1 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES04
ＳｉＯ２ （Fused）

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product name

ＳｉＯ２ （Fused）

Product code

ES04

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）

No data available

Label element
hazard Pictograms

No data available

Signal word

No data available

Dangerous goods hazard
information

No data available

Precautionary statement【Safety measures】

Obtain special instructions before use.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Do not breathe dust/fume/gas/mist/vapours/spray.

【First-aid measures】

If swallowed：
Call a poison center or doctor/physician if you feel unwell.
Rinse mouth.
If in eyes：
Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
Immediately call poison center or doctor/physician【Storage】

Store in a well-ventilated place, keep container tightly closed.
Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-2 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES04
ＳｉＯ２ （Fused）

SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date

Composition/information on ingredients

Substance/Mixture

SubstanceChemical name

Silica, vitreous

Chemical formula

SiO2 (Fused)

Concentration or concentration
range

99.9<CAS No.

60676-86-0

TSCA Inventry

Silica, vitreous

EINECS number

262-373-8

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data availableSECTION 5

2013/10/16
2024/3/15

Firefighting measures

Suitable extinguishing media

It uses a water mist, dry chemicals, fire foam, carbon dioxide depending onneighboring fires.

Unsuitable extinguishing media

Because a fire might spread through the outskirts, It avoid direct stick irrigation.

Specific hazards

In the case of fires, a toxic decomposition product may occur.

Specific extinguishing methods

It performs the fire fighting from windward.
Restrict access to the area around the fire location to persons other than those
involved with the fire.
If it is not dangerous to do so, move the container out of the fire area.

Special protective equipment forfirefighters

On the occasion of fire extinguishing work, it wears appropriate personal
protective equipment and rescue suit.

3 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES04
ＳｉＯ２ （Fused）

SAFETY DATA SHEET
rev. 8.0

SECTION 6

Date of Issue
Revised Date

2013/10/16
2024/3/15

Accidental release measures

Personal precautions, protective
equipment, and emergency
procedures

It prohibits the entrance except the person concerned.
The worker wears appropriate personal protective equipment (in item of"8.revelation prevention and protection measures" reference) and avoids eyes,
contact and inhalation to skin.

Environmental precautions

It avoids an outflow to the environmental average of the product to havepossibilities to influence neighboring environment.

Methods and material forcontainment and cleaning up

It collects it in sky containers as if sweeping the scattered thing, and gathering
you, or being able to absorb it with a vacuum sweeper, and from scattering not
pitching a camp.
The prohibition of handling and eating and drinking in neighboring of the storagearea.
It prevents the inflow to a drainage, a sewer, a basement or the closedown place.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

Safety handling precautions

It prevents you from producing dust.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,
including any incompatibilities
Safe storage conditions

Safety packaging material

SECTION 8

The storage area shall be equipped with the necessary lighting and ventilationequipment to store or handle dangerous or hazardous substances.It avoids directrays of the sun and keeps it in the cool and dark space.
It uses the container which it can seal up without damage and the leak.

Exposure controls/personal protection
SiO2 (Fused)

Permissible concentration
ＡＣＧＩＨ

Appropriate engineering controls
Individual protection measures,such as personal protective
equipment

TLV-TWA: 0.1 mg/㎥
(respiratory)(amorphous silica)(2015 version)
In the work shop which dust produces, it uses a device, an apparatus sealed up
by all means or a local ventilator.

4 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES04
ＳｉＯ２ （Fused）

SAFETY DATA SHEET
rev. 8.0

SECTION 9

Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Date of Issue
Revised Date

Physical and chemical properties

Appearance
Physical state

SolidFormPellets, granules

ColourTransparency

Odour

None

SiO2 (Fused)
Melting point/freezing point

1610℃

Boiling point or initial boiling point
and boiling range

2,503°C (760 mmHg) (CAS No.: 7631-86-9) (NITE-CHRIP (2015))

Flammability

No data available

Upper/lower flammability or
explosive limits

Noninflammability (ACGIH (7th,2001))

Flash point

Noninflammability (ACGIH (7th,2001))

Auto-ignition temperature

Noninflammability (ACGIH (7th,2001))

Decomposition temperature

No data available

pH

As synthetic amorphous silica (a CAS number: 7631-86-9): 4-9 (SIDS (2006))

Kinematic viscosityNo data available

Solubility
WaterInsoluble

Other solvents

No data available

Partition coefficient: noctanol/water

No data available

Vapour pressure

0 mmHg(20℃) (HSFS (2002))

Density and/or relative density

2.2（Density）
Relative vapor density

No data available

Particle characteristics

No data available

Other information

No data available

SECTION 10Stability and reactivity

2013/10/16
2024/3/15

5 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES04
ＳｉＯ２ （Fused）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

SiO2 (Fused)
Reactivity

It is very stable for heat

Chemical stability

No data available

Possibility of hazardous reactions

No data available

Conditions to avoid

No data available

Incompatible materials

No data available

Hazardous decomposition products No data available

SECTION 11

Toxicological information
SiO2 (Fused)

Acute toxicity(oral)

No data available

Acute toxicity(dermal)

No data available

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Acute toxicity （Inhalation:Vapours）

Solid (GHS definition)

Acute toxicity （Inhalation: Dustsand mists）

No data available

Skin corrosion/irritation

No data available

Serious eye damage/irritation

No data available

Respiratory or skin sensitization

No data available

Germ cell mutagenicity

No data available

Carcinogenicity

This substance has no information on carcinogenicity either in humans or inexperimental animals.
But the carcinogenicity classification result Group 3 in IARC for amorphous silica(IARC 68 (1997)) is judged to be applicable because this substance belongs toamorphous silica.
Namely, it was classified as "Classification not possible" in this hazard class.

Reproductive toxicity

No data availableSpecific target organ toxicity(single No data availableexposure)Specific target organtoxicity(repeated exposure)

No data available

Aspiration hazard

No data available

Other information

No data available

SECTION 12

Ecological information
SiO2 (Fused)

Toxicity6 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES04
ＳｉＯ２ （Fused）

SAFETY DATA SHEET
rev. 8.0

Hazardous to the aquatic
environment Shortterm(acute)Hazardous to the aquatic
environment Longterm(chronic)

No data available

Persistence and degradablility

No data available

Bioaccumulative potential

No data available

Mobility in soil

No data available

Hazard to the ozone layer

No data available

Other adverse effects

No data available

SECTION 13

Date of Issue
Revised Date

2013/10/16
2024/3/15

No data available

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
SiO2 (Fused)

International regulation
UN number

Not applicable

UN proper shipping nameNot applicable

UN classification

Not applicable

Transport hazard class

Not applicable

Packing group

Not applicable

Hazardous to the aquatic
environment

No data available

Maritime transport in bulk
according to IMO instruments

No data available

Japanese lows and regulations

Land regulation information Not applicable
Maritime regulatory information non-hazardous materials
Aviation regulatory information non-hazardous materials

Special precautions for users

Requires retention of yellow card when transporting.
When transporting, protect from direct sunlight and take on cargo without
breakage of container, corrosion and leakage.
Do not stack heavy good thereupon.

Special Provisions-7 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES04
ＳｉＯ２ （Fused）

SAFETY DATA SHEET
rev. 8.0

SECTION 15

Date of Issue
Revised Date

2013/10/16
2024/3/15

Regulatoly information（Japan）
SiO2 (Fused)

Occupational Safety and Health
Law

Not applicable

PRTR Law

Not applicable

Poisonous and Deleterious
Substances control Law

Not applicable

Labor Standards Act

Not applicableChemical substances control LawNot applicable

Fire fighting Law

Not applicable

Air Pollution Control Act

Not applicable

Water Pollution Prevention Act

Not applicable

Water Supply Act

Not applicable

Sewerage Act

Not applicable

Marine Pollution Prevention Law

There is it in the case of an application or an application

Waste Management and Public
Cleansing Act

Not applicable

NoteEnsure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)