E H S R e p o rt

EHS Management
EHS Management

Environment, Health, and Safety (EHS) activities are always an important priority
for the Tokyo Electron Group.

Basic Idea behind EHS Activities
The Tokyo Electron Group recognizes caring for people’s health andthat EHS activities will lead to long-term benefits for the entire Group.

safety and the global environment as top priorities for its business.

As a responsible member of society, we strive to help develop a more

We are therefore committed to being a company capable of earning

affluent society through our EHS activities.

the trust of all involved in our business operations. We also believe
The Tokyo Electron Group Credo and Principles
on Environmental Preservation

The Tokyo Electron Group
Safety and Health Credo and Principles

Highlights

The Tokyo Electron Group Credo on Environmental Preservation

The Tokyo Electron Group Safety and Health Credo

The Tokyo Electron Group believes that preserving the global environment andconstantly improving it is one of the most important objectives for mankind as well as its
business. Based on this credo, we are determined to expand our business by maintaining
harmony with the global environment, and thus win the trust of our many customers,
shareholders, employees and society in general.

Safety and health training are required for all employees and board members of theTokyo Electron Group. Our profit and delivery date requirements must not be met at thesacrifice of human life and the safety of our facilities and equipment.

The Tokyo Electron Group Principles on Environmental Preservation

1. Continuous Improvement
The Tokyo Electron Group is conscious that the factors that affect the safety andhealth of customers and its employees exist at the stage of manufacturing,transportation, installation, use, maintenance and service of its products. Based on
this awareness, we shall continually strive to improve the safety and health of ourproducts and eliminate factors that potentially affect human health.

MANAGEMENT Report

1. Continuous Improvement
The Tokyo Electron Group is conscious that products manufactured by the Groupaffect the environment, and based on this awareness, we, with our customers andsuppliers, shall continually strive to minimize the impact of processes and operations
on the environment. We will develop products consistently with a clearly definedenvironmental roadmap for all Group products, verifying the appropriateness ofefforts during design, manufacture and use. To further confirm the appropriatenessof such efforts, we will undertake activities that fully take into account regulatory andindustry requirements and the needs of customers and other stakeholders.
2. Knowledge
The Tokyo Electron Group continually strives to enhance its understanding of theimpact that the Group has on the environment and the responsibility that this entails.
In addition, the Group aims to gain a quantitative grasp of environmental factors, andthe impacts resulting from its activities and operations.
3. Performance Criteria
In addition to strict adherence to environmental laws, treaties and agreements, theTokyo Electron Group will also promote conservation of the global environment by
formulating activity plans that take into account industry standards and various otherenvironmental requirements.
4. Disclosure
In addition to ensuring that all employees clearly understand our environmental
concepts, policies, the state of company contributions toward environmental
protection and the state of product-related environmental efforts, as well as
improving levels of awareness, we will disclose relevant information to those outside
the Company via environmental reports and other means.
5. Partnership
The Tokyo Electron Group actively participates in environmental protection activities
practiced by its customers, suppliers and communities.

The Tokyo Electron Group Safety and Health Principles

2. Knowledge
The Tokyo Electron Group continually strives to enhance its understanding of safety
and health and improve these conditions for all people working at its sites. To thatend, the Group aims to gain a qualitative and quantitative grasp of safety and healthfactors on its activities and operations.
3. Performance Criteria
As well as strictly observing mandatory safety and health laws, treaties andagreements, the Tokyo Electron Group strives to enhance its own safety and healthmanagement system and improve global safety and health programs by the proactive
establishment of aggressive safety and health performance criteria.
4. Disclosure
The Tokyo Electron Group shares information about its safety and health credo,
policies and the progress of its safety and health activities with all board members
and employees, and will publish its progress to the general public as the need arises.
5. Partnership
The Tokyo Electron Group participates in safety and health activities practiced by its
customers, suppliers, and communities.
November 27, 1998

May 26, 2006

EHS Report
SOCIAL Report

16

Environment and Safety Activities Milestones of the Tokyo Electron GroupMay 1994

Standardization, Environment and Safety Center(Environment, Health & Safety Center) establishedMar. 1996

Product Safety Subcommittee (Tokyo Electron Group
Product EHS Technical Committee) launched

Apr. 1996

Environmental Subcommittee (Tokyo Electron Group EHSCommittee) launched

Dec. 1997

Sagami Plant acquires ISO 14001 certification (andsubsequently other plants also acquire the certification
one after another)

Sept. 1998

Tokyo Electron Group Credo and Principles on
Environmental Preservation establishedNov. 1998

Tokyo Electron Group Credo and Principles on Safety &Health establishedJun. 1999

Safety First policy establishedDec. 1999“Health, Safety, and Environment” added to theManagement Philosophy

TOKYO ELECTRON Environmental and Social Report 2008

Apr. 2000

Environmental accounting introduced

Apr. 2000

Unified safety training system “Safety 2000”
implemented

Dec. 2000

First Tokyo Electron Group environmental reportpublished

Oct. 2001

Environmental training introduced in facilities not yet
certified under ISO 14001

Dec. 2002

Tokyo Electron Group Internal Assessment mutualauditing by environment or safety representatives fromeach facility started

Oct. 2005

Energy-Conservation Task Force starts activities topromote energy-saving products

May 2006

Tokyo Electron Group Credo and Principles on
Environmental Preservation revised

Oct. 2007

Environmental Steering Committee, the highest-level
environmental function at TEL, launchedOur EHS activities are conducted with respect to three core elements:

safety instructions and messages to be given by a primary employer1
to the related contractors.) We will continue to monitor our EHS

Product EHS, which advances EHS priorities in our products inmanagement system with this extended scope, which checks ourgeneral; Customer-Site EHS, which advances those priorities during

EHS activities more strictly.

and after start-up of our products; and Plant and Office EHS, which

1 Primary employer: According to the revised Industrial Safety and Health Act, aprimary employer means a primary company that arranges for the employees of
its contractors to carry out a part of the company’s work at one single place incooperation with the company’s own employees.

concerns our facilities.
The Tokyo Electron Group companies, in particular TEL’s
manufacturing subsidiaries, started developing and implementing

EHS Risk Management System

environmental management systems based on ISO 14001 in 1997,

At manufacturing subsidiaries of TEL, environmental and safety risks

and obtained ISO 14001 certification.

are estimated based on ISO 14001 and OHSAS 18001 standards forlabor safety and health management systems. These subsidiaries arewarming and climate change, we also established the Environmental

implementing measures to eliminate higher risks first. Also, they areSteering Committee in October 2007 to intensify and accelerate ourendeavoring to reduce some risks“green” efforts. The Committee is the Group’s highest-level organization

although they are not yet legally required

responsible for our environmental activities (please refer to page 18.)

to do so. We believe it most important
to implement anti-global warming

Tokyo Electron Group’s EHS Promotion SystemHighlights

Recognizing the widening necessity of addressing present global

EHS Management

EHS Promotion Systemmeasures in line with the Kyoto Protocol

Global EHS Committee

targets in future EHS risk management.
Our Tohoku Plant was certifiedPlant and Office EHS(EHS activities in each region)

Customer-Site EHS

Product EHS(EHS activities
at customers’ facilities)(EHS activities
for the Group’s products)

ISO 14001-Certified Plants and Offices
Company name(highest-rating) environmentally friendly
office in recognition of its tangible

Label for certified environmentally friendly
activities and performance toward theoffices, granted to the Tohoku Plant

reduction of CO2 emissions.

Plant/Office name Certification dateCertification number

Sagami Plant

December
10, 1997

1110-1997-AE-KOB-RvA Rev.1

The Tokyo Electron Group operates in strict compliance with the law.

Tokyo Electron TohokuLimited

Tohoku Plant

February
19, 1998

1118-1998-AE-KOB-RvA

We closely track new environmental laws and emissions regulations

Tokyo Electron Kyushu
LimitedKumamoto/Koshi/Ozu/Saga Plants

March 26,
1998

1120-1998-AE-KOB-RvA

Yamanashi Plant(Fujii/Hosaka district)

May 15,
19981124-1998-AE-KOB-RvA

to legal actions of any kind with regard to environmental accidents,

Miyagi Plant

March 1,
2005

01245-2005-AE-KOB-RvA

violations, fines or complaints.

Yokohama
OfficeJuly 14,2004

EC04J0144

Tokyo Electron PS Limited/Tokyo Electron AT Limited

Tokyo Electron AT Limited

and for some substances have enacted independent standards thatare stricter than legally required. In fiscal 2008, we were not subject

EHS Training
The Tokyo Electron Group offers EHS training based on the policy ofEHS Activities Monitoring System“the necessary training for the necessary people.” Training courses areIn order to increase the effectiveness of our EHS management system,grouped by rank and are open both to Group employees and to employees

we continually increase the level of monitoring that verifies the systemof cooperating companies who work at the Group’s facilities. An EHS

function and results. Monitoring is done from multiple viewpoints

training program is also a required part of the curriculum for new hires.
In 2007, we launched the Company intranet to communicate

within plants and offices, within the Group, or by third parties.

environmental-related
information, such as

many plants and offices, which was instituted in fiscal 2003. In

examples of successful

fiscal 2007, in response to an increasing need to manage chemical

related activities within thesubstances contained in products across the entire supply chain andGroup, messages from top

in compliance with the Japanese Industrial Safety and Health Act

management and meeting

revised in 2006, we added some new audit items to ensure that EHS

materials.

SOCIAL Report

We are especially focusing on the Tokyo Electron Group Internal
Audit, a program of mutual EHS evaluations by representatives ofEHS Report

Tokyo Electron Device
LimitedAbiding by the Law

MANAGEMENT Report

by Iwate Prefecture as a “four-star”

was examined appropriately in cooperation with our suppliers andpartner companies. (The revised law demands the enhancement ofTEL’s intranet site

TOKYO ELECTRON Environmental and Social Report 200817E H S R e p o rtEHS Management
EHS Management

The Tokyo Electron Group will go the extra mile for the environment under the slogan“Technology for Eco Life.”

Acceleration of Environmental Activities

Launch of the Environmental Steering Committee
Recognizing the increasing necessity of addressing global warming

Environmental Steering Committee(Launched in October 2007)

and climate change, we established the Environmental Steering
Committee in October 2007 to intensify and accelerate our green

Environmental Steering
Committee

efforts. This highest-level internal organization on environmental
activities is comprised of the executive officer in charge ofdevelopment, and members from the marketing, corporate strategicplanning and corporate communications departments.

Highlights

The Committee has two working teams: the Product Working

Product Working Team

Office/Logistics Working Team

Team and the Office/Logistics Working Team, which explore what
we can and should do for the environment with regard to theGroup’s products as well as our offices and distribution practices,respectively. Under the slogan of “Technology for Eco Life,” theEnvironmental Steering Committee plans to formulate standards androadmaps in fiscal 2009, and this will be designed to achieve TEL’sMANAGEMENT Reportenvironmental commitments.
Slogan and logo below were selected from employees’ ideas.

Technology for Eco Life
Tokyo Electron supports a strong global community and strives to achievea society in harmony with the environment.

EHS Report

We are committed to creating an environmentally-benign society together
with our customers by providing advanced technologies and services.

Tokyo Electron’s Commitment

SOCIAL Report18• We aim to develop equipment that enables a 50% reduction—compared to the 2007
levels—of the total environmental impact of new customer factories scheduled forcompletion in 2015 or later.
• We aim to reduce the impact of our business and transportation activities on theenvironment by 50%, by 2015, compared to the 2007 levels.
• We will strive to achieve these commitments in partnership with our stakeholders.

TOKYO ELECTRON Environmental and Social Report 2008