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O Apostolo Torrent Links 1.47 MB The Apostle [2012] Dual Format [XviD-BluRay-720p+BluRay] English From the officialwebsite, you can get other English movies, including The Apostle (2012), The Apostle (2012) - Blu-ray, O Apostolo Movie
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4K Ultra HD, Director: Fernando Cortizo, Writer: Pedro Genaro.This invention relates to a semiconductor device and a methodof manufacturing the same and more particularly to an improvement in a semiconductor device having a multilayerinterconnection structure and a method of manufacturing the same. In recent years, a higher integration of a semiconductor
device has been achieved so as to obtain a larger number of elements in a restricted space. With the higher integration of thesemiconductor device, however, problems of signal delays, cross-talk, and the like are caused due to an increase in theinterconnect length and a reduction in the wiring space (or a reduction in the wiring pitch) of a semiconductor device. As asolution to these problems, a dual damascene process is known. According to this process, a portion of an interlayer insulating
layer between interconnections is etched to form a via hole, and then a conductive layer is deposited on the whole surface of thesubstrate. Thereafter, the conductive layer is planarized by chemical mechanical polishing (CMP). A process of this type
involves the formation of a barrier layer to prevent a copper (Cu) film (an example of a conductive layer) from being oxidized
during the formation of a via hole and after the deposition of a Cu film, the formation of a seed layer to form an excellent Cu
seed layer, and the like. With the higher integration of the semiconductor device, however, there is a limit to the thickness of theinterlayer insulating layer or the like. Therefore, it is sometimes difficult to form a via hole having a depth of at least 1 μm. On
the other hand, the formation of a via hole having a depth of at least 1 μm is needed for the formation of a Cu interconnect
structure having a line width of 0.1 μm or less. In order to form a via hole having a depth of at least 1 μm in a multilayer interDownload

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