ION Check®
SRG technology based
Ion Gauge calibration andcomparison system(Recognized transfer standard)

Key advantages• Use of the highly accurate
Spinning Rotor Gauge as arecognized transfer standard• Exceptionally clean and longterm stable with minimal drift• Optimized compact solution
at calibration laboratory level
Applications• Qualification of high vacuum
gauges prior to systeminstallation• Troubleshooting• Determination of ionization
gauge compatibility as areplacement for older model
series• Calibration of ion gauges• Creation of calibration
protocols / ISO
documentationDetails• Adjustable calibrationpressures from
10-2 mbar to 5 x 10-7 mbar
7 x 10-3 Torr to 4 x 10-7 Torr
• Optionally factory calibrated
and DAKKs (national Lab)certified references• Compact and optimized
calibration and comparison
systemIntroduction
The Ion Check is a complete solution to calibrate and compare highvacuum gauges. A spinning rotor gauge is used as a certified, accurate
and long-term stable pressure standard. The system is compact andoptimized for this application, consists of an oil free and vibration insulated
high vacuum system, a gas dosing unit for this pressure regime and ahard- and software to read out and calibrate vacuum gauges with analog
output.
In many processes especially the range from 1 x 10-4 mbar/ Torr to1 x 10-6 mbar/Torr is of interest, hard to keep stable and get reliable
pressure sensor signals (e.g. due to missing calibration and usage). Most
methods of pressure measurement in mentioned range are based on an
indirect measurement of the ion current (hot cathodes (HC) / BayardAlpert or cold cathodes (CC) / Penning). Due to their function, thesemethods require high energy densities to generate ions. High energy
densities at filaments / plasmas influence the vacuum to be measured(sputtering / gettering / outgassing) and ultimately stability of the processitself. Coatings and aging / corrosion have an influence on the ionization
rate and its detection. This simulates a non-existent change in pressure(drift). This drift is further accelerated by contact with process gases.
These unspecified inaccuracies are difficult to identify. The consequences
can often only be recognized through inadequate process results. Thus,reliable, reproducible, and long-term stable measurement withspecification of accuracy is hardly possible.
The Spinning Rotor Gauge (SRG) is a recognized, highly accurate andlong-term stable transfer standard and therefore represents a unique
option for characterizing and checking ionization gauges:• "in-situ", directly on the process, using an SRG transducer (DosiTorr)• "ex-situ", outside of the process using the ION Check System.
The SRG system allows simple, accurate setting and determination ofpressures between 5 x 10-7 and 1 x 10-2 mbar with high-purity calibration
gases.

info@ph-instruments.eu

www.ph-instruments.eu+43 720 500 217In order to directly display differences within the measuring process to be checked, e.g. twoionization gauges can be included in the comparison. Ultimately, the direct comparison alsoenables a reliable selection of devices before they are used (possibly in comparison to an in-house“golden” or verified standard).

Advantages of SRG Measurement
Compared to other high vacuum measurement methods, the integrated Spinning Rotor Gauge ishighly accurate, has long-term stability and does not influence the vacuum to be measured (notemperature input / ionization / gettering / sputtering / bending of membranes, etc.). The measuringmethod is based on a stainless steel ball that is suspended by electromagnetic forces and set inrotation. The pressure is only determined by the inductively measured decrease in sphericalrotation frequency (caused by the adsorption / desorption of the gas particles on the sphericalsurface). The SRG measurement system is wear-free, linear and mathematically precise. In
general, Spinning Rotor Gauges were previously considered complex to use and were therefore
almost exclusively used in calibration laboratories with highly trained staff. The Spinning Rotor
Gauges from ph-instruments GmbH are characterized by their ease of use.
Software adapted to the application is used to synchronously save the measured values from as
many as four measuring sensors (two of those are Devices under Test DUTs).

Operating and Calibration Software

The measuring system is equipped with optimized software for operating the SRG, including thetest items. The software interface is operated using a touch display, avoiding cables and external
input aids such as keyboard and mouse (which can be connected as an option). The saved data isoutput via a USB connection. The Windows 10-based computer can also be integrated into anetwork via a LAN socket. The output is visualized in an overview by means of four analog pointerinstrument modeled displays, as shown in the figure above. In detail, the measured values can beread or stored precisely in exponential notation. In addition, the percentage deviation of the test
items from one another and from the reference, the SRG, is shown.
The four pressure measurement values are saved in parallel in a CSV file. Further processing of
the data can thus take place in commonly used spreadsheet or visualization programs.
The software and underlying hardware can characterize two vacuum pressure gauges withwidespread analog output (0 - 10 VDC) and 24 VDC power supply. The analog inputs of the system
can be parameterized. The electrical connection is made using special cables supplied by phinstruments GmbH and should be requested at time of ordering. Do not substitute nonstandard
connecting cables on your own. The hardware can be destroyed (the warranty is void).

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www.ph-instruments.eu+43 720 500 217Technical Data
Measurement principle
Adjustable pressure range
Accuracy SRG
Measurement time SRG
Evaluation cycle of the system
Long-term stability
Number of DUT
Vacuum connection DUT
HV pumping system
Bypass pump
Digital interfaces
PC operation / GUI
LCD Touch Display / Mini PC
Plug compatible (cable included)
Plug compatible general

Operating TemperaturePower requirements
Calibration gas (optional)
WeightDimensions

Spinning Rotor Gauge (+ Pirani/ Penning)
5 x 10-7 mbar to 1 x 10-2 mbar (max. 1 mbar)
4 x 10-7 Torr to 7 x 10-3 Torr (max. 1 Torr)
0.1 mbar to 1 x 10-6 mbar 1% of reading
0.07 Torr to 7 x 10-7 Torr 1% of reading
3, 5, 10, 20, 30s<1s< 1% Drift per year
2 parallel
KF 25 (others via adapter)
Pfeiffer PM 015 887 AT / diaphragm vacuum
backing pump
20 mbar diaphragm vacuum backing pump
USB-C, Bluetooth (opt), RS-485, LAN
Win10, ION Check App
ASUS VT168H / Intel® Celeron® N3450
processor: 8GB DDR4, 128GB M.2 SATA SSD
MKS/GP 354, MKS /GP 355, MKS 971B
CC/HC/Pirani with 24 VDC power supply and0-10 VDC analog output(Cable on request)
10 to 40 °C (50 to 104 F)
230 VAC, 50 Hz, < 2 A uninterruptible powerN2 (further options on request)
90.8 kg (216 lb)
L x W x H = 610 x 610 x 1200 mm(24 x 24 x 47-1/4 inches)

About usph-instruments develops, manufactures and sells vacuum measurement systems with unique technologies
for demanding tasks in industry, research and science. Our guideline is to provide our customers with costeffective and application-related solutions. Our specialists each have more than 20 years of experience inmeasuring and regulating pressures in the vacuum sector. The products are developed and produced inGermany and Austria and meet the highest quality standards for measuring accuracy, sustainability andreliability. Innovative technologies help to increase energy efficiency and thus protect the environment from
unnecessary CO2 emissions.

Specifications can be changed without further notice

info@ph-instruments.eu

www.ph-instruments.eu+43 720 500 217