49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Nanoimprint Lithography – Unleashing its Potential

Monday, 25 September
6pm

Welcome Reception
Atrium11:15amBreak

11:30amTrack1 - Novel Developments in Nano/Micro Fabrication Methods
and Processes
MOA12
Chaired by: Dr. Ralf Steingrüber and Ines Stolberg

11:30am

O-S11-T1-1 Scalable, Full-Wafer Fabrication of High Performance,
All-Inorganic Metalenses, Waveguides and Diffractive Optics via
Nanoimprint Lithography» Dr. Dae Eon Jung (University of Massachusetts Amherst), Dr. Vincent
Einck (University of Massachusetts Amherst), Mr. Lucas Verrastro(University of Massachusetts Amherst), Prof. Amir Arbabi (University of
Massachusetts Amherst), Prof. James Watkins (University of
Massachusetts Amherst)

11:45am

O-S11-T1-2 Investigation of different focused ion beam systems
and milling strategies for structuring crystalline semiconductors
and polycrystalline metal layers» Dr. Thomas Loeber (RPTU Kasierslautern - Landau), Dr. Bert Laegel(RPTU Kasierslautern - Landau), Prof. Georg von Freymann (RPTU
Kasierslautern - Landau)

12pm

O-S11-T1-3 Research and Development Activities of EUVL at
NewSUBARU Synchrotron Light Facility» Prof. Takeo Watanabe (University of Hyogo), Dr. Tetsuo Harada(Center for EUVL, Laboratory of Advanced Science and Technology for
Industry, University of Hyogo), Dr. Shinji Yamakawa (Center for EUVL,
Laboratory of Advanced Science and Technology for Industry,
University of Hyogo)

12:15pm

O-S11-T1-4 Nano-antennas with decoupled transparent leads for
opto-electronic studies» Ms. Melanie Sommer (University of Tübingen), Dr. Florian Laible(University of Tübingen), Dr. Kai Braun (University of Tübingen), Prof.
Alfred Meixner (University of Tübingen), Prof. Monika Fleischer(University of Tübingen)Tuesday, 26 September
7:30amReception/Registration
Atrium

8:30amOpening Ceremony
Plenary Hall (MOA12/08/07)

8:45amKeynote Andreas Tünnermann
Plenary Hall (MOA12/08/07)
Micro- and nano-optics – enabler of revolutionary changes inphotonics

9:25amKeynote Bernard Kress
Plenary Hall (MOA12/08/07)
Pushing the limits of micro- and nanofabrication for immersive
displays

10:05am

Coffee Break
Atrium

10:35amKeynote Thomas Glinsner
Plenary Hall (MOA12/08/07)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

11:30amTrack2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems
MOA4/5Chaired by: Prof. Regina Luttge and Dr. Jean-Francois de Marneffe

11:30am

O-S12-T2-1 Plasmonic black coatings with broadband absorption» Dr. Mario Ziegler (Leibniz Institute for Photonic Technology e.V.), Dr.
David Zanders (Ruhr University Bochum), Mr. Valentin Ripka (Leibniz
Institute for Photonic Technology e.V.), Mr. Hanjörg Wagner (Leibniz
Institute for Photonic Technology e.V.), Ms. Vilborg Vala Sigurjónsdóttir
(Leibniz Institute for Photonic Technology e.V.), Prof. Anjana Devi (Ruhr
University Bochum), Dr. Uwe Hübner (Leibniz Institute for Photonic
Technology e.V.)

11:45am

O-S12-T2-2 A spin-on-carbon/thin-metal based metasurface forbroadband light modulation» Mr. Shuoqiu Tian (Fudan university), Prof. Yifang Chen (Fudan
university)

12pm

O-S12-T2-3 Durable Icephobic Superhydrophobic Silicon
Nanowires Surfaces» Mr. Miika Heikkilä (Aalto University), Ms. Laura Fieber (Aalto
University), Mr. Seyed Mehran Mirmohammadi (Aalto University), Dr.
Ville Jokinen (Aalto University), Prof. Sami Franssila (Aalto University)

12:15pm

O-S12-T2-4 Photoinduced reconfigurable hydrophilic patterngeneration in thin film metal oxides» Mr. Jesper Navne (Technical University of Denmark), Ms. Rucha A.
Deshpande (Technical University of Denmark), Mr. Mathias Adelmark(Technical University of Denmark), Mr. Evgeniy Shkondin (DTU
Nanolab), Prof. Julien Bachmann (Friedrich-Alexander-Universität
Erlangen-Nürnberg), Prof. Rafael Taboryski (Technical University ofDenmark)

11:30amTrack2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems
MOA6
Chaired by: Dr. Helmut Schift and Prof. Uzodinma Okoroanyanwu

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11:30amO-S13-T2-1 3D Printing of Molecularly Imprinted Polymers by
Digital Light Processing for antibiotics recovery» Ms. Elena Camilli (Politecnico di Torino), Mr. Wei Tang (The Universityof Tokyo), Dr. Ignazio Roppolo (Politecnico di Torino), Dr. Francesca
Frascella (Politecnico di Torino), Mrs. Valentina Bertana (Politecnico di
Torino), Prof. Matteo Cocuzza (Politecnico di Torino), Prof. Tsuyoshi
Minami (The University of Tokyo), Dr. Simone Luigi Marasso (CNR)

11:45amO-S13-T2-2 Fully inkjet printed and metallized waveguide antenna
for RADAR application» Mr. Peter Bauer (PROFACTOR GmbH), Mr. Gerald Stubauer(PROFACTOR GmbH), Dr. Pavel Kulha (PROFACTOR GmbH), Dr. Michael
Haslinger (PROFACTOR GmbH), Mr. Christian Debatin (Notion SystemsGmbH), Mr. Jochen Seeser (Notion Systems GmbH), Dr. Alexander
Fischer (Robert Bosch GmbH), Dr. Istvan Denes (Robert Bosch GmbH),
Dr. Dieter Holzinger (TIGER Coatings GmbH & Co KG), Dr. Doron
Gurovich (PV Nano Cell Ltd), Mr. Semyon Melamed (PV Nano Cell Ltd)

12pm

O-S13-T2-3 Focused Ion Beam sample preparation for Reverse Tip
Sample SPM applications» Mr. Pieter Lagrain (IMEC), Mr. Lennaert Wouters (IMEC), Mr. Kris
Paulussen (IMEC), Dr. Eva Grieten (IMEC), Dr. Geert Van den Bosch(IMEC), Dr. Sana Rachidi (IMEC), Dr. Didit Yudistira (IMEC), Dr. Thomas
Hantschel (IMEC)

12:15pm

O-S13-T2-4 Block copolymer nanostructured Si thin films forthermoelectric enhancement» Mr. Alex Rodriguez-Iglesias (Institute of Microelectronics of Barcelona(IMB-CNM-CSIC)), Dr. Iñigo Martín-Fernández (Institute ofMicroelectronics of Barcelona (IMB-CNM-CSIC)), Dr. Francesc PerezMurano (Institute of Microelectronics of Barcelona (IMB-CNM-CSIC)),Dr. Joaquín Santander (Institute of Microelectronics of Barcelona (IMBCNM-CSIC)), Dr. F. Xavier Álvarez (Universitat Autònoma de Barcelona(UAB)), Dr. Aitor F. Lopeandia (Universitat Autònoma de Barcelona(UAB)), Dr. Luis Fonseca (Instituto de Microelectrónica de Barcelona(IMB-CNM, CSIC)), Dr. Libertad Abad (Instituto de Microelectrónica deBarcelona (IMB-CNM, CSIC)), Dr. Marc Salleras (Instituto deMicroelectrónica de Barcelona (IMB-CNM, CSIC)), Dr. Marta FernándezRegúlez (Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC))

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

11:30am

12:15pm

O-S14-T4-3 Gas sensing properties of thin Carbyne-enriched
coatings on micro- InterDigitated Electrodes» Dr. Ioannis Raptis (NCSR Demokritos), Dr. Petros Oikonomou(Institute of Nanoscience and Nanotechnology, NCSR Demokritos,
Aghia Paraskevi 15341, Attiki, Greece), Mr. Athanasios Botsialas(Institute of Nanoscience and Nanotechnology, NCSR Demokritos,
Aghia Paraskevi 15341, Attiki, Greece), Prof. Mariya Aleksandrova (TU
Sofia), Dr. Angeliki Tserepi (Institute of Nanoscience andNanotechnology, NCSR Demokritos, Aghia Paraskevi 15341, Attiki,
Greece), Dr. Evangelos Gogolides (NCSR Demokritos)

12:30pm

Lunch Break

1:30pmInvited Talk Marc A. Verschuuren
MOA12
Chaired by: Prof. Urs Staufer and Julian Hartbaum

Invited Talk Claudia Bock
MOA9Chaired by: Prof. Dieter P. Kern and Dr. Angelo Accardo
O-S14-T4-1 Toward ohmic contacts on plasma-enhanced atomic
layer deposited molybdenum disulfide

12pm

Track4 - Micro/Nano Engineering for Physical and Chemical
Applications
MOA9
Chaired by: Prof. Dieter P. Kern and Dr. Angelo Accardo

12pm
O-S14-T4-2 Group IV nanowires for nano-/optoelectronic andsensing applications» Dr. Muhammad Bilal Khan (Institute of Ion Beam Physics andMaterials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR)),
Mr. Ahmad Echresh (Institute of Ion Beam Physics and Materials
Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR)), Mr.
Sayantan Ghosh (Institute of Ion Beam Physics and Materials Research,
Helmholtz-Zentrum Dresden-Rossendorf (HZDR)), Mr. Oliver Steuer(Institute of Ion Beam Physics and Materials Research, HelmholtzZentrum Dresden-Rossendorf (HZDR)), Mr. Muhammad Moazzam
Khan (Institute of Ion Beam Physics and Materials Research,
Helmholtz-Zentrum Dresden-Rossendorf (HZDR)), Dr. Slawomir
Prucnal (Institute of Ion Beam Physics and Materials Research,
Helmholtz-Zentrum Dresden-Rossendorf (HZDR)), Dr. Lars Rebohle(Institute of Ion Beam Physics and Materials Research, HelmholtzZentrum Dresden-Rossendorf (HZDR)), Dr. Shengqiang Zhou (Instituteof Ion Beam Physics and Materials Research, Helmholtz-Zentrum
Dresden-Rossendorf (HZDR)), Prof. Manfred Helm (Institute of Ion
Beam Physics and Materials Research, Helmholtz-Zentrum DresdenRossendorf (HZDR)), Prof. Artur Erbe (Institute of Ion Beam Physics andMaterials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR)),
Dr. Yordan Georgiev (Institute of Ion Beam Physics and Materials
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O-S21-T1-1 Full wafer based soft-NIL of functional materials forphotonics and bio applications

1:30pmFocus Track - Next Generation Quantum Computing and relatedMaterials
MOA4/5Chaired by: Dr. Jens Bolten and Prof. Harold Chong

1:30pm

O-S22-FT-1 Optimizing Josephson Junction manufacturing toincrease yield and throughput in Qubit fabrication» Dr. Marcus Rommel (Chalmers University of Technology)

1:45pm

O-S22-FT-2 Nanofabrication methodology and optimization forphoton extraction on diamonds’ NV center» Dr. Mohammad Soltani (Institute for quantum computing (IQC),
University of Waterloo), Dr. Behrooz Semnani (Institute for quantum
computing (IQC), University of Waterloo), Mr. AbdolReza Pasharavesh(Institute for quantum computing (IQC), University of Waterloo), Mr.
Vinodh Raj Rajagopal Muthu (Institute for quantum computing (IQC),
University of Waterloo), Prof. Christopher Wilson (Institute forquantum computing (IQC), University of Waterloo), Prof. Michal Bajcsy(Institute for quantum computing (IQC), University of Waterloo)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

2pm

O-S22-FT-3 Integrated superconducting single photon detectors
for trapped ion quantum computers» Mr. Philipp Hoffmann (Physikalisch-Technische Bundesanstalt (PTB)),
Dr. Alexander Fernandez Scarioni (Physikalisch-Technische
Bundesanstalt (PTB)), Dr. Sebastian Raupach (Physikalisch-Technische
Bundesanstalt (PTB)), Mr. Peter Hinze (Physikalisch-Technische
Bundesanstalt (PTB)), Dr. Thomas Weimann (Physikalisch-Technische
Bundesanstalt (PTB)), Dr. Mark Bieler (Physikalisch-Technische
Bundesanstalt (PTB))

2:15pm

O-S22-FT-4 Design, fabrication and characterization of diamondnanophotonic structures for quantum networks applications» Mrs. Nina Codreanu (QuTech and Kavli Institute of Nanoscience, Delft
University of Technology), Dr. Lorenzo De Santis (QuTech and Kavli
Institute of Nanoscience, Delft University of Technology), Mr. Matteo
Pasini (QuTech and Kavli Institute of Nanoscience, Delft University ofTechnology), Mrs. Julia Brevoord (QuTech and Kavli Institute of
Nanoscience, Delft University of Technology), Mr. Christian Primavera(QuTech and Kavli Institute of Nanoscience, Delft University ofTechnology), Mr. Adria Riera-Moral (QuTech and Kavli Institute of
Nanoscience, Delft University of Technology), Prof. Ronald Hanson(QuTech and Kavli Institute of Nanoscience, Delft University ofTechnology), Prof. Simon Groeblacher (Department of Quantum
Nanoscience and Kavli Institute of Nanoscience, Delft University ofTechnology)

2:30pm

1:30pm

O-S22-FT-5 MOCVD of 2D Materials and Heterostructures» Mr. Jan Mischke (AIXTRON SE), Dr. Simonas Krotkus (AIXTRON SE), Dr.
Sergej Pasko (AIXTRON SE), Mr. Haonan Tang (AIXTRON SE), Dr.
Xiaochen Wang (AIXTRON Ltd.), Mr. Ben Conran (AIXTRON Ltd.), Dr.
Clifford McAleese (AIXTRON Ltd.), Dr. Richard John Walker (AIXTRONLtd.), Dr. Alexander Henning (AIXTRON SE), Prof. Prof. Dr. Michael
Heuken (AIXTRON SE)
Track2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems
MOA6
Chaired by: Dr. Michel DESPONT and Mr. Dominique Colle

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1:30pm

O-S23-T2-1 Integrating top-down nanopatterning with bottom-up
self-assembly to fabricate photonic cavities with atomic-scaledimensions» Mr. Ali Nawaz Babar (DTU Electro, Department of Electrical andPhotonics Engineering, Technical University of Denmark, Kgs. Lyngby,
Denmark.), Mr. Thor August Schimmell Weis (DTU Electro, Department
of Electrical and Photonics Engineering, Technical University ofDenmark, Kgs. Lyngby, Denmark.), Mr. Konstantinos Tsoukalas (DTU
Electro, Department of Electrical and Photonics Engineering, Technical
University of Denmark, Kgs. Lyngby, Denmark.), Dr. Shima
Kadkhodazadeh (DTU Nanolab, Technical University of Denmark, Kgs.
Lyngby, Denmark.), Dr. Guillermo Arregui (DTU Electro, Department ofElectrical and Photonics Engineering, Technical University of Denmark,Kgs. Lyngby, Denmark.), Dr. Babak Vosoughi Lahijani (DTU Electro,
Department of Electrical and Photonics Engineering, Technical
University of Denmark, Kgs. Lyngby, Denmark.), Dr. Søren Stobbe (DTU
Electro, Department of Electrical and Photonics Engineering, Technical
University of Denmark, Kgs. Lyngby, Denmark.)

1:45pm

O-S23-T2-2 Evaluation of the van der Waals force on the CNT
Slipping Process in Transmission Electron Microscope» Mr. Keisuke Higashitani (University of Tsukuba), Prof. Samel Jeong(University of Tsukuba), Prof. Keishi Akada (University of Tsukuba), Dr.
Toshihiko Fujimori (Sumitomo Electric Industries, Ltd.), Prof. Fujita Junichi (University of Tsukuba)

2pm

O-S23-T2-3 Harvesting and optical manipulation of 4D printedhydrogel microrobots» Mr. Stefan Sützl (Technical University of Denmark), Mr. Daniel Maher(Technical University of Denmark), Mr. Marcin Piekarczyk (Technical
University of Denmark), Dr. Colm Delaney (Trinity College Dublin), Dr.
Larisa Florea (Trinity College Dublin), Dr. Ada-Ioana Bunea (Technical
University of Denmark)2:15pm

O-S23-T2-4 Conventional fabrication techniques with high yield
for a tuneable room temperature single-electron transistor andfield-effect transistor» Mr. Kai-Lin Chu (Imperial College London), Dr. Faris Abualnaja(Imperial College London), Mr. Wenkun He (Imperial College London),Dr. Mervyn Jones (Imperial College London), Dr. Zahid Durrani(Imperial College London)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

2:30pm

O-S23-T2-5 Structural and morphological study on a-Ge based
nanostructures: dewetting from flat to patterned films» Dr. Sonia Freddi (Institute of Photonics and Nanotechnology (IFN) –CNR), Mr. Michele Gherardi (Department of Physics, Politecnico di
Milano), Dr. Dominique Chatain (Aix-Marseille Univ, CNRS, CINaM),
Prof. Gianfranco Sfuncia (Istituto per la microelettronica e microsistemi(IMM) -CNR), Prof. Giuseppe Nicotra (Istituto per la microelettronica e
microsistemi (IMM) -CNR), Dr. Mohammed Bouabdellaoui (AixMarseille Univ, CNRS, CINaM and Solnil), Ms. Chiara Barri (Departmentof Physics, Politecnico di Milano), Mr. Luca Fagiani (Politecnico di
Milano), Dr. Alexey Fedorov (Department of Physics, Politecnico di
Milano), Dr. Marco Abbarchi (Aix Marseille Univ, Université de Toulon
and Solnil), Dr. Monica Bollani (CNR)

2:15pmO-S24-T4-4 Resonance tuning in plasmonic nanorings» Mr. Wei Tao (University of Technology of Troyes), Dr. Florian Laible(University of Tübingen), Dr. Abdelhamid Hmima (University ofTechnology of Troyes), Ms. Oceane Guillot (University of Tübingen),Prof. Thomas Maurer (University of Technology of Troyes), Prof.
Monika Fleischer (University of Tübingen)

2:30pmO-S24-T4-5 Fabrication of silicon gratings for an X-ray free electron
laser spectrometer» Dr. Joan Vila-Comamala (Paul Scherrer Institute), Dr. Elisabeth Marie
Skoropata (Paul Scherrer Institute), Dr. Cristian Svetina (IMDEA
Nanociencia), Prof. Luc Patthey (Paul Scherrer Institute), Dr.
Konstantins Jefimovs (Paul Scherrer Institute), Dr. Elia Razzoli (PaulScherrer Institute), Dr. Christian David (Paul Scherrer Institute)

1:30pmTrack4 - Micro/Nano Engineering for Physical and Chemical
Applications
MOA9
Chaired by: Dr. John Randall and Dr. Anya Grushina

2pm

Track1 - Novel Developments in Nano/Micro Fabrication Methods
and Processes
MOA12
Chaired by: Prof. Urs Staufer and Julian Hartbaum

1:30pmO-S24-T4-1 Micro-scaled chemical oscillator networks - towards
chemical computing» Ms. Jacqueline Figueiredo da Silva (IBM Research Zurich), Dr. Robert
Lovchik (IBM Research Zurich), Dr. Vesna Bacheva (IBM Research
Zurich), Ms. Ute Drechsler (IBM Research Zurich), Mr. Steffen Reidt(IBM Research Zurich), Prof. Juan Perez-Mercader (Harvard University),
Dr. Armin Knoll (IBM Research Zurich), Dr. Heiko Wolf (IBM Research
Zurich)2pm

O-S21-T1-2 An effective and promising process for manufacturing
nanofluidic channels in large scale» Mr. Wentao Yuan (Fudan university), Mr. Shuoqiu Tian (Fudan
university), Prof. Yifang Chen (Fudan university)

2:15pm

O-S21-T1-3 3D laser direct lithography for maskless patterning onlarge-format complex surfaces» Mr. Julian Hürtgen (Fraunhofer ILT)

2:30pm

O-S21-T1-4 Rapid Tooling for Injection Moulding with DLP 3D
Printing» Mr. Duarte Menezes (University of Glasgow), Ms. Alysha Hunter(University of Glasgow), Prof. Nikolaj Gadegaard (University ofGlasgow)

2:45pmBreak

1:45pm2pm

O-S24-T4-2 Laser production of clean energy by laser micro andnano-bubbling in liquids» Prof. G.W. Yang (School of Materials Science & Engineering, Sun Yatsen University, Guangzhou 510275, P. R. China)
O-S24-T4-3 Fabrication of self-powered wearable pressure sensing
system based on PVDF-TrFE and ionic liquid» Prof. Je Hoon Oh (Hanyang University), Ms. Chaeeun Lee (Hanyang
University), Mr. Changwoo Cho (Hanyang University)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

3pm

3pm

3:15pm

3:30pm3:45pm4pm
O-S31-T1-5 Synthesis of super-flat graphene on substrates
selected by molecular dynamics calculation» Dr. Satoru Kaneko (KISTEC), Prof. Takashi Tokumasu (Tohoku
University), Dr. Satomi Tanaka (KISTEC), Dr. Chihiro Kato (KISTEC), Dr.
Manabu Yasui (KISTEC), Dr. Masahito Kurouchi (KISTEC), Dr. Daishi
Shiojiri (aaa), Mr. Masahiko Mitsuhashi (KISTEC), Prof. Ruei-Sung Yu(Asia University), Dr. Shihgeo Yasuhara (Japan Advanced Chemicals),Prof. Musa Can (Istanbul University), Dr. Kripasindhu Sardar (National
Cheng Kung University), Dr. Sumanta Sahoo (Radhakrishna Institute ofTechnology and Engineering), Prof. Masahiro Yoshimura (National
Cheng Kung University), Dr. Akifumi Matsuda (Tokyo Institute ofTechnology), Prof. Mamoru Yoshimoto (T)Track1 - Novel Developments in Nano/Micro Fabrication Methods
and Processes
MOA12
Chaired by: Prof. JaeJong Lee and Dr. Anja Voigt
O-S31-T1-1 A Unique New Correlative Microscopy Platform for
Combined Nanoscale Microscopy by Combination of AFM and SEM» Dr. Christian Schwalb (Quantum Design Microscopy GmbH)O-S31-T1-2 Millimeter-Scale Van Der Waals Graphene-MoS2
Heterostructures Verified by Raman Spectroscopy» Mr. Nico Rademacher (Chair of Electronic Devices, RWTH Aachen
University), Mr. Eros Reato (Chair of Electronic Devices, RWTH Aachen
University), Ms. Annika Grundmann (Compound Semiconductor
Technology, RWTH Aachen University), Prof. Prof. Dr. Michael Heuken(AIXRT), Dr. Holger Kalisch (Compound Semiconductor Technology,
RWTH Aachen University), Prof. Andrei Vescan (Compound
Semiconductor Technology, RWTH Aachen University), Dr. Alwin Daus
(Chair of Electronic Devices, RWTH Aachen University), Prof. Max C.
Lemme (Chair of Electronic Devices, RWTH Aachen University and AMO
GmbH, Advanced Microelectronic Center Aachen)

O-S31-T1-3 Wafer-Level Zone Casting of Additive-Free Graphene
Dispersion» Mr. Marc Stevens (Fraunhofer ENAS), Dr. Sascha Hermann(Fraunhofer ENAS)

O-S31-T1-4 Damage-free Plasma-assisted Atomic Layer Depositionof High-quality Dielectrics on 2D Materials» Dr. Sarah Riazimehr (Oxford Instruments), Dr. Harm Knoops (Oxford
Instruments), Mrs. Ardeshir Esteki (RWTH Aachen), Dr. Gordon Rinke(AMO GmbH), Mr. Martin Otto (AMO GmbH), Dr. Zhenxing Wang (AMO
GmbH), Prof. Max Lemme (AMO GmbH), Dr. Katie Hore (Oxford
Instruments)

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3pm

Invited Talk Michael Heuken
MOA4/5Chaired by: Dr. Frank Dirne and Dr. Michael Hornung
O-S32-T2-1 Review on recent MOCVD developments

3pm

Track2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems
MOA6
Chaired by: Dr. Francesc Perez-Murano and Dr. Ioannis Raptis

3pm
O-S33-T2-1 Dry release of MEMS Al2O3 origami for facet-based
device integration with assistance of SU-8 reinforcement andfolding stopping bars
» Mr. Jianran Zhang (Dresden University of Technology Center for
Advancing Electronics Dresden), Dr. Carsten Strobel (TU Dresden), Prof.
Thomas Mikolajick (Dresden University of Technology Center for
Advancing Electronics Dresden), Dr. Robert Kirchner (Dresden
University of Technology Center for Advancing Electronics Dresden)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

4pm

O-S33-T2-5 2D BDiode – A Switchable Bidirectional Diode for
Analog Electronic Circuits Fabricated Entirely from 2D Materials» Dr. Christian Matthus (Chair for Circuit Design and Network Theory,
Technische Universität Dresden), Mr. Phanish Chava (Institute of Ion
Beam Physics and Materials Research, Helmholtz-Zentrum DresdenRossendorf (HZDR)), Dr. Kenji Watanabe (Research Center for
Functional Materials, National Institute for Materials Science, 1-1
Namiki, Tsukuba 305-0044, Japan), Dr. Takashi Taniguchi (Internat.
Center for Materials Nanoarchitectonics, National Institute forMaterials Science, 1-1 Namiki,), Prof. Thomas Mikolajick (Dresden
University of Technology Center for Advancing Electronics Dresden),
Prof. Artur Erbe (Institute of Ion Beam Physics and Materials Research,
Helmholtz-Zentrum Dresden-Rossendorf (HZDR))

3pm

Track4 - Micro/Nano Engineering for Physical and Chemical
Applications
MOA9
Chaired by: Dr. Robert Kirchner and Dr. Irene Fernandez-Cuesta

3pm

O-S34-T4-1 3D printed diffractive optical elements for rapid
prototyping.
» Dr. Daniel Fan (University of Melbourne), Dr. Sejeong Kim (Universityof Melbourne)

3:15pmO-S34-T4-2 Bowtie photonic-crystal waveguides as strong lightmatter interfaces» Dr. Guillermo Arregui (Technical University of Denmark), Mr. Ali
Nawaz Babar (Technical University of Denmark), Ms. Anastasiia
Vladimirova (Technical University of Denmark), Mr. Christian Anker
Rosiek (Technical University of Denmark), Dr. Babak Vosoughi Lahijani(Technical University of Denmark), Dr. Søren Stobbe (Technical
University of Denmark)3:30pmO-S34-T4-3 qBIC-based metasurfaces on SOI for light polarization
control» Mr. Luca Fagiani (Politecnico di Milano), Dr. Luca Bolzonello (ICFO Institut de Ciencies Fotoniques), Dr. Johann Osmond (ICFO - Institut deCiencies Fotoniques), Prof. Domenico de Ceglia (University of Brescia),
Prof. Niek Van Hulst (ICFO - Institut de Ciencies Fotoniques), Dr.
Monica Bollani (Institute of Photonics and Nanotechnologies Consiglio Nazionale delle Ricerche (IFN-CNR)), Dr. Maria Antonietta
Vincenti (University of Brescia)

3:15pmO-S33-T2-2 Near-infrared photodetectors based on single
germanium nanowires» Mr. Ahmad Echresh (Institute of Ion Beam Physics and Materials
Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR)), Mr. Mohd
Saif Shaikh (Institute of Ion Beam Physics and Materials Research,
Helmholtz-Zentrum Dresden-Rossendorf (HZDR)), Prof. Manfred Helm
(Institute of Ion Beam Physics and Materials Research, HelmholtzZentrum Dresden-Rossendorf (HZDR)), Prof. Artur Erbe (Institute of Ion
Beam Physics and Materials Research, Helmholtz-Zentrum DresdenRossendorf (HZDR)), Dr. Yonder Berencén (Institute of Ion Beam
Physics and Materials Research, Helmholtz-Zentrum DresdenRossendorf (HZDR)), Dr. Lars Rebohle (Institute of Ion Beam Physics
and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf(HZDR)), Dr. Yordan Georgiev (Institute of Ion Beam Physics andMaterials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR))

3:30pmO-S33-T2-3 The coexistence of volatile and non-volatile resistive
switching in WTe2 conductive bridge random access memory
devices for neuromorphic computing» Dr. Haider Abbas (Nanyang Technological University), Dr. Asif Ali(Nanyang Technological University), Mr. Jiayi Li (Nanyang Technological
University), Prof. Diing Shenp Ang (Nanyang Technological University)

3:45pmO-S33-T2-4 Development of thermal rectification on asymmetricdefect engineered graphene device» Dr. Mohammad Razzakul Islam (Japan Advanced Institute of Scienceand Technolgy), Dr. Afsal Kareekunnam (Japan Advanced Institute of
Science and Technolgy), Prof. Hiroshi Mizuta (Japan Advanced Instituteof Science and Technolgy)

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Continued from Tuesday, 26 September

3:45pmO-S34-T4-4 UV-NIL based High-Throughput, Reproducible, andCost-Effective SERS Platforms» Dr. Firehun Dullo (SINTEF), Dr. Karolina Milenko (SINTEF), Dr.
Christopher Dirdal (SINTEF), Mr. Paul Thrane (SINTEF), Mr. Zeljko Skokic(SINTEF)

4pm

O-S34-T4-5 High aspect ratio silicon-based micro- and nanofabrication of optics for X-ray diagnostic imaging» Dr. Lucia Romano (ETH Zurich and PSI), Mr. Qihui Yu (ETH Zurich and
PSI), Dr. Jelena Petrovic (ETH Zurich and PSI), Dr. Konstantins Jefimovs(Paul Scherrer Institute), Dr. Craig Lawley (ETH Zurich and PSI), Prof.
Marco Stampanoni (ETH Zurich and PSI)

3:30pmTrack2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems / Track1 - Novel Developments in Nano/Micro
Fabrication Methods and Processes
MOA4/5Chaired by: Dr. Frank Dirne

3:30pmO-S32-T2-2 Scalable, Flame-resistant, Superhydrophobic Ceramic
Metafibers for Sustainable All-day Radiative Cooling» Ms. Ching Wen Hwang (National Tsing Hua University), Ms. MengTing Tsai (National Tsing Hua University), Ms. Pin-Hui Lan (National
Tsing Hua University), Ms. Tai-Chi Chen (National Tsing Hua University),Prof. Dehui Wan (National Tsing Hua University)

3:45pmO-S32-T1-3 Additive manufacturing-derived 3D pyrolytic carbon
electrodes with hierarchical micro- and nanostructures for onchip microsupercapacitors» Ms. Swetha Vasudevan Kanakkottu (Technical University ofDenmark), Prof. Babak Rezaei (Technical University of Denmark), Prof.
Stephan Sylvest Keller (Technical University of Denmark)4pm

O-S32-T1-4 Harnessing Particle Raytracing for Real-Time Vapor
Deposition Simulations in Evolving Topographies» Mr. Erik E. Lorenz (Fraunhofer ENAS), Mrs. Linda Jäckel (Fraunhofer
ENAS), Dr. Jörg Schuster (Fraunhofer ENAS)

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4:15pmPoster Session1.1: Focus Track/Track1/Track3
MOA10/11

P-S11-01-T1 Design and preparation of one-dimensional LiFePO4
cathode by electrophoretic deposition method for flexible knitted
batteries» Ms. Nuray Zhalgas (Department of Chemical and Materials
Engineering, School of Engineering and Digital Sciences, Nazarbayev
University), Dr. Almagul Mentbayeva (Department of Chemical andMaterials Engineering, School of Engineering and Digital Sciences,
Nazarbayev University), Dr. Batukhan Tatukayev (Department ofChemical and Materials Engineering, School of Engineering and Digital
Sciences, Nazarbayev University)

P-S11-02-T1 Recent Developments in Processing Large Area 2D
Materials, Dielectrics, and Metals via CVD and ALD for Functional
Applications» Dr. Nils Boysen (Fraunhofer IMS, 47057 Duisburg, Germany), Ms.
Rahel-Manuela Neubieser (Fraunhofer IMS, 47057 Duisburg,
Germany), Mr. Jan-Lucas Wree (Ruhr University Bochum), Dr. David
Zanders (Ruhr University Bochum), Mr. Florian Zimmermann(University of Wuppertal), Dr. Kai Oliver Brinkmann (University ofWuppertal), Dr. Marvin Michel (Fraunhofer IMS, 47057 Duisburg,
Germany), Prof. Thomas Riedl (University of Wuppertal), Prof. Anjana
Devi (Ruhr University Bochum)

P-S11-03-T1 A new tool for single ion implantation and nanoscalematerials engineering: System design and source development» Dr. Gianfranco Aresta (Ionopotika Ltd)P-S11-04-T1 Challenges in adapting an established lift-off process
based on e-beam lithography (EBL) for use with less harmful
developers and removers» Dr. Silvia Diewald (KIT), Prof. Gernot Goll (KIT)

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Continued from Tuesday, 26 September

P-S11-05-T1 Patterning of Ormostamp films at the nanometerscale for large scale surface functionalization» Ms. Olga Muntada-Lopez (Instituto de Microelectrónica de Barcelona(IMB-CNM, CSIC)), Mr. Alex Rodriguez-Iglesias (Institute ofMicroelectronics of Barcelona (IMB-CNM-CSIC)), Dr. Francesc PerezMurano (Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC)),
Dr. Marta Fernández-Regúlez (Instituto de Microelectrónica deBarcelona (IMB-CNM, CSIC))

P-S11-06-T1 Positioning accuracy of the direct laser lithography fora large-scale Fresnel Zone Plate» Mr. Viacheslav Vlasenko (Raith GmbH), Dr. Kahraman Keskinbora(Raith GmbH), Dr. Leonid Litvin (Raith GmbH), Dr. Michael Kahl (Raith
GmbH), Mr. Jacco Houter (Raith Laser Systems B.V.)

P-S11-07-T1 Resistless lithography on Si surfaces by EUV-induced
surface modification» Dr. Prajith Karadan (Paul Scherrer Institute), Dr. Yasin Ekinci (PaulScherrer Institute), Dr. Dimitrios Kazazis (Paul Scherrer Institute)

P-S11-08-T1 Study reactive ion etching- transformer coupledplasma (RIE-TCP) mode for patterning of MgZnO alloys, used forcomputing and memory applications» Ms. Leila Ghorbani (Ku Leuven, Celestijnenlaan 200f, Leuven, 3001,
Belgium, IMEC, Kapeldreef 75, Leuven, 3001, Belgium), Dr. Shreya
kundu (IMEC, Kapeldreef 75, Leuven, 3001, Belgium), Dr. Frederic
Lazzarino (IMEC, Kapeldreef 75, Leuven, 3001, Belgium), Prof. Stefan
De Gendt (Ku Leuven, Celestijnenlaan 200f, Leuven, 3001, Belgium,
IMEC, Kapeldreef 75, Leuven, 3001, Belgium)

P-S11-09-T1 Realization of Highly Uniform Surface
Functionalization and Applications to Organic Transistors» Dr. Ming Chen (Southern University of Science and Technology), Prof.
Xing Cheng (Southern University of Science and Technology)

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P-S11-10-T1 Wafer scale fabrication of pyrolytic carbon sub-100 nm
nanogap electrodes for electrochemistry by etching of insulatingoxides» Mr. Nicolai Støvring (Technical University of Denmark), Prof. Stephan
Sylvest Keller (Technical University of Denmark), Prof. Jenny Emnéus(Technical University of Denmark), Dr. Arto Heiskanen (Technical
University of Denmark)P-S11-11-T1 Patterning of Novolac-based negative resist using EBL
and its performance as etch mask for DRIE of silicon» Mr. Rahul Singh (Technical University of Denmark), Mr. Christian
Vinther Bertelsen (Technical University of Denmark), Dr. Maria Dimaki(Technical University of Denmark), Prof. Winnie Edith Svendsen(Technical University of Denmark)P-S11-12-T1 Ion incidence angle-dependent pattern formation on
AZ® 4562 photoresist by (reactive) ion beam etching» Mr. Tom Rüdiger (Leibniz Institute of Surface Engineering e.V. (IOM)),
Mr. Martin Mitzschke (Leibniz Institute of Surface Engineering e.V.
(IOM)), Dr. Carsten Bundesmann (Leibniz Institute of Surface
Engineering e.V. (IOM)), Ms. Andrea Prager (Leibniz Institute of Surface
Engineering e.V. (IOM)), Dr. Ying Liu (University of Science andTechnology of China), Prof. Bernd Abel (University Leipzig), Dr. Agnes
Schulze (Leibniz Institute of Surface Engineering e.V. (IOM)), Dr. Frank
Frost (Leibniz Institute of Surface Engineering e.V. (IOM))

P-S11-13-T1 Selective ion-assisted nanostructuring process ofsilicon devices» Mr. Alessandro Cian (FBK, Fondazione Bruno Kessler), Dr. Elia
Scattolo (FBK, Fondazione Bruno Kessler), Dr. Michele Crivellari (FBK,
Fondazione Bruno Kessler), Dr. Jordi Llobet (Alba CELLS Synchrotron),
Dr. Francesc Perez-Murano (Instituto de Microelectrónica de Barcelona(IMB-CNM, CSIC)), Dr. Lorenza Ferrario (FBK, Fondazione Bruno
Kessler), Mr. Damiano Giubertoni (FBK, Fondazione Bruno Kessler)

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Continued from Tuesday, 26 September

P-S11-14-T1 Plasma conversion of polydimethylsiloxane andperhydropolysilazane precursor layers by a pulsed atmosphericpressure plasma jet to a silicon oxide thin film
» Dr. Patrick With (Leibniz Institute of Surface Engineering e.V. (IOM)),
Dr. Martin Rudolph (Leibniz Institute of Surface Engineering e.V. (IOM)),
Mr. Peter Birtel (Leibniz Institute of Surface Engineering e.V. (IOM)),
Prof. Thomas Arnold (Leibniz Institute of Surface Engineering e.V.
(IOM)), Ms. Andrea Prager (Leibniz Institute of Surface Engineering e.V.
(IOM)), Dr. Sergej Naumov (Leibniz Institute of Surface Engineering e.V.
(IOM)), Dr. Ulrike Helmstedt (Leibniz Institute of Surface Engineering
e.V. (IOM)), Prof. Andre Anders (Leibniz Institute of Surface Engineering
e.V. (IOM))
P-S11-15-T1 Comparative Study of NbN Deposition via Magnetron
Sputtering and Atomic Layer Deposition (ALD)» Dr. Rodolfo Previdi (ISTA)
P-S11-16-T1 Optical waveguides made of inkjet-able highrefractive index materials using Nanoimprint Lithography» Dr. Michael Haslinger (PROFACTOR GmbH), Mr. Gerald Stubauer(PROFACTOR GmbH), Mr. Peter Bauer (PROFACTOR GmbH), Mr.
Sebastian Kauscheder (PROFACTOR GmbH), Ms. Viktorija Jonaityte(PROFACTOR GmbH), Ms. Katerina Masopustova (PROFACTOR GmbH),
Ms. Sonja Kopp (PROFACTOR GmbH), Dr. Michael Muehlberger(PROFACTOR GmbH)P-S11-17-T1 No more macros: Open-source method for layout cellparameterization through feature recognition for procedural
generation of lithography files» Mr. Tom Maslin (University of Canterbury), Dr. Stefanie Gutschmidt(University of Canterbury)
P-S11-18-T1 Lithographic Patterning of Electrochemical Sensors on
Flexible Substrates» Mr. Faraz Kaiser Malik (Imperial College London), Dr. Florent
Seichepine (Imperial College London), Prof. Kristel Fobelets (Imperial
College London)

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P-S11-19-T1 Extracting extra information from STM images using
machine learning» Dr. Ehud Fuchs (Zyvex Labs), Dr. John Randall (Zyvex Labs), Dr. James
Owen (Zyvex Labs)

P-S11-20-T1 Degradable PVAc-graphene nanofibrous membrane
for flexible piezocapacitive sensors» Dr. Debarun Sengupta (University of Groningen), Prof. Ajay Kottapalli(University of Groningen)

P-S11-21-T1 SiO2 & SiNx Thin Film Deposition by Plasma Enhanced
Spatial Atomic Layer Deposition Processes» Mr. Jaehee Kim (Department of Semiconductor and Display
Engineering, Sungkyunkwan University), Mr. Hyeonjin Choi (School ofChemical Engineering, Sungkyunkwan University), Mr. Jinmyeong Kim(School of Chemical Engineering, Sungkyunkwan University), Prof.
Heeyeop Chae (School of Chemical Engineering, Sungkyunkwan
University)

P-S11-22-T1 Plasma Atomic Layer Etching of SiO2 with Low-Global
Warming Perfluoroisopropyl Vinyl Ether (PIPVE)» Ms. Jihye Kim (School of Chemical Engineering, Sungkyunkwan
University), Mr. Hojin Kang (School of Chemical Engineering,
Sungkyunkwan University), Mr. Minsuk Choi (School of Chemical
Engineering, Sungkyunkwan University), Ms. Daeun Hong (School ofChemical Engineering, Sungkyunkwan University), Ms. Yongsun Cho(Samsung Electronics), Mr. Junsik Hong (Samsung Electronics), Prof.
Heeyeop Chae (School of Chemical Engineering, Sungkyunkwan
University)

P-S11-23-T1 Fabrication of Flexible Transparent Silver Electrodes
via Maskless Evaporation» Mr. Sihai Luo (Norwegian University of Science and Technology), Mr.
Enkui Lian (Norwegian University of Science and Technology), Prof.
John De Mello (Norwegian University of Science and Technology)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

P-S11-24-T1 A comparison of granular aluminum deposited via
electron beam evaporator and sputtering» Dr. Bruno Martins Magalhaes (Institute of Science and Technology
Austria (ISTA)), Dr. Salvatore Bagiante (Institute of Science andTechnology Austria (ISTA)), Dr. Rodolfo Previdi (ISTA), Dr. Lubuna
Shafeek (Institute of Science and Technology Austria (ISTA)), Mr.
Abdulhamid Baghdadi (Institute of Science and Technology Austria(ISTA))
P-S11-25-T1 Measurement of short range PSF in EBL» Dr. Leonid Litvin (Raith GmbH, Dortmund, 44263, Germany), Dr.
Michael Kahl (Raith GmbH), Ms. Julia Shapiro (Raith GmbH, Dortmund,
44263, Germany)
P-S11-26-T1 Additive Processes for Micro Fabrication: Making an
Impact with Inkjet» Dr. Kai Keller (Notion Systems GmbH)P-S11-27-T1 Micro/nano fabrication of Bio wells: Comparison
between Nanoimprint lithography and nano 3D printing» Dr. Lubuna Shafeek (Institute of Science and Technology Austria(ISTA)), Dr. Salvatore Bagiante (Institute of Science and Technology
Austria (ISTA)), Dr. Jack Merrin (Institute of Science and Technology
Austria (ISTA))
P-S11-28-T1 Resist based Ion Beam Lithography with light ionsfrom Liquid Metal Alloy Ion Sources» Dr. Achim Nadzeyka (Raith GmbH), Dr. Paul Mazarov (Raith GmbH),
Mr. Torsten Richter (Raith GmbH), Dr. Michael Kahl (Raith GmbH)P-S11-29-T1 Ion Beam Planarization Using Solvent-Free Polymer
Coatings» Mr. Lukas Paul Lingenfelder (Leibniz Institute of Surface Engineering
e.V. (IOM))

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P-S11-30-T1 3D Ice Lithography Software and Control» Mr. Joachim Lyngholm-Kjærby (Technical University of Denmark), Mr.
Affan Kaysa Waafi (Technical University of Denmark), Dr. Anpan Han(Technical University of Denmark)P-S11-31-T1 SiOxNy Low Temperature Deposition at PECVD using
Carbon-free Precursor» Mr. Youngju Ko (Department of Semiconductor and Display
Engineering, Sungkyunkwan University), Mr. Hyeonjin Choi (School ofChemical Engineering, Sungkyunkwan University), Mr. Jaehee Kim(Department of Semiconductor and Display Engineering,
Sungkyunkwan University), Mr. Jinmyeong Kim (School of Chemical
Engineering, Sungkyunkwan University), Mr. Namgun Kim (Department
of Semiconductor and Display Engineering, Sungkyunkwan University),Prof. Heeyeop Chae (School of Chemical Engineering, Sungkyunkwan
University)
P-S11-32-T1 AI-assisted design of charged particle optics» Dr. Aydin Sabouri (University College London), Dr. Carla Perez
Martinez (University College London)
P-S11-33-T1 Nonlinear parameter-evolution approach forachieving high aspect ratio in nanoscale etching.
» Mr. Arjun Moothedath Sethumadhavan (Oxford Instruments), Mr.
Zhong Ren (Oxford Instruments)
P-S11-34-T1 Fabrication of micro-patterned β-Ga2O3 thin films by
selective solid-phase crystallization via room-temperature
excimer laser annealing» Dr. Daishi Shiojiri (Kanagawa Institute of Industrial Science andTechnology), Dr. Satoru Kaneko (KISTEC), Mr. Ryoya Kai (Department ofMaterials Science and Engineering, Tokyo Institute of Technology), Dr.
Akifumi Matsuda (Tokyo Institute of Technology), Prof. Mamoru
Yoshimoto (Department of Materials Science and Engineering, Tokyo
Institute of Technology)
P-S11-35-T1 Enhancing Electroplating Uniformity for 30 nm
Resolution Charts through Graphic Auxiliary Approach» Mr. Qiucheng Chen (Fudan university), Mr. Xujie Tong (Fudan
university), Mr. Chengyang Mu (Fudan university), Ms. Qingxin Wu(Fudan university), Mr. Jun Zhao (Fudan university), Prof. Yifang Chen
(Fudan university)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

P-S11-36-T1 Nanofabrication of randomly distributed hole arrayfor coherent diffraction imaging in soft X-ray» Mr. Xujie Tong (Fudan university), Mr. Chengyang Mu (Fudan
university), Dr. Yijie Li (Fudan university), Prof. Yifang Chen (Fudan
university)

P-S11-37-T1 Nanofabrication of 10 nm resolution compound
Kinoform zone plate with high efficiency in soft X-ray» Mr. Xujie Tong (Fudan university), Mr. Chengyang Mu (Fudan
university), Dr. Qiucheng Chen (Fudan university), Prof. Yifang Chen
(Fudan university)

P-S11-38-T1 UV-Nanoimprinting of Ceramics» Ms. Sonja Kopp (PROFACTOR GmbH), Dr. Abhijeet Lale (LithozGmbH), Ms. Viktorija Jonaityte (PROFACTOR GmbH), Dr. Michael
Haslinger (PROFACTOR GmbH), Dr. Martin Schwentenwein (LithozGmbH), Prof. Francesco Moscato (Medical University of Vienna), Dr.
Michael Muehlberger (PROFACTOR GmbH)P-S11-39-T1 Advanced electron-beam grayscale lithography byusing optimized dose gradients in the pattern design» Dr. Kevin Hofhuis (Paul Scherrer Institute), Dr. Nazanin Samadi (PaulScherrer Institute), Dr. Christian David (Paul Scherrer Institute), Dr.
Analía Fernández Herrero (Helmholtz-Zentrum Berlin für Materialien
und Energie), Mr. Bas Ketelaars (Raith B.V.), Dr. Christiaan Zonnevylle(Raith B.V.), Dr. Vitaliy A. Guzenko (Paul Scherrer Institute)

P-S11-40-T1 Fabrication and Characterization of HighTransmittance, Low-Resistance Transparent Devices based on
AgNW using Nanoimprint Lithography» Mrs. YEONJOO HA (Korea), Dr. JaeJong Lee (Korea), Mr. Jee-Hoon Seo(Korea)Powered by Ex Ordo, everything you need to run a research conference.

P-S11-41-T1 Atomic Layer Etching of Silicon Nitride with Plasma
Oxidation and HF/NH3 Selective Gas Phase Etching» Mr. Sangwoo Kim (Department of Semiconductor and Display
Engineering, Sungkyunkwan University), Mr. Ohchel Kwon (Samsung
Electronics), Mr. Hyeongkwon Jeong (Samsung Electronics), Mr.
Suhwan Park (Samsung Electronics), Mr. Gwanwoo Min (Samsung
Electronics), Ms. Hyunseo Shim (Samsung Electronics), Prof. Heeyeop
Chae (School of Chemical Engineering, Sungkyunkwan University)

P-S11-42-T1 Simulation study of three-dimensional grayscale icelithography on amorphous solid water for blazed gratings» Mr. Jinyu Guo (Fudan university), Mr. Shuoqiu Tian (Fudan university),
Mr. Rui Zheng (Westlake University), Ms. Shan Wu (Westlake
University), Dr. Ding Zhao (Westlake University), Prof. Yifang Chen
(Fudan university), Prof. Min Qiu (Westlake University), Mr. Wentao
Yuan (Fudan university)

P-S11-43-T1 Metallization of UHMW-PE Fibers by Supercritical CO2
Catalyzation toward Weavable Devices» Mr. Hikaru Kondo (Tokyo Institute of Technology), Dr. Tomoyuki
Kurioka (Tokyo Institute of Technology), Dr. Wan-Ting Chiu (Tokyo
Institute of Technology), Dr. Chun-Yi Chen (Tokyo Institute ofTechnology), Prof. Mark Chang (Tokyo Institute of Technology), Ms.
Machiko Yagaguchi (Nara Women's University), Ms. Arisa Jinno (Nara
Women's University), Prof. Hiromichi Kurosu (Nara Women's
University), Prof. Masato Sone (Tokyo Institute of Technology)

P-S11-44-T1 PbS quantum dot thin film dry etching» Mr. Nicolas Le Brun (PhD STUDENT), Dr. Gilles Cunge (Univ. Grenoble
Alpes, LTM, F-38054 Grenoble-France), Mr. Pascal Gouraud(STMicroelectronics), Mrs. Camille Petit-Etienne (CNRS), Mrs. Linda
Parmigiani (STMicroelectronics), Dr. Stéphane Allegret-Maret(STMicroelectronics), Dr. Jonathan Steckel (STMicroelectronics)

P-S11-45-T1 Preparation of gold nanoparticle-hydrogel composite
by room temperature electron reduction for catalytic applications» Prof. Changjun Liu (Tianjin University)

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Continued from Tuesday, 26 September

P-S11-46-T1 Parallel Printing of Nanoliter Droplets with PDMS
Nozzles Under Fluorinated Liquid» Mr. Muhammad Awais Maqbool (Toyohashi University ofTechnology), Prof. Takayuki Shibata (Toyohashi University ofTechnology), Dr. Okamoto Shunya (Toyohashi University ofTechnology), Prof. Moeto Nagai (Toyohashi University of Technology)

P-S11-51-T1 Resolution enhancement techniques on a DUVStepper for roll-to-roll nanofabrication of plasmonic solar lightabsorbers» Ms. Maria Serra González (Technical University of Denmark), Mr.
Matthias Keil (Technical University of Denmark), Ms. Nastasia Okulova(Inmold), Ms. Rucha A. Deshpande (Technical University of Denmark),
Prof. Rafael Taboryski (Technical University of Denmark)P-S11-47-T1 Selective Atomic Layer Etching(ALE) of Germanium to
Silicon using control parameter» Mr. Hyo Jun Kim (PSK), Mr. Hee-woong Shin (PSK), Dr. Chang Weon
Lee (PSK)
P-S11-48-T1 Grayscale exposure challenges using direct-write laser
exposure on thick photosensitive positive resist» Ms. Gerda Ekindorf (Heidelberg Instruments Microtechnik GmbH),
Dr. Christine Schuster (micro resist technology GmbH), Mr. DominiqueColle (Heidelberg Instruments Microtechnik GmbH), Dr. Peter Heyl
(Heidelberg Instruments Microtechnik GmbH), Dr. Anja Voigt (micro
resist technology GmbH)P-S11-49-T1 3D-microstructured Interpenetrating networks with
tuned thermal and mechanical properties» Dr. Dorothee Silbernagl (Federal Institute for Material Research andTesting, BAM Berlin), Dr. Paulina Szymoniak (Federal Institute forMaterial Research and Testing, BAM Berlin), Ms. Zeynab Tavasolyzadeh(Federal Institute for Material Research and Testing, BAM Berlin), Prof.
Heinz Sturm (Federal Institute for Material Research and Testing, BAM
Berlin), Dr. Ievgeniia Topolniak (Federal Institute for Material Research
and Testing, BAM Berlin)
P-S11-50-T1 Ni-P Electroless Plating of PET Parts with Complex 3D
Structure by Supercritical CO2 Assisted Catalyzation» Ms. Ami Iwasaki (Tokyo Institute of Technology), Mr. Po-Wei Cheng(Tokyo Institute of Technology), Dr. Tomoyuki Kurioka (Tokyo Instituteof Technology), Dr. Chun-Yi Chen (Tokyo Institute of Technology), Prof.
Mark Chang (Tokyo Institute of Technology), Prof. Kei Takase (Tohoku
University), Prof. Hiroshi Ishihata (Tohoku University), Prof. Masato
Sone (Tokyo Institute of Technology)

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P-S11-52-T1 Vacuum-Assisted filling of high aspect ratio Silicon
trenches with Polymers for surface planarization for
micromachining of complex microsystems.
» Dr. Jose Fernandes (International Iberian Nanotechnology
Laboratory), Mr. Tiago Oliveira (International Iberian Nanotechnology
Laboratory), Mr. Helder Fonseca (International Iberian Nanotechnology
Laboratory), Mr. Vitor Silva (International Iberian Nanotechnology
Laboratory), Mr. Jose Rodrigues (International Iberian Nanotechnology
Laboratory), Dr. Andrea Gouvea (International Iberian Nanotechnology
Laboratory), Dr. Carlos Alberto Calaza Cabanas (International Iberian
Nanotechnology Laboratory)

P-S11-53-T1 Microfabrication of thin film structures by two-photon
polymerization for in situ electron microscopy studies» Ms. Chloé Chemin (Technical University of Denmark), Prof. Babak
Rezaei (Technical University of Denmark), Dr. Alice Bastos Da Silva
Fanta (Technical University of Denmark), Dr. Ada-Ioana Bunea(Technical University of Denmark), Prof. Stephan Sylvest Keller(Technical University of Denmark), Prof. Thomas Willum Hansen(Technical University of Denmark)Page 13

49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

P-S11-54-T1 Constant defocus approximation in mask datapreparation for grayscale patterning of microlens» Ms. Marie-Line Pourteau (Univ. Grenoble Alpes, CEA, Leti, F-38000
Grenoble, France), Mr. Aurélien Fay (Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France), Mr. Sébastien Bérard-Bergery(STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex,
France), Mr. Florian Tomaso (Univ. Grenoble Alpes, CEA, Leti, F-38000
Grenoble, France), Mr. Rémi Coquand (Univ. Grenoble Alpes, CEA, Leti,
F-38000 Grenoble, France), Mr. Ujwol Palanchoke (Univ. Grenoble
Alpes, CEA, Leti, F-38000 Grenoble, France), Ms. Charlotte Beylier(STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex,
France), Mr. Guillaume Claveau (STMicroelectronics, 850 rue Jean
Monnet, 38926 Crolles Cedex, France), Mr. Samir Guerroudj(STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex,
France)P-S11-55-T1 Tailoring vertical sidewalls and draft angles fordemolding in the same mold by direct write lithography in thickepoxy resist» Dr. Muhammad Refatul Haq (Paul Scherrer Institute), Dr. Helmut
Schift (Paul Scherrer Institute)

P-S11-56-T1 Room temperature imprint of water-based
microparticle inks towards glass microfluidic devices» Dr. Muhammad Refatul Haq (Paul Scherrer Institute), Dr. Babak
Mazinani (Ecole Polytechnique Federale de Lausanne (EPFL)), Prof.
Vivek Subramanian (Ecole Polytechnique Federale de Lausanne (EPFL)),
Dr. Helmut Schift (Paul Scherrer Institute)

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P-S11-57-FT Penning vacuum gauge with high-efficiency plasma
source for a miniature ultra-high vacuum cell
» Dr. Yuichi Kurashima (National Institute of Advanced Industrial
Science and Technology (AIST)), Dr. Taisei Motomura (National Instituteof Advanced Industrial Science and Technology (AIST)), Dr. Takashi
Matsumae (National Institute of Advanced Industrial Science andTechnology (AIST)), Mr. Atsuhiko Maeda (National Institute of Advanced
Industrial Science and Technology (AIST)), Dr. Shinya Yanagimachi(National Institute of Advanced Industrial Science and Technology(AIST)), Dr. Hideki TAKAGI (National Institute of Advanced Industrial
Science and Technology (AIST)), Mr. Naoto Oshima (Nihon University),Dr. Mitsuhiro Watanabe (Nihon University)

P-S11-58-T1 The Effect of Damaged Layer Removal Process on Si
Atomic Layer Etching» Mr. Namgun Kim (Department of Semiconductor and Display
Engineering, Sungkyunkwan University), Mr. Whan Kyun Kim(Department of Semiconductor and Display Engineering,
Sungkyunkwan University), Mr. Dongjun Shin (Samsung Electronics),
Dr. Jongkyu Kim (Samsung Electronics), Mr. Kukhan Yoon (Samsung
Electronics), Mr. Youngju Ko (Department of Semiconductor and
Display Engineering, Sungkyunkwan University), Prof. Heeyeop Chae
(School of Chemical Engineering, Sungkyunkwan University)

P-S11-59-T1 Perspective of Unconventional Holographic
Lithography and Ion Bombardment» Dr. Ying Liu (University of Science and Technology of China)

P-S11-60-T1 Nano-scale Zirconia Ceramics printed via Two-PhotonPolyemerization from a transparent nano-particle containing
Feedstock» Dr. Johanna Sänger (Chair of Structural and Functional Ceramics,
Montanuniversität Leoben), Dr. Birte Riechers (Federal Institute forMaterial Research and Testing, BAM Berlin), Prof. Raúl Bermejo (Chairof Structural and Functional Ceramics, Montanuniversität Leoben),Prof. Jens Günster (Federal Institute for Material Research and Testing,
BAM Berlin)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

P-S11-61-T1 Broad beam ion erosion of silicon with metal-codeposition: experimental and simulation results» Mr. Felix Linß (Leibniz Institute of Surface Engineering e.V. (IOM)), Dr.
Carsten Bundesmann (Leibniz Institute of Surface Engineering e.V.
(IOM)), Dr. Frank Frost (Leibniz Institute of Surface Engineering e.V.
(IOM))

P-S11-62-T3 Aptamer-Decorated Graphene Channel Array with
Liquid-Gating for Sensing Cortisol Stress Hormone» Mr. Ali Gilani (Ecole Polytechnique Federale de Lausanne (EPFL)), Dr.
Shokoofeh Sheibani (Ecole Polytechnique Federale de Lausanne(EPFL)), Dr. Johan Frédéric Longo (EPFL), Dr. Ali Saeidi (EPFL), Mr.
Sadegh Kamaei Bahmaei (EPFL), Mr. Yann Christophe Sprunger (EPFL),
Mr. Stefan Razvan Anton (University POLITEHNICA of Bucharest), Prof.
George Sanciu (University POLITEHNICA of Bucharest), Prof. Adrian
Mihai Ionescu (EPFL)

P-S11-63-T3 2-Photon Lithography for bio-inspired 3D
microstructures for in vitro neuroelectronic devices» Dr. Valeria Criscuolo (Faculty of Electrical Engineering and IT, RWTH,
Aachen 52074, Germany. Institute of Biological Information
Processing—Bioelectronics, IBI-3, Forschungszentrum, Juelich 52428,
Germany), Ms. Claudia Latte Bovio (Tissue Electronics, Istituto Italiano
di Tecnologia, 80125 Naples, Italy. Dipartimento di Chimica, Materiali e
Produzione Industriale, Università di Napoli Federico II, 80125 Naples,
Italy), Prof. Francesca Santoro (Faculty of Electrical Engineering and IT,
RWTH, Aachen 52074, Germany. Institute of Biological Information
Processing—Bioelectronics, IBI-3, Forschungszentrum, Juelich 52428,
Germany)

P-S11-64-T3 Controlled wettability of mixed surfaces for enhanced
water harvesting» Ms. Joyce Estephan (CNRS), Mrs. Cécile Gourgon (CNRS), Mr. JeanHervé Tortai (CNRS), Mrs. Marie Panabière (CNRS), Mrs. Camille PetitEtienne (CNRS), Mr. Léo Bon (CNRS)Powered by Ex Ordo, everything you need to run a research conference.

P-S11-65-T3 Leveraging The Elastic Deformability of
Polydimethylsiloxane Microfluidic Channels for Efficient
Intracellular Delivery» Dr. Hashim Alhmoud (Bilkent University), Mr. Mohammed Alkhaled(Bilkent University), Mr. Batuhan E. Kaynak (Bilkent University), Prof.
Mehmet Selim Hanay (Bilkent University), Ms. Enise Kartal (Bilkent
University), Ms. Yagmur Ceren Alatas (Bilkent University)

P-S11-66-T3 Microwave Sensors Integrated with 3D
Microelectrodes to Eliminate Position-Dependent Particle
Response in Microfluidics» Ms. Yagmur Ceren Alatas (Bilkent University), Mr. Uzay Tefek (Bilkent
University), Mr. Burak Sari (Sabanci University), Prof. Mehmet Selim
Hanay (Bilkent University)

P-S11-67-T3 Fabrication and characterization of Nafion/PANI
composite membrane-based micropump for Insulin
administration» Ms. Shatavisha Biswas (Indian Institute of Technology, Kharagpur),
Mr. Arkaprava Datta (Indian Institute of Technology, Kharagpur), Prof.
Tarun Kanti Bhattacharyya (Indian Institute of Technology, Kharagpur)

P-S11-68-T3 A wearable microfluidic device with a built-in
micropump for reliable sweat collection for health monitoring» Mr. Zhuodan Chen (Southern University of Science and Technology),
Dr. Weihao Li (Southern University of Science and Technology), Prof.
Xing Cheng (Southern University of Science and Technology)

P-S11-69-T3 A planar integrated astable microfluidic circuit forsquare pressure waveform generation» Dr. Weihao Li (Southern University of Science and Technology), Mr.
Zhuodan Chen (Southern University of Science and Technology), Prof.
Xing Cheng (Southern University of Science and Technology)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

P-S11-70-T3 Fabrication of switchable biocompatible, nano-fluidic
devices using a thermoresponsive polymer on nano-patterned
surfaces» Mr. Christopher Bickmann (Technische Universität Chemnitz, Center
for Microtechnologies, Reichenhainer Str. 70, 09126 Chemnitz,
Germany), Dr. Christoph Robert Meinecke (Technische Universität
Chemnitz, Center for Microtechnologies, Reichenhainer Str. 70, 09126
Chemnitz, Germany), Dr. Christian Helke (Technische Universität
Chemnitz, Center for Microtechnologies, Reichenhainer Str. 70, 09126
Chemnitz, Germany), Ms. Susanne Hartmann (Technische Universität
Chemnitz, Center for Microtechnologies, Reichenhainer Str. 70, 09126
Chemnitz, Germany), Dr. Till Korten (Physics of Life, Technische
Universität Dresden, Dresden 01069, Germany), Prof. Stefan Diez
(Technische Universität Dresden, B CUBE - Center for Molekular
Bioengeneering), Dr. Danny Reuter (Technische Universität Chemnitz,
Center for Microtechnologies, Reichenhainer Str. 70, 09126 Chemnitz,
Germany)

P-S11-71-T3 3D Integration of a micro-perforated membrane for
combined in-situ electrical analysis and real time imaging of living
cells.
» Mr. Matthieu Sagot (LAAS-CNRS), Dr. Bastien Venzac (LAAS-CNRS),
Mr. David Bourrier (LAAS-CNRS), Dr. Aurélie Lecestre (LAAS-CNRS), Mr.
Adrian Laborde (LAAS-CNRS), Dr. Aline Cerf (SmartCatch), Prof. Hervé
Aubert (LAAS-CNRS), Prof. Christophe Vieu (LAAS-CNRS)

P-S11-72-T3 Picking microorganisms by impedance flow Cytometry» Mrs. Mohadeseh Mozafari (Technische Universität Braunschweig,
Institut für Mikrotechnik, Alte Salzdahlumer Str. 203, 38124
Braunschweig, Germany), Mr. Peer Erfle (Technische Universität
Braunschweig, Institut für Mikrotechnik, Alte Salzdahlumer Str. 203,
38124 Braunschweig, Germany), Mr. Jonathan Block (BRICS
Braunschweig Integrated Centre of Systems Biology), Dr. Rainer Krull(BRICS Braunschweig Integrated Centre of Systems Biology), Prof.
Andreas Dietzel (Institute of Microtechnology, Braunschweig, 38124,
Germany)

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P-S11-73-T3 Rapid prototyping of self-filling microfluidic chips forSars-CoV-2 RNA detection by isothermal amplification» Mr. Filip Staniszewski (AIT Austrian Institute of Technology GmbH),
Dr. Christina Schmidleithner (AIT Austrian Institute of TechnologyGmbH), Dr. Stefan Schrittwieser (AIT Austrian Institute of TechnologyGmbH), Ms. Barbara Posch (AIT Austrian Institute of TechnologyGmbH), Dr. Lidiya Osinkina (HP), Dr. Maximilian Westenthanner (HP),
Dr. Joachim Stehr (HP), Dr. Johannes Peham (AIT Austrian Institute ofTechnology GmbH)P-S11-74-T3 Hydrocarbon-Mediated Shrinkage of Silicon Nitride
Nanopores» Mr. Debmalya Roy (Indian Institute of Technology, Kharagpur), Mr.
Aniruddha Guha (Indian Institute of Technology, Kharagpur), Dr. James
Yates (ITQB NOVA), Prof. Suman Chakraborty (Indian Institute ofTechnology, Kharagpur)
P-S11-75-T3 Reversible Manipulation of Effective Pore Diameter in
Silicon Nitride Nanopores» Mr. Aniruddha Guha (Indian Institute of Technology, Kharagpur), Mr.
Debmalya Roy (Indian Institute of Technology, Kharagpur), Dr. James
Yates (ITQB NOVA), Dr. Chirodeep Bakli (Indian Institute of Technology,
Kharagpur), Prof. Suman Chakraborty (Indian Institute of Technology,
Kharagpur)
P-S11-76-T3 The Effects of 3D Nozzle Injection Shape on
Precipitated Lipid Nanoparticles in a Low Aspect Ratio Lamination
Mixer (LARM)» Mr. Ebrahim Taiedinejad (Technische Universität Braunschweig,
Institut für Mikrotechnik, Alte Salzdahlumer Str. 203, 38124
Braunschweig, Germany), Ms. Alshaimaa Abdellatif (Technische
Universität Braunschweig, Institut für Mikrotechnik, Alte Salzdahlumer
Str. 203, 38124 Braunschweig, Germany), Prof. Andreas Dietzel(Institute of Microtechnology, Braunschweig, 38124, Germany)
P-S11-77-T3 Development of an automatic reagent drip system forpassive pumps» Prof. Katsuo Mogi (Tokyo Denki University), Mr. Reo Shimada (Tokyo
Denki University), Mr. Hiroyuki Kimura (Kyoto Pharmaceutical
University), Mr. Naoki Takada (National Institute of Advanced Industrial
Science and Technology, Tsukuba)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

P-S11-83-T3 Fabrication of Surface Microstructures andInvestigation of their Influence on the Interaction with Blood forApplication in a Left Ventricular Assist Device» Ms. Marta Bonora (Medical University of Vienna), Mr. Stjepan Perak(UpNano GmbH), Ms. Sonja Kopp (PROFACTOR GmbH), Ms. Sarah
Linnemeier (Medical University of Vienna), Mr. Richard Benauer (bionicsurface technologies GmbH), Dr. Markus Lunzer (UpNano GmbH), Prof.
Francesco Moscato (Medical University of Vienna), Dr. Marcus
Granegger (Medical University of Vienna), Dr. Michael Muehlberger(PROFACTOR GmbH)P-S11-78-T3 Durable carbyne-coated micro and nanotextured
surfaces for antibacterial control» Mr. Dimitris Nioras (Institute of Nanoscience and Nanotechnology,
NCSR “Demokritos”), Mr. Dionysia Kefallinou (Institute of Nanoscienceand Nanotechnology, NCSR “Demokritos”), Mr. Dimosthenis Ioannou(Institute of Nanoscience and Nanotechnology, NCSR Demokritos,
Aghia Paraskevi 15341, Attiki, Greece), Dr. Andrey Brigadin(Swissimpianti Sagl, 6828 Balerna, Switzerland), Dr. Angeliki Tserepi(Institute of Nanoscience and Nanotechnology, NCSR Demokritos,
Aghia Paraskevi 15341, Attiki, Greece), Dr. Evangelos Gogolides (NCSR
Demokritos)

P-S11-84-T3 Development of a Microfluidic Lab-on-PCB Device toPreconcentrate Proteins through the Control of pH using
Electrochemically Generated Acid
» Ms. Grace Maxted (University of Bath), Prof. Pedro Estrela (Universityof Bath), Dr. Despina Moschou (University of Bath)P-S11-79-T3 On the Micromixing Mechanism by Active and Passive
Methods» Prof. Levent Trabzon (Istanbul Technical University)
P-S11-80-T3 Micropatterned polymeric chips for enhanced
production of the antibacterial compound TDA by Phaeobacter
inhibens biofilms» Ms. Yuyan Liu (DTU Nanolab), Dr. Ariadni Droumpali (DTU Nanolab),
Mr. Xavier Florensa (Technical University of Denmark), Prof. Paul
Kempen (DTU Nanolab), Dr. Maria Dimaki (Technical University ofDenmark), Prof. Claus Sternberg (Technical University of Denmark),
Prof. Lone Gram (Technical University of Denmark), Prof. Rafael
Taboryski (Technical University of Denmark)P-S11-81-T3 Lab-on-a-phone – plasmonic biosensing in 3D scaffolds
using a smartphone» Dr. Florian Laible (University of Tübingen), Ms. Melanie Sommer(University of Tübingen), Prof. Monika Fleischer (University of
Tübingen)
P-S11-82-T3 Iridium oxide thin film electrodes for highly sensitive
impedance biomass detection» Mr. Sven Meinen (Institute of Microtechnology, Technische
Universität Braunschweig), Prof. Andreas Dietzel (Institute ofMicrotechnology, Technische Universität Braunschweig), Dr. Rainer
Krull (Institute of Biochemical Engineering, Technische Universität
Braunschweig), Mr. Kevin Viebrock (Institute of Biochemical
Engineering, Technische Universität Braunschweig)

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4:15pmPoster Session 1.2: Track3, Track4
MOA3
P-S12-01-T3 Photolithographic production of smart water filtersable to detect bacteria» Dr. Amparo Ferrer-Vilanova (Institute of Microelectronics ofBarcelona (IMB-CNM-CSIC)), Dr. Josune J. Ezenarro (Institute ofMicroelectronics of Barcelona (IMB-CNM-CSIC)), Dr. Nuria Vigues(Universitat Autònoma de Barcelona (UAB)), Prof. Jordi Mas (UniversitatAutònoma de Barcelona (UAB)), Dr. Gonzalo Guirado (UniversitatAutònoma de Barcelona (UAB)), Dr. Xavier Munoz-Berbel (Instituto deMicroelectrónica de Barcelona (IMB-CNM, CSIC))

P-S12-02-T3 A novel method for real time monitoring of wetting
transition of underwater superhydrophobic surfaces andmembranes: Application in membrane desalination» Mr. Dimosthenis Ioannou (Institute of Nanoscience andNanotechnology, NCSR Demokritos, Aghia Paraskevi 15341, Attiki,
Greece), Dr. Kosmas Ellinas (University of the aegean), Dr. Evangelos
Gogolides (NCSR Demokritos)

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Continued from Tuesday, 26 September

P-S12-03-T3 Intracranial Magnetic Stimulation Micro-coil Probes
for Two-photon Excitation Microscopy» Mr. Xiyuan Liu (Technical university of Denmark), Dr. Kayeon Kim(University of Copenhagen), Dr. Changsi Cai (University of
Copenhagen), Dr. Shelley Fried (Technical University of Denmark), Dr.
Anpan Han (DTU)

P-S12-04-T3 The development of bile duct stent» Dr. Atushi Sekiguchi (Litho Tech Japan Corporation)

P-S12-05-T3 Evaluation of echinoid-shaped nanostructures forreusable mechano-bactericidal and bacterial filtration» Mr. Hee-Kyeong Kim (wonkwang university), Prof. Young-Sam Cho(wonkwang university), Prof. Hyun-Ha Park (wonkwang university)

P-S12-06-T3 Highly Flexible, Ultra-long SEEG Probes with IrOx Micro
Electrodes Realized using Compact Bond Interfaces» Mr. Marc Keller (IMTEK - University of Freiburg), Prof. Oliver Paul(IMTEK, University of Freiburg), Dr. Patrick Ruther (IMTEK - University ofFreiburg)

P-S12-07-T3 Reflectance-Based Optical Biosensor Platform with
Residual-Layer-Free Nanoimprint Lithography» Dr. Junhyoung Ahn (Korea Institute of Machinery & Materials), Dr.
Yunji Eom (Korea Institute of Machinery & Materials), Dr. Soonkeun
Kwon (Korea Institute of Machinery & Materials), Dr. Hak-Jong Choi
(Korea Institute of Machinery & Materials), Dr. SungHwi Lee (Korea
Institute of Machinery & Materials), Dr. Hyungjun Lim (Korea Instituteof Machinery & Materials), Dr. JaeJong Lee (Korea Institute ofMachinery & Materials)

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P-S12-08-T3 Design and fabrication of polymer microstructureswith embedded electrodes for 3D measurements» Mr. João Serra (Instituto Superior Técnico), Dr. João Ventura (IFIMUP Instituto de Física de Materiais Avançados, Nanotecnologia e Fotónica
da Universidade do Porto), Dr. Paulo Aguiar (i3S - Instituto deInvestigação e Inovação em Saúde, Universidade do Porto), Dr. Susana
Cardoso De Freitas (INESC Microsistemas e Nanotecnologias), Dr.
Diana C. Leitao (Department of Applied Physics, Eindhoven Universityof Technology)

P-S12-09-T3 Patterning of bio-doped silk films at wafer level forthe sustainable and scalable production of biosensors» Dr. Sara Santiago Malagón (Instituto de Microelectrónica deBarcelona (IMB-CNM, CSIC)), Dr. Marcin Procek (Department ofOptoelectronics, Silesian University of Technology), Dr. Augusto
Márquez (Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC)),Dr. Salvador David Aznar Cervantes (instituto murciano deinvestigación y desarrollo agrario y medioambiental), Dr. Gonzalo
Guirado (Universitat Autònoma de Barcelona (UAB)), Dr. Carlos
Domínguez Horna (Instituto de Microelectrónica de Barcelona (IMBCNM, CSIC)), Dr. Xavier Munoz-Berbel (Instituto de Microelectrónica deBarcelona (IMB-CNM, CSIC))

P-S12-10-T3 Simultaneous detection of SARS-CoV-2 nucleoprotein
and receptor-binding domain by a Multi-Area ReflectanceSpectroscopy (MARS) immunosensor» Dr. Dimitra Tsounidi (NCSR Demokritos), Dr. Nikos Papanikolaou(NCSR Demokritos), Dr. Ioannis Raptis (NCSR Demokritos), Dr. Sotirios
Kakabakos (NCSR Demokritos), Dr. Panagiota Petrou (NCSR
Demokritos)

P-S12-11-T3 3D printed microstructures as bacterial biofilm
carriers» Mrs. Carmen Lopéz Vizcaino (University of Copenhagen), Dr. Rocio
Espinosa Portero (University of Copenhagen), Dr. Sebastian J
Kjeldgaard-Nintemann (University of Copenhagen), Dr. Henriette LyngRøder (University of Copenhagen), Dr. Ada-Ioana Bunea (Technical
University of Denmark)Page 18

49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

P-S12-12-T3 Evaluation of microneedle patches for improved
intradermal delivery of molecularly-defined cancer vaccines» Dr. Francesco La Malfa (TU Delft), Dr. Koen van der Maaden (Leiden
University Medical Center), Prof. Ferry Ossendorp (Leiden University
Medical Center), Prof. Urs Staufer (Delft University of technology)
P-S12-13-T3 Biomolecular Gradient patterning on Cell-compatible
Polymer Brushes» Mr. Yoan Mimoun (ECOLE NORMALE SUPERIEURE), Dr. Emmanuelle
Marie (ECOLE NORMALE SUPERIEURE), Dr. Mathieu Morel (ECOLENORMALE SUPERIEURE)
P-S12-14-T3 Synthetic route of Au-Fe3O4 Janus nanoparticles forcontinuous separation and purification of targeted biomaterials» Dr. Yunji Eom (Daegu Gyeongbuk Institute of Science & Technology),
Dr. Hak-Jong Choi (Korea Institute of Machinery & Materials), Dr.
Junhyoung Ahn (Korea Institute of Machinery & Materials), Dr. SungHwi
Lee (Korea Institute of Machinery & Materials), Dr. CheolGi Kim (Daegu
Gyeongbuk Institute of Science & Technology), Dr. JaeJong Lee (Korea
Institute of Machinery & Materials)
P-S12-15-T3 Paper-based microfluidics with internal calibration asa rapid assay for the quantitative measurement of
antidepressants» Mr. Esteban Builes-Münden (Institute of Microtechnology,
Braunschweig, 38124, Germany), Ms. Monika Conrad (IPTC - University
of Tübingen), Mr. Markus Franz Wieghaus (OFFIS - Institut fürInformatik), Prof. Günter Gauglitz (IPTC - University of Tübingen), Prof.
Andreas Dietzel (Institute of Microtechnology, Braunschweig, 38124,
Germany)
P-S12-16-T3 Fabrication of flexible microsensor arrays with ASIC
integration for respiratory monitoring» Mr. Maolei Zhou (Institute of Microtechnology, Braunschweig, 38124,
Germany), Ms. Yadi Zhen (Institute of Microtechnology, Braunschweig,
38124, Germany), Prof. Andreas Dietzel (Institute of Microtechnology,
Braunschweig, 38124, Germany)

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P-S12-17-T3 Recording of somatosensory evoked potentials by
ultraconformable µEcoG multielectrodes array with 3D PEDOT:PSS
micropillars-integrated microelectrodes» Ms. Alice Lunghi (Istituto Italiano di Tecnologia), Dr. Pierpaolo Greco(University of Ferrara), Dr. Mauro Murgia (Istituto Italiano diTecnologia), Dr. Riccardo Viaro (University of Ferrara), Ms. Sonia Guzzo(Istituto Italiano di Tecnologia), Dr. Michele Di Lauro (Istituto Italiano diTecnologia), Prof. Luciano Fadiga (University of Ferrara), Prof. Fabio
Biscarini (Istituto Italiano di Tecnologia), Dr. Michele Bianchi (Universityof Modena and Reggio Emilia)
P-S12-18-T3 Investigating the effect of nanostructures effective
shear modulus on the propagation of the neuronal growth cone
» Dr. George Flamourakis (Delft University of technology), Ms. Selina
Teurlings (Delft University of technology), Mr. Dimitri Kromm (Delft
University of technology), Dr. Daan Brinks (Delft University oftechnology), Dr. Carlas Smith (Delft University of technology), Dr.
Angelo Accardo (Delft University of technology)
P-S12-19-T3 Nano-needles transform plant cells and tissues withhigh efficiency without tissue damage» Prof. Andy Kah Ping Tay (National University of Singapore)
P-S12-20-T4 Versatile and highly efficient all-day radiative cooler
based on optimized polymer-ceramic composite fabricated via
facile process» Mr. Jaein Park (korea university), Mr. Dongwoo Chae (korea
university), Mr. Hangyu Lim (korea university), Mr. Jisung Ha (korea
university), Prof. heon lee (korea university)
P-S12-21-T4 Fluoropolymer based radiative cooler having Highdurability for external environment» Mr. Jisung Ha (korea university), Mr. Dongwoo Chae (korea
university), Mr. Hangyu Lim (korea university), Mr. Jaein Park (korea
university), Prof. heon lee (korea university)
P-S12-22-T4 High-performance semi-transparent perovskite solar
cells based on 3D-patterned FTO» Mr. sucheol ju (korea university), Mr. jaemin park (korea university),Prof. heon lee (korea university)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Tuesday, 26 September

P-S12-27-T4 Effects of copper surface roughness on inkjet printingof PCB resist ink» Mr. KWON YONG SHIN (Korea Institute of Industrial Technology), Dr.
Sang-Ho Lee (Korea Institute of Industrial Technology)

P-S12-23-T4 Deep Eutectic Solvent Supported Polymer-Based High
Performance Anion Exchange Membrane for Alkaline Fuel Cells» Ms. Aida Barlybayeva (Department of Chemical and Materials
Engineering, School of Engineering and Digital Sciences, Nazarbayev
University), Dr. Bauyrzhan Myrzakhmetov (Laboratory of Advanced
Materials and Systems for Energy Storage, Center for Energy andAdvanced Materials Science, National Laboratory Astana, Nazarbayev
University), Mr. Mirat Karibayev (Department of Chemical andMaterials Engineering, School of Engineering and Digital Sciences,
Nazarbayev University), Dr. Almagul Mentbayeva (Department ofChemical and Materials Engineering, School of Engineering and Digital
Sciences, Nazarbayev University)

P-S12-28-T4 On chip synthesis of Ag nanoparticles assisted byresonating microwave heating using a post-wall waveguide» Mr. Kaito Fujitani (University of Hyogo), Mr. Hiroshi Nakamura(University of Hyogo), Dr. Akinobu Yamaguchi (University of Hyogo), Dr.
Mitsuyoshi Kishihara (Okayama Prefectural University), Dr. Yuichi
Utsumi (University of Hyogo)

Wednesday, 27 September
P-S12-24-T4 Affordable and effective method for measuring key
parameters of micro and nanostructured triboelectric energy
harvesters» Dr. Luca Fachechi (Istituto Italiano di Tecnologia), Dr. Vincenzo
Mastronardi (Istituto Italiano di Tecnologia; Department of Innovation
Engineering, Unisalento), Dr. Laura Blasi (National Research Council of
Italy), Dr. Gaia de Marzo (Istituto Italiano di Tecnologia), Prof. Massimo
De Vittorio (Istituto Italiano di Tecnologia; Department of Innovation
Engineering, Unisalento), Dr. Maria Teresa Todaro (Istituto Italiano diTecnologia; Institute of Nanotechnology, CNR Lecce)

P-S12-25-T4 Improvement of Mechanical/Electrical Properties ofNano-Metal Film for Neural Electrode with Curing Rate
Adjustment of Photosensitive Polyimide» Dr. HyungDal Park (Korea Institute of Science and Technology), Dr.
Seonho Seok (University-Paris-Saclay), Dr. Jinseok Kim (Korea Instituteof Science and Technology)

P-S12-26-T4 Eco-friendly transparent silk fibroin radiative coolingfilm for thermal management of optoelectronics» Ms. Ching Wen Hwang (National Tsing Hua University), Ms. Yu-Hsuan
Chen (National Tsing Hua University), Prof. Dehui Wan (National Tsing
Hua University)

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8am

Reception/Registration
Atrium

8:55amOpening
Plenary Hall (MOA12/08/07)

9am

Greeting by the representative of the Berlin Senate for Economy
Plenary Hall (MOA12/08/07)

9:15amMNE-Award
Plenary Hall (MOA12/08/07)

9:25amKeynote Kurt Ronse
Plenary Hall (MOA12/08/07)
Continued dimensional scaling through projection Lithography

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

10:05am

Coffee Break
Atrium

10:35amKeynote Francesca Santoro
Plenary Hall (MOA12/08/07)

11:45amO-S41-T1-2 Two-photon laser 3D printing enhancement by
quantum dots and in-situ exchange» Dr. Ye Yu (HETEROMERGE GmbH, Gostritzer Str. 61, 01217 Dresden,
Germany), Dr. Anatol Prudnikau (Center for Advancing Electronics
Dresden (cfaed), Technische Universität Dresden, Helmholtzstr. 18,01069 Dresden, Germany), Dr. Vladimir Lesnyak (Physical Chemistry,
Technische Universität Dresden, Zellescher Weg 19, 01069 Dresden,
Germany), Mr. Man Ho Wong (HETEROMERGE GmbH, Gostritzer Str.
61, 01217 Dresden, Germany), Ms. Madhuri Chennur (HETEROMERGE
GmbH, Gostritzer Str. 61, 01217 Dresden, Germany), Ms. Tanya Saxena(HETEROMERGE GmbH, Gostritzer Str. 61, 01217 Dresden, Germany),
Mr. Josua Zscheile (HETEROMERGE GmbH, Gostritzer Str. 61, 01217
Dresden, Germany), Dr. Robert Kirchner (TU Dresden)

12pm

O-S41-T1-3 Combining thermal scanning probe lithography anddry etching for grayscale nanopatterns amplification in SiO2
» Mr. Berke Erbas (Ecole Polytechnique Federale de Lausanne (EPFL)),
Dr. Ana Conde Rubio (ICMAB-CSIC), Dr. Xia Liu (Beijing Institute ofTechnology), Prof. Giovanni Boero (Ecole Polytechnique Federale deLausanne (EPFL)), Prof. Jürgen Brugger (Ecole Polytechnique Federalede Lausanne (EPFL))

12:15pm

O-S41-T1-4 Multi-process compatibility of hybrid polymers
allowing advanced micro- and nano-patterning» Mr. Johannes Wolf (micro resist technology GmbH), Dr. Arne
Schleunitz (micro resist technology GmbH), Dr. Maria RUssew (micro
resist technology GmbH), Mrs. Gabi Grützner (micro resist technology
GmbH)

11:30amTrack2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems
MOA4/5Chaired by: Prof. Monika Fleischer and Dr. Armin Knoll

11:30am

O-S42-T2-1 Fabrication of electron transparent membranes andnanostructures in fluidic devices by nanoimprint lithography and"Flow-Through"-gas phase deposition» Mr. Jeremy Teuber (Universität Hamburg), Mr. Manuel Müller
(Universität Hamburg), Mr. Rukan Nasri (Universität Hamburg), Dr.
Arwen Pearson (Universität Hamburg), Ms. Judith Estengre-Perez(Universität Hamburg), Dr. Irene Fernandez-Cuesta (Universität
Hamburg)

Neurohybrid Electronics

11:15ambreak

11:30amTrack1 - Novel Developments in Nano/Micro Fabrication Methods
and Processes
MOA12
Chaired by: Dr. Michael Muehlberger and Dr. Christian Helke

11:30amO-S41-T1-1 Junctionless Nanowire Transistor: From Devices to
Sensing Applications» Mr. Sayantan Ghosh (Institute of Ion Beam Physics and Materials
Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR)), Dr.
Muhammad Bilal Khan (Institute of Ion Beam Physics and Materials
Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR)), Mr.
Ahmad Echresh (Institute of Ion Beam Physics and Materials Research,
Helmholtz-Zentrum Dresden-Rossendorf (HZDR)), Mr. Ulrich Kentsch(Institute of Ion Beam Physics and Materials Research, HelmholtzZentrum Dresden-Rossendorf (HZDR)), Dr. Slawomir Prucnal (Instituteof Ion Beam Physics and Materials Research, Helmholtz-Zentrum
Dresden-Rossendorf (HZDR)), Ms. Vaishali Vardhan (University College
Cork), Dr. Subhajit Biswas (University College Cork), Dr. John Wenger(University College Cork), Dr. Stig Hellebust (University College Cork),
Prof. Justin Holmes (University College Cork), Prof. Artur Erbe (Instituteof Ion Beam Physics and Materials Research, Helmholtz-Zentrum
Dresden-Rossendorf (HZDR)), Dr. Yordan Georgiev (Institute of Ion
Beam Physics and Materials Research, Helmholtz-Zentrum DresdenRossendorf (HZDR))Powered by Ex Ordo, everything you need to run a research conference.

Page 21

49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

11:45am

O-S42-T2-2 The performance improvement of multi-layered
ZnO/SnO2 thin-film transistors by varying growth temperatures» Mr. Chan-Yeong Park (Department of Electrical and Electronics
Engineering, Pusan National University), Mr. Se-Hyeong Lee(Department of Electrical and Electronics Engineering, Pusan National
University), Ms. So-Young Bak (Department of Electrical and Electronics
Engineering, Pusan National University), Mr. Dongki Baek (Department
of Electrical and Electronics Engineering, Pusan National University),
Mr. Hyeongrok Jang (Department of Electrical and Electronics
Engineering, Pusan National University), Mr. Jinwoo Lee (Department
of Electrical and Electronics Engineering, Pusan National University),Prof. Moonsuk Yi (Department of Electrical and Electronics
Engineering, Pusan National University)

12:15pm

11:30am

11:30am

11:30amTrack3 - Micro/Nano Engineering for Life Sciences
MOA6
Chaired by: Dr. Irene Fernandez-Cuesta and Dr. Francesco La Malfa

11:30amO-S43-T3-1 Nanowell field-effect transistors for biomoleculesensing» Dr. Lijun Liu (Ku Leuven, Celestijnenlaan 200f, Leuven, 3001, Belgium,
IMEC, Kapeldreef 75, Leuven, 3001, Belgium), Dr. Sybren Santermans(imec v.z.w.), Dr. David Barge (imec v.z.w.), Mr. Jacobus Delport (imec
v.z.w.), Mr. Ashesh Raychaudhuri (imec v.z.w.), Dr. Simone Severi (imec
v.z.w.), Prof. Pol Van Dorpe (IMEC), Dr. Koen Martens (IMEC)

11:45am12pm

O-S43-T3-2 Self-powered bioelectronic nanogenerators andmicrodevices for cell stimulation» Dr. Gonzalo Murillo Rodríguez (Instituto de Microelectrónica deBarcelona (IMB-CNM, CSIC))
O-S43-T3-3 High resolution µGrid-LED array with 15 µm pixels for
optogenetic research» Mr. Eric Klein (IMTEK - University of Freiburg), Prof. Oliver Paul(IMTEK, University of Freiburg), Dr. Patrick Ruther (IMTEK, University ofFreiburg)

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11:45am12pm

O-S43-T3-4 A Microfluidic-Based Quantitative Analysis System for
the Multiplexed Genetic Diagnosis of Viral Infections in Multiple
Samples» Mr. Daigo Natsuhara (Toyohashi University of Technology), Prof.
Shunya Okamoto (Toyohashi University of Technology), Prof. Moeto
Nagai (Toyohashi University of Technology), Prof. Masaru Ihira (Fujita
Health University), Prof. Takayuki Shibata (Toyohashi University ofTechnology)
Track2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems
MOA9
Chaired by: Dr. James Alexander Liddle and Dr. Uwe Hübner
O-S44-T2-1 Integration of hard magnetic materials in MEMS
devices» Dr. Federico Maspero (Politecnico di Milano), Mr. Simone Cuccurullo(Politecnico di Milano), Dr. Alejandro Plaza (Politecnico di Milano), Ms.
Francesca Marson (Politecnico di Milano), Ms. Oksana Koplak(Politecnico di Milano), Mr. Andrea Del Giacco (Politecnico di Milano),
Ms. Maria Cocconcelli (Politecnico di Milano), Ms. Giulia Pavese(Politecnico di Milano), Prof. Andrea Cattoni (Politecnico di Milano),Prof. Riccardo Bertacco (Politecnico di Milano)

O-S44-T2-2 Simultaneous Estimation of dI/dV and dI/dZ with
Ultrafast feedback loop for Scanning Tunnelling Microscopy» Ms. Richa Mishra (The University of Texas at Dallas), Prof. S. O. Reza
Moheimani (The University of Texas at Dallas), Dr. Ehud Fuchs (Zyvex
Labs), Dr. James Owen (Zyvex Labs), Dr. John Randall (Zyvex Labs)

O-S44-T2-3 Through Silicon MEMS inspection with a near infraredlaser scanning setup» Dr. Diogo E. Aguiam (International Iberian Nanotechnology
Laboratory), Ms. Inês S. Garcia (International Iberian Nanotechnology
Laboratory), Ms. Joana D. Santos (International Iberian
Nanotechnology Laboratory), Dr. Filipe S. Alves (International Iberian
Nanotechnology Laboratory)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Amazing Lithographic Resists

Continued from Wednesday, 27 September

12:15pm

12pm

O-S44-T2-4 Advanced defect detection procedure in immersion
lithography for minimizing yield-killing defect classes throughhigh sensitivity optical inspection, guided e-beam inspection, andAI technology by track parameters optimization» Dr. Jorge Pablo Nacenta Mendivil (Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France), Mr. Alexis ROYER (Univ. Grenoble Alpes, CEA,
Leti, F-38000 Grenoble, France), Mrs. Karine JULLIAN (Univ. Grenoble
Alpes, CEA, Leti, F-38000 Grenoble, France), Dr. Michael MAY (Univ.
Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France), Mr. Fabrice
KOUEMENI-TCHOUAKE (Univ. Grenoble Alpes, CEA, Leti, F-38000
Grenoble, France), Prof. Raluca TIRON (Univ. Grenoble Alpes, CEA, Leti,
F-38000 Grenoble, France), Mr. Laurent Couturier (Applied Materials
France, 864 Chem. des Fontaines, 38190 Bernin, France), Mr. Yuji
Tanaka (SCREEN Semiconductor Solutions Co., Ltd. 480-1 Takamiyacho, Hikone, Shiga, Japan), Mr. Christophe Couderc (Univ. Grenoble
Alpes, CEA, Leti, F-38000 Grenoble, France), Dr. Masahiko Harumoto(SCREEN Semiconductor Solutions Co., Ltd. 480-1 Takamiya-cho,
Hikone, Shiga, Japan), Mr. Masanes Masanes (Univ. Grenoble Alpes,
CEA, Leti, F-38000 Grenoble, France)

Break2:20pmTrack1 - Novel Developments in Nano/Micro Fabrication Methods
and Processes
MOA12
Chaired by: Dr. Søren Stobbe and Dr. Marcus Rommel

2:20pmO-S51-T1-1 New high-resolution SiO2-based positive-tone resist forelectron beam lithography» Prof. Andrea Cattoni (Politecnico di Milano), Dr. Dominique Mailly(Centre de Nanosciences et de Nanotechnologies (C2N) CNRS,
Université Paris-Saclay), Prof. Ivan Maximov (Lund University)

2:35pmO-S51-T1-2 Greyscale lithography beyond 100 µm pattern depth
facilitated by a novel photoresist and optimized processing» Dr. Christine Schuster (micro resist technology GmbH), Ms. Marina
Heinrich (micro resist technology GmbH), Ms. Gerda Ekindorf(Heidelberg Instruments Mikrotechnik GmbH), Dr. Anja Voigt (micro
resist technology GmbH), Dr. Arne Schleunitz (micro resist technologyGmbH), Mrs. Gabi Grützner (micro resist technology GmbH)

Invited Talk Regina Luttge
MOA4/5Chaired by: Prof. Monika Fleischer and Dr. Armin Knoll
O-S42-T2-3 Smarter microsystems by neuro-nanoscaleinteractions?

12:30pm

Lunch Break

1:25pmHonoring MNE Pioneer
Plenary Hall (MOA12/08/07)

1:35pm2:15pmKeynote Uzodinma Okoroanyanwu
Plenary Hall (MOA12/08/07)

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2:20pmTrack2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems
MOA4/5Chaired by: Dr. Christopher Dirdal and Dr. Helmut Schift2:20pmO-S52-T2-1 3D Printed Microscale Static Geometry Check Valve» Prof. (Edwin) En-Te Hwu (Technical University of Denmark), Mr. Dali
Reda (Technical University of Denmark), Dr. Tien-Jen Chang (Technicaluniversity of Denmark), Prof. Nikolaj Gadegaard (University ofGlasgow), Prof. Anja Boisen (Technical University of Denmark)Page 23

49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

2:35pm2:20pm2:20pm2:35pm2:20pmO-S52-T2-2 Design and All-In-One Etch of Silicon Metalens for
Near-Infrared Focusing» Dr. Bingrui Lu (Technical University of Denmark), Mr. Søren
Engelberth Hansen (Technical University of Denmark), Mr. Thor August
Schimmell Weis (Technical University of Denmark), Dr. Guillermo
Arregui (Technical University of Denmark), Dr. Søren Stobbe (Technical
University of Denmark)

Track3 - Micro/Nano Engineering for the Life Sciences
MOA6
Chaired by: Mr. Manuel Müller and Dr. Maria RUssew

O-S53-T3-1 Motor protein driven, active, on-chip transport anddetection of nanoscaled, biomolecular cargo» Mr. Tim Erichlandwehr (Universität Hamburg), Dr. Marko Usaj
(Linnaeus University), Prof. Alf Månsson (Linnaeus University), Dr. Irene
Fernandez-Cuesta (Universität Hamburg)

O-S53-T3-2 Adaptive resolution two-photon 3D printing with X-ray
tomographic resolution optimization of ultracompact 3D
microfluidics» Dr. Markus Lunzer (UpNano GmbH), Mr. Andrew Nelson Butterfield(Institute of Biomaterials and Biomolecular Systems, University of
Stuttgart), Mr. Konstantinos Karpos (Department of Physics and The
Biodesign Institute, Arizona State University), Dr. Christian Matthias
Schlepütz (Swiss Light Source, Paul Scherrer Institute), Prof. Richard
Kirian (Department of Physics and The Biodesign Institute, ArizonaState University), Prof. Michael Heymann (Institute of Biomaterials andBiomolecular Systems, University of Stuttgart)

Track3 - Micro/Nano Engineering for the Life Sciences
MOA9
Chaired by: Dr. Celestino Padeste and Dr. Arne Schleunitz

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2:20pm

O-S54-T3-1 Microfabrication of leaky optrode for cell replacement
therapy in the brain» Ms. Celine Dinesen (Technical University of Denmark), Dr. Arto
Heiskanen (Technical University of Denmark), Prof. Jenny Emnéus(Technical University of Denmark), Prof. Stephan Sylvest Keller(Technical University of Denmark)2:35pm

O-S54-T3-2 Tuning the mechanical properties and feature
resolution of two-photon polymerized soft elastomeric 3D
biomaterials for (neuro)mechanobiology» Mr. Pieter van Altena (Delft University of technology), Dr. Angelo
Accardo (Delft University of technology)

2:50pmBreak

3pm

Track1 - Novel Developments in Nano/Micro Fabrication Methods
and Processes
MOA12
Chaired by: Dr. Salvatore Bagiante and Prof. Prof. Dr. Michael Heuken

3pm

O-S61-T1-1 Additive micro-structuring of non-planar opticalwaveguides for multifunctional neural interfaces» Dr. Marco Bianco (Istituto Italiano di Tecnologia), Dr. Antonio Balena(Istituto Italiano di Tecnologia), Dr. Marco Pisanello (OptogeniX s.r.l.),Dr. Elisa Scarpa (Istituto Italiano di Tecnologia), Dr. Filippo Pisano(Istituto Italiano di Tecnologia), Dr. Barbara Spagnolo (Istituto Italiano
di Tecnologia), Ms. Maria Samuela Andriani (Istituto Italiano diTecnologia), Mr. Miroslav Stiburek (Institute of scientific instruments ofCzech Republic, Complex photonics), Dr. Petra Kolbabkova (Institute ofscientific instruments of Czech Republic, Complex photonics), Dr. Hana
Uhlirova (Institute of scientific instruments of Czech Republic, Complex
photonics), Prof. Tomas Cizmar (Leibniz institute of photonic
technology), Dr. Ferruccio Pisanello (Istituto Italiano di Tecnologia),
Prof. Massimo De Vittorio (Istituto Italiano di Tecnologia)

3:15pm

O-S61-T1-2 Guided Domino Lithography for Uniform Ultra-Sharp
Nanoantenna Arrays» Mr. Dong Kyo Oh (pohang university of science and technology), Mr.
Jaekyung Kim (pohang university of science and technology), Ms. Jihae
Lee (pohang university of science and technology), Prof. Junsuk Rho(pohang university of science and technology)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

3:30pm3:45pm

O-S61-T1-3 Intra-level Mix and Match Approach of the Photoresist
mr-EBL 6000.5 using E-Beam and i-line Stepper Lithography for
PICs» Mr. Sebastian Schermer (Fraunhofer ENAS, Technologie Campus 3,09126 Chemnitz), Mr. Markus Reinhardt (Fraunhofer ENAS,
Technologie Campus 3, 09126 Chemnitz), Dr. Christian Helke(Fraunhofer ENAS, Technologie Campus 3, 09126 Chemnitz), Ms.
Susanne Hartmann (Technische Universität Chemnitz, Center for
Microtechnologies, Reichenhainer Str. 70, 09126 Chemnitz, Germany),
Dr. Georg Heldt (Fraunhofer ENAS, Technologie Campus 3, 09126
Chemnitz), Mr. Franz Tank (Technische Universität Chemnitz, Center for
Microtechnologies, Reichenhainer Str. 70, 09126 Chemnitz, Germany),
Dr. Anja Voigt (micro resist technology GmbH), Dr. Danny Reuter(Fraunhofer ENAS)
O-S61-T1-4 Novel Fabrication of Arbitrary Optical Probe Array by
4D Printing» Dr. Dominique Decanini (C2N/CNRS-University Paris-Saclay), Mr.
Abdelmounaim Harouri (C2N/CNRS-University Paris-Saclay), Ms. Ayako
Mizushima (The University of Tokyo), Dr. Jongho Park (The University ofTokyo), Prof. Beomjoon Kim (The University of Tokyo), Prof. Yoshio Mita
(The University of Tokyo), Dr. Gilgueng Hwang (LIMMS/CNRS-The
University of Tokyo)

4pm

O-S61-T1-5 Penrose Patterns for Error Measurement in Electron
Beam Lithography» Dr. Paul Reynolds (University of Glasgow), Dr. Stephen Thoms(University of Glasgow)

3pm

Track2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems
MOA4/5Chaired by: Dr. Holger Sailer and Dr. Vijay Ramya Kolli

3pm

O-S62-T2-1 Development of surface acoustic wave phasemodulators for physical reservoir computing» Mr. Taiki Ijima (Kyoto University), Dr. Claude Meffan (Kyoto
University), Prof. Amit Banerjee (Kyoto University), Dr. Jun Hirotani(Kyoto University), Prof. Toshiyuki Tsuchiya (Kyoto University)

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3:15pm

O-S62-T2-2 A silicon carbide (SiC) carbon nanotube (CNT)composite for high aspect ratio harsh environment MEMS
» Mr. Jiarui Mo (Delft University of Technology), Mr. Shreyas Shankar(Delft University of Technology), Dr. Sten Vollebregt (Delft University ofTechnology)

3:30pm

O-S62-T2-3 Parallel In-Plane Electrothermal Actuators» Ms. Yen Nee Ho (UNSW Sydney), Dr. Aron Michael (UNSW Sydney),Prof. Chee Yee Kwok (UNSW Sydney), Dr. Cibby Pulikkaseril (Baraja)

3:45pm

O-S62-T2-4 Fabrication of On-Chip Carbon Microelectrodes by
Catalytic Graphitization of 3D Printed Polymers» Mrs. Zoi Maria Papadopoulou (National Centre for Nano Fabrication
and Characterization, DTU Nanolab, Technical University of Denmark,2800 Lyngby, Denmark), Ms. Swetha Vasudevan Kanakkottu (Technical
University of Denmark), Prof. Babak Rezaei (Technical University ofDenmark), Prof. Stephan Sylvest Keller (Technical University ofDenmark)

4pm

O-S62-T2-5 Flexible photonic integrated circuit technology andcharacterization platform» Mr. Franz Tank (Technische Universität Chemnitz, Center for
Microtechnologies, Reichenhainer Str. 70, 09126 Chemnitz, Germany),
Mrs. Julia Wecker (Fraunhofer ENAS, Technologie Campus 3, 09126
Chemnitz), Dr. Chris Stöckel (Fraunhofer ENAS; Technische Universität
Chemnitz, Center for Microtechnologies, Germany), Dr. Christian Helke(Fraunhofer ENAS; Technische Universität Chemnitz, Center for
Microtechnologies, Germany), Mrs. Alexey Shaporin (Fraunhofer ENAS,
Technologie Campus 3, 09126 Chemnitz), Dr. Joerg Martin (Fraunhofer
ENAS, Technologie Campus 3, 09126 Chemnitz), Mr. SebastianSchermer (Fraunhofer ENAS, Technologie Campus 3, 09126 Chemnitz),
Mr. Toni Großmann (Fraunhofer ENAS, Technologie Campus 3, 09126
Chemnitz), Dr. Karla Hiller (Fraunhofer ENAS; Technische Universität
Chemnitz, Center for Microtechnologies, Germany), Dr. Danny Reuter(Fraunhofer ENAS; Technische Universität Chemnitz, Center for
Microtechnologies, Germany), Mr. Micha Haase (Fraunhofer ENAS;
Technische Universität Chemnitz, Center for Microtechnologies,
Germany), Dr. Alexander Weiss (Fraunhofer ENAS, Technologie
Campus 3, 09126 Chemnitz)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

3pm

3:45pm
O-S63-T4-4 Focused gold ion beam for the fabrication of sub-100
nm length InGaZnO thin film transistors on flexible substrates» Dr. Elia Scattolo (FBK, Fondazione Bruno Kessler), Ms. Federica
Catania (Free University of Bozen), Mr. Alessandro Cian (FBK,
Fondazione Bruno Kessler), Dr. Niko Muenzenrieder (Free University ofBozen), Dr. Giuseppe Cantarella (University of Modena and Reggio
Emilia), Prof. Paolo Lugli (Free University of Bozen), Prof. Luisa Petti(Free University of Bozen), Mr. Damiano Giubertoni (FBK, Fondazione
Bruno Kessler)

Track3 - Micro/Nano Engineering for Life Sciences / Track4 Micro/Nano Engineering for Physical and Chemical Applications
MOA6
Chaired by: Dr. Danny Reuter and Dr. Kevin Hofhuis

3pm
O-S63-T3-1 Electrode Design Using Multi-Material Topology
Optimization for Accurate Measurement of Trans-Epithelial
Electrical Resistance in Organ-on-a-Chip» Mr. Haruki Goda (Kyoto University), Mr. Naoyuki Ishida (Kyoto
University), Dr. Kozo Furuta (Kyoto University), Prof. Kazuhiro Izui
(Kyoto University), Prof. Fred van Keulen (Delft University oftechnology), Dr. Ken-ichiro Kamei (Kyoto University), Prof. Toshiyuki
Tsuchiya (Kyoto University), Prof. Osamu Tabata (Kyoto University of
Advanced Science), Dr. Yoshikazu HIRAI (Kyoto University)

4pm
O-S63-T4-5 PEDOT:PSS deposition in OECTs: inkjet printing, aerosol
jet printing and spin coating» Ms. Giorgia Rinaldi (Politecnico di Torino), Dr. GIUSEPPE TARABELLA(CNR), Dr. Pasquale D'Angelo (CNR), Dr. Simone Luigi Marasso (CNR),
Prof. Matteo Cocuzza (Politecnico di Torino), Prof. Fabrizio Pirri(Politecnico di Torino), Dr. Matteo Parmeggiani (Politecnico di Torino)

3:15pm
O-S63-T3-2 The dual role of topographical and mechanical cues: amulti-modal platform for in vitro mimicking of cardiac
microenvironment» Ms. Denise Pagliara (Università degli Studi di Napoli "Federico II"), Dr.
Raffaele Vecchione (Istituto Italiano di Tecnologia), Prof. Paolo Antonio
Netti (Università degli Studi di Napoli "Federico II")

3pm

Invited Talk Irene Fernandez
MOA9Chaired by: Prof. Christophe Vieu and Dr. Irene Taurino
O-S64-T3-1 DNA in nanochannels: molecular flow analysis andapplications

3:30pm
O-S63-T3-3 Engineering Ultrathin Si Membranes with sub-20 nm
Pores at Wafer Scale» Dr. Cian Cummins (imec v.z.w.), Dr. Sandeep Seema Saseendran(imec v.z.w.), Mrs. Aurelie Humbert (imec v.z.w.), Dr. Lubuna Shafeek(ISTA), Dr. Salvatore Bagiante (Institute of Science and Technology
Austria (ISTA)), Dr. Lucas Lindeboom (Imec The Netherlands), Dr. Fokko
Wieringa (Imec The Netherlands), Dr. Roberto Garcia van der Westen(Imec The Netherlands), Dr. Swathi Suran (Imec The Netherlands), Dr.
Jeroen Vollenbroek (University of Twente), Dr. Geert Langereis (ImecThe Netherlands), Dr. Patrick van Deursen (Imec The Netherlands), Dr.
Simone Severi (imec v.z.w.)

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3:30pmTrack3 - Micro/Nano Engineering for Life Sciences
MOA9
Chaired by: Prof. Christophe Vieu and Dr. Irene Taurino

3:30pmO-S64-T3-2 Downscaling Roadmap for Single-Molecule Detection
with Silicon Field-Effect Transistors» Dr. Sybren Santermans (IMEC), Dr. Geert Hellings (IMEC), Dr. Willem
Van Roy (IMEC), Prof. Pol Van Dorpe (IMEC), Dr. Koen Martens (IMEC)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

3:45pmO-S64-T3-3 Biocompatible AIN Thin Films for Continuous Pulse
Wave Velocity Assessment Applied to Cardiovascular Health» Ms. Angela Tafadzwa Shumba (Istituto Italiano di Tecnologia), Mr.
Suleyman Mahircan Demir (Istituto Italiano di Tecnologia), Dr. Gaia deMarzo (Istituto Italiano di Tecnologia), Dr. Valeria Carluccio (Istituto
Italiano di Tecnologia), Dr. Vincenzo Mastronardi (Istituto Italiano diTecnologia), Dr. Luca Fachechi (Istituto Italiano di Tecnologia), Dr.
Francesco Rizzi (Istituto Italiano di Tecnologia), Prof. Paolo Motto Ros(Politecnico di Torino), Prof. Danilo Demarchi (Politecnico di Torino),
Prof. Luigi Patrono (University of Salento), Prof. Massimo De Vittorio(Istituto Italiano di Tecnologia)

4pm
O-S64-T3-4 Engineering of 3D printed pyrolytic carbon
microneedle biosensors» Mr. Filip Angelov (DTU Nanolab), Dr. Stephanie Bisgaard (DTU
Nanolab), Dr. Jesper Yue pan (Technical University of Denmark), Prof.
Babak Rezaei (Technical University of Denmark), Dr. Arto Heiskanen(Technical University of Denmark), Prof. Yi Sun (Technical University ofDenmark), Prof. Stephan Sylvest Keller (Technical University ofDenmark)

4:15pmPoster Session2.1: Track 2
MOA10/11

P-S21-01-T2 Hollow Silicon-based Microneedle Array for DermalInterstitial Fluid Extraction Fabricated by Only Dry Etching in
Wafer Scale» Mr. Ali Gilani (Ecole Polytechnique Federale de Lausanne (EPFL)), Dr.
Hervé Elettro (xsensio), Mr. Nicolas Humblot (xsensio), Prof. Adrian
Mihai Ionescu (EPFL)

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P-S21-02-T2 Energy Efficient Coloration of Solar Panels» Mr. Oskar Darselius Berg (Stensborg A/S), Mr. Markus Babin (DTU
Electro, Department of Electrical and Photonics Engineering, Technical
University of Denmark, Kgs. Lyngby, Denmark.), Ms. Irina Vyalih (The
University of Southern Denmark, Mads Clausen Institute), Ms. Nanna
Lysgaard Andersen (DTU Electro, Department of Electrical andPhotonics Engineering, Technical University of Denmark, Kgs. Lyngby,
Denmark.), Prof. Morten Madsen (The University of Southern
Denmark, Mads Clausen Institute), Mr. Peter Behrensdorff Poulsen(DTU Electro, Department of Electrical and Photonics Engineering,Technical University of Denmark, Kgs. Lyngby, Denmark.), Mr. SuneThorsteinsson (DTU Electro, Department of Electrical and Photonics
Engineering, Technical University of Denmark, Kgs. Lyngby, Denmark.),
Mr. Jan Stensborg (Stensborg A/S)

P-S21-03-T2 Heavy metal ion detection by an impedance sensor
based on Platinum nanoparticles/DNAzymes network» Dr. Evangelos Aslanidis (Department of Applied Sciences, National
Technical University of Athens, Zografou 15780, Greece), Dr. Evangelos
Skotadis (Department of Applied Sciences, National Technical
University of Athens, Zografou 15780, Greece), Ms. Georgia Tzourmana(Department of Applied Sciences, National Technical University ofAthens, Zografou 15780, Greece), Ms. Chryssi Panagopoulou(Department of Applied Sciences, National Technical University ofAthens, Zografou 15780, Greece), Ms. Annita Rapesi (Biomedical
Research Foundation of the Academy of Athens, Athens 11527,
Greece), Dr. George Tsekenis (Biomedical Research Foundation of the
Academy of Athens, Athens 11527, Greece), Dr. STAVROSCHATZANDROULIS (Institute of Nanoscience and Nanotechnology,
NCSR Demokritos, Aghia Paraskevi 15341, Attiki, Greece), Prof. Dimitris
Tsoukalas (National Technical University of Athens)

P-S21-04-T2 Fabrication of Silicon nano-pillars to enlarge theirimplementation in future integrated circuits and systems» Dr. Alberto del Moral (Institute of Microelectronics of Barcelona (IMBCNM-CSIC)), Mr. Raul Ramos (Institute of Microelectronics of Barcelona(IMB-CNM-CSIC)), Dr. Borja Sepúlveda (Institute of Microelectronics ofBarcelona (IMB-CNM-CSIC)), Dr. Esteve Amat (Institute ofMicroelectronics of Barcelona (IMB-CNM-CSIC))

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

P-S21-05-T2 Dual photoresist maskless UV photolithography
process to fabricate 3D suspended microstructures for pyrolytic
carbon microelectrodes» Mr. Mohammad Ramezannezhad (Technical University of Denmark),
Prof. Babak Rezaei (Technical University of Denmark), Prof. Stephan
Sylvest Keller (Technical University of Denmark)P-S21-06-T2 Mass Spectrometry by Single Mode
Nanoelectromechanical Systems at Atmospheric Conditions» Mr. Batuhan E. Kaynak (Bilkent University), Mr. Mohammed Alkhaled(Bilkent University), Ms. Enise Kartal (Bilkent University), Dr. Cenk Yanik(Sabanci University), Prof. Mehmet Selim Hanay (Bilkent University)
P-S21-07-T2 Tuneable refractive index polymer waveguides forphotonic sensor platforms using wavelengths from 400 nm to1650 nm.
» Mr. Harry Biller (Allresist GmbH), Dr. Mandy Sendel (Allresist GmbH),
Dr. Maik Gerngroß (Allresist GmbH), Mr. Matthias Schirmer (AllresistGmbH), Mr. Robin Kraft (Fraunhofer Heinrich Hertz Institute), Mr.
Crispin Zawadzki (Fraunhofer Heinrich Hertz Institute)
P-S21-08-T2 A Method for the automated Replication of Diffractive
Optical Elements with Strong Curvature» Mr. Constantin Rödel (Technische Universität Berlin), Mr. Paul Kastl(Technische Universität Berlin), Dr. Stefan Kühne (Technische
Universität Berlin), Mr. Johannes Wolf (micro resist technology GmbH),
Dr. Thomas Krist (NOB nano optics berlin GmbH), Prof. Dirk
Oberschmidt (Technische Universität Berlin)
P-S21-09-T2 Batch Fabrication of nanoscale fin-type FETs using
thermal Scanning Probe Lithography» Dr. Armin Knoll (IBM Research Zurich), Dr. Jana Chaaban (Heidelberg
Instruments Nano AG), Dr. Nicholas Hendricks (Heidelberg
Instruments Nano AG), Dr. Emine Cagin (Heidelberg Instruments Nano
AG), Dr. Chloé Bureau-Oxton (IBM Research Zurich), Dr. Heiko Wolf
(IBM Research Zurich), Mr. Daniel Widmer (IBM Research Zurich), Ms.
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P-S21-10-T2 Low-cost nanostructures for contactless structuralmonitoring» Dr. Javier Bravo Larrea (NAITEC), Mr. Julio Peña (NAITEC)

P-S21-11-T2 Al-SWG reflectors for tuneable VIS filters andspectroscopy applications» Dr. Christian Helke (Fraunhofer ENAS, Technologie Campus 3, 09126
Chemnitz), Mr. Christian Behl (Fraunhofer ENAS), Dr. Regine Behlert(Fraunhofer ENAS), Ms. Susanne Hartmann (Technische Universität
Chemnitz, Center for Microtechnologies, Reichenhainer Str. 70, 09126
Chemnitz, Germany), Mr. Micha Haase (Fraunhofer Institute forElectronic Nano Systems), Dr. Jörg Martin (Fraunhofer ENAS), Dr.
Danny Reuter (Fraunhofer ENAS), Dr. Karla Hiller (Fraunhofer ENAS;
Technische Universität Chemnitz, Center for Microtechnologies,
Germany)

P-S21-12-T2 Characterization of hybrid nanowire-MEMS force
sensors using direct actuation» Mr. Bartosz Pruchnik (Department of Nanometrology, Wrocław
University of Science and Technology, Wroclaw, 50-370, Poland), Mr.
Krzysztof Kwoka (Department of Nanometrology, Wrocław Universityof Science and Technology, Wroclaw, 50-370, Poland), Dr. Tomasz
Piasecki (Department of Nanometrology, Wrocław University of Scienceand Technology, Wroclaw, 50-370, Poland), Mr. Masoud Jedari
Ghourichaei (Department of Mechanical Engineering, Koç University,
Istanbul, 34450, Turkey), Dr. Mehrdad Karimzadehkhouei (Dept. of
Mechanical Engineering, Koç University, Istanbul, 34450, Turkey), Mr.
Cemal Aydogan (Institute of Micro- and Nanoelectronics, Ilmenau
University of Technology, Ilmenau, 98693, Germany), Prof. Ivo W.
Rangelow (Technische Universität Ilmenau), Prof. Halil Bayraktar (Dept.
of Molecular Biology and Genetics, Istanbul Technical University,
Maslak, Istanbul, 34467, Turkey), Prof. B. Erdem Alaca (Department of
Mechanical Engineering, Koç University, Istanbul, 34450, Turkey), Prof.
Teodor Gotszalk (Department of Nanometrology, Wrocław Universityof Science and Technology, Wroclaw, 50-370, Poland)

P-S21-13-T2 Understanding of Ta doping effect into the Sb2Te3 forhigh-speed phase change memory» Mr. jaemin park (korea university), Mr. sucheol ju (korea university),Prof. heon lee (korea university)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

P-S21-14-T2 Direct Vacuum Wafer Bonding for 1310 nm
Bidirectional Tunable MEMS VCSEL» Mr. Masoud Payandeh (Technical university of Denmark), Dr. Hitesh
Kumar Sahoo (Technical University of Denmark), Dr. Elizaveta
Semonova (Technical University of Denmark), Prof. Kresten Yvind(Technical University of Denmark)P-S21-15-T2 Encapsulation Strategy for Ultrathin Electronics
Incorporated in a Flexible Polymer Film
» Mrs. Ulrike Passlack (Institut für Mikroelektronik Stuttgart (IMSCHIPS)), Mr. Nicolai Simon (Institute for microsystems technolgoy(iMST)), Prof. Volker Bucher (Institute for microsystems technolgoy(iMST)), Dr. Christine Harendt (Institut für Mikroelektronik Stuttgart(IMS CHIPS)), Prof. Joachim Burghartz (Institut für Mikroelektronik
Stuttgart (IMS CHIPS))

P-S21-16-T2 Fabrication of GST metasurface spectral filters using
nanoimprint lithography» Dr. Jorge Ramiro (Tekniker), Mr. Aritz Juarros (Tekniker), Dr. Rocio
Ortiz (Tekniker), Mrs. Alazne Martinez (Tekniker), Dr. Borja Pozo
(Tekniker)

P-S21-17-T2 Shape-engineering of 2D TMD semiconductors via
thermal-Scanning Probe Lithography» Mr. Giorgio Zambito (University of Genoa), Dr. Matteo Gardella(University of Genoa), Prof. Maria Caterina Giordano (University of
Genoa), Prof. Francesco Buatier de Mongeot (University of Genoa)

P-S21-18-T2 Room temperature bonding process ofpolydimethylsiloxane to titanium for biomedical applications» Ms. Lucrezia Maini (Micro- and Nanosystems, ETH Zurich, 8092,
Switzerland), Mr. Roman Furrer (Transport at Nanoscale Interfaces,
EMPA, Dübendorf, 8600, Switzerland), Prof. Christofer Hierold (Microand Nanosystems, ETH Zurich, 8092, Switzerland), Dr. Cosmin Roman(Micro- and Nanosystems, ETH Zurich, 8092, Switzerland)

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P-S21-19-T2 Harvesting the kinetic energy of raindrops with amicroscale triboelectric nanogenerator» Dr. Ali Ghaffarinejad (Sensors and Smart Systems Group, Institute ofEngineering, Hanze University of Applied Sciences), Mr. Xabier Casas(Consejo Superior de Investigaciones Científicas (CSIC),)
P-S21-20-T2 Scalable meta-projector for wide viewing angle 3D
imaging» Mr. Gyeongtae Kim (pohang university of science and technology),
Ms. Yeseul Kim (pohang university of science and technology), Ms.
Jooyeong Yun (pohang university of science and technology), Prof.
Junsuk Rho (pohang university of science and technology)
P-S21-21-T2 Quantitative characterization of nanowire verticality
using SEM images» Ms. ELENI STAI (NCSR Demokritos), Dr. Vassilios Constantoudis (NCSR
Demokritos), Mr. Dimitris Nioras (NCSR Demokritos), Dr. Evangelos
Gogolides (NCSR Demokritos)
P-S21-22-T2 Permittivity-Based Microparticle Classification
through Integration of Impedance Cytometry and Microwave
Sensing» Mr. Uzay Tefek (Bilkent University), Mr. Burak Sari (Sabanci
University), Dr. Hashim Alhmoud (Bilkent University), Prof. Mehmet
Selim Hanay (Bilkent University)
P-S21-23-T2 Metalenses for generation of Perfect Vortex Beams fortelecom infrared applications» Dr. Daniele Bonaldo (University of Padova), Dr. Andrea Vogliardi(University of Padova), Dr. Gianluca Ruffato (University of Padova), Dr.
Simone Dal Zilio (CNR-IOM), Prof. Filippo Romanato (University of
Padova)P-S21-24-T2 Influence of the combination of ordered 2D andrandom 3D structures on the reaction of Al/Ni multilayer» Mr. Konrad Jaekel (Technische Universität Ilmenau), Ms. Yesenia
Haydee Sauni Camposano (Technische Universität Ilmenau), Mr.
Sebastian Matthes (Technische Universität Ilmenau), Mr. Marcus Glaser(Technische Universität Ilmenau), Prof. Jean Pierre Bergmann(Technische Universität Ilmenau), Prof. Peter Schaaf (Technische
Universität Ilmenau), Prof. Jens Müller (Technische Universität
Ilmenau), Dr. Heike Bartsch (Technische Universität Ilmenau)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

P-S21-25-T2 Plasma etching and roughening of inclined objects,
macroscopic surfaces and microfluidic channels: experiments andmodelling» Dr. Athina S. Kastania (Institute of Nanoscience and Nanotechnology,
NCSR “Demokritos”), Mr. Sotiris Mouchtouris (Institute of Nanoscienceand Nanotechnology, NCSR “Demokritos”), Dr. Angelos Zeniou(Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”),
George Kokkoris (School of Chemical Engineering, National Technical
University of Athens), Dr. Vassilios Constantoudis (Institute of
Nanoscience and Nanotechnology, NCSR “Demokritos”), Dr. Angeliki
Tserepi (Institute of Nanoscience and Nanotechnology, NCSR
Demokritos), Dr. Gerburg Schider (Joanneum Research
Forschungsgesellschaft MbH), Mr. Daniel Borstner (Joanneum
Research Forschungsgesellschaft MbH), Mr. Philipp Melchior(Joanneum Research Forschungsgesellschaft MbH), Dr. Dieter Nees
(Joanneum Research Forschungsgesellschaft MbH), Dr. Barbara
Stadlober (Joanneum Research Forschungsgesellschaft MbH), Dr.
Evangelos Gogolides (Institute of Nanoscience and Nanotechnology,
NCSR “Demokritos”)

P-S21-26-T2 A Simple Fabrication Process for the Integration of
Microfluidics on Si based Biosensors» Dr. Myrto-Kyriaki Filippidou (Institute of Nanoscience andNanotechnology, NCSR Demokritos, Aghia Paraskevi 15341, Attiki,
Greece), Mr. Aris Kanaris (Institute of Nanoscience andNanotechnology, NCSR Demokritos, Aghia Paraskevi 15341, Attiki,
Greece), Mr. Evangelos Aslanidis (Department of Applied Sciences,
National Technical University of Athens, Zografou 15780, Greece), Ms.
Annita Rapesi (Biomedical Research Foundation of the Academy ofAthens, Athens 11527, Greece), Mr. Sotirios Ntouskas (Institute of
Nanoscience and Nanotechnology, NCSR Demokritos, Aghia Paraskevi
15341, Attiki, Greece), Dr. Evangelos Skotadis (Department of Applied
Sciences, National Technical University of Athens, Zografou 15780,
Greece), Dr. George Tsekenis (Biomedical Research Foundation of the
Academy of Athens, Athens 11527, Greece), Prof. Dimitris Tsoukalas(National Technical University of Athens), Dr. Angeliki Tserepi (Instituteof Nanoscience and Nanotechnology, NCSR Demokritos, Aghia
Paraskevi 15341, Attiki, Greece), Dr. STAVROS CHATZANDROULIS(Institute of Nanoscience and Nanotechnology, NCSR Demokritos,
Aghia Paraskevi 15341, Attiki, Greece)

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P-S21-27-T2 Investigation on the effect of sharp corners of AZO
gate and Al2O3 insulator in ZnO Thin Film Transistors» Mr. Jiale Zeng (jz2g19@soton.ac.uk), Dr. Ben Rowlinson(bdr1g15@soton.ac.uk), Dr. Martin Ebert (me1r18@soton.ac.uk), Prof.
Karol Kalna (k.kalna@swansea.ac.uk), Dr. Christian Patzig(christian.patzig@imws.fraunhofer.de), Mr. Lutz Berthold(lutz.berthold@imws.fraunhofer.de), Prof. Harold Chong(hmhc@ecs.soton.ac.uk)
P-S21-28-T2 “Flow-Through”, low-temperature gas phase
deposition for conformal coating of ultra-high aspect ratio
polymer micro- and nanochannels» Mr. Manuel Müller (Universität Hamburg), Mr. Jeremy Teuber(Universität Hamburg), Mr. Rukan Nasri (Universität Hamburg), Dr.
Robert Zierold (Universität Hamburg), Dr. Irene Fernandez-Cuesta(Universität Hamburg)
P-S21-29-T2 Omega Active Cantilever for traceability of localized
functional properties of nanostructures» Mr. Hans-Georg Pietscher (Nano analytik GmbH), Mr. Aditya Suryadi
Tan (Nano analytik GmbH), Mr. Fabian Dietrich (Nano analytik GmbH),
Mr. Robert Reichert (Nano analytik GmbH), Ms. Ewelina Gacka(Wroclaw University of Science and Technology), Mr. Bartosz Pruchnik(Wroclaw University of Science and Technology), Mr. Dominik Badura(Wroclaw University of Science and Technology), Prof. Teodor Gotszalk(Wroclaw University of Science and Technology), Dr. Stefanie
Gutschmidt (University of Canterbury), Prof. Thomas Sattel (Ilmenau
University of Technology), Dr. Virpi Korpelainen (National Metrology
Institute VTT MIKES), Dr. Andrew Yacoot (National Physical Laboratory),
Dr. Isaac Stricklin (University of New Mexico), Dr. Tito Busani(University of New Mexico), Ms. Jaqueline Stauffenberg (Ilmenau
University of Technology), Prof. Thomas Fröhlich (Technische
Universität Ilmenau), Prof. Eberhard Manske (Technische Universität
Ilmenau), Prof. Ivo W. Rangelow (Technische Universität Ilmenau)
P-S21-30-T2 Improving Dynamic Tracking Performance of
Nanopositioning Stage for Defect Review System using Iterative
Learning Control» Dr. Kyung-Rok Kim (Korea Institute of Machinery & Materials), Dr.
HYUNCHANG KIM (Korea Institute of Machinery & Materials), Dr.
Dongwoo Kang (Korea Institute of Machinery & Materials), Dr.
Jaeyoung Kim (Korea Institute of Machinery & Materials)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

P-S21-31-T2 Soft contact pressure sensors based on randomly
rough surfaces» Mr. Luigi Portaluri (Istituto Italiano di Tecnologia; Department of
Innovation Engineering, Unisalento), Dr. Luciana Algieri (Istituto
Italiano di Tecnologia), Mr. Marco Bruno (Istituto Italiano di Tecnologia;
Department of Innovation Engineering, Unisalento), Prof. Massimo De
Vittorio (Istituto Italiano di Tecnologia; Department of Innovation
Engineering, Unisalento), Prof. Michele Scaraggi (Istituto Italiano diTecnologia; Department of Innovation Engineering, Unisalento)

P-S21-32-T2 Etch residuals after dry etching AlN with CH4/BCl3/Ar
over photoresist and overlapping metal layer» Mr. Nils Dittmar (Fraunhofer Institute for Electronic Nano Systems),
Dr. Chris Stöckel (Fraunhofer Institute for Electronic Nano Systems),
Mr. Micha Haase (Fraunhofer Institute for Electronic Nano Systems),
Dr. Danny Reuter (Fraunhofer Institute for Electronic Nano Systems)

P-S21-33-T2 Dimensional and mechanical control ofsubmicrometric fibers using two-photon polymerization» Mr. Ianis DROBECQ (LAAS-CNRS), Mrs. Ophélie Thomas-Chemin(LAAS-CNRS), Mr. Pierre-Francois Calmon (LAAS-CNRS), Prof. Laurent
Malaquin (LAAS-CNRS), Dr. Bastien Venzac (LAAS-CNRS)

P-S21-34-T2 Microfabrication and Silicon Integration of Epitaxial
Magnetic Shape Memory Films» Mr. Satyakam Kar (Leibniz Institute for Solid State and Materials
Research Dresden), Mr. Lukas Fink (Institute of Ion Beam Physics andMaterials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR)),
Prof. Kornelius Nielsch (Leibniz Institute for Solid State and Materials
Research Dresden), Dr. Sebastian Fähler (Institute of Ion Beam Physics
and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf(HZDR)), Dr. Heiko Reith (Leibniz Institute for Solid State and Materials
Research Dresden)

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P-S21-35-T2 Dependence of Structural Design on Effective Young’s
Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS
Capacitive Accelerometers» Mr. Shunkai Watanabe (Tokyo Institute of Technology), Dr. Tomoyuki
Kurioka (Tokyo Institute of Technology), Prof. Mark Chang (Tokyo
Institute of Technology), Dr. Chun-Yi Chen (Tokyo Institute ofTechnology), Mr. Akira Onishi (Tokyo Institute of Technology), Dr.
Parthojit Chakraborty (Tokyo Institute of Technology), Prof. Katsuyuki
Machida (Tokyo Institute of Technology), Prof. Hiroyuki Ito (Tokyo
Institute of Technology), Prof. Yoshihiro Miyake (Tokyo Institute ofTechnology), Prof. Masato Sone (Tokyo Institute of Technology)
P-S21-36-T2 Closed loop error compensation of RADAR PCBs
fabrication process using inkjet printing and interoperability
methods» Mr. Abdalla Shahin (PROFACTOR GmbH), Mr. Helmut Zörrer
(PROFACTOR GmbH), Mr. Peter Bauer (PROFACTOR GmbH), Mr. Gerald
Stubauer (PROFACTOR GmbH), Dr. Benedikt Pressl (BESI AustriaGmbH), Dr. Rolf Schneider (Notion Systems GmbH), Mr. Ferhat Aslan(Notion Systems GmbH), Mr. Jochen Seeser (Notion Systems GmbH)
P-S21-37-T2 Electronic integration of microchips via inkjet printing» Mr. Gerald Stubauer (PROFACTOR GmbH), Mr. Peter Bauer(PROFACTOR GmbH), Dr. Pavel Kulha (PROFACTOR GmbH), Dr. Michael
Haslinger (PROFACTOR GmbH), Mr. David Hahn (Notion SystemsGmbH), Mr. Jochen Seeser (Notion Systems GmbH), Mr. Christian
Debatin (Notion Systems GmbH), Dr. Alexander Fischer (Robert BoschGmbH), Dr. Istvan Denes (Robert Bosch GmbH), Mr. Christian Geissler(INFINEON Technologies AG), Dr. Benedikt Pressl (BESI Austria GmbH),
Dr. Birgit Brandstätter (BESI Austria GmbH), Dr. Dieter Holzinger(TIGER Coatings GmbH & Co KG), Dr. Doron Gurovich (PV Nano Cell
Ltd), Mr. Semyon Melamed (PV Nano Cell Ltd)
P-S21-38-T2 From Micro to Nano: Integrating cavities in monolithic
nanopore Silicon membrane by improved Nanofabrication
methods for various Applications» Mr. Sanjeev Vishal Kota (Technical University of Denmark), Prof.
Rafael Taboryski (Technical University of Denmark), Prof. Henri Jansen(Technical University of Denmark), Prof. Jörg Hübner (Technical
University of Denmark), Dr. Jesper Yue pan (Technical University ofDenmark), Dr. Anil Thilsted (Spectro Inlets Aps)

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P-S21-39-T2 A ReRAM Optronic Physical Reservoir for Fashion
Styles Recognition» Mr. Jiayi Li (Nanyang Technological University), Dr. Haider Abbas(Nanyang Technological University), Dr. Asif Ali (Nanyang Technological
University), Dr. Xin Ju (Agency for Science, Technology, and Research(A*STAR)), Prof. Diing Shenp Ang (Nanyang Technological University)

P-S21-40-T2 Optimisation of a physical reservoir computer’s
parameters using a genetic algorithm non-linear search» Dr. Claude Meffan (Kyoto Univeristy), Mr. Taiki Ijima (Kyoto
University), Prof. Amit Banerjee (Kyoto University), Dr. Jun Hirotani(Kyoto University), Prof. Toshiyuki Tsuchiya (Kyoto University)

P-S21-41-T2 Design, fabrication of a label-free sensor using ataquito-like MoS2 morphology as channel.
» Ms. Wendy Martinez (Universidad de Guadalajara), Dr. Orfil
González-Reynoso (Universidad de Guadalajara), Dr. Gregorio
Guadalupe Carbajal-Arizaga (Universidad de Guadalajara), Dr. Barbara
Cortese (Univeristà di Roma "La Sapienza"), Dr. Mario Alberto GarciaRamirez (Universidad de Guadalajara)

P-S21-42-T2 Photo-switchable reconfigurable nanostructured
surfaces for hemiwicking» Ms. Rucha A. Deshpande (Technical University of Denmark), Mr.
Jesper Navne (DTU Nanolab), Mr. Mathias Adelmark (Technical
University of Denmark), Prof. Rafael Taboryski (Technical University ofDenmark)

P-S21-43-T2 Improved gate oxide quality by making enhanced
structure in sub-14nm DRAM
» Mrs. hyojin park (Sungkyunkwan University and Samsung
Electronics), Prof. Byoungdeog Choi (Department of Semiconductor
and Display Engineering, Sungkyunkwan University)

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P-S21-44-T2 Thermo-mechanical behaviour of different sealingmaterials used as encapsulants in Power Modules» Mrs. Chiara Spano (Politecnico di Torino), Mr. Giulio Galfré(Politecnico di Torino), Mr. Emilio Mattiuzzo (VISHAY Semiconductor
Italiana S.P.A.), Mr. Lorenzo D'Ancona (VISHAY Semiconductor Italiana
S.P.A.), Mrs. Valentina Bertana (Politecnico di Torino), Mr. Luciano
Scaltrito (Politecnico di Torino), Mr. Sergio Ferrero (Politecnico di
Torino)P-S21-45-T2 193 nm ArF lithography for high topology InP wafer
processing» Mr. Aleksandr Zozulia (Eindhoven University of Technology), Dr.
Jeroen Bolk (Eindhoven University of Technology), Dr. Samir Rihani(Huawei Technologies Research and Development (UK) Limited), Dr.
Graham Berry (Huawei Technologies Research and Development (UK)
Limited), Dr. Michael Robertson (Huawei Technologies Research andDevelopment (UK) Limited), Dr. John Rawsthorne (Huawei Technologies
Research and Development (UK) Limited), Prof. Kevin Williams(Eindhoven University of Technology), Dr. Yuqing Jiao (Eindhoven
University of Technology)

P-S21-46-T2 Design and fabrication of an opto-mechanicalantenna in the NIR range» Mr. Daniyal Khoshmaram (Universitat Autònoma de Barcelona(UAB)), Dr. Xavier Borrisé (Institut Català de Nanociència iNanotecnologia (ICN2)), Prof. Joan J. Garcia-Garcia (UniversitatAutònoma de Barcelona (UAB)), Mr. Raul Ruiz (Universitat Autònoma
de Barcelona (UAB)), Prof. Xavier Cartoixà (Universitat Autònoma deBarcelona (UAB)), Prof. Gabriel Abadal (Universitat Autònoma deBarcelona (UAB))

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Continued from Wednesday, 27 September

P-S21-47-T2 A Hybrid Nanowire-MEMS Force Sensor» Dr. Mehrdad Karimzadehkhouei (Department of MechanicalEngineering, Koç University, Istanbul, 34450, Turkey), Mr. MasoudJedari Ghourichaei (Department of Mechanical Engineering, Koç
University, Istanbul, 34450, Turkey), Mr. Levent Demirkazik(Department of Mechanical Engineering, Koç University, Istanbul,
34450, Turkey), Mr. Bartosz Pruchnik (Department of Nanometrology,
Wrocław University of Science and Technology, Wroclaw, 50-370,
Poland), Mr. Krzysztof Kwoka (Department of Nanometrology, Wrocław
University of Science and Technology, Wroclaw, 50-370, Poland), Mr.
Dominik Badura (Department of Nanometrology, Wrocław Universityof Science and Technology, Wroclaw, 50-370, Poland), Dr. Tomasz
Piasecki (Department of Nanometrology, Wrocław University of Scienceand Technology, Wroclaw, 50-370, Poland), Dr. Onur Aydin(Department of Mechanical Engineering, Koç University, Istanbul,
34450, Turkey), Dr. Bekir Aksoy (Department of MechanicalEngineering, Koç University, Istanbul, 34450, Turkey), Mr. Cemal
Aydogan (Ins. of Precision Measurement and Sensor Technology,
Ilmenau Uni. of Tech., Ilmenau, 98693, Germany), Dr. Gokhan Nadar(Department of Mechanical Engineering, Koç University, Istanbul,
34450, Turkey), Prof. Ivo W. Rangelow (Technische Universität Ilmenau),
Prof. Arda Yalcinkaya (Department of Electrical and Electronics
Engineering, Boğaziçi University, Istanbul, 34342, Turkey), Prof. Halil
Bayraktar (Dept. of Molecular Biology and Genetics, Istanbul Technical
University, Maslak, Istanbul, 34467, Turkey), Prof. Teodor Gotszalk(Department of Nanometrology, Wrocław University of Science andTechnology, Wroclaw, 50-370, Poland), Prof. B. Erdem Alaca(Department of Mechanical Engineering, Koç University, Istanbul,
34450, Turkey)

P-S21-48-T2 Nano-Imprinting and Air Injection System: Enabling
Nano Patterns on Curved Stamp Surfaces for Biotechnology
Applications» Dr. SeokYoung Ji (Korea Institute of Machinery & Materials), Dr.
Hyungjun Lim (Korea Institute of Machinery & Materials), Dr. Hak-Jong
Choi (Korea Institute of Machinery & Materials), Dr. Junhyoung Ahn(Korea Institute of Machinery & Materials)

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P-S21-49-T2 Improved electrical performance of ZnO thin-film
transistors using 2DEG with insertion of Al2O3 layer deposited byatomic layer deposition» Mr. Dongki Baek (Department of Electrical and Electronics
Engineering, Pusan National University), Mr. Se-Hyeong Lee(Department of Electrical and Electronics Engineering, Pusan National
University), Ms. So-Young Bak (Department of Electrical and Electronics
Engineering, Pusan National University), Mr. Chan-Yeong Park
(Department of Electrical and Electronics Engineering, Pusan National
University), Mr. Hyeongrok Jang (Department of Electrical andElectronics Engineering, Pusan National University), Mr. Jinwoo Lee(Department of Electrical and Electronics Engineering, Pusan National
University), Prof. Moonsuk Yi (Department of Electrical and Electronics
Engineering, Pusan National University)

P-S21-50-T2 Characterization of Inkjet-printed Mask Pattern for
Area-selective Atomic Layer Deposition Process» Mr. Jun Ho Yu (Korea Institute of Industrial Technology), Dr. Sang-Ho
Lee (Korea Institute of Industrial Technology)

P-S21-51-T2 Technology performance of silica nanoparticle
deposition techniques over carbon-based substrates» Mrs. Ana Coloma Velez (Polytechnic University of Catalunya), Mrs.
Michelle Cedeño (PhD STUDENT), Mr. Xingqi Chan (Catalonia Institutefor Energy Research), Prof. Andreu Cabot (Catalonia Institute forEnergy Research), Prof. Manuel Domínguez-Pumar (Polytechnic
University of Catalunya), Prof. Andriy Yaroshchuck (Polytechnic
University of Catalunya), Prof. Alexandra Bermejo (Polytechnic
University of Catalunya)

P-S21-52-T2 Circuit-level Macro Modeling for Behaviors of Hole
Accumulated Current during ERS Operation in 3D Charge Trap
Flash Memories» Dr. Sunghwan Cho (Sungkyunkwan University and Samsung
Electronics), Prof. Byoungdeog Choi (Department of Electrical andComputer Engineering, Sungkyunkwan University)

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P-S21-53-T2 Damascene Versus Etch-Back Chemical Mechanical
Planarization for Resistive Memory Crossbars Back-End-Of-LineIntegration» Mr. Raphael Dawant (Université de Sherbrooke), Mr. Mathieu
Gaudreau (Université de Sherbrooke), Mr. Marc-Antoine Roy(Université de Sherbrooke), Mr. Javier Arias Zapata (Université deSherbrooke), Prof. Dominique Drouin (Université de Sherbrooke), Prof.
Serge Ecoffey (Université de Sherbrooke)

P-S21-54-T2 Resolution enhancement of Scanning Electron/Atomic
Force Microscope images using a computational method based on
Fourier spectra stitching» Ms. ELENI STAI (NCSR Demokritos), Dr. Vassilios Constantoudis (NCSR
Demokritos), Dr. Andreas Kaidatzis (NCSR Demokritos), Dr. Evangelos
Gogolides (NCSR Demokritos)

P-S21-55-T2 Calculation of magnetic force between currentcarrying circular and arbitrary shaped filament: segmentation
method» Dr. Kirill Poletkin (Hefei University of Technology), Mr. Pavel Udalov(Peter the Great St. Polytechnic University), Dr. Alexei Lukin (Peter theGreat St. Polytechnic University)

P-S21-56-T2 Fabrication of a thin-film adaptive electrostatic phaseplate» Mr. Mathias Adelmark (Technical University of Denmark), Dr. AdaIoana Bunea (Technical University of Denmark), Dr. Marco Beleggia(Technical University of Denmark), Dr. Andrei Lavrinenko (Technical
University of Denmark), Prof. Rafael Taboryski (Technical University ofDenmark)

P-S21-57-T2 Advanced micro- and nanoprobing combined withother analytical tools for characterizing semiconductor devices,
MEMS and nanostructures» Dr. Anya Grushina (Imina Technologies)

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P-S21-58-T2 Interfacing free-space beams and suspended silicon
photonic waveguides with a low back-reflection fully etchedgrating coupler» Mr. Søren Engelberth Hansen (Technical University of Denmark), Dr.
Guillermo Arregui (Technical University of Denmark), Mr. Ali Nawaz
Babar (Technical University of Denmark), Mr. Marcus Albrechtsen(Technical University of Denmark), Dr. Babak Vosoughi Lahijani(Technical University of Denmark), Dr. Rasmus Ellebæk Christiansen(Technical University of Denmark), Dr. Søren Stobbe (Technical
University of Denmark)P-S21-59-T2 Strain Rate Dependency of Mechanical Property in
Micro-Compression of Electrodeposited Gold toward Design of
MEMS Components» Mr. Shota Kanno (Tokyo Institute of Technology), Mr. taro omura(Tokyo Institute of Technology), Dr. Tomoyuki Kurioka (Tokyo Instituteof Technology), Dr. Chun-Yi Chen (Tokyo Institute of Technology), Dr.
Parthojit Chakraborty (Tokyo Institute of Technology), Prof. Katsuyuki
Machida (Tokyo Institute of Technology), Prof. Hiroyuki Ito (Tokyo
Institute of Technology), Prof. Yoshihiro Miyake (Tokyo Institute ofTechnology), Prof. Masato Sone (Tokyo Institute of Technology), Prof.
Mark Chang (Tokyo Institute of Technology)

P-S21-60-T2 Stable superhydrophilic and superhydrophobic
surfaces incorporated inside ultra-thin vapor chambers for heattransfer applications» Ms. Efrosyni Tsounai (Department of food science and nutrition,
School of the Environment, University of the Aegean, Ierou Lochou &Makrygianni St, 81400, Myrina, Lemnos, Greece), Ms. Vasiliki Tselepi(Department of food science and nutrition, School of the Environment,
University of the Aegean, Ierou Lochou & Makrygianni St, 81400,
Myrina, Lemnos, Greece), Dr. Evangelos Gogolides (NCSR Demokritos),
Dr. Kosmas Ellinas (Department of food science and nutrition, Schoolof the Environment, University of the Aegean, Ierou Lochou &Makrygianni St, 81400, Myrina, Lemnos, Greece)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

P-S21-61-T2 Comprehensive Evaluation of Geometric Effects on
Long-Term Structure Stability of Ti/Au Multi-Layered MicroCantilevers toward Gold-MEMS Capacitive Accelerometer» Mr. Ryosuke Miyai (Tokyo Institute of Technology), Dr. Tomoyuki
Kurioka (Tokyo Institute of Technology), Dr. Chun-Yi Chen (Tokyo
Institute of Technology), Prof. Mark Chang (Tokyo Institute ofTechnology), Mr. Akira Onishi (Tokyo Institute of Technology), Dr.
Parthojit Chakraborty (Tokyo Institute of Technology), Prof. Katsuyuki
Machida (Tokyo Institute of Technology), Prof. Hiroyuki Ito (Tokyo
Institute of Technology), Prof. Yoshihiro Miyake (Tokyo Institute ofTechnology), Prof. Masato Sone (Tokyo Institute of Technology)

P-S21-62-T2 Enhanced Fe-FET Performance with HZO and MoS2Based Dielectric Structures for Non-volatile Memory» Mr. Jeehwan Lee (Department of Semiconductor and Display
Engineering, Sungkyunkwan University), Mr. Do Kyung Yun(Department of Electrical and Computer Engineering, Sungkyunkwan
University), Prof. Woo Jong Yu (Department of Electrical and Computer
Engineering, Sungkyunkwan University)

P-S21-63-T2 Thermal characterization of IMS substrates withdifferent design parameters for Power Modules Devices» Mrs. Chiara Spano (Politecnico di Torino), Mr. Giulio Galfré(Politecnico di Torino), Mr. Emilio Mattiuzzo (VISHAY Semiconductor
Italiana S.P.A.), Mr. Lorenzo D'Ancona (VISHAY Semiconductor Italiana
S.P.A.), Mr. Luciano Scaltrito (Politecnico di Torino), Mr. Sergio Ferrero(Politecnico di Torino), Mrs. Valentina Bertana (Politecnico di Torino)

P-S21-64-T2 PZT sensor compatible with the 2D piezo-scanners
dedicated to 1550 nm long-range LIDAR» Mr. Laurent Mollard (University Grenoble Alpes, CEA, Leti)

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P-S21-65-T2 High-throughput AFM inspection and metrology with
“Quattro”- active cantilever» Mr. Aditya Suryadi Tan (Nano analytik GmbH), Mr. Fabian Dietrich(Nano analytik GmbH), Mr. Hans-Georg Pietscher (Nano analytikGmbH), Prof. Teodor Gotszalk (Wroclaw University of Science andTechnology), Mr. Chuan Du (Parcan NanoTech Co., Ltd.), Dr. Xiang qian
Zhou (Parcan NanoTech Co., Ltd.), Mr. Fangzhou Xia (Massachusetts
Institute of Technology), Mr. Kamal Youcef-Toumi (Massachusetts
Institute of Technology), Dr. Andrew Yacoot (National PhysicalLaboratory), Mr. Ho-Se Lee (SEUM tronics), Prof. Eberhard Manske(Technische Universität Ilmenau), Dr. Thomas Kissinger (Technische
Universität Ilmenau), Prof. Thomas Fröhlich (Technische Universität
Ilmenau), Prof. Ivo W. Rangelow (Technische Universität Ilmenau)
P-S21-66-T2 Direct ink writing of high-detail resolution cellulose
structures» Mrs. Farnaz Rezaei (Uppsala University), Prof. Jonas Lindh (Uppsala
University), Dr. Daniel Carlsson (Cytiva), Dr. Jimmy Hedin Dahlström(Cytiva), Prof. Stefan Johansson (Uppsala University)
P-S21-67-T2 A Study about Bump Non-Contact Failure of Flip Chipat sub-20nm DRAM
» Mr. Dongsik Park (Sungkyunkwan University and Samsung
Electronics), Mr. Kyo Seon Choi (Samsung Electronics), Prof.
Byoungdeog Choi (Department of Semiconductor and Display
Engineering, Sungkyunkwan University)
P-S21-68-T2 A study on the silicon dislocation in DRAM STI
structure» Mr. Bonhwi Gu (Sungkyunkwan University and Samsung Electronics),
Mr. Injae Bae (Samsung Electronics), Prof. Byoungdeog Choi
(Sungkyunkwan University)
P-S21-69-T2 Spintronic Terahertz Emitter Integrated Microdevices
for Terahertz Polarization Modulation» Dr. Zhongyang Bai (Beihang university), Dr. Tong Sun (Beihang
university), Dr. Zhaoying Li (Beihang university), Dr. Dong Li (Beihang
university), Prof. Tianxiao Nie (Beihang university), Prof. Youguang
Zhang (Beihang university), Prof. Lianggong Wen (Beihang university)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

P-S21-76-T2 Synchronous vibration of 1×2 torsional micromirror
array» Mr. Mikiya Oki (Kyoto University), Prof. Amit Banerjee (Kyoto
University), Prof. Jun Hirotani (Kyoto University), Prof. Toshiyuki
Tsuchiya (Kyoto University)

P-S21-70-T2 Bioinspired Microfluidic Flow Sensors with Magnetic
Artificial Cilia for Organ-on-Chip Applications» Mrs. Bhavana Venkataramanachar (Eindhoven University ofTechnology), Mr. Max Verhoef (Eindhoven University of Technology),
Dr. Tanveer ul Islam (Eindhoven University of Technology), Prof. Jaap
den Toonder (Eindhoven University of Technology)

P-S21-77-T2 Comparison of Pt- and W-based FEBID-grown nanocones» Dr. Cristiano Glessi (tu delft), Mr. Mike Simons (tu delft), Ms. Aya
Mahgoub (tu delft), Mr. Toon van Marken (tu delft), Dr. Cornelis Hagen(Delft University of technology)

P-S21-71-T2 Ultrathin Si nanostring resonators with widely
tunable dynamic behaviour» Prof. Amit Banerjee (Kyoto University), Mr. Wei Yu (Kyoto University),Prof. Jun Hirotani (Kyoto University), Prof. Toshiyuki Tsuchiya (Kyoto
University)

P-S21-78-T2 Transport of Droplets via Magnetically-Responsive
Microwall Arrays with Path-Guide» Ms. Soyeon Kwon (INHA University), Prof. HYUN-TAEK LEE (INHA
University), Mr. Jihun Kim (INHA University), Ms. Yoobin Do (INHA
University)

P-S21-72-T2 Fabrication of the atomically-stepped ultrasmooth
conducting polymer thin film on the flexible transparent
polyimide sheet» Prof. Mamoru Yoshimoto (Tokyo Institute of Technology)

P-S21-79-T2 Direct Printing Process of High-Refractive-Index
Polymer for Practical Fabrication of High-Performance
Metasurfaces» Mr. Dong Kyo Oh (pohang university of science and technology), Mr.
Joohoon Kim (pohang university of science and technology), Ms.
Hyunjung Kang (pohang university of science and technology), Prof.
Junsuk Rho (pohang university of science and technology)

P-S21-73-T2 PFIB Reworking: A Cost-Effective Solution for
Repairing ASICs» Dr. Evgeny Demenev (FBK, Fondazione Bruno Kessler), Dr. David
Novel (FBK, Fondazione Bruno Kessler), Dr. Lorenza Ferrario (FBK,
Fondazione Bruno Kessler)
P-S21-74-T2 Adjustable arrangement of Polystyrene Micro Spheresby Using 3D Micro Printing and Colloidal Lithography» Mr. Li-En Kang (Department of Mechanical Engineering, Chung Yuan
Christian University), Mr. Yu-Sheng Xhieh (Department of MechanicalEngineering, Chung Yuan Christian University), Prof. Yeeu-Chang Lee(Department of Mechanical Engineering, Chung Yuan Christian
University)
P-S21-75-T2 Calculation of magnetic stiffness over torque between
two current-carrying circular filaments arbitrary oriented in thespace» Dr. Kirill Poletkin (Hefei University of Technology)

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P-S21-80-T2 Design and Simulation of Miniatured Piezoresistive
Diaphragm Pressure Sensor for High Vacuum Applications» Dr. Jian LU (National Institute of Advanced Industrial Science andTechnology (AIST)), Dr. Lan ZHANG (National Institute of Advanced
Industrial Science and Technology (AIST)), Dr. Yuichi Kurashima(National Institute of Advanced Industrial Science and Technology(AIST)), Dr. Hideki TAKAGI (National Institute of Advanced Industrial
Science and Technology (AIST))

4:15pmPoster Session2.2: Track 4
MOA3

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Continued from Wednesday, 27 September

P-S22-01-T4 Design and development of a multi-sensor
temperature gradient platform for accelerated characterisationof innovative materials for chemoresistive sensor applications» Dr. Andrea Gaiardo (FBK, Fondazione Bruno Kessler), Dr. Anze Sitar(FBK, Fondazione Bruno Kessler), Dr. Matteo Valt (FBK, Fondazione
Bruno Kessler), Dr. Elia Scattolo (FBK, Fondazione Bruno Kessler), Dr.
Alvise Bagolini (FBK, Fondazione Bruno Kessler), Dr. Pietro Tosato (FBK,
Fondazione Bruno Kessler)
P-S22-02-T4 New optical detection method of home-madeexplosives based on lab on paper chemical sensors» Dr. Viktoriia Lastivka (Warsaw University of Technology), Mr. Piotr
Kasprzak (Military Institute of Armament Technology), Mrs. Izabela
Mazur (Military Institute of Armament Technology), Mr. Piotr Baran(Military Institute of Armament Technology), Mr. Wawrzyniec Pniewski(Military Institute of Armament Technology), Prof. Ilona GrabowskaJadach (Warsaw University of Technology), Prof. Michal Chudy (Warsaw
University of Technology), Dr. Katarzyna Tokarska (CEZAMAT), Dr. Kamil
Zukowski (CEZAMAT), Prof. Artur Dybko (Warsaw University ofTechnology)
P-S22-03-T4 Cycling stability of elastomer composites forstretchable sensors» Ms. LINGYU liu (INM – Leibniz Institute for New Materials,
Saarbrücken, 66123, Germany), Dr. Thomas Kister (INM – Leibniz
Institute for New Materials, Saarbrücken, 66123 Germany), Prof. lolagonzalez-garcia (INM-Leibniz Institute for New Materials, Campus D2 2,
Saarbrücken, 66123, GermanyDepartment of Material Science andEngineering, Saarland University, Saarbrücken, 66123, Germany), Prof.
Tobias Kraus (INM-Leibniz Institute for New Materials, Campus D2 2,
Saarbrücken, 66123, Germany; Colloid and Interface Chemistry,
Saarland University, Saarbrücken, 66123, Germany)
P-S22-04-T4 Electroplating-based engineering of plasmonic
nanorod metamaterials» Dr. Mihir Sahoo (Indian Institute of Technology Bombay), Mr. Abhay
Anand VS (Indian Institute of Technology Bombay), Prof. Anshuman
Kumar Srivastava (Indian Institute of Technology Bombay)

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P-S22-05-T4 Solid-state ionic synaptic transistors forneuromorphic computing applications» Dr. Nerea Alayo (Catalan Institute of Energy Research)

P-S22-06-T4 Color imaging-based Optomechanical system for gas
sensing» Dr. Ferran Pujol-Vila (Instituto de Microelectrónica de Barcelona (IMBCNM, CSIC)), Dr. Mar Alvarez (Institute of Microelectronics of Barcelona(IMB-CNM-CSIC))

P-S22-07-T4 Benchmarking of ion-based nanopatterningtechniques on stainless steel injection molding inlays forautomotive applications» Mr. Florian Schlachter (AMO GmbH), Dr. Jens Bolten (AMO GmbH),
Mrs. Olatz Adarraga (TECNALIA Basque Research and Technology
Alliance (BRTA)), Dr. Yordan Georgiev (Institute of Ion Beam Physics
and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf(HZDR)), Mr. Tommy Schönherr (Institute of Ion Beam Physics andMaterials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR)),
Ms. Ana Zuzuarregui (CICnanoGUNE-External Services Department,
Basque Research and Technology Alliance (BRTA)), Mr. Evgenii Modin(CICnanoGUNE-External Services Department, Basque Research andTechnology Alliance (BRTA)), Prof. Max Lemme (AMO GmbH)P-S22-08-T4 Optimization of the nanofabrication process ofsuperhydrophobic fluidic concentrator coupled with metallic
plasmonic nano-antennas for SERS analysis in the subfemtomolar range.
» Mr. Sofien Ramos (LAAS-CNRS), Mr. Victor Fabre (LAAS-CNRS), Mr.
Matthieu Arribat (LAAS-CNRS), Ms. Aurélie Lecestre (LAAS-CNRS), Mr.
Adrian Laborde (LAAS-CNRS), Mr. Franck Carcenac (LAAS-CNRS), Dr.
Philippe Louarn (IRAP), Prof. Christophe Vieu (Toulouse University), Ms.
Emmanuelle Trevisiol (TBI)

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P-S22-09-T4 Flexibly printed bioactive gold-polythiophene hybrid
nanoparticles for electrochemical biosensing» Ms. Muniba Shahzad Bhatti (INM-Leibniz Institute for New Materials,
Campus D2 2, Saarbrücken, 66123, Germany; Colloid and Interface
Chemistry, Saarland University, Saarbrücken, 66123, Germany), Ms.
Indra Backes (INM-Leibniz Institute for New Materials, Campus D2 2,
Saarbrücken, 66123, Germany;), Mr. Michael Alexander Horst Klos
(INM-Leibniz Institute for New Materials, Campus D2 2, Saarbrücken,
66123, Germany; Colloid and Interface Chemistry, Saarland University,
Saarbrücken, 66123, Germany), Mr. Yannic Brasse (INM-Leibniz
Institute for New Materials, Campus D2 2, Saarbrücken, 66123,
Germany), Prof. lola gonzalez-garcia (INM-Leibniz Institute for New
Materials, Campus D2 2, Saarbrücken, 66123, GermanyDepartment ofMaterial Science and Engineering, Saarland University, Saarbrücken,
66123, Germany), Prof. Tobias Kraus (INM-Leibniz Institute for New
Materials, Campus D2 2, Saarbrücken, 66123, Germany; Colloid andInterface Chemistry, Saarland University, Saarbrücken, 66123,
Germany)

P-S22-10-T4 Development of Atomic Gold Decorated Polyaniline
Derivative Electrodes toward Electrochemical Alcohol Sensing» Dr. Tomoyuki Kurioka (Tokyo Institute of Technology), Mr. Keisuke
Okamoto (Tokyo Institute of Technology), Mr. Shohei Yoshida (Tokyo
Institute of Technology), Mr. Kengo Watanabe (Tokyo Institute ofTechnology), Dr. Chun-Yi Chen (Tokyo Institute of Technology), Dr.
Parthojit Chakraborty (Tokyo Institute of Technology), Prof. Takamichi
Nakamoto (Tokyo Institute of Technology), Prof. Masato Sone (Tokyo
Institute of Technology), Prof. Mark Chang (Tokyo Institute ofTechnology)

P-S22-11-T4 Light-controlled multimaterial microrobots for
microscale pH sensing» Mr. Daniel Maher (Technical University of Denmark), Mr. Andreu
Murillo Vilella (Technical University of Denmark), Mr. Marcin Piekarczyk(Technical University of Denmark), Dr. Colm Delaney (Trinity College
Dublin), Dr. Larisa Florea (Trinity College Dublin), Prof. Rafael Taboryski(Technical University of Denmark), Dr. Ada-Ioana Bunea (Technical
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P-S22-12-T4 High-Response Ethanol Gas Sensor Based on
LaFeO3/In2O3 Composite» Prof. Zhenyu Yuan (Northeastern University), Mr. Ninghao Chu(Northeastern University)
P-S22-13-T4 Study on Variation of Main luminescence centers in Eu
Doped AlN Thin Films with Annealing Temperature Increasing» Mr. Yingda Qian (Department of Physics, Tokyo University of Science),
Prof. Xinwei Zhao (Department of Physics, Tokyo University of Science)
P-S22-14-T4 Spin valve effect in Fe3GeTe2/ZnO/Ni heterostructurewith low resistance-area product» Mr. Whan Kyun Kim (Department of Semiconductor and Display
Engineering, Sungkyunkwan University), Mr. Namgun Kim (Department
of Semiconductor and Display Engineering, Sungkyunkwan University),
Mr. Yong Ha Shin (Department of Electrical and Computer Engineering,
Sungkyunkwan University), Prof. Woo Jong Yu (Department of Electricaland Computer Engineering, Sungkyunkwan University)
P-S22-15-T4 4D printing of soft responsive polymer
microstructures» Mr. Marcin Piekarczyk (Technical University of Denmark), Mr. Daniel
Maher (Technical University of Denmark), Ms. Yekaterina Tskhe (Trinity
College Dublin), Dr. Larisa Florea (Trinity College Dublin), Dr. Colm
Delaney (Trinity College Dublin), Dr. Ada-Ioana Bunea (Technical
University of Denmark)P-S22-16-T4 A novel Hall configuration with simplyfied design» Prof. Siya Lozanova (Institute of Robotics at Bulgarian Academy of
Sciences), Dr. Avgust Ivanov (Institute of Robotics at Bulgarian
Academy of Sciences), Mr. Martin Ralchev (Institute of Robotics at
Bulgarian Academy of Sciences), Prof. Chavdar Roumenin (Institute of
Robotics at Bulgarian Academy of Sciences)
P-S22-17-T4 A New sensor phenomenon in disordered systems
under uniaxial pressure» Prof. Siya Lozanova (Institute of Robotics at Bulgarian Academy of
Sciences), Mr. Martin Ralchev (Institute of Robotics at Bulgarian
Academy of Sciences), Dr. Avgust Ivanov (Institute of Robotics at
Bulgarian Academy of Sciences), Prof. Chavdar Roumenin (Institute of
Robotics at Bulgarian Academy of Sciences)

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49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Wednesday, 27 September

P-S22-18-T4 Wafer-scale Fabrication of Infrared Metalenses using
DUV lithography» Dr. Kai Sun (University of Southampton), Dr. Xingzhao Yan (Universityof Southampton), Mr. Chuang Sun (University of Southampton), Dr.
Jun-yu Ou (University of Southampton), Prof. Otto Muskens (Universityof Southampton)

P-S22-19-T4 Acrylamide molecule detection by Surface-Enhanced
Infrared Spectroscopy using resonant nanoantennas» Dr. Santos Merino (Tekniker), Dr. Jorge Ramiro (Tekniker), Dr. Alberto
Villar (Tekniker), Dr. Ruth Diez (Tekniker), Dr. Iban Amenabar (CIC
nanoGUNE), Dr. Ralph Gay (CIC nanogune), Dr. Mario Zapata (Materials
Physics Center), Prof. Javier Aizpurua (Materials Physics Center)

P-S22-20-T4 Lowering dissipation in Electro-Optomechanicalresonators for quantum transducing RF to optical signals» Dr. Enrico Serra (Istituto Nazionale di Fisica Nucleare, TIFPA, 38123
Povo (TN), Italy), Dr. Michele Bonaldi (Institute of Materials forElectronics and Magnetism, Nanoscience-Trento-FBK Division, 38123
Povo, Trento), Dr. Antonio Borrielli (Institute of Materials for Electronics
and Magnetism, Nanoscience-Trento-FBK Division, 38123 Povo,
Trento), Prof. Giovanni Di Giuseppe (Physics Division, School of Scienceand Technology, University of Camerino, I-62032 Camerino (MC), Italy),Dr. Nicola Malossi (Physics Division, School of Science and Technology,
University of Camerino, I-62032 Camerino (MC), Italy), Dr. Bruno
Morana (Dept. of Microelectronics and Computer Engineering/ECTM/EKL, Delft University of Technology, Feldmanweg 17, 2628 CT
Delft, The Netherlands), Dr. Riccardo Natali (Physics Division, School of
Science and Technology, University of Camerino, I-62032 Camerino(MC), Italy), Dr. Paolo Piergentili (Physics Division, School of Scienceand Technology, University of Camerino, I-62032 Camerino (MC), Italy),Prof. Lina Sarro (Dept. of Microelectronics and Computer Engineering/ECTM/EKL, Delft University of Technology, Feldmanweg 17, 2628 CT
Delft, The Netherlands), Prof. David Vitali (Physics Division, School of
Science and Technology, University of Camerino, I-62032 Camerino(MC), Italy)

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P-S22-21-T4 Atomic PdxAuy Clusters Decorated Polyaniline forElectrochemical Sensing of 1-Propanol» Mr. Shohei Yoshida (Tokyo Institute of Technology), Mr. Keisuke
Okamoto (Tokyo Institute of Technology), Dr. Tomoyuki Kurioka (Tokyo
Institute of Technology), Dr. Chun-Yi Chen (Tokyo Institute ofTechnology), Dr. Parthojit Chakraborty (Tokyo Institute of Technology),
Prof. Takamichi Nakamoto (Tokyo Institute of Technology), Prof.
Masato Sone (Tokyo Institute of Technology), Prof. Mark Chang (Tokyo
Institute of Technology)

P-S22-22-T4 Fabrication and Characterization of Plasmon-Active
Infra-Red Enhanced Micromembranes for Gas Diffusion Studies» Ms. Ketki Srivastava (University of Twente), Dr. Jasper Lozeman(University of Twente), Prof. Albert van den Berg (University of Twente),
Dr. Ward van der Stam (Utrecht University), Prof. Mathieu Odijk(University of Twente)

P-S22-23-T4 sensor technology development embedding
nanoparticles» Mrs. Michelle Cedeño (PhD STUDENT), Mrs. Ana Coloma Velez (PhD
STUDENT), Dr. Ramon Bragos (Polytechnic University of Catalunya),Prof. Manuel Domínguez-Pumar (Polytechnic University of Catalunya),Prof. Alexandra Bermejo (Polytechnic University of Catalunya)

P-S22-24-T4 Advances in Micro- and Nanofluidic Devices for
Vacuum Compatible UV Light Experiments» Mr. Manuel Müller (Universität Hamburg), Dr. Irene FernandezCuesta (Universität Hamburg), Mr. Herbert Atrian Garcia (Universität
Hamburg), Mr. Jeremy Teuber (PhD STUDENT), Mr. Rukan Nasri(Universität Hamburg)

P-S22-25-T4 Enhancing Exciton Emission in Monolayer MoS2 using
Electroplated Plasmonic Gold Nanodiscs» Mr. Abhay Anand (Indian Institute of Technology Bombay), Dr. Mihir
Sahoo (IIT Bombay), Prof. Anshuman Kumar Srivastava (Indian Instituteof Technology Bombay)

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Continued from Wednesday, 27 September

9:25am

P-S22-26-T4 Determination of conventional and inverse
magnetocaloric effect in iron oxide thin films» Mr. Dharohar Sahadot (Mahindra Ecole Centrale - School ofEngineering, Mahindra University), Mr. Prakhar Gupta (Mahindra Ecole
Centrale - School of Engineering, Mahindra University), Dr. Murtaza
Bohra (Mahindra Ecole Centrale - School of Engineering, Mahindra
University)

10:05am

Coffee Break
Atrium

10:35amKeynote Alexander Liddle
Plenary Hall (MOA12/08/07)

P-S22-27-T4 Experimental Optical Cladding for Integrated
Photonics with High-Contrast Polymer Waveguides» Mr. Omkar Bhalerao (AMO GmbH, Advanced Microelectronic Center
Aachen)10:35am

6:30pmTransfer by Bus

7pm

Conference Dinner
Event Location

Moore’s Law enabling technologies for 2030+ manufacturing

8:15amReception/Registration
Atrium

8:40amYoung Investigator Award
Plenary Hall (MOA12/08/07)

Plenary Talk Award Winner
Plenary Hall (MOA12/08/07)

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Nanofabrication from electron-beam lithography to DNA: science,technology, and lessons learned» Dr. James Alexander Liddle (National Institute of Standards andTechnology (NIST))

11:15amBreak

11:30amTrack1 - Novel Developments in Nano/Micro Fabrication Methods
and Processes
MOA12
Chaired by: Dr. Joan Vila-Comamala

Thursday, 28 September

8:55amKeynote Robert Chau
Plenary Hall (MOA12/08/07)

11:30am

11:45am

O-S71-T1-1 Fast Hybrid-ALE to etch amorphous carbon.
» Ms. Atefeh Fathzadeh (KU Leuven University/ IMEC), Dr. Philippe
BEZARD (IMEC), Prof. Stefan De Gendt (Ku Leuven / IMEC)

O-S71-T1-2 Multi-layer nanoimprint lithography material system
for nanopattering of functional substrates» Dr. Mirko Lohse (micro resist technology GmbH), Dr. Martin
Messerschmidt (micro resist technology GmbH), Mrs. Nadja
Heidensohn (micro resist technology GmbH), Mrs. Susanne Grützner(micro resist technology GmbH), Dr. Arne Schleunitz (micro resist
technology GmbH), Mrs. Gabi Grützner (micro resist technology
GmbH)

Page 4049th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Thursday, 28 September

12pm

12:15pm

11:30am

11:30am

11:45am

O-S71-T1-3 Plasma Parameters Impact on Carbon Microlens Shapeand Surface Roughness» Dr. Delia Ristoiu (STMicroelectronics, 850 rue Jean Monnet, 38926
Crolles Cedex, France), Mr. Pierre Ducluzaux (STMicroelectronics, 850
rue Jean Monnet, 38926 Crolles Cedex, France), Mr. Guillaume Claveau(STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex,
France), Ms. Ece Aybeke (STMicroelectronics, 850 rue Jean Monnet,
38926 Crolles Cedex, France), Mr. Etienne Mortini (STMicroelectronics,
850 rue Jean Monnet, 38926 Crolles Cedex, France)
O-S71-T1-4 Blurred Electron Beam Induced Deposition for Direct
Fabrication of Plasmonic Nanoantennas onto Tapered Optical
Nanofibers towards Enhanced Single Photon Emission» Dr. Antonio Balena (Istituto Italiano di Tecnologia; Laboratoire Kastler
Brossel), Dr. Chengjie Ding (Laboratoire Kastler Brossel), Mrs. Marianna
D'Amato (Laboratoire Kastler Brossel), Dr. Muhammad Fayyaz Kashif(Istituto Italiano di Tecnologia), Dr. Filippo Pisano (Istituto Italiano diTecnologia), Dr. Marco Pisanello (OptogeniX s.r.l.), Dr. Gaia de Marzo(Istituto Italiano di Tecnologia), Prof. Massimo De Vittorio (Istituto
Italiano di Tecnologia), Prof. Alberto Bramati (Laboratoire Kastler
Brossel), Dr. Ferruccio Pisanello (Istituto Italiano di Tecnologia)
Track4 - Micro/Nano Engineering for Physical and Chemical
Applications
MOA6
Chaired by: Dr. Santos Merino and Dr. Ronny Loeffler
O-S72-T4-1 MEMS Vibrometer for Structural Health Monitoring:
Modeling and Characterization» Mr. Jan Niklas Haus (Technische Universität Braunschweig / Institut
für Mikrotechnik), Mr. Zhengchun Zhu (Technische Universität
Braunschweig / Institut für Mikrotechnik), Prof. Andreas Dietzel(Institute of Microtechnology, Braunschweig, 38124, Germany)
O-S72-T4-2 Surface Lattice Resonances in Plasmonic Gold
Nanocone Arrays» Mr. Lukas Lang (University of Tübingen), Prof. Monika Fleischer(University of Tübingen)

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12pm

O-S72-T4-3 Highly sensitive pseudo-capacitive iontronic pressure
sensor with MXene electrode to enhance ion intercalation» Mr. Changwoo Cho (Hanyang University), Ms. Chaeeun Lee (Hanyang
University), Prof. Je Hoon Oh (Hanyang University)

12:15pm

O-S72-T4-4 Evaluation of highly sensitive vibration states ofnanomechanical resonators in liquid using a convolutional neuralnetwork» Mr. Kazuki Bessho (The University of Tokyo), Prof. Shin'ichi Warisawa(The University of Tokyo), Prof. Reo Kometani (The University of Tokyo)

11:30amTrack2 - Fabrication and Integration of Micro/Nano Structures,
Devices and Systems
MOA9
Chaired by: Dr. Andreas Frölich

11:30am

O-S73-T2-1 Plasmonic Metamaterial Absorber for MWIR and LWIR
Bispectral Microbolometers» Mr. Alexander Litke (Fraunhofer IMS, 47057 Duisburg), Dr. Elahe
Zakizade (Fraunhofer IMS, 47057 Duisburg), Dr. Marvin Michel(Fraunhofer IMS, 47057 Duisburg), Dr. Sascha Weyers (Fraunhofer IMS,
47057 Duisburg), Prof. Anna Lena Schall-Giesecke (Fraunhofer IMS,
47057 Duisburg)

11:45am

O-S73-T2-2 Liquid crystal integrated multifunctional metasurfaces
for photonic security platform» Mr. Gyeongtae Kim (pohang university of science and technology),
Dr. Inki Kim (pohang university of science and technology), Dr.
Jaehyuck Jang (pohang university of science and technology), Prof.
Junsuk Rho (pohang university of science and technology)

12pm

O-S73-T2-3 The state of the art and first glimpse of wood based
printed electronics» Dr. Václav Procházka (PROFACTOR GmbH, Im Stadtgut D1, Steyr,
Austria), Dr. Thomas Geiger (EMPA, Dübendorf, 8600, Switzerland), Dr.
Pavel Kulha (PROFACTOR GmbH, Im Stadtgut D1, Steyr, Austria), Dr.
André van Zomeren (TNO, 1755 LE Petten, Nederlands)

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Continued from Thursday, 28 September

12:15pm

O-S73-T2-4 UV-Nanoimprint and Bosch Deep Reactive Ion Etchingof metasurfaces and integration into thin-film piezoelectric MEMS
» Dr. Christopher Dirdal (SINTEF), Dr. Karolina Milenko (SINTEF), Dr.
Anand Summanwar (SINTEF), Dr. Firehun Dullo (SINTEF), Mr. Paul
Thrane (SINTEF)

12:30pm

Lunch Break

1:30pmTrack1 - Novel Developments in Nano/Micro Fabrication Methods
and Processes / Track3 - Micro/Nano Engineering for Life Sciences
MOA12
Chaired by: Dr. Michael Haslinger

1:30pmO-S81-T1-1 Advancements in Fabricating Polymer based Microring
Resonators by Nanoimprint Lithography» Dr. Santhosh Pandian (Nanophotonics Research Group, Tampere
University, Tampere), Dr. Petri Karvinen (University of Eastern Finland,
Joensuu), Dr. Heikki Rekola (University of Eastern Finland, Joensuu), Dr.
Subhajit Bej (Nanophotonics Research Group, Tampere University,
Tampere), Dr. Paul Müllner (AIT Austrian Institute of TechnologyGmbH), Dr. Eggeling Moritz (AIT Austrian Institute of TechnologyGmbH), Dr. Rainer Hainberger (AIT Austrian Institute of TechnologyGmbH), Prof. Tapio Niemi (Nanophotonics Research Group, Tampere
University, Tampere)

1:45pmO-S81-T1-2 3D Ice Lithography» Dr. Bingdong Chang (Technical University of Denmark), Mr. Affan
Kaysa Waafi (Technical University of Denmark), Mr. Joachim LyngholmKjærby (Technical University of Denmark), Dr. Rubaiyet Haque(Technical University of Denmark), Prof. Anpan Han (Technical
University of Denmark)2pm

O-S81-T1-3 Manipulating droplet motion on superhydrophobic
glass by contact electrification» Mr. Kuan-Ting Chen (National United University), Prof. Jiann Shieh(National United University)

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2:15pmO-S81-T3-4 Biodegradable Chitosan / Cellulose Nanocrystals freestanding device as a multifunctional sensor for healthapplications» Ms. Valentina Antonaci (Istituto Italiano di Tecnologia), Dr. Gaia deMarzo (Istituto Italiano di Tecnologia), Dr. Laura Blasi (National
Research Council of Italy), Dr. Virgilio Brunetti (Istituto Italiano diTecnologia), Dr. Francesco Rizzi (Istituto Italiano di Tecnologia), Prof.
Massimo De Vittorio (Istituto Italiano di Tecnologia)

1:30pmTrack4 - Micro/Nano Engineering for Physical and Chemical
Applications
MOA6
Chaired by: Dr. Jochen Zimmer and Ms. Sonja Kopp

1:30pmO-S82-T4-1 Scalable Si-based architectures obtained by templated
solid state dewetting» Dr. Sonia Freddi (Institute of Photonics and Nanotechnologies Consiglio Nazionale delle Ricerche (IFN-CNR)), Dr. Michele Gherardi(Politecnico di Milano), Dr. Nicoletta Granchi (University of Florence),
Dr. Angelo Gatta Zini (Politecnico di Milano), Dr. Alexey Fedorov(Institute of Photonics and Nanotechnologies - Consiglio Nazionaledelle Ricerche (IFN-CNR)), Dr. Marco Abbarchi (Aix Marseille Univ,
Université de Toulon and Solnil), Dr. Andrea Chiappini (Institute of
Photonics and Nanotechnologies - Consiglio Nazionale delle Ricerche(IFN-CNR)), Dr. Maria Antonietta Vincenti (University of Brescia), Dr.
Francesca Intonti (University of Florence), Dr. Monica Bollani (Instituteof Photonics and Nanotechnologies - Consiglio Nazionale delle
Ricerche (IFN-CNR))

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Continued from Thursday, 28 September

1:30pm1:45pmO-S82-T4-2 Integration of Plasmonic Structures and Controlled
Multimode Optical Fibers for Advanced Endoscopic Systems:
Fabrication, Characterization, and Spatially Resolved SERS
Enhancement» Ms. Linda Piscopo (Istituto Italiano di Tecnologia, Center for
Biomolecular Nanotechnologies, Arnesano,73010), Dr. Liam Collard(Istituto Italiano di Tecnologia, Center for BiomolecularNanotechnologies, Arnesano,73010, Italy), Dr. Di Zheng (Istituto
Italiano di Tecnologia, Center for Biomolecular Nanotechnologies,
Arnesano,73010, Italy), Dr. Filippo Pisano (Istituto Italiano diTecnologia, Center for Biomolecular Nanotechnologies,
Arnesano,73010, Italy), Dr. Antonio Balena (Istituto Italiano diTecnologia), Dr. Marco Pisanello (OptogeniX s.r.l.), Prof. Massimo De
Vittorio (Istituto Italiano di Tecnologia), Dr. Ferruccio Pisanello (Istituto
Italiano di Tecnologia)

1:45pm2pm
O-S82-T4-3 Towards photon-noise limited room temperature IR
detection using optomechanical resonators» Mr. Paolo Martini (Institute of Sensor and Actuator Systems TU
Wien), Mr. Kostas Kannelopulos (Institute of Sensor and Actuator
Systems TU Wien), Prof. Silvan Schmid (Institute of Sensor andActuator Systems TU Wien)

2:15pmO-S82-T4-4 Electrochemical analysis on the SERS structure using
boehmite» Mr. Shunya Saegusa (University of Hyogo), Dr. Masayuki Naya (Keio
University), Mr. Takao Fukuoka (University of Hyogo), Dr. Yuichi Utsumi(University of Hyogo), Dr. Akinobu Yamaguchi (University of Hyogo)

1:30pmTrack3 - Micro/Nano Engineering for the Life Sciences
MOA9
Chaired by: Dr. Mar Alvarez and Prof. Stephan Sylvest Keller

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2pm

O-S83-T3-1 Growth of Vertically Aligned MoS2 with Diffused SiOx
Film for Ag-Migration-Based Resistive Switching Devices» Ms. Jimin Lee (Chair of Electronic Devices, RWTH Aachen University),
Ms. Sofía Cruces (Chair of Electronic Devices, RWTH Aachen University),
Mr. Benny Ku (AMO GmbH, Advanced Microelectronic Center Aachen),
Dr. Satender Kataria (Chair of Electronic Devices, RWTH Aachen
University), Dr. Ke Ran (Central Facility for Electron Microscopy (GFE),
RWTH Aachen University), Prof. Joachim Mayer (Central Facility forElectron Microscopy (GFE), RWTH Aachen University and Ruska-Centre
for Microscopy and Spectroscopy with Electrons (ER-C 2),
Forschungszentrum Jülich), Dr. Alwin Daus (Chair of Electronic Devices,
RWTH Aachen University), Prof. Max C. Lemme (Chair of Electronic
Devices, RWTH Aachen University and AMO GmbH, Advanced
Microelectronic Center Aachen)

O-S83-T3-2 A method for measuring the d33 piezoelectriccoefficient of soft thin films under weak loads» Dr. Gaia de Marzo (Istituto Italiano di Tecnologia), Ms. Valentina
Antonaci (Istituto Italiano di Tecnologia; Department of Innovation
Engineering, Unisalento), Dr. Luca Fachechi (Istituto Italiano diTecnologia), Dr. Vincenzo Mastronardi (Istituto Italiano di Tecnologia;
Department of Innovation Engineering, Unisalento), Dr. Maria Teresa
Todaro (Istituto Italiano di Tecnologia; Institute of Nanotechnology,
CNR Lecce), Mr. Luigi Portaluri (Istituto Italiano di Tecnologia;
Department of Innovation Engineering, Unisalento), Dr. Antonio
Qualtieri (Istituto Italiano di Tecnologia), Dr. Francesco Rizzi (Istituto
Italiano di Tecnologia), Prof. Michele Scaraggi (Istituto Italiano diTecnologia; Department of Innovation Engineering, Unisalento), Prof.
Massimo De Vittorio (Istituto Italiano di Tecnologia; Department of
Innovation Engineering, Unisalento)

O-S83-T3-3 Automatic markerless overlay with the NanoFrazor:
towards batch-fabricated nanodevices» Dr. Jana Chaaban (Heidelberg Instruments Nano AG), Dr. Antoaneta
Damyanova (Heidelberg Instruments Nano AG), Mr. Jonas Vergés(Heidelberg Instruments Nano AG), Mr. Robin Erne (Heidelberg
Instruments Nano AG), Dr. Emine Çağin (Heidelberg Instruments Nano
AG)

Page 43

49th international conference on Micro and Nano Engineering 25 - 28 Sep 2023 All times in CEST

Continued from Thursday, 28 September

2:15pm

O-S83-T3-4 An electrochemical sensor for Listeria monocytogenes
detection based on 3D printing and loop mediated isothermal
amplification» Dr. Santos Merino (Tekniker), Mrs. Ane Rivas-Macho (Gaiker), Dr. Unai
Eletxigerra (Tekniker), Dr. Ruth Diez (Tekniker), Mr. Antton Sanjuan(Universidad de Mondragón), Dr. M. Mounir Bou-Ali (Universidad deMondragón), Dr. Leire Ruiz (Universidad del País Vasco), Dr. Javier Del
Campo (Basque Center for Materials, Applications andNanostructures), Dr. Jose Luis Vilas (Universidad del País Vasco), Dr.
Felipe Goñi (Gaiker), Dr. Garbiñe Olabarria (Gaiker)

2:30pmBreak

2:45pmTrack1 - Novel Developments in Nano/Micro Fabrication Methods
and Processes
MOA12
Chaired by: Dr. Mathias Hädrich

2:45pm3pm

O-S91-T1-1 Avoiding Sidewall Redeposition when Dry Etching
Nonvolatile Materials: A Reverse Liftoff Process» Dr. David Lishan (Plasma-Therm, LLC), Mr. Vincent Genova (Cornell
University (Ret.)), Dr. Samantha Norris (Axoft), Dr. Kyle Dorsey (PhysicalSciences, Inc.)

O-S91-T1-2 Realization of fully independent complete field-effectdevices grown all-in-situ with the innovative Shadow Wall Epitaxy
technique» Dr. Yurii Kutovyi (Forschungszentrum Jülich GmbH), Dr. Nils von den
Driesch (Forschungszentrum Jülich GmbH), Ms. Christine Falter(Forschungszentrum Jülich GmbH), Mr. Felix Khamphasithivong (RWTH
Aachen University), Mr. Denny Dütz (RWTH Aachen University), Dr. Lars
R. Schreiber (RWTH Aachen University), Prof. Detlev Grützmacher(Forschungszentrum Jülich GmbH), Dr. Alexander Pawlis(Forschungszentrum Jülich GmbH)Powered by Ex Ordo, everything you need to run a research conference.

3:15pm

O-S91-T1-3 FEBID field emitters for vacuum nanoelectronics» Prof. Teodor Gotszalk (Wroclaw University of Science andTechnology), Ms. Ewelina Gacka (Wroclaw University of Science andTechnology), Mr. Bartosz Pruchnik (Wroclaw University of Science andTechnology), Mr. Piotr Kunicki (Wroclaw University of Science andTechnology), Mr. Krzysztof Kwoka (Department of Nanometrology,
Wrocław University of Science and Technology, Wroclaw, 50-370,
Poland), Dr. Tomasz Piasecki (Wroclaw University of Science andTechnology), Prof. Ivo W. Rangelow (Technische Universität Ilmenau),
Dr. Andrzej Sierakowski (Institute of Microelectronics and Photonics),
Dr. Isaac Stricklin (University of New Mexico), Dr. Tito Busani(University of New Mexico)

3:30pm

O-S91-T1-4 Diffuse Reflection of Neutrals as a Mechanism for
Inverse Reactive Ion Etching Lag in Semiconductor Manufacturing» Dr. Patrick Vanraes (University of Antwerp), Dr. Syam Parayil
Venugopalan (ASML), Dr. Matthieu Besemer (ASML), Prof. Annemie
Bogaerts (University of Antwerp)

2:45pmTrack3 - Micro/Nano Engineering for the Life Sciences
MOA6
Chaired by: Dr. Daniel Fan and Dr. Xavier Munoz-Berbel

2:45pm

O-S92-T3-1 Interfacing plastic antibodies on metal nanoparticles
by plasmon induced photopolymerization – Application to sensors» Mr. Amine Khitous (CNRS IS2M), Dr. Céline Molinaro (CNRS IS2M),
Prof. Karsten Haupt (UTC), Dr. Olivier Soppera (CNRS IS2M)

3pm

O-S92-T3-2 Auto-fluorescence suppression of 3D scaffolds
fabricated via two-photon polymerization for cell biology
applications» Mr. Ahmed Sharaf (Delft University of technology), Dr. Jean-Philippe
Frimat (Leiden University Medical Center), Dr. Gert-Jan Kremers(Erasmus Optical Imaging Center), Dr. Angelo Accardo (Delft Universityof technology)

3:15pm

O-S92-T3-3 Microparticle-based Microneedles for mRNA delivery» Mr. Alessandro Attanasio (Università degli Studi di Napoli "FedericoII"), Dr. Raffaele Vecchione (Istituto Italiano di Tecnologia), Prof. Paolo
Antonio Netti (Università degli Studi di Napoli "Federico II")

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Continued from Thursday, 28 September

3:15pm

O-S93-T3-3 Integration of mechanical cues and electrical sensing
in Nervous system-on-Chip» Mr. Rahman Sabahi-Kaviani (Eindhoven University of Technology),
Ms. Marina Shiryaeva (Eindhoven University of Technology), Dr.
Suzanne B.P.E. Timmermans (Eindhoven University of Technology),
Mrs. Gulden Akcay (Eindhoven University of Technology), Mr. SamuelRantataro (Aalto University), Prof. Tomi Laurila (Aalto University), Prof.
Sami Franssila (Aalto University), Prof. Regina Luttge (Eindhoven
University of Technology)

3:30pm

O-S93-T3-4 Novel µfluidic Brain-on-Chip instructiveµenvironments» Mrs. Gulden Akcay (Eindhoven University of Technology), Mr. Jeroen
van Venrooij (Eindhoven University of Technology), Prof. Regina Luttge(Eindhoven University of Technology)

3:45pmBreak

3:55pmAnnouncements and Closing Remarks
Plenary Hall (MOA12/08/07)

3:30pm
O-S92-T3-4 Hybrid metal-dielectric non-planar optical neuralinterfaces for multifunctional monitoring of brain functions» Ms. Maria Samuela Andriani (Istituto Italiano di Tecnologia), Dr.
Teresa Jurado Parras (Istituto Cajal,CSIC, Madrid), Mrs. Cinzia
Montinaro (Istituto Italiano di Tecnologia, Center for BiomolecularNanotechnologies, 73010 Arnesano), Dr. Marco Bianco (Istituto Italiano
di Tecnologia), Dr. Antonio Balena (Istituto Italiano di Tecnologia), Dr.
Elena Cid (Istituto Cajal,CSIC, Madrid), Dr. Barbara Spagnolo (Istituto
Italiano di Tecnologia), Dr. Marco Pisanello (OptogeniX s.r.l.), Dr. Filippo
Pisano (Istituto Italiano di Tecnologia), Dr. Liset M. de la Prida (Istituto
Cajal,CSIC, Madrid), Prof. Massimo De Vittorio (Istituto Italiano diTecnologia), Dr. Ferruccio Pisanello (Istituto Italiano di Tecnologia)

2:45pmTrack3 - Micro/Nano Engineering for the Life Sciences
MOA9
Chaired by: Dr. Mirko Lohse and Dr. Maria Antonietta Casulli

2:45pm
O-S93-T3-1 Pyrolytic carbon microelectrodes forelectrophysiological studies with retinal tissue» Mr. pratik Kusumanchi (DTU Nanolab), Prof. Stephan Sylvest Keller(Technical University of Denmark), Dr. Rasmus Schmidt Davidsen(Aarhus university), Dr. Jesper Guldsmed Madsen (Aarhus university),Prof. Toke Bek (Aarhus hospital univesity)

3pm
O-S93-T3-2 The 3D FlowPrint platform, a microfluidic-assisted
photopolymerization method for high-resolution multimaterialhydrogel printing» Mr. victor fournie (Fluigent), Dr. Bastien Venzac (LAAS-CNRS), Dr.
Emmanuelle Trevisiol (Toulouse Biotechnology Institute), Dr. Julie
Foncy (LAAS-CNRS), Dr. Julien Roul (LAAS-CNRS), Ms. Sandrine AssieSouleille (LAAS-CNRS), Ms. Melanie Escudero (Restore), Dr. Pierre
Joseph (LAAS-CNRS), Mr. Arnaud Reitz (Fluigent), Dr. Laurent Malaquin(LAAS CNRS)Powered by Ex Ordo, everything you need to run a research conference.

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