㔚ജᄌ឵៊ᄬ䉕㕟ᣂ⊛䈮ૐᷫ䈜䉎ᄙ㊀บᒻ䉭䊷䊃ဳ⓸ൻ䉧䊥䉡䊛䊃䊤䊮䉳䉴䉺㩷㩷ઍ⴫⎇ⓥ⠪ 㩷ർᶏ㆏ᄢቇ ㊂ሶ㓸Ⓧࠛ࡟ࠢ࠻ࡠ࠾ࠢࠬ⎇ⓥ࠮ࡦ࠲࡯ ᢎ᝼ ᯅ⹣ ଻౒ห⎇ⓥ⠪ർᶏ㆏ᄢቇ ㊂ሶ㓸Ⓧࠛ࡟ࠢ࠻ࡠ࠾ࠢࠬ⎇ⓥ࠮ࡦ࠲࡯ ಎᢎ᝼ ૒⮮ ᆭ෹        หඳ჻⺖⒟ ↰᧛ 㓉ඳ        หୃ჻⺖⒟ ᄢ੗ ᐘᄙ㩷䋱䋮䈲䈛䉄䈮㩷㩷㩷 㩷 ⋭䉣䊈䊶ⅣႺ଻ో䈱ⷰὐ䈎䉌䇮㔚᳇䉣䊈䊦䉩䊷䈱៊ᄬ䉕഍⊛䈮ૐᷫ䈜䉎䈖䈫䈏ᦨ㊀ⷐ⺖㗴䈱䋱䈧䈪䈅䉎䇯ᖱႎ䊶ኅ㔚⵾ຠ䇮಄ᥦᚱ⵾ຠ䇮䊊䉟䊑䊥䉾䊄ゞ䊶㔚ゞ䇮䊎䊦䊶Ꮏ႐⸳஻䈭䈬䇮䈾䈫䉖䈬ో䈩䈱⵾ຠ䊶⸳஻䈪䈲䇮੤ᵹ㺍⋥ᵹᄌ឵䉇㔚࿶୯ᄌ឵䉕฽䉃㔚Ḯ䈏ⵝ஻䈘䉏䈩䈍䉍䇮䉟䊮䊋䊷䉺䈫✚⒓䈘䉏䈩䈇䉎㔚ജᄌ឵䉲䉴䊁䊛䈏⚵䉂ㄟ䉁䉏䈩䈇䉎䇯䈠䈱ਛᨔ⚛ሶ䈫䈚䈩䉲䊥䉮䊮䋨㪪㫀䋩䊃䊤䊮䉳䉴䉺䈏૶↪䈘䉏䈩䈇䉎䈏䇮䊃䊤䊮䉳䉴䉺േ૞ᤨ䈱㔚ജ៊ᄬ䉕䈘䉌䈮ૐᷫ䈜䉎䈖䈫䈏᳞䉄䉌䉏䈩䈍䉍䇮㪪㫀 ⚛ሶ䈱ᕈ⢻㒢⇇䉕⿥䈋䉎㜞ല₸⚛ሶ䈱㐿⊒䈏ᕆോ䈫䈭䈦䈩䈇䉎䇯㩷㩷㩷㪘㫃㪞㪸㪥㪆㪞㪸㪥 㜞㔚ሶ⒖േᐲ䊃䊤䊮䉳䉴䉺㩿㪟㫀㪾㪿㩷㪜㫃㪼㪺㫋㫉㫆㫅㩷㪤㫆㪹㫀㫃㫀㫋㫐㩷㪫㫉㪸㫅㫊㫀㫊㫋㫆㫉㩷㪑㩷㪟㪜㪤㪫㪀䈲䇮㜞䊌䊪䊷㩿㜞⠴࿶䇮㜞㔚ᵹኒᐲ㪀േ૞䇮ૐ៊ᄬേ૞䇮䈅䉎䈇䈲㜞᷷䈱ⅣႺਅ䈪േ૞น⢻䈭䈖䈫䈎䉌㔚ജ䉴䉟䉾䉼䊮䉫䊂䊋䉟䉴䈫䈚䈩⋓䉖䈮⎇ⓥ䈘䉏䈩䈇䉎䇯㔚ജᄌ឵ᤨ䈮ᾲ៊ᄬ䈫䈭䉎䉥䊮ᛶ᛫䈮䈧䈇䈩䈲䇮㪞㪸㪥 䈱䉅䈧㜞䈇⛘✼⎕უ㔚⇇䈎䉌ᄢ᏷䈭ૐਅ䈏ᦼᓙ䈘䉏䇮ห䈛⠴࿶䈱 㪪㫀 䊂䊋䉟䉴䈫Ყ䈼䈩 㪈㪆㪉㪇 ⒟ᐲ䈱୯䈏ႎ๔䈘䉏䈩䈇䉎㪲㪈㪴䇯䈚䈎䈚䈭䈏䉌䇮䊌䊪䊷䊂䊋䉟䉴ᔕ↪䈮ะ䈔䈩䈲䇮䈘䉌䈭䉎ૐ䉥䊮ᛶ᛫ൻ䉇䈚䈐䈇୯㔚࿶䈱೙ᓮ䇮䈅䉎䈇䈲ఝ䉏䈢㔚ᵹ቟ቯᕈ䈱ታ⃻䈭䈬䈫䈇䈦䈢⺖㗴䈏䈅䉎䇯㩷㩷 㩷 ᧄ⎇ⓥ䈪䈲䇮䈚䈐䈇୯㔚࿶೙ᓮ䈫䉭䊷䊃೙ᓮᕈะ਄䉕⋡⊛䈫䈚䈩࿑ 㪈 䈮␜䈜䉋䈉䈭ᄙ㊀บᒻ䉼䊞䊈䊦㩿㪤㫌㫃㫋㫀㩷㪤㪼㫊㪸㩷㪚㪿㪸㫅㫅㪼㫃㩷㪑㩷㪤㪤㪚㪀㩷㪟㪜㪤㪫 䉕૞⵾䈚䇮⹏ଔ䉕ⴕ䈦䈢䇯䋲ᰴర㔚ሶጀ䋨㪉㪛㪜㪞䋩䉕บᒻဳ䉭䊷䊃㔚ᭂ䈏൮䉂ㄟ䉃᭴ㅧ䉕ᜬ䈦䈩䈍䉍䇮㔚⇇೙ᓮᕈ䇮ဋ৻ᕈ䈍䉋䈶቟ቯᕈ䈱ะ਄䈏ᦼᓙ䈘䉏䇮䈖䈖䈪䈲䇮䊂䊋䉟䉴䈱ၮᧄ․ᕈ䈫㔚ᵹ቟ቯᕈ䈱⹏ଔ䉕ⴕ䈦䈢䇯㩷㩷㩷㧙㧙

W=60Pm

periodicaltrench

Source

Gate
Drain
2DEG

LG=0.5Pm
AlGaN

GaN
AlGaN

Gate

GaNd

W toptrench

2DEG

d=50nm

W=60Pm(mesa/trench:150๟ᦼ)࿑ 1 MMC HEMT ߩ᭴ㅧᮨᑼ࿑
㩷㪉䋮ታ㛎ᣇᴺ㩷ᧄ ⎇ ⓥ 䈪 䈲 䇮 䉰 䊐 䉜 䉟 䉝 ၮ ᧼ ਄ 䈮 ᦭ ᯏ ㊄ ዻ ᳇ ⋧ ᚑ 㐳 㩿㪤㪦㪭㪧㪜㪀 䈚 䈢 㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㪘㫃㪇䇯㪉㪌㪞㪸㪇䇯㪎㪌㪥㪆㪞㪸㪥 䊓䊁䊨ធว᭴ㅧ䉕↪䈇䈢䇯㪘㫃㪞㪸㪥 㓚ოጀෘ䈘䈲 㪊㪇㫅㫄 䈪䈅䈦䈢䇯ቶ᷷䈮䈍䈔䉎ౖဳ⊛䈭 㪉㪛㪜㪞 䈱䉲䊷䊃ᛶ᛫䈍䉋䈶㔚ሶ⒖േᐲ䈲䈠䉏䈡䉏 㪋㪏㪇:㪆㫊㫈㪅䇮㪈㪊㪌㪇㪺㫄㪉㪆㪭㫊 䈪䈅䈦䈢䇯㩷
૞⵾ᣇᴺ䈲䇮䈲䈛䉄䈮䇮㪘㫃㪞㪸㪥㪆㪞㪸㪥 䊓䊁䊨ធว᭴ㅧ਄䈮 㪩㪝㪄㪧㪜㪚㪭㪛 䈮䉋䉍 㪪㫀㪦㪉
䉕ၸⓍ䈚䇮㔚ሶ䊎䊷䊛㔺శ䈫䉡䉢䉾䊃䉣䉾䉼䊮䉫䈮䉋䉍䊌䉺䊷䊆䊮䉫䉕ᣉ䈚䈢䇯䈠䈱䊌䉺䊷䊆䊮䉫䉕䊄䊤䉟䉣䉾䉼䊮䉫䈮䈍䈔䉎䊙䉴䉪䊌䉺䊷䊮䈫䈚䈩䇮㪜㪚㪩㪄㪩㪠㪙㪜 䈮䉋䉍䉧䉴ᷙวᲧ 㪚㪟㪋㪆㪟㪉㪆㪘㫉㪆㪥㪉㩷 㪔㩷 㪌㪆㪈㪌㪆㪊㪆㪊㩷 㫊㪺㪺㫄 䈱᧦ઙਅ䈪䊄䊤䉟䉣䉾䉼䊮䉫䉕ⴕ䈇㪲㪉㪴䇮๟ᦼ⊛䊃䊧䊮䉼᭴ㅧ䉕ᒻᚑ䈚䈢䇯䉣䉾䉼䊮䉫ᷓ䈘䈲䇮䊃䊧䊮䉼䈮䈩ቢో䈮 㪉㪛㪜㪞 䉕㒰෰䈚䇮䊒䊤䉵䊙䉻䊜䊷䉳䉕ᦨዊ㒢䈮ᛥ䈋䉎䈢䉄䈮 㪌㪇㫅㫄 䈫䈚䈢䇯䈠䈱ᓟ䇮㪪㫀㪦㪉 䉕ข䉍㒰䈐䇮䊄䊧䉟䊮㪆䉸䊷䉴㔚ᭂ䈫䈚䈩䇮㪫㫀㪆㪘㫃㪆㪫㫀㪆㪘㫌 䉕⌀ⓨ⫳⌕䈚䈩䇮㪏㪇㪇㷄䈪 㪈 ಽ㑆ᾲಣℂ䉕ⴕ䈦䈢䇯ᦨᓟ䈮䇮䉭䊷䊃㔚ᭂ䈫䈚䈩 㪥㫀㪆㪘㫌 䉕䊃䊧䊮䉼਄䈮⌀ⓨ⫳⌕䈚䈢䇯⴫㕙䊌䉾䉲䊔䊷䉲䊢䊮ಣℂ䈲ⴕ䈦䈩䈇䈭䈇䇯૞⵾䈚䈢䊂䊋䉟䉴䈲䈜䈼䈩䉭䊷䊃㐳 㪣㪞㪔㪇㪅㪌P㫄 䈪䈅䉎䇯੹࿁䈲䇮Ყセ䈱䈢䉄䈮䉭䊷䊃᏷ 㪍㪇P㫄䇮䉭䊷䊃㐳 㪇㪅㪌P㫄 䈱ᦨ䉅৻⥸⊛䈭䊂䊋䉟䉴᭴ㅧ䈪䈅䉎䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䉕หᤨ䈮૞⵾䈚䈢䇯㩷㩷㪊䋮⚿ᨐ䈫⠨ኤ㩷࿑ 㪉 䈮੹࿁૞⵾䈚䈢䉭䊷䊃㪄䊄䊧䉟䊮㑆〒㔌㩿㪣㪞㪛㪀㩷 䈏 㪈㪇P㫄 䈱 㪤㪤㪚㩷 㪟㪜㪤㪫 䈱 㪪㪜㪤௝䉕␜䈜䇯࿑ 㪉 䈎䉌ಽ䈎䉎䉋䈉䈮䉭䊷䊃㔚ᭂ⋥ਅ䈮๟ᦼ⊛䊃䊧䊮䉼᭴ㅧ䈏ᒻᚑ䈘䉏䈩䈇䉎䇯䉁䈢䇮䈖䈱࿑䈎䉌䊜䉰᏷ 㪮㫋㫆㫇 䈫䊃䊧䊮䉼᏷ 㪮㪹㫆㫋 䈏䈠䉏䈡䉏䇮㪎㪇㫅㫄䇮㪊㪊㪇㫅㫄 䈫್ᢿ䈪䈐䉎䇯䉭䊷䊃᏷ 㪍㪇P㫄 ਛ䈮䊜䉰㪆䊃䊧䊮䉼䈏 㪈㪌㪇 ๟ᦼ฽䉁䉏䈩䈇䉎䇯ታല⊛䈭䉭䊷䊃᏷㩷㧙㧙

SourceGateperiodicaltrench

LGD=10Pm

Drain

Wtop=70nm

࿑ 2 ૞⵾䈚䈢䊂䊋䉟䉴 SEM ௝㩷drain current (mA)25

planar VG=+1V0V
20 W=60Pm
15
105058-2V

6-3V4(a)10MMC(W top=70nm)

10-1V-4V0

12VG=+1V0V-1V

20-2V0drain voltage (V)510(b)

࿑ 3 (a)ࡊ࡟࡯࠽ဳ߅ࠃ߮(b)MMC HEMT ߩ IDS-VDS ․ᕈ

㩷㪮㫋㫆㫇㪄㫊㫌㫄 䈲䇮㪮㫋㫆㫇 䉕 㪈㪌㪇 ๟ᦼಽ⿷䈚ว䉒䈞䉎䈫 㪈㪇㪅㪌P㫄 䈫䈭䉎䇯㩷࿑ 㪊 䈮䊒䊧䊷䊅ဳ䈍䉋䈶 㪤㪤㪚㩷㪟㪜㪤㪫 䈱ቶ᷷䈮䈍䈔䉎䊄䊧䉟䊮㔚ᵹ㵥㔚࿶㩿㪠㪛㪪㩷㪄㪭㪛㪪㪀․ᕈ䉕␜䈜䇯࿑ 㪊 䈮␜䈜䉋䈉䈮䇮㪤㪤㪚㩷㪟㪜㪤㪫 䈲䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈫ห᭽䈮ቢో䈭䉼䊞䊈䊦䊏䊮䉼䉥䊐䉕઻䈦䈢⦟ᅢ䈭 㪠㪛㪪㩷㪄㪭㪛㪪 ․ᕈ䉕␜䈚䈢䇯ታല⊛䈭䉭䊷䊃᏷䈪ⷙᩰൻ䈚䉭䊷䊃䊥䊷䉪㔚ᵹ䉕Ყセ䈚䈢䈫䈖䉐䇮ਔ⠪䈫䉅䈾䈿ห╬䈱୯䉕␜䈚䈢䇯䈖䈱⚿ᨐ䈎䉌䇮㪤㪤㪚㩷 㪟㪜㪤㪫 䈱䊜䉰஥㕙䈎䉌䈱䉭䊷䊃䊥䊷䉪㔚ᵹ䈲䇮䊜䉰਄㕙䈎䉌䈱䊥䊷䉪㔚ᵹ䈫Ყ䈼ήⷞ䈪䈐䉎䈫⠨䈋䉌䉏䉎䇯ታ㓙䇮㊄ዻ䈫 㪉㪛㪜㪞 ┵⇇㕙䈱ᢛᵹ․ᕈ䈏ታ㛎⚿ᨐ䈫⸘▚䈮䉋䈦䈩ႎ๔䈘䉏䈩䈇䉎㪲㪊㪃㩷㪋㪃㩷㪌㪴䇯㩷㪤㪤㪚㩷㪟㪜㪤㪫 䈱䉭䊷䊃೙ᓮᕈ䉕⺞䈼䉎䈢䉄䈮䇮䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈫 㪤㪤㪚㩷㪟㪜㪤㪫 䈱䉰䊑䉴䊧䉾䉲䊢䊦䊄․ᕈ䈍䉋䈶વ㆐․ᕈ䉕⹏ଔ䈚䈢䇯ਔ⠪䈱䉰䊑䉴䊧䉾䉲䊢䊦䊄㗔ၞ䈪䈱䊄䉟䊮㔚ᵹ䉕Ყセ䈚䈢䉅䈱䉕࿑ 㪋 䈮␜䈜䇯䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈱 㪪 ୯㩿㫊㫌㪹㪄㫋㪿㫉㪼㫊㪿㫆㫃㪻㩷㫊㫃㫆㫇㪼㪀䈲 㪈㪐㪇㫄㪭㪆㪻㪼㪺㪸㪻㪼 䈪䈅䈦䈢䇯䈖䈱୯䈲䇮㪘㫃㪞㪸㪥㪆㪞㪸㪥㩷 㪟㪜㪤㪫 䈱ႎ๔଀䈮ㄭ䈇୯䈪䈅䉎㪲㪍㪴䇯ኻᾖ⊛䈮 㪤㪤㪚㩷㪟㪜㪤㪫 䈱 㪪 ୯䈲 㪈㪈㪇㫄㪭㪆㪻㪼㪺㪸㪻㪼 䈫⋧ኻ⊛䈮ዊ䈘䈭୯䈪䈅㩷㧙㧙

10-1

VDS=6Vdrain current (A)10-2

LGD=10Pm

10-3
10-4
10-5
10-6planar

10-7
10MMC
S୯=110mV/dec-8

10-9-6-5-4-3-2
gate voltage (V)-10࿑ 4 ࡊ࡟࡯࠽ဳ߅ࠃ߮ MMC HEMT ߩࠨࡉࠬ࡟࠶࡚ࠪ࡞࠼․ᕈ

㩷䈦䈢䇯䉁䈢䇮䊄䊧䉟䊮㔚ᵹ䈮䈍䈔䉎䉥䊮㪆䉥䊐Ყ䈲䇮䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈫Ყセ䈚䈩 㪉 ᩴ㜞䈇⚿ᨐ䈫䈭䈦䈢䇯㩷࿑ 㪌㩿㪸㪀䈮✢ᒻ㗔ၞ㩿㪭㪛㪪㪔㪇㪅㪌㪭㪀䈮䈍䈔䉎ਔ⠪䈱વ㆐․ᕈ䉕␜䈜䇯࿑ 㪌㩿㪸㪀䈎䉌ಽ䈎䉎䉋䈉䈮䇮㪤㪤㪚㩷 㪟㪜㪤㪫 䈱䈚䈐䈇୯㔚࿶䈲䈍䉋䈠㪄㪉㪅㪌㪭 䈪䈅䉍䇮䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈫Ყセ䈚䈩 㪉㪭 એ਄ᱜᣇะ䈮䉲䊐䊃䈚䈩䈇䉎䇯䉁䈢䇮ታല⊛䈭䉭䊷䊃᏷䈏 㪈㪇㪅㪌P㫄 䈫ㅢᏱ䈱䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈱 㪈㪆㪌 ⒟ᐲ䈮䉅㑐䉒䉌䈝䇮䊄䊧䉟䊮㔚ᵹ䇮⋧੕䉮䊮䉻䉪䉺䊮䉴㩿㪾㫄㪀䈫䉅䈮ห⒟ᐲ䈱୯䈏ᓧ䉌䉏䈢䇯䈖䈱㔚ᵹ㚟േ⢻ജჇᄢ䈱ේ࿃䈮㑐䈚䈩䈲੹䈱䈫䈖䉐᣿䉌䈎䈮䈭䈦䈩䈇䈭䈇䈏䇮㪤㪤㪚 ᭴ㅧ䈮䈍䈔䉎 㪉㪛㪜㪞 䈱࿐䈇ㄟ䉂ലᨐ䇮㜞䉟䊮䊏䊷䉻䊮䉴䉼䊞䊈䊦䇮䈍䉋䈶䊜䉰஥㕙䈎䉌䈱ᾲ᡼ᢔലᨐ䈏น⢻ᕈ䈫䈚䈩⠨䈋䉌䉏䉎䇯㩷㪤㪤㪚 ᭴ㅧ䈮䈍䈔䉎䈚䈐䈇୯㔚࿶䈱䉲䊐䊃䈮䈧䈇䈩ᬌ⸛䈜䉎䈢䉄䈮䇮ᢙ୯⸘▚䈮䉋䉍㪭㪛㪪㪔㪇㪭 䈱᧦ઙਅ䈪䊜䉰᭴ㅧᢿ㕙䈱 㪉 ᰴర䊘䊁䊮䉲䊞䊦ಽᏓ䉕⺞䈼䈢䇯䉼䊞䊈䊦᏷䈲૞⵾䈚䈢䊂䊋䉟䉴䈫ห᭽䈱 㪮㫋㫆㫇㪔㪎㪇㫅㫄䇮䉭䊷䊃㔚࿶䈲䈚䈐䈇୯㔚࿶ㄭற䈱㪄㪉㪅㪌㪭 䈮⸳ቯ䈚䈢䇯䉲䊢䉾䊃䉨䊷㓚ო㜞䈘䈲 㪈㪅㪋㪼㪭 䈫䈚䈢㪲㪎㪴䇯࿑ 㪌㩿㪹㪀䈮䈠䈱⚿ᨐ䉕␜䈜䇯䊜䉰䉭䊷䊃᭴ㅧ䈪䈲䇮஥㕙䉭䊷䊃䈏 㪉㪛㪜㪞 ┵䈮ធ䈚䈩䈇䉎䈢䉄䇮䊜䉰਄㕙䈎䉌䈣䈔䈪䈲䈭䈒ᮮᣇะ䈎䉌䈱㔚⇇䈱ലᨐ䈏䈅䉎䇯䉼䊞䊈䊦᏷䈏⁜䈒䈭䉎䈫䇮஥㕙䉭䊷䊃䈎䉌䈱㔚⇇䈏䉝䊮䊄䊷䊒 㪞㪸㪥 ጀ䉕ㅢ䈛䈩ല₸⦟䈒䊘䊁䊮䉲䊞䊦䉕ᄌൻ䈘䈞䇮㪉㪛㪜㪞 䉕࿐䈇ㄟ䉃䉋䈉䈮೙ᓮ䈚䈩䈇䉎䇯䈖䈱ലᨐ䈮䉋䉍䇮㪉㪛㪜㪞 ㄭற䈮䈩ᄢ䈐䈒䊘䊁䊮䉲䊞䊦䈏ᒁ䈐਄䈕䉌䉏䉎䇯䈠䈱䈢䉄䇮㪤㪤㪚㩷 㪟㪜㪤㪫 䈪䈲䈚䈐䈇୯㔚࿶䈏ᱜᣇะ䈮䉲䊐䊃䈜䉎䇯䉼䊞䊈䊦᏷䉕ᄌ䈋䈩⸘▚䉕ⴕ䈦䈢䈫䈖䉐䇮䈖䈱䉋䈉䈭䉭䊷䊃㔚ᭂ䈮䉋䉎 㪉㪛㪜㪞 䈱࿐䈇ㄟ䉂ലᨐ䈲䇮㪮㫋㫆㫇 䈏 㪈㪇㪇㫅㫄 એਅ䈮䈭䉎䈫㗼⪺䈮⃻䉒䉏䉎䈖䈫䈏䉒䈎䈦䈢䇯⹦⚦䈲䉁䈣᣿䉌䈎䈪䈲䈭䈇䈏䇮䉭䊷䊃㚟േജ䈱ะ਄䇮䈅䉎䈇䈲䉼䊞䊈䊦ౝ䈱㔚⇇ಽᏓ䈱ဋ৻ൻ䈮䉋䉍䇮୘䇱䈱䉼䊞䊈䊦䈮䈍䈔䉎㔚㩷㧙㧙

2.5gm (mS)

2.5planargm

2.0gm

1.5

1.0

1.0

0.5
0-6

0.5

MMC-5-4-3-2-10drain current (mA)

2.0 LGD=10Pm
1.5

3.0

VDS=0.5V

Wtop=70nm
Gate

2DEG
AlGaN
GaN

VG = -2.5 V

0gate voltage (V)d = 50nm

0 eV

4.0 eV(b)(a)࿑ 5 (a)✢ᒻ㗔ၞ(VDS=0.5V)ߦ߅ߌࠆࡊ࡟࡯࠽ဳ ߅ࠃ߮ MMC HEMT ߩવ㆐․ᕈ㧘(b)MMC ᭴ㅧᢿ㕙ߢߩ 2 ᰴరࡐ࠹ࡦࠪࡖ࡞ಽᏓ㩷㩷ᵹ㚟േ⢻ജ䈏ะ਄䈚䈢น⢻ᕈ䈏䈅䉎䇯㩷࿑ 㪍 䈲䊒䊧䊷䊅ဳ䈍䉋䈶 㪤㪤㪚㩷㪟㪜㪤㪫 䈱 㪠㪛㪪㪄㪭㪛㪪 ․ᕈ䉕ห䈛㔚ᵹ䊧䊔䊦䈪Ყセ䈚䈢䉅䈱䈪䈅䉎䇯䉭䊷䊃㔚࿶䈲䇮ਔ⠪䈫䉅 㪇㪭 䈪䈅䉎䇯ਔ⠪䈱 㫂㫅㪼㪼 㔚࿶㩿㪭㫂㫅㪼㪼㪀䉕Ყセ䈜䉎䈫䇮㪤㪤㪚㩷㪟㪜㪤㪫 䈱䈾䈉䈏 㪊㪭 䈾䈬ૐ䈒䈭䈦䈩䈇䉎䇯䊂䊋䉟䉴᭴ㅧ䈱㆑䈇䈮䉋䉎 㪭㫂㫅㪼㪼 䈱ᄌൻ䉕⺞䈼䉎䈢䉄䈮䇮⇣䈭䉎 㪣㪞㪛㩿㪔㪈䇮㪈㪇P㫄㪀䉕ᜬ䈧䊒䊧䊷䊅ဳ䈍䉋䈶 㪤㪤㪚㩷 㪟㪜㪤㪫 䈱㪠㪛㪪㪄㪭㪛㪪 ․ᕈ䉕⹏ଔ䈚䈢䇯䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈪䈲䇮㪣㪞㪛 䈱Ⴧട䈮઻䈦䈩䇮✢ᒻ㗔ၞ䈪䈱䊄䊧䉟䊮㔚ᵹ䈱௑䈐䈏ᷫዋ䈚䇮㪭㫂㫅㪼㪼 䈲Ⴧട䈚䈢䇯䉭䊷䊃㐳䈍䉋䈶䉭䊷䊃㵥䉸䊷䉴㑆〒㔌㩿㪣㪞㪪㪀䈏ห䈛䈪䈅䉏䈳䇮䊄䊧䉟䊮㔚ᵹ䈱௑䈐䈲䉭䊷䊃㵥䊄䊧䉟䊮㑆㗔ၞ䈱䉝䉪䉶䉴ᛶ᛫䈮䉋䈦䈩ᡰ㈩䈘䉏䉎䇯㩷drain current (mA)

25

VG=0V
LGD=10Pm

20

MMC

1521
20

10planar5019planar

18
17
20244

6MMC6 8 10 1281012drain voltage (V)࿑ 6 䊒䊧䊷䊅ဳ䈍䉋䈶 MMC HEMT 䈱 IDS-VDS ․ᕈ(ห䈛㔚ᵹ䊧䊔䊦)㩷㧙㧙䈧䉁䉍䇮㪣㪞㪛 䈏ᑧ䈶䉎䈫䇮䈠䈱ಽ䈱䉝䉪䉶䉴ᛶ᛫䈏Ⴧ䈋䉎䈢䉄䈮䇮䊄䊧䉟䊮㔚ᵹ䈱௑䈐䈏ᷫዋ䈚䇮㪭㫂㫅㪼㪼 䈏Ⴧട䈜䉎䇯䈖䈱⚿ᨐ䈲䇮㪣㪞㪛 䈱Ⴧട䈮઻䈦䈩㔚ᵹ䈱௑䈐䈏ᷫዋ䈜䉎䈫䈇䈉ႎ๔଀䈫৻⥌䈚䈩䈇䉎㪲㪍㪴䇯ኻᾖ⊛䈮䇮㪤㪤㪚㩷㪟㪜㪤㪫 䈪䈲䇮㪣㪞㪛 䉕 㪈P㫄 䈎䉌 㪈㪇P㫄 䈻ᄌൻ䈘䈞䈩䉅䇮䊄䊧䉟䊮㔚ᵹ䈱௑䈐䈱ᷫዋ䈱ഀว䈲䇮䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈮Ყ䈼㕖Ᏹ䈮ዊ䈘䈎䈦䈢䇯䈠䈱䈢䉄䇮㪭㫂㫅㪼㪼 䈱Ⴧട䈱ഀว䉅ዊ䈘䈇䇯㪤㪤㪚㩷 㪟㪜㪤㪫 䈪䈲䇮䉼䊞䊈䊦᏷䈏㪈㪇㪇㫅㫄 એਅ䈮䈭䉎䈫䉼䊞䊈䊦䈱䉟䊮䊏䊷䉻䊮䉴䈲䇮ᢙ 㫂:䈫䈭䉍䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䉋䉍 㪉ᩴᄢ䈐䈇୯䈫䈭䉎䇯䈠䈱䈢䉄䇮㪣㪞㪛 䈏㐳䈒䈭䈦䈩䉅⋧ኻ⊛䈮䉝䉪䉶䉴ᛶ᛫Ⴧട䈱ഀว䈏ዊ䈘䈒䇮䊄䊧䉟䊮㔚ᵹ䈱ᄌൻ䈮ᄢ䈐䈭ᓇ㗀䉕෸䈿䈘䈭䈇䈫ᕁ䉒䉏䉎䇯㩷࿑ 㪍 䈮䈍䈇䈩䊄䊧䉟䊮㔚ᵹ䈱▸࿐䉕⁜䈒䈚䈩․ᕈ䉕Ყセ䈜䉎䈫䇮䊒䊧䊷䊅ဳ 㪟㪜㪤㪫䈲㘻๺䊄䊧䉟䊮㔚ᵹ䈏ᷫዋ䈚䈩䈇䉎䇯䊄䊧䉟䊮㔚ᵹ䈏ᵹ䉏䉎䈖䈫䈮䉋䉍䉼䊞䊈䊦ਛ䈮ᾲ䈏⫾䈋䉌䉏䉼䊞䊈䊦᷷ᐲ䈏਄᣹䈚䇮䈠䈱᷷ᐲ਄᣹䈮઻䈉䊄䊥䊐䊃ㅦᐲ䈱ૐਅ䈏⿠࿃䈚䈩䈇䉎䈫⠨䈋䉌䉏䉎䇯৻ᣇ䇮㪤㪤㪚㩷 㪟㪜㪤㪫 䈱㘻๺䊄䊧䉟䊮㔚ᵹ䈲৻ቯ䉕଻䈤䇮ఝ䉏䈢㔚ᵹ቟ቯᕈ䈏⏕⹺䈘䉏䈢䇯㪤㪤㪚 ᭴ㅧ䈮䈜䉎䈖䈫䈪䊜䉰஥㕙䈎䉌䈱᡼ᾲ䈱ലᨐ䈏⃻䉒䉏䇮ห⒟ᐲ䈱㔚ᵹ䈏ᵹ䉏䈩䉅䉼䊞䊈䊦᷷ᐲ䈏䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈾䈬਄᣹䈚䈩䈇䈭䈇䈫ᕁ䉒䉏䉎䇯㩷ᦨᓟ䈮䇮䉥䊐⁁ᘒ䈮䈍䈔䉎䊒䊧䊷䊅ဳ䈍䉋䈶 㪤㪤㪚㩷 㪟㪜㪤㪫 䈱⛘✼⎕უ․ᕈ䉕⹏ଔ䈚䈢䇯࿑ 㪎㩿㪸㪀䈮 㪣㪞㪛㪔㪈P㫄䇮࿑ 㪎㩿㪹㪀䈮 㪣㪞㪛㪔㪈㪇P㫄 䈮䈍䈔䉎ਔ⠪䈱⛘✼⎕უ․ᕈ䉕␜䈜䇯䉭䊷䊃㔚࿶䈲䇮䊒䊧䊷䊅ဳ䈍䉋䈶 㪤㪤㪚㩷㪟㪜㪤㪫 䈠䉏䈡䉏䇮㪄㪎㪭 䈫㪄㪌㪭 䈫䈚䈢䇯࿑ 㪎㩿㪸㪀䈏␜䈜䉋䈉䈮䇮㪣㪞㪛㪔㪈P㫄 䈮䈍䈔䉎ਔ⠪䈱⛘✼⎕უ㔚࿶䈲䈍䉋䈠 㪌㪌㪭 䈫ห╬䈱୯䉕␜䈚䈢䇯㪣㪞㪛㪔㪊䇮㪌P㫄 䈱႐ว䇮䊐䉞䊷䊦䊄䊒䊧䊷䊃᭴ㅧ䈭䈚䈱 㪘㫃㪞㪸㪥㪆㪞㪸㪥㩷㪟㪜㪤㪫 䈱⛘✼⎕უ㔚࿶䈲 㪏㪇㩷䌾㩷㪈㪌㪇㪭 䈫ႎ๔䈘䉏䈩䈇䉎㪲㪈㪃㩷㪐㪴䇯㩷
10-1
10-2
drain current (A)10-1

LGD=1Pm

10-3

MMC
VG=-5V

10-4

10-4
breakdown

10-8

10-5
10-6planar
VG=-7V

10-7020MMC
VG=-5V

10-3

10-5
10-6

LGD=10Pm

10-240(a)planar
VG=-7V

10-76080

10-8020drain voltage (V)4060

80 100 120(b)࿑ 7 (a)LGD=1Pm䋬 (b)LGD=10Pm 䈮䈍䈔䉎䊒䊧䊷䊅ဳ䈍䉋䈶 MMC
HEMT 䈱⛘✼⎕უ․ᕈ

㧙㧙㩷৻ᣇ䇮㪣㪞㪛㪔㪈㪇P㫄 䈱႐ว䇮࿑ 㪎㩿㪹㪀䈮␜䈜䉋䈉䈮䇮㪣㪞㪛㪔㪈P㫄 䈫Ყセ䈚䈩ૐ䈇䊄䊧䉟䊮䊥䊷䉪㔚ᵹ䈏ᓧ䉌䉏䈢䇯䊥䊷䉪㔚ᵹ䈮䈧䈇䈩䈲䇮ᓧ䉌䉏䈢୯䈫䈾䈿ห╬䈱୯䈏ႎ๔䈘䉏䈩䈇䉎㪲㪈㪃㩷 㪏㪃㩷 㪐㪴䇯᷹ቯ㒢⇇䈱䈢䉄䊄䊧䉟䊮㔚࿶䉕 㪈㪇㪇㪭 એ਄ශട䈪䈐䈭䈎䈦䈢䈏䇮㪤㪤㪚㩷㪟㪜㪤㪫 䈲䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈫㕖Ᏹ䈮ૃ䈢䊥䊷䉪․ᕈ䉕␜䈚䈢䇯䈖䈱䈖䈫䈎䉌䇮䉭䊷䊃㔚ᭂ⋥ਅ䈏๟ᦼ⊛䊃䊧䊮䉼᭴ㅧ䈪䈅䉎 㪤㪤㪚㩷㪟㪜㪤㪫 䈮䈍䈇䈩䇮䊂䊋䉟䉴᭴ㅧ䈮⿠࿃䈚䈢⛘✼⎕უ․ᕈᖡൻ䈱ᓇ㗀䈏䈭䈇䈫⠨䈋䉌䉏䉎䇯㩷㩷㪋䋮䉁䈫䉄㩷㪘㫃㪞㪸㪥㪆㪞㪸㪥㩷㪟㪜㪤㪫 䈱䈚䈐䈇୯㔚࿶೙ᓮ䈫䉭䊷䊃೙ᓮᕈะ਄䉕⋡⊛䈮ᣂ䊂䊋䉟䉴᭴ㅧ䈫䈚䈩 㪤㪤㪚㩷㪟㪜㪤㪫 䉕૞⵾䈚䇮⹏ଔ䉕ⴕ䈦䈢䇯㪤㪤㪚㩷㪟㪜㪤㪫 䈪䈲䇮৻⥸⊛䈭䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈫Ყセ䈚䈩䈚䈐䈇୯㔚࿶䈏ᵻ䈒䈭䈦䈢䇯㪉 ᰴర䊘䊁䊮䉲䊞䊦⸘▚䈱⚿ᨐ䇮஥㕙䉭䊷䊃䈎䉌䈱㔚⇇䈏 㪉㪛㪜㪞 䉕࿐䈇ㄟ䉃䉋䈉䈮೙ᓮ䈚䇮䉼䊞䊈䊦ਛ䈱䊘䊁䊮䉲䊞䊦䉕ല₸⦟䈒ᄌൻ䈘䈞䈩䈇䉎䈖䈫䈏䉒䈎䈦䈢䇯䈖䈱 㪉㪛㪜㪞 䈱࿐䈇ㄟ䉂ലᨐ䈎䉌⦟ᅢ䈭䉰䊑䉴䊧䉾䉲䊢䊦䊄․ᕈ䈫㔚ᵹ㚟േ⢻ജ䈱ะ਄䈏ᓧ䉌䉏䈢䈫ផ᷹䈘䉏䉎䇯⠴࿶ะ਄䈱䈢䉄䉭䊷䊃㵥䊄䊧䉟䊮㑆〒㔌䉕㐳䈒䈫䈦䈢 㪤㪤㪚㩷㪟㪜㪤㪫 䈮䈍䈇䈩䉅䇮ૐ䈇 㫂㫅㪼㪼 㔚࿶䈏ᓧ䉌䉏䈢䇯䉁䈢㪤㪤㪚㩷㪟㪜㪤㪫 䈲䊒䊧䊷䊅ဳ 㪟㪜㪤㪫 䈫Ყセ䈚䈩䇮ఝ䉏䈢㔚ᵹ቟ቯᕈ䈏ᓧ䉌䉏䈢䇯ᦨᓟ䈮䇮䊒䊧䊷䊅ဳ䈍䉋䈶 㪤㪤㪚㩷 㪟㪜㪤㪫 䈱䉥䊐⁁ᘒ䈮䈍䈔䉎䊄䊧䉟䊮䊥䊷䉪㔚ᵹ․ᕈ䈫⛘✼⎕უ․ᕈ䉕⹏ଔ䈚䈢䈫䈖䉐䇮䈾䈿ห╬䈭․ᕈ䈏ᓧ䉌䉏䈢䇯䈖䈱䈖䈫䈎䉌䇮๟ᦼ⊛䊃䊧䊮䉼᭴ㅧ䈮⿠࿃䈚䈢⛘✼⎕უ․ᕈ䈱ᖡൻ䈲䈭䈇䈫⠨䈋䉌䉏䉎䇯㩷㩷䈭䈍䇮ᧄ⎇ⓥ䈲䋨⽷䋩㪡㪝㪜㪉㪈 ਎♿⽷࿅ᛛⴚ⎇ⓥഥᚑ䋨㪉㪇㪇㪎 ᐕᐲ䋩䈱េഥ䈮䉋䉍ታᣉ⥌䈚䇮ᗧ⟵䈅䉎⎇ⓥᚑᨐ䉕ᓧ䉎䈖䈫䈏䈪䈐䉁䈚䈢䇯䈖䈖䈮䇮⽷࿅䈱㑐ଥ⠪䈮ᔃ䉋䉍ᗵ⻢⥌䈚䉁䈜䇯㩷㩷⊒⴫⺰ᢥ㩷1) T. Tamura, J.Kotani, S.Kasai, and T. Hashizume, "Nearly temperature-independent
saturation drain current in a multi-mesa-channel AlGaN/GaN high-electron-mobilitytransistor", Appl. Phys. Express 1, Art. No. 023001(2008).
2) T. Hashizume, (Invited) "Surface control of AlGaN for the stability improvement of
AlGaN/GaN HEMTs", 66th Device Research Conference (DRC-66), Univ. California,
Santa Barbara, USA, June 23-25, 2008.㩷
3) Kota Ohi, Takahiro Tamura, Junji Kotani and Tamotsu Hashizume, " Mesa-gate
AlGaN/GaN HEMTs having narrow-width channels", 2007 International Conference㧙㧙

on Solid-State Devices and Materials (SSDM2007), Tsukuba, Sep. 24-26, 2008.
4) T. Hashizume, (Invited) "Surface control structures for high-performance AlGaN/GaNHEMTs", 7th International Conference on Advanced Semiconductor Devices andMicrosystems (ASDAM 2008), Smolenice, Slovakia, October 12-16, 2008.
5) ᄢ੗ᐘᄙ‫ޔ‬ᯅ⹣଻‫ޔ‬‫ޟ‬䊅䊉⚦✢䉼䊞䊈䊦䉕೑↪䈚䈢บᒻ䉭䊷䊃 AlGaN/GaN HEMT䇹䇮㔚ሶᖱႎㅢାቇળ⎇ⓥળ䇮1 ᦬ 14-16 ᣣ䇮᧲੩䇯ෳ⠨ᢥ₂㩷㪲㪈㪴 㪮㪅㪪㪸㫀㫋㫆㪃㩷 㪰㪅㪫㪸㫂㪸㪻㪸㪃㩷 㪤㪅㪢㫌㫉㪸㪾㫌㪺㪿㫀㪃㩷 㪢㪅㪫㫊㫌㪻㪸㪃㩷 㪠㪅㪦㫄㫌㫉㪸㪃㩷 㪫㪅㪦㪾㫌㫉㪸㪃㩷 㪸㫅㪻㩷 㪟㪅㪦㪿㪸㫊㪿㫀㪃㩷 㪠㪜㪜㪜㩷㪫㫉㪸㫅㫊㪅㪜㫃㪼㪺㫋㫉㫆㫅㩷㪛㪼㫍㫀㪺㪼㫊㪅㪃㩷㪌㪇㪃㩷㪉㪌㪉㪏㩷㩿㪉㪇㪇㪊㪀㩷㪲㪉㪴 㪱㪅㩷㪡㫀㫅㪃㩷㪫㪅㩷㪟㪸㫊㪿㫀㫑㫌㫄㪼㪃㩷㪸㫅㪻㩷㪟㪅㩷㪟㪸㫊㪼㪾㪸㫎㪸㪃㩷㪘㫇㫇㫃㪅㩷㪪㫌㫉㪽㪅㩷㪪㪺㫀㪅㪃㩷㪈㪐㪇㪃㩷㪊㪍㪈㩷㩿㪉㪇㪇㪉㪀㪅㩷㪲㪊㪴 㪪㪅㪞㪅㪧㪼㫋㫉㫆㫊㫐㪸㫅㩷㪸㫅㪻㩷㪘㪅㪰㪸㪅㪪㪿㫀㫂㪃㩷㪪㫆㫍㪅㩷㪧㪿㫐㫊㪅㪪㪼㫄㫀㪺㫆㫅㪻㪅㪃㩷㪉㪊㩿㪍㪀㪃㩷㪍㪐㪍㩷㩿㪈㪐㪏㪐㪀㩷㪲㪋㪴 㪙㪅㪣㪅㪞㪼㫃㫄㫆㫅㫋㪃㩷㪮㪅㪧㪼㪸㫋㫄㪸㫅㪃㩷㪸㫅㪻㩷㪤㪅㪪㪿㫌㫉㪃㩷㪡㪅㪭㪸㪺㪅㩷㪪㪺㫃㪅㩷㪫㪼㪺㪿㫅㫆㫃㪅㪃㩷㪙㩷㪈㪈㩿㪋㪀㪃㩷㪈㪍㪎㪇㩷㩿㪈㪐㪐㪊㪀㩷㪲㪌㪴 㪫㪅㪟㪸㫊㪿㫀㫑㫌㫄㪼㪃㩷㪟㪅㪦㫂㪸㪻㪸㪃㩷㪢㪅㪡㫀㫅㫌㫊㪿㫀㩷㪸㫅㪻㩷㪟㪅㪟㪸㫊㪼㪾㪸㫎㪸㪃㩷㪡㫇㫅㪅㩷㪡㪅㩷㪘㫇㫇㫃㪅㩷㪧㪿㫐㫊㪅㪃㩷㪍㪊㪌㩷㩿㪈㪐㪐㪌㪀㩷㪲㪍㪴 㪫㪅㪧㪸㫃㪸㪺㫀㫆㫌㫊㪃㩷㪪㪅㪩㪸㫁㪸㫅㪃㩷㪘㪅㪚㪿㪸㫂㫉㪸㪹㫆㫉㫋㫐㪃㩷㪪㪅㪟㪼㫀㫂㫄㪸㫅㪃㩷㪪㪅㪢㪼㫃㫃㪼㫉㪃㩷㪪㪅㪧㪅㪛㪼㫅㪙㪸㪸㫉㫊㪃㩷㪬㪅㪢㪅㪤㫀㫊㪿㫉㪸㪃㩷㪠㪜㪜㪜㩷㪫㫉㪸㫅㫊㪅㪜㫃㪼㪺㫋㫉㫆㫅㩷㪛㪼㫍㫀㪺㪼㫊㪅㪃㩷㪌㪉㪃㩷㪉㪈㪈㪎㩷㩿㪉㪇㪇㪌㪀㩷㪲㪎㪴 㪡㪅㩷㪢㫆㫋㪸㫅㫀㪃㩷㪤㪅㩷㪢㪸㫅㪼㫂㫆㪃㩷㪟㪅㩷㪟㪸㫊㪼㪾㪸㫎㪸㪃㩷㪸㫅㪻㩷㪫㪅㩷㪟㪸㫊㪿㫀㫑㫌㫄㪼㪅㩷㪡㪅㩷㪭㪸㪺㪅㩷㪪㪺㫀㪅㩷㪫㪼㪺㪿㫅㫆㫃㪅㪃㩷㪙㪃㩷㪉㪋㪃㩷㪉㪈㪋㪏㩷㩿㪉㪇㪇㪍㪀㪅㩷㪲㪏㪴 㪰㪅㪚㪅㪚㪿㫆㫀㪃㩷㪤㪅㪧㫆㫇㪿㫉㫀㫊㫋㫀㪺㪃㩷㪙㪅㪧㪼㫉㪼㫊㪃㩷㪤㪅㪞㪅㪪㫇㪼㫅㪺㪼㫉㪃㩷㪸㫅㪻㩷㪣㪅㪝㪅㪜㪸㫊㫋㫄㪸㫅㪃㩷㪡㪅㩷㪭㪸㪺㪅㩷㪪㪺㫀㪅㩷㪫㪼㪺㪿㫅㫆㫃㪅㪃㩷㪙㪃㩷㪭㫆㫃㪅㩷㪉㪋㪃㩷㪉㪍㪇㪈㩷㩿㪉㪇㪇㪍㪀㪅㩷㪲㪐㪴 㪫㪅㪥㪸㫅㫁㫆㪃㩷 㪤㪅㪫㪸㫂㪼㫌㪺㪿㫀㪃㩷 㪤㪅㪪㫌㫀㫋㪸㪃㩷 㪫㪅㪦㫀㫊㪿㫀㪃㩷 㪰㪅㪘㪹㪼㪃㩷 㪰㪅㪫㫆㫂㫌㪻㪸㩷 㪸㫅㪻㩷 㪰㪅㪘㫆㫐㪸㪾㫀㪃㩷 㪘㫇㫇㫃㪅㩷㪧㪿㫐㫊㪅㩷㪣㪼㫋㫋㪅㪃㩷㪐㪉㪃㩷㪉㪍㪊㪌㪇㪉㩷㩿㪉㪇㪇㪏㪀㩷㧙㧙