Paper List
January－December, 2021
E2021-1(F)Modification of copper and copper oxide surface states due to isopropyl alcohol
treatment toward area-selective processes
Journal of Vacuum Science & Technology A, 39, (2021), 013403-1-013403-10,
Takezo Mawaki, Akinobu Teramoto, Katsutoshi Ishii, Yoshinobu Shiba, Rihito
Kuroda, Tomoyuki Suwa, Shuji Azumo, Akira Shimizu, Kota Umezawa,
Yasuyuki Shirai, and Shigetoshi Sugawa
https://doi.org/10.1116/6.0000618

E2021-2(F)An Over 120 dB Single Exposure Wide Dynamic Range CMOS Image SensorWith Two-Stage Lateral Overflow Integration Capacitor
IEEE Transactions on Electron Devices, 68, Issue1, pp.152-157, (2021).
Yasuyuki Fujihara, Maasa Murata, Shota Nakayama, Rihito Kuroda, Shigetoshi
Sugawahttp://doi.org/10.1109/TED.2020.3038621

E2021-3(C)A Proposal of Analog Correlated Multiple Sampling with High Density
Capacitors for Low Noise CMOS Image Sensors
Electronic Imaging 2021, Imaging Sensors and Systems 2021, Society for
Imaging Science and Technology, Online, (2021).
Shunta Kamoshita, Manabu Suzuki, Rihito Kuroda, Shigetoshi Sugawa

E2021-4(C)Estimation of the mobility of low temperature polycrystalline silicon thin filmtransistors through deep learning
Proceedings of SPIE, vol.11673, Laser Applications in Microelectronic andOptoelectronic Manufacturing (LAMOM) XXVI; 1167306 (2021)
Akira Mizutani, Fuminobu Hamano, Keita Katayama, Daisuke
Nakamura,Tetsuya Goto, Hiroshi Ikenoue

E2021-5(F)A Global Shutter Wide Dynamic Range Soft X-Ray CMOS Image Sensor With
Backside- Illuminated Pinned Photodiode, Two-Stage Lateral Overflow
Integration Capacitor, and Voltage Domain Memory BankIEEE Transactions on Electron Devices, 68, Issue4, (2021), pp.2056-2063.
Hiroya Shike, Rihito Kuroda, Ryota Kobayashi, Maasa Murata, Yasuyuki
Fujihara, Manabu Suzuki, Shoma Harada, Taku Shibaguchi, Naoya Kuriyama,Takaki Hatsui, Jun Miyawaki, Tetsuo Harada, Yuichi Yamasaki, TakeoWatanabe, Yoshihisa Harada, and Shigetoshi Sugawa
http://doi.org/10.1109/TED.2021.3062576

E2021-6(F)High capacitance density highly reliable textured deep trench SiN capacitors
toward 3D integration
Japanese Journal of Applied Physics, 60, No. SBBC06, (2021), pp.1-7
Koga Saito, Ayano Yoshida, Rihito Kuroda, Hiroshi Shibata, Taku Shibaguchi,
Naoya Kuriyama, and Shigetoshi Sugawa
https://doi.org/10.35848/1347-4065/abec5f

E2021-7(C)Analysis of Reaction and Decomposition of Isopropyl Alcohol on Copper andCopper Oxide Surfaces Toward Area-selective Processes
5th Area-Selective Deposition Workshop (ASD 2021), Session3-4, pp.1, Online,
April 6, 2021
Takezo Mawaki, Akinobu Teramoto, Katsutoshi Ishii, Yoshinobu Shiba,
Tomoyuki Suwa, Shuji Azumo, Akira Shimizu, Kota Umezawa, Rihito Kuroda,Yasuyuki Shirai, Shigetoshi Sugawa

E2021-8(F)Free-Radical Generation from Bulk Nanobubbles in Aqueous ElectrolyteSolutions: ESR Spin-Trap Observation of Microbubble-Treated Water
Langmuir, 37, 16, (2021), pp.5005–5011.
Masayoshi Takahashi, Yasuyuki Shirai, and Shigetoshi Sugawa
https://doi.org/10.1021/acs.langmuir.1c00469

E2021-9(F)[Invite Paper] High Accuracy High Spatial Resolution and Real-Time CMOS
Proximity Capacitance Image Sensor Technology and its Applications
ITE Transactions on Media Technology and Applications, 9, No.2, (2021),
pp.122-127
Rihito Kuroda, Masahiro Yamamoto, Yuki Sugama, Yoshiaki Watanabe,Manabu Suzuki, Tetsuya Goto, Toshiro Yasuda, Shinichi Murakami, Yayoi
Yokomichi, Hiroshi Hamori, Shigetoshi Sugawa
https://doi.org/10.3169/mta.9.122

E2021-10(F)Impact on the Conductance Method of the Asymmetry in the AC Response
Induced by Interface Trap Levels
ECS Journal of Solid State Science and Technology, 10, Number 4, 043004,(2021), April 20, 2021
Hsin-Jyun Lin, Hiroshi Watanabe, Akinobu Teramoto, Rihito Kuroda, Kota
Umezawa, Kiichi Furukawa and Shigetoshi Sugawa
https://doi.org/10.1149/2162-8777/abe8b5

E2021-11(F)Size Effects of Poly-Si Formed by Laser Annealing With Periodic Intensity
Distribution on the TFT Characteristics
IEEE Journal of the Electron Devices Society, 9, (2021), pp.679-686, 06 July
2021
Akira Mizutani, Fuminobu Hamano, Daisuke Nakamura, Tetsuya Goto, Siti
Rahmah Aid, and Hiroshi Ikenoue
https://doi.org/10.1109/JEDS.2021.3094795

E2021-12(F)A high-precision current measurement platform applied for statisticalmeasurement of discharge current transient spectroscopy of traps in SiN
dielectrics
Japanese Journal of Applied Physics, 60, Number 8, (2021), 086501, 27 July
2021
Koga Saito, Hayato Suzuki, Hyeonwoo Park, Rihito Kuroda, AkinobuTeramoto, Tomoyuki Suwa and Shigetoshi Sugawa
https://doi.org/10.35848/1347-4065/ac1215

E2021-13(C)High-precision CMOS Proximity Capacitance Image Sensors with
Large-format 12 μm and High-resolution 2.8 μm Pixels
International Image Sensor Workshop (IISW), pp.288-291, (2021), Online, 23
September 2021
Yuki Sugama, Yoshiaki Watanabe, Rihito Kuroda, Masahiro Yamamoto,Tetsuya Goto, Toshiro Yasuda, Shinichi Murakami, Hiroshi Hamori, Naoya
Kuriyama, and Shigetoshi Sugawa

E2021-14(C)A 1000fps High SNR Voltage-domain Global Shutter CMOS Image Sensor
with Two-stage LOFIC for In-Situ Fluid Concentration Distribution
Measurements
International Image Sensor Workshop (IISW), pp.258-261, (2021), Online, 23
September 2021
Tetsu Oikawa, Rihito Kuroda, Keigo Takahashi, Yoshinobu Shiba, Yasuyuki
Fujihara, Hiroya Shike, Maasa Murata, Chia-Chi Kuo, Yhang Ricardo Sipauba
Carvalho da Silva, Tetsuya Goto, Tomoyuki Suwa, Tatsuo Morimoto, Yasuyuki
Shirai, Masaaki Nagase, Nobukazu Ikeda, Shigetoshi Sugawa

E2021-15(C)Array of GaN micro-LED chips and monocrystal Si CMOS pixel
circuitchips mounted on flexible substrate
The 28th International Display Workshops, (2021), FMC2-4L, VirtualConference, Dec.2, 2021.
Tetsuya Goto, Takeshi Okuno, Yoshikazu Suzuki, Koichi Kajiyama, Yoshihiko
Muramoto, Shigetoshi Sugawa

E2021-16(C)[Invited]Sub-aF Detection Accuracy CMOS Proximity Capacitance Image
Sensors for Inspection, Authentification and More
The 28th International Display Workshops, (2021), INP5-1, Virtual Conference,Dec.2, 2021.
Rihito Kuroda, Yuki Sugama, Yoshiaki Watanabe, Tetsuya Goto, ToshiroYasuda, Shinichi Murakami, Hiroshi Hamori, Shigetoshi Sugawa

E2021-17(C)High Resolution Array Tester for Flat Panel Display Using Proximity
Capacitance Image Sensor
The 28th International Display Workshops, (2021), FMC7/AIS9-4, VirtualConference, Dec.3, 2021.
Toshiro Yasuda, Kazuhisa Kobayashi, Yuichi Yamamoto, Hiroshi Hamori,
Akinobu Teramoto, Rihito Kuroda, Shigetoshi Sugawa