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Native Instruments has announced the release of a pristine collection of 7 Kontakt Instruments featuring vintage, live recordeddrums, chimes and percussion on 2 Spring reels. You can download it from NI's website here. These.1. Field of the Invention
The present invention relates to a charged particle beam apparatus, a charged particle beam exposure method, and a computerreadable storage medium having a charged particle beam exposure program stored therein. 2. Related Art In the semiconductor
industry, the continuous reduction of the design rules has been demanded with the recent development of the digitaltechnology. The method for producing a semiconductor device has been changed from an exposure method using ultraviolet
light to an exposure method using charged particle beams such as electron beams and ion beams. As is known, charged particle
beam exposure is performed by scanning a mask with an electron beam or ion beam and exposing a wafer with a patterncreated in the mask. As for the electron beam exposure, a serial electron beam exposure method is known that sequentially
exposes a pattern in a stepwise manner by moving a mask or a wafer to irradiate an electron beam. On the other hand, as forthe ion beam exposure, a block exposure method that exposes a pattern with a part of a mask irradiated with an ion beam and a
step-and-repeat method that exposes a pattern at a higher speed than the serial electron beam exposure method are known.
Specifically, the block exposure method divides a pattern into several blocks to expose the blocks sequentially one by one.
After exposing a block, the mask is tilted or shifted to the next block to be exposed next. Alternatively, after a region where ablock has been exposed is moved to the next pattern to be exposed, the block is irradiated with an electron beam or an ion
beam. In the case of the block exposure method, the charged particle beam exposure can be performed at a rate close to that in
the serial electron beam exposure method. An example of a charged particle beam exposure method using a mask having a

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plurality of blocks or a mask having a pattern divided into blocks as disclosed in Japanese Patent Application Publication No.
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Native Instruments Abbey Road Vintage Drummer KONTAKT MAGNETRi Utorrent