E H S R e p o rt

Pl a n t a n d O f fi c e I ni t i a t ive sfo r t h e E nvir o n m e n t

Plant and Office Initiatives for the Environment
The Tokyo Electron Group is implementing aggressive measures to reduce waste, saveresources and prevent global warming. This section highlights environmental activities at
our manufacturing plants and offices.
Input-Output

Input

Details of Total Environmental Impact
The figures on the right indicate the material flow at the Tokyo

Electricity 270.15 MkWh

Electron Group’s manufacturing plants and offices.

Gas

The Group’s environmental impact mainly stems from the processof evaluating products. This is because we evaluate our products
using electricity and a range of gases and chemicals to simulate theactual semiconductor manufacturing process.

Fuel2,613 kl(-0.3%)

Water

1,180 km3(+1.8%)

Chemical products 12.4 t(-37.4%)337 t(-10.7%)(Regulated under the PRTR Law
as Type I chemical products)

Comparison
FY 2008 with FY 2007(+2.4%)

Total product shipment 27,329 t (+0.2%)

1,478 km3 (+21.8%)

Paper (copy paper)

113,169 t-CO2 (+2.2%)

CO2Tokyo ElectronGroup

12.1 t (+1.6%)

NOx(Domestic and overseas
plants and offices)

Wastewater

1,170 km3 (+1.8%)

Waste

12,312 t (-20.5%)

Recycled amount 11,945 t (-20.7%)
Amount of waste simply incinerated
and disposed of in landfills
366 t (-11.6%)

Highlights

Preventing Global Warming
Reducing Energy Consumption
Our Group is committed to reducing energy use in compliance withElectricity Consumption
OverseasJapan(100,000 kWh)the Energy Saving Act. Our plants and offices are actively reducing
their energy consumption by setting specific targets calling for

MANAGEMENT Reportenergy efficient use of lighting and OA machines, and appropriate

150126

192

165

temperature control of air conditioners. We will intensify our efforts
to meet our commitment on environmental activities.
2,181

2,345

2,396

2,472

Heavy Oil and
Kerosene Consumption
Kerosene
Heavy Oil(kl)In fiscal year 2008, we achieved the target of reducing CO2 emissions

0from energy use per unit sales by 1% from the previous year,1

Gas (overseas)Gas (in Japan)
LPG (in Japan)(1,000 m3)

372
1,062

942

1,146

1,014154
1,169
994

2,6029461,828

04 05 06 07 08 (FY)0although our total emissions of CO2 from energy consumption
our energy-saving measures.

Gas Consumption

99

1,838

1,665 1,604

CO2 Emissions from Energy Consumption

increased due to production growth. We will continue to improve on

658

1,444

0

58

738

56

838

110113131

04 05 06 07 08 (FY)
04 05 06 07 08(FY)(Plants in Japan and overseas)

Reducing the Use of Greenhouse Gases otherthan CO2EHS Report

We also began to calculate our emissions at overseas sites byWe use perfluorocarbons (PFCs) and sulfur hexfluoride (SF6), which

applying energy coefficients used in the Survey Report on Estimated
CO2 Emission Factors of the Power Sector of Major Countries (Juneare greenhouse gases, in dry etching, cleaning and other processes

2006) by the Japan Electrical Manufacturers' Association (JEMA).

In fiscal year 2008, we used 10,610 tons of greenhouse gases(as CO2 equivalent), which is substantially smaller than the fiscal

CO 2 Emissions from Energy Consumption
CO2 emissions (in Japan)(t-CO2)CO2 emissions (overseas)(%)

Energy use per unit of sales in comparison with the previous fiscal year1
Energy use per unit sales2
192.1
7,405 6,449 7,335

SOCIAL Report

104.4

during process development and process evaluation.

year 2007 level (21,006 tons). This was mainly due to a considerable
decrease in the volume of SF6 used for product development andevaluation at the Yamanashi Plant.
Greenhouse Gas Consumption

150.8(t-CO2)

100.1
96.1
92.1
87.0 90.8
79.3
78.4
105,834
52,456
102,977
94,009 95,486 95,487
65,81750,488104,246
104,11084,76122.5 20.7 18.0 16.4
16.4 13.0 12.5
11.1 16.7 14.9 11.7

0OtherSF6PFCs
HFCs

89.3

’98

’99

’00

’01

’02

’03

’04

’05

’06

’07

’08

(Plants in Japan and overseas)

2 Energy use per unit sales=Energy use/ SalesTOKYO ELECTRON Environmental and Social Report 2008

113,10656
19(FY)

030

13,86318

6,740

1 Comparison with the previous fiscal year
= per-unit energy use in FY 2008/ per-unit
energy use in FY 2007

28Output

Comparison
FY 2008 with FY 2007

4,350

4,681
6,682

1,856
1,468

1,284
1,140’03’04

6,297 784
322’05

3,236
1,620

’06

3,506

3,2043,607

3,045

’07

’08

(FY)

(Plants in Japan)Pl a n t a n d O f fi c e I ni t i a t ive sfo r t h e E nvir o n m e n t

Resource Conservation
Our Approach to Resource Conservation

about 10%, or about 9.7 million sheets, from the previous year. In

We are working to minimize our use of resources. Specifically, weaddition to reducing paper consumption, we are working to conserve

are reducing the use and purchase of copy paper and stationery andnatural resources through efforts such as using recycled paper andimplementing green procurement practices giving preference tointroducing bamboo-mixed paper cups.

environmentally-conscious products.

We will continue to reduce the use of copy paper and minimize

We have replaced printer toner cartridges with cartridges madefrom recycled materials and cooperate with the manufacturers in

paper-based records and accounting slips in order to achieve further
reductions in our total paper consumption.

the recovery of end-of-life cartridges. At some offices, we have

Efforts to Reduce the Use of Water

longer needed can be used by other departments.

At our manufacturing plants, various measures are underway toHighlights

established an intranet-based system, under which stationery noreduce the use of water. For example, the plants have installed aEfforts to Reduce the Use of Paper

water re-circulating system to reuse cooling water. They have also

We are making a group-wide effort to reduce paper consumption.

installed automatic faucets in restrooms and other facilities. These

Our employees are encouraged to practice duplex copying, copy attouch-free automatic faucets prevent water waste by automaticallya reduced size and digitize information and internal circulars. As ashutting off the supply when the user’s hands are removed from theresult, the Group’s total use of copy paper in fiscal year 2008 fell bysensor range.
Water Consumption(1,000 m3)

Office facilities
Manufacturing plants

Overseas use
Groundwater
Tap waterIndustrial water

18,30018,61789,067

77,16818,18469,45017,41776,80016,03869,814

16,13577,992

13,438

67
146

119

89
527

445

391

290

325

332

’98

’99

’00

88
62

436

388

474

390

430

’01

’02

107
64

70
106

115
9211122599

486

437

506

415

357

391

382

429

’03

’04

’05

’06

’07

70,936048

2599

MANAGEMENT Report

Copy Paper Consumption(1,000 sheets)

531

0

’03

’04

’05

’06

’07

’08 (FY)(Business sites in Japan)’08 (FY)(Business sites in Japan and overseas)

TOPICSEHS Report’02

Donating PCs to Industrial High Schools
Presenting the donation
certificate at the ceremony*S EMICON Japan:
World-class expositionof semiconductor andelectronics equipment
and materials

TOKYO ELECTRON Environmental and Social Report 2008

SOCIAL Report

The Tokyo Electron Group is a partner in the Aizu Craftsmanship Training
Project. This project aims to train the future talent who will support
semiconductor and other manufacturing sectors in the Aizu area ofFukushima Prefecture. We donated 10 PCs to each of the project’s
member high schools, Aizu Industrial High School and Kitakata Industrial
High School. Students from the two schools became the first high schoolparticipants of SEMICON Japan* in 2007 with tools they developed
themselves. The donated computers were used by our field engineers. We
presented the donation certificate at a ceremony held at Aizu Industrial
High School on January 25, 2008, which was attended by more than 100
students, teachers and related parties.

29

E H S R e p o rt

Pl a n t a n d O f fi c e I ni t i a t ive sfo r t h e E nvir o n m e n t

Plant and Office Initiatives for the Environment

Waste Reduction and Recycling
Our Approach to Waste Reduction and Recycling

achieved a recycling rate of 97.0% in fiscal year 2008 and 97.3%

The Tokyo Electron Group strives to reduce and recycle waste.

in fiscal year 2007. We are also focusing on reducing overall waste

We work according to a firm policy to minimize waste first andgenerated, as well as handling liquid waste by installing liquid

foremost, but if waste is generated it should be recycled to thewaste treatment facilities.

greatest extent possible, and unrecyclable waste should be disposed

Breakdown of Waste Generated

of in a proper manner.

Liquid waste from chemicals used in the product development andIn recent years, landfill costs have surged due to site shortages.

Highlights

This means that waste reduction also leads to cost reduction.

evaluation processes accounts for the largest percentage of waste

We separate recyclable waste from non-recyclables, use newgenerated by the Group. At present, most liquid waste is recycled.

manufacturing processes which do not involve waste generation,

Thanks to the aforementioned treatment of liquid waste by in-housemanage the qualifications of contract waste disposal companies andfacilities, we were able to achieve a reduction of 20% in the total

periodically review final waste disposal practices.

waste (including

Breakdown of Waste (%)

waste recycled) inMANAGEMENT Report

Waste Generation and Recycling Ratefiscal year 2008,1％In fiscal year 1999, the Tokyo Electron Group set a target of

58% of which is4％

increasing the entire Group’s average recycling rate to 95% byliquid waste, down

7％

fiscal year 2006. As a result of efforts to attain this target, wefrom 71% in fiscal

9％8％

58％

year 2007.
13％

Recycling Rate and Generation of Waste（t）

Target: Increase the recycling rate
to 95% by FY 2006
3,657

3,938

3,189 3,179

77.4

49.7

96.4

97.3

97.0（%）

93.1

Zero Emissions

3,268
69.7

55.2

96.1

Liquid waste
Metallic/product waste
Plastics
Paper
Wood scrap andpackaging materials
Drink containers
OtherWe define plants where less than 2% of waste generated by theGeneration of waste(Incinerated and landfilled)
Recycling rate

59.9

plant is incinerated or put into landfills as “zero emission plants” andencourage all plants to achieve zero emissions. In fiscal year 2008,

847

EHS Report

0’99

’00

’01

’02

’03

’04

431

469

414

366

’05

’06

’07

’08

0(FY)

zero emissions. Our next step is to achieve zero emissions at ouroffice facilities.

(Plants in Japan)

TOPICSCollection and Donation ofPop Can TabsRecycling Rate of Waste
PlantsOur offices and plants are conducting avariety of programs to promote effective

SOCIAL Reportuse of waste. For example, our Sagami
Plant participated in a pop can tab
collection program in November 2007
run by a local association of corporate

Recycling rate

Tohoku Plant

98.3%

Miyagi (Matsushima) Plant

99.7%

Sagami Plant

99.5%

Yamanashi Plant (Hosaka district)

99.9%

Yamanashi Plant (Fujii district)

99.8%

Kansai Technology Center

100%

Saga Plant

99.9%

collected tabs. With the resulting funds,

Koshi Plant

100%

the association donated wheelchairs toOzu Plant

100%executives and donated 6.5 kg ofsocial welfare facilities.

30

all our manufacturing plants strived to attain this goal, and achieved

Document to prove thereceipt of pop can tabs

TOKYO ELECTRON Environmental and Social Report 2008

Note: R ate of recycling of industrial waste (including industrial waste subject tospecial control)Pl a n t a n d O f fi c e I ni t i a t ive s
fo r t h e E nvir o n m e n t

Management of Chemical Substances
Our Approach to the Management of ChemicalSubstances
The Tokyo Electron Group uses chemical substances mainly in

Handling of Substances Regulated as Class I
Designated Chemical Substances under the PRTR Act(kg)developing and manufacturing products. When developing products,759

we sometimes adopt new chemical substances that have not been

4,558

used before, or use chemical substances in a way that is different

1,980

from their traditional usage. In these cases, we look closely at the3,690

development facilities and methods, assess the environmental andoperational risks associated with the use of the substances, and1,439

4,000’03’04

1,221
4,118

5,021

9,844

4,811
6,353

2,108
1,359

577

3,553
9,144

4,578

3,962

2,800

’05

’06

’07

Note: Data for fiscal year 2003 was calculated in metric tons

’08

(FY)

(Plants in Japan)

are also replacing dangerous and harmful chemicals used in themanufacturing process with safer substances.

Material Balance of Chemical Substances
Regulated under the PRTR Act

Highlights

implement necessary measures before using the substances. We0

Other
XyleneHydrogen fluoride andits water soluble salts
Ethylene glycol

Compliance with the PRTR* Act
Released into the air: Release into water:
0 kg/year
0 kg/year

According to the provisions of the Act on Confirmation, etc.
of Release Amounts of Specific Chemical Substances in theThereof (PRTR Act), we rigorously control the specific chemical
substances regulated under the act and identify the use andTEL

Handled

12,450 kg/year

emissions of these substances on a continuous basis. Among theProducts

73 kg/year

Recycled: 3,911 kg/year

substances regulated under the PRTR Act, we use large amountsof hydrogen fluoride, mainly for cleaning test wafers. The hydrogen

Waste:
5,986 kg/year

On-site landfill: Removed:
0 kg/year
2,471 kg/year

fluoride waste is disposed of by an external company or it isTransferred to sewage: 9 kg/year

disposed of in an approved manner within our premises. Ethylene

PCB Storage

regulated substance. TEL recycles almost all ethylene glycol we use.

Based on the Law Concerning Special Measures against PCB

We will continue to properly manage all risks associated with the use

Waste, we report on the storage and disposal of waste containingof chemical substances.

polychlorinated biphenyl (PCB) to the governor of the prefecture* P RTR: Pollutant Release and Transfer Register. Under the PRTR system, the useof chemical substances that may be hazardous to human health and the ecosystem,
their release into the environment, and transfer (contained in waste) outside of thebusiness premises are identified, tabulated and disclosed.

on an annual basis. The Tokyo Electron Group presently stores twowaste transformers and four waste capacitors that contain PCB in astrict and secure manner.

TOPICSEHS Report

glycol, used as a refrigerant for cooling water, is another heavily used

MANAGEMENT Report

Environment and Promotion of Improvements to the Management

Prevention of Chemical Pollution

SOCIAL Report

At our Kansai Technology Center in Amagasaki City, Hyogo, we properly
manage various types of chemicals used to develop and evaluate products.
At the same time, we also ensure that appropriate steps are taken to prevent
air and water pollution. The Center has periodically reported its wastewater
data to Amagasaki City for the past five years (the city ordinance required
more than nine such reports). Wastewater released from the Center has
consistently met the applicable municipal standard. In February 2007,
we were recognized by the City as an office with excellent wastewater
management. We will continue to manage and control chemical substances,including proper monitoring of wastewater discharge.

Award reception
and the certification
plate granted forbeing an office withexcellent wastewater
management

TOKYO ELECTRON Environmental and Social Report 200831