Fine MEMS Project

Compiling of a Knowledge Databaseand Development of an Integrated Design Platform
Final Project Year
FY 2008 will be the final year of the Fine MEMS Project that began in FY 2006. Steady achievements are being
realized in each research and development topic. The Micromachine Center will place particular emphasis on thefollowing three topics in order to establish various types of manufacturing technology infrastructure to achieve thesecond generation of what are referred to as highly integrated and complex MEMS.
The first task is the creation of a fine MEMS knowledge database (Fig. 1). A server has been set up within theMicromachine Center, and a database system in MediaWiki format has been completed on the Internet. This database
will ultimately contain more than 1,000 case studies of knowledge data; as a result of steady progress in registering
data, the database already contains many items. In order to both increase data quantity and improve the quality of thedata, new functions have been provided, such as the ability to vote for registered case studies, rankings for individual
keywords, identification of case studies recommended by committee chairman Shimoyama and so on. Moreover, toimprove usability, a search function and improved patent information have been provided. Currently users of thisdatabase system are limited to researchers that have registered with the Project. During this fiscal year, however, ageneral user interface will be provided and integration with the MemsONE knowledge database will be conducted inanticipation of the opening of the database to the general public following the end of the project.

Project achievements

Latest informationfrom academic societies, etc.

Following conclusion of project :To fine MEMS
knowledge database

Research & development
members- Opened to the general public
on the Internet- Integrated with MemsONE
MemsONEknowledge database

Research & development
members

Liaision

People can freely post and view comments on the Wiki using their web browsers.
Collaboration tools allow visitors to freely add to articles.

Processes
DevicesMaterials
AnalysisFig. 1

Secondly, with regard to the “Research & Development of Integrated Design Platform for Fine MEMS” that began
in the previous fiscal year, an equivalent circuit model – an integrated platform for MEMS and electronic circuits –was developed and then used to model various devices. In addition, a web library that allows people to view thesemodels over the Internet was developed and the device models, etc. were placed in this library. Based on theseachievements, development during this fiscal year will focus on providing greater versatility and making it easy for
MEMS and electronic circuit engineers to conduct design. Efforts will focus on the following three points:41)

Enhance device models through the use of MEMS equivalent circuit model, which is usefulwhen integrating MEMS with one another, in order to construct a fine MEMS equivalentcircuit model that can connect MEMS devices to one another and support high integration.

2)

Build a collaborative environment between the circuit simulator and the web library system(created to develop functions to extract electrical properties and mechanical properties) inorder to develop a function for extracting the electrical properties of MEMS devices and themechanical properties of the moving parts of MEMS devices.

3)

Develop mutual transformation of equivalent circuit models and three-dimensional CAD
models to enable mutual transformation of the shape data and material property values of
equivalent circuit models and three-dimensional CAD models.

1. Development of a systematized design platform using equivalent circuit models as an integrated
design method that can accommodate the increase in complexity and integration of MEMS
structures and different materials
2. Dramatic reduction of the time required for the practical application of fine MEMS, further
stimulating and ensuring the international competitiveness of the Japanese MEMS market

Study of individual
element models and MEMS
structural element models

Gathering andregistration of MEMS
equivalent circuits

Creation of fine MEMS
circuit models

Web library of MEMS equivalent circuits

Equivalent circuit data(device structure, equivalent circuit diagram, Net List Data)

Viewable by users

Study of collaboration between
CAD and circuits

Net List Data///
GHDE

Accommodation offine MEMS

Explanation and instructions for individual element
models and MEMS structural element models(model expression, element diagrams)

Fig. 2 Development of fine MEMS systemized design platform

Lastly, the Micromachine Center has been contracted to assist in the overall operation and management of the fine
MEMS project. The Center holds meetings of the Project Promotion Liaison Committee (four times a year),
Knowledge Database Committee (six times a year) and Platform Study Committee (four times a year). These
committees contribute to the smooth promotion of the project and dissemination of project achievements. In FY
2007, exhibits were displayed at the International Exhibition Micromachine / MEMS and Nanotech 2008. Moreover, aproject interim achievements briefing was held in July to present the latest achievements to the many attendees.
Exhibiting at International Exhibition Micromachine / MEMS and the holding of an interim achievements briefing areplanned for this fiscal year as well.
The final year of the project promises to be filled with activity and we look forward to the results.

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