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TS/P 234

TO THE ISO MEMBER BODIES

2013-02-11

ISO/TS/P 234 – Fine bubble technology
Dear Sir or Madam,
Please find attached a proposal for a new field of technical activity on Fine bubble
technology submitted by JISC (Japan).
According to subclause 1.5.6 of Part 1 of the ISO/IEC Directives, you are kindly invited tocomplete the ballot form (Form 02) which can be downloaded at www.iso.org/forms −please note that Form 2 has been recently updated and that, from now on, votes that do
not provide a justifying statement will not be registered. Forms should be sent (preferably
in Word format) to the Secretariat of the ISO Technical Management Board at
tmb@iso.org before 11 May 2013.
As is the usual procedure, this TS/P vote is only to determine whether the content of theattached proposal justifies the establishment of a new field of technical activity by ISO.
The eventual structure of any new body will be decided and approved by the TMB once
this vote is closed.

Yours faithfully,

Sophie Clivio,
Secretary of the Technical Management Board

Encl.: TS/P 234

TMB_CL/BCLPROPOSAL FOR A NEW FIELD OF TECHNICAL ACTIVITY
Circulation date:Closing date for voting:
Proposer

Reference number(to be given by Central Secretariat)

ISO/TS/P

JISC, Japan
A proposal for a new field of technical activity shall be submitted to the Central Secretariat, which will assign it a reference
number and process the proposal in accordance with the ISO/IEC Directives (part 1, subclause 1.5). The proposer may be amember body of ISO, a technical committee or subcommittee, the Technical Management Board or a General Assemblycommittee, the Secretary-General, a body responsible for managing a certification system operating under the auspices of ISO,or another international organization with national body membership. Guidelines for proposing and justifying a new field oftechnical activity are given in the ISO/IEC Directives (part 1, Annex C).
The proposal (to be completed by the proposer)
Title of the proposed new committee (The title shall indicate clearly yet concisely the new field of technicalactivity which the proposal is intended to cover.)Fine Bubble Technology
Scope statement of the proposed new committee (The scope shall precisely define the limits of the field ofactivity. Scopes shall not repeat general aims and principles governing the work of the organization but shallindicate the specific area concerned.)Standardization of terms and definitions, classifications in sizes and characteristics, and other aspects related tomeasurements, functions and applications in the field of "fine bubbles."According to known behaviour of fine bubbles, there are so-called "ultrafine bubbles" which is better to be defineddifferently. For example, ultrafine bubbles may be determined as the inside pressure increase by the surface tension
effect to be larger than 1 atm for the air bubble in water, which would have the equivalent diameter smaller than about 3
μm . This is to be discussed and defined later by the new TC. The new TC deals with both "fine bubbles" and"ultrafine bubbles."(Refer to descriptions and powerpoint presentation materials in Annex1 and Annex2, respectively.)

FORM 1 (ISO)Version/V2012

See overleaf

Proposed initial programme of work (The proposed programme of work shall correspond to and clearly reflect theaims of the standardization activities and shall, therefore, show the relationship between the subject proposed.
Each item on the programme of work shall be defined by both the subject aspect(s) to be standardized (forproducts, for example, the items would be the types of products, characteristics, other requirements, data to besupplied, test methods, etc.). Supplementary justification may be combined with particular items in the
programme of work. The proposed programme of work shall also suggest priorities and target dates.

The proposer plans to use a three-layer standards system for standardization of fine bubble technology. A good example of athree-layer standard is ISO 12100 for the safety of machinery and risk assessment, which proved to have a significant impact
to the users of ISO 12100 by preventing industrial accidents and also by ensuring system safety. In order to effectively
develop a standard of the technology, e.g. fine bubble technology, a layered standard system which includes a broad conceptfrom high through low layers is better to be adopted. The three-layer standards system in this case consists of (1) terms anddefinition at the top, (2) measurement methods at the middle, and (3) other aspects related to functions and specific industrial
applications at the bottom. The three-layer standards system is considered to be effective for a systematic standardization of
new technology.
Accordingly, we propose initial programmes of work in a three-layer structure shown below.
1. Top layer standards for basics- Terms and definitions- Classifications in sizes and characteristics
2. Middle layer standards for measurement methods- Laser diffraction scattering method- Dynamic light scattering method- Electrical sensing zone method- Particle tracking analysis method (Brownian motion tracking analysis method)- Resonance mass measurement method- Zeta-potential measurement method(Particle tracking/Dynamic light scattering)- Other candidate methods if proposed.
3. Bottom layer standards for functions applicable to industry- Cleaning Effect- Separation Effect- Lubrication Effect- Electrostatic Charge Separation Effect- Control Effect of Physical Properties (Density, Diffusivity, and so on)- Other candidates functions if proposed
Priorities of standardization work are given to the items listed in the top and middle layers over the others those listed in thebottom layer for the reason that the definition and measurement methods are essential to develop the standards of related
applications that provide technical solutions for users. The proposer would like to use the new TC, when approved, as a work
model of ISO/TC where an ideal systematic standardization process for new technology, which is not device dependent, ismade.
The proposer would like to set the target dates of the NPs by the end of 2016 provided that the establishment of new TC isapproved timely and then the first TC meeting is held in December 2013. Standardization for functions and applications will
start when the definition and measurement methods are outlined, i.e. within a year or so after the first meeting of the TC.
Indication(s) of the preferred type or types of deliverable(s) to be produced under the proposal (This may be
combined with the "Proposed initial programme of work" if more convenient.)

Deliverables preferred are all ISO International Standards (ISs).
ISO Standard "Terminology of Fine Bubbles", which may be a multi-part series, including definition of fine/ultrafine
bubbles, diameter, density, and life duration in pure water, distilled water, tap water, etc.
ISO Standard "Measurement Methods of Fine Bubbles" which will be a multi-part series, including measurement
methods described as programme of work in the box above.
ISO Standards for various fine bubble functions and applications, which will be independent documents from one
another.

FORM 1 (ISO) page 2
Version/2012

A listing of relevant existing documents at the international, regional and national levels. (Any known relevant
document (such as standards and regulations) shall be listed, regardless of their source and should beaccompanied by an indication of their significance.)

There is no ISO documents at any levels that describe fine bubble technology.
As for the measurement methods, which can be applied for fine bubbles are standardized for powder/particles, which are solid
particle and liquid droplet, as follows. These published standards would be referred to as normative references in the planned
ISO documents for measurement of fine bubbles which include the descriptions about sample preparation, calibration and test
reports for fine bubbles.
1 ISO 13099-1 Colloidal systems -- Methods for zeta-potential determination -- Part 1: Electroacoustic and electrokinetic
phenomena
2 ISO 13099-2 Colloidal systems -- Methods for zeta-potential determination -- Part 2: Optical methods
3 ISO 13319/JIS Z 8832 Determination of particle size distributions -- Electrical sensing zone method
4 ISO 13320/JIS Z 8825-1 Particle size analysis -- Laser diffraction methods
5 ISO 13321/JIS Z 8826 Particle size analysis -- Photon correlation spectroscopy
6 ISO 20998-1 Measurementand characterization of particles by acoustic methods -- Part1: Concepts and procedures inultrasonic attenuation spectroscopy
7 ISO 21501-2/JIS B 9921-2 Determination of particle size distribution -- Single particle light interaction methods -- Part 1:
Light scattering liquid-borne particle counter
8 ISO 21501-3/JIS B 9921-3 Determination of particle size distribution -- Single particle light inteaction methods -- Part 3:
Light extinction liquid-borne particle counter
9 ISO 22412/JIS Z 8828 Particle size analysis -- Dynamic light scattering (DLS)
10 ASTM E2834-12 Standard guide for measurement of particle size distribution of nanomaterials in suspension bynanoparticle tracking analysis (NTA)
A statement from the proposer as to how the proposed work may relate to or impact on existing work, especiallyexisting ISO and IEC deliverables. (The proposer should explain how the work differs from apparently similar work,
or explain how duplication and conflict will be minimized. If seemingly similar or related work is already in thescope of other committees of the organization or in other organizations, the proposed scope shall distinguishbetween the proposed work and the other work. The proposer shall indicate whether his or her proposal could be
dealt with by widening the scope of an existing committee or by establishing a new committee.)

1. The proposal can only be dealt with by establishing a new TC.
There is no ISO Technical Committee (TC) which covers fine bubble technology. No particular ISO Technical Committee
would be able to cover a wide range of potential phenomena created by fine bubbles, or to develop a number of application
standards such as for cleaning effect, separation effect, lubrication effect, electrostatic charge separation effect, control effectof physical properties (density, diffusivity), and so on. For this reason, the proposal cannot be dealt with by widening thescope of an existing committee.
2. A liaison with ISO TC24/SC4 (Particle characterization including sieving/Particle characterization)
However, in order to develop the measurement standards of fine bubbles, a liaison with ISO TC24/SC4, as a joint working
group, is necessary. SC4 systematically develops particle measurement standards which can be referred to forstandardization of fine bubble measurement. Note that the scope of SC4 is "particle characterization" and the work of the
new TC we propose cannot be dealt with by TC24/SC4 by itself even if its scope is widened.
3. Consideration of ISO/TC229 (Nanotechnology)
TC229 covers the matter and process that have the dimension of less than 100 nm. On the other hand, fine bubble technology
covers the larger bubbles which have the diameter in micrometers. Furthermore, it would not be possible to distinguish thedifference in characteristics of the bubbles between those 100 nm or less and those more than 100 nm. In this sense, TC229
is not a suitable TC for standardization of fine bubble technology. Please refer to the scope of TC229 below.
Scope of TC229: Standardization in the field of nanotechnologies that includes either or both of the following:(1) Understanding and control of matter and processes at the nanoscale, typically, but not exclusively, below 100 nanometresin one or more dimensions where the onset of size-dependent phenomena usually enables novel applications,(2) Utilizing the properties of nanoscale materials that differ from the properties of individual atoms, molecules, and bulk
matter, to create improved materials, devices, and systems that exploit these new properties.

FORM 1 (ISO) page 2
Version/2012

A listing of relevant countries where the subject of the proposal is important to their national commercial
interests.

Japan, Germany, France, the USA, the UK, China, Australia, Korea, and other countries

A listing of relevant external international organizations or internal parties (other ISO and/or IEC committees) to
be engaged as liaisons in the development of the deliverable(s). (In order to avoid conflict with, or duplication ofefforts of, other bodies, it is important to indicate all points of possible conflict or overlap. The result of any
communication with other interested bodies shall also be included.)

Information exchange and references should be reviewed especially for the measurement methods of fine bubbles with
ISO/TC24 Particle characterization including sieving/SC4 Particle characterization.
Information exchange should also be made, if necessary, with ISO/TC229 Nanotechnology.

A simple and concise statement identifying and describing relevant affected stakeholder categories (including
small and medium sized enterprises) and how they will each benefit from or be impacted by the proposeddeliverable(s).

Regarding fine bubbles, stakeholders are manufactures of generators, of measurement equipment, and of applicationequipment, including those of machine cleaning industry, food industry, construction and civil engineering industry, semi
conductor manufacturing industry for the cleaning effect. Furthermore, many application fields would be expected forvarious useful effects of fine bubbles to produce large scale of industrial growth.
Fine bubbles or ultrafine bubbles have a potential to bring enormous benefits to a wide range of applications, and for the usersof the applications to reap the benefits of the new technology; therefore, specific conditions and positive effects of eachapplication need to be defined clearly. Cleaning, for instance, covers a broad range of applications, such as road, lavatory,
plumbing for food processing, semiconductor wafers, and so on.
Only after the necessary ISO standards are developed, a healthy market for the new technology can be fostered, and then theworld can enjoy the benefits by referring to the standards developed. Setting international standards and creating a market by
way of new research and development have a significant importance as factors closely related to each other, which cannot bepromoted separately. In addition, the proposer would like to ask national standards bodies and regional standards bodies forparticipating actively in the development of fine bubble standards under the name of ISO.
An expression of commitment from the proposer to provide

the committee secretariat if the proposal succeeds.

JISC is willingly to undertake Secretariat of new TC when the proposal is accepted by ISO.

FORM 1 (ISO) page 2
Version/2012

Purpose and justification for the proposal. (The purpose and justification of the standard to be prepared shall bemade clear and the need for standardization of each aspect (such as characteristics) to be included in the standard
shall be justified. Clause C.4.12.1 through C.4.12.10 of Annex C of the ISO/IEC Directives, Part 1 contain a menu ofsuggestions or ideas for possible documentation to support and purpose and justification of proposals. Proposers
should consider these suggestions, but they are not limited to them, nor are they required to comply strictly withthem. What is most important is that proposers develop and provide purpose and justification information that ismost relevant to their proposals and that makes a substantial business case for the market relevance and the needfor their proposals. Thorough, well-developed and robust purpose and justification documentation will lead to more
informed consideration of proposals and ultimately their possible success in the ISO IEC system.)Purpose and Justification:
1. What are fine bubbles or ultrafine bubbles?
Bubbles contained in a liquid are visible to the eyes when their sizes are large enough to see, as we can see the bubbles incarbonated drinks or those coming from the air diffuser in a water tank. Bubbles with the size of a few millimetrs in diametershow visible surfacing action in a liquid, and the presence of fine bubbles of dozens of microns in diameter can be observedwith white turbidity. Bubbles in diameter smaller than the wavelength (the diffraction limit of visual ray is 900 nm) of lightare often called ultrafine bubbles, and they are too small to see. Recent development in measuring technology proved thatultrafine bubble generators are capable of producing a large amount of ultrafine bubbles of 100 nm to 200 nm in diameter.
The technology can also measure bubbles quantitatively, and reveals that, as many as a billion/ml ultra-fine bubbles exist in aliquid and can stay there for a long time.
2. Measuring technique of ultrafine bubbles and advancement of bubble generating technology
Ultrafine bubbles in diameter of less than the wavelength of light cannot be measured by a usual optical microscope. Neither
can a scanning electron microscope measure ultrafine bubbles in a liquid. With the recent technological breakthrough,however, various revolutionary methods have been developed to measure ultrafine bubbles in a liquid. Such methods
developed by companies and universities in the UK, Germany, and the USA include: tracking Brownian motion of bubbles,
measuring the change in laser frequency caused by Brownian motion, analysing the spectrum of laser backscattered light, anddistinguishing gas particles from solid ones using a MEMS resonance device. These methods have lately been put into
practical uses, and detect a great amount of ultrafine bubbles of 100 nm to 200 nm in diameter contained in a liquid.
Along with the advancement of measurement technology, ultrafine bubble generation technology, such as pressure dissolving
method, swirling liquid flow method, ejecting method, as well as several other methods, has progressed in the past few years,
and the generators have already been commercialized as products. As quantitative data and new diverse applications arereported steadily, ground-breaking progress in this field is expected.
3. Advantageous effects and applications of fine bubbles
As the measurement and generation technology have progressed, the possibility of using ultrafine bubbles in industrial
applications has also been studied. Scientific research and development of ultrafine bubbles have brought about positive
results that encourage researchers that ultrafine bubbles have high potentials in industrial applications.
Use of ultrafine bubbles in cleaning applications has remarkable benefits among other applications. Cleaning antifreezing
agent on highways using ultrafine bubble water is much more effective than cleaning using just tap water. Ultrafine bubble
water has also been used on a trial basis to clean lavatories in highway rest stops, which shows excellent cleaning effect on
urinary calculus removal.
Ultrafine bubbles are used in semiconductor and photovoltaic manufacturing process, too. Specifically, ultrafine bubble
technology is adopted in the separation process of photovoltaic wafers. Also for cleaning of silicon semiconductor wafers,
using the ultrapure water that contains ultrafine bubbles has a greater cleaning effect than using the only ultrapure water
applied in conventional cleaning method.
As the function of control effect of various physical properties such as density and diffusivity, the following technology would
be utilized. Fine bubble technology would find another promising application in food processing. For people who wish tocontrol calorie intake, low-calorie mayonnaise was made by incorporating fine bubbles into it, which has received good
response in the market. Because ultrafine bubbles are extremely small, they do not surface with buoyance as usual large
bubbles do so, and it was confirmed that Brownian motion holds ultrafine bubbles in a liquid for over six months. Various
kinds of flavour can be added to the bubbles, or many types of gas can be trapped in the bubbles, either of which raise
expectations of potential applications in food, beverage, cosmetics, chemicals, medical care, etc.
Furthermore, in agriculture, ultrafine bubbles are used to accelerate the growth of vegetables. Shorter growing season wasobserved when using ultrafine bubbles on lettuce growth, and there is a strong probability that ultrafine bubble technology
would greatly improve the production efficiency on a global scale.
4. Necessity for developing international standards for fine bubble technology
As described above, measurement and generation technologies of ultrafine bubbles have advanced and the uses in applications
are increasing steadily. However, the terminology and meaning of fine bubbles or ultrafine bubbles are not clearly definedyet. Bubble size, bubble density, types of liquid and gas, and bubble holding time need to be defined in international
standards so that those concerned can work toward further development using a "common language." As a variety ofmeasuring methods have been developed, measuring conditions and methods must be specified, too.

FORM 1 (ISO) page 2
Version/2012

Signature of the proposer

Tamotsu Nomakuchi
President of JISC

Further information to assist with understanding the requirements for the items above can be found in the Directives, Part 1,
Annex C.
Comments of the Secretary-General (to be completed by the Central Secretariat)

Signature

FORM 1 (ISO) page 2
Version/2012

Annex 1
Explanatory document of fine bubble technology and its development to be proposed
to ISO as international standards
JISC (Japanese Industrial Standards Committee)

1. What are fine bubbles or ultrafine bubbles?
Bubbles contained in a liquid are visible to the eyes when the bubble sizes are large enoughto see, as we can see bubbles in carbonated drinks or those coming from the air diffuser in awater tank. Bubbles with the size of a few millimeters in diameter show visible surfacing
action in a liquid, and the presence of fine bubbles of dozens of microns in diameter can be
confirmed with white turbidity in a liquid.

Bubbles in diameter smaller than the wavelengthof light are called ultrafine bubbles, and they are too small to see.

Recent development inmeasuring technology confirms that ultrafine bubble generators are capable of producing alarge amount of ultrafine bubbles of 100 nm to 200 nm in diameter.

The technology canalso measure bubbles quantitatively, and reveals that as many as a billion/ml ultrafine
bubbles exist in a liquid and can stay for a long time. (see Annex 2 Page1-3)
2. Measuring technique of ultrafine bubbles and advancement of bubble generating
technology
Ultrafine bubbles in diameter of less than the wavelength of light cannot be measured by ausual optical microscope.

Neither can a scanning electron microscope measure ultrafine

bubbles, as bubbles are contained in a liquid.

With the recent technological breakthrough,however, various revolutionary methods have been developed to measure ultrafine bubbles
in a liquid.

Such methods developed by companies and universities in the UK, Germany,and the USA include:

tracking Brownian motion of bubbles, measuring the change in laser

frequency caused by Brownian motion, analyzing the spectra of laser backscattered light,
distinguishing gas particles from solid particles using a MEMS resonance device, etc.
These methods have lately been put into practical uses, and detect a great amount of
ultrafine bubbles of 100 nm to 200 nm in diameter contained in a liquid.
Along with the advancement of measurement technology, the ultrafine bubble generation
technology, such as pressure dissolving method, swirling liquid flow method, ejecting
method, as well as several other methods, has progressed rapidly in the past few years, andthe generators have already been commercialized as products.

As Japanese companies

and universities report quantitative data and new diverse applications steadily,groundbreaking progress in this field is expected to be made soon. (see Annex 2 Page4-5)
1

3. Advantageous effects of fine bubbles and its applications
As the measurement and generation technologies have progressed, the possibility of using
ultrafine bubbles in practical applications has also been studied.

Scientific research anddevelopment, and also industrial application development of ultrafine bubbles have brought
about positive results that encourage researches that ultrafine bubbles have high potentials
in applications.
Use of ultrafine bubbles in cleaning applications has remarkable benefits among otherapplications.

Cleaning antifreezing agent on highways using ultrafine bubble water ismuch more effective than cleaning using just tap water.

Also, ultrafine bubble water has

been adopted on a trial basis to clean lavatories in highway rest stops, which shows
excellent cleaning effect on urinary calculus removal. (see Annex 2 Page6-7)
Ultrafine bubbles are also used in semiconductor and photovoltaic manufacturing processes.
Specifically, ultrafine bubble technology is adopted in the difficult process of separating apile of photovoltaic wafers. Also for cleaning of silicon semiconductor wafers, using theultrapure water which contains ultrafine bubbles has a greater cleaning effect than using theonly ultrapure water applied in conventional cleaning method. (see Annex 2 Page8-9)
Fine bubble technology has found another promising application in food processing. For
people who wish to control calorie intake, low-calorie mayonnaise is made by incorporating
fine bubbles into it, which has received good response in the market.
Because ultrafine bubbles are extremely small, they do not surface with buoyancy as usual
large bubbles do so, and it was confirmed that Brownian motion holds ultrafine bubbles in aliquid for over six months.

Various kinds of flavor can be added to the bubbles, or many

types of gas can be trapped in the bubbles, either of which raise expectations of potential
applications in food, beverage, cosmetics, chemicals, medical care, and so on.
Furthermore, in agriculture, ultrafine bubbles are used to accelerate the growth ofvegetables.

Shorter growing season was observed when using ultrafine bubbles on lettuce

growth, and there is a strong probability that ultrafine bubble technology would greatly
improve the production efficiency on a global scale.

24. Necessity for developing international standards for fine bubble technology
As described above, measurement and generation technologies of ultrafine bubbles haveadvanced and the uses in actual applications are increasing steadily.

However, theterminology and meaning of fine bubbles or ultrafine bubbles are not clearly defined yet.
Bubble size, bubble density, types of liquid and gas, and bubble holding time need to be
defined in international standards so that those concerned can work toward further
development using a “common language.”

Also as various measuring methods have beendeveloped, measuring conditions and methods must be specified.
Fine bubbles or ultrafine bubbles have a potential to bring enormous benefits to a wide
range of applications, and to reap the benefits of the new technology for the users of theseapplications; therefore, specific conditions and positive effects of each application need to
be defined clearly.

Because cleaning, for instance, covers a broad range of applications,such as road, lavatory, plumbing for food processing, semiconductor wafers, and a lot others,conditions and measuring parameters specific to each application need to be defined
explicitly.
Only after the necessary ISO standards are developed, a healthy market for the newtechnology can be fostered, and then the world can enjoy the benefits by referring to thestandards developed.

For the reasons mentioned here, setting a three-layer standard

system for the fine bubble technology is under study.

The standard system will consist of

the definition and terminology as the first-tier standard, measuring method as thesecond-layer group of standards, and specific industrial applications as the third-layer groupof standards.

The three-layer standard system is modeled after the A-B-C three-layer

standards system (see Annex 2 Page10), i.e. ISO 12100 for the safety of machinery and risk
assessment.

The A-B-C three-layer standards system had a significant positive impact on

the world by preventing industrial accidents and also by ensuring system safety.
Setting international standards and creating a market by way of new research anddevelopment have a significant importance as factors closely related to each other, whichcannot be promoted separately.

We hereby propose the new ISO activity, i.e. developmentof new ISO standards for fine/ultrafine bubble technology, which we believe to contribute to
the world.

3

Japanese

Industrial Standards Committee

What are fine bubbles or ultrafine bubbles? Annex 2
Bubbles are tentatively classified as

Fine Bubble
UltrafineBubble*Micro‐
bubbleMilli‐
Submilli‐ bubble
bubble10‐7 10‐6 10‐5 10‐4 10‐3 10‐2
Bubble diameter [m]1

Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

Japanese

Industrial Standards Committee

Behavior of milli-, micro- and ultrafine-bubble
Fine bubble has unique behavior !!
Water pool
Break
Ultrafine bubbles

ShrinkingRisingStagnant

Disappear

Dissolving→
generating
Microbubble

Milli-bubble
Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

Microbubble

Ultrafine bubble2

Japanese

Industrial Standards Committee

Observation from microbubble water to ultrafine bubble water

Waiting with no aeration(during microbubble
surfacing separation)

Ultrapure water

Microbubble water (looks cloudy)

Ultrafine bubble water（looks clear) 3

Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

Japanese

Industrial Standards Committee

The latest measuring method of size of ultrafine bubbles

Particle tracking analysis
method (Brownian motion

tracking analysis method)

LM20（NanoSight）

dElectrical sensing zone
methodLaser diffraction /scattering method
SALD-7100H（SHIMADZU）

Multisizer 4（Beckman Coulter）

2kT
3
http://www.beckmancoulter.co.jp/
http://www.shi madzu.c o.jp/powder/products/01s 7100/index.html

http://www.qd-japan.com/product/lifescience/

Measurement region

10-7
Ultrafinebubbles
Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

10-6

10-5

10-4

10-3 (m)Microbubbles4Japanese

Industrial Standards Committee

Various technologies show measurement results ofultrafine bubble diameter around 100-200 nm
Particle tracking analysis method

Laser diffraction / scattering method(Brownian motion tracking analysis method)
6.0

1.0
0.8

4.0
0.6
0.4

2.0

0.2
0.0
0

200

400

600

800

0.0

1000

0

Diameter (nm)

600

800

1000

Number of particles ( /mL)

2.0x104

1.5x104

1.0x104

5.0x10

3

0.0

10min
20min
30min
60min

0

200

400

600

800

1000

Particle size (nm)Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

Industrial Standards Committee

400

Diameter （nm）

Electrical sensing zone method

Dynamic light scattering method

Japanese

200

5Application of ultrafine bubble water for cleaning ofsteel bridges(1/2)

The outline of cleaning test
（1） Research purposes
The effect and validity to an antifreeze in case of utilizing the ultrafine bubble waterand tap water to steel bridge washing work are investigated.
（2） Measuring method
By using a portable surface chloride meter (SSM‐21P manufactured by TOA DKK‐21P),
the salinity on the surface of water was measured before and after cleaning.

Portable salinometer surface計（ＳＳＭ-21Ｐ）

Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

Salinity measurement situation

Washing situation (surrounding washing)

6Japanese

Industrial Standards Committee

Application of ultrafine bubble water for cleaning ofsteel bridges(2/2)

Salinity adsorbed on bridge wall before and after cleaning
Tap water

Cleaning water

Ultrafine Bubble water

Cleaning
position

Beforecleaning

Aftercleaning

Cleaning
rate [%]

Beforecleaning

Aftercleaning

Web face

60.9

10.9

82.1

136.9

1.5

57.4

4.8

91.6

190.9

0

Upper face ofbottom flange

Cleaning
rate [%]

98.2

Highly improved!

100
Highly improved!

Weather

Sunny

Sunny

Sunny

Sunny

Temperature

22

20

22

20

[℃]

7

Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

Japanese

Industrial Standards Committee

Application of ultrafine bubble water for cleaning ofsemiconductor wafer
3000 times

1000 times

10μm

1μm

Washed with ultrapure
water jet + ultrafine
bubbles

1μm

Washed with ultrapure
water jet

Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

10μm

8

Japanese

Industrial Standards Committee

Application of ultrafine bubble water for solar cellwafer separation
The more thinning progresses,
the wafer will be fragile inpeeling sheet.
Ultrafine bubble layer which
is formed in the gap of eachwafer plays the role of acushion.
The wafer sheet is peeled off
with no load.

Excision roller
Wafer
超微細気泡層Ultrafine bubbles layer

Wafer push-up lift
ウェハー突上げリフト

Ref：Ma eda, S., et al., Proc. 1s t Int. Symp. on Multiscale Multiphase Process Engineering, P‐19‐1, (2011).
9

Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

JapaneseThree-layer structure of ISO standards on Fine Bubble Technologies

Industrial Standards Committee

International standardization

Definition of fine bubble:
bubble diameter,
number density, andpresence time in purewater, distilled water, etc.

A
Basic common
standards for
Ultrafine- and micro- bubble

Measurement methods:- Laser diffraction / scattering method- Dynamic light scattering method- Electrical sensing zone method- Particle tracking analysis method(Brownian motion tracking analysis method)- Resonance mass measurement method- Zeta-potential measurement method(Particle tracking / Dynamic light scattering )and other measurement methods

B

Standards for measurement methods
for ultrafine- and micro- bubble technologies

CStandards for individual applications related to various functions
and applications with ultrafine- and micro- bubble technologies :Cleaning effect, Separation effect, Lubrication effect, Electrostatic Charge
Separation effect, Control effect of Physical Properties, etc.

Copyright 2013 Japanese Industrial Standards Committee. All rights reserved.

10