Flow Controller with All Wetted Parts Made ofFluorocarbon Resin

FC6500 Series
Separate-type Flow Control SystemOUTLINE
The FC6500 series is a separate-type flow control system thatcaptures flow signals from various sensors in analog form andcontrols valves to stabilize the flow rate at the target value. It
consists of a control valve, of which the wetted parts are made offluorocarbon resin, and a flow controller.
 Flow control valve : FCV series Flow controller: FCA6500 series

The FC6500 series can control a wide range of flow rates with anextensive lineup of control valves. Its design with physically separated control valve and control unit enhances safety and layout
flexibility.
The FC6500 series is ideal for process management of chemicalliquids and deionized water in semiconductor and other manufacturing processes.
Besides flow rate, the FC6500 series can also be used as a temperature or pressure control system by regulating the flow controlvalve.

FEATURES

MAIN APPLICATIONS❏ Enhanced safety and layout flexibility❏ Flow rate setting for chemical liquids and DIW

The flow detector and the control valve in the process fluid part

By installing the FCA6500 series in the supply line for various

are separated from the measurement and control part, ensuringchemical liquids and DIW, which was previously controlled byenhanced protection against liquid leakage as well as greatera metering pump or pressure feed tank, highly accurate andlayout flexibility.

stable supply control is possible.

❏ Support for a wide flow range❏ Concentration control

The FCV series control valves can cover a wide range of flow

The control units installed in both chemical liquids and DIWrates, from a minimum of 10 to 100 mL/min up to 1 to 10 L/min.

lines enable stable concentration control when diluting the❏ CE marking

Complies with EU EMC, RoHS2, and low voltage requirements(EMC standards: EN61326-1:2013, EN61326-2-3:2013)

chemical liquids with DIW to keep the concentration at a certain
level.
❏ Flow rate and pressure control of branch lines

The control units installed in each line branched from the mainline enable the flow rate to be kept stable without mutual interference between the lines.
Also, pressure control of the main line can be achieved by installing control valves in bypass lines.

TG-F2306-E00
1st edition Mar 2023 K

FC6500 Series Separate-type Flow Control System

MODEL CODESPECIFICATIONSControl Valve

FC65

ModelActuator
Coupling cable1

High-resolution stepping motor

Electrical 2
specifica3
tions

Multi-core cable, PVC cover, 5 m (standard)

Wetted part material

PTFE, PFA

End connection (tube OD size)  –   /FCV-3000

FCV-1000S

Ø3/8", Ø1/2"

Controllable differential
pressure

0.05 to 0.2 MPa
0.3 MPa

Fluid temperature

5 to 50ºC

Ambient temperature

5 to 50ºC

Valve model

Model

FCA6510

FCA6520

FCA6530

Power supply

24 V DC ± 10%

Consumption
current

200 mAAt startup: 1 A
4 to 20 mA DC
0 to 10 V DC
4 to 20 mA DC
Input impedance: Input impedance: Input impedance:
250 Ω730 kΩ
250 Ω
Non-voltage contact input
Close ON: Start control, Open OFF: Stop control

Analog input(Current flowrate)
Digital input(Change ofcontrol)

1 to 5 V DC
0 to 10 V DC
4 to 20 mA DC
Analog output
Allowable load
Allowable load
Allowable load
(Flow rate
resistance:
resistance:
resistance:re-output)
500 kΩ or higher 500 kΩ or higher 500 Ω or lower
Digital output Open collector output (rated value: 30 V DC, 50 mA)(Alarm)Logic: A (NO)/B (NC) set at the factory
2 lines, 16 alphanumeric letters LCD with a backlight
Display
Alarm: red (LED), status: green (LED)
Display digits, X.XXX to XXXX (4 significant digits)
unit
mL/min, L/min, L/h, %, kPa, ºC, etc.
Construction/Indoor use (IP 20 equivalent), panel mount
Installation
WiringPower supply line (grounding line), valve cable, signal lines

Connector

Divided-type tension spring connection 3P, 5P, 6P, 10P

Flow range

Remarks

0 to 10 V/0 to 10 V

FCA6520

4 to 20 mA/
4 to 20 mA

FCA6530

Others
0FCV-3000

1FCV-1000S

3FCV-3000D*Controller

Specification

4 to 20 mA/1 to 5 V FCA6510*

Ø1/4"Maximum operating pressure–5 types, 10 mL/min
up to 2 L/min
6 types, 200 mL/min
up to 10 L/min
Double seal (chemically resistant)

Others02

10 to 100 mL/min

FCV-320003

20 to 200 mL/min

FCV-330004

50 to 500 mL/min

FCV-340005

100 to 1000 mL/min FCV-3500

06

200 to 2000 mL/min FCV-3600/1100S

07

300 to 3000 mL/min FCV-1200S

08

400 to 4000 mL/min FCV-1300S

09

600 to 6000 mL/min FCV-1400S

10800 to 8000 mL/min FCV-1500S

11

1 to 10 L/min*

Others2

Valve connection size(OD)

1/4 tube connection FCV-3000 series
FCV-1000S(4 L/min or lower)
FCV-1000S only
1/2 tube connection(6 L/min or higher)

3

3/8 tube connection

4*

Special specification (2)FCV-1600S

OthersBlank Standard*

Others* The code will be named according to the specification.

Housing mateABS, blackrial and color
Ambient
0 to 50ºC (except LCD)
temperature
Control
Flow rate (PV) > 30%FS: ±3% of the target value (SP)accuracy
Flow rate (PV) ≤ 30%FS: ±5% of the target value (SP)ResponseResponse time within 3 seconds* Analog inputs from detectors must be updated withoutdelay.

2TOKYO KEISO CO., LTD.

TG-F2306-E00

FC6500 Series Separate-type Flow Control System

EXTERNAL DIMENSIONSFCV1000S (3/8")

FCV1000S (1/2")

2-M5 Depth 6
For fixing

2-M5 Depth 6
For fixing

FCV-3000

FCV-3000D

2-M3 Depth 5
For fixing

TG-F2306-E00

2-M3 Depth 5
For fixing

TOKYO KEISO CO., LTD.

3

FC6500 Series Separate-type Flow Control System

112.8( 139.5 )FCA6500

48Panel cut (Thickness 0.8 to 5 mm)

96

Controller terminal diagram

4TOKYO KEISO CO., LTD.

TG-F2306-E00

FC6500 Series Separate-type Flow Control SystemWiring
CN

12No.
Polarity
Description
Motor drive connector
1FG
Motor ground2
Green Motor A phase +3Black Motor A phase −4White Motor B phase +5Red Motor B phase −Controller connector
1+Control start/stop input *12–
3+
Valve abnormal alarm output
4–
5Unused67+
Flow output
8–9+
Flow input
10–*1 CN2 1, 2 Non-voltage input

CN345No.
Polarity
Description
Power connector
1+24 VPower
20V
3FG
Frame ground
Alarm output connector
1Unused23+Flow rate alarm 1
4–
5+
Flow rate alarm 2
6–
Serial communication connector
12For maintenance use
3Close: Start control, Open: Stop

CONTROL PERFORMANCE AND ACCURACY
The FCA6500 is a feedback type controller that captures the current flow rate (PV values) in analog form and automatically adjusts thecontrol valve opening to stabilize the flow rate at the target flow rate (SP value) set on the indicator.
Although it controls flow rate within ±3% of the set point within 3 seconds, the performance depends on the data update cycle and time
constant of sensors.
Be careful when selecting detectors, because sensors with a sampling period or time constant of 100 ms or longer cause delays in thecontroller response.

CAUTIONS
1) The control valve should be installed on the downstream side of the flowmeter.
2) The control valve and flowmeter (detector) should be piped within 500 mm of each other.
3) Do not use this control valve for piping with large pulsation (e.g. fluid supply by a diaphragm pump, etc.).
4) For combining with ultrasonic flowmeters (UCUF series), select the FC6000 series for the flow controller.
5) Cascade (RSP) control by analog input of the target flow rate can be achieved by using a signal conversion unit. Contact us.

* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
TG-F2306-E00

TOKYO KEISO CO., LTD.

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