There will be 4
Special Issues of the Journal Micro and Nano Engineering (MNE)
published that include selected papers from theth
49 Micro and Nano Engineering conference MNE2023
The 4 special editions are called:
1. Advanced Micro and Nano Patterning 2023 dedicated to the memory of
nanopatterning pioneer Michael Hatzakis
2. Sustainable Micro- and Nanofabrication 2023
3. Advanced Micro and Nano Devices and Systems for Life Sciences, Biology,
Environment & Agrofood
4. Advanced Micro and Micro Devices and Systems 2023
Accepted papers will be freely available on ScienceDirect as OPEN ACCESS papers
without article processing charges. This is a special agreement between the MNE2023
conference and the MNE journal.
For more information on the submission and on the topics, see below.
Paper submission deadline: depends on topic
January 14th, 2024 or March 13th, 2024
Information on the journal:
www.sciencedirect.com/journal/micro-and-nano-engineeringAdvanced Micro and Nano Patterning 2023 dedicated to thememory of nanopatterning pioneer Michael Hatzakis
Short title: NanoPattern 2023-MikeHatzakis
including selected papers from the49th Micro and Nano Engineering conference MNE2023
The NanoPatterning special issue for 2023 is dedicated to the memory of Mike Hatzakis, apioneer in the field, an IBM fellow and US Academy of Engineering member, a director of theInstitute of Microelectronics in NCSR Demokritos in Greece, an inventor of e-beam lithography
and of the famous lift-off process back in the early 1970s. Mike Hatzakis passed away in
February 2023. More information about Mike can be found here. This issue is an ‘open call’. Thismeans that, while including selected papers presented at MNE2023, it is also open to otherauthors and to experts in the field who wish to honour the memory of Michael Hatzakis with aresearch article, an opinion paper, or a review paper. This special issue includes topics mainly
related to semiconductor research and industry and in addition to other research andmanufacturing sectors where lithography and pattern transfer are important. Contributions cancover the lithographic materials, lithographic processes, metrology, and advanced etching andpatterning. Contributions should be mainly concentrated on a single process/method from thelist below:
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EUV and Optical Lithography
Electron and Ion Beam Lithography
Nanoimprint Lithography, including R2R nanoimprint, Soft Lithography
Mask or Template Fabrication, Mask-Less Lithography, Scanning Probe
Techniques
Materials for Micro and Nanolithography
Directed Self-assembly
Novel Nanolithography and Nanopatterning Methods
Advanced Plasma Etching, Plasma Ashing
Nanometrology, Inspection and Process Control
Lithography and Etching Simulation
History of Nanopatterning, Reviews of Aspects of the Field, Opinions on the
Direction of the Field, as well as other Aspects related to Michael Hatzakis’
Contributionsth

Manuscript submission deadline: March 13 , 2024
Your paper and associated supplementary information should comprise a complete, novel, andfull description of your work. Manuscripts of the special issue will be submitted and reviewed via
the online Elsevier Editorial System (EES). To be part of MNE2023 special issues, you need tochoose MNE journal. Articles will then be processed and published with the standard Elsevier
publishing timeline for each individual manuscript following acceptance. Accepted papers will
be freely available on ScienceDirect as OPEN ACCESS papers WITHOUT any article
processing charges. This is a SPECIAL agreement between MNE2023 conference and
MNE journal.

Guest Editors•••

Dr. Jens Bolten (AMO GmbH)
Prof. Dieter Kern (University of Tübingen)Prof. Francesc Perez-Murano (IMB-CNM, CSIC)

Instructions for authors
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The standard submitted manuscripts are regular articles of MNE journal (4-6 pages).
Review papers (7-10 pages) are encouraged from invited/plenary speakers andleading members of the community. If you are not an MNE invited speaker and you
wish to submit a review, please contact Evangelos Gogolides (Editor-in-Chief, of
MNE journal) or Max C. Lemme (MNE 2023 Program Chair) with a proposal and outline.
News and opinions papers are also welcome from plenary/invited speakers. Again,
please contact the Editor-in-Chief or the MNE 2023 Program Chair with a proposal.
Highly novel work that deserves rapid dissemination can be submitted as anaccelerated publication (up to 4 pages) and will be given high priority. In that case,please declare that in your cover letter and explain the reasons.
For all publications, we encourage you to supply additional information, audios/videos,etc. as on-line supplementary material to appear on the web but not in the printed
version. Your supplementary material will be available directly from ScienceDirect or
ScopusFor general enquiries, please contact Max C. Lemme, MNE Program Chair.
Please submit papers directly using the MNE journal submission web page. Select theappropriate special issue NanoPattern 2023 - Mike Hatzakis and the correct file type(regular paper, review paper, etc.). The submission opens on October 7th 2023 andcloses after the submission deadline.

Please note that the special issue papers undergo the same high-standard review process as anyother MNE paper. At least two reviews need to be in agreement per paper before a decision,and the typical rejection rate is 50-60%. Therefore, please make sure that both the technicalcontent of your paper and your presentation style and language are of high quality andthat the content is novel, unpublished, and not being considered for publication elsewhere. Do
NOT submit work that is not complete yet, or has partially been published before, even
if that work is presented in the conference. Please also note that online software isused to check plagiarism and duplicate publications. Please check the author guidelines.

Sustainable Micro- and Nanofabrication 2023
Short title: Sustainable-NanoFab 2023
including selected papers from the49th Micro and Nano Engineering conference MNE2023
The sustainability of traditional nanofabrication and ecological concerns are at the heart of the
MNE conference community and the MNE journal. A sustainability committee within the MNE
conference has been reevaluating the traditional top-down nanofabrication methods alreadybefore the COVID outbreak. This year, the traditional special issue on Micro- andNanofabrication following the MNE conference embraces the sustainability dimension and ecofriendly approaches of micro- and nanofabrication. This issue is an ‘open call’. This means that,while including selected papers presented at MNE2023, it is also open to other authors. This
special issue aims at presenting novel approaches or improvements in the fabrication ofnanostructures, surfaces, or nanomaterials in 0D, 1D, 2D, or 3D, including biomimeticarchitectures. The special issue also covers original research that demonstrates(multi)functionality and other specific properties of the nanostructures or surfaces. Topics
include but are not limited to:
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Nanofabrication, particularly addressing sustainability, energy efficiency,
recycling of water and chemicals, etc
Micro- and Nanomanufacturing addressing also sustainability, energy efficiency,
recycling of water and chemicals, etc
Plasma surface engineering and other dry techniques, addressing also gas
abatement and fluorocarbon gas elimination
3D nanomanufacturing, 3D microprinting and rapid prototyping“Smart” (multi) functional surfaces with wetting, optical and / or biological
functionality, their sustainable fabrication, including PFAS-free approaches
Bioinspired approaches to nanofabrication
2D materials
Metamaterials
Nanometrology of structures and surfaces
Sustainable Semiconductor Fabrication in light of the Chips Act in Europe.
Artificial Intelligence in Aid of sustainable manufacturing and material designthManuscript submission deadline: March 13 , 2024
Your paper and associated supplementary information should comprise a complete, novel, andfull description of your work. Manuscripts of the special issue will be submitted and reviewed via
the online Elsevier Editorial System (EES). To be part of MNE2023 special issues, you need tochoose MNE journal. Articles will then be processed and published with the standard Elsevier
publishing timeline for each individual manuscript following acceptance. Accepted papers will
be freely available on ScienceDirect as OPEN ACCESS papers WITHOUT any article
processing charges. This is a SPECIAL agreement between MNE2023 conference and
MNE journal.

Instructions for authors
•
•

•
•

•

•
•

The standard submitted manuscripts are regular articles of MNE journal (4-6 pages).
Review papers (7-10 pages) are encouraged from invited/plenary speakers andleading members of the community. If you are not an MNE invited speaker and you
wish to submit a review, please contact Evangelos Gogolides (Editor-in-Chief, of
MNE journal) or Max C. Lemme (MNE 2023 Program Chair) with a proposal and outline.
News and opinions papers are also welcome from plenary/invited speakers. Again,
please contact the Editor-in-Chief or the MNE 2023 Program Chair with a proposal.
Highly novel work that deserves rapid dissemination can be submitted as anaccelerated publication (up to 4 pages) and will be given high priority. In that case,please declare that in your cover letter and explain the reasons.
For all publications, we encourage you to supply additional information, audios/videos,etc. as on-line supplementary material to appear on the web but not in the printed
version. Your supplementary material will be available directly from ScienceDirect or
ScopusFor general enquiries, please contact Max C. Lemme, MNE Program Chair.
Please submit papers directly using the MNE journal submission web page. Select theappropriate special issue Sustainable-NanoFab 2023 and the correct file type (regularthpaper, review paper, etc.). The submission opens on October 7 2023 and closes
after the submission deadline.

Please note that the special issue papers undergo the same high-standard review process as anyother MNE paper. At least two reviews need to be in agreement per paper before a decision,and the typical rejection rate is 50-60%. Therefore, please make sure that both the technicalcontent of your paper and your presentation style and language are of high quality andthat the content is novel, unpublished, and not being considered for publication elsewhere. Do
NOT submit work that is not complete yet, or has partially been published before, even
if that work is presented in the conference. Please also note that online software isused to check plagiarism and duplicate publications. Please check the author guidelines.

Advanced Micro and Nano Devices and Systems for Life Sciences,
Biology, Environment & Agrofood
Short title: NanoLife 2023
including selected papers from the49th Micro and Nano Engineering Conference MNE2023
This issue is an ‘open call’. This means that, while including selected papers presented at
MNE2023, it is also open to other authors. Contributions to this topic should address biological,
bioanalytical, and analytical problems, health, environment, food and agrofood monitoring andsafety, and show how micro/nano engineering can provide the appropriate solution, startingfrom microfluidics, scaffolds, biosensors, all the way to BioMEMS, lab on a chip and organ-on-achip. Targeted areas should include one or more of the following:
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Micro & Nanofluidics
Chemical Sensors
BioSensors & BioMEMS
Lab on Chip
Cell on Chip, Organ on Chip
Micro Total Analysis Systems (microTAS)
Applications in health, environmental monitoring, food safety or agrofood

Manuscript submission deadline: January 14th, 2024
Your paper and associated supplementary information should comprise a complete, novel, andfull description of your work. Manuscripts of the special issue will be submitted and reviewed via
the online Elsevier Editorial System (EES). To be part of MNE2023 special issues, you need tochoose MNE journal. Articles will then be processed and published with the standard Elsevier
publishing timeline for each individual manuscript following acceptance. Accepted papers will
be freely available on ScienceDirect as OPEN ACCESS papers WITHOUT any article
processing charges. This is a SPECIAL agreement between MNE2023 conference and
MNE journal.
Instructions for authors
•
•

•
•

•

The standard submitted manuscripts are regular articles of MNE journal (4-6 pages).
Review papers (7-10 pages) are encouraged from invited/plenary speakers andleading members of the community. If you are not an MNE invited speaker and you
wish to submit a review, please contact Evangelos Gogolides (Editor-in-Chief, of
MNE journal) or Max C. Lemme (MNE 2023 Program Chair) with a proposal and outline.
News and opinions papers are also welcome from plenary/invited speakers. Again,
please contact the Editor-in-Chief or the MNE 2023 Program Chair with a proposal.
Highly novel work that deserves rapid dissemination can be submitted as anaccelerated publication (up to 4 pages) and will be given high priority. In that case,please declare that in your cover letter and explain the reasons.
For all publications, we encourage you to supply additional information, audios/videos,etc. as on-line supplementary material to appear on the web but not in the printed

••version. Your supplementary material will be available directly from ScienceDirect or
ScopusFor general enquiries, please contact Max C. Lemme, MNE Program Chair.
Please submit papers directly using the MNE journal submission web page. Select theappropriate special issue NanoLife 2023 and the correct file type (regular paper, review
thpaper, etc.). The submission opens on October 7 2023 and closes after thesubmission deadline.

Please note that the special issue papers undergo the same high-standard review process as anyother MNE paper. At least two reviews need to be in agreement per paper before a decision,and the typical rejection rate is 50-60%. Therefore, please make sure that both the technicalcontent of your paper and your presentation style and language are of high quality andthat the content is novel, unpublished, and not being considered for publication elsewhere. Do
NOT submit work that is not complete yet, or has partially been published before, even
if that work is presented in the conference. Please also note that online software isused to check plagiarism and duplicate publications. Please check the author guidelines.

Advanced Micro and Micro Devices and Systems 2023
Short title: NanoDevices 2023
including selected papers from the49th Micro and Nano Engineering conference MNE2023
This issue is an ‘open call’. This means that, while including selected papers presented at
MNE2023, it is also open to other authors. This topic encompasses the use of
micro/nanofabrication methods for demonstrating new device and system solutions forapplications in Nanoelectronics, Photonics, Plasmonics, Physical Sensing and Energy Harvesting.
The solutions can be in the form of devices or complete microsystems. Contributions should not
only describe the fabrication procedure but should also include the demonstration of theapplication and integration steps. This topic includes but is not limited to:
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Nanoelectronic Devices, including low power and energy efficient solutions
Photonic and Plasmonic Devices
Nanomagnetism, Data Storage
Physical Sensors, including low and zero-power
Energy Harvesting Sevices
Paper Electronics, Flexible Electronics
Micro & Nano Mechanical Systems (MEMS, NEMS)
Integration and Packaging

Manuscript submission deadline: January 13th, 2024
Your paper and associated supplementary information should comprise a complete, novel, andfull description of your work. Manuscripts of the special issue will be submitted and reviewed via
the online Elsevier Editorial System (EES). To be part of MNE2023 special issues, you need tochoose MNE journal. Articles will then be processed and published with the standard Elsevier
publishing timeline for each individual manuscript following acceptance. Accepted papers will
be freely available on ScienceDirect as OPEN ACCESS papers WITHOUT any article
processing charges. This is a SPECIAL agreement between MNE2023 conference and
MNE journal.
Instructions for authors
•
•

•
•

The standard submitted manuscripts are regular articles of MNE journal (4-6 pages).
Review papers (7-10 pages) are encouraged from invited/plenary speakers andleading members of the community. If you are not an MNE invited speaker and you
wish to submit a review, please contact Evangelos Gogolides (Editor-in-Chief, of
MNE journal) and Max C. Lemme (MNE 2023 Program Chair) with a proposal andoutline.
News and opinions papers are also welcome from plenary/invited speakers. Again,
please contact the Editor-in-Chief or the MNE 2023 Program Chair with a proposal.
Highly novel work that deserves rapid dissemination can be submitted as an accelerated
publication (up to 4 pages) and will be given high priority. In that case, please declarethat in your cover letter and explain the reasons.

•

•
•

For all publications, we encourage you to supply additional information, audios/videos,etc. as online supplementary material to appear on the web but not in the printed
version. Your supplementary material will be available directly from ScienceDirect or
ScopusFor general enquiries, please contact Max C. Lemme, MNE Program Chair.
Please submit papers directly using the MNE journal submission web page. Select theappropriate special issue NanoDevices 2023 and the correct file type (regular paper,
review paper, etc.). The submission opens on October 7th 2023 and closes after thesubmission deadline.

Please note that the special issue papers undergo the same high-standard review process as anyother MNE paper. At least two reviews need to be in agreement per paper before a decision,and the typical rejection rate is 50-60%. Therefore, please make sure that both the technicalcontent of your paper and your presentation style and language are of high quality,
and that the content is novel, unpublished, and not being considered for publication elsewhere.
Do NOT submit work that is not complete yet, or has partially been published before,
even if that work is presented in the conference. Please also note that on-line software
is used to check plagiarism and duplicate publications. Please check the author guidelines.