Topic number: ??

Guideline for abstracts prepared for the International
Symposium on Dry Process
A. Firstauthor1, B. Secondauthor1 and C. Thirdauthor2
1DPS University, 2-31-22 Yushima, Bunkyo-ku, Tokyo 113-0034, Japan
Dry Processes Co. Ltd., 2-31-22 Yushima, Bunkyo-ku, Tokyo 113-0034, Japan
Email: author@dry-process.org

2

Include in this space a very short summary of the abstract. Use Times New Roman font, 10 pt,simple interline. Justify left and right. The width of the space for title, authors’ names, andaffiliations is 160 mm, and the width of the space for the short summary is 140 mm.

1General information

Contributed papers must be in English and shouldreport an original work. The total length, including
figures and references, is two A4 format pages.
Invited speakers should also prepare two A4 format
pages summarizing their presentations. The authors
are responsible for the content and style of thecontribution. No editing or re-typing will be carriedout by DPS Organizing Committee. The contributions
will be reproduced without reduction or modification.
Contributed papers which do not conform to theformat described below may be rejected. Each abstract
should be submitted online via the DPS web site.
Contribution submitted by email, fax, andconventional mail cannot be accepted. The submitted
file must be a Portable Document Format (PDF)
document, and an abstract prepared using Microsoft
Word or LaTeX should be converted to a PDF file.

2

Detailed information

2.1 Format
The abstract should be typewritten on A4 format
papers with two columns. The total length, including
figures and references, is two pages for both invitedand contributed papers. The pages must not benumbered. Margins are 2.5 cm for top, bottom, left,and right (if US letter format is used, set the rightmargin to 3.1 cm). The distance between the columns
is 0.5 cm. Place an indentation of 6 mm at thebeginning of each paragraph. However, the firstparagraph after a heading should not be indented. The
font should be Times New Roman (or a similar seriffont), except for the title and captions, where Arial (ora similar sans-serif font) should be used. Table 1
summarizes the fonts which should be used in theabstract. If you use LaTeX with the style file
“DPS2012.sty”, the fonts are assigned automaticallyand no further actions are necessary.
2.2 Figures
Abstracts may include figures. Monochromatic figures
are recommended since the proceedings will not

Table 1 Font faces and sizes to be used in theabstracts for DPS.

Element
Title
Authors’ nameAffiliations
Short summary
Main text
Figure and table captions
Major headings
Subheadings
Greek letters

Font face and size
Arial 16, bold
Times 12, normal
Times 10, italic
Times 10, normal
Times 10, normal
Arial 9, normal
Times 11, bold
Times 10, italic
Symbolcontain any color-printed pages. A caption should beattached to each figure. An example of figures isshown in Fig. 1.
2.3 Equations
The left-hand side of equations must be indented.
Equation numbers must be in parentheses and alignedwith the right-hand margin of the column (flush right).
An example is given by∂n+∇⋅Γ =0.
∂t(1)

2.4 Topic number
The topic number corresponding to your abstract
should be specified on the top of the abstract. The
topics are:
1. Etching Technology
2. Manufacturing Technology(AEC, APC, EES,FDC)
3. Surface Reaction and Damage
4. Plasma Diagnostics and Monitoring System
5. Modeling and Simulation
6. Plasma Generation(Equipment/Source)
7. CVD/PVD/ALD
8. Plasma Processes for 3D Device, FPD,
Photovoltaic Devices

9.

Plasma Processes for new material devices(MRAM, Power, Organic)
10. Plasma Processes for Biological and Medical
Application, MEMS
11. Atmospheric Pressure Plasma and Liquid
Plasma
12. New Dry Process Concepts

Fig. 1

An example of a figure. The monochromatic
version of the DPS 30th Anniversary logo.

2.5 References
List and number all references at the end of the paper.
When referring to them in the text, type thecorresponding reference number between brackets asshown at the end of this sentence [1]. Anotherexample is also listed [2].
[1] J. W. Coburn and H. F. Winters, J. Vac. Sci.
Technol. 16, 391 (1979).
[2] R. W. B. Pearse and A. G. Gaydon, The
Identification of Molecular Spectra (John Wiley& Sons, New York, 1976).