EV GROUP®

PROCESSSERVICES

www.EVGroup.com

EVG at a Glance
Our comprehensive process knowledge is a result of ourdecades of experience. This knowledge creates benefits andadvantages for our customers from the early stages of processdevelopment to the final goal of high-volume production.
With state-of-the-art application labs at our headquartersin Austria, as well as in North America and Asia, EV Group is
focused on delivering superior process expertise to our growing
global customer base every step of the way. We can provide
consultancy services and support for initial developmentthrough final integration at the customer’s site.
Process know-how is key to achieving the shortest time tomarket for your product. EV Group is a global supplier to:

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Advanced Packaging & 3D Interconnect■

Nanotechnology

MEMS
SOI & Engineered Substrates
Compound Semiconductor andSilicon-based Power Devices

EVG Process Consultancy Expertise
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Proof of Concept
Process Development
Pilot Line ManufacturingOn-site Support & Training
Full Service Wafer Processing

EVG Process Portfolio

EVG Process Expertise

SmartNIL®
EVG®7300®
SeriesEVG 720
NanoFill™
EVG®770
NanoSpray™
HERCULES®
NIL
Maskless
RIE,
EVG®300
Exposure
DRIE
SeriesResistNanoWafer &Coating
imprint
Template
Spin/Spray
Lithography
Fabrication
OmniSpray®
EVG®100
SeriesMLE™
LITHOSCALE®

Substrate
Cleaning
Substrate
Bondingfor SOI

Alignment
Verification
PlasmaActivation

EVG®850
Series
LowTemp®

EVG Processes

ResistDeveloping

EVG®600
SeriesHERCULES®
IQ Aligner®
EVG®40
Metallization
Series...etc.

Bond
Alignment

Wafer
DicingCVD,
LPCVD,
PVD,...

Electroplating

Wet
Etching

Proximity
Lithography

SmartView®

Thinning,
CMP
Wafer
Bonding
Temporary
Bonding/
DebondingMetrology

GEMINI®
BONDSCALE®

ResistLift-Off

EZD®
EZR®

Oxidation

EVG Equipment for Process Services

EVG®500Series
ComBond®

StressReliefEtching

Chip-toWafer
BondingWafer
Bumping &Redistribution

EVG’s worldwide application labs focus on demonstrating and developing processes within our core competencies of wafer bonding,lithography and metrology. We provide access to other key processing steps through our preferred partner network around the globe.
Please contact us and let EVG be your total process service solution provider.

www.EVGroup.com

EVG’s Process Services

EV Group Global Locations Application Laboratories

EVG process engineering provides full service wafer
processing and comprehensive technical support and advice
to the semiconductor industry.

Headquarters
EV GroupE. Thallner GmbHDI Erich Thallner Strasse 14782 St. Florian am Inn+43 7712 5311 0
ProcessTechnologySD@EVGroup.com

Our experienced team of process, application and equipment
engineers supports samples processing, design ofexperiments and process optimization.
EVG’s application labs provide the industry’s most advanced
equipment in ISO 4* and ISO 5* environments with aprofessional setting and infrastructure for wafer processing.
Benefits

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Consultancy and processing by leading experts
Processing by experienced specialists
No capital expenditure required
Access to state-of-the-art equipment
Small batch sizes possible
Capability to process wafers from 2’’ to 300 mm
High success rate for sample processing
Reliable scheduling and fast executionJapan
EV Group Japan KK
Yokohama Business Park East Tower 1F
134, Godo-cho, Hodogaya-ku,
Yokohama-shi, Kanagawa, 240-0005+81 45 348 0665
Technology@EVGroup.jp
North America
EV Group Inc.
7700 South River ParkwayTempe, AZ 85284+1 480 305 2400
ProcessUS@EVGroup.com

Access to EVG’s partner service providers
All EVG unit operations can be utilized in any lab*according to ISO 14644

Get in touch:Contact@EVGroup.com

Printed on paper from sustainable sources. Data, design and specifications may not simultaneously
apply; or depend on individual equipment configuration, process conditions and materials and mayvary accordingly. EVG reserves the right to change data, design and specifications without priornotice. All trademarks, logos, website addresses or equipment names are registered trademarks
and/or the property of EV Group or their respective owners.
Printed on paper from sustainable sources© EV Group (EVG). All rights reserved. V24/04

Cleanroom at EVG headquarters

www.EVGroup.com

www.EVGroup.com