VeQRR2_0080-00381
November 1 4 , 2 0 2 2Attn.: Customer
CANON ANELVA CORPORATION
Quality Management Div.

Discontinuation Notice of RF Power supply（AX Series）by ADTEC Plasma Technology

Thank you for using CANON ANELVA products.
We inform you the discontinuation of RF Power supply（AX Series）by ADTEC Plasma
Technology equipped to our tools.
We will continually improve the product quality and reliability to ensure customer satisfaction.
NOTE
Discontinued part and its substitute partNo.

PowerDiscontinued Parts

1200W

AXG Series

2300W

AX Series
AX Series

3600W

AXR Series
AXG Series451000W
2000W

Substitute Parts

Substitute parts are underconsideration

AX Series
AXR Series
AX Series
AXR Series
AX Series

63000W

77500W

AX Series

810000W

AX Series

AXR SeriesSome of the RF power supply AX
series (600W/1000W/2000W) willcontinue to be sold, but there is noCE marking.

※Please confirm the model of the RF power supply and the item number with an attached sheet.
Last order date：March 31, 2023

Service Termination Date

：August 31, 2029

・Depending on the stock status of maintenance parts, repair may not be possible even before
the maintenance end date. In that case, we will replace it with a substitute.

Feel free to inquire of our sales or service representatives for details.

SC2037AAX Series Attached sheet
No.

NamePart No.

Model

1AX-300,RF PS

9006-76389

AX-300Ⅲ

2AX-300III_PLASMA_P/S(13.56MHZ),BUY,E

9006-69308

AX-300Ⅲ-EI

3

RF POWER SUPPLY 300W(AX-300-3-D50S)

9009-53309

AX-300Ⅲ-D50S

4RF 600W PLASMA GENERATOR,NRTL

9005-63730

AX-600Ⅲ-N

5RF600W PLASMA GENERATOR NRTC/EXT

9005-74414

AX-600Ⅲ-N-*

6RF POWER SUPPLY 600W(AX-6003-N-EI) PURCA

9006-17856

AX-600Ⅲ-N-EI

7

RF POWER SUPPLY 600W

9008-29063

AX-600III-AC1-D

8RF POWER SUPPLY 1KW(AX-1000_3)

9007-20112

AX-1000Ⅲ

9RF POWER SUPPLY 1KW (AXG-10003-D50)

9008-44885

AX-1000Ⅲ-D50

10RF POWER SUPPLY 2KW(AX-20003-A)

9006-86546

AX-2000Ⅲ-A

11

RF P/S,13.566MHZ 2KW AX-20003-A

9008-76727

AX-2000Ⅲ-A

12

RF POWER SUPPLY 2KW,AX-2000_3-A-AN

9009-31569

AX-2000Ⅲ-A-AN

13RF POWER SUPPLY 2KW (AX-20003-A-D)

9008-45336

AX-2000Ⅲ-A-D

14RF Power Supply 2000W(AX-2000-3-A-D50)

9009-36137

AX-2000Ⅲ-A-D50

15

RF 2000W PLASMA GENERATOR,CE

9006-26295

AX-2000EUⅡ

16

RF 2000W PLASMA GENERATOR,NRTL

9005-63748

AX-2000EUⅡ-N

17

RF POWER SUPPLY 2000W

9008-29071

AX-2000III-AC1-D

18

RF POWER SUPPLY 3KW(AX-3000_3)

9006-52628

AX-3000Ⅲ

19

RF P/S,13.566MHZ-3KW,AX-3000_3

9007-14137

AX-3000Ⅲ-13.566MHz

20

RF Power Supply 3000W(AX-3000-3-D50)

9009-36111

AX-3000Ⅲ-D50

21

ADTEC 3KW RF POWER SUPPLY

9008-09225

AX-3000III-AC1-D22

BUY,AX-3000III-D50 PULSE

9009-72989AX-3000III-D50

23P/S,RF,AX-7500W-200-D50,OPTION 09014-47995

AX-7500W-200-D50

24P/S,RF,AX-7500W-200-D50,OPTION 19014-92398

AX-7500W-200-D50

25P/S,RF,AX-7500W-200-D50,OPTION 29015-59409

AX-7500W-200-D50

26

BUY,RF POWER SUPPLY 7.5KW WITH RFSW-BOX

9009-51179

AX-7500W-200-D50(RFSW-BOX-KT2)

27

REMODEL AX-7500W-200-D50 PULSE

9009-69342

AX-7500W-200-D50

28

RF POWER SUPPLY 10KW(AX-10000-3-200-D50)

9009-51153

AX-10000Ⅲ-200-D50

29RF POWER SUPPLY 10KW,AX-10000-AN9009-31234

AX-10000Ⅲ-AN

30

RF POWER SUPPLY 10KW(AX-10000)

9007-92559

AX-10000W

31RF POWER SUPPLY 200W(AXG-2003)

9008-53410

AXG-200Ⅲ

32

RF POWER SUPPLY 200W (AXG-2003-A-EI)

9009-31420

AXG-200Ⅲ-A-EI

33

RF POWER SUPPLY 600W (AXG-600-A-D50)

9008-50917

AXG-600Ⅲ-A-D50

34

RF POWER SUPPLY 1KW (AXR-10003-D50)

9008-57749

AXR-1000Ⅲ-D50

35

AXR-10003-D50

9008-60988

AXR-1000Ⅲ-D50

36

RF P/S(ADTEC),400KHZ/1000W

9014-13679

AXR-1000LFⅢ-AN

37

RF P/S AXR-2000-3-A,BUY,E

9015-58720

AXR-2000Ⅲ-A

38

AXR-3000-3-D50 RF GENERATOR

9016-04945

AXR-3000Ⅲ-D50

39

AXR-30003-D50-P RF GENERATOR

9014-90370

AXR-3000Ⅲ-D50-P

40

RF POWER SUPPLY 600W (AXR-600-A-D50)

9008-56955

AXR-600Ⅲ-A-D50

41

RF POWER SUPPLY 600W(AXR-6003-A-D50S)

9009-06310

AXR-600Ⅲ-A-D50S

Remarks

Sale

SaleSale