35,0(6Original Instructions

FocusMonitor FM+ HPD
LaserDiagnosticsSoftware LDS

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

IMPORTANT!
READ CAREFULLY BEFORE USE.
KEEP FOR FUTURE USE.

Revision 02 EN - 02/2021

3

35,0(6FocusMonitor FM+ HPD

Table of contents
1

Basic safety instructions

7

2

Symbol explanations

93

About this operating manual

104Conditions at the installation site

105Device description

11

5.1
5.2

Functional description..............................................................................................................11
Measuring principle..................................................................................................................11

6

Quick overview installation

12

7

Transport

13

8

Installation

14

8.1
8.2
8.3
8.4
8.5
8.6
9

Safety instructions....................................................................................................................14
Preparation..............................................................................................................................16
Installation position...................................................................................................................17
Remove/insert the dust protection of the FS³...........................................................................17
Align the FocusMonitor FM+ HPD............................................................................................18
8.5.1 Device's position in relation to the laser beam..............................................................18
8.5.2 Align the FocusMonitor FM+ HPD with the Adjustment tool.........................................18
Install the FocusMonitor FM+ HPD...........................................................................................20

Electrical connections
9.1
9.2
9.3
9.4

21

Connections.............................................................................................................................21
Pin assignment........................................................................................................................229.2.1 Power supply...............................................................................................................229.2.2 PRIMES bus RS485.....................................................................................................22
Connection to the PC and establishing the power supply.........................................................23
Connection of the FocusMonitor FM+ HPD and PowerMonitor PM 48/100 to the PC..............24

10

Inert gas connection

25

11

Status display

25

12

Measuring

26

12.1
12.2
12.3
12.4

Safety instructions....................................................................................................................26
Notes of the LaserDiagnosticsSoftware LDS during measurement...........................................27
Clean FS³ before each measurement (tutorial video link)...........................................................28
Connect the FocusMonitor FM+ HPD with the LaserDiagnosticsSoftware LDS........................29
12.4.1 Connect device............................................................................................................29
12.4.2 If the device does not appear in the connections window............................................30
12.4.3 Change the network address of a connected device....................................................30
12.5 Performing an automatic caustic measurement........................................................................31
12.5.1 Selecting the measuring mode automatic caustic........................................................31
12.5.2 Configuring the settings (Device control > Settings)...................................................32
12.5.3 Configuring advanced settings (Device control > Advanced).....................................33
12.5.4 Defining the locked area (Device control > Advanced > Locked area) .....................34
12.5.5 Moving the axes (Device control > Advanced > Move axes).....................................35
12.5.6 Starting an automatic caustic measurement.................................................................36
12.5.7 Displaying the measurement results.............................................................................37
12.5.8 Display of measurement deviation in the LaserDiagnosticsSoftware LDS.....................38
12.5.9 Uncertainties in the determination of the beam parameters..........................................39

4

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

35,0(6

12.6 Determining the tool center point (TCP) using the FocusMonitor FM+ HPD..............................40
12.6.1 Distance of the diffuser in the FS³ to the horizontal carrier............................................41
13

Troubleshooting

42

14

Maintenance and service

43

15

Measures for the product disposal

43

16

Declaration of conformity

44

17

Technical data

45

18

Dimensions

46

19

Appendix48

19.1 Change the rotational disk (tutorial video link)...........................................................................48

Revision 02 EN - 02/2021

5

35,0(6FocusMonitor FM+ HPD

PRIMES - The Company
PRIMES manufactures measuring devices used to analyze laser beams. These devices are employed forthe diagnostics of high-power lasers ranging from CO2 lasers and solid-state lasers to diode lasers. A wavelength range from infrared through to near UV is covered, offering a wide variety of measuring devices todetermine the following beam parameters:••••

Laser power
Beam dimensions and position of an unfocused beam
Beam dimensions and position of a focused beam
Beam quality factor M²

Development, production and calibration of the measuring devices is performed at PRIMES. This guarantees
optimum quality, excellent service, and a short reaction time, providing the basis for us to meet all of ourcustomers’ requirements quickly and reliably.

PRIMES GmbH
Max-Planck-Str. 264319 Pfungstadt
GermanyTel +49 6157 9878-0
info@primes.dewww.primes.de

6

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

135,0(6

Basic safety instructions

Intended use
The device has been designed exclusively for measurements in the beam of high-power lasers.
Use for any other purpose is considered as not intended and is strictly prohibited. Furthermore, intended use
requires that you observe all information, instructions, safety notes and warning messages in this operating
manual. The specifications given in “17 Technical data” on page 45 apply. Any given limit values must becomplied with.
If not used as intended, the device or the system in which the device is installed can be damaged or destroyed. In addition, there is an increased risk to health and life. Only use the device in such a way that there isno risk of injury.
If you still have questions after reading this operating manual, please contact PRIMES or your supplier foryour own safety.
Observing applicable safety regulations
Observe the safety-relevant laws, guidelines, standards and regulations in the current editions published by
the state, standardization organizations, professional associations, etc. In particular, observe the regulations
on laser safety and comply with their requirements.
Necessary safety measures
The device measures direct laser radiation, but does not emit any radiation itself. However, during themeasurement the laser beam is directed at the device. This produces scattered or directed reflection of thelaser beam (laser class 4). The reflected beam is usually not visible.

DANGER
Serious eye or skin injury due to laser radiation
The device measures direct laser radiation, but does not emit any radiation itself. However,during the measurement the laser beam is reflected at the rotating FS³. This produces scattered or directed reflection of the laser beam (laser class 4). The reflected beam is usually
not visible.
X In measurement mode, a safety distance of one meter to the device must be maintainedeven when wearing safety goggles and safety clothing.
X Protect yourself from direct and reflected laser radiation while working with the device bytaking the following measures:
•
•
•
•
•
•
•

Never leave the device unattended when taking measurements.
If the device is moved from its aligned position, increased scattered or directed reflection of the laser beamoccurs during measuring operation. Fix the device in such a way that it cannot be moved by unintentional
bumping or pulling on the cables.
Install safety switches or emergency safety mechanisms that allow the laser to be switched off immediately.
Use suitable beam guidance and beam absorber elements which do not emit any hazardous substances
when irradiated.
Wear safety goggles (OD 6) adapted to the power, power density, laser wave length and operating modeof the laser beam source in use.
Wear suitable protective clothing or protective gloves if necessary.
If possible, also protect yourself from direct laser radiation and scattered radiation by using separating
protective devices that block or attenuate the radiation.

Revision 02 EN - 02/2021

7

35,0(6FocusMonitor FM+ HPD

Employing qualified personnel
The device may only be operated by qualified personnel. The qualified personnel must have been instructedin the installation and operation of the device and must have a basic understanding of working with highpower lasers, beam guiding systems and focusing units.
Conversions and modifications
The device may not be modified in terms of design or safety without the express consent of the manufacturer. The same applies to unauthorised opening, dismantling and repair. The removal of covers is only permitted within the scope of the intended use.
Liability disclaimer
Manufacturer and distributor exclude any liability for damages and injuries which are direct or indirect consequences of using the device not as intended or modifying the device or the associated software withoutauthorization.

8

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

235,0(6

Symbol explanations

The following symbols and signal words indicate possible residual risks:

DANGER
Means that death or serious physical injuries will occur if necessary safety precautions are nottaken.

WARNING
Means that death or serious physical injuries may occur if necessary safety precautions are nottaken.

CAUTION
Means that minor physical injury may occur if necessary safety precautions are not taken.

NOTICE
Means that property damage may occur if necessary safety precautions are not taken.

The following symbols indicating requirements and possible dangers are used on the device:

Laser radiation warning

Hand injuries warning

Read and observe the operating instructions and safety guidelines before startup!

Further symbols that are not safety-related:
Here you can find useful information and helpful tips.

With the CE designation, the manufacturer guarantees that its product meets the requirements of
the relevant EC guidelines.

X Call for action

Revision 02 EN - 02/2021

9

35,0(63FocusMonitor FM+ HPD

About this operating manualThis documentation describes the installation and configuration of the FocusMonitor FM+ HPD and the execution of measurements with the LaserDiagnosticsSoftware LDS.
The LaserDiagnosticsSoftware LDS, Version 1.042 or higher must be installed on the PC for measuring operation of the FocusMonitor FM+ HPD. The basic version of the LaserDiagnosticsSoftware LDS is included in
the scope of delivery for the device.
For a detailed description of the software installation, file management and evaluation of the measured data,
please refer to the separate operating manual LaserDiagnosticsSoftware LDS.

4
•
•
•
•

Conditions at the installation site
The device must not be operated in a condensing atmosphere.
The ambient air must be free of organic gases.
Protect the device from splashes of water and dust.
Operate the device in closed rooms only.

DANGER
Serious eye or skin injury due to glass splinters
A mechanical damage to the FS³ can destroy it during measurement operation. Due to thehigh speed of the FS³, ejected glass splinters can lead to severe injuries of the skin, the eyes
or even to a loss of vision.
X Do not operate the device without the curved touch protection in front of the FS³.
X Protect yourself by placing an appropriate shielding wall between the device and the area
where people are present.

DANGER
Fire and explosion hazards due to scattered or directed laser radiation
When the FocusMonitor FM+ HPD is being operated, the irradiation must be fully absorbed
behind the measurement zone. Fire bricks or other partly-absorbing surfaces are not suitable.
X Use a suitable absorber. PRIMES offers, depending on the application, suitable laser power
meters for permanent absorption, e.g. the PowerMonitor PM 48/100.
X Don’t store any flammable materials or highly flammable substances at the measuring location.

10

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

5Device description

5.1

Functional description

The FocusMonitor FM+ HPD is an opto-mechanical scanning measurement system for the analysis of continuous laser radiation in the NIR (1 000 – 1 100 nm). The laser beam is scanned with a rotating FS³ on thex-axis.
Using the horizontal and vertical carriers, the FS³ is moved along the y- and z-axes so that the characteristicsof the focused laser beam can be spacially measured.
The FS³ is equipped with a touch protection to prevent damage to the FS³ and to slow down glass splinters
flying around if the rotating FS³ is destroyed. Therefore, do not operate the device without the touch protection.
The FocusMonitor FM+ HPD has an Ethernet interface for fast and secure data exchange with the PC.

z-axisVertical carrier
Horizontal carrier
y-axis
Detector
FS³
Touch protection
Fig. 5.1:

5.2

Components of the FocusMonitor FM+ HPD

Measuring principle

The FocusMonitor FM+ HPD (High Power Density) is used to analyze focused laser beams in the NIR. The
device measures the spatial power density distribution in the focus range of the processing optics. From themeasured power density distributions, the LaserDiagnosticsSoftware LDS calculates the beam diametersand derives beam parameters such as the focus diameter, the spatial focus position and the beam quality
factor M².
The FocusMonitor FM+ HPD with the new fused silica sensor system FS³ is designed for particularlyhigh power densities up to 50 MW/cm². The power density distribution in the focus is measured with the
FocusMonitor FM+ HPD using a rotating FS³, which rotates in the x-direction and scans the beam cross section line by line in the y-direction.
The tiny diffuser in the FS³ separates out a small part of the laser beam. A mirror then guides the measuring
signal to a detector. The FS³ is automatically moved in z direction by a vertical carrier. This ensures that the
propagation parameters can be determined in full by moving along the beam caustic.

Revision 02 EN - 02/2021

11

35,0(66FocusMonitor FM+ HPD

Quick overview installation

1.

Installing the LaserDiagnosticsSoftware LDS, Version 1.042 or higher
on the PC•

Software is part of the scope of delivery

2.

Taking safety precautions

Chapter 1 on page 7

3.

Prepare Installation

Chapter 8.1 on page 14•

Observe safety instructions

to•Make preparations

chapter 8.3 on page 17•

Set installation position

4.

Electrical connection•

Establish voltage supply

5.

Connect with the PC•

Via Ethernet or LAN

6.

Connect with the PowerMonitor PM 48/100•

Via RS485

7.

Inert gas connection•

To protect the FS³ against contamination

8.

Complete installation

Chapter 8.5 on page 18•

Align the device

and•Mount the device firmly

chapter 8.6 on page 20

9.

Perform the measurement

Chapter 12 on page 26•

Observe safety instructions•

Perform a sample measurement

12

See separate Operating Manualof the LaserDiagnosticsSoftware
LDS

Chapter 9 on page 21

Chapter 9.3 on page 23

Chapter 9.4 on page 24

Chapter 10 on page 25

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

735,0(6

Transport

NOTICE
Damage/Destruction of the device
The device’s axes and carriers may be damaged if the device is subjected to hard shocks or
is allowed to fall.
X Handle the device carefully when transporting or installing it.
X Transport the device only with inserted dust protection (see chapter 8.4 on page 17).

NOTICE
Damage/Destruction of the FS³
Touching the FS³ can lead to burn-in by the laser radiation at the points of contact. Burn-in
lead to damage or bursting of the FS³.
X Do not touch the FS³.

Revision 02 EN - 02/2021

13

35,0(68Installation

8.1

Safety instructions

FocusMonitor FM+ HPD

Areas on the device that could be particularly hazardous for hand injuries are marked with the following
pictogram:Hand injuries warning

CAUTION
Risk of injury caused by rotating parts
The FS³ of the FocusMonitor FM+ HPD rotates at high rotational speed during the measuring operation. Even after the motor has been turned off, the FS³ will continue to rotate for acertain amount of time.
X Do not reach into or hold any objects into the inlet aperture of the device (see Fig. 8.1 on
page 15).
X After the motor has been turned off, wait until the FS³ comes to a complete stop.

CAUTION
Risk of crushing
Unlike the housing, the horizontal and vertical carrier of the FocusMonitor FM+ HPD canmove along the y- and z-axis.
X Do not reach into the movement range of the horizontal and vertical carrier (see Fig. 8.2 on
page 15).

14

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

FS³

Fig. 8.1:

Danger posed by rotating parts

z-axisy-axisFig. 8.2:

Crushing hazard at the FocusMonitor FM+ HPD

Revision 02 EN - 02/2021

15

35,0(68.2

FocusMonitor FM+ HPD

Preparation

Before installation, check the available space, especially to ensure that there is enough room for the movement range of the FocusMonitor FM+ HPD.
The device must be firmly assembled and must be mounted with screws (see chapter 8.6 on page 20).

NOTICE
Damage/Destruction of the device
Obstacles in the movement range of the horizontal and vertical carrier can lead to collisions
and damage the device.
X Keep the movement range free of obstacles (cutting nozzle, pressure rolls, etc.).
Please note that the horizontal and vertical carrier automatically moves into its resting position after the power supply has been turned off and on again or following a reset. Keep thisarea clear.

z=120 mm

y= max. 22 mm
Fig. 8.3:

Movement range of the horizontal and vertical carrier

In the LaserDiagnosticsSoftware LDS you have the option to restrict the movement range of the
FocusMonitor FM+ HPD (locked area, for further information see chapter 12.5.4 on page 34).

DANGER
Fire and explosion hazards due to scattered or directed laser radiation
When the FocusMonitor FM+ HPD is being operated, the irradiation must be fully absorbed
behind the measurement zone. Fire bricks or other partly-absorbing surfaces are not suitable.
X Use a suitable absorber. PRIMES offers, depending on the application, suitable laser power
meters for permanent absorption, e.g. the PowerMonitor PM 48/100.
X Don’t store any flammable materials or highly flammable substances at the measuring location.

NOTICE
Damage/Destruction of the absorber (e.g. PowerMonitor PM 48/100)
If the focused laser hits the absorber, it may be destroyed.
X Ensure there is enough distance between the FocusMonitor FM+ HPD and the absorber(the maximum permissible power density of the absorber must not be exceeded).

16

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

8.3

Installation position

The device is designed exclusively for beam incidence from above. Install the device according to the installation position shown in Fig. 8.4 on page 17.

Beam incidence

Mounting surface
Fig. 8.4:

8.4

Installation position

Remove/insert the dust protection of the FS³

The dust protection protects the FS³ from mechanical damage and from contamination (see Fig. 8.5 on
page 17).
The dust protection must be removed before each measurement and reinstalled after the measurement has
been completed.
The dust protection consists of an upper part with the identification TOP and a lower part. The two parts
are connected with inserted magnets. If the dust protection is in the correct position, it is in contact with thetouch protection without gaps.

Upper part (TOP)Touch protection

Lower partFig. 8.5:

Remove/insert the dust protection

Revision 02 EN - 02/2021

17

35,0(6FocusMonitor FM+ HPD

8.5

Align the FocusMonitor FM+ HPD

8.5.1

Device's position in relation to the laser beam

For the FocusMonitor FM+ HPD, the beam must enter vertically to the x-y-plane (see Fig. 8.6 on page 18).
The vertical alignment (z-axis) is primarily dependent on the expected focal length. The maximum verticalstroke of the measuring device is 120 mm.
The focus plane should be centered to the measuring range of the FocusMonitor FM+ HPD (see Fig. 8.6 on
page 18).

z

Focal length f

Focusing
plane

Fig. 8.6:

8.5.2

FocusMonitor FM+ HPD

y
60 mm

Measuring range
120 mmResting position

Measuring range of FocusMonitor FM+ HPD

Align the FocusMonitor FM+ HPD with the Adjustment tool

An Adjustment tool (see Fig. 8.7 on page 19) is included with the device for easy alignment (x-y-plane) tothe laser beam.

CAUTION
Risk of injury caused by rotating or moving parts
The linear movement of the horizontal and vertical carrier and the rotating FS³ pose an injury
hazard.
X Do not reach into the movement range of the horizontal and vertical carrier.
X Only align the FocusMonitor FM+ HPD while the FS³ is stationary.
1. Connect the FocusMonitor FM+ HPD with the LaserDiagnosticsSoftware LDS as described in chapter
12.4 on page 29.
2. Choose the function scanner of the FocusMonitor FM+ HPD as described in chapter 12.5.1 on
page 31.
3. In accordance with chapter 12.5.3 on page 33, enter the value of 60 mm in the Device Control >Advanced > Move axes menu:• The horizontal carrier will move to the position 60 mm above its resting position (see Fig. 8.6 on page 18)
without a rotated FS³.
4. Remove the dust protection according to chapter 8.4 on page 17.

18

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

5. Place the Adjustment tool on the horizontal carrier (see Fig. 8.7 on page 19).
6. Turn on the pilot laser and align the device:• If the pilot laser beam hits perpendicular to and in the middle of the small marking in the Adjustment tool,
the device is properly aligned.

Pilot laser beam

Horizontal carrier

Marking

Adjustment toolFig. 8.7:

Adjustment tool at the horizontal carrier of FocusMonitor FM+ HPD
8 mm

8 mm

FS³
x-axisy-axisOffset = 14 mm
max. 22 mm
Fig. 8.8:

Offset of a measurement window size of 8 x 8 mm

NOTICE
Damage/destruction of the adjustment tool and the FS³
If the adjustment tool is irradiated with the laser, the adjustment tool and the underlying FS³
will be destroyed.
X Remove the adjustment tool before turning on the laser.
Five to twelve seconds after the supply voltage is switched on, the FocusMonitor FM+ HPD moves
into the resting position (lowest z-position).

Revision 02 EN - 02/2021

19

35,0(68.6FocusMonitor FM+ HPD

Install the FocusMonitor FM+ HPD

DANGER
Serious eye or skin injury due to laser radiation
If the device is moved from its aligned position, increased scattered or directed reflection of
the laser beam occurs during measuring operation (laser class 4).
X Mount the device so that it cannot be moved by an unintentional knock or cables being
pulled accidentally.
The mounting surface of the housing has six slotted holes Ø 6.4 mm and four alignment holes Ø 6H7 mm
for assembly on a support bracket provided by the customer or the PowerMonitor PM (see Fig. 8.9 on
page 20).
Use at least four M6 screws to fasten the housing. The total length of the screws depends on the dimensionsof the customer’s support bracket.
4x Ø 6 H7Slotted holes Ø 6.4 mm
Alignment holes Ø 6H7 mm

8

222

242
225

8

16 10
55
Fig. 8.9:

65
10

10
226,8

Mounting holes, view from above (same hole pattern below)

DANGER
Serious eye or skin injury due to laser radiation
If the laser beam hits the FS³ located in the inlet aperture, scattered or directed reflection of
the laser beam occurs (laser class 4).
X Wear powder-free latex gloves and move the FS³ out of the inlet aperture.

20

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

9Electrical connections

The FocusMonitor FM+ HPD requires a voltage supply of 24 V ±5 % (DC) for the operation. A suitable power
supply is included in the scope of delivery.
Data is transmitted between the FocusMonitor FM+ HPD and PC via the Ethernet connection.
Another device, such as a PowerMonitor PM 48/100, can be connected to the FocusMonitor FM+ HPD via
the RS485 interface (PRIMES bus). The signal from the PowerMonitor PM 48/100 is transmitted through the
FocusMonitor FM+ HPD to the PC via the Ethernet interface. The additional measuring device is powered by
the power supply of the FocusMonitor FM+ HPD.
Please use only the provided original PRIMES power supply and the connection lines.
Please ensure that all electrical connections have been established and switch the device on before
starting the LaserDiagnosticsSoftware LDS.

9.1

Connections
On/Off switch

Status display

Ethernet

Power supply
connection

RS485

Inert gas

Fig. 9.1:

FocusMonitor FM+ HPD connections

Revision 02 EN - 02/2021

21

35,0(6FocusMonitor FM+ HPD

9.2

Pin assignment

9.2.1

Power supply

Harting M12-P-PCB-THR-2PC-5P-LCOD-M-STR
3

2

4

1
FE

Tab. 9.1:

9.2.2

Pin

Function

1

+24 V

2

Not assigned

3

GND

4

Not assigned

5

FE (functional earth)

Connection socket for the power supply

PRIMES bus RS485

Pin arrangement D-sub socket, 9-pin (view of plug-in side)

1

5

9

Tab. 9.2:

22

6

Pin

Function

1

GND

2

RS485 (+)

3

+24 V

4

Not assigned

5

Not assigned

6

GND

7

RS485 (–)

8

+24 V

9

Not assigned

D-sub socket, PRIMES bus

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

9.3

Connection to the PC and establishing the power supply

PRIMES power supply

LMax= 1.8 m

FocusMonitor FM+ HPD

LMax= 2.0 m
orCrossover cable

Fig. 9.2:

Patch cable

Ethernet

Ethernet

PC

LAN

Connection of FocusMonitor FM+ HPD

Connect the FocusMonitor FM+ HPD to the PC via a crossover cable or to the network via a patch cable.

Revision 02 EN - 02/2021

23

35,0(69.4

FocusMonitor FM+ HPD

Connection of the FocusMonitor FM+ HPD and PowerMonitor PM 48/100 to the PC

For full absorption of the radiation behind the measurement zone, you can use the PRIMES PowerMonitor
PM 48/100. The water-cooled PowerMonitor PM 48/100 measures the laser power and provides additional
information on cooling water flow and temperature.

PRIMES Power supply
Ethernet

PRIMES bus RS485
socket/socket
Lmax=10 m
PM 48

or

PM 100Fig. 9.3:

Connection of the FocusMonitor FM+ HPD and PowerMonitor PM 48/100 to the PC

NOTICE
Damage/Destruction of the device due to overvoltage
When disconnecting the electric cables during operation (when the supply voltage is connected), voltage peaks can be generated that could destroy the communication modules ofthe measuring devices.
X Connect/disconnect all plugs in a de-energized state only.
When connecting several devices, always use only one PRIMES power supply unit on the
FocusMonitor FM+ HPD for powering the devices.

24

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

10Inert gas connection

To protect the FS³ from dust particles and contamination, the FS³ can be flushed with inert gas or cleaned
compressed air via the inert gas connection.

NOTICE
Damage/Destruction of the device
The effects of uncontrolled gas flow (e.g. process gas) could distort the measurement oreven damage the device.
X Only use helium, nitrogen or argon as the inert gas at the intended connection. The pressure
may not exceed a maximum of 0.5 bar.

Inert gas connector Ø 4 mm

Fig. 10.1:

11

Inert gas connection on the FocusMonitor FM+ HPD

Status display

The status display consists of a light ring that indicates different states of the FocusMonitor FM+ HPD withdifferent colors and static or rotating lights.

Tab. 11.1:

Color

Lighting state

Meaning

White

The entire ringilluminates

The supply voltage is connected

Yellow

Rotating light

The FS³ rotates and the different rotational speeds
are indicated.

Red

Rotating light

The FS³ rotates and the y-axis is moved. The
measurement is in progress, the different rotational
speeds are indicated.

States of the status display

Revision 02 EN - 02/2021

25

35,0(612

Measuring

12.1

Safety instructions

FocusMonitor FM+ HPD

DANGER
Serious eye or skin injury due to laser radiation
The device measures direct laser radiation, but does not emit any radiation itself. However,during the measurement the laser beam is reflected at the rotating FS³. This produces scattered or directed reflection of the laser beam (laser class 4). The reflected beam is usually
not visible.
X Please wear safety goggles (OD 6) adapted to the power, power density, laser wave lengthand operating mode of the laser beam source in use.
X Wear suitable protective clothing and protective gloves.
X Protect yourself from laser radiation by separating protective devices (e.g. by using appropriate shielding).
X In measurement mode, a safety distance of one meter to the FocusMonitor FM+ HPD must
be maintained even when wearing safety goggles and safety clothing.

DANGER
Serious eye or skin injury due to glass splinters
A mechanical damage to the FS³ can destroy it during measurement operation. Due to thehigh speed of the FS³, ejected glass splinters can lead to severe injuries of the skin, the eyes
or even to a loss of vision.
X Do not operate the device without the curved touch protection in front of the FS³.
X Protect yourself by placing an appropriate shielding wall between the device and the area
where people are present.

DANGER
Serious eye or skin injury due to laser radiation
If the device is moved from its aligned position, increased scattered or directed reflection of
the laser beam occurs during measuring operation (laser class 4).
X Mount the device so that it cannot be moved by an unintentional knock or cables being
pulled accidentally.

DANGER
Fire and explosion hazards due to scattered or directed laser radiation
When the FocusMonitor FM+ HPD is being operated, the irradiation must be fully absorbed
behind the measurement zone. Fire bricks or other partly-absorbing surfaces are not suitable.
X Use a suitable absorber. PRIMES offers, depending on the application, suitable laser power
meters for permanent absorption, e.g. the PowerMonitor PM 48/100.
X Don’t store any flammable materials or highly flammable substances at the measuring location.

26

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

35,0(6

CAUTION
Risk of injury caused by rotating parts
The FS³ of the FocusMonitor FM+ HPD rotates at high rotational speed during the measuring operation. Even after the motor has been turned off, the FS³ will continue to rotate for acertain amount of time.
X Do not reach into or hold any objects into the inlet aperture of the device.
X After the motor has been turned off, wait until the FS³ comes to a complete stop.

CAUTION
Risk of crushing
Unlike the housing, the horizontal and vertical carrier of the FocusMonitor FM+ HPD canmove along the y- and z-axis.
X Do not reach into the movement range of the horizontal and vertical carrier.

12.2

Notes of the LaserDiagnosticsSoftware LDS during measurement

If problems occur during a measurement, the LaserDiagnosticsSoftware LDS displays them in different categories and different colors.
Notes
Notes provide assistance in interpretingthe measurement results and are displayed in a blue window.
By clicking on the warning triangle in thefooter, further information about the problem is displayed.
Warnings
Non-safety-critical problems that influence
the quality of the measurement results,
for example, are displayed in a yellow
window.
By clicking on the warning triangle in thefooter, further information about the problem is displayed.
Safety critical device errors
Safety-critical problems that can resultin damage/destruction of the device aredisplayed in a red window.
Safety-critical problems must be resolved
immediately. The safety-critical message
must be confirmed to continue the measurement.

Revision 02 EN - 02/2021

27

35,0(612.3

FocusMonitor FM+ HPD

Clean FS³ before each measurement (tutorial video link)

The FS³ must be cleaned before each measurement.
Do you need help?
You can find a tutorial video under the following link:
www.primes.de/en/support/downloads/tutorialvideos/fmplus-hpd.html

NEED HELP?
www.primes.de/de/support/
downloads/tutorialvideos/
fmplus-hpd.html

CAUTION
Burns due to hot components
Parts near the FS³ can be hot due to scattered radiation.
X Do not clean the FS³ directly after a measurement.
X Let the device cool down for an adequate period of time. The cooling time varies dependingon the laser power and the irradiation time.

NOTICE
Damage/destruction of the dust protection and the FS³
If the dust protection is irradiated with the laser, the dust protection and the underlying FS³
will be destroyed.
X Remove the dust protection before measuring.
1. Remove the dust protection according to chapter 8.4 on page 17.

NOTICE
Damage/Destruction of the FS³
Touching the FS³ can lead to burn-in by the laser radiation at the points of contact. Burn-in
lead to damage or cracking of the FS³.
X Do not touch the FS³.
X When cleaning the FS³ wear powder-free latex gloves.
2. Put on powder-free latex gloves.
3. Carefully clean the FS³ with isopropanol when cooled down (observe the safety instructions of the manufacturer) and lens cleaning cloth.

28

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

35,0(6

12.4

Connect the FocusMonitor FM+ HPD with the LaserDiagnosticsSoftware LDS

12.4.1Connect device

1.

Switch on the FocusMonitor
FM+ HPD.
The operating mode is shown in thestatus display (see chapter 11 on
page 25).

2.

Start theLaserDiagnosticsSoftware LDS.

3.

Click on the Devices tab.

4.

Click on the + Connect to device
button under the tab.
The Connections window appears.

5.
•

Click on the desired device.
If the device does not appear in theConnections window, see chapter
12.4.2 on page 30.

6.

Click on the Connect to device button.

Revision 02 EN - 02/2021

29

35,0(612.4.2

If the device does not appear in the connections window

The connection of the device to theLaserDiagnosticsSoftware LDS may beblocked by the firewall:
1.

•

The UDP port should be enabled by a system administrator.

In Windows > Control panel >Firewall, enable the UDP port 20034.

The network address of the PC is notwithin the range of the FocusMonitor
FM+ HPD.
1.

FocusMonitor FM+ HPD

The IP address should be entered by a system administrator.

In Windows > Control panel >Network and Sharing Center, assign an IP address to your PC thatis in the same address range as the
FocusMonitor FM+ HPD.
The IP address of your FocusMonitor
FM+ HPD can be found on the identification plate.

If several Ethernet cards or a USB3-toEthernet card are installed in the PC,
the connection of the device to theLaserDiagnosticsSoftware LDS may beblocked by the selection of the wrong
Ethernet card.
1.
•

Select the appropriate Ethernet cardin the Connections > All window.
The device is displayed in the Connections window

2.

Click on the device.

3.

Click on the Connect to device button.

12.4.3

Change the network address of a connected device

Proceed as follows in order to assign a different IP address to a connected device:1.

Right-click on the device and selectthe Device settings menu point.

2.

Enter in the desired IP address or
use the Use DHCP option and confirm the entry with OK.

3.

Turn the FocusMonitor FM+ HPD off
and on again.

30

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

12.5

Performing an automatic caustic measurement

This chapter aims to provide some basic information as you get to know the FocusMonitor FM+ HPD, discussing the example of an automatic caustic measurement with the LaserDiagnosticsSoftware LDS.
For a detailed description of the software installation, file management and evaluation of the measured data,
please refer to the separate operating manual LaserDiagnosticsSoftware LDS.
12.5.1
1.

Selecting the measuring mode automatic caustic

Connect the device according tochapter 12.4 on page 29 with theLaserDiagnosticsSoftware LDS.
The FocusMonitor FM+ HPD is established as a connected device.

2.

Click on the Scanner function.
The Device control menu opens.

3.

Click on the Automatic caustic button or
on the drop-down list measurementmode and Automatic caustic.

Function Scanner

Drop-down list Measuring mode

The corresponding Device control
opens.
The Automatic caustic tool bench
opens with the following tools:••

Caustic analysis
Plane analysis

Revision 02 EN - 02/2021

31

35,0(612.5.2

Configuring the settings (Device control > Settings)

1.

Click on the Settings tab.

2.

Enter the Used laser wavelength in
nm.
Enter the Power in W.
Enter the Focal length of the focusing lens in mm.

3.
4.

FocusMonitor FM+ HPD

Only when measuring a Time series
A time series consists of multiple measurements with the same settings, takenover a longer period of time.
Here the measurement interval is the time
between the end of a complete caustic
measurement and the triggering of thesubsequent measurement in seconds.
The actual measurement duration depends on the selected speed, measuringwindow size, and resolution and can vary
for this reason
1.
2.

32

Enter the Number of measurements.
Enter the Interval between measurements in s.

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

12.5.335,0(6

Configuring advanced settings (Device control > Advanced)

1.

Click on the Advanced tab.

2.

Enter the number of Pixel in x/ydirection in order to configure theresolution.

3.
•Enter the Number of planes.
For a standard-compliant measurement according to ISO 11146 werecommend to measure 21 planes
over 6 Rayleigh lengths.

Precaustic
By entering the upper and lower limitsof the precaustic, the range in which the
precaustic is measured is determined.
This function is particularly useful for measuring beams with high divergence. The
settings can be used to limit the rangeof the FocusMonitor FM+ HPD for focus
search.
1.

Enter the range of the z-axis position(z1 / z2) in mm.

Locked area
1. Define a locked area when there are
obstacles in the measuring area.
• More detailed information on locked
areas can be found in chapter 12.5.4
on page 34.
Move axes
To align the device (see Fig. 8.6 on
page 18) or to start a measurement at
this position, you can move the FS³ to thedesired position.
1.
2.
•
•

Enter 60 for the z-position in mm.
Click on the Move to z-Position
button.
The vertical carrier moves to thespecified position.
For detailed information on moving the axes, please refer to chapter
12.5.5 on page 35.

Measuring tip
Here you will find information about theFS³, such as the serial number S/N.
Saving/loading settings in the menu Device control > Advanced
The entries marked with an asterisk can be saved as default settings by clicking on the symbol
To load a preset, click on the icon.

Revision 02 EN - 02/2021.

33

35,0(612.5.4FocusMonitor FM+ HPD

Defining the locked area (Device control > Advanced > Locked area)

Obstacles in the movement range of the horizontal and vertical carrier can lead to collisions and damage thedevice. With the settings in the locked area field, a spatial limitation of the measuring range in y and z direction is defined to avoid collisions with possible obstacles.
The origin of the locked area is defined by
the diffuser in the FS³.
The position z=0 and y=0 defines thelower left corner of the locked area.
1.
•

Define the locked area by dragging
the three points P1, P2, P3 using yourmouse.
As an alternative, you can numerically enter the locked area in the entry
fields below.

ExampleIn the figure, the locked area is set toz=100 mm for the z-axis in Point P3.
• This causes the device’s vertical carrier to move in the z-direction fromz=0 mm to z=100 mm.

z

z=120 mmz=100 mm

The z-coordinate of the point P1 is alreadydefined by the resting position of the FS³
and cannot be changed.

Locked area
LaseryResting position
z=0 mmFS³

34

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

12.5.5
1.
•
2.
•
3.
•

35,0(6

Moving the axes (Device control > Advanced > Move axes)

Enter the desired y- and z-position of
the horizontal and vertical carrier into
the entry field numerically.
As an alternative, you can set the yand z-position on the slide control.
Click on the Move to y-position
button.
The horizontal carrier tip is positioned
at the selected y-position.
Click on the Move to z-position
button.
The vertical carrier is positioned at the
selected z-position.

Move to the determined focus
You can also move to the determinedfocus of a caustic that has already beenrecorded if, for example, you want tomeasure a similar beam. During thisprocess, the z0 value of the Invariant moments algorithm is used:
1.

2.
•

Select a caustic within your projecttree (see separate operating manualof the LaserDiagnosticsSoftware
LDS).
Click on the button Move to focus of
selected caustic.
The reference plane on the horizontal
carrier is approached (see chapter 12.6.1, „Distance of the diffuser in
the FS³ to the horizontal carrier“, onpage 41).

Revision 02 EN - 02/2021

35

35,0(612.5.6FocusMonitor FM+ HPD

Starting an automatic caustic measurement

1.

Follow the safety instructions in chapter 12.1 on page 26.

2.

Turn on the laser.

3.

Click on the Start button.
The progress of the measurement isindicated when Pre-caustic, Measuring caustic and then Measuring
completed are displayed:

Pre-caustic
During the display, the optimum measurement parameters such as the z-range
along the beam propagation, measurement window position and measurement
window size are determined automatically.
Measuring caustic
The actual measurement is carried out
during the indication.
Measuring completed
The measurement has been completed.
4.

Turn off the laser.

5.

Press the Stop Rotation button tostop the rotation of the FS³.

36

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

12.5.735,0(6

Displaying the measurement results

The measuring results are displayed in the opened tools once the measurement has been completed (see below).
A detailed description of the tools and the assessment of the measuring results can be found in the separate
operating manual for the LaserDiagnosticsSoftware LDS.

Revision 02 EN - 02/2021

37

35,0(612.5.8FocusMonitor FM+ HPD

Display of measurement deviation in the LaserDiagnosticsSoftware LDS

Measurements with the FocusMonitor
FM+ HPD may show deviations in the
power density distribution in the far field of
a caustic (> 1 Rayleigh length zR).
The deviation near the beam waist arevery small and the focal plane itself isdisplayed correctly.

FocusMonitor
FM+

FocusMonitor
FM+ HPD

Beam waist

For easier classification, planes are highlighted by a colored dot (green/yellow) inthe Laser Diagnostics Software LDS:••

A green dot marks planes close to
the focus where the deviation of thepower density distribution are verysmall.
A yellow dot marks planes located in
the far field where the power density
distribution may be distorted.
As these efects differ from measuring
tip to measuring tip a plane marked
by a yellow dot is not necesseraly
effected.

Planes can only be evaluated by theLaserDiagnosticsSoftware LDS if they areavailable in the project tree as part of avalid caustic measurement.
If no dot is displayed, automatic evaluationby the LaserDiagnosticsSoftware LDS is
not possible:•

38

0.8 zR

1.2 zR

2.4 zR

The caustic is indicated by theLaserDiagnosticsSoftware LDS as not
valid.

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

12.5.9Uncertainties in the determination of the beam parameters

Due to possible distortions of the power density distribution in the far field of a caustic, certain beam parameters, may show increased uncertainties. This is taken into account by an increased tolerance range(∆r∕r < 10 %). The specified measurement uncertainties are given in Tab. 12.1 on page 39.
Limit values of the beam parameters for safe determination of the beam parametersmin. beam radius

50 µm

max. beam radius

600 µmmax. power density

50 MW/cm²

Max. beam divergence

120 mradWavelength range

1 000 – 1 100 nm

Measurement uncertainties
Focus radius r0

5%

Beam radius r (|z| < 1 zR)

5%Beam radius r (|z| >1 zR)

10 %Focus position z0

3 % zR

Rayleigh length zR

15 %Beam quality factor M²

15 %Beam divergence

10 %Tab. 12.1:

Limit values and measurement uncertainties

The measurement uncertainties refer to the use of rotationally symmetric algorithms: Invariant moments or
86 %. Other evaluation algorithms may lead to increased uncertainties.

Revision 02 EN - 02/2021

39

35,0(612.6

FocusMonitor FM+ HPD

Determining the tool center point (TCP) using the FocusMonitor FM+ HPD

The tool center point (TCP) is usually located on the beam axis on the focus plane.
1.

Align the FocusMonitor FM+ HPD
as described in chapter 8.5 on
page 18.

2.

Install the FocusMonitor FM+ HPD
as described in chapter 8.6 on
page 20.

Laser processing head

3.

Perform an automatic caustic measurement as described in chapter
12.5 on page 31.

x-Achse4.

Move the measuring carrier of the
FocusMonitor FM+ HPD to the determined focus plane as described inchapter 12.5.5 on page 35.
The FocusMonitor FM+ HPD moves
the reference plane to the focus position(see figures in chapter 12.6.1 on
page 41).

•5.

Measure the Distance z between
the reference plane of the horizontal
carrier (see figure in chapter 12.6.1 on
page 41) and the reference planeon the laser processing head.

The following description is an example forthe further determination of the TCP using
a coaxial vision system.

Beam axisxy-Achsezy

Coordinate system of the TCP

Device coordinate system
Laser processing headz

6.

Position the laser processing head at
distance z above the workpiece.
• Here z is the distance from the reference plane at the laser processing
head to the workpiece surface.
7. Specify a short laser pulse with low
output on the workpiece.
8. Align the reticle of the coaxial observation camera with the penetration(x, y-position).
9. Use the reticle to align the laser processing head with a known fixed pointin the machine coordinate system.
10. Set the correct working distances between the laser processing head andthe previously selected fixed point.
11. Apply the axis values for this position.
• The tool center point (TCP) has been
determined.

40

Revision 02 EN - 02/2021

FocusMonitor FM+ HPDDistance of the diffuser in the FS³ to the horizontal carrier

23.7 ±0,212.6.135,0(6

Fig. 12.1:

Distance of the diffuser in the FS³ to the horizontal carrier

Revision 02 EN - 02/2021

41

35,0(613

FocusMonitor FM+ HPD

Troubleshooting

Error

Possible cause

RemedyThere is no connection between the
FocusMonitor FM+ HPD
and the PC.

Network address of the PC
is not within the range of the
FocusMonitor FM+ HPD.

In Windows > Control panel > Network and Sharing
Center, assign an IP address to your PC that is in thesame address range as the FocusMonitor FM+ HPD.

The connection may beblocked by the firewall.

Enable the UDP port 20034 according to chapter 12.4.2
on page 30.

An incorrect Ethernet card isselected.

Select the appropriate Ethernet card according to chapter 12.4.2 on page 30.

•
•

1.
2.

Error during ameasurement•
Apart from the ambient
noise and zero offset, no
measuring signal is available.

Data transmission error
Processor crash in themeasuring system
Program execution error

3.

Restart the LaserDiagnosticsSoftware LDS.
Turn the supply voltage off and on again to start a
reset cycle.
Restart the PC.

The device is not aligned
correctly.

Check the device alignment to the laser beam.

The power density in thefocus is too low.

Increase the laser power. The absolute power density inthe focus typically has to be several hundred kW/cm² toachieve a significant measuring signal.

The selected resolution is too
low for smaller focus spots(e.g. rf = 80 µm) and a maximum measuring window.

First measure outside the direct focus area. If thisdoes not lead to a result, increase the resolution(e.g. 256 x 256).

The signal enhancement is
too low.

Set the maximum enhancement and select the maximum measuring range.

The FS³ is destroyed during the measurement.

•

The power density is too
high.
Mechanical damage has
occurred.

A damaged FS³ must be replaced to ensure safe operation.

When measuring small
beams, an offset of the recorded measuring tracks
to each other is observed.

Variations in the synchronismof the rotary disk as well as
delays in triggering the trigger signal.

Position the beam as close to the left edge of the window as possible. The time interval between the trigger
signal and start of the measurement is then smaller anderrors can thus be reduced. Averaging is also often
helpful in this case.

The representation of themeasured beam deviates
clearly from the expectations.

Internal defect of the FS³

Please contact PRIMES technical support.
E-mail address: support@primes.de
We recommend to include some sample measurements
when contacting PRIMES.

42•

Revision 02 EN - 02/2021

FocusMonitor FM+ HPD

1435,0(6

Maintenance and service

The operator is responsible for determining the maintenance intervals for the measuring device.
PRIMES recommends a maintenance interval of 12 months for inspection and validation.
If the device is used only sporadically, the maintenance interval can be extended up to 24 months.

15

Measures for the product disposal

PRIMES gives you the opportunity to return your PRIMES measuring device for free disposal within thescope of the Waste of Electrical and Electronic Equipment (WEEE Directive). You can send PRIMES measuring devices to be disposed of within the EU (this service does not include shipping costs) to our address:
PRIMES GmbH
Max-Planck-Str. 264319 Pfungstadt
Germany
If you are located outside the EU, please contact your local PRIMES distributor to discuss the disposal procedure for your PRIMES measuring device.
PRIMES is a registered manufacturer in the German “Used Appliances Register“ stiftung elektro-altgeräte
register (stiftung ear) with the number WEEE-reg.-no. DE65549202.

Revision 02 EN - 02/2021

43

35,0(61644

FocusMonitor FM+ HPD

Declaration of conformity

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

17Technical data

Measurement parameters
Power range

30 – 25 000 W

Wavelength range

1 000 – 1 100 nm

Beam diameter

100 – 1 200 µm*

Max. power density

50 MW/cm²

Max. beam divergence

120 mrad* The size of the beam distribution to be measured must not exceed 1 200 µm in the 86 % power inclusion. Within
this range, measurement of multispots is also possible.
Determined parameters
Focus position x, y, z

yes

Focus radius x, yyesBeam quality factor M²

yes

Raw beam diameter with focussing element

yes

Beam parameter product BPP

yes

Divergence angle

yesPower density distribution

2D, 3D

Device parameters
Working range x-y

8 x 8 mm

Working range z

120 mmMechanical aperture8 x 8 mm

Resolution

32 x 32 – 1 024 x 1 024 pixel

Rotation speed of the FS³

1 875 rpm

Supply data
Power supply

24 V DC ± 5 %, max. 3.5 A

Inert gas (water and oil free)Helium, Nitrogen, Argon, compressed air

Specification of compressed air according toISO 8573-1: 2010

1:4:2

Pressure protective gas

typ. 0.5 bar

Communication
Interfaces

RS485/Ethernet

Dimensions and weight
Dimensions (L x W x H)

318 x 242 x 218 mm

Weight (approx.)

8.5 kgEnvironmental conditions
Operating temperature range

10 – 40 °C

Storage temperature range

5 – 50 °C

Reference temperature

22 °C

Permissible relative humidity (non-condensing)

10 – 80 %Revision 02 EN - 02/2021

45

35,0(618

FocusMonitor FM+ HPD

Dimensions
156.5

218

Ansicht A

317.7
4x Ø 6 H7

8

222

242
225

8

16 10
55

65
10

10
226.8

All dimensions in mm (general tolerance ISO 2768-v)

46

Revision 02 EN - 02/2021

35,0(6FocusMonitor FM+ HPD

View AAll dimensions in mm (general tolerance ISO 2768-v)

Revision 02 EN - 02/2021

47

35,0(619

Appendix

19.1

Change the rotational disk (tutorial video link)

Do you need help?
You can find a tutorial video under the following link:
www.primes.de/en/support/downloads/tutorialvideos/fmplus-hpd.html

48

FocusMonitor FM+ HPD

NEED HELP?
www.primes.de/de/support/
downloads/tutorialvideos/
fmplus-hpd.html

Revision 02 EN - 02/2021