100PlasmaPro®100 Polaris

Leading the way with single wafer etch solutions

100PlasmaPro 100 Polaris

Single wafer etch solutions for PSS and GaN in the HBLED market

Oxford Instruments Plasma Technology presents an evolution insingle wafer etch technology. With extensive experience of etchingmaterials, our technologies enable the cost of ownership and yieldrequired to maximise the performance of your devices.
The PlasmaPro 100 Polaris single wafer etch system offers smart
solutions to produce the etch results you need to maintain yourcompetitive edge.
Production manufacture
Designed specifically for the harsh chemistries required foretching tough materials such as GaN, Sapphire and SiC, thePlasmaPro 100 Polaris delivers fast etch rates uniformly onwafers up to 200mm diameter. Above all it has been developedwith reliability, uptime and ease of serviceability in mind.

PlasmaPro 100 PolarisPlasmaPro 100 Polaris		

Superb etch rates

Delivers
superb etchrates

Focussed on ensuring the greatest
uptime and highest throughput, key
system features and benefits include:• Exclusive Electrostatic Clamp

technology capable of clamping•

Sapphire•GaN on Sapphire•SiC

Patterned Sapphire substrate for GaN growth• Actively cooled electrode to maintain sample
temperature during etch process• High power ICP source producing highdensity plasmas• Magnetic spacer for enhanced ion control
and uniformity• High conductance pumping system• Reliable hardware and ease of serviceability
for excellent uptime

Typical GaN etched feature, PR remains intact

PlasmaPro 100 PolarisPlasmaPro 100 Polaris
Excellent, superior technical capabilities

Low cost of ownership
PlasmaPro 100 Polaris has been developed with costof ownership in mind. Rapid component exchange isachieved by ease of access to the tool’s interior.
PlasmaPro 100 Polaris incorporates many standard
components ensuring stock availability and quick delivery
in addition to high tool uptime and productivity.

Cluster platform
For the ultimate in throughput and productivity, thePlasmaPro 100 Polaris etch system is available on anindustry standard handling platform with options uptoand including dual cassette with six etch modules.
Wafer alignment has been optimised for transparent
substrate handling.

PlasmaPro 100 PolarisPlasmaPro 100 Polaris
Hardware capability

100Reliability and diagnostics
Fault and tool status diagnostics are achieved through the front end software. The system reports on the status of key
components, leading to rapid and detailed fault identification.

High density plasma etch source
High rates and outstanding uniformity are achieved through advanced ICP design and magnetically enhanced ion density control.

High conductance pumping system
Enhanced process uniformity and rates are guaranteed by using a high-conductance pumping chain in combination with a highcapacity turbo pump.

Advanced auto matching unit (AMU)
The advanced AMU allows fast, efficient and accurate matching, enabling excellent process repeatability.

Heated chamber liners
The heated chamber liners are optimised to reduce chamber wall deposition. This enables increased MTBF and MTBC while
reducing MTTC, maximising tool productivity.

Clamping of insulating substrates

Run-to-run repeatability

Clamping of a variety of materials including bare sapphire wafers is
possible with the unique ESC hardware. (Figure 1)‘Run to Run’ repeatability delivers excellent yield results, ensuring
maximum output from the system. (Figure 2)

PlasmaPro 100 Polaris

100PlasmaPro 100 Polaris
System control and global process support

System control
Clear and simple to use software ensures ease of use forprocess operators, while retaining the full functionality for
production facility managers and service staff.

• Fully SECS/GEM compatible• The front end visual interface, which controls andmonitors the process tool, is configured exactly for thecustomer’s system• Process recipes are written, stored and recalled throughthe same software, allowing a comprehensive recipe
library to be built

iService reaches ourcustomers worldwide• Password controlled user login allows different levels ofuser access and tasks, from ‘one-button’ run operation
to full system control•

Continuous system data logging (50ms) ensureseffective traceability of each wafer and process run

UK Headquarters
Service CentreParts Centre
Applications Labs
Sales/Service support

Global process support for the lifetime of the tool
The priorities of Oxford Instruments’ applications teams are fast turnaround of
pre-sale development samples, as well as effective post-sales support for thelifetime of the tool.
To achieve this, we have dedicated applications laboratories at our UK
headquarters, as well as Taiwan. In our laboratories we have an installed baseof over 25 plasma systems on which our engineers are constantly optimisingprocesses and delivering on hardware developments.

PlasmaPro 100 Polaris

Low costof ownershipand world classcustomersupport

PlasmaPro 100 Polaris
Cost of ownership and global customer support

Cost of ownership and customer support
We work with you to create the right system, process, andsupport package to meet your specific requirements. Our rangeof Flexible Support Agreements will be tailored to your needs.
This can include:• Guaranteed response times for support engineer visits andtechnical hotline calls• Choice of support coverage up to 24/7
• Scheduled preventative maintenance calls• Managed spares inventory options, including customer
dedicated stock, via our parts locations worldwide• Preferential spare part pricing• Process training• Certified training courses for your own engineers inpreventative maintenance and first level troubleshooting

Superior environmental
efficiency
PlasmaPro 100 Polaris has
a low heat load and highenergy efficiency.
The tool’s efficient ergonomics
and compliance to Semi
S2/S8 and cluster capability
make this a tool of choicefor production users.

PlasmaPro 100 Polaris

100

PlasmaPro 100 Polaris
Technical specifications

Oxford Instruments
Plasma Technology
For more information please email:plasma@oxinst.com
UKYattonTel: +44 (0) 1934 837000
Germany
Wiesbaden
Tel: +49 (0) 6122 937 161
India
MumbaiTel: +91 22 4253 5100
JapanTokyo
Tel: +81 3 5245 3261
PR China
Beijing
Tel: +86 10 6518 8160/1/2
ShanghaiTel: +86 21 6132 9688
Singapore
Tel: +65 6337 6848
TaiwanTel: +886 3 5788696

All measurements in mm

US, Canada & Latin America
Concord, MA
TOLLFREE: +1 800 447 4717visit www.oxford-instruments.com for more informationwww.oxford-instruments.com

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The company reserves the right to alter without notice the specification, design or conditions of supply of any product or service. Oxford
Instruments acknowledges all trademarks and registrations. © Oxford Instruments Nanotechnology Tools Ltd, 2013. All rights reserved.
Ref: OIPT/PlasmaPro100/Polaris/2014/01