TEL-Manufacturing Subsidiaries: Topics in 2001 and Targets for 2002
Tokyo Electron Tohoku Limited

LCA Results impacting Product Design in 2002
Tokyo Electron Tohoku Limited manufactures systems that perform the thermal processing
functions of semiconductor production processes. Until now, development work took place separately at the Sagami and Tohoku Plants, but in April 2002 we consolidated all stages from systemdevelopment to production in the Tohoku Plant.

Kengo Kuroiwa

In fiscal 2001 Tokyo Electron Tohoku put its energy into increasing its rate of recycling ofPresident
and Representative Director

waste. The result was a recycling rate in excess of 90%, as compared to about 40% in fiscal

Eco Life : To create a recycling-oriented society, it is important that each of us become proactive and participate both in thecorporation and as private citizens. For example, I talk to my son
about the environment and what we can do about it at home, likechoosing fuel-efficient autos and always turning off the electricity
when not in use.

dealing with is reducing the environmental impact of our systems. We have not only reduced

Tokyo Electron AT Limited

2000. Moreover, we plan to achieve zero emissions within three years. Another challenge we arepower consumption, but also decreased the amount of materials used, such as nitrogen gas andwiring, which has reduced CO2 emissions. In fiscal 2002 our plan is to put to use the LCA resultsfrom fiscal 2001, actively incorporating them into all stages of the development and design pro-

Close Ties and Exchanges of Technical Information with Our Customers
Lead to Development of Systems with Reduced Environmental Impact
The Yamanashi area is home to an equipment production plant (Tokyo Electron AT Limited) and a semiconductor process Technology Development Center (Tokyo Electron Limited). The Technology Development Center collaborates with our customer's engineers to develop semiconductor production equipment that is not only high-quality butMamoru Hara

also reduces environmental impact, by saving energy. Environmental awareness at TEL has been very forward-looking,President
and Representative Director

starting six years ago when TEL determined that it would earn ISO14001 certification as a group. In Yamanashi, anEco Life : The introduction of ISO practices has not only affected me at work; off the job my consciousness has changed aswell. I've long felt that one should use things as long as possible,
so at home I save resources and energy. I feel it's now evenmore important to act for the benefit of "the whole" and not justtreat the symptoms, such as global warming.

and disseminated with the goal of enriching both safety and environmental efforts. Moreover, a new section has been

Tokyo Electron Kyushu Limited

EHS (Environment, Health and Safety) Management System was established in fiscal 2001 and has been carried out
created specifically to deal with health issues and has enriched activities in that regard. In 2002, we will push forwardwith reducing energy consumption in the workplace overall, for example, by reviewing the base units for calculating
this consumption.

(For details, see the special site report for the Yamanashi Plant on page 30.)

Achieving Zero Emissions,
Our Environmental Efforts are Gaining Momentum
Tokyo Electron Kyushu Limited mainly produces equipment that handles resist and developing and cleaning fluids. Recent years have brought a shift, from a time when we built toorder, to a time when TEL needs to assert its autonomy. During the last few years, our em-Megumi Yamashiro
Presidentand Representative Director
Eco Life : From our location near Mt. Aso whererivers flow so abundantly, we are especially careful
not to pollute the water, in order to protect this resource. At home my family separates the trash andrecovers waste items. As much as possible, we refrain from using the car and instead go by bicycle.

ployees have steadily become more aware of the environment. I believe achieving zero
emissions will further encourage this consciousness. We also face more stringent water regulations than businesses in other prefectures, so we practice closed-loop recycling of coolant water.
The Koshi Plant achieved a 99.6% industrial-waste recycling rate in fiscal 2001, and in
2002 it expects to achieve zero emissions by recycling vinyl chloride, which is still an issue.
In 2002, other plants will follow Koshi in raising their own recycling rates.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

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