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Mass Spectrometry
Solutions

Vision 2000-P™
HIGH PERFORMANCE PROCESS MONITORING SYSTEM
Many process monitoring systems fail to deliver user requirements because they present
data in a format that is not easily understood by the operator. The value of the trace gas
analysis is often lost, and the RGA may never deliver the payback intended.
The Vision 2000-P™ represents a different concept in process monitoring, requiring
minimum operator interaction or RGA knowledge. The Vision 2000-P incorporates the “smarthead” RGA technology of the Microvision 2 with a closed ion source and close-coupled inlet.
This state-of-the-art RGA technology is integrated with Process Eye™ Professional Control
Platform, a recipe based, user-configurable software program. The advanced technology
available in the Vision 2000-P provides users with simple, effective, process monitoring
operation including:• ppb level detection of contaminant gases during PVD processes		 — Sensitivity to detect even small amounts of contamination sometimes introduced 					 during preventative maintenance cycles• Faster PM recovery through vacuum analysis		 — Constant baseline vacuum troubleshooting• Single push button operation to start recipes

Features & Benefits

Applications

Baseline monitoring of PVD chambers for airleaks and background contamination levels• Ability to track process gas mixture
composition where two gases are utilized 		(i.e. Ar and N2 in TiN deposition)• Vacuum troubleshooting for fast PMrecovery• Can be integrated with a wide variety ofPVD tools• Remote Vacuum Controller (RVC) for failsafe PC-based operation and control• Available with Process Eye Professional
software for— Automated, recipe based operation— User configurable, intelligent alarms— High level tool integration— Advanced data presentation (i.e. 				 simultaneous bar chart/trend screen 				 displays)• Simultaneous multiple-sensor operation
capability

The Vision 2000-P is an application-specificprocess monitoring system designed
to monitor contamination levels withinsemiconductor and thin film PVD process
tools and to alert of conditions that cannegatively impact product yield. In addition,
the Vision 2000-P optimizes vacuum quality
with• Contamination monitoring, includinghydrocarbons, to sub-ppm levels during 		
PVD process• Residual gas monitoring, including airand waterDescription
Closed Ion Source

Process Eye™ Professional Control Platform

Each Vision 2000-P incorporates a closed ion source
and a custom inlet valve with an optimized high conductance, low surface area path to the PVD process chamber.
With this source, the system is able to monitor thecomplete PVD process cycle, from base vacuum toprocess pressures of up to 1e-2 mbar, without the needfor a pressure reduction inlet.

The Vision 2000-P analyzer uses Process Eye
Professional, a highly flexible, modular application
operating under 32bit or 64bit Windows XP, Vista, Server
2008 or Windows 7. Designed with a “client/server”
structure, Process Eye Professional incorporates TCP/
IP protocol for full network compatibility. Process Eye
Professional uses recipes to specify the way in which theinstrument scans, displays data, and responds to the dataacquired. Recipes are user configurable using the “RecipeWizard” and are ideal for monitoring repetitive processes
and analyses.

By maximizing the ratio between process gas signals
and the gas background in the differentially pumped
Vision 2000-P analyzer housing, the closed ion source
enables ppb levels of detection for trace contaminants inthe process gas. Exceptionally good residual hydrogendetection can be achieved with the high performanceelectronics.
Remote Vacuum Controller
Each Vision 2000-P system incorporates a Remote
Vacuum Controller (RVC) module that provides fail-safe
protection for both the process tool and the RGA.
Furthermore, it allows full operation and control of RGA
system components (filaments, pumps, inlet valves, etc.)from the system PC. The compact, remotely mounted
rack module includes the RVC and power supplies. The
unit is easily mounted onto any standard 19” tool rackfor mounting on a process chamber or other compatible
location. 33’ (10 m) cables for ease of remotely locating
the probe assembly are included as standard.
Mobile RGA Platform
Any Vision 2000-P can be mounted on a mobile RGA
platform with the convenience of being able to move theRGA easily between chambers as the need arises. The
mobile platform has an integrated laptop table and mounts
the electronics on the trolley. Using a standard 10 foot (3m)cable loom the platform can be conveniently located awayfrom the RGA mounting point on the tool chamber.

Standard bar chart with log pressure axis

Associated bar chart spectra and recently captured spectra
are stored in a data buffer for easy review. Recipes canbe linked together for the optimum monitoring of various
phases of a particular process, or to facilitate automatic
calibration using pre-defined calibration recipes. The single
button push (or external signal) initiation of a Process Eye
Professional recipe eliminates the need for highly skilled,
full time operators.
The flexibility of Process Eye Professional allows recipes
to be configured that will:• Define data acquisition and data display parameters,
along with any on-line data processing required to 		convert data into relevant units and information• Display data in simultaneous “bar chart” and “data trend”
formats, allowing the comprehensive and clear 		
investigation of significant trend events• Incorporate custom warnings and alarms, triggered orterminated when data highlights that process conditions
have deviated from normal conditions• Monitor and display other parameters as trends, inrelevant units (temperature, gas flow rate, power, 		pressure, etc.) which are linked into the Vision 2000-P
analyzer through its flexible analog and digital I/O
In addition, Process Eye Professional provides “livehistory” for quick on-line review of data trend events.
Recently captured bar chart spectra are stored in a data
buffer and can be reviewed by moving a cursor over theassociated trend plot.

Simultaneous log bar chart/trend analysis display, illustrating wide dynamic
range scanning. Power supply potentials versus time is also shown.

Specifications

Performance
Mass Range Options

1-100 amu standard; 1-200 and 1-300 amu optional

Ion Source

High conductance closed ion source

Filaments

Replaceable twin Tungsten or Thoria filaments

Mass Filter

Double filter (1” “RF only” pre-filter with 4” main filter)

Detector System

Dual (Faraday and secondary electron multiplier)Maximum Analyzer Operating Pressure

7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional

Minimum Detectable Partial Pressure<2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)

Minimum Detectable Concentration(trace gas detection limit)<100ppb for all common gases except <10ppm for H2 					Mass Stability

Better than ±0.1 amu over 8 hours

Resolution

Better than 10% valley between peaks of equal height throughout the mass range

Analyzer & HousingMounting Flange

DN35CF (70mm/2.75” OD) Conflat® flange

Vacuum Hardware		

60 l/s Turbomolecular pump with high conductance analyzer housing, inlet system, rightangle valve, automated vacuum controller (RVC) completely inter locked and integrated.

Foreline Pump

Dry diaphragm standard; Other options available

Analyzer Housing Base Pressure

Better than 5e-9 Torr after bakeout

Bakeout Temperature & Bakeout Jacket

Included for 180°C bakeout

Total Weight

33 lbs. (15 kg) to bolt on Process System

Mechanical Support 	Optional stands and brackets are available
Mobile RGA Platform	Optional RGA trolley to improve versatility (footprint 18x24”, 455x604mm)
Pneumatics

60-80 psig CDA

Control Unit/PC
Control Module Weight

1.7 kgPower88-264 VAC, 47/63 Hz, 600 Watts

Maximum Operating Conditions

Electronics: 10-40°C, 80% RH (non-condensing)

LED Status Indication

Interlock status, filament emission, SEM, power and communications

I/O Capability		

4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large
number of both analog and digital inputs and outputs, including relay control

Other Facilities

Leak check headset socket, external filament trip socket, instrument reset

Software		

Process Eye Professional fully network compatible control platform generating under 		Microsoft® Windows® 2000, XP* or Vista* (*recommended)

Communications

Ethernet CAT-5e

Minimum PC Specification Required				Intel® Pentium IV® or AMD Athlon XP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent
upon total number of sensors on the computer and the operating system in use. MultiSensor installation may require higher specifications.			

Simultaneous Multi-Sensor

Process Eye Professional client/server configuration offers flexible multi-sensor operation.

ComplianceCE

RGA Controller to Vacuum System Cables
Length		33’ (10 m) standard RGA and 10’ (3m) with mobile RGA platform. Other lengths available
dependent upon process system and customer requirements

Total Shipping Weight

44 lbs (20 Kg) may vary depending upon backing pump and instrument rack requirements

Ordering Information

Please contact your local MKS office for price and availability information.

Vision 2000-P™ High Performance Process Monitor System Integration

Dimensional Drawing —Note: Unless otherwise specified, dimensions are nominal values in millimeters.

MKS Instruments, Inc.
Global Headquarters
2 Tech Drive, Suite 201
Andover, MA 01810

MKS Instruments, Inc.
Mass Spectrometry
Solutions

3635 Peterson Way		
Tel: 978.645.5500			Santa Clara, CA 95054
Tel: 408.750.0300
Tel: 800.227.8766 (in USA)
Web: www.mksinst.com
Vision 2000-P - 2/18		
© 2011-2018 MKS Instruments, Inc.
All rights reserved.

MKS Instruments, Inc.
Mass Spectrometry
SolutionsS sisCowley Way			Crewe, Cheshire CW1 6AG
Tel: +44.1270.250150

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst™, Process Eye™ and Vision 2000-P™ are trademarks of MKS
Instruments, Inc. Microsoft® and Windows® are registered trademarks of Microsoft Corporation. Intel® and Pentium IV® areregistered trademarks of Intel® Corporation. Conflat® is a registered trademark of Varian Vacuum Technologies.