Inventry List august 2024
No

Category1

Category2

Control number

Item nameModel

Manufact urer Serial number

Vintage

MA99-10231

0(SA99-1147Equipment

2345

Evaporation

RS22-40020A

Evaporation

EBX-1000CULVAC4)

2000/2/1

EBX-2000C

ULVAC

SA00-3013-0

2002/3/1

EBX-2000C

ULVAC

SA00-3014-0

2002/3/1

ei-5

ULVAC

MA05-3097-0

2008/3/1

Vacuum Evaporation
Equipment

Evaporation

RS23-40360A

SystemVacuum Evaporation

Equipment

Evaporation

RS23-40370A

SystemVacuum Evaporation

Equipment

Evaporation

RS23-40380A

SystemBatch Type Sputtering

Equipment

SputteringRS18-11190A

Equipment

SH-350H

ULVAC

MH63-0211

1989/1/1

6Equipment

Sputtering

RS19-10010A

Sputtering

SV-4540

ULVAC

MH63-0301

1989/3/17

7Equipment

Sputtering

RS19-30040A

Sputtering

ENTRON-EX W300

ULVAC

ME05-4533-0

2006/5/31

8Equipment

Sputtering

RS22-40210A

Sputtering

SIH-450

ULVAC

MH95-1083

1997/1/1

9Equipment

Sputtering

RS22-50030A

Sputtering

SRH-420

ULVAC

MA07-3480-0

10Equipment

Sputtering

RS23-40420A

Sputtering

SH-250ULVAC

MH90-1013

11Equipment

Sputtering

RS23-40540A

Sputtering

MPS-4000

ULVAC

MB97-1009-0

12Equipment

Sputtering

RS23-40550A

Sputtering

MPS-4000

ULVAC

MB97-1046-0

13Equipment

Sputtering

RS23-40560A

Sputtering

SME-200

ULVAC

RS23-40520A

Ellipsometer

UNECS-2000A-030 ULVAC

14151617181920212223242526272829303132333435

1990/12/1

Optical Film
Equipment

Thickness Meter
Ultra High Vacuum

Equipment

Equipment

RS23-40610A

Oil Sealed Rotary
Component

Vacuum Pump
Vacuum Pump

RS19-10850A

Vacuum Pump

RS19-10860A

Vacuum Pump

RS19-10870A

Vacuum Pump

RS19-10880A

Vacuum Pump

RS19-10920A

Vacuum Pump

RS19-10930A

Vacuum Pump

RS19-10940AVacuum Pump

RS19-10980A

Vacuum Pump

RS19-10990A

Vacuum Pump

RS19-20400A

Vacuum Pump

RS19-20410A

Vacuum Pump

RS19-20460A

Booster Pump

RS19-25120A

Booster Pump

NS-3009

Booster Pump

NS-3010

Booster Pump

NS-3011

Booster Pump

RS18-21060A

Booster Pump

RS23-40080A

Booster Pump

2019/1/1

Vacuum Pump

G-50SA

ULVAC

190156T

2019/1/1

Vacuum Pump

G-10DA

ULVAC

85213

2019/1/1

Vacuum Pump

G-10DA

ULVAC

85229

2019/1/1

Vacuum Pump

G-10DA

ULVAC

85211

2019/1/1

Vacuum Pump

G-20DA

ULVAC

180188T

2018/1/1

Vacuum Pump

G-20DA

ULVAC

180011T

2018/1/1

Vacuum Pump

PKS-016ULVAC

A30A-02197

Vacuum Pump

PKS-016

ULVAC

2-23021

Vacuum Pump

PKS-016ULVAC

A30A-01253

Vacuum Pump

PKS-016

ULVAC

2-3239Pump

PRC-036C-T

ULVAC

ーPump

PRC-036C-T

ULVAC

ーPump

PRC-036C-T

ULVAC

ーPump

PMB-006CM

ULVAC

A15A-00118

Pump

PMB-012CMULVAC

A17A-01356

PMB-012CMULVAC

A17A-01357

PMB-012CMULVAC

A17A-00522

Mechanical Booster
RS23-40090A

Mechanical
Component

190162T

Mechanical Booster

MechanicalComponent

ULVAC

Mechanical Booster

Mechanical
Component

G-50SA

Mechanical Booster

Mechanical
Component

Vacuum Pump

Mechanical Booster

Mechanical
Component

2019/1/1

Mechanical Booster

Mechanical
Component

190159T

Oil Sealed Rotary

Mechanical
Component

ULVAC

Oil Sealed Rotary

Oil Sealed Rotary
Component

G-50SA

Oil Sealed Rotary

Oil Sealed Rotary
Component

Vacuum Pump

Oil Sealed Rotary

Oil Sealed Rotary
Component

2019/1/1

Oil Sealed Rotary

Oil Sealed Rotary
Component

190161T

Oil Sealed Rotary

Oil Sealed Rotary
Component

ULVAC

Oil Sealed RotaryOil Sealed Rotary
Component

G-50SA

Oil Sealed Rotary

Oil Sealed Rotary
Component

Vacuum Pump

Oil Sealed Rotary

Oil Sealed Rotary
Component

ULVAC

Oil Sealed Rotary

Oil Sealed Rotary
Component

BC3218

Oil Sealed Rotary

Oil Sealed Rotary
Component

Equipment

Oil Sealed Rotary

Oil Sealed Rotary
Component

2015/3/1

Oil Sealed Rotary

Oil Sealed Rotary
Component

U410002Ultra High VacuumPump
Mechanical Booster

RS23-40100A

Pump

1

1990/1/1

Inventry List august 2024
36

Mechanical

Mechanical Booster

Component

Booster Pump

RS23-40120A

Pump

PMB-012CMULVAC

A17A-00521

37Component

Dry Pump

RS19-20080A

Dry Pump

DA-241S

ULVAC

1000209

38Component

Cryopump

RS15-81570A

Cryopump

U8HSP

ULVAC

0011054

39Component

Cryopump

RS15-81580A

Cryopump

U-6H

ULVAC

0011328D

40

Component

Cryopump

RS18-11940A

Cryopump

CRYO-U10PU

ULVAC

0111392

41

Component

Cryopump

RS19-11850A

Cryopump

CRYO-U10PU

ULVAC

860702842Component

Cryopump

RS20-10070A

Cryopump

CRYO-U10HSP

ULVAC

1507647

43

Component

Cryopump

RS21-40240A

Cryopump

U8HSP

ULVAC

0610387

2006/1/1

44

Component

Cryopump

RS21-40250A

CryopumpU8HSP

ULVAC

0610388

2006/1/1

45

Component

Cryopump

RS23-40160A

Cryopump Compressor C30

ULVAC

CC2592

RS19-80720A

5in Magnetic CathodeBC5791-016

ULVAC

MB01-7001

2001/1/1

RS19-80730A

5in Magnetic CathodeBC5791-016

ULVAC

MB01-7001

2001/1/1

MB01-7001

2001/1/1

4647
48

2010/1/1

Sputtering
Component

Accessories
Sputtering

Component

Accessories
Sputtering

5in Cathode for Non-

Component

Accessories

RS19-80740A

Magnetic Material

BC5791-017

ULVAC

49

Component

Manipulator

RS20-10370A

Manipulator

直線導入

unknown

50

Component

DC Power Supply

RS16-83690A

DC Power Supply

HPK-15ZI

Kyosan Electric WA2985

51Component

RF Power Supply

NS-5068

RF Power Supply

RFS-2705A3ULVAC

52Component

RF Power Supply

NS-5082

RF Power Supply

RFS-13150F

ULVAC

ー53Component

RF Power Supply

RS19-12150A

RF Power Supply

RFS-1310A3

ULVAC

209003

2008/1/1

54Component

EB Power Supply

RS18-80910A

EB GunEGO-406M

ULVAC

178000010

2000/1/1

55

AMVG-600-12.5M-

2000/7/1

S/N102208001

Component

Matching Box

RS23-40590A

Matching Box

AVAdtec

3856

Component

Pirani Gauge Body RS23-40240A

Pirani Gauge

GP-1SRYULVAC

44096

57

Component

Pirani Gauge Body RS23-40270A

Pirani Gauge

GP-1SRY

ULVAC

62752

2000/1/1

58

Component

Pirani Gauge Body RS23-40280A

Pirani Gauge

GP-1SRY

ULVAC

62755

2000/1/1

59

Component

Pirani Gauge Body RS23-40290A

Pirani Gauge

GP-1SRY

ULVAC

62751

2000/1/1

60

Component

Pirani Gauge Body RS23-40300A

Pirani Gauge

GP-1SRY

ULVAC

62749

2000/1/1

61

Component

Pirani Gauge Body RS23-40310A

Pirani Gauge

GP-1SRY

ULVAC

62750

2000/1/1

62

Component

Pirani Gauge Body RS23-40320APirani Gauge

GP-1SRY

ULVAC

62756

2000/1/1

63

Component

Pirani Gauge Body RS23-40330A

Pirani Gauge

GP-1SRY

ULVAC

62753

2000/1/1

64Component

Pirani Gauge Body RS23-40340A

Pirani Gauge

GP-1SRY

ULVAC

62754

2000/1/1

65

Component

Pirani Gauge Body RS23-40350A

Pirani Gauge

GP-1SRY

ULVAC

62757

2000/1/1

Diaphragm Vacuum

Diaphragm Vacuum
CCMT-1D

ULVAC

0020242023/1/1

CCMT-10D

ULVAC

0021172023/1/1

CCMT-100D

ULVAC

0011552023/1/1

CCMT-1000D

ULVAC

0037572023/1/12003/1/1

66
Component
67

Gauge Head

SC23-10010A

Diaphragm Vacuum
Component

68

Gauge Head

Diaphragm Vacuum
SC23-10020A

Diaphragm Vacuum
Component

69

Gauge Head

GaugeGauge
Diaphragm Vacuum

SC23-10030A

Diaphragm Vacuum

Gauge
Diaphragm Vacuum

Component

Gauge Head

SC23-10040A

Component

Main Unit

RS23-40480A

Film Forming Controller CRTM-9000

ULVAC

1020

71

Parts

Plumbing

NS-5031

Elbow Type Piping

IFE114-065

ULVAC

ー72

Parts

Plumbing

NS-5032

Tea Type Piping

IFT152-100

ULVACー73

Parts

Plumbing

NS-5033

Cross Type Piping

IFX114-065ULVACー74Parts

Other

NS-5024

ALFOIL

アルフォイルULVACーUFC253/114

ULVACーー7075
76
77
7879

Gauge
Crystal Oscillation-Type

Piping/pipe
Parts

OthersNS-5029

Arrangement Fitting

UFE070GS(10Parts

Other

NS-5030

Metal Gasket

Gaskets / set )

ULVAC

Parts

Other

NS-6012

ALFOIL

アルフォイル

ULVAC

Parts

FlangeNS-5025

UFC306-000FT

ULVAC

ー

UFC253-000RH

ULVAC

ー

Ultra High Vacuum
FlangeUltra High Vacuum
Parts

FlangeNS-5026

Flange2

Inventry List august 2024
80
81

Ultra high vacuum
Parts

FlangeNS-5027

flangeUFC306-000RHULVACーUFC306-250RH

ULVACーUltra high vacuum
Parts

FlangeNS-5028

flange3