Cube ® CDGsci
Heated Capacitance Diaphragm Gauge
The high-end INFICON Cube Capacitance Diaphragm
Gauge is the most accurate (≤0.025 % Rd accuracy;≤50 ppm F.S. Repeatability) and most stable vacuum
gauge available (<5 ppm FS/°C temperature stability;<70 ppm FS/year long-term stability). Cube is designed
as a pure reference device to standardize vacuum
measurement systems and is the only choice forvacuum research applications. The proven INFICON
temperature controlled, corrosion resistant ultrapure
ceramic sensor is at the heart of Cube’s outstanding
performance. Cube sets new standards in modern
communication and user flexibility with a 20 Bit analog
output and RS232-C, TCP/IP and HTML digital output
connected through a wireless or wired Ethernet
interface. Each device comes with a quality assurance
certificate, hand-signed by Cube’s leading productresearchers. Delivery in a reusable hard shell suitcase
for storage or shipment to calibration laboratories
underlines its professionality.
ADVANTAGES• True high precision pressure measurement - ceramic technology• Full stable output - proven by PTB• Flexible communication - various modern interfaces• All functions integrated - no controller required• Direct mounting to chamber - optimized center of gravity• Transportation without isolation valve possible
APPLICATIONS• Transfer standard• Main reference gauge• Research• In-house standard

1Cube® CDGsci

Cube ® CDGsci
ORDERING INFORMATION

3 C S 1 – C 1 1 – 2 3 0 0
Full Scale (FS / Torr)
0.1
1101001000

Other flange types on request.

2

Cube® CDGsci

369CFFlange
13E

DN 16 ISO-KF
DN 16 CF-R
8 VCR female

Cube ® CDGsci
SPECIFICATION
Full scale (FS)Torr
Accuracy 1)
Temperature effect
On zeroOn spanPressure, max.
Response time 2)
Lowest reading
Lowest suggested reading
Temperature1000 ... 100

10 ... 1
0.025 % of reading

0.1
0.05 % of reading

0.0005 % FS / °C

0.005 % FS / °C

0.001 % of reading / °C
3 bar (absolute)
2 bar (absolute)
350 ms0.01 % FS
0.05 % FS

0.01 % of reading / °C
1.3 bar (absolute)

Operation (ambient)+10 … +40 °C

Storage
Supply voltage
Power consumption–10 … +50 °C+14 ... +30 V (dc) or ±15 V (±5%)

During Heat up≤ 20 W

At operating
temperature
Output signal (analog)
Degree of protection
Standards≤17 W
0 ... +10 V (dc)
IP 40

CE conformity

EN 61000-6-2, EN 61000-6-3, EN 61010-1 and RoHSETL certification

UL 61010-1, CSA 22.2 No. 61010-1

SEMI complianceElectrical connection

SEMI S2
D-sub, 15-pin, male;
2 × LEMO Coax; Ethernet FCC

Setpoint
Number of setpoints

2 (SP1, SP2)

Relay contact≤30 V (dc) / ≤0.5 A (dc)

Hysteresis
Diagnostic port

1 % FS

ProtocolReadSet
Materials exposed tovacuum
Internal volume
WeightWeb pages, REST
services, RS232-ASCII
Pressure, status, ID
Setpoints, filter, zero adjust, factory reset, DC offset
ceramics (Al2O3), stainless steel (AISI 316L )≤4.6 cm31760 … 1803 g

Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after two hours operation for≥ 1 Torr and after 4 hours operation for < 1 Torr2)

Increase 10 ... 90% FS

31)Cube® CDGsci

Cube ® CDGsci
DIMENSIONS

www.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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