EHS Report
EHS Management

The Tokyo Electron Group regards environment, health and safety activities(EHS activities) as among its top business priorities.

Fundamental idea behind EHS activities
and our EHS promotion system
The Tokyo Electron Group regards human health, safety andThe Tokyo Electron Group’s EHS promotion system

the global environment as three of its most significant business

Global EHS Committee

priorities. Committed to earning the trust of all of those involvedin our business operations and to carrying out our businessactivities accordingly, we base our actions on our belief that EHSactivities will lead to long-term benefits for the entire Group. As
a responsible corporate citizen, we are committed to realizing ahealthier and more thriving society through implementation ofProduct
EHS

Customer-site
EHS

Plant andOffice EHS

EHS activities
concerning theGroup’s products

EHS activities atcustomers’facilities

EHS activities ineach region

our EHS activities.
We have established a system to promote EHS activities
throughout the entire Tokyo Electron Group. Our EHS activities coverISO 14001 certified plants and offices
Company namePlant/office name Certification date

three areas: Product EHS; Customer-site EHS, which concerns

Tokyo Electron Tohoku Ltd.

Tohoku Plant

February 19, 1998

product delivery and installation operations; and Plant and Office

Tokyo Electron Kyushu Ltd.

Koshi/Ozu Plants

March 26, 1998

Tokyo Electron Yamanashi Ltd.

Yamanashi Plant(Fujii/Hosaka)

May 15, 1998

EHS. These activities are overseen by our Global EHS Committee.
Our Group companies—manufacturing subsidiaries inTokyo Electron Miyagi Ltd.

Taiwa Plant

March 1, 2005

based on ISO 14001 standards and are currently in the process

Tokyo Electron Technology
Development Institute, Inc.

Sendai OfficeJune 24, 2010of obtaining ISO 14001 certification.

Tokyo Electron Device Ltd.

Yokohama Office

July 14, 2004

particular—have introduced environmental management systems• EHS training

checklist covers not only basic information such as site area andThe Tokyo Electron Group offers EHS training courses consisting of

total floor area but also input and output analysis, including theseveral levels for both Group employees and employees of partner

type and volume of energy used, volume of water consumption,companies who work at the Group’s facilities. The training program

implementation status of recycling, and usage of gas and chemicals

for new employees also includes mandatory EHS instruction.

(input), as well as the volume of emissions, water discharged, andwaste generated (output). All the data were checked against relevant• EHS monitoring systemlaws and regulations.

In order to enhance the effectiveness of our EHS management system, we
continually increase the level of auditing concerned with monitoring system
functions and results. Auditing is performed from multiple viewpoints,
including within plants and offices and within the Group, and by third parties.
Tokyo Electron’s manufacturing subsidiaries make every effort tocomply with laws and regulations, carefully checking environmental
laws, emissions standards, and other pertinent regulations while alsoestablishing their own standards for some substances.
In fiscal 2012, there were no environment-related accidents,violations, or litigations.

Environmental auditing underway• Biodiversity
The importance of protecting biodiversity during corporate activities
is increasing. Under our new Environment Vision (see p. 10), the• Environmental checking at newly
established business locations

In fiscal 2012, we conducted environmental audits at plants andoffices located in overseas markets, using a unified checklist. The
14

Tokyo Electron Group will investigate and analyze its current statusconcerning this issue and then determine a policy and plan in fiscal
2013 to promote the protection of biodiversity.

Tokyo Electron’s Environmental Commitment, defined in 2008
We aim to develop equipment that enables a 50% reduction—compared to 2007 levels—of
the total environmental impact of new customer factories scheduled for completion in 2015or later.
We aim for a 50% reduction—compared to 2007 levels—of the impact of our business andtransportation activities on the environment by 2015.
We will strive to achieve these commitments in partnership with our stakeholders.

The Commitment
is expected to be
fulfilled ahead ofschedule

plants including those for photovoltaic power sources, energy conservation• Environmental goals expected to beactivities, and the reorganization of business sites. By utilizing carbon

achieved ahead of schedule

The Tokyo Electron Group has been working on various environmental activities(including that made available under the government scheme to support

at customers’ factories as well as within the Group with the aim of reducing

recovery following the Great East Japan Earthquake), which amounted

environmental impacts by 50% over the baseline year of fiscal 2008 by the end

to approximately 50,000 tons, as well as through the use of a renewableof March 2015. However, since this goal is expected to be achieved earlier thanenergy programs in the United States, CO2 emissions per unit of sales*3

planned (in fiscal 2012), we have set new environmental goals (see p. 11).

and total CO2 emissions were reduced by 52% and more than 60%,

HIGHLIGHT

offsetting*1 with a domestic clean development mechanism (CDM)*2

respectively, making it very likely that we will achieve the 2008 goal soon.
2 -2 Customer shipments

The selected major pieces of equipment are expected to achieve thecustomers in fiscal 2012 decreased by 54% to approximately 66,000

target of a 50% reduction in CO 2 emissions per 300 mm wafer soon.

tons, and by 22% per ton-kilometer*4. For shipments outside Japan, theCO2 emissions generated during the transportation of products toshare of marine transportation increased by more than 20 points over2 Reduce the environmental impact of our businessand transportation activities by 50%

the baseline year of 2008 to 37.8%. In order to address longer shipment

2 -1 Business activities

continue our efforts to minimize lead time, reduce equipment weight bytimes resulting from a shift from airborne to seaborne shipping, we will
reducing the number of parts used, and raise local procurement rates.

responsible for the development and manufacturing of products, were

*1 Carbon offsetting: A system by which companies can compensate for part or all ofgreenhouse gas emissions that cannot easily be reduced by purchasing credits equal
to the amount of reduction, or reabsorption, of greenhouse gases elsewhere*2 Domestic clean development mechanism (CDM): The approved mechanism for CO 2emissions reduction under Japan’s Domestic CDM System (a Japanese government
scheme that allows small and medium-sized businesses to receive funding, technology,and technical support from large businesses in order to work collaboratively to reduce
CO 2 emissions and trade the reduced amount as emission credits)*3 Per unit of sales: CO 2 emissions from business activities ÷ net sales*4 Ton-kilometer: A unit of measurement equal to the weight in tons of goods transported
multiplied by the number of kilometers transported

reduced in fiscal 2012 by approximately 25,000 tons to about 88,000 tons
compared with fiscal 2008, when the Environmental Commitment wasformulated (about 113,000 tons when calculated using the fiscal 2008
standards regarding applicable plants and offices and power factor). Thisis due to environmental investments made for the Miyagi and Yamanashi

EHS REPORT

CO2 emissions from our business sites, consisting mainly of plants

MANAGEMENT REPORT

1 Develop equipment that enables a 50% reduction in
the total environmental impact of customer factories

Goals and results for fiscal 2012 EHS activities and medium-term goals for fiscal 2013 onward

EHS
management

EHS internal audit

Reduction of productrelated environmental
Product-related impacts
initiatives for theenvironment
Measures to reduce theuse of regulated chemical
substances in equipment
Logistics-related Reduction of logisticsinitiatives for the related environmental
impacts
environment
Reduction of plant andoffice environmental
Plant and office impacts
initiatives for theenvironment
Promotion of waste
recycling
Health andsafety related
initiatives

Reduction in the numberof accidents/disasters
involving injuries orfatalities

Medium-term goals
Perform EHS internal audit at plants andoffices across the supply chain.
Reduce environmental impact by half in
FY2016 (in comparison to FY2008).
Basic unit: CO 2 emissions per 300 mmof wafer
Shipment of equipment with 98.5% ormore of parts in compliance with theEU’s RoHS
Reduce environmental impact by half in
FY2016 (in comparison to FY2008).
Basic unit: CO 2 emissions perton-kilometer

Performed safety audits atproduction facilities.
Implemented measuresfor 30-50% reduction in
major equipment and maderecommendations to customers.
Continued shipment of equipment
containing reduced amounts ofchemicals since October 2008.
Achieved a 54% reduction in
total CO 2 emissions and a 22%
reduction in CO 2 emissions per
ton-kilometer.
Total CO 2 emissions reduced byReduce environmental impact by half in
60% or more
FY2016 (in comparison to FY2008).
Achieved a 52% basic unit
Basic unit: CO2 emissions per unit of sales
reduction.
Increased the recycling rate of theAchieve a recycling rate of 97% or more.
entire Group to 97.4%.
Continue to achieve zero waste at
Achieved zero waste at production
production facilities.
facilities.
Establish a system to prevent accidents
Achieved a 50% reduction inthat may result in an injury or fatality,
accidents that may lead to a severe
and aim to eradicate accidents that mayinjury, compared with FY2011.
lead to a severe injury.
Achieved target

Plans and goals for FY2013

Relatedpages

Conduct environmental audits as well.

p. 14

Reduce power consumption of major
models of each business unit by 50%by FY2015.

p. 15
p. 16
p. 17

Continue to ensure that major modelsof each business unit contain 98.5% ormore parts that meet the EU’s RoHS.

p. 18

Promote a modal shift.
Continue monitoring.

p. 19

Achieve a 1% basic unit reduction overprevious fiscal year.
Comprehensive evaluation of basic unit
reduction at each plant and office

p. 15
p. 20

Maintain a recycling rate of 97% ormore.
Continue to achieve zero waste.

p. 22

Reduce accidents that may lead to asevere injury by 20% or more comparedwith FY2012.

p. 24

AchievementlevelResults for FY2012

Achieved 80% of target

Achieved less than 80% of target
15

SOCIAL REPORT

Action