MMC Activities

Overview of FY 2008 Project Planning
I. Basic policy for project planning

2. MEMS Industry Forum Projects (policy proposal,industry interchange and stimulation projects)

FY 2008 is the final year of the Highly Integrated / Complex
MEMS (Fine MEMS) Manufacturing Technology Development
Project, a three-year project that began in FY 2006. The goal forthis year will be to complete the project and ensure that its
goals have been achieved. As last year, efforts with regard tothe MEMS Open Network Engineering System Design Tools
Project (nicknamed the MemsONE Project), for whichdevelopment was concluded in March 2007, will focus on thecreation of a support organization and dissemination of theproject's achievements. Furthermore, a concentrated researchand development approach is > planned for the Bio-electro
mechanical Autonomous Nano Systems (BEANS) >development project, and a proposal has been submitted in the
open > competition for this project. With regard to activities toimprove the environment for industrialization, the focus will beon policy proposal activities for the MEMS Industry Forum andindustry interchange and stimulation projects. Moreover, as lastyear, an active effort will be made to promote research projects,
standardization promotion projects, dissemination and publicity
projects and so on.

The MEMS Industry Forum was established as a special
project committee whose goal is to support the further
development of MEMS industries and contribute to theinternational competitiveness of Japanese industry. Its
membership is made up primarily of companies in MEMSrelated industries. The Forum maintains ties with affiliatedacademies, regional centers and overseas institutions, and it
promotes the following activities:(1) Policy proposal activities(2) Industry-academia liaison activities(3) Establishment of infrastructure for MEMS development(4) Interchange activities for businesses in MEMS andother industries
Participation in the 14th World Micromachine Summit (to be heldApril 30 - May 3 in Taejon, Korea), 14th International Micromachine/ Nanotech Symposium (to be held July 29 at the Tokyo Bay Ariake
Washingon Hotel, exhibition at the Hannover Messe etc.

3. Research Projects
Research will be conducted for the micromachine andMEMS technologies that are rapidly becoming key technologies
in manufacturing industries. Efforts will focus on accurately
determining technical and manufacturing trends and exploring
new technical issues in the domains in which these technologies
are fused with nanotechnology.
(1) Research aimed at strengthening manufacturing
centers for highly integrated MEMS
Even after the conclusion of the three-year Highly
Integrated / Complex MEMS Manufacturing Technology
Development Project that has been underway since 2006,
research that is based on policy proposals for FY 2009 will beconducted so the achievements of the project can be quickly
and accurately applied to the manufacturing industry in Japan.
(2) Survey of technical trends both at home and abroad(3) Survey of industrial trends(4) Enhancement of micronano databaseII. Major projects
1. National / NEDO projects
In order to establish a technical infrastructure formicromachines and MEMS, the Micromachine Center is activelyworking to promote research and development projects
sponsored by the national government and the New Energy andIndustrial Technology Development Organization (NEDO),
harnessing the combined capabilities of industry, academia andgovernment. In FY 2008, the Center will promote the followingprojects.
(1) Highly Integrated / Complex MEMS (Fine MEMS)
Manufacturing Technology Development Project(NEDO project)
The project was initiated in FY 2006 as a nationalgovernment / NEDO project. In this, the final year of theproject, the Center will continue working on and will strive tocomplete a database of highly integrated / complex MEMS
knowledge that collects, organizes and compiles knowledge
information relating to the three development categories of theproject: (1) complex technologies to implement MEMS /nanofunctions (2) integrated construction with semiconductor
chips (3) methods to connect MEMS components in a highly
integrated manner.

4. Activities to promote standardization
Standardization projects in micromachine and MEMS
technology fields will be promoted concurrently withinternational initiatives.
(1) Research and development in the area of standards
certification for the purpose of proposinginternational standards(2) Follow-up regarding proposed standards for thin film
material fatigue test methods(3) Study of overseas standards(4) Adoption of thin film material tensile test method
standard as a JIS standard(2) Promotion and dissemination of MemsONEIn FY 2008, the Micromachine Center will operate theMemsONE Support Center established in cooperation with
software vendors based on the dissemination infrastructure
created during the previous fiscal year. The Center will also
promote MemsONE dissemination activities. Specifically, theacademic version of MemsONE will be distributed touniversities and research institutions, and energetic efforts will
be made to promote dissemination through user groups,seminars for showing examples of use, training sessions andother user support activities and promotional activities.

5. Dissemination and publicity projects
Efforts will be made to promote wide-ranging disseminationand educate the general public regarding micromachines andMEMS by publishing and distributing a journal, holding
exhibitions and so on.
(1) Use of website to disseminate information andstrengthen ties
(2) Publication of MicroNano Journal(3) Publication of monthly news bulletins(4) Provision of information, etc. through the“MicroNano Express” newsletter(5) Upgrading of reference room including database ofreference abstracts(6) Holding of Exhibition Micromachine/MEMS &Nanotechnologies
The 19th Exhibition Micromachine/MEMS & Nanotechnologies
will be held at Tokyo Big Sight as part of MicroNano 2008. Plans
called for the trade show to be held July 30 - August 1.

(3) Proposal for “Bio & Electro-mechanical Autonomous
Nano Systems (BEANS) Manufacturing Technology
Development Project” (METI Project)
A proposal will be submitted in the open competition for theresearch and development project entitled “Bio & Electromechanical Autonomous Nano Systems (BEANS)
Manufacturing Technology Development Project” to be initiatedin FY 2008 by the Ministry of Economy, Trade and Industry. If
the proposal is accepted, the project will be implemented using
a concentrated research and development approach.

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