Strategy towards Fusionof Nano and Micro Systems
Isao Shimoyama,
Professor,
Department of Mechano-informatics,
Graduate School of Information Science and Technology,
The University of Tokyo
being emerged through this movement. The fact that
there is intrinsically a high probability of movement isextremely advantageous, particularly in the small
nanoworld. Therefore, it is sufficiently conceivablethat Micromachine can be industrialized as nextgeneration devices, using their advantageous shapes
and functions, and not simply as an extension of ICs
and VLSI.

As I was introduced, my name is Isao Shimoyama.
Allow me to explain how I came to be speaking at thissymposium today on a "Strategy towards Fusion of
Nano and Micro Systems." The Micromachine Centergave me an assignment to consider the state ofMicromachine, or MEMS, five or ten years from now.
For this reason, I was allowed to participate in various
committees at the Micromachine Center. Based on myfindings, I would like to relate to you what course I
believe Micromachine, or MEMS, will take in themedium- to long-range future.

Anticipated Manufacturing Technologies andMaterials

Although the English title for my discourse is"Strategy towards Fusion of Nano and Micro Systems,"
I will reveal the conclusion of my study first by sayingthat R&D in the field of Micromachine, or MEMS, will
shift decidedly toward devices replete with functionsin the fields of nanotechnology and nanomaterials.
From this viewpoint, the key phrase of my speech willbe "nano on micro," as I would like to talk to you about
how the products of nano materials and technology
will be provided on microsystems.

While it may be far in the future, I believe it is an
important issue in manufacturing technology todiscuss how we can put functions emerging on
nanoscale to practical use. Further, it will be
extremely important to develop new nanomaterials,
and manufacturing technologies for mass-producing
these nanomaterials at a low cost, since we have notyet been able to industrialize nano emerging functions
that were first emergence on a nanoscale. In a sense,taking advantage of such as self-assembly phenomena
on nanoscale and to obtain nanomaterials or nanoemerging functions is what we call a bottom up
approach. In contrast, Micromachine technology is an
example of a top down approach used to process suchas surfacing and removing by micro-machining
methods that enabled microfabrication, assembly, andsystems, as represented by lithography. These typesof processes have raised the potential of
manufacturing technology through innovation.
Microfabrication systemization is another anticipatedmanufacturing technology for achieving 3-dimensional
high-density integration, multiple functions, andfabrication of not only silicon, but also ceramics,
polymers, and other materials together. High-speed
analysis and sensing technologies in microarea havebegun to be developed in microchemical processes
and the field of µ-TAS. These technologies will be
used to create a society and a lifestyle with satisfactionin which we can feel growth and development. Whenconsidering these from the binding of information, we
can anticipate ubiquitous environments in whichanyone, anywhere, at anytime can access data or
another person with ease; and an environment inwhich an individual like me, only here and now, canobtain an order-made product or a regional service;

Features of Micromachine and Industrialization
To define Micromachine and their potential
industries from the unrestrained standpoint of theuniversity, the first thing we observe is that theelements of Micromachine are extremely small,allowing for the manufacturing of dense and highly
integrated devices. For example, it is possible tomanufacture machines from elements strung onedimensionally in a long line, as in the example of anendoscope. By densely integrating elements twodimensionally, it is possible to develop thin,lightweight televisions like wallpaper, for example, orextremely thin displays used in cell phones and thelike. And while it may be possible to manufacture
Micromachine that can be used in specific medicalenvironments, it is also conceivable that there would
be a large market for industries providing extremely
small, lightweight, and thin devices. Another greatfeature of Micromachine, or MEMS, is their capacity tocontain a driving unit, unlike IC or VLSI technologies.
Based on the strict definition of movement, even animmobile solid object has within it molecules andatoms that are moving, and numerous functions are2

and a safe and secure living environment in which ourprivacy is protected when accessing a network. These
are the goals of a vision to provide satisfying lifestyles
to users. I have provided this scenario to show thatthe use of these technologies can elevate Japan to the
top level internationally.

networks, learning and education, and security.
Industries include semiconductors, system LSI,sensors,
micro-fabrication,
Micromachine,communications, content services, and fuel cells. With
that in mind, what policies should we consider forthese technologies? Since it is quite difficult to
produce products simply by using of emerging
nanofunctions and nanomaterials, it is necessary to
promote manufacturing technologies in the micronano fusion domain or research on the fusion ofsystemization technologies and to establish ameasurement evaluation technology. We must
develop a foundation for the technology transfer fromuniversities and development of these technologies inindustries, R&D systems at National Institute ofAdvanced Industrial Science and Technologies, andR&D typified by foundries that use these facilities. We
must create an infrastructure that can reduce barriers
as much as possible, enabling anybody with an idea toparticipate in this industry or its research anddevelopment. I would like to ask government to fill up
a mechanism or infrastructure at the national level fordeveloping creative products through the active
cooperation of industries in applying fundamental basetechnologies.

Innovation
Innovation required to achieve this goal includes
progress in wearable, mobile, and interfacing
technologies. For example, we are able to produce
super-small batteries and low-power CPUs, or are
becoming capable of producing them. We havedeveloped, or will soon develop, sensors that appeal to
the five senses, including hearing, sight, smell, andtouch, or that correspond to stimuli of the senses, aswell as devices that present and display these senses.
Using Micromachine technology, we can develop light,thin devices. We can develop flexible devices usingorganic materials. Other innovations are devices thatcan display 3D images that are made from the above
technologies to be light, thin, and flexible enough tofold up and put in your pocket. Also, opticalcommunications or sensors placed on networks areappearing as innovations in the wearable, mobile, andinterfacing fields.

Conclusion
A recent newspaper article commented thatJapan's manufacturing technologies have still globallycompetitive. In general, businesses are not healthy
and tend to look toward short-term profits, as in how
something will be profitable a half-year or a year fromnow. However, an issue being discussed at theuniversities is that we must strengthen ourcompetitiveness while we are still strong. If we do not
conduct R&D for the mid-term and long-term while
outlining dreams that are feasible now, I ask you what
will we do when Japan's strong manufacturing
technologies die out? How will Japan survive in thefuture? The focus of our R&D should be ontechnologies vital for strengthening Japan, including
micro-nano manipulation of 3-dimensional
MEMS/NEMS, design simulation, and MEMS andNEMS created from multiple materials. Finally, I am
often told that infrastructure as well as cooperation
between industry and academia and the fostering of
human resources is extremely vital. While cooperation
between industry and academia creates anatmosphere in which universities are required toexecute everything up to product development, themost important mission for universities is to educateand to develop seeds. Through the combination ofhealthy industries and university initiative, I hope wecan generate a great surge in the field. As we progress
into the 21 st century, Japan must continue to takeaction and earn respect in order to occupy aprestigious position in the world. For this reason, I
conclude that there is no more time for debate.

Robots as an Example Achievement
When we see these from the viewpoints of robots,
it has applications in such areas as healthcare, welfare,information, everyday living, safety and security.
There are surgical robots in medical care. In welfare,
we have nursing robots and attendant robots. In thefield of information, there are human-like robots,robots with no strength but serving as an interface.
There are robots that help with various householdchores and, at night, can feasibly serve as nightwatchmen. If we broke down these robots into desiredelement technologies, we would have such abilities as
taking diagnoses and giving medical care at theinvasion stage of disease, reading vital signs, sensing
and displaying the five senses, and performing wirelesscommunications or telemetry. We would also like therobots to have a soft quality, an actuator, and a batterythat can be powered externally, as well as reliability
and adaptability to society. Breaking down
manufacturing technologies into the key technologies,
naturally one large key or breakthrough is MEMS, or
what we are calling Micromachine technology. Using
technologies to fuse these with nanoarea, we havebeen able to emerge new functions in nanoarea andhave developed devices that can use soft, thin, andnarrow curved surfaces, as well as small devices thatare dense and highly integrated.
Policies and Markets
Markets for these technologies include devices,3