EH S R E P OR T

SOCIAL REPORTEHS REPORTMANAGEMENT REPORTHIGHLIGHT

Product-related Initiatives
for the Environment

Product-related Initiatives for the Environment

16

The TEL Group strives to reduce the impact of its products on the environment through various improvements, suchas reducing energy requirements during the usage phase of a product’s lifecycle, which is the stage when most of
the environmental impact occurs, and minimizing the use of regulated chemical substances.

Initiative for Products with Less Environmental Impact during Use
Approach to Reducing the Environmental Impactof Our Products
We believe it is important to promote environmentallyconscious designs, as we have clearly stated in the TELGroup “Credo and Principles on EnvironmentalPreservation.” We give top priority to the provision ofenergy-saving equipment and to reducing or finding
alternatives for the regulated chemical substances
contained in our product’s.
Organizations for Reducing Environmental Impact
Two working groups are in place to promote our efforts toreduce the environmental impact of our products: theChemical Substances Steering Team and the ProductWorking Team. The former team works to reduce orsubstitute the use of chemical substances subject toapplicable regulations in our equipment parts andcomponents. The latter, established under theEnvironmental Steering Committee, has developed aroadmap for each business unit to reduce its environmental
impact. In preparing the roadmap, the business units wererequired to address the following mandatory items:
reducing energy requirements in their products, addressing
chemical substance-related matters, reducing the numberof parts and processes required, reducing the use ofprocessing gases and liquid chemicals, and improving theenvironmental performance of existing equipment. Inaddition, they were encouraged to cover voluntary items
such as reducing the number of processes required forequipment installation. Progress toward achieving thedefined goals is being reviewed under the Group’s mediumto long-term plans. In addition, in January 2009, the TELGroup held its 11th Technology Exchange Conference at theTokyo Electron Nirasaki Arts Hall, which included sevenpresentations on environmental technologies. A poster area
was also set up at the conference to enable the divisions
and departments to engage in a lively exchange of ideas
and information.

Tokyo Electron Group Internal Technology Forum

Energy-saving Measures for Products
We are examining measures to reduce the energy that ourproducts consume when used and have set the five
following targets: (1) Reduce energy used by the productitself; (2) Reduce energy used by peripheral devices; (3)TOKYO ELECTRON Environmental and Social Report 2009Manage the product in an energy-saving manner; (4)Reduce energy used by the clean room; and (5) Manage theclean room in an energy-saving manner (planned operationand proper management). The energy-saving managementof the clean room necessarily involves our cooperation withcustomers and facility manufacturers. Such close
cooperation will allow us to further reduce the energy
consumed by our products during their use phase. Inaddition, we are advancing the policy of accurately gauging
the amount of energy consumption of devices that use
electricity, water, dry air, cooling water, and exhaust heat,
as well as supplementary devices (e.g. vacuum pumps andcooling equipment), by employing the SEMI S23*
guidelines.
*SEMI S23: A guideline for energy conservation for semiconductor
production equipment issued by the Semiconductor Equipment andMaterials International (SEMI), an international industry organization ofsemiconductor/FPD production equipment and material manufacturers■ Environmental Roadmap Items for Each Division
1. Reducing the energy requirements in our products
2. Addressing matters related to chemical
substances
3. Reducing the number of parts and processes
required
4. Reducing the use of processing gases and liquidchemicals
5. Improving the environmental performance ofexisting equipment

ISMI Energy Conservation AwardAt the Energy Conservation Workshop held on October 20,
2008 in Austin, Texas, under the sponsorship of theInternational SEMATECH Manufacturing Initiative (ISMI),TEL received the 2008 ISMI Award for Excellence inEquipment Energy Reduction. The ISMI consists of 14
leading semiconductor manufacturers from Japan, theU.S., Europe, and Asia; and its mission is to improve theproductivity of semiconductor manufacturing. Receiving
the Excellence Award recognizes TEL’s efforts with regard
to energy conservation for its
products and serves to motivate
further efforts in this area.

ISMI Award for Excellence inEquipment Energy Reduction

A single-wafer deposition system is a device that uses heat and plasma to form
metal or barrier films. The system utilizes chemical vapor deposition (CVD) todeposit and form thin films. It uses a vacuum pump to maintain a vacuum state
inside its chamber. We were able to reduce the pump size to an optimal level byrethinking the entire vacuum-pumping system. As a result, the electricity usedby the pump itself was significantly reduced. Furthermore, the reduction inpump size lowered the space requirement, decreasing the amount of resources
required, which in turn reduced cost and improved productivity through ashorter exhaust time.

■ Improvement in Single Wafer Deposition System Trias™

Product-related Initiatives
for the Environment

Initiative for Single Wafer Deposition SystemUse of a compact pump reduces
electricity usage by 50%.

New compact
pump

HIGHLIGHT

Conventional
pump

Improvements in Cleaning Systems■ Reduction in the IPA concentration in the exhaust
100%
81.6% reduction

MANAGEMENT REPORTWith regard to cleaning systems, TEL is implementing measures to reduce
VOC* emissions, which are considered one of the most important issues in thesemiconductor industry and are tightly regulated under Japan’s Air PollutionControl Law. IPA (isopropyl alcohol), which is used in cleaning systems, isa volatile organic solvent. A large volume of IPA is used, and because of its
high volatility, its concentration level in the exhaust discharged tends to behigh. In order to deal with this issue, TEL installed an IPA scrubber that sprays
pure water, refrigerated cooling water, or tower-cooled cooling water, thereby
reducing the IPA concentration in the exhaust.

18.4%*VOC (Volatile Organic Compounds): A major cause of photochemical oxidants and suspended particulatematter, thought to cause pollution and damage health.

Beforeimprovement

After
improvement
EHS REPORT

Improvements in Coater/Developer■ LITHIUS environmental program

Reduced exhaust forprocesses

Chemical consumption
reduction

Direct exhaust of chamberStandby power reduction

SOCIAL REPORT

For its coater/developer, TEL is taking actions to reduce the environmental
impact from the systems that have already been delivered to customers.
Targeting the CLEAN TRACK™ LITHIUS™ Series released in 2004, TEL isoffering customers a package of six enhancements (including direct exhaust ofchamber, standby power reduction, separated and improved utilization ofcooling water, N2 reduction, and motor current reduction) as a LITHIUS
Environmental Program. We are also examining ways to cut the volume of resist
and developing solution used and also reduce exhaust for processes. Ourestimate shows that implementing all these measures would reduce the energy
consumption by approximately 15%. We are also looking to expand theseenhancements to include other systems, and are working on a VOC-reduction
program.

Separated and improved
utilization of cooling water
Motor current reduction
N 2 reduction

TOKYO ELECTRON Environmental and Social Report 200917

EH S R E P OR T

SOCIAL REPORTEHS REPORTMANAGEMENT REPORTHIGHLIGHT

Product-related Initiatives
for the Environment

Product-related Initiatives for the Environment

Initiatives Related to Regulated Chemical Substances in Products
Reducing the Use of Regulated Chemical
Substances in Equipment
Against the backdrop of growing concerns over the impactthat harmful substances contained in parts and materials
have on the environment and ecosystems, many countries
are working to regulate the use of such substances inautomobiles and electrical products. The TEL Group is also
promoting measures to reduce the amount of regulated
chemical substances contained in its products. One of thebest-known regulations on chemical substances isEurope’s RoHS Directive1, which came into effect in July
2006. Although semiconductor and FPD production
equipment is currently exempt from the directive, we aretaking proactive measures to comply with it. We havealready met all of the requirements for China RoHS2, which
was issued in March 2007 and applies to TEL’s products.
In order to meet regulatory requirements in a prompt
manner, we established the Chemical Substances Steering
Team, made up of representatives from TEL’s headquarters
and manufacturing subsidiaries. The team sharesnecessary information and investigates the use ofregulated chemical substances in our products, incooperation with our suppliers, and also promotes
alternatives to replace regulated chemical substances. In
addition, the team uses a dedicated database to manage
the chemical substances contained in units and the parts
used in our products. In FY2007, we voluntarily developed
a timetable to phase out the use of the regulatedsubstances used in our products (excluding certainproducts). We had been scheduled to begin shipping andincreasing products containing fewer regulated chemical
substances in stages from the second half of FY2009, with98.5% or more of the products’ constituent parts meetingthe EU RoHS standards.
1 RoHS: Restriction of the use of certain Hazardous Substances in Electricaland Electronic Equipment
2 China RoHS: Officially name is “Management Methods for the Prevention andControl of Pollution from Electronics Information Products”■ Chemical Substances to be ReducedFirst Priority
Cadmium

Pigments, stabilizers, and resins

Hexavalent chromiumChrome plating

LeadSolders, paints, electrical wire coating, andfree-cutting metal

Mercury

Batteries and fluorescent lamps

PBBs

Resin parts

PBDEs

Resin parts

Second Priority
Substances designated as Level A substances in JIG*(We have already implemented measures for many of thesesubstances)* The Joint Industry Guide for Material Composition Declaration for ElectronicProducts (JIG) was prepared by Japanese, American and European private
trade associations. The Guide lists the chemical substances for whichconservation measures should be implemented. It classifies the substances
into Level A and Level B: 16 substances are listed as Level A substances,including cadmium, hexavalent chromium, lead, mercury, PBBs, and PBDEs.
More than 400 substances are listed as Level B substances.

18

TOKYO ELECTRON Environmental and Social Report 2009

System to Reduce the Use of Regulated Chemical Substances
The TEL Group operates a chemical substancesmanagement system that can be used to register and view
information on the use of chemical substances according
to individual parts. This system allows us to check withease whether parts to be used in our products containregulated chemical substances or not, and control themanufacture or shipment of products containing chemical
substances regulated by the EU/China RoHS and other law.

Dedicated database screen

Activities to Reduce the Use of Other Chemical Substances
With regard to chemical substances, most nations havebegun to implement the Globally Harmonized System ofClassification and Labeling of Chemicals (GHS)1 based on arecommendation from the United Nations. In order tocomply with this system, the TEL Group has begun toobtain the chemical substance safety information (e.g.,MSDS) classified and created according to the GHS andhas made it available within the Group, and has also begun
distributing labels for chemical substance containers.
In Europe, companies will be increasingly required tofulfill their responsibilities as manufacturers and follow theprinciple of taking precautions, under such regulations as
REACH2 (which mandates evaluation, registration,authorization, and restriction of safety information on
almost all chemical substances sold on the market), thenew Batteries Directives3 and the PFOS 4 Directives. All ofthe TEL Group departments are making concerted efforts
to comply with these regulations, from those departments
engaged in product development, design and manufacture
to procurement, quality assurance, and environmental andsafety performance. We will also explore optimal
management of chemical substances by participating in theactivities of JAMP5 and other forums.
1 GHS: A globally harmonized system related to classification and labelingof chemicals, which provides globally standardized rules by harmonizing
various countries’ classification standards in terms of harmfulness andtoxicity of chemicals, labeling standards, and MSDS details.
2 REACH: Stands for “Registration, Evaluation, Authorization and Restrictionof Chemicals”; it is a set of rules related to the registration, evaluation,authorization, and restriction of SVHC (Substances of Very High Concern) in
particular. Manufacturers are required to provide information on the SVHC
contained in their products, as well as information to ensure the safe use of
their products.
3 The EU’s new Batteries Directive: Regulates the disposal of batteries thatare collected from used electronic and electric devices in compliance withWEEE. It also requires labeling with a designated recycling mark to facilitatecollection and recycling.
4 Perfluorooctanesulfonic acid (PFOS) has the property of being waterrepellent and waterproof and is used in resist, metal coating, and grease oil.
The EU’s directive, which came into effect on June 27, 2008, prohibits the useof PFOS in quantities larger than those designated (with some exceptions).
In Japan, a revision in the Chemical Substances Examination and Regulation
Law will place a total ban on the use of PFOS (resists and other products areexempt from the law with some restrictions).
5 JAMP: Joint Article Management Promotion-consortiumWe also estimate that our export-related logistics
activities emitted approximately 140,000 tons of CO2 inFY2008 and 30,000 tons in FY2009. In FY2009, reductions
in our total sales volume, coupled with an increase in thepercentage of FPD production equipment, most of whichuses marine transport, led to a sharp reduction in our CO2emissions. We estimate that increasing marine transport to60% of our total transport needs would enable us to meetour goal; and therefore we plan to suggest to ourcustomers that they switch to marine transport and alsoplan to optimize packaging methods.

■ Percentage of overseas shipments thatuses marine transport (%)
17%
40%
FY2008 actual

60%
83%
Air transport

Green Packaging
Products of the TEL Group are precision machines, whichmeans that they require special packaging to maintain theirprecise and clean condition. We use wooden frames andsteel-reinforced corrugated cardboard as packaging
materials. As a measure to reduce the resources used inpackaging, we have begun using reusable corrugatedcardboard boxes when shipping large parts to customers
inside Japan. After the parts are delivered to customers,
the reusable packaging materials are returned to us forreuse. We also collect casters used for moving products
and bring them back to our plants for reuse, thereby
reducing resource usage.

EHS REPORT

Environmental Impact from ProductTransportation
In FY2009, TEL transported 16.91 million ton-km of freightin Japan (on a non-consolidated basis), resulting in 2,956
tons of CO2 emissions. In FY2009, marine transport
accounted for 15.7% of the total freight volume, which wasa significant jump from FY2008. Some of the contributing
factors behind this increase included the use of new
shipping routes and an increased use of ships fortransporting FPD production equipment, which isparticularly heavy. We estimate that this modal shift helped
reduce CO2 emissions from our logistics activities by 430
tons.

Marine transport

MANAGEMENT REPORT*Modal shift: A shift in the mode of transportation (e.g. switching fromconventional freight transportation by truck or aircraft to marine and railtransportation)

FY2016 goal

HIGHLIGHT

Approach to Environmental-friendly Logistics
In terms of logistics-related environmental initiatives, we
set up the Logistics Working Team under theEnvironmental Steering committee, and the relevant
divisions and departments have created action plans andare implementing them.
In April 2006, Japan’s Act Concerning the Rational Useof Energy was revised and regulations on logistics werestrengthened, with the aim of reducing global warming.
Accordingly, there is now greater demand for reducing theenvironmental impact of logistics operations. In response,
the TEL Group has been actively reducing theenvironmental impact caused by the transport of its
products. For example, we are making a modal shift* fordomestic and overseas transport and adopting packaging
methods with less environmental impact.
CO2 emissions from the TEL Group’s logistics activities
were estimated to account for 6% of the total CO2emissions in the lifecycle of our products in FY2008, whichis still a significant amount. We will continue to promotemeasures to reduce emissions in order to achieve ourenvironmental commitments.

Product-related Initiatives
for the Environment

Logistics-related Initiatives■ CO2 emissions from logistics operations inJapan and trends in the percentage of marinetransport(Tons)

(%)

4,712

2,956

SOCIAL REPORT

15.7

Reusable corrugated cardboard packaging

2.700’08
CO2 emissions’09(FY)

Marine transport
TOKYO ELECTRON Environmental and Social Report 200919