Eco Products

TEL's Eco Products
Using LCA techniques, TEL is efficiently reducing the environmental impact of its equipment.
Building equipment to energy-saving specifications also controls running costs.

Energy Used at Each Life Stage (CO2 Equivalent)*

Example of Product Energy Saving Measures(%)

UW8000 (old model)

UW200Z (new model)

TEL studies the environmental effects of all its products based

100.00on LCA principles. The following account is an example of saving energy in the development of a cleaning system.

98.56
51.55
50.78

1.100.46
New product (UW200Z)

Old product (UW8000)

0Efficiently reducing the environmental impact of equipment usage requires analysis of equipment characteristics. LCA-based evaluation of cleaning systems indicates that a great deal of energy is

0.25 0.22

Materials
manufacture

Manufacture/assembly

0.06 0.06
0.03 0.03
Equipment Equipment usage Disposaltransportation

Totalemissions*Where total emissions from UW8000
are taken as the standard.

Energy Used during Equipment Usage (CO2 Equivalent)*(%)

UW8000 (old model)

UW200Z (new model)

used for ultra pure water, power and ventilation of the system during

100.0

use. TEL has studied specifications for reducing these quantities atthe equipment development stage. When the new UW200Z is compared to the older product, UW8000, by converting environmental

51.5

51.1

impacts into CO2 emissions, we find that the total environmental im20.5

pact is cut in half and that, in fact, environmental impact was re-18.0

duced at every stage of the product's life. Guiding the development

17.3
15.1

of this new system was a policy to cut by half the amount of ultra
7.4

pure water characteristically used by cleaning systems. This led to an

4.5 3.9 4.4

effective reduction in environmental impact.
Moreover, regarding the choice of materials used in the system,
TEL opted to use SUS stainless steel, which takes little energy to produce, in place of aluminum, which requires a great deal. As a result,the energy now used is only 42% of that previously consumed.

02.7

Ultra
Power Ventilation Compressed Chemical
pure water
airliquid

3.7
1.5

0.5 0.5 0.2 0.2

N2 gasCoolant Consumables Emissions
water
during usage*Where total emissions from UW8000 are taken as the standard.

T O P I C S

Example of Oxidation/Diffusion System
Environmental Impact Reduction
TEL is also using LCA techniques to mitigate environmental impact in areas other than cleaning systems. Oxidation/diffusion sys-Proportion of CO2 Emissions Accounted forby Each Material During usage
Old (UW8000)
New (UW200Z)

tems, which are used to produce semiconductors, consume considerable energy during thermal processing at hot temperatures. In ad-Iron:9.4%
Stainless steel:9.0%
Other:
17.2%

Iron:
16.3%

Electronic components:
10.3%

Electroniccomponents:
24.5%

Aluminum:23.6%

Quartz:27.0%

Teflon:3.3%

11TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Other:
12.6%

built that enables coolant water to absorb heat from the heater,
rather than allowing the heat to radiate into the surrounding room.
Because semiconductor production takes place in clean rooms

Aluminum:
11.2%

that must be kept immaculate and at a constant temperature, displacing extra heat into the room's interior leads to energy waste

Quartz:30.3%
PVC:
2.4%

dition, the equipment must be cooled. For this reason, equipment isCopper:0.3%

PVC:1.1%

Fluorinated resin:1.5%

when air conditioning is used. TEL is undertaking energy-saving
measures suited to this production environment.