Trigon TM BCG552 TripleGauge ®
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
The TripleGauge® BCG552 combines 3 vacuum sensing
elements in one sensor flange. This flagship of the newTrigonTM family offers extreme wide measurement
range from UHV (5 x10-10) up to ATM (1500 mbar). With
its adittional ATM sensor BCG552 is predestinated touse for differential pressure measurement and the use
as vacuum switch in several applications.​ BCG552
consists out of a Bayard-Alpert Hot Ionization sensor, aclassical, robust and reliable Pirani sensor element anda miniaturized capacitance diaphragm gauge onvacuum side. A Piezo sensor on ATM side completes
BCG552. Combining technologies reduces thecomplexity of installation, setup, and integration, thus
reducing cost and valuable tool space.​ The supported
Bayard-Alpert dual filament offers superior accuracy,
repeatability and longevity in the UHV and HV range,
while the miniaturized Capacitance diaphragm gauge issuperior accurate in the ATM range and gas typeindependent.​ BPG552 is available with analog output or
EtherCAT interface option. Both enable easiest systemintegration.​ The TrigonTM BCG552 TripleGauge® canalso be operated in conjunction with the INFICON
Vacuum Gauge Controller series VGC501, VGC502,VGC503 or with other control devices.
ADVANTAGES• 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savingness​ including 2
filaments for Bayard-Alpert system• Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any
gas mixtures.
• Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes• Automatic high vacuum Pirani adjustment reduces operator interventions• Galvanic isolated electronics to avoid electric stray current• Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream• Set point relays​ and bright & big OLED display (90° rotateable) with user interface• Analog output, RS232C serial interface, EtherCAT®
• Usable in conjunction with VGC50x Controller series• Backwards compatible to TripleGauge® BCG450• RoHS compliance
1

TrigonTM BCG552 TripleGauge®

Trigon TM BCG552 TripleGauge ®
ORDERING INFORMATION

3 BC 3 – G0 6 – 3 3 0 0Unitmbar
Torr
PaDigital interface

0120G

None (analog out & RS232)
EtherCATFlange
DN 25 ISO-KF
DN 40 CF-R

2TrigonTM BCG552 TripleGauge®

68Options
3C

2 setpoints & ATM
OLED, 2 setpoints & ATM

Trigon TM BCG552 TripleGauge ®
SPECIFICATIONSTypeBCG552

Pressure range
10 ... 1500 mbar
1 ... 10 mbar
-2

capacitance diaphragm sensor
crossover range

2 × 10 ... 1 mbar

Pirani sensor

5 × 10-3 ... 2 × 10-2 mbar

crossover range

5 × 10-10 ... 5 × 10-3 mbar
Measurement range (air, O2, CO, N2)
Accuracy

hot cathode ionisation (BA)
5×10-10 … 1500 mbar, continuous

1 × 10-8 … 50 mbar

±15% of reading

50 ... 950 mbar

±5% of reading

950 ... 1050 mbar
Repeatability
Switching threshold±2.5% of reading
5% of reading, 1 × 10-8 … 1050 mbar (after 10 min. stabilization)on

2.4×10-2 mbar

off
Emission current

3.2×10-2 mbar

Sliding mode (default)p ≤ 8 × 10-7mbar

5 mA

p > 1 × 10-3mbar

25 µA

Two-Point-Modep ≤ 7.2 × 10-6mbar

5 mA

3.0 × 10-5 mbar < p < 3.2 × 10-2mbar

25 µA

Emission current switching
25 µA -> 5 mA

7.2×10-6 mbar

5 mA -> 25 µADegas

3.0×10-5 mbar

Emission current (p < 7.2 × 10-6 mbar)
Control input signal
Duration
Output signal
Measuring range
Relationship voltage-pressure
Error signal
Minimum load impedance
Display
Display panel
Pressure units (pressure p)

3TrigonTM BCG552 TripleGauge®

≈16 mA (Pdegas ≈4 W)
0 V/+24 V (dc), active high
≤3 min, followed by automatic stop. A new degas cycle can only be started after awaiting time of 30 min
0 … +10.13 V
0.774 … +10.13 V (5×10-10 … 1500 mbar)
0.75 V/decade, logarithmic+0.1 V (diaphragm sensor or EEPROM error)+0.3 V (BA sensor error)+0.5 V (Pirani sensor error)
10 kΩ
OLED, 3.81 cm (1.5")
mbar (default), Torr, Micron, Pa, hPa

Trigon TM BCG552 TripleGauge ®
TypeBCG552

Power supply
Supply voltage at the gauge
Ripple+24 V (dc) (+20 … +28 V (dc))≤2 VppCurrent consumptionStandard≤0.5 ADegas≤0.9 A

Emission start (< 200 ms)≤1.4 A

Power consumption
BCG552≤18 W

BCG552 with EtherCAT≤21 W

Fuse necessary
Sensor cable connection
Receptacle
Measuring cable
Cable length (supply voltage 24 V)
Analog and fieldbus operation
RS232C operation
Gauge identification

1.25 AT
D-sub 15-pin, maleshielded, number of conductors depending on the functions used (max. 15conductors plus shielding)≤35 m (0.25 mm2 / conductor)≤50 m (0.34 mm2 / conductor)≤100 m (1.0 mm2 / conductor)≤30 m
42 kΩ resistor between pin 10 and pin 5

Switching functions
Setpoints
Adjustment range
Relay contact rating
Admissible temperature

SP1, SP2
5×10-10 … 1500 mbar
≤60 V (dc) / 0.5 A (dc), resistiveStorage–2 … +70 °COperation

0 ... +50 °C

Bakeout
Relative humidity
Interface (digital)
Materials exposed to vacuum+80 °C (at vacuum connection, without electronics unit, horizontally mounted)≤65% / 85% (no condensation) year's mean / during 60 days
Diagnostic port connection, RS232C, Jack connector. 2.5 m, 3-pin
stainless steel, NiFe, nickel plated, Hastelloy, glass, ceramic (Al2O3), iridium,yttrium oxide (Y2O3), , tungsten, copper, SnAg

Internal volume
DN 25 ISO-KF
DN 40 CF-R
WeightPressure max.
Mounting orientation
Degree of pollution
Degree of protection

4TrigonTM BCG552 TripleGauge®

≈24 cm3≈34 cm3
550 ... 760g
5 bar (absolute)
any
2IP40

Trigon TM BCG552 TripleGauge ®
SPECIFICATIONS INTERFACES
RS232C
Data rate
Data format

9600 Baudbinary, 8 data bits, one stop bit, no parity bit, no handshake

EtherCAT®
ProtocolCommunication standards
Process Data
EtherCAT connector
CableCable length
Data rate

5TrigonTM BCG552 TripleGauge®

EtherCAT®
Semiconductor Device Profile
ETG.5003 Part 1 Common Device Profile
ETG.5003 Part 2080 “Specific Device Profile - Vacuum Pressure Gauge"
Fixed PDO mapping and configurable PDO mapping
RJ45, 8-pin (socket), IN and OUT
Shielded Ethernet CAT5e or higher≤100 m (330 ft.)
100000 Kbps

Trigon TM BCG552 TripleGauge ®
DIMENSIONS[mm]

494914267424214267.533

DN 25 ISO-KF

DN 40 CF-R.533

www.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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