They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.

Fieldbus Interface
Fieldbus nameStandard applied

Interface, physical

SafetyBPG402-SD, BPG402-SE, BPG402-SP→  [10]

Communication protocol,
data format

Bayard-Alpert Pirani Gauge
Dual Filament Bayard-Alpert Pirani Gauge
With Fieldbus Interface

DeviceNet

Symbols Used

DeviceNet Parameters
Data rate (adjustable via"RATE" switch)

DANGER
Information on preventing any kind of physical injury.

CautionInformation on correct handling or use. Disregard can leadto malfunctions or minor equipment damage.

Instruction Sheet

Node address (MAC ID)(adjustable via "ADDRESS,
MSD, LSD" switches)(2019-01)

DeviceNet Cable Connection"STATUS MOD" (gauge status):

Housing and vacuum connection →  [1], [2], gauges with
DeviceNet interface are longer as illustrated below:

 If no DeviceNet cable is available, make one according

Light status

Meaning

Off

No supply

Flashing
red/green

Selftest

Green

Normal operationRed

Non recoverable error

to the following indications:→  [3], [10]CAN bus1

DeviceNet connector
Cable

Personnel Qualifications
Skilled personnel

42
125 kBaud
250 kBaud
500 kBaud"P" (programmable
125 kBaud, 250 kBaud,
500 kBaud via DeviceNet,→  [3])0 … 63dec"P" (programmable
0 … 63 via DeviceNet)5

Micro-Style, 5-pin, male
Shielded special
DeviceNet cable,
5 conductors(→  [8], [10])According to DeviceNet
specifications(→  [8], [10])

Pin 1
Pin 2

About this document
This document is a supplement to the standard Instruction
Sheet enclosed with the BPG402-Sx ( [1]). It should be
used together with the standard Instruction Sheet.
The symbol (→  [XY]) refers to documents and files
listed under "Further Information".

General Safety Instructions
All safety instructions given in  [1] and [2] apply to thesensor types described in this document, too.

Pin 3
Weight353-576353-577≈490 g≈750 g

Pin 4
Pin 5

Sensor Cable Connection
Make sure the vacuum connection is properly made(→  [1], [2], "Vacuum Connection").

(Valid for BPG402-SD, BPG402-SE and BPG402-SP)(

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties• use the product in a non-conforming manner

The end-user assumes the responsibility in conjunction withthe process media used.
Gauge failures due to contamination or wear and tear, as
well as expendable parts (e.g. filament), are not covered by
the warranty.

This document applies to products with the following partnumbers:
BPG402-SD (DeviceNet, 2 switching functions):
353-576 (DN 25 ISO-KF)
353-577 (DN 40 CF-R)
BPG402-SP (Profibus, 2 switching functions):
353-574 (DN 25 ISO-KF)
353-575 (DN 40 CF-R)
BPG402-SE (EtherCAT, 2 switching functions):
Latest EtherCAT version (ETG.5003.2080 S (R) V1.3.0)
353-596 (DN 25 ISO-KF)
353-597 (DN 40 CF-R)
Old EtherCAT version (ETG.5003.2080 S (R) V1.0.0)
353-590 (DN 25 ISO-KF)
353-591 (DN 40 CF-R)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations inthis document correspond to the vacuum connection
DN 25 ISO-KF. They apply to other vacuum connections by
analogy.
We reserve the right to make technical changes without priornotice.
All dimensions in mm.

Intended Use
The BPG402-SD, BPG402-SE and BPG402-SP gauges havebeen designed for vacuum measurement of gases and gas
mixtures in a pressure range of 5×10-10 ... 1000 mbar.

3
6
4

RxD

14

Degas

7

Degas

Before the gauge is put into operation, it has to be configured
for the DeviceNet. A configuration tool and the device specific EDS file (Electronic Data Sheet) are required for this purpose. This software can be downloaded via internet(→  [7]).

-

12

+

VS

42 kΩ

8
10
5
15

-

Node Address Setting

15

8

The BPG402-SD gauge has a fieldbus interface that
conforms to the DeviceNet standard (→  [10]).
Via this interface, the following and further data areexchanged in the standardized DeviceNet Protocol(→  [3], [10]):• Pressure reading• Pressure unit (mbar, Torr, Pa)• Degas function• Status and error messages
Two adjustable switching functions are integrated in thegauge. The corresponding relay contacts are available at thesensor cable connector.

Ident.

General technical data of the sensor and sensor
electronics →  [1], [2].

Set the node address (0 … 63dec) via the"ADDRESS" "MSD" and "LSD" switches.
The node address is polled by the firmware
when the gauge is switched on. If the setting deviates from the stored value, thenew value is taken over into the NVRAM. If
a setting higher than 63 is made, the previous node address setting remains valid.
Default address setting is 63dec.
If the MSD switch is in the "P" position, thenode address is programmable via theDeviceNet (→  [3]).

- - 24V

D-Sub,15 pins,
female,soldering side

Data Rate Setting

Red

Communication error. The gauge has detected an error that impedes communication via the network (e.g. two identical nodeaddresses (MAC ID) or "Bus-off")

BPG402-SE
General Information
The BPG402-SE gauge has a fieldbus interface
that conforms to the EtherCAT Technology Group(ETG) and to the EtherCAT Semiconductor
Device Profile (→  [12], [13], [14], [15]).
Via this interface, the following and further data
are exchanged in the standardized EtherCAT
Protocol (→  [1], [2]):• Pressure reading• Pressure unit (mbar, Torr, Pa)• Status and error messages
Two adjustable switching functions are integrated in thegauge. The corresponding relay contacts are available at thesensor cable connector.
The basic sensor and sensor electronics of the BPG402-SE
type are the same as in the standard BPG402-S (→  [1],[2]).

Technical Data
General technical data of the sensor and sensor
electronics →  [1], [2].

Electrical Connection

Sensor Cable Connection
For reasons of compatibility, the expression "sensor
cable" is used in this document, although the pressure reading of the SD-type gauge is normallytransmitted via the DeviceNet interface.
Connector
Cable
Cable length, (conductor crosssection per conductor)

Switching functions

The basic sensor and sensor electronics of the BPG402-SD
type are the same as in the standard BPG402-S (→  [1],[2]).

Technical Data

One or several input/output connections in"timed out" status• Degas function

Ground (housing, vacuum connection)

1

Flashing red

2

BPG402-SD
General Information

Data transmission errors
If the gauge is operated via an RS232 interface
and the DeviceNet at the same time, data transmission errors may occur.
The gauge must not be operated via an RS232
interface and the DeviceNet at the same time.

1.25 AT

9

Gauge online; necessary connections establishedCautionCommon (power GND 24V supply)+24 V (dc)(+11 … +25 (dc))
Power consumption≤2 W
The gauge is protected from reversed polarity of the supply
voltage.

Green

13

Measuring
signalSupply voltage at the DeviceNet
connector, pin 2

Gauge online but no connection:– Selftest concluded, but no connection
to other nodes established– Gauge not assigned to any master

Operating Software

9

The gauge may only be connected to power
supplies, instruments or control devices that
conform to the requirements of a grounded protective extra-low voltage (PELV). The connection
to the gauge has to be fused.

Flashing green

1

TxD

DANGER

Gauge not online:– Selftest not yet concluded– No supply, → "STATUS MOD" light

11

SP B

+24 V (dc) (+20 … +28 V)≤18 W• disregard the information in this document

W

Validity

SP A
SP B

SP A

DeviceNet operation requires an additional,
separate power supply.

• use the product with accessories not listed in the productdocumentation.

INFICON AG, LI-9496 Balzers

1)

RS232

• make any kind of changes (modifications, alterations etc.)
to the product

Model:PN:
SN:
V

Threshold values)

Meaning

Off

Operation

 If no sensor cable is available, make one according to

The power consumption of the BPG402-SD ishigher than that of the standard BPG402-S(→  [1], [2]).

Light status

GND

cable connector.

Power Connection

Liability and Warranty

Product Identification+24 V (dc) Connect the DeviceNet cable to the gauge and lock theSupply Voltages

Supply voltage at the sensor
connector, pin 8
Power consumption"STATUS NET" (network status):

Drain
Supply(DeviceNet interface only)
Supply common(DeviceNet interface only)
CAN_H
CAN_L

the diagram.
All work described in this document may only be carriedout by persons who have suitable technical training and thenecessary experience or who have been instructed by theend-user of the product.

Micro-Style, 5-pin,(DeviceNet), female
soldering side3(→  [3])Cable length, system wiring

tima47e1-cDimensions [mm]Relay contact rating
Voltage
Current
Gauge identification

Grounding principle

D-sub, 15-pin, malemax. 12 conductors,
shielded≤35 m (0.25 mm2)
≤50 m (0.34 mm2)≤100 m (1.0 mm2)2
Setpoints adjustable via
potentiometers (Setpoints
A and B), one floating,normally open contact per
setpoint≤30 V (dc)≤0.5 A42 kΩ between pin 10
and pin 5 (sensor cable)

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5
Pin 6
Pin 7
Pin 8
Pin 9
Pin 10
Pin 11
Pin 12
Pin 13
Pin 14
Pin 15
1)

Relay switching function A, common contact
Measuring signal output
0 … +10 V
1)Threshold (setpoint) A
0 … +10 V
Relay switching function A, NO contact
Supply common
0V
1)
Threshold (setpoint) B
0 … +10 V
Degas, active high
0 V/+24 V
Supply (Vs)
+24 V
Relay switching function B, common contact
Gauge identification
Relay switching function B, NO contact
Measuring signal common
RS232, TxD
RS232, RxD
Do not connect

Do not connect pin 3 and pin 6 for normal operationof the gauge. These pins are reserved for adjustment of the setpoint potentiometers (→ "Setting the
Switching Functions").

By means of the "RATE" switch, the data rate canbe set to 125 ("1"), 250 ("2") or 500 kBaud ("5").
Default data rate setting is 500 kBaud.
If the switch is in any of the "P" positions, the data
rate is programmable via the DeviceNet (→  [3]).
The admissible data rate depends on several factors(system parameters, cable lengths etc.) (→  [10]).

Fieldbus Interface
Fieldbus nameStandard applied, data format,
communication protocol
353-590, 353-591
353-596, 353-597
Data rate
Node address

Adjusting the Gauge

Physical layer→ Adjustment and settings.

EtherCAT connector

Adjusting the Switching Functions

Cable→ Adjustment and settings.
Cable length

Status Lights

 Connect the sensor cable to the gauge and secure it
using the lock screws→ "Power Connection"t i ma 4 7 e 1 - c

Original: German tima47d1-c (2019-01)

EtherCAT→  [12], [13]→  [14], [15]100 Mbps
explicit device identification
100Base-Tx (IEEE 802.3)
2×RJ45, 8-pin (socket)<IN>: EtherCAT input<OUT>: EtherCAT output
shielded, 8-pin special
Ethernet Patch cable(quality CAT5e or higher)≤100 mSupply Voltages

Supply Voltages

Operation
CautionThe power consumption of the BPG402-SE is higher
than that of the standard BPG402-S.
Supply voltage at sensor cableconnector, pin 8
Power consumption

Data transmission errors
If the gauge is operated via an RS232 interface
and the EtherCAT at the same time, data transmission errors may occur.
The gauge must not be operated via an RS232
interface and the EtherCAT at the same time.

+24 V (dc) (+20 … +28 V)≤21 W

Sensor Cable Connection→ "Technical Data, Sensor Cable Connection" of the gauge
BPG402-SD (identical).

Housing and vacuum connection →  [1], [2]Explicit Device Address Setting

Weight353-590, 353-596
353-591, 353-597≈490 g≈750 gDuring device initialization, the device address switches areread by the device firmware. This device address is supported to the master as Explicit Device Identification.
The explicit device address is set in hexax1
x10
decimal form (00 … FFhex) via the <x10>
24 6 24 6
080
8and <x1> switches.
E

Power Connection

The power consumption of the BPG402-SP is higher
than that of the standard BPG402-S.
Supply voltage at sensor cableconnector, pin 8
Power consumption+24 V (dc) (+20 … +28 V)
≤20 W

A E

→ "Technical Data, Sensor Cable Connection" of the gauge
BPG402-SD (identical).

Adjusting the Gauge
Dimensions

p pressure
U Threshold voltage [V]c constant (pressure unit dependent)

Adjusting the Switching Functions≈490 g≈750 g→ "Adjustment and settings".

pc[mbar][Pa][Torr]

02-0.125

Measuring signal(Pressure p)

MeA

Adjusting the Gauge

Make sure the vacuum connection is properly made(→  [1], [2], "Vacuum Connection").

Adjustment and Settings

Sensor Cable Connection

Adjusting the Gauge If no sensor cable is available, make one according to If no sensor cable is available, make one according to

The gauge is factory calibrated. If used under different climatic conditions, at extreme temperatures, through aging or
contamination and after exchanging the sensor, the characteristic curve can be offset and readjustment can become
necessary. Only the Pirani part can be adjusted.

the diagram shown in the BPG402-SD section(identical).

Adjusting the Switching Functions→ "Adjustment and settings".

the diagram shown in the BPG402-SD section(identical).

 Connect the sensor cable to the gauge and secure the Connect the sensor cable to the gauge and secure thesensor cable connector using the lock screws.

sensor cable connector using the lock screws.

Adjusting the Gauge at Atmospheric Pressure
Profibus Cable Connection

BPG402-SP

EtherCAT Cable Connection

 If no Ethernet cables are available, make two according to the following indications:

RJ45, 8-pin, soldering side

1

General Information• Pressure unit (mbar, Torr, Pa)• Degas function• Status and error messages

 Connect the Ethernet cables to the gauge: From theprevious device the cable connected to the OUT port
has to be connected to the BPG402-SE <IN> port. And
the cable from the BPG402-SE <OUT> port has to beconnected to the next device's <IN> port.

Two adjustable switching functions are integrated in thegauge. The corresponding relay contacts are available at thesensor cable connector.
The basic sensor and sensor electronics of the BPG402-SP
type are the same as in the standard BPG402-S (→  [1],[2]).

Technical Data BPG402-SP
General technical data of the sensor and sensor
electronics →  [1], [2].

Sensorcable

the following indications:Fieldbus Interface
Fieldbus nameStandard applied
Communication protocol,
data format
Interface, physicalProfibus Parameters
Data rate
Node address
Profibus connection
Cable
Cable length, system wiring• the display reads < atmospheric pressure (if the gauge
has a display)
D-Sub, 9-pin, malesoldering side

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5
Pin 6
Pin 7
Pin 8
Pin 9
1)

do not connect
do not connect
RxD/TxD-P
CNTR-P
DGND
VP
do not connect
RxD/TxD-N
do not connect• at atmosphere, the digital value of the RS232C interface is< atmospheric pressure• at atmosphere, the digital value received by the bus controller of the fieldbus gauges (DeviceNet or Profibus) is <atmospheric pressure

9

6

At the push of a button the digital value and thus the analog
output are adjusted electronically to +10 V at atmosphericpressure.
Adjustment is necessary if• at atmospheric pressure, the output signal is <+10 V

5

1

2)

FCC68 cable<OUT> port
FCC68 cable<IN> port

 If no Profibus cable is available, make one according to

The BPG402-SP gauge has a fieldbus interface
that conforms to the Profibus DPV1 standard(→  [4], [11]).
Via this interface, the following and further data
are exchanged in the standardized Profibus protocol (→  [1], [2]):• Pressure reading

TD+ Transmission Data +TDTransmission Data RD+ Receive Data +not used
not used
RDReceive Data not used
not used

For BPG402-SD, BPG402-SE and BPG402-SP gauges.

1)• when the vacuum system is vented, the digital value of theRS232C interface reaches its maximum before the measured pressure has reached atmosphere2)2)Only to be connected if an optical link module isused.
Only required as line termination for devices at bothends of bus cable (→  [4], [11]).

 Connect the Profibus cable to the gauge and secure
the Profibus cable connector using the locking screws.

when the vacuum system is vented, the digital value received
by the bus controller of the fieldbus (DeviceNet or Profibus)
reaches its maximum before the measured pressure hasreached atmosphere.

Procedure(Setpoint A, B)

ed valuasureHysteresis
10% UThreshold

UThreshold

www.inficon.com
Instruction Sheet
Bayard-Alpert Pirani Gauge BPG402-S,
BPG402-SD, BPG402-SP
tima46e1
INFICON AG, LI–9496 Balzers, Liechtenstein [2]www.inficon.com
Operating Manual
Bayard-Alpert Pirani Gauge BPG402-S,
BPG402-SD, BPG402-SP
tina46e1
INFICON AG, LI–9496 Balzers, Liechtenstein [3]www.inficon.com
Communication Protocol
DeviceNet™ BPG402-SD
tira46e1
INFICON AG, LI–9496 Balzers, Liechtenstein [4]www.inficon.com
Communication Protocol
Profibus BPG402-SP
tira47e1
INFICON AG, LI–9496 Balzers, Liechtenstein [5]www.inficon.com
Communication Protocol
EtherCAT BPG402-SE(ETG.5003.2080 S (R) V1.0.0)
tira93e1
INFICON AG, LI–9496 Balzers, Liechtenstein [6]www.inficon.com
Communication Protocol
EtherCAT BPG402-SE (ETG.5003.2080 S (R) V1.3.0)
tirb53e1 (english)
INFICON AG, LI–9496 Balzers, Liechtenstein [7]www.inficon.com("Semiconductor and Vacuum coating processes,
Vacuum Gauges")
Product descriptions and downloads
INFICON AG, LI–9496 Balzers, Liechtenstein [8]www.odva.org
Open DeviceNet Vendor Association, Inc.
"DeviceNet™ Specifications" [9]www.profibus.com
Profibus user organisation

Time tSwitching
function
Off

On

Off

The hysteresis of the switching function is 10% of the threshold setting.
BPG402-SE gauges: The two switching functions can be set
via the EtherCAT interface only.

 [10] European Standard for DeviceNet EN 50325

Procedure Put the gauge into operation.
 Connect the + lead of a voltmeter to the thresholdmeasurement point of the selected switching function("Setpoint A" pin 3, "Setpoint B" pin 6) and its – lead toa ground contact nearby (e.g. grounded locking screw
nut of connector or vacuum connection of the gauge).
The threshold voltages are referenced to
ground (housing, vacuum connection), not topin 5 (common power GND 24 V supply).
The analog threshold voltage readings on pins
3 and 6 are only a guide line. Full accuracy
can be achieved by reading the threshold voltage values via the fieldbus interface(→  [3], [4].

Setpoint A, Pin 3
Setpoint B, Pin 6

 Operate gauge for approx. 10 minutes at atmosphericpressure.
If the gauge was operated before in the Bayard-Alpert
range, a cooling-down time of approx. 30 minutes is to
be expected (gauge temperature = ambient temperature).

 [1]UThreshold = 0.75 × (log pSetpoint – c) + 7.75
Where

→ Adjustment and settings.

Weight353-574353-575

Further Information

The gauges BPG402-SD and BPG402-SP have two independent, manually adjustable switching functions. Eachswitching function has a floating, normally open relay contact.
The relay contacts are accessible at the sensor cable connector (→ "Power Connection").The threshold values ofswitching functions A and B can be set within the pressure
range 1×10-9 mbar … 100 mbar via potentiometers"SETPOINT A" and "SETPOINT B".
For the corresponding threshold voltages UThreshold, the following rule applies:

Housing and vacuum connection →  [1], [2]→ Adjustment and settings.

Sensor Cable Connection

8

Setting the Switching Functions

Power Connection

Make sure the vacuum connection is properly made(→  [1], [2], "Vacuum Connection").

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5
Pin 6
Pin 7
Pin 8

The node address (0 … 125dec) is set inhexadecimal form (00 … 7Dhex) via the"ADDRESS", "MSD", and "LSD" switches.
The node address is polled by the firmware
when the gauge is switched on. If the setting deviates from the stored value, thenew value is taken over into the NVRAM. If
a value >125dec (>7Dhex) is entered, thenode address setting currently stored in thedevice remains valid but it can now be
defined via Profibus ("Set slave Address",→  [4]).
Default address setting is 5Chex.

Sensor Cable Connection
Operating Software
For operating the gauge via EtherCAT, prior installation of
the device specific ESI file is required on the bus masterside. This file can be downloaded from our website.

Dimensions

Node Address Setting(

 [11] European Standard for Profibus EN 50170
 [12] ETG.5003.1 S (R) V1.0.0: Semiconductor Device
Profile – Part 1: Common Device Profile (CDP) [13] ETG.5003.2080 S (R) V1.0.0: Semiconductor
Device Profile – Part 2080: Specific Device Profile(SDP): Vacuum Pressure Gauge [14] ETG.5003.1 S (R) V1.1.0: Semiconductor Device
Profile – Part 1: Common Device Profile (CDP) [15] ETG.5003.2080 S (R) V1.3.0: Semiconductor
Device Profile – Part 2080: Specific Device Profile(SDP): Vacuum Pressure Gauge)

max. ø2.5

 Press the button with a pin (max. ø1.3 mm) for 1 s.
Operation

Profibus→  [11]→  [6], [11]RS485

≤12 Mbaud (→  [6],[11])00 … 7Dhex (0 … 125dec)
D-Sub, 9-pin, female
Shielded special Profibus
cable (→  [9], [11])According to Profibus
specifications(→  [9], [11])Caution
Data transmission errors
If the gauge is operated via an RS232 interface
and the Profibus at the same time, data transmission errors may occur.
The gauge must not be operated via an RS232
interface and the Profibus at the same time.

 Using a screwdriver (max. ø2.5 mm), set the thresholdof the selected switching function (Setpoint A, B) to thedesired value UThreshold.

Operating Software
For operating the gauge via the Profibus network, prior installation of the gauge specific GSD file is required. This
software can be downloaded via internet (→  [7]).

Zero Point Adjustment
Zero point readjustments are automatically carried out during
operation of the gauge, no manual adjustments are required.

A functional check of the switching functions(On/Off) is only possible via fieldbus interface(→  [3] for BPG402-SD, →  [4] for
BPG402-SP, →  [5] or [6] for BPG402-SE) or bymeasuring the relay contacts with a continuity
checker/ohmmeter (→ "Power Connection", sensor
cable connector).

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com