AGILENT ACTIVE VACUUMGAUGES AND CONTROLLERS
Vacuum measurement products that help
you optimize your vacuum systems.

Building Blocks for Total Vacuum Measurement & Control

Agilent Technologies provides a comprehensive tool kitof vacuum measurement products that enable you to optimize
your vacuum systems. From rough vacuum to UHV, our Active
Gauges, Controllers and Pressure Transducers allow you to control
and measure vacuum with the precision and the reliability that are
critical to getting your job done.

As a leading manufacturer of vacuum pumps and systems, weensure that our gauges integrate with these products to provide
you with a total vacuum measurement and control solution.
Vacuum Measurement from Agilent Technologies –reliable, versatile, flexible, comprehensive.

Active Gauges
From rough vacuum (Pirani and Pirani/Capacitance) to combination gauges (FRG700 and FRG-720) that span the entire
vacuum range with an array of options
including onboard displays, setpoint control
and field bus networking capability.
See detailed descriptions at right.

FRG-720
Full Range

PCG-750 Pirani/
Capacitance

PVG-500
Micro Pirani

Controllers
From basic rough gauge control
with our RGCs to multiple gauge
management with our XGS-600,
Agilent controllers provide theflexibility and intelligence to meetyour ever-changing needs.

XGS-600 - the most versatile
controller available

 Operates up to 12 gauges

simultaneously
Displays
up to 8 gauges at once
 <20 msec signal-to-set-point
response timeStandardfeatures include:- 8 open collector set points- 8 contact relays- Fully programmable RS232/485
serial communications- Pressure units: Torr, Mbar, Pa- Universal voltage compatibility

RGC-100 and RGC-150 - robust, cost effective,rough gauge controller Factory pre-calibrated with Agilent
531 thermocouple gauge using aNIST standardTwo easily configured set points
 Runs on100-230 VAC, 50/60 Hzand displays in Torr, mbar and kPa
 Large bright LED display
 Ethernet option for remotemonitoring Automatic identification of Agilent Active Gauges for easy setup
selectable pressure units (mbar, Torr, Pascal) for global compatibility
 Userand convenience
setpoint control pinpoints pressure readings to perform critical Adjustableoperations
AGC-100 Controller and AGD100 Display for Active Gauges

2

www.agilent.com/chem/vacuum

The Right Gauge for Your Application

GaugesVacuum Regime< ultra-high >< high >Applications< medium >< low >

 High vacuum pressure monitoringpressure measurement for Baseevaporation and sputtering systems
vacuum measurement and control
 Generalin the medium and high range

FRG-700

Inverted
Magnetron
Piranirange from industrial coating and Widesemiconductor processing to research andFRG-720/730
Bayard-Alpert
Piranilaboratory environments
General vacuum measurement and control
in the low to ultra-high range

 Fore pressure vacuum pressure monitoring Controlling high vacuum ionization gauges
 Safety monitoring in vacuum systems
vacuum measurement and control
 General
in medium and rough range
 Load lock control

PVG-500

Micro Pirani

PCG-750

PiraniCapacitance General thin film & vacuum processes Industrial vacuum processes
 Data storage and display manufacturing
CVD, PVD and other semiconductor
 Etch,production processes
sensor for monitoring test Reference
instruments
standard for traceability
 Transfer
measurements

CDG-500

Capacitance
Diaphragm< 13 decades of accurate pressure measurement >mbar
torrwww.agilent.com/chem/vacuum

10-10

10-7

10-3100103

mbar

10-1010-710-3100103

torr

Hot IonCold Cathode

Pirani/Convection

Capacitance Diaphgragm3

Service & Support

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This information is subject to change without notice© Agilent Technologies, Inc. 2014
Published October 2014
VPD-0314EN