MNC 2024

MNC 2024 (November 12-15, Kyoto Brighton Hotel, Kyoto, Japan) Program
Keynote (On-demand), You can watch the video file from My Page of the Registration Site
Keynote-13
TBA (Keynote)
Toru Fujimori, FUJIFILM, Japan

Keynote-22
Nanomaterial-coated Opticalfiber sensor for Non-Invasive
VOC Biomarker Detection(Keynote)
Kankan Swargiary 1, Pannathorn
Jitpratak 1, Akhilesh K. Pathak 2 andCharusluk Viphavakit 1, 1
Chulalongkorn Univ., Thailand and 2
Northwestern Univ., USA

Keynote-4
A biosensor using electrochemical
impedance spectroscopy (EIS)
Anomalous charge transfer
enhancement by the 2nd mediator(Keynote)
Kazuyuki Nobusawa 1, Huan Wen
Han 2 and Ichiro Yamashita 2
1 Textile Res. Inst. of Gunma and 2
Osaka Univ., Japan

Keynote-5
Elastomer-Based Force
Sensors and Their Niche
Applications (Keynote)
Cheng-Yao Lo, National Tsing Hua
Univ., Taiwan

Keynote-26
Inkjet Printing-Based Superflash
Freezing: New Developments inCell Cryopreservation (Keynote)

Keynote-3
Inkjet Printing-Based Superflash
Freezing: New Developments inCell Cryopreservation (Keynote)

Yoshitake Akiyama, Shinshu Univ.,
Japan

Takahiko Hariyama, Hamamatsu Univ.
School of Medicine, Japan

Keynote-6
Innovative Multiscale Process
Opens the Way to Macroscale
Assemblies of Carbon Nanotubesfor High-Strength Fibers Beyond
Carbon Fibers, Energy andMechanical Devices (Keynote)
Yasuhiko Hayashi, Okayama Univ.,
Japan

Tuesday, November 12, 2024
Room A (Cuddy Court) (1F)
13:00-17:25 Technical Seminar’ in Japanese
TBA
17:50-19:50 Get Together Party

Wednesday, November 13, 2024
Room P (Hanabusa) (B1F)
13P-1: Opening & Plenary Session (9:30-12:10)
Chairs: Koji Asakawa (Kioxia), Shinya Kumagai (Meijo Univ.), Kouichi Takase (Nihon Univ.) and Tomoki Nagai (JSR)

13P-1-0 9:30-9:50
Opening Remarks: Toshiyuki Tsuchiya (Kyoto Univ.), Award Presentation: Toshiyuki Tsuchiya (Kyoto Univ.) and Koji Asakawa (Kioxia)
Local Announcement : Takahiro Namazu （Kyoto Univ. of Advanced Sci.)

13P-1-1 9:50-10:30
TBD
Coffee Break
13P-1-2 10:50-11:30
The next step in Moore’s Law: High NA EUV is here (Plenary)
Jan van Schoot, ASML, Netherlands

13P-1-3 11:30-12:10
Novel 3D Stacking Process Technologies to Evolve CMOS Image Sensors (Plenary)
Yoshihisa Kagawa, Sony Semiconductor Solutions Corporation, Japan
13-1-4: Luncheon Seminar Chair: Daiyu Kondo (Fujitsu)

13P-1-4 12:20-13:10 Luncheon Seminar by Technical Exhibitor
Room A (Cuddy Court) (1F)
+On-line
13A-2: Symp. A: The Path to
Sustainable Lithography I(13:30-15:00)

Room B (Keishoun) (1F)

Room C (Keishoun) (1F)

13B-1: BioMEMS, Lab on a
Chip, and Nanobiotechnology
I (13:30-15:20)

13C-2: Nano Surfaces,
Interfaces, and Advanced Nano
Metrology I (13:30-15:00)

13D-2: Atomic Layer
Processing (ALP) I (13:3014:40)

Chairs: Koji Asakawa (Kioxia) andTomoki Nagai (JSR)

Chairs: Atsushi Miura (Hokkaido
Univ.) and Shigeyasu Uno(Ritsumeikan Univ.)

Chairs: Takayuki Hoshino (Nagoya
Univ.) and Osamu Kubo (Gifu Univ.)

Chairs: Fumihiko Hirose (Yamagata
Univ.) and Koichi Tokudome (Tosoh)

13A-2-1 13:30
Systematic construction of Greenand Sustainable (Invited)

13B-2-1 13:30
A biosensor using
electrochemical impedance
spectroscopy (EIS) Anomalous
charge transfer enhancement by
the 2nd mediator (Invited)

13C-2-1 13:30
Nanoscale observation ofmaterials and biological samples
in liquid by scanning electron
assisted dielectric microscopy(Invited)

13D-2-1 13:30
Recent Progress on Atomic Layer
Deposited Oxide Semiconductor
Channel Layers for Emerging
Memory Application (Invited)

Noriyuki Uchida, AIST, Japan

Kazuyuki Nobusawa 1, Huan Wen
Han 2 and Ichiro Yamashita 2
1 Textile Res. Inst. of Gunma and 2
Osaka Univ., Japan

13A-2-2 14:00
TBA (Invited)
Daniel P. Sanders, IBM Research –Almaden

13B-2-2 14:00
Drastic Reduction of Drift
Characteristic in Insulating Coat
Graphene FET Biosensor for
Detection of Virus

Kaori Yamamoto 1, Natsuki Sato 1,
Kiyoji Sakano 1, Mamiko Yano 1,
Eriko Ohnishi 1, Shota Ushiba 2,
Yohei Watanabe 3, Shinsuke Tani 2,
Masahiko Kimura 2, Hidekazu
Tanaka 1, Kazuhiko Matsumoto 1, 1
Osaka Univ., 2 Murata
Manufacturing and 3 Kyoto Pref.
Univ. of Medicine, Japan

Room D (Keishoun) (1F)

Jin-Seong Park, Hanyang Univ., Korea

Toshihiko Ogura, and Tomoko Okada,
AIST, Japan

13C-2-2 14:00
Graphene liquid cell STEM forelectron beam-sensitive materials
Masaki Takeguchi 1, Kazutaka
Mitsuishi 1 and Ayako Hashimoto 1,2,
1 NIMS and 2 Univ. of Tsukuba, Japan-1-

13D-2-2 14:00
Plasma-assisted atomic layer
deposition of highly ionconducting lithium phosphorus
oxynitride thin films
Tohru Tsuruoka 1, Samapika Mallik 1,
Takuji Tsujita 2, Yuu Inatomi 2 andKazuya Terabe 1, 1 NIMS and 2
Panasonic Energy, Japan

Room A (Cuddy Court) (1F)
+On-line
13A-2-3 14:30
A simple, low-cost, highly energyefficient, two-mirror projector for
EUV lithography (Invited)
Tsumoru Shintake, OIST, Japan

MNC 2024
Room B (Keishoun) (1F)

Room C (Keishoun) (1F)

Room D (Keishoun) (1F)

13B-2-3 14:20
Promoting gene transfer into
cells by using non-thermal
atmospheric pressure plasma

13C-2-3 14:20
Cytoplasm transfusion between
the cells with nanotubes-based
injector

Ryunosuke Tsuji, Hisashi Hayashi,
Yuto ando and Shinya Kumagai,
Meijo Univ., Japan

Bingfu Liu 1, Zhuhang Dai 1, Bowen
Zhang 1, Kazuhiro Oyama 1, Chenxi Li
1, Yukun Chen 1, Mingyin Cui 1 andTakeo Miyake 1,2, 1 Waseda Univ. and2 JST-PRESTO, Japan

13D-2-3 14:20
FORMATION OF AL2O3
ELECTRET FILMS BY ATOMICLAYER DEPOSITION WITHASSISTANCE OF
PHOTOELECTRIC EFFECT

13B-2-4 14:40
YbTixOy electrolyte-insulatorsemiconductor biosensors for
rapid and high-sensitivity
detection of KRAS and BRAF
gene mutations in colorectal
cancer

13C-2-4 14:40
Identification of surface dangling
bonds, nitroxide radicals and P1
centers by double electronelectron resonance using NV
centers in diamond

Tung-Ming Pana 1,2, Sheng-Che
Huang 1, Pei-You Liao 1 and JimLong Her 1, 1 Chang Gung Univ.
and 2 Chang Gung Memorial
Hospital, Taiwa

13B-2-5 15:00
Challenges in Forming Sub-10
nm Nanowires via Directed SelfAssembly for Future
Applications in Silicon Nanowire
Biosensor

Hirotaka ando, Yoshito Iguchi, Akio
Uesugi, Koji Sugano, Hiroaki Honma
and Yoshitada Isono, Kobe Univ.,
Japan

Author's Interview (14:40-14:50)

Ken Sekiguchi 1, Arisa Oda 1,
Shuntaro Usui 1, Daiki Saito 1, Yuto
Miyake 1, Tokuyuki Teraji 2, Shinobu
Onoda 3, Takahiro Shinada 4, Manabu
Tanaka 5, Toshu An 6, Hiroshi
Kawarada 1 and Takashi Tanii 1, 1
Waseda Univ., 2 NIMS, 3 National Inst.
of Quantum Sci. and Technol., 4
Tohoku Univ., 5 Tokyo Metropolitan
Univ. and 6 JAIST, Japan

Author's Interview (15:00-15:10)

Yawei Qiu 1, Hui Zhang 1, Fumiya
Osawa 1, Noriyasu Ohshima 1, Taira
Kajisa 2, Toshiya Sakata 3, Takashi
Izumi 4 and Hayato Sone 1, 1
Gunma Univ., 2 SympaFit, 3 The
Univ. of Tokyo and 4 Teikyo Heisei
Univ., Japan

Author's Interview (15:20-15:30)
Lobby (2F)
Coffee BreakRoom A (Cuddy Court) (1F)
+On-line
13A-3: Symp. A: The Path to
Sustainable Lithography II(15:20-16:20)

Room B (Keishoun) (1F)
13B-2: BioMEMS, Lab on a
Chip, and Nanobiotechnology
II (15:40-17:20)

Chairs: Toru Fujimori (FUJIFILM) andJulius Santillan (AIST)

Chairs: Takeo Miyake (Waseda
Univ.) and Akihide Hibara (Tokyo
Inst. of Technol.)

13A-3-1 15:20
Development of UV-NIL resist for
semiconductor device
manufacturing (Invited)

13B-3-1 15:40
High-throughput and
Simultaneous Separation ofTumor Cells and Clusters from
Malignant Effusions Using
Spiral-contraction-expansion
Inertial Microfluidics

Kazuyuki Usuki, Akihiro Hakamata,Koichi Sato, FUJIFILM Corporation

Room C (Keishoun) (1F)
13C-3: Nanocarbon & 2D
Materials I (15:20-16:50)
Chairs: Atsushi Ando (AIST) and Taishi
Takenobu (Nagoya Univ.)

13C-3-1 15:20
Growth Model of CVD-grown
Graphene Based on In-Situ
Ultraviolet Optical Observation(Invited)
Yui Ogawa and Yoshitaka Taniyasu,
NTT, JapanNan Xiang, Zhixian Zhu andZhonghua Ni, Southeast Univ.,
China

13A-3-2 15:50
EUV Patterning of 2nm node
Place’n’Route (PnR) Metal
towards High NA: Process
Enhancement and Directional
Etch using TEL AcreviaTM Gas
Cluster Beam (GCB) Technology(Invited)
Arame Thiam 1, Syamashree Roy 2,
Victor Blanco 2, Yannick Feurprier 1,
Nobuyuki Fukui 3, Nayoung Bae 4,
Chimaobi Mbanaso 5, Kenichi
Miyaguchi 2, Luis Fernandez 5, Sang
Cheol Han 4, Shigeru Tahara 3,
Kathleen Nafus 6, Mircea Dusa 2,
Atsushi Tsuboi 7, 1 Tokyo Electron
Europe, 2 imec, Belgium, 3 Tokyo
Electron Miyagi, 4 Tokyo Electron
Technology Center of America, 5Tokyo Electron Manufacturing andEng. of America, 6 Tokyo Electron
America, USA and 7 Tokyo Electron,Japan

13B-3-2 16:00
Simple and fast detection of
DNase I for diagnosing
myocardial infarction by
microbeads dielectrophoresisbased DNA detection method

Room D (Keishoun) (1F)
13D-3: Atomic Layer
Processing (ALP) II (15:0016:10)
Chairs: Shigeo Yasuhara (Japan
Advanced Chemicals) and Daisuke
Ohori (Tohoku Univ.)

13D-3-1 15:00
Understanding of oxidant gas
effect on crystal structure andferroelectricity of atomic layer
deposited HfxZr1−xO2 thin films
using synchrotron X-ray analysis(Invited)
Takashi Onaya, The Univ. of Tokyo,
Japan

13C-3-2 15:50
High-Speed Emission of Polarized
Thermal Radiation from an OnChip Aligned Carbon Nanotube
Film

13D-3-2 15:30
Microwave remote plasma
enhanced atomic layer depositionof In2O3 thin film for field-effecttransistor applications

Shinichiro Matano 1, Natsumi
Komatsu 2, Shengjie Yu 2, Jacques
Doumani 2, Yui Shimura 1, Junichiro
Kono 2 and Hideyuki Maki 1, 1Keio
Univ., Japan and 2 Rice Univ., USA

Yuto Kawato 1, Takanori Takahashi 1,
Toshihiro Tamai 2, Shunichi Mikami 2
and Yukiharu Uraoka 1, 1 NAIST and 2
HORIBA STEC, Japan

13B-3-3 16:20
Manipulation of Active Object
using Intelligent Microfluidic
System13C-3-3 16:10
Electronic structures of trilayer inplane heterostructure comprisinggraphene and hBN superlattice

13D-3-3 15:50
A novel Ruthenium precursor for
the ALD of metal interconnects in
microelectronics

Y. Naitoh, N. Okada, G. Iizuka, M.
Hirai, S. Kishigam and Y. Ukita, Univ.
of Yamanashi, Japan

Hui Zhang, Mina Maruyama, Yanlin
Gao and Susumu Okada, Univ. of
Tsukuba, Japan

Kenichi Mori 1, Detlef Gaiser 1,
Michael Gock 1, Michael Unkrig-Bau
2,3, Anjana Devi 3, N. Huster 3 and J.
Obenlüneschloß 3, 1 Heraeus
Precious Metals, 2 Fraunhofer IMS
and 3 Ruhr Univ. Bochum, Germany

M. Nakano, K. Asahi, M. Inaba andJ. Suehiro, Kyushu Univ., Japan

Author's Interview (16:10-16:20)-2-

Room A (Cuddy Court) (1F)
+On-line

MNC 2024
Room B (Keishoun) (1F)

Room C (Keishoun) (1F)

13B-3-4 16:40
Analysis of plasma stimulation
propagation in microperfusion
system for promoted cell growth

13C-3-4 16:30
Double-walled carbon nanotube /Graphene nanoribbon network forreservoir computing

Hayata Okino and Shinya Kumagai,
Meijo Univ., Japan

Yuto Koga, Yuki Usami and Hirofumi
Tanaka, Kyushu Inst. of Technol.,Japan

13B-3-5 17:00
Radial Position Dependence ofLight Scattering Spectra of
Microscale Circular Gas-LiquidInterface

Author's Interview (16:50-17:00)

Room D (Keishoun) (1F)

Akihide Hibara 1 and Carlos Baptista
2, 1 Tokyo Inst. of Technol. and 2
Tohoku Univ., Japan

13A-4: Patterning Materials(16:40-18:00)

Author's Interview (17:20-17:30)
Lobby (2F)
Coffee Break
13C-4: Nanocarbon & 2D
Materials II (17:10-18:10)

Chairs: Satoshi Enomoto (Toyo Gosei)
and Seiji Nagahara (ASML Japan)

Chairs: Susumu Okada (Univ. of
Tsukuba) and Keisuke Shinokita(Kyoto Univ.)

13A-4-1 16:40
Exploration of Alternative Resist
Materials for EUV lithography

13C-4-1 17:10
Investigating the photogenerated
carrier dynamics and noisecharacteristics of 0D/2D
heterostructure-based
photodetectors

Julius Joseph Santillan and Toshiro
Itani, AIST, Japan

13A-4-2 17:00
Multiblock Copolymers for DSA
Applications
Kenji Yoshimoto 1 and Takashi
Taniguchi 2, 1 Kanazawa Univ. and 2
Kyoto Univ., Japan

13A-4-3 17:20
Application of Ion Exchange Resin
Method on Trace Metal Analysis ofHigh Purity Chemicals
Noriko Hisano and Hiroshi Sugawara,
Organo , Japan

13A-4-4 17:40
Investigation of Deesterfication
Reaction Paths of Alkyl
Methacrylates with Lewis Acids

13D-4: Nano Surfaces,
Interfaces, and Advanced Nano
Metrology II (16:30-18:10)
Chairs: Osamu Kubo (Gifu Univ.) and
Hiroki Miyazako (Univ. of Tokyo)

13D-4-1 16:30
In-situ imaging of water adsorption
processes and its effect toTiO2(110)-(1×2) surface

Po-Hsuan Hsiao and Chia-Yun Chen,
National Cheng Kung Univ., Taiwan

Li fengxuan 1, Daiki Katsube 2, Diao
Zhuo 1, Hayato Yamashita 1 andMasayuki Abe 1, 1 Osaka Univ. and 2
Japan Fine Ceramics Ctr., Japan

13C-4-2 17:30
Contact Force Dependence
Characteristics of Epitaxial
Graphene/n-SiC Junction

13D-4-2 16:50
Wave Front Phase Imaging(WFPI) for wafer shape metrology
in the semiconductor industry

Asato Nabemoto, Yasuhide Ohno andMasao Nagase, Tokushima Univ.,Japan

Miguel Jimenez-Gomis 1,2, SebastienPauliac 2, Juan Trujillo-Sevilla 1,2, Kiril
Ivanov-Kurtev 1,2 and Guillermo
Castro-Luis 2, 1 Univ. de La Lagunaand 2 Wooptix, Spain

13C-4-3 17:50
Analysis of Nano-Mechanical
Properties of Photoinduced sp3like Bonded Phase Formed on
Graphite

13D-4-3 17:10
Light-harvesting antenna ofparabolic nanoresonator array
coupled with plasmons

Emiri Masui 1, Tatsuki Kanemoto 2,
Jun'ichi Kanasaki 2 and Eiichi Inami 1,
1 Kochi Univ. of Technol. and 2 Osaka
Metropolitan Univ., Japan

Author's Interview (18:10-18:20)

Norikatsu Sasao 1,2, Koji Asakawa 1,
Tomoya Oshikiri 2 and Masaru
Nakagawa 2, 1 Kioxia and 2 Tohoku
Univ., Japan

Tomoya Oshikiri, Toshiaki Hayakawa,
Hiromasa Niinomi and Masaru
Nakagawa, Tohoku Univ., Japan

13D-4-4 17:30
Low-Friction and Wear-ResistantSuperhard Si-Doped
Nanodiamond Composite Coating
via Coaxial Arc Plasma Deposition
for Dry Machining
Mohamed Ragab Diab 1,2, Mohamed
Egiza 2,3, Koki Murasawa 1,4, Hiroshi
Naragino 1 and Tsuyoshi Yoshitake 1,
1 Kyushu Univ., Japan, 2 Kafrelsheikh
Univ., Egypt, 3 Robert Gordon Univ.,
UK and 4 OSG, Japan

Author's Interview (18:00-18:10)

13D-4-5 17:50
Electrophoresis-based DNA size
separation by hydrated ionicliquids
Toshiki Yabui 1, Kyoko Fujita 2, Ken
Sasaki 1, Hisataka Maruyama 1 andTakayuki Hoshino 1, 1 Nagoya Univ.
and 2 Tokyo Univ. of Pharmacy andLife Sci., Japan

Author's Interview (18:10-18:20)-3-

MNC 2024

Thursday, November 14, 2024
Room A (Cuddy Court) (1F)
+On-line
14A-1: Nanoimprint, Hybrid-NIL(9:00-10:30)
Chairs: Toshiki Ito (CANON) and
Kazuma Kurihara (AIST)

14A-1-1 09:00
Lifetime prediction of nanoimprint
molds (Invited)

Room B (Keishoun) (1F)

Kazuhiro Sato, Toshihiro Ifuku, Makoto
Ogusu, Sentaro Aihara, Noriyasu
Hasegawa, Kiyohito Yamamoto,
Mitsuru Hiura, Keita Sakai and Yukio
Takabayashi, Canon, Japan

Room D (Keishoun) (1F)

14B-1: Symp. C: Innovative
Technology to Regulate
Living Body I (9:00-10:50)

14C-1: Nanocarbon & 2D
Materials II (9:00-10:30)

14D-1: Nano-devices I (9:0010:30)

Chairs: Ryo Kitaura (NIMS) andHaruka Omachi (Wakayama Medical
Univ.)

Chairs: Yuuichiro Mitani (Tokyo City
Univ.) and Takahisa Tanaka (KeioUniv.)

14B-1-1 09:00
TBA (Invited)

14C-1-1 09:00
TBA (Invited)

Hirohide Saito, Kyoto Univ., Japan

Goki Eda, National Univ. of Singapore,
Singapore

14D-1-1 09:00
Silicon Integration Technology for
Quantum Computing (Invited)

Jun Taniguchi, Tokyo Univ. of Science,Japan

14A-1-2 09:30
Nanoimprint Lithography
Performance Advances for New
Application Spaces

Room C (Keishoun) (1F)

14B-1-2 09:30
Application of medical plasma
technology in skeletal
regeneration (Invited)

14C-1-2 09:30
Analysis of Interface Properties in
Few-Layer MoS2 Edge Capacitors
Using the Conductance Method

Takahiro Mori, AIST, Japan

14D-1-2 09:30
Effect of annealing process on theproperty of HfO2/ZrO2/HfO2
superlattice gate-stack in MOS
structure: Towards higher-k gatestack

Hiromitsu Toyoda, Osaka
Metropolitan Univ., Japan

Daiki Tsuruoka 1, Zaoyang Lin 2,
Takahiko Endo 3, Yasumitsu Miyata 3,
Nobuyuki Aoki 1 and Mengnan Ke 1, 1
Chiba Univ., Japan, 2 IMEC, Belgium
and 3 Tokyo Metropolitan Univ., Japan

14B-1-3 10:00
Nanogel Platforms in Cancer
immunotherapy: Targeting Solid
Tumors with Precision

14C-1-3 09:50
Injectable Sensor for Minimallyinvasive Cerebral Monitoring
based on 2D materials

Yunching Chen, National Tsing Hua
Univ., Taiwan

Kyungtai Park, Juyeong Hong andJong-Hyun Ahn, Yonsei Univ., Korea

14A-1-4 10:10
Stacked Metasurfaces Utilizing
Out-of-Plane Quadrupole
Resonance for
Photoluminescence Control

14B-1-4 10:20
Biohybrid system powered bycultured tissue formed by
microfabrication (Invited)

14C-1-4 10:10
Active-matrix Micro-LED Display
Using Transferred Silicon
Nanomembrane Transistors

Yuya Morimoto, Waseda Univ.,
Japan

Seungsoo Kim, Jeehoon Ryu andJong-Hyun Ahn, Yonsei Univ., Korea

Hossain Md Nayem 1, Masahiro Hori
1, Katsuhiko Nishiguchi 2 and Yukinori
Ono 1, 1 Shizuoka Univ. and 2 NTT,
Japan

Author's Interview (10:30-10:40)
14A-2: Symp. A: The Path to
Sustainable Lithography III(10:50-11:50)

Author's Interview (10:50-11:00)
14B-1: Symp. C: Innovative
Technology to Regulate
Living Body II (11:00-12:50)

Author's Interview (10:30-10:40)
14C-2: Nanocarbon & 2D
Materials IV (11:00-12:00)

Author's Interview (10:30-10:40)
14D-2: Nano-devices II (10:5011:50)

Chairs: Shinichiro Mouri (Ritsumeikan
Univ.) and Jiang Pu (Tokyo Inst. ofTechnol.)

Chairs: Sanguan Anantathanasarn(Furukawa FITEL) and Shigeo Asahi(Kobe Univ.)

14B-2-1 11:10
Seeing and manipulating themind of a worm (Invited)

14C-2-1 11:00
High performance MoS2 thin filmtransistor with transferred SiO2
dielectric materials

14D-2-1 10:50
Demonstration of vertical Gate-allaround transistors using vertical
InGaAs nanowires on SOI(111)14A-1-3 09:50
Tolerable NIL pattering by onepass breakthrough etching of NIL
residual layer and spin-on-glass(SOG)

Kenta Suzuki 1, Tetsuya Ueda 1,
Hiroshi Hiroshima 1, Masanaga
Fukasawa 1, Yoshihiro Hayashi 1,
Masaki Ishida 2, Tomomi Funayoshi 2,
Hiromi Hiura 2, Noriyasu Hasegawa 2and Kiyohito Yamamoto 2, 1 AIST and
2 Canon, Japan

TienYang Lo, Shunsuke Murai, Taiki
Takashima and Katsuhisa Tanaka,
Kyoto Univ., Japan

Chairs: Keiichiro Hitomi (Hitachi) and
Junichi Yanagisawa（Univ. of Shiga
Pref.)

14A-2-1 10:50
Device and Material
Characterization by Laser-Based
Photoemission Electron
Microscopy (Invited)

Kotaro, Kimura, Nagoya City Univ.,
Japan

Kenji Suzuki 1, Fumikazu Murakami 2,
Inkeun Baek 3, Mitsunori Numata 1,
Ingi Kim 3, Sungyoon Ryu 3, Shinji
Ueyama 1, Myungjun Lee 3, Yusin
Yang 3 and Masayoshi Tonouchi 2
1 Samsung Japan, 2 Osaka Univ.,
Japan and 3 Samsung Electronics,
Korea

14D-1-3 09:50
AC-signal sensing beyond cutoff
frequency using a DRAM:
conversion of high-frequency AC
to DC and its energy dissipation.
C. Salhani, K. Chida, T. Hayashi andK. Nishiguchi, NTT, Japan

14D-1-4 10:10
Electron Thermometry using
Subthreshold Swing of Si Nano
Transistors

Jaedo Lee, Beomjin Kim and JongHyun Ahn, Yonsei Univ., Korea

Keita Taniyama, Yuki Takeda, Yuki
Azuma, Ziye Zheng, Junichi Motohisa
and Katsuhiro Tomioka, Hokkaido
Univ., Japan

14B-2-2 11:40
Enzymatic power generation on
an electric face mask and its
application to bacteria
sterilization

14C-2-2 11:20
Energetics and Electronic
structures of WSSe nanoscrolls

14D-2-2 11:10
A Study on Distinctive Electrical
Properties of Wire-like Sumanene

Yanlin Gao and Susumu Okada, Univ.
of Tsukuba, Japan

Ryosuke Katsumata, Ryoichi Kawai,
Reika Fujie, Ryousuke Ishikawa,
Hiroshi Nohira, Yoshiharu Kirihara andYuichiro Mitani, Tokyo City Univ.,
Japan

14B-2-3 12:00
Development of optical
microneedle sensors embeddedwith boronic acid-based
fluorescent hydrogel at the tips

14C-2-3 11:40
Transport Characteristics of CVDsynthesized Transition Metal
Dichalcogenide Nanotubes withdiameter of 10 nm

14D-2-3 11:30
Near Infrared Emission with the
Wavelength Longer than 1.4 µm
from GaAs/GaInNAsSb CoreMultishell Nanowires

Toshiyuki Taniuchi, The Univ. of Tokyo

14A-2-2 11:20
Precise non-contact measurementof p-n junction depth using
terahertz emission spectroscopy(Invited)

Takefumi Kamioka, Shinji Migita,
Takashi Matsukawa, Naoya Okada
and Hiroyuki Ota, AIST, Japan

D.M.B. Gatus 1, G. Méhes 1 and T.
Miyake 1,2, 1 Waseda Univ. and 2
JST-PRESTO, Japan

Masahiro Fukuhara 1, Yukihiro
Kanda 1,2, Hiroaki Takehara 1,2,
Kevin Barthelmes 3 Akira
Matsumoto 1,3 and Takanori Ichiki
1,2, 1 The Univ. of Tokyo, 2 iCONM
and 3 Tokyo Medical and Dental
Univ., Japan

14B-2-4 12:20
Cell engineering technologies toregulate neuronal networks(Invited)

Masaharu Kikuchi 1, Akane Ihara 1,
Abdul Ahad 1,2, Md. Ashiqur Rahman
1,2, Shigeki Saito 1 and Kazuhiro
Yanagi 1, 1 Tokyo Metropolitan Univ.,
Japan and 2 Comilla Univ.,
Bangladesh

Author's Interview (12:00-12:10)

Hideaki Yamamoto, Ayumi HiranoIwata, and Shigeo Sato, Tohoku
Univ., Japan

Author's Interview (12:50-13:00)-4-

Takuto Goto, Kaito Nakama, Hidetoshi
Hashimoto, Keisuke Minehisa andFumitaro Ishikawa, Hokkaido Univ.,
Japan

Author's Interview (11:50-12:00)

14A-4: Electron and Ion BeamTechnologies (13:30-14:30)

14B-3: Symp. B: Process andDevice Technologies for
Quantum Computing II (13:1516:05)

Chairs: Keiichiro Hitomi (Hitachi) and
Junichi Yanagisawa (Univ. of Shiga
Pref.)#

Chairs: Tsuyoshi Hatano (Nihon
Univ.), Kouichi Takase (Nihon Univ.)and Wataru Mizubayashi (AIST)

14A-3-1 13:30
Gate patterning by electron beamlithography by a tone reversal
process (EB-R) highly compatible
to SADP process

14B-3-1 13:20
TBA (Invited)

14A-3-2 13:50
Failure Analysis of Shorting Issues
in Bipolar Junction Transistors
Circuit using Electron Beam
Induced Current Technique

14B-3-2 13:50
Development ofSuperconducting Quantum
Computer at QIQB, Osaka Univ.
(Invited)

Yoshiaki Shimada, SoftBank R&D,
Japan

Paul Jacob 1, David MacMahon 2 andSantosh Kurinec 1, 1 Rochester Inst.
of Technol. and 2 Micron Technology,USA

14A-3-3 14:10
Fabrication and characterizationof free-standing SiO2 films
including Au nano-particles

Kazuhisa Ogawa, Osaka Univ.,
Japan

14B-3-3 14:20
TBA (Invited)
Atsushi Noguchi, The Univ. of Tokyo,
Japan

Maho Kubota, Masayoshi Ichimiya,
Takahiko Ban and Junichi Yanagisawa,
Univ. of Shiga Pref, Japan

Author's Interview (14:30-14:40)

Chairs: Akito Masuhara (Yamagata
Univ.) and Ryohei Yamakado(Yamagata Univ.)

Chairs: Kuniharu Takei (Hokkaido
Univ.) and Munetoshi Seki (Univ. ofTokyo)

14C-3-1 13:30
Control of Ion Transport inOrganized Polymer Thin Films(Invited)

14D-3-1 14:10
Microdevice for Electrocatalytic
Reduction of Carbon Dioxide Gas

14C-3-2 14:00
Controlling the Photochromic
Properties of Hydrophobic Cudoped ZnS Nanocrystals
Mayu Kimura 1, Daisuke Yoshioka 1,
Yoshinori Okayasu 1, Yuki Nagai 1 andYoichi Kobayashi 1,2, 1 Ritsumeikan
Univ. and 2 JST-PRESTO, Japan

Yuhei Sekiguchi, Yokohama National
Univ., Japan

14A-4-1 15:00
Characterization of latent image
via critical-dimension resonant soft
X-ray scattering (Invited)
Cheng Wang, Lawrence Berkeley
National Lab., USA

14B-3-5 15:30
Quantum coherence of spin
qubits in silicon nanodevices(Invited)
Jun Yoneda, Tokyo Inst. of Technol.,JapanT

14D-3-2 14:30
Magnetic Domain Analyses in
Miniaturized Square CoFe
Nanolayer Electrode Patterns on
GaAs (001) Substrates
Rui Ochiai 1, Yu Fujiwara 1, Li Zi 1,
Masashi Akabori 2 and Shinjiro Hara 1,
1 Hokkaido Univ. and 2 JAIST, Japan

14D-3-3 14:50
Hardware-Oriented Simulation ofReservoir Computing with using
Physical Atomic Switching
Network Device

14C-3-4 14:40
Observation of Superfluorescencein a Quasi-two-dimensional
Perovskite Crystal by
Femtosecond Transient
Absorption Microscopy

14D-3-4 15:10
Highly Sensitive Electric Field
Sensing by Graphene on
Electrically Stressed SiO2

14C-3-5 15:00
Photoluminescence quantum yieldof ASnX3-type perovskite
nanocrystals by surface
modification with alkali metals

14D-3-5 15:30
Mechanical motion sensing using
spintronics devices (Invited)

Tetsuro Katayama 1,2, Tatsuya Fujii 1,
Yuichi Ikura 1 and Akihiro Furube 1, 1
Tokushima Univ. and 2 JST-FOREST,
Japan

Chairs: Toru Fujimori (FUJIFILM) andTomoki Nagai (JSR)

Zheng-Yan Lei, Nguyen Van Toan,
Masaya Toda and Takahito Ono,
Tohoku Univ., Japan

14C-3-3 14:20
Elucidating a Relationshipbetween Photoluminescence
Behavior and Size of Cesium
Lead Iodide Perovskite
Nanocrystals

Nicholas Huang, Tetsuo Yamaguchi
and Sadahiro Masuo, Kwansei Gakuin
Univ., Japan

14B-3-4 15:00
Optically controlled degenerate
spin qubits in diamond (Invited)

14A-4: Symp. A: The Path to
Sustainable Lithography IV(15:00-15:30)

14D-3: Nano-devices III (14:1016:00)

Yuya Ishizaki, Rikkyo Univ., Japan

Sung-Won Youn, Tetsuya Ueda,
Motoharu Shichiri, Junichi Furukawa,Kazuyuki Matsumaro and Hiroshi
Hiroshima, AIST, Japan

MNC 2024

14C-3: Organic Nanomaterials(13:30-15:40)

Ahmet Karacali, Takumi Kotooka, Yuki
Usami and Hirofumi Tanaka, Kyushu
Inst. of Technol., Japan

Soko Tsutsumi and Takahisa Tanaka,
Keio Univ., Japan

Daichi Chiba 1,2, 1 Tohoku Univ. and 2
Osaka Univ., Japan

Yusaku Morikawa 1, Soki Sato 1,
Takayuki Chiba 1, Satoshi Asakura 2,
and Akito Masuhara 1, 1 Yamagata
Univ. and 2 Ise Chem., Japan

14C-3-6 15:20
Synthesis of highly emissive
fluorene-based liquid crystalline
organic semiconductor andformation of optically periodic
structures by introducing a chiralreagent.

Author's Interview (16:00-16:10)

Masanao Era 1, Yuuki Okazaki 1,
Yasuhi Okumura 2 and Hirotsugu
Kikuchi 2, 1 Saga Univ. and 2 Kyushu
Univ., Japan

Author's Interview (15:40-15:50)
Lobby (2F)
Coffee Break
14P-1: Poster Session I (16:10-18:10, Nov. 14), Room P (Hanabusa) (B1F)
Advanced Lithography and Patterning, Chair: Tetsuo Harada (Univ. of Hyogo)

14P-1-1
Evaluation of EUV mask absorber
durability to high-power EUV
irradiation in hydrogen
atmosphere14P-1-2
Investigation of Solvent Effects
on the Distribution of Resist
Compositions Using Resonant
Soft X-ray Scattering

14P-1-3
Evaluation of Basic Behavior of
Acrylic Polymer Changing
Composition by KrF, ArF and EUV
Exposure

Hayato Ishida, Shinji Yamakawa and
Tetsuo Harada, Univ. of Hyogo, Japan

Kouji Kuramoto 1, Yuri Ebuchi 2,
Shinji Yamakawa 2, Tetsuo Harada
2, and Takeo Watanabe 2, 1 KH
Neochem and 2 Univ. of Hyogo,
JpapanYosuke Ohta 1, Atsushi Sekiguchi 1,
Tadayuki Fujiwara 1, Shinji Yamakawa
2, Tetsuo Harada 2, Takeo Watanabe
2, and Hiroki Yamamoto 3, 1 Litho
Tech Japan, 2 Univ. of Hyogo and 3
National Inst. for Quantum Sci. andTechnol, Japan-5-

14P-1-4
Submicron-processing by X-ray
lithography for medical meshnebulizer
Taki Watanabe, Kazuhiro Kanda and
Sho Amano, Univ. of Hyogo, JapanMNC 2024
14P-1: Poster Session I (16:10-18:10, Nov. 14), Room P (Hanabusa) (B1F)
14P-1-5
Demonstration of Non-Distortion
Stereophonic Lithography Using
the Paraboloid-Mirror Optics and a
Distortion-Compensated Flat
ReticleToshiyuki Horiuchi, Jun-ya Iwasaki andHiroshi Kobayashi, Tokyo Denki Univ.,
Japan

Electron and Ion Beam Technologies, Chairs; Keiichiro Hitomi (Hitachi) and Junichi Yanagisawa (Univ. of Shiga Pref.)14P-1-6
14P-1-7
Submicrometer-sized Patterning
Q-One, a High-Resolutionof Photoresist by Electron Beam Versatile Focused Ion
Projection Lithography Using
Implantation Platform:
Tabletop Scanning Electron
Nanoscale Engineering &Microscope System and Si Stencil Quantum applications
G. Aresta, K. Stockbridge, N. Sano,
Mask
Mina Sato, Mie Tohnishi, Miho
Fujimoto and Akihiro Matsutani, Tokyo
Inst. of Technol., Japan

K. McHardy and P. Blenkinsopp,
Ionoptika, UK

Patterning Materials, Chairs: Kazunari Okamoto (Osaka Univ.)
14P-1-8
14P-1-9
Molecular Dynamics Study of
A new type of silicon-based
Development Process for Nonepoxy photoresist
Chemically Amplified Resists
Shiyang Gao, Xin Zhuang, Ningyuan
Ryuki Tanaka, Kaito Yamada, Hiroto
Wakamatsu and Masaaki Yasuda,
Osaka Metropolitan Univ., Japan

Yang and Xing Cheng, Southern
Univ., China

14P-1-10
Study on Bulk Polymerization
Characteristics of Iodinecontaining Polymers for Improved
X-ray Contrast EffectivenessTakao Okabe 1, and Kei Somaya 2, 1
The Univ. of Tokyo and 2 Daido Univ.,
Japan

14P-1-11
Self-assembled micro-patterns ofquantum dots
Dacheng Xia, Jianping Li, Laigui Hu
and Ran Liu, Fudan Univ., China

Nanocarbons & 2D Materials, Chairs: Yasumitsu Miyata (Tokyo Metropolitan Univ.) and Shohei Chiashi (Univ. of Tokyo)
14P-1-12
14P-1-13
14P-1-14
14P-1-15
Van der Waals heteroepitaxial
Improvements in the Synthesis ofSingle-molecule junction of C60
Optically generated spin current ingrowth of graphene on h-BN
Uniform Germanium Monosulfide
2D metallic 2H-MX2
pyrrolidine tris acid in static
surfaceThin Films Using an Aluminum
nanogap electrodes using
Souren Adhikary and Katsunori
Y. Miyashita 1, H. Watanabe 1, Y.
Catalyst
migrations of metal atoms
Wakabayashi, Kwansei Gakuin Univ.,
Qinqiang Zhang 1, Ryo Matsumura 1
and Naoki Fukata 1,2, 1NIMS and 2
Univ. of Tsukuba, Japan

Masato Takei 1, Hiroshi Suga 1,
Satoshi Kaneko 2, Yasuhisa Naitoh
3 and Kazuhito Tsukagoshi 4, 1
Chiba Inst. of Technol., 2, Inst. of Sci
Tokyo, 3 AIST and 4 NIMS, Japan

14P-1-16
Synthesis of reduced graphene
oxide films with turbostratic
stacking via high-temperaturethermal treatment in ethanol vapor

14P-1-17
Atomic Level Characterization of
Photoinduced Graphite to
Diaphite Phase Transition by
Femtosecond Laser Excitation

T. Yamashita 1, T. Kanda 1, N.
Shimazaki 1, K. Yanagisawa 1, T. Ukai
1, S. Kurosu 1, T. Hanajiri 1, T.
Maekawa 1, Y. Nishina 2, T.
Yamaguchi 3, K. Ishibashi 3 and R.
Negishi 1, 1 Toyo Univ., 2 Okayama
Univ. and 3 RIKEN, Japan

14P-1-20
Nano-ripples of epitaxial grapheneon SiC measured by tapping
mode AFM

Eiichi Inami 1, Keita Nishioka 2, andJun'ichi Kanasaki 3, 1 Kochi Univ. ofTechnol., 2 Kanazawa Inst. ofTechnol. and 3 Osaka Metropolitan
Univ., Japan

Terada 1, A. Sasanuma 1, R.
Takatsuka 1, K. Yanagisawa 1, T. Ukai
1, S. Kurosu 1, K. Watanabe 2, T.
Taniguchi 2, T. Hanajiri 1, T. Maekawa
1, R. Negishi 1, 1 Toyo Univ. and 2
NIMS, Japan

14P-1-18
Mapping Electrostatic Potential on
monolayer MnI2 islands
Daniel Rothhardt 1,2,3, Christopher
Penschke 3, Regina Hoffmann-Vogel
3 , Hans Josef Hug 1,2 and Amina
Kimouche 3, 1 Swiss Federal Labs. forMaterials Science and Technol., 2
Univ. of Basel, Switzerland, 3 Univ. of
Potsdam, GermanyJapan

14P-1-19
Water absorption performance
dependence of evaporative heatcooled single wall carbon
nanotubes thermoelectric
generators
Y. Nakazawa, Y. Okano and M.
Takashiri, Tokai Univ., Japan

14P-1-21
3-Dimensionally Customized
Graphene Conforming theSurface of Optically Nonlinear
Devices

14P-1-22
Graphene/WO3 based NO2 gas
sensor for improving gas detection
performance

14P-1-23
Gate-induced structuralmodulation of graphene andbilayer graphene

Jeong Dong Hyuk 1,2, Suji Choe 1,2,
Yijun Yang 1, Dong Geon Jung 1 andDaewoong Jung 1, 1 KITECH and 2
Kyungpook National Univ., Korea

Nadia Sultana, Yanlin Gao, Mina
Maruyama and Susumu Okada, Univ.
of Tsukuba, Japan

14P-1-25
Thermal Conductivity of
Ti3C2Tx MXene Thin Film
Measured by Frequencydomain Thermoreflectance

14P-1-26
Mechanical properties of twodimensional C36 fullerene network

14P-1-27
Ion specificity of wide-pH-available
epitaxial graphene FETs on a SiC
substrate

Rei Kusunose 1, Takao Marukame 1,
Ryoichi Kawai 2, Yuichiro Mitani 2,
Kota Ando 1 and Tetsuya Asai 1, 1
Hokkaido Univ. and 2 Tokyo City Univ.,
Japan

Yuki Akura 1, Yuki Matsunaga 2,
Hiroya Morotomi 1, Masaki
Shimofuri 1, Amit Banerjee 1,
Toshiyuki Tsuchiya 1 and Jun
Hirotani 1, 1 Kyoto Univ. and 2
Nagoya Univ., Japan

14P-1-28
Visible-Light Activated NO2 andNH3 Responses of
MoS2/Graphene Hybrid Structure

14P-1-29
Single-step graphene devices
fabrication by Joule heating of
Ni/C bilayer

14P-1-30
Evaluation of the number ofgraphene layers on h-BN flake

Ryota Inao 1, Hiroshi Tabata 1, Osamu
Kubo 1,2 and Mitsuhiro Katayama 1, 1
Osaka Univ. and 2 Gifu Univ., Japan

Koki Nakane, Agus Subagyo,
Makoto Owada, Katsuyuki Yagi and
Kazuhisa Sueoka, Hokkaido Univ.,Japan

Kouta Hamamoto, Rensei Toyoda,
Masao Nagase and Yasuhide Ohno,
Tokushima Univ., Japan

14P-1-24
Graphene/Sumanene/Graphene
memristive devices and theirapplication to binary neuralnetwork

Oleksiy Kovalchuk 1, Bowon Ryu 1,
Myungjin Kang 1,2, Inhun Cho 1,
Hyowon Moon 1, and Yong-Won
Song 1, 1 KIST and 2 Korea Univ.,
Korea

Chia-Wei Huang 1, Tang-Yu Lai 2,
Kuo-Chin Hsu 1 and Te-Hua Fang 1, 1
National Kaohsiung Univ. of Scienceand Technol. and 2 Air Force
Academy, Taiwan

Y. Chigira 1, Y. Miyashita 1, H.
Watanabe 1, T. Ukai 1, S. Kurosu 1, K.
Nishibara 2, T. Arie 2, K. Watanabe 3,
T. Taniguchi 3, T. Hanajiri 1, T.
Maekawa 1 and R. Negishi 1, 1 Toyo
Univ. and 2 Osaka Metropolitan Univ.
and 3 NIMS, Japan-6-

Chikato Furukawa, Yasuhide Ohno
and Masao Nagase, Tokushima Univ.,
Japan

14P-1-31
Chemical Etching of Si with
Graphene Oxide and its Reduced
Form in an HF-HNO3 Solution
Toru Utsunomiya, Yuki Miura andTakashi Ichii, Kyoto Univ., JapanMNC 2024
14P-1: Poster Session I (16:10-18:10, Nov. 14), Room P (Hanabusa) (B1F)
Nanodevices, Chair; Shigeo Asahi (Kobe Univ.)
14P-1-32
14P-1-33
Carrier recombination
Effective Au Aggregation Processprocesses in newly proposed
for Selective-Area Vapor-LiquidInGaAs/GaAsP compressively
Solid Growth of Ge Nanowires on
strained superlattice
Si (111)
investigated by
Shuma Yuzawa 1, Shuya Yamaguchi
photoluminescence
1, Shohei Okuda 1, Wipakorn
measurements
Jevasuwan 2, Naoki Fukata 2 andShinjiro Hara 1, 1 Hokkaido Univ. and2 NIMS, Japan

Nana Taketa 1, Meita Asami 2,
Masakazu Sugiyama 2, Tomoki
Harada 1, Tetsuo Ikari 1 andAtsuhiko Fukuyama 1, 1 Univ. ofMiyazaki and 2 The Univ. of Tokyo,
Japan

14P-1-36
Information processing in
Coulomb-blockade-based goldnanoparticle reservoirs connectedin parallel

14P-1-37
Improved Resistive Switching
Characteristics Observed in
Amorphous Boron Nitride-based
RRAM Device via Oxygen
Doping

Yuki Hayashi, Hiroshi Shimada andYoshinao Mizugaki, The Univ. ofElectro-Communications, Japan

14P-1-40
Influence of Sumanene Dispersed
Density on Resistive Switching
Properties in
Graphene/Sumanene/Graphene
memoryReika Fujie, Ryoichi Kawai, Ryosuke
Katsumata, Ryousuke Ishikawa,
Hiroshi Nohira and Yuichiro Mitani,
Tokyo City Univ., Japan

14P-1-44
Optical characterization of energy
transfer process in Tm,Ybcodoped ZnO nanowires
M. Ida, J. Tatebayashi, S. Ichikawa, M.
Tane and Y. Fujiwara, Osaka Univ.,
Japan

Ibtisam Ahmad, Taegi Kim and HeeDong Kim, Sejong Univ., Korea

14P-1-41
Improved linearity and bit
precision in analog memristor
using feedforward pulse scheme
Zhuo Diao, Ryohei Yamamoto, Zijie
Meng, Tetsuya Tohei and Akira
Sakai, Osaka Univ., Japan

14P-1-45
Recent progress on pseudvertical Schottky barrier diodes
fabricated on heteroepitaxial
diamond
Ali Abdelrahman 1,2, Shinya
Ohmagari 2 and Tsuyoshi Yoshitake
1, 1 Kyushu Univ. and 2 AIST, Japan

14P-1-34
Fabrication of a near-infrared spin
photodiode using dilute nitride
GaNAs
Tatsuya Yano, Daiki Mineyama, Kohei
Etou, Kaito Nakama, Hidetoshi
Hashimoto, Keisuke Minehisa, Mineto
Ogawa, Junichi Takayama, Fumitaro
Ishikawa, Tetsuya Uemura, Akihiro
Murayama and Satoshi Hiura,
Hokkaido Univ., Japan

14P-1-38
Low-coherence opticalinterference using a low-groupvelocity and low-dispersion
photonic crystal waveguides andits application for an ultra-small
OCT system
Nanaho Oda and Nobuhiko Ozaki,
Wakayama Univ., Japan

14P-1-42
Variational Autoencoder Approachto Designing Nanowire Impurity
Distributions with TargetedElectron Transmittance
Characteristics
Satoru Sugiyama 1, Masakazu
Muraguchi 1, Yoshitaka Itoh 1 and Tota
Suko 2, 1 Hokkaido Univ. of Sci. and 2
Waseda Univ., Japan

14P-1-35
Circularly polarized
electroluminescence properties ofquantum dot spin-polarized lightemitting diode using GaOx
tunneling barrier
Seunghyeok Sim, Kohei Etou, Junichi
Takayama, Agus Subagyo, Kazuhisa
Sueoka, Akihiro Murayama, andSatoshi Hiura IST, Hokkaido Univ.,
Japan

14P-1-39
Improved Optical Characteristics
GaAs-Based Dilute Nitride
Nanowires by Varying Annealing
Temperatures
Hidetoshi Hashimoto, Ryoga Iida,
Takuto Goto, Keisuke Minehisa, Kaito
Nakama and Fumitaro Ishikawa,
Hokkaido Univ., Japan

14P-1-43
Tunable Si NEMS resonators forfrequency-domain physicalreservoir computing
Shuto Kawaguchi, Yu Wei, Amit
Banerjee, Jun Hirotani and Toshiyuki
Tsuchiya, Kyoto Univ., Japan

14P-1-46
A single electron transistor usedas phonon detector insuperconducting quantum devices
J. Tanarom1 and P. Gomasang 2, 1
National Inst. of Metrology and 2
Silpakorn Univ., Thailand

Organic Nanomaterials, Charis; Akito Masuhara (Yamagata Univ.) and Ryohei Yamakado (Yamagata Univ.)

14P-1-47
Size Dependence in Energy
Transfer from a Perovskite
Nanocrystal to Pentacene

14P-1-48
Nonlinear Electronic
Characteristics of Conjugated
Polymer Monolayer Network

Seiju Koyama, Tetsuo Yamaguchi and
Sadahiro Masuo, Kwansei Gakuin
Univ., Japan

Naoki Hara, Yuya Ishizaki andShusaku Nagano, Rikkyo Univ.,
Japan

14P-1-51
Nonlinear Electrical
Characteristics of Self-Doped
PEDOT Thin Films and Effect ofPolymer Orientation

14P-1-52
Orientational Control and
Thermal Diffusivity of SideChain Liquid Crystalline
Polymers with Smectic Phase

Motoaki Onishi 1, Yuya Ishizaki 1,
Hirokazu Yano 2, Hidenori Okuzaki 3
and Shusaku Nagano1, 1 Rikkyo
Univ., 2 Tosoh and 3 Univ. of
Yamanashi, Japan

Kanna Kobayashi 1,Yuya Ishizaki 1,
Takahiro Seki 2 and Shusaku
Nagano 1, 1 Rikkyo Univ. and 2
Nagoya Univ., Japan

14P-1-55
Tunable Phosphorescence of
Copper-Pyrazolate Macrocyclic
Clusters

14P-1-56
Effects of molecular weight andmain chain structures onphotoinduced phase separationin compatible binary liquid
crystalline polymer blends

Kyoko Koshiba, Yuichiro Watanabe
and Kazunori Sugiyasu, Kyoto Univ.,Japan

Yuno Yokota 1, Yuya Ishizaki 1,
Mitsuo Hara 2, Seki Takahiro 3 andShusaku Nagano 1, 1 Rikkyo Univ.,
2 Kagawa Univ. and 3 Nagoya Univ.,
Japan

14P-1-49
Ambient Conditions Synthesis of
Red Light Emitting Perovskite
Quantum Dots for Quantum Dot
Displays
Kenshin Yoshida 1, Taisei Kimura 1,
Naoaki Oshita 1, Satoshi Asakura 2,
Takayuki Chiba 1 and Akito Masuhara
1, 1 Yamagata Univ. and 2 Ise Chem.,Japan

14P-1-50
Stimuli-responsive
phosphorescent materials basedon indazole derivatives
T. Moriyama, S. Okada and R.
Yamakado, Yamagata Univ., Japan

14P-1-53
Ligand Structure Dependence on
Optical Properties of WaterSoluble Europium(III) β–
Diketonate Complex
Nanoparticles

14P-1-54
A Study of Reservoir Computing
Performance of Orientation
depending on Poly(3hexylthiophene-2,5-diyl) Thin
Films

Shunsuke Kobashi 1, Yoshinori
Okayasu 1, Yuki Nagai 1 and Yoichi
Kobayashi 1,2, 1 Ritsumeikan Univ.
and 2 JST-PRESTO, Japan

Yusuke Nakaoka, Moulika Desu, Yuki
Usami and Hirofumi Tanaka, Kyushu
Inst. Technol., Japan

14P-1-57
Enhancing output of a biofuel cellusing cellulose fuel from leaves
and fruits of plants by using the
optimal saccharification enzymes

14P-1-58
Orientation Control of Liquid
Crystalline Block Copolymer Thin
Films by Solvent Vapor-Assisted
Photoalignment and Formation ofthrough-plane Nanopores

Takekusu Muraoka, Gou Watanabe
and Satomitsu Imai, Nihon Univ.,
Japan

-7-

Kotaro Morimoto, Yuya Ishizaki andShusaku Nagano, Rikkyo Univ., JapanMNC 2024
14P-1: Poster Session I (16:10-18:10, Nov. 14), Room P (Hanabusa) (B1F)
Nano Surfaces, Interfaces, and Advanced Nano Metrology, Chair: Takayuki Hoshino (Nagoya Univ.)
14P-1-59
14P-1-60
14P-1-61
Photovoltaic properties ofDemonstration of the operation
Mechanisms of fast transition
methylated germanane thin-filmof interface dipole modulation
using a conformal MoOx cap ontransistors
devices fabricated by ALD
Mo-doped VO2 thermochromics
method on UV-Ozone treatedOsamu Kubo 1,2, Kouhei Hachiya 2,
Pi-Chun Juan 1, Jun-Yu Su 1, Wenthermally oxidized SiO2
Yuuki Hiraoka 2 and Hiroshi Tabata 2,
Hao Cho 2, Chi-Chung Kei 2, Tsung-

14P-1-62
Photoconductive Properties of 2Dimensional InAs/InAsSb
Ultrahigh-Density Quantum Dot
Array

1 Gifu Univ. and 2 Osaka Univ., Japan

Sorato Mikawa 1, Yoshiharu Kirihara
1, Ryoichi Kawai 1, Kota Miura 1,
Tomoki Yoshida 1, Akira Yasui 2,
Ryousuke Ishikawa 1, Yuichiro
Mitani 1 and Hiroshi Nohira 1, 1
Tokyo City Univ. and 2 JASRI, JapanTe Chou 2 and Chang-Che Hsieh 2, 1
Ming Chi Univ. of Technol. and 2
National Applied Res. Labs., Taiwan

Mitsuya Arao, Sim Jui Oon, Naoya
Miyashita and Koichi Yamaguchi, The
Univ. of Electro-Communications,Japan

14P-1-63
Anchor point-based image
registration method for
microscope topographic map
structure analysis

14P-1-64
Effect of UV-Ozone treatment on
Al2O3/GeO2 films using ALD
method

14P-1-65
Interface shape change during
methane generation from Ni
supported CaCO3 single crystal
substrate

14P-1-66
Resistivity measurement for nonmagnetic material using highorder resonance mode of MFM
cantilever oscillation

Yosuke Okamoto, Tomoaki Yoshida
and Ryota Gemma, Tokai Univ., Japan

Kazuma Okamoto 1, Takumi Imura 1,
Satoshi Abo 1, Fujio Wakaya 1
Katsuhisa Murakami 2 and Masayoshi
Nagao 2, 1 Osaka Univ. and 2 AIST,Japan

14P-1-68
Effect of Ni and Ca Dispersion
on Methane Generation from
CaCO3 Nano Surface

14P-1-69
Electronic and Magnetic
Properties of M-doped CoSb3 (M= Sc, Ti, V, and Mn) Thin Films

14P-1-70
Modeling of GaN MOCVD towardmachine learning

Tomoaki Yoshida, Yosuke Okamoto
and Ryota Gemma, Tokai Univ.,Japan

Kazuaki Kobayashi, Masato Shimono
and Takao Mori, NIMS, Japan

Zhuo Diao, Zijie Meng, Fengxuan Li,
Linfeng Hou, Tetsuya Tohei, Masayuki
Abe and Akira Sakai, Osaka Univ.,
Japan

14P-1-67
Analysis of transmittanceenhancement by annealing of
MgO thin films for anti-reflective
coatingSeongpil Hwang 1,2, Junyeop Lee 1,
Yuntae Ha 1,2, Uksu Han 1,2, andDaewoong Jung 1, 1 KITECH and 2
Kyungpook National Univ., Korea

14P-1-71
Photocatalytic hydrogengeneration on La-doped SrTiO3
Tatsuya Itabashi, Ryota Gemma andMasayuki Takashiri, Tokai Univ., Japan

Tomoki Yoshida, Yoshiharu Kirihara,
Sorato Mikawa, Ryousuke Ishikawa
and Hiroshi Nohira, Tokyo City Univ.,
Japan

Hisashi Yamada 1,2, Tsutomu Sonoda
1, Tokio Takahashi 1, Takahiro Gotow
1, Toshihide Ide 1, Reiko Azumi 1,
Mitsuaki Shimizu 1, Shohta Seki 2,
Kentaro Kutsukake 2 and Tohru
Ujihara 1,2, 1 AIST and 2 Nagoya
Univ., Japan

14P-1-72
Nitriding of Metallic Thin Films
under N2+H2 Mixed Gas
Atmosphere
Yudai Takeshita, Tsuyoshi Saito andRyota Gemma, Tokai Univ., Japan

4: BioMEMS, Lab on a Chip, and Nanobiotechnology, Chair: Kazuaki Furukawa (Meisei Univ.)
14P-1-73
14P-1-74
14P-1-75
Metal Ion-Dependent Assembly
Modification of PDMS Surface
On chip synthesis of aspirin by
Behaviors and Anticancer
by Crosslinking with CYTOP tosequential and continuous
Applications of Organometallic
Enhance the Vacuum Storage in chemical operationusing
DNA Nanoparticles
Self-driven Microfluidics
microwave heating and surface
acoustic wave
Jeesu Moon and Jae-Seung Lee,
Hyunjun Kim, June Soo Kim,

14P-1-76
Piezoelectric Poly-L-lactic acid
Nanofibers by Electrospinning for
Wearable Pressure Sensors
Qi Kang 1, Hiroaki Takehara 1,2 andTakanori Ichiki 1,2, 1 The Univ. ofTokyo and 2 iCONM, Japan

Korea Univ., Korea

Maeum Han, Noah Jang, Da Ye
Kim, Yujin Nam and Seong HoKong, Kyungpook National Univ.,
Korea

Hiroshi Nakamura 1, Yuichi Utsumi 1,
Mituyoshi Kishihara 2, Kazuhiro Kanda
1 and Kaito Fujitani 1, 1 Univ. of Hyogo
and 2 Univ. of Okayama, Japan

14P-1-77
On-chip peristaltic micropump for
precise microfluidic application

14P-1-78
Fabrication of DNA
Nanostructures for
Functionalized AFM Tip

14P-1-79
Introduction of a nanomaterial
dispersion for functionalization ofselffolding thin film

14P-1-80
Performance Comparison of
Printed Urination Sensor
Electrodes with Different Patterns

Takuma Tsukishima, Ryusuke Wada
and Kei Kobayashi, Kyoto Univ.,Japan

Toichiro Goto, Yuya Sato, Koji Sakai,
Yosuke Mizuno and Masumi
Yamaguchi, NTT, JapanLan Zhang, Jian Lu and Sohei
Matsumoto, AIST, Japan

Xinjie Zhang 1,2, Yang Bao 1, Yuyang
Liu 1 and Yuxin Tang 1, 1 Hohai Uni.,
China and 2 Tokyo Inst. of Technol.,Japan

14P-1-81
Ultrasensitive Specific Detectionof Anti-influenza A H1N1
Hemagglutinin Monoclonal
Antibody Using Silicon Nanowire
Field Effect Biosensors
Hui Zhang 1, Fumiya Osawa 1, Haru
Okamoto 1, Yawei Qiu 1, Zhiheng Liu
1, Noriyasu Ohshima 1, Taira Kajisa 2,
Toshiya Sakata 3, Takashi Izumi 4 andHayato Sone 1, 1 Gunma Univ. 2
SympaFit, 3 The Univ. of Tokyo and 4
Teikyo Heisei Univ., Japan

14P-1-82
Experiments on flow in arectangular-type microchannel
under differential pressure
Koichiro Kobayashi 1 and Kenji
Sakamoto 2, 1 National Inst. ofTechnol. Oshima College and 2
Kyushu Inst. of Technol., Japan-8-

MNC 2024
14P-1: Poster Session I (16:10-18:10, Nov. 14), Room P (Hanabusa) (B1F)
Atomic Layer Processing (ALP), Chair: Fumihiko Hirose (Yamagata Univ.)
14P-1-83
14P-1-84
14P-1-85
Competitive adsorption of DMZ
Effect of Hydrogen Addition to
A Novel Liquid Hafnium Precursor
and TMA in complex oxide films
BCl3 Inductively Coupled
for Conformal HfO ALD
atomic layer deposition
Plasma for Atomic Layer
Shuya Ikemura 1, Yuki Yamamoto 1,
observed by IR absorption
Etching of Titanium Nitride
Ryosuke Ebihara 1, Hiroyuki Oike 1,
spectroscopy
Jiyong Lee and Heeyeop Chae,
Koichi Tokudome 1, Kohei Iwanaga 1
Haruto Suzuki, Ryo Miyazawa, Satoshi
Suzaki, Hibiki Takeda, Masanori Miuraand Fumihiko Hirose, Yamagata Univ.,Japan

Sungkyunkwan Univ., Korea

14P-1-87
Development of radical CF4
plasma atomic layer etchingprocess of aluminum nitride

14P-1-88
Self-Assembled monolayers
process and Analysis for AreaSelective Atomic Layer
Deposition

Chien-Wei Chen 1 and Ming-Kuan
Feng 1,2, 1 National Applied Res.
Labs. and 2 National Tsing Hua Univ.,
Taiwanand Ken-ichi Tada 2, 1 Tosoh and 2
Sagami Chemical Research Inst.,
Jpaan

Sung-wook Hong and Pil J. Yoo,
Sungkyunkwan Univ., Korea

18:30-20:30
Banquet-9-14P-1-86
Area-Selective Atomic Layer
Deposition of SiO2 on oxide
versus nitride substrates using
small molecule inhibitor
Quang Khanh Nguyen, Juyeong Lee,
Namsun Jang and Myung Mo Sung,
Hanyang Univ., Korea.

MNC 2024

Friday, November 15, 2024
Room A (Cuddy Court) (1F)
+On-line
15A-1: Symp. A: The Path to
Sustainable Lithography V(9:00-10:30)

15B-1: Biomimetics, andFunctional Surfaces (9:0010:30)

Chairs: Tetsuo Harada (Univ. of
Hyogo) and Sachiko Kobayashi(Kioxia)

Chairs: Yuji Hirai (Chitose Inst. ofSci. and Technol.) and Yuzuru
Shimazaki (Hitachi)

15A-1-1 09:00
The Role of Models andMetrology in the Quest for More
Sustainable Semiconductor
Manufacturing (Invited)

Room C (Keishoun) (1F)

Room D (Keishoun) (1F)

15C-1: Quantum nanomaterials(9:00-10:30)

15D-1: Nanofabrication I (9:0010:30)

Chairs: Shu Nakaharai (Tokyo Univ. ofTechnol.) and Jun Kano (Okayama
Univ.)

Chairs: Katsuhiro Tomioka (Hokkaido
Univ.) and Kazuki Nagashima(Hokkaido Univ.)

15B-1-1 09:00
Bio-inspird Transparent
Hydrogel Films
Showing Multifunctional
Properties (Invited)

15C-1-1 09:00
Exploring 2D-material-based
heterostructures (Invited)

15D-1-1 09:00
Metal chalcogenides on flexible
substrates for Robust Electronics(Invited)

15A-1-2 09:30
EUV-FEL light source forsustainable lithography (Invited)

15B-1-2 09:30
Wettability of Nano/Micropatterned Ceramic Surfaces

15C-1-2 09:30
Synthesis and properties of porefree graphene oxide

Norio Nakamura, Ryukou Kato, Hiroshi
Sakai, Kimichika Tsuchiya, Yoshinori
Tanimoto, Yosuke Honda, Miho
Shimada, Masahiro Yamamoto,Takanori Tanikawa, Olga Tanaka
Takashi Obina, Shinichiro Michizono,
Hiroshi Kawata, High Energy
Accelerator Research
Organization(KEK)

Shotaro Manabe and Fujio Tsumori,
Kyushu Univ., Japan

Tatsuki Tsugawa 1, Kazuto
Hatakeyama 1, Michio Koinuma 1,
Takaakki Taniguchi 2 and Shintaro Ida
1, 1 Kumamoto Univ. and 2 NIMS,
Japan

15A-1-3 10:00
Sustainable Semiconductor
Lithography throughNanoimprint Technology (Invited)

15B-1-3 09:50
Fabricating SiC nanovoid arraysfor Mie-tronics

15C-1-3 09:50
First-Principles Analysis of
Quantitative Non-Integer
Dimension and Electronic
Properties in MXene Multilayers

Gian Francesco Lorusso 1, Claudia
Fleischmann 1,2, Emily Gallagher 1, 1
imec and 2 KU Leuven, Belgium

Kimio Ito, Takaharu Nagai, Hideki
Chou and Hisayoshi Watanabe, Dai
Nippon Printing, Japan

Room B (Keishoun) (1F)

Ryo Kitaura, NIMS, Japan

Johnny C. Ho, City Univ. of Hong
Kong, Hong Kong

Atsushi Hozumi, AIST, Japan

Hiroya Maruyama, Shunsuke Murai
and Katsuhisa Tanaka, Kyoto Univ.,Japan

Koichi Nakamura, Kyoto Univ. of
Advanced Sci., Japan

15B-1-4 10:10
Optimized characterization
methods for nanoimprinted pillar
arrays on 200 mm wafers:
Application to µLEDs

Chairs: Sachiko Kobayashi (Kioxia)
and Tetsuo Harada (Univ. of Hyogo)

15A-2-1 10:50
Single Exposure EUV Patterningof A14 Logic Vias: Enabling theHigh NA Ecosystem

Bhavishya Chowrira 1, Victor Blanco 1,
Mircea Dusa 1, Ling Ee Tan 1, Werner
Gillijns 1, Marc Demand 2, Yusuke
Wako 2, Ainhoa Romo Negreira 2,
Robert Clark 2 and Kathleen Nafus 2,
1 imec, Belgium and 2 Tokyo Electron,Japan

15A-2-2 11:10
Extending Moore's law via
adhesion force control: Next
generation technology for sub-3nm devices
Sihai Luo 1,2, 1 Xi'an Jiaotong Univ.,
China and 2 Norwegian Univ. of Sci.
and Technol., Norway

Atsuhiro Mizuno 1, Shusaku Nagano
2 , Hirofumi Tanaka 3 and Tsuyoshi
Hasegawa 1, 1 Waseda Univ., 2
Rikkyo Univ. and 3 Kyushu Inst. ofTechnol., Japan

15D-1-3 09:50
Performance of MoSe2/SWNT inmaterial reservoir computing
device on temporal prediction
tasks

Alif Syafiq Kamarol Zaman 1, Saman
Azhari 1,2, Yuki Usami 1 and Hirofumi
Tanaka 1, 1 Kyushu Inst. of Technol.
and 2 Waseda Univ., Japan

15C-1-4 10:10
Temperature dependence of
circularly polarized
photoluminescence in dilutenitride InGaAsN quantum dots
grown at low temperature

15D-1-4 10:10
Object recognition and anomaly
detection using a Ag2S reservoir

Author's Interview (10:30-10:40)
15C-2: Oxide and nitride
nanomaterials (10:50-12:20)

Author's Interview (10:30-10:40)
15D-2: Nanofabrication II (10:5011:50)

Chairs: Takao Shimizu (NIMS) andShinya Tsukada (Shimane Univ.)

Chairs: Tomohiro Shimizu (Kansai
Univ.) and You Yin (Gunma Univ.)

15B-2-1 10:50
Advancing Polymer MEMS with
3D Photolithography (Invited)

15C-2-1 10:50
Fast Charge Transfer via
Dielectric Nano-Island (Invited)

Takaaki Suzuki, Gunma Univ., Japan

Takashi Teranishi1, 2, Shinya Kondo1
and Akira Kishimoto1, 1 Okayama
Univ. and 2 Tokyo Inst. of Technol.,Japan

15D-2-1 10:50
Electrical characteristics modellingof atomic switch nanoparticle
network

Nabil Labchir 1, Maya Wehbe 2,
Jerome Reche 1, Camille PetitEtienne 1, Pierre-Marie Coulon 2,
Blandine Alloing 2, Marc Rabarot 1,
Jean-Herve Tortai 1, Matthew
Charles 1 and Cécile Gourgon 1, 1
Univ. Grenoble Alpes, CEA/LETIMinatec, France and 2 Univ. Coted'Azur, CRHEA-CNRS, France

15A-2: Advanced Lithography
and Patterning (10:50-11:50)

15D-1-2 09:30
Physical Reservoir Operation
Utilizing Polarization Change in a
Liquid Crystal

Kaiki Yoshimura and Tsuyoshi
Hasegawa, Waseda Univ., Japan

Ayano Morita, Junichi Takayama,
Akihiro Murayama and Satoshi Hiura,
Hokkaido Univ., Japan

Author's Interview (10:30-10:40)
15B-2: Microsystem
Technology and MEMS I(10:50-12:20)
Chairs: Daisuke Yamane(Ritsumeikan Univ.) and Sumito
Nagasawa (Shibaura Inst. ofTechnol.)

Yuki Usami, Thien Tan Dang and
Hirofumi Tanaka, Kyushu Inst. ofTechnol., Japan

15B-2-2 11:20
Magnetically Driven Soft
Tentacles Utilizing Pneumatic
Pressure-Induced Buckling

15C-2-2 11:20
Stable high-switching speed in(Al,Sc)N films heat-treated underH2 atmosphere15D-2-2 11:10
Nanoscale Direct Patterning of
Ultrathin Silicon Nanosheets
Utilizing Helium Ion Microscopy

Kosei Ito and Fujio Tsumori, Kyushu
Univ., Japan

Nana Sun 1, Kazuki Okamoto 1,
Shinnosuke Yasuoka 1, Soshun Doko
2, Naoko Matsui 2, Toshikazu Irisawa
2, Koji Tsunekawa 2 and Hiroshi
Funakubo 1, 1 Tokyo Inst. of Technol.
and 2 Canon ANELVA, Japan

Yukinori Morita 1, Kensuke Inoue 2,
Ryuichi Sugie 2 and Shinichi Ogawa 1,
1AIST and 2 TRC, Japan- 10 -

Room A (Cuddy Court) (1F)
+On-line
15A-2-3 11:30
Critical properties of CNT pellicles
for the next generation EUV
scanners
Takahiro Ueda 1, Julius J. S. Santillan
2, Marcio D. Lima 3, Takeshi Kondo 3
and Toshiro Itani 2, 1 LINTEC, 2 AIST,Japan and 3 LINTEC America, USA

MNC 2024
Room B (Keishoun) (1F)

15C-2-3 11:40
Domain Switching Dynamics inWurtzite-type Ferroelectrics

Takeshi Okada 1, Shogo Kikuya 1,
Ryo Takigawa 2 and Yusuke Tahara
1, 1 Shinshu Univ. and 2 Kyushu
Univ., Japan

Takao Shimizu 1, 2, Kota Hasegawa
1,3, Takeo Ohsawa 1, Isao Sakaguchi
1,3 and Naoki Ohashi 1,3,4, 1 NIMS, 2
JST-PRESTO, 3 Kyushu Univ. and 4
Tokyo Inst. of Technol., Japan

15B-2-4 12:00
Mechano-chromic colloidal
crystals for self-reporting force
measurement in MEMS

15C-2-4 12:00
Effect of Dopants on Threshold
Voltage Control of Zinc Oxide
Based Thin Film Varistor

Saldivar-Ayala Daniel and Takahiro
Namazu, Kyoto Univ. of Advanced
Sci., Japan

Takahiro Nagata, Shinjiro Yagyu andNaoki Ohashi, NIMS, Japan

Author's Interview (12:20-12:30)
15B-3: Microsystem
Technology and MEMS II(13:30-15:10)

Author's Interview (12:20-12:30)
15C-3: semiconductor
nanomaterials (13:30-14:50)

15D-3: Nanofabrication III(13:30-15:00)

Chairs: Takashi Tsuchiya (NIMS) andTakao Shimizu (NIMS)

Chairs: Akio Ohta (Fukuoka Univ.) andMasahiro Hori (Shizuoka Univ.)

15C-3-1 13:30
Effects of Interface Formation
Process on band arrangements
and electronic properties of n-type
Ti0.3Zn0.7O1.3/Si for tunnel FET

15D-3-1 13:30
Fabrication of n-type and p-type
WSe2 field-effect transistors andtheir low voltage CMOS inverter
operation (Invited)

Kenta Ogawa 1,2, Toyohiro Chikyow 2,
Atsushi Ogura 1 and Takahiro Nagata
1,2, 1 Meiji Univ. and 2 NIMS, Japan

Takamasa Kawanago 1,2, I. Muneta 3,
T. Hoshii 3, K. Kakushima 3, K. Tsutsui
3, and H. Wakabayashi 3. 1 AOST. 2
JST-PRESTO and 3 Tokyo Inst. ofTechnol., Japan

15C-3-2 13:50
High-Speed Continuous Wave
Laser Annealing for Nonequilibrium Growth of HighlyStrained Germanium-BasedMaterials

15D-3-2 14:00
Characterization of Vertical GateAll-Around Tunnel FETs using
InAs NWs/SOI Tunnel Junction

Chairs: Koji Asakawa (Kioxia) andTomoki Nagai (JSR)

Chairs: Yoshihiro Hasegawa(Hiroshima City Univ.) and Sumito
Nagasawa (Shibaura Inst. ofTechnol.)

15A-3-1 13:30
AI progression enabled with
System Energy Efficient
Performance improvements,
supported by holistic lithography(Special Talkl)

15B-3-1 13:30
Nonlinear thermo-acoustic
phase modulator for physicalreservoir computing

Martin van den Brink, Former
President, and CTO, ASML, The
Netherlands

15A-3: Symposium A: The Path
to Sustainable Lithography VII
Panel Discussion(14:20-16:20)

Room D (Keishoun) (1F)

15B-2-3 11:40
Development and Evaluation of
Microfluidic-based Taste Sensor

Author's Interview (11:50-12:00)

15A-3: Symposium A: The Path
to Sustainable Lithography VI
Special Talk (13:30-14:10)

Room C (Keishoun) (1F)

Taiki Ijima, Claude Meffan, Amit
Banerjee, Jun Hirotani and Toshiyuki
Tsuchiya, Kyoto Univ., Japan

15B-3-2 13:50
High-Resolution Magnetic
Patterning on Tough Gels Using
Laser
Ryoma Shiraishi and Fujio Tsumori,
Kyushu Univ., Japan

Ryo Matsumura 1, Rahmat Hadi
Saputro 1, 2 and Naoki Fukata 1,2, 1
NIMS and 2 Univ. of Tsukuba, Japan

15B-3-3 14:10
Piezophototronics effect of nZnMgO/p-Se hetero junction
and its application to strain
sensing

15C-3-3 14:10
Electric double layer effects at
solid electrolyte interfaces using afield-effect transistor based on ptype SiC (100) single crystal

Chen Tiange, Ryota Ogata andTaizo Kobayashi, Ritsumeikan Univ.,Japan

Kaoru Shibata 1,2, Wataru Namiki 1,
Daiki Nishioka 1, Tohru Higuchi 2,
Kazuya Terabe 1 and Takashi Tsuchiya
1,2, 1 NIMS and 2 Tokyo Univ. of Sci.,
Japan

15B-3-4 14:30
Surface activated bonding ofdifferent oriented Lithium
Niobate wafers at room
temperature

15C-3-4 14:30
Scalable, Flame-resistant,
Superhydrophobic Ceramic
Nanofibers for Sustainable All-day
Radiative Cooling

Yoshiki Katoda and Ryo Takigawa,
Kyushu Univ., Japan

Dehui Wan, National Tsing Hua Univ.,
Taiwan15B-3-5 14:50
Fabrication and resonant
characteristics of diamond
MEMS resonators

Author's Interview (14:50-15:00)

Shunichiro Matsuda, Amit Banerjee,
Masaki Shimofuri, Jun Hirotani and
Toshiyuki Tsuchiya, Kyoto Univ.,
Japan

Author's Interview (15:10-15:20)
Lobby (2F)
Coffee Break- 11 -

15D-2-3 11:30
Feasibility Study of Layer
Separation using 2D PatternedInternal Laser Damage in Silicon
Yuan Yaoa, andrea Vergara and Shuji
Tanaka, Tohoku Univ., Japan

Author's Interview (11:50-12:00)

Yuki Takeda, Yuki Azuma, Ziye Zheng,
Junichi Motohisa and Katsuhiro
Tomioka, Hokkaido Univ., Japan

15D-3-3 14:20
Investigation of the initial stage of
GaAs nanowire nucleation on
Si(111) substrate on the growth ofself-catalyzed molecular beam
epitaxy
Kaito Nakama, Keisuke Minehisa,
Hidetoshi Hashimoto and Fumitaro
Ishikawa, Hokkaido Univ., Japan

15D-3-4 14:40
Breaking The Surface Area Limitof Metal Oxide Nanowire Arrays
by Competitive Interplay of Crystal
Growth and Chemical Etching
Yuta Kazama 1, Ryunosuke
Matsumura 1, Sayuki Oka 1, Hideto
Yoshida 2, Narathon Khemasiri 1,
Yohei Yomogida 1 and Kazuki
Nagashima 1, 1 Hokkaido Univ. and 2
Osaka Univ., Japan

Author's Interview (15:00-15:10)

MNC 2024
15P-1: Poster Session II (15:30-17:30, Nov. 15), Room P (Hanabusa) (B1F)
Nanofabrication, Chairs: Katsuhiro Tomioka (Hokkaido Univ.) and Keisuke Arimoto (Yamanashi Univ.)
15P-1-1
15P-1-2
15P-1-3
15P-1-4
Development of automatedOptical character recognition
Fabrication and evaluation of
Selective-area growth of wurtzite
fabrication and evaluation
using a three-dimensional silver
MoS2 nanotube-based humidity
InP and AlInP fin structuressystem for surfaced-enhanced
sulfide physical reservoir
sensors with two different
Y. Azuma, Z. Zheng, J. Motohisa andRaman scattering device
electrode arrangements
Yuki Ohno and Tsuyoshi Hasegawa,K. Tomioka, Hokkaido Univ., Japanapplications
Waseda Univ., Japan

15P-1-5N-Doped Sb3Te for HighPerformance Phase-Change
DeviceShota Yoshimoto, Shunsuke Yahagi,
Mutsumi Miuchi and You Yin, Gunma
Univ., Japan

15P-1-9
Effect of Polarization Direction on
In-Material Reservoir Computing
Performance in Ferroelectric
YMnO3 Single Crystals
Muzhen Xu, Kyoka Furuta, Ahmet
Karacali, Yuki Umezaki, Yuki Usami,
Yoichi Horibe and Hirofumi Tanaka,
Kyushu Inst. of Technol., Japan

15P-1-13
In-sensor computing system using
a Cu-doped Ta2O5 reservoir for
light pattern classification
Masaru Hayakawa and Tsuyoshi
Hasegawa, Waseda Univ., Japan

15P-1-17
Effect of Pulsing on Poly-Si Etch
Rate Uniformity in RadioFrequency Inductively Coupled
PlasmasYoungchae Sakong and Heeyeop
Chae, Sungkyunkwan Univ., Korea

Yousuke Kasai 1, Masayuki
Hashimoto 1, Ryo Meguro 2,
Takayuki Nishino 2, Ryota Negishi 1,
1 Toyo Univ. and 2 Sanwa, Japan

15P-1-6
Limit of short-term memory
capacity in a physical reservoir
made of a Agdoped Ta2O5 thin
film
Risa Gobara and Tsuyoshi
Hasegawa, Waseda Univ., Japan

15P-1-10
Optimizing Computational
Efficiency and Functionality in
Oriented RR-P3HT Thin Films
Moulika Desu 1, Yuki Usami 1, Yuya
Ishizaki 2, Shusaku Nagano 2 andHirofumi Tanaka 1, 1 Kyushu Inst. ofTechnolo. and 2 Rikkyo Univ., Japan

Tana Matsumura, Takeshi Ito, Shoso
Shingubara and Tomohiro Shimizu,
Kansai Univ., Japan

15P-1-7Fabrication of PVDF
nanostructure and its application
for antifouling
Nan Liang, Zihao Zhao, Tomohiro
Shimizu, Shoso Shingubara andTakeshi Ito, Kansai Univ., Japan

15P-1-11
Nanodot Formation on Si andPolyimide Using 28000-6000
g/mol Molecular Weight PSPDMS Blockcopolymer
Yuki Hirota, Yuya Kuwabara and You
Yin Gunma Univ., Japan

15P-1-8
Antimicrobial activity ofnanopatterns composed of chitincontaining polylactic acid (PLA)
film

Gakuto Inoue 1, Ikki Shingeya 1, Yuito
Mastushita 1, Yui Ito 2, Lianzhen Lin 2,
Tomohiro Shimizu 1, Shoso
Shingubara 1 and Takeshi Ito 1,
Kansai Univ. and 2 KRI, Japan

15P-1-12
Impact of Dielectrics Insertion on
Low-Power Operation ofGraphene/Sumanene/Graphene
Resistive Switching Memory
Ryoichi Kawai, Yoshiharu Kirihara,
Ryosuke Katsumata, Reika Fujie,
Hiroshi Nohira, Ryousuke Ishikawa
and Yuichiro Mitani, Tokyo City Univ.,
Japan

15P-1-14
Vapor Phase Silicon Etching
Assisted by Graphene Oxide
with Photochemically Modified
In-plane Structure

15P-1-15
Origin of photoluminescenceenhancement in buried III-V
quantum wells through surface
treatments

15P-1-16
Effect of broadening the p orbital
responsible for room temperature
ferromagnetism found insemiconducting nanoparticles

Yuta Goto, Toru Utsunomiya andTakashi Ichii, Kyoto Univ., Japan

Zhao Ma 1,2, Takaaki Mano 1, Akihiro
Ohtake 1 and Takashi Kuroda 1,2, 1
NIMS and 2 Kyushu Univ., Japan

Kazane Ito, Akihiro Fukawa, Takuto
Nakawaza, Zijie Feng and Kouichi
Takase, Nihon Univ., Japan

15P-1-18
IZO/ZnO Nanowire
Heterostructure for the
Enhancement of Electrical
Properties and its Biosensing
Application

15P-1-19
Impact of Thermal Annealing on
Chemical Structure of Al/Si(111)
Akio Ohta and Kanase Tezuka,
Fukuoka Univ., Japan

June Soo Kim, Da Ye Kim, NoahJang, Hyunjun Kim, Yujin Nam,
Jinkyung Kim, Jin Park, Maeum Han
and Seong Ho Kong, Kyungpook
National Univ., Korea

Inorganic Nanomaterials, Chair: Yurina Terasawa (Kumamoto Univ.)
15P-1-20
15P-1-21
15P-1-22
Electron spin transport properties
Magneto-optical Properties andCatalytic support effect ofof GaAs/AlGaAs superlattice
Hydrogen Reactions in Surface
PdO/ZrO2 in the acetylene
barrier under an application of
Plasmon System Consisting oftrimerizationelectric field
CoPt/Pt/Ag Stacked Nanolayers Masashi Nakamoto, Teruki Yano,

15P-1-23
High Surface Electron-Proton
Mixed Conduction at Medium
Temperature of c-axis Oriented
BaCe0.7Ru0.1Y0.2O3-δ Thin Film

Kohei Etou, Junichi Takayama, Agus
Subagyo, Kazuhisa Sueoka, Akihiro
Murayama and Satoshi Hiura,
Hokkaido Univ., Japan

Haruki Yamane 1, Hisato Shibata 1,
Takuya Ishida 2 and Tetsu Tatsuma
2, 1 Akita Industrial Technol. Centerand 2 The Univ. of Tokyo, Japan

Tomoko Okubo, Jun Kano, Yuta
Nishina and Tatsuo Fujii, Okayama
Univ., Japan

Naohiro Kaneda 1, Go Notake 1, Riku
Kaneko 1, Daisuke Shiga 2, Hiroshi
Kumigashira 2 and Tohru Higuchi 1, 1
Tokyo Univ. of Sci. and 2 Tohoku Univ.,
Japan

15P-1-24
Effect of annealing in a nitrogen
atmosphere on the magnetic
properties of dilute magnetic
semiconductors

15P-1-25
Resistive Control of VO2 Thin
Film Using Li+ Diffusion of
LiCoO2 Layer.

15P-1-26
Quantitative Analysis of DefectStates in a-InSnZnO via
Differential Reflectance Transient
Spectroscopy

15P-1-27
Giant enhancement of d33 in
lead-free (K, Na)NbO3-based
flexible piezoelectric film achievedby three-phase composites

S. Yano 1, M. Murayama 2 and X.
Zhao 1, Tokyo Univ. of Sci. and 2 Toyo
Univ., Japan

15P-1-28
Improvement of amorphousnature of In2O3-based transparent
conductive films by H-doping
Kanta Kibishi, Shinri Yamadera,
Tsubasa Kobayashi, Ichiro Takano andShinya Aikawa, Kogakuin Univ., Japan

Riku Kaneko 1, Go Notake 1,
Naohiro Kaneda 1, Daisuke Shiga 2,
Hiroshi Kumigashira 2 and Tohru
Higuchi 1, 1 Tokyo Univ. of Sci. and2 Tohoku Univ., Japan

15P-1-29
Amorphous Indium-Tin-Zinc
Oxide thin film transistor
correlation between electricalproperties and defect analysis
as a function of conductive
homojunction layer insertion
electrode

Jinyoung Go 1, Minsu Seo 1,
Kwangsik Jeong 2, Sooji Nam 3,4 andKwun-Bum Chung 1, 1 Dongguk Univ.,
2 Yonsei Univ., 3 Electronics andTelecommunications Research Inst.
and 4 Univ. of Science and Technol.,Korea

15P-1-30Preparation and Evaluation of
Flexible Bi2Te3 Nanoplate Film
K. Kaneko, Y. Okano and M. Takashiri,
Tokai Univ., Japan

Makoto Takayanagi and Ryo Nishida,
Mitsubishi Chemical, Japan

15P-1-31
Improvement of hysteresis in nonannealed IBO TFTs byroomtemperature UV exposure inoxygen atmosphere
Shinri Yamadera, Kanta Kibishi andShinya Aikawa, Kogakuin Univ., Japan

Dong Yeob Shin 1, Boseong Kim 1,
Hyun-Suk Kim 2, Kwangsik Jeong 1,
Kwun-Bum Chung 1, 1 Dongguk
Univ. and 2 Yonsei Univ., Korea- 12 -

MNC 2024
15P-1: Poster Session II (15:30-17:30, Nov. 15), Room P (Hanabusa) (B1F)
15P-1-32
Role of Al-doping effect on the
structure and piezoelectric
properties of(K, Na)NbO3 leadfree ceramics
Makoto Takayanagi, Kei Ikeda and
Ryo Nishida, Mitsubishi Chemical,
Japan

15P-1-36
Development of highly sensitive
SWIR photodetector based on
PbS QDs with MAPI ligand
JinBeom Kwon, Suji Choe, Yuntae Ha,
Dong Geon Jung and Daewoong
Jung, KITECH, Korea

15P-1-33
Magnetoresistance effects in
Fe3Si/FeSi2/Fe3Si spin valve
films

15P-1-34
Fabrication of p-type SnO thin filmusing robust SnO2 target by
sputtering and annealing in lowconcentration reducing H2
atmosphere

Ken-ichiro Sakai 1, Yuki Asai 2,
Kazuya Ishibashi 2 and Tsuyoshi
Yoshitake 2, 1 National Inst. ofTechnology, Kurume College and 2
Kyushu Univ., Japan

Tsubasa Kobayashi, Kanta Kibishi andShinya Aikawa, Kogakuin Univ., Japan

15P-1-35
Effect of oxygen pressure on
crystal orientation and bonding
states of SnSO4 thin films
Kento Moriya, Daiki Watanabe, Taiki
Ogawa, Tomohiro Yamaguchi andShinya Aikawa, Kogakuin Univ., Japan

15P-1-37
Evaluation of Thermoelectric
Performance of Bi2Te3 Alloys by
Combination of 3ω and NI
Methods as a Function ofComposition Ratio and Film
Thickness
T. Takizawa, M. Takashiri and T.
Kaneko, Tokai Univ., Japan

Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces, Chair: Jun Taniguchi (Tokyo Univ. of Sci.)
15P-1-38
15P-1-39
15P-1-40
15P-1-41
Dependence of imprint
Fabrication of TiO2 Metasurface
Optical Properties of Yeast Cell as Fabrication of Sub-micron
atmosphere on advancement ofProcessing on Curved Surfaces
a Microlens
Stickers with Amorphous-GeO2
UV-curable liquid confined atUsing Gas-permeable Porous
as a Sacrificial Layer
Akihiro Matsutani, Tokyo Inst. of
nanogaps between mold and
Molds
Taiki Takashima, TienYang Lo,
Technol., Japan
Arisa Teramae 1, Sayaka Miura 1, Rio
substrate surfaces
Masaru Nakagawa 1, Akiko Onuma 1,
Ryo Nawata 2, Shintaro Itoh 3, andKenji Fukuzawa 3, 1 Tohoku Univ., 2
CANON and 3 Nagoya Univ., Japan

15P-1-42
Ultrafine Molding Technology for
Biodegradable Polymers Cut
Through UV-curable Gas
Permeable Mold

Mano Ando 1, Rio Yamagishi 1,
Sayaka Miura 1, Yuna Hachikubo 1,
Naoto Sugino 2, and Satoshi Takei 1, 1
Toyama Prefectural Univ. and 2 Sanko
Gosei, Japan

15P-1-46
Water-soluble smart-labelingplatform using nanoimprint
lithography
Hyunjung Kang, Joohoon Kim,
Hongyoon Kim and Junsuk Rho,
POSTECH, Korea

Shunsuke Murai and Katsuhisa
Tanaka, Kyoto Univ., Japan

Yamagishi 1, Naoto Sugino 2,
Yoshiyuki Yokoyama 3, Mano ando 1,
Yuna Hachikubo 1 and Satoshi Takei
1, 1 Toyama Pref. Univ., 2 Sanko
Gosei and 3 Toyama Industrial
Technol. Res. and Develop. Center,Japan

15P-1-43
Self-cleaning Performance
Against SiO2 Particulate Matter
Adhesion of Nanopillar Surfaces

15P-1-44
Formation mechanism of fluted
filter-like nanostructures ontrimmed imprint resist masks
studied by surface analysis

Zihao Zhao, Nan Liang, Tomohiro
Shimizu, Shoso Shingubara andTakeshi Ito, Kansai Univ., Japan

Naoki Takano, Hiromasa Niinomi and
Masaru Nakagawa, Tohoku Univ.,
Japan

15P-1-45
Thermal fracture mechanism inlaser-assisted direct glass
imprinting
Takehiro Mitsuda 1,2, Keisuke Nagato
1 and Masayuki Nakao 1, 1 The Univ.
of Tokyo and 2 AGC, Japan

15P-1-47
Structural Depth and Central
Brightness Analysis of Diffractive
Optical Elements Fabricated byContinuous Nanoimprint
Process
Chih-Sheng Chang 1, Fuh-Yu
Chang 1 and Siao-Shan Jyu 2, 1
National Taiwan Univ. of Sci. andTechnol. and 2 SwiRoc, Taiwan

5: Microsystem Technology and MEMS, Chair: Shugo Miyake (Setsunan Univ.)
15P-1-48
15P-1-49
15P-1-50 Withdrawn(100) silicon ring gyroscope with
Strengthening Mechanisms of
PVDF bilayer actuator integrated
rectangle springs aiming at
CuO Included Sintered Ag Die
with laser-induced graphenefrequency and thermoelastic QAttach Assemblies
heaterfactor matching
C. Chantawong, M. Shindo and T.
Chih-Yi Fang 1, Shun-Wei Chiu 1,

15P-1-51
Noncontact measurement of TiNi
film surface temperature using
laser reflected light
Taichi Murakami 1, Masaki Sshimofuri
2, Toshiyuki Tsuchiya 2 and Shugo
Miyake, 1 Setsunan Univ. and 2 Kyoto
Univ., Japan

Ayumu Takahashi, Amit BanerJee, Jun
Hirotani and Toshiyuki Tsuchiya, Kyoto
Univ., Japan

Namazu, Kyoto Univ. of Advanced
Sci., Japan

Yuan-Ting Chang 2, Ching-Yuan Su 2
and Yao-Chuan Tsai 1, 1 National
Chung Hsing Univ. and 2 National
Central Univ., Taiwan

15P-1-52
Self-powered motion sensor
based on laser-induced graphene
electrode triboelectric
nanogenerator

15P-1-53
Cross-Sectional Modeling of
RIE-Processed Perfluorinated
Polymer Optical Fibers

15P-1-54
Wafer bonding of Cu and Si atroom temperature using activated
Cu atomic layer

15P-1-55
Design Method for Sleeve of
McKibben-Type Actuator for
Customized Deformation

Ryohei Yamauchi, Jun Utsumi and
Ryo Takigawa, Kyushu Univ., Japan

Ryota Hiratsuka and Sumito
Nagasawa, Shibaura Inst. of Technol.,Japan

15P-1-57
Graphene / Silver Nanowire
Stacked Flexible Transparent
Conducting Electrode for
Flexible Photovoltaic
Applications

15P-1-58
Measurement Method ofSurrounding Information Using 1D
ToF Sensor for Micro-Hexapod
fabricated with MEMS Origami
Frame

15P-1-59
Improved magnification of nanoimaging by cylindricalmicrostructures

Miho Akasaka, Hiroya Kurokawa
and Taizo Kobayashi, Ritsumeikan
Univ., Japan

Tomoki Sakurai and Sumito
Nagasawa, Shibaura Inst. of Technol.,Japan

Yong-Ran Lin 1, Yuan-Ting Chang 2,
Ching-Yuan Su 2 and Yao-Chuan Tsai
1, 1 National Chung Hsing Univ. and 2
National Central Univ., Taiwan

15P-1-56
3D Motion of Magnetically
Actuated Artificial Cilium
Taro Saito and Fujio Tsumori, Kyushu
Univ., Japan

R. Nakashima 1, K. Ishida 1, T.
Nakanishi 1, C.-T. Lo 2, H. Lee 3, Y.
Mizuno 4 and D. Yamane 1, 1
Ritsumeikan Univ., 2 National Tsing
Hua Univ., 3 Shibaura Inst. ofTechnol. and 4 Yokohama National
Univ., Japan- 13 -Taichi Sano 1, Keito Tobe 1, Akihiro
Tsuji 2, Kunpisit Kosumsupamala 1,
Nitipon Puttaraksa 1, Hironori Seki 1,
Tatsunosuke Matsui 2 and Hiroyuki
Nishikawa 1, 1 Shibaura Institute ofTechnol. and 2 Mie Univ., JapanMNC 2024

15P-1-60
SAW-based UV-C corona sensor
system with ultra-fast response
time
Faisal Nawaz, Hyunho Lee, Jeongwoong Park and Keekeun Lee, Ajou
Univ., Korea- 14 -