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Valve Solutions

Downstream Pressure
Controllers and Valves
PRODUCT SELECTION GUIDE
651, 1651, 153, 253, 653, and heated valves
Isolating and close-loop controlling each variable that affects a vacuum process is the best
method for achieving process consistency. At MKS, we can isolate and close-loop control
process pressure using a throttling control valve and a digital PID or self-tuning pressure
controller. A typical pressure control system works as follows: (1) a Baratron® capacitancemanometer senses pressure in a vacuum chamber; (2) this pressure is then compared tothe desired set point pressure in the pressure controller; and (3) the pressure controller
commands the control valve to open or close, changing the chamber pressure and bringing
it to the desired process pressure set point.
No one pressure control technique is best for all applications, though the downstream
control technique is chosen most often for today’s more critical vacuum processes (seechart below). With the downstream control technique, an exhaust throttle valve is opened
or closed, changing the conductance to the vacuum pump in order to achieve and maintainthe desired process pressure—independent of gas inlet. The downstream pressure control
technique provides high dynamic range, works well with all types of vacuum pumps,
provides fast response, is tolerant to most effluent gases, and has moderate initial costs.

Pressure Control Techniques
Blower Speed Control

Gas (Ballast) Bypass

Downstream Control

Dynamic Range

low(10 to 1 typical)

moderate(500 to 1 typical 1000 to 1 max.)

high(1000 to 1 typical up to 10,000 to 1)

Types of Pumps

will not work on all
pumps

will work with any pumpwhich can operate atprocess pressure

all

Speed of Response

moderate

fast

fast

Initial Capital Cost

AC or SCR
motor controller

bypass valve andoptional controller

exhaust valve andcontroller

Extra Operating Costs

none

nitrogennone

Susceptibility to Effluent Gases

none

none

slightSpecial Requirements

pump controller andflow rates must be
properly sized

bypass valve andpump must be
properly sizednoneSelf-Tuning/Digital PID
Pressure Controllers
651
The 651 Self-tuning/Digital PID Valve Controller drives
653 or 253 Exhaust Throttle Valves with speed andprecision. Its self-tuning algorithm brings the system toset point faster than conventional controllers, and ensuresrepeatable process recipes without operator involvement.
The self-tuning function determines optimal control
parameters for any set point in the range of the valve bylearning time constants, transfer functions of the valve andplumbing, valve gain, and other important parameters.
The 651 includes adjustable soft-start functions for eachset point, as well as open and close functions to minimize
turbulence in the chamber; local/remote transducer
zeroing capability; and two relays to activate other system
functions, or to indicate if the pressure deviates fromthe desired set point. All controls are easily accessed
via a simple-to-use front panel, or remotely through RS232, TTL, or analog voltage. An LCD readout shows
valve position and displays pressure in a wide range ofengineering units. Five reprogrammable set points areprovided for pressure or position control.

1651
The 1651 is a display-less version of the 651 for OEM
design engineers who wish to completely control theirprocess via a host computer. Offered as an economicalalternative to the 651, this “black box” version allows
for remote setup or control entirely through rear panel
interface—RS-232, TTL, or analog. Its compact size allows
for installation anywhere on the process system, saving
valuable rack space.

Pressure Controllers and 			Exhaust Throttle Valves
Exhaust Throttle Valve253
The 253 Exhaust Throttle Valve regulates the removal ofgas from a processing system. Its flapper is positioned tomodulate gas flow, thereby controlling process pressure.
The 253 has a non-linear actuator placed between the
flapper shaft and the motor drive shaft in order to generate
a linear valve transfer characteristic and provide smoothlinear pressure control. The 253 is available in standard
sizes and flange styles, and is compatible with all MKS
throttle valve controllers.

“Smart” Exhaust Throttle Valve
153
Specifically designed for computer-controlled applications
where a simple pressure control system is desired, the153 Valve integrates all control, communication, and drivercircuits via a compact “add-on” electronics module withina 253 Throttle Valve assembly, eliminating the need fora separate pressure control electronics module. The 153
is operable in two modes, flapper positioning or pressure
control.
For DeviceNet™ communications consult Applications
Engineering on the 683.

Exhaust Throttle Valve with
High-speed Motor/Gear Assembly653
The 653 high-speed motor and gear/driver assembly
provides fast response to a given set point to quickly
achieve desired pressure and increase system throughput.
High accuracy is attained by micro-stepping the flapper togive more precise control, and no drift, of pressure at thedesired set point. The 653 has sufficient torque to operatesealing valves up to four inches and non-sealing valves to
12 inches to prevent clogging from contamination buildup.
The valve body can be heated up to 150°C (using optional
sealing materials) for operation in high temperatureapplications and processes. The 653 has a flapper
position indicator to identify valve angle during system
troubleshooting, is available in a variety of sizes and flange
styles, and is compatible with 651 and 1651 Controllers.

Heaters
IPS Subsystem
Current trends in semiconductor processing are towards
less maintenance, more uptime, and increased productyield. Reduction of the solid buildup resulting from thecooling of effluent gases can be a factor in achieving thosegoals. Heating the valve and other components of thesystem is part of a method to manage these byproducts,
increasing uptime, and improving wafer yields, with a quick
payback.
IPS offers subsystems to improve heat distribution on
downstream lines while complying with strict agency andcorporate personnel safety standards.

Pressure Controller
Downstream Pressure Controllers
Specifications
		Valves Operated
		Pressure Input Signal
		Input Power Required

651C				653 and 253 Exhaust 		
Throttle Valves			
0-10 VDC, 0-5 VDC, or 0-1 VDC,
selectable			90-132 or 180-264 VAC, 50/60 Hz

1651C
653 and 253 Exhaust			
Throttle Valves
0-5 VDC, 0-10 VDC, 0-1 VDC,
selectable±15 VDC ±5%

Minimum Input Current											
						
						For 653 Valve: 1 Amp +transducer current
For 253 Valve: 0.5 Amp +transducer current

Maximum Input Current					Set Points

Not to exceed 7 Amps

Programmable
		
		
		
		
		

5 total, programmable in any
5 total, programmable in any
combination for pressure or
combination for pressure or
position (adjustable from theposition (adjustable via RS-232;
front panel or RS-232; selectableselectable via TTL or RS-232)
from the front panel, TTL, 		
or RS-232)

External Analog
1; pressure or position,
1; pressure or position,		
0-5 or 0-10 VDC		
0-5 or 0-10 VDCController Repeatability±0.1% of F.S.			
±0.1% of F.S.
15°-40°C (60°-104°F)		
15°-50°C (60°-122°F)
Ambient Operating Temperature
Output PowerStandard: ±15 VDC ±5 @ 0.5 Amp
Available to external transducers:		(Derated to 0.4 Amp with 90-99±15 Volts @ 3 Amps max. (90 Watts)
		or 180-198 VAC input) when poweredfrom an external power supply with				
Optional: ±15 VDC ±5% @ 1.5
a capacity of ±15 Volts @ 5 Amps (150		Amps max.			
Watts)			
Analog Output Signal
0-5 or 0-10 VDC for 0-100%
0-5 or 0-10 VDC for 0-100%		valve position and 0-10 VDCvalve position and 0-10 VDC		
for 0-100% F.S. pressurefor 0-100% F.S. pressure
Size		
1/2-rack packaging: 		
3 1/2” H x 6.7”W x 9.15”D		
3-1/2”H x 9-1/2”W x 9”D		Display
2-line LCD with 4-1/2 place readout
N/A		(pressure and valve position)
Display Units
Torr, mTorr, mbar, Pascal,
N/A		
cmH2O, inH2O, µbar, kPa		
Soft Start
Standard			Standard
Self-tuning Unit
Standard			Standard
PID Control
Standard			Standard
Remote Zero
Standard			Standard
Interface
Front panel, Analog, TTL
Analog, TTL (16 inputs, 6 outputs)		
		(16 inputs, 6 outputs) and RS-232
and RS-232			
Relay Outputs
2, process limits: 24 Volts AC/DC
2, process limits: 24 Volts VDC @		@ 1 Amp resistive		
1 Amp resistive
Remote Control OverrideStandard			Standard(Open, Close, Hold)
Position Control Capability
Standard			Standard
Connectors
Valve: 9-pin Type “D” female
Power Connector: 9-pin Type “D” male		
I/O: 37-pin Type “D” female
Valve: 9-pin Type “D” female		Transducer: 15-pin Type “D” female
I/O: 37-pin Type “D” female		
RS-232: 9-pin Type “D” maleTransducer: 15-pin Type “D” female								
RS-232: 9-pin Type “D” maleComplianceCE				
CE

Throttle Valve Specifications (Common to All Sizes & Flanges)
		

653B

253B

Speed (open to close)
1.7 sec			Standard: 7.5 sec.
Optional: <2 sec. (Note 1)

Resolution
1/12,000			

Standard: 1/10,000
Fast Motor Option: 1/2800

Drive Method
Direct gear drive			Mechanical (non belt) drive with integral cosine
generator to linearize valve transfer characteristic

Maximum Valve Body
Operating TemperatureStandard: 0°C-100°C
Optional: 0°C-150°C (Note 1)

0°-90°C					Valve Motor Ambient
Operating Temperature-20°C to +40°C

0°C-70°C max.

Differential Pressure
Across Valve1 atm. (15 psig) max.

1 atm. (15 psig)

External Leakage at
Shaft Seal

1x10-8 scc/sec He

1x10-7 scc/sec He

Materials Exposed
to ProcessStandard: 316L S.S., Viton® (Note 2)

316 S.S., Viton (Note 2)Compatible Controller

651, 1651

651, 1651, 153

Visual Position IndicatorStandard

N/A

Drive Output Torque800 in-oz(with 651 Controller)		

Standard speed: 600 in-oz
High-speed: 170 in-oz

Closed Leakage(valves with a flapper o-ring)<10-7 (Torr l/s)

<10-7 (Torr l/s)

		
			
			
			
			
		

Notes:						Notes:
1) Consistent with shaft seal and flapper						1) Fast Motor Option only available onseal o-ring material.						non-sealing valves.			
2) Where Viton is used, other materials 						2) Where Viton is used, other materials
are available.						are available.
Contact Applications Engineering.
Contact Applications Engineering.

Exhaust Throttle Valve Sizes
andFlange Styles
Dimensional
Drawings
ASA Flanges
253B
(A)
(B)
(C)
(D)
(E)						Flange		Nominal 				Number			Flange		
Part
Mounting
InsideOutsideBolt Holeof Bolt
Overall
Bolt Circle O-ring
Flapper O-ringNumberFlangeDiameter
DiameterThickness Diameter	Holes	Height*
DiameterGroove ID
O-ringParker No.

(**)		
Controllable
Conductance l/s
min
(max)

253B-2-2-1

2” ASA

1.88 (48)5.95 (151)0.75 (19)0.75 (19)4

10.79 (274)4.750 (121) 3.365 (85)

Yes

2-237

0.35

300

253B-2-2-2

2” ASA

1.95 (50)

5.95 (151)0.75 (19)0.75 (19)4

10.79 (274)4.750 (121) 3.365 (85)

No

2-237

0.7

300

253B-60-2-2

2” ASA

2.362 (60)

5.95 (151)0.75 (19)0.75 (19)4

10.79 (274)4.750 (121) 3.365 (85)

No

2-237

0.8

375

253B-3-2-2

2” ASA

3.025 (77)5.95 (151)0.75 (19)0.75 (19)4

10.79 (274)4.750 (121) 3.365 (85)

No

2-237

1

500

253B-3-3-2

3” ASA

3.025 (77)7.40 (188)0.88 (22)0.75 (19)4

12.24 (311)6.000 (152) 4.475 (114)

No

2-349

1

500

253B-3-3-2

3” ASA

3.965 (101) 7.40 (188)0.88 (22)0.75 (19)4

12.24 (311)6.000 (152) 4.475 (114)

No

2-349

1.5

950

253B-4-4-2

4” ASA

3.965 (101) 8.90 (226)0.88 (22)0.75 (19)8

13.74 (349)

7.500 (191) 5.995 (152)

No

2-258

1.5

950

*For 153 Valves, add 1.93” (49mm) to the 253 Dimension										** Molecular flow regime

653B		
		
(A)
(B)
(C)
(D)
(E)						Flange		Nominal				Number			Flange		Mounting
InsideOutside		
Bolt Holeof Bolt
Overall
Bolt Circle O-ring
Flapper O-ringPart
FlangeDiameter
DiameterO-ringParker No.
Number
DiameterThickness Diameter	Holes	Height
Groove ID(**)		
Controllable
Conductance l/s
min
(max)

653B-2-2-1

2” ASA

1.886 (48)5.95 (151)1.00 (25)0.75 (19)4

12.53 (318)4.750 (121) 3.365 (85)

Yes

2-237

0.35

300

653B-2-2-2

2” ASA

1.886 (48)5.95 (151)1.00 (25)0.75 (19)4

12.53 (318)4.750 (121) 3.365 (85)

No

2-237

0.7

300

653B-60-2-1

2” ASA

2.360 (60)

5.95 (151)1.00 (25)0.75 (19)4

12.53 (318)4.750 (121) 3.365 (85)

Yes

2-237

0.4

375

653B-60-2-1

2” ASA

2.360 (60)

5.95 (151)1.00 (25)0.75 (19)4

12.53 (318)4.750 (121) 3.365 (85)

Nos

2-237

0.8

375

653B-3-2-1

2” ASA

2.886 (73)5.95 (151)1.00 (25)0.75 (19)4

12.53 (318)4.750 (121) 3.365 (85)

Yes

2-237

0.5

500

653B-3-2-2

2” ASA

2.886 (73)5.95 (151)1.00 (25)0.75 (19)4

12.53 (318)4.750 (121) 3.365 (85)

No

2-237

1

500

653B-3-3-1

3” ASA

2.886 (73)7.40 (188)1.00 (25)0.75 (19)4

14.02 (356)6.000 (152) 4.475 (114)

Yes

2-349

0.75

500

653B-3-3-2

3” ASA

2.886 (73)7.40 (188)1.00 (25)0.75 (19)4

14.02 (356)6.000 (152) 4.475 (114)

No

2-349

1

500

653B-4-3-1

3” ASA

3.885 (99)7.40 (188)1.00 (25)0.75 (19)4

14.02 (356)6.000 (152) 4.475 (114)

Yes

2-349

0.75

950

653B-4-3-2

3” ASA

3.885 (99)7.40 (188)1.00 (25)0.75 (19)4

14.02 (356)6.000 (152) 4.475 (114)

No

2-349

1.5

950

653B-4-4-1

4” ASA

3.885 (99)8.90 (226)1.00 (25)0.75 (19)8

15.54 (395)7.500 (191) 5.995 (152)

Yes

2-258

0.75

950

653B-4-4-2

4” ASA

3.885 (99)8.90 (226)1.00 (25)0.75 (19)8

15.54 (395)7.500 (191) 5.995 (152)

No

2-258

1.5

950

653B-6-4-1

4” ASA

5.503 (140) 8.90 (226)1.62 (41)0.75 (19)8

16.16 (410)7.500 (191) 5.995 (152)

No

2-258

4

2150

653B-6-6-2

6” ASA

5.869 (149) 10.90 (277) 1.62 (41)0.88 (22)8

18.18 (462)9.500 (241) 8.000 (203)

No

2-266

4

2150

653B-8-6-2

6” ASA

7.636 (194) 10.90 (277) 1.62 (41)0.88 (22)8

18.18 (462)9.500 (241) 8.000 (203)

No

2-266

6

3600

653B-8-8-2

8” ASA

7.636 (194) 13.19 (335) 1.62 (41)0.88 (22)8

20.48 (520

11.750 (298) 9.750 (248)

No

2-273

8

3600

653B-10-10-2 10” ASA

10.118 (257) 16.00 (406) 1.62 (41)1.00 (25)12

23.31 (592)

14.250 (362) 11.938 (362) No

2-278

10

6400

Dimensions in inches (mm)												** Molecular flow regime

CF Flanges
253B
		
Part
Mounting
NumberFlange

(A)
(B)
(C)
(D)
(E)				(**)			Nominal				 Number				Controllable
InsideOutside		
Bolt Holeof Bolt
Overall
Bolt Circle
Flapper
Conductance l/s
Diameter
DiameterThickness Diameter	Holes	Height*
DiameterO-ringmin(max)

253B-20-2CF-1

2 3/4” CF

0.779 (20)

2.75 (70)1.25 (32)0.26 (6.6)

6

8.64 (220)2.312 (59)

Yes

0.07

24

253B-20-2CF-2

2 3/4” CF

0.779 (20)

2.75 (70)1.25 (32)0.26 (6.6)

6

8.64 (220)2.312 (59)

No

0.25

31

253B-1-2CF-1

2 3/4” CF1.270 (32)2.75 (70)1.25 (32)0.26 (6.6)

6

8.64 (220)2.312 (59)

Yes

0.2

50

253B-1-2CF-2

2 3/4” CF1.270 (32)2.75 (70)1.25 (32)0.26 (6.6)

6

8.64 (220)2.312 (59)

No

0.4

55

253B-2-3CF-1

3 3/8” CF

1.889 (48)3.25 (83)1.06 (27)0.33 (8.3)

89.14 (232)2.850 (72)

Yes

0.35

300

253B-2-3CF-2

3 3/8” CF

2.000 (51)3.25 (83)1.06 (27)0.33 (8.3)

89.14 (232)2.850 (72)

No

0.7

300

253B-2-4CF-2

4 1/2” CF

2.000 (51)4.47 (114)1.00 (25)0.33 (8.3)

810.36 (263)

3.628 (92)

No

0.7

300

253B-3-6CF-2

6” CF

3.000 (76)7.40 (188)0.81 (21)0.33 (8.3)

16

12.24 (311)5.128 (130)

No

1

500

253B-4-6CF-2

6” CF

3.875 (98)7.40 (188)0.94 (24)0.33 (8.3)

16

12.24 (311)5.128 (130)

No

1.5

900

*For 153 Valves, add 1.93” (49mm) to the 253 Dimension										** Molecular flow regime

653B
		
(A)
(B)
(C)
(D)
(E)				(**)		
		 Nominal				 Number				Controllable
Part
Mounting
InsideOutside		
Bolt Holeof Bolt
Overall
Bolt Circle
Flapper
Conductance l/s
NumberFlangeDiameter
DiameterThickness Diameter	Holes	Height
DiameterO-ringmin(max)
653B-20-2CF-1

2 3/4” CF

0.779 (20)

2.75 (70)1.00 (25)0.27 (6.8)

6

10.55 (268)2.312 (59)

Yes

0.07

24

653B-20-2CF-2

2 3/4” CF

0.779 (20)

2.75 (70)1.00 (25)0.27 (6.8)

6

10.55 (268)2.312 (59)

No

0.25

31

653B-1-2CF-1

2 3/4” CF1.270 (32)2.75 (70)1.00 (25)0.27 (6.8)

6

10.55 (268)2.312 (59)

Yes

0.2

50

653B-1-2CF-2

2 3/4” CF1.270 (32)2.75 (70)1.00 (25)0.27 (6.8)

6

10.55 (268)2.312 (59)

No

0.4

55

653B-2-3CF-1

3 3/8” CF

1.886 (48)3.25 (83)1.00 (25)0.34 (8.6)

811.05 (281)2.850 (72)

Yes

0.35

300

653B-2-3CF-2

3 3/8” CF

1.886 (48)3.25 (83)1.00 (25)0.34 (8.6)

811.05 (281)2.850 (72)

No

0.7

300

653B-2-4CF-1

4 1/2” CF

1.886 (48)

4.47 (114)1.00 (25)0.34 (8.6)

812.28 (312)3.628 (92)

Yes

0.35

300

653B-2-4CF-2

4 1/2” CF

1.886 (48)

4.47 (114)1.00 (25)0.34 (8.6)

812.28 (312)3.628 (92)

No

0.7

300

653B-3-6CF-1

6” CF

2.886 (73)7.40 (188)1.00 (25)0.33 (84)16

14.07 (357)

5.128 (130)

Yes

0.5

500

653B-3-6CF-2

6” CF

2.886 (73)7.40 (188)1.00 (25)0.33 (84)16

14.07 (357)

5.128 (130)

No

1

500

653B-4-6CF-1

6” CF

3.885 (99)7.40 (188)1.00 (25)0.33 (84)16

14.07 (357)

5.128 (130)

Yes

0.75

900

653B-4-6CF-2

6” CF

3.885 (99)7.40 (188)1.00 (25)0.33 (84)16

14.07 (357)

5.128 (130)

No

1.5

900

653B-6-8CF-2

8” CF

5.869 (149)

8.90 (226)1.62 (41)0.33 (.84)

20

17.13 (435)

7.128 (181)

No

2

2100

653B-8-10CF-2

10” CF7.650 (194)11.22 (285)

1.62 (41)0.33 (8.4)

24

18.90 (480)9.128 (232)

No

3

3750

Dimensions in inches (mm)												** Molecular flow regimeExhaust Throttle Valve Sizes
Downstream
Pressure Controllers
andFlange Styles
ISO Flanges
253B
(A)
			
Part
Mounting
InsideNumberFlangeDiameter

(B)
(C)
(D)
(E)				(**)
		Nominal			Number				Controllable
Outside		
Bolt Holeof Bolt
Overall
Bolt Circle
Flapper
Conductance l/s
DiameterThickness
Diameter	Holes	Height*
DiameterO-ringmin(max)

253B-20-40-1

ISO KF-40

0.779 (20)

2.75 (70)2.25 (57)

N/A

N/A

8.64 (219)

N/A

Yes

0.07

24

253B-20-40-2

ISO KF-40

0.779 (20)

2.75 (70)2.25 (57)

N/A

N/A

8.64 (219)

N/A

No

0.25

31

253B-1-40-1

ISO KF-40

1.270 (32)2.75 (70)2.25 (57)

N/A

N/A

8.64 (219)

N/A

Yes

0.2

50

253B-1-40-2

ISO KF-40

1.770 (32)2.75 (70)2.25 (57)

N/A

N/A

8.64 (219)

N/A

No

0.4

55

235B-2-50-1

ISO KF-50

1.888 (48)3.25 (83)2.00 (51)

N/A

N/A

9.14 (232)

N/A

Yes

0.35

300

235B-2-50-2

ISO KF-50

2.000 (51)3.25 (83)2.00 (51)

N/A

N/A

9.14 (232)

N/A

No

0.7

300

253B-60-63-2

ISO NW-63

2.362 (60)

5.95 (151)0.81 (21)0.35 (9)4

10.79 (274)4.330 (110)

No

0.8

375

253B-3-80-2

ISO NW-80

3.000 (76)5.95 (151)0.81 (21)0.35 (9)810.79 (274)

4.920 (125)

No

1

500

253B-4-100-2

ISO NW-100

3.875 (98)7.40 (188)0.94 (24)0.35 (9)8

12.24 (311)5.710 (145)

No

1.5

900

*For 153 Valves, add 1.93” (49mm) to the 253 Dimension										** Molecular flow regime

653B
		
(A)
(B)
(C)
(D)
(E)				(**)					 Nominal				Number				Controllable
Part
Mounting
InsideOutside		
Bolt Holeof Bolt
Overall
Bolt Circle
Flapper
Conductance l/s
NumberFlangeDiameter
DiameterThickness
Diameter	Holes	Height
DiameterO-ringmin(max)
653B-20-40-1

ISO KF-40

0.779 (20)

2.75 (70)2.25 (57)

N/A

N/A

10.58 (268)

N/A

Yes

0.07

24

653B-20-40-2

ISO KF-40

0.779 (20)

2.75 (70)2.25 (57)

N/A

N/A

10.58 (268)

N/A

No

0.25

31

653B-1-40-1

ISO KF-40

1.270 (32)2.75 (70)2.25 (57)

N/A

N/A

10.58 (268)

N/A

Yes

0.2

50

653B-1-40-2

ISO KF-40

1.270 (32)2.75 (70)2.25 (57)

N/A

N/A

10.58 (268)

N/A

No

0.4

55

653B-2-50-1

ISO KF-50

1.886 (48)3.25 (83)2.00 (51)

N/A

N/A

11.06 (281)

N/A

Yes

0.35

300

653B-2-50-2

ISO KF-50

1.886 (48)3.25 (83)2.00 (51)

N/A

N/A

11.06 (281)

N/A

No

0.7

300

653B-60-63-1

ISO NW-63

2.360 (60)

5.95 (151)1.00 (25)0.35 (9)412.53 (318)4.330 (110)

Yes

0.4

375

653B-60-63-2

ISO NW-63

2.360 (60)

5.95 (151)1.00 (25)0.35 (9)412.53 (318)4.330 (110)

No

0.8

375

653B-3-80-1

ISO NW-80

2.886 (74)5.95 (151)1.00 (25)0.35 (9)812.53 (318)4.920 (125)

Yes

0.5

500

653B-3-80-2

ISO NW-80

2.886 (74)5.95 (151)1.00 (25)0.35 (9)812.53 (318)4.920 (125)

No

1

500

653B-4-100-1

ISO NW-100

3.885 (99)7.40 (1.88)

1.00 (25)0.35 (9)814.02 (356)

5.710 (145)

Yes

0.75

950

653B-4-100-2

ISO NW-100

3.885 (99)7.40 (1.88)

1.00 (25)0.35 (9)814.02 (356)

5.710 (145)

No

1.5

900

653B-6-160-2

ISO NW-160

5.869 (149)

8.90 (226)1.62 (41)0.43 (11)8

16.16 (410)7.870 (200)

No

4

2100

653B-8-200-2

ISO NW-200

7.650 (194)11.22 (285)

1.62 (41)0.43 (11)12

18.50 (470)

10.240 (260)

No

6

3750

653B-10-250-2

ISO NW-250

9.700 (246)

13.19 (335)

1.62 (41)0.43 (11)12

20.48 (520)

12.200 (310)

No

8

6000

653B-12-320-2

ISO NW-320

12.370 (314)16.73 (425)

1.62 (41)0.55 (14)12

24.02 (610)

15.55 (395)

No

10

9300

Dimensions in inches (mm)												** Molecular flow regime								JIS Flanges
253B											
PartNumberMounting
FlangeNominal				Number			 Flange
InsideOutside		
Bolt Hole of Bolt Overall
Bolt Circle O-ring
Diameter
Diameter Thickness Diameter	Holes	Height*
DiameterGroove ID

Flange		Controllable (**)
O-ringFlapper Conductance l/s
Size (JIS)O-ringmin(max)

253B-2-50J-1
JIS 50mm 1.888 (48) 4.47 (114) 1.00 (25)0.39 (10)4
10.36 (263) 3.937 (100) 2.766 (70)2.765 x 0.157										 (70) x (4)

Yes

0.35

300

253B-2-50J-2
JIS 50mm 2.000 (51) 4.47 (114) 1.00 (25)0.39 (10)4
10.36 (263) 3.937 (100) 2.766 (70)2.765 x 0.157										 (70) x (4)

No

0.35

300

253B-4-100J-2 JIS 50mm 3.875 (98) 7.40 (188) 0.94 (24)0.47 (12)8
13.29 (338) 6.299 (160) 4.724 (120) 4.724 x 0.157										 (120) x (4)

No

0.35

300

*For 153 Valves, add 1.93” (49mm) to the 253 Dimension										** Molecular flow regime

653B
		Nominal				
Number			Part
Mounting
InsideOutside		
Bolt Hole of Bolt Overall
Bolt Circle
NumberFlangeDiameter
Diameter Thickness Diameter	Holes	Height
DiameterFlangeO-ringGroove ID

Flange		O-ringFlapper
Size (JIS)O-ringControllable (**)
Conductance l/s
min
(max)

653B-2-50J-1
JIS 50mm 1.886 (48) 4.47 (114) 1.00 (25)0.39 (10)4
12.27 (312) 3.937 (100) 2.766 (70)2.756 x 0.157										 (70) x (4)

Yes

0.35

300

653B-2-50J-2
JIS 50mm 1.886 (48) 4.47 (114) 1.00 (25)0.39 (10)4
12.27 (312) 3.937 (100) 2.766 (70)2.756 x 0.157										 (70) x (4)

No

0.7

300

653B-4-100J-1 JIS 100mm 3.8865 (99) 7.28 (185) 1.00 (25)0.47 (12)8
13.90 (353) 6.299 (160) 4.724 (120) 4.724 x 0.157										 (120) x (4)

Yes

0.75

950

0.47 (12)8
13.90 (353) 6.299 (160) 4.724 (120) 4.724 x 0.157
653B-4-100J-2 JIS 100mm 3.8865 (99) 7.28 (185) 1.00 (25)										 (120) x (4)

No

1.5

900

653B-6-150J-2 JIS 150mm 5.709 (145) 9.25 (235) 1.62 (41)0.47 (12)8
16.51 (419) 8.268 (210) 6.890 (175) 6.890 x 0.157										 (173) x (4)

No

2

2100

653B-8-200J-2 JIS 200mm 7.677 (195) 11.81 (300) 1.62 (41)0.59 (15)8
19.09 (485) 10.630 (270) 8.858 (225) 8.761 x 0.236										 (223) x (6)

No

3

3600

653B-10-250J-2 JIS 250mm 9.645 (245) 13.78 (350) 1.62 (41)0.59 (15)12
21.08 (535) 12.598 (320) 10.827 (275) 10.709 x 0.236 No										 (272) x (6)

4

6000

653B-12-300J-2 JIS 300mm 11.597 (295) 15.75 (400) 1.62 (41)0.59 (15)12
23.02 (585) 14.566 (370) 12.795 (325) 12.795 x 0.236 No										 (322) x (6)

5

8600

Dimensions in inches (mm)												** Molecular flow regime

Throttle Valve Heater Kits
NW40

NW80*

Voltage
120 VAC
120 VAC
120 VAC
120 VAC

Temp.
150°C
150°C
105°C
105°C

LTA	
No
Yes
No
Yes

Watts	Amps
59
0.49
59
0.49
59
0.49
59
0.49

Kit# (253 & 653)
55-036155-036255-0363
55-0364

Voltage
120 VAC
120 VAC
120 VAC
120 VAC

Temp.
150°C
150°C
105°C
105°C

LTA	
No
Yes
No
Yes

Watts	Amps
104
0.87
104
0.87
104
0.87
104
0.87

Kit# 25355-0172
55-0173
55-0170
55-0171

Kit# 653
55-017655-017755-0174
55-0175

240 VAC
240 VAC
240 VAC
240 VAC

150°C
150°C
105°C
105°C

No
Yes
No
Yes

59
59
59
59

55-0367
55-0368
55-0369
55-0370

240 VAC
240 VAC
240 VAC
240 VAC

150°C
150°C
105°C
105°C

No
Yes
No
Yes

104
104
104
104

55-022155-022255-022355-022455-0225
55-0226
55-022755-0228

Voltage
120 VAC
120 VAC
120 VAC
120 VAC

Temp.
150°C
150°C
105°C
105°C

LTA	
No
Yes
No
Yes

Watts	Amps
68
0.57
68
0.57
68
0.57
68
0.57

Kit# (253 & 653)
55-0371
55-0372
55-0373
55-0374

Voltage
120 VAC
120 VAC
120 VAC
120 VAC

Temp.
150°C
150°C
105°C
105°C

LTA	
No
Yes
No
Yes

Watts	Amps
123
1.02
123
1.02
123
1.02
123
1.02

Kit# 253
55-0251
55-0252
55-0253
55-0254

Kit# 653
55-0255
55-0256
55-0257
55-0258

240 VAC
240 VAC
240 VAC
240 VAC

150°C
150°C
105°C
105°C

No
Yes
No
Yes

68
68
68
68

0.28
0.28
0.28
0.28

55-037755-0378
55-0379
55-0380

240 VAC
240 VAC
240 VAC
240 VAC

150°C
150°C
105°C
105°C

No
Yes
No
Yes

123
123
123
123

55-026155-026255-0263
55-0264

55-0265
55-0266
55-0267
55-0268

Voltage
120 VAC
120 VAC
120 VAC
120 VAC

Temp.
150°C
150°C
105°C
105°C

LTA	
No
Yes
No
Yes

Watts	Amps
104
0.87
104
0.87
104
0.87
104
0.87

Kit# 253
55-072155-072255-0723
55-0724

Kit# 653
55-073155-0732
55-0733
55-0734

240 VAC
240 VAC
240 VAC
240 VAC

150°C
150°C
105°C
105°C

No
Yes
No
Yes

104
104
104
104

55-072755-0728
55-072955-0730

55-0737
55-0738
55-0739
55-0740

0.25
0.25
0.25
0.25

NW50

0.43
0.43
0.43
0.43

NW100**

NW63

Heater Specifications

0.43
0.43
0.43
0.43

0.51
0.51
0.51
0.51

Kits include any special hardware required, such as clamps.
LTA- Low Temperature Alarm*Valve Heater designed to mate with heater on 3” tubing (consult
for other size tubing)**Valve Heater designed to mate with heater on 4” tubing (consult
for other size tubing)Note: Heaters can only be used with valves that are configured foruse at higher temperatures. To obtain the order code for a heatable throttle valve, place the letter “A” in place of the last “-” in thepart number.
Example:253B-20-40-1
Becomes
253B-20-40A1

LTA Monitor Specifications

Temperature				Enclosure
Nominal Set Point
150°C
105°C
Power Requirements
Exterior Range
60-70°C
45-55°C
		Interior Range
130-170°C
90-120°C
Power Consumption
Electrical Duty Cycle
100 volts
72%
Relay Contact Rating		
120 volts
50%
		Foam Thickness
0.5 in. (12.7mm)
Input/Output Wiring
Materials
Molded silicone foam, fiberglass				
reinforced silicone,Teflon insulated
		
		
wire
		
Relative Humidity
90% Maximum		Connectors
Midget Twist-Lock, nylon
Dimensions
		
NEMA ML-1(L x H x D)
Weight Range
0.5 to 3.3 lb (0.73 to 1.5 kg)Compliance
Compliance
CE, UL E52951

Black Plastic
90-130 VAC input, 12 VDC ±3 VDC
output
0.3 W
SPDT, 2A @ 50 VAC resistive 		
1@30 VDC
1 Thermal switch line IN
2 Thermal switch line OUT
3 Normally closed
4 Common5 Normally open
2.58” x 4.76” x 1.46” (inches)
66 x 121 x 37 (mm)CE

ASA Flange
253, 653

90 75 60 45 30 15

0

CF Flange
253, 653

90 75 60 45 30 15

0Pressure Controller Specifications
Dimensional Drawings

ISO KF Flange
253, 653

90 75 60 45 30 15 0

ISO NW Flange
253, 653

90 75 60 45 30 15

0JIS Flange
253, 653

90 75 60 45 30 15

153

Heater Kit

0

for 653 Throttle Valve

Open

Close

J1
Input
hold
NormalPowerOn
J2 PowerDimensional Drawings

Pressure Controller
1651

Mounting bracket
positioned on front panel

Mounting bracket
positioned on front panel

9.40(238.8)9.25(234.9)Slots 0.22x0.66(5.5x16.7)

4.45(113.1)

0.88(22.4)
1.63(41.5)

Optional position
for mounting
brackets

9.15(232.4)9.40(238.8)651

8.00(203 mm)

9(22 .00
9m
m)

3.38(86 mm)0.23(6 mm)
3.00(76 mm) 3.469(88 mm)8.875(226 mm)

9.469(241 mm)

Note: allow 2.5" (63 mm) clearance behind rear panel for connectors/cables.

Heater Kit

For 253 and 653 Throttle Valves

Mounting bracket
positioned onside of unit

1

1

5
9

6.12
(155.5)3.51
0.40(89.0)(10.2) Mounting bracket
positioned on side of unit

1.63
(41.5)
3.38(86.0)

2

LO Rangeg Transducer

5.21(132.4)1
6

6.71(170.5)

HI Range Transducer

4

3.50(88.9)
1.75(19.1)

6.12 (155.5)
6.71 (170.5)
DeviceNet™ ModelOrdering Information
Ordering Code Example: 651CDYZCD

Code651C Self-Tuning/Digital PID Pressure Controller(for use with 653 or 253 Throttle Valves)Interface (Y)RS-232651CD			651CDConfiguration

2

2

Valve Driver (Z)Stepper Motor

S

S

Power Supply (C)0.5 Amp
1.5 Amp1
2

1

Options (D)
None

N

N

Cabling for 651CD:
Input Cables:
CB112-2-10 to connect 651 to 223, 225, 622, 623, 722 (terminal strip)			
CB259-5-10 to connect 651 to 624, 625, 626, 627, 628, 722 (15-pin)			
CB120-6-10 to connect 651 to 120			
CB112-10-10 to connect 651 to 220			
CB112-14-10 to connect 651 to 121, 221
Valve Cables:
CB652-1-10 to connect 651 to 653B			
CB651-30-10 to connect 651 to 253B

Ordering Code Example: 1651CYZ

Code

1651C Displayless Self-Tuning/Digital PID Pressure Controller(for use with 653 or 253 Throttle Valves)Interface (Y)RS-2321651C			1651CValve Driver (Z)Stepper Motor

Configuration

2

2

S

S

Cabling for 1651C
Input Cables:
CB112-2-10 to connect 1651 to 223, 225, 622, 623, 722 (terminal strip)			
CB147-1-10 to connect 1651 to 624, 625, 626, 627, 628, 722 (15-pin)			
CB120-1-10 to connect 1651 to 120			
CB112-10-10 to connect 1651 to 220			
CB112-14-10 to connect 1651 to 121, 221
Valve Cables:
CB652-1-10 to connect 1651 to 653B			
CB651-30-10 to connect 1651 to 253B

PC - 5/18© 2004-2018 MKS Instruments, Inc.
All rights reserved.

MKS Instruments, Inc.
Global Headquarters

MKS Instruments, Inc.
Valve Solutions

2 Tech Drive, Suite 201
Andover, MA 01810

Six Shattuck Road
Andover, MA 01810

Tel: 978.645.5500
Tel: 800.227.8766 (in U.S.A.)
Web: www.mksinst.com

Tel: 978.975.2350

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS
Instruments, Inc., Andover, MA. Viton® is a registered trademark of E.I. Dupont Co., Inc., Wilmington, DE. DeviceNet™ is atrademark of the Open DeviceNet Vendor Association, Coral Springs, FL.