MMC Activities..............1TOPICS.......................5
Members’ Profiles .........6Worldwide R&D ............7

MMC Activities

Overview of MMC's Activities in Fiscal 2003
I. Basic Objectives of Activities
The basic objectives of MMC activities are, firstly, toestablish basic micromachine technologies and increase
utilization of micromachines through research and investigationof micromachines (tiny machines, comprising functional
components measuring only a few millimeters or less, that arecapable of minutely detailed and complicated operations),
collection and provision of micromachine information, andexchange and cooperation with worldwide organizations; andsecondly, to contribute to the further development of Japan'sindustrial economy and to international society.
MMC's basic objectives in FY 2003 are, as in the previous
fiscal year, to actively disseminate information on Japanese
micromachines; to engage in technical issues concerning thefusion of micro- and nanotechnologies; and to promote thefurther industrialization of micromachines through such eventsas MEMS.

II. Description of Primary Activities
1. Research and Investigation of Micromachines
Planned activities are aimed towards gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research on
new technological issues regarding the fusion of micro - andnanotechnologies, as well as making adjustments appropriate
for the multidirectional expansion of micromachine technology.

(1) Microanalysis/Production System Project(recommissioned NEDO project)This project involves the systematic collection of all pertinent
information regarding the hardware design, which areindispensable for achieving high efficiency in a diversity ofanalytical and chemical processes, and which is achieved throughdesigning, manufacturing and evaluation processes of microchip
devices, into a database that will facilitate efficient use of thisinformation during the term of the project, store and maintainthe information after the project's conclusion, and ultimately bemade available to the general public. The data framework andaccumulated information in the test database created in 2002 will
be revised and the database upgraded; survey research will also
be conducted to gather further relevant data.

(2) Studies on the future prospects of micromachine technology
As we anticipate the industrialization of the micromachinetechnologies that have been developed thus far, from atechnological perspective we must also strive toward furtherminiaturization in this new technological system ofmicromachines. With regard to applications, MMC is pursuing
the possibilities for the fusion of micromachine technologies
with technologies in other fields, such as medical care andbiotechnology. Hence, studies on the future prospects ofInternet Home Page : http://www.mmc.or.jp/

micromachines are being implemented and approached fromvarious angles.

(3) Studies on R & D trends for micromachinetechnology in Japan and abroad
These studies aim to identify and analyze the latest trends
in the rapidly expanding field of micromachine technology, andmicromachine R&D in Japan and abroad; and to develop basic
technological data to aid in developing micromachinetechnologies.

(4) Studies on the micromachine market
Statistical data on micromachine-related markets that is
consistent over time is compiled using models for estimating
the micromachine market.

(5) Development of new functional materials for
MEMS(application submitted to the Japan
Machinery Federation)
In order to make MEMS more applicable in a wide range ofindustrial sectors, such as the telecommunications, bio andmedical fields, this research seeks to clarify the possibility ofmanufacturing minute devices through the combination offunctional and heterogeneous materials comprisingpiezoelectric, magnetic, ceramic, organic, compound, nonsilicone chip, nano, and other materials.

(6) Joint survey research activities concerning
the industrialization of MEMS
Opportunities for the industrial application of MEMS havebeen opening up rapidly in recent years; in order to further
accelerate the industrialization of MEMS, this research willcomprehensively tackle such challenges as advancing foundry
services and coordinating MEMS devices and materials fields.
Joint research with businesses that provide foundry services
will also be conducted on specific issues such as process
standardization, creation of a materials database, andcoordination between foundries.

2. Collection and provision of micromachine
information
Information and documents on micromachine use inuniversities, industries, and public organizations in Japan andoverseas will be collected, combined with survey results andMCC-produced documents, and made freely available in theMMC library.

(1) Maintaining and upgrading the MMC libraryTechnical documents and materials are collected and storedin the MMC library and listed in a database together with otherrelevant information.

(2) Publication of a micromachine periodical"Micromachine Index," containing abstracts of technicaldocuments and information on materials, is issued on a regularbasis and supplied to supporting members and organizations
concerned with micromachines.

4. Standardization of micromachines
In newly established fields of systemized techniques, suchas micromachine technology, there is an urgent need forstandardization of terminology and measurement andevaluation methods. MMC will work towards the standardizationof terminology and measurement and evaluation methods,taking international initiatives into perspective.

(3) Publication of a newsletter
Information concerning the research and governmental
trends related to micromachines is distributed monthly tosupporting members and other interested individual andorganizations.

(1) Standardization of fatigue testing methods
for micro-nano materials(application forsponsorship submitted to the Ministry of
Economy, Trade and Industry)(4) Database compilation and data management
system operations
We will upgrade data in the database and operate to makethe database accessible to supporting members.

MMC will undertake the development of conventional
1/1000 sized specimens for testing micro-nano materials, R&D
on the capabilities required of testing equipment, and theestablishment of stable testing conditions for compiling andanalyzing data, and standardization of these.

3. Exchange and cooperation with micromachine-related organizations worldwide
To promote affiliation, exchange and cooperation withrelated organizations in and outside Japan, MMC will involve
itself in such activities as participating in the micromachinesummits, holding international symposiums, inviting to Japanand sending overseas researchers and experts in the field, andbuilding foundry services.

(2) Standardization of tensile testing methods
for thin film materials
The results of MMC research conducted between Fiscal
1999 and Fiscal 2001 as part of the NEDO project"standardization of evaluation method of properties for
micromachine material" have been included in international
standardization proposals and will be implemented with thesupport and approval of the Japanese Standards Association.

(1) Participation in the 9 t h Micromachine
Summit
MMC will participate in the 9th Micromachine Summit in
Beijing, China, taking part in discussions of a wide range oftopics, including worldwide trends in micromachine technology
and its fields of application.

(3) Support forterminology

standardizationofIEC

The specifications proposal "Technical Terms in
Micromachine Technology" submitted to IEC/TC47/WG4 has
been approved at the NP (New Project) stage and is now at theCD (Committee Draft) stage. This year MMC will continue its
support of work towards international standardization.

(2) Holding symposiums on micromachinetechnology (partially subsidized by activities
promoting the machine industry)
This year MMC will hold the 9 t h International
Micromachine/Nanotech Symposium (focusing on the fusion ofMEMS and nanotechnology) with the aim of establishing anddisseminating micromachine technologies. The Symposium will
include presentations from various countries describing their R& D achievements, as well as their applications of and polices
for promoting technology.

(4) Research and investigation of micromachine
standardization
The results of this study will be transmitted worldwide toencourage international standardization, while demonstrating
initiative in establishing international standards. This year, inaddition to presiding over the on-line International
Standardization Forum, MMC will continue its development ofstandardization policies regarding measurement and evaluation
based on its consideration of the selection and prioritization ofstandardization items.

(3) International Exchange and Dispatch ofResearchers
A group will be dispatched overseas to promote theexchange of information and opinions with micromachinerelated research institutes in universities and similar
institutions. This group will also participate in international
symposiums and academic meetings held overseas. MMC willfurther promote exchange by inviting experts in the field from
America and Europe and by sending our experts andresearchers overseas.

5. Dissemination of information and education
about micromachines
By issuing and distributing quarterly magazines and byholding exhibitions, we hope to disseminate information on
micromachines extensively in order to educate as many people
as possible.

(4) Building a foundry network system(1) The quarterly magazine "MICROMACHINE"
will be published periodically anddistributed to those in or connected with thefield. The quarterly magazine will also bemade available on the Internet through theCenter's home page.

Foundries are vital to the industrialization of
micromachines, particularly MEMS. In order to improve thesefacilities, we will undertake the establishment of a system toimprove services through a network comprising members of theFoundry Service Industry Committee, who represent businesses
either involved in or related to the provision of foundry
services.

(2) The 14th Micromachine Exhibition and otherevents will be held to present the latest
research achievements, as well asinstruments and equipment for aiding
research.

(5) Establishing a forum for the exchange of
micromachine technology
In order to accelerate the development of micromachinetechnology - a basic technology expected to have a diversity ofapplications in various fields - MMC will promote thistechnology by establishing a forum for the exchange ofinformation, joint research, and other promotional activities.
This year, MMC will hold a meeting for the exchange ofbiotechnology and other technologies outside but related to themicromachine field.

(3) We will serve as the Federation of
Micromachine Technology Secretariat towork with and strengthen micromachinerelated organizations.

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