ㆊᷰធ࿾㔚࿶ߦࠃࠆ㕒㔚᳇᡼㔚ߩᬌ಴ᄢ Ỉ  ᢕ*1 Ꮢ Ꮉ ♿ ల*2㕒㔚᳇᡼㔚㧔ESD㧕߇⊒↢ߔࠆߣ㧘ߘࠇߦ઻޿㧘᡼㔚ߩ⍍㑆ߦធ࿾㔚࿶߇ㆊᷰ⊛ߦᄌേߔࠆ㧚ᧄႎ๔ߪ㧘↥ᬺࡊࡠ࠮ࠬߢ⿠ߎࠆߔߴߡߩ ESD㧔ࠦࡠ࠽᡼㔚㧘Ἣ⧎᡼㔚㧘ࡉ࡜ࠪ᡼㔚㧘ᴪ㕙᡼㔚߅ࠃ߮ࠦ࡯ࡦ᡼㔚㧕ߩㆊᷰធ࿾㔚࿶㧔TEV㧕ࠍ᷹ቯߒ㧘TEV ߇ ESD ߩᬌ಴ᣇᴺߣߒߡ᦭ലߢ޽ࠆ߆⺞ᩏߒߡ޿ࠆ㧚ࠦ࡯ࡦ᡼㔚ߢߪ㧘᣿⏕ߥTEV ାภࠍ᷹ቯߢ߈ߥ߆ߞߚ߇㧘ࠦࡠ࠽᡼㔚㧘Ἣ⧎᡼㔚㧘ࡉ࡜ࠪ᡼㔚߅ࠃ߮ᴪ㕙᡼㔚ߢߪ㧘ࠃߊ↪޿ࠄࠇߡ޿ࠆ
ESD ᬌ಴ེ㧔ESD ߦ઻߁㔚⏛ᵄᬌ಴㧕߇ᬌ಴ߢ߈ߥ޿ߣ߈ߢ߽᣿⏕ߥ TEV ାภࠍ᷹ቯߔࠆߎߣ߇ߢ߈ߚ㧚ߐࠄߦ㧘TEV ାภߩᵄᒻᒻ⁁߇㧘᡼㔚࠲ࠗࡊߦࠃߞߡ⇣ߥࠆߎߣ߆ࠄ㧘TEV ߦࠃߞߡߤߩ᡼㔚࠲ࠗࡊ߇⿠߈ߡ޿ࠆߩ߆߽หቯߢ߈ࠆߎߣࠍ␜ߒߚ㧚ߟ߹ࠅ㧘TEV ߦࠃࠆ ESD ᬌ಴ߪ㧘᡼㔚ߩน⢻ᕈߛߌߢߥߊ⌕Ἣᕈ᡼㔚ߩ↢⿠ࡂࠩ࡯࠼߽หቯߢ߈ࠆߩߢ㧘੐೨ߩ㕒㔚᳇࡝ࠬࠢࠕ࠮ࠬࡔࡦ࠻㧘․ߦ ESD ߦࠃࠆࡂࠩ࡯࠼หቯߦ᦭ലߢ޽ࠆ㧚ࠠ࡯ࡢ࡯࠼ 㕒㔚᳇᡼㔚㧘᡼㔚ᬌ಴㧘ㆊᷰធ࿾㔚࿶㧘࡝ࠬࠢࠕ࠮ࠬࡔࡦ࠻㧘ࡂࠩ࡯࠼หቯ1 ߪߓ߼ߦ200 MHz㧕ࠍ↪޿ߡ࠺ࠖࠫ࠲࡞ࠬ࠻࡟࡯ࠫࠝࠪࡠࠬࠦ࡯ESD (Electrostatic discharge)ߪ↥ᬺಽ㊁ߢߪࡂࠩ࡯ࡊ㧔Tektronix TPS2024㧘200 MHz㧕ߢ᷹ⷰߒߚ㧚ߥ߅㧘࠼ߣߥߞߡ޿ࠆߎߣ߇޽ࠅ㧘ߚߣ߃߫㧘㔚ሶⵝ⟎ߩ⺋േTEV ᷹ቯߦߪ㧘⋥ធߦធ࿾㔚࿶ࠍ᷹ቯߔࠆᣇᴺߩ߶߆ߦ㧘૞㧘㔚ሶ࠺ࡃࠗࠬߩ⎕უ㧘นΆᕈ㔓࿐᳇ߢߩ⌕ἫḮߥߤ⛘✼ᕈࠪ࡯࠻㧔PVC: polyvinyl chloride㧘ෘߐ 0.3 mm㧕↢↥㓚ኂ߿Ἣἴ࡮῜⊒ߩේ࿃ߣߥߞߡ޿ࠆ㧚ᄙߊߩ ESDࠍ੺ߒߚኈ㊂⚿วߢ᷹ቯߔࠆᣇᴺ߽⺞ᩏߒߚ㧔ర᧪㧘㔚߇ߘ߁ߢ޽ࠆࠃ߁ߦ ESD ߇‛૕ߣធ࿾㑆ߢ⿠ߎࠆߣ߈㧘ജࡊ࡜ࡦ࠻ᔕ↪ߢߪᓟ⠪ߩᣇᴺ߇↪޿ࠄࠇߡ޿ࠆ߇㧘ធធ࿾㔚࿶߇㧘ߘߩ⍍㑆㧘ㆊᷰ⊛ߦᄌൻߔࠆ㧚ߎࠇࠍㆊᷰ࿾㔚࿶ࠍ᷹ቯߒ㧘ESD ߩ㔚ᵹߪ⋥ᵹಽ߇ߥ޿㧘߹ߚߪ㧘ធ࿾㔚࿶㧔Transient earth voltage: TEV㧕ߣ޿߁㧚ߒ߶ߣࠎߤߥ޿ߩߢ㧘ኈ㊂⚿วߩᔅⷐߪߥ޿㧕㧚TEV ᷹ቯߚ߇ߞߡ㧘TEV ߩࡕ࠾࠲࡝ࡦࠣߪ ESD ᬌ಴㧘ߘߒߡ㧘ߣหᤨߦ㧘వߩ㔚ሶ↥ᬺߢࠃߊ↪޿ࠄࠇߡ޿ࠆ㔚⏛ᵄߦ

ESD ࡂࠩ࡯࠼ࠍหቯߒ㧘㓚ኂ߿Ἣἴ࡮῜⊒ࠍ㒐ᱛߔࠆߚࠃࠆ ESD ᬌ಴ེ㧔Trek Model 900㧕߽↪޿ߚ㧚ࠦ࡯ࡦ߼ߩ࡝ࠬࠢࠕ࠮ࠬࡔࡦ࠻ߦ᦭ലߢ޽ࠆߣ⠨߃ࠆ㧚᡼㔚ߪ㧘ታⷙᮨߩⓨ᳇ャㅍలߡࠎⵝ⟎ࠍ↪޿ߡ㧘TEV ߦ㔚ജࡊ࡜ࡦ࠻ߢߪ㧘ㇱಽ᡼㔚ߩᬌ಴ᴺߣߒߡ㧘ߘߩ㔚ᵹࠍᬌ಴ߔࠆᣇᴺ߇ਥߢ޽ࠆ߇㧘ߎߩઁߦ㖸ᵄ㧘UHFࠃࠆࠦ࡯ࡦ᡼㔚ᬌ಴ߩน⢻ᕈࠍ⺞ᩏߒߚ㧚1) ࠦࡠ࠽᡼㔚(Ultra-high frequency)㧘TEV ࠍ↪޿ߡ㧘㔚ജࡊ࡜ࡦ࠻࿑ 1(a)ߩࠃ߁ߦ㌃࠺ࠖࠬࠢ਄ߦࠬ࠹ࡦ࡟ࠬ⵾ߩ㊎㔚ᭂ⸳஻ߩ⛘✼ߩ଻቞▤ℂࠍߒߡ޿ࠆߣߎࠈ߽޽ࠆ 1,2)㧚㔚ሶ㧔వ┵ߩᦛ₸ඨᓘ 0.02 mm㧕ࠍ⟎޿ߡ㧔㑆㓒 5, 10, 15↥ᬺߢߪ㧘ESD ▤ℂߩߚ߼ߩࡕ࠾࠲࡯ߣߒߡ㧘᡼㔚ߦ઻mm㧕㧘ߎࠇߦ᡼㔚㐿ᆎߔࠆ⽶ߩ㜞㔚࿶㧔Max-Electronics߁㔚⏛ᵄࠍᬌ಴ߔࠆᣇᴺࠍ↪޿ߡ߅ࠅ㧘ESD ᬌ಴ེߣߒ

HVD-30K1R/10㧦ᱜ⽶ಾ឵น㧕ࠍශടߒߡ⽶ࠦࡠ࠽᡼㔚ߡᏒ⽼߽ߐࠇߡ޿ࠆ㧚ߒ߆ߒߥ߇ࠄ㧘㔚⏛ᵄߦࠃࠆᬌ಴ࠍ⊒↢ߐߖߡ㧘ߎࠇߦ઻߁ TEV ࠍ᷹ⷰߒߚ㧚ߪ㧘ESD ߆ࠄߩ〒㔌ߦଐሽߔࠆߩߢ㧘ᬌ಴ߢ߈ߥ޿ߎߣ

2) Ἣ⧎᡼㔚Ἣ⧎᡼㔚ߪ㧘࿑ 1(b)ߦ␜ߔࠃ߁ߦ㧘వߩ㜞㔚࿶㔚Ḯ㧔2.0߽޽ࠆ㧚ߐࠄߦ㧘ࠞ࡯ࠧ࠲ࡦࠞ࡯ߩࠫࠚ࠶࠻᳓ᵞᵺߦ߅޿ߡ㔚⏛ᵄߦࠃࠆᬌ಴ࠍ↪޿ߚႎ๔ 3,4)߇޽ࠆ߇㧘㔚⏛ᵄkV㧕ߦࠃߞߡᛶ᛫㧔60 G:㧕ࠍ੺ߒߡࠠࡖࡄࠪ࠲㧔7, 20

ߦࠃࠆ ESD ᬌ಴߇⃻ታ⊛ߦᅷᒰߢߥ޿ߎߣࠍ┙⸽ߒߡ

߹ߚߪ 40 pF㧕ࠍల㔚ߒ㧘ߎࠇࠍ㊄ዻ⃿㧔⋥ᓘ 30 mm㧧

޿ࠆ㧚

SUS 304㧕ߣធ࿾㌃࠺ࠖࠬࠢ㑆㧔㑆㓒 0.3, 0.6 ߹ߚߪ 0.9

ᧄႎߢߪ㧘↥ᬺ⃻႐ߢ⿠ߎࠅ߁ࠆߔߴߡߩ ESD㧔ࠦࡠmm㧕ߢ᡼㔚ߐߖࠆߎߣߦࠃߞߡ⊒↢ߐߖߚ㧚ߎࠇߦࠃ࠽᡼㔚㧘Ἣ⧎᡼㔚㧘ࡉ࡜ࠪ᡼㔚㧘ᴪ㕙᡼㔚߅ࠃ߮ࠦ࡯ࡦ

ࠅ㧘᡼㔚㐿ᆎ㔚࿶ࠍ⿥߃ࠇ߫㧘๟ᦼ⊛ߦἫ⧎᡼㔚߇↢ߓ᡼㔚㧕ߦ઻߁ TEV ࠍ᷹ቯߒ㧘TEV ߦࠃࠆ ESD ᬌ಴ߩࠆߎߣߦߥࠆ㧚ߎߩߣ߈ߩ TEV ࠍ᷹ⷰߒ㧘ࠠࡖࡄࠪ࠲

น⢻ᕈࠍ⺞ᩏߒߚ 5,6)㧚

㧔᡼㔚ࠛࡀ࡞ࠡ࡯㧕ߣ᡼㔚ࠡࡖ࠶ࡊߩᓇ㗀߽⺞ᩏߒߚ㧚3) ࡉ࡜ࠪ࡮ᴪ㕙᡼㔚ࡉ࡜ࠪߣᴪ㕙᡼㔚ߪ㧘࿑ 1(c)ߦ␜ߔࠃ߁ߦ㧘⛘✼ᕈࠪ2 ታ㛎ࠦࡠ࠽᡼㔚㧘Ἣ⧎᡼㔚㧘ࡉ࡜ࠪ᡼㔚߅ࠃ߮ᴪ㕙᡼㔚ࠍ࡯࠻㧔ෘߐ 0.2 mm ߩ PTFE: polytetrafluoroethyleneធ࿾ߒߚ㧔ធ࿾✢㧦᏷ 1 cm㧘㐳ߐ 1 m ߩߔߕࡔ࠶ࠠᐔ

߹ߚߪෘߐ 0.1 mm ߩࡐ࡝ࠛࠬ࠹࡞㧕ࠍធ࿾ߒߚ㌃࠺ࠖ

✬✢㧕㊄ዻ㧔㌃㧕࠺ࠖࠬࠢ㧔⋥ᓘ 1 m㧕਄ 5,6)ߢ⊒↢ߐߖࠬࠢ਄ߦ⟎޿ߡ㧘ߎࠇࠍᏪ㔚ߐߖߡ㧘ធ࿾ߒߚ㧘వߣหߡ㧘ߘࠇߦ઻߁ TEV ࠍ㔚࿶ࡊࡠ࡯ࡉ㧔Tektronix P2220,

ߓ㊄ዻ⃿ࠍߎߩ⛘✼ᕈࠪ࡯࠻ߦㄭߠߌࠆߎߣߦࠃߞߡ⊒↢ߐߖߡ㧘ߎࠇߦ઻߁ TEV ࠍ᷹ቯߒߚ㧚ߥ߅㧘ࡉ࡜ࠪ*1 ഭ௛቟ోⴡ↢✚ว⎇ⓥᚲ㔚᳇቟ో⎇ⓥࠣ࡞࡯ࡊ
*2 Ꮏቇ㒮ᄢቇᎿቇㇱ㔚᳇㔚ሶᎿቇ⑼᡼㔚ߢߪ㧘ੇ῎ߐߖߚ⚕ߢࠪ࡯࠻ࠍᡂࠆߎߣߦࠃࠆ៺ᡂ
Ꮺ㔚㧘߹ߚ㧘ᴪ㕙᡼㔚ߢߪ㧘–20 kV ߩࠦࡠ࠽᡼㔚㧔⋥೉ᛶ᛫ 3 M:㧕ߦࠃࠆࠦࡠ࠽Ꮺ㔚ࠍ↪޿ߡࠪ࡯࠻ࠍᏪ㔚－ 13 －

労働安全衛生総合研究所特別研究報告 JNIOSH-SRR-NO.43(2013）
HV(b)

(a)
HV source

Corona needle(c)Metal sphere

Metal sphere
ChargedInsulating sheet

MD

Metal disk(MD)MD
Oscilloscope

Oscilloscope

Oscilloscope

図１
TEV信号を測定する実験装置(a)コロナ放電,(ｂ)火花放電,(c)ブラシ・沿面放電࿑ 1
TEV ାภࠍ᷹ቯߔࠆታ㛎ⵝ⟎ (a) ࠦࡠ࠽᡼㔚㧘(b) Ἣ⧎᡼㔚㧘(c) ࡉ࡜ࠪ࡮ᴪ㕙᡼㔚TEV ାภ VTEV ߪ㧘ᷫ⴮ᝄേߩࠛࡦࡌࡠ࡯ࡊࠍ⴫ߔᷫ⴮
ଥᢙDR

D(1)

2L





ߣᝄേ๟ᵄᢙZdZd2(2)sin Z d t(3)Z0 1  ]ࠍ↪޿ߡ

VTEV (t )AeDtߢ⴫ߐࠇࠆ㧚ߚߛߒ㧘࿑ 2 ࠦ࡯ࡦ᡼㔚ᬌ಴ߩታ㛎ⵝ⟎1Z0ߐߖߚ㧚ߐࠄߦ㧘ࡉ࡜ࠪ᡼㔚ߢߪ㧘Ꮺ㔚ߒߚࡈࠖ࡞ࡓࠍ]ធ࿾㌃࠺ࠖࠬࠢ߆ࠄ೸߇ߔߣ߈ߩ᡼㔚ߦߟ޿ߡ߽⺞ᩏߒߚ㧚(4)LCDRCZ02L(5)4) ࠦ࡯ࡦ᡼㔚

ߎߎߢ㧘R ߪ᡼㔚ᛶ᛫㧘L ߪធ࿾ߩࠤ࡯ࡉ࡞ߩࠗࡦ࠳ࠢ ࠦ࡯ࡦ᡼㔚ߦ઻߁ TEV ାภߪ㧘ᓴⅣဳߩⓨ᳇ャㅍల࠲ࡦࠬ㧘C ߪ᡼㔚ࠡࡖ࠶ࡊߩ߶߆ߦἫ⧎᡼㔚ߢߪធ⛯ߒߡࠎⵝ⟎ 7,8)ࠍ↪޿ߡ⺞ᩏߒߚ㧚ធ࿾ߒߚ࠲ࡦࠢ㧔⋥ᓘߚࠠࡖࡄࠪ࠲㧘߹ߚ㧘ࡉ࡜ࠪ࡮ᴪ㕙᡼㔚ߢߪ⛘✼ᕈࠪ࡯

1.5 m㧕ߦ PP (polypropylene)ࡍ࡟࠶࠻㧔ᐔဋ☸ᓘ⚂ 3࠻ߩࠠࡖࡄࠪ࠲ࡦ߽ࠬ฽߹ࠇࠆ㧚ଥᢙ A ߪ᡼㔚೨ߩᏪ㔚mm㧕ࠍᓴⅣߐߖߡ࠲ࡦࠢౝߦ⫾Ⓧߐࠇߚ PP ࡍ࡟࠶࠻㔚⩄ߦࠃߞߡ↢ߕࠆ㔚૏㧘ᱜ⏕ߦߪ᡼㔚㐿ᆎ㔚࿶ߦ㑐ㅪ

ߩၸⓍጀ⴫㕙ߢ㧘ࠦ࡯ࡦ᡼㔚ࠍ⊒↢ߐߖߚ㧚TEV ାภߪ㧘ߔࠆ㧚ߐࠄߦ㧘(3)ᑼߩᤨ㑆Ⓧಽߪ㧘᡼㔚㔚⩄ߦ㑐ㅪߔࠆ⋥ធߦ࠲ࡦࠢߩ㔚૏ࠍ᷹ቯߔࠆ߶߆ߦ㧘వߩ⛘✼ᕈࠪ࡯㊂ߣߥࠆ㧚ߟ߹ࠅ㧘TEV ାภߪ㧘↢⿠ߒߚ᡼㔚ߩᖱႎ߇࠻ࠍ੺ߒߚኈ㊂⚿วߢ߽᷹ቯߒߚ㧚หᤨߦ㧘᡼㔚ߩ↢⿠฽߹ࠇߡ޿ࠆߎߣࠍ␜ߒߡ޿ࠆ㧚ᝄ᏷㧘ᷫ⴮ଥᢙ㧘ᝄേࠍ⏕⹺ߔࠆߚ߼ߦ㧘࠲ࡦࠢౝߦశࡈࠔࠗࡃ࡯ࠍᝌ౉ߒ㧘๟ᵄᢙࠍ↪޿ߡ㧘᡼㔚࠲ࠗࡊࠍቯ㊂⊛ߦหቯߔࠆߚ߼ߦ࠲ࡦࠢ⴫㕙ߩ᡼㔚⊒శࠍశ㔚ሶჇ୚▤㧔Hamamatsuߪߐࠄߥࠆ⺞ᩏ߇ᔅⷐߢ޽ࠆ߇㧘↢⿠᧦ઙ߇⇣ߥࠆ⒳‫ޘ‬Photonics R928, Spectral response 165–900 nm㧕ߦߡߩ᡼㔚࠲ࠗࡊߩ᡼㔚㔚ᵹߩᵄᒻᒻ⁁ߦߘߩ․ᓽ߇⃻ࠇࠆ᷹ቯߒߚ㧚߹ߚ㧘వߩ ESD ᬌ಴ེࠍ࠲ࡦࠢ⓹ㄭறߦ㈩ߩߢ 9,10)㧘᷹ⷰߐࠇߚ TEV ᵄᒻߦ߽᡼㔚࠲ࠗࡊߩ․ᓽ߇

⟎ߒ㧘ߎߩᬌ಴ེߩ㜞๟ᵄࠕࡦࡊߩ಴ജࠍࠝࠪࡠࠬࠦ࡯෻ᤋߒߡ޿ࠆ㧚ࡊߢ᷹ⷰߒߚ㧔࿑ 2㧕㧚ߐࠄߦ㧘᡼㔚߇ធ࿾ߦኻߒߡ⿠߈ࠆߣ߈㧘ߘߩ᡼㔚㔚ᵹߪᔅߕធ࿾ߦᵹࠇࠆߩߢ㧘ࠃߊ↪޿ࠄࠇߡ޿ࠆ㔚⏛ᵄ3 ⚿ᨐ߅ࠃ߮ᬌ⸛

ߦࠃࠆ ESD ᬌ಴ེߢߪᬌ಴ߢ߈ߥ߆ߞߚᒙ޿᡼㔚ߢ߽⒳‫ ߥ⊛ဳౖߩࡊࠗ࠲ߩޘ‬TEV ାภࠍ࿑ 3 ߦ␜ߔ㧚ߔ

TEV ାภࠍ⏕ታߦ᷹ⷰߢ߈ߚ㧚ߎߩ⚿ᨐߪ㧘TEV ߦࠃߴߡߩ TEV ߩᵄᒻߪᷫ⴮ᝄേߒ㧘ᵄᒻᒻ⁁ߩ․ᓽߪ᡼

ࠆᬌ಴߇㧘ߎߩ ESD ᬌ಴ེߩ⵬ഥ⊛ᚻᴺߣߒߡ߽᦭ല㔚࠲ࠗࡊߦᄢ߈ߊଐሽߒߚ㧚ߎߩࠃ߁ߥᷫ⴮ᝄേߔࠆᵄ

ߢ޽ࠆߎߣࠍ␜ໂߒߡ޿ࠆ㧚ᒻߪ㧘Ἣ⧎㧘ࡉ࡜ࠪ㧘߅ࠃ߮ᴪ㕙᡼㔚ߩ㔚ᵹߦ߽᷹ⷰߐ1)ࠦࡠ࠽᡼㔚ࠦࡠ࠽᡼㔚ߦ઻߁ౖဳ⊛ߥ TEV ାภࠍ࿑ 3(a)ߦ␜ߔ㧚ࠇߡ޿ࠆ 9,10)㧚TEV ߪធ࿾ߦᵹࠇࠆ᡼㔚㔚ᵹߩ⚿ᨐߩ⃻⽎ߣ⸃㉼ߢ߈ࠆߩߢ㧘᡼㔚ࠍ RLC ⋥೉࿁〝ߢ⴫⃻ߔࠆߣ㧘ߎߩߣ߈ߩ㊎㔚ᭂߣធ࿾㌃࠺ࠖࠬࠢߩ㑆㓒ߪ 15 mm㧘ශ

－ 14 －TEV signal(V)Light intensity(a.u.)

過渡接地電圧による静電気放電の検出

０-２０(a)-４０-６０×１０-3-５００５０１００

１５０

２００×１０-6Time(s)
(b)

0.10
0.00
-0.10
-５００

５０１００

１５０

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TEV signal(V)Time(s)0.10(c)

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図４ コーン放電の検出（a）放電発光,(b）TEV,（c）容࿑
4 ࠦ࡯ࡦ᡼㔚ߩᬌ಴ (a) ᡼㔚⊒శ㧘(b) TEV㧘(c) ኈ
量型TEV,（ｄ）電磁波信号㊂ဳ TEV㧘(d) 㔚⏛ᵄାภߒߡ޿ࠆ㧚2) Ἣ⧎᡼㔚Ἣ⧎᡼㔚ߦ઻߁ౖဳ⊛ߥ TEV ାภࠍ࿑ 3(b)ߦ␜ߔ㧚ߘߩᵄᒻߪ㧘Ყセ⊛ߦ㜞޿ࡇ࡯ࠢߣ㐳޿ࠛࡦࡌࡠ࡯ࡊࠍᜬߟᷫ⴮ᝄേᵄᒻߢ޽ࠆ㧚ᢙ⊖ࡏ࡞࠻ߩᦨᄢࡇ࡯ࠢߪ㧘᡼㔚ࠡࡖ࠶ࡊ㧔⃿㔚ᭂߣធ࿾㌃࠺ࠖࠬࠢߩ㑆㓒㧕߇㐳ߊߥࠆߣߣ߽ߦჇടߔࠆ㧚0.3 mm ߆ࠄ 0.9 mm ߩᄌൻߢ㧘ߘߩࡇ࡯ࠢߪ⚂ 400 V ߆ࠄ 900 V ߹ߢჇടߒߚ㧚ߎࠇߪࠡࡖ࠶ࡊ߇㐳ߊߥࠆߣ㧘᡼㔚㐿ᆎ㔚࿶߇㜞ߊߥߞߡߒ߹߁߆ࠄߢ޽ࠆ㧚߹ߚ㧘ߎߩࡇ࡯ࠢߩᝄ᏷ߪ㧘ల㔚ߒߚࠠࡖࡄࠪ࠲ߦ߽ଐሽߔࠆ㧚หߓ᡼㔚㐿ᆎ㔚࿶ߢ߽㧘ߘࠇߦల㔚ߐࠇߡ޿ࠆ㔚⩄ߪ㧘ࠠࡖࡄࠪ࠲߇ᄢ߈޿߶ߤ㜞ߊߥࠆ߆ࠄߢ޽ࠆ㧚ߐࠄߦ㧘ᱜߩ㜞㔚࿶ࠍ↪޿ߚἫ⧎᡼㔚ߢ޽ࠆߩߢ㧘ᦨೋߩࡇ࡯ࠢߪᱜߦߥߞߡ޿ࠆ㧚߹ߚ㧘TEVߩࡇ࡯ࠢ㔚࿶ߪ㧘ઁߩ࠲ࠗࡊߩ᡼㔚ߣᲧセߒߡἫ⧎᡼㔚߇ᦨ߽㜞޿㧚ߎࠇࠄߩ⚿ᨐߪ㧘TEV ାภߦߪ㧘Ἣ⧎᡼㔚
ߩ․ᓽ㧘․ߦࠛࡀ࡞ࠡ࡯㧔⌕Ἣᕈ㧕ߦ㑐ㅪߔࠆᖱႎ߇฽
࿑3ESD ߦ઻߁ TEV ାภ (a) ࠦࡠ࠽᡼㔚㧘(b) Ἣ⧎߹ࠇߡ޿ࠆߎߣࠍ␜ߒߡ޿ࠆ㧚᡼㔚㧘(c) ࡉ࡜ࠪ᡼㔚㧘(d) ᴪ㕙᡼㔚㧘(e) ࡉ࡜ࠪ3) ࡉ࡜ࠪ᡼㔚࿑ 3(c)ߦ␜ߔࠃ߁ߦ㧘ࡉ࡜ࠪ᡼㔚ߦ઻߁ TEV ାภ߽᡼㔚㧔ᒁ߈೸߇ߒ㧦ࡐ࡝ࠛࠬ࠹࡞㧕ᬌ಴น⢻ߢ޽ࠆ㧚ઁߩ᡼㔚࠲ࠗࡊߩ TEV ߣᲧセߒߡ㧘ട㔚࿶ߪ̄3.6 kV ߢࠦࡠ࠽㐿ᆎ㔚࿶ߦ⋧ᒰߔࠆ㧚⽶㔚࿶ାภߩᦼ㑆߇⍴ߊ,⃻ࠇࠆࡇ࡯ࠢߩᢙ߽ࠃࠅዋߥߊ㧘ᝄ᏷߇᡼㔚ߔࠆ⽶ࠦࡠ࠽ߢ޽ࠆߚ߼㧘TEV ାภߩᦨೋߩࡇ࡯ߩዊߐߥᷫ⴮ᝄേߣߥߞߚ㧚ߎࠇࠄߪ㧘᡼㔚ࠛࡀ࡞ࠡ࡯ࠢߩᭂᕈߪ⽶ߣߥߞߡ߅ࠅ㧘TEV ߪ᡼㔚ᭂᕈߩᖱႎ߽฽߇ዊߐߊ⌕Ἣᕈ߇ૐ޿ࡉ࡜ࠪ᡼㔚ߩ․ᓽࠍ⴫ߒߡ޿ࠆ㧚᦭ߒߡ޿ࠆߎߣࠍ␜ߔ㧚ઁߩ᡼㔚࠲ࠗࡊߦᲧセߒߡ㧘ᝄᏪ㔚ߒߚࠪ࡯࠻ࠍធ࿾㌃࠺ࠖࠬࠢ߆ࠄᒁ߈೸߇ߔߣ߈᏷߇ᦨ߽ዊߐߊ㧘ࠛࡦࡌࡠ࡯ࡊߩᤨ㑆߽⍴޿㧚TEV ߪ㧘ߦ↢ߓࠆࡉ࡜ࠪ᡼㔚ߩ TEV ߽᷹ⷰߒߚ㧔࿑ 3(e)㧕㧚TEVࠦࡠ࠽᡼㔚ߩૐ޿᡼㔚ࠛࡀ࡞ࠡ࡯ߣ㕖⌕Ἣᕈߦ⋧㑐߇޽ߩᦨೋߩࡇ࡯ࠢߩᭂᕈ߇㧘ࠪ࡯࠻ߩᏪ㔚ߩᭂᕈߦଐሽߒࠆߎߣࠍ␜ߒߡ޿ࠆ㧚ߟ߹ࠅ㧘ᓟߦ߽ㅀߴࠆࠃ߁ߦ㧘TEVߡ޿ࠆߎߣ߇␜ߐࠇߚ㧚ߚߣ߃߫㧘៺ᡂᏪ㔚ߢߪ㧘ࡐ࡝ାภߦߪ᡼㔚ߩ⌕Ἣᕈߩᖱႎ߇฽߹ࠇߡ޿ࠆߎߣࠍ␜ߒࠛࠬ࠹࡞ߪᱜߦᏪ㔚㧘PTFE ߪ⽶ߦᏪ㔚ߔࠆ߇㧘ߎࠇࠍ－ 15 －

労働安全衛生総合研究所特別研究報告 JNIOSH-SRR-NO.43(2013）ᒁ߈೸߇ߔߣ߈ߩࡉ࡜ࠪ᡼㔚ߦ઻߁ TEV ߩೋ߼ߩࡇ࡯

ߎߣ߆ࠄ߽ࠊ߆ࠆࠃ߁ߦ TEV ߦࠃࠆࠦ࡯ࡦ᡼㔚ᬌ಴ߪࠢߩᭂᕈߪ㧘ࡐ࡝ࠛࠬ࠹࡞ߢ⽶㧘PTFE ߢᱜߣߥߞߚ㧚࿎㔍ߣផ᷹ߐࠇࠆ㧚Ꮺ㔚ߒߚ㔚⩄߇ធ࿾߆ࠄ㔌ࠇࠆߎߣ߆ࠄ㧘ㅒߩᭂᕈߣߥᧄ⚿ᨐߪ㧘ẜ࿷ߔࠆࡁࠗ࠭ߦࠃࠆ⺋ᬌ಴ࠍㆱߌࠆߚ߼㧘ߞߡ޿ࠆ㧚ߎߩ⚿ᨐߪ㧘TEV ߦࠃߞߡᏪ㔚‛૕ߩᭂᕈߩធ࿾㔚࿶ߦ฽߹ࠇࠆࡁࠗ࠭ࠍ੍߼⺞ᩏߒߡ߅ߊᔅⷐ߇޽

⷗Ⓧ߽น⢻ߢ޽ࠆߎߣࠍ␜ߒߡ޿ࠆ㧚ࠆߎߣ߽␜ໂߒߡ޿ࠆ㧚4) ᴪ㕙᡼㔚4 ⚿⺰ᴪ㕙᡼㔚㧔Propagating brush discharge㧕ߦ઻߁ TEVାภߪ㧘࿑ 3(d)ߦ␜ߔࠃ߁ߦ㧘ઁߩ᡼㔚࠲ࠗࡊߩ TEVESD ߇ធ࿾ߦኻߒߡ⿠ߎࠆߣ߈㧘TEV ߦࠃߞߡ ESDߣᲧセߒߡ㧘ߪߞ߈ࠅߣߒߚᷫ⴮ᝄേߣߥࠅ㧘ࡇ࡯ࠢ㔚ᬌ಴߇น⢻ߢ޽ࠆߎߣࠍ␜ߒߚ㧚TEV ᷹ⷰ߹ߚߪࡕ࠾࠲࿶߽Ყセ⊛ߦ㜞ߊ㧘ࠛࡦࡌࡠ࡯ࡊ߽㐳޿㧚 TEV ାภߩ࡝ࡦࠣߪ㧘ធ࿾㔚࿶ࠍࠝࠪࡠࠬࠦ࡯ࡊߢ᷹ቯߔࠆߣ޿߁ᝄേ๟ᵄᢙZd ߪ㧘૶↪ߒߚࠪ࡯࠻᧚ᢱߦଐሽߒ㧘ࡇ࡯ࠢᭂ߼ߡ◲නߥᣇᴺߢ޽ࠅ㧘ߐࠄߦ㧘ߘߩାภᵄᒻ߇ ESDߩᝄ᏷㧔ࡐ࡝ࠛࠬ࠹࡞ߩࡇ࡯ࠢ㔚࿶㧦⚂ 100 V㧘PTEF㧦ߩ․ᕈࠍ฽ࠎߢ޿ࠆߎߣ߆ࠄ㧘᡼㔚ᬌ಴ߩߺߢߪߥߊ㧘⚂ 40 V㧕߽㧘ࠪ࡯࠻ߩᏪ㔚㔚૏㧔ࡐ࡝ࠛࠬ࠹࡞ߩࠦࡠ࠽᡼㔚࠲ࠗࡊ㧔⌕Ἣᕈ᡼㔚ࡂࠩ࡯࠼㧕ߩหቯ߹ߢ߽߇น⢻Ꮺ㔚㔚૏ߪ–6 kV㧘PTFE ߩߘࠇߪ–3.5 kV㧕ߦଐሽߒߚ㧚ߢ޽ࠆ㧚TEV ᷹ⷰߪ㧘੐೨ߩ㕒㔚᳇࡝ࠬࠢࠕ࠮ࠬࡔࡦ࠻㧘ߎࠇࠄߩ⚿ᨐߪ㧘TEV ାภ߇ᴪ㕙᡼㔚ߩ․ᓽߢ޽ࠆ㜞޿․ߦ ESD ߦ⿠࿃ߒߚࡂࠩ࡯࠼ࠍหቯߔࠆߣ߈ߦ᦭ലߢ⌕Ἣᕈߩᖱႎࠍ฽ࠎߢ޿ࠆߎߣࠍ␜ߒߡ޿ࠆ㧚޽ࠆ㧚5) ࠦ࡯ࡦ᡼㔚ߒ߆ߒߥ߇ࠄ㧘ࠦ࡯ࡦ᡼㔚ߦ઻߁᣿⏕ߥ TEV ାภࠍᢥ   ₂᷹ⷰߔࠆߎߣߪߢ߈ߥ߆ߞߚ㧚ࠦ࡯ࡦ᡼㔚ߦ઻߁ TEV㧘1)

ኈ㊂ဳ TEV㧘᡼㔚⊒శ߅ࠃ߮㔚⏛ᵄାภߩ᷹ቯ⚿ᨐࠍ࿑On-line partial discharge testing of outdoor HV plant –4 ߦ␜ߔ㧚ߎߎߢ㧘శ㔚ሶჇ୚▤ߣࠝࠪࡠࠬࠦ࡯ࡊߣߩ

Applying experiences from 10 years of PD testingធ⛯ߦ 1 m ߩหゲࠤ࡯ࡉ࡞ࠍ↪޿ߡ޿ࠆ߇㧘ߎߩࠤ࡯ࡉ

indoors. 19th Int. Conf. Electricity Distribution 2007࡞ߦࠃࠆㆃᑧᤨ㑆 5.6 ns
㧔1 V ࡄ࡞ࠬ㔚࿶ߦࠃࠆ᷹ቯ୯㧕Paper 0675.

ߪήⷞߢ߈ࠆ߶ߤ⍴޿㧚2)ࠦ࡯ࡦ᡼㔚ߩ⌕Ἣᕈ㧔ᢙ⊖ kV ߩᏪ㔚ߦࠃࠆ᡼㔚㧧᡼

Renforth L, Seltzer-Grant M and Mackinlay R.

Makalous S, Tenbohlen S and Feser K A.

Detection and location of partial discharges in power㔚㔚⩄ߪᢙ⊖ nC㧧ࠛࡀ࡞ࠡ࡯ߪᢙච mJ11,12㧕㧕ߪࡉ࡜ࠪtransformers using acoustic and electromagnetic᡼㔚ࠃࠅ߽㜞޿ߎߣ߆ࠄ㧘࿑ 3 ߢ᷹ⷰߐࠇߚࡉ࡜ࠪ᡼㔚signals. IEEE Trans. Diels. El. Insul. 2008; 15:

ߩ TEV ାภ࡟ࡌ࡞ߣห╬޽ࠆ޿ߪߘࠇએ਄ߩାภ߇ⷰ

1576–1583.

᷹ߐࠇࠆߣ੍᷹ߒߚ߇㧘⊒శߩߺ᣿⏕ߥାภ߇᷹ⷰߐࠇ3)㧔⊒శߢߪࠦ࡯ࡦ᡼㔚ᬌ಴ߢ߈ࠆߎߣࠍ␜ߒߡ޿ࠆ㧕㧘ઁ

of ignition hazards suring tank washing and during

ߩᣇᴺߢߪ᡼㔚㧔⊒శାภ㧕ߦหᦼߒߚ᣿⏕ߥାภࠍⷰwave action in part-ballasted OBO cargo tanks. J.

᷹ߢ߈ߥߞߚ㧚

Electrostat. 1975; 1: 61–70.

ߥ߅㧘TEV ାภߦ฽߹ࠇࠆࡄ࡞ࠬߪ㧘PP ࡍ࡟࠶࠻ࠍ4)

Chubb J N. Practical and computer assessments

Butterworth G J. The detection andャㅍߒߥ޿ߢ㧘ⵝ⟎ࠍⒿ௛ߒߡ߽⃻ࠇ㧘⺞ᩏߒߚ⚿ᨐ㧘characterization of electrostatic sparks by radioⓨ᳇ャㅍࠪࠬ࠹ࡓߩ೙ᓮ♽࿁〝߆ࠄߩࡁࠗ࠭ߢ޽ࠆߎߣ

methods. Inst. Phys. Conf. Ser. 1979; No. 48 97–105㧚߇್᣿ߒߚ㧚5)ࠦ࡯ࡦ᡼㔚ߪ㧘㐽ߑߐࠇߚ㊄ዻ࠲ࡦࠢౝߢ⿠ߎࠆ᡼㔚

Ichikawa N. Study on detection of negative

corona discharge generated in rod-plane air gap byߢ޽ࠆߩߢ㧘ࡈࠔ࡜࠺࡯ࠞ࠶ࡊ㧔ࠤ࡯ࠫ㧕ߩ᷹ቯේℂߣ

using external electrode method. Plasma Sci. Technol.

หߓߢ㧘ࠞ࠶ࡊ㧔࠲ࡦࠢ㧕ౝߩ᡼㔚߿㔚⩄ಽ㔌ߪ㧘ᱜߣ2007; 9: 686–689.

⽶ߩ㔚⩄㧔᡼㔚ߩ႐ว㧘㔚ሶ࡮⽶ࠗࠝࡦߣᱜࠗࠝࡦ㧕߇6)หߓߛߌ⊒↢ߔࠆߩߢ㧘ᛂߜᶖߒ޽ߞߡ㧘᡼㔚߇⿠߈ߡtransient earth voltage. J. Phys. Conf. Ser. 2013; 418:߽ߘߩ㔚⩄ࠍ᷹ቯߔࠆߎߣ߇ߢ߈ߥ޿㧚ߎߩߚ߼㧘ࡁࠗ

012054 (6pp)࠭߇ߥ޿ߣߒߡ߽ TEV ߇᷹ⷰߢ߈ߥ߆ߞߚߣ߽⠨߃ࠄ7)ࠇࠆ㧚ߟ߹ࠅ㧘ࠦ࡯ࡦ᡼㔚ߩ TEV ߦଐࠆᬌ಴ߪ㧘ේℂWatano S. Static charge elimination on pellets in a silo⊛ߦਇน⢻ߥߩ߆߽ߒࠇߥ޿㧚ߒ߆ߒߥ߇ࠄ㧘᡼㔚߇㧘using a new nozzle-type eliminator. J. Electrostat.

࠲ࡦࠢౝߦ߽ߣ߽ߣ޽ߞߚ㔚⩄ߩ৻ㇱࠍਛ๺ߒ㧘ᱷߞߚ

2002; 55: 289–297㧚෻ᭂᕈߩࠗࠝࡦ߇࠲ࡦࠢოߦ೔㆐ߔࠆߎߣ߇޽ࠇ߫㧘ߘ8)ࠇߢ߽㧘ߔߴߡߩ෻ᭂᕈࠗࠝࡦ߇৻⍍ߦャㅍߐࠇࠆߎߣ

Control of electrostatic charge for powder by usingߪߥ޿ߩߢାภ࡟ࡌ࡞ߪ߆ߥࠅዊߐߊߥࠆ߇㧘ߎࠇࠍ

feedback control-type ionizer system. J. Loss Prev. Proc.

TEV ߣߒߡ᷹ⷰߢ߈ࠆ߆߽ߒࠇߥ޿㧚ߎࠇࠍ⏕⹺ߔࠆߚInd. 2010; 23: 237–241.

߼ߦߪ㧘ࡁࠗ࠭ࠍシᷫߒߚ਄ߢାภߩჇ᏷߇ᔅⷐߢ޽ࠆ߇㧘᡼㔚ߩ⊒శାภߦหᦼߒߚ᣿⏕ߥ TEV ାภ߇ߥ޿－ 16 －Ohsawa A, Ichikawa N. ESD detection byKodama T, Suzuki T, Nishimura K, Yagi S andMogami T, Suzuki T, Choi K-S and Ikehata T.

過渡接地電圧による静電気放電の検出

9)Norberg A, Szedenik N and Lundquist S. On the11)

Glor M and Schwenzfeuer K. Occurrence of cone

pulse shape of discharge current. J. Electrostat. 1989;

discharges in production silos, J. Electrostat. 1997; 40

23: 79–88.

㧒41:511–516.

10)

12)

Greason W D, Kucerovsky Z, Bulach S andOhsawa A. Computer simulation for assessment

Flatley M W. Investigation of the optical and electricalof electrostatic hazards in filling operations withcharacteristics of a spark gap. IEEE Trans. Ind.

powder, Powder Technol. 2003; 135–136: 216–222.

Applicat. 1997; 33: 1519–1526.

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