MMC Activities..............1MEMS-ONE Pj...............5Column.......................6
Overseas Trends............7
Member’s Profiles .........8

MMC Activities

Activities of the Micromachine Center in Fiscal 2004
OVERVIEW
The Micromachine Center undertook the following activities
regarding research and study about micromachines (MEMS andother minute machines and systems), the collection andprovision of micromachine information, and exchange andcooperation with domestic and worldwide organizations. The
aim was to establish basic micromachine technologies andpromote their industrialization, thus contributing to the furtherdevelopment of Japan's industrial economy and to internationalsociety.

1. Research and Investigation of Micromachines
Research activities were aimed at gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research on
new technological issues regarding the fusion of micro- andnanotechnologies, as well as making adjustments appropriate
for the multidirectional expansion of micromachine technology.
(1) Microanalysis/Production System Project(recommissioned NEDO project and contract)
The MMC participated in the national government/NEDOsponsored Microanalysis/Production System Project and isworking on the construction of a document database system.
Specifically, the MMC attended µTAS2004 and MEMS2005 andexamined a total of 480 microchemistry-related documents,
classifying the content of each and compiling a databaseaccordingly.
(2) Studies on the future prospects of micromachine/
MEMS technology
The MMC not only held six next-generation project meetings
attended by key figures in industry, academia, and government,
but also undertook joint research commissioned by theMechanical Social Systems Foundation, proposing a nextgeneration MEMS project to begin in fiscal 2006 aimed atmeeting the requirements and expectations of industry
regarding MEMS and trends in MEMS technology.
(3) Studies on R & D trends for micromachinetechnology in Japan and abroad
The Subcommittee on Trends in R&D for MicromachineTechnology in Japan and Abroad (Chairman: Prof. Shuichi Shoji,Waseda University)met three times, conducting exploratory
analysis of the latest situation regarding the rapid expansion,both domestically and internationally, of micromachinetechnology and research trends and of basic technological datathat contributes to the advancement of micromachinetechnology; and compiled the results of investigations ontechnological trends into the 2004 report on the investigation
into trends by category.
(4) Studies on MEMS reliability assessment
technology(project commissioned by the Japan
Machinery Federation)
The Subcommittee on Trends in Reliability Assessment
Technology was established and met five times. The
subcommittee investigated the current situation of and issues
for MEMS reliability assessment technology using relatedInternet Home Page : http://www.mmc.or.jp/

academic literature, and compiled the recommendations
regarding policies for strengthening approaches in this field into
the 2004 report on the investigation into MEMS reliabilityassessment.
(5) Studies on micro/nanosystem-related processing andassembly/measurement and assessment/handlingtechnology(project commissioned by the MechanicalSocial Systems Foundation)
A report was compiled of the results of investigations aimed
at exploiting MEMS characteristics and enhancing theirpotential as an integrated technology through the integration of
third-generation microprocessing technology and nano-and
other disparate cutting-edge materials. In cooperation with the“Studies on the future prospects of micromachine/MEMStechnology” described above in (2), the MMC made proposals
for a next-generation MEMS project.
(6) Joint survey research activities concerning theindustrialization of MEMS
As measures to promote the expansion and strengthening ofMEMS foundry operations, the a subcommittee comprising
three foundry manufacturers considered two issuestandardization of specialized MEMS terminology, and methodsof response to MEMS foundry users-and maderecommendations to the Foundry Service Industry Committee.
These recommendations are to be implemented in fiscal 2005.
(7) MEMS-ONE: MEMS Open Network Engineering
System of Design Tools Project(NEDO-commissioned project)
The MMC has organized an industry/academia cooperative
research consortium (comprising nine businesses, tenuniversities, one research institute, and one organization). In
June 2004, the center was commissioned to act as
representative for MEMS-ONE (MEMS Open Network
Engineering System of Design Tools Project), a national
government/NEDO project, to oversee development for a threeyear period until March 2006.
Specifically, the MMC oversees a total of six committees,including the Project Promotion Committee, and ensured thatthe project overall proceeded according to plan in the firststage.
The MMC also took part in the construction of the MEMSONE knowledge database and materials/process database,collecting and compiling information from academic literatureand data provided by universities.
(8) Studies on the ripple effect and diffusion of MEMSONE(NEDO-commissioned project)
The MMC and Mizuho Information & Research Institute,
Inc. jointly conducted a NEDO-commission project with the aimof promoting the diffusion of MEMS-ONE. Specifically, a written
and, in some cases, aural survey of potential MEMS-ONE users(domestic organizations) was conducted, as was amarket/needs survey aimed towards diffusion.

2. Collection and Provision of Micromachine Information
Information and documents on micromachines inuniversities, industries, and public organizations both in JapanIndustrial Science and Technology (AIST) joined the network
this year as an associate member. The Foundry Service Industry
Committee met five times; strategies for expanding the network
were considered; the MMC Internet homepage - a channel for
providing information - was upgraded; and two MEMS lectures
were held.

and overseas have been collected and, along with MCCproduced survey results and documents, maintained and not
only made freely available in the MMC library, but also
disseminated widely, both domestically and internationally.
(1) Improved dissemination and exchange of information
through the MCC website
The MMC Internet homepage was revised and thoroughlyoverhauled.

(5) Establishing a forum for the exchange of cuttingedge micro/nano technology
A forum for the exchange of cutting-edge micro-nanotechnology was held two times for supporting members withthe aim of strengthening cooperation between industry andacademia in the micromachine/MEMS field.

(2) Publication of a micromachine periodical(“Micromachine Index”)
A micromachine periodical entitled Micromachine Index
gathering together abstracts of important documents waspublished and distributed to interested parties (fiscal 2004:
Nos. 92-99 issued [8 volumes]).

4. Promotion of Standardization of Micromachines
In cutting-edge technological fields such as
micromachine/MEMS, standardization is being promoted asinternational initiatives are taken.

(3) Publication of a newsletter
Information concerning research and governmental trends
related to micromachines was distributed monthly tosupporting members.

(1)Standardization of fatigue testing methods for micronano materials (application for sponsorship submitted to
the Ministry of Economy, Trade and Industry)
Continuing on from last year, the MMC is conducting
research on standard fatigue testing methods that enableevaluation of the mechanical properties of various thin film
materials measuring less than 10µm wide and 100µm long, withthe aim of international standardization.

(4) Maintaining and upgrading the MMC library
Documents on micromachines in universities, industries,
and public organizations both in Japan and overseas have beencollected and combined with survey results compiled anddocuments produced by MMC and made available in the MMC
library (48 books collected in fiscal 2004, making a total of
1,100 books as of March 31).

(2) Standardization of tensile testing methods for thin film materials
With the support of the Japanese Standards Association,
the MMC has prepared proposals for the international
standardization of tensile testing methods for thin film materials
and standard test pieces. The CD (Committee Draft) submitted
to the International Electric Congress (IEC) was referred toeach of the member countries and approved at the IEC meeting
held in Seoul in October 2004. It was then decided to submit a
CDV (Committee Draft for Vote), one more step closer tointernational standardization.

3. Exchange and Cooperation with Micromachinerelated Organizations Worldwide
To promote affiliation, exchange and cooperation withrelated organizations in and outside Japan, the MMC involved
itself in such activities as participating in the Micromachine
Summit, holding the International Micromachine/Nanotech
Symposium, and inviting to Japan and sending overseas
researchers and experts in the field.
(1) Participation in the 10th Micromachine Summit
The 10th Micromachine Summit was held over three days,
from May 3 to 5, 2004, in Grenoble, France. The event wasattended by 108 participants representing 23 countries andregions. A delegation of four and three observers attended fromJapan, and presentations were made by Isao Shimoyama(professor, the University of Tokyo), Toshiro Shimoyama(Honorary Chairman of MMC), Takayuki Hirano (MMCTechnology Adviser), and Kunihiko Hara (Executive Director,Nippon Soken Inc.)(3) Support for standardization of IEC terminology
At the IEC meeting held in Seoul in October 2004, the CDV
proposed by Japan was approved. It was then decided to submit
a FDIS (Final Draft International Standard). International
standardization will thus be achieved in 2005.
(4) Research and investigation of micromachine standardization
Following the IEC international standardization ofspecialized terminology, it was decided to next proceed withJapan Industrial Standard (JIS). Now that the international
standardization of specialized terminology, tensile testing andfatigue testing has been completed, an investigation isunderway about what other areas require standardization.

(2) Holding the 10th International Micromachine/Nanotech
Symposium (partially subsidized by activities promoting
the machine industry)
The 10th International Micromachine/Nanotech Symposium
was held on November 11 at the Science Museum in
Kitanomaru Park, Tokyo, with the aim of promoting
micromachine technology and educating a wider publicaudience. The event was well attended, with a total of 359
participants including speakers, invited persons and media
representatives.

5. Dissemination of information and education
about micromachines
The MMC undertook a variety of activities aimed atdisseminating information and providing education about
micromachines, including in particular the issue and distributionof quarterly magazines and sponsorship of exhibitions.
(1) Publication of public relations quarterly magazine“Micromachine ”
Volumes 47 to 50 were published in Japanese only. English
versions are available on the MMC website.

(3) International exchange and dispatch of researchers
A fact-finding mission visited Taiwan and Singapore over sixdays, from September 6 to 11, 2004. In Taiwan, the group visitedthe Industrial Technology Research Institute (ITRI) and threecompanies, and in Singapore visited the Institute ofMicroelectronics (IME) and two companies; approaches toMEMS and nanotechnology were discussed. To summarize,Taiwan is planning the foundry industrialization of MEMS andpromoting the use of large diameter wafers on the same level assemiconductors; Singapore is focusing on nanotechnology
research.

(2) The 15th Micromachine Exhibition
The 15th Micromachine Exhibition was held from November 10to 12 at the Science Museum in Kitanomaru Park, Tokyo.
Altogether 247 companies, organizations, and other exhibitors the largest number of exhibitors at any micromachine exhibition
to date - participated (the total number of booths was 352), andthe total number of visitors was 8,213.

(4) Building a MEMS foundry network system
To further the industrialization of MEMS, the MMC hasestablished and operates a foundry network comprisingbusinesses that provide foundry services. In addition to the 10
foundry business members, the National Institute of Advanced(3) Administration of the Federation of MicromachineTechnologyAs secretariat for the Federation of Micromachine Technology,
the MMC endeavored to enhance cooperation between andstrengthen micromachine-related organizations.

2