E H S R E P O RT

EHS Management
The Tokyo Electron Group is globally conducting environmental, health and safety (EHS) activities.

Basic Idea Behind EHS Activities

EHS REPORT16The Tokyo Electron Group conducts EHS activities, regarding
people’s health and safety and the global environment as its
management priorities. In operating our business, we place firstpriority on environmental conservation activities and on healthand safety, aiming to become a group of companies trusted byeveryone involved in our business operations. As a responsible
member of society, we make efforts to contribute to a more
affluent society. In the Tokyo Electron Group Credo andThe Tokyo Electron Group Credo and Principles
on Environmental Preservation

Principles on Environmental Preservation, which we revised inMay 2006, we make it clear that we will develop products in linewith a clearly defined environmental roadmap and verify theenvironment-friendliness of the products at their design, manufacturing, and use stages. The Credo and Principles also clearlystate that the Tokyo Electron Group will disclose the results ofverification and other relevant information to stakeholders via
environmental and social reports and other means.

The Tokyo Electron Group
Safety and Health Credo and Principles

EHS Management

The Tokyo Electron Group Credo on Environmental Preservation

The Tokyo Electron Group Safety and Health Credo

The Tokyo Electron Group believes that preserving the global environment and constantly improving it
is one of the most important objectives for mankind as well as its business. Based on this credo, we aredetermined to expand our business by maintaining harmony with the global environment, and thus win
the trust of our many customers, shareholders, employees, and society in general.

Safety and health training are required for all employees and board members of the Tokyo ElectronGroup. Our profit and delivery date requirements must not be met at the sacrifice of human life and thesafety of our facilities and equipment.

The Tokyo Electron Group Principles on Environmental Preservation
1. Continuous Improvement
The Tokyo Electron Group is conscious that products manufactured by the Group affect the environment, and based on this awareness, we, with our customers and suppliers, shall continually strive tominimize the impact of processes and operations on the environment. We will develop products
consistent with a clearly defined environmental roadmap for the Group products, verifying theappropriateness of efforts during design, manufacture, and use. To further confirm the appropriateness of such efforts, we will undertake activities that fully take into account regulatory and industry
requirements and the needs of customers and other stakeholders.

The Tokyo Electron Group Safety and Health Principles
1. Continuous Improvement
The Tokyo Electron Group is conscious that the factors that affect the safety and health of customers
and its employees exist at the stage of manufacturing, transportation, installation, use, maintenance,and service of its products. Based on this awareness, we shall continually strive to improve thesafety and health of our products and eliminate factors that affect human health.
2. Knowledge
The Tokyo Electron Group continually strives to enhance its understanding of safety and health andimprove these conditions for all people working at its sites. To that end, the Group aims to gain aqualitative and quantitative grasp of safety and health factors on its activities and operations.

2. Knowledge
The Tokyo Electron Group continually strives to enhance its understanding of the impact that theGroup has on the environment and the responsibility that this entails. In addition, the Group aims togain a quantitative grasp of environmental factors, and the impacts resulting from its activities andoperations.

3. Performance Criteria
As well as strictly observing mandatory safety and health laws, treaties, and agreements, the Tokyo
Electron Group strives to enhance its own safety and health management system and improveglobal safety and health programs by the proactive establishment of aggressive safety and healthperformance criteria.

3. Performance Criteria
In addition to strict adherence to environmental laws, treaties, and agreements, the Tokyo ElectronGroup will also promote conservation of the global environment by formulating activity plans thattake into account industry standards and various other environmental requirements.

4. Disclosure
The Tokyo Electron Group shares information about its safety and health credo, policies, and theprogress of its safety and health activities with all board members and employees, and will publish
its progress to the general public as the need arises.

4. Disclosure
In addition to ensuring that all employees clearly understand our environmental concepts, policies,
the state of company contributions toward environmental protection, and the state of product-related
environmental efforts, as well as improving levels of awareness, we will disclose relevant information to those outside the company via environmental reports and other means.

5. Partnership
The Tokyo Electron Group participates in safety and health activities practiced by its customers, suppliers, and communities.
November 27, 1998

5. Partnership
The Tokyo Electron Group actively participates in environmental protection activities practiced by its
customers, suppliers, and communities.
May 26, 2006

T O P I C S
Global EHS ConferenceTOKYO ELECTRON Environmental and Social Report 2007▲
The Global EHS Conference▲

The Tokyo Electron Group held its Global EHS Conference in June 2007,
participated by management of the Group and the members of the EHSCommittees.
At the beginning of the Conference, the Chairman and President ofTEL explained the Group’s future direction and plans for establishing asafety culture within the Group and for environmental protection.
Subsequently, the representatives of each district and business unit
(BU) gave presentations and actively discussed EHS-related matters.

EHS Promotion System

Tokyo Electron Group’s EHS Promotion System
Global EHS Committee* Committee Chairman: President of TEL

Customer-Site EHS

Product EHS(EHS activitiesin each region)(EHS activities
at customers’ facilities)(EHS activitiesfor the Group’s products)

ISO 14001-Certified Plants and OfficePlant/officenameCertification
date

Sagami Plant

December 10,
1110-1997-AE-KOB-RvA
1997

Tokyo Electron Tohoku
LimitedTohoku Plant

February 19,
1998

1118-1998-AE-KOB-RvA

Tokyo Electron Kyushu
LimitedKumamoto/Koshi/Ozu/Saga Plants

March 26,
1998

1120-1998-AE-KOB-RvA

Yamanashi Plant(Fujii/Hosakadistrict)

May 15,
19981124-1998-AE-KOB-RvA

Tokyo Electron AT Limited

Miyagi Plant

March 1,
2005

01245-2005-AE-KOB-RvA

Yokohama Office

July 14,2004

EC04J0144

Company nameTokyo Electron PS Limited
Tokyo Electron AT Limited

Tokyo Electron Device
LimitedCertification number

EHS Activities Monitoring System
In order to strengthen our EHS management system, we areincreasing the level of monitoring that verifies the system function and results. Monitoring is done from multiple viewpoints
within plants and offices, within the Group, or by third parties.
We are especially focusing on the Tokyo Electron Group Internal
Audit, a program of mutual EHS evaluations by representativesof many plants and offices, which was instituted in FY 2003.
In FY 2007, in response to an increasing need to manage
chemical substances contained in products across the entire
supply chain and in compliance with the Japanese Industrial
Safety and Health
Act revised in2006, we added
some new audit
items to ensurethat EHS wasexamined appropriately in cooperation▲ On-site Audit
with our suppliers* Primary employer: According to the revised Industrial Safety and Health Act, a primary employer means a primary company that arranges for the employees of its
contractors to carry out a part of the company’s work at one single place in cooperation with the company’s own employees.

EHS Risk Management System
At manufacturing subsidiaries of TEL, environmental and safety
risks are estimated based on ISO 14001 and OHSAS 18001
standards for labor safety and health management systems.
These subsidiaries are implementing measures to eliminate
higher risks first. Also, they are endeavoring to reduce somerisks although they are not yet legally required to do so. We
believe it most important to implement anti-global warming
measures in line with the Kyoto Protocol targets in future EHS
risk management.

Abiding by the Law
The Tokyo Electron Group operates in strict obedience to thelaw. We closely track new environmental laws and emissions
regulations and for some substances have enacted independent
standards that are stricter than legally required. In FY 2007, wewere not subject to legal actions of any kind with regard to environmental accidents, violations, fines, or complaints.

EHS Training
The Tokyo Electron Group offers EHS training under theprinciple of “the necessary training for the necessary people.”
Training courses are grouped by rank and are open both toGroup employees and to employees of cooperating companies
who work at the Group’s facilities. An EHS training program isalso a required part of the curriculum for new hires. In addition,in order to further facilitate EHS activities, we provide training
on team resource management focusing on communication
within a team as well as safety training for middle-levelmanagers.

EHS Training
Environment

Health and Safety● Special training(for internal environmental
auditors, special training on
key environmental aspects ofwork)● ISO 14001-based
environmental training(for manufacturing plants)● Training on environmentalactivities (for office facilities)● Equipment-specific training● Customer-specific site entrytraining● Safety training for employees
traveling overseas● Advanced safety training● Basic safety training

TOKYO ELECTRON Environmental and Social Report 2007

17
EHS Management

Factory and Office EHS

and partner companies. (The revised law demands the enhancement of safety instructions and messages to be given by a primary employer* to the related contractors.) We will continue tomonitor our EHS management system with this extended scope,
which checks our EHS activities more strictly.

EHS REPORTOur EHS system takes the form of thee pillars: Product EHS,
which advances EHS priorities in our products in general;
Customer-Site EHS, which advances those priorities during andafter start-up of our products; and Factory and Office EHS,
which concerns our facilities.
The Tokyo Electron Group companies, in particular TEL’s
manufacturing subsidiaries, started developing and implementing environmental management systems based on ISO 14001 in
1997, and obtained ISO 14001 certification.