Site Report: Kumamoto and Koshi Plants
Each year in the Environmental Report, we report on the EHS
initiatives of particular plants. Last year we introduced theYamanashi plant. This year we turn our focus on the Kumamoto and Koshi plants.
Kumamoto is famous for its nature, history and culture, with abundant forests and groundwater, the Suizenji park, and the homes of famous Meiji Era writers. The Koshi plant is TEL new production center,with grounds covering about 155,000 square meters in the Kumamoto
Semicon Technopark, which include a concentration of semiconductorrelated companies. The Kumamoto plant has a 16-year history as the focal point of TEL operations in Kyushu.

Koshi plant

Kumamoto plant

The Koshi plant serves as the production center, and the Kumamoto plantas the performance evaluation, sales and service center for the TEL Coater/Developer equipment, which holds the top market share in its market sector.

EHS Activities in FY 2003
Overview of EHS Activities
at the Kumamoto and Koshi Plants
The Kumamoto and Koshi plants acquired
ISO14001 certification in March 1998, andhave been working to reduce environmental
impact with a focus on energy and resource
conservation as they work toward becoming
zero-emissions factories.
• Koshi plant: Since FY 2002, this plant has
been required to reduce its electrical consumption, because the consumption was
rising and the plant was designated a Class
1 Energy Management Factory.
• Kumamoto plant: Because it conducts equipment evaluations, this plant has a high outputof waste liquid chemicals from semiconductor
processes, and it has been working toward
zero—emissions of industrial waste.
Working Toward Zero Emissions of Industrial Waste
At the end of FY 2002, the last recycling
challenge to boost the recycling rate above
99.58% was the disposal of vinyl chlorides. Atthe time, this waste was still being landfilled,
but recycling began in FY 2003. Because ofthis change, the management expects to achieve a recycling rate of 100% at the Kumamoto and Koshi plants during FY 2004.

Occupational Health and Safety
Activities Based on Risk Assessment
Under the EHS Management System (seepages 21-22), about 600 work-related risks*were identified in development, production
and other processes, and a risk assessment
was conducted on them. Based on the resultsof analyses, a variety of measures were implemented, targeting the work that generated
those risks. For example, during the processof assembling the coater/developer equipment at the Koshi plant, workers were required to climb to the upper section of the(%)
93.6%

Material Flows at the Kumamoto/Koshi Plants (FY 2003)
INPUT

Natural gas
Fuel

99.6%

98.8%

Future Issues
After obtaining ISO14001 certification, theplants began thorough efforts to reduce environmental impact, and were proud to achievecorresponding results in FY 2003. Hereafter
the plants’ focus will be to reduce the environmental impact of TEL products during usage. In addition, in terms of worker health andsafety, the plants will redouble their efforts
and aim for a zero-accident record.

OUTPUT
CO258,240 MWh

45 km

30 kl

90Water

139 km380

Chemicals
700.001 tons

22,485 tons

Wastewater3(to river, underground) 137 km

99.9%

99.9%

100

*risk: Here “risk” refers both to the potential for adangerous event to occur and its result.

Raised work station and balancer

Electricity

Recyling Rate of Industrial Waste
at the Kumamoto/Koshi Plants

equipment and load a filter unit, a task thatinvolved some risks. To address it, the plant
introduced a raised work station and balancer(see photo).

Kumamoto/KoshiplantsTotal waste disposal 2,056 tons

(PRTR Law controlled substances)

Recycled material 1,986 tons

Paper (copy paper) 27 tons

Incineration, landfill 70 tons

64.3%
60

989900010203 (FY)TOKYO ELECTRON Environmental Sustainability Report 200332