3D‐IC & MEMS technology into Brain
Advanced & Intelligent Brain Microprobe Mfg ServiceTohoku‐MicroTech kCo., Ltd.
d (T‐Micro)()

T-Micro Core Technology
5 key factors for Advanced 3DIC & MEMS process technology
Our 5 Key technology factors for 3DIC & MEMS

SEM picture of the key factors

High Density & Sophisticated IC Cube

Example : 38 Si layers stacked
Overall view

2.5um μ‐bump38thUpper tier
(T=10um)

30th

Adhesive

20th
10th

2014 Copyright Tohoku-MicroTec, Co., Ltd.

1.2 mmm

5μｍ

Lower tier
(T=290um)

1.2 mmm38 chips are stacked100 mProduct Facility‐ Start‐to‐finish product line in our clean room‐ Custom
C tsmall‐lotll l t production
d ti byb 2” / 4” wafer
f‐ Bonding equipment owned

2014 Copyright Tohoku-MicroTec, Co., Ltd.

Custom Si Microprobe Mfg Service
Multi--channel Si probe for recording/stimulation
Multi
Substrate material : Silicon
Probe length : 4 – 50 mm or Longer
Probe width : 100 um <Probe thickness : 40 um <Probe shaft back side : Round shape
Probe Tip shape : Sharp-pointed
Shank number : 1 – 16 or More
Shank space : 100 um <Thickness:40 um or thicker
40 um

Back side
Round shape

Site material : Ir, Pt, Au
Site number : 1 – 256 ch or More
Site diameter : 10 um <Site space : 7 um <Site layout : Custom design
Package : PCB or Implantable
Socket stage : Major system compatible or Custom
Purpose : Recording and Stimulation

Width3.5um
Space3.5um

Ir, Pt, Au site

Tip : Sharp-pointed

Mfg service examples

10mm / 1 shank / 16 ch / Acute

33 mm / 4 shank / 32 ch / Acute
5 mm / 1 shank / 8 ch / Custom Acute2014 Copyright Tohoku-MicroTec, Co., Ltd.

Laminar site layout
Tiered tapering

Edgeways site layout
Straight tapering

Courtesy of School of Medicine Tohoku Univ.

Custom Si Microprobe Mfg Service
Bilateral MultiMulti-channel Si probe for recording/stimulation
Substrate material :Probe length :Probe width :Probe thickness :Probe shaft shape :Shank number :Shank spacep:
Site material :Silicon4 – 50 mm or Longer
100 um <50 um <
Straight or Tiered tapering
1 – 16 or More
100 um <Ir, Pt, Au

Site number : 1 – 256 ch or More
Site diameter : 10 um <Site space : 7 um <Site layout : Custom design (Front/Back)
Interconnect : Au
Package : PCB or Implantable
Socket stage : Major system compatible or Custom
Purpose : Recording and Stimulation

Custom Mfg service example
Overview ((1 shank))

Signal recording (Rat)2014 Copyright Tohoku-MicroTec, Co., Ltd.

Courtesy of Engineering, Tohoku Univ.

Recorded signals

Tungsten--based Microprobe for Deep Brain
Tungsten
Neuronode600 ((Standard pproduct and Custom Mfg
g service))
Neuronode600 is the omnidirectional micro brain probe, consisting of Tungsten
needle rolled in a thin electrode site sheet, for deep brain recording/stimulation.
Overview

Cross‐sectional view

Tip
p of pprobe

Example picture of site layout

Number, shape, diameter and layout of electrode sites, and Probe
length are customizable to meet specific experiment requirements.

2014 Copyright Tohoku-MicroTec, Co., Ltd.

Custom Si Microprobe development service
Micro optical waveguidewaveguide-integrated Si brain probe for Optogenetics

Length: 5, 10, 20, 33 mm or longer
Thickness: 50 um <Wid h 160 um <Width:
Site layout: Custom design
Site material: Ir, Pt or Au
Optical waveguide: 2.5
2 5 x 15 um (core & clad)
Optical waveguide outlet angle: 90 or 22.5 degree
Package: Custom (due to optical waveguide)2014 Copyright Tohoku-MicroTec, Co., Ltd.

Custom Si Microprobe development service
Optical Waveguide & Microfludic Channel Si Brain Probe

T‐Micro, on a project‐basis, develops both Optical Waveguide‐integrated andMi fl idi channel‐integrated
Microfluidic
hli tt d Si microprobe
ib forf your researchh project.
j t‐ Advanced 3DIC and MEMS process technology.
‐ Micro‐fabricated Microfluidic channel in middle of Si probe shaft.
‐ Microfluidic outlet at Si probe tip .
‐ Micro‐fabricated Optical waveguide on Si probe shaft.
‐ Thickness, 50 µm, for minimization of tissue damage.
‐ Flexible and customizable number and location of electrode sites
Electrode site

Microfludic outlet

2014 Copyright Tohoku-MicroTec, Co., Ltd.

Overview

Optical waveguide outlet

Contact :Marketing & Sales
Mike Hasegawa
hasegawa@t‐microtec.com
Phone : 408 ‐ 464 ‐ 7972 in US
US Office: 135 Rio Robles E, #160
San Jose, CA 95134 USA

Thank yyou !!
2014 Copyright Tohoku-MicroTec, Co., Ltd.