Environment, Health and Safety Management

EHS Management System (Part 1)
TEL is promoting environment, health and safety (EHS) activities globally.

Organizational Structure for EHS

Customer-site EHS

At TEL, to keep up with globalization of our EHS activities, weThrough the Customer-site EHS Committee, consisting of repre-

have formed a Global EHS Committee comprised of the president andsentatives of business units that conduct work at customer sites plus

corporate directors of Tokyo Electron, and EHS directors. As therepresentatives of each country, we are promoting EHS for work con-heads of this committee, they decide on the policies and directions ofducted at the customer’s location. The committee ensures that ourTEL EHS-related activities. EHS activities are structured in terms ofwork is in compliance with legal requirements and local working

three pillars: “Factory and Office EHS,” “Customer-site EHS” andmethods, and communicates with and supports local organizations“Product EHS.”

concerning EHS matters.

Factory and office EHS

Product EHS

We are promoting local EHS activities in each region throughWe are promoting EHS in our products, with the Product EHS

TEL Safety and Health Committee, consisting of representatives of of-

Executive Committee at the top of the structure, consisting of thefice facilities, and TEL EHS Committee, consisting of representatives

exective officers in charge of development, marketing, and sales plusof the manufacturing plants. At the manufacturing plants, we carry

the EHS directors of each business unit. Subcommittees include theout EHS activities through the EHS Management System, and at theSales/Marketing Product EHS Committee and the Product EHS Tech-office facilities we are creating an environmental management sys-nical Committee. It is important that the EHS concepts clearly state

tem through what we call TEL Eco-Activity (see page 22).

those factors which the customer requires and that these be incorporated at the initial development phase and design phase of products.
Also, with the globalization of TEL, we must comply with the laws ofeach country in which we do business. For this purpose, we are actively promoting what we call “DF EHS” (Design for EHS).

TEL EHS System
Global EHS Committee

TEL Safetyand HealthCommittee

TEL EHSCommittee

Customer-site
EHSCommittees

Product EHS
Executive Committee

Sales/Marketing/Product
EHS Committee

21

Product EHS
TechnicalCommittee

Factory and Office EHS

Customer-site EHS

Product EHS(EHS activities in each region)(EHS activities at customers’ locations)(EHS activities for equipment used in production in TEL)TOKYO ELECTRON Environmental Sustainability Report 2003

Stance on EHS Management

TEL Eco-Activity

Each manufacturing site has created an environmental manage-

Within TEL, we have created our own TEL Eco-Activity environ-ment system and has been certified based on ISO14001. In addition,

mental management system based on ISO14001. We have been

we have began to create an occupa-promoting TEL Eco-Activity in office facilities since last year. Our Fu-tional safety and health management

chu Technology Center established targets of reducing electricity us-system based on OHSAS18001 andage by 5% compared to the previous year, improving recycling, andguidelines of Japan’s Ministry ofcleaning along the roads our employees use for commuting. Regard-Health, Labour and Welfare. Our officeing energy conservation, we implemented changes in temperaturefacilities have introduced simplified in-settings of air conditioners and turning lights off policy during lunch

dependent environmental management

breaks. In the future we will continue

systems we call “TEL Eco-Activity.”

with energy and resource conservation
activities, and encourage everyone to
ISO14001 Certificate

work to meet the targets. In addition,
we have gone further with TEL Eco-Ac-

Implementing the EHS Management System

tivity at the Tokyo Electron Device

At each facility, using environmental impact assessments, weheadquarters and plan to obtainascertain and prioritize the environmental impact of the environmen-ISO14001 certification by October 2004.

tal dimensions associated with our services and the development andTEL Eco-Activity
Management Program

manufacturing of products. In addition, by performing assessments
we ascertain the risks relating to safety and health aspects of operations, and assign priorities accordingly. For the environmental as-Status of ISO14001 Certification and TEL Eco-Activities

pects and risks that have been identified, in order to reduce the risks,
ISO14001-certified
facilities• • • Facilities conducting
TEL Eco-Activity• • • Facilities planning toobtain ISO14001 certification•••we develop a program (Plan), systematically conduct improvement
activities (Do), confirm the progress (Check) and then review everything (Act), with what is known as a PDCA cycle.

North America

Structure of EHS Management System
Tokyo Electron America, Inc.
(preparing for certification)

EHS Basic
Principles

Act

Tokyo Electron
SoftwareTechnologies Ltd.
Tokyo Electron TohokuLtd., Tohoku plant

EHS Guidelines

Plan
Identification of environmental
dimensions and threats; risk
assessment, environmental
assessment• Legal and other requirements• Objectives and targets• EHS Management Program

Tokyo Electron AT Ltd.,
Miyagi plant(certification expected Dec. 2004)•Management
review

Planning

Continuous
improvement

andImplementation

corrective action

andoperation

Tokyo Electron Ltd.,
Osaka Branch Office

DoSystem preparation and responsibilities
Training, awareness and capacity-building
Communicate key information• Implement education• Documentation and document control• Emergency preparedness and response

Check•

Monitoring and measurement
Prevention and correction of non-compliance• Record-keeping• EHS Management System audit••

Tokyo Electron AT Ltd.,
Fujii and Hosaka plants

Tokyo Electron Ltd.,
Fuchu Technology Center

Checking•

Tokyo Electron Kyushu Ltd.,
Saga plant•Tokyo Electron KyushuLtd., Ozu plantTokyo Electron Kyushu Ltd.,
Kumamoto plantTokyo Electron EE Ltd.,
Sagami plantTokyo Electron Kyushu Ltd.,
Koshi plantTokyo ElectronLogistics Ltd.,
Narita Logistics CenterTokyo Electron Ltd.,World Headquarters
Tokyo Electron Device Ltd.,
Headquarters(certification expected Oct. 2004)

TOKYO ELECTRON Environmental Sustainability Report 2003

22

Environment, Health and Safety Management

EHS Management System (Part 2)
We are conducting comprehensive checks of the EHS Management System.

Stance and Organization for Checking EHS Activities

Legal and Regulatory Compliance

In order to strengthen the EHS Management System at TEL, we

At TEL, our approach to legal and regulatory compliance is toare enhancing the auditing aspects of the system that are responsi-

consider environmental legislation and ordinances and emissions

ble for the “checking” functions of the PDCA cycle. Through auditing

standards, and to set our own voluntary standards at even more

and other means we check up on systems and performance fromstringent levels. Through the cumulative effects of our day-to-day ac-multiple dimensions—which could be broadly described as internal,

tivities, such as checks on the management of chemical substancesGroup and third-party checks.

and pH levels in water, we are clearing our own tough standards. As
one example of how we do this, at the Hosaka plant, before final discharge of wastewater we confirm the pH level and other parameters

System for Checking EHS Activities

of some of the effluent in an in-house storage tank.
Third-party
ISO14001 audits

Thanks to these efforts, nolawsuits arose during FY 2003 inconnection with accidents, violations, penalties or complaints, andTEL
Internal
EHS audit

no economic sanctions or incentives
TEL internalassessment

were used by the government.
Wastewater storage tankbefore final discharge

Measuring Soil and Rainwater Peretration

TEL Internal Assessment
TEL has been actively implementing internal EHS audits, conducted by each facility, and ISO14001 environmental management
system audits by third-party organizations. But we felt that these auditing methods alone were not enough, so in FY 2003 we started“TEL internal assessment” conducted by EHS representatives fromeach facility, as peer assessments on EHS items.
By having the facilities in TEL conduct peer assessments, we arestriving to determine the status of TEL facilities overall, and this willlead to uniformity and improvement of EHS activities. During FY
2003, we conducted assessments on management-level initiatives,legal compliance, and responsibilities/structures, based on TEL regulations for work safety. In FY
2004, we will select new

Since obtaining ISO14001
certification at the Sagami plant inFY 1998, we have been conducting
measurements of soil and of arainwater that has penetrated thesoil. We are measuring rainwaterfrom an observation hole and arainwater penetration chamber,targeting organochlorine compounds that TEL has used in thepast, in addition to ten chemical
Soil testing
substances.
We are conducting measurements every year, and as a result, are verifying our state of compliance with environmental
quality standards, prefectural ordinances and so on for soil andwater quality.

Soil Testing Results

themes and details and work to
make further improvements.

A site inspection underway

Test items

TEL standards

Test results

Lead and its compounds
Phenols
Copper and its compounds
Zinc and its compounds
Iron and its compounds
Manganese and its compounds
Chromium and its compounds
Fluorine compounds

0.01 mg/l0.5 mg/l
1 mg/l1 mg/l3 mg/l1 mg/l2 mg/l0.8 mg/lLess than 0.005 mg/l
Less than 0.003 mg/l
Less than 0.05 mg/l
0.11 mg/l
Less than 0.05 mg/l
Less than 0.02 mg/l
Less than 0.05 mg/l
Less than 0.1 mg/l

In FY 2003, 18 items were tested, including the eight shown here.

23TOKYO ELECTRON Environmental Sustainability Report 2003