2005B0767

BL47XU᡼኿శ X ✢ CT ⵝ⟎ߦࠃࠆࡈ࡝࠶ࡊ࠴࠶ࡊߪࠎߛធว᭴ㅧ૕ߩ
ᾲ∋ഭ៊்⹏ଔ
Development of Evaluation Method by X-ray Micro-tomography for
Thermal Fatigue Damage in Flip Chip Interconnects㜞ᩉ Პ*1㧘ጟᧄ૫ਯ*1㧘㊒⼱ᶈਯ*2㧘૒ጊ೑ᒾ*2㧘਄᧖ஜᄥᦶ*3㧘᫪ቁ↵*4Takeshi Takayanagi*1, Yoshiyuki Okamoto*1, Hiroyuki Tsuritani*2, Toshihiko Sayama*2,Kentaro Uesugi*3, Takao Mori*4*1ࠦ࡯࠮࡞ᩣᑼળ␠, *2 ንጊ⋵Ꮏᬺᛛⴚ࠮ࡦ࠲࡯, *3 㜞ノᐲశ⑼ቇ⎇ⓥ࠮ࡦ࠲࡯, *4 ንጊ⋵┙ᄢቇ*1Cosel Co., Ltd., *2Toyama Industrial Technology Center, *3SPring-8/JASRI,*4Toyama Prefectural Universityࡈ࡝࠶ࡊ࠴࠶ࡊ᭴ㅧ૕ߩߪࠎߛࡏ࡯࡞ធวㇱࠍኻ⽎ߣߒ‫ޔ‬㜞ಽ⸃⢻ X ✢ CT ⵝ⟎㧔SP-PCT㧕ࠍ↪޿ߡ‫ޔ‬ᾲ∋ഭߦࠃࠆᓸ⚦⚵❱ߩᄌൻࠍ⸃ᨆߒߚ‫⚿ߩߘޕ‬ᨐ‫ޔ‬ห৻⹜ᢱࠍᤨ♽೉ߢⷰኤߒ‫ޔ‬Pb ࡝࠶࠴߅ࠃ߮ Sn ࡝࠶࠴ฦ⋧߇ᚑ㐳ߔࠆㆊ⒟ࠍ‫⪺ޔ‬⠪ࠄ߇ឭ᩺ߒߡ޿ࠆ⋧ᚑ㐳ࡄ࡜ࡔ࡯࠲ࠍ↪޿ߡቯ㊂ൻߔࠆߎߣ߇ߢ߈ߚ‫⋧ޔߦࠄߐޕ‬ᚑ㐳ࡄ࡜ࡔ࡯࠲ߩ 1 ࠨࠗࠢ࡞޽ߚࠅߩᄌൻ㊂ߦ⌕⋡ߒߡ‫∋ޔ‬ഭ߈ⵚߩ⊒↢ኼ๮ࠍ⹏ଔߔࠆߎߣ߽⹜ߺߚ‫⎇ޕ‬ⓥᚑᨐߪ‫ޔ‬㔚ሶၮ᧼ߦ߅ߌࠆࡑࠗࠢࡠធวㇱߩኼ๮⹏ଔߦ‫ޔ‬X ✢ࡑࠗࠢࡠ CT ߦࠃࠆ㕖⎕უᬌᩏࠍ೑↪ߢ߈ࠆน⢻ᕈࠍ␜ߔ߽ߩߢ޽ࠆ‫ޕ‬

1. ߪߓ߼ߦ৻ᣇ‫ޔ‬SPring-8 ߦ߅޿ߡߪ‫ޔ‬਄᧖ࠍਛᔃߣߒߡ‫ޔ‬㔚ሶၮ᧼ߦ߅޿ߡߪታⵝߩ㜞ኒᐲൻ߇ㅴⴕߒ

᡼኿శశḮࠍ↪޿ߚ㜞ಽ⸃⢻ߩ X ✢ࡑࠗࠢࡠ CTߡ߅ࠅ‫ߚ޿↪ࠍ╬ߛࠎߪޔ‬㔚᳇⊛‫ޔ‬ᯏ᪾⊛ߥធⵝ⟎㧔એਅ‫ޔ‬SP-PCT㧕ߩ㐿⊒ࠍㅴ߼ߡ޿ࠆ 1,2)‫ޕ‬วㇱ߇Pm ࠝ࡯࠳ߩኸᴺߣߥߞߡ޿ࠆ‫ࠆࠁࠊ޿ޕ‬ߐࠄߦ‫ޔ‬૒ጊࠄߪ‫ޔ‬㔚ሶၮ᧼ߪࠎߛធวㇱߦ߅ࡑࠗࠢࡠធวㇱߦ߅ߌࠆೋᦼធวਇ⦟㧔ࡏࠗ࠼‫ޔ‬޿ߡ‫ޔ‬ᾲࠨࠗࠢ࡞⽶⩄ߦࠃࠆᓸ⚦⚵❱ߩᄌൻࠍធว⇇㕙ߩ೸㔌ߥߤ㧕߅ࠃ߮∋ഭ៊்㧔⚵❱ᄌⷰኤߒ‫ߩߘޔ‬ᾲ∋ഭኼ๮ࠍផቯߔࠆᚻᴺࠍ⏕┙ൻ‫∋ޔ‬ഭ߈ⵚߩ⊒↢߿ㅴዷߥߤ㧕߇‫ޔ‬㔚ሶၮ᧼ߒߡ޿ࠆ 3)‫ޕ‬ߩା㗬ᕈߦᄢ߈ߥᓇ㗀ࠍਈ߃ࠆ࿃ሶߢ޽ࠅ‫ޔ‬ᓸߘߎߢ‫⎇ᧄޔ‬ⓥߢߪ‫ࡠࠢࠗࡑߥ⊛ဳౖޔ‬ធว⚦⚵❱࡟ࡌ࡞ߢߩା㗬ᕈ⹏ଔ߇ᔅⷐߣߐࠇߡ޿ߢ޽ࠆࡈ࡝࠶ࡊ࠴࠶ࡊߦ↪޿ࠄࠇߡ޿ࠆߪࠎߛࠆ‫ޔߒ߆ߒޕ‬Pm ࠝ࡯࠳ߩᰳ㒱߿៊்ࠍᬌ಴ߒ‫ޔ‬ࡏ࡯࡞ធว૕᭴ㅧࠍኻ⽎ߣߒ‫ޔ‬SP-PCT ࠍ↪޿ߡ‫ޔ‬ࡑࠗࠢࡠធวㇱߩା㗬ᕈࠍ⹏ଔߔࠆߎߣߪ‫ޔ‬శᾲࠨࠗࠢ࡞⽶⩄ߦࠃࠆ∋ഭ៊்ߦߟ޿ߡ㕖⎕უቇ㗼ᓸ㏜߿⿛ᩏဳ㔚ሶ㗼ᓸ㏜㧔SEM㧕ࠍ↪޿ߚߢ⸃ᨆ‫⹏ޔ‬ଔࠍⴕߞߚ‫ޔߜࠊߥߔޕ‬ᓸ⚦⚵❱ࠍᢿ㕙ⷰኤએᄖߩᣇᴺߢߪᭂ߼ߡ࿎㔍ߢ޽ࠆ‫ޕ‬㕖⴫ߔ CT ↹௝ࠍౣ᭴ᚑߒ‫↹ߩࠄࠇߎޔ‬௝ࠍ↪޿ߡ‫ޔ‬⎕უᬌᩏᚻᴺߣߒߡ‫⿥ޔ‬㖸ᵄᬌᩏ߿ X ✢▤⃿ࠍห৻⹜ᢱࠍᤨ♽೉⊛ߦⷰኤߔࠆߎߣߢ‫ޔ‬ᾲࠨࠗ↪޿ߚㅘㆊᬌᩏ߇⹜ߺࠄࠇߡ޿ࠆ߇‫ޔߪߢ⁁⃻ޔ‬ࠢ࡞⽶⩄ߦࠃࠆߪࠎߛࡏ࡯࡞ߩ∋ഭ៊்ࠍ‫ߘޔ‬ᓸ⚦⚵❱ࠍⷰኤߢ߈ࠆචಽߥಽ⸃⢻ࠍ᦭ߔࠆ↹ߩᓸ⚦⚵❱ߩᄌൻ߆ࠄቯ㊂⊛ߦᬌ⸛ߒߚ‫ޕ‬௝߇ᓧࠄࠇߡ޿ߥ޿‫ޕ‬−3−

2. X ✢ࡑࠗࠢࡠ CT ⵝ⟎ߩ᭎ⷐ SP-PCT ↪޿‫ޔ‬છᗧߩࠨࠗࠢ࡞ᢙߦ߅޿ߡ‫ߪޔ‬ SP-PCT ߪ‫ޔ‬SPring-8 ߩ⎇ⓥ㐿⊒↪ߩ౒↪ࡆ࡯1,2)

ࠎߛࡏ࡯࡞ౝߩᓸ⚦⚵❱ߩᄌൻࠍⷰኤߒߚ‫⹜ޕ‬‫ޕ‬Fig.1㛎૕ࠍ࿁ォࠬ࠹࡯ࠫߦ࿕ቯߒ‫ ࠍࠇߎޔ‬180q࿁ォߪ‫ޔ‬SP-PCT ߩ᭎ⷐࠍ␜ߔ‫ࠄ߆࠲࡯࡟ࡘࠫࡦࠕޕ‬ߐߖߡ 1800 ᨎߩㅘㆊ↹௝ࠍ᠟ᓇߒߚ‫⹜ޕ‬㛎૕ߩߩ᡼኿శࠍ‫ޔ‬Si ߩੑ⚿᥏ಽశེߦࠃࠅන⦡ൻߒ࿁ォゲߪ‫⹜ޔ‬㛎૕ߩ㐳ᚻᣇะߣᐔⴕߦߥࠆࠃ߁ߚ X ✢ࠍ⹜ᢱߦᾖ኿ߔࠆ‫ ߩߎޕ‬X ✢ߪ‫ޔ‬ᡆૃ⊛ߦ⸳ቯߒߚ‫ޕ‬ㅘㆊ↹௝৻ᨎ޽ߚࠅߩ X ✢ߩ㔺శߦᐔⴕశߣ⷗ߥߖࠆ㜞޿ᐔⴕᐲࠍ᦭ߒߡ߅ࠅ‫ޔ‬ᤨ㑆ߪ 0.2sec ߢ޽ࠆ‫ޔߚ߹ޕ‬ㅘㆊ↹௝ߩ᠟ᓇ㗔㜞ಽ⸃⢻ߩ 3 ᰴర↹௝ࠍౣ᭴ᚑߔࠆߎߣ߇น⢻ၞߪ‫ޔ‬1000Pm656Pm ߣߒߚ‫ޕ‬ㅘㆊ↹௝߆ࠄ CTߢ޽ࠆ‫ޔߦࠄߐޕ‬න⦡శൻߔࠆߎߣߦࠃࠅ‫ߘޔ‬↹௝ߩౣ᭴ᚑߦߪ‫ߺ⇥ޔ‬ㄟߺㅒᛩᓇᴺߩ X ✢ࠛࡀ࡞ࠡߦኻߔࠆ✢ๆ෼ଥᢙ㧔LAC,

㧔Convolution back-projection method㧕ࠍ↪޿ߚ‫ޕ‬Linear Attenuation Coefficient㧕ߩ 3 ᰴరಽᏓࠍቯCT ↹௝ߦ߅޿ߡߪ‫ޔ‬LAC ୯ߩಽᏓࠍ⴫␜ߔࠆߎ㊂⊛ߦ⹏ଔߔࠆߎߣ߇น⢻ߢ޽ࠆ‫ޕ‬ߣߢ‫ޔ‬Pb ࡝࠶࠴⋧߅ࠃ߮ Sn ࡝࠶࠴⋧ߩᒻ⁁ࠍน SP-PCT ᧄ૕ߪ‫⹜ޔ‬ᢱࠍ࿁ォߐߖࠆ♖ኒ࿁ォࠬⷞൻߔࠆߎߣ߇ߢ߈ࠆ‫ޔ߅ߥޕ‬X ✢ࠛࡀ࡞ࠡߣ

࠹࡯ࠫ‫ ߮ࠃ߅ޔ‬X ✢ߩㅘㆊ௝ࠍ᠟ᓇߔࠆ X ✢ᬌߒߡ‫ޔ‬Sn ߩ K ๆ෼┵ࠃࠅ߽߿߿ૐ޿ 29.0keV ࠍ಴ⵝ⟎ߦࠃߞߡ᭴ᚑߐࠇࠆ‫ޕ‬X ✢ᬌ಴ⵝ⟎㧔ᵿㆬᛯߒߚ‫ߛࠎߪޔߪࠇߎޕ‬ฦ⋧ߦ߅ߌࠆ LAC ୯᧻ࡎ࠻࠾ࠢࠬ␠⵾ AA50 ߅ࠃ߮ C4880-41S㧕ߪ‫ޔ‬ߩᏅࠍᄢ߈ߊߒ‫ޔ‬㜞޿ࠦࡦ࠻࡜ࠬ࠻ࠍઃߌߡ⴫

ࡓ࡜ࠗࡦ BL47XU ߦ⸳⟎ߐࠇߡ޿ࠆ

⹜ᢱࠍㅘㆊߒߚ X ✢ࠍⰯశ᧼ߢนⷞశߦᄌ឵ߒ‫ޔߦ߽ߣߣࠆߔ␜ ޔ‬X ✢ࠛࡀ࡞ࠡࠍ㜞ߊߒߡ‫ޔ‬Pb㗼ᓸ㏜↪ኻ‛࡟ࡦ࠭ߦࠃߞߡ᜛ᄢߒߚᓟ‫ޔ‬CCD⋧ߦ߅ߌࠆ X ✢ߩᷫ⴮ࠍߢ߈ࠆ㒢ࠅᛥ೙ߔࠆߚࠞࡔ࡜ߢ᠟ᓇߔࠆ߽ߩߢ޽ࠆ‫ޔߦ⊛⚳ᦨޕ‬0.47Pm

߼ߢ޽ࠆ‫ޕ‬0.47Pm0.47Pm ߩ voxel㧔3 ᰴరߢߩ↹⚛㧕ߢ᭴ᚑߐࠇࠆ CT ↹௝ࠍᓧࠆߎߣ߇น⢻ߢ޽ࠅ‫ޔ‬

4. ࡈ࡝࠶ࡊ࠴࠶ࡊ᭴ㅧ૕ߩ 3 ᰴరⷰኤ1Pm ⒟ᐲߩⓨ㑆ಽ⸃⢻ࠍ㆐ᚑߒߡ޿ࠆߎߣ߇⏕ ࡈ࡝࠶ࡊ࠴࠶ࡊ᭴ㅧ૕ࠍ 3 ᰴర⊛ߦߣࠄ߃ࠆ

⹺ߐࠇߚ‫ޕ‬ߚ߼ߦ‫ ోޔ‬CT ↹௝ࠍ↪޿ߡ‫ޔ‬3 ᰴరߩࡏ࡝ࡘ࡯
ࡓ࡟ࡦ࠳࡝ࡦࠣ↹௝ࠍ᛽಴ߒߚ‫ޕ‬Fig.2 ߪ‫ޔ‬ᾲࠨ

3. ⹜㛎ᣇᴺࠗࠢ࡞⹜㛎ࠍ 300 ࠨࠗࠢ࡞ታᣉߒߚᓟߩ⹜㛎૕

3.1 ⹜㛎૕߅ࠃ߮ᾲࠨࠗࠢ࡞⹜㛎ߦߟ޿ߡ‫ޔ‬3 ᰴర↹௝ߩ଀ࠍ␜ߔ‫ޔ߅ߥޕ‬ౝㇱ᭴ ⷰኤ↪ߩ⹜㛎૕ߪ‫ޔ‬Si ࠴࠶ࡊߣ FR-4 ၮ᧼߇‫ޔ‬ㅧߩⷰኤࠍኈᤃߦߔࠆߚ߼ߦ‫ޔ‬Si ࠴࠶ࡊ߅ࠃ߮

ࡑࠗࠢࡠߪࠎߛࡏ࡯࡞㧔Sn-37wt%Pb ౒᥏‫ޔ‬એਅ‫ޔ‬ࠕࡦ࠳࡯ࡈࠖ࡞ߪ⴫␜ߒߡ޿ߥ޿‫↹ߩߎޕ‬௝߆౒᥏ߪࠎߛߦࠃߞߡ‫ࡊ࠶࠴ࡊ࠶࡝ࡈޔ‬ធวߐࠄ‫߮ࠃ߅࡞࡯ࡏߛࠎߪޔ‬ၮ᧼ߩౝㇱ᭴ㅧ߇‫ޔ‬LACࠇߚ᭴ㅧߢ޽ࠆ‫⋥ޕ‬ᓘ⚂ 150Pm ߩߪࠎߛࡏ࡯࡞୯ߩ㆑޿ߣߒߡ᣿⏕ߦߣࠄ߃ࠄࠇߡ޿ࠆߎߣ߇߇‫ ⚂ޔ‬250Pm 㑆㓒ߢජ㠽ߦ㈩೉ߐࠇߡ޿ࠆ‫ߥޕ‬ಽ߆ࠆ‫ޕ‬ᰴߦ‫ޔ‬Fig.3 ߪ‫ޔ‬Fig.2 ߣห৻ߩ⹜㛎૕ߦ߅‫ߩ⟎ⵝޔ‬೙⚂ߩߚ߼‫⹜ޔ‬㛎૕ࠍ‫ޔ‬ෘߐ 0.8mm

ߟ޿ߡ‫ޔ‬࿁ォゲ㧔z ゲ㧕ߣု⋥ߥᐔ㕙㧔x-y 㕙㧕᏷ 0.8mm㐳ߐ 10mm ߦടᎿߒߡⷰኤߒߚ‫ޕ‬ߢߩ‫࡞࡯ࡏߛࠎߪޔ‬ઃㄭߩ CT ↹௝ߩ଀ࠍ␜ߔ‫ޕ‬ߎߩ⹜㛎૕ߩᾲ⽶⩄ߦࠃࠆ⚵❱ᄌൻࠍⷰኤߔ

࿑ਛߩࠣ࡟࡯ࠬࠤ࡯࡞ߪ‫ޔ‬LAC ୯ߩᄢ߈ߐࠍ␜ࠆߚ߼ߦ‫ޔ‬ᰴߩടㅦᾲࠨࠗࠢ࡞⹜㛎ࠍታᣉߒߚ‫ޕ‬ߔ‫޿⊕ޕ‬ㇱಽߪ LAC ୯߇ᄢ߈޿ Pb ࡝࠶࠴⋧ߦ‫ޔ‬ߔߥࠊߜ‫ޔ‬㜞᷷଻ᜬ᷷ᐲ 125͠‫ޔ‬ૐ᷷଻ᜬ᷷ᐲ

߹ߚἯ⦡ߩㇱಽߪ LAC ୯߇ዊߐ޿ Sn ࡝࠶࠴⋧-40͠‫଻ޔ‬ᜬᤨ㑆 30min‫ᤨࡊࡦ࡜߮ࠃ߅ޔ‬㑆 2minߦ‫ޔ‬ฦ‫ޘ‬ኻᔕߒߡ޿ࠆ‫ޔߚ߹ޕ‬CT ↹௝ߢߪ‫ࡏޔ‬ߩ᧦ઙࠍ⸳ቯߒߚ‫ޕ‬ࠗ࠼㧔ࡏ࡯࡞ߩᏀ਄㧕߿࡝ࡈࡠ࡯ធวߒߚᤨߦ

3.2 ㅘㆊ௝ߩ᠟ᓇ߅ࠃ߮ CT ↹௝ߩౣ᭴ᚑ․ᓽ⊛ߦ⃻ࠇࠆ⚵❱ߢ޽ࠆᲧセ⊛ᄢဳߩ Pb ࡝࠶−4−࠴⋧㧔ࡏ࡯࡞ߩฝਅ㧕߽⹺߼ࠄࠇࠆ‫౒ޕ‬᥏ߪࠎ⹏ଔࠍ⹜ߺߚ‫ޕ‬Fig.5 ߪ‫ޔ‬S ߩ⸘᷹୯ߩ N ߦኻߔߛࠍᲧセ⊛ㅦ޿಄ළㅦᐲߦࠃߞߡਇဋ৻ಝ࿕ࠍ

ࠆᄌൻࠍ␜ߔ‫ޕ‬S ߩ⸘᷹ߪ‫ߩ࡞࡯ࡏߛࠎߪޔ‬ਛᔃⴕߞߚ႐วߪ‫ߣߩ߽ࠆࠇ⃻߇❱⚵ߥ߁ࠃߩߎޔ‬ઃㄭࠍߣ߅ࠆห৻ߩ x-y 㕙ߦ߅޿ߡⴕߞߚ‫ޔ߅ߥޕ‬ផ᷹ߐࠇࠆ‫ߩ࡞࡯ࡏߛࠎߪޕ‬ᓸ⚦⚵❱ߪ‫ޔ‬X ✢S0 ߪ‫ޔ‬S ߩೋᦼ⁁ᘒߦ߅ߌࠆ୯ߢ޽ࠆ‫ޕ‬࿑ࠃࠅ‫ޔ‬▤⃿ࠍ↪޿ߚ CT ⵝ⟎ߢߪߣࠄ߃ࠆߎߣ߇ߢ߈

S ߩ⸘᷹୯߇ N ߦᲧ଀ߒߡჇടߒߡ޿ࠆߎߣ߇ߥ߆ߞߚᖱႎߢ޽ࠅ‫ޔ‬SP-PCT ߦࠃࠆⷰኤߩ᦭ല⏕⹺ߢ߈ࠆ‫ޕ‬ᕈࠍ␜ߔ߽ߩߢ޽ࠆ‫ޕ‬

5.2 ∋ഭ߈ⵚ⊒↢ኼ๮ߩផቯ ߐࠄߦ‫⪺ޔ‬⠪ࠄߪ‫ޔ‬S ߩ 1 ࠨࠗࠢ࡞ᒰߚࠅߩᄌ

5. CT ↹௝ߦࠃࠆᾲ∋ഭ៊்⹏ଔ

ൻㅦᐲ'S ߣߪࠎߛౝߩ∋ഭ៊்㊂ߣߩኻᔕ㑐ଥ

5.1 ᾲࠨࠗࠢ࡞⽶⩄ߦࠃࠆ⚵❱ᄌൻࠍ⺞ߴ‫ޔ‬ᰴߩ∋ഭ߈ⵚ⊒↢ኼ๮ Ni ߩផቯᑼࠍឭSn-Pb ߪࠎߛߪᾲ⽶⩄ߦࠃࠅ‫ޔ‬Sn ࡝࠶࠴⋧‫ޔ‬᩺ߒߡ޿ࠆ 4)‫ޕ‬Pb ࡝࠶࠴⋧ߩฦ⋧߇ಝ㓸‫☻ޔ‬ᄢൻߔࠆߎߣ㧔⋧'S = CN-Dᚑ㐳㧕߇⍮ࠄࠇߡ޿ࠆ‫ޕ‬Fig.3 ߪ‫ޔ‬ห৻ߩ⹜㛎૕ߎߎߦ‫ޔ‬C ߅ࠃ߮Dߪቯᢙߢ޽ࠆ‫ޕ‬Fig.5 ࠃࠅ‫ޔ‬ߦ߅ߌࠆ⚵❱ᄌൻߩ଀ࠍ‫ޔ‬࿁ォゲߣᐔⴕߥห৻

'S = 0.91Pm4 ߇ᓧࠄࠇ‫ޔ‬ᑼ(2)ࠃࠅ∋ഭ߈ⵚ⊒↢ߩ x-y 㕙ߦ߅ߌࠆ CT ↹௝ߢ␜ߔ‫ ߩࠄࠇߎޕ‬CTኼ๮ߪ‫ޔ‬Ni = 311 ࠨࠗࠢ࡞ߣផቯߐࠇߚ‫৻ޕ‬ᣇ‫ޔ‬↹௝ߪ‫࡞ࠢࠗࠨޔ‬ᢙ N ߩჇടߦ઻߁⋧ᚑ㐳ߩㅴ೎ߩ⹜㛎૕ߦኻߒߡᢿ㕙ߩ SEM ⷰኤࠍታᣉߒߚⴕ⁁ᴫࠍ᣿⏕ߦߣࠄ߃ߡ޿ࠆ‫ޔߦ․ޕ‬ೋᦼ⚵❱ߣߎࠈ‫ޔ‬ᐔဋߩ∋ഭ߈ⵚ⊒↢ኼ๮ߪ Ni = 300 ࠨࠗ߆ࠄ N=100 ߹ߢߩ⋧ᚑ㐳ߪ‫ߩߘޔ‬ᓟߩᄌൻߣᲧ

ࠢ࡞ߣ᳿ቯߐࠇߚ‫ޕ‬෺ᣇߩ⚿ᨐߪ㕖Ᏹߦࠃߊ৻セߒߡᕆỗߥ߽ߩߣߥߞߡ޿ࠆ‫ޕ‬⥌ߒߡ߅ࠅ‫ޔ‬CT ↹௝ࠍ↪޿ߡࡑࠗࠢࡠߪࠎߛធ

ᰴߦ‫ޔ‬Fig.4 ߪ‫ޔ‬ห৻ߩߪࠎߛࡏ࡯࡞ౝߩਛᔃ
ㇱಽߦ߅ߌࠆ voxel ߦߟ޿ߡ‫ ߩߘޔ‬LAC ୯ߩ㗫(2)วㇱߩ∋ഭኼ๮ࠍផቯߢ߈ࠆน⢻ᕈࠍ␜ߒߡ޿
ࠆߣ޿߃ࠆ‫ޕ‬ᐲಽᏓߩᄌൻࠍ␜ߔ‫ޕ‬ᾲࠨࠗࠢ࡞ߩㅴⴕߦ઻޿‫ޔ‬
LAC ୯ߩࡇ࡯ࠢ߇‫ޔ‬Sn ஥㧔Sn ߩ LAC ୯ߪ‫ޔ‬-16. ߹ߣ߼

57.7cm 㧕߳ࠪࡈ࠻ߒߡ߅ࠅ‫ߚ߹ޔ‬㜞޿ LAC ୯ ᡼኿శశḮࠍ೑↪ߒߚ X ✢ࡑࠗࠢࡠ CT ⵝ⟎஥ߢ߽ Pb㧔Pb ߩ LAC ୯ߪ‫ޔ‬375.6cm-1㧕ߦᲧセ㧔SP-PCT㧕ࠍ↪޿ߡ‫ߛࠎߪࡊ࠶࠴ࡊ࠶࡝ࡈޔ‬ធ⊛ㄭ޿ዊߐߥࡇ࡯ࠢ߇ᓢ‫ޕࠆ޿ߡ߈ߡࠇ⃻ߦޘ‬ว᭴ㅧ૕ߦ߅ߌࠆᾲࠨࠗࠢ࡞⽶⩄ߦࠃࠆ⚵❱ᄌߔߥࠊߜ‫ޔ‬ᾲࠨࠗࠢ࡞ߣߣ߽ߦ‫ޔ‬ฦ⋧ߦ߅޿ߡൻ㧔⋧ᚑ㐳㧕ߩⷰኤ‫∋߮ࠃ߅ޔ‬ഭ߈ⵚߩ⊒↢ኼߪ‫⋧ޔ‬ᚻේሶߩ࿕ṁ㊂߇ᷫዋߒ‫ ߥ☴⚐ޔ‬Pb ⋧߅๮⹏ଔ߇น⢻ߣߥߞߚ‫੹ޕ‬ᓟ‫ޔ‬ታ㓙ߩ㔚ሶၮ᧼ࠃ߮ Sn ⋧ߦㄭߠ߈ߟߟ޽ࠆߎߣ߇ಽ߆ࠆ‫ޕ‬᭴ㅧߩⷰኤߦኻߒߡ‫ޔ‬SP-PCT ࠍㆡ↪ߔࠆߎߣ߇ߐߡ‫⪺ޔ‬⠪ࠄߪ‫౒ޔ‬᥏ߪࠎߛߩ⋧ᚑ㐳ࠍ♽⛔⊛ᦼᓙߐࠇࠆ‫ޕ‬ߦ SEM ߢⷰኤߒ‫ޔ‬ᰴᑼߢቯ⟵ߐࠇࠆ⋧ᚑ㐳ࡄ࡜ࡔ࡯࠲ S ߦࠃߞߡ․ᓽઃߌࠄࠇࠆߎߣࠍ⷗಴ߒ3)1) Uesugi, K. et al., Nucl. Instr. Method., Sec. A,ߚ ‫ޕ‬ෳ⠨ᢥ₂

S = d4Vol. 467-468 (2001), 853-856.

(1)ߎߎߦ‫ޔ‬d ߪᐔဋ⋧ኸᴺߢ޽ࠆ‫ޔߜࠊߥߔޕ‬๟ᦼ⊛ߥᾲ⽶⩄߇ട߃ࠄࠇࠆ႐วߪ‫ޔ‬S ߇ࠨࠗࠢ࡞ᢙ2) http://www.spring8.or.jp/e/bl/BL47XU/index.html3) ૒ጊ೑ᒾ߶߆, ᯏ⺰(A), Vol.65, No.640 (1999),N ߦᲧ଀ߒߡჇടߔࠆࠃ߁ߦ‫⋧ޔ‬ᚑ㐳߇ㅴⴕߔࠆ‫ޔߢߎߘޕ‬CT ↹௝ࠍ↪޿ߡ⋧ᚑ㐳ࡄ࡜ࡔ࡯࠲

2553-2560.
4) ૒ጊ೑ᒾ߶߆, ࠛ࡟ࠢ࠻ࡠ࠾ࠢࠬታⵝቇળS ࠍ⸘᷹ߒ‫⋧ޔ‬ᚑ㐳ߩㅴⴕ⁁ᴫߦߟ޿ߡቯ㊂⊛ߥ

−5−

⹹, Vol. 4, No. 4 (2001), 298-305.

Fig.1

Schematic view of an X-ray micro-tomography system called SP-PCT in SPring-8

Fig.2(a) Initial
Fig.3

Volume-rendering image of flip chip specimen(b) After 100 cycles(c) After 300 cycles

CT images of the same solder bump showing phase growth process by thermal cyclic loading−6−

Fig.4

Change of LAC histogram by the thermal cyclic loading in a solder bump

Fig.5

Phase growth process by the thermal cyclic loading in solder bumps−7−