W W W . M K S I N S T . C O M

Pressure & Vacuum Measurement
Solutions

Analog 600 Series
Selection Guide
ABSOLUTE BARATRON® CAPACITANCE MANOMETERS

600 Series Analog 			Capacitance Manometers
The MKS 600 Series absolute analog Baratron®
capacitance manometers are designed for accurate,
repeatable pressure and vacuum measurements indemanding production or research process environments.
The proven sensor, electronics, and packaging designs
combine to provide the most stable and reliable lowpressure measurement instrument available.

Features and Benefits• Full Scale pressure/vacuum ranges as low as 0.02 		
Torr (mm Hg) allow for accurate measurement of 		
vacuum as low as 2 x 10-4 Torr (1.5 x 10-4 mbar)• All products are specified in percent of reading for 		
best accuracy and improved process yield• Complete line of absolute manometers including 		
products operating at internal temperatures of up to
200°C. Widest product range and applications 		
experience available anywhere• Direct measurement of chamber total pressure 		
independent of gas type or composition, eliminatingneed for lookup tables and conversion factors• Best-available long-term output stability ensures 		state-of-the-art process repeatability in nearly any 		
application• Inconel® and Incoloy® nickel alloy construction of 		basic sensor operates without damage in virtually 		
any chemical environment, including halogens, 		deionized water and steam, and ozone• High overpressure limit ensures reliability from 		
occasional system mishaps

Product Description
The MKS 600 Series Baratron capacitance manometers
are analog capacitance-based pressure and vacuum
gauges that require ±15VDC input power and provide ahigh-level 0-10VDC output signal linear with pressure. This
analog output can be interfaced with an MKS pressure
controller, an MKS power supply/display instrument, or
any instrument that meets these requirements. Changes
in pressure/vacuum are determined by measuring thechange in capacitance between the sensor’s diaphragmand an adjacent electrode disk. This capacitance change
is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned
Inconel diaphragm in the sensor provides very fast
response (<20 msec in many cases), low hysteresis,
excellent repeatability, very high resolution (to 0.001% of
Full Scale), exceptionally high corrosion resistance, anddouble-walled welded construction for operator safety.
The sensor itself can withstand repeated exposures to
45 psia (3.1 bar) without permanent degradation or
shifting, allowing it to operate in virtually any processsystem.

Baratron® Capacitance 			Manometer Chart
MKS offers many products within the 600-series family with different attributes, capabilities, and performance. A quicksummary of these models is below, followed by individual descriptions of each product and its major applications.
Product
FamilySensorOutputOperatingTemperature

Primary Full Scale
Ranges - Torr*

Secondary Full Scale
Range - Torr*

Electrical
Connector

Relay
Switches

622C

Standard

0-10VDC analog

Unheated

1 to 1,000

Not available

Terminal Block

No

623F

Standard

0-10VDC analog

Unheated

10 to 1,000

Not available

Terminal Block

Yes

624F

Standard

0-10VDC analog

45°C

1 to 20,000

Not available

15-pinD-subminiature

Yes

625F

Standard

0-10VDC analog

100°C

1 to 20,000

Not available

15-pinD-subminiature

Yes

626C

Standard

0-10VDC analog

Unheated

0.1 to 1000

Not available

15-pinD-subminiature

No

627F

Standard

0-10VDC analog

45°C

0.02 to 20,000

Not available

15-pinD-subminiature

No

628F

Standard

0-10VDC analog

100°C

0.05 to 20,000

Not available

15-pinD-subminiature

No

629F

Standard

0-10VDC analog

45°C or 100°C

0.02 to 1,000**

Not available

9-pin
D-subminiature

No

631D

Standard

0-10VDC analog

150°C or 200°C

1 to 1,000

Not available

15-pinD-subminiature

Optional

D24F

Standard

0-10VDC analog

45°C

10 to 1,000

2x, 5x, or 10x lower
than primary range

15-pinD-subminiature

Yes

D25F

Standard

0-10VDC analog

100°C

10 to 1,000

2x, 5x, or 10x lower
than primary range

15-pinD-subminiature

Yes

D27F

Standard

0-10VDC analog

45°C

10 to 1,000

2x, 5x, or 10x lower
than primary range

15-pinD-subminiature

No

D28F

Standard

0-10VDC analog

100°C

10 to 1,000

2x, 5x, or 10x lower
than primary range

15-pinD-subminiature

No

E27F

Etch Baffle

0-10VDC analog

45°C

0.02 to 100

Not available

15-pinD-subminiature

No

E28F

Etch Baffle

0-10VDC analog

100°C

0.05 to 100

Not available

15-pinD-subminiature

No

E29F

Etch Baffle

0-10VDC analog

45°C or 100°C

0.02 to 100**

Not available

9-pin
D-subminiatureNo

Notes:													*Other units of measurement available; contact factory.									**0.02 Torr range available only on 45°C models.

A very partial list of applications for the 600 series of products include:•		All semiconductor thin-film processes such as etching and ashing, chemical vapor deposition, physical vapor
deposition, oxidation, diffusion, and implantation.

•

Production of electronic displays such as LCDs, plasma displays, and CRTs.

•

Manufacturing of advanced ceramics and metals for aerospace and transportation.

•

Automated leak test systems for industrial and scientific use.

•

Sterilization and freeze-drying of biopharmaceuticals, foods, medical implants, and surgical instruments.

•		•

Analytical and metrology instruments such as mass spectrometers, high-precision balances, calibration 		standards, and other analytical tools.
Production of data storage components such as laser diodes, magnetic read/write heads, and storage platters.

622C, 623F and 626C Unheated Absolute 		Baratron® Capacitance Manometers
The 622C, 623F and 626C Baratron capacitance manometers
are unheated, and thus are the most economical of all of the
600 series family of products. They are available in Full Scalepressure/vacuum ranges from 0.1 to 1000 Torr (and metricequivalents) and are suited for many industrial, electronic,
and research applications. The 622C has a terminal blockelectrical connector without relays, the 626C uses a 15-pin
D-subminiature electrical connector without relays, and the623F product adds two (2) independently-adjustable trip
relays to control external equipment.

627F, 628F, and 629F Heated Absolute		
Baratron® Capacitance Manometers
The 627F, 628F, and 629F are heated capacitancemanometers that are much less affected by ambient
temperature changes than unheated Baratron capacitancemanometers. Heating the sensor also reduces or eliminates
the possibility of process byproducts depositing inside themanometer to cause drift, which can have a significant effecton system availability and repeatability. They are available inlower Full Scale pressure ranges than unheated products,
which permits their use in more demanding processes. All of
the models are internally regulated to their specified operating
temperature; no external controllers, cables, or sensors areneeded. The 627F and 628F operate at 45°C and 100°C
respectively, and have a 15-pin D-subminiature electricalconnector. They also have an option for “Heater Status” and“At Temperature” LED indicators and relay contact. The 629F
can be configured to operate at either temperature, anduses a 9-pin D-subminiature electrical connector for “drop-in”
compatibility with many competitive products. The 629F alsooffers an optional external zero set capability, allowing its
zero to be set remotely – a major advantage in many process
tools that do not permit easy access to the capacitancemanometer. The 45°C 627F offers Full Scale pressure/vacuum ranges from 0.02 to 20,000 Torr (0.026 mbar to 26.3bar), and the 100°C 628F has pressure/vacuum ranges from0.05 to 20,000 Torr (0.066 mbar to 26.3 bar).

624F and 625F Heated Absolute 			Baratron® Capacitance Manometers with
Integral Process Control Relays
These heated capacitance manometers are identical to the627F and 628F Baratron capacitance manometers exceptthat they add two (2) internally-mounted, independentlyadjusted electromechanical relays that can be set to open
or close at any pressure from 0.1% to 100% of the product’s
Full Scale measurement range. These relays can be used
to control external equipment, such as isolation valves,
other high vacuum gauges (such as hot-filament ionization
gauges), drive motors, etc. They are available in Full Scalemeasurement ranges from 10 to 1000 Torr (13 to 1333 mbar).

Capacitance Manometers
631D Heated (150°C or 200°C) Absolute 		Baratron® Capacitance Manometer
The 631D is a heated capacitance manometer, operating
at either 150°C or 200°C. It was specifically designed forthe most difficult semiconductor and biopharmaceuticalapplications known today, such as nitride CVD and DI-steam
sterilization. It is completely self-contained, requiring only
±15VDC input power and providing a 0-10VDC analog output
signal that is linear with pressure. It is about 40% smaller in
its physical size and draws 40% less electrical power thanearlier products, making it an ideal choice to upgrade existing
systems with 100°C or higher temperature capacitancemanometers. In standard form, it includes LED indicators for“At Temperature” and “Heater Failure”. The product is alsooffers the option of two (2) internally-mounted, independentlyadjustable electromechanical trip relays that can be set toopen or close at any pressure between 0.1% and 100% of the
manometer’s measurement range. Full Scale measurement
ranges from 1 to 1000 Torr (1.33 to 1333 mbar) are available.
E27F, E28F, and E29F Heated Absolute 		Baratron® Capacitance Manometers with
Etch Sensor
For certain semiconductor and industrial manufacturing
processes, heating the Baratron capacitance manometerto 100°C is sometimes not enough to prevent depositionof process byproducts that cause drift in the manometer’s
output and undesirable process excursions. For these difficult
processes, MKS offers a heated capacitance manometerwith a patented etch baffle in its sensor, which forces
condensable process byproducts to deposit on a baffle before
reaching the sensor’s diaphragm measurement element.
This greatly reduces the amount of zero drift in the Baratroncapacitance manometer, which in turn improves the overall
Cost of Ownership and process accuracy. These products
are available in Full Scale measurement ranges as low as
0.02 Torr (0.27 mbar), and with either 15-pin D-subminiature(E27F and E28F) or 9-pin D-subminiature (E29F) electricalconnectors.
D24F, D25F, D27F, and D28F Heated Dual-Range
Absolute Baratron® Capacitance Manometers
These products are designed for processes where thecustomer wishes to measure and control the process overa very wide pressure range. Standard single-range Baratroncapacitance manometers can be used in pressure control
systems down to at least 0.1% of their Full Scale range, but
at pressures below 0.05% of Full Scale, the analog output of
the manometer is low enough that some pressure controllers
may not be able to resolve the signal correctly. The dual-range
Baratron capacitance manometers solve that problem byadding a second output signal that is 2x, 5x, or 10x higher
in gain than the primary range, which increases the analog
output signal by that same amount. These Baratroncapacitance manometers are heated to either 45°C or 100°C,
are available with or without internally-mounted process
relays, and have a single 15-pin D-subminiature electricalconnector. Primary pressure ranges from 10 to 1000 Torr
(13 to 1333 mbar) are available, and the secondary pressure
range is 2x, 5x, or 10x less than the primary range.

622C

623F

626C

627F

628F

629F

624F

Unheated,
Terminal Block
Connector

Unheated, Terminal
Block Connector,
RelaysUnheated,
15-pinD-connector

Heated to 45°C,
15-pinD-connector

Heated to 100°C,
15-pinD-connector

Heated to 45°C or
100°C, 9-pin
D-connector

Heated to 45°C,
15-pin D-connector,
RelaysFull Scale Pressure Ranges - Torr (mbar)

1, 2, 10, 20, 100, 500
and 1000(1.33 to 1333)

10, 20, 100, 500 and
1000(13.3 to 1333)

0.1, 0.25, 1, 2, 10, 20,100, 500 and 1000
(0.13 to 1333)

0.02, 0.05, 0.1, 0.25, 1,
2, 10, 20, 100, 1000,
2000, 5000, 10000,
15000, and 20000(0.026 to 26315)

0.05, 0.1, 0.25, 1, 2, 10,
20, 100, 1000, 2000,
5000, 10000, 15000,
and 20000(0.066 to 26315)

0.02, 0.05, 0.1, 0.25, 1,
2, 10, 20, 100, 1000,
2000, 5000, 10000,
15000, and 20000(0.026 to 26315)

1, 10, 20, 100, 500,
1000, 2000, 5000,
10000, 15000, and20000 (1.33 to 26315)

Accuracy - % of Reading

0.25%

0.25%

0.25%

0.12% for 1 Torr andabove; 0.15% for 0.25,
0.1, and 0.05 Torr;
0.25% for 0.02 Torr

0.25% for 1 Torr andabove; 0.50% for below
1 TorrFor 45°C models: 0.12%
for 1 Torr and above;
0.15% for 0.25, 0.1, and0.05 Torr.
For 100°C models:
0.25% for 1 Torr andabove; 0.50% for below
1 Torr.

0.12%

Resolution - % of Full Scale

0.001%

0.001%

0.001%

0.001% for 0.10 Torrand higher; 0.002% for<0.10 Torr.

0.001% for 0.10 Torrand higher; 0.002% for<0.10 Torr.

0.001% for 0.10 Torrand higher; 0.002% for<0.10 Torr.

0.001%

Zero Temperature Coefficient - % FS/°C

0.005% for 10 Torrand higher; 0.010%
for 2 Torr; and 0.015%
for 1 Torr

0.005%

0.005% for 10 Torrand higher; 0.010%
for 2 Torr; and 0.015%
for 1 Torr

0.002% for 1 Torr andhigher; 0.005% for 0.1
and 0.25 Torr; 0.015%
for 0.05 Torr; 0.030%
for 0.02 Torr

0.002% for 1 Torr andhigher; 0.010% for 0.1
and 0.25 Torr; 0.015%
for 0.05 TorrSame as 627F and 628F
specifications for 45°C
and 100°C temperatures

0.002%

Span Temperature Coefficient % Reading/°C

0.04%

0.04%

0.04%

0.02%

0.02%

0.02%

0.02%

Ambient Operating Temperature

0 to 50°C

0 to 50°C

0 to 50°C

15 to 40°C

15 to 50°C

45°C models: 15 to 40°C
100°C models: 15 to
50°C.

15 to 40°C

Warmup Time

30 minutes

30 minutes

30 minutes

2 hours for 1 Torr andhigher; 4 hours for<1 Torr

2 hours for 1 Torr andhigher; 4 hours for<1 Torr

2 hours for 1 Torr andhigher; 4 hours for<1 Torr

2 hours for 1 Torr andhigher; 4 hours for<1 Torr

Baratron® 600-Series
Capacitance Manometers

Overpressure Limit

45 psia

45 psia

45 psia

45 psia

45 psia

45 psia

45 psia

Materials Exposed to Process Gases(excluding optional fittings)

Inconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy
alloysExposed Volume - cm3

6.3

6.3

6.3

6.3

6.3

6.3

6.3

Input Power Requirements*±15VDC (±5%)@ 35 mA±15VDC (±5%)@ 75 mA±15VDC (±5%)@ 35 mA±15VDC (±5%)@ 250 mA max±15VDC (±5%)@ 500 mA max

Same as 627F and 628F
specifications for 45°C
and 100°C temperatures±15VDC (± 5%)@ 400 mA max

Output Signal

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohmsTrip Relay Specifications

Not Applicable(2) independent relays,
SPDT contacts rated
at 1 amp @ 30VDC
or 0.5 amp @ 30 VAC
resistive. Each relay
adjustable from 0.1%
to 100% of FS range.
12.5 k ohm max
source impedance.

Not Applicable

Not Applicable

Not Applicable

Not Applicable(2) independent relays,
SPDT contacts rated
at 1 amp @ 30VDC
or 0.5 amp @ 30 VAC
resistive. Each relay
adjustable from 0.1%
to 100% of FS range.
12.5 k ohm max source
impedance.

Electrical Connector(s)5-post terminal strip(2) terminal strips,(1) 5-post and(1) 8-post"

15-pin D-subminiature
with thread locks

15-pin D-subminiature
with thread locks

15-pin D-subminiature
with thread locks

9-pin D-subminiature
with thread locks

15-pin D-subminiature
with thread locks,
15-pin D-subminiature
with slide locks,
terminal block adapter,
15-pin D-subminiature,filteredConnection Fitting - Standard

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

Connection Fittings - Optional**

8 Female VCR, 1.33"
OD Conflat, NW16-KF,
8 Female VCO, 2.75"
OD Conflat, NW25-KF

8 Female VCR, 1.33”
OD Conflat, NW16-KF,
8 Female VCO, 2.75”
OD Conflat, NW25-KF

8 Female VCR, 1.33" OD
Conflat, NW16-KF,
8 Female VCO, 2.75" OD
Conflat, NW25-KF

8 Female VCR, 1.33" OD
Conflat, NW16-KF,
8 Female VCO, 2.75" OD
Conflat, NW25-KF

8 Female VCR, 1.33" OD
Conflat, NW16-KF,
8 Female VCO, 2.75" OD
Conflat, NW25-KF

8 Female VCR, 1.33" OD
Conflat, NW16-KF,
8 Female VCO, 2.75" OD
Conflat, NW25-KF

8 Female VCR, 1.33"
OD Conflat, NW16-KF

Compliance

CE

CE

CE

CE

CE

CE

CE

Catalog Options

None

None

None

Temperature/Heater
Status LEDs; 15-pin
D-connector
with slide locks

Temperature/Heater
Status LEDs; 15-pin
D-connector
with slide locks

Heater Status
Indication;
External Zero Adjust(not available on 0.02
Torr/45°C or
0.05 Torr/100°C
configurations

15-pin D-connector
with slide locks;
Terminal Block Adaptor*24VDC input power available for some models; contact MKS Applications for assistance.			
**Not all fittings available for all pressure ranges; contact MKS Applications for assistance.

Specifications
625F

631D

E27F

E28F

E29F

D24F

D25F

D27F

D28F

Heated to 100°C,
15-pin D-connector,
RelaysHeated to 150°C
or 200°C, 15-pin
D-connector,
Relays Optional

Etch Sensor, Heated to
45°C, 15-pin
D-connector

Etch Sensor, Heated
to 100°C, 15-pin
D-connector

Etch Sensor, Heated to
45°C or 100°C,
9-pin D-connector

Dual Range,
Heated to 45°C,
15-pin D-connector,
RelaysDual Range,
Heated to 100°C,
15-pin D-connector,
RelaysDual Range,
Heated to 45°C,
15-pin D-connector

Dual Range,
Heated to 100°C,
15-pin D-connector

1, 10, 20, 100, 500,
1000, 2000, 5000,
10000, 15000, and20000 (1.33 to 26315)

1, 2, 10, 100, and 1000
(1.33 to 1333)

0.02, 0.05, 0.1, 0.25,
1, 2, 10, 20, and 100(0.026 to 133)

0.05, 0.1, 0.25, 1, 2,
10, 20, and 100(0.026 to 133)

0.02, 0.05, 0.1, 0.25, 1,
2, 10, 20, and 100 (0.026
to 133)

10, 100, and 1000
(13.3 to 1333)

10, 100, and 1000
(13.3 to 1333)

1, 10, 100, and 1000
(1.33 to 1333)

1, 10, 100, and 1000
(1.33 to 1333)

0.25%

0.50%

0.12% for 1 Torr andabove; 0.15% for 0.25,
0.1, and 0.05 Torr;
0.25% for 0.02 Torr

0.25% for 1 Torr andabove; 0.50% for below
1 TorrFor 45°C models: 0.12%
for 1 Torr and above;
0.15% for 0.25, 0.1, and0.05 Torr. For 100°C
models: 0.25% for 1 Torr
and above; 0.50% for
below 1 Torr.

0.12%

0.25%

0.12%

0.25%

0.001%

0.001%

0.001% for 0.10 Torrand higher; 0.002% for<0.10 Torr.

0.001% for 0.10 Torrand higher; 0.002% for<0.10 Torr.

0.001% for 0.10 Torrand higher; 0.002% for<0.10 Torr.

0.001%

0.001%

0.001%

0.001%

0.002%

150°C models: 0.004%
for 10 Torr and higher;
0.006% for 1 and 2
Torr. 200°C models:
0.008% for 10 Torr andhigher; 0.016% for 1
and 2 Torr.

0.002% for 1 Torr andhigher; 0.005% for 0.1
and 0.25 Torr; 0.015%
for 0.05 Torr; 0.030%
for 0.02 Torr

0.002% for 1 Torr andhigher; 0.010% for 0.1
and 0.25 Torr; 0.015%
for 0.05 TorrSame as E27F and E28F
specifications for 45°C
and 100°C temperatures.

0.002%

0.002%

0.002%

0.002%

0.02%

0.10%

0.02%

0.02%

0.02%

0.02%

0.02%

0.02%

0.02%

15 to 50°C

15 to 50°C

15 to 40°C

15 to 50°C

45°C models: 15 to
40°C. 100°C models: 15
to 50°C.

15 to 40°C

15 to 50°C

15 to 40°C

15 to 50°C

2 hours for 1 Torr andhigher; 4 hours for<1 Torr

4 hours

2 hours for 1 Torr andhigher; 4 hours for<1 Torr

2 hours for 1 Torr andhigher; 4 hours for<1 Torr

2 hours for 1 Torr andhigher; 4 hours for<1 Torr

2 hours

2 hours

2 hours

2 hours

45 psia

45 psia

45 psia

45 psia

45 psia

45 psia

45 psia

45 psia

45 psia

Inconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy alloys

Inconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy
alloysInconel and Incoloy
alloys

6.3

6.2

6.3

6.3

6.3

6.3

6.3

6.3

6.3

±15VDC (±5%) @ 600
mA max±15VDC (± 5%) @ 1.0
A max±15VDC (±5%) @ 250
mA max±15VDC (±5%) @ 500
mA maxSame as E27F and E28F
specifications for 45°C
and 100°C temperatures.

±15VDC (±5%) @ 400mA max±15VDC (±5%) @ 600
mA max±15VDC (±5%) @ 250
mA max±15VDC (±5%) @ 500
mA max0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms

0-10VDC into > 10
k-ohms(2) independent relays,
SPDT contacts rated
at 1 amp @ 30VDC
or 0.5 amp @ 30 VAC
resistive. Each relay
adjustable from 0.1%
to 100% of FS range.
12.5 k ohm max source
impedance.

(2) process pressure& (1) heater failure trip
relay mounted internally. Pressure relays
independently adjustable from 0-100% FS,
DPDT contacts rated at
1 amp @ 30VDC
or 0.5 amps @ 30VAC.
Relays conform to UL1950 Basic Insulation
at 125V.

Not Applicable

Not Applicable

Not Applicable(2) independent relays,
SPDT contacts rated
at 1 amp @ 30VDC
or 0.5 amp @ 30 VAC
resistive. Each relay
adjustable from 0.1%
to 100% of FS range.
12.5 k ohm max source
impedance.

(2) independent relays,
SPDT contacts rated
at 1 amp @ 30VDC
or 0.5 amp @ 30 VAC
resistive. Each relay
adjustable from 0.1%
to 100% of FS range.
12.5 k ohm max source
impedance.

Not Applicable

Not Applicable

15-pin D-subminiature
with thread locks, 15pin D-subminiature withslide locks, terminal
block adapter, 15-pin Dsubminiature, filtered15-pin D-subminiature
with thread locks

15-pin D-subminiature
with thread locks

15-pin D-subminiature
with thread locks

9-pin D-subminiature
with thread locks

15-pin D-subminiature
with thread locks

15-pin D-subminiature
with thread locks

15-pin D-subminiature
with thread locks

15-pin D-subminiature
with thread locks

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

1/2" OD (12.7 mm)
tubulation

8 Female VCR, 1.33"
OD Conflat, NW16-KF,
NW 16 KF (rightangle), NW25-KF

8 Female VCR, NW16KF, 1.5" OD TriClover, 2"
OD TriClover

8 Female VCR, 1.33"
OD Conflat, NW16-KF

8 Female VCR, 1.33"
OD Conflat, NW16-KF

8 Female VCR, 1.33" OD
Conflat, NW16-KF

8 Female VCR, 1.33"
OD Conflat, NW16-KF,
NW25-KF

8 Female VCR, 1.33"
OD Conflat, NW16-KF,
NW25-KF

8 Female VCR, 1.33"
OD Conflat, NW16-KF,
NW25-KF

8 Female VCR, 1.33"
OD Conflat, NW16-KF,
NW25-KF

CE

CE

CE

CE

CE

CE

CE

CE

CE

15-pin D-connector withslide locks; Terminal
Block Adaptor

Relay Settings

Heater Status
Indication; Horizontal
Calibration

Heater Status
Indication; Horizontal
Calibration

Heater Status Indication;
External Zero Adjust (notavailable
on 0.02 Torr/45°C or 0.05
Torr/100°C
configurations;
Horizontal calibration

15-pin D-subminiature
with slide locks

15-pin D-subminiature
with slide locks

15-pin D-subminiature
with slide locks

15-pin D-subminiature
with slide locks

Displays, Power Supplies, and Isolation Systems
For customers who do not wish to arrange for their own delivery of electrical power to their Baratron capacitancemanometer(s), MKS offers four (4) different displays and power supplies that can be used with most of the products
described above. The descriptions below give a basic idea of the different models and their attributes.
PR4000 Display/Power Supply
The PR4000 display can operate one or two of any current
600-series Baratron capacitance manometers, including thehigh-temperature 631D. Its LCD display screen is easy toread, and it also offers two (2) independently-adjustable trip
relays for external device control. Its standard outputs are
high-resolution (16-bit) analog output and RS232C digital, andit can be equipped with RS485 digital communications. It canalso remotely zero the 629F manometer equipped with that
option.
660C Single-Channel 				Display/Power Supply
The 660C is a microprocessor-controller single-channel
power supply and display that is designed for use withall unheated and 45°C heated Baratron capacitancemanometers. It offers a 4.5-place digital display of theBaratron capacitance manometer’s measured pressure, andhas a single-menu structure for easy setup and configuration.
It also offers four (4) open collector alarm trip points forcontrol of external devices. It can be equipped with an
RS232C digital interface, and it mounts in a compact 1/8 DIN
package.
PDR2000 Dual-Channel 				Power Supply/Display
The PDR2000 is a low-cost two-channel power supply/display
capable of supporting most 600-series Baratron capacitancemanometers. It offers a very compact size (1/8 DIN package),two (2) independently-adjustable relay trip points for external
device operation, and selectable engineering units. It also canbe ordered with an optional RS232C digital interface, and has
the ability to scale to non-standard pressure ranges.
CV7600 Isolation Systems
The MKS CV7600 Isolation System is designed to automatically maintain a heated 600 series Baratron capacitancemanometer at vacuum throughout a process cycle. The
Isolation System consists of either a 627F or 628F heatedprocess Baratron capacitance manometer, an MKS
Pneumatic Isolation Valve, and an R750B mini-Baratroncapacitance manometer and Relay Module. The R750B
Relay Module monitors the process pressure, and provides
a contact closure that is used to open or close a (customersupplied) isolation valve in the pneumatic line to the MKS
Pneumatic Isolation Valve. This solenoid closes the MKS
valve whenever the process pressure exceeds the Full Scale
range of the 600-series Baratron capacitance manometer,
maintaining it in its optimum working range. Many different
Baratron capacitance manometer configurations and trip point
options are available; please contact the MKS Applicationsgroup or your MKS Account Manager for more information.

600-Series Baratron® 			
Capacitance Manometer 			
Displays and Power Supplies

Power Supplies/
Digital Readouts

PR4000

PDR2000

660C

One or two channels,
multiple relays, high power

Economical single/dual
channel readout

Standard-series
two-channel readout

Display Type

Digital, 4½-place LCD

Digital, 4-place Red LED

Digital, 4½-place LED

Number of Channels

1 4000B
2 4000B

2

1

Input Power Required

115/230 VAC, 50/60 Hz

Universal input; 110-240 VAC; 47-63 Hz,
40 VA, IEC 320 instrument power input
receptacle

Standard: 120 VAC ±10, 50/60 Hz
Optional: 240, 100, or 220 VAC

Input Signal

0 to ±10 VDC
0 to ±5 VDC
Other, scalable

0 to +10 VDC

0 to ±10 VDCPower Supply Output±15 VDC @ 0.8 Amps
±15 VDC @ 1.5 Amps
24 VDC @ 1 Amp±15 VDC @ 750 mA±15 VDC ±5% @ 0.25 Amps max.

Signal Output (analog)

1 analog output per channel with 16 bit
resolution

Linear, 4 VDC for F.S. output, (0.5 VDC per
decade), 0-10 VDC each transducer

0 to ±VDC capacitance manometer passed
through, not zeroed

Signal Output (digital)

Optional RS-232, RS-485

Linear, 4 VDC for F.S. output,(0.5 VDC per decade), 0-10 VDC eachtransducer

Optional: RS232 interface outputs pressure
and alarm status, and provides setup
input of alarm trip points, hysteresis, anddisplay zero

Trip Points

2, fully programmable

Two relays, contacts rated at 2 Amps @30 VDC

4 open collector transistors (2 high, 2 low)with adjustable hysteresis and status LEDs;
adjustable from 1 to 100%Trip Point Relay Ratings

2 5PDT, 2 Amps @ 30 VDC,
1 Amp @ 230 VAC

Two relays, contacts rated at 2 Amps @30 VDC

Open collector transistors rated for
50 Volts/100mA max.

Operating Temperature Range

15° - 40°C

2° - 50°C

0° - 55°C

Compatible Instruments

622, 623, 624, 625, 626, 627, 628*; OtherMKS products: 120*, 220, 223, 230*, 430,
619*, 621*, 631*, 722, 740, 750, 850,
852, 870, 872 capacitance manometers;
640 pressure controller; 358, 558, 179
mass flow meters, 1179, 1559 mass flow
controllers

628 (one only); Other MKS products: 622,
623, 624, 627, 722, 750, 850, 852, 870,
872, 223(unidirectional only)

622, 623, 624, 626, 627; Other MKS
products: 223, 722, 740, 750, 850,
852, 870, 872 capacitance manometers;
Display only for 120, 220, 619, 621, 631
capacitance manometers; 358, 558, 179
mass flow meters

Mounting

Half 19-inch rack mount

1/8” DIN enclosure;
94 mm x 47 mm x 165 mm

1/8” DIN enclosure;
96 mm x 48 mm x 140 mm, case mounts
in 92 mm x 45 mm panel cutout

Channel Selection

Dual display

User selected by front panel push button

N/A

Compliance

CE

CE

CE

Additional Information

Wide array of standard features. Options
for digital communicators and highpower output for temperature-controlled
manometers

RS-232 (9600 baud, 8 data bits, no parity,
1 stop bit)
Low cost, compact enclosure for two
manometers

For use with both capacitance manometersand mass flow meters; input scaler
provides direct reading for any sensor
range; display can be remotely zeroed.

*Subject to total power consumption of connected instrument(s) and PR4000 options

622C

623F

624F and 625F
D24F and D25F

626C

Dimensional Drawing —Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

Dimensional Drawings

627F and 628F
E27F and E28F
D27F and D28F

631D

Dimensional Drawing —Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

629F
E29F

CV7627

660C

PR4000

PDR2000

Dimensional Drawing —Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

Ordering Information
622C, 623F, 626C, 627F, 628F, E27F, and E28F			
Ordering Code Example: 627F11TBC1B
Code

Configuration
ExampleAbsolute Capacitance Manometers
Unheated; terminal block connector; standard sensor
Unheated; relays; terminal block; standard sensor
Unheated; 15-pin D-connector; standard sensor
45°C sensor temp; 15-pin D-connector; standard sensor
100°C sensor temp; 15-pin D-connector; standard sensor
45°C sensor temp; 15-pin D-connector; etch sensor
100°C sensor temp; 15-pin D-connector; etch sensor

622C					623F					626C					627F627F					628F					E27F					E28F		

Pressure Ranges Full Scale (Torr)
0.02 (available on 627F and E27F)
0.05 (available on 627F, E27F, 628F, E28F)
0.10 (not available on 622C, 623F)
0.25 (not available on 622C, 623F)
1 (not available on 623F)
2 (not available on 623F)
10
20
100
200 (available on 623F, 627F, 628F)
500 (not available on E27F, E28F)
1000 (not available on E27F, E28F)
2000 (available on 627F, 628F)
5000 (available on 627F, 628F)
10,000 (available on 627F, 628F)
15,000 (available on 627F, 628F)
20,000 (available on 627F, 628F)
25,000 (available on 627F, 628F)

U2T						U5T						.1T						RET						01T						02T						11T						21T						12T						
11T22T						52T						13T						23T						53T						14T						RBT						24T						RCTFittings
1/2” OD (12.7 mm) tubulation
Swagelok 8 VCR, female
1.33” OD Conflat, rotatable1
NW16-KF2
NW25-KF2
Swagelok 8 VCO, female
2.75” OD Conflat, rotatable1

A						B						C 						
BD						Q						E						L			

Accuracy (% of Reading)
0.12% (627F and E27F 1 Torr range and higher)
0.15% (627F and E27F in 0.25, 0.10, 0.05 Torr ranges)
0.25% (622C, 623F, 626C, 628F, E28F, and 0.02 Torr 627F and E27F)
0.50% (628F and E28F in 0.25, 0.10, 0.05 Torr ranges)

C						D						
CE						F		

Options (not available on 622C, 623F, 626C)
Standard configuration, vertical calibration1						
(627F, E27F, 628F, E28F only; 1 Torr and higher)							Temperature/Heater status, vertical calibration2						1
(627F, E27F, 628F, E28F only; 1 Torr and higher)							Standard configuration, horizontal calibration (E27F, E28F only; < 1 Torr)
5						Temperature/Heater status, horizontal calibration (E27F, E28F only; < 1 Torr)
6
Connector (not available on 622C, 623F, 626C)
15-pin D-connector, thread locks (627F, E27F, 628F, E28F only)
15-pin D-connector, slide locks (627F, E27F, 628F, E28F only)
1

B						
BP

Available only on ranges of 1000 Torr and less.								Available only on ranges of 5000 Torr and less, and 2000 and 5000 Torr ranges require use of an MKS overpressure ring.		
3
Other relay settings and logic available; contact MKS Applications for assistance.
		
2

624F and 625F

					
					
			
Configuration
Ordering Code Example: 624F11TCECB
CodeExampleAbsolute Capacitance Manometers
45oC sensor temperature, relays
100oC sensor temperature, relays

624F					
624F
625F

Pressure Ranges Full Scale (Torr)
1
2
10
20
100
500
1000
2000
5000
10000
15000
20000

01T						02T						11T						21T						12T						52T						
11T13T						23T						53T						14T						RBT						24T				

Fittings
1/2” OD (12.7 mm) tubulation
Swagelok 8 VCR, female
1.33” OD Conflat, rotatable1
NW16-KF2
NW 16 KF, right angle
NW25-KF2

BA						CE						HA						CEGA						GE						GCAccuracy (% of Reading)
0.12% (624D only)
0.25% (625D only)

C 						
C
EElectrical Connector
15-pin D-connector, thread locks
15-pin D-connector, slide locks
Terminal block adaptor
15-pin D-connector, filtered

B						P						
BU						V

631D			Ordering Code Example: 631D11TBFHBA
Code

			
Configuration
ExampleAbsolute Capacitance Manometers
15-pin D-connector

631D
631D				Pressure Ranges Full Scale (Torr)
1
2
10
30
100
1000

01T						02T						11T						
11T31T						12T						13T			

Fittings
1/2” OD (12.7 mm) tubulation
Swagelok 8 VCR, female
NW16-KF
1.5” OD Sanitary
2.0” OD SanitaryA						B						
BD						M						N

Accuracy (% of Reading)
0.50%

F

Sensor Temperature
150oC
200oC

H						HP

Relay Configurations3
No relays
TP-A activates above 50% FS; TP-B activates above 50% FS
TP-A activates above 50% FS; TP-B activates below 50% FS
TP-A activates below 50% FS; TP-B activates below 50% FS
TP-A activates below 50% FS; TP-B activates above 50% FS

None					AA						
BAAB						BB						BA				

F

Ordering Information
629F and E29F
		
Ordering Code Example: 629F11TBCJ4B

Code

Configuration
ExampleAbsolute Capacitance Manometers
9-pin D-connector, standard sensor
9-pin D-connector, etch sensor

629F					
629F
E29F

Pressure Ranges Full Scale (Torr)
0.02 (available on 45oC models only)
0.05
0.10
0.25
1
2
10
20
100
1000 (available on 629D only)

U2T 					U5T						.1T						RET						01T						
11T02T						11T						21T 					12T 					13TFittings
1/2” OD (12.7 mm) tubulation
Swagelok 8 VCR, female
1.33” OD Conflat, rotatable1
NW16-KF2
Swagelok 8 VCO, female (629D only)

A						B						
BC 						D						E			

Accuracy (% of Reading)
0.12% (45oC products in 1 Torr range and higher)
0.15% (45oC products in 0.25, 0.10, 0.05 Torr ranges)
0.25% (100oC products 1 Torr range or higher, and 0.02 Torr 45oC products)
0.50% (100oC products in 0.25, 0.10, 0.05 Torr ranges)

C						D						
CE						F

Sensor Temperature
45oC
100oC

J						JL		Options
Standard configuration, vertical calibration1						Heater status indication, vertical calibration2						3						External zero, vertical cal (N/A for 0.02 Torr or 100oC/0.05 Torr products
Heater status, external zero, vertical cal
4						o
(N/A for 0.02 Torr or 100 C/0.05 Torr products)							Standard configuration, horizontal calibration (< 1 Torr only)
5						
4Heater status indication, horizontal calibration (< 1 Torr only)
6						External zero, horizontal cal (45oC products with 0.05, 0.10, 0.25 Torr ranges;
7						100oC products with 0.10 and 0.25 Torr ranges)							Heater status, external zero, horizontal cal
8						
(45oC products with 0.05, 0.10, 0.25 Torr ranges; 							100oC products with 0.10 and 0.25 Torr ranges)				
Connector
9-pin D-connector, thread locks
9-pin D-connector, slide locks

B						
BP

Ordering Information
D24F and D25F			
Ordering Code Example: D24F11TBCB0
Code
Absolute Capacitance Manometers
Dual range, 45oC sensor temperature, relays
Dual range, 100oC sensor temperature, relays

			Configuration
ExampleD24F					
D24F
D25F

Pressure Ranges Full Scale (Torr)
10		
11T						
11T100		12T						1000		13T
Fittings
1/2” OD (12.7 mm) tubulation
Swagelok 8 VCR, female
1.33” OD Conflat, rotatable
NW16-KF

A						B						
BC 						
DAccuracy (% of Reading)
0.12% (D24D only)
0.25% (D25D only)

C 						
C
EElectrical Connector
15-pin D-connector, thread locks
15-pin D-connector, slide locks

B						
BP

Secondary Range Gain Ratio
2 to 1
5 to 110 to 12						05						0

D27F and D28F			
Ordering Code Example: D27F11TCEC1B0
Code
Absolute Capacitance Manometers
Dual range, sensor temperature 45oC
Dual range, sensor temperature 100oC

Configuration
ExampleD27F					D27FD28F				Pressure Ranges Full Scale (Torr)
1		
01T						10		11T						
11T100		12T						1000		13T
Fittings
1/2” OD (12.7 mm) tubulation
Swagelok 8 VCR, female
Swagelok 8 VCO, female
NW16-KF
1.33” OD Conflat, rotatable

BA						CE						CEDA						GA						HAAccuracy (% of Reading)
0.12% (1 to 1000 Torr only, D27D)
0.25% (1 to 1000 Torr only, D28D)

C 						C
EOrientation/Calibration
Vertical calibration (standard for 1 to 1000 Torr)		
Horizontal calibration (< 1 Torr only)		

1						15					

Electrical Connector
15-pin D-connector, thread locks
15-pin D-connector, slide locks

B						
BP

Secondary Range Gain Ratio
2 to 1
5 to 110 to 12						05						0600 Series - 2/19		
© 2009-2019 MKS Instruments, Inc.
All rights reserved.

MKS Instruments, Inc.
Global Headquarters

MKS Instruments, Inc.		
Pressure & Vacuum Measurement Solutions

2 Tech Drive, Suite 201
Andover, MA 01810

Six Shattuck Road
Andover, MA 01810

Tel: 978.645.5500
Tel: 800.227.8766 (in U.S.A.)
Web: www.mksinst.com

Tel: 978.975.2350

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local
government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark
and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. Inconel® and Incoloy® are registeredtrademarks of Inco Alloys International, Inc., Huntington, WV. Swagelok®, VCR® and VCO® are registered trademarks of
Swagelok Corp., Solon, OH. Conflat® is a registered trademark of Varian Associates, Inc., Lexington, MA.