LEGEX Series

Catalog No. E16012(3)Coordinate Measuring Machines

Ultra-high Accuracy CNC Coordinate Measuring Machine

The Pinnacle of Mitutoyo technology –Legex, a world-class series of precision measuring machines.

LEGEX574

World-class accuracy of E0, MPE=0.28 + L/1000

LEGEX776

LEGEX9106
23

Evolving technology
Thorough analysis and elimination of error factors Part 1Base design

FEM structural analysis simulation

Integrated Y-axis guide rail

High rigidity

Integrated Y-axis guide rail

The LEGEX base is a sealed structure manufactured fromspheroidal graphite ductile cast iron*, this provides highrigidity and excellent vibration attenuation.
In addition, stress analysis through FEM structural simulation
minimises deformation due to load variation, ensuring a highlevel of geometric accuracy.

The Y-axis guide rail is integrated into the main unit base toincrease rigidity and thermal stability.

Ceramic plasma spraying for each axis
sliding section
Ceramic plasma spraying is applied to sliding sections for theY-axis guide rail, X-axis beam, and Z-axis spindle, creating
surfaces suitable for highly accurate air-bearing operation.
It also produces excellent corrosion resistance.

0.6

0.08 s0.4

ζ=0.028

The LEGEX structure quickly attenuates traverse-induced
vibrations and so reduces any adverse effect onmeasurements.
This characteristic also allows ultra-high scanning accuracy
to be realized.

Cast iron is an alloy of iron, carbon, silicon, manganese,phosphorus, sulfur, and traces of other elements, andexhibits characteristic properties due to the carbon being
distributed throughout the metal in the formof graphite.
Ductile cast iron is created by spheroidizingthe graphite by adding magnesium alloy tothe melt. Compared with normal cast iron, it
has great tensile strength, is relatively tough,and has excellent machinability and wear
resistance. Ductile cast iron is thus used forcomponents such as automotive parts.
LEGEX employs FCD600 ductile cast iron but
made in such a way as to eliminate blow
holes and pin holes (defects) of 0.1 mm orlarger.

4m/s20.2*Spheroidal graphite ductile cast iron

Vibration attenuation-0-0.2
-0.4
-0.6

0.5

0.6

0.7

0.8

0.9

Time (s)5Evolving technology
Thorough analysis and elimination of error factors Part 2

Vibration control
Isolating floor vibration
The LEGEX is hardened against floor induced vibration byuse of ʻair-damped spring isolatorsʼ with an auto-leveling
function. This virtually eliminates factory floor vibrations fromthe entire machine structure.

Fixed-bridge type structure

Moving-bridge type structure

Construction
The centre of gravity of a moving
bridge moves according to the X-axis
motion. This movement of the bridge
CG changes the load distribution andtherefore alters the consequentialdeformations.

Pitch and yaw errors practically eliminated
The LEGEX uses a fixed-bridge type structure. This is the ideal
CMM architecture and virtually eliminates pitch and yawerrors. Most other CMMs use a moving-bridge design witha single drive unit under the column, which tends to cause
yawing and pitching during slide movements.
Installation positions

Dynamic accuracy
X- and Y-axis independence and a ʻcenterof gravityʼ type drive system
The fixed-bridge design of the LEGEX allows the axes tooperate totally independently. Movement of the X-axis
slide does not change the loading on the Y-axis slide, andso does not cause deformation. Also, the ʻcenter of gravityʼ
type drive system places the drive units near the center ofgravity of each slide. This feature allows very high speed,
highly accurate measurements by reducing inertia-induced
deflections during acceleration and deceleration.

Floating mechanism reduces internalvibration
Z spindle

Drive axis

Air bearing
Drive axis

To reduce the effects of internally generated vibration,
the LEGEX uses a special floating mechanism to couple
each ballscrew to its guide block. This isolates the slidefrom the servo motor as it turns the ball screw and thus
prevents transmission of motor vibrations, especially during
acceleration and deceleration.

Air-damped spring isolaters

Ball screw

Pulse generator
Servo motor

X beamFloating mechanism
Guide block
Sliding nut

Special floating mechanism

67

Evolving technology
Thorough analysis and elimination of error factors Part 3Probes

PH10MQ

Length standard

Temperature compensation

Linear glass scales with virtually zerothermal expansion coefficient

Effective over the 18 ºC to 22 ºC(64.4 ºF to 71.6 ºF) temperature range

The LEGEX is equipped with crystallized-glass scales with aresolution of 0.01 µm and an ultra-low linear expansion
coefficient of 0.01 10-6 /ºC. This virtually zero thermal
expansion coefficient means the LEGEX can maintain its
extreme accuracy in spite of thermal changes.
The scales are also mounted in a unique new way that reduces
the hysteresis error to 1/5 that of previous models. The graphs
below show the reduction in hysteresis error that results fromthis new mounting method.

While conventional very high accuracy CMMs require fairly
strict temperature controlled environments, the LEGEX
has been designed to improve the thermal stability ofeach component to minimize deformation. In addition,
temperature sensors on each axis and for the workpiece itself
detect temperature changes in real time and are used tocompensate back to size at 20 ºC.

MPP-310Q
SP80
Ultra-high Accuracy and High-accuracy Scanning Probe
Low Measuring ForceCan Use Very Long Styli
Scanning Probe

TP7M
High-accuracy
Touch-trigger Probe

SurfaceMeasure1110
SurfaceMeasure403
Non-contact Line-Laser Probe
Non-contact Line-Laser Probe

SurfaceMeasure201FS
Non-contact Laser Probe

SP25M
Compact High-accuracy
QVP
Scanning Probe
Quick Vision Probe

State-of-the-art control
Our proprietary control unit has been upgraded withsophisticated control technology that uses a new algorithm.
A newly developed high-resolution linear encoder is also used
to achieve higher accuracy.
Standard glass scale

MPP-310Q

SP80 Scanning Probe

QVP

MRT240 Rotary table

Status Monitor

The LEGEX can be used with the MRT240 rotary table as the4th axis.
It can be used with a scanning probe for rotation-synchronizedscanning measurement.

Can remotely monitor measuring machines

20∞C
25∞C
15∞C
20∞C

Error (mm)0Server• Collects and visualizes operational status data
• Supports MTConnect communication

Scales mounted by the new method
050

MeasurLink®

100 150 200 250 300 350 400 450 500

Position (mm)15∞C
20∞C-1
20∞C-2
20∞C-325∞C
30∞C

Error (mm)0Specifications
Resolution
Accuracy

Scales mounted by the conventional method
0100 200 300 400 500 600 700 800 900 1000

Position (mm)Hysteresis comparison between the conventional and the new scale mounting methods

8Reduces defective products by visualizing quality

Indexing accuracy
Radial deflection ofrotation axis
Axial deflection ofrotation axis

Maximum table load
TableDiameter
Height0.00005°(0.18”)
0.7 ”
0.4 µm
0.4 µm40 kg
ø240 mm
105 mmNote: MeasurLink® is a registered trademark of Mitutoyo Corporation in Japan andMitutoyo America Corporation in the United States.

9

Worktable options

Specifications
ModelLEGEX574

X axisMeasuring
Y axisrange
Z axisMeasurement method
Maximum measuring speed
Maximum acceleration
Resolution
Guide method
MaterialMeasuringtableSize
Maximum workpiece heightWorkpiece
Maximum table loading
Mass (includes the vibration-dampingplatform and controller, but not workpiece)
Pressure
Air supply
Consumption

500 mmItems

LEGEX774

600 mmLinear encoder
200 mm/s
980 mm/s2
0.00001 mm
Air bearing
Cast iron
750×750 mm

550×750 mm

950×1050 mm

700 mm

850 mm

250 kg

500 kg

3500 kg

800 kg5000 kg

5100 kg

6500 kg

0.5 MPa
120 L/min under normal conditions (air source: 160 L/min or more)Standard worktable: Ceramic-coated worktable

Custom-ordered: Scraped

Installation temperature environment(0.38 + L/1000) µm (Temperature environment 1)(0.40 + L/1000) µm (Temperature environment 2)

SP25M (ø4×50)

900 mm1000 mm

450 mmLength measurement error E0,MPE(0.28 + L/1000) µm (Temperature environment 1)(0.30 + L/1000) µm (Temperature environment 2)

MPP-310Q (ø4×18)

LEGEX9106

700 mmMain unit accuracy
Probe

LEGEX776
700 mmTemperature environment 1 Temperature environment 2
C
18 to 22 °C
19 to 21 °0.5 ℃/h
1.0 ℃/mTemperature range
Rate of change
Gradient

Introduction to LEGEX12128

Note 1: L = measured length (mm)Note 2: Table at right defines temperature environments 1 and 2

Main Specifications

Dimensions
Unit: mmModelItems
Measuringrange

X axis
Y axisZ axisResolution
Guide method
Length measurement error E0,MPE(Temperature environment 2)
Probe: MPP-310Q (ø4×18)

HYCZ

1200 mm
1200 mm
800 mm0.00001 mm
Air bearing(0.6 + 1.5L/1000) µm

Note 1: L = measured length (mm)Note 2: This is a custom-order product.
Note 3: For temperature environment 2, refer to the installation temperatureenvironment of the LEGEX Series on page 10.

FX

LEGEX12128

Measuring range

E251

Measuring range

AA

B

W

DModelW
H
DA
B
CEF10LEGEX574
1470
445
1390

LEGEX774
2630

745
1311

2430

600

1670
550
1410

LEGEX776
2930

895
1461

LEGEX9106
1870
3050
3030
660
1795

Note: This machine incorporates a main unit Startup system (relocation detection system), which disables operation when an unexpected vibration is applied or the machine is relocated. Be sure to contact your nearest
Mitutoyo Sales Office prior to relocating this machine after initial installation.

720

11

168 2110(3)g-(DI)PR(JP7), Printed in Japan

Coordinate Measuring Machines

Vision Measuring Systems

Form Measurement

Optical Measuring

Whatever your challenges are, Mitutoyo
supports you from start to finish.
Mitutoyo is not only a manufacturer of top quality
measuring products but one that also offers qualified
support for the lifetime of the equipment, backed up
by comprehensive services that ensure your staff canmake the very best use of the investment.
Sensor Systems

Test Equipment

Digital Scale and DRO Systems

Small Tool Instruments
and Data Management

Apart from the basics of calibration and repair,
Mitutoyo offers product and metrology training,as well as IT support for the sophisticated software
used in modern measuring technology. We can also
design, build, test and deliver measuring solutions
and even, if deemed cost-effective, take your criticalmeasurement challenges in-house on a sub-contractbasis.

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https://www.mitutoyo.co.jp/global.html
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