Environment
The TEL Group aims to solve environmental issues through our leading-edge technology and services underslogan of “Technology for Eco Life.” We strive to contribute to the establishment of a sustainable society by
reducing the Group’s impact on the consumption of resources, on biodiversity and on climate change by taking
actions that both directly and indirectly contribute to the protection and conservation of the environment.

CO2 Emissions across the Value Chain
With the recent trend among businesses toward measuring and controlling not only their direct greenhouse gas (GHG) emissions but also
CO2 emissions across their value chains (linkages for providing products and services to customers; chains of activities such as procurement,
development, production, sales and services), the TEL Group measures these emissions in compliance with international GHG accounting
standards, the GHG Protocol.

Scope 3 downstream
Not from the TEL Group

3,191 kilotons
Scope 3 upstream
Not from the TEL Group

Scopes 1 & 2
Own emissions

377 kilotons 160 kilotons
End-of-life
treatmentof sold products

1 kilotons

EmployeecommutingDirect emissions
from fuel &gas use15 kilotons

Scope 1

Purchased
goods & services

10 kilotons

Business travel

7 kilotons

304 kilotons

Indirect emissions
from electricity use& heat purchase

Capital goods
Waste generated inoperations

33 kilotons
Fuel- &
energy-related Transportation &distribution
activities(upstream)

12 kilotons

Scope 2

1 kilotons

150 kilotons

Use of sold products

3,122 kilotons

Transportation &distribution(downstream)

68 kilotons

5 kilotons

The GHG Protocol categorizes GHG emissions across the value chains into three scopes:
Scope 1: Direct GHG emissions from use of fuel and gas owned or controlled by the company
Scope 2: Indirect GHG emissions from use of electricity, steam and heat purchased by the company
Scope 3: E missions from corporate value chains excluding scopes 1 and 2, such as product transportation, employee business travel,and major outsourced production processes
Scope 3 is divided into upstream activities, which include emissions associated with purchased or procured products and services, anddownstream activities, which include emissions associated with sold products and services.

The TEL Group’s direct emissions associated with fuel and gas use (scope 1) and emissions from electricity use and heat purchase (scope 2)
add up to 160 kilotons, or about 4% of the total. Indirect emissions (scope 3), which are not from the TEL Group, total 3,568 kilotons, or about
96%. In particular, use of sold products, which is one of the 10 categories related to the TEL Group, makes up 84% at 3,122 kilotons. Therefore,
the TEL Group is stepping up efforts to reduce CO2 emissions, including reducing the energy consumption of equipment and peripheraldevices, ensuring the effective operation of equipment systems, and promoting the energy-saving operation of customers’ factories, and willcontinue its initiatives to reduce environmental impacts for the development of a sustainable society.

22Environment

Environmental Management
EHS promotion framework

Environmental activity promotion framework
In order to promote environmental activities across the Group, Tokyo Electron has
established the EHS Promotion Center at its headquarters. Executives of Group
companies appoint members of the Product Environment Value Meeting, the ProductEnvironment Compliance Meeting, and the Operation Environment Value Meeting, all ofwhich carry out activities to achieve environmental goals. Meanwhile, the biannual EHS
Meeting checks the progress toward the environmental goals for continued improvement.
Since 1997, the TEL Group has been working to obtain certification for the
ISO 14001 environmental management standard, primarily at its manufacturingsubsidiaries. Currently, eight locations are certified and we will continue to acquire andmaintain the certification.
As a result of checking and maintaining compliance with environmental laws, emission
standards, and other voluntary standards, the TEL Group was not involved in any
environmental incidents or accidents, was not found to be in violation of any environmental
law, and was not subject to any related legal proceedings in fiscal year 2015.

Environmental education
Recognizing the importance of complying with environmental laws and regulations andreducing environmental burdens, we established an education program for workinglevel managerial personnel in fiscal year 2015. We held lectures on the importance of
manufacturing environmentally friendly products—explaining related environmental
laws and regulations, statutory procedures, and penalties contained in them—and how
to save energy when using products, as well as how to save resources and recycle.
Three hundred and thirty people took the course. In fiscal year 2016, we will launch theprogram at seven locations outside Japan and provide web-based education in orderto reach more participants.

Biodiversity
Business activities of the TEL Group do impact biodiversity while also benefitting fromit. Based on our recognition of this, we are making efforts to conserve biodiversity andimprove the related framework.
The goal of biodiversity conservation activities in fiscal year 2015 was to holdecosystem tours at least twice at plants and offices in Japan. The Yamanashi Plant held alecture on biomimicry, in which participants observed how the owl’s powder down repels
water and learned about the various properties of spider silk. Observing nature in this way
provided participants with opportunities to find helpful hints for their own daily operations.
CO2 emissions from these programs and the related travel were carbon offset1.
We will continue activities for biodiversity conservation.
1

Representative Director,
President & CEO
General Manager,
Development &Manufacturing Division
EHS Meeting
Equipment
SafetyPromotion
Meeting

Work
SafetyPromotion
Meeting

Number of participants in designfor the environment program

330

persons

The design for the environment program
was established to provide customers
with products that are compliant with laws
and regulations and designed to reduce
environmental impact. In fiscal year 2015,
330 persons participated in the program.

Carbon offset: The making of a monetary investment in an activity elsewhere that abates greenhouse gas
emissions to compensate in whole or in part for GHG emissions from one’s own activities.

Ecosystem tour

Topics <Environmental Debriefing>

Since 2009, the Tohoku Plant has invited its neighbors (representatives of community
associations) as well as representatives of the local business, government andacademic communities to its Environmental Debriefing for the Local Community to
exchange opinions and deepen mutual understanding. The environmental and social
commitment is explained, goals and achievements of the TEL Group are reported anda tour of plant facilities and production lines is provided. As of fiscal year 2015, a total of
137 people have participated in the debriefings.

23

Product
Product
Operation
Environment Environment Environment
Value
Compliance
Value
Meeting
Meeting
MeetingEnvironment

Product Initiatives
Initiatives to prevent global warming

Major energy-saving models

Based on life cycle assessment, the TEL Group is lowering the energy consumptionof its products to reduce the environmental impact of product use at the premises of
its customers. In fiscal year 2014, the TEL Group achieved a 50% reduction in energy
consumption by its major products (per wafer; compared to fiscal year 2008). For totalenergy assessment, the TEL Group assessed electricity, water, nitrogen, dry air, andexhaust in electricity equivalents (compliant with SEMI S23 guidelines). With a reductionin the energy consumption of products, the percentage of energy-saving models1 as aproportion of total sales increased to 72% in fiscal year 2015.
In this fiscal year, the TEL Group set the goal of reducing energy and pure water
consumption by 10% from the fiscal year 2014 level by fiscal year 2019. To that end,
we will promote environmentally friendly manufacturing with the development of newtechnologies for further reduction of energy, water and chemical substances as well aswith proactive measures against greenhouse gases.
1

Thermalprocessing system
TELINDYTM PE

Plasma etch system
Tactras TM Vigus TM

Coater/developers
CLEAN TRACKTM
LITHIUS ProTM Z

Based on in-house standards

Average energy consumption of products and proportion ofenergy-saving models among total sales

Single wafer metallization system
Trias e +TM EX -IITM TiN

(%)

100.0

93.2
68.7

72.0
60.2

27.0

55.7

38.0

52.0

Single wafer cleaning system
CELLESTATM -i

52.0

44.7

40.2

40.2

2014

2015 (FY)

7.0
2008

2009

2010

2011

2012

2013

Gas chemical etch system
Certas LEAGATM

Average energy consumption (per wafer; FY2008 level as 100%)
Proportion of energy-saving models among total sales (data disclosure started in FY2010)
Scrubber system
NS300Z

Initiatives to reduce environmental impact of products
Equipment category

Major reduction

Product

Major initiative

TELINDY TM PE

Introducing an energysaving heater◎

Plasma etch system

TactrasTM VigusTM

Improving high-frequency
power efficiency
Operating sleeping modeof a chiller

◎

○

○

○

○

Coater/developers

CLEAN TRACK TM
LITHIUS ProTM Z

Improving productivity
with high throughput

○

○

○

○

○

Triase +TM EX-IITM
TiN

Lowering temperatureprocess
Improving productivity
with high throughput

◎

○

○

Single wafer plasma
treatment system

Triase +TM SPAi

Not using a chiller
Optimizing the exhaustsystem◎Single wafer cleaningsystemCELLESTATM -i

Improving productivity
with high throughput○

Gas chemical etchsystemCertas LEAGATM

Improving productivity
with high throughput◎

Scrubber system

NS300Z

Improving productivity
with high throughput

PrecioTM series

Reducing dry air with dew
point monitoring

Thermal processing
systemSingle wafer
metallization system

Wafer prober

Electricity Water○

N2

Dry air Exhaust○○

Wafer prober
PrecioTM series○

Chamber parts

○
○

○

◎

○

Chamber overview○

Plasma electrode
Wafer

○
○

◎

Fine ceramic
Fine ceramic
deteriorated with use

Initiatives to reduce waste
The TEL Group is making proactive efforts to reduce waste generated by its products.
Etch systems require periodic replacements of thermal or other parts inside thechamber, as they deteriorate due to continuous plasma processing. The TEL Grouphas made it possible to use deteriorated chamber parts repeatedly by re-coating themwith fine ceramic, which minimizes waste generation and reduces costs.
24

Fine ceramic is
re-coatedEnvironment

JAMP AIS survey with suppliers in Japan started in

Initiatives for chemicals contained in products
For the manufacturing of environmentally friendly products, the TEL Group has built asystem for managing chemical substances contained in products. We collect information
about the laws and regulations of every country at an early stage to take appropriate
actions for legal compliance. For example, when any substance of very high concern(SVHC) is present in our products at 0.1% or higher, we submit the information as
required by the REACH1 regulation. We also provide chemical safety data sheets((M)SDS) in accordance with the GHS2 regulations.
In addition to legal compliance, we also set our own standards to reduce chemical
substances. Although TEL Group products are not subject to the EU RoHS3 Directive,
we have implemented measures to manufacture equipment that is at least 98.5%
composed of substances that meet the directive since 2006. As a result, nearly all ofour products now comply with the directive. Furthermore, to become more effectively
compliant with regulations, including the EU RoHS Directive, REACH, and the China
RoHS, we started a survey with our suppliers in Japan on chemicals contained in
products based on the JAMP AIS4 in April 2015.
We will continue to promptly identify and appropriately respond to all laws andregulations in every country, thereby promoting our global efforts to reduce harmful
chemical substances.

April 2015

REACH: Registration, Evaluation, Authorisation and Restriction of Chemicals. A regulation pertaining to theregistration, evaluation, authorization and restriction of chemicals.
2
GHS: Globally Harmonized System of Classification and Labelling of Chemicals.
3
RoHS: Restriction of the use of certain Hazardous Substances in electrical and electronic equipment. The
RoHS Directive restricts the presence of lead, mercury, hexavalent chromium, polybrominated biphenyls(PBB), polybrominated diphenyl ethers (PBDE), and cadmium in electrical and electronic products exported
to Europe.
4
JAMP AIS: Article Information Sheet (AIS) promoted by the Joint Article Management Promotion-consortium(JAMP). This sheet is used to deliver basic information on regulated chemical substances.
1

Logistics initiatives
To reduce environmental impacts caused by the transportation of products, the TELGroup is promoting modal shift5 for domestic and overseas transport and adopting
packaging methods with a smaller environmental footprint. In fiscal year 2015, we achieved
reduction in both CO2 emissions and costs by improving the load factor of trucks with
the introduction of shelved trolleys. The trolleys have been used for the shipment of FPD
production equipment, to the shipping of semiconductor production equipment.
In fiscal year 2015, CO2 emissions associated with domestic and international
product logistics increased to 73 kilotons, up about 35% from fiscal year 2014. The
share of marine transportation used for exports decreased by 11 points from fiscal year
2014 to 31%. This is because shipment of semiconductor production equipment by air
increased from the fiscal year 2014 level.
We are committed to continuing efforts to reduce environmental impacts.
5Modal shift: A shift in the mode of transportation. Specifically, switching from conventional freighttransportation by truck or aircraft to means that have a lower impact on the environment, such as marine
and rail.

Topics <Global Cooperation with Industrial Organizations>

Since the 1990s, the TEL Group has been proactive in its global cooperation withindustrial organizations in the areas of EHS and CSR. At SEMI6, we serve as a member ofa meeting that manages EHS activities and participate in commissions on environmental
and safety laws and regulations to introduce energy-saving, resource-saving, and safety
activities and promote standardization. At SEMICON Japan, an industrial exhibition,
held in December 2014, we organized a sustainable forum as a central coordinator andintroduced Japanese companies’ technologies and products related to environmental
safety to representatives of SEMI Taiwan.
6

SEMI: A global industry association of companies that provide production equipment, materials andservices for semiconductors, flat panel displays (FPDs), nano technology, micro-electromechanical systems(MEMS), photovoltaic power generation, and other related technologies.

25

CO2 emissions from logistics and the
proportion of marine transportation(Thousand tons)

42.2

37.8
32.0
70

4

66

2011

31.0

25.9
66

73
60

3

63

2012

2

54

68

58

2013

International logistics

5

3
51

2014

2015

Domestic logistics

Proportion of marine transportation amonginternational logistics (%)(FY)

Environment

Electricity consumption(Million kWh)

Plant and Office Initiatives

230.1

223.6

223.0

221.6

208.7

Initiatives to prevent global warming
At the TEL Group, each plant and office sets the goal of reducing energy consumption
by at least 1% year on year based on a metric of its own choosing. Initiatives to achieve
the goals include energy-saving operation of clean rooms, optimum temperature
settings for office cooling and heating, and introduction of equipment with leading-edgeenergy-saving efficiency.
Photovoltaic power generation systems have been adopted at some plants andoffices in and outside Japan and the renewable energy they generated in fiscal year
2015 totaled 4,559 MWh, enough to power about 1,260 homes1. Meanwhile, Tokyo
Electron U.S. Holdings, Inc., which has purchased green electricity since 2001,
purchased 2,405 MWh of green electricity in fiscal year 2015.
With these efforts, 11 of the 12 TEL plants in and outside Japan that set their goals
achieved them in fiscal year 2015. Group-wide power consumption in fiscal year 2015
was 274 GWh, down 7% year on year, and CO2 emissions from energy consumption2
was 160 kilotons, up about 2% year on year. Using the same emission factor forelectricity consumption for fiscal year 2011, CO2 emissions per unit of energy consumed
in Japan in fiscal year 2015 decreased by 9.5% from fiscal year 2011.
Based on the assumption that the electricity consumption of one home is 3,600 kWh/year
For the emission factor for electricity consumption in Japan in fiscal year 2015, we used adjusted emission
factors for individual electric power providers. For the emission factor for electricity consumption overseas,
we used estimated factors calculated by the Federation of Electric Power Companies of Japan based onvalues published by the International Energy Agency (IEA).

Example of initiatives
The Koshi Plant, one of our manufacturing sites, uses a turbo refrigerator to coolwater and a heat recovery chiller. In fiscal year 2015, the plant replaced these typesof heat source equipment with high energy consumption with equipment with highenergy efficiency, consequently halving its energy consumption. It is estimated that the
replacement cost will be recovered within five years.
●

2012

Overseas

2013

2014

2015 (FY)

CO2 emissions from energy consumption(Tons)

117,396

120,913

125,92136,31734,51387,124

84,84723,316

15,063

12,046
2011

2012

Japan

Overseas

2013

2014

2015 (FY)* CO2 emissions in fiscal year 2012 totaled 87,124 tons
minus a 50,000-ton reduction brought about throughthe use of a domestic clean development mechanism(the mechanism for CO2 emissions reduction that allows
small and medium-sized businesses to receive funding
and technology from large businesses and trade thereduced amount of emissions as emission credits)

CO2 emissions in Japan with the sameemission factor for electricity
consumption for fiscal year 2011
(Tons)

84,847

82,13781,067

81,592

76,791

2011

2012

2013

2014

2015 (FY)

1,058

1,043

(Thousand m3)

Fluoride

pH

Water Pollution Control Act

8.0 mg/L or lower

5.8‒8.6

Yamanashi Prefecture Pollution Control Ordinance

1.0 mg/L or lower

5.8‒8.6

Hosaka Plant’s Own Standard

0.8 mg/L or lower

6.0‒8.4

1,078

315

199

300

297

327
613

531

506

466

471

416

296

64 30170 312104 290

300

2012

2011

2013

2014

503

2015

Industrial water in Japan

Tap water in Japan

Groundwater in Japan

Overseas use

Exhaust fromthe unit

Propanegas
OxygenExhaust fromprocessing
Water

(FY)

Usable water(recycled water)

Filtration/RO
facilities
Recovery
Gas after
combustion

Circulating water tankCombustion-type
detoxifying apparatus

Drain tank
Wastewater(below thestandard)

Wastewater Fluorine ion/
pH check
Combustion-type
detoxifying wastewater
recovery system

Effluent treatment facilities

26

Wastewater from the facilities

Example of initiatives
Combustion-type detoxifying apparatuses that render exhaust from semiconductor
production equipment harmless use a large amount of water. The Hosaka Plant, whichused to treat all such water as effluent, put in place a mechanism to separate usable waterand return it to the apparatuses for reuse, reducing water consumption by 70%. Wastewater
above TEL’s own effluent standard1, which is stricter than statutory standards, is properly
processed at effluent treatment facilities before being discharged to rivers. It is estimatedthat the renovation cost will be recovered within one and a half years.
●

1,122

1,026

Wastewater (above the standard)

The TEL Group has set a goal of keeping water consumption at the same level or belowthat of fiscal year 2012 based on the basic metric set by each plant. In fiscal year 2015,
we achieved 10 out of the 15 goals set at our plants in Japan and overseas. Continued
efforts to achieve these goals include installing water-saving devices, watering grasswith rainwater, and ensuring intermittent operation of cafeteria faucets. Consequently,
we reduced water consumption by approximately 1% year on year to 1,043,000 m3
in Japan. Outside Japan, water consumption totaled 503,000 m3 in fiscal year 2015,
down 18% from 613,000 m3 in fiscal year 2014, when water consumption at four newly
acquired companies was added.

Own standard

65.6

Water consumption

Initiatives to reduce water consumption

1

2011

Japan

Scrubber

2

27.8

20.5

Combustion unit

1

72.2
40.5

Environment

Initiatives to reduce waste
The TEL Group is reducing waste, which includes collecting waste by type andchanging production processes to those that do not generate waste, while recycling
as much generated waste as possible and disposing of the remaining non-recyclable
waste in an appropriate manner. In fiscal year 2015, the amount of incinerated andlandfill waste generated by the TEL Group was 94 tons, down 45% from fiscal year
2014. Having defined a plant or office where incinerated and landfill waste makes up
less than 2% of its total waste as a zero emission plant/office, the TEL Group achieved
zero emissions at all Group plants in Japan in fiscal year 2015. With these initiatives, therecycling rate1 at plants in Japan in fiscal year 2015 was 98.9%, achieving the goal of
maintaining a recycling rate of 97% or more in Japan for nine consecutive years since
fiscal year 2007. Also, in fiscal year 2015, the recycling rate at TEL Group plants andoffices outside Japan improved from the previous year to 88.2%.
1

98.1

97.4

97.3

98.0

98.9

Target: Maintain recycling
rate of 97% or more

331
245

215

172
94

2011

2012

2013

2014

2015 (FY)

Incineration and landfill (Tons)

Recycling rate: Recycled amount / Amount of waste generated × 100

Volume of PRTR Class I designatedchemical substances handled (Japan)

Management of chemical substances(Kg)

At the TEL Group, we use chemical substances mainly in the development andmanufacturing phases of our products. We consistently monitor and manage the use
and discharge amounts of chemical substances regulated under the Japanese PRTR2
law. Additionally, whenever we introduce a new chemical substance or change how
an existing substance is used, we check for environmental, health and safety risks,
and take the necessary measures before adopting the new substance or method. We
also make sure to properly dispose of hazardous substances after use through either
specialist waste disposal contractors or using our in-house processing equipment.
2

Recycling rate and generation ofincinerated and landfill waste (Japan)

PRTR: Pollutant Release and Transfer Register. A system under which the use of chemical substances that
may be hazardous to human health and the ecosystem, their release into the environment, and their transfer(contained in waste) off the original business premises are identified, tabulated and disclosed.

13,70914,361
1,617

169

11,732
5,071

12,6652,059 10,781
1,035

2,031

4,541

3,787

8,469

2,408

6,462

7,338

8,203
5,914

2011

4,144

2012

2013

2014

2015

(FY)

Hydrogen fluoride and its water-soluble salts
Methylnaphthalene
Other

Green Procurement
The TEL Group, in cooperation with our suppliers, is promoting initiatives to reduce
its environmental impact. We developed the Guideline for Green Procurement in 2001
and revised it in 2012. In order to monitor and reduce environmental impacts of our
suppliers, we have conducted green procurement surveys of our key suppliers since
fiscal year 2014. Our questionnaire survey in fiscal year 2015 focused on the threeareas of environmental initiatives at plants and offices, environmental compliance of
products, and environmental initiatives for products. We aggregated the survey data tounderstand the various situations across our supply chains and analyzed the outcomeof our efforts to reduce environmental impacts. We also evaluated the survey findings
on a six-point scale, finding improvement in 46% of the suppliers, and provided the
suppliers with feedback accordingly. Based on these results, we will continue to workwith our suppliers on environmental activities.

Topics <Recognized as a Green Choice patron by Austin Energy>

In April 2015, the Tokyo Electron US Holdings, Inc. (TEH) Austin site was recognizedby Austin Energy as a Green Choice Program patron for purchasing wind-generated
renewable energy that accounted for 20% of the total electricity consumption at TEH.
In the photo, Austin Mayor, Steve Adler (right) presents the recognition plaque to Tom
Campbell, Director of Support Services for TEH.

27

Environmental impact by suppliers(Fiscal year 2015 survey results)

Use/emissions
CO2 emissions

303 kilotons

Water consumption

3,029,000 m3

Total waste generated

42 kilotons

Recycled waste

22 kilotons