1 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/4/23
2024/3/15

Chemicals and company identification

Product name

ＩＴＯ

Product code

EI02

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,inClassification not possible
contact with water,emit flammable gases

Health hazards

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Not classified

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

Environmental hazards

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Category 2B

Respiratory sensitization

Classification not possible

Skin sensitization

Classification not possible

Germ cell mutagenicity

Classification not possible

Carcinogenicity

Category 1B

Reproductive toxicity

Classification not possible

Reproductive toxicity, effects on or via
lactation

Classification not possible

Specific target organ toxicity(single
exposure)Classification not possible

Specific target organ toxicity(repeatedexposure)

Category 1

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

2013/4/23
2024/3/15

Label elements
hazard Pictograms

Health Hazard

健康有害性Signal word

DangerDangerous goods hazard
information

Causes eye irritation.
May cause cancer.
Causes damage to organs through prolonged or repeated exposure Respiratory
system.

Precautionary statements【Safety measures】

Obtain special instructions before use.
Do not handle until all safety precautions have been read and understood.
Do not breathe dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Wear Protective glovess/protective clothing/eye protection/face protection.

3 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date【First-aid measures】

IF IN EYES: Rinse cautiously with water for several minutes. Remove contactlenses, if present and easy to do. Continue rinsing.
IF exposed or concerned: Get medical advice/attention.
Get medical advice/attention if you feel unwell.
If eye irritation persists: Get medical advice/attention.

【Storage】

Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-

Composition/information on ingredients

Substance/Mixture

MixtureChemical nameIndium oxide

Tin oxide

Chemical formula

In2O3

SnO2

Concentration or concentration
range

In2O3 ： 88- 99%
SnO2 ： 1- 12%
Total = 100%

CAS No.

1312-43-2

18282-10-5

TSCA Inventry

Indium oxide (In2O3)

Tin oxide (SnO2)EINECS number

215-193-9

242-159-0

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

2013/4/23
2024/3/15

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if present
and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

Firefighting measures4 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/4/23
2024/3/15

Suitable extinguishing media

It uses a water mist, dry chemicals, fire foam, carbon dioxide depending on theneighboring situation and the situation of the fire.

Unsuitable extinguishing media

Because a fire might spread through the outskirts, It avoid direct stick irrigation.

Specific hazards

In the case of fires, a toxic decomposition product may occur.

Specific extinguishing methods

It performs the fire fighting from windward.
Restrict access to the area around the fire location to persons other than those
involved with the fire.
It moves a container from the fire area if not dangerous.

Special protective equipment for
firefighters

On the occasion of fire extinguishing work, it wears appropriate personal
protective equipment and rescue suit.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
procedures

It prohibits the entrance except the person concerned.
The worker wears appropriate personal protective equipment (in item of"8.revelation prevention and protection measures" reference) and avoids eyes,
contact and inhalation to skin.

Environmental precautions

It avoids an outflow to the environmental average of the product to havepossibilities to influence neighboring environment.

Methods and material forcontainment and cleaning up

It collects it in sky containers as if sweeping the scattered thing, and gathering
you, or being able to absorb it with a vacuum sweeper, and from scattering not
pitching a camp.
The prohibition of handling and eating and drinking in neighboring of the storagearea.
It prevents the inflow to a drainage, a sewer, a basement or the closedown place.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personal
protection” and wear protective equipment.

Safety handling precautions

It prevents you from producing dust.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,
including any incompatibilities
Safe storage conditions

It avoids direct rays of the sun and keeps it in the cool and dark space.
Store locked up.

Safety packaging material

It uses the container which it can seal up without damage and the leak.

5 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

SECTION 8

Date of Issue
Revised Date

2013/4/23
2024/3/15

Exposure controls/personal protection
In2O3

SnO2

TLV-TWA: 0.1 mg/㎥ (as indium)(indium and the compound)(2016 version)

TLV-TWA: 2 mg/㎥ (Inhalable fraction of theaerosol)(Tin, and inorganic compounds, excluding Tin
hydride, as Sn)(2019 version)

Permissible concentration
ＡＣＧＩＨ

Appropriate engineering controls

In the work shop which dust produces, it uses a device, an apparatus sealed up by
all means or a local ventilator.
The capture velocity of the local exhaust ventilation is prescribed to 1.0m persecond.

Individual protection measures,such as personal protective
equipment

SECTION 9

Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

Solid

Form

Pellets, granules

ColourPale yellow

Odour

None

In2O3

SnO2

Melting point/freezing point

1,912 degrees Celsius - 2,000 degrees
Celsius

1127℃

Boiling point or initial boiling point
and boiling range

No data available

1800～1900℃

Flammability

No data available

No data available

Upper/lower flammability or
explosive limits

No data available

Not applicableFlash point

No data available

Not applicableAuto-ignition temperature

No data available

Not applicable

Decomposition temperature

850℃

No data available6 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/4/23
2024/3/15

pH

No data available

4～5 (20℃) (GESTIS (Access on August2019))

Kinematic viscosity

No data available

Not applicable

Water

Insoluble

Insoluble

Other solvents

No data available

No data available

Partition coefficient: noctanol/water

No data available

No data available

Vapour pressure

0.01 hPa (Sigma-aldrich)No data available

Density and/or relative density

7.18

6.95 g/㎤ (ICSC (2004))

Solubility（Density）※ 3.9 ~ 4.8 (pellet) as ITO

Relative vapor density

No data available

Not applicable

Particle characteristics

No data available

No data available

Other information

No data available

No data available

In2O3

SnO2

Reactivity

It is stable in the normal handling.

See “Possibility of hazardous reaction.”

Chemical stability

It is stable in normal handling.

No data available

Possibility of hazardous reactions

Dangerous adverse reaction is not caused
under the normal handling condition.

Reacts strongly with strong reducing agents.

Conditions to avoid

It avoid direct rays of the sun and keep it in Contact with incompatible materials
the cool and dark space.

Incompatible materials

Oxidizer, reducer

SECTION 10

Stability and reactivity

Hazardous decomposition products In the case of fires, a toxic decomposition
product may occur.

SECTION 11

Strong reducing agents
No data available

Toxicological information
In2O3

SnO2

Acute toxicity(oral)

For a rat LD50 price,> 10,000 mg/kg(PATTY, (6th, 2012))

LD50 for rats: > 2,000 mg/kg (REACH
registration dossier (Access on August2019))

Acute toxicity(dermal)

No data available

No data available

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Solid (GHS definition)

Acute toxicity （Inhalation:
Vapours）

Solid (GHS definition)

No data available7 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/4/23
2024/3/15

Acute toxicity （Inhalation: Dusts
and mists）

No data available(1) LC50 (aerosol, 4 hours) for rats: > 2.04
mg/L (REACH registration dossier (Accesson August 2019)).
(2) As for (1), it is described that 2.04 mg/L
was the highest chamber concentrationachieved (REACH registration dossier(Access on August 2019)).

Skin corrosion/irritation

Classification not possible due to lack of
In an in vitro skin corrosion test according todata. Besides, it is described that indium and OECD TG 431 using an artificial human skinindium compounds are irritating to the skin model (EpiDerm), survival rates were > 50%(HSDB (Access on June 2016)). Since theand > 15% after 3-minute and 60-minuteinformation source is listed in List 3, and the exposures, respectively (REACH registration
original literature cannot be confirmed, this dossier (Access on August 2019)).
information was not adopted.

Serious eye damage/irritation

It is described that indium irritates the eyes In an eye irritation test according to OECDand the respiratory tract, and causes coughs TG 405 with rabbits, slight conjunctival
and shortness of breath by inhalation
redness and edema were observed one hour
(Environmental Risk Assessment forafter application, however, these changes
Chemical Substances Vol.11 (Ministry of the were fully reversible after 24 hours (REACH
Environment, 2013)). Therefore, thisregistration dossier (Access on August
substance was classified in Category 2B.
2019)).

Respiratory or skin sensitization

No data available

Germ cell mutagenicity

Classification not possible due to lack of
No data available
data. No in vivo data is available. As for invitro data, it was reported a bacterial
reversion mutation test was negative(Environmental Risk Assessment for
Chemical Substances Vol.11 (Ministry of theEnvironment, 2013)).

The EC3 value could not be calculated as
the stimulation indices of all concentrations
were below 3 in a mouse local lymph node
test (LLNA) according to OECD TG 429, andit was judged as negative (REACH
registration dossier (Access on August2019)).

8 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Carcinogenicity

No data is available regarding carcinogenicity No data available
in humans. As for experimental animals, in an
inhalation exposure carcinogenicity test inwhich both rats or mice were exposed toindium tin oxide (ITO), containing 90.06% of
indium oxide and 9.74% of tin oxide, atconcentrations of 0.01 - 0.1 mg/㎥ for 2
years (26 weeks only for rats in a highconcentration group due to lung injury), in
mice, no carcinogenic response occurred. As
for rats, however, increases in theincidences of lung tumors such asbronchiolar-alveolar adenomas andcarcinomas were observed in both males andfemales (OEL Documentations (Japan
Society For Occupational Health (JSOH),
2013), Environmental Risk Assessment for
Chemical Substances Vol.11 (Ministry of theEnvironment, 2013)). Also, in a test in whichrats or mice were exposed to indium
phosphide by inhalation at concentrations of
0.03 - 0.3 mg/㎥, for 2 years for the lowconcentration groups and for 21 - 22 weeks
for the medium- and high-concentrationgroups (shortened due to lung injury),
bronchiolar-alveolar adenoma andcarcinomas were observed in both rats andmice. In addition, increases in the incidencesof pheochromocytomas of the adrenal gland,mononuclear cell leukemia, tumors of theskin and the mammary gland were observedin rats; and the incidences of liver tumors
were significantly increased in mice (OEL
Documentations (Japan Society For
Occupational Health (JSOH), 2013)), NTP
TR499 (2001), Environmental Risk
Assessment for Chemical Substances Vol.
11 (Ministry of the Environment, 2013)).
As the classifications by otherorganizations, IARC classified indium
phosphide in Group 2A (IARC 86 (2006)), andthe Japan Society For Occupational Healthclassified hardly soluble inorganic indium
compounds in Group 2A (Recommendation of
Occupational Exposure Limits (Japan
Society For Occupational Health (JSOH),
2015)). Therefore, this substance wasclassified in Category 1B for this hazard
class.
Besides, because the classifications byother organizations were published after theprevious classification, the classification
result changed this time.

Reproductive toxicity

No data available

No data available

2013/4/23
2024/3/15

9 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/4/23
2024/3/15

Specific target organ toxicity(single Classification not possible due to lack of
No data available
exposure)
data. Besides, although in the Environmental
Risk Assessment for Chemical Substances
Vol.11 (Ministry of the Environment, 2013),
indium is described as irritant to therespiratory tract, it was quoted from ICSC,
and the original literature could not be
confirmed. Also it is not clear whether this isa description concerning only metallic indium
or a description concerning indium
compounds in general.

Specific target organ
toxicity(repeated exposure)

As for humans, in Japan, there are case(1) Inhalation exposure to the dust and fumereports of interstitial pneumonitis andof tin (oxide) is recognized to result infibrosis and investigation reports showing
stannosis, mild pneumoconiosis (ACGIH (7th,increases in KL-6, SP-D and SP-A values, 2019)).
which are indicators of interstitial
pneumonitis, in workers at the manufacturing [Reference Data, etc.]
and processing plants of indium tin(2) In a study in which this substance wascompounds (ITO), recycling plants of indium administered by feeding to rats for 13 weeks,
and indium oxide manufacturing plants; and it no effect was observed at up to 440
has been clarified that lung diseases, mostly mg/kg/day (ATSDR (2005)).
interstitial pneumonitis, occur due toexposure to ITO or indium oxide (OEL
Documentations (Japan Society For
Occupational Health (JSOH), 2013)).
As for experimental animals, in a 13-weekinhalation exposure test using rats, effects inthe lungs (infiltration of alveolar
macrophages, alveolar proteinosis,
hyperplasia of alveolar epithelium, etc.) wereobserved at 1 mg/㎥ (converted guidancevalue: 0.00072 mg/L), which is equivalent toCategory 1. However, for the oral route, in a
3-month administration toxicity study usingrats dosed by feeding, no toxic effects wereobserved even at a dose equivalent to 4,000
mg/kg/day (Environmental Risk Assessment
for Chemical Substances Vol.11 (Ministry of
the Environment, 2013)).
Besides, in the previous classification, in
addition to respiratory organs, the skeletonand digestive system were determined astarget organs, based on the information that
the TLV-TWA for indium and its compounds
was set based on the skeletal andgastrointestinal effects, and particularly
pulmonary toxicity by inhalation into thelungs in ACGIH (7th, 2001). However, thiswas based on a "Preliminary Investigation"
on exposure to indium compounds by the
EPA. As it was a preliminary investigationand is also considered to have low reliability
due to no information other than thesymptom names based on complaints, etc., it
was not adopted as the evidence for theclassification.
Therefore, this substance was classified in
Category 1 (respiratory organs).

10 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

Aspiration hazard

No data available

Other information

No data available

SECTION 12

Date of Issue
Revised Date

2013/4/23
2024/3/15

No data available

Ecological information
In2O3

SnO2

Toxicity
Hazardous to the aquatic
No data available
environment Short-term(acute)No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data available

Persistence and degradablility

No data available

No data available

Bioaccumulative potential

No data available

No data available

Mobility in soil

No data available

No data available

Hazard to the ozone layer

No data available

No data available

Other adverse effects

No data available

No data available

SECTION 13

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
In2O3

SnO2

UN number

Not applicableNot applicable

UN proper shipping nameNot applicableNot applicable

UN classification

Not applicableNot applicable

Transport hazard class

Not applicableNot applicable

Packing group

Not applicableNot applicable

Hazardous to the aquatic
environment

No data available

No data available

Maritime transport in bulk
according to IMO instruments

No data available

No data available

International regulation

11 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/4/23
2024/3/15

Japanese lows and regulations

Land regulation information Not applicable
Maritime regulatory information nonhazardous materials
Aviation regulatory information nonhazardous materials

Refer to “15. Regulatory information.”

Special precautions for users

When transporting, protect from direct
sunlight and take on cargo without breakageof container, corrosion and leakage.
Do not stack heavy good thereupon.

When transporting, protect from direct
sunlight and take on cargo without breakageof container, corrosion and leakage.
Do not stack heavy good thereupon.

Special Provisions--

SECTION 15

Regulatoly information（Japan）
In2O3

SnO2

Occupational Safety and Health
Law

There is it in the case of an application or an There is it in the case of an application or an
application
application

PRTR Law

There is it in the case of an application or an Not applicableapplication

Poisonous and Deleterious
Substances control Law

Not applicable

Labor Standards Act

There is it in the case of an application or an Not applicableapplication

Chemical substances control Law

Not applicableNot applicable

Fire fighting Law

Not applicableNot applicable

Air Pollution Control Act

There is it in the case of an application or an Not applicableapplication

Water Pollution Prevention Act

Not applicableNot applicable

Water Supply Act

Not applicableNot applicable

Sewerage Act

Not applicableNot applicable

Marine Pollution Prevention Law

Not applicableNot applicable

Waste Management and Public
Cleansing Act

Not applicableNot applicable

Note

Ensure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16

Not applicable

Other information

Please refer to Japan Ministry of Health, Labour and Welfare notification.
①About thorough prevention of healthy obstacle by handling work such as the indium tin oxide②A technical indicator about the prevention of healthy obstacle by handling work such as the indium tin oxide（1222 the second
December 22, 2010）12 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EI02
ＩＴＯ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/4/23
2024/3/15

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)