VACUUM PUMPNEW MDP-V

MDP/SLTSDV/SDF

VACUUM PUMP

MDP-V series

eco VP Screw

The Queen Bee Screw has evolved to create theeco VP Screw, beginning a new age of vacuum pumps!!
The long-awaited V series has been added tothe world-famous MDP series!!
This series maintains the high durability of the
MDP series, while also delivering energy savings
and a large reduction in running costs.
FEATURE

1.Up to approximately 20% reduction in power consumption（comparison with our company s products）

2.Up to a 100% reduction in N2 gas used for cooling（Gas recovery is possible when cooling N2 gas is set to zero.）

3.Parts are interchangeable with earlier MDP Series models.
Upper 60Hz
Lower 50Hz

SPECIFICATION

Maximum Pumping Ultimate Pressure Motor Rating Minimum Power Diluent Gas Flow Lubrication Oil Amount Cooling Water AmountSpeed
Ｐaℓ/min
kW×P
kW
ℓ
ℓ/min
ℓ/min［Note1］

Model

Bore
IN/OUT

MDP-680V

65A/50A

MDP-1015V

100A/65A

MDP-1225V

125A/80A

6500

1.0

11×2

7.8

5500

2.0

7.5×2

6.7

12000

1.022×2

16.8

10000

2.0

18.5×2

15.0

22000

0.5

37×2

18.3

18000

1.030×216.7

Light Process：0
Standard：25
Harsh Process：200［Note1］

3.06

Light Process：0
Standard：50
Harsh Process：400［Note1］

3.5

12Light Process：0
Standard：100
Harsh Process：400［Note1］

3.5

15［Note 1］The diluent gas ﬂow must be adjusted to match the customer s speciﬁcations.
［Note 2］
If you intend to use a MDP-V Series model outside of Japan, please consult with our company in advance.

■MATERIAL TABLE
Wetted PartStandard

Corrosion-Resistant（Z）

Casing

FCD450+Special Coating

FCD450＋Electroless Ni plating

FCD450＋Clean S

Rotorshaft

FCD450＋Special Coating

FCD450＋Electroless Ni plating

FCD450＋Clean SGas Seal

PTFE Dry Lip Seal

PTFE Dry Lip Seal

PTFE Dry Lip Seal

Gasket（O-ring）■COOLING WATER

Use water based on the JapaneseIndustrial Water Quality Standard at
temperature between 5〜32°
C andpressure 0.2〜0.4MpaG. Pure Water
cannot be used.

3

Corrosion-Resistant（C）

Fluororubber（Kalrez , PTFE and EPDM is available）■LUBRICATION OIL

Genuine Oil Mineral Oil : SHELL Tellus S2M68
Fluorine Oil : FOMBLIN Y14/6RP
Note : Standard is mineral oil■INLET GAS TEMPERATURE

Inlet Gas Temperature shall be 0〜40°C.
In the case the temperature exceeds
the range, please consult to Taiko
Kikai.

VACUUM PUMP

MDP-V series

COMPARISON OF POWER CONSUMPTION［Note］
Previous model MDP-680
New model MDP-680V

12Approx. 20%
reduction

108.5kW

410kW

6.8kW

7.8kW

Approx. 20%
reduction

Approx. 21%
reduction

2086

Previous model MDP-1015
New model MDP-1015V

25power（kW）

power（kW）

Approx. 22%
reduction

1519kW

1021kW
15kW

17kW

52050Hz060Hz

50Hz60Hz［Note］The power varies depending on the speciﬁcations.
(This ﬁgure shows a case with vacuum = 2 kPa, back pressure = atmospheric pressure, and the use of a countercooling ﬁlter.)PERFORMANCE

Pumping Speed（ℓ/min）■ESTIMATED PERFORMANCE CURVE
24000
22000
20000
18000
16000
14000
12000
10000
8000
6000
4000
2000
0

MDP-1225V

60Hz
50Hz

MDP-1015V

60Hz
50Hz
60Hz

MDP-680V

10 -1

1

10 2

1050Hz

10 3Pressure（Pa）

10 4

10 5

DIMENSION

Dimension Table（mm）
Model

L

LB

ML

W

WB

MW

H

Estimated Mass（kg）

MDP-680V

1600

1300

180

1040

615

200

905

640

MDP-1015V

1890

1550

200

1180

765

190

1020

1230

MDP-1225V

1980

16801901420

970

170

1256

1780

The approximate weight includes the weight of the motor.
［Note］

4VACUUM PUMP

MDP／SLT

SPECIFICATION
Upper 60Hz
Lower 50Hz

■SPECIFICATION TABLE（Standard）
Model

Bore
IN/OUT

MDP-415A

40A/40A

SLT-413A

40A/40A

MDP-535A

50A/40A

SLT-513A

50A/40A

MDP-680

65A/50A

MDP-1015

100A/65A

MDP-1550K

150A/100A

Note :（Pumping Speed Ultimate Pressure
ℓ/min
Pa

Motor Rating
kW×P

40

3.7×2

1100

80

3.7×2

1400

1.0

3.7×2

1100

1.3

3.7×2

3000

13

7.5×2

2500

50

5.5×2

3000

0.7

7.5×225001.0

5.5×2

6200

1.0

15×2

5000

1.3

11×2

11000

0.7

30×2

9000

1.0

22×2

35000

50

90×4

100

75×4

1400

27000

Lubrication Oil Amount Cooling Water Amountℓℓ/min
1.0

2.0（4.0）

1.0

2.0（4.0）

1.5

4.0（8.0）

1.5

4.0（8.0）

3.0

6.0（12.0）

3.5

12.0（12.0＋12.0）

14.5

30.0（30.0＋90.0））in the case ﬁtted with reverse cooler■MATERIAL TABLE
Wetted Part

Standard

Corrosion-Resistant（Z）

Corrosion-Resistant（C）

Casing

MDP FCD450＋Special Coating
SLT FC200＋Special Coating

FCD450＋Electroless Ni plating

FCD450＋Clean SRotorshaft

FCD450＋Special Coating

FCD450＋Electroless Ni plating

FCD450＋Clean SGas Seal

PTFE Dry Lip Seal

PTFE Dry Lip Seal

PTFE Dry Lip Seal

Gasket（O-ring）

Fluororubber（Kalrez , PTFE and EPDM is available）

Note : There are models that cannot fulﬁll the corrosion-resistant requirement.

■COOLING WATER

Use water based on the Japanese Industrial Water
Quality Standard at temperature between 5〜32°
C andpressure 0.2〜0.4MpaG. Pure Water cannot be used.

■LUBRICATION OIL

Genuine Oil Mineral Oil : SHELL Tellus S2M68
Fluorine Oil : FOMBLIN Y14/6RP
Note : Standard is mineral oil■INLET GAS TEMPERATURE

Inlet Gas Temperature shall be 0〜40°
C.
In the case the temperature exceeds the range, please
consult to Taiko Kikai.

5■COOLING GASCooling gas (reverse cooling gas) below 40°
C is requiredin order to cool the high compression ratio of the machine.
Select from the below:（1）Atmospheric Self-Suctioning TypeNot suitable for handling harzardous gas as the typeis self-suctioned through a ﬁlter by air（2）N2 Gas Purge Type
Provides a purge unit（only available below MDP-1015）（3）Cooler Type
Cools the exhaust gas for pumping in.

VACUUM PUMP

MDP／SLTPERFORMANCE■ESTIMATED PERFORMANCE CURVE
60Hz
50Hz

5000
MDP-680
4000

60Hz
50Hz

3000
SLT-513A

2000

MDP-535A

60Hz
50Hz

1000
05

MDP-1550K

30000

50Hz

20000
60Hz
10000

MDP-1015

50Hz

MDP-415A

SLT-413A
160Hz

Pumping Speed（ℓ /min）Pumping Speed（ℓ /min）

6000

10510 2510 35010 4 10 5

1

5

Pressure（Pa）

10510 2510 3510 4 10 5

Pressure（Pa）

DIMENSION

Dimension Table（mm）

Estimated Mass（kg）

ModelLLB

ML

W

WB

MWH

MDP-415A

1090

900

95840

515

115

862

290

SLT-413A

1160

960

95

840

515

115

862

320

MDP-535A

1370

1100

160

900

545

145

840

420

SLT-513A

1560

1300

145

900

545

145

840

450

MDP-680

1600

1300

180

1040

615

200

905

640

MDP-1015

1890

1550

200

1180

765

190

1020

1230

MDP-1550K

3000

2300

300

1600

1200

120

1580

3500

The approximate weight includes the weight of the motor.
［Note］

6

VACUUM PUMPSDV／SDFSPECIFICATION
Pumping Speed Ultimate Pressure Motor Rating Rotating Speed Lubrication Oil Amount Cooling Water Amountℓ/min
Pa
kW×Pmin-1ℓℓ/min

Model

IN BoreOUT Bore

SDV-25

VG2525A（R1）500300

1.5×2

2900

0.62

SDF-25

VG2525A（R1）500300

1.5×2

2900

0.6

Air-cooled

SDV-30

VG2525A
（R1）

85030

2.2×2

2900

0.6

2

SDF-30

VG2525A
（R1）

85030

2.2×2

2900

0.6

Air-cooled

SDV-30S

VG2525A
（R1）

1100

30

3.7×2

3500

0.6

2

SDV-40VG40

32A（R1-1/4）

1900

20

3.7×2

2400

1.04

SDV-40S

VG40

32A（R1-1/4）

2800

20

5.5×2

3500

1.04

SDV-50

VG50

VG40

2400/2900

300/130

5.5×22900/3550

1.04SDV-65

VG65

VG50

5000/6200

90/35

11×22900/3550

2.06SDV-100

VG100

VG65

9700/11500

60/25

18.5/22×22900/3550

5.0

12The SDV-100 motor rating is 18.5 kW at 50 Hz and 22 kW at 60 Hz.
［Note］■MATERIAL TABLE
Wetted PartStandard

Casing

FC200＋Special Coating

Rotorshaft

FCD450＋Special Coating

Gas Seal

PTFE Dry Lip Seal

■COOLING WATER■LUBRICATION OIL■INLET GAS TEMPERATURE

Use water based on the Japanese

Genuine Oil

Inlet Gas Temperature shall be

Industrial Water Quality Standard

S2M68

Mineral Oil : SHELL Tellus

0〜40°C.

at temperature between 5〜32°
C

In the case the temperatureand pressure 0.2〜0.4MpaG. Pureexceeds

Water cannot be used.

consult to Taiko Kikai.

therange,please

PERFORMANCE■ESTIMATED PERFORMANCE CURVE
20000

SDV-100（60Hz）

10000

SDV-30S

1000

SDV-30/SDF-30
500

SDV-25/SDF-25

SDV-65（60Hz）
SDV-65（50Hz）

5000

SDV-50（60Hz）

Pumping Speed（ℓ/min）

SDV-40S
SDV-40
Pumping Speed（ℓ/min）SDV-100（50Hz）

10000

5000

SDV-50（50Hz）

1000

100500505101

5102

5103

Pressure（Pa）

75104

5100

10102103
Pressure（Pa）

104

VACUUM PUMPSDV／SDFDIMENSION■SDV-25・30・30S・40・40S
Exhaust port

Inlet port

■SDF-25・30

Exhaust port

Inlet port

■SDV-50・65・100

Inlet port

H

Exhaust port

W

Model

L

SDV-25SDF-25

SDV-30

SDF-30

SDV-30S

SDV-40

SDV-40S

SDV-50

SDV-65

SDV-100

W

435

475

435

475

460

540

570

445

525

675

L

475

495

595

615

570

850

800

1110

1380

1570

H

590

590

590

590

690

715

790

600

660

840

Estimated Mass

125kg

115kg

155kg

140kg

165kg

270kg

245kg

250kg

385kg

760kg

Dimension Table（mm）（kg）

The approximate weight includes the weight of the motor.
［Note］

8VACUUM PUMP

MDP-V／MDP／SLT／SDV／SDF

ACCESSORY■REFERENCE DRAWING

Companion Flange⑧⑫MotorCompanion Flange⑨⑩⑪
Reverse Filter

CommonBedDrain Tank

Pump Cartridge

Flexible Shaft Coupling Safety Covers

Foundation Bolt

■STANDARD ACCESSORY
MDP-V series, MDP/SLT series
Common Bed・Flexible Shaft Coupling・Safety Covers・Companion Flange・Foundation Bolt・Reverse Filter（included
only for atmospheric self-suctioning type）
・Drain Tank

SDV-25〜40S, SDF series
V-pulley・V-belt・Safety Covers・Silencer・Intake-side companion ﬂange

SDV-50〜100
Common Bed・Flexible Shaft Coupling・Safety Covers・Companion Flange・Reverse Filter■SPECIAL ACCESSORY TABLE
No.

Name of Accessory

Standard Material

Special Material

Bore ･ Size①

Water Cooled Silencer

SS400

SUS304,316

40〜100A②

Water Cooled Silencer

SS400

SUS304,316

40〜100A③Suction Pipe

SUS304

SUS31640〜150A④

Check Valve

FC250
Fluororubber⑤

Check Valve

SCS13
Fluororubber⑥

N2 Purge Kit（A）purge for cooling gas and shaft sealat the suction and discharge side⑦

N2 Purge Kit（B）purge for shaft seal at the discharge side⑧N2 Purge Kit（C）purge for shaft sealat the suction and discharge side

⑨Bourdon Tube
Pressure Gauge

SUS316

Ball Valve
included⑩Cooling Water
Flow Switch

CAC

Outdoor Type⑪

Cooling Water
Flow Switch

FCD450・FC200

Explosionproof
Type⑫

Reverse Cooler

SUS304
Fluororubber

SCS14,PTFESUS316PTFE

Remarkwith a holefor cleaning

40〜150A

Mini-torque type

40〜150A

Mini-torque type
Regulator
Pressure Gauge
Flow Meter
Fitting Plate
Pipe
Small Check Valve

1/2 ・ 3/4 ・ 32A

Note 1：Make sure that a back stream prevention valve is provided and is linked with the vacuum pump at the suction side. The checkvalve indicated at the above chart is for complementary use.
Note 2：The SDV/SDF Series is for light processes, and ⑥ ‒ ⑧ do not apply.

■OTHERS

Vibrationproof Rubber , Electric Control Panel , Inlet/Outlet Flexible Joints , Hole in Anchor , Chemical Anchor ,Large Drain Tank , Site Flow , Acoustical Panel

9

VACUUM PUMP

MDP-V／MDP／SLT／SDV／SDF

LARGE PUMPING（Equipped with Mechanical Booster）

HARSH PROCESS（Large Drain Tank･Solvent Drop Speciﬁcation）

HARSH PROCESS（Standard）

HARSH PROCESS（Large Drain Tank･Reverse Cooler）

PACKAGED（Muﬄing･Portable）

LIGHT PROCESSLIGHT PROCESS（Standard）（Air-cooled Speciﬁcation）

Screw Type Dry Vacuum Pump for Semiconductor Process（ＣＶＤ,ＰＶＤ,ＥＴＣＨＩＮＧ etc...）is series seperately.
10For selecting the models , please ﬁll in andsend the below form to Taiko Kikai.

To Head Oﬃce ･ Tokyo ･ Osaka
Vacuum Pump Speciﬁcation Selection Form（for quotation）
Division

Company

Name

Address
Telephone

E-mailFAX
Application

Installation

Indoor・Outdoor

Handling
Gas

Compositionof Gas（Temperatureof Gas （）℃

Molecular
WeightOther
Characteristic）PaUltimate（Pressure）PaN2 Gas）V×（（MAX（）Hz）MPaG （）℃）Nℓ/min）Cooling（WaterMotor

Material ofO-ring）℃ （C）％ （No / Yes（Pumping） Speed

Yes / No（Material
Standard・Z・C・Others（of Casing
Three Phase（Power SupplyB）％ （Corrosivity
FlammableWorking（PressureA

Quantity

BackPressure）％）

working pressure at（）ℓ/min

AtmosphericPressure（）MPaG

Standard ・ PTFE ・ EPDM ・ Others（））MPaG Industrial Water ・ Chilled Water ・Others（）

Totally Enclosed Indoor ・ Totally Enclosed Outdoor ・ eG3 Indoor ・ eG3 Outdoor ・ d2G4 Indoor ・ d2G4 Outdoor
Preference of Maker : Yes / No（Within Quoted Scope ・ Supplied by ・None

Driving Methodof Motor

Direct on Line ・ Star-delter Drive ・ Others（）

Equipment

Light Process ・ Harsh Process ・ Liquefaction ・ Package
Others（）Paint
Speciﬁcation
SpecialAccessory
No.

）

Designation Yes / No（）

Others（）Other Requirements！ CAUTION●Depending on the handling gas, the best suitable materials and equipment shall be selected, but in such unlikely event ofcondensation, solidiﬁcation and corrosion eﬀects from the handling gas causes troubles, service charge will be required. Taiko Kikai
shall not compensate for any secondary damages caused by the vacuum pump(s).
●Precautions against Pumping Special Gases : If you want to make a request for us to repair the dry pump(s) that have pumped
special gases, please consult us in advance. Especially toxic gases (such us AsH3 , PH3 , HF)that have been pumped, customers arebasically required to dismantle the pump(s) and clean before returning to Taiko Kikai for service work.

URL https://www.taiko-kk.com● Head Ofﬁce &Factory

209-1 Shimotabuse, Tabuse-cho, Kumage-gun,Yamaguchi pref, 742-1598, JAPANTEL:81-820-52-3113〜4 FAX:81-820-53-1001 E-mail:business@taiko-kk.com● Tokyo Branch 6th Floor, ICHIGO KUDAN Building, 2-38 KandaJinbo-cho, Chiyoda-ku, Tokyo 101-0051, JAPANTEL:81-3-3221-8551 FAX:81-3-3221-8555 E-mail:tokyo-br@taiko-kk.com● Osaka Branch 8th Floor, KC Building, 3-4-7 Kawara-machi, Chuo-ku,Osaka, 541-0048, JAPANTEL:81-6-6231-6241 FAX:81-6-6222-3295 E-mail:osaka-br@taiko-kk.com
Shanghai Ofﬁce 28F/F, Times Square, No. 500 Zhangyang Road, Shanghai, 200122 CHINA
TEL:86-21-5836-8070 FAX:86-21-5836-8077 E-mail:shanghai@taiko-kk.com
TAIKO KIKAI（QINGDAO）CO.,LTD.
VACUUM PUMP SERVICE CENTER

Changbaishan Rd Shuangyuan West Liuting Street Changyang Qu,Qingdao City,Shandong Prov,CHINATEL :86-532-87718877 FAX:86-532-87716455

TAIKO
VACUUM TECH CO.,LTD.

274-8 Majeong-ri, Jiksan-eup, Seobuk-gu, Cheonan-si, Chungcheonenam-do, 331-813, KOREATEL :82-41-582-3012 FAX:82-41-582-3011

TAIKO
FLOW SOLUTION CO.,LTD.

1F, No. 122-12, Jhonghua Rd, Hsinchu lndustry park, Huku, Hsinchu 303, 27452998, TAIWANTEL :886-3-598-1721 FAX:886-3-598-1725■The sizes and speciﬁcations of the products in this catalog are subject to improvement

2019/05 FUJIMOTO