Entering a New Stage

Developing New Business and Bolstering
Existing Business
To remain innovative in the ever-advancing semiconductor production equipment sector, Tokyo Electron is enhancing its businessdevelopment in frontline areas. Through corporate acquisition, we have added four new companies to the Group.

TEL Magnetic Solutions Ltd.
Establishing production technology for promising next-generation memory, MRAMTokyo Electron has been working on equipment development in order to establish production
technology for Magnetoresistive Random Access Memory (MRAM), a next-generation memory
technology that is attracting attention. In December 2012, we acquired Magnetic Solutions
Ltd., which possesses high-level technology for the important MRAM production process ofthermal processing in a magnetic field, and established TEL Magnetic Solutions Ltd.
As MRAM allows for high-speed writing with low power consumption, it is expected toreplace current mainstream technology DRAM to become a key memory technology.

Magnetic Annealing System

Activities: Development, manufacturing and sales of Magnetic Annealing System
Location: County Dublin, Ireland

TEL Solar AG
Contributing to the global environment

In November 2012, Tokyo Electron established TEL Solar AG after acquiring Oerlikon
Solar, which has world-leading technology in thin-film silicon photovoltaic panel
production. Among the many types of photovoltaic panels, thin-film silicon photovoltaicpanels generate more power than crystal photovoltaic panels, even in high-temperature
regions right on the equator and in mostly cloudy regions. By combining Oerlikon
Solar’s technologies with the technologies that we havenurtured in our semiconductor production equipment
business, we will be able to dramatically improve
conversion efficiency and productivity.
As there is growing need for eco-friendly
power generation systems, we will use ourtechnologies for the development of anenvironmentally sustainable society.

Activities: Development, manufacturing and sales of photovoltaic
panel production equipment
Location: Trübbach, Switzerland
8KAI TM MT
PECVDSystem

TEL FSI, Inc.
HIGHLIGHT

Developing cleaning system business
The ongoing miniaturization of chips has increased the importance of cleaning processes that remove particles*, photoresist, nitride
film and contaminants.
In October 2012, Tokyo Electron established TEL FSI, Inc. after acquiring FSI International, Inc., a global supplier of innovative
cleaning solutions and advanced technologies with a broad customer base. As FSI’s processing technology and our technologies
complement each other, this combination will increase our capabilities and strengthen our product portfolio.

Activities: Development, manufacturing and sales of cleaning systems
Location: Minnesota, United States

ORION TM
Single wafer
cleaning system

StratusElectrochemical deposition system

TEL NEXX, Inc.
Ever-evolving semiconductors—Working on smaller packaging and lower power consumption
The increased demand for smartphones, tablets and other mobile devices is driving thegrowth of the advanced packaging market. Advanced packaging technologies reduce
form factors, enabling smaller devices that manage power more effectively, whiledelivering increased functionality.
In May 2012, Tokyo Electron acquired NEXX Systems, Inc., a market leader
in plating and sputtering equipment supplier, to serve this high growth 3D wafer
level packaging market. The wholly owned, US subsidiary was established as TEL
NEXX, Inc., broadening TEL’s equipment solutions to include high volume advanced
packaging tools.

GlossaryActivities: Development, manufacturing
and sales of ECD system,
PVD system and sputter
deposition
Location: Massachusetts, United States*Particles: Very small impurities on wafers9