E HS Report

EHS Management
The Tokyo Electron Group revised its Credo and Principles on Environmental Preservation in FY 2007. We will conduct moreadvanced environmental, health and safety (EHS) activities based on the revised principles.

■ Basic Idea for EHS Activities

develop products in line with a clearly defined environmental

The Tokyo Electron Group conducts EHS activities based on the idea

roadmap for its products, while verifying the environment-friendlinessthat giving first priority to safety, health, and the environment will leadof the products at their design, manufacturing, and use stages.

to gaining trust from the public in its business operations and toAlso, it clearly states that the Group will disclose the results ofincreasing its profit on a long-term basis.

verification and other relevant information to stakeholders via

In TEL Values established in April 2006, in which we summarize
our values and action guidelines, we also state, “We give top priority to safety, health, and the global environment” and “We must haveawareness and accept responsibility for our behavior as respectfulenvironmental reports and other means.

TEL Values

Awarenessmembers of society.”■ Updating Tokyo Electron Group Credo and Principles
on Environmental Preservation
In May 2006, we revised Tokyo Electron Group Credo andPrinciples on Environmental Preservation that were established in1998, in order to show our direction and ideas more clearly. The
revised version makes it clear that the Tokyo Electron Group will

We must have awareness and accept responsibility for our behavior as respectful membersof society.
● We strictly comply with laws and regulations
and the rules of society.
● We give top priority to safety, health, and theglobal environment.
● We strive to become a company that local
communities hold in high esteem.

The Tokyo Electron Group Credo and Principles onEnvironmental Preservation

The Tokyo Electron Group Safety andHealth Credo and Principles<The Tokyo Electron Group Credo on Environmental Preservation><The Tokyo Electron Group Safety and Health Credo>

The Tokyo Electron Group believes that preserving the global environment and constantly improving
it is one of the most important objectives for mankind as well as its business. Based on this credo,
we are determined to expand our business by maintaining harmony with the global environment,
and thus win the trust of our many customers, shareholders, employees, and society in general.

Safety and health training are required for all employees and board members of the Tokyo ElectronGroup. Our profit and delivery date requirements must not be met at the sacrifice of human life andthe safety of our facilities and equipment.

<The Tokyo Electron Group Principles on Environmental Preservation><The Tokyo Electron Group Safety and Health Principles>

1. Continuous Improvement
The Tokyo Electron Group is conscious that products manufactured by the Group affect theenvironment, and based on this awareness, we, with our customers and suppliers, shallcontinually strive to minimize the impact of processes and operations on the environment. We
will develop products consistent with a clearly defined environmental roadmap for the Groupproducts, verifying the appropriateness of efforts during design, manufacture, and use. To further
confirm the appropriateness of such efforts, we will undertake activities that fully take into
account regulatory and industry requirements and the needs of customers and otherstakeholders.

1. Continuous Improvement
The Tokyo Electron Group is conscious that the factors that affect the safety and health ofcustomers and its employees exist at the stage of manufacturing, transportation, installation,use, maintenance, and service of its products. Based on this awareness, we shall continually
strive to improve the safety and health of our products and eliminate factors that affect humanhealth.

2. Knowledge
The Tokyo Electron Group continually strives to enhance its understanding of the impact that theGroup has on the environment and the responsibility that this entails. In addition, the Group aims
to gain a quantitative grasp of environmental factors, and the impacts resulting from its activities
and operations.

2. Knowledge
The Tokyo Electron Group continually strives to enhance its understanding of safety and healthand improve these conditions for all people working at its sites. To that end, the Group aims togain a qualitative and quantitative grasp of safety and health factors on its activities andoperations.

3. Performance Criteria
In addition to strict adherence to environmental laws, treaties, and agreements, the Tokyo
Electron Group will also promote conservation of the global environment by formulating activity
plans that take into account industry standards and various other environmental requirements.

3. Performance Criteria
As well as strictly observing mandatory safety and health laws, treaties, and agreements, theTokyo Electron Group strives to enhance its own safety and health management system andimprove global safety and health programs by the proactive establishment of aggressive safety
and health performance criteria.

4. Disclosure
In addition to ensuring that all employees clearly understand our environmental concepts,
policies, the state of company contributions toward environmental protection, and the state ofproduct-related environmental efforts, as well as improving levels of awareness, we will
disclose relevant information to those outside the company via environmental reports and othermeans.

4. Disclosure
The Tokyo Electron Group shares information about its safety and health credo, policies, and theprogress of its safety and health activities with all board members and employees, and will
publish its progress to the general public as the need arises.

5. Partnership
The Tokyo Electron Group actively participates in environmental protection activities practiced byits customers, suppliers, and communities.

5. Partnership
The Tokyo Electron Group participates in safety and health activities practiced by its customers,suppliers, and communities.

May 26, 2006November 27, 1998

14 TOKYO ELECTRON Environmental and Social Report 2006

■ EHS Promotion System■ EHS Risk Management

Our EHS system takes the form of three pillars: Product EHS,

At manufacturing subsidiaries of TEL, environmental and safety

which advances EHS priorities in our products in general;risks are estimated based on ISO 14001 and OHSAS 18001 stan-Customer-Site EHS, which advances those priorities during anddards for labor safety and health management systems. Theseafter start-up of our products; and Factory and Office EHS, whichsubsidiaries are implementing measures to eliminate higher risks first.

concerns our facilities.

Also, they are endeavoring to reduce some risks although they are

The Tokyo Electron Group companies, in particular TEL’s

not yet legally required to do so. We believe it most important tomanufacturing subsidiaries, started developing and implementing

implement anti-global warming measures in line with the Kyoto

environmental management systems based on ISO 14001 in 1997 toProtocol targets in future EHS risk management.

obtain ISO 14001 certification.

Tokyo Electron Group’s EHS Promotion System■ Abiding by the Law
The Tokyo Electron Group operates in strict obedience to the law. We

Global EHS Committee* Committee Chairman: President of TEL

closely track new environmental laws and emissions regulations
and for some substances have enacted independent standards

Factory andOffice EHS(EHS activities
in each region)

Customer-Site EHS

Product EHS

that are stricter than legally required. In FY 2006, we were not(EHS activities atcustomers’ facilities)(EHS activities for
the Group’s products)

subject to legal actions of any kind with regard to environmental accidents, violations, fines or complaints.

ISO-14001-Certified Plants and Offices■ EHS Training

Company namePlant/office name

Certification
date

Certification number

The Tokyo Electron Group offers EHS training under the principle ofTokyo Electron AT Limited.
Tokyo Electron FE Limited.

Sagami Office

December 10,
1110-1997-AE-KOB-RvA
1997“the necessary training for the necessary people.” Training courses

Tokyo Electron Tohoku Limited

Tohoku Plant

February 19,1118-1998-AE-KOB-RvA Rev.3
1998

are grouped by rank and are open both to Group employees and to

Tokyo Electron Kyushu Limited

Kumamoto/Koshi/Ozu/Saga Plants

March 26,
1998

1120-1998-AE-KOB-RvA Rev.2Yamanashi Plant(Fujii/Hosaka region)

May 15,
19981124-1998-AE-KOB-RvA

hires. In FY 2007, we changed the content of advanced safety

Miyagi Plant

March 1,
2005

01245-2005-AE-KOB-RvA

training according to recommendations made by SEAJ* and theYokohama Office

July 14,2004

EC04J0144

Tokyo Electron AT Limited

Tokyo Electron Device Limited

employees of cooperating companies who work at TEL’s facilities. An
EHS training program is also a required part of the curriculum for new

training is now in compliance with the SEMI Safety Guideline forTraining Semiconductor Manufacturing Equipment Installation,Maintenance and Service Personnel (S19-1102). In addition, in■ EHS Activities Monitoring Systemorder to further facilitate EHS activities, we provide training on

In order to strengthen our EHS management system, we areteam resource management focusing on communication within aincreasing the level of monitoring that verifies the system function andteam (see “TOPICS” on page 31).

results. Monitoring is done from multiple viewpoints within plants and* SEAJ: Semiconductor Equipment Association of Japan

offices, within the Group, or by third parties. We are especially
focusing on the Tokyo Electron Group Internal Assessment, a programof mutual EHS evaluations by representatives of many plants andoffices, which was instituted in FY 2003. In FY 2005, the three topics
of Product EHS Compliance, Product EHS Performance, andEnvironmental Performance and Legal Compliance were added to theearlier programs, which focused on labor safety and health. Thesemeasures have reinforced our ability to check the environmental
and safety performance of individual pieces of equipment as well as
to allow plants to check each other’s environmental management. Wewill increase the number of departments to be monitored and further

EHS Training● Special training(for internal environmental
auditors, special training on key
environmental aspects of work)● ISO 14001-based environmental
training (for manufacturing plants)● Training on environmental
activities (for office facilities)● Equipment-specific training● Customer-specific site entry
training● Safety training for employees
traveling overseas● Advanced safety training● Basic safety training

Environment

Health and Safety

strengthen the EHS activities monitoring system.

TOKYO ELECTRON Environmental and Social Report 200615