Datasheet

SE50A-ECO 200DS FT-IR Metrology Tool
For Material Characterization
Systems Engineering combines the Thermo
Fisher Scientific′s FT-IR measurement
technology and JEL's sorter system tointroduce a next generation "FT-IR SE50ECO series" as semiconductor material
characterization tools.
Application Specifications
Epitaxial Thickness
Range
Precision▶ 0.3 - 750 μm▶ ± 0.01 μm※ Epitaxial Thickness measurable.

Carbon & Oxygen in Silicon
Oxygen*▶ 0.1 to 10ppmA ▶ 0.3 to 35 ppmA
Range
Precision ▶STD 0.05 ppmA ▶ STD0.08 ppmA
CarbonOperation Software*All carbon and oxygen values reported using ASTM 1979 calculations.

Boron & Phosphorus
Boron▶ 1 - 10 Wt%
RangePrecision ▶ ± 0.05 Wt%

Phosphorus▶ 2 - 12 Wt%▶ ± 0.05 Wt%

Hydrogen in Silicon NitrideSi-H▶ 3 - 30 Atom%
Range
Precision ▶ ± 0.3 Atom%N-H▶ 3 - 30 Atom%▶ ± 0.3 Atom%

Fluorine in SiO2 Films
Thickness
Fluorine Concentration▶ 3000 - 10000Å
▶ STD< 0.2 Fwt%▪
▪
▪

Carbon-doped Films
Silicon Nitride
Silicon Oxide▪

Intuitive Graphical User Interface
Easy-to-Use operator and Authorizedengineer user levels
Easy to learn and use, giving optimum
efficiency
Measurement result,display and data logging.

Specifications
RELIABILITY
MTBF
MTTR
MTTS
UptimeOPTICAL> 6 months
48 hours
4 hours> 97%

Beam Diameter
Analysis Angle

Computer Specifications
Operation
System

7800 - 350cm-1
0.5cm-1
Standard 8mm(Variable)
15°

Spectral Range
Spectral Resolution

FACILITY REQUREMENTS
100 - 240VPower(50/60Hz)-61±10kPa (G)House Vacuum
30L/min (ANG)
Pressurized CDA none
Gas
0.2MPa (G)N2Windows 10 64bit
Memory 32GB
Hard Disk SSD RAID1

15L/min (ANR)

SE50 Product LineHardware

SoftwareProduct#Model

Wafer size

StationHandring

Product#Model

ECO-02S

SE50S-ECO

2-12 inch

Stage

Edge Grip

ECO-1EP

Epitaxial Thickness

ECO-1CO

Carbon & Oxygen in Silicon

ECO-1BP

Boron & Phosphorus in BPSG or PSG
Films

ECO-031

SE50A-ECO_150SS

2-6 inchSingleVacuum

ECO-032

SE50A-ECO_150DS

2-6 inchDoubleVacuum

ECO-041

SE50A-ECO_200SS

4-8 inchSingleVacuum

ECO-1SN

Hydrogen in Silicon Nitride

ECO-042

SE50A-ECO_200DS

4-8 inchDoubleVacuum

ECO-1SF

Fluorine in Silicon Oxside Films

Vacuum

ECO-1MB

Multi Background Option

ECO-1GM

GEM/SECS Host Communication

ECO-1SH

Share File Host Communication

ECO-1DS

Double Station Sorting Support

ECO-1FS

Four Station Sorting Support

ECO-1SSSix Station Sorting Support

ECO-1OH

Hydrogen in Silicon Software

ECO-1SCSiC Epitaxial Thickness Support

ECO-1SU

Shuttle Background Software

ECO-1CH

Carbon-doped Films

ECO-1SO

Silicon Oxiside Film Analysis (SiXx)

ECO-043D

SE50A-ECO_200DSMIF 8 inch

Double SMIF

ECO-044

SE50A-ECO_200FS

4-8 inch

Four

Vacuum

ECO-051

SE50A-ECO_300SS

8-12 inch

SingleVacuum

ECO-052

SE50A-ECO_300DS8-12 inch

DoubleVacuum

ECO-051F

SE50A-ECO_300SF

8-12 inch

Single Foup

Vacuum

ECO-052F

SE50A-ECO_300DF

8-12 inch

Double Foup

Vacuum

ECO-051E

SE50A-ECO_300SSE

12 inchSingleEdge Grip

ECO-052E

SE50A-ECO_300DSE

12 inchDoubleEdge Grip

ECO-051FE

SE50A-ECO_300SFE

12 inchSingle Foup

Edge Grip

ECO-052FE

SE50A-ECO_300DFE

12 inchDouble Foup

Edge Grip

THZ-02

SE50A-THz_150DS

4-6 inchDoubleVacuumOptionTHZ-04

SE50A-THz_150FS

4-6 inch

Four

VacuumProduct#THZ-06

SE50A-THz_150SiS

4-6 inch

SixVacuumECO-FA1

200mm wafer adapter for FOUP system

ECO-FA2

Tag Reader for FOUP & SMIF system
・Keyence : BL600
・Omron : V640

ECO-FA3

E84 OHT Support for OHT COM module

ECO-FA4

Safety Light Curtain for OHT

ECO-FA5

Sensing lonizer System

ECO-FA6

Water ID Reader Module

ECO-FA7

Optical FFU (Fan Filter Unit)

ECO-FA8

Share File Host Communication

Model

Head Office: 1-4-12 Koishikawa Bunkyo-ku, Tokyo 112-0002 Japan		TEL +81-3-3868-2634 FAX +81-3-3868-2633

Factory: 3-5-8 Funado Itabashi-ku, Tokyo 174-0041 Japan

TEL +81-3-6279-8908 FAX +81-3-6279-8907

West Branch: Miyahara Yodogawa-ku Oosaka-shi, Oosaka 532-0003 Japan		TEL +81-6-6868-9790 FAX +81-6-6868-9796

Made in Japan*The appearance and specifications described in this brochure are subject to change without notice for improvement purposes. 20240807