Roundtable Meeting with Stakeholders

Reducing Environmental Impact by Half at Semiconductor Factories

H i g h l i g h ts
Roundtable Meeting with Stakeholders

Reducing Environmental Impact by Half at Semiconductor Factories—How can semiconductor-related companies best collaborate to achieve total optimality?

Reducing the impact of the chip-making process on the environment is an industry-wide issue for thesemiconductor sector, as the process involves massive use of electricity, chemical substances andother resources. We held a roundtable meeting on July 1, 2008 to discuss necessary collaborationand cooperation in order to reduce the environmental impact at semiconductor factories by half,
inviting representatives from semiconductor manufacturers, relevant equipment and component
manufacturers and a company that designs and constructs clean rooms.

Invited Participants in the Roundtable Meetingl Intel Corporationl Samsung Electronics

Mr. Hidetoshi Sakura
Dr. Tae-Jin Parkl Toshiba Corporation Semiconductor Company Dr. Yuichi Mikata

Sakura: At Intel, we have a system in place to produce productswith a lower environmental impact. When developing a new
manufacturing process, we develop guidelines covering relevant
matters, such as energy efficiency improvement, restriction on theuse of chemical substances and occupational safety with reference tol Edwards Japan Limited

Mr. Chiaki Urano

relevant guidelines like SEMI, RoHS, and EICC.3
Our energy consumption target during the period from 2002 tol Ebara Corporation

Mr. Nobuharu Noji2010 aims at an average 4% annual reduction per production unit.

l Taisei Corporation

Mr. Tomoo Gocho

We have achieved a total 20% reduction over the past five years. AsHIGHLIGHTs

the next step, we are working toward a long-term goal of reducing
electricity consumption using guidelines such as SEMI S23 in ourEnvironmental Activities within the Semiconductor
Industry: Progresses to Date and Future Challenges

use of relevant equipment. We have also asked our suppliers toSaito (TEL): The Tokyo Electron Group plans to achieve a 35%

3 EICC: The Electric Industry Code of Conduct, guidelines for responsible supply
chain management

reduction in energy use per unit area of wafer from the 1999 levelby 2010, in line with the policy of ITRS1. We set this reduction

present their roadmaps to work together for this purpose.

MANAGEMENT Reporttarget as we believe that reducing the environmental impact of every

Park: In the Seoul metropolitan area, regulations on the emissions ofCO2, NOx, SOx and other applicable substances have been changed

single process in semiconductor manufacturing is an industry-widefrom a concentration base to a total emission base. A 50% reduction

responsibility. ITRS recently released an additional Roadmap whichof these emissions from the 2001 levels is also required. To meetcalls for a 50% reduction of the total fab energy use during the 2016-

these new requirements, our factories are analyzing the substances

2022 period from the 2007 levels. The semiconductor industry needs

captured by gas scrubbers and taking necessary actions. We haveto take collective action to meet this target.

accomplished a high level of energy conservation in our operations,

Meanwhile, to address the degrading environment, every memberof the semiconductor industry, from upstream to downstream, needs

thanks to support from the semiconductor manufacturer.
Mikata: Reducing CO2 emissions directly means reducing electricity

EHS Report

to intensify their environmental efforts by setting additional targets
in areas not covered by the SEMI S23 2, such as waste, chemicalcosts. This is a powerful motivation for us at Toshiba to lower

substances and recycling.

unit area electricity use of new facilities by half compared to

1 ITRS: International Technology Roadmap for Semiconductors, an organizationof the semiconductor industry which sets industry-wide targets on technologies,
environment and other applicable elements.

200-millimeter wafers. A shift to the use of 300-milimeter wafers was

2 SEMI S23: Guidelines for energy conservation for semiconductor production
equipment issued by the Semiconductor Equipment and Materials International(SEMI), an international industry organization for semiconductor/FPD production
equipment and material manufacturers.

emissions. Over the past four years, we have slashed our per

the major reason for reinforcing our reduction efforts, which, in turn,led us to reduce consumption per basic unit. As a result, we havesuccessfully limited the increase of CO2 emissions for the past three
to four years, despite the fact that our productivity has increased
during the period.

Current Environmental Cooperation among Firms
related to Semiconductor Manufacturing
SOCIAL Report

Mikata: Toshiba started the Clean Room Econology4 Project withproduction equipment manufacturers and facility engineers from 2004.
In this trilateral initiative led by Toshiba’s production manager, working
groups (on power facilities, manufacturing equipment, etc.) discussand explore the optimal specifications of relevant facilities. The
project has helped us reduce energy loss and generate technologicalinnovation as well as new ideas to improve energy efficiency.
4 Econology: A word coined from “ecology,” “technology” and “economy.”

10TOKYO ELECTRON Environmental and Social Report 2008

Roundtable Meeting with Stakeholders

Reducing Environmental Impact by Half at Semiconductor Factories

our company—require an occasion to coordinate their respective

for example, the temperatures and pressures involved would beactions, rather than implementing them individually. Discussing anddifferent from conventional ones, which means that the types ofagreeing on a policy to reduce energy consumption would generategases required and the conditions of chemical substances wouldmuch greater benefits. To this end, we need to invest time foralso be different. However, we do not usually have access to detailed
information not included in the MSDS5. We thus seek necessary

in-depth discussions.

supplemental information from equipment manufacturers.

Mikata: Improving productivity is a very effective measure to reduce
CO2 emissions. Enhanced processing capabilities per unit hour

5 MSDS: Material Safety Data Sheetor higher utilization of equipment means that the same numberof facilities produces a greater number of semiconductors, which

Urano: While semiconductor manufacturers develop roadmaps forindicates reduced electricity consumption and CO2 emissions.
Cutting back on standby power consumption is anothermost important element in the next phase is which specific actions

challenge. Most equipment, barring lithography equipment, is not

are to be taken along with the roadmaps. Therefore, it is essential tonecessarily used all the time throughout the entire wafer processing

examine every element (equipment, component, etc.) of the chip-operation. Standby electricity may account for 20 to 30% of overallmaking process. We, as a supplier of exhaust systems, are doing

power consumption depending on the size of fab, and we hope aour part by working to improve energy efficiency of our component

power-saving function, just like “sleep mode” for PCs, will be madeproducts. If we can obtain related information, such as equipment

available. It should start with standardizing the specifications of sleep

locations and the distance from a gas scrubber and dry pumps, wemode.

will be able to suggest more concrete, useful ideas.

Ibuka (TEL): I agree. A sleep mode needs to be redefined by SEMI

Sakura: At Intel, we meet equipment manufacturers regularly toStandards or their equivalents.

share information on new technologies at a very early stage.

Noji: Speaking of reducing power consumption, Ebara is a pioneer inEHS Report

reducing CO2 emissions and taking other environmental steps, theMANAGEMENT Report

three parties involved—the facility and equipment manufacturers anddevelopment phase. In a new semiconductor manufacturing process,HIGHLIGHTs

Park: I agree with the necessity of such trilateral consultation in theenergy-efficient pumps and has been providing pumps powered byvariable-speed motors since 1995. These pumps enable the setting

Urano: Semiconductor manufacturers and equipment manufacturersof a sleep mode. In reality, however, some equipment manufacturers

should always work closely with one another in developing theare reluctant to install the pumps, partly due to the implications on

manufacturing process. Energy use can be reduced by simple

the yield rate and manufacturing process.

improvements such as installing pipes of optimal length and treating

However, over a decade of operation, our dry pumps withgases closer to the manufacturing equipment. Full consideration

variable-speed motors consume 80% less energy. Futureof the layout of the entire clean room may lead to smaller and thus

improvement of processing technology for pump components will

cheaper dry pumps.

achieve greater energy efficiency of the pumps alone. We need to

Park: Such discussion for improvement is much needed. We revised

seek comprehensive solutions that combine improved performance

our manufacturing process three times in the past but did notof individual equipment and a reduction in standby power

witness any effective collaboration among the related parties. Theconsumption.

TOKYO ELECTRON Environmental and Social Report 2008

SOCIAL Report

Cooperation in the Future11

Roundtable Meeting with Stakeholders

Reducing Environmental Impact by Half at Semiconductor Factories

H i g h l i g h ts
Roundtable Meeting with Stakeholders

Reducing Environmental Impact by Half at Semiconductor Factories

Hidetoshi Sakura

Tae-Jin Park

Yuichi Mikata

Chiaki Urano

Nobuharu NojiTomoo Gocho

Intel Corporation

Samsung Electronics

Toshiba Corporation
Semiconductor CompanyEdwards Japan Limited

Ebara Corporation

Taisei Corporation

HIGHLIGHTs
MANAGEMENT Report

Ishida (TEL): To attain higher productivity, minimizing defects

We of course intend to undertake further study on the relevant

is the key. More active communications and cooperation amongequipment, which is still an unknown quantity for us.

semiconductor manufacturers, equipment manufacturers andprocesses and the costs of respective processes will bring about

Necessity of Both Individual Cooperative Action
and Collective Standardization

reductions in the number of defective products.

Yamanaka (TEL): It is true that certain elements can be standardizedmaterial manufacturers with regard to the number of required

While I understand some information is subject to confidentiality

EHS Report
SOCIAL Report

hand, one-on-one discussions may not always bring progress ascompanies is indispensable in developing next-generation devices.

the discussing parties may or may not acquire the contract, or theAraki (TEL): How about designing overall factory layout? Some cases

relevant contract may or may not be determined by bidding.

show simply changing the pump location or pipe length has led to

Ibuka (TEL): Discussions among relevant industry organizations,higher productivity by 5 to 10%.

such as SEMI, Semiconductor Equipment Association of Japan

Gocho: As a construction company, we focus primarily on providing(SEAJ) and the Japan Electronics and Information Technology

sturdy, long-lasting buildings in earthquake-prone Japan. Using theIndustries Association (JEITA), sometimes lead to solutions. We insame approach, we are working on comprehensive measures tothe same industry can discuss, share information and cooperate withprotect clean rooms from quake-related damage such as through theone another, where needed, to the extent that confidentiality issues

development of seismic control and isolation technologies. Having

do not arise.

said that, when we actually construct a semiconductor factory, it isIshida (TEL): When it comes to cooperation, it would be sensible forvery difficult for us to do anything more than design details of thesemiconductor manufacturers to take the lead.

factory in line with the grand design, as the time from the obtainment

Mikata: I think effective cooperation takes place when relevantof the grand design on the occasion of bidding to the launch ofparties — the semiconductor manufacturer, the equipment

construction is generally quite short.

manufacturer and the construction company — exchange relevant

We wish to be involved from the planning phase, where possible.
We currently find it difficult to take the initiative and propose ideas.

12through discussions among relevant trade associations. On the otherrestrictions, I still believe collaboration among the relevantTOKYO ELECTRON Environmental and Social Report 2008

information and insights to eliminate inefficiencies at each relevant
process in the entire project.

Munetsugu Yamanaka Satoshi Saito

Shigehito Ibuka

Joji Hoshi

Marketing DivisionTokyo Electron Limited

Corporate Strategic
Planning Dept.
Tokyo Electron Limited

Environment,
Health & Safety CenterTokyo Electron Limited

Environment,
Health & Safety CenterTokyo Electron Limited

At the same time, standardization efforts that have theEnvironment,
Health & Safety CenterTokyo Electron Limited

impact of facilities if our product developers learn more about thecooling water and to high-temperature water resources.

can facilitate lower energy consumption. To this end, a unified

Ibuka (TEL): Given the magnitude of the social demand forcoefficient was established and demands from both equipment andenvironmental solutions, we need to establish and achieve ambitious

semiconductor manufacturers were accommodated to the greatest

goals; otherwise public trust in the entire semiconductor industry

extent possible. The crux is that we need to forge collaborative

may be eroded. Together, we intend to work closely toward total

working relationships among related parties by aligning interfaces

optimality.

and identifying what should be done independently and what should

Saito (TEL): Today’s discussion led me to think we can still eliminate

be done through collaboration. Both individual collaborative efforts

inefficiencies in clean rooms simply by sharing information in aand collective standardizing processes are important.

timely manner, among other factors. With support and insights

Ishida (TEL): Exactly. We at TEL have long studied the SEMI

from various stakeholders, including customers, related deviceStandards, through which we have played an important role inmanufacturers and construction companies, we intend to achieveaddressing environmental issues and improving productivity.

further reductions in the environmental impact of our products andWithout such unified standards, different manufacturers would havesemiconductor factories.

developed different product specifications, entailing unnecessary
costs and substantial waste of resources.
Mikata: SEMI S23 is an example of standardization that is beneficial
and user-friendly. By applying the energy coefficients defined by thisstandard, you can quantify your energy use at every process acrossthe product lifecycle. The resulting numerical data presents a clear
picture of which process is the most energy intensive and which
process has room for improvement.

Again, collaboration is the key here.
Hoshi (TEL): SEMI S23 has made our life easier as its coefficientsallow us to track various energy consumption data centrally. We
will be able to develop equipment that can reduce the environmental

SOCIAL Report

In this year’s roundtable meeting for our environmental and social
report, we invited our customers, manufacturers of semiconductor
production equipment components and a construction company thatdesigns and constructs clean rooms to participate, as we did for the lastyear’s publication. We are delighted to have had a constructive andfruitful discussion, which clearly indicated an overall direction for futureactivities.
At the conference of the International Semiconductor Environment,Safety & Health (ISESH) held in Sapporo on June 23, 2008, ourChairman, Tetsuro Higashi emphasized in his keynote speech that thesemiconductor industry needs to take collective action in earnest toaddress environmental issues, particularly global warming, and thatindustry organizations such as SEMI, International SEMATECH
Manufacturing Initiative (ISMI), JEITA and SEAJ need to take initiatives
to promote industry-wide efforts. He also declared that the Tokyo
Electron Group will operate its business with particular focus on
innovation, growth and the environment.
While this roundtable meeting was truly meaningful, solving
environmental issues requires more than a single company or country’s
initiatives but worldwide efforts. I am convinced that in light of thisenormous global challenge, corporate social responsibility (CSR) will
become of even greater importance for corporations, whether they arelarge or small.

EHS Report

Such standardized coefficients cannot be determined without the
involvement of semiconductor, equipment and facility manufacturers.

Following the roundtable meeting …

MANAGEMENT Reportfacilities, such as the different coefficients applied to low-temperaturedeveloping the SEMI S23, the aim was to create a standard thatHIGHLIGHTs

participation of all relevant parties are also very important. In

Roundtable Meeting with Stakeholders

Hiroshi Ishida

Sales & Services Division
Japan
Tokyo Electron Limited

Reducing Environmental Impact by Half at Semiconductor Factories

Kaoru Araki

Satoshi Saito
Environment, Health & Safety CenterTokyo Electron Limited

TOKYO ELECTRON Environmental and Social Report 200813