January 20, 2022
Press Release
Ball Wave Inc.
TRUSVAL Technology Co., Ltd.
TRUSVAL Technology starts marketing the trace moisture sensors by Ball Wave exclusively
for the semiconductor industry in Taiwan, China, and surrounding A/P regions.
Key points of the announcement• Ball Wave Inc. (Head office: Sendai City, Miyagi Prefecture, Japan; CEO: Dr. Shingo Akao),
and TRUSVAL Technology Co., Ltd. (Head office; Zhunan Township, Miaoli County, Taiwan(R.O.C.); General Manager: Mr. Eric Chien) have agreed on EXCLUSIVE DISTRIBUTOR
AGREEMENT of the Ball Wave’s trace moisture sensors for the applications in thesemiconductor industry in Taiwan, China, and a part of other Asia/ Pacific regions.
• Ball Wave and TRUSVAL Technology have jointly developed a special gas cabinet to deliver
bulk and specialty gases in cutting-edge semiconductor factories with the ability to onlinemonitor the trace moisture in the gases.
Overview
Ball Wave has the ball SAW technology with its one of applications in trace moisture sensors.
The ball SAW is a special type of surface acoustic waves (SAWs) propagating on solidspheres, that enables the extremely high sensitivity and the exceptionally quick response time(Figure 1). Ball Wave has a family of models of the trace moisture sensors that contain thecircuitry and software to determine the amount of trace moisture in various background gases
by measuring the characteristic of the ball SAW.
http://ballwave.jp/english/images/ft_catalog_en.pdf
TRUSVAL Technology is a Gas/Chemical facility manufacturer and system integrationengineering company specialized in the semiconductor industry (Figure 2). TRUSVALTechnology is marketing the IQC system that is a gas cabinet in which Ball Wave’s tracemoisture sensor is installed to online-monitor the amount of trace moisture in the bulk gases
specialty gases supplied from the gas cylinders.
Both companies agree to expand the business from the IQC to a wider range of gas supply
systems that include Ball Wave’s trace moisture sensors to ensure the extremely low moisture
content in the specialty gases used in cutting-edge semiconductor factories.

Trace Moisture sensor

The ppb-ppm level of tracemoisture in specialty gases
and corrosive gases can bemonitored inline for the firsttime in the semiconductorindustry. It is unavoidable
for stable production of
cutting-edge microchips.

Figure 1. Trace moisture sensors by ball SAW technology

Figure 2. Products by TRUSVAL Technology

Explanation of terms
1. Cutting-edge semiconductor industry: the semiconductor market is expected to grow by
more than 17% in 2021, driven by mobile phones, notebooks, servers, automotive, smart
home, gaming, wearables, and Wi-Fi access points.
2. Specialty gases for semiconductor industry: thin layers of different materials are added tothe surface of the silicon wafer, by way of deposition and etching chemical reactions, eachof which requires various reactive gases such as AsH3/H2, Cl2, GeH4/H2 and HF.
3. Trace moisture in semiconductor industry: it is essential to reduce the impurity, inparticular the residual moisture, in the gases used for semiconductor manufacture.
4. Ball SAW sensor: a sensor that uses surface acoustic waves (SAWs), which propagate
on the surface of a sphere and repeatedly circle around it without spreading in a lateral
direction. The ball SAW sensor comprises of proprietary intellectual properties of BallWave.

Contacts:
Ball Wave Inc.
Corporate Strategy Division
Tel：+81 3 5979 2357
E-mail：tsukahara*ballwave.jp (replace * with @)http://ballwave.jp/english/index.html
TRUSVAL Technology Co., Ltd.
Administration Department
Tel：+886 37 580791
E-mail：IR*trusval.com.tw (replace * with @)https://www.trusval.com.tw/index_en