CombiLine™
Proven solutions for Roots pumping stations
More advice. More competence. More than just vacuum.

CombiLine™

Proven solutions for Roots pumping stations
More advice. More competence. More than just vacuum.

CoatingFreeze drying

Space simulation

Steel degassing
2

Transformer drying

Insulating vacuum

Lithium ion batteries

Customized solutions
for your application

In many applications, pumping station combinations that arespecially tailored to the process are used. Pfeiffer Vacuum
offers an extensive range of vacuum pumping stations tosatisfy these diverse requirements. This consists of various
pump combinations and is supplemented by suitablecomponents, valves and gauges. If our standard solutions do
not fit your application, we will configure together with you anappropriate solution from our extensive product portfolio.
Pfeiffer Vacuum offers a broad range of Roots pumping
stations that feature different backing pumps, gradations andaccessories. Roots pumping stations are used in low andmedium vacuum applications and offer a reliable solution withhigh pumping speeds in the transition range from atmosphereto 10-3 mbar. The right combination of the various vacuum
pumps offers a perfect solution for your applications inproduction and research.

Pfeiffer Vacuum –Your ideal partner!

■■
■
■
■
■
■
■

■

50 years of experience in building pumping stations
High level of competence
Innovative, absolutely reliable productsHigh level of technology
Pressure range from atmospheric pressure to high vacuum
Standard pumping stations and customized solutions
Support in designing your vacuum system
Magnetically coupled pumping stations also available –hermetically tight and maintenance-freePumps are also available for processes in potentiallyexplosive environments, or for evacuating explosive gases

3CombiLine™

Proven solutions for Roots pumping stations
More advice. More competence. More than just vacuum.
What is a pumping station?

Pumping stations are combinations of individual pumps.
They can include the following major components:
■
■
■
■
■
■
■
■
■
■
■
■

Roots pumps
Rotary vane pumps
Turbopumps
Dry pumps
Liquid ring pumps
Cryopumps
Diffusion pumps
GaugesAnalytical equipment
Tube lines
Valve technology
Pumping station control systems (including PLC versions
with visualization)

In addition to these components, we also offer acomprehensive portfolio of accessories to equip your specificCombiLine pumping station.
Real added value for you!

Customer benefits

We provide you with individual support, we train you andprovide on-site service worldwide.

■

■
■

■

■

4

Complete line of pumps offers flexibility and maximum
process capability
Fast evacuation due to high compression ratio
Low operating costs thanks to optional magnetic couplingor integrated efficient motor technology
Process adaptation and energy savings possible thanks tofrequency converter operation
System integration very easy due to compact series andsmart interfaces

Typical applications

■■■
■
■
■
■
■
■
■
■

Electron beam welding
Space simulation
Freeze drying
Insulation vacuum
Leak detection systems
Coating (load/load-lock chambers)
Vacuum furnaces
Steel degassing
Distillation
Oil purification
Drying applications such as transformer drying
or lithium-ion batteries

5CombiLine™

Roots pumps
Roots pumps of the HiLobe and OktaLine series can be tailoredwith different pumping speeds and versions to perfectly meetcustomers’ requirements. These pumps require a backing pumpthat is suitable for the application and is adjusted to the gasflow.
The gear box and bearings of Roots pumps are separated fromthe gas pumping chamber. The frictionless pumping action of
the pistons means that dry operation is assured. These pumps
are therefore ideally suited for low and medium vacuum
applications. They are frequently used in chemical and processengineering, the coating and semiconductor industries as well as
in research and development.
HiLobe –the compact powerhouse

The modern and very powerful HiLobe pumps meet energy
efficiency class IE4, and their latest interface technology enables
seamless plug & play integration with the control system. Smallsizes and a variety of vertical and horizontal installation positions
also facilitate their integration into existing systems. Theirintelligent drive concept and condition monitoring contribute tomaking HiLobe pumps extremely low-maintenance. Highmachine availability is assured due to long service intervals andeasy maintenance through our global on-site service.

With its powerful drive, the HiLobe can reach a very highdifferential pressure for a short time. This makes it particularly
suitable for load lock applications, such as in PVD coating
systems and leak detection. These are processes that require
extremely short cycle times.

HiLobe 1302 – the compact powerhouse
6HiLobe 2104 – the compact powerhouse

OktaLine ATEX – the explosion-proof pump

OktaLine – the proven allrounder
OktaLine –the proven allrounder

The Roots pumps of our established OktaLine series areavailable in very large pumping speed ranges and characterizedby high compression in the end vacuum. Due to many years ofexperience with our allrounder, we can offer a wide diversity ofmodel variants and a full range of accessories that enable us toconfigure pumps for your individual process.
Thanks to the proven convection cooling system, cost-intensive
water cooling is no longer necessary. They can optionally beequipped with a frequency converter package for even higher
pumping speeds. The integrated overflow valve and optional
magnetic coupling guarantee enhanced process reliability.

OktaLine ATEX –the explosion-proof pump

For evacuating explosive gases or for processes in explosive
environments, we have developed the OktaLine ATEX, which isbased on the proven concept of the standard OktaLine Rootspumps. Due to extensive testing and the standardized magnetic
coupling, the series is able to meet the stringent explosion
protection requirements.

OktaLine G –for high differentialpressures

OktaLine G gas circulation-cooled Roots pumps offer additional
flexibility. These pumps are ideal for compressing against
atmospheric pressure in applications with high pressure
differences and maximum gas throughput. Thanks to their
special cooling system, these Roots pumps can also be operated
without a backing pump.

OktaLine G – for high differential pressures
7CombiLine™

Backing pumps
Rotary vane pumps

Pfeiffer Vacuum rotary vane pumps have been the most popular
pumps for generating low and medium vacuum for many years now.
They are very durable and robust. Rotary vane pumps belong to thefamily of displacement pumps and convey a virtually steady lowpulsation volume flow, irrespective of the type of gas used. They
work on the principle of an eccentrically supported rotor revolving ina housing and have two or more movable gate valves. Every Pfeiffer
Vacuum rotary vane pump is oil-lubricated. Special operating fluids
are responsible for insulating and lubricating components, resulting
in very low final pressures. The oil lubrication also ensures anextremely long lifetime, even in continuous operation.

HenaLine –single-stage rotary vanepumps

The single-stage rotary vane pumps in the HenaLine have long beensome of the most widely used products for processes in the low andmedium vacuum range. Their long life and pumping speed,irrespective of the gas used, are outstanding properties of thesepumps. With its pumping speeds from 25 to 1,920 m³/h, theHenaLine range covers virtually all applications in industry andcoating technology.

UnoLine Plus –especially forindustrial applications

The UnoLine Plus can be optimally employed for industrial
applications. This rotary vane pump has proven itself for years as abacking pump for Roots pumps. This pump is water cooled andextremely insensitive to dust and dirt. It is equipped with an oil
regeneration system. Condensates, contaminants and dust particles
can be separated from the operating fluid, collected in the vapor
separator and drained. The adjustable cooling water controller
enables the UnoLine Plus pump to maintain the required operating
temperature. These pumps are equipped with gas ballast in order topump down vapors.

HenaLine – single-stage rotary vane pumps
8UnoLine Plus – especially for industrial applications

DuoLine – two-stage rotary vane pumps
DuoLine –two-stage rotary vanepumps

HeptaDry – the dry alternative

Two-stage rotary vane pumps can be operated in the pressure
range between 100 hPa and 3·10-2mbar. Pumps belonging to theDuoLine series cover a pumping speed range of 1.3 to 250 m³/h.
Their long lifetime and pumping speed, irrespective of the gas
used, are the outstanding properties of these pumps. They areavailable in a standard version with a shaft seal for use instraightforward applications. DuoLine pumps with a magnetic
coupling dispense with the need for shaft seal maintenance.
There are corrosive versions available for pumping aggressive
media.

Screw pumps
HeptaDry –the dry alternative

The dry HeptaDry screw pump is the optimal solution for all
areas requiring oil-free vacuum. The pumps are ideal for low andmedium vacuum applications. They are not only suitable forindustrial applications, but also for coating. Pumping speeds inthis series range from 100 to 2,500 m³/h.
The one-piece rotors are a special advantage. They work
completely contactlessly and thus wear-free, and do not require
a lubricant in the pump chamber. This significantly reduces
maintenance costs compared to oil-sealed backing pumps.
Thermally sensitive gases can also be pumped. A dynamic
wear-free seal between the bearing and the pumping chamberincreases operational safety. The innovative design and low
speed of the pumps result in low stressing of the bearings andseals.

9CombiLine™

Pumping station control
CombiLine pumping stations can be equipped with various
control options. These different options allow easy integration of
the pumping stations into your system.
Variants of pumping station
control with OktaLine

The CombiLine pumping stations with OktaLine Roots pumps
are available with a control cabinet mounted on the frame forcontrolling the pumping station.
A central electrical connection via terminals in the control
cabinet (plug and play solution) is required on the customer’sside.

Different options ofpumping station controlwith HiLobe

CombiLine pumping stations with HiLobe Roots pumps can beequipped with two different control options:With RC5500 controller mounted on frame
In this version, the pumps are mounted on a frame. Thefrequency converter designed for the HiLobe is installed in theRC5500 control box and connected to the pump.
Required electrical connections on the customer’s side:
HiLobe with a Harting plug (included in delivery) on theRC5500 backing pump via the motor terminal board

RC5500With switch cabinet
In this option, the frequency converter for the HiLobe is housed
in a control cabinet mounted on the frame. The backing pumpand the HiLobe are electrically connected to the control cabinet.
Required electrical connections on the customer’s side:
A central electrical connection is required via terminals in thecontrol cabinet (plug and play solution).
The pumping station is controlled using the DCU control unit
installed in the switch cabinet

10Switch cabinet

We promotesustainable solutions
Energy-saving and durable

Integrating modern HiLobe Roots pumps is a sustainable
and environmentally friendly way to increase the efficiencyof pumping stations. In addition to a long service life andoperational reliability, these pumps feature motors withenergy efficiency class IE4. Thus they significantly
contribute to reducing operating costs and also, inparticular, energy use. Thanks to the sophisticatedventilation concept of the HiLobe, complex water cooling
can also be dispensed with, thereby saving resources andreducing your operating costs.

Sustainability and socialresponsibility

Our CombiLine pumping stations are all optimally adapted
to your process by our experts to find the most costeffective and efficient solution for your application.
When procuring the various components and manufacturing
our pumps, Pfeiffer Vacuum places the utmost importanceon fair business practices, an employee-oriented humanresources policy, economical use of natural resources, aswell as climate and environmental protection.

11CombiLine™

Pumping station overview
CombiLine™ RU
Roots pumping stations

HiLobe™ with HenaLine™ single-stage
rotary vane pumps■ Ultimate pressure of up to 3 · 10-2 mbar
■ Cost-effective solution■ Metallurgy, load locks, helium leak detection, electron
beam welding
These pumping stations are typically used for helium leakdetection. With the use of the HiLobe, they also play animportant role in the rapid evacuation of load lock chambers
for the insertion and removal of components, but also forelectron beam welding and surface coating.

CombiLine™ RD
Roots pumping stations

HiLobe™ with DuoLine™two-stage
rotary vane pumps■ Ultimate pressure of up to 1 · 10-3 mbar
■ Backing station for high vacuum pumps■ Metallurgy, coating, research & development,
photovoltaics, vacuum drying
These classic pumping stations are used for a variety ofcoating applications and are particularly suitable as backing
pumping stations for high vacuum pumps. Potential uses forthese pumping stations include applying wear protection
coatings for turning and drilling tools, decorative coatings for
gemstones and optical coatings for eyeglass lenses orarchitectural glass. A further field of application is metallurgy,
where hardening or nitriding is used to achieve changes inmaterial properties.

CombiLine™ RH
Roots pumping stations

HiLobe™ with HeptaLine™ screw pumps■ Ultimate pressure of up to 5 · 10-3 mbar
■ Dry, oil-free suction chamber■ Coating, metallurgy, vacuum drying, degassing,photovoltaics
These Roots pumping stations are used in applications
ranging from the chemical industry and complex industrial
applications to production plants for photovoltaics.
A key feature is the dry, oil-free backing pump, which allows
aggressive media to be pumped.

12CombiLine™ WURoots pumping stations

OktaLine™ with UnoLine™ Plus single-stage
rotary vane pump
■ Ultimate pressure of up to 2 · 10-3 mbar
■ Cost-effective solution■ Hardening, melting, vacuum drying and degassing
Pumping stations of this type are used in metallurgy, and have
proven themselves particularly in the HIP process throughextremely long service lives. The main applications are
hardening, casting or melting of materials. Another typicalapplication is vacuum drying and degassing.

CombiLine™ WURoots pumping stations

OktaLine™ with HenaLine™ single-stage
rotary vane pump
■ Ultimate pressure of up to 8 · 10-3 mbar
■ Cost-effective solution■ Metallurgy, load locks, helium leak detection, electron
beam welding
A typical application for these pumping stations is helium leakdetection, which enables the detection and localization of thesmallest leaks within a very short time. These pumpingstations play an important role in the rapid evacuation of load
lock chambers for the insertion and removal of components.
Further types of use are electron beam welding and surface
coating.

CombiLine™ WD
Roots pumping stations

OktaLine™ with DuoLine® two-stage
rotary vane pumps■ Ultimate pressure of up to 5 · 10-4 mbar
■ Backing station for high vacuum pumps■ Metallurgy, coating, research & development, photovoltaics,vacuum drying
These are classic pumping stations for a wide range of coating
applications. These pumping stations are particularly suitableas backing stations for high vacuum pumps. Potential uses forthese pumping stations include applying wear protection
coatings for turning and drilling tools, decorative coatings for
gemstones and optical coatings for eyeglass lenses orarchitectural glass. A further field of application is metallurgy.
By means of hardening or nitriding, changes in material
properties are achieved.

CombiLine™ WH
Roots pumping stations

OktaLine™ with dry compressing HeptaDry™ pump
■ Ultimate pressure of up to 2 · 10-3 mbar
■ Dry, oil-free suction chamber■ Coating, metallurgy, vacuum drying, degassing,photovoltaics
The range of applications for Roots pumping stations isparticularly wide. It ranges from applications in the chemicalindustry and complex industrial applications to photovoltaic
production plants. A key feature of this series is the dry,oil-free backing pump. This means that fluids which reactwith pump oil can be pumped.

13

CombiLine™

Customized pumping station solutions
For requirements involving extremely high pumping speeds and/or ultimate pressures < 10-3 mbar, we have multi-stage pumping
stations as well as variants featuring Pfeiffer Vacuum turbopumps
for use in high vacuum. We develop and manufacture individual
solutions for you, tailored to your application. Our CombiLine
pumping stations can be used, for example, for evacuating space
simulation or electron beam welding chambers. Very successful
applications include use in glass coating and solar technology.
Pump selection –depending on theapplication, we offer:

■

■
■

■
■
■
■
■

Our competence

Oil circulation lubricated rotary vane pumps, single or twostage (including magnetically coupled versions)
Liquid ring pumps
Dry-compressing backing pumps (including magneticallycoupled versions)
Roots pumps (including magnetically coupled versions)
Turbopumps (including magnetically coupled versions)
Oil diffusion pumps
Cryopumps
Scroll and diaphragm pumps
Complete design of vacuum systems
Precise dimensioning of components,
based on calculation programs developed in-house■ If you give us the design specifications,
we will calculate the:■oooooo14

Pumping speeds
Evacuation times
Conductivities
Intermediate pressures
Gas exit temperatures
Cooling effects

CombiLine™

Accessories for pumping stations
Accessories

For our CombiLine pumping stations, we offer optional
accessories according to your requirements.
■■■
■
■
■
■
■

Oil pan
Swivel casters/machine feet
Color variants
Valve before the pumping station
Gauge ahead of the pumping station
Gauge between the pumping stages
Switch cabinet with control unit
ProfiNet/EtherCat interface

GaugesOil panDifferent color variants

Switch cabinet with control unit

Swivel casters/machine feet

Valves15

VACUUM SOLUTIONS FROM A SINGLE SOURCE

Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide,
technological perfection, competent advice and reliable service.

COMPLETE RANGE OF PRODUCTS

From a single component to complex systems:
We are the only supplier of vacuum technology that provides a complete product portfolio.

COMPETENCE IN THEORY AND PRACTICE

Are you looking for a
perfect vacuum solution?
Please contact us:

www.pfeiffer-vacuum.com

16

Pfeiffer Vacuum GmbHGermany
T +49 6441 802-0

All data subject to change without prior notice. PW 0022 PEN (September 2020/PoD)

Benefit from our know-how and our portfolio of training opportunities!
We support you with your plant layout and provide first-class on-site service worldwide.