Low Voltage Piezo Actuators

Product range and technical data© All pictures, photos and product descriptions ar the intellectual propertyof Piezomechanik Dr. Lutz Pickelmann GmbH.
Utilisation and copies by third parties have to be authorized.
All rights reserved.

Contents1.
1.1

Stack types piezo actuators
Low voltage actuators with preloaded casings VS

6

1.2

Piezocartridges: Low voltage actuators in casings with front mount threading

12

1.3

Low voltage electrostrictive stacks

16

2.
2.1

Ring actuators (stack type hollow cylinders)Low voltage ring actuators: Bare ring actuators (without casing)

18

2.2

Low voltage ring actuators with internally prestressed casings VS

20

2.3

Electrostrictive low voltage ring actuators

22

3.
3.1

Accessories
Electricals

24

3.2

Mechanics

24

3.3

Optic adaptors for ring actuators

25

3.4

Screw-in front adaptors SE (for stacks with casings VS)

25

PIEZOMECHANIK

Selecting a proper actuator

Guideline:
The main pre-requisite for selecting suitable piezo components is the precise
definition of the needed operation profile by the user !
Any supplier of piezo-mechanical components will highly appreciate precise
specifications of the requested components beyond “the system shall do as muchas possible”.
Putting definite numbers on the needed piezo-parameters is helpful to avoid oversizing and mismatch. Poorly selected system components are ineffective andtherefore expensive.
Please try to analyze the needs for operating your mechanics successfully according to
the following:
A, what shift/stroke shall be achieved ?
B, what force variation shall be generated by the piezo action ?
C, what static preload is acting on the actuator from the beginning ?
D, what is the desired maximum operation frequency ?
E, what is the desired stroke at maximum frequency (D) ?
F, what is the desired max. frequency at maximum stroke (see A) ?
G, shortest achievable rise-/fall-time ?
H, what external masses shall be attached to the actuator ?
A, to C, allow an actuator selection for low dynamic operation according
D, to H, aims for the best match for the designated dynamic operation.
Selecting the amplifier
The above selection process results in a piezoactuator of distinct voltage range and electrical
capacitance. Only amplifiers with a matched voltage
range should be considered for use.
Do not use amplifiers providing higher voltage !

The dynamic operation profile D, to H, defines theneeded current levels (I peak and I average).
When the power consumption of the actuator
exceeds the Watt-range, self-heating of the piezoceramics can occur.
See brochure: First Steps towards Piezoaction
For details see brochure:“First Steps towards Piezoaction”

First Steps towards Piezoaction

Thermograph of a dynamically operated piezo stack

PIEZOMECHANIKGeneral comments

Low voltage stacks:
Co-fired multilayer actuators (CMA): also called“monolithic” stacks, involve no gluing, but a hightemperature sintering of the complete ceramicelectrode pile. Operating voltages areup to 200 V.
Rectangular cross sections are typical due to theease of cutting processes in production.
High voltage stacks:
Composite structures made by the stacking ofseparately finished piezoceramic discs and metalelectrode foils that are joined through the use ofadhesives. Operating voltages ranging from 500 V
thru 1000 V are typical. Cylindrical shapes aremost common.
Ring actuators:
A stack with center bore: made with rings insteadof discs. This type of actuator is available in both
low and high voltage form.
Actuators with integral preload:
PIEZOMECHANIK offers all kinds of piezostacks ina cased version with internal preload.
The standard preload shows forces of about
10 - 20% of the maximum load. This design covers
a very wide range of applications.
Preloaded actuators with casings are much morerugged than the bare ceramic stacks and are more
likely to withstand “rough” handling and operation,or the impact of other environmental influences.
On request, PIEZOMECHANIK provides actuatorswith increased preload levels up to symmetricallyacting push-pull arrangements withregard to the force balance.

Dynamic operation:
The real operating frequency of a piezomechanicalsystem is usually held far below the actuator’s resonance frequency
Ask for special low capacitance low voltage actuator’s PSt150hTc
For high dynamic applications● To reduce power consumption● To reduce self-heating
Do not misinterpret catalogue data:
Not all operating specifications can be realized at
the same time due to simple physical facts.
● Maximum displacement/shift/stroke andmaximum force generation /max. blocking
force cannot be generated at the same time,
only either-or.
● The maximum actuator shifts (strokes) shown indata sheet are only valid under constant loadconditions (no force variation ! ).
● Two values for stroke are stated in the data sheet
A, for unipolar activation 0 V /+Umax
B, for semibipolar operation -Umin /+Umax
The semi-bipolar operation increases the openloop stroke of a stack by 20 - 30 %.
Any kind of stack actuator is suitable for semibipolar operation at room temperature.
Example:Piezostack PSt 150/5x5/20
Unipolar operation 0 V/ +150 V: stroke 20 µm e.g.
with a PIEZOMECHANIK LE 150 unipolar power
amplifierSemi-bipolar operation -30 V/+150 V: stroke 27 µm
with a PIEZOMECHANIK SVR 150 amplifier

PIEZOMECHANIK

1. Stack type piezo actuators
1.1 Low voltage actuators with preloaded casings VS
PSt 150/4 /… VS9General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 40 N
Max. load force: 300 N
Max. force generation: 300 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/4/7 VS9: approx. 0.05 Nanometer

9
3

30.5

M2, 3 mm depth

L
3
3

3
SW 6 mm
M3, 4 mm depthType

PSt 150/4/7 VS9PSt 150/4/20 VS9max. stroke

lengthstiffness

mmel.
capacitance
nF

N/µm

resonance
frequency
kH z

µm
13/9
27/20

19
28

170
340

25
12

40
30

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178 with BNC connector
9Options:
Coaxial cable RG 178 with LEMO connectors 00250 or 0S250
Moving end with spherical end piece VbS
UHV compatibility

3
1
R
1

30.5

Accessories see section 3
Stroke A/B

A: for –30 V thru +150 V
B: for 0 V thru +150 V
Max. force generation: for –30 V thru +150 V

6

PIEZOMECHANIK

VbS

PSt 150/5/… VS10
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 150 N
Max. load force: 800 N
Max force generation: 800 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/5/7 VS10: 0.05 Nanometer 10
4
M3, 4 mm depth
40.5

L
SENSOR3PIEZO
SW 8 mm
M3, 4 mm depthType

PSt 150/5/7 VS10
PSt 150/5/20 VS10
PSt 150/5/40 VS10
PSt 150/5/60 VS10
PSt 150/5/80 VS10
PSt 150/5/100 VS10

max. stroke

lengthstiffness

mmel.
capacitance
nF

N/µm

resonance
frequency
kH z

µm
13/9
27/20
55/40
80/60
105/80130/100

19
28
46
64
82
100

350
800
1600
2400
3200
4000

50
25
12
8
6
5

40
30
20
15
12
10

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:
Coaxial cable RG 178 with LEMO connectors 00250
or 0S250

Moving end with spherical end piece Vbs
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 3
 10

 10

 10

4

4

4
5

M3
6

4

VAg

SW 3 mm

R

40.5

VbS

1.

1

40.5

pF

PIEZOMECHANIK

7

PSt 150/7/… VS12
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = 300 N
Max. load force: 1800 N
Max. force generation: 1800 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/7/7: 0.05 Nanometer 12
5
M3, 4 mm depth
40.5

3
SW 4 mmL
SENSOR3PIEZOSW 10 mmM4, 4 mm depthType

PSt 150/7/7 VS12
PSt 150/7/20 VS12
PSt 150/7/40 VS12
PSt 150/7/60 VS12
PSt 150/7/80 VS12
PSt 150/7/100 VS12
PSt 150/7/120 VS12
PSt 150/7/140 VS12
PSt 150/7/160 VS12

max. stroke

lengthstiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z

µm
013/9
27/20
55/40
80/60
105/80130/100
160/120190/140
210/160

19
28
46
64
82
100
118
136
154

0.7
1.8
3.6
5.4
7.2
9
11
13
15

120
60
25
15
12
10
8
7
6

40
30
20
15
12
10
8
6
5

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:
Coaxial cable RG178 with LEMO connectors
00250 or 0S250

Accessories see section 3

 12
5

Moving end with spherical end piece VbS
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection

 12

 12

5

5

M4



70.5

VAg

8 PIEZOMECHANIK

2

SW 4 mm

5
1.

1

40.5

VbS

40.5

pF

PSt 150/10/… VS15
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 400 N
Max. load force: 4000 N
Max. force generation: 3500 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/10/7 VS15: 0.05 Nanometer.

 15
6

M4, 4 mm depth

40.5

3.75
SW 5 mmL
SENSOR3
PIEZO
SW 13 mmM4, 4 mm depthTypemax. stroke

length

µm
27/20
55/40
80/60
105/80130/100
160/120190/140
210/160
240/180
270/200

PSt 150/10/20 VS15
PSt 150/10/40 VS15
PSt 150/10/60 VS15
PSt 150/10/80 VS15
PSt 150/10/100 VS15
PSt 150/10/120 VS15
PSt 150/10/140 VS15
PSt 150/10/160 VS15
PSt 150/10/180 VS15
PSt 150/10/200 VS15

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z

28
46
64
82
100
118
136
154
172
190

3.6
7.2
11
14
18
21
25
28
33
37

120
60
35
25
20
15
14
13
11
10

30
20
14
12
10
8
7
6
5
4

Standard configuration:

Moving end with spherical end piece Vbs
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection

Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:
Coaxial cable RG 178 with LEMO connectors
00250 or 0S250

70.5

VAg

Accessories see section 3

 15

 15

 15

6

6

6

M4

R2

2

40.5

SW 5 mm

Vbs

1

40.5

pF
PIEZOMECHANIK

9PSt 150/14/… VS20
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 1000 N
Max. load force: 7000 N
Max. force generation: 7000 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/14/20: approx. 0.1 Nanometer 20
8
M5, 5 mm depth
SW 6 mm
3

40.5

L
SENSOR5PIEZOSW 17 mm
M8, 7 mm depth

PSt 150/14/20 VS20
PSt 150/14/40 VS20
PSt 150/14/60 VS20
PSt 150/14/80 VS20
PSt 150/14/100 VS20
PSt 150/14/120 VS20
PSt 150/14/140 VS20
PSt 150/14/160 VS20
PSt 150/14/180 VS20
PSt 150/14/200 VS20

max. stroke

length

µm
27/20
55/40
80/60
105/80130/100
160/120190/140
210/160
240/180
270/200

Standard configuration:
Tapped hole in moving end
1 m coaxial cable RG 178 with BNC connector
Options:
Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Coaxial cable RG 316 for power applications

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z

35
53
71
89
107
125
143
161
179
197

7
14
22
30
39
47
55
63
71
80

250
120
70
50
40
35
30
25
22
20

30
20
14
12
10
8
7
6
5
4

Moving end with spherical end piece Vbs
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 3

 20
8
M5

 20

R

3

8
2

40.5

VbS

10 PIEZOMECHANIK8

 20
SW 6 mm

Type

3

VAg

8

40.5

pF

PSt 150/20/… VS25
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 1500 N
Max. load force: 14000 N
Max. force generation: 11000 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/20/20 VS25: approx. 0.1 Nanometer

 25
 10
M6, 6 mm depth
40.5

3

SW 8 mmL
SENSOR
5PIEZOSW 22 mm
M8, 7 mm depthType

PSt 150/20/20 VS25
PSt 150/20/40 VS25
PSt 150/20/60 VS25
PSt 150/20/80 VS25
PSt 150/20/100 VS25
PSt 150/20/120 VS25
PSt 150/20/140 VS25
PSt 150/20/160 VS25
PSt 150/20/180 VS25
PSt 150/20/200 VS25

max. stroke

length

µm
25/20
50/40
75/60
95/80
120/100
150/120
175/140200/160
230/180250/200

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z

37
57
77
97
117
137
157
177
197
217

11
22
33
44
55
66
77
88
100
110

500
250
160
100
80
65
55
50
45
40

28
18
13
11
9
7
6
5
4
3

Thermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 3

Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Coaxial cable RG 316 for power applications
Modifi ed end pieces on request
Stroke A/B

A: for –30 V thru +150 V
B: for –30 V thru +150 V
Max. force generation: for –30 V thru +150 V

PIEZOMECHANIKPIEZOMECHANIK 11

1.2 Piezocartridges:
Low voltage actuators in casings with front mount threading

Stack actuators in cartridge-version offer elegant design features by simple attachment of an actuator tothe mechanics using a front mounting thread. Using this thread a coarse adjustment for the system isprovided. Piezocartridges can retrofit conventional lead screws. Mechanical arrangements for adjusting
purposes can be very simply upgraded by using piezocartridges.

12 PIEZOMECHANIKPIEZOMECHANIK

tilt range
fix holder
coarse adjust byfine pitch thread

reset springtilt plate

piezo
cartridge

bearing

Schematic of a mirror mount based on piezo cartridges for coarse adjust by mounting screw and ultra fineadjustment by piezo action.
The stiffness of piezo cartridges is reduced compared to a normally mounted stack because of the force
transmission from mounting plate to moving end via stack + casing, and in addition by the quality thescrew mount. A lock nut is provided to increase attaching force.
Piezocartridges can therefore withstand high loads, but force generation is reduced due to the lower stiffness. Most applications (e.g. for adjusting purposes) use constant loading.
Standard configuration:

Options:

Casing: stainless steel
Electrical connection: 1 m coaxial cable RG 178
with BNC connector

Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Position detection
Thermostable

Stroke A/B

A: for –30 V thru +150 V
B: for –30 V thru +150 V
Max. force generation: for –30 V thru +150 V

PIEZOMECHANIKPIEZOMECHANIK 13

FPSt 150/4/… M8x0.5(no internal prestress)
Maximum load: 150 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/4/20: approx. 0.1 Nanometer
Type

L

12

M8x0.5
R2

.5
SW10

8

1-1.5

FPSt 150/4/20 M8FPSt 150/4/40 M8FPSt 150/4/60 M8

max. stroke

lengthµm

mm

el.
capacitance
nF

27/20
55/40
80/60

22
40
58

340
700
1000

FPSt 150/5/… M10x0.75(no internal prestress)
Maximum load 600 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/5/20: approx. 0.1 Nanometer
Type
L

15

M10x0.75

FPSt 150/5/20 M10
FPSt 150/5/40 M10
FPSt 150/5/60 M10
FPSt 150/5/80 M10
FPSt 150/5/100 M10

R2

.5
SW15

 9.5

1-1.5

max. stroke

lengthµm

mm

el.
capacitance
nF

27/20
55/40
80/60
105/80130/100

23
41
59
77
95

800
1600
2400
3200
4000

FPSt 150/5/… M12x0.5(-BD) (former versions MPSt(-BD)(no internal prestress)
For retrofi tting translation stages MRL 80.25 and Newport mirror mounts SL
Maximum load: 600 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/5/20 : approx. 0.1 Nanometer
L
SW 12

15

14

M12x0.5

1.5

6

FPSt

26

FPSt-BD

14

11

M12x0.5

SW 12

L

1.5

8.5

14 PIEZOMECHANIKPIEZOMECHANIK

6

Type

FPSt 150/5/20 M12 (BD)FPSt 150/5/30 M12 (BD)FPSt 150/5/40 M12 (BD)FPSt 150/5/60 M12 (BD)FPSt 150/5/80 M12 (BD)FPSt 150/5/100 M12 (BD)FPSt 150/5/120 M12 (BD)FPSt 150/5/140 M12 (BD)max. stroke

lengthµm

mm

el.
capacitance
nF

27/20
40/30
60/40
80/60
105/80130/100
160/120190/140

25
34
43
61
79
97
115
133

800
1200
1600
2400
3200
4000
4800
5600

FPSt 150/7/… M14x1
Prestress force = max. tensile force = 200 N
Maximum load: 1500 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/7/20: approx. 0.1 Nanometer
Type

L

SW12

13

20

40.5

M14x1

5
R1.5
SW20

FPSt 150/7/20 M14
FPSt 150/7/40 M14
FPSt 150/7/60 M14
FPSt 150/7/80 M14
FPSt 150/7/100 M14
FPSt 150/7/120 M14
FPSt 150/7/140 M14
FPSt 150/7/>140 M14

max. stroke

length

µm

mm

27/20
60/40
80/60
105/80130/100
160/120190/140
/>140

28
46
64
82
100
118
136
on requestel.
capacitance
µF
1.8
3.6
5.4
7.2
9
11
13

FPSt 150/10/… M18x1(with internal prestress)
Prestress force = max. tensile force = 400 N
Maximum load: 3000 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/10/20: approx. 0.1 Nanometer
Type
L

SW16

17

20

40.5
7
2 R2.5
M18x1 SW22

FPSt 150/10/20 M18
FPSt 150/10/40 M18
FPSt 150/10/60 M18
FPSt 150/10/80 M18
FPSt 150/10/100 M18
FPSt 150/10/120 M18
FPSt 150/10/140 M18
FPSt 150/10/>140 M18

max. stroke

length

µm

mm

27/20
55/40
80/60
105/80130/100
160/120190/140
>/140

28
46
64
82
100
118
136
on requestel.
capacitance
µF
3.6
7.2
11
14
18
21
25

PIEZOMECHANIK

15

1.3 Low voltage electrostrictive stacks

Operating voltage 0 V thru +150 V, arbitrary polarity
Bare stacks: on request
Stacks with preloaded casings VS

ESt 150/5/… VS10
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = 150 N
Maximum compressive load: 500 N
Open loop sensitivity for ESt 150/5/6 VS10
at 1 mV amplifier noise: approx. 0.05 Nanometer
10

Type
4
M3, 4 mm depth

40.5

3

ESt 150/5/6 VS10
ESt 150/5/12 VS10
ESt 150/5/18 VS10
ESt 150/5/25 VS10

max. stroke

lengthstiffness

mmel.
capacitance
nF

µm
6
12
18
25

19
28
37
46

600
1200
1800
2400

50
25
16
12

N/µm

SW 8 mm
M3, 4 mm depth
VS 10

ESt 150/7/… VS12
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = 200 N
Maximum compressive load: 1000 N
Open loop sensitivity for ESt 150/7/6 VS12 at 1 mV amplifier noise: approx. 0.05 Nanometer
12

Type
M4, 4 mm depth
SW 4 mm

40.5

3SW 10 mmM4, 4 mm depth
VS 12

16 PIEZOMECHANIK

ESt 150/7/6 VS12
ESt 150/7/12 VS12
ESt 150/7/18 VS12
ESt 150/7/25 VS12
ESt 150/7/40 VS12

max. stroke

lengthstiffness

mmel.
capacitance
µF

µm
6
12
18
25
40

19
28
37
46
64

2
4.2
6.3
8.4
12.6

100
50
33
25
20

N/µm

Electrostrictive stacks, frontmount cartridges versions
FESt 150/5/… M10x0.75 on request
FESt 150/5/… M12x0.5(-BD)
Maximum load: 500 N
Open loop sensitivity for 1 mV amplifier noisewith FESt 150/5/12 M12: approx. 0.1 Nanometer
L
SW 12

15

14

M12x0.5

1.5

FESt 150/5/12 M12 (BD)
FESt 150/5/18 M12 (BD)
FESt 150/5/25 M12 (BD)
FESt 150/5/40 M12 (BD)

6

FPSt

lengthµm

mm

el.
capacitance
nF

12
18
25
40

31
40
48
67

1200
1800
2400
3600

26
14

11

M12x0.5

max. stroke

SW 12

L

1.5

Type

8.5

6

FPSt-BDPIEZOMECHANIK

17

2. Ring Actuators (stack type hollow cylinders)
2.1 Low voltage ring actuators without casing
HPSt 150/14-10/xx
Stroke A/B:

A: for –30 V thru +150 V
B: for 0 V thru +150 V
Max. force generation: for –30 V thru +150 V

 15
 9
Polymer coatingL2

Maximum force generation: 4500 N
Open loop sensitivity for 1 mV amplifier noise for
actuator HPSt 150/14-10/12: approx. 0.1 Nanometer

Type

HPSt 150/14-10/12
HPSt 150/14-10/25
HPSt 150/14-10/40
HPSt 150/14-10/55

max. stroke

length

µm

mm

16/12
32/25
50/40
70/55

13.5
27
on request
on request

Ceramicel.
capacitanceµF

stiffness
N/µm

resonance
frequency
kH z

2.6
5.2

250
120

75
22

Options: 15

Threaded end pieces HAg(together with 1 screw cap)
Optics adaptor 0A ½ ´´ (see section 3)

9

8

6

M 12x0.5
9
5

7

HAg

18 PIEZOMECHANIKHPSt 150/20-15/xx

 22

Maximum load: 11000 N
Maximum force generation: 8000 N
Open loop sensitivity for 1 mV amplifier noise for
actuator HPSt 150/20-15/12: approx. 0.1 Nanometer14.5Polymer coatingL2
Ceramic

Type

HPSt 150/20-15/12
HPSt 150/20-15/25
HPSt 150/20-15/40
HPSt 150/20-15/55

max. stroke

lengthstiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z

µm
16/12
32/25
50/40
70/55

13.5
27
40.5
54

5
10
15
20

450
230
150
100

75
22
15
10

Options: 25

Threaded end pieces HAg(together with 1 screw cap)
Optics adaptor 0A 1 ´´ (see section 3)
Stroke A/B:

A: for –30 V thru +150 V
B: for 0 V thru +150 V
Max. force generation: for –30 V thru +150 V

 15

 12

 10

M22x0.75
 14
7

5

PIEZOMECHANIK 19

2.2 Low voltage ring actuators with internally prestressed casings

HPSt 150/14-10/… VS22
Prestress force = max. tensile force = 400 N
Maximum load: 6000 N
Maximum force generation: 4500 N
Open loop sensitivity for 1 mV amplifier noise for actuator HPSt 150/14-10/12 VS22: approx. 0.1 Nanometer

 15
9
8

SW20

6
M12x0.5
9

4

5.50.5

6

4 5

M2, 4 mm depth
 15

L

 22

Type

HPSt 150/14-10/12 VS22
HPSt 150/14-10/25 VS22
HPSt 150/14-10/40 VS22
HPSt 150/14-10/55 VS22

max. stroke

length

µm
16/12
32/25
50/40
70/50

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z

31
44
58
71

2.6
5.2
7.8
11

250
120
70
50

30
20
14
9

Standard configuration:
Coaxial cable RG 178 length 1 m with BNC connector
Options:
Coaxial cable RG 178 length 1 m with LEMO 00250 or 0S250 connector
UHV compatibility
Low temperature application
Thermostable modification
Position sensor
Optics adaptor 0A ½”: see section 3
Adaptor rings AR: see section 3
Stroke A/B:

A: for –30 V thru +150 V
B: for
0 V thru +150 V
Max. force generation: for –30 V thru +150 V

20 PIEZOMECHANIK

M12x0.5

HPSt 150/20-15/… VS35
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = 700 N
Maximum load: 11000 N
Maximum force generation: 8000 N
Open loop sensitivity for 1 mV amplifier noise for actuator HPSt 150/20-15/12 VS35: approx. 0.1 Nanometer

 25
 15
SW32
 12

10
 14

 M22x0.75

5

80.5

4xM3, 5 mm depth
 26

L
6

4
M22x0.75
 35

Type

HPSt 150/20-15/12 VS35
HPSt 150/20-15/25 VS35
HPSt 150/20-15/40 VS35
HPSt 150/20-15/55 VS35

max. stroke

lengthstiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z

µm
16/12
32/25
50/40
70/50

31
44
58
71

5
10
15
20

450
230
150
100

30
20
17
15

Standard configuration:
Coaxial cable RG 178 length 1 m with BNC connector
Options:
Coaxial cable RG 178 length 1m with LEMO 00250 or 0S250 connector
UHV compatibility
Low temperature application
Thermostable modification
Position detector
Optics adaptor 0A 1”: see section 3
Adaptor rings AR: see section 3
Stroke A/B:

A: for –30 V thru +150 V
B: for 0 V thru +150 V
Max. force generation: for –30 V thru +150 V

PIEZOMECHANIK 21

2.3 Electrostrictive low voltage ring actuators
General data: see brochure: “First Steps towards Piezoaction”

HESt 150/15-8/… bare rings, without casing
Maximum force load: 5000 N
 18
7
Polymer coatingL3

Ceramic

Type

HESt 150/15-8/2
HESt 150/15-8/4
HESt 150/15-8/6
HESt 150/15-8/12

max. stroke

lengthstiffness

mmel.
capacitance
µF

µm
2
4
6
12

3
6
9
18

4
8
12
22

1500
750
500
250

Mechanical end piece HAg as Piezo ring actuators HPSt…/15-8/…
Optics adaptor 0A ½”: see chapter 3

22 PIEZOMECHANIK

N/µm

HESt 150/15-8/… VS 22 casing with internal prestress
Prestress force = max. tensile force = 400 N
Maximum load: 5000 N
Open loop sensitivity for 1 mV amplifier noise for actuator
HESt 150/15-8/6 VS22: 0.05 NanometerTypemax. stroke

length

µm

mm

6
12

26
35
on request

HESt 150/15-8/6 VS22
HESt 150/15-8/12 VS22HEST 150/15-8/>12 VS22el.
capacitanceµF

stiffness

12
22

500
250

N/µm

Standard configuration:
Coaxial cable RG 178 length 1 m with BNC connector
Options:
UHV compatibility
Optics adaptor 0A ½”: see section 3
Adaptor rings AR: see section 3

PIEZOMECHANIKPIEZOMECHANIK 23

3. Accessories
3.1 Electricals
Supply coaxial cables: one side connector, otherside free for attaching piezocomponents such asbare stacks etc.
Cable type RG 178 (PTFE), thickness 1.8 mm:
length 1.5 m
Connectors available: BNC, LEMO 0S250
Cable type RG 316 (PTFE), thickness 2.5 mm:
length 1.5 m
for power applications
Connectors available: BNC, LEMO 0S250
Extension cables:
Connector system LEMO 0S250, length 2 m/4 m/6 m
Cable types RG 178 or RG 316 (see above)
Connecting adaptors for matching different connectingsystems plug (from electronics) /Cable’s connector
LEMO 0S 250/BNC (this adaptor is used to match amplifi ers with LEMO output to a component, having a
BNC connector)
BNC/LEMO 0S250
BNC/LEMO 00250

3.2 Mechanics
Adaptor rings
The adaptor rings are normally used to match the diameter of actuators with casing to mirror mounts, defined for a distinct mirror’s diameter. An often used combination are ring actuators (e.g. with casing VS22),
which are adopted to 2” mirror mount system. The proper adaptor ring is an AR (51/22).

D0thread3x120°

tdDesignation AR X/Y X external diameter, Y internal diameter (corresponds to actuator’s casing’s diameter),T thickness of ring (all dimensions in mm)
AR
AR
AR
AR
AR
AR
AR
AR
24 PIEZOMECHANIKPIEZOMECHANIK

25/10
25/12
25/18
50/18
50/20
50/22
50/25
50/35

t
t
t
t
t
t
t
t

5
5
5
7
7
7
7
7

AR
AR
AR
AR
AR
AR
AR
AR

31/12
31/22
31/25
51/18
51/20
51/22
51/22
51/35

t
t
t
t
t
t
t
t

7
7
7
7
7
7
7
7

3.3 Optic adaptor for ring actuators
Ring actuators are often used within optical arrangements for precise adjustment of transmissive opticalcomponents e.g. within laser resonators or tunable etalons. The optic adaptors allow the simple mounting
and changing of circular optics with the standard diameters 1/2” sand 1”.
Optic adaptor 0A ½”
This element allows mounting of optics with diameter 1/2” up to a thickness of 8 mm. It can be simply
attached using the M12x0.5 thread to all the corresponding ring actuators with a HAg M12x0.5 end piece(bare rings) such as the HPSt 150/14-10/…, HPSt 500/15-8/…, HPSt 1000/15-8/… or the equivalent cased
types with a VS22 casing.
Optic adaptor 0A 1”
This element allows mounting of optics with diameter 1” up to a thickness of 8 mm. It can be simply attached using the M22x0.5 thread to all the corresponding ring actuators with a HAg M22x0.75 end piece(bare rings) such as the HPSt 150/25-15/… or the equivalent cased types with a VS35 casing.

M28x0.75

M14x0.5

16

9

 2,5

 2,5
M28x0.75

M14x0.5
14
3

9

17
4

 10

 25.511 1216

M12x0.5
16

M22x0.5

0A ½’’

0A 1’’

30

3.4 Screw in front adaptor SE (For stacks with casings VS)
The adaptors have a threaded pin for simple attachment to the standard front pieces VS with tapped holeand provide a plane or spherical front to match the actuator for various uses. For example small mirrors
can be glued onto the plane faces.
Designation: SE xx plane and SE x sphere, where xx represents the casing’s diameter, where it is mountedto (e.g. 12 for VS 12).

R

D
2

2
L

L

M xx

M xx
plane

Type
SE9
SE10
SE12
SE15
SE18/20Mx (mm) D (mm)
2.3
3
3
4
5

5
6
7
8
10

L (mm)R (mm)

3
3
4
4
4

2.5
2.5
3.5
3.5
4

spehreMagnetic front pieces
Based on the above described front adaptors,
MA components with magnetic plane face areoffered for VS10 and VS12 casings (designation
MA10 / MA12). Small ferromagnetic components
can be easily attached to the moving pin of stackactuators.
PIEZOMECHANIKPIEZOMECHANIK 25

Low voltage co-fired multilayer
stacks, rings and chips for actuation(without casing)High Voltage Piezo Actuators

Electronic Supplies
for Piezomechanics:
An Introduction
Technical
Data

Check main catalogue

Product range and technical data

Piezomechanik · Dr. Lutz Pickelmann GmbH
Berg-am-Laim-Str. 64 · D-81673 Munich · Phone ++ 49 / 89 / 46 14 67 96 · Fax ++ 49 / 89 /4 31 64 12
e-mail: info@piezomechanik.com · http://www.piezomechanik.com

Stand: März 2013

Low voltage actuators with casings, high voltage actuators