Introduction toSEAJ-Recommended
Service Safety Training
Program

SEAJ
Semiconductor Equipment Association of Japan (SEAJ), founded in March 1985, promoted by the major semiconductor equipment manufacturers, is a nationwide organization of semiconductor manufacturing, ﬂat panel display (FPD)
and solar-photovoltaic (PV) manufacturing equipment manufacturers and related equipment manufacturers.

ROKUBANCHO SK BLDG,6F 3,Rokubancho,Chiyoda-ku,TOKYO,102-0085 JAPANTel 81-3-3261-8262
E-mail anzen@seaj.or.jp

Fax 81-3-3261-8263
URL http://www.seaj.or.jp

What is SEAJ-Recommended Service Safety Training Program

Semiconductor, ﬂat panel display or photovoltaic device manufacturing facilities contain a lot of hazards
and risks.

This is due to the fact that their manufacturing processes are based on physical chemical

reactions and utilize the manufacturing equipment that is becoming more automated and complicated inrecent years.
Moreover, due to pressures to startup a new device manufacturing facility under tight timelines, there are
additionalsafetyrisks

resultingfroma

diverseworkforce,comprisedof

diﬀerent

equipment

manufacturers and trade contractors, who are expected to work together seamlessly in complicated andtight environments. Additionally, beyond startup environments, it is also important to secure the safety of
the workers who are involved in ﬁeld service or production as well.
In the past, there was never a standard textbook of safety training for workers involved in installation,
maintenance or service of manufacturing equipment. While there has been a guideline such as SEMI S19“Safety Guideline for Training of Manufacturing Equipment Installation, Maintenance and ServicePersonnel”, without a standardized textbook and curriculum, each equipment company was developing
their own independent safety training.
In view of such situations, Semiconductor Equipment Association of Japan prepared the standard
textbook and training program in 2002. The textbook was revised in 2003 to cover the core curriculum
deﬁned by SEMI S19. Since then, the textbook has been revised several times capturing requirementchanges and referencing the latest examples of safety incidents. SEAJ started to train the trainers in 2003
to promote this safety training program in the semiconductor manufacturing equipment industry, and as
a result the accumulative number of trainees to date has reached more than 30,000 in Japan andoverseas.
We believe that the workers who have received the common safety training would have developed
common practices and awareness of safety, ultimately creating a safer working environment together
through mutual communication and understanding.
The following is the outline of the safety training program which we are promoting.

History of SEAJ-Recommended Service Safety Training Program
2001/0２

Established SEAJ Safety Training Working Group

2002/01

Started the training for companies in Japan

2002/04

Started the training for companies in Japan

2003/11Released training textbook and supplemental video (“Safety in Cleanroom”) covering core curriculum deﬁned by SEMI S19-1102

2005年７⽉

Released training textbook R.1.00 and started refresh training R.2.00 for companies in Japan2011年4⽉

Released training textbook R.2.00

2012年１⽉

Released refresh training R.2.00－１－Outline of safety training●

Target work / place
Work related to installation, maintenance, service, and operation of device manufacturing equipment
which are conducted under cleanroom environment such as fab and sub-fab.

●Target trainees
Engineers of equipment manufacturers (such as ﬁeld service engineers) and other workers who work atcleanroom●●

Length of training
Initial training

About two days

Refresh training

About one day

Conﬁrmation method of training eﬀectivenessImplementation of skill check●

Certiﬁcate of completion
Issuance of SEAJ certiﬁcate●

Validity period
Three years (maximum)
Refresh training should be conducted within three years.

Certificate (for trainees / for trainers)●

Ones for trainees are in blue while ones for trainers are in gold.

●The certiﬁcates have serial numbers.

●Each company which has the certiﬁed trainer(s) can purchase blank cards of the certiﬁcate from SEAJ after completion ofthe training and issue the certiﬁcate with the name of the person in charge of the company.

－２－Contents of safety training●

This safety training covers the core curriculum deﬁned by SEMI S19 “Safety Guideline for Training of Manufacturing
Equipment Installation, Maintenance and Service Personnel”.

●

The curriculum of the safety training has been developed by SEAJ Safety Training Working Group, which consists of 22
member companies .

●Also device manufacturers have participated in the Working Group to jointly develop standard practices related to facility ofdevice manufacturers.

Chapter 1

In this chapter, trainees will learn basic concept of safety and basic knowledge which is required to establish safe and com-

Safety basics

fortable work environment free of injury or accident.

Chapter 2

In this chapter, trainees will learn various environmental factors existing in workplace and their hazards which aﬀect work-

Workplace / work environment

ers and their work.

Chapter 3

In this chapter, trainees will learn injuries caused by inappropriate working posture or activities and what each worker

Ergonomics

should pay attention to during work to prevent or mitigate these injuries.

Chapter 4

In this chapter, trainees will learn safe and proper usage of hand tools such as screwdrivers and wrenches and power tools

Hand tools and power tools

such as electric drills.

Chapter 5
Material handling equipment

In this chapter, trainees will learn how to secure safety during carrying task using material handling equipment, especially
how to supervise lifting work appropriately. Also the trainees will practice how to use material handling equipment appropriately.

Chapter 6

In this chapter, trainees will learn how to recognize a conﬁned space and its related hazards and how to eliminate the haz-Conﬁned spaceards in order to work safely in conﬁned space.

Chapter 7

In this chapter, trainees will learn how to protect workers against fall during elevated work, which is performed in an elevat-Elevated work / Practical training ed position using stepladders, scaﬀolds, etc.
Chapter 8

Trainees will learn how to perform electrical work safely without harming themselves and persons around them or damaging

Electrical work

equipment. Completion of this chapter is recognized equivalent to “Electricity License” of a speciﬁc customer.

Chapter 9

Trainees will learn hazards associated with chemicals and basics of proper handling of chemicals so as to prevent injury andChemical hazards

incident due to chemicals.

Chapter 10

Trainees will learn basic knowledge of radiation energy and how to protect themselves against its exposure, which may

Radiation energy

result in death.

Chapter 11
Mechanical and thermal hazards

Trainees will recognize mechanical and thermal hazards and learn knowledge necessary for safe work.

Chapter 12

Trainees will learn how to eliminate or mitigate hazards associated with high pressure or vacuum which are widely used in

Pressure and vacuum

semiconductor and FPD device manufacturing facilities.

Chapter 13
Unmanned Transport Vehicle

Trainees will learn characteristics, behavior and hazards of unmanned transport vehicle which are used for materials transportation in semiconductor and FPD device manufacturing facilities so as to prevent accidental contact with unmannedtransport vehicles.

Chapter 14

Trainees will learn characteristics of behavior and hazards of industrial robots and how to protect themselves against theIndustrial robot

hazards.

Chapter 15

Trainees will learn types of hazardous energies and their hazards, importance of controlling hazardous energies, and its

Control of hazardous energy

principles so as to protect workers against unexpected release of hazardous energy.

Chapter 16
Personal Protective Equipment

Trainees will learn purpose of personal protective equipment (PPE) and how to use it properly.

(PPE) / Practical training
Chapter 17
Risk assessment
Chapter 18
Emergency response

Trainees will learn the internationally recognized deﬁnition of safety , concept of safety, evaluation of risk and a method ofrisk assessment, and will acquire an ability to assess risk associated with equipment or work, and to recommend process
and method to reduce the risk.
Trainees will learn standard procedures in case of an emergency including reporting and initial responses.

－３－