J. Inst. Electrostat. Jpn.

, 32, 3 (2008) 122 128

2 ㊎⢛ᓟ㔚ᭂࠍ᦭ߒߚᓸዊ㑆㓗ౝࠍㅴዷߔࠆᴪ㕙᡼㔚․ᕈ
ᐔ ↰ ᥓ ਯ㧖㧘਄ ㊁ ⑲ ᮸㧖,1㧘ਛ ጊ ඳ ผ㧖㧔2007 ᐕ 3 ᦬ 14 ᣣฃઃ; 2008 ᐕ 4 ᦬ 28 ᣣฃℂ㧕Characteristics of Creeping Discharge Developed in Narrow Gap on
Two Needle Backside Electrodes
Tomoyuki HIRATA,* Hideki UENO㧖,1 and Hiroshi NAKAYAMA㧖
(Received March 14, 2007; Accepted April 28, 2008)
We describe about characteristics of creeping discharge developed in the narrow gap with two backside electrodes,
under a Ps pulse voltage application. Backside electrode position x is defined by horizontal distance from an upper
needle electrode to a lower needle electrode. D is mixture rate of SF6. As a result, in the case of x=2, 5mm under
0.3MPa; flashover voltage decreased from 18.4kV to 17.8kV by 3% SF6 addition into N2. V-characteristics to which
flashover voltage decreased in a low SF6 content were obtained for x=2, 5mm. On the other hand, the V-characteristics
in the flashover voltage of SF6 content D=0% - 10% for x=0, 3mm were not observed. In corona extension obtainedusing ultra-high speed camera, the rapid corona extension was observed on the corona extension process in D=0%.
1.

ߪߓ߼ߦ

ߓࠆߣ㧘ᴪ㕙᡼㔚߇⊒↢ߒ㧘⛘✼⎕უ੐᡿߇⿠ߎࠆ㧚㔚ജᯏߓࠆߣ㧘ᴪ㕙᡼㔚߇⊒↢ߒ㧘⛘✼⎕უ੐᡿߇⿠ߎࠆ㧚㔚ജᯏ⃻࿷㧘ㇺᏒㇱߦ߅ߌࠆ㔚ജ⽶⩄㓸ਛߦࠃࠆ㔛ⷐߩჇടߦ઻ེߩ⛘✼੐᡿߳ߩኻ╷ߣߒߡᭂ߼ߡ⍴ᤨ㑆㗔ၞߢ⿠ߎࠆ᡼
ེߩ⛘✼੐᡿߳ߩኻ╷ߣߒߡᭂ߼ߡ⍴ᤨ㑆㗔ၞߢ⿠ߎࠆ᡼

޿㧘ᄌ㔚ᯏེߩ㜞㔚࿶ൻ࡮ᄢኈ㊂ൻ࡮ዊဳൻ࡮㜞ା㗬ᐲൻߥ㔚⃻⽎ࠍ⺞ߴࠆߎߣߪ㕖Ᏹߦ㊀ⷐߢ޽ࠆ㧚߹ߚ㧘ᯏེߦ↪޿㔚⃻⽎ࠍ⺞ߴࠆߎߣߪ㕖Ᏹߦ㊀ⷐߢ޽ࠆ㧚߹ߚ㧘ᯏེߦ↪޿1)ߤߩᛛⴚ㐿⊒߇ㅴ߼ࠄࠇߡ޿ࠆ 㧚ࠄࠇߡ޿ࠆⶄว⛘✼ߢߪ㧘㔚ᭂߣ࿕૕⛘✼‛߇ធߔࠆㇱಽ߿ࠄࠇߡ޿ࠆⶄว⛘✼ߢߪ㧘㔚ᭂߣ࿕૕⛘✼‛߇ធߔࠆㇱಽ߿
SF6 ࠟࠬߪ㜞⠴㔚࿶ᕈ߿቟ోᕈߥߤߩᄙߊߩ․ᓽࠍᜬߟߎ⛘✼‛ห჻ߩធ⸅ߔࠆㇱಽ߇ᄙߊሽ࿷ߔࠆߚ߼㧘ᓸዊߥ㑆㓗⛘✼‛ห჻ߩធ⸅ߔࠆㇱಽ߇ᄙߊሽ࿷ߔࠆߚ߼㧘ᓸዊߥ㑆㓗ࠟࠬߪ㜞⠴㔚࿶ᕈ߿቟ోᕈߥߤߩᄙߊߩ․ᓽࠍᜬߟߎ
2)2)㧚ߒ߆ߒ㧘SFߣ߆ࠄ㧘㔚ജᯏེߩ⛘✼ߦ↪޿ࠄࠇߡ޿ࠆ
ߩ⊒↢ߔࠆน⢻ᕈ߇޽ࠆ㧚ߘߩߚ߼㧘ᓸዊ㑆㓗ౝࠍㅴዷߔࠆ
6ߩ⊒↢ߔࠆน⢻ᕈ߇޽ࠆ㧚ߘߩߚ߼㧘ᓸዊ㑆㓗ౝࠍㅴዷߔࠆ
㧚ߒ߆ߒ㧘SFߣ߆ࠄ㧘㔚ജᯏེߩ⛘✼ߦ↪޿ࠄࠇߡ޿ࠆ
6ࠟࠬߩ⛘✼⠴ജߪዪㇱ⊛ਇᐔ╬㔚⇇ߦᒝߊଐሽߔࠆ㧚ᓥߞߡ㧘ᴪ㕙᡼㔚ߩ․ᕈࠍ᣿⏕ߦߔࠆᔅⷐ߇޽ࠆ㧚ࠟࠬߩ⛘✼⠴ജߪዪㇱ⊛ਇᐔ╬㔚⇇ߦᒝߊଐሽߔࠆ㧚ᓥߞߡ㧘ᴪ㕙᡼㔚ߩ․ᕈࠍ᣿⏕ߦߔࠆᔅⷐ߇޽ࠆ㧚ᯏེౝߦዉ૕਄ߩ⓭⿠߿ᶋㆆ㊄ዻ☸ሶߥߤߦࠃࠆਇᐔ╬㔚 ᴪ㕙᡼㔚ߪ⢛ᓟ㔚ᭂߩᓇ㗀ࠍฃߌࠆߚ߼㧘⢛ᓟ㔚ᭂ߇ሽ࿷ᴪ㕙᡼㔚ߪ⢛ᓟ㔚ᭂߩᓇ㗀ࠍฃߌࠆߚ߼㧘⢛ᓟ㔚ᭂ߇ሽ࿷ᯏེౝߦዉ૕਄ߩ⓭⿠߿ᶋㆆ㊄ዻ☸ሶߥߤߦࠃࠆਇᐔ╬㔚3)3)⇇ࠍᒻᚑߔࠆ㈩⟎ߢߪSF6 ࠟࠬߩ⛘✼ᕈ⢻ߪ⪺ߒߊૐਅߒ
ߒߥ޿႐วߩ㑆㓗ౝߢߩᴪ㕙᡼㔚․ᕈ߿ᐔ᧼⁁⢛ᓟ㔚ᭂ߇㧘 㧘⇇ࠍᒻᚑߔࠆ㈩⟎ߢߪSF6 ࠟࠬߩ⛘✼ᕈ⢻ߪ⪺ߒߊૐਅߒ
ߒߥ޿႐วߩ㑆㓗ౝߢߩᴪ㕙᡼㔚․ᕈ߿ᐔ᧼⁁⢛ᓟ㔚ᭂ߇ᯏེߩ᡿㓚ߦ❬߇ࠆน⢻ᕈ߇޽ࠆ㧚ߘߩߚ߼㧘ਇᐔ╬㔚⇇ߦሽ࿷ߔࠆ႐วߩᓸዊ㑆㓗ౝᴪ㕙᡼㔚․ᕈߪ⎇ⓥߐࠇߡ޿ࠆ
ሽ࿷ߔࠆ႐วߩᓸዊ㑆㓗ౝᴪ㕙᡼㔚․ᕈߪ⎇ⓥߐࠇߡ޿ࠆ
ᯏེߩ᡿㓚ߦ❬߇ࠆน⢻ᕈ߇޽ࠆ㧚ߘߩߚ߼㧘ਇᐔ╬㔚⇇ߦ
8,9)߅ߌࠆ
SF6 ࠟࠬࠍ↪޿ߚ⛘✼ା㗬ᕈߦ㑐ߔࠆ⎇ⓥ߇ⴕࠊࠇߡ߇ 8,9)㧘
㧘ὐ⁁ߩ⢛ᓟ㔚ᭂࠍ᦭ߔࠆ႐วߩᓸዊ㑆㓗ౝᴪ㕙᡼㔚․߇ὐ⁁ߩ⢛ᓟ㔚ᭂࠍ᦭ߔࠆ႐วߩᓸዊ㑆㓗ౝᴪ㕙᡼㔚․߅ߌࠆSF6 ࠟࠬࠍ↪޿ߚ⛘✼ା㗬ᕈߦ㑐ߔࠆ⎇ⓥ߇ⴕࠊࠇߡ
4,5) 4,5)㧚߹ߚ㧘SF6 ࠟࠬߩ࿾⃿᷷ᥦൻଥᢙߪ
CO2 ߦᲧߴ
ᕈߦߟ޿ߡߪ㧘߹ߛᧂ⸃᣿ߩὐ߇ᄙ޿㧚ߘߩߚ߼㧘ዪㇱ⊛ߥ㧚߹ߚ㧘
SF6 ࠟࠬߩ࿾⃿᷷ᥦൻଥᢙߪ
CO2 ߦᲧߴ
2390023900ᕈߦߟ޿ߡߪ㧘߹ߛᧂ⸃᣿ߩὐ߇ᄙ޿㧚ߘߩߚ߼㧘ዪㇱ⊛ߥ
޿ࠆ޿ࠆ

6)
6)
㧚ߘߎߢઍᦧࠟࠬߣߒߡਇᐔ╬㔚⇇߇↢ߓߚߎߣߦ⿠࿃ߔࠆᓸዊ㑆㓗ౝߩᴪ㕙᡼㔚୚ߢ࿾⃿᷷ᥦൻ߳ߩᓇ㗀߇ᄢ߈޿ਇᐔ╬㔚⇇߇↢ߓߚߎߣߦ⿠࿃ߔࠆᓸዊ㑆㓗ౝߩᴪ㕙᡼㔚㧚ߘߎߢઍᦧࠟࠬߣߒߡ
୚ߢ࿾⃿᷷ᥦൻ߳ߩᓇ㗀߇ᄢ߈޿

SF6 ࠟࠬߣ
N2 ࠟࠬߩᷙวࠟࠬࠍ↪޿㧘SF․ᕈࠍ⺞ߴࠆߎߣߪᗧ⟵޽ࠆ߽ߩߣ⠨߃ࠆ㧚
SF6 ࠟࠬߣ
N2 ࠟࠬߩᷙวࠟࠬࠍ↪޿㧘SF
6 ࠟࠬߩ૶↪㊂ࠍᛥ․ᕈࠍ⺞ߴࠆߎߣߪᗧ⟵޽ࠆ߽ߩߣ⠨߃ࠆ㧚
6 ࠟࠬߩ૶↪㊂ࠍᛥ7)㧚 7)㧚
߃ࠆ⎇ⓥ߽ߐࠇߡ޿ࠆ
߃ࠆ⎇ⓥ߽ߐࠇߡ޿ࠆ

ߘߎߢ㧘2
ὐߩ㊎⢛ᓟ㔚ᭂࠍ⸳ߌߚ᭴ᚑߦ߅޿ߡ㧘㊎⢛ᓟߘߎߢ㧘2
ὐߩ㊎⢛ᓟ㔚ᭂࠍ⸳ߌߚ᭴ᚑߦ߅޿ߡ㧘㊎⢛ᓟ৻⥸ߦ㧘㔚ജᯏེߪ⛘✼ࠟࠬߣ࿕૕⛘✼‛ߩⶄว⛘✼ᣇᑼ৻⥸ߦ㧘㔚ജᯏེߪ⛘✼ࠟࠬߣ࿕૕⛘✼‛ߩⶄว⛘✼ᣇᑼ㔚ᭂߢߩዪㇱ㜞㔚⇇ߦࠃࠆࠦࡠ࠽ߩ⊒↢ߣᴪ㕙᡼㔚․ᕈߦ
㔚ᭂߢߩዪㇱ㜞㔚⇇ߦࠃࠆࠦࡠ࠽ߩ⊒↢ߣᴪ㕙᡼㔚․ᕈߦ
㊎ߩ‛ℂ⊛ࡕ࠺࡞ߣߒ
ࠍណ↪ߒߡ޿ࠆ㧚ⶄว⛘✼ߢߪ㔚ജᯏེౝߩਃ㊀ὐ㧘㊄ዻ☸
N2/SF6Nᷙวࠟࠬਛߢ⺞ߴߚ㧚2㊎ߩ‛ℂ⊛ࡕ࠺࡞ߣߒ
ࠍណ↪ߒߡ޿ࠆ㧚ⶄว⛘✼ߢߪ㔚ജᯏེౝߩਃ㊀ὐ㧘㊄ዻ☸ߟ޿ߡߟ޿ߡ
2/SF6 ᷙวࠟࠬਛߢ⺞ߴߚ㧚2ሶߩઃ⌕㧘ዉ૕਄ߩ⓭⿠ߥߤߦࠃࠅዪㇱ⊛ߥਇᐔ╬㔚⇇߇↢ߡ㧘৻ߟ⋡ߪᯏེౝߩਃ㊀ὐߢߩ㔚⇇㓸ਛࠍ✭๺ߔࠆߚ߼ߩ
ሶߩઃ⌕㧘ዉ૕਄ߩ⓭⿠ߥߤߦࠃࠅዪㇱ⊛ߥਇᐔ╬㔚⇇߇↢ߡ㧘৻ߟ⋡ߪᯏེౝߩਃ㊀ὐߢߩ㔚⇇㓸ਛࠍ✭๺ߔࠆߚ߼ߩ
ၒ߼ㄟߺ㔚ᭂߥߤ㔚ᭂ㈩⟎߇ⶄ㔀ൻߒߚߣ߈ߦ↢ߓࠆᰳ㒱㧘ၒ߼ㄟߺ㔚ᭂߥߤ㔚ᭂ㈩⟎߇ⶄ㔀ൻߒߚߣ߈ߦ↢ߓࠆᰳ㒱㧘ੑߟ⋡ߪGISਛߩ㊄ዻ☸ሶߩሽ࿷ߥߤࠍ⠨߃ߚ߽ߩߢ޽ࠆ㧚ࠠ࡯ࡢ࡯࠼㧦N㊎⢛ᓟ㔚ᭂ㧘ᴪ㕙᡼㔚ੑߟ⋡ߪGISਛߩ㊄ዻ☸ሶߩሽ࿷ߥߤࠍ⠨߃ߚ߽ߩߢ޽ࠆ㧚
2/SF6 2ࠟࠬ㧘ᓸዊ㑆㓗㧘2ࠠ࡯ࡢ࡯࠼㧦N/SF6 ࠟࠬ㧘ᓸዊ㑆㓗㧘2㊎⢛ᓟ㔚ᭂ㧘ᴪ㕙᡼㔚* ౓ᐶ⋵┙ᄢቇᄢቇ㒮Ꮏቇ⎇ⓥ⑼㔚᳇♽Ꮏቇኾ᡹㧔671-2280* ౓ᐶ⋵┙ᄢቇᄢቇ㒮Ꮏቇ⎇ⓥ⑼㔚᳇♽Ꮏቇኾ᡹㧔671-2280
ታ㓙ߦᯏེߩ⵾ㅧㆊ⒟ߦ߅޿ߡ
GIS ਛߦᷙ౉ߒߚ㊄ዻߩታ㓙ߦᯏེߩ⵾ㅧㆊ⒟ߦ߅޿ߡ
GIS ਛߦᷙ౉ߒߚ㊄ዻ
ߩ
ᆢ〝Ꮢᦠ౮
2167㧕
ᆢ〝Ꮢᦠ౮
2167㧕
㒰෰߇ᦨᄢߩ⺖㗴ߣߒߡᱷߞߡ޿ࠆ㧚߹ߚ㧘ࠬࡍ࡯ࠨࠍ⺃
Department
of ElectricalEngineeringand Computer
Sciences,
Department
of ElectricalEngineeringand Computer
Sciences, 㒰෰߇ᦨᄢߩ⺖㗴ߣߒߡᱷߞߡ޿ࠆ㧚߹ߚ㧘ࠬࡍ࡯ࠨࠍ⺃㔚₸ߩ⇣ߥࠆᄙጀ⺃㔚૕ߣߔࠆߎߣ߇⠨߃ࠄࠇߡ߅ࠅ㧘ߘGraduate
Schoolof Engineering,
Universityof Hyogo,
2167 2167
㔚₸ߩ⇣ߥࠆᄙጀ⺃㔚૕ߣߔࠆߎߣ߇⠨߃ࠄࠇߡ߅ࠅ㧘ߘGraduate
Schoolof Engineering,
Universityof Hyogo,
Shosha,Himeji
671-2280,
JapanJapan
Shosha,Himeji
671-2280,ߩጀ㑆ߩ೸㔌ߥߤ߽⠨ᘦߒߚ㧚೨࿁ߩ೨࿁ߩ
1 ㊎⢛ᓟ㔚ᭂߩ႐ว㧘ߩጀ㑆ߩ೸㔌ߥߤ߽⠨ᘦߒߚ㧚
1 ㊎⢛ᓟ㔚ᭂߩ႐ว㧘
1
1
ueno@eng.u-hyogo.ac.jp
ueno@eng.u-hyogo.ac.jp

2
22㊎⢛ᓟ㔚ᭂࠍ᦭ߒߚᓸዊ㑆㓗ౝࠍㅴዷߔࠆᴪ㕙᡼㔚․ᕈ㧔ᐔ↰ᥓਯࠄ㧕㊎⢛ᓟ㔚ᭂࠍ᦭ߒߚᓸዊ㑆㓗ౝࠍㅴዷߔࠆᴪ㕙᡼㔚․ᕈ㧔ᐔ↰ᥓਯࠄ㧕10)ਅㇱ㊎㔚ᭂ߆ࠄࠦࡠ࠽ߩ⊒శ߇᷹ⷰߐࠇߚ
ਅㇱ㊎㔚ᭂ߆ࠄࠦࡠ࠽ߩ⊒శ߇᷹ⷰߐࠇߚ 10)㧚ߘߎߢ㧘1㧚ߘߎߢ㧘1㊎㊎ߣ
2㊎⢛ᓟ㔚ᭂߩ႐วߩ㑆㓗ౝࠦࡠ࠽ߩㅴዷߦ߅޿ߡ㧘ਅㇱ
ߣ 2 ㊎⢛ᓟ㔚ᭂߩ႐วߩ㑆㓗ౝࠦࡠ࠽ߩㅴዷߦ߅޿ߡ㧘ਅㇱ

123 (27)
123
123

࿶ࠍශടߒߚ႐วࠍᱜᭂᕈߩ⚿ᨐߣߒߚ㧚㔚࿶ᵄᒻߪ㜞࿶࿶ࠍශടߒߚ႐วࠍᱜᭂᕈߩ⚿ᨐߣߒߚ㧚㔚࿶ᵄᒻߪ㜞࿶
ࡊࡠ࡯ࡉ(HV-P30㧘DC-50MHz㧘ጤፒㅢାᯏࢃ)㧘ࠦࡠ࠽⊒
ࡊࡠ࡯ࡉ(HV-P30㧘DC-50MHz㧘ጤፒㅢାᯏࢃ)㧘ࠦࡠ࠽⊒㊎㔚ᭂ߆ࠄߩࠦࡠ࠽ߦࠃࠆ㑆㓗ౝࠦࡠ࠽ㅴዷߩଦㅴ㧘✭๺ߩ㊎㔚ᭂ߆ࠄߩࠦࡠ࠽ߦࠃࠆ㑆㓗ౝࠦࡠ࠽ㅴዷߩଦㅴ㧘✭๺ߩᓇ㗀ࠍ᷹ⷰߒߚ㧚ߘߩ⚿ᨐ㧘ੑߟߩ㊎⁁⢛ᓟ㔚ᭂߩ૏⟎ߦࠃᓇ㗀ࠍ᷹ⷰߒߚ㧚ߘߩ⚿ᨐ㧘ੑߟߩ㊎⁁⢛ᓟ㔚ᭂߩ૏⟎ߦࠃశߪశ㔚ሶჇ୚▤(931A㧘ᵄ㐳㗔ၞశߪశ㔚ሶჇ୚▤(931A㧘ᵄ㐳㗔ၞ 300-650nm㧘ࢃᵿ᧻ࡎ
300-650nm㧘ࢃᵿ᧻ࡎ࠻࠾ࠢࠬ)ࠍ੺ߒߡ࠺ࠫ࠲࡞ࠝࠪࡠࠬࠦ࡯ࡊ(DL-1540㧘200࠻࠾ࠢࠬ)ࠍ੺ߒߡ࠺ࠫ࠲࡞ࠝࠪࡠࠬࠦ࡯ࡊ(DL-1540㧘200ࠅ㧘᡼㔚․ᕈߦ⋧㆑߇⷗ࠄࠇߚߩߢႎ๔ߔࠆ㧚ࠅ㧘᡼㔚․ᕈߦ⋧㆑߇⷗ࠄࠇߚߩߢႎ๔ߔࠆ㧚MS/s㧘150MHz㧘ᮮᴡ㔚ᯏࢃ)ߢ᷹ⷰߒߚ㧚ශട㔚࿶ᵄ㗡ㇱ
MS/s㧘150MHz㧘ᮮᴡ㔚ᯏࢃ)ߢ᷹ⷰߒߚ㧚ශട㔚࿶ᵄ㗡ㇱߢࠦࡠ࠽⊒శ߇᷹ⷰߐࠇࠆ㔚࿶ߩ⍍ᤨ୯ࠍࠦࡠ࠽㐿ᆎ㔚ߢࠦࡠ࠽⊒శ߇᷹ⷰߐࠇࠆ㔚࿶ߩ⍍ᤨ୯ࠍࠦࡠ࠽㐿ᆎ㔚

2.2. ታ㛎ᣇᴺታ㛎ᣇᴺ
ᧄታ㛎ߢ↪޿ߚ㔚ᭂ᭴ᚑࠍ࿑
ਅㇱࡃ࡝ࠕߦߪ
ᧄታ㛎ߢ↪޿ߚ㔚ᭂ᭴ᚑࠍ࿑11ߦ␜ߔ㧚ߦ␜ߔ㧚ਅㇱࡃ࡝ࠕߦߪ

࿶㧘ᵄ㗡ㇱߢࡈ࡜࠶ࠪࠝ࡯ࡃ߇↢ߓߚߣ߈ߩ⍍ᤨ୯ࠍࡈ࡜
࿶㧘ᵄ㗡ㇱߢࡈ࡜࠶ࠪࠝ࡯ࡃ߇↢ߓߚߣ߈ߩ⍍ᤨ୯ࠍࡈ࡜
࠶ࠪࠝ࡯ࡃ㔚࿶ߣߒߚ㧚ࠦࡠ࠽ㅴዷߣᴪ㕙᡼㔚〝ߩ᭽ሶߪ㧘࠶ࠪࠝ࡯ࡃ㔚࿶ߣߒߚ㧚ࠦࡠ࠽ㅴዷߣᴪ㕙᡼㔚〝ߩ᭽ሶߪ㧘ᄢ߈ߐ
ᄢ߈ߐ 40mm×26mm㧘਄ㇱࡃ࡝ࠕߦߪᄢ߈ߐ
40mm×26mm㧘਄ㇱࡃ࡝ࠕߦߪᄢ߈ߐ 7mm×26mm
7mm×26mm
ߩ2ᨎߩ⎲⎜㉄ࠟ࡜ࠬ(ෘߐg=1mm)ࠍ↪޿ߡ㧘ਅㇱࡃ࡝ࠕ
ߩ 2 ᨎߩ⎲⎜㉄ࠟ࡜ࠬ(ෘߐ g=1mm)ࠍ↪޿ߡ㧘ਅㇱࡃ࡝ࠕᗵᐲ߇ᦨᄢᗵᐲ߇ᦨᄢ 7000
7000 ୚ߩ⿥㜞ㅦ࠺ࠫ࠲࡞ࡈ࡟࡯ࡒࡦࠣࠞࡔ࡜
୚ߩ⿥㜞ㅦ࠺ࠫ࠲࡞ࡈ࡟࡯ࡒࡦࠣࠞࡔ࡜
(IMACON468
㧘ᵄ
(IMACON468 㧘 ᵄ 㐳
㐳㗔
㗔ၞ
ၞ 385
385 㨪
㨪 900nm
900nm 㧘
㧘 HADLANDHADLANDߦ⋥ធ਄ㇱࡃ࡝ࠕࠍ㊀ߨߚ㧚
⎲⎜㉄ࠟ࡜ࠬߩ⴫㕙ߩ☻ߐߪߦ⋥ធ਄ㇱࡃ࡝ࠕࠍ㊀ߨߚ㧚
⎲⎜㉄ࠟ࡜ࠬߩ⴫㕙ߩ☻ߐߪ
⚂50nmߢ޽ࠆߩߢ㧘2ᨎߩࡃ࡝ࠕ߇㊀ߥߞߚㇱಽߪ᡼㔚⚂ 50nm ߢ޽ࠆߩߢ㧘2 ᨎߩࡃ࡝ࠕ߇㊀ߥߞߚㇱಽߪ᡼㔚PHOTONICS
PHOTONICSLTD.)߅ࠃ߮ᗵᐲ߇ᦨᄢ
LTD.)߅ࠃ߮ᗵᐲ߇ᦨᄢ20
20ਁ୚ߩ㜞ㅦࠥ࡯࠻ਁ୚ߩ㜞ㅦࠥ࡯࠻
ࠗࡔ࡯ࠫࠗࡦ࠹ࡦࠪࡈࠔࠗࠕࠍขࠅઃߌߚ
ࠗࡔ࡯ࠫࠗࡦ࠹ࡦࠪࡈࠔࠗࠕࠍขࠅઃߌߚ CCD
CCD ࠞࡔ࡜
ࠞࡔ࡜ㅴዷน⢻ߥᓸዊߥⓨ㑆߇ሽ࿷ߒߡ޿ࠆߣ⠨߃ࠄࠇࠆ㧚㑆㓗ㅴዷน⢻ߥᓸዊߥⓨ㑆߇ሽ࿷ߒߡ޿ࠆߣ⠨߃ࠄࠇࠆ㧚㑆㓗ߩ৻┵ߦߪ㊎㔚ᭂࠍ㧘ઁᣇߩ┵ߦߪኻะᐔ᧼㔚ᭂࠍ㈩⟎ߒߩ৻┵ߦߪ㊎㔚ᭂࠍ㧘ઁᣇߩ┵ߦߪኻะᐔ᧼㔚ᭂࠍ㈩⟎ߒ(C4346㧘ࢃᵿ᧻ࡎ࠻࠾ࠢࠬ)ߢ᠟ᓇߒߚ㧚
(C4346㧘ࢃᵿ᧻ࡎ࠻࠾ࠢࠬ)ߢ᠟ᓇߒߚ㧚ߚ㧚㊎-ኻะᐔ᧼㔚ᭂ㑆〒㔌ߚ㧚㊎-ኻะᐔ᧼㔚ᭂ㑆〒㔌l=7mm
l=7mmߢ޽ࠆ㧚ߐࠄߦ㧘ၒ߼ߢ޽ࠆ㧚ߐࠄߦ㧘ၒ߼ㄟߺ㔚ᭂ⴫㕙਄ߩ⓭⿠ߥߤߩ㔚⇇㓸ਛḮࠍᮨᡆߒߡ㊎⢛ㄟߺ㔚ᭂ⴫㕙਄ߩ⓭⿠ߥߤߩ㔚⇇㓸ਛḮࠍᮨᡆߒߡ㊎⢛ᓟ㔚ᭂࠍਅㇱࡃ࡝ࠕߩਅ㕙ߦ㈩⟎ߒߚ㧚㊎⢛ᓟ㔚ᭂߪߔߴ
ᓟ㔚ᭂࠍਅㇱࡃ࡝ࠕߩਅ㕙ߦ㈩⟎ߒߚ㧚㊎⢛ᓟ㔚ᭂߪߔߴ
ߡవ┵ᦛ₸ඨᓘ߇⚂ߡవ┵ᦛ₸ඨᓘ߇⚂35Pm
35Pmߩ㊎ࠍ↪޿ߚ㧚㊎⢛ᓟ㔚ᭂ૏⟎ߩ㊎ࠍ↪޿ߚ㧚㊎⢛ᓟ㔚ᭂ૏⟎xx ߪ਄ㇱ㊎㔚ᭂ߇ਅㇱࡃ࡝ࠕߣធߒߡ޿ࠆὐࠍၮḰߣߒߡ㧘ߪ਄ㇱ㊎㔚ᭂ߇ਅㇱࡃ࡝ࠕߣធߒߡ޿ࠆὐࠍၮḰߣߒߡ㧘਄ㇱ㊎㔚ᭂਅ┵߆ࠄߩ਄ㇱ㊎㔚ᭂਅ┵߆ࠄߩ 22 ᧄߩ㊎⢛ᓟ㔚ᭂవ┵߹ߢߩ᳓ᐔ
ᧄߩ㊎⢛ᓟ㔚ᭂవ┵߹ߢߩ᳓ᐔ
ᣇะ〒㔌ߢ޽ࠆ㧚2ᣇะ〒㔌ߢ޽ࠆ㧚2ᧄߩ㊎⢛ᓟ㔚ᭂߪኻะᐔ᧼㔚ᭂߦធ⛯ᧄߩ㊎⢛ᓟ㔚ᭂߪኻะᐔ᧼㔚ᭂߦធ⛯ߐࠇห㔚૏ߢ޽ࠆ㧚ߎߩ㔚ᭂ♽ࠍ㤛㌃⵾ኈེౝߦ⸳⟎ߒ㧘ߐࠇห㔚૏ߢ޽ࠆ㧚ߎߩ㔚ᭂ♽ࠍ㤛㌃⵾ኈེౝߦ⸳⟎ߒ㧘
⚂⚂0.1Pa0.1Paએਅߦឃ᳇ᓟ㧘Nએਅߦឃ᳇ᓟ㧘N22/SF/SF66ᷙวࠟࠬࠍኽ౉ߒ㧘0.1MPaᷙวࠟࠬࠍኽ౉ߒ㧘0.1MPa
߆ࠄ
0.3MPa߹ߢᄌൻߐߖߚ㧚߆ࠄ 0.3MPa ߹ߢᄌൻߐߖߚ㧚ශട㔚࿶ߦߪᵄ㗡㐳ߩන৻ᣇᒻᵄࡄ࡞ࠬ㔚࿶ශട㔚࿶ߦߪᵄ㗡㐳 TTf=1.5Ps
f=1.5Ps ߩන৻ᣇᒻᵄࡄ࡞ࠬ㔚࿶ࠍ↪޿ߚ(࿑
ࠍ↪޿ߚ(࿑ 1(c))㧚ࡄ࡞ࠬ⊒↢ⵝ⟎ߪ⽶ᭂᕈࡄ࡞ࠬ㔚࿶಴
1(c))㧚ࡄ࡞ࠬ⊒↢ⵝ⟎ߪ⽶ᭂᕈࡄ࡞ࠬ㔚࿶಴ߥ߅㧘㑆㓗ࠍ᭴ᚑߔࠆࡃ࡝ࠕߣߒߡ↪޿ߚ⎲⎜㉄ࠟ࡜ࠬ(૕ߥ߅㧘㑆㓗ࠍ᭴ᚑߔࠆࡃ࡝ࠕߣߒߡ↪޿ߚ⎲⎜㉄ࠟ࡜ࠬ(૕12Ⓧᛶ᛫₸Ⓧᛶ᛫₸UU=1.1×10=1.1×1012:㨯m㧘Ყ⺃㔚₸:㨯m㧘Ყ⺃㔚₸HHr=7)ߦ㊎-ᐔ᧼㑆ߢ㔚࿶ࠍr=7)ߦ㊎-ᐔ᧼㑆ߢ㔚࿶ࠍ
11)ශടߒߚߣ߈ߩ㔚૏ᷫ⴮ߩᤨቯᢙ
ශടߒߚߣ߈ߩ㔚૏ᷫ⴮ߩᤨቯᢙWWߪ67
ߪ67⑽ߣ⷗Ⓧ߽ࠄࠇࠆ⑽ߣ⷗Ⓧ߽ࠄࠇࠆ 11)㧚㧚
ශടᤨߦ↢ߓߚࠦࡠ࠽ߥߤߦࠃࠆࡃ࡝ࠕ਄ߩᱷ⇐㔚⩄߇ᰴශടᤨߦ↢ߓߚࠦࡠ࠽ߥߤߦࠃࠆࡃ࡝ࠕ਄ߩᱷ⇐㔚⩄߇ᰴߩ᷹ቯߦᓇ㗀ࠍ෸߷ߐߥ޿ࠃ߁ߦߔࠆߚ߼㧘㔚࿶ߩශട㑆㓒ߩ᷹ቯߦᓇ㗀ࠍ෸߷ߐߥ޿ࠃ߁ߦߔࠆߚ߼㧘㔚࿶ߩශട㑆㓒ߪ
ߪ11ಽએ਄ߣߒߚ㧚ታ㓙㧘㔚⩄ᷫ⴮ߪ⴫㕙વዉ߇㑐ㅪߒߡᄢಽએ਄ߣߒߚ㧚ታ㓙㧘㔚⩄ᷫ⴮ߪ⴫㕙વዉ߇㑐ㅪߒߡᄢ߈ߊߥࠆ㧚ශടᓟߩ᷹ቯߢᱷ⇐㔚⩄ߪߥߊ㧘࠺࡯࠲ߩࡃ࡜࠷
߈ߊߥࠆ㧚ශടᓟߩ᷹ቯߢᱷ⇐㔚⩄ߪߥߊ㧘࠺࡯࠲ߩࡃ࡜࠷ࠠ߇Ყセ⊛ዊߐߊߥߞߡ޿ࠆ㧚߹ߚ㧘㔚࿶ᵄ㗡ㇱߩᤨ㑆㗔ၞࠠ߇Ყセ⊛ዊߐߊߥߞߡ޿ࠆ㧚߹ߚ㧘㔚࿶ᵄ㗡ㇱߩᤨ㑆㗔ၞౝ(1.5Ps)ߢߩࡃ࡝ࠕ⴫㕙ߩ㔚⩄ᷫ⴮ߪᤨቯᢙ߆ࠄߺߡήⷞߢ
ౝ(1.5Ps)ߢߩࡃ࡝ࠕ⴫㕙ߩ㔚⩄ᷫ⴮ߪᤨቯᢙ߆ࠄߺߡήⷞߢ
߈ࠆߩߢࠦࡠ࠽ߦࠃࠆࡃ࡝ࠕ਄ߩ⫾Ⓧ㔚⩄߇ߘߩᓟߩࠗࡦ
߈ࠆߩߢࠦࡠ࠽ߦࠃࠆࡃ࡝ࠕ਄ߩ⫾Ⓧ㔚⩄߇ߘߩᓟߩࠗࡦ
ࡄ࡞ࠬࠦࡠ࠽ߩㅴዷߦ෸߷ߔᓇ㗀߇ᱷࠅ㧘GIS
ࡄ࡞ࠬࠦࡠ࠽ߩㅴዷߦ෸߷ߔᓇ㗀߇ᱷࠅ㧘GISߩࠬࡍ࡯ࠨߥ
ߩࠬࡍ࡯ࠨߥ
ߤߦ↪޿ࠄࠇߡ޿ࠆࠛࡐࠠࠪ᮸⢽ߣห᭽ߥ㔚⩄⫾Ⓧߩലᨐߤߦ↪޿ࠄࠇߡ޿ࠆࠛࡐࠠࠪ᮸⢽ߣห᭽ߥ㔚⩄⫾Ⓧߩലᨐࠍ฽ࠎߛታ㛎⚿ᨐ߇ᓧࠄࠇࠆߎߣߦߥࠆ㧚ࠍ฽ࠎߛታ㛎⚿ᨐ߇ᓧࠄࠇࠆߎߣߦߥࠆ㧚ജߢ޽ࠆߚ߼㧘㊎㔚ᭂࠍធ࿾ߒ㧘ኻะᐔ᧼㔚ᭂߦࡄ࡞ࠬ㔚ജߢ޽ࠆߚ߼㧘㊎㔚ᭂࠍធ࿾ߒ㧘ኻะᐔ᧼㔚ᭂߦࡄ࡞ࠬ㔚CounterCounter Plane
Pl e
Electrode
Electrode3.3. ታ㛎⚿ᨐታ㛎⚿ᨐ
3.1
3.1 ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߅ࠃ߮ࠦࡠ࠽㐿ᆎ㔚࿶ߩࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߅ࠃ߮ࠦࡠ࠽㐿ᆎ㔚࿶ߩ

Upper
Uppe
Barrier
Barrier

NN22/SF/SF66ᷙวࠟࠬଐሽᕈ
ᷙวࠟࠬଐሽᕈ
߹ߕ㧘㊎⢛ᓟ㔚ᭂߩߥ޿႐วߪ㧘ਔᭂᕈߣ߽ࡄ࡞ࠬ⊒↢߹ߕ㧘㊎⢛ᓟ㔚ᭂߩߥ޿႐วߪ㧘ਔᭂᕈߣ߽ࡄ࡞ࠬ⊒↢NeedleNeedleElectrode
Electrode
Lower
Lowe
Barrier
Barrier࿑࿑22ߦ
ߦ22㊎⢛ᓟ㔚ᭂߩ޽ࠆ႐วߩᱜᭂᕈࡈ࡜࠶ࠪࠝ࡯ࡃ
㊎⢛ᓟ㔚ᭂߩ޽ࠆ႐วߩᱜᭂᕈࡈ࡜࠶ࠪࠝ࡯ࡃ
㔚࿶ߣࠦࡠ࠽㐿ᆎ㔚࿶ߩࡈ࡜㔚࿶ߣࠦࡠ࠽㐿ᆎ㔚࿶ߩNN22/SF/SF66ᷙว₸ߩ㑐ଥࠍ␜ߔ㧚ᷙว₸ߩ㑐ଥࠍ␜ߔ㧚ࡈ࡜(a)(a) Diagonal
Diagonal View
View

CounterCounter Plane
Pla e
Electrode
Electrodell

5kV/div
5kV/div
0.5Ps/div
0.5Ps/div

ψ VV
ψ

Backside
Backside
NeedleNeedleElectrode
Electrode

NeedleNeedleElectrode
Electrode
g

00

x

(b)
(b) SideSide View
Viewེߩᦨ㜞㔚࿶
ེߩᦨ㜞㔚࿶35kV
35kVࠍട߃ߡ߽ශട㔚࿶ᵄ㗡ㇱߢߪࡈ࡜࠶
ࠍട߃ߡ߽ශട㔚࿶ᵄ㗡ㇱߢߪࡈ࡜࠶
ࠪࠝ࡯ࡃߦ⥋ࠄߥ޿㧚ࠪࠝ࡯ࡃߦ⥋ࠄߥ޿㧚

00 ψ
ψ

tt

(c)
(c) Pulse
Pulse Voltage
Voltagegg :: Glass
Glass thickness
thickness 1mm
1mm ll :: SpaceSpace length
length 7mm
7mm
x:x: Backside
Backside needle
needle electrodeelectrode position
position࿑࿑11 㔚ᭂ᭴ᚑ࿑
㔚ᭂ᭴ᚑ࿑
Fig.1
Fig.1 Electrode
Electrode configuration.
configuration.

࠶ࠪࠝ࡯ࡃ㔚࿶࠶ࠪࠝ࡯ࡃ㔚࿶ VVf f߅ࠃ߮ࠦࡠ࠽㐿ᆎ㔚࿶߅ࠃ߮ࠦࡠ࠽㐿ᆎ㔚࿶ VVccߩ᷹ቯߪห৻
ߩ᷹ቯߪห৻
᧦ઙߢ
᧦ઙߢ 1010 ࿁ⴕ޿㧘ߘߩᐔဋࠍᦨᄢ୯㧘ᦨዊ୯ߣ౒ߦ࿑ਛ
࿁ⴕ޿㧘ߘߩᐔဋࠍᦨᄢ୯㧘ᦨዊ୯ߣ౒ߦ࿑ਛ
ߦ␜ߒߚ㧚࿑ਛߩ⍫ශ(χ)ߣߘߩ਄ߩᢙሼߪ㧘ශട㔚࿶ߦ␜ߒߚ㧚࿑ਛߩ⍫ශ(χ)ߣߘߩ਄ߩᢙሼߪ㧘ශട㔚࿶
(V(Vpp=35kV)ߩᵄ㗡ㇱߦ߅ߌࠆ=35kV)ߩᵄ㗡ㇱߦ߅ߌࠆ1010࿁ߩ᷹ቯߢࡈ࡜࠶ࠪࠝ࡯ࡃ
࿁ߩ᷹ቯߢࡈ࡜࠶ࠪࠝ࡯ࡃ
ߒߥ߆ߞߚߣ߈ߩ࿁ᢙࠍ␜ߔ㧚ߥ߅㧘᡼㔚ߪߔߴߡᓸዊ㑆ߒߥ߆ߞߚߣ߈ߩ࿁ᢙࠍ␜ߔ㧚ߥ߅㧘᡼㔚ߪߔߴߡᓸዊ㑆㓗ౝࠍㅴዷߒ㧘㊎ኻะᐔ᧼㔚ᭂ㑆ߩᓸዊ㑆㓗ౝߢࡈ࡜࠶
㓗ౝࠍㅴዷߒ㧘㊎ኻะᐔ᧼㔚ᭂ㑆ߩᓸዊ㑆㓗ౝߢࡈ࡜࠶
ࠪࠝ࡯ࡃ߇↢ߓߡ޿ࠆߎߣࠍ⏕⹺ߒߚ㧚ࠪࠝ࡯ࡃ߇↢ߓߡ޿ࠆߎߣࠍ⏕⹺ߒߚ㧚࿑
࿑2(a)ߩ
2(a)ߩ22ᧄߩ㊎⢛ᓟ㔚ᭂߩ૏⟎߇ᧄߩ㊎⢛ᓟ㔚ᭂߩ૏⟎߇x=0mm
x=0mmߣ
ߣx=3mmx=3mmߩ႐ߩ႐ว(એ㒠ว(એ㒠x=0,
x=0, 3mm
3mmߣ⴫⸥ߔࠆ)㧘SF
ߣ⴫⸥ߔࠆ)㧘SF66ߩᷙว₸߇Ⴧടߔࠆߦ઻
ߩᷙว₸߇Ⴧടߔࠆߦ઻

124 (28)
124

32
3
2008
㕒㔚᳇ቇળ⹹ ╙ 32 Ꮞ ╙ 3 ภ㧔2008㧕ߞߡ਄᣹ߒߚ߇㧘SF6 ߩᷙว₸߇ૐ޿㗔ၞߢߪࠟࠬ࿶ߦࠃߞ

ߥߞߚ㧚ߡ᜼േߦᏅ߇⷗ࠄࠇߚ㧚0.1MPa㧘0.2MPa ߢߪࡈ࡜࠶ࠪࠝ࡯

ࠦࡠ࠽㐿ᆎ㔚࿶ߪ 0.1MPa㧘2 ㊎⢛ᓟ㔚ᭂ૏⟎ x=0, 3mm

ࡃ㔚࿶ߪන⺞Ⴧടߒߚ㧚৻ᣇ㧘0.3MPa ߩ D=0%㧘D=3%ߢߪ

ߩ႐ว㧘D=0%ߩߣ߈⚂ 2.4kV ߆ࠄ D=100%ߩߣ߈⚂ 3.6kV

18.6kV ߣ߶߷หߓ୯ߢ޽ࠆ߇㧘D=10%ߢߪ 23.9kV ߣ਄᣹ߒߢ㧘࿶ജߩჇടߢߪࠊߕ߆ߦ਄᣹ߒߚ㧚x=2, 5mm ߩ႐วߚ㧚SF6 ߩᷙว₸߇㜞޿㗔ၞߢߪ㧘D=100%ߩߣ߈㧘0.1MPa߽ x=0, 3mm ߣ߶߷ห᭽ߥ⚿ᨐߣߥࠅ㧘ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚ߢߪ 27.4kV㧘0.2MPa ߢߪ 29.3kV㧘0.3MPa ߢߪ 30.4kV ߣࡈ࿶ߦ⷗ࠄࠇߚ V ․ᕈߪᓧࠄࠇߥ߆ߞߚ㧚એ਄ߩߎߣࠃࠅ㧘೨࿁ߩ 1 ㊎⢛ᓟ㔚ᭂߩ႐วߣ 2 ㊎⢛ᓟ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߪ਄᣹ߒߚ㧚࿑ 2(b)ߩ 2 ㊎⢛ᓟ㔚ᭂ૏⟎ x=2, 5mm ߩ႐ว㧘0.1MPa ߢߪ㔚ᭂ૏⟎ x=2, 5mm ߩ 0.2MPa㧘0.3MPa ߩ႐วߢߪ㧘ᷙวࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ Vf ߪන⺞Ⴧടߣߥߞߚ㧚ߒ߆ߒ㧘0.2MPa₸ 3%ઃㄭߢࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇ᦨዊ୯ߣߥࠆ㨂․ᕈࠍ

ߢߪ㧘D=0%ߩߣ߈ߩ⚂ 18.4kV ߆ࠄ D=3%ߢߪ⚂ 17.8kV ߣ

␜ߒߚ㧚
ߒ߆ߒ㧘
x=0, 3mm ߩ႐ว㧘V ․ᕈࠍ␜ߐߕ㧘
D=0%㧘

ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߪዋߒਅ߇ࠅ㧘D=3%߆ࠄ D=50%߳ߣᷙ

D=3%౒ߦ߶߷หߓ୯ߣߥߞߚ㧚ߎࠇߪ㧘ᓟߢ⼏⺰ߒߡ޿ว₸ࠍჇടߐߖߚ႐ว㧘⚂ 28.5kV ߹ߢࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶

ࠆ 2 ᧄ⋡ߩ㊎⢛ᓟ㔚ᭂߩലᨐߣ⠨߃ࠄࠇࠆ㧚߹ߚ㧘ࠦࡠ࠽ߪ਄᣹ߒߚ㧚0.3MPa ߩ႐ว߽ 0.2MPa ߩ႐วߣห᭽ߦ 3%ઃ

㐿ᆎ㔚࿶ߦᏅ߇⷗ࠄࠇߥ߆ߞߚ㧚1 ㊎⢛ᓟ㔚ᭂ x=0mm ߩㄭߢࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇ૐਅߒ㧘ߘߩᓟ਄᣹ߔࠆ V ․ᕈߣ

႐ว㧘㊎㔚ᭂߩਅ┵ߦ㊎⢛ᓟ㔚ᭂ߇ሽ࿷ߔࠆ㧚߹ߚ㧘2 ㊎⢛ᓟ㔚ᭂ x=0, 3mm ߢߪ 3mm ߩ࿾ὐߦ߽㊎⢛ᓟ㔚ᭂ߇ሽ࿷ߔࠆ㧚ߘࠇߦࠃࠅ 1 ㊎⢛ᓟ㔚ᭂߣᲧߴߡ㧘2 ㊎⢛ᓟ㔚ᭂߩ

30

Vf႐วߩ㑆㓗ౝߩࠦࡠ࠽߇ 2 ㊎⋡ߩ㊎⢛ᓟ㔚ᭂઃㄭ߹ߢㅴ

Flashover Voltage Vf (kV)Corona Onset Voltage Vc (kV)35

x=0, 3mmዷߒ߿ߔߊߥࠆߎߣߢ V ․ᕈߩ᦭ήߦᓇ㗀ߒߚ߽ߩߣ⠨25

߃ࠄࠇࠆ㧚ߘߩ⚿ᨐ㧘ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߩ᜼േߦᏅ߇ߢ
N2/SF6 Positive20٠㧦0.3MPa‫ع‬㧦0.2MPa٤㧦0.1MPa
g=1mm
l=7mm

15
10

Vc

5
0

Flashover Voltage Vf (kV)Corona Onset Voltage Vc (kV)

3.2᡼㔚᜼േߩᤨ㑆⊛ಽഀ⿠ߎߔߣ⠨߃ࠄࠇࠆߚ߼㧘㊎⢛ᓟ㔚ᭂ૏⟎ x=0, 3mm ߣ x=2,
0

20
40
60
80
SF6 Gas C ontent D (㧑)100

5mm㧘0.3MPa ߦߟ޿ߡ㧘⿥㜞ㅦᐲࠞࡔ࡜ࠍ↪޿ߡ㧘ශട㔚࿶ᵄ㗡ㇱߢᓸዊ㑆㓗ౝࠍㅴዷߔࠆࠦࡠ࠽ㅴዷߩ᭽ሶࠍ

10,10x=2, 5mmχᤨ㑆⊛ߦಽഀߒߡ᠟ᓇߒߚ㧚㊎⢛ᓟ㔚ᭂࠍ᦭ߒߚᓸዊ㑆㓗ߦ߅ߌࠆᱜᭂᕈࠦࡠ࠽ߩㅴዷ᜼േࠍ࿑ 3 ߦ␜ߔ㧚ߥ߅㧘ฦಽഀ᠟ᓇ௝(Frame)ߩਅߦࡄ࡞ࠬ㔚࿶ශടᓟߩ᠟

Vf30ᓇᤨ㑆ߣߘߩߣ߈ߩ㔚࿶ࠍ␜ߔ㧚߹ߚ㧘ࠦࡠ࠽ߩㅴዷߩ᭽

25

N2/SF6 Positive20٠㧦0.3MPa‫ع‬㧦0.2MPa٤㧦0.1MPa
g=1mm
l=7mm

15
10

Vc

5
0

േࠍ᷹ⷰߒߚ㧚ࠦࡠ࠽ㅴዷߩ㔍ᤃ߇ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߩ㆑޿ࠍᒁ߈

(a) x=0, 3mm

35ߚ߽ߩߣ⠨߃ࠄࠇࠆ㧚ߎߩὐߦᵈ⋡ߒ㧘ㅴዷߔࠆࠦࡠ࠽᜼

ሶ߇ࠊ߆ࠅ߿ߔߊߥࠆࠃ߁ߦ㧘వ┵ㇱࠍ࿑ਛߩዊߐߥ⍫ශߢ␜ߒ㧘⋡⋓ࠅࠍઃടߒߚ㧚࿑ 3(a)ߦ␜ߔ x=2, 5mm ߩ SF6 ࠟࠬߩᷙว₸ D=0%(N2 න⁛)ߢߪ㧘਄ㇱ㊎వઃㄭ߆ࠄࠦࡠ࠽߇⊒↢ߒߡ㧘Frame1 ߢ
2mm㧘Frame2 ߢ 5mm ߣᓸዊ㑆㓗ౝࠍዋߒߕߟࠦࡠ࠽߇ㅴ
ዷߒ㧘ࡈ࡜࠶ࠪࠝ࡯ࡃߦ⥋ߞߚ㧚࿑ 3(b)ߩ 3%ߢߪ㧘ᓸዊ㑆㓗౉ࠅญઃㄭ߆ࠄ⊒↢ߒߚࠦࡠ࠽ߪ㧘Frame1 ߢߪᓸዊ

0

20
40
60
80
SF6 Gas C ontent D (㧑)100(b) x=2, 5mm

࿑2 2 ㊎⢛ᓟ㔚ᭂߦ߅ߌࠆࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߣࠦࡠ࠽㐿ᆎ㔚࿶ߩ SF6 ߩᷙว₸ଐሽᕈ
Fig.2 Relationship between flashover and corona onset
voltage with two needle backside electrode in
N2/SF6 mixture gas.
(Positive, (a): x=0, 3mm, (b): x=2, 5mm)

㑆㓗౉ࠅญઃㄭߢ஗ṛߒߚ㧚ߘߩᓟ㧘Frame2 ߢ 2mm ઃㄭ߹ߢࠦࡠ࠽߇ㅴዷߒߚᓟࡈ࡜࠶ࠪࠝ࡯ࡃߒߚ㧚߹ߚ㧘ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߦ㨂․ᕈ߇⷗ࠄࠇߥ߆ߞߚ㧚x=0, 3mm ߩ႐ว㧘D=0%ߢߪ਄ㇱ㊎వઃㄭ߆ࠄࠦࡠ࠽߇⊒↢ߒߚᓟ㧘ශട㔚࿶ߩ਄᣹ߦ઻ߞߡ 3.5mm㧘4.5mm ߣࠦࡠ࠽߇ᓸዊ㑆㓗ౝࠍㅴዷߒߚ㧚D=3%ߢߪ㧘਄ㇱ㊎వઃㄭ߆ࠄࠦࡠ࠽߇
⊒↢ߒߚᓟ㧘ࠦࡠ࠽ㅴዷ߇஗ṛߒߚ㧚ߘߩᓟ㧘5mm ઃㄭ2
2 ㊎⢛ᓟ㔚ᭂࠍ᦭ߒߚᓸዊ㑆㓗ౝࠍㅴዷߔࠆᴪ㕙᡼㔚․ᕈ㧔ᐔ↰ᥓਯࠄ㧕
Upper
Barrier

Lower
Barrier㸣

125 (29)125㸣㸡
NeedleElectrode

Electrode configuration(a) D= 0 %Frame1 14.8 㨪 17.0 kV
920 㨪 1040 ns

Frame2 17.5 㨪 19.4 kV1060 㨪 1180 ns㸣㸣

x=2, 5mm(b) D= 3 %Frame1 13.3 㨪 14.5 kV
840 㨪 920 ns

Frame3 19.9 㨪 20.7 kV1200 㨪 1320 ns

Frame2 15.0 㨪 16.5 kV
940 㨪 1020 ns

Frame3 17.1 㨪 18.1 kV1040 㨪 1120 ns

࿑ 3 ⿥㜞ㅦᐲࠞࡔ࡜ߦࠃࠆ㑆㓗ౝࠦࡠ࠽ㅴዷ௝
Fig.3 Corona extension images by ultrahigh-speed camera. (N2/SF6 gas, 0.3MPa, x=2, 5mm, Positive)߹ߢࠦࡠ࠽߇ㅴዷߔࠆ⚿ᨐ߇ᓧࠄࠇߡ޿ࠆ㧚

N2/SF6

ภߪࡈ࡜࠶ࠪࠝ࡯ࡃߦ⥋ߞߚߎߣࠍ␜ߔ㧚x=0, 3mm㧘x=2,
5mm ߩ D=0%㧘3%ߣ߽ߦශട㔚࿶ߩ਄᣹ߦ઻ߞߡ㧘ᓸዊ㑆㓗ౝࠍࠦࡠ࠽߇ᓢ‫ߦޘ‬ㅴዷߒߡ޿ࠆ㧚
x=0, 3mm ߩ႐ว㧘D=0%ߩߣ߈㧘ࠦࡠ࠽ㅴዷ㐳ߪ⍍ᤨ㔚࿶ 15.0kV ߢ 3.5mm ߣ 2 ㊎⋡
ߩ㊎⢛ᓟ㔚ᭂઃㄭ߹ߢિ߮ߡ޿ࠆ㧚ߎࠇߪ㧘1 ㊎⋡ߩ㊎⢛ᓟ㔚ᭂ߇਄ㇱ㊎㔚ᭂߩ⌀ਅߦ૏⟎ߔࠆߚ߼㧘2 ㊎⢛ᓟ㔚ᭂ૏⟎
x=2, 5mm ߦᲧߴߡ㔚⇇߇ᒝ޿㧚ᓥߞߡ㧘਄ㇱ㊎㔚ᭂవ┵߆ࠄ⊒↢ߒߚࠦࡠ࠽߇ᓸዊ㑆㓗ౝߦㅴ౉ߒ߿ߔߊ㧘2 ㊎⋡ߩ㊎⢛ᓟ㔚ᭂઃㄭ߹ߢࠦࡠ࠽߇ㅴዷߒߚߣ⠨߃ࠄࠇࠆ 12)㧚D=3%ߢ
ߪ D=0%ߩ႐วߩࠦࡠ࠽ㅴዷߦᲧߴ㧘ᓸዊ㑆㓗ౝࠦࡠ࠽ߩㅴ
ዷ߇ዊߐߊߥߞߚ㧚ߎࠇߪ㧘SF6 ࠟࠬߪ㔚᳇⊛⽶ᕈ᳇૕ߢ޽
ࠅ㔚ሶઃ⌕૞↪ߦࠃࠅ㜞޿⛘✼⠴ജ․ᕈࠍᜬߟ㧚ߘߩߚ߼㧘Corona Extension x (mm)࿑ 4 ߦࠦࡠ࠽ㅴዷ㐳㧙ශട㔚࿶ଐሽᕈࠍ␜ߔ㧚࿑ਛߩ F ⸥FF

7 Positive
0.3MPa6x=0, 3mm
5 ٨㧦D=0%‫ع‬㧦D=3%4
x=2, 5mm
3 ٤㧦D=0%‫غ‬㧦D=3%2
g=1mm
1 l=7mm

F

0
5

10

15

20

Instantaneous Voltage V (kV)

࿑ 4 ࠦࡠ࠽ߩિ߮ߣශട㔚࿶ଐሽᕈ
Fig.4 Corona extension – Instantaneous voltage.
(N2/SF6 : x=0, 3mm, x=2, 5mm, Positive)ࠦࡠ࠽ߩㅴዷ߇ N2 ࠟࠬߦᲧߴߡᛥ೙ߐࠇߡ޿ࠆ 2,12)㧚
ߘࠇ᡿㧘
x=0, 3mm ߩ႐วߢߪࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߦ㨂․ᕈ߇ᓧࠄࠇ

࿑ 5 ߩ 2 ㊎⢛ᓟ㔚ᭂ૏⟎ x=2, 5mm ߩ 0.3MPa ߢߪ㧘࿑ 5(a)ߥ߆ߞߚߣ⠨߃ࠄࠇࠆ㧚৻ᣇ㧘x=2, 5mm ߩ႐วߢߪࠦࡠ࠽߇

ߩD=0%ߩߣ߈440ns ߢ⚂4.0a.u.㧘
࿑ 5(b)ߩD=3%ߩߣ߈440ns

ㅴዷߒߡ޿ࠆߎߣ߆ࠄ㧘D=3%ߩᣇ߇ D=0%ࠃࠅࠦࡠ࠽ߩિ

ߢ⚂ 3.0a.u.ߢೋᦼࠦࡠ࠽߇⊒శߒ㧘ᦨೋߩࡄ࡞ࠬ⁁ߩࠦࡠ࠽߮߇ᄢ߈޿ߎߣ߇ࠊ߆ࠆ㧚
x=0, 3mm ߩ႐วߣ⇣ߥߞߡ㧘
D=3%⊒శᒝᐲߪ D=3%ߩᣇ߇ D=0%ߦᲧߴߡᒙߊߥߞߚ㧚ශടࡄߩࠦࡠ࠽ㅴዷ㐳ߩ࿑ߪ D=0%ߩ࿑ߦᲧߴߡ x=2, 5mm ߢߪ࡞ࠬ㔚࿶ߩᵄ㗡ㇱߩ㔚࿶਄᣹ߦ઻ߞߡ㧘ࠦࡠ࠽⊒శᒝᐲߪᒝ

D=3%ߩᣇ߇ D=0%ࠃࠅ㑆㓗ౝࠦࡠ࠽߇ㅴዷߒߡ޿ࠆߎߣ߆

ߊߥߞߚ㧚ߎࠇߪශട㔚࿶߇㜞ߊߥࠆߎߣߢ਄ㇱ㊎㧙ኻะᐔࠄ㧘ߎߩࠦࡠ࠽ㅴዷߩ㔍ᤃ߇ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߩ․ᕈࠍ V᧼㔚ᭂ㑆ߢߩ㔚⇇߇ᒝߊߥࠆߚ߼ߢ޽ࠆߣ⠨߃ࠄࠇࠆ㧚߹ߚ㧘․ᕈߦߒߚ߽ߩߣ⠨߃ࠄࠇࠆ㧚ࠦࡠ࠽⊒శ߇ࡄ࡞ࠬᵄᒻߣߒߡ᷹ⷰߐࠇࠆߩߪ㧘਄ㇱ㊎㔚ᭂ߆ࠄኻะᐔ᧼㔚ᭂߦะ߆ߞߡ㔚⇇߇ᒙߊߥߞߡ޿ࠆߚ߼㧘ࠦ

3.3శ㔚ሶჇ୚▤ߦࠃࠆᓸዊ㑆㓗ౝࠍㅴዷߔࠆࠦࡠ

ࡠ࠽ߩㅴዷ߇೙㒢ߐࠇࠆߣ⠨߃ࠄࠇࠆ㧚D=3%ߩࠦࡠ࠽⊒శ࠽ߩ⊒శᵄᒻߩ᷹ⷰ

ᵄᒻߪ㧘D=0%ߦᲧߴߡ⊒శᵄᒻ߇⚦ߊߥߞߚ㧚ߎࠇߪ SF6ᓸዊ㑆㓗ౝᴪ㕙᡼㔚ߦࠃࠆࠦࡠ࠽⊒శᵄᒻࠍ㧘శ㔚ሶჇ୚䉧䉴䈱⛘✼ᕈ⢻䈮ᓇ㗀䈜䉎䉅䈱䈫ᕁ䉒䉏䉎㧚࿑ 5(a)ߩ D=0%㧘

▤ࠍ↪޿ߡ᷹ⷰߒߚ㧚࿑ 5 ߦ N2/SF6 ᷙว䉧䉴䈮䈍䈔䉎䉮䊨䊅ㅴ࿑ 5(b)ߩ D=3%ߣ߽ߦࡄ࡞ࠬ㔚࿶ශടᓟ 660ns ߢࠦࡠ࠽⊒శዷ䈱⊒శᵄᒻ䉕␜䈜㧚❑ゲߪශട㔚࿶ߩ⍍ᤨ୯(kV)ߣ⊒శᒝᒝᐲ߇߶߷ࡇ࡯ࠢߣߥߞߚ㧚ශടࡄ࡞ࠬᵄ㗡ㇱߩ㔚࿶߇޽ࠆᐲ(a.u.:છᗧන૏)㧘ᮮゲߪᤨ㑆(200ns/div)ߢ޽ࠆ㧚୯ߦߥࠆߣࠦࡠ࠽⊒శᒝᐲ߇߶߷৻ቯߣߥߞߚ㧚ߎࠇߪ㧘ᓸ

126 (30)20

Voltage(kV)

Voltage

10

20
10

Light

0
0

400

800

1200

Time (ns)0Light Pulse(a.u.)

32
3
2008
㕒㔚᳇ቇળ⹹ ╙ 32 Ꮞ ╙ 3 ภ㧔2008㧕

126

D=0%

10

20
10

Light

0
0

400

800

1200

Time (ns)0Light Pulse(a.u.)

Voltage(kV)

Voltage

Frame2 7.0 䌾 10.0 kV

Frame1 4.0 䌾 7.2 kV

Frame2 7.0 䌾 10.0 kV

Frame1 4.2 䌾 7.0 kV

Frame2 7.0 䌾 10.0 kV

Frame1 4.0 䌾 7.2 kV

Frame2 7.0 䌾 10.0 kV

Frame1 7.2 䌾 10.2 kV

Frame2 10.0 䌾 12.8 kV

Frame1 7.2 䌾 10.2 kV

Frame2 10.2 䌾 12.8 kV

D=3%

1600

(a) D= 0%
20

Frame1 4.2 䌾 7.0 kV(a) x=0mm

D=0%

1600

(b) D= 3%

D=3%࿑ 5 ࠦࡠ࠽⊒శᵄᒻ
Fig.5 Corona light emission in x=2, 5mm at 0.3MPa.

(b) x=0, 3mm

ዊ㑆㓗ౝࠦࡠ࠽వ┵ߩ⫾Ⓧ㔚⩄ߦࠃࠆ㔚⇇✭๺૞↪ߦࠃࠆ߽ߩߣផ᷹ߐࠇࠆ㧚ᦨೋߩࠦࡠ࠽⊒శߩᤨ㑆㑆㓒ߪ⚂ 80ns

D=0%ߢ޽ࠅ㧘ࠦࡠ࠽⊒శᒝᐲࡇ࡯ࠢࠍㆊ߉ࠆߣ㧘ߘߩᤨ㑆㑆㓒߇㐳ߊߥߞߚ㧚߹ߚ㧘ශട㔚࿶߇ 14kV ઃㄭߩ D=3%ߢߪ㧘D=0%ߦᲧߴߡࠦࡠ࠽⊒శᒝᐲ߇ᄢ߈ߊߥࠅ㧘ࠦࡠ࠽߇ㅴዷߒߡ޿
ࠆߎߣ߇ࠊ߆ࠆ㧚
3.4㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శᓸዊ㑆㓗ౝㅴዷࠦࡠ࠽ߦ߅ߌࠆ㊎⢛ᓟ㔚ᭂߩᓇ㗀ࠍᬌ⸛ߔࠆߚ߼㧘㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శߦߟ޿ߡ⺞ߴߚ㧚D=3%(c) x=2, 5mm

࿑ 6 ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శ௝
Fig.6 Corona from backside needle electrode.

⿥㜞ㅦᐲࠞࡔ࡜ߢߪᗵᐲਇ⿷ߩߚ߼ߦ㊎⢛ᓟ㔚ᭂ߆ࠄߩᓸ

2 ㊎⢛ᓟ㔚ᭂ૏⟎ x=0, 3mm ߢߪ਄ㇱ㊎㔚ᭂߩ⌀ਅߦ㊎⢛ᒙߥࠦࡠ࠽߇᷹ⷰߐࠇߥ޿㧚ߘߎߢ㧘CCD ࠞࡔ࡜ࠍ↪޿㧘ᱜᓟ㔚ᭂ߇ሽ࿷ߔࠆߚ߼㧘਄ㇱߣਅㇱߩࠦࡠ࠽⊒శ߇㊀ߥࠅ್

ᭂᕈߩ 0.3MPa ߢ㧘㊎⢛ᓟ㔚ᭂߩᢳ߼ਅᣇะ߆ࠄࠦࡠ࠽⊒శ೎߇࿎㔍ߢ޽ࠆߩߢ㧘x=2, 5mm ߦߟ޿ߡ߽᷹ⷰߒߚ㧚D=0%ࠍ᷹ⷰߒߚ㧚ߎߎߢ㧘㊎⢛ᓟ㔚ᭂߩ਄ߦਅㇱ⺃㔚૕߇ሽ࿷ߔ

ߢߪ Frame1㧘Frame2 ߢ਄ㇱ㊎㔚ᭂ߆ࠄࠦࡠ࠽߇ශട㔚࿶ߩࠆ㧚਄᣹ߦ઻ߞߡࠦࡠ࠽ߩ⊒శ߇ᒝߊߥࠅ㧘ࠦࡠ࠽ㅴዷ㐳 1.5mm

࿑ 6 ߦ CCD ࠞࡔ࡜ࠍ↪޿ߡ᷹ቯߒߚ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߣᓸዊ㑆㓗ౝࠍㅴዷߒߡ޿ࠆߎߣ߇ࠊ߆ࠆ㧚D=3%ߩ႐ว߽ߩࠦࡠ࠽⊒శࠍ␜ߔ㧚࿑ 6(a)ߪ 1 ㊎⢛ᓟ㔚ᭂ૏⟎ x=0mm ߩห᭽ߦශട㔚࿶ߩ਄᣹ߦࠃࠅࠦࡠ࠽߇ㅴዷߒߚ㧚Frame1 ߢߪ႐วߢ㧘ශട㔚࿶ߩ਄᣹ߦ઻ߞߡ㧘ᓸዊ㑆㓗౉ࠅญߩ਄ㇱ㊎

x=2mm ઃㄭߢᒙ޿ࠦࡠ࠽⊒శ߇᷹ⷰߐࠇ㧘Frame2 ߢߪᓸዊ㔚ᭂઃㄭߩࠦࡠ࠽⊒శ߇ᒝߊߥߞߡ޿ࠆߎߣ߇ࠊ߆ࠆ㧚㑆㓗ౝㅴዷࠦࡠ࠽ߣ x=5mm ઃㄭߦ߽ᒝ޿ࠦࡠ࠽⊒శ߇ⷰࠄ࿑ 6(b)ߦ␜ߔ 2 ㊎⢛ᓟ㔚ᭂ૏⟎ x=0, 3mm ߩ႐ว㧘D=0%ߢ

ࠇߚ㧚߹ߚ㧘x=2mm ઃㄭߩ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శߪ㧘
Frame1(4.2㨪7.0kV)ߢ਄ㇱ㊎㔚ᭂߣ 2 ㊎⋡ߩ㊎⢛ᓟ㔚ᭂ૏ߪᓸዊ㑆㓗ౝࠦࡠ࠽ߣ㊀ߥߞߡ޿ࠆߚ߼್೎߇࿎㔍ߢ޽ࠆ⟎ x=3mm ߩ૏⟎ߦࠦࡠ࠽⊒శ߇ߺࠄࠇࠆ㧚Frame2(7.0㨪߇㧘x=5mm ઃㄭߩ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శ߇ᒝߊߥ

10.0kV)ߢߪ㧘1 ㊎⢛ᓟ㔚ᭂߩ႐วߣᲧߴߡ㧘਄ㇱ㊎㔚ᭂ߆ࠄߞߡ޿ࠆߎߣ߆ࠄ x=2mm ߩࠦࡠ࠽߽ᒝ޿ߣᕁࠊࠇࠆ㧚㊎⢛ߩࠦࡠ࠽ߪ 2 ߟ⋡ߩ㊎⢛ᓟ㔚ᭂߦะ߆ߞߡㅴዷߒߡ޿ࠆ᭽ሶ

ᓟ㔚ᭂ਄ㇱ߆ࠄࠦࡠ࠽ߩ⊒శ߇⷗ࠄࠇࠆߎߣ߆ࠄ㧘ࡄ࡞ࠬ㔚߇᷹ⷰߐࠇߚ㧚D=3%߽ Frame1 ߢ㧘਄ㇱ㊎㔚ᭂߩࠦࡠ࠽߇ⷰ

࿶ߩශടߦࠃࠅ㧘ኻะᐔ᧼㔚ᭂߣห㔚૏ߢ޽ࠆ㊎⢛ᓟ㔚ᭂઃ᷹ߐࠇࠆ߇㧘㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శߪ᷹ⷰߐࠇߥ

ㄭߦ↢ߓߚೋᦼ㔚ሶ߇㊎⢛ᓟ㔚ᭂㄭறߢടㅦߐࠇࠆ㧚ߘߩട޿㧚߹ߚ㧘Frame2 ߢߪ㧘x=3mm ߩ૏⟎ߩ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ㅦߐࠇߚ㔚ሶ߇ಽሶߣⴣ⓭㔚㔌ߒ㧘ᱜࠗࠝࡦߣ㔚ሶ߇ᱷࠆ㧚ࠄߩࠦࡠ࠽⊒శߪ D=0%ߣหߓߋࠄ޿ߩ⊒శᒝᐲߣߥߞߚ㧚߹ߚ㧘㊎⢛ᓟ㔚ᭂߩߚ߼㧘ߘߩవ┵ㇱಽ߇㔚⇇㓸ਛߔࠆߎߣ

22 ㊎⢛ᓟ㔚ᭂࠍ᦭ߒߚᓸዊ㑆㓗ౝࠍㅴዷߔࠆᴪ㕙᡼㔚․ᕈ㧔ᐔ↰ᥓਯࠄ㧕
2 ㊎⢛ᓟ㔚ᭂࠍ᦭ߒߚᓸዊ㑆㓗ౝࠍㅴዷߔࠆᴪ㕙᡼㔚․ᕈ㧔ᐔ↰ᥓਯࠄ㧕127 (31)127
127

ߢ㊎⢛ᓟ㔚ᭂ਄ㇱߣਅㇱࡃ࡝ࠕߩਃ㊀ὐㇱಽߢࠦࡠ࠽߇↢ߢ㊎⢛ᓟ㔚ᭂ਄ㇱߣਅㇱࡃ࡝ࠕߩਃ㊀ὐㇱಽߢࠦࡠ࠽߇↢ߓࠆߣផ᷹ߐࠇࠆ㧚ߓࠆߣផ᷹ߐࠇࠆ㧚
x=2, 5mm ߩߣ߈ߪ x=0, 3mm ߦᲧߴ㧘ೋᦼᲑ㓏ߢߩ㊎⢛ᓟ
x=2, 5mm ߩߣ߈ߪ x=0, 3mm ߦᲧߴ㧘ೋᦼᲑ㓏ߢߩ㊎⢛ᓟ㔚ᭂ਄ㇱ䈎䉌䈱䉮䊨䊅⊒శ䈲ᒙ䈒㧘䉁䈢䈲⊒శ䈲䈭䈒㧘䉮䊨䊅䈱㔚ᭂ਄ㇱ䈎䉌䈱䉮䊨䊅⊒శ䈲ᒙ䈒㧘䉁䈢䈲⊒శ䈲䈭䈒㧘䉮䊨䊅䈱᜛䈏䉍䉅ዊ䈘䈒䈭䈦䈢㧚ߒ߆ߒ㧘ශട㔚࿶߇਄᣹ߔࠆߣ x=2, 5mm
᜛䈏䉍䉅ዊ䈘䈒䈭䈦䈢㧚ߒ߆ߒ㧘ශട㔚࿶߇਄᣹ߔࠆߣ x=2, 5mm
ߢߪ㧘ᓸዊ㑆㓗ౝࠦࡠ࠽߿㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽ߦᄌ
ߢߪ㧘ᓸዊ㑆㓗ౝࠦࡠ࠽߿㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽ߦᄌ
ൻ߇⷗ࠄࠇߚ㧚x=0, 3mm ߩ D=3%ߦᲧߴߡ㧘㊎⢛ᓟ㔚ᭂ਄ㇱൻ߇⷗ࠄࠇߚ㧚x=0, 3mm ߩ D=3%ߦᲧߴߡ㧘㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శߪዊߐ޿߇㧘ᓸዊ㑆㓗ౝߩࠦࡠ࠽ㅴዷߪ
߆ࠄߩࠦࡠ࠽⊒శߪዊߐ޿߇㧘ᓸዊ㑆㓗ౝߩࠦࡠ࠽ㅴዷߪ
x=2, x=2,
5mm5mmߩᣇ߇ㅴዷߒ㧘ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇ਅ߇ࠆߎߣ߇
ߩᣇ߇ㅴዷߒ㧘ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇ਅ߇ࠆߎߣ߇

㊎⋡ߩ⊒శࠦࡠ࠽㐳ߪ 0.5mm㧘2 ㊎⋡ߩ⊒శࠦࡠ࠽ߪ᷹ⷰ
㊎⋡ߩ⊒శࠦࡠ࠽㐳ߪ 0.5mm㧘2 ㊎⋡ߩ⊒శࠦࡠ࠽ߪ᷹ⷰ
ߐࠇߥ޿㧚ߘߩߣ߈ߩᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽㐳ߪ 0.8mm
ߐࠇߥ޿㧚ߘߩߣ߈ߩᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽㐳ߪ 0.8mm
ߣࠊ߆ࠆ㧚ශട㔚࿶ 10.0kV ߢߩ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩ⊒ߣࠊ߆ࠆ㧚ශട㔚࿶ 10.0kV ߢߩ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩ⊒శࠦࡠ࠽ߪᓸዊ㑆㓗ౝࠍㅴዷߔࠆࠦࡠ࠽ߦᓇ㗀߇⷗ࠄࠇశࠦࡠ࠽ߪᓸዊ㑆㓗ౝࠍㅴዷߔࠆࠦࡠ࠽ߦᓇ㗀߇⷗ࠄࠇߥ޿㧚ߎࠇߪ㧘ශട㔚࿶߇ૐߊ㧘㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦߥ޿㧚ߎࠇߪ㧘ශട㔚࿶߇ૐߊ㧘㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽߽ᒙ޿㧚ߘߩߚ߼㧘㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽ߩᓇ
ࡠ࠽߽ᒙ޿㧚ߘߩߚ߼㧘㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽ߩᓇ
㗀߇ᓸዊ㑆㓗ౝࠦࡠ࠽ߦኻߒߡᒙ޿ߣ⠨߃ࠄࠇࠆ㧚ᰴߦ㧘㗀߇ᓸዊ㑆㓗ౝࠦࡠ࠽ߦኻߒߡᒙ޿ߣ⠨߃ࠄࠇࠆ㧚ᰴߦ㧘ශട㔚࿶߇ 13.0kV ઃㄭߩࠦࡠ࠽ߩ႐วߢߪ㧘D=0%ߩߣ߈㧘ශട㔚࿶߇ 13.0kV ઃㄭߩࠦࡠ࠽ߩ႐วߢߪ㧘D=0%ߩߣ߈㧘ᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽㐳ߪ
1.5mm ߢ޽ࠆ㧚D=3%ߢߪ㧘ᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽㐳ߪ 1.5mm ߢ޽ࠆ㧚D=3%ߢߪ㧘޿ࠆߣᕁࠊࠇࠆ㧚޿ࠆߣᕁࠊࠇࠆ㧚ߚ߼್೎߇࿎㔍ߢ޽ߞߚ㧚2㊎⋡ߩ⊒శࠦࡠ࠽㐳ߪ
1.3mmߚ߼್೎߇࿎㔍ߢ޽ߞߚ㧚2㊎⋡ߩ⊒శࠦࡠ࠽㐳ߪ
1.3mm
ߢ㧘ᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽㐳ߪ
2.7mm
ߣࠊ߆ࠆ㧚ߎߩ
ߢ㧘ᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽㐳ߪ 2.7mm ߣࠊ߆ࠆ㧚ߎߩ

ࠊ߆ߞߚ㧚
ߎࠇࠃࠅ㧘
3%ઃㄭߢࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇ૐਅߔ
ࠊ߆ߞߚ㧚
ߎࠇࠃࠅ㧘
3%ઃㄭߢࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇ૐਅߔ
ࠆ㨂․ᕈߦ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽߇ᓇ㗀ࠍ෸߷ߒߡ
ࠆ㨂․ᕈߦ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽߇ᓇ㗀ࠍ෸߷ߒߡ

4. 4.
ᬌ ᬌ
⸛ ⸛
ߩᷙว₸ߦ㑐ଥߥߊ㧘ࡄ࡞ࠬ㔚࿶㊎⢛ᓟ㔚ᭂ૏⟎߿
N2/SF㊎⢛ᓟ㔚ᭂ૏⟎߿
N26/SF6 ߩᷙว₸ߦ㑐ଥߥߊ㧘ࡄ࡞ࠬ㔚࿶߇⋥ߦශടߐࠇࠆ਄ㇱ㊎㔚ᭂవ┵ઃㄭ߆ࠄࠦࡠ࠽߇⊒↢ߒ㧘߇⋥ߦශടߐࠇࠆ਄ㇱ㊎㔚ᭂవ┵ઃㄭ߆ࠄࠦࡠ࠽߇⊒↢ߒ㧘13) 13)㧚ᓸዊ㑆㓗ౝࠍㅴዷߒ㧘⛘✼⎕უߦࡈ࡜࠶ࠪࠝ࡯ࡃߦ⥋ࠆࡈ࡜࠶ࠪࠝ࡯ࡃߦ⥋ࠆ㧚ᓸዊ㑆㓗ౝࠍㅴዷߒ㧘⛘✼⎕უߦ⥋ࠆᴪ㕙᡼㔚ߦ߅޿ߡߪ㧘ࡃ࡝ࠕ⴫㕙߆ࠄߩశ㔚ሶ㧘㑆㓗౉⥋ࠆᴪ㕙᡼㔚ߦ߅޿ߡߪ㧘ࡃ࡝ࠕ⴫㕙߆ࠄߩశ㔚ሶ㧘㑆㓗౉

1 ㊎⋡ߩ⊒శࠦࡠ࠽㐳ߪᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽ߣ㊀ߥࠆ
1 ㊎⋡ߩ⊒శࠦࡠ࠽㐳ߪᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽ߣ㊀ߥࠆࠃ߁ߦ㧘ශട㔚࿶
13.0kVઃㄭߩ㔚࿶㗔ၞߢߪ㧘D=3%ߩ㊎ࠃ߁ߦ㧘ශട㔚࿶
13.0kVઃㄭߩ㔚࿶㗔ၞߢߪ㧘D=3%ߩ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩ⊒శࠦࡠ࠽㐳߇ᄢ߈ߊߥߞߚߣ⠨߃⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩ⊒శࠦࡠ࠽㐳߇ᄢ߈ߊߥߞߚߣ⠨߃
ࠄࠇࠆ㧚
ࠄࠇࠆ㧚
ߐࠄߦ㧘
ᓸ㊂ߥ
SFSF
N2N/SF6 ࠟࠬߩᷙว₸ߢߩ⃻⽎ߩߚ߼㧘
6 6
ߐࠄߦ㧘
ᓸ㊂ߥ
6 ࠟࠬߩᷙว₸ߢߩ⃻⽎ߩߚ߼㧘
2/SF
10)ᷙวࠟࠬߦࠃࠆᓇ㗀߽⠨ᘦߔࠆᔅⷐ߇޽ࠆ㧚╩⠪ࠄߪᣢᷙวࠟࠬߦࠃࠆᓇ㗀߽⠨ᘦߔࠆᔅⷐ߇޽ࠆ㧚╩⠪ࠄ 10)ߪᣢߦࡄ࡞ࠬ㔚࿶ශടߦ߅޿ߡ㧘ᴪ㕙᡼㔚ߩࡈ࡜࠶ࠪࠝ࡯ࡃ㔚ߦࡄ࡞ࠬ㔚࿶ශടߦ߅޿ߡ㧘ᴪ㕙᡼㔚ߩࡈ࡜࠶ࠪࠝ࡯ࡃ㔚ࠅญઃㄭߦ߅ߌࠆⓨ㑆㔚⩄߿ࡃ࡝ࠕ⴫㕙ߩ⫾Ⓧ㔚⩄ߥߤߩࠅญઃㄭߦ߅ߌࠆⓨ㑆㔚⩄߿ࡃ࡝ࠕ⴫㕙ߩ⫾Ⓧ㔚⩄ߥߤߩ࿶ߦ߅ߌࠆV ․ᕈߦߟ޿ߡએਅߩࠃ߁ߦႎ๔ߒߡ޿ࠆ㧚ශශ࿶ߦ߅ߌࠆV ․ᕈߦߟ޿ߡએਅߩࠃ߁ߦႎ๔ߒߡ޿ࠆ㧚ᓇ㗀ࠍ⠨ᘦߔࠆᔅⷐ߇޽ࠆ㧚߹ߕ㧘ᓸዊ㑆㓗ߩᄖ஥ࠍㅴዷߔ
ᓇ㗀ࠍ⠨ᘦߔࠆᔅⷐ߇޽ࠆ㧚߹ߕ㧘ᓸዊ㑆㓗ߩᄖ஥ࠍㅴዷߔ

ട㔚࿶ߩჇടᤨߢ㧘ࠬ࠻࡝࡯ࡑవ┵ߩ㔚⇇ߪࠬ࠻࡝࡯ࡑߩ
ട㔚࿶ߩჇടᤨߢ㧘ࠬ࠻࡝࡯ࡑవ┵ߩ㔚⇇ߪࠬ࠻࡝࡯ࡑߩ

ࠆᴪ㕙〒㔌ࠃࠅ߽ᓸዊ㑆㓗ౝࠍࠦࡠ࠽߇ㅴዷߔࠆᴪ㕙〒㔌ࠆᴪ㕙〒㔌ࠃࠅ߽ᓸዊ㑆㓗ౝࠍࠦࡠ࠽߇ㅴዷߔࠆᴪ㕙〒㔌ዉ㔚₸߇㜞ߊߥࠆߎߣߢᒝߊߥࠆ㧚㔚ሶࠛࡀ࡞ࠡ࡯߇
ዉ㔚₸߇㜞ߊߥࠆߎߣߢᒝߊߥࠆ㧚㔚ሶࠛࡀ࡞ࠡ࡯߇2eV
2eV

ߩᣇ߇⍴޿㧚ߎࠇߪ㧘㑆㓗᏷߇⁜޿႐ว㧘ᓸዊ㑆㓗᏷߇ᐢ޿ߩᣇ߇⍴޿㧚ߎࠇߪ㧘㑆㓗᏷߇⁜޿႐ว㧘ᓸዊ㑆㓗᏷߇ᐢ޿એ਄ߣ
1eVએਅߦ߅ߌࠆ㔚ሶઃ⌕₸ࠍᲧセߒߚ႐ว㧘
೨⠪
એ਄ߣ
1eV
એਅߦ߅ߌࠆ㔚ሶઃ⌕₸ࠍᲧセߒߚ႐ว㧘೨⠪႐วߦᲧߴߡ㑆㓗౉ࠅญߩ਄ㇱ㊎㔚ᭂవ┵ઃㄭߢߪࠦࡠ࠽
႐วߦᲧߴߡ㑆㓗౉ࠅญߩ਄ㇱ㊎㔚ᭂవ┵ઃㄭߢߪࠦࡠ࠽

15) 15)
ߩᣇ߇
3㨪4
ᩴૐߊߥࠆ
㧚ߒߚ߇ߞߡ㧘ߎߩ㗔ၞਛߩ㔚
ߩᣇ߇
3㨪4
ᩴૐߊߥࠆ
㧚ߒߚ߇ߞߡ㧘ߎߩ㗔ၞਛߩ㔚߇ㅴዷߒߦߊߊߥࠅ㧘ߘߩࠦࡠ࠽ߩ⫾Ⓧ㔚⩄ߦࠃߞߡᓸዊ㑆߇ㅴዷߒߦߊߊߥࠅ㧘ߘߩࠦࡠ࠽ߩ⫾Ⓧ㔚⩄ߦࠃߞߡᓸዊ㑆ሶߪሶߪ
SF6SFߦઃ⌕ߒߦߊߊߥࠅ㧘ઃ⌕ߒߡ߽ߔߋߦ㔌ࠇࠆ㧚
6 ߦઃ⌕ߒߦߊߊߥࠅ㧘ઃ⌕ߒߡ߽ߔߋߦ㔌ࠇࠆ㧚㓗౉ࠅญߢዪㇱ⊛㜞㔚⇇߇ᒝ߹ࠆᓇ㗀߿ᓸዊ㑆㓗ౝࠍㅴዷ㓗౉ࠅญߢዪㇱ⊛㜞㔚⇇߇ᒝ߹ࠆᓇ㗀߿ᓸዊ㑆㓗ౝࠍㅴዷߎߩߚ߼㧘ᓸ㊂ߥ
N2Nࠟࠬߦᷙวߔࠆߣ㧘SF
ߎߩߚ߼㧘ᓸ㊂ߥSFSF
6 ࠟࠬࠍ
2 ࠟࠬߦᷙวߔࠆߣ㧘SF
6ࠟ
6 ࠟࠬࠍ
6ࠟ

ࠝ࡯ࡃ㔚࿶߇ૐߊߥࠆߣ⠨߃ߡ޿ࠆ㧚ᓥߞߡ㧘ᓸዊ㑆㓗ߩᄖࠝ࡯ࡃ㔚࿶߇ૐߊߥࠆߣ⠨߃ߡ޿ࠆ㧚ᓥߞߡ㧘ᓸዊ㑆㓗ߩᄖ஥ࠍࠦࡠ࠽߇ㅴዷߔࠆࠃࠅ߽ᓸዊ㑆㓗ౝࠍㅴዷߔࠆᣇ߇ࡈ
஥ࠍࠦࡠ࠽߇ㅴዷߔࠆࠃࠅ߽ᓸዊ㑆㓗ౝࠍㅴዷߔࠆᣇ߇ࡈ
࡜࠶ࠪࠝ࡯ࡃߦ⥋ࠅ߿ߔߊߥࠆ㧚࡜࠶ࠪࠝ࡯ࡃߦ⥋ࠅ߿ߔߊߥࠆ㧚
4 ߩᓸዊ㑆㓗ౝࠍㅴዷߒߚࠦࡠ࠽ㅴዷ㐳ߣශട㔚࿶
࿑ 4࿑ߩᓸዊ㑆㓗ౝࠍㅴዷߒߚࠦࡠ࠽ㅴዷ㐳ߣශട㔚࿶ଐሽᕈߦ߅޿ߡ㧘x=0,
3mm
ߩ႐ว㧘1
㊎⋡ߩ㊎⢛ᓟ㔚ᭂ߇ଐሽᕈߦ߅޿ߡ㧘x=0,
3mm
ߩ႐ว㧘1
㊎⋡ߩ㊎⢛ᓟ㔚ᭂ߇਄ㇱ㊎㔚ᭂߩ⌀ਅߦ૏⟎ߔࠆߚ߼㧘2㊎⢛ᓟ㔚ᭂ૏⟎਄ㇱ㊎㔚ᭂߩ⌀ਅߦ૏⟎ߔࠆߚ߼㧘2㊎⢛ᓟ㔚ᭂ૏⟎x=2,x=2,ߦᲧߴߡ㔚⇇߇ᒝߊߥࠅ㧘ࠦࡠ࠽߇㑆㓗ౝߦㅴ౉ߒ
5mm5mmߦᲧߴߡ㔚⇇߇ᒝߊߥࠅ㧘ࠦࡠ࠽߇㑆㓗ౝߦㅴ౉ߒ
߿ߔ޿ߣ⠨߃ߚ㧚৻ᣇ㧘x=2,5mm
ߩ႐ว㧘D=3%ߩᣇ߇
߿ߔ޿ߣ⠨߃ߚ㧚৻ᣇ㧘x=2,5mm
ߩ႐ว㧘D=3%ߩᣇ߇
D=0%ࠃࠅࠦࡠ࠽ߩિ߮߇Ⴧᄢߒߚ㧚ߎߩࠦࡠ࠽ㅴዷߩᄢ
D=0%ࠃࠅࠦࡠ࠽ߩિ߮߇Ⴧᄢߒߚ㧚ߎߩࠦࡠ࠽ㅴዷߩᄢ
ዊ߇㨂․ᕈߦߥߞߚߣ⠨߃ࠄࠇࠆ㧚ߘߩߚ߼㧘x=2,5mm
ዊ߇㨂․ᕈߦߥߞߚߣ⠨߃ࠄࠇࠆ㧚ߘߩߚ߼㧘x=2,
5mmߩ႐วߦߟ޿ߡᬌ⸛ߔࠆ㧚ߩ႐วߦߟ޿ߡᬌ⸛ߔࠆ㧚࿑ 7 ߦ࿑ 6 ߩ CCD ࠍ↪޿ߚ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ
࿑ 7 ߦ࿑ 6 ߩ CCD ࠍ↪޿ߚ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ
࠽⊒శߩ᷹ⷰ⚿ᨐ߆ࠄ㧘㊎⢛ᓟ㔚ᭂ߹ߚߪᓸዊ㑆㓗ౝߩ⊒࠽⊒శߩ᷹ⷰ⚿ᨐ߆ࠄ㧘㊎⢛ᓟ㔚ᭂ߹ߚߪᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽㐳ߩශട㔚࿶ଐሽᕈࠍ␜ߔ㧚2 ㊎⢛ᓟ㔚ᭂ૏⟎శࠦࡠ࠽㐳ߩශട㔚࿶ଐሽᕈࠍ␜ߔ㧚2 ㊎⢛ᓟ㔚ᭂ૏⟎
x=2, 5mm ߩ႐ว㧘D=0%ߢߪ㧘ශട㔚࿶߇ 13.0kV ઃㄭ߹
x=2, 5mm ߩ႐ว㧘D=0%ߢߪ㧘ශട㔚࿶߇ 13.0kV ઃㄭ߹ߢ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽ߩ⊒↢ߪ⹺߼ࠄࠇߥ޿㧚ශߢ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽ߩ⊒↢ߪ⹺߼ࠄࠇߥ޿㧚ශട㔚࿶߇ 10.0kV ઃㄭߩࠦࡠ࠽ߩ႐ว㧘D=0%ߦ߅޿ߡ㧘ᓸട㔚࿶߇ 10.0kV ઃㄭߩࠦࡠ࠽ߩ႐ว㧘D=0%ߦ߅޿ߡ㧘ᓸዊ㑆㓗ౝߩ⊒శࠦࡠ࠽㐳ߪ 0.8mm ߢ޽ࠆ㧚D=3%ߢߪ㧘1
ዊ㑆㓗ౝߩ⊒శࠦࡠ࠽㐳ߪ 0.8mm ߢ޽ࠆ㧚D=3%ߢߪ㧘1

ࠬߦ㔚ሶઃ⌕ߒߡ↢ߓߚ⽶ࠗࠝࡦ߆ࠄ㧘ශട㜞㔚⇇ߦࠃߞ
ࠬߦ㔚ሶઃ⌕ߒߡ↢ߓߚ⽶ࠗࠝࡦ߆ࠄ㧘ශട㜞㔚⇇ߦࠃߞ
16,17)
16,17)
ߡ㔚ሶ㔌⣕ߒ㧘ೋᦼ㔚ሶ߇⊒↢ߔࠆ⏕₸߇Ⴧߔ㧚߹ߚ㧘ߡ㔚ሶ㔌⣕ߒ㧘ೋᦼ㔚ሶ߇⊒↢ߔࠆ⏕₸߇Ⴧߔ㧚߹ߚ㧘

SF
SF6SFࠟࠬ߇ᓸ㊂ߩߚ߼㧘SF
6 ࠟࠬ߇ᓸ㊂ߩߚ߼㧘SF
6 ࠟࠬ߆ࠄ㔌⣕ߒߚ㔚ሶߪSF
6 ࠟࠬ߆ࠄ㔌⣕ߒߚ㔚ሶߪ
6 6
N2/SF
6 Positive
N2/SF
6 Positive
First
BacksideFirst
BacksideElectrode
Electrode3
3

Corona Extension x (mm)Corona Extension x (mm)14) 14)ߦࠃߞߡࡈ࡜࠶ࠪ
ߔࠆࠦࡠ࠽ߦࠃࠆ⚡ᄖ✢㐽ߓㄟ߼ലᨐ
ߦࠃߞߡࡈ࡜࠶ࠪ
ߔࠆࠦࡠ࠽ߦࠃࠆ⚡ᄖ✢㐽ߓㄟ߼ലᨐ

2

٨㧦D=
٨㧦D=
0%0%
٤㧦D=
٤㧦D=
3%3%

SecondBackside
SecondBacksideElectrode
Electrode2‫ع‬㧦D=‫ع‬㧦D=0%0%‫غ‬㧦D=‫غ‬㧦D=
3%3%

1 1

0

NarrowSpace
Narrow
Space
CoronaCoronaٟ㧦D= 0%ٟ㧦D= 0%٠㧦D= 3%
٠㧦D= 3%

0

10
15
10
15
Instantaneous Voltage V (kV)Instantaneous Voltage V (kV)
࿑ 7 ⊒శࠦࡠ࠽㐳ߣශട㔚࿶ଐሽᕈ
࿑ 7 ⊒శࠦࡠ࠽㐳ߣශട㔚࿶ଐሽᕈ
Fig.7 Corona extension – Instantaneous voltage.
Fig.7 Corona
extension – Instantaneous voltage.
(N2/SF6 : x=2, 5mm, 0.3MPa, Positive)(N2/SF6 : x=2, 5mm, 0.3MPa, Positive)

5

5

128 (32)
128

32
3
2008
㕒㔚᳇ቇળ⹹ ╙ 32 Ꮞ ╙ 3 ภ㧔2008㧕ࠟࠬࠃࠅ N2 ࠟࠬߣⴣ⓭ߒ߿ߔߊ㧘㔚ሶߥߛࠇࠍᒁ߈⿠ߎ

㔚࿶ᵄ㗡ㇱߩ㔚࿶਄᣹ߦ઻ߞߡࠦࡠ࠽⊒శᒝᐲߪᒝߊߥ

ߒ߿ߔ޿ߣ⠨߃ࠄࠇࠆ㧚ߐࠄߦ㧘SF6 ࠟࠬߩᷙว₸ D ߇Ⴧࠅ⊒శ㊂ߪᄙߊߥߞߚ㧚ߎࠇߪ㧘ᓸዊ㑆㓗ౝߩࠦࡠ࠽߇㊎ߔߣ㔚⇇㔌⣕ߒߚ㔚ሶ߇Ⴧ߃ࠆ߇㧘D ߩჇടߦࠃߞߡ㔚ሶ⢛ᓟ㔚ᭂߦᓇ㗀ߐࠇߡᓢ‫ߦޘ‬ㅴዷߔࠆߚ߼ߣ⠨߃ࠄࠇࠆ㧚ઃ⌕߽Ⴧߔ㧚ߘߩ⚿ᨐ㧘㔚ሶ᝝₪૞↪߇ᒝജߦߥࠆߣ㔚ሶ

3)㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శࠍ᷹ⷰߒߚߣߎࠈ㧘ߩჇ୚߇ᛥ߃ࠄࠇ㧘ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇਄᣹ߔࠆߣ⠨߃

x=0, 3mm ߩ D=0%㧘D=3%ߣ߽ߦ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄࠦࡠࠄࠇࠆ㧚࠽⊒శ߇᷹ⷰߐࠇߚ㧚x=2, 5mm ߩ D=3%ߦ߅޿ߡ߽ x=2,

1 ᧄ⋡ߣ 2 ᧄ⋡ߩ㊎⢛ᓟ㔚ᭂߩ૞↪ࠍ⠨߃ࠆߣ㧘x=0, 3mm

5mm ઃㄭ߆ࠄࠦࡠ࠽⊒శ߇᷹ⷰߐࠇߚ߇㧘x=0, 3mm ߩㇱߩ႐ว㧘1 ᧄ⋡ߩ㊎⢛ᓟ㔚ᭂ߇਄ㇱ㊎㔚ᭂߩ⌀ਅߦሽ࿷ߔࠆಽߣᲧセߔࠆߣ㔚࿶ߩೋᦼᲑ㓏ߢߪ㕖Ᏹߦᒙߊ㧘ᓸዊ㑆㓗ߚ߼ࠦࡠ࠽ߪᓸዊ㑆㓗ౝߦ౉ࠅㄟߺᤃ޿㧚ߘߩᓟ㧘ᓸዊ㑆㓗ౝࠍㅴዷߒᆎ߼ࠆࠃࠅૐ޿㔚࿶㗔ၞߢߪࠦࡠ࠽⊒శ߇ᒝౝߩࠦࡠ࠽߇ 2 ᧄ⋡ߩ㊎⢛ᓟ㔚ᭂߩᓇ㗀ࠍฃߌࠆ㧚৻ᣇ㧘x=2,ߊߥࠆߎߣ߇ࠊ߆ߞߚ㧚

5mm ߩ႐ว㧘1 ᧄ⋡ߩ㊎⢛ᓟ㔚ᭂ߇਄ㇱ㊎㔚ᭂߩ⌀ਅߦሽ࿷

4)2 ᧄ⋡ߩ㊎⢛ᓟ㔚ᭂ߇ሽ࿷ߔࠆߎߣߢᓸዊ㑆㓗ౝߩࠦࡠߒߥ޿ߚ߼ x=0, 3mm ߦᲧߴߡᓸዊ㑆㓗ౝߦࠦࡠ࠽߇ㅴ౉ߒ

࠽߇ㅴዷߒ߿ߔߊߥࠆߎߣ߇ࠊ߆ߞߚ㧚x=0, 3mm ߩ႐วߢߦߊ޿㧚ߒ߆ߒ㧘㊎⢛ᓟ㔚ᭂ૏⟎߇ 2mm, 5mm ߢ޽ࠆߩߢ㧘ߪ㧘ࠦࡠ࠽߇⊒↢ᓟ㧘ᓸዊ㑆㓗ౝࠍߔߋߦㅴዷߔࠆߩߦട

2 ߟߩ㊎⢛ᓟ㔚ᭂߪᓸዊ㑆㓗ౝࠍㅴዷߔࠆࠦࡠ࠽ࠍഥ㐳ߐߖ߃ߡ㧘㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽߽ૐ޿㔚࿶ߢ⊒↢ߔࠆࠆ૞↪߇޽ࠆߣ⠨߃ࠄࠇࠆ㧚ߎߣ߇ࠊ߆ߞߚ㧚x=0, 3mm ߩ D=3%ߦᲧߴߡ㧘x=2, 5mm

හߜ㧘SF6 ࠟࠬߩᓸ㊂ᷙวၞߦ߅޿ߡ 2eV ઃㄭߢ SF6 ࠟࠬ

ߩᣇ߇㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శߪዊߐ޿߇㧘ᓸዊߩ㔚ሶઃ⌕₸߇⪺ߒߊૐਅߒ㧘ೋᦼ㔚ሶߩ⊒↢ߔࠆ⏕₸߇Ⴧ㑆㓗ౝߩࠦࡠ࠽ߪㅴዷߒ㧘ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇ਅ߇ࠆߎ

ߔ㧚ߎߩᓸ㊂ᷙวߦࠃࠆ૞↪߇㊎⢛ᓟ㔚ᭂߦᓇ㗀ࠍ෸߷ߒ㧘ߣ߇ࠊ߆ߞߚ㧚

D=0%ߦᲧߴߡ D=3%ߩ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄࠦࡠ࠽߇⊒↢ߒ㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄࠦࡠ࠽߇⊒↢ߒ㧘㑆㓗ౝߩࠦࡠ࠽ㅴዷ

ߡᓸዊ㑆㓗ౝࠦࡠ࠽ߩㅴዷߦነਈߒߚߣ⠨߃ࠄࠇࠆ㧚ߘߩߚ᜼േߦᓇ㗀ߔࠆߎߣ߇ࠊ߆ߞߚ㧚ߎߩߎߣ߆ࠄ㧘㔚ജᯏེߩ߼㧘x=2, 5mm ߦ߅ߌࠆ D=0%㧘3%ߩ႐วߢߪ㧘ߎߩ૞↪ߩၒ߼ㄟߺ㔚ᭂ⴫㕙ߩ⓭⿠ߥߤ߇ᯏེߩ⛘✼ᕈ⢻ߦᓇ㗀ࠍ෸ᄢዊ߇ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߩ V ․ᕈࠍ␜ߔ߆㧘ุ߆ߩಽጘὐ

߷ߔน⢻ᕈ߇޽ࠆ㧚ߘߩઁ㧘ᓸ⚦ൻߦࠃࠆ㓸Ⓧ࿁〝ߦߪ⛘✼ߣߥߞߡ޿ࠆߣ⠨߃ࠄࠇࠆ㧚ࠃߞߡ㧘x=0, 3mm ߩ D=3%ߦᲧ

⤑ߩ੉ⵚ߿✢㑆ߦ㜞㔚⇇߇⊒↢ߒ㧘᡿㓚ࠍ⿠ߎߔน⢻ᕈ߇޽ߴߡ㧘x=2, 5mm ߩᣇ߇㊎⢛ᓟ㔚ᭂ਄ㇱ߆ࠄߩࠦࡠ࠽⊒శߪዊࠆ㧚ߎߩࠃ߁ߥᐢ޿ಽ㊁ߦㆡ↪߇น⢻ߣ⠨߃ࠄࠇࠆ㧚ߐ޿߇㧘ᓸዊ㑆㓗ౝࠦࡠ࠽ߪㅴዷߒ㧘ࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇ਅ߇ࠆ V ․ᕈߣߥࠆ⃻⽎߇⃻ࠇߚ߽ߩߣ⠨߃ࠄࠇࠆ㧚ࡄ࡞ࠬᵄ㗡ㇱߩࠃ߁ߦ㔚࿶ߩශടߦࠃࠅ㧘㊎⢛ᓟ㔚ᭂ਄ㇱ߇㜞㔚⇇ߣߥࠆߚ߼ߦ㊎⢛ᓟ㔚ᭂߩ㊎వ┵ㇱಽߦࠦࡠ࠽߇
⊒↢ߒ㧘ࠦࡠ࠽߇᜛߇ࠆ㧚߹ߚ㧘ශടࡄ࡞ࠬ㔚࿶ߩ਄᣹ߦࠃ
ࠅᓸዊ㑆㓗ౝߩ㔚⇇߇ᄌൻߔࠆߩߢ㧘ᦝߦ⹦ߒߊ⺞ߴࠆߚ߼ߦߪ㧘ࡄ࡞ࠬ㔚࿶ᵄ㗡ㇱߦ߅ߌࠆ㔚⇇ߩᤨ㑆⊛ᄌൻߦᵈ⋡ߔࠆᔅⷐ߇޽ࠆ㧚੹ᓟ㧘ߎࠇࠄߦߟ޿ߡߩᬌ⸛߇ᔅⷐߢ޽ࠆ㧚
5.

߹ ߣ ߼

Ps ᣇᒻᵄࡄ࡞ࠬ㔚࿶ශടᤨߩᓸዊ㑆㓗ౝࠍㅴዷߔࠆ 2 ㊎⢛ᓟ㔚ᭂࠍ߽ߟᴪ㕙᡼㔚․ᕈߩ᷹ⷰ⚿ᨐࠍએਅߦ߹ߣ߼ࠆ㧚
1)

N2/SF6 ᷙวࠟࠬਛߩᱜᭂᕈߩࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߦ߅޿ߡ㧘x=2, 5mm ߢߪ D=3%ઃㄭߢࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶߇ૐਅߔࠆ V ․ᕈ߇ᓧࠄࠇߚ㧚ߎࠇߦኻߒߡ㧘x=0, 3mm ߩ႐วߢߪࡈ࡜࠶ࠪࠝ࡯ࡃ㔚࿶ߪන⺞Ⴧടߣߥࠅ㧘V ․ᕈߪ⃻ࠇߥ߆ߞߚ㧚හߜ㧘㊎⢛ᓟ㔚ᭂߩ૏⟎ߦࠃߞߡ⇣ߥࠆࡈ࡜࠶
ࠪࠝ࡯ࡃ㔚࿶- SF6 ᷙว₸․ᕈߣߥࠆߎߣ߇ࠊ߆ߞߚ㧚

2)ࠦࡠ࠽ߩㅴዷ᜼േߩ᷹ⷰߦ߅޿ߡ㧘x=0, 3mm ߩ D=0%ߢ
ߪ 3.5mm ઃㄭ߹ߢࠦࡠ࠽߇ᕆㅴዷߒߚ㧚߹ߚ㧘ශടࡄ࡞ࠬ

ෳ⠨ᢥ₂⧎᧛ା㧦㔚ቇ⹹, 116 (1996) 654
ᴡ᧛㆐㓶㧦㔚ቇ⹹, 97 (1977) 349
ቛ㑆⫃㧦㔚ቇ⺰ B, 116 (1996) 1168ේ㓷ೣ㧘ᩙේ㓉ผ㧘ዊ㢬ㅴ㧘ᧃᑝ⚐਽㧘ᨋೣⴕ㧦㔚ቇ⺰
A, 122 (2002) 650
5) H.Anis and K.D.Srivastava : IEEE Trans. EI, 16 (1981) 552
6) 㔚᳇ቇળᛛⴚႎ๔㧦SF6 ߩ࿾⃿ⅣႺ⽶⩄ߣ SF6 ᷙว࡮ઍᦧ
ࠟࠬ⛘✼, 841, p.1 (2001)
7) L.G.Christophorou and R.J.Van Brunt : IEEE Trans. DEI, 2(1995) 952
8) ഏൕ᳃㧘↲᢫⟵ା㧘ᵻ੗᡽৻㧘㐳የ㓷ⴕ㧘ዊ㦮ᱜశ㧦㔚ቇ⺰ A, 119 (1999) 342
9) ጊ㊁⧐ᤘ㧦㔚ቇ⺰ A, 114 (1994) 481
10) ᐔ↰ᥓਯ㧘਄㊁⑲᮸㧘ਛጊඳผ㧦㔚ቇ⺰ C, 125 (2005) 1634
11) ኅ↰ᱜਯ㧘ᴛ੖㇢㧘◉ේවศ㧦㔚ቇ⹹㧘88 (1968) 1107
12) ਄㊁⑲᮸㧘ᐔ↰ᥓਯ㧘⷏Ꮉືม㧘ਛጊඳผ㧦㔚᳇᧚ᢱᛛⴚ㔀⹹, 13 (2004) 64
13) ᐔ↰ᥓਯ㧘਄㊁⑲᮸㧘ਛጊඳผ㧦㔚᳇ቇળ᡼㔚⎇ⓥળ⾗ᢱ, ED-05-163, p.65 (2005)14) ᓮᚲᐽ৾㧘㆙⮮ᱜ㓶㧘ᷰㄝశᒄ㧘㊄ሶᱞผ : ᐔᚑ 11 ᐕ㔚᳇ቇળో࿖ᄢળ⻠Ṷ⺰ᢥ㓸, 1-226, p.267 (1998)15) H.Ueno, H.Ohnishi, K.Tada, M.Onoda and H.Nakayama : Jpn.
J. Appl. Phys., 38 (1999) 4182
16) E.Kuffel and A.Yializis : IEEE Trans. PAS, 97 (1978) 2359
17) D.F.Binns and R.J.Hood : Proc. Inst. Elect. Enger., 116 (1969)
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