MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪈㪆㪈㪏╙䋱࿁䇸MEMS↪⸳⸘䊶⸃ᨆᡰេ䉲䉴䊁䊛㐿⊒䊒䊨䉳䉢䉪䊃䇹䋨੐ᓟ⹏ଔ䋩ಽ⑼ળ
⾗ᢱ6-2-1䌍䌅䌍䌓↪⸳⸘䊶⸃ᨆᡰេ䉲䉴䊁䊛㐿⊒䊒䊨䉳䉢䉪䊃䇸䋨䋱䋩䊐䊧䊷䊛䊪䊷䉪䉸䊐䊃䈱㐿⊒䇹⹦⚦⺑᣿䋲䋰䋰䋷ᐕ䋱䋱᦬䋷ᣣᣣᧄ䊡䊆䉲䉴䉣䉪䉶䊥䊠䊷䉲䊢䊮䉵ᩣᑼળ␠

MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪉㪆㪈㪏㐿⊒䈱⢛᥊䌍䌅䌍䌓↪⸳⸘䊶⸃ᨆᡰេ䉲䉴䊁䊛䈮䈍䈇䈩䈲䇮䊶䌍䌅䌍䌓ೋᔃ⠪䈮䈫䈦䈩䉅૶䈇䉇䈜䈇䊡䊷䉱䊐䊧䊮䊄䊥䊷䈭䌇䌕䌉䊶䉲䉴䊁䊛ో૕䈱⛔ว▤ℂ䊶⸃ᨆ䉸䊐䊃䉡䉢䉝䈫䈱ᯏ⢻ㅪ៤䊶᧚ᢱ䊶䊒䊨䉶䉴䊂䊷䉺䊔䊷䉴䈍䉋䈶⍮⼂䊂䊷䉺䊔䊷䉴䈫䈱᦭ᯏ⊛ㅪ⚿䈏ᄢ䈐䈭䊆䊷䉵䈫䈚䈩ሽ࿷䈚䇮䈖䉏䉕ታ⃻䈜䉎䇸䊐䊧䊷䊛䊪䊷䉪䉸䊐䊃䇹䈱⎇ⓥ㐿⊒䈏ᔅ㗇䈪䈅䉎䇯⸳⸘䊶⸃ᨆᡰេ䉸䊐䊃䉕೑↪䈚䈢⸳⸘૞ᬺ䈱ᵹ䉏䈱଀ἰἽἓἩἿἍἋᚐௌἙἢỶἋನᡯ˺঺䉸䊥䉾䊄䊝䊂䊦䊒䊨䉶䉴䊧䉲䊏䋨䉿䉟䊮䊒䊨䊷䊑䋩ᐯѣ఍‫঺˺܇‬ᦨ਄ㇱ᭴ㅧㇱ䈱⥄േᩰሶൻೞನᚐௌᔕജಽᏓMEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪊㪆㪈㪏⎇ⓥ㐿⊒䈱ᦨ⚳⋡ᮡ䊐䊧䊷䊛䊪䊷䉪䈮䈧䈇䈩䇮એਅ䈱ᛛⴚ䉕㐿⊒䈜䉎䇯䋱䋩䊙䉴䉪૞ᚑ䋲䋩䊂䊋䉟䉴᭴ㅧ૞ᚑ䋳䋩⥄േᩰሶ૞ᚑ䋴䋩䊒䊨䉶䉴䊧䉲䊏䋵䋩⸃ᨆ᧦ઙ⸳ቯ䋶䋩⸃ᨆ⚿ᨐ⴫␜䋷䋩⸃ᨆ䉸䊐䊃䊶䌃䌁䌄䉸䊐䊃䈫䈱䊂䊷䉺䉮䊮䊋䊷䉺䋸䋩䊂䊷䉺䊂䊷䉴䉟䊮䉺䊷䊐䉢䊷䉴䋹䋩䊒䊤䉫䉟䊮ᯏ⢻䈫䉴䊷䊌䊋䉟䉱䊷ᯏ⢻䋱䋰䋩䇸䊅䊉䉟䊮䊒䊥䊮䊃ടᎿ䊶⸃ᨆ䉲䉴䊁䊛䈱㐿⊒䇹䈮䈍䈔䉎䊐䊧䊷䊛䊪䊷䉪䈱ᡷୃో૕䉲䉴䊁䊛ᯏ⢻᭴ᚑ࿑䊐䊧䊷䊛䊪䊷䉪䉸䊐䊃䊡䊷䉱䍃䊐䊧䊮䊄䊥䍃䉟䊮䉺䊷䊐䉢䊷䉴䊂䊋䉟䉴᭴ㅧ૞ᚑ䊙䉴䉪૞ᚑ⥄േᩰሶ૞ᚑ䊒䊨䉶䉴䊧䉲䊏䊂䊷䉺䉮䊮䊋䊷䉺䊒䊤䉫䉟䊮ᯏ⢻⸃ᨆ᧦ઙ⸳ቯ⸃ᨆ⚿ᨐ⴫␜ᯏ᭴⸃ᨆ䉲䊚䊠䊧䊷䉺䊒䊨䉶䉴⸃ᨆ䉿䊷䊦ᯏ⢻᜛ᒛ䉸䊐䊃ജቇ⸃ᨆ⇣ᣇᕈ䉡䉢䉾䊃䉣䉾䉼䊮䉫䊒䊨䉶䉴ㅒ໧㗴⸃ᨆ䊄䊤䉟䉣䉾䉼䊮䉫ធวታⵝ⸃ᨆ㔚⏛⇇⸃ᨆ࿶㔚⸃ᨆવᾲ⸃ᨆᾲᄌᒻ⸃ᨆ㔓࿐᳇ᵹ૕ᓇ㗀⸃ᨆ਄⸥ㅪᚑ⸃ᨆ䊂䊷䉺䊔䊷䉴䉟䊮䉺䊷䊐䉢䊷䉴⍮⼂䌄䌂᧚ᢱ䍃䊒䊨䉶䉴䌄䌂䊙䊦䉼䊒䊨䉶䉴ᾲ䊅䊉䉟䊮䊒䊥䊮䊃⸃ᨆశ䊅䊉䉟䊮䊒䊥䊮䊃⸃ᨆ⸃ᨆᯏ⢻䊝䉳䊠䊷䊦⟲ᄖㇱ䊒䊤䉫䉟䊮䉸䊐䊃䊒䊤䉫䉟䊮䌄䌂䇼੐ᬺේ★ p i-1 䇽MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪋㪆㪈㪏⋡ᮡ୯䈱⸳ቯℂ↱㐿⊒⋡ᮡ䈫䈭䉎ᛛⴚ㗄⋡䈲䇮䌍䌅䌍䌓䈱․ᓽ䈪䈅䉎䇮䊶⭯⤑᧚ᢱ䉕฽䉃ᄙ᭽䈭᧚ᢱ䈱೑↪䈫Ⓧጀ᭴ㅧ䊶᭴ㅧ⸳⸘䈫䊒䊨䉶䉴⸳⸘䈱ᒝ䈇⋧੕㑐ㅪ䊶ⶄᢙ䈱‛ℂ⃻⽎䋨ജቇ䇮ᾲ䇮㔚⏛⇇╬䋩䈱ⶄวലᨐ䉕⠨ᘦ䈚䈢⸳⸘䊶⸃ᨆ䈱䈢䉄䈱ၮ⋚䉸䊐䊃䈫䈚䈩ᔅⷐਇนᰳ䈪䈅䉎䇯䊒䊨䉶䉴⸃ᨆ⚿ᨐⓍጀ᭴ㅧ䋨RF䉴䉟䉾䉼䋩Ⓧጀ᭴ㅧ䋨RF䉴䉟䉾䉼䋩᭴ㅧ⸃ᨆ䊜䉾䉲䊠૞ᚑ଀଀䈋䈳䇮䊂䊋䉟䉴᭴ㅧ૞ᚑ䈮䈍䈇䈩䈲䇮䊶Ⓧጀ᭴ㅧ䉕⴫⃻䈜䉎᧚⾰㗔ၞ䈱⸳ቯ䊶ၮᧄ┙૕᭴ㅧ䈱ቯ⟵䉇┙૕㑆䈱㓸วṶ▚䊶䊂䊋䉟䉴᭴ㅧ䊂䊷䉺䈱଻ሽ䇮ෳᾖ䇮⴫␜೙ᓮ䈭䈬䈱ᯏ⢻䉕฽䉃䊂䊋䉟䉴䌃䌁䌄䉕᭴▽䈜䉎ᔅⷐ䈏䈅䉎䇯㔚⇇䊶ജቇㅪᚑ⸃ᨆ଀䋨㔚⇇ᒝᐲ䉮䊮䉺䊷䋩᧚⾰㗔ၞ䈱⸳ቯ┙૕ቯ⟵䊶㓸วṶ▚䇮⴫␜MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ⎇ⓥ㐿⊒ᚑᨐ㪌㪆㪈㪏䋱䋩䊙䉴䉪૞ᚑ䊙䉴䉪૞ᚑᯏ⢻䈮䉋䉍૞ᚑ䈚䈢䊙䉴䉪䊂䊷䉺䈱଀ᰏᱤ䊝䊂䊦↪䊙䉴䉪䊙䉟䉪䊨䊚䊤䊷㔚ᭂㇱ䊙䉴䉪䇼੐ᬺේ★ p i-1 䇽MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪍㪆㪈㪏䊙䉴䉪㪚㪘㪛䈱ᯏ⢻৻ⷩ䊙䉴䉪㪚㪘㪛䈱ᯏ⢻৻ⷩ㪤㪜㪤㪪 㩷 㩷 䌍䌅䌍䌓䉿䊷䊦䊋䊷㩷⺑᣿㩷㩷㩷㩷౞䌟ਛᔃ䈫 㪉 ὐ㩷ਛᔃ䈫 2 ὐ䈮䉋䉎౞䊐䉜䉟䊦㩷㩷㩷㩷㩷଻ሽ㩷㐿ᆎ䈲䊜䉟䊮↹㕙䈪ᜰ␜㩷㩷㩷㩷౞䌟䋳ὐ㩷

3 ὐ䈮䉋䉎౞㩷㩷㩷㩷㩷㩷⚳ੌ㩷㪚㪘㪛 ↹㕙䈱䉪䊨䊷䉵㩷㩷㩷㩷౞䌟㪉 ὐ䈫ᓘ㩷2 ὐ䈫ᓘ䈮䉋䉎౞✬㓸㩷㩷㩷㩷㩷ర䈮ᚯ䈜㩷䉮䊙䊮䊄න૏䈱䉨䊞䊮䉶䊦䋨㪬㪥㪛㪦䋩㩷㩷㩷㩷౞ᒐ䌟ਛᔃ䈫 㪉 ὐ㩷ਛᔃ䈫 2 ὐ䈮䉋䉎౞ᒐ㩷㩷㩷㩷㩷㩷䉇䉍⋥䈚㩷㪬㪥㪛㪦 䉕ర䈮ᚯ䈜䋨㪩㪜㪛㪦䋩㩷㩷㩷㩷౞ᒐ䌟䋳ὐ㩷3 ὐ䈮䉋䉎౞ᒐ㩷㩷㩷䉮䊏䊷㩷⾍䉍ઃ䈔↪䈱✢䉁䈢䈲䊙䉴䉪㗔ၞ䈱ᜰ␜㩷㩷㩷㩷౞ᒐ䌟㪉 ὐ䈫ᓘ㩷2 ὐ䈫ᓘ䈮䉋䉎౞ᒐ㩷㩷㩷⾍䉍ઃ䈔㩷䉮䊏䊷࿑ᒻ䈱⾍䉍ઃ䈔㩷㩷㩷㩷㩷✢✬㓸㩷㕙ข䉍㩷ⷺㇱ䉕✢ಽ䈪䉦䉾䊃㩷㩷㩷㩷㩷㩷䉥䊐䉶䉾䊃㩷✢೉䈱৻ቯ୯䉥䊐䉶䉾䊃㩷㩷㩷䊐䉞䊧䉾䊃㩷䊘䊥䊤䉟䊮䈱ⷺ䈱 R ដ䈔㩷㩷㩷㩷㩷㩷䉴䊃䊧䉾䉼㩷✢೉䈱ᜰ␜㗂ὐᐳᮡ୯䈱⒖േ㩷㩷㩷㩷䊃䊥䊛ᑧ㐳㩷䊃䊥䊛ᑧ㐳䌟䋲✢㩷䋲✢䉕੤ὐ䈪ಾ䉍ข䉍䇮䉁䈢䈲䇮੤ὐ䉁䈪ᑧ㐳䊜䊆䊠䊋䊷㩷㩷㩷㩷㩷㩷⒖േⶄ౮䊶᜛ᄢ❗ዊ㩷ᐞ૗ⷐ⚛䈱⒖േ䊶ⶄ౮㩷㩷㩷㩷㩷㩷㩷೥㒰㩷ᐞ૗ⷐ⚛䈱೥㒰㩷⴫␜㩷㩷㩷㩷㩷䊥䊕䉟䊮䊃㩷↹㕙ౣ⴫␜㩷䉺䉟䊒೎⴫␜㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷㩷৻ᤨ࿑ᒻ೥㒰㩷৻ᤨ࿑ᒻ೥㒰㩷㩷㩷㩷㩷㩷㩷㪩㪜㪞䌟⴫␜೥㒰㩷ᬌᩏ䉮䊙䊮䊄䈱䊧䉳䉴䉺䊷⴫␜୯䈱೥㒰㩷㪦㪥㪆㪦㪝㪝㩷ὐ䇮✢䇮䊙䉴䉪㗔ၞ䈱 㪊 䉺䉟䊒㩷䉿䊷䊦㩷㩷㩷㩷㩷䉫䊥䉾䊄㩷䉫䊥䉾䊄䈱䉰䉟䉵ᄌᦝ䇮⴫␜䇮ਣ䉄⸳ቯ㩷㩷㩷㩷㩷㩷㩷䊧䉟䊟ᠲ૞㩷䊧䉟䊟ᠲ૞䊌䊧䉾䊃䈱⴫␜㩷㩷㩷㩷䉶䊦᭴ㅧ⴫㩷䉶䊦᭴ㅧ䉕␜䈜䊌䊧䉾䊃䈱⴫␜㩷䉶䊦᭴ㅧ㩷㩷㩷䉶䊦૞ᚑ㩷䊙䉴䉪䊂䊷䉺䈱න૏䈪䈅䉎䉶䊦ฬ䉕ቯ⟵㩷㩷㩷㩷䉶䊦᭴ㅧቯ⟵㩷䉶䊦㑆䈱ⷫሶ㑐ଥ䉕ቯ⟵䈜䉎㩷ⷫሶ㑐ଥ䈪䈱ሶ䉶䊦䈱ⷫ䉶䊦䈮䈍䈔䉎ၮḰ૏㩷㩷㩷㩷㩷㩷䊃䊥䊛ᑧ㐳䌟ㅪ⛯✢㩷䊃䊥䊛ᑧ㐳_2 ✢䈱ㅪ⛯✢ᯏ⢻㩷㩷㩷㩷㩷㩷䊃䊥䊛ᑧ㐳䌟ಽഀ㩷✢䉕ઁ䈱✢䈱੤ὐ䈪ಾ䉍ข䉍㩷㩷㩷㩷㩷㩷䊃䊥䊛ᑧ㐳䌟ਛᛮ䈐㩷✢䈮䈍䈔䉎ઁ䈱 2 ✢䈫䈱੤ὐ඙㑆䉕ਛᛮ䈐㩷㩷㩷㩷2 䈧䈱䊙䉴䉪㗔ၞ䉕๺㓸ว㗔ၞ㩷㩷䊙䉴䉪㗔ၞቯ⟵✬㓸㩷䊙䉴䉪㗔ၞ㓸วṶ▚㩷䊙䉴䉪㗔ၞ䈱ቯ⟵䇯ቯ⟵ᷣ䉂㗔ၞ䈱ᄌᦝ㩷㩷ᬌᩏ㩷㩷㩷ᐳᮡ୯㩷ᐳᮡ୯䉕⺞䈼䉎✢䈱㐳䈘䉕⺞䈼䉎㩷㩷㩷䉶䊦㈩⟎૏⟎✬㓸㩷⟎䉕ᄌᦝ䈜䉎㩷㩷㩷㩷㩷㩷㩷㐳䈘㩷㩷㩷㩷䉶䊦᭴ㅧ⸃㒰㩷䉶䊦㑆䈱ⷫሶ㑐ଥ䉕⸃㒰䈜䉎㩷㩷㩷㩷〒㔌㩷2 ὐ㑆〒㔌䉕⺞䈼䉎㩷㩷㩷䉶䊦೥㒰㩷䉶䊦䈠䈱䉅䈱䉕ฬ೨Ფ೥㒰䈜䉎㩷㩷㩷㩷㩷㩷㩷ᓸዊⷐ⚛ᬌ಴㩷ᜰ␜ᄢ䈐䈘એਅ䈱ᐞ૗ⷐ⚛䉕ᬌᩏ䈜䉎䇯㩷㩷㩷ഃ↢䉶䊦ಾ䉍ᦧ䈋㩷ᣂⷙ䈮ቯ⟵䈘䉏䉎࿑ᒻ䈱ᚲዻ䉶䊦䈱ಾ䉍ᦧ䈋䉲䊠䊚䊧䊷㪪㪪㪣 ಴ജ㩷㩷㩷㩷ὐ㩷ὐ䌟ᐳᮡ୯㩷 㩷ᐳᮡ୯㩷㪘㪧㩷ὐ䊶✢䊶✬㓸㩷䉲䊢䊮ㅪ៤䊒䊨䉶䉴⸃ᨆ䈱⸃ᨆ᧦ઙ䈫䈚䈩૶↪䈜䉎ᮡḰ䊙䉴䉪䊂䊷䉺䋨SSL 䊂䊷䉺ᒻᑼ䋩૞ᚑ㪪㪪㪣 ౉ജ㩷㩷

SSL ᒻᑼ䊂䊷䉺䈱ข䉍ㄟ䉂㩷㩷㩷㩷㩷㩷ὐ䌟㪉 ὐਛὐ㩷㪉 ὐ䈱ਛὐᐳᮡ㩷㪞㪛㪪 ಴ജ㩷㩷

GDSII ᒻᑼ䊂䊷䉺䈱૞ᚑ㩷㩷㩷㩷㩷㩷ὐ䌟✢ಽಽഀὐ㩷✢ಽ䈱 N ಽഀὐ㪞㪛㪪 ౉ജ㩷㩷

GDSII ᒻᑼ䊂䊷䉺䉕ข䉍ㄟ䉃㩷㩷㩷㩷㩷㩷ὐ䌟ုὐ㩷ုὐ㪛㪯㪝 ಴ജ㩷㩷

DXF ᒻᑼ䊂䊷䉺䈱૞ᚑ㩷㩷㩷㩷✢㩷✢䌟㪉 ⷐ⚛㩷2ὐ㪛㪯㪝 ౉ജ㩷

㩷DFX ᒻᑼ䊂䊷䉺䉕ข䉍ㄟ䉃㩷㩷㩷㩷㩷㩷✢䌟䊘䊥䊤䉟䊮㩷Nὐ㩷㩷㩷㩷㩷㩷✢䌟㐳ᣇᒻ㩷㐳ᣇᒻ䇼੐ᬺේ★ p i-2 䇽MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪎㪆㪈㪏⎇ⓥ㐿⊒ᚑᨐ䋲䋩䊂䊋䉟䉴᭴ㅧ૞ᚑ䋲䋩䊂䊋䉟䉴᭴ㅧ૞ᚑ䊂䊋䉟䉴᭴ㅧ૞ᚑᯏ⢻䈮䉋䉍૞ᚑ䈚䈢䊂䊋䉟䉴䊝䊂䊦䈱଀3ᰴరᰏᱤ䊝䊂䊦3ᰴర䊙䉟䉪䊨䊚䊤䊷䊝䊂䊦䇼੐ᬺේ★ p i-4 䇽MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪏㪆㪈㪏䊂䊋䉟䉴CAD䈱ᯏ⢻৻ⷩ䊂䊋䉟䉴CAD䈱ᯏ⢻৻ⷩ㪤㪜㪤㪪 䊜䌍䌅䌍䌓䉿䊷䊦䊋䊷㩷஻⠨㩷䈭䈚㩷䌆䌅䌍䊒䊧㩷䊜䉾䉲䊠ಽഀ㩷㩷㪉 ᰴరⷐ⚛䇮㪊 ᰴర䉲䉢䊦ⷐ⚛䇮㪊㪚㪘㪛 ↹㕙䈱䉪䊨䊷䉵㩷㩷㩷㩷㩷䊜䉾䉲䊠䈱೥㒰㩷㩷㩷▵ὐ䇮᦭㒢ⷐ⚛䈱೥㒰㩷㩷㩷䉮䊙䊮䊄න૏䈱䉨䊞䊮䉶䊦䋨㪬㪥㪛㪦䋩㩷㩷㩷䉲䉢䊦ⷐ⚛䈱᝹ᒁ㩷㩷䉲䉢䊦ⷐ⚛䈱 㪪㪮㪜㪜㪧 䈮䉋䉎┙૕૞㩷㩷㪬㪥㪛㪦 䉕ర䈮ᚯ䈜䋨㪩㪜㪛㪦䋩㩷㩷㩷䉲䉢䊦ⷐ⚛䈱⴫ⵣ෻㩷䉲䉢䊦ⷐ⚛䈱⴫ⵣ෻ォ㩷䊆䊠䊋䊷㩷ᰴర 㪍 㕙૕ⷐ⚛䇮㩷䊐䉜䉟䊦㩷㩷଻ሽ㩷㩷㩷㐿ᆎ䈲䊜䉟䊮↹㕙䈪ᜰ␜㩷㩷㩷㩷㩷⚳ੌ㩷㩷㩷✬㓸㩷㩷㩷ర䈮ᚯ䈜㩷㩷㩷㩷䉇䉍⋥䈚㩷㩷㩷㩷⒖േⶄ౮᜛ᄢ❗ዊ㩷㩷㩷ᐞ૗ⷐ⚛䈱⒖േ䊶ⶄ౮㩷㩷㩷㩷㩷೥㒰㩷㩷㩷ᐞ૗ⷐ⚛䈱೥㒰㩷⴫␜㩷䊥䊕䉟䊮䊃㩷㩷㩷↹㕙ౣ⴫␜㩷㩷㩷䊙䉡䉴䊎䊠䊷㩷㩷䊙䉡䉴䈮䉋䉎⴫␜೙ᓮ䊜䊆䊠㩷㩷㩷㩷㩷䉺䉟䊒೎ 㪦㪥㪆㪦㪝㪝㩷㩷㩷࿑ᒻ䉺䉟䊒೎䈱⴫␜೙ᓮ㩷㩷㩷㩷䉲䉢䊷䊂䉞䊮䉫㩷㩷䉲䉢䊷䊂䉞䊮䉫 㪦㪥㪆㪦㪝㪝㩷┙૕ⷐ⚛⴫㕙䈎䉌䉲䉢䊦ⷐ⚛᛽಴ᚑ㩷ォ㩷㩷㩷䊜䉾䉲䊠ᬌᩏ㩷㩷䊜䉾䉲䊠䈱ᬌᩏ㩷㩷㩷㊀ⶄ▵ὐ㒰෰㩷㩷ㄭធ䈚䈩䈇䉎▵ὐ䈱㑆ᒁ䈐㩷㩷㩷䊜䉾䉲䊠㕖⴫␜㩷㩷ᜰ␜᦭㒢ⷐ⚛䈱⴫␜ 㪦㪝㪝㩷㩷㩷⴫␜䉴䉬䊷䊦ᄌᦝ㩷㩷᦭㒢ⷐ⚛䈱⴫␜䉴䉬䊷䊦䈱ᄌᦝ䇯㩷㩷⋥੤ᩰሶ㩷⋥੤ᩰሶ㪶⸃ᨆ㗔㪝㪛㪫㪛 ᴺะ䈔䈱⋥੤ᩰሶ䈱ೋᦼቯၞቯ⟵㩷⟵㩷⋥੤ᩰሶ䈱ᩰሶᢙ䋨㑆㓒䋩䈱ᄌᦝ㩷㪦㪥㪆㪦㪝㪝㩷┙૕ⷐ⚛䈱䉲䊠䊥䊮䉪⴫␜㩷㩷㩷㩷ඨㅘ᣿㩷㩷㩷ඨㅘ᣿䉲䉢䊷䊂䉞䊮䉫㩷㩷㩷㩷৻ᤨ࿑ᒻ೥㒰㩷㩷㩷৻ᤨ࿑ᒻ೥㒰㩷㩷㩷㩷㪩㪜㪞䌟⴫␜ᶖ෰㩷㩷㩷ᬌᩏ䉮䊙䊮䊄䈱⴫␜୯䈱೥㒰㩷䉿䊷䊦㩷㩷㩷䉫䊦䊷䊒ᠲ૞㩷㩷㩷㩷 䉫䊦䊷䊒ൻᯏ⢻㩷㩷㩷㩷㩷᧚⾰ᠲ૞㩷㩷㩷ᐞ૗ⷐ⚛䇮㪝㪜㪤 ⷐ⚛䈻䈱᧚⾰⸳ቯ㪘㪧㩷┙૕㩷ၮᧄ┙૕㩷⋥ᣇ૕㩷⋥ᣇ૕㩷㩷㩷㩷㩷൨㈩૕㩷൨㈩૕䇯ᜰቯ䊁䊷䊌ⷺ㩷㩷㩷㩷౞╴䊶౞㍙㩷౞╴ᒻ⁁䊶౞㍙ᒻ⁁㩷㩷㩷㩷ᐔⴕ᝹ᒁ૕㩷㩷㩷ᐔ㕙㗔ၞ䈱 㪪㪮㪜㪜㪧㩷㩷㩷㩷㕙ข䉍㩷㩷㕙ข䉍㩷㩷㩷㩷㕙䉥䊐䉶䉾䊃㩷㩷৻ቯ䉥䊐䉶䉾䊃㩷㩷㩷᭴ᚑ㕙ข䉍಴䈚㩷㩷┙૕䈱᭴ᚑ㕙䉕㕙䈫䈚䈩ข䉍಴䈜㩷㩷㩷㩷㓸วṶ▚㩷㓸วṶ▚䌟๺㩷๺㓸ว㩷㩷㩷㩷㩷㓸วṶ▚䌟Ꮕ㩷Ꮕ㓸ว㩷㩷㩷㩷㩷㓸วṶ▚䌟Ⓧ㩷Ⓧ䋨౒ㅢ䋩㓸ว㩷ⶄᢙ┙૕䈱๺㓸ว㩷㩷㩷㩷⋥੤ᩰሶ㪶ᩰሶᢙ㩷㩷㩷⋥੤ᩰሶ㪶ၮḰ✢ᩰሶᢙቯ⟵↪䈱ၮḰ✢඙㑆䈱ಽಽ㔌㩷㔌㩷⋥੤ᩰሶ㪶ၮḰ✢ᩰሶᢙቯ⟵↪䈱ၮḰ✢඙㑆䈱⚿⚿ว㩷ว㩷⋥੤ᩰሶ㪶⴫␜⋥੤ᩰሶ䈮㑐ㅪ䈚䈢⴫␜ 㪦㪥㪆㪦㪝㪝㩷ᄌᦝ㩷䈫᧚⾰⇟ภන૏䈱⴫␜ 㪦㪥㪆㪦㪝㪝㩷㩷㩷㩷㓸วṶ▚䌟৻᜝㩷㩷㩷㩷㓸วṶ▚䌟ಾᢿ๺㩷㕙䈮䉋䉎┙૕䈱ಽഀ㩷㩷㩷㩷㩷㩷㩷㩷ⶄว㕙⚿ว㩷㩷㩷ὐ✢㕙㩷ὐ㩷ᐳᮡ୯㩷ᐳᮡ୯㩷㩷㩷㩷㩷㪥 ಽഀὐ㩷૏⋧⚿ว䈮䉋䉎㐿ⶄว㕙䈱૞ᚑ㩷㪥 ಽഀὐ㩷㩷㩷㩷✢㩷✢䌟䋲ⷐ⚛㩷䋲ὐᜰ␜㩷㩷㩷㩷㩷✢䌟䊘䊥䊤䉟䊮㩷䊘䊥䊤䉟䊮㩷㩷㩷㩷㩷✢䌟㐳ᣇᒻ䋲ὐ㩷㐳ᣇᒻ䋲ὐ㩷㩷㩷㩷ᢿ㕙✢㩷┙૕䈱㕙䈮䉋䉎ಾᢿ✢㩷䈭䈚㩷䌆䌅䌍䊘䉴‛ℂ㊂䊶⹏ଔ࿑ㆬᛯ㩷‛ℂ㊂䋨ᔕജ䈭䈬䋩䈫⹏ଔ࿑䋨╬㜞㩷㩷⹏ଔ㗔ၞ䈱᧚⾰㒢㩷⹏ଔ࿑䈱ኻ⽎㗔ၞ䉕᧚⾰⇟ภ䈮䉋㩷㩷㩷㩷ᢿ㕙࿑㩷㩷㩷╬㜞✢䇮䊔䉪䊃䊦࿑䈱ᢿ㕙࿑㩷㩷㩷䊥䉴䊃಴ജ㩷㩷䉴䊁䉾䊒㊂䈭䈬䈱ᢙ୯⴫಴ജ㩷㩷㩷㩷㩷䉫䊤䊐಴ജ㩷㩷㩷㪯㪰 䉫䊤䊐಴ജ㩷㩷㩷᡼኿䊌䉺䊷䊮䇮䉴䊚㩷㔚⏛ᵄ⸃ᨆ䊂䊷䉺䈱․ᱶ࿑⴫␜㩷㩷ធวᒝᐲ⸃ᨆᯏ⢻㩷䊃㩷✢࿑䇮ᄌ૏࿑䈭䈬䋩䈱ㆬᛯ㩷ቯ㩷䉍㒢ቯ䈜䉎㩷䉴䉼䊞䊷䊃㩷㩷㩷ធวᒝᐲ⸃ᨆ㩷㩷㩷㩷㩷᧚ᢱ᭴ᚑ࿑㩷㩷㩷᧚⾰⇟ภ䈮䉋䉎⥄േ⦡ಽ䈔࿑㩷㩷㩷㩷㩷䋲㪛 䉝䊆䊜䊷䉲䊢䊮㩷㩷㩷䉴䊁䉾䊒⇟ภ䉕ᄌᦝ䈚䈩ㅪ⛯ታⴕ㩷㩷㩷㩷㩷䊘䉴䊃⚳ੌ㩷㩷㩷䊘䉴䊃ಣℂ䈱⚳ੌ㩷䉲䊚䊠䊧㪪㪪㪣 ಴ജ㩷㩷㩷࿁〝䉲䊚䊠䊧䊷䉲䊢䊮䈪ෳᾖ䈜䉎┙㪪㪪㪣 ౉ജ㩷㩷㩷䊷䉲䊢䊮૕䊂䊷䉺䋨SSL 䊂䊷䉺ᒻᑼ䋩䈱૞ᚑㅪ៤㩷㩷䇼੐ᬺේ★ p i-5 䇽㩷㪦㪥㪆㪦㪝㪝㩷ಽ㔌㩷㩷㩷㩷

SSL ᒻᑼ䊂䊷䉺䈱ข䉍ㄟ䉂MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ⎇ⓥ㐿⊒ᚑᨐ㪐㪆㪈㪏䋳䋩⥄േᩰሶ૞ᚑ䋳䋩⥄േᩰሶ૞ᚑ⥄േᩰሶ䋨䊜䉾䉲䊠䋩䈱૞ᚑ଀࿶㔚䊝䊂䊦䈱6㕙૕䊜䉾䉲䊠䉿䉟䊮䊒䊨䊷䊑䈱3ⷺᒻ䊶4ⷺᒻ䊜䉾䉲䊠㔚⇇↪⸃ᨆ↪䈱ⓨ᳇ጀ䈱䋶㕙૕䊜䉾䉲䊠ⓨ᳇ጀౝㇱ䈱6㕙૕䊜䉾䉲䊠䇼੐ᬺේ★ p i-7 䇽MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ⎇ⓥ㐿⊒ᚑᨐ㪈㪇㪆㪈㪏䋴䋩䊒䊨䉶䉴䊧䉲䊏䈱ቯ⟵䊶✬㓸䋴䋩䊒䊨䉶䉴䊧䉲䊏䈱ቯ⟵䊶✬㓸䊒䊨䉶䉴䊧䉲䊏䈱ቯ⟵䊶✬㓸↹㕙䈱଀◲න䈭GUIᠲ૞䈪䇮䊙䊦䉼䊒䊨䉶䉴↪䈱䊧䉲䊏䉕૞ᚑ䈚䊒䊨䉶䉴䈱䉲䊚䊠䊧䊷䉲䊢䊮䉕ⴕ䈉䈖䈫䈏น⢻䇼੐ᬺේ★ p i-9 䇽

MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ⎇ⓥ㐿⊒ᚑᨐ㪈㪈㪆㪈㪏䋵䋩⸃ᨆ᧦ઙ⸳ቯ䋵䋩⸃ᨆ᧦ઙ⸳ቯᯏ᭴⸃ᨆ䈱⸃ᨆ⒳㘃䈱ㆬᛯ↹㕙䈱଀㽲᧚ᢱ‛ᕈ䊂䊷䉺㽳Ⴚ⇇᧦ઙ㽴ᢙ୯⸘▚䊌䊤䊜䊷䉺 䈱3ಽ㘃䈎䉌䈭䉎ೋᔃ⠪䈮䉅䉒䈎䉍ᤃ䈇䌇䌕䌉䉡䉞䉱䊷䊄ᣇᑼ䈮䉋䉎䇮ೋᔃ⠪䈮䉅ℂ⸃䈚ᤃ䈇⸃ᨆᠲ૞ᚻ㗅⸃ᨆㅜਛ䈱૞ᬺ⁁ᴫ䉕ኈᤃ䈮⹺⼂䇼੐ᬺේ★ p i-11 䇽MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ⎇ⓥ㐿⊒ᚑᨐ㪈㪉㪆㪈㪏䋶䋩⸃ᨆ⚿ᨐ⴫␜䋶䋩⸃ᨆ⚿ᨐ⴫␜⸃ᨆ⚿ᨐ䈱‛ℂ㊂䈫⹏ଔ࿑䈱ㆬᛯ↹㕙䈱଀ᄌᒻ࿑਄䈱╬㜞✢࿑ᄌᒻ࿑䋨ේဳ࿑䈫䈱㊀䈰ว䉒䈞⴫␜䋩ㅪ⛯⦡䈮䉋䉎╬㜞✢䇼੐ᬺේ★ p i-16 䇽㔚⇇⸃ᨆ⚿ᨐ䈱╬㜞✢ᢿ㕙࿑MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ⎇ⓥ㐿⊒ᚑᨐ㪈㪊㪆㪈㪏䋷䋩⸃ᨆ䉸䊐䊃䊶䌃䌁䌄䉸䊐䊃䈫䈱䊂䊷䉺䉮䊮䊋䊷䉺䋷䋩⸃ᨆ䉸䊐䊃䊶䌃䌁䌄䉸䊐䊃䈫䈱䊂䊷䉺䉮䊮䊋䊷䉺䊂䊷䉺䉮䊮䊋䊷䉺ᯏ⢻䈱৻ⷩ㪚㪘㪛 䉮䊮䊋䊷䉺㩷㪠㪞㪜㪪㩷㪞㪛㪪 ಴ജ㩷㪠㪞㪜㪪 ᒻᑼ䊂䊷䉺䈱૞ᚑ㩷㩷㪠㪞㪜㪪 ౉ജ㩷㪠㪞㪜㪪 ᒻᑼ䊂䊷䉺䈱౉ജ㩷㩷㪞㪛㪪㩷㪞㪛㪪 ಴ജ㩷GDSII ᒻᑼ䊂䊷䉺䈱૞ᚑ㩷㩷㪞㪛㪪 ౉ജ㩷

GDSII ᒻᑼ䊂䊷䉺䉕ข䉍ㄟ䉃㩷㪛㪯㪝㩷㪛㪯㪝 ಴ജ㩷

DXF ᒻᑼ䊂䊷䉺䈱૞ᚑ㩷㩷㪛㪯㪝 ౉ജ㩷

DFX ᒻᑼ䊂䊷䉺䉕ข䉍ㄟ䉃䊜䉾䉲䊠䉮䊮䊋䊷䉺㩷㪘㪙㪘㪨㪬㪪㩷㪘㪙㪘㪨㪬㪪 ಴ജ㩷㪘㪙㪘㪨㪬㪪 䊜䉾䉲䊠䊂䊷䉺಴ജ㩷㩷㩷㩷㪘㪙㪘㪨㪬㪪 ౉ജ㩷㪘㪙㪘㪨㪬㪪 䊜䉾䉲䊠䊂䊷䉺౉ജ㩷㩷㪤㪘㪩㪚㩷㪤㪘㪩㪚 ಴ജ㩷㪤㪘㪩㪚 䊜䉾䉲䊠䊂䊷䉺಴ജ㩷㪤㪘㪩㪚 䊜䉾䉲䊠䊂䊷䉺౉ജ㩷㩷㩷㪤㪘㪩㪚 ౉ജ㩷㩷㩷㪥㪘㪪㪫㪩㪘㪥㩷㪥㪘㪪㪫㪩㪘㪥 ಴ജ㩷㪥㪘㪪㪫㪩㪘㪥 䊜䉾䉲䊠䊂䊷䉺಴ജ㩷㩷㩷㩷㪥㪘㪪㪫㪩㪘㪥 ಴ജ㩷㪥㪘㪪㪫㪩㪘㪥 䊜䉾䉲䊠䊂䊷䉺౉ജ㩷GDSII䊂䊷䉺䈱౉ജ⚿ᨐ䈱↹㕙଀

IGES䊂䊷䉺䈱಴ജ䊐䉜䉟䊦଀

ABAQUS䊂䊷䉺䈱౉ജ⚿ᨐ䈱↹㕙଀䇼੐ᬺේ★ p i-19 䇽MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ⎇ⓥ㐿⊒ᚑᨐ㪈㪋㪆㪈㪏䋸䋩䊂䊷䉺䊔䊷䉴䉟䊮䉺䊷䊐䉢䊷䉴䋸䋩䊂䊷䉺䊔䊷䉴䉟䊮䉺䊷䊐䉢䊷䉴⸃ᨆ᧦ઙ⸳ቯ䈮䈍䈔䉎᧚ᢱ䊂䊷䉺䊔䊷䉴䈫䈱ㅪ៤䈱↹㕙଀㽲᧚ᢱ䊂䊷䉺䊔䊷䉴䈎䉌䈱ㆬᛯ㽴᧚ᢱDB‛ᕈ୯䈱GUI䈻䈱ข䉍ㄟ䉂⚿ᨐ䇼੐ᬺේ★ p i-21 䇽㽳‛ᕈ୯䈱⏕⹺䈫GUI䈻䈱ข䉍ㄟ䉂ᜰ␜MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪈㪌㪆㪈㪏䋹䋩䊒䊤䉫䉟䊮ᯏ⢻䈫䉴䊷䊌䊋䉟䉱䊷ᯏ⢻⎇ⓥ㐿⊒ᚑᨐ 䋹䋩䊒䊤䉫䉟䊮ᯏ⢻䈫䉴䊷䊌䊋䉟䉱䊷ᯏ⢻䊐䊧䊷䊛䊪䊷䉪䉸䊐䊃䊡䊷䉱䍃䊐䊧䊮䊄䊥䍃䉟䊮䉺䊷䊐䉢䊷䉴䊂䊋䉟䉴᭴ㅧ૞ᚑ䊙䉴䉪૞ᚑ⥄േᩰሶ૞ᚑ䊒䊨䉶䉴䊧䉲䊏⸃ᨆ᧦ઙ⸳ቯ⸃ᨆ⚿ᨐ⴫␜ᯏ᭴⸃ᨆ䉲䊚䊠䊧䊷䉺䊒䊨䉶䉴⸃ᨆ䉿䊷䊦ᯏ⢻᜛ᒛ䉸䊐䊃ജቇ⸃ᨆ⇣ᣇᕈ䉡䉢䉾䊃䉣䉾䉼䊮䉫䊒䊨䉶䉴ㅒ໧㗴⸃ᨆ䊄䊤䉟䉣䉾䉼䊮䉫ធวታⵝ⸃ᨆ㔚⏛⇇⸃ᨆ࿶㔚⸃ᨆ䊂䊷䉺䉮䊮䊋䊷䉺䊒䊤䉫䉟䊮ᯏ⢻ᾲ䊅䊉䉟䊮䊒䊥䊮䊃⸃ᨆశ䊅䊉䉟䊮䊒䊥䊮䊃⸃ᨆ㔓࿐᳇ᵹ૕ᓇ㗀⸃ᨆ਄⸥ㅪᚑ⸃ᨆ⍮⼂䌄䌂᧚ᢱ䍃䊒䊨䉶䉴䌄䌂䊙䊦䉼䊒䊨䉶䉴વᾲ⸃ᨆᾲᄌᒻ⸃ᨆ䊂䊷䉺䊔䊷䉴䉟䊮䉺䊷䊐䉢䊷䉴⸃ᨆᯏ⢻䊝䉳䊠䊷䊦⟲ᄖㇱ䊒䊤䉫䉟䊮䉸䊐䊃䉴I
䊌䊋䉟䉱䈮䉋䉎ో૕೙ᓮ䊒䊤䉫䉟䊮䌄䌂⸃ᨆ⚿ᨐ䊐䉜䉟䊦ᒻᑼ䈱౏㐿⸃ᨆ᧦ઙ䊐䉜䉟䊦ᒻᑼ䈱౏㐿⸃ᨆ䉸䊐䊃䈫䈱ㅪ៤䈱䈢䉄䈱◲ᤃᒻ⁁䊂䊷䉺ᒻᑼ䈱౏㐿ᄖㇱ䉸䊐䊃䈱ᮡḰ⿠േ䉿䊷䊦䊡䊷䉱⊓㍳䊂䊷䉺䈱䉟䊮䊘䊷䊃䊶䉣䉪䉴䊘䊷䊃䌗䌥䌢䋨䌍䌥䌭䌳䌯䌎䌅䈵䉐䈳䋩䈪䈱䉟䊮䉺䊷䊐䉢䊷䉴౏㐿䇼੐ᬺේ★ p i-23 䇽MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪈㪍㪆㪈㪏⎇ⓥ㐿⊒ᚑᨐ 䋱䋰䋩䊅䊉䉟䊮䊒䊥䊮䊃ะ䈔䊐䊧䊷䊪䊷䉪䈱ᡷୃ䋱䋰䋩䊅䊉䉟䊮䊒䊥䊮䊃ะ䈔䊐䊧䊷䊪䊷䉪䈱ᡷୃFDTDᴺ⋥੤ᩰሶ䈱ቯ⟵䊶✬㓸↹㕙଀䉴䊚䉴䉼䊞䊷䊃࿑䈱⴫␜଀䉴䊚䉴䉼䊞䊷䊃䋨๟ᵄᢙ䋵䋰䋰㪤㪟㫑㪄㪐㪇㪇㪤㪟㫑䋩㪈㪇㪅㪏㪇㪅㪍㪇㪅㪋㪇㪅㪉㪇㪄㪈㪄㪇㪅㪏㪄㪇㪅㪍㪄㪇㪅㪋㪄㪇㪅㪉㪇㪄㪇㪅㪉㪄㪇㪅㪋㪄㪇㪅㪍㪄㪇㪅㪏㪄㪈䇼੐ᬺේ★ p i-25 䇽㪇㪅㪉㪇㪅㪋㪇㪅㪍㪇㪅㪏㪈ᾲ䊅䊉䉟䊮䊒䊥䊮䊃䈱᧚ᢱ‛ᕈ୯⸳ቯ↹㕙଀᡼኿䊌䉺䊷䊮࿑䈱⴫␜଀㪉㪎㪇㪉㪎㪉㪉㪎㪊㪉㪎㪋㪉㪍㪍㪉㪍㪎㪉㪍㪏㪉㪍㪐㪉㪍㪊㪉㪍㪋㪉㪍㪌㪉㪎㪌㪉㪎㪍㪉㪎㪎㪉㪍㪈㪉㪍㪉㪉㪎㪏㪉㪎㪐㪉㪍㪇㪉㪏㪇㪉㪌㪏㪉㪌㪐㪉㪏㪈㪉㪏㪉㪈 㪉㪎㪈㪉㪌㪎㪉㪏㪊㪉㪌㪍㪉㪏㪋㪉㪌㪌㪉㪏㪌㪉㪏㪍㪉㪌㪋㪉㪏㪎㪉㪌㪊㪉㪏㪏㪉㪌㪉㪉㪌㪈㪉㪏㪐㪉㪐㪇㪉㪌㪇㪉㪋㪐㪉㪐㪈㪉㪋㪏㪉㪐㪉㪉㪋㪎㪉㪐㪊㪉㪋㪍㪉㪐㪋㪉㪐㪌㪉㪋㪌㪉㪋㪋㪉㪐㪍㪉㪐㪎㪉㪋㪊㪉㪐㪏㪉㪋㪉㪉㪋㪈㪉㪐㪐㪉㪋㪇㪊㪇㪇㪊㪇㪈㪉㪊㪐㪉㪊㪏㪊㪇㪉㪉㪊㪎㪊㪇㪊㪊㪇㪋㪉㪊㪍㪉㪊㪌㪊㪇㪌㪉㪊㪋㪊㪇㪍㪉㪊㪊㪊㪇㪎㪉㪊㪉㪊㪇㪏㪉㪊㪈㪊㪇㪐㪉㪊㪇㪊㪈㪇㪊㪈㪈㪉㪉㪐㪉㪉㪏㪊㪈㪉㪉㪉㪎㪊㪈㪊㪉㪉㪍㪊㪈㪋㪉㪉㪌㪊㪈㪌㪉㪉㪋㪊㪈㪍㪊㪈㪎㪉㪉㪊㪉㪉㪉㪊㪈㪏㪉㪉㪈㪊㪈㪐㪊㪉㪇㪉㪉㪇㪉㪈㪐㪊㪉㪈㪊㪉㪉㪉㪈㪏㪉㪈㪎㪊㪉㪊㪊㪉㪋㪉㪈㪍㪉㪈㪌㪊㪉㪌㪊㪉㪍㪉㪈㪋㪉㪈㪊㪊㪉㪎㪉㪈㪉㪊㪉㪏㪉㪈㪈㪊㪉㪐㪉㪈㪇㪊㪊㪇㪉㪇㪐㪊㪊㪈㪉㪇㪏㪊㪊㪉㪉㪇㪎㪊㪊㪊㪉㪇㪍㪊㪊㪋㪉㪇㪌㪊㪊㪌㪉㪇㪋㪊㪊㪍㪉㪇㪊㪊㪊㪎㪉㪇㪉㪊㪊㪏㪉㪇㪈㪊㪊㪐㪉㪇㪇㪊㪋㪇㪈㪐㪐㪊㪋㪈㪈㪐㪏㪊㪋㪉㪈㪐㪎㪊㪋㪊㪈㪐㪍㪊㪋㪋㪈㪐㪌㪊㪋㪌㪈㪐㪋㪊㪋㪍㪈㪐㪊㪊㪋㪎㪈㪐㪉㪊㪋㪏㪈㪐㪈㪊㪋㪐㪈㪐㪇㪊㪌㪇㪈㪏㪐㪊㪌㪈㪈㪏㪏㪊㪌㪉㪈㪏㪎㪊㪌㪊㪈㪏㪍㪊㪌㪋㪈㪏㪌㪊㪌㪌㪈㪏㪋㪊㪌㪍㪈㪏㪊㪊㪌㪎㪈㪏㪉㪊㪌㪏㪈㪏㪈㪇㪈㪏㪇㪇㪊㪌㪐㪈㪎㪐㪈㪉㪈㪎㪏㪈㪎㪎㪊㪋㪈㪎㪍㪈㪎㪌㪈㪎㪋㪍㪌㪈㪎㪊㪈㪎㪉㪏㪐㪎㪈㪎㪈㪈㪎㪇㪈㪇㪈㪍㪐㪈㪈㪈㪉㪈㪍㪏㪈㪍㪎㪈㪊㪈㪍㪍㪈㪋㪈㪍㪌㪈㪌㪈㪍㪈㪍㪋㪈㪍㪊㪈㪎㪈㪏㪈㪍㪉㪈㪐㪈㪍㪈㪉㪇㪈㪍㪇㪉㪈㪈㪌㪐㪉㪉㪈㪌㪏㪉㪊㪈㪌㪎㪉㪋㪈㪌㪍㪉㪌㪈㪌㪌㪉㪍㪈㪌㪋㪉㪎㪈㪌㪊㪉㪏㪈㪌㪉㪉㪐㪈㪌㪈㪈㪌㪇㪊㪇㪊㪈㪈㪋㪐㪊㪉㪈㪋㪏㪊㪊㪈㪋㪎㪊㪋㪈㪋㪍㪊㪌㪈㪋㪌㪊㪍㪈㪋㪋㪊㪎㪈㪋㪊㪊㪏㪈㪋㪉㪊㪐㪈㪋㪈㪋㪇㪈㪋㪇㪋㪈㪈㪊㪐㪋㪉㪈㪊㪏㪋㪊㪈㪊㪎㪋㪋㪈㪊㪍㪋㪌㪈㪊㪌㪋㪍㪈㪊㪋㪋㪎㪈㪊㪊㪋㪏㪈㪊㪉㪋㪐㪈㪊㪈㪌㪇㪈㪊㪇㪌㪈㪈㪉㪐㪌㪉㪈㪉㪏㪌㪊㪈㪉㪎㪌㪋㪈㪉㪍㪌㪌㪈㪉㪌㪌㪍㪈㪉㪋㪌㪎㪈㪉㪊㪌㪏㪈㪉㪉㪌㪐㪈㪉㪈㪍㪇㪈㪉㪇㪍㪈㪈㪈㪐㪍㪉㪈㪈㪏㪍㪊㪈㪈㪎㪍㪋㪈㪈㪍㪍㪌㪈㪈㪌㪍㪍㪈㪈㪋㪍㪎㪈㪈㪊㪍㪏㪈㪈㪉㪈㪈㪈㪍㪐㪈㪈㪇㪎㪇㪈㪇㪐㪎㪈㪈㪇㪏㪎㪉㪈㪇㪎㪎㪊㪈㪇㪍㪎㪋㪈㪇㪌㪎㪌㪈㪇㪋㪎㪍㪈㪇㪊㪎㪎㪈㪇㪉㪈㪇㪈㪎㪐㪎㪏㪈㪇㪇㪏㪇㪐㪐㪐㪏㪏㪉㪏㪈㪐㪎㪐㪍㪐㪌㪏㪌㪏㪋㪏㪊㪐㪋㪐㪊㪐㪉㪐㪈 㪏㪐㪏㪏㪏㪎㪏㪍㪐㪇MEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪈㪎㪆㪈㪏䋨䋱䋩⋡ᮡ䈱㆐ᚑᐲᄂᆮ᪮ႸႸ೅঺ௐἰἋἁ˺঺ἰἋἁ᪸؏ỉ‫ܭ‬፯ὉዻᨼẆἂἼἕἛẆἾỶἶદ˺ẆἍἽನᡯદ˺Ệ᧙ỪỦೞᏡửܱྵẴỦἙἢỶἋನᡯ˺঺ؕஜᇌ˳ನᡯỉ‫ܭ‬፯Ẇ஬ឋ᪸؏ỉᚨ‫ܭ‬ὉዻᨼẆᇌ˳ἙὊἑ᧓ỉᨼӳ๫ም᧙ỪỦೞᏡửܱྵẴỦᐯѣ఍‫঺˺܇‬ᵔ᩿˳ỉ఍‫܇‬ẆἉỹἽᙲእểẲềẆᵒᚌ࢟ấợỎᵑᚌ࢟఍‫܇‬ửᐯѣ˺঺ẴỦೞᏡửܱྵẴỦἩἿἍἋἾἉἦӲᆔἩἿἍἋ߻ᆉỉᢠ৸ẆӲ߻ᆉỂỉẆᘺፗவˑẆ஬ឋᚨ‫ܭ‬ẆἰἋἁᚨ‫ܭ‬Ẇ࢟ཞἣἻἳὊἑễỄỉᚨ‫ܭ‬ὉዻᨼೞᏡửܱྵẴỦᚐௌவˑᚨ‫ܭ‬ೞನᚐௌἏἧἚỉ஬૰ཋࣱἙὊἑẆ‫ؾ‬မவˑẆᚘምСࣂἣἻἳὊἑẆấợỎἩἿἍἋᚐௌἏἧἚỉἩἿἍἋவˑửᚨ‫ܭ‬ẴỦೞᏡửܱྵẴỦᚐௌኽௐᘙᅆೞನᚐௌἏἧἚấợỎἩἿἍἋᚐௌἏἧἚỉᚐௌኽௐửӧᙻ҄ẴỦೞᏡửܱྵẴỦᚐௌἏἧἚẆᵡᵟᵢἏἧἚểỉἙὊἑἅὅἢὊἑᵡᵟᵢỉ࢟ཞἙὊἑấợỎộẺᚐௌἏἧἚỉ఍‫܇‬ἙὊἑử‫ݣ‬ᝋểẲẺἙὊἑἅὅἢὊἑೞᏡỉ᧏ႆử‫ܦ‬ʕẴỦẇἙὊἑἫὊἋỶὅἑὊἧỹὊἋ஬૰ὉἩἿἍἋἙὊἑἫὊἋấợỎჷᜤἙὊἑἫὊἋỉἙὊἑἫὊἋỶὅἑὊἧỹὊἋἻỶἨἻἼὊỉ᧏ႆử‫ܦ‬ʕẴỦἩἻἂỶὅೞᏡểἋὊἣἢỶἈἩἻἂỶὅỆ᧙ẲềỊẆᚐௌἏἧἚểỉỶὅἑὊἧỹὊἋˁಮửૢͳẲπ᧏ẴỦẇộẺẆἋὊἣἢỶἈೞᏡỆ᧙ẲềỊẆἧἾὊἲὁὊἁểӲᆔᚐௌἏἧἚỆ᧙ỪỦμೞᏡửૢӳࣱửਤẾề˺ѣẰẶỦˁኵỚửܱྵẴỦẐἜἠỶὅἩἼὅἚь߻ὉᚐௌἉἋἘἲỉ᧏ႆẑỆấẬỦἧἾὊἲὁὊἁἏἧἚỉો̲༏ἜἠỶὅἩἼὅἚấợỎήἜἠỶὅἩἼὅἚỉᚐௌவˑᚨ‫ܭ‬ೞᏡẆᾓᾑỶὅἑὊἧỹὊἋೞᏡẆᚐௌኽௐᘙᅆೞᏡửܱྵẴỦᢋ঺ࡇ࢘ИᚘဒˌɥỉೞᏡửẆદ˺ࣱὉМࣱ̝ሁử᣻ᙻẲề᧏ႆẲẺẇ᧏ႆỆấẟềỊẆӲᚐௌೞᏡểỉᢘദễѣ˺ᄩᛐấợỎ౨ᚰửᘍẟẆ ἸὊἈὊἧἾὅἛἼὊễᵥᵳᵧửܱྵẲẺẇṺ߼ᚡỉႸ೅ೞᏡửẴỔềܱྵẴỦẮểầЈஹẺMEMS-ONE䊒䊨䉳䉢䉪䊃੐ᓟ⹏ଔ㪈㪏㪆㪈㪏䋨䋲䋩ᚑᨐ䈱ᗧ⟵ᄂᆮ᪮Ⴘ঺ௐỉॖ፯ἰἋἁ˺঺ἰἋἁ˺঺ೞᏡỉ᧏ႆỆợụẆἩἿἍἋᚨᚘỂ࣏ᙲễἰἋἁἙὊἑử˺঺ὉዻᨼẲἩἿἍἋᚐௌἏἧἚỂ෇ဇẴỦẮểầӧᏡểễẾẺໜỂॖ፯ầẝỦẇἙἢỶἋನᡯ˺঺ἙἢỶἋನᡯ˺঺ೞᏡỉ᧏ႆỆợụẆἸὊἈầೞನᚐௌửᘍạẺỜỉἙἢỶἋನᡯἴἙἽửႺ੗˺঺ẴỦẮểầӧᏡểễẾẺໜỂॖ፯ầẝỦẇᐯѣ఍‫঺˺܇‬ᐯѣ఍‫঺˺܇‬ೞᏡỉ᧏ႆỆợụẆἙἢỶἋನᡯ˺঺ೞᏡởἩἿἍἋỺἱἷἾὊἉἹὅೞᏡỆợụ˺঺ẰủẺ࢟ཞἙὊἑửஊᨂᙲእỆᐯѣЎлẴỦẮểầӧᏡểễẾẺໜỂॖ፯ầẝỦẇἩἿἍἋἾἉἦἩἿἍἋἾἉἦೞᏡỉ᧏ႆỆợụẆᵫᵣᵫᵱἙἢỶἋỉᙌᡯἩἿἍἋỉӲ߻ᆉử‫ܭ‬፯ẲềἩἿἍἋỺἱἷἾὊἉἹὅửܱᘍẲẆἰἽἓἩἿἍἋ߻ᆉỂ˺঺ẰủỦἙἢỶἋ࢟ཞửʖยẴỦẮểầӧᏡểễẾẺໜỂॖ፯ầẝỦẇᚐௌவˑᚨ‫ܭ‬ᚐௌவˑᚨ‫ܭ‬ೞᏡỉ᧏ႆỆợụẆೞನᚐௌấợỎἩἿἍἋᚐௌửᘍạẺỜỉӲᆔᚐௌவˑửᚨ‫ܭ‬ẲᚐௌἏἧἚửܱᘍẴỦẮểầӧᏡểễẾẺໜỂॖ፯ầẝỦẇᚐௌኽௐᘙᅆᚐௌኽௐᘙᅆೞᏡỉ᧏ႆỆợụẆೞನᚐௌấợỎἩἿἍἋᚐௌỉᚐௌኽௐἙὊἑửӧᙻ҄ẲᙻᙾႎỆỪẦụởẴẟᚸ̖ửᘍạẮểầӧᏡểễẾẺໜỂॖ፯ầẝỦẇᚐௌἏἧἚẆᵡᵟᵢἏἧἚểỉἙὊἑἅὅἢὊἑᚐௌἏἧἚẆᵡᵟᵢἏἧἚểỉἙὊἑἅὅἢὊἑೞᏡỉ᧏ႆỆợụẆࠊᝤỉᵡᵟᵢἏἧἚὉᚐௌἏἧἚểỉἙὊἑ੉ӖầӧᏡểễụẆἸὊἈỉἙὊἑ෇ဇር‫׊‬ầ࠼ầẾẺໜỂॖ፯ầẝỦẇἙὊἑἫὊἋỶὅἑὊἧỹὊἋἙὊἑἫὊἋỶὅἑὊἧỹὊἋೞᏡỉ᧏ႆỆợụẆ஬૰ὉἩἿἍἋἙὊἑἫὊἋấợỎჷᜤἙὊἑἫὊἋỉӋༀὉዻᨼầӧᏡểễẾẺໜỂॖ፯ầẝỦẇἩἻἂỶὅೞᏡểἋὊἣἢỶἈἩἻἂỶὅೞᏡỉỶὅἑὊἧỹὊἋˁಮỉπ᧏ỆợụẆἸὊἈ཯ᐯἏἧἚửᾜᾴᾼῂᾞᾝᾔểᡲઃẰẶỦ࿢‫ؾ‬ử੩̓ẲẆἋὊἣἢỶἈೞᏡỆợụẆᾜᾴᾼῂᾞᾝᾔỉἧἾὊἲὁὊἁೞᏡểӲᆔᚐௌἏἧἚửૢӳࣱửਤẾềᡲઃẰẶỦẮểầӧᏡểễẾẺໜỂॖ፯ầẝỦẇẐἜἠỶὅἩἼὅἚь߻ὉᚐௌἉἋἘἲỉ᧏ႆẑỆấẬỦἧἾὊἲὁὊἁἏἧἚỉો̲ẐἜἠỶὅἩἼὅἚь߻ὉᚐௌἉἋἘἲỉ᧏ႆẑỆấẬỦἧἾὊἲὁὊἁἏἧἚỉો̲ửᘍạẮểỆợụẆ༏ἜἠỶὅἩἼὅἚь߻ὉᚐௌἏἧἚấợỎήἜἠỶὅἩἼὅἚь߻ὉᚐௌἉἋἘἲửᾜᾴᾼῂᾞᾝᾔỆኵỚᡂỚẆМဇẴỦẮểầӧᏡểễẾẺໜỂॖ፯ầẝỦẇ