CapaciTorr®
Pumps

HIGHLIGHTS
CapaciTorr® are flanged pumps using porous sintered NEG disks.
In UHV/XHV pressure level (10-9 Torr and lower), two main CapaciTorr series can besupplied:General Features£ Extremely compact and low weight£ High pumping speed for all activegases£ High sorption capacity and lifetime£ Constant pumping speed in UHV andXHV£ Operation at room temperature
without power after activation£ Oil free and vibration freen CapaciTorr “D” series, based on St 172 NEG material, operating in the field ofUHV/XHV applications since early ’90s.
n CapaciTorr “Z” series, based on the new ZAO® UHV NEG alloy, which further improves
the pumping performance for H2, enhances the mechanical robustness of the disks,and reduces the outgassing during the thermal activation process (typically lasting
1 hour).
Furthermore, the ZAO NEG alloy features far better pumping speed than the St 172 when
activated at lower temperature, as shown in the graph here below.

£ Operation in presence of highmagnetic fields£ Reversible pumping of hydrogen andits isotopes

Pumping speed for H2 at various activation temperature: Z 400 vs D 400

Applications£ Improving ultimate vacuum in
combination with ion, diffusion,
cryogenic or turbomolecular pumps£ Scanning/Transmission electron
microscopes£ Portable vacuum instrumentation£ Surface analysis systems£ Process pumps for vacuum devices
and deposition chambers£ Pumping, storing and releasinghydrogen isotopes

Trend H2 pumping speed
H2 pumping speed (l/s)£ Particle accelerators, synchrotron
radiation sources

600
500
400300

Z 400

200

D 400

1000550500

450

400

Acvaon T (°C) (x1h)g r ou pm a k i n g i n n o vat i o n h a p p e n , to g et h e r

300CapaciTorr pumps featuring different dimensions and pumping performance are available, as reported in the tables below:

General features and dimensions
Product
description

Alloy
Type

Mass(g)

Activation
Power(W)

Base Flange

NEG length(mm)CapaciTorr D 50

St 172

7.832

CF35 (2.75”)

44

CapaciTorr D 100

St 172

13.545

CF35 (2.75”)

65

CapaciTorr D 200

St 1722858

CF35 (2.75”)

88

CapaciTorr D 400

St 1724590

CF35 (2.75”)

132

CapaciTorr D 1000

St 172136

190

CF63 (4.5”) - CF100 (6”)

145

CapaciTorr D 2000

St 172225

500

CF100 (6”) - CF150 (8”)

195

CapaciTorr D 3500

St 172395

360

CF150 (8”) - CF200 (10”)

198

CapaciTorr Z 100

ZAO

3040

CF35 (2.75”)

65

CapaciTorr Z 200

ZAO

58

50

CF35 (2.75”)

88

CapaciTorr Z 400

ZAO

96

87

CF35 (2.75”)

132

CapaciTorr Z 1000

ZAO

280

190

CF63 (4.5”) - CF100 (6”)

145

CapaciTorr Z 3500

ZAO

705

360

CF150 (8”) - CF200 (10”)

198

CapaciTorr®
Pumps

The SAES Group
manufacturing companies
are ISO9001 certified, theAsian and Italian companies
are also ISO14001 certified.
Full information about ourcertifications for eachcompany of the Group are
available on our website at:www.saesgroup.com

Notes:The models D 1000, D 2000, D 3500 and Z 3500 are equipped with a thermocouple.
The models D 400, D 1000, D 2000, D 3500 and Z 3500 feature replaceable NEG cartridge.
The activation power are referred to the “nude” configuration (NEG cartridge completely immersedin the vacuum chamber).
The “NEG length” reported in the last column is the length of the NEG cartridge from the baseflange.

D.VS.173.2.20

Pumping speed and capacity for the main gas species
Productdescription

Pumping Speed (l/s)

Sorption Capacity (Torr l)

H2

H2O

N2COH2H2O

N2COCapaciTorr D 50

55452230783.40.040.15

CapaciTorr D 100

100854060

13550.10.25

CapaciTorr D 200

200

18060

125

280

100.250.6

CapaciTorr D 400

400

290

95

180

450

160.51

CapaciTorr D 1000

1000

900

330

600

1360

60

1.54

CapaciTorr D 2000

2000

1600

420

1000

2250

84

25

CapaciTorr D 3500

3500

2600

900

1600

3950

>200

4.112

CapaciTorr Z 1001501004065

600

50.150.35

CapaciTorr Z 200

290

195751301160

100.30.65

CapaciTorr Z 400

500

320125210

1920

160.61.2

CapaciTorr Z 1000

1250

900

360

550

5600

70

1.73.5

CapaciTorr Z 3500

3900

2100

900

1400

14100

>200

5.1

10Notes:
The values for H2O are estimated.
Pumping speed data refer to the initial values in nude configuration.
Capacity based on speed at 5% of the initial value in nude configuration.
>100 reactivations (sorption cycles) are possible.

© SAES Group. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Group.
SAES Group reserves the right to change or modify product specifications at any time without notice.

g r ou pSAES Groupwww.saesgroup.com
neg_technology@saes-group.com

CapaciTorr® HVPumps

HIGHLIGHTS
General Features£ Extremely compact and low weight£ High pumping speed for all active gases£ High sorption capacity and lifetime£ Constant pumping speed in HV and UHV

The CapaciTorr® HV pumps integrate the new ZAO® high vacuum NEG alloy specificallyconceived to sorb large gas throughput at pressure levels as low as 10-7 Torr.
CapaciTorr HV benefits:n utmost capacity for all active gases
n possibility to start the activation at low vacuum
In order to exploit these benefits, the Capacitorr HV pumps have to be operated
permanently warm at around 200 °C.
All the available models feature easily replaceable NEG cartridge.

£ Oil free and vibration free£ Operation in presence of high magneticfields£ Reversible pumping of hydrogen and its
isotopes£ Fast pumpdown after air venting andwithout baking£ Capable of coping with large air leaks£ Suitable for viton-sealed systems

Applications£ Improving ultimate vacuum incombination with ion, diffusion,
cryogenic or turbomolecular pumps£ Particle accelerators, synchrotron
radiation sources and related equipment£ Scanning/Transmission electron
microscopes

T1 (flange)

T2 (body)

T3 (external red grid)£ Portable vacuum instrumentation£ Surface analysis systems£ Process pumps for vacuum devices anddeposition chambers£ Thin films deposition systems£ Pumping, storing and releasing hydrogenisotopes£ Impurities removal in rare gas filleddevices

g r ou p
m a k i n g i n n o vat i o n h a p p e n , to g et h e r

Working T (°C)

Power (W)T1(°C)

T2(°C)

T3(°C)

CapaciTorr HV 200

20083040RT

CapaciTorr HV 1600

200363550

RT

CapaciTorr HV 2100

200

383550RTCapaciTorr® HVPumps

Connector

FlangeThe SAES Group
manufacturing companies
are ISO9001 certified, theAsian and Italian companies
are also ISO14001 certified.
Full information about ourcertifications for eachcompany of the Group are
available on our website at:www.saesgroup.com

External Shielding

Cartridge
Body

Four CapaciTorr pumps featuring different dimensions and pumping performance areavailable, as reported in the tables below:

D.VS.173.2.20

General features and dimensions
Productdescription

Alloy
Type

Getter Activation Working
Mass (g) Power (W) Power (W)CapaciTorr HV 200 (CF35)

ZAO

140

CapaciTorr HV 200 (CF63)

ZAO

CapaciTorr HV 1600

ZAO

CapaciTorr HV 2100

ZAO

Nippleinlet flange

Nipplelength(mm)

52

7.5

CF35 (2.75”)

245

140

61

8.6

CF63 (4.5”)

195

690

368

36

CF150 (8”)

258

1130

363

38

CF200 (10”)

266

Notes:The models HV 1600 and HV 2100 are equipped with a thermocouple.
All the available pumps feature replaceable NEG cartridge.
The nipple length reported in the last column is the distance between the nipple inlet and the baseconnector (without cable).

Pumping speed and capacity for the main gas species
Product
description

Pumping Speed (l/s)
H2

H2O

O2

N2Sorption Capacity (Torr l)
CO2*

H2

H2O

O2

N2

CO2*

CapaciTorr HV 200 (CF35)

10540323025280040020020040

CapaciTorr HV 200 (CF63)

210

1209060

65

2800

400

20020040

CapaciTorr HV 1600

1700

100080047062013800

1600

800800160

CapaciTorr HV 2100

2100

1500

1250

625880

22600

2600

1300

1300

260

Notes:
Pumping speed data refer to the initial values measured at pump inlet.
The capacity values (except for H2) are intended as the recommended absorbed quantity per run ataround 200 °C, allowing to perform more than 20 sorption cycles. In case of operation under lower
gas loads or at RT, the pump can be reactivated 100 times or more.
The values for H2O are estimated.
(*) The values for CO can be assumed very similar to those reported for CO2.
© SAES Group. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Group.
SAES Group reserves the right to change or modify product specifications at any time without notice.

g r ou p

SAES Groupwww.saesgroup.com
neg_technology@saes-group.com