The M a te rials R esea rch S o ciety o f Ja p an

Transactions of the Materials Research Society of Japan
Volume 29 Number 3 May 2004

CONTENTS
Symposium of Si-LSI-Related Materials, Processes and Characterization Technology
Preface ………………………………………………………………………………………………………………………………………

655

Annealing Effects on the Mixed Abrasive Slurry in the Oxide Chemical Mechanical Polishing …………………………
Y.-J. Seo and S.-W. Park

657

Chemical Mechanical Polishing (CMP) Characteristics of Ferroelectric Thin Films For FRAM Applications ………
Y.-J. Seo and S.-W. Park

661

Thermal Stability and Electrical Characteristics of Ultrathin High-k Dielectric Metal Oxide Films on the
SiON-passivated Si Substrate ……………………………………………………………………………………………………………
T. F. Chiang, S. L. Cheng and L. J. Chen

665

Borazine-Siloxane Polymer, A Novel Low-k Material ………………………………………………………………………………
Yuko Uchimaru, Naoko Koda, Masami Inoue and Hiroshi Yanazawa

669

Electrical Characterization Using Scanning Probe Microscopy for Microscopic Diagnosis of Device Structure ………
T. Matsukawa, S. Kanemaru, M. Nagao, H. Tanoue and J. Itoh673

Vertical Double-Gate MOSFET Fabricated Using Ion-Bombardment-Retarded Etching …………………………………
Meishoku Masahara, Yongxun Liu, Shinichi Hosokawa, Takashi Matsukawa, Kenichi Ishii, Hisao Tanoue,
Kunihiro Sakamoto, Toshihiro Sekigawa, Hiromi Yamauchi, Seigo Kanemaru and Eiichi Suzuki

679

Current Status and Future Prospects of Low Dielectric Constant Materials For ULSI Applications ……………………
Kazuhiko Endo

685

Tight-Binding Quantum Chemical Molecular Dynamics Simulations on Low Energy Boron Implantation Process
into Silicon Surface ………………………………………………………………………………………………………………………
Katsumi Sasata, Naoyuki Isoda, Akira Endou, Momoji Kubo, Akira Imamura, Hidehiko Yabuhara, Masaaki Kanoh andAkira Miyamoto

691

The Nano-CMOS era. Will CMOS be Scaled Beyond the Roadmap? …………………………………………………………
S. Deleonibus, T. Ernst, B. de Salvo, M. Vinet, T. Poiroux, B. Guillaumot and F. Ducroquet

695

Self-aligned FinFETs with Wide Source/Drain Regions ……………………………………………………………………………
Byung-Gook Park, Dong-Soo Woo and Jong Duk Lee

701

Structure and Electrodynamics at a Crystalline Oxide-Semiconductor Heterojunction: Dipole Charges and the“Coulomb Buffer” in the Si(001):SrSi2:SrO Interface ……………………………………………………………………………
M. Buongiorno Nardelli, N. Moghadam, W. A. Shelton, G. M. Stocks, F. J. Walker, M. F. Chisholm and R. A. Mckee

707

Analysis of New SOI Materials and Advanced SOI MOSFETs …………………………………………………………………
Sorin Cristoloveanu

713

Technology Requirements for 45nm Node CMOS and beyond …………………………………………………………………
Tatsuo Noguchi, Yoichi Takegawa, Amane Ooishi and Masaaki Iwai

717

High-performance and Damage-free Plasma Etching Processes for Future ULSI Patterning ……………………………
Seiji Samukawa

723

Symposium of Organic Nano-Materials with Flexible Structure and NICE “KARAKURI” Devices
Preface ………………………………………………………………………………………………………………………………………

729

A Fresh Dimension to Interface Research –Geometrical Interface Engineering and Research Management- …………
Jun-ichiro Takano

731

Self-Assembling Dyes for Use as Molecular Rectifiers ……………………………………………………………………………
Geoffrey J. Ashwell, Wayne D. Tyrell, L. R. Hermann High and Anne J. Whittam

735

Nano-Electrostatic Phenomena at Metal-Phthalocyanine Film Interface ………………………………………………………
Kei Yoshizaki, Takaaki Manaka and Mitsumasa Iwamoto

739

High Field Transport at Interface of Conducting Polymer／Metal Junctions ………………………………………………
Keiichi Kaneto, Daisuke Tanimura and Wataru Takashima

743

Photoirradiation Effects on Polymer Light-Emitting Devices ……………………………………………………………………
Mitsuyoshi Onoda and Kazuya Tada

747

Electrical Characterization of a P3HT Thin Film Prepared by an Applying-Field Casting Method ……………………
Haruka Nishimura, Masaaki Iizuka, Masatoshi Sakai, Masakazu Nakamura and Kazuhiro Kudo

751

Multiple Surface Plasmon Excitations and Emission Light due to Reverse Irradiation in Kretschmann
Configuration with Nanostructured Dye LB Films …………………………………………………………………………………
Susumu Toyoshima, Futao Kaneko, Toshiharu Sato, Kazunari Shinbo, Keizo Kato, Yasuo Ohdaira andTakashi Wakamatsu

755

Chromogenic Responses Induced by Electric Field in Phthalocyanine Derivative LB Films ………………………………
Takayuki Kato, Souki Yamaguchi, Akihiko Takahashi, Nobuyuki Iwata and Hiroshi Yamamoto

759

Rotational Molecular Deformation of Ion Selective Channel Protein that Perforate Excitable Biological Membrane
Hirofumi Hirayama

763

Enhanced Electrochemomechanical Deformation of Polyaniline Film by Optimization of pH and Electrolyte
Concentration ………………………………………………………………………………………………………………………………
Wataru Takashima, Megumi Nakashima, Shyam S. Pandey and Keiichi Kaneto

767

Electrochemical Biosensor Based on Thin Conducting Polymer Film for Phenol ……………………………………………
Rajesh Shyam, W. Takashima and K. Kaneto771

Photoelectric Cells of Organic Dye Thin Films Utilizing Surface Plasmon Excitations ……………………………………
Keizo Kato, Masaru Hirano, Futoshi Takahashi, Kazunari Shinbo, Futao Kaneko and Takashi Wakamatsu

775

Symposium of Advanced Liquid Crystalline Materials
Preface ………………………………………………………………………………………………………………………………………

779

Pure Polarization Gratings From Photocrosslinkable Polymer Liquid Crystals ……………………………………………
Nobuhiro Kawatsuki, Masaomi Kuwabara, Yasumasa Matsuura, Akira Emoto and Hiroshi Ono

781

Antiferroelectric Siloxane Twin Liquid Crystal ……………………………………………………………………………………
Isa Nishiyama, Jun Yamamoto, Hiroshi Yokoyama, Stephane Mery, Daniel Guillon and John W. Goodby

785

Light-Induced Dynamic Behaviors and Tailored Droplet Arrays of Micro-Droplets in Photoresponsive Liquid
Crystal Emulsions …………………………………………………………………………………………………………………………
Takahiro Yamamoto, Jun Yamamoto, Bohdan I. Lev and Hiroshi Yokoyama
Novel Liquid Crystalline Compounds Based on 4-Aryl-2,3,5,6,7,8-Hexasilabicyclo[2.2.2]octanes ………………………
Masaki Shimizu, Masanori Nata, Kotaro Watanabe and Tamejiro Hiyama

789
793

Photochemical Switching Behavior of Composites of Polymer Liquid Crystal/Cholesteric Liquid Crystal by
Photoisomerization of Chiral Azobenzene Molecules ………………………………………………………………………………
Alam Md. Zahangir, Teppei Yoshioka, Tomonari Ogata, Takamasa Nonaka and Seiji Kurihara

795

Photochemical Tuning of the Helical Structure of Cholesteric LC by Photoisomerization of Chiral Azobenzene-based
Compounds …………………………………………………………………………………………………………………………………
Teppei Yoshioka, Seiji Kurihara, Tomonari Ogata and Takemasa Nonaka

799

Phase Transitions and Orientational Structures of Ionic Liquid Crystalline Polymers and Their Nonionic Family
Seiji Ujiie, Yumi Yano and Akira Mori

803

Influence of Aligned Fine Polymer Fibers on Thermal Phase Transition of Liquid Crystal ………………………………
Hideo Fujikake, Takeshi Murashige, Hiroto Sato, Hiroshi Kikuchi, Taiichiro Kurita and Fumio Sato
(Polymer/Liquid Crystal) Composite Systems with Steep Electro-optical Response and Elucidation of its Mechanism
based on Light Scattering and Dielectric Property …………………………………………………………………………………
Ken-ichi Izumi, Quin Niu, Hirotsugu Kikuchi, Yasuhiro Imamura, Norihiro Kaiya, Naoyuki Amaya, Huai Yang,
K. Rajesh, Reiko Kimura, Tomoki Gunjima, Haruumi Hasuo and Tisato Kajiyama
Electro-Rheological Behavior of Hydrogen-Bonded Liquid Crystalline 4’-n-Docosylozy-3’-nitrobiphenyl-4-carboxylic
Acid (ANBC-22) under Sinusoidal Electric Field ……………………………………………………………………………………
Katsufumi Tanaka, Ryuichi Akiyama, Masayuki Takano, Shoichi Kutsumizu and Takanari Yamaguchi

807

811

815

Creation of Large Size Monodomains of Polymer-stabilized Cholesteric Blue Phases ………………………………………
Kiminori Uchida, Yoshiaki Hisakado, Hirotsugu Kikuchi and Tisato Kajiyama

819

Electro-optical Properties of Liquid Crystal Molecules in the Induced Isotropic State by Polymer Network …………
Yasuhiro Haseba, Nobuyuki Otsuka, Hiroshi Abe, Hirotsugu Kikuchi and Tisato Kajiyama

823

Study of Molecular Interactions in the Photopolymerization-Induced Phase Separation of Liquid Crystal andPolymers ……………………………………………………………………………………………………………………………………
Takeshi Murashige, Hideo Fujikake, Seiichiro Ikehata and Fimio Sato

827

Synthesis and Thermal Properties of Liquid Crystals having a Carbonyl Group at the Terminal Position ……………
Yuki Morita, Takeyasu Tasaka, Koji Kabu, Hiroaki Okamoto, Kazuo Kasatani and Shunsuke Takenaka

831

Effect of Molecular Structure on the Formation of Chiral Smectic C Phase in Some Ester Compounds ………………
Takeyasu Tasaka, Kazuhide Ota, Koji Kabu, Yuki Morita, Hiroaki Okamoto and Shunsuke Takenaka

835

Memory Effect of Liquid Crystals Dispersed in Ferroelectric Copolymer of Vinylidene Fluoride andTrifluoroethylene …………………………………………………………………………………………………………………………
Tomonori Koda, Tomoyuki Takahashi, Yoshitaka Maeyanagi, Akihiro Nishioka and Susumu Ikeda

839

Thermal Properties and Molecular Arrangement of Smectic Phase for 4-Alkoxy-3-nitrobenzoic Acids ………………
Takeyasu Tasaka, Hiroaki Okamoto, Yuki Morita, Kazuo Kasatani and Shunsuke Takenaka

843

Molecular Dynamics Simulation of a Nematic Liquid Crystal Under an Applied Electric Field …………………………
Katsuhiko Satoh849

Symposium of Photonic Nano-materials
Preface ………………………………………………………………………………………………………………………………………

853

Fabrication of Functional Devices Based on Highly Ordered Nanohole Arrays in Anodic Porous Alumina ……………
Hideki Masuda

855

Fabrication and Electrochemical Study of Fractal Polypyrrole …………………………………………………………………
Hong Zhang, Ye Ma, Ping Li, Zuhong Lu and Zhong-Ze Gu

857

Self Assemble Structure of Amphiphilic Di-block Copolymer Having Azobenzene Moieties ………………………………
Hirohisa Yoshida, Kazuhiro Watanabe, Ryoko Watanabe and Tomokazu Iyoda

861

Tunable Structural Color in Colloidal Crystal Films ………………………………………………………………………………
Hiroshi Fudouzi, Norio Shinya and Younan Xia

865

Enhanced Optical Sensing of Biological Important Anions with Functionalized Gold Nanoparticles ……………………
Shigeru Watanabe, Takashi Nakamura, Yuki Tazume, Hideki Seguchi and Katsuhira Yoshida

869

Synthesis and Chiroptical Property of Helical Conjugated Poly(isocyanide) Derived from L-Valine ……………………
Yuki Yamada and Tomokazu Iyoda

873

Surface Plasmon Resonance from Self-Assembled Ag Nanodots Prepared by One-Step Pulsed Laser Deposition ……
T. Yamamoto, S. Nagare and M. Senna

877

Photopattern Shapes of a Photodegradable Polyelectrolyte Monolayer Affected by an Ionic Strength of Aqueous
Developer Solutions ………………………………………………………………………………………………………………………
Nozomi Nawa, Masaru Nakagawa, Takahiro Seki and Tomokazu Iyoda

881

Photoswitchable Magnetic Langmuir-Blodgett Films ………………………………………………………………………………
Takashi Yamamoto, Akiko Murofushi, Yasushi Umemura, Osamu Sato and Yasuaki Einaga

885

Morphology Control of Fibrous Molecular Self-Assemblages Formed from an Azopyridine Carboxylic Acid ………
Daisuke Ishii, Mitsuru Udatsu, Masaru Nakagawa and Tomokazu Iyoda

889

Porphyrin Supramolecules as Materials for Photosynthesis and Third Order Nonlinear Optics …………………………
Yoshiaki Kobuke, Akiharu Satake and Kazuya Ogawa

893

Study of the Organic-inorganic Multi-layer Thin Films Fabricated via a Layer-by-layer Self Assembly Method for
an Optical Filter ……………………………………………………………………………………………………………………………
Jin Ho Kim, Sea Hoon Kim and Seimei Shiratori
Preparation of Monodispersed Polymer Particles Containing Azobenzene Moieties ………………………………………
Atsushi Shishido, Eri Miyamoto and Tomiki Ikeda
Structure and Properties of Protonated Water-insoluble Porphyrin J-Aggregates Formed at Liquid-Liquid or
Gas-Liquid Interface ………………………………………………………………………………………………………………………
Hiroshi Segawa, Shinsuke Okada, Noriko Horikawa and Jotaro Nakazaki

899
903

907

Molecular Wire by Supramolecular Array of Hexacoordinating Imidazolyl Porphyrin Ga Complex …………………
Naoto Nagata, Shin-ichi Kugimiya, Ei-ichi Fujiwara and Yoshiaki Kobuke

911

Study of Optimized Bandwidth Depending on Dopants in Perfluorinated Graded Index Polymer Optical Fibers ……
Masaki Naritomi, Tsuyoshi Onishi, Hidenobu Murofushi and Naotoshi Nakashima

915

Dye-sensitised Solar Cell Using Chlorophyll Immobilized on TiO2 Nanocrystalline Film Electrode ……………………
Yutaka Amao and Tasuku Komori919

The Response Characteristic of Optical Carbon Dioxide Sensor Using pH Indicator Immobilized in Ethyl Cellulose
Film ……………………………………………………………………………………………………………………………………………
Naoki Nakamura and Yutaka Amao

923

Visible Light-induced H2 Production from the Bioresources Using Photosensitization of Zn Chlorophyll-a
Yumi Takeuchi and Yutaka Amao

927

Development of Pressure-Sensitive Paints: Electro- and Photochemical Behavior of a Porphyrin Monolayer ………
Naoko Araki, Akio Ichimura, Kazunori Mitsuo, Keisuke Asai, Makoto Obata and Shigenobu Yano

931

Photochemical Property of Porphyrin Derivatives Assembled on Diruthenium Complex Having a Similar Frame of
Hemerythrin ………………………………………………………………………………………………………………………………
Misaki Nakai, Norie Tanihara, Makoto Obata, Masafumi Harada, Seiji Akimoto, Iwao Yamazaki, Isamu Kinoshita,
Akio Ichimura, Mikio Hoshino, Masahiro Mikuriya and Shigenobu Yano

935

Photoelectrochemical Formation of Nano-Porous Structures on TiO2 Film Electrode ………………………………………
Takashi Sugiura, Han Jin Ryu, Atsuo Suzuki and Hideki Minoura

939

Nanoporous and Low-Density Materials For Laser Produced Extreme UV Light Source …………………………………
Kenji Nagai, Hiroaki Nishimura, Tomoharu Okuno, Takashi Hibino, Ryoji Matsui, Yezheng Tao, Mitsuo Nakai,
Takayoshi Norimatsu, Noriaki Miyanaga, Katsunobu Nishihara and Yasukazu Izawa

943

Regioselective Immobilization of Protein on the Surface of Polymeric Microchannel by Photo-reactive Crosslinker
Hizuru Nakajima, Toru Fukuda, Miki Takizawa, Takuya Shimosaka, Toshiyuki Hibo and Katsumi Uchiyama

947

Photo-Fluorescent Behaviors of MMA or St-Copolymers having Azomethine Side Chain Groups Synthesized by the
Reaction of Coploy-Vinylguanamine Units with p-Dimethylaminobenzaldehyde ……………………………………………
Takatoshi Miyaji, Chiaki Azuma and Shigeo Nakamura
Photoinduced Reorientation of Liquid Crystals Doped with Thiophene having Ester Moieties …………………………
Masahiro Yaegashi, Atsushi Shishido, Takeshi Shiono and Tomiki Ikeda

951
955

Electronic Structure of Oligo-3, 4-ethylenedioxythiophene ………………………………………………………………………
Masao Oda and Stephan Rauschenbach959

Symposium of Conducting Polymers
Preface ………………………………………………………………………………………………………………………………………

963

ESR and ENDOR Spectroscopy of Solitons and Polarons in π-Conjugated Polymers ………………………………………
Shin-ichi Kuroda

965

Charge Carrier Studies of Regioregular Polyalkylthiophene ……………………………………………………………………
Hiroshi Ito, Sota Ukai, Noritsugu Nomura, Kota Hayashi, Tadafumi Ozaki, Yasuhito Muramatsu, Kazuhiro Marumoto
And Shin-ichi Kuroda

971

Photogeneration and Recombination Kinetics of Charged Excitations in Conducting Polymer/Fullerene Composites
Kazuhiro Marumoto, Yasuhito Muramatsu and Shi-ichi Kuroda

977

Third-harmonic Generation in CT-type Conjugated Polymers …………………………………………………………………
Hideo Kishida, Hiroshi Okamoto, Ban-Lin Lee, Hisashi Kokubo and Takakazu Yamamoto

981

Thiophene-Based Semiconducting Materials: Integrated Functionalities of Electronics and Photonics …………………
Shu Hotta

985

Mesomorphic and Luminescent Polyacetylenes ……………………………………………………………………………………
Jacky W. Y. Lam, Zhiliang Xie, Yuping Dong, Hoi Sing Kwok and Ben Zhang Tang

991

Structures and Properties of Liquid Crystalline Materials Oriented under Magnetic Field ………………………………
Koichiro Yonetake, Hiroshi Awano, Osamu Haba and Junji Kido

997

Influence of Surface Shape of Thin Films on Electrical Characteristics of Organic Electroluminescent Devices ……
Yuichiro Kikuchi, Keiichi Tanaka and Shigetaka Fujita

1001

Ribbon-Formed Organosulfur Supramolecules for Novel Nanoenergy Devices ………………………………………………
Katsuhiko Naoi and Nobuhiro Ogihara

1005

Application of Poly(3,4-ethylenedioxythiophene) in Dye-Sensitized Solar Cells ………………………………………………
Shozo Yanagida and Yasuteru Saito

1011

Dye-sensitized Solar Cells Using Ionic Liquid-based Electrolytes ………………………………………………………………
Hiroshi Matsui, Kenichi Okada, Nobuo Tanabe, Ryuji Kawano and Masayoshi Watanabe

1017

Effects of Compositions of Boroxine Polymers on Electrochemical Properties of PEO-based Electrolyte Systems …
Ruoyuan Tao and Tatsuo Fujinami

1021

Ionic Conductivity and Mechanical Property of Cross-linked Hyperbranched Polymer Electrolytes for Lithium
Secondary Batteries ………………………………………………………………………………………………………………………
Takahito Itoh, Seiji Horii, Shinya Hashimoto, Takahiro Uno, Masataka Kudo and Osamu Yamamoto

1025

Design of Lithium Polymer Gel Electrolyte Using Ion-polymer Interaction …………………………………………………
Yuria Saito, Shuuhei Murata, Yoshihiro Uetani, Keisuke Kii and Yoshihiro Minamizaki

1031

Polymer Electrolyte Membranes from Novel Sulfonated Polyimides for Direct Methanol Fuel Cell ……………………
Yan Yin, Otoo Yamada, Jianhua Fang, Kazuhiro Tanaka, Hidetoshi Kita and Ken-ichi Okamoto

1035

Performance of Polymer Electrolyte Membrane Fuel Cells Made from Sulfonated Polyimides …………………………
Otoo Yamada, Yan Yin, Kazuhiro Tanaka, Hidetoshi Kita and Ken-ichi Okamoto

1039

Pyridine as a BrØnsted Based for Anhydrous Proton Conductors ………………………………………………………………
Md. Abu Bin Hasan Susan, Hirofumi Nakamoto, Migyung Yoo and Masayoshi Watanabe

1043