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Valve Solutions

UHV Valve

Metal-sealed vacuum isolation valve
The MKS UHV Valve is lightweight and has a compact profile, enabling it to fit easily intovacuum systems where space is tight. The UHV Valve has a copper bonnet seal and anelastomer nosepiece seal which limits outgassing and permeation allowing a lower basesystem pressure. We have optimized the welded stainless steel bellows stroke length toensure a long cycle life while maintaining high conductance.
Extremely durable and dependable, the UHV Valve’s lifetime can extend to 1,000,000 cycles
under clean conditions, greatly increasing your system’s uptime.
Another standard feature is a TIG fusion-welded body made of high grade, corrosion resistant
304 stainless steel for significantly fewer entrapment areas, resulting in less contaminants. The
body is available with a choice of bead blasted or electropolished finishes.
Electro-pneumatic control is available for the UHV Valve with the optional air solenoids. In theevent of power or air loss, the pneumatic UHV Valve will automatically close.

Features & Benefits

Applications• Metal bonnet seal limits outgassing andpermeation, allowing a lower base systempressure

The MKS UHV Valve is a compact vacuum
valve designed for use in ultra-high vacuum
systems, for physical vapor deposition, highenergy physics, mass spectrometry andother applications that require an ultracleanenvironment.

• Surface finish options of electropolish orbead blast• Compact design• Welded bellows• Spring-to-close, air-to-open pneumatic
valve (manual version also available)• High purity, corrosion resistant,
304 stainless steel body• Angle or offset inline option• Available in port diameters of 1 and 1½inches• Choice of ISO-KF or CF flanges

Pneumatic Valves

Manual Valves

CCC

DDGDGC
DB

B

FF
B

BF

A

H
A

E

A
EA

A
EAngle Valve

A
B
C
DE
F
G
H

Offset Inline Valve

NW 25

NW40

NW 25

NW 40

2.40 (61)5.87 (149)
2.75 (70)
1.90 (48)1.75 (44)7.07 (180)1.89 (48)
N/A

2.49 (63)6.89 (175)3.38 (86)2.33 (59)2.25 (59)8.09 (205)1.89 (48)N/A

4.84 (123)6.04 (153)
2.75 (70)
1.90 (48)1.75 (44)7.24 (184)1.89 (48)1.00 (25)

4.92 (125)7.29 (185)3.38 (86)2.33 (59)2.25 (59)8.49 (216)1.89 (48)1.50 (38)Dimensional Drawing

Angle Valve

AB
C
DEF

Inline Valve

NW 40

NW 40

2.49 (63)6.76 (172)3.38 (86)2.75 (70)2.25 (57)
N/A

4.92 (125)
6.97 (177)3.38 (86)2.75 (70)2.25 (57)
1.50 (38)Specifications
ZZ

Z

A

E

NW 25

NW 40

4.50 (114)

5.18 (132)

Vacuum Range

Atmosphere to below 10-9 Torr

Helium Leak Rate

Less than 1.0 x 10-9 std cc/secCylinder Air Pressure

90 ± 30 psig

Maximum Bakeout Temperature

150° C

Typical Life

1,000,000 cycles

Specifications
Port Size
in. (NW)

WeightISO-KF and Solenoid
lb. / (kg)Cylinder Volume
in.3 (cm3)

Actuation Timeat 100 psi msec
Opening (Closing)Blow By Pressurepsia

Maximum Internal
Spring Closing
Pressure psiaAngle

OffsetInline1.0(25)3(1.4)

3(1.4)

3.7(61)40(90)

60

30

1.5(40)5(2.3)

5(2.3)

5.9(97)60(90)

5060

Specifications

NW 25 UHV Valve Ordering Information
Body Configuration
UHV-25-XXX

Finish-XActuation
X

Seal TypeXX

Pneumatic Solenoid Voltage-XXX

Select 1

Select 1

Select 1

Select 1

Select 1

UHV-25-AKK

B

ISO-KF 25, Angle

Bead Blasted

UHV-25-IKKE	

ISO-KF 25, Offset Inline

Electropolish

UHV-25-ACC	
CF 2 3/4'', Angle

NPneumatic, Copper
Bonnet Seal

VN

12DViton - Pneumatic

12 VDC24DL	

24 VDC

Pneumatic, Copper
Bonnet Seal,
w/Limit Switch

24 VAC 50/60 Hz

24A	

UHV-25-ICC	

V100

CF 2 3/4'', Offset Inline

Pneumatic, Viton®
Bonnet Seal

100 VAC 50 HzW

120 VAC 50/60 HzPneumatic, Viton®
Bonnet Seal,w/Limit Switch

208 VAC 50/60 Hz120

208240220 VAC 50/60 Hz

None
1/8'' NPT-F

Add the options to the body. Sample part number: UHV-25-ACC-BNVN-120.

NW 40 UHV Valve Ordering Information
Body Configuration
UHV-40-XXX

Finish-X

Actuation
X

Seal TypeXX

Pneumatic Solenoid Voltage-XXX
Select 1

Select 1

Select 1

Select 1

Select 1

UHV-40-AKKB

M

VM

12D

ISO-KF 40, Angle

Bead Blasted

ManualViton - Manual

12 VDC

UHV-40-IKK

E	NVN

24D

ISO-KF 40, Offset Inline

Electropolish

Pneumatic, Copper
Bonnet Seal

Viton - Pneumatic

24 VDC

UHV-40-ACC	

24A	

CF 2 3/4'', AngleL	

24 VAC 50/60 Hz

UHV-40-ICC	

Pneumatic, Copper
Bonnet Seal,
w/Limit Switch

100 VAC 50 Hz

CF 2 3/4'', Offset Inline

100

V120

Pneumatic, Viton®
Bonnet Seal

120 VAC 50/60 HzW

208 VAC 50/60 Hz

208®

Pneumatic, Viton
Bonnet Seal,
w/Limit Switch

240
220 VAC 50/60 Hz

None
1/8'' NPT-F

Add the options to the body. Sample part number: UHV-40-ACC-BNVN-120.

Ordering Information

UHV Valve NW 25 Spare Parts
Description

Part Number

O-Ring/Metal Seals, Viton® nose, Copper bonnet

100010361

O-Ring Seals, all Viton®

100011771

Internal Assembly, pneumatic, with Viton® nose, Copper bonnet*

100002652

Internal Assembly, pneumatic, with all Viton® seals*

100011774

Retro Fit Kit: Limit Switch, pneumatic

100010913

Solenoid: 24 VAC, 50/60 Hz, 6.0 Watts

100008164

Solenoid: 12 VDC, 50/60 Hz, 7.0 Watts

100008539

Solenoid: 24 VDC, 50/60 Hz, 7.0 Watts

100008163

Solenoid: 120 VAC, 50/60 Hz, 7.5 Watts

100008165

Solenoid: 208 VAC, 50/60 Hz, 7.5 Watts

100008166
100008167

Solenoid: 220 VAC, 50/60 Hz, 7.5 Watts* Includes Actuator CapUHV Valve NW 40 Spare Parts
Description

Part Number

O-Ring/Metal Seals, pneumatic, Viton® nose, Copper bonnet

100010362

O-Ring/Metal Seals, manual, Viton® nose, Copper bonnet

100010363

O-Ring Seals, pneumatic, all Viton®

100011772

O-Ring Seals, manual, all Viton®

100011773

Internal Assembly, pneumatic, with Viton® nose, Copper bonnet*

100009978

Internal Assembly, pneumatic, with all Viton® seals*

100011775

Internal Assembly, manual, with Viton® nose, Copper bonnet*

100009979

Internal Assembly, manual, with all Viton® seals*100011776

Retro Fit Kit: Limit Switch, pneumatic100010914

Solenoid: 24 VAC, 50/60 Hz, 6.0 Watts

100008164

Solenoid: 12 VDC, 50/60 Hz, 7.0 Watts

100008539

Solenoid: 24 VDC, 50/60 Hz, 7.0 Watts

100008163

Solenoid: 120 VAC, 50/60 Hz, 7.5 Watts

100008165

Solenoid: 208 VAC, 50/60 Hz, 7.5 Watts

100008166
100008167

Solenoid: 220 VAC, 50/60 Hz, 7.5 Watts* Includes Actuator Cap

UHV Valve - 11/15© 2008 MKS Instruments, Inc.
All rights reserved.

MKS Instruments, Inc.
Global Headquarters

MKS Instruments, Inc.
Valve Solutions

2 Tech Drive, Suite 201
Andover, MA 01810Six Shattuck RoadAndover, MA 01810

Tel: 978.645.5500
Tel: 800.227.8766 (in U.S.A.)
Web: www.mksinst.com

Tel: 978.975.2350

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc. VCR® is a registeredtrademark of Swagelok® Company. Viton® is registered trademark of E.I. du Pont de Nemours & Co. Chemraz® is a registeredtrademark of Greene, Tweed & Co.