Piezo Assist Stage
Manual precision positioning stage

What is the “Piezo Assist Stage”・・・P1
Resolution and range of motion ・・・P2

How to use ・・・P3 ~ P4
Precautions for use・・・P5
Application examples ・・・P6
Specifications ・・・P7

Version2.2
Mar 14, 2022

Piezo Assist Stage（PAS）

What is the “Piezo Assist Stage”
Manually controlled precision positioning stage➢ Intuitive operation just turning the knob
➢ Lightweight and Compact➢ High resolution and wide range of motion
Resolution

Range of motion *Piezo AssistMechanism

20 nm

0.03 mm

The micrometer0.01 mm

13 mm*Range of motion of the minimum size modelare 0.025 mm and 6 mm

Piezo Assist Mechanism (fine adjustment mechanism)

Clamp(Lock)
Direction of movement(Axis)
The micrometer(coarse adjustment mechanism)
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Piezo Assist Stage（PAS）

Resolution and range of motion✓ Resolution : 20 nm(nanometre)
Reference example, Observation of microscope:
Coronavirus (approx. 50 nm ~ 200 nm in diameter）
Precise positioning
20 nm

100 nm (0.1 μm)✓ Range of motion：max 13 mm(millimetre)
Reference example, 1-yen coin (approx. 20mm in diameter)

1The micrometer
Range of motion : 13 mmResolution : 0.01 mm per 1 scale
0.01 mm

Range of motion
by Piezo AssistMechanism :0.03 mm (30 μm)
2Piezo Assist Stage（PAS）

How to use ①The micrometer
Intuitive position control by turning knob

Direction ofmovement

Stage moves by 0.01 mm
per 1 scale

The micrometer(coarse adjustment
mechanism)

3

Piezo Assist Stage（PAS）

How to use ②Piezo Assist Mechanism
Precise position control by turning
the knob of controller**Controller and power supply adapter are sold separately.

Connect with theattached cable

LockAccording to the rotation of knob, the applied voltagechanges and the position is adjusted precisely

Piezo Assist Mechanism(fine adjustment mechanism)

Direction of movement(Axis)

4

Piezo Assist Stage（PAS）

Caution➢ Spring is attached to the stage. Since the piezo assist
mechanism may be damaged, when releasing the lockby loosening the clamp during setup, take care not togive an impact by the force of the spring by
supporting the stage with your hand.
➢ Since the piezo assist mechanism may be damaged,please make sure to lock the stage whenmoving/carrying the Piezo Assist Stage.
➢ When the power of the Piezo Assist controller isbeing switched OFF, the position adjustment ofPiezo Assist Mechanism will also disappear.
Piezo Assist Mechanism(fine adjustment mechanism)

Clamp(Lock)

位置決め方向Direction of movement（軸）(Axis)The micrometer(coarse adjustment mechanism)
マイクロメータ（粗動機構）
5Piezo Assist Stage（PAS）

Application examples
As a high-end product, PID control system for lesserrors can be built by using displacement sensor in
combination with PAS.

Accuracy experiment result ofPID control system

Reference example,
attaching lens on PAS

PrecisepositioningAchieved stable and high-precision positioning,against the 15nm increment target value.

6Piezo Assist Stage（PAS）

Specifications
MTPA-2251
series

MTPA-2401
series

MTPA-2601
series

25 × 25 mm

40 × 40 mm

60 × 60 mm

Coarse adjustment travel±3 mm±6.5 mm±6.5 mmFine adjustment travel

25 μm or more

30 μm or more

30 μm or more

Table size

Micrometer Position

Side

Travel distance per rotation(Micrometer)

0.5 mmMinimum resolution(Micrometer)0.01 mmFine movement(Minimum resolution)

20 nm or less

Guide

Ball bearing guidePrimary material

Aluminum

Surface finish

Black anodized

Load capacity(excluding Z-axis type)39.2 N (4.0 kgf)

Load capacity of Z-axis type

9.8 N (1.0 kgf)

Travel accuracy /Straightness
Max. Moment Capacity / Pitch

49 N (5.0 kgf)

3 μm
2.0 N・m(1.47 N・m)

2.5 N・m(2.5 N・m)

4.9 N・m(2.5 N・m)

1.9 N・m(1.47 N・m)

3.0 N・m(2.5 N・m)

4.9 N・m(2.5 N・m)

1.9 N・m

2.5 N・m

4.9 N・mMoment Stiffness / Pitch

2.5″/N・cm(6.0″/N・cm)

0.66″/N・cm(0.66″/N・cm)

0.3″/N・cm(0.66″/N・cm)

Moment Stiffness / Roll

2.0″/N・cm

0.36″/N・cm0.25″/N・cm(Z-axis type shows in brackets)

Max. Moment Capacity / Roll
(Z-axis type shows in brackets)

Max. Moment Capacity / Yaw(Z-axis type shows in brackets)

Parallelism

30 μm

Running Parallelism

10 μm

Mass weight0.07 kg

0.16 kg

0.25 kg

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