DTCO Integrated Tool FlowSingle Run Time Environment

Contents• Introduction• Select Cell Layout and Annotate using Rule File
• Clip Layout to Build Active Devices• Device Simulation and SPICE Model Extraction• 3D BEOL Structure Creation for RCX Field Solver• SPICE Simulation within Same Input File
• DTCO Statistical Analysis Environment• Summary©2023 Silvaco, Inc.

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Introduction
DTCO: Connecting Semiconductor Physics to Circuit Design
Process Simulation
Solid Modeling

Design(GDSII)
Process
InfoVictory Process• Etch & Deposition• Epitaxy• Implantation• Diffusion/Activation• Oxidation• StressVictory Mesh• Solid Modeling• Device Meshing

Device Simulation
Victory Device• Drift/Diffusion• Self-Heating• Mixed Mode
• Radiation• Reliability
Victory Atomistic• NEGF• Quantum transport

Modeling
Circuit Simulation & RCx
Utmost IV• SPICE Model Generation
SmartSpice• Circuit Simulation
Victory RCx Pro• 3D Field solver RCx

Model /Circuits toCustomer

Design Technology
Co-Optimization©2023 Silvaco, Inc.

3Introduction• Design Technology Co Optimization (DTCO) improves designs across multiple domains.
• 3D active device and BEOL parasitic extraction builders are now integrated and share thesame:– Layout tool
– Structure builder– Structure mesh generator– Rule file– Simulation interface– Syntax• A single input file can now run a full TCAD to SPICE flow, enabling a powerful integrated DTCOenvironment©2023 Silvaco, Inc.

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Select Cell and Annotate using Rule File
• Supplied layout with basic labels ( Vss , Vdd , In,• Layout automatically annotated using the rule file

Example using a ring oscillator circuit©2023 Silvaco, Inc.

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Clip Layout to Build Active Devices• From same layout, clip areas to build active devices• Full Victory Process simulation capability available• Variables are used toautomatically mesh
the active structures

Example of stained SiGe extensions for pMOS
©2023 Silvaco, Inc.

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Device Simulation and SPICE Model Extraction• Simulate active device I V and capacitance curves• Automated multi gate SPICE model extraction©2023 Silvaco, Inc.

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3D BEOL Structure for RCX Field Solver• A Full 3D structure is created for BEOL fieldsolver• Active device netlist automatically extracted,

then• RC parasitics extracted and automaticallyback annotated• Same structure builder/syntax as used foractive devices©2023 Silvaco, Inc.

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SPICE Simulation within Same Input File
• Use “.INCLUDE” statement in SPICE to import

created netlist• SPICE simulations run and key performanceparameters extracted for full flow optimization• All run using the same interface and script©2023 Silvaco, Inc.

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DTCO Statistical Analysis Environment• Design of Experiments and analysis environment• Statistical analysis of layout/process/circuit dependencies©2023 Silvaco, Inc.

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Summary• Single fully integrated run time environment• Anything can be a variable Layout, Process, BEOL
• Clear actionable results for Design Optimization• Complete and full TCAD to SPICE simulation capability• Parameterization models linking all design variables• Powerful extract statements for parameter extraction• All tools developed in house for smooth integration• Worldwide support for your success©2023 Silvaco, Inc.

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