Products for Reduced Environmental Impact
At the TEL Group, we have endeavored to satisfy our customers around the world by offering services
and products such as semiconductor and LCD production equipment and electronic components.
Moreover, as stated in our Principles of Environmental Preservation, we will continuously endeavor in
unison with customers to reduce TEL Group products’ environmental burden. Specifically, every
plant will undertake to develop environmentally benign products, setting product-specific targets forenergy and resource conservation, reduction of chemical usage, and other such matters.

■ Examples of Key Initiatives
Business Unit

Description of Initiative

Etch systems (ES)• Reduction of power consumption

Yamanashi Plant
LCD systems (LCD)• Reduction of power consumption

Yamanashi Plant
LCD systems (LCD)• Reduction of chemical usage

Ozu Plant
Cleaning systems (CS)Saga Plant

Clean track (CT)Kumamoto Plant
Diffusion systems (DS)
Sagami Plant Tohoku Plant• Reduction of chemical solution usage• Reduction of IPA usage• Reduction of pure water usage• Reduction of power consumption• Reduction of chemical solution usage• Reduction of power consumption• Reduction of equipment’s footprint• Reduction of vinyl chloride resin cable usage• Establishment of procedural guidelines forequipment disposal• Reduction of power consumption■ Measures for Reduction of Environmental Impact in Physical Distribution
For the packaging used to ship our products, we are investigating new reusable materials. Additionally, we reuse some of the packaging materials we use now. For cushioning, we use and reuse an environmentally benign, biodegradable material. At the Kumamoto Plant, we are studying the feasibility of packing parts in containers to reduce the packaging materials used to ship them. We haveeven made some prototype containers. Henceforth, we will test the containers repeatedly and make
improvements in preparation for their use.

Tokyo ElectronEnvironmental Report 2000

■ Organization for Rectification of Products’ Environmental Problems
Common issues related to rectification of environmental problems involving the semiconductor orLCD production equipment manufactured and sold by the TEL Group are reviewed and decided
upon by the WW Product EHS Committee chaired by the director in charge of environmental issues. For product-specific environmental problems, the concerned design/production, sales, and/orservice department conducts activities to rectify the problem under the direction of the applicable
BU Product EHS Committee.
Director in charge ofenvironmental issues

Organization for key individual products
BU Product EHS Committee

WW Product EHS
Committee
Engineering, sales, service
Secretariat: Environment,
Health and Safety Center

Initiatives to address environmental issues

WW : World Wide
BU : Business Unit

■ Targets for Reduction of Product-related Emissions and Consumption
In product development, one of our aims is reduce products’ environmental impacts such as gasemissions and power consumption. Toward this end, we have set targets for the 2002 models of oursemiconductor production equipment for 200 mm and 300 mm wafers based on the 1997 modelsof our equipment for 200 mm wafers, as shown in the table below.
Product EHS Roadmap
Wafer Size1997 Standard
200 mm2002 Target
200 mm2002 Target
300 mm

HAP emissions

10.40.5

VOC emissions

10.40.5

PFC emissions

10.40.5

Power consumption

10.8

1

Water consumption

10.8

1

Gas consumption

10.8

1

*Targets for 300 mm oxidation/diffusion, LP, CVD equipment are set at 1.5 times the standard data.

• HAP: Hazardous Air Pollutants• VOC: Volatile Organic Compounds• PFC: Per-Fluoro Compounds

Tokyo ElectronEnvironmental Report 2000

■ Fiscal Year 2000 Action Plan for Reducing Products’ Environmental Impact
The table below shows the TEL Group’s fiscal year 2000 action plan for developing environmentally benign products based on the Product EHS Roadmap.
Issue

FY2000 Action Plan

Global warming
prevention

Reduction ofpower consumption

Adequately reduce power consumption in fiscal year 2000 as one
step toward achieving the Product EHS Roadmap’s targets for 2002.

Reduction of PFC
emissions

Adequately reduce PFC in fiscal year 2000 as one step towardachieving the Product EHS Roadmap’s targets for 2002.

Reduction ofAdequately reduce VOC in fiscal year 2000 as one step towardachieving the Product EHS Roadmap’s targets for 2002.

Air pollution prevention, VOC emissions
Safeguards against
Reduction of HAPacid rainemissions
Prevention of ozone
layer depletion

Reduction of consumption of depletable
resources

Restriction of use ofozone-depleting
substances

Promote disuse of HCFC substances

Promotion of recycling/reuse (dismantlement,labeling of materials,disposal)

Set targets for every product and commence action to achieve them.
Determine feasibility of incorporating information into work
procedures and manuals related to dismantlement and disposal.

Prolongation oflife span of equipment/parts

For every product, set targets for prolonging the life ofequipment/parts and commence action to achieve them.

Adoption of “green”
procurement

Form a green procurement organization, establish green
procurement standards, begin asking suppliers to cooperate.

Lead-use restrictions

Share information regarding substitutes for lead solder. Ascertain
extent of lead usage in purchased products.

Introduction of LCA

Establish the capability to continually assess and reduce products’environmental burden throughout their life cycle.
For every product, select one or more issues from the above(including global warming prevention) and commence LCA.

Purchased products

Life-cycle assessment(LCA)

Adequately reduce HAP in fiscal year 2000 as one step towardachieving the Product EHS Roadmap’s targets for 2002.

■ Preparation for Implementation of Green Procurement“Green procurement” means procuring parts based on environmental considerations in addition tothe conventional procurement criteria of quality, cost, and delivery period.

Conventional Procurement Criteria
quality+cost+ delivery period

Green Procurement Criteria
quality+cost+ delivery period + environmental considerations

TEL Group companies have obtained ISO14001 certification and implemented green purchase of officesupplies, packaging materials, and other goods. We will also proceed to implement green procurementof parts used in our products. We will ask suppliers to cooperate with green procurement and will offer
our customers products with a reduced environmental impact. In addition to conducting environmentally benign business activities, we will propagate this approach to our suppliers and collaborators, thereby
contributing to activities to preserve the global environment.
Tokyo ElectronEnvironmental Report 2000

■ LCA InitiativeLCA (Life Cycle Assessment) is a technique for quantitatively assessing a product’s environmental
impacts during the course of its life from the raw material stage through manufacture, transport,use, and disposal. To make products with relatively minor environmental impacts, it is necessary toanalyze and assess environmental impacts and to rectify on a priority basis problems that have major environmental impacts. In terms of the assessment method, there are many potential impacts tobe considered, as shown in the table below. On the global level, global warming is regarded as a major environmental issue. For global warming, we assess environmental impacts in terms of CO2emissions. Many types of business activities contribute to global warming by generating CO2. For
instance, using electricity results in CO2 emissions from power plants that burn oil. Driving a vehicle emits CO2 as a product of gasoline combustion. Steel making emits CO2 when coke is burned.
Aluminum refining uses a lot of electric power, resulting in CO2 emissions.
When we use LCA to assess global warming, we assess CO2 emissions during a product’s life cycleby adding up total CO2 emissions throughout its life cycle. On the basis of the assessment results,
we review the life-cycle stages with a lot of CO2 emissions and investigate a broad range of corrective action such as substitution, design improvement, and process improvement. Through such a
process of comprehensively reducing CO2 emissions, we develop products that impose the smallest
possible impact on the environment.

Stages of the Product Life Cycle
Raw materials

Manufacture

TransportInputs to each stage

Use

DisposalOutputs from each stage

Raw materials, parts

Atmospheric emissions, aqueous effluents, solid wastes

Environmental Issues Commonly Addressed in Environmental Impact Assessments
Environmental Impact

Global Environment

Regional Environment

Local Environment

Atmospheric• Global warming• Ozone-layer depletion• Acid rain

• Air pollution• Photochemical smog

Water quality

SoilOther• Marine pollution• Discharge of noxioussubstances• Loss of rain forests• Desertification• Consumption ofdepletable resources• Impacts on ecosystems

Tokyo Electron• Eutrophication oflakes and wetlands• River pollution• Ground watercontamination—• Soil contamination• Agrochemical contamination—• Impacts on human health

Environmental Report 2000