Data Sheet

SemiQCM™ SR for TDMAT
SemiQCM SR Sensor
INFICON SemiQCM SR sensors, installed on the foreline of a semiconductor chamber, offer a proven solution as part of a precursor®

delivery fault detection system. By connecting to FabGuard via an IMM-200, the SemiQCM SR sensor becomes an integrated part of thetool. The sensor is installed via a KF40 cross or KF40 Tee to the foreline and actively monitors excess precursor and precursor derivativesfor each wafer run. The failure to deliver precursor to a wafer can be detected in as little as one wafer. Additional information on thisprecursor delivery fault detection system can be found in the TDMAT Precursor Monitoring with a Quartz Crystal Microbalance Application
Note.

Specifications
Maximum temperature

200 °C

Sensor head size (maximum envelope)

23.87 mm O.D. x 29.19 mm (0.94 in. O.D. x 1.15 in.)

Mounting feedthroughKF40 flange

Materials
Body and holder

304 stainless steel

Springs

Au plated BeCu

Coax line

5 mm (1.88 in.) O.D. stainless steel

Other mechanical parts

18-8 or 304 stainless steel, Hastelloy c276Insulators>99% Al2O3 in vacuum: Teflon used elsewhere

Wire

1.

Ni (in vacuum)2.

Ni plated Cu (elsewhere)®

®

BrazeVacuum process high temperature NiCr alloy

Crystal13.97 mm (0.550 in.) diameter

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Dimensions
LENGTH

Sensor P/N

Length*750-7000-G5

50 mm (1.97 in.)

750-7000-G6

60 mm (2.36 in.)

750-7000-G7

70 mm (2.76 in.)

750-7000-G8

80 mm (3.15 in.)

750-7000-G9

90 mm (3.54 in.)

750-7000-G10

100 mm (3.94 in.)

750-7000-G11110 mm (4.33 in.)

750-7000-G12

120 mm (4.72 in.)

750-7000-G13

130 mm (5.12 in.)

750-7000-G14

140 mm (5.52 in.)

750-7000-G15

150 mm (5.90 in.)*Length tolerance is +0/-6 mm.

Spare Parts List
P/N

Description

750-7013-G1S

Crystal holder assembly

750-7005-G1S

Crystal holder with retainer spring

007-023

Ceramic retainer

750-1090-G10

6 MHz Crystals

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Crystal Holder Assembly Replacement
Replacing the entire crystal holder assembly is recommended over only replacing the crystal, as it takes less time and no additional tools
are required.
Avoid touching the crystal.

1.

Remove the QCM sensor from the foreline by releasing the KF40 clamp.

2.

Pull the crystal holder assembly straight out of the QCM sensor body.

pull

3.

Install the new crystal holder assembly into the sensor body by pressing the crystal holder straight in, making certain that the crystal
holder is completely seated in the sensor body. Some force is required, but ensure that the crystal is not used for leverage.

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4.

Install the QCM sensor back on the foreline with a KF40 clamp and the appropriate centering ring.

Crystal Replacement
Replacing only the crystal is an alternative option, but a crystal snatcher is required and the replacement process takes more time.
Avoid touching the crystal. Only handle the QCM crystal with Teflon tweezers and only handle the outer edgeof the crystal.

1.

Remove the QCM sensor from the foreline by releasing the KF40 clamp.

2.

Pull the crystal holder straight out of the QCM sensor body.

pull

3.

Insert the tapered end of a crystal snatcher (PN 008-007) into the ceramic retainer as shown below and apply a small amount ofpressure. This locks the ceramic retainer to the snatcher and allows the ceramic retainer to be pulled straight out.

4.

Invert the crystal holder to allow the crystal to drop out.

5.

Using Teflon tweezers, grasp the edge of the new crystal. Orient the crystal so the patterned electrode is facing up. Gently insert theedge of the crystal beneath one of the wire segments inside the crystal holder. Release the crystal and ensure the crystal has dropped
past both wire segments in the crystal holder.

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6.

Replace the ceramic retainer. Initially orient the ceramic retainer at an angle to display the spring wire segments in the crystal holder.
Avoid using excessive force when handling the ceramic retainer to prevent breakage. Avoid rotating the ceramic retainer after
installation, to prevent scratching the crystal electrode.

7.

Release the crystal snatcher with a slight side-to-side rocking motion. Using the backside of the crystal snatcher, push the ceramic
retainer to ensure it is completely seated.

8.

Reinstall the crystal holder into the sensor body by pressing the crystal holder straight in, making certain that the crystal holder iscompletely seated in the sensor body. Some force may be required.

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9.

Install the QCM sensor back on the foreline with a KF40 clamp and the appropriate centering ring.

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