WITH NON-METALLIC, FLUOROPLASTICWETTED PARTS
For Semiconductor Manufacturing Processes

W-800

MINI-WHEEL FLOWMETEROUTLINE
The W-800 series mini-wheel flowmeter is a wheel-type flowmeterwith an optical sensing system for measuring the ﬂow rates of liquids.
Wetted parts are made of ﬂuoroplastic and other non-metallic materials, and thus are suitable for measuring pure/ultra pure water andvarious chemicals in semiconductor manufacturing processes.

FEATURES❏ Wheel rotation is detected by a photoelectric sensor❏ A ﬂuoroplastic body with other non-metallic materials for wetted parts❏ For measuring pure/ultra pure water, chemicals, and other liquids❏ Min. range of 0.04 to 0.2 L/min and max. range of 5 to 50 L/min❏ Tube end connection or Rc thread connection❏ Complying with RoHS

STANDARD SPECIFICATIONS● Measuring ﬂuid

：Various liquids（Transparent liquids less than 2mPa・sin viscosity）● Fluid pressure：Max. 0.29MPa● Fluid temperature：Max. 50℃（Without condensation andfreezing）● Flow direction：Only vertical for models W-811 throughand postureW-813
Vertical or horizontal for models W-814
through W-810
Note: All models must be installed where the process line is ﬁlledwith a liquid. The shaft of the wheel must be horizontal.
● Mass：Approx. 160g for models W-811 throughW-815
Approx. 510g for models W-816 throughW-810● Measurement principle ：Detection of wheel rotation by opticalsensing method● Output：Open collector pulse (Unscaled）● Load rating：Max. 30 V DC, 50 mA● Pulse frequency：Number of frequency in Hz at the maximum
ﬂow rate is described on name plate.

● Power supply● Consumption current：12 to 24 V DC±10％：Less than 10mA for each light emitting
and reception unit
● Accuracy：±5％ F.S. for models W-811 through
W-815±3％ F.S. for models W-816 throughW-810● Electrical connection ：0.1mm2 at light reception unit by 3 core
cable（2m）
0.1mm2 at light emitting unit by 2 core
cable（2m）Light
reception
unit ofsensor

BlackBrown
BlueLightemitting
unit ofsensor

Brown

Output12 to 24 V DC＊
0 V＊

Blue

＊You can use 3 wires by making lead wires in same color common.

MODEL CODE
Model codeW-8□ □ − □ □ □Output

1

Description
Pulse output：Open collector

10.04 to 0.2 L/min（Flow path nozzle φ1）

20.05 to 0.5 L/min（Flow path nozzle φ2）30.12 to 1.2 L/min（Flow path nozzle φ3.5）

Range of4

0.3 to 3 L/min（Flow path nozzle φ5）

ﬂow rate

5

0.5 to 5 L/min（Flow path nozzle φ6）Connection

6

1 to 10 L/min（Flow path nozzle φ8）

size

7

2 to 20 L/min（Flow path nozzle φ9.5）

8

3 to 30 L/min（Flow path nozzle φ12）94 to 40 L/min（Flow path nozzle φ14）

5 to 50 L/min（Flow path nozzle φ16）0
Wet part material（Other than O-ring）
Material of O-ring1

3/8 in. tube end（φ9.53×φ6.35）
Rc3/8
1/2 in. tube end（φ12.70×φ9.53）
Rc1/2
3/4 in. tube end（φ19.05×φ15.88）
Rc3/4

Flow path body & holder；PFA（PTFE）, Wheel；PTFE, Shaft；Quartz glass【Standard】

2

Flow path body & holder；PFA（PTFE）, Wheel；PTFE, Shaft；Sapphire
E

EPDM [Ethylene propylene rubber]【Standard】

F

FKM [Fluorocarbon rubber]

PConnection

1/4 in. tube end（φ6.35×φ4.35）
Rc1/4

FFKM [Perﬂuoroelastmer]
TR

Tube end connection
Rc thread connection

Note；Do not hesitate to contact TOKYO KEISO Co.,Ltd. For your speciﬁc requirements
TG-ES693-8E
RevisedJun 2016 K
4th edition May 2004

W-800MINI-WHEEL FLOWMETERDIMENSION, CONSTRUCTION AND MATERIAL《W-811 through W-815（Rc thread）》
20《W-811 through W-815（Tube end）》

385

174

38PFAWheel□52±0.2□60820424-φ4.5FLOW

51PTFE

4ShaftSee MODEL CODE

5O-ring

See MODEL CODE

6SensorPAR7Sensor cover

ABS8Fixing plate

P.P.

9CablePVC sheathed

10Screw

SUS304

11TubePFA

82180

φ45

□40±0.2□50OUT

6Wheel holder

3Rc

9 1072824-φ4.5

PFA ＊45

4

Flow path body

6IN
7
（Lead wire for lightreception）（Lead wire for lightemitting）（Lead wire for lightemitting）＊ The material of ﬂow path body of models W-816
through W-810 (Rc thread) is PTFE.
8（Lead wire for lightreception）

Material

42

7Parts name120

9 10 11No.

Rc《W-816 through W-810（Tube end）》《W-816 through W-810（Rc thread）》
782

1534

104-M5
D121111028FLOW200

φ689953470

2FLOW

8100

74-M5
D1248

4070

2-Rc
H1H

H1H
（Lead wire for lightreception）

Model（Lead wire for lightreception）

66（Lead wire for lightemitting）（Lead wire for lightemitting）

W-816, 817

H

H174

16

W-818
W-819
W-810

Rc thead

Tube end

2078.5

H

H1
24

82

23.5

1922.51821.5NOTES❏ Do not put a signal cable along with other power lines.
❏ For Rc thread connection, use a ﬁtting with a larger inner diameter than that of the ﬂow path nozzle selected.
❏ Use this ﬂowmeter where there is no stagnation of air around the wheel and also in the state of water ﬁlled up.
❏ Avoid the air blow. Otherwise, the wheel and shaft might be damaged.

* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : http://www.tokyokeiso.co.jp
2TG-ES693-8E