Envir o n m e n t a l R e p ort

EHS Activity Goals and Results
TEL has set goals for EHS activities and is promoting those activities throughout the group.

Goals and results for EHS activities in FY 2005
Action plan in FY 2005

Results

Health and safety

EHS management

Plans and goals for FY 2006 onward

Page in report

Performed for newly-developed equipment

Continue to perform

P18

Implement lead-free solder in products

Identified issues in customer’s plants, prepared
investigations for technical standards, etc.

Address issues, prepare for start of production inJanuary 2006

P20

Green procurement

Surveyed components at suppliers for hazardous substances in accordance with guidelines
on substances banned or subject to reductionin products and with JGPSSI* survey

Construct system enabling creation of component
database with survey results and use of the database during component searches or ordering

P21

Reduce energy consumption(1% decrease in CO2 emissions per unitof sales, as based on Law Concerning
the Rational Use of Energy)

Actual CO2 emissions increased, but fell 12%
per unit of sales since previous year

Continue to promote energy conservation and aim
to get closer to 1997 level of energy consumption
per unit of sales

P22

Zero emissions

Accomplished at four plants in Kyushu region
and in Yamanashi, Tohoku, Miyagi and Amagasaki; recycling rate for the entire groupraised to 96%

Promote zero emissions and waste reduction programs in regions other than manufacturing plants

P23

Continue tracking the amount of chemicals used that are subject to PRTR
reporting

Determined amounts of relevant substancesused, identified where they are emitted to, andtracking for the group overall from this fiscal year

Continue surveys

P25

No accidents requiring 4 or more days
off; 30% reduction in injury accidents
from previous fiscal year

Some accidents required employees to take 4or more days off; there were increases both inrate and absolute number of injury accidents
over previous year

For FY 2006, set goals for accidents requiring
emergency measures, office accidents, ergonomically caused accidents, etc. and work to reducethemP26,27

Continue TEL Eco-Activities(simple EMS) at office facilities

Acquired ISO 14001 certification at Tokyo
Electron Device Yokohama office

Examine introduction of web-based environmental training

P12,29Introduce occupational safety andhealth management systems in manufacturing plants

Promoted risk assessments at plants where
they had not been introduced yet

Execute meaningful risk reduction plans, verify
their effects

EHS mutual assessments

Added and performed checks addressing environmental performance and product EHS to the existing
EHS mutual assessment procedures for work safety

Promote activities at overseas offices

Began tracking state of safety training in Asia
via the web

Perform assessment in each region using assessment methods to which new elements have been
added
Investigate how environmental training is conducted; introduce into new regions; track state oftraining via the web

Product initiatives
for the environment

Environmental
activities
at eachplant or officeEvaluation

Perform life cycle assessments

Achieved target

Achieved 80% of target

Achieved less than 80% of target

Safety and the environment:
critical considerationsin the development stage–P12P29* JGPSSI: Japan Green Procurement Survey Standardization Initiative

This section summarizes safety and environmental initiatives in theAs the awareness of product standardization
has grown, we have created a foundation
for building in eco-friendliness and reducing
the physical burden to workers.

year ended March 2005 from the viewpoint of managers in the field.

Until recently, TEL’s approach to each customer’s order was to create a

In the realm of safety, TEL has reviewed the safety of each type ofcompletely new design meeting the customer’s needs in his order forproduction equipment it provides. TEL has been designing and devel-semiconductor and FPD production equipment. Now, however, weoping its production equipment based on the safety standards promul-

have begun to promote standardization. Our designs employ common

gated by SEMI*, among other sources, but the latest review also con-platforms, and a variety of modules are assembled onto the platforms.

sidered safety during start-up, maintenance and other times when theIt is essential to standardize equipment in order to further the goals ofequipment is not actually running. Another item considered was theproduction equipment safety and protection of the environment, so weimportance of reducing equipment weight in order to lessen the physi-

see our current efforts as simply preparation for reaching further objec-

cal burden imposed during start-up and maintenance. Although thistives. There is plenty of room for further standardization. This process

objective is in direct conflict with the recent trends to larger sizes andwill be continued for equipment, designs and components.

weights of semiconductor production equipment, TEL is emphasizing

Meanwhile, we are tackling another issue, that of cutting employ-ergonomic engineering in its design inees overtime. One example of this is thatorder to reconcile these opposing goals.

whereas extra workloads once fell on a

As for the environment, customers

certain few departments or employees,

are increasingly requiring that we reduce

now, as the spirit of “kaizen” spreads

not just equipment voltage but overall

from the management to employees,environmental burden. TEL is aware that

there is much more equality in the shar-the environmental burden of our products

ing of the workload.

is greatest during equipment operation,
and we are working to mitigate this burden by starting at the design and development stage.

Masaki Kaneko

Hirofumi Kitayama

Director
Environment, Health & Safety CenterTokyo Electron Limited

President andRepresentative Director
Tokyo Electron AT Limited* SEMI: Semiconductor Equipment and Materials International: An international industry group consisting of manufacturers of semiconductor and FPD production equipment and materials

TOKYO ELECTRON Environmental and Social Report 2005

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