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K. Yamauchi, H. Mimura, K. Inagaki and Y. Mori: Figuringwith sub­ nanometer­level accuracy by numerically con­trolled elastic emission machining, Review of ScienticInstruments 73(11), 4028_4033 (2002).
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Current status of the development and application ofultraprecise hard X­ray mirrors and a perspective
Hidekazu MIMURA
Satoshi MATSUYAMA

Department of Precision Science & Technology Graduate School ofEngineering, Osaka University
2_1 Yamadaoka Suita­shi, Osaka 565_0871, Japan
Department of Precision Science & Technology Graduate School ofEngineering, Osaka University
2_1 Yamadaoka Suita­shi, Osaka 565_0871, Japan

Abstract The performance of hard X­ray mirror optics has been rapidly progressed, which enable us to use
the diraction limited focused beam with a size less than 100 nm. In this review, the development history anda perspective on it are presented.

180  úËõ May 2010 Vol.23 No.3