MMC Activities..............1TOPICS.......................5Members’ Profiles .........6Worldwide R&D ............8MMC Activities

The 8th International Micromachine / Nanotech Symposium
The 8 th International Micromachine/Nanotech
Symposium will be held on November 14 (Thursday), 2002,
at the Science Museum in Kitanomaru Park, Tokyo, and isbeing organized by the Micromachine Center.
This is the 8th symposium since the 1st International
Micromachine Symposium was held in 1995 supported byMETI and NEDO, the symposium aims at establishment anddissemination of micromachine technology, as well as
enlightment of micromachine technology. Last year, in the7th International Micromachine symposium, we presented
summary of the fruits of "Micromachine technology
development PJT" which took the global initiative in the 10year PJT of "Industrial Science and Technology Frontier
Program" so called (ISTF). From this 8th symposium, we
expand the scope from Micromachine technology to nanotechnology and applied the sub-theme as "Micro systems
implicated nano technology make the Foundation of Industrial
Technology in the 21st Century". Therefore we named thissymposium The 8th International Micromachine/Nanotech Symposium.
Recently the fruits of research in nanotechnology havebeen remarkable, however to utilize the nano-scaletechnology for human size, it is required to develop the newtech which seamlessly links nano-scale and human-size toimplicate such as optics and biotechnology into the microsystems. The 8th International Micromachine/Nanotech
Symposium focuses on R & D in the new domain of"micro/nano fusion that will enable the realization of novel
functions and capacity.
This symposium has been planned by the organizing
committee (chairman: Professor Naomasa Nakajima, TheUniversity of the Air), and by the program committee(chairman: Professor Hiroyuki Fujita, The University ofTokyo). Through these committees, the frame of program
were made and the guest speakers were nominated.
Furthermore, to fill up the content of the symposium andinternational points of view, an advisory board has beenorganized by nine European and American chief delegates of
the 8th world Micromachine summit and we invited fiveforeign speakers.
The program consists of five sessions, and fourteen
speakers including nine Japanese and five foreigners givelectures. In Session 1, "Opening," a guest speech will begiven by the Director-General of the Manufacturing

Internet Home Page : http://www.mmc.or.jp/Industries Bureau of METI, then Professor Isao Shimoyama,
The University of Tokyo presents special lecture entitled"Strategy towards Fusion of Nano and Micro Systems. Thislecture will provide participants valuable information about
technological strategies and future directions on "micro/nanofusion domain."In Session 2, "The Path to New Industries in the 21stCentury," will feature the following five lectures.
1. International Standardization of MEMS
2. Standardization of Tensile Testing Methods for Thin
Film Materials - Round Robin Testing of Thin FilmSpecimen 3. MEMS in China, Especially in Shanghai Area
4. MMC's Initiatives towards Foundry Service Network
5. The Sensibility of Scaling Recognition
In the third lecture, Prof. Yilong Hao of Peking University
talks the MEMS industry in China, which has been making
significant progress in the Shanghai area.
The fifth lecture, "The Sensibility of Scaling Recognition"in Micro/Nano machine design" will be presented by Prof.
Kazuo Kawasaki of Nagoya City University Medical School,
who has been honored with several good design awards inthe field of industrial design, both in Japan, and foreigncountries such as U.S.A., France and Germany.
For Session 3, "Innovative R & D," we prepares fourlectures to introduce the latest innovative R & D, from whichsignificant future evolutions are anticipated.
1. Creation of Biochips Aiming at Highly MedicalTreatment
2. Micro-fluidics for Pre-process of Dioxin Measurement
3. Advanced MEMS Research in US
4. Nanoscale Light Manipulation
The fourth lecture, "Nanoscale Light Manipulation," will
be presented by Prof. Laurens Kuipers of the University ofTwente MESA + Research Institute, the Netherlands, who
researches on advanced photonics structures. Based on his
research on how to make the low dimensional photonic
crystal and optical phenomena of the crystal, Prof. Kuipers
aims at developing new devices for optical communications
and high-speed computers.
In Session 4, "National Strategy for Micro/nano Fusion

will look at French approaches and strategies in the fusion ofmicromachine technology and nanotechnology.

Domain," prepares following four lectures.
1. Strategy to Enhance the Application of Micro@nanoTechnology in France
2. Practice Collaboration between Industry andAcademia in Micro/nano System Technology
3. Bio Nano Technology in the 21st Century: CELLOMIX
4. National Strategy on NEMS/MEMS in FranceThe 13th Micromachine Exhibition will be held on theground floor of the Science Museum from November 13(Wednesday) to November 15 (Friday), 2002 and willfeature a diversity of products by micromachine-relatedindustries, universities and institutions. We believe that thismicromachine exhibition and the symposium will provide agood opportunity for participants to obtain a clear andcomprehensive image on what are cutting-edge
micromachine technologies, and we recommend allparticipants to visit the events to enable you to see actual
micromachines in action. Symposium participants can bepermitted free admission to the micromachine exhibition bysimply showing their participation cards.

In the first lecture, "Strategy to Enhance the Applicationof Micro@nano-Technology in France," Dr. Dirk Beernaert ofEURIMUS (Eureka Industrial Initiative for Microsystem'sUsers), will talk the aspects of Integrated Project for the EU
6th Framework Programme such as the project's objectives
and policies, and its development of MEMS products.
The fourth lecture, "National Strategy on NEMS/MEMS inFrance," will be presented by Dr. Constant Axelrad, a Scientific
Advisor at CEA-LETI in Grenoble, France, and actively
involved with France's Micro/nanotechnology Innovation
Center and NEXUS. As the title suggests, Dr. Axelrad's lecture

The deadline for applications to attend the symposium isOctober 31, 2002. but if seats are available, applications will
be accepted on the day of the symposium.

❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉ PROGRAM (Tentative) ❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉
As of October 11, 2002
9:00 --Registration

Session 1 : Opening

Chairman : Mr. T. HIRANO

9:30 -- 9:35

Opening Remarks

9:35 -- 9:40

Guest Speech

Mr. Toshiro SHIMOYAMA, Chairman, Micromachine Center

9:40 -- 10:20

Special Guest Speech: Strategy towards Fusion of Nano and Micro Systems

Director-General,Manufacturing Industries Bureau, METI
Prof. Isao SHIMOYAMA, The University of Tokyo

Session 2 : The Path to New Industries in the 21st Century

Chairman : Prof. H..FUJITA

10:20 -- 10:45

International Standardization of MEMS

10:45 -- 11:10

Standardization of Tensile Testing Method for Thin Film Material - Round Robin Test of Thin Film Specimen -Dr. Kuniki OHWADA, International Standardization Engineering Laboratory

11:10 -- 11:35

MEMS in China, Especially in Shanghai Area

11:35 -- 12:00

MMC’s Initiative towards Foundry Service Network

12:00 -- 13:00❋❋❋❋❋❋❋❋ Lunch ❋❋❋❋❋❋❋❋

13:00 -- 13:30

The Sensibility of Scaling Recognition

Toshiyuki TSUCHIYA, Toyota Central R&D LABS INC
Prof. Yilong HAO, Peking University
Mr. Takashi MIHARA, Foundry Service Industry Committee
Prof. Kazuo KAWASAKI, Nagoya City University Medical School

Session 3 : Innovative R & D

Chairman : Prof. K. .IKUTA

13:30 -- 14:00

Creation of Biochips Aiming at Highly Medical Treatment

14:00 -- 14:30

Micro-fluidics for pre-process of Dioxin Measurement

14:30 -- 15:00

Top Down and Bottom Up Approaches to Bio Nano Technology

15:00 -- 15:30

Nanoscale Light Manipulation

15:30 -- 16:00❋❋❋❋❋❋❋❋ Break ❋❋❋❋❋❋❋❋Prof. Yasuhiro HORIIKE, The University of Tokyo
Dr. Ryo MIYAKE, Hitachi Ltd.
Dr. Jennifer Gaudioso, Sandia National Laboratory
Prof. Laurens KUIPERS, University of Twente

Session 4 : National Strategy for Micro/Nano Fusion domain

Chairman : Prof. I. SHIIMOYAMA

16:00 -- 16:30

Strategy to enhance the application of micro @ nano-technology in France

16:30 -- 17:00

Practice Collaboration between Industry and Academia in Micro-Nano System Technology

Dr. Dirk BEERNAERT, European Commission

17:00 -- 17:30

Bio Nano Technology in 21st Century, CELLOMIX

17:30 -- 18:00

National Strategy on NEMS/MEMS in France

Prof. Susumu SUGIYAMA, Ritsumeikan University
Prof. Teruo OKANO, Tokyo Women’s Medical University
Dr. Constant AXELRAD, CEA-LETI

Session 5 : Closing
18:00 -- 18:10

Closing speech

Mr. Takayuki HIRANO, Executive Director, Micromachine Center2