Semiconductor

Particle accelerators

ACP 90Multi-stage Roots pumps
for oil- and particle free applications

Plasma cleaning

ACP 90
Multi-stage Roots pumps
for oil- and particle free applications
Resistant toapplications withlight corrosive gases

Your added value

High condensable gases
pumping capability thanks
to high purge level

Designed for oil- and particle free applications
Specially developed for oil- and particle free applications,
the ACP 90 multi-stage Roots pumps meet the requirements
where clean and dry vacuum is needed. Operating in thepressure range between atmosphere up to 3·10-2 hPa,
these pumps are robust and can withstand frequent pumping
cycles.
Resistant to applications with light corrosive gases
With their unique pumping cell design and the usage of highquality materials, the ACP 90 pumps are resistant to corrosive
gases and offer a high pumping capacity of condensable
gases. The pump is equipped with a high gas ballast and asmart management of high inlet pressure. This makes theACP 90 ideal when pumping large amount of condensable
gases like in drying applications, high humidity environments
or large insulating volume pumping.
Optimized to pump large volume and frequent
pump downWith a maximum inlet up to atmospheric pressure, these
multi-stage Roots pumps are ideal to pump large volume or
to do frequent pump down. That allows for high pumping
speed at high pressure, which is important when pumping
large volumes. Furthermore, the ACP 90 combines a highsuction speed of >50 m3/h with a low power consumptionof 2 kw at atmospheric pressure, offering an energy efficientsolution.

Low power consumption
at high pressure

Self-sufficientbecause of air coolingHigh quality material
ensures corrosion
resistanceFulfills CE and UL/CSAstandards

Low power consumption at high pressure
The ACP 90 is equipped with a high efficiency PM motor(permanent magnet motor) with premium efficiency IE4. This
ensures low power consumption at high pressure. In addition,
the air cooling system enables the pump to be self-sufficient.
Therefore, no other connection like water pipes are needed.
Two pump versions for your individual needs
The ACP 90 multi-stage Roots pumps are available in two versions. The SD version is dedicated to work with non corrosivegases. Thanks to its gas ballast it is capable to manage highflow of condensable gases. The ACP 90 G corresponds withcorrosive gases. This version is equipped with a purge linewith injection that protect both the low and high pressure
bearings and to dilute the pumped gases in the pump cell.
Both versions fullfill the CE and UL/CSA standards.
Applications■ Industry– Drying– Freeze drying– Vacuum oven
– Plasma cleaning– Load/Locks– Coatings■

Semiconductor
Front end
– Back end– Wafer cleaning–■R&D
Particle acceleratorsand other large volume
experiments:– Maintenance group– Cryo magnet insulation
volume– Pumping of large
volume–ACP 90
Dimensional drawing
and pumping speed
Inlet port DN 40 ISO-KF

Air cooling opening

Exhaust DN 40 ISO-KF

Optional wheels or feet

Frequency converter
communication interface
RJ 45 connector for
RS interface

Sub’d connector for
remote interface
Led for maintenance
Mains power supply
connector

l5Dimensional drawing

285.5
39.2

15

57.5

342.7

Inlet port
DN 40 ISO-KF

251.8
127.3

487
631.5
673

37156

41.5

DN 40 ISO-KF
Exhaust25131230.5319

Dimensions in mm

Pumping speed (m3/h)

Pumping speed

ACP90 Pumping Speed

100
90
80
70
60
50403020
1000,010,11

10100

1000
Pressure (mbar)

ACP 90
Technical data,order number matrix
Technical data
ACP 90
Pumping speed max.

ACP 9088 m3/hUltimate pressure without purge (max.)
Ultimate pressure (max.)with gas ballast for SD version
Ultimate pressure (max.)with gas purge for G version

Nominal pumping speed
Maximum continuous inlet pressure
Max. pure water tolerance with3·10-2 mbar open gas ballast

88 m3/h52 cfm3 · 10-2 mbar
2.2 · 10-2 Torr
1 · 10-1 mbar
7.5 · 10-2 Torr
5 · 10-2 mbar
3.8 · 10-2 Torr
1013 mbar
760 Torr
2.4 Kg/hVoltage supply1)

Ultimate pressure1-phase230 V +/- 10%, 50/60 Hz

3-phase200-240 VAC or 380-480 VAC, 50/60 Hz

Power consumption2)
At ultimate pressure
At atmospheric pressure
Ambient temperature

1,280 W
1,800 – 2,000 W
12 to 40 °C
54 to 104 °F

Flange in

40 ISO-KF

Flange out

40 ISO-KF

Max. Helium leak rate
WeightOverall dimensions (L · W · H)
1)2)

< 5 · 10-6 mbar · l/s
75 Kg
166 lbs
673 · 319 · 286 mm
26.5 · 12.6 · 11.3 inches

In accordance with IEC/UL/CSA regulations, the pumps can withstand a voltage variation of ± 10 %.
Typical values obtained after minimum 1 hour of pump warm up timel7
Order number matrix ACP 90

V9 abS cZde01

VersionStandard (SD Version)
With purge gas (G version)aSAGA

Inlet / Exhaust port
without inlet port / DN 40 ISO-KF
DN 40 ISO-KF / DN 40 ISO-KFbABVoltage
1 phase HV
3 phase LV
3 phase HVcABCGas ballast port
Permanent off
Permanent on
Gas fitting (for G version only)
Manual on/offdBFRMOptions
FootWheelseFR

Service and support:
ACP 90 service is declined in different possibilities:
Preventive Maintenance
To preserve pumping performances, Pfeiffer Vacuum recommends a preventive maintenance packages based on
the age of your pump or the number of hours of pumpuse.

RepairGet your vacuum pump back and running as quickly as
possible without compromising in repair quality.Nothing
can therefore replace the technical knowledge of our experts to achieve a perfect repair of your product.1)

In the case of ACP pumps, fluids, bearings, seals andscrews are among the aging parts that must be replaced
regularly. Some parts failure can lead to critical pumpdamage. Irreparable failures can be avoided with preventive maintenance. Decrease of tool downtime is also another benefit of planned maintenance.
With the Pfeiffer Vacuum’s service, you have somethingthat others don’t have: access to the people who developed and manufactured your pump – 100 % manufacturer
expertise.1)

1)

The service package will be confirmed upon receipt in our premises

Errors excepted. All data subject to change without prior notice. PM 0011 PEN (July 2022/PoD)

We give our best for you every day –worldwide!

Are you looking for an
optimal vacuum solution?
Please contact us:
Pfeiffer Vacuum GmbHGermany
Phone +49 6441 802-0

www.pfeiffer-vacuum.com