Symmetry S3
EBSD Detector
Fast and versatile analyses with theultimate all-in-one EBSD detector
The Symmetry S3 electron backscatter diffraction (EBSD)
detector is the 3rd generation detector in the groundbreaking Symmetry product line. The S3 combines
unparalleled analysis speeds (> 5700 patterns per second– pps) with all of the unique features that ensure marketleading performance without any compromise.
The Symmetry S3 is the only EBSD detector that is designed
to deliver excellent results from every type of sample. Theunique lens-free fibre-optic coupled camera system resultsin exceptional sensitivity for all analytical conditions, fromthe analysis of beam sensitive materials to routine, highspeed characterisation. The high pixel resolution combinedwith guaranteed sub-pixel distortion levels make the S3
ideal for detailed strain and high-precision EBSD work, while
the software-controlled detector tilting ensures optimised
acquisition geometries for every size and shape of sample.

The Symmetry S3 combines exceptional
sensitivity with extreme speed

Maximising throughput withoutcompromise
The extreme analysis speed of the Symmetry S3 enables
grain size characterisation to international standards inunder 60 seconds. The excellent pattern resolution atthe maximum speed (156x128 pixels) and the sensitivity
delivered by fibre-optics ensure that rapid analyses do notcompromise on data quality or SEM resolution.

36 s

Grain size map of a duplex stainless steel collected in 36s (2352 grains, ASTM Grain
Size 12.6). Inset – typical EBSD pattern quality at maximum analysis speeds.

• 6 different camera modes providing ultimate flexibility• Up to 1244 x 1024 pixel image resolution• Acquisition speeds > 5700 indexed pps at 156 x 128
pixel resolution• Unique lens-free fibre-optic coupled camera systemdelivering market-leading sensitivity• Guaranteed sub-pixel distortion for high precision EBSD
work (including HR-EBSD)• Software-controlled detector tilting, ensuring optimal
geometry for every sample• Unique proximity sensor system (patent pending) toprevent collisions and minimise downtime• Optional integrated 5-diode forescatter detector (FSD)
imaging system© Oxford Instruments plc, 2022.

Grain relative orientation deviation (GROD) angle map of a deformed and partially
recrystallised Ni superalloy sample. Measurements were collected in 14 minutes at
5,763 pps, using a beam current of 21 nA.

Ultimate versatility: perfect results fromevery sample
The Symmetry S3 detector is designed to analyse withoutcompromise. Its unique software-managed screen
elevation control ensures that the detector can be safely
positioned at the optimum geometry for every sample andfor any measurement, including for transmission Kikuchi
diffraction (TKD).

See your samples in a different light
5 optional forescatter detectors (FSDs) deliver fast andflexible sample imaging:• Lower 3 diodes for crystallographic and topographic
contrast (or darkfield when performing TKD) with falsecolour option• Upper 2 diodes for Z-contrast• Up to +/- 22 mm motorised elevation movement• Autocalibration ensures perfect indexing at anygeometry• Proximity sensor system detects and prevents potential
collisions before they occur – saving moneyand downtime

False-colour forescatter detector image of an additively manufactured Ti 64 alloy
sample, highlighting crystallographic contrast in α-Ti grains.

The benefit of the Symmetry S3's screen elevation control. Left – standard position witha small sample at a short working distance. Right – large sample at a longer working
distance, with the Symmetry S3 tilted downwards to maintain the ideal sample-detector
geometry and to avoid shadowing the energy dispersive X-ray spectrometry(EDS) detector.

Symmetry S3 EBSD Detector Specifications
Resolution

Max 1244 x 1024

Speed

> 5700 pps (at 156 x 128 pixelresolution)

Symmetry S3’s megapixel resolution and guaranteed subpixel distortion make it the ideal detector for high precision
EBSD analyses:Optics

Lens-free fibre-optic coupling

CMOS Sensor

Bespoke CMOS sensor developed
and optimised for EBSD

• Proven performance for HR-EBSD investigations

Distortion

Guaranteed < 1 pixel• Real-time orientation precision down to 0.01° using
AZtec’s patented Refined Accuracy indexing

Sensitivity

Max 1000 pps / nA

Full 1244 x 1024 resolution EBSD pattern from a cubic ZrO2 phase

Phosphor Screen High sensitivity all-round phosphor,matching shape of CMOS sensorCollision
ProtectionProximity sensor collision avoidancesystem (patent pending)Elevation

Motorised screen elevation control,
up to +/- 22 mm movement

Insertion

Fully motorised, high speed and highprecision insertion / retraction

Interface

Bellows-type for high vacuum
integrity

FSD System

Optional 5 diode FSD

High T Screen

Optional, high-sensitivity screen with
optical interference infra-red filter

HandsetOptional – insertion / elevation
control

Visit nano.oxinst.com/Symmetry-S3
The materials presented here are summary in nature, subject to change, and intended forgeneral information only. Performances are configuration dependent. Additional details areavailable. Oxford Instruments NanoAnalysis is certified to ISO9001, ISO14001 and ISO45001.
AZtec, Symmetry, Ultim, Tru-I and Tru-Q are Registered Trademarks of Oxford Instruments plc,
all other trademarks acknowledged. Patents: US11195692B2, US9671354B2.
© Oxford Instruments plc, 2022.
All rights reserved. LITR511962-01© Oxford Instruments plc, 2021. 2