UHP Valves, Fittings & System Integration

TDF Series
High-Speed High-Cycle Life Valves

UHP Gas Series

The TDF series are high-purity gas-compatible diaphragm valves that combine high-speed opening/closing
operation, high durability, heat resistance, and Cv stability required for atomic layer deposition (ALD) andatomic layer etch (ALE) processes.

Features
High-speed opening/closing, and high response stability
Realizes valve total response time 18ms* and response stability ±2ms* afterdurability cycles.

* Performance values according to our testing methods

Compatible with high-temperature ﬂuids
Adoption of a structure that reduces heat transfer to the actuator enables usage with high-temperature
ﬂuids up to 220°C*.
* Body Temperature up to 200°
C with solenoid valve and sensor installed.

Stable Cv value
Adoption of a structure and seat material in consideration of thermal inﬂuence ensures Cv 0.5* at220°C.

Cv values are 100% factory-adjusted. With little variation in Cv value during use, stable gas ﬂow rates canbe obtained.
* Initial Cv value error and variation during use within ±5%High cycle life
With a 220°
C high-temperature body temperature rating, and durability test performance value of one

hundred million cycles or more* achieved as a result our unique technology.

*Our test performance (test conditions): ﬂuid N2, charged pressure 0.25MPa(G), wetted area temperature 220°
COptions
Proximity sensor* The sensor's mounting
position will depend on
the actuator's orientation
when tightened tospeciﬁcation.

Solenoid valve

Proximity sensor

Enables high-speed motion, andshortens valve opening/closing time.
Fixed with a dedicated bracket.

Transmits the valve's actuator
open/closed state as an electrical signal.
Shipped after adjusting to optimum
performance during factory assembly.

Solenoid products manufactured by
MAC Valves, Inc., are recommended.
TypeWiring
lengthWiring

34C-ABA-GDFC-1GF

914 mmDuplex

Products manufactured by OMRONCorporation are recommended.
Operation Output
modeform

Type
E2E-S05S12-WC-B1

2M

NO

PNP

E2E-S05S12-WC-B2

2M

NC

PNP

Solenoid valve

E2E-S05S12-WC-C1

2M

NO

NPN

The orientation can be freelychanged without removing themounting screw.

E2E-S05S12-WC-C2

2M

NCNPN

* In addition, special face-to-face dimensions and valve shapes, manifolds, mounting holes for cartridge heaters,
corrosion-resistant material bodies, etc., are available
Contact our sales representative.

Speciﬁcations
Size

1/2″

Cv at 220℃ *1

0.5Body Material

101.5psig (0.7 MPa(G))

Maximum Operating Pressure

20～70 ℃

(Room temperaturewhen shipped)

Actuation pressure≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/sec)≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/sec)
65.3-87.0psig (0.45 ‒ 0.6 MPa(G))

Precision cleaning

Double bagged package

Single bagged package

PFACobalt alloy

Diaphragm

18±2 ms

Across the Seat He
Leak Rates
Inboard He
Leak Rates

Leak Rates

Electro polished+Seat(with sensor and solenoid valve installed)

Response Speed *3≦ Rz 0.7 μm

Degreasing

Packaging

20℃～130 ℃

Atmospheric Temperature(Double melt material)≦ Rz 3.2 μm

Cleaning

80℃～220 ℃ *2

Fluid Temperature

SEP
SUS316LE

Mechanical polished

Polish

0.1532in³ (2.51 cm³ (C-seal, 3-port))

EP
SUS316L

Surface Roughness

0.1172in³ (1.92 cm³ (C-seal, 2-port))

Wetted Area Volume

STD

Grade

*1 The minimum value is stated by Cv value measurement (220˚C) based on SEMASPEC90120394B-STD.
*2 Room temperature - 220°C if not used continuously, and up to 200°C with sensor andsolenoid valve installed.
*3 Motion of the valve from a closed state to opening; Time between the instant when thesolenoid valve signal is turned ON and the instant when the valve is fully opened under
the following conditions:(Operating pressure: 0.48MPa, tube: length between the solenoid valve and the valve
76.2mm, inside diameter 2mm)

Precautions
1) The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guaranteed.
2) For high temperature applications, please select appropriate material for air-ﬁttings and tubes to assure proper performance.

TypeModelSize

Operation

Valve
ShapeConnection

TDF

8CSG

TDF：TDF-type
8：1.5“HFDiaphragm valve(High-speed
high-durability spec)

S：StraightC：
Pneumatic valve B：Branch
Normally closed

Fitting
Size

SeatMaterialOpen/CloseSensorOption

GradeAS****EP-316L

A：PFANot shown:
Without sensor
S:
With open/
close sensor

Serial no.:Sensor spec withsolenoid valve
Other special spec

STD-316L:
Mechanical polished + SUS316L
EP-316L:
Electro polished + SUS316L
SEP-316LE:
Electro polished + Double melt material

G：C-seal
Not shown：1/2″
Surface Mount
4：1/4″
V：CVC male
(CVC only)
VF：CVC female* For normally open type, contact our sales representative.

Dimensions
Model

Unit:inch(mm)TypeConnection

TDF8CS-GA

C-1.5″HF
SurfaceMountLJA

BCDEFMNP

C-1.5″HFSurface
MountZ

M5

1.457 0.551 0.669(37) (14) (17)

CVC
3.03
1/2″male (77)Rc
1/8

4.69 0.630(119) (16)
TDS8CSVFAS-****

Y

1.490 0.645 0.455 1.188 0.203 0.330 0.079(37.85) (16.38) (11.56) (30.18) (5.16) (8.38) (2)4.13 0.315(105) (8)

1.496
(38)

TDF8CS-VA

X

Rc
1/8

_TDF8CB-GAS-****

H

1.496 1.417(38) (36)

__CVC
3.27
1/2″female (83)* The position of the solenoid valve can be turned in the desired direction.
* The sensor's mounting position will depend on the actuator's orientation when tightened to speciﬁcation.

_1.102 M5(28)M5https://kitz-sct.jp/english/■ Global Network
Tokyo Head Oﬃce

KITZ SCT AMERICA CORPORATION

Osaka Sales Oﬃce

KITZ SCT CORPORATION

Omorieki Higashiguchi Bldg. 3F, 1-5-1 Omorikita, Ota-Ku,
Tokyo 143-0016, Japan
TEL. 81-3-6404-2171 FAX. 81-3-6404-2172

5201 Great America Parkway, Suite 238,
Santa Clara, CA 95054, USA
TEL. 1-408-747-5546
FAX. 1-408-747-5726

202 MG Amagasaki Ekimae Bldg., 21 Misono-Cho, Amagasaki-shi,
Hyogo 660-0861, Japan
TEL. 81-6-6413-4177 FAX. 81-6-6413-4188

TAIWAN REPRESENTATIVE OFFICE

3F-1, No. 38, Beida Rd., East Dist.,
Hsinchu City 30044, Taiwan (R.O.C.)
TEL. 886-3-542-0110
FAX. 886-3-542-0551

Chukyo Branch Oﬃce

KITZ CORPORATION OF SHANGHAI

Ozeki-Heights 1F, 1-12-13 Unomori, Yokkaichi-shi,Mie 510-0074, Japan
TEL. 81-59-350-8121 FAX. 81-59-350-8122

Rm. 1701-1704, No.3000, North Zhongshan Rd., Putuo Dist.,
Shanghai 20063, China
TEL. 86-21-5243-5025 FAX. 86-21-6439-1257

Kyushu Sales Oﬃce

KITZ SCT CORPORATION OF KUNSHAN

Nitta SC Factory

KITZ SCT CORPORATION OF KUNSHANZ•S Fukuoka Bldg. 4F, 3-4-2 Higashihie, Hakata-Ku, Fukuoka-shi,
Fukuoka 812-0007, Japan
TEL. 81-92-483-0185 FAX. 81-92-483-0186

8-3, No. 3 Road, Export Processing A Zone,
Kunshan Jiangsu 215300, China
TEL. 86-512-5735-0700 FAX. 86-512-5735-7500

150-2 Nittakane-Cho, Ota-shi, Gunma 370-0352, Japan
TEL. 81-276-60-9600 FAX. 81-276-60-9330

BRANCH FACTORY

Bldg. 9, No. 68, Taoyuen Rd., Export Processing B Zone,
Kunshan Jiangsu 215300, China!

Caution

Product speciﬁcations and performance values described in this catalog are based on our design calculations, in-house testing, product usage performance, and public standards and speciﬁcations,and are posted as a user’s guide under general usage conditions of the product. If the product is used outside of the described usage conditions or under special usage conditions, you should receive
our technical advice in advance or it will be necessary to ﬁrst conduct research and evaluation for performance veriﬁcation at the users’ own responsibility. Even if physical or personal damage
occurs without use of this procedure, we shall assume no responsibility. Although this catalog has been edited with the utmost care possible, contact us if there are any unclear points or if you comeacross any questionable matter. In addition, information described in this catalog will be revised without notice due to reasons that include correction of errors, supplementation/improvement of
insuﬃcient content, improvement in product performance, design change, and discontinuation of production of products, etc., when deemed necessary. This invalidates the product catalog of theprevious version. The issue code is described on the back of your catalog. For product selection, contact us to conﬁrm whether your catalog is the latest version.
In addition, when exporting our products, exporters should obtain an export permit from the Ministry of Economy, Trade and Industry based on the provisions of the Export Trade Control Order of the“Foreign Exchange and Foreign Trade Act.” Contact us regarding any unclear points.

20.12①