EHS Report
EHS Management

The TEL Group regards environment, health andsafety activities (EHS activities) among its topbusiness priorities.

Fundamental Idea behind EHS Activities and Our EHS Promotion SystemThe TEL Group regards people’s health, safety and the global
environment as three of its most significant business priorities. We

Q The TEL Group’s EHS Promotion System
Global EHS Committee

are committed to earning the trust of all of those involved in ourbusiness operations and to carrying out our business activities
accordingly, basing our actions on our belief that EHS activities willlead to long-term benefits for the entire group. As a responsible

Plant and Office EHS

Customer-site EHS

Product EHS

EHS activities
in each region

EHS activities
at customers’facilities

EHS activities
concerning theGroup’s products

corporate citizen, we are committed to realizing a healthier and more
affluent society through implementation of our EHS activities.

Q ISO 14001 Certified Plants and Offices

We have established an EHS promotion system in order to foster

Company namePlant/Office name

Certification date

EHS activities throughout the entire TEL Group. Our EHS activities

Tokyo Electron Tohoku Ltd.

Tohoku Plant

February 19, 1998

Tokyo Electron Kyushu Ltd.

Koshi/Ozu Plants

March 26, 1998

Tokyo Electron Yamanashi Ltd. Yamanashi Plant

May 15, 1998

cover three areas: Product EHS; Customer-site EHS, which concerns
product delivery and design operations; and Plant and Office EHS.
These activities are overseen by our Global EHS Committee.

(Fujii/Hosaka area)

TEL’s Group companies and TEL’s manufacturing subsidiaries inTokyo Electron Miyagi Ltd.

Matsushima Plant

March 1, 2005

particular, began implementing environmental management systems

Tokyo Electron TechnologyDevelopment Institute, Inc.

Sendai Office

June 24, 2010

Tokyo Electron Device Ltd.

Yokohama Office

July 14, 2004

based on ISO 14001 standards in 1997 and are currently in theprocess of obtaining ISO 14001 certification.

EHS Training

system functions and results. Auditing is performed fromThe TEL Group offers EHS-based training courses for both

multiple viewpoints, including within plants and offices, withingroup employees and employees of partner companies who

the Group, and by third parties.
TEL’s manufacturing subsidiaries endeavor to comply withwork at the Group’s facilities. The training course for newlaws and regulations, carefully checking environmental laws,employees also includes mandatory EHS instruction.

emissions standards, and other pertinent regulations while also

EHS Monitoring Systemestablishing their own standards for some substances.

In order to enhance the effectiveness of our EHS management

In fiscal 2011, there were no environment-related accidents,

system, we continually increase the level of auditing that checks

Q Goals and Results for Fiscal 2011 EHS Activities and Goals for Fiscal 2012 EHS Activities
Action item
EHS management

Product-related
initiatives for theenvironment

Logistics-related
initiatives for theenvironment

Plant and officeinitiatives for theenvironment

Health and safety
related initiatives

EHS internal audit

Perform EHS internal audit at plants andoffices across the supply chain

Performed safety audits at production
facilities

Continue to conduct audits

p.14

Reduction of
product-related
environmental
impacts

Reduce environmental impact by half inFY2015 (in comparison to FY2008)
Basic unit: CO2 emissions per 300 mmof wafer

Implemented measures for 30-50%
reduction in strategically targeted
equipment and maderecommendations to customersDevelop and implement specifictechnology-based measures to achieve a50% reduction and continue to makerecommendations to customers

p.15
p.16
p.17

Measures to reduce
the use of regulated
chemical substancesin equipment

Shipment of equipment with 98.5% ormore of parts in compliance with the EU’s
RoHS

Continued shipment of equipment
containing reduced amounts ofchemicals since October 2008

Increase the number of products incompliance; continue to examine
chemical-related regulations andimplement measures for compliance

p.18

Reduction oflogistics-related
environmental
impacts

Reduce environmental impact by half in
FY2015 (in comparison to FY2008)
Basic unit: CO2 emissions per ton-kilometer

Achieved 14% basic unit reduction
through shifting to seaborne shipping
for domestic and overseas destinations

Help customers streamline their logistics
by shortening equipment delivery lead time,
which facilitates a modal shift, and byproviding lighter shipping weights andincreased local procurement

p.15
p.19

Reduction of plantand officeenvironmental
impacts

Reduce environmental impact by half in
FY2015 (in comparison to FY2008)
Basic unit: CO2 emissions per unit of sales

Total CO2 emissions reduced by 7%,
but basic unit increased

Promote energy conservation activities
by installing PV power generation systems
and undertaking energy-saving measures.
Use carbon offsetting

p.15
p.20

Waste reduction

Continue zero emission efforts at
manufacturing plants

Achieved zero emissions at
manufacturing plants. The recycling rate
for the entire Group rose slightly overthe previous fiscal year

Continue zero emission efforts andexamine reducing the total amount ofwaste

p.22

Achieve a 30% year-on-year reductionin the number of accidents involving
injuries or fatalities

The number of accidents involving
injuries or fatalities increased partly
due to a rise in product shipments,
thus the target was not achieved

Reduce accidents involving injuries orfatalities in FY2012 to the same or lower
level as in FY2010

Reduction in thenumber of accidents/
disasters involving
injuries or fatalities

Plans and goals for FY2012 onward

Relatedpages

Results for FY2011

Achieved target

14

Achievement
level

Midterm Goals

Achieved 80% of target

p.24

Achieved less than 80% of target

Tokyo Electron’s Environmental Commitment

1. Develop equipment that enables a 50% reduction in(2) Customer Shipments

actively utilizing carbon offsetting3 with domestic CDM.4

the total environmental impact of customer factories

The amount of CO2 emissions in fiscal 2011 was cut approximately

Some equipment delivered to customers has already been close toin half in comparison to the baseline year, and improved byachieving the target of a 50% reduction per 300 mm wafer unit. In

approximately 14% per ton-kilometer.
For shipments outside of Japan, transitioning from airborne toaddition to devoting efforts on the equipment level, we are also
striving for an overall reduction in environmental impacts, including

seaborne shipping entails lengthened shipment times, which we areoptimizing our customer’s energy use1 and addressing peripheral

addressing through efforts to reduce time spans needed to set up

equipment that they currently possess.

new equipment. Additionally, we are working to raise local

2. Reduce the environmental impact of our business andprocurement rates and reduce shipment weight by reducing
equipment parts. We are striving to make this overall transitiontransportation activities by 50%easier and working hand-in-hand with customers to reduce by halfStarting in fiscal 2011, the environmental impact of businessactivities and logistics are now managed separately.

our basic units (CO2 emissions per ton-kilometer).

(1) Business Activities

1 Energy use: Refers to the power, exhaust, coolant, purified water, etc. involved in
manufacturing a product.
2 Per unit of sales: CO2 emissions from business activities ÷ net sales
3 Carbon offset: The compensation for part or all of greenhouse gas emissions that cannot
easily be reduced by purchasing credits equal to the amount of reduction, orreabsorbtion, in greenhouse gas elsewhere.
4 Domestic CDM (Clean Development Mechanism): The approved reduction amount in CO2emissions in Japan’s Domestic CDM System (a Japanese government scheme thatallows small and medium-sized businesses to receive funding, technology, and technicalsupport from large businesses in working collaboratively to reduce CO2 emissions andtrade the reduced amount as emission credits)

As sales decreased in fiscal 2011, the amount of total CO2 emissions
was 7% lower when compared to the baseline year (fiscal 2008), butthere was an increase on a per unit of sales2 basis.
In fiscal 2011, in addition to the existing environmental
investment and energy saving programs to reduce CO2 emissions,
PV power generation systems were installed at our new plant inMiyagi Prefecture as well as the Yamanashi Plant. Furthermore, we
Q CO2 Emissions per Unit of Sales from Business Activities

Q CO2 Emissions per Ton-Kilometer in Customer-Bound Shipments(1,000 tons)(1,000 tons)

130
110

(t/100 million yen)

115

107

30

70

130

30

12.8

90

20

16.0
6.4

30

70

20

12.8

11.0102008
CO2 emissions

2011

7050

1030

100(t/ton-kilometer)

145

110

9050150

MANAGEMENT REPORT

are working to halve our CO2 emissions per unit of sales throughEHS REPORT

Progress in TEL’s EnvironmentalCommitment

SOCIAL REPORTP We aim to develop equipment that enables a 50% reduction−compared to 2007 levels−of the total environmental impact of newcustomer factories scheduled for completion in 2015 or later.
P We aim for a 50% reduction−compared to 2007 levels−of the impact of our business and transportation activities on theenvironment by 2015.
P We will strive to achieve these commitments in partnership with our stakeholders.

HIGHLIGHT

In May 2008, the TEL Group spelled out its environmental commitment under the environmental action slogan “Technology forEco Life.”

6.4

10
2008
CO2 emissions

2011
Per unit of sales

2015’15 Target

(FY)

00

2015

Per ton-kilometer’15 Target(FY)

0TOPICS
Domestic CDM Greenhouse Gas Reduction
Credit — TEL’s Participation in the Great East
Japan Earthquake Recovery Program
The TEL Group plans to take part in the Great East Japan
Earthquake Recovery Program under Japan's Domestic Carbon
Credit System. Through continued participation in this scheme, theGroup will obtain carbon offset credits to fulfill its environmental
commitment at the same time as supporting the areas damaged in
the Great East Japan Earthquake.

Companies in Japan Involvedin Emission Reductions(Joint-operator)
Domestic emissions credit
Purchase price-Donation
The Great East Japan Earthquake
Recovery Program
Purchase priceDomestic emissions credit

Donation

Community chest,
local government

Relief fundRescue aid fundTokyo Electron Limited (TEL)

15