Industry

Research & Development

		Vacuum Components
Vacuum Chambers
Standard and custom-made vacuum
components, chambers and solutions

Semiconductor

Components and Chambers
Standard and custom-madeA vacuum system consists of several individual parts, whichhave to be joined together to form a unit. Detachable,
vacuum-sealed flange connections allow components to beconnected directly or with vacuum components such as pipes
or hoses. Pfeiffer Vacuum offers components with various
flange systems that meet the connection standards for many
applications and flange sizes.
The selection of proper materials and the use of high-quality
production and cleaning technologies meet the highstandards of vacuum technology and lead to a high degree oftightness and low outgassing rates (desorption). The broad
range of standard components in stock guarantee fastdelivery availability. Pfeiffer Vacuum also offers more thanstandard solutions. Components can be modified to meetyour requirements or a customized solution can be produced
to perfectly fit your needs.
We are a one-stop supplier for all stages of the process:assistance in finding the right solution for your application,
design, manufacture, quality assurance, installation and onsite service.

Table of contents
Vacuum Components■ ISO-KF■ ISO-K / ISO-F■ CF

Feedthroughs■ Rotary Feedthroughs■ Rotary-/Linear
Feedthroughs■ Linear Feedthroughs

Manipulators■ XY-Axis Precision
Manipulator■ Z-Axis Precision
Manipulator■ Port Aligner for Angularand Linear Adjustment

Viewports
Vacuum Chambers
and Solutions

l3
One of Europe´s largest
supplier of vacuum
components

Short delivery time –24 hours in Germany,48 – 72 hours in EuropeYour added valueStandard catalogue
goods and customerspecific products

About 750.000
items generally
in stock

High availability(>98 %)

Vacuum component warehouse at Pfeiffer Vacuum Components & Solutions in Göttingen with more than 750,000 parts in stockISO-KF“Kleinflansch” for Backing
and High Vacuum (HV)
Wide range of component
types, materials and sizes –optimally suited for yourvacuum system

Your added value

Helium tested forhighest quality
standards

Designed for HV applications■ Suitable for pressures up to 10-8 hPa.
■ Can be used for overpressures up to 1,500 hPa■ Two symmetrical flanges and one elastomer O-ring seal,
which is positioned by a centering ring
■ Pressing force created by a clamping ring
■ Efficient assembly and disassembly without any tools■ According to DIN 28403 and ISO 2861
■ Nominal diameter DN 10 up to DN 50
Extended pressure range to less than 10-9 hPa
by using metal seals■ Significantly higher pressing force required,created by special clamps
Alternative mounting on a base plate■ Pressing force by claw clamps or bulkhead clamps
Material:■ 1.4301/304■ 1.4404/316■ Aluminum■ Further material on request

Extensivestandardized systemcomponents for
perfect compatibility

l5

Ø A
ØD

B

C
F
ØG
ØE

Primary dimensions of ISO-KF flanges
Nominal diameter

DN 10
ISO-KF

DN 16
ISO-KF

DN 25
ISO-KF

DN 40
ISO-KF

DN 50
ISO-KFA – External diameter [mm]

30

30

40

55

75

A – External diameter [inch]

1.18

1.18

1.57

2.17

2.95

B – Flange height [mm]

5

5

5

5

5

C – [mm]

3

3

3

3

3

D – Centering ring set [mm]

12.2

17.2

26.2

41.2

52.4

E · F – Typical pipe dimension 1) [mm]14 · 220 · 228 · 244.5 · 2

57 · 3.2

G – Typical internal diameter 2) [mm]

10

16

24

40.5

51

1)
2)

 dditional pipe dimensions can be found particularly in the products “bored flange” and “half nipple”.
AThe minimum inner diameter is determined by the combination of flange, pipe and centering ring.
In addition, welding seams and manufacturing tolerances of the pipes can locally reduce the free diameter.

ISO-KF“Kleinflansch” for Backing
and High Vacuum (HV)

ISO-KF flange
O-Ring (e.g. FKM)
Centering ring

Clamping ring

ISO-KF flange

Chamber with different flange geometriesl7
Operating principle ISO-KF with clamping ring

ISO-KF on base plate with bulkhead clamp and blind holes

ISO-KF on base plate with blind holes and single claw clamp

ISO-K / ISO-F
Clamping flange for Backingand High Vacuum (HV)
Wide range of component
types, materials and sizes –optimally suited for yourvacuum system

Your added value

Helium tested forhighest quality
standards

Designed for HV applications■ Suitable for pressures up to 10-8 hPa.
■ Can be used for overpressures up to 1,500 hPa■ Two symmetrical flanges and one elastomer O-ring seal,
which is positioned by a centering ring
■ Pressing force created claw clamps (ISO-K) respectively
screws (ISO-F)■ Combination of ISO-K with ISO-F flanges possible due torotatable bolt rings■ According to DIN 28404 and ISO 1609
■ Common used sizes:
DN 63 ISO-K, DN 100 ISO-K, DN 160 ISO-K…DN 630 ISO-K
up to DN1000 ISO-F
Extended pressure range to less than 10-9 hPa
by using metal seals■ Significantly higher pressing force required. ISO-F flanges
with screws recommended. For ISO-K flanges increase thenumber of claw clamps.
Material:■ 1.4301/304■ 1.4404/316■ Aluminum■ Further material on request

Extensivestandardized systemcomponents for
perfect compatibilityl9Dimensions

J

ØD

ØF

ØC

ØA

Ø H

E

Ø G
B

Primary dimensions for ISO-K and ISO-F flanges
Nominal diameter

DN 63
ISO-K

DN 80
ISO-K

DN 100 DN 160 DN 200 DN 250 DN 320 DN 400 DN 500 DN 630
ISO-K
ISO-K
ISO-K
ISO-K
ISO-K
ISO-K
ISO-K
ISO-K

A - External diameter [mm]

95

110

130

180

240

290

370

450

550

690

A - External diameter [inch]

3.74

4.33

5.12

7.09

9.45

11.42

14.57

17.72

21.65

27.17

B – Flange height [mm]

12

12

12

12

12

12

17

17

17

22

70

83

102

153

213

261

318

400

501

651

76.1 · 3

88.9 · 3

108 · 3159 · 3219 · 3273 · 3324 · 3406 · 3508 · 4660 · 5

70

83

102

153

213

261

318

400

500

650

130

145

165

225

285

335

425

510

610

750

110

125

145

200

260

310

395

480

580

720

12

12

12

16

16

16

20

20

20

24

4·9

8·9

8·9

8 · 1112 · 1112 · 1112 · 13.5 16 · 13.5 16 · 13.5 20 · 13.5

4

4

4

4

6

6

8

8

12

12

4

6

6

8

10

12

–

–

–

–

4 · M88 · M88 · M88 · M10 12 · M10 12 · M10 12 · M12 16 · M12 16 · M12

C - Centering ring set [mm]D · E – Typical pipe dimension

1)

[mm]

F – Typical internal diameter 2) [mm]G – External diameter [mm]ISO-F flange and FLU 3)
H – Bolt holes [mm]ISO-F flange and FLU 3)
J – Height [mm]ISO-F flange and FLU
Number of bore holes · diameter [mm]ISO-F flange and FLU3)
Recommended number of bracket screws
for elastomer seals 4)
Minimal number of bracket screws
for aluminum edged seal 4)
Number of claws / screws
1)

Additional pipe dimensions can be found particularly in the products “bored flange” and “half nipple”.
The minimum inner diameter is determined by the combination of flange, pipe and centering ring. In addition, welding seams and manufacturing tolerances of the pipes can locally reduce the free diameter.
3)
FLU = Rotatable bolt ring
4)
Note the installation instructions for the component!
2)

20 · M12

ISO-K / ISO-F
Clamping flange for Backingand High Vacuum (HV)Functional principles ISO-K / ISO-F

ISO-K flange

Outer ring
O-Ring (e.g. FKM)

Centering ring

ISO-K flange

ISO-K connection with double claw clamp

ISO-F centering ring same like ISO-K

ISO-K on base plate with blind holes and single claw clamp

l 11
Functional principles ISO-K / ISO-F

Adaption ISO-K -> ISO-F
Screws M8-M12 accordingly
Rotateable collar flange
ISO-K flange
Bolt Nut Screws M8-M12
Through bore hole

ISO-F with blank flange

ISO-F on base plate with blind holes

CF
Suitable for ultra-high vacuum
applications (UHV)
Wide range of component
types, materials and sizes –optimally suited for yourvacuum system

Your added value

Helium tested forhighest quality
standards
Designed for UHV applications■ From ambient pressure up to less than 10-12 hPa■ Bakable up to 450 °C■ Two symmetrical flanges with knife-edge and flat copper
gasket which is positioned in a sealing recess■ Sufficient number of screws which provide the necessary
high pressing force■ Knife-edges press into the copper seal and form ahermetically sealed connection (gasket cannot be reused)■ According to ISO 3669 in nominal diameters
DN 10 to DN 400■ For nominal sizes larger than DN 250 different flange
dimensions are still common
Material:■ Stainless steel with low carbon content 1.4307 - sufficientfor many applications■ For higher demands, e.g. regarding strength or low
magnetizability premium steel 1.4429 ESR is recommended

Low desorption
rate guaranties
uniquely clean
vacuuml 13
Dimensions for CF flange

ØA
ØC
ØJ
ØH
D
B
F
ØG
ØE

Primary dimensions of CF flanges
Nominal diameter

DN 16 CF DN 25 CF DN 40 CF DN 50 CF DN 63 CF DN 75 CF DN 100 CF

A – External diameter [mm]

34.0

54.0

69.9

85.7

113.5

117.4

152.0

A – External diameter [inch]

1-1/3

2-1/8

2-3/4

3-3/8

4-1/2

4-5/8

6

B – Flange height [mm]

7.75

12.0

12.7

17.3

17.5

17.5

19.8

C – Bolt hole diameter for screws [mm]

27.0

41.3

58.7

72.4

92.2

102.3

130.3

D – Number · Diameter Screw bore holes [mm]6 · 4.4

4 · 6.6

6 · 6.6

8 · 8.4

8 · 8.4

10 · 8.4

16 · 8.4

E · F – Typical outside pipe diameter1) [mm]18 · 128 · 240 · 1.5

50.8 · 1.65

70 · 276.1 · 2

108 · 2

2)

16

24

37

47.5

66

72.1

104

H – Diameter cutting edge [mm]

18.3

27.7

41.9

55.9

77

86.2

115.3

J – Diameter groove for flange seal [mm]

21.4

33.0

48.25

61.8

82.5

91.6

120.6

G – Typical internal diameter[mm]

Nominal diameter

DN 130 CF DN 160 CF DN 200 CF DN 250 CF DN 300 CF DN 350 CF

A – External diameter [mm]

171.4

202.4

253.2

304.8

355.6

419.1

A – External diameter [inch]

6-3/4

8

10

12

14

16.5

B – Flange height [mm]

21.4

22.2

24.5

26.0

28.5

28.5

C – Bolt hole diameter screws [mm]

151.6

181.0

231.8

284.0

325.4

388.9

D – Number · Cross section
Screw bore holes [mm]18 · 8.4

20 · 8.4

24 · 8.4

32 · 8.4

30 · 10.5

36 · 10.5

E · F – Typical outside pipe diameter1) [mm]127 · 1.65

159 · 2205 · 2.5

256 · 3306 · 3356 · 3

G – Typical internal diameter2) [mm]

123.7

154.5

200

250

300

350

H – Diameter cutting edge [mm]

136.3

166.1

216.9

267

308.9

370.7

J – Diameter groove for flange seal [mm]

141.8

171.4

222.2

273.1

313.5

376.8

1)
2)

Additional pipe dimensions can be found particularly in the products “bored flange” and “half nipple”.
The minimum internal diameter is determined by the combination of flange, pipe and seal. In addition, welding seams andmanufacturing tolerances of the pipes can locally reduce the free diameter.

Feedthroughs
Transfer of electrical power, signals,
fluids or mechanical movements
into a vacuum
Compact

Your added value

High reliability

Very longservice life

Pfeiffer Vacuum offers you a diverse selection of vacuum
feedthroughs for electrical power, voltages, thermocouples
and fluids in all flange lines for high vacuum and ultra-highvacuum applications. Moreover, you will find mechanicalvacuum feedthroughs for rotary, linear and rotary/linear
movements, elastomer sealed for the high vacuum range,magnetically coupled or bellows-sealed for ultra-high vacuum
applications.

Rotary Feedthroughs
Elastomer-sealed Rotary Feedthroughs
DN 16 - 40 ISO-KF und DN 63 ISO-K■ With FKM shaft seal and ball bearing,greased to be suitable for vacuum■ The rotation speed can be increased by up
to a factor of two if reduced service life isacceptable■ Through shaft for directly transmittinghigh torques

Magnetically coupled Rotary Feedthroughs
Magnetic coupling with samarium-cobalt
magnets■ Stainless steel ball bearing with dry
lubrication suitable for UHV■ Hermetically sealed, suitable for UHV■ Fixing brake
■

l 15

Bellows-sealed Rotary Feedthroughs■ Hermetically sealed, suitable for UHV■ Bellows-sealed■ Stainless steel ball bearing with dry
lubrication, suitable for UHVElastomer-sealed
Rotary / Linear Feedthroughs
Elastomer-sealed Rotary/Linear FeedthroughLong Version MDD, Short Version DS■ Direct power transmission using elastomersealed shaft■ Freely rotatable and slidable■ Adjustable stroke limiting stops■ Bakeout temperature: < 110 °C

Magnetically coupled
Rotary/Linear Feedthrough■ Stainless steel ball bearing for linear androtational movement with dry lubrication
suitable for UHV■ Magnetic coupling with samarium-cobalt
magnets■ Hermetically sealed, suitable for UHV

Bellows-sealed Precision
Linear Feedthroughs■ Hermetically sealed, suitable for UHV■ Bellows-sealed■ Manual, Fine
■ Bakeout temperature: max 300 °C

Manipulators
To tilt probes or components
under vacuum
Maximum accuracy andexcellent reproducibilityYour added value

High reliability

Manipulator flanges are subjected to sizable forces due toatmospheric pressure, particularly where large nominal
diameters are involved. To ensure that flanges remain in astable position even under vacuum, we place great
importance on the inherent rigidity when designing ourmanipulators and optimize them by using the Finite Elements
Method (FEM) in our calculations. Together with the
installation of high quality mechanical components this meansthat movements are extremely precise, smooth and free ofplay with excellent reproducibility. The low wear also means
higher reliability and a very long service life.

Very longservice lifel 17
XY-Axis Precision
Manipulator■ Precision cross roller
guides■ Zero-backlash andno slip-stick effect■ Guidance and drive wearfree and maintenance-free■ Extremely stable designconcept minimizes position
offset due to pressurechanges

Z-Axis Precision
Manipulator■ Recirculating ball bearing
guides and recirculatingball screw drive■ Zero backlash andno slip-stick effect■ Guide and drive are wearfree and maintenance-free■ Extremely stable designconcept minimizes position
offset due to pressurechanges

Port Aligner for Angularand Linear Adjustment■ Ball joints for easy angularadjustment■ Adjustment angle: 3°■ Maximum angle andstroke simultaneously
usable■ Flanges with through holesViewports
To visually observe processes or
specific transfer of electromagnetic
waves
Large selection of glass
types, optimally suited foryour vacuum system

Your added value

Extensive standardized
system components for
perfect compatibility

Viewports are mainly used to visually observe processes.
They can, however, also be used for the specific transfer ofelectromagnetic waves. For this, the transmission and theoptical quality of the glasses should be considered.
We provide different glass material combined with various
types of vacuum flange to suit your specific application.

Viewports■ ISO-K, ISO-F, CF Viewports■ CF Shutter■ ISO-KF, ISO-K, CF Glass Retainers■ Glasses for Retainers

Vacuum Chambers

l 19Standard and custom-madevacuum chambers and solutions
At the heart of a vacuum system is the vacuum chamber thatoffered as either standard or customized for your specificapplication. Pfeiffer Vacuum‘s vacuum chambers meet thehighest quality and engineering standards providing vacuum
solutions precisely designed to meet our customers‘ needs.
They are used for medium vacuum to ultra-high vacuum
applications and can also be designed, produced and tested
as pressure chambers for overpressure of more than 500 hPa
in accordance with the Pressure Equipment Directive(97/23/EC).
The range of vacuum chambers extends from small recipientsfor lab applications to large-sized space simulation andcoating chambers. Pfeiffer Vacuum offers full service from asingle source: Application consultation, design, production,
quality assurance, assembly and on-site service. From thedesign to project management and finishing, we will provide
you a perfect vacuum solution: high quality vacuum chambers
in single item and serial production.
Your advantages

High vacuum chambers,
cubical with stainless steel door
High vacuum chambers,
cubical with acrylic glass door
High vacuum chambers, horizontal
High vacuum chambers, vertical
Medium vacuum chambers, verticalwith acrylic glass cover
Modular vacuum chambers

0 to 40 °C

DN 750

DN 600

DN 500

DN 400

DN 320

DN 300

DN 250Standard vacuum chambers

Temperature
range

Pressure
range

Nominal size

-15 to 150 °C■

1 · 10-5 hPa up to ambient pressure■

Vacuum solutions designed precisely for your application
Safe and reliable
Full service from a single source
Versatile applications

1 · 10-7 hPa to 500 hPa overpressure■

1 · 10-7 hPa up to ambient pressure■Vacuum Chambers
Standard and custom-madevacuum chambers and solutions
Cost saving –pre-configurated designYour added value

Proven tough designfor high reliability andsafetyStandard Vacuum Chambers
Standardized chambers for your vacuum applications
Standard vacuum chambers are standardized shapes where
you can select the port types and locations. They can be
configured to the vacuum solution you need.
Customer benefits■ Pre-configured shapes■ Customized ports■ Proven robust design
Typical applications■ Research & development■ Semiconductor■ Coating■ Analytics■ Industry

Individual adaption
to your processesl 21

Series high vacuum chambers are designed for a pressure
range from ambient pressure up to 1 · 10-7 hPa. Standardized
base bodies are available in four versions: Cubical, cylindricalhorizontal, cylindrical vertical and modular chamber system.
Nominal sizes are available from 250 mm to 750 mm.

High vacuum chamber

Medium vacuum chamber

Modular chamber components

Vacuum Chambers
Standard and custom-madevacuum chambers and solutions
Optimally adjustable toyour processYour added value

Best quality andlong life-time
Custom vacuum chambers
Individually designed chambers for yourvacuum applications
With many years of experience we have the know-how ofvirtually all requirements and can provide professional
guidance for system specifications, design and engineering.
Our physicists, designers, project managers and production
specialists have extensive experience in a wide range of uses
in all market segments. The tasks are based on yourrequirements: our starting point on the path to a finishedproduct can range from a rough sketch to a complete set of
blueprints. Our customers include a great number ofrenowned large research facilities and universities, who wesupply with UHV vacuum chambers, cryostats and accelerator
components as well as reputable customers from industry,
whose development and production areas we equip withvacuum chambers.
Customer benefits■ Individual design■ Proven, robust design■ Optimal process adaption■ Extensive systems guidance typical applications■ For all areas of vacuum technology
All vacuum chambers■ Can be adapted to meet technical requirements■ Can be equipped with the necessary accessories■ Are tested for leaks

Proven toughdesign for highreliability andsafetyl 23

Technical design Vacuum chambers are produced using highquality materials. Special cleaning procedures guarantee
contamination-free, vacuum-stable surfaces, to meet thehighest of standards and are ready for immediate installation.
All production phases are documented and quality tested ineach production phase. You will receive a quality reportcontaining the leak test log and other test results.
Standards
We use 1.4301 (304) stainless steel for pipes, chamber walls
and ISO flanges and 1.4307 (304 L) for CF flanges. Premium
stainless steel 1.4429 ESU (316 LN ESR) is available to provide
minimum outgasing rate and high strength even after vacuum
annealing above 950°C. Our standard interior and exterior
treatment is glass bead blasted. Surfaces can be sanded,sanded and electro-polished, chemically pickled andpassivated, as well as vacuum annealed.
OptionsYour vacuum chamber can be expanded in numerous ways.
We offer an extensive selection of accessories, fittings andattachments. We can also supply the following services uponrequest:■ Chamber materials: additional stainless steels andaluminum alloys■ Material certification■ Water cooling: as C-channel, pillow plate cooling or
double walled.
■ Chamber frames■ Chamber heating■ Cleaning and demagnetization annealing under vacuum■ Design and production of a pressure chamber■ FEM (Finite Element Method) calculations■ Assembly under cleanroom conditions
Product testingIn addition to the standard, sniffing helium leak test.
Other tests can be carried out:
■
■
■
■
■
■
■
■
■

Helium leak testing (local and integral)
Baking-out and final vacuum residual gas analysis
Pressure testing
3D check
Permeability testingElectrical insulation testing
Dye penetrant inspection
X-ray inspection of welding seam
X-ray Fluorescence Analyzer (XRF)

On request, we will also be happy to put together a systemfor you that includes all ports, matching pumps, components
and valves.

All information is subject to change without prior notice. PI 0543 PEN (September 2022/PoD)Are you looking for youroptimized vacuum solution?
Please contact us:

Pfeiffer Vacuum
Components & Solutions GmbHGermany
T +49 551 999 63-0

www.pfeiffer-vacuum.com