Smart Actuator Series：
Piezo Assist MotorⓇ
Nanometer level alignment
Precision stage enables nanometer positioning
New ProductConventional

Micrometer Head・Resolution：µm order・Manual・Big Back Crush

Piezo Assist MotorⓇ・Resolution：nm order・Electronic・Small Back Crush

Detail：Just replace the micrometer head with the Piezo Assist MotorⓇ,・Resolution increases to below 30 nanometers・After positioning, the position can be maintained without power supply
・Easily electrify and automate precision stages
Produced and manufactured by1© Copyright Mechano Transformer Corporation. All Rights Reserved. Created at Oct 2023 ver0.2

Benefits of using this product⇒Achieving automation and technologicalsophistication of your equipment
Piezo Assist MotorⓇis a small electric actuator with a resolution of lessthan 30 nanometers. Ultra-precise positioning can be automated simply by replacing the micrometer head of the precision stage with the Piezo Assist MotorⓇ

 Easily realize automation using electric drive
 Easily achieves positioning of 30 nanometers or less
 Maintains adjusted position even without power supply
 Easily replaceable with micrometer head Easily visualize the amount of movement by attaching an
external sensor

Example１．Precision Stage

3-axis precision stage equipped with Piezo Assist MotorⓇ
Features ① Resolution within
30nm

Features ②Travel amount
13mm

Precision stage equipped withpiezo assist motor

Feature ③ No need for power
supply after positioning

Example：micromanipulation, scanning microscope, high resolution
microscope 2.

2© Copyright Mechano Transformer Corporation. All Rights Reserved. Created at Oct 2023 ver0.2

Mirror Mount

2-axis mirror mount equipped with Piezo Assist MotorⓇ

Features① Adjustable in μradorder

Feature② Easy automation

Feature③ No power required
after positioning

Examples: interferometer construction, laser irradiation positioning,laser welding

Case photos

Z-axis precision stage
XY Precision StagePrecision rotationmountØ25 mm～Ø25.4 mm

Vacuum precision stage

For optical elements (mmstandard)

Rotating precision stage
3© Copyright Mechano Transformer Corporation. All Rights Reserved. Created at Oct 2023 ver0.2

Structure and operating principle of Piezo
Assist MotorⓇ

A piezo assist motor rotates the screw shaft using a piezo inertia rotation mechanism inside the housing,
generating thrust and displacement in the direction of the screw shaft.
In the principal diagram of the piezo inertial rotation mechanism shown in Figure 2, the rotor is integrated with thescrew shaft and connected to the moment of inertia (rotation knob, etc.), and the required static friction force ismaintained between the rotor and the contact. Pressure (not shown) is applied to. When the piezoelectric element
extends as shown in Figure 2, contacts A and B move relative to each other as shown in Figure 2. If the force
generated by the acceleration of the rotational motion generated in the moment of inertia due to the accelerationof the relative motion of contacts A and B is less than the static friction force between the rotor and the contactor,
the rotor will cause rotational motion and the static friction If the force is greater than that, slippage will occur
between the rotor and the contact.

Approximate dimensions of Piezo Assist MotorⓇ
PAM3-6.5

PAM6-134© Copyright Mechano Transformer Corporation. All Rights Reserved. Created at Oct 2023 ver0.2

Piezo Assist MotorⓇ Specification

Operation waveform of Piezo AssistMotorⓇ
PAM3-6.55© Copyright Mechano Transformer Corporation. All Rights Reserved. Created at Oct 2023 ver0.2

PAM6-13Controller for Piezo Assist MotorⓇ
PAMC-104

6© Copyright Mechano Transformer Corporation. All Rights Reserved. Created at Oct 2023 ver0.2

PAM-RC100 (Option)

PAMC4-485

7© Copyright Mechano Transformer Corporation. All Rights Reserved. Created at Oct 2023 ver0.2

Operating precautions：
1. A high voltage is applied to the Piezo Assist MotorⓇ during operation. Use only specified controllers
such as PAMC-104 or PAMC4-485 to drive the motor.
2. If you need to disconnect or plug in the cable from the Piezo Assist MotorⓇ or controller, turn off thepower to the controller before doing so.
3. Do not disassemble or modify the piezo assist motor or controller PAMC-104 or PAMC4-485
4. Do not use the motor near flammable materials or damp or humid areas
5. If a strange odor, noise, overheating, or heat radiation is detected, please turn off the controller andcheck the situation.
6.

Do not turn on the driver after dropping the controller or subjecting it to impact.

7.

Do not touch the PAM during operation, as high voltages are applied during operation.

8.

If the Piezo Assist MotorⓇ moves to the threaded end, you can manually adjust the position by turning
the adjustment knob.

9.

Piezo Assist MotorⓇ is an open loop device. If absolute position is required, a separate external sensor
must be provided, and a closed loop must be configured.

10. During operation, the Piezo Assist MotorⓇ produces high pitch noise.
11. You can prevent grease from sticking by moving the knob from one end to the other to redistribute thegrease from time to time. If the motor is not used for a long time, the grease may become hard. In thatcase, you may be able to fix it by manually turning the knob from one end to the other.

Manufacturer：Mechano Transformer Corporation
4F BUILDX No.3, 2-7-12, Iwamoto-cho,Chiyoda-ku, Tokyo 101-0032 Japan8© Copyright Mechano Transformer Corporation. All Rights Reserved. Created at Oct 2023 ver0.2