(2) Workshop on 3D Integration Using Hetero Wafer Bonding
Tadatomo Suga (Professor, Graduate School, The University of Tokyo)(3) Organizations for Interdisciplinary / New Domain
Research Activities: Inauguration of DedicatedMicro/Nano Engineering Forum
Hidetoshi Kotera (Professor, Kyoto University)

The sessions, presentations and presenters making up thisyear’s MEMS Forum were as follows.

Session 1 : Strengthening the MEMS Industrial
Base(1) The Opening of the MEMS Industry
Tsuneyuki Miyake (Associate editor for Microdevices, Nikkei
Business Publications Inc.)(2) Case Study: Training of Personnel to Promote AppliedMEMS in the MOT Project Research
Kiyoshi Itao (Professor, Tokyo University of Science)(3) MEMS Personnel Training and Technologies forCommercial Application of MEMS
Ryutaro Maeda (Senior Researcher, Advanced Manufacturing Process
Department, National Institute of Advanced Industrial
Science and Technology [AIST])(4) Features of MemsONE (MEMS Design / Analysis SupportSystem) and Case Studies
Hidetoshi Kotera (Professor, Kyoto University)(5) Overview of Activities to Create a MEMS Foundry Network
Kazushi Tomii, Chair, Foundry Service Industry Committee,
MEMS Industry Forum(Matsushita Electric Works Ltd.)

Session 3 : Asia MEMS Forum(1) MEMS in China Mainland
Dong F.Wang (Senshu University, Ishinomaki, Japan)(2) Micro/Nano Technology in Korea
Young-Ho Cho (KIST, Korea)(3) MEMS & Nanotechnology in Taiwan
M. S. Lin (Industrial Technology Research Institute [ITRI])(4) MEMS Industry Forum (MIF) Towards Virtuous Cycle ofthe MEMS Industry Growth of Asia
Junji Adachi (Micromachine Center, Japan)

Session 4 : Research Results(1) MEMS Market Research Report
Shunichi Adegawa (General Manager, Industry Department,Micromachine Center)(2) Report of Outcome Survey, Micromachine Project
Shinichi Tamura (Manager, Survey Research No. 2 Section,Research Department,
Japan Technical Information Services Corporation)(3) BEANS (Toward the Achievement of 3rd Generation MEMS)
Junji Adachi (General Manager, Research Department,
Micromachine Center)

Session 2 : Industry-Academia Collaboration(1) Use of MEMS and Biochips Produced throughMicro/Nano Stereolighography
Shoji Maruo (Professor, Graduate School of Engineering,
Yokohama National University)

Fine MEMS Project Interim Achievements Seminar
As one of the events comprising MicroNano 2007, the Fine
MEMS Project Interim Achievements Seminar was held on
Friday, July 27 at a special venue set up within the West No. 3
Hall at the Tokyo International Exhibition Center (Tokyo BigSight). As its name implies, the seminar was held to announce
the interim achievements of the Highly Integrated / Complex
MEMS Manufacturing Technology Development Project (FineMEMS Project) commissioned and subsidized by the New
Energy and Industrial Technology Development Organization(NEDO). The seminar was sponsored by the Fine MEMS
Project Committee and the Micromachine Center, and cosponsored by NEDO, with assistance provided by the Ministryof Economy, Trade and Industry (METI).
The seminar opened with greetings from two invited guests:
Hiroaki Okahashi, Deputy Director of METI, and Masami
Takayasu, Director of NEDO. These greetings were followed bya presentation entitled “Overview of Fine MEMS Project” byIsao Shimoyama, Professor and Dean of the Graduate School ofInformation Science and Technology at the University of Tokyo.
Professor Shimoyama provided an overview of the project’s
achievements including grant activities. This was followed bydetailed reports of the latest consignment project achievementsin eight areas by the project supervisors, which triggered a
lively discussion. Following the conclusion of the seminar, atechnical consultation corner was set up at the NEDO Highly
Integrated / Complex MEMS booth at Exhibition
Micromachine/MEMS, affording visitors the opportunity to talkdirectly with research and development supervisors with theaim of facilitating the practical application of project
achievements.
At the seminar, the 130 seats that had been set up at thespecial venue filled up just as the seminar was about to begin,so an additional 50 seats were hastily provided. However, these
also filled up immediately. Judging from the air of excitementthat permeated the venue from beginning to end, theexpectations for this project are extremely high. An opinion
survey was conducted for the 126 persons who attended theseminar and 219 persons who visited the exhibition booth. The
results will be analyzed and will serve to spur efforts aimed at
rapidly achieving practical applications for the manufacturing
technologies developed in the course of the project.

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