No. VP-1805

SMALL VACUUM PUMPS & SYSTEMSC ATA L O GCreating the possibilities of vacuum pump technology

https://ulvac-kiko.com/en

ULVAC KIKO
Serves a Wide Variety of Industries
We ULVAC KIKO provide vacuum pumping
solutions for various industries andapplications. We manufacture, sell andprovide customer support of small vacuum
pumps with high-performance, high-reliability
and high-quality. We are one of the member ofworld leading vacuum technology group,"ULVAC GROUP"
Head Office & Factory (Miyazaki Japan)

EXPERTISE

developed by firm reliability
achieved through working
in the consumer business.

As a Manufacturer
Specializing in
Small Size Vacuum Pumps

CUSTOMERSATISFACTION

through our wide variety of
products and reliable support.

TOTAL SUPPORTby ULVAC GROUP

Units conversion table
Temperature
°C
0
10
20
30
40
50
60
70
80
90
100

2|

Dimensions

Pressure units
°F
32
50
68
86
104
122
140
158
176
194
212

Pa
1
100
133
1.33 × 104
4.0 × 104
1.013 × 105

mm
Torr
−3
3.1750
7.5 × 106.35000.75
民生事業で培った9.52501
確かな信頼性による12.70000100
19.0500300
25.4000
760

技術力

Inches
1/8
1/4
3/8
1/2
3/4
1/1

Inches0.12500.25000.37500.50000
0.75001.0000

Pumping speed units
L/min = L × min
m3/h = m3 × h−1
cfm = cubic feet/min

豊富な品揃えときめ細かな対応によるSMALL VACUUM PUMPS & SYSTEMS CATALOG

顧客満足

mbar
10−2
1
1.33
133
400
1.013 × 103

−1

L/min
1.0
16.67
28.32

小型真空ポンプの専門メーカーとして

m3/h
0.06
1.0
1.699

cfm
0.035
0.589
1.0

アルバックグループの総合力によるC
Dry
Vacuum
Pumps

O

N

T

Diaphragm Type

DAP-6D··································· 8
DAP-12S·································· 8
DAP-9D-DC24·························· 8
DAP-18S-DC24························ 8DA-30D··································· 9DA-60S···································· 9
DAT-50D·································· 9
DAT-100S································· 9DA-20D·································· 10
DA-40S··································· 10
DA-41D·································· 10
DA-81S··································· 10
DA-60D·································· 11
DA-120S································· 11
DA-121D································ 11
DA-241S································· 11

E
Systems

High Vacuum Pumping
Systems “DEPOX”

VFR-200M/X··························· 27
VWR-400M/X························· 27
VTR-350M/X··························· 27
VTS-350M/X··························· 27

Vacuum Coaters

VPC-061································· 31
VPC-061A······························· 31
VPC-260F······························· 31
VPC-1100······························· 32

Vacuum Coaters “DEPOX”

VFR-200M/ERH······················· 33
VWR-400M/ERH····················· 33
VTR-350M/ERH······················· 33
VTS-350M/ERH······················· 33

Anti-corrosive Type

Vacuum Coater

Rocking Piston Type

VTR-060M/ERH······················· 34

Sputtering Systems

RFS-201·································· 35
VTR-151M/SRF (SCOTT-C3)····· 36

Optional
Parts

Scroll Type

DIS-90···································· 16
DIS-251·································· 16
DIS-501·································· 16
DISL-101································· 17
DISL-503································· 17

Multi-Stage Roots Type

RDA-281HA···························· 18
RDA-501HA···························· 18Standard Type

GLD-040································· 19
GLD-137AA···························· 19
GLD-137CC···························· 19
GLD-202AA···························· 20
GLD-202BB····························· 20
GLD-280A······························ 20
GHD-031································ 21
GHD-101································ 21

Mechanical Booster Pump

MBS-053································· 22

Anti-corrosive Type

GCD-051X······························ 23
GCD-136X······························ 23
GCD-201X······························ 23

Turbo Molecular Pumping System

VPT-060·································· 24

Mechanical Booster
Pumping System

High Vacuum Pumping Systems

DTC-22··································· 13
DTC-41··································· 13
DTC-60··································· 13

SystemsS

VPC-051································· 26
VPC-051A······························· 26
VPC-250F······························· 26

High Vacuum Type

Oil-Sealed
RotaryVacuumPumps

T

VMR-050································ 25

DAU-20·································· 12
DTU-20··································· 12

DOP-40D································ 14
DOP-80S································ 14
DOP-80SP······························· 14
DOP-120SY····························· 14
DOP-181S······························ 15
DOP-301SB····························· 15
DOP-400SB····························· 15
DOP-420SA···························· 15

NOutlineDrawings

Optional Parts

Attachment of Oil Rotary Vacuum
Pump Optional parts················ 38
Fore-line Trap·························· 39
Vavuum Pump Suction andExhaust Filter··························· 39
Bourdon Tube Vacuum Gauge···· 39
Vacuum Indicator····················· 39
Vacuum Pump Oil···················· 40
Oil-mist Trap···························· 40
In-line Trap······························ 40
Adapter for Oil-mist Trap·········· 40
Oil-mist Separator···················· 40
Clamp····································· 41
Centerring······························· 41
Blank Flange···························· 41
Nozzle···································· 41
Nipple···································· 41
Elbow······································ 41
Tee·········································· 41
Cross······································ 41
Reducer··································· 41
KF Flange································ 41
VCR Adapters·························· 42
Gauge port····························· 42
Leak port································· 42
Flexible tube···························· 42
Rubber Vacuum Hose··············· 42
Suction and Exhaust Pipes for
Oil Rotary Vacuum Pumps········ 43
Dry pump································ 44
Oil pump································· 48

3

Vacuum Pumps Selection Guide

Dry Vacuum Pumps

Type
Diaphragm Type

Model
DAP-6D

66.5

50

8

180

8

24.0×103

240

DAP-9D-DC24

9

5.4×10–1

3.18×10–1

6.65×10366.5–1

24.0×10

3

3

18

1.08

6.35×10

9

3

33

25

9

3

13.3×10

133

100

9

2.13×103

1.75/1.93
3.50/3.85–1

89

6.7×102.10/2.52

6.00/6.60

1.8×1016

1.05/1.26

3.60/4.32

100/110

2.4×108250

1.80/2.16

60/72

3.00/3.30

49.9
2

67

30/36

DA-60S

50/55

Page

21.3

DA-30D

3.3×10DA-20D

20/24

1.20/1.44

7.00×10 /8.40×10–1

5.33×103

53.3

40

10

DA-40S40/46

2.40/2.76

1.40/1.61

19.9×103

199

149

10

1.40/1.61

3

40/46

2.40/2.76

3.3×10

33

25

10

3

DA-81S

75/85

4.50/5.10

2.63/2.98

13.3×10

133

100

10

DA-60D

60/72

3.60/4.32

2.10/2.52

3.32×103

33.2

25

11

4.20/5.04

13.3×10

3

133

100

11

4.20/5.08

3.3×10

3

33

25

11

DA-120S
DA-121D

Multi-Stage Roots
Type

6.65×103

4.20×10–1/
4.90×10–1

DA-41D

Scroll Type

Torr

7.20×10–1/
8.40×10–1

DAT-100S

Rocking Piston typeUltimate Pressure
mbar

12/14

DAT-50D

Diaphragm Type
[Anti-corrosive Type]Pa

DAP-12S

DAP-18S-DC24

Diaphragm Type[High Vacuum Type]

Pumping Speed (50/60Hz)
L/min
m3/h
cfm
3.60×10–1/
2.10×10–1/
6/7
4.20×10–1
2.45×10–1

120/144
120/145

7.20/8.64
7.20/8.70
1DA-241S

240/260

1.44×10 /1.56×101

8.40/9.10

16.0×103

160

120

11

DAU-2020/23

1.20/1.38

7.00×10–1/
8.05×10–1

200

2

1.5

12

DTU-2020/23

1.20/1.38

7.00×10–1/
8.05×10–1

200

2

1.5

12

DTC-2220/24

1.20/1.44

7.00×10–1/
8.40×10–1

1.0×103

10

7.5

13

DTC-4140/46

2.40/2.76

1.40/1.61

1.0×103

10

7.5

13

DTC-6060/70

3.60/4.20

2.10/2.45

1.0×103

10

7.5

13

1.40/1.61

3

12

9.0

14

3

※

DOP-40D40/44

2.40/2.64

1.2×10

DOP-80S80/88

4.80/5.28

2.80/3.08

5.33×10

53.3

DOP-80SP80/84

4.80/5.04

2.80/2.94

0.5MPa5.0bar

DOP-120SY

120/140

7.20/8.40

4.20/4.90

8.0×103

80

60

14

1

40
※

14

3.75kTorr※

14

DOP-181S

180/200

1.08×10 /1.20×101

6.30/7.00

10.0×103

100

75

15

DOP-301SB

300/330

1.80×101/
1.98×101

1.05×101/
1.16×101

8.0×103

80

60

15

DOP-400SB

400/440

24/26.4

14/15.1

12.0×103

120

90

15

1

1

DOP-420SA

420/460

2.52×10 /2.76×101

1.47×10 /1.61×101

17.3×103

173

130

15

DIS-9090/1085.40/6.48

3.15/3.78

5

0.05

37.5×10–3

16

1

DIS-251

250/300

1.50×10 /1.8×101

8.75/
1.05×101

1.6

0.016

12.0×10–3

16

DIS-501

500/600

3.00×101/
3.60×101

1.75×101/
2.10×101

1

0.01

7.5×10–3

16

DISL-101

100/120

6.00/7.20

3.5/4.220

0.2

150×10–3

17

1

1

DISL-503

430/520

2.58×10 /3.12×101

1.51×10 /1.820×101

30

0.3

225×10–3

17

RDA-281HA

280

16.8

9.84

8.0×10–2

8.0×10–4

6.0×10–4

18

17.6

–2

–4

–4

18

RDA-501HA

500

30

8.0×108.0×10

6.0×10※ Only for pressure

4 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

Oil-seald Rotary vacuum pumps

Type

Model

Oil-Sealed Rotary
Vacuum Pumps

GLD-040

Mechanical Booster
Pump
Oil-Sealed Rotary
Vacuum Pumps

Pumping Speed (50/60Hz)
L/min
m3/h
cfm

Pa

Ultimate Pressure
mbar

Torr

40/48

0.67

6.7×10–3

5.0×10–3

19

–3

–3

19

2.40/2.88

1.40/1.68

5.0×10Page

GLD-137AA

135/1628.10/9.72

4.73/5.67

0.67

6.7×10

GLD-137CC

135/1628.10/9.72

4.73/5.67

0.67

6.7×10–3

5.0×10–3

19

GLD-202AA

200/24012.0/14.4

7.00/8.40

0.67

6.7×10–3

5.0×10–3

20

GLD-202BB

200/24012.0/14.4

7.00/8.40

0.67

6.7×10–3

5.0×10–3

20

-3

-3

20

GLD-280A

280/336

16.8/20.2

9.9/11.9

0.67

6.7×10

5.0×10

GHD-03130/36

1.80/2.16

1.05/1.26

0.67

6.7×10–3

5.0×10–3

21

GHD-101

100/120

6.0/7.2

3.53/4.24

0.67

6.7×10-3

5.0×10-3

21

MBS-053

833

50.0

29.2

4.0×10–2

4.0×10–4

3.0×10–4

22

GCD-051X

50/60

3.00/3.60

1.75/2.10

0.67

6.7×10–3

5.0×10–4

23

GCD-136X

135/1628.10/9.72

4.73/5.67

0.67

6.7×10–3

5.0×10–3

23

0.67

6.7×10–3–3

23

Pumping Speed (50/60Hz) ※
L/sec
m3/h
cfm

Pa

Ultimate Pressure
mbar

Torr

GCD-201X

200/24012.0/14.4

7.00/8.40

Systems

5.0×10

Type

Model

Turbo MolecularPumping System

VPT-060

60

2.16×102

1.26×102

0.1×10–4

0.1×10–6

0.75×10–7

24

Mechanical Booster
Pumping System

VMR-050

13.9

5.00×101

2.92×101

4.0×10–2

4.0×10–4

3.0×10–4

25

VPC-05150

1.80×102

1.05×102

0.7×10–3

0.7×10–5

0.53×10–5

26

VPC-051A

50

1.80×102

1.05×10

2

–3

–5

–5

26

VPC-250F

200

7.20×102

4.20×102

0.1×10–3

0.1×10–5

0.75×10–6

26

VFR-200M/X

200

7.20×102

4.20×102

0.1×10–3

0.1×10–5

0.75×10–6

27

VWR-400M/X

400

1.44×103

8.40×102

0.1×10–3

0.1×10–5

0.75×10–6

27

VTR-350M/X

345

1.24×103

7.25×10

2

–3

–5

–6

27

VTS-350M/X

345

1.24×103

7.25×102

0.1×10–3

0.1×10–5

0.75×10–6

27

VPC-06150

1.80×102

1.05×102

1.3×10–3

1.3×10–5

0.98×10–5

31

VPC-061A

50

1.80×102

1.05×102

1.3×10–3

1.3×10–5

0.98×10–5

31

VPC-260F

200

7.20×102

4.20×102–3–5

0.98×10–531

VPC-1100

1100

3.96×103

2.31×103

0.4×10–3

0.4×10–5

0.3×10–532

VFR-200M/ERH

200

7.20×102

4.20×102

0.8×10–3

0.8×10–5

0.6×10–5

33

VWR-400M/ERH

400

1.44×103

8.40×102

0.4×10–3

0.4×10–5

0.3×10–5

33

VTR-350M/ERH

345

1.24×103

7.25×10

2

–3

–5

–5

33

VTS-350M/ERH

345

1.24×103

7.25×102

0.4×10–3

0.4×10–5

0.3×10–5

33

VTR-060M/ERH

60

2.16×102

1.26×102

10–4 level

10–6 level

10–6 level34

RFS-201150

5.40×102

3.15×102

6.6×10–4

6.6×10–6

4.95×10–6

35

250

2

2

–4

–6

–6

36

High Vacuum
Pumping Systems

Vacuum Coaters

Sputtering Systems

VTR-151M/SRF

9.00×10

5.25×10

0.7×100.1×10

1.3×100.4×10

6.6×100.7×100.1×10

1.3×100.4×10

6.6×10Page

0.53×100.75×10

0.3×104.95×10※ The described only the nominal pumping speed of the main pump.

5

Pump Selection Process
Below calculation and Pumping speed curves are available for selecting suitable pump
1. Calculation of Pumping time andPumping speed.

50Hz

1

example140

We want to decrease pressure from atmospheric pressure (100kPa) to 10kPa in a 50 liter
120
tank within
5 minutes.
Which pump is suitable?
10080DA-121D60

DA-60D40

DAT-50D
DA-30D

20(L/min)DA-20D0

example

2

1×10
Pa

4

2

3

4

How long does it take to decreasepressure from atmospheric pressure(100kPa) to 13kPa in an 80 liter tank?
DA-121D is used at this case.

(L/min)50Hz

140DA-121D

120

Pumping Speed

100
80
60
40
20

0

1

2

3

4

5

6

7

Pressure

6 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

8
L/min

9

10
×10kPaFrom calculation, more than 23 L/min pumping
speed is required, select faster pumping speed
more than DA-30D pump.
Please allow safe rate with considering pipe
5 conductance
6
7 and
7.6
leak.

Last process of suction(Bottom dead center)
Diaphragm Retainer
Exhaust Valve
Suction Valve

Movement Principles
forSuction
Each Type of Vacuum Pump
Exhaustport• Diaphragm Type Dry Vacuum Pump
Last process of suction(Bottom dead center)
Diaphragm Retainer
Exhaust Valve
Suction Valve

port

Diaphragm
Suction Valve completely opens.
Exhaust valve keep closed.

Piston• Rocking Piston Type Dry Vacuum Pump
Suction Valve

Exhaust Valve

Last process of exhaust(Top dead center)

PistonCylinderCup
Packing

Diaphragm

Suction Valve keeps closed
as pressed.
Exhaust valve completely open
as pressed.

Suction Valve completely opens.
Exhaust valve keep closed.
Last process of exhaust(Top dead center)gas

Exhaust port

Suction process
Exhaust process

Pressure process(b)suctioncompression 1

Exhaust process of
2 stage Oil-Sealed
Rotary Pumps(d)Eccentric Cam

exhaust valve suction port

Suction port
Orbiting Scroll

Suction Valve keeps closed
as pressed.
Exhaust valve completely open
Fixed scroll
as pressed.
(a) Suction completion

Rotary Axis Center

Rotary axis
• Oil-Sealed Rotary Pump
center• Scroll Type Dry Vacuum Pump
Compression
space

Connecting Rod

compression 2

exhaustsuctionport

exhaustvalve(c)

A Guide to Our Catalog
CE marked
TUV marked
CSA marked
cTUVus marked
cTUV marked(compliance to U.S. and Canadian National Standards)※ cTUVus is equivalent to UL/CSA standard.
Indicates the actual pumping speed in
atmospheric pressure. Some othercompanies show the number of nominal
pumping speed. In that case you cancompare the speed by increasing our rate
20 %.

Type of Pump

DAP-12S
Actual pumping speed
The numbers show
the actual pumping
speed at 50 Hz.
The number will
increase 20% with
60 Hz.

When the pump achieves this ultimate
pressure the pumping speed becomes 0.
Indicates the motor rating.
Basic machine weight includes the power
cord.
Indicates the standard inlet, outlet diameter.
For request on different sizes, pleasecontact us.
Use the pump within this atmospherictemperature range.
Corresponding voltage and Certificate

7Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Diaphragm Type Dry Vacuum Pumps

DAP Series

DAP-6D DAP-12S
DAP-9D-DC24 DAP-18S-DC24
Applications

Features• Vacuum chucks, wafer and chip handling devices• Vacuum tweezers, medical appliances• Printing equipment• Automatic packing machines• Optical appliances• Sterilizer

Diaphragm type pump creates vacuum by reciprocating movement ofrubber diaphragms.
Pump structure creates an Oil-free environment and maintenance easy.
DAP series is the smallest diaphragm pump from our product ranges andoffers pumping speed at 6L and 18 L/min at 50Hz.

DAP-6D

DAP-12S

DAP-9D-DC24

DAP-18S-DC24

Specifications
DAP-6D

Model
Unit

50Hz

Actual pumping speed

L/min

6

Ultimate pressure

Pa

Motor

DAP-12S
60Hz

50Hz

7

12

DOP-9D-DC24

DAP-18S-DC24

−

−

60Hz

9

18

6.65 × 103

24.0 × 103

146.65 × 103

24.0 × 103

Single phase, 220—230V,
10W, 4P, Capacitor run

Single phase , 220—230V,
10W, 4P, Capacitor run

DC Brushless motor,
14W, 4P, 24V

DC Brushless motor,
14W, 4P, 24V

Full load current

A

0.25

0.25

1.3

1.4

Weight

kg

1.9

1.9

1.75

1.75

Inlet, outlet pipe
diametermm(Rc 1/8)(Rc 1/8)(Rc1/8)(Rc1/8)

Ambient temperature℃

0 – 400 – 400 – 400 – 40Overall dimensionsmm

91(W) × 163(L) × 100.6(H)

91(W) × 163(L) × 100.6(H)

83.5(W) × 165(L) × 123.8(H)

83.5(W) × 165(L) × 123.8(H)Corresponding voltage and Certificate
Voltage

Order CodeSingle phase, 100V

DAP-6D

DAP-12S
DOP-9D-DC24

DAP-18S-DC24

A42910000001

Single phase, 200V

A42916000000

Single phase, 100V

A42920000001

Single phase, 220—230V
Single phase, 200V

A42926000000

Single phase, 220—230V
DC24V
DC24V

A42917000000

—

—

—

—

A42927000000—

A42930000001



A42940000001

Pumping speed curves
TUV
cTUVusMarked Marked
—
—
—

—

—

—

—

—

—




20

—




— : Not Available,  : Available

50Hz

DAP-18S-DC24

16
14

—

—

(L/min)18

Pumping Speed

Model

CE
Marked—DAP-12S

12

DAP-9D-DC24

10
8

DAP-6D

6
4
2

0

1

2

3

4

5

Pressure※ Further details can be found on our website.

8 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

Outside drawing appears in Page 44.

6

7

8

9

10

(×10kPa)Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Diaphragm Type Dry Vacuum Pumps

DA / DAT Series

DA-30D DA-60S DAT-50D DAT-100S
Applications

Features
Diaphragm type pump creates vacuum by reciprocating movement ofrubber diaphragms.
Pump structure creates an Oil-free environment and maintenance easy.
Various pumping speed and two/single stages are selectable depends on
your required pressure and pumping volume.

DA-30D• Vacuum chucks, wafer and chip handling devices• Vacuum tweezers, medical appliances• Printing equipment• Automatic packing machines• Optical appliances• Semiconductor industry• Injection molding machine

DA-60S

DAT-50D

DAT-100S

Specifications
DA-30D

Model
Unit

50Hz

Actual pumping speed

L/min

30

Ultimate pressure

Pa

Motor
Full load current

A

WeightDA-60S
60Hz

50Hz

36

60

DAT-50D
60Hz

50Hz

72

50

DAT-100S
60Hz

50Hz

55

100

60Hz
110

6.7 × 10321.3 × 103

3.3 × 10313.3 × 103

Single phase, 200—220V,
200W, 4P, Split phase starting

Single phase, 200—220V,
200W, 4P, Split phase starting

Single phase, 200—220V,
200W, 4P, Split phase starting

Single phase, 200—220V,
200W, 4P, Split phase starting

2.8/2.6(200/220V)

2.8/2.6(200/220V)

2.8/2.6(200/220V)

2.8/2.6(200/220V)

2.4/2.2(200/220V)

2.4/2.2(200/220V)

2.4/2.2(200/220V)

2.4/2.2(200/220V)

kg

11.0

11.0

11.0

11.0

Inlet, outlet pipe
diametermm

O.D. dia.9 × I.D. dia.5(Rc 1/4)

O.D. dia.9 × I.D. dia.5(Rc 1/4)

O.D. dia.12 × I.D. dia.8.5(Rc 1/4)

O.D. dia.12 × I.D. dia.8.5(Rc 1/4)

Ambient temperature℃

7 – 407 – 407 – 407 – 40Overall dimensionsmm

212(W) × 278(L) × 224.5(H)

212(W) × 278(L) × 224.5(H)

150(W) × 232(L) × 305(H)

150(W) × 232(L) × 305(H)Corresponding voltage and Certificate
Voltage

Order CodeDA-30D

Single phase, 100V
Single phase, 200—220V

A42098000000

DA-60S
DAT-50D
DAT-50DA
DAT-100S

Single phase, 100V

Single phase, 200—220V
Single phase, 100V
Single phase, 200—220V
Three phase, 200—220V

Single phase, 100V
Single phase, 200—220V

DAT-100SA Three phase, 200—220V

Pumping speed curves
TUV
cTUVusMarked Marked——

A42092000000
A42108000000
A42102000000
A42158000001
A42152000001

—
—
—
—
—

A42150000006
A42168000001
A42162000001
A42160000006

—
—

—
—

—
—









—
—
—
—
—



—
—
—
—
—



— : Not Available,  : Available

120(L/min)50Hz

DAT-100S
100

80

Pumping Speed

Model

CE
Marked—DA-60S60

DAT-50D40

DA-30D

20

0

1

2

3

4

5

Pressure※ Further details can be found on our website.

6

7

8

9

10
(×10kPa)

Outside drawing appears in Page 44.

9Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Diaphragm Type Dry Vacuum Pumps

DA Series

DA-20D DA-40S DA-41D DA-81S
Applications

Features
Diaphragm type pump creates vacuum by reciprocating movement ofrubber diaphragms.
Pump structure creates an Oil-free environment and maintenance easy.
Various pumping speed and two/single stages are selectable depends on
your required pressure and pumping volume.

DA-20DC• Vacuum chucks, wafer and chip handling devices• Vacuum tweezers, medical appliances• Printing equipment• Automatic packing machines• Optical appliances

DA-40SC

DA-41D

DA-81SSpecifications
DA-20DC

Model

DA-40SC

DA-41D

DA-81S

Unit

50Hz

60Hz

50Hz

60Hz

50Hz

60Hz

50Hz

Actual pumping speed

L/min

20

24

40

46

40

46

75

Ultimate pressure

Pa

Motor

60Hz
85

5.33 × 103

19.9 × 103

3.3 × 10313.3 × 103

Single phase, 220V, 60W, 4P,
Capacitor run

Single phase, 220V, 60W, 4P,
Capacitor run

Single phase, 220V, 100W, 4P,
Capacitor run

Single phase, 220V, 100W, 4P,
Capacitor run

Full load current

A

0.8

0.8

Weight

kg

7.2

7.2

1.2
10.3

1.25

1.2
10.3

1.25

Inlet, outlet pipe
diametermm

O.D. dia.9 × I.D. dia.5 (Rc 1/4)

O.D. dia.9 × I.D. dia.5 (Rc 1/4)

O.D. dia.12 × I.D. dia.8 (G1/4)

O.D. dia.12 × I.D. dia.8 (G1/4)

Ambient temperature℃

7 – 407 – 400 – 400 – 40Overall dimensionsmm

118(W) × 242(L) × 178(H)

128(W) × 242(L) × 178(H)

157(W) × 336.5(L) × 217(H)

181(W) × 336.5(L) × 217(H)Corresponding voltage and Certificate
CE
MarkedModel

Voltage

Order CodeDA-20DA

Single phase, 100V

A42078600000

DA-20D

DA-20DC

DA-40SA
DA-40SB
DA-40S

DA-40SC
DA-41D

Single phase, 115V

A42078700000



A42072000000

—

—

—

70

Single phase, 220V

A42078800000





—
—

60

—

—

Single phase, 200V

Single phase, 100V

A42088600000
A42088700000

Single phase, 200V

A42082000000—

A42088800000

Single phase, 100V

A42750000000

—

—

—

—

—

—

Single phase, 115V

Single phase, 220V
Single phase, 115V

A42750000004

Single phase, 200V

A42750000007

Single phase, 100V

A42768000000

Single phase, 115V

Single phase, 200V

Single phase, 220V

A42750000003
A42760000001
A42760000004
A42760000005

—

—

—

—

—
—

—

—

—

—

—

—

—

—

—

—

—

—

—

—

— : Not Available,  : Available※ Further details can be found on our website.

10 | SMALL VACUUM PUMPS & SYSTEMS CATALOG(L/min)

50Hz

80

—





Single phase, 220V

DA-81S

90

Pumping Speed

DA-20DB

Pumping speed curves
TUV
cTUVusMarked Marked—
DA-81S

50
40

DA-41D30

DA-20D
20
10

DA-40S
0

1

2

3

4

5

Pressure

Outside drawing appears in Page 45.

6

7

8

9
10
(×10kPa)Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Diaphragm Type Dry Vacuum Pumps

DA Series

DA-60D DA-120S DA-121D DA-241S
Applications

Features
Diaphragm type pump creates vacuum by reciprocating movement ofrubber diaphragms.
Pump structure creates an Oil-free environment and maintenance easy.
Various pumping speed and two/single stages are selectable depends on
your required pressure and pumping volume.

DA-60D• Vacuum chucks, wafer and chip handling devices• Vacuum tweezers, medical appliances• Printing equipment• Automatic packing machines• Optical appliances• Semiconductor industry

DA-120S

DA-121DF

DA-241SF

Specifications
DA-60D

Model
Unit

50Hz

Actual pumping speed

L/min

60

Ultimate pressure

Pa

Motor

DA-120S
60Hz

50Hz

72

120

DA-121DF
60Hz

50Hz

144

120

DA-241SF
60Hz

50Hz

145

240

60Hz
260

3.32 × 103※13.3 × 103※

3.3 × 103

16.0 × 103

Single phase, 220V, 200W, 4P,
Capacitor run

Single phase, 220V, 200W, 4P,
Capacitor run

Single phase, 220—230V,
400W, 4P, Capacitor run

Single phase, 220—230V,
400W, 4P, Capacitor run

2.6/2.5(220/230V)

2.3

2.5/2.4(220/230V)

2.7/2.6(220/230V)

Full load current

A

2.4

2.4

Weight

kg

19.0

19.0

Inlet, outlet pipe
diametermm

O.D. dia.14 × I.D. dia.9 (G3/8)

O.D. dia.14 × I.D. dia.9 (G3/8)

Ambient temperature℃

7 – 407 – 400 – 400 – 40Overall dimensionsmm

156(W) × 358(L) × 238(H)

162(W) × 358(L) × 238(H)

193.5(W) × 411(L) × 285(H)

207(W) × 411(L) × 285(H)

26.0

26.0

O.D. dia.16 × I.D. dia.12 (G1/2) O.D. dia.16 × I.D. dia.12 (G1/2)※ With built-in Unloader valve.

Corresponding voltage and Certificate

DA-60D

Voltage

Order CodeSingle phase, 100V

A42118000000

Single phase, 200V

A42110000002

Single phase, 115V

A42118100000——

Pumping speed curves

—

—

—

A42110000004

Single phase, 200V

A42120000002
A42120000004

DA-121DC

Single phase, 100V

—

—

—

A42678100001

DA-121DE

Single phase, 200V

A42678300001




























DA-121DD

Single phase, 100V

A42120000000

Single phase, 220V
Single phase, 115V

A42678200001

DA-121DF Single phase, 220—230V

A42678400001

DA-241SC

Single phase, 100V

A42688100001

DA-241SE

Single phase, 200V

A42688300001

DA-241SD

Single phase, 115V

A42688200001

DA-241SF Single phase, 220—230V

A42688400001

—

—

—

—

—

—

—

—

250

※ Further details can be found on our website.

DA-241S200—— : Not Available,  : Available

50Hz

300

—

Single phase, 220V

DA-120S(L/min)TUV
cTUVusMarked Marked——

Pumping Speed

Model

CE
Marked—150

100

DA-121D

DA-120S

DA-60D

50

0

1

2

3

4

5

Pressure

6

7

8

9

10
(×10kPa)

Outside drawing appears in Page 45.

11Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Diaphragm Type Dry Vacuum Pumps

DAU/DTU Series

DAU-20 DTU-20
Applications

Features• High vacuum type diaphragm pump
• Low vibration• High corrosion resistant (DTU-20)• Backing pump for TMP• Analytical equipment• Biochemical analysis• Gas charging• Vacuum drying systems• Evaporators etc

DAU-20D

DTU-20D

Specifications
DAU-20D

Model
Unit

50Hz

Actual pumping speed

L/min

20

Ultimate pressure

Pa

Motor

DTU-20D
60Hz

50Hz

23

20

60Hz
23

200

200

Single phase, 220V, 80W, 4P, Capacitor run
0.7

Single phase, 220V, 80W, 4P, Capacitor run

Full load current

A

0.72

Weight

kg

7.5

0.7
7.5

0.72

Inlet, outlet pipe
diametermm

O.D. dia.10 × I.D. dia.6 (Rc 1/8)

O.D. dia.10 × I.D. dia.6 (Rc 1/8)

Ambient temperature℃

5 – 405 – 40Overall dimensionsmm

161(W) × 327(L) × 217(H)

161(W) × 327(L) × 217(H)Corresponding voltage and Certificate
Model

Voltage

Order CodeDAU-20A

Single phase, 100V

A42000110000

DAU-20B

Single phase, 115V

DAU-20C

Single phase, 200V

DAU-20E

Single phase, 230V

DAU-20D
DTU-20A
DTU-20B

Single phase, 22­0V
Single phase, 100V
Single phase, 115V

A42000120000
A42000130000
A42000140000
A42000150000
A42971000000
A42972000000

DTU-20C

Single phase, 200V

A42973000000

DTU-20E

Single phase, 230V

A42975000000

DTU-20D

Single phase, 22­0V

A42974000000












Pumping speed curves
TUV
cTUVusMarked Marked























30

(L/min)2050Hz

DAU-20

Pumping Speed

CE
MarkedDTU-2010— : Not Available,  : Available

0

1

2

3

4

5

Pressure※ Further details can be found on our website.

12 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

Outside drawing appears in Page 46.

6

7

8

9

10
(×10kPa)Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Diaphragm Type Dry Vacuum Pumps

DTC Series

DTC-22 DTC-41 DTC-60
Applications

Features• All contacted parts of the gas are made of PTFE and FPM.
• Suitable for pumping out corrosive gas or organic solvent• High vacuum down to 1000Pa• Compact• Rotary evaporator• Evaporating system• Vacuum Concentrator• Vacuum filtration• Exhaust of gas-transfer tube

DTC-22B• Vacuum drying systems• Laser-gas circulation• Centrifuge• Medical/Pharmaceutical equipments• Analytical/scientific equipments

DTC-41

DTC-60Specifications
DTC-22B

Model

DTC-41

DTC-60

Unit

50Hz

60Hz

50Hz

60Hz

50Hz

Actual pumping speed

L/min

20

24

40

46

60

Ultimate pressure

Pa

Motor

60Hz
70

1.0 × 103

1.0 × 103

1.0 × 103

Single phase, 220V, 50W, 4P,
Capacitor run

Single phase, 220V, 100W, 4P,
Capacitor run

Single phase, 220V, 200W, 4P,
Capacitor run

Full load current

A

0.6

0.72

1.1

2.0

2.1

Weight

kg

7.3

10.3

18.0

Inlet, outlet pipe
diametermm

O.D. dia.10 × I.D. dia.6 (G1/4)

O.D. dia.10 × I.D. dia.6 (G1/4)

O.D. dia.14 × I.D. dia.9 (G3/8)

Ambient temperature℃

0 – 400 – 400 – 40Overall dimensionsmm

142(W) × 288.5(L) × 202(H)

155(W) × 336.5(L) × 217(H)

158(W) × 340(L) × 242(H)Corresponding voltage and Certificate

Pumping speed curves
TUV
cTUVusMarked Marked
—
—

Model

Voltage

Order CodeDTC-22Single phase, 100V

A42001700000
A42001900001

DTC-22Single phase, 200V

A42001720000

—

—

—

A42002000001

DTC-22C

Single phase, 230V

A42002100001







A42730000004




—

—

—

A42738200002——

DTC-22A
DTC-22B

DTC-41A
DTC-41

Single phase, 115V

Single phase, 22­0V

Single phase, 100V

Single phase, 200V

Single phase, 22­0V

A42738300000

DTC-41B Single phase, 230V (50Hz) A42730000005
DTC-60Single phase, 100V

A42668000000

Single phase, 200V

A42668200000

Single phase, 115V (60Hz) A42668100000
Single phase, 22­0V

A42668300000

—


—

—

—

—

—
—
—

—

—

—

—
—
—

70

(L/min)50Hz60

DTC-6050

Pumping Speed

CE
Marked—40

DTC-41

30

—

20

—

10

DTC-22—— : Not Available,  : Available
0

1

2

3

4

5

Pressure※ Further details can be found on our website.

6

7

8

9

10
(×10kPa)

Outside drawing appears in Page 46.

13Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Rocking Piston Type Dry Vacuum Pumps

DOP Series

DOP-40D DOP-80S
DOP-80SP DOP-120SY
Applications

FeaturesRocking type piston vacuum pump creates
vacuum by reciprocating motion of cup packing
inside the cylinder. Pressurized type is available
for DOP-80S which can be used as a small
compressor. (DOP-80SP)

DOP-40D(Vacuum)• Vacuum chuck, vacuum tweezers• Absorption and transfer of automatic machines• Vacuum packing printing machines• Chip mounter• Medical equipments• Oxygen generator

DOP-80S(Pressure)• Pressure source for automatic
machines• Air pressure unit
• Printing machine• Otorhinolaryngology, dental unit
• Air pressure meter

DOP-80SP

DOP-120SY

Specifications
DOP-40D

Model

DOP-80S

DOP-80SP

DOP-120SY

Unit

50Hz

60Hz

50Hz

60Hz

50Hz

60Hz

50Hz

Actual pumping speed

L/min

40

44

80

88

80

84

120

Ultimate pressurePa

1.2 × 103

5.33 × 103

Only for pressure

8.0 × 103

Maximum pressure

MPa

–

–

0.5

–

Single phase, 220V, 210W, 4P, Single phase, 220V, 210W, 4P, Single phase, 220V, 300W, 4P,
Capacitor run
Capacitor run
Capacitor run

Motor

1.7

1.9

1.7

1.9

2.4

60Hz
140

Three phase, 200 – 220V,
120W, 4P
1.4/1.6(200/220V)

2.5

1.4
(200V)

Full load current

A

Weight

kg

7.0

7.0

9.0

6.4

Inlet, outlet pipe
diametermm

O.D. dia.9 × I.D. dia.5 (Rc 1/4)

O.D. dia.9 × I.D. dia.5 (Rc 1/4)

O.D. dia.9 × I.D. dia.5 (Rc 1/4)

(Rc1/4)

Ambient temperature℃

7 – 407 – 407 – 407-40

Overall dimensions

mm

160(W) × 270(L) × 179(H)

160(W) × 270(L) × 179(H)

168.5(W) × 288(L) × 181(H)139.5(W) × 255(L) × 167(H)Corresponding voltage and Certificate
Voltage

Order CodeSingle phase, 100V A42340000000
DOP-40D

DOP-80S

—

—

—

—

Single phase, 115V A42340000001

—

—

—

—

Single phase, 200V A42340000002

—

—

—

—

Single phase, 22­0V A42340000003

—

—

—

—

Single phase, 100V A43268000000

—

—

—

—

Single phase, 115V A42360000001

—

—

—

—

Single phase, 200V A42360000002

—

—

—

—

Single phase, 22­0V A42360000003

—

—

—

—

Single phase, 100V A42370000003

—

—

—

—

DOP-80SP Single phase, 200V A42372000000

—

—

—

—

Single phase, 22­0V A42372200000

—

—

—

—





—



DOP-120SY

Three phase,200—220V

A42811200000

140(L/min)80

DOP-120SY

100

14 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

DOP-80SP50

DOP-80S

40

60

30

40

DOP-40D

20

20

10

10

20

30

40

50

60

70 80

90 100(kPa)

00Pressure— : Not Available,  : Available※ Further details can be found on our website.

70
60

80

0
0

50Hz

90

120

Pumping Speed

Model

Pumping speed curves

CE
TUV cTUVus cTUVMarked Marked Marked Marked

Outside drawing appears in Page 46 – 47.

2

4

6(×10-1Mpa)

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Rocking Piston Type Dry Vacuum Pumps

DOP Series

DOP-181S DOP-301SB
DOP-400SB DOP-420SA
Applications

FeaturesRocking type piston vacuum pump creates
vacuum by reciprocating motion of cup packing
inside the cylinder. Bigger volume of pumping
speed with increased number of pump heads.

DOP-181SD• Vacuum chuck, vacuum tweezers• Semiconductor industry (Handler,
Mounter)• FPD industry (Bonder)

DOP-301SB• Printing machine• Injection molding• Adsorption and transfer

DOP-400SB

DOP-420SA

Specifications
DOP-181SD

Model

DOP-301SB

DOP-400SB

DOP-420SA

Unit

50Hz

60Hz

50Hz

60Hz

50Hz

60Hz

50Hz

Actual pumping speed

L/min

180

200

300

330

400

440

420

Ultimate pressure

Pa

Motor

60Hz
460

10.0 × 103

8.0 × 10312.0 × 103

17.3 × 103

Single phase,
220V, 400W, 4P

Three phase,
200 – 230V, 400W, 4P

Three phase,200-220V, 400W, 4P

Three phase,
200V, 550W, 4P

2.1

2.4

Full load current

A

Weight

kg

2.9
12.0

2.6

20.0

2.5

23

2.8

3.5
33.0

3.1

Inlet, outlet pipe
diametermm(Rc 3/8)

O.D. dia.16 × I.D. dia.12(Rc 1/2)

Application tube outer diameter Φ 16

O.D. dia.26 × I.D. dia.20(Rc 3/4)

Ambient temperature℃

7 – 400 – 400 – 400 – 40Overall dimensionsmm

162(W) × 266(L) × 235(H)

315(W) × 443(L) × 231(H)

316(W) × 434(L) × 231(H)

310(W) × 523(L) × 253(H)Corresponding voltage and Certificate

Pumping speed curves
TUV
cTUVusMarked Marked

Voltage

Order Code

DOP-181SA

Single phase, 100V

A42002310002







DOP-181SB

Single phase, 115V

A42002320001







DOP-181SC

Single phase, 200V

A42002330002







DOP-181SD

Single phase, 220V

A42002340002







DOP-181SE

Three phase,200—220V

A42002350002







A420D0000001







DOP-400SB

Three phase,200—220V

A420B0000001







DOP-420SA

Three phase, 200V

A42001600000





—

DOP-301SB

Three phase,200—230V— : Not Available,  : Available

450(L/min)50Hz

DOP-420SA

400

DOP-400SB

350
300

Pumping Speed

Model

CE
MarkedDOP-301SB

250
200

DOP-181S

150
100
50

0

1

2

3

4

5
Pressure※ Further details can be found on our website.

6

7

8

9

10
(×10kPa)

Outside drawing appears in Page 47.

15

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Scroll Type Dry Vacuum Pumps

DIS Series

Double wrap

DIS-90 DIS-251 DIS-501
Applications

Features• Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls• Operation from atmospheric pressure is possible.
• High ultimate pressure level is attainable• Low vibration and low noise• Maintenance cycle can be controlled by hour meter.

DIS-90• Analytical equipment• Gas recovery system• Coating equipment• Back pump for TMP• Helium leak detector• Manufacturing process for semiconductor

DIS-251

DIS-501

Specifications
Model
Unit
Nominal pumping speed L/min

Ultimate pressure
Motor

Full load
current
WeightPa

50Hz

DIS-90

90

60Hz

50Hz

108

5.0

250

Single phase

Single phase, 100/115/200/230V,
150W, 4P, Capacitor start & run

Three phase–

Single phase
Three phase
Single phase
Three phase

Inlet, outlet pipe diameter
Ambient temperature

Water vapor handling

A

kg
℃

g/day

Single phase
Overallmm
dimensions Three phase

2.6/1.3/1.6(100/200/230V)

2.1/2.2/1.1/1.1(100/115/200/230V)

–

–
14.0

Inlet pipe KF-25

DIS-251

60Hz

50Hz

300

1.6

500

Single phase, 100/115/200/230V,
400W, 4P, Capacitor start & run

Three phase,
200/208/230/380/400/415/460V, 400W, 4P
4.8/2.6/2.4(100/200/230V)

DIS-501

4.8/4.3/2.8/2.4(100/115/200/230V)

60Hz
600

1.0

Single phase, 100/115/200/230V,
600W, 4P, Capacitor start & run

Three phase,
200/208/230/380/400/415/460V, 600W, 4P
8.5/4.3/3.9(100/200/230V)

10.0/8.6/4.8/4.0(100/115/200/230V)

1.6/0.9/0.9/1.0
1.9/1.9/1.8/1.0
2.7/1.57/1.57/1.63
2.8/2.6/2.5/1.47(200/380/400/415V) (200/208/230/460V) (200/380/400/415V) (200/208/230/460V)
25.0–

Outlet pipe KF-16

5 – 40≤ 5 (AF open)

44.0

23.0

Inlet pipe KF-25

Outlet pipe KF-16

5 – 4038.0

Inlet pipe KF-40≤ 25 (AF open)214(W) × 308(L) × 225(H)≤ 25 (AF open)

252(W) × 400(L) × 336(H)–Outlet pipe KF-25

5 – 40290(W) × 443(L) × 397(H)

252(W) × 370(L) × 336(H)

292(W) × 372(L) × 397(H)AF = Air flush

Corresponding voltage and Certificate

DIS-90

DIS-251

DIS-501

Voltage
Single phase,100—115V
Single phase,200—230V
Single phase,100—115V
Single phase,200—230V
Three phase,200—230V
Three phase,
380—460V
Single phase,100—115V
Single phase,200—230V
Three phase,200—230V
Three phase,
380—460V

Order CodeCE
MarkedcTUVMarked1000(L/min)50Hz

DIS-501

A44620000001

A44820000001

A44830000001

DIS-251

DIS-90100

Pumping Speed

Model

Pumping speed curves

10

A44840000001

A44850000001— : Not Available,  : Available※ Further details can be found on our website.

16 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

1
1

10

102

Pressure

Outside drawing appears in Page 47.

103

104

105
(Pa)

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Scroll Type Dry Vacuum Pumps

DISL Series

Single wrap

DISL-101 DISL-503
Applications

Features
Single wrap type scroll which consists of each 1 orbiting and fixed scroll.
Tough type scroll pump than DIS series against incoming particles andsuitable for industrial use.

• Pick and transfer system• Cleaning and drying• Degassing / deforming• Packaging

DISL-503

DISL-101

Specifications
DISL-101

Model

DISL-503

Unit

50Hz

60Hz

50Hz

Nominal pumping speed L/min

100

120

430

Ultimate pressure

Pa

Full load current

A

Weightkg

Inlet, outlet pipe
diameter

520

20.0

30.0

Single phase, 100/115/200/230V, 300W, 2P,
Capacitor start & run

Motor

60Hz

3.2/1.6/2.0(100/200/230V)

Three phase,
200/380/400/415V, 900W, 2P

Three phase,
200/208/230/460V, 1100W, 2P

3.6/1.9/1.9/1.8(200/380/400/415V)

4.2/4.1/3.9/1.95(200/208/230/460V)

3.7/3.4/1.8/1.7(100/115/200/230V)
15.0

Inlet pipe KF-25

36.0

Outlet pipe KF-16

KF-25

Ambient temperature℃

5 – 405 – 40

Water vapor handlingg/day≤ 100 (AF open)≤ 250 (AF open)

Overall dimensionsmm

210(W) × 360(L) × 215(H)

317(W) × 521(L) × 280(H)AF = Air flush

Corresponding voltage and Certificate

DISL-101

DISL-503

Voltage
Single phase,100—115V
Single phase,200—230V
Three phase,200—230V
Three phase,
380—460V

Order CodeCE
MarkedcTUVMarked1000(L/min)50Hz

DISL-503

A44650000001— : Not Available,  : Available

DISL-101

100

A44970100001
Pumping Speed

Model

Pumping speed curves

10

1

1

101

102

103

Pressure※ Further details can be found on our website.

104

105
(Pa)

Outside drawing appears in Page 48.

17Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Multi-Stage Roots Type Dry Vacuum Pump

RDA Series

RDA-281HA RDA-501HA

Features

Applications• Large exhaust and compact size.
• Oil free pump. No oil mist exhaust and oil backflow.
• Extended lifetime because there is no contact
between rotor and cylinder.

• Analytical equipment• Gas recovery system• Coating equipment• Back pump for TMP• Helium leak detector• Manufacturing process for semiconductor

RDA-281HA

RDA-501HA

Specifications
RDA-281HA

Model
Actual pumping speed
Ultimate pressure

L/min

RDA-501HA

280

500
−2

F.A. close 8.0 × 10

Pa

F.A. open 6.0

Moter

720W + 10W DC Motor

Power supply
Full load current

Single phase 100 – 115V 200 – 240V

V
Single phase
Three phase

WeightThree phase 200 – 240V
10A/5A (100 – 115V/200 – 240V)A

5A (200 – 240)

kg

38

Inlet, outlet pipe diameter

KF-25

Ambient temperature℃

5 – 40

Water capability

g/hr

300

Overall dimensionsmm

180(W) × 588(L) × 377(H)F.A. = Flush. Air.

Corresponding voltage and Certificate
Voltage

Single phase,100—115V/200—240V
Three phase,200—240V
Single phase,100—115V/200—240V
RDA-281HA
Three phase,200—240V
Single phase,100—115V/200—240V
RDA-501HThree phase,200—240V
Single phase,100—115V/200—240V
RDA-501HA
Three phase,200—240V
RDA-281H

Order code
A44990100000—

Pumping speed curves
TUV
cTUVusMarked Marked—

1000(L/min)RDA-501H—

RDA-281H

A44991100000



—



A44995100000

—

—

—



—

100

Pumping Speed

Model

CE
Marked10

A44996100000

— : Not Available,  : Available
1
0.01

0.1

1

10

100

Pressure※ Further details can be found on our website.

18 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

Outside drawing appears in Page 48.

1000

10000

100000(Pa)

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Oil-Sealed Rotary Vacuum Pumps

GLD Series

GLD-040 GLD-137AA GLD-137CC
Applications

Features
GLD series features high performance, low vibration and noiseand several functions such as gas ballast valve, oil-back-flow
prevention mechanism, and large sized oil level gauge. This
series equips multi-voltage motor and correspondent tointernational standard.

• Chemical, science experiment, Analyzer and Laser system• Vacuum pumping system• Backing pumps for the electronic microscope• Semiconductor equipment, sputtering equipment, vacuum
evaporation equipment• Vacuum dryer, freeze dryer

GLD-040

GLD-137AA

GLD-137CC

Specifications
Model
Actual pumping speed

Unit
L/min

Ultimate pressure※

Pa

Motor

Full load currentA

Oil capacity
Recommended oil
WeightInlet port diameter
Ambient temperature
Overall dimensions

mL
kg
mm
℃
mm

GLD-040
GLD-137AA
GLD-137CC
50Hz
60Hz
50Hz
60Hz
50Hz
60Hz
40
48
135
162
135
162
G.V. Closed : 0.67
G.V. Closed : 0.67
G.V. Closed : 0.67
G.V. Open : 6.7
G.V. Open : 6.7
G.V. Open : 6.7
Single phase, 200W, 4P,
Three phase, 400W, 4P,
Single phase, 400W, 4P,
Multiple-range motor
Multiple-range motor
Multiple-range motor
200 – 240V/380 – 460V
Capacitor start & run, 100 – 120V/200 – 240V
Capacitor start & run, 100 – 120V/200 – 240V
4.20 (100V), 4.40 (110V) 3.60 (100V), 3.40 (110V) 2.10 (200V), 2.20 (220V) 2.00 (200V), 1.90 (220V)
5.8 (100 – 120V)
4.60 (115V), 5.05 (120V) 3.40 (115V), 3.60 (120V) 2.30 (230V), 2.50 (240V) 1.90 (230V), 2.00 (240V) 6.8 (100 – 120V)
2.9 (200 – 240V)
2.10 (200V), 2.20 (220V) 1.80 (200V), 1.70 (220V) 1.30 (380V), 1.30 (400V) 1.10 (380V), 1.10 (400V) 3.5 (200 – 240V)
2.30 (230V), 2.60 (240V) 1.70 (230V), 1.80 (240V) 1.40 (415V)
1.15 (440V), 1.20 (460V)
550 – 800
1,000
1,000
R-2
SMR-100
SMR-100
16.0
26.0
29.0
KF-25
KF-25
KF-25
7 – 407 – 407 – 40150(W) × 427(L) × 227.5(H)
170(W) × 485.5(L) × 240(H)
170(W) × 487.5(L) × 249.5(H)※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)

Model
GLD-040

GLD-137AA

GLD-137CC

Voltage
Single phase,100—120V
Single phase,200—240V
Three phase,200—240V
Three phase,
380—460V
Single phase,100—120V
Single phase,200—240V

Pumping speed curves

Order CodeCE
MarkedTUV
cTUVusMarked Marked

A41840600000







A41840800000







A46220000000





—

A46220100000





—

A46230100000







A46230400000







— : Not Available,  : Available

1000(L/min)50Hz

GLD-137AA
GLD-137CC
100

Pumping Speed

Corresponding voltage and Certificate

GLD-040

10

1
10-1

1

101

102

Pressure※ Further details can be found on our website.

103

104

105
(Pa)

Gas ballast valve open

Outside drawing appears in Page 48.

19Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Oil-Sealed Rotary Vacuum Pumps

GLD Series

GLD-202AA GLD-202BB GLD-280A
Applications

Features
GLD series features high performance, low vibration and noiseand several functions such as gas ballast valve, oil-back-flow
prevention mechanism, and large sized oil level gauge. This
series equips multi-voltage motor and correspondent tointernational standard.

GLD-202BB

GLD-202AA

Specifications
Model• Chemical science experiment, Analyzer and Laser system• Vacuum pumping system• Back pump for the electronic microscope• Semiconductor equipment, sputtering equipment, vacuum
evaporation equipment• Vacuum dryer, freeze dryer

Actual pumping speed

Unit
L/min

Ultimate pressure ※Pa

GLD-202AA
50Hz
60Hz
200
240
G.V. Closed : 0.67
G.V. Open : 6.7

GLD-202BB
50Hz
60Hz
200
240
G.V. Closed : 0.67
G.V. Open : 6.7
Single phase, 550W, 4P,
Multiple-range motor
Capacitor start & run,
100 – 120V/200 – 240V

Three phase, 550W, 4P,
Multiple-range motor
200 – 240V/380 – 460V

Motor

Full load currentA

Oil capacity
Recommended oil
WeightInlet port diameter
Ambient temperature
Overall dimensions

mL
kg
mm
℃
mm

2.70 (200V)
2.70 (220V)
2.70 (230V)
2.80 (240V)
1.50 (380V)
1.60 (400V)
1.70 (440V)
1.70 (460V)

3.00 (200V)
3.10 (220V)
3.30 (230V)
3.60 (240V)
1.80 (380V)
1.90 (400V)
2.00 (415V)

GLD-280A

8.2 (100-120V)
4.1 (200-240V)

1,100
SMR-100
29.0
KF-25
7 – 40170(W) × 513.5(L) × 240(H)GLD-280A
50Hz
60Hz
280
336
G.V. Closed : 0.67
G.V. Open : 6.7
Threee phase, 750W, 4P,
Multiple-range motor
200 – 240V/380 – 460V
3.3 (200V)
3.2 (220V)
3.2 (230V)
3.2 (240V)
1.9 (380V)
1.9 (400V)
1.9 (440V)
2.0 (460V)
700 – 1,100
R-7
34.5
KF-25
7 – 40181(W) × 536(L) × 269(H)

3.6 (200V)
3.7 (220V)
4.0 (230V)
4.2 (240V)
2.1 (380V)
2.3 (400V)
2.4 (415V)

7.9 (100-120V)
3.9 (200-240V)

1,100
SMR-100
31.0
KF-25
7 – 40170(W) × 515.5(L) × 249.5(H)※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)

Corresponding voltage and Certificate

GLD-202AA

GLD-202BB

GLD-280A

VoltageThree phase,200—240V
Three phase,
380—460V
Single phase,100—120V
Single phase,200—240V
Three phase,200—240V
Three phase,
380—460V

Order CodePumping speed curves
TUV
cTUVusMarked Marked

A46240000000





—

A46240100000





—

A46250100000







A46250400000
A46200000002
A46200100001











—





—

1000

(L/min)50Hz

GLD-280A
GLD-202AA
GLD-202BB

100

Pumping Speed

Model

CE
Marked10— : Not Available,  : Available
1
10-1※ Further details can be found on our website.

20 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

1

101

102

Pressure

Outside drawing appears in Page 48 – 49.

103

104

105
(Pa)

Gas ballast valve open

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Oil-Sealed Rotary Vacuum Pumps

GHD Series

GHD-031 GHD-101

Features

Applications• Wide range voltage motor and correspond to CE, cTUVus• Magnet coupling for no oil leakage from shaft seal and realized
longer lifetime.
• Integrated check valve below the inlet port for backflow
prevention.

• Helium leak detector• Analytical equipment (GC/MS, ICP/MS, LC/MS)• Laboratory experiment

GHD-031B

GHD-101D

Specifications
Model
Actual pumping speed

Unit
L/min

Ultimate pressure※

Pa

Motor
Full load currentA

Oil capacity
Recommended oil
WeightInlet port diameter
Ambient temperature
Overall dimensions

mL
kg
mm
℃
mm

GHD-031B

50Hz
30

60Hz
36

50Hz
100

0.67
Single phase, 200 – 240V, 100W, 2P, Capacitor run
0.94 (200V)
1.02 (200V)
0.84 (240V)
1.03 (240V)
370
R-2
9.3
KF-16
7 – 40120(W) × 288.5(L) × 163(H)GHD-101D

G.V. Closed : 0.67
G.V. Open : 6.7
Single phase, 220 – 240V

60Hz
120

2.5

2.7
1,000
R-2
22.0
KF-25
7 – 40150(W) × 413.5(L) × 234.5(H)※ : Ultimate pressure is measured by Pirani gauge.
(In case of macleod gauge, the rate is one digit smaller than this rate.)

Corresponding voltage and Certificate
GHD-031A
GHD-031B
GHD-101A
GHD-101B
GHD-101C
GHD-101D

Voltage
Single phase,100—120V
Single phase,200—240V
Single phase,
100V
Single phase,
115—120V
Single phase,
200V
Single phase,
220—230VTUV
cTUVusMarked Marked

Order CodeA41000311002







A41000322002







A41000904000







A41000915000







A41000925000







A41000935000







1000

(L/min)50Hz

GHD-101

100
Pumping Speed

Model

Pumping speed curves

CE
Marked

GHD-03110— : Not Available,  : Available

1
10-1

1

101

102

Pressure※ Further details can be found on our website.

103

104

105

(Pa)

Gas ballast valve open

Outside drawing appears in Page 49.

21Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Mechanical Booster Pump

MBS Series

MBS-053

Features

Applications• Lower power consumption• No oil leakage by adoption of magnet coupling• Compact size and light weight• Pumping can be started from atmospheric pressure.
• Correspondable to both 100V and 200V series voltage byswitching inside driver circuit.

• Ideal main pump to support pumping speed of backingpump

MBS-053

Specifications
Model
Actual pumping speed※1
Ultimate pressure※2
Motor
Power supply
Motor speed

MBS-05350
4.0 × 10−2
DC Brushless motor, 200W
Single phase, 100 – 120V / 200 – 240V (50/60Hz)
3500
1.2 (100V)/0.8 (200V) (At ultimate pressure)4.33 (100V)/2.54 (200V) (At maximum load)
50 (At ultimate pressure)250 (At maximum load)70
SMR-200
11.0
JIS VG-40
JIS VF-40
Oil rotary vacuum pump 130 – 240L/min
0 – 40167(W) × 410(L) × 130(H)

Unit
m3/h
Pa
r/min

Current

A

Power consumptionW

Oil capacity
mL
Recommended oil
Weightkg
Inlet pipe diameter
Outlet pipe diameter
Backing pump
Ambient temperature ℃
Overall dimensionsmm※ 1 : Pumping speed varies depends on pumping speed of backing pump.
※ 2 : Measured by ionization vacuum gauge. Ultimate pressure varies depends on ultimate pressure of backing pump.

Model

Voltage

MBS-053

Single phase,100—120V
Single phase,200—240V

Pumping speed curves

Order CodeCE
MarkedA41000800501





—

A41000810502





—

(m3/h)70

TUV
cTUVusMarked Marked

60

(W)
250

Oil-Sealed Rotary
Vacuum Pumps(200L/min)

50

Pumping Speed— : Not Available,  : Available

200

Pumping
Speed
150

40

Power
consumption

30

100

Power consumption

Corresponding voltage and Certificate

20
50
10

0
10-1

1

101

102
Inlet Pressure

103

104

105

0
(Pa)

※ : Significantly increases pumping speed in a pressure range where
pumping speed of backing pump often drops.

※ Further details can be found on our website.

22 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

Outside drawing appears in Page 49.

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Oil-Sealed Rotary Vacuum Pumps

GCD Series

GCD-051X GCD-136X GCD-201X
Applications

Features
GCD Series, direct drive, oil rotary vacuum pump is corrosion resistant for
toxic and corrosive gases which is ideal for chemical, pharmaceuticalapplications.
Surface of gas contacted parts are coated with hard plating. Threedifferent sizes are available from 50L to 200L/min

GCD-051X• Semiconductor industry• Chemical industry• Post chemical-treatment drying• Pharmaceutical industry

GCD-136X

GCD-201X

Specifications
GCD-051X

Model
Actual pumping speed
Ultimate pressure※

GCD-136X

GCD-201X

Unit

50Hz

60Hz

50Hz

60Hz

50Hz

60Hz

L/min

50

60

135

162

200

240

G.V. Closed : 0.67
G.V. Open : 6.7

G.V. Closed : 0.67
G.V. Open : 6.7

G.V. Closed : 0.67
G.V. Open : 6.7

Single phase, 220 – 230V, 200W, 4P
Split phase starting

Single phase, 220V, 400W, 4P
Capacitor start & run

Shingle phase, 220V, 550W, 4P
Capacitor start & run

Pa

Motor
Full load currentA

Oil capacity

mL

Recommended oil

2.4/2.5(220/230V)

2.0

3.6

2.8

3.6

3.3

500 – 800

1,000

1,100

SO-M

SO-M

SO-M

Weight

kg

14.1

25.4

29.4

Inlet port diameter

mm

KF-25

KF-25

KF-25

Ambient temperature℃

7 – 407 – 407 – 40Overall dimensionsmm

165.5(W) × 419(L) × 222.7(H)

170(W) × 493(L) × 241.1(H)

170(W) × 541.5(L) × 241.1(H)※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)

Corresponding voltage and Certificate

GCD-051X

GCD-136X

GCD-201X

Voltage

Order CodeCE
MarkedTUV
cTUVusMarked Marked

Single phase, 100V

A41778000001—

Single phase, 200V

A41778100000

—

—

—

Single phase, 220-230V A41778200000

—

—

—

—

1000

(L/min)50Hz—

Single phase, 100V

A41780000006

—

—

—

Single phase, 200V

A41780000001

—

—

—

Single phase, 220V

A41780000002

—

—

—

Three phase, 200V

A41780000003

—

—

—

Single phase, 100V

A41790000001

—

—

—

Single phase, 200V

A41790000005

—

—

—

Single phase, 220V

A41790000002

—

—

—

Three phase, 200V

A41790000007

—

—

—

— : Not Available,  : Available

GCD-201X
GCD-136X

100

Pumping Speed

Model

Pumping speed curves

GCD-051X

10

1
10-1

1

101

102

Pressure※ Further details can be found on our website.

103

104

105
(Pa)

Gas ballast valve open

Outside drawing appears in Page 49.

23

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Turbo Molecular Pumping System

VPT Series

VPT-060

Features

Applications

1. Completely dry pumping unit
2. Compact installation space• Analytical/scientific equipments• Medical/Pharmaceutical equipments• Suitable for clean vacuum environment

VPT-060

Specifications
VPT-060Model

10−5 Pa

Ultimate pressure

Main pump

Turbo molecular pump (air cooling) 60L/sec

Backing pump

Diaphragm type dry vacuum pumps 20L/min

Power required

Single phase, 50/60Hz, 220V, 0.32kVA

Inlet flange

ISO63 (Option : KF-40)

Weight17kg

Overall dimensions

340mm(W) × 340mm(D) × 355mm(H)

Order CodeA53021000502

Exhaust System Drawing
VPT-060

Outside drawing
340

Suction port ISO63

100

160

80

ISO63
TMP
with Plug adapter

DAU-20335

Turbo-molecular pump
Diaphragm type dry vacuum pump

310

Silencer

Corresponding voltage and Certificate
Model
VPT-060

Voltage

CE
MarkedOrder CodeTUV
cTUVusMarked Marked

Single phase, 100V A53021000000

—

—

—

Single phase, 220V A53021000502

—

—

—

— : Not Available,  : Available※ Further details can be found on our website.

24 | SMALL VACUUM PUMPS & SYSTEMS CATALOG300
TMP Controller

Rubber legs
4-M4

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Mechanical Booster Pumping Systems

VMR Series

VMR-050

Features

Applications

1. Pumping speed can be increased significantly in the pressure range
where backing pump pumping speed is decreased.
2. Compact installation space
3. Pumping can be started with a start button from atmospheric pressure
to ultimate pressure.

• Rotary evaporator• Centrifugal evaporator• Vacuum filtration

VMR-050

Specifications

Pumping speed curve
VMR-050

Model

1000

(L/min)−2

4.0×10 Pa

Main pump

Mechanical booster pump 833 L/min(at 100Pa)

Backing pump

Oil rotary vacuum pump 200 L/min

Inlet flange

VG-40

100

Single phase, 50/60Hz,
100 – 120V/200 – 240V, 1.5kVA

Power required
Weight42kg

Overall dimensions

VMR-050

100—120V

241.4mm(W) × 532mm(D) × 399mm(H)

200—240V

241.4mm(W) × 581mm(D) × 399mm(H)Pumping Speed

Ultimate pressure

10

Exhaust System Drawing
VMR-050

Corresponding VG40
1
10-2

10-1

101

1

Mechanical Booster Pump

102

103

104

Pressure

105

(Pa)

Outside drawing
241.4
(5.8)

Oil-Sealed
Rotary Vacuum Pumps

121.５

231

532

109.５

20 33

(4.6)
Switch140

Rack

Voltage

VMR-050

Single phase,100—120V
Single phase,200—240V

ＭＢＳ-052

CE
MarkedA43510000002

—

—

—

A43520000002

—

—

—

(16)

507

ＶＧ４０ (Corresponding)(Suction port)

Single phase,
100-120V
Exhaust pipe
(Exhaust port)

Terminal box

39９

Order Code238

GLD-201B
Single phase,
１００-１２０V

259

Corresponding voltage and Certificate
Model

9

TUV
cTUVusMarked Marked
130
3P Power cord with a plug

— : Not Available,  : Available

Plug adapter

Rubber legs
4-dia.6
133

Rubber legs
2-M5

260

※ Further details can be found on our website.

25

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

High Vacuum Pumping Systems

VPC Series

VPC-051 VPC-051A VPC-250F

Features

Applications

1. Compact installation space
2. Vacuum chamber can be opened without stopping a main pump.
3. Air-cooled type oil diffusion pump is used and cooling water is notnecessary.
4. Main pump is protected by an automatic leak valve in case of a power
failure.
5. Easy to move by installed caster

VPC-051• Analytical equipment• Laboratory experiment• Vacuum evaporation equipment

VPC-051A

VPC-250F

Specifications
Model
Ultimate pressure
Main pump
Backing pump
Main valve
Sub valve
Inlet flange
Power required
WeightOverall dimensions
Order CodeVPC-051
7.0 × 10−4 Pa
1.5 × 10−4 Pa (LN2)
Oil diffusion pump (air cooling) 50 L/sec
Oil rotary vacuum pump 20 L/min
25A Butterfly valve
Three way valve
VG-25
Single phase, 50/60Hz, 100V, 0.63kVA
20kg
350mm(W) × 320mm(D) × 461mm(H)A43032000000

VPC-051A
7.0 × 10−4 Pa
1.5 × 10−4 Pa (LN2)
Oil diffusion pump (air cooling) 50 L/sec
Oil rotary vacuum pump 20 L/min
25A Butterfly valve
Three way valve
VG-25
Single phase, 50/60Hz, 100V, 0.63kVA
20kg
350mm(W) × 320mm(D) × 461mm(H)A43042000000

VPC-250F
10−4 Pa
10−5 Pa (LN2)
Oil diffusion pump (air cooling) 200 L/sec
Oil rotary vacuum pump 100 L/min
65A Butterfly valve
Three way valve
VG-65
Single phase, 50/60Hz, 100V, 1.35kVA
55kg
530mm(W) × 537mm(D) × 735mm(H)A43060000000※ : Ionization vacuum gauge · Pirani vacuum gauge · LN cold trap · Conversion flange · Oil mist trap are options.

Oil diffusion pumpModel
Ultimate pressure
Maximum evacuation capacity
Critical back-pressure
Required power
Recommended oil
WeightInlet flange
Outlet flange
Cooling method

Exhaust System
Drawing

DPF-050
10−5 Pa
50 L/sec
13 Pa
Single phase, 50/60Hz, 100V, 0.25kWSY 20 cc
1.8 kgVG-25
dia.14mm
air coolingDPF-200
10−5 Pa
200 L/sec
20 Pa
Single phase, 50/60Hz, 100V, 0.45kW
SX 70 cc
5.0 kgVG-65
dia.27mm
air cooling

VPC-051A

VPC-051

Gauge
port

Gauge port

ROUGH

VENT. V

CLOSE

Three-wayvalve

Main valve

VENT. VFORE

LN cold trap
(Option)Gauge port ROUGH

Gauge port
(dia.18)

LEAK. V

Three-way
valve
Gauge
port

VPC-250F

VG25

VG25

Main valve

Suction port
(VG-65)Three-way valve
Gauge port
(dia.18)

Gas inlet valve

Leak port

Main valve(65A) / (100A)FORE
LN cold trap
(Option)Automatic
Leak
Valve

BACK. P

MAIN. P

BACK. P

MAIN. P

※ Further details can be found on our website.

26 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

Oil-sealed rotary
vacuum pump

Oil diffusion pump

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

High Vacuum Pumping Systems

DEPOX Series

VFR-200M/X VWR-400M/X
VTR-350M/X VTS-350M/X

Features

Applications

1. Easy to move by installed caster2. System safeness is ensured with installed adjuster.
3. Vacuum chamber can be opened without stopping a main pump.
4. Optional parts (Vacuum gauge) can be installed to the same rack.

VFR-200M/X• Analytical equipment• Laboratory experiment• Vacuum evaporation equipment

VWR-400M/X

VTR-350M/X

VTS-350M/X

Specifications
Model
Ultimate pressure
Main pump
Backing pump
Main valve
Sub valve
Inlet flange
Power required
WeightOverall dimensions
Order Code

VFR-200M/X
VWR-400M/X
VTR-350M/X
VTS-350M/X
10−4 Pa
10−4 Pa
10−4 Pa
10−4 Pa
10−5 Pa (LN2)10−5 Pa (LN2)10−5 Pa (LN2)10−5 Pa (LN2)
Oil diffusion pump
Oil diffusion pump
Turbo molecular pump
Turbo molecular pump(air cooling)(water cooling)(air cooling)(air cooling)
200L/sec
400L/sec
345L/sec
345L/sec
Scroll pump
Oil rotary vacuum pump
Oil rotary vacuum pump
Oil rotary vacuum pump
100L/min
200L/min
200L/min
250L/min
65A Butterfly valve
100A Butterfly valve
100A Butterfly valve
100A Butterfly valve
Three way valve
Three way valve
Three way valve
Three way valve
VG-65
VG-100
VG-100
VG-100Single phase,
Single phase,
Single phase,
Single phase,
50/60Hz, 100V, 1.4kVA
50/60Hz, 100V, 1.6kVA
50/60Hz, 100V, 1.4kVA
50/60Hz, 100V, 0.9kVA
120kg
140kg
140kg
135kg
730mm(W) × 584mm(D) × 804mm(H) 730mm(W) × 673mm(D) × 804mm(H) 730mm(W) × 584mm(D) × 804mm(H) 730mm(W) × 584mm(D) × 804mm(H)A43500100000
A43500300000
A43500600000
A43501200000※ : Ionization vacuum gauge · Pirani vacuum gauge · LN cold trap · Conversion flange · Oil mist trap are options.

Exhaust System Drawing
VFR-200M/X
Gauge port
(dia.18)
CLOSE

VWR-400M/X

VG65

ROUGH
Three-way
valve

VENT.V

Gauge port
(dia.18)
CLOSE

Main valve
LN
cold trap(Option)Gauge RP.VENT
port(dia.18)

Gauge
port
(dia.18)

ROUGH

VENT.V

Three-wayvalve

Main valve
LN
cold trap(Option)RP.VENT

Gauge port
(dia.18)
Gauge CLOSE
port(dia.18)

D.P

R.P

VTS-350M/X

VG100

ROUGH

VENT.V

Three-wayvalve

Main valve

Automatic
Leake
valve

LN
cold trap(Option)Gauge port
(dia.18)
Gauge
CLOSE
port
(dia.18)

D.P

R.P

VG100

ROUGH

VENT.V

Three-wayvalve

Main valve

Automatic
Leake
valve

LN
cold trap(Option)
FORE

FORE

FORE

FORE
R.P

VTR-350M/X

VG100

T.M.P

S.P

T.M.P

※ Further details can be found on our website.

27

Vacuum coating method basics
1. Vacuum evaporation principle(Resistance heating method)

Exhaust System Drawing

Vacuum evaporation is a method used to create thin films
by the condensation and deposition of vaporized atoms
and molecules directly from an evaporation source(materials such as compounds or metals) onto a
compatible workpiece surface by heating the evaporation
source in a high vacuum environment.

VTR-350M/ERH
Ｂｅlljar

ROUGH
CLOSE

ＰＧ

Evaporation system

VENT.V
Main valve

Three-wayvalve

Automatic
Leak valve

Holder

ＬＮ cold trap
（Ｏption）

FORE

Ｒ.Ｐ

Thin film

ＩＧ

Feedthrouugh
ｃｏ
ｌ
ｌ
ａ
ｒ

ＯＭＩ

ＴＭＰ

Substrate+Ar+
VFR-200M/ERH
Ar
+
Ar

+
Ar

ＢｅlljarＩＧ

Feedthrouugh
ｃｏ
ｌ
ｌ
ａ
ｒ

Material

ROUGH
CLOSE

Evaporation source

ＰＧ

VENT.V
Main valve

Three-way
valve

RP.VENT

ＬＮ cold trap

FORE

Ｒ.Ｐ

ＯＭＩ

Ｄ．
Ｐ

2. Vacuum evaporation principle(Electron beam method)

Electron beam evaporation is a method used to create
thin films by the condensation and deposition ofvaporized atoms and molecules directly from anevaporation source (materials such as compounds ormetals) onto a compatible workpiece surface byirradiating and heating the evaporation source with anelectron beam in a high vacuum environment.
Electron beam vacuum evaporation is widely usedbecause it can easily deposit high-melting pointmaterial, and allows deposition material to be thinly
deposited at a high rate.

Electronbeam

Material

Electron

Crucible

3. Sputtering method principle

Sputtering is a process whereby cathode surface atoms
are ejected due to the bombardment of the cathodesurface (target) by fast moving positive ions. The
phenomenon of sputtering is a method for creating thinfilms.
With basic sputtering, first argon plasma is introduced inorder to create argon (Ar) ions. Momentum exchange
occurs between the Ar ions flying about the target
surface of a base material.The target atoms (thin film
material) then adhere to the substrate.
A characteristic of the sputtering method is that theatoms of the target material have momentum and so
dense films are possible even for environments withfairly high gas pressure (about 1 to 0.1Pa). Moreover,heating is unnecessary, meaning, it is a technology thatallows films to be made even for materials with highmelting points.

28 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

Sputtering system
Anode
Substrate
Atom

+
Ar

+
Ar

Thin film

+
Ar
+
Ar

Argon ionTargetCathodeVacuum Coater Selection Guide
1. Intended use and application
liquid crystal
panel

Solar cell
Indicator tube
with LED

Paint evaluation

ULVAC KIKO vacuum deposition systems
can be used at various R&D.
Electronic

condenser

Fuel cell

Organic
electroluminescence

Semiconductor(LSI)

2. Film formation materials / film thickness / substrate size
Film formation materials

Organic material (Low melting point)
Metallic material (Low melting point)※Example: Au, Ag, Al, Ca, Cu, Mg

Metallic material (High melting point)※Example: Mo, Cr, Pt, Ti, Ni, Pd

Structure of film

Single layer film
Composite film
Multilayer film

Substrate size, amount

Organic material(Low melting point)Film
formation Metallic materialmaterials (Low melting point)
Metallic material(High melting point)

Vacuum coater (Resistanse heating)
DEPOX
VPCseries
VPC-1100 VTR-060M/
061/061A VPC-260F
ERH








Composite film–

Multilayer film–

Standard numberof film layers(Max.※)
Substrate Recommended
size
size (Max.)

VTR-151M/
SRF

RFS-201–

Single layer film
Structureof film

Sputtering

1


–


1 (4)

3 (5)

1 (3)

–



1

3

sq.25mm
sq.50mm
sq.50mm
sq.50mm(sq.50mm) (sq.140mm) (sq.220mm) (sq.120mm) dia.80mm dia.50.8mm※ : Optional: Possible with option: Difficult		– : Impossible
 : Possible· Substrate size may be fluctuated depends on customers conditions such as the number of electrodes, mounting position,material and pressure.

29

Resistance heating evaporation sources
Evaporation sources to heat the evaporation source material are offered in boat, filament, and crucible
types.
You have to choose the evaporation source depending on the type and shape of intended film
deposition materials.
● Example for materials

Ag / Al / Au / Cu / Dy / Ni / Pt / Ti / Alq3 / NPB / LiF, etc.

※Electron beam method is recommended for the material with a highmelting point.
※Deposition conditions may differ depends on specifications, shapes, etc.

Resistance heating evaporation source
Filament type

Boat type

Crucible type

Precautions when installing sputtering equipment
Sputtering equipment utilizes high-frequencies and therefore falls under the laws and regulations ineach country.
Kindly check the laws and regulations before installation.

30 | SMALL VACUUM PUMPS & SYSTEMS CATALOGDry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Vacuum Coater

VPC Series

VPC-061 VPC-061A VPC-260F

Features

Applications

1. Compact installation space
2. Easy viewable through glass belljar and easy maintenance
3. Vacuum chamber can be opened without stopping a main pump.
4. Main pump is protected by an automatic leak valve in case of a power
failure.

VPC-061• Basic R&D for Electronic material, Semiconductor,
solar cell
• R&D of thin film for layer and organic EL

VPC-061A

VPC-260F

Specifications
Model
Ultimate pressure
Evacuation time
Bell jar size
Substrate electrode distance
Evaporation electrode structure
Evaporation power supply
Main pump
Backing pumpLiquid Nitrogen trap
Automatic leak valve
Control system
Weight (Body)(Power supply)
Overall dimensions (Body)(Power supply)Power required (Body)(Power supply)
Order CodeVPC-061
1.3×10−3 Pa
6.6×10−4 Pa (LN2)
4.0×10−3 Pa/20min
1.3×10−3 Pa/20min (LN2)
Glass belljar (dia.150mm × 200mm(H))
Max 100mm
1 point
0 – 10V 150A (Max)Oil diffusion pump (Air cooling) 50L/sec
Oil rotary vacuum pump 20 L/min
Equipped−
Manual control
28kg
40kg
434mm(W) × 422mm(D) × 673mm(H)480mm(W) × 435.3mm(D) × 149mm(H)Single phase, 50/60Hz, 100V, 0.63kVA
Single phase, 50/60Hz, 200V, 1.5kVA
A43182000000

Optional Parts(for VPC-260F, ※ : It can be used for VPC-061 and VPC-061A)

Electrode
structure
options
Feed throughcollarVacuumchamber
Accessories
for innervacuumchamber
System exterior
Vacuum gauge
Pumping system

2 points switch
2 points
3 points switch

3 points
1 point + 2 pints switch
2 points + 2 points

16 ports (Side 16)
Bell jar holder
Metal Bell jar
Bell jar cover※Sample holder※
UFC070 Adapter
Adhesion shield plate
KF-25 Adapter
Electrode partition
Gas intrduction port
Gauge port set
Carbon electrode set
Hermetic port set
Substrate heating device
350 degrees C
Sealing flange set
Deposition controller
Control panel
Pirani vacuum gauge※
Ionization vacuum gauge※
Automatic leak valve for Oil rotary vacuum pump

VPC-061A
1.3×10−3 Pa
6.6×10−4 Pa (LN2)
4.0×10−3 Pa/20min
1.3×10−3 Pa/20min (LN2)
Glass belljar (dia.150mm × 200mm(H))
Max 100mm
1 point
0 – 10V 150A (Max)Oil diffusion pump (Air cooling) 50L/sec
Oil rotary vacuum pump 20 L/min
Equipped
Equipped
Manual control
32kg
40kg
434mm(W) × 422mm(D) × 673mm(H)480mm(W) × 435.3mm(D) × 149mm(H)Single phase, 50/60Hz, 100V, 0.63kVA
Single phase, 50/60Hz, 200V, 1.5kVA
A43192000000

VPC-260F
1.3×10−3 Pa
6.6×10−4 Pa (LN2)
4.0×10−3 Pa/20min
1.3×10−3 Pa/20min (LN2)
Glass belljar (dia.300mm × 300mm(H))
Max 200mm
1 point
0 – 10V 150A (Max)Oil diffusion pump (Air cooling) 200L/sec
Oil rotary pump 100 L/min
Equipped
OptionManual control
75kg
40kg
530mm(W) × 550mm(D) × 1135mm(H)480mm(W) × 435.3mm(D) × 149mm(H)Single phase, 50/60Hz, 100V, 1.35kVA
Single phase, 50/60Hz, 200V, 1.5kVA
A43210000000

Vacuum chamber (VPC-260F)
3

2

1
6

80

5

dia.9

0

1
5

4
1

1

1 Service port
2 Gauge port
Hermetic seal
3port
4 Shutter
5 Electrode6 Prop※ Further details can be found on our website.

31Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

High Speed Vacuum Coater

VPC Series

VPC-1100
Applications

Features
1. Effective system with high pumping down performance• 10−4Pa from atmospheric pressure in 10 minutes• Cooling water can be stopped after 15 minutes from the system is shutdown.
2. Scalable functions with various options• Multi-layer deposition and co-deposition are available with additional
evaporation power supply.
3. Compact and easy mobility
4. EB Deposition is available as optional.

• Basic R&D for Electronic material, Semiconductor,
solar cell
• R&D of thin film for layer and organic EL

Standard Specifications
VPC-1100Model※ Optional Parts• Conflat flange
UFC070 Adapter

4.0 × 10−4 Pa
1.3 × 10−4 Pa (LN2)

Ultimate pressure

4.0 × 10−3 Pa / 10min
10−4 Pa / 10min (LN2)

Evacuation time

※ Optional Parts• Ionization vacuum gauge• Deposition controller• System rack

Bell jar size

dia.390mm × 350mm(H)

Substrate electrode distanceMax 300mm

Evaporation electrode structure

3 points switch (source length : 100mm)

Evaporation power supply

0 – 10V 150A (Max)Oil diffusion pump (Water cooling) 1100L/sec
Oil rotary vacuum pump 200L/min × 2
Liquid Nitrogen trap

Vacuum system
Control system

Manual control

Vacuum gauge

Pirani vacuum gauge “GP-1G”
Three phase 200V 5.0 kVA
Single phase 100V 1.0 kVA

Power required

1.5L/min (Water temperature : 20 degrees C,
Water pressure : 200 – 300kPa (gauge pressure))

Water requirement
Weight313kg

Overall dimensions (W) × (D) × (H)1235mm × 836mm × 2155mm
Three phase 200V Cable 4m
Single phase 100V Cable 4m

Accessories
Order CodeA43250000000※ Optional parts in the picture are not equipped.

VPC-1100

Vacuum chamber

46Special parts

Electrode structure
options

8

4

Optional Parts
Evaporation Electrode SEREM “PSE-150C”
Deposition Controller
Film thickness sensor
Ionization vacuum gauge
Electron beam evaporation source
Deposition shield plate
Electrode partition
Water cooling metal bell-jar
UFC070 flange
Oil mist trap (“OMI-200” “OMT-200A”)
Sample holder
Side/back panel
Additional shutter
Evaporation source/power supply for EB
Flow switch, Substrate heating device
Gas introduction port for service port
System rack, Carbon electrode
Evaporation electrode 1 point + 2 points switch
2 points + 2 points switch
2 points + 3 points switch

6

6
25

25
3

3
dia.

120

7

4
160
4

4
9

1
2
3
4
5
6

10

11

4

Plate
FilterService port (L)Service port (S)Gauge port.1
Hermetic seal port.3 pcs.

※ Further details can be found on our website.

32 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

4
12

80

Special components

5260※ Optional Parts• Side panel

7
8
9
10
11
12

Shutter
Electrode COM
Electrode 1
Electrode 2
Electrode 3
PropDry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Vacuum Coater

DEPOX Series

VFR-200M/ERH VWR-400M/ERH
VTR-350M/ERH VTS-350M/ERH
Applications

Features
1. Deposition system for metal and organic material
2. Variable combination is available for pumping unit.
3. High scalable functions
4. Enhanced safeness and reliability
5. Multi-layer deposition and co-deposition(Max: 4 layers) are available
with additional evaporation power supply and electrode.
6. Easy viewable through glass bell jar and easy maintenance

VFR-200M / ERH

Specifications
Model
Ultimate pressure
Evacuation time

Bell jar size
Substrate electrode distance
Evaporation electrode structure(source length)
Evaporation power supply

VWR-400M / ERH• Basic R&D for Electronic material, Semiconductor,
solar cell
• R&D of thin film for layer and organic EL※

VTR-350M / ERH※ : Optional parts added.

VTS-350M / ERH

VFR-200M / ERH
8.0 × 10−4Pa(6.0 × 10−4Pa LN2)
4.0 × 10−3Pa/15min(3.0 × 10−3Pa/15min LN2)
dia.300mm × 300mm(H)Max 200mm

VWR-400M / ERH
4.0 × 10−4Pa(3.0 × 10−4Pa LN2)
4.0 × 10−3Pa/10min(3.0 × 10−3Pa/10min LN2)
dia.300mm × 300mm(H)Max 200mm

VTR-350M / ERH
4.0 × 10−4Pa※(2.0 × 10−4Pa LN2) 1−3
4.0 × 10 Pa/10min※(3.0 × 10−3Pa/10min LN2) 1
dia.300mm × 300mm(H)Max 200mm

VTS-350M / ERH
4.0 × 10−4Pa※(2.0 × 10−4Pa LN2) 1−3
4.0 × 10 Pa/10min※(3.0 × 10−3Pa/10min LN2) 1
dia.300mm × 300mm(H)Max 200mm

1 point (100mm)

1 point (100mm)

1 point (100mm)

1 point (100mm)

0 – 10V 150A (Max)0 – 10V 150A (Max)0 – 10V 150A (Max)Oil diffusion pump (Air cooling) Oil diffusion pump (Water cooling)
Turbo molecular pump
200L/sec
400L/sec
345L/sec
Backing pump
Oil rotary pump 100L/min
Oil rotary pump 200L/min
Oil rotary pump 200L/min
In-line trap
OMI-100
OMI-200
OMI-200
Vacuum gauge
ISG1 (WP-01/M-34)
ISG1 (WP-01/M-34)
ISG1 (WP-01/M-34)
Weight
145kg
148kg
165kg
730mm × 603mm × 1161mm
731mm × 730mm × 1161mm
730mm × 584mm × 1161mm
Overall dimensions (Body)(W) × (D) × (H)(Power supply) 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm(Body)
Single phase 100V 1.4kVA
Single phase 100V 1.6kVA
Single phase 100V 1.4kVA
Power required(Power supply)Single phase 200V 1.5kVA
Single phase 200V 1.5kVA
Single phase 200V 1.5kVA
Order CodeA43504100000
A43504300000
A43504600000
Main pump0 – 10V 150A (Max)
Turbo molecular pump
345L/sec
Scroll pump 250L/min−
ISG1 (WP-01/M-34)
160kg
730mm × 584mm × 1161mm
480mm × 435.3mm × 149mm
Single phase 100V 0.9kVA
Single phase 200V 1.5kVA
A43505200000※1 : LN2trap is optional.

Optional Parts
Electrode
structure
options
Feed throughcollarVacuumchamber
Accessories
for innervacuumchamber
Systemexterior
Pumpingsystem2 points switch
2 points simultaneously
3 points switch
3 points simultaneously

Vacuum chamber
6

1 point + 2 points switch
2 points switch + 2 points switch
2 points switch + 1 point + 1 point

6

20 ports (Side 16, Bottom 4) (300 x 100H)
Bell jar holder
Metal Bell jar
Bell jar coverSample holder
UFC070 Adapter
Adhesion shield plate
KF-25 Adapter
Electrode partition
Gas introduction port
Gauge port set
Carbon electrode set
Hermetic port set
Substrate heating device
350 degrees C
Sealing flange set
Elevating device
Control panel
Side panel, Back panel
Side panel for control panel
Deposition controller
Back panel for control panel
Automatic leak valve for Oil rotary vacuum pump
(VFR-200M/ERH, VWR-400M/ERH)

1 Service port
2 KF-25 Flange
Hermetic seal
3port
4 Shutter
5 Electrode
Spare port for6electrode
7 Prop

2

1

5

3

1

80
dia.9

0

6

5

4

7
1

1

※ Further details can be found on our website.

33

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Vacuum Coter

VTR Series

VTR-060M/ERH

Features

Applications

1. Compact installation space
2. Turbo molecular pump installed
3. High vacuum exhaust can be started with switch operation.
4. Various options available such as multi-layer film deposition, substraterotation etc.
5. Ideal for the deposition of low-melting-point metal

VTR-060M/ERH

Specifications

VTR-060M/ERH
1.5 × 10−3 Pa
4.0 × 10−3 Pa/20mindia. 236mm × 250mm(H)195mm
1 point
0 – 10V 80A(MAX)
Turbo Molecular Pump (Air cooling) 60L/sec
Oil rotary pump 20L/min
OMT-050A
50kg
24kg
428mm × 438mm × 713mm
480mm × 435.3mm × 149mm
Single phase, 50/60Hz, 100V, 0.6kVA
Single phase, 50/60Hz, 100V, 0.8kVA
A53502000000

Model
Ultimate pressure
Evacuation time
Chamber size
Substrate electrode distance
Evaporation electrode structure
Evaporation power supply
Main pump
Backing pump
Oil mist trap
(Body)
Weight(Power supply)
Overall dimensions (Body)(W) × (D) × (H)(Power supply)(Body)
Power required(Power supply)
Order Code

Systemexterior
Vacuumgauge
Evaporetion
power supply

Vacuum chamber

2 points switch
2 points simultaneously
3 points switch
Holder A (dia 200mm)
Holder B (dia 200mm M4 tap)
CRTM (CRTS) with water cooling piping
Electrodes basic set
Carbon electrode set
Substrate heating device 350 degrees C
Substrate heating device 650 degrees C
Substrate rotation (Axial)
KF16 Gauge port (dia 18)
System rack

9

1

7
3
4

d

4

1
2
3
4
5
6
7

10

7

Top coverSample holder (Optional parts)
Glass chamber
Shutter
Evaporation source
Base plate
Electrode※ Further details can be found on our website.

34 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

70

5

7

Single phase 200V 1.5kVA 0-10V 150A (Max)

7

60
.
ia

6

Vacuum gauge set (ISG1/SH-2/SPU)

8

10

2

195

Optional Parts
Electrode
structure
options
Accessories
for innervacuumchamber• Basic R&D for Electronic material, Semiconductor,
solar cell
• R&D of thin film for layer and organic EL

8Service port with Sealing flange
Additional KF flange port

9Service port with Sealing flange
Additional Film thickness sensor

10

Sealing flange
Additional ElectrodeDry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

High frequency Sputtering System

RFS Series

RFS-201
Applications

Features1. Compact and easy mobilibity
2. High speed pumping is attainable with TMP.
3. Introduction gas can be controlled continuously with flow control valve.
4. Suitable for pre-sputtering
5. High accurate thin film

• Basic R&D for basic material, high melting material,
insulating material and semiconductor material

Specifications
RFS-201

Model

Ultimate Pressure
Vacuum performance
Evacuation time
Vacuum chamber

Vacuum chamber

Exhaust system

Operation system

Control system
Setup

RFS-201

Optional Parts
Liquid Nitrogen trap

CathodeStandard target
Effective area of sputtering
Sputtering speed
Film thickness distribution
Substrate heating temperature
Substrate electrode distance
Main pumpLiquid Nitrogen trap
Backing pump
Oil-mist trap
Main valve
Sub valve
Automatic leak valve
Control
RF power supply
Pirani vacuum gauge
Ionization vacuum gauge
Overall dimensions, Weight

Order Code

6.6×10−4Pa
6.6×10−3Pa/5min
Metal chamber(200mm (W) × 250mm (D) × 170mm (H))
dia.80mm, 1way
dia.80mm × t1 – 5mm
dia.50mm
SiO2, More than 20nm/min at deposition
SiO2, within ±8% at dia.50mm
Max 350 degrees C
30mm – 50mm (Variable)
Oil diffusion pump (Water cooling) 150L/sec
OptionOil rotary pump 100L/min
OMT-100A
Clapper valve
Three ways valve
OptionManual control
Max 300W (Variable : 0 – 300W)
G-TRAN
Option764mm(W) × 723mm(D) × 1648mm(H)260kg
A43261000000

Utility
Power required
Ground terminal

Single phase, 50/60Hz, 200V, 2.8kVA
A grade (ground resistance/10Ω or less)5.0L/min Water temperature : Less than 25 degrees C,
Water pressure : 200 – 300kPa (gauge pressure)

Water requirement

Ionization vacuum gauge

Vacuum chamber

Magnetron
In line trap (OMI-100)
Turbo molecular pump
DC power supply

7

Automatic leak valve for oil rotary pump

11

3

1

6

8

5
(30)

4
10
9

System rack

2

12

1
2
3
4
5

Chamber
Taeret electrode
Substrate electrode
ShutterCurrent guide terminal
Thermocouple introduction
6
terminal
7 Gauge port
8 Sample holder
9 Backing plate
10 Target
11 Service port
12 Front door

※ Further details can be found on our website.

35

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

High frequency magnetron Sputtering System

SCOTT Series

VTR-151M/SRF
Applications

Features
1. Parallel-plate type RF magnetron discharge method
2. Turbo molecular pump is used for main pumping.
3. Multiple deposition is available by dia.2 inch , 3 cathodes.
4. All gauges are installed in the rack.
5. Sputtering speed 30nm/min (SiO2) is available by magnetron sputtering.
6. Easy handling for substrate exchange and maintenance from top coveropen style
7. Reactive sputtering is available as optional.

• Basic R&D for basic material, high melting material,
insulating material and semiconductor material

Specifications

VTR-151M/SRF (SCOTT-C3)
Ultimate Pressure
6.6×10−4Pa
Vacuumperformance Evacuation time
6.6×10−3Pa/5min
Vacuum chamber
Metal chamber (dia.310mm × 160mm (H))
Cathodedia.2inch, 3ways
Standard target
dia.2inch(dia.50.8mm) × t1mm
Effective area of sputtering
dia.25mm
Vacuumchamber
Sputtering speed
SiO2, More than 30nm/min at deposition
Film thickness distribution
SiO2, within ±10% at dia.25mm
Substrate heating temperature
Max 350 degrees C
Substrate electrode distance
50mm - 90mm (Variable : Half fixed)
Main pump
Turbo molecular pump (250L/sec)
ExhaustBacking pump
Oil rotary pump 200L/min
systemOil-mist trap
OMT-200A
Main valve
Butterfly valve
Sub valve
Three ways valve
OperationsystemAutomatic leak valve
OptionControlManual control
RF power supply
Max 300W (Variable: 0 – 300W)
Control
Pirani vacuum gauge
GP-1GRY
systemIonization vacuum gauge
ISG1/SH2-1
1081mm(W) × 853mm(D) × 1104mm(H)
Setup
Overall dimensions, Weight
400kg
Order CodeA43411000000
Model

SCOTT-C3※Optional parts added

Utility

Optional Parts

Power required
Ground terminal
Water
requirement

Substrate heating 600 degrees C(Water cooling chamber)
Mass flow controller

Single phase, 50/60Hz, 200V, 3.5kVA
A grade (ground resistance/10Ω or less)2.0L/min Water temperature : Less than 25 degrees C,
Water pressure : 200kPa (gauge pressure)

Vacuum chamber

In line trap (OMI-200)

1

DC power supply
Introduction gas (2,3 lines)

993Automatic leak valve for oil rotary pump

1

3

2
3

8

4

1

5

dia.70※ Further details can be found on our website.

36 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

7
6

1
2
3
4
5
6
7
8
9

Sealing flangeElectrode partition
CathodeGas introduction
Viewport
Shutter handle
Shutter
Vent valve
Gauge portDry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Vacuum Coater Optional Parts Guide: Optional correspondence – : Unavailable : Standard
VTR-350M/ERH VTS-350M/ERH VFR-200M/ERH VWR-400M/ERH VPC-1100 VPC-260F VPC-061 VPC-061A VTR-060M/ERH VTR-151M/SRF RFS-201

Model
Oil diffusion pump
Turbo molecular pump
1point2 points switch
2 points simultaneously
3 points switch
3 points simultaneously
1 point + 2 points switch
2 points switch + 2 points switch
2 points switch + 3 points switch
Electrode EB deposition of 1 point
structure
options EB deposition of 4 points
EB deposition of 1 point andevaporation electrode 1 point
EB deposition of 1 point andevaporation electrode 2 points switch
EB deposition of 4 points switch andevaporation electrode 1 point
EB deposition of 4 points switch andevaporation electrode 2 points switch
Conventional cathode electrode
Magnetron cathode electrode
Glass bell jar
Vacuumchamber Metal bell jar (with water cooling tube)
Metal chamber
3 ports
7 ports
Feed 8 ports
throughcollar 12 ports
16 ports
20 ports
Bell jar holder
Bell jar cover
Elevating device
Substrate heating device
Sample holder
Electrode partition
Adhesion shield plate
Substrate rotation (Axial)
Gauge port set
Hermetic seal port set
Sealing flange set
UFC070 Adapter
KF-25 Adapter
Additional shutter
Gas introduction port (1 line)
Gas introduction port (2 lines)
Gas introduction port (3 lines)
Carbon electrode set
Evaporation Electrode SEREM “PSE-150C”
RF power supply
Sputtering power
supplyDC power supply
Oil-mist Trap
In-line Trap
Liquid Nitrogen trap
Pirani Vacuum Gauge
Ionization Vacuum Gauge
Deposition Controller
System rack
Control rack
Side panel
Back panel
Automatic leak valve for Oil rotary vacuum pump

※1 : Bell jar cover is required separately.

–

–








–






–





–
–
–




–



–

※3

※3
※3

※3

※3

※3

※3

※3

※3

※3

※3

–
–

–
–


–
–
–


–

–

–

–

–

–

–

–

–

–

–

※3

※2

–
–

–
–


–
–
–





–

※2

–

※1

※3

–

–



–
–
–
–
–
–

–
－
–





–
※1

–

–

–
–

–
–















–











–

–

–



※2 : Metal bell jar is necessary.




–
–
–
–
–
–

–




–
–

–
–



–
–






–

–
–



–
–

–
–

–
–



–
–

–
–

–

–
–




※1

–

–
–



–

–

※1

–
–
–
–

–

–

–

※3

※3

–

–
–

–

–

※2

–
–
–

※3

–

–

–

※3

–
–
–
–

※3

–
–
–
–
–
–
–
–
–
–

※2

※2



※1

△
△
△
–
–
–
–
–
–



※3

–

※3



–



–
–
–
–
–
–
–
–
–





※2

–
–
–

–
–



–




–
–
–

–

※3

–

△
–
–
–
–
–
–
–
–
–
–

–

–
–
–
–
–
–
–
–
–



–



–
–



–
–
–

※3 : Metal chamber is necessary

–
–

–
–
–
–
–
–

–

–
–



△
–
–


–
–
–
–
–



–
–

–
–

–
△
–
–
–
–
–
–
–
–
–
–
–

–
△
–
–
–
–
–
–
–
–
–
–
–

–
△
△
△
△
△
–
–
–
–
–
–
–
–
–
△

–
–

–
–

–
–



–





–



–
–

–
–

–
–
–

–
–



※4



–
–
△
△
△
△
△
–
–
△

–

–

–

–



–
–

△
–
–

–
–

–
–


















–
–
–
–
–
–

–
–
–
–
–
–

–
△
△
△
△
△
–

–
–
–
△
△
△
–
–
–

△
△
–
–

△
△
–
–

△

△











△
–

△
△

–
–
–

△
–
–
–

△

△












※4 : Power required Single phase 50/60Hz 100V

37

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Attachment of Oil Rotary Vacuum Pump Optional parts
Suction and Exhaust Trap

Suction and Exhaust Pipe

GLD-137CC+OMT-200A

GLD-137CC+Selectable Suction pipe

OMT-200A

GLD-137CC+Selectable Suction pipe
Hose port Suction pipe

Hose port
Suction pipe
dia.27

dia.12

dia.15

KF-25
Suctionpipe
O-ring+

50 mm sq adapter

Standard
Exhaust Cap

GLD-137CC+OMT-200A+OFI-200V
OFI-200V

OMT-200A

Standard
Suction pipeStandard
Suction pipeStandard
Exhaust Cap

KF Flange Attachment ProcessStandard Composition

GCD-136X+OMC-200

KF Flange

Clamp

OMC-200

After
Attachment

Centerring

KF Flange

GLD-137CC+OMI-200+KF-25 Exhaust pipe
Hose port
Exhaust pipe

KF-25
Exhaust pipe

Unnecessary case of Centering
KF Flange

O-ringOMI-200

Standard
Exhaust Cap
OMI-200
Cap

38 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

KF-25
Suction pipewith attached o-ring

ClampDry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Optional Parts
Accessories for Oil Rotary Vacuum Pumps
Fore-line Trap (Inlet filter)
ModelsUnits: mm.

Applications※OFI-050C※OFI-200C※OFI-050V※OFI-200V

Applicable models

A

B

C

Order Code

Prevent counter flow of oil diffusion

50L/min or lessdia. 74

114

KF-25

A44280000000

Prevent counter flow of oil diffusion

200L/min or lessdia. 99

150

KF-25

A44290000000

Prevent particles into vacuum pumps

50L/min or lessdia. 74

114

KF-25

A44300000000

Prevent particles into vacuum pumps

200L/min or lessdia. 99

150

KF-25

A44310000000

KF-25 clamp needed for installation.
※ : Filters are non-replaceable due to closed type.
: Pumping speed of applicable models is at 50Hz.

A
C

B

OFI-050C

OFI-200

Vacuum Pump Suction and Exhaust Filter
This filter can trap acidic gas, oil mist effectively by using ion-exchanged resin fiber. Filter can be placed both vacuum and exhaustside and filter can be replaceable.
ModelsFilter system

ApplicablemodelsPressure
range

Ambient
temperature

Ambient
humidity

SGT-100
SGT-200

Out · In · Pass

500L/minor less

0.1MPa7 – 40℃

85%(non condensing)

Suctionport
KF-25

Exhaustport
KF-25

HeightOrder Code

154mm

A54051010000

KF-40

KF-40

234mm

A56052020000

19

Suction port

16

H

Exhaustport

SGT-200

dia. 89.1

SGT-100

Bourdon Tube Vacuum Gauge
The scale is indicated in units of MPa showing the absolute pressure.
Select one of two models, 1. ADT or 2. AT, according to the attached directions.

dia.57sq.14

18

2. AT type

R1/4

12
dia.52.4

R1/4

dia.57

ADT型

18.5

sq.14
12

47

34

1. ADT type39

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Optional Parts
Vacuum Pump Oil

R-2 / R-7

SO-M

SMR-100

SO-M 4L
R-7

R-2

SO-M 1L

ModelsCan size

ModelsOrder Code

1L
A49130000000
SMR-100 (2 × 500ml cans)
A49130100000
4L canMineral oil
A49130200000
18L canCan size

Order CodeModelsCan size

Order Code1L can4L can18L can

A49140000000

ULVOILR-2

1L can4L can
20L can
2.2L can
8L can
20L can

A40340000001

SO-M

Synthetic oil

A49140100000

Synthetic oil

A49140200000

ULVOIL
R-7

Synthetic oil

Oil-mist Trap
ModelsA

B

C

Order CodeOMT-050A

GLD-040, GHD-031

G3/4

dia.6593

A49020000000

OMT-100A

GHD-101G1

dia.113135

A49030000000

OMT-200A

GLD-137AA, GLD-137CC
GLD-202AA, GLD-202BB

G1

dia.113135

A49040000000

ModelsB

C

D

A49150400000

OMT-200A
OMT-050A

B

Units: mm.

E

Order CodeOMI-100 ※GLD-040 , GHD-031 ,G1 dia.94 167 177 G1
GHD-101

A49050000000

OMI-200 ※GLD-137AA, GLD-137CC
G1 dia.116 167 178 G1
GLD-202AA, GLD-202BB

A49060000000: Filter replaceable ※ : In-line type

A

A49150800000

OMT-100AA

Applicable models

A49150300000

C: Filter replaceable

In-line Trap (Piping connection type oil-mist trap)

A49150200000

B

Units: mm.

Applicable models

A49150100000

E

C

D

: Adapter for Oil-mist Trap is necessary.

OMI-100

A

OMI-200

Adapter for Oil-mist Trap
This Adapter is required to adjust screw diameter from G3/4 to G1.

Type of Adapter
G 3/4 male × G1 female

Applicable models
GLD-040, GHD-031

Applicable models

A

B

Order CodeOMI-100
OMT-100A

A40900000103

E

Oil-mist Separator (Anti-corrosive type)
ModelsAdaptive oil-mist traps

Units: mm.

C

D

E

Order CodeOMC-050

GCD-051X(Anti-corrosive)

KF-25 dia.66

116

148

dia.74

A44260000002

OMC-200

GCD-136X, GCD-201X(Anti-corrosive)

KF-25 dia.90 140.5

173

dia.99A44270000002

B
A

C D

: Chemical type (KF-25 clamp needed for installation)
Drain port
(PT1/8)40 | SMALL VACUUM PUMPS & SYSTEMS CATALOGA

OMC-050

OMC-200

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Optional Parts
units : mm.

Clamp (Material : Aluminium)Standard

SCK-1016

SCK-1025

SCK-1040

Standard

SCK-2016

SCK-2025

SCK-2040

Flange size

KF-16

KF-25

KF-40

Flange size

KF-16

KF-25

KF-40

A

45

55

70

dia.A

17

26

41

B

61

72

90

dia.B

16

24

39

C

16

17.5

16

C

3.9

3.9

3.9

dia.D

22

32

47

D

8

8

8

.D

dia

B

Centerring (Material : SUS304)

dia. A
dia. B

Order Code A49510100000 A49510200000 A49510300000
A※ A shape of SCK-1025 is different from the left figure
and photograph.

C

Order Code A49510400000 A49510500000 A49510600000

C

D

Blank Flange (Material : SUS304)

Nozzle (Material : SUS304)

Standard

SCK-4016

SCK-4025

SCK-4040

Standard

SCK-2512

SCK-2518

Flange size

KF-16

KF-25

KF-40

Flange size

KF-25

KF-25

dia.A

30

40

55

dia.A

40

40

dia.B

17.2

26.2

41.2

B

6

6

C

6

6

6

C

35

35

dia.D

Order Code A49510700000 A49510800000 A49510900000

dia.A
dia.B

C

C

dia.D

12

18

Order CodeA49511000000

A49511100000

B
dia.A

Nipple (Material : SUS304)
dia. A
dia. Bdia. C

Elbow (Material : SUS304)
SCK-5016

SCK-5025

SCK-5040

KF-16

KF-25

KF-40

dia.A

30

40

55

dia.B

20.0

27.2

42.7

D

Standard
Flange size

dia.C

16

24

39

D

60

100

100

D

dia.B

dia.B
dia.C

D

dia.C

dia.A

Order Code A49511200000 A49511300000 A49511400000

dia.A

Standard

SCK-6016

SCK-6025

SCK-6040

Flange size

KF-16

KF-25

KF-40

dia.A

30

40

55

dia.B

20.0

27.2

42.7

dia.C

16

24

39

D

40

50

65

Order Code A49511500000 A49511600000 A49511700000

D

Cross (Material : SUS304)

Standard

SCK-7016

SCK-7025

SCK-7040

Standard

SCK-8016

SCK-8025

Flange size

KF-16

KF-25

KF-40

Flange size

KF-16

KF-25

dia.A

30

40

55

dia.A

30

40

dia.B

20.0

27.2

42.7

dia.B

20.0

27.2

dia.C

16

24

39

D

40

50

65

Order Code A49511800000 A49511900000 A49512000000
D

16

24

D

40

50

Order CodeA49512100000

A49512200000

D40dia. CStandard

SCK-9025

SCK-9040

Flange size

KF-16/25

KF-25/40

dia.A

30

40

dia.B

40

55

dia.C

20.0

27.2

dia.D

16

24

Order CodeA49512600000

A49512700000

Type a

dia.A
dia.B
E

D

dia.C

Standard SCK-3016
Flange size
KF-16
dia.A Type b 30
dia.B
17.2
Connected
dia.20
pipe
t=2
dia.C
E16
dia.D
20.0
E
10

SCK-3025
KF-25
40
26.2
20A
10S
24
27.2
20

dia. D

dia.B

KF Flange (Material : SUS304)

dia. C

Reducer (Material : SUS304)

dia.A

dia.C

D

D

dia. D

dia.A
dia. Bdia. Cdia. A
dia. Bdia. Bdia. C

dia.A

Tee (Material : SUS304)

SCK-3040
KF-40
55
41.2
32A
10S
39
42.7
20

Order Code A49512300000 A49512400000 A49512500000

dia.D

41

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Optional Parts

Outline Drawings

Accessories for Oil Rotary Vacuum Pumps
units : mm.

VCR Adapters (Material : Joint = SUS316, Flange = SUS304)
A

Male

dia.B

A

dia.B

FemaleFemaleStandard
Flange size
Tube diameter
VCR fitting sizeA
dia.B
Order Code

Male

Standard
Flange size
Tube diameter
VCR fitting sizeA
dia.B
Order CodeSCA-1614-F
KF-16
1/4 inch
1/4 inch
35.8
3.0

SCA-1638-F
KF-16
3/8 inch
1/2 inch
42.1
7.1

SCA-1612-F
KF-16
1/2 inch
1/2 inch
40.6
10.2

SCA-2514-F
KF-25
1/4 inch
1/4 inch
35.8
4.6

SCA-2538-F
KF-25
3/8 inch
1/2 inch
40.6
7.1

SCA-2512-F
KF-25
1/2 inch
1/2 inch
40.6
10.2

A49514000000

A49514100000

A49514200000

A49514300000

A49514400000

A49514500000

SCA-1614-M
KF-16
1/4 inch
1/4 inch
35.8
3.0

SCA-1638-M
KF-16
3/8 inch
1/2 inch
42.1
7.1

SCA-1612-M
KF-16
1/2 inch
1/2 inch
40.6
10.2

SCA-2514-M
KF-25
1/4 inch
1/4 inch
35.8
4.6

SCA-2538-M
KF-25
3/8 inch
1/2 inch
40.6
7.1

SCA-2512-M
KF-25
1/2 inch
1/2 inch
40.6
10.2

A49513400000

A49513500000

A49513600000

A49513700000

A49513800000

A49513900000

Gauge port (Material : SUS304)

Leak port (Material : SUS304)
A

dia. BA

Standard

SCO-1025

Flange size

KF-25

SCO-1040
KF-40

Pipe diameterdia.15dia.15

A

74

dia.B

Standard

SCO-3016

SCO-3025

Flange size

KF-16

KF-25

58

A

65

66.5

25

25

Order CodeA49513200000

A49513300000

Order CodeA49512800000

A49512900000

Standard

SCO-2025

SCO-2040

Flange size

KF-25

KF-40

Pipe diameterdia.18dia.18
58

A

74

dia.B

28

28

Order CodeA49513000000

A49513100000

Rubber Vacuum Hose

Flexible tube (Material : SUS316)• It covers each meter up to 10 meters. (at the most)Standard

Flange size (mm)Order Code

STK-016-250

KF-16/250

A49514600000

STK-016-500

KF-16/500

A49514700000

STK-016-1000

KF-16/1000

A49514800000

STK-025-250

KF-25/250

A49514900000

STK-025-500

KF-25/500

A40570000160

STK-025-1000

KF-25/1000

A49515100000

STK-040-250

KF-40/250

A49515200000

STK-040-500

KF-40/500

A49515300000

STK-040-1000

KF-40/1000

A49515400000

42 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

Size (I.D. × O.D.)

Adaptable hose port

Order Code6 × 18dia.8

A40900000107

7.5 × 20dia.9※

9 × 24dia.11, dia.12

15 × 36

dia.16 , dia.18

25 × 50

dia.27

12 × 30
18 × 42dia.15※dia.20, dia.22

A40900000109
A40900000111
A40900000113
A40900000117
A40900000202
A40900000204※ This hose is not suitable for some of the vacuum pumps.
Please kindly consult in this case.

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Optional Parts
Suction and Exhaust Pipes for Oil Rotary Vacuum Pumps
Suction Pipes
Type

Product

GLD-040
GCD-051X

GHD-101
GLD-137AA
GLD-137CC
GLD-202AA
GLD-202BB
GCD-136X
GCD-201X

Photo
numberMaterial

Order Code

Hose port suction pipe (dia.8 × M20)

BS + plate

A49420100001

+ 16

+ 17

1

Hose port suction pipe (dia.12 × M20)

BS + plate

A49420200001

+ 16

+ 17

2

Hose port suction pipe (dia.15 × M20)

BS + plate

A49420300001

+ 16

+ 17

3

Hose port type Hose port suction pipe (dia.18 × M20)

BS + plate

A49420400001

+ 16

+ 17

4

Hose port suction pipe (dia.22 × M20)

BS + plate

A49420500001

+ 16

+ 17

5

Hose port suction pipe (dia.27 × 40 mm sq)

ZDC + plate

A41068010133

6

Hose port suction pipe (dia.27 × 50 mm sq)

ZDC + plate

A41328010072

7

Hose port suction pipe for GHD-031 (dia.12)
For
GHD-031 only Hose port suction pipe for GHD-031 (dia.18)

BS + plate

A41624010391

8

BS + plate

A41696010020

9

BS + plate

A49421100001+ 16

KF-25 suction pipe (KF-25 × 40 mm sq)

PPS

A49421300001

KF-25 suction pipe (KF-25 × 50 mm sq)

PPS

A49421200001

A-type suction pipe (R1/4-L20 Male × M20)

BS + plate

A49421700001

1/4 screw type B-type suction pipe (R1/4 Female × M20)

BS + plate

A49421800001

C-type suction pipe (R1/4-L10 Male × M20)

BS + plate

A49421900001

40 mm sq Adapter (M20 Female)

ZDC + plate

A41430010021

16

50 mm sq Adapter (M20 Female)

ZDC + plate

A41218010011

17

KF-25 suction pipe (KF-25 × M20)
KF-25 type

Adapter : Standard type
: Replaceable (no Adapters necessary)+ 16 : Replaceable (40 mm sq Adapter required)Suction Pipes

GHD-031

10
11



12

+ 16

+ 17

13

+ 16

+ 17

14

+ 16

+ 17

15

+ 17 : Replaceable (50 mm sq Adapter required)

Exhaust Pipes

2

3

4

5

6

7

18
8

9

13

+ 17

14

10

15

11

16

20

19

12

21

17

22

Exhaust Pipes
Type

Hose port
type

KF flange
type

Product

Material

Order Code

Hose port exhaust pipe (dia.15 × G3/4)

BS + plate

A49430200001

Hose port exhaust pipe (dia.18 × G3/4)

BS + plate

A49430300001

Hose port exhaust pipe (dia.27 × G1)

BS + plate

A49430000001

KF-25 exhaust pipe (KF-25 × G3/4)

PPS

A49430500001

KF-25 exhaust pipe (KF-25 × G1)

PPS

A49430600001

BS + plate

A41624010161

Exhaust pipes Assy (G3/4)

PA

A42105010241

Exhaust pipes Assy (G1)

PA

A42092010630

KF-16 exhaust pipe (G3/4)
Exhaustpipe

GLD-040

GHD-031

GHD-101
GLD-137AA
GLD-137CC GCD-051X
GLD-202AA
GLD-202BB

GCD-136X
GCD-201X

Photo
number
18
19

※



21




20

22




※

※ Remarks: Different anti-corrosive quality as standard exhaust pipes.

 : Standard type

: Replaceable (no Adapters necessary)43Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Outline Drawings

DAP-6D (see p.8)

(4)

67

IN

Condenser case

（163）
（155）
91
24.5

45

(4)

67

OUT

IN

45
24

4

4

（94）

（89.6）（96.1）(100.6)（96.1）(100.6)

33.5

（94）

M4 Screw (EARTH)
(20)

58

58

OUT

(20)

DAP-12S (see p.8)

（89.6）

Condenser case

（163）
（155）
91
24.5

Dry pump
M4 Screw (EARTH)

33.5

Dry pump

4-M4 Tap
4-M3 Tap

Fan cover

80±1

Dry pump

49
57
CCW

4-Rubber legs

67±1

ON

M3 TapM4 TapON

156±2

M3 TapM4 TapOFF

DAP-18S-DC24 (see p.8)45

M4(118.3)156±2

57.5±0.3

28±0.515±2- 0.4
5.5 +0.1(123.8)- 0.4
5.5 +0.1

15±2

4-M5 Tap
CW

22.3±2(123.8)22.3±2

Fan cover

80±1

Dry pump（118.3）

M4

49
57
CCW

4-Rubber legs

67±1

4-M3 TapOFF

DAP-9D-DC24 (see p.8)4524±24-M4 Tap

57.5±0.3

28±0.549±0.351±0.549±0.375.5±0.575.5±0.5

DA-30D (see p.9)
OUT
278

27.5

Dry pump

DA-60S (see p.9)

IN

212
167

212

278
IN

22.5

27.5

95

160

60

Rubber legs 4-M4200

Dry pump

60

Rubber legs 4-M4200

Dry pump

173.8

(165)
136
160

DAT-100S (see p.9)

Lead wire Circle
shaped terminals R1.25-5

dia.132

224.5

(200)
160

136
160

DAT-50D (see p.9)

Lead wire Circle
shaped terminals R1.25-5

91

E

12

E

12

91

(200)
224.5

(165)

(30)

95

22.5

(30)

Dry pump

4-M5 Tap

CW

51±0.5173.8
dia.132

IN
54

OUT

54

232

4-M5
Depth 10
Rubber legs

44 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

120
150

10

130

144

144

305
10

OUT

305

IN

130
232

4-M5
Depth 10
Rubber legs

120
150

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

All size unit is mm

DA-20D (see p.10)

Dry pump

Dry pump

DA-40S (see p.10)
74

(178)

(165)

70

(186)

108

(236)

（112）

(11)

（66.5）(11)(66.5)

(165)

(178)

（70）

（70）

74

70

（186）

108
（112）

（242）

（236）
（242）

Rubber legs 4-M4

Rubber legs 4-M4

DA-41D (see p.10)

Dry pump(16.5)

Dry pump

DA-81S (see p.10)

320
161

157

(16.5)

320

181

IN

217
10.5

217
192
10.5

DA-60D (see p.11)
OUT
(132)

90

4-M4 Tap

Dry pump

DA-120S (see p.11)

(81)

IN
(108)

90

(96)

Dry pump

402

4-M4

120
144
180

110
140

DA-241S (see p.11)
411
95

272
285
270
360

(6)

(347)

IN

272
285

193.5

IN

13

354

OUT

(92)

(238)

(229)

DA-121D (see p.11)
221

(81)
90

(225)
300
340

(9)

(9)

(201.5)

(92)
(6)

411
OUT

(81)

110
140

300
340
(347)

(5)

Dry pump

IN

(108)

(96)

(225)

(201.5)

(238)
(229)

(132)

(5)

133

230

354
360
402

207

OUT

270

Dry pump

90
133

230

13

4-M4 Tap

OUT

IN

79.5

192

OUT

4-M4

120
144
180

45

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Outline Drawings
Dry pump

DAU-20 (see p.12)

(84)
(84)

13

77

13

DTU-20 (see p.12)

Dry pump

77
IN

(25)

(25)

(72)

(72)

(217)

(217)

(72)

(72)

IN

13

103

10

OUT

(97)

49.5

148

Dry pump

148

(97)

103

Gas ballast valve

49.5

OUT

13 10

(327)

(327)

Gas ballast valve

DTC-22 (see p.13)

142

Dry pump(16.5)

272
133(16.5)

155

320

IN

IN

161

OUT

133

10.5

175.1
202

217
192

OUT

DTC-41 (see p.13)

10.6

70
118

Dry pump

186

DTC-60 (see p.13)

230

Dry pump

340
OUT

90

4-M4 Tap

4-M4 Tap

158
IN

185

133

DOP-40D (see p.14)(270)(25.5)

179
94(25.5)

219

Earth screw

Dry pump(270)(25.5)

16

IN

DOP-80SP (see p.14)
94

(288)

(25.5)(25.5)

237

181
66.5

162.5

15

7

1.5

66.5

15

192

(246)

15

(27)

1.5

(27)

15

4-M5 Tap

Earth screw

46 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

89
104
132

(168.5)
16

IN

OUT
179

OUT

89
104
132

4-M5 Tap

(27)

210
(264)

(27)

33

4-M5 Tap

7

DOP-80S (see p.14)

(27)

(246)

150

4-M4

15

192

(86)

Dry pump

15

164.5

300
330

(27)

110

(14)

280

1.5

7

66.5

162.5

(224)

228

16

IN

OUT

(242)

94

(25.5)

219

89
104
132

Earth screw
M4

(3.5)

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

All size unit is mm

DOP-120SY (see p.14)

Dry pump

DOP-181SA (see p.15)

Dry pump

OUT (Rc3/8)

IN

OUT

18

82.5

(255)

IN (Rc3/8)
(172)

82.5

37

52

（235）

(215)

142

(167)

100

18

15

Tarminal
PHOENIX CONTACT BlockMSBV 2,5 3P
GND mark
GND (M4)(216)

Nylon Clip for Power Cord Fixing

DOP-301SB (see p.15)

Dry pump

Dry pump
180.5

115

4-M6

(266)

136

DOP-400SB (see p.15)
180.5

Cable diameter dia.6-12mm

(443)
(361)

230

IN

120

IN

113.5

100

113.5

22 22

(137)

25

(310)

(315)

Ｅ Ｗ Ｖ Ｕ

One-touch fitting elbow Made by SMC

206

(137)

OUT

19 19

IN

OUT

OUT

(100)

120

141

DOP-420SA (see p.15)

Dry pump

DIS-90 (see p.16)

Dry pump
91

310

123

IN

85

168

4-M6
141

308

48.5

195

Ｍ６

119.5

269

149.5

OUT
(37)

18

107

225

253

108

102.5

IN

(76)

523

(10)

154

112

180

DIS-251 [Single phase] (see p.16)
252

400

IN

96

DIS-501 [Three phase] (see p.16)

Air flush (Rc1/8)
292
IN

29

36

372
OUT

99

46

4-dia. 11

OUT

Air flush(Rc1/8)

372

397

23.5
52

97
121
101

130
170

42

136
180

73.5

38

373

336

122

Dry pump

4-dia. 7

Air flush (Rc1/8)

OUT

Dry pump

140

90

288

4-M10

42

310

47

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

Outline Drawings
Dry pump

DISL-101 (see p.17)

DISL-503 (see p.17)

Dry pump

IN
NW25+Rc1/2

IN

(120)

NW25+Rc3/8

（132）
（105）

（317）

Turning Direction Plate

Hour meter

（521）

（14）

（280）
（231）
（140）
（120）

(113)

(180)

(218)

Motor

Air flush(Rc1/8)
(20)

(50)

140

(138)

OUT

(210)

4-dia.9

90
(360)

NW16

Terminal Box

OUT
NW25

1

（127）

220
244

Cable-gland

56

Adjuster
M10

Cooling Fan

Air flush
Rc1/8

Oil pump

RDA-281HA/501HA (see p.18)

Oil pump

GLD-040 (see p.19)
Exhaust pipe

145
Oil inlet plug

Gas ballast valve

OUT

46

64

82.5

17

205.5

70
35 23.5 36.5

Oil level gauge
37

MAIN SWITCH44

INOPERATION LAMP

HOUR METER

Suction pipe

35 18

ＲＵＮＮＩＮＧ ＴＩＭＥ

Outlet pipe (G1)

90

Eyebolts

10

Rubber legs

20

150

48

206

427

An Inlet (EN60320)

Terminal box

Terminal box
Eyebolts Switch

Oil inlet plug

Cable gland
Motor

17

GLD-137CC (see p.19)

212.5

83

35 29

227.5

13

181

110

Oil pump

Inlet pipe 50 (NW-25)

Gas ballast
valve

37

33

Outlet pipe (G1)

Oil level
gauge

83

181
90

56

35 29

214.5

48

130
170

Drain plug

20

9

72

Rubber legs

20

Base
260
485.5

20

Drain plug

Filter cap

Oil pump

GLD-202AA (see p.20)
Inlet pipe 50 (NW-25)

37 33

Outlet pipe (G1)

209

90

35 29

83

48

212.5

Cable ground

9

72

Base

Rubber legs

20

260

33

20 Motor (dia.1)

487.5

GLD-202BB (see p.20)
An Inlet (EN60320)
Terminal
Eyebolts Switch box

Oil inlet plug

Gas ballast valve
37

20

Filter cap

Oil level gauge

Motor (dia.3)

Inlet pipe 50 (KF-25)
Outlet pipe (G1)

209
84

83
90

35 29

214.5

48

20

Drain plug

130
170

20

Filter cap

9

100

20

Rubber legs

260
513.5

48 | SMALL VACUUM PUMPS & SYSTEMS CATALOG

Base
20

104.5

14
18

14
18

86

86

249.5

dia.608
88

dia.60
8
88.5
239.5

39

Oil level
gauge

84

130
170

Oil pump
Eyebolts Terminal box

Oil inlet plug
Gas ballast
valve

20

39
49

20

14
18

14
18

86

86

249.5

dia.6088
8

dia.60
8
88.5
(240)

39

Oil level
gauge

18
20

Oil inlet plug
56

74

（47）

（30）

（80）

49

33

ADJUSTER（80）

GLD-137AA (see p.19)
Inlet pipe 50 (NW-25)

37

CASTER（30）

POWER SUPPLY CONNECTOR（WITH PLUG）

Oil pump

Gas ballast
valve（84）（90）（25）

REMOTE CONNECTOR（WITH PLUG）

(139)

(109)

ALARM LAMP

78.5

（325）
（372）
（377）

RESET SWITCH

ＯＮ／ ＯＦＦ ＲＥＳＥＴ

39

ＲＵＮ
×１０ｈｒ ＡＬＡＲＭ

20
Drain plug

130
170

20
Filter cap

BaseRubber legs
9

100

20

260
515.5

20

Motor (dia.1)

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Systems

Optional Parts

Outline Drawings

All size unit is mm

GLD-280A (see p.20)

Oil pump

GHD-031 (see p.21)

Oil pump

Suction port

Gas ballast valve

43.5 31.5

75
Exhaust
port

110

33
20 14

Eyebolts

135

228

40

132.5

Tarminal box

17

106
23

63.5

13.5

23.5

29

Capacitor box

Oil inlet plug

Cable ground32
36

Drain plug

83

23.5

Exhaust port

23
18

225

Suction pipe

Rubber legs

20

116

Base

260
300
536

20

59.5

Oil level gauge

21 24.5

83.5

16

7.5

Oil pump
Gas ballast valve

Gas ballast valve

29
Exhaust port

35 18

Suction pipe

110
150

20

37

33

Suction pipe

165.5
Filtration joint(R3/8)

83
35

29

38

202

48

Exhaustpipe

dia. 60
8
88.5
241.1

78.5

90

86
14
20

130
170

20

Drain plug

Filtration joint (R3/8)

(27)

72

20

Rubber legs

260
493

20

Filtration joint (R3/8)

Oil inlet plug

Suction port

33

Handle209

Exhaust port

84

90

83
35 29

Motor

Switch box

222.5

48

86

dia.60
8
88.5
241.1

39
40.4

37

56

GCD-201X (see p.23)

Oil pump
Gas ballast valve

181

Oil level gauge

1020

Drain plug

Oil level gauge

Outlet port (VF-40)

GCD-136X (see p.23)

222.7

13
15.5

76

Drain plug

Oil level gauge

74
17

18.2

206
240

（13.5）

165

Oil inlet plug

Filtration joint(R3/8)

Rubber leg

410
387.2

(95)
□37

39

46

Inlet port (VG-40)

125.1
88.5

39
40.4

145
64

9

dia.105

16 （5）

118（155）

Oil inlet plug

419
70
36.5 23.5 35
18

Chauge plug
83.5

43.5
111.5
234.5

Base

113.5

167

dia.10540.5
15MBS-053 (see p.22)

41

Oil inlet
plug

GCD-051X (see p.23)

17

Drain plug

30

Exhaust port

200

200
Rubber legs

175

120

7.5

140

154.5
83

41

Motor

Oil pump

71.5

65

413.5
61
30
22

Oil level
gauge

62.5 1515

130

Capacitor
box

120

65

Suction port

190.5

Oil pump

39

Gas ballast valve

15

288.5

GHD-101 (see p.21)

Oil pump

64
107

Rubber legs 4-dia.8

120

13

Drain
valve

(35)

20

130
175
181

18.2

20

130

23

29

58

86

269

Oil level
Gauge

163

124

36

Motor

Base

14
130
170

20

Drain plug
Filtration joint (3/8)

18.2

20

(27)

100

20

Filtration joint (3/8)

Rubber legs

260
541.5

20
Reset button Thermal protecter

49

ULVAC KIKO, Inc.

· Sales Division (Overseas Division) S M

1-10-4 Kitashinyokohama, Kohoku, Yokohama, Kanagawa,
223-0059, Japan
TEL : (81) 45-533-0206 FAX : (81) 45-533-0204
https://ulvac-kiko.com/en
ULVAC Group Global NetworkJAPAN
ULVAC, Inc. Head Office S M
2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan
TEL : (81) 467-89-2261 FAX : (81) 467-68-4213
https:www.ulvac.co.jp
U.S.A.
ULVAC Technologies, Inc.
Headquarters S M
401 Griffin Brook Drive Methuen, MA 01844, U.S.A.
TEL : (1) 978-686-7550 FAX : (1) 978-689-6300
http:www.ulvac.com
ULVAC Technologies, Inc.
California Sales & Service Center S M
4005 Clipper Court, Fremont, CA 94538, U.S.A.
TEL : (1) 510-226-0151 FAX : (1) 510-226-0167
GERMANYULVAC GmbH S M
Parkring 11, 85748 Garching (Munich), Germany
TEL : (49) 89-960909-0 FAX : (49) 89-960909-96
http:www.ulvac.eu
CHINA
ULVAC (SHANGHAI) TRADING CO., LTD. S M
No.1000 Qixin Rd, Shanghai, 201100, China
TEL : (86)21-61276618 FAX : (86)21-61456821
http:www.ulvac-shanghai.com
ULVAC (SHANGHAI) TRADING CO., LTD.
Dalian Branch S
A-105, Dalian Economic and Technological Development Zone DD
Port Business incubator, 20liaohe Eastern Road, China
TEL : (86) 0411-87407180 FAX : (86) 0411-87406601
ULVAC (SHANGHAI) TRADING CO., LTD.
Beijing Branch S M
Building C-1F, Xingye Road 2, BDA, BEIJING, P.R.China
TEL: (86) 010-67816786 FAX: (86) 010-67816787
ULVAC (SHANGHAI) TRADING CO., LTD.
Chengdu Branch S M
No 229 Tengfei RD, Chengdu, China.
TEL: (86) 028-6551-8700 FAX : (86) 028-6551-8618
ULVAC (SHANGHAI) TRADING CO., LTD.
Shenzhen Branch S M
1F, B Zhongkenuo Building, Seventh Rd. No.7, Tongguan road,
Tianliao Street, Guangming District, Shenzhen, China
TEL : (86) 0755-86149393 FAX : (86) 0755-86149400
HONG KONG ULVAC CO., LTD. S M
Flat L, 9/F., Summit Building, 30 Man Yue Street, Hunghom, Kowloon, Hong Kong
TEL : (852) 2627-0200 FAX : (852) 3003-6256
TAIWANULVAC TAIWAN Inc. S
8F., No.5, Keji Rd., Hsinchu City 30078, Hsinchu Science Park, Taiwan, R.O.C.
TEL : (886) 3-579-5688 FAX : (886) 3-579-7688
http:www.ulvac.com.tw

50 | SMALL VACUUM PUMPS & SYSTEMS CATALOGULVAC TAIWAN Inc. Tainan Sales Division S
No.27, Nanke 2nd Rd., Sinshih Township Tainan County 74147,
Tainan Science Park, Taiwan, R.O.C.
TEL : (886) 6-505-3860 FAX : (886) 6-505-3680
ULTRA CLEAN PRECISION TECHNOLOGIES CORP.
Taoyuan CIP M
No.20, Ln. 211, Puzhong Rd., Zhongli City, Taoyuan County 32083,
Taiwan (R.O.C.)
TEL : (886) 3-286-0998 FAX : (886) 3-462-9882
ULTRA CLEAN PRECISION TECHNOLOGIES CORP.
Southern Taiwan Science Park M
No.27, Sec. 1, Huandong Rd., Southem Taiwan Science Park,
Sinshih Township, Tainan Country 74146, Taiwan, R.O.C.
TEL : (886) 6-505-8888 FAX : (886) 6-505-8866
KOREA
ULVAC KOREA, Ltd. Head Office S M
837-4, Hansan‐Ri, Chungbuk-Myeon, Pyongtaek City, Gyonggi-Do,
Korea 451-833
TEL : (82) 31-683-2922 FAX : (82) 31-683-9033
http:www.ulvackorea.co.kr
ULVAC KOREA, Ltd. Seoul Branch S
5F, Cliford B/D, 1338-23 Seocho-dong Seocho-gu, Seoul, Korea 137-070
TEL : (82) 2-3473-2920 FAX : (82) 2-3473-0885
ULVAC KOREA, Ltd. Gumi Customer Service Center M
Jiwon-Dong, 4F 403, 92-91Imsoo-Dong, Gumi-City, Gyoung -Buk,
Korea
TEL : (82) 54-471-3567~ 8 FAX : (82) 54-471-3569
ULVAC KOREA, Ltd. Busan Branch S
8F Donghoon B/D, 559-13 Gwaebeop-dong Sasang-gu, Busan,
Korea 617-809
TEL : (82) 51-317-2920 FAX : (82) 51-317-2925
ULVAC KOREA, Ltd. Daejeon Branch S
4F 408, Namjong B/D, 943, Gwanpyeong-dong Yuseong-gu,
Daejeon, Korea 305-509
TEL : (82) 42- 936-2920 FAX : (82) 42- 936-2922
THAILANDULVAC (THAILAND) LTD. S M
110/6 Moo 13, Soi 25/2 Kingkaew Road, Tambol Rachathewa,
Amphur Bangplee, Samutprakarn 10540, Thailand
TEL : (66) 2-7388883 FAX : (66) 2-7388200

Distributor

SINGAPOREULVAC SINGAPORE PTE Ltd. S M
11 Tampines Street 92, Tampines Biz-Hub, #02-08, Singapore
528872
TEL : (65) 6542-2700 FAX : (65) 6542-2755
PHILIPPINESULVAC SINGAPORE PTE LTD.
Philippines Branch S M
Cavite Eco-Zone IIRosario, Cavite, Philippines
TEL : (63) 46-437-7700 FAX : (63) 46-437-7711
INDONESIAULVAC SINGAPORE PTE LTD.
Indonesia Representative Office S
Cikarang Technopark, Floor 3A, Unit 4-2, Jl. Inti 1 Blok C1 No.7
Lippo Cikarang, Bekasi, 17550, West Java, Indonesia
TEL : (62) 21-8990-5070 FAX : (62) 21-8990-5074
VIETNAMULVAC SINGAPORE PTE LTD.
VIETNAM Representative Office S
Room V.I.P 7, 4th Floor, Block B, Indochina Park Tower 04 Nguyen
Dinh Chieu, Da Kao Ward, District 1, Ho Chi Minh City, Vietnm
TEL : (84) 8-6299-8262 FAX : (84) 8-6288-2605
http:www.ulvac.com.vn
MALAYSIAULVAC MALAYSIA SDN BHD KL FACTORY S
No.8 Jalan Gitar 33/3, Elite Industrial Estate, Off Jalan Bukit
Kemuning 40350 Shah Alam, Selangor Darul Ehsan, Malaysia
TEL : (60) 3-5121-4700 FAX : (60) 3-5122-3755
ULVAC MALAYSIA SDN. BHD. Kulim Branch M
Lot 120 & 122, Mukim Sungai Seluang, 09000 Kulim, Kedah Darul
Aman, Malaysia
TEL : (60) 4-484 8006 FAX : (60) 4-484 8655
INDIA
ULVAC, Inc. India Branch S M
301, Tara Tycoon 12-13-97, Tarnaka Secunderabad-500 017, India
TEL : (91) 40-27007006 FAX : (91) 40-27007005
BRAZILULVAC Brazil Representative Office S M
Rua da Consolação, 1992, Conj32São Paulo – SP, Brasl
TEL : (55)-(0) 11-3257-8800 FAX : (55)-(0) 11-3257-8900

CHINA
Sichuan Jiutian Vacuum Technology Co.,Ltd. S M
No.9 Cuibai Rd, Cuicun town, Changping District, Beijing 102212, China
TEL : (86)10-60715565 / 400-8188-010 FAX : (86)10-62768205
http://www.zcvac.com
SHANGHAI WANLAI INDUSTRY LTD. S M
Suite 1603, Mansion Abbrebiation, No.888 YiShan Road, Shanghai,
200233, China
TEL : (86) 21-64320612 FAX : (86) 21-64320072
http://www.shwanlai.com
KOREA
POONGIL COMMERCIAL CO., LTD S M
4F Woori Bldg, 129-4, Namyoung-Dong, Youngsan-Gu, Seoul,
Korea
TEL : (82) 2-765-1477 FAX : (82) 2-744-5507
http:www.poongil.co.kr
U.S.A.
Kurt J. Lesker Company S M
PO Box 10, 1925 Route 51, Clairton, PA 15025, U.S.A.
TEL : (1) 412-387-9200 FAX : (1) 412-384-2745
Sales (US) : (1)800-245-1656
http:www.lesker.com
ENGLAND
Kurt J. Lesker Company Ltd. S M
15/16 Burgess Road, Hastings, East Sussex TN35 4NR, England
TEL : (44) 1424-458100 FAX : (44) 1424-458103
http:www.lesker.com
RUSSIA
Alwest-vacuum systems (ABC) Ltd. S M
Electrodnaya ul., 11 str.9 Moscow 111524 Russia
TEL : (7) 495-920-1311
http://alvest-vs.ru/
AUSTRALIA
JAVAC Pty Ltd. S
36 Enterprise Drive, Rowville VIC 3178, Australia
TEL : (61) (0) 3-9763-7633 FAX : (61) (0) 3-9763-2756
http:www.javac.com.au
AVT Services Pty Ltd. S
16/35 Foundry Road Seven Hills, NSW 2147, Australia
TEL : (61) (0) 2-9674-6711 FAX : (61) (0) 2-9674-7358
http:www.avtservices.com.au
EZZI VISION S
Melbourne Office, Sales and Service Centre
8 Bonavita Court, Chirnside Park VIC 3116, Australia
TEL : (61) (0) 1-800-46 3994 FAX : (61) (0) 3-8610-1928
Sydney Office, Sales and Service Centre
B1/101 Rookwood Road, Yagoona NSW 2199, Australia
TEL : (61) (0) 1-800-46-3994 FAX : (61) (0) 3-8610-1928
Agent
VIETNAM
KSMC Co.,Ltd. S
61/53 Duc Giang , Long Bien, Hanoi, Vietnam
TEL: (84) 4-3-8771700
http://www.ksmc.com.vn= Regional Head Office
S = Sales
M = Maintenance51

SMALL VACUUM PUMPS & SYSTEMS CATALOG
Creating the possibilities of vacuum pump technology

https://ulvac-kiko.com/en• The dimensions and specifications of the products listed inthis catalog are subject to change without prior notice for
improvement of their performance.
18101500ADP