Customer Service
Global Knowledge, Local Support

1Delivering Maximum Performance
Oxford Instruments provides services for R&D start-up to fab
expansion, from pilot lines to mass production. Whatever your needs
we have a service package to ensure your system and lab or fab areoperating at peak performance.

Investing in services to maximise
uptime and minimise costof ownership helps ensure
clear budgeting and reduces
unexpected costs. We offer a
range of service and support
options designed to meet ourcustomers’ expectations.

2Self Sufficiency
The self-sufficiency packages give you thefreedom to manage and maintain yoursystems using your own engineers­– with alittle help from us when you need it.

Service Agreements

Service Support Options

Our range of service agreements ensure
our engineers will support you whenever
you need us.

We also offer our customers the option
to purchase prepaid services through ourservice credits scheme.

Self Sufficiency

Self Sufficiency Package

Self Sufficiency Plus

If you want to take care of your equipment inhouse, our self-sufficiency package gives you thein-depth training required to maintain uptime withaccess to help desk support, discounted sparesand engineering time.

The Plus package has all the features of Self
Sufficiency enhanced with additional training
services, fast help desk access and a numberof guaranteed onsite visits from our highly
experienced field service engineers. Software
assurance is also included in the Self Sufficiency
Plus Package.

This package is suitable for Universities,
Institutions and pilot R&D production who
have engineering support on site but require
maintenance training for Engineering teams.

3Support Agreements
Our Service Support Agreements provide access to our expert help
desks, field service engineers and spare parts to ensure that uptime,
cost of ownership and productivity stay at an optimal level if you don’t
have in-house engineering support.

Priority Support
The Priority support package gives peace of mind
at minimal investment knowing that access to thehelp desk and a number of engineer visits within
5 days can be accessed.
This package is suitable for customers who
require access to our helpdesk and limited on site
support with the option of including spare parts.
Customers with single chamber products suchas Ion Beam, PlasmaPro 100 etch and deposition
tools typically purchase this agreement.
This service agreement will follow on from yourwarranty period and will ensure continued
optimal performance of your tool. Investing in thispackage provides piece of mind that access toOxford Instruments is readily on hand.

Production Critical
Offering unlimited access to our helpdesk andfield service engineers, the Production Criticalpackage is for those who require a higher levelof guaranteed support for a greater level of
uptime with the option of including spare parts.
Customers with PlasmaPro single chamber andmulti-chamber clusters typically purchase thisagreement. This service agreement automaticallyenhances the warranty period to the same
production critical response times.

4

Feature comparison

Duration

Warranty enhancement
Training

Self Sufficiency Support

Service Support Agreements

Self Sufficiency
Package

Priority Support
PackageEngineer site visits

24 months fromacceptance or 90
days from delivery

12 months fromend of warranty
period24 months fromacceptance or 90
days from delivery—

warranty
upgraded—warranty
upgraded

1 credit

2 credits—

2 credits

Normal office hours 08.00 to 17.00 Monday–Friday
24 hours

4 hours

24 hours

4 hours

10% discount forengineer site visit

Maximum of
2 visits.
Engineerprioritised onsite
within 2 Oxford
Instruments
working days

Maximum of
2 visits.
Engineerprioritised onsite
within 5 days
10% discount for
further engineer
visitsUnlimited visits.
Engineerprioritised onsite
within 2 Oxford
Instruments
working days

Preventative Maintenance—CHECK

Parts (not including consumables)—

Optional Yes or No

Discount on all spares

10% discountSoftware Help Desk (bug fix)

10% discountSoftware Help Desk min. response time
Software Assurance Agreement

5Production CriticalPackage

12 months fromend of warranty
periodTechnical Help Desk opening hours
Technical Help Desk min. response time

Self Sufficiency
Plus Package

15% discount

10% discount

15% discountNormal office hours 08.00 to 17.00 Monday–Friday—4 hours

24 hours

4 hours

10% discount

Minimum once perannum feature
release10% discount

Minimum once perannum feature
releaseService Support
options

For further information
please contact
your local Oxford
Instruments Plasma
Technology office.

Software Assurance
The Software Assurance Agreement covers the system control
software and in addition to giving access to the software help
desk beyond warranty, provides peace of mind knowing you haveaccess to all the latest software releases.

Email:

Preventative Maintenance (PM)UK, Yatton+44 (0) 1934 837000

PM should be performed annually to retain the optimum
performance from your Oxford Instruments system. Take advantageof having a bespoke plan designed for your system and your usage.
Regularly scheduled maintenance can identify potential problems
before they occur and enables cost management to avoid the riskand expense associated with unplanned downtime.

TeamViewer

plasma@oxinst.com
Phone:

Germany, Wiesbaden+49 (0) 6122 937 161
India, Mumbai+91 22 4253 5100
Japan, Tokyo+81 3 5245 3261

Using our remote diagnostic support allows our engineers remote
access to your tools. Technical support can be provided quickly andeasily from our global service desks, and issues or faults diagnosed
or potentially resolved more accurately, helping us to help you!

PR China:• Beijing+86 10 6518 8160/1/2• Shanghai+86 21 6132 9688

Service CreditsSingapore+65 6337 6848

Service Credits can be purchased at any time offering thesecurity of knowing that they can be used a number of ways
to maintain your system. Service Credits can be exchanged
for engineer visits, training, PMs, spares parts, upgrades andsoftware assurance agreements. Bonus credits are available
based on minimum order value.

visit plasma.oxinst.com
Oxford Instruments, at Yatton, UK, operates Quality Management Systems approved to therequirements of BS EN ISO 9001. This publication is the copyright of Oxford Instruments plc andprovides outline information only, which (unless agreed by the company in writing) may not be used,applied or reproduced for any purpose or form part of any order or contract or regarded as therepresentation relating to the products or services concerned. Oxford Instruments’ policy is one ofcontinued improvement. The company reserves the right to alter without notice the specification, design
or conditions of supply of any product or service. Oxford Instruments acknowledges all trademarks andregistrations. Certain processes are not offered in a few countries, respecting local patents.

6© Oxford Instruments plc, 2019. All rights reserved. Ref: OIPT/CS/2020/001

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