated software
used in modern measuring technology. We can also
design, build, test and deliver measuring solutions
and even, if deemed cost-effective, take your criticalmeasurement challenges in-house on a sub-contract
basis.

Find additional product literatureand our product catalogue
https://www.mitutoyo.co.jp/global.html
Mitutoyo Corporation
Notes on Export Regulations:
Do not commit an act, which could directly or indirectly, violate any law or regulation of Japan,
your country or any other international treaty, relating to the export or re-export of any commodities.

20-1, Sakado 1-Chome,
Takatsu-ku, Kawasaki-shi,
Kanagawa 213-8533, Japan

Note: Product illustrations are without obligation. Product descriptions, in particular any and all technical specifications,are only binding when explicitly agreed upon.
MITUTOYO and MiCAT are either registered trademarks or trademarks of Mitutoyo Corp. in Japan and/or other countries/regions.
Other product, company and brand names mentioned herein are for identification purposes only and may be thetrademarks of their respective holders.
All product information contained in this brochure is current as of June 2024.

T +81 (0) 44 813-8230
F +81 (0) 44 813-8231
https://www.mitutoyo.co.jp