Geschäftsbereich Reinigung bei Fraunhofer

ANNUAL REPORT 2023/24

About Fraunhofer FEP
The Fraunhofer Institute for Organic Electronics, Electron Beamand Plasma Technology FEP works on innovative solutions in thefields of vacuum coating, surface treatment as well as organic
semiconductors. The core competences electron beam technology, plasma-assisted large-area and precision coating, roll-toroll technologies, development of technological key components

Thus, Fraunhofer FEP offers a wide range of possibilities forresearch, development, and pilot production, especially for theprocessing, sterilization, structuring and refining of surfaces aswell as OLED microdisplays, organic and inorganic sensors andoptical filters.
Our aim is to seize the innovation potential of the electron
beam, plasma technology and organic electronics for new
production processes and devices and to make it available forour customers.

www.fep.fraunhofer.de

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FRAUNHOFER FEP

design provide a basis for these activities.

Markt- und Trendanalyse in der industriellen Teilereinigung 2020

as well as technologies for the organic electronics and IC/system

Annual Report
2023 / 24

Content

Foreword ��������������������������������������������������������������������������������������������������������������� 2News from the Institute ��������������������������������������������������������������������������������������� 4
Strategy ����������������������������������������������������������������������������������������������������������������� 6
Contact Persons ����������������������������������������������������������������������������������������������������� 8
Advisory Board ��������������������������������������������������������������������������������������������������� 10
Organizational Structure ����������������������������������������������������������������������������������� 11
The Institute in Figures ��������������������������������������������������������������������������������������� 12
Business Units ����������������������������������������������������������������������������������������������������� 16
Coating of Parts ��������������������������������������������������������������������������������������������������� 18
Coating of Metal Sheets and Strips, Energy Technologies ����������������������������� 20
Flexible Products ������������������������������������������������������������������������������������������������ 24
Medical and Biotechnological Applications ����������������������������������������������������� 26
Microdisplays and Sensors ��������������������������������������������������������������������������������� 28
Precision Coating ������������������������������������������������������������������������������������������������ 30
Systems ����������������������������������������������������������������������������������������������������������������� 32
Materials Analysis ���������������������������������������������������������������������������������������������� 34
The Fraunhofer-Gesellschaft ���������������������������������������������������������������������������� 38
Fraunhofer Group for Light & Surfaces ������������������������������������������������������������ 40
Fraunhofer-Business Area Cleaning ������������������������������������������������������������������� 41
Memberships ������������������������������������������������������������������������������������������������������ 42
Theses ������������������������������������������������������������������������������������������������������������������ 43
Publications �������������������������������������������������������������������������������������������������������� 44
Protective Rights ������������������������������������������������������������������������������������������������� 47

Foreword

Prof. Dr. Elizabeth von Hauff,
Director Fraunhofer FEP

Foreword
Dear partners of the Fraunhofer FEP,
Dear readers,
2023 was a crisis-ridden year globally that brought many
major challenges – from political turmoil and conflict to natural
disasters – that culminated in diverse and complex economic
uncertainty. However, despite all the hurdles, we at Fraunhofer
FEP can look back on many positive developments as many ofthese external challenges presented opportunities.
Our outstanding energy management system and years of
forward-looking conversion to sustainable energy supply
solutions, such as photovoltaic modules for autonomous electricity production, use of waste heat from our large machines
for heating office and lab space and smart solutions for local
energy saving, have helped us get off to a good start this year
despite rising energy prices. Thanks to the successful acquisition of numerous industrial projects and publicly funded
projects by the FEP team, we were able to achieve a balanced
economic result for the year.
In April we presented the institute strategy to external auditorsfrom industry, academia, and politics. Regular strategy reviews
are standard practice in the Fraunhofer Society. Preparations
began in the fall of 2022 and involved several workshops that2

integrated the interdisciplinary teams and individual business
units of the institute. The strategy report included the overarching institute vision and focus on sustainability, humanresources, digitalization and scientific excellent. In addition,
the business units Plasma Technology, Electron Beam Technologies, and Medical Biotechnology Applications presented
detailed strategic plans. The strategy audit in 2023 kicked off
continuing process in which the Fraunhofer FEP will monitor
and re-examine the strategic focus of the institute annually,
with a larger strategy audit every 5 years. In a very constructive exchange with the external consultants and auditors, ourstrategic focus was confirmed and the tools for future strategy
evaluations were defined. In future, we will build on this audit
for the ongoing strategic review of the institute. We would liketo thank all colleagues involved, our external consultants andauditors for their support and the constructive discussion. As aresult, we at Fraunhofer FEP will build on our existing strengths
and unique selling points and to strategically position the institute towards current and emerging markets.
Our technological developments – particularly in the field of
coating flexible products such as films or ultra-thin glass – areincreasingly being used in sustainable construction applications. We have been able to lay important foundations withinseveral EU projects, including the development of thermochromic and electrochromic coatings for the building sector.
The first prototypes of smart windows, as a contribution to
reducing energy consumption in buildings, and hydrophilic
coatings on ultra-thin glass from the Switch2Save, NewSkin
and FLEX-G 4.0 projects met with a very positive response at
our first participation at the BAU 2023 trade fair in Munich. In
addition to the publicly funded projects, continuous researchand development with leading industrial partners is leading tofurther pioneering advances in the field of sustainability.
After the first years, the sputter epitaxy working group at
Fraunhofer FEP has established itself. For the second time, ourinstitute organized an online workshop with numerous international experts and offered a platform for the exchange ofcurrent research results. We look forward to further developing our technological platform and network of partners inthis field in coming years.

again contributed to many projects in 2023. The expansionof our S1/S2 facilities to validate these processes and technologies are now possible in the new laboratories in our newly
completed building that will house activities for electron beamtechnologies for environmental, medical, ecological, and sustainable applications. In order to create a solid basis for these
activities, organizational adjustments were made to enhance
the synergistic potential in the institute. We are using the
momentum of this eventful year to start 2024 with the official
inauguration of the new building on the RESET (Resource
Saving Energy Technologies) campus next spring.
I would like to thank all our employees as well as our funding
bodies and industry and academic partners for their continued great trust, support, and cooperation and a fantastic year
in the face of the numerous external challenges we faced
together!
In our annual report, we take a detailed look at the highlightsof the last twelve months. I hope you enjoy reading it and lookforward to continuing our good cooperation!

We see incredibly potential for our vast and unique expertise in
the development of electron beam technologies for applicationin hydrogen technologies to support the energy transition.
As an example of one of the many activities in this direction,
we coated the first bipolar plates last year and optimized oursystem technology for this purpose. Our range of technologies
for the production, storage and processing of hydrogen for
the energy transition was presented very actively as part of our
networking activities, e. g. in the Fraunhofer hydrogen networkor with the Saxon cluster HZwo e.V., and also presented for the
first time at regional and international conferences and trade
fairs in Dresden and Brussels.
For a few years now, the Fraunhofer FEP is responsible for the
Fraunhofer-business area Cleaning. This year was a special one
for all members. Fraunhofer-business area Cleaning celebrated
its 20th anniversary. The celebrations culminated at parts2clean
with numerous activities and technical presentations as well as
an anniversary breakfast.
The institute announced another highlight in the summer.
Within the "Backplane" project funded by the Saxon State
Ministry of Economic Affairs, Labor and Transport SMWA , colleagues from the Microdisplays and Sensors department realized OLED microdisplays in a 28-nanometer backplane technology on 300 mm wafers for the first time. This made it possible
to produce components with a display diagonal of 0.18 inches
and pixel sizes of just 2.5 micrometers. This corresponds to an
as-yet unattained level in the global OLED microdisplay market
and is world record.
Our expertise in the field of medical and biotechnologicalapplications using the diverse effects of electron beams once

3

News from the InstituteNews from the Institute

Ceravis AG takes over E-Vita GmbH

Reorganization of activities in the field of
medical-biotechnological applications

The two founding shareholders of E-Vita GmbH, Ceravis AG
and Fraunhofer-Gesellschaft e. V., announce that Ceravis
has acquired all Fraunhofer shares in E-Vita with effect from
June 30, 2023.

With its electron beam and plasma technologies, the Fraunhofer FEP has a diverse toolbox for a very broad application
portfolio, which has also included medical applications foraround 20 years.

E-Vita GmbH was founded in 2021 by Ceravis and Fraunhofer
as a joint venture to make the technology of chemical-free,sustainable treatment of seeds using electrons, which is already established in large-scale plants, economically viable forsmaller seed quantities. The aim of the treatment is to eliminate bacteria, viruses and fungi on the surface of grains andother biological bulk goods.

In addition to the effect of thin films, for example for biocompatible or antimicrobial surfaces, accelerated electronsin particular provide unique possibilities for more effective
vaccine production, gentle tissue preparation, hygienizationand sterilization of medical products and hormetic stimulationof microorganisms for microbiological processes. In 2017, a
separate "Medical and Biotechnological Applications" department was formed from the relevant working group to addressthese issues. Based on recommendations in the 2022/23
strategy process, to make better use of technological synergies
and to stabilize this promising field of work, the activities ofthe 2023 division were reassigned to the working groups of
the Electron Beam division.

Due to a strategic realignment of the business model by the
management of E-Vita and the main shareholder Ceravis in
the second half of 2022, the investment motive for Fraunhofer no longer applied, whereupon the shareholders of E-Vitamutually agreed to transfer the Fraunhofer shares to Ceravis
and to terminate all contracts in connection with the originallyplanned development of the small-scale plants.
Ceravis, Fraunhofer and E-Vita will continue to cooperate in
the field of electron treatment of seeds in the future.

4

In addition, a Biomedical Laboratory Unit is now available as anindependent cross-sectional group to serve internal and external cell and microbiological as well as chemical analysis orders.

New building E on the RESET campus

New Head of Administration at Fraunhofer FEP

In July 2023, the Fraunhofer FEP put a newly constructed
research research building into operation. This is a centralcomponent of the RESET (RESource-saving Energy Technologies) research campus between Bodenbacher Straße andWinterbergstraße. With this building, a flexible, expandable
and sustainable building ensemble has been created.

After 12 years as Head of Administration at Fraunhofer FEP,
Veit Mittag handed over the baton to Almar Schulz-Coppi in
September 2023.

This building is used for scientific operations in the clean room,
biomedical laboratory area, the radiation protection area andthe electron beam technology center and creates excellent
working conditions for 35 people.
The Fraunhofer FEP is a leader within the Fraunhofer-Gesellschaft in the use of energy management systems and theirpractical application in operations. The technical equipmentof the building was therefore designed with a focus on the
resource-saving provision and use of all types of energy.
Examples include:
Extraction of cooling energy from groundwater
Waste heat from the test facilities is used to heat thebuilding (directly or by means of a heat pump)
Air conditioning of the laboratories / clean room bymeans of adiabatic exhaust air humidification
All lighting is LED
Regulation / control of the technology using a weather
forecast tool
In-house power generation with PV system

From January 1, 2012, Veit Mittag headed the administration
with its associated units such as Human Resources, Information
Technology, Controlling, Purchasing and Export, Technology
and Quality Management as well as Team Assistance.
During his time, he oversaw the integration of the Fraunhofer
COMEDD facility and led the institute through many ups anddowns on the administrative side. Under his leadership, theFraunhofer FEP expanded its space with the new buildings
at Bodenbacher Straße 31 and, together with the institutemanagement and his team, developed forward-looking
measures to cope with difficult economic times, during the
pandemic or the energy crisis.
By March 2024, the administrative management will behanded over to Mr. Almar Schulz-Coppi. Mr. Schulz-Coppi
brings a wealth of experience from the industry and looks
forward to the challenges and tasks ahead with confidence
and enthusiasm.
We would like to thank Mr. Veit Mittag for his achievements
and his work at Fraunhofer FEP. We wish Mr. Schulz-Coppi
every success in his new position.

5

Strategy

Strategy

Participants of the strategy audit

Strategy audit of the Fraunhofer FEP

A systematic examination of the future and the future viability of the institutes takes place regularly at the FraunhoferGesellschaft as part of strategy processes. In this process, theinstitutes examine trends, developments and market shifts inorder to open up new fields of application, further develop the
R&D portfolio and anticipate new markets. In the Fraunhofer
strategy process, the readjustment of the position and profileof the institutes is brought together by interlinking the various
levels of strategy development and integration into the day-today work of the institutes.
Following the change in institute management, Fraunhofer
FEP launched a strategy process for the first time since 2016,
culminating in a strategy audit in April 2023. In addition to theoverall strategy, thematic focal points and various aspects of
the institute's culture were examined. The auditors encouraged
the Fraunhofer FEP to consistently drive forward the further
development of the culture as a common space for action.
Valuable insights were gained from the strategy process andthe audit, which have already led to short-term changes in theorganizational structure and in the particular focus on strategic
research fields.

6

The Fraunhofer FEP will now subject the institute's strategicorientation to an annual internal review as part of a rolling
strategy process.
The institute would like to thank all auditors for their committed participation and their helpful questions and suggestions:
Prof. Dr. Michael Albrecht, Universitätsklinikum Carl Gustav
Carus an der Technischen Universität DresdenProf. Dr. André Anders, Leibniz Institute of Surface
Engineering
Dr. Bernd Fischer, DR. JOHANNES HEIDENHAIN GmbH
Tobias Hackl, Carl Zeiss SMT GmbHDr. Ilona Jipa, Dr. Ing. h.c. F. Porsche AG
Prof. Dr. Christoph Leyens, Fraunhofer Institute for Material
and Beam Technology IWS
Dr. Neil Morrison, Applied Materials WEB Coating GmbH
Dr. Martin Pfeiffer-Jacob, Heliatek GmbHDr. Holger Pröhl, VON ARDENNE GmbHMichael von Papen, Pharmatec GmbH
Prof. Dr. Katrin Salchert,
University of Applied Sciences HTW Dresden
Dr. Michael Zeuner, scia Systems GmbH

7

Contact Persons

Contact Persons

Prof. Dr. Elizabeth von Hauff

Director
Phone +49 351 2586-0

Almar Schulz-Coppi

Ines Schedwill

Annett Arnold

Head of Administration

MarketingCorporate Communications

Phone +49 351 8832-238

Phone +49 351 2586-452

Phone +49 351 2586-400

8Contact Persons

Dr. Burkhard Zimmermann

Prof. Dr. Elizabeth von Hauff

Dr. Nicolas Schiller

Electron Beam
Sources – Processes – Applications

Medical andBiotechnological Applications

Plasma Technology

Phone +49 351 2586-386

Phone +49 351 2586-0

Phone +49 351 2586-131

Dr. Uwe Vogel

Dr. Michiel Top

Microdisplays and Sensors

Systems

Phone +49 351 8823-282

Phone +49 351 2586-355

9Advisory Board
Chairmen of the Board
Prof. Dr. Herwig Buchholz
Chairman of the Board
Dipl.-Ing. Ralf Kretzschmar
Belimed Life Science AG, Chief Executive Officer
Deputy Chairman of the Board

Photo of the 34th Advisory Board Meeting on April 25, 2023.

Members of the Advisory Board
MRin Dr. Annerose Beck
Saxon State Ministry for Science, Culture and Tourism,
Head of Division "Bund-Länder-Forschungseinrichtungen"Dr. Bernd Fischer
DR. JOHANNES HEIDENHAIN GmbH,
Head of "Anlagenbau Teilungen"Prof. Dr.‑Ing. habil. Gerald Gerlach
TU Dresden, Faculty of Electrical and Computer Engineering,
Institute of Solid State Electronics, Director
Dr. Ulrike Helmstedt
Leibniz Institute of Surface Engineering

Marcel König
Meyer Burger AG, Head of Research and Development
Prof. Dr. Michaela Schulz‑Siegmund
Leipzig University, Faculty of Medicine, Institute of Pharmacy,
Head of Pharmaceutical Technology​
Pia von Ardenne
VON ARDENNE GmbH, Member of the Executive Board
Jörg Wittich
ALD Vacuum Technologies GmbH, Managing Director
MR Christoph Zimmer-Conrad
Saxon State Ministry of Economic Affairs, Labor and Transport,
Head of Division "Technologiepolitik, Technologieförderung"

Guests of the Advisory Board
Dr. Patrick Hoyer
Fraunhofer-Gesellschaft, Institute Liaison
Dr. Ulrike Geiger
Federal Ministry of Education and Research
Head of Division "Quantentechnologien; Quantum Computing"This list represents the status as of the board meeting in 2023. For an up-to-date version, please visit our website at:https://s.fhg.de/NX2

10

Organizational Structure

Director

Corporate
Communications

Marketing

Administration

Annett Arnold

Ines Schedwill

Almar Schulz-Coppi

Information
Technology

Quality Management /Team AssistanceProtective Rights /Contracts

Technical /Energy Management

Udo Gernandt

Sabine Nolting

Jörg Kubusch

Gerd Obenaus

Prof. Dr. Elizabeth von Hauff

Electron Beam
Sources – Processes –Applications

Plasma Technology

Medical andBiotechnologicalApplications

Microdisplays
and Sensors

Systems

Dr. Burkhard Zimmermann

Dr. Nicolas Schiller

Prof. Dr. Elizabeth von Hauff

Dr. Uwe Vogel

Dr. Michiel Top

Coating Metal, Energy
Applications, Parts andCleaning

R2R Technologies

Hygienization

Organic
Microelectronic Devices

Mechanic
Development

Materials
Analysis

Dr. Torsten Kopte

Dr. Matthias Fahland

Dr. Gaby Gotzmann

Bernd Richter

Henrik Flaske

Dr. Olaf Zywitzki

Coating Metal
and Energy Applications

R2R thermal evaporationand optical inspection

Biocompatible
Materials

IC andSystem Design

Electronic
Development

Dr. Stefan Saager

Dr. Jacqueline Hauptmann

Dr. Ulla König

Philipp Wartenberg

Rainer Labitzke

Cleaning

R2R High-Rate
Vacuum Coating

Biotechnological
Processes

Microdisplay
Cleanroom

Prototyping

Frank-Holm RögnerSteffen Straach

Dr. Simone Schopf

Mario Metzner

Mirko Kreusel

Coating of Parts

R2R Sputteringand PECVD

Dr. Fred Fietzke

Dr. Cindy Steiner

Sustainable Technologies
for Energy and Electronics

R2R Wet Coating andElectron Beam Curing

Dr. Christian May

Dr. Steffen Günther

Customized Electron Beam
Systems and Technologies

S2S Technologies
and Precision Coating

Prof. Dr. Gösta MattauschDr. Jörg Neidhardt
S2S Sputteringand PECVD
Dr. Kerstin Täschner
Dynamic
Precision Coating
Dr. Daniel GlößStaticPrecision Coating
Dr. Hagen Bartzsch
Sputterepitaxy
Technologies
Dr. Alexander Hinz

Division

Department

Group

The organizational structure shown represents the status as of 09/2023. A current version can be found on our website at:https://s.fhg.de/5a3

11

The Institute in Figures

The Institute in Figures
Financing

Employee development

Fraunhofer FEP was able to bring in 11.6 million € of new
business from industry through direct contracts. Proceeds of
6.2 million € were obtained from public projects funded by thefederal and state governments. A portion of these, amounting
to 1.4 million €, was attracted through joint publicly funded
projects with mid-cap companies. The expenditure of institutional capital ran to 12.8 million €.

196 staff members were employed at the institute during thepast year, of which 9 were trainees, along with 18 student trainees as well as 54 scientific assistants. Of the 72 staff members that were employed as scientists, 11 were additionallyworking on their doctoral degrees. The proportion of females
in the scientific area amounted to 25 percent.

Staff and material costs
Investment costs
Total expenditures from the operating and investment budget
amounted to 30.7 million €. 2.1 million € was invested inequipment, construction and infrastructure during the period.

Personnel expenditures totaled 15.4 million €, representing
53.9 percent of the operating budget (28.6 million €). Material
costs amounted to 13.2 million €.

Employee development
200
196

180
160
140
120
100

11

80

18

40

thereof:Trainees
Scientific assistants
Student trainees
Doctoral candidates

12

197
9
37
25
13

9
Employess, incl. short-term staff

194
8
65
30
8

0
54

182
3
65
30
8

20

178
2
68
33
10

60

2019

2020

2021

2022

The Institute in Figures

Financing14
12.8 m €11.6 m €

12
10
8

2020

2019

2021

9.2 m €

7.1 m €

12.1 m €9.75 m €7.6 m €

11.5 m €5.8 m €

9.3 m €

7.7 m €

0

9.9 m €

2
6.2 m €

7.4 m €

4

10.5 m €6

2022

Commercial proceeds
Public/EU and misc. proceeds
Basic funding

Investment costs
2,0
1.1 m €
1,5

0.1 m €

1.1 m €

2022

14.6 m €0.05 m €1.0 m €

2021

13.95 m €0.26 m €2020

13.73 m €

0m€

2019

13.40 m €0

2.0 m €

0,5
1.0 m €

1.19 m €1,0Normal investment
Strategic investment

Staff and materials costs

15.4 m €

16
14
12
10
8

0

2019

2020

2021

12.6 m €2

11.55 m €13.2 m €8.61 m €4

8.7 m €

62022

Personnel expenditures
Material costs

13Research News

Business Units ����������������������������������������������������������������������������������������������������� 16
Coating of Parts ��������������������������������������������������������������������������������������������������� 18
Coating of Metal Sheets and Strips, Energy Technologies ����������������������������� 20
Flexible Products ������������������������������������������������������������������������������������������������ 24
Medical and Biotechnological Applications ����������������������������������������������������� 26
Microdisplays and Sensors ��������������������������������������������������������������������������������� 28
Precision Coating ������������������������������������������������������������������������������������������������ 30
Systems ����������������������������������������������������������������������������������������������������������������� 32
Materials Analysis ���������������������������������������������������������������������������������������������� 34

14

15

Business Units

Business Units

16

Dr. Fred Fietzke

Dr. Stefan Saager

Coating of Parts

Coating of Metal Sheets and Strips,
Energy Technologies

Phone +49 351 2586-366

Phone +49 351 2586-316

Prof. Dr. Gösta MattauschDr. Matthias Fahland

Development of Customized Electron
Beam Systems and Technologies

Flexible Products

Phone +49 351 2586-202

Phone +49 351 2586-135

Business Units

Dr. Ulla König

Dr. Uwe Vogel

Medical and Biotechnological Applications

Microdisplays and Sensors

Phone +49 351 2586-360

Phone +49 351 2586-160

Dr. Jörg Neidhardt

Precision Coating

Phone +49 351 2586-280

17

Coating of Parts

Coating of Parts
The PVD coating of tools and components with friction and wear reducing layers as well as
for corrosion protection has a long tradition at Fraunhofer FEP. For applications in consumer
goods, energy and medical technology, coatings with specific optical and electrical properties, biocompatibility, scratch and abrasion resistance are also deposited. In this context, theadjustment of specific wetting properties such as complete coverage (superhydrophilicity) or
their complete suppression (superhydrophobicity) is becoming increasingly important andrequires unconventional solutions.
A special application with a unique selling point is the coating of small parts as bulk material, e. g. for the corrosion protection of fasteners or the functionalization of granulates andpowders.
In addition to pulse magnetron sputtering in single, double and multiple source
configurations, high-rate electron beam and thermal evaporation as well as combinationsof these processes are used as coating technologies. Another focus is the development andapplication of plasma sources for substrate pre-treatment as well as physical and chemical
vapor phase deposition.

18

Can it be a little thicker? PVD deposition of molybdenum layers

Can it be a little thicker?
PVD deposition of molybdenum layers
Contact: Dr. Heidrun Klostermann | Phone +49 351 2586-367 |In this project we focus on the high-rate deposition of thick molybdenum layers. The extent
to which this can be used as an alternative
production method for filigree components
made from this thermally and mechanicallyhighly resistant metal is being investigated.

Molybdenum as a material and as a coating
The production of fine sheets or tubes from molybdenum
is technically difficult, given that molybdenum has to beprocessed at high temperatures. Forming takes place at atemperature of 700°C, often followed by annealing steps
at 1000°C or at even higher temperature. Because themetal exhibits brittle behaviour when more than 100 ppm
of oxygen are included, all steps must be carried out underinert gas atmosphere. Altogether, this results in high energy
consumption and high production costs. Due to its properties,
the metal is also not suitable for powder-based additive
manufacturing.
An alternative way to produce filigree components made ofmolybdenum could be to deposit thick layers of the material
on a supporting structure made of easy-to-machine basematerial with subsequent separation of the support and thelayer. In order to achieve components with sufficient stability,
comparatively thick layers need to be deposited.

Mo-tube detached from the glass rod and half-shell with interface layereven thick layers. With these measures, molybdenum layers
up to 50 µm thick have been deposited to date. In order tominimize thermally induced stresses caused by the different
expansion coefficients of the substrate and the coating, a
suitable substrate material must also be selected. So far, glass
has proven to be a good substrate to which molybdenum
adheres very well. So well, in fact, that a thin intermediate
layer must be created, which specifically weakens the layersubstrate interface, to separate the filigree components.
The non-destructive separation of component and support
structure is currently in the focus of the project work.

The Coating Components Group has investigated thedeposition of thick molybdenum layers, facing the challengeof creating a dense, pore-free structure. At the same time, thestresses in the coating, or in the coating-substrate composite,must not become too big in order to avoid stress-induced
coating failure or substrate damage.
In pulse magnetron sputtering, in addition to the working
pressure and the deposition temperature, the choice of pulse
parameters represents an additional way of influencing the
microstructure and the internal stresses of the resulting layers.
If these are changed in the course of the layer build-up, astress profile can be generated that ensures the integrity of19

Coating of Metal Sheets and Strips, Energy Technologies

Coating of Metal Sheets and Strips,
Energy Technologies
The business unit comprises the vacuum coating of metallic sheets and strip for a wide variety of applications in the fields of mechanical engineering, architecture, packaging, transportation, lighting, and the environment. Anti-corrosion coatings based on zinc, tin, andaluminum represent one of our classic fields of activity in the area of steel strip coating. In
the field of power engineering, we deal with various application areas such as photovoltaics,
and the transport and storage of electrical energy. We develop technologies for depositing
thin functional layers suited to high-performance solar cells, low-loss electrical cables, andelectrical-energy storage systems.
Vacuum deposition processes are predominantly used in this business unit, as high areal
throughput and extremely economical processes with high deposition rates are usuallyrequired for the coating of metallic sheets and strip. To improve the coating properties,
special plasma activation processes for evaporation have been developed and adapted tocoating large areas at these high deposition rates. The »MAXI« inline vacuum coating system
for metallic sheets and strip is available as a prototyping and pilot-production system.

20

Innovative technologies for the production, storage and processing of hydrogen

Innovative technologies for the production, storage andprocessing of hydrogen
Contact: Dr. Stefan Saager | Phone +49 351 2586-316 |At Fraunhofer FEP, a pilot plant for coating
bipolar plates for electrolyzers and fuel cells
has been qualified. This technology is costeffective and enables high productivity as
a contribution to the success of the energy
transition.

uncoatedtitanium

Highly productive and cost-effective production technologies
are required to successfully ramp up the hydrogen economy.
To this end, the in-line vacuum coating plant MAXI for plasmaactivated electron beam evaporation using spotless arc-activated deposition (SAD) was qualified for the highly productive
and efficient coating of bipolar plates for electrolyzes and fuelcells.
Bipolar plates have to perform with long-term stability in achemically aggressive environment and require protective coatings such as titanium. At the same time, sufficient electricalconductivity must be ensured, for example by an additional
carbon coating.
Using plasma-activated electron beam physical vapor deposition, for example, ductile, formable coatings can be applied
to metal strip before it is stamped into bipolar plates. Coating
the material prior to the embossing process is considered
as a decisive step for upscaling production in the roll-to-rollprocess. One challenge for formability is to ensure a dense
macrostructure.

coatingcarbon co

ating

without SAD

with SAD

Bipolar plates with coatings (top) and cross-sections of approx. 100 nm
titanium layers after 180° bending test (bottom)

due to the low heat load, sensitive materials such as electricallyconductive polymers can be coated, which represent an innovative alternative for batteries and fuel cells.
The research activities were carried out in close cooperation
with Fraunhofer IWU and VON ARDENNE GmbH.

These layer properties can be realized by the processes such as
SAD developed at Fraunhofer FEP, and with the plant MAXI,
an innovative roll-to-roll as well as sheet-to-sheet line for thehigh-rate coating of corresponding substrates is available
for research and development as well as for pilot production.
Initial results in the coating of 250 mm wide and 50 µm thickmetallic strips with titanium already exhibited homogeneous
layers in the thickness range of 100 nm with a dense structure,
which could be produced at strip speeds of 10 m/min. The
advantage of this process is that the substrate temperature canbe limited to maximum values of less than 250°C. This meansthat the temperature can be kept to a minimum. Furthermore,21

Development of Electron Beam Systems and Technologies

Development of Electron Beam
Systems and Technologies
Electron beams are exceptionally versatile tools for the processing of materials, surface
refinement, environmental technology, medical as well as technical imaging, inline processcontrol and analytics. They combine a wealth of physical, chemical and biological effects withhigh energetic efficiency, excellent precision and outstanding technological flexibility.
The intense, locally and temporally precisely controlled heating of solids by focused electron
beams can be used to advantage for welding, micro-structuring and evaporation (at thehighest rates technically achievable) as well as for additive manufacturing and machining ofcomplex components. Chemical effects bring about energy-efficient and highly productive
curing of paints, modification of plastics, plasma-chemical syntheses, and pollutant removal
in wastewaters and exhaust gases. Antimicrobial and fungicidal actions of electrons represent
biological use effects. In this way, medical products such as tools and packaging can be safely
sterilized. The chemical-free disinfection of seeds is another application example with highecological relevance. Furthermore, electron treatment facilitates the biocompatible
functionalization of implants and the stimulation of biotechnological processes.
In this multifaceted business field, we develop electron beam sources as well as their control
and supply systems optimized for different customer requirements and tasks, but also qualify
new electron beam processes for innovative applications in research and production.
The aim is to provide our customers with application-ready integrated packages –advanced technologies and systems from a single source.

22

Project "ARA": Degradation of pharmaceutical pollutions through wastewater treatment with low-energy electrons

Project "ARA": Degradation of pharmaceutical pollutions
through wastewater treatment with low-energy electrons
Contact: Dr. Tobias Teichmann | Phone +49 351 2586-206 |In the joint project "ARA", Fraunhofer FEP
and CREAVAC GmbH demonstrated thedegradation of pharmaceutical pollutions
through combined wastewater treatment
with low-energy electrons and ozone for
improved biodegradability.

Due to their increased use in medicine and inadequate
degradation in conventional wastewater treatment plants,
ever higher concentrations of hormones, antibiotics and X-ray
contrast agents can be detected in the environment and thus
also find their way into the food chain and drinking water.

Integration of the ARA module for the combined treatment of liquids
with low-energy electrons and ozone (top right) in the REAMODE
laboratory plant (left). Simulation of the biodegradability of the

The harmful effects of these micropollutants on the humanorganism are the subject of current research. The mechanismsof action are not yet fully understood, but there are serious
indications that point, for example, to a reduction in fertility,
an increase in certain cancers and the emergence of antibiotic
resistance.
In the "ARA" research project funded by the Saxon State
Ministry of Economic Affairs, Labor and Transport, the joint
partners Fraunhofer FEP and CREAVAC GmbH therefore setthemselves the goal of developing a new type of treatment
process that significantly improves the degradation of
persistent micropollutants.
For this purpose, the laboratory prototype of a hybrid
treatment module was developed, tested and optimized,
which combines the irradiation of a thin liquid stream by
low-energy electrons with ozone treatment.
The hybrid treatment module was designed to be so compact,that (after appropriate upscaling) it will enable the local
pre-treatment of wastewater from so-called point emitters(such as hospitals and pharmaceutical companies) in an
economical and energy-efficient manner in the future.
This aims at an effective, broadband transformation or
splitting of the micropollutants in order to make them moredegradable for downstream biological treatment stages of
conventional wastewater treatment plants.

transformation products in a laboratory wastewater treatment unit(bottom right).

The module was integrated into the FEP test plant REAMODE.
In this laboratory setup, partial building blocks of the newtreatment concept were first examined separately and then
optimized as a system. This included the functionality of allcomponents and their control, the generation of ozone andits injection into the liquid to be treated, the shaping of thefluid flow as well as the homogenization and dosimetricquantification of the energy input into the liquid irradiatedwith low-energy electrons.
The superior treatment success compared to known methods(such as activated carbon filtration or UV irradiation) was
demonstrated using selected test substances. These were treatedin synthetic test wastewater and then subjected to analysis by
High-performance liquid chromatography and a simulation of thebiodegradability of the transformation products in a laboratory
wastewater purification unit with activated sludge from a municipal
wastewater facility. Following the successful completion of the
project, an upscaling of the concept and expansion of its field of
application is now envisaged, e.g., to the purification of wastewaterfrom the chemical industry or agriculture, where the simultaneous
inactivation of pathogens is of additional value and expected.
Funded by the Saxon State Ministry
for Economics, Labour and Transport.
Funding reference: 100534392 / 100534386

23

Flexible Products

Flexible Products
Flexible materials can be found in many applications. The decisive reasons for their practical use
are often the freedom in shaping, the low thickness, associated with the low weight, or a highmechanical robustness of the materials.
The core activity of the business area is the modification of the surface properties of flexible
materials. Fraunhofer FEP has a wide range of processes at its disposal for this purpose. Roll-to-rollcoating has a prominent position in this regard. This is a highly efficient manufacturing principlethat is essential for the low-cost production of many products. Examples of this can be found invarious industries. Representative examples are food packaging and flexible organic electronics.
Depending on the application and basic technology, the coatings are applied either in vacuum
or under atmospheric pressure. They aim to adapt precisely the surface properties to the user
scenario. The conductivity of the surface, the optical properties, the diffusion properties forgases and various other properties can be subject of modification. Often, the right combinationof several features is also important.
Fraunhofer FEP is uniquely positioned to accompany development projects with industrial
customers. This may include the conception, feasibility studies or pilot production and processtransfer to the project partner. For this purpose, a highly motivated team of employees isavailable, as well as extensive equipment for coating and characterization of the materials.

24Windows with switchable properties

Windows with switchable properties

Contakt: Dr. Matthias Fahland | Phone +49 351 2586-135 |Over a period of four years, Fraunhofer FEP
has coordinated the Horizon 2020 project
Switch2Save (Lightweight switchable smart
solutions for energy saving large windows
and glass facades).

In this project, ten partners from seven European countries
came together to develop new approaches for energy-efficient
office buildings. The solutions aimed to equip the windows ofexisting buildings with surfaces that can adapt their properties
to external environmental influences. The transparency can bechanged so that as much of the incoming sunlight as possible
reaches the interior in order to support the heating in cold
weather. In the opposite case, on warm summer days, the lightis largely prevented from passing through the window, which
in turn helps to reduce the load on the air conditioning system.
The researchers always kept in mind that the coating solutions
can be applied to lightweight and flexible substrates. Thismeans that the coated films can later be easily integrated into
existing windows.

Wirkung von elektrochromen Fenstern am Beispiel eines Zimmers im
Krankenhaus Nikaia Agios Panteleimon, Griechenland

as a continuous roll-to-roll process. Thanks to sophisticatedsensor technology, it was possible to draw conclusions about
the subsequent properties of the coatings during the process.
Even though thermochromism did not make it into the final
demonstrators, important insights were gained into application
scenarios and remaining technical challenges.

This approach was flanked by theoretical considerations.
Building simulations for various climatic conditions present
in Europe revealed that the new solutions are particularly
important for cooling interior spaces. This means that they are
primarily important in southern countries, even outside Europe.
However, highly insulated buildings with large window areas
also have a high cooling requirement in Central and Northern
Europe, which is why switchable coatings can also make acontribution to energy efficiency there. This is becoming
increasingly important, particularly against the backdrop of
global warming.
The Fraunhofer FEP was primarily responsible for thethermochromic coatings. This special variant of switchable
windows does not require any additional controls. It reacts
solely to the ambient temperature. Here the Fraunhofer FEP
has made great technological progress. For the first time, thissophisticated technology has been successfully implemented

This project has received funding from theEuropean Union’s Horizon 2020 Research andInnovation Programme.
Funding reference: 862100

25

Medical and Biotechnological Applications

Medical and BiotechnologicalApplications
Sustainable developments serve the long-term preservation of global resources and arestrengthened by interdisciplinary cooperation in science, so that innovative strategies for
current challenges such as climate change, resource scarcity or water pollution can be realized.
We work on the elaboration of sustainable technological solutions by needs-based processdevelopment along the value chain of a product. As a result, we open up socially relevant
fields of application in the MedTech, HealthTech and BioTech sectors. The need for bio-based
substitution processes and materials or sustainable infection protection measures is the basisof our research activities.
Pandemic situations have highlighted the importance of hygiene technologies. We are researching sustainable technologies with an efficient disinfection effect using ionizing radiation or
antimicrobial coating systems. By means of adaptive surface engineering, we produce biobased materials with selective characteristics profiles using low-energy accelerated electrons.
The system-specific further development of low-energy electron beam technology for aqueous
systems is progressing continuously. Of particular note are the latest developments in liquidand particle dosimetry for the associated process monitoring. The new biomedical laboratorycomplex offers excellent internal and external R&D services and operates in accordance with
QM guidelines.

26

Improved infection protection by bio-based surface functionalization of textiles using low-energy electron beam technology

Improved infection protection by bio-based surfacefunctionalization of textiles using low-energy electron
beam technology
Contact: Dr. Ulla König | Phone +49 351 2586-360 |Electron beam technology can be used tocreate selective surface properties. In the
HuminTex project, sustainable respiratory
masks consisting of biodegradable nonwovens
are functionalized with antiviral, naturally
occurring humic substances.

Pandemic situations such as the global outbreak of Covid-19
cause complex problems for preventive health care. Technical,
organizational and personal protective measures must be
taken to minimize the risk of infection. Respiratory masks
are an effective infection protection. On the one hand, careless handling of used masks carries an unintentional risk ofinfection. On the other hand, improper disposal increase theglobal plastic waste problem. This correlation demonstrates
the urgent need for sustainable infection control concepts.
One approach to prevent infection is the immediate virus
inactivation when viruses come in contact with the surfaceof the mask material. The aim of the HuminTex project istherefore to functionalize textile surfaces for the productionof particle-filtering respiratory masks with antivirally effective
and naturally occurring humic substances. Furthermore, theecological compatibility of the masks is to be optimized by
reducing the consumption of resources and improving environmental performance. For this reason, biodegradable textiles
are used for mask production.

Textile materials before and after the immobilization ofantiviral humic substances by means of Ebeam-Grafting

surface modification. Subsequently, the antiviral efficacy of thesurface-modified nonwovens can be evaluated complementaryin the biomedical FEP laboratory complex.
In addition, the technological prerequisites for the generaldevelopment and industrial production of antiviral protective
textiles for the health and medical sector are to be created.

In order to achieve a high durability and reliability of the antiviral functional coating, the humic substances are to be covalently bound to the textile surface. Therefore, the HuminTex
project is investigating the suitability of low-energy, non-thermal electron beam technology (Ebeam) for the first time at the
Fraunhofer FEP compared to a wet-chemical technology.
The Ebeam-based, two-stage coating process, Ebeam-Grafting, enables materials to be equipped with surface-selective
characteristics, whereby all process parameters can be individually monitored and modularly adapted. Ebeam-Grafting
can be used for material-gentle and environmental-friendly

Funded by the Federal Ministry for
Economic Affairs and Climate Protection.
Funding reference: 16PS104004

27

Microdisplays and Sensors

Microdisplays and Sensors
The business unit „Microdisplays and Sensors“ is offering R&D addressing component/device
design and manufacturing technologies based on organic and inorganic semiconductors, e. g.,organic light emitting diodes (OLED), photodetectors, inorganic µLED, that become integrated with silicon CMOS and MEMS backplanes. Therefore we focus on the supply chain from
CMOS-IC design (backplane), wafer supply with commercial Silicon Foundries, up to frontplane
definition and processing (e. g., emitters, absorbers), providing prototypes and pilot-fabrication. So far most important technology is OLED-on-Silicon, providing the basis for OLED “microdisplays”. For “sensor” applications it is often combined with additional sensing layers (e. g.,material- and ion-sensitive dyes), to enable detection of e. g., pH, oxygen or carbon dioxide
concentrations in gases or liquids.
Though we focus on components and their manufacturing technologies, knowledge on system
integration (e. g., smart glasses) and applications (e. g., motorcycle helmet head-up display)remains vital for provident development of innovative features (e. g., luminance, color space,lifetime, resolution, response time, spectral sensitivity). This experience enables tight collaboration with application, system integration and supply chain partners.

28

World record – OLED microdisplay with 10,000 dpi in 28 nm technology

World record – OLED microdisplay with 10,000 dpi
in 28 nm technology
Contact: Dr. Uwe Vogel | Phone +49 351 8823-282 |Within SMWA-funded project BACKPLANE
we have researched high-resolution OLED
microdisplays at 0.18“ screen diagonale andshown a prototype at pixel size of 2.5 µm andpixel density of 10,000 dpi – world-record!

The continuous microdisplay improvements in recent years
have been driven by various requirements such as pixel density,
energy efficiency, color, brightness, or frame rate. We havedeveloped a wide range of microdisplays in full-color or monochrome, from ultra-low power versions to high-resolution
variants for the use in augmented- (AR) and virtual-reality (VR)applications and other wearables.
The majority of microdisplays on the market are currently
developed and manufactured on 200 mm wafers in 250 nm to
90 nm CMOS process nodes. The manufacturing of microdisplays on 300 mm wafers has been rare so far.
However, market requirements for image quality, pixel density
and integrated functionality are continuously increasing. Therefore, Fraunhofer researchers have been examining the scaling
effects in smaller CMOS technologies and investigating the useof 300 mm backplane processes as part of the "Backplane"
project funded by the SMWA. In this context, the researchers
have now succeeded in making the next major leap forward indevelopment: For the first time, they realized an OLED microdisplay with tiny 2.5 µm pixels (corresponding to 10,000 dpi) at
a display diagonal of 0.18 inch. This demonstrated the feasibility of developing displays based on 28 nm small-node technology on 300 mm wafers and realized the world's smallest pixels
of an OLED microdisplay.
The newly developed OLED microdisplays have a resolutionof 1440 × 1080 pixels in monochrome or 720 × 540 pixels infull color. On the one hand, the flexible display architecture
allows the refresh rate to be reduced to 0 Hz in extreme cases
when the display content remains unchanged, thus avoiding all
unnecessary data transfer - an enormous advantage for power

OLED microdisplay with a resolution of 1440 × 1080 pixels andthe world's smallest pixels of 2.5 micrometersconsumption. Conventional displays require a minimum refresh
rate here, regardless of content. On the other hand, the new
microdisplay also allows frame rates of up to 480 Hz in extreme
cases – internally even up to several kHz.
Depending on the design, the new displays can be used inlifestyle products such as sports glasses or as head-mounted
displays in motorcycle helmets, in industrial scenarios for wearables in logistics or for remote maintenance solutions. The now
even smaller dimensions pave the way for even more ergonomic
systems.

Funded by the Saxon State Ministry
for Economics, Labour and Transport.
Funding reference: 100392259

29Precision Coating

Precision Coating
Precision surface functionalization is essential for a wide range of applications. This requires very good homogeneity of layer thicknesses (less than ± 0.5%) over extended substratewidth and precise adjustment of mechanical, optical, electronic, and other layer properties.
Core competencies in this area include adapted magnetron sputter sources, adapted in-line
system concepts, process understanding for wafer and glass coating, dynamic apertures,
energy-efficient flash lamp annealing and novel process technologies for ultra-thin glass.
These competencies enable developments from »feasibility demonstration« to prototypes
and »scalability demonstration«.
Examples of applications include:
Large-area optical layer systems, also laterally or vertically graded
Adapted transparent conductive contact layers including in-line flash lamp annealing
Piezoelectric and ferroelectric layers for microsystems, high-frequency filters, ultrasonicmicroscopy, non-volatile storage, and micro-energy harvesting
TiO2 layers with photocatalytic, antimicrobial, and superhydrophilic properties
Epitaxial AlN and GaN layers for power and RF electronics as well as LEDs

30

Large-scale vacuum functionalization of flexible ultra-thin glass on a pilot scale

Large-scale vacuum functionalization of flexible ultra-thin glasson a pilot scale
Contact: Dr. Jörg Neidhardt | Phone +49 351 2586-280 |The Fraunhofer FEP addresses application
development for ultra-thin glass with an in-line
process chain for vacuum functionalization ona pilot scale. This consists of substrate cleaning, handling, inspection and electro-static
chucking in an in-line vacuum process.

An in-line process chain for surface engineering of flexible
ultra-thin glass was set as part of the BMBF-funded Glass4Flex
project (Funding reference 13N14615). It enables the processing
and vertical in-line vacuum coating of this innovative substratematerial on a pilot scale up to a size of 1200 × 600 mm2 andconsists of the following components:
Ultrasonic wet cleaning (SCHMID GmbH): mildly alkaline
ultrasonic true in-line process with DI water rinsing anddrying station with output to a class 6 cleanroom.
Transfer station (Adenso GmbH): air cushion transportof the glass from the cleaning output to the e-chuck for
precise positioning and fixation of the glass in preparation
for the electric chucking process.
Electrostatic chuck system (ProTech GmbH): fixing thesubstrate for transport in a vertical in-line vacuum chamber without any front or edge surface contact. Equippedwith in-line control of the chucking voltage for adaption tovarious plasma processing steps.
Glass inspection using white light interferometry (GBSGmbH): incl. large-area rapid scanning of the full glass
surfaces to detect particles or defects followed by precise
imaging of the areas of interest.
The processing of flexible ultra-thin glass using this pilot line
enables precise, reliable, reproducible and homogeneous
coating in the ILA 900 vertical in-line vacuum coating system
under production relevant conditions. Optical layer stacks aswell as transparent conductive and / or metallic films can beapplied for a wide range of applications, e. g. in optics, sensors,
electronics or display technology. Another unique feature is the
directly in-line integrated station for flash lamp annealing forcost-efficient and resource-saving annealing of surfaces andE-chuck transfer of the three-part electrostatic chuck system for
600 × 1200 mm2 substrates onto the carrier of the vertical in-line
coating system

coatings. The thin glass process chain, thus, offers a pioneering
technology platform for the development, demonstration andpiloting of a wide range of process and application options forthin layers and modified surfaces on ultra-thin flexible glass
down to a minimum thickness of 30 µm.
S2S Prozesslinie für ultradünnes Glas
Neue Prozesstechnologien für Ultradünnglas in optischen und elektronischen AnwendungenUltradünnes Glas
< 100 µm
Max. 600 x 1200 mm²

Ultraschall-Nassreinigungsstrecke

Blitzlampentemperung

Inspektion
Carriersystem

Heizer(max. 500 °C)

Reinraum

Sputterstationen

Glass4Flex

13N14615
Pilotline for coating of ultra-thin glass Nr:up
to 600 × 1200 mm2
2019 – 2023
Seite 115.09.2022© Fraunhofer FEP

Funded by the Federal Ministryof Education and Research.
Funding reference: 13N14615

31

Systems

Systems
Technology and hardware development go hand in hand at Fraunhofer FEP. Electron beamand plasma components required within the institute are often not available in the market
and are specifically modified and further developed to meet new application requirements.
The development and implementation of the hardware components takes place within the"Systems" department. Equipped with mechanical and electronic development as well as theassociated pilot production, we are able to map an idea from conception to development toimplementation.
The internal development of our hardware allows for close collaboration with processengineers throughout the entire development process. This enables iterative processes
and allows us to quickly achieve our goal: process and hardware transfer to the industry.
Supporting activities in process development enable continuous improvement of the key
components of Fraunhofer FEP.
Plasma and electron beam sources for a wide range of applications are part of our technological key component development portfolio. Our key components are already widely used
in industry together with the technologies developed at Fraunhofer FEP.

32

Electrons as a sustainable alternative to chemical seed treatment

Electrons as a sustainable alternative to chemical seedtreatment
Contact: Dr. Michiel Top | Phone +49 351 2586-355 |The treatment of seeds using accelerated
electrons is a sustainable alternative tochemical dressing. The ISABEL mobile plant
platform was successfully developed further
in 2023.

For over 25 years, the gentle treatment of seeds using
accelerated electrons as a sustainable alternative to chemical
dressing has been an important field of work at Fraunhofer
FEP. The process developed at our institute uses low-energy
electrons to kill pathogens in the seed coat permanently and without the development of resistant germs, while
the embryo remains unaffected. The process works purely
physically, so there is no toxic dust, contamination of soil andgroundwater or chemical residues, meaning that seeds thathave not been spread can be fed to livestock without hesitation, for example.
Fraunhofer FEP has developed the container-based ISABEL
system platform to easily integrate the technology into
existing processing steps. Such a system can be used stationary on site at wholesalers or mobile to serve various
locations of smaller seed companies. Since the delivery of
two ISABEL plants to seed producers, most recently in 2018
to BayWa AG's seed center in Hainichen, Fraunhofer FEP has
gained valuable experience on process and system performance in close cooperation with the end users. Based on this,we successfully further developed our ISABEL mobile plant
platform in 2022/2023 and were able to transfer the technology to another customer with a new pilot plant.

The ISABEL mobile system platform can be easily transported to the end customer as a container

between the "Special EB Systems and Technologies" department and the "Systems" division enabled targeted advancements not only of the electron sources, but also of the overallsystem and technology.
In 2024, the Fraunhofer FEP will continue to work actively
with various partners on the development of the physical andbiological treatment of seeds. Both in industrial contracts andin publicly funded projects, we are making our contribution tosustainability in agriculture.

The electron treatment of seeds is an outstanding example ofthe process-oriented development of hardware at the Fraunhofer FEP. The optimization of electron sources, for example,
requires a deep understanding of mechanical, electrical andphysical properties and effects. At the same time, systemengineering expertise and process experience from specificapplications are necessary in order to transfer the technology
into a system suitable for production. The close cooperation

33

Materials Analysis

Materials Analysis
The Materials Analysis department has a variety of methods available for characterizing
the structure and properties of thin films. The analytical methods and the extensive
experience of our staff are applied in research projects and are also offered to ourcustomers as services.
A high-resolution field-emission scanning electron microscope (FE-SEM) and an X-ray
diffractometer (XRD) are available for characterizing of structure and microstructure ofthin films. Polished cross-sections of multilayer systems can be prepared using an ion beam
preparation technique, facilitating high-resolution FE-SEM examination in both material
contrast mode and crystal-orientation contrast mode. Chemical composition is analyzed
by energy-dispersive spectrometry of X-rays (EDS) and by glow-discharge optical emission
spectrometry (GD-OES).
Many other measurement methods are available at the Fraunhofer FEP for determining theoptical, mechanical, and electrical properties of thin layers. These include UV, VIS, and NIR
spectrometry, spectroscopic ellipsometry, and nanoindentation. We have further extensive
experience in the field of permeation barrier measurements for water vapor and oxygen
through coated polymer films.

34

New possibilities for determination of water vapor permeability / transmission rate of coated polymer films

New possibilities for determination of water vapor
permeability / transmission rate of coated polymer films
Contact: Dr. Olaf Zywitzki | Phone +49 351 2586-180 |The accurate determination of water vapor
permeability is a prerequisite for the development of tailor-made encapsulation films for awide range of requirements. Fraunhofer FEP
has extensive measuring methods and thenecessary experience for this.

Barrier layers on polymer films are required to reduce the water
vapor transmission rate (WVTR) for food packaging, electronic
components, and flexible solar cells to achieve sufficientdurability or lifetime. Depending on the application, therequirements for WVTR values vary greatly and range from lessthan 5 × 10 -4 g/m2d for flexible solar cells to 1 g/m2d for foodpackaging.
When determining the water vapor transmission rate according
to ISO 15106-3, the amount of permeated water vapor isregistered with an electrolysis cell. The measured electrolysis
current is directly proportional to the WVTR, so that adetermination is possible without additional calibration. By
investing in a new measuring device (Aquatran 3; Mocon), we
can now also detect very low WVTR values of 5 × 10 -5 g/m2d.
The upper measuring limit of the available measuring devices(WDDG, Brugger) is a WVTR value of 10 g/m2d, so that a very
wide WVTR measuring range for a broad variety of applications
is completely covered.

WVTR permeation cell with a coated polymer film

increasing temperature, which increases the effectivity of themeasurements.
Thanks to our extensive measurement technology andexperience, we can effectively and precisely measure the water
vapor permeability of coated polymer films for a wide range ofrequirements. Determining the WVTR values as a function oftemperature additionally enables a better understanding of theoccurring permeation mechanisms.

Supplementary to the electrolysis method, we also haveanother measurement device (HiBarSens 2.0 HT, Sempa) inwhich the WVTR is determined by laser diode spectroscopy
of a water vapor absorption band. Depending on themeasurement mode used, very low detection limits of
1 × 10 -5 g/m2d (diffusion mode) or 1 × 10 -4 g/m2d (carrier gasmode) can also be achieved with this method. In addition, thetemperature of the permeation cell can be varied in the range
from 10°C to 85°C, allowing the investigation of influence oftemperature on permeation. Determining the WVTR values
at different temperatures allows additionally the evaluation of
the activation energy for permeation. The measurement timerequired for permeation to reach equilibrium can be reduced by35

Appendix

The Fraunhofer-Gesellschaft ���������������������������������������������������������������������������� 38
Fraunhofer Group for Light & Surfaces ������������������������������������������������������������ 40
Fraunhofer-Business Area Cleaning ������������������������������������������������������������������� 41
Memberships ������������������������������������������������������������������������������������������������������ 42
Theses ������������������������������������������������������������������������������������������������������������������ 43
Publications �������������������������������������������������������������������������������������������������������� 44
Protective Rights ������������������������������������������������������������������������������������������������� 47

36

37

The Fraunhofer-Gesellschaft

The Fraunhofer-Gesellschaft
The Fraunhofer-Gesellschaft, based in Germany, is the world’s
leading applied research organization. Prioritizing key futurerelevant technologies and commercializing its findings inbusiness and industry, it plays a major role in the innovation
process. A trailblazer and trendsetter in innovative developments and research excellence, the Fraunhofer-Gesellschaft
supports science and industry with inspiring ideas and sustainable scientific and technological solutions and is helping
shape our society and our future.
At the Fraunhofer-Gesellschaft, interdisciplinary research teams
work with partners from industry and government to turn
pioneering ideas into innovative technologies, coordinate andimplement system-relevant research projects and strengthen
the German and European economies with a commitment tovalue creation that is based on ethical values. International collaboration with outstanding research partners and companies
from around the world brings the Fraunhofer-Gesellschaft into
direct contact with the most prominent scientific communities
and most influential economic regions.
Founded in 1949, the Fraunhofer-Gesellschaft currently operates 76 institutes and research units throughout Germany.
Currently around 30,800 employees, predominantly scientists
and engineers, work with an annual research budget of about
3.0 billion euros, 2.6 billion euros of which is designated ascontract research. Around two thirds of Fraunhofer contract
research revenue is generated from industry contracts andpublicly funded research projects. The German federal andstate governments contribute around another third as basefunding, enabling the Fraunhofer institutes to develop solutions now to problems that will drastically impact industry andsociety in the near future.
The impact of applied research goes far beyond the direct
benefits to the client. Fraunhofer institutes strengthen companies’ performance and efficiency and promote the acceptanceof new technologies within society while also training thefuture generation of scientists and engineers that the economy
so urgently requires.
As a scientific organization, the key to our success is highly
motivated employees engaged in cutting-edge research.
Fraunhofer therefore offers its researchers the opportunity
to undertake independent, creative and, at the same time,targeted work. We help our employees develop professional
and personal skills that will enable them to take up positions ofresponsibility within Fraunhofer itself or at universities, within38

industry and in society at large. Students involved in projects
at Fraunhofer institutes have excellent career prospects on
account of the practical vocational training they enjoy and theopportunity to interact with contract partners at an early stage
in their career.
The Fraunhofer-Gesellschaft is a recognized non-profit organization named after Joseph von Fraunhofer (1787–1826), an
illustrious researcher, inventor and entrepreneur hailing from
Munich.

Customers and contractual partners are:Industry
Service sector
Public administration

Key figures at a glance
76 institutes and research units
30,800 staff
3.0 billion euros annual research budget totaling
About two-thirds of the Fraunhofer-Gesellschaft’s contract
research revenue is derived from contracts with industry
and from publicly financed research projects
International cooperation through affiliated research centers
and worldwide representative offices

www.fraunhofer.deThe Fraunhofer-Gesellschaft»

The Fraunhofer-Gesellschaft is the leadingorganization for applied research. Since 1949, it has
been our mission to strengthen the competitivenessof the German and European economies and theirregional research and innovation.
Concentrating on future-relevant key technologies
and transferring our ideas and research findings toindustry, business and society, we are helping shape
German and European innovation.«

39

Fraunhofer Group for Light & Surfaces

Fraunhofer Group for Light & Surfaces
The Fraunhofer Group for Light & Surfaces brings together
the Fraunhofer-Gesellschaft’s scientific and technical expertise in the areas of laser, optical, measurement and surface
technology.
Members are the Fraunhofer institutes for
Organic Electronics, Electron Beam andPlasma Technology FEP
www.fep.fraunhofer.deLaser Technology ILT
www.ilt.fraunhofer.de
Applied Optics and Precision Engineering IOF
www.iof.fraunhofer.de
Physical Measurement Techniques IPM
www.ipm.fraunhofer.de
Werkstoff- und Strahltechnik IWS
www.iws.fraunhofer.de
Surface Engineering and Thin Films IST
www.ist.fraunhofer.de (associated)
Telecommunications, Heinrich Hertz Institute HHI
www.hhi.fraunhofer.de (associated)
Optronics, System Technologies andImage Exploitation IOSB
www.iosb.fraunhofer.de (associated)
With a total of approximately 1900 employees, the Fraunhofer Institutes in the Group work together to solve complex,
application-oriented customer inquiries at the cutting edge ofscience and technology.
But the Fraunhofer Institutes are not only partners in innovation. They also work to produce new generations of scientificand technical experts. In cooperation with the local universities, the young scientists at the Fraunhofer Institutes bring
together academic research and industry.
Chair of the Group is Prof. Karsten Buse (Fraunhofer IPM) andDr. Heinrich Stülpnagel has been head of central office.

40

Central OfficeFraunhofer Institute for Physical Measurement Techniques IPM
Georges-Köhler-Allee 301
79110 Freiburg
Phone +49 761 8857-269
www.light-and-surfaces.fraunhofer.deFraunhofer-Business Area Cleaning

Fraunhofer-Business Area Cleaning
The Fraunhofer-Business Area Cleaning combines the expertiseof 9 different Fraunhofer Institutes in the field of industrial
surface cleaning and thus offers a very broad spectrum oftechnological competence and industry relevance. With its
own website, regular newsletters and social media activities,
and as a specialist partner of the leading international trade
fair parts2clean, it achieves a wide international reach.
The Fraunhofer-Business Area Cleaning makes a decisive
contribution to the development and industrial use of cleaning
technologies. Small and medium-sized companies in particular, but also large companies, receive competent support.
They benefit from the comprehensive expertise in the field ofanalytical and experimental development of cleaning methods
and processes as well as analytical methods and procedures forprocess monitoring and quality assurance.
Various further training formats, from special seminars at
individual member institutes to IHK (chamber of industry andcommerce)-certified advanced qualifications, are an essential,
complementary pillar of knowledge transfer.
The office is currently located at the Fraunhofer FEP.
Frank-Holm Rögner is the elected spokesperson.

Central OfficeFraunhofer Institute for Organic Electronics,
Electron Beam and Plasma Technology FEP
Winterbergstraße 28
01277 Dresden, Germany
Phone +49 351 2586-242
www.cleaning.fraunhofer.de

The Fraunhofer-Business Area Cleaning looked back on a successful 20 years in 2023.
Where there is planing, there are chips – true to this proverb,
almost every manufacturing or processing company is awareof the relevance of cleaning processes and the influence ofcontamination on product quality. In the 2000s, the questionof expertise in the field of surface cleaning also arose within
the Fraunhofer-Gesellschaft. This was the reason and motivation for the birth of the then Fraunhofer Cleaning Technology
Alliance on December 5, 2002. Today active as a Fraunhofer
Business Area, this network unites the industrial cleaning activities of the Fraunhofer Institutes FEP, IGB, IGCV, IPA, IPK, IPM,
IST, IVV-DD and IWS.

Area Cleaning in cooperation with the German Industrial Parts
Cleaning Association (FiT).
Innovative trends and developments from the member
institutes often make it possible to overcome new industrial
challenges. Traditionally, the Fraunhofer FEP plasma cleaning
processes as well as electron beam processes for sterilization –the high-end of cleaning processes – play a key role for the
Fraunhofer FEP.

A key activity of the alliance in its first year was the joint planning and successful launch of parts2clean, which was newly
established in 2003. In particular, the accompanying specialist
forum at this leading international trade fair has been a visitor
magnet from the very beginning and is currently the largest
international specialist event in this field. The specialist forum iscurrently organized and moderated by the Fraunhofer-Business
41

Memberships

Memberships
AK Glasig-kristalline Multifunktionswerkstoffe
www.ak-gkm.bam.de
AMA Fachverband für Sensorik e. V.
www.ama-sensorik.de
biosaxony e. V.
www.biosaxony.com​
Bundesverband Der Mittelstand BVMW e. V.
www.bvmw.de
Deutsche Gesellschaft für angewandte Optik
www.dgao.de
Deutsche Glastechnische Gesellschaft
www.hvg-dgg.de/home/dgg.html
Deutscher Industrie-Reinigungs-Verband
www.dirv.org
Deutsches Flachdisplay Forum e. V.
www.displayforum.de
Dresden-concept e. V.
www.dresden-concept.de
Energy Saxony e. V.
www.energy-saxony.net
EPIC European Photonics Industry Consortium
www.epic-assoc.com
European Sustainable Nanotechnology solutions Associationwww.esna-assoc.eu
Europäische Forschungsgesellschaft Dünne Schichten e. V.
www.efds.org
Fachverband für Mikrotechnik IVAM
www.ivam.de
Forschungsallianz Kulturerbe
www.forschungsallianz-kulturerbe.de
Forum MedTech Pharma
www.medtech-pharma.de
Fraunhofer Geschäftsbereich Reinigung
www.reinigung.fraunhofer.deFraunhofer-Allianz autoMOBILproduktion
www.automobil.fraunhofer.deFraunhofer-Allianz Batterienwww.batterien.fraunhofer.deFraunhofer-Verbund Light & Surfaceswww.light-and-surfaces.fraunhofer.deFraunhofer-Verbund Mikroelektronik
www.mikroelektronik.fraunhofer.deFraunhofer-Wasserstoff-Netzwerk
www.wasserstoff.fraunhofer.de
FutureSax Sächsisches Transfernetzwerk
www.futuresax.de/transfer/saechsisches-transfernetzwerk
HZwo e. V.
www.hzwo.eu

42

Informationsdienst Wissenschaft
www.idw-online.deInnovationsnetzwerk CleanHand
www.cleanhand.deInnovationsnetzwerk DekubiTel
www.dekubiPhonede
International Council for Coatings on Glass ICCG e. V.
www.iccg.eu
International Electrotechnical Commission IEC, TC 110, WG 12
www.iec.ch
International Irradiation Associationwww.iiaglobal.com
KIC CCI – ICE-Konsortium Innovation by Creative Economy
Kompetenznetz Industrielle Plasma-Oberflächentechnik e. V.
www.inplas.de
Kompetenznetz Plasma Germany
www.plasma-germany.org
Kompetenzzentrum Luft- und Raumfahrttechnik Sa/Thü e. V. LRT
www.lrt-sachsen-thueringen.deMicroLED Industry Associationwww.microledassociation.com
MIPI Alliancewww.mipi.org
Netzwerk »Dresden – Stadt der Wissenschaften«
www.dresden.de
Organic and Printed Electronics Associationwww.oe-a.org
R2RNetwww.r2r-net.eu
SenSa Sensorik Sachsen
www.sensorik-sachsen.de
Silicon Saxony e. V.
www.silicon-saxony.de
Smart3 materials – solutions – growthwww.smarthoch3.deSociety for Information Display
www.sid.org
Space2Healthwww.space2health.eu
SPIE International Society for Optics and Photonics
www.spie.org
VDE Verband der Elektrotechnik – Bezirksverein Dresden e. V.
www.vde-dresden.de
VDE Verband der Elektrotechnik – DKE-Liste »Fachkreise«www.vde.com
VDMA Organic Electronics Association (OE-A)
www.oe-a.org
Verband Deutsches Reisemanagement e. V. (VDR)
www.vdr-service.de/der-verband/der-vdr

Theses

Theses
Diploma Theses
Author

Title

University

H. Kunert

Untersuchungen zum Einfluss einer Plasmavorbehandlung

TU Dresden

von Kunststofffolien mittels Linearer Ionen Quelle (LIS) im
Rolle-zu-Rolle-Prozess
P. Engelmann

Designarchitektur und Entwurfstechniken zur Realisierung eines

TU Dresden

SOCs mit einer Chipgröße größer als das Bildfeld am Beispiel eines
Mikrodisplay-Chips

Master Theses
Author

Title

University

R. Ganesan

Neural Networks for the Analysis of Image Data in OLED Microdisplay

TU Darmstadt

Manufacturing
L. Kähne

Biobasierte Materialentwicklung mittels Nanocellulosen unter

TU Dresden (IHI Zittau)

Nutzung der niederenergetischen Elektronenstrahltechnologie
D. Ullrich

Evaluierung neuer Flüssigdosimeter für die niederenergetische

HTW Dresden

Elektronenstrahltechnologie
C. ThonKonzeptionierung und Untersuchungen zu einer kompakten Low-HTW DresdenPower Datenbrille mit OLED-Mikrodisplay
L. Bayer

Untersuchung der mechanischen Kennwerte strahlenvernetzter

Hochschule für Angewandte Wissenschaften

polymerer Verbundwerkstoffe mit hohem Füllgrad für den Einsatz

Hof

als Bipolarplatte in Brennstoffzellen

43Publications

Publications
Authors

Title

Place of publication

A. Zukauskaite

Piezoelectric Aluminium Scandium Nitride (AlScN)

Special Issue Reprint

Thin Films: Material Development and Applications in

micromachines, 2023, ISBN

Microdevices

978-3-0365-6376-1

Nitrides for Piezoelectric Energy Harvesting

Journal of Physics and Materials,

A. Zukauskaite, S. BarthVol. 6, Kapitel 3.4 in Roadmapp on
Energy Harvesting Materials, 2023,
p. 63-67
S. Saager, L. Decker, T. Kopte, B. Scheffel,

High-Performance Anodes Made of Metallic Lithium

batteries, Vol. 9, Issue 2, 2023,

B. Zimmermann

Layers and Lithiated Silicon Layers Prepared by Vacuum

Artikel 75

Technologies
T. Tulus, J. Wang, Y. Galgan,

Quantifying electrochemical losses in perovskite solar

Journal of Materials Chemistry C,

E. von Hauff

cells

Open Access, 2023, p. 1-10

C. Dittfeld, C. Welzel, U. König,Hemocompatibility tuning of an innovative

Biomaterials Advances, Vol. 147,

A. Jannasch, K. Alexiou, E. Blum,

glutaraldehyde-free preparation strategy using riboﬂavin/2023, Artikel 213328

S. Bronder, C. Sperling, M. F. Maitz,

UV crosslinking and electron irradiation of bovine

S.-M. Tugtekinpericardium for cardiac substitutes

M. Fahland, C. Steiner, M. Schott

Dünnschichttechnologien für die Energiewende

Galvanotechnik, Heft 1, 2023,
S. 33-36
Journal für Oberflächentechnik JOT,

N. Gürtler, U. König

Antifouling-Beschichtungen per Elektronenstrahl

M. Ghazijahani, C. Kästner, V. Valori,

The SCALEX facility – an apparatus for scaled fluid

tm-Technisches Messen, Band 90,

A. Thieme, K. Täschner, J. Schumacher,dynamical experiments

2023, p. 1-14

S. Ghosh, A. Hinz, M. Frentrup, S. Alam,

Design of step-graded AlGaN buffers for GaN-on-Si

Semiconductor Science andD. Wallis, R. Oliver

heterostructures grown by MOCVD

Technology, Vol. 38, Issue 4, 2023,

Vol. 63, Nr. 2, 2023, S. 14-15

C. Cierpka

Artikel 044001
T. Teichmann, L. Dincklage, L. Schaap,

Advances in Electron Beam Technology for Environmental

Journal of Physics: Conference Series,

D. Schreuder, R. Blüthner, F. Winckler,

and Biotechnological Applications at Fraunhofer FEP

Nr. 2443, 2023, Artikel 012017,

S. Schopf, U. König, B. Zimmermann,

14th International Conference on

G. MattauschElectron Beam Technologies, Varna,
Bulgarien, 26. Juni-01. Juli 2022, EBT
Konferenz 2022

S. Rettenberger, P. Landstorfer, G. Herl,

Multi-Source-CT for inline inspection of extruded profiles

B. Meyer, G. Mattausch, R. Labitzke

e-Journal of Nondestructive Testing,eJNDT, Vol. 28, Issue 3, 2023, 9
pages, 12th Conference on Industrial
Computed Tomography, iCT 2023,
Fürth, Germany, 27. Februar-03.
März 2023

M. Fahland, C. Steiner, M. Schott

Energie sparen mit smarten Beschichtungen

N. A. Morrison, M. Campo, T. Crouch,High-performance AlOx thin films for next generation

Converting Quarterly, Vol. 1, 2023,

R. Verghese, S. Straachsustainable packaging

p. 57-62

M. Fahland, J. Szelwicka, W. Langgemach

Energy-saving potential of thermochromic coatings in

Journal of Facade Design andtransparent building envelope components

Engineering, Vol. 11 No. 2 (2023):

Galvanotechnik, Heft 2, 2023,
S. 158-166

Special Issue Multifunctional
Façades for Renovation throughIndustrialization, p. 197–210

44

Publications

Authors

Title

Place of publication

P. Wartenberg, B. Richter, S. Brenner,

Organic-on-silicon photonic platform for advanced

SPIE Proceedings Volume 12425,

J. Baumgarten, S. Lenk, K. Fehse,

imagers, microdisplays and sensors

Smart Photonic and Optoelectronic

D. Schlebusch, M. Törker, A. Fritscher,Integrated Circuits 2023, Artikel

J. Zeltner, C. Schmidt, M. Rolle, S. Damnik,

124250E, SPIE Photonic West-Smart

J. Mütze, F. Schuster, U. Vogel

Photonic and Optoelectronic, 2023,
San Francisco, USA, 31. Januar-02.
Februar 2023

M. Fahland

Photoinduziert hydrophile Schichten von der Rolle

J.-P. Heinß, L. Klose

High-Rate Sputter Etching of Substrates Using Hollow-

Journal für Oberflächentechnik JOT,
Vol. 63, Nr. 4, 2023, S. 16-17
SVC Bulletin, Spring 2023, p. 66-75

Cathode Arc Discharge Sources
D. Q. Tran, F. Tasnadi, A. Zukauskaite,

Thermal conductivity of Sc X Al1-XN and Y X Al1-XN alloys

Applied Physic Letters, Vol. 122,
Issue 18, 2023, Artikel 182107

J. Birch, V. Darakchieva, P. P. Paskov
M. Bolognesi, M. Prosa, M. Törker, L. Lopez

A Fully Integrated Miniaturized Optical Biosensor for Fast

Advanced Materials, Vol. 35, 2023,

Sanchez, M. Wieczorek, C. Giacomelli,and Multiplexing Plasmonic Detection of High- and Low-

Artikel 2208719z, p. 1-13

E. Benvenuti, P. Pellacani, A. Elferink,

Molecular-Weight Analytes

A. Morschhauser, L. Sola, F. Damin,
M. Chiari, M. Whatton, E. Haenni,
D. Kallweit, F. Marabelli, J. Peters, S. Toffanin
J.-P. Heinß

Vacuum Deposition of Aluminum Alloys with 1 µm/s on

66th Annual Technical Conference

Different Types of Semi-finished Products

Proceedings, SVC TechnicalConference, Washington, USA,06.-11. Mai 2023 , p. 288-300

P. Li, S. H. C. Askes, E. del Pino Rosendo,

Nanoscale Thermometry of Plasmonic Structures via

Journal of Physical Chemistry C,

F. Ariese, C. Ramanan, E. von Hauff,

Raman Shifts in Copper Phthalocyanine

Vol. 127, Issue 20, 2023,
p. 9690-9698

A. Baldi
A. Zukauskaite

Editorial for Special Issue “Piezoelectric Aluminium

micromachines, Vol. 14, Issue 5,

Scandium Nitride (AlScN) Thin Films: Material

2023, Artikel 1067

Development and Applications in Microdevices”
J. Finkensieper, F. Mayerle, Z. Rentería-Solís,

Apicomplexan parasites are attenuated by low energy

Parasitology Research, Springer

J. Fertey, G. R. Makert, F. Lange, J. Besecke,

electron irradiation in an automated microfluidic system

Link, Open Access, 2023

S. Schopf, A. Poremba, U. König, S. Ulbert,

and protect against infection with Toxoplasma gondii

B. Standfest, M. Thoma, A. Daugschies
N. Gürtler, U. König

Antifouling-Beschichtungen per Elektronenstrahl

G. Gotzmann, L. Kenner, U. König

Sterilisation von Medizinprodukten, zwischen Tradition

meditronic-journal, Vol. 3, 2023,

und Innovation

S. 60-62

C. Sternemann, S. Dogan-Surmeier,Towards in-line real-time characterization of roll-to-roll

Journal of Physics D: Applied

F. Gruber, S. Bieder, P. Schlenz, M. Paulus,

produced ZTO/Ag/ITO thin films by hyperspectral imaging

Physics, Vol.56, Issue 36, 2023,

Journal für Oberflächentechnik JOT,
Vol. 63, Nr. 3, 2023, S. 12-13

Artikel 365102

C. Albers, E. Schneider, N. Thiering,
C. Maurer, M. Tolan, P. Wollmann,
S. Cornelius
B. Scheffel, O. Zywitzki, T. Kopte

Diamond-like films of tetrahedral amorphous carbon

Social Science Research Network,

deposited by anodic arc evaporation of graphite

SSRN, Juli 2023, Open Access,
Artikel 4504278

45

Publications

Authors

Title

Place of publication

K. Pingen, S. Neuhaus, N. Wolff, L. Kienle,

Influence of Si(111) substrate off-cut on AlN film

Journal of Applied Physics, Vol. 134,

A.Zukauskaite, E. von Hauff, A. M. Hinz

crystallinity grown by magnetron sputter epitaxy

2023, Artikel 025304

T. Preußner, M. Klein, A. Graf

Neue In-situ-Messverfahren für hohe

Journal für Oberflächentechnik JOT,

Prozesstemperaturen

Vol. 63, Nr. 7, 2023, S. 46-47

P. Wartenberg, B. Richter, S. Brenner,

High-brightness OLED-on-silicon on semitransparent

SPIE. Digital Library, Proceedings

J. Zeltner, C. Schmidt, J. Baumgarten,

CMOS backplane for advanced near-to-eye microdisplays

Volume 12624, Digital Optical
Technologies, 2023

A. Fritscher, S. Lenk, M. Rolle, M. Törker,
U. VogelW. Langgemach, G. Lorenz, K. Täschner,

Optische Schichten und ihr Einfluss auf die Belastbarkeit

Vakuum in Forschung und Praxis,

J. Neidhardt

flexibler Gläser

Vol. 35, Issue 4, 2023, p. 28-33

U. Hartung, D. Glöß, J. Neidhardt,

Slim Backlights for Holographic 3D Displays by Advanced

SID Diggest of Techn. Papers, Vol.

A. Drescher, H. Sahm, P. Büttner

Coatings Capabilities

54, Issue 1, 2023, p. 245-247,
Proceedings Display Week 2023, Los
Angeles, USA, 21.-26. May 2023

P. Wartenberg, A. Fritscher, B. Richter,

A 2.5µm Dot Pitch 0.18” OLED Microdisplay on 28nm

SID Diggest of Techn. Papers,

G. Bunk, S. Damnik, F. Schuster,

CMOS BackplaneVol. 54, Issue 1, 2023, p. 13-16,

D. Schlebusch, M. Rolle, S. Brenner,

Proceedings Display Week 2023, Los

J. Zeltner, U. Vogel

Angeles, USA, 21.-26. May 2023

V. Eberlein, M. Ahrends, L. Bayer,

Mucosal Application of a Low-Energy Electron

Viruses, Vol.15, Issue 9, Artikel

J. Finkensieper, J. K. Besecke,

Inactivated Respiratory Syncytial Virus Vaccine Shows

1846, 2023, Open AccessY. Mansuroglu, B. Standfest, F. Lange,

Protective Efficacy in an Animal Model

S. Schopf, M. Thoma, J. Dressman,
C. Hesse, S. Ulbert, T. Grunwald
L. Krauss, R. Schab, S. Unz, M. Michael,

Investigation of the Chemical Durability and Thermal

Heat Transfer Engineering, 2023,

M. Krug, J. Puettmann, H. Nizard, D. Glöß

Impact on Functional Coated Surfaces

Open Access

S. Vogel, K. Täschner, M. Schlegers,

Multi-Sensor-integrierte adaptive Scheinwerfer für

ATZ elektronik, Vol. 18, Ausgabe

S. Weyerrobuste Fahrerassistenzsysteme

10, 2023, S. 16-22

F.-H. Rögner

20 Jahre aktiv für die industrielle Teilereinigung

Journal für Oberflächentechnik JOT,

I. Schedwill

Prozessoptimierung während der

Journal für Oberflächentechnik JOT,

Rolle-zu-Rolle-Beschichtung

Vol. 63, Nr. 11, 2023, S. 40-41

K. Fehse, M. Törker, D. Schlebusch,

Combination of organic and inorganic semiconductor forIEEE Sensors, 2023, Open Access,S. Brenner, J. Baumgarten, M. Rolle,

sensing applications

p. 1-4

K. Pingen, A. M. Hinz, P. Sandström,High growth rate magnetron sputter epitaxy of GaN

Vacuum, 2023, Article 112852

N. Wolff, L. Kienle, L. Scipioni, J. Greer,using a solid Ga target

Vol. 63, Nr. 11, 2023, S. 14-15

P. Wartenberg, B. Richter, U. Vogel

E. von Hauff, L. Hultman, J. Birch,
C.-L. Hsiao
Innovative Sensorik für Lebensmittelsicherheit undLebensmittelbrief, Ausgabe Nov./

Qualität

Dez. 2023, S. 26-27

R. Wang, S. Hasanefendic, E. v. Hauff,

A System Dynamics Approach to Technological Learningenergies, Vol. 16, Nr. 24, 2023,

B. Bossink

Impact for the Cost Estimation of Solar Photovoltaics

Artikel 8005, p. 1-17

M. Törker

46

Protective Rights

Protective Rights
Patent number

Title

Inventor(s)DE 10 2014 110 835 B1

Vorrichtung zum Bedampfen eines

B. Scheffel, C. Metzner,

Substrates innerhalb einer Vakuumkammer

H. Morgner, B. Finkenwirth,

Registration

Grant

31.07.201705.01.2023

19.10.2021

23.02.2023

27.06.2018

01.03.2023

19.10.2021

02.03.2023

29.04.2021

06.04.2023

17.08.201807.04.2023

01.04.2021

07.02.2023

26.06.2018

22.08.2023

24.11.2021

07.09.2023

26.06.2018

01.09.2023

16.09.2019

31.10.2023

13.02.2020

06.12.2023

28.05.2021

12.12.2023

F. Händel
DE 10 2021 127 146 B3
TW 1794249 B

Vorrichtung zum Beaufschlagen von

G. Mattausch, R. Blüthner,

Schüttgut mit beschleunigten Elektronen

H. Flaske, V. Kirchhoff, J. Kubusch

Multi-Layer Functional Film and Production

J. Fahlteich, N. Prager,

Method thereof

M. Fahland, O. Zywitzki,
V. von Morgen, R. Eveson

DE 10 2021 127 147 B3

Vorrichtung zum Beaufschlagen von

G. Mattausch, R. Blüthner,

Schüttgut mit beschleunigten Elektronen

H. Flaske, J. Kubusch,
L. Dincklage, F. Winckler,
T. Schumpa

DE 10 2021 111 097 B4

Hohlkathodensystem zum Erzeugen eines

G. Mattausch, B. Meyer,

Plasmas und Verfahren zum Betreiben eines

H. Flaske, V. Kirchhoff, S. Weiss,solchen Hohlkathodensystems

R. Labitzke, B. Zimmermann,
J. Kubusch

KR 10-2520785 B1
CN 112789060 B

Method for Adjusting the Emission of an

E. Bodenstein, C. Metzner,

OLED

U. Vogel, M. Schober, S. Saager

Method for Inactivating Biologically Active

A. Weidauer, G. Gotzmann,

Components in a Liquid

V. Kirchhoff, J. Kubusch,
C. Wetzel, J. Schönfelder

KR 10 2568659 B1

Multi-Layer Functional Film and Production

J. Fahlteich, N. Prager,

Method thereof

M. Fahland, O. Zywitzki,
V. von Morgen, R. Eveson

DE 10 2021 130 776 B4
CN 110997321 B

Vorrichtung und Verfahren zur Behandlung

T. Martin, J. Casado-Portillo,

von Flüssigkeit

F.-H. Rögner, A. Poremba

Multi-Layer Functional Film and Production

J. Fahlteich, N. Prager,

Method thereof

M. Fahland, O. Zywitzki,
V. von Morgen, R. Eveson

US 11,802,271 B2

Method for Irradiation mammalian Cells with

F.-H. Rögner, S. Ulbert,

Electron Beam and/or X-Rays

J. Burkhardt, J. Portillo,
J. Schönfelder

EP 3 924 307 B1
US 11,839,484 B2

Method for Increasing the Strength of aM. Junghähnel, J. Westphalen,

Glass Substrate

T. Preussner, W. Walther

Method and Device for the objective

U. Vogel, B. Richter, T. Richter

Determination of Capillary Refill Behavior ona Human Body Surface

47

Our locations

Our locations

Institute Center Dresden, Fraunhofer FEP Technology Center, Winterbergstraße

Research Center »Resource-Efficient Energy Technologies« (RESET), Winterbergstraße

48

Our locations

BerlinInstitute Center Dresden-Klotzsche, Maria-Reiche-Straße

Görlitz

Site Winterbergstraße
Site Maria-Reiche-Straße
AirportCentral Railway Station
Elb

City Centere

DresdenLeipzig /Chemnitz

Elbe

Prague49

Highlights

Highlights

HZwo workshop »Surface functionalization for hydrogen

Project meeting »CUSTOM»

applications«

Basic seminar on cleaning

Participation in the 5 km company run »REWE Team Challenge«

Alumni spring meeting

Joint project »secureAR« wins Technology Award

Photonica Summer School

Strategy audit at the Fraunhofer FEP

50

Trade fair participations

Trade fair participations
CES® Consumer
Electronics Show
Las Vegas, USA
05.01. – 08.01.2023

Medtec Live
Nuremberg, Germany
23.05. – 25.05.2023

SPIE. AR|VR|MR

V 2023

San Francisco, USA
31.01. – 02.02.2023

Dresden, Germany
19.09. – 21.09.2023

SPIE. Photonics Westparts2clean

San Francisco, USA
31.01. – 02.02.2023

Stuttgart, Germany
26.09. – 28.09.2023

embedded world

Clean Hydrogen Convention

Nuremberg, Germany
14.03. – 16.03.2023

Dresden, Germany
25.10. – 26.10.2023

BAU 2023

IEEE Sensors

Munich, Germany
17.04. – 22.04.2023

Vienna, Austria
29.10. – 01.11.2023

66th Annual
SVC TechCon

European Hydrogen Week

Washington D.C., USA
08.05. – 11.05.2023

Brussels, Belgium
20.11. – 24.11.2023

SID Display Week

W3+ Fair Convention

Los Angeles, USA

Jena, Germany

23.05. – 25.05.2023

29.11. – 30.11.2023

LOS ANGELES 2023

51

Imprint

Imprint
Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP

Site Winterbergstraße

Site Maria-Reiche-Straße

Winterbergstraße 28
01277 Dresden

Maria-Reiche-Straße 201109 Dresden

Phone +49 351 2586-0

Phone +49 351 8823-4669

Contact person

Photo credits

Annett Arnold, M.Sc.
Communications
Phone +49 351 2586-452

Anna Schroll (p. 30)
ChromoGenics AB (p. 25)
Claudia Jacquemin (p. 28, 29)
Finn Hoyer (Title photo, p. 4, 5, 6, 10, 18, 21, 32, 48, 49, 50)Franziska Lehmann (p. 50)
Fraunhofer FEP (p. 8, 19, 21, 22, 23, 26, 27, 33, 35, 50)
Fraunhofer-Gesellschaft (p. 38)
istockphoto/fhgfep (p. 4)
Jan Hosan (p. 24)
Janek Wieczoreck (p. 20, 34)
Jürgen Lösel (p. 9, 17, 40, 48)
Ronald Bonß (p. 2, 8, 9, 16, 17)
stockxpert.com (p. 41)
Till Schuster (p. 5, 7)
Timotheus Liebau (p. 9, 16, 31)

Editors
Prof. Dr. Elizabeth von Hauff
Annett Arnold, M.Sc.

Layout / Typesetting
Finn Hoyer

Printing
SAXOPRINT GmbH

Reproduction of any material is subject to editorial authorization.
© Fraunhofer FEP | June 2024

52

Content

Foreword ��������������������������������������������������������������������������������������������������������������� 2News from the Institute ��������������������������������������������������������������������������������������� 4
Strategy ����������������������������������������������������������������������������������������������������������������� 6
Contact Persons ����������������������������������������������������������������������������������������������������� 8
Advisory Board ��������������������������������������������������������������������������������������������������� 10
Organizational Structure ����������������������������������������������������������������������������������� 11
The Institute in Figures ��������������������������������������������������������������������������������������� 12
Business Units ����������������������������������������������������������������������������������������������������� 16
Coating of Parts ��������������������������������������������������������������������������������������������������� 18
Coating of Metal Sheets and Strips, Energy Technologies ����������������������������� 20
Flexible Products ������������������������������������������������������������������������������������������������ 24
Medical and Biotechnological Applications ����������������������������������������������������� 26
Microdisplays and Sensors ��������������������������������������������������������������������������������� 28
Precision Coating ������������������������������������������������������������������������������������������������ 30
Systems ����������������������������������������������������������������������������������������������������������������� 32
Materials Analysis ���������������������������������������������������������������������������������������������� 34
The Fraunhofer-Gesellschaft ���������������������������������������������������������������������������� 38
Fraunhofer Group for Light & Surfaces ������������������������������������������������������������ 40
Fraunhofer-Business Area Cleaning ������������������������������������������������������������������� 41
Memberships ������������������������������������������������������������������������������������������������������ 42
Theses ������������������������������������������������������������������������������������������������������������������ 43
Publications �������������������������������������������������������������������������������������������������������� 44
Protective Rights ������������������������������������������������������������������������������������������������� 47

ANNUAL REPORT 2023/24

About Fraunhofer FEP
The Fraunhofer Institute for Organic Electronics, Electron Beamand Plasma Technology FEP works on innovative solutions in thefields of vacuum coating, surface treatment as well as organic
semiconductors. The core competences electron beam technology, plasma-assisted large-area and precision coating, roll-toroll technologies, development of technological key components
as well as technologies for the organic electronics and IC/systemdesign provide a basis for these activities.
Thus, Fraunhofer FEP offers a wide range of possibilities forresearch, development, and pilot production, especially for theprocessing, sterilization, structuring and refining of surfaces aswell as OLED microdisplays, organic and inorganic sensors andoptical filters.
Our aim is to seize the innovation potential of the electron
beam, plasma technology and organic electronics for new
production processes and devices and to make it available forour customers.

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FRAUNHOFER FEP

www.fep.fraunhofer.deAnnual Report
2023 / 24