VACUUM VALVE
General Information..........................05
Ordering Information.........................07

Vacuum Poppet Valves

Angle Valve......................................11
Manual...............................................11
Pneumatic.........................................16
Large Angle Valve
Manual...............................................26
Pneumatic.........................................27
Y-Inline Valve
Manual...............................................31
Pneumatic..........................................33
Z-Inline Valve
Manual...............................................35
Pneumatic..........................................38
Formed Bellows seal stainless Valve
Angle Valve.......................................41
Y-Inline Valve....................................41
Two-Stage Valve...............................42

GATE VALVE
Bakeable All-metal Valves

Angle valve........................................91
Straight through valve.......................91
Small-Mini angle valve......................92

Teflon Coating Valves

Angle valve-Pneumatic.....................94
Y-Inline valve-Pneumatic..................95
Angle valve-Manual..........................96

Accessories

Heating Jacket..................................97
Valve Kit............................................98

Aluminum Block Valves

All-in-one angle valve-Pneumatic.....45
Aluminum angle valve-Pneumatic....46
Aluminum angle valve-Manual.........51
HV Angle valve-Pneumatic...............53
HV Angle valve-Manual....................57
Formed bellows seal stainless valve59

Butterfly Valves

Pneumatic.........................................62
3-Position..........................................65
APC-ModBus....................................72
APC-DeviceNet.................................75
HV Manual........................................82
LV Manual.........................................84

Ball Valves

Pneumatic.........................................86
Motor Drive........................................87
Manual...............................................88

Check Valves

Check Valve- Vertical........................89
Check Valve- Any..............................89
Vent Valves...................................90

1

Dimension in mm unless otherwise noted

Gate Valve(Technical Data).........................103
Linkage mechanism....................................104
Ball groo ve mechanism...............................104
Numbering System........................................105
UHV-gate valves (unlubricated mechanism)106
CF Flange-mini Manual UHV........................107
CF Flange-mini Pneumatic UHV...................107
CF Flange-large Pneumatic UHV...................108
CF Flange-Ball Manual...................................109
CF Flange-Ball Pneumatic.............................110
3 Position Throttle UHV..................................111
CF 3 Position Throttle.....................................112
HV Gate Valve-Lubricated..............................113
KF Flange-mini Manual HV............................114
KF Flange-mini Pneumatic HV.......................114
ISO Flange-large Pneumatic HV....................115
ISO Flange Manual HV..................................116
ISO Flange Pneumatic HV.............................117
3 Position Throttle HV....................................118
ISO 3 Position Throttle HV.............................119
Limit switch UHV............................................120
Limit switch UHV-Mini.....................................121
Limit switch UHV-Large..................................122
Limit switch UHV-Ball type.............................123
Limit switch HV...............................................124
Limit switch HV-Mini.......................................125
Limit switch HV-Large.....................................126
Limit switch HV-Ball type................................127
Gate valve kit..................................................128
HV Aluminum Gate Valve...............................129
Pendulum valves..........................................130
Pendulum-Nickel plated................................132
Pendulum-Hard anodized..............................133
3 Position Pendulum valves...........................134
3 Position Pendulum-Nickel plated.................136
3 Position Pendulum- Hard anodized.............137
APC Pendulum valves....................................138
APC Pendulum- Nickel plated........................141
APC Pendulum-Hard anodized.......................142
Transfer valves and doors..............................143
Rectangular transfer-Electrolytic polishing.....144
Rectangular transfer-Hard anodized..............146
Rectangular doors valve.................................148

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

VACUUM POPPET VALVES

Angle valve Large angle valve Large angle valve Y-inline valve Y-inline valve
Angle valve
Bellows
O-ring
Bellows
O-ring
Bellows
O-ringVACUUM POPPET VALVESALUMINUM BLOCK VALVES

Z-inline valve
Bellows

Z-inline valve Fomed bellows seal Pneumatic All-in-one Pneumatic
Pneumatic
O-ringstainless valve
angle valve aluminum angle valve aluminum angle valve
Bellows
O-ring
Bellows
Bellows
GATE VALVESBUTTERFLY VALVESManual aluminum Manual aluminum LV Manual
angle valve
angle valve
butterfly valve
Bellows
O-ringO-ringBALL VALVESAPCManualbutterfly valve
ball valve
O-ringTeflon-ring
BAKEABLE ALL-METAL VALVES

Angle valve
Bellows

Straight
through valve
Bellows

HV Manualbutterfly valve
O-ringPneumatic
3-Position
butterfly valve butterfly valve
O-ringO-ringCHECK VALVES VENT VALVES

Pneumatic
Motor drive
Check valve
ball valve
ball valve
Teflon-ring
Teflon-ring
TEFLON COATING VALVES

Vent valve
O-ringManual PTFE Pneumatic PTFE Pneumatic PTFE
angle valve
Y-inline valve
angle valve
O-ringO-ringO-ringDimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

2

Type

Size

VACUUM POPPET VALVESANGLE VALVE(Manual & Pneumatic)
LARGE ANGLE VALVE(Manual & Pneumatic)
Y-INLINE VALVE(Manual & Pneumatic)

HV VALVE
Shaft seaI KF KF KF KF KF ISO ISO ISO ISO ISO ISO ISO
10 16 25 40 50 63 80 100 160 200 250 320
Bellows
O-ring
Bellows
O-ring
Bellows
O-ring
Bellows
O-ring

Z-INLINE VALVE(Manual & Pneumatic)
Formed Bellows Seal Stainless Valve Bellows(Pneumatic)
ALUMINUM BLOCK VALVES
Pneumatic All-in-one angle valve Bellows
Bellows
Pneumatic aluminum angle valve
O-ring
Bellows
Manual aluminum angle valve
O-ringBUTTERFLY VALVESLV Manual butterfly valve
O-ring
HV Manual butterfly valve
O-ringPneumatic butterfly valve
O-ring3-Position butterfly valve
O-ring
APC butterfly valve
O-ringBALL VALVESManual ball valves
Teflon-ring
Pneumatic ball valve
Teflon-ringMotor Drive ball valve
Teflon-ring
CHECK VALVES
Check Valve
VENT VALVES
Vent valve
O-ringBAKEABLE ALL- METALVALVES
Angle valve
Bellows
Straight through valve
Bellows
TEFLON COATING VALVESManual PTFE Angle Valve
O-ringPneumatic PTFE Angle Valve O-ring
Pneumatic PTFE Y-inline Valve O-ring

3

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Type

Size

VACUUM POPPET VALVESANGLE VALVE(Manual & Pneumatic)
LARGE ANGLE VALVE(Manual & Pneumatic)
Y-INLINE VALVE(Manual & Pneumatic)
Z-INLINE VALVE(Manual & Pneumatic)
Formed Bellows Seal Stainless Valve(Pneumatic)
ALUMINUM BLOCK VALVES
Pneumatic All-in-one angle valve
Pneumatic aluminum angle valve
Manual aluminum angle valve
BUTTERFLY VALVESLV Manual butterfly valve
HV Manual butterfly valve
Pneumatic butterfly valve
3-Position butterfly valve
APC butterfly valve
BALL VALVESManual ball valves
Pneumatic ball valve
Motor Drive ball valve
CHECK VALVES
Check Valve
VENT VALVES
Vent valve
BAKEABLE ALL- METAL VALVES
Angle valve
Straight through valve
TEFLON COATING VALVESManual PTFE Angle Valve
Pneumatic PTFE Angle Valve
Pneumatic PTFE Y-inline Valve

Shaft seaI

CF
16

CF
35

UHV VALVE
CF CF CF CF CF CF
63 100 150 200 250 300

Bellows
O-ring
Bellows
O-ring
Bellows
O-ring
Bellows
O-ring
Bellows
Bellows
Bellows
O-ring
Bellows
O-ringO-ringO-ringO-ringO-ringO-ringTeflon-ring
Teflon-ring
Teflon-ringO-ring
Bellows
Bellows
O-ringO-ringO-ringDimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

4General Information
Features

Htc is pleased to offer vacuum valves designed and manufactured in Tainan, Taiwan, R.O.C.
These valves are the result of a long and careful development program designed to insure productquality, reliability and value. Every effort has been made to provide a valve family suited to therequirements of various users.
They will function reliably in applications ranging from semiconductor production system withchemical and particulate contamination.
Stainless steel welded bellows seal.
Long life operation.
Compact size.
Bakeable to 200ºC intermittently, Viton seal bonnet.
Simple control via solenoid valve with manual override.
Simple and fast maintenance.
Manual and electropneumatic actuation or fail safe operators (closes in the event of air pressure loss).

Specifications
Body: 304 S.S. (Other material available upon request)
Poppet: 304 S.S. (Other material available upon request)
Bellows: Welded AM-350 (option)
Solenoid: Option
Position indicator: Option
Seal: Viton O'ring
Leak rate: 2x10-9 mbar.l/s
Pressure range: 1x10-9 mbar to 1000 mbar Viton seal bonnet
Maximum pressure before opening : 1.2 Bar
Operating air pressure: 4~6.5 kg/cm2
Cycles until service: Bellows Type : 16 to 50~500,000 ; 63 to 150~250,000 ;200 to 250 ~ 80,000: No Bellows Type : 16 to 50~200,000 ; 63 to 250~100,000(Depend on O’ring Condition)(No Bellows Type Suggest to install in vertical orientation)
Bake-out limitation:

O-ring bonnet seal
Bake
Temperature

Valve body
metal bonnet seal
Manual and pneumatic actuator

Open
Close
Open
Close

100°C
100°C
200°C
150°C
80°C

Larger or special size available upon request

Applications
KF, ISO and ANSI port models
are designed for high vacuum applications where vacuum
pressures approximate 10 -9 torr and bake-out temperature do not exceed 150ºC. The standard
international KF/ISO configurations and ANSI configurations are used in areas requiring an easily
mountable and demountable flange type seal.
CF port models -10are designed for ultra-high vacuum applications where the vacuum pressure
approximates 10 torr and bake-out temperatures do not exceed 200ºC. These valves are used inapplications during an OFHC copper gasket rather the conventional Viton O'ring because of higher
bake-out temperatures, lower vacuum pressures, (minimal outgassing) and reduced permeability.
They are also commonly used in applications requiring a more permanent seal.

5

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Manually Operated Angle Valve

HAND WHEEL
BONNET PLATE
BONNET SEALSIDE PORTPOPPET SEALPOPPET
BOTTOM PORT

Pneumatically Actuated Y-In-Line ValveAIR CYLINDERSPRINGPISTONPISTON SEALSHAFTVALVE BODY
WELDED BELLOWSFLANGEVALVE SEAT

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

6

Ordering Information
VALVE
3000series(Table 1)

SIZE(Table 2)

ACTUATOR
0 = Manual
1 = pneumatic(spring to close) FLANGE TYPEV
0 = Tube End
2 = double pneumatic
4 = pneumatic(spring to Open) 1 = KF
5 = pneumatic(spring to close) 2 = CF
3 = CR
Heating Jacket(110V)
6 = pneumatic(spring to close) 4 = ISO
5 = ANSI
Heating Jacket(220V)
6 = VF
7 = double pneumatic
7 = VG
Heating Jacket(110V)
8 = ISO (B)8 = double pneumatic
Heating Jacket(220V)

SOLENOID VOLTAGE
0 = No Solenoid
1 = 24VDC
2 = 110VAC
3 = 220VAC
4 = 24VAC(50HZ/60HZ)
5 = 12VDC

7

Dimension in mm unless otherwise noted

BELLOWS
0 = No bellows
1 = Stainless corrugated bellows
2 = 304ss welded bellows
3 = 304Lss welded bellows
4 = 316ss welded bellows
5 = 316Lss welded bellows
6 = AM350 welded bellows
7 = Inconel 625 welded bellows
8 = Inconel 718 welded bellows
A = Formed Bellows SUS316Ti
Blank = Without LOGO
M = LOGOBODY MATERIAL
1 = SUS304
2 = Aluminum
3 = One piece
4 = SUS316
5 = SUS304(Teflon coating)
6 = SUS304 (Block)
7 = SUS316L
8 = SUS304L
E = SUS304(EP)POSITION INDICATOR
0 = No reed sensor
1 = 1 reed sensor
2 = 2 reed sensor
3 = micro-switch
4 = micro-switch+6 Pin connector (male)
5 = 1 reed sensor (NPN)
6 = 2 reed sensor (NPN)
7 = 1 reed sensor (PNP)
8 = 2 reed sensor (PNP)

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Table1 Valve 3000 Series

Angle Valve 3001-3009

High Cycle Angle valve 3011-3019

Z-lnline Valve 3021-3039

High Cycle Z-lnline valve 3031-3039

Y-lnline Valve 3041-3049

High Cycle Y-lnline valve 3051-3059

Tee Valve 3061-3069

Straight-Through3071-3079

TWO STAGE 3501-3509

VALVE
VITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPETVITON POPPETVITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPETVITON POPPETVITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPETVITON POPPETVITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPETVITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPETVITON POPPET

U.S.A.
Series code
BONNET SEAL
3001
BONNET SEAL
3003
METAL BONNET SEAL
3004
3005
METAL BONNET SEAL
3006
BONNET SEAL
3007
BONNET SEAL
3008
BONNET SEAL
3011
BONNET SEAL
3021
BONNET SEAL
3023
METAL BONNET SEAL
3024
3025
BONNET SEAL
3026
BONNET SEAL
3027
BONNET SEAL
3028
BONNET SEAL
3031
BONNET SEAL
3041
BONNET SEAL
3043
METAL BONNET SEAL
3044
3045
METAL BONNET SEAL
3046
BONNET SEAL
3047
BONNET SEAL
3048
BONNET SEAL
3051
BONNET SEAL
3061
BONNET SEAL
3063
METAL BONNET SEAL
3064
3065
METAL BONNET SEAL
3066
BONNET SEAL
3067
BONNET SEAL
3068
BONNET SEAL
3071
BONNET SEAL
3073
METAL BONNET SEAL
3074
3075
METAL BONNET SEAL
3076
BONNET SEAL
3077
BONNET SEAL
3078
BONNET SEAL
3501
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

8

Table 1. Continuous

Angle Valve 3101-3109

High Cycle Angle valve 3111-3119

Z-lnline Valve 3121-3129

High Cycle Z-lnline valve 3131-3139

Y-lnline Valve 3141-3159

High Cycle Y-Inline valve 3111-3119

Tee Valve 3161-3169

Straight-Through3171-3179

9

VALVE
VITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPETVITON POPPETVITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPETVITON POPPETVITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPETVITON POPPETVITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPETVITON POPPETFFKM POPPETFFKM POPPET
BAKEABLE ALL-METALVITON POPPET
Teflon Coating-VITON POPPET
Teflon Coating- FFKM POPPET

Dimension in mm unless otherwise noted

U.S.A.
Series code
BONNET SEAL
3101
BONNET SEAL
3103
METAL BONNET SEAL
3104
3105
METAL BONNET SEAL
3106
BONNET SEAL
3107
BONNET SEAL
3108
BONNET SEAL
3111
BONNET SEAL
3121
BONNET SEAL
3123
METAL BONNET SEAL
3124
3125
BONNET SEAL
3126
BONNET SEAL
3127
BONNET SEAL
3128
BONNET SEAL
3131
BONNET SEAL
3141
BONNET SEAL
3143
METAL BONNET SEAL
3144
3145
METAL BONNET SEAL
3146
BONNET SEAL
3147
BONNET SEAL
3148
BONNET SEAL
3151
BONNET SEAL
3161
BONNET SEAL
3163
METAL BONNET SEAL
3164
3165
METAL BONNET SEAL
3166
BONNET SEAL
3167
BONNET SEAL
3168
BONNET SEAL
3171
BONNET SEAL
3173
METAL BONNET SEAL
3174
3175
METAL BONNET SEAL
3176
BONNET SEAL
3177
BONNET SEAL
3178

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Table 2. Dimension
01 ~ 99TUBE(Fractional)
Code
Dimension

Codes and Dimensions Description
1A ~ 9Z TUBE
A1 ~ Z9 PIPE
(Metric)(ANSI)
Code
Dimension
Code
Dimension

AA ~ ZZ PIPE
(JIS)
Code
Dimension

01

1/16"

1A

2

A1

1/8"

AA

6(1/8")

02

1/8"

1B

3

A2

1/4"

AB

8(1/4")

03

3/16"

1C

4

A3

3/8"

AC

10(3/8")

04

1/14"

1D

6

A4

1/2"

AD

15(1/2")

05

5/16"

1E

8

A5

3/4"

AE

20(3/4")

06

3/8"

1F

10

A6

1"

AF

25(1")00

07

1/2"

1G

12

A7

1-1/4"AG

32(1-1/4")

08

5/8"

1H

16

A8

1-1/2"

AH

40(1-1/2")

09

3/4"(16)

1J

20

A9

2"

AJ

50(2")

10

7/8"

1K

22

B1

2-1/2"

AK

65(2-1/2")

11

1"(25)

1L

25

B2

3"

AL

80(3")

12

1-1/4"

1M

B3

3-1/2"

AM

90(3-1/2")

13

1-1/2"(40)

1N

B4

4"

AN

100(4")

14

2"(50)

1P

B5

5"

AP

125(5")

15

2-1/2"(63)

1Q

B6

6"

AQ

150(6")

16

3"(80)

1R

B7

8"

AR

100(4")

17

3-1/2"

1S

B8

10"

AS

125(5")

18

4"(100)

1T

B9

12"

AT

150(6")

19

5"

1U

C1

AU

200(8")

20

6"(160)

1V

C2

AV

250(10")21

8"(200)

1W

C3

AW

300(12")

22

10"(250)

1X

C4

AX

23

12"

1Y

C5

AY

24

14"

1Z

C6

AZ

25

16"

E5

45

26

18"

EM

57

27

20"

D8

28

28

22"

29

24"
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

10

VACUUM POPPET VALVES - ANGLE VALVE
Manually Operated with Bellows
KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

AVB-KF16-M

2.15"(54.6) 5.41"(136.5) 6.15"(156)

AVB-KF25-M

2.03"(51.6) 5.13"(130.2) 5.89"(149.7) 2.24"(56.8) 1.00"(25.4)

300111010016

AVB-KF40-M

2.40"(61)2.98"(75.8) 1.50"(38.1)

300113010016

AVB-KF50-M

3.40"(86.3) 8.15"(207)

9.91"(251.7) 3.48"(88.4) 2.00"(50.8)

300114010016

6.43"(163.5) 7.48"(196)D"(mm)

O.D."(mm)Parts No.

2.24"(56.8) 0.75"(19.05) 300109010016

Note: Dimension in inch(mm) unless otherwise noted

Special Sizes Available Upon Request

Available Area : Europe

11

Model No.

A

B

C

D

O.D.

Parts No.

AVB-KF16-M-E

40

121.9

141.5

56.8

19.05

310109010016

AVB-KF25-M-E

50

128.6

148.1

56.8

25.4

310111010016

AVB-KF40-M-E

65

167.5

200

75.8

38.1

310113010016

AVB-KF50-M-E

70

190.5

235.5

88.4

50.8

310114010016

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

VACUUM POPPET VALVES - ANGLE VALVE

Manually Operated with Bellows
CF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~3 inch(19.05~76.2mm) port ODs.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

D"(mm)

O.D."(mm)Parts No.

AVB-CR16-M

2.05"(63.5) 5.72"(145.4) 6.50"(164.9) 2.24"(56.8) 0.75"(19.05) 300109030016

AVB-CR35-M

2.46"(62.5) 6.50"(165)

7.78"(197.5) 2.98"(75.8) 1.50"(38.1)

300113030016

AVB-CR63-M

3.37"(85.7) 8.75"(222.2) 10.42"(264.6) 3.92"(99.5) 2.50"(63.5)

300115030016

Note: Dimension in inch(mm) unless otherwise noted

Special Sizes Available Upon Request

Available Area : Europe
Model No.

A

B

C

D

O.D.

Parts No.

AVB-CR16-M-E

38

119.9

139.5

56.8

19.05

310109030016

AVB-CR35-M-E

63

165.5

198

75.8

38.1

310113030016

AVB-CR63-M-E

105

241.5

283.9

99.5

63.5

310115030016

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

12

VACUUM POPPET VALVES - ANGLE VALVE

Manually Operated with Bellows
ISO Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
2.5~3 inch(63.5~76.2mm) port ODs.
Viton Seal Bonnet : 10-9 mbar
vacuum rating ISO flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

D"(mm)

AVB-ISO63-M

3.26"(82.8) 8.63"(219.3) 10.30"(261.7) 3.92"(99.5) 2.50"(63.5) 300115040016

Note:
All dimensions
shown inmm
AVB-ISO80-M
3.51"(89.1)
8.95"(227.4)
10.83"(275)4.49"(114)Note: Dimension in inch(mm) unless otherwise noted

Parts No.

3.00"(76.2) 300116040016

Special Sizes Available Upon Request

Available Area : Europe

13

O.D."(mm)Model No.

A

B

C

D

O.D.

Parts No.

AVB-ISO63-M-E

88

224.5

266.9

99.5

63.5

310115040016

AVB-ISO80-M-E

98

236.3

283.9

114

76.2

310116040016

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

VACUUM POPPET VALVES - ANGLE VALVE

Manually Operated without Bellows
KF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

AV-KF16-M

2.15"(54.6) 6.59"(167.5)

7.22"(183.3) 2.24"(56.8)

0.75"(19.05) 300109010010

AV-KF25-M

2.03"(51.6) 6.35"(161.2)

6.97"(177)

2.24"(56.8)

1.00"(25.4) 300111010010

AV-KF40-M

2.40"(61)8.78"(223)

2.98"(75.8)

1.50"(38.1) 300113010010

AV-KF50-M
3.40"(86.3) 9.80"(249) 11.39"(291.6) 3.48"(88.4)
Note: Dimension in inch(mm) unless otherwise noted

2.00"(50.8) 300114010010

7.50"(190.5)

C"(mm)

Available Area : Europe

D"(mm)

O.D. "(mm)Parts No.

Special Sizes Available Upon Request

Model No.

A

B

C

D

O.D.

Parts No.

AV-KF16-M-E

40

152.9

168.7

56.8

19.05

310109010010

AV-KF25-M-E

50

159.6

175.4

56.8

25.4

310111010010

AV-KF40-M-E

65

194.5

227

75.8

38.1

310113010010

AV-KF50-M-E

70

232.7

273.1

88.4

50.8

310114010010

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

14

VACUUM POPPET VALVES - ANGLE VALVE
Manually Operated Copper Seal Bonnet with Bellows

KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
Bakeable to 150°C
Metal Seal Bonnet : 10 -9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)AVB-CU-KF16-M 2.15"(54.6) 5.24"(136.5) 6.01"(157.4)
AVB-CU-KF25-M 2.03"(51.6) 5.11"(130.2) 5.89"(151.1)
AVB-CU-KF40-M 2.40"(61) 6.62"(163.5) 7.85"(196.5)
AVB-CU-KF50-M 3.40"(86.3) 8.14"(207) 9.95"(252.8)
Note: Dimension in inch(mm) unless otherwise noted

D"(mm) O.D. "(mm) Parts No.
2.75"(70) 0.75"(19.05) 300609010016
2.75"(70) 1.00"(25.4) 300611010016
3.33"(84.6) 1.50"(38.1) 300613010016
4.47"(113.6) 2.00"(50.8) 300614010016

VACUUM POPPET VALVES - ANGLE VALVE

Manually Operated Copper Seal Bonnet with Bellows
CF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
Bakeable to 200°C(open),150°C(close)
Metal Seal Bonnet : approximate
10 -10 mbar vacuum rating CF flange

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)
D"(mm) O.D. "(mm) Parts No.
AVB-CU-CR16-M 2.50"(63.5) 5.58"(145.4) 6.36"(166.3) 2.75"(70)0.75"(19.05) 300609030016
AVB-CU-CR35-M 2.45"(62.5) 6.68"(165) 7.90"(198) 3.33"(84.6) 1.50"(38.1) 300613030016
AVB-CU-CR63-M 3.38"(85.7) 8.72"(222.2) 10.42"(264.7) 4.62"(117.4) 2.50"(63.5) 300615030016
Note: Dimension in inch(mm) unless otherwise noted

15

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

VACUUM POPPET VALVES - ANGLE VALVE

Pneumatically Actuated with Bellows

Single-Acting, air to open, spring to close
KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Parts No.

AVB-KF16-P

2.15"(54.6)

6.78"(172.2)

2.24"(56.8)

0.75"(19.05)

300109110016

AVB-KF25-P

2.03"(51.6)

6.53"(165.9)

2.24"(56.8)

1.00"(25.4)

300111110016

AVB-KF40-P

2.40"(61)8.28"(210.2)

2.98"(75.8)

1.50"(38.1)

300113110016

AVB-KF50-P
3.40"(86.3)
11.08"(267.6)
3.48"(88.4)
Note: Dimension in inch(mm) unless otherwise noted

2.00"(50.8)

300114110016

Special Sizes Available Upon Request

Available Area : Europe
Model No.

A

B

C

O.D.

Parts No.

AVB-KF16-P-E

40

158

56.8

19.05

310109110016

AVB-KF25-P-E

50

164.3

56.8

25.4

310111110016

AVB-KF40-P-E

65

21
214

75.8

38.1

310113110016

AVB-KF50-P-E

70

251.3

88.4

50.8

310114110016

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

16

VACUUM POPPET VALVES - ANGLE VALVE

Pneumatically Actuated with Bellows

Single-Acting, air to open, spring to close
CF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~3 inch(19.05~76.2mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Parts No.

AVB-CR16-P

2.50"(63.5)

7.13"(181.1)

2.24"(56.8)

0.75"(19.05)

300109130016

AVB-CR35-P
2.46"(62.5)
8.33"(211.7)
2.98"(75.8)
Note: Dimension in inch(mm) unless otherwise noted

1.50"(38.1)

300113130016

Special Sizes Available Upon Request

Available Area : Europe

17

Model No.

A

B

C

O.D.

Parts No.

AVB-CR16-P-E

38

155.6

56.8

19.05

310109130016

AVB-CR35-P-E

63

212

75.8

38.1

310113130016

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

VACUUM POPPET VALVES - ANGLE VALVE

Pneumatically Actuated without Bellows

Single-Acting, air to open, spring to close
KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Parts No.

AV-KF16-P

2.15"(54.6)

6.78"(172.2)

2.24"(56.8)

0.75"(19.05)

300109110010

AV-KF25-P

2.03"(51.6)

6.53"(165.9)

2.24"(56.8)

1.00"(25.4)

300111110010

AV-KF40-P

2.40"(61)8.28"(210.2)

2.98"(75.8)

1.50"(38.1)

300113110010

AV-KF50-P
3.40"(86.3)
11.08"(267.6)
3.48"(88.4)
Note: Dimension in inch(mm) unless otherwise noted

2.00"(50.8)

300114110010

Special Sizes Available Upon Request

Available Area : Europe
Model No.

A

B

C

O.D.

Parts No.

AV-KF16-P-E

40

157.4

56.8

19.05

310109110010

AV-KF25-P-E

50

164.3

56.8

25.4

310111110010

AV-KF40-P-E

65

214

75.8

38.1

310113110010

AV-KF50-P-E

70

251.3

88.4

50.8

310114110010

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

18

VACUUM POPPET VALVES - ANGLE VALVE

Pneumatically Actuated without Bellows

Single-Acting, air to open, spring to close
CF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~76.2mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Parts No.

AV-CR16-P

2.50"(63.5)

7.13"(181.1)

2.24"(56.8)

0.75"(19.05)

300109130010

AV-CR35-P
2.46"(62.5)
8.33"(211.7)
2.98"(75.8)
Note: Dimension in inch(mm) unless otherwise noted

1.50"(38.1)

300113130010

Special Sizes Available Upon Request

Available Area : Europe

19

Model No.

A

B

C

O.D.

Parts No.

AV-CR16-P-E

38

155.6

56.8

19.05

310109130010

AV-CR35-P-E

63

212

75.8

38.1

310113130010

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

VACUUM POPPET VALVES - ANGLE VALVE

Pneumatically Actuated with Bellows

Double-Acting, air to open, air to close
CF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
2.5 inch (63.5mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Parts No.

AVB-CR63-P2
3.37"(85.7) 10.81"(274.6)
3.92"(99.5)
Note: Dimension in inch(mm) unless otherwise noted

2.50"(63.5)

300115230016

Special Sizes Available Upon Request

Available Area : Europe
Model No.

A

B

C

O.D.

Parts No.

AVB-CR63-P2-E

105

294

99.5

63.5

310115230016

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

20

VACUUM POPPET VALVES - ANGLE VALVE

Pneumatically Actuated with Bellows

Double-Acting, air to open, air to close
ISO Flange

Features
Stainless steel body surface treatment :1. below 4” puff polishing
2. Above 4”(include 4”) sand blasting
2.5~3 inch (63.5~76.2mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10 -9 mbar
vacuum rating ISO flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Parts No.

AVB-IS063-P2

3.26"(82.8)

10.70"(271.7)

3.92"(99.5)

2.50"(63.5)

300115240016

AVB-IS080-P2

3.51"(89.1)

10.95"(278)4.49"(114)3.00"(76.2)

300116240016

Note: Dimension in inch(mm) unless otherwise noted

Special Sizes Available Upon Request

Available Area : Europe

21

Model No.

A

B

C

O.D.

Parts No.

AVB-ISO63-P2-E

88

277

99.5

63.5

310115240016

AVB-ISO80-P2-E

98

287

114

76.2

310116240016

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

VACUUM POPPET VALVES - ANGLE VALVE
Pneumatically Actuated without Bellows

Double-Acting, air to open, air to close
CF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
2.5 inch (63.5mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Parts No.

AV-CR63-P2
3.37"(85.7) 10.81"(274.6)
3.92"(99.5)
Note: Dimension in inch(mm) unless otherwise noted

2.50"(63.5)

300115230010

Special Sizes Available Upon Request

Available Area : Europe
Model No.

A

B

C

O.D.

Parts No.

AV-CR63-P2-E

105

294
294

99.5

63.5

310115230010

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

22

VACUUM POPPET VALVES - ANGLE VALVE

Pneumatically Actuated without Bellows
Double-Acting, air to open, air to close
ISO Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
2.5~3 inch(63.5~76.2mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating ISO flange

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Parts No.

AV-ISO63-P2

3.26"(82.8)

10.70"(271.7)

3.92"(99.5)

2.50"(63.5)

300115240010

AV-ISO80-P2
3.51"(89.1)
10.95"(278)4.49"(114)Note: Dimension in inch(mm) unless otherwise noted

3.00"(76.2)

300116240010

Special Sizes Available Upon Request

Available Area : Europe

23

Model No.

A

B

C

O.D.

Parts No.

AV-ISO63-P2-E

88

277

99.5

63.5

310115240010

AV-ISO80-P2-E

98

287

114

76.2

310116240010

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

VACUUM POPPET VALVES - ANGLE VALVE

Pneumatically Actuated with Bellows Attached Reed Sensor
Single-Acting, air to open, spring to close
KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs
4~6.5 kg/cm2 operating air pressure.
Sensor Specification : Voltage DC/
AC 4~240V Amps : 5~40mA.
Options Available : Air solenoid
DC24V, AC24V, AC110V, AC220V.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange.

Available Area : U.S.A.
Model No.

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Parts No.

AVBS-KF16-P

2.15"(54.6)

6.78"(172.2)

2.24"(56.8)

0.75"(19.05)

300109110216

AVBS-KF25-P

2.03"(51.6)

6.53"(165.9)

2.24"(56.8)

1.00"(25.4)

300111110216

AVBS-KF40-P

2.40"(61)8.28"(210.2)

2.98"(75.8)

1.50"(38.1)

300113110216

AVBS-KF50-P
3.40"(86.3) 11.08"(267.6)
3.48"(88.4)
Note: Dimension in inch(mm) unless otherwise noted

2.00"(50.8)

300114110216

Special Sizes Available Upon Request

Available Area : Europe
Model No.

A

B

C

O.D.

Parts No.

AVBS-KF16-P-E

40

158

56.8

19.05

310109110216

AVBS-KF25-P-E

50

164.3

56.8

25.4

310111110216

AVBS-KF40-P-E

65

214

75.8

38.1

310113110216

AVBS-KF50-P-E

70

251.3

88.4

50.8

310114110216

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

24

VACUUM POPPET VALVES - ANGLE VALVE

Pneumatically Actuated with Bellows Attached Reed Sensor
Single-Acting, air to open, spring to close
CF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs
4~6.5 kg/cm2 operating air pressure.
Sensor Specification : Voltage DC/AC 4~240V Amps : 5~40mA.
Options Available : Air solenoid
DC24V, AC24V, AC110V, AC220V.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange.

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)
AVBS-CR16-P
2.50"(63.5)
7.13"(181.1)
2.24"(56.8)
AVBS-CR35-P
2.46"(62.5)
8.33"(211.7)
2.98"(75.8)
Note: Dimension in inch(mm) unless otherwise noted

25

Parts No.
300109130216
300113130216

Special Sizes Available Upon Request

Available Area : Europe
Model No.
AVBS-CR16-P-E
AVBS-CR35-P-E

O.D."(mm)0.75"(19.05)
1.50"(38.1)

A
38
63

Dimension in mm unless otherwise noted

B
155.6
212

C
56.8
75.8

O.D.
19.05
38.1

Parts No.
310109130216
310113130216

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

LARGE ANGLE VALVE

Manually Operated with Bellows
ISO Flange

Available Area : U.S.A.
Model No.
AVB-ISO100-M
AVB-ISO160-M
AVB-ISO200-M
AVB-ISO250-M

A
113.5
159
209.5
260.6

B
340.3
437.5
543.6
6 .7

C
404.3
512.5
673.6
 7

D
151.6
240
250
325

O.D.
101.6
152.4
203.2
254

Parts No.
300118040016
300120040016
300121040016
300122040016

C
408.8
518.6
679.7
 8

D
151.6
240
250
325

O.D.
101.6
152.4
203.2
254

Parts No.
300118030016
300120030016
300121030016
300122030016

LARGE ANGLE VALVE

Manually Operated with Bellows
CF Flange

Available Area : U.S.A.
Model No.
AVB-CR100-M
AVB-CR150-M
AVB-CR200-M
AVB-CR250-M

A
118
165.1
215.6
266.7

B
344.8
443.6
549.7


Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

26

LARGE ANGLE VALVE

Pneumatically Actuated with Bellows
Double-Acting, air to open, air to close
ISO Flange

Available Area : U.S.A.
Model No.

A

B

C

O.D.

Parts No.

AVB-ISO100-P2

113.5

352.1

151.6

101.6

300118240016

AVB-ISO160-P2

159

432.5

240

152.4

300120240016

AVB-ISO200-P2

209.5

623.6

250

203.2

300121240016

AVB-ISO250-P2

260.6

641.5

325

254

300122240016

Available Area : Europe

27

Model No.

A

B

C

O.D.

Parts No.

AVB-ISO100-P2-E

108

346.6

151.6

101.6

310118240016

AVB-ISO160-P2-E

 .5240152.4

310120240016

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

LARGE ANGLE VALVE

Pneumatically Actuated with Bellows
Double-Acting, air to open, air to close
CF Flange

Available Area : U.S.A.
Model No.

A

B

C

O.D.

Parts No.

AVB-CR100-P2

118

356.6

151.6

101.6

300118230016

AVB-CR150-P2

165.1

438.6

240

152.4

300120230016

AVB-CR200-P2

215.6

629.7

250

203.2

300121230016

AVB-CR250-P2

260.6

641.5

325

254

300122230016

Model No.

A

B

C

O.D.

Parts No.

AVB-CR100-P2-E

135

373.6

151.6

101.6

310118230016

Available Area : Europe

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

28

LARGE ANGLE VALVE

Manually Operated without Bellows
ISO Flange

Available Area : U.S.A.
Model No.
AV-ISO100-M
AV-ISO160-M
AV-ISO200-M

A
113.5
159
209.5

B
419.3
531.7
668.1

C
497.3
616.7
798.1

D
151.6
240
250

O.D.
101.6
152.4
203.2

Parts No.
300118040010
300120040010
300121040010

C
501.8
622.8
804.2

D
151.6
240
250

O.D.
101.6
152.4
203.2

Parts No.
300118030010
300120030010
300121030010

LARGE ANGLE VALVE

Manually Operated without Bellows
CF Flange

Available Area : U.S.A.
Model No.
AV-CR100-M
AV-CR150-M
AV-CR200-M

29

A
118
165.1
215.6

Dimension in mm unless otherwise noted

B
423.8
537.8
674.2

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

LARGE ANGLE VALVE

Pneumatically Actuated without Bellows
Double-Acting, air to open, air to close
ISO Flange

Available Area : U.S.A.
Model No.
AV-ISO100-P2
AV-ISO160-P2
AV-ISO200-P2
AV-ISO250-P2

A
113.5
159
209.5
260.6

B
352.1
432.5
623.6
641.5

C
151.6
240
250
325

O.D.
101.6
152.4
203.2
254

Parts No.
300118240010
300120240010
300121240010
300122240010

LARGE ANGLE VALVE

Pneumatically Actuated without Bellows
Double-Acting, air to open, air to close
CF Flange

Available Area : U.S.A.
Model No.
AV-CR100-P2
AV-CR150-P2
AV-CR200-P2
AV-CR250-P2

A
118
165.1
215.6
269.8

B
356.6
438.6
629.7
650.7

C
151.6
240
250
325

O.D.
101.6
152.4
203.2
254

Parts No.
300118230010
300120230010
300121230010
300122230010

A
135

B
373.6

C
151.6

O.D.
101.6

Parts No.
310118230010

Available Area : Europe
Model No.
AV-CR100-P2-E

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

30

Y-INLINE VALVE

Manually Operated with Bellows
KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)YVB-KF16-M 4.00"(101.6) 3.89"(98.7) 4.43"(112.5)
YVB-KF25-M 4.20"(106.8) 3.89"(98.8) 4.43"(112.6)
YVB-KF40-M 5.12"(130) 4.89"(124.2) 5.80"(147.2)
YVB-KF50-M 7.00"(177.8) 5.59"(141.9) 6.83"(173.5)
Note: Dimension in inch(mm) unless otherwise noted

D"(mm)
2.24"(56.8)
2.24"(56.8)
2.98"(75.8)
3.48"(88.4)

O.D. "(mm) Parts No.
0.75"(19.05) 304109010016
1.00"(25.4) 304111010016
1.50"(38.1) 304113010016
2.00"(50.8) 304114010016

Y-INLINE VALVE

Manually Operated with Bellows
CF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)
D"(mm) O.D. "(mm) Parts No.
YVB-CR16-M 4.7"(119.4) 3.89"(98.7) 4.43"(112.5) 2.24"(56.8) 0.75"(19.05) 304109030016
YVB-CR35-M 5.24"(133) 4.89"(124.2) 5.80"(147.2) 2.98"(75.8) 1.50"(38.1) 304113030016
Note: Dimension in inch(mm) unless otherwise noted31

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Y-INLINE VALVE

Manually Operated Copper Seal Bonnet with Bellows
KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Bakeable to 150°C
Metal Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)
D"(mm) O.D. "(mm) Parts No.
YVB-CU-KF16-M 4.00"(101.6) 3.88"(98.7) 4.76"(113.5) 2.75"(70)0.75"(19.05) 304609010016
YVB-CU-KF25-M 4.20"(106.8) 3.92"(98.8) 4.44"(113.6) 2.75"(70)1.00"(25.4) 304611010016
YVB-CU-KF40-M 5.12"(130) 5.01"(124.2) 5.87"(147.5) 3.37"(84.6) 1.50"(38.1) 304613010016
YVB-CU-KF50-M 7.00"(177.8) 5.30"(140.7) 6.55"(174.7) 4.47"(113.6) 2.00"(50.8) 304614010016
Note: Dimension in inch(mm) unless otherwise noted

Y-INLINE VALVE

Manually Operated Copper Seal Bonnet with Bellows
CF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Bakeable to 200°C(open),150°C(close)
Metal Seal Bonnet : approximate
10-10 mbar vacuum rating CF flange

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)
D"(mm) O.D. "(mm) Parts No.
YVB-CU-CR16-M 4.7"(119.4) 3.88"(98.7) 4.76"(113.5) 2.75"(70) 0.75"(19.05) 304609030016
YVB-CU-CR35-M 5.24"(133) 5.01"(124.2) 5.87"(147.5) 3.37"(84.6) 1.50"(38.1) 304613030016
Note: Dimension in inch(mm) unless otherwise noted
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

32

Y-INLINE VALVE

Pneumatically Actuated with Bellows
Single-Acting, air to open, spring to close
KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10 -9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)YVB-KF16-P
4.00"(101.6) 4.73"(120)2.24"(56.8)
YVB-KF25-P
4.20"(106.8) 4.73"(120)2.24"(56.8)
YVB-KF40-P
5.12"(130)6.17"(156.8) 2.98"(75.8)
YVB-KF50-P
7.00"(177.8) 7.43"(188.8) 3.48"(88.4)
Note: Dimension in inch(mm) unless otherwise noted

O.D.
0.75"(19.05)
1.00"(25.4)
1.50"(38.1)
2.00"(50.8)

Parts No.
304109110016
304111110016
304113110016
304114110016

Y-INLINE VALVE

Pneumatically Actuated with Bellows
Single-Acting, air to open, spring to close
CF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10 -9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)YVB-CR16-P
4.70"(119.4) 4.73"(120)2.24"(56.8)
YVB-CR35-P
5.24"(133)
6.17"(156.8) 2.98"(75.8)
Note: Dimension in inch(mm) unless otherwise noted

33

Dimension in mm unless otherwise noted

O.D.
0.75"(19.05)
1.50"(38.1)

Parts No.
304109130016
304113130016

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Y-INLINE VALVE

Pneumatically Actuated with Bellows Attached Reed Sensor
Single-Acting, air to open, spring to close
KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Sensor Specification : Voltage DC/AC 4~240V Amps : 5~40mA.
Options Available : Air solenoid
DC24V, AC24V, AC110V, AC220V.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)
YVBS-KF16-P
4.00"(101.6) 4.73"(120)2.24"(56.8)
YVBS-KF25-P
4.20"(106.8) 4.73"(120)2.24"(56.8)
YVBS-KF40-P
5.12"(130)6.17"(156.8) 2.98"(75.8)
YVBS-KF50-P
7.00"(177.8) 7.43"(188.8) 3.48"(88.4)
Note: Dimension in inch(mm) unless otherwise noted

O.D.
0.75"(19.05)
1.00"(25.4)
1.50"(38.1)
2.00"(50.8)

Parts No.
304109110216
304111110216
304113110216
304114110216

Y-INLINE VALVE

Pneumatically Actuated with Bellows Attached Reed Sensor
Single-Acting, air to open, spring to close
CF Flange

Features

Available Area : U.S.A.
Model No.
A"(mm)
B"(mm)
C"(mm)
YVBS-CR16-P
4.70"(119.4) 4.73"(120)2.24"(56.8)
YVBS-CR35-P
5.24"(133)
6.17"(156.8) 2.98"(75.8)
Note: Dimension in inch(mm) unless otherwise noted

Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Sensor Specification : Voltage DC/AC 4~240V Amps : 5~40mA.
Options Available : Air solenoid
DC24V, AC24V, AC110V, AC220V.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange
O.D.
0.75"(19.05)
1.50"(38.1)

Parts No.
304109130216
304113130216

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

34

Z-INLINE VALVE

Manually Operated with Bellows
KF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model A"(mm) B"(mm) C"(mm) D"(mm) E"(mm) F"(mm) O.D."(mm) Parts No.
No.
IVB-KF16-M 2.15"(54.6) 1.13"(28.5) 1.87"(47.5) 5.09"(129.4) 5.86"(148.9) 2.24"(56.8) 0.75"(19.05) 302109010016
IVB-KF25-M 2.03"(51.6) 1.37"(34.8) 2.25"(57.2) 5.35"(135.8) 6.11"(155.3) 2.24"(56.8) 1.00"(25.4) 302111010016
IVB-KF40-M 2.40"(61) 1.88"(47.8) 3.12"(79.3) 7.16"(181.8) 8.44"(214.3) 2.98"(75.8) 1.50"(38.1) 302113010016
IVB-KF50-M 3.40"(86.3) 2.62"(66.5) 4.12"(104.6) 8.85"(224.8) 10.61"(269.5) 3.48"(88.4) 2.00"(50.8) 302114010016
Note: Dimension in inch(mm) unless otherwise noted

Z-INLINE VALVE

Manually Operated with Bellows
CF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model A"(mm) B"(mm) C"(mm) D"(mm) E"(mm) F"(mm) O.D."(mm) Parts No.
No.
IVB-CR16-M 2.50"(63.5) 1.13"(28.6) 1.87"(47.6) 5.09"(129.6) 5.86"(149.1) 2.24"(56.8) 0.75"(19.05) 302109030016
IVB-CR35-M 2.46"(62.5) 1.88"(47.8) 3.12"(79.3) 7.16"(181.8) 8.44"(214.3) 2.98"(75.8) 1.50"(38.1) 302113030016
Note: Dimension in inch(mm) unless otherwise noted

35

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Z-INLINE VALVE
Manually Operated without Bellows
KF Flange
Features

Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model A"(mm) B"(mm) C"(mm) D"(mm) E"(mm)No.
IV-KF16-M 2.15"(54.6) 1.13"(28.5) 1.87"(47.5) 6.32"(160.6) 6.94"(176.4)
IV-KF25-M 2.03"(51.6) 1.37"(34.8) 2.25"(57.2) 6.57"(166.8) 7.19"(182.6)
IV-KF40-M 2.40"(61) 1.88"(47.8) 3.12"(79.3) 8.22"(208.8) 9.32"(236.8)
IV-KF50-M 3.40"(86.3) 2.62"(66.5) 4.12"(104.6) 10.53"(267.4) 12.12"(310)Note: Dimension in inch(mm) unless otherwise notedF"(mm) O.D."(mm) Parts No.
2.24"(56.8) 0.75"(19.05) 302109010010
2.24"(56.8) 1.00"(25.4) 302111010010
2.98"(75.8) 1.50"(38.1) 302113010010
3.48"(88.4) 2.00"(50.8) 302114010010

Z-INLINE VALVE

Manually Operated without Bellows

CF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Viton Seal Bonnet : 10 -9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model
No.

A"(mm) B"(mm) C"(mm)

D"(mm)

E"(mm)

F"(mm) O.D."(mm) Parts No.

IV-CR16-M 2.50"(63.5) 1.13"(28.6) 1.87"(47.6) 6.32"(160.6) 6.94"(176.4) 2.24"(56.8) 0.75"(19.05) 302109030010
IV-CR35-M 2.46"(62.5) 1.88"(47.8) 3.12"(79.3) 8.22"(208.8) 9.32"(236.8) 2.98"(75.8) 1.50"(38.1) 302113030010

Note: Dimension in inch(mm) unless otherwise noted
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

36

Z-INLINE VALVE

Manually Operated Copper Seal Bonnet with Bellows
KF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Bakeable to 150°C-9
Metal Bonnet : 10 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No. A"(mm) B"(mm) C"(mm) D"(mm)

E"(mm)

F"(mm) O.D."(mm) Parts No.

IVB-CU-KF16-M 2.15"(54.6) 1.12"(28.5) 1.87"(47.5) 5.07"(129.6) 5.86"(150.5) 2.75"(70) 0.75"(19.05) 302609010016
IVB-CU-KF25-M 2.03"(51.6) 1.37"(34.8) 2.25"(57.2) 5.33"(135.8) 6.11"(156.7) 2.75"(70) 1.00"(25.4) 302611010016
IVB-CU-KF40-M 2.40"(61) 1.88"(47.8) 3.12"(79.3) 7.35"(181.8) 8.57"(214.8) 3.37"(84.6) 1.50"(38.1) 302613010016
IVB-CU-KF50-M 3.40"(86.3) 2.62"(66.5) 4.12"(104.6) 8.86"(225.3) 10.63"(271.2) 4.17"(113.6) 2.00"(50.8) 302614010016

Note: Dimension in inch(mm) unless otherwise noted

Z-INLINE VALVE

Manually Operated Copper Seal Bonnet with Bellows
CF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
Bakeable to 200°C(open),150°C(close)
Metal Bonnet : approximate
10 -10 mbar vacuum rating CF flange

Available Area : U.S.A.
Model No.

A"(mm) B"(mm) C"(mm) D"(mm) E"(mm) F"(mm) O.D."(mm) Parts No.

IVB-CU-CR16-M 2.50"(63.5) 1.12"(28.5) 1.87"(47.5) 5.07"(129.6) 5.85"(150.5) 2.75"(70) 0.75"(19.05) 302609030016
IVB-CU-CR35-M 2.45"(62.5) 1.88"(47.8) 3.12"(79.3) 7.35"(181.8) 8.57"(214.8) 3.37"(84.6) 1.50"(38.1) 302613030016

Note: Dimension in inch(mm) unless otherwise noted

37

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Z-INLINE VALVE

Pneumatically Actuated with Bellows
Single-Acting, air to open, spring to close
KF Flange
Features

Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No. A"(mm) B"(mm) C"(mm)
D"(mm) E"(mm) O.D."
Parts No.
IVB-KF16-P 2.15"(54.6) 1.13"(28.5) 1.87"(47.5) 6.50"(165.25) 2.24"(56.8) 0.75"(19.05) 302109110016
IVB-KF25-P 2.03"(51.6) 1.37"(34.8) 2.25"(57.2) 6.75"(171.5) 2.24"(56.8) 1.00"(25.4) 302111110016
IVB-KF40-P 2.40"(61) 1.88"(47.8) 3.12"(79.3) 8.99"(228.5) 2.98"(75.8) 1.50"(38.1) 302113110016
IVB-KF50-P 3.40"(86.3) 2.62"(66.5) 4.12"(104.6) 11.25"(285.95) 3.48"(88.4) 2.00"(50.8) 302114110016
Note: Dimension in inch(mm) unless otherwise noted

Z-INLINE VALVE

Pneumatically Actuated with Bellows

Single-Acting, air to open, spring to close
CF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10 -9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model No. A"(mm) B"(mm) C"(mm)
D"(mm)
E"(mm)
O.D."
Parts No.
IVB-CR16-P 2.50"(63.5) 1.13"(28.6) 1.87"(47.6) 6.50"(165.25) 2.24"(56.8) 0.75"(19.05) 302109130016
IVB-CR35-P 2.46"(62.5) 1.88"(47.8) 3.12"(79.3) 8.99"(228.5) 2.98"(75.8) 1.50"(38.1) 302113130016
Note: Dimension in inch(mm) unless otherwise noted
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

38

Z-INLINE VALVE

Pneumatically Actuated without Bellows
Single-Acting, air to open, spring to close
KF Flange

Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No. A"(mm) B"(mm) C"(mm)
D"(mm)
E"(mm)
O.D."
Parts No.
IV-KF16-P 2.15"(54.6) 1.13"(28.5) 1.87"(47.5) 6.49"(165.05) 2.24"(56.8) 0.75"(19.05) 302109110010
IV-KF25-P 2.03"(51.6) 1.37"(34.8) 2.25"(57.2) 6.74"(171.3) 2.24"(56.8) 1.00"(25.4) 302111110010
IV-KF40-P 2.40"(61) 1.88"(47.8) 3.12"(79.3) 8.98"(228.3) 2.98"(75.8) 1.50"(38.1) 302113110010
IV-KF50-P 3.40"(86.3) 2.62"(66.5) 4.12"(104.6) 11.25"(285.93) 3.48"(88.4) 2.00"(50.8) 302114110010
Note: Dimension in inch(mm) unless otherwise noted

Z-INLINE VALVE

Pneumatically Actuated without Bellows

Single-Acting, air to open, spring to close
CF Flange
Features
Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange

Available Area : U.S.A.
Model No. A"(mm) B"(mm) C"(mm)
D"(mm)
E"(mm)
O.D."
Parts No.
IV-CR16-P 2.50"(63.5) 1.13"(28.6) 1.87"(47.6) 6.49"(165.05) 2.24"(56.8) 0.75"(19.05) 302109130010
IV-CR35-P 2.46"(62.5) 1.88"(47.8) 3.12"(79.3) 8.98"(228.3) 2.98"(75.8) 1.50"(38.1) 302113130010
Note: Dimension in inch(mm) unless otherwise noted

39

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Z-INLINE VALVE

Pneumatically Actuated with Bellows Attached Reed Sensor
Single-Acting, air to open, spring to close
KF Flange

Features

Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Sensor Specification : Voltage
DC/AC 4~240V Amps : 5~40mA.
Options Available : Air solenoid
DC24V, AC24V, AC110V, AC220V.
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Available Area : U.S.A.
Model No. A"(mm) B"(mm) C"(mm)
D"(mm)
E"(mm)
O.D."
Parts No.
IVBS-KF16-P 2.15"(54.6) 1.13"(28.5) 1.87"(47.5) 6.51"(165.2) 2.24"(56.8) 0.75"(19.05) 302109110216
IVBS-KF25-P 2.03"(51.6) 1.37"(34.8) 2.25"(57.2) 6.75"(171.5) 2.24"(56.8) 1.00"(25.4) 302111110216
IVBS-KF40-P 2.40"(61) 1.88"(47.8) 3.12"(79.3) 8.90"(228.5) 2.98"(75.8) 1.50"(38.1) 302113110216
IVBS-KF50-P 3.40"(86.3) 2.62"(66.5) 4.12"(104.3) 11.26"(285.9) 3.48"(88.4) 2.00"(50.8) 302114110216
Note: Dimension in inch(mm) unless otherwise noted

Z-INLINE VALVE

Pneumatically Actuated with Bellows Attached Reed Sensor
Single-Acting, air to open, spring to close
CF Flange
Features

Available Area : U.S.A.

Stainless steel body surface
treatment : below 4”puff polishing
3/4~2 inch(19.05~50.8mm) port ODs.
4~6.5 kg/cm2 operating air pressure.
Sensor Specification : Voltage
DC/AC 4~240V Amps : 5~40mA
Options Available : Air solenoid
DC24V, AC24V, AC110V, AC220V.
Viton Seal Bonnet : 10-9 mbar
vacuum rating CF flange

Model No. A"(mm) B"(mm) C"(mm) D"(mm) E"(mm)O.D."
Parts No.
IVBS-CR16-P 2.50"(63.5) 1.13"(28.6) 1.87"(47.6) 6.51"(165.2) 2.24"(56.8) 0.75"(19.05) 302109130216
IVBS-CR35-P 2.46"(62.5) 1.88"(47.8) 3.12"(79.3) 8.90"(228.5) 2.98"(75.8) 1.50"(38.1) 302113130216
Note: Dimension in inch(mm) unless otherwise noted
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

40

FORMED BELLOWS SEAL STAINLESS VALVE

Single-Acting, air to open, spring to close
Angle Valve

Features
Polished 304 stainless steel body.
Operating pressure : 4~6 kg/cm 2
Orientation : Any position
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Parts No.
ZFP0081520040K00

A
65

B
99.5

C
25.5

D
214.3

E
76.2

O.D.
38.1(1.50")

FORMED BELLOWS SEAL STAINLESS VALVE

Single-Acting, air to open, spring to close
Y-inline Valve

Features
Polished 304 stainless steel body.
Operating pressure : 4~6 kg/cm 2
Orientation : Any position
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange

Parts No.
ZFP0081620040K00

41

A
130

Dimension in mm unless otherwise noted

B
224

C
76.2

D
25.5

O.D.
38.1(1.50")

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

FORMED BELLOWS SEAL STAINLESS VALVE

Single-Acting, air to open, spring to close
Two-Stage Valve

Features

Polished 304 stainless steel body.
Operating pressure : 4~6 kg/cm 2
Orientation : Any position
Viton Seal Bonnet : 10-9 mbar
vacuum rating KF flange
Provides soft pumpdown andisolation for vacuum system
Reduces particulate contamination
during early turbulent pumpdown.

Parts No.
35011311001A

A
B
C
D
E
76.2 102 99.5 25.5 251.3

F
99

G
62

H
76.2

I
25.4

O.D.
38.1(1.50")

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

42

HV Aluminum Block Valve

Features

Twin micro switches in Htc standard All-in-one valve.
Reed sensor or Micro switch is available upon request for HV type.
Available in aluminum or stainless steel valve body.
Non-magnetic aluminum 6061-T6 valve body.
Visible position indicator on the top of valve.
Electrical and visual (LED) position indication.
Selectable operating mode
Remote control via PLC or PC
Local operation
Easy maintenance, fast bellows and seal replacement.
Fast opening and closing time.
Visible position indicator

Advantages

Solenoid & Micro switch
integrated in the top coverIntegrated multi-pin quickconnector

Easy to maintain By disassembling
the 4 bolts under coverLong life cycle 316Ti S.S. Bellows
6061-T6
Aluminum Valve body
(Stainless steel upon request)

Normally closed

A.I.O. : Easy to plug & play

Htc All-in-one Type

General Type

Quick connector
for solenid &micro switches

Solenoid & reed
sensor installedon the back ofvalve, 6 wires
need to be connected

Photos of various applications

Venting with filter

43

Dimension in mm unless otherwise noted

Gas Isolation

Process gas control

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Specification:
Pilot valve
Naminal voltage
Power
DC voltage
AC voltage
Nominal diameter
Electrical position indicator
Connection
RatingVacuum connection
Actuation
Compressed air supply
Tube connection
Pressure range
Piston displacement
Stroke of valve plate
ConductanceAngle valve
Switching frequency
Opening time
Closing time
Cycle life*
Leak Rate
Pressure max.
Operating pressure min.
Operating pressure max.
Pressure difference P
In closing direction
In opening direction
Temperature
Ambiance
Bakeout
Housing
Aluminum
Actuator
Pilot valve
Mounting orientation
Flow direction
Materials
Housing
Aluminum
Bellows/valve plate
Pressure spring
Seals
Cover
Visual position indicator
Cylinder unit
WeightAll in one
Aluminum
Pneumatic N/CAluminum

Product nameplate
2.4W
3.6VA
1.2mm
Soldered joints
125 VAC/1A
30 VDC/0.5A
KF16
KF25
opening : pneumatic
closing : by pressure springØ6 mm 2
4~6 Kg/cm (overpressure)
11 cm 3
4 cm3
6 mm
8 mm
5 l/s
14 l/s
10/min
100ms
100ms
10 million
1x10-9 mbar.l/s
5 bar(absolute)
1x10-8 mbar
2 bar

KF40

35 cm 313 mm
45 l/s

10/min
120ms
160ms

8/min
260ms
540ms

0.54 kg

0.73kg1.34kg0.36kg0.56 kg

1.2kg

5 bar
2 bar
0°C…+50°C
80°C
50°C
50°C
Any
Any
A6061-T6
316Ti S.S.
Spring steel
Viton
ABS
A5083

* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)
Dimension in mm unless otherwise noted
All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

44

HV ALUMINUM ANGLE VALVE-Pneumatically Actuatedwith formed bellows seal, Limit Switch
Single-Acting, air to open, spring to close
All in one typeFeatures10 million cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows andseal replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVABHLS-KF16-P-E
AVABHLS-KF25-P-E
AVABHLS-KF40-P-E

A
40
50
65

B
55
65.5
81

C
51
60
75

D
148
153
201

O.D.
20
28
45

Parts No.
31010911042MA
31011111042MA
31011311042MA

with formed bellows seal, Solenoid, Limit Switch
Single-Acting, air to open, spring to close
All in one typeFeatures10 million cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows andseal replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVABHLSV-KF16-P-E
AVABHLSV-KF25-P-E
AVABHLSV-KF40-P-E

A
40
50
65

B
55
65.5
81

C
51
60
75

D
148
153
201

O.D.
20
28
45

A.I.O Parts No.
Solenold
24V DC
110V AC
220V AC
24V AC

45

Dimension in mm unless otherwise noted

KF16
31010911142MA
31010911242MA
31010911342MA
31010911442MA

KF25
31011111142MA
31011111242MA
31011111342MA
31011111442MA

KF40
31011311142MA
31011311242MA
31011311342MA
31011311442MA

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV ALUMINUM ANGLE VALVE-Pneumatically Actuatedwith formed bellows seal
Single-Acting, air to open, spring to close
Features10 million cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows andseal replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)
Model No.
AVABH-KF16-P-E
AVABH-KF25-P-E
AVABH-KF40-P-E
AVABH-KF50-P-E

A
40
50
65

B
102
111
153

C
46.4
55.4
70.4

O.D.
20
28
45

Parts No.
31010911002MA
31011111002MA
31011311002MA

70

165.2

77

55

31011411002MA

with formed bellows seal, Attached Reed Sensor
Single-Acting, air to open, spring to close

Features10 million cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows
and seal replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVABHS-KF16-P-E
AVABHS-KF25-P-E
AVABHS-KF40-P-E
AVABHS-KF50-P-E

A
40
50
65
70

B
102
111
153
165.2

C
46.4
55.4
70.4
77

O.D.
20
28
45
55

Parts No.
31010911022MA
31011111022MA
31011311022MA
31011411022MA

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

46

HV ALUMINUM ANGLE VALVE-Pneumatically Actuatedwith formed bellows seal, Attached Solenoid
Single-Acting, air to open, spring to close
Features10 million cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows
and seal replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVABHSV-KF16-P-E
AVABHSV-KF25-P-E
AVABHSV-KF40-P-E

A
40
50
65

B
102
111
153

with standard voltage DC24V solenoid,
With LN type connector without sensors, without limit switch
C
46.4
55.4
70.4

D
75
90
112

O.D.
20
28
45

Parts No.
31010911102MA
31011111102MA
31011311102MA

with formed bellows seal, Attached Reed Sensor
Double -Acting, air to open, air to close

Features10 million cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows andseal replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVABHS-KF16-P2-E
AVABHS-KF25-P2-E
AVABHS-KF40-P2-E

47

A
40
50
65

Dimension in mm unless otherwise notedwith reed sensor, without limit switch, without solenoid valve
B
108.2
111
153.8

C
46.4
55.4
70.4

O.D.
20
28
45

Parts No.
31010921022MA
31011121022MA
31011321022MA

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Normally Openwith formed bellows seal, Attached Reed Sensor
Single-Acting, spring to open, air to close
Features10 million cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows andseal replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVABHS-KF16-P-NO-E
AVABHS-KF25-P-NO-E
AVABHS-KF40-P-NO-E

A
40
50
65

with reed sensors, without limit switch, without solenoid

B
108.2
111
153.8

C
46.4
55.4
70.4

O.D.
20
28
45

Parts No.
31010941022MA
31011141022MA
31011341022MA

with formed bellows seal, Attached Reed Sensor & Solenoid
Single -Acting, spring to open, air to close
Features10 million cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows
and seal replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)

with reed sensors, with standard voltage DC24V solenoid,
with LN type connector, without limit switch
Model No.
AVABHSSV-KF16-P-NO-E
AVABHSSV-KF25-P-NO-E
AVABHSSV-KF40-P-NO-E

A
40
50
65

B
108.2
111
153.8

C
46.4
55.4
70.4

D
75
90
112

E
111
120
162

O.D.
20
28
45

Parts No.
31010941122MA
31011141122MA
31011341122MA

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

48

HV ALUMINUM ANGLE VALVE-Pneumatic ActuatedWithout bellows seal, Normal close

Specification:

Electrical position indicator
Connection
RatingVacuum connection

AC 24 ~ 240 VAC
4~24VDC
KF16

KF25

KF40

Actuation

opening : pneumatic
closing : by pressure spring

Compressed air supply
Tube connection
Pressure range
Piston displacement

4 cm3
6 mm

Ø6 mm
4~6 Kg/cm2(overpressure)
11 cm38 mm

35 cm3
13 mm

5 l/s

14 l/s

45 l/s

10/min
100ms
100ms

10/min
120ms
160ms

8/min
260ms
540ms

Stroke of valve plate
ConductanceAngle valve
Switching frequency
Opening time
Closing time
Cycle life*

1,000,000

Leak Rate

3x10-9 mbar.l/s

Pressure max.
Operating pressure min.
Operating pressure max.

6 bar(absolute)
1x10-8 mbar
6 bar

Pressure difference P
In closing direction
In opening direction

6 bar
2 bar

Temperature
Ambiance
Bakeout
Housing
Aluminum
Actuator
Pilot valve
Mounting orientation
Materials
Housing
Aluminumvalve plate
Pressure spring
Seals
Visual position indicator
Cylinder unit

0°C…+50°C
80°C
50°C
50°C
Any
A6061-T6
316S.S.
Spring steel
Viton
A5083

* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)49

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV ALUMINUM ANGLE VALVE-Pneumatically Actuated
without bellows seal

Single-Acting, Normal close
Features10 million cycle o-ring seal
Easy maintenance, seal
replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 3x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVAH-KF16-P-E
AVAH-KF25-P-E
AVAH-KF40-P-E

A
40
50
65

B
102
111
153

C
46.4
55.4
70.4

O.D.
20
28
45

Parts No.
31010911002M0
31011111002M0
31011311002M0

without bellows seal, Attached Reed Sensor

Single-Acting, Normal close

Features10 million cycle o-ring seal
Easy maintenance, seal
replacement
Fast opening and closing timeHigh purity aluminum body
Leak rate: 3x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVAHS-KF16-P-E
AVAHS-KF25-P-E
AVAHS-KF40-P-E

A
40
50
65

B
102
111
153

C
46.4
55.4
70.4

O.D.
20
28
45

Parts No.
31010911022M0
31011111022M0
31011311022M0

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

50

Manual aluminum angle valve (with bellows)
Specification:
Vacuum connection Port

KF16

Actuation

KF40

Manual Actuator

Stroke of valve plate

6 mm

8 mm

13 mm

Weight (Kg)

0.5

0.59

1.12

ConductanceAngle valve

5 l/s

14 l/s

45 l/sCycles until first service(Tmax 80°C, under clean conditions)
Leak Rate
Pressure Range.
Pressure difference P
In closing direction
In opening direction
Temperature
Ambiance
Bakeout
Housing
Aluminum
Actuator

51

KF25

20,0001x10-9 mbar.l/s
1x10-8 mbar ~5 bar (absolute)
5 bar
2 bar
0°C…+50°C
150°C
120°C

Mounting orientation
Flow direction

Any
Any

Materials
Housing
Aluminum
Bellows/valve plate
Seals

A6061-T6
316Ti S.S.
Viton

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV ALUMINUM ANGLE VALVE-Manual Operated
with formed bellows
Features316Ti stainless steel bellows
Easy maintenance,
fast bellows and seal replacement
High purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVABH-KF16-M-E
AVABH-KF25-M-E
AVABH-KF40-M-E

A
40
50
65

B
103
110
150

C
107
115
157

D
45
54
69

E
52
52
62

O.D.
20
28
45

Parts No.
31010901002MA
31011101002MA
31011301002MA

without formed bellows
Features
High purity aluminum body
Leak rate: 1x10 -9 mbar. l /sec
Flange : KF(NW)

Model No.
AVAH-KF16-M-E
AVAH-KF25-M-E
AVAH-KF40-M-E

A
40
50
65

B


110
150

C
110
115
157

D
45
54
69

E
52
52
62

O.D.
20
28
45

Parts No.
31010901002M0
31011101002M0
31011301002M0

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

52

HV Angle Valve - Pneumatic ActuatedSpecification:
Electrical position indicator
Connection
RatingVacuum connection

AC 24 ~ 240 VAC
4~24VDC
KF16

KF25

KF40

opening : pneumatic
closing : by pressure spring

Actuation
Compressed air supply
Tube connection
Pressure range
Piston displacement

Ø6 mm
4~6 Kg/cm2(overpressure)
4 cm3
11 cm335 cm3

Stroke of valve plate

6 mm

8 mm

13 mm

Switching frequency
Opening time
Closing time

10/min
100ms
100ms

10/min
120ms
160ms

8/min
260ms
540ms

Cycle life (*1)

10,000,000

Leak Rate

1x10-9 mbar l/s

Pressure max.

5 bar(absolute)

Operating pressure min.

1x10-8 mbar

Operating pressure max.

2 bar

Pressure difference p
In closing direction
In opening direction
Temperature
Ambiance
Bakeout
Housing
Stainless Steel
Actuator
Pilot valve

0°C…+50°C

Mounting orientation

Any

Materials
Housing
valve plate
Pressure spring
Seals
Visual position indicator
Cylinder unit

5 bar
2 bar

150°C
50°C
50°C

304S.S.
316S.S.
Spring steel
Viton
A5083

* 1 The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less th an 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

53

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV Angle Valve - Pneumatic Actuated
Normally Closed

Single-Acting, air to open, spring to close
With formed bellows seal
Features10 million cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows
and seal replacement
Fast opening and closing
Stainless steel body
Leak rate: 1x10 -9 mbar. l /sec
Flange type: KF(NW)

Model No.
AVBHS-KF16-P
AVBHS-KF25-P
AVBHS-KF40-P

A
54.6
51.6
61

B
118.3
115.9
156.8

C
46.4
55.4
70.4

O.D.
19.05
25.4
38.1

Parts No.
30110911021A
30111111021A
30111311021A

With reed sensors

HV Y-INLINE Valve - Pneumatic Actuated

Normally Closed

With formed bellows seal , Attached Reed Sensor
Single-Acting , air to open , spring to close
Features10 million cycle 316Ti
stainless steel bellows
Easy maintenance, fast
bellows and seal replacement
Fast opening and closing
Stainless steel body
Leak rate: 1x10 -9 mbar. l /sec
Flange type: KF(NW)
Model No.
YVBHS-KF16-P
YVBHS-KF25-P
YVBHS-KF40-P

A
101.6
106.8
129.8

B
84.2
88.8
124.8

C
46.4
55.4
70.4

O.D.
19.05
25.4
38.1

Parts No.
30510911021A
30511111021A
30511311021A

With reed sensors
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

54

HV Angle Valve - Pneumatic ActuatedSpecification:
Electrical position indicator
Connection
RatingVacuum connection

AC 24 ~ 240 VAC
4~24VDCISO I00

Actuation

opening : pneumatic
closing : by pressure spring

Compressed air supply
Tube connection
Pressure range
Piston displacement

Ø6 mm
4~6 Kg/cm2(overpressure)

Opening time
Closing time

1s
1s

Cycle life (*1)

1,000,000

Leak Rate

1x10-9 mbar l/s

Pressure max.

2 bar(absolute)

Operating pressure min.

1x10-9 mbar

Operating pressure max.

2 bar

Pressure difference p
In closing direction
In opening direction
Temperature
Ambiance
Bakeout
Housing
Aluminum
Actuator
Pilot valve

0°C…+50°C

Mounting orientation

Any

Materials
Housing
valve plate
Pressure spring
Seals
Visual position indicator
Cylinder unit

2 bar
1.2 bar

150°C
50°C
50°C

304S.S.
316S.S.
Spring steel
Viton
A6061

*1 The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less tha n 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)55

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV Angle Valve - Pneumatic ActuatedWith formed bellows seal

Single-Acting , air to open , spring to close
Features1 million cycle 316L stainlesssteel bellows
Polished 304 stainless steel
body
Operating pressure: 4~6 kg/cm 2
Orientation: Any position

Model No.
AVBHS-ISO100-P
AVBHS-ISO100-P-E
AVBHS-ISO160-P
AVBHS-ISO160-P-E

A
113.5
108
159
138

B
314
308
371
350

C
154
154
195
195

O.D.
101.6
101.6
152.4
152.4

Parts No.
30111814021A
31111814021A
30112014021A
31112014021A

With reed sensors

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

56

HV Angle Valve- Manual
Specification:
Vacuum connection

KF16

KF25

KF40

Stroke of valve plate

6 mm

8 mm

13 mm

Cycle life

10,000

Leak Rate

1x10-9 mbar l/s

Operating pressure min.

1x10-8 mbar

Operating pressure max.

2 bar

Pressure difference p
In closing direction
In opening direction
Temperature
Ambiance
Bakeout
Housing
Stainless SteelMounting orientation
Materials
Housing
Stainess steel
valve plate
Pressure spring
Seals
Hand wheel

57

Dimension in mm unless otherwise noted

5 bar
2 bar
0°C…+50°C
150°C
Any
304S.S.
316S.S.
Spring steel
Viton
A6061

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV Angle Valve
ManualWith formed bellows seal
Features10,000 cycle 316Ti stainlesssteel bellows
Easy maintenance, fast bellows
and seal replacement
Stainless steel body
Leak rate: 1x10 -9 mbar. l /sec
Flange type: KF(NW)

Model No.
AVBH-KF16-M
AVBH-KF25-M
AVBH-KF40-M

A
54.6
51.6
61

B
119.4
115.3
153.8

C
45
54
69

O.D.
19.05
25.4
38.1

Parts No.
30110901001A
30111101001A
30111301001A

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

58

FORMED BELLOWS SEAL STAINLESS VALVE
Reduces particulate contamination during early turbulent pumpdown.

First stage flow inlet

Flow adjustment switch

Specification:
Vacuum connection

ISO100

Cycle life (*1)

1,000,000

Leak Rate

1x10-9 mbar l/s

Operating pressure min.

1x10-8 mbar

Operating pressure max.

2 bar

Pressure difference p
In closing direction
In opening direction
Temperature
Ambiance
Bakeout
Housing
Stainless Steel
Conductance for two stage
Mounting orientation
Materials
Housing
Stainess steel
valve plate
Pressure spring
Seals
Visual position indicator
Cylinder unit

2 bar
1.2 bar
0°C…+50°C
150°C
Min : 10.8 L/s/

MAX : 47.5L/s

Any
304 S.S.
316L S.S.
Spring steel
Viton
A6061

*1 The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less tha n 10 mbar pressure
difference.(If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)59

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

FORMED BELLOWS SEAL STAINLESS VALVE
Single-Acting, air to open, spring to closewith reed sensor

Two-Stage Valve

Features1 millin cycle 316L stainlesssteel bellows
Polished 304 stainless steel
body.
Operating pressure:4~6kg/cm 2
Orientation : Any position.
Viton Seal Bonnet : 10-9 mbar
vacuum rating.
Provides soft pumpdown andisolation for vacuum system

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

60

Butterfly valve
BUTTERFLY VALVES
Butterfly valve is a valve which can be used for isolating or regulating flow. The closing mechanism
takes the form of a disk. Operation is similar to that of a ball valve, which allows for quick shut off.
Butterfly valves are generally favored because they are lighter in weight, meaning less support isrequired.
Htc vacuum provides various butterfly valves which features long service life, high quality and highperformance, the robust and rugged design can be relied upon for years of trouble free service.
There are manual, pneumatic and electric actuators butterfly valve available for different applications.
One thing should be aware is that when the butterfly valve is fully open and the disk is protrusivefrom the valve body, the disk might interfere the inner surface of the connecting duct, users should
check the minimum ID of connecting duct before installation.

Pneumatic butterfly valve
Main applications
Compact isolation valve for clean processes.

Application process
FPD
SEMI

PVD

Pneumatic butterfly valve-gate system settings
A : Pump
B : Htc pneumatic butterfly valve
C : Process chamber
D : Gauge
E : Gas inlet

Application
Htc Pneumatic butterfly valve is driven by rotating cylinder valve. The seal plate compacts O-ringisolated from the vacuum and atmosphere completely. Htc Pneumatic butterfly valve has advantages
as quick opening and closing, easy installation, small size and long life cycles. Main application of
Htc Pneumatic butterfly valve will be fully isolated contaminating and aggressive gas in processes.
And the valve is located between pump and process chamber.

61

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Pneumatic Butterfly valve
Specification:
Material

Body
Plate
Shaft
Gate seal
Shaft seal

Mounting orientation
KF25 - KF50
Cycles life*

Cycles life for plate o-ring
Helium leak rate at 1 atm differential

304 S.S.
304 S.S.
304 S.S.
Viton
Viton
Any
1,500,000

cycles ISO63 - ISO160

1,500,000

ISO200 - ISO250

1,000,000

KF25 - KF50

250,000

cycles ISO63 - ISO160

250,000

ISO200 - ISO250

200,000

mbar-Liter/sec< 1 x 10-9
1×10-8 mbar to 2 bar

Pressure range in either direction
Differential pressure P in either direction

2 bar

Maximum differential pressureduring opening< 1 barCompressed air connection

KF25~ISO63

2 x 1/8”NPT

ISO100~250

2 x 1/4”NPT

Compressed air pressure

Weight

4 ~ 6 bar
KF25

1.3 kg

KF40

2.3 kg

KF50

2.6 kgISO63

4.2 kg

ISO1005.2 kg

ISO1609.8 kgISO20017.8 kg

ISO25015.1 kg* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

62

BUTTERFLY VALVE ( KF TYPE )Pneumatically Actuated
air to open, air to close

Model No.
KF25BFVP2
KF40BFVP2
KF50BFVP2

A
27
27
27

B
50
57
57

C
49
75
75

D
65
80
90

E
144
192
203

F
112
152
158

G
100
138
138

Parts No.
3202111101213
3202131101213
3202141101213

Features
Valve size for 1"(25.4mm) to 2"(50.8mm)
Flange : KF
Pressure Range : 10 -8 mbar to 2 bar
Leak rate : 1x10-9 mbar. l/sec
Body materials : 304S.S.
Seal materials : Viton
Max temperature : Actuator
60°C / Body
120°C
Cycle life* : 1,500,000(O-ring on plate is a consumptive material in the butterfly valve, cycle life is 250,000)
Option : Limit switch , solenoid (For KF40~KF50)&RPSUHVVHGDLUSUHVVXUHaNJFP 

Compressed air connecter : 2x1/8”NPT 7KHSURGXFWGRHVQRWFRPHZLWKDLUFRQQHFWRU

* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

63

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

BUTTERFLY VALVE ( ISO-F TYPE )Pneumatically ActuatedFeatures
Valve size for 2-1/2” (63.5mm)
to 8” (203.2mm)
Flange : ISO-F
Pressure Range-9 : 10 -8 mbar to 2 bar
Leak rate: 1x10 mbar. l /sec
Body materials : 304 S.S.
Seal materials : Viton
Max temperature:
Actuator 60 oC, Body 120 oC
Cycle life *: ISO63-ISO160 1,500,000
ISO2001,000,000(O-ring on plate is a consumptive material
in the butterfly valve, cycle life is 250,000
for ISO63-160;200,000 for ISO200)
Option : Limit switch , solenoid

air to open, air to close&RPSUHVVHGDLUSUHVVXUHaNJFP

Compressed air connecter :ISO63-2x1/8”NPT ; ISO100~200-2x1/4”NPT

7KHSURGXFWGRHVQRWFRPHZLWKDLUFRQQHFWRU

Model No.

A

B

C

D

E

F

G

P.C.D
h*No Thread
Depth

H

ISO63BFVP2 30 21 15 75 130 237 177.1 138 M8*4
ISO100BFVP2 30 36 36 86 165 288.5 211.5 155.5 M8*8
ISO160BFVP2 40 55.5 55.5 86 225 351.5 241.5 155.5 M10*8
ISO200BFVP2 50 76 76 104 285 438 299 230 M10*12

12
12
15
15

I

110 63145 100
200 150260 200

Parts No.
3202151113213
3202181113213
3202201113213
3202211113213* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

BUTTERFLY VALVE ( ISO-K TYPE )Pneumatically ActuatedFeatures

Valve size for 10” (254mm)
Flange : ISO-K
Pressure Range : 10-8 mbar to 2 bar
Leak rate: 1x10 -9 mbar. l /sec
Body materials : 304 S.S.
Seal materials : Viton
Max temperature:
Actuator 60 oC, Body 120 oC
Cycle life* : 1,000,000(O-ring on plate is a consumptive material
in the butterfly valve, cycle life is 200,000)
Option : Limit switch , solenoid

air to open, air to close&RPSUHVVHGDLUSUHVVXUHaNJFP 

Compressed air connecter :2x1/4”NPT

7KHSURGXFWFRPHVZLWKWKURWWOHYDOYH
2SHQ&ORVHWLPHVHFVHF

Model No.
ISOK250BFVP2

A
88

B
82.5

C
82.5

D
126

E
290

F
457

G
312

H
230

I
Parts No.
251 32022211032136* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

64

3-Position Butterfly valve
Pneumatic butterfly valve
Application process
Main applications
FPD
SEMI
Compact isolation valve for high conductance clean processes
Has a 3rd position to change the conductance. One has two functions.

PVD

Application

Htc 3-position butterfly valve is driven by rotating cylinder valve. Htc 3-position butterfly valve has
3rd position function, easy installation, small size and long life cycles. The 3-position butterfly valve
opening can be set from 0-90°. Main application of Htc 3-position butterfly valve will be fully isolated
contaminating and aggressive gas in processes. The valve is located between pump and processchamber and 3 rd position can be set to change the conductance.

Material

Cycles life*

cyclesCycles life for plate O-ringcyclesHelium leak rate at 1 atm differential

Body

304 S.S.

Plate

304 S.S.

Shaft

304 S.S.

Gate seal

Viton

Shaft seal

Viton

KF40 - KF50

1,500,000

ISO63 - ISO160

1,500,000

KF40 - KF50

250,000

ISO63 - ISO160

250,000< 1 x 10-9

mbar-Liter/sec

Mounting orientation

Any

3rd position adjustment angle

0-90°

Pressure range in either direction

1×10-8 mbar to 2 bar

Differential pressure P in either
direction
Maximum differential pressureduring opening

2 bar

Compressed air connection
Compressed air pressure< 1 bar
KF-40~ISO100
ISO1602x1/8”NPT+1xM5
2x1/4”NPT+1x1/8”NPT
4 ~ 6 bar

* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

65

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

3-Position BUTTERFLY VALVE ( ISO-KF TYPE )Pneumatically Actuated
air to open, air to close, air to 3-position

Model No.

A

B

D

E

F

G

H

Parts No.

KF40BFV3P
KF50BFV3P

27
27

57
57

68
68

80
90

191.5 151.5
202 157242
242

3202131101217
3202141101217

Features
Valve size for 1"(25.4mm) to 2"(50.8mm)
Flange : ISO-KF
Pressure Range : 10-8 mbar to 2 bar
Leak rate : 1x10-9 mbar. l/sec
Body materials : 304S.S.
Seal materials : Viton
Temperature : Actuator
60°C / Body
120°C
Cycle life* : 1,500,000(O-ring on plate is a consumptive material in the butterfly valve, cycle life is 250,000)
Option : Limit switch , solenoid&RPSUHVVHGDLUSUHVVXUHaNJFP 

Compressed air connecter : 2 x 1/8”NPT+1 x M5 7KHSURGXFWFRPHVZLWKWKURWWOHYDOYHDQGDLUFRQQHFWRU
* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

66

3-Position BUTTERFLY VALVE ( ISO-F TYPE )Pneumatically Actuated
air to open, air to close, air to 3-position

Model No.

A

E

F

H

I

Parts No.

C

D

ISO63BFV3P 36 15

21

83 130 259

199 268.5 M8*4

12

110

ISO100BFV3P 30 36

36

83 165 295

218 268.5 M8*812145 100 3202181113217

275 31215

200 150 3202201113217

ISO160BFV3P 40 55.5 55.5 100 225 385

G

h*No Thread
Depth P.C.D

B

M10*8

63 3202151113217

Features
Valve size for 1"(25.4mm) to 2"(50.8mm)
Flange : ISO-F
Pressure Range : 10 -8 mbar to 2 bar
Leak rate : 1x10 -9 mbar. l/sec
Body materials : 304S.S.
Seal materials : Viton
Temperature : Actuator
60°C / Body
120°C
Cycle life* : 1,500,000(O-ring on plate is a consumptive material in the butterfly valve, cycle life is 250,000)
Option : Limit switch , solenoid&RPSUHVVHGDLUSUHVVXUHaNJFP 

Compressed air connecter : ISO63~100-2x1/8”NPT+1xM5 ; ISO160-2x1/4”NPT+1x1/8”NPT
7KHSURGXFWFRPHVZLWKWKURWWOHYDOYHDQGDLUFRQQHFWRU

* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

67

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

APC Butterfly valve
ModBUS
Main applications
Downstream pressure control and isolation valve.

Application process
SEMI

FPD

Solar

CVD

Features
Integrated pressure controller
Short response time

Accurate pressure control
Friendly user interface

Compact isolation

APC butterfly valve gate system settings
1. Valve
2. Process chamber
3. Gas inlet
4. Pressure sensor(s)5. Sensor cable(s)6. Controller and actuator
7. Cable to remote control unit
8. Cable to power supply
9. Pump

No.
1
2

Parts

Material
Quantity1
APC Controller (MainFR-4
material)
Couplings
304S.S.
1

3

Bearing

304S.S.

1

4

O-Ring

VITON

2

5

Plate

304S.S.

1

6

Body

304S.S.

1

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

68

Butterfly valve control system - ModBUS Controller

Model
Connection
Connection Type
Sensor supply : 24V DC or ±15V DC
Backup power : Yes
PowerPower input
DB-9 maleSensor input
SensorSensor input
Q’ty off sensors : 2 pcs
Q’t(Vacuum gauge) Sensor power supply DB-15 female
Vacuum gauge: Linear / Exponent
RS232,
DB-25 female
Signal voltage : 0-10V DC linear Interface
RS485 (Option)with ppressure
Service
APC service
Mini USB type B female
Input resistance : Ri=47 k
Resolution: 2.3 mV
MonitorShow status
Green LED display
Sample rate
: 1ms
Control accuracy : 00.1%
1% of maximum ssensor range
Analog/Digital Easy Control
Position resolution : 8000 (step 0-90° rotation)
rotattion)
Ambient temperature: 70°C max(Controller
max(Controlle r part -24HR)-24H
HR)
The valve can be controlled by a host (local)(local) via RS232;
RS2232; For initial adjustment.

APC software functions

Control via computer by using the APC software offers convenient functions
Set control tuning parameter : PIN GAIN
Pressure and position control mode
Schedule test Mode => 1 cycle scheduleSet valve open/close speed
Report APC HW/SW version,
serial and model number
Report valve cycles and run hours
Set tolerance scope of pressure
Cycles life and pressure control record
Controller parameter upload and download
Power failure protection
Learning funtion

69

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Specification:
Valve unit

Material

Body

304S.S. (*1)

Plate

304S.S. (*1)

Shaft

304S.S.

Gate seal

Viton

Shaft seal

Viton

KF、ISO、CF

FlangeMounting position
Cycles until first service

Any
Pressure control

2,000,000(*2)

Closing / Opening

250,000

Helium leak rate at 1 atm differential< 1 x 10-9 mbar.l/sec

Pressure range

1×10-8 mbar to 1.2 bar

Operating temperature
Actuator

Body

10°C to 110°C
Step Motor

Optionsa. Communication interface(RS232,RS485)
b. Analog input(12bit,24bit)

Standard accessories

Digital node(4in/4out)(*1) Body and Plate material can choose aluminum alloy.
(*2) The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)(*3) If there is particle issue in the working condition of the valve , please clean the valve plate and body regularly and apply some vacuum grease on
these parts.

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

70

Control and actuating unit

Input voltage
Power consumption

Sensor power supply
output+24 VDCconnector: POWER

100W max.
(Controller + Motor + Sensor + Power Failure)connector: POWER+24 VDC /+-15VDC、500 mA

connector: SENSOR

Independent 2 channel

connector: SENSOR

Analog input

Q’ty of sensors

Input voltage

Resolution

Input resistance

12bit
24bit

Input

OutputAmbient temperature
Control accuracy
Backup power
Controller

0-10V DC linear

2.3 mV
0.5 mV

Position resolution
Closing time

Position resolution
Closing time

opening time

Valve max. torquePosition resolution

71

Dimension in mm unless otherwise noted

connector: SENSOR

Digital Input/ Output

Independent 2 channel

connector: INTERFACE

Independent 2 channel≤ 70° C -24HR

connector: INTERFACE

0.1% of maximum sensor range
KF25,KF40,KF50,CF35

Yes<0.85sec<0.85sec
50kg-cm

8000 (steps 0-90 rotation)

ISO63, ISO80, ISO100, CF63, CF100<0.85sec

opening time

Valve max. torqueconnector: SENSOR

Ri = 21 kΩ

Control accuracy

Position resolution

connector: SENSOR<0.85sec
50kg-cm

8000 (steps 0-90 rotation)

ISO160, CF150<3.5sec<3.5sec

90kg-cm

2400 (steps 0-90 rotation)

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

APC BUTTERFLY VALVE ( KF TYPE )ModBUS
H

A

D

F

E

G

B

Interface: RS232
Model No.
KF25BFVC/RS232/12bit
KF25BFVC/RS232/24bit
KF40BFVC/RS232/12bit
KF40BFVC/RS232/24bit
KF50BFVC/RS232/12bit
KF50BFVC/RS232/24bit

Parts No.
3202111101214
320211110121E
3202131101214
320213110121E
3202141101214
320214110121E

A

B

D

E

F

G

H

27

50

65

231

263.5

90

130

27

57

80

239.5

279.5

90

130

27

57

90

245

290

90

130

A

B

D

E

F

G

H

27

50

65

231

263.5

90

130

27

57

80

239.5

279.5

90

130

27

57

90

245

290

90

130

Interface: RS485
Model No.
KF25BFVC/RS485/12bit
KF25BFVC/RS485/24bit
KF40BFVC/RS485/12bit
KF40BFVC/RS485/24bit
KF50BFVC/RS485/12bit
KF50BFVC/RS485/24bit

Parts No.
3202111101215
320211110121F
3202131101215
320213110121F
3202141101215
320214110121F

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

72

APC BUTTERFLY VALVE ( ISO-F TYPE )ModBUSGFE

H

I x No

C

A

B

B C D

E

D

Interface: RS232
Model No.

Parts No.

ISO63BFVC/RS232/12bit
ISO63BFVC/RS232/24bit
ISO80BFVC/RS232/12bit
ISO80BFVC/RS232/24bit
ISO100BFVC/RS232/12bit

3202151113214
320215111321E
3202161113214
320216111321E
3202181113214
ISO100BFVC/RS232/24bit 320218111321E
ISO160BFVC/RS232/12bit 3202201113214
ISO160BFVC/RS232/24bit 320220111321E

GH

I x No Thread
Depth P.C.D

30 15 21 130 267

327 90

130

M8*4

12

110

30 26 26 145 275

344 90

130

M8*8

12

125

30 36 36 165 286

363 90

130

M8*8

12

145

40 57 57 225 426

536 110 140

M10*8

15

200

A

F

A

F

Interface: RS485
Model No.

Parts No.

ISO63BFVC/RS485/12bit
ISO63BFVC/RS485/24bit
ISO80BFVC/RS485/12bit
ISO80BFVC/RS485/24bit
ISO100BFVC/RS485/12bit

3202151113215
320215111321F
3202161113215
320216111321F
3202181113215
ISO100BFVC/RS485/24bit 320218111321F
ISO160BFVC/RS485/12bit 3202201113215
ISO160BFVC/RS485/24bit 320220111321F

73

Dimension in mm unless otherwise notedGH

I x No Thread
Depth P.C.D

30 15 21 130 267

327 90

130

M8*4

12

110

30 26 26 145 275

344 90

130

M8*8

12

125

30 36 36 165 286

363 90

130

M8*8

12

145

40 57 57 225 426

536 110 140

M10*8

15

200

B C D

E

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

APC BUTTERFLY VALVE ( CF TYPE )ModBUS

H

F

E

G

IxJ

C

A

B

D

Interface: RS232
Model No.

Parts No.

CF35BFVC/RS232/12bit
CF35BFVC/RS232/24bit
CF63BFVC/RS232/12bit
CF63BFVC/RS232/24bit
CF100BFVC/RS232/12bit

3202131102214
320213110221E
3202151102214
320215110221E
3202181102214
CF100BFVC/RS232/24bit 320218110221E
CF150BFVC/RS232/12bit 3202201102214
CF150BFVC/RS232/24bit 320220110221EGH

I x No Thread
Depth P.C.D

264 90

130

M6*6

12

58.7

35 16.5 16.5 113.6 260.5 314 90

130

M8*8

12

92.1

30 36.5 36.5 151.6 279

130

M8*16

12

130.3

40 56.6 56.6 202.5 416 514.5 110 140

M8*20

15

181

A

A

B

C

D

E

30 4.5 4.5 69.5 229F

351 90Interface: RS485
Model No.
CF35BFVC/RS485/12bit
CF35BFVC/RS485/24bit
CF63BFVC/RS485/12bit
CF63BFVC/RS485/24bit
CF100BFVC/RS485/12bit

Parts No.

3202131102215
320213110221F
3202151102215
320215110221F
3202181102215
CF100BFVC/RS485/24bit 320218110221F
CF150BFVC/RS485/12bit 3202201102215
CF150BFVC/RS485/24bit 320220110221FG

H

I x No Thread
Depth P.C.D

264 90

130

M6*6

12

58.7

35 16.5 16.5 113.6 260.5 314 90

130

M8*8

12

92.1

30 36.5 36.5 151.6 279

130

M8*16

12

130.3

40 56.6 56.6 202.5 416 514.5 110 140

M8*20

15

181

B

C

D

E

30 4.5 4.5 69.5 229F

351 90Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

74

APC BUTTERFLY VALVE
DeviceNET

Main applications
Downstream pressure control and isolation valve.

Application process
SEMI

FPD

Solar

CVD

Features
Integrated pressure controller
Short response time

Accurate pressure control
Friendly user interface

Compact isolation

APC butterfly valve gate system settings
1. Valve
2. Process chamber
3. Gas inlet
4. Pressure sensor(s)5. Sensor cable(s)6. Controller and actuator
7. Cable to remote control unit
8. Cable to power supply
9. Pump75

Dimension in mm unless otherwise noted

No.

Parts

Quantity

Couplings

Material
FR-4(Main material)
304S.S.

1

APC Controller

2
3

Bearing

304S.S.

1

4

O-Ring

VITON

2

5

Plate

304S.S.

1

6

Body

304S.S.

1

1
1

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

APC software functions
Specification:
Valve unit

Material

Body

304S.S. (*1)

Plate

304S.S. (*1)

Shaft

304S.S.

Gate seal

Viton

Shaft seal

Viton

KF、ISO、CF

FlangeMounting position
Cycles until first service

Any
Pressure control

2,000,000(*2)

Closing / Opening

250,000

Helium leak rate at 1 atm differential< 1 x 10-9 mbar.l/sec

Pressure range

1×10-8 mbar to 1.2 bar

Operating temperature
ActuatorStandard accessories

Body

10°C to 110°C
Step Motor

M12 Single-Ended Cordset, 5 Poles, Female(Straight) to Pigtail by CAN Bus,
2.0 meter in length.*1.(Can optional cable length)(*1) Body and Plate material can choose aluminum alloy.
(*2) The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)(*3) If there is particle issue in the working condition of the valve , please clean the valve plate and body regularly and apply some vacuum grease on
these parts.

77

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

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1PTJUJPOSFTPMVUJPO TUFQTSPUBUJPO*40 $'
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1PTJUJPOSFTPMVUJPO TUFQTSPUBUJPODimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

78

APC BUTTERFLY VALVE (KF TYPE)
Step Motor ActuatedCommunication Protocol : DeviceNet

ZZZKWFYDFXXPFRP

79

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

APC BUTTERFLY VALVE (ISO-F TYPE)
Step Motor ActuatedCommunication Protocol : DeviceNet

ZZZKWFYDFXXPFRP*Unit : mm

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

80

APC BUTTERFLY VALVE (CF TYPE)
Step Motor ActuatedCommunication Protocol : DeviceNet

ZZZKWFYDFXXPFRP

81

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV Butterfly valve-Manually Operated
Specification:

Material

Body

304 S.S.

Plate

304 S.S.

Shaft

304 S.S.

Gate seal

Viton

Shaft seal

Viton

Cycles life
Helium leak rate at 1 atm differential
Mounting orientation
Pressure range in either direction

100,000< 1 x 10-9mbar.l/sec
Any

1×10-8 mbar to 1.2 bar

Differential pressure P in either direction

1.2 barMaximum differential pressure during opening< 1 barDimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

82

HV BUTTERFLY VALVESManually Operated, KF TYPE
Features
Valve size for 1” to 2”(25.4mm ~ 50.8mm)
Flange : KF(NW)
Pressure Range : 10-8 mbar to 1.2 bar
Leak rate: 1x10 -9 mbar. l /sec
Body materials : 304 S.S.
Seal materials : Viton
Cycle life : 100,000
Mounting position : Any
Temperature: Body
120°C

Manually Operated, ISO-F TYPE

Features
Valve size for 2.5” to 6”(63.5mm ~ 152.4mm)
Flange : ISO-F
Pressure Range : 10-8 mbar
to 1.2 bar
Leak rate: 1x10 -9 mbar.
l /secBody materials : 304 S.S.
Seal materials : Viton
Cycle life : 100,000
Mounting position : Any
Temperature: Body 120°C

Model No.

83

A B

C

D

Parts No.
h*No Thread
Depth P.C.D I
103 M8*4
12
110 63 3202151113218

F

G

ISO63BFVM 36 15 21

40 130 154

94

ISO100BFVM 30 36 36

40 165 190 113

103 M8*812

145 100 3202181113218

ISO160BFVM 40 55.5 55.5 52 225 268 158

122 M10*8

15200 150 3202201113218

Dimension in mm unless otherwise notedE

H

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

LOW VACUUM BUTTERFLY VALVESManually Operated, KF TYPE
Features
Valve size for 0.75” to 2”(19.05mm ~ 50.8mm)
Flange : KF(NW)
Pressure Range : 1000mbar~1x10-4mbar
Leak rate: 5x10 -7 mbar. l /sec
Body materials : 304 S.S.
Seal materials : EPDM
Cycle life : 1,000
120°C
Temperature: Body
Model No.

A

B

C

D

E

KF16BFV

75.6



KF25BFV

75.6

KF40BFV

83.6

KF50BFV

87.6

116.6

Connector

Size

Parts No.

KF16

0.75"(19.05) 3202092101111

KF25

1”(25.4)

3202112101111

KF40

1.5”(38.1)

3202132101111

KF50

2”(50.8)3202142101111

Manually Operated, ISO-K TYPE
Features
Valve size for 2.5” to 4”(63.5mm ~ 101.6mm)
Flange : ISO-K
Pressure Range : 1000mbar~1x10-4mbar
Leak rate: 5x10-7 mbar. l /sec
Body materials : 304 S.S.
Seal materials : EPDM
Cycle life : 1,000
Temperature: Body
120°C

Model No.

A

B

C

D

E

Connector

Size

Parts No.

ISO63BFV

93.2

96.6

191.6

112

152.6

ISO63

2.5”(63.5)

3202152103111

ISO80BFV

95.2

103.8

192.6

125

166.3

ISO80

3.0”(76.2)

3202162103111


120.6 195.6
1995.6
2000
ISO100BFV 101.2
120.6
157
200

ISO1004.0”(101.6) 3202182103111
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

84

Ball Valves

In vacuum industry, ball valves are durable and usually work to achieve perfect shutoff. A ball valve
is a vacuum valve with a ball in the central part of the valve, the ball controls the flow through it.
The ball has a hole, or port, through the middle so that when the port is in line with both ends of thevalve, flow will occur. When the valve is closed, the hole is perpendicular to the ends of the valve,and flow is blocked. The handle or lever will be inline with the port position letting you "see" thevalve's position when the valve is fully open. The ball valve, along with the butterfly valve , are partof the family of quarter turn valves.
Ball valve’s simple, rugged structure provides high reliability in “dirty” vacuum application. For
example, they are always used to isolate traps and scrubbers downstream from the chamber or
vacuum pump in the process equipment. Ball valves also are suitable for isolating gauges, vacuumroughing lines, food processing lines and many other industrial applications.
Htc vacuum’s ball valves have manual, pneumatic and electric actuators for various customers;
custom design is available upon request, please contact us.
Note: Standard voltage 110V, other voltage see note *Custom design

85

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

BALL VALVES

Pneumatically Actuated, KF Flange
air to open, air to close
Features
Valve size for 1” to 2”(25.4mm ~ 50.8mm)
Flange : KF(NW)
Pressure Range : 2 bar ~ 1x10 -4 mbar
Leak rate: 9x10-7 mbar.l/sec
Body materials : 316 S.S., PTFE
Max temperature : Cylinder 80°C/ Body 100°C
Compressed air connector :KF25-2x1/8” NPT, KF40-KF50-2x1/4” NPT
Option : Limit switch , solenoid

Model No.

A

B

C

D

Connector

Size”(mm)Parts No.

KF25BV107P2

173

107

71

41.5

KF25

1"(25.4)

3201113101133

KF40BV130P2

216

130

88

48

KF40

1.5"(38.1)

3201133101133

KF50BV151P2

247

151

99

51.5

KF50

2"(50.8)3201143101133

Pneumatically Actuated , ISO-K Flange
air to open, air to close
Features
Flange : ISO-K
Operation : 1/4 Turn pneumatic open andclose
Pressure Range : 2 bar ~ 1x10 -4 mbar
Leak rate : 9x10-7 mbar.l/sec
Body materials : 316 S.S., PTFE
Max pressure : 2 bar
Operating temperature : Cylindr 80°C/

Body 100°C

Compressed air connecter : 2x 1/4"NPT
Compressed air pressure : 4-7 kg/cm 2
Model No.

A

B

C

D

Connector

Size”(mm)Parts No.

ISO80BV242P2

345

242

166

83

ISO80

3"(76.2)

3201163103133

ISO100BV254P2

395

254

223

111.5

ISO1004"(101.6)

3201183103133

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

86

BALL VALVES
Motor drive

Model No.

A

B

C

D

Connector

Size"(mm)Parts No.

KF25BV107E

231

107

114

79

KF25

1"(25.4)

320111310113A

KF40BV130E

258

130

119

79

KF40

1.5"(38.1)

320113310113A

KF50BV151E

318

151

114

57

KF50

2"(50.8)320114310113A

Features
Valve size for 1” to 2”(25.4mm ~ 50.8mm)
Flange : KF(NW)
Pressure Range : 2 bar ~ 1x10 -4 mbar
Leak rate: 9x10-7 mbar.l/sec
Body materials : 316 S.S., PTFE
Max temperature : Motor drive 80°C/ Body 100°C
Time to full open : 50Hz-13sec, 60Hz-12sec* The last letter of the P/N represents
the Motor Voltage :A=AC 110V , B= AC 220V ,C=AC 220 3Ø , D=AC 380 3Ø
Option : Limit switch
Note: Standard voltage 110V,other voltage see note*

87

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

BALL VALVESManually Operated, KF TYPE
Features
Flange : KF(NW)
Operation 1/4 Turn manual open and close
Pressure Range : 2 bar ~ 1x10-4 mbar
Leak rate: 9x10-7 mbar.l/sec
Wetted materials : 316 S.S., Viton, PTFE
Max pressure : 2 bar
Operating temperature : 100°C max

Model No.

A

B

C

Connector

Size"(mm)Parts No.

KF16BV092

63

92

140

KF16

3/4"(19.05)

3201093101131

KF25BV107

78

107

156

KF25

1"(25.4)

3201113101131

KF40BV130

107

130

181

KF40

1.5"(38.1)

3201133101131

KF50BV151

116

151

181

KF50

2"(50.8)3201143101131

KF80BV242

155

242

262

KF80

3"(76.2)

3201163101131

KF100BV254

170

254

340

KF100

4"(101.6)

3201183101131

Manually Operated, ISO TYPE
Features
Flange : ISO
Operation 1/4 Turn manual open and close
Pressure Range : 2 bar ~ 1x10-4 mbar
Leak rate: 9x10-7 mbar.l/sec
Materials : 316 S.S., Viton, PTFE
Max : 2 bar
Operating temperature : 100°C max

Model No.

A

B

C

Connector

Size"(mm)Parts No.

ISO80BV242

155

242

262

ISO80

3"(76.2)

3201163103131

ISO100BV254

170

254

340

ISO1004"(101.6)

3201183103131

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

88

CHECK VALVES
Vertical direction
Features
Flange : KF(NW)
Material: body : CF8M(316) /Seal : Viton
Temp rage :-5°C~100°C
Leak rate : 1x10 -5 mbar.l/sec
Pressure range : 1x10 -4mbar
Relief minimum pressure P : 7mbar
Peak pumping speed : 10000(L/min)
Installation position : Vertical

Model No.

A

B

C

Installation

Port

Weight (Kg)

Parts No.

KF40CV80

55

80

66

Vertical

KF40

0.7

34011301100

Any direction
Features
Flange : KF(NW)
Material: body : CF8M(316) /Seal : Viton
Temp rage :-5°C~100°C
Leak rate : 1x10 -5 mbar.l/sec
Pressure range : 1x10 -4mbar
Relief minimum pressure P : 7mbar
Pea pumping speed : 10000(L/min)
Installation position : Any

89

Model No.

A

B

C

Installation

Port

Weight (Kg)

Parts No.

KF40CV80S

55

80

66

Any

KF40

0.75

34011311100

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

VENT VALVES

Model No.

A

B

C

Port

Parts No.

KF10VVM

30

41.5

48

KF10

340207011

KF16VVM

30

41.5

48

KF16

340209011

KF25VVM

40

41.5

48

KF25

340211011

KF40VVM

55

41.5

48

KF40

340213011

Features
Flange:KF(NW)
Installation Angle: Any
Valve completely opened: 2 Turns
Venting Times(50L): 14 Sec
Pressure Range: 1×10 -8mbar ~ 1000mbar
Leak rate: 1x10 -9 mbar.l/s
Valve Body: 304S.S.
Plate: 304S.S.
Washer: Teflon
O-ring: Viton
Screw cap: Aluminum
Weight: 0.1kg

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

90

BAKEABLE ALL-METAL VALVES
Angle Valve

Features
Temperature operating range:
Bakeable to: 400°C(open), 300°C(close)
Pressure Range: 1x10-10mbar~1000mbar
All stainless steel construction
Bellows stem seal
Leak Rate: 5X10 -10 mbar.l/sec
Closure Torque:
CR16 First 150kg-cm, Maximum 250kg-cm
CR35 First 300kg-cm, Maximum 600kg-cm.
CR63 First 300kg-cm, Maximum 900kg-cm.

Life cycle (used for gasket sealing):

CR16: 300 times in mounting vertical/horizontal direction.
CR35: 300 times in mounting vertical/horizontal direction.
CR63: 300 times in mounting the vertical direction / 100
times in mounting the horizontal direction.

Orientation: Any position

Model No.

A

B

C

D

O.D.

Parts No.

AVBAK-CR16-M

38.1

121.2

131

38.1

19.05

300509030011

AVBAK-CR35-M

62.5

170

187

54

38.1

300513030011

AVBAK-CR63-M

105

266

294

76.2

63.5

300515030011

Straight-Through Valve

Features
Temperature operating range:
Bakeable to: 400°C(open), 300°C(close)
Pressure Range: 1x10-10mbar~1000mbar
All stainless steel construction
Bellows stem seal
Leak Rate: 5X10 -10 mbar.l/sec
Closure Torque:
CR35 First 300kg-cm, Maximum 600kg-cm.
CR63 First 300kg-cm, Maximum 900kg-cm.

Life cycle (used for gasket sealing):

CR35:300 times in mounting vertical/horizontal direction.
CR63:300 times in mounting the vertical direction /100 times in mounting the horizontal direction.

Orientation: Any position

91

Model No.

A

B

C

D

O.D.

Parts No.

STVBAK-CR35-M

152.4

86

125

184

38.1 / 25.4

307513030011

STVBAK-CR63-M

228.6

113.6

165

247

60.5 / 34

307515030011

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

BAKEABLE ALL-METAL VALVES
Angle Valve- Small Mini
Features
Temperature operating range:
Bakeable to : 400°C(open), 300°C(close)
Pressure Range : 1x10-10mbar~1000mbar
All stainless steel construction
Bellows stem seal
Leak Rate: 5X10 -10 mbar.l/sec
Closure Torque : CR16 First
90~120kg-cm, Maximum 200kg-cm.
Life Cycle(for Gasket Seal) : 1,000
Orientation : Any position

Model No.

A

A2

B

C

D

O.D.

Parts No.

AV BAK-CR16

38.1

40

85

94.5

38.1

19.05

30050993004A

Valve NameAII-Metal Valve- Small Mini

leak rates

Seat

Material
Temperature operating rage:Bakeable to

5 x 10-10 mbar.l/s

Body:316S.S. Gate Seal: OFCH Copper

Open

400°C

Close

300°C

Cryogenic to-200°C

Pressure Range

1x10-10 mbar ~ 1000 mbar

Life Cycle(for Gasket Seal)

1,000

Weight(kg)0.4

Closure Torque
Orientation

First 90kg-cm, Maximum 200kg-cm
Any position

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

92

TEFLON COATING VACUUM VALVE(TCVV)Technical data
Flanges

KF & ISO

Installation angle

Any position

Pressure range

1atm ~ 1x10 -7 mbar

Leak rate

1x10

Material of valve body

304S.S.

Material of lining

Teflon (Perma Shield Coating)

Poppet seal

Viton(other material available upon request)

Operating air pressure

4 ~ 6.5 kg/cm2

Solenoid

OptionReed sensor

Qty:2 (VDC4~24 ; VAC4~240 ; 5~40mA)-7

mbar.l/s

Features
Teflon coating and Teflon parts inside valve for process gases.
Very smooth surface of the coating layer.
Continuous use to 120°C in most applications.(The maximum working temperate of the valve INSDIE
AND OUTSID is 120 degree)
The coating layer is mechanically tough with excellent adhesion and abrasion resistance.
The coating layer is inert and will not absorb water or chemicals.
Fully opening for improved conductance.
Position sensors can be installed on the cylinder for valve open/close indication.
FFKM O-ring available upon request.
Manual operating or fail safe operating (closes in the event of air pressure loss) available upon request.

Applications
Teflon coating vacuum valve(TCVV) is a fully engineered device of stainless steel vacuum component withits durable and highly chemical resistant coating. The Teflon (Perma Shield Coating) lining is available in awide range of Htc’s standard vacuum valves from 1”(25)valve port diameter to 6”(150)port diameter.
With more options to get the job done than any other vacuum parts manufacturer and the ability to produce
customized design valves. TCVV can meet most of your corrosive fume exhaust duct and vent pipe
requirements.
TCVV can be applied in the following industries :mining, petrochemical, plastic industries, gas refining, power
plant, gas manufacture, electronic industries, pharmaceutical, semiconductor industries, optoelectronic
industries, solar cell industries etc.

93

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

TEFLON COATING VALVES
Angle valve-Pneumatic

Normally Close

Normally Open

Model No.

A"(mm)

B"(mm)AVTCS-KF25-P

2.03"(51.6)

6.53"(166.6) 2.24"(56.8)

1"(25.4)

AVTCS-KF25-P-N0 2.03"(51.6)

6.45"(165.9) 2.24"(56.8)

1"(25.4)

AVTCS-KF40-P

8.28"(210.2) 2.98"(75.8)

1.5"(38.1)

AVTCS-KF40-P-N0 2.4"(61)8"(203.2)

2.98"(75.8)

1.5"(38.1)

AVTCS-KF50-P

3.4"(86.3)

10.5"(267.6)

3.48"(88.4)

2"(50.8)

AVTCS-KF50-P-N0 3.4"(86.3)

10.4"(263.5)

3.48"(88.4)

2"(50.8)

2.4"(61)

C"(mm) O.D. "(mm)NoteNormally
Close
Normally
Open
Normally
Close
Normally
Open
Normally
Close
Normally
Open

Parts No.
300711110250
300711410250
300713110250
300713410250
300714110250
300714410250

Note:
1. Normally close : spring to close, air to open
Normally open : spring to open, air to close
2. Dimension in inch(mm) unless otherwise noted

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

94

TEFLON COATING VALVESY in-line valve-Pneumatic

Normally Close

Normally Open

Model No.

A"(mm)YVTCS-KF25-P

4.2"(106.8)

4.76"(120.96) 2.24"(56.8)

1"(25.4)

YVTCS-KF25-P-N0 4.2"(106.8)

4.76"(120.96) 2.24"(56.8)

1"(25.4)

YVTCS-KF50-P

7.43"(157.83) 3.48"(88.4)

2"(50.8)

7.3"(152.88)

3.48"(88.4)

2"(50.8)

YVTCS-ISO80-P2 10.5"(268.5) 8.5"(217.22)

4.48"(114)

3"(76.2)

YVTCS-ISO100-P2 13.4"(340.6) 10.4"(264.45)

5.96"(151.6)

4"(101.6) Double-Acting 304718240250

7"(130)YVTCS-KF50-P-N0 7"(130)B"(mm)

C"(mm)

O.D. "(mm)Note
Parts No.
Normally 304711110250
Close
Normally 304711410250
Open
Normally 304714110250
Close
Normally 304714410250
Open
Double-Acting 304716240250

Note:
1. Normally close : spring to close, air to open
Normally open : spring to open, air to close
Double-Acting : air to open, air to close
2. Dimension in inch(mm) unless otherwise noted95

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

TEFLON COATING VALVES
Angle Valve-Mannal

Model No.

A"(mm)

B"(mm)

C"(mm)

D"(mm)

O.D."(mm)Parts No.

AVTC-KF25-M

2.03"(51.6) 5.27"(133.9) 5.75"(146.2) 2.24"(56.8)

1"(25.4)

300711010050

AVTC-KF40-M

2.4"(61)

2.98"(75.8)

1.5"(38.1)

300713010050

AVTC-KF50-M

3.4"(86.3) 8.15"(207) 9.08"(230.7) 3.48"(88.4)

2"(50.8)300714010050

6.45"(163.8) 7.2"(183)

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

96

Angle Valves with Heating Jacket
Pneumatic ActuatedWith bellows, air to open, air to close

Features
Voltage : 110/220AVC
Temperature : 170°C*
Connecter : K Type Thermocouple & Plug
Wire Length: 2 m
Other size of heating jacket could
be on request.
*When set up the temperature , itshould consider about the material ofparts inside the valve

Port Connections: KF & ISO Flange
Model No.

97

A"(mm)

B"(mm)

C"(mm)

O.D."(mm)Voltage

Parts No.

HAVBS-KF25-P2 2.03"(51.6)

6.14"(155.9) 2.24"(56.8) 1.00"(25.4)

110300111710216

HAVBS-KF40-P2 2.40"(61)

7.57"(192.2) 2.98"(75.8) 1.50"(38.1)

110

300113710216

HAVBS-KF50-P2 3.4"(86.3)

9.59"(243.6) 3.48"(88.4) 2.00"(50.8)

110300114710216

HAVBS-ISO63-P2 3.26"(82.8) 10.85"(275.7) 3.92"(99.5) 2.50"(63.5)

110300115740216

HAVBS-ISO100-P2 4.47"(113.5) 13.86"(352.1) 5.97"(151.6) 4.00"(101.6)

110

300118740216

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Valves kit

Figure1

Figure2

Figure3

Spare Parts For 16~50 Manual Bellows Type Vacuum Valves
Kit P/N

Content

Figure0.75” / (16) ; 1.00” / (25)3001110K
3001130K

For Port Size inches/(MM)Poppet seal x 1 – Viton
Bonnet seal x 1 – Viton

13001140K

1.50” / (40)2.00” / (50)

Spare Parts For 16~50 Pneumatic Bellows Type Vacuum Valves (air to open , spring to close)
Kit P/N

Content

3001115K

Poppet seal x 1 – Viton
Bonnet seal x 1 – Viton
Shaft seal x 2 – NBRCylinder seal x 2 – NBR

3001135K
3001145K

FigureFor Port Size inches/(MM)0.75” / (16) ; 1.00” / (25)2

1.50” / (40)2.00” / (50)

Spare Parts For 16~50 Pneumatic Bellows Type Vacuum Valves (air to open , air to close)
Kit P/N

Content

3001116K

Poppet seal x 1 – Viton
Bonnet seal x 1 – Viton
Shaft seal x 2 – NBRCylinder seal x 2 – NBR

2Content

Figure3001136K
3001146K

FigureFor Port Size inches/(MM)0.75” / (16) ; 1.00” / (25)
1.50” / (40)2.00” / (50)Bellows Assembly Kit
Part No
300111000016BA
300113000016BA
300114000016BA

For Port Size inches/(MM)0.75” / (16) ; 1.00” / (25)

Bellows Assembly

31.50” / (40)2.00” / (50)

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

98

AL HV Valve Kit

Figure1

Figure2

Figure3

Spare Parts For 16~40 Manual Bellows Type Vacuum Valves
Kit P/N

Content

Figure0.75” / (16)3101090K
3101110K

For Port Size inches/(MM)Poppet seal x 1 – Viton
Bonnet seal x 1 – Viton

13101130K

1” / (25)
1.50” / (40)

Spare Parts For 16~50 Pneumatic Bellows Type Vacuum Valves (air to open , spring to close)
Kit P/N
3101095K
3101115K

Content
Poppet seal x 1 – Viton
Bonnet seal x 1 – Viton

FigureFor Port Size inches/(MM)0.75” / (16) ; 1.00” / (25)13101135K

1.50” / (40)2.00” / (50)

Spare Parts For 16~50 Pneumatic Bellows Type Vacuum Valves (air to open ,air to close)
Kit P/N

Content

3101096K

Poppet seal x 1 – Viton
Bonnet seal x 1 – Viton
Shaft seal x 2 – NBRCylinder seal x 2 – NBR

2Content

Figure3101116K
3101136K

FigureFor Port Size inches/(MM)0.75” / (16)1.00” / (25)
1.50” / (40)Bellows Assembly Kit
Part No
31010911002ABA
31011111002ABA

0.75” / (16)Bellows Assembly

31011311002ABA

99

For Port Size inches/(MM)Dimension in mm unless otherwise noted

31.00” / (25)
1.50” / (40)

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

GATE VALVES
Vacuum gate valves manufacturers
Htc vacuum (HIGHLIGHT TECH CORP.) gate valves are appropriate for both HV and UHV
applications and can be operated in pneumatic or in manual modes. Htc gate valves can be usedwith Cryo-Pumps, Turbomolecular Pumps or in any applications requiring clean, high life cycle,
and low maintenance processing. Htc gate valves are available in all flange configurations, KF,
ISO, ANSI, JIS, and CF.
Vacuum gate valve advanced service and support
Htc vacuum gate valve are available with various options toallow you to select exactly the features you need for yourapplications. You can add the roughing and gauge ports on
the basic valve style.
Please refer to the left photo :we added an elbow with a CF flange on the valve body tomeet the special requirement of the customer. If you haveany unique inquiry please contact us, we can discuss about
the details of port type, size and location.
There are some critical applications of valves in Lab andresearch center which need RGA (Residual Gas Analyzer)
data of valves to confirm the outgassing source of thesystem. Htc has the integrated RGA system with Inficon
MPH100M analyzer with industry-leading data collection
speed, minimum detectable partial pressure and signal-tonoise ratio. Htc is able to provide customers the RGA reportfor the price of the fixture and norminal labor charge.

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

100Note * L type: Linkage mechanism *B type: Ball groove mechanism
HV VALVEUHV VALVE
Shaft
KF
KF
KF
KF
KF
ISO
ISO
ISO
ISO
ISO
ISO
ISO
CF
CF
CF
CF CF CF CF CF
sea 10 16 25 40 50 63 80 100 160 200 250 320 16 35 50 CF
63 100 150 200 275 300

Size

Type
GATE VALVESUHV gate valve (L type)(Manual & Pneumatic)

Bellows

UHV gate valve (B type)(Manual & Pneumatic)

Bellows

UHV 3-position gate valve (B type)(Pneumatic)

Bellows

UHV gate valve limit switch (L type)(Pneumatic)

Bellows

UHV gate valve limit switch (B type)(Pneumatic)

Bellows

HV gate valve (L type)(Manual & Pneumatic)

Bellows

HV gate valve (B type)(Manual & Pneumatic)

Bellows

HV 3-position gate valve(B type)(Pneumatic)

Bellows

HV gate valve limit switch (L type)(Pneumatic)

Bellows

HV gate valve limit switch (B type)(Pneumatic)

Bellows

HV gate valve (Aluminum body)(Pneumatic)

O-ringPENDULUM VALVES
Pneumatic Pendulum Valve

O-ring3-position pneumatic Pendulum Valve O-ring
APC pneumatic Pendulum Valve

O-ringNote *EP: Electrolytic polishing surface treatment *Hard anodized: Hard anodized surface treatment
Size

Type

Shaft seal
systemStandard (S.S. body / gate)

Standard (AL body / gate)

Customized

32x222 46x236 50x336 56x496 32x222 46x236 50x336 56x496 50~200x2000 max

TRANSFER VALVES AND DOORS
Rectangular Transfer valve(EP)

Bellows

Rectangular Transfer valve (Hard anodized)

Bellows

upon
requestDoor valve(EP)101

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Note * L type: Linkage mechanism *B type: Ball groove mechanism
GATE VALVESCF Manually
UHV (L type)

CF Manually
UHV (B type)

Bellows

Bellows

KF Manually
HV (L type)

ISO Manually
HV (B type)

Bellows

Bellows

CF limit switch
pneumatic
UHV (L type)
Bellows

CF limit switch
pneumatic
UHV (L type)
Bellows

GATE VALVES

O-ring

CF Pneumatic
UHV (L type)

CF Pneumatic
UHV (B type)

Bellows
Bellows
GATE VALVESKF Pneumatic
HV (L type)

Bellows

ISO Pneumatic
HV (L type)ISO Pneumatic
HV (B type)

Bellows
Bellows
GATE VALVES

CF limit switch
pneumatic
UHV (B type)
Bellows

PENDULUM VALVESHV Pneumatic Pneumatic(Alumium body) Pendulum Valve
O-ring

CF Pneumatic
UHV (L type)

Bellows

KF limit switch
pneumatic
HV (L type)
Bellows

CF 3-position
pneumatic
UHV (B type)
Bellows

ISO 3-position
pneumatic
HV (B type)
Bellows

ISO limit switch ISO limit switch
pneumatic
pneumatic
HV (B type)
HV (L type)
Bellows
Bellows

TRANSFER VALVES AND DOORS

3-position APC pneumatic Transfer
pneumatic Pendulum Valve valve EP
Pendulum Valve
O-ringO-ring
Bellows

Transfer valve Door valve EP
Hard anodized
Bellows

Bellows

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

102

Gate Valve(Technical Data)
Linkage mechanism

Body Size(Type)103

Ball groove mechanism

Standard Flange O.D.(Weight)

Air Pressure

Actuated Frequency

ISO (kg)

CF(kg)

KF(kg)

Kg/cm2

Opening & Closing

1.5” (L)*69.5 (2.6)

50 (2.6)4~6

2 seconds

2” (L)*

86 (3.6)

75 (4)

4~6

2 seconds

2.5” (B)130 (7)113.6 (7)*4~63 seconds4” (B)

165 (10)151.6 (11)*4~63 seconds6” (B)

255 (18)202.5 (17)*4~65 seconds8” (B)

285 (27)253.2 (26)*4~65 seconds10” (L)

335 (59)336.5 (63)*4~65 seconds

12” (L)425 (88)355.6 (77)*4~6

7 seconds

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Linkage mechanism
PNEUMATIC ACTUATORBELLOWS ASSEMBLY
BONNET PLATELINK ASSEMBLYCARRIAGE ASSEMBLY
GATE
PORT

Ball groove mechanism
PNEUMATIC ACTUATORBELLOWS ASSEMBLY
BONNET PLATELINK ASSEMBLYCARRIAGE ASSEMBLY
GATE
PORT

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

104

Numbering System
This numbering system was developed to insure the valve supplied is exactly what you need. It
addresses questions concerning available features and options for the valve, and incorporates
that information in the valve number.

G

B

3 E

1

1

1

*

*

Valve Body Type
A=Bellows type(SS) (O) (Bonnet) **B=Bellows type(SS) (‘M) (Bonnet) **Solenoid
Gate O-Ring Material
Reed Limit
Type
Voltage sensor
switch1=VitonFlange Type
2=Buna-N
AA
110VAC
1=KF
3=Silicone
2= DINAB
110VACv
4=FFKM
3=CF
AC
110VACv
5=HFKM
4=ISO
BA
220VAC
5=ANSI
Type of ActuationBB
220VACv
6=VF
1=ManualBC
220VACv
7=VG
3= Pneumatic
A=ANSI (S) *4=Ball groove mechanism (M)CA
24VDC
B=ANSI (O) *5=Ball groove mechanism (P)
CB
24VDC
v
C=VG (S) *6=3-Position_B type
CC
24VDC
v
D=VG (O) *7=3-Position_L type
DA
12VDC
Size
Port Flange Neck Style DB
12VDCv
A=1.5” (40)1=Tapped Holes
DC
12VDC
v
B=2” (50)
Both SideNAv
C=2.5” (63)2=Neck Flange
NBv
D=3” (80)Both Side
E=4” (100)3=Neck Flange
EA 24VAC(50HZ)
F=6” (160)
Seal SideEB 24VAC(50HZ) v
G=8” (200)4=Neck Flange on
EC 24VAC(50HZ)v
H=10” (250) / 275 (13.25”)
Open Side
FA 24VAC(60HZ)
J=12” (300_14”)
FB 24VAC(60HZ) v
K=10” (250) Flange OD=304 (12”)
Q=12” (300_14.5”)
FC 24VAC(60HZ)v
L=14” (350)NC*1v
M=16” (400)N=20” (500)SpecialP=26” (630)
S0~S9 Special type , roughing port
S=1” (25)Seal Side 1Kg
S1
Note:
Pressure difference
13.25”_14”_12”_14.5” are the sizes CF/CR Flanges.

Note:* ANSI / VG (S) is flange with o-ring on seal side.
* ANSI / VG (O) is flange with o-ring on open side.
** Bellows type (SS) (M) is bonnet with Metal seal.
** Bellows type (SS) (O) is bonnet with o-ring seal.

105

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

UHV Gate Valve (Unlubricated mechanism)
Body

304 S.S.
Linkage type304 S.S.

Carriage Ball type Size under 10”
Material
Gate

Ball type Size above 10”(included)

SUS304、A6061-T6

Linkage type
Ball type Size under 10”
Ball type Size above 10”(included)

304 S.S.
A6061-T6

Bellows

AM350

size under 4” (included)

100,000

size above 4”50,000

Cycle life

Helium leak rates at 1 atm differential < 5×10-10 mbar. l /sec for gasket seal

Valve body (metal bonnet seal)

Open

200°C

Closed150°C

Pneumatic

80 °C

Manual200°C

Bake Temperature
Actuator
Pressure Range (mbar)

1x10-10 ~1000

Maximum P (mbar)

27 before opening
Gate

Viton O-ring

BonnetOFHC copper gasket

Standard Seal
Actuator

Pneumatic or ManualCompressed air supply
Tube connection
Pressure range

Ø6 mm 2
4~6 Kg/cm (overpressure)Surface Treatment

Scotch PolishedOptionsa. Position indicatorc. Roughing port

b. Pneumatic control solenoid valve
d. Other material Gate O-ring seal
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

106

UHV Gate Valve (Linkage mechanism)
CF Flange(Mini)
Manual series (with Bellows, Metal Bonnet Seal)

Parts
No.
GVB-SS-CF35-M GB3A111
GVB-SS-CF50-M GB3B111

Port
Dia.
37.5
50

Bonnet
seal
Metal
Metal

Model No.
GVB-SS-CF35-M
GVB-SS-CF50-M

A
45.4
56

B
52
56

Model No.

Parts No.
GB3A111
GB3B111

C
51
51

Flange
O.D.
69.5
86

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
58.7
M6*6
170
10
72.4
M8*8
210
1

D
63
81

E
90
104

F
88
123

G
119
167

H
113
129

L
232
296

UHV Gate Valve (Linkage mechanism)

CF Flange(Mini)
Pneumatic series (with Bellows, Metal Bonnet Seal)

Model No.
GVB-SS-CF35-P
GVB-SS-CF50-P

Parts
No.
GB3A311
GB3B311

Model No. Parts No. A
GVB-SS-CF35-P GB3A311 45.4
GVB-SS-CF50-P GB3B311 56

107

Dimension in mm unless otherwise noted

Port
Dia.
37.5
50
B
52
56

Bonnet
seal
Metal
Metal

Flange
O.D.
69.5
86

C
53
53

D
63
81

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
58.7
M6*6
170
10

72.4
M8*8
210
E
90
104

F
88
123

G
119
167

H
135
154

L
254
321

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

UHV Gate Valve (Linkage mechanism)

CF Flange(Large)
Pneumatic series (with Bellows, Metal Bonnet Seal)

Parts
No.
GVB-SS-CF250-P GB3K311

Port
Dia.
250

Bonnetseal
Metal

Flange
O.D.
304

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
284
M8*32
360
16

GVB-SS-CF275-P GB3H311

250

Metal

336.5

306.3

M10*30360

24

GVB-SS-CF300-P GB3J311

305

Metal

355.6

325.5

M10*30360

2Model No.

Model No.

Parts No.

A

B

C

D

E

F

G

H

L

GVB-SS-CF250-P GB3K311 106.4

95

114

323

360

505

690

340

1030

GVB-SS-CF275-P GB3H311 106.4

95

114

323

360

505

690

340

1030

GVB-SS-CF300-P GB3J311 112.6

105

140

367

415

554

750

361

1111

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

108

UHV Gate Valve (Ball groove mechanism)
CF Flange
Manual series (With Bellows,Metal Bonnet Seal)

Parts
No.
GB3C411

Port
Dia.
63.

Bonnetseal
Metal

FlangeO.D.
113.6

GVBB-SS-CF100-M GB3E411

10

etal

GVBB-SS-CF150-M GB3F41

15

GVBB-SS-CF200-M GB3G41

Model No.
GVBB-SS-CF63-M

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
92.

210

51.6

130.3

10

0

etal

202.5

181

M8*2

10



200

etal

53.2

231.8

M8*2

10

GVBB-SA-CF250-M GB3K41

25

etal

04

8

8*32

60



GVBB-SA-CF275-M GB3H41

25

eta

336.5

306.

M10*3060Model No.

109

Parts No.

A

B

C

D

E

F

G

H

L

GVBB-SS-CF63-M GB3C411

65

68

70

107

143

158

207

160

367

GVBB-SS-CF100-M GB3E411

69.6

68

70

146

182

222

297

160

457

GVBB-SS-CF150-M GB3F411

79

70

78

204

238

306.5

407

183

590

GVBB-SS-CF200-M GB3G411

84.4

70

78

245

282

382

506

224

730

GVBB-SA-CF250-M GB3K411

98

75

99

321

360

500

650

340.5 990.5

GVBB-SA-CF275-M GB3H411

98

75

99

321

360

500

650

340.5 990.5

GVBB-SA-CF300-M GB3J411 103

85

99

363

400

580

751.5 340.5 1092

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

UHV Gate Valve (Ball groove mechinism)
CF Flange
Pneumatic Series (With Bellows,Metal Bonnet Seal)

Model No.

Parts
No.

Port
Dia.

FlangeO.D.

63.7

Bonnet
seal
Metal

113.6

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
92.1
210
M8*8
18

GVBB-SS-CF63-P

GB3C511

GVBB-SS-CF100-P

GB3E511

102

Metal

151.6

130.3

M8*16

210

20

GVBB-SS-CF150-P

GB3F511

153

Metal

202.5

181

M8*20

210

22

GVBB-SS-CF200-P

GB3G511

200

Metal

253.2

231.8

M8*24

210

24

GVBB-SA-CF250-P

GB3K511

255

Metal

304

284

M8*32

360



GVBB-SA-CF275-P

GB3H511

255

Metal

336.5

306.3

M10*30360

*9%%6$&)3*%-0HWDO0 

Model No.

Parts No.

A

B

C

D

E

F

G

H

L

GVBB-SS-CF63-P

GB3C511

65

68

75

107

143

158

207

159

366

GVBB-SS-CF100-P

GB3E511

69.6

68

94

146

182

222

297

170

467

GVBB-SS-CF150-P

GB3F511

79

70

94

204

238

306.5

407

198

605

GVBB-SS-CF200-P

GB3G511

84.4

70

94

245

282

382

506

255

761

GVBB-SA-CF250-P

GB3K511

98

75

114

321

360

500

650

282.5

932.5

GVBB-SA-CF275-P

GB3H511

98

75

114

321

360

500

650

282.5

932.5

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

110

UHV 3 - Position Throttle Gate Valve (Ball groove mechinism)
Features

Use lockable cylinder, gate plate could precisely stop at alternative position.
Alternative position is set by reed sensor.
Good reproducibility of gate plate position, tolerance ±1%.
Procedure control is programmable and flexible.
Body

304 S.S.
Linkage type

SUS304

Ball type Size above 10”(included)
Linkage type
Ball type Size under 10”
Ball type Size above 10”(included)

SUS304、A6061-T6

Carriage Ball type Size under 10”
Material
Gate

SUS304
A6061-T6

Bellows

AM350

size under 4” (included)

100,000

size above 4”50,000

Cycle life
Helium leak rates at 1 atm differential< 5×10-10 mbar. l /sec for gasket seal
Open

200°C Viton bonnet seal

Closed150°C Viton bonnet seal

Bake Temperature
Pressure Range (mbar)

1x10-10 ~1000

Maximum

27 before opening

P (mbar)

Gate

Viton O-ring

BonnetOFHC copper gasket

Standard Seal

111

Actuator

Pneumatic

Compressed air supply
Tube connection
Pressure range

Ø6 mm 2
4~6 Kg/cm (overpressure)Surface Treatment

Scotch PolishedOptionsa. Position indicatorb. Pneumatic control solenoid valvec. Roughing port
d. Other material Gate O-ring seal

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

UHV 3 - Position Throttle Gate Valve
CF Flange
Pneumatic Series

Port
Dia.

Bonnet Flange
seal
O.D.

GVBB3P-SS-CF63-P GB3C611CB

63.7

Metal

113.6

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
92.1
210
M8*8
18

GVBB3P-SS-CF100-P GB3E611CB

102

Metal

151.6

130.3

M8*16

210

20

GVBB3P-SS-CF150-P GB3F611CB

153

Metal

202.5

181

M8*20

210

22

GVBB3P-SS-CF200-P GB3G611CB

200

Metal

253.2

231.8

M8*24

210

24

Model No.

Parts
No.

Model No.

Parts No.

A

B

C

D

E

F

G

H

L

GVBB3P-SS-CF63-P

GB3C611CB

65

68

77

107

143

158

207

200.5

407.5

GVBB3P-SS-CF100-P

GB3E611CB

69.6

68

98

146

182

222

297

215

512

GVBB3P-SS-CF150-P

GB3F611CB

79

70

98

204

238

306.5

407

239

646

GVBB3P-SS-CF200-P

GB3G611CB

84.4

70

98

245

282

382

506

320.5 826.5

Standard voltage DC24V with Solenoid reed sensor

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

112

HV Gate Valve (Lubricated mechanism)
Body

304 S.S.
Linkage type

SUS304

Ball type Size above 10”(included)

SUS304、A6061-T6

Linkage type
Ball type Size under 10”
Ball type Size above 10”(included)

SUS304

Carriage Ball type Size under 10”
Material
Gate
Bellows
size under 8” (included)
Cycle life
size above 8”
Helium leak rates at 1 atm differential

A6061-T6

AM350
L-typeB-typeL-typeB-type200,000 cycles
300,000 cycles
50,000 cycles
200,000 cycles< 2×10-9 mbar.l /sec for O-ring seal
Valve body

150°C

Manual and pneumatic actuator

80°C

Bake Temperature

Pressure Range (mbar)
Maximum

P (mbar)Standard Seal

113

1x10-8 ~1000
27 before opening
Gate

Viton O-ring

BonnetViton O-ringActuator

Pneumatic or ManualCompressed air supply
Tube connection
Pressure range

Ø6 mm
4~6 Kg/cm2 (overpressure)Surface Treatment

Scotch PolishedOptionsa. Position indicatorb. Pneumatic control solenoid valvec. Roughing port
d. Other material Gate O-ring seal

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV Gate Valve (Linkage mechanism)

KF Flange(Mini)
Manual series (with Bellows, Elastomer Bonnet Seal)

Model No.
GVB-SS-KF40-M
GVB-SS-KF50-M
Model No.
GVB-SS-KF40-M
GVB-SS-KF50-M

Parts No.
GA1A112GA1B112
Parts No.
GA1A112GA1B112A
50
59

Bonnet seal
Viton
Viton
B
52
56

C
51
51

Flange O.D.
55
75
D
63
81

E
90
104

F
88
123

Port Dia.
38
50
G
119
167

H
113
129

L
232
296

KF Flange(Mini)
Pneumatic series (with Bellows, Elastomer Bonnet Seal)

Model No.
GVB-SS-KF40-P
GVB-SS-KF50-P
Model No.
GVB-SS-KF40-P
GVB-SS-KF50-P

Parts No.
GA1A312
GA1B312
Parts No.
GA1A312
GA1B312A
50
59

Port Dia.
38
50
B
52
56

C
53
53

Bonnet seal
Viton
Viton
D
63
81

E
90
104

F
88
123

Flange O.D.
55
75
G
119
167

H
135
154

L
254
321

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

114

HV Gate Valve (Linkage mechanism)

ISO Flange(Large)
Pneumatic series (with Bellows, Elastomer Bonnet Seal)

GVB-SS-ISO250-P

Parts
No.
GA4H311

Port
Dia.
250

Bonnet Flange
seal
O.D.
Viton
335

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
310
M10*12150
19

GVB-SS-ISO320-P

GA4J311

305

Viton

425

395

M12*12Model No.

Model No.

115

Parts No.

150

20

A

B

C

D

E

F

G

H

L

GVB-SS-ISO250-P GA4H311 95.4

95

114

323

360

505

690





GVB-SS-ISO320-P GA4J311 103.6

105

140

367

415

554

750

361

1111

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV Gate Valve (Ball groove mechanism)
ISO Flange
Manual series

Parts
No.
GA4C411

Port
Dia.
63.7

Bonnet Flange
seal
O.D.
Viton
130

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
100
12
110
M8*4

GVBB-SS-ISO100-M GA4E411

102

Viton

165

145

M8*8

100

12

GVBB-SS-ISO160-M GA4F411

153

Viton

225

200

M10*8

100

16

GVBB-SS-ISO200-M GA4G411 200

Viton

285

260

M10*12150

16

GVBB-SA-ISO250-M GA4H411

25

Vito

10

10*12

GVBB-SA-ISO320-M GA4J411 305

Viton

425

395

M12*12200

20Model No.
GVBB-SS-ISO63-M

Model No.

Parts No.

A

B

C

D

E

F

G

H

L

GVBB-SS-ISO63-M GA4C411 53

68

70

107

128

158

207

160

367

GVBB-SS-ISO100-M GA4E411 53.6

68

70

146

170

222

297

160

457

GVBB-SS-ISO160-M GA4F411 67

68

78

204

220

306.5

407

183

590

GVBB-SS-ISO200-M GA4G411 67

70

78

245

267

383

507

224

731

GVBB-SA-ISO250-M GA4H411 80

75

99

321

340

500

650

340.5 990.5

GVBB-SA-ISO320-M GA4J411 86

85

99

363

395 580

751.5 340.5 1092

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

116

HV Gate Valve (Ball groove mechinism)
ISO Flange
Pneumatic series

Parts
No.
GA4C511

Port
Dia.
63.7

Bonnet Flange Bolt
Bolt
Torque Thread
seal
O.D. P.C.D. Size * No. (kg~cm) Depth
12
Viton
130
110
M8*4
100

GVBB-SS-ISO100-P GA4E511

102

Viton

165

145

M8*8

100

12

GVBB-SS-ISO160-P GA4F511

153

Viton

225

200

M10*8

100

16

GVBB-SS-ISO200-P GA4G511

200

Viton

285

260

M10*12150

16

GVBB-SA-ISO250-P GA4H511

25

Vito

35

10*12

50

GVBB-SA-ISO320-P GA4J511

305

Viton

425

395

M12*12200

20Model No.
GVBB-SS-ISO63-P

Model No.

117

Parts No.

A

B

C

D

E

F

G

H

L

GVBB-SS-ISO63-P GA4C511 53

68

75

107

128

158

207

159

366

GVBB-SS-ISO100-P GA4E511 53.6

68

94

146

170

222

297

170

467

GVBB-SS-ISO160-P GA4F511 67

68

94

204

220

306.5

407

198

605

GVBB-SS-ISO200-P GA4G511 67

70

94

245

267

383

507

255

762

GVBB-SA-ISO250-P GA4H511 80

75

114

321

340

500

650

282.5 932.5

GVBB-SA-ISO320-P GA4J511 86

85

140

363

395

580

751.5 306.5 1058

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV 3-Position Throttle Gate Valve (Ball groove mechanism)
Features
Use lockable cylinder, gate plate could precisely stop at alternative position.
Alternative position is set by reed sensor.
Good reproducibility of gate plate position, tolerance ±1%.
Procedure control is programmable and flexible.
SUS304

Body
Linkage type

SUS304

Ball type Size above 10”(included)

SUS304、A6061-T6

Linkage type
Ball type Size under 10”
Ball type Size above 10”(included)

SUS304

Carriage Ball type Size under 10”
Material
Gate

A6061-T6

Bellows

AM350

size under 8” (included)

300,000

size above 8”200,000

Cycle life
Helium leak rates at 1 atm differential< 2×10-9 mbar. l /sec for O-ringOpen

200°C Viton bonnet seal

Closed150°C Viton bonnet seal

Bake Temperature
Pressure Range (mbar)
Maximum

P (mbar)

1x10-8 ~1000
27 before opening
Gate

Viton O-ring

BonnetViton O-ringStandard Seal
Actuator

Pneumatic

Compressed air supply
Tube connection
Pressure range

Ø6 mm 2
4~6 Kg/cm (overpressure)Surface Treatment

Scotch PolishedOptionsa. Position indicatorb. Pneumatic control solenoid valvec. Roughing port
d. Other material Gate O-ring seal
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

118

HV 3-Position Throttle Gate Valve

ISO Flange
Pneumatic series

Model No.

Parts
No.

Port
Dia.

GVBB3P-SS-ISO63-P

GA4C611CB

63.7

Bonnet Flange Bolt
Bolt
Torque Thread
seal
O.D. P.C.D. Size * No. (kg~cm) Depth
100
Viton
130
110
12
M8*4

GVBB3P-SS-ISO100-P

GA4E611CB

102

Viton

165

145

M8*8

100

12

GVBB3P-SS-ISO160-P

GA4F611CB

153

Viton

225

200

M10*8

100

16

GVBB3P-SS-ISO200-P GA4G611CB

200

Viton

285

260

M10*12150

16

Model No.

Parts No.

A

B

C

D

E

F

G

H

L

GVBB3P-SS-ISO63-P

GA4C611CB

53

68

77

107

128

158

207

200.5 407.5

GVBB3P-SS-ISO100-P

GA4E611CB

53.6

68

98

146

170

222

297

215

512

GVBB3P-SS-ISO160-P

GA4F611CB

67

68

98

204

220

306.5

407

239

646

GVBB3P-SS-ISO200-P

GA4G611CB

67

70

98

245

267

383

507

291

798

Standard voltage DC24V with Solenoid & reed sensor.

119

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

UHV Gate Valve - Limit Switch
SUS304

Body
Carriage

Material

Gate

Cycle life

Linkage type
Ball type Size under 10”
Ball type Size above 10”(included)
Linkage type
Ball type Size under 10”
Ball type Size above 10”(included)

SUS304

SUS304、A6061-T6

SUS304
A6061-T6

Bellows

AM350

size under 4” (included)

100,000

size above 4”50,000Helium leak rates at 1 atm differential< 5×10-10 mbar. l /sec for gasket seal
Open

200°C

Bake Temperature

Valve body (metal bonnet
seal)

Closed150°C

Actuator

Pneumatic

80 °C

Pressure Range (mbar)
Maximum

P (mbar)Standard Seal
Compressed air supply tube
connection pressure range
Actuator
Connector
Surface Treatment
Options

1x10-10 ~1000
27 before opening
Gate

Viton O-ring

BonnetOFHC copper gasket

Ø6 mm
4~6Kg/cm2 (overpressure)Pneumatic
3A 110VAC

D-sub Female 9 pins
Current Rating

5A 24VDC

Scotch Polisheda. Pneumatic control solenoid valve
b. Roughing port
c. Other material Gate O-ring seal

WiringPin definition
1:COM(Close)
2:N.O(Close)
3:N.C(Close)
4:Empty
5:Empty
6:COM(Open)
7:N.O(Open)
8:N.C(Open)
9:Empty
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

120

UHV Gate Valve (Linkage mechanism)-Limit Switch
CF Flange(Mini)
Pneumatic series (with Bellows, Metal Bonnet Seal)

Parts
Port
No.
Dia.
GVBLS-SS-CF35-P GB3A311NB 37.5

Bonnet Flange
seal
O.D.
Metal
69.5

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
170
58.7
M6*6
10

GVBLS-SS-CF50-P GB3B311NB 50

Metal

72.4

M8*8

Model No.

Model No.

121

86



210

Parts No.

A

B

C

D

E

F

G

GVBLS-SS-CF35-P GB3A311NB

45.4

52

53

63

90

88

119

166.5 285.5

GVBLS-SS-CF50-P GB3B311NB

56

56

53

81

104

123

167

185.5 352.5

Dimension in mm unless otherwise notedH

L

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

UHV Gate Valve (Linkage mechanism) - Limit Switch
CF Flange(Large)
Pneumatic series (with Bellows, Metal Bonnet Seal)

Parts
Port
No.
Dia.
GVBLS-SS-CF275-P GB3H311NB 250

Bonnet Flange
seal
O.D.
Metal
336.5

Model No.
Parts No.
A
GVBLS-SS-CF275-P GB3H311NB 106.4

B
95

Parts
Port
No.
Dia.
GVBLS-SS-CF300-P GB3J311NB 305

Bonnet Flange
seal
O.D.
Metal
355.6

Model No.

Model No.

Model No.
Parts No.
A
B
GVBLS-SS-CF300-P GB3J311NB 112.6 105

C
114

C
140

D
323

D
367

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth
360
306.5 M10*30
24
E
360

F
505

G
690

H
340

L
1030

Bolt
Bolt
Torque Thread
P.C.D. Size * No. (kg~cm) Depth360
325.7 M10*30
E
415

F
554

G
750

H
361

L
1111

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

122

UHV Gate Valve (Ball groove mechinism) - Limit Switch

CF Flange
Pneumatic series

Parts
Port
No.
Dia.
GVBBLS-SS-CF63-P GB3C511NB 63.7

Bonnet Flange Bolt
Bolt
Torque Thread
seal
O.D. P.C.D. Size * No. (kg~cm) Depth
210
Metal 113.6
92.1
M8*8
18

GVBBLS-SS-CF100-P GB3E511NB 102

Metal

151.6

130.3

M8*16

210

20

GVBBLS-SS-CF150-P GB3F511NB 153

Metal

202.5

181

M8*20

210

22

GVBBLS-SS-CF200-P GB3G511NB 200

Metal

253.2

231.8

M8*24

210

24

Model No.

Model No.

123

Parts No.

A

B

C

D

E

F

G

H

L

GVBBLS-SS-CF63-P GB3C511NB 65

68

75

107

143

158

207

159

366

GVBBLS-SS-CF100-P GB3E511NB 69.6

68

94

146

182

222

297

170

467

GVBBLS-SS-CF150-P GB3F511NB 79

70

94

204

238

306.5 407

198

605

GVBBLS-SS-CF200-P GB3G511NB 84.4

70

94

245

282

382

198

704

Dimension in mm unless otherwise noted506

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV Gate Valve - Limit switch(Iubricated mechanism)

SUS304

Body
Carriage

Material

Gate

Cycle life

Linkage type
Ball type Size under 10”
Ball type Size above 10”(included)
Linkage type
Ball type Size under 10”
Ball type Size above 10”(included)

SUS304
SUS304、A6061-T6

SUS304
A6061-T6

Bellows

AM350

size under 8” (included)

300,000

size above 8”50,000Helium leak rates at 1 atm differential < 2×10-9 mbar. l /sec for O-ring seal
Bake Temperature

Valve body
Actuator

Pressure Range (mbar)
Maximum

P (mbar)Standard Seal

Open

150°C

Closed150°C

Pneumatic

80 °C

1x10-8 ~1000
27 before opening
Gate

Viton O-ring

BonnetViton O-ringCompressed air supply tube
connection pressure range

Ø6 mmActuator

Pneumatic

Connector

D-sub Female 9 pins
Current Rating

Surface Treatment

Scotch PolishedOptionsa. Pneumatic control solenoid valve
b. Roughing port
c. Other material Gate O-ring seal

4~6Kg/cm 2 (overpressure)
3A 110VAC
5A 24VDC

WiringPin definition
1:COM(Close)
2:N.O(Close)
3:N.C(Close)
4:Empty
5:Empty
6:COM(Open)
7:N.O(Open)
8:N.C(Open)
9:Empty
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

124

HV Gate Valve(Linkage mechanism)-Limit Switch
KF Flange (Mini)
Pneumatic Series (with Bellows, Elastomer Bonnet Seal)

Port
Dia.
38

Bonnetseal

GVBLS-SS-KF40-P

Parts
No.
GA1A312NB

Viton

FlangeO.D.
55

GVBLS-SS-KF50-P

GA1B312NB

50

Viton

75

Model No.

Model No.

125

Parts No.

A

B

C

D

E

F

G

GVBLS-SS-KF40-P GA1A312NB

50

52

53

63

90

88

119

166.5 285.5

GVBLS-SS-KF50-P GA1B312NB

59

56

53

81

104

123

167

185.5 352.5

Dimension in mm unless otherwise notedH

L

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

HV Gate Valve (Linkage mechanism)-Limit Switch
ISO Flange (Large)
Pneumatic Series (with Bellows, Elastomer Bonnet Seal)

Parts
Port
No.
Dia.
GVBLS-SS-ISO250-P GA4H311NB 250

Bonnet Flange Bolt
Bolt
Torque Thread
seal
O.D. P.C.D. Size * No. (kg~cm) Depth
Viton
150
335
310
M10*1219

Model No.
Parts No.
A
GVBLS-SS-ISO250-P GA4H311NB 95.4

B
95

Model No.

C
114

D
323

E
360

F
505

G
690

H
340

L
1030

Parts
Port Bonnet Flange Bolt
Bolt
Torque Thread
No.
Dia.
seal
O.D. P.C.D. Size * No. (kg~cm) Depth
150
GVBLS-SS- ISO320-P GA4J311NB 305 Viton
425
395
M12*1220
Model No.

Model No.
Parts No.
A
GVBLS-SS-ISO320-P GA4J311NB 103.6

B
105

C
140

D
367

E
415

F
554

G
750

H
361

L
1111

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

126

HV Gate Valve (Ball groove mechinism) - Limit Switch
ISO Flange
Pneumatic Series (with Bellows, Elastomer Bonnet Seal)

Parts
Port Bonnet Flange Bolt
Bolt
Torque Thread
No.
Dia.
seal
O.D. P.C.D. Size * No. (kg~cm) Depth100
GVBBLS-SS-ISO63-P GA4C511NB 63.7 Viton
130
110
M8*4
12
Model No.

GVBBLS-SS-ISO100-P GA4E511NB 102

Viton

165

145

M8*8

100

12

GVBBLS-SS-ISO160-P GA4F511NB 153

Viton

225

200

M10*8

100

16

GVBBLS-SS-ISO200-P GA4G511NB 200

Viton

285

260

M10*12150

16

Model No.

127

Parts No.

A

B

C

D

E

F

G

H

L

GVBBLS-SS-ISO63-P GA4C511NB 53

68

75

107

128

158

207

159

366

GVBBLS-SS-ISO100-P GA4E511NB 53.6

68

94

146

170

222

297

170

467

GVBBLS-SS-ISO160-P GA4F511NB 67

68

94

204

220

306.5

407

198

605

GVBBLS-SS-ISO200-P GA4G511NB 67

70

94

245

267

383

507

198

705

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Gate Valve Kit
Ball Groove Mechanism
Type

ISO

CF

Size Actuation Kit No. Content
M
GA4C411K
63
P/LS
GA4C511K
3P
GA4C611K
M
GA4E411K
100
P/LS
GA4E511K
3P
GA4E611K
M
GA4F411K
160
P/LS
GA4F511K
Figure 1
3P
GA4F611K
M
GA4G411K
200
P/LS
GA4G511K
3P
GA4G611K
M
GA4H411K
250
P
GA4H511K
M
GA4J411K
320
P
GA4J511K
M
GB3C411K
63
P/LS
GB3C511K
3P
GB3C611K
M
GB3E411K
100
P/LS
GB3E511K
3P
GB3E611K
M
GB3F411K
150
P/LS
GB3F511K
3P
GB3F611K
Figure 2M
GB3G411K
200
P/LS
GB3G511K
3P
GB3G611K
M
GB3K411K
250
P
GB3K511K
M
GB3H411K
275
P
GB3H511K
M
GB3J411K
300
P
GB3J511K

Linkage Mechanism
Type

KF

ISO

CF

Size Actuation Kit No. Content
M
GA1A112K
40P
GA1A312K
M
GA1B112K
50
Figure 1P
GA1B312K
250
P/LS
GA4H311K
320
P/LS
GA4J311K
M
GB3A111K
35
P/LS
GB3A311K
M
GB3B111K
50
P/LS
GB3B311K Figure 2
250
P
GB3K311K
275
P/LS
GB3H311K
300
P/LS
GB3J311K

Figure 1

Gate seal x 1 (Viton)
Bonnet seal x 1 (Viton)

Figure 2

Gate seal x 1 (Viton)
Bonnet seal x 1 (OFHC Copper)

M : Manual
P : Pneumatic

LS : Limit Switch
3P : 3 Position
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

128

HV Aluminum Gate Valve
Specification
Model : ISO-F 250 GV
Pressure Range:10 -7 mbar to 1 bar
Leak rate : <2x10-8 mbar. l/sec
Differential pressure on the plate: 1 bar
Differential pressure at opening: 30 mbar
Material:
Top valve body : 304S.S.
Bottom valve body : 6061-T6 aluminum
Shaft : 304S.S.
Carriage : 6061-T6 aluminum
Bonnet / gate / shaft seals : Viton

Max temperature : Cylinder 80°C
Body 120°C
Compressed air : 4-7 bar
Compressed air connection : M5
Mounting position : Any
Conductance : 22,000 l/s
Closing time : 5.0 s
Opening time : 5.0 s
Cycle until first service : 100,000
Weight : 27.0 Kg

HV TYPE
Aluminum Body, without bellows

Model No.

Parts No.

*9%6 -AA-ISO250-P G14H511NA

Accessory
Solenoid (Optional)
Sensor (Standard)

129

Dimension in mm unless otherwise noted

Sensor

A

B

C

D

E

F

YES

100 Ø352 58.5 261

86

176 455 422 877

Description
DC24V
AC110V
VAC220V
DC4-24(V) or AC4-240(V), 5-40 mA

G

H

L

Parts No.
1000C0F202
1000C0F203
1000C0F204
60010021

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

PENDULUM VALVESHTC vacuum pendulum valve is to install a large throttle valve between the process vacuum
chamber and the turbine molecular pump inlet. The current pendulum valve design are
constructed of body material blank or hard anodized for corrosion resistant and less dust.
It's vailable with ISO200,ISO 250,ISO320 flanges in sizes 8",10",12" and can be operated inpneumatic,3-Position or APC mode. This vacuum valve is usually designed as a gate valve or apendulum valve, applications include OLED, FPD, and PV industries manufacturing systems.

Pneumatic pendulum valve
Design principle / features :Low Vibration
Corrosion resistantEasy disassemblyMore Differential pressure
Material

Body
Gate

Life Cycle
Helium leak rates at 1 atm differential

Bake Temperature

Pressure Range

Less dust
A6061-T6
A6061-T6
200,000 cycles

Body
Aluminum
Body
Aluminum ,hard anodized
Body

120°C

Actuator

80°C

Solenoid valve

50°C

Aluminum
Aluminum,
Hard anodized

1×10-8 mbar to 1.2 bar<1×10-9 mbar .l /sec
<1×10-5 mbar .l /sec

1×10-6 mbar to 1.2 bar

Maximum P

1.2 barMaximum P during opening

5 mbarCompressed air pressure

4 ~ 6 Kg/cm2

Opening / Closing timeStandard Seal

ISO 200

ISO 250

ISO 320

1.2/1.2

1.2/1.2

2.0/2.0

Gate

Viton O-ring

BonnetViton O-ringActuator
WeightMounting position
Options

Electro-Pneumatic
ISO 200

ISO 250

ISO 320

21Kg

31Kg

51Kg

Horizontal & Verticala. Other material of Gate O-ring sealb. Heater
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

130

Control Wiring Externa

CLOSE

OPEN

OPEN_FN

0V

CLOSE_FN+24VDC

131

Dimension in mm unless otherwise noted[Note] 24AWG wire is recommended.

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

PENDULUM VALVE
Pneumatically ActuatedAttached Reed Sensor & Solenoid


(B)

G

H

A

Port Dia.
Seal side

F

E

W

C

D

Port
Dia.
PVSSV-A-ISO200-P2/24VDC GP113A214CB 200

BonnetSeal
Viton

Flange
O.D.
300

Bolt
Bolt
ThreadP.C.D. Size*No Depth
260 M10*12
16

PVSSV-A-ISO250-P2/24VDC GP114A214CB

254

Viton

335

310

M10*1216

PVSSV-A-ISO320-P2/24VDC GP115A214CB

318

Viton

428

395

M12*1218

Model No.

Model No.

Part No.

A

B

C

D

E

F

G

H

I

W

PVSSV-A-ISO200-P2/24VDC 88

171.5

72

16

510

360

208

160

368

R150

PVSSV-A-ISO250-P2/24VDC 100

264

80

20

628

453

246

200

446

R190

PVSSV-A-ISO320-P2/24VDC 120

284

96

24

752

538

231

302

533

R230

* with reed sensors , with standard solenoid voltage DC24V

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

132

Pneumatically ActuatedAttached Reed Sensor & Solenoid
Standard Surface Treatment: hard anodized


(B)

G

H

A

Port Dia.
Seal side

F

E

W

C

D

Port Bonnet Flange
Dia. SealO.D.
PVSSV-HA-ISO200-P2/24VDC GP113A213CB 200
Viton
300

Bolt
Bolt
ThreadP.C.D. Size*No Depth
260 M10*12
16

PVSSV-HA-ISO250-P2/24VDC GP114A213CB

254

Viton

335

310

M10*1216

PVSSV-HA-ISO320-P2/24VDC GP115A213CB

318

Viton

428

395

M12*1218

Model No.

Part No.

Model No.

A

B

C

D

E

F

G

H

I

W

PVSSV-HA-ISO200-P2/24VDC

88

171.5

72

16

510

360

208

160

368

R150

PVSSV-HA-ISO250-P2/24VDC 100

264

80

20

628

453

246

200

446

R190

PVSSV-HA-ISO320-P2/24VDC 120

284

96

24

752

538

231

302

533

R230

with reed sensors , with standard solenoid voltage DC24V
Surface Treatment :hard anodized

133

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

3-POSITION PENDULUM VALVE
Body

A6061-T6

Gate

A6061-T6

Material
Life Cycle
Helium leak rates at 1 atm differential

Bake Temperature

Pressure Range

200,000 cycles
Body
Aluminum
Body
Aluminum ,hard anodized<1×10-9 mbar .l /sec
<1×10-5 mbar .l /sec

Body

120°C

Actuator

80°C

Solenoid valve

50°C

Aluminum

1×10-8 mbar to 1.2 bar

Aluminum,
Hard anodized

1×10-6 mbar to 1.2 bar

Maximum P

1.2 barMaximum P during opening

5 mbarCompressed air pressure

4 ~ 6 Kg/cm2
ISO 200

ISO 250

ISO 320

1.2/1.2

1.2/1.2

2.0/2.0

Opening / Closing time
Gate

Viton O-ring

BonnetViton O-ringStandard Seal
Actuator

Electro-Pneumatic
ISO 200

ISO 250

ISO 320

22Kg

32Kg

52Kg

WeightMounting position
Options

Horizontal & Verticala. Other material of Gate O-ring sealb. Heater
Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

134

Control Wiring Extern
DA-15 Male D-Sub miniatures[Note] 24AWG wire is recommended.

135

Pin

Function

Status1

Power supply 24VDC

P

2Power GROUND

P

3

Open signal input

I

4

Close signal input

I

5

Three-segment signal input

I

6

Reserved

X

7Open signal output

08

Close signal output

0

9Power supply 24VDC

P

10Power GROUNDP

11

Three-segmentA signal output

012

Three-segmentB signal output

0

13

Reserved

X

14

Reserved

X

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

3-POSITION PENDULUM VALVE
Pneumatically ActuatedAttached Reed Sensor & Solenoid



B
H

G

A

Port Dia.
Seal side

F

E

W

C

D

PV3P-A-ISO200-P2/24VDC GP113C214CB

Port Bonnet
Dia.
Seal
200 Viton

Flange
O.D.
300

Bolt
P.C.D.
260

Bolt
ThreadSize*No Depth
M10*12
16

PV3P-A-ISO250-P2/24VDC GP114C214CB

254

Viton

335

310

M10*12

16

PV3P-A-ISO320-P2/24VDC GP115C214CB

318

Viton

428

395

M12*1218

Model No.

Part No.

Model No.

A

B

C

D

E

F

G

H

I

W

PV3P-A-ISO200-P2/24VDC

88

171.5

72

16

510

360

208

160

368

R150

PV3P-A-ISO250-P2/24VDC

100

215

80

20

628

453

246

200

446

R190

PV3P-A-ISO320-P2/24VDC

120

235

96

24

752

538

231

302

533

R230

With reed sensors , with standard solenoid voltage DC24V

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

136

Pneumatically ActuatedAttached Reed Sensor & Solenoid
Standard Surface Treatment: hard anodized


B
H

G

A

Port Dia.
Seal side

F

E

W

C

D

Port
Dia.
PV3P-HA-ISO200-P2/24VDC GP113C213CB 200

BonnetSeal
Viton

Flange Bolt
Bolt
ThreadO.D. P.C.D. Size*No Depth
300
260 M10*12
16

PV3P-HA-ISO250-P2/24VDC GP114C213CB

254

Viton

335

310

M10*12

16

PV3P-HA-ISO320-P2/24VDC GP115C213CB

318

Viton

428

395

M12*1218

Model No.

Part No.

Model No.

A

B

C

D

E

F

G

H

I

W

PV3P-HA-ISO200-P2/24VDC

88

171.5

72

16

510

360

208

160

368

R150

PV3P-HA-ISO250-P2/24VDC

100

215

80

20

628

453

246

200

446

R190

PV3P-HA-ISO320-P2/24VDC

120

235

96

24

752

538

231

302

533

R230

With reed sensors , with standard solenoid voltage DC24V
Surface Treatment :hard anodized

137

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

APC PENDUMLUM VALVE
Main applications

Downstream pressure control andisolation valve.

APC valve gate system settings

Application process
SEMI

FPD

Solar

CVD

Features

Integrated pressure controller
Accurate pressure control
Compact isolation
Short response time
Friendly user interface

1. Valve
2. Process chamber
3. Gas inlet
4. Pressure sensor(s)5. Sensor cable(s)6. Controller and actuator
7. Cable to remote control unit
8. Cable to power supply
9. PumpPendulum valve control system - Controller

Specification
Sensor supply : 24V DC or ±15V DC
Model
Connection
Type
Backup power : Yes
Sensor input
Power
Power input
DB-9 male— Q’ty of sensors : 2 pcs
Sensor input/— Vacuum gauge : Linear / Exponent Sensor(Vacuum
Gauge)
Sensor power supply DB-15 female— Signal voltage : 0-10V DC linear
RS232
with pressure
DB-25 female
Interface
RS485(Option)— Input resistance : Ri=21kȍ
Mini USB type B— Resolution : 2.3 mVService
APC service
female— Sample rate : 1ms
Control accuracy : 0.1% of maximum Monitor
Show status
Green LED display
sensor range
Analog\Digital Easy Control
Position resolution : 8000 (step 0-75° rotation)
Ambient temperature: 70°C max(Controller part -24HR)

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

138

APC software functions

Control via computer by using the APC software offers convenient functions
Set control tuning parameter : GAIN
Pressure and position control mode
Schedule test Mode => 1 cycle scheduleSet valve open/close speed
Report APC HW/SW version, serial and model
numberReport valve cycles and run hours
Set tolerance scope of pressure
Cycles life and pressure control record
Controller parameter upload and download
Power failure protection
Learning function
Input voltage
Power consumption
Sensor power supply output
Q’ty of sensors
Input voltage
Resolution
Input resistance
Q’ty of sensors
Outputs voltage
Input
OutputValve
Controller
Control accuracy
Position resolution
Backup power
Open --> Close
Close --> OpenOperating time for throttlingOpen --> Close
Close --> OpenOperating time for throttlingOpen --> Close
Close --> OpenOperating time for throttling

139

Dimension in mm unless otherwise noted

Control and actuating unit

+24 VDC(±10%)connector: POWER
150W(controller + motor)
connector: POWER+24 VDC /+-15VDC, 500 mA
connector: SENSOR
Analog input
Independent 2 channel
connector: SENSOR
0-10V DC linear
connector: SENSOR
2.3 mVconnector: SENSOR
Ri>=21k connector: SENSOR
Analog output
Independent 2 channel
connector: INTERFACE
0-10V DC linear
connector: INTERFACE
Digital Input/ Output
Independent 2 channel
connector: INTERFACE
Independent 2 channel
connector: INTERFACE
Admissible operating temperature
120°C
70°C
0.1% of maximum sensor range
8000 (step 0-90° rotation)
Yes
ISO 200
3 sec
4 sec
0.9 sec
ISO 250
3 sec
4 sec
0.9 sec
ISO 320
4 sec
5 sec
1.3 sec

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Technical Data
Material

Life Cycle

Helium leak rates at 1 atm differential

Bake Temperature

Pressure Range

Body

A6061-T6

Gate

A6061-T6

Closing/Opening

200,000 cycles

Pressure Control

1,000,000 cycles

Body
Aluminum
Body
Aluminum ,hard anodized

120°C

Actuator

70°C

Solenoid valve

70°C

Aluminum

1×10-8 mbar to 1.2 bar

Aluminum ,hardanodized

1×10-6 mbar to 1.2 bar
1.2 barMaximum P during opening

5 mbarCompressed air pressure

4 ~ 6 Kg/cm2
Gate

Viton O-ring

BonnetViton O-ringActuator
WeightActuator
Mounting position
Options<1×10-5 mbar .l /sec

Body

Maximum P

Standard Seal

<1×10-9 mbar .l /sec

Electro-Pneumatic
ISO 200

ISO 250

ISO 320

22Kg

31Kg

51Kg

Step Motor
Horizontal & vertical
Other material of Gate O-ring

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

140

APC PENDULUM VALVE
Step Motor ActuatedPort Bonnet Flange Bolt
Bolt Thread
Dia. Seal
O.D. P.C.D. Size*No Depth

Model No.

Part No.

PVSSV-A-ISO200-C/RS232

GP113B214PA

PVSSV-A-ISO200-C/RS485

GP113B214PBPVSSV-A-ISO250- C/RS232

GP114B214PA

PVSSV-A-ISO250- C/RS485

GP114B214PBPVSSV-A-ISO320- C/RS232

GP115B214PA

PVSSV-A-ISO320- C/RS485

GP115B214PB

200

Viton

300

260

M10*12

16

254

Viton

335

310

M10*12

16

318

Viton

428

395

M12*1218

Model No.

A

B

C

D

E

F

G

H

I

W

PVSSV-A-ISO200-C

88

321

72

16

510

360

208

160

368

R150

PVSSV-A-ISO250-C

100

333

80

20

360

453

246

200

446

R194

PVSSV-A-ISO320-C

120

353

96

24

752

538

302

231

533

R230

Input voltage DC24V

141

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

APC PENDULUM VALVE

Step Motor ActuatedStandard Surface Treatment: hard anodized(Option: Heater with insulation)

Model No.

Port Bonnet Flange Bolt
Bolt Thread
Dia. Seal
O.D. P.C.D. Size*No Depth

Part No.

PVSSV-HA-ISO200-C/RS232 GP113B213PA
PVSSV-HA-ISO200-C/RS485 GP113B213PBPVSSV-HA-ISO250- C/RS232 GP114B213PA
PVSSV-HA-ISO250- C/RS485 GP114B213PBPVSSV-HA-ISO320- C/RS232 GP115B213PA
PVSSV-HA-ISO320- C/RS485 GP115B213PB

200

Viton

300

260

M10*12

16

254

Viton

335

310

M10*12

16

318

Viton

428

395

M12*1218

Model No.

A

B

C

D

E

F

G

H

I

W

PVSSV-HA-ISO200-C

88

321

72

16

510

360

208

160

368

R150

PVSSV-HA-ISO250-C

100

333

80

20

360

453

246

200

446

R194

PVSSV-HA-ISO320-C

120

353

96

24

752

538

302

231

533

R230

Surface Treatment :hard anodized
Input voltage DC24V

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

142

Transfer valves and doors
Htc vacuum rectangular valves use directly actuating technology. Valve body is appropriate sizeand compact design. All moving parts are located in atmospheric side that could reduce the particle
occur in vacuum side and raise the life cycle. Other advantages include self-lock of gate seal upon
air pressure loss, easy gate disassembly for maintenance etc.
Vacuum rectangular transfer valves are used widely in coaters of semiconductor, optoelectronics
industry. Most of the valves are installed on load-lock chamber, between load-lock chamber andtransfer chamber, also transfer chamber and process chamber. Enable transferring and processing
being isolated for vacuum by the valves.

Example of vacuum rectangular valves install on cluster chamber

Transfer Valve

Process chamber

Transfer chamber

Process chamber

Load-lock chamber
Pump
Pump
Door Valve
Pump

Exhaust Valve(Pendulum Valve)

Design principle / feature
Low vibration and low particles.
Cam mechanism and spring enable sealing motion.
Twin air-cylinders, single forcing shaft.
Actuator shaft push auxiliary.
Self-lock seal protection upon air pressure loss.
Seal gate quick dismantling, easy for O-ring change.
One million life cycles.

Body material

Aluminum or Stainless Steel

143

Dimension in mm unless otherwise noted

Classify
Standard Rectangular Transfer valves
Rectangular doors
Large rectangular transfer valves
Large rectangular doors

Body Surface treatment

Electrolytic polishing :Aluminum or Stainless SteelHard anodized : Aluminum

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Rectangular transfer valve
Pneumatic (with bellows)
Electrolytic polishing

Model No.

Parts No.

Body

Gate

GRB-A-32222 GR01A213 A6061-T6 A6061-T6
GRB-A-46236 GR02A213 A6061-T6 A6061-T6
GRB-A-50336 GR03A213 A6061-T6 A6061-T6
GRB-A-56496 GR04A213 A6061-T6 A6061-T6
GRB-S-32222 GR01A113 304S.S.

304S.S.

GRB-S-46236 GR02A113 304 S.S.

304 S.S.

GRB-S-50336 GR03A113 304 S.S.

304 S.S.

GRB-S-56496 GR04A113 304 S.S.

304 S.S.

Model No.

Parts No. D D1 D2 D3 D4Actuated time Gate seal Cycle Life
open<=1
Viton 1 million*
close<=1
open<=1
Viton 1 million*
close<=1
open<=1
Viton 2 million*
close<=1
open<=2
Viton 1 million*
close<=3.5
open<=1
Viton 1 million*
close<=1
open<=1
Viton 1 million*
close<=1
open <=1
Viton 2 million*
close<=1
open<=2
Viton 1 million*
close<=3.5

Weight

D5 A

L

B

C

E

H K K1 K2

15kg
16kg
21kg
29kg
20kg
22kg
34kg
49kg
M

GRB-A-32222 GR01A213 222 32 311 50 105 61.5 50 310 300 285 49 340 83 28.5 501.5 224
GRB-A-46236 GR02A213 236 46 325 50 112 61.5 50 310 300 285 49 340 83 28.5 508.5 224
GRB-A-50336 GR03A213 336 50 422 50 112 63

60 410 400 385 59 440 83 30 475 250

GRB-A-56496 GR04A213 496 56 540 61 117.5 66

70 570 560 545 69 600 94 33 513.5 282

GRB-S-32222 GR01A113 222 32 311 50 105 61.5 50 310 300 285 49 340 83 28.5 501.5 224
GRB-S-46236 GR02A113 236 46 325 50 112 61.5 50 310 300 285 49 340 83 28.5 508.5 224
GRB-S-50336 GR03A113 336 50 422 50 112 63

60 410 400 385 59 440 83 30 475 250

GRB-S-56496 GR04A113 496 56 540 61 117.5 66

70 570 560 545 69 600 94 33 513.5 282* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

144

Rectangular transfer valve Technical Data(for Electrolytic polishing valve boby)
Spindle sealing

Bellows
Body
1 x 10-9 mbar.l/s
Seat
1 x 10-9 mbar.l/s
Electrolytic polishing
Body
<90°C
Driving module<60°C
Forward pressure difference
1.2 bar
1.0 bar
Reverse pressure difference<10 mbar-8
1* 10 mbar to 1.0 bar
5~7 Kg/cm2
Ø 6 mmGate
Viton O'ring
DC4-24(V) or AC4-240(V), 5-40 mA
DC24(V) ,AC24(V),AC110(V),AC220(V)Actuator up, down

Leak rates
Surface Treatment (Body)
Bakeable Temperature
Differential pressure on the gate (Note *)Differential pressure at opening (Note**)Pressure Range
Driving pressure
Compressed air connection
Standard Seal
Position sensor (Standard)
Solenoid (Optional)
Mounting position

Note :* Differential pressure on the gate
Forward and reverse pressure difference definitions:
Forward pressure difference ( P1 > P2) = P1-P2
Reverse pressure difference (P1 < P2) = P2-P1** Differential pressure at opening = P1 – P2 < 10 mbar

Accessories :32x22246x23650x33646x496145

M8x50L
M8x50L
M8x60L
M8x70LPIN
Ø10x15L

Dimension in mm unless otherwise noted

Clamp single
clamp AL
Part No:2121A211

Fixture for maintenancePart No: GR03A213323

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Rectangular transfer valve

Pneumatic (with bellows)
Hard anodized

Model No.

Parts No.

Body

Gate

GRB-HA-32222 GR01A713 A6061-T6 A6061-T6
GRB-HA-46236 GR02A713 A6061-T6 A6061-T6
GRB-HA-50336 GR03A713 A6061-T6 A6061-T6
GRB-HA-56496 GR04A713 A6061-T6 A6061-T6
Model No.

Parts No. D D1 D2 D3 D4Actuated time Gate seal Cycle Life
open<=1
Viton 1 million*
close<=1
open<=1
Viton 1 million*
close<=1
open<=1
Viton 2 million*
close<=1
open<=2
Viton 1 million*
close<=3.5

Weight

D5 A BLCE

H K K1 K2

15kg
16kg
21kg
29kg
M

GRB-HA-32222 GR01A713 222 32 311 50 105 61.5 50 310 300 285 49 340 83 28.5 501.5 224
GRB-HA-46236 GR02A713 236 46 325 50 112 61.5 50 310 300 285 49 340 83 28.5 508.5 224
GRB-HA-50336 GR03A713 336 50 422 50 112 63

60 410 400 385 59 440 83 30 475 250

GRB-HA-56496 GR04A713 496 56 540 61 117.5 66

70 570 560 545 69 600 94 33 513.5 282* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

146

Rectangular transfer valve Technical Data(for hard anodized valve boby)
Spindle sealing

Bellows
5 x 10-6 mbar.l/s
5 x 10-5 mbar.l/s

Body
Seat

Leak rates
Surface Treatment (Body)

Hard anodized
Body
<90°C
Driving module<60°C
Forward pressure difference
1.2 bar
Reverse pressure difference
1.0 bar<10 mbar-6
1* 10 mbar to 1.0 bar
5~7 Kg/cm2
Ø 6 mmGate
Viton O'ring
DC4-24(V) or AC4-240(V), 5-40 mA
DC24(V) ,AC24(V),AC110(V),AC220(V)Actuator up, down

Bakeable Temperature
Differential pressure on the gate (Note *)Differential pressure at opening (Note**)Pressure Range
Driving Pressure
Compressed air connection
Standard Seal
Position sensor (Standard)
Solenoid (Optional)
Mounting position

Note :* Differential pressure on the gate
Forward and reverse pressure difference definitions:
Forward pressure difference ( P1 > P2) = P1-P2
Reverse pressure difference (P1 < P2) = P2-P1** Differential pressure at opening = P1 – P2 < 10 mbar

Accessories :32x22246x23650x33646x496147

M8x50L
M8x50L
M8x60L
M8x70LPIN
Ø10x15L

Dimension in mm unless otherwise noted

Clamp single
clamp AL
Part No:2121A211

Fixture for maintenancePart No:GR03A2133233

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

Rectangular doors valve

Model No.
GR-A-32222-D
GR-A-46236-D
GR-A-50336-D
GR-A-56496-D
GR-S-32222-D
GR-S-46236-D
GR-S-50336-D
GR-S-56496-D

Parts No.
GR014514
GR024514
GR034514
GR044514
GR014614
GR024614
GR034614
GR044614

Gate
D D1 D2 D3 Actuated time Gate seal Weight (Kg)
A6061-T6 222 32 239 48 open<=1 close<=1 Viton
9kg
A6061-T6 236 46 253 62 open<=1 close<=1 Viton
9.5kg
A6061-T6 336 50 352 66 open<=1 close<=1 Viton
10kg
A6061-T6 496 56 512 72 open<=2 close<=2 Viton
11.5kg304S.S 222 32 239 48 open<=1 close<=1 Viton
11kg
304S.S 236 46 253 62 open<=1 close<=1 Viton
12kg
304S.S 336 50 352 66 open<=1 close<=1 Viton
14kg
304S.S 496 56 512 72 open<=2 close<=2 Viton
18kg

Dimension in mm unless otherwise noted

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.

148

Rectangular doors valve Technical Data
Cycle Life(*)

1 million

Leak rates

1 x 10-9 mbar.l/s
Driving modul

Bakeable Temperature<60°C

Pressure Range

1* 10-8 mbar to 1.0 bar

Driving pressure

5~7 Kg/cm²

Compressed air connection

Ø 6 mmStandard Seal

Gate

Viton O'ring

Position sensor (Standard)

DC4-24(V) or AC4-240(V), 5-40 mA

Solenoid (Optional)

DC24(V) ,AC24(V),AC110(V),AC220(V)Mounting position

Actuator up, down

* The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure
difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)

Accessories :M8x45L

149

Dimension in mm unless otherwise noted

PIN Ø10x15L

All information contained herein was current at time of publication, we reserve the right to change the design/specification for products improvement without notice.