SE50-ECO FT-IR Metrology Tool
For Material Characterization

SE50A-ECO 300SF/SFE

Systems Engineering combines the Thermo Fisher Scientific's FTIR measurement technology and JEL's sorter system to introduce anext generation "FT-IR SE50-ECO series" as semiconductor material
characterization tools.

Application Specifications
Epitaxial ThicknessRange▶ 0.3 - 750 μm

Precision▶ ± 0.01 μm

Epitaxial Thickness measurable.

Carbon & Oxygen in Silicon*CarbonRange
Precision

Oxygen▶ 0.1 to 10ppmA▶ STD 0.05 ppmA

▶ 0.3 to 35 ppmA
▶ STD0.08 ppmA

* All carbon and oxygen values reported using ASTM 1979 calculations.

Boron & Phosphorus
BoronRangePrecision

Phosphorus▶ 1 - 10 Wt%▶ ± 0.05 Wt%▶ 2 - 12 Wt%▶ ± 0.05 Wt%

Hydrogen in Silicon Nitride
Si-H

RangePrecision▶ 3 - 30 Atom%▶ ± 0.3 Atom%N-H▶ 3 - 30 Atom%▶ ± 0.3 Atom%

Fluorine in SiO2 Films
Thickness		Fluorine Concentration▶ 3000 - 10000Å
▶ STD< 0.2 Fwt%

SiXx membrane quantification software
Define peak of observation, and automate calculationand correction of quantifiable software spectram.

Measurement of non-diffusion layer
thickness
RangePrecision▶ 10 - 700 μm▶ STD ≦ 0.08 μm

SE50A-THz 150SiS NEW

SE50S-ECO Stage System

Non-diffusion layer thickness measurement system【Features】
・ Measurement of non-diffusion layer thickness of N/N+ type wafer with good reproducibility・ Up to 6 cassettes of 5 and 6-inch wafers can be installed・ Sorting according to the thickness of the non-diffusion layer【Size mm】
1500w x 1150d x 1800h【Size mm】
1000w x 1165d x 1590h

SE50A-ECO 200SS 1 open Casette System【Size mm】
1183w x 893d x 1830h

SE50A-ECO 200SMIF/200DSMIF System【Size mm】
1470w x 1530d x 1830h【Size mm】
1985w x 1500d x 1830h

SE50A-ECO 200DS 2~4 open Cassettes System【Size mm】
1400w x 1150d x 1710h

SE50A-ECO 300SS/300SF/300SFE/300DF/300DFE System
Open Cassette

SE50A-ECO 300SF【Size mm】
1470w x 1486d x 1830h【Size mm】
1470w x 1530d x 1830h

SE50A-ECO 300DF【Size mm】
1985w x 1500d x 1830h

SE50A-OIP Ingot Oi prof iler

【Size mm】
4800w x 1515d x 1822h【PC rack Size mm】
660w x 600d x 480h

Specifications
Computer Specifications

RELIABILITYMTBF> 6 months

MTTR

48 hours

Windows 10 64bit
Memory 32GB

MTTS

4 hours

Hard Disk SSD RAID1

Uptime> 97%

Operation System

FACILITY REQUREMENTS

OPTICAL
Spectral Range

7800 - 350cm-1

Spectral Resolution

0.5cm-1

Beam DiameterStandard 8mm (Variable)

Analysis Angle

15°

Power

100 - 240V (50/60Hz)

House Vacuum-61±10kPa (G)
30L/min (ANG)

Pressurized
Gas

CDA

0.6MPa (G)N2

0.2MPa (G)
15L/min (ANR)

SE50 series part number
Hardware

SoftwareProduct#Model

Wafer size

StationHandring

Product#Model

ECO-02S

SE50S-ECO

2-12 inch

Stage

Edge Grip

ECO-1EPEpitaxial Thickness

ECO-031

SE50A-ECO_150SS

2-6 inchSingleVacuum

ECO-1CO

Carbon & Oxygen in Silicon

ECO-032

SE50A-ECO_150DS

2-6 inchDoubleVacuum

ECO-1BP

Boron & Phosphorus in BPSG or PSG
Films

ECO-041

SE50A-ECO_200SS

4-8 inchSingleVacuum

ECO-1SN

Hydrogen in Silicon Nitride

ECO-042

SE50A-ECO_200DS

4-8 inchDoubleVacuum

ECO-1SF

Fluorine in Silicon Oxside Films

ECO-043D

SE50A-ECO_200DSMIF 8 inch

Double SMIF

Vacuum

ECO-1MB

Multi Background Option

ECO-044

SE50A-ECO_200FS

Four

Vacuum

ECO-1GM

GEM/SECS Host Communication

ECO-1SH

Share File Host Communication

ECO-1DS

Double Station Sorting Support

ECO-1FS

Four Station Sorting Support

ECO-1SSSix Station Sorting Support

ECO-1OH

Hydrogen in Silicon Software

ECO-1SCSiC Epitaxial Thickness Support

ECO-1SU

Shuttle Background Software

ECO-1CH

Carbon-doped Films

ECO-1SO

Silicon Oxiside Film Analysis (SiXx)

4-8 inch

ECO-051

SE50A-ECO_300SS

8-12 inch

SingleVacuum

ECO-052

SE50A-ECO_300DS

8-12 inch

DoubleVacuum

ECO-051F

SE50A-ECO_300SF

8-12 inch

Single Foup

Vacuum

ECO-052F

SE50A-ECO_300DF

8-12 inch

Double Foup

Vacuum

ECO-051E

SE50A-ECO_300SSE

12 inchSingleEdge Grip

ECO-052E

SE50A-ECO_300DSE

12 inchDoubleEdge Grip

ECO-051FE

SE50A-ECO_300SFE

12 inchSingle Foup

Edge Grip

ECO-052FE

SE50A-ECO_300DFE

12 inchDouble Foup

Edge Grip

THZ-02

SE50A-THz_150DS

4-6 inchDoubleVacuum

THZ-04

SE50A-THz_150FS

4-6 inch

Four

VacuumProduct#Model

THZ-06

SE50A-THz_150SiS

4-6 inchSix

VacuumECO-FA1

200mm wafer adapter for FOUP system

ECO-FA2

Tag Reader for FOUP & SMIF system
・Keyence : BL600
・Omron : V640

ECO-FA3

E84 OHT Support for OHT COM module

ECO-FA4

Safety Light Curtain for OHT

ECO-FA5

Sensing lonizer System

ECO-FA6

Water ID Reader Module

ECO-FA7

Optical FFU (Fan Filter Unit)

ECO-FA8

Share File Host Communication

Option*The appearance and specifications described in this brochure are subject to change
without notice for improvement purposes.
SEMI-FTIR Page

Head Office ：1-4-12 Koishikawa Bunkyo-ku, Tokyo 112-0002 Japan				TEL:+81-3-3868-2634
Factory：3-5-8 Funado Itabashi-ku, Tokyo 174-0041 Japan		TEL:+81-3-6279-8908
West Branch：Miyahara Yodogawa-ku Oosaka-shi, Oosaka 532-0003 Japan		TEL:+81-6-6868-9790
https://www.systems-eng.co.jp

E-mail: info@systems-eng.co.jp

240806KM