UHP SOLUTIONSFROM THE TECHNOLOGY LEADER

Ultra High Purity: Stainless steel tube systems andcomponents for the semiconductor industry.

A PIONEER FROM THE START.
NOW A TECHNOLOGY LEADER.

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* All images show the surfaces magnified x 380

Special surfaces provide the highest level of purity for production.
Dockweiler stands for years of experience and expertise in surface optimizationand finishing.
Dockweiler is one of the pioneers among providers of UHP tube systems. Since the introduction of personal computers in the early
1980s, the company has been developing and manufacturing UHP tubes and fittings for the semiconductor industry. Today, Dockweiler offers stainless steel tube systems and components for all UHP media and processes, from thick-walled UHP tubes rightthrough to prefabricated cleanroom manifolds. Options for flexible UHP gas connections, UHP process vessels and connection
systems with no dead space complete the product range.

Year by year, microprocessors are getting smaller and much more
efficient. The purity requirements for the production process are
extremely strict. Even the most minimal level of contamination in
the production environment can make sensitive products such as
microprocessors unusable.

The quality of a weld seam affects the purity of the gas being transported: an interaction with the weld seam can lead to reduced performance. For this reason, weld seams should be smooth, with noheat tint. Discoloration is a sign of oxidation during the welding
process. This can give rise to particles that contaminate the system.

The production environment – including peripheral systems forgases for vacuum generation – must be free of any contamination.
UHP tube systems therefore require an extremely clean surface. A
whole range of factors can significantly impact the purity and quality of the entire facility.

At Dockweiler all welding processes are carried out using the GTAW
method and the suitable gas mixture of flushing and protective gas
to ensure the highest degree of purity.

Excellent material properties, optimal system design, reduced deadspace, and the welding process used are the key elements that ensure optimal system performance. The cleaner the inner surface of asystem, the better its evacuation and purging properties.

Whether in the semiconductor and solar industry, in vacuum
systems and laser technology or in aerospace applications, this
rapid development poses ever-new demands on UHP line systems. Together with our customers we take up these challenges:
Dockweiler – connecting flow to purity.

bright-finish–

anodically cleaned

anodically cleaned–––electropolished0,90 μm

0,80 μm

TCC **

0,70 μm

0,60 μm

0,50 μm

0,40 μm

finetron

0,30 μm

0,20 μm

ultron0,10 μm** Not specified, Ra 0.80 µm on request2www.dockweiler.com

bright-finish

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WE ENGINEER SOLUTIONS.
FOR THE REQUIREMENTS OF TOMORROW.

R4i manifolds.
Ready for installation.
As an engineering partner, Dockweiler offers custom assemblies that meet the highest standards of purity and precision.

A key indicator of our performance is our success in collaborating with our customers. Our bespoke UHP solutions are one outcome ofthis collaboration: for example, manifolds made of corrosion-resistant materials, featuring complex 3D design, minimal dead space, andeasy-to-clean surfaces.

R4I MANIFOLDSThe R4i manifold was developed to simplify all UHP installations.
The prefabricated manifold is collared and then welded, tested
and packaged in a Class 10 (ISO 4) cleanroom in accordance withISO 14644-1. The use of R4i manifolds cuts times for the entire installation process and acceptance through faster purge times and areduced particle count.

Every special part is tested by our quality assurance staff for compliance with international and national standards and dispatched toyou with full documentation.
Benefits:• Improved dry-down times, minimized dead space• SEMI-compliant specification (UHP)

Sizes
Imperial, ISO, metric
According to customer requirements• Fewer weld seams and lower valve costs• Reduced total cost, prefabricated and ready to install• 100% helium leak tested

Options• Orbital weld seams for the highest quality

We offer the following connection options: R4i manifolds withwelding ends or a ZeroCon connection.

• Full documentation

Surfaces

Bright-finish, anodically cleaned, electropolished

Materials

1.4404, 1.4435 (BN2), 1.4306, 1.4307 / UNS S31603 (316L), UNS S30403 (304L)
In addition to our standard materials, special materials such as Hastelloy are available on request.

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ZEROCON.
AS TIGHT AS A WELD SEAM.

FLEXTRON.
PURE FLEXIBILITY.

ZeroCon.
The new, patented connection system made of 100% stainless steel.

Flextron.
Corrugated stainless steel hoses for pure flexibility.

ZeroCon is the easy, efficient solution if you want a new connection that is built to last. It combines all the advantages of a detachable
connection with those of a welded connection. For this reason, ZeroCon can also be used in all UHP applications.

The use of flexible tube systems is becoming increasingly important in the semiconductor industry as well as in some areas of the finechemical industry. Dockweiler has developed a method for manufacturing electropolished corrugated stainless steel hoses. This guarantees
a level of surface purity that meets the strictest of requirements and allows for flexible connection to your facility with minimal use of space– all in electropolished stainless steel.

ZEROCON

Benefits:FLEXTRONThe unique threaded connection is as completely leakproof as aweld seam (helium leak rate -< 10-13 mbar l/s).

• Electropolished surface available

Electropolished, corrugated stainless steel hoses for the semiconductor and fine chemical industries.

Sizes• Completely leakproof

When combined with our ZeroCon connection, Flextron can beconnected easily to an existing supply system with complete leakproofness.

Sizes

Benefits:

Corrugated hose
DN 6 to DN 20
Connection: 1/4“ to 1“(6.35 x 0.89 mm to 25.40 x 1.65 mm)• Optimized, electropolished inner surface

Imperial
6.35 mm to101.60 mm(1/4“ to 4“)

ISODN 8 to DN 80(13.50 mm to88.90 mm)

MetricDN 4 to DN 100(6.00 x 1.00 mm to104.00 x 2.00 mm)• No dead space• Temperature- and pressure-stable• Maintenance-free• Meets the highest purity standards• Clear needle marking guarantees traceability• Available with welding ends, VCR, or ZeroCon connection• Reduced particle contamination

Options• Improved purging behavior

We offer the following connection options: the corrugated hosewith welding ends, a VCR connection, or a ZeroCon connection.

• Flexible connection of components to UHP standards• Less particle generation in dynamic applications

Surfaces

Bright-finish, electropolished

Surfaces

Chemically cleaned, electropolished

Materials

UNS S31603 (316L)

Materials

Corrugated hose: 1.4404 / UNS S31603 (316L), braiding: 1.4301 / UNS S30403 (304L)

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BUBBLERS.
MORE THAN JUST VESSELS.

Bubblers.
For special media.
Safety in stainless steel – Dockweiler bubblers are vessels for thetransport and manufacture of organometallic compounds. As well as
the conventional bubblers for liquids, Dockweiler offers solids bubblers for special media.
Benefits:• For liquids and solids

HPL• Minimized dead space

HPS

EcoAccessories• Electropolished, incl. the last weld seam
• DOT and ADR approved

HPL SERIESHPS SERIESECO SERIESAUXILIARY EQUIPMENT

Bubblers for liquids

Bubblers for solids

Bubblers for liquids with specially optimized components

Heat exchanger system for bubbler temperature control

VolumeVolumeVolume

HE8002 temperature control unitca. 200 ml to 56 liters

ca. 600 ml to 6 liters

ca. 1,5 liters to 8 liters

Options

Options

Options

Crossover and various other valves
Level sensor

Crossover and various other valves
Level sensor–Larger bubblers cannot be used in conventional tempering baths.
Dockweiler offers the flexible HE8002 temperature control unit forthis. This is supplied with a temperature-controlled liquid that keeps
the temperature of the medium in the bubbler constant.

Approvals

Approvals

Approvals

Supply, temperature, and control unit

DOT and ADR

DOT and ADR

DOT and ADR for ECO8000

In the sensitive production process, keeping the temperature ofthe medium constant is a must. To ensure this, Dockweiler offers acontrol unit that, in combination with the temperature control unit,
guarantees temperature stability within a range of 0.2°C.

Surfaces8

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Materials

p = free of oil and grease / hp = electropolished / uhp = electropolished (incl. the last weld seam)

05/202105/20211.4404, 1.4435 (BN2), UNS S31603 (316L)
Other special materials such as UNS S30403 (304L), 904L, Hastelloy, or Monel available on request

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QUALITY.
SURFACE QUALITY AND PURITY.

CLEANROOM.
FOR SEMICONDUCTOR APPLICATIONS.

All-in-one Service:
Production, testing, and packaging.
Surface technology.
Quality knows no compromise.

Cleanroom production: to meet ever-increasing standards interms of surface quality and product purity, we can weld, assemble, test, and package high purity assemblies such as manifolds
and bubblers in our cleanroom. We currently have around 100 m²
of Class 10 (ISO 4) cleanroom area.

In addition to our core expertise in orbital welding, we also offer helium leak testing and residual moisture and particle measurement in
the cleanroom environment. Our innovative UHP solutions make onsite installation easier and safer – with obvious time and cost advantages.

Dockweiler offers specific surfaces for safe equipment: bright-finish, pickled, anodically cleaned, or electropolished. With decades of expertise and experience in surface optimization and finishing, we can give our customers the very best advice on how to implement therequirements of their specific application – up to Ra 0.13 μm!
Chemical surface treatments such as pickling with strong oxidizing acids achieve surface removal of 1-3 μm. This is a very efficientcleaning process that leaves a mat finish because surface removal isnon-specific.

To transport high purity process gases safely to the required locations,
we have developed special surface finishes that are used by all wellknown semiconductor manufacturers.

In electrochemical processes such as anodic cleaning (3-5 μm) andelectropolishing (20 μm) surface removal is specific, resulting in ashiny finish. In the first case, the material is cleaned - in the second, it
is also significantly smoothed. Through subsequent treatment in theclean room, the products can be packaged in a particle-free condition
and thus meet the highest purity standards.

• Resistance to corrosion

Benefits:• Purity• Improved cleaning• Reduced particle count• Free of volatile contaminants

In the semiconductor industry – particularly in gas and vacuum applications – one key objective is to optimize and reduce purge times.
The quality and purity of the surfaces in the tube systems has a significant impact on both the safe operation and the efficiency of theequipment.

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WELDING TECHNOLOGY.
REDEFINED.

Weld seams.
The highest quality standards.
For decades, Dockweiler has been a leader in quality and innovationin the field of welding technology. As standard, we offer the TIG/GTAW
method in orbital welding, purging with the shielding gas argon, anddiscoloration-free welding.

Whether orbital or manual welding, or angled or eccentric 3D welding, no one knows their craft better than our welding experts.

By constantly developing our welding processes and optimizing processes in direct consultation with all the big-name manufacturers oforbital welding machines, we have gained unrivalled expertise thatplaces us at the leading edge.

• Mechanical TIG welding

For example, we have developed the so-called ID welding method.
In contrast to the traditional OD method (from outside to inside), it
allows us perform welding from the inside to the outside on fittingsand manifolds. The advantages of this method are that the uniform
weld seam surface is located on the inside and the branches can bewelded much more closely to each other, with minimal dead space.

Benefits:• High quality, reproducible weld seams• Minimized dead space• Short distances between branches• Controlled weld seam due to welding fromthe inside to the outside• Welding of very small diameters(inner diameters of up to 4 mm)

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Your local office

Dockweiler AG
An der Autobahn 10/20
19306 Neustadt-Glewe
Germany
Phone:
Fax:
E-mail:Web:

05/2021+ 49 38757 58-0
+ 49 38757 58-222
sales@dockweiler.com
www.dockweiler.com