Tokyo Electron and Society

Tokyo Electron and Society
TEL is working to establish a foundation that will facilitate information sharing on trends
in the global environment and society.

Tokyo Electron and Society

Plasma etchsystems

Cleaning systems

Oxidation/diffusion
LPCVD systems

Coaters/
developers

Metal CVD systems
Wafer probers
Environmental
training

Recycling
Energy savings
Resource savings

Manufacturers of semiconductors andFPDs (flat panel displays)

Societal
contriabution

Energy-saving
designSafety measures

Tokyo Electron and Society
TEL supplies semiconductor production equipment to semicon-cutting down on unnecessary commuting. With PCs and the Internet

ductor manufacturers, helping them to achieve a higher degree of

reaching more people and reducing communication cost, it is becoming

circuit integration and production of high-performance semiconduc-possible for people around the world to share advanced information.

tors, thereby contributing to the worldwide advancement of information and communication technologies.

Hereafter, protection of the global environment will require that
all of us share accurate information about trends in the environment

So how does the advancement of information and communica-and society. No element in creating the foundation for this is moretion technologies affect the environment? To give one example, theimportant than information and communication technologies. It isadvancement of semiconductors has greatly reduced the amount of

TEL's desire to make a major contribution toward preparing thiselectricity consumed by previously energy-hungry machine tools andfoundation for environmental protection.

consumer electronics. In addition, the effective use of information

Nevertheless, TEL's plants do have considerable environmentaland communication technologies has made it easier for trucks, toimpact during the process of creating products. Therefore, we havecarry full loads on both their departing and returning trips, thus re-taken it upon ourselves to reduce the impact through a thorough pro-ducing waste. The further enhancement of communication services

gram of resource saving, energy saving, recycling and assurance ofcould also make working at home a more common practice, thus

employee and customer safety.

Cleaning systems: machines that clean dust and particles off wafers. These use pure water, acid, etc.
Oxidation/diffusion LPCVD systems: machines that bind oxygen (O2) or nitrogen (N2) on the surface of wafers and create oxide films,nitride films, etc., at high temperatures.
Metal CVD systems: machines that form metal wiring on wafers. CVD is a process of making deposits on the surface of wafers by causing chemical reactions with vapor and gas.

5TOKYO ELECTRONENVIRONMENTAL REPORT 2002

TEL contributes to reducing society's environmental impact through advancing information systemization.

Machinery
Mobile telephones
Device manufacturers

People separated by distancecan talk instantly,eliminating
the need to travel.

Television
Energy-saving technology
advances and information
is instantly and accuratelytransmitted.

High productivity, greaterlabor savings

Semiconductors
and FPDs

Car navigation systems

PCs

These units help drivers avoid traffic
jams and get to their destinations
without getting lost, thus minimizing
energy consumption.

People around the world
can share information.

TEL's Flow of Materials
Electricity

215,210MWh

CO290,745 tonnes

Gas

124km

3

NOx

10 tonnes

Fuel2,871kl

SOx

1.7 tonnes

Water

937km

3

Wastewater

INPUT

929km

3

OUTPUTTEL(Major bases in Japan)

Chemicals

5.89 tonnes

Total waste emissions

12,974 tonnes

Paper (copy paper)

429 tonnes

Amount recycled

9,036 tonnes

Amount incinerated or landfilled

3,938 tonnes

Coater/developer: A machine that applies an even coat of photosensitive material (photoresist) on wafers, dries them, and then develops the exposed wafers.
Plasma etching system: A machine that uses plasma to etch away (or chemically corrode) only certain portions of the surface of wafers.
Wafer prober: A machine that inspects each circuit formed on finished wafers.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

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