2010 12 09 CC Red Alert 2 - Reborn - Patch 2.1 Setup [REPACK]

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Category:2010 video games Category:Buildings
and structures in Louisville, Kentucky
Category:Command and ConquerCategory:Video game cutscenes Category:Video
games developed in the United States
Category:Video games set in Louisville,
Kentucky1. Field of the Invention This
invention relates to a method for forming a
multilayer wiring pattern for multilayer wiring
substrates such as semiconductor wafers, as wellas to such a multilayer wiring pattern. 2.
Description of the Prior Art Recently, there
have been some proposals for using multilayer
wiring patterns having a metal wiring layer and abarrier layer between the metal wiring layer andan insulation layer such as an insulating resinfilm for a substrate having a complex wiring
pattern. For instance, it has been suggested thata multilayer wiring pattern having metal wiringof up to a third wiring layer or more is formedon an insulation layer such as an epoxy resin
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film by forming the metal wiring in a desired
wiring pattern by usual photolithographic andetching processes and then forming a wiring
layer including a barrier layer of Ta or Ta--Si in
a desired wiring pattern by usual vacuum
evaporation processes. Such a process isillustrated in FIGS. 1A to 1E showing part of amultilayer wiring pattern to be formed on thesurface of an insulation substrate having acomplex wiring pattern and it comprises a stepof forming a metal wiring layer 1 on aninsulation layer 2 as shown in FIG. 1A, a step of
forming a photoresist layer 3 on the metal
wiring layer 1 to pattern the photoresist layer 3
to form a photoresist pattern 4A or 4B as shownin FIG. 1B, a step of forming a barrier layer 4
such as a Ta or Ta--Si film on the metal wiring
layer 1 using the photoresist pattern 4A as anetching mask as shown in FIG. 1C, a step ofetching the barrier layer 4 and the metal wiring
layer 1 in the pattern corresponding to the4/5

photoresist pattern 4B as shown in FIG. 1D, anda step of removing the residuals of thephotoresist pattern 4B and etching off the metal
wiring layer 1, leaving the metal wiring layer 1
as shown in FIG. 1E. In such a method forforming a multilayer wiring pattern, however,the step of patterning the photoresist layer 3 bylithography is necessary before forming thebarrier layer 4, and the step f678ea9f9e
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5/52010 12 09 CC Red Alert 2 Reborn Patch 21 Setup REPACK