1 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EA02
ＡｌＦ３

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product name

ＡｌＦ３

Product code

EA02

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases
Oxidizing liquids

Classification not possible

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Category 3

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

Not applicable2 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EA02
ＡｌＦ３

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)

Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Category 2A

Respiratory sensitization

Classification not possible

Skin sensitization

Classification not possible

Germ cell mutagenicity

Classification not possible

Carcinogenicity

Classification not possible

Reproductive toxicity

Category 2

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(singleexposure)

Category 3

Specific target organ toxicity(repeatedexposure)

Category 1

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Skull and crossbones

Health Hazard

Skull and crossbones

Health Hazard

Signal word

DangerDangerous goods hazard
information

Toxic if swallowed.
Causes serious eye irritation.
May cause respiratory irritation.
Suspected of damaging fertility or the unborn child.

Precautionary statements【Safety measures】

Obtain special instructions before use.
Do not handle until all safety precautions have been read and understood.
Do not breathe dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Wear Protective glovess/protective clothing/eye protection/face protection.

2013/10/16
2024/3/15

3 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EA02
ＡｌＦ３

SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date【First-aid measures】

IF SWALLOWED：Immediately call poison center or doctor/physician.
IF IN EYES: Rinse cautiously with water for several minutes. Remove contactlenses, if present and easy to do. Continue rinsing.
IF exposed or concerned: Call poison center or doctor/physician.
If exposed or concerned：Get medical advice/attention.
Get medical advice/attention if you feel unwell.
Specific treatment .
Rinse mouth.
If eye irritation persists: Get medical advice/attention.

【Storage】

Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-Composition/information on ingredients

Substance/Mixture

Substance

Chemical name

Aluminum fluoride

Chemical formulaAlF3

Concentration or concentration
range

99.9%<CAS No.

7784-18-1

TSCA Inventry

Aluminum fluoride (AlF3)

EINECS number

232-051-1

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

Inhalation: Coughing, shortness of breath, sore throat.
Skin contact: Pain, reddening.

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

2013/10/16
2024/3/15

4 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EA02
ＡｌＦ３

SAFETY DATA SHEET
rev. 8.0

SECTION 5

Date of Issue
Revised Date

2013/10/16
2024/3/15

Firefighting measures

Suitable extinguishing media

Water spray, foam fire extinguishing agent, powder fire extinguishing agent ,carbon dioxide gas, dry sand such

Unsuitable extinguishing media

Because a fire might spread through the outskirts, It avoid direct stick irrigation.

Specific hazards

It is non-inflammable and itself does not burn, but releases irritating or toxic
Hume (or gas) at the time of a fire because the product concerned contains
halogen (F) in molecules.

Specific extinguishing methods

It move a container from the fire area if not dangerous.
Eliminate all ignition sources if safe to do so.

Special protective equipment for
firefighters

On the occasion of fire extinguishing work, It wear appropriate personal
protective equipment and rescue suit.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
procedures

It isolate appropriate distance in all way promptly as a leak area.
It prohibit the entrance except the person concerned.
Ventilate Before delving into an enclosed area.
Remove all sources of ignition.

Environmental precautions

It should not be released to the environment.

Methods and material forcontainment and cleaning up

It sweep the leak thing and gather you and collect it in an empty container anddispose it later.
Methods and material for containment and cleaning up: Moisten with water toreduce dust in the air and prevent dispersion.

Secondary disaster prevention
measures

Was covered with a plastic sheet to prevent scattering.

SECTION 7Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

Safety handling precautions

Be sure to get the instruction manual before use.
Do not handle until you read and understand all safety precautions.
The use of appropriate personal protective equipment.
Do not inhale dust, fumes, vapors, spray.

Avoidance of contact

Sodium, potassium, acid

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,including any incompatibilities
Safe storage conditions

Store in a well-ventilated place. Keep container tightly closed.
Store locked up.

Safety packaging material

It use the container which It can seal up without damage and the leak.

5 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EA02
ＡｌＦ３

SAFETY DATA SHEET
rev. 8.0

SECTION 8

Date of Issue
Revised Date

2013/10/16
2024/3/15

Exposure controls/personal protection
AlF3

Permissible concentration
ＡＣＧＩＨ

Appropriate engineering controls

TLV-TWA: 2.5 mg/㎥(fluoride)(2015 version)
In the work shop which dust produces, It use a device, an apparatus sealed up by
all means or a local ventilator.

Individual protection measures,such as personal protective
equipment

SECTION 9Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

SolidForm

Pellets, granules

ColourWhiteOdour

None

AlF3
Melting point/freezing point

1090℃

Boiling point or initial boiling pointand boiling range

1272℃Flammability

No data available

Upper/lower flammability orexplosive limits

LEL:2.5 g/c㎥ (HSFS (2008))

Flash point

Noncombustibility

Auto-ignition temperature

Noncombustibility

Decomposition temperature

No data available

pH4.5～5 (GESTIS (2015))

Kinematic viscosity

No data availableSolubility
Water

0.559 g/100 ml (25 ℃）

6 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EA02
ＡｌＦ３

SAFETY DATA SHEET
rev. 8.0

Other solvents

Date of Issue
Revised Date

2013/10/16
2024/3/15

Alcohol, acetone: Indissolubility acid, a base: Slightly soluble (HSDB (2015))

Partition coefficient: noctanol/water

No data available

Vapour pressure

133 Pa (1238℃) (ICSC (2012))

Density and/or relative density

2.882 (25/4 ℃) (NITE synthesis search (2015))（Density）
Relative vapor density

2.9 (air = 1) (HSFS (2008))

Particle characteristics

No data available

Other information

No data available

SECTION 10Stability and reactivity
AlF3

Reactivity

It is a non-inflammable solid.
It dissolve in water just a little bit.

Chemical stability

No data available

Possibility of hazardous reactions

It react by contact with sodium and potassium intensely.
By contact with Hume of acid and the acid, It produce toxic high Hume.
It react with a compound containing air, the humidity and the active hydrogen
intensely.

Conditions to avoid

Heating

Incompatible materials

Sodium, potassium, acidHazardous decomposition products By the resolution by the heating, It produce Hume of the extremely harmfulhydrogen fluoride.

SECTION 11

Toxicological information
AlF3

Acute toxicity(oral)

Mouse LD50 value: 103 mg / kg

Acute toxicity(dermal)

No data available

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Acute toxicity （Inhalation:Vapours）

Solid (GHS definition)

Acute toxicity （Inhalation: Dusts
and mists）

The classification is not possible due to lack of data. Besides, there is theinformation of an LC50 value (4 hours) of 0.53 mg/L for rats (GESTIS (Access onJune 2015)), but its source is unknown.

Skin corrosion/irritation

No data available

Serious eye damage/irritation

Because it is written that this substance is severely irritating to eyes (HSDB(Access on June 2015)) and severely irritating to tissues (HSDB (Access onJune 2015)), it was classified in Category 2. Besides, it is also written in List 3
information that this substance is irritating to eyes (GESTIS (Access on June2015)).

7 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EA02
ＡｌＦ３

SAFETY DATA SHEETrev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Respiratory or skin sensitization

The classification is not possible due to lack of data. Besides, asthmatic signs by
irritant particles were reported in the occupational exposure of handling thissubstance and aluminum sulfate (EHC 194 (1997)).

Germ cell mutagenicity

The classification is not possible due to lack of data. There are no in vivo data,
and as for in vitro, a bacterial reverse mutation test was negative (NTP DB(Access on August 2015)).

Carcinogenicity

The classification is not possible due to lack of data. Besides, ACGIH classified
aluminum metal and its insoluble compound, and fluorides in A4 respectively(ACGIH (7th, 2001) Fluorides, HSDB (Access on June 2015)).

Reproductive toxicity

Data usable for classification were not obtained from List 1 information source,
but a teratogenicity test result is written in HSDB of List 2. It is reported that ina teratogenicity test in pregnant rats in inhalation exposure to this substancethrough a gestation period, increased pre-implantation mortality of fertilized ova
at 0.03-0.2 mg/㎥ and fetal toxicity and teratogenicity at a higher concentration
occurred, but there is no information on maternal toxicity (HSDB (Access onJune 2015)). It is difficult to confirm the details of the original literature written in
Russian (Lenchenko, V.G. et al. (1974)), but by considering that the reportsuggests serious reproductive toxicity effects such as embryonic death andmalformation from an extremely low concentration, the substance was classified
in Category 2 only from this one report in this hazard class.

Specific target organ toxicity(single From the data that this substance is irritating to the respiratory tract and causes
exposure)
nasal bleeding and vomiting (HSDB (Access on June 2015)), it was classified in
Category 3 (respiratory tract irritation).
Specific target organtoxicity(repeated exposure)

There are no data on this substance.
This substance is used as an additive in aluminum refining.
In an epidemiological survey of workers exposed to fluorides in aluminum refining,the majority of 107 employees exposed to relatively high concentrations (2.4-6.0mg/㎥) developed fluorosis after 10-year exposure and showed moderate tosevere osteosclerosis with the limitation of dorsal spine mobility after 15 years(ACGIH (7th, 2001) Fluorides). Moreover, it is reported that workers in
occupational exposure to fluorides did not show bone lesions at an average
concentration of 2.65 mg/㎥, but developed bone changes at an average
concentration of 3.38 mg/㎥ (ACGIH (7th, 2001) Fluorides).
Therefore, it was classified in Category 1 (bone).
Besides, effects on teeth by this substance were not reported, but it became
evident that excessive ingestion of fluorine affects mainly skeletal tissues (bonesand teeth). On top of that, dental fluorosis only occurs in tooth developing stage
from birth to 6 or 8 years of age unlike bones (IPCS 227 (2002)), andconcentrations above 1.5 mg/L of the WHO Guideline value for drinking water
quality carry an increased risk of dental fluorosis, and much higher
concentrations could lead to skeletal fluorosis (WHO (2011) Guidelines fordrinking-water quality, 4th ed.), therefore, it is thought that this substancepossibly affects teeth in children.

Aspiration hazard

No data available

Other information

No data available8 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EA02
ＡｌＦ３

SAFETY DATA SHEET
rev. 8.0

SECTION 12

Date of Issue
Revised Date

2013/10/16
2024/3/15

Ecological information
AlF3Toxicity
Hazardous to the aquatic
environment Shortterm(acute)Hazardous to the aquatic
environment Longterm(chronic)

No data available

Persistence and degradablility

No data available

Bioaccumulative potential

No data available

Mobility in soil

No data available

Hazard to the ozone layer

No data available

Other adverse effects

No data available

SECTION 13

No data available

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
AlF3

International regulation
UN number1759

UN proper shipping name

CORROSIVESOLID,N.O.S.

UN classification

8Transport hazard class

Not applicable

Packing group

Ⅰ

Hazardous to the aquaticenvironment

No data available

Maritime transport in bulk
according to IMO instruments

No data available

Japanese lows and regulations

Refer to “15. Regulatory information.”

Special precautions for users

Requires retention of yellow card when transporting.
When transporting, protect from direct sunlight and take on cargo without
breakage of container, corrosion and leakage.
Do not stack heavy good thereupon.

Special Provisions154

9 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EA02
ＡｌＦ３

SAFETY DATA SHEETrev. 8.0

SECTION 15

Date of Issue
Revised Date

2013/10/16
2024/3/15

Regulatoly information（Japan）
AlF3

Occupational Safety and Health
Law
PRTR Law

There is it in the case of an application or an application

Poisonous and Deleterious
Substances control Law

Not applicable

Labor Standards Act

There is it in the case of an application or an application

Chemical substances control Law

Not applicable

Fire fighting Law

Not applicable

Air Pollution Control Act

Not applicable

Water Pollution Prevention Act

There is it in the case of an application or an application

Water Supply Act

There is it in the case of an application or an application

Sewerage Act

There is it in the case of an application or an application

Marine Pollution Prevention Law

Not applicable

Waste Management and Public
Cleansing Act

Not applicable

NoteEnsure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16

Not applicable

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)