実験報告書様式（一般利用課題・成果公開利用）（ ※本報告書は英語で記述してください。ただし、産業利用課題として採択されている方は日本語で記述していただいても結構です。 ）提出日 Date of Report

Experimental Report

July 5th 2012

課題番号 Project No.

装置責任者 Name of responsible person

2012A0123

Dr. Jun-ichi Suzuki

実験課題名 Title of experiment

装置名 Name of Instrument/（BL No.）

Characterization of the Morphology and Chemical State ofTAIKAN (BL-15)

Magnetic Element in Soft Magnetic Nanogranular Film using

実施日 Date of Experiment

Small-Angle Neutron and X-ray Scattering

May 13th 2012

実験責任者名 Name of principal investigator
Yojiro Oba
所属 Affiliation
Kyoto University Research Reactor Institute
試料、実験方法、利用の結果得られた主なデータ、考察、結論等を、記述して下さい。（適宜、図表添付のこと）
Please report your samples, experimental method and results, discussion and conclusions. Please add figures andtables for better explanation.
1. 試料 Name of sample(s) and chemical formula, or compositions including physical form.
Co-Pd-Si-O nanogranular film
Co-Nb-O nanogranular film
Si substrate
Glassy carbon

2. 実験方法及び結果 （実験がうまくいかなかった場合、その理由を記述してください。）
Experimental method and results.

If you failed to conduct experiment as planned, please describe reasons.

In this study, we investigated the nanostructures of soft magnetic nanogranular films. The nanogranular films
were deposited on single-crystal Si substrate using a radio frequency magnetron sputtering method. Thethicknesses are 1.95 µm for Co-Pd-Si-O films and 4 µm for Co-Nb-O films. For small-angle neutron
scattering (SANS) measurement, several tens of films (26 pieces for Co-Pd-Si-O and 24 pieces for Co-Nb-O)
were stacked.
SANS measurements were performed at room temperature. The incident beam was collimated by 8.4 mm x
8.4 mm slits. In order to separate the magnetic and nuclear scattering contributions, a magnetic field of 0.5 T
was applied using a permanent magnet.
In the qx-qy two dimensional SANS patterns, several spot-like scattering are observed. Here, x, y and z
directions correspond to the direction parallel to the magnetic field, perpendicular to the magnetic field andthe incident beam direction. The momentum transfer q is equal to (4π/λ)sinθ. The parameters λ and θ arewavelength and scattering angle, respectively. These spots appear even in the SANS patterns of the Si
substrates. Hence, they are probably caused by the multiple Bragg diffraction of the Si substrates.

12. 実験方法及び結果（つづき） Experimental method and results (continued)
Then, we converted the SANS patterns into I-q profiles. At present, the shorter wavelength was simply
ignored to avoid the effects of the multiple Bragg scattering. The profiles are normalized by the thickness ofthe samples. Glassy carbon was used as the standard for absolute intensity calibration. The normalized profileof the Co-Pd-Si-O films well agrees with the previous data measured at the other SANS instrument(mf-SANS) installed in JRR-3 (Fig. 1). This indicates that wavelength dependency of scattering properties,
such as transmission rate is well corrected. The profile perpendicular to the magnetic field shows a clear peakaround q=1.6 nm-1, while the profile parallel to the magnetic field shows very weak scattering without clear
peak. The feature of the perpendicular profile is similar to the SAXS profile. This indicates that the shape andsize of the magnetic regions correspond to those of nanoparticles in the films. Therefore, most of Co added in
the films probably forms the nanoparticles.
On the other hand, the profiles of the Co-Nb-O films show clear difference from the SAXS profile. This
probably reflects the difference in the magnetic structures from the chemical structures. For example, if themagnetic nanoparticles have magnetically weak interface due to surface effects, this difference can beexplained. Compared to the Co-Pd-Si-O films, the SANS profile of the Co-Nb-O films perpendicular to themagnetic field has broad peak. This suggests that the magnetic structures have wide size distribution.
In conclusion, we successfully observed the SANS profiles of the soft magnetic nanogranular films. TheSANS profiles of the Co-Pd-Si-O films are similar to the SAXS profiles, while the SANS profiles of theCo-Nb-O films does not correspond to the SAXS profiles. This difference is probably attributed to thedifference in the magnetic structures from the chemical structures.

Fig. 1 I-q profiles of Co-Pd-Si-O nanogranular film perpendicular to magnetic field. The circles are the presentdata. The solid line is the data of same sample measured at the other instrument (mf-SANS) installed inJRR-3.

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