Internal Round Table Discussion:
The Potential of the Field Solutions Business
Our field solutions (FS) business undertakes the maintenance, repair, and modification of semiconductor
production equipment supplied by the TEL Group to customers, and until now responsibility for thesebusiness activities was spread over multiple organizations, including post-sales divisions. In October 2009
these activities were unified and our FS business launched. Employees involved in this area conducted around table discussion of the potential for FS business (the discussion was held on June 28, 2010).

Generating innovation in the FS businesslocal situations and creating ideas independently.
Asano: I feel that the equipment modification business,

Moderator: Business models in the world are changing

which was inactive only a few years ago, has really changed.

dramatically. From now on not only cutting-edge but also

Our company is now calling this a period of innovation andlow-cost and other numerous semiconductor applications

growth. In the FS business, too, we intend to construct new

are going to become necessary, especially when aiming

business models and generate innovation.

at developing countries. Is there a relationship between

Sakamoto: I think that one way to generate innovation isthe background to these times and the launching of the FS

through interpersonal communication. By expanding ourbusiness?

FS business, our close communication with customers has

Kaminaga: In our FS business, the entire TEL Group is

become livelier than ever before and this has promoted

responding to the polarization of the market into competing

innovation. Moreover, by making use of the broad knowledge

with cutting-edge technology and effectively utilizing existing

and know-how we have accumulated in developing bothdevices and production lines through the sale of TEL-certified

hardware and software, we provide consulting services forused equipment and other efforts. Since there is expected toour customers mainly to boost yield and improve wafer

be demand for FS business products and services centeredproductivity. We believe that we should proactively provide

on consumables even during economic downturns, thesupport based on our knowledge to not only customers

business is thought to have the potential to contribute torequiring cutting-edge technology but also customers

the stabilization of operations. We are also developing newdesiring to improve the production efficiency of their existing

business models that provide not only hardware-related but

semiconductor factories so that they may achieve the sameacross-the-board high-level equipment operation support. We

level of operations as cutting-edge semiconductor factories.

can perceive changes that have come to the surface within
the companies in relation to this move in the last six months.
Active communications from our locally based affiliates
overseas are also increasing, with local offices responding to6TOKYO ELECTRON

Environmental and Social Report 2010

Fumihiko Kaminaga

Ritsuro Maekawa

Field Solutions Dept.
Tokyo Electron Limited

Field Solutions Dept.
Tokyo Electron Limited

Takanobu Asano
Minoru Kunugi

Koyu Hasegawa

Kanto Field Solutions Dept.
Tokyo Electron FE Limited

Development GroupTokyo Electron PS Limited

General Manager
Technology &Development DivisionTokyo Electron PS Limited

Joji Hoshi

Koichi Sakamoto

Environment,
Health & Safety CenterTokyo Electron Limited(participating via teleconference)
Field Solutions Dept.
Tokyo Electron Limited

equipment stops, but the results of a survey show that 86%

Moderator: Please describe the situation regarding usedof the equipment ceased, we are collecting opinions on oursemiconductor production equipment.

support from major customers, and so our policy is to

Kaminaga: Power semiconductors* and other devices still use

respond to these requests to the very best of our ability.

small-diameter wafers today. If applications can be adapted,

are still in operation. Currently, six years after production

Main FS Business Services

However, some customers say that the latest equipment isEnvironmental responsivenessbetter for dealing with fine particles of dirt and dust.
Sakamoto: We occasionally provide consultation regardingused equipment. There are more problems with how to deal
with dirt and dust particles than there is for new equipment.
Onodera: One key point in the TEL Group’s usedequipment business is that the equipment is sold only after

Modification

Contract services

Relocation

Refurbishment

Used equipment

Parts sales

MANAGEMENT REPORT

production can be carried out even with used equipment.

of the models that we produced and delivered 22 years ago

HIGHLIGHT

Tokyo Electron’s used equipment
business

Internal Round Table Discussion:

Akira Onodera

The Potential of the Field Solutions Business

Manager
Field Solutions Dept.
Tokyo Electron Limited

improvements have been made to enable it to handle dirt
and dust particles. These measures are not undertaken after
Reform/improvement

Prolonging equipment life

beforehand. We believe it is best that the equipment is firsttaken to one of our factories where it is refurbished (repaired,inspected, etc.) so that it will function adequately at eachspecific customer site before being delivered to the customer.

Reducing costs by listening to workers’
opinions and utilizing their experience

EHS REPORT

the used equipment is installed in the customer’s factory but

In this way, defects resulting from aging degradation andModerator: It seems that ideas are sometimes born frombe avoided.

discussions with customers. What about the awareness of

Maekawa: Some customers require products that are low-workers?

cost. By launching our FS business and dealing in usedequipment, we have latched onto a new market. I think it isgood to pursue our used equipment business while at thesame time maintaining our customers in the cutting-edge

SOCIAL REPORT

various other problems associated with used equipment canequipment field.
Kunugi: We also provide replacement parts for equipmentthat is still used at customer sites but is no longer inproduction, by reusing parts recovered from used equipment
we have collected. The TEL Group provides part replacement
support for up to eight years after production of the* Power semiconductors: semiconductors that can convert/regulate power
voltage/current with high efficiency

7

Onodera: In attempting to satisfy our customers’ high-utilize the expertise of experienced engineers effectively.

level requirements, engineers make improvement after

Onodera: Engineers’ rich experience and skills generate

improvement, which leads to new ideas and our businesscustomer satisfaction and this leads to trust. I think in thisexpands. Our business requires knowledge about not only

business the strength of the workplace brings benefits

semiconductors but also electricity, gas, machinery, and a

directly to both parties.

diverse range of other fields. I know that all of our engineers
in our various workplaces find the work very interesting.
Maekawa: In marketing you need substantial knowledge of how

Reducing customers’ environmental
impact through FS business activities

to achieve optimum operations through equipment modificationand the costs must be appropriate. We are working out how toModerator: Increased yield and reduced equipment standby

reduce costs by making trial-and-error efforts in cooperation

times also lead to reductions in environmental impact. To

with plant staff.

what extent are customers concerned about this aspect?

Hasegawa: Awareness of cost has taken root in our FS

Hoshi: Customer interest in reducing environmental impact isbusiness because of the constant need to reduce costs,becoming higher than ever before. With respect to reducing

including for marketing, and we endeavor to control costs

environmental impact, what is important is not just simply

from the development stage.

emphasizing the environment and energy conservation but

Moderator: I assume that veteran engineers, in particular,

instead making proposals that position energy as a cost; timing

play an active role in many aspects of the FS business. Is thisis also very important. For example, energy-saving models orthe case?

functions are effectively recommended to customers who plan

Kunugi: Certainly. Each of our engineers has accumulated

to replace equipment. Adding functions after the equipment

experience and knowledge, and so they play important roles

is installed increases costs, so relocation of equipment orin various aspects of the business. I think it’s necessary toa factory is also a good time to suggest and implement
environmental measures.
Asano: Without legislation or numerical targets set by thegovernment to reduce environmental impact, it would not be

Customer Comment

easy to go after environmental measures head-on. We areconsidering ways of incorporating energy-saving functions

Because of Tokyo Electron’s consulting services,

into our products effectively from the development stage.

we have been able to significantly reduce waste in

Kaminaga: As old equipment generally does not havesemiconductor production, decrease the rate of defective

modern energy-saving functions, some people think that old

semiconductor devices, and improve our yield ratio. The
cumulative economic effects equal several hundreds ofequipment hinders the customers’ effort of reducing CO2emissions. Many customers ask us for advice on the effective

millions of yen in cost reductions

use of high-energy-consuming parts such as pumps, heaters,

and have contributed to reducing

coolers, and main units.

semiconductor device costs.

Onodera: Sometimes it’s difficult to get customers to accept
proposals for reducing CO2 emissions because the return on

Shinya Watanabe
Chief Engineer
Production Technology No. 2 Division
Naka Factory, Production Headquarters
Renesas Electronics Corporation

investment is difficult to discern. I think it is also important toobtain the understanding of the customer’s top managementwith an easy-to-understand proposal before moving ahead.
Moderator: From the perspective of saving and reusing
resources, I think that utilizing used equipment is appropriate
for the times. Are there any expectations for the FS businessfrom the environmental division?
Hoshi: We view prolonging the life of equipment itself as
more important than parts. When you look at environmental
impact from the perspective of the product lifecycle,
continuing to use old equipment is one way of efficiently
using resources, and I think this is a point that we needto emphasize in promoting used equipment to customers.
Furthermore, while persistent efforts are being made to makeall our major products more eco-friendly, we expect additional
efforts to be made by developing other devices supporting
environmental measures, including a system for visualizing
data on energy use.
Kaminaga: Currently we are analyzing benchmark survey

8TOKYO ELECTRON

Environmental and Social Report 2010

results and yield management data and checking the findings
against our knowledge to enable us to formulate proposals for
Sakamoto: It is necessary to transform the data we havegathered from information into knowledge. Only after we go
through this process, we will be able to use that knowledge tomake new proposals, including data on energy-saving pumps,
which we have recently begun to promote. We intend to
expand these proposals.
Maekawa: In order to sell used equipment, we shouldemphasize the environmental conservation aspects suchas reducing CO2 emissions. Purchasing new equipment forreplacement entails disposing of the old equipment, which has
a considerable impact on the environment. We are working
to help customers understand that it is possible to achieve agreater reduction in CO2 emissions by reusing used equipment
rather than simply by purchasing new equipment.

the TEL Group has a tremendous advantage in identifying wherein the round table discussion, I was reminded of the potential

any problems lie due to our extensive knowledge of multipleof our FS business, which was launched in response to thetypes of equipment and production lines. When we are able tochanging needs of society.

come up with complex solutions, the FS business is sure toThe TEL Group has been conducting its business activities
with the trust of our customers, which we have gained throughbecome even more interesting.
Like other industries, the semiconductor industry isreliable service and cutting-edge production equipment.

cost-sensitive; therefore, reducing costs for electrical power

However, customers’ interest is not limited to the purchase ofconsumption and conserving cleaning solution and resist are

new production equipment but has also begun to include thehigh priorities. Unfortunately, production equipment did not

combined utilization of existing production equipment and usedhave sufficient energy-saving functions in the past, but if current

production equipment. The FS business was launched with thetechnology can be fed back into this equipment, I believe it canobjective of responding to these new needs.

also contribute to reducing environmental impact by conserving

In our sales of TEL-certified used equipment, the TEL Group

resources and energy while at the same time reducing costs.
Utilizing one technology effectively for a long time leads toon our independent standards. Our base has recently expanded

an eco-friendly business. Moreover, amidst an industry-widewith the introduction of new used equipment, which is produced

trend toward eco-friendliness, we intend to take a leadershipusing the same method as new products, using pre-owned unitsrole in promoting these activities and strive to encourage otherfor some parts. Of course, considering how to best utilize ourequipment manufacturers to understand the importance ofcorporate strengths, I believe that the FS business will be in anthese efforts.

EHS REPORT

handles high-quality used equipment through certification based

MANAGEMENT REPORT

Listening to the opinions expressed by the various participants

HIGHLIGHT

Opinions voiced in the round table discussion

Internal Round Table Discussion:

The Potential of the Field Solutions Business

improvements.

extremely important and attractive position in 10 to 30 years
for covering the needs of the used equipment market, which is
SOCIAL REPORT

expected to expand.
Looking also at our utilization of human resources,
because the requirements of customers in the used equipment
market differ from those of customers buying new production
equipment, I believe the FS business is a very attractive field forveteran engineers, whose technological expertise and experience
are necessary for answering questions such as “How do wemaximize efficiency?” and “What are the issues involved when
we consider overall optimization?” They are also given theopportunity in this field to work with young engineers in creating
something new. With so many types of equipment in existence,

Kiyoshi Sunohara
General ManagerFSBU
Tokyo Electron Limited9