Highlight
New Environment Vision of Tokyo Electron
The Tokyo Electron Group has been working on various environmental activities at customers’ factories, as well as within the Group itself, withthe aim of reducing environmental impacts by 50% over the baseline year of fiscal 2008 by the end of March 2015. However, because this goalis expected to be achieved ahead of schedule in fiscal 2012 (see p. 15), we have decided to establish a new Environment Vision and set newenvironmental goals to expand the scope of the activities by making our efforts more multifaceted.

10New environmental goals
Based on the Environment Vision specified on the opposite page, we have set new environmental goals in the four areas of “Products,”“Plants and offices,” “Procurement and logistics,” and “Environment management.” By keeping our “Technology for Eco Life; working
to solve environmental problems with technology” policy at the core of our activities, we will continue to drive our initiatives even morevigorously as a global company serving the planet by providing environmentally sustainable equipment technology.

HIGHLIGHT

ProductsPlants and offices

Medium- to long-term goals

ActionReduction ofenvironmental
impact ofproducts

Reduce power consumption of major models ofeach business unit by 50% over the fiscal 2008 levelby the end of fiscal 2015.

CompatibilitywithChinese RoHS

Fiscal 2013 goal

Medium- to long-term goals

Promotion ofenergy
conservation

Reduce by 1% overthe fiscal 2012 level.

Reduce by 1% on a per-unit basis over the fiscal 2012 level.
Evaluate in a comprehensive manner based on aper-unit standard appropriate to the situation of each
See p. 20
plant and office.

Continue to ensure products’ compatibility
with the Chinese labeling standard.

Reductionof water
consumption

Maintain the fiscal
2012 level.

Maintain the fiscal 2012 level.
Evaluate in a comprehensive manner based ona per-unit standard appropriate to the situationof each plant and office. See p. 21

Compliance withenvironmental
regulationsof each country

Continue to ensure products’ compliance with the EU’s Registration, Evaluation,Authorisation and Restriction of Chemicals (REACH) framework as well as withlabeling requirements based on the Globally Harmonized System of Classificationand Labelling of Chemicals (GHS) and battery regulations of each country.

Recyclingof waste

Voluntarystandard
based on theEU’s RoHS

Continue to ensure that major models of each business unit contain
98.5% or more parts that meet the EU’s Restriction of the Use ofCertain Hazardous Substances in Electrical and Electronic
Equipment (RoHS).

Maintain a recycling rate of 97% or more.
Continue to achieve zero emissions.

MANAGEMENT REPORT

ActionSee p. 22• The above goals are applicable only in Japan. The goals for overseas locations will be
determined upon consultation in or after fiscal 2013.

ActionFiscal 2013 goal

Medium- to long-term goalsGreenprocurement

Revise the lists ofprohibited andrestricted substances.

Continue to implement strict control over theuse of chemical substances in equipment.
Strengthen the link with suppliers’
environmental management systems.

Environmental
education

Promote a modal shift.
Continue monitoring.
Environmental
communication

Biodiversity

Fiscal 2013 goal

Medium- to long-term goals

Continue to obtain ISO 14001 certification
for the Group’s plants.
Formulate andimplement an
education program(Japan only).

Implement throughout the Group.

Continue to publish andenhance Environmental and Social Reports.
Determine a policy
and formulate a plan
upon investigation andexamination.

SOCIAL REPORT

Reduction ofenvironmental
impact oflogistics

ActionEnvironmental
management
systemEnvironmental
management

EHS REPORT

Procurement
and logistics

Start activities from fiscal 2014 upon
investigation and examination.

We will continue using technology to address environmental
problems in order to meet the expectations of stakeholders

Hirofumi Kitayama
Representative Director
Executive Vice President
General Manager
Manufacturing Division (Quality)
Tokyo Electron Limited

The conservation and continuous improvement of the global environment is one of our priority
issues. Based on this recognition, we are working to decrease environmental impacts throughtechnology. Although our environmental goals have been renewed, our most importantenvironmental missions remain the same: reducing the power consumption and CO 2 emissions ofour products during their operation at our customers’ factories. By delivering such environmentally
sustainable products, we will strive to achieve the revised goals in order to maintain the trust of
our stakeholders.

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