UHV Vacuum Gauges forAccelerator PhysicsIdeally suited for High Energy Physics (HEP) applications, the Series 937B ultra high vacuum gauging systemincorporates the technologies of the cold cathode and convection Pirani sensors. The 937B operates as manyas six sensors simultaneously and measures pressures from 10-11 to 760 Torr.

Product FeaturesSeries 937B Controller• Wide measurement range of 10-11 to 760 Torr• Easily operates up to 6 sensors via 3 gauge slots• Displays up to 6 pressure readings simultaneously• Repeatable measurements and 12 independent relay setpoints for improved process control• Field upgradeable, modular design• Easy to operate• Fast response cold cathode option for system protectionApplications• Computer interface: RS232, RS485 (built in) and ProfibusDPV1 (optional)The UHV gauging system can be usedfor applications requiring any of thefollowing: high temperature bakeout,radiation-resistance; or 10-11 Torrmeasurements.

Series 317 Bakeable Pirani Sensor• Measures from atmosphere to 1 x 10-3 Torr• Simple operation removes electronics for bakeout to 250°C• Radiation resistantSeries 422 Cold Cathode Sensor• Inverted Magnetron design provides pressure measurementof 10-2 to 10-11 Torr• Bakeable to 250°C while operating• Radiation resistant• Optional field emitter for improved UHV starting times• UHV construction• Dual feedthrough design provides accurate, repeatablemeasurement• LEMO connectors allow for easy interchange of cablesThe vacuum measurement sensorscan be installed on linear accelerators,booster rings, storage rings, beamlinesand vacuum pumping systems.The Series 937B combination vacuum gauge system is partof the family of vacuum gauges, and will operate as many assix sensors simultaneously. Every controller is configured tothe user’s exact requirements by selecting sensor type. Unitsof pressure are user configurable, in Torr, millibar, Pascal ormicrons. RS232 and RS485 are standard on the 937B, withProfibus as an option.

Series 937 ControllerThe 937B controller is designed for versatility, reliability andeconomy. The large, easy to read, backlit liquid crystal displayprovides readout for up to six sensors. Intuitive menus andsimple push button front panel, allows for ease in setup of the937B. The 937B allows the use of any sensor card in any cardslot.

422 Inverted Magnetron Measurement CircuitThe IMG Measurement Circuits offer a dual feedthroughdesign instead of single feedthrough. The disadvantage ofa single feedthrough design is that it measures all currentsincluding unwanted currents, such as cable leakage. MKS’sdual feedthrough design measures only the gauge current.
This is especially important when measuring extremely smallion currents. This ensures the best accuracy and repeatabilityunder UHV conditions and permits reliable measurement intothe 10-11 Torr decade.

When used with the available dual convection card, thecontroller can display up to a maximum of six pressure inputs.
Typical HEP configurations include two cold cathode cards witha dual convection card to provide simultaneous display andcontrol of four pressure inputs.
Fast Response OptionFor applications requiring a fast response, for example valveinterlocks, the 937B can be configured with a fast responsecold cathode card that has an opto-isolated output. This outputresponds to pressure changes in less than 10 msec. A typicalapplication would be at a synchrotron light source where thefast response option is used in conjunction with a cold cathodesensor installed on a beamline front end. In the event of asudden pressure rise in a beamline, the fast response output isused to close an isolation valve while protecting the storage ringfrom possible damage.
317 Bakeable Convection Pirani SensorWith a measurement range from atmospheric pressure to 1.0x 10-3 Torr, the 317 can be used to control the ignition of acold cathode sensor when used in conjunction with the 937B.
With the electronic module removed, the sensor is bakeableto 250°C. The electronics slide off the sensor housing afterremoving two screws and remain attached to the cable. Thesensor is radiation resistant making it an ideal choice for highpressure measurements and interlocks on particle accelerators.

Series 422 Cold Cathode SensorCross-section of a modern inverted magnetron Cold Cathode showing theMKS Dual feedthrough designCold Cathode SchematicsCircuit comparison between single and dual feedthrough designs used onCold Cathode Sensors422 Cold Cathode SensorThe internal design of the 422 has been carefully constructedusing only materials suitable for UHV conditions. Combined withInverted Magnetron technology, this sensor has the capability ofmeasuring down to 1 x 10-11 Torr.
The 422 Cold Cathode Sensor incorporates LEMO connectors,these connectors use PEEK for the insulators which allows asensor to be both bakeable and radiation resistant. Maximumbakeout temperature is 250°C while operating. In addition,MKS offers cables that are bakeable and radiation resistant(no Teflon).

937B Dimensional DrawingNote: Dimensions are nominal values in inches (mm referenced).SpecificationsSeries 937B Controller SpecificationsMeasurement Range1.0 x 10-11 to 760 Torr (higher with optional cm card)1.0 x 10-11 to 1.3 x 10+4 mbar1.0 x 10-9 to 1.3 x 10+6 PascalOperating Temperature5° to 40° C (41° to 104°F)Storage Temperature-10° to 55°C (14° to 131°F)Relative Humidity80% max for temperatures less than 31°C, decreasing linearly to 50% maximum at 40°CPower Requirement and Consumption150 watts maximum, 100-240 VAC, 50/60Hz - universalSet Point RelaysTwelve pressure dependent set points; SPST relays, contact rating 2 amps @ 30 VAC, IEC 950 safety rating:2A @ 50 VACOutputBuffered, log linear & linear output for each channelFront Panel ControlsPower on-off switch, setup and operational commands can be accessed via the keypadDisplay320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure displays. Display indicators for unit ofmeasure, calibration functions, user calibration, set points, gauge position indicatorsLeak TestRelative logarithmic bar graph display and variable rate audio signalElectrical Connection (Sensors)Cold Cathode (422) card BNC/SHVController Weight8 lbs (3.6 kg)ComplianceCEConvection Pirani (317) 9 Pin D subSensor Specifications422 Cold Cathode317 Convection PiraniMeasurement Range1.0 x 10-11 to 1.0 x 10-2 Torr1.3 x 10-11 to 1.3 x 10-2 mbar1.3 x 10-9 to 1.3 Pascal1.0 x 10-3 to 1.0 x 10+3 Torr1.3 x 10-3 to 1.3 x 10+3 mbar1.3 x 10-1 to 1.3 x 10+5 PascalResolution1% of indicated decade, except 10% below 10-10 Torrand above 10-3 Torr1% of indicated decadeSet Point Response120 ms (<10ms with CL card)120 msSet Point Range2.0 x 10-10 to 9.5 x 10-3 Torr2.7 x 10-10 to 1.2 x 10-2 mbar2.7 x 10-8 to 1.2 Pascal2.0 x 10-3 to 9.5 x 10+2 Torr2.7 x 10-3 to 1.2 x 10+3 mbar2.7 x 10-1 to 1.2 x 10+5 PascalReproducibility5% of indicated pressure5% of indicated pressureCables & Connectors*Maximum length is 300 ft.
Connector LEMO with PEEK insulatorMaximum length is 500 ft.
9 pin D-sub connectors, ConnectorOperating Temperature0° to 250°C (32° to 482°F)0° to 50°C (32° to 122°F)Bakeout Temperature0° to 250°C (32° to 482°F)250°C (482°F) with cable and electronics removedSensor Construction(materials exposed to vacuum)Stainless steel, silver-copper brazing alloy, aluminaceramics, aluminum AL 6061, Elgiloy®, OFHC® copper304 stainless steel, nickel 200, glass, platinumWeight2.9 lbs. (1.3 Kg) w/ 2¾'' CF1.34 lbs (0.52 kg) w/ 2¾’’ CFVolume1.8 in. (30 cm ) max0.5 in.3 (8.0 cm3) maximum422 Cold CathodeSize2¾'' CFLEMO Connectors33317 Convection PiraniSize2¾'' CFOrdering InformationSeries 937B ControllerBase ControllerCountry Code“A” Gauge Slot“B” Gauge Slot“C” Gauge SlotCommunication PortPart CodePart CodePart CodePart CodePart CodePart Code937BUS

CCCold Cathode

CCCold Cathode

CCCold CathodePFProfibus

CLFast ResponseCold Cathode

CLFast ResponseCold Cathode

CLFast ResponseCold CathodeNA *Blank

CTDual ConvectionPirani

CTDual ConvectionPirani

CTDual ConvectionPiraniNABlankNABlankEUUKJPCA(Canada)* RS232/485 provided in base configurationSample part number: 937B-US-CCCCCT-NA.							Also available with optional Dual Capacitance Manometer Card.

Plug-In Controller BoardsSensorsPart NumberTypePart NumberType100018446100015132100015940100018448Cold Cathode (CC)Dual Convection Pirani (CT)Profibus (PF)Fast Cold Cathode (CL)104220006104220008422 Cold Cathode Sensor, 2¾” CF, LEMO Connectors, 250°C422 Cold Cathode Sensor, 2¾” CF, LEMO Connectors, 250°C,with field emitterConvection-Enhanced Pirani Sensor, 2¾” CF, 250°CConvection-Enhanced Pirani Sensor, 2¾” CF, 250°C,with Port ScreenUse these part numbers when purchasingboards separately for retrofit.

103170024SH103170034SHConsult factory for additional configurations.

Cable Assemblies (Complete)Part NumberType100014318-10100012372103170006SHCold cathode cable, radiation resistant, LEMO/BNC/SHV, 10 ft. (422 to 937B)Cold cathode cable, 250°C, LEMO/BNC/SHV, 10 ft. (422 to 937B)Pirani cable, shielded, 10 ft. (317 to 937B)Consult factory for longer cables.

Cable Stock and ConnectorsPart NumberType100006170100003451100012644100012643100016757Cold cathode cable, radiation resistant, sold per foot up to 1,000 ft.
Pirani cable, radiation resistant, sold per foot up to 1,000 ft.
Cold cathode connector set, sensor end LEMO, controller end BNC/SHV, use only with 100006170Pirani connector set, comprises two D-type connectors, 1 x male, 1 x female, use only with 100003451Cold cathode, fast response, 2 pin LEMO connector for CL cardThe above cables and connectors are intended for end-user assembly.

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High Energy Physics_11/20©2010-2020 MKS Instruments, Inc.
Specifications are subject to change without notice.

MKS products provided subject to the US Export Regulations. Export, re-export, diversion or transfer contrary to US law (and local country law) is prohibited. mksinst™ is atrademark and Granville-Phillips® and IMAG® are registered trademarks of MKS Instruments, Inc. or a subsidiary of MKS Instruments, Inc. All other trademarks cited hereinare the property of their respective owners.