Annual Report
2023/2024

Annual Report
2023/2024

We do research for the people.
Application-orientated, innovativeand professional.
With over 500 employees, Fraunhofer IPMS develops
innovative, customer-specific solutions in the fields
of intelligent industrial solutions, medical & healthtechnologies and mobility at four sites in Dresden, Cottbus
and Erfurt.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

Our research focuses on miniaturized sensors andactuators, integrated circuits, wireless and wired data
communication, customer- and application-specific microelectro-mechanical systems (MEMS) as well as leadingedge 300 mm technologies for future applications indigital, neuromorphic and quantum computing.
As a reliable and competent research partner, we provide
our customers with complete solutions from the initialconcept and technology development to the modeland pilot production on 200 mm wafers in our own
cleanroom using qualified, industry-orientated processes.
The development of processes and materials on 300 mm
wafers completes our range of services.

Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glanceVideo „Our insitute in Dresden from above“2Annual Report
2023/2024

Foreword
Dear friends and partners of the Fraunhofer Institutefor Photonic Microsystems,
the past year was characterized by positive developments,
challenging tasks and important milestones that we havemastered together.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights

One of the most positive aspects in 2023 was undoubtedly the unbroken upward trend in the semiconductor andmicroelectronics sector, which was further strengthened
by industry expansions and new companies relocating toDresden.
The European Chips Act is also continuing to takeshape. As a contribution to this, the Research FabMicroelectronics Germany (FMD) is planning the mostcomprehensive and advanced pilot line for "Advanced
Heterogeneous System Integration" in the coming years.
We are eagerly awaiting the decision on this in mid2024. All these dynamic developments not only represent
important steps for Fraunhofer IPMS, but also make asignificant contribution to strengthening technologicalsovereignty in Germany and Europe. In this context, we
would like to draw particular attention to the strategic
importance of these advances, which further consolidate
our position as an innovation leader.

However, we also want to actively shape the future inother areas with our cutting-edge research. We pay
particular attention to the topic of climate neutrality,
including energy and resource efficiency. Fraunhofer IPMS
is also working intensively on future technologies in theGreen Microelectronics,
digital world. These include
Neuromorphic Computing andQuantum
computing.

In this context, we would also like to highlight the
progress made in construction over the past year. The
renovation of parts of our main building is an important
step towards creating a modern and efficient working
environment. At the Center Nanoelectronic Technologies,
we celebrated the topping-out ceremony for our new
office building in February 2024. We plan to move in at
the end of 2024.

The challenges of the past year, in which we had to face a
difficult financial environment due to the critical federal
budget situation and planning uncertainties, should not
go unmentioned. Rising material costs and high energy
prices have further restricted our financial scope. Despite
these conditions, we would like to emphasize that we atFraunhofer IPMS remain well positioned. Following our
extensive strategy process, our strategic plan was
positively evaluated by an external group of independent
Their statements confirm our
auditors in May 2023.
excellent work and give us the certainty that we are on
the right track.

We thank you for your loyalty as a customer, sponsor or
partner of our institute and our research. We are proudto present another successful year for Fraunhofer IPMS on
the following pages. Find out more about our innovativeideas and developments, which we successfully translate
into customized solutions for industry and society. Thankyou for your trust and continued support. Together, we
look to the future with optimism and are ready for thechallenges ahead.

Harald Schenk 			

Hubert LaknerProf. Dr. Harald Schenk
Executive Director

Prof. Dr. Hubert Lakner
Director

Fraunhofer IPMS at a glance3Annual Report 2023 / 2024

Pioneering
semiconductor
technology

Pioneering semiconductor technology

Annual Report
2023/2024

Our cleanrooms for your developments

200 mmAbout Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing

 M
EMS Technologies Dresden: 1500 m² clean room(class 4 according to ISO 14644-1)
 
Technology development through to pilot productionof innovative microsystems on 200 mm
 
Micro-electro-mechanical systems (MEMS) andmicro-opto-electro-mechanical systems (MOEMS) ideo: „From Wafer Level Test to MEMS
V
Modules“Webinar „Managing a High-Mix and LowVolume MEMS R&D Fab by Applying KPIs“
Webinar „Customized BSOI using CMOS
compatible Wafergrinder“

MEMS Technologies Dresden
Virtual clean room tour
CNBC interview with Prof. Dr. Hubert Lakner

Bio & HealthSensors & AI

300 mmDigitalization & Data Communication
Highlights
Fraunhofer IPMS at a glance 
2700 m² class 6 and 3 clean room(according to ISO 14644-1)
 D
evelopment services on 300 mm wafers
in the field of FEoL and BEoL
 Services at Ultra Large Scale Integration Level (ULSI) 
Analytics, Metrology & Characterization ideo „KLA CIP Tech M300 Metrology“VVideo „TEL Test System“
Video „ASM Eagle XP4 for ALD“
Video „Lesker PVD200 load deposition system“
Video „Quantum Design OptiCool Cryostat“Video „Wafer Prober Characterization System“

300 mm semiconductor processes
Analytics and metrology
RF characterization

5

Pioneering semiconductor technology

Annual Report
2023/2024

About Fraunhofer IPMS

Green ICT – Sustainable Microelectronics
Sustainability is playing an increasingly important role inmicroelectronics – right from the manufacturing stage. In
order to contribute to reducing the carbon footprint ofdigital technologies through research and development,
we are part of the "Green ICT @ FMD" competence
center. As coordinator of Hub 3 – resource-optimized
electronics production – we use our two cleanrooms
as references for evaluating improvement measures inelectronics production.

Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing

Overview of our Green ICT research projects
Green ICT Space of the Research FabMicroelectronics Germany (FMD) ideo "Hub 3: Ressource-optimized electronics
V
production" Talk by Marco Kircher (German withEnglish subtitles)

 ideo "Sustainability – An Obligation or an
V
Opportunity?" Discussion round with Jörg
Amelung (German with English subtitles)

Bio & HealthSensors & AI
Digitalization & Data Communication
 ideo „Green ICT Space: Accelerator forVsustainable start-ups and SMEs“ (German withEnglish subtitles)

Highlights
Fraunhofer IPMS at a glanceContact person
Jörg Amelung
Division Director Engineering,
Manufacturing & Test
+49 351 8823 - 4691
joerg.amelung@ipms.fraunhofer.de6

Pioneering semiconductor technology | Green ICT – Sustainable Microelectronics

Annual Report
2023/2024

Research Projects

Reduction of PFAS in
microelectronics

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

The group of PFAS, short for "perfluorinated andpolyfluorinated alkyl substances", is large. These
are organic compounds in which the hydrogenatoms are completely ("perfluorinated") or partially("polyfluorinated") replaced by fluorine atoms. PFAS
have water and grease repellent properties and arevery stable and durable. They are therefore widely usedin many industrial sectors and also in the household.
PFAS are also used in microelectronics production,for example as an anti-static surface on chips or tohydrophobize the chip surface.
The disadvantage: many PFAS are classified as toxic.
Once they have been released into the environment,
they are very difficult, if not impossible, to remove.
Solutions must therefore be found.

Digitalization & Data Communication

Regulation of PFAS by the EU can be countered, forexample, by retrofitting existing systems. Another way
is to replace them with chloroalkanes without fluorineat chip and wafer level.
At Fraunhofer IPMS we are conducting research on: Development of processes with harmless substances
as substitutes for e.g. PFAS
 Evaluation of processes and systems to prevent
PFAS leakage
 U
se of new, less environmentally harmful materials
without compromising product quality
 Verification through analysis, e.g. determination ofhydrophilicity
 Assessment of the long-term effects of alternative
materials

Hyperspectral imaging inspection
tool for efficient semiconductor
production
Together with DIVE imaging systems GmbH, we areworking on a joint project as part of the GreenICTSpace – the accelerator program of the "GreenICT @FMD" competence center.
The overarching aim of this project idea is to establish
hyperspectral imaging technology as a productionaccompanying screening tool for semiconductor
production. The aim is to make the semiconductor
production chain more efficient and therefore moreenvironmentally friendly.

Based on the information collected, it will be possible,
for example, to significantly reduce the number ofsystem control wafers required to date, detect andsubsequently avoid production errors at an earlier
stage, create new (wafer) designs more efficiently andoptimize production capacities overall and make more
efficient use of resources.
This significantly reduces the consumption of materials,
energy and consumables per wafer in semiconductor
production.

Project website

Project website

Highlights
Fraunhofer IPMS at a glanceContact person
Marco Kircher
Surface MEMS Acoustic+49 351 8823-361
marco.kircher@ipms.fraunhofer.de7

Pioneering semiconductor technology | Green ICT – Sustainable Microelectronics | Research Projects

Annual Report
2023/2024
Ressource- and energy-efficient
ISFET-based sensing

About Fraunhofer IPMS

The aim of the project Resource- and energy-efficient
ISFET-based sensing (REISen) is to research materialrelated methods for chemical sensors based on ISFETs(ion-sensitive field-effect transistors). These sensors areused to measure the pH value in the food sector, forexample.

Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication

The focus is on three main areas of work: 
Research into processes to replace tantalum asa sensor material for ISFETs using pH sensors as
an example. As a critical and expensive material,
tantalum is of great importance for high-performance
pH measurement technology. Although alternative
materials often do not offer the same performance,
they are sufficient for many applications and are also
cheaper. In addition, there are energy savings during
processing.
 
Research into resource-saving characterization andintegration of ISFETs. According to the state of theart, bonding processes, circuit boards and conductor
tracks made of palladium/platinum and silver alloys
are used. The aim is to avoid these processes andmaterials.
Development of resource-efficient sensor functionali zation methods: The state of the art is flat coatings
with subsequent structuring. More than 99% of thematerials used are lost in this process, as the sensoractive areas are only a few square micrometers in size.
The aim is therefore to save material by structuring
directly at wafer level using microfine dispensers. Thisnot only saves on reactive and therefore often toxic
materials, but also reduces the health burden on
workers and protects the environment.
The REISen project addresses several UN sustainability
goals: e.g. health and well-being, clean water, andclimate protection.

Project website

Substitution of NMP
N-methyl-2-pyrrolidone (NMP) has proven to be an
essential material for lift-off processes and resist
removal. This chemical enables precise structuringof thin films and cleaning of surfaces, which isparticularly important to ensure the quality andperformance of semiconductor devices.
As of 2018, NMP has been included in Annex XVII of
the REACh Regulation due to its reproductive toxicity
and irritant effect on the eyes, skin and respiratory
tract. Since May 2020, consumer products with an
NMP content of ≥ 0.3% have been banned in the EU.
We focus on the development of processes using
safer products. Our research aims to identify andexplore substitutes for NMP.

Project website

Highlights
Fraunhofer IPMS at a glanceContact person
Dr. Olaf R. Hild
Head of Business Unit Chemical Sensors+49 351 88 23-450
olaf.hild@ipms.fraunhofer.de8Pioneering semiconductor technology | Green ICT – Sustainable Microelectronics | Research Projects

Annual Report
2023/2024
Environmentally friendly
silicon oxide-based slurries for
microelectronics production

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication

In today's conventional transistor production, theindividual components are electrically separated fromeach other by deep trenches of insulating siliconoxide. A chemical mechanical planarization process(CMP) is required to adjust the dimensions of theinsulation trenches to nanometer precision. Today, apolishing suspension (slurry) based on cerium oxideabrasive particles is used for this step. As cerium isa rare earth element whose oxide is suspected ofbeing carcinogenic, Fraunhofer IPMS is conducting
tests with more environmentally friendly alternativeslurries based on silicon oxide.
As silicon oxide is removed during the manufacturing
process and the topography is adjusted with theaid of a polishing stop layer made of silicon nitride,(at least) two parameters are of central importancefor evaluating a slurry: The oxide removal should
be sufficiently high to enable a high process

throughput. A high selectivity of the removal isrequired to end the process when the polishing stop
layer is reached. The removal rate of the silica slurry isparameter-dependent and similar to one of the ceria
slurries. The target parameter of the removal rate,
to which normalization was performed, is achieved.
Ceria slurries can generally deliver significantly higher
removal rates, which means that production processes
can potentially run faster.
The comparison of the selectivity between oxide andnitride removal shows sufficiently high values for thesilica slurry.
Based on these data from wafers with a homogeneous material layer, a cerium oxide-free slurry has
recently been applied to production-like structured
300 mm wafers at Fraunhofer IPMS. The comparisonof the selectivity between oxide and nitride removal
shows sufficiently high values for the silica slurry.
Project website

Environmentally friendly cleaning
technologies in microchip
manufacturing

Many individual process steps are necessary before achip is created in microelectronics. It is always necessary
to clean wafers or remove some or all of the layers.
This is usually done using aggressive chemical cleaning
processes. Together with partners, Fraunhofer IPMS
is developing an alternative technology that is more
efficient, more cost-effective and, above all, moreenvironmentally friendly.

In contrast to conventional processes, in which, forexample, photoresists are dissolved using aggressive
solvents and sometimes toxic chemicals and thendisposed of at great expense, phase fluids infiltrate thecorresponding layers, fragment them and "lift" themoff the wafer surface without leaving any defects.
The phase fluid and the dissolved photoresist are thenrinsed off with DI water and removed without leaving
any residue.
Project website

The phase fluid-based technology sets new standards
in terms of environmental friendliness, occupationalsafety and tool compatibility and represents a major
step towards the Green Fab in semiconductor
manufacturing. In addition, process sequences can be
simplified, resulting in savings in production time andconsumables and enabling new application scenarios inprocess integration.

Highlights
Fraunhofer IPMS at a glanceContact person

More informationen on the
Dr. Wenke Weinreich
Division Director Center Nanoelectronic
Technologies+49 351 2607-3053
wenke.weinreich@ipms.fraunhofer.de

Climate strategy of the
Fraunhofer-Gesellschaft

9Pioneering semiconductor technology

Annual Report
2023/2024

Increased cooperation at European level –CEA-Leti, Fraunhofer, imec and VTT jointly
develop Edge AI technologies

About Fraunhofer IPMS

The EU's four leading research and technology organizations (RTOs) – France's CEA-Leti, Germany's FraunhoferGesellschaft, Belgium's imec and Finland's VTT – areworking together on the PREVAIL project. Launched at
the end of 2022, the project uses the RTOs' advanced
300 mm manufacturing, design and testing facilities
to develop high-performance and low-power edge AI
hardware.

Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication

In order for the industry to transfer these technologies
into commercial products and innovations as quickly
as possible, they must be further developed frombasic research towards commercial applicability andthe necessary development and pilot manufacturing
infrastructure must be established. The aim of the PREVAIL
project – "Partnership for Realization and Validation of
AI hardware Leadership" – is to offer a technologicalplatform that is capable of designing, manufacturing andtesting prototypes for advanced neuromorphic chips foredge AI applications.

The ultimate goal of the PREVAIL project is to provide
Europe with an easily accessible, advanced manufacturing
infrastructure that enables users to produce early research
prototypes of innovative and trustworthy products andaccelerate their commercialization.
In addition to providing high-performance, low-poweredge components and technologies to support themassive data processing requirements of AI, the projectwill help drive the EU's digital transformation. It is aprecursor to the objectives of the European Chips Act.

Press release "EU consortium to develop nextgeneration edge AI technologies adopts design
proposals"

Highlights
Fraunhofer IPMS at a glanceContact person
Dr. Benjamin Lilienthal-Uhlig
Head of Business Unit Next Generation
Computing+49 351 2607-3064
benjamin.lilienthal-uhlig@ipms.fraunhofer.de10Pioneering semiconductor technology

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

Bridges of Innovation: Fraunhofer IPMS and
NY CREATES strengthen cooperation
The New York Center for Research, Economic Advancement, Technology, Engineering, and Science (NY CREATES)
is one of the world's leading research and development
institutions for digital technologies, energy technologies
and microelectronics. In May 2023, Dr. Wenke Weinreich,
Deputy Director of Fraunhofer IPMS, traveled to Albany,
New York, with a Saxon delegation led by Prime Minister
Michael Kretschmer for a meeting with NY CREATES.
She signed a memorandum of understanding and said:"With our expertise and technologies in advanced
microelectronics, we ideally complement the capabilities of
NY CREATES. Together we can make significant progressin the development of future semiconductor systems".

 ideo "Fraunhofer IPMS' Wenke Weinreich:V
Why Partnerships are Critical for Semiconductor
Organizations"

The return visit took place at the end of November in
Munich and Dresden. First there was an exchange at thesemiconductor industry's leading trade fair, SEMICON
Europa. Representatives from NY CREATES then visited the
Fraunhofer IPMS in Dresden and the Silicon Saxony office.

Digitalization & Data Communication
Highlights

Press release "Bridges of Innovation: Fraunhofer
IPMS and NY CREATES strengthen cooperation"

Fraunhofer IPMS at a glance

Saxonian delegation visiting NY CREATES in May 2023.

Contact person
Dr. Wenke Weinreich
Division Director Center Nanoelectronic
Technologies+49 351 2607-3053
wenke.weinreich@ipms.fraunhofer.de11Pioneering semiconductor technology

Annual Report
2023/2024

About Fraunhofer IPMS

Strengthening scientific cooperation
with Taiwan
The establishment of TSMC in Dresden, in the heart of
Silicon Saxony, is a clear sign of increased cooperation
between Taiwan and Germany. Fraunhofer IPMS set thecourse here at an early stage: In early 2023, the instituteand TU Dresden signed concrete agreements on scientificcooperation with several universities in Taipei and Hsinchu
in Taiwan in the presence of Science Minister SebastianGemkow.

Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights

Among other things, the following agreements werereached: 
Joint research activities in the field of
microelectronics and semiconductor technologies 
Joint research activities in the field of
microelectronics and semiconductor technologies 
Exchange of teaching staff and joint lectures 
Mutual facilitation of the admission of qualified students 
Exchange of researchers Student exchange program 
Implementation of joint projects
 Conducting lectures and organizing symposia andconferences 
Exchange of academic information and materials

The conclusion of the cooperation agreement with the
National Yang Ming Chiao Tung University (NYCU) is
an important step for Fraunhofer IPMS. It gives us astrong research partner in the country that produces theworld's most advanced semiconductors. In particular,
joint research projects, publications and the exchange ofscientific personnel are planned with the International
College of Semiconductor Technology at NYCU. We areaiming for close cooperation in microelectronics research,
particularly in the area of memory development andreliability testing.
In November 2023, we welcomed a Taiwanese delegationfrom the National Taiwan University of Science andTechnology, led by the university's president, Prof. Jia-YushYen (p. 46).

Press release "Scientific cooperation with
universities in Taiwan significantly expanded"

Signing of the MoU (from left to right: Prof. Edward Yi Chang - Dean NYCU, Prof. Chen-Yi Lee - Senior Vice
President NYCU, Sebastian Gemkow - Minister of Science Saxony, Dr. Thomas Kämpfe - Fraunhofer IPMS).

Fraunhofer IPMS at a glanceContact person
Dr. Thomas KämpfeCMOS Integrated RF+49 351 2607-3215
thomas.kaempfe@ipms.fraunhofer.de

12Pioneering semiconductor technology

Annual Report
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Technology center for semiconductor
metrology on 300 mm wafers
with Applied Materials
Together with Applied Materials, Inc., we founded oneof the largest technology centers for semiconductor
metrology and process analysis in Europe in mid-2023.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

The technology center, which is based at our Center
Nanoelectronic Technologies, is located in the heartof Silicon Saxony, the largest semiconductor cluster inEurope. The technology center will be equipped withstate-of-the-art eBeam metrology equipment from
Applied Materials, including the VeritySEM® CD-SEM
system (a critical dimension scanning electron microscope),
and will be staffed by Applied Materials engineers andR&D experts.
The new technology hub will enable advanced waferlevel metrology in an industrial CMOS environment with
Fraunhofer IPMS' unique ability to exchange wafers

directly with semiconductor manufacturers. This willallow processes to be tested and qualified on a variety of
substrate materials and wafer thicknesses that are criticalfor applications in the diverse European semiconductor
landscape. These primarily include the areas of Internet ofThings, Communications, Automotive, Power and Sensors(ICAPS).

Press release "Applied Materials and Fraunhofer
IPMS establish technology center for semiconductor
metrology"
Analytics and metrology website
Webinar „300 mm Semiconductor Analytics: XPS/HAXPES Scanning Microprobe“

Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glanceContact person
Dr. Benjamin Lilienthal-Uhlig
Head of Business Unit Next Generation
Computing+49 351 2607-3064
benjamin.lilienthal-uhlig@ipms.fraunhofer.de

13

Pioneering semiconductor technology

Annual Report
2023/2024

Our role in the Silicon Saxony ecosystem
We have a long-standing partnership with Fraunhofer IPMS
in the development of MEMS sensor technology.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glance

The expertise of the Fraunhofer
team is very valuable andhelps us to design innovative
solutions and realize continuous
improvements in our products.
One concrete example of this successful collaboration is the micro loudspeakerfor consumer electronics, which Fraunhofer IPMS developed into initial functional
samples as part of a research project and which Bosch Sensortec GmbH is
now developing to market maturity. The Fraunhofer IPMS acts as areliable partner that provides us with decisive support in realizing ourgoals and further strengthening our technological leadership position.«
Robert Bosch GmbH + Bosch Sensortec GmbH

14

Annual Report 2023 / 2024

Next Generation
Technologies
Quantum Computing
Quantum Communikation
Neuromorphic Computing

Next Generation Technologies | Quantum Computing

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glance

European pilot infrastructure
for a faster market introductionof quantum technologies
The success of European start-ups and small and mediumsized enterprises (SMEs) depends to a large extent on
the efficient transfer of prototypes and pilot projects into
production. However, the pilot phase takes time andrequires significant investment in infrastructure. Thesehigh costs are a major obstacle for start-ups and SMEs toenter the highly competitive quantum technology market
early enough with their product.
The Qu-Pilot project wants to change this. The aim is toimprove the existing pilot line infrastructures in Europe,
which are mainly distributed among the research andtechnology organizations, and to enable product development loops together with the hardware industry in thefield of quantum technology in Europe. The ultimate
goal is to accelerate the market introduction of European
industrial innovations in the field of quantum technology
and to support the establishment of a trustworthy supply
chain.
Fraunhofer IPMS contributes its expertise in modern,industry-compatible CMOS semiconductor manufacturingin the 300 mm wafer standard to advance semiconductor
and superconductor platforms. This concerns, forexample, manufacturing processes such as deposition andnanostructuring or electrical characterization on a wafer
scale. A particular focus is on improving metallization
and BeoL modules. Several technological modules arebeing optimized for superconducting local and global
connections, which are essential for the integrated
excitation, control and readout of semiconductor qubits.
The ultimate goal is the demonstration of an improved
process and materials for low-loss superconducting
electrodes and the demonstration of a superconducting
BeoL module comprising at least a via and trench level.
The Qu-Pilot project consists of 21 partners from 9 countries and is funded by the European Union with 19 million
euros under the project code 101079926. The project
started in April 2023 and will run for 3.5 years.

Project website Qu-Pilot
Press release "European pilot infrastructure
for a faster market introduction of quantum
technologies"
Webinar "Advanced Technology and Hardware
for Next Generation Computing"Contact person
Dr. Benjamin Lilienthal-Uhlig
Head of Business Unit Next Generation
Computing+49 351 2607-3064
benjamin.lilienthal-uhlig@ipms.fraunhofer.de16

Next Generation Technologies | Quantum Computing

Annual Report
2023/2024

About Fraunhofer IPMS

Research projects
New materials forquantum computing

Scalable silicon qubits
for quantum computers

On the way to the quantum
processor "Made in Germany"In the MATQu project, Fraunhofer IPMS and its
partners are aiming to expand existing European
expertise in the field of materials and production
processes. The goal is to pave the way for solid-state
quantum computers in European industry.

In the QLSI project, Fraunhofer IPMS is working with
18 European partners on a silicon-based 16-qubit
chip. This lays the foundation for the industrial implementation of semiconductor quantum processors in
Europe.

Fraunhofer IPMS's focus in the project is on
bringing existing concepts and technologies fromthe laboratory to industrial production. In doing
so, we are drawing on our expertise in 300 mm
manufacturing, which already serves as the industry
standard for CMOS computing platforms.

With the Center Nanelectronic Technologies, we arecontributing a 4000 m² clean room and expertise instate-of-the-art, industry-compatible CMOS semiconductor production on 300 mm wafer standard.
This concerns, for example, manufacturing processes
for nanostructuring, but also material development
and electrical control in the CMOS area.

In the QUASAR joint project, Fraunhofer IPMS is
working with Forschungszentrum Jülich, Infineon
in Dresden and the Leibniz Institute for Innovative
Microelectronics IHP to develop scalable concepts
for quantum computing at wafer level. This creates
the basis for the industrial production of quantum
processors "Made in Germany".

Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & Health

Project website MATQu

Project website QLSIWe are using adapted processes from CMOS manufacturing. Based on its many years of experience inthe field of electron beam lithography and in close
cooperation with Infineon, we are involved in the
production of complex "Gate 1" quantum gates.
Project website QUASAR

Sensors & AI
Digitalization & Data Communication
Highlights© imecFraunhofer IPMS at a glance
Test chip with supraconducting qubits

Contact person
Dr. Benjamin Lilienthal-Uhlig
Head of Business Unit Next Generation
Computing+49 351 2607-3064
benjamin.lilienthal-uhlig@ipms.fraunhofer.de17

Next Generation Technologies | Quantum Computing | Research Projects

Annual Report
2023/2024
Quantum Computer in the
Solid State

About Fraunhofer IPMS

Together with 24 German research institutions
and companies and under the coordination of
Forschungszentrum Jülich (FZ Jülich), Fraunhofer
IPMS is working on a quantum computer withimproved error rates.

Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing

The aim is to make Germany a world leader
in the field of quantum technology and open
up numerous new applications for science andindustry. The first demonstrator will go into
operation in mid-2024.

FMD for neuromorphic andquantum computing
In order to bundle and expand the existing microelectronic R&D in Germany with regard to quantum
and neuromorphic computing, the FMD launcheda joint project with four other Fraunhofer Institutes,
Forschungszentrum Jülich and AMO GmbH: The"Research Fab Microelectronics Germany – Quantum
and Neuromorphic Computing Module". The
equipment and structural set-up required for this isbeing funded by the Federal Ministry of Education
and Research. The "QNC Space", the Deep Tech
Accelerator for research groups, start-ups and SMEs,
will also ensure that this infrastructure is widely
available for innovations from Germany.

Project website Q-Solid

Bio & Health

Project website FMD-QNC
QNC Space

Sensors & AI
Digitalization & Data Communication

Photonisc quantum computer
The photonic approach, which uses light particles(photons) as qubits, offers enormous advantages
when it comes to the necessary scaling of qubits.
This is because the functions required for the computing operations can be produced on a single chipusing sophisticated semiconductor manufacturing
processes. Fraunhofer IPMS is therefore working withpartners on a photonic quantum computer with up
to 100 qubits.

Graphic representation of a photonic quantum
computer

Fraunhofer IPMS is developing the integrated,monolithic control of the optoelectronic componentsof the photonic quantum computer as well as theassembly and connection technology. In two anda half years, the project partners want to present
an initial prototype, and in five years at the latest,
a quantum computer chip capable of performing
large-scale calculations is to be created.

Project website PhoQuant

Highlights

 ideo "Introducing Project QSolid –V
Quantum computer in the solid state"

Fraunhofer IPMS at a glanceContact person

You can find more information on our projects andhere.
technologies in the field of quantum computing

Dr. Benjamin Lilienthal-Uhlig
Head of Business Unit Next Generation
Computing+49 351 2607-3064
benjamin.lilienthal-uhlig@ipms.fraunhofer.de

For a quick and easy overview, watch ourWebinar“Advanced Technology and Hardware for Next
Generation Computing“.

18Next Generation Technologies | Quantum Communication & Quantum Cryptography

Annual Report
2023/2024

Chip-based quantum random device
Random numbers are of enormous importance in IT
security, as they are used for cryptographic processes suchas key generation and thus ensure the security of data interms of confidentiality, integrity and authenticity.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies

In the "CBQD" project funded by the BMBF, a chip isbeing developed that generates random numbers at highspeed on the basis of quantum photonic effects. The aim
is to combine a high speed of random number generation with a compact design. At the same time, the chipshould meet the requirements of Common Criteria AIS
20/31 PTG.3, a standard for security requirements for IT
products from the German Federal Office for Information
Security (BSI).

Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing

The chip is to become the basis for numerous communication systems for authorities, banks, critical infrastructure
and the Internet of Things.
The interdisciplinary team brings extensive expertise
ranging from quantum theory to security proofs, securityby-design experience for random number generators,
silicon photonics and QKD systems and their integration
into applications. Fraunhofer IPMS is responsible forproject coordination and QNRG chip integration.

 ress release "Photonic quantum chipP
for fast and reliable random number generation"
Project website CBQD – Chip-based quantum
random device

Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glanceContact person
Dr. Alexander Noack
Optical Sensors & Data Communication+49 351 8823-287
alexander.noack@ipms.fraunhofer.de19

Next Generation Technologies | Quantum Communication & Quantum Cryptography | Research projects

Annual Report
2023/2024
Secure optical data
communication by means ofquantum cryptography and LiFi

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

Modern quantum technology opens up many
new areas of application. But it also harbors
risks. For example, thanks to their enormous
computing power, quantum computers could be
able to undermine state-of-the-art data encryption
methods. To prevent this scenario, several partners
led by KEEQuant GmbH are developing a new
approach to secure optical data transmission in
wireless networks using light and quantum keys. The"QuINSiDa" project is funded by the German Federal
Ministry of Education and Research.

Quantum-secure identities fora digital future

Quantum-secure informationexchange between authorities

Compact modules forquantum communication

Access to online services and network databases isregulated by means of digital identities. Asymmetricencryption methods are used to transmit thesesecurely over the network. In the future, however,quantum computers will be able to crack theseclassic encryption methods. The BMBF-funded"Quant-ID" project aims to research end-to-end
solutions for reliable digital identities using postquantum cryptography.

Communication between national authorities
must be particularly secure. To this end, the"QuNET&FUNK" project is developing opticalcommunication systems that use quantum
cryptography as well as data transmission via freespace optical links and satellite radio. The aim ofthe development is to create compact and robust
communication nodes that are easy to use at a low
price. The project is funded by BMBF.

The "MIQUE" project is developing compact
modules for quantum key distribution (QKD) thatare suitable for mobile applications and securecommunication over short distances. The project
includes the development of modules for generating
QKD keys, detecting the signals and integratingthem into VPN environments. The project offers
great potential for innovation and is intended tostrengthen Germany's technological sovereignty inthe field of quantum communication.

Projec website Quant-ID
Press release "Quantum-secure identities fora digital future"

Project website QuNET+FuNK
Project website MiQuE ress release "Secure optical dataP
communication by means of quantum
cryptography and LiFi"
Project website QuINSiDa

Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glanceContact person
Dr. Alexander Noack
Optical Sensors & Data Communication+49 351 8823-287
alexander.noack@ipms.fraunhofer.de

All our projects andtechnologies in the field of
quantum communication
here.
can be found20

Next Generation Technologies | Neuropmorphic Computing

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuromorphic computing
Bio & HealthSensors & AI

Technology platform forneuromorphic chips
Neuromorphic computers are based on the structureof a biological nervous system. Neuromorphic systems
for edge AI applications show enormous potential inpattern recognition, analysis and prediction and havegreat potential in areas such as medical diagnostics or
the recognition of speech patterns and promise to enable
these extraordinary performances with the lowest possibleenergy requirements compared to today's architectures.

In the project, four Fraunhofer institutes – in addition to
the coordinator Fraunhofer IPMS, these are the institutes IZM, IIS and EMFT – are contributing their advanced
300 mm manufacturing, design and testing capabilities.
The aim is to create a "Hardware for Edge AI" platform
for 300 mm technology. This is to be expanded in thelong term in collaboration with CEA-Leti, imec and VTT,the leading European research organizations (RTOs).

In order for industry to transfer these technologies into
commercial products and innovations as quickly as
possible, they must be developed from basic research
towards commercial applicability, and the necessary
development and pilot production infrastructure must be
established. The aim of the PREVAIL project ("Partnershipfor Realization and Validation of AI hardware Leadership")is to offer a technological platform that is capable ofdesigning, manufacturing and testing prototypes foradvanced neuromorphic chips for edge AI applications.

The PREVAIL project is co-financed by the European
Union and the German Federal Ministry of Education andResearch (BMBF) under the funding code 16ME0834.

 roject website PREVAILPWebinar "Neuromorphic Computing for Edge AI"

Not only computing power, butalso energy efficiency is amajor issue with chips for next
generation computing.«

Digitalization & Data Communication
Dr. Wenke WeinreichHighlights
Fraunhofer IPMS at a glanceContact person
Dr. Benjamin Lilienthal-Uhlig
Head of Business Unit Next Generation
Computing+49 351 2607-3064
benjamin.lilienthal-uhlig@ipms.fraunhofer.de21

Next Generation Technologies | Neuropmorphic Computing | Research Projects

Annual Report
2023/2024
Sensors learn to think

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies

Autonomous robots are equipped with sensors
and electronics in order to perceive theirsurroundings and to cope with unforeseen situations
independently. This is accompanied by a significant
increase in energy consumption. That is why in the
NeurOSmart project, Fraunhofer IPMS is working
with four other institutes to develop a neuromorphic
in-memory accelerator that is tailored to therespective sensor. The human brain serves as amodel here.
Project website NeurOSmart

Quantum Computing
Quantum Computing & Quantum Cryptography
Neuromorphic computing

Novel materials for
Neuromorphic Computing

Sensor Edge Cloud forFederated Learning

Various hardware approaches are being discussed
for the implementation of neuromorphic computing.
In the ANDANTE project, we are using ferroelectricfield-effect transistors (FeFETs) as the ideal synapse.
These are characterized by a very high dynamic
range as well as very low propagation delay. Thismeans that the signals from the pre-neuron canbe transmitted quickly and with very low loss andcollected in the post-neuron. In addition, thesecan be installed in a chip alongside standard logictransistors, which enables a scalable edge AI
accelerator.

In the SEC-Learn project, Fraunhofer IPMS andten other Fraunhofer Institutes are researching
the development of a neuromorphic computing
architecture for federated learning. Federated
learning refers to an approach in which AI
algorithms are trained in such a way that data isstored in a distributed manner on multiple devices orservers. In contrast to classic cloud-based machinelearning, the advantage is that sensitive dataremains in local systems. The platform developedin the SEC-Learn project will also use neuromorphic
hardware accelerators that consume several orders ofmagnitude less power.

Memristive transistors
for neuromorphic computerarchitectures
The most important basic elements of aneuromorphic computing system are electronic
synapses. Neuromorphic architectures basedon resistive memories (RRAM) are considered
to be particularly promising. Significantly higher
information densities can be achieved here thanks
to the multi-level switching properties. In the
MEMION project, Fraunhofer IPMS is producing andcharacterizing a lithium-based synaptic transistor
using semiconductor technology processes.
Project website MEMION

Project website AndanteProject website SEC-Learn

Bio & Healthfunded by

Sensors & AI

funded byDigitalization & Data Communication
Highlights
Fraunhofer IPMS at a glanceContact person

All our projects and technologies in the field of Neuromorphic
here.
Computing can be found

Dr. Thomas KämpfeCMOS Integrated RF+49 351 2607-3215
thomas.kaempfe@ipms.fraunhofer.de

For a quick and easy overview, watch ourromorphic Computing for Edge AI".

Webinar "Neu-22

Annual report 2023 / 2024

Bio & HealthBio & Health

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glance

Early detection of deep vein thrombosis
with ultrasound
Deep vein thrombosis (DVT) and its fatal complication,
pulmonary embolism, affect millions of people worldwide
and account for a large percentage of acute hospitalizations. In DVT, a blood clot forms in the deep veins, usuallyin the lower limbs, which obstructs blood flow. In 50%
of people with deep vein thrombosis, the clot eventually detaches from the vein wall and travels to the lungs,
where it causes a pulmonary embolism. Around 25% of
people who suffer a pulmonary embolism die as a result.
This makes pulmonary embolism the third most common
cause of cardiovascular death worldwide after stroke andheart attack. The clinical diagnosis of DVT has so far beenvery unreliable, as up to two thirds of DVT episodes areclinically inconspicuous and those affected are symptomfree even if a pulmonary embolism has developed.
Early diagnosis of DVT is crucial and has been shown toprevent life-threatening complications, minimize the riskof long-term complications (post-thrombotic syndrome,recurrent DVT), improve treatment outcomes and reduce
healthcare costs. The ThrombUS+ project brings together
an interdisciplinary team of experts from industry, technology, social sciences and clinical trials to develop a novel
wearable device for continuous, user-independent monitoring of people at high risk of thrombosis.

Together with VERMON, Fraunhofer IPMS is developing
the ultrasonic transducer array for portable, continuous
monitoring of deep vein thrombosis directly on site. We
are focusing on our CMUTs (Capacitive Micromachined
Ultrasonic Transducers), MEMS-based ultrasonic transducers, which are considered the next generation of
medical ultrasound sensors. CMUTs can be manufactured
at low cost due to high volume production. In addition,
the advantages such as miniaturization with a highnumber of channels, high bandwidth in combination withhigh sensitivity enable the development of a completely
new system.
The ThrombUS+ project is Funded by theEuropean Union under the funding code
HORIZON-HLTH-2023-TOOL-05-101137227.

Project website ThrombUS+
Video „How Do Micromachined UltrasoundTransducers (MUT) Work?“
Capacitive micromachaned ultrasoundtransducers (CMUT)
Webinar: Capacitive micromachined ultrasonictransducer (CMUT) – from concept to device

Contact person
Marco Kircher
Surface MEMS Acoustic+49 351 8823-361
marco.kircher@ipms.fraunhofer.de24

Bio & Health

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

Qualified microscanners forcustomer-specific applications in medicine
The potential of microscanners in medical technology isimmense. They impress with their low volume and weight
as well as their high energy efficiency, which enables
mobile use. In order to meet customer-specific requirements, more than 200 different microscanner designs
have already been developed at Fraunhofer IPMS. The
range of services extends along the entire value chain,from design and prototype development through to pilot
production in our own clean room on 8" wafers.
Fraunhofer IPMS is continuously expanding the range ofapplications for scanner mirror technology with innovativeand patented design solutions and technology modules,
as well as the integration of artificial intelligence (AI).

 ress release "Qualified microscanners forP
customer-specific applications in medicine"
MEMS scanners website

Virtual Showroom „MEMS Mirror Technologies“

Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glanceContact person
Dr. Jan Grahmann
Head of Business Unit Active
Microoptical Components & Systems+49 351 8823 - 349
jan.grahmann@ipms.fraunhofer.de25

Bio & Health

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights

Else Kröner Fresenius Center for
Digital Health: Promoting research.
Helping people.
The Else Kröner-Fresenius Center for Digital Health(EKFZ) is a joint cross-faculty initiative of TU Dresden,
the University Hospital Carl Gustav Carus Dresden, five
Fraunhofer Institutes – including Fraunhofer IPMS – aswell as the Leibnitz Institute for Polymer Research andthe Helmholtz-Zentrum Dresden-Rossendorf. The aim
is to bring innovative, digital medical technologies fromthe laboratory to patients. In the HybridEcho project,
Fraunhofer IPMS is researching how to drastically improvemedical imaging thanks to the use of highly sensitive
MEMS-based ultrasound transducers.
In the project, capacitive ultrasonic transducers, so-called
CMUTs – which offer high sensitivity and thus goodresolution – are to be coupled with modern transmission
and reception technologies, as known from 5G mobile
communications. Integration into an overall system has
the potential to drastically increase image quality, enablingnovel applications such as transcranial ultrasound of
cerebral hemorrhages or efficient tumor screening of thesmallest lesions.

 ideo: Innovation Project "HybridEcho"
VCapacitive micromachined ultrasound transducers(CMUT) website

Fraunhofer IPMS at a glanceContact person
Marco Kircher
Surface MEMS Acoustics+49 351 8823 - 361
marco.kircher@ipms.fraunhofer.de26

Bio & Health

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glance

Early disease detection in body fluidswith photonic biosensors
Standard medical procedures are time-consuming andoften do not take into account individual differences
between patients, leading to potential consequences fortreatment outcomes and quality of life. To address thisproblem, Fraunhofer IPMS, in collaboration with partner
institutes Fraunhofer IZI and Fraunhofer IOF at the Fraunhofer Center Erfurt, is developing disposable biosensors
with extensive multiplexing capabilities that deliver rapid
results. These biosensors enable early disease detection,
personalized medicine and precision medicine, which has
the potential to significantly improve healthcare outcomes.
The photonic biosensor chips are developed at Fraunhofer
IPMS on a silicon nitride waveguide platform technology.
These biosensors consist of specially developed, scalable
on-chip multi-channel microring resonator architectures ofcurrently up to 16 sensors operating at a wavelength of1550 nm. Further designs are currently being developed
towards the visible range based on microring resonatorsand Mach-Zehnder interferometers. The detection method
is based on special bioassays developed by the partner
institute Fraunhofer IZI, in which antigen molecules bind
specifically to functionalized sensor surfaces. If binding is
successful, a resonance wavelength shift is read out in thetransmission spectra of the device. These biosensors arehighly sensitive in detecting biomolecules in liquids, whichmakes them useful for the early detection of diseases inbody fluids.

The research team's approach is multidisciplinary. Thisapproach includes the development of sensor chips,
bioassays, biocomponents, surface functionalization,
microfluidics and system integration. By considering allthese aspects, the team strives for optimal performanceand reliability of the biosensor system.
The research team has successfully developed ademonstrator based on a multi-channel silicon nitride
microring resonator biosensor system. This system enables
the multiplex detection of specific miRNA biomarkers
associated with neurodegenerative diseases in liquids. The
detection is performed via DNA-based capture molecules
immobilized on the sensor surface. The developed
sensors and the integrated system are versatile and canbe adapted for the detection of nucleic acids, various
pathogenic biomarkers, viruses or bacteria in different
liquids.
The next development phase involves collaboration withdiagnostics companies and clinics to further advance thedevelopment of biosensors for relevant biomedical applications. The aim is to realize the practical implementationof these biosensors in healthcare facilities.
Biosensors website
Webinar „Optical and Electrical Microsystems for
Advanced Biomedical Imaging and Diagnosis“

Contact person
Dr. Florenta Costache
Systems & Packaging+49 351 8823-259
florenta.costache@ipms.fraunhofer.de27

Bio & Health | Research projects

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword

Research projects
LSC Onco: Laser scanningmicroscope improves detection oftumor cells

Spirometer: Early detection of
diseases using ultrasound breath
analysis

Distinguishing between tumors and healthy tissue during
a surgical procedure is of great importance, but can bea challenge. As part of the Fraunhofer Center Erfurt, wehave developed a novel, MEMS-based confocal laser
scanning microscope for this purpose together with
Fraunhofer IZI.

Early detection of severe disease progression, for example
in respiratory diseases, strongly improves the chancesof recovery. By recording physical parameters suchas respiratory rate and volume, signs of illness can bedetected earlier than usual and, above all, non-invasively
and therefore particularly gently. Fraunhofer IPMS hasdeveloped an ultrasound-based spirometer for exactly
this purpose.

Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glance ideo: MEMS-based laser scanning microscopyVfor improved cancer cell detection
Medical imaging website

Video: How Do Micromachined Ultrasound Transducers (MUT) Work?
Capacitive micromachaned ultrasoundtransducers (CMUT)
Webinar: Capacitive micromachined ultrasonictransducer (CMUT) – from concept to device

Contact person

Contact person

Dr. Peter Reinig
Memory Technologies+49 351 8823 - 103
peter.reinig@ipms.fraunhofer.de

Björn Betz
Group Manager Surface MEMS
Acoustic+49 351 8823 - 4656
bjoern.betz@ipms.fraunhofer.de28

Bio & Health | Research projects

You can find all our projects and technologies in thehere.
field of medical technology
Our
Webinar "Smart Systems for Medical and
Health" will give you a quick overview of our research.

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword

IMS respiratory gas analysis –detecting diseases in the air webreatheTargeted illumination of biomedical
samples to reduce light-induced
damageVarious diseases change the metabolism in the body. Thiscan often be detected by volatile organic compounds(VOCs) in the air we breathe. The Fraunhofer Center Erfurt
is developing a silicon-based chip as the basis for an ion
mobility spectrometer that can detect typical VOCs for the
early detection of diseases.

In light microscopy, permanent illumination with arelatively high brightness causes damage to biomedical
samples due to the light radiation. In order to reduce thisphototoxic effect, the illumination must be selective andlimited to the area to be examined. The Fraunhofer Center
Erfurt is developing optical modules for high-resolution
microscopy that can selectively control the incident light.

Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing

 ebsite: Respiratory air analysis – applications
Wfor biotechnology and medical technology
Webinar: Multimodal, Modular and Mobile
Sensor System for Improved Patient Monitoring

Bio & Health ebinar: Optical and Electrical Microsystems forW
Advanced Biomedical Imaging and Diagnosis
Website: Structured illumination for microscopy:
targeted illumination of biomedical samples toreduce light-induced damage
Video: Structured Illumination for Microscopy

Sensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glanceContact person

Contact person

Dr. Alexander Graf
Gas Sensors and Systems+49 351 8823-  247alexander.graf@
ipms.fraunhofer.de

Dr. Michael Scholles
Business Development+49 361 66338-151
michael.scholles@ipms.fraunhofer.de29

Annual Report 2023 / 2024

Sensors & AI

Sensors & AI

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication

OASYS – Optoelectronic sensors
for application-oriented systems for life
sciences and intelligent manufacturing
As the sensory organs of digitalization, sensors form thebasis for smart solutions in the commercial and private
sectors – from the optimization of agricultural andindustrial production, the intelligent design of mobility
concepts and urban planning to home automation andthe personalization and decentralization of medical care.
The OASYS project is researching the (further)development of MEMS-based technologies for imaging
processes that not only offer new possibilities andfunctionalities for image acquisition compared topreviously available solutions, but are also compact,
mobile and extremely energy-efficient and deliver reliable
results even under challenging environmental conditions.

across state borders and cooperates with regional
companies. The best conditions for a strong innovation
ecosystem in Lusatia: the solutions and ideas developed
here should help small and medium-sized companies on
their way into the digital future and create more highly
qualified jobs in Lusatia. There were already many goodreasons to settle in Lusatia before. As of today, there isone more."
In addition to Fraunhofer IPMS, the project consortium
includes BTU Cottbus-Senftenberg and the Leibniz
Institutes FBH and IHP. The BMBF is funding the project
over a period of five years with 12.5 million euros as partof the Coal Structural Strengthening Act.

At the kick-off in December 2023, Manja Schüle, Ministerof Science, Research and Culture (MWFK) of the State of
Brandenburg, said: "The research consortium pools theexpertise of several scientific institutions, works together

Highlights
Fraunhofer IPMS at a glanceContact person
Prof. Dr. Harald Schenk
Institute Director+49 351 8823-154
harald.schenk@ipms.fraunhofer.de

Dr. Andreas Berns (VDI/VDE Innovation + Technik GmbH), Prof. Dr. Günther Tränkle (Leibniz FBH),
Prof. Dr. Gerhard Kahmen (Leibniz IHP), Dr. Manja Schüle (MfWK Brandenburg), Prof. Dr. Harald Schenk (Fraunhofer
IPMS), Prof. Dr. Michael Hübner (Vice President for Research at BTU Cottbus-Senftenberg), Prof. Dr. Matthias Beller(Vice President of the Leibniz-Gemeinschaft, Director of LIKAT), Gerhard Kast (CEO of UP Umweltanalytische Produkte
GmbH; OASYS praxis partner)

31

Sensors & AI

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glance

Checking items of clothing using asmartphone, AI and infrared spectroscopy
Fraunhofer IPMS has developed an ultra-compact nearinfrared spectrometer that is suitable for analyzing andidentifying textiles. The combination of imaging, special
AI algorithms (artificial intelligence) and spectroscopymeans that even mixed fabrics can be reliably identified.
The technology could optimize the recycling of usedclothing and enable used clothing to be separated by
type. An extremely miniaturized version of the systemeven fits into smartphones. This could open up numerous
new applications for consumers in everyday life – fromchecking clothes when shopping to checking forcounterfeits.
The first step is to take a picture of the item of clothing
using a conventional camera module. From the image
information of the textile fabric, the AI selects a concise
point to be examined by the spectral analysis module.
The spectrometric profile of the textile fabric is comparedwith a reference database to determine which fibers are
involved. The optical resolution is 10 nanometers. Thanks
to the high resolution, the NIR spectrometer can also
determine mixed fabrics such as polyester and cotton
garments with the help of AI. With a surface area of 10
x 10 and a height of 6.5 millimetres, the system is socompact that it could easily be integrated into a standard
smartphone.

 ress release "Checking clothes with a smartP
phone, AI and infrared spectroscopy"
Website: Near-infrared spectrometers

Video: How Does NIR Spectroscopy Work?

Contact person
Dr. Heinrich Grüger
Sensory Micromodules+49 351 8823-155
heinrich.grueger@ipms.fraunhofer.de

32

Sensors & AI

Annual Report
2023/2024

About Fraunhofer IPMS

Chemical sensor technology
for food analysis
Damage to health could be avoided and inferior productquality detected if sensitive, selective on-site analysis
adapted to the application was available. With thetechnologies available today, this is not yet available
with the required speed, precision and user-friendliness.
Fraunhofer IPMS is therefore researching a mobile gas
chromatography (GC) system that is fast, easy to use,
robust and inexpensive.

Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication

It is used to analyze so-called VOCs – volatile organic
compounds. VOCs are chemical compounds that arecharacteristic of a certain composition or health hazard.
The detection, identification and quantification of VOCs
is of great importance in many areas. These include,for example, food quality / safety, medical markers, civil
security, agriculture, etc.
In the project, two application-specific demonstrators for
VOC detection are being developed and demonstrated
in two industry-relevant key applications. One is theidentification of counterfeit food, for example olive oil.
The second application is plastics recycling.

Highlights
Fraunhofer IPMS at a glance roject: Pummel – Point of Use MicroP
Multichannel-Gas-ChromatographContact person
Dr. Olaf Rüdiger Hild
Head of Business Unit Chemical Sensors+49 351 8823 - 450
olaf.hild@ipms.fraunhofer.de33

Sensors & AI | Research projects
You can find all of our projects and technologies in thewebsite.
field of sensing on our

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword

Research projects
AI-powered microsensors andactuators for gesture recognition

Predictive maintenance using AIpowered sensors

Digital helpers – such as smart apps or smart cars – arealready firmly integrated into everyday life. However, Datais currently mostly processed on large, external servers.
Embedded artificial intelligence (edge AI) aims to change
this and enable Data and algorithms to be processed
directly on the end device. Fraunhofer IPMS is therefore
researching innovative solutions to integrate machinelearning algorithms into everyday devices.

Machine damage and breakdowns are often associatedwith high costs and usually lead to considerable
economic losses. Conventional methods of machinemonitoring are limited to the detection of damage thathas already occurred and the prevention of consequential
damage based on a few measured variables and simple
characteristics.

Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing

Why not find out mor about our ultrasound sensors?
Webinar „Low frequency MEMS
Watch ourultrasound transducers“.

 ensor- and actuator-based
Ssignal pre-processing using AI

Predictive sensor technology that detects damage before
it occurs would be desirable. Fraunhofer IPMS is therefore
researching smart, MEMS-based sensors with AI-powered
Data evaluation for predictive maintenance.

 ress release: RISC-V processor core fromP
Fraunhofer IPMS now Edge AI-readyVideo: Edge AI solutions for predictive
maintenanceBio & HealthSensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glanceContact person

Contact person

Jörg Amelung
Division Director Engineering,
Manufacturing & Test
+49 351 8823 - 4691
joerg.amelung@ipms.fraunhofer.de

Dr. Marcel Jongmanns
Monolithically integrated actuatorand sensor systems+49 355 69-3161
marcel.jongmanns@ipms.fraunhofer.de34

Annual Report 2023 / 2024

Digitalization &Data Communication

Digitalization & Data Communication

Annual Report
2023/2024

Flexibility, longevity and security –RISC-V conquers the processor market
The open-source instruction architecture called "Reduced
Instruction Set Computer V" (RISC-V) was designed withthe aim of focusing on energy efficiency as well as computing power for new designs. This enables small, energyefficient and high-performance processors.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum Cryptography
Neuropmorphic Computing
Bio & Health

The accessibility of RISC-V has triggered a revolution and,thanks to its open architecture, enables developers todesign processors that are tailored to specific requirements. Fraunhofer IPMS also offers a processor IP basedon the RISC-V instruction architecture.
The EMSA5 is a 32-bit processor with a five-stage pipelinethat is used both in embedded systems and in functional safety applications such as in the automotive sector.
For the latter, the IP core has ASIL D ready certification inaccordance with ISO 26262.

Sensors & AI
Digitalization & Data Communication

Whitepaper

Highlights
Fraunhofer IPMS at a glanceContact person
Monika Beck
Technology Transfer+49 351 8823-274
monika.beck@ipms.fraunhofer.de36

Digitalization & Data Communication

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights

New controller IP-Corefor enhanced data security
Data security is one of the most important issues intoday's digital age. Increasing system attacks andcybercrime make it necessary to secure data in new ways.
Fraunhofer IPMS has therefore developed the MACsec
Controller IP-Core, which implements the latest Ethernet
security standards. It ensures the authentication, integrityand encryption of data between different nodes of a Local
Area Network (LAN).
The latest controller IP-Core Media Access Control Security(MACsec) implements the Layer 2 security standard
specified in IEEE 802.1AE. MACsec protects Ethernet
connections at the second layer of the OSI model byusing a combination of authentication, encryption andintegrity protection to ensure that only authorized nodes
communicate on the network, traffic remains confidential
and data integrity is maintained.
MACsec can be used with the Fraunhofer IPMS LLEMAC
IP core, any other Ethernet MAC IP core and in standalone
mode. Thanks to its platform independence, simple
system integration is possible so that the MACsec can be
integrated into any FGPA or ASIC.

Fraunhofer IPMS at a glance
Press release
Whitepaper
Contact person
Monika Beck
Technology Transfer+49 351 8823-274
monika.beck@ipms.fraunhofer.de37

Digitalization & Data Communication

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights

Fraunhofer IPMS is driving the revolution
in vehicle architecture
The vehicles of the future will be automated andconnected in order to move autonomously in road traffic
and relieve the burden on drivers. This requires new
vehicle architectures and high-performance components.
With its expertise in Automotive Ethernet TSN, Fraunhofer
IPMS is supporting various research projects in which
TSN components are being developed to meet future
requirements.
In the "Verano" project, the focus is on the development
of distributed and efficient data processing using AI
methods. The aim is to optimally distribute the computing
load and develop an AI-controlled radar sensor network
using sustainable communication technologies.
The "CECAS" research project is developing an
automotive supercomputing platform for automateddriving. The consortium is designing processors, interfaces
and system architectures for this purpose.
Whitepaper
Press release

Fraunhofer IPMS at a glanceContact person
Monika Beck
Technology Transfer+49 351 8823-274
monika.beck@ipms.fraunhofer.de38

Digitalization & Data Communication

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights
Fraunhofer IPMS at a glance

Microtechnology conquers spacefor more precise earth observation
Earth observations are becoming increasingly important
for a better understanding of our planet. However, thecollection and processing of data from space still face
obstacles. It takes a long time, sometimes even several
days, to obtain information. Additionally, the images
only provide rough details of about one kilometer in size.
Capturing the invisible part of light is very challenging
with current technologies.
A solution is provided by new optical systems with spatial
light modulators (SLM). They capture data from space withhigh resolution and have been developed and tested in
the EU project SURPRISE.
In the three-and-a-half-year project, which was completed
in June 2023, an SLM of the current technology generation from Fraunhofer IPMS successfully underwent a test
under space conditions. The 256 x 256 pixel device was
evaluated for temperature (from -40 °C to 80 °C), vacuum(< 10 -5 mbar), and vibrations in the X, Y, and Z axes. Not asingle pixel failed.
These experimental findings, together with the simulation
results, confirm the robustness of the spatial light modulators from Fraunhofer IPMS and encourage further activities
for the development of SLM technology for space.

 ideo: SURPRISE – Spatial Light Modulators
Vfor Space Applications
Video: SURPRISE4Kids – Micro-mirrors
Webinar: Fraunhofer IPMS Micro Mirror Arrays– Versatile Spatial Light Modulation
Webinar: Manufacturing Process Challenges for
MEMS Based Holography SLM Devices

Contact person
Sara Francés González
Light modulator product development+49 351 8823-472
sara.frances-gonzalez@ipms.fraunhofer.de39

Digitalization & Data Communication

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing

Novel devices forincreased hardware security
To ensure that electronic products have not undergone
any unauthorized modifications, it is desirable toincorporate encrypted identifications (IDs) or encrypted
operation logs into the electronic circuits. For example, toensure the mileage of vehicles or to verify/secure paymenttransfers using credit cards. However, the challenge isincreasingly arising that these security elements can bebypassed either through software-based methods orhardware reverse engineering.
The goal is therefore to create a solution that is reliable,
secure, and cost-effective. The two currently establishedapproaches, databases and security chips (HSM chips), canbe manipulated or hacked. Therefore, Fraunhofer IPMS is
researching novel components that enable more secure
hardware obfuscation.

Bio & HealthSensors & AI
Digitalization & Data Communication

These components can selectively change theirferroelectric behavior through a process called FieldInduced Nucleation of Crystals (FINK). Unlike electrons inflash devices, the ferroelectric polarization cannot be readout, allowing for multidimensional concealment.

Highlights
Fraunhofer IPMS at a glanceContact person
Dr. Maximilian Lederer
Emerging Memory Solutions+49 351 2607 - 3009
maximilian.lederer@ipms.fraunhofer.de40

Digitalization & Data Communication

Annual Report
2023/2024

DNA as a future
mass data storage device
DNA is known as the fundamental medium for storing
genomic information. However, DNA can also be used forstoring (binary) data – a future technology that is currently
being explored in basic research in Europe.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Data Communication
Highlights

Within the project "Modular high-throughput microplatform for future mass data storage based onsynthetic biology," funded by an internal program of the
Fraunhofer-Gesellschaft, a novel microchip platform for
efficient cell-free and digitally controllable biosynthesis isbeing developed.
Fraunhofer IPMS, along with three other institutes,
is conducting research on the foundations for future
mass data storage with extremely high storage density.
The microchip platform to be developed for writing
software-defined nucleotide sequences (e.g., DNA,
RNA, or peptides) aims to enable the high-throughput
production of mass data storage through replication in
the microelectronics industry's mass production processes.
By miniaturizing the current space-consuming synthesis
devices into portable, energy-efficient, and cost-effective
systems, the platform aims to enable commercial, biologybased data storage.

Fraunhofer IPMS at a glanceContact person
Dr. Sandro Koch
Head of Business Unit
Acoustic Sensors and Systems+49 351 8823 - 239
sandro.koch@ipms.fraunhofer.de41

Annual Report 2023 / 2024

Highlights

Highlights

Annual Report
2023/2024

AwardsDresden Excellence Award

Alfred Kuhlenkamp Prize

Congratulations to Dr. Thomas Kämpfe for being awarded
the Dresden Excellence Award on March 11, 2023, for his
habilitation "Electron Devices Based on Ferroelectric Hafnium Oxide Thin Films".

Dr. Maximilian Lederer wasawarded the Alfred Kuhlenkamp
Prize by the VDE GMM (Society for
Microelectronics, Microsystems,
and Precision Engineering) for his"Material Developwork on
ment of Doped Hafnium Oxide
for Non-Volatile Ferroelectric
Memory". This is the highest
distinction awarded by the GMM toyoung scientists.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing

Best Paper Award
Hanying Wen received the Best
Paper Award at the 46th International Spring Seminar on Electronics
Technology (ISSE) for her paper"Characterization of AlSiCu/
TiN/p-Si Schottky Contacts with
Nanophotonic Structures for
Near-Infrared Photodetectors".

Bio & HealthSensors & AI
Digitalization & Communication
Highlights© Fraunhofer / Mark Müller

Joseph vonFraunhofer
Prize 2023

In-ear headphones that are wirelessly inserted into the ear
canal could potentially replace smartphones in the future.
The foundation for this is being laid by a research teamfrom Fraunhofer IPMS and Bosch Sensortec GmbH with anovel technology for integrated microspeakers – and they
were awarded the Joseph-von-Fraunhofer Prize, whichcomes with a prize money of € 50,000.
Press release

Fraunhofer IPMS at a glance© Jürgen Männel

43© Fraunhofer / Mark Müller

Highlights

Annual Report
2023/2024

Fairs & Events 2023

June 30, Dresden
Every year, it is a great pleasure for us to introduce theDresden public to our research. In 2023, we showcaseda selection of technologies in the foyer of the Technical
University of Dresden. Our program was complemented
by a series of exciting lectures and a career speed dating
event.
Photonix

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing

Photonics West
January 31 – February 2, San Francisco, USA

Embedded World
March 14 – 16, Nuremberg

Sensor+Test
May 9 – 11, Nuremberg

We presented our latest developments in areas suchas microoptics, MEMS-based light modulators, andbiophotonics.

In Nuremberg, we showcased the latest developmentsfrom our extensive portfolio of IP cores for FPGAs and
ASICs.

We showcased our range of sensory technologies,
including ultrasound, optical, and chemical sensing. The
High Performance Center Micro/Nano and the iCampµs
were also represented.

OFC
March 5 – 9, San Diego, USA

Girls‘ Day
April 27LASER World of Photonics
June 27 – 30, Munich

At the joint booth of Berlin Partner at OFC in San Diego
2023, we presented optical actuators for fiber optic
systems.

On Girls' Day, female students from the fifth grade
onwards had the opportunity to immerse themselves in
the world of microelectronics at Fraunhofer IPMS. We arelooking forward to welcoming more visitors next year!

We presented the latest developments in the field of
micro mirrors and spatial light modulators. The Fraunhofer
Center Erfurt was also present, showcasing research
results in the field of medical technology.

Bio & HealthSensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance44

Highlights | Fairs & events

Annual Report
2023/2024

MST Congress
October 23 – 25, Dresden

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing

Photonix
October 4 – 6, Tokyo
In Tokyo, everything revolved around our spatial light
modulators for high-precision steering, control, andshaping of light.

Bio & HealthSensors & AI

Semicon EU
November 14 – 17, München
At the Silicon Saxony joint booth, there was a comprehensive display of the 200 and 300 mm technologies ofFraunhofer IPMS, with a particular focus on Green ICT in
microelectronics manufacturing.

In 2023, the MST Congress focused on sustainability andtechnological sovereignty. Prof. Hubert Lakner, Institute
Director of Fraunhofer IPMS, served as the chair of
the conference. In addition to numerous presentations
and posters on current technology developments, we
also organized a barcamp for the first time, allowing
participants to exchange ideas and network on current
topics in microelectronics. There was also a moderated
panel discussion on best practices in talent recruitment.
At the joint booth of the Research Fab Microelectronics
Germany (FMD), Fraunhofer IPMS presented a new
demonstrator for two-photon lithography as well
as ion mobility spectroscopy. The High Performance
Center Micro/Nano and the iCampµs Cottbus were alsopresent.
MedicaDigitalization & Communication
Highlights
Fraunhofer IPMS at a glance

MedicaNovember 13 – 16, Düsseldorf
At the Fraunhofer joint booth, we presented our latest
developments in biosensors, medical imaging, and breathgas analysis.

45

Highlights

Annual Report
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GuestsAbout Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing

Sonotec
March 2023

A visit from down underJuly 2023

Ascent+ Research Accelerator Day
October 2023

Brazilian delegation
November 2023

During the visit, we discussed plans for joint publicprojects in the field of MEMS devices, and of course, atour of the institute was an essential part of the visit.

Maria Antico from the Australian research institute CSIRO
and Davide Fontanarosa from the Queensland Universityof Technology visited us to discuss collaboration in thefield of MEMS.

As part of the European project Ascent+, a groupof international students and researchers had theopportunity to gain insights into our 300 mm research.

In November 2023, we had the pleasure of hostinga Brazilian delegation from the Ministry of Science,
Technology, and Innovation, the Ministry of Industry, andthe Eldorado Institute.

European delegation
June 2023

Wissenschaftsminister Sebastian Gemkow
September 2023

Taiwanese delegation
November 2023

Belgian royal couple at X-FAB
December 2023

In June, we were delighted to welcome a 33-member
delegation from Sweden, Austria, Poland, France, Belgium,
Spain, and Lithuania as part of the Silicon Saxony Days &Excite Project in Dresden.

As part of the Spin2030 campaign, the Saxon Minister
for Science visited our Center for Nanoelectronic
Technologies, which is the largest German research center
for applied microelectronics research based on 300 mm
wafer industry-standard equipment.

As part of the enhanced collaboration with Taiwan, wewelcomed a Taiwanese delegation from the National
Taiwan University of Science and Technology, led by theuniversity's president, Prof. Jia-Yush Yen.

During the visit of the Belgian royal couple with President
Steinmeier at X-FAB, our institute director Prof. Harald
Schenk presented details about the German-Belgiancollaboration in the semiconductor field and the ongoing
research activities.

Bio & Health© Pawel Sosnowski(Courtesy of Saxony State Chancellery)

Sensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance46

Highlights

Annual Report
2023/2024

Showroom
In the virtual showroom, you can experience ourtechnologies interactively and in 3D. Take a look aroundand discover our demonstrators and application videos.
Enjoy exploring!
www.showroom.leistungszentrum-mikronano.de

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance47

Highlights

Annual Report
2023/2024

360° cleanroom tour
Many people have heard of a cleanroom, but far fewer
have actually visited one. However, that can now change
for all interested individuals with the virtual cleanroom
tour offered by Fraunhofer IPMS. With just a click of themouse, you can access the foyer, the changing room, andfinally, the cleanroom, where you can explore the facilities
and processes.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

Why is it necessary to change clothes before entering
the cleanroom? How does one pass through the airlock?
What happens in the lithography area? And what kindof equipment does Fraunhofer IPMS have for 200 mm
technology?
If you are curious, there is a quick and easy answer tothese questions: Start the virtual cleanroom tour andfind out! In the various areas, you will find plenty of
information about the equipment and technologies ofFraunhofer IPMS. If you prefer to "dive in" for a more
immersive experience, you may have the opportunity toparticipate in a physical cleanroom tour during a project
meeting at Fraunhofer IPMS.

Digitalization & Communication
Highlights

Virtual cleanroom tour

Fraunhofer IPMS at a glance48Annual Report 2023 / 2024

Fraunhofer IPMS
at a glanceFraunhofer IPMS at a glance

Annual Report
2023/2024

Figures
Budget(in million Euros)

Employees

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology

Industrial contracts
Publicly funded projects (national)
Publicly funded projects (EU/other)
Fraunhofer basic funding

Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic ComputingS tudents
Employees including temporary staff & trainees

Bio & HealthSensors & AI

At a glance

Digitalization & Communication
2018

2019

2020

2021

2022

2023

2024

Industry in %

47.1

43.0

43.5

40.8

48.1

39.0

38.9

Public funds (national) in %

17.3

17.6

22.7

20.9

26.7

29.8

33.2

Public funds (EU/other) in %

4.9

3.0

2.0

3.1

5.0

4.6

2.0

Total revenue in %

74.7

70.2

74.6

70.7

84.8

73.3

61.1

Highlights
Fraunhofer IPMS at a glanceWith us, you takethe lead withsemiconductors.
Become part of Fraunhofer IPMS now!

Plan

Change starts with us.

50Fraunhofer IPMS at a glance

Annual Report
2023/2024

Advisory Board 2023
Industry representatives

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

PD Dr. Ingeborg Hochmair-Desoyer
MED-EL Medical Electronics, CEO

Prof. Dr. Wolfgang Osten
University of Stuttgart

Björn Sass
GlobalFoundries Dresden, Module One LLC & Co. KG,
Principal Member Of Technical Staff

Prof. Dr. Katja Schenke-Layland
University of Tübingen, Director Natural and Medical
Sciences Institute

Dr. Ronald Schnabel
VDE/VDI Gesellschaft Mikroelektronik, Mikrosystem- undFeinwerktechnik (GMM), Managing Director

Prof. Dr. Ulrike Wallrabe
University of Freiburg, Department for Microsystems
Engineering

Prof. Dr. Frank Schönefeld
T-Systems Multimedia Solutions GmbH, Member of the
Board

Public Sector Representatives

Dr. Johannes Schumm
Sensirion AG, Vice President Research & Development

Dr. Lutz Bryja
State Ministry for Higher Education, Research and theArts, Head of Division

Scientific Representatives

Dirk HilbertState Capital of Dresden, Mayor

Prof. Dr.-Ing. Karlheinz BockTU Dresden, Faculty of Electrical and Computer
Engineering

Sts. Barbara Meyer
Saxon State Ministry for Regional Development, State
Secretary

Prof. Dr.-Ing. Jürgen Czarske
TU Dresden, Chair of Measurement and Sensor System
Technique, Director of Institute of Circuits and Systems

Dr. Inge Schlotzhauer
Brandenburg Ministry of Sciences, Research and Cultural
Affairs, Head of Division

Jörg Doblaski
X-FAB Global Services GmbH, CTO

Dr. Eike-Christian Spitzner
VDI/VDE Innovation + Technik GmbH, Head of Department Electronics and Microsystems

Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

Prof. Dr. Gesine Grande
Brandenburg University of Technology (BTU)
Cottbus-Senftenberg, President

Participants in the Advisory Board meeting in 2023.

Dr. Tina Züchner
German Federal Ministry of Education and Research,
Advisor51

Fraunhofer IPMS at a glance

Annual Report
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Strategy audit
In May 2023, Fraunhofer IPMS successfully had its
strategy audited by external experts from scienceand industry. The strategy process is a methodologythat has been anchored in the Fraunhofer-Gesellschaft for over 15 years. Strategy development
serves to position the institute for the future in acompetitive environment. On this page, we give you
an insight into the feedback from our auditors.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

Fraunhofer IPMS has avery good reputationand is closely linked toindustry.«"The trend topics presented,
such as medical/health, Green
ICT, AI and edge sensor
technology are, in my view,the right choice, also in termsof view of strengthening
microelectronics in Europe."

Auditors in the strategy process of Fraunhofer IPMS.

Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance"The ability to produce
microelectronic structures on
the basis of 200 and 300 mm
wafers is an absolutely uniqueselling point. Fraunhofer IPMS
thus occupies an excellent
position and is able to accompany
new products through to pilot
production. This capability is also
linked to the special position in
the Research Fab Microelectronics
Germany (FMD)."

Fraunhofer IPMS plays
an indispensablerole in the research
infrastructure of
the federal states(especially Saxony).«

A coherent vision was presented, whichis in line with the content presented
from the individual divisions andprovides clear guidelines for the further
development of the institute in the
coming years.«

In the cleanroom strategy, it isnoticeable that small series production/pilot production is also increasingly
being sought for optimal capacity utilization.
In addition to the SME target group, this offer
could also be of interest to industrial sectors
with long test and market development phases
and the associated smaller quantities and longer
start-up curves (e.g. medical technology).«52

Fraunhofer IPMS at a glance

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Evaluation kits
With our evaluation kits you get a fully functional experimental setup and can
immediately test our technology for your application.

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & Health

MEMS scanners for quasi-static orresonant operation

Sensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

The evaluation kits "QSDrive Scan Kit" (for quasi-static
scanners) and "Simple MEMS Driver" (for resonant
scanners) allow especially small and medium sizedcompanies to operate MEMS scanners of Fraunhofer IPMS
according to specification without the complex in-housedevelopment of drive electronics.
The evaluation kit for quasi-static scanners consists of a
ResoLin device – a gimbal MEMS scanner with a linear axis
and an optional, orthogonally oriented resonant axis – aswell as control electronics that enable operation of thedevices with a supplied optimized trajectory. Dependingon the design of the MEMS device, closed-loop operationof the device and synchronized operation of the resonant
axis are also possible. Function control is performed bysoftware that communicates with the electronics via USB.

The resonant scanner kit contains a 1D or 2D resonant
device – a cardanic MEMS scanner with one or optionallywith two orthogonally oriented resonant axes – as wellas the Simple MEMS drive electronics, which enables
the operation of both axes with the respective resonant
frequency. Depending on the design of the MEMS
component, synchronized operation of the resonant axes
is also possible. Function control is provided by softwarethat communicates with the electronics via USB.
Both evaluation kits include a scan head that holds thedevice. Thus, thanks to its special design, the evaluation
kit can be easily integrated into common opticalexperimental setups.

MEMS evaluation kit

LiFi Hotspot & Gigadock

CMUT

In the LiFi area, we offer two evaluation kits with different
focuses. LiFi GigaDock® is suitable for an optical, wireless,bidirectional point-to-point data link in full duplex modeover short distances in the cm range. Different versions
offer data rates from 1 to 5 Gbit/s. For medium distancesin the meter range, our evaluation kit LiFi Hotspot is agood choice. It supports data rates up to 1 GB/s at a
distance of up to 5 m.

The “CEK CMUT” evaluation kit offers interested
developers and users of ultrasonic sensors thepossibility to build a fully functional experimental setup
for evaluating miniaturized capacitive micromachined
ultrasonic transducers (CMUT). It consists of either
one or two CMUT sensor modules, adapted control
electronics, and software as a web application that
controls the CMUT via plug-and-play.

LiFi Hotspot evaluation kit
LiFi Gigadock® evaluation kit

Ethernet Time Sensitive
Networking (TSN)
The evaluation kit consists of either a Smartzync board(Xilinx) or a Netleap board (Intel/Altera) with an optionallyimplemented IPMS TSN-IP core for endpoint applications(TSN-EP), switched endpoint applications (TSN-SE),or switch applications (TSN-SW). Linux drivers withapplication examples as well as RTOS test applications and
TSN network configuration examples are also available
TSN evaluation kit

CMUT evaluation kit
Video of the CMUT evaluation kit

RISC-V Prozessor IP-Core
Our EMSA5 demo platform is an ideal tool for evaluating
the RISC-V processor IP core EMSA5. It includes an Artix®7 35T FPGA arty evaluation board with implemented
EMSA5 IP core.
RISC-V evaluation kit

Find all of our evaluation
websitekits on our

53Fraunhofer IPMS at a glance

Annual Report
2023/2024

Whitepapers & webinars

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Communication
Highlights

Whitepapers

Webinars#1
Time Sensitive Networking – An Introduction to TSN#7
CAN IP core design#2
Li-Fi – Communication at the Speed of Light#2
TSN implementation on the basis of Intel FPGAs#8
Zone-based E / E architecture: CAN XL andAutomotive Ethernet#4
Automotive LIDAR Technologies#3
TSN-Ethernet Switched Endpoint Controller

Fraunhofer IPMS at a glance#4
Latency-Optimized TSN Networks#5
RISC-V processor core for functional safety#6
Smart Catheter Pilot Line - A European Benchmark#9
CANsec - Security for the third Generationof the CAN Bus#10
Rotating Innovation: Contactless High-Speed
Data Transmission#11
MACsec,a basis for secure Ethernet networks#6
Capacitive Micromachined Ultrasonic Transducer(CMUT) – From Concept to Device#8
MEMS Technologies for Vehicle Environment Detection#11
Optical and Electrical Microsystems for Advanced
Biomedical Imaging and Diagnosis#16
Meet our experts: Leveraging Semiconductor
Manufacturing for large-scale Quantum Computing
Technology#17
Advanced Technology and Harware for Next
Generation Computing#20
Neuromorphic Computing for Edge AI#26
300 mm Semiconductor Analytics: XPS/HAXPESScanning Microprobe
Watch all of our webinars
websiteon our54

Fraunhofer IPMS at a glance

Annual Report
2023/2024

Networks and scientific collaborationiCampus

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing

The innovation campus electronics and microsensors
Cottbus – iCampμs – is a
research cooperation aimed atdeveloping innovative sensors
to introduce small and medium-sized companies in theregion to high-tech topics such as microsensor technology,
AI-based algorithms, and 5G data transmission.
As a member of iCampμs, Fraunhofer IPMS, with its
Cottbus branch, conducts research on technologies in
the field of environmental sensing, Industry 4.0, andsmart health. This includes Schottky photodiodes forautomated processes, sensors for near-infrared (NIR) in
Industry 4.0, as well as MEMS HF varactors for 5G mobile
communication.

Bio & HealthSensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

iCampus Cottbus
Video: iCampus Cottbus – the innovation campus
electronics and microsensors in the Lusatia region

Lausitz Science
Network
Fraunhofer IPMS is amember of the Lausitz Science Network e.V. (LSN). The
LSN is an alliance of research institutions that aim tofurther develop the strengths of the Cottbus-Senftenberg
research location and increase its visibility. The participantsorganize joint conferences, support young researchers,
initiate collaborative research projects, and invest in
attracting skilled professionals and marketing the sciencelocation.
Lausitz Science Network© Bernd Brundert

Lausitz Science Park
The Lausitz Science Park is one ofthe outstanding projects in structuraldevelopment. Under the leadership of
BTU Cottbus-Senftenberg, an innovation
landscape with international appeal isset to emerge in Cottbus in the coming years, combining
excellent basic and applied research with innovative startups and numerous company settlements.
As a partner in the Lausitz Science Park, Fraunhofer
IPMS actively participates in shaping the initiative. In
the summer of 2023, Federal President Frank-Walter
Steinmeier visited BTU and received on-site information
about the development of the Lausitz Science Park.
Lausitz Science Park
Image film

© Bernd Brundert

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Fraunhofer IPMS at a glance

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

Dresden Universityof Technology(TU Dresden)

Brandenburg Universityof Technology CottbusSenftenberg (BTU)

Since its foundation, Fraunhofer IPMS has maintained
a close partnership with TU Dresden. This applies inparticular to the Faculty of Electrical Engineering andInformation ­Technology, whose deans traditionally advise
Fraunhofer IPMS in the Advisory Board. Through theprofessorship for Optoelectronic Devices and Systems ofProf. Dr. Hubert Lakner, there is an intensive exchangewith students. The joint research work is reflected inregular joint public project proposals, publications, trade
fair participations and patent applications.

Through the professorship for micro- and nanosystems ofProf. Dr. Harald Schenk on the one hand and theinstitute's branch “Integrated Silicon Systems” on theother hand, Fraunhofer IPMS is particularly closely linked
to the Brandenburg University of Technology (BTU)
Cottbus-Senftenberg. The cooperation ranges from thejoint use of laboratories and premises to the provision of
attractive study focuses in graduate education and further
education in the field of photonic microsystems to joint
research and development work. You can also virtually
visit our laboratories at BTU (in German):

Cooperation in the field of developing innovative
components and manufacturing technologies was further
intensified with the High Performance Center Micro /Nano.
TU Dresden and Fraunhofer IPMS also present
themselves jointly to the outside world. Under the brand­“DRESDENconcept”, TU Dresden has joined forces
with partners from science and culture, among themFraunhofer IPMS, to make the excellence of Dresden's
research visible and to coordinate its science strategy.

Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

HTW Dresden –University for Applied
Sciences

In addition, the research activities of BTU CottbusSenftenberg, Fraunhofer IPMS and other non-university
research institutions are combined in the “iCampµs
Cottbus” project (p. 55).
Like Fraunhofer IPMS, BTU Cottbus also focuses ontransfer. This is how the “Science Gallery” came into
being, which offers a vivid and entertaining presentationof technological innovations in a showroom. The Science
Gallery is open to the public and also presents two
exhibits of Fraunhofer IPMS, an ultrasonic sensor and a
micropositioning system (in German).
Science Gallery

To strengthen cooperation, joint workshops havebeen held since 2021 to exchange research topics andproject ideas. From sensor technology, human-machineinteraction, edge AI to modern manufacturing processes,
there is a range of topics that can be jointly shaped.
In the future, Fraunhofer IPMS will also offer guest
lectures and enable students of the HTW Dresden to gain
practical insights at the institute through excursions.

High Performance Center"Functional integration for
micro/nanoelectronics“
The High Performance Center Micro/Nano brings together
the expertise of four Fraunhofer institutes in Saxony –IPMS, ENAS, IIS/EAS, and IZM-ASSID – as well as theTechnical University of Dresden, Chemnitz University ofTechnology, and Dresden University of Applied Sciences.

Fraunhofer IPMS collaborates with Fraunhofer ENAS
on research projects such as the development of asensor platform based on micromechanical ultrasoundtransducers.

Digital showroom
Image video

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Fraunhofer IPMS at a glance

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI

Research Fab Microelectronics
Germany (FMD)
Fraunhofer IPMS is one of the 13 institutes that since 2017
have been cooperating in the Research Fab Microelectronics
Germany (FMD for its acronym in German). Across locations
and technologies, the FMD collectively addresses current
and future challenges in electronic research, providing
crucial developmental impulses for tomorrow's technology.
Around 4,600 employees from all 13 institutes bring
together their expertise in the research and development of
micro and nano systems.
The FMD bundles the expertise of 11 institutes fromthe Fraunhofer Group for Microelectronics with thatof the Ferdinand-Braun-Institut, Leibniz-Institut für
Höchstfrequenztechnik (FBH), as well as the Leibniz Institutefor Innovative Microelectronics (IHP) under one virtual roof.
FMD constitutes a central point of contact for all micro andnanoelectronics related issues in Germany and Europe.
WebsiteShowroom
Improving Sustainability in Digitalization via
Microelectronic Research and Development for
Information and Communication Technology

Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

The FMD and the Federal Ministry of Education andResearch (BMBF for its acronym in German) took
a further step towards the implementation of theGerman government’s climate protection program withthe funding project Green ICT @ FMD launched inautumn 2022. Within the Green ICT @ FMD project, allparticipating institutes are setting-up a cross-locationcompetence center for sustainable Information andCommunication Technology (ICT) under the coordinationof the FMD business office. This competence center
provides a centralized approach to green ICT-specificissues as well as a comprehensive range of crosstechnology ICT solutions.
Project website

Promoting New Hardware Solutions for Next
Generation Computing
Currently, a large number of fundamental research
projects are being carried out in Germany on quantum
and neuromorphic computing. Nevertheless, there arestill insufficient opportunities for the development andapplication-oriented hardware testing that is required forhighly complex computing technologies, as well as forthe rapid implementation of the results into prototypes
and small series. This is precisely what the Research
Fab Microelectronics Germany - Module Quantum
and Neuromorphic Computing (FMD-QNC) project —launched on December 1, 2022 — aims to address. Within
the scope of the FMD-QNC project, researchers andcompanies should be supported in developing customized
microelectronics and scalable manufacturing as well as
integration processes for new information technologies.
Project website
EU Chips Act: FMD Pilot Line for Advanced
Heterogeneous System Integration
Over the coming years, the Research Fab Microelectronics
Germany intends to build the most comprehensive
and advanced pilot line dedicated to chip integration
for innovative, robust and trustworthy heterogeneous
systems as a contribution to the EU Chips Act. This pilotline comprises an unprecedented range of component
technologies and materials that will enable state-ofthe-art system design, interconnection and assembly
technologies, along with characterization, testing,reliability, and security assessment. Moreover, this pilot line
seeks to promote the innovative potential of the wholeindustrial spectrum in Europe.
Ensuring Skilled Workers, Attracting Young Talent,
Supporting Start-ups and SMEs
Along with the range of technological solutions, various
cooperation opportunities, and the coordination of large
collaborative projects, the FMD also runs special formats
and programs for students, young professionals, start-ups,

SMEs and research groups. For instance, the first GreenICT Award was presented in 2023. As part of the GreenICT @ FMD competence center, the award is granted toyoung talents writing their bachelor's and master's theses
on resource-saving information and communication
technology. Meanwhile, in 2024, the first Green ICTCamp will be held. The camp is a week-long student
training program designed to inspire, raise awareness andpromote networking among young students in the field ofsustainable microelectronics.
Also last year, the funding programs Green ICT Spaceand QNC Space were launched. Both programs are open
to small and medium-sized enterprises and start-ups(Research groups can also apply to QNC Space), enablingthem to implement their ideas in collaboration with
FMD institutes and project partners. On the one hand,
the Green ICT Space is intended to promote companies
and project ideas focusing on sustainability, low energy
consumption and emissions reduction. On the other hand,in the QNC Space, applicants receive support to develop
individual processes, process modules or subsystems
in feasibility studies in the field of neuromorphic andquantum computing.
Both the design and production of microchips andmicroelectronics as a whole are key drivers of economic
growth and progress. Accordingly, the FMD is working on
a concept for a Germany-wide Microelectronics Academy
aiming to improve the training of skilled workers in thefield of microelectronics, e.g. for climate protection andsustainability, new computing technologies and trustworthiness in the semiconductor and chip sector.
Showroom
Video "Get to Know Us"

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Fraunhofer IPMS at a glance

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword

Patents and publications
Patents

Publications

Whether it's novel MEMS-based bending actuators, IP
cores, or globally unique spatial light modulators withindividually deflected tilt mirrors, Fraunhofer IPMS issynonymous with innovation in the field of optical sensors
and actuators, ASICs, microsystems, and nanoelectronics.

At Fraunhofer IPMS, excellent research is conducted, as
evidenced by the numerous publications released by its
scientists in 2023.

Currently, Fraunhofer IPMS holds 297 granted patents,
with 197 patent applications in the process of being
granted.

One highlight of the year was a publication on newmaterials for quantum computing. The paper titled"300 mm CMOS-compatible superconducting
HfN and ZrN thin films forquantum applications"is available through Open Access at no cost.

Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing

Our patents

Our publications

Bio & HealthSensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance58Fraunhofer IPMS at a glance

Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

ThesesBachelor

MasterHeba Abu Al Aya„Erkennung von Gesten durch ultraschallbasierte
Dopplermessungen“
Koblenz University of Applied Sciences, RheinAhrCampus
RemagenSupervisors: Marcel Jongmanns, Prof. Dr. Marco Junglas

Nithin Anujan Beena„Assembly and Test technology for Thermally andMechanically sensitive MEMS dies“Technical University Dresden
Supervisors: Lukas Lorenz, Prof. Dr.-Ing. Thomas Zernaa,
PD Dr.-Ing. habil. Martin Oppermann

Pau York Brinkhaus Tort
„Konzept Testframework zur automatischen
Verifikation von IP-Cores“
University of Leipzig
Supervisor: Prof. Dr. Danilo Beuche

Sajib Bhattacharjee„Investigation and optimization of plasma etch
processes of Titanium nitride (TiN) for hard mask
applications“Technical University Chemnitz
Supervisors: Prof. Dr. Stefan Schulz, Dr. Katharina Lilienthal

Severin Schmidt„Design, Aufbau und Charakterisierung eines
Varaktordemonstrator“
BTU Cottbus-Senftenberg
Supervisors: Prof. Dr. Harald Schenk,
Dr.-Ing. Klaus Schimmanz

Sandra Bierhals„Einfluss von kompetenzbasierten Assistenzsystemen
in der manuellen Montage“
BTU Cottbus-Senftenberg
Supervisor: Prof. Ulrich Berger

Sophie Helene Von Der Sahle„Evaluierung eines Mikroskopaufbaus zur
Untersuchung von Flächenlichtmodulatoren –Eine Anwendung der BeugungskontrastMikroskopie“Coburg University
Supervisor: Prof. Dr. Thorsten Uphues

Gunjankumar Gediya„Characterization of the damping in MEMS components with low quality factors using impedance
spectroscopy“
University of Applied Sciences Jena
Supervisors: Dr.-Ing. Anton Melnikov, Prof. Dr. rer. nat.
Michael Rüb

Chaiwon Woo„Defektanalyse von ferroelektrischen
Feldeffekttransistoren“Technical University BerlinSupervisors: Yannick Raffel, Prof. Aleksander Gurlo

Phyllis Graf
„Artificial Neural Network based Defect Analysis inTransistors – Leveraging Machine Learning to Predict
Interface Trap Density“Martin Luther University Halle-Wittenberg
Supervisors: Prof. Dr. Paul Molitor, Dr. Sandro Wefel
Anastasios Grammenos„Integration of an in-memory accelerator with a
RISC-V microprocessor“
Aristotle University of Thessaloniki
Supervisor: Vardar Alptekin
Prafulla Kumar Gupta„PVD process development of ferroelectric HfxZr1xO2 thin films“Technical University Darmstadt
Supervisors: Dr. David Lehinger, Prof. Dr. Lambert Alff
Leander Hänsel
„Herausforderungen und Möglichkeiten der
Vermarktung von F&E-Dienstleistungen – dargestellt
am Beispiel des Marktes Holografie im Geschäftsfeld
Spatial Light Modulators des Fraunhofer-Instituts für
Photonische Mikrosysteme“
HTW Berlin - University of Applied Sciences
Supervisors: Prof. Dr. Annett Wolf, Fabian Lüdke
Fabienne Celine Hartlage„Organisationsinternes Marketing fürSocial-Media-Kanäle“
Kiel University of Applied Sciences
Supervisors: Dr. Anne-Julie Zichner; Peter Felten,
Prof. Dr. Bernd Vesper, Monika John
Daniel Hessler„Charakterisierung von Feldeffekt-Transistoren mit
ferroelektrischem Dielektrikum (FeFETs) hinsichtlich
niederfrequenten Rauschanteilen“
Dresden University of Applied Sciences
Supervisors: Yannick Raffel, Ricardo Orlando Revello Olivo,
Prof. Dr.-Ing. Tim Baldauf, M. Sc. Yannick Raffel
Bhavesh Arajanbhai Kachhadiya

59

Fraunhofer IPMS at a glance

Annual Report
2023/2024„Simulation and Modeling of Acoustic
Components of electrostatic MEMS transducer at
ultrasonic frequency“
University of Rostock
Supervisors: M.Sc. Jorge Mario Monsalve, Prof. Dr.-Ing.
Dennis Hohlfeld
Aravind Kappaganthula„Design and Concept of a D-band Power Ampliﬁer
in 22nm FDSOI-Technology“Technical University Dresden
Supervisors: M.Eng. Quang Huy Le, Prof. Dr. Hubert
Lakner, Prof. Dr. Wolf-Joachim Fischer

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

Satya Swapna Kommisetti„FPGA Application Development for SoC ACIM
Accelerator“Technical University Dresden
Supervisors: Prof. Dr. Hubert Lakner, Dr. Thomas Kämpfe,
Vardar Alptekin
Rahul Kumar„A Reconfigurable Hardware Processing Element for
a RISCV-based SoC“
Technical University Dresden
Supervisors: Prof. Dr. Hubert Lakner, Prof. Dr. Wolf-Joachim Fischer, Dr. Marcus Bednara
Christopher Mai„Anwendung maschineller Lernalgorithmen zur Klassifizierung von Montagegesten mit IMU-basierten
Datenhandschuhen“
BTU Cottbus-Senftenberg
Supervisors: Prof. Ulrich Berger

Amal Nair
„Design and Implementation of a generic CyclicRedundancy-Check IP-Core for high-performance
communication“Technical University Dresden
Supervisors: Dipl.-Ing. Martin Knofel,Prof. Dr. Wolf-Joachim Fischer,Prof. Dr.-Ing. habil. Uwe Marschner
Pascal Pfeiffer„Development of a Machine Learning Framework
for Quantized Neural Networks on Embedded RISC-V
Systems“Technical University Mittelhessen
Supervisors: Dr. Andreas Weder, Markus Noack,Prof. Dr.-Ing. Dipl-Wirt. Ing. Diethelm Bienhaus,
Prof. Dr.-Ing. Harmut Weber
Anant Rastogi„Characterization of metal-ferroelectric-metal (MFM)
capacitors with improved bias and temperaturestress reliability“Technical University Dresden
Supervisors: Dr. David Lehninger, Prof. Dr. Lukas M. Eng
Muni Reddy Singana„Development of the Microcontroller firmware for
the CMUT Evaluation kit“
Wismar University of Applied Sciences
Supervisor: Dr. Uwe Völz
Rujay Pawalu Soj„Implementation and testing of an IP core for‚„Compact JTAG“ (cJTAG) on an FPGA system for
a RISC-V processor“Technical University Dresden
Supervisors: Martin Zimmerling Prof. Dr. Wolf-Joachim
Fischer, Prof. Dr.-lng. habil. Uwe Marschner

Steve Seemann„Untersuchung von Fertigungsanomalien mittels
Analyse von Prozess- und Metrologiedaten in derHalbleiterfertigung“
FernUniversität in Hagen (Germany's State DistanceLearning University)
Supervisors: Malte Czernowski, Sascha Bönhardt,
Maximilian Everding, Prof. Dr. Uta Störl, Valerie Restat,
Kevin Kramer
Athira Sunil„Influence of interface material, scaling andoperation temperature on FeFET devices and arrays“Technical University Dresden
Supervisors: Franz Müller, Sourav De
Quoc Trung Trinh„Development of magnetic tunnel junction sensors
for racetrack memory application“Technical University Darmstadt
Supervisors: Dr. Benjamin Lilienthal-Uhlig,
MSc. Christoph Durner, Prof. Dr. Lambert Alff
Alina Thieme„Zur Bedeutung sozialer Medien in Business-toBusiness Märkten – Eine konzeptionelle Analyse“Technical University Freiberg
Supervisors: Dr. Anne-Julie Zichner,
Prof. Dr. Alexander Leischnig

Vinya Vibhuti„Development of integrated silicon nitride
waveguides for applications in the visible andinfrared wavelength ranges in a 300 mm CMOS clean
room“Technical University Dresden
Supervisors: Margarita Lapteva
Leonie Vieler„Defektcharakterisierung von Gateoxiden für die
Anwendung in Spin-Halbleiter-Qubits“Technical University Dresden
Supervisors: Maximilian Lederer, Maik Simon,
Dr. Manfred Helm, Dr. Johannes Heitmann
Wenjuan Wang
„Electrical Characterization for Schottky Carrier
Near-infrared Photodetectors with Plasmonic
Structures“Technical University Braunschweig
Supervisors: Hanying Wen, Priv.-Doz. Dr. Christine Ruffert,
Prof. Dr. Iordania Constantinou“
Zhihao Xian„Investigation of coating dependent acoustic
performance of CMUTs“
Technical University Braunschweig
Supervisors: Dr. Marcel Krenkel,
Priv.-Doz. Dr. Christine Ruffert, Prof. Dr. Andreas Dietzel

Simon Elias Tschuck„Implementierung einer automatischen optischen
Inspektion zur quantitativen Fehlerkontrolle vonMicroscannern“
University of Applied Sciences Jena
Supervisors: Dr. Michael Wagner,
Prof. Dr. habil. Jane Neumann

60Fraunhofer IPMS at a glance

Diploma
Annual Report
2023/2024

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

Jian Chen„Evaluierung AFM-Messkopf zur Kraftmessung an
mikromechanischen Strukturen“Technical University Dresden
Supervisors: Dipl.- Ing. FH Steffen Wolschke,
Prof. Dr. Wolf-Joachim Fischer,Prof. Dr.-Ing. habil. U. Marschner
Robert Dunst„Prozessdatenanalyse des tiefen reaktiven Ionenätzens (Bosch-Prozess) durch Data Mining undanschließende Modellbildung zur Optimierung derHerstellung von resonanten optischen Mikrospiegeln(MOEMS)“
University of Applied Sciences Zwickau
Supervisors: Christian Drabe, Elena Metzner,
Prof. Dr. rer. pol. Christoph Laroque,Prof. Dr. rer. nat. Matthias Richter
Ruan Fang„Simulation-based Evaluation of Photonic
Nano-structure“Technical University Dresden
Supervisors: Dr.-Ing. Lion Augel, Prof. Dr. Hubert Lakner,
Prof. Dr. Wolf-Joachim Fischer

Max Haymann-Pohl„Konzipierung und Umsetzung eines Low-Cost
Hand-Held-Spektrometers für Anwendungen im
NIR-Bereich“
Dresden University of Applied Sciences
Supervisors: Dr.-Ing. Andreas Weder,
Prof. Dr.-Ing. Marc-Peter Schmidt
Salem Lakaw„Modellierung und Entwicklung einer dezidierten
Ansteuerung aktiver Funktionen auf einem LNOIWellenleiterchip für Gaussian Boson Sampling (GBS)“
Technical University Dresden
Supervisors: Dipl.-Ing. Matthias Landwehr, Prof. Dr. WolfJoachim Fischer
Zschalig, Anthony„Evaluierung von Ansteuersequenzen zur
Reduzierung der Einschwingzeit an elektrostatischangetriebenen MEMS Array Strukturen“
Dresden University of Applied Sciences
Supervisors: Hanns Torlee, Dr. Andreas Neudert,
Dr. Jan-Uwe Schmidt, Prof. Dr.-Ing. Tobias Zaiczek,
Prof. Dr.-Ing. Marc-Peter Schmidt

Dissertation
Wael Alsabbagh„Investigating Security Issues in Programmable Logic
Controllers and related Protocols“
BTU Cottbus-Senftenberg
Supervisor: Prof. Ulrich Berger
René Landgraf„Polymeroptical Waveguides for Biosensing“Technical University Dresden
Supervisors: Prof. Dr. Hubert Lakner,
Prof. Dr. Wolf-Joachim Fischer
Michael Stolz„Ermittlung und Beurteilung der Zuverlässigkeit
von lateralen elektrostatischen Nanoaktoren undihr Einfluss auf zukünftige Anwendungen“
BTU Cottbus-Senftenberg
Supervisor: Prof. Dr. Harald Schenk
Severin Schweiger„Additive Manufacturing on Chip“
BTU Cottbus-Senftenberg
Supervisors: Prof. Dr. Harald Schenk, Dr. Sandro Koch,
Dr. Sebastian Meyer, Prof. Dr. mont. Mario Kupnik
Eberhart Matthias Wissel„Entwicklung eines Modells zur Optimierung derTeilhabe im Handlungsfeld der beruflichen Inklusion
an industriellen Arbeitsplätzen“
BTU Cottbus-Senftenberg
Supervisor: Prof. Ulrich Berger

61Fraunhofer IPMS im Profil

Annual Report
2023/2024

Organigramm

Stand: April 2024

Prof. Dr. Hubert Lakner
Institute Director

Prof. Dr. Harald Schenk
Executive Institute Director

Dr. Frank Benner
High Performance Center

Dr. Wenke Weinreich
Deputy Institute Director

Jörg Amelung
Deputy Institute Director

About Fraunhofer IPMS
Foreword
Administration &Infrastructure (AI)

Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & Health

DIVISIONS

Pioneering semiconductor technology

Engineering,
Manufacturing & Test (EMT)

Heiko Menzel

Cognitive Systems (CS)Jörg Amelung

Spatial Light
Modulators(SLM)

ActiveMicrooptical
Components &Systems (AMS)

Corporate Development(CD)

Tina Heinz

Dr. Sebastian
Meyer

Data Communication &Computing (DCC)

Center Nanoelectronic
Technologies (CNT)Dr. Alexander
Noack

Dr. Wenke
Weinreich

Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

BUSINESS UNITS / DEPARTMENTS

Sensors & AI

Torsten RietzschelRainer Bräcklein​

Rainer Bräcklein​

Finance(FI)

Information
Technology(IT)

Facility
Management(FM)

Michael ErittEngineering(ENG)

Jennifer Born
Human Ressources
Services (HRS)

Kristina
Gabriele Schulz
Manufacturing& Technologies(MT)

Dr. Uwe Vogel
Microdisplays& Sensors (MS)Dr. Sandro
Koch

Dr. Olaf Hild

Prof. Dr.
Ulrich Berger

Dr. Michael
WagnerDr. JanGrahmann

Linda Fischer

Dr. Anne-Julie
Zichner

Jessica Lotze

Dr. Benjamin
Lilienthal-Uhlig

KonradSeidelDr. Thomas
KämpfeRalf-Matthias
TaubigDr. MichaelFaulwaßer

Dr. Alexander
Noack

Acoustic
Sensors andSystems (ASS)

ChemicalSensors andSystems (CSS)

Cyber Physical
Systems (CPS)

Spatial Light
Modulators(SLM)

ActiveMicrooptical
Components &Systems (AMS)

Human
Resources Development& Recruiting(HRD)

Marketing &Communication(MC)

Quality and
SafetyManagement
(QSM)

Next
Generation
Computing(NGC)

Emerging
MemorySolutions
(EMS)

IOT
Components& Systems(IOT)

Clean RoomManagement(CRM)

Integrated
Solutions(ISO)

Software& System
Solutions (3S)

Tina Heinz
Business Development
(BD)

62

Fraunhofer IPMS at a glance

Annual Report
2023/2024

Sites

About Fraunhofer IPMS
Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance

Fraunhofer Institute for Photonic
Microsystems IPMS – Headquarters
Maria-Reiche-Straße 2, 01109 Dresden+49 351 8823 0
info@ipms.fraunhofer.de
www.ipms.fraunhofer.deFraunhofer IPMS – Center Nanoelectronic
Technologies CNT
An der Bartlake 5, 01109 Dresden+49 351 2607 0
info@ipms.fraunhofer.de
www.ipms.fraunhofer.deFraunhofer IPMS-ISS – Institute Branch"Integrated Silicon Systems"
Konrad-Zuse-Straße 1, 03046 Cottbus+49 355 69 24 83
info@ipms.fraunhofer.de
www.ipms.fraunhofer.deFraunhofer Center Erfurt
Herman-Hollerith-Straße 3, 99099 Erfurt+49 361 66338 150
info@ipms.fraunhofer.dewww.meos.fraunhofer.de63Fraunhofer IPMS at a glance

Annual Report
2023/2024

Follow us
LinkedInOur press releases, events, and current news arealways in view on the world‘s largest businessnetwork.
www.linkedin.com/company/fraunhofer-ipms

About Fraunhofer IPMS
Foreword

YoutubePioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing

Exciting interviews, as well as videos andanimations showcasing the technologies ofFraunhofer IPMS.
www.youtube.com/user/fraunhoferipms

Bio & Health
YoutubeSensors & AI
Digitalization & Communication
Highlights

Follow us for a look behind the behind thescenes of the Fraunhofer IPMS.
www.youtube.com/user/fraunhoferipms

Fraunhofer IPMS at a glance64Fraunhofer IPMS at a glance

Annual Report
2023/2024

Editorial Notes© Fraunhofer Institute for Photonic Microsystems IPMS,
Dresden 2024
RightsAll rights reserved. Reproduction requires the written
permission of the institute.

About Fraunhofer IPMS

EditorFraunhofer IPMS, Dr. Anne-Julie Zichner

Foreword
Pioneering semiconductor technology
Next Generation Technologies
Quantum Computing
Quantum Computing & Quantum cryptography
Neuropmorphic Computing
Bio & HealthSensors & AI
Digitalization & Communication
Highlights
Fraunhofer IPMS at a glance65