MEMS Standardization Roadmaps
Recognizing the need for a mechanism to promoteinternational standardization activities in MEMS fields in a
strategic manner, the Micromachine Center has establishedroadmaps to serve as a guide for future international
standardization activities. Specifically, as the technologies
and products in MEMS fields are diverse, these have been
divided into two main categories – fundamental technologies
and MEMS devices – and for each category a roadmap for thenext 10 years has been prepared.

With regard to MEMS devices, the focus was on the twomajor application fields of automobiles and information &communications (mobile devices). For each field, future
market trends and needs, standardization trends, and theitems needed for standardization were identified, and each
item was ranked in terms of priority to create the roadmap.
In the future, based on these MEMS standardization
roadmaps, the creation of international standards will bepromoted in a strategic manner, strengthening international
competitiveness in MEMS fields.

With regard to the fundamental technologies for MEMS,
technical fields were divided into three categories: processing
and process technologies, material technologies andfundamental compound technologies. For each of thesecategories, a technology map for standardization wasprepared, based on a study of technological andstandardization trends, and each standardization item wasranked in terms of priority to create the roadmap.

MEMS Standardization Roadmap for Fundamental Technologies
2006

2011

2006

2016

Single functional device-Miniaturization and high integration of existing devices
Development of fine MEMS and multifunctional devices(High performance and high reliability)

Process Flow, Geometries, Photomask Drawing

Input and Operation Support
Information Accumulation and Output

Specification

Music player, One-segment TV, Computer Book, and Micro Hard Disk
Small and thin terminal, multi-band, and fuel cell

Environment andPersonal Information Sensing

Measurement of Camber &Torsion

Electronic Paper

Self-power generation

Navigation, digital cash, biometrics, health careubiquitous communication

Acceleration, Corner Speed,
Terrestrial Magnetism Sensor

Fundamental
Units

SensorUnits, Measurement and Calibration Methods

TensileTest Specimen

IEC 62047-3
Aug., 2006

Standard Specimens for Calibration of Mechanical Properties

Sound Pressure Sensor
Pressure Sensor
Input and Attestation Sensor

Communication

StandardMaterials

2016

Camera, Video, Bar-code Reader, Portable Game, Voice Input, Motion Input, and Universal Design

Telecommunication andPower Supply

Devices

Processes

Innovative future devices

Measurements of Roughness & Profiles

2011

Ubiquitous Network Terminal Portable Multifunctional Information Terminal
Market Driver

MEMS
Scenarioin JapanMEMS Standardization Road Map in Cellular Phone

Standard Specimens for Testing of Functions(Optical,Electrical, Magnetic Properties)

Filter
RF Switch
Oscillator

Powersystem

IEC 62047-6

Uni-axial Fatigue Test CD in March 2007

Pump Valve for Fuel Cell

Miniaturization of the above-mentioned Devices

Items of Standard

Materials

Statistical Analysis of Fatigue Life Data
Accelerating Life Test

Mechanical
Properties

Bonding Strength between Film and Substrate
IEC 62047-3
Aug., 2006

Analysis of Measured Properties

Tensil Test

Methods and Conditions ofReliability Measurement

MEMS Devices Common Conditions

SensorMethods and Conditions ofSpecifications of Devices

SensorCommunication

Communication
Power system

SensorInterface and Packaging

SensorCommunication

Communication
Power system

Bending and Bulge Tests
Torsion Test
Reliability Test for Contact Resistance

MEMS Standardization Road Map in Automotive Application

Fatigue Durability andReliability of Thin Film2006

Measurement and Analysis of Charge Trap

Peculiar toDevices

Wear-out Evaluation

Attendance in ach Standardization Project and International Standardization Committee.

OthersCorrespondence to Urgent Standardization Item Generation

2016

SafetyAir-bag

Stability Control

Air Pressure Monitoring

EFI

Environment
ITS

Navigation

FCEV

Reducing Collision Damage

Pedestrian Alarm System at Night

Acceleration
Pressure
Yaw Rate

Acceleration Sensor for Stability
Navigation

Devices

After the Publication of IS

Personnel
training

Acceleration
Gyro
Pressure
Air Flow
Pedestrian Alarm
HydrogenItems of Standard

Managementand operation

2011
Car Electronics

Market Driver

Impact Test

Air-bag

Fundamental Compound

Analysis of Bonding Reliability

CommonTechnologies

4Methods and Conditions ofReliability Measurement

MEMS Devices Common Conditions

Methods and Conditions ofSpecifications of Devices

MEMS Devices Common Conditions

Interface and Packaging

MEMS Devices Common Conditions