SG23-369-002E

Laser Autocollimeter Beam Profiler

Smart-ProCo H650 Series
User’s Manual
Thank you for purchasing our product.
Please read this manual, carefully, before any use.
Thereafter, you are advised to keep it in a safe place for immediate future reference.

IndexPreface ............................................................................................................ 6
For your Safety – Precautions of Use ....................................................... 8

1.
1.1

Warning labels addressed in this Manual.................................................................. 8

1.2

Handling this Product .............................................................................................. 8

1.3

Precautions .............................................................................................................. 9

1.3.1 Ambient Temperature and Illuminance ..................................................................................... 9
1.3.2 Power Supply ............................................................................................................................. 9
1.3.3 Disassembly/Modification ......................................................................................................... 9
1.3.4 Effects of Dust and Dirt ............................................................................................................. 9
1.3.5 Influence of Vibration ................................................................................................................ 9
1.3.6 Disturbance by the air fluctuation............................................................................................ 10
1.3.7 Waterproof and Explosionproof ............................................................................................... 10
1.3.8 Actions in case of abnormality ................................................................................................. 10
1.3.9 Repair ....................................................................................................................................... 10
1.3.10 Disposal of this Product ........................................................................................................... 10
1.3.11 Residual Risks........................................................................................................................... 11

1.4

Use of Laser Products for Your Safety .....................................................................121.4.1 Corresponding laser classes for Autocollimater H650 series ................................................... 12
1.4.2 Laser Class Identification Labels on the Products ................................................................... 13

2.

Preparing .............................................................................................. 14

2.1

Functions and Features ...........................................................................................14

2.2

Checking the Package .............................................................................................172.3

H650 Series Specifications ......................................................................................17

2.4

The Products Dimensions .......................................................................................18

2

2.5

Names and Functions: Parts of the Products ...........................................................19

2.6

System Configuration Example ...............................................................................20

2.7

Components Required for the Configuration ..........................................................20

2.8

The Products Installation (example) .......................................................................21

2.9

How to Connect the Power Supply for the Internal Light Source ............................22

2.10

Connecting to PC.................................................................................................22

2.11

Software‐Suruga OptGauge Installation ............................................................23

2.11.1 Software License Agreement.................................................................................................... 23
2.11.2 Recommended Installing PC Environment .............................................................................. 24
2.11.3 Installing the Software.............................................................................................................. 25

2.12Power UP .............................................................................................................31

Settings ................................................................................................. 32

3.
3.1

This section describes how to set the sensor head using the software - Suruga

OptGauge - for the Products. Precautions for Handling the Sensor Head and Setting(installation) Method........................................................................................................32
3.1.1 The Reflection Angle Measurement ........................................................................................ 32
3.1.2 Measuring an External Incident Light Beam ........................................................................... 34

3.2

The Software – Items and Functions on the Main Screen of the Software ...............35

3.2.1 OptGauge Main Display Details .............................................................................................. 36

3.3

Function Details (and Parameters Detail Setting Details) ......................................40

3.3.1 Angle View ............................................................................................................................... 40
3.3.2 Profile View .............................................................................................................................. 60

3.4

Names and Functions in the Option screen .............................................................663

3.4.1 Measurement Option Settings Details ..................................................................................... 67

3.5

Option List ..............................................................................................................77

3.5.1 Switching Option Lists ............................................................................................................. 77
3.5.2 Registering Option Lists .......................................................................................................... 78
3.5.3 Deleting Option Lists............................................................................................................... 79

Measuring ............................................................................................. 80

4.

4.1. Overview of Measurement Methods ........................................................................80
4.1.1 Angle ........................................................................................................................................ 80
4.1.2 Profile ....................................................................................................................................... 80

Cntrolling from External Devices........................................................... 81

5.
5.1

RS232C ...................................................................................................................81

5.1.1 Communication Specifications................................................................................................. 81
5.1.2 The Connections Illustrated..................................................................................................... 82
5.1.3 Command communication setting method .............................................................................. 83

5.2

TCP/IP ...................................................................................................................84

5.2.1 Communication Specifications................................................................................................. 84
5.2.2 Connections Illustrated ............................................................................................................ 85
5.2.3 Command Communication Setting Method ............................................................................ 87

5.3

Command List.........................................................................................................91

5.3.1 Read Commands List ............................................................................................................... 91
5.3.2 List of Write Commands .......................................................................................................... 96
5.3.3 List of Execute Commands..................................................................................................... 100

5.4

Read Commands ...................................................................................................100

5.4.1 Command Formats ................................................................................................................. 100

5.5

Write Commands ..................................................................................................122

5.5.1 Command Formats ................................................................................................................. 122

5.6

Execution Commands............................................................................................142

5.6.1 Command Formats ................................................................................................................ 142

4

5.7

6.

Communication Eror .............................................................................................142

System Log .......................................................................................... 143

6.1

System Log List .....................................................................................................143

6.2

Error Messages and Countermeasures...................................................................144

7.

Specifications for H650 Series Sensor Head and Accessories ............... 145

7.1

Sensor Head Specifications ...................................................................................145

7.2

AC/DC Converter Electrical Specifications...........................................................146

7.3

Sensor Head and Cable Electrical Specifications ...................................................146

8.

Failures? Frequently Asked Questions ................................................. 147

Symptoms and Countermeasures ....................................................................................147

9.

Warranty - After-Sales Service ............................................................. 148

9.1

Warranty Terms, Conditions and Coverage ..........................................................148

9.2

After-Sales Service ................................................................................................148

5

Preface
This document is the "User's Manual" for the H650 series (Laser Autocollimator and Beam Profiler)(hereafter, referred to as "the Product(s)").
This "User's Manual" (hereafter referred to as "this Manual") provides information and basic operating
instructions for the Products. The term, “the Products” is, in general, for all models of laser measuring
instruments starting with the H650 model number presented by Suruga Seiki Co., Ltd., and in thisManual, specifications, functions, parts names, etc., are all common to all products in the series, unless we
explicitly mention exceptions.
To use the Product effectively and safely, please read this Manual carefully and fully understand its
contents before using the Product.
【COPYRIGHT】
Copyright © SURUGA SEIKI Co. Ltd. All rights reserved.
H650 Series User’s Manual
Issue Date

2024 MarchManual Version

V.1.1.0

Revision History

Date

Revision

Details

2024 Feburary

V.1.0.0

1st version

2024 March

V.1.1.0

Revised for Suruga OptGuage Ver.1.1.0

NOTICEThe information contained in this Manual is deemed correct at the time of publication.
SURUGA SEIKI CORPORATION reserves the right to change specifications without notice to the userof the Product offered.
The latest version of this manual can be downloaded from our WEB site (http://jpn.surugaseiki.com/).

6Definitions (terms and abbreviations)Terms and Abbreviations

Definitions

Reflection Angle Measurement
DUT

A method to measure the angle of a beam from internal
light source reflected up on a device under test (DUT).
The angle 2θ is measured to calculate the θ as result.

External Light Angle Measurement
Laser/LED

A method to measure the angleθ of a beam fromexternal light source such as laser or LED.

Reference Plane

It is the plane at the base plate of the H650
OptGauge

Measurement software "Suruga OptGauge"

The Software

Suruga OptGauge

This Manual

H650 User’s Manual

The Sensor Camera

The built-in sensor camera with the Products

Def.

Default

7

1. For your Safety – Precautions of Use
1.1

Warning labels addressed in this Manual

May result in serious injury, damage to equipment, or otherserious damage.
May result in minor physical injury or equipment damage.

Instructions for safe handling are provided for the product.

1.2

Handling this Product➢

The Products emit laser beam. It is recommended that the Products are in an environment whereappropriate safety measures are taken for the laser class before any use.

➢

The function and performance of the Products will not be guaranteed if the product was used in amanner other than that specified in this Manual, or if the Products has been modified.

➢

When the Products are used in combination with other equipment, the functions and performance
may not be fulfilled depending on the operating conditions and environment.

➢

Do not subject each device, including peripherals, to sudden temperature changes. Doing so may
cause condensation and equipment failure.

➢

Do not wipe the product with a wet rag, benzene, thinner, or the alike. Doing so may cause
discoloration or deformation of the Product. If the Product is heavily soiled, wring out a cloth withdiluted PH-neutral detergent and wipe off the stain, then dry the Product with a soft cloth.

➢

If you suspect the Products are in malfunction, please contact our local sales office.

8

1.3

Precautions

1.3.1 Ambient Temperature and Illuminance・

Changes in ambient temperature can cause measurement errors. Please be advised to keep theambient temperature, always, at a constant level.

・

Avoid using the Product near lighting equipment that repeatedly turns on and off at highfrequencies. If this is not possible, use a light shield or similar device to avoid being affected.

1.3.2 Power Supply

・

Use the correct power supply voltage. Failure to do so may result in fire, electric shock, or
malfunction.

・Be sure to turn off the power to the Product and devices connected to the Product when connecting
or disconnecting various connecting wires. Failure to do so may result in damage to the Product.

・Do not turn off the power while setting items. Sudden power cut-off while setting data, part or all
configuration data may be lost.

1.3.3 Disassembly/Modification

Do not disassemble or modify the unit. Doing so may cause fire or electric shock. The warranty is void
if the Product is disassembled or modified by anyone other than our employees or our certified third
party.

1.3.4 Effects of Dust and Dirt
The following cases may cause measurement errors due to the influence of dust, dirt, water, oil, etc.
・Dust and dirt on the cover glass: Use dry-clean air to blow off any dirt on the cover glass. If the coverglass is heavily soiled, wipe it off with a soft cloth soaked in thin alcohol.

・Adhesion on the surface of the object to be measured: Blow it off with clean air or wipe off the dirt.

・

Intrusion into the optical axis area by floating or by splashing: Take measures such as installing aprotective cover or air purging.

1.3.5 Influence of Vibration
・

Vibration to a DUT may cause the measured value to vary. In such a case, a more accurate
measurement can be obtained by increasing the number of times the measured values are averaged.

91.3.6

Disturbance by the air fluctuation

The influence of slow air fluctuation may cause the measured value to vary. In such cases, covering themeasuring section with an airproof cover is an effective countermeasure.

1.3.7

・

Waterproof and Explosionproof

The Products are not intended for use in areas where explosion protection is required. Do not use
the Products in locations where flammable gases or other explosive atmospheres exist.

・The Products are not waterproof. Do not use the Products in locations where liquids may splash or
flow into the Product.

1.3.8 Actions in case of abnormality

In the following cases, turn the power OFF, immediately. Use of the Product under abnormal
conditions may result in malfunction.
・ When abnormal sounds, strange smells, or smoke is detected.
・ If the power cord is damaged.
・ If water or other liquid is spilled on the Product.

1.3.9

Repair

For repair, please contact our local sales office.
・When water or foreign matter gets inside the main unit

・When the product is damaged due to being dropped or external impact.

・When there is a strange odor due to smoke emission

1.3.10 Disposal of this Product
When disposing of the Products, treat it as industrial waste. Please follow in accordance with laws andregulations or by other appropriate methods. We do not collect the Product for purpose.
Please dispose of all materials used to package the Product in accordance with the law or by otherappropriate methods. We do not collect these materials for the purpose.

101.3.11 Residual Risks
This document does not disclose all risks associated with the Products. For residual or unexpectedrisks, or any other risks involved, please implement the safety design of machinery in accordance with
ISO 12100 or your appropriate industrial safety standards.

11

1.4

Use of Laser Products for Your Safety

1.4.1

Corresponding laser classes for Autocollimater H650 series

The following describes the hazards of the laser class in the H650 series.
For specific safety precautions for the laser class, please follow your occupational safety regulations.

Laser Class

Precautions

Normally, blinking, or other aversive reactions protect the eyes and make theClass 2

laser beam safe.
Intentional staring at the laser beam may cause temporary visual impairment
and risk of secondary injury due to aversion reactions.

Ref：IEC 60825:2014 / JIS C 6802：2014 : Safety of Laser Products

121.4.2 Laser Class Identification Labels on the Products
The contents of the laser class identification label and of the warning label, and the pasting positions
where you find them are shown below.

Table 1 : Laser Labels and Descriptions
Laser Class Identification LabelClass2

Warning Label

Background color: Yellow

Background color: Yellow

Text color: Black

Text color: BlackThe notation method and description of the label conform to JIS C 6802:2014

The Laser Label Attaching Positions Common to All Models
The warning label for the laser emission port and the identification label for the laser class are attached on
the left side of the product when viewed from the front.
Laser Warning Label

Laser Class ID Label

13

2. Preparing
2.1

Functions and Features

The Products are multifunctional instrument that measuring the angle of an object, divergence, position,and beam diameter from the laser beam incident on sensors. They have the following main features:⚫

Angle measurement (Φ3 mm diameter if an external light beam)-

Measurement range: ±1.5°-

Repeatability: 1s (determined at 6σ, averaging = 256 times)-

Linearity: 0.25% of F.S. (F.S.=3.0°)*Refer to "H650 Series Sensor Head and Accessories Specification Details" section.

⚫

Divergence measurement-

Measurement range: ≤ 20 mrad-Linearity: ±5% of F.S. (F.S.=20 mrad)*Refer to "Divergence" in the Function Details section.

⚫

Position measurement (when using Φ3mm beam)-

Measurement range: ±1.5 mm-

Repeatability: 1 um (6σ, when measured with averaging = 256 times)-

Linearity: ±0.5% of F.S. (F.S.=3 mm)*Refer to "H650 Series Sensor Head and Accessories Specification Details" section.

⚫ Beam Diameter Measurement-

Measurement range: Φ0.06 mm to Φ6 mm (we recommend that the Spot diameter should be lessthan 1/2 of viewing range when Auto Aperture is applied).
*Refer to "H650 Series Sensor Head and Accessories Specification Details" section.

⚫ The sensor head cable can be connected to PC for measurement with the software.
*Refer to "Preparing: System Configuration Example⚫ Multiple light spots measurement*Refer to "Multi Spot" in the Function Details section.
⚫ Reflection angle measurement and external incident light angle measurement
For reflection angle measurements, the internal light source is available to measure the angle ofreflected light.

14

For external incident light angle measurements, the angle is calculated by directly measuring the light
flux of a laser or a LED.
*Refer to "Tilt Angle / Beam Angel" in the Function Details section.

15

Table 2 Function List
Functions
Measurement

Details
Angle

See “Tilt Angle/Beam Angle” in the Function Details.

Divergence

See “Divergence” in the Function Details.

Position

See “Beam Centroid” in the Function Details.

Beam DiameterSee “Beam Diameter” in the Function Details.

UsefulMaximum brightness

Functions

Total counts
Binning
ROI
Auto Aperture

Displays

Judgement

See “Power” in the OptGauge Main Screen Details.
See “Binning”in the Measurement Option Settings.
See “Aperture” in the Function Details.

Adaptive Calibration

See “Adaptive Cal”」in the Function Details.

DenoisingSee “Denoising” in the Measurement Option Settings.

Storing results

See “LogFile” in the Measurement Option Settings.

Offset from Zero point

See “Origin Offset” in the Function Details.

Unit conversion

See “AngleUnit” in the Measurement Option Settings.

Image rotation

See“CameraSettings” in the Measurement Option

Image mirroring

Settings.

Image zooming

See “Zooming” in the Function Details.

Angle
Beam Divergence
Position

See “Judgement” in the Function Details.

Beam diameter
Maximum brightness
Communication

RS232C

See “RS232C” in the Control from External Devices.

TCP/IP

See “TCP/IP” in the Control from External Devices.

16

2.2

Checking the Package

Please keep in mind that the shipping box contains, in addition to the main unit, a screwdriver foradjusting the internal light source, a USB memory stick and an AC/DC converter as the accessories.
1.

H650 Sensor Body.

2.

One Internal light adjusting screwdriver.

3.

One USB memory.
（Contents： OptGauge(Measuring Software)、camera driver、device authentication file、andthis Manual）.
Please download the latest version from out WEB site（http://jpn.surugaseiki.com/）.

4.

AC/DC Converter for the internal light source (12VDC output).

2.3

H650 Series Specifications

Table 3 H650 Series Common Specifications
External dimensions

170 mm x 100 mm x 45 mm

Body Weight

1.0 kgPower Supply

DC12 VPower Consumption

５ W or lessLaser ClassClass2

Protective Functions

Short-circuit protection and reverse polarity protection

Communications

USB3.0 industrial standard

Operating

0℃ to +40℃、35% to 85% RH (no condensation)

temperature/humidity
Storage-10℃ to +60℃、35% to 85% RH (no condensation)

temperature/humidity
Operating Environment

No direct sunlight, no corrosive or flammable gases, liquids, dust, or otherharmful substances

Body

Aluminum17

2.4

The Products Dimensions

Front View

Right View

Top View

Bottom View

18

2.5

Names and Functions: Parts of the Products①

Internal light source ON/OFF switch
When the switch lights up orange, it isindicating the internal light source is turned on.

②

USB connectors x 2
Connecting H650 and your PC③

A knob for controlling internal light source
intensity.
Adjusts the light intensity of the internal light source. The intensity increases at clockwise anddecreases at counterclockwise.
*Note: Please use the supplied screwdriver for light intensity adjustment④

Power supply port for the internal light source
An AC/DC adapter connection port for the supplied power converter.

⑤

FG terminal
It prevents malfunctions due to the electrical noise. Grounding is required.

⑥

Laser output port
When the internal light source is ON, a laser beamirradiates.
Laser Emission Side
（Front）

Do not irradiate the human body, eyes, skin, or any other objects
without safety conformity.

19

2.6

System Configuration Example

Figure 1 : System Connections
USB3.0Internal light
ON/OFF switch

USB3.0

OptGauge Software

DC12 V PowerFor the internal lightLight intensity
adjustment knob

FG terminal

2.7

Components Required for the Configuration

・ H650 Sensor body・ Power supply to the internal light source（AC/DC converter accessary）
・ Your PC, PC monitor and keyboard
・ Measurement software OptGauge（Software for the Products）

20

2.8

The Products Installation (example)

This section provides an example of mounting H650 series.
1. Place the Product on a mounting plate prepared by the customer.
Use M4 hex socket head cap screws (length: 8-10 mm).
(See the "H650 Series Outline Drawing" for details.)
M4 hex socket head screwsｘ２

H650

Mounting Plate

2. The reference position is the base plate on the front, left side of the H650. Fasten the bolt with aparallel pin or other means pressed against it.

21

2.9

How to Connect the Power Supply for the Internal Light Source

Please use the supplied AC/DC power converter.
Before plugging the AC side of the AC/DC converter into an outlet, insert the plug of the DC side of theconverter into the specified socket.
The FG terminal must be grounded.

Power supply socket
for light source
Do not turn on the converter power until software installation is completed. The FG terminal should begrounded to prevent malfunction due to the electrical noise.

2.10 Connecting to PC
Connect the USB3.0 cable of the main unit to a USB port that supports USB3.0. Be sure to use a USB 3.0
compatible port on the PC side.
USB3.0 Cable

USB3.0 Cable

Do not disconnect the USB cable while the software is running. It prevents normal operation.
If the cable is disconnected, please exit the software, reconnect the USB cable, and then restart thesoftware.

22

2.11 Software‐Suruga OptGauge Installation
2.11.1 Software License Agreement
Use of the Suruga OptGauge (hereafter as “the software”) is conditioned upon your acceptance of thefollowing software license agreement (hereafter as “this Agreement”).
Your installation or duplication of all or any part of the Software on a computer, or use of the software
installed on a computer, constitutes your agreement to all the terms and conditions of this Agreement.
Article 1 (License)
The Software may be used free of charge.
The copyright of the software, the manual of the software and other materials related to the software
belongs to SURUGA SEIKI (hereinafter referred to as “SURUGA SEIKI”). You are granted a nonexclusive right to use the Software.
Article 2 (Restriction of Use)
Use of this software is permitted only for the purpose of operating this product and collecting data.
Any other use is prohibited.
Article 3 (Reproduction and Tampering)
Reproduction of the software is permitted only on the PC on which this product is used.
However, modification, redistribution, and reverse engineering are prohibited.
Article 4 (Disclaimer)
1. the user shall use this software at his/her own risk.
2. the company shall not be liable for any direct, indirect, incidental, special, consequential, or punitive
damages (including but not limited to loss of data, business interruption, or loss of profits) arising outof the use or inability to use this software.
3. we shall not be liable for damages arising from bugs, errors, viruses, unauthorized access by third
parties, or other defects or security problems in the software.
4. shall not be liable for any damages arising from tampering with the Software.
Article 5 (Support)
The Company shall provide technical support regarding the Software. However, we guarantee that by
our technical support, however, the Company does not guarantee that the customer’s purpose will beachieved by the Company’s technical support.

23

Article 6 (Termination)
Your right to use the software shall terminate immediately if you breach any of the terms of thisAgreement.

2.11.2 Recommended Installing PC Environment
HardwareSupported OS

Windows 10 Pro 64 bit

specifications

CPUIntel Core i5 – 10400 CPU 2.90 GHz or higher
6 core 12 threads

SoftwareRAM

8GB or more

Storage Space

1GB or more

Display resolution

1920x1080

USB

USB3.0 with Type A port：3 ports or more

Framework.NET6.0※

specifications
NET6.0” is not installed on your PC, please install “.NET RunTime6.0.x.x” from the Microsoft website.
NET RunTime6.0.x.x” from the Microsoft website.

24

2.11.3 Installing the Software
2.11.3.1 Installing the USB Driver
1. Start the installation by double-clicking “Basler_pylon_7.0.0.24651.exe” in “\CameraDriver”.

2. Please agree to the installation confirmation screen
3. Select “Developer” for the installation method (Profiles).

4. Select “USB” as the sensor camera connection method (Interfaces) for the sensor camera. Leave thedefault setting as it is and complete the installation.

25

2.11.3.2 By Download
Where to download:
Please download from our WEB site (http://jpn.surugaseiki.com/).

2.11.3.3 Installing the Software
1. Double-click the “SurugaOptGaugeSetup_x.x.xx.msi” in the “… \Application”.

2. Click「Next>」

26

3. After “Next>, the installation starts.
Click ”Close” to finish.
Installation Starts

Installing

Installation Complete

4. “OptGauge” icon will be appears in the desktop。

This concludes the installation procedures.

27

2.11.3.4 Coping the Device Authentication File
Note 1: What the authentication file is.
Because calibration values are determined for each device for the product, t“e "OptGa”ge" requires
reading t“e "device authentication file (extension .suru”a)" in which individual unique information isstored.
To load the device authentication file into this software, copy t“e "XX S UR”GA" file “n "..
\ AuthenticationF”le" to an arbitrary location.

Copy the "xxx.suruga" file to the arbitrary location.

Note 2:
If your security does not allow you to copy the device authentication file to your PC, this procedure is notnecessary because the file can be read directly from the USB memory stick provided with the device.

28

2.11.3.5 Start “OptGauge” and Close
To start the “OptGauge”
1. Double-click the ”SurugaOptGauge” icon on the Desktop.
2. .

Select and op“n ".sur”ga" extension in the folder copied “n "Device Authentication F”le" as

instructed “n "Copy Device Authentication F”le" section above.
If you cannot copy the device authentication file to your PC, select it directly from the USB memory
stick.

3. Confirm the “Result” is ”OK”, and press “Start”.

29

*Because this software controls TCP/IP communication, the following warning may appear depending on
the security settings of your PC for first time launching.
If your PC or network environment allows TCP/IP communication, check all the boxes, and click "Allow
Access. If not, please click "Cancel".
(If you want to change the settings later, you can do so in "Control Panel ➤ All Control Panel Items ➤Windows Defender Firewall ➤ Allowed Apps").

4. The software starts

30

To close the OptGauge.
1. Click the “X” in the OptGauge.

2.12 Power UP

Do not turn on the sensor head until the installation of the Products and the software installation arecomplete and the person in charge has confirmed that the operation is all safe.
To turn on the internal light source, connect the DC12V power converter for the internal light source toan outlet and turn on the internal light source ON/OFF switch.
USB3.0Internal light
ON/OFF switch

USB3.0FG terminal

DC12 V PowerFor the internal lightLight intensity
adjustment knob

31

3. Settings
3.1 This section describes how to set the sensor head using the software - Suruga OptGauge- for the Products. Precautions for Handling the Sensor Head and Setting (installation)
Method3.1.1
1.

The Reflection Angle Measurement

Turn off the H650's internal light source and set a device under test to be in 200 mm away from thereference plane.
200 mm

DUT

200 mm2.

Turn on the internal light source switch after installation is complete.

Internal light source switch(ON lighting)3.

Start the OptGauge and open the Option screen.

32

4.

Set Angle Type*1 to "Tilt Angle" on the Angle tab in the option screen.

5.

Set the Peak*2 in the measurement screen to be between 3500 and 3800 (optimum value) by
adjusting "Exposure Time"*1 in the Options screen and the light intensity with the screwdriver on thelight intensity adjustment knob.
*1 refer to the “Angle Type” in the Measurement Option Settings.
*2 refer to the "CameraSettings" in the Measurement Option Settings.
*3 refer to the "Power" on the OptGauge Main Screen.

33

3.1.2
1.

Measuring an External Incident Light Beam
Turn off the H650's internal light source and set the distance between the front edge of the sensor
head reference plane and the beam position you wish to measure to be 200 mm away.
External Ligh Source

200 mm2.

Start the OptGauge and open the Option screen.

3.

Set Angle Type*1 to “Beam Angle” on the Angle tab in the Option screen.
Set the Peak*2 in the Measurement screen to be between 3500 and 3800 (optimum value) by
adjusting "Exposure Time"*3 in the Options screen and the light intensity with the screwdriveron the light intensity adjustment knob.

*1 refer to the “Angle Type” in the Measurement Option Settings.
*2 refer to the "CameraSettings" in the Measurement Option Settings.
*3 refer to the "Power" on the OptGauge Main Screen.

34

3.2 The Software – Items and Functions on the Main Screen of the Software

OptGauge Main Screen① Option

Opens the Options dialog box② Angle View

Area for an image taken by the angle sensor③ Angle measurement

Area for angle measurement results

results④ Angle Power

Area for beam intensity taken by the angle sensor⑤ Profile View

Area for an image taken by the profile sensor⑥ Profile measurement

Area for the Profile measurement results

results⑦ Profile PowerBeam intensity measured by the Profile sensor⑧ Adaptive Cal

Execute the Adaptive Calibration (denoising)⑨ Result Log

Output measurement results and measurement images to a
designated file folder on PC.

⑩ System Log

Area for software operation logs

35

3.2.1

OptGauge Main Display Details

3.2.1.1 Angle View

① Cross (Red)② Aperture(Blue、Orange)③ Cross (white)

The centroid position of a light beam
Limit the area for computation with respect to observation
See “Aperture” in the Function Details
The center position of the coordinates④ Aperture(white)The range of angle measurement⑤ Profile

The intensity distribution of a beam

36

Selecting the measurement mode at “Angle Type” in the Option settings
See “Tilt(Beam)Angle” in the Function Details⑥ Tilt(Beam)Angle

Angle X

Angle of the X-axis component of the center cross(white)

Angle Y

Angle of the Y-axis component of the center cross(white)

Angle D

Angle from the center cross (white)

Selecting the measurement mode at “D4Sigma” in the Option settings
See “divergence” in the Function Details⑦ Beam Divergence

D4Sigma

Displays Divergence of D4σ beam in half angle

D4Sigma X(M)Displays D4σX(M) divergence in half angle

D4Sigma Y(m)Displays Divergence of D4σY(m) in half angle

D86

Displays Divergence of D86 beam in half angle

Available when ”Orientation Enabled” in the Option Settings is in active.
⑧ Beam Ellipticity

See “Beam Ellipticity” in the Function Details

Ellipticity m/M

Displays the ellipticity of the D4σ beam width

In the “Judgement Settings”, enterfor the measurement data you wish tojudge、and set the judgement criteria in
See “Judgement” in the Function Details⑨ Judgement

Tilt Angle (D)Beam Divergence
Beam Ellipticity“OK” is displayed if the set criteria are met,
“NG” if notSpecifies beam spots to be displayed in⑩ Main Spot

Number

"⑥ Tilt(Beam)Angle", "⑦ Beam Divergence", and"⑧ Beam Ellipticity" during multi-point beammeasurement.

⑪ Multi Spot Meas.
Display Area
⑫ X-Y Coordinates
Frame Rate

⑬ Power⑭ Adaptive Cal

When multiple beam spots are detected, the measurement results for the beam
spots are automatically listed and displayed.
Coordinates are displayed when the mouse cursor is hovered over
The image update rate per second from image data capture to completion of
measurement data calculations
Total Count

Total count value of a light beam (0～4,429,152,000)

Peak

Maximum beam intensity (0～4095)

Improve calculation accuracy by removing overall noise from an image capturedby the sensor.
See “Adaptive Cal” in the Function Details

373.2.1.2 Profile View

① Cross (Red)② Aperture(Blue、Orange)③ Cross (white)

The centroid position of a light beam
Limit the area for computation with respect to observation*.
*See “Aperture” in the Function Details
The center position of the coordinates④ Aperture(white)⑤ Profile

The range of angle measurement
Display the intensity distribution of a beam

38

Centroid X

The centroid X centered at the X-axis component of thecross (white)⑥ Beam Centroid

Centroid Y
Centroid D

The centroid Y centered at the Y-axis component of thecross (white)
The centroid centered at the cross (white)

Change measurement mode by the “D4Sigma” in the Option settings
See “Beam diameter” in the Function Details⑦ Beam Diameter

D4Sigma

Displays D4σ beam diameter

D4Sigma X(M)Displays D4σX(M) beam width

D4Sigma Y(m)Displays D4σY(m) beam width

D86

Displays D86.5 beam diameter

Available when ”Orientation Enabled” in the Option settings is in active.
⑧ Beam Ellipticity

See “Beam Ellipticity” in the Function Details
Ellipticity m/M

Displays ellipticity of D4σbeam width

In the “Judgement Settings”, enterfor the measurement data you wish tojudge、and set the judgement criteria in
See “Judgement” in the Function Details⑨ Judgement

Beam Centroid (D)Beam Diameter
Beam Ellipticity“OK” is displayed if the set criteria are met, and “NG”
if notSpecifies beam spots to be displayed in⑩ Main Spot

Number

"○6 Beam Centroid ", "○7 Beam Diameter ", and"○
8 Beam Ellipticity " during multi-point beammeasurement.

⑪ Multi Spot
Measurement

When multiple beam spots are detected, the measurement results for the beam
spots are automatically listed and displayed.

Display Area
⑫ X-Y coordinates
Frame Rate

⑬ Power

Coordinates are displayed when the mouse cursor is hovered over
The image update rate per second from image data capture to completion of
measurement data calculations
Total Count

Total count value of a beam (0～4,429,152,000)

Peak

Maximum intensity of a beam (0～4095)

Improve calculation accuracy by removing overall noise from an image captured⑭ Adaptive Cal

by the sensor.
See “Adaptive Cal” in the Function Details

393.3 Function Details (and Parameters Detail Setting Details)
3.3.1

Angle View

3.3.1.1 Tilt Angle/Beam Angle
You need to change the measurement mode according to your measuring purpose.
For the reflection angle measurement, select "Tilt Angle".
For the external light angle measurement, select "Beam Angle".
For the reflectance angle measurement
It starts reflectance angle measurement.

Set "Angle Type" in option settings
to [Tilt Angle]

For the external light angle measurement
It starts external light angle measurement.

Set "Angle Type" in option settings
to [Beam Angle].

40

3.3.1.2 Divergence
Divergence indicates how much the beam expands at an angle as it propagates.
A light beam with small divergence means that it expands little during propagation over long distance,
while a beam with large divergence expands rapidly over short distance.
This Products display divergence in a half-angle with mrad (milliradian).
It has two modes of measurement.
To measure D4σ beam diameter (elliptical beam) of divergence along with X-axis and Y-axis directions
Measures beam divergence with "D4Sigma X" and "D4Sigma Y"

Set "Orientation Enabled" in theoption settings to "Disabled".

To measure a D4σ beam diameter (elliptical beam) of divergence along with M (major: long axis) andm (minor: short axis)「D4Sigma M」、「D4Sigma m」でダイバージェンスを測定します

Set "Orientation Enabled" in theoption settings to "Enabled".

41

3.3.1.3 Beam Centroid
The center position of a light spot can be selected from the types either beam area (area centroid) and beam
intensity (luminance centroid) in the "Beam Centroid" in the option setting. We recommend selecting thetype of "Beam Centroid" according to an object to be measured.
Area Centroid (Area)
For the area centroid of a light beam, its centroid position is calculated from an irradiated area higher
luminance than the denoising threshold value and results as an angle. Therefore, by raising the thresholdvalue, the effects of the edges of the peak profile can be minimized.
We recommend selecting this type of measurement for objects such mirror with uniform surface and reflects
a light beam without blur or smudge*.
※ Optically, blur or smudge is defined as, for instance, luminous point with elongating edge profile in normal
distribution, half-width deviating largely from normal distribution, or objects with irregular profiles which
are not smooth.

Detection example
Beam Profile

Recommended
DUTs
推奨測定対象物

MirrorNormalDistribution

Glass

Target Area

ミラー

ガラス

Threshold

BeamCentroid

42

Luminance Centroid
For luminance [Intensity] centroid, the centroid position of a light beam is calculated from the beam
intensity with higher luminance than the denoising threshold value and results as an angle.
By lowering the threshold value, the Intensity Centroid can include the luminous point peripheral area
causing blur or smudge.
We recommend to selecting this type of measurement mode for objects such mirror with uniform surface
which reflects a light beam without blur or smudge*.
We recommend selecting this type of measurement mode for objects such as resin with non-uniform
surfaces which reflects a light beam with blur or smudge.

Detection example

推奨測定対象物

Beam Profile

Recommended DUTs

Concave Lens
NormalDistribution

TargetLuminance

Threshold

BeamCentroid

43

3.3.1.4 Beam Ellipticity
Beam Ellipticity determines how far the beam shape is deformed from circular to elliptical.
Beam ellipticity formula:
Beam Ellipticity = D4σm (minor) beam diameter / D4σM (major) beam diameter
The following describes its use.

Beam Ellipticity Usages
Beam Ellipticity is used when you want to measure the parallelism of two or more devices.
1. The beam spots of "Sub 1" and "Sub 2" shown in the right are
incident lights to the sensor head, and the angles of each can bemeasured.

Sub2
Sub1

We move the two beam spots close to each other so that the Sub1and Sub2 are nearly parallel.

2. As the two beam spots move close together, the sensor begins to perceive them as a single ellipticalbeam.
Therefore, it is no longer possible to measure their individual
angle or their parallelism.

Sub2
Sub1

44

3. On this state as the previous, the beam ellipticity function comes to use.
The beam is measured in ellipticity.

Sub2
Sub1

4. Move the two beams even closer together. Closer the ellipticity to 1.000, the two targets are nearer toparallel.

Sub2
Sub1

For ellipticity measurement

Set "Orientation Enabled" in option
settings to "Enabled".

45

3.3.1.5 Judgement
The judgement function is available in an intuitively understandable expression of whether or not themeasurement value is within the target range.
Here, as examples, we have the procedures for Angle (D) and Peak.

For Angle (D)1. Adjusting the angle and aim to set the "Angle(D)" of the measurement result to less than 0.5000
deg. Enable the “Angle(D)” in the “Judgement Settings” in the Option setting and enter the value
to be 0.5000 deg.

46

2. As a result of adjusting the angle, the result of Angle D on the measurement screen is not less than
0 .5000 deg(1), so the judgment result is “NG”(2) at the“Tilt Angle(D)”of the “Judgement”.

(1)

(2)

3. As a result of adjusting the angle one more time, the result of Angle D on the measurement screen isless than 0.5000 deg(1), so the judgment result of "Tilt Angle(D)" in "Judgement" is displayed as
OK(2).

(1)

(2)

47

For the Peak
1.

Adjusting the light intensity and set the “Peak” of the measurement result to be less than 3500.

Set “Peak” to “Enable” in the “Judgement Settings” option and set it to be “3500.0”.

48

2.

Because the result of Peak light intensity adjustment on the measurement screen is not less than
3500.0(1), the judgement result is “NG”(2), and the peak bar is in red.

(1)

(2)

3.

When the result of repeated Peak light intensity adjustment on the measurement screen is less than
3500.0(1), the judgement result is “OK”(2), and the peak bar is in green.

(1)
(2)

49

3.3.1.6 Adaptive Cal
The "Adaptive Cal" is a function that improves light beam calculation accuracy by removing noise from theentire sensor. This function is an automatic denoising function that calculates the baseline correction value
from the entire sensor and offsets it from the pixel data of each pixel.
It is recommended to run this function when starting up the application and every time the exposure timein the camera settings is changed.
1. Deflect the beam not to enter the product.
2. Click the “Adaptive Cal” button.

50

3. When adaptive calibration is executed, the button color changes.
4. When "Adaptive Calibration succeeded" is displayed in the System Log, the process is complete.
5. Thereafter, set the beam incoming to the product and begin measurement.

Note:
If the beam is incoming to the product or the ambient light is causing serious noise, the Adaptive Cal will
not succeed. Execute it in an environment where light does not enter the sensor camera.

51

3.3.1.7 Aperture
The “Auto Aperture” and “ROI” settings are available to eliminate the effects of noise such as ambient
light are not included in the beam divergence measurement results.
By using these two functions, measurement excluding ambient light, etc., can be done.

Orange Line:
Aperture by the Auto Aperture setting

Light blue dotted line:
Aperture by the ROI setting

Aperture Explain
This function is suitable for measuring dynamic beams where the position, size,
Auto Apertureshape, or intensity of the beam may vary over time.
It automatically adjusts aperture.
This function is suitable for measuring beams whose position, size, shape, andROI

intensity rarely vary with time.
The aperture must be adjusted manually.

Info
Auto Aperture and ROI together can enhance only the important parts of the beam intensity, shape, andposition, and by minimizing noise and interference it improves the accuracy of measurement.
It is recommended that both be used simultaneously in situations where the beam position does notchange.

52

Setting Methods
Setting Auto Aperture

Set “Auto Aperture” in option settings to [Enabled]

Setting ROI

Enable "ROI" in the option settings and set the X,
position, width, Height (size) to enclose the beam.

Setting Auto Aperture and ROI

To enclose the light beam, set "Auto Aperture"and "ROI" to "Enable" in the Option Settings,
and set the X,Y (location), Width, and Height(size) of the "ROI".

53

3.3.1.8 Origin Offset
The Origin Offset function offsets the sensor camera center position from the default position to any
position as desired.
By using the offset function, an arbitrary position can be aligned as the reference position.
There are two offset methods.
Setting Methods
Setting from the Option Screen
Ex.: Set at X = 0.5deg, Y = 0.5deg

Set “Origin Offset” inOption settings to thedesired value

Offset white cursor at X=0.5 deg and Y=0.5 deg

Setting from the View Screen
1. Open the option setting screen.
2. Target the view screen cross (white) cursor
3. When the mouse icon changes, drag and drop.

4. Because "Origin Offset" has been changed, save the option settings.

54

3.3.1.9 Zoom In
The zoom function is available for observation of the light beam status on the View screen.
1. Left-click the view screen.
2. A pop-up window will be displayed.

3. Drag and drop the display to be enlarged, and a zoomed area will appear.

55

4. Right-click to quit the zooming display.

5. To close the pop-up window, click the [X] button.

56

3.3.1.10 Multi Spot
The Products support multi-spot measurement of up to 100 spots simultaneously.
The use of the Multi Spot setting enables the measurement results screen display order and number to be
set.
Detection conditions can also be set to filter measurement targets.
Ex. Explaining the screen for detection of multiple beams (4 spots)

By changing "Number", the corresponding Number(No.) in the list below can be displayed in
the Title Angle at the top.
Displays the measurement results of 4 spots on themeasurement results screen.
The list is automatically updated with the numberof detected beams.

57

Setting Methods
To enter the number of measurement spots to be displayed
Changing "Spot Count" enables the number displayed on
the measurement results screen to be designated.

Change "Spot Count"in option settings58

To enter the conditions (size) of the beams to be detected as measurement targets“Min Spot Area”を変更するとことで測定対象として検出するビームの条件を指定できます。

Change "Min Spot Area"
in option settings

Info
Use pixels for the values set for beam conditions.
The setting example detects beam areas of 200 pix orhigher received by the camera as measurement targets.

59

3.3.2

Profile View

3.3.2.1 Beam Centroid
Beam Centroid (light beam center) is available for measurement.
A beam center determines distance from the center of coordinates to an incident beam center.
The center position of a light spot can be determined in either Area centroid or Intensity centroid at“Beam Centroid” in the Option settings. We recommend selecting the modes depending on a device
under test.

60

3.3.2.2 Beam Diameter
Measuring beam diameter is available.
The beam diameter is the size measurement of an incident beam to the Profile sensor in “mm” or “μm ”.
The measurement consists of two modes.
To measure D4σ beam diameter (elliptical beam) in X-axis and Y-axis directions
To measure beam diameter with “D4Sigma X” and “D4Sigma Y”

Set the "Orientation Enabled" in the
Option settings to "Disabled".

To measure the M (major axis) and m (minor axis) beam diameters of D4σ beam (elliptical beam)
To measure beam diameter with “D4Sigma M” and”D4Sigma m”

Set the "Orientation Enabled" in the
Option settings to "Enabled".

61

3.3.2.3 Beam Ellipticity
Beam Ellipticity (hereafter referred to as "Ellipticity") indicates how much the beam shape is biased fromcircular to elliptical.
To measure Ellipticity

Set the "Orientation Enabled" in the
Option settings to "Enabled".

3.3.2.4 Judgement
The judgment function is provided to express in an intuitively understandable manner whether themeasured value is within the target range.
See " Angle View->Judgement" In the Function Details for the settings.

62

3.3.2.5 Adaptive Cal
Adaptive Cal is a function that removes a certain amount of noise from the entire image data acquired by
the sensor camera so that measurement errors caused by noise should be reduced. This function is an
automatic noise reduction function that calculates the baseline correction value from the entire sensor
and offsets the amount from each pixel data.
It is recommended to execute this function when starting up the application and every time the exposure
time in the camera settings is changed.
1. Check the mark front of “Visible” at the Adaptive Cal in the Option setting.

2. Block any incident beams to the Products.
3. Click the “Adaptive Cal” button.

63

4. When the Adaptive Cal is executed, the color of the button changes.
5. When "[Profile View] Adaptive Calibration succeeded" appears in the System Log, it is completed.
6. Please start the measurement by irradiating a beam into the sensor body.

Note
The Adaptive Cal will not succeed if the beam is entering the unit or if there is too much noise due toambient light. Please execute the Adaptive Cal in an environment where light does not enter the sensor
camera.

64

3.3.2.6 Aperture
To avoid having the effects of noise such as ambient light in the Beam Diameter measurement results, the"Auto Aperture" and "ROI" settings are available.
By using these two functions, noise such as ambient light is eliminated from the measurement.
See “Angle View ->Aperture” in the Function Details.

3.3.2.7 Origin Offset
Origin Offset is a function that offsets the center position of the sensor camera from its factory default
position to an arbitrary position.
By using the Offset function, any desired position can be used as the reference position for alignment.
There are two methods to offset.
See ”Angle View ->Origin Offset” in the Function Details.

3.3.2.8 Zoom View
The View screen has a Zoom function to observe the condition of a light beam.
See “Angle View -> Zoom View” in the Function Details.

3.3.2.9 Multi Spot
The Products support multi-spot measurement and can measure up to 100 points, simultaneously.
Using the Multi Spot setting, you can set the "display order" and "number of displays" to be displayed on
the measurement result screen. Also, "detection criteria" can be set to narrow down targets to be measured.
See “Angle View ->Multi Spot” in the Function Details.

65

3.4

Names and Functions in the Option screen

OptGauge Option screen① Option tabs

Each option screen is displayed by selecting the tabs.

② Various Settings

Measurement criteria can be changed.

③ Option SelectOption lists can be created and operated while switching between them.
(See "Option List")④ Save/Cancel

The button is enabled when the option is changed.
Clicking the "Save" button after changing the settings saves the changes.
To cancel the changes, press "Cancel" button.

66

3.4.1

Measurement Option Settings Details

3.4.1.1 Angle

⑤

①

⑪

⑥

⑰

⑫

⑦

⑬

②

⑭

⑧

⑱
③
⑮
⑯

⑨
④

⑩

① Camera Settings
Exposure Time
Frame Rate

Exposure time to the sensor camera (def.=1.0)
Setting range：0.027～2000
Frame rate of the sensor camera (def.=100)
Setting range：0.1～100
Rotation of captured image

Rotation

Mirroring

0 (def.)No rotation。

9090°clockwise rotation at the center of the camera as origin.

180

180°clockwise rotation at the center of the camera as origin.

270

270°clockwise rotation at the center of the camera as origin.

Horizontal

Vertical

Mirroring of an image

Blank(def.)

Blank(def.)

No mirroring

Check

Blank

Horizontal mirroring

Blank

Check

Vertical mirroring

Check

Check

Horizontal and vertical mirroring67

Offset the coordinate center position (cross(white))*See “Origin Offset” in the Function Details
With the sensor camera center as "0.0000 (def.)", adjusts② Origin Offset

X(offsets) white cross position in X direction.
Setting range: -10.0000 to 10.0000
With sensor camera center as "0.0000 (def.)", adjustsY(offsets) cross (white) position in Y direction.
Setting range: -10.0000 to 10.0000③ Judgement Settings
Sets the Angle (D) OK/NG judgement for Tilt Angle or Beam Angle.
Setting range: 0.0000 to 10.0000 (def. 0.0000)
Angle*See “Judgement” in the Function Details
EnabledEnables the Judgement.

Disabled (def.)

Disables the Judgement.

Sets the D4Sigma or D86 OK/NG judgement for beam divergence.
Divergence

Radius Type

Setting range: 0.0000 to 1,000.0000 (def. 0.0000)*See “Judgement” in the Function Details
EnabledEnables the Judgement.

Disabled (def.)

Disables the Judgement.

D4Sigma

Sets D4 Sigma for the divergence to be judged.

D86

Sets D86 for the divergence to be judged.

Sets the ellipticity OK/NG judgement for beam ellipticity.
Ellipticity

Setting range: 0.0000 to 1.0000 (def. 0.0000)*See “Judgement” in the Function Details
EnabledEnables the Judgement.

Disabled (def.)

Disables the Judgement.

Sets the Peak OK/NG judgement for the Power.
Peak

Setting range: 0.0 to 4095.0 (def. 4094.0)*See “Judgement” in the Function Details
EnabledEnables the Judgement.

Disabled (def.)

Disables the Judgement.

④ Log FileTo specify outputs and where to save the measurement results(CSV).

Image

Raw

EnabledOutputs image data at the Angle View (.png) along with themeasurement results (.csv).

Disabled (def.)

No output image data at Angle View (.png).

EnabledOutputs Angle View raw image data (CSV)* with68

measurement results (CSV) * Outputs luminance values per
pixel
Disabled (def.)

No output raw image data at Angle View (.png).

Sets display locations for beam strength distribution.
⑤ Cross Section

Origin Cursor
Beam Cursor

Displays coordinate center position beam strength
distribution.
Displays the centroid of a beam strength distribution.

Sets averaging process (moving average) for measurement values.
⑥ Moving Average

Setting range: 2 to 262,144 (def. = 2)
EnabledEnables averaging setting.

Disabled (def.)

Disables averaging setting.

Sets Auto Aperture. *See "Aperture" in the Function Details
EnabledEnables Auto Aperture setting.

Disabled (def.)

Disables Auto Aperture setting.

⑦ Auto Aperture
Area
Intensity(def.)

Sets Auto Aperture from the centroid position calculatedwith the Area Centroid process.
Sets Auto Aperture from centroid position calculated withintensity weighed process.

Sets ROI. *See "Aperture" in the Function Details
EnabledEnables ROI setting.

Disabled (def.)

Disables ROI setting

X
⑧ ROI
Y
Width
Height

Sets ROI X direction setting position.
Range: -3,000 to 3,000 (def. = - 520)
Sets ROI Y direction setting position.
Range: -3,000 to 3,000 (def. = +520)
Sets ROI horizontal width.
Setting range: 0 to 3,000 (def. = 1040)
Sets ROI vertical width.
Setting range: 0 to 3,000 (def. = 1040)

Sets targets for the angle measurement
Tilt Angle⑨ Angle Type(def.)

Sets for the reflection angle measurement.
Sets a half of the angle of an incident beam as the measured
target angle.
Sets for the external light angle measurement.

Beam Angle

Sets the angle of an incident beam as the measured target
angle.

69

Sets thresholds.
When enabled, it derives the measurement values by using the pixels with the
pixel values higher than the set value.
⑩ Denoising

Setting range: 1 to 4,095 (def. = 100)
EnabledEnables denoising setting.

Disabled

Disables denoising setting.

Sets the calculation method for the Intensity Centroid position.

⑪ Beam Centroid

Area

Calculates the centroid position with the area of centroid
process.

Intensity

Calculates the centroid position with the intensity weighing(def.)

process.

⑫ D4Sigma
Switches "Beam Divergence" measurement content and "Beam Ellipticity"
enabled/disabled.
・ Displays D4 Sigma M (major) and D4 Sigma m (minor)
Orientation Enabled

Enabledbeam divergence.
・ Enables Beam Ellipticity.

Disabled

・ Displays D4 Sigma X and D4 Sigma Y beam divergence.

(def.)・ Disables Beam Ellipticity.

Sets angle unit display for measurement values.
⑬ Angle Unit

Degree (def.)

Sets for decimal degree unit.

DegMinSec

Sets for degrees-minutes-seconds unit.

MilliradianSets for milli-radian unit.

⑭ Multi Spot *See “Multi Spot”in the Function Details
Sets the sorting type of the measurement results displayed when detecting
multiple beams.
Order

Area (def.)

Sorts beam area from the largest size.

Angle

Sorts beam area from the smallest angle.

Sets the number to be displayed on the measurement results screen when
Spot Countdetecting multiple beams.
Setting range: 1 to 100 (def. = 1)
Sets the threshold value for the beam size (pixels) conditions of the beam to be

Min Spot Area

detected.
Setting range：1～1023(def.=1)

70

Sets the binning function 2x2) of the sensor camera.
When binning is "enabled", adjacent pixels are combined to increase the noise
sensitivity of the camera. It also improves the frame rate by reducing the image⑮ Binning

size by 1/4 and reducing the data volume.
EnabledDisabled(def.)

Enables binning function.
Disables binning function.

Sets "Adaptive Cal" button show/hide.
⑯ Adaptive Cal

EnabledDisabled(def.)

Displays the "Adaptive Cal" button.
Hides the "Adaptive Cal" button.

Designates the number of decimal places when outputting measurement results.
Setting range: 0 to 8 (def. = 8)
*Measurement results output indicates the results (.csv) output with the[Output Once] button and the output from communication controlled fromexternal devices.
Angle X
Angle Y⑰ Decimal Points

Angle D
D4Sigma
D4SigmaX(M)D4SigmaY(m)D86
Ellipticity

Sets the number of decimal places for Angle X measurement
results output.
Sets the number of decimal places for Angle Y measurement
results output.
Sets the number of decimal places for Angle D measurement
results output.
Sets the number of decimal places for D4Sigma measurement
results output.
Sets the number of decimal places for D4SigmaX(M)measurement results output.
Sets the number of decimal places for D4SigmaY(m)measurement results output.
Sets the number of decimal places for D86 measurement
results output.
Sets the number of decimal places for ellipticity measurement
results output.

⑱ Display
Sets the maximum number of beam numbers to be displayed in the Angle view.
Spot Number

The numbers are sorted according to "Order" of "Multi Spot".
Setting range: 00 to 100 (def.= 0)71

3.4.1.2 Profile

⑤

⑪

⑥

⑫

①

⑦

⑯

⑬

②
⑧

⑭

③

⑰

⑮
⑨

④

⑩

① Camera Settings
Exposure Time
Frame Rate

Sets the sensor camera exposure time. (def. = 1.0)
Setting range: 0.027 to 2000
Sets the sensor camera frame rate. (def. = 100)
Setting range: 0.1 to 100
Sets image rotation.
0 (def.)90

Rotation
180
270

Mirroring

No Rotation.
Rotate 90° clockwise with the center of the sensor camera as
the origin.
Rotate 180° clockwise with the center of the sensor camera as
the origin.
Rotate 270° clockwise with the center of the sensor camera as
the origin.

Horizontal

Vertical

Sets mirroring

Disabled

Disabled(def.)(def.)

EnabledDisabled

Horizontal mirroring

Disabled

Enabled

Vertical mirroring

EnabledEnabled

Vertical and horizontal mirroring

No mirroring72

Offsets coordinate center position (white cross).
*See “Origin Offset”in the Function Details
With the sensor camera center as "0.0000 (def.)", adjusts② Origin Offset

X(offsets) white cross position in X direction.
Setting range: -20.0000 to +20.0000
With sensor camera center as "0.0000 (def.)", adjusts (offsets)

Y

cross (white) position in Y direction.
Setting range: -20.0000 to +20.0000③ Judgement Settings
Sets OK/NG judgement on the Beam Centroid->Beam Centroid(D) in the
Beam Centroid.
BeamCentroid(D)Setting range：0.0000～+20.0000(def.0.0000)*See “Judgement” in the Function Details

EnabledDisabled(def.)

Enables the Judgement.
Disables the Judgement.

Sets OK/NG judgement on the D4Sigma in the Beam Diameter
Setting range：0.0000～+20.0000(def.0.0000)
Beam*See “Judgement” in the Function Details

Diameter

EnabledDisabled(def.)

Enables the Judgement.
Disables the Judgement.

Sets the ellipticity OK/NG judgement for beam ellipticity.
Setting range: 0.0000 to 1.0000 (def. 0.0000)*See “Judgement” in the Function Details

Ellipticity

EnabledDisabled(def.)

Enables the Judgement.
Disables the Judgement.

Sets the Peak OK/NG judgement for the Power.
Setting range: 0.0 to 4095.0 (def. 4094.0)*See “Judgement” in the Function Details
Peak

EnabledDisabled(def.)

Enables the Judgement.
Disables the Judgement.

④ Log FileTo specify outputs where to save the measurement results(CSV).

73

Enabled
Image

Disabled(def.)

Outputs image data at the Profile View (.png) along with themeasurement results (.csv).
Outputs only measurement results (.csv).
Outputs Profile View raw image data (CSV)* with

Enabledmeasurement results (CSV) * Outputs luminance values per
pixel

Raw
Disabled(def.)

No output raw image data at the Profile View.

Sets the sectional view display location.
⑤ Cross Section

Origin Cursor

Displays a cross-sectional view of the center of thecoordinates.

Beam Cursor

Displays a cross-sectional view of the centroid of a beam

Sets averaging process (moving average) for measurement values.
⑥ Moving
Average

Setting range: 2 to 262,144 (def. = 2)
EnabledEnables the averaging process.

Disabled (def.)

Disables the averaging process.

Sets the Auto Aperture. *See "Aperture" in the Function Details⑦ Auto Aperture Enabled
Disabled (def.)

Enables the Auto Aperture setting.
Disables the Auto Aperture setting.

Sets the ROI. *See "Aperture" in the Function Details
EnabledEnables ROI setting

Disabled (def.)

Disables ROI setting

X
⑧ ROI
Y
Width
Height

Sets ROI X direction setting position.
Range: -3,000 to 3,000 (def. = -520)
Sets ROI Y direction setting position.
Range: -3,000 to 3,000 (def. = +520)
Sets ROI horizontal width.
Setting range: 0 to 3,000 (def. = 1040)
Sets ROI vertical width.
Setting range: 0 to 3,000 (def. = 1040)

Sets thresholds.
When enabled, it derives the measurement values using the pixels of the pixel
values higher than the set value.
⑨ Denoising

Setting range: 1 to 4,095 (def. = 100)
EnabledEnables denoising setting.

Disabled

Disables denoising setting.

74

Sets the calculation method for the Centroid position of a light beam.
⑩ BeamArea

Centroid
Intensity (def.)

Calculates the centroid position with the Area of Centroid
process.
Calculates the centroid position with the intensity weighing
process.

⑪ D4Sigma
Switches "Beam Divergence" measurement content and "Beam Ellipticity"
enabled/disabled.
Orientation
Enabled・ Displays D4 Sigma M (major) and D4 Sigma m (minor)
Enabledbeam divergence.
・ Enables Beam Ellipticity.

Disabled (def.)

・ Displays D4 Sigma X and D4 Sigma Y beam divergence.
・ Disables the Beam Ellipticity.

Sets the unit of distance for measurement values.
⑫ Length Unit

Millimeter(def.)

Unit of mm

Micrometer

Unit of μm⑬ Multi Spot *See “Multi Spot”in the Function Details
Sets the sorting type of the measurement results displayed when detecting
multiple beams.
Order

Spot Count

Area(def.)

Sorts by beam area from the largest size.

Centroid

Sorts by Centroid values closest to the center to outers.

Sets the number to be displayed on the measurement results screen when
detecting multiple beams. Setting range: 1 to 100 (def. = 1)
Sets the threshold value for the beam size (pixels) conditions of the beam to be

Min Spot Area

detected.
Setting range: 1 to 1023 (def. = 1)
Sets the Binning function (2x2) of the sensor camera.
When binning is "enabled", adjacent pixels are combined to increase thenoise sensitivity of the camera. It also improves the frame rate by reducing⑭ Binning

the image size by 1/4 and reducing the data volume.
EnabledEnables binning function.

Disabled (def.)

Disables binning function.

Sets "Adaptive Cal" button show and hide.
⑮ Adaptive Cal

EnabledShows the "Adaptive Cal" button.

Disabled (def.)

Hides the "Adaptive Cal" button.

75

Designates the number of decimal places when outputting measurement
results.
Setting range: 0 to 8 (def. = 8)
*Measurement results output indicates the results (.csv) output with the[Output Once] button and the output from communication controlled fromexternal devices.
Angle X
Angle Y
⑯ Decimal

Angle D

Points
D4Sigma
D4SigmaX(M)D4SigmaY(m)D86
Ellipticity

Sets the number of decimal places for Angle X
measurement results output.
Sets the number of decimal places for Angle Y
measurement results output.
Sets the number of decimal places for Angle D
measurement results output.
Sets the number of decimal places for D4Sigma
measurement results output.
Sets the number of decimal places for D4SigmaX(M)measurement results output.
Sets the number of decimal places for D4SigmaY(m)measurement results output.
Sets the number of decimal places for D86
measurement results output.
Sets the number of decimal places for ellipticity
measurement results output.

⑰ Display
Sets the maximum number of beam numbers to be displayed in the Angle view.
Spot Counter

The numbers are sorted according to "Order" of "Multi Spot".
Setting range: 00 to 100 (def.= 0)

76

3.5

Option List

This software can store multiple option lists and switching among them.
If you want to apply different option settings to different measurement objects or different measurement
wavelengths, you can switch option lists while the application is running.
This chapter explains how to switch, register, and delete multiple option lists.

3.5.1

Switching Option Lists

This section explains how to switch option lists.
1. From the "Options Select" pulldown menu, select the desired option list name.
2. Click the "Save" button.

77

3.5.2

Registering Option Lists

This section explains how to register option lists. Up to 31 option lists can be registered.
1. Click the [...] button.
2. Enter an arbitrary option name and click the [Add] button.

3. Click the [X] button.
4. Click the [Save] button.

5. The list is now registered in "Options Select" for selection. (*See "Switching Option Lists")78

3.5.3

Deleting Option Lists

This section explains how to delete option lists.
1. Select all but the option name to be deleted and click the [...] button.
2. Select the option name to be deleted and click the [Remove] button.

3. Click the [X] button.
4. Click the [Save] button.

794. Measuring
4.1.

Overview of Measurement Methods

4.1.1

Angle

4.1.1.1

Angle Measurement using the Reflection Angle Measurement

See "Tilt Angle/Beam Angle" at the reflection angle measurement in the Function Details
4.1.1.2

Angle Measurement Using the External light angle Measurement

See "Tilt Angle/Beam Angle" at the external light angle measurement in the Function Details
4.1.1.3

Beam Divergence Measurement

See "Beam Divergence" in the Function Details
4.1.1.4

Multi Spot Measurement

See "Multi Spot" in the Function Details

4.1.2

Profile4.1.2.1 Beam Diameter Measurement
See “Beam Diameter” in the Function Details80

5. Cntrolling from External Devices
The Products can send and receive data through command communication with external devices via serial
communication (or TCP/IP communication).

5.1

RS232C

There are two general patterns of RS232C connection. After connection, serial communication is used tosend and receive data through terminal software* which exchanges commands with OptGauge.
*The customer is asked to provide their own terminal software.

5.1.1

Communication Specifications

Item

Details

Synchronization method

Start-stop synchronization

Transmission code

UTF-8

Data type

8 bitsStop bit

1 bit

ParityNone

Flow control

None

Baud rate (bps)9600 / 19200 / 38400 / 57600 / 115200

81

5.1.2 The Connections Illustrated
Using external devices for communication1.

Set up two computers and connect with an RS232C cable.

2.

Connect this product to one of the computers, launch OptGauge, and start measurement.

3.

Prepare terminal software on the other computer.

4.

Set command communication and begin communication.

Using the same computer for communication
1.

Connect this product to one computer and then connect the RS232C cable to your own
computer.

2.

Launch OptGauge and start measurement.

3.

Prepare terminal software on the computer.

4.

Set command communication and begin communication.

82

5.1.3 Command communication setting method
Settings for OptGauge and terminal software to conduct command communication are indicated here.
OptGauge
1. Select the [Communication] tab in option settings.
2. Set "Communication Type - Interface" to "COM".
3. Set "Port"* and "Baud Rate" (arbitrary) in COM settings.
※ "Port" automatically displays the connected port candidates when RS232C is connected.

Terminal Software
The terminal software, to be provided by the customer, is to be set as below.
1.

Set the COM port which matches the "Port" setting in OptGauge2.

Set the same baud rate as the "Baud Rate" setting in OptGauge

3.

For settings other than the above, see the "Communication Specifications"

83

5.2

TCP/IP

Generally, there are three patterns of TCP/IP connection. After connection established, TCP/IP
communication is used to send and receive data through terminal software* which exchanges commands
with OptGauge.
*The customer is asked to provide their own terminal software.

5.2.1

Communication Specifications

Items

Details

ProtocolTCP

IPv4 address
Subnet mask
Default gateway

See "Command Communication Setting Method"

DNS server address
Port number

Private port (49152-65535) range

845.2.2 Connections Illustrated
Using External Devices for Communication: Ethernet
1. Set up two computers and connect them with an Ethernet cable.
2. Connect this product to one of the computers, launch OptGauge, and start measurement.
3. Prepare terminal software on the other computer.
4. Set command communication and begin communication.

Using External Devices for Communication: Wireless Router
1. Set up two computers and connect with a wireless router.
2. Connect this product to one of the computers, launch OptGauge, and start measurement.
3. Prepare terminal software on the other computer.
4. Set command communication and begin communication.

85

Using the Same Computer for Communication
1. Connect this product to one computer(there is nothing to connect, as the local host address is used).
2. Launch OptGauge and start measurement.
3. Prepare terminal software on the computer.
4. Set command communication and begin communication.

865.2.3 Command Communication Setting Method
Settings for a computer, OptGauge and terminal software to conduct command communication are
indicated here.

Using external devices for communication sing the Same Computer for Communication

Computer Setting
1. Click the [Start] button on the computer to which this product is connected and select [Settings]
from the start menu.

2. Click [Network and Internet] and select [Change adapter options].

87

3. Select Wi-Fi, if using a wireless router, or right-click Ethernet and select Properties, if using an
Ethernet cable.

Click Internet Protocol Version 4 (TCP/IPv4) and select [Properties].
4. Select [Use the following IP address:] and enter [IP address:] and [Subnet mask:].
Ex. IP address: 192.168.1.100
Subnet mask: 255.255.255.0
Default gateway: Not required.
5. Select [Use the following DNS server addresses:] (Not required).
6. Click [OK].
7. Follow steps 1 to 7 of this procedure for the other computer.
However, do as follows to make sure that in step 5 the IP address settings are not duplicated.
Ex. IP address: 192.168.1.101 (*change only the last number)
Subnet mask: 255.255.255.0

88

OptGauge
1. Select the [Communication] tab in option settings.
2. Set "Communication Type - Interface" to "TCP/IP".
3. Set "Port" (arbitrary) in TCP/IP settings.

Terminal Software
The terminal software, to be provided by the customer, is to be set as below.
・ Designate the IP address set on the computer to which this product is connected, in "Computer
settings - When using external devices for communication," as the connection destination
・ Set the TCP port which matches the "Port" setting in OptGauge.
*This is the minimum setting required for command communication using TCP/IP communication. For
network communication
The customer is asked to set as needed with consideration for applications such as security.

89

Using the Same Computer for Communication
OptGauge
1. Select the [Communication] tab in option settings.
2. Set "Communication Type - Interface" to "TCP/IP".
3. Set "Port" (arbitrary) in TCP/IP settings.

Terminal Software
The terminal software, to be provided by the customer, is to be set as below.
・ Local host address: Set 127.0.0.1
・ Set the TCP port which matches the "Port" setting in OptGauge.

90

5.3

Command List

5.3.1 Read Commands List
5.3.1.1 Common Commands<Common Read Commands>
CommandCommandCommandType

Parameter

Parameter1

RD

Command Details

VS

Read Version information

OL

Read Option List information

5.3.1.2 Angle<Read Commands>
CommandCommandCommandType

Parameter

Parameter1

Reads measurement results

AR

RD

AO

Command Details

EXT

Reads sensor camera exposure time

FRA

Reads sensor camera frame rate

ROT

Reads Rotation setting information

MHE

Reads Mirroring horizontal setting information

MVE

Reads Mirroring vertical setting information

MAV

Reads number of averaging times setting information

MAE

Reads averaging processing enabled setting information

CSP

Reads Cross Section Point setting information

OOX

Reads Origin Offset X value setting information

OOY

Reads Origin Offset Y value setting information

AAM

Reads Auto Aperture method setting information

AAE

Reads Auto Aperture enabled setting information

ROE

Reads ROI enabled setting information

RAX

Reads ROI X value setting information

RAY

Reads ROI Y value setting information

RAW

Reads ROI width setting information

RAH

Reads ROI height setting information

ANT

Reads Angle Type setting information

91

CommandCommandCommandType

Parameter

Parameter1
AJE
AJV

DJE

DJV

Reads Judgement Angle Judgement value setting
information
Reads Judgement Divergence enabled setting
information
Reads Judgement Divergence Judgement value setting
information
Reads Judgement Radius type setting information

EJE

Reads Judgement ellipticity enabled setting information

PJE
PJV

AO

Reads Judgement Angle enabled setting information

BRT

EJV

RD

Command Details

Reads Judgement ellipticity judgement value setting
information
Reads judgement peak enabled setting information
Reads judgement peak judgement value setting
information

CNM

Reads beam centroid setting information

ANU

Reads angle unit setting information

DNE

Reads denoising enabled setting information

DNT

Reads denoising threshold value setting information

DAX

Reads angle X decimal place setting information

DAY

Reads angle Y decimal place setting information

DAD

Reads angle D decimal place setting information

DDS

DDX

DDY

DD8
DEL
MSO

MSC

(Beam divergence)
Reads D4Sigma decimal place setting information(Beam divergence)
Reads D4Sigma X(M) decimal place setting information(Beam divergence)
Reads D4Sigma Y(m) decimal place setting information(Beam divergence)
Reads D86 decimal place setting information
Reads ellipticity decimal place setting information(Multi Spot)
Reads order setting information(Multi Spot)
Reads spot count setting information

92

CommandCommandCommandType

Parameter

Parameter1
MSM
ACE

DOE

RD

AO

Command Details(Multi Spot)
Reads minimum spot area setting information
Reads "Adaptive Cal" execute button display enabled
setting information(Multi Spot)
Reads spot count setting information

BIE

Reads binning enabled setting information

DSN

Reads display spot number setting information

5.3.1.3 Profile<Read Commands>
CommandCommandCommandType

Parameter

Parameter1

PR

RD

PO

Command Details
Reads measurement results

EXT

Reads exposure time of sensor camera

FRA

Read frame rate of sensor camera

ROT

Read Rotation information

MHE

Read Mirroring Horizontal setting

MVE

Read Mirroring Vertical setting

MAV

Reads number of averaging times setting information

MAE

Reads averaging processing enabled setting information

CSP

Reads Cross Section Point setting information

OOX

Reads Origin Offset X value setting information

OOY

Reads Origin Offset Y value setting information

AAM

Reads Auto Aperture method setting information

AAE

Reads Auto Aperture enabled setting information

ROE

Reads ROI enabled setting information

RAX

Reads ROI X value setting information

RAY

Reads ROI Y value setting information

RAW

Reads ROI width setting information

RAH

Reads ROI height setting information

CJE

Reads Auto Aperture method setting information

CJV

Reads Auto Aperture enabled setting information

93

CommandCommandCommandType

Parameter

Parameter1
JDE

Reads ROI enabled setting information

DJV

Reads ROI X value setting information

DJT

Reads ROI Y value setting information

EJV

Reads Judgement ellipticity enabled setting information

EJE
PJE
PJV

Reads Judgement ellipticity judgement value setting
information
Reads judgement Peak enabled setting information
Reads judgement Peak judgement value setting
information

CNM

Reads beam centroid setting information

LNU

Reads angle unit setting information

DNE

Reads denoising enabled setting information

DNT

Reads denoising threshold value setting information

DCX

Reads angle X decimal place setting information

DCY

Reads angle Y decimal place setting information

DCD

Reads angle D decimal place setting information

DDS
RD

Command Details

PO
DDX
DDY

DD8
DEL
MSO

MSC

MSM

ACE
DOE

(Beam divergence)
Reads D4Sigma decimal place setting information(Beam divergence)
Reads D4Sigma X(M) decimal place setting information(Beam divergence)
Reads D4Sigma Y(m) decimal place setting information(Beam divergence)
Reads D86 decimal place setting information
Reads ellipticity decimal place setting information(Multi Spot)
Reads order setting information(Multi Spot)
Reads spot count setting information(Multi Spot)
Reads minimum spot area setting information
Reads "Adaptive Cal" execute button display enabled
setting information
Reads Orientation Enabled setting information

94

CommandCommandCommandType

Parameter

Parameter1

Command Details

BIE

Reads Binning enabled setting information

DSN

Reads display spot number setting information955.3.2 List of Write Commands
5.3.2.1 Angle<Write Commands>
CommandCommandCommandType

Parameter

Parameter1

WR

AO

Command Details

EXT

Writes sensor camera exposure time

FRA

Writes sensor camera frame rate

ROT

Writes Rotation setting information

MHE

Writes mirroring horizontal setting information

MVE

Writes mirroring vertical setting information

MAV

Writes number of averaging times setting information

MAE

Writes averaging processing enabled setting information

CSP

Writes cross section point setting information

OOX

Writes Origin Offset X value setting information

OOY

Writes Origin Offset Y value setting information

AAM

Writes Auto Aperture method setting information

AAE

Writes Auto Aperture enabled setting information

ROE

Writes ROI enabled setting information

RAX

Writes ROI X value setting information

RAY

Writes ROI Y value setting information

RAW

Writes ROI width setting information

RAH

Writes ROI height setting information

ANT

Writes angle type setting information

AJE

Writes Judgement Angle enabled setting information

AJV

DJE

DJV

Writes Judgement Angle judgement value setting
information
Writes Judgement Divergence enabled setting
information
Writes Judgement Divergence judgement value setting
information

BRT

Writes Judgement Radius Type setting information

EJE

Writes Judgement Ellipticity enabled setting information

EJV

Writes Judgement Ellipticity judgement value setting
information

96

CommandCommandCommandType

Parameter

Parameter1

Command Details

PJE

Writes Judgement Peak enabled setting information

PJV

Writes Peak Judgement value setting information

CNM

Writes Beam Centroid setting information

ANU

Writes Angle Unit setting information

DNE

Writes Denoising enabled setting information

DNT

Writes Denoising threshold value setting information

DAX

Writes Angle X decimal place setting information

DAY

Writes Angle Y decimal place setting information

DAD

Writes Angle D decimal place setting information

DDS(Beam divergence)
Writes D4Sigma decimal place setting information

DDX(Beam divergence)
Writes D4Sigma X(M) decimal place setting information

DDY(Beam divergence)
Writes D4Sigma Y(m) decimal place setting information

WR

AO

DD8

(Beam divergence)
Writes D86 decimal place setting information

DEL

Writes ellipticity decimal place setting information

MSO(Multi Spot)
Writes Order setting information

MSC(Multi Spot)
Writes Spot Count setting information

MSM(Multi Spot)
Writes minimum spot area setting information

ACE

Writes "Adaptive Cal" execute button display enabled
setting information

DOE

Writes Orientation enabled setting information

BIE

Writes Binning enabled setting information

DSN

Writes Denoising threshold value setting information

975.3.2.2 Profile<Write Commands>
CommandCommandCommandType

Parameter

Parameter1

WR

PO

Command Details

EXT

Writes sensor camera Exposure Time

FRA

Writes sensor camera Frame Rate

ROT

Writes Rotation setting information

MHE

Writes Mirroring horizontal setting information

MVE

Writes Mirroring vertical setting information

MAV

Writes number of averaging times setting information

MAE

Writes averaging processing enabled setting information

CSP

Writes cross section point setting information

OOX

Writes Origin Offset X value setting information

OOY

Writes Origin Offset Y value setting information

AAM

Writes Auto Aperture method setting information

AAE

Writes Auto Aperture enabled setting information

ROE

Writes ROI enabled setting information

RAX

Writes ROI X value setting information

RAY

Writes ROI Y value setting information

RAW

Writes ROI width setting information

RAH

Writes ROI height setting information

CJE

Writes Judgement Centroid enable setting

CJV

Writes Judgement Centroid judgement value setting

DJE

Write Judgement Diameter enable setting

DJV

Write Judgement Diameter judgement value setting

BRT

Writes Judgement Radius Type setting

EJE

Writes Judgement Ellipticity enable setting

EJV

Writes Judgement Ellipticity judgment value setting

PJE

Writes Judgement Peak enable setting information

PJV

Writes Judgement Peak judgement value setting
information

CNM

Writes Beam Centroid setting information

LNU

Writes Length Unit setting information

98

CommandCommandCommandType

Parameter

Parameter1

Command Details

DNE

Writes Denoising enabled setting information

DNT

Writes Denoising threshold value setting information

DCX

Writes Centroid X decimal place setting information

DCY

Writes Centroid Y decimal place setting information

DCD

Writes Centroid D decimal place setting information

DDS(Beam Diameter)
Writes D4Sigma decimal place setting information

DDX(Beam Diameter)
Writes D4Sigma X(M) decimal place setting information

DDY(Beam Diameter)
Writes D4Sigma Y(m) decimal place setting information

DD8
WR(Beam Diameter)
Writes D86 decimal place setting information

PO
DEL

Writes Ellipticity decimal place setting information

MSO(Multi Spot)
Writes Order setting information

MSC(Multi Spot)
Writes Spot Count setting information

MSM(Multi Spot)
Writes minimum Spot Area setting information

ACE

Writes Adaptive Cal execution button display enabled
setting information

DOE

Writes Orientation enabled setting information

BIE

Writes Binning enabled setting information

DSN

Writes Display Spot number setting information

99

5.3.3 List of Execute Commands<Execute Commands>
CommandCommandCommandType

Parameter

Parameter1

EX

SV

5.4

Read Commands

Command Details
Executes Option save

5.4.1 Command Formats
5.4.1.1 Common Formats[Read version information]
External
Device*1: Major number*

2: Minor number*

3: Build number[Read option list information]

External
Device*1: Number of option lists*

2: Option name (includes as many option names as there are option lists, separated with commas)*

3: Index indicating selected options

100

5.4.1.2 Angle[Read measurement results]
External
Device*1: Tilt Angle/Beam Angle: Angle X measurement value*

2: Tilt Angle/Beam Angle: Angle Y measurement value*

3: Tilt Angle/Beam Angle: Angle D measurement value*

4: Beam Divergence: D4Sigma measurement value*

5: Beam Divergence: D4Sigma X(M) measurement value*

6: Beam Divergence: D4Sigma Y (m) measurement value*

7: Beam Divergence: D86 measurement value*

8: Beam Ellipticity measurement value*

9: Beam: Total count value*

10: Beam: Peak value*

11: Judgement: Tilt angle (D) judgement result (OK/NG)*

12: Judgement: Beam divergence judgement result (OK/NG)*

13: Judgement: Ellipticity judgement result (OK/NG)*

14: Judgement: Peak judgement result (OK/NG)*

15: Angle Unit (degree/DegMinSec/milliradian)[Read sensor camera exposure time]

External
Device*1: Exposure time (0.027 to 2000)[Read sensor camera frame rate]

External
Device*1: Frame rate (0.1 to 100)

101

[Read Rotation setting information]

External
Device*1: Rotation (“0” = OFF, “1” = Rotation right 90°, “2” = Rotation right 180°, “3” = Rotation right 270°)[Read Mirroring Horizontal setting information]

External
Device*1: Mirroring (“0” = OFF, “1” = Horizontal mirroring display)[Reads mirroring vertical setting information]
External
Device*1: Mirroring(“0” = OFF, “1” = Vertical mirroring display)[Read number of averaging times setting information]

External
Device*1: Number of averaging times (2 to 262,144)[Read averaging processing enabled setting information]
External
Device*1: Averaging processing (“0” = disabled, “1” = enabled)102

[Read Cross Section point setting information]
External
Device*1: Cross section point (“0” = origin cursor, “1” = beam cursor)[Read Origin Offset X value setting information]

External
Device*1: Origin Offset X (-20 to 20)[Read Origin Offset Y value setting information]

External
Device*1: Origin Offset Y (-20 to 20)[Read Auto Aperture method setting information]

External
Device*1: Auto Aperture method (“0” = area, “1” = luminance)[Read Auto Aperture enabled setting information]
External
Device*1: Auto Aperture (“0” = disabled, “1” = enabled)103

[Read ROI Enabled setting information]
External
Device*1: ROI (“0” = disabled, “1” = enabled)[Read ROI X value setting information]
External
Device*1: ROI X value (-3,000 to 3,000)[Read ROI Y value setting information]
External
Device*1: ROI Y value (-3,000 to 3,000)[Read ROI Width setting information]
External
Device*1: ROI width (0 to 3,000)[Read ROI Height setting information]
External
Device*1: ROI height (0 to 3,000)

104

[Read Angle Type setting information]

External
Device*1: Angle Type (“0” = Tilt Angle, “1” = Beam Angle)[Read Judgement Angle enabled setting information]

External
Device*1: Judgement Angle (“0” = disabled, “1” = enabled)[Read judgement value setting information at the Judgement Angle]
External
Device*1: Judgement Angle judgement value[Read judgement value setting information at the Judgement Angle]

External
Device*1: Judgement value (0 to 20) at the Judgement Angle[Read Judgement Divergence enabled setting information]
External
Device*1: Judgement Divergence (“0” = disabled, “1” = enabled)[Read judgement value setting information at the Judgement Divergence]

105External
Device*1: Judgement value (0.0000 to 1,000.0000) at Judgement Divergence106

[Read Judgement Radius Type setting information]
External
Device*1: Judgement Radius Type (“0” = D4Sigma, “1” = D86)

[Read Judgement Ellipticity enabled setting information]
External
Device*1: Judgement Ellipticity (“0” = disabled, “1” = enabled)[Read

Judgement

Ellipticity

judgementvalue

setting

information]

External
Device*1: Judgement Ellipticity judgement value (0.0000 to 1.0000)[Read Judgement Peak enabled setting information]
External
Device*1: Judgement Peak (“0” = disabled, “1” = enabled)[Read judgement value setting information at the Judgement Peak]
External
Device*1: Judgement Peak judgement value (0.0 to 4,095.0)

107

[Read Beam Centroid setting information]
External
Device*1: Beam Centroid (“0” = Area, “1” = Intensity)[Read Angle Unit setting information]

External
Device*1: Angle Unit (“0” = degree, “1” = DegMinSec, “2” = Milliradian)[Read Denoising enabled setting information]
External
Device*1: Denoising function (“0” = disabled, “1” = enabled)[Read Denoising threshold value setting information]
External
Device*1: Denoising threshold value (1 to 4,095)[Read Angle X decimal place setting information]
External
Device*1: Angle X decimal place (0 to 8)108

[Read Angle Y decimal place setting information]
External
Device*1: Angle Y decimal place (0 to 8)[Read Angle D decimal place setting information]
External
Device*1: Angle D decimal place (0 to 8)[(Beam Divergence) Read D4Sigma decimal place setting information]
External
Device*1: D4Sigma decimal place (0 to 8)[(Beam Divergence) Read D4Sigma X(M) decimal place setting information]
External
Device*1: D4Sigma X(M) decimal place (0 to 8)[(Beam Divergence) Read D4Sigma Y(m) decimal place setting information]
External
Device*1: D4Sigma Y(m) decimal place (0 to 8)

109

[(Beam Divergence) Read D86 decimal place setting information]
External
Device*1: D86 decimal place (0 to 8)[Read Ellipticity decimal place setting information]
External
Device*1: Ellipticity decimal place (0 to 8)[(Multi Spot) Read Order setting information]
External
Device*1: (Multi Spot) List sort type (“0” = area, “1” = angle)[(Multi Spot) Read Spot Count setting information]
External
Device*1: Spot count (1 to 100)[(Multi Spot) Read Minimum Spot Area setting information]
External
Device*1: Minimum spot area (1 to 1023)

110

[Read Adaptive Cal execute button display enabled setting information]
External
Device*1: Adaptive Cal execute button display (“0” = disabled, “1” = enabled)[Read orientation enabled setting information]
External
Device*1: Orientation enabled (“0” = disabled, “1” = enabled)[Read Binning enabled setting information]
External
Device*1: Binning setting (“0” = disabled, “1” = enabled)[Read Display Spot Number setting information]
External
Device*1: Display Spot Number (0 to 100)111

5.4.1.3 Profile[Read measurement results]

1：Beam Centroid：Centroid X measurement value※

2：Beam Centroid：Centroid Y measurement value※

3：Beam Centroid：Centroid D measurement value※

4：Beam Diameter：D4Sigma measurement value※

5：Beam Diameter：D4Sigma X(M) measurement value※

6：Beam Diameter：D4Sigma Y(m) measurement value※

7：Beam Diameter：D86 measurement value※

8：Beam Ellipticity measurement value※

9：Beam：Total Count value※

10：Beam：Peak value※

11：Judgement：Centroid(D)judgement result (OK/NG)※

12：Judgement：Diameter judgement result (OK/NG)※*

13: Judgement: Ellipticity judgement result (OK/NG)*

14: Judgement: Peak judgement result (OK/NG)*

15：distance unit(Millimeter / Micrometer )[Read sensor camera Exposure Time]

External
Device*1: Exposure Time (0.027 to 2000)[Read sensor camera Frame Rate]
External
Device*1: Frame Rate (0.1 to 100)112

[Read Rotation setting information]

External
Device*1: Rotation (“0” = OFF, “1” = Rotation right 90°, “2” = Rotation right 180°, “3” = Rotation right 270°)[Read Mirroring Horizontal setting information]

External
Device*1: Mirroring (“0” = OFF, “1” = Horizontal Mirroring display)[Reads Mirroring Vertical setting information]

External
Device*1: Mirroring(“0” = OFF, “1” = Vertical Mirroring)[Read number of Averaging Times setting information]

External
Device*1: Number of Averaging Times (2 to 262,144)[Read Averaging Processing enabled setting information]

External
Device*1: Averaging Processing (“0” = disabled, “1” = enabled)113

[Read Cross Section Point setting information]

External
Device*1: Cross Section Point (“0” = Origin Cursor, “1” = Beam Cursor)[Read OriginOffset X value setting information]

External
Device1：OriginOffset X (-20 to +20)※

[Read OriginOffset Y value setting information]

External
Device1：OriginOffset Y (-20 to +20)※

[Read Auto Aperture method setting information]

External
Device1：Auto Aperture Method (“0”= Area、“1”= Luminance)※[Read Auto Aperture enabled setting information]

External
Device1：Auto Aperture (“0”=Disabled、“1”= Enabled)※114

[Read ROI enabled setting information]

External
Device*1: ROI (“0” = disabled, “1” = enabled)[Read ROI X value setting information]

External
Device*1: ROI X value (-3,000 to +3,000)[Read ROI Y value setting information]

External
Device*1: ROI Y value (-3,000 to +3,000)[Read ROI Width setting information]

External
Device*1: ROI Width (0 to +3,000)[Read ROI Height setting information]

External
Device*1: ROI height (0 to +3,000)

115

[Read Judgement Centroid enabled setting information ]External
Device1：Judgement Centroid (“0” = disabled, “1” = enabled)※[Read Judgement Centroid judgement value setting information]
External
Device*1: Judgement Centroid judgement value (0 to +20)

[Read Judgement Diameter enabled setting information]

External
Device1：Judgement Diameter (“0” = disabled, “1” = enabled)※[Read Judgement Diameter judgement value setting information]
External
Device1：Judgement Diameter judgement value (0 to +20)※116

[Read Judgement Diameter Type setting information]

External
Device1：Judgement Diameter Type (“0” = D4Sigma、“1”= D86)※

< Judgement Ellipticity enable setting information]

External
Device1：Judgement Ellipticity (“0” = disable、“1” = enable)※[ Read Judgement Ellipticity judgement value setting information]

External
Device1：Judgement Ellipticity judgement value (0.0000～1.0000)※[ Read Judgement Peak enable setting information]

External
Device1：Judgement Peak (“0”= disable、“1”= enable)※[ Read Judgement Peak judgement value setting information]

External
Device1：Judgement Peak judgement value (0.0～4,095.0)※

117

[ Read Beam Centroid setting information ]External
Device1：Beam Centroid (“0”= Area、“1”= Intensity)※[ Read Length Unit setting information ]External
Device1：Distance Unit (“0”= Millimeter、“1”= Micrometer)※[ Read Denoising enable setting information ]External
Device1：Denoising function (“0”= disable, “1”= enable)※[ Read Denoising setting information ]External
Device1：Denoising threshold (1～4,095)※[ Read Centroid X decimal place setting information ]External
Device1：Centroid X decimal place (0～8)※

118[ Centroid Y decimal place setting information ]External
Device*1：Centroid Y decimal place (0～8)[ Read Centroid D decimal place setting information ]External
Device*1：Centroid D decimal place (0～8)[ Read (Beam Diameter) D4Sigma decimal place setting information ]External
Device*1：D4Sigma decimal place (0～8)[ Read (Beam Diameter) D4Sigma X(M) decimal place setting information ]External
Device*1：D4Sigma X(M) decimal place (0～8)[ Read (Beam Diameter) D4Sigma Y(m) decimal place setting information ]External
Device*1：D4Sigma Y(m) decimal place (0～8)

119[ Read (Beam Diameter) D86 decimal place setting information ]External
Device*1：D86 decimal place (0 to 8)[ Read Ellipticity decimal place setting information ]External
Device*1：Ellipticity decimal place (0 to 8)[ Read (Multi Spot) Order setting information]

External
Device*1：(Multi Spot) List Sort type (“0”= Area、“1”= Centroid)[ Read (Multi Spot) Spot Count setting information ]External
Device*1：Spot Count (1 to 100)

[ Read (Multi Spot) Min Spot Area setting information ]External
Device*1：Min Spot Area (1 to 1023)

120

[ Read Adaptive Cal execution button display enabled setting information]

External
Device*1: Adaptive Cal execute button display (“0” = disabled, “1” = enabled)[ Read Orientation Enabled setting information ]External
Device*1: Orientation Enabled (“0” = disabled, “1” = enabled)[ Read Binning enabled setting information ]External
Device*1: Binning setting (“0” = disabled, “1” = enabled)[ Read Display Spot Number setting information]

External
Device*1: Display Spot Number (0 to 100)

121

5.5

Write Commands

5.5.1 Command Formats
5.5.1.1 Angle[ Write sensor camera Exposure Time ]External
Device*1: Exposure time (0.027 to 2000)[ Write sensor camera Frame Rate ]External
Device*1: Frame Rate (0.1 to 100)

[ Write Rotation setting information ]External
Device*1: Rotation (“0” = OFF, “1” = Rotation right 90°, “2” = Rotation right 180°, “3” = Rotation right 270°)[ Write mirroring horizontal setting information ]External
Device*1: Mirroring (“0” = OFF, “1” = Horizontal Mirroring)122

[ Write Mirroring Vertical setting information ]External
Device1: Mirroring (“0” = OFF, “1” = vertical mirroring)[ Write number of Averaging Times setting information ]External
Device*1: Number of Averaging Times (2 to 262,144)[ Write Averaging Processing enabled setting information ]External
Device*1: Averaging Processing (“0” = disabled, “1” = enabled)[ Write Cross Section Point setting information ]External
Device*1: Cross Section Point (“0” = Origin Cursor, “1” = Beam Cursor)[ Write OriginOffset X value setting information ]External
Device*1: OriginOffset X (-20 to +20)123

[ Write OriginOffset Y value setting information]
External
Device*1: OriginOffset Y (-20 to +20)

[ Write Auto Aperture method setting information]

External
Device*1: Beam Centroid (“0” = area, “1” = luminance)[ Write Auto Aperture enabled setting information]

External
Device*1: Auto Aperture (“0” = disabled, “1” = enabled)[ Write ROI enabled setting information ]External
Device*1: ROI (“0” = disabled, “1” = enabled)[ Write ROI X value setting information ]External
Device*1: ROI X value (-3,000 to +3,000)[ Write OriginOffset Y value setting information]

124

External
Device*1: OriginOffset Y (-20 to 20)[ Write Auto Aperture method setting information]

External
Device*1: Beam Centroid (“0” = area, “1” = luminance)[ Write Auto Aperture enabled setting information]

External
Device*1: Auto Aperture (“0” = disabled, “1” = enabled)[ Write ROI enabled setting information ]External
Device*1: ROI (“0” = disabled, “1” = enabled)[ Write ROI X value setting information ]External
Device*1: ROI X value (-3,000 to +3,000)

125

[ Write ROI Y value setting information ]External
Device*1: ROI Y value (-3,000 to +3,000)[ Write ROI Width setting information ]External
Device*1: ROI width (0 to 3,000)[ Write ROI Height setting information ]External
Device[ Write Angle Type setting information ]External
Device*1: Angle Type (“0” = tilt angle, “1” = beam angle)[ Write Judgement Angle enabled setting information ]External
Device*1: Judgement Angle (“0” = disabled, “1” = enabled)126

[ Write judgement value setting information at Judgement Angle ]External
Device*1: Judgement Angle judgement value (0 to 20)[ Write Judgement Divergence enabled setting information ]External
Device*1: Judgement Divergence (“0” = disabled, “1” = enabled)[ Write judgement value setting information at Judgement Divergence ]External
Device*1: judgement value (0.0000 to 1,000.0000) at Judgement Divergence[ Write Judgement RadiusType setting information ]External
Device*1: Judgement Radiustype (“0” = D4Sigma, “1” = D86)

[ Write Judgement Ellipticity enabled setting information ]External
Device*1: Judgement Ellipticity (“0” = disabled, “1” = enabled)127

[ Write judgement value setting information at Judgement Ellipticity ]External
Device*1: Judgement Ellipticity judgement value (0.0000 to 1.0000)[ Write Judgement Peak enabled setting information ]External
Device*1: Judgement Peak (“0” = disabled, “1” = enabled)[ Write judgement value setting information at Judgement Peak]

External
Device*1: Judgement Peak judgement value (0.0 to 4,095.0)[ Write Beam Centroid setting information ]External
Device*1: Beam Centroid (“0” = area, “1” = Intensity)[ Write Angle Unit setting information ]External
Device*1: Angle Unit (“0” = degree, “1” = DegMinSec, “2” = milliradian)128

[ Write Denoising enabled setting information ]External
Device*1: Denoising function (“0” = disabled, “1” = enabled)[ Write Denoising threshold value setting information ]External
Device*1: Denoising threshold value (1 to 4,095)[ Write Angle X decimal place setting information ]External
Device*1: Angle X decimal place (0 to 8)[ Write Angle Y decimal place setting information ]External
Device*1: Angle Y decimal place (0 to 8)[ Write Angle D decimal place setting information ]External
Device*1: Angle D decimal place (0 to 8)

129

[ (Beam divergence) Write D4Sigma decimal place setting information ]External
Device*1: D4Sigma decimal place (0 to 8)[ (Beam divergence) Write D4Sigma X(M) decimal place setting information ]External
Device*1: D4Sigma X(M) decimal place (0 to 8)[ (Beam divergence) Write D4Sigma Y(m) decimal place setting information ]External
Device*1: D4Sigma Y(m) decimal place (0 to 8)[ (Beam divergence) Write D86 decimal place setting information ]External
Device*1: D86 decimal place (0 to 8)[ Write Ellipticity decimal place setting information ]External
Device*1: Ellipticity decimal place (0 to 8)130

[ (Multi Spot) Write Order setting information ]External
Device*1: (Multi Spot) list sort type (“0” = Area, “1” = Angle)[ (Multi Spot) Write Spot Count setting information ]External
Device*1: Spot Count (1 to 100)

[ (Multi Spot) Write Minimum Spot Area setting information ]External
Device*1: Minimum Spot Area (1 to 1023)[ Write Adaptive Cal execute button display enabled setting information ]External
Device*1: Adaptive Cal execution button display (“0” = disabled, “1” = enabled)[ Write Orientation Enabled setting information ]External
Device*1: Orientation Enabled (“0” = disabled, “1” = enabled)131

[ Write Binning enabled setting information ]External
Device*1: Binning setting (“0” = disabled, “1” = enabled)[ Write Display Spot Number setting information ]External
Device*1: Display Spot Number setting value (0 to 100)132

5.5.1.2 Profile[ Write sensor camera Exposure Time ]External
Device*1: Exposure time (0.027 to 2000)[ Write sensor camera Frame Rate ]External
Device*1: Frame Rate (0.1 to 100)

[ Write Rotation setting information ]External
Device*1: Rotation (“0” = OFF, “1” = Rotation right 90°, “2” = Rotation right 180°, “3” = Rotation right 270°)[ Write Mirroring Horizontal setting information ]External
Device*1: Mirroring (“0” = OFF, “1” = horizontal mirroring)[ Write Mirroring Vertical setting information ]External
Device*1: Mirroring (“0” = OFF, “1” = vertical mirroring)133

[ Write number of Averaging Times setting information ]External
Device1: Number of Averaging Times (2 to 262,144)[ Write Averaging Processing enabled setting information ]External
Device*1: Averaging Processing (“0” = disabled, “1” = enabled)[ Write Cross Section Point setting information ]External
Device*1: Cross Section Point (“0” = Origin Cursor, “1” = Beam Cursor)[ Write OriginOffset X value setting information ]External
Device*1：OriginOffset X (-20 to +20)

[ Write OriginOffset Y value setting information]

External
Device1：OriginOffset Y (-20 to +20)※134

[ Write Auto Aperture Method setting information]

External
Device*1: Auto Aperture Method (“0” = area, “1” = luminance)[ Write Auto Aperture enabled setting information]

External
Device*1: Auto Aperture (“0” = disabled, “1” = enabled)[ Write ROI enabled setting information ]External
Device*1: ROI (“0” = disabled, “1” = enabled)[ Write ROI X value setting information ]External
Device*1: ROI X value (-3,000 to +3,000)[ Write ROI Y value setting information ]External
Device*

1：ROI Y value (-3,000 to +3,000)

135

[ Write ROI Width setting information ]External
Device*1: ROI Width (0 to 3,000)[ Write ROI Height setting information ]External
Device*1：ROI Height (0 to 3,000)< Judgement Centroid enabled setting information ]External
Device*1：Judgement Centroid (“0” = disabled, “1” = enabled)< judgement value information at Judgement Centroid >External
Device*1：judgement value (0 to 20) at Judgement Centroid< Judgement Diameter enabled setting information >External
Device*1：Judgement Diameter (“0” = disabled, “1” = enabled)136

[Write judgement value setting information at Judgement Diameter ]External
Device*1：Judgement Diameter judgement value (0 to 20)[Write Judgement Diameter Type setting information ]External
Device*1：Judgement Diameter Type (“0”= D4Sigma、“1”= D86)

[Write Judgement Ellipticity enable setting information ]External
Device*1：Judgement Ellipticity (“0” = disabled, “1” = enabled)[Write judgement value setting information at Judgement Ellipticity ]External
Device*1：

judgement value (0.0000 to 1.0000) at Judgement Ellipticity[Write Judgement Peak enable setting information ]External
Device*1：Judgement Peak (“0” = disabled, “1” = enabled)137

[ Write judgement value setting information at Judgement Peak ]External
Device*1：Judgement Peak judgement value (0.0 to 4,095.0)[ Write Beam Centroid setting information ]External
Device*1：Beam Centroid (“0”= Area、“1”= Intensity)[ Write Length Unit setting information ]External
Device*1：Length Unit(“0”= Millimeter、“1”= Micrometer)[ Write Denoising enabled setting information ]External
Device*1：Denoising function (“0” = disabled, “1” = enabled)[ Write Denoising Threshold setting information ]External
Device*1：Denoising Threshold (1 to 4,095)138

[ Write Centroid X decimal place setting information ]External
Device*1：Centroid X decimal place (0 to 8)[ Write Centroid Y decimal place setting information ]External
Device*1：Centroid Y decimal place (0 to 8)[ Write Centroid D decimal place setting information ]External
Device*1：Centroid D decimal place (0 to 8)[ Write (Beam Diameter) D4Sigma decimal place setting information ]External
Device*1：D4Sigma 小数点以下桁数(0 to 8)[ Write (Beam Diameter) D4Sigma X(M) decimal place setting information ]External
Device*1：D4Sigma X(M) decimal place (0 to 8)

139

[ Write (Beam Diameter) D4Sigma Y(m) decimal place setting information ]External
Device*1：D4Sigma Y(m) decimal place (0 to 8)[ Write (Beam Diameter) D86 decimal place setting information ]External
Device*1：D86 decimal place (0 to 8)[ Write Ellipticity decimal place setting information ]External
Device*1：Ellipticity decimal place (0 to 8)[ Write (Multi Spot)Order decimal place setting information ]External
Device*1：(Multi Spot) List sort type (“0”= Area、“1”= Centroid)[ Write (Multi Spot)Spot Count decimal place setting information ]External
Device*1：Spot Count (1 to 100)140

[ (Multi Spot) Write Minimum Spot Area setting information ]External
Device*1: Minimum Spot Area (1 to 1023)[ Write Adaptive Cal execution button display enabled setting information ]External
Device*1: Adaptive Cal execution button display (“0” = disabled, “1” = enabled)[ Write Orientation Enabled setting information ]External
Device*1: Orientation Enabled (“0” = disabled, “1” = enabled)[ Write Binning enabled setting information ]External
Device*1: Binning setting (“0” = disabled, “1” = enabled)[ Write Display Spot Number setting information ]External
Device※*1: Display Spot Number setting value (0 to 100)

141

5.6

Execution Commands

5.6.1 Command Formats[ Save Option ]External
Device5.7 Communication Eror
When a command cannot be normally received or executed, the Products will return error information in
the following format.

External
Device
The error codes below appear in *1.
"2": Setting data error.
- Value outside setting range was set.
"3": Command format error- Number of commas from header to [CRLF] does not match.
- Command not in command list, or non-alphanumeric characters.
- Text after header includes characters not in list above.
"5": Condition error- Value outside setting range was set.

142

6. System Log
6.1

System Log List

System Log

Details

Angle view initialize succeeded

Angle view initialization was successful.
Measurements start normally.

Profile view initialize succeeded

Profile view initialization was successful. Measurements
start normally.

Angle view initialize failed. Please check

Angle view initialization failed.

the connection with SurugaOptGauge

Check the sensor head and computer connection.

Profile view initialize failed. Please check

Profile view initialization failed.

the connection with SurugaOptGauge

Check the sensor head and computer connection.

Angle result output succeeded

Angle measurement results output with [Output Once]button was successful.

Profile result output succeeded

Profile measurement results output with [Output Once]button was successful.

Angle result output failed

Angle measurement results output with [Output Once]button was failed.

Profile result output failed

Profile measurement results output with [Output Once]button was failed.

Adaptive Cal succeeded

Adaptive calibration with [Adaptive Cal] button was
successful.

Adaptive Cal failed

Adaptive calibration with [Adaptive Cal] button was failed.

It is necessary to block the light

Adaptive Cal failure: Block the light.

143

6.2

Error Messages and Countermeasures

Error Message

Cause

Countermeasure

Angle view initializing failed.

Sensor head and computer

Check that sensor head and computer

Please check the connection

are not connected.

are connected and restart OptGauge.

with SurugaOptGauge.
Profile view initializing failed.

If this error is repeatedly generated,

Please check the connection

the sensor head interior camera may

with SurugaOptGauge.

not be working properly.
Contact the Suruga Seiki Optical
Device Business Division Sales
Section.

Angle result output failed.

Profile result output failed.

Measurement results output

If the measurement results output file

file (.csv) is open.

(.csv) is open, close it and output

Output destination file path ormeasurement results.

file cannot be found.

Check that the output destination file
path or file exists.

Adaptive calibration failed.

Because the light is not

Check that the beam is not incoming to

It is necessary to block theblocked, the Adaptive Cal

the sensor head.

light.

cannot be executed.
Also, make sure before measurementthat there is no unwanted exterior lightor other laser light source interferingwith the sensor.

144

7. Specifications for H650 Series Sensor Head and Accessories
7.1 Sensor Head Specifications
Item
Measurable
External Light
SourceInternal Light
SourceAngle
Measurement

Divergence

Location
Measurement
Beam Diameter
Measurement
Working Distance
Frame Rate

Environment
Conditions

WeightSpecifications
Wavelength

VIS: 400 to 700 nm

Mix. Diameter

6 mmLight Intensity

0.05 to 1.0 mW

Wavelength

660 nmDiameterΦ3 mmEmission
Intensity
Emission
Position

NIR: 700 to 1000 nm

1 mW or less（Class2）
16 mm×25 mm（Distance from the reference plane）（See ”H650 Series External Dimensions”）

Range*1±1.5°(circular range）

Linearity*2±0.45% of F.S.（F.S.=3.0°）

Repeatability*3

1 s (6σ)Range

20 mrad or lessLinearity

5% of F.S.（F.S.=20 mrad）

Viewing RangeΦ6 mm

Repeatability

1μm（6σ）

Linearity±0.5% of F.S.（F.S.=3 mm）

Actual Spot
Size*4

Φ0.06 mm toΦ6mm
200 mm ±4 mm
8～10 Hz （@ recommended PC spec.）

OperatingCondition*5
Storing
Condition
Vibration
Resistance

0 to +40℃、35 to 85% RH-10 to +60 ℃
Frequency range: 10 Hz to 500 Hz
Max. acceleration: 2 G in X,Y,Z 3 directions @10 sweeps
1.0 kg*1 When measuring with Φ3 mm external laser beam
*2 When measuring with wavelength at 660±10 nm*3 When measuring with number of averaging of 256 times*4 With Auto Aperture, we recommend that measuring SPOT diameter at 1/2 or less of the field of view
*5 Factory Inspection Environment: 22 to 24 °C, 35 to 85% RH

145

7.2 AC/DC Converter Electrical Specifications
AC / DC Converter Specifications Overview
Rated Input (AC)AC100～240 V

Rated Output (DC)12 V/3.0 A

Acquired Industrial Standards

PSE, BSMI, cUL, FCC, KC, CE, GS, RCM, CCC

Protective Functions

short-circuit protection, overcurrent protection,
overvoltage protection

RoHS

RoHS10AC Side Plug Shape

Type-A

Product Dimensions (mm)

99mm x 50mm x 33mm

DC Cable Length

1.5 m ±30 ㎜

DC Plug Polarity

Center Positive

7.3 Sensor Head and Cable Electrical Specifications
Sensor Head and Cable Specifications Overview
Rated Input (power consumption)
Cable TypeDC12 V / 3 A (5 W or below)
USB cable compliant with USB3.0 (5Gbps)
standard

Connector

USB3.0 Type A

Cable Length

3.0 m

146

8. Failures? Frequently Asked Questions
Symptoms and Countermeasures
Below is information useful for troubleshooting.
Check whether the issue at hand is listed below.
Symptom

Cause

Internal light

AC adapter or power cablesource power is

is not correctly connected.

not turn on.

12VDC is not supplied.
USB cable is not correctly

Countermeasure
12VDC is not supplied.
Correctly connect the 12VDC power source.
Connect the USB cable to the USB3.0 port.

Application does

connected.

not start up.

Device authentication file is not

Read the device authentication file (.suruga)

being read.

corresponding to the purchased sensor head.

Application stops
during startup.
Beam is not
displayed onscreen.

USB cable disconnected.
Exposure Time is too short.
Large tilt on the target.

communication is
not working.

TCP/IP
communication is
not working.

Adjust exposure time to the optimal speed.
reflectance light enters within ±1.35° of thevisual angle.

Noise is causing serious effects

unstable.
RS232C

correctly, and restart the application.

Adjust the measurement target tilt so that the

Measurementtarget centroid is

Close the application, connect the USB cable

RS232C cable is not correctly
connected

Enable denoising setting threshold and adjust
threshold value.

Correctly connect RS232C cable.

Computer communication

Set the computer communication settings

conditions are not set correctly.

correctly.

Ethernet cable is not correctly
connected.

Correctly connect Ethernet cable.

Computer communication

Set the computer communication settings

conditions are not set correctly.

correctly.

147

9. Warranty - After-Sales Service
9.1 Warranty Terms, Conditions and Coverage・Before contacting us, please confirm the serial number of the individual product.

・The warranty period is one year after delivery.

・However, the following cases are not covered by the warranty and will be repaired for a fee.
-

Failure or damage caused by misuse, modification or repair by someone other than the company’s designated persons from us.

-

Failure or damage caused by improper handling, such as dropping the Products duringtransportation or moving.

-

Failure or damage caused by fire, salt damage, gas damage, abnormal voltage, earthquake,lightning, wind, flood, or other natural disasters-

In the event of a malfunction or damage caused by improper handling contrary to the methods
and precautions described in the instruction manual.

We reserve the right to revise, modify, or amend these Warranty Terms and Conditions (hereinafterreferred to as "Revisions, etc."), and in the event of such revisions, etc., we shall promptly post the revised
Warranty Terms and Conditions in this catalog or on our website (http://jpn.surugaseiki.com/). If you
place an order for the Products after such revision, you shall be deemed to have accepted the revision.

9.2 After-Sales Service
Before requesting repair, please check "8. Please check the items in "8. Frequently Asked Questions".If you
have any questions, please contact our Optical Instruments Division Sales Department.
<During the Warranty Period>
When damage occurs under a normal use state following the cautions/warnings/notes written in thismanual, a repair is done for free. For any damages out of warranty period mentioned above, a fee is required
for such repair.
<After the Warranty Period>
A repair service is available with a fee to maintain the functionaries of the Products up on your requests.

SURUGA SEIKI CO., LTD.
HEAD OFFICE
505, Nanatsushinya, Shimizu-ku, Shizuoka City, Shizuoka 424-8566, Japan
Tel : +81-54-344-0332 Fax : +81-54-346-1196
URL<https://eng.surugaseki.com/>148