Semiconductors

Coating

Turbopumps
The optimal solution for yourhigh vacuum application

Accellerators

Turbopumps
Design and operating principleof turbopumps
OriginThe idea of turbomolecular pumps goes back to the Pfeiffer
Vacuum engineer Dr. Willi Becker, who invented the first
turbomolecular pump in 1958. This is the ancestor of today’s
turbopumps.
Technology
Turbopumps belong to the category of kinetic vacuum pumps,
which means that gases are moved from the inlet to theexhaust by momentum transfer. The design is that of aturbine: a multi-stage rotor with rotating bladed disks. Statorswith similar geometries are mirrored between the spinning
rotor disks.

Rotor: Superposistion with blade velocity
Molecules that collide with the rotor blades are adsorbed
there and leave the blades again after a certain period of time.
In this process, blade speed is added to the thermal molecular
speed. The stators are needed to re-establish the direction of
movement for the next rotor blades. This results in a net
pumping effect.

l3Compression ratio K0

Pumping speed and compression ratio
The two main characteristics that define a turbopump are its
pumping speed and compression ratio. The pumping speed
describes the ability of the pump to evacuate the volumetricflow, whether it is just the chamber volume or a constant gas
flow. The compression ratio is the ability of the pump to workin conjunction with the roughing pump to keep molecules outof the vacuum chamber. Both of these characteristics dependon the gas type.

1012
10 11

Turbo drag pump nitrogen

1010

Classic turbopump nitrogen

10 9
10 8
10 7

Turbo drag pump hydrogen

10 6
10 5
10 4

Classic turbopump hydrogen

10 3
10 2
10 1

10 - 310 - 210 - 110 0

10 1
10 2 hPa
Backing pressure p

Pumping speed S

Compression ratios of pure turbopumps and turbo drag pumps

HeliumNitrogenHydrogen

Inlet pressure

Pumping speed as a function of inlet pressureTurbopumps
Bearing technologies
Suspension
Pfeiffer Vacuum is using two most reliable design features.
The hybrid bearing suspesion consiting of a permanent
magnet bearing at the high vacuum side of the turbine and aceramic ballbearing at the exhaust of the pumps. The second
concept uses a 5-axis actively controlled magnetic bearing
design.

Permanent
magnetic bearing

Safety bearing

Rotor shaft

Ceramic
ball bearing

Hybrid bearing suspension
The hybrid bearing suspension was invented by Pfeiffer
Vacuum more than 40 years ago. It consists of a permanent
magnetic bearing and a ceramic ball bearing. Pfeiffer Vacuum
has produced over 1 million pumps with this design resulting
in the highest reliability. The magnetic bearing is necessary
for hydrocarbon-free radial rotor stabilization in order toachieve extremely ultra-high vacuum (< 10-10 hPa). The
opposing single ball strongly stabilizes the rotor in both theradial and axial direction, making it resilient to strong shocks
such as atmospheric vents and external vibrations. The
lubricant reservoir allows for constant filtration that ensuresreliability and allows the rotor to easily dissipate heat.

l5Upper safety bearing
Upper radial bearing
Rotor shaft
Lower radial bearing
Upper axial bearing

Lower safety bearing
Lower axial bearing

Z

Y1

X1

Y2

X2

5-axis active magnetically levitated suspension
Turbopumps can also work with a 5-axis active magneticallylevitated suspension. The rotor is levitated through digitalelectronic control and electromagnets. The 5-axis position of
the turbo rotor is continuously monitored and readjusted inreal time. The magnetic bearing allows the rotor to spin freely
in its true axis of inertia, which can differ from the geometriccenter of the rotor. This counteracts the imbalance of therotor and enables operation with low vibrations. The complete
absence of lubrication eliminates the risk of hydrocarbon
contamination in case of system malfunction. In the event ofa power failure, the magnetic bearings are supplied withelectricity through the rotational energy of the pump until therotor can land on safety bearings at low speed. There is noneed for battery backup or additional safety devices since
there is no mechanical contact between the rotor and the
housing, the active magnetic suspension system ismaintenance free for the complete lifetime of the pump.

Turbopumps
The optimal solution for yourhigh vacuum application
Drive electronics & controllers
Drive electronics are mainly responsible for the safe operationof the high-speed motor drive rotation. In magneticallylevitated pumps, the electronics package must also monitor
and ensure the proper rotor position and control the active
electromagnets. There are different controllers available which
can either be mounted directly to the pump or installed as anexternal rack. Some controllers have internal power supplies
so that they can be used with 90 – 240 V AC while smaller
controllers can be driven directly from 24 V DC / 48 V DC. The
standard communication is RS-485 or direct I/O (remote).
Other communication bus systems such as Devicenet,
Profibus, Profinet, EtherCat, E74 or LON are available uponrequest. Pfeiffer Vacuum offers standard display interfaces for
all controllers as well as standard software options.

TC 80 – for small HiPace
turbopumps

TC 110, 24 V DC – for small andmid-size HiPace turbopumps

TC 400, 48 V DC – for midsize HiPace turbopumps

TCP 350 – remote operationfor HiPace turbopumps

Magpower – remote operation for ATH turbopumps

l7

Pfeiffer Vacuum turbopump series and specifications:Pfeiffer Vacuum offers a comprehensive portfolio with all
types of turbopumps. Our mature product line has many
variations which enables us to provide our customers with the
optimal product solution for their vacuum application.
HiPace 10 – 800; HiPace Plus
■ Hybrid bearing turbopumps
in the pumping speed class of 10 to 800 l/s■ Best size to performance ratio■ High compression for light gases (especially H series)■ Compact yet robust design■ High reliability■ Different product versions providing optimal solutions fordiffernt process requirements (H series for highcompression, P series for processes and Plus for ultra low
vibration)
HiPace 300 M – 800 M■ 5-axis magnetically levitated turbopumps■ Unlimited operational life
■ Best vibration performance in the market■ High compression for light gases■ Completely free of hydrocarbons
HiPace 1200 – 2800
■ Hybrid bearing turbopumps in the pumping speed class of
1,000 to 2,800 l/s■ High pumping speed for light gas applications■ Good compression■ Robust in harsh applications
ATH 500 M – ATH 3200 M■ 5-axis magnetically levitated turbopumps■ Very high gas throughput■ Optimized for harsh chemistry manufacturing applications
as well as light duty high vacuum applications■ Fast safety bearing recovery

Pfeiffer Vacuum turbopump range
DN 25 DN 63 DN 100

DN 160

DN 200

DN 250 DN 320

Througput

Compression ratio

ATH-M
HiPace P

HiPaceHiPace M
HiPace H
10

80

300

500

700

1200

1600

2000

Single ball bearing suspension
5-axis magnetically levitated bearing suspension

3000 l/s

HiPace® 10 – 800
The optimal solution for your highvacuum application in the pumping
speed class from 10 to 800 l/s
High gas throughput
and highpumping speedYour added value

Highest reliability
due to robust design
and proven bearing
systemHiPace turbomolecular pumps are reliable, robust and suitable
for many vacuum solutions. Their high compression ratio forlight gases is ideal for high vacuum applications. A large
selection of standard accessories and communications
completes the HiPace portfolio.
Pfeiffer Vacuum also offers application specific solutions withpumping speeds from 10 to 800 l/s tailored to better serve
specific market requirements such as ultra-high compression,
low vibration, and radiation resistance
Benefits of the HiPace 10 – 800■ High compression ratio for light gases■ Best combination of size and performance■ Robust Pfeiffer Vacuum hybrid rotor suspension■ Radiation resistant pumps with external electronics
available■ Standard certifications: UL, CSA, IP54
Patented Laser Balancing Technology
Thanks to the innovative laser balancing technology patented
by Pfeiffer Vacuum, the HiPace 80 Neo and HiPace 350/450
have the lowest vibration level on the market as well as
minimal noise emission. As a result, they offer the highest
precision and are excellently suited for vibration-sensitive
applications.

l9

Maximum availability
due to on-site bearing
changeMaximum precision
thanks to patented
Laser Balancing
technology

SEMI S2 andUL certification

Minimum space requirement
due to compact design

Flexible use due to arbitrary
mounting orientation1)
1)

HiPace Plus: 0°

Specific product versions for different applications:
HiPaceThe standard HiPace turbopump has a compound rotor
containing both turbine blades and a holweck drag stage.
It provides a good combination of gas throughput andcompression ratio. It is ideal for the most common vacuum
applications.
HiPace H
The HiPace 300 H and HiPace 700 H turbomolecular pumps
are the ultimate high compression vacuum solutions and ideal
for generating ultra-high vacuum. The compression ratio forN2 is 9 ∙ 1013 and for H2 is 9 ∙107. The HiPace 300 H and
HiPace 700 H can easily attain pressures of < 10-10 hPa in
combination with a simple diaphragm pump.
HiPace P
The HiPace P series pumps are designed for process andlight, corrosive applications. The pump rotors are Kepla®
coated for corrosion resistance and optimized to operate
without a drag stage. If necessary, the pumps can beequipped with a purge device to make sure that no corrosive
gases enter the motor section of the pump.
HiPace Plus
The HiPace Plus pumps are optimized for vibration-sensitive
applications such as electron microscopy. They haveextremely low magnetic stray fields and vibration signatures.
Advanced specialized mounting hardware is available.

Please findfurther details
and technicaldata here

HiPace® 300 – 800 M
Compact turbopumps withmagnetic bearings in the pumping
speed class from 300 to 800 l/s
High gas throughput
for all process gases

Your added value

Reliable due toexcellent long-term
stability

The turbopumps of the HiPace M series are equipped with a5-axis magnetically levitated suspension. They are designed
for general high vacuum applications and therefore containcompound rotors. The completely oil-free magnetic
suspension virtually eliminates the need for maintenance andany possibility for contamination. For vibration sensitive
applications, the HiPace M has an extremely low vibration andstray magnetic field. In case of a power outage, the controller
attached to the turbopump will use the pump motor as a
generator to keep the rotor suspended .
Benefits of the HiPace 300 – 800 M■ 5-axis magnetically levitated suspension■ Completely hydrocarbon-free■ Advanced electronics with power generation motor in caseof power outages■ Safety bearing wear counter with robust re-stabilization
after impacts■ Integrated drive electronics■ Can operate in any orientation■ UL, CSA, IP54 certification

l 11

Clean vacuum
due to lubricant-freemagnetic bearing

Low vibrationand low magneticstray field

Durable due toautomatic unbalancecompensation

Easy
installation

Flexible use due to arbitrary
mounting orientation

Hybrid rotor

Drive electronics TM 700
with interface panel

5 axismagnetig bearing
Holweck stage

Integrated
water cooling

Please findfurther details
and technicaldata here

HiPace® 1200 – 2800 IT
Compact turbopumps withhybrid bearings in the pumping speed
from 1200 up to 2800 l/s

High vacuum
performance for lightgases (H2, He) andheavy gases (Ar, CF4)

Your added value

Maximum reliability
through the use of
hybrid bearings

The HiPace 1200 – 2800 turbopumps are reliable as well as
robust, and therefore suitable for many vacuum applications.
Due to the typical use of these pumps in harsh environments,
the optimal rotor solution is a pure turbo rotor. Even without adrag stage, these pumps have a sufficient compression ratio
for most general applications. A huge complementary
portfolio of standard accessories and communicationelectronics completes this pump range.
We provide application-specific, tailored solutions: e.g. Kepla®
coating for corrosion resistance, temperature management
systems for the prevention of process deposition in highpressure regions as well as external electronics for use underradiation. The HiPace 1200 – 2800 pumps are a highperforming package in a compact design.
Benefits of the HiPace 1200 – 2800
■ High compression ratio for light gases■ Robust Pfeiffer Vacuum hybrid rotor suspension■ High resistance to process deposition■ Purge gas valve included■ Available for radiation resistant pumps with external
electronics■ Temperature management system■ Standard certifications: UL, CSA, IP54

l 13
SEMI S2 compatible,
UL, CSA and TÜV
certification

Maximum availability
due to on-site
bearing change

IP
Highest processcapability, resistantto particles

Suitable for industrial use
thanks toprotection class IP54

Specific product versions for different applications:
HiPaceWith the proven and optimized bearing system and to thegood combination between pumping speed and compression
ratio, the standard HiPace pumps are suitable for all kind of
standard applications.
HiPace C
The HiPace C pumps are designed for corrosive applications.
Due to a Kepla® coating of the rotor, for example, they reachan unsurpassed resistance to various process chemicals.
HiPace I
HiPace I pumps are designed especially for Implantation
processes. The sophisticated rotor design of the turbopump
results in an optimized pumping speed for light gases. This
ensures the best process adaption for ion implantation
processes, were hydrogen pumping speed is very important.
The nickel coated rotor ensures robustness against the
dopants applied in the process.
HiPace T
The temperature management system can reduce the amountof process deposition. By increasing the temperature at thehigher pressure region, condensation is reduced. This feature
can be combined with the C-version (HiPace CT) in order toprovide both corrosion resistance to process chemicals aswell as resistance to process deposition inside the pump.

Please findfurther details
and technicaldata here

ATH 500 – 3200 M, ATP 2300 M
Compact turbopumps withmagnetic bearings in the pumping
speed class from 500 to 3000 l/s
Very high gas
throughput especiallyfor heavy process gases

Your added value

Excellent long-term stability
and reliability due tomagnetic levitated rotor
technology

ATH-M and ATP-M 5-axis magnetically levitated turbomolecular
pumps have long term reliability in semiconductor fabrication
processes and other manufacturing environments such as flat
panel display, solar cells or large area glass coating. These
applications require high tolerances of harsh chemicals alongwith high gas flow capabilities. This is where the ATH-M and
ATP-M turbopumps are the perfect fit to fulfill today’s industry
demands. The high perfomance compound rotors withmolecular drag stage of the ATH-M series pumps provide
unparalleled throughput and high foreline tolerance even athigh temperatures, whereas the ATP-M pumps offering ideal
pumping performance for light gases. Both pump series arealso widely used in R&D applications due to their maintenancefree high quality vacuum generation capacities.
The ATH-M product line offers pumping speeds from theworld’s smallest 500 l/s class turbomolecular pump up to the3000 l/s class.
Benefits of the ATH 500 – 3200 M and ATP 2300 M■ 5-axis magnetically levitated suspension■ Completely hydrocarbon free
■ Advanced electronics with power generation motor for
power outage conditions■ Safety bearing wear counters with robust re-stabilization■ Can operate in any orientation

l 15

Longer life time
due to temperature
management

Low cost of ownershipby maintenance-freemagnetic bearing
technology in clean
process

Very low noiseand vibrations

High fore-vacuum
pressure compatibility
for optimized backing
pump installations

Flexible use due to arbitrary
mounting orientation

Specific product versions for different applications:
ATH-M and ATP-M non-heated version
The ATH-M has a high compression drag stage that makes ita high flow turbopump for industrial requirements. The
ATH-M non-heated versions are designed for light duty
applications such as plasma deposition in semiconductor
manufacturing processes, large area glass coating or in noncorrosive R&D.
ATH-M and ATP-M heated version
The ATH-M heated version with a temperature management
system (TMS) is designed to tolerate harsh chemical process
gas from silicon-based manufacturing applications. Its
pumping system is equipped with specific protection
coatings. The TMS will minimize by-product depositions
within the turbopump to maximize the maintenance intervals
and allow for a minimum tool downtime.
The ATP-M version with a turbomolecular rotor blade
structure (without Holweck stage) provides high compression
ratio for light gases. It aims at processes that require an ultrahigh vacuum, ultimate pressure or high hydrogen pumping
capacity.
Please findfurther details
and technicaldata here

Turbopumps
Application examples
Portablemass spectrometers
An example for a typical application is mass
spectrometry in the field of chemical
detection. The products used in thesesolutions must be compact, powerful,battery-operated and conform to
Milspec 810 for ruggedness.
Pfeiffer Vacuum products in use■■

HiPace 10

Turbopump HiPace 10
The HiPace 10 is the smallest commericalturbopump on the market. It is equipped witha dual ball bearing for robust operation on land,sea and air.
Ultimate pressure 5 ∙ 10-5 hPa
10 l/s N2 pumping speed
24 VDC (max. power consumption 29 W)
1.8 kgDiaphgram pump MVP 010 DC
Dry and oil-free diaphragm pumps witha pumping speed of up to 0.60 m3/h.
■ Ultimate pressure < 1 hPa■ 24 VDC■ Direct communication with the turbo controller■ Long service life of diaphragms and valves
Digital piezo/pirani sensor RPT 010
Small digital piezo/pirani sensor for stable gross vacuum
measurement independent of gas type.
■ Display range 10-4 hPa to 1,200 hPa■ Interfaces can be directly connected to turbo controller■ Compact dimensions■ Direct installation, no additional power supply■ No additional gauge cable needed

PrismaPro® mass DigiLine
spectrometer
gauge

MVP 010 DC

RPT 010For conditioning bakeable
analysis chamber
Heated gas
inlet chamber

Detachable
7“ colored
touch screen
Temperature-regulated gas
sampling line (capillary)

Portablemass spectrometer
OmniStar

MVP 010-3
diaphragm pump

HiPace® 80
turbo pump

l 17High performance liquid
chromatography
mass spectrometers
Pfeiffer Vacuum has the solution for highperformance vacuum instrumentation
applications. We offer standard andcustomized turbopumps, including
SplitFlow turbos.
Pfeiffer Vacuum products in use
Turbopump SplitFlow
With the SplitFlow technology, it is possible
to combine multiple turbopumps in a single
package. This is especially useful in theatmospheric sample systems of analytic
instrumentation such as mass spectrometry
Short time to market for customized solutions
Pumping speed up to 700 l/s■ Multiple ports to match your special design requirements■ HV solution for < 10-10 hPa■ Unique UHV sealing solutions■ Unique mounting technology■

Gasflow in variable chambers

SplitFlowTurbopumps
Application examples
Extreme ultra-high vacuum
applications
Pfeiffer Vacuum offers unique solutions
specifically designed to reach pressure
ranges of < 10-10 hPa with minimal effort.
Pfeiffer Vacuum products in use
Turbopumps HiPace 300 H and 700 H
HiPace 300 H and 700 H turbopumps
have a high compression ratio, which isespecially important for light gases. This
allows the pump to achieve high vacuum
even with a high foreline pressure.

HiPace 300 H

HiPace 700 H
685 l/s N2 pumping speed< 10-10 hPa ultimate pressure
Compression ratio >1 ∙ 1013 N2 and 2 ∙ 107 for H2
Max. foreline pressure 22 hPa
HiPace 300 H■ 260 l/s N2 pumping speed■ < 10-10 hPa ultimate pressure■ Compression ratio >1 ∙ 1013 N2 and 1 ∙ 107 for H2■ Max. foreline pressure 30 hPa

HiPace 700 H

ModulLine hot cathodePfeiffer Vacuum also offers a true 10-12 hPa extractor type hot
ion gauge.
■ X-ray limit < 1 ∙ 10-12 hPa■ Bake-out temperature 400 °C■ Filament Y2O
Mass spectrometer PrismaPro
Quadrupole mass spectrometers with Faraday detectors are
the preferred devices for qualitative analysis of the gas
composition in a high-vacuum chamber.
■ High measurement speed, stability and high resolution■ Flexible operation thanks to interchangeable analyzers andelectronics■ Two filaments mean maximum up-time■ Lowest detectable partial pressure
3 ·10-15 hPa (hPa)

ModulLine hot cathodePrismaProl 19
Radiation emitting
applications
Pfeiffer Vacuum offers unique solutions
specifically designed to resist radiation. In suchapplications, the turbopump and gauges must
be free of any semiconductor electronics.
Pfeiffer Vacuum products in use
External drive electronics
TCP 350for turbopumps
TCP 350 and TCP 1200 external drive
electronics allow turbopumps to be void of any
semiconductor electrical components.
TCP 350
The TCP 350 drive electronics unit is employedfor driving and monitoring the HiPace 80 ­– 800.
Available standard cable lengths from 3 up to 120 m
and up to 1000 m are available upon request.
TCP 1200
The external electronic drive unit TCP 1200 serves as voltage
supply, control and monitoring of a HiPace 1200 ­– 2300
turbopump and connected peripherals.

TPG 500

ModulLine gauges heads and controllers
Controller TPG 500
The controllers TPG 500 are modular and can be configured
in various ways. Two measuring card slots for the operationof up to 4 gauges are available. An interface slot for various
relay and interface cards is included. Fitting for pressure
range of 1 · 10-11 to 1000 hPa.
Gauge head TPR 018
Metal sealed Pirani gauge.
IKR 060

Gauge head IKR 060
Radiation resistant cold cathode gauge head, coaxial,with metal seal.

Electronics

SensorConnection between
HiPace and TCP 350

Connection between
HiPace and TCP 1200

Connection between
TPG 500 and IKR 060 sensor

Turbopumps
Application examples
Modular pumping stations
Pfeiffer Vacuum pumping stations can be
configured with a variety of turbopumps andbacking pumps. Optional gauges areavailable to be read directly from theturbopump readout or a fully configured
gauge controller. Backing pumps areavailable as either dry or the economical
wet version.
Pfeiffer Vacuum products in use

HiCube Eco

HiCube Eco
Compact pumping stations: ideal forpumping small volumes.
Turbopumps: HiPace 30, 80, 300 or 300 H
Backing pump: MVP 015-2, MVP 015-4,
MVP 030 (diaphragm pumps)
Pumping speed N2 = 22 – 260 l/s
Backing pump = 0.5 - 1.8 m³/h

HiCube Classic
Robust pumping stations ideal for pumping mid-size volumes(10 – 100 liters), available with wheels.
■ Turbopumps: HiPace 80, 300, 300 H, 400, 700, 700 H■ Available backing pumps oil sealed: Duo 3 M, Duo 6 M(rotary vane pumps)■ Available backing pumps dry: MVP 040, MVP 070(diaphragm pumps)■ Pumping speed N2 = 35 – 665 l/s■ Backing pump = 2.3 – 6 m³/h
HiCube Pro
Mobile pumping stations ideal for pumping large-size volumes(50 – 1,000 liters).
■ Turbopumps: HiPace 80, 300, 300 H, 400, 700, 700 H■ Available backing pumps oil sealed: Duo 11 M, Duo 20 M,
Pascal 2010, Pascal 2021(rotary vane pumps)■ Available backing pumps dry: ACP 15, ACP 28(dry multi-stage Roots pumps)■ Pumping speed N2 = 35 – 665 l/s■ Backing pump = 9 – 22 m³/h

HiCube Classic

HiCube Pro

l 21
Semiconductor fabrication
OEM equipment upgrades as well as full fab
solutions are also part of the Pfeiffer Vacuum
portfolio. We have dedicated harsh duty andhigh throughput turbopumps for the mostdemanding Etch applications. We also offer
ultra-high vacuum, low vibration solutions
for our electron beam and lithography
customers.
Pfeiffer Vacuum products in use■■■

ATH 2804 MT

Turbopump ATH 2804 MT
High tempe rature and high throughput
turbopumps
designed for harsh Etch processes.
Operation with compact pumpintegrated controller
Installation in any orientation
Water cooled
CE marked and ROHS compliant
Heated version (MT) available for corrosive applications.

3-position pendulum valve
These valves offer the user a highly reliable, compact andlow-cost alternative to competitive designs. In addition, thesmooth actuation results in low particle generation and rapid
open-to-close speeds. The valve body can be heated to 150 ºC
with optional heater jackets. In-situ serviceability of the valve
is made possible through the incorporation of a removablebonnet cover.

3-position pendulum valve

Multi-stage Roots pumps A4X series
Equipped with the proven and energy efficient multi-stage
Roots technology, the A4X series offers a wide range of dry
pumping solutions designed for the most corrosive applications. The pumping speed varies from 160 to 3,000 m³/h.
■ High efficiency motors and limited use of electrical heaters■ Corrosion resistant materials for increased lifetime■ Wide operating temperature range protects the pumpagainst precursor cracking or condensable deposition■ Extended monitoring functionalities for accurate control ofpump operating conditions and idle mode capabilities■ Semi S2-0712 and UL 61010 compliant

A4X series

Leak detector ASM 390
Optimized for fast and accurate leak testing in allmeasurement ranges. The ASM 390 is the perfectcombination of high dry pumping performance, sensitivity andmobility in the smallest footprint.
■ Dry and clean pump with high backing capacity (35 m³/h)■ Fast time to test: unrivalled performances from small tolarge volumes■ High maneuverability flexibility and compact design■ Large color touch screen, fully rotatable and detachable
without any tool
■ Integrated toolbox for storage of accessories■ Connectable DN 25 exhaust for connection to a generalFab exhaust

ASM 390

Turbopumps
Application examples
Coating applications
Pfeiffer Vacuum offers complete pumping
solutions for a wide variety of thin film vacuum
coatings, ranging from decorative to solar
panel coatings. These applications require
industrial harsh duty pumps with highreliability.
Pfeiffer Vacuum products in use■

Turbopump ATH 2303 M
Turbomolecular pump with large world
wide installationbase in light to harsh processes for DN 200
and DN 250 flange size.
5-axis magnetically levitated turbopump
for maintenance-free operation
Water cooled controller
Operation in upside down orientation for dusty
vacuum system
Profibus interface (other fieldbus options available)

Pumping station CombiLine
For example, a combination of a Hepta 630 screw pump
and an Okta 4000 Roots pump
■ 600 m³/h dry roughing pump
■ 4,000 m³/h Roots booster pump
Also available in various combinations, including wet
and dry pumps.

ATH 2303 M

CombiLinel 23
Energy storage flywheel
To ensure the efficiency of a flywheel as anenergy storage device, the constant losses
through friction have to be reduced to aminimum. To do so, the flywheel housing isevacuated with vacuum pumps. Typicaltargeted pressures are 1 ∙ 10-1 hPa down to1 ∙ 10-3 hPa or even less.
Pfeiffer Vacuum products in use
Turbopump HiPace 300
Compact yet powerful turbopumps withpumping speeds of up to 260 l/s for N2
Equipped with integrated power supply
24 VDC operation
Robust enough to withstand accidental
air inrushes
Rotary vane pump Duo 3 DC
Dual-stage, high-performance rotary vane pump with a
pumping speed of 2.5 m³/h
■ With 24 VDC drive■ Integrated gas ballast and safety valve■ Low cost of ownership due topower consumption < 100 W■ Low maintenance due to brushless drive and optional
magnetic coupling■ Easy installation and small footprint
Pirani/cold cathode combination gauge MPT 200
With its rugged metallic case and digital interface, the MPT
200 is particularly suited for operation in vacuum and othersystems.
■ Display range: 5 ∙ 10-9 – 1,000 hPa■ Insensitive to gas inrush

HiPace 300

Duo 3 DCMPT 200

All information is subject to change without prior notice. PT 0191 PEN (January 2022/PoD)

We give our best for you every day –worldwide!

Are you looking for youroptimized vacuum solution?
Please contact us:

Pfeiffer Vacuum GmbHGermany
T +49 6441 802-0

www.pfeiffer-vacuum.com