Special Feature

Roundtable Opinion Exchange with TEL Representatives
Considering safety and environmental issues at the product development and design stages is key to the TEL’s environment and safety activities.
For this special feature, we had those employees in charge of product safety and environment issues gather and discuss the current state of affairs and future challenges. We hope to parlay this discussion into an opportunity to continue with these cross-cutting discussions that transcend the boundaries of business units.

Satoru Inoue
CT Quality Assurance Dept. Tokyo Electron Kyushu Limited

Yukitsugu Kazuno
Environmental Occupational Health & Safety CenterTokyo Electron AT Limited

Toshihiro Kobayashi
ESD Quality Assurance Dept. Tokyo Electron AT Limited

Yuji Maeda
FPD Quality Assurance Dept. Tokyo Electron AT Limited

Kenji Soejima
CS Administration Dept. Tokyo Electron Kyushu Limited

Seikou Ueno
TPS Engineering Control Dept. Tokyo Electron AT Limited(From left to right)

equipment, unlike those we have for safety, that it is difficult

Safety has reached a fairly high level. We havetaken our first step in assuring environmental quality,and now it’s time to mounta full-scale effort to tackle this issue.

to create a big increased in awareness or the view of it assomething essential. I think the determining factor is thedemands placed by the customers.

Kobayashis Our development engineers have always put thehighest priority on the safety of our equipment when used bySoejimas We are getting an increasing number of requests forcustomers. At this point in time, I think we’ve achieved quite

our equipment’s environmental burden data as well as inqui-a high level. I believe this holds true for all equipment. In theries related to the environment. We are really seeing a swellcase of the environment, we have also made certain gains inin the interest of customers in TEL equipment’s environmen-areas where customers clearly voice demands, such as intal considerations.

the realm of energy conservation, as well as in areas where
there are clear-cut regulations, such as the lead-free

Maedas What we spend the most time on in terms of safety formovement, which makes it easy to set targets.

FPD production equipment is occupational safety. After all, weare dealing with production equipment that weighs 60 tons, soUenos There needs to be a process where we can set andwe pay a lot of attention to where we work. Compared to semi-achieve qualitative targets for those things pertaining to theconductor production equipment, there seem to be fewer

environment that have no concrete standard. We need torequests from FPD production equipment customers regarding

further promote product EHS road map* for the goal.

the environment, but we believe these will grow in the future.

*Product EHS road map: A product EHS target. It includes thefollowing items: input and output required for or generated by
the product during use, LCA, green procurement, lead-free,recycling, etc.

Our Environmental Approach
Taking the Lead in the Environment
Inoues In making the shift to lead-free production equipment, weKazunos Not only the safety of customers, but occupational

followed instructions from the top of our company and estab-safety within TEL is also an important issue. A work environ-lished a company-wide team to review the strategy and allo-

ment where people can work comfortably raises productivitycated a budget. With all of the company working toward one

and improves quality. On the other hand, it’s probably

theme, it makes me think that the TEL has taken anotherbecause of a lack of clear environmental standards forstep forward in environmental initiatives. As a company thatTOKYO ELECTRON

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Environmental Sustainability
Report 2004

in Charge of Product Environment and Safety

Product EHS Road Map Reduction Targets for Inputs and Outputs During the use of Semiconductor Production Equipment
FY 1998 Standards*1

FY 2000 Standards*2

FY 2006 Targets

FY2008 Targets

200 mm equipment

300 mm equipment200 mm equipment

300 mm equipment

300 mm equipment

Energy consumption

1*1

1*2

0.8

0.50.4

Water consumption(coolant water, etc.)

1*1

1*2

0.8

0.4

0.4

Water consumption(ultra-pure water)

1*1

1*2

0.65

0.7

0.6

3 emissions

1*1

1*2

0.35

0.4

0.35

VOCs*4 emissions

1*1

1*2

0.35

0.4

0.35

HAPs*

*1 FY 1998 is the standard for consumption and emissions per unit area for 200mm equipment and equal to a value of one*2 FY 2000 is the standard for consumption and emissions per unit area for 200mm equipment and equal to a value of one*3 HAPs (Hazardous Air Pollutants)*4 VOCs (Volatile Organic Compounds)

produces industrial equipment, I think our company is at thetechnology or you can’t do anything. I believe that it is impor-forefront of the lead-free movement.

tant for employees in charge of environmental management tocollaborate with development engineers in accruing elemental

Soejimas The difficult aspect in the case of the environment istechnology and providing that as feedback to design engineers.

that the type of the environmental burden varies with eachpiece of equipment. Lead was easy to gain consensus on as

Inoues For example, what do we address in terms of harmful

it’s common in all equipment, but I think it would be difficult

substances after we have tackled lead? I suppose that it isto establish company-wide targets for other items.

probably most realistic to narrow down the substances to betargeted in phases. I would like to see us advance our envi-Inoues I think it is important to set environmental targets for eachronmental approach one step at a time.

piece of equipment and create an atmosphere throughout thecompany where each member of TEL is aware of this and hasSummary

the attitude “I’m taking efforts to protect the environment” sothat development engineers will be able to allot a maximum of

Below is the summary of the discussion conducted. AtTEL, we will continue concrete discussions on how wecan resolve these issues.

energy to devising environmentally-conscious designs.
Furthermore, there is the message from our President
calling on us to “Show leadership when it comes to the envi-q Environmental considerations in making equip-ronment.” I think it is important to spread this thinking

ment are of central concern for TEL in its
approach to the environment and safety.

throughout TEL.

w It is necessary to spread awareness among eachUenos In order to take leadership in terms of the environment, notand every employee that this is an important topic.

just development engineers need to pay attention to theenvironment when it comes to equipment performance.

e We will continue to hold discussions on the mer-

Another idea is to create a specialized department for envi-

its and need to create a specialized department
to deal with environmental technology.

ronmental technology, which would collaborate with devel-r We will continue to hold discussions on theme

opment engineers to develop equipment.

common in TEL companies, as with the movement to go lead-free.

Kobayashis Unlike equipment safety technology, with environmental technology you have to be familiar with elemental

TOKYO ELECTRON

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Environmental Sustainability
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