SurfaceMeasure

Catalog No.E16000(10)Coordinate Measuring Machines

Non-contact Laser Probe for Coordinate Measuring Machines

Highly accurate, efficient and high speed measurements

Introducing the new non-contactlaser probe
The SurfaceMeasure makes it possible to use
coordinate measuring machines, until now usedprimarily as inspection systems, as production systems
that can be used throughout the entire process, fromdevelopment and prototyping to production.

SurfaceMeasure series
The SurfaceMeasure lineup offers two models of noncontact probe using three different laser irradiation
methods and measuring range. Mitutoyo canrecommend the optimal laser probe in considerationof the workpiece surface texture, operation method,etc., for each client.

2In the development
phase

Optimized design utilizing measurement point cloud data significantly improves the efficiency ofthe development process, even when no master model or CAD data is available for a product.

In the prototyping
phase

Shortens the entire process from prototyping to mass production because simulations can be used to compare
prototypes with CAD data, check for parts interference and set clearances, and optimize machining settings.

In the production
phase

Allows the obtained data to be used for correcting dies, for example, by controlling the variability
in mass-produced products, and feeding analysis data back to the preceding process step.

3Non-contact Laser Probe with Mitutoyo Quality
The SurfaceMeasure is a lightweight, high-performance, non-contact, laser probe developed for use with CNC
coordinate measuring machines.
A large amount of point cloud data can be obtained densely and quickly in comparison to contact scanning.
The point clouds provided by laser scanning facilitate the development to the manufacturing.
SurfaceMeasure probes can be used not only for dimensional measurement but also for modeling from point groupdata using commercial software, structural/fluid analysis and data transfer to a molding machine as a tool for
digital engineering.

Positioning control in a maximum of 720 directions enables high-speed scanning of even complex workpieces in theoptimum orientation.
Additionally, the use of ACR3 allows you to make fully automated measurements while selecting “non-contact” and“contact” probes as desired.

SurfaceMeasure1110•3D form data can be densely obtained at high speed.
Scanning width is up to 110 mm and scanning depth is up
to 100 mm, enabling measurement of a deep workpiece bya single scanning.

SurfaceMeasure201FS•Since the laser intensity is automatically adjusted, stable
shape data can be obtained even when the workpiece has
multiple colors and varying degrees of reflectance.

Data
cycling

Modeling

Advantages of non-contact measurements using CMM

Reliability

Fully
automatic• Change between contact and non-contact probes according
to the required measuring accuracy and feature of workpiece,
thereby increasing measurement reliability.
• Automatic changeover of multiple probes with an auto probechanger is possible, enabling fully automated measurementfrom execution of measurement to report creation.

Measuring a color-sample plate

Note: Even after using the warm-up unit such as ACR3 (special order), it isnecessary to warm up the laser for about 10 minutes.

Workpiece45

Specifications
The four probes that make up the SurfaceMeasure lineup operate on any Mitutoyo CNC CMM such as the CRYSTAApex V, STRATO-Apex series machines.
SurfaceMeasure1110

SurfaceMeasure
201FS

Beam expansion

Flying spotMax. scan width110 mm

23 mm

Max. scan depth

100 mm

15 mm

Working distance

156.5 mm57.5 mmScanning error *1

9 μm−Probing dispersion value *2 (95%)
P form.sph.D95%:Tr:ODS

36 µm

8.0 µm300,000 points/sec

25,000 points/sec.

440 g

500 g

Laser classClass2 [ IEC 60825-1: 2014/ EN 60825-1: 2014+A11:2021 ]JISLine laser

Car body inner panels, Castings,
Aircraft bodies, Blades

201FS

High accuracy model through flying-spot laser irradiation.
Less affected by multiple reflection.

Small parts and high accuracy parts

Measuring Range

Class2 [ JIS C 6802 : 2014 ]Laser type

Applications

Unit: mm

Semiconductor

Wave length

660 nm

670 nmOutput

2.5 mW

1 mW

403

201FS

1110

General-purpose
measurement

General-purpose
measurement3066183*1 According to Mitutoyo’s test procedure. (1σ/sphere measurement, probe alone)*2 According to ISO10360-8:2013 test procedure. (probe alone)

147.5

EN/IEC

1110

The Max. Acquisition rate is 4 times faster than theconventional systems.
The workpieces with depth can be measured, it is effective
to reduce maesuring time for wide range.

106.5

Mass

Features156.5

Max. Acquisition rate

SurfaceMeasure

267.5

Laser irradiation method

51

Item/ModelProbe Features and Applications（68）

High sensitive andgeneral-purpose
measurement

57.5

50
15100401101110

6201FS

7

Data Processing Software
Point cloud data processing software MSURF
This is a package of point cloud data processing software that allows you to perform operations frommeasurement to evaluation on the same platform when using the MSURF non-contact laser probe SurfaceMeasure.

MSURF-SCalculates point cloud data measured by CNC CMM with SurfaceMeasure.
Scanning paths can be created by simply defining three items: the scanning starting point, the scanning length,
and the scanning width.
•You can easily define these three items using the joystick while
checking the camera preview.
•If point cloud data or master data is displayed on the screen, you
can define the three items using the mouse on the data. Thisfeature is convenient for creating a measurement path basedon simulation and for specifying areas where data needs to beremeasured, both of which are useful in reducing the number ofmeasurement steps. These operations can be easily carried out
using the joystick.

MSURF software packages
Software

MSURF-S

MSURF-S
1On-line
MSURF-S
2MSURF-S
33

3

3

MSURF-GMSURF-G
13Off-line
MSURF-GMSURF-G
23

3Scanning paths can be registered as measurement macros.

MSURF-S can be started from MCOSMOS•You can use the override function to modify all or some of themeasurement conditions in the created measurement macros.
•The submacro function is effective for measuring multiple units ofthe same workpiece.
•The execution time of a measurement macro is computed from themeasurement conditions and the coordinate measuring machinespecifications.

•Since a work coordinate system created in MCOSMOS canbe utilized by MSURF-S, you can execute fully automatic
measurements that merge “contact” and “non-contact”
measurements.

3MSURF-I

3MSURF-I Option

3333

MSURF-MESH PRO

333

3

MSURF-PLANNER

MSURF-IPRO•It allows setting and execution of scanning paths and registrationand deletion of the macro by using the joystick.
Since measurement can be performed without PC operation,measurement efficiency is dramatically improved, particularly forlarge Coordinate Measuring Machines.

33333Note: MSURF operates using the Microsoft Windows10/11 operating system.

An evaluation based on non-contact measurement begins with the process of
accurately capturing the surfaces of a part that has been formed.
The high-density point cloud data obtained from the surface of a part is utilized
by MSURF for data analysis purposes, such as extraction of geometric features,
evaluation of free-form surfaces and profile shapes, and tolerance verificationcompared with master data.
Furthermore, development of data analysis into reverse engineering promises to berevitalized in the creative and manufacturing cycle that uses 3D data as its core.

89

MSURF-I

MSURF-G

Conducts analysis or comparison verification of measured point cloud data in reference to nominal data
(supporting CAD data import).
Importing CAD data

Planar shape comparison•Support of STEP and SAT formats is standard.
•Optional formats available include CATIA V4, CATIA V5,ProEngineer, Unigraphics, VDAFS, Parasolid, Solidworks, JT, andIGES.

•Point cloud data or mesh data can be compared with CAD data,
and the planar shape errors displayed on a color map.
•Since wall thicknesses can be displayed on a color map, there isno need to cut the workpiece as is necessary with conventional
methods.
•A simulated digital caliper function enables quick evaluation of awide variety of steps and gaps.
•When evaluating the curvature of a surface, the angle R within
the specified tolerance, for example, can be evaluated.

Comparison of cross-sectional shapes•You can cut point cloud data or mesh data to comparecrosssectional shapes or compute angles, distances, radii, etc.

Cross-sectional evaluation (dimension computation)

MSUR-G is off-line version of MSURF-G. It allows
users to previously create measurement macrosusing CAD data. Therefore, users can startmeasurement immediately at the time a real
workpiece is ready. Since MSURF-G is a standalone
PC application, only requiring installation by
the user, it helps preserve valuable CMM time
exclusively for productive measurement.

Color map of wall thickness

Evaluation of steps and gaps

Evaluation of surface curvature

MSURF-PLANNER is software to automatically create
measurement macros (surface form, feature form)
for the laser probe from 3D CAD data.
Optimized data (travel path, number of probehead revolutions, etc.) of a measurement path willcontribute to improvements in productivity.

Note: MSURF-G cannot be combined with MSURF-S.

MSURF-MESH PROThis software is provided with various functions
such as filtering point cloud data and mesh data.
The software is enhanced by adding functions tostandard ones. It also enables functions such as meshdata thinning-out, highlighting, interpolation andoutlier removal that are unavailable as standard.

Color map of errors

MSURF-PLANNER

Automatic generation of measurement macros by MSURF-PLANNER.

Note: MSURF-MESH PRO has optional functions of MSURF-I.

Creation of an operating procedure macro using theautomation function•The automation function can record the operating procedure,including the execution of measurement macros.
This function allows you to automate a series of operations, frommeasurement, to evaluation, to report creation.

1011

2408(JP16), Printed in Japan

Coordinate Measuring Machines

Vision Measuring Systems

Form Measurement

Optical Measuring

Whatever your challenges are, Mitutoyo
supports you from start to finish.
Mitutoyo is not only a manufacturer of top quality
measuring products but one that also offers qualified
support for the lifetime of the equipment, backed up
by comprehensive services that ensure your staff canmake the very best use of the investment.
Sensor Systems

Test Equipment

Digital Scale and DRO Systems

Small Tool Instruments
and Data Management

Apart from the basics of calibration and repair,
Mitutoyo offers product and metrology training,as well as IT support for the sophisticated software
used in modern measuring technology. We can also
design, build, test and deliver measuring solutions
and even, if deemed cost-effective, take your criticalmeasurement challenges in-house on a sub-contract
basis.

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https://www.mitutoyo.co.jp/global.html
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All product information contained in this brochure is current as of August 2024.

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