BPG400
Bayard-Alpert Pirani Gauge
The INFICON Bayard-Alpert Pirani Combination
Gauge, BPG400, functions as two gauges in a single
compact unit measuring from 5 × 10-10 mbar toatmosphere (3.8 × 10-10 Torr to atmosphere).
Combining technologies reduces the complexity ofinstallation, setup, and integration. Choose the BPG400
for affordable and repeatable process to base pressure
measurements in one economic package.

ADVANTAGES• Extremely wide measurement range from 5 × 10-10 mbar to atmosphere (3.8 × 10-10 Torr to atmosphere)• Excellent repeatability in the process pressure range from 10-8 ... 10-2 mbar of 5%• The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess
contamination from high pressure operation• Long-life yttrium oxide coated iridum filament• Optional graphic display and Fieldbus interfaces available• Automatic high vacuum Pirani adjustment reduces operator interventions• RoHS compliance
APPLICATIONS• Pressure measurement in semiconductor process and transfer chambers• Industrial coating• General vacuum measurement and control in the low to ultra high vacuum range

1BPG400

BPG400
ORDERING INFORMATION
Type Sensor

BPG400

BPG400

BPG400

BPG400without LCD

with LCD

with Profibus DP

with DeviceNet™

DN 25 ISO-KF
DN 40 CF-R

353-500
353-502353-501535-503353-505353-506

353-507353-508

Replacement Sensor

BPG400

BPG400

BPG400

BPG400without LCD

with LCD

with Profibus DP

with DeviceNet™

354-490354-491354-490354-491354-490354-491354-490354-491

DN 25 ISO-KF
DN 40 CF-R

Accessories

Part no.

Power supply 24 V (dc) / RS232C line
Bakeout extension, 100 mm (3.94 in.)
BaffleCentering ring with baffle DN 25 ISO-KF

353-511353-510353-512211-113Power supply 24 V (dc) / RS232C line
RS232 to PC / PLC
D-Sub, 9-pin, female

D-Sub, 15-pin, female
5m5m

Bakeout extension:

Baffle:Allows measurement at flange temperatures up to 150°C.
Easy installation into the vacuum connection - no tools
required.

Prevents contamination of the sensor.
Fast and easy installation.
Standard

24 V (dc)supply1.8 m
90 ... 250 V (ac) supply

ACCESSORIESTypePart no.

Power supply 24 V (dc) / RS232C line
Bakeout extension, 100 mm (3.94 in.)
BaffleCentering ring with baffle DN 25 ISO-KF

353-511353-510353-512211-113

2BPG400BaffleBPG400
SPECIFICATIONSBPG400 Standard
Measurement range (air, O2, CO, N2)
Accuracy 10-8 … 10-2 mbar
Repeatability 10-8 … 10-2 mbar
Degas 1) p < 7.2 × 10-6 mbar
Pressure, max. (absolute)Temperature

5 × 10-10

BPG400 Display… 1000 mbar (3.8 × 10-10… 750 Torr)±15% of reading
5% of reading
Electron bombardment, max. 3 min
2 barOperation (ambient)

0 … +50°C

Storage–20 … +70°C

Bakeout
At flange with extensionAt flange without extension
Electronics removed
Supply voltage
Output signal analog

150°C
80°C
150°C
+20 … +28 / 0.8 V / A (dc)
0 … +10 V

Measurement range+0.774 … +10 V

Voltage vs. pressure

0.75 V / Decade

Error signal
Load impedance, min.
Interface (digital) 2)
Electrical connection
Cable length, max.3)
Materials exposed to vacuum
Internal volume KF / CF
Weight KF / CF
Degree of protection

0.3 / 0.5 V
10 kΩ
RS232CD-Sub, 15-pin, male
100 m (330 ft)
Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
24 cm3 (1.46 in.3) / 34 cm3 (2.1 in.3)
285 g / 550 gIP301)

Reduced accuracy during degas2)

Simultaneous use of RS232C or VGC40x and VGC50x series controllers and Fieldbus is not allowed3)

For RS232C operation <30 m3

BPG400BPG400
SPECIFICATIONS INTERFACES
DeviceNet™
ProtocolData rate switch
Cable length

DeviceNet™, group 2 slave only
125, 250, 500 kBaud or network programmable

125 kbps

500 m (1650 ft.)

250 kbps

250 m (825 ft.)

500 kbps
MAC ID
Digital functions

100 m (330 ft.)
Two switches (address 00 – 63) or network programmable
Read pressure, select units: Torr, mbar, Pa
Degas function, Pirani full scale adjust
Monitor gauge status
Safe state allows definition of behavior in case of error

Analog functions
Visual communication indicators
Specification
Device typeI / O slave messaging
Setpoint relays

Detailed alarm and warning information
0 … 10 V analog output pressure indication
two setpoint relays A + B
LED network status (green / red)
LED module status (green / red)
DeviceNet™ “Vacuum Gauge Device Profile”“CG” for combination gauge
Polling only2Range

1 × 10-9 … 100 mbar

Relay contact

NO, potential freeHysteresis

10 % of reading

Contact rating
Supply voltage for DeviceNet™

60 V / 0.5 A (dc)
+11 - +25 V / 0.5 A (dc)

Supply voltage for gauge
Connector for DeviceNet™

+20 - +28 V / 0.8 A (dc)
Microstyle, 5-pin

Connector for Gauges (analog output,supply voltage, setpoints)

D-Sub, 15-pin, male

PROFIBUS DP
Baud rates
Address
Digital functions

9.6 / 19.2 / 93.75 / 187.5 / 500 kBaude
1.5 / 12 MBaud
Two switches (address 00 - 127) or network programmable
Read pressure, select units: Torr, mbar, PaDegas function, Pirani full scale adjust
Monitor gauge status, filament status
Safe state allows definition of behavior in case of error

Analog functions

Detailed alarm and warning information
0 … 10 V analog output pressure indication
two setpoint relays A + B

4BPG400

BPG400
PROFIBUS DP
Setpoint relays

2-9Range

1 × 10 ... 100 mbar

Relay contact

NO, potential freeHysteresis

10 % of reading

Contact rating
Connector for Profibus DP≤30 V / ≤0.5 A (dc)
D-Sub, 9-pin, female

Connector for BPG (analog output,supply voltage, setpoints)

D-Sub, 15-pin, male

DIMENSIONS

mm (in.)www.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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