Emergent Oxide Interface Phenomena meets
Novel Growth Techniques

thFriday, July 16 2021
10:00–17:30

Abstracts

Transport properties of the correlated metal SrVO3 in the ultraclean limit

Roman Engel-Herbert
Department of Materials Science and Engineering, Department of Chemistry, Department of Physics
The Pennsylvania State University, University Park, PA 16802 USA.
email: rue2@psu.edu

Progress in thin film synthesis resulting in ever cleaner materials enables experimental access to theintrinsic properties of materials. While this approach has been perfected in the case of establishedsemiconductor material systems using molecular beam epitaxy and resulted in the discovery of new
physical phenomena, it is still in its infancy for more complex material system with a more unfavourable
growth kinetics, such as perovskite oxides, in which carriers experience sizeable electron-electron coupling.
In this talk I will present efforts to grow ever cleaner perovskite oxide systems exemplifying this on thecorrelated metal SrVO3. Changes in the magnetotransport properties as a function of film orientation anddegree of disorder will be discussed. Transport peculiarities observed at high magnetic fields in theultraclean limit points towards a pronounced scattering time anisotropy that has remained elusive insystems with pronounced defect density.
.

Superconductivity at LaAlO3/KTaO3 interfaces
Yanwu Xie
Department of Physics, Zhejiang University, China

Abstract:
Very recently superconductivity with a transition temperature (Tc) up to 2.2 K was discoveredat KTaO3-based interfaces [1-3]. In this talk we will present our progresses in this newly
discovered superconducting oxide interface. We confirmed that the superconductivity depends
strongly on the orientation of the interface and discovered a Tc ~0.9 K superconductivity at(110)-orientated interface [2]. We controlled the superconductivity of (111)-orientated interface
with electric field, achieving a superconductor-to-insulator quantum phase transition [3].
Strikingly, we found that the tuning effect was achieved by change in the spatial profile of thecarriers in the interface and hence, effective disorder, rather than carrier density. A few
interesting quantum phenomena (i.e. quantum metal) that are related to the interplay between
disorders and two-dimensional superconductivity were observed. We also observed a critical
thickness of LaAlO3, ~3 nm [4]. The interface is conducting (insulating) when LaAlO 3 is thicker(thinner) than this thickness. Our further study on this critical thickness suggests that thedeterminant mechanism of the interface conduction is the electron transfer from oxygen
vacancies in the LaAlO3 film to the KTaO3 substrate.
References:[1]

Changjiang Liu, Xi Yan, Dafei Jin, Yang Ma, Haw-wen Hsiao, Yulin Lin, Terence M.

Bretz-Sullivan, Xianjing Zhou, John Pearson, Brandon Fisher, J. Samuel Jiang, Wei Han,Jian-Min Zuo, Jianguo Wen, Dillon D. Fong, Jirong Sun, Hua Zhou, and Anand Bhattacharya,Science 371, 716-721 (2021).
[2] Zheng Chen, Zhongran Liu, Yanqiu Sun, Xiaoxin Chen, Yuan Liu, Hui Zhang, Hekang Li,Meng Zhang, Siyuan Hong, Tianshuang Ren, Chao Zhang, He Tian, Yi Zhou, Jirong Sun, andYanwu Xie, Phys. Rev. Lett. 126, 026802 (2021).
[3] Zheng Chen, Yuan Liu, Hui Zhang, Zhongran Liu, He Tian, Yanqiu Sun, Meng Zhang, YiZhou, Jirong Sun, and Yanwu Xie, Science 372, 721-724 (2021).
[4] Yanqiu Sun, Yuan Liu, Siyuang Hong, Zheng Chen, Meng Zhang, and Yanwu Xie, “Criticalthickness in superconducting LaAlO3/KTaO3(111) heterostructures”, unpublished.

From Molecular Beam Epitaxy to high magnetic field
quantum oscillations and charge ordering
Yoshiharu Krockenberger

NTT Basic Research Laboratories, NTT Corporation, 243-0198 Atsugi, Japan

ABSTRACT: Cuprate superconductors present a major challenge in condensed
matter physics not only due to their electron correlations but also due to their complex crystal structure. Complex crystal structures, i.e. various cations at various
lattice positions, demand for the utmost caretaking when being synthesized. In
particular, Molecular Beam Epitaxy is well known to be the foremost versatile tooland technique that allows for the synthesis of such materials without the necessity to compromise on impurity phases. First, I introduce our custom designed
Molecular Beam Epitaxy equipment which is empowered by e-guns, not effusion
cells, and controlled by electron impact emission spectroscopy. After presenting
several material systems I present high magnetic field quantum oscillation data on
films synthesized by our Molecular Beam Epitaxy systems. Furthermore, I show
results on the charge-ordering mechanism using resonant elastic x-ray scattering.
These data support the notion that the appearance of superconductivity in cuprate
superconductors is tied to the coordination of the copper in these systems. Using
molecular beam epitaxy also infinite-layer cuprates, i.e., a thermodynamically unstable phase, can be synthesized. Moreover, superconducting thin films of the lowtemperature superconductor Sr2 RuO4 were grown by molecular beam epitaxy. Thehighest superconducting transition temperature was 1.4 K and those films showed aresidual-resistivity ratio (RRR) of 114. High magnetic field (up to 24 T) magnetoresistance measurements above 0.5 K show Shubnikov-de Haas oscillations thus
allowing us to study the intrinsic electronic structure of this material along with
the influence of in-plane epitaxial strain in comparison to bulk samples. I will conclude with an outlook that the top of the superconducting transition temperature incuprate superconductors has not been reached, yet.

Emergent Oxide Interface Phenomena Meets Novel Growth Techniques, RIKEN CEMS, July 16, 2021.

Thermal Laser Epitaxy: New Opportunities for Oxide Epitaxy
Wolfgang Braun,* Thomas J. Smart, Dong Yeong Kim, Sander Smink, Hans Boschker,
Lena Nadine Majer, Fabian Felden, Jochen Mannhart
Max Planck Institute for Solid State Research, Heisenbergstraße 1, 70569 Stuttgart, Germany*Corresponding author: w.braun@fkf.mpg.deABSTRACT. In thermal laser epitaxy, both the substrate and the individual evaporation sources are heatedby high-power CW lasers. This method combines the advantages of MBE and PLD, allowing the efficient
thermal evaporation and epitaxial deposition of any combination of elements from the periodic table.
We demonstrate and discuss the deposition of elemental layers from the majority of the elements in theperiodic table, including W, Ta, C, Ir and Si, at 1 Å/s with laser powers less than 500 W, the growth of binaryoxides from the elements in ozone/oxygen background pressures as high as 10 -2 hPa, as well as the epitaxial
growth of refractory metals on sapphire at substrate temperatures well above 1000 °C with chamberpressures during growth below 2×10-10 hPa.
Keywords: thermal laser epitaxy, laser evaporation, oxide epitaxy, adsorption-limited growth

In oxide epitaxy, MBE is generally regarded as the method producing the highest quality
heterostructures. To address new opportunities in adsorption-limited deposition, however, higher substrateand source temperatures are required, together with higher active oxygen background pressures. Following
pioneering work in the 1960s and 1980s[1], we explore continuous wave (CW) laser heating for both thesubstrate and individual elemental sources to overcome these limitations[2]. In such a system, shown inFig. 1, a long wavelength infrared laser is used to directly heat oxide substrates that are transparent to theradiation of standard heaters, allowing ultrahigh substrate temperatures above 2000 °C. Most elements inthe periodic table are metals with melting points at which the vapor pressure is in or even above the rangeof fluxes required for deposition. Under these conditions, heating the central region of a source target by alaser produces temperature gradients large enough so that the target does not melt as a whole, as
demonstrated for a 12 mm diameter Si source in Fig. 2. All these materials can therefore be evaporated
without crucibles, by merely suspending them between support points. Using a working distance of 60 mm,
we achieve growth rates of more than 1 Å/s. We have experimentally verified such crucible-free
evaporation already for a majority of the non-radioactive elements in the periodic table (Fig. 3)[3].
We obtain chamber pressures of 6×10−11 hPa at substrate temperatures of 1600 °C and 2×10 −10 hPa
during the deposition of Ru at a rate of 0.2 Å/s (Figs. 4/5). The source targets are transferable in the same
way as the substrates, allowing a flexible operation with different source materials in subsequent runs. Thelaser heating is energy efficient, with less than 500 W sufficient for all elements in the entire periodic tablefor deposition on 2” substrates (Fig. 6). We have achieved reliable deposition of oxides by evaporation inup to 10−2 hPa ozone/oxygen, such as the oxide layer shown in Fig. 7. As there are no hot filaments in thevacuum, both highly corrosive background gases and ultra-pure operation are possible. The small source
targets enable short working distances, allowing an efficient use of the source material, e.g. when working
with isotope pure materials. The same scaling arguments as in MBE apply, permitting a straightforward
upscaling of the epitaxy process to large substrate sizes. The process is agile, the substrate and the sources
can be ramped at extreme rates due to their small heat capacity with direct heating and the absence ofcrucibles and the associated thermal expansion mismatch problems, thereby allowing high throughput
volumes. And finally, the process chamber can be very small and simple, allowing both long uptimes andfast and easy rebuild or replacement in case of contamination or damage.
[1] H.M. Smith, A.F. Turner, Appl. Opt. 4 (1965) 147; G. Groh, J. Appl. Phys. 39 (1968) 5804; V.S. Ban, D.A.
Kramer, J. Mater. Sci. 5 (1970) 978; H. Sankur, R. Hall, Appl. Opt. 24 (1985) 3343; J.T. Cheung, H. Sankur, Crit.
Rev. Solid State Mater. Sci. 15 (1988) 63.
[2] W. Braun, J. Mannhart, AIP Adv. 9 (2019), 85310.
[3] T.J. Smart, J. Mannhart, W. Braun, J. Laser Appl. 33 (2021) 22008.

Emergent Oxide Interface Phenomena Meets Novel Growth Techniques, RIKEN CEMS, July 16, 2021.

Fig. 2: Melt pool on a 12 mm diameter Si source

Fig. 1: Schematic representation of a TLE system. Both the substrate andthe sources are heated by CW lasers, both can be transferred in and out of
the growth chamber.

Fig. 4: RHEED pattern of Al 2O3 (0001) surface during
substrate preparation at 1600 °C with 7.5x10 -11 hPa chamberpressure

Fig. 3: Elements that have been demonstrated and are possible to evaporate
or sublimate by thermal laser evaporation.

Fig. 5: Epitaxial Ru layer grown on the sapphire surface shownin Fig. 5 at 1000 °C with 2x10-10 hPa chamber pressure.

Fig. 6: Power vs. growth rate for selected elemental metals. The melting
points are marked by colored symbols.

Fig. 7: Oxide layer grown by laser evaporating
Nb metal in an oxygen/ozone atmosphere of 10 -3
hPa on an unheated Si substrate.

Electronic structure of buried oxide interfaces explored by soft-X-ray ARPES
Vladimir N. STROCOV (Swiss Light Source, Paul Scherrer Institute, Switzerland)
Pushing ARPES to soft-X-ray photon energies enhances its k-resolving capabilities with larger probing
depth and resonant photoexcitation allowing chemical specificity. These spectroscopic abilities makesoft-X-ray ARPES ideal for 3D materials, buried interfaces and impurity systems [1]. I will focus on its
applications to oxides and their interfaces, in particular in the context of e-ph interaction.
Ce-doped CMO. – The applications to 3D systems are based on sharp definition of out-of-plane
momentum resulting from the enhanced photoelectron delocalization. We show the development ofa Fermi surface in CMO upon Ce doping, where 3D mobile electrons coexist with much heavier quasi2D strongly coupled polarons. This dichotomy results from different filling of the energy bands
compared to the phonon energy going beyond the Migdal approximation [2].
LAO/STO. – Resonant soft-X-ray ARPES at the Ti L-edge exposes electron dispersions of the dxy-,dyz- and dxz-derived subbands of the mobile electrons in the interface quantum well buried below theLAO layer. The peak-dip-hump spectral function of these electrons manifests polaronic nature of theinterface charge carriers, which fundamentally limits their temperature-dependent mobility [3].
γ-Al2O3/STO. – Owing to the symmetry breaking between the spinel γ-Al2O3 and perovskite STO,
the dxy-states in STO shift above the dxz/dyz ones and depopulate. The resulting electron-density shift
away from the defect-rich interface and weakening of the e-ph interaction contribute to the giant
mobility boost compared to LAO/STO observed in transport experiments [4].
Finally, I mention the capabilities of soft-X-ray ARPES to other classes of materials such as 3D
topological materials, buried metal/semiconductor interfaces, magnetic impurities, etc. In theinstrumental perspective, I introduce iMott the multichannel spin detector, whose giant efficiency
boost will allow access to spin textures of buried heterostructure and impurities.
[1] V.N. Strocov et al, J. Electron Spectr. and Rel. Phen. 236 (2019) 1[2] M.-A. Husanu et al, Comm. Phys. 3, 62 (2020)[3] C. Cancellieri et al, Nature Comm. 7 (2016) 10386[4] A. Chikina et al, ACS Nano 15 (2021) 4347

Towards spin-orbit coupling effects in strong electron correlation systems
Denis Maryenko
RIKEN Center for Emergent Matter Science, Japan
Oxide compounds constitute a wide material class featuring a wealth of quantum phenomena andfunctionalities governed by the interplay of various degrees of freedom and electron correlation
effects [1]. Particularly, materials with a relativistic spin-orbit coupling interaction (SOI) are nowadays
in the spotlight. Large SOI affects both electronic and magnetic structure and is anticipated to leadto the emergence of novel electronic quantum phases laying the ground to future technologies.
Thereby, the control of materials and their interfaces is inevitable to unravel the material
fundamentals.
In this talk, I will discuss a surprising observation of the SOI in a high mobility two-dimensional
electron system of ZnO heterostructures [2]. It constitutes perhaps one of the tantalizing aspects ofreach spin physics found in ZnO [3, 4]. Striking here is that the SOI appears in the regime of strong
Coulomb interaction. In fact, the SOI can profoundly compete against Coulomb interaction, whichcould lead to the emergence of unconventional electronic and spin phases [5]. Thus, the SOI
observation unravels another facet of emerging phenomena in ZnO and marks ZnO as an appealing
platform enabling to explore the interplay between correlation effects and the spin-orbit coupling, oneof the outstanding problems in modern solid state physics. Furthermore, I will present the recent
activities on developing heterostructures based on oxide tantalate material platform, in which both
SOI and electron correlation effects are stronger pronounced than in ZnO.
References:[1] Emergent Phenomena at oxide interfaces, H. Y. Hwang et al., Nat. Materials 11, 103 (2012).
[2] Interplay of spin-orbit coupling and Coulomb interaction in ZnO-based electron system.
D. Maryenko et al., Nature Communications 2021.
[3] Observation of anomalous Hall effect in a non-magnetic two-dimensional electron system.
D. Maryenko et al., Nature Communications 8, 14777 (2017).
[4] Spin-selective electron quantum transport in nonmagnetic MgZnO/ZnO-heterostructures.
D. Maryenko et al., Phys. Rev. Lett. 115, 197601 (2015).
[5] Correlated quantum phenomena in the strong spin-orbit regime. W. Witczak-Krempa et al.,Annu. Rev. Condens. Matter Phys. 5, 57 (2014).