NEXTorr®
UHV pumps

HIGHLIGHTS£ Extremely compact and low weightThe NEXTorr® UHV pumps are compact Ultra High Vacuum pumps that efficiently
combine a sputter ion pump (SIP) and a Non Evaporable Getter (NEG) pump into avacuum solution featuring high pumping speeds and capacities yet retaining a lowweight and a minimal footprint.

£ High and constant pumping speed
for all active gases in UHV-XHVTwo versions are currently available:

General Features£ Pumping speed for noble gases andmethane▪ NEXTorr “D” series, based on St 172 (Zr-V-Fe) NEG alloy, operating in theUHV/XHV field since the ‘90s

£ Long lasting in UHV-XHV£ Negligible power consumption inoperation▪ NEXTorr “Z” series, based on the novel ZAO® (Zr-V-Ti-Al) NEG alloy, developed forfurther improving the pumping speed and capacity for H2, still keeping the same
compact footprint£ Reduced magnetic interference£ Able to indicate system pressure£ Maintenance-free

Applications£ Improvement of the ultimate
vacuum in UHV-XHV systems

All NEXTorr D and Z series share the same sputter ion pump: CF35 and CF63 flangedmodels are equipped with a 6 l/s (Ar) and 15 l/s (CH4) diode pump; CF100 flangedmodels are equipped with a 10 l/s (Ar), 32 l/s (CH4) diode pump.
For applications requiring higher performances for inert gases, NEXTorr D500StarCell and NEXTorr D1000–StarCell pumps are ideal solutions. They combine twohigh speed NEG cartridges (500 and 1000 l/s for H2, respectively), with a StarCell ion
pump featuring 21 l/s (Ar) and 30 l/s (CH4), respectively.

£ Particle accelerators, synchrotron
radiation sources£ Atom/Ion Trap systems, atomic
clocks/fountains, interferometers£ Scanning/Transmission electron
microscopes£ Portable vacuum instrumentationand suitcases£ Surface analysis systems£ General purpose UHV systems

g r ou p

making innovation happen, together

A. NEG cartridge
B. Sputter-ion pump
C. NEG connector
D. ION connector
E. Connecting CF flangeNEXTorr®
UHV pumps

General features and performance
NEG SECTION
Alloy Type

Mass (g)Activation
Power (W)NEG length(mm)NEXTorr D 100-5

St 17213.5

4560.5

NEXTorr D 200-5

St 172286091

NEXTorr D 300-5

St 17241100

77

NEXTorr D 500-5

St 1726812097

NEXTorr D 500-StarCell

St 172

68

12099

NEXTorr D 1000-10St 172

112.5220113

NEXTorr D 1000-StarCell

St 172112.5220116

NEXTorr D 2000-10St 172

225280162

NEXTorr Z 100

ZAO

304564.5

NEXTorr Z 200

ZAO

585791

NEXTorr Z 300

ZAO

96110

81

NEXTorr Z 1000

ZAO

219

195

113

Product Description

H2

Pumping Speed (l/s)
H2O
CON2

H2

Single-run Capacity (Torr l)
H2O
CON2

NEXTorr D 100-5100

90

7040

135

100.70.4

NEXTorr D 200-5200

180

14080

280

181.30.6

NEXTorr D 300-5300

270200100

410

452.21.3

NEXTorr D 500-56807031.7500

450340200

NEXTorr D 500-StarCell

500

450

340200680

702.51.3

NEXTorr D 1000-10

1000

850

580

3201125

44074

NEXTorr D 1000-StarCell

1000

8505803201125500

62.5

NEXTorr D 2000-10

1100

640

2250

800

1372000

1700

NEXTorr Z 100

150

100

75

40

600

90.60.35

NEXTorr Z 200

290

180

140801160

161.50.7

NEXTorr Z 300

400

280

200

120

1920

4021.2

NEXTorr Z 1000

1150

850

500

320

4380

400

74The SAES Group manufacturing
companies are ISO9001
certified and the Italiancompanies are also ISO14001
certified. Full information
about our certifications foreach company of the Groupare available on our website
at: www.saesgroup.com

D.VS.178.0.21

ION SECTION

Product Description

TypeVoltage

FlangePumping Speed
(l/s)
CH4Ar

NEXTorr D 100-5, D 200-5
NEXTorr Z 100, Z 200

Diode

DC +5 kV

CF35156 (0.3)

NEXTorr D 300-5, Z 300
NEXTorr D 500-5

Diode

DC +5 kV

CF63

156 (0.3)

NEXTorr D 1000-10, Z 1000
NEXTorr D 2000-10

Noble
Diode

DC +5 kV

CF100

3210 (2.5)

NEXTorr D 500-StarCell
NEXTorr D 1000-StarCell

StarCell

DC -7 kV

CF63/CF1003021 (12)SorpionCapacity (Torr l)CH4

50,000 hours at
10-6 Torr

80,000 hours at
10-6 Torr

NOTES
The models on CF63 and CF100 flanges are equipped with a thermocouple.
The activation power refers to the NEG element completely immersed in the vacuum chamber (“nude” configuration).
The “NEG length” reported in the last column is the length of the NEG element from the base flange.
The values for H2O are estimated.
Pumping speed data refer to the initial values in nude configuration.
Single-run capacity is reached when pumping speed is equal to the pumping speed of the ion element only (this limit does not
apply for H2).
>100 reactivations (sorption cycles) are possible.

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Ar pumping speed measured at 3x10-6 Torr. Unsaturated ion pump (saturated ion pump).
The NEXTorr® product line incorporates and exploits the patented concept of a combined pumping system comprising a getterpump and an ion pump, and have global Intellectual Property Rights coverage with patents already granted in the US (8,287,247),
Europe (2,409,034), Japan (5,372,239), China (102356236).
© SAES Group. Printed in Italy. All rights reserved. SAES® and NEXTorr® are registered trademarks of SAES Group.
SAES Group reserves the right to change or modify product specifications at any time without notice.

SAES Groupwww.saesgroup.com
neg_technology@saes-group.com

NEXTorr®
HV pumps

HIGHLIGHTS
General Features£ Extremely compact and low weight£ High and constant pumping speed
for all active gases£ Pumping speed for noble gases andmethane£ High sorption capacity in highvacuum£ Fast pump-down after air venting
and without baking£ Suitable for viton-sealed and harshsystems£ Minimal power requirement duringoperation£ Reduced magnetic interference£ Able to indicate system pressure

Applications£ Improvement of the ultimate
vacuum in HV and UHV systems£ Particle accelerators, synchrotron
radiation sources£ Scanning/Transmission electron
microscopes£ Portable vacuum instrumentationand suitcases£ Surface analysis systems£ Process pumps for vacuum devices
and deposition chambers£ Thin films deposition systems£ Pumping, storing and releasinghydrogen isotopes

g r ou p

making innovation happen, together

The NEXTorr® HV pumps are compact High Vacuum (HV) pumps that efficiently
combine a sputter ion pump (SIP) and a Non Evaporable Getter (NEG) pump into avacuum solution featuring high pumping speeds and large sorption capacities, yetretaining a low weight and a minimal footprint.
The NEXTorr HV pumps implement the novel ZAO® (Zr-V-Ti-Al) NEG alloy in its High
Vacuum version, featuring large capacity for all the active gases.
These pumps are specifically designed and engineered to operate in the highvacuum regime (i.e. 10-7–10-9 Torr), and find application in all those equipment
elastomer-sealed, susceptible to air permeation, and not baked out, where water
sensibly contributes to the residual gas background.
In order to exploit these benefits, the NEG element of the NEXTorr HV pumps
operates permanently warm at around 200 °C with a minimal power consumption.
All NEXTorr HV pumps are equipped with a noble diode ion pump, featuring
pumping speed of 7 l/s (Ar) and 15 l/s (CH4) respectively, and optimized to work inbest synergy with the NEG element.
The noble diode ion pump can efficiently work in presence of non-negligible Argon
throughputs typical of elastomer-sealed HV systems.

NEXTorr®
HV pumps

General features and performance
NEG SECTION
Alloy Type

Mass (g)Activation
Power (W)

WorkingPower (W)NEG length(mm)NEXTorr HV 100

ZAO

45.5

455.4

64.5

NEXTorr HV 200

ZAO

8459791

NEXTorr HV 300

ZAO200126

1297

Product Description

NOTES
The NEXTorr HV 300 is equipped with a thermocouple.
The activation power refers to the NEG cartridge completely immersed in the vacuum chamber (“nude” configuration).
The “NEG length” reported in the last column is the length of the NEG cartridge from the base flange.

NEG SECTION
Pumping Speed (l/s)

Sorpion Capacity (Torr l)

H2H2OO2CO2N2H2H2OO2CO2N2NEXTorr HV 100

8070554025910

86431043

NEXTorr HV 200

155130110

90501680

150751875

NEXTorr HV 300

300280260

190

130

4000

380

190

45190

NOTES
The values for H2O are estimated.
Pumping speed data refer to the initial values, and with the NEG element completely immersed in the vacuum chamber(“nude” configuration).
The capacity values (except for H2) are intended as the recommended absorbed quantity per run at around 200°C, allowing toperform more than 20 sorption cycles. In case of operation under lower gas loads or at RT, the pump can be reactivated 100
times or more.
The values for CO can be assumed very similar to those reported for CO2.

The SAES Group manufacturing
companies are ISO9001
certified and the Italiancompanies are also ISO14001
certified. Full information
about our certifications foreach company of the Groupare available on our website
at: www.saesgroup.com

D.VS.179.0.21

ION SECTION

NEXTorr models

Type

VoltageFlangePumping Speed(l/s)
CH4Ar

NEXTorr HV 100

NobleDiodeDC +5 kV

CF35157 (0.7)

NEXTorr HV 200

Noble
Diode

DC +5 kV

CF35157 (0.7)

NEXTorr HV 300

Noble
Diode

DC +5 kV

CF63157 (0.7)

SorpionCapacity (Torr l)
CH450,000 hours at
10-6 Torr

NOTE
Ar pumping speed measured at 3x10-6 Torr. Unsaturated ion pump (saturated ion pump).

g r ou p

The NEXTorr® product line incorporates and exploits the patented concept of a combined pumping system comprising a getterpump and an ion pump, and have global Intellectual Property Rights coverage with patents already granted in the US (8,287,247),
Europe (2,409,034), Japan (5,372,239), China (102356236).
© SAES Group. Printed in Italy. All rights reserved. SAES® and NEXTorr® are registered trademarks of SAES Group.
SAES Group reserves the right to change or modify product specifications at any time without notice.

SAES Groupwww.saesgroup.com
neg_technology@saes-group.com