Founded in Kumamoto more than 30 years ago, Tokyo Electron Kyushu has since been winning strong support from its customers by developing high value-added products and delivering them to market quickly. We generate high profits from oursupply of high-quality, low-cost products and have been actively investing in the development of next-generation equipment.
This, of course, couldn’t be possible without the cooperation of our local community and business partners in Kyushu andother regions. I would like to express my deepest gratitude for the support they have extended to us.
Looking to the world from here in Kumamoto, we constantly take on R&D and production challenges. We remain committed todeveloping new technologies and products that will amaze the world, while satisfying our customers with high quality andexcellent cost performance. Hoping to remain a company that everyone can truly trust, we will continuously seek out opportunities to grow and to expand into new areas, while valuing the people, technology, and connection with society we cultivate in
the course of our business.
The electronics industry in which we operate is a market that has significant growth potential. To meet the increasingly diverseand complex needs of our customers, we will remain strong in our commitment to overcoming technology challenges andensure our business growth.
In doing so, our most important thing is the people who make it possible. The Tokyo Electron Group is a company that values
people. We will continue to strive to empower our employees and their families, business partners and other stakeholders toenvision a bright, hopeful future. At the same time, we will always put the health and safety of everyone first and actively work
to preserve our environment and to contribute to our local community.
We look forward to your continued warm support.
Shinichi Hayashi
President and Representative Director
Tokyo Electron Kyushu Ltd.

CORPORATE DATA● Tokyo Electron Kyushu Ltd.

Established: April 1, 1991
Capital: 2 billion yen
Number of employees : 2,117 (as of April 1, 2023)● Head Office

1-1 Fukuhara, Koshi-shi
Kumamoto 861-1116
Tel: +81-96-349-5500● Ozu Office272-4 Takaono, Ozu-machi
Kikuchi-gun, Kumamoto 869-1232
Tel: +81-96-292-1600

BUSINESS DESCRIPTION
Coater/DeveloperWe develop, design, manufacture, andinstall photoresist coater/developer
equipment. Coater/developer equipment is a system that is used in theprocess before and after transferring acircuit pattern onto a silicon wafer. The
process starts by applying a UV-sensitive agent called photoresist on thewafer to form a resist film of uniform
thickness. The photoresist-coatedwafer is then exposed to ultraviolet(UV) light with a stepper (lithographydevice) and returned to the coater/developer for development. Finally, thewafer is sent to the etch system toremove the films of unmasked area.
Our company has an overwhelming
market share in the field of coater/developer systems.

CLEAN TRACK™
LITHIUS Pro™ Z

Surface Preparation
Systems
We develop, design, manufacture andinstall cleaning systems.
As our surface preparation systems, wehave a lineup of single-wafer and batchcleaning systems that remove foreign
objects on the wafter surface between
process steps and leverage uniform andhighly selective etching and patterncollapse free drying technologies, supporting diverse process applications. As
semiconductor scaling and performanceenhancement continue, the cleaningsystem market is becoming increasingly
important and expected to support moremanufacturing steps.
To meet these market expectations, wewill focus more on developing and manufacturing systems with environmentally friendly features on top of highproductivity and outstanding process
performance.

CELLESTA™ -i MD

Please visit www.tel.com for more information.

3D Integration
We design, manufacture and installsemiconductor production systems forhigh-density 3D devices, which areexpected to become more important
than ever and to see further growth indemand.
We have a lineup of wafer bondingsystems and a laser edge trimming
system, which represent a fusion ofvarious cutting-edge technologies
proven in our coater/developer, cleaning and other systems that have a highmarket share and good track record ofmass production.
In addition, our laser edge trimming
system’s processing technology greatly
reduces the environmental impact ofchip manufacturing compared toconventional processing technology.

Synapse™ Si

Ulucus™ L

2023.09
PR3 61-0189