 ࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ㐿⊒ ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩ㐿⊒ ⎇ⓥ㐿⊒ߩ᭎ⷐ
MEMS 㐿⊒㨯⸳⸘ߦ㑐ࠊࠆ⍮⼂㨯ࡁ࠙ࡂ࠙ࠍ૕♽ൻߒ‫ߣ࠻ࡈ࠰ࠢ࡯ࡢࡓ࡯࡟ࡈޔ‬ㅪ៤ߒ‫ޔ‬ࡈ࡟࡯ࡓࡢ࡯ࠢߩၮᧄᯏ⢻ߢ޽ࠆ࠺࡯࠲ࡌ࡯ࠬ㨯ࠗࡦ࠲࡯ࡈࠚ࡯ࠬࠍㅢߒߡ‫ޔ‬ೋᔃ⠪ߩMEMS ⸳⸘ߩᡰេࠍⴕ߁ߎߣ߇ߢ߈ࠆߣߣ߽ߦ‫ޔ‬MEMS 㐿⊒㨯⸳⸘⠪ߩ⍮⼂‫ޔ‬⍮⷗‫ޔ‬ታ❣
ߩ⫾Ⓧ߇น⢻ߥ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓࠍ᭴▽ߔࠆߎߣࠍ⋡ᮡߣߒߚ‫⋡ޕ‬ᮡߦኻᔕߒ
ߡએਅߩ⎇ⓥ㐿⊒ࠍታᣉߒߚ‫ޕ‬Ԙ ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩᨒ⚵ߺߩ᭴▽⋡ᮡ z ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴ᚑߩᨒ⚵ߺࠍ⚳ੌߔࠆ‫ޕ‬ᚑᨐz ⍮⼂࠺࡯࠲ࡌ࡯ࠬ᭴▽ߦ߅޿ߡ‫ޔ‬MEMS ߩ⸳⸘㐿⊒ߦ᦭ലߥ⍮⼂࠺࡯࠲ࡌ࡯ࠬ
ߩ᭴ᚑߩᨒ⚵ߺߦߟ޿ߡ࠺࡯࠲ᖱႎߩᢛℂ‫ޔ‬ಽᨆࠍታᣉߒ‫ޔ‬⍮⼂࠺࡯࠲ߩ᭴ᚑߩ
ᨒ⚵ߺࠍ᭴▽ߒߚ‫ޕ‬ԙ ⍮⼂࠺࡯࠲ࡌ࡯ࠬ⸳⸘ߣታⵝ⋡ᮡ z ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭎ᔨ⸳⸘߅ࠃ߮⹦⚦⸳⸘ࠍቢੌߔࠆ‫ޕ‬z ᐔᚑ 16 ᐕᐲߩ᭎ᔨ⸳⸘߅ࠃ߮⹦⚦⸳⸘ࠍ〯߹߃‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩ
㐿⊒ࠍቢੌߔࠆ‫ޕ‬z ࡈ࡟࡯ࡓࡢ࡯ࠢ࠰ࡈ࠻ߣߩㅪ៤ߦࠃࠆ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩ⛔วᬌ⸽࠹ࠬ࠻ࠍቢੌߔࠆ‫ޕ‬ᚑᨐz ᭎ᔨ⸳⸘ߦ߅޿ߡߪ⍮⼂࠺࡯࠲ౝኈߦ߅ߌࠆ᭴ᚑⷐ⚛ߩ᛽಴‫ޔ‬᭴ᚑⷐ⚛ߩᓥዻ㑐ଥ╬‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߩⷐઙ᛽಴ࠍⴕ޿‫ޔ‬ᯏ⢻ࠍ᳿ቯߔࠆ‫࡟ࡈߪߢ⸘⸳⚦⹦ޕ‬࡯ࡓࡢ࡯ࠢ࠰ࡈ࠻ߣߩㅪ៤ࠍ⠨ᘦߒߚࠪࠬ࠹ࡓߩࡊࡠࠣ࡜ࡓ᭴ᚑࠍ╷ቯߒߚ‫ޕ‬z ૞ᚑߒߚ࠺࡯࠲ߩ⺰ℂ᭴ㅧ(ER ࿑)ࠍၮߦ⍮⼂࠺࡯࠲ࡌ࡯ࠬ▤ℂࠪࠬ࠹ࡓࠍታⵝ
ߒ‫↹ޔ‬㕙ࠗࡔ࡯ࠫߦᓥߞߚ⫾Ⓧ࡮ᬌ⚝࡮นⷞൻᯏ⢻ࠍታ⃻ߔࠆࠪࠬ࠹ࡓࠍ㐿⊒ߒߚ‫ޕ‬z ⍮⼂࠺࡯࠲ߩ⫾Ⓧ߇ߥߐࠇߚ࠺࡯࠲ࡌ࡯ࠬࠍ↪޿ߡ‫ߩߣ࠻ࡈ࠰ࠢ࡯ࡢࡓ࡯࡟ࡈޔ‬ㅪ៤ߦࠃࠆ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩᯏ⢻ታⵝ߅ࠃ߮⛔วᬌ⸽࠹ࠬ࠻ࠍታᣉ
ߒ‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩേ૞ࠍ⏕⹺ߒߚ‫ޕ‬ᧄ⎇ⓥ㐿⊒ߢ᭴▽ߒߚ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩዉ౉↹㕙ࠍ࿑ 3-5-1 ߦ␜ߔ‫ޕ‬

η- 1

࿑ 3-5-1㧦⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩዉ౉↹㕙(2) ⎇ⓥ㐿⊒ᚑᨐߩ⹦⚦Ԙ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩᨒ⚵ߺߩ᭴▽⍮⼂࠺࡯࠲ࡌ࡯ࠬ᭴▽ߦ߅޿ߡ㊀ⷐߣߥࠆ࠺࡯࠲ࡌ࡯ࠬߩᨒ⚵ߺߦߟ޿ߡ‫ޔ‬MEMS ߩ⸳⸘㐿⊒ߦ᦭ലߥ⍮⼂࠺࡯࠲ߩ᭴ᚑߩⷰὐ߆ࠄ࠺࡯࠲ᖱႎߩᢛℂ‫ޔ‬ಽᨆࠍታᣉߒߚ‫ౕޕ‬૕⊛ߦߪ⍮⼂࠺࡯࠲ࡌ࡯ࠬᆔຬળߦࠃࠆ⼏⺰ߦࠃࠅ‫ޔ‬MEMS⸳⸘ᡰេࠪࠬ࠹ࡓߣߒߡᔅⷐߣߥ
ࠆࡊࡠ࠮ࠬ‫⸘⸳ޔ‬ᛛⴚ╬ߦ㑐ࠊࠆ⍮⼂࠺࡯࠲ߩ㗄⋡ౝኈߩ᛽಴‫ޔ‬ᢛℂ‫ޔ‬ಽ㘃ࠍⴕ޿‫ޔ‬⍮⼂࠺࡯࠲ߩ᭴ᚑߩᨒ⚵ߺࠍ᭴▽ߒߚ‫ޕ‬ᧄ⍮⼂࠺࡯࠲ࡌ࡯ࠬߢߪ‫ޔ‬࿑ 3-5-2 ߩߣ߅ࠅ‫ޔ‬੐଀ࠍ㓏ጀ᭴ㅧൻߒߡ▤ℂߔࠆߎߣߣߒߚ‫ޕ‬

ᄢಽ㘃

ᄢಽ㘃1

੐଀

ਛಽ㘃

ਛಽ㘃1

ਛಽ㘃1-1ਛಽ㘃2ਛಽ㘃1-2

੐଀1ਛಽ㘃3

ਛಽ㘃1-3੐଀2

䋨ᄢಽ㘃䈮ᔕ䈛䈢䋩
ዊಽ㘃

ዊಽ㘃1
ዊಽ㘃2
ዊಽ㘃3
ዊಽ㘃1
ዊಽ㘃2
ዊಽ㘃3

ਛಽ㘃4

ᄢಽ㘃2

ᄢಽ㘃3

࿑ 3-5-2㧦⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ㓏ጀ᭴ㅧߩࠗࡔ࡯ࠫ࿑

η- 2㓏ጀ᭴ㅧߦߪᄢಽ㘃ߣਛಽ㘃߇޽ࠅ‫ߩߡߴߔޔ‬੐଀ߪ޿ߕࠇ߆ߩਛಽ㘃ߦಽ㘃ߐࠇࠆ‫ޕ‬ฦ੐଀ߪ‫ޔ‬ᖱႎࠍ‫(ޔ‬ᄢಽ㘃ߏߣߦ⇣ߥࠆ)ዊಽ㘃ߦಽഀߒߡ଻ᜬߔࠆߎߣߣߒߚ‫ޕ‬ᄢಽ㘃ߣߒߡߪએਅߩ 4 㗄⋡ࠍ⸳ቯߒߚ‫ޕ‬z ࡊࡠ࠮ࠬz ࠺ࡃࠗࠬ
z ᧚ᢱ․ᕈz ⸃ᨆฦᄢಽ㘃ߪ 5㨪10 ߩਛಽ㘃ߦಽ㘃ߐࠇࠆ‫ޔߡߒߣ଀৻ޕ‬ᄢಽ㘃‫ߩޠࠬ࠮ࡠࡊޟ‬ਛಽ㘃ࠍᰴ⴫ߦ␜ߔ‫ޕ‬
⴫ 3-5-1㧦ࡊࡠ࠮ࠬߩਛಽ㘃Ᏹ࿶ / ᷫ࿶ CVD

ᚑ⤑



UV ᵞᵺ

MEMS࡮IC 㓸Ⓧൻࡊ࡜࠭ࡑ CVD⿥㖸ᵄᵞᵺ

⴫㕙ࡑࠗࠢࡠࡑࠪ࡯࠾

ࠬࡄ࠶࠲ᯏ⢻᳓ᵞᵺ

⌀ⓨ⫳⌕

ߘߩઁ

ᾲ㉄ൻ

శ

ࠬࡇࡦࠦ࡯࠻
߼ߞ߈

ࡑ࡞࠴
ࡊࡠ࠮ࠬ

࡝࠰ EBࡃ࡞ࠢࡑࠗࠢࡠࡑࠪ࡯
࡝ࡈ࠻ࠝࡈ
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ဳขࠅᎿ⒟

ࠣ࡜ࡈࠖ X ✢

ߘߩઁ

࠱࡞ࠥ࡞

ߘߩઁ

࠽ࡁࠗࡦࡊ࡝ࡦ࠻

ࠬࡊ࡟࡯ࠦ࡯࠻

㓁ᭂធวࡎ࠶࠻ࠛࡦࡏࠬ

ߘߩઁ

5K ࡈࡘ࡯࡚ࠫࡦࡏࡦ࠺

࠳ࠗࠪࡦࠣ

RIE

ធว

᜛ᢔធว

ߘߩઁ ࡟࡯ࠩ࡯ࠕࡉ࡟࡯࡚ࠪ

ࡂࡦ࠳ធว

࠼࡝࡝ࡦࠣ

࠼࡜ࠗ ࡊ࡜࠭ࡑࠛ࠶࠴ࡦࠣ

ࡈ࡝࠶࠻ࠟ࡜ࠬ

⎇⏴ࠛ࠶࠴ࡦ XeF2 ࠛ࠶࠴ࡦࠣ

ߘߩઁ

ߘߩઁ

Deep-RIEࠣ

O2 ࠕ࠶ࠪࡦࠣ

ࠗࠝࡦᵈ౉





ᾲ᜛ᢔ





ࠕ࠾࡯࡞





ߘߩઁ





ࡢࠗࡗࡏࡦ࠺ࠖࡦࠣ

࠳ࠗࡏࡦ࠺ࠖࡦࠣ









ࡈ࡝࠶ࡊ࠴࠶ࡊࡏࡦ࠺ ᮸⢽᧚ᢱࠛ࠶࠴ࡦࠣ

ࡕ࡯࡞࠺ࠖࡦࠣ





ߘߩઁ

ߘߩઁ





䉟䉥䊮䊚䊥䊮䉫㩷
ߘߩઁSi ⇣ᣇᕈࠛ࠶࠴ࡦࠣ

ਇ⚐‛
᜛ᢔ
࡮ᾲಣℂ

Si ╬ᣇᕈࠛ࠶࠴ࡦࠣ
࠙ࠚ࠶࠻SiO2 ࠛ࠶࠴ࡦࠣ
ࠛ࠶࠴ࡦ SiN ࠛ࠶࠴ࡦࠣ
ࠣᵞᵺ㊄ዻ᧚ᢱࠛ࠶࠴ࡦࠣ

ࡄ࠶ࠤ࡯ ࡂ࡯ࡔ࠴࠶ࠢࠪ࡯࡞
ࠫ

RCA‫㉄ޔ‬ᵞᵺη- 3߹ߚ‫᧚ޔ‬ᢱ․ᕈߪ‫ޔ‬‫᧚ޟ‬ᢱ‫․ޟߣޠ‬ᕈ‫ ߩޠ‬2 ߟߦಽഀߒ‫߽ߢࠄ߆ࠄߜߤޔ‬หߓ੐଀ߦࠕࠢ
࠮ࠬߢ߈ࠆࠃ߁ߦ⸳ቯߒߚ‫᧚ߦࠄߐޕ‬ᢱ․ᕈߦߟ޿ߡߪ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬߣ࠺࡯࠲ࡌ࡯ࠬ
᭴ᚑࠍ৻⥌ߐߖࠆߎߣߣߒߚ‫ޕ‬ԙ⍮⼂࠺࡯࠲ࡌ࡯ࠬ⸳⸘ߣታⵝ
⍮⼂ᖱႎߦߟ޿ߡߪ⍮⼂࠺࡯࠲ࡌ࡯ࠬౝㇱߢ᦭ᯏ⊛ߦㅪ៤ߐߖ‫⫾ޔ‬Ⓧ࡮ᬌ⚝࡮นⷞൻߔ

ࠆࠪࠬ࠹ࡓࠍ㐿⊒ߒߚ‫ߪࠬ࠮ࠢࠕߩ߳ࠬ࡯ࡌ࠲࡯࠺ޔߚ߹ޕ‬㨬ࡈ࡟࡯ࡓࡢ࡯ࠢ࠰ࡈ࠻㨭ߩᯏ⢻ߢ޽ࠆ࠺࡯࠲ࡌ࡯ࠬࠗࡦ࠲࡯ࡈࠚ࡯ࠬߦࠃࠅⴕ߁ߎߣߣߒߚ‫ޕ‬ౕ૕⊛ߦߪ‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬᆔຬળߦࠃࠆ⼏⺰߅ࠃ߮⍮⼂࠺࡯࠲ࡌ࡯ࠬߩᨒ⚵ߺ߆ࠄ‫ޔ‬᭎ᔨ⸳⸘ߦ߅޿ߡߪ⍮⼂࠺࡯࠲ౝኈߦ߅ߌࠆ᭴ᚑⷐ⚛ߩ᛽಴‫ޔ‬᭴ᚑⷐ⚛ߩᓥዻ㑐ଥ╬‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߩⷐઙ᛽಴ࠍⴕ޿‫ޔ‬ᯏ⢻ࠍ᳿ቯߒ‫ߣ࠻ࡈ࠰ࠢ࡯ࡢࡓ࡯࡟ࡈߪߢ⸘⸳⚦⹦ޔ‬ߩㅪ៤ࠍ⠨ᘦߒߚࠪࠬ࠹ࡓߩࡊࡠࠣ࡜ࡓ᭴ᚑߩ╷ቯࠍታᣉߒߚ‫ޕ‬⍮⼂࠺࡯࠲ౝኈߩ᭴ᚑⷐ⚛ߩ᛽಴‫ޔ‬᭴ᚑⷐ⚛ߩᓥዻ㑐ଥ╬‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߩⷐઙ᛽
಴‫ޔ‬ᯏ⢻ࠍ᳿ቯߒ‫⺰ߩ࠲࡯࠺ޔ‬ℂ᭴ㅧ(ER ࿑)ࠍ૞ᚑߒߚ‫ޕ‬࿑ 3-5-4 ߦ ER ࿑ߩ৻ㇱࠍ␜ߔ‫ޕ‬߹ߚ‫ߩߣ࠻ࡈ࠰ࠢ࡯ࡢࡓ࡯࡟ࡈޔ‬ㅪ៤ࠍ⠨ᘦߒߚࠪࠬ࠹ࡓߩࠕ࡯ࠠ࠹ࠢ࠴ࡖࠍએਅߩࠃ
߁ߦ⸳ቯߒߚ‫ޕ‬౉ജ䊶వ↢䊶䊐䉜䊮䊄䊥
etc⍮⼂DBᢥ┨䇮↹௝ਛᔃ

䊐䊧䊷䊛㑛ⷩ䇮૞ᚑ䇮ᦝᣂ 䊪䊷䉪䈱䊂䊷䉺⊓㍳䉸䊐䊃䉁䈢䈲Excel䈭䈬

↹㕙

䊡䊷䉱

࿑ 3-5-3㧦⍮⼂࠺࡯࠲ࡌ࡯ࠬߩࠕ࡯ࠠ࠹ࠢ࠴ࡖ
ࠕ࡯ࠠ࠹ࠢ࠴ࡖߩᄖㇱᯏ⢻ߣߒߡ‫࠻ࠢࠚࠫࡠࡊޔ‬ೋᐕᐲ߆ࠄ⍮⼂ᖱႎࠍ⊓㍳ߔࠆߚ߼ߩ
ೋᦼ⍮⼂࠺࡯࠲⊓㍳ࠪࠬ࠹ࡓࠍవߦ૞⵾ߒ‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬᆔຬળᆔຬߦ㈩Ꮣߔࠆߎߣ
ߢ⍮⼂ᖱႎߩ෼㓸ߦᡰ㓚߇ߥ޿ࠃ߁ߦታᣉߒߚ‫ޕ‬࿑ 3-5-5 ߦೋᦼ⍮⼂࠺࡯࠲⊓㍳ࠪࠬ࠹ࡓߩ
ೋᦼ↹㕙ࠍ␜ߔ‫ޕ‬

η- 4

࿑ 3-5-4㧦⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ ER ࿑(ᛮ☴)η- 5࿑ 3-5-5㧦ೋᦼ⍮⼂࠺࡯࠲⊓㍳ࠪࠬ࠹ࡓએ਄ࠃࠅ‫⺰ߩ࠲࡯࠺ޔ‬ℂ᭴ㅧ(ER ࿑)ࠍၮߦ MySQL ࠍ↪޿ߚ⍮⼂࠺࡯࠲ࡌ࡯ࠬ▤ℂࠪࠬ
࠹ࡓࠍታⵝߒ‫╷߼ߓ߆ࠄ޽ޔ‬ቯߒߚ↹㕙ࠗࡔ࡯ࠫߦᓥߞߚ⫾Ⓧ࡮ᬌ⚝࡮นⷞൻᯏ⢻ࠍታ⃻ߔࠆࠪࠬ࠹ࡓࠍ㐿⊒ߒ‫⛔ޔ‬วᬌ⸽࠹ࠬ࠻ࠍታᣉߒߚ‫ޕ‬એਅߦ㐿⊒ߒߚ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩᯏ⢻ࠍ␜ߔ‫ޕ‬C⍮⼂࠺࡯࠲ߩ⫾Ⓧ
࡙࡯ࠩߦࠃࠆ⍮⼂࠺࡯࠲ߩㅊട‫ޔ‬ᄌᦝ╬ࠍታ⃻ߔࠆߚ߼ߦ‫ޔ‬⍮⼂࠺࡯࠲ߩ✬㓸ᯏ⢻ࠍታⵝߒߚ‫ޕ‬ታⵝߒߚ✬㓸ᯏ⢻ࠍ⴫ 3-5-2 ߦ␜ߔ‫ޕ‬
⴫ 3-5-2㧦⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩ✬㓸ᯏ⢻
ᯏ⢻ฬ
੐଀ㅊട
੐଀೥㒰
࠲ࠗ࠻࡞ᄌᦝ
ࡍ࡯ࠫ✬㓸ࠠ࡯ࡢ࡯࠼✬㓸ෳ⠨ᢥ₂✬㓸
࡙࡯ࠩ૞ᚑ੐଀౉ജ

ᯏ⢻ౝኈಽ㘃ߦ੐଀ࠍㅊടߔࠆ‫ޕ‬੐଀ࠍ೥㒰ߔࠆ‫ޕ‬࠲ࠗ࠻࡞ࠍᄌᦝߔࠆ‫ޕ‬੐଀ߩࡍ࡯ࠫㅊട‫ޔ‬೥㒰‫ޔ‬ᄌᦝࠍⴕ߁‫ޕ‬੐଀Ფߦ⸳ቯߔࠆࠠ࡯ࡢ࡯࠼ࠍ✬㓸ߔࠆ‫ޕ‬੐଀Ფߦ⸳ቯߔࠆෳ⠨ᢥ₂ࠍ✬㓸ߔࠆ‫ޕ‬ᜰቯࡈࠜ࡞࠳એਅߩ࡙࡯ࠩ૞ᚑ੐଀ࠍ౉ജߒ‫࡯ࡌ࠲࡯࠺ޔ‬η- 6࡙࡯ࠩ૞ᚑ੐଀಴ജ࡙࡯ࠩ⊓㍳੐଀ో೥㒰D

ࠬߦ⊓㍳ߔࠆ‫ޕ‬࡙࡯ࠩ૞ᚑ੐଀ࠍᜰቯࡈࠜ࡞࠳ߦ಴ജߔࠆ‫ޕ‬࡙࡯ࠩ⊓㍳੐଀ࠍߔߴߡ೥㒰ߔࠆ‫ޕ‬⍮⼂࠺࡯࠲ߩนⷞൻ
⍮⼂࠺࡯࠲ࠍนⷞൻߔࠆߚ߼ߦ᭴▽ߒߚ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩ↹㕙ⷐ⚛ࠍ⴫ߦ␜ߔ‫ޕ‬
⴫ 3-5-3㧦⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩ↹㕙ⷐ⚛
↹㕙ⷐ⚛
ᬌ⚝᧦ઙ౉ജ㗔ၞ⴫␜ౝኈᬌ⚝ࠠ࡯ࡢ࡯࠼‫᧦ޔ‬ઙࠍ౉ജߒ߹ߔ‫ޟޕ‬ᬌ⚝‫࠶࡝ࠢࠍࡦ࠲ࡏޠ‬ࠢߔࠆߣᬌ⚝ࠍታⴕߒ߹ߔ‫ޕ‬ಽ㘃࡮੐଀ㆬᛯ㗔ၞㆬᛯߐࠇߚಽ㘃ߩ੐଀ࠍ৻ⷩ⴫␜ߒ߹ߔ‫ޕ‬੐଀ࠍࠢ࡝࠶ࠢߔࠆ
ߣㆬᛯߐࠇߚ੐଀߇⴫␜ߐࠇ߹ߔ‫ߦᤨ࡞࡯࠻ࠬࡦࠗ߅ߥޕ‬㈩Ꮣ
ߐࠇࠆ੐଀ߪ㤥⦡ߢ‫ࠩ࡯࡙ޔ‬૞ᚑ੐଀ߪ⿒⦡ߢ੐଀࠲ࠗ࠻࡞߇
⴫␜ߐࠇ߹ߔ‫ޕ‬ಽ㘃࡮࠲ࠗ࠻࡞⴫␜㗔ၞ⃻࿷⴫␜ߐࠇߡ޿ࠆ੐଀ߩಽ㘃‫ޕߔ߹ߒ␜⴫ࠍ࡞࠻ࠗ࠲ޔ‬㗄⋡ಽ㘃ㆬᛯ㗔ၞ⴫␜ਛߩ੐଀ߦ⸳ቯߐࠇߡ޿ࠆ㗄⋡ಽ㘃߇ㆬᛯน⢻ߣߥࠅ߹ߔ‫ޕ‬ࠬ࡜ࠗ࠼⴫␜㗔ၞㆬᛯߐࠇߚࡍ࡯ࠫߩࠬ࡜ࠗ࠼ࠍ⴫␜ߒ߹ߔ‫ޕ‬⸃⺑⴫␜㗔ၞ
ㆬᛯߐࠇߚࡍ࡯ࠫߩ⸃⺑ᢥࠍ⴫␜ߒ߹ߔ‫ޕ‬ࠠ࡯ࡢ࡯࠼࡮ෳ⠨ᢥ₂⴫␜ ⴫␜੐଀ߦ㑐ㅪߔࠆࠠ࡯ࡢ࡯࠼‫ޔ‬ෳ⠨ᢥ₂ࠍ⴫␜ߒ߹ߔ‫ޕ‬ࡍ࡯ࠫㆬᛯ㗔ၞ⴫␜ࠍⴕ߁ࡍ࡯ࠫࠍㆬᛯߒ߹ߔ‫ޕ‬߹ߚ‫ࠬ࡯ࡌ࠲࡯࠺ޔ‬ౝߦ⫾Ⓧߒߚ੐଀ߦኻߒߡ‫ޔ‬นⷞൻᯏ⢻ࠍ૶↪ߒߡ⴫␜ߒߚ଀ࠍ࿑
3-5-6 ߦ␜ߔ‫ޕ‬

η- 7ᬌ⚝᧦ઙ౉ജ㗔ၞಽ㘃࡮࠲ࠗ࠻࡞⴫␜㗔ၞ㗄⋡ಽ㘃ㆬᛯ㗔ၞࠬ࡜ࠗ࠼⴫␜㗔ၞಽ㘃࡮੐଀ㆬᛯ㗔ၞ⸃⺑⴫␜㗔ၞ

ࠠ࡯ࡢ࡯࠼࡮ෳ⠨ᢥ₂⴫␜ࡍ࡯ࠫㆬᛯ㗔ၞ

࿑ 3-5-6㧦⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩนⷞൻ↹㕙
E⍮⼂࠺࡯࠲ᬌ⚝⍮⼂࠺࡯࠲ࡌ࡯ࠬౝߩ࠲ࠗ࠻࡞‫ޔ‬ᢥᦠࠍኻ⽎ߦᬌ⚝ࠍታᣉߒ‫౉ޔ‬ജߐࠇߚࠠ࡯ࡢ࡯࠼ࠍ

฽߻੐଀ࠍ৻ⷩ⴫␜ߔࠆᬌ⚝ᯏ⢻ࠍ㐿⊒ߒߚ‫ޕ‬ᬌ⚝ࠍታⴕߔࠆ㓙ߦ૶↪ߔࠆࡔ࠾ࡘ࡯ࠍ⴫
3-5-4 ߦ␜ߔ‫ޕ‬
⴫ 3-5-4㧦⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩᬌ⚝ࡔ࠾ࡘ࡯ᬌ⚝ࠠ࡯ࡢ࡯࠼

ᬌ⚝ࠠ࡯ࡢ࡯࠼ࠍⓨ⊕඙ಾࠅߢ౉ജߔࠆ‫ޕ‬ᬌ⚝ࡕ࡯࠼ㆬᛯ

‫ࠍߡߴߔޟ‬฽߻(AND)‫ࠍ߆ࠇߕ޿ޟߣޠ‬฽߻(OR)‫߇ޠ‬ㆬᛯน⢻‫ޕ‬ᬌ⚝⚿ᨐ⴫␜↹㕙ᬌ⚝⚿ᨐࠍ⴫␜ߔࠆ‫ޕ‬એਅߩ㗄⋡ࠍ⴫␜ߒ‫ࠢ࠶࡝ࠢࠍ࡞࠻ࠗ࠲ޔ‬ߔࠆߣ‫ޔ‬୘೎੐଀߇⴫␜ߐࠇࠆ‫ޕ‬  ࡮࠲ࠗ࠻࡞  ࡮ᬌ⚝ߦ৻⥌ߒߚ⺆ฏࠍ฽߻ࡍ࡯ࠫߩ⸃⺑ᢥ‫ޟ‬ᬌ⚝‫ࡦ࠲ࡏޠ‬౉ജ᧦ઙߦࠃࠆᬌ⚝ࠍታⴕߔࠆ‫ޕ‬೨࿁ᬌ⚝⚿ᨐ

⋥೨ߩᬌ⚝⚿ᨐࠍ⴫␜ߔࠆ‫ޕ‬

η- 8‫ޠ₸ࠣࡦࡗޟ‬‫ޔ‬‫ࡦ࠰ࠕࡐޟ‬Ყ‫ߩޠ‬෺ᣇߩࠠ࡯ࡢ࡯࠼ࠍ฽߻ᬌ⚝ߩታⴕ଀ࠍ࿑ 3-5-7 ߦ␜ߔ‫⿒ޕ‬⦡ߢᬌ⚝ࠠ࡯ࡢ࡯࠼߇⴫␜ߐࠇ‫ޔࠅࠃߦߣߎࠆߔࠢ࠶࡝ࠢࠍ࡞࠻ࠗ࠲ޔ‬ᬌ⚝᧦ઙߦ৻⥌ߒߚࡍ࡯ࠫ߇⴫␜ߐࠇࠆ‫ޕ‬ⶄᢙࠠ࡯ࡢ࡯࠼ࠍⓨ⊕඙ಾࠅߢ౉ജ

ᬌ⚝⚿ᨐ⴫␜ߔ ߴ ߡ ࠍ ฽ ߻ (AND)ߣ޿ߕࠇ߆ࠍ฽߻(OR)ࠍㆬᛯ

࠲ࠗ࠻࡞ࠍࠢ࡝࠶
ࠢߔࠆߣ੐଀⴫␜

࿑ 3-5-7㧦⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߩᬌ⚝ታⴕ଀એ਄ࠃࠅ‫ޔ‬MEMS 㐿⊒㨯⸳⸘⠪ߩ⍮⼂‫ޔ‬⍮⷗‫ޔ‬ታ❣ߩ⫾Ⓧ߇น⢻ߥ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪ
ࠬ࠹ࡓࠍ㐿⊒ߒ‫ޔ‬MemsONE ࠪࠬ࠹ࡓߦታⵝߒߚ‫ޕ‬(3) ⎇ⓥ㐿⊒ᚑᨐߩᗧ⟵㐿⊒ߐࠇߚ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߦࠃࠆ MEMS ߩၮᧄ⍮⼂ߩขᓧ‫⫾ޔ‬Ⓧ߇ኈᤃߦߥࠆߎߣ߆ࠄ‫ޔ‬MEMS ⸳⸘ߩೋᔃ⠪ߦኻߔࠆ MEMS ⸳⸘⍮⼂ᡰេߦߥࠆߛߌߢߪߥߊ‫ޔ‬↥ᬺ⇇߆ࠄߩᣂⷙ MEMS ੐ᬺෳടߩ⍮⼂⊛ߥ㓚ოࠍૐਅߐߖࠆߎߣ߇ᦼᓙߐࠇࠆ‫ޔߚ߹ޕ‬ฦ MEMS ⎇ⓥ㐿⊒ડᬺ‫ޔ‬MEMS ⎇ⓥᢎ⢒ᯏ㑐╬ߢ↪޿ࠄࠇࠆߎߣߦࠃࠅ‫ޔ‬ฦ‫⎇ߩޘ‬ⓥ㐿
⊒ᯏ㑐․᦭ߩࡊࡠ࠮ࠬ‫᧦⟎ⵝޔ‬ઙ‫⚻ߩ╬࠙ࡂ࠙ࡁޔ‬㛎ೣߦၮߠߊ⍮⼂ᖱႎࠍ⍮⼂࠺࡯࠲ࡌ࡯ࠬ࡮ࠪࠬ࠹ࡓߦ⫾Ⓧߔࠆߎߣ߇น⢻ߢ޽ࠅ‫ޔ‬ฦ⎇ⓥ㐿⊒ᯏ㑐ౝߩᖱႎߩ౒᦭ൻ‫ޔ‬ฦ⎇ⓥ㐿⊒ᯏ㑐ߩ MEMS ⎇ⓥ㐿⊒ߩടㅦ‫ޔ‬᜛ᄢߦ⾗ߔࠆߣᕁࠊࠇࠆ‫ޕ‬

η- 9⍮⼂࠺࡯࠲ߩ૞ᚑ‫ޔ‬ᢛℂ࡮⫾Ⓧ(1) ⎇ⓥ㐿⊒ߩ᭎ⷐ ࡊࡠࠫࠚࠢ࠻ߩ⋡ᮡߩ৻ߟߦ‫ޔ‬ೋᔃ⠪߿⚻㛎ߩਲߒ޿⎇ⓥ⠪࡮ᛛⴚ⠪ߦ߽૶޿ߎߥߖࠆ
ࠪࠬ࠹ࡓߩ᭴▽߇ឝߍࠄࠇߡ޿ࠆ‫⋡ߩߎޕ‬ᮡ㆐ᚑߩ৻Ⅳߣߒߡ‫ޔ‬వ┵⎇ⓥ⠪ߩ⼾ንߥ⍮⷗߿ࡁ࠙ࡂ࠙ࠍ⫾Ⓧߒߚ૶޿ᤃ޿⍮⼂࠺࡯࠲ࡌ࡯ࠬࠍ㐿⊒ߒߚ‫ߩߎޕ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߪ‫ޔ‬ೋᔃ⠪ߩ㧹㧱㧹㧿⸳⸘ߦ߅ߌࠆᡰេ߇ⴕ߃ࠆߣߣ߽ߦ‫ޔ‬㧹㧱㧹㧿㐿⊒࡮⸳⸘⠪ߩ⍮⼂‫ޔ‬⍮⷗‫ޔ‬ታ❣ߩ⫾Ⓧ߇น⢻ߥ࠺࡯࠲ࡌ࡯ࠬߣߥߞߡ޿ࠆ‫ߩߎޕ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽߇‫ޔ‬㧹㧱㧹㧿⸳⸘ߦ᦭ലߥ⸳⸘࡮⸃ᨆᡰេࠪࠬ࠹ࡓታ⃻ߦᄢ߈ߊ⽸₂ߒߡ޿ࠆ‫ޕ‬Ԙታᣉ૕೙⍮⼂࠺࡯࠲૞ᚑ૞ᬺߩታᣉߪ‫࡯࠲ࡦ࠮ࡦࠪࡑࡠࠢࠗࡑޔ‬㧔એਅ‫ޔ‬㧹㧹㧯㧕߅ࠃ߮㧹㧹㧯߆ࠄౣᆔ⸤ߒߚ㧝㧞ᄢቇ߇ᜂᒰߒߚ‫↥ޔߚ߹ޕ‬ᬺᛛⴚ✚ว⎇ⓥᚲ߅ࠃ߮ෳടડᬺߩදജߦ
ࠃࠅᓧࠄࠇߚ⍮⼂࠺࡯࠲߽ട߃‫࠲࡯࠺ޔ‬ᢛℂ࡮⫾Ⓧߪ㧹㧹㧯߇ⴕߞߚ‫ޕ‬ዏ‫ޔ‬ᐔᚑ㧝㧣ᐕᐲߩᾲ࡮శ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ടᎿ⸃ᨆᯏ⢻ߩㅊടߦ઻޿‫࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޔ‬ടᎿߦ㑐ߔࠆ⍮⼂࠺࡯࠲ࠍ෼㓸ߔࠆߚ߼‫ޔ‬ᣂߚߦ⟲㚍ᄢቇ‫ޔ‬㚂ㇺᄢቇ᧲੩߇ടࠊࠅ㧝㧞ᄢቇߣߥߞߚ‫ޕ‬㧨ౣᆔ⸤వᄢቇ㧪ᄢ㒋ᐭ┙ᄢቇ‫ޔ‬ጟጊᄢቇ‫ޔ‬㚅Ꮉᄢቇ‫ޔ‬੩ㇺᄢቇ‫⟲ޔ‬㚍ᄢቇ‫ޔ‬㚂ㇺᄢቇ᧲੩‫᧲ޔ‬੩ᄢቇ‫ޔ‬᧲੩Ꮏᬺᄢቇ‫⼾ޔ‬ᯅᛛⴚ⑼ቇᄢቇ‫ޔ‬ฬฎደᄢቇ‫ޔ‬ᣂẟᄢቇ‫౓ޔ‬ᐶ⋵┙ᄢቇ㧨දജవ㧪↥ᬺᛛⴚ✚ว⎇ⓥᚲ‫᧻ޔࠬࡄࡦ࡝ࠝޔࡦࡠࡓࠝޔ‬ਅ㔚Ꮏ‫ޔ‬ᣣ┙⵾૞ᚲ‫ޔ‬ਃ⪉㔚ᯏԙታᣉ᭎ⷐᐔᚑ㧝㧢ᐕᐲߪ‫ޔ‬ᄢቇ⎇ⓥ⠪ߩኾ㐷ᕈࠍ⊒ើߒߡ⍮⼂࠺࡯࠲ߩᨒ⚵ߺ᭴ᚑߩᬌ⸛ߦෳ↹ߒ‫ޔ‬⍮⼂࠺࡯࠲ࠍ࠺ࡃࠗࠬ‫⸃ޔࠬ࠮ࡠࡊޔ‬ᨆ‫᧚ޔ‬ᢱ․ᕈߩ㧠ಽ㊁ߦ⸳ቯߔࠆߎߣ‫ߘߚ߹ޔ‬ࠇߙࠇߩಽ㊁ߦ߅ߌࠆ࠺࡯࠲ߩ᭴ᚑⷐ⚛ߩ᛽಴ߣ෼⚊ߩᒻᑼߦߟ޿ߡឭ᩺ߒ‫ߩߎޔ‬᩺ࠍၮߦ㐿⊒ᜂᒰߦࠃߞߡ⍮⼂࠺࡯࠲ࡌ࡯ࠬ઀᭽߇૞ᚑߐࠇߚ‫ޕ‬ᐔᚑ㧝㧣ᐕᐲ߆ࠄߪ‫ߩߎޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬ઀᭽ߦቯ߼ࠆࠞ࠹ࠧ࡝㧔࠺ࡃࠗࠬ‫⸃ޔࠬ࠮ࡠࡊޔ‬ᨆ‫᧚ޔ‬ᢱ․ᕈߩᄢಽ㘃‫ޔ‬એਅਛಽ㘃࡮ዊಽ㘃㧕ߦၮߠ޿ߚ⍮⼂࠺࡯࠲ߩ૞ᚑ࡮⊓㍳ࠍታᣉߒߚ‫ߩߎޕ‬⍮⼂࠺࡯࠲ߩ૞
ᚑ࡮⊓㍳ߪ‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬ㐿⊒ᜂᒰ߆ࠄឭଏߐࠇߚೋᦼ࠺࡯࠲⊓㍳࠰ࡈ࠻ࠍ↪޿ߡታᣉߒߚ‫ޕ‬
㧨ᄢቇߩᜂᒰ࠹࡯ࡑ㧪
0Q

ᄢቇฬ

 ᄢ㒋ᐭ┙ᄢቇᜂᒰ࠹࡯ࡑ
࠽ࡁࠗࡦࡊ࡝ࡦ࠻ടᎿߦ߅ߌࠆ᧚ᢱ․ᕈߣടᎿ᧦ઙߩ㑐ଥ෸߮⹏
ଔᣇᴺߦ㑐ߔࠆ⍮⼂ DB ߣ᧚ᢱ DB ߩ᭴▽

η- 10 ጟጊᄢቇ 㧹㧱㧹㧿᧚ᢱߩ㔚⏛․ᕈ⸘᷹ߣߘࠇࠍᵴ↪ߒߚ㔚⏛⇇⸃ᨆߩߚ߼ߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬ᭴▽ FDTD ⸃ᨆ࠰ࡈ࠻ߩឭଏߣ MemsONE ߳ߩ⚵ߺㄟߺ෸߮⸃ᨆ
ℂ⺰ߣ೑↪⠪⍮⼂ DB ߩ᭴▽ 㚅Ꮉᄢቇ

ࡑ࡞࠴ࡊࡠ࠮ࠬ࠺࡯࠲ࡌ࡯ࠬߩߚ߼ߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ ੩ㇺᄢቇ 㧹㧱㧹㧿᧚ᢱߩᯏ᪾⊛․ᕈ࠺࡯࠲ࡌ࡯ࠬߩߚ߼ߩ⸃ᨆ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ 㧹㧱㧹㧿᧚ᢱߩᾲવዉ࡮ᾲવ㆐․ᕈ࠺࡯࠲ࡌ࡯ࠬߩߚ߼ߩ⸃ᨆ
⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ടᎿߩടᎿ᧦ઙߦ㑐ߔࠆ⍮⼂ DB ߩ᭴▽ ⟲㚍ᄢቇ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ടᎿ⸃ᨆℂ⺰ߣ⸃ᨆᣇᴺ෸߮ടᎿᤨߩ⍮⼂ DBߩ᭴▽ 㚂ㇺᄢቇ᧲੩

࠽ࡁࠗࡦࡊ࡝ࡦ࠻↪᧚ᢱߩ᧚ᢱ⹜㛎ᣇᴺߦ㑐ߔࠆ⍮⼂ DB ߩ᭴▽ߣ᧚ᢱ DB ߩ෼㓸 ᧲੩ᄢቇ

࠼࡜ࠗࠛ࠶࠴ࡦࠣ࠺࡯࠲ࡌ࡯ࠬߩߚ߼ߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ ᧲੩Ꮏᬺᄢቇ

㧹㧱㧹㧿ࠍ᭴ᚑߔࠆࡑࠗࠢࡠ࡮࠽ࡁ᧚ᢱߩᯏ᪾⊛․ᕈ⹏ଔ ⼾ᯅᛛⴚ⑼ቇᄢ ᚑ⤑ࡊࡠ࠮ࠬ࠺࡯࠲ࡌ࡯ࠬ߅ࠃ߮㔚ሶ࿁〝㓸Ⓧࡊࡠ࠮ࠬߩߚ߼ߩ
ቇ ฬฎደᄢቇ

⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽⇣ᣇᕈ࠙ࠚ࠶࠻ࠛ࠶࠴ࡦࠣ࠺࡯࠲ࡌ࡯ࠬߩߚ߼ߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ ᣂẟᄢቇࡑࠗࠢࡠ࠺ࡃࠗࠬ↪᧚ᢱߩធว࡮ធ⌕ା㗬ᕈ੍᷹ᚻᴺߩ㐿⊒ ౓ᐶ⋵┙ᄢቇࡑࠗࠢࡠ߆ࠄ࠽ࡁ㗔ၞߢߩ᧚ᢱ․ᕈขᓧߩߚ߼ߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽(2) ⎇ⓥ㐿⊒ᚑᨐߩ⹦⚦㧹㧱㧹㧿ߩ⸳⸘࡮⵾૞ߦ៤ࠊࠆవ┵⎇ⓥ⠪࡮ᛛⴚ⠪㧔ᄢቇ‫⎇ޔ‬ⓥᯏ㑐‫ޔ‬ડᬺ㧕ߩ⼾ንߥ⍮⷗߿ࡁ࠙ࡂ࠙ࠍ‫ޔߪߦࠄߐޔ‬ઍ⴫⊛ߥ࠺ࡃࠗࠬ‫⸘ޔࠬ࠮ࡠࡊޔ‬᷹⹏ଔ╬ߩ㑐ㅪᛛⴚߦ㑐ߔࠆ੐଀ࠍ⍮⼂࠺࡯࠲ߣߒߡ㓸⚂ߒߚ‫ޔߚ߹ޕ‬ᐔᚑ㧝㧣ᐕᐲ߆ࠄᯏ⢻ㅊടߐࠇߚ࠽ࡁࠗࡦ
ࡊ࡝ࡦ࠻ടᎿ࡮⸃ᨆߦ㑐ࠊࠆ‫ᦨߩဳޔ‬ㆡൻ‫⸃ޔ‬ᨆᛛⴚ‫ޔ‬႟ᕈടᎿ‫᧚ޔ‬ᢱ⹜㛎ߥߤߩ⍮⼂࠺࡯࠲ߦߟ޿ߡ߽૞ᚑ࡮෼㓸ߒ‫ޔ‬㓸⚂ߒߚ‫ޕ‬ᐔᚑ㧝㧢ᐕᐲߪ‫ޔ‬ᄢቇ⎇ⓥ⠪ߩኾ㐷ᕈࠍ⊒ើߒߡ⍮⼂࠺࡯࠲ߩᨒ⚵ߺ᭴ᚑߩᬌ⸛ߦෳ↹ߒ‫ޔ‬⍮⼂࠺࡯࠲ࠍ࠺ࡃࠗࠬ‫⸃ޔࠬ࠮ࡠࡊޔ‬ᨆ‫᧚ޔ‬ᢱ․ᕈߩ㧠ಽ㊁ߦ⸳ቯߔࠆߎߣ‫ߘߚ߹ޔ‬ࠇߙࠇߩಽ㊁ߦ߅ߌࠆ࠺࡯࠲ߩ᭴ᚑⷐ⚛ߩ᛽಴ߣ෼⚊ߩᒻᑼߦߟ޿ߡឭ᩺ߒ‫ޔ‬ᰴߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬ઀᭽ࠍ᳿ቯߒߚ‫ޕ‬࡮ᄢಽ㘃ߣߒߡ‫᧚ޔࠬ࠮ࡠࡊޔࠬࠗࡃ࠺ޔ‬ᢱ․ᕈ‫⸃ޔ‬ᨆߩ㧠ಽ㊁ߦಽ㘃ߔࠆ‫ޕ‬

η- 11࡮ᄢಽ㘃ߩਅߦ‫ࠇߙࠇߘޔ‬ਛಽ㘃‫ޔ‬੐଀㧔ዊಽ㘃㧕ࠍ⟎ߊ‫ޕ‬࡮੐଀ߩಽ㘃㧔ዊಽ㘃㧕 ࠺ࡃࠗࠬ㧦 ᭎ⷐ‫ޔ‬᭴ㅧ‫․ޔ‬ᕈ࡮ᕈ⢻࡮⹏ଔ‫ޔ࠼࡯ࡢ࡯ࠠޔ‬ෳ⠨ᢥ₂ࡊࡠ࠮ࠬ㧦 ᭎ⷐ‫ޔ‬ኻ⽎᧚ᢱ‫᧦ޔ⟎ⵝޔ‬ઙ‫⑌ޔ‬ೣ੐㗄‫⇐ޔ‬ᗧ੐㗄‫ޔ࠼࡯ࡢ࡯ࠠޔ‬ෳ⠨
ᢥ₂
 ᧚ᢱ․ᕈ㧦 ᭎ⷐ‫⵾ޔ‬ᴺ‫ޔ‬᷹ቯᚻᴺ㧔ⵝ⟎‫⹜ޔ‬㛎 㧕‫ޔ࠼࡯ࡢ࡯ࠠޔ‬ෳ⠨ᢥ₂ ⸃ᨆ  㧦 ⋡⊛࡮᭎ⷐ࡮ᚻ㗅‫࡞࠺ࡕޔ‬᭴ㅧ࡮ࡔ࠶ࠪࡘ‫ޔ‬Ⴚ⇇᧦ઙ‫‛ޔ‬ᕈ᧦ઙ‫ޔ‬⚿ᨐ࡮⹏ଔ࡮ታ㛎ߣߩᲧセ‫ࡦࠪࡑޔ‬ⅣႺ‫ޔ࠼࡯ࡢ࡯ࠠޔ‬ෳ⠨ᢥ₂ᐔᚑ㧝㧣ᐕᐲ߆ࠄߪ‫઀ߩߎޔ‬᭽ߦၮߠ߈ᧄᩰ⊛ߥ⍮⼂࠺࡯࠲ߩ૞ᚑ࡮෼㓸ࠍታᣉߒߚ‫ޕ‬એ㒠ߦ‫ޔ‬㧹㧹㧯߅ࠃ߮ฦᄢቇߩ⎇ⓥᚑᨐߩ⹦⚦ࠍ␜ߔ‫⊓ޔߚ߹ޕ‬㍳ߒߚ⍮⼂࠺࡯࠲ࠍ⍮⼂࠺࡯࠲ࡌ࡯ࠬࠪࠬ࠹ࡓߢ⴫␜ߒߚ଀ࠍ‫ޔ‬࿑ 3-5-8‫ޔ‬࿑ 3-5-9 ߦ␜ߔ‫ޕ‬٨ᬌ⚝ࡔ࠾ࡘ࡯  ࠠ࡯ࡢ࡯࠼ᬌ⚝ࠍታᣉߔࠆ㓙ߦ૶↪ߔࠆࡔ࠾ࡘ࡯⴫␜
٨㗄⋡ಽ㘃ㆬᛯ  ⴫␜ࠍⴕ߁㗄⋡ಽ㘃ࠍㆬᛯ٨ࠬ࡜ࠗ࠼(↹௝)⴫␜
୘೎੐଀ߦᩰ⚊ߐࠇߡ޿ࠆࠬ࡜ࠗ࠼ౝߩ
↹௝ࠍ⴫␜٨ࠬ࡜ࠗ࠼(ᢥᦠ)⴫␜
୘೎੐଀ߦᩰ⚊ߐࠇߡ޿ࠆࠬ࡜ࠗ࠼ౝߩ
↹௝ࠍ⴫␜٨੐଀ㆬᛯࡔ࠾ࡘ࡯  ਛಽ㘃 Ფߦ඙ಽߒߡ
੐଀ߩ࠲ࠗ࠻࡞ࠍ⴫␜

٨⴫␜ࡍ࡯ࠫㆬᛯ
⴫␜ࠍⴕ߁੐଀ౝߩ
ࡍ࡯ࠫࠍㆬᛯ


࿑ 3-5-8 ↹㕙ࠗࡔ࡯ࠫߣ⍮⼂࠺࡯࠲ߩෳᾖ଀


η- 12


࿑ 3-5-9 ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩᬌ⚝଀Ԙ ⍮⼂࠺࡯࠲㓸⚂ᚑᨐߩ᭎ⷐ
⍮⼂㧰㧮ᆔຬળߦ߅޿ߡ‫⋡ޔ‬ᮡઙᢙ㧝㧜㧜㧜ઙࠍ⸳ቯߒߡផㅴߒߚ‫⚿ߩߎޕ‬ᨐ‫ޔ‬ᣂⷙ૞ᚑಽߣߒߡ⚂㧤㧞㧜ઙ㧔⎇ⓥᯏ㑐࡮ડᬺ૞ᚑಽࠍ฽߻㧕ߩ⍮⼂࠺࡯࠲ࠍ㓸Ⓧߔࠆߎߣ߇ߢ
߈ߚ‫ޕ‬ಽ㊁೎ߢߪࡊࡠ࠮ࠬಽ㊁ߣ᧚ᢱ․ᕈಽ㊁߇㧟㧜㧑ᒝߣᄙߊ‫ࠬࠗࡃ࠺ޔ‬ಽ㊁㧞㧜㧑ᒝ‫ޔ‬
⸃ᨆಽ㊁߇㧝㧜㧑ᒙߣዋߥ޿߇‫ోޔ‬ಽ㊁ࠍ✂⟜ߒߡ߅ࠅ‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߣߒߡߩ᦭ല
ᕈࠍ⊒ើߢ߈ࠆ߽ߩߢ޽ࠆ‫ޕ‬߹ߚ‫ࡠࠢࠗࡑޔ‬ൻቇ⎇ⓥ⚵วߢ᭴▽ߐࠇߚ⍮⼂࠺࡯࠲ࡌ࡯ࠬਛߩ㧹㧱㧹㧿㑐ㅪ࠺࡯࠲⚂㧣㧟㧜ઙࠍ MemsONE ⍮⼂࠺࡯࠲ࡌ࡯ࠬߦ⚵ߺㄟ߻ߎߣ߇ߢ߈ߚ‫ޔߦᦝޕ‬㧹㧹㧯߇ᐔᚑ㧝㧜ᐕߦ‫ࡦࠪࡑࡠࠢࠗࡑޟ‬ᛛⴚኾ㐷↪⺆‫ߩޠ‬ౠሶࠍ➙߼ߚ߇‫ࠍࠇߎޔ‬ౣᐲ㔚ሶ࠺࡯࠲ൻߒߡ
MemsONE ⍮⼂࠺࡯࠲ࡌ࡯ࠬߦ⚂㧞㧜㧜ઙ෼⚊ߒߚ‫ޕ‬એ਄ߩฦᚑᨐࠍวࠊߖࠆߣ⚂㧝㧣㧡㧜ઙߩ⍮⼂࠺࡯࠲߇㓸Ⓧߢ߈ߚߎߣߦߥࠅ‫ࡠࡊᧄޔ‬ࠫࠚࠢ࠻ផㅴߩᦨೋߩ⍮⼂ DB ᆔຬળߢ↳ߒวࠊߖߚ⋡ᮡ୯㧝㧜㧜㧜ઙࠍ㆐ᚑߔࠆߎߣ߇
ߢ߈ߚ‫ޕ‬

0Q ࠺࡯࠲⒳೎㧔ࠞ࠹ࠧ࡝㧕ઙ ᢙౝࡊࡠࠫࠚࠢ࠻ߢ૞ᚑಽ ࡊࡠ࠮ࠬ㑐ㅪ





 ࠺ࡃࠗࠬ㑐ㅪ





η- 13

 ᧚ᢱ․ᕈ㑐ㅪ





 ⸃ᨆ㑐ㅪ











ว ⸘


ԙ ࡑࠗࠢࡠࡑࠪࡦ࠮ࡦ࠲࡯ߩᚑᨐ⹦⚦㧝㧞ᄢቇ߆ࠄ෼㓸ߔࠆ࠺࡯࠲ߦട߃‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬࠍᦝߦలታߔࠆߚ߼‫ޔ‬࿖ౝᄖߩ㧹㧱㧹㧿㑐ㅪߩਥⷐቇળߣਥⷐቇળ⹹ ಴‛ ߆ࠄ⍮⼂࠺࡯࠲ᖱႎࠍ෼㓸ߒ‫ޔ‬㧹㧱㧹㧿ߩ⸳⸘࡮⸃ᨆ‫⹜ޔ‬૞‫⸘ޔ‬᷹࡮⹏ଔ෸߮᧚ᢱ․ᕈߦ᦭↪ߥ⍮⼂࠺࡯࠲ࠍ෩ㆬ‫ޔ‬ౝኈߩ࠴ࠚ࠶ࠢ
ߣ⹏ଔ‫ޔ‬ᵴ↪ߦㆡߒߚᢛℂࠍട߃ߡ‫ޔ‬⍮⼂࠺࡯࠲ࠍ⫾Ⓧߒߚ‫ޔߚ߹ޕ‬਎⇇⊛ߥਥⷐቇળ࡮
ࠪࡦࡐࠫ࠙ࡓߦ಴Ꮸߒߡ‫ᦨޔ‬ᣂߩ⍮⼂࠺࡯࠲ࠍ෼㓸ߒߚ‫ޕ‬ ౕ૕⊛ߦߪ‫ޔ‬ᐔᚑ㧝㧣ᐕᐲߪ‫ޔ‬㧹㧱㧹㧿ᛛⴚߦ㑐ㅪߔࠆ࿖㓙ቇળ Transducers̈05㧔International
Conference on Solid-State Sensors , Actuators and Microsystems㧕‫ޔ‬/0' %QPHGTGPEG
QP /KETQ 0CPQ'PIKPGGTKPI‫ޔ‬Nanotech2005 ‫& ޔ‬6+2 㧔 5[ORQUKWO QP

FGUKIPVGUVKPVGITCVKQPRCEMCIKPIQH/'/5/1'/5㧕ߩࠪࡦࡐࠫ࠙ࡓ߆ࠄ⍮⼂࠺࡯࠲ߩ෼㓸ࠍ࿑ࠅ‫ߩߘޔ‬ਛ߆ࠄ㧣㧤ઙߩᢥ₂ᛞ㍳ࠍ૞⵾ߒߡ‫⊓ߦࠬ࡯ࡌ࠲࡯࠺ޔ‬㍳ߒߚ‫ޕ‬ౝ⸶ߪ࠺ࡃࠗࠬಽ㊁㧡㧝ઙ‫ࠬ࠮ࡠࡊޔ‬ಽ㊁㧞㧜ઙ‫᧚ޔ‬ᢱ․ᕈಽ㊁㧣ઙߢ޽ࠆ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫ޔ‬Ǵ6#5㧔+PVGTPCVKQPCN%QPHGTGPEGQP/KPKCVWTK\GF5[UVGOUHQT
EJGOKUVT[ CPF .KHG 5EKGPEGU ߣ /0' 㧔 +PVGTPCVKQPCN %QPHGTGPEG QP /KETQ
0CPQ'PIKPGGTKPI ߆ࠄᦨᣂ⍮⼂ᖱႎࠍត⚝࡮෼㓸ߒ‫ޔ‬㧹㧱㧹㧿ߩ࠺ࡃࠗࠬ‫⹜࡮ࠬ࠮ࡠࡊޔ‬૞‫⸘ޔ‬᷹࡮⹏ଔ෸߮᧚ᢱ․ᕈಽ㊁ߩᦨᣂߩ⍮⼂࠺࡯࠲ࠍ੹ᐕᐲಽߣߒߡ⚂㧝㧜ઙ㓸Ⓧߒߚ‫ޕ‬㧟ࡩᐕߩᵴേߦࠃࠅ⚂㧝㧝㧜ઙߩ⍮⼂࠺࡯࠲ࠍ㓸Ⓧߒ⊓㍳ߒߚ‫ࡠࠢࠗࡑޔߚ߹ޕ‬ൻቇ⎇ⓥ⚵วߢ᭴▽ߐࠇߚ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩਛߢ㧹㧱㧹㧿㑐ㅪߩ⚂㧣㧟㧜ઙߩ⍮⼂࠺࡯࠲ࠍవ
ᣇߩੌ⸃ߩਅߦ MemsONE ⍮⼂࠺࡯࠲ࡌ࡯ࠬߦ⚵ߺㄟ߻ߎߣ߇ߢ߈ߚ‫ࡑࡠࠢࠗࡑޔߦᦝޕ‬ࠪࡦ࠮ࡦ࠲࡯߇ᐔᚑ㧝㧜ᐕߦ‫ࡦࠪࡑࡠࠢࠗࡑޟ‬ᛛⴚኾ㐷↪⺆‫ߩޠ‬ౠሶࠍ➙߼ߚ߇‫ߪࠇߎޔ‬㧹㧱㧹㧿㑐ㅪߩၮᧄ⊛↪⺆ߩℂ⸃ߦߪ᦭↪ߢ޽ࠆߎߣ߆ࠄ‫ޔ‬ౣᐲ㔚ሶ࠺࡯࠲ൻߒߡ
MemsONE ⍮⼂࠺࡯࠲ࡌ࡯ࠬߦ⚂㧞㧜㧜ઙ෼⚊ߒߚ‫ޕ‬Ԛ ᄢቇߩᚑᨐ⹦⚦ฦᄢቇ߇⍮⼂࠺࡯࠲ߩ૞ᚑ࡮෼㓸ߦᵈജߒߚᐔᚑ㧝㧣ᐕᐲ߅ࠃ߮ᐔᚑ㧝㧤ᐕᐲߩ⎇ⓥᚑᨐࠍ‫ޔ‬ਅ⸥ߦ⸥タߔࠆ‫ߩࠄࠇߎޕ‬ᚑᨐߪ‫ߡోޔ‬⍮⼂࠺࡯࠲ߦ෻ᤋߐࠇߡ޿ࠆ‫ޕ‬C ‫࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޟ‬ടᎿߦ߅ߌࠆ᧚ᢱ․ᕈߣടᎿ᧦ઙߩ㑐ଥ෸߮⹏ଔᣇᴺߦ㑐ߔࠆ⍮⼂&$ ߣ᧚ᢱ &$ ߩ᭴▽‫ޠ‬㧔ᜂᒰ㧦ᄢ㒋ᐭ┙ᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫ޔ‬ᾲߥࠄ߮ߦశ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ᴺߦࠃࠆ‫ޔ‬ᚑᒻᕈ‫ޔ‬ታ㛎਄ߩ⺖㗴‫ޔ‬㔌η- 14ဳߥߤߩ໧㗴‫⸃߮ࠃ߅ޔ‬ᨆࠪࠬ࠹ࡓ᭴▽ߦᔅⷐߥࡕ࠺࡞ൻߦߟ޿ߡ‫ߩߢ߹ࠇߎޔ‬ታ㛎࠺࡯࠲ߣ⸘▚⚿ᨐߩ♖ᩏࠍⴕ޿‫ޔ‬ၮ␆⊛ࡕ࠺࡞ߩឭ᩺ࠍⴕߞߚ‫ࠬ࡯ࡌ࠲࡯࠺ޔߚ߹ޕ‬᭴▽ߩߚ߼ߩታ㛎ߥࠄ߮ߦ⸘▚⚿ᨐߣߩኻᔕࠍ⠨ᘦߒߚၮ␆⊛࠺࡯࠲ߩขᓧ‫ޔ‬ᢛℂߥࠄ߮ߦ࠺࡯࠲
ࡌ࡯ࠬൻࠍⴕߞߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫ޔ‬MemsONE ߦ߅ߌࠆ࠽ࡁࠗࡦࡊ࡝ࡦ࠻↪ࠪࡒࡘ࡟࡯࡚ࠪࡦߩࡊࡠ࠮ࠬ
࠺࡯࠲ߩ෼㓸ߣ࠺࡯࠲ࡌ࡯ࠬ⊓㍳ࠍⴕߞߚ‫ޕ‬D ‫ޟ‬㧹㧱㧹㧿᧚ᢱߩ㔚⏛․ᕈ⸘᷹ߣߘࠇࠍᵴ↪ߒߚ㔚⏛⇇⸃ᨆߩߚ߼ߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬ
᭴▽‫ޠ‬
㧔ᜂᒰ㧦ጟጊᄢቇ㧕㩷ᐔᚑ㧝㧣ᐕᐲߪ‫ޔ‬㔚⏛⃻⽎ࠍ೑↪ߒߚᯏེߦ૶↪ߐࠇࠆฦ⒳㧹㧱㧹㧿↪᧚ᢱߩౕ૕⊛ߥ㧰㧮⚛᧚ࠍ෼㓸ߒߡ౉ജߒ‫ޔ‬㧰㧮ࠪࠬ࠹ࡓߩᯏ⢻ࠍᬌ⸽ߒߚ‫ޔߦࠄߐޕ‬㐿⊒ᓟߩ౏㐿ࠍⷞ
㊁ߦ౉ࠇߡ‫ޔ‬⍮⼂㧰㧮߇ឭଏߔߴ߈ᯏ⢻ࠍᒁ߈⛯߈ᬌ⸛ߒ‫઀ޔ‬᭽ᡷༀߩឭ᩺ࠍⴕߞߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫ޔ‬೨ᐕᐲߩᚑᨐࠍฃߌߡ‫ޔ‬㔚⏛․ᕈ㧰㧮ߣઁߩ⻉․ᕈߦ㑐ߔࠆ㧰㧮ߣߩᢛวᕈࠍᬌ⸛ߔࠆߣߣ߽ߦ‫ޔ‬㧰㧮ࠍ⚵ߺㄟࠎߛ⸳⸘࡮⸃ᨆࠪࠬ࠹ࡓߩᯏ⢻߅ࠃ߮♖ᐲࠍ⏕⹺ߒ‫ޔ‬ታ↪ൻࠍ⋡ᜰߒߡᡷༀࠍ࿑ߞߚ‫ޔߦࠄߐޕ‬೑↪ଦㅴߩߚ߼‫߇ࠩ࡯࡙ޔ‬ᔅⷐߣߔࠆℂ⺰߅ࠃ߮૶↪ᴺߦ㑐ߔࠆࡑ࠾ࡘࠕ࡞૞ᚑߦᔅⷐߥ⍮⼂ߩឭଏ‫⸃ޔ‬ᨆ⚿ᨐߩ⹏ଔᣇᴺ߅ࠃ߮
⸳⸘ᜰ㊎ߦ㑐ߔࠆ⍮⼂㧰㧮ߩ૞ᚑ‫ޔ‬ฦ⒳ߩ㧹㧱㧹㧿ᔕ↪ᯏེߦኻᔕߒߚᮡḰ⊛ߥ⸃ᨆ଀ߩ
ឭ␜ߥߤࠍⴕߥߞߚ‫ޕ‬E ‫&(ޟ‬6& ⸃ᨆ࠰ࡈ࠻ߩឭଏߣ /GOU10' ߳ߩ⚵ߺㄟߺ෸߮⸃ᨆℂ⺰ߣ೑↪⠪⍮⼂ &$ ߩ᭴▽‫ޠ‬㧔ᜂᒰ㧦ጟጊᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫ߢ߹ࠇߎޔ‬ጟጊᄢቇߢ㐿⊒ࠍⴕߞߡ߈ߚࠕࡦ࠹࠽࡮ࡑࠗࠢࡠᵄ⸃ᨆ↪
FDTD ࠰࡞ࡃࠍ᜛ᒛߒ‫ޔ‬శ࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆ↪࠰࡞ࡃߣߒߡࡈ࡟࡯ࡓࡢ࡯ࠢߣធ⛯ߔࠆߚ߼ߩࠗࡦ࠲࡯ࡈࠚ࡯ࠬᢛ஻ߣ‫ޔ‬శ࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆ․᦭ߩ౉ജᵄḮ‫ᦼޔ‬Ⴚ⇇᧦ઙߩታⵝࠍⴕߞߚ‫ޔߚ߹ޕ‬MEMS ↪⸃ᨆߢⷐ᳞ߐࠇࠆᓸ⚦ࡕ࠺࡝ࡦࠣࠍน⢻ߦߔࠆߚ߼‫ޔ‬ਇ╬㑆㓒ࠣ࡝࠶࠼߅ࠃ߮ᇦ⾰Ⴚ⇇ߦ߅ߌࠆ⺃㔚₸‫ޔ‬ㅘ⏛₸ߩ㜞♖ᐲൻࠍ࿑ߞߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫ޔ‬శ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ߦ߅ߌࠆ⸳⸘ᜰ㊎߅ࠃ߮‛ℂ⃻⽎ࠍᛠីߔࠆߚ߼
ߩࠕࠪࠬ࠻ࠍ⋡⊛ߣߒ‫ޔ‬㔚⏛ᵄ⸃ᨆߦਥߣߒߡ↪޿ࠄࠇߡ߈ߚ FDTD ᴺ࠰࡞ࡃࠍ᜛ᒛߒߚ‫ޕ‬ࡈ࡟࡯ࠢࡢ࡯ࠢߣߩࠗࡦ࠲࡯ࡈࠚ࡯ࠬࠍᢛ஻ߒ‫ޔ‬శ࠽ࡁࠗࡦࡊ࡝ࡦ࠻↪ࠪࡒࡘ࡟࡯࠲ߣߒ
ߡേ૞ߔࠆࠃ߁ߦߒߚ‫ޕ‬ട߃ߡ‫ޔ‬ᓥ᧪ߩ㔚⏛ᵄ⸃ᨆᯏ⢻ࠍ᦭ലߦᱷߔߎߣߢ‫ޔ‬MemsONEߦ߅ߌࠆ㔚⏛ᵄ⸃ᨆ‫ޔ‬㜞๟ᵄ⸃ᨆߩ 1 ࠰࡞ࡃߣߒߡേ૞ߔࠆࠃ߁ࡔࡦ࠹࠽ࡦࠬࠍⴕߞߚ‫ޕ‬F ‫ߩ߼ߚߩࠬ࡯ࡌ࠲࡯࠺ࠬ࠮ࡠࡊ࠴࡞ࡑޟ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽‫ޠ‬㧔ᜂᒰ㧦㚅Ꮉᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫ޔ‬㊄ዻߩࠛ࠶࠴ࡦࠣߦኻߔࠆࠛ࠶࠴ࡦࠣᶧߣࡑࠬࠢ᧚ᢱߩㆬᛯ⴫ࠍ૞ᚑ

η- 15ߔࠆߚ߼ߩ⺞ᩏ෸߮ታ㓙ߩታ㛎ࠍⴕߞߚ‫ޕ‬㊄ዻߣߒߡߪ MEMS ߢࠃߊ೑↪ߐࠇࠆࠕ࡞ࡒ࠾
࠙ࡓ‫ޔ‬㊄‫ࠍߤߥ࡞ࠤ࠶࠾ޔࡓࡠࠢޔ‬ኻ⽎ߣߒ‫ࠣࡦ࠴࠶ࠛߩࠇߙࠇߘޔ‬ᶧߦኻߒߡઁߩ᧚ᢱ
߇ࠛ࠶࠴ࡦࠣߐࠇࠆ߆ߤ߁߆⺞ߴߚ‫ ߚ߹ޕ‬Si ߩઍ⴫⊛ߥࠛ࠶࠴ࡦࠣᶧߢ޽ࠆ KOH ᳓ṁᶧ‫ޔ‬
TMAH ᳓ṁᶧ‫ޔ‬SiO2 ߩࠛ࠶࠴ࡦࠣᶧߢ޽ࠆࡈ࠶㉄‫ߦ㉄࠶ࡈ࠼࡯ࠔࡈ࠶ࡃޔ‬ኻߔࠆ㊄ዻߩ⠴ᕈ߽ታ㛎ࠍⴕߞߡታ㓙ߦ⺞ߴߚ‫ࠍࠄࠇߎߡߒߘޕ‬రߦ㊄ዻࠛ࠶࠴ࡦࠣߦኻߔࠆ࠺࡯࠲ࡌ࡯
ࠬࠍ૞ᚑߒߚ‫ޔߚ߹ޕ‬ᰏᱤ࠮ࡦࠨ࡯ઃ AFM ࡊࡠ࡯ࡉࠍ૞⵾ߒ‫ߩߘޔ‬૞⵾ࡊࡠ࠮ࠬᎿ⒟ߩ৻
ߟ৻ߟࠍ⹦⚦ߦ࡟ࠪࡇൻߒߚ‫ߩߎޕ‬ㆊ⒟ߦ߅޿ߡ‫ߥ⊛⥸৻ޔ‬ᢎ⑼ᦠߦߪᦠ߆ࠇࠆߎߣߩߥ
޿‫↪ࠬ࠮ࡠࡊߩࡦࡠࡈ࠹ޔ‬ಃౕߩ૞⵾ᴺ߿‫ޔ‬ᵞᵺᴺߩ⹦⚦ࠍ࠺࡯࠲ࡌ࡯ࠬ⊓㍳ߒߚ‫ࠄߐޕ‬ߦ‫ޔ‬MEMS ࡊࡠ࠮ࠬ࠺࡯࠲ࡌ࡯ࠬߣߒߡᜂᒰߒߡ޿ࠆ‫ޔ‬CVD ᴺ‫࠲࠶ࡄࠬޔ‬ᴺ‫⌀ޔ‬ⓨ⫳⌕ᴺ‫ޔ‬ᾲ㉄ൻߩߘࠇߙࠇߩේℂߦߟ޿ߡ⹦⚦ߦ⸥ㅀߒ‫⊓ࠬ࡯ࡌ࠲࡯࠺ޔ‬㍳ࠍߒߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫⎇ޔ‬ⓥ⹜૞ߒߡ޿ࠆ࠺ࡃࠗࠬߩࡊࡠ࠮ࠬ࠺࡯࠲ࠍ࠺࡯࠲ࡌ࡯ࠬߣߒߡ⊓㍳ߒߚ‫ౕޕ‬૕⊛ߦߪේሶ㑆ജ㗼ᓸ㏜↪ࡊࡠ࡯ࡉߣߒߡ⎇ⓥߒߡ޿ࠆᰏᱤࠕࠢ࠴ࡘࠛ࡯࠲ߦ
ߟ޿ߡ‫ޔ‬᭽‫ࡀࡃߥޘ‬ቯᢙ‫ࡀࡃޔ‬᭴ㅧ‫౒ޔ‬ᝄ๟ᵄᢙࠍ᦭ߔࠆ࠺ࡃࠗࠬࠍ૞⵾ߒ‫ޔ‬ℂ⺰⸘▚߿ࠪࡒࡘ࡟࡯࡚ࠪࡦߣߩߕࠇߦߟ޿ߡ⠨ኤ㨯࠺࡯࠲ࡌ࡯ࠬൻߒߚ‫ߦࠇߎߚ߹ޕ‬㑐ㅪߒ‫࡜ࠣ࡜ޔ‬ࡦࠫࡘᣇ⒟ᑼߦࠃࠆᰏᱤࠕࠢ࠴ࡘࠛ࡯࠲ߩ⸃ᨆᚻᴺࠍ࠺࡯࠲ࡌ࡯ࠬߦ⊓㍳ߒߚ‫ޔߚ߹ޕ‬㧿㨕ߩᾲ⤘ᒛࠕࠢ࠴ࡘࠛ࡯࠲ߦߟ޿ߡ߽ߘߩ૞⵾ᣇᴺߩ࡟ࠪࡇ⹦⚦ࠍࡌ࡯࠲ࡌ࡯ࠬ⊓㍳ߒߚ‫ޕ‬ߘߩઁ‫ޔ‬ᮡḰࡊࡠ࠮ࠬߩ࠴ࡘ࡯࠻࡝ࠕ࡞‫࡯ࡠ࡯ࡎޔ‬᭴ㅧߩ㧭㧲㧹ࡊࡠ࡯ࡉ‫ޔ‬㧰㧺㧭ࡇࡦ࠮࠶࠻‫ޔࡊ࠶࠴ࡉ࡯ࡠࡊ࠴࡞ࡑޔ‬శᐓᷤဳࡊࡠ࡯ࡉߥߤ‫ⶄޔ‬㔀ߥᒻ⁁ࠍ૞⵾ߔࠆߚ߼ߩࡊࡠ
࠮ࠬߣࡁ࠙ࡂ࠙ࠍ࠺࡯࠲ࡌ࡯ࠬൻߒߚ‫ޔߦࠄߐޕ‬ᰏᱤࠕࠢ࠴ࡘࠛ࡯࠲ߩ⥄ബ⊒ᝄߦߟ޿ߡ
߽࠺࡯࠲ࡌ࡯ࠬߣߒߡ⊓㍳ߒߚ‫ޕ‬G ‫ޟ‬㧹㧱㧹㧿᧚ᢱߩᯏ᪾⊛․ᕈ࠺࡯࠲ࡌ࡯ࠬߩߚ߼ߩ⸃ᨆ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽‫ޠ‬㧔ᜂᒰ㧦੩ㇺᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫ޔ‬⍮⼂ DB ߩ᭴ㅧߣ࠺࡯࠲ࡌ࡯ࠬ᭴▽ߩၮ␆ߩ⏕┙ࠍⴕ޿‫ޔ‬ᐕᐲᧃߦ㓙ߒߡߪ‫౉ߩ࠲࡯࠺ޔ‬ജࠍⴕߞߚ‫ޔߚ߹ޕ‬ធวᒝᐲ⸃ᨆߦ㑐ߒߡߪችፒᢎ᝼ߩࠣ࡞࡯ࡊ
߇‫ޔ‬㔚⏛ᵄ⸃ᨆ࡮࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆߦ㑐ߒߡߪዊኹ࡮ᵤ቞߇࠰ࡈ࠻࠙ࠚࠕᆔຬળߦ
߅޿ߡ‫ࡓ࠹ࠬࠪޔ‬㐿⊒ߦኻߒߡ⸃ᨆᣇᴺߣ㐿⊒ਛߩࠪࠬ࠹ࡓߩ࠴ࠚ࠶ࠢࠍⴕ޿‫ޔߦࠄߐޔ‬࠽ࡁࠗࡦࡊ࡝ࡦ࠻ߦ㑐ߔࠆ⍮⼂ DB ߩ᭴▽ࠍᜂᒰߒߚ‫ⶄޔߚ߹ޕ‬ว᧚ᢱᒝᐲ߅ࠃ߮೸㔌ᒝᐲߣ࿶㔚᧚ᢱߩ࠺࡯࠲ࡌ࡯ࠬ᭴▽ࠍ㐿ᆎߒߚᐔᚑ㧝㧤ᐕᐲߪ‫ࠬ࡯ࡌ࠲࡯࠺ޔ‬᭴▽‫ޔ‬ᖱႎߩ⫾Ⓧࠍ * ᐕᐲߦ⛯޿ߡⴕ߁ߣߣ߽ߦ‫ޔ‬ᯏ⢻⸃ᨆ࠰ࡈ࠻ߩᯏ⢻⹏ଔ߅ࠃ߮᭴ㅧߦ㑐ߒߡᬌ⸽ࠍⴕߞߚ‫ޔߚ߹ޕ‬⍮⼂㧰㧮߇ឭଏߔߴ߈
ᯏ⢻ࠍ⛮⛯ߒߡᬌ⸽ߔࠆߣߣ߽ߦ‫ߩࠬ࡯ࡌ࠲࡯࠺ޔ‬᭴ㅧߩలታൻࠍ࿑ߞߚ‫ޕ‬H ‫ޟ‬㧹㧱㧹㧿᧚ᢱߩᾲવዉ࡮ᾲવ㆐․ᕈ࠺࡯࠲ࡌ࡯ࠬߩߚ߼ߩ⸃ᨆ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴
▽‫ޠ‬㧔ᜂᒰ㧦੩ㇺᄢቇ㧕η- 16ᐔᚑ㧝㧣ᐕᐲߪ‫ޔ‬ೋᐕᐲߦࡊࡠ࠮ࠬ‫᧚ޔ‬ᢱ‫⸃ޔࠬࠗࡃ࠺ޔ‬ᨆߩ㧠ࠣ࡞࡯ࡊߦᄢ೎ߐࠇ‫ޔ‬ࠛࠢࠬࡊࡠ࡯࡜࡯ߣ㘃ૃᒻᑼߩ㓏ጀ⊛ߥ᭴ㅧࠍᜬߞߚ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩࡈ࡟࡯ࡓࡢ
࡯ࠢߦၮߠ߈‫ޔ‬ೋᐕᐲߦᒁ߈⛯޿ߡ MEMS ↪ߩ⭯⤑᧚ᢱ╬ߩવᾲ․ᕈߦ㑐ߔࠆ࠺࡯࠲
ࡌ࡯ࠬ᭴▽‫⫾ޔ‬Ⓧᖱႎߩᬌ⸛‫ߦ߮ࠄߥޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬ߇ឭଏߔߴ߈ᯏ⢻ࠍᬌ⸛ߒߡ
᳿ቯߔࠆߣߣ߽ߦ‫ࠬ࡯ࡌ࠲࡯࠺ޔ‬᭴ㅧࠍᬌ⸛ߒߚ‫޿ⴕࠍߒ⋥⷗ߩࠬ࡯ࡌ࠲࡯࠺ޔߚ߹ޕ‬ߥ߇ࠄ‫᧚ޔ‬ᢱ⹜㛎ߩ⚿ᨐࠍ෻ᤋߐߖߚવᾲ․ᕈߦ㑐ߔࠆ࠺࡯࠲ࡌ࡯ࠬߩ⫾Ⓧࠍⴕ޿‫ߣޔ‬ߊߦ‫⸃ޟޔ‬ᨆ‫౉↪ࡊ࡯࡞ࠣޠ‬ജ࠺࡯࠲ߣߒߡ‫ޔ‬ᾲવዉ⸃ᨆ‫ޔ‬ᵹ૕⸃ᨆ‫ޔ‬ᾲવ㆐⸃ᨆߦ㑐ߔࠆၮ␆⊛੐㗄ߦ೉᜼ߒߡᢥᦠࡈࠔࠗ࡞ൻߒ‫౉࠲࡯࠺ޔ‬ജߦ஻߃ߚ‫৻ߩߘޕ‬ᣇߢ‫ޔ‬MEMS ⸃ᨆࠪࠬ࠹ࡓߩ⹏ଔ↪ᵹ〝ౝᵹࠇߩၮḰࡕ࠺࡞ߣߒߡೋᐕᐲߦታᣉߒߚᕆ᜛ᄢ
ㇱࠍ઻߁ࡑࠗࠢࡠᵹ〝ߩ⹜૞ࠍ⊒ዷߐߖ‫ޔ‬ᵹ૕ᷙว߇࿎㔍ߥᭂૐ࡟ࠗࡁ࡞࠭ᢙᵹࠇਅߦ
߅ߌࠆࡄ࠶ࠪࡉߥᷙวଦㅴᣇᴺߣߒߡ‫ޔ‬㎛ဳḴ߿ᢳ߼Ḵࠍᵹ〝ᐩ㕙ߦઃ⸳ߔࠆߎߣࠍ⹜
ߺߚ‫࠷ࠗ࠼ޔߚ߹ޕ‬࿖ࠛ࡞࡜ࡦࠥࡦߦ޽ࠆᵹ૕ജቇ⎇ⓥᚲ㧔LSTM㧕ߢྃᵹታ㛎ߩⷞኤࠍⴕߞߡᓧߚᖱႎࠍၮߦ‫ࠍࠇߘޔ‬⣂േߩ઻߁ࡑࠗࠢࡠᵹ〝ౝᵹࠇߦ߅ߌࠆᷙวታ㛎ߦᔕ↪ߒߚ‫⃻ޔ߽ߡ޿ߟߦߩ߽ߩࠇߕ޿ޕ‬࿷‫ޔ‬PIV ࠪࠬ࠹ࡓߦࠃࠆㅦᐲ᷹ቯࠍታᣉߒߡ‫ޔ‬ᵹേߣᷙวߩ․ᕈ⹏ଔࠍታᣉߒߡ޿ࠆ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫⫾ߦߢ߹ࠇߎޔ‬Ⓧߒߚ㧹㧱㧹㧿↪⭯⤑᧚ᢱ‫ޔ‬ౝㇱᵹേ‫ޔ‬㔓࿐᳇ⅣႺ╬ߩᾲવዉ㨯ᾲવ㆐․ᕈߦ㑐ߔࠆ࠺࡯࠲ࠍၮߦ‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬࠍቢᚑߐߖࠆߣߣ߽ߦ‫ޔ‬ᣢߦ౉ജߐࠇߡ޿ࠆ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ⷗⋥ߒࠍ࿑ࠅߥ߇ࠄ‫ᦨޔ‬ᣂߩ᧚ᢱ⹜㛎ߩ⚿ᨐࠍ෻ᤋߐ
ߖߚવᾲ․ᕈߦ㑐ߔࠆ࠺࡯࠲ࡌ࡯ࠬࠍᦝᣂߒߚ‫ߦࠇߘޔߚ߹ޕ‬ᐔⴕߒߚᾲᵹേታ㛎⚿ᨐ‫ޔ‬㧹㧱㧹㧿↪⸃ᨆࠪࠬ࠹ࡓߩ⹏ଔ↪ၮḰࡕ࠺࡞‫⹜ޔ‬૞⚿ᨐߥߤߦߟ޿ߡߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬ
߳ߩ෻ᤋࠍታ㛎ࠣ࡞࡯ࡊߣදജߒߡታᣉߒߚ‫ޕ‬I ‫࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޟ‬ടᎿߩടᎿ᧦ઙߦ㑐ߔࠆ⍮⼂㧰㧮ߩ᭴▽‫ޠ‬㧔ᜂᒰ㧦੩ㇺᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪടᎿታ㛎ࠍⴕ޿᮸⢽ߩᚑဳ․ᕈߦ㑐ߔࠆ⍮⷗ࠍᓧߚ‫ ߦ․ޕ‬10m ࠝ࡯࠳࡯ߩᄢဳߩࡄ࠲࡯ࡦࠍ↪޿᮸⢽ߩࡒࠢࡠ߅ࠃ߮ࡑࠢࡠߥᵹേ․ᕈߩᓇ㗀ࠍ⹏ଔߒߚ‫ဳޕ‬ᒻ⁁߅ࠃ߮᮸⢽᧚ᢱෘ‫ߚ߹ޔ‬᷷ᐲጁᱧ࡮⽶⩄⩄㊀ጁᱧߣ޿ߞߚࡊࡠ࠮ࠬ᧦ઙࠍ߽ߣߦ⍮⼂ DBߣߒߡ߹ߣ߼ࠆ‫ߩߎޕ‬ታ㛎ߦ߅޿ߡߪหᤨߦࡕ࡯࡞࠼ߩ޿ߊߟ߆ߩ⴫㕙ಣℂߦࠃࠆ㔌ဳᤨߩᓇ㗀ߦߟ޿ߡߩ⹏ଔ߽ⴕߞߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޔ‬ടᎿታ㛎ࠍⴕ޿ടᎿ੐଀㧰㧮ࠍలታߐߖࠆߣߣ߽ߦ‫ޔ‬⸃ᨆߣߩᲧセߦ㑐ߒߡߩᬌ⸛߽ⴕ޿‫ޔ‬ᄌᒻℂ⺰߅ࠃ߮Ⴚ⇇᧦ઙߩ໧㗴‫ࠗࠨࡁ࠽࡮ࡠࠢࡒޔ‬࠭ߦ߅ߌࠆ᧚ᢱ․ᕈߩ㆑޿ߣ޿ߞߚⷐ࿃ߦߟ޿ߡߩ੐଀ࠍ⍮⼂㧰㧮ߣߒߡ➙߼ߚ‫ޔߚ߹ޕ‬006㧔 ᐕ  ᦬‫ࠦࠬࠪࡦ࡜ࡈࡦࠨޔ‬㧕ߦෳടߒ‫࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޔ‬ᛛⴚߦߟ޿ߡ⺞ᩏࠍⴕߞߚ‫ޕ‬η- 17

J ‫࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޟ‬ടᎿ⸃ᨆℂ⺰ߣ⸃ᨆᣇᴺ෸߮ടᎿᤨߩ⍮⼂㧰㧮ߩ᭴▽‫ޠ‬㧔ᜂᒰ㧦⟲㚍ᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫᧚࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޔ‬ᢱߣߒߡ㕖᥏⾰᭴ㅧࠍ᦭ߒ‫ޔ‬ᾲน႟ᕈࠍ᦭ߔࠆ☼ᕈᵹേ᧚ᢱࠍߣࠅ޽ߍ‫᧚ޔ‬ᢱ⥄૕ߩࡑࠢࡠᄌᒻ․ᕈߥࠄ߮ߦ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ടᎿߩᒻ⁁ォ౮․ᕈߦ෸߷ߔ᧚ᢱߣߘߩኸᴺലᨐࠍታ㛎⊛ߦ᣿ࠄ߆ߦߒ‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬ(DB)ࠍ᭴
▽ߒߚ‫ౕޕ‬૕⊛ߦߪ‫᧚ޔ‬ᢱߣߒߡ㕖᥏ᕈࡊ࡜ࠬ࠴࠶ࠢ‫㉄ޔ‬ൻ‛ࠟ࡜ࠬ‫ޔ‬㊄ዻࠟ࡜ࠬߩࡑࠢ
ࡠߥᄌᒻ․ᕈߣߒߡ‫ࠬ࡜ࠟޔ‬ㆫ⒖᜼േߣ☼ᕈ-᷷ᐲߩ㑐ଥࠍ᳞߼ߚ‫࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޕ‬ടᎿ․ᕈߩ⹏ଔߪၮḰ㊄ဳᒻ⁁ߣᚑᒻᒻ⁁ࠍᲧセߔࠆᣇᴺࠍ↪޿ߚ‫ޕ‬ၮḰ㊄ဳᒻ⁁ߪ㔚ሶࡆ࡯ࡓ࡝࠰ࠣ࡜ࡈࠖ࡯࡮⇣ᣇᕈࠛ࠶࠴ࡦࠣࠍ(100)Si ߦㆡ↪ߒ‫ޔ‬Ḵ᏷ 0.1㨪㧞m‫ޔ‬ᐩⷺ 70.6 ᐲߩ V Ḵᒻ⁁ࠍᓧߚ‫ߦࠄߐޕ‬㓸᧤ࠗࠝࡦࡆ࡯ࡓടᎿ(FIB)ࠍ↪޿ߡ㕖᥏⾰ࠞ࡯ࡏࡦ‫ޔ‬㊄ዻࠟ࡜
ࠬ⵾࠽ࡁ㊄ဳࠍ⵾૞ߒߡ‫࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޔ‬ടᎿߦଏߒߚ‫ޕ‬ታ㛎⸃ᨆߩ⚿ᨐ,ᚑᒻ࿶ജ‫☼ޔ‬ᕈଥᢙ‫⴫ޔ‬㕙ᒛജ‫ޔ‬㊄ဳ࡮᧚ᢱ㑆ߩធ⸅ⷺ㧔Ứࠇᕈ㧕߇‫ޔ‬ᚑᒻ․ᕈߦᓇ㗀ࠍ෸߷ߔߎߣ‫ޔ‬ᓥ᧪ߩടᎿߦᲧߴࠆߣ‫ޔ‬ടᾲ࡮಄ළߦ઻߁ᾲ⤘ᒛߩ⛘ኻ୯(㊂)ߣ᧚ᢱ࡮㊄ဳ㑆ߩᾲᒢᕈᄌᒻ
߇㊀ⷐߢ޽ࠆߎߣ߇᣿ࠄ߆ߣߥߞߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫᧚࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޔ‬ᢱߣߒߡ᦭ᦸߥว㊄ߣߒߡ㊄ዻࠟ࡜ࠬࠍߣࠅ޽ߍ‫ޔ‬
ߘߩ․ᕈ⸃ᨆߣടᎿᤨߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ࠍⴕߞߚ‫ޕ‬㊄ዻࠟ࡜ࠬߪ‫ࠬ࡜ࠟޔ‬ㆫ⒖᜼േࠍ␜ߒ‫ޔ‬ㆊ಄ළᶧ૕ၞ᷷ᐲߦߡ࠾ࡘ࡯࠻ࡦ☼ᕈ᜼േࠍ๒ߔࠆว㊄ߢ‫ޔ‬ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ
࠻߇น⢻ߢ޽ࠆ‫ޕ‬㜞ᒝᐲ‫ޔ‬⠴㘩ᕈ߿エ㔚⏛․ᕈߥߤߩ㜞ᯏ⢻ᕈ㊄ዻ᧚ᢱߣߒߡᦼᓙߐࠇࠆ‫ޕ‬㓸᧤ࠗࠝࡦࡆ࡯ࡓടᎿ(FIB)ࠍ↪޿ߡ㕖᥏⾰ࠞ࡯ࡏࡦ‫ޔࡦࠦ࡝ࠪޔ‬㊄ዻࠟ࡜ࠬ⵾࠽ࡁ㊄ဳࠍ⵾૞ߒߡ‫࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޔ‬ടᎿ․ᕈࠍ⺞ߴߚ‫ޕ‬ታ㛎⸃ᨆߩ⚿ᨐ‫ޔ‬㊄ဳធ⸅ㄭறߩᚑᒻ࿶
ജ‫☼ޔ‬ᕈଥᢙ‫⴫ޔ‬㕙ᒛജ‫ߦ․ޔ‬㊄ဳ࡮᧚ᢱ㑆ߩធ⸅ⷺ㧔Ứࠇᕈ㧕߇ᚑᒻ․ᕈߦᓇ㗀ࠍ෸߷ߔߎߣ‫ޔ‬ෘߺ߇ᄢ߈޿᧚ᢱߢߪࡃ࡞ࠢᵹേߩᓇ㗀߇ᄢ߈ߊ⦟ᅢߥᚑᒻ⚿ᨐ߇ᓧࠄࠇߥ޿ߎ
ߣ‫ࠍ╬ޔ‬᣿ࠄ߆ߦߒߚ‫ޕ‬એ਄ߩ․ᕈߣ‫ޔ‬ၮᧄ⊛ߥᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻․ᕈߦᔅⷐߥ‛ᕈ⸘
᷹ᣇᴺ߿᧚ᢱ․ᕈߦߟ޿ߡ⺞ᩏߒ‫ޔ‬⍮⼂ DB ߩ᭴▽ࠍⴕߞߚ‫ޕ‬K ‫᧚↪࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޟ‬ᢱߩ᧚ᢱ⹜㛎ᣇᴺߦ㑐ߔࠆ⍮⼂㧰㧮ߩ᭴▽ߣ᧚ᢱ &$ ߩ෼㓸‫ޠ‬㧔ᜂᒰ㧦㚂ㇺᄢቇ᧲੩㧕ᐔᚑ㧝㧣ᐕᐲߪ‫ߩߢ࡞࡯ࠤࠬࡁ࠽ޔ‬ၮᧄ᧚ᢱ‛ᕈ߿ᄌᒻ․ᕈߥߤࠍขᓧߔࠆߚ߼ߩ⹜㛎
ᣇᴺߦ㑐ߔࠆ⺞ᩏࠍⴕߞߚ‫᧚ޕ‬ᢱߩᔕജ߭ߕߺ㑐ଥ߿᷷ᐲ߿ᄌᒻㅦᐲ߇ߘࠇߦ෸߷ߔᓇ㗀ߦߟ޿ߡ‫⹜ߢ࡞࡯ࠤࠬࡁ࠽ޔ‬㛎ߢ߈ࠆ⹜㛎ᣇᴺࠍ⠨᩺ߒ‫ࡁ࠽ޕߚߞⴕࠍ⸘⸳ߩ⟎ⵝߩߘޔ‬ࠗࡦࡊ࡝ࡦ࠻ߩ⸳⸘࡮⸃ᨆߩߚ߼ߩ᧚ᢱ․ᕈ࠺࡯࠲ߩ෼㓸ࠍⴕ޿‫ޔ‬ฦ⒳᧚ᢱ․ᕈߩ࠺࡯࠲
ࡌ࡯ࠬൻࠍⴕߞߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߦታᣉߒߚ⎇ⓥ㐿⊒ߪએਅߩ㧞ὐߢ޽ࠆ‫ޕ‬٤ࡑࠗࠢࡠࠬࠤ࡯࡞ߢߩ᧚ᢱᄌᒻ․ᕈ⹏ଔ
࠽ࡁࠗࡦࡊ࡝ࡦ࠻ߦ߅ߌࠆ᧚ᢱᄌᒻߦ෸߷ߔᓇ㗀࿃ሶࠍಽᨆߒ‫࡞࡯ࠤࠬࡁ࠽ࡠࠢࠗࡑޔ‬ߢߩ᧚ᢱ‛ᕈ߿ᄌᒻ․ᕈߥߤࠍขᓧߔࠆ⹜㛎ᣇᴺߦ㑐ߔࠆ⺞ᩏࠍⴕߞߚ‫ޕ‬㜞ಽሶ᧚ᢱߦኻ

η- 18ߒߡ‫ޔ‬ᚑᒻ㊄ဳࡄ࠲࡯ࡦ߇ዊߐߊߥࠆߦߟࠇߡ‫ޔ‬ᄌᒻᛶ᛫߇ᄢ߈ߊ‫᧚ߚ߹ޔ‬ᢱࠍᒻᚑߔࠆ
㜞ಽሶ࠴ࠚ࡯ࡦ߇޽ࠆ․ቯߩᣇะߦឥ޿‫⚿ߩߘޔ‬ᨐ‫ޔ‬ᯏ᪾⊛ߥ․ᕈ߿శቇ⊛ߥ․ᕈ߇ᄌൻ
ߔࠆߎߣ߇ࠊ߆ߞߚ‫ޕ‬ߘߎߢ‫◲ޔ‬ᤃߥታ㛎ⵝ⟎ࠍ⵾૞ߒ‫ޔ‬㊄ဳࡄ࠲࡯ࡦࠍ 100Pm㧘50Pm㧘15Pm㧘1Pm ߣᄌൻߐߖߚ႐ว‫ޔ‬᮸⢽ߩᚑᒻᕈߦ෸߷ߔᚑᒻㅦᐲ߅ࠃ߮ᚑᒻ࿶ജߩᓇ㗀ࠍ⺞ߴߚ‫ޔߚ߹ޕ‬ห᭽ߥ᧦ઙߦߟ޿ߡ‫ޔ‬㐿⊒ߩ᦭㒢ⷐ⚛ᴺ⸃ᨆ࠰ࡈ࠻ࠍ↪޿ߚᚑᒻࠪࡒࡘ࡟࡯࡚ࠪࡦࠍⴕߞߚ‫ޕ‬ᚑᒻㅦᐲ߅ࠃ߮ᚑᒻ࿶ജ߇᮸⢽ߩᚑᒻᕈߦ෸߷ߔᓇ㗀߇ᄢ߈ߊ‫ߚ߹ޔ‬㊄ဳࡄ࠲࡯ࡦߩኸᴺ
߇ዊߐߊߦߥࠆߦߟࠇߡ‫ߩߘޔ‬ᓇ㗀߇ᄢ߈ߊߥࠆߎߣ߇ಽ߆ߞߚ‫ޕ‬ታ㛎⚿ᨐߣࠪࡒࡘ࡟࡯
࡚ࠪࡦ⚿ᨐࠍᲧセߒߚ⚿ᨐ‫⋧ߩߘޔ‬㆑߇ᄢ߈޿ߎߣ߇ಽ߆ߞߚ‫ޔߜࠊߥߔޕ‬᮸⢽᧚ᢱߦኻߒߡ‫ߥࡠࠢࡑޔ‬ታ㛎ߢᓧࠄࠇߚ᧚ᢱ‛ᕈߪࡑࠗࠢࡠ࠽ࡁࠬࠤ࡯࡞ߢߩᄌᒻߦߪ‫ޔ‬ᔅߕߒ߽ኻᔕߖߕ‫ߢ࡞࡯ࠤࠬࡁ࠽ࡠࠢࠗࡑޔ‬ᚑᒻߢߪߘࠇߙࠇߩࠬࠤ࡯࡞ߢߩ᧚ᢱ․ᕈ⹏ଔࠪࠬ࠹
ࡓߩ᭴▽߇ᔅⷐߣ⠨߃ࠄࠇࠆ‫੹ޕ‬ᓟ‫ޔ‬ฦ⒳ࠬࠤ࡯࡞ߢߩ᧚ᢱታ㛎ᴺߩឭ᩺߿ߘࠇߙࠇߩࠬ
ࠤ࡯࡞ߦᔕߓߚ᧚ᢱࡕ࠺࡞ࠍ᭴▽ߔࠆᔅⷐ߇޽ࠆ‫ޕ‬
٤ᯏ᪾․ᕈ⹏ଔ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽⭯⤑ࠍ฽߻ࡑࠗࠢࡠ᧚ᢱߩᯏ᪾․ᕈ⹏ଔ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ࠍⴕߞߚ‫ޕ‬㊄ዻ᧚ᢱ⭯⤑߿ᓸ☸ሶ᧚ᢱߩ‛ᕈ⹏ଔ߅ࠃ߮᧚ᢱᄌᒻ․ᕈߥߤߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬࠍ૞ᚑߒߚ‫ޕ‬L ‫ߩ߼ߚߩࠬ࡯ࡌ࠲࡯࠺ࠣࡦ࠴࠶ࠛࠗ࡜࠼ޟ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽‫ޠ‬㧔ᜂᒰ㧦᧲੩ᄢቇ㧕 ᐔᚑ㧝㧤ᐕᐲߪ‫ޔ‬శ MEMS ᔕ↪ಽ㊁ߢߪ‫ࡦࡖࠠࠬߩ࡯࡜ࡒࡠࠢࠗࡑޔ‬ᯏ᭴ߣߒߡု

⋥ᰏᱤဳ㕒㔚ࠕࠢ࠴ࡘࠛ࡯࠲߇ᄙ↪ߐࠇߡ޿ࠆ‫ޕ‬ᰏᱤߦࠝࡈ࠮࠶࠻ࠍߟߌࠆߚ߼ߩ․ᱶ
ߥ⵾ㅧࡊࡠ࠮ࠬߪ‫⎇ޔ‬ⓥቶ࡟ࡌ࡞ߢߪ◲නߦታ⃻ߢ߈ࠆ߇‫ࡆ࡯ࠨ࡯࡝࠼ࡦࠔࡈࠍࠇߎޔ‬ࠬࠍ೑↪ߒߡ⵾ㅧߔࠆ㓙ߦߪ‫ࠬ࠮ࡠࡊޔ‬ౣ⃻ᕈ‫ߩࠣࡦ࠴࠶ࠛޔ‬㕙ౝਇဋ৻ᕈ໧㗴ߣߥࠅ‫ޔ‬ࠦࠬ࠻߇㜞ߊߥߞߡߒ߹߁‫⎇ᧄߢߎߘޕ‬ⓥࠣ࡞࡯ࡊߢߪ‫╬ޔ‬ଔߥࠕࠢ࠴ࡘࠛ࡯࠲ᯏ⢻ࠍߥࠆߴߊ◲නߥࡊࡠ࠮ࠬߢታ⃻ߔࠆߚ߼ߩᣇᴺࠍᬌ⸛ߒߚ‫ౕޕ‬૕⊛ߦߪ‫⋥ုޔ‬ᰏᱤߩ㔚ᭂኻࠍ㧝ᨎࡑࠬࠢߢᒻᚑߒ‫৻ߜ߁ߩߘޔ‬ᣇࠍࡊࡠ࠮ࠬ࡮ࠬ࠹࡚ࠖࠢࠪࡦࠍ೑↪ߒߡᄌ૏ߐߖࠆ߽ߩߢ޽ࠆ‫ࠍ࠻࠶࠮ࡈࠝߩ࡯࡜ࡒޔࠅࠃߦࠇߎޕ‬቟ଔߦ‫߷߶ޔߟ߆ޔ‬ᱠ⇐߹ࠅ
100㧑ߢታ⃻ߒߚ‫⵾ࠅࠃߦࠬ࠮ࡠࡊᧄޔߚ߹ޕ‬ㅧࠦࠬ࠻ߪੑಽߩ㧝એਅߦᛥ߃ࠆߎߣ߇
ߢ߈ࠆ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫ޔ‬ᓥ᧪ߩ㧿㧻㧵㧔⾍ࠅวࠊߖࠪ࡝ࠦࡦၮ᧼㧕ࠍ↪޿ߚࡃ࡞ࠢࡑࠗࠢࡠࡑ
ࠪ࠾ࡦࠣဳࠕࠢ࠴ࡘࠛ࡯࠲ߢߪ‫ޔ‬㧿㧻㧵ᵴᕈጀߦࠨࠬࡍࡦ࡚ࠪࡦ╬ߩᯏ᪾᭴ㅧߣ‫ޔ‬㕒㔚ᰏᱤ㔚ᭂߥߤߩ㚟േᯏ᭴ߩਔᣇࠍ⵾૞ߔࠆ଀߇߶ߣࠎߤߢ޽ߞߚ‫ޔ߼ߚߩߎޕ‬㒢ࠄࠇߚ㕙Ⓧౝߢࠦࡦࡄࠢ࠻ߦࠕࠢ࠴ࡘࠛ࡯࠲ࠍ⸳⸘ߔࠆߚ߼ߩ⥄↱ᐲ߇ૐ޿ߎߣ߇໧㗴ߢ޽ߞߚ‫ߎޕ‬ࠇࠍ⸃᳿ߔࠆߚ߼ߩᚻᴺߣߒߡ‫⎇ᧄޔ‬ⓥߢߪ‫ޔ‬㧿㧻㧵ߩᵴᕈጀߣᡰᜬၮ᧼ߩਔᣇࠍ࠼࡜ࠗ
ࠛ࠶࠴ࡦࠣߦࠃߞߡടᎿߒ‫ޔ‬㨄㨅㨆ࠬ࠹࡯ࠫߥߤߩᲧセ⊛ⶄ㔀ߥᯏ᭴ࠍ㧞㓏ᑪߡ᭴ㅧߣߒ
ߡࠦࡦࡄࠢ࠻ߦ⸳⸘ߔࠆᣇᴺࠍឭ᩺ߒߚ‫ޕ‬㧿㧻㧵ߣၮ᧼ߩ㧞ߟߩ࡟ࠗࡗ࡯㑆ߩᯏ᪾⊛࡮㔚η- 19᳇⊛ធ⛯ࠍ⏕଻ߔࠆߚ߼ߦ‫ޔ‬ၒ߼ㄟߺ㉄ൻ⤑ࠍ੺ߒߚㆆ㔌᭴ㅧ߿㔚Ḯ㈩✢↪ࠨࠬࡍࡦ࡚ࠪ
ࡦ‫ࠍࠣࡦࠠ࠶ࠖ࠹ࠬޔ‬೑↪ߒߚ㧿㧻㧵гၮ᧼㑆ߩ㔚᳇⊛ធ⛯ߥߤߩ᭴ㅧࠍ⠨᩺ߒ‫৻ޔ‬ㅪߩ⸳
⸘ᚻᴺࠍ࠻ࡐࡠࠫࠞ࡞࡮࡟ࠗࡗ࡯ࠬࠗ࠶࠴㧔ⶄᢙߩ࠺ࡃࠗࠬጀ㑆ࠍ❔ߞߡⶄ㔀ߥᐞ૗૏⋧ࠍ߽ߟ᭴ㅧࠍߟߊࠆ㧕ᚻᴺߣߒߡឭ᩺ߒߚ‫ޕ‬M ‫ޟ‬㧹㧱㧹㧿ࠍ᭴ᚑߔࠆࡑࠗࠢࡠ࡮࠽ࡁ᧚ᢱߩᯏ᪾⊛․ᕈ⹏ଔ‫ޠ‬㧔ᜂᒰ㧦᧲੩Ꮏᬺᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫ޔ‬MEMS ࠍ᭴ᚑߔࠆࡑࠗࠢࡠ࡮࠽ࡁ᧚ᢱߩᯏ᪾⊛ᕈ⾰ߪ‫࠭ࠗࠨޔ‬ലᨐߦࠃࠅߘߩᯏ᪾⊛ᕈ⾰߇ࡃ࡞ࠢߩ߽ߩߣ⇣ߥࠆ߫߆ࠅߢߥߊ‫⵾ߩߘޔ‬ㅧࡊࡠ࠮ࠬߦ߽ᄢ߈ߊ
ଐሽߔࠆ‫ޕ‬ᓥߞߡ‫᧚ࠢ࡞ࡃޔ‬ᢱߩᯏ᪾⊛ᕈ⾰ߣࡑࠗࠢࡠ࡮࠽ࡁ᧚ᢱߩᯏ᪾⊛ᕈ⾰ࠍᲧセߒ‫ޔ‬MEMS ࠺ࡃࠗࠬߩ⸳⸘߳ߣᔕ↪ߐߖࠆߎߣ߇߈ࠊ߼ߡ㊀ⷐߣߥࠆ‫ᧄޕ‬ᐕᐲߪ‫ࠨࡦࡠࠢࡒޔ‬ࠗ࠭⹜㛎↪ߩ᧚ᢱ⹜㛎ⵝ⟎ࠍᔕ↪ߔࠆߎߣߦࠃࠅ‫ޔ‬MEMS ↪㊄ዻ෸߮㜞ಽሶ᧚ᢱߩᯏ᪾

⊛ᕈ⾰⹏ଔᴺࠍ㐿⊒ߔࠆߣߣ߽ߦ‫ޔ‬MEMS ࠺ࡃࠗࠬ߳ߩㆡ↪߇੍ᗐߐࠇࠆ Ni-P ࠕࡕ࡞ࡈࠔࠬว㊄ࠍᮡḰ᧚ᢱߣߒߡ↪޿‫ߩߘޔ‬ᯏ᪾⊛ᕈ⾰ࠍ⸘᷹ߒ‫⹜ޔ‬㛎ᴺߩᬌ⸽ࠍⴕߞߚ‫ࠄߐޕ‬ߦ‫ޔ‬MEMS ࠺ࡃࠗࠬ߳ߩㆡ↪߇⠨߃ࠄࠇࠆ㊄ዻ᧚ᢱࠍ⿥⥃⇇߼ߞ߈ࠍ↪޿㊄ዻ⭯⤑ࠍ૞⵾
ߔࠆᣇᴺࠍ㐿⊒ߒߚ‫ޔߚ߹ޕ‬㜞ಽሶ᧚ᢱ㧔SU㧤㧕ߦߟ޿ߡ߽ᯏ᪾⊛ᕈ⾰ࠍ᳞߼ࠆᣇᴺࠍ㐿⊒ߒ‫ޔ‬ᐔᚑ 18 ᐕᐲ߳ะߌ࠺࡯࠲ࡌ࡯ࠬߩలታࠍ࿑ࠆᣇ╷ࠍᢛ߃ߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫ޔ‬MEMS ࠍ᭴ᚑߔࠆࡑࠗࠢࡠ࡮࠽ࡁ᧚ᢱߩᯏ᪾⊛․ᕈ⹏ଔߦ㑐ߔࠆ⎇ⓥ㐿⊒ߪ‫ ޔ‬C 㓸᧤ࠗࠝࡦࡆ࡯ࡓടᎿ㧔(+$㧕ߩᓇ㗀‫ ޔ‬D 㔚⸃⎇⏴ߦࠃࠆ⿥ᓸ⚦ᒁᒛ⹜㛎 㧔ᢿ㕙ᓘ⚂ ࡮O㧕ߩടᎿᴺߣᯏ᪾⊛․ᕈ⹏ଔ߅ࠃ߮‫ ޔ‬E 㜞ಽሶ㧔57㧕⤑ߩᒝᐲߦ෸߷ߔࡊࡠ
࠮ࠬߩᓇ㗀߅ࠃ߮ኒ⌕ᒝᐲ⸘᷹⹏ଔᴺߩ㐿⊒‫ ޔ‬F ࠬ࠹ࡦ࡟ࠬ⭯⤑ߩᦛߍ∋ഭ⹜㛎ࠍⴕߞߚ‫ޕ‬(a)㧚ߦ㑐ߒߡߪߎࠇ߹ߢߦႎ๔ߒߡ߈ߚᒝᐲ߿ᄌᒻ᜼േߩ⸃ᨆߦട߃‫ߩࡓ࡯ࡆޔ‬ᾖ኿ᣇะ߿ⵍᾖ኿᧚ߩൻቇ⚵ᚑ߇ᾖ኿ᤨߦ⺃⿠ߐࠇࠆ࠽ࡁ⚿᥏ߩᨆ಴ᒻᘒ߿⚿᥏ᣇ૏ߦ෸߷
ߔᓇ㗀ࠍ᣿ࠄ߆ߦߒߚ‫ޕ‬D 㧚ߦ㑐ߒߡߪᓥ᧪ߩ᧚ᢱ⹜㛎ߢ↪޿ࠄࠇߡ޿ࠆടᎿᴺߣห৻߆ߟ៊்߇ᦨ߽ዋߥ޿ߣ
⠨߃ࠄࠇߡ޿ࠆ㔚⸃⎇⏴ࠍ↪޿ߡ૞ᚑߔࠆࠪࠬ࠹ࡓࠍ㐿⊒ߒߚ‫ౕޕ‬૕⊛ߦߪᚲ⻐࠼࠶ࠣࡏ࡯ࡦဳᒁᒛ⹜㛎ࠍࠦࡦࡇࡘ࠙࠲೙ᓮߐࠇߚో⥄േ⿥♖ኒ㔚⸃⎇⏴ⵝ⟎ߢ૞ᚑߒ‫ޔ‬ߘߩᯏ᪾⊛․ᕈߣ⹜㛎 ᓘ߅ࠃ߮⚵❱ߣߩ㑐ㅪࠍ᳞߼ߚ‫ޕ‬E 㧚ߦ㑐ߒߡߪ MEMS ߢ↪޿ࠄࠇࠆశᗵశ࡟ࠫࠬ࠻ߩ 57 ࠍ↪޿‫ߦ․ࠬ࠮ࡠࡊޔ‬㔺శ
㊂ߩᒝᐲߦ෸߷ߔᓇ㗀ࠍᓸዊᦛߍ⹜㛎߅ࠃ߮ᒁߞᒛࠅ⹜㛎ࠍ↪޿ߡ᳞߼ߚ‫৻ޕ‬ᣇኒ⌕ᒝᐲߦ㑐ߒߡߪࡈࠜ࠻࡝࠰ࠣ࡜ࡈߦࠃߞߡࠪ࡝ࠦࡦၮ᧼਄ߦ⋥ᓘ ࡮O ߩ౞ᩇ⁁ߩࠫࠣࠍ૞ᚑߒߚ‫⹜࠭ࠗࠨࡠࠢࠗࡑࠍࠇߎޕ‬㛎↪ߩ᧚ᢱ⹜㛎ᯏࠍ↪޿ߡ 57 ߣࠪ࡝ࠦࡦ㑆ߩߖࠎᢿ߅ࠃ߮ᒁߞᒛࠅኒ⌕ᒝᐲࠍ᳞߼ߚ‫ޕ‬F 㧚᧼ෘ ࡮O‫⚿ޔ‬᥏☸ᓘ ࡮O ߩࠬ࠹ࡦ࡟ࠬ⭯⤑ࠃࠅ㐳ߐ ࡮O ߩࠞࡦ࠴࡟ࡃ࡯ဳᦛߍ
∋ഭ⹜㛎 ࠍ (+$ ߢടᎿߒ‫∋ޔ‬ഭᒝᐲ߅ࠃ߮ᄌᒻᯏ᭴ࠍ⸃ᨆߒߚ‫ޕ‬

η- 20

N ‫ޟ‬ᚑ⤑ࡊࡠ࠮ࠬ࠺࡯࠲ࡌ࡯ࠬ߅ࠃ߮㔚ሶ࿁〝㓸Ⓧࡊࡠ࠮ࠬߩߚ߼ߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ
᭴▽‫ޠ‬
㧔ᜂᒰ㧦⼾ᯅᛛⴚ⑼ቇᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫ޔ‬CMOS 㓸Ⓧൻ MEMS ࡊࡠ࠮ࠬߩ⎇ⓥࠍታᣉߒ‫ޔ‬CMOS ࿁〝㓸Ⓧࡊࡠ࠮ࠬ‫ߩࠣࡦ࠾ࠪࡑࡠࠢࠗࡑޔ‬ቯ⟵‫ޔ‬੐଀⍮⼂࠺࡯࠲ࠍ‫ޔ‬ᣂⷙߦ⚂㧟㧜ઙએ਄૞ᚑߒߚ‫ޕ‬CMOS
࿁〝㓸Ⓧࡊࡠ࠮ࠬߩ⍮⼂࠺࡯࠲ߦ߅޿ߡߪ‫ޔ‬㓸Ⓧ࿁〝ߣ MEMS ࠺ࡃࠗࠬߩ৻૕ൻߦᔅⷐߥ
ၮᧄᛛⴚ‫ߦ߮ࠄߥޔ‬ၮᧄࡊࡠ࠮ࠬߦߟ޿ߡ⸥ㅀߒߡ޿ࠆ‫ޔઁߩߘޕ‬㓸Ⓧ࿁〝ࡊࡠ࠮ࠬߦ㑐ߔࠆ⇐ᗧ੐㗄‫⑌ޔ‬ೣ੐㗄ߦߟ޿ߡ߽⚫੺ߒߡ޿ࠆ‫ోޕ‬૕ߣߒߡ‫⎇ߩ࠻ࠢࠚࠫࡠࡊᧄޔ‬ⓥታ㛎ᚑᨐ߇‫ޔ‬ᐢߊ⍮⼂࠺࡯࠲ߦᱷࠆ᭽‫⇐ޔ‬ᗧߒߡ࠺࡯࠲෼㓸ࠍታᣉߒߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫ޔ‬ᒁ߈⛯߈ %/15 㓸Ⓧൻ /'/5 ࡊࡠ࠮ࠬߩ⎇ⓥࠍታᣉߒ‫ޔ‬%/15 ࿁〝㓸Ⓧࡊࡠ࠮ࠬ‫ߩࠣࡦ࠾ࠪࡑࡠࠢࠗࡑޔ‬ቯ⟵‫ޔ‬੐଀⍮⼂࠺࡯࠲ࠍ‫ޔ‬ᣂⷙߦ㧟㧟ઙ⊓㍳ߒߚ‫ޕ‬%/15 ࿁〝㓸Ⓧࡊࡠ࠮ࠬߩ⍮⼂࠺࡯࠲ߦ߅޿ߡߪ‫ޔ‬㓸Ⓧ࿁〝ߣ /'/5 ࠺ࡃࠗࠬߩ৻૕ൻߦᔅⷐߥၮᧄ
ᛛⴚ‫ߦ߮ࠄߥޔ‬ၮᧄࡊࡠ࠮ࠬ‫ࠍࠄࠇߘޔߦ߮ࠄߥޔ‬ᔕ↪ߒߚ࠺ࡃࠗࠬ੐଀ߦߟ޿ߡ⸥ㅀߒ
ߡ޿ࠆ‫ᦼ࠻ࠢࠚࠫࡠࡊޕ‬㑆ో૕ࠍㅢߓ‫ᧄޔ‬ቇߩ⍮⼂࠺࡯࠲⊓㍳ઙᢙߪ㧡㧜ઙࠍ⿥߃ࠆߎߣ
߇ߢ߈ߚ‫ޕ‬O ‫⇣ޟ‬ᣇᕈ࠙ࠚ࠶࠻ࠛ࠶࠴ࡦࠣ࠺࡯࠲ࡌ࡯ࠬߩߚ߼ߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽‫ޠ‬㧔ᜂᒰ㧦ฬฎደᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫ࡦࠦ࡝ࠪޔ‬න⚿᥏߇ࠕ࡞ࠞ࡝᳓ṁᶧߢࠛ࠶࠴ࡦࠣߐࠇࠆߐ޿ߩࠛ࠶࠴ࡦ
ࠣㅦᐲࠍ‫ޔ‬Si(100), (110), (111)ߩ㧟ᣇ૏ߦߟ޿ߡ⴫␜ߔࠆࠪࠬ࠹ࡓࠍ⹜૞ߒߚ‫࠲࡯ࡔ࡜ࡄޕ‬ߪࠛ࠶࠴ࡦࠣᶧ㧔KOH, TMAH ߩ㧞⒳㘃㧕‫ޔ‬ṁᶧỚᐲ‫ࠣࡦ࠴࠶ࠛޔ‬᷷ᐲߩ㧟㗄⋡ߢ޽ࠆ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫ࡦࠦ࡝ࠪޔ‬න⚿᥏߇ࠕ࡞ࠞ࡝᳓ṁᶧߢࠛ࠶࠴ࡦࠣߐࠇࠆߐ޿ߩࠛ࠶࠴ࡦ
ࠣㅦᐲࠍ Si(100), (110), (111)ߩ㧟ᣇ૏ߦߟ޿ߡ⴫␜ߔࠆࠪࠬ࠹ࡓࠍቢᚑߒߚ‫࠲࡯ࡔ࡜ࡄޕ‬ߪࠛ࠶࠴ࡦࠣᶧ㧔KOH, TMAH ߩ㧞⒳㘃㧕‫ޔ‬ṁᶧỚᐲ‫ࠣࡦ࠴࠶ࠛޔ‬᷷ᐲߩ㧟㗄⋡ߢ޽ࠆ‫ޕ‬ᤓᐕᐲߦ⹜૞ߒߚࠪࠬ࠹ࡓߦട߃ߡ‫ޔ‬㜞Ớᐲṁᶧߩ᧦ઙߢ 100͠એ਄ߩ㜞᷷㗔ၞߩࠛ࠶࠴ࡦࠣ
ㅦᐲ࠺࡯࠲ࠍᣂߚߦჇᒝߒߚ‫ߢ߹ࠇߎޔߪࡓ࠹ࠬࠪߩߎޕ‬ᒰ⎇ⓥቶ߇᷹ቯ࡮⹏ଔߒߡ߈ߚ
▸࿐ࠍࠞࡃ࡯ߔࠆ਄⸥᧦ઙࠍౝᝌߔࠆ▸࿐ߢ‫ޔ‬਄⸥ࡄ࡜ࡔ࡯࠲ࠍਈ߃ࠆߣࠛ࠶࠴ࡦࠣㅦᐲ
ࠍ⸘▚ߒߡ⴫␜ߔࠆ‫ࠣࡦ࠴࠶ࠛࠆࠃߦ࠲࡯ࡔ࡜ࡄߦࠄߐޕ‬ㅦᐲߩᄌൻࠍࠣ࡜ࡈ⴫␜ߔࠆߎ
ߣ߇ߢ߈ࠆ‫ޕ‬P ‫᧚↪ࠬࠗࡃ࠺ࡠࠢࠗࡑޟ‬ᢱߩធว࡮ធ⌕ା㗬ᕈ੍᷹ᚻᴺߩ㐿⊒‫ޠ‬㧔ᜂᒰ㧦ᣂẟᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫᧚↪ࠬࠗࡃ࠺ࡠࠢࠗࡑޔ‬ᢱ(ࠪ࡝ࠦࡦ‫ߩ)ࠬ࡜ࠟޔ‬㓁ᭂធว࡮ធ⌕ᴺߦߟ޿ߡ‫ޔ‬ធว᧦ઙ(㔚࿶‫ᤨޔ‬㑆‫ޔ‬᷷ᐲ)࡮ធ⌕᧦ઙ(ធ⌕೷ߩ⒳㘃)ߣធว࡮ធ⌕ᒝߐߣߩ㑐ଥߩ࠺࡯࠲ߩ⫾Ⓧࠍⴕ߁ߣหᤨߦ‫↪૶ޔ‬ਛߩⅣႺ࿃ሶ(᷷ᐲ‫ᤨޔ‬㑆‫ޔ‬Ḩᐲ‫ޔ‬ㅒ㔚࿶╬)ߩᓇ㗀ࠍᬌ⸛
ߒߚ‫ޕ‬

η- 21

 㓁ᭂធวߢߪ‫ޔ‬ធว᧦ઙ࿃ሶߩ㔚࿶(100ޯ900V)‫ᤨޔ‬㑆(4ޯ60 ಽ)‫ޔ‬᷷ᐲ(200ޯ400͠)ࠍ
ᄌൻߐߖ‫ޔ‬ធวㇱࠍᒁᒛ⹜㛎ߒߡ‫ޔ‬චಽߥធวᒝߐࠍᓧࠆ᧦ઙ▸࿐ࠍ᣿ࠄ߆ߦߒߚ‫ޔߚ߹ޕ‬ߎࠇࠄ㓁ᭂធวㇱߦኻߒߡ‫ޔ‬ᓟᾲಣℂ(350ޯ450͠)‫ޔ‬ㅒ㔚࿶(100ޯ900V)ߩᓇ㗀ࠍᬌ⸛ߒߚ
⚿ᨐ‫ޔ‬ធวᒝߐߩૐ޿ធวㇱߢߪ‫ޔ‬ᓟᾲߦࠃߞߡធวᒝߐ߇ะ਄ߔࠆߎߣ‫ޕ‬ㅒ㔚࿶ශนߪ⇇㕙ߦ෻ᔕጀࠍᒻᚑߔࠆ߇‫ޔ‬ធวᒝߐߦߪᓇ㗀ߒߥ޿ߎߣ߇᣿ࠄ߆ߣߥߞߚ‫ޕ‬ធ⌕ߢߪ‫ޔ‬ᄙಽጘࡐ࡝ࠕࡒ࠼ࠕࡒࡦࠣ࡜ࡈ࠻ࠪ࡝ࠞࠍ↪޿ࠆࠛࡐࠠࠪ᮸⢽⎬ൻ‛ߩ․ᕈ
ߣធ⌕ᒝᐲߦߟ޿ߡᬌ⸛ߒߚ‫⚿ߩߘޕ‬ᨐ‫ޔ‬ᄙಽጘࡐ࡝ࠕࡒ࠼ࠕࡒࡦࠣ࡜ࡈ࠻ࠪ࡝ࠞߦࠃࠆ
⎬ൻ‛ߩࠟ࡜ࠬォ⒖᷷ᐲߪᓥ᧪ߩ⎬ൻ೷ࠍ↪޿ߚ߽ߩߣᲧセߒߡ‫ ⚂ޔ‬10͠਄᣹ߒ‫ޔ‬⠴ᾲᕈ߇ᡷༀߐࠇࠆߎߣ߇ಽ߆ߞߚ‫᧼ࠬ࡟ࡦ࠹ࠬޔߚ߹ޕ‬㑆ߩធ⌕ᒝᐲ߽‫ޔ‬ᄙಽጘࡐ࡝ࠕࡒ࠼ࠕ
ࡒࡦࠣ࡜ࡈ࠻ࠪ࡝ࠞߢ⎬ൻߔࠆߎߣߦࠃࠅ‫ޔ‬10㧑⒟ᐲჇടߔࠆߎߣ߇ಽ߆ߞߚ‫ޔߪࠇߎޕ‬ࠪ࡝ࠞ࠽ࡁ☸ሶ߇⎬ൻ‛ਛ߳ൻቇ⚿วࠍ੺ߒߡ⚵ߺㄟ߹ࠇࠆߚ߼ߣ⸃ᨆߒߚ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫᧚↪ࠬࠗࡃ࠺ࡠࠢࠗࡑޔ‬ᢱ ࠪ࡝ࠦࡦ‫ߩ ࠬ࡜ࠟޔ‬㓁ᭂធว࡮ធ⌕ᴺߦߟ޿ߡ‫ޔ‬ฦ⒳ߩធว᧦ઙ 㔚࿶‫ᤨޔ‬㑆‫ޔ‬᷷ᐲ ࡮ធ⌕᧦ઙ ធ⌕೷ߩ⒳㘃 ߢߩធวㇱ࡮ធ⌕ㇱ߳ߩ‫↪૶ޔ‬ਛߩⅣႺ࿃ሶ ᷷ᐲ‫ᤨޔ‬㑆‫ޔ‬Ḩᐲ‫ޔ‬ㅒ㔚࿶╬ ߩᓇ㗀ࠍᬌ⸛ߒߚ‫ޕ‬ 㓁ᭂធวߢߪ‫ߩࠬ࡜ࠟޔ‬⒳㘃ߩᓇ㗀ߦߟ޿ߡᬌ⸛ߒߚ⚿ᨐ‫ޔ‬PYREX7740㧘TEMPAX ࠃࠅ߽‫ޔ‬SW-YY ߩᣇ߇ૐ޿ធว᷷ᐲߢធวน⢻ߢ޽ࠆ‫ߩࡓ࠙࠴࡝ޔߪࠇߎޕ‬ᷝടߢૐ޿᷷ᐲ
ߢߩࠗࠝࡦߩ⒖േ߇น⢻ߢ޽ࠅ‫ޔ‬ធวᤨߩ㔚⩄㊂ߩⷰὐߢߪᄢᏅ߇ߥ޿‫↪૶ޔߚ߹ޕ‬ਛߩ
ⅣႺ࿃ሶߣߒߡ‫ޔ‬Ḩᐲ(80%)߿᷷ᐲ(RTޯ80͠)ߪធวㇱߩᯏ᪾⊛ᕈ⾰ߦ߶ߣࠎߤᓇ㗀ߒߥ޿‫ޕ‬ߒ߆ߒ‫ޔ‬ធวㇱ߳ߩㅒ㔚࿶ߩઃਈߪធวㇱߦᄢ߈ߥ៊்ࠍਈ߃ࠆ‫ߩߎޕ‬ഠൻߪ‫ޔ‬ធวᤨߦធว⇇㕙߆ࠄ⒖േߒߚࠕ࡞ࠞ࡝ࠗࠝࡦ߇ㅒ㔚࿶ߩઃਈߢធว⇇㕙ߦౣᐲ஍ᨆߒ‫ޔ‬᳓ṁᕈߩ‛⾰߇ᒻᚑߐࠇࠆߎߣ߇ේ࿃ߢ޽ࠆ‫ޕ‬ ធ⌕ߢߪ‫ޔ‬ᄙಽጘࡈࠜࠬࡈࠔ࠯ࡦࡐ࡝ࡑ࡯ࠍࠣ࡜ࡈ࠻ߒߚࠪ࡝ࠞࠍ↪޿ࠆࠛࡐࠠࠪ᮸⢽ߩ⎬ൻ‛ߩ․ᕈߣធ⌕ᒝᐲߦߟ޿ߡᬌ⸛ߒߚ‫⚿ߩߘޕ‬ᨐ‫ޔ‬ᄙಽጘࡈࠜࠬࡈࠔ࠯ࡦࡐ࡝ࡑ࡯
ߦࠃࠆ⎬ൻ‛ߩࠟ࡜ࠬォ⒖᷷ᐲߪᏒ⽼ߩ⎬ൻ೷ߩ♽ࠃࠅ߽ ޯ͠਄᣹ߒ‫ޔ‬⠴ᾲᕈ߇ะ਄
ߔࠆߎߣ߇ಽ߆ߞߚ‫᧼ࡒ࡞ࠕޔߚ߹ޕ‬㑆ߩធ⌕ᒝᐲ߽ᄙಽጘࡈࠜࠬࡈࠔ࠯ࡦࡐ࡝ࡑ࡯ࠣ࡜
ࡈ࠻ߢ⎬ൻߒߚᣇ߇Ꮢ⽼ߩ⎬ൻ೷ࠍ↪޿ߚߣ߈ߣᲧセߒߡ‫  ⚂ޔ‬୚ߦߥࠆߎߣ߇ಽ߆ߞ
ߚ‫⋧ޔߚ߹ޕ‬ኻḨᐲ 㧑‫ᤨ  ߢ͠ޔ‬㑆᡼⟎ᓟߩࠟ࡜ࠬォ⒖᷷ᐲߣធ⌕ᒝᐲߩૐਅߪ‫ޔ‬Ꮢ⽼ߩ⎬ൻ೷ߩ♽ߣᲧセߒߡዊߐ޿ߎߣ߇᣿ࠄ߆ߦߥߞߚ‫ߩߎޕ‬᭽ߥ⚿ᨐߪ‫☸ࡁ࠽ࠞ࡝ࠪޔ‬ሶ߇⎬ൻ‛ਛ߳⇹᳓ᕈߩࠣ࡜ࡈ࠻㎮㑆ߩൻቇ⚿วࠍ੺ߒߡ⚵ߺㄟ߹ࠇߡ޿ࠆߚ߼ߣ⠨߃ࠄࠇࠆ‫ޕ‬Q ‫ࡁ࠽ࠄ߆ࡠࠢࠗࡑޟ‬㗔ၞߢߩ᧚ᢱ․ᕈขᓧߩߚ߼ߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ᭴▽‫ޠ‬㧔ᜂᒰ㧦౓ᐶ⋵┙ᄢቇ㧕ᐔᚑ㧝㧣ᐕᐲߪ‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ౉ജࠍታᣉߒߚ‫ౕޕ‬૕⊛ߦߪ‫ޔ‬MEMS ᧚ᢱߩജቇ
․ᕈ㧔․ߦ‫ࡦ࠰ࠕࡐ࡮₸ࠣࡦࡗޔ‬Ყ࡮ᒁᒛ/ᦛߍᒝᐲ╬㧕ߦ㑐ߔࠆ⍮⼂ᖱႎࠍ⺰ᢥߥࠄ߮ߦ
࿖㓙ળ⼏ࡊࡠࠪ࡯࠺ࠖࡦࠣ߆ࠄᛮ☴ߒ‫ޔ‬㧟㧜ઙߩ࠺࡯࠲౉ജࠍታᣉߒߚ‫౓ޔߚ߹ޕ‬ᐶ⋵┙η- 22ᄢቇߢขᓧߒߚ᧚ᢱ࠺࡯࠲ߦߟ޿ߡ߽౉ജࠍⴕߞߚ‫ޕ‬ᆔຬળᵴേߢߪ‫ޔ‬ਥߦ⍮⼂࠺࡯࠲౉ജ↹㕙ߥࠄ߮ߦ MemsONE ࠰ࡈ࠻↹㕙ߩ㐿⊒‫ޔ‬⍮⼂࠺࡯࠲౉ജᖱႎߩౝኈ‫࡮⺰⼏ߡ޿ߟߦޔ‬ᬌ⸛ߒߚ‫ޕ‬ࡑࠗࠢࡠࡑࠪࡦ㑐ㅪߩ࿖㓙ળ⼏㧦Transducers’05㧔㖧࿖࠰࠙࡞㧘6/5㨪6/9㧕߅ࠃ߮MEMS2006㧔࠻࡞ࠦࠗࠬ࠲ࡦࡉ࡯࡞㧘1/22㨪1/26㧕ߦ಴Ꮸ࡮⊒⴫ߒ‫ࡌ࡟ࡠࠢࠗࡑ࡮ࡁ࠽ޔ‬࡞ߢߩᯏ᪾⊛․ᕈ⹏ଔᴺߩᦨᣂᖱႎ෼㓸ࠍⴕߞߚ‫ߩߎޕ‬ᖱႎߦߟ޿ߡ‫ޔ‬ᰴᐕᐲߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬ߳෻ᤋߐߖࠆ੍ቯߢ޽ࠆ‫ޕ‬ᐔᚑ㧝㧤ᐕᐲߪ‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߩ౉ജࠍ㊀ὐߦታᣉߒߚ‫ౕޕ‬૕⊛ߦߪ‫ޔ‬MEMS ᧚ᢱ
ߩജቇ․ᕈ㧔․ߦ‫ࡦ࠰ࠕࡐ࡮₸ࠣࡦࡗޔ‬Ყ࡮ᒁᒛ/ᦛߍᒝᐲ╬㧕ߩ⸘᷹ᣇᴺ‫ޔ‬MEMS ࠺ࡃࠗࠬ㧔Ti-Ni ᒻ⁁⸥ᙘว㊄ࠍ↪޿ߚࡑࠗࠢࡠࠕࠢ࠴ࡘࠛ࡯࠲╬㧕‫ޔ‬MEMS ࡊࡠ࠮ࠬ㧔Au-Sn ߪࠎߛធ⌕╬㧕ߦ㑐ߔࠆ⍮⼂ᖱႎࠍ⺰ᢥߥࠄ߮ߦ࿖㓙ળ⼏ࡊࡠࠪ࡯࠺ࠖࡦࠣ߆ࠄᛮ☴ߒ‫ޔ‬55ઙߩ࠺࡯࠲ࠍ౉ജߒߚ‫౓ޕ‬ᐶ⋵┙ᄢቇߢขᓧߒߚ᧚ᢱ࠺࡯࠲ߦߟ޿ߡ߽౉ജࠍⴕߞߚ‫ޕ‬ᆔຬળᵴേߢߪ‫ޔ‬ਥߦ⍮⼂࠺࡯࠲౉ജ↹㕙ߥࠄ߮ߦ MemsONE ࠰ࡈ࠻↹㕙ߩ㐿⊒‫ޔ‬⍮⼂࠺࡯࠲౉ജᖱႎߩౝኈߦߟ޿ߡ⼏⺰࡮ᬌ⸛ߒߚ‫ޕ‬߹ߚ‫ࡦࠪࡑࡠࠢࠗࡑޔ‬㑐ㅪߩ࿖㓙ળ⼏㧦APCOT’06㧔ࠪࡦࠟࡐ࡯࡞㧘6/25㨪6/28㧕߅ࠃ߮MEMS2007㧔␹ᚭ㧘1/21㨪1/25㧕‫᧚ޔ‬ᢱ㑐ㅪߩ࿖㓙ળ⼏㧦THERMEC’06㧔ࠞ࠽࠳㧘7/4㨪7/8㧕
ߦ಴Ꮸ࡮⊒⴫ߒ‫ߩߢ࡞ࡌ࡟ࡠࠢࠗࡑ࡮ࡁ࠽ޔ‬ᯏ᪾⊛․ᕈ⹏ଔᛛⴚߩᦨᣂᖱႎ෼㓸ࠍⴕ޿‫ޔ‬⍮⼂࠺࡯࠲ࡌ࡯ࠬߦ෻ᤋߐߖߚ‫ޕ‬(3) ⎇ⓥ㐿⊒ᚑᨐߩᗧ⟵ ᧄࡊࡠࠫࠚࠢ࠻ߦ߅޿ߡ᭴▽ߒߚ⍮⼂࠺࡯࠲ࡌ࡯ࠬߪ‫ޔ‬㧹㧱㧹㧿ߩ⸳⸘࡮⎇ⓥ࡮㐿⊒ߦ៤ࠊࠆ‫ޔ‬㧝㧞ᄢቇ‫ޔ‬㧝⎇ⓥᯏ㑐‫ޔ‬㧡ડᬺߩᦨవ┵⎇ⓥ⠪ߩ⼾ንߥ⍮⷗߿ࡁ࠙ࡂ࠙ࠍ૕♽ൻߒߡ㓸⚂ߒߚ߽ߩߢ޽ࠅ‫ޔ‬ㆊ෰ߦߥ޿⚛᥍ࠄߒ޿߽ߩߢ޽ࠆ‫ޕ‬ߎߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬ߇‫ޔ‬㧹㧱㧹㧿ߩ⸳⸘ߦ៤ࠊࠆೋᔃ⠪ߩ⚻㛎ਇ⿷ࠍ⵬߁࠷࡯࡞ߩߺ
ߥࠄߕ‫ޔ‬ᾫ✵⠪߿⎇ⓥ⠪ߩၮ␆⊛࠺࡯࠲ߣߒߡᵴ↪ߢ߈ࠇ߫‫ޔ‬MemsONE ߩ࿖ౝ᥉෸ߦᄢ
߈ߊ⽸₂ߔࠆߣߣ߽ߦ‫ޔ‬ㅊߞߡߪ㧹㧱㧹㧿↥ᬺߩ⵿㊁ߩ᜛ᄢߦ߽ነਈߔࠆ߽ߩߣᦼᓙߒߡ
޿ࠆ‫ޕ‬

η- 23

/'/5 ↪᧚ᢱ࡮ࡊࡠ࠮ࠬ࠺࡯࠲ࡌ࡯ࠬߩ㐿⊒᧚ᢱ࡮ࡊࡠ࠮ࠬ࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ ⎇ⓥ㐿⊒ߩ᭎ⷐᧄ⎇ⓥߢߪ㧘⸃ᨆ♖ᐲࠍะ਄ߐߖ㧘ࡊࡠ࠻࠲ࠗࡊߩ⹜૞࿁ᢙ೥ᷫߦࠃࠆ࠺ࡃࠗࠬ㐿⊒ߩ⍴ᦼ㑆ൻ㧘߅ࠃ߮ࡈࠔࡦ࠼࡝࡯ᵴ↪ߩଦㅴࠍ࿑ࠆߎߣࠍ⋡⊛ߦ㧘࿖ౝࡈࠔࡦ࠼࡝࡯ߦࠃࠆ
᧚ᢱ࡮ࡊࡠ࠮ࠬ࠺࡯࠲ࠍขᓧߒ㧘࠺࡯࠲ࡌ࡯ࠬࠍ᭴▽ߒߚ㧚  ᚑᨐߩ⹦⚦Ԙ ᚑ⤑᧚ᢱߩᯏ᪾․ᕈ࠺࡯࠲
࿖ౝ MEMS ࡈࠔࡦ࠼࡝࡯㧟␠ߦଐ㗬ߒߡ૞⵾ߒߚᄙ⚿᥏ࠪ࡝ࠦࡦ(Poly-Si)㧘Al㧘Ni㧘
SiO2㧘SiN㧘ࡐ࡝ࠗࡒ࠼⤑ߩᯏ᪾․ᕈ෸߮ᱷ⇐ᔕജߩ࠺࡯࠲ࠍ᷹ቯߒ㧘ߘࠇࠄࠍ߹ߣ߼ߡ᧚
ᢱ࠺࡯࠲ࡌ࡯ࠬߦ⊓㍳ߒߚ㧚ߘࠇߙࠇߩ⤑᧚ᢱߩᚑ⤑᧦ઙࠍ⴫ 3-5-4 ߦ␜ߔ㧚ߥ߅㧘න⚿᥏ࠪ࡝ࠦࡦ(Single-Si)ߦߟ޿ߡߪ㧘SOI ࠙ࠚࡂࠍ↪޿ߡ᷹ቯࠍⴕߞߚ㧚
⴫ 3-5-4 ᚑ⤑᧚ᢱߩᯏ᪾⊛․ᕈ◲ᤃ᷹ቯ෸߮ᱷ⇐ᔕജ᷹ቯߩߚ߼ߩ⹜ᢱ৻ⷩ
᧚ᢱᚑ⤑ᴺ

Poly-Si

LPCVD

1

SiO2

0.5

Al

ࠬࡄ࠶࠲

1

SiO2

0.5

㧞␠

Al-Si

ࠬࡄ࠶࠲

1

SiO2

0.5

㧝␠

EB ⫳⌕

0.25

SiO2

0.5

㧞␠

ࠬࡄ࠶࠲

0.5

SiO2

0.5

㧝␠

ᾲ㉄ൻ

1

ߥߒ

㧟␠

PECVD

1

ߥߒ

㧞␠

LPCVD

1

ߥߒ

㧝␠

LPCVD

0.2

SiO2

0.1

ᮡḰ᧦ઙ 㧟␠

LPCVD

1

SiO2

0.1

ૐᔕജ᧦ઙ 㧝␠㩘㩩㩢㨼㩚㩎㩨

㩇㩕㩩㩧㩄㨺㩎

5

ߥߒ

Single-Si

SOI

8

SiO2

Ni

SiO2

SiN

⤑ෘǴ㨙

ਅ࿾᧚ᢱ

ਅ࿾ෘǴ㨙

ଐ㗬వ
ᮡḰ᧦ઙ 㧟␠ૐᔕജ᧦ઙ 㧝␠㧟␠1࠙ࠚࡂࡔ࡯ࠞࠃࠅ⾼౉ᚑ⤑᧚ᢱߩࡗࡦࠣ₸ߩ᷹ቯᚑ⤑᧚ᢱߩࡗࡦࠣ₸ߩ᷹ቯߦߪ㧘࡟࡯ࠩ⺃⿠⴫㕙ᒢᕈᵄᴺ߅ࠃ߮࠽ࡁࠗࡦ࠺ࡦ࠹࡯࡚ࠪ
ࡦᴺࠍ↪޿ߚ㧚࿑ 3-5-10 ߪ࡟࡯ࠩ⺃⿠⴫㕙ᒢᕈᵄᴺߩ᷹ቯⵝ⟎㧔ALOtecDresden ␠⵾‫ޔ‬
LAWave®㧕ߢ޽ࠆ㧚߹ߚ㧘᷹ቯߩේℂࠍ࿑ 3-5-11 ߦ␜ߔ㧚⍴ࡄ࡞ࠬ࡟࡯ࠩߦࠃࠅᾲᒢᕈ⊛ߦᐢᏪၞߩ⴫㕙ᵄⴣ᠄ࠍ⊒↢ߐߖ㧘〒㔌 x ࠍㅢㆊߒߚᓟ㧘ߎߩⴣ᠄ᵄࠍㆡᒰߥᬌ಴ེ㧔ᧄη- 24᷹ቯߢߪ࿶㔚⚛ሶ㧕ߦࠃࠅᬌ಴ߔࠆߎߣߦࠃࠅ㧘⴫㕙ߦု⋥ᣇะߩᝄേᚑಽࠍᜬߟ⴫㕙ᵄߩಽᢔࠍ᷹ቯߔࠆ㧚ᓧࠄࠇߚಽᢔᦛ✢㧔૏⋧ㅦᐲ vs ๟ᵄᢙ㧕ࠍℂ⺰ᑼࠍ↪޿ߡࡈࠖ࠶࠹
ࠖࡦࠣߔࠆߎߣߦࠃࠅ㧘ࡃ࡞ࠢ᧚߿⭯⤑᧚ᢱߩࡗࡦࠣ₸ࠍᓧࠆ㧚    
࿑ 3-5-10 ࡟࡯ࠩ⺃⿠⴫㕙ᒢᕈᵄ᷹ቯⵝ⟎     ࿑ 3-5-11 ᷹ቯේℂ   

㪊㪌㪇
㪘␠
㪙␠
㪚␠
ૐᔕജ

㪊㪇㪇

䊟䊮䉫₸㩷㪲㪤㪧㪸㪴

㪉㪌㪇
㪉㪇㪇
㪈㪌㪇
㪈㪇㪇
㪌㪇
㪇

㫇㫆㫃㫐㪄㪪㫀

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࿑ 3-5-12 ࡟࡯ࠩ⺃⿠⴫㕙ᒢᕈᵄᴺߦࠃࠅᓧࠄࠇߚฦᚑ⤑᧚ᢱߩࡗࡦࠣ₸᷹ቯ⚿ᨐࠍ࿑ 3-5-12 ߦ߹ߣ߼ߡ␜ߔ㧚ฦࡈࠔࡦ࠼࡝࡯ߩฦᚑ⤑᧚ᢱߘࠇߙࠇߦߟ޿ߡ㧟ᨎߩ࠙ࠚࡂߩ᷹ቯࠍⴕ޿㧘᷹ቯ୯ߩᐔဋࠍ␜ߒߡ޿ࠆ㧚ᄙ⚿᥏ࠪ࡝ࠦࡦ㧘Al ߅ࠃ߮ Al-Si㧘
Ni㧘ᾲ㉄ൻ SiO2㧘PECVD ߅ࠃ߮ LPCVD-SiO2㧘SiN ߩ࠺࡯࠲ߪ㧘࡟࡯ࠩ⺃⿠⴫㕙ᒢᕈᵄ
ᴺߦࠃࠆ߽ߩߢ޽ࠅ㧘ࡐ࡝ࠗࡒ࠼ߩ࠺࡯࠲ߦߟ޿ߡߪ࠽ࡁࠗࡦ࠺ࡦ࠹࡯࡚ࠪࡦᴺߦࠃࠆ߽ߩߢ޽ࠆ㧚ߘࠇߙࠇߩ᧚ᢱߢ㧘㧟␠ߩ MEMS ࡈࠔࡦ࠼࡝࡯ߦࠃࠆ⹜ᢱߩ᷹ቯࠍⴕߞߚ߶߆㧘ᄙ⚿᥏ Si ߅ࠃ߮ SiN ߦߟ޿ߡߪ㧝␠ߩ MEMS ࡈࠔࡦ࠼࡝࡯ߦࠃࠅ૞⵾ߐࠇߚૐᔕജ᧦ઙ

η- 25ߢߩ⤑ߦߟ޿ߡ߽㧘ࡗࡦࠣ₸ߩ᷹ቯࠍⴕߞߡ޿ࠆ㧚Al ߅ࠃ߮ᾲ㉄ൻ SiO2 ߦߟ޿ߡߪ㧘ࡃ࡞ࠢ᧚ߣ߶߷ห৻ߩࡗࡦࠣ₸ߣߥࠅ㧘ࡈࠔࡦ࠼࡝
࡯߿࠙ࠚࡂ㑆ߢߩ߫ࠄߟ߈߽ዊߐ߆ߞߚ㧚߹ߚ㧘ᄙ⚿᥏ Si㧘SiN ߅ࠃ߮ Ni ߢߪ㧘⸳⸘⤑ෘࠍ↪޿ߡࡗࡦࠣ₸ࠍ▚ቯߒߚߣߎࠈ㧘᷹ቯ୯ߦ߫ࠄߟ߈߇⷗ࠄࠇߚߚ߼㧘⤑ෘࠍታ᷹ߒߘ
ߩ୯ࠍ↪޿ߡࡗࡦࠣ₸ࠍ▚಴ߒߚ㧚⤑ෘߩ♖ᐲ߇ะ਄ߒߚߎߣߦࠃࠅ㧘ࡈࠔࡦ࠼࡝࡯㑆ߢߩ߫ࠄߟ߈ߪ❗ዊߒߚ㧚ࡗࡦࠣ₸ߩ୯ߪ㧘߿ߪࠅࡃ࡞ࠢ᧚ᢱߦㄭ޿߽ߩߣߥߞߚ㧚ૐᔕജ᧦ઙߢߩ⤑ߦߟ޿ߡߪ㧘ᄙ⚿᥏ Si ߪㅢᏱ᧦ઙߩ߽ߩߣห╬ߢࡃ࡞ࠢ᧚ߦㄭ޿ࡗࡦ
ࠣ₸ߣߥߞߡ޿ࠆ߇㧘SiN ߢߪㅢᏱ᧦ઙߩᚑ⤑᧚ᢱ߿ࡃ࡞ࠢ᧚ߦᲧߴߡࡗࡦࠣ₸߇ዊߐ޿ߣ޿߁᷹ቯ⚿ᨐߣߥߞߚ㧚࡟࡯ࠩ⺃⿠⴫㕙ᒢᕈᵄᴺߢߪ㧘ߘߩ᷹ቯේℂ߆ࠄ⤑ߩኒᐲ߇᷹
ቯ⚿ᨐߦᄢ߈ߊᓇ㗀ߔࠆߎߣ㧘ૐᔕജ᧦ઙߩ SiN ߢߪ Si ߣ N ߩ⚵ᚑᲧ߇ࡃ࡞ࠢ᧚ߩ߽ߩ
߆ࠄߕࠇࠆߎߣ߇⍮ࠄࠇߡ޿ࠆߎߣߥߤ߆ࠄ㧘᷹ቯ୯ߦ⤑ߩኒᐲ߇ᓇ㗀ߒߡ޿ࠆน⢻ᕈ߇޽ࠆ㧚ߎࠇࠍ⏕⹺ߔࠆߚ߼㧘࠽ࡁࠗࡦ࠺ࡦ࠹࡯࡚ࠪࡦᴺߦࠃࠆ᷹ቯ⚿ᨐߣߩᲧセࠍⴕߞߚ㧚
ਔᚻᴺߦࠃࠆ᷹ቯ⚿ᨐߪ⦟ߊ৻⥌ߒ㧘ૐᔕജ᧦ઙߩ SiN ߢߪ㧘ࡗࡦࠣ₸ߪࡃ࡞ࠢ᧚߿ㅢᏱ
᧦ઙߩ⤑ߦᲧߴዊߐ޿ߎߣ߇⏕⹺ߐࠇߚ㧚ࡐ࡝ࠗࡒ࠼⤑ߦߟ޿ߡߪ㧘࡟࡯ࠩ⺃⿠⴫㕙ᒢᕈᵄᴺߢ߽᷹ቯߪน⢻ߢ޽ߞߚ߇㧘᷹ቯ୯ߩ߫ࠄߟ߈ߥߤ᷹ቯ♖ᐲߩ㕙߆ࠄ㧘࠺࡯࠲ࡌ࡯ࠬߦߪ࠽ࡁࠗࡦ࠺ࡦ࠹࡯࡚ࠪࡦᴺߦࠃࠅ᷹ቯߒߚ࠺࡯࠲ࠍណ↪ߒߚ㧚ࡐ࡝ࠗࡒ࠼ߩࡗࡦࠣ₸ߪ㧟␠ߩࡈࠔࡦ࠼࡝࡯ߢ⇣ߥࠆ⚿ᨐߣߥߞߚ߇㧘ࡐ࡝ࠗࡒ࠼ߪᄙߊߩ᮸⢽ࡔ࡯ࠞ࡯߆ࠄᄙ᭽ߥ⵾ຠ߇ଏ⛎ߐࠇߡ߅ࠅ㧘ࡈࠔࡦ࠼࡝
࡯ฦ␠߇ណ↪ߒߡ޿ࠆ᧚ᢱߩ㆑޿ߦࠃࠆ߽ߩߣ⠨߃ࠄࠇࠆ㧚ࡐ࡝ࠗࡒ࠼ߩࡗࡦࠣ₸ߪ㊄ዻ
߿ Si ♽ߩ᧚ᢱߦᲧߴߡዊߐߊᢙ MPa ⒟ᐲߢ޽ࠅ㧘ฦ␠ߦࠃࠆ㆑޿ߪ޽ࠆ߽ߩߩ৻⥸ߦ⍮ࠄࠇߡ޿ࠆઍ⴫⊛ߥ୯ߣห⒟ᐲߣߥߞߚ㧚એ਄ߩ⚿ᨐࠃࠅ㧘᷹ቯ࠺࡯࠲ࠍߣࠅ߹ߣ߼㧘⸃ᨆࠪࠬ࠹ࡓߩ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬߦ෼㍳ߒߚ㧚ᚑ⤑᧚ᢱߩᱷ⇐ᔕജߩ᷹ቯ㧚ᚑ⤑᧚ᢱߩᱷ⇐ᔕജߩ᷹ቯߦߪ㧘࿑ 3-5-13 ߩⵝ⟎ࠍ↪޿ߡ㧘࿑ 3-5-14 ߦ␜ߔࠃ߁ߦၮ
᧼ߩᦛ₸ࠍశቇ⊛ߦ᷹ቯߔࠆᚻᴺࠍ↪޿ߚ㧚ᱷ⇐ᔕജߪ㧘⤑ߩ᦭ήߦࠃࠆၮ᧼ߩᦛ₸ߩᄌൻ߆ࠄ㧘▚಴ߒߚ㧚

η- 26


࿑ 3-5-13 ᚑ⤑᧚ᢱᱷ⇐ᔕജ᷹ቯⵝ⟎     ࿑ 3-5-14 ᱷ⇐ᔕജ᷹ቯߩේℂ
࿑ 3-5-15 ߦฦ⒳ᚑ⤑᧚ᢱߩᏱ᷷ߩ⁁ᘒߢߩᱷ⇐ᔕജߩ᷹ቯ⚿ᨐࠍ␜ߔ㧚ฦࡈࠔࡦ࠼࡝࡯
ߦࠃࠆฦ᧚ᢱߩ⤑ߦߟ޿ߡ㧘ዋߥߊߣ߽㧞ᨎએ਄ߩ࠙ࠚࡂߩ᷹ቯࠍⴕ޿㧘᷹ቯ୯ߩ♖ᐲߣౣ⃻ᕈࠍ⏕⹺ߒߡ޿ࠆ㧚Poly-Si ⤑ߦߟ޿ߡߪ㧘ߔߴߡߩࡈࠔࡦ࠼࡝࡯ߦࠃࠆ⤑ߢ࿶❗ᔕജߣߥߞߡ߅ࠅ㧘⛘ኻ୯ߦ߽ᄢ߈ߥ㆑޿ߪߥ޿ߎߣ߆ࠄ㧘LPCVD ߦࠃࠆ Poly-Si ⤑ߦ౒ㅢߩ․ᕈߣ⠨߃ࠄࠇࠆ㧚߹ߚ㧘ૐᔕജ⤑ߦߟ޿ߡߪ㧝␠ߩߺߦ૞⵾ࠍଐ㗬ߒߚ߇㧘߶߷ᔕജ߇ߥ޿⁁ᘒߦߥߞߡ߅ࠅ㧘Poly-Si ߦߟ޿ߡߪᔕജߩ೙ᓮ߇น⢻ߢ޽ࠆߎߣ߇⏕⹺ߐࠇߚ㧚㪈㪋㪇㪇࿶❗㸠䇭䇭䇭䇭ᱷ⇐ᔕജ㪲㪤㪧㪸㪴䇭䇭䇭䇭㸢ᒁᒛ

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࿑ 3-5-15 ฦ⒳ᚑ⤑᧚ᢱߩᱷ⇐ᔕജ᷹ቯ⚿ᨐ

η- 27

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࿑ 3-5-16 ടᾲ಄ළߦࠃࠆ Al ⤑ߩᱷ⇐ᔕജߩᄌൻ
Al ߦߟ޿ߡߪ㧘࿑ 3-5-16 ߦ␜ߔࠃ߁ߦᾲጁᱧߦࠃࠅᔕജߦᄌൻ߇⷗ࠄࠇߚ㧚ᚑ⤑ߒߚ߹߹ߩ⁁ᘒ߆ࠄടᾲࠍⴕ߁ߣ㧘࿑ 3-5-16 ߩ‫ޟ‬㧝࿁⋡‫ߩ⤑ߦ߁ࠃߩࡈ࡜ࠣߩޠ‬ౝㇱᔕജߪᒁᒛ߆ࠄ࿶❗ߦᄌൻߒߚ㧚ߎࠇߪ㧘Al ߩᾲ⤘⣘ଥᢙ߇ၮ᧼ߢ޽ࠆ Si ߦᲧߴߡᄢ߈޿ߚ߼ߢ޽
ࠆߣ⠨߃ࠄࠇࠆ㧚ߐࠄߦ᷷ᐲࠍ਄ߍߡ޿ߊߣ㧘࿶❗ᔕജߪ 100 MPa ⒟ᐲߢ㘻๺ߒ㧘ߘࠇએ㒠ߪᔕജ߇✭߿߆ߦᷫዋߒᆎ߼ࠆ㧚Al ߪⲢὐ߇ૐ޿ߚ߼㧘ടᾲߦࠃࠅᔕജߩ✭๺߇⿠ߎߞ
ߚ߽ߩߣ⠨߃ࠄࠇࠆ㧚ᦨ㜞᷷ᐲ೔㆐ᓟ㧘಄ළࠍᆎ߼ࠆߣᔕജߪ࿶❗߆ࠄᒁᒛߦᄌൻߔࠆ㧚ߎߩߣ߈߽ᒁᒛᔕജ߇ᄢ߈ߊߥࠆߦߟࠇߡᔕജߩࠣ࡜ࡈߪ⋥✢߆ࠄߪߕࠇࠆࠃ߁ߦߥࠅ㧘ᔕജߩ✭๺߇⿠ߎߞߡ޿ࠆߎߣ߇ࠊ߆ࠆ㧚ߎߩ႐วߪ᷷ᐲ߇ૐ޿ߩߢᔕജߩ✭๺ߪࠊߕ߆
ߢ޽ࠆ㧚ߐࠄߦ㧘‫ޟ‬㧝࿁⋡‫ߩޠ‬ᾲࠨࠗࠢ࡞᷹ቯߩ⠉ᣣߦⴕߞߚ‫ޟ‬㧞࿁⋡‫ߩޠ‬᷷ᐲࠨࠗࠢ࡞ߢ
ߪ㧘㐿ᆎᤨߩᔕജ߇‫ޟ‬㧝࿁⋡‫ߩᤨੌ⚳࡞ࠢࠗࠨߩޠ‬ᔕജߦᲧߴዊߐߊߥߞߡ޿ࠆ㧚ߎߩߎ
ߣߪ㧘Al ߩࠃ߁ߥૐⲢὐ㊄ዻߢߪ㧘Ᏹ᷷ઃㄭߢ޽ߞߡ߽ᔕജߩ✭๺߇ㅴⴕߔࠆߎߣࠍ␜ߒ
ߡ޿ࠆ㧚৻ᣇ㧘㜞᷷ߢᒻᚑߐࠇࠆ LPCVD ߦࠃࠆᄙ⚿᥏ࠪ࡝ࠦࡦ߿ SiN㧘߅ࠃ߮ᾲ㉄ൻ SiO2
ߢߪ㧘ടᾲ಄ළߦࠃࠅᾲ⤘ᒛ₸ߩ㆑޿ߦࠃࠆᔕജߩᄌൻߪⷰኤߐࠇࠆ߽ߩߩ㧘Ᏹ᷷ߢߩᔕ
ജ୯ߦߪᄌൻߪ⷗ࠄࠇߥ߆ߞߚ㧚ߎߩࠃ߁ߥℂ↱߆ࠄ㧘Al ߩᔕജ᷹ቯߢߪ቟ቯൻߩߚ߼ߩ
ᾲಣℂࠍⴕߞߚ㧚࿑ 3-5-15 ߩ࠺࡯࠲ߪ㧘቟ቯൻᾲಣℂᓟߩᏱ᷷ߢߩᱷ⇐ᔕജߢ޽ࠆ㧚ߔߴߡߩ⤑ߢᒁᒛᔕജߣߥߞߡ߅ࠅ㧘ߘߩᔕജߩ୯ߪ߶߷หߓߢ޽ߞߚ㧚Ni ߦߟ޿ߡߪ㧘ᒁߞᒛࠅᔕജߣ޿߁ߎߣߢߪ㧟␠ߣ߽౒ㅢߢ޽ߞߚ߇㧘ߘߩ⛘ኻ୯ߦߟ޿ߡߪ㆑޿߇⷗ࠄࠇߚ㧚ߎߩ㆑޿ߪ㧘ࠬࡄ࠶࠲ߣ㔚ሶࡆ࡯ࡓ⫳⌕ߣ޿߁ᚑ⤑ᴺߩ㆑޿ߣߪ
ኻᔕߒߡ޿ߥ޿㧚ߥ߅㧘Ni ߢߪ Al ߦ⷗ࠄࠇߚࠃ߁ߥടᾲ಄ළߦ઻߁ᔕജߩ✭๺ߪⷰኤߐࠇ
ߥ߆ߞߚ㧚

η- 28

SiO2 ߦߟ޿ߡߪ㧘ᾲ㉄ൻߦࠃࠅ૞⵾ߒߚ⤑ߪ㧟␠ߣ߽࿶❗ᔕജߢ޽ࠅ㧘ߘߩ⛘ኻ୯߽߶߷╬ߒ޿ߣ޿߁⚿ᨐߦߥߞߚ㧚৻ᣇ㧘CVD ߦࠃࠆ SiO2 ⤑ߪᾲጁᱧߦࠃࠅౝㇱᔕജߦᄌൻ
߇⿠ߎࠆߎߣ߇⏕⹺ߐࠇߚߚ߼㧘቟ቯൻᾲಣℂࠍⴕߞߚᓟߩᏱ᷷ߢߩᱷ⇐ᔕജࠍ᷹ቯߒߚ㧚
CVD ߦࠃࠆ SiO2 ⤑ߢ߽߿ߪࠅౝㇱᔕജߪ࿶❗ᔕജߣߥߞߚ߇㧘ߘߩ⛘ኻ୯ߪࡈࠔࡦ࠼࡝
࡯ߦࠃࠅ⇣ߥߞߚ㧚߹ߚ㧘ߘߩ㆑޿ߪ PECVD ߣ LPCVD ߣ޿߁ᚑ⤑ᴺߩ㆑޿ߣߪ⋥ធߩኻᔕ㑐ଥߪߥ߆ߞߚ㧚
SiN ⤑ߢߪ㕖Ᏹߦᄢ߈ߥᒁߞᒛࠅᔕജ߇ᱷ⇐ߒߡ޿ࠆ߇㧘ߘߩ⛘ኻ୯ߪࡈࠔࡦ࠼࡝࡯㧟␠ߣ߽߶߷หߓߢ޽ࠅ㧘LPCVD ߦࠃࠆ SiN ⤑ߦ౒ㅢߩ௑ะߣ⠨߃ࠄࠇࠆ㧚৻ᣇ㧘ૐᔕജ
ߩ SiN ⤑ߢߪ߿ߪࠅᒁߞᒛࠅᔕജ߇ᱷ⇐ߒߡ޿ࠆ߇㧘ߘߩ⛘ኻ୯ߪᄢ᏷ߦዊߐߊߥߞߡ޿
ࠆ㧚ࡐ࡝ࠗࡒ࠼⤑ߪ㧘㧞␠ߩ⤑ߢᒁߞᒛࠅᔕജߣߥߞߚ㧚ᔕജߩ⛘ኻ୯ߪઁߩ⤑ߦᲧߴߡዊ
ߐ޿߇㧘⤑ߩࡗࡦࠣ₸߽ዊߐ޿ߚ߼ᱡߺߩ⛘ኻ୯ߪ޽ࠆ⒟ᐲᄢ߈޿ߣ⠨߃ࠄࠇࠆ㧚ᱷࠆ㧝␠ߩ⤑ߪ߶ߣࠎߤᔕജ߇⊒↢ߒߡ޿ߥ߆ߞߚ㧚ࡐ࡝ࠗࡒ࠼ߪಽሶ᭴ㅧࠍᄌ߃ࠆߎߣߦࠃࠅ
᭽‫․ߥޘ‬ᕈ߇ᄌൻߔࠆߚ߼㧘ᔕജߩ㆑޿ߪ↪޿ߚ᧚ᢱߩ㆑޿ߦࠃࠆߣ⠨߃ࠄࠇࠆ㧚න⚿᥏ࠪ࡝ࠦࡦߦߟ޿ߡߪ㧘න⚿᥏࠙ࠚࡂߘߩ߽ߩߦᱷ⇐ᔕജߪߥ޿ߚ߼㧘SOI ࠙ࠚࡂߩᔕജ᷹ቯࠍ⹜ߺߚ㧚SOI ࠙ࠚࡂߩන⚿᥏ࠪ࡝ࠦࡦ⤑ߢߪ㧘ᚑ⤑᧚ᢱߦᲧߴᱷ⇐ᔕജߪ㕖Ᏹߦዊߐߊ㧘߶߷࠯ࡠߢ޽ߞߚ㧚⭯⤑ߩᒁᒛ⹜㛎ቶ᷷߆ࠄ 200͠⒟ᐲ߹ߢߩ᷷ᐲ▸࿐ߦ߅޿ߡᒁᒛ⹜㛎ࠍታᣉߒߡ MEMS ᧚ᢱߩࡗࡦࠣ₸߿ࡐࠕ࠰ࡦᲧ╬ߩᯏ᪾․ᕈ࠺࡯࠲ࠍ᷹ቯߔࠆߚ߼ߩ MEMS ᧚ᢱ↪ᒁᒛ⹜㛎ᴺࠍ㐿⊒ߒߚ㧚ߘߩ㓙㧘IEC ߩ⭯⤑ᒁᒛ⹜㛎ᴺⷙᩰ‫ޟ‬Tensile testing methods of thin film materials‫ߦޠ‬ၮߠ߈㧘MEMS ᧚ᢱᒁᒛ⹜㛎ߩ⸳⸘࡮⹜૞ࠍⴕ߁ߣ౒ߦ㧘ቶ᷷߆ࠄ 200͠⒟ᐲ߹ߢߩ᷷

ᐲ▸࿐ߦ߅޿ߡ⹜㛎น⢻ߢ޽ࠆ MEMS ᧚ᢱ↪ᒁᒛ⹜㛎ⵝ⟎ࠍዉ౉ߒߚ㧚
࿑ 3-5-17 ߦ㧘ዉ౉ߒߚ MEMS ᧚ᢱ↪ᒁᒛ⹜㛎ⵝ⟎ߩᮨᑼ࿑ࠍ␜ߔ㧚߹ߚ㧘࿑ 3-5-18 ߦหⵝ⟎ਥⷐㇱߩ౮⌀ࠍ␜ߔ㧚ᧄⵝ⟎ߪ㧘⹜㛎 ⵝ⌕↪ࡊࡠ࡯ࡉ㧔㕒㔚࠴ࡖ࠶ࠢߢ MEMS ᧚ᢱᒁᒛ⹜㛎ߩ࠴ࡖ࠶ࠢㇱࠍ࿕ቯ㧕㧘⹜㛎 ⵝ⌕↪ࠬ࠹࡯ࠫ㧔MEMS ᧚ᢱᒁᒛ⹜㛎 ߩ Siၮ᧼ࠍ⌀ⓨ࠴ࡖ࠶ࠢߢ࿕ቯ㧕㧘⩄㊀⽶⩄↪ࡇࠛ࠱ࠕࠢ࠴ࡘࠛ࡯࠲㧔⹜㛎 ⵝ⌕↪ࠬ࠹࡯ࠫߦ
ᄌ૏⽶⩄㧕㧘ᓸዊ⩄㊀↪ࡠ࡯࠼࠮࡞㧔ቯᩰ⩄㊀㧦100grf㧕㧘ࡅ࡯࠲㧔⹜㛎 ⵝ⌕↪ࠬ࠹࡯ࠫߦ
ౝ⬿㧕㧘㒰㔡บ╬ߢ᭴ᚑߐࠇࠆ㧚ᧄⵝ⟎ߪ㧘㕒㔚࠴ࡖ࠶ࠢᑼߩ⹜㛎ࠃࠅ⹜㛎ⵝ⌕ᴺࠍ↪޿ߡ߅ࠅ㧘᷷ᐲ⽶⩄ᓟߢ߽㕒㔚࠴ࡖ࠶ࠢߦ

ࠍⵝ⌕ߔࠆߎߣ߇น⢻ߢ޽ࠆߩߢ㧘᷷ᐲᄌൻߦࠃࠆᱷ⇐ᔕജ⊒↢ߩ໧㗴ࠍ࿁ㆱߔࠆߎߣ߇ߢ߈ࠆ㧚ߘߩߚ߼㧘ᧄⵝ⟎ߢߪᓸዊ⩄㊀↪ࡠ࡯࠼࠮࡞ࠍ↪޿ࠆߎߣߦࠃࠅ㧘᷷
ᐲ⽶⩄⁁ᘒߢ߽ MEMS ᧚ᢱᒁᒛ⹜㛎 ߦ⽶⩄ߔࠆᓸዊ⩄㊀ࠍᱜ⏕ߦ᷹ቯߔࠆߎߣ߇น⢻ߢ
޽ࠆ㧚

η- 29

࿑ 3-5-17 MEMS ᧚ᢱ↪ᒁᒛ⹜㛎ⵝ⟎

࿑ 3-5-18 MEMS ᧚ᢱ↪ᒁᒛ⹜㛎ⵝ⟎ߩਥⷐㇱᰴߦ㧘⭯⤑ᒁᒛ⹜㛎 㧔ࡗࡦࠣ₸᷹ቯ↪㧝⒳㘃㧘ࡐࠕ࠰ࡦᲧ᷹ቯ↪㧞⒳㘃㧕ࠍ⸳⸘ߒ㧘ࡈࠔࡦ࠼࡝࡯㧝␠ߦ߅޿ߡห⹜㛎ࠍ⹜૞ߔࠆߎߣߦࠃࠅ㧘⵾ㅧࡊࡠ࠮ࠬ㧘⹜㛎ߩ᧚⾰࡮᭴ㅧ㧔‶†ጀ㧘ᮡὐ㧘㔚ᭂߩ᧚⾰╬㧕㧘ᒻ⁁࡮ኸᴺߩᅷᒰᕈࠍᬌ⸽ߒߚ㧚 㧟⒳㘃ߩ⭯⤑ᒁᒛ⹜㛎‶†ጀߩ਄ߦ

ߪ㧘ขࠅᛒ޿ߣ࠴ࡖ࠶ࠠࡦࠣࠍ◲ଢߦߔࠆߚ߼ߦ㧘Si ၮ᧼ౝߩᜬߜ᪞ߩᒻ⁁ߦ⵾૞ߔࠆࠃ߁ߦ⸳⸘ߒߡ޿ࠆ㧚㧟⒳㘃ߩ⭯⤑ᒁᒛ⹜㛎 ߪ㧘ၮᧄ⊛᭴ㅧ߿⤑ෘ㧘⵾ㅧࡊࡠ࠮ࠬߪห৻ߢ޽ࠅ㧘ࡗࡦࠣ₸߿ࡐࠕ࠰ࡦᲧࠍ᷹ቯߔࠆߚ߼ߩ
⹜㛎ᐔⴕㇱߩኸᴺ߿ᮡὐߩߺࠍᄌᦝߒߡ޿ࠆ㧚ࡗࡦࠣ₸᷹ቯ↪⹜㛎

ߪ㧘⹜㛎

ᐔⴕㇱ

ߩ㐳ߐ߇ 0.6mm㧘᏷߇ 0.05mm㧔⹜㛎 ⢋ㇱඨᓘ㧦0.5mm㧕ߢ޽ࠅ㧘િ᷹߮ቯ↪ߦ㧞ߟߩᮡὐ㧔ࠥ࡯ࠫ࡟ࡦࠣࠬ㧦0.48mm㧕ࠍ᦭ߒߡ޿ࠆ㧚ࡐࠕ࠰ࡦᲧ᷹ቯ↪⹜㛎

η- 30

ߪ㧞⒳㘃޽ࠅ㧘㧠ߟߩᮡὐࠍ᦭ߒߡ޿ࠆ㧚㧞⒳㘃ߩ⹜㛎 ߩౝ㧘⹜㛎 㧭ߪ⹜㛎 ᐔⴕㇱߩ㐳ߐ߇ 0.25mm㧘
᏷߇ 0.1mm㧔⹜㛎㧮ߪ⹜㛎⢋ㇱඨᓘ㧦0.5mm㧕ߢ޽ࠅ㧘ࠥ࡯ࠫ࡟ࡦࠣࠬߪ 0.08mm ߢ޽ࠆ㧚⹜㛎ᐔⴕㇱߩ㐳ߐ߇ 0.5mm㧘᏷߇ 0.2mm㧔⹜㛎 ⢋ㇱඨᓘ㧦0.5mm㧕ߢ޽ࠅ㧘ࠥ࡯ࠫ࡟ࡦࠣࠬߪ 0.18mm ߢ޽ࠆ㧚࿑ 3-5-19 ߦ㧘ࡐ࡝ࠪ࡝ࠦࡦ⭯⤑ᒁᒛ⹜㛎 ߩో૕࿑ߣ
⹜㛎ᐔⴕㇱ๟ㄝߩ᜛ᄢ࿑ࠍ␜ߔ㧚㧟⒳㘃ߩ⹜㛎ߦߪ㧘㕒㔚࠴ࡖ࠶ࠢߦࠃࠅ࠴ࡖ࠶ࠠࡦ

ࠣࠍⴕ߁ߚ߼ߦ㔚ᭂࠍ⸳ߌߡ޿ࠆ㧚߹ߚ㧘⹜㛎⭯⤑ߩᱷ⇐ᔕജߦࠃࠆ෻ࠅ㄰ࠅࠍ㒐߉㧘࠴ࡖ࠶ࠠࡦࠣࠍ◲ଢߦߔࠆߚ߼ߦ㧘㧠ᧄߩ᪞߇࠴ࡖ࠶ࠢㇱߣ⹜㛎߅㧘⹜㛎ᄖᨒࠍߟߥ޿ߢ޿ࠆ㧚ߥⵝ⌕ᓟߦߎࠇࠄߩ᪞ߪಾᢿߐࠇࠆߩߢ㧘⩄㊀᷹ቯ߳ߩ᪞ߩᓇ㗀ߪߥ޿㧚ࡗࡦࠣ₸᷹ቯ↪⹜㛎           ࡐࠕ࠰ࡦᲧ᷹ቯ↪⹜㛎㧭

࿑ 3-5-19 ࡐ࡝ࠪ࡝ࠦࡦ⭯⤑ᒁᒛ⹜㛎 ߩ CAD ࿑ ⸳⸘ߒߚ㧟⒳㘃ߩࡐ࡝ࠪ࡝ࠦࡦ⭯⤑ᒁᒛ⹜㛎㧝␠ߦ߅޿ߡ⹜㛎ߩᅷᒰᕈࠍᬌ⸽ߔࠆߚ߼㧘ࡈࠔࡦ࠼࡝࡯

ߩ⹜૞ࠍⴕߞߚ㧚⹜㛎⭯⤑߇෻ࠅ㄰ࠄߧࠃ߁㧘ૐᔕജ᧦ઙߩ⤑ࠍ↪޿ߚ㧚⹜૞ߩ⚿ᨐ㧘㧟⒳㘃ߩ⹜㛎ߩ⹜㛎ㇱ߇უࠇࠆߎߣߥߊ㧘⹜㛎ߣ߇ࠊ߆ߞߚ㧚࿑ 3-5-20 ߦ㧘⵾૞ߒߚ⹜㛎 ߩ㗼ᓸ㏜౮⌀ࠍ␜ߔ㧚η- 31⵾૞߇น⢻ߢ޽ࠆߎ

⹜㛎ㇱ

䉼䊞䉾䉪ㇱ

࿑ 3-5-20 ࡈࠔࡦ࠼࡝࡯ߢ⵾૞ߒߚࡐ࡝ࠪ࡝ࠦࡦ⭯⤑ᒁᒛ⹜㛎ᰴߦ㧘MEMS ᧚ᢱ⹜㛎ߩᱡߺ᷹ቯࠍน⢻ߣߔࠆߚ߼ߦ㐿⊒ߒߚశቇᑼᱡߺ᷹ቯⵝ⟎㧔ᓸዊᄌᒻ⹏ଔⵝ⟎㧕ߩ᭎⇛ߦߟ޿ߡㅀߴࠆ㧚㐿⊒ߒߚᓸዊᄌᒻ⹏ଔⵝ⟎ߪ㧘శቇ㗼ᓸ㏜㧘㜞
♖⚦↹௝࠮ࡦࠨ㧘෸߮ታᤨ㑆⋧㑐Ṷ▚ᯏ⢻ࠍ᦭ߔࠆ↹௝ಣℂⵝ⟎ࠍ᦭ߒߡ޿ࠆ㧚                   ↹௝࠮ࡦࠨାภ↹௝࠮ࡦࠨ               ࡕ࠾࠲              శቇ㗼ᓸ㏜
            
ࡄ࠰ࠦࡦ
࡟ࡦ࠭

              ⭯⤑⹜㛎ⵝ⌕ㇱ                 ⩄㊀ାภ

↹௝ಣℂᑼ
᷹ቯⵝ⟎

                 ታ㛎บ                      
࿑ 3-5-21 ⭯⤑ᒁᒛ⹜㛎↪శቇᑼᱡߺ᷹ቯⵝ⟎ߩࠪࠬ࠹ࡓ᭴ᚑ᭎⇛࿑

η- 32

࿑ 3-5-21 ෸߮࿑ 3-5-22 ߦ㧘శቇᑼᱡߺ᷹ቯⵝ⟎ߩࠪࠬ࠹ࡓ᭴ᚑ᭎⇛࿑㧘෸߮㧘หᱡߺ᷹ቯⵝ⟎ߩਥⷐ᭴ᚑⷐ⚛ߢ޽ࠆ↹௝ಣℂᑼ᷹ቯⵝ⟎ߩౝㇱᯏ⢻ࡉࡠ࠶ࠢ✢࿑ࠍߘࠇߙࠇ␜ߔ㧚㐿⊒ߒߚᱡߺ᷹ቯⵝ⟎ߢߪ㧘࿑ 3-5-22 ߦ␜ߔࠃ߁ߦశቇ㗼ᓸ㏜ߦᱡߺ᷹ቯኾ↪ߩ㜞♖⚦↹௝࠮ࡦࠨ㧔2048 ↹⚛2048 ↹⚛㧕ࠍขࠅઃߌ㧘ห↹௝࠮ࡦࠨߩାภࠍ㧘↹௝ಣℂᑼ᷹ቯⵝ⟎ߦ౉ജߐߖࠆߣߣ߽ߦ㧘ᱡߺ᷹ቯⵝ⟎ࠍ⚵ߺㄟࠎߛ⭯⤑↪ᒁᒛ⹜㛎ⵝ⟎ߩᒁᒛ⩄㊀᷹ቯ↪ࡠ࡯࠼࠮࡞ߩ⩄㊀ାภࠍหᦼ⊛ߦห↹௝ಣℂᑼ᷹ቯⵝ⟎ߦ౉ജߐߖࠆ㧚ߘߩ⚿ᨐ㧘ห↹
௝ಣℂᑼ᷹ቯⵝ⟎ߪ↹௝࠺࡯࠲ࠍಣℂߒ㧘ಣℂ⚿ᨐࠍࡄ࡯࠰࠽࡞ࠦࡦࡇࡘ࡯࠲ߦ಴ജߒߡ㧘หࠦࡦࡇࡘ࡯࠲ߦ߅޿ߡ MEMS ᧚ᢱߩᔕജ㧙ᱡߺᦛ✢࠺࡯࠲߿ࡗࡦࠣ₸㧘ࡐࠕ࠰ࡦᲧࠍ⸘
▚㧘⴫␜ߒߡ⸥㍳଻ሽߔࠆߎߣ߇น⢻ߢ޽ࠆ㧚⭯⤑ᒁᒛ⹜㛎↪శቇᑼᱡߺ᷹ቯⵝ⟎ߩਥߥ઀᭽ߪએਅߩߣ߅ࠅߢ޽ࠆ㧚࡮ᱡߺ᷹ቯᣇᑼ        ⹜㛎 ਄ߩⶄᢙᮡὐߩ⋧ኻᄌ૏᷹ቯ㧔↹௝ಣℂ㧕               ᦨᄢ 4 ᮡὐߩ࡝ࠕ࡞࠲ࠗࡓ૏⟎⸘᷹߇น⢻               2 ᮡὐߩ⋧ኻᄌ૏᷹ቯψࡗࡦࠣ₸᷹ቯ↪
               4 ᮡὐߩ⋧ኻᄌ૏᷹ቯψࡐࠕ࠰ࡦᲧ᷹ቯ↪
࡮↹௝ಣℂᣇᑼ㧦       ਗ೉ဳታᤨ㑆↹௝ಣℂ࡮ᄙ୯ൻᯏ⢻㧦        1/4 ↹⚛⚦ಽߦࠃࠆ૏⟎᷹ቯ߇น⢻࡮㜞♖⚦↹௝࠮ࡦࠨ⸃௝ᐲ㧦  2048 ↹⚛2048 ↹⚛
࡮㜞♖⚦↹௝࠮ࡦࠨ↹⚛ኸᴺ㧦 12 m12 m࡮㜞♖⚦↹௝࠮ࡦࠨฃశ㕙Ⓧ㧦 24.576 mm24.576 mm
࡮᷹ቯㅦᐲ㧦         4 ࿁㧛⑽࡮หᦼ౉ജᯏ⢻㧦       ᱡߺ㧘⩄㊀᷹ቯ୯ߩหᦼ౉ജᯏ⢻ࠍ᦭ߔࠆ࡮࠰ࡈ࠻࠙ࠚࠕᯏ⢻㧦     ᔕജ㧙ᱡߺᦛ✢ߩ⸘▚㧘ࠣ࡜ࡈ⴫␜㧘⸥㍳଻ሽ߇น⢻ࡗࡦࠣ₸㧘ࡐࠕ࠰ࡦᲧߩ⸘▚㧘⸥㍳଻ሽ߇น⢻࠮ࡦࠨ㚟േㇱ
↹௝࠮ࡦࠨ߳
ࡕ࠾࠲߳

↹௝౉ജㇱ

↹௝಴ജㇱ

            

↹௝ಣℂㇱ
ࡄ࠰ࠦࡦ߳

↹⚛⚦ಽㇱ

⩄㊀౉ജㇱ

            ⸘᷹ㇱࡠ࡯࠼࠮࡞߳

࿑ 3-5-22 ↹௝ಣℂᑼ᷹ቯⵝ⟎ߩౝㇱᯏ⢻ࡉࡠ࠶ࠢ✢࿑㐿⊒ߒߚశቇᑼ㧔↹௝ಣℂᣇᑼ㧕ߩᱡߺ᷹ቯⵝ⟎㧔ᓸዊᄌᒻ⹏ଔⵝ⟎㧕ߦ߅޿ߡ㧘࡝ࡦη- 33ࠣᾖ᣿ᣇᑼߩశቇ♽ߢߪ⹜㛎਄ߦ⵾૞ߒߚᮡὐߩ↹௝ࠍ㞲᣿ߦ᠟௝ߔࠆߎߣ߇ߢ߈ߥ߆

ߞߚߚ߼㧘หⵝ⟎ߩᾖ᣿ࠍหゲ⪭኿ᣇᑼߦᡷㅧߒߚ㧚MEMS ࡈࠔࡦ࠼࡝࡯㧝␠ߢ⵾૞ߒߚ
ࡐ࡝ࠪ࡝ࠦࡦ⭯⤑⹜㛎ߩᮡὐ↹௝ࠍ᠟௝ߒߚ⚿ᨐ㧘ᮡὐࠍ㞲᣿ߦ᠟௝ߒ㧘⹜㛎ࠍ㜞♖ᐲߢ᷹ቯߔࠆߎߣ߇น⢻ߣߥߞߚ㧚߹ߚ㧘⭯⤑⹜㛎ߩᱡߺߩ෻ࠅ㄰ࠅ߇ᄢ߈޿႐วߦߪ

㕒㔚࠴ࡖ࠶ࠢߦࠃࠆ଻ᜬ߇ਇ቟ቯߢ޽ߞߚߚ߼㧘ૐᔕജ᧦ઙߢᚑ⤑ߒߚࡐ࡝ࠪ࡝ࠦࡦ⭯⤑ࠍ↪޿ߡ⹜㛎

㧔ࡗࡦࠣ₸᷹ቯ↪㧝⒳㘃㧘ࡐࠕ࠰ࡦᲧ᷹ቯ↪㧞⒳㘃㧘ෘߐ 300nm㧕ࠍ⵾૞ߒߚ㧚એ਄ߩᡷ⦟ࠍⴕ޿㧘IEC ߩ⭯⤑ᒁᒛ⹜㛎ᴺ࿖㓙ⷙᩰ‫ޟ‬Tensile testing methods of thinfilm materials‫ߦޠ‬ၮߠ߈㧘ࡐ࡝ࠪ࡝ࠦࡦ⭯⤑⹜㛎 ߩᒁᒛ⹜㛎ࠍⴕߞߚ㧚ԙ ࠼࡜ࠗࠛ࠶࠴ࡦࠣࡊࡠ࠮ࠬ
㧟ࡩᚲߩ࿖ౝ MEMS ࡈࠔࡦ࠼࡝࡯ߢࠛ࠶࠴ࡦࠣ⹜૞ࠍⴕߞߚ⹜૞࠙ࠚࡂߦߟ޿ߡ㧘ࠛ࠶࠴ࡦࠣ࡟࡯࠻㧘஥ოⷺᐲ㧘ࡑࠬࠢㆬᛯᲧ㧘⴫㕙☻ߐߩ᷹ቯࠍⴕ޿㧘࠺࡯࠲ࡌ࡯ࠬൻߒߚ㧚ߎࠇߦട߃㧘↥ᬺᛛⴚ✚ว⎇ⓥᚲ଻᦭ߩ࠼࡜ࠗࠛ࠶࠴ࡦࠣ㧔DRIE㧕ⵝ⟎ߦࠃࠅ㧘㕖ᮡḰ᧦ઙࠍ฽߻ⶄᢙߩ࡟ࠪࡇߢࠛ࠶࠴ࡦࠣࠍⴕ޿㧘࡟ࠪࡇߦࠃࠆࠛ࠶࠴ࡦࠣ․ᕈߩ㆑޿ߩ࠺࡯࠲
ࠍขᓧߒߚ㧚߹ߚ㧘ᷓၳߢߥ޿ RIE ⵝ⟎ߦߟ޿ߡ߽࡟ࠪࡇࠍᄌ߃ߚߣ߈ߩࠛ࠶࠴ࡦࠣ․ᕈ
ߩ㆑޿ߦߟ޿ߡᄙᢙߩ᷹ቯࠍⴕ޿㧘࠼࡜ࠗࠛ࠶࠴ࡦࠣࠪࡒࡘ࡟࡯࠲ߩၮ␆࠺࡯࠲ߣߒߚ㧚ࠛ࠶࠴ࡦࠣ࡟࡯࠻ߣ஥ოⷺᐲߦߟ޿ߡߪ㧘శቇ⊛㧟ᰴరᒻ⁁᷹ቯེࠍ೑↪ߒߡടᎿᒻ⁁ࠍ᷹ቯߒߚ㧚ࡑࠬࠢ⤑ෘߩᷫࠅߦߟ޿ߡߪ㧘శቇ⊛㧟ᰴరᒻ⁁᷹ቯེ෸߮஍శ⸃ᨆဳ⤑ෘ᷹ቯེࠍ೑↪ߒߡ⤑ෘࠍ᷹ቯߒߚ㧚࡮ DRIE ․ᕈߩ᷹ቯ
3 ▎ᚲߩࡈࠔࡦ࠼࡝࡯߳⹜૞ଐ㗬ߒߚ 2 ⒳㘃ߩࠨࡦࡊ࡞(ᾲ㉄ൻ⤑ࡑࠬࠢ෸߮ࡐࠫဳࡈࠜ
࠻࡟ࠫࠬ࠻ࡑࠬࠢ)ߦߟ޿ߡ࠺࡯࠲ขᓧࠍⴕߞߚ㧚߹ߚ㧘↥✚⎇ߢ଻᦭ߔࠆ DRIE ⵝ⟎ࠍ૶↪ߒ㧘㕖ᮡḰ᧦ઙࠍ฽߻㧞⒳㘃ߩࠛ࠶࠴ࡦࠣ࡟ࠪࡇ㧔࡟ࠪࡇ 1㧘࡟ࠪࡇ 2㧕ߢࠛ࠶࠴ࡦࠣ࠺
࡯࠲ߩ᷹ቯࠍⴕߞߚ㧚η- 34䉣䉾䉼䊮䉫䊧䊷䊃㩿㱘㫄㪆㫄㫀㫅䋩

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࿑ 3-5-23 㐿ญ᏷ߦኻߔࠆࠛ࠶࠴ࡦࠣ࡟࡯࠻᷹ቯ⚿ᨐ㧔ࡈࠜ࠻࡟ࠫࠬ࠻ࡑࠬࠢ㧕㪐㪉㪐㪈஥ოⷺᐲ㩿ᐲ㪀

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࿑ 3-5-24 㐿ญ᏷ߦኻߔࠆ஥ოⷺᐲ᷹ቯ⚿ᨐ㧔ࡈࠜ࠻࡟ࠫࠬ࠻ࡑࠬࠢ㧕

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䊧䉳䉴䊃䊙䉴䉪ㆬᛯᲧ

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࿑ 3-5-25 㐿ญ᏷ߦኻߔࠆࡑࠬࠢㆬᛯᲧ᷹ቯ⚿ᨐ㧔ࡈࠜ࠻࡟ࠫࠬ࠻ࡑࠬࠢ㧕㐿ญ᏷ߦኻߔࠆࠛ࠶࠴ࡦࠣ࡟࡯࠻᷹ቯ⚿ᨐߩ߁ߜࡈࠜ࠻࡟ࠫࠬ࠻⤑ࡑࠬࠢࠍ↪޿ߚ႐วߩ⚿ᨐࠍ␜ߔ㧚࠺࡯࠲ߪ㧘࠙ࠚࡂౝ 5 ὐࡠ࠶࠻ౝ 3 ᨎ㧩15 ὐߩᐔဋࠍขߞߚ߽ߩߢ޽ࠅ㧘߫ࠄߟ߈ࠍ␜ߔᮡḰ஍Ꮕ࠺࡯࠲߽หᤨߦᓧࠆߎߣ߇ߢ߈ߚ㧚࿑ 3-5-23 ߦࠛ࠶࠴ࡦࠣ࡟࡯࠻㧘
࿑ 3-5-24 ߦ஥ოⷺᐲ㧘࿑ 3-5-25 ߦࡑࠬࠢㆬᛯᲧߩ᷹ቯ⚿ᨐࠍ␜ߔ㧚ߎࠇࠄߩ࿑ࠃࠅ㧘ࡈࠔࡦ࠼࡝࡯⹜૞߅ࠃ߮↥✚⎇࡟ࠪࡇߦࠃࠆ⹜૞ߢߪ޿ߕࠇ߽㧘ᄢ߹߆ߥ௑ะߪ㘃ૃߒߡ޿ࠆ߽ߩߩ㧘஥ოⷺᐲ߿ࡑࠬࠢㆬᛯᲧߢߪ߆ߥࠅ㆑ߞߚ․ᕈ߇ᓧࠄࠇ
ߡ޿ࠆ႐ว߽޽ࠆߎߣ߇ࠊ߆ߞߚ㧚એ਄ߩ᷹ቯ࠺࡯࠲ߪ᧚ᢱ࡮ࡊࡠ࠮ࠬ࠺࡯࠲ࡌ࡯ࠬߣߣ߽ߦ㧘⍮⼂࠺࡯࠲ࡌ࡯ࠬߦ߽⊓㍳
ߐࠇߚ㧚ߎࠇࠄߪ MEMS ߩ⸳⸘ࠍⴕ߁߁߃ߢ㊀ⷐߥࡄ࡜ࡔ࡯࠲ߢ޽ࠅ㧘⹜૞࡮᷹ቯ⚿ᨐߩ଀߇࠺࡯࠲ࡌ࡯ࠬൻߐࠇ㧘࡟ࠪࡇߦࠃߞߡᄌࠊࠅ߁ࠆߎߣ߇␜ߐࠇࠆߎߣߢ㧘⸳⸘⠪ߦߣߞߡᭂ߼ߡଔ୯ߩ㜞޿ᖱႎߣߥࠆߣ⠨߃ࠄࠇࠆ㧚

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RIE ߦ߅ߌࠆࡊࡠ࠮ࠬࡄ࡜ࡔ࡯࠲ଐሽᕈߩ᷹ቯ

࿑ 3-5-26 RIE ࡊࡠࡈࠔࠗ࡞ᢿ㕙౮⌀
MemsONE ߦ៞タߐࠇࠆ࠼࡜ࠗࠛ࠶࠴ࡦࠣࠪࡒࡘ࡟࡯࠲ะߌߦ㧘RIE ⵝ⟎ߩࡊࡠ࠮ࠬࡄ
࡜ࡔ࡯࠲ࠍᄌൻߐߖߚߣ߈ߩᒻ⁁ࡊࡠࡈࠔࠗ࡞ߩᄌൻࠍ␜ߔߚ߼㧘↥ᬺᛛⴚ✚ว⎇ⓥᚲ଻
᦭ߩ RIE ⵝ⟎ߢ᭽‫⹜ߩߢ࠲࡯ࡔ࡜ࡄߥޘ‬૞ࠍⴕ޿㧘ᒻ⁁ࠍ᷹ቯߒߚ㧚ᢿ㕙ᒻ⁁ߪ࿑ 3-5-26
ߩࠃ߁ߦߥࠅ㧘DRIE ߦᲧߴࠆߣᲧセ⊛ᄢ߈ߥࠕࡦ࠳࡯ࠞ࠶࠻߇޽ࠆ㧚ߎߩᢿ㕙ᒻ⁁ߦߟ޿ߡ㧘ᷓߐ㧘਄ㇱ᏷㧘ᐩㇱ᏷ࠍ᷹ቯߒߚ㧚ࠛ࠶࠴ࡦࠣ᧦ઙߣߒߡ㧘ࡊࡠ࠮ࠬࠟࠬ㧔SF6㧕ᵹ㊂ࠍ 20, 50, 100sccm ߩ㧟᧦ઙ㧘RF ࡄࡢ࡯ࠍ 25, 50, 100, 150 W ߩ㧠᧦ઙ㧘࠴ࡖࡦࡃ࿶ജࠍ
5, 15, 25 Pa ߩ㧟᧦ઙߣᄌ߃㧘ว⸘ 22 ᧦ઙߢߩ⹜૞࡮᷹ቯࠍⴕߞߚ㧚᷹ቯߒߚ࠺࡯࠲ߪ㧘࠼࡜ࠗࠛ࠶࠴ࡦࠣࠪࡒࡘ࡟࡯࠲ࠍ᭴▽ߔࠆߺߕ߶ᖱႎ✚⎇ߦឭଏߐࠇߚ㧚ߎࠇߦࠃࠅ㧘࡙࡯ࠩߪࠪࡒࡘ࡟࡯࠲਄ߢ㧘࡜ࠫࠞ࡞࡮ࠗࠝࡦ╬ߩ‛ℂࡄ࡜ࡔ࡯࠲ࠍ
⥄േ⊛ߦ⸳ቯߢ߈ࠆࠃ߁ߦߥࠆ㧚Ԛ ࠙ࠚ࠶࠻ࠛ࠶࠴ࡦࠣࡊࡠ࠮ࠬ
࿖ౝ MEMS ࡈࠔࡦ࠼࡝࡯ߢࠛ࠶࠴ࡦࠣ⹜૞ࠍⴕߞߚ⹜૞࠙ࠚࡂߦߟ޿ߡ㧘(100)㕙ߩࠛ࠶࠴ࡦࠣ࡟࡯࠻㧘<110>ᣇะ߳ߩࠨࠗ࠼ࠛ࠶࠴ࡦࠣ࡟࡯࠻߅ࠃ߮ࡑࠬࠢㆬᛯᲧߩ᷹ቯࠍⴕߞ
ߚ㧚߹ߚ㧘ࠛ࠶࠴ࡦࠣᐩ㕙ߩ⴫㕙☻ߐߦߟ޿ߡ߽᷹ቯࠍⴕߞߚ㧚
3 ▎ᚲߩࡈࠔࡦ࠼࡝࡯߳⹜૞ଐ㗬ߒߚ㧠⒳㘃ߩࠨࡦࡊ࡞(ࡑࠬࠢ᧚ᢱߣߒߡ㉄ൻ⤑෸߮⓸ൻ⤑㧘ࠛ࠶࠴ࡦࠣᶧߣߒߡ KOH ߣ TMAH)ߩోߡߩ࠺࡯࠲ࠍขᓧߒߚ㧚࿑ 3-5-27 ߦ(100)㕙ߦኻߔࠆࠛ࠶࠴ࡦࠣ࡟࡯࠻᷹ቯ⚿ᨐࠍ␜ߔ㧚࠺࡯࠲ߪ㧘࠙ࠚࡂౝ 5 ὐࡠ࠶࠻ౝ 3 ᨎ㧩
15 ὐߩᐔဋࠍขߞߚ߽ߩߢ޽ࠅ㧘߫ࠄߟ߈ࠍ␜ߔᮡḰ஍Ꮕ࠺࡯࠲߽หᤨߦᓧࠆߎߣ߇ߢ߈
ߚ㧚หߓࠛ࠶࠴ࡦࠣᶧߢ߽ฦࡈࠔࡦ࠼࡝࡯ߦࠃߞߡࠛ࠶࠴ࡦࠣ࡟࡯࠻ߪᄢ߈ߊ⇣ߥࠅ㧘ࠛ࠶࠴ࡦࠣᶧߩ᷷ᐲ߿Ớᐲߩ᧦ઙ߇ᄢ߈ߊ㆑߁ߎߣ߇ផ᷹ߐࠇࠆ㧚

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䊧䊷䊃䋨㱘㫄㪆㫄㫀㫅䋩䊧䊷䊃䋨㱘㫄㪆㫄㫀㫅䋩

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㪚␠㪪㫀㪥㪘␠㪪㫀㪦㪉

㪢㪦㪟㪑㩷㩿㪈㪇㪇㪀㕙䉣䉾䉼䊮 䉫䊧䊷䊃㪘␠㪪㫀㪥㪙␠㪪㫀㪦㪉

㪙␠㪪㫀㪥㪫㪤㪘㪟㪑㩷㩿㪈㪇㪇㪀㕙䉣䉾䉼䊮 䉫䊧䊷䊃

࿑ 3-5-27 ࠙ࠛ࠶࠻ࠛ࠶࠴ࡦࠣ(100)㕙ࠛ࠶࠴ࡦࠣ࡟࡯࠻᷹ቯ⚿ᨐ
࿑ 3-5-28 ߦ(100)㕙ߦ߅޿ߡ㧘<110>ᣇะߦ⊒↢ߔࠆࠨࠗ࠼ࠛ࠶࠴ࡦࠣ࡟࡯࠻ߩ᷹ቯ⚿ᨐࠍ␜ߔ㧚ࠨࠗ࠼ࠛ࠶࠴ࡦࠣ࡟࡯࠻ߪ㧘(100)㕙ࠛ࠶࠴ࡦࠣ࡟࡯࠻ߦኻߔࠆᲧߣߒߡ␜ߒߡ޿
ࠆ㧚
࿑ 3-5-29 ߦࡑࠬࠢ⤑ෘߩᷫዋࠍ᷹ቯߒߚ⚿ᨐ߆ࠄ឵▚ߒߚࡑࠬࠢㆬᛯᲧߩ᷹ቯ⚿ᨐࠍ␜ߔ㧚࿑ 3-5-29 ߦߪࡑࠬࠢ⤑߇ SiO2㧘ࠛ࠶࠴ࡦࠣᶧ߇ KOH ߩ⚵วߖߩߺࠍ␜ߒߚ㧚ߎࠇࠍ㒰޿ߡߪࡑࠬࠢ⤑ෘߩᷫዋߪ᷹ቯ㒢⇇એਅߢ㧘੹࿁ߩ⹜૞ߩࠃ߁ߥᵻ޿ࠛ࠶࠴ࡦࠣߦ߅ߌ
ࠆ⤑ෘᷫዋߪήⷞߢ߈ࠆߎߣ߇ࠊ߆ࠆ㧚ࡈࠔࡦ࠼࡝࡯ߦࠃߞߡࡑࠬࠢㆬᛯᲧߪᗧᄖߥ߶ߤ
ᄢ߈ߊ⇣ߥߞߡ߅ࠅ㧘ߎࠇ߇ࠛ࠶࠴ࡦࠣ᧦ઙߩ㆑޿ߦࠃࠆ߽ߩ߆㧘ࡑࠬࠢ⤑ߩ⾰ߩ㆑޿ߦࠃࠆ߽ߩ߆ߪ್ᢿߔࠆߎߣ߇ߢ߈ߥ߆ߞߚ߇㧘ࡈࠔࡦ࠼࡝࡯ߦࠃߞߡ㆑ߞߚ⚿ᨐ߇಴ࠆߎ
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㪙␠㪪㫀㪥㪚␠㪪㫀㪦㪉

㪚␠㪪㫀㪥㪢㪦㪟㪑㩷㪓㪈㪈㪇㪕ᣇะ䉰䉟 䊄䉣䉾䉼䊮 䉫䊧䊷䊃Ყ㪘␠㪪㫀㪦㪉

㪘␠㪪㫀㪥㪙␠㪪㫀㪦㪉

㪙␠㪪㫀㪥㪚␠㪪㫀㪦㪉

㪫㪤㪘㪟㪑㩷㪓㪈㪈㪇㪕ᣇะ䉰䉟 䊄䉣䉾䉼䊮 䉫䊧䊷䊃Ყ

࿑ 3-5-28 ࠙ࠛ࠶࠻ࠛ࠶࠴ࡦࠣ(100)㕙<110>ᣇะࠨࠗ࠼ࠛ࠶࠴ࡦࠣ࡟࡯࠻᷹ቯ⚿ᨐ

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㪋㪇㪇
㪊㪌㪇
䊧䊷䊃Ყ

㪊㪇㪇
㪉㪌㪇
㪉㪇㪇
㪈㪊㪌

㪈㪌㪇
㪈㪇㪇

㪍㪍

㪌㪇
㪇
㪘␠㪪㫀㪦㪉

㪙␠㪪㫀㪦㪉

㪚␠㪪㫀㪦㪉

㪢㪦㪟㪑㩷ኻ㪪㫀㪦㪉䊙䉴䉪ㆬᛯᲧ

࿑ 3-5-29 ࠙ࠛ࠶࠻ࠛ࠶࠴ࡦࠣ(100)㕙ߦኻߔࠆࡑࠬࠢㆬᛯᲧ᷹ቯ⚿ᨐ

㪉㪌

㪈㪇㪇
㪐㪇

㪉㪈
㪈㪐

㪉㪇

㪏㪍
㪎㪏

㪏㪇

㪈㪌

㪩㪸㩷㩿㫅㫄㪀

㪩㪸㩷㩿㫅㫄㪀

㪎㪇
㪍㪇
㪌㪇
㪋㪇

㪈㪇

㪊㪇
㪌

㪉㪇

㪊
㪈

㪈

㪉

㪈㪇

㪊

㪈

㪈

㪈

㪙␠㪪㫀㪦㪉

㪙␠㪪㫀㪥㪚␠㪪㫀㪦㪉㪚␠㪪㫀㪥㪇㪇㪘␠㪪㫀㪦㪉

㪘␠㪪㫀㪥㪙␠㪪㫀㪦㪉

㪙␠㪪㫀㪥㪚␠㪪㫀㪦㪉

㪚␠㪪㫀㪥㪢㪦㪟㪑㩷䉣䉾䉼䊮 䉫ᐩ㕙☻䈘㩷㪩㪸㪘␠㪪㫀㪦㪉

㪘␠㪪㫀㪥㪫㪤㪘㪟㪑㩷䉣䉾䉼䊮 䉫ᐩ㕙☻䈘㩷㪩㪸

࿑ 3-5-30 ࠙ࠛ࠶࠻ࠛ࠶࠴ࡦࠣ(100)㕙⴫㕙☻ߐߩ᷹ቯ⚿ᨐ
࿑ 3-5-30 ߦ㧘ࠛ࠶࠴ࡦࠣᐩ㕙ߩ㕙☻ߐ᷹ቯ⚿ᨐࠍ␜ߔ㧚ࠛ࠶࠴ࡖࡦ࠻߇ KOH ߩ႐วߪ㧘C ␠ߩߺᵄᛂߞߚࠃ߁ߥ⴫㕙ᒻ⁁ߢ޽ࠅ⴫㕙☻ߐ߇ᄢ߈߆ߞߚ㧚TMAH ߩ႐วߦߪ㧘A ␠ߩߺࡇ࡜ࡒ࠶࠼⁁⓭⿠߇ᱷࠅ㧘ᄢ߈ߥ⴫㕙☻ߐߣߥߞߚ㧚ߎࠇࠄߪࠛ࠶࠴ࡦࠣ᧦ઙߦ⿠࿃
ߔࠆߎߣߪ㑆㆑޿ߥ޿߇㧘ฦ␠ߩ᧦ઙߪ㐿␜ߐࠇߡ޿ߥ޿ߚ߼᣿⏕ߥߎߣߪࠊ߆ࠄߥ޿㧚એ਄ߩࠃ߁ߦ㧘࠼࡜ࠗࠛ࠶࠴ࡦࠣߩ႐วߣห᭽㧘ฦࡈࠔࡦ࠼࡝࡯ߩࠛ࠶࠴ࡦࠣ⚿ᨐߦߪ㆑޿߇⷗ࠄࠇ㧘⹜૞ࠍ⊒ᵈߔࠆ࡙࡯ࠩߩ┙႐߆ࠄߪ⥝๧ᷓ޿⚿ᨐߣߥߞߚ㧚ࠛ࠶࠴ࡦࠣ᧦
ઙߦࠃࠅ⹜૞⚿ᨐߪᄌൻߔࠆߚ߼㧘ߎߩࠃ߁ߥ᧦ઙߩ㆑޿ࠍ MEMS ᛛⴚ⠪ߦℂ⸃ߒߡ߽ࠄ
߁਄ߢ߽㧘ߎࠇࠄߩ࠺࡯࠲ߪଔ୯ߩ㜞޿߽ߩߢ޽ࠆߣ⠨߃ࠄࠇࠆ㧚߹ߚ㧘ታ㓙ߩࡈࠔࡦ࠼࡝࡯ߢⴕߞߚ⹜૞⚿ᨐߢ޽ࠅ㧘߫ࠄߟ߈ߥߤߩ࠺࡯࠲߽฽߹ࠇߡ
޿ࠆߚ߼㧘ߎࠇࠄߩ⹜૞࡮᷹ቯ⚿ᨐߩ଀߇࠺࡯࠲ࡌ࡯ࠬൻߐࠇࠆߎߣߦࠃࠅ㧘⸳⸘⠪ߦߣߞߡᭂ߼ߡଔ୯ߩ㜞޿ᖱႎߣߥࠆߣ⠨߃ࠄࠇࠆ㧚η- 39

 ᚑᨐߩᗧ⟵ᚑ⤑᧚ᢱߩᯏ᪾⊛․ᕈߩㄦㅦ᷹ቯ߅ࠃ߮ᱷ⇐ᔕജߩ᷹ቯߢߪ㧘⸘↹ߐࠇߚߔߴߡߩ⤑᧚ᢱߦߟ޿ߡࡗࡦࠣ₸෸߮ᱷ⇐ᔕജߩ࠺࡯࠲ࠍขᓧ࡮⫾Ⓧߒߚ㧚ߎࠇߦࠃࠅ㧘⸃ᨆࠪࠬ࠹ࡓ↪
ߩ࠺࡯࠲ࡌ࡯ࠬߩ᭴▽ࠍቢੌߒߚ㧚߹ߚ㧘᭴▽ߐࠇߚ࠺࡯࠲ࡌ࡯ࠬߪ⸃ᨆᡰេࠪࠬ࠹ࡓ࠰
ࡈ࠻࠙ࠚࠕߦ෼㍳ߐࠇߚ㧚ᚑ⤑᧚ᢱߩᯏ᪾⊛․ᕈ෸߮ᱷ⇐ᔕജ࠺࡯࠲ߩឭଏߦࠃࠅࠪࡒࡘ
࡟࡯࡚ࠪࡦ࠰ࡈ࠻ߩ⸃ᨆ♖ᐲ߇ะ਄ߒ㧘MEMS 㐿⊒ߩല₸ൻ࡮⍴ᤨ㑆ൻ߇น⢻ߣߥࠆ߽ߩ
ߣᦼᓙߐࠇࠆ㧚ࠛ࠶࠴ࡦࠣ࠺࡯࠲ߩขᓧߦ߅޿ߡߪ㧘ታ㓙ߦ࿖ౝࡈࠔࡦ࠼࡝࡯ߢ⹜૞ߒߚ࠼࡜ࠗࠛ࠶࠴
ࡦࠣ㧘࠙ࠛ࠶࠻ࠛ࠶࠴ࡦࠣߩ⚿ᨐ߿㧘ߘߩ࡟ࠪࡇଐሽᕈࠍ࠺࡯࠲ࡌ࡯ࠬൻߔࠆߎߣ߇ߢ߈
ߚ㧚ߎࠇߦࠃࠅ㧘MEMS ⸳⸘⠪߇ࡈࠔࡦ࠼࡝࡯ࠍ೑↪ߔࠆ㓙ߦ㧘႐วࠃߞߡߪᔅߕߒ߽ℂᗐ⊛ߥࠛ࠶࠴ࡦࠣᒻ⁁߇ᓧࠄࠇߥ޿ߎߣ㧘ߘߒߡ᧦ઙ࡮࡟ࠪࡇଐሽᕈߩ㊀ⷐᕈࠍℂ⸃ߔࠆߎߣ߇ኈᤃߦߥࠅ㧘⃻ታߩ⹜૞ߣ⸳⸘ߣߩ᠁ࠅวࠊߖ߇ኈᤃߦߥࠆߎߣߢ MEMS 㐿⊒ߩല₸ൻ߇น⢻ߦߥࠆߣߣ߽ߦ㧘⵾ㅧᆔ⸤ߩჇടߦ߽ߟߥ߇ࠆߣ⠨߃ࠄࠇࠆ㧚 એ਄ߦട߃‫ޔ‬ᢥ₂⺞ᩏߥߤߦࠃࠅ‫ޔ‬ฦ⒳ߩ᧚ᢱ‛ᕈ࠺࡯࠲෸߮ࡊࡠ࠮ࠬ࠺࡯࠲ࠍ෼㓸ߒ‫ޔ‬᧚ᢱ࡮ࡊࡠ࠮ࠬ࠺࡯࠲ࡌ࡯ࠬߦ෼㍳ߒߚ㧚ߎࠇࠄߩ࠺࡯࠲ߪ‫⸃ޔ‬ᨆ࠰ࡈ࠻ߩ૶↪⠪‫ߦ․ޔ‬ߎࠇ߹ߢ૛ࠅ⚻㛎ߩߥ޿ೋᔃ⠪ߦࠃࠆ࠰ࡈ࠻ߩ૶↪ࠍኈᤃߦߒ‫ޔ‬MEMS ⎇ⓥੱ᧚ߩ⢒ᚑߣ↥ᬺߩ⵿㊁ߩ᜛ᄢߦᄢ߈ߊ⽸₂ߔࠆ߽ߩߣᦼᓙߐࠇࠆ㧚⸘᷹࡮⵬㑆ᚻᴺߩ⏕┙  ⎇ⓥ㐿⊒ߩ᭎ⷐࡑࠗࠢࡠᒢᕈᄌᒻ᪞ߩା㗬ᕈߪMEMS࠺ࡃࠗࠬߩ㐳ᦼേ૞ା㗬ᕈࠍ⏕଻ߔࠆ਄ߢ㊀ⷐߥ᧚
ᢱ․ᕈߢ޽ࠆ㧚ߒ߆ߒ㧘MEMSߢߪ⴫㕙☻ߐߥߤടᎿᣇᴺߩᓇ㗀߇ᄢ߈ߊ㧘߹ߚ᷹ቯ߽࿎㔍ߥߚ߼ߦචಽߥ᷹ቯ࠺࡯࠲߇ᓧࠄࠇߡ޿ߥ޿㧚ߘߩߚ߼㧘㜞޿ടᎿ♖ᐲࠍᜬߜ㧘ࠕࠢ࠴ࡘࠛ࡯࠲ࠍ⚵ߺㄟࠎߛ⹜㛎ࠍ⵾૞ߔࠆߣߣ߽ߦ㧘ߘࠇࠄࠍਗ೉ߢ⹜㛎ߔࠆᚻᴺࠍ㐿⊒ߒߚ㧚นേធὐߩା㗬ᕈ੍᷹ᚻᴺߩ㐿⊒ߢߪ‫ޔ‬ធ⸅ߩ⹏ଔߦᐔⴕ߫ߨࠞࡦ࠴࡟ࡃ࡯ࠍ↪޿ࠆߣ㧘వ┵ㇱߩⷺᐲᄌൻ߇න৻߫ߨߦᲧセߒߡ1/20ߦ᛼ߐ߃ࠄࠇ㧘቟ቯߒߚ➅ࠅ㄰ߒធ⸅ࠍⴕ߁
ߎߣ߇ߢ߈ࠆ㧚ߘߩࠃ߁ߥࠞࡦ࠴࡟ࡃ࡯ࠍല₸⦟ߊ૞⵾ߔࠆߚ߼ߦ㧘ෘ᧼ߩࠞࡦ࠴࡟ࡃ࡯
ࠍరߦߒߡ㧘㓸᧤ࠗࠝࡦࡆ࡯ࡓ㧔FIB㧕ടᎿߣDRIEߩ⚵ߺวࠊߖߦࠃࠅᐔⴕ߫ߨ᭴ㅧࠍ૞
⵾ߔࠆᣇᴺࠍ㐿⊒ߒ‫ޔ‬ធ⸅㕙Ⓧ߿ⅣႺ߇ធ⸅⁁ᘒߦਈ߃ࠆᓇ㗀ࠍ᣿ࠄ߆ߦߒߚ‫ޕ‬  ᚑᨐߩ⹦⚦Ԙ ᒢᕈᄌᒻ᪞ߩା㗬ᕈ੍᷹ᚻᴺߩ㐿⊒
࿑3-5-31ߦᧄ⎇ⓥߢ㐿⊒ߒߚ∋ഭ⹜㛎࠺ࡃࠗࠬߩ㔚ሶ㗼ᓸ㏜౮⌀ࠍ␜ߔ㧚ᚸᒻߩ㕒㔚ࠕࠢ࠴ࡘࠛ࡯࠲ߦࠃࠅᡰὐㇱಽߩ⹜㛎 ߦ➅㄰ߒᦛߍᔕജࠍශടߔࠆߎߣ߇ߢ߈ࠆ㧚⹜㛎 ㇱಽߪ࿖ౝࡈࠔࡦ࠼࡝࡯ߩ㜞♖ᐲߥ࡝࠰ࠣ࡜ࡈࠖ࡯߅ࠃ߮ࠛ࠶࠴ࡦࠣടᎿߢ⵾૞ߐࠇ㧘߫ࠄߟ߈߇

η- 40ᭂജ↢ߓߦߊ޿ࠃ߁ߦ⠨ᘦߐࠇߡ޿ࠆ㧚߹ߚ㧘ਗ೉ߢ∋ഭ⹜㛎࡮࠺࡯࠲෼㓸ࠍⴕ߁ߚ߼ߦ㧘ࠦࡦࡇࡘ࡯࠲ߢ೙ᓮߐࠇߚ⊒ᝄ೙ᓮ࿁〝ࠍ૞⵾ߒߚ㧚࿑3-5-32ߪਗ೉⹜㛎࠰ࡈ࠻࠙ࠚࠕߩ࡙࡯ࠩࠗࡦ࠲࡯ࡈࠚ࡯ࠬ↹㕙ߢ޽ࠅ㧘
ᦨᄢ8୘߹ߢߩ⊒ᝄ⁁ᘒࠍ⏕⹺ߒߥ߇ࠄ࠺࡯࠲ขᓧ߇ⴕ߃ࠆ㧚㐿⊒ߒߚࠪࠬ࠹ࡓࠍ↪޿ߡ㧘᷷ᐲ23͠Ḩᐲ50㧑RH߅ࠃ᷷߮ᐲ23͠Ḩᐲ25㧑RHߩ2⒳㘃ߩⅣႺ᧦ઙਅߢ∋ഭ⹜㛎ࠍⴕߞߚ㧚ฦ᧦ઙߢ㧘ᝄ᏷⸳ቯࠍᄌ߃ࠆߎߣߢ㧘⹜㛎ߦශടߐࠇࠆᱡ㧔ᔕജ㧕߇ᄌൻߐߖࠄࠇࠆ㧚ว⸘9᧦ઙ㧘36୘ߩ⹜㛎 ߢ∋ഭ⹜㛎ࠍⴕߞߚ⚿ᨐ㧘߁ߜ
34୘ߪ6.2105࿁㨪1.21010࿁ߩ➅㄰ߒߢㆃࠇ⎕უࠍ␜ߒ㧘ᱷࠅ2୘ߪ2.41010࿁㧔7ᣣ㑆㧕ߩ➅㄰ߒߢ߽⎕უߒߥ߆ߞߚ㧚ߎߩࠃ߁ߥ㜞޿➅ࠅ㄰ߒᢙߩ∋ഭ⹜㛎࠺࡯࠲߇⍴ᦼ㑆ߦᓧࠄࠇߚߎߣߢ㧘౒ᝄဳ⹜㛎࠺ࡃࠗࠬ㧘ਗ೉⹜㛎ߣ޿߁ࠦࡦ࠮ࡊ࠻ߩ᦭ലᕈ߇⸽᣿ߐࠇߚ㧚

࿑3-5-31 ࿖ౝࡈࠔࡦ࠼࡝࡯ߢ⹜૞ߒߚ∋ഭ⹜㛎࠺ࡃࠗࠬ

η- 41

࿑3-5-32 ਗ೉∋ഭ⹜㛎ࡊࡠࠣ࡜ࡓ↹㕙∋ഭ⎕უߒߚ⹜㛎⹜㛎ߩశቇ㗼ᓸ㏜౮⌀ࠍ࿑3-5-33ߦ␜ߔ㧚ߎߩࠃ߁ߦ㧘ోߡߩ∋ഭ⎕უߪߩࡁ࠶࠴ㇱಽ߆ࠄ⿠߈ߡ޿ࠆߎߣ߇⏕⹺ߢ߈ߚ㧚

࿑3-5-33 ∋ഭ⎕უߒߚ⹜㛎 ߩ㗼ᓸ㏜౮⌀

η- 42

Norm alized strain (arb. unit)

0.8

0.6

0.4

0.2

0 5
10

Fitted (N =19)
23 C 50%RH
23 C 25%RH
10

6

10

7

10

8

10

9

10

10

10

11

Fatigue life n (cycles)

࿑3-5-34 ∋ഭ⹜㛎߆ࠄᓧࠄࠇߚන⚿᥏ࠪ࡝ࠦࡦߩS-Nࠞ࡯ࡉ∋ഭ⎕უߩ⿠ߎࠆ∋ഭኼ๮ߣ㧘ශടᱡߩ㑐ଥࠍࡊࡠ࠶࠻ߒߚ߽ߩ߇࿑3-5-34ߢ޽ࠆ㧚࿑ࠃࠅ㧘ශടᔕജ߇ૐ޿߶ߤ㧘∋ഭኼ๮߇㐳ߊߥߞߡ޿ࠆ௑ะ߇ߪߞ߈ࠅߣ߁߆߇߃ࠆ㧚߹ߚ㧘Ḩᐲ25㧑RHߩ∋ഭኼ๮ߪ㧘Ḩᐲ50㧑RHߩߣ߈ࠃࠅ߽ᢙ୚㨪10୚ߣߥߞߡ߅ࠅ㧘Ḩᐲߩᓇ㗀ߢ∋ഭ߇ㅴⴕߔࠆߣ޿߁⺑ࠍⵣઃߌࠆ࠺࡯࠲ߣߥߞߚ㧚࿑3-5-34ߩ࠺࡯࠲ߪᓥ᧪ߩ∋ഭ⹜㛎⚿ᨐߦᲧߴࠆߣ㧘㕖Ᏹߦ࠺࡯࠲߫ࠄߟ߈߇ዊߐ޿⚿ᨐߣߥߞߡ޿ࠆ㧚ᓥ᧪ߪ∋ഭኼ๮߇2㨪
3ᩴߩ▸࿐ߢ߫ࠄߟ޿ߡ޿ߚ߇㧘੹࿁ᓧࠄࠇߚ࠺࡯࠲ߢߪ㧘߶߷1ᩴߩ߫ࠄߟ߈ߦ෼߹ߞߡ
޿ࠆ㧚ߎࠇߪ㧘࿖ౝࡈࠔࡦ࠼࡝࡯ߩ⸃௝ᐲߩ㜞޿㧔0.6Ǵm㧕⵾ㅧࡊࡠ࠮ࠬࠍ೑↪ߢ߈ߚലᨐ߇ᄢ߈޿ߣផ᷹ߒߡ޿ࠆ㧚Ḩᐲ50㧑RHߩ᷹ቯ⚿ᨐ߆ࠄ㧘Parisೣࠍ઒ቯߒߡࡈࠖ࠶࠹ࠖࡦࠣࠍⴕߞߚ⚿ᨐ߇㧘࿑3-5-34
ߩታ✢ߢ޽ࠆ㧚᷹ቯ⚿ᨐߪParisೣߦࠃߊਸ਼ࠅ㧘ࠢ࡜࠶ࠢㅴዷߴ߈ᢙߪN=19ߣ޿߁୯߇ᓧࠄࠇ
ߚ㧚ߎߩࠃ߁ߥ⏕ᐲ߇㜞޿⚿ᨐ߽㧘߫ࠄߟ߈߇ዋߥ޿࠺࡯࠲߇ᄙᢙขࠇߚߚ߼ߦᓧࠄࠇߚ߽
ߩߢ㧘㐿⊒ߒߚ∋ഭ⹜㛎࠺ࡃࠗࠬ߅ࠃ߮∋ഭ⹜㛎ⵝ⟎ߩ᦭ലᕈ߇⏕⹺ߢ߈ߚ㧚એ਄ߩ⚿ᨐߪ㧘MemsONEߩ⍮⼂࠺࡯࠲ࡌ࡯ࠬࠍਛᔃߦ෼㍳ߐࠇߚ㧚ԙ นേធὐߩା㗬ᕈ੍᷹ᚻᴺߩ㐿⊒࡮FIB ߣ DRIE ࠍ⚵ߺวࠊߖߚᐔⴕ߫ߨࠞࡦ࠴࡟ࡃ࡯ߩടᎿᴺ ࠞࡦ࠴࡟ࡃ࡯ߩ஥㕙߆ࠄࠬ࡝࠶࠻ࠍ⸳ߌࠆߚ߼㧘࠙ࠚࡂ߆ࠄಾࠅ㔌ߐࠇߚ⍱ᒻ⁁ߩࠞࡦ࠴࡟ࡃ࡯ࠍ㉄ൻἹߦ౉ࠇߡ㧘⴫㕙ߦ߹ߕ 0.3Ǵm ⒟ᐲߩᾲ㉄ൻ⤑ࠍᒻᚑߒߚ㧚ᰴߦ㧘FIB ⵝ⟎ߦ౉ࠇ㧘ࠬ࡝࠶࠻ࠍⓨߌࠆㇱಽߩ㉄ൻ⤑ࠍࠬࡄ࠶࠲࡝ࡦࠣߢ㒰෰ߒߚ㧚⚂ 300Ǵm17η- 43Ǵm ߩ▸࿐ߩ㉄ൻ⤑ࠍ㒰෰ߔࠆߩߦᔅⷐߥടᎿᤨ㑆ߪ⚂ 10 ಽߢ޽ߞߚ㧚ߎࠇߪ㧘ࠞࡦ࠴࡟ࡃ࡯ో૕ࠍ FIB ߢടᎿߔࠆߩߣᲧセߒߡ㧘1/100 ⒟ᐲߩടᎿᤨ㑆ߢ޽ࠆ㧚㉄ൻ⤑ࠍ㒰෰ߒߚࠞࡦ࠴࡟ࡃ࡯ߪ㧘ࠨࡐ࡯࠻࠙ࠚࡂ਄ߦࠪ࡝ࠦࡦࡉࡠ࠶ࠢࠍ⟎߈㧘ߘߩ஥㕙ߦ⾍ࠅઃߌߡ࿕ቯߒ㧘ICP-DRIE ടᎿࠍⴕߞߚ㧚ࠪ࡝ࠦࡦࡉࡠ࠶ࠢߩࠨࠗ࠭㧘ടᎿ᧦ઙࠍᬌ⸛ߔࠆߎߣ
ߢ㧘࿑ 3.5.2.2-5 ߦ␜ߔࠃ߁ߦ㧘ࠨࡐ࡯࠻࠙ࠚࡂߦኻߒߡ߶߷㋦⋥ߦടᎿࠍⴕ߁ߎߣ߇น⢻ߣߥࠅ㧘⍴ᤨ㑆ߢᐔⴕ߫ߨࠞࡦ࠴࡟ࡃ࡯ࠍ૞⵾ߔࠆߎߣ߇น⢻ߦߥߞߚ㧚100µm
࿑ 3-5-35 FIB ߣ DRIE ߢടᎿߒߚᐔⴕ߫ߨࠞࡦ࠴࡟ࡃ࡯ߩ SEM ௝࡮ធ⸅㕙Ⓧߣઃ⌕ജߩ㑐ଥ ធ⸅ὐߦ߅޿ߡ㧘ઃ⌕ജ߇Ⴧടߔࠆߣ㧘ᔅⷐߥߣ߈ߦធὐࠍ㔌ߔߎߣ߇ߢ߈ߥߊߥࠅ㧘ା㗬ᕈ߇ᄢ߈ߊૐਅߔࠆ㧚ߘߎߢ㧘⋧ኻ⊛ߥߔߴࠅ〒㔌ߣઃ⌕ജߩ㑐ଥࠍ߹ߕ⺞ߴߚ㧚⿛ᩏဳࡊࡠ࡯ࡉ㗼ᓸ㏜ࠍ೑↪ߒߡ㧘ធὐߦ⷗┙ߡߚ㊄ߩ⓭⿠ߩ਄ࠍᐔမߥࡊࡠ࡯ࡉࠍ᦭ߔࠆ
ࠞࡦ࠴࡟ࡃ࡯ߢ៺ᡂߒ㧘࠻࡯࠲࡞ߩ៺ᡂ〒㔌ߣ㧘ઃ⌕ജߩ㑐ଥࠍ⺞ߴߚ㧚ߘߩ⚿ᨐ㧘៺ᡂ〒㔌ߩჇടߦ઻޿ઃ⌕ജ߇Ⴧടߔࠆߎߣ㧘ᓸዊᝄ᏷ߢ៺ᡂߒߚߣ߈ߩ᛼ߒߟߌ⩄㊀߇㜞޿߶ߤ㧘៺ᡂ〒㔌ߦኻߔࠆઃ⌕ജߩჇടߩഀว߇ᄢ߈ߊߥࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚ߎߩߎߣ߆ࠄ㧘㐳ᤨ㑆ߩേ૞ࠍⴕߞߚߣ߈ߩนേធὐߩା㗬ᕈࠍ⛽ᜬߔࠆߚ߼ߦߪ㧘⋧ኻߔߴࠅ߇ߢ߈ࠆߛߌ⊒↢ߒߥ޿ᯏ᭴ࠍㆬᛯߔࠆߎߣ㧘⋧ኻߔߴࠅ߇↢ߓࠆᤨߦߪ㧘ᔅⷐએ਄ߦ᛼
ߒߟߌജࠍᄢ߈ߊߒߥ޿ߎߣ߇㊀ⷐߢ޽ࠆߎߣ߇␜ߐࠇߚ㧚

η- 44

࿑ 3-5-36 ᷹ቯ᷷ᐲߦࠃࠆઃ⌕ജߩᄌൻ࡮

ⅣႺߦࠃࠆઃ⌕ജߩᄌൻ ⿛ᩏဳࡊࡠ࡯ࡉ㗼ᓸ㏜ࠍ೑↪ߒߡⅣႺߦࠃࠆઃ⌕ജߩᄌൻࠍ⺞ߴߚ㧚᷹ቯⅣႺࠍ㧘⋧ኻḨᐲ 14%ߩ⓸⚛ਛ㧘ੇ῎⓸⚛ਛ㧘10-5Pa ߩ⌀ⓨਛߣᄌൻߐߖߡ㧘ᐔṖߥࠪ࡝ࠦࡦ㕙㑆ߦ૞↪ߔࠆઃ⌕ജࠍ᷹ቯߒߚߣߎࠈ㧘᷹ቯⅣႺߦࠃࠆઃ⌕ജߩᏅߪ߶ߣࠎߤ⏕⹺ߢ߈ߥ߆ߞ
ߚ㧚ߒ߆ߒ㧘ࠪ࡝ࠦࡦࠍടᾲߔࠆߣ࿑ 3-5-36 ߦ␜ߔࠃ߁ߦ᷷ᐲߣߣ߽ߦઃ⌕ജ߇ૐਅߔ
ࠆ௑ะ߇⹺߼ࠄࠇ㧘․ߦ 200͠એ਄ߢߪઃ⌕ജߪᄢ߈ߊᷫዋߒߚ㧚ߥ߅㧘৻ᐲઃ⌕ജ߇ૐਅߔࠆߣ㧘ቶ᷷ߦ߽ߤߒߡ߽৻ቯᤨ㑆ߪૐ޿ઃ⌕ജ߇⛽ᜬߐࠇࠆ௑ะ߇߁߆߇ࠊࠇߚ㧚(3) ᚑᨐߩᗧ⟵ࡑࠗࠢࡠ∋ഭ⹜㛎ߦߟ޿ߡߪ㧘MEMS ↪᧚ᢱߣߒߡᦨ߽ࠃߊ೑↪ߐࠇߡ޿ࠆࠪ࡝ࠦࡦߩ
∋ഭ․ᕈ߇᣿ࠄ߆ߣߥߞߚߎߣߢ㧘MEMS ⸳⸘ߦ߅޿ߡᦨ߽࿎㔍ߢᬌ⸽ߦᤨ㑆ߩ߆߆ࠆା
㗬ᕈߦ㑐ߔࠆ⸃ᨆ♖ᐲ߇ะ਄ߔࠆ㧚߹ߚ㧘นേធὐߩା㗬ᕈ੍᷹ᚻᴺߩ㐿⊒ߦߟ޿ߡߪ㧘ធὐ㕙ⓍჇടߦࠃࠆធὐା㗬ᕈߩૐਅ߇ᓸዊߥ⋧ኻṖࠅߦࠃߞߡടㅦߔࠆߎߣࠍ᣿ࠄ߆ߦ
ߒ㧘ᐔⴕ߫ߨࠞࡦ࠴࡟ࡃ࡯ࠍ೑↪ߒߚធὐߩା㗬ᕈ⹜㛎ᴺࠍ⏕┙ߒߚߎߣߢ㧘นേធὐߩ
ᯏ᭴ߩ⹏ଔࠍኈᤃߦⴕ߃ࠆࠃ߁ߦߥߞߚ㧚ߎࠇࠄߩᚑᨐߦࠃࠅ㧘ᓥ᧪ߪᦨ⚳⵾ຠߦㄭ޿⁁ᘒߦߥࠄߥߌࠇ߫ᬌ⸛ߢ߈ߥ߆ߞߚା㗬ᕈ⸳⸘ࠍࠃࠅᣧ޿Ბ㓏߆ࠄขࠅㄟ߻ߎߣ߇ߢ߈㧘ࡊࡠ࠻࠲ࠗࡊߩ⹜૞࿁ᢙ߇⍴❗ߐࠇ㧘ࠕࠗ࠺ࠕ߿⌕ᗐࠍᣧߊታ⃻ߢ߈㧘ߘࠇߦࠃࠅవⴕ⠪೑⋉ࠍ⏕଻ߢ߈ࠆߣ⠨߃ࠄࠇࠆ㧚η- 45 ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ടᎿ࡮⸃ᨆࠪࠬ࠹ࡓߩ㐿⊒  ⎇ⓥ㐿⊒ߩ᭎ⷐᾲᑼ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ࡊࡠ࠮ࠬߪ㧘࿑ 3-5-37 ߦ␜ߔᎿ⒟߆ࠄ᭴ᚑߐࠇࠆ߽ߩߢ㧘⦟ᅢߥࡄ࠲࡯ࡦォ౮ࠍⴕ߁ߦߪ㧘ߘࠇߙࠇߩᎿ⒟ߦ߅޿ߡᬌ⸛ߔߴ߈ࡄ࡜ࡔ࡯࠲߇޽ࠆ㧚ᓥ᧪ߪߎߩฦࡄ࡜ࡔ࡯࠲ߩᦨㆡൻࠍታ㛎ߢⴕߞߡ޿ߚ߇㧘㕖ല₸⊛ߢታ↪⊛ߢߪߥ޿㧚ߘߎߢᧄ⎇ⓥࡊࡠࠫࠚࠢ࠻ߢߪߎߩࡊࡠ࠮ࠬᦨㆡൻࠍ⸃ᨆࠪࠬ࠹ࡓߢⴕ߁ߎߣࠍ⋡⊛ߣߒߚ㐿⊒ࠍ
ⴕߞߚ㧚

Mold

settingHeat-up and press

Substrate᧦ઙ⸳ቯ䊶䊝䊷䊦䊄᧚⾰䊶䊝䊷䊦䊄ᒻ⁁䊶᮸⢽᧚ᢱ

Cool-down and release

Imprinted patternᚑᒻ᧦ઙ⸳ቯ
䊶ᚑᒻ᷷ᐲ
䊶ᚑᒻ࿶ജ
䊶ᚑᒻᤨ㑆
䊶䋨᛼䈚ㄟ䉂ㅦᐲ䋩䊶䋨᛼䈚ㄟ䉂㊂䋩ᚑᒻ⚿ᨐ䈱⹏ଔ
䊶䊌䉺䊷䊮ᒻ⁁䊶䋨శቇ․ᕈ䋩䊶䋨ᔕജಽᏓ䋩䊶䋨⚻ᤨᄌൻ䋩

࿑ 3-5-37 ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ࡊࡠ࠮ࠬᎿ⒟࿑
࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆࠪࠬ࠹ࡓߢ㧘ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ࡊࡠ࠮ࠬߩ⸃ᨆ㧔ࡊࡠ࠮ࠬࠪࡒ
ࡘ࡟࡯࡚ࠪࡦ㧕ࠍⴕ߁ߦ㓙ߒߡ㧘ᚑᒻടᎿߔࠆ᮸⢽ߩ‛ᕈ୯ߩᛠី߇㊀ⷐߢ޽ࠆ㧚ߘߩߚ߼㧘᮸⢽‛ᕈ᷹ቯࠪࠬ࠹ࡓࠍዉ౉ߒ㧘᮸⢽ߩ‛ᕈ࠺࡯࠲ࠍ᷹ቯ࡮෼㓸ߒߚ㧚ߎߩ࠺࡯࠲߆
ࠄ㧘ߺߕ߶ᖱႎ✚⎇ߢ㐿⊒ߔࠆ⸃ᨆࠪࠬ࠹ࡓߢ૶↪ߔࠆࡄ࡜ࡔ࡯࠲ࠍ᛽಴ߒ㧘᮸⢽ߩ‛ᕈ࠺࡯࠲ࡌ࡯ࠬࠍ᭴▽ߒߚ㧚ട߃ߡ㧘᮸⢽ߩᚑᒻታ㛎ࠍⴕ޿ᒻ⁁࠺࡯࠲ࠍขᓧߒߚ㧚⸃ᨆࠪࠬ࠹ࡓߦࠃࠆ⚿ᨐߩᬌ⸽ߢߪᚑᒻㅜਛߢߩᒻ⁁࠺࡯࠲߇㊀ⷐߣߥࠆߚ߼㧘ฦ⒳᧦ઙࠍᬌ⸛
ߩ਄ࡄ࡜ࡔ࡯࠲ࠍࠦࡦ࠻ࡠ࡯࡞ߒߡᚑᒻࠍⴕߞߚ㧚એ਄ߦࠃࠅᓧࠄࠇߚ᧚ᢱ‛ᕈ࠺࡯࠲߅
ࠃ߮ᚑᒻታ㛎࠺࡯࠲ࠍ↪޿㧘⸃ᨆࠪࠬ࠹ࡓߦࠃࠆ⸘▚⚿ᨐߩᬌ⸽ࠍⴕߞߚ㧚  ᚑᨐߩ⹦⚦Ԙ ࠺࡯࠲ࡌ࡯ࠬߩ᭴▽a) ᮸⢽ߩ☼ᒢᕈ࠺࡯࠲ߩ᷹ቯ ᮸⢽ߩ‛ᕈ᷹ቯߦߪ㧘࿑ 3-5-38 ߩ☼ᒢᕈ᷹ቯⵝ⟎㧔ࡈ࡜ࡦࠬ METRAVIB ␠⵾㧘
VA2000-SP㧕ࠍ૶↪ߒߚ㧚ⵝ⟎ߩਥߥ઀᭽ࠍએਅߦ␜ߔ㧚η- 46᷹ቯ๟ᵄᢙ㧦0.001㨪200 Hzᦨᄢ⩄㊀ 㧦100 Nᦨᄢᝄ᏷ 㧦r6000 Ǵm᷹ቯ᷷ᐲ 㧦-150㨪450 ͠ᧄⵝ⟎ࠍ↪޿ߡ㧘࠽ࡁࠗࡦࡊ࡝ࡦ࠻ࡊࡠ࠮ࠬߦ৻⥸⊛ߦㆡ↪ߐࠇߡ޿ࠆ㧘એਅߩ᮸⢽ߩ☼ᒢᕈ․ᕈࠍ⸘᷹ߒߚ㧚
࡮COP㧔ࠪࠢࡠࠝ࡟ࡈࠖࡦ㧕
࡮PMMA㧔ࠕࠢ࡝࡞㧕
࡮PET㧔ࡐ࡝ࠛ࠴࡟ࡦ࠹࡟ࡈ࠲࡟࡯࠻㧕
࡮PC㧔ࡐ࡝ࠞ࡯ࡏࡀ࡯࠻㧕

࿑ 3-5-38 ዉ౉ߒߚ☼ᒢᕈ᷹ቯⵝ⟎࿑ 3-5-39 ☼ᒢᕈ᷹ቯⵝ⟎ߩ⹜ᢱ࿕ቯㇱฦ᮸⢽ࠍ 40 mm10 mm2 mm ⒟ᐲߦಾࠅ಴ߒ㧘࿑ 3-5-39 ߩ⹜ᢱ࿕ቯㇱߦ࿕ቯߒߚ㧚η- 47ടᾲ↪ߩἹߦࠃࠅ᷷ᐲࠍ਄᣹ߐߖߥ߇ࠄ㧘ฦ᷷ᐲߦ߅޿ߡᒁᒛ࿶❗ߩ➅ࠅ㄰ߒᄌᒻࠍਈ߃㧘᮸⢽ߩ☼ᒢᕈ㧔ᒢᕈ₸㧘૏⋧ㆃࠇ╬㧕ߩᄌᒻ๟ᵄᢙଐሽᕈࠍ᷹ቯߒߚ㧚᷹ቯ࠺࡯࠲ߩ଀ߣߒߡ㧘
COP ߩฦ᷷ᐲߢߩᒢᕈ₸ߩടᝄ๟ᵄᢙଐሽᕈࠍ࿑ 3-5-40 ߦ␜ߔ㧚࿑ਛߩ⾂⬿ᒢᕈ₸ߪ㧘ᱜᒏᵄ⁁ߩᒁᒛ࿶❗ᄌᒻࠍਈ߃ߚߣ߈ߩ⹜ᢱߦ߆߆ࠆ⩄㊀ߩਛߢ㧘ᄌᒻߣห૏⋧ߩᚑಽ߆ࠄ᳞߼ߚᒢᕈ₸ߩߎߣߢ޽ࠆ㧚᷷ᐲ߇਄᣹ߔࠆߦᓥߞߡ⾂⬿ᒢᕈ₸ߪૐਅߒ㧘߹ߚหߓ᷷ᐲߢߪᄌᒻߩ๟ᵄᢙ߇ૐ޿߶ߤ⾂⬿ᒢᕈ₸ߪዊߐߊߥߞߡ޿ࠆ㧚㪈㪅㪇㪇㪜㪂㪈㪇

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⾂⬿ᒢᕈ₸㩷㪲㪧㪸㪴㪈㪅㪇㪇㪜㪂㪇㪐

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㪇㪅㪈㪈ടᝄ๟ᵄᢙ㩷㪲㪟㫑㪴

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࿑ 3-5-40 COP ߩฦ᷷ᐲߦ߅ߌࠆ⾂⬿ᒢᕈ₸ߩ᷹ቯ࠺࡯࠲
ฦ᷷ᐲߢߩ⾂⬿ᒢᕈ₸ߩ᷹ቯ୯ࠍ㧘WLF ೣߦၮߠߊࠪࡈ࠻ࡈࠔࠢ࠲࡯
 D§ C (T  T0 ) ·¸¸
exp¨¨  1
© C2  (T  T0 ) ¹ࠍ↪޿ߡ㧘ਅ⸥ߩ㑐ଥߦࠃࠅ E( f ,T )E (Df , T0 )ၮḰ᷷ᐲ T0 ߢߩ઒ᗐ⊛ߥᄌᒻ๟ᵄᢙߩ࠺࡯࠲ߦᄌ឵ߒ㧘࿑ 3-5-41 ߦ␜ߔࠃ߁ߥࡑࠬ࠲࡯ࠞ
࡯ࡉࠍᓧߚ㧚ၮḰ᷷ᐲ T0 ߪ COP ߢߪ 165͠ߣߒ㧘ฦ᷷ᐲߩ᷹ቯ୯߇ࠬࡓ࡯࠭ߦ㊀ߨวࠊߐࠇࠆࠃ߁ߦ㧘ࡄ࡜ࡔ࡯࠲ C1, C2 ࠍ᳿ቯߒߚ㧚ห᭽ߦߒߡ㧘ߘߩઁߩ᮸⢽ߦߟ޿ߡ߽㧘ᒢᕈ₸ߩᄌᒻ๟ᵄᢙଐሽᕈ࠺࡯࠲ࠍขᓧߒߚ㧚η- 48㪈㪅㪇㪇㪜㪂㪈㪇⾂⬿ᒢᕈ₸㩷㪲㪧㪸㪴㪈㪅㪇㪇㪜㪂㪇㪐

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㪈㪅㪇㪇㪜㪂㪇㪍

㪈㪅㪇㪇㪜㪂㪇㪌
㪈㪅㪇㪇㪜㪄 㪈㪅㪇㪇㪜㪄 㪈㪅㪇㪇㪜㪄 㪈㪅㪇㪇㪜㪂 㪈㪅㪇㪇㪜㪂 㪈㪅㪇㪇㪜㪂 㪈㪅㪇㪇㪜㪂 㪈㪅㪇㪇㪜㪂 㪈㪅㪇㪇㪜㪂
㪇㪊
㪇㪉
㪇㪈
㪇㪇
㪇㪈
㪇㪉
㪇㪊
㪇㪋
㪇㪌
䋨╬ଔ䋩ടᝄ๟ᵄᢙ㩷㪲㪟㫑㪴
࿑ 3-5-41 WLF ೣߦࠃࠅᄌ឵ߐࠇߚ 165͠ߦ߅ߌࠆ઒ᗐ⊛ߥᄌᒻ๟ᵄᢙߢߩ COP ߩ⾂⬿ᒢᕈ₸b) ⸃ᨆࠪࠬ࠹ࡓ౉ജ↪࠺࡯࠲ࡌ࡯ࠬߩ᭴▽਄⸥ߩࠃ߁ߦ☼ᒢᕈ᷹ቯⵝ⟎ߢ⸘᷹ߒߚ࠺࡯࠲߆ࠄ㧘᮸⢽‛ᕈ୯ߣߒߡ⸃ᨆࠪࠬ࠹ࡓߦ
౉ജߔࠆࡄ࡜ࡔ࡯࠲ߢ޽ࠆ㧘WLF ೣߩၮḰ᷷ᐲ T0㧘ࡄ࡜ࡔ࡯࠲ C1, C2㧘㐳ᦼࡗࡦࠣ₸㧘߅ࠃ߮㐳ᦼࡐࠕ࠰ࡦᲧࠍ▚಴ߒߚ㧚ߘࠇࠄߩ୯ࠍ⴫ 3-5-5 ߦ␜ߔ㧚
⴫ 3-5-5 ฦ᮸⢽ߩ☼ᒢᕈ․ᕈߩࡄ࡜ࡔ࡯࠲᮸⢽

WLF ೣ䋺

WLF ೣ䋺 WLF ೣ䋺 㐳ᦼᒢᕈ₸

ၮḰ᷷ᐲ

C1

㐳ᦼ䊘䉝䉸䊮Ყ

C2㩷

COP

165

17.5

75

4.606E+05 0.499965104545455

PMMA

140

13.6

65

1.215E+06 0.499936695833333

PET

110

12.7

69

4.991E+04

PC

180

15

60

3.270E+05 0.499977291666667

0.499995841105136

ߐࠄߦ㧘਄⸥ߩࡑࠬ࠲࡯ࠞ࡯ࡉ߆ࠄ㧘ฦ᧚ᢱߩᮮᒢᕈ₸ߩ✭๺ᤨ㑆ଐሽᕈࠍ⴫ߔࡄ࡜ࡔ࡯
࠲ߣߒߡ㧘⸃ᨆࠪࠬ࠹ࡓ߇૶↪ߔࠆήᰴరൻᮮᒢᕈ₸ߣߘߩᤨቯᢙࠍ▚಴ߒߚ㧚ߎࠇࠄࡄ࡜ࡔ࡯࠲ߩ▚಴ߦߪ㧘ߺߕ߶ᖱႎ✚⎇ߩදജࠍᓧߚ㧚ᮮᒢᕈ₸ߩ✭๺ᦛ✢ࠍ৻⥸ൻ Maxwellη- 49ࡕ࠺࡞ࠍ↪޿ߡ㧘

G (W )§ W ·Gf  ¦ Gi exp¨¨  ¸¸© Wi ¹ߢㄭૃ಴᧪ࠆߣߔࠆ㧚ߎߎߢǼߪ᷷ᐲߩᓇ㗀ࠍ⠨ᘦߒߚ឵▚ᤨ㑆ߢ޽ࠅ㧘Ǽi ߪ⚖ᢙߩฦ㗄ߩ✭๺ᤨ㑆ߢ޽ࠆ㧚ߎࠇࠍǼ= 0 ߢߩᮮᒢᕈ₸ G0 ߢ㒰ߒߡήᰴరൻߒߚ
 g (W )§ W ·g f  ¦ g i exp¨¨  ¸¸© Wi ¹

ࠍ Prony ⚖ᢙߣࠃ߮㧘ߘߩଥᢙ gi ߇ήᰴరൻᮮᒢᕈ₸ߢ޽ࠆ㧚ฦ᮸⢽ߦߟ޿ߡ▚಴ߒߚήᰴరൻᮮᒢᕈ₸ࠍ㧘ᤨቯᢙߣ౒ߦ⴫ 3-5-6 ߦ␜ߔ㧚
⴫ 3-5-6 ฦ᮸⢽ߩήᰴరൻᮮᒢᕈ₸ᤨቯᢙ㱠iήᰴరൻᮮᒢᕈ₸ (gi)
COP

PMMA

PET

PC

1.00E-30

1.552575128285E-01 2.777378816576E-01

1.254484555498E-01

1.101876793414E-01

1.00E-25

1.552572982723E-01 2.777378801905E-01

1.254484555498E-01

1.101876793414E-01

1.00E-20

1.864936035211E-02 2.866910687599E-02

1.254484553988E-01

1.101876793386E-01

1.00E-15

1.864329934292E-02 2.588885938608E-02

3.833855440372E-02

9.079284674676E-02

1.00E-10

1.864352707244E-02 1.739395353637E-02

3.372566532712E-02

2.954479360501E-02

1.00E-09

1.866603964442E-02 1.654287700294E-02

3.772234515423E-02

3.327281297392E-02

1.00E-08

2.063043803304E-02 1.653777608467E-02

7.699387364151E-02

8.013501629854E-02

1.00E-07

3.295714890739E-02 1.696293984578E-02

1.546104114939E-01

1.045203983652E-01

1.00E-06

4.902571160041E-02 5.010587296064E-02

1.963725455643E-01

2.335856962345E-01

1.00E-05

1.064996358449E-01 1.126293863161E-01

7.963676339101E-02

9.009432976754E-02

1.00E-04

3.227131881582E-01 7.879153649835E-02

2.753806528143E-03

4.121399379807E-03

1.00E-03

7.877150029114E-02 6.748694231858E-02

8.901891024064E-04

1.392302189666E-03

1.00E-02

2.044078369122E-03 1.085107913201E-02

4.020864163772E-04

4.596163698533E-04

1.00E-01

1.123484423763E-03 1.469260104761E-03

6.412987913869E-04

2.007569200251E-04

1.00E+00

4.483717437610E-04 4.268613471429E-04

6.573747665876E-04

9.446098033144E-04

1.00E+01

4.589325314610E-04 1.617081761261E-04

8.490791315323E-04

2.512722133158E-04

1.00E+02

2.435912955165E-05 2.281203839587E-04

3.845901668740E-05 0.000000000000E+00

1.00E+03 0.000000000000E+00 4.045818234774E-05

0.000000000000E+00 0.000000000000E+00ߎࠇࠄ᷹ቯ࠺࡯࠲߅ࠃ߮㧘ߘߩઁߩ᮸⢽ߩ‛ᕈ୯ࠍวࠊߖߡ㧘࠽ࡁࠗࡦࡊ࡝ࡦ࠻↪᮸⢽᧚η- 50ᢱ࠺࡯࠲ࡌ࡯ࠬࠍ᭴▽ߒ㧘⸃ᨆࠪࠬ࠹ࡓߩ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬߦ෼㍳ߒߚ㧚ԙ ઍ⴫⊛᮸⢽ߦኻߔࠆᬌ⸽a) ᮸⢽ߩᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ᚑᒻ࠺࡯࠲ߩขᓧ
࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆࠪࠬ࠹ࡓߢ⸃ᨆߒߚ⚿ᨐߩᅷᒰᕈࠍᬌ⸽ߔࠆߚ߼ߦ㧘࠽ࡁࠗࡦࡊ࡝
ࡦ࠻ታ㛎ࠪࠬ࠹ࡓࠍ᭴▽ߒ㧘ߘߩࠪࠬ࠹ࡓࠍ↪޿ߡ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ࡊࡠ࠮ࠬߩᚑᒻ࠺࡯
࠲ࠍขᓧߒߚ㧚એਅߦᚑᨐߩ⹦⚦ࠍ␜ߔ㧚ᚑ ᒻ ታ 㛎 ߦ ߪ 㧘 ࠛ ࡦ ࠫ ࠾ ࠕ ࡝ ࡦ ࠣ ࠪ ࠬ ࠹ ࡓ 㧔 ᩣ 㧕 ⵾  ዊ ဳ ࠽ ࡁ ࠗ ࡦ ࡊ ࡝ ࡦ ࠻ ⵝ ⟎
EMF-020-NI ࠍ૶↪ߒߚ㧚ⵝ⟎ߩ᭎ⷰࠍ࿑ 3-5-42 ߦ␜ߔ㧚

࿑ 3-5-42 ዊဳ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ⵝ⟎ᚑᒻ↪ဳߪ㧘⸃ᨆࠪࠬ࠹ࡓߢߩᬌ⸽ࠍኈᤃߦߔࠆߚ߼㧘න⚐ߥ Line㧒Space ߩ㧞ᰴరᒻ⁁ߣߒߚ㧚࠽ࡁࠗࡦࡊ࡝ࡦ࠻ࡊࡠ࠮ࠬᬌ⸽ߩߚ߼ߦߪ㧘ᚑᒻㅜਛߩᒻ⁁࠺࡯࠲ࠍᓧࠆߎߣ
߇㊀ⷐߢ޽ࠆߚ߼㧘ᷓߐ 200Ǵ㨙ߢᏐ 200 ࡒࠢࡠࡦߩᲧセ⊛ᄢ߈ߥ Line&Space ࡄ࠲࡯ࡦࠍᜬߟဳࠍ૞⵾ߒߚ㧚ဳ᧚ߦߪࠣ࡜࠶ࠪ࡯ࠞ࡯ࡏࡦࠍ↪޿㧘࠳ࠗࠪࡦࠣ࠰࡯ߦࠃࠅࡄ࠲࡯
ࡦࠍᒻᚑߒߚ㧚૶↪ߒߚဳ߅ࠃ߮ᚑᒻᓟߩ᮸⢽ߩ౮⌀ࠍ࿑ 3-5-43 ߦ␜ߔ㧚߹ߚ㧘ᚑᒻታ㛎ߩ㓙ߩ⹜ᢱߩ૏⟎㑐ଥࠍ࿑ 3-5-44 ߦ␜ߔ㧚ࡅ࡯࠲ߩࠨࠗ࠭ߪ 35 mm ⷺߢ޽ࠅ㧘ࠣ࡜࠶ࠪ࡯ࠞ࡯ࡏࡦ⵾ᚑᒻဳߪ㧘2020t3 mm㧘᮸⢽ߪ 2525t2 mm ߩ߽ߩࠍ↪޿ߚ㧚

η- 51

࿑ 3-5-43 ࠣ࡜࠶ࠪ࡯ࠞ࡯ࡏࡦ⵾ᚑᒻဳ㧔Ꮐ㧕ߣᚑᒻᓟߩ᮸⢽㧔ฝ㧕

䉫䊤䉾䉲䊷
䉦䊷䊗䊮ဳ

ട࿶

᮸⢽

ဳ஥䊍䊷䉺

᮸⢽஥䊍䊷䉺
࿑ 3-5-44 ᚑᒻታ㛎࠽ࡁࠗࡦࡊ࡝ࡦ࠻ࡊࡠ࠮ࠬߦ৻⥸⊛ߦ↪޿ࠄࠇࠆ᮸⢽㧔COP, PMMA㧕ߦኻߒߡ㧘㊄ဳ࡮᮸⢽ၮ᧼ടᾲ᷷ᐲ㧘ട࿶ജ㧘ട࿶଻ᜬᤨ㑆ߥߤࠍࡄ࡜ࡔ࡯࠲ߣߒߡᄌൻߐߖ㧘ᚑᒻᓟߩᒻ
⁁⸘᷹ࠍⴕߞߚ㧚ᒻ⁁⸘᷹ߪ㧘శቇᐓᷤ⸘㧘⴫㕙☻ߐ⸘ߦࠃࠅⴕ޿㧘㧿㧱㧹ߦࠃࠅᒻ⁁ࠍ⏕⹺ߒߚ㧚COP ߦኻߔࠆ᷹ቯ⚿ᨐߩ଀ࠍ࿑ 3-5-45 ߦ␜ߔ㧚଻ᜬᤨ㑆 10sec଻ᜬᤨ㑆 30sec        ଻ᜬᤨ㑆 60sec

η- 52

㊄ဳࡅ࡯࠲᷷ᐲ 165͠ၮ᧼ࡅ࡯࠲᷷ᐲ 125͠࿶ജ 1 25MP

଻ᜬᤨ㑆 90sec       ଻ᜬᤨ㑆 120sec

࿑ 3-5-45 COP ᚑᒻታ㛎ߩ᷹ቯ࠺࡯࠲ ߐࠄߦ㧘COP ߅ࠃ߮ PMMA ߩᚑᒻታ㛎⚿ᨐࠍ߹ߣ߼ߚ߽ߩࠍ㧘࿑ 3-5-46 ߆ࠄ࿑ 3-5-49
ߦ␜ߔ㧚޿ߕࠇ߽㧘ട࿶ജ߅ࠃ߮ട࿶଻ᜬᤨ㑆ߩჇടߦ઻޿㧘ᄌᒻ㊂߇Ⴧᄢߒߡ޿ࠆߎߣ
߇ࠊ߆ࠆ㧚ᚑᒻ᷷ᐲߦߟ޿ߡߪ㧘ೋ߼ߦታ㛎᧦ઙࠍ⸳ቯߔࠆᲑ㓏ߢ᷷ᐲࠍᄌ߃ߚᬌ⸛߽ⴕ
ߞߚ߇㧘ࠊߕ߆ߩ᷷ᐲߩ㆑޿ߦࠃࠅᄢ߈ߊᄌᒻㅦᐲ߇ᄌേ㧘ᄌᒻ㊂ߩ೙ᓮ߇࿎㔍ߢ޽ߞߚ㧚ߘߩߚ߼㧘᷷ᐲߦߟ޿ߡߪᦨㆡߣᕁࠊࠇࠆ᧦ઙߦ࿕ቯߒ㧘ઁߩࡄ࡜ࡔ࡯࠲ߣᄌᒻ㊂ߣߩ㑐ㅪߦߟ޿ߡ࠺࡯࠲ࠍขᓧߒߚ㧚

㪈㪉㪇

㪈㪉㪇
㪈㪇㪇

㪏㪇

ᒛ䉍಴䈚㊂䋨㱘䌭䋩ᒛ䉍಴䈚㊂䋨㱘㫄䋩㪈㪇㪇

㊄ဳ䊍䊷䉺᷷ᐲ䋺㪈㪍㪌㷄᮸⢽䊍䊷䉺᷷ᐲ䋺㪈㪉㪌㷄ട࿶ജ䋺㪌㪇㫂㪾㪽

㪍㪇
㪋㪇

㪏㪇
㪍㪇
㪋㪇
㪉㪇

㪉㪇
㪇

㊄ဳ䊍䊷䉺᷷ᐲ䋺㪈㪍㪌㷄᮸⢽䊍䊷䉺᷷ᐲ䋺㪈㪉㪌㷄ട࿶଻ᜬᤨ㑆䋺㪍㪇㩷㫊㪼㪺

㪈㪇

㪊㪇

㪍㪇

㪐㪇

㪈㪉㪇

଻ᜬᤨ㑆㩿㫊㪼㪺䋩

㪇

㪉㪌

㪌㪇

㪎㪌

ᚑᒻ⩄㊀䋨㫂㪾㪽䋩 ࿑ 3-5-46 ട࿶଻ᜬᤨ㑆ߣ COP ߩᄌᒻ㊂   ࿑ 3-5-47 ട࿶ജߣ COP ߩᄌᒻ㊂

η- 53

㪈㪉㪇

㪈㪍㪇
㪈㪋㪇

㪏㪇

ᒛ䉍಴䈚㊂䋨㫊㪼㪺䋩ᒛ䉍಴䈚㊂䋨㱘㫄䋩

㪈㪇㪇

㪈㪏㪇

㊄ဳ䊍䊷䉺᷷ᐲ䋺㪈㪋㪇㷄᮸⢽䊍䊷䉺᷷ᐲ䋺㪈㪇㪇㷄ട࿶ജ䋺㪌㪇㩷㫂㪾

㪍㪇
㪋㪇

㪈㪉㪇
㪈㪇㪇
㪏㪇
㪍㪇
㪋㪇

㪉㪇
㪇

㊄ဳ䊍䊷䉺᷷ᐲ䋺㪈㪋㪇㷄᮸⢽䊍䊷䉺᷷ᐲ䋺㪈㪇㪇㷄ട࿶଻ᜬᤨ㑆䋺㪍㪇㫊㪼㪺

㪉㪇
㪈㪇

㪍㪇

㪈㪉㪇

㪈㪏㪇

㪉㪋㪇

㪇

㪌㪇

㪎㪌

㪈㪇㪇

㪈㪉㪌

ᚑᒻ⩄㊀䋨㫂㪾㪽䋩଻ᜬᤨ㑆㩿㫊㪼㪺䋩

࿑ 3-5-48 ട࿶଻ᜬᤨ㑆ߣ PMMA ߩᄌᒻ㊂ ࿑ 3-5-49 ട࿶ജߣ PMMA ߩᄌᒻ㊂ એ਄ߩ࠺࡯࠲ߪ㧘⸃ᨆ♖ᐲ⏕⹺ߩߚ߼ߩ࠺࡯࠲ߣߒߡߺߕ߶ᖱႎ✚⎇ߦㅍઃߔࠆߣ౒ߦ㧘↥✚⎇ߦᣈ޿ߡ߽⸃ᨆ⚿ᨐߣߩᲧセᬌ⸛ࠍⴕߞߚ㧚b) ⸃ᨆ⚿ᨐߣታ㛎⚿ᨐߩᲧセᬌ⸛᷹ቯߐࠇߚ᮸⢽ߩ᧚ᢱ․ᕈࡄ࡜ࡔ࡯࠲ࠍ↪޿ߡ㧘ߺߕ߶ᖱႎ✚⎇ߦࠃࠅ㐿⊒ߐࠇߚ࠽ࡁ
ࠗࡦࡊ࡝ࡦ࠻⸃ᨆࠪࠬ࠹ࡓߦࠃࠅ㧘COP ߩᚑᒻㆊ⒟ࠍ⸃ᨆߒߚ㧚⸃ᨆࠍታⴕߔࠆߦ޽ߚߞ
ߡߪ㧘ࡕ࠺࡞ߩ૞ᚑ㧘⸃ᨆ᧦ઙߩ⸳ቯ╬ߢߺߕ߶ᖱႎ✚⎇ߩදജࠍᓧߚ㧚 ⸃ᨆߦߪ㧘࿑ 3-5-50 ߦ␜ߔࠃ߁ߥࡔ࠶ࠪࡘ߅ࠃ߮ࡕ࠺࡞ࠍ↪޿ߚ㧚Line&Space ߩ➅ࠅ㄰ߒࡄ࠲࡯ࡦߢߩᄌᒻ᜼േࠍ⸃ᨆߔࠆߚ߼㧘ኻ⒓ᕈࠍ೑↪ߒߡᏐ 200 Ǵ㨙ߩㇱಽߩߺࠍࡕ
࠺࡞ߣߒߚ㧚߹ߚ㧘ဳߪ೰૕ߣߒߡ⸘▚ࠍⴕߞߚߚ߼㧘᮸⢽ߦធ⸅ߔࠆㇱಽએᄖߪᔅⷐߥ
޿ߣ್ᢿߒ㧘ታ㓙ߩෘߺ 3 mm ߦኻߒࡕ࠺࡞ߢߪෘߺࠍ 400Ǵ㨙ߣߒߚ㧚᮸⢽ߦߟ޿ߡߪ㧘⸃ᨆ♖ᐲࠍ⏕଻ߔࠆߚ߼ߦߪ಴᧪ࠆߛߌࡔ࠶ࠪࡘࠍ⚦߆ߊߒߚ޿߇㧘ⷐ⚛ᢙ߇⤘ᄢߣߥߞߡ⸘▚ᤨ㑆߇㕖Ᏹߦ㐳ߊߥߞߡߒ߹߁㧚ߘߩߚ߼㧘ဳߩᷓߐ߇ 200Ǵ㨙ߢ޽ࠆߎߣࠍ⠨ᘦߒߡ㧘ታ㛎ߢߩ᮸⢽ߩෘߺ 2 mm ߦኻߒ㧘ࡕ࠺࡞ߢߪ᮸⢽ߩෘߺࠍ 300Ǵ㨙ߣߒߚ㧚߹ߚ㧘ࠛ࠶ࠫㇱߢߩਇ቟ቯ⃻⽎ࠍㆱߌࠆߚ߼㧘ဳߩࠛ࠶ࠫㇱߦඨᓘ 20Ǵ㨙ߩᦛ₸ࠍઃߌߡ޿ࠆ㧚

η- 54

࿑ 3-5-50 ⸃ᨆߦ↪޿ߚ᦭㒢ⷐ⚛ࡕ࠺࡞㧔Ꮐ㧕ߣធ⸅ㇱߩ᜛ᄢ㧔ฝ㧕

࿑ 3-5-51 COP ߩᄌᒻㆊ⒟ߩࠪࡒࡘ࡟࡯࡚ࠪࡦ⚿ᨐ㧔Ꮐ߆ࠄ଻ᜬᤨ㑆 10 sec, 30sec, 60sec㧕
 ⸃ᨆߦߪ⴫ 3-5-5 ߅ࠃ߮⴫ 3-5-6 ߦ␜ߒߚ COP ߩ᧚ᢱ․ᕈߩ᷹ቯ୯ࠍࡄ࡜ࡔ࡯࠲ߣߒߡ
↪޿ߚ㧚ᚑᒻታ㛎ߢߪဳߩ᷷ᐲࠍ᮸⢽ߩ᷷ᐲࠃࠅ㜞ߊߒߡᚑᒻࠍⴕߞߡ޿ࠆ㧚ߎߩߣ߈㧘ታ㓙ߦ᷹ቯ࡮೙ᓮߐࠇߡ޿ࠆߩߪ㧘ဳ߅ࠃ߮᮸⢽ߩᄖ஥ߦ޽ࠆࡅ࡯࠲ߩ᷷ᐲߢ޽ࠅ㧘ታ㓙ߦᄌᒻߒߡ޿ࠆㇱಽߩ᮸⢽ߩ᷷ᐲߪߎࠇࠄࡅ࡯࠲᷷ᐲߣߪᒰὼ⇣ߥߞߡ޿ࠆ㧚ߐࠄߦ㧘ࡅ࡯࠲ߣဳ㧘ဳߣ᮸⢽㧘᮸⢽ߣࡅ࡯࠲ߩ㑆ߪធ⸅ߦࠃࠆᾲવ㆐Ⴚ⇇ߣߥߞߡ޿ࠆߚ߼㧘᷷ᐲಽᏓߩᱜ⏕ߥ⸃ᨆߪ࿎㔍ߢ޽ࠆߣ್ᢿߒߚ㧚ߘߩߚ߼㧘ട࿶ജ 50 kgf㧘ട࿶଻ᜬᤨ㑆 60 sec
ߢߩᄌᒻ㊂߇ታ㛎࠺࡯࠲ߣ৻⥌ߔࠆࠃ߁㧘᮸⢽᷷ᐲࠍ 151͠ߣߒߡߘߩઁߩ᧦ઙߩ⸃ᨆ⚿ᨐ߳ߩᬌ⸛ࠍⴕߞߚ㧚⸃ᨆ⚿ᨐߩ৻଀ࠍ࿑ 3-5-51 ߦ␜ߔ㧚⩄㊀଻ᜬᤨ㑆߇㐳ߊߥࠆߦߟࠇߡ㧘η- 55

ᄌᒻ㊂߇Ⴧᄢߒߡ޿ࠆߎߣ߇ࠊ߆ࠆ㧚ߐࠄߦᲧセߩߚ߼㧘Ǽ=0 ߅ࠃ߮Ǽ=пߢߩᒢᕈ₸߇หߓߢ㧘✭๺㗄߇㧝㗄ߩߺߩࡕ࠺࡞ߦࠃࠆ⸃ᨆ߽ⴕߞߚ㧚ߘߩ㓙ߩࡄ࡜ࡔ࡯࠲ߣߒߡ㧘  Ǽ1 = 0.05 sec㧘g1 = 0.99981389
ࠍ↪޿ߚ㧚ᤨቯᢙǼ1 ߪ㧘߿ߪࠅട࿶ജ 50 kgf㧘ട࿶଻ᜬᤨ㑆 60 sec ߢߩᄌᒻ㊂ߩ⸃ᨆ⚿ᨐ߇㧘ታ㛎୯ߣ৻⥌ߔࠆࠃ߁ߦ᳿ቯߒߚ㧚 ࿑ 3-5-52 ߪ㧘ട࿶଻ᜬᤨ㑆ߣᄌᒻ㊂ߩ㑐ଥߦߟ޿ߡ㧘ᚑᒻታ㛎⚿ᨐߣ⸃ᨆࠪࠬ࠹ࡓߦࠃ
ࠆ⸘▚⚿ᨐࠍᲧセߒߚ߽ߩߢ޽ࠆ㧚࿑ਛߩ᫔ࠣ࡜ࡈ߇ታ㛎࠺࡯࠲ߢ޽ࠆ㧚㧞⒳㘃ߩ⸃ᨆ⚿ᨐࠍᲧセߔࠆߣ㧘✭๺㗄߇㧝㗄ߩߺߩࡕ࠺࡞ߢߪᤨ㑆߇⚻ㆊߔࠆߩߦ߶߷Ყ଀ߒߡᄌᒻ㊂߇Ⴧᄢߒߡ޿ߊߩߦኻߒ㧘ታ᷹ߒߚ᧚ᢱ․ᕈߦၮߠߊ৻⥸ൻ Maxwell ࡕ࠺࡞㧔ᄙ㗄 Prony⚖ᢙ㧕ߦࠃࠆ⸃ᨆߢߪ㧘⍴ᤨ㑆஥ߢᄢ߈ߊᄌᒻ߇ㅴߺᤨ㑆߇⚻ߟߦߟࠇߡᄌᒻ߇ㆃߊߥߞ
ߡ޿ࠆ㧚ᚑᒻታ㛎ߩ࠺࡯࠲ߦ߽᭽‫⺋ߥޘ‬Ꮕ߇฽߹ࠇߡ޿ࠆߎߣࠍ⠨ᘦߔࠇ߫㧘⴫ 3-5-5 ߅ࠃ߮⴫ 3-5-6 ߩ᧚ᢱ․ᕈ࠺࡯࠲ߦࠃࠆ৻⥸ൻ Maxwell ࡕ࠺࡞ࠍ↪޿ߚ⸃ᨆ⚿ᨐߪ㧘ታ㛎⚿ᨐࠍ޽ࠆ⒟ᐲ੍᷹಴᧪ࠆ߽ߩߣߥߞߡ޿ࠆ㧚
㪈㪍㪇
ᚑᒻታ㛎

㪈㪋㪇

✭๺㗄䋱㗄䈱䊝䊂䊦ᒛ䉍಴䈚㊂ 䋨㱘䌭䋩㪈㪉㪇ᄙ㗄㪧㫉㫆㫅㫐⚖ᢙ

㪈㪇㪇
㪏㪇
㪍㪇
㪋㪇
㪉㪇
㪇
㪈㪇

㪊㪇

㪍㪇
ട࿶଻ᜬᤨ㑆㩷㩿㫊㪼㪺㪀

㪐㪇

㪈㪉㪇

࿑ 3-5-52 ᄌᒻ㊂߳ߩട࿶଻ᜬᤨ㑆ߩᓇ㗀ߦ㑐ߔࠆᚑᒻታ㛎߅ࠃ߮⸃ᨆ⚿ᨐߩᲧセ એ਄ߩࠃ߁ߦ㧘᷹ቯߐࠇߚ᮸⢽᧚ᢱߩ☼ᒢᕈ࠺࡯࠲ࠍ↪޿ߡ㧘ߺߕ߶ᖱႎ✚⎇ߦࠃࠅ㐿⊒ߐࠇߚ࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆࠪࠬ࠹ࡓߢ⸃ᨆࠍⴕ߁ߎߣߦࠃࠅ㧘ᢙ୯⸃ᨆ⚿ᨐߪᚑᒻታ
㛎ߩ⚿ᨐߣ߶߷৻⥌ߔࠆߎߣ߇⏕⹺ߐࠇߚ㧚ߎߩߎߣߪ㧘ᚑᒻߦ߅ߌࠆฦࡄ࡜ࡔ࡯࠲߇ࠗ
ࡦࡊ࡝ࡦ࠻⚿ᨐߦ෸߷ߔᓇ㗀ࠍ㧘㐿⊒ߐࠇߚ⸃ᨆࠪࠬ࠹ࡓߦࠃࠅ੍᷹น⢻ߢ޽ࠆߎߣࠍ␜
ߒߡ߅ࠅ㧘ᧄ⎇ⓥ㐿⊒ᚑᨐߩ᦭↪ᕈࠍ␜ߒߡ޿ࠆ㧚η- 56

 ᚑᨐߩᗧ⟵࠽ࡁࠗࡦࡊ࡝ࡦ࠻↪᮸⢽᧚ᢱߩ☼ᒢᕈ․ᕈߩ࠺࡯࠲ࡌ࡯ࠬ᭴▽ߦ߅޿ߡߪ㧘ઍ⴫⊛ߥ᮸⢽
ߢ޽ࠆ COP, PMMA, PET, PC ߦߟ޿ߡ࠺࡯࠲ߩขᓧࠍቢੌߒߚ㧚ߎࠇࠄ߆ࠄ࠽ࡁࠗࡦࡊ࡝
ࡦ࠻⸃ᨆࠪࠬ࠹ࡓ߇ᔅⷐߣߔࠆ᧚ᢱࡄ࡜ࡔ࡯࠲ࠍ▚಴ߒ㧘᮸⢽᧚ᢱߩ‛ᕈ࠺࡯࠲ࡌ࡯ࠬࠍ
᭴▽ߔࠆߣ౒ߦ㧘ߘࠇࠄߪ⸃ᨆࠪࠬ࠹ࡓߩ࠺࡯࠲ࡌ࡯ࠬߦ෼㍳ߐࠇߚ㧚⸃ᨆࠪࠬ࠹ࡓߩ⸃
ᨆ⚿ᨐᬌ⸽ߩߚ߼ߩᚑᒻታ㛎࠺࡯࠲ߩขᓧߢߪ㧘COP ߅ࠃ߮ PMMA ߦߟ޿ߡฦ⒳ᚑᒻ᧦
ઙߣᄌᒻ㊂ߩ㑐ଥߦ㑐ߔࠆ࠺࡯࠲ࠍ෼㓸ߒߚ㧚ขᓧߒߚ᧚ᢱߩ☼ᒢᕈ․ᕈ࠺࡯࠲ࠍ↪޿ߡ㧘⸃ᨆࠪࠬ࠹ࡓߦࠃࠅᚑᒻ᧦ઙߩᓇ㗀ࠍ⸘▚ߒߚ⚿ᨐߪ㧘ታ㓙ߩᚑᒻታ㛎⚿ᨐߣታ㛎⺋Ꮕߩ▸࿐ߢ⦟ߊ৻⥌ߒߚ㧚ߎߩߎߣ߆ࠄ㧘㐿⊒ߐࠇߚ⸃ᨆࠪࠬ࠹ࡓߦࠃࠅ㧘ฦ⒳ࡄ࡜ࡔ࡯࠲߇ᚑᒻ⚿ᨐߦ෸߷ߔᓇ㗀ߦߟ޿ߡ੍ᗐน⢻ߢ޽ࠆߎߣ߇␜ߐࠇ㧘⸃ᨆࠪࠬ࠹ࡓߩ♖ᐲ߇ᬌ⸽ߐࠇߚ㧚એ਄ߦࠃࠅ㧘ߎࠇ߹ߢታ㛎⊛ߥ⹜ⴕ㍲⺋ߦࠃࠅᄙᄢߥഭജߣᤨ㑆ࠍⷐߒߡ޿ߚ㧘࠽ࡁࠗࡦࡊ࡝ࡦ࠻ࡊࡠ࠮ࠬߩฦ⒳᧦ઙߩᬌ⸛߇㧘࠰ࡈ࠻࠙ࠚࠕߦࠃࠆ⸃ᨆ߆ࠄ߽น⢻ߣߥࠅ㧘࠽ࡁࠗࡦࡊ࡝ࡦ࠻ࡊࡠ࠮ࠬ㐿⊒ߩല₸ൻ߇࿑ࠄࠇࠆ߽ߩߣᦼᓙߐࠇࠆ㧚࠽ࡁࠗࡦࡊ࡝ࡦ࠻↪ઍ⴫⊛᮸⢽ߩ࠺࡯࠲ࡌ࡯ࠬ᭴▽ ⎇ⓥ㐿⊒ߩ᭎ⷐᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ߩࡊࡠ࠮ࠬࠪࡒࡘ࡟࡯࡚ࠪࡦߦᔅⷐߥ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬࠍ᭴▽ߔࠆߚ߼ߦ‫ޔ‬ઍ⴫⊛࠽ࡁࠗࡦࡊ࡝ࡦ࠻ᚑᒻ᧚ᢱߢ޽ࠆฦ⒳ߩ᮸⢽ߣࠟ࡜ࠬ෸߮㊄ဳ᧚ᢱߦߟ޿
ߡ‫ޔ‬ᯏ᪾⊛࡮ᾲ⊛‛ᕈ୯ࠍ⸘᷹⹏ଔߒ‫᧚ޔ‬ᢱ࠺࡯࠲ࡌ࡯ࠬࠍ᭴▽ߒߚ‫ޕ‬ᐔᚑ  ᐕᐲߩ⎇ⓥ㐿⊒ߢߪ‫ޔ‬ઍ⴫⊛ᚑᒻ᧚ᢱߣߒߡ /'/5 ߢᄙ↪ߐࠇࠆ᧚ᢱߢ޽ࠆ 2//#ߣࡐ࡝ࠗࡒ࠼㧔2+㧕ߩฦ⭯⤑෸߮ૐⲢὐࠟ࡜ࠬߩ⭯᧼ߦߟ޿ߡ‫ޔ‬㊄ဳ᧚ᢱߣߒߡߪ 0K 㔚㍌⤑ߣ 5K ၮ᧼ߦߟ޿ߡ‫ޔ‬ᾲᯏ᪾ಽᨆᴺ‫ޔ‬శߡߎᴺ‫ޔ₸ࠣࡦࡗޔߡ޿↪ࠍ╬࠲ࡦ࠺ࡦࠗࡁ࠽ޔ‬ᱷ⇐ᔕജ‫ޔ‬෸߮ᾲ⤘ᒛ₸࠺࡯࠲ࠍណขߒߚ‫ޕ‬ᐔᚑ  ᐕᐲߩ⎇ⓥ㐿⊒ߢߪ‫↪࠻ࠬࠫ࡟ޔ‬ᚑᒻ᧚ᢱߣߒߡ 2//# ߣ 2+ ࠍ‫ޔ‬శቇ⚛ሶ↪ᚑᒻ᧚ᢱߣߒߡૐⲢὐߩ 51)㧔5RKPQP)NCUU㧕⭯⤑ࠍ‫ޔ‬㊄ဳ᧚ᢱߣߒߡ 0K 㔚㍌⤑ߣ 5K ၮ᧼ࠍኻ⽎ߣߒߡ‫⴫ࠩ࡯࡟ޔ‬㕙ᒢᕈᵄᴺ‫ޔ࠲ࡦ࠺ࡦࠗࡁ࠽ޔ‬శߡߎᴺ╬ࠍ↪޿ߡ‫ޔ‬ᯏ᪾⊛࡮ᾲ⊛‛ᕈ࠺࡯࠲ࠍណขߒߚ‫ᧄޕ‬ᐕᐲߪ․ߦⶄᢙ⒳㘃ߩ⹏ଔⵝ⟎ࠍ↪޿ߡ᷹ቯߒ‫‛ޔ‬ᕈ࠺࡯࠲ߩᲧセࠍታᣉߒߚ‫⚿ߩࠄࠇߎޔߚ߹ޕ‬ᨐࠍ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬߦ⚵ߺㄟࠎߛ‫ޕ‬ ᚑᨐߩ⹦⚦㧨ᐔᚑ 17 ᐕᐲᚑᨐ㧪ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻↪ᚑᒻ᧚ᢱߣ㊄ဳ᧚ᢱߦߟ޿ߡߩᯏ᪾⊛࡮ᾲ⊛‛ᕈ࠺࡯࠲ࠍណขߒ
ߚ‫ޕ‬2//# ߣ 2+ ߦߟ޿ߡߪ‫ޔ‬5K ၮ᧼਄ߦࠬࡇࡦࠦ࡯࠹ࠖࡦࠣߣ὾ᚑߦࠃࠅᒻᚑߒߚ⹜ᢱࠍ

η- 57↪޿ߡ‫⸅ߣ࠲ࡦ࠺ࡦࠗࡁ࠽ޔ‬㊎ᴺߦࠃࠅࡗࡦࠣ₸ߣᱷ⇐ᔕജࠍ᷹ቯߒߚ‫ޕ‬ૐⲢὐࠟ࡜ࠬߣ
5K ၮ᧼ߦߟ޿ߡߪ‫ࠅࠃߦࠣࡦࠪࠗ࠳ޔ‬ಾࠅ಴ߒߚ⹜ᢱࠍ↪޿ߡ‫ޔ‬ᾲᯏ᪾ಽᨆᴺߦࠃࠅᾲ⤘ᒛ₸ࠍ᷹ቯߒߚ‫ޕ‬0K 㔚㍌⤑ߦߟ޿ߡߪ‫ޔ‬5K ၮ᧼਄ߦᒻᚑߒߚ⹜ᢱࠍ↪޿ߡ‫ࡦ࠺ࡦࠗࡁ࠽ޔ‬࠲ߣశߡߎᴺߦࠃࠅࡗࡦࠣ₸ߣౝㇱᔕജࠍ᷹ቯߒ‫ޔ‬ᾲ⤘ᒛ₸ࠍ▚಴ߒߚ‫⹏ޔ߅ߥޕ‬ଔⵝ⟎ߣߒߡߪ‫ ޔ‬ᩣ ᣣ┙⵾૞ᚲ߇଻᦭ߔࠆ⸅㊎ᑼᔕജ⹏ଔⵝ⟎‫ޔ‬෸߮ᄖㇱ⸃ᨆᯏ㑐ߩశߡߎᑼ
ᔕജ⹏ଔⵝ⟎‫ޔ࠲ࡦ࠺ࡦࠗࡁ࠽ޔ‬෸߮ᾲᯏ᪾ಽᨆⵝ⟎ࠍ↪޿ߚ‫ޕ‬
⴫ 3-5-7 ߦ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬ⹏ଔౝኈࠍ߹ߣ߼ߡ␜ߔ‫ޕ‬
⴫ 3-5-7㩷 ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬ⹏ଔౝኈ㧔ᐔᚑ 17 ᐕᐲ㧕

⚛᧚

ࡄ࡜ࡔ࡯࠲

ࡗࡦࠣ₸

ᱷ⇐ᔕജ

ᾲ⤘ᒛ₸

PMMA

⤑ෘ㧟᧦ઙ

㩏㩓㨼㩧㩍㩨㩧㩊

⸅㊎ᴺ



PI

‫ޖ‬

‫ޖ‬

‫ޖ‬



Ni 㔚㍌⤑

㔚ᵹኒᐲ㧟᧦ઙ

‫ޖ‬

శߡߎᴺ

శߡߎᴺ

ૐⲢὐ㩀㩨㩡㩇

㩔㩩㨼㩤㨹㩂㩇‫ޔ‬⍹⧷

̆

̆

ᾲᯏ᪾

Si

ᣇ૏㧟⒳㘃

̆

̆

ಽᨆᴺ

(1)⭯⤑

(2)⭯᧼

  ‫⹜ޣ‬㛎ᒻ⁁‫ޤ‬(1)⭯⤑㧦ࠦ࡯࠻᧚㧦⋥ᓘ 100mmSi ၮ᧼਄‫ޔ‬ෘߐᢙǴm(2)⭯᧼㧦ࡃ࡞ࠢ᧚㧦᏷㧠mm‫ޔ‬㐳ߐ 25㨙㨙‫ޔ‬ෘߐ 0.5mm
࿑ 3-5-53 ߦ㊄ဳ᧚ᢱߣߒߡ↪޿ࠄࠇࠆ Ni 㔚㍌᧚ߩࡗࡦࠣ₸᷹ቯ࠺࡯࠲ࠍ‫ޔ‬࿑ 3-5-54 ߦᔕജ᷹ቯ଀ࠍ␜ߔ‫ޕ‬Ni 㔚㍌⤑ߩࡗࡦࠣ₸⹏ଔߢߪၮ᧼ߩᓇ㗀ߦࠃࠆࠗࡦ࠺ࡦ࠲ߩ᛼ㄟߺᷓߐ
ଐሽᕈ߇⹺߼ࠄࠇࠆ‫ߣ₸ࠣࡦࡗޕ‬ᔕജߩ᷹ቯ⚿ᨐ߆ࠄᾲ⤘ᒛ₸ࠍ▚಴ߔࠆߣ‫ޔ‬8㨪10 ppm/͠ߣߥࠅ‫ߩ᧚ࠢ࡞ࡃޔ‬୯㧔13ppm/͠㧕ߦኻߒ 3 ഀ߶ߤૐ޿୯߇ᓧࠄࠇߚ‫ޕ‬

η- 58

300
㪠㪛㩷㪥㫆㪅㩷㪑㩷㪢㪢㪉㪈㪇㪍㪉㩷ㅊട㽲㩷V㩷㩿㪤㪧㪸㪀㩷㪔㩷㩿㪉㪋㪋㪅㪋㪐㪎㪍㪏㫧㪉㪅㪍㪉㪍㪇㪋㪀㩷㪂㩷㩿㪄㪈㪅㪋㪋㪐㪈㪊㫧㪇㪅㪇㪊㪈㪐㪍㪀㩷㪫㩷㩿㷄㪀㪉㪌㪇

KK21063
㪉㪇㪇

100

㪈㪌㪇

㩷

㪪㫋㫉㪼㫊㫊㩷㩿㪤㪧㪸㪀

Modulus (GPa)

200

㪈㪇㪇

㪌㪇

N
M

0

㪇

S

0

㪇

㪌㪇

㪈㪇㪇

㪈㪌㪇

㪫㪼㫄㫇㪼㫉㪸㫋㫌㫉㪼㩷㩿㷄㪀

1000
2000
3000
Displacement Into Surface (nm) 

࿑ 3-5-53㩷 ࠽ࡁࠗࡦ࠺ࡦ࠲ߦࠃࠆ    ࿑ 3-5-54㩷 శߡߎᴺߦࠃࠆᔕജ᷹ቯ଀
Ni 㔚㍌᧚ߩࡗࡦࠣ₸᷹ቯ࠺࡯࠲

࿑ 3-5-55 ߦࠟ࡜ࠬࡃ࡞ࠢ᧚ߩᾲ⤘ᒛ₸ࠍ‫ޔ‬࿑ 3-5-56 ߦ Si ࡃ࡞ࠢ᧚ߩᾲ⤘ᒛ₸ࠍ␜ߔ‫ޕ‬ࡄࠗ࡟࠶ࠢࠬࠟ࡜ࠬߢߪ‫ޔ‬Si ࡃ࡞ࠢ᧚ߦㄭ޿ᢙ୯߇ᓧࠄࠇߡ޿ࠆ‫ޔߚ߹ޕ‬Si ࡃ࡞ࠢ᧚ߢߪ‫ޔ‬ᐔဋ✢ᾲ⤘ᒛ₸䇭䋨㫇㫇㫄㪆㷄䋩⚿᥏ᣇ૏ߦࠃࠆᏅ⇣ߪ߶ߣࠎߤ⹺߼ࠄࠇߥ߆ߞߚ‫ޕ‬㪌㪅㪇㪋㪅㪇䍨䍽䍐䍸䍍䍖䍛

㪊㪅㪇
㪉㪅㪇

⍹⧷

㪈㪅㪇
㪇㪅㪇
㪇

㪉㪇㪇

㪋㪇㪇

㪍㪇㪇

᷷ᐲ▸࿐䇭䋨㷄䋩

࿑ 3-5-55 ࠟ࡜ࠬࡃ࡞ࠢ᧚ߩᾲ⤘ᒛ₸

η- 59

㪏㪇㪇

ᐔဋ✢ᾲ⤘ᒛ₸䇭㩿㫇㫇㫄㪆㷄䋩

㪌㪅㪇
㪋㪅㪇
㪊㪅㪇
㪉㪅㪇

䂾䇭㪲㪈㪇㪇㪴

㪈㪅㪇䂔䇭㪲㪈㪈㪈㪴

䂦䇭㪲㪈㪈㪇㪴

㪇㪅㪇
㪇

㪉㪇㪇

㪋㪇㪇

㪍㪇㪇

㪏㪇㪇

㪈㪇㪇㪇

㪈㪉㪇㪇

᷷ᐲ▸࿐䇭䋨㷄䋩

࿑ 3-5-56 Si ࡃ࡞ࠢ᧚ߩᾲ⤘ᒛ₸㧨ᐔᚑ  ᐕᐲᚑᨐ㧪⴫  ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬ⹏ଔౝኈ㧔ᐔᚑ  ᐕᐲ㧕


(1)⭯⤑

(2)⭯᧼

⚛᧚

ࡄ࡜ࡔ࡯࠲

ࡗࡦࠣ₸

ᱷ⇐ᔕജ

ᾲ⤘ᒛ₸

PMMA

⤑ෘ

⴫㕙ᒢᕈᵄᴺ㩏㩓㨼㩧㩍㩨㩧㩊

̆

̆

PI

‫ޖ‬

̆

̆

⸅㊎ᴺ

̆

Ni 㔚㍌⤑

ᚑ⤑᧦ઙ̆㩏㩓㨼㩧㩍㩨㩧㩊

శߡߎᴺ

శߡߎᴺ

SOG

̆

⴫㕙ᒢᕈᵄᴺ㩏㩓㨼㩧㩍㩨㩧㩊

̆̆Si(111)ၮ᧼

⴫㕙ᒢᕈᵄᴺ̆̆̆⴫ 3-5-9 ߦ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬ⹏ଔ⚿ᨐࠍ೨ᐕᐲಽ߽߹ߣ߼ߡ␜ߔ‫ޕ‬ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻↪ᚑᒻ᧚ᢱߣ㊄ဳ᧚ᢱߦߟ޿ߡߩᯏ᪾⊛࡮ᾲ⊛‛ᕈ࠺࡯࠲ࠍណขߒ
ߚ‫᧚ߦ  ⴫ޕ‬ᢱ࠺࡯࠲ࡌ࡯ࠬ⹏ଔౝኈࠍ߹ߣ߼ߡ␜ߔ‫ޕ‬2//# ߣૐⲢὐࠟ࡜ࠬߦߟ޿ߡ
ߪ‫⴫ࠩ࡯࡟ޔ‬㕙ᒢᕈᵄᴺߣ࠽ࡁࠗࡦ࠺ࡦ࠲ߦࠃࠅࡗࡦࠣ₸ࠍ᷹ቯߒߚ‫ᧄޕ‬ᐕᐲߪૐⲢὐࠟ
࡜ࠬߩ⭯⤑᧚ߣߒߡ 51) ⤑ࠍኻ⽎ߣߒߚ‫ޕ‬2+ ߦߟ޿ߡߪ‫⸅ޔ‬㊎ᴺߦࠃࠅᱷ⇐ᔕജࠍ᷹ቯߒ
ߚ‫ޕ‬0K 㔚㍌⤑ߦߟ޿ߡߪ‫ⶄޔ‬ᢙߩ㔚㍌ࡔ࡯ࠞ࡯ߢᚑ⤑ߐࠇߚ⭯⤑ߦኻߒ‫࠲ࡦ࠺ࡦࠗࡁ࠽ޔ‬
ߣశߡߎᴺࠍ↪޿ߡࡗࡦࠣ₸ߣౝㇱᔕജࠍ᷹ቯߒ‫ޔ‬ᾲ⤘ᒛ₸ࠍ▚಴ߒߚ‫ ߡోߪ᧚⤑⭯ޕ‬5K
ၮ᧼ߦࠬࡇࡦࠦ࡯࠻὾ᚑ޽ࠆ޿ߪ㔚㍌ߦࠃࠅᒻᚑߒߡ߅ࠅ‫ޔ‬ෘߐߪᢙǴO ⒟ᐲߢ޽ࠆ‫ޔ߅ߥޕ‬⹏ଔⵝ⟎ߣߒߡߪ‫↥ ⁛ ޔ‬ᬺᛛⴚ✚ว⎇ⓥᚲ߇᭴▽ߒߚ᧚ᢱ‛ᕈ࠺࡯࠲⸘᷹ታ㛎ⅣႺߣߒ
ߡߩ࡟࡯ࠩ⴫㕙ᒢᕈᵄᴺߣ࠽ࡁࠗࡦ࠺ࡦ࠲‫ ޔ‬ᩣ ᣣ┙⵾૞ᚲ߇଻᦭ߔࠆ⹏ଔⵝ⟎ߢ޽ࠆ⸅㊎ᑼᔕജ⹏ଔ‫ޔ‬෸߮ᄖㇱ⸃ᨆᯏ㑐ߩశߡߎᴺࠍ↪޿ߚ‫ޕ‬࡟࡯ࠩ⴫㕙ᒢᕈᵄᴺߪ⎬޿ᒢᕈ᧚ᢱߦㆡߒߚ⹏ଔᴺߢ޽ࠆ߇‫੹ޔ‬࿁ PMMA ᮸⢽ߣ SOG

η- 60὾ᚑ⤑ߩ⹏ଔߦㆡ↪ߒߚߣߎࠈ‫⹏࠲ࡦ࠺ࡦࠗࡁ࠽ޔ‬ଔߣห᭽ߩ୯߇ᓧࠄࠇߚߩߢ‫᦭ޔ‬ᗧߥ࠺㧙࠲߇ᓧࠄࠇߡ޿ࠆߣ⠨߃ࠆ‫ޔߛߚޕ‬SOG ߦߟ޿ߡߪ‫⴫ߪߢ࠲ࡦ࠺ࡦࠗࡁ࠽ޔ‬㕙ᒢᕈᵄᴺߩ 1/2 ⒟ᐲߩ߆ߥࠅૐ޿ᢙ୯ߣߥߞߚ‫ߩߎޕ‬ේ࿃ߪ‫᧚ߢ࠲ࡦ࠺ࡦࠗޔ‬ᢱࠍ᛼ߒㄟࠎߛ㓙ߦ
SOG ߇ᄙሹ⾰ߢ޽ࠆߚ߼ᄌᒻ߇⊒↢ߒߚߩߢߪߥ޿߆ߣផ᷹ߐࠇࠆ‫ޕ‬ శߡߎᴺߦࠃࠆ Ni 㔚㍌⤑ߩ⹏ଔߢߪ‫ޔ‬ᚑ⤑ߔࠆࡔ࡯ࠞ࡯ߦࠃߞߡᱷ⇐ᔕജߪᄢ߈ߊ⇣ߥࠆ⚿ᨐߣߥߞߚ߇‫ ⚂߽₸ࠣࡦࡗࠆࠃߦ࠲ࡦ࠺ࡦࠗࡁ࠽ޔ‬2 ഀ⒟ᐲᢙ୯߇⇣ߥࠅ‫ߩࠄࠇߘޔ‬⚿ᨐ߆ࠄ▚಴ߐࠇࠆᾲ⤘ᒛ₸ߪ㧝ഀ⒟ᐲߩ㆑޿ߦߣߤ߹ߞߚ‫ߚ߹ޕ‬ᢙ୯⥄૕ߪ‫᧚ࠢ࡞ࡃޔ‬ߩ୯㧔13 ppm/͠㧕ߦኻߒ 2㨪3 ഀૐ޿୯ߣߥߞߚ‫ߩߎޕ‬ේ࿃ߪ‫ޔ‬㔚㍌⤑߇ᄙሹ⾰ߦߥߞߡ޿ࠆߚ߼ߣផ᷹ߐࠇࠆ‫ޕ‬ ᓧࠄࠇߚ᧚ᢱ࠺࡯࠲ߪ‫ޔ‬MEMS-ONE ߩ᧚ᢱ࡮ࡊࡠ࠮ࠬ࠺࡯࠲ࡌ࡯ࠬߦ⚵ߺㄟࠎߛ‫ޕ‬
⴫ 3-5-9㩷 ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬ⹏ଔ⚿ᨐ߹ߣ߼
᧚ᢱ

䊌䊤䊜䊷䉺

⹏ଔᣇᴺ

PMMA

ෘ䈘䋺0.4-0.9㱘m⴫㕙ᒢᕈᵄᴺ䊅䊉䉟䊮䊂䊮䉺
⸅㊎ᑼᔕജ⹏ଔ
శ䈩䈖ᴺ䊅䊉䉟䊮䊂䊮䉺
శ䈩䈖ᴺ䊅䊉䉟䊮䊂䊮䉺
⴫㕙ᒢᕈᵄᴺ䊅䊉䉟䊮䊂䊮䉺
ᾲᯏ᪾ಽᨆᴺห਄⴫㕙ᒢᕈᵄᴺᾲᯏ᪾ಽᨆᴺPIෘ䈘䋺4㱘m⭯ Ni㔚㍌⤑A ෘ䈘䋺1㱘mA␠ᚑ⤑⤑ Ni㔚㍌⤑B ෘ䈘䋺1㱘m
B␠ᚑ⤑SOG
ෘ䈘䋺0.3㱘m
100㷄὾ᚑ
䍨䍽䍐䍸䍍䍖䍛䍔䍼䍵䍛

⭯
᧼

⍹⧷䉧䊤䉴

Si

䋨111䋩ၮ᧼
䋨100䋩,䋨110䋩,䋨111䋩

䊟䊮䉫₸
(GPa)
5.1-5.3
5.8-6.6

200-220150-190
6.4-7.8
2.9-3.1䊘䉝䉸䊮Ყ
䋨0.3䋩*
䋨0.3䋩
䋨0.3䋩
䋨0.3䋩
䋨0.3䋩
䋨0.3䋩
䋨0.3䋩
䋨0.3䋩

ኒᐲ
ౝㇱᔕജ
(103kg/m3) (MPa)䋨1.19䋩

ᾲ⤘ᒛ₸(ppm/㷄)46-48䋨RT)
40-1109-11 (40-120㷄)

140-230

8-10 (40-120㷄)

䋨1.4䋩
3.2-3.5䋨RT-500㷄䋩
0.6-0.8䋨RT-600㷄䋩

181-182

䋨0.3䋩

䋨2.23䋩
2.9-4.0 (RT-1000㷄)䋪䋨䇭䋩ౝ䈱ᢙ୯䈲䇮᷹ቯ䈮ᔅⷐ䈭‛ᕈ୯䈪䇮䊋䊦䉪᧚䈱ౖဳ୯䉕૶↪䇯  ᚑᨐߩᗧ⟵ ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ߩࡊࡠ࠮ࠬࠪࡒࡘ࡟࡯࡚ࠪࡦߦᔅⷐߥ᧚ᢱ࠺࡯࠲ࡌ࡯ࠬࠍ᭴▽ߒߚ‫ޕ‬࠽ࡁࠗࡦࡊ࡝ࡦ࠻ᚑᒻ᧚ᢱࠍḰ஻ߔࠆ႐วߦ૶↪ߐࠇࠆ⭯⤑ࡊࡠ࠮ࠬߦࠃࠅᒻᚑߒߚ 2//#‫ޔ‬
2+㧔ࡐ࡝ࠗࡒ࠼㧕‫ޔ‬෸߮ૐⲢὐࠟ࡜ࠬ⭯⤑ࠍ‫ߚ߹ޔ‬㊄ဳ↪ᚑᒻ᧚ᢱߣߒߡ‫ޔ‬0K 㔚㍌⤑‫ޔ‬5K
ၮ᧼ࠍኻ⽎ߣߒߡ‫ߦࡦ࡚ࠪ࡯࡟ࡘࡒࠪࠬ࠮ࡠࡊޔ‬ᔅⷐߥ᧚ᢱߩࡗࡦࠣ₸‫ޔ‬ᱷ⇐ᔕജ‫ޔ‬෸߮ᾲ⤘ᒛ₸ߩ࠺࡯࠲ࡌ࡯ࠬࠍ᭴▽ߒߚ‫⹏ޔߚ߹ޕ‬ଔኻ⽎᧚ᢱߦኻߒߡ‫࡟ޔ࠲ࡦ࠺ࡦࠗࡁ࠽ޔ‬࡯ࠩ⴫㕙ᒢᕈᵄᴺ‫ޔ‬శߡߎᴺ‫ޔ‬ᾲᯏ᪾ಽᨆᴺ╬‫ⶄޔ‬ᢙߩ⹏ଔᴺࠍ↪޿ߡ᷹ቯߒ‫ߩ࠲࡯࠺ޔ‬߫ࠄߟ߈߽฽߼ߡ࠺࡯࠲ࡌ࡯ࠬൻߒߚ‫ޕ‬η- 61 ᚑᨐߩ᥉෸
(1)ࡊࡠࠫࠚࠢ࠻ᦼ㑆ਛߦ߅ߌࠆ᥉෸ᵴേMEMS ↪⸳⸘࡮⸃ᨆᡰេࠪࠬ࠹ࡓቢᚑᓟߩ೑↪ߩ᜛ᄢࠍଦㅴߔࠆ⋡⊛ߢ‫ޔ‬ਅ⸥ߩᐢትᵴേࠍታᣉߒ
ߚ‫ߩߎޕ‬ᵴേߪ‫ޔ‬᥉෸ᵴേᬌ⸛ᆔຬળߣㅪ៤ߒߡታᣉߒߚ߽ߩߢ޽ࠆ‫ޕ‬
㧨H16 ᐕᐲ㧪¾ Web ᐢት‫ޔ‬ળຬ೙ࠢ࡜ࡉ
࡮‫ޟ‬MemsONE ߭ࠈ߫‫ޟ߮ࠃ߅ޠ‬MemsONE ࠢ࡜ࡉ‫ࠍࠫ࡯ࡍࡓ࡯ࡎߩޠ‬㐿⸳ߒߚ‫ޕ‬ ࡮MemsONE ࠢ࡜ࡉળຬࠍ൐㓸ߒ‫ޔ‬㧠㧜㧜ฬߩળຬࠍ㓸߼ߚ‫ޕ‬ ࡮MemsONE ࠢ࡜ࡉળຬߦ‫ޔ‬MemsONE ࠾ࡘ࡯ࠬࠍ㧟࿁⊒ାߒߚ‫ޕ‬࡮ ̌㐿⊒⠪ߩჿ̍ߣ㗴ߒߚࡔ࠶࠮࡯ࠫࠍࡊࡠࠫࠚࠢ࠻ࡔࡦࡃ࡯߆ࠄ㓸߼‫ޔ‬MemsONE ࠢ࡜ࡉળຬߦ
㧟࿁⊒ାߒߚ‫ޔߚ߹ޕ‬૬ߖߡ‫ޟ‬MemsONE ߭ࠈ߫‫ߦޠ‬ឝ␜ߒߚ‫ޕ‬
㧨H17 ᐕᐲ㧪¾ Web ᐢት‫ޔ‬ળຬ೙ࠢ࡜ࡉ
࡮H16 ᐕᐲߦᒁ⛯߈̌㐿⊒⠪ߩჿ̍ߣ㗴ߒߚࡔ࠶࠮࡯ࠫࠍࡊࡠࠫࠚࠢ࠻ࡔࡦࡃ࡯߆ࠄ㓸߼‫ޔ‬MemsONE
MemsONE ࠢ࡜ࡉળຬߦ  ࿁⊒ାߒߚ‫ޔߚ߹ޕ‬૬ߖߡ‫ޟ‬MemsONE ߭ࠈ߫‫ߦޠ‬ឝ␜ߒߚ‫ޕ‬¾ MEMS 㑐ㅪዷ␜ળ಴ዷ‫ޔ‬ᚑᨐ⊒⴫ળ࡮ࡊࡠࠫࠚࠢ࠻ߩਛ㑆ᦼߦ߅ߌࠆᚑᨐ⊒⴫ࠍᐢትᵴേߩ৻Ⅳߣߒߡ㐿௅ߒ‫ޔ‬MemsONE ࠍᐢߊ⚫੺ߔࠆߣߣ߽ߦ‫ࠩ࡯࡙ޔ‬ᗧ⷗ߩ෼㓸ߣ MemsONE ࠢ࡜ࡉળຬ൐㓸ࠍⴕߞߚ‫ޕ‬H17 ᐕᐲߪ  ฬᒙߩળຬߣߥߞߡ޿ࠆ‫ޕ‬ᧄᚑᨐ⊒⴫ળߪࡑࠗࠢࡠࡑࠪࡦዷ㧔2005.11.9㨪11.11㧕ߩ႐ࠍ೑↪ߒߡ㐿௅ߒ‫ౕޔ‬૕⊛ߦߪએਅߩౝኈ
ߢታᣉߒߚ‫ޕ‬࡮ᚑᨐ⊒⴫ળ㧔ᦨ⚳ᣣߩ 11 ᦬ 11 ᣣߦ㐿௅㧕ߢߪ‫ޔ‬MemsONE ߩᯏ⢻࡮․ᓽ࡮ᵴ↪ᣇᴺ࠺ࡕࠍ⚫੺ߒ‫ޔ‬ߎߩ႐ߦ߅޿ߡ⾰⇼ᔕ╵߅ࠃ߮ࠕࡦࠤ࡯࠻ߦࠃࠆᖱႎ෼㓸ߣ MemsONE ࠢ࡜ࡉ࡙࡯ࠩࠍ൐ߞߚ‫ޕ‬࡮ࡑࠗࠢࡠࡑࠪࡦዷߢߪ‫ߩࠬࠗࡃ࠺࡯࡜ࡒޔ‬ታ‛ߣ⸃ᨆ଀ߩዷ␜‫࡞ࡀࡄޔ‬ዷ␜‫࠻࠶࡟ࡈࡦࡄޔ‬㈩Ꮣࠍ
ⴕ޿‫ੌ⚳࠻ࠢࠚࠫࡠࡊޔ‬ᓟߩ᥉෸ߦะߌߡ MemsONE ࠍᐢߊ⚫੺ߒߚ‫ޕ‬એ਄ߩࡑࠗࠢࡠࡑࠪࡦዷߦ߅ߌࠆᚑᨐߪ‫ޔ‬ᚑᨐ⊒⴫ળߩෳട⠪ 215 ฬ‫࠻࡯ࠤࡦࠕޔ‬࿁╵⠪ 93 ฬ‫ޔ‬ᣂⷙ MEMS-ONE ࠢ࡜ࡉ࡙࡯ࠩ 23 ฬ‫ࡦࠪࡑࡠࠢࠗࡑޔ‬ዷ౉႐⠪ߪߎࠇ߹ߢᦨ㜞ߩ 9000 ฬ⿥ߢ޽ߞߚ‫ޕ‬¾ ‫ޟ‬MEMS-ONE㧔ࡔࡓࠬࡢࡦ㧕‫ߡߦޠ‬໡ᮡࠍขᓧ 㧔⽷㧕ࡑࠗࠢࡠࡑࠪࡦ࠮ࡦ࠲࡯ߦߡ MEMS-ONE㧔ࡔࡓࠬࡢࡦ㧕ߩ໡ᮡࠍขᓧ
 㧨H18 ᐕᐲ㧪․ߦ‫⚳ᦨޔ‬ᐕᐲߢ޽ࠆᐔᚑ  ᐕᐲߪ㊀ὐ⊛ߦࠗࡌࡦ࠻ࠍታᣉߒ‫ޔ‬MemsONEࠍᐢߊ⚫੺ߒߚ‫ޕ‬θ́1

¾ Web ᐢት‫ޔ‬ળຬ೙ࠢ࡜ࡉ
 ࡮H17 ᐕᐲߦᒁ⛯߈‫ޔ‬MemsONE ࠢ࡜ࡉળຬࠍ൐㓸ߒ‫ޔ‬ળຬᢙ 800 ฬߦ߹ߢ᜛ᄢߒߚ‫ޕ‬ળຬߦߪࡊࡠࠫࠚࠢ࠻ߩ㐿⊒⁁ᴫ߿࡝࡝࡯ࠬ࡮ࠗࡌࡦ࠻ᖱႎ╬ࠍㅙᰴ㈩ାߒߚ‫ޕ‬ 9GD ߩᵴ↪ࡎ࡯ࡓࡍ࡯ࠫ‫ޟ‬MemsONE ߭ࠈ߫‫ࠍޠ‬ㅙᰴᦝᣂߒ‫߿ࠬࠢ࠶ࡇ࠻ߩ࠻ࠢࠚࠫࡠࡊޔ‬㐿⊒⠪ߩჿ‫ޔ‬
MemsONE㐿⊒⁁ᴫ‫ޔ‬ǩߩ㈩Ꮣ⸘↹࡮౉ᚻᣇᴺ‫ޔ‬ǩߩ↳ߒㄟߺฃઃ࡮ࠕ࠶ࡊ࠺࡯࠻ଐ㗬‫ޔ‬Ǫߩ㈩Ꮣ᩺ౝ‫ߩߤߥޔ‬ᖱႎ⊒ା߅ࠃ߮ฃାߦࠃࠅ‫ޔ‬MemsONEࠍᐢߊ⚫੺ߔࠆߣߣ߽ߦ‫ޔ‬MemsONE࡙࡯ࠩߩ₪ᓧࠍ࿑ߞߚ‫ޕ‬                   









࿑ 3-6-1㧦MemsONE߭ࠈ߫‫ޔ‬MemsONEࠢ࡜ࡉ ᧪ᐕᐲએ㒠ߩ᥉෸ᵴേߦ߅޿ߡ߽‫ࠍࠫ࡯ࡍࡓ࡯ࡎޔ‬ᵴ↪ߒߚᖱႎ⊒ା߅ࠃ߮ฃାߪ㊀ⷐߢ޽ࠆ‫߆ߒޕ‬ߒ‫ࠍ࠻ࠢࠚࠫࡠࡊޔߪࠫ࡯ࡍࡓ࡯ࡎߩ⁁⃻ޔ‬ਛᔃߦ᭴ᚑߐࠇߡ޿ࠆߚ߼‫᧪ޔ‬ᐕᐲએ㒠ߩ᥉෸ᒻᘒߦวࠊ
ߖߚ৻ᣂ߇ᔅⷐߣߥࠆ‫ޕ‬ ࡔ࡯࡝ࡦࠣ࡝ࠬ࠻ߩᵴ↪ 
MemsONE ࠢ࡜ࡉળຬ↪ࡔ࡯࡝ࡦࠣ࡝ࠬ࠻ࠍᵴ↪ߒߡ‫ޔ‬ળຬߩ൐㓸ࠍ࿑ࠆߣߣ߽ߦ‫࠻ࠢࠚࠫࡠࡊޔ‬ߩ࠻ࡇ࠶ࠢࠬ߿㐿⊒⠪ߩჿ‫ޔ‬MemsONE㐿⊒⁁ᴫ‫ޔ‬ǩߩ㈩Ꮣ⸘↹߿౉ᚻᣇᴺߥߤߩᖱႎࠍቯᦼ⊛ߦ⊒ାߒ‫ޔ‬MemsONE࡙࡯ࠩߩ₪ᓧࠍ࿑ߞߚ‫ޕ‬ߎࠇࠄߩᵴേ߆ࠄ‫ޔ‬MemsONE ࠢ࡜ࡉળຬߪ೨ᐕᐲ  ฬჇߩ  ฬ‫ޔ‬ǩࠍ㆐ᚑߔࠆߎߣ߇ߢ߈ߚ‫ߩߎޕ‬₪ᓧ࡙࡯ࠩߪ‫᧪ޔ‬ᐕᐲߦ㗏Ꮣߔࠆ Ǫ⊒ⴕ࡜ࠗ࠮ࡦࠬᢙ ߩ࡙࡯ࠩߣߒߡ‫ޔ‬ᄢ߈ߥᦼᓙ߇

ᜬߚࠇߡ޿ࠆ‫ޕ‬
¾ MEMS 㑐ㅪዷ␜ળ಴ዷ‫ޔ‬ᚑᨐ⊒⴫ળ࡮ᚑᨐ⊒⴫ળࠍ㐿௅ߒߡ‫ޔ‬MemsONE ࠍᐢߊ⚫੺ߔࠆߣߣ߽ߦ‫ߩࠩ࡯࡙ޔ‬ᗧ⷗ࠍ෼㓸ߒ‫ࠢࠚࠫࡠࡊޔ‬࠻ᚑᨐǪ߳ߩ෻ᤋࠍ࿑ߞߚ‫ޕ‬ෳട⠪ߪᤓᐕࠍ਄࿁ࠆ  ฬߣ⋓ᄢߢ޽ߞߚ‫ޕ‬ ࡮㔚᳇ቇળࠪࡦࡐࠫ࠙ࡓ㧔㜞᧻㧕‫ޔ‬㑐⷏⸳⸘⵾ㅧ࠰࡝ࡘ㧙࡚ࠪࡦዷ㧔ᄢ㒋㧕‫ࡦࠪࡑࡠࠢࠗࡑޔ‬ዷ㧔᧲੩㧕‫ޔ‬࠽ࡁ࠹ࠢ 2006㧔᧲੩㧕ߦ಴ዷߒ‫ࠝ࠺ࡆޔࡦ࡚ࠪ࡯࠹ࡦ࠯࡟ࡊޔࡕ࠺ޔ‬᡼ᤋ‫࡞ࡀࡄޔ‬ዷ␜‫ࡈࡦࡄޔ‬θ́2

࡟࠶࠻㈩Ꮣࠍⴕ޿ MemsONE ࠍᐢߊ⚫੺ߒߚ‫ޕ‬  ¾ ࡆ࠺ࠝ೙૞ ᧄࡆ࠺ࠝߪ‫ߦ᦬ ޔ‬㐿௅ߐࠇࠆࡑࠗࠢࡠࡑࠪࡦዷࠍ࠲࡯ࠥ࠶࠻ߦ‫ޔ‬᥉෸ᵴേᬌ⸛ᆔຬળ߅ࠃ߮੐ോዪ
ߩࡔ࡯ࡃ߇ਛᔃߣߥߞߡ  ࡩ᦬એ਄ࠍដߌߡ೙૞ߒߚ߽ߩߢ޽ࠆ‫ޕ‬᭴ᚑߪᄢ೎ߒߡਅ⸥  ✬߆ࠄߥࠆ‫ޕ‬
ᇦ૕ߪ &8& ߢ‫✬ޔ‬Ფ߹ߚߪో✬ࠍㅪ⛯⊛ߦ᡼ᤋߔࠆߎߣ߇น⢻ߢ޽ࠆ‫ ޕ‬  ࡊࡠࠫࠚࠢ࠻ߩ⚫੺✬  MemsONEᯏ⢻ߩ⚫੺✬  ㆇ↪ࠨࡐ࡯࠻૕೙✬ ᧄࡆ࠺ࠝߪ‫ࡦࠪࡑࡠࠢࠗࡑޔ‬ዷ‫ޔ‬ᚑᨐ⊒⴫ળ‫ߢ  ࠢ࠹ࡁ࠽ޔ‬ᵴ↪ߒ‫᧪ޔ‬႐⠪ߩ⋡ࠍᒁߊᄢ߈ߥല
ᨐ߇޽ߞߚ‫ࠝ࠺ࡆᧄޔ߅ߥޕ‬೙૞ߦᒰߚߞߡߪ‫᧪ޔ‬ᐕᐲએ㒠ߩ᥉෸੐ᬺߢߩ೑↪߽ⷞ㊁ߦ౉ࠇߡ✬᭴ᚑࠍⴕߞߡ޿ࠆ߇‫᧪ޔ‬ᐕᐲએ㒠ߩ೑↪਄‫ߪ੺⚫ߩ࠻ࠢࠚࠫࡠࡊޔ‬ਇⷐߢ޽ࠆߎߣ߿ᯏ⢻ㅊട‫ޔ‬ㆇ↪ࠨࡐ࡯࠻ߩౕ૕ൻ╬ߦ઻߁৻ㇱୃᱜ߇ᔅⷐߣߥࠆ‫ޕ‬એਅߦ‫৻ߩࠝ࠺ࡆޔ‬ㇱ␜ߔ‫ޕ‬













   
࿑ 3-6-2㧦ࡆ࠺ࠝߩ৻ㇱ
¾ ࡄࡦࡈ࡟࠶࠻ߩᦝᣂ ᐔᚑ  ᐕᐲߦᯏ⢻ߩㅊട㧔࿁〝㓸Ⓧൻ /'/5 ࠪࡒࡘ࡟࡯࠲㧕ߣ૕೙ߩᄌᦝ߇↢ߓߚߎߣ‫ޔ‬೨ᐕᐲ૞ᚑ
ߒߚࡄࡦࡈ࡟࠶࠻ߩ࿷ᐶ߇ήߊߥߞߚߎߣߦࠃࠅ‫ޔ‬ౝኈߩㅊടߣో૕⷗⋥ߒࠍⴕߞߡ‫ߒ࡞ࠕ࡯ࡘ࠾࡝ޔ‬ߚ‫ޕ‬ ᧄࡄࡦࡈ࡟࠶࠻ߩᦝᣂߪ‫᦬ ޔ‬ೋ߼ߦ㐿௅ߐࠇࠆ㔚᳇ቇળࠪࡦࡐࠫ࠙ࡓࠍ࠲࡯ࠥ࠶࠻ߦ૞ᚑߒ‫ޔ‬એ㒠θ́3ోߡߩࠗࡌࡦ࠻߿⺑᣿⾗ᢱߣߒߡᐢߊᵴ↪ߒߡ߈ߚ‫ޕ‬ ᧄࡄࡦࡈ࡟࠶࠻ߪ  ࡍ࡯ࠫౠሶߣߥߞߡ߅ࠅ‫࡮޿⁓ޔ⚕⴫ޔ‬૕೙‫ޔ‬ᯏ⢻᭴ᚑ‫ޔ‬ᯏ⢻ߩ․ᓽ╬ߩౝኈߢ᭴ᚑߐࠇߡ޿ࠆ‫ޕ‬એਅߦߘߩ৻ㇱࠍᷝઃߔࠆ‫ޕ‬                    







࿑ 3-6-3㧦ࡄࡦࡈ࡟࠶࠻
ߎߩࡄࡦࡈ࡟࠶࠻એᄖߦ‫ޔ‬ᯏ᭴⸃ᨆ‫⸃ࠬ࠮ࡠࡊޔ‬ᨆ‫⸃࠻ࡦ࡝ࡊࡦࠗࡁ࠽ޔ‬ᨆߣ⸒ߞߚᯏ⢻Ფߦᯏ⢻ߩ⹦⚦࡮․㐳࡮૶↪ᣇᴺ╬ࠍ➙߼ߚ # න૕ࡄࡦࡈ࡟࠶࠻ࠍ૞ᚑߔࠆ੍ቯߢ޽ߞߚ߇‫ޔ‬ኻᔕߢ߈ߥ߆ߞߚ‫ޕ‬Ǫએ㒠ߩ᥉෸ߦะߌߡߪ‫࠻࠶࡟ࡈࡦࡄߩߎޔ‬૞ᚑ߇ਇนᰳߢ޽ࠈ߁‫ޕ‬
¾ ࡄࡀ࡞ߩᦝᣂ ࡄࡦࡈ࡟࠶࠻ߣห᭽ߦ‫ޔ‬ᐔᚑ  ᐕᐲߦᯏ⢻ߩㅊട㧔࿁〝㓸Ⓧൻ /'/5 ࠪࡒࡘ࡟࡯࠲㧕ߣ૕೙ߩᄌᦝ߇
↢ߓߚߚ߼‫ޔ‬ౝኈㅊടߣో૕⷗⋥ߒࠍⴕߞߡ‫ޔ‬#ߦ࡝࠾ࡘ࡯ࠕ࡞ߒߚ‫ޕ‬ ᧄࡄࡀ࡞ߩᦝᣂߪ‫ߣ࠻࠶࡟ࡈࡦࡄޔ‬ห᭽ߦ  ᦬ೋ߼ߦ㐿௅ߐࠇࠆ㔚᳇ቇળࠪࡦࡐࠫࡘ࠙ࡓࠍ࠲࡯ࠥ
࠶࠻ߦ૞ᚑߒ‫ޔ‬એ㒠ోߡߩࠗࡌࡦ࠻ߢᐢߊᵴ↪ߒߡ߈ߚ‫ޕ‬ᧄࡄࡀ࡞ߪ‫ߩ࠻ࠢࠚࠫࡠࡊޔ‬᭎ⷐ㧔⁓޿࡮૕೙╬㧕‫ޔ‬ᯏ⢻᭎ⷐ‫ޔ‬ᯏ⢻ߩ․ᓽߩ  ᨎ᭴ᚑߣߥߞߡ޿ࠆ‫ޕ‬એਅߦߘߩ৻ㇱࠍᷝઃߔࠆ‫ޕ‬



θ́4



       













࿑ 3-6-㧠㧦ࡄࡀ࡞ ੹ᓟߩ᥉෸ߦะߌߡ‫ޔ‬㑐ㅪࠗࡌࡦ࠻ߦ಴ዷߒ‫ޔ‬ᐢႎᵴേߔࠆߦߪࡄࡀ࡞߇ਇนᰳߢ޽ࠆ‫ޔ߼ߚߩߎޕ‬᧪ᐕᐲએ㒠ߪᯏ⢻⚫੺ߣࠨࡐ࡯࠻૕೙࡮ᣇᴺߦ㊀߈ࠍ⟎޿ߚࡄࡀ࡞ߦ৻ᣂߔࠆᔅⷐ߇޽ࠆ‫ޕ‬
¾ ࠰ࡈ࠻࠙ࠚࠕߩࠗࡦࡈ࡜ᢛ஻ ᚑᨐ‛ߩ㈩Ꮣߦะߌߡ‫࡜ࡈࡦࠗޔ‬㧔ࡑ࠾ࡘࠕ࡞‫࡞࡯࠷ࠬࡦ࠮ࠗ࡜ޔ‬㧕ߩᢛ஻ࠍⴕߞߚ‫ޕ‬ MemsONEߩਇᱜࠦࡇ࡯ࠍ㒐ߋߚ߼‫ߩ࡯࡝࡜ࡉࠗ࡜ࠬࡦ࠮ࠗ࡜ޔ‬㐿⊒ࠍⴕߞߚ‫ߡߖࠊ޽ޕ‬㈩Ꮣᯏ㑐߇ኈᤃߦ࡜ࠗ࠮ࡦࠬࠍ⊒ⴕߔࠆߚ߼ߩ࡜ࠗ࠮ࡦࠬ⊒ⴕ࠷࡯࡞ߩ㐿⊒߽ⴕߞߚ‫ޕ‬ MemsONEǩ෸߮Ǫߩ㈩Ꮣᤨߦ‫߇ࠩ࡯࡙ޔ‬ኈᤃߦ MemsONEࠍዉ౉ߢ߈ࠆࠃ߁ߦߔࠆߚ߼‫ޔ‬࡮ ◲ᤃࠗࡦࠬ࠻࡯࡜ߩ㐿⊒࡮ ࡜ࠗ࠮ࡦࠬ↳⺧࡮⊓㍳࠷࡯࡞ߩ㐿⊒࡮ ዉ౉ࡑ࠾ࡘࠕ࡞ߩ૞ᚑ
ࠍⴕߞߚ‫ޕ‬ ߐࠄߦ‫ޔ‬MemsONEࠍዉ౉ߒߚ࡙࡯ࠩ߇හᐳߦ೑↪ߢ߈ࠆࠃ߁ߦ‫ޔ‬ฦᯏ⢻ߩ࠴ࡘ࡯࠻࡝ࠕ࡞ࡑ࠾ࡘ
ࠕ࡞ࠍ૞ᚑߒߚ‫ޕ‬ ߎࠇࠄߩࠗࡦࡈ࡜ߪ‫ ߇ࠩ࡯࡙ޔ‬MemsONEࠍዉ౉ߒࠃ߁ߣߒߚ㓙ߦᦨೋߦធߔࠆ߽ߩߢ޽ࠅ‫੹ޔ‬ᓟߩ᥉෸ଦㅴߩߚ߼ߦߪ࡙࡯ࠩ߆ࠄߩⷐᦸߩขࠅㄟߺߥߤࠍⴕ޿‫ᦝߦߩ߽޿⦟ࠅࠃޔ‬ᣂߒߡ޿ߊᔅⷐ߇޽ࠆ‫ޕ‬(2)ࡊࡠࠫࠚࠢ࠻ᦼ㑆⚳ੌᓟߩ᥉෸ᵴേ⁁ᴫ
¾ MemsONEǪ

ߩ㈩Ꮣ

θ́5

 ᧄࡊࡠࠫࠚࠢ࠻ߩᚑᨐࠍᐢߊ᥉෸ߐߖࠆߚ߼‫ޔ‬2007 ᐕ 5 ᦬ࠃࠅ MemsONEǪ 㧔ᧄࡊࡠࠫࠚࠢ࠻ߦ
ࠃࠅ㐿⊒ߒߚ࠰ࡈ࠻࠙ࠚࠕ෸߮ DB ৻ᑼ㧕ߩ㈩Ꮣࠍ 10,000 ౞ߩታ⾌ߦߡ㐿ᆎߒߚ‫੹ޕ‬ᓟߩ MemsONE੐ᬺዷ㐿ࠍൊ᩺ߒ‫ޔ‬Ǫߩฃઃߪ 2007 ᐕ 12 ᦬ 31 ᣣ߹ߢ‫ޔ‬MemsONEǪ ߩ૶↪ᦼ㒢ߪ 2008 ᐕ 3 ᦬

31 ᣣ߹ߢߣߒߚ‫ޔߚ߹ޕ‬MemsONEǪ
MemsONEǪ

೑↪⠪߆ࠄߩᗧ⷗࡮ⷐᦸࠍ෼㓸ߒ੹ᓟߩ᥉෸ߦ❬ߍࠆߚ߼‫ޔ‬ߩ↳ㄟ⠪ߦߪࠕࡦࠤ࡯࠻ࠍหኽߒߚ‫ޕ‬ ਅ⴫ߦ␜ߔߣ߅ࠅ‫ޔ‬2007 ᐕ 7 ᦬ 31 ᣣ⃻࿷ߢ࡜ࠗ࠮ࡦࠬ↳ㄟߺᢙߪ 361 ઙߢ޽ࠆ‫ޕ‬2006 ᐕ 11 ᦬ࠃࠅήᢱߢ㈩Ꮣߒߚ MemsONEǩ

ߩ⊒ⴕ࡜ࠗ࠮ࡦࠬᢙ߇⚂ 400 ઙߢ޽ߞߚߎߣࠍ⠨߃ࠆߣ‫᦭ޔ‬ఘߢ޽ࠆߦ߽߆߆ࠊࠄߕ MEMS ᛛⴚ⠪ߩ MemsONE ߦኻߔࠆᦼᓙߪ㜞ߊ‫ޔ‬᥉෸߽ㅴࠎߢ޿ࠆߣ⸒߃ࠆ‫ޕ‬
⴫ 3-6-1㧦MemsONEǪ

↳ㄟߺ⁁ᴫ㧔2007 ᐕ 7 ᦬ 31 ᣣ⃻࿷㧕↳ㄟઙᢙ㩡㨼㩈㩧㩇ᢙ

DVD ㅍઃᢙ

㩡㨼㩈㩧㩇㩁㨺⊒ⴕᢙ

㧡᦬

㧥㧣

㧞㧜㧜

㧙

㧙

㧢᦬

㧣㧜

㧝㧝㧟

㧞㧣㧜

㧝㧝㧡

㧣᦬

㧟㧣

㧠㧤

㧢㧞

㧤㧤

ว⸘

㧞㧜㧠

㧟㧢㧝

㧟㧟㧞

㧞㧜㧟

¾ MemsONE ታ⠌⻠ᐳ࡮࠮ࡒ࠽࡯ߩ㐿௅
MemsONE ࠍ࿖ౝߦᐢߊ᥉෸ߐߖࠆߚ߼ߦߪ‫ޔ‬ᠲ૞ᚻ㗅߿⸃ᨆᚻᴺߩᛛⴚ⊛ߥᡰេ߇ਇนᰳߢ޽ࠆ‫ޕ‬ߘߩߚ߼‫᧲ޔ‬੩ᄢቇߣ੩ㇺᄢቇߦߏදജ㗂߈‫ⶄޔ‬ᢙߩ PC㧔20 บ⒟ᐲ㧕ߦ MemsONEǪ ࠍࠗࡦࠬ࠻࡯
࡞ߒߚⅣႺࠍḰ஻ߒ‫ޔ‬ታ㓙ߦ PC ਄ߢ MemsONEǪ

ࠍ૶ߞߡ GUI ᠲ૞߿⸃ᨆᚻ㗅ࠍᜰዉߔࠆ

‫ޟ‬MemsONE ታ⠌⻠ᐳ‫ޕࠆ޿ߡߞⴕࠍޠ‬㐿௅ᦼ㑆ߪਅ⴫ߦ␜ߔㅢࠅ 2007 ᐕ 7 ᦬߆ࠄ 2008 ᐕ 1 ᦬߹ߢߢ޽ࠅ‫᧲ޔ‬੩ߢ 6 ࿁‫ޔ‬੩ㇺߢ 3 ࿁ࠍ੍ቯߒߡ޿ࠆ‫ޕ‬10 ᦬߹ߢߩ೨ඨߪࡈ࡟࡯ࡓࡢ࡯ࠢၮᧄᠲ૞ߣ⸃ᨆ࠰ࡈ࠻ߩ೑↪ᣇᴺࠍᜰዉߔࠆၮᧄࠦ࡯ࠬ
ࠍ㐿௅ߒ‫ޔ‬ᓟඨߩ 11 ᦬એ㒠ߪ৻ㅢࠅ૶޿ߎߥߖࠆᛛⴚ⠪ࠍኻ⽎ߦ⸃ᨆ࠰ࡈ࠻ࠍ⸳⸘࡮⎇ⓥߦ᦭ലߦᵴ
↪ߔࠆᣇᴺࠍᜰዉߔࠆᔕ↪ࠦ࡯ࠬࠍ㐿௅ߔࠆ੍ቯߢ޽ࠆ‫ޕ‬
⴫ 3-6-2㧦MemsONE ታ⠌⻠ᐳ 㐿௅ࠬࠤࠫࡘ࡯࡞㧔੍ቯ㧕
㧣᦬
᧲੩
੩ㇺ

㧙
ၮᧄ㩄㨺㩇
7/19㧔ᷣ㧕

㧤᦬

㧥᦬

㧝㧜᦬

㧝㧝᦬

㧝㧞᦬

㧝᦬

ၮᧄ㩄㨺㩇

ၮᧄ㩄㨺㩇

ၮᧄ㩄㨺㩇

ᔕ↪㩄㨺㩇

ᔕ↪㩄㨺㩇

ᔕ↪㩄㨺㩇

8/22

9/14

10/19

11/16

12/12

1/18

㧙

㧙

㧙

ၮᧄ㩄㨺㩇

㧙

9/20

ᔕ↪㩄㨺㩇
11/15

ၮᧄࠦ࡯ࠬߪ 13:00 ߆ࠄ 17:30 ߹ߢߩ 4 ᤨ㑆 30 ಽߣߒ‫ޔ‬ታ⠌ࠍਥ૕ߣߒߚࡊࡠࠣ࡜ࡓߣߒߚ‫ޕ‬એਅ
ߦ 7/19 ߦ੩ㇺߢⴕߞߚታ⠌⻠ᐳߩࡊࡠࠣ࡜ࡓࠍ␜ߔ‫ޕ‬θ́6

MemsONEǪ

ታ⠌⻠ᐳ ၮᧄࠦ࡯ࠬࡊࡠࠣ࡜ࡓ㧔੩ㇺ㧕

ਥ௅㧦⽷࿅ᴺੱࡑࠗࠢࡠࡑࠪࡦ࠮ࡦ࠲࡯㧔//%㧕⻠Ꮷ㧦ᣣᧄ࡙࠾ࠪࠬ࡮ࠛࠢ࠮࡝ࡘ࡯࡚ࠪࡦ࠭ᩣᑼળ␠㧔7'.㧕ߺߕ߶ᖱႎ✚⎇ᩣᑼળ␠㧔/*+4㧕㨇㐿௅႐ᚲ㨉  ੩ㇺᄢቇศ↰ࠠࡖࡦࡄࠬᎿቇ⎇ⓥ⑼‛ℂ♽ᩞ⥢㧞㧜㧡ภቶ  ࠕࠢ࠮ࠬ㧦 JVVRYYYM[QVQWCELRCEEGUUMOCROCRTA[JVO㨇ෳട⠪ฃઃ㨉 㨪  Ԙᢎቶߩ౉ࠅญߢฃઃߌࠍⴕߞߡਅߐ޿  ԙฃઃᤨߦ᧍ߩ⇟ภᧅߣ㗔෼ᦠࠍฃߌขߞߡਅߐ޿
㨇ၮᧄࠦ࡯ࠬ㧔 ಽ㧕㧦㨪㨉







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Ԛ㔚⸃᭴ㅧㅪᚑ⸃ᨆ

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એ ਄
7/19 ߦ੩ㇺߢታᣉߒߚ MemsONE ታ⠌⻠ᐳߦߪડᬺ 19 ฬ‫ޔ‬ቇ↢ 11 ฬߩෳട߇޽ࠅ‫ޔ‬MemsONE ߳ߩᦼᓙ߇㜞޿ߎߣ߇ુ߃ߚ‫ޕ‬ታ⠌⻠ᐳ⚳ੌᓟߩࠕࡦࠤ࡯࠻ߢ߽‫ߊࠃޟ‬ℂ⸃ߢ߈ߚ‫ߩ╬ޠ‬࿁╵߇ᄙߊ‫ޔ‬ᚑഞⵣߦ╙ 1 ࿁ߩታ⠌⻠ᐳࠍ⚳߃ࠆߎߣ߇ߢ߈ߚ‫ޕ‬ታ⠌⻠ᐳߩ㐿௅ߦࠃࠅ‫ޔ‬ೋᦼ࡙࡯ࠩߩℂ⸃ᐲ෸߮೑↪
ᗧ᰼߇ଦㅴߐࠇߡ߅ࠅ‫੹ޔ‬ᓟߩ MemsONE ᥉෸ߩߚ߼ߦ߽⛮⛯ߒߡታᣉߒߡ޿ߊᔅⷐ߇޽ࠆ‫ޕ‬

࿑ 3-6-5㧦MemsONE ታ⠌⻠ᐳ㘑᥊㧔7/19 ੩ㇺᄢቇ㧕
MemsONE ታ⠌⻠ᐳߩ㐿௅ߦวࠊߖߡ‫ޔ‬ታ⠌⻠ᐳ࠹ࠠࠬ࠻㧔ၮᧄࠦ࡯ࠬ㧕ߩ૞ᚑ߽ⴕߞߚ‫࠻ࠬࠠ࠹ޕ‬ߪ࡮ ࡈ࡟࡯ࡓࡢ࡯ࠢၮᧄᠲ૞⺑᣿ᦠ࡮ ታ⠌㧦ㅪᚑ⸃ᨆ౉㐷ߩ 2 ㇱ᭴ᚑߣߒߚ‫ޕ‬ฦ࠹ࠠࠬ࠻ߩౝኈߩ৻ㇱࠍએਅߦ␜ߔ‫ޕ‬θ́8࿑ 3-6-6㧦ࡈ࡟࡯ࡓࡢ࡯ࠢၮᧄᠲ૞⺑᣿ᦠߩᛮ☴࿑ 3-6-7㧦ታ⠌㧙ㅪᚑ⸃ᨆ౉㐷ߩᛮ☴㧙 ਄ߢㅀߴߚ MemsONE ታ⠌⻠ᐳߪ⽷࿅ᴺੱࡑࠗࠢࡠࡑࠪࡦ࠮ࡦ࠲࡯߇ਥ௅ߒߚ߽ߩߛ߇‫ޔ‬೎ᯏ㑐߇ਥ௅ߔࠆ⻠⠌ળ࡮࠮ࡒ࠽࡯ࠍᵴ↪ߒߚ᥉෸ᵴേ߽ዷ㐿ߒߡ޿ࠆ‫ౕޕ‬૕⊛ߦߪ‫ޔ‬NPO ᴺੱ CAE ᙣ⹤ળ߇ਥ௅ߔࠆ╙ 11 ࿁ਛㇱ CAE ᙣ⹤ળ㧔㐿௅ᣣ㧦2007 ᐕ 6 ᦬ 28 ᣣ㧕ߦ߅޿ߡ‫ޔ‬ᛛⴚ⻠⠌ળߣߒߡ‫ޟ‬ೋᔃ⠪ߩߚ߼ߩ MemsONE ౉㐷⻠⠌ળ‫ࠍޠ‬ታᣉߒߚ‫⻠ᧄޕ‬⠌ળߦߪ⚂ 30 ฬߩਛㇱ࿾඙ડᬺߩᛛⴚ⠪߇ෳടߒ‫ޔ‬
MemsONE ߩࠗࡦࠬ࠻࡯࡞߆ࠄࡈ࡟࡯ࡓࡢ࡯ࠢߩၮᧄᠲ૞‫ޔ‬ㅪᚑ⸃ᨆ߹ߢߩታ⠌ࠍⴕߞߚ‫ޕ‬ᦝߦ‫⽷ޔ‬࿅ᴺੱ ␹ᄹᎹ⑼ቇᛛⴚࠕࠞ࠺ࡒ࡯㧔KAST㧕ਥ௅ߩ࠮ࡒ࠽࡯ߢ MemsONE ታ⠌⻠ᐳࠍ੍ቯߒߡ߅ࠅ‫ޔ‬MemsONE ᥉෸ଦㅴߩߚ߼ߩታ⠌⻠ᐳ࡮࠮ࡒ࠽࡯ࠍ㗅ᰴડ↹ߒߡ޿ߊ੍ቯߢ޽ࠆ‫ޕ‬θ́9¾ ᐢ๔ትવ↪ࡄࡀ࡞ߩ૞ᚑ ࡊࡠࠫࠚࠢ࠻ᚑᨐ‛ߣߒߡߩǪ߇ቢᚑߒߚߎߣࠍฃߌ‫ޔ‬ታ㓙ߩ⸃ᨆ੐଀ࠍ⸥タߔࠆ‫ޔ‬MemsONE ታ⠌⻠ᐳߩ᩺ౝࠍឝタߔࠆߥߤ‫ోߩ࡞ࡀࡄޔ‬૕⷗⋥ߒࠍⴕߞߚ‫ޕ‬ ᧄࡄࡀ࡞ߩᦝᣂߪ‫ߦ᦬ ޔ‬㐿௅ߐࠇߚࡑࠗࠢࡠࡑࠪࡦ㧛MEMS ዷࠍ࠲࡯ࠥ࠶࠻ߦ૞ᚑߒ‫ޔ‬એ㒠ోߡߩࠗࡌࡦ࠻ߢᐢߊᵴ↪ߔࠆ੍ቯߢ޽ࠆ‫ޕ‬ᧄࡄࡀ࡞ߪ‫ߩ࠻ࠢࠚࠫࡠࡊޔ‬᭎ⷐ㧔⁓޿࡮૕೙╬㧕෸߮ MemsONE ታ⠌⻠ᐳߩ᩺ౝ‫ޔ‬ᯏ⢻᭎ⷐ‫⸃ޔ‬ᨆ੐଀  ᨎߩ⸘  ᨎ᭴ᚑߣߥߞߡ޿ࠆ‫ޕ‬એਅߦ૞ᚑߒߚࡄࡀ࡞ࠍᷝઃߔࠆ‫ޕ‬

࿑ 3.6-8㧦2007 ᐕᐲᣂⷙ૞ᚑࡄࡀ࡞

θ́10੹ᓟߩ᥉෸ߦะߌߡ‫ޔ‬㑐ㅪࠗࡌࡦ࠻ߦ಴ዷߒᐢႎᵴേߔࠆߦߪࡄࡀ࡞߇ਇนᰳߢ޽ࠆ‫ࠨޔ߼ߚߩߎޕ‬ࡐ࡯࠻૕೙࡮ᣇᴺߦ㊀߈ࠍ⟎޿ߚࡄࡀ࡞߽ㅊടߢ૞ᚑߔࠆᔅⷐ߇޽ࠆ‫ޕ‬¾ ዷ␜ળ߳ߩ಴ዷ
 MEMS ᛛⴚ⠪ߦኻߒߡࡊࡠࠫࠚࠢ࠻ᚑᨐ‛ߣߒߡߩ MemsONEǪ

ࠍᐢߊ⹺⍮ߐߖࠆߚ߼‫ޔ‬ዷ␜ળ߳ߩ಴ዷ੍߽ቯߒߡ޿ࠆ‫ޕ‬ዷ␜ળߢߪࡄࡀ࡞ዷ␜෸߮ࡄࡦࡈ࡟࠶࠻㈩Ꮣࠍⴕ߁ߣߣ߽ߦ‫ޔ‬Note PC ߦࠃࠆ MemsONEǪ

ߩ࠺ࡕࠍⴕ߁੍ቯߢ޽ࠆ‫ޔߚ߹ޕ‬MemsONEǪ

ߩ↳ㄟߺ↪⚕ߩ㈩Ꮣ߽ⴕ߁‫ޕ‬2007ᐕᐲߦ಴ዷࠍ੍ቯߒߡ޿ࠆዷ␜ળߪએਅߩߣ߅ࠅߢ޽ࠆ‫ޕ‬
࡮ 2007/07/25㨪2007/07/27 ࡑࠗࠢࡠࡑࠪࡦ㧛MEMS ዷ࡮ 2007/10/17㨪2007/10/18 㔚᳇ቇળ࠮ࡦࠨ࡯ࠪࡦࡐࠫ࠙ࡓ
࡮ 2007/11/28㨪2007/12/01 ࿖㓙ࡠࡏ࠶࠻ዷ
࡮ 2008/02/13㨪2008/02/15 Nanotech2008 ਄⸥એᄖߦ߽น⢻ߥ㒢ࠅዷ␜ળ߳ߩ಴ዷࠍડ↹ߒߡ޿ߊ੍ቯߢ޽ࠆ‫ޕ‬ ߥ߅‫ޔ‬2007/07/31 ⃻࿷ߢࡑࠗࠢࡠࡑࠪࡦ㧛MEMS ዷ߳ߩ಴ዷߪ⚳ੌߒߚ‫ޕ‬หዷ␜ળ߳ߩ౉႐⠪ᢙߪㆊ෰ᦨ㜞ߩ 12,424 ੱߢ޽ࠅ‫ޔ‬MEMS ੱญߩ᜛ᄢࠍ෻ᤋߒߡ޿ࠆߣ⸒߃ࠆ‫ޕ‬MemsONE ߩዷ␜ߪ㧔⽷㧕ࡑࠗࠢࡠࡑࠪࡦ࠮ࡦ࠲࡯ߩࡉ࡯ࠬߩ৻ⷺߦ⸳⟎ߒ‫੹ޔ‬ᐕᐲ૞ᚑߒߚࡄࡀ࡞ 4 ᨎߩឝ␜‫ޔ‬Note PC 2 บߦࠃࠆ࠺ࡕ‫࠻࠶࡟ࡈࡦࡄޔ‬෸߮ MemsONEǪ
ㇱࠍోߡ㈩Ꮣߒߚ‫ߪߢࠬ࡯ࡉޕ‬ǩ↳ㄟᦠߩ㈩Ꮣࠍⴕߞߚ‫↪ߪ࠻࠶࡟ࡈࡦࡄޕ‬ᗧߒߚ⚂ 800

ߩ೑↪⠪߿Ǫ

↳ㄟ⠪ߦࠃࠆ⾰໧࡮࠺ࡕଐ㗬߇ᄙᢙ޽ࠅ‫ޔ‬MemsONE߳ߩᦼᓙ߇ુ߃ߚ‫ޕ‬ዷ␜ળߢߪ‫ޔ‬೑↪⠪߆ࠄߩᗧ⷗࡮ⷐᦸࠍ⋥ធ⊛ߦ෼㓸ߢ߈ࠆ‫ޔ‬ᣂⷙ࡙࡯ࠩߩ㐿ᜏ߇ߢ߈ࠆ‫߁޿ߣޔ‬೑ὐ߇޽ࠆ‫੹ޕ‬ᓟ߽ዷ␜ળࠍ೑↪ߒߚᵴേࠍዷ㐿ߒ‫ޔ‬MemsONE ᥉෸ଦㅴࠍ࿑ߞߡ޿ߊ
ߎߣ߇㊀ⷐߢ޽ࠆ‫ޕ‬¾ Web ࠨࠗ࠻ߩᦝᣂ
 MemsONEǪ

ߩ㈩Ꮣ㐿ᆎߦ޽ࠊߖߡ‫ޔ‬MemsONE ࡙࡯ࠩࠨࠗ࠻‫ޟ‬MemsONE ߭ࠈ߫‫ᦝߩޠ‬ᣂࠍⴕߞߚ‫ᦝޕ‬ᣂߦᒰߚߞߡߪએਅߩ 5 ߟߩ࠙ࠚࡉࡍ࡯ࠫࠍ૞ᚑߒߚ‫ޕ‬
Ԙ Ǫ

߅↳ㄟߺ

ԙ Ǫ

࡜ࠗ࠮ࡦࠬ↳⺧Ԛ Ǫࠨࡐ࡯࠻ᖱႎԛ ⻠⠌ળ᩺ౝԜ ឝ␜᧼ એਅ‫ޔ‬ฦ࠙ࠚࡉࡍ࡯ࠫߦߟ޿ߡ◲නߦㅀߴࠆ‫ޕ‬Ԙ Ǫ ߅↳ㄟߺ MemsONEǪ

ߩ૶↪↳ㄟߺࠍⴕ߁ࡍ࡯ࠫߢ޽ࠆ‫↳ޔߢߎߎޕ‬ㄟ⠪᳁ฬ‫ޔ‬ᚲዻ‫ޔ‬ㅪ⛊వ‫↳ޔ‬ㄟ࡜ࠗ࠮ࡦࠬᢙߥߤࠍ⸥౉ߔࠆߎߣߣߥࠆ‫↹⹺⏕ޕ‬㕙ߦㅴߺㅍାࡏ࠲ࡦࠍ᛼ਅߔࠆߎߣߦࠃࠅ‫ޔ‬MemsONEǪ

θ́11

㈩Ꮣᯏ㑐ߢ޽ࠆ㧔⽷㧕ࡑࠗࠢࡠࡑࠪࡦ࠮ࡦ࠲࡯߳ߩฃઃ߇ቢੌߔࠆ‫ޕ‬ ฃઃ⚳ੌᓟ‫ޔ‬ᜰቯߐࠇߚ㊄Ⲣᯏ㑐߳ߩ㗏Ꮣ⾌㧔⒢ㄟ 1 ਁ౞㧛࡜ࠗ࠮ࡦࠬ㧕ᝄㄟߺ߇⏕⹺ߐࠇࠆߣ
MemsONEǪ

৻ᑼ߇ᩰ⚊ߐࠇߚ DVD㧔㘈ቴ⇟ภࠍ⸥タ㧕߇⊒ㅍߐࠇࠆ‫ޕ‬

࿑ 3-6-9㧦MemsONEǪ  ૶↪↳ㄟԙ Ǫ࡜ࠗ࠮ࡦࠬ↳⺧ ࡙࡯ࠩ߇ MemsONEǪ

ࠍࠗࡦࠬ࠻࡯࡞ߒߚᓟߦ‫ߩ߼ߚࠆߔ⺧↳ࠍࠬࡦ࠮ࠗ࡜ޔ‬ᚻ⛯߈ࠍ⸥タߒߚࡍ࡯ࠫߢ޽ࠆ‫⺧↳ࠬࡦ࠮ࠗ࡜ޕ‬ᣇᴺߪએਅߩㅢࠅߢ޽ࠆ‫ޕ‬ MemsONEǪ

ࠍࠗࡦࠬ࠻࡯࡞ߔࠆߣ࡜ࠗ࠮ࡦࠬ࠷࡯࡞ࠍ⿠േߢ߈ࠆࠃ߁ߦߥࠅ‫ޔ‬license_info ࡈࠔࠗ࡞ࠍ಴ജߢ߈ࠆ‫ࠍ࡞ࠗࠔࡈߩߎޕ‬㧔⽷㧕ࡑࠗࠢࡠࡑࠪࡦ࠮ࡦ࠲࡯ߦㅍઃߔࠆߣ࡜ࠗ࠮ࡦࠬࡈࠔࠗ࡞
㧔license_key㧕߇㄰ㅍߐࠇࠆ‫ߺ⺒ߢ࡞࡯࠷ࠬࡦ࠮ࠗ࡜ࠍ࡞ࠗࠔࡈߩߎޕ‬ㄟ߻ߎߣߦࠃࠅ‫ޔ‬MemsONEߩ࡜ࠗ࠮ࡦࠬ߇⊒ⴕߐࠇߚߎߣߣߥࠆ‫ޕ‬θ́12  
࿑ 3-6-10㧦Ǫ ࡜ࠗ࠮ࡦࠬ↳⺧ᚻ⛯߈Ԛ Ǫࠨࡐ࡯࠻ᖱႎ

 MemsONEǪ

࡙࡯ࠩߦኻߒߡ‫࠻࡯࠺ࡊ࠶ࠕޔ‬ᖱႎ߿ࡈ࡝࡯࠰ࡈ࠻ᖱႎࠍ⍮ࠄߖࠆࡍ࡯ࠫߢ޽ࠆ‫ޕ‬

 ․ߦ MemsONEǪ

ߩࠕ࠶ࡊ࠺࡯࠻ᖱႎߪਥߦࡃࠣࡈࠖ࠶ࠢࠬ↪ߩࡄ࠶࠴ߩ㈩Ꮣߦ೑↪ߐࠇߡ߅ࠅ‫ޔ‬࡙࡯ࠩߩ㑐ᔃ߇ᦨ߽㜞޿ᖱႎߢ޽ࠆ‫࠻࡯࠺ࡊ࠶ࠕޕ‬ᖱႎࠍቯᦼ⊛ߦ⊒ାߒ‫߇ࠩ࡯࡙ޔ‬቟ᔃߒߡ
MemsONE ࠍ೑↪ߢ߈ࠆⅣႺࠍ᭴▽ߔࠆߎߣ߇੹ᓟߩ᥉෸ଦㅴߦߪਇนᰳߢ޽ࠆ‫ޕ‬

࿑ 3-6-11㧦ࠨࡐ࡯࠻ᖱႎߩ߅⍮ࠄߖԛ ⻠⠌ળ᩺ౝ
 MemsONEǪ

ࠍᐢߊ᥉෸ߐߖ࡙࡯ࠩߦ೑↪ᣇᴺࠍ⠌ᓧߒߡ߽ࠄ߁ߚ߼‫ޔ‬MemsONEǪ ታ⠌⻠ᐳࠍ

7 ᦬ࠃࠅ㐿ᆎߒߚ‫ߢࠫ࡯ࡍᧄޕ‬ታ⠌⻠ᐳߩ㐿௅᩺ౝ㧔ᣣ⒟‫ޔ‬ળ႐‫╬↪⾌ޔ‬㧕ࠍⴕߞߡ޿ࠆ‫ޕ‬θ́13 ೨ㅀߩㅢࠅ‫ޔ‬ታ⠌⻠ᐳߪ MemsONE ߩ᥉෸ଦㅴߦ㕖Ᏹߦ᦭ലߢ޽ࠆ‫ޕ‬ታ⠌⻠ᐳߩ㐿௅᩺ౝࠍ࠙ࠚࡉߦឝタߔࠆߩߺߥࠄߕ‫ޔ‬㑐ㅪࡔ࡯࡝ࡦࠣ࡝ࠬ࠻╬ࠍ೑↪ߒߚᐢ▸࿐ߦᷰࠆትવࠍⴕ߁ߎߣ߇‫ޔ‬
MemsONE ߩ᥉෸ଦㅴߦ❬߇ࠆߢ޽ࠈ߁‫ޕ‬

࿑ 3-6-12㧦MemsONEǪ ታ⠌⻠ᐳߩ᩺ౝԜ ឝ␜᧼ ࡙࡯ࠩࠦࡒࡘ࠾࠹ࠖ࡯ߦࠃࠆ⥄┙⊒ዷ⊛ߥ⼏⺰ߩ႐ࠍឭଏߔࠆߚ߼‫ޔ‬MemsONE ࠢ࡜ࡉౝߦឝ␜᧼
ࠍḰ஻ߔࠆ੍ቯߣߒߡ޿ࠆ‫ᧄޕ‬ឝ␜᧼ߪ‫⾰߇ࠩ࡯࡙ޔ‬໧ࠍᛩⓂߒߚ㓙ߦᣂⷙࠬ࡟࠶࠼߇┙ߜ਄߇ࠅ‫ߘޔ‬ࠇߦኻߒߡ MEMS-ONE ࡊࡠࠫࠚࠢ࠻ࡔࡦࡃ࡯߿ᣢߦห໧㗴ࠍ⸃᳿ߒߚ࡙࡯ࠩ߇⸃᳿ᣇᴺࠍ⸥౉࡮౏㐿߇ߢ߈ࠆ߽ߩߢ޽ࠆ‫ޕ‬ ⃻࿷‫ޔ‬ឝ␜᧼ߩ┙਄ߍḰ஻ਛߢ޽ࠆ߇‫┙ޔ‬਄ߍᒰೋߪ MEMS-ONE ࡊࡠࠫࠚࠢ࠻ࡔࡦࡃ࡯߇ᗐቯ⾰໧߿ᣢ಴໧޿วࠊߖౝኈߣߘߩ⸃᳿ᣇᴺࠍ⸥౉ߒߚ߽ߩࠍḰ஻ߒ‫ ߩ߼ߚߩࠩ࡯࡙ޔ‬QA ࠨࠗ࠻ߣߒߡߩ೑

θ́14↪ࠍᬌ⸛ߒߡ޿ࠆ‫ޕ‬ ᧄឝ␜᧼߇ᵴ⊒ൻߔࠆߎߣߦࠃࠅ MemsONE ೑↪ᣇᴺߩࡁ࠙ࡂ࠙߇⫾Ⓧߐࠇߡ޿ߊߎߣߦߥࠆ‫੹ޕ‬ᓟߪ‫ޔ‬ឝ␜᧼ࠍᅤ૗ߦ࡙࡯ࠩߦ೑↪ߒߡ㗂ߊ߆߇㊀ⷐߢ޽ࠅ‫ޔ‬᥉෸ଦㅴߩߚ߼ߦ߽࡙࡯ࠩߦᐢߊ⹺⍮ߐߖߡ޿ߊᔅⷐ߇޽ࠆ‫ޕ‬

࿑ 3-6-13㧦ឝ␜᧼㧔᩺㧕
¾ ࡙࡯ࠩࠨࡐ࡯࠻
MemsONE ࠍᐢߊ᥉෸ߐߖࠆߚ߼ߦߪ࡙࡯ࠩࠨࡐ࡯࠻ߪਇนᰳߢ޽ࠆ‫ ߢߎߘޕ‬MemsONEǪ

ߩ㈩Ꮣߦ޽ࠊߖߡ㧔⽷㧕ࡑࠗࠢࡠࡑࠪࡦ࠮ࡦ࠲࡯ౝߦࠨࡐ࡯࠻࠮ࡦ࠲࡯ࠍ⟎߈‫ߩࠄ߆ࠩ࡯࡙ޔ‬໧޿วࠊߖኻ
ᔕࠍⴕߞߡ޿ࠆ‫ޕ‬ኻᔕౝኈߪ࡮ ࠗࡦࠬ࠻࡯࡞ᣇᴺߦ㑐ߔࠆ໧޿วࠊߖ࡮ ᠲ૞ᣇᴺߦ㑐ߔࠆ໧޿วࠊߖ࡮ ਇౕวߦ㑐ߔࠆ໧޿วࠊߖ
ࠍਥߣߒߡ޿ࠆ‫ޕ‬㧔⽷㧕ࡑࠗࠢࡠࡑࠪࡦ࠮ࡦ࠲࡯ߦࠃࠆኻᔕࠍၮᧄߣߒߡ޿ࠆ߇‫ޔ‬MemsONE ߩ㜞ᐲߥ೑↪ᣇᴺ╬ߦߟ޿ߡߪ࠰ࡈ࠻ࡌࡦ࠳࡯߽දജߒߡኻᔕࠍⴕߞߡ޿ࠆ‫ޔߚ߹ޕ‬೨ㅀߩㅢࠅ MemsONE ߭ࠈ߫ߦឝ␜᧼㧔QA ᖱႎࠍឝタ㧕ࠍ⸳⟎ߒ‫ߩ࠻࡯ࡐࠨޔ‬ᒝൻࠍ࿑ߞߡ޿ࠆ‫⸃ޕ‬ᨆߩࠨࡐ࡯࠻╬ߦߟ޿ߡߪ໡↪

ߢߩ଻቞ኻᔕߣߒ‫ޔ‬Ǫߢߪⴕߞߡ޿ߥ޿‫ޕ‬ ੹ᓟߩ᥉෸ଦㅴߩߚ߼ߦߪ‫ࠍ࠻࡯ࡐࠨࠅࠃޔ‬ᒝൻߒߡ޿߆ߥߌࠇ߫ߥࠄߥ޿‫߆ࠩ࡯࡙߽ߦ߼ߚߩߘޕ‬ࠄߩ໧޿วࠊߖࠍᜂᒰ⠪ߦᝄࠅಽߌࠆ઀⚵ߺ߿‫ޔ‬໧޿วࠊߖౝኈߩ౏㐿ᣇᴺߥߤࠍᣧᕆߦᬌ⸛ߒ‫࡯࡙ޔ‬ࠩ߇ࠃࠅ቟ᔃߦ MemsONE ࠍ೑↪ߢ߈ࠆⅣႺࠍᢛ߃ࠆᔅⷐ߇޽ࠆ‫ޕ‬θ́15

¾ MemsONEǪ

ߩᯏ⢻ᒝൻ㐿⊒2006 ᐕ 11 ᦬ࠃࠅ MemsONEǩ

ߣ⒓ߒߡ㐿⊒ㅜਛࡃ࡯࡚ࠫࡦࠍήᢱ㈩Ꮣߒ‫ࠍ╬ᦸⷐߩࠄ߆ࠩ࡯࡙ޔ‬෼㓸ߒߚ‫ߩࠄ߆ࠩ࡯࡙ޕ‬ਥߥⷐᦸߪ‫ߩࠢ࡯ࡢࡓ࡯࡟ࡈޔ‬ᡷༀ‫⸃ޔ‬ᨆᯏ⢻ߩᒝൻ‫ߩ࡞ࠕࡘ࠾ࡑޔ‬ᢛ஻ߥߤߢ޽ߞߚ‫ߢߎߘޕ‬ᓧࠄࠇߚⷐᦸߦᔕ߃ࠆߎߣ߇ MemsONE ᥉෸ߦߪᔅ㗇ߢ޽ࠆ‫ޔߢߎߘޕ‬2007 ᐕᐲਛߦએਅߩ GUI࡮⸃ᨆᯏ⢻ߩᡷༀ෸߮࠴ࡘ࡯࠻࡝ࠕ࡞ࡑ࠾ࡘࠕ࡞ߩ૞ᚑࠍⴕ߁ߎߣߣߒߡ޿ࠆ‫ޕ‬ԘGUI࡮⸃ᨆᯏ⢻ߩᡷༀ╬
MemsONE ᥉෸⺞ᩏ෸߮ǩ⹏ଔࠕࡦࠤ࡯࠻ߩ⚿ᨐ߆ࠄߐ߹ߑ߹ߥⷐᦸ߇಴ߡ߈ߡ޿ࠆ߇‫ޔ‬

MemsONE ߩᐢ▸࿐ߥ᥉෸ߣቯ⌕ߦᔅ㗇ߢ޽ࠆਅ⸥㗄⋡ߦኻߒ‫࠻ࡈ࠰ޔ‬ᯏ⢻ߩᡷༀ࡮ᒝൻࠍⴕ߁‫ޕ‬γ㧕ࡈ࡟࡯ࡓࡢ࡯ࠢ GUI ߩᡷༀ
MemsONE ߩ೑↪⠪߆ࠄ⷗ߡ‫ ߩࠢ࡯ࡢࡓ࡯࡟ࡈޔ‬GUI ᯏ⢻߇ࠪࠬ࠹ࡓߩ㗻ߣ߽⸒߁ߴ߈࡙࡯ࠩࠗ
ࡦ࠲࡯ࡈࠚ࡯ࠬࠍᜂߞߡ޿ࠆ‫⹏ࠩ࡯࡙ޕ‬ଔࠕࡦࠤ࡯࠻ߢ߽‫ ࠆߌ߅ߦ⥸ోࠢ࡯ࡢࡓ࡯࡟ࡈޔ‬GUI ᯏ⢻߳ߩᡷༀⷐᦸᢙߪᄙߊ‫ޔ‬MemsONE ߩ᥉෸ߩߚ߼ߦߪ‫ߩߎޔ‬ኻᔕߪᔅ㗇ߢ޽ࠆ‫ౕޕ‬૕⊛ߥᡷༀ㗄⋡ߣߒߡ‫ޔ‬ਅ⸥ߩኻᔕࠍⴕ߁‫ޕ‬ MemsONE ߩ⸃ᨆ᧦ઙ⸳ቯߦ߅޿ߡ‫৻ޔ‬ᐲ૞ᚑߒߚ⸃ᨆ᧦ઙߩౣ೑↪ᯏ⢻ߪ‫ޔ‬ೋᔃ⠪ߩߺߥࠄߕᾫ
✵⠪ߦߣߞߡ߽㕖Ᏹߦ᦭ലߥᯏ⢻ߢ޽ࠆ‫ޕ‬ᯏ᭴⸃ᨆߩ⸃ᨆ᧦ઙ࠺࡯࠲ߦ߅ߌࠆႺ⇇᧦ઙ࠺࡯࠲ߪ CAD↹㕙ߩᐞ૗࠺࡯࠲߿᦭㒢ⷐ⚛࠺࡯࠲ߣኒធߦ㑐ㅪઃߌࠄࠇߡ߅ࠅ‫᧚ޔߡ⷗ࠄ߆ࠩ࡯࡙ޔ‬ᢱ‛ᕈࡄ࡜ࡔ࡯࠲߿⸘▚೙ᓮࡄ࡜ࡔ࡯࠲ߦᲧߴߡ‫⸳ߦ⊛ⷩ৻ޔ‬ቯ⁁ᴫࠍ⹺⼂ߔࠆߎߣ߇࿎㔍ߢ޽ࠆ‫ߦࠇߎޕ‬ኻᔕߔࠆߚ߼ߦ‫ޔ‬୘‫⸃ߩޘ‬ᨆ᧦ઙ࠺࡯࠲ߦ߅ߌࠆႺ⇇᧦ઙߩ⸳ቯ⁁ᴫࠍ৻ⷩ⊛ߦ⴫␜ߔࠆᯏ⢻ࠍ㐿⊒ߔࠆ‫ޕ‬ ߹ߚ‫ޔ‬ᯏ᭴⸃ᨆߩജቇ⸃ᨆ࠰ࡈ࠻ߦ߅ߌࠆ෼᧤᧦ઙࠍᒝൻߔࠆߚ߼ߩ⸘▚೙ᓮࡄ࡜ࡔ࡯࠲㗄⋡ߩㅊട‫ޔ‬శ࠽ࡁࠗࡦࡊ࡝ࡦߣߩ GUI 㗄⋡ฬ⒓ࠍࠃࠅࠊ߆ࠅ߿ߔ޿ࠗࡦ࠲࡯ࡈࠚ࡯ࠬߦߔࠆὑߩᡷ⦟ߥߤ‫ޔ‬ജቇ⸃ᨆ࠰ࡈ࠻࡮శ࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆ࠰ࡈ࠻࡮ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆ࠰ࡈ࠻࡮㔚⏛⇇⸃ᨆ࠰ࡈ࠻ߩ⸃ᨆ᧦ઙ࠺࡯࠲㗄⋡ߦ㑐ߔࠆᡷༀࠍⴕ޿‫ࠍࠬ࡯ࠚࡈ࡯࠲ࡦࠗࠩ࡯࡙޿ߔ߿ࠅ߆ࠊࠅࠃޔ‬ታ⃻ߔࠆ‫ޕ‬δ㧕ᯏ᭴⸃ᨆ࠰ࡈ࠻ߩ㜞ㅦൻ‫࡝ࡕࡔ⋭ޔ‬ൻ MemsONE ߪೋᔃ⠪ߛߌߢߥߊ‫ޔ‬ᾫ✵⸳⸘⠪ߩ࠾࡯࠭ߦ߽ᔕ߃ࠄࠇࠆߎߣࠍ⋡⊛ߦߒߡ޿ࠆ‫੹ޕ‬ᓟᐢ▸࿐ߩ࡙࡯ࠩߦ⌕ታߦ᥉෸ߐߖߡ޿ߊ਄ߢ‫ޔ‬ೋᔃ⠪߇૶↪ߔࠆᲧセ⊛ૐᕈ⢻ PC ߢߩ⸃ᨆⷙᮨ᜛ᄢ߿‫ޔ‬ᾫ✵⠪ߩᛒ߁ᄢⷙᮨ࠺࡯࠲ߦኻߔࠆ⸃ᨆᤨ㑆ߩ⍴❗ߥߤ‫ࠬࡦࡐࠬ࡟ޔ‬ะ਄ߦኻߔࠆᡷༀⷐᦸߪᒝ޿‫ߎޕ‬ࠇߦኻᔕߔࠆߚ߼‫ޔ‬ᯏ᭴⸃ᨆ࠰ࡈ࠻ߢ․ߦ㔛ⷐ߇㜞޿ߣᕁࠊࠇࠆ㧟ᰴర⸃ᨆᯏ⢻࡮ജቇ⸃ᨆᯏ⢻࡮㔚⏛႐⸃ᨆᯏ⢻㧔㔚⸃⸃ᨆ෸߮࿕ቯᤨೞ㔚ᵹ⸃ᨆ㧕࡮࿶㔚⸃ᨆᯏ⢻࡮વᾲ⸃ᨆ࡮ᾲᄌᒻ⸃ᨆᯏ⢻࡮਄⸥ㅪᚑ⸃ᨆᯏ⢻ߦ㑐ߒߡ‫ޔ‬ౝㇱಣℂߩ㜞ㅦൻ‫ࡓ࡜ࠣࡠࡊޔ‬ౝㇱ૶↪ࡔࡕ࡝ߩ೥ᷫࠍⴕ߁‫ޕ‬θ́16ε㧕ᯏ᭴⸃ᨆ࠰ࡈ࠻ߩ⸃ᨆ♖ᐲะ਄ ࡙࡯ࠩ߆ࠄ⷗ߡ‫⸃ޔ‬ᨆ⚿ᨐ߇ MemsONE ߩ೑↪ᚑᨐߘߩ߽ߩߢ޽ࠅ‫ޔ‬
MemsONE ߩ⹏ଔߦ⋥⚿ߔࠆ‫ޕ‬ߎߩߚ߼⸃ᨆ⚿ᨐߩߐࠄߥࠆ♖ᐲะ਄ߪᔅ㗇ߢ޽ࠆ‫ޕ‬ ߎࠇߦኻᔕߔࠆߚ߼‫ޔ‬ᯏ᭴⸃ᨆ࠰ࡈ࠻ߢ․ߦ㔛ⷐ߇㜞޿ߣᕁࠊࠇࠆ㧟ᰴర⸃ᨆᯏ⢻࡮ജቇ⸃ᨆᯏ⢻࡮㔚⏛႐⸃ᨆᯏ⢻㧔㔚⸃⸃ᨆ෸߮࿕ቯᤨೞ㔚ᵹ⸃ᨆ㧕࡮࿶㔚⸃ᨆᯏ⢻࡮વᾲ⸃ᨆ࡮ᾲᄌᒻ⸃ᨆᯏ⢻࡮਄⸥ㅪᚑ⸃ᨆᯏ⢻ߦ㑐ߒߡ‫⸃ޔ‬ᨆ♖ᐲࠍᄢ߈ߊะ਄ߐߖࠆߚ߼ߦ㧞ᰴߩ᦭㒢ⷐ⚛ኻᔕࠍⴕ߁‫ޕ‬ ߹ߚ‫ޔ‬ᯏ᭴⸃ᨆ࠰ࡈ࠻ߩኻᔕߣߣߣ߽ߦ‫ࠆߌ߅ߦࠢ࡯ࡢࡓ࡯࡟ࡈޔ‬㧞ᰴ᦭㒢ⷐ⚛ࠍ↢ᚑߔࠆᯏ⢻ߩ㐿⊒߅ࠃ߮‫ޔ߮ࠃ߅ޔ‬ᯏ᭴⸃ᨆ࠰ࡈ࠻ߩ㧞ᰴⷐ⚛ߩ⸃ᨆ⚿ᨐ࠺࡯࠲ࠍ⹏ଔ࿑ߣߒߡ⴫␜ߔࠆᯏ⢻ߩኻᔕ߽ᔅ㗇ߢ޽ࠅ‫ߩߎޔ‬㐿⊒߽޽ࠊߖߡⴕ߁‫ޕ‬ζ㧕ㅒ໧㗴࠰ࡈ࠻ߦ߅ߌࠆ⸃ᨆ♖ᐲߩะ਄ㅒ໧㗴⸃ᨆ࠰ࡈ࠻ߪ‫ޔ‬Ꮢ⽼࠰ࡈ࠻ߦߪߥ޿ MemsONE ⁛⥄ᯏ⢻ߣߒߡᦼᓙߐࠇߡ޿ࠆ߇‫ߩߎޔ‬಴ജ࠺࡯࠲ߢ޽ࠆࡑࠬࠢ࠺࡯࠲ߩ♖ᐲߪ੹ᓟߩᧄ࠰ࡈ࠻ߩ᥉෸ߩߚ߼ߦߪ‫ޔ‬㕖Ᏹߦ㊀ⷐߣߥࠆ‫ࠅࠃޕ‬㜞♖ᐲߩࡑࠬࠢ࠺࡯࠲ࠍ಴ജߔࠆߚ߼ߦ‫ޔ‬਄㕙࿑ߦⓣ߇޽ࠆ႐ว‫ⶄޔ߮ࠃ߅ޔ‬ᢙࡑࠬࠢ߇૞ᚑߐࠇࠆ႐ว
߳ߩኻᔕࠍᒝൻ࡮ᡷༀߔࠆ‫ޕ‬η㧕ࡊࡠ࠮ࠬ⸃ᨆ࠷࡯࡞ߩᯏ⢻ะ਄ ࡊࡠ࠮ࠬ⸃ᨆ࠷࡯࡞ߪ‫ࠛࠗ࡜࠼ޔ࠲࡯࡟ࡘࡒࠪࠣࡦ࠴࠶ࠛ࠻࠶ࠚ࠙ޔ࠲࡯࡟ࡘࡒࠛࠬ࠮ࡠࡊ࠴࡞ࡑޔ‬࠶࠴ࡦࠣࠪࡒࡘ࡟࡯࠲ߩฦᯏ⢻ߦኻߒߡ‫ޔ‬ᓟㅀߩᯏ⢻ㅊടࠍⴕ߁‫ޕ‬ ࡑ࡞࠴ࡊࡠ࠮ࠬࠛࡒࡘ࡟࡯࠲ߪࡑࠬࠢᒻ⁁ߣࡊࡠ࠮ࠬ࡟ࠪࡇ߆ࠄ㧟ᰴర࠺ࡃࠗࠬᒻ⁁ࠍ૞⵾ߢ߈ࠆ
MemsONE ߩ․㐳⊛ߥᯏ⢻ߢ޽ࠆ‫ߪߦࡇࠪ࡟ࠬ࠮ࡠࡊޕ‬ᄙߊߩࡊࡠ࠮ࠬᎿ⒟߇⊓㍳ߐࠇߡ޿ࠆ߇‫ޔ‬ၮᧄߣߥࠆᎿ⒟ߦߣߤ߹ߞߡ޿ࠆ‫ߩࠩ࡯࡙ߪߢߎߎޕ‬೑ଢᕈࠍะ਄ߐߖࠆߚ߼‫ࠬ࠮ࡠࡊߩ╬ࡈࠝ࠻ࡈ࡝ޔ‬Ꮏ⒟ߩㅊടࠍⴕ޿‫ࠅࠃޔ‬ᄙߊߩ MEMS ⵾ㅧᎿ⒟ߦኻᔕߐߖࠆ‫ޕ‬⇣ᣇᕈ࠙ࠚ࠶࠻ࠛ࠶࠴ࡦࠣࠪࡒࡘ࡟࡯࠲ߪ‫ࡦࠦ࡝ࠪޔ‬න⚿᥏ߩోᣇ૏ߩࠛ࠶࠴ࡦࠣ࡟࡯࠻࠺࡯࠲ࠍၮ
ߦ‫⸳ޔ‬ቯߒߚࡑࠬࠢࡄ࠲࡯ࡦߦኻߒߡ‫ޔ‬㧟ᰴరࠛ࠶࠴ࡦࠣࡊࡠࡈࠔࠗ࡞ߩㆊᷰᄌൻࠍ⸃ᨆߔࠆᯏ⢻ߢ޽ࠆ‫ߩࠩ࡯࡙ޕ‬೑ଢᕈะ਄߿⸃ᨆ⚿ᨐ⹏ଔߩߚ߼‫⚳ᦨޔ‬ᒻ⁁ߛߌߢߥߊ‫ޔ‬ㅜਛߩᒻ⁁ᄌൻࠍࡈ࡟࡯ࡓࡢ࡯
ࠢߦࠃࠅ⴫␜น⢻ߥᒻᑼߢࡈࠔࠗ࡞಴ജߔࠆ‫ޕ‬࠼࡜ࠗࠛ࠶࠴ࡦࠣࠪࡒࡘ࡟࡯࠲ߪ‫ޔ‬ೋᔃ⠪߇ኈᤃߦ೑↪ߢ߈ࠆࠃ߁ߦ‫ߚࠇࠄ߼߈߼੍ޔ‬ೋᦼᒻ⁁ߦኻߒߡ‫᧦⟎ⵝޔ‬ઙࠍၮߦࠛ࠶࠴ࡦࠣᒻ⁁⸃ᨆࠍታⴕߔࠆ‫৻ޕ‬ᣇ‫ޔ‬ᾫ✵⠪߆ࠄߪ‫ࠅࠃޔ‬㜞♖ᐲߢ⥄↱ߥ⸃ᨆࠍߒߚ޿ߣߩⷐᦸ߇᜼߇ߞߡ޿ࠆ‫ߩ⟎ⵝޔ߼ߚߩߘޕ‬ౝㇱ⁁ᘒࠍ⸥ㅀߔࠆ‛ℂࡕ࠺࡞ࡄ࡜ࡔ࡯࠲߅ࠃ߮
ೋᦼᒻ⁁ࠍ࡙࡯ࠩ߇⸳ቯߢ߈ࠆࠃ߁ߦᡷ⦟ࠍታᣉߔࠆ‫ޕ‬਄⸥ࡊࡠ࠮ࠬ⸃ᨆ࠰ࡈ࠻ߩኻᔕߣਗⴕߒߡ‫ࠢ࡯ࡢࡓ࡯࡟ࡈޔ‬஥ߦ߅޿ߡ߽‫࡟ࡘࡒࠛࠬ࠮ࡠࡊ࠴࡞ࡑޔ‬θ́17࡯࠲ߢߩࡊࡠ࠮ࠬᎿ⒟ߩㅊട‫⇣ޔ‬ᣇะ࠙ࠚ࠶࠻ࠛ࠶࠴ࡦࠣߦ߅ߌࠆㆊᷰᒻ⁁ߩ⸃ᨆ⚿ᨐ⴫␜‫ࠛࠗ࡜࠼ޔ‬࠶࠴ࡦࠣࠪࡒࡘ࡟࡯࠲ߩ⹦⚦ߥ⸃ᨆ᧦ઙ⸳ቯ GUI ߳ߩኻᔕ߇ᔅⷐߢ޽ࠅ‫ߩߎޔ‬㐿⊒ࠍⴕ߁‫ޕ‬ԙ⸃ᨆ੐଀ߩ⫾Ⓧߣ࠴ࡘ࡯࠻࡝ࠕ࡞ࡑ࠾ࡘࠕ࡞ߩ૞ᚑ
MemsONEࠍMEMS⸳⸘࡮⸃ᨆಽ㊁ߩೋᔃ⠪߆ࠄᾫ✵⠪߹ߢᐢ▸࿐ߦ᥉෸ߐߖࠆߚ߼ߦߪ‫࡯࠽ࡒ࠮ޔ‬߿ታ⠌⻠ᐳߦࠃࠆᛛⴚᡰេߛߌߢߥߊ‫ޔ‬MemsONEߦࠃࠆ⸃ᨆ੐଀㓸߿ࠊ߆ࠅ߿ߔ޿࠴ࡘ࡯࠻࡝ࠕ࡞ࡑ
࠾ࡘࠕ࡞ߥߤ‫ߦ↱⥄߇ࠩ࡯࡙ޔ‬೑↪ߢ߈ࠆ⥄⠌↪ߩᢎ᧚ࠍขࠅឥ߃౏㐿࡮ឭଏߒߡ޿ߊߎߣ߇ᭂ߼ߡ㊀ⷐߢ޽ࠆ‫ޔߚ߹ޕ‬ડᬺ߿ᄢቇ߇࠰ࡈ࠻ࠍ⾼౉ߔࠆ႐วߦߪታ❣߇㊀ⷐⷞߐࠇࠆ߇‫ޔ‬MemsONEߪ㐿⊒⋥ᓟߩ࠰ࡈ࠻ߢ޽ࠆߚ߼ᬌ⸽⸃ᨆએᄖߩታ❣ߪߥߊ‫ⷰߩߎޔ‬ὐߢ߽‫⸃ޔ‬ᨆ੐଀ߩᣧᦼ⫾Ⓧ߇ᔅⷐߢ޽ࠅ‫ޔ‬
੐଀⫾ⓍߦࠃࠅMemsONEߩା㗬ᕈࠍะ਄ߐߖ᥉෸ࠍଦㅴߐߖࠆߎߣ߇น⢻ߣߥࠆ‫ޕ‬ ߘߎߢ‫ޔ‬MemsONE ࠍ૶↪ߒߚ⸃ᨆታ❣ࠍᄙᢙⓍߺ਄ߍࠆߣߣ߽ߦ‫⸃ޔ‬ᨆ੐଀ࠍ߽ߣߦ‫ޔ‬ೋᔃ⠪߇ኈ
ᤃߦℂ⸃ߢ߈‫࡮⸘⸳ޔ‬㐿⊒ᛛⴚ⠪߇හᵴ↪ߢ߈ࠆ߽ߩࠍ࠴ࡘ࡯࠻࡝ࠕ࡞ࡑ࠾ࡘࠕ࡞ߣߒߡ૞ᚑߔࠆ‫࠴ޕ‬ࡘ࡯࠻࡝ࠕ࡞ࡑ࠾ࡘࠕ࡞ߩౝኈߪ‫ޔ࠻ࡈ࠰ࠢ࡯ࡢࡓ࡯࡟ࡈޔ‬ᯏ᭴⸃ᨆ࠰ࡈ࠻‫⸃ࠬ࠮ࡠࡊޔ‬ᨆ࠰ࡈ࠻‫࠽ޔ‬ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆ࠰ࡈ࠻‫ࠬ࠮ࡠࡊޔ‬ㅒ໧㗴࠰ࡈ࠻‫ޔ‬࿁〝ࠪࡒࡘ࡟࡯࠲╬ߩන૏ߢಽౠᒻᑼߦขࠅ߹ߣ
߼‫ߩࠩ࡯࡙ޔ‬೑ଢᕈࠍ㜞߼ࠆߎߣߣߔࠆ‫⫾ޔߚ߹ޕ‬Ⓧߒߚ⸃ᨆ੐଀࠺࡯࠲߿‫ޔ‬૞ᚑߒߚ࠴ࡘ࡯࠻࡝ࠕ࡞
ࡑ࠾ࡘࠕ࡞ߪ‫ޔ‬MemsONE ⻠⠌ળ߿࠮ࡒ࠽࡯ߥߤߦ߅޿ߡ߽Ⓧᭂ⊛ߦᵴ↪ߒ‫ޔ‬MemsONE ᥉෸ߩߚ߼
ߩၮᧄ࠷࡯࡞ߣߒߡ⛮⛯⊛ߦ೑↪ߔࠆ‫ޕ‬¾ ᥉෸ଦㅴᆔຬળߩ㐿௅
MemsONE ࠍ࿖ౝߦᐢߊ᥉෸ߐߖࠆߚ߼‫ޔ‬MemsONE ᚑᨐ᥉෸੐ᬺߩ৻Ⅳߣߒߡ㧔⽷㧕ࡑࠗࠢࡠࡑ
ࠪࡦ࠮ࡦ࠲࡯ౝߦ MemsONE ᥉෸ଦㅴᆔຬળࠍ⸳⟎ߒ‫ޔ‬MemsONEǪ ߩ᥉෸ᵴേ‫ޔ‬MemsONE ߩᯏ⢻ᡷༀ࡮ᒝൻߦ㑐ߔࠆᬌ⸛‫ࠩ࡯࡙ޔ‬ᡰេᵴേࠍⴕߞߡ޿ࠆ‫ޕ‬ᆔຬ㐳ߦߪ MEMS-ONE ࡊࡠࠫࠚࠢ࠻ߩࡊ
ࡠࠫࠚࠢ࠻࡝࡯࠳࡯ߢ޽ߞߚ᧲੩ᄢቇ ⮮↰ඳਯᢎ᝼ߦዞછ㗂޿ߚ‫ޕ‬ᆔຬߣߒߡߪ MEMS-ONE ࡊࡠࠫࠚࠢ࠻ෳ↹ડᬺߦട߃‫࡯࡝࠼ࡦࠔࡈޔ‬ડᬺߦ߽ዞછߒߡ㗂߈‫┙ߩࠩ࡯࡙ޔ‬႐߆ࠄᐢߊᗧ⷗ࠍ෼㓸ߢ߈ࠆࠃ߁ߦߒߚ‫ޕ‬
Φ.ታ↪ൻ‫ޔ‬੐ᬺൻߩ⷗ㅢߒߦߟ޿ߡ㧔࠰ࡈ࠻ో૕ߦኻߒߡ⸥タ㧕(1) ᚑᨐߩታ↪ൻน⢻ᕈ
MemsONE ߩታ↪ൻߦ߅޿ߡߪ‫ޔ‬ᄢ߈ߊ 3 Ბ㓏ߩࠬ࠹࡯ࠫ߇޽ࠆ‫ޕ‬࡮ ╙৻ࠬ࠹࡯ࠫ㧦⹺⍮ࠬ࠹࡯ࠫᄙߊߩᣣᧄ MEMS 㐿⊒࡮⎇ⓥ⠪ߦ MemsONE ߩሽ࿷ࠍ⹺⍮ߒߡ޿ߚߛߊ‫ޕ‬࡮ ╙ੑࠬ࠹࡯ࠫ㧦⍮ⷡࠬ࠹࡯ࠫ
࡙࡯ࠩߦ MemsONE ߳⸅ࠇߡ޿ߚߛ߈‫ޔ‬MemsONE ߩല↪ࠍ⍮ⷡߒߡ޿ߚߛߊ‫ޕ‬࡮ ╙ਃࠬ࠹࡯ࠫ㧦ታ↪ൻࠬ࠹࡯ࠫ
ᦨ⚳⊛ߦߪ‫╙ޔ‬ੑࠬ࠹࡯ࠫߢ MemsONE ࠍ⍮ⷡߒߚ⚿ᨐ‫⃻ߩࠩ࡯࡙ޔ‬႐ߦߡᵴ↪ߒߡ޿ߚߛߊ‫ޕ‬θ́18⃻࿷ߪ೨ㅀߩᄙጘߦࠊߚࠆᐢ๔ትવᵴേߦࠃࠅᣣᧄ MEMS 㐿⊒࡮⎇ⓥ⠪ߦ MemsONE ߩሽ࿷ࠍ⹺
⍮ߒߡ޿ߚߛ߈‫╙ޔ‬ੑࠬ࠹࡯ࠫߩ⍮ⷡࠬ࠹࡯ࠫߩᲑ㓏ߦ޽ࠆ‫ޕ‬⍮ⷡࠬ࠹࡯ࠫߪ‫࠻ࠢࠚࠫࡠࡊᧄޔ‬ᚑᨐߢ޽ࠆ MemsONEೋᦼࡃ࡯࡚ࠫࡦߩ Ǫ߇‫ޔ‬࿖ౝ MEMS㐿⊒࡮⎇ⓥ⠪߳᏷ᐢߊ㗏Ꮣߐࠇ‫ޔ‬ታ㓙࡙࡯ࠩߦ MemsONE ߩല↪ࠍ⍮ⷡߒߡ޿ߚߛߊࠬ࠹࡯ࠫߢ޽
ࠆ߇‫ߩࡓ࠹ࠬࠪߪߦ߼ߚߩߘޔ‬ᯏ⢻‫ߩ࠻࡯ࡐࠨࠩ࡯࡙߮ࠃ߅ޔ‬ਔ㕙߆ࠄ Ǫߎߣ߇೨ឭߣߥࠆ‫ޔࠅ߹ߟޕ‬Ǫ߇㘈ቴḩ⿷ࠍᓧࠄࠇࠆ

ߩ࡙࡯ࠩ⹏ଔ߇‫╙ޔ‬ਃࠬ࠹࡯ࠫߩ MemsONEታ↪ൻߩน⢻ᕈࠍᏀฝߔࠆߣ⸒߃ࠆ‫ޕ‬Ԙ⍮ⷡࠬ࠹࡯ࠫߩ⃻⁁ ⍮ⷡࠬ࠹࡯ࠫߪ‫ޔ‬MemsONEǪ

ߩ᥉෸₸ߣǪ ߩ࡙࡯ࠩ⹏ଔ㧔㘈ቴḩ⿷ᐲ㧕ߦࠃࠅ⁁ᴫಽᨆߢ߈ࠆ‫ޕ‬¾ MemsONEǪ
  Ǫ

ߩ᥉෸₸

ߩ᥉෸ߪ‫ޔ‬ᤓᐕᐲ᥉෸ᵴേᬌ⸛ᆔຬળߢ⺞ᩏߒߚ MemsONE ࿖ౝᏒ႐㧔ᷝઃ‫ޟޔ‬MemsONE࿖ౝᏒ႐‫ޠ‬㧕ࠍၮߦǪߩ᥉෸₸ࠍಽᨆߒߚ⚿ᨐࠍએਅߩ‫ޟ‬࿑ 3-6-14㧦MemsONEǪ ߩ᥉෸⁁ᴫ‫ޠ‬߅ࠃ߮‫ޟ‬࿑ 3-6-15㧦ᬺ⇇೎ߩ᥉෸⁁ᴫ㧔⴫㧕‫ޟޠ‬࿑ 3-6-16㧦ᬺ⇇೎ߩ᥉෸ࠪࠚࠕ㧔ࠣ࡜ࡈ㧕‫ޕߔ␜ߦޠ‬ ᯏ᪾‫ޔ‬㔚᳇‫╬ࠝࠗࡃޔ‬ߩઁಽ㊁࡮ᬺ⇇MemsONE ࿖ౝᏒ႐㧦225 ᯏ㑐㧔ᄢቇ࡮⎇ⓥᯏ㑐㧦56 ᯏ㑐‫ޔ‬ડᬺ㧦169 ᯏ㑐㧕

MemsONEǪ 㗏Ꮣᯏ㑐ᢙ㧦168 ᯏ㑐

MemsONE ࿖ౝᏒ႐ౝߩǪ 㗏Ꮣᯏ㑐ᢙ㧦111 ᯏ㑐㧔300 ࡜ࠗ࠮ࡦࠬ㧕‫ ⚂ޔ‬49㧑ᗐቯᄖߩǪ

࿑ 3-6-14㧦MemsONEǪ ߩ᥉෸⁁ᴫθ́19⾼౉ᯏ㑐ᢙ㧦57 ᯏ㑐㧔34%㧕

ో૕
ᬺ⇇ᯏ㑐ᢙ
㱎 ⾼౉ᯏ㑐ᢙ᥉෸₸䊤䉟䉶䊮䉴ᢙ

㪉㪉㪌
㪈㪈㪈
㪋㪐㩼
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ᄢቇ
ᬺ⇇ᯏ㑐ᢙ
㱎 ⾼౉ᯏ㑐ᢙ᥉෸₸䊤䉟䉶䊮䉴ᢙ

㪋㪇
㪈㪎
㪋㪊㩼
㪈㪈㪇

࿖┙⎇ⓥᯏ㑐䊶࿅૕ᬺ⇇ᯏ㑐ᢙ㪈㪍㱎 ⾼౉ᯏ㑐ᢙ㪋᥉෸₸㪉㪌㩼䊤䉟䉶䊮䉴ᢙ
㪐♖ኒᯏ᪾ᬺ⇇ᬺ⇇ᯏ㑐ᢙ㱎 ⾼౉ᯏ㑐ᢙ᥉෸₸䊤䉟䉶䊮䉴ᢙ

㪊㪈
㪈㪋
㪋㪌㩼
㪉㪌

㔚᳇ᬺ⇇
ᬺ⇇ᯏ㑐ᢙ
㱎 ⾼౉ᯏ㑐ᢙ᥉෸₸䊤䉟䉶䊮䉴ᢙ

㪐㪇
㪌㪇
㪌㪍㩼
㪈㪉㪋

↥ᬺ䊶ャㅍ↪ᯏེᬺ⇇ᬺ⇇ᯏ㑐ᢙ㪉㪈㱎 ⾼౉ᯏ㑐ᢙ㪈㪈᥉෸₸㪌㪉㩼䊤䉟䉶䊮䉴ᢙ
㪈㪊ᖱႎ䊶ㅢାᬺ⇇ᬺ⇇ᯏ㑐ᢙ㱎 ⾼౉ᯏ㑐ᢙ᥉෸₸䊤䉟䉶䊮䉴ᢙ

㪍㪌㪏㪊㩼㪍ൻቇ䊶ක≮䊶⵾⮎䊶❫⛽ᬺ⇇ᬺ⇇ᯏ㑐ᢙ㪈㪈㱎 ⾼౉ᯏ㑐ᢙ㪌᥉෸₸㪋㪌㩼䊤䉟䉶䊮䉴ᢙ㪍㋕㍑䊶㕖㋕㊄ዻ䊶㊄ዻ⵾ຠᬺ⇇ᯏ㑐ᢙ㪍㱎 ⾼౉ᯏ㑐ᢙ㪊᥉෸₸㪌㪇㩼䊤䉟䉶䊮䉴ᢙ
㪌

䉰䊷䊎䉴
ᬺ⇇ᯏ㑐ᢙ
㱎 ⾼౉ᯏ㑐ᢙ᥉෸₸䊤䉟䉶䊮䉴ᢙ㪋㪉㪌㪇㩼㪉
࿑ 3-6-15㧦ᬺ⇇೎ߩ᥉෸⁁ᴫ㧔⴫㧕ൻቇ䊶ක≮䊶⵾⮎䊶❫⛽㪌㩼㋕㍑䊶 㕖㋕㊄ዻ

㪊㩼

䉰䊷䊎䉴
㪉㩼

ᄢቇ

ᖱႎ䊶ㅢା
㪊㩼

㪈㪏㩼

↥ᬺ䊶ャㅍ↪ᯏེ㪐㩼࿖┙⎇ⓥᯏ㑐
㪎㩼

♖ኒᯏ᪾
㪈㪋㩼
㔚᳇
㪊㪐㩼

࿑ 3-6-16㧦ᬺ⇇೎ߩ᥉෸ࠪࠚࠕ㧔ࠣ࡜ࡈ㧕θ́20ಽᨆߩ⚿ᨐ‫ޔ‬࿖ౝ MemsONE Ꮢ႐߳ߩ᥉෸₸ߪ 49㧑ߢ޽ࠆ߇‫ޔ‬એਅߦ␜ߔ੹ᓟߩǪ ᥉෸ᵴേ࡮ ࡑࠗࠢࡠࡑࠪࡦ㧛MEMS ዷ㧔7/25㨪27㧕‫ޔ‬࿖㓙ࡠࡏ࠶࠻ዷ㧔11/28㨪12/1㧕╬ߩዷ␜ળ߳ߩ಴ዷ
࡮ MEMS ࡈࠔࡦ࠼࡝࡯ࠨ࡯ࡆࠬᯏ㑐ߩදജትવ࡮ ᣢߦǪ

ࠍ౉ᚻߒߚ࡙࡯ࠩ߆ࠄߩญࠦࡒ

࡮ MEMS ੱ᧚⢒ᚑ੐ᬺߦࠃࠆ౏⸳⹜߳ߩ᥉෸
╬ߦࠃࠅ‫ޔ‬᥉෸₸ߪ਄᣹ߔࠆ੍ቯߢ޽ࠆ‫ޕ‬ ߚߛߒ‫ ߇ࠩ࡯࡙ޔ‬MemsONEǪ

ߩ⾼౉ߔࠆ㓙ߪ‫ߩࡓ࠹ࠬࠪޔ‬ዉ౉ⅣႺߩᢛ஻‫ޔ‬MemsONE ⠌ᓧᤨ㑆ߩ⏕଻╬ߩḰ஻߇ᔅⷐߣߥࠆߚ߼‫ޔ‬Ǫ߇቟ଔߦ㗏Ꮣߐࠇߚߣߒߡ߽‫ޔ‬ᗐቯߐࠇࠆ MemsONE࡙࡯ࠩߩోߡ߇හዉ౉ߪ࿎㔍ߢ޽ࠆ‫ޕ‬ࠃߞߡ‫ࠩ࡯࡙ࠄࠇߘޔ‬ⅣႺࠍ⠨ᘦߒ‫ޔ‬Ǫ 㗏Ꮣ೨ߦឝߍߚ᥉෸⋡ᮡߪᯏ㑐ᢙ 150 ᯏ㑐‫ࠬࡦ࠮ࠗ࡜ޔ‬ᢙ 300 ࡜ࠗ࠮ࡦࠬߣߒߚ‫ߩߘޕ‬᥉෸⋡ᮡ߆ࠄ್ᢿߔࠆߣ࡜ࠗ࠮ࡦࠬᢙߪ⋡ᮡࠍචಽ㆐ᚑߒ‫ޔ‬ᯏ㑐ᢙ߽㆐ᚑߢ߈ࠆ⷗ㄟߺߢ޽ࠆ‫ޕ‬એਅߦ‫ޟޔ‬࿑ 3-6-17㧦Ǫ᥉෸⋡ᮡ߆ࠄߺߚ᥉෸⁁ᴫ‫ޕߔ␜ࠍޠ‬

㪋㪇㪇
㪊㪌㪇
㪊㪇㪇
㪉㪌㪇

ᯏ㑐ᢙ
䊤䉟䉶䊮䉴ᢙ

㪉㪇㪇
㪈㪌㪇
㪈㪇㪇
㪌㪇
㪇
㪌᦬

㪍᦬

࿑ 3-6-17㧦Ǫ㪎᦬㪏᦬᥉෸⋡ᮡ߆ࠄߺߚ᥉෸⁁ᴫ㧔2007/8/4 ⃻࿷㧕θ́21ࠃߞߡ‫ ߇ࠩ࡯࡙ޔ‬MEMS ⸳⸘࡮⎇ⓥߦ߅޿ߡ࠰ࡈ࠻࠙ࠚࠕߩ૶↪࠾࡯࠭߇⊒↢ߒߚᤨߦ┹ว໡ຠߩਛ߆ࠄ MemsONE ࠍㆬᛯߒߡ޿ߚߛߊߎߣ߇㊀ⷐߢ޽ࠅ‫ߪߦ߼ߚߩߘޔ‬Ǫ ߇㜞޿㘈ቴḩ⿷ࠍ₪ᓧߒߚ਄ߢ‫ߚߒ⛯⛮ޔ‬ਛ㐳ᦼ⊛ߥ MemsONE ᥉෸ᵴേ߇ᔅⷐߣߥࠆ‫ޕ‬ߐࠄߦ‫ޔ‬MEMS ಽ㊁એᄖߩǪ⾼౉㧔34%㧕ߦࠃࠅᯏ᪾‫ޔ‬㔚᳇‫ઁߩ╬ࠝࠗࡃޔ‬ಽ㊁࡮ᬺ⇇ߩᛛⴚ⠪ߣߩⲢว߇ଦㅴߐࠇ‫ޔ‬ᣂߚߥᏒ႐ഃ಴߇ᦼᓙߢ߈ࠆ‫ޕ‬¾ ǪǪߩ࡙࡯ࠩ⹏ଔ㧔㘈ቴḩ⿷ᐲ㧕ߩ࡙࡯ࠩ⹏ଔߪ‫╙ޔ‬ਃࠬ࠹࡯ࠫߩ MemsONEታ↪ൻߩน⢻ᕈࠍᏀฝߔࠆߣ౒ߦ‫ޔ‬MemsONE᥉෸᜛ᄢ㧔ᣢߦǪ  ߹ߚ‫ޔ‬Ǫࠍ౉ᚻߒߚ࡙࡯ࠩ߆ࠄߩญࠦࡒ㧕ߦᄢ߈ߥᓇ㗀߇޽ࠆ‫ޕ‬ߩ࡙࡯ࠩ⹏ଔߦ߅޿ߡߪ⃻ᤨὐߩǪ ߩቢᚑᐲ߽㊀ⷐߢ޽ࠆ߇‫੹ޔ‬ᓟߩ MemsONE ᯏ⢻ᡷༀ߅ࠃ࡙߮࡯ࠩࠨࡐ࡯࠻߇ᦨ߽㊀ⷐߢ޽ࠆ‫ޕ‬એਅߦ‫ޔ‬೨ㅀߩࡊࡠࠫࠚࠢ࠻⚳ੌᓟ᥉෸ᵴേ⚿ᨐࠍ␜ߔ‫ޕ‬࡮ MemsONE ᯏ⢻ᡷༀ
ǩ
࡮ Ǫ
Ǫ

㧔ਛ㑆ᚑᨐ㧕࡙࡯ࠩ߆ࠄߩᡷༀⷐ᳞ࠍၮߦ‫⃻ޔ‬࿷㐿⊒ㆀⴕਛ‫ޕ‬ߩ࡙࡯ࠩࠨࡐ࡯࠻
⻠⠌ળ‫ޔ‬ታ⠌‫ߩࠄ߆ࠩ࡯࡙ޔ‬໧޿วࠊߖኻᔕߪ㜞޿⹏ଔ₪ᓧ‫ޕ‬એ਄‫⹺ޔ‬⍮ࠬ࠹࡯ࠫ‫ޔ‬⍮ⷡࠬ࠹࡯ࠫߦ߅޿ߡታ↪ൻߦะߌߚ⁁ᴫߪ⋡ᮡએ਄ߩᚑᨐߢ޽ࠆߎߣ߆
ࠄ‫ޔ‬MemsONE ታ↪ൻߩน⢻ᕈߪචಽ޽ࠆߣ⠨ኤߔࠆ‫ޕ‬¾ ┹ว໡ຠߣߩᲧセ⃻࿷‫ޔ‬MemsONEǪ

ߣ┹วߣߥࠆ MEMS ↪✚วࠪࠬ࠹ࡓߪ㧟ࠪࠬ࠹ࡓ޽ࠆ߇‫ߡోޔ‬ᶏᄖ⵾ߢ޽ࠆ‫ޕ‬એਅߦߘߩࠪࠬ࠹ࡓࠍ␜ߔ‫ޕ‬
࡮CoventorWare㧔Coventor ␠㧕࡮IntelliSuite㧔IntelliSense ␠㧕࡮MEMS Pro㧔MEMSCAP ␠㧕࡙࡯ࠩߩ⾼౉್ᢿߣߒߡᦨ㊀ⷐⷞߐࠇࠆ‫౉⾼ޟ‬ଔᩰ‫ޟߣޠ‬ᯏ⢻ߩలታᐲ‫┹ࠅࠃޠ‬ว໡ຠࠍᲧセߒߚࡐ࡚ࠫࠪ࠾ࡦࠣࡑ࠶ࡊࠍ࿑㧠㧔ᣂࠛࡀ࡞ࠡ࡯࡮↥ᬺᛛⴚ㐿⊒ᯏ᭴⺞ᩏᆔ⸤‫ޟ‬MEMS ↪⸳⸘࡮⸃ᨆᡰេࠪࠬ࠹ࡓߩᵄ෸ലᨐߣ᥉෸ᵴേߦ㑐ߔࠆ⺞ᩏ㧔H18/3㧕ࠃࠅ‫ޠ‬㧕ߦ␜ߔ‫ޕ‬

θ́22


⾼౉ଔᩰ
㜞޿

CoventorWar

IntelliSuiteᯏ⢻ߩలታᐲૐ޿㜞޿MEMS Pro቟޿

MemsONE ߇⋡ᜰߔࡐ࡚ࠫࠪࡦ

࿑ 3-6-18㧦⾼౉ଔᩰߣᯏ⢻ߩలታᐲߩࠃࠆࡐ࡚ࠫࠪ࠾ࡦࠣ  ߹ߚ‫┹ޔ‬วࠪࠬ࠹ࡓߦ߅޿ߡ‫ ࡓ࠹ࠬࠪޟ‬A㧔઒⒓㧕‫߇ޠ‬࿖ౝᏒ႐ߢ㜞޿ࠪࠚࠕ㧔⚂ 60㧑㧕ࠍᜬߞߡ޿ࠆ‫ ࡓ࠹ࠬࠪޕ‬A ߦߪߥߊ‫ޔ‬MemsONE ߩߺ߇᦭ߒߡ޿ࠆᯏ⢻㧔MemsONE ߩఝ૏ᕈ㧕ߪએਅߩߣ
߅ࠅߢ޽ࠆ‫ޕ‬࡮ ࠺ࡃࠗࠬ᭴ㅧ૞ᚑ㧔3 ᰴర࠰࡝࠶࠼ࡕ࠺࡜࡯㧕࡮ ࡊࡠ࠮ࠬ DB࡮ ⍮⼂ DB࡮ ធวታⵝ⸃ᨆ࡮ ࡊࡠ࠮ࠬㅒ໧㗴࠰ࡈ࠻࡮ ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆ࡮ శ࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆ ೋᔃ⠪ߦኻߔࠆ MEMS ᢎ⢒ߦ೑↪น⢻ߥࡊࡠ࠮ࠬ㧛⍮⼂ DB ෸߮ࡊࡠ࠮ࠬㅒ໧㗴࠰ࡈ࠻‫ޔ‬MEMS㐿⊒ߢᔅ㗇ߣߥࠆធวታⵝ⸃ᨆ‫੹ޔ‬ᓟߩᏒ႐᜛ᄢ߇⷗ㄟ߹ࠇࠆ࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆߥߤ‫ޔ‬ᐢ▸࿐ߦᷰࠆఝ૏ᕈࠍ᦭ߒߡ޿ࠆߎߣ߇ࠊ߆ࠆ‫ޕ‬θ́23  ৻ᣇߢ‫ ࡓ࠹ࠬࠪޔ‬A ߣห᭽ߩᯏ⢻ߦ㑐ߒߡߪ MemsONE ߩቢᚑᐲ߇⧯ᐓૐ޿ߎߣߪุ߼ߥ޿‫ߘޕ‬ߎߢ‫ޔ‬ቢᚑᐲߩะ਄ߩߚ߼ߦ‫ޔ‬MemsONEǪ ࠍታ⾌ߦߡ㗏Ꮣߒ‫ޔ‬ਇౕว߿ᠲ૞ᕈߩ໧㗴ߥߤࠍ෼㓸ߒߡᡷༀߦദ߼ߡ޿ࠆ‫ޔߚ߹ޕ‬MemsONEǪ ታ⠌⻠ᐳࠍ᧲੩ߢ 6 ࿁‫ޔ‬੩ㇺߢ 3 ࿁㧔޿ߕࠇ੍߽ቯ㧕㐿௅ߒ‫ޔ‬ታ㓙ߦ MemsONEǪ

ࠍ೑↪ߒߡ޿ࠆ࡙࡯ࠩ߆ࠄߩ↢ߩჿ߽㓸߼‫ޔ‬MemsONE ᱜᑼ ߳ߩ෻ᤋࠍ㗅ᰴⴕߞߡ޿ࠆ‫ࠅࠃߦࠇߎޕ‬ᓟㅀߩૐଔᩰ⽼ᄁߣ⋧߹ߞߡ‫ޔ‬MemsONE ߩൎ▚߇⷗ㄟ߹ࠇࠆ‫ޕ‬(2) ᵄ෸ലᨐ
࿖ౝ MEMS ᛛⴚ⠪߳ߩ᥉෸ߪ೨ㅀߦ␜ߒߚㅢࠅߢ޽ࠆ߇‫ޔ‬ᗐቯߢ߈ߥ߆ߞߚ MEMS ಽ㊁એᄖߩǪ ⾼౉㧔26%㧕ߦࠃࠅᑪ▽‫ޔ‬ᯏ᪾╬ߩઁಽ㊁࡮ᬺ⇇ߩᛛⴚ⠪ߣߩⲢว߇ଦㅴߐࠇ‫ޔ‬ᣂߚߥᏒ႐ഃ಴
߇ᦼᓙߢ߈ࠆ‫ޕ‬(3) ੐ᬺൻ߹ߢߩࠪ࠽࡝ࠝ એਅ‫ޟޔ‬࿑ 3-6-19㧦੐ᬺൻࠬࠤࠫࡘ࡯࡞‫ޕߔ␜ࠍޠ‬Ver.1.0䋨ડᬺะ䈔䋩
䊥䊥䊷䉴䋨੍ ቯ䋩࿑ 3-6-19㧦੐ᬺൻࠬࠤࠫࡘ࡯࡞θ́24

 ߹ߚ‫ޔ‬MEMS-ONE ᥉෸ᵴേᬌ⸛ળߦߡ‫┙ߩࠩ࡯࡙ࠆߔ౉⾼ޔ‬႐ࠍ㊀ⷞߒߚ MemsONEǪ

એ㒠ߩ⽼ᄁߦ߅ߌࠆ⹦⚦ᬌ⸛ࠍⴕߞߚ‫੹ޕ‬ᓟ‫ޔ‬Ǫ એ㒠ߩ⽼ᄁᣇᴺߪߘߩᬌ⸛⚿ᨐࠍၮߦ⏕ቯߔࠆ੍ቯߢ޽ࠆ‫ޕ‬એਅߦᬌ⸛⚿ᨐ‫⴫ޟޔ‬㧝MemsONE ᱜᑼ⽼ᄁ࡜ࠗࡦ࠽࠶ࡊ‫ޕߔ␜ࠍޠ‬⴫ 3-6-3㧦MemsONEVer1.0 ⽼ᄁ࡜ࠗࡦ࠽࠶ࡊ
㩷⽼ᄁᒻᘒ
ᬌ⸛㗄⋡

㩷⽼ᄁଔᩰ䇭䋨౞䋩ડᬺะ䈔䇭୘೎⹏ଔ↪

㩷⚂㪈㪇ਁ䋯ᯏ⢻

䇭ᯏ⢻೙㒢
䇭㘈ቴ▤ℂ

㩷㪤㪜㪤㪪⸳⸘䊶㐿⊒ታോ↪

⚂㪈㪌㪇ਁ䋯ᢎቶ㩷䊶㪊㪌㪇ਁ䋨ၮᧄ䉶䉾䊃㶎䋩䋯ᧄ 䋨䊐䊧䊷䊛䊪䊷䉪䇮䌄䌂䉕฽䉃䋩䋨䊐䊧䊷䊛䊪䊷䉪䇮䌄䌂䉕฽䉃䋩䋨䊐䊧䊷䊛䊪䊷䉪䇮䌄䌂䉕฽䉃䋩

ήᦼ㒢
㩷
䈅䉍

ᢎቶ↪

㩷䊶㪈㪇㪇ਁ䌾㪉㪇㪇ਁ䋯ᯏ⢻䋨䊐䊧䊷䊛䊪䊷䉪䇮䌄䌂䉕฽䉃䋩䇭૶↪⸵⻌ᦼ㑆䉝䉦䊂䊚䉾䉪ะ䈔㩷䈭䈚ᄢቇ䊶౏⊛ᯏ㑐⎇ⓥ⠪↪

㩷⚂㪍ਁ䋯ᧄ

䋨䊐䊧䊷䊛䊪䊷䉪䇮䌄䌂䉕฽䉃䋩

⚂㪌ᐕ

㩷㪈ᐕ

䇭䈅䉍

㩷䈭䈚

ో䈩䈱⽼ᄁ䈮䈍䈇䈩䇸䉰䊘䊷䊃䉶䊮䉺䊷䇹㶎ၮᧄ䉶䉾䊃䈱⸃ᨆᯏ⢻䈲䇮ᯏ᭴⸃ᨆ䇮䊒䊨䉶䉴⸃ᨆ䇮䉡䉢䉾䊃䉣䉾䉼䊮䉫䉲䊚䊠䊧䊷䉺䇮ㅒ໧㗴⸃ᨆᯏ⢻䈱䋴ᯏ⢻߹ߚ‫⽼ޔ‬ᄁᓟߩ࡙࡯ࠩ଻቞ߦ߅޿ߡߪ‫ߦࠩ࡯࡙ߩߡోޔ‬ኻߒ Web ឝ␜᧼ߦࠃࠆ໧޿วࠊߖኻᔕ‫ࡃޔ‬ࠣࡈࠖ࠶ࠢࠬ

ߩឭଏࠍήఘߢታᣉߔࠆ੍ቯߢ޽ࠆ‫ߦᦝޕ‬ᷓ޿ኻᔕ㧔ࠗࡦࠬ࠻࡯࡞ࠨ࡯ࡆࠬ‫ࡑ࠲ࠬࠞޔ‬ࠗ࠭‫ޔ‬୘೎૶↪ࠦࡦࠨ࡞࠹ࠖࡦࠣ╬㧕ߦ㑐ߒߡߪ‫⃻ޔ‬࿷‫⽼ޔ‬ᄁᯏ㑐ߦߡᬌ⸛ਛߢ޽ࠆ‫ޕ‬
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

 ᣣᧄᯏ᪾ቇળ ⎇ⓥಽ⑼ળ

 ᣣᧄ᧚ᢱቇળ╙  ࿁⎕უജቇࠪࡦࡐࠫ࠙ࡓ
 ᣣᧄᯏ᪾ቇળ//᧚ᢱ
ജቇࠞࡦࡈࠔ࡟ࡦࠬ
 ╙  ࿁ᣣᧄ᧚ᢱቇળ᧚
ᢱജቇ⺣⹤ળ
 ╙  ࿁ᣣᧄ᧚ᢱቇળ᧚ᢱ
࡮᭴ㅧା㗬ᕈࠪࡦࡐࠫ࠙ࡓ
 ╙  ࿁ᣣᧄ᧚ᢱቇળ᧚
ᢱജቇ⺣⹤ળ
 ╙  ࿁ࠛ࡟ࠢ࠻ࡠ࠾ࠢࠬታ
ⵝቇળ⻠Ṷᄢળ
 ╙  ᦼㅢᏱ✚ળ࡮ቇⴚ⻠Ṷળ㧔ᣣᧄ᧚ᢱቇળ㧕 ᣣᧄવᾲቇળ╙  ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓ



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ᣣᧄᯏ᪾ቇળᾲᎿቇࠦࡦࡈ
ࠔ࡟ࡦࠬ 
 ᐕ㔚ሶᖱႎㅢାቇળ࠰
ࠨࠗࠛ࠹ࠖᄢળ
35th EUROPEANMICROWAVE
CONFERENCE
ᐔᚑ 18 ᐕ㔚᳇ቇળో࿖ᄢળ

ᣣᧄ㊄ዻቇળᤐᦼో࿖ᄢ
ળ㜞ಽሶ⸛⺰ળ
(㜞ಽሶቇળ੍Ⓜ㓸)Materials Research Society
Fall Meeting㔚᳇ቇળࡑࠗࠢࡠࡑࠪࡦ࡮࠮
ࡦࠨࠪࠬ࠹ࡓ⎇ⓥળ 
ᐔᚑ  ᐕ㔚᳇ቇળో࿖ᄢળ

㗴ฬMEMS ࡄ࠶ࠤ࡯ࠫኽᱛធวㇱߩᒝᐲା㗬ᕈ⹏ଔMEMS ࡄ࠶ࠤ࡯ࠫኽᱛធวㇱߩᒝᐲା㗬ᕈ⹏ଔMEMS ࡄ࠶ࠤ࡯ࠫኽᱛធวㇱߩᒝᐲା㗬ᕈ⹏ଔMEMS ࡄ࠶ࠤ࡯ࠫኽᱛធวㇱߩᒝᐲା㗬ᕈ⹏ଔMEMS ࡄ࠶ࠤ࡯ࠫኽᱛធวㇱߩᒝᐲା㗬ᕈ⹏ଔ
MEMS ࡄ࠶ࠤ࡯ࠫኽᱛធวㇱߩᒝᐲା㗬ᕈ⹏ଔ
MEMS ࡄ࠶ࠤ࡯ࠫኽᱛធวㇱߩᒝᐲ⹜㛎 ૞⵾෸߮⹏ଔMEMS ࡄ࠶ࠤ࡯ࠫኽᱛធวㇱߩᒝᐲା㗬ᕈ⹏ଔ㧔ߖࠎᢿ⽶⩄ߦࠃࠆ⹏ଔ㧕ࡑࠗࠢࡠ࠺ࡃࠗࠬ⸳⸘↪࠺࡯࠲ࡌ࡯ࠬ
᭴▽ࠍᜰะߒߚᕆ᜛ᄢㇱᵹࠇߩ․ᕈᬌ
⸽ࡑࠗࠢࡠࡒࠠࠨ࡯ౝߦ߅ߌࠆḴઃ⸳ᵹ〝ߩᷙวߣᵹേ․ᕈ
FDTD ᴺߦࠃࠆ㕖✢ᒻ࠺ࡃࠗࠬ߇ታⵝ
ߐࠇߚ࿁〝⸃ᨆߩല₸ൻߦ㑐ߔࠆ৻ᬌ⸛
Development of High Efficiency
Rectification Circuit for mW-class
Rectennaࠦࡓ࠼࡜ࠗࡉࠕࠢ࠴ࡘࠛ࡯࠲ࠍ↪޿ߚ
AFM ࡊࡠ࡯ࡉߦ㑐ߔࠆ⎇ⓥࠪ࡝ࠦࡦߣࠟ࡜ࠬߩ㓁ᭂធวㇱߦ෸߷ߔធว᧦ઙ࿃ሶߩᓇ㗀ᄙಽጘࡐ࡝ࠕࡒ࠼ࠕࡒࡦࠍࠣ࡜ࡈ࠻ߒ
ߚࠪ࡝ࠞߦࠃࠆࠛࡐࠠࠪ᮸⢽ߩ⎬ൻߣ⎬ൻ‛ߩ․ᕈ
High aspect ratio grating fabrication by
Imprint lithography㧞ᰴరశࠬࠠࡖ࠽↪ࠬࡄࠗ࠳࡯࡟࠶ࠣ
ဳࡑࠗࠢࡠ㨄㨅ࠬ࠹࡯ࠫߩ㔚᳇ᯏ᪾⊛․ᕈ⸃ᨆ⿒ᄖಽశᄤ૕ᦸ㆙㏜↪ࡑࠗࠢࡠࠪࡖ࠶
࠲ࠕ࡟ࠗߩ⹜૞
⥄Ꮖ⚵❱ൻනಽሶ⤑ߦࠃࠆ MEMS ᭴ㅧߩࠬ࠹࡚ࠖࠢࠪࡦ࿁ㆱ
㜞๟ᵄ MEMS ᔕ↪ߩߚ߼ߩᓸዊ⌀ⓨ
▤⵾૞

⊒⴫ઍ⴫⠪
ự↰ ❥
ự↰ ❥
᩿ᄢテ
ự↰ ❥
᩿ᄢテ
᩿ᄢテ
ᮮጊศౖ
᩿ᄢテ
ਛㇱਥᢘ

ਛㇱਥᢘ
⮮᫪๺ඳ

⮮᫪๺ඳ

ᯅญ ේ

ᄢᯅ ୃ
ဝᎹ♿ᄦ

ᐔ੗⟵ᒾ
ᐕศ ᵗ

⮮↰ඳਯ
⮮↰ඳਯ
⮮↰ඳਯ

   ᐕᤐᦼ╙  ࿁ᔕ↪‛㨪ℂቇ㑐ㅪㅪว⻠Ṷળ  ᣣᧄᄤᢥቇળ  ᐕ⑺ቄᐕ㨪ળ  The 12th. Int. Display
㨪
Workshop / Asia Display 2005  SPIE Internatinoal㨪
Symposium on
Optomechatronic Technologies  Nanoengineering ymposium㨪
2005, Korea Institute ofMachinery and Materials  IEEE/LEOS Int. Conf. on
㨪
Optical MEMS and Their
Applications






  The 18th Int. Vacuum㨪
Nanoelectronics Conference(IVNC 2005)  The Croucher Foundation㨪
Advanced Study Institute(ASI) "Frontier Research on
Nano-mechanics"  Proc. 13th Int. Conf. on㨪Solid-State Sensors, Actuatorsand Microsystems(TRANSDUCERS '05)




⒖േᯏ᭴ࠍᜬߟࠞࡦ࠴࡟ࡃ࡯ߩ⵾૞ᛛ
ⴚඨዉ૕ᓸ⚦ടᎿᛛⴚߦࠃࠆᄙᄤ૕ಽశ
↪ࡑࠗࠢࡠࠪࡖ࠶࠲ࠕ࡟ࠗߩ㐿⊒A High Fill-factor Comb-driven XY-stage
with Topological Layer Switch
Architecture
MEMS Technologies for Micro Optics– From Fiber Optic Communication to
Display
MEMS for micro optics from fiber optic
communication to display

⮮↰ඳਯ
ᐕศ ᵗ
⮮↰ඳਯ

⮮↰ඳਯ

ᐕศ ᵗ

MEMS for Optical Information
Technologyᐕศ ᵗ

A Laser Display using a PZT-Actuated 2D
Optical Scanner
Design and Fabrication of A MEMS 1-D
Optical Scanner using Self-Assembled
Vertical Combs and Scan-Angle
Magnifying Mechanism
A 2D Optical Lens Scanner with Small
Footprint Actuators
Electrostatic Micro-Shutter Array for
Infrared Spectrograph
A 2x2 Optical Add-Drop Module with
Attenuation Controllability using Two
45deg Movable Micromirrors
An RF-MEMS Device with a Lateral
Field-Emission Detector⮮↰ඳਯ

A LATERAL FIELD-EMISSION
RF MEMS DEVICE⮮↰ඳਯReal Time Observation of Micromachined
Field Emission Tip using Transmission
Electron Microscope
A LIGHT-IN LIGHT-OUT MICROMIRROR DEVICE
Foxtail Actuators
Monolithic Integration of High Voltage
Driver Circuits and MEMS Actuators by
ASIC-like postprocess

⮮↰ඳਯ

ᐕศ ᵗ

⮮↰ඳਯ
⮮↰ඳਯ
ᐕศ ᵗ

⮮↰ඳਯ

⮮↰ඳਯ
⮮↰ඳਯ
⮮↰ඳਯ



Micro XY-stages with Spider-leg
Actuators for 2-Dimensional Optical
Scanning
A MEMS 1-D Optical Scanner for Laser
Projection Display using Self-assembled
Vertical Combs and Scan-angle
Magnifying Mechanism
Piezoelectric 2D-Optical Micro Scanners
With PZT Thick Films

ᐕศ ᵗ

A Micro Dice -An Electrostatic Micro
Random number generator
An Electrostatic Inertia-Driven Micro
Rover ᣣᧄ㊄ዻቇળ 2005 ᐕ⑺ᦼ The Fatigue and Fracture of Microsized(137 ࿁)ᄢળ⻠Ṷ
TiAl
㧔JIM Fall Meeting㧕㓸᧤㨼㨿㩧㩕㩨㨺㩛ᾖ኿ߦࠃࠆᣇ૏㈩ⴕ㩐㨹㩃㩣㩏㩓⚿᥏⋧ߩᓸ⚦㩔㩩㩊㨺㩐㩧㩂㩨 2005 MRS Fall Meeting
Fine Patterning of Oriented Nickel
NanoCrystals using a Focused Ion Beam FIS Conference on future
The present and future research systems
integrated systems
on MEMS and future challenges of testing
integrated systems 2005 MRS Spring Meeting
Effects of Humidity History on theTensile Deformation Behaviour ofPoly(methyl-methacrylate)(PMMA)Films
Micro-Fracture Toughness Testing of TiAlbased Alloys with a Fully Lamellar
Structure
Fatigue Testing of microsized samples of
-TiAl based materialth Proceedings of The 19
Two-Dimensional Silicon Smart Tactile㨪IEEE International
Image-Sensor with Single Sensing
Conference on Micro
Diaphragm Actuated by Vibrating
Electro Mechanical Systems
Pressure for Simultaneous Detection of(IEEE MEMS 2006)
Force and Object Hardness Distributions
Ultimate 1/f noise reduction in Conference Proceedings of
JFET-based Operational Amplifiers for㨪
The International Conference
on Electrical Engineering 2005 High-Performance CMOS Integrated
Smart Microsensors
(ICEE2005)
Fabrication of Temperature Controlled
Precise Three-Axis Accelerometer with
Stabilized Temperature Characteristics
over a Wide Temperature Range Digest of Technical papers
Multifunctional Smart Tactile-Image㨪
of the 13th International
Sensor with Integrated Arrays of Strain
Conference on Sensors,
and Temperature Sensors on Single
Actuators, and Microsystems
Air-Pressurized Silicon Diaphragm

⮮↰ඳਯ



  Proc. 17th Int. Symp. on㨪Integrated Ferroelectrics(ISIF 2005)  IEEE MEMS 2005
㨪



















ᐕศ ᵗ

ᐕศ ᵗ

⮮↰ඳਯ
⢈ᓟ⍫ศ
⢈ᓟ⍫ศ
⢈ᓟ⍫ศ
⢈ᓟ⍫ศ

⢈ᓟ⍫ศ

⢈ᓟ⍫ศ

⢈ᓟ⍫ศ
㜞የ⧷㇌

㜞የ⧷㇌

㜞የ⧷㇌

㜞የ⧷㇌



(Transducers’05)
















  Proceedings of The
㨪Thirteenth International
Conference on Solid-State
Sensors, Actuators andMicrosystems,
Transducers 2005 
Proceedings of The EighthInternational Symposiumon Sputtering & Plasma
Process, ISSP 2005 
Proceedings of The
Nineteenth IEEE
International Conference on
Microelectro mechanical
Systems, MEMS 2006  ࠽ࡁቇળ ╙㧟࿁ᄢળ

Smart Microfluidic Electrochemical DNA
Sensors Integrated Signal Processing
Circuits
Highly Sensitive Electron-Emission-Type
Infrared Sensor Using a Single Crystalline
LiNbO
Improvement of thermal Response in
Temperature Controlled Precise
Three-Axis Accelerometer with Stabilized
Characteristics over a Wide Temperature
Range
Performance and Relliability Study ofSi(111) CMOS Subjected to High
Mechanical Stress for Smart Sensor
Application
The Fabrication of Filter-lessFluorescence Detection Sensor Array
Using CMOS Image Sensor TechniqueFabrication of Two-Dimensional pH
CMOS Image Sensors and Real Time
Imaging of Chemical Reaction
Neural Recording with Low-Invasive Si
Microprobe Array
Wafer-Level Integration Technology ofSurface Mount Devices Using AutomaticParts Alignment Technology withVibration
Evaluation of Novel Blood-Hemoglobin
Measurement Microsystem with
Integrated Processing Circuits and Si(110)45º-Mirrors
Effects of Gas Flow Ratio in PE-CVD on
Elastic Properties of Sub-Micron Thick
Silicon Nitride Film for MEMS㜞የ⧷㇌

Ti-Ni SMA Film Actuated Si Cantilever

↢ᵤ⾗ᄢ

㜞የ⧷㇌

㜞የ⧷㇌

㜞የ⧷㇌

㜞የ⧷㇌

㜞የ⧷㇌

㜞የ⧷㇌
㜞የ⧷㇌

㜞የ⧷㇌

↢ᵤ⾗ᄢ

Beams for MEMS Probe Card
Thermomechanical Characteristics of
Sputtered Ti-Ni SMA Films for
Derivation of Constitutive Equation↢ᵤ⾗ᄢSelf-Propagating Explosive Reactions in
Nanostructured Al/Ni Multilayer Films as
A Localized Heat Process Technique for
MEMS

↢ᵤ⾗ᄢ

㓸᧤ࠗࠝࡦࡆ࡯ࡓߦࠃࠆ࠽ࡁ㊄ဳࠍ↪ ᣧਸᅚᐽౖ
޿ߚ㊄ዻࠟ࡜ࠬߩ࠽ࡁࠗࡦࡊ࡝ࡦ࠻

 

Development of Micro-inductor bySuperplastic Forming of Metallic GlassSuperplastic Nano Forming of Optical
Component of Metallic Glass
Characteristic Behavior of Zr-based
Metallic Glass under Rapid Heating
and the Application to Microforming
Development of a Palmtop Fatigue
Testing Machine and the Characteristic
Superplastic nanoforming of opticalcomponents of Pt-based metallic glassᣧਸᅚᐽౖ(᜗ᓙ⻠Ṷ) Micro/nano-forming of
metallic glasses
Integration of metallic glass - Application
to micro/nano-fabrication ╙  ࿁႟ᕈടᎿㅪว⻠Ṷળ ㊄ዻࠟ࡜ࠬࠍ↪޿ߚ෻኿ဳᐓᷤశቇ⚛
ሶߩ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ᚑᒻ㧔ᣣᧄ႟ᕈടᎿቇળఝ⑲⺰ᢥ⻠Ṷᅑബ⾨ฃ⾨㧕

International nanoimprint andTime Evolution Analysis of the Resist
nanoprint technology
Profile in Thermal Nanoimprint
conference
╙  ࿁ᔕ↪‛ℂቇ㑐ଥㅪว ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ߦ߅ߌࠆ࡟ࠫࠬ࠻
ᒻ⁁ߩᤨ㑆ᄌᒻ⸃ᨆΣ(ࠪࡒࡘ࡟࡯ࠪ
⻠Ṷળ࡚ࡦ)ᾲ࠽ࡁࠗࡦࡊ࡝ࡦ࠻ߦ߅ߌࠆ࡟ࠫࠬ࠻
ᒻ⁁ߩᤨ㑆ᄌᒻ⸃ᨆΤ(ታ㛎) ᐔᚑ  ᐕᐲ႟ᕈടᎿᤐቄ⻠ FIB-W ࠺ࡐ࡚ࠫࠪࡦ㨯ࡄ࠲࡯࠾ࡦࠣߦ㨪Ṷળ⻠Ṷ⺰ᢥ㓸
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⻠Ṷ⺰ᢥ㓸ߣߧࠇᕈߩലᨐ
 3rd KU-KITECH symposium
Superplastic NanoForming of Optical㨪Components of Pt-based Metallic Glass Thermec’06
Superplastic Nanoforging of Pt-based
Metallic Glass with Dies of Zr-BMG and
Glassy Carbon Fabricated by Focused Ion
Beam

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2nd JSME/ASME Int. Conf.
on Materials and Processing
2005

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12th International Symposium
on Metastable and Nano
Materials (ISMANAM)
12th Int. Conf. on Rapidly
Quenched & Metastable
Materials(2005)

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The 5th International
NNT(Nanoimprint andNanoprint Technology)
Conference  in Proc. 20th IEEE Int. Conf.
㨪
on Micro Electro Mechanical
Systems (MEMS 2007)  in Proc. 5th Int. Conf. on
㨪
Optics-Photonics Design &Fabrication (ODF ’06)  SPIE Optics East – Photonics
㨪
for Applications in Industry,
Life Sciences, andCommunication, 2006  in Proc. 32nd Int. Conf. on㨪
Micro- and Nano-Engineering
2006 (MNE 2006)  in Proc. IEEE/LEOS Int.
㨪
Conf. on Optical MEMS and
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Conference㨪  in Proc. Int. Conf. on㨪
Microtechnologies in
Medicine and Biology(MMB 2006),
  in Proc. SPIE Photonics West,㨪
MOEMS-MEMS 2006

Nanoimprint of Metallic Glasses

ᣧਸᅚᐽౖTopological laywer switch technique formonolithically integrated electrostatic
XYZ-stage
tunable light grating integrated withhigh-voltage driver IC for image
projection display
Fabrication of micro-tips by lift-off
process with contact shadow masking
Wavelength division multiplexing for
MEMS-based fiber optic endoscope⮮↰ඳਯMicro optomechanical devices for
medical endoscope applications

⮮↰ඳਯ

ᐕศ ᵗ
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Time dependence of field-emission⮮↰ඳਯcurrent for silicon RF-MEMS applications
A 3D optical crossconnect using
microlens scanner with topologically layerswitch architecture
Design and fabrication of optical MEMS
scannes for optically modulated fiber
endoscopes
A comb-driven XY-stage with topologicallayer switch architecture for high-density
arrayed systems
A 9x9 optical cross-connect utilizing
silicon lens-scanners with spider-leg
actuators
A photovoltaically modulated MEMS
optical scanner for fiber endoscope

⮮↰ඳਯ

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⮮↰ඳਯ

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Optical characterization of 9x9 opticalᐕศ ᵗcross connect utilizing silicon lensscanner with spider-leg actuators  㔚ሶᖱႎㅢାቇળ  ᐕ࠰ శࡈࠔࠗࡃㅢାߦ߅ߌࠆ㧹㧱㧹㧿ᛛⴚ ᐕศ ᵗࠨࠛ࠹ࠖᄢળ
  㔚 ᳇ ቇ ળ  ࡑ ࠗ ࠢ ࡠ ࡑ ࠪ శࡈࠔࠗࡃౝⷞ㏜↪శ㚟േ㧹㧱㧹㧿ࠬ ⮮↰ඳਯࡦ࡮࠮ࡦࠨࠪࠬ࠹ࡓ⎇ⓥળ ࠠࡖ࠽ࠪࠬ࠹ࡓ
  ᐔᚑ  ᐕᐲ 㔚᳇ቇળ࠮ࡦ 㔚ᭂ᭴ㅧ࡮ᒢᕈ૕ߩࠇ޿߿࡯߱ࠎࠅߦ ⮮↰ඳਯ㨪ࠨ࡮ࡑࠗࠢࡠࡑࠪࡦḰㇱ㐷✚ ࠂࠆ㕒㔚ᰏᱤဳ㨄㨅ࠬ࠹࡯ࠫߩ㜞ኒᐲว⎇ⓥળൻ 

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2006 MRS Fall Meeting

Development of Evaluation Method for
Delamination Strength Between
Micro-Sized Materials in MEMS Devices
Effects of P content on morphology ofnanocrystals induced by FIB irradiation in
Ni-P amorphous alloy
Effect of Applied Stress on the FIB
Irradiation-induced Nanocrystalline
Morphology in Amorphopus Ni-P
MNC2006
Effects of Exposure on Adhesive Strength
between Microsized Photoresist and Si
Substrate
╙  ࿁㜞ಽሶ⸛⺰ળ
MEMS ↪ࡈࠜ࠻࡟ࠫࠬ࠻ߩࡑࠗࠢࡠ
ࠨࠗ࠭ᦛߍ․ᕈߦ෸߷ߔ㔺శ㊂ߩᓇ㗀
ᣣᧄ㊄ዻቇળ‫ ޔ‬ᐕ⑺ᦼ 㔚⸃⎇⏴ߦࠃࠆᓸዊࠨࠗ࠭ᒁᒛ⹜㛎╙  ࿁ ᄢળ૞ᚑᴺߩ㐿⊒
㧲㧵㧮ᾖ኿⺃⿠࠽ࡁ⚿᥏ߩᨆ಴ᒻᘒߦ
෸߷ߔᔕജ⽶⩄ߩᓇ㗀╙  ࿁ᣣᧄቇⴚળ⼏᧚ᢱᎿ MEMS ↪ᓸዊ᭴ㅧㇱ᧚ߩធ⌕ᒝᐲ᷹ቇㅪว⻠Ṷળ
ቯᴺߩ㐿⊒ߣ⹏ଔ

International Symposium on
Si microprobe array chips for in-vivo
LifeChips 2006
recording of neural activity Joint Seminar on Sensor andSmart Microchips with Sensors andMEMS between NECTEC and Integrated Circuits of TUT
IEEJ Society E The 6th Japan-Korea
Ferroelectric Thin Film Sensors on㨪Conference on Ferroelectricity Epitaxial Pt/Al2O3 /Si Substrates,- JKC-FE06
 A New Road Towards A Si
Hetero- epitaxial growth of Al2O3/Si and㨪CMOS-Compatible Resonant
device applications, ESF Exploratory
Tunnel Diode Technology
Workshop - Physical and Engineering
Sciences (PESC) Silicon/oxide
Hetero-Epitaxy International Forum on
Smart Microchips - Si microprobe array㨪
Micro-Nano Hetero Systemchips for recording neural activity Integration in Sendai (MHSI'06) and The 2nd Fraunhofer
Symposium in Sendai Korea and Japan Joint Seminar Smart Microchips of TUT㨪
on Semiconductor
Manufacturing Process
International Symposium on
Two dimensional dynamic pH image
LifeChips
sensor based on a CCD technique
210th Meeting of The
Quantitative Evaluation of Concentration
Electrochemical Societyof Double Stranded DNA Using by Filter
Less Fluorescence Detection Sensor

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  International Workshop on㨪
Micro/Nano Science andEngineering for the 21stCentury  2006 Materials Research㨪Society (MRS) Spring
Meeting  International Symposium on㨪
LifeChips 2006


  Asia-Pacific Conference of㨪Transducers and Micro-Nano
Technology (APCOT 2006)


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Silicon MEMS Sensors and Devices
Harmonized with LSI Technology⍹↰ ⺈

Fabrication of Ferroelectric Thin Films on
Crystalline HfO2/g-Al2O3/Si(100)Substrates for MFIS-FET Applications
Epitaxial Pt(111) thin Films on Si(111)
Substrates with g-Al2O3(111) as Buffer
Layer
Integrated Smart Micro Sensors with
Short-Distance RF-Communication Unit
for Life-Related Sensing Applications
HIBALIS: a Prototype System forIntelligent Human Sensing
Si microprobe array chips for in-vivo
recording of neural activity
CAPACITANCE-VOLTAGE
CHARACTERISTICS AND
SWITCHING TIME OF DOUBLEBARRIER RESONANT TUNNELINGDIODE FABRICATED WITH
Epi-Si/-Al2O3 HETEROSTRUCTURE
A novel structure of Si/GaN/!-Al2O3/Si
for MEMS applications,
MICRO SiO2 TUBE ARRAY ON Si(111)
SUBSTRATES FOR INTELLIGENTDEVICES USING
VAPOR-LIQUID-SOLID METHOD
AND SELECTIVE SI ETCHING BY
XeF2 GAS,A SELF-COMPENSATED FULLYDIFFERENTIAL SOI-CMOS
OPERATIONAL AMPLIFIER FOR
WIDE TEMPERATURE OPERATION
OF SILICON SMART SENSORS UP TO
2757C
FABRICATION OF P-N JUNCTIONUSING SI-MICRO-PROBE ARRAY BY
IN-SITU DOPINGVLS GROWTHEFECT OF HIGH DRAIN BIAS ON
STRESS SENSITIBVITY IN MOSFETSA WIDE DYNAMIC RANGE
PHOTOGATE TYPE IMAGE SENSORBASED ON SELF SUPPRESSION
PRINCIPLE

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  19th International Vacuum㨪
Nanoelectronics Conference &50th International Field
Emission Symposium (IVNC& IFES 2006)  The IUMRS International㨪
Conference in Asia 2006
(IUMRS-ICA-2006)  IEEE Sensors2006
㨪 

 

The 5th IEEE Conference on
Sensors

Fabrication of Local Micro Vacuum
Package Incorporating Si Field Emitter
Array and Ti Getter⍹↰ ⺈High crystalline quality Pt thin films
grown epitaxially on epitaxial Al2O3/Si
substrates
Evaluation of Monolithically Integrated
Antennas and RF Transmitters for Silicon
Smart Micro Sensors withWireless-Communication Ability
Sensing Characteristics of Charge
Transfer Type pH Sensor by
Accumulative Operation
Quantitative evaluation of concentrationof double stranded DNA using filter lessfluorescence detection sensor
Development of Cavity Structure for Field
Emission on Si Substrate

⍹↰ ⺈

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2006 International Meeting㜞የ⧷㇌
The 210th Meeting of The
Electrochemical Society MNC (2006 International⍹↰ ⺈
Microprocesses andNanotechnology Conference)  ᐔᚑ  ᐕᐲ㔚᳇ቇળ࠮ࡦ ᭂᓸ⚦ࡑࠗࠢࡠ࠴ࡘ࡯ࡉࠕ࡟ࠗߩᒻᚑ 㜞የ⧷㇌㨪ࠨ࡮ࡑࠗࠢࡠࡑࠪࡦḰㇱ㐷✚ ߣṁᶧᵈ౉ታ㛎
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 ᣣᧄᯏ᪾ቇળ ᖱႎ࡮⍮⢻࡮ ⥄േ૏⟎᳿߼ߦࠃࠆ⴫㕙ታⵝ⚛ሶߩ࠙ 㜞የ⧷㇌㨪♖ኒᯏེㇱ㐷++2 ⻠Ṷ ࠚࡂ࡟ࡌ࡞៞タᛛⴚߣή✢㚟േࡑࠗࠢળࡠ࠮ࡦࠨ࠺ࡃࠗࠬ߳ߩㆡ↪  ᐕᤐቄ╙  ࿁ᔕ↪‛ GRK5Kǫ#N1ࡋ࠹ࡠ᭴ㅧࠍ↪޿ ⍹↰ ⺈㨪ℂቇ㑐ଥㅪว⻠Ṷળߚ౒㡆࠻ࡦࡀ࡞࠳ࠗࠝ࡯࠼᭴ㅧߩ 6'/
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㜞㈩ะ 2D <TZ6KZ 1.C0K1⭯⤑ߩᒻᚑߣଔ
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
ᣣᧄ㊄ዻቇળᤐᦼో࿖ᄢળ ࠪ࡝ࠦࡦߣࠟ࡜ࠬߩ㓁ᭂធวㇱߩ⚵❱ ᄢᯅ ୃߦ෸߷ߔធว᧦ઙ࿃ሶߩᓇ㗀 ╙  ࿁ⶄว᧚ᢱ⇇㕙ࠪࡦࡐ ᄙಽጘࡐ࡝ࠕࡒ࠼ࠕࡒࡦࠍࠣ࡜ࡈ࠻ߒ ဝᎹ♿ᄦࠫ࠙ࡓߚࠪ࡝ࠞߦࠃࠆࠛࡐࠠࠪ᮸⢽ߩ⎬ൻ‛
ߩ․ᕈ
 ╙  ࿁㜞ಽሶቇળ⸛⺰ળࡐ࡝ࡑ࡯ࠍࠣ࡜ࡈ࠻ߒߚࠪ࡝ࠞߦࠃࠆ ဝᎹ♿ᄦࠛࡐࠠࠪ᮸⢽ߩ⎬ൻ‛ߩ․ᕈ

Proceedings of The 19th IEEE Self-Propagating Explosive Reactions in↢ᵤ⾗ᄢInternational Conference on
Nanostructured Al/Ni Multilayer Films as
Microelectromechanical
A Localized Heat Process Technique for
Systems (MEMS 2006)
MEMS
Proceedings of The 3rd
Mechanical Property Measurements of

↢ᵤ⾗ᄢ
Asia-Pacific Conference of
Au-Sn Eutectic Solder Film by
Transducers and Micro-Nano
Tensile/Shear Deformation Tests
Technology (APCOT 2006)
Thermomechanical Constitutive↢ᵤ⾗ᄢCharacterization of Ti-Ni SMA Films for
Design of MEMS Actuator
ProceedingsofInternational
Ti-Ni Shape Memory Alloy Film

↢ᵤ⾗ᄢ
Conference on Processing &Cantilever Actuator for Micro-Probing
Manufacturing of Advanced
Mechanical Properties of Fe-Pd

↢ᵤ⾗ᄢ
Materials (THERMEC’06)
Ferromagnetic Shape Memory Alloy Thin
Films Prepared by Dual Source DC
Sputtering
Extended Abstracts ofDetermination of Elastic-Inelastic
↢ᵤ⾗ᄢ

International 21st Century
Constitutive Relationships for Sputtered
COE Symposium on Atomistic Gold-Tin Film by Uniaxial Tensile Testing
Fabrication Technology 

Proceedings of The 20th IEEE
International Conference on
Microelectromechanical
Systems (MEMS 2007)  㔚᳇ቇળ ╙  ࿁‫ࡦ࠮ޟ‬ࠨ࡮ࡑࠗࠢࡠࡑࠪࡦߣᔕ↪ࠪࠬ࠹ࡓ‫ࡓ࠙ࠫࡐࡦࠪޠ‬(ญ㗡⊒⴫)
 
NNT2007 
㔚᳇ቇળ ╙  ࿁‫ࡦ࠮ޟ‬ࠨ࡮ࡑࠗࠢࡠࡑࠪࡦߣᔕ↪ࠪࠬ࠹ࡓ‫ࡓ࠙ࠫࡐࡦࠪޠ‬(ญ㗡⊒⴫)
 
MNE2007 
MNE2007 
♖ኒᎿቇળ⑺ቄᄢળ
 EIPBN2007



A Simple Determination Method of↢ᵤ⾗ᄢ
in-Plane Poisson’s Ratio for MEMS
Materials by Means of on-Chip Pure
Bending Test
Computer Aided Engineering Systems for ዊኹ⑲ବ
MicroElectro–Mechanical
Systems
MEMS-One
Time Evolution of Resist Deformation in Y. Hirai, et
Thermal Nanoimprint Lithographyal.
☼ᒢᕈ૕᧚ᢱࡕ࠺࡞ࠍ↪޿ߚᾲ࠽ࡁࠗ ᄢ⷏᦭Ꮧࡦࡊ࡝ࡦ࠻ߩ᦭㒢ⷐ⚛⸃ᨆᚻᴺ

Pressure
andResistThickness
Dependency of Resist Time Evolution
Profiles in Nanoimprint Lithography
Analysis of Time Dependent Polymer
Deformation based on a Viscoelastic
Model in Thermal Imprint Process࠽ࡁࠗࡦࡊ࡝ࡦ࠻⸃ᨆࠪࠬ࠹ࡓ↪᧚ᢱ࠺࡯࠲ࡌ࡯ࠬߩ㐿⊒

Y. Hirai, etal.
H. Takagi,
et al.
㜞ᧁ ઁTime Evolution of Resist Deformation in Y. Hirai, et
Thermal Nanoimprint
al.

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ᣣᧄ᧚ᢱቇળ‫᧚ޟ‬ᢱ‫ ࠢࠗࡑޠ‬MEMS ࡄ࠶ࠤ࡯ࠫኽᱛធวㇱߩᒝᐲࡠࡑ࠹࡝ࠕ࡞․㓸ภឝタ੍ ା㗬ᕈ⹏ଔቯ㔚᳇ቇળ⺰ᢥ⹹
FEM Computation of Magnetic Fields
in Anisotropic Magnetic Materials㔚᳇ቇળ㕒ᱛེ࡮࿁ォᯏวห ࠾ࡘ࡯࠻ࡦ࡮࡜ࡈ࠰ࡦᴺߣ ICCG ᴺߩ
⎇ⓥળ
෼᧤․ᕈࠍ೑↪ߒߚ㕖✢ᒻ෻ᓳ⸃ᴺߩ
㜞ㅦൻ㔚᳇ቇળ㕒ᱛེ࡮࿁ォᯏวห 㔚⏛⇇ᢙ୯⸃ᨆߢᓎ┙ߟ⸃ᨆⓍಽ౏ᑼ⎇ⓥળ㓸㧔ߘߩ㧣㧕
IEICE Electronics Express
Self-Assembly Technique for MEMS
Vol.2
Vertical Comb Electrostatic Actuators
IEICE Electronics Express
A two-dimensional f-theta micro
Vol.2
optical lens scanner with electrostatic
comb-drive XY-stage

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Key Engineering Materials, ᐕ  Ꮞ㧔,CP㧕Key Engineering Materials, ᐕ  Ꮞ㧔&GE㧕    Fracture and Fatigue ofEngineering Materials andStructures,  ᐕ  Ꮞ  ภ
EEE Transactions on Electron
Devices, in print, 2006 

Sensors and Actuators B
Chemical, in print, 2006 

Japanese Journal of Applied
Physics, Part 2 Letter,
Vol.45, No.04, 2006 

Japanese Journal of Applied
Physics, Vol.44, No.4B, 2005 

Sensors and Materials,
Vol.17, No.5, 2005 

Sensors and Actuators A
Physical, Vol.119, 2005 

Key Engineering Materials,
vols.297-300, 2005.

 IEEJ Transactions on Sensors
and Micromachines, vol.125,
No.9, 2005.

8GTVKECN%QOD ဳ㕒㔚㚟േࡒ࡜࡯ߩ቟ ⮮↰ඳਯቯൻߣశࡈࠔࠗࡃนᄌᷫ⴮ེ߳ߩᔕ↪න⚿᥏ࠪ࡝ࠦࡦ࠙ࠚࡂ࡯ߩࡒࠢࡠࡦࠨ ⢈ᓟ⍫ศࠗ࠭ߦ߅ߌࠆ⎕უ㕤ᕈ⹏ଔࡑࠗࠢࡠࠨࠗ࠭⹜㛎 ߦࠃࠆ TiAl ၮ ⢈ᓟ⍫ศ㊄ዻൻว‛ߩ⎕უߓࠎᕈ⹜㛎
Toughness Measurement of a Micro-Sized ⢈ᓟ⍫ศSingle Crystal Silicon
The Effect of Sample Preparation upon⢈ᓟ⍫ศ
the Fracture Toughness of Microsized
TiAl
Fatigue and Fracture of a Ni-P⢈ᓟ⍫ศ
Amorphous Alloy Thin Film on theMicrometer Scale
Monolithic Silicon Smart Tactile Image㜞የ⧷㇌
Sensor with Integrated Strain Sensor
Array on Pneumatically Swollen Single
Diaphragm Structure
Performance of Absorption Photometry㜞የ⧷㇌
Microchip for Blood Hemoglobin
Measurement Integrated with Processing
Circuits and Si (110) 45º-Mirrors
Improvement of MOS Interface㜞የ⧷㇌Characteristics in CMOS on Si(111) by
Combination of Fluorine Implantation andLong-Time Hydrogen Annealing
Realization of In Situ Doped n-Type㜞የ⧷㇌and p-Type Si-Microprobe Array by
Selective Vapor-Liquid-Solid (VLS)
Growth Metho
Fabrication of a High-Temperature Silicon 㜞የ⧷㇌Pressure Sensor Using SDB-SOI
Technology
MEMS based high dose radiation resistant 㜞የ⧷㇌
SOI pressure sensor for aerospace
applications
A MEMS Microvalve with PDMS㜞የ⧷㇌
Diaphragm and Two Chamber
Configuration of Thermo-Pneumatic
Actuator for Integrated Blood Test System
on Silicon
XRD Tensile Test Technique to Measure↢ᵤ⾗ᄢMechanical Properties of Micron-Thick Si
and TiN Films
Mechanical Properties of Polycrystalline↢ᵤ⾗ᄢTitanium Nitride Films Measured by XRD
Tensile Testing 

IEEE/ASME Joint Journal of
Microelectro mechanical
Systems, vol.15, No.1, 2006.

 

J. of Metastable andNanocrystalline Materials,
24-25(2005)  

Journal of Alloys andCompounds (2006)
Materials Science Forum,
539-543㧔2007㧕 

Nanotechnology, 18(2007) 

IEEE JSTQE vol.13, no.2,
2007 

IEICE Elec. Express vol.3,
no.9, 2006.
J. Vac. Sci. Technol. B vol.24,
no.2, 2006
IEEE Photon. Tech. Lett.
vol.18, no.1,2—6, 2006.
Philosophocal Magazine
Letters, Vol.86, No.5

    

Mater. Sci. Eng., A, A426(1-2)

 

ᣣᧄ㊄ዻቇળ⹹XQN
0Q
IEEE Transactions on
Components and Packaging
Technologies, 2007.
IEE Japan Transactions   

IEEE Transactions on Electron
Devices, Vol.53, No.5

Development of AFM Tensile Test
Technique for Evaluating Mechanical
Properties of Sub-Micron Thick DLC
Films
Nanoforming of metallic glass with
nano-scale die fabricated by focused ion
beam
Characterization of super-precision
microgear made of Ni-based metallic
glass
Superplastic nanoforming of opticalcomponents of Pt-based metallic glass
Superplastic nanoforging of Pt-based
metallic glass with dies of Zr-BMG andglassy carbon fabricated by focused ion
beam
Nano-fabrication with metallic glass – anexotic material for
nano-electromechanical systems
A silicon micromachined f-theta
microlens scanner array by double-deck
device design technique
A high fill-factor comb-driven XY-stage
with topological layer switch architecture
RF microelectromechanical system device
with a lateral field-emission detector,
ptically modulated MEMS scanningendoscope
Irradiation-induced formation of
single-variant nanocrystals in an
amorphous alloy
Fatigue strength of small-scale type 304
stainless steel thin films㔚⸃⎇⏴ߦࠃࠆᓸዊࠨࠗ࠭ᒁᒛ⹜㛎
૞⵾ᴺߩ㐿⊒
Wafer-level integration technique of
surface mount devices on a Si-wafer withvibration energy and gravity force
Evaluation of Monolithically Integrated
Antennas and RF Transmitters for Silicon
Smart Micro Sensors withWireless-Communication Ability
Monolithic Silicon Smart Tactile Image
Sensor with Integrated Strain Sensor
Array on Pneumatically Swollen Single
Diaphragm Structure

↢ᵤ⾗ᄢ

ᣧਸᅚᐽౖ

ᣧਸᅚᐽౖ

ᣧਸᅚᐽౖ
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⢈ᓟ⍫ศ
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Sensors and Actuators B:
Chemical Volume 117

Fabrication of a two-dimensional pH
image sensor using a charge transfer
technique
Sensors and Actuators B:
Performance of Absorption Photometry
Chemical, Vol.119
Microchip for Blood Hemoglobin
Measurement Integrated with Processing
Circuits and Si (110) 45º-Mirrors
Semicon. Sci. Tech., Vol.21
Properties of a pn junction developed
witha Si microprobe byvapour-liquid-solid growth using in situ
dopingJapanese Journal of Applied
Electrical characteristics of epitaxial
Physics, Vol.45
-Al2O3/Si for quantum tunneling device
Characterization of Highly Sensitive pH
Sensors with Charge Accumulation
Operationᤋᖱቇᛛႎ8QN0Qࡈࠖ࡞࠲࡟ࠬⰯశᬌ಴࠮ࡦࠨߦࠃࠆ࡝
ࠕ࡞࠲ࠗࡓⰯశ᷹ቯ
ᣣᧄ㊄ዻቇળో࿖ᄢળ᭎ⷐ ࠪ࡝ࠦࡦߣࠟ࡜ࠬߩ㓁ᭂធวㇱߦ෸߷㓸ߔធว᧦ઙ࿃ሶߩᓇ㗀
ᣣᧄ㊄ዻቇળ࡮ᣣᧄ㋕㍑දળ ࠪ࡝ࠦࡦߣࠟ࡜ࠬߩ㓁ᭂធวㇱߦ෸߷ർ㒽ା⿧ᡰㇱㅪว⻠Ṷળ᭎ ߔធว᧦ઙ࿃ሶߩᓇ㗀ⷐ㓸IEEE/ASME Joint Journal of
Development of AFM Tensile Test
MicroelectromechanicalTechnique for Evaluating Mechanical
Systems, vol.15, no.1
Properties of Sub-Micron Thick DLC
Films
Thermomechanical Behavior of Ti-Ni
Vacuum, vol.80, no.3
Shape Memory Alloy Films Deposited by
DC Magnetron Sputtering
Stress Control of a-SiC Films Depositedby Dual Source DC Magnetron Sputtering♖ኒᎿቇળ⹹㧘╙  Ꮞ㧘╙ ᢳ౉኿ࠬࡄ࠶࠲࡝ࡦࠣᴺߦࠃࠆ․⇣ߥ ภᓸ⚦᭴ㅧࠍ᦭ߔࠆ㊄ዻ⭯⤑ߩᒻᚑ

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↢ᵤ⾗ᄢ

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ࡊ࡟ࠬ⊒⴫╬
⇟ภ





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 MEMS now and in the near Introduction of MEMS-ONE project
future 㧙 ready for new constructing MEMS infrastructure
challenges?
 ࡑࠗࠢࡠࡑࠪࡦዷ
MEMS-ONE ࡊࡠࠫࠚࠢ࠻ਛ㑆ᚑᨐ⊒⴫ળ  ࡑࠗࠢࡠࡑࠪࡦ㧹㧱 MEMS-ONE ࡊࡠࠫࠚࠢ࠻ߩ⸳⸘࡮⸃
㧹㧿ᛛⴚᄢో
ᨆ࠷࡯࡞̌MemsONE̍㔚ሶࠫࡖ࡯࠽࡞  㧷㧭㧿㨀⻠⠌ળ㧹㧱㧹㧿ะ߈㧯㧭㧰̌MEMS-ONE ࡊ

⊒⴫ઍ⴫⠪
ᑝㇱཅ㆏

ዊኹ⑲ବ
ᑝㇱཅ㆏

ዊኹ⑲ବ


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ࡠࠫࠚࠢ࠻ߩ᭎ⷐ̍
 㑐⷏㧦⸳⸘⵾ㅧ࠰࡝ࡘ࡯࡚ࠪ 㧹㧱㧹㧿↪⸳⸘࡮⸃ᨆᡰេࠪࠬ࠹ࡓ
ࡦዷ
̌MemsONE̍ߩᯏ⢻᭎ⷐ⚫੺ ╙  ࿁᧲ർ㧯㧭㧱ᙣ⹤ળ㧹㧱㧹㧿↪⸳⸘࡮⸃ᨆᡰេࠪࠬ࠹ࡓ
̌MemsONE̍ߩ᭎ⷐߣᯏ⢻ ࡑࠗࠢࡠࡑࠪࡦዷ
MEMS-ONE ࡊࡠࠫࠚࠢ࠻ᚑᨐ⊒⴫ળ
㔚ሶ᧚ᢱ㧘 ᦬ภ㧹㧱㧹㧿⸳⸘ࠍᡰេߔࠆ MemsONE
ࠪࠬ࠹ࡓ

ዊኹ⑲ବ
ዊኹ⑲ବ
ዊኹ⑲ବ
ᑝㇱཅ㆏