UV-Curable Hybrid Polymers for
Micro Optical Components• OrmoComp®
• InkOrmo• OrmoClear®
• OrmoClear®10• OrmoClear®30• OrmoCore• OrmoClad• OrmoStamp®
Unique features• Excellent transparency• Excellent mechanical properties• High chemical and physical stability• Excellent replication ﬁdelity• Ready-to-use solutions

micro resist technology GmbH

Gesellschaft für chemische Materialien spezieller Photoresistsysteme mbH

Köpenicker Str. 325
12555 Berlin
GERMANYphonefax
mailinfo+49 30 64 16 70 100+49 30 64 16 70 200
sales@microresist.de
www.microresist.com

www.microresist.com- Made in Germany -Material Speciﬁcations

OrmoComp®

InkOrmo

OrmoStamp®

OrmoCore

OrmoClad

OrmoClear®

OrmoClear®10OrmoClear®30• UV lithography and UV molding• Two-photon absorption (TPA) fabrication (OrmoComp® only)

Liquid material before patterning process
Solvent-freeYes

No

Yes

Yes

Yes

Yes

Yes

Yes

• High resolution down to 100 nm feature size

Viscosity [Pa·s]

2.0 ± 0.5*

0.4 ± 0.2

2.9 ± 0.4

2.5 ± 1.0

2.9 ± 0.3

10 ± 230 ± 3• Highly transparent for VIS and near UV down to 350 nm• High thermal stability up to 300 °C (short term), 270 °C (long term)

Film thickness upon spin coating[µm]
3000 rpm
6000 - 1000 rpm

**

20
10-60

Spectral sensitivity photo-curing [nm]300 - 410

105 - 3530
20 - 90

300 - 410

30
20 - 9030
20 - 9545
30 - 150

300 - 390100
50 - 270• High mechanical stability
100

300 - 41080

Volume shrinkage [%]

5-7

4-6

2-5

2-5

3-5

<2<< 2

Refractive Index (589 nm)

1.520

1.516

1.555

1.537

1.555

1.5591.561

CTE (20-100 °C) [ppm/K]

60

105

100 - 130

100 - 130130

130130dn/dT (589 nm) [10 /K]-2.0-1.5-2.2-2.7-2.1-2.3-2.3-4

Young‘s modulus [GPa]~1~0.6~1~0.5~1.2~0.8~0.8Hardness (by indentation) [MPa]~68~36~53~24~60~90~90*

Standard InkOrmo solutions available with viscosity of 7 mPas, 12 mPas, and 18 mPas**transmittance (%)

Hybridpolymer after photo-curing (λ = 365 nm) and hardbake (140 - 160°C)

100g-line

6080
®

40

OrmoComp®
OrmoStamp®
OrmoClear
OrmoCore
OrmoClad60
i-line2040360

380

InkOrmo lenses on OrmoComp®
Flexible OrmoStamp® on nickel
pedestals - diameter of 100 µm
backplate(Courtesy of EPFL/LMIS1, Switzerland) (Courtesy of PSI, Switzerland)

420

440

wavelength (nm)Inkjet dispensing, no spin coatingMicrolenses on glass(Courtesy of FhG IOF, Germany)

400

0250 300 350 400 450 500 550 600 650 700 750 800

Replicated OrmoCore
microring resonator(Courtesy of TU Dresden)

Replicated OrmoComp®
microlens arrays

Replicated OrmoClear®
macrolenses (Courtesy of HZB)









Applications

Micro Optical Components

Selection Guide

OrmoComp®

InkOrmoTransparent Stamps

Optical Waveguides

Micro Optical Components

Process ﬂow UV lithography

OrmoStamp®

OrmoCore

OrmoClad

OrmoClear®

OrmoClear®10

OrmoClear®30

Process ﬂow imprint lithography

Process Compatibility
Photolithography (mask-lithography)

••

•

•

•

•

•

UV molding•

••

•••

•

(Nano-)imprinting••

•

•••

•

Direct laser writing, TPA•

••••

•

•

•

•

•

Ink-jet dispensing
Roll-to-roll / Roll-to-plate processing••••

Preferred Applications
Microlenses, gratings, prisms, DOEs••

Waveguiding••

Bio applications, lab-on-chip,microﬂuidics••

Replication with hard molds(quartz, Ni etc.)•

Replication with PDMS molds(no oxygen sensitivity)

•

•

•

••

•

•

•

•

•

•

•

•

•

•

Two-photon absorption (TPA) process (OrmoComp® only)•

Working stamp fabrication(e.g. for NIL)••

www.microresist.com

UV-Curable Hybrid Polymers for Micro Optics

Main Features and Optical Properties

Product Overview

Material Compatibility

2

Si and SiO2 substrates•Plastic substrates

••

•
•

(Courtesy of Multiphoton Optics GmbH)3

UV-Curable Hybrid Polymers for Micro Optics

OrmoStamp® for Transparent Polymer Working Stamps
Process ﬂow for working stamp fabrication

Main Applications - Stamp Fabrication• Transparent working

1stamp fabrication• (Nano)Imprint processes

2• Cost efﬁcient alternative

to quartz stamps
3

Large area replication ofOrmoStamp® using 6 inch
glass substrate

Main Features - Stamp Fabrication

4• For UV-based and thermal imprinting
5• Highly transparent for near UV and visible light• Excellent pattern replication

6• High mechanical stability• Thermal stability up to 270 °C (short term)• Enhanced anti-adhesive properties for low release forces

OrmoCore and OrmoClad for Optical Waveguide Fabrication
Process ﬂow for waveguide fabrication

Main Applications - Optical Waveguides• Single-mode waveguides• Multi-mode waveguides• Beam splitters• Thermo-optical switches• Microring resonators
Undercladding/ core of amultimode waveguide onsilicon (Courtesy of ACREO)

Main Features - Optical Waveguides• UV lithography and UV moulding• Low optical loss at datacom wavelengths• High resolution down to 100 nm feature size
• Thermal stability up to 270 °C (short term)• High mechanical stability

Ancillaries
PurposeAncillaryFeatures

Adhesion Promoter

OrmoPrime®08- Recommended for various substrates like Si, glass, and quartz- Ready-to-use solution for spin coating- Film thickness 130 nm

Dilution of Hybrid Polymers *OrmoThinma-T 1050

Dilution for d > 0.5 µm (product-dependent) *Dilution for d < 0.5 µm (product-dependent) *Developer

OrmoDev- Removal of uncured material (e.g. after mask lithography was applied)- Immersion development*For details of dilution ratios see corresponding processing guidelines
OrmoComp®: DE 30 210 075 433; IR 1 091 982 ; TW 100030626; OrmoClear®: DE 30 210 075 434; IR 1 091 359 ; TW 100030628
OrmoStamp®: DE 30 210 075 435; IR 1 092 621 ; TW 100030629; OrmoPrime®: DE 30 210 075 436
Hybrid polymers based on ORMOCER®s for micro-optics licensed by the Fraunhofergesellschaft zur Förderung der Angewandten Forschung in Deutschland e.V.

4

© micro resist technology GmbH | July 2015

www.microresist.com• Tunable refractive index (Core/Clad ratios)