IMPEDANCE ANALYZER

ZA57630
INSTRUCTION MANUAL(ADVANCED)NF Corporation

DA00070169-001

IMPEDANCE ANALYZER

ZA57630
INSTRUCTION MANUAL(ADVANCED)

Registered Trademarks
National Instruments, LabVIEW, and Measurement Studio are registered trademarks of National
Instruments Corporation in the United States.
WINDOWS® EMBEDDED 8.1 INDUSTRY PRO
Used with permission from Microsoft.
Other company names and product names used in this instruction manual may be trademarks orregistered trademarks of their respective companies.

Copyright
NI Measurement Studio
Copyright (C) 2019 National Instruments Corporation
All Rights Reserved.

──── Preface ────Thank you for purchasing the "ZA57630 IMPEDANCE ANALYZER".
For safe and correct use of this product, please read the "Safety Precautions" section that follows
before attempting to use this instrument.
■ Marks and symbols
For safe operation by the user and to prevent damage to this instrument, please give attention to thefollowing marks and symbols that are used in this manual.
！

WARNING
This mark indicates information for preventing the possibility of death or serious
personal injury from electrical shock or other hazards or damage to this instrumentin the use or handling of this instrument.

！ CAUTION

This mark indicates information for preventing the possibility of injury to the user or
damage to this instrument and the use for handling of this instrument.
■ The scope of this ManualThis manual describes the ZA57630 that conform to requirements of CE marking.
Products without CE marking affixed, may not meet derectives for CE marking (EMC and others).
Please confirm the CE marking is affixed on the rear panel.

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ZA57630

Preface The manuals provided for the ZA57630 are listed below.
●

Instruction manual (Basics)
This manual describes operation of the ZA57630 from this instrument’s control panel,specifications, and other basic matters.
If you’re using this equipment for the first time, begin reading from Chapter 1.

●

Instruction manual (Advanced)
This manual describes more advanced operation and maintenance.

●

Instruction manual (Remote Control)
This manual describes remote control of the ZA57630

Basics
1. Introduction
This chapter provides a general description of this instrument, including its features,
applications, functions, and basic operating principles.
2. Preparation before use
This chapter describes important preparation that must be done before operating this
instrument.
3. Panel operations
This chapter explains the function, operating procedure, default values, and measurement
values for each part of the display screen. Read this chapter for a quick overall understandingof the panel and its use.
4. Basic operation
This chapter explains the basic operating procedures of the ZA57630. Refer to this chapter as
you use this instrument.
5. Specifications
This chapter describes this instrument specifications (functions and performance).
Advanced
1. Advanced operation
This chapter explains a wider range of operations.
2. File formats
This chapter explains the various file formats for saving data in external storage devices(USB memory device).
3. TroubleshootingThis chapter describes how to deal with error messages and cases in which you think this
instrument is malfunctioning.
4. MaintenanceThis chapter explains maintenance, repacking, transportation, and performance testing
methods.

ii

ZA57630──── Safety Precautions ────For safe use of this product, give full attention to the following warnings and cautions.
The NF Corporation shall not be held liable for damages that arise from failure to observe these warnings
and cautions.
This product is a Class I device (with protective conductor terminal) that conforms to the IEC insulation
standards.
Be sure to observe the instructions in the instruction manual.
This instruction manual contains information for the safe operation and use of this product.
Read the instructions and information before using the product.
All of the warning items contained in this instruction manual are intended to avoid risks that may leadto serious accidents. Follow the warnings and instructions carefully.



Be certain that the product is properly grounded.
This product uses a line filter which may cause electric shock if the product is not grounded.
To prevent electrical shock accidents, connect the product to an earth ground so that ground resistanceis 100 Ω or less.
This product is automatically grounded by connecting a 3-pin power plug to a power outlet with aprotective ground contact.

Check the power supply voltage.
This instrument operates on the power source voltage described in "2.3 Grounding and Power
Connections" in the Basics Instruction Manual.
Before plugging in the power cord, confirm that the outlet voltage conforms to the rated voltage ofthis instrument.



If you think something is wrong, ...
If smoke or an unusual odor or sound comes from this instrument, immediately remove the power
cord from the socket and cease use of this instrument.
If any such abnormality occurs, take measures to prevent the use of this instrument until repairs havebeen completed and promptly contact the NF Corporation or its authorized agent.

Do not use this product when gas is present.
Operating this instrument in the presence of flammable gases may cause an explosion.

Do not open the product case.
To prevent exposure to high voltages, never remove the cover of this instrument.
Only technicians certified by the NF Corporation are authorized to inspect or touch anything inside
the product case.

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Safety Precautions


Do not modify this product.
Never modify this product in any way. Modification might create new risks. The NF Corporation may
refuse to service an instrument that has an unauthorized modification.



Do not expose this product to water.
Use of this product when it is wet may result in electrical shock or fire. If this instrument becomes wet,
immediately unplug the power cord and contact the NF Corporation or its authorized agent.



If lightning occurs nearby, turn off the power switch and unplug the power cord.
A lightning strike may cause electrical shock, fire, or instrument malfunction.

Safety-related symbols
The marks and codes defined below are used in this manual or on this instrument itself to indicate
safety information or instructions.
Instruction manual reference symbolThis notifies the user of a potential hazard and indicates that the user mustrefer to the instruction manual.

！

Electric shock danger symbolThis symbol indicates a location that presents a risk of electric shock under
specific conditions.

！ WARNING

Warning symbolThis contains information to avoid risks when handling the equipment that
could result in the death or serious injury of the operator.

！ CAUTION

Caution symbolThis contains information to avoid risks when handling the equipment that
could result in minor or moderate injury of the operator or damage toproperty.

Other symbols
Indicates that the "ON" position of the power switch
Indicates the "OFF" position of the power switch
Indicates that the outer conductor of the connector is connected to this instrument
enclosure.

42Vpk

Indicates that the outer conductor of the connector is isolated from this instrument enclosure.
However, safe operation of this instrument requires that the potential difference from thegrounding potential is restricted to 42 Vpk or less.

This product is grounded when in use, so the electrical potential of this instrument enclosure is equal to
the ground potential.

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Safety Precautions
Electromagnetic compatibility
This product is a CISPR 11 Group 1 Class A compliant instrument. It should not be used outsideindustrial environments. Use of this product in ordinary office or residential areas may result inelectromagnetic interference with other devices.



Disposal of this productTo protect the environment, follow the guidelines described below for the disposal of this product.
a) This device is equipped with a lithium battery. Use the services of an industrial waste disposal
contractor to dispose of such batteries.
b) The LCD backlight module that is used in this product does not contain mercury.
c) Use the services of an industrial waste disposal contractor for disposal of the entire product.

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Contents
Page
1. Advanced Operation ................................................................................................................ 1-1
1.1 Measurement Time Setting .............................................................................................. 1-2
1.2 Delay Settings .................................................................................................................. 1-3
1.3 Input Settings ................................................................................................................... 1-4
1.4 Measurement Signal Controls .......................................................................................... 1-8
1.5 Automatic High Density Sweep ...................................................................................... 1-14
1.6 Graph Display ................................................................................................................ 1-16
1.7 Marker Operations ......................................................................................................... 1-26
1.8 Error Correction ............................................................................................................. 1-34
1.9 Sequence Measurement ................................................................................................ 1-62
1.10 Resonant Frequency Tracking Measurement ................................................................ 1-64
1.11 Equivalent Circuit Estimation ......................................................................................... 1-67
1.12 Calculating Piezoelectric Constants ............................................................................... 1-69
1.13 Relative Permittivity Measurement................................................................................. 1-74
1.14 Relative Permeability Measurement .............................................................................. 1-75
1.15 Comparator .................................................................................................................... 1-77
1.16 Handler Interface ........................................................................................................... 1-85
1.17 Memory Operations ....................................................................................................... 1-91
1.18 External Reference Clock ............................................................................................ 1-107
1.19 AUX Port Settings ........................................................................................................ 1-109
1.20 Other Operations ......................................................................................................... 1-110
2. File Formats ............................................................................................................................. 2-1
2.1 General ............................................................................................................................ 2-2
2.2 Measurement Data File Format ....................................................................................... 2-2
2.3 Measurement Condition File Format ................................................................................ 2-7
2.4 Equivalent Circuit File Format ........................................................................................ 2-16
2.5 Piezoelectric Constant File Format ................................................................................ 2-17
2.6 Marker Information File Format ...................................................................................... 2-19
2.7 Screen Image File Format ............................................................................................. 2-20
3. Troubleshooting ....................................................................................................................... 3-1
3.1 Error Messages ............................................................................................................... 3-2
3.2 Information Messages...................................................................................................... 3-8
3.3 Troubleshooting ............................................................................................................. 3-11
4. Maintenance........................................................................................................................... 4-1
4.1 Preface ............................................................................................................................ 4-2

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Contents
4.2 Daily Maintenance ........................................................................................................... 4-3
4.3 Storage, Repacking, and Transportation .......................................................................... 4-3
4.4 Checking the Version Number ......................................................................................... 4-4
4.5 Performance Test ............................................................................................................. 4-5
4.6 Calibration ...................................................................................................................... 4-25

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Figures and Tables
Page
Figure 1-1 Example of Response Waveform Requiring Delay ..................................................... 1-3
Figure 1-2 Waveform when Output Turns Off while 0° SYNC Is Set............................................ 1-9
Figure 1-3 Change in Output Voltage when SLOW ................................................................... 1-10
Figure 1-4 Frequency Change Mode Setting and Change in Waveform ................................... 1-11
Figure 1-5 Example of Using ALC (Measurement Mode: IMPD−EXT) ...................................... 1-13
Figure 1-6 Example of Measurement Using Automatic High Density Sweep ............................ 1-14
Figure 1-7 Graph Display Styles ................................................................................................ 1-17
Figure 1-8 Examples of Phase Measurement............................................................................ 1-19
Figure 1-9 Differences in Group Delay Display Due to Aperture Setting.................................... 1-21
Figure 1-10 Example of Auto Store ............................................................................................ 1-25
Figure 1-11 Switching Marker Display ....................................................................................... 1-27
Figure 1-12 Marker Search Example (Bode Plot, MAX / MIN / PEAK / BOTTOM) .................... 1-28
Figure 1-13 Marker Search Example (Bode Plot, Y1 VALUE) ................................................... 1-29
Figure 1-14 Marker Search Example (Bode Plot, ⊿ Y1 VALUE) ............................................. 1-29
Figure 1-15 Marker Search Example (Bode Plot, BW1) ............................................................ 1-29
Figure 1-16 Marker Search Example (Bode Plot, BW2) ............................................................ 1-30
Figure 1-17 Marker Search Example (Bode Plot, BW3) ............................................................ 1-30
Figure 1-18 Marker Search Example (Nyquist Plot, X MAX / PEAK / VALUE) .......................... 1-31
Figure 1-19 Marker Search Example (Nyquist Plot, ⊿ X) ........................................................ 1-31
Figure 1-20 Error Correction Data Flow (Measurement Mode: IMPD−EXT) .............................. 1-34
Figure 1-21 Error Correction Data Flow (Measurement Mode IMPD−3T or IMPD−2T) ............. 1-34
Figure 1-22 Error Correction Data Flow (Measurement Mode: G−PH) ...................................... 1-34
Figure 1-23 Connection for Self-calibration ............................................................................... 1-36
Figure 1-24 Description of Open Correction and Short Correction ............................................ 1-40
Figure 1-25 Connections when Measuring Open and Short Correction Data
(Measurement Mode: IMPD−EXT)....................................................................... 1-41
Figure 1-26 Example of Protection Resistor for Measuring Open / Short Correction Data ........ 1-41
Figure 1-27 Connections when Measuring Open and Short Correction Data
(Measurement Mode: IMPD−3T (1)) .................................................................... 1-42
Figure 1-28 Connections when Measuring Open and Short Correction Data
(Measurement Mode: IMPD−3T (2)) .................................................................... 1-42
Figure 1-29 Connections when Measuring Open and Short Correction Data
(Measurement Mode: IMPD−2T) ......................................................................... 1-43
Figure 1-30 Load Correction Operation ..................................................................................... 1-47
Figure 1-31 Example of Port Extension in IMPD−2T Measurement Mode ................................ 1-53

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Figures and Tables
Figure 1-32 Operation of Slope Compensation Function ........................................................... 1-57
Figure 1-33 Examples of Potential Fluctuation Waveforms That Cannot Be Eliminated ............ 1-58
Figure 1-34 Gain and Phase Measurement Connection Example ............................................. 1-59
Figure 1-35 Connections to Measure the Measurement System Errors .................................... 1-59
Figure 1-36 Piezoelectric Vibrator Measurement Connection Example ..................................... 1-64
Figure 1-37 Search Frequency Range Setting ([POLARITY] = POSITIVE) ............................... 1-65
Figure 1-38 Equivalent Circuit Estimation Examples ................................................................. 1-68
Figure 1-39 Example of Frequency Sweep for Which Piezoelectric Constant Calculation Is
Possible .................................................................................................................. 1-69
Figure 1-40 Position of Each Frequency on Complex Admittance Plane ................................... 1-71
Figure 1-41 Layout of Piezoelectric Constant Calculation Window ............................................ 1-71
Figure 1-42 Example of Dielectric Substance DUT with Large Error ......................................... 1-74
Figure 1-43 Example of Toroidal Core ....................................................................................... 1-76
Figure 1-44 Bin Sorting Screen Example .................................................................................. 1-77
Figure 1-45 Limit Comparison Screen Example ........................................................................ 1-80
Figure 1-46 Zone Comparison Screen Example (When Frequency Sweep) ............................. 1-81
Figure 1-47 Zone Comparison Result Examples ....................................................................... 1-81
Figure 1-48 Handler Interface Measurement Start Timing ......................................................... 1-87
Figure 1-49 Handler Interface Operation Timing (Measurement Synchronous Driving: Off) ...... 1-87
Figure 1-50 Handler Interface Operation Timing (Measurement Synchronous Driving: On) ...... 1-88
Figure 1-51 Handler Interface Test Screen ................................................................................ 1-90
Figure 1-52 Handler Interface Test Screen ................................................................................ 1-90
Figure 2-1 Structure of Measurement Data File (without Sequence Measurement) .................... 2-2
Figure 2-2 Structure of Measurement Data File (with Sequence Measurement) ......................... 2-3
Figure 2-3 Structure of Measurement Condition File ................................................................... 2-7
Figure 2-4 Structure of Equivalent Circuit File ........................................................................... 2-16
Figure 2-5 Structure of Piezoelectric Constant File.................................................................... 2-17
Figure 2-6 Structure of Marker Information File ......................................................................... 2-19

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Figures and Tables

Table 1-1 Open and Short Correction Frequencies in IMPD−3T and IMPD−2T Measurement
Modes .................................................................................................................... 1-46
Table 1-2 Errors due to Potential Slope (Theoretical Values) .................................................... 1-57
Table 1-3 Equivalent Circuit Types ............................................................................................ 1-67
Table 1-4 Piezoelectric Constant Calculation Function List ....................................................... 1-72
Table 1-5 Deviation Mode Settings and Sorting Value Interpretation Example(Example of C) ..................................................................................................... 1-79
Table 1-6 Handler Interface Output when Bin Sorting................................................................ 1-85
Table 1-7 Handler Interface Output when Limit Comparison ..................................................... 1-85
Table 1-8 Handler Interface Output when Zone Comparison ..................................................... 1-86
Table 1-9 Handler Interface Timing ............................................................................................ 1-87
Table 1-10 Handler Interface Terminal State when Comparator Is Disabled .............................. 1-89
Table 2-1 Data File Format (Header Part).................................................................................... 2-3
Table 2-2 Data File Format (Measurement Conditions Part)........................................................ 2-4
Table 2-3 Data File Format (Measurement Data Part) ................................................................. 2-5
Table 2-4 STATUS Information .................................................................................................... 2-6
Table 2-5 Measurement Condition File Format (Header Part) ..................................................... 2-7
Table 2-6 Measurement Condition File Format (Measurement Conditions Part) ......................... 2-7
Table 2-7 Equivalent Circuit File Format (Header Part) ............................................................. 2-16
Table 2-8 Equivalent Circuit File Format (Equivalent Circuit Data Part) ..................................... 2-16
Table 2-9 Piezoelectric Constant File Format (Header Part)...................................................... 2-17
Table 2-10 Piezoelectric Constant File Format (Piezoelectric Vibrator Data Part) ..................... 2-17
Table 2-11 Marker Information File Format (Header Part) ......................................................... 2-19
Table 2-12 Marker Information File Format (Marker Information Data Part) .............................. 2-19
Table 3-1 Power-On Errors .......................................................................................................... 3-2
Table 3-2 Panel Operation Errors ................................................................................................ 3-3
Table 3-3 Measurement Errors .................................................................................................... 3-6
Table 3-4 Other Errors ................................................................................................................. 3-7
Table 3-5 Startup Messages ........................................................................................................ 3-8
Table 3-6 Operation Messages .................................................................................................... 3-8
Table 3-7 In Case of Suspected Anomaly .................................................................................. 3-11x

ZA57630

1. Advanced Operation

1.1

Measurement Time Setting ................................................. 1-2

1.2

Delay Settings ..................................................................... 1-3

1.3

Input Settings ...................................................................... 1-4

1.4

Measurement Signal Controls ............................................. 1-8

1.5

Automatic High Density Sweep ......................................... 1-14

1.6

Graph Display ................................................................... 1-16

1.7

Marker Operations ............................................................ 1-26

1.8

Error Correction ................................................................. 1-34

1.9

Sequence Measurement ................................................... 1-62

1.10 Resonant Frequency Tracking Measurement.................... 1-64
1.11 Equivalent Circuit Estimation............................................. 1-67
1.12 Calculating Piezoelectric Constants .................................. 1-69
1.13 Relative Permittivity Measurement .................................... 1-74
1.14 Relative Permeability Measurement .................................. 1-75
1.15 Comparator ....................................................................... 1-77
1.16 Handler Interface ............................................................... 1-85
1.17 Memory Operations ........................................................... 1-91
1.18 External Reference Clock................................................ 1-107
1.19 AUX Port Settings ........................................................... 1-109
1.20 Other Operations ............................................................. 1-110

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1.1 Measurement Time Setting

1.1 Measurement Time SettingThis instrument performs discrete Fourier transform (DFT) of the voltage or current
waveforms of the device under test (DUT) and then calculates and displays the impedancefrom the obtained voltage amplitude or current amplitude and phase difference. By nature,
DFT essentially removes harmonics (distortion components) and noise. However, when thevoltage or current amplitude is small, measurement errors increase due to influences such as
noise generated inside this instrument. In such cases, measurement with higher accuracy ispossible by setting a longer measurement time.
Influence due to white noise is reduced in rough proportion to the square root of themeasurement time setting. Noise components other than the measurement frequency
component are also reduced by increasing the measurement time, but this naturally increases
the time required for measurement.
Set the measurement time in seconds in [Measure]－[MEASURE TIME].

Usually, there will be no problem if you leave the measurement time set to 0 s, but increase it
for measurement with higher accuracy or when measuring in an environment with a lot ofnoise. The actual measurement time will be the time rounded to the integer cycle of themeasurement signal frequency.
The set measurement time is the setting for the waveform acquisition time to perform the
DFT process. In actual measurement, time will be required for auto range processing anddata processing inside this instrument and screen display in addition to the set measurement
time. When 0 s is set for both the measurement time and the measurement delay time with
fixed measurement range, the total time per measurement point will be approximately thefollowing time depending on the sweep item setting.
Frequency sweep

From 0.5 ms/point

Signal amplitude sweep

From 2 ms/point

DC bias sweep

From 3 ms/point

Zero span sweep

From 0.5 ms/point

Please note that the measurement accuracy specifications of this instrument differ dependingon the measurement time setting. For details, refer to “5. Specifications” in Instruction Manual(Basics).
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1.2 Delay Settings

1.2 Delay Settings
If the measurement frequency, amplitude, or DC bias is changed as the sweep progresses whenmeasuring a DUT with a slow response, a transient response causes an error in the measurement
results. This instrument has a function to reduce this error by inserting a delay after the frequency,
amplitude, or DC bias is changed and before the measurement is started. Set the delay time tomatch the response characteristics of the DUT. A DUT with abrupt changes in characteristics, suchas a crystal oscillator, cannot be measured accurately unless a large delay is set.
Measurement
signalwaveform

Freq1

Freq2

Amptd1 Amptd2

Ofs1

Ofs2

When amplitude changed

When DC bias changed

DUT
response
waveform

When frequency changed

Measurement range when delay = 0 (error is generated)
Measurement range when appropriate delay
Figure 1-1 Example of Response Waveform Requiring Delay
A delay needs to be considered for during sweep measurement, when a sweep starts, when themeasurement signal is changed in spot measurement, when a DUT with a large time constant(e.g., electrolytic capacitor) is connected, etc. There are two delay settings: measurement start
delay (START DELAY) and measurement delay (MEASURE DELAY), and the two types of delaydiffer in the timing with which the delay takes effect. Both delays are set in the [Measure] menu.

[START DELAY]: This delay time is inserted only at the start of sweep measurement orat the start of spot measurement.

[MEASURE DELAY] : This delay time is inserted each time a parameter changes during a sweep.
Find the appropriate delay time by performing measurement while increasing the delay time
little by little. An appropriate delay time is one with a little time to spare so that large
differences in measurement results do not occur.
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1.3 Input Settings

1.3 Input Settings
1.3.1 Measurement Range Settings
The setting values and ranges for the measurement range settings differ depending on themeasurement mode.
(Measurement mode IMPD−EXT or G−PH)
Set each of the measurement voltage ranges of PORT1 and PORT2 independently. The
possible setting range is shown below.
Fixed range: 1-2-5 sequences in the range from 10 m to 5 Vrms, and 7 Vrms
Auto range: AUTO
For the maximum input voltage of each range, the peak voltage including DC voltage is about
1.4 fold of the range nominal value.
The value of each range is the maximum measurement voltage level for the input connectorsof this instrument, and is not related to the input weighting factor setting (refer to “1.8.2 Input
Weighting”).
Configure the settings in [Range]－[RANGE PORT1] / [RANGE PORT2].
(Measurement mode IMPD−3T or IMPD−2T)
Set the impedance measurement range. The possible setting range is shown below.
Fixed range: Set a range of 10 Ω to 1 MΩ (when IMPD−3T)/1 Ω to 1 kΩ (when IMPD−2T)
with a 1-decade resolution.
Auto range: AUTO
Configure the setting in [Range]－[RANGE].
IMPD−EXT
G−PH

IMPD−3T
IMPD−2T(IMPD−3T)(IMPD−2T)■ Fixed range
Discontinuities (steps) in the measurement values from before and after range changes do notoccur because the range does not change during measurement. However, the measurement
accuracy will decrease if measurement significantly different from the range full scale isperformed.

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1.3 Input Settings■ Auto range
Perform the measurement while monitoring the measurement results and setting the range
to find the optimal range. When the measurement mode is IMPD−EXT or G−PH, expand therange and repeat the measurements if external noise or a DC component that exceed therange is detected.
When a large dynamic range is required (the variations in the measurement data aresignificant), auto range should be used. Normally, use this instrument with auto range set.

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1.3 Input Settings

1.3.2 Over-level Detection
This can be set when the measurement mode is IMPD−EXT or G−PH. This function monitors
the input signal amplitude and performs operations such as sounding the buzzer when thesignal exceeds the set amplitude.
IMPD−EXT
G−PH

IMPD−3T
IMPD−2T

Over-level detectionlevel setting
Operation for when
over-level detection

Operation for when
over-level detection■ Setting the over-level detection level
This can be set when the measurement mode is IMPD−EXT or G−PH.
Configure the setting in [Range]－[OVER LEVEL PORT1] / [OVER LEVEL PORT2]. This has asetting range of up to 7 Vrms and can be set independently for PORT1 and PORT2. It is not
related to the input weighting factor setting (refer to “1.8.2 Input Weighting”), and is set as thesignal amplitudes input to PORT1 and PORT2 of this instrument.
When the measurement range is set to a fixed range, an input signal that exceeds that range
will trigger over-level detection even if it is smaller than the level set here. The DC component
and sudden spike noise will also trigger over-level detection. In an environment where thenoise or DC component is large, set a wide measurement range or use auto range.
■ Setting the operation for when over-level detection
When over-level is detected, the over-level occurrence message appears on the LCD. In
addition to displaying a message, this instrument can also perform the following operations.
・Sound the buzzer.
・Stop measurement (when the measurement mode is IMPD−EXT or G−PH).
Configure the settings in [Range]－[OVER ACT BEEP] and [Range]－[OVER ACT MEAS],
respectively. If the measurement stop operation ([Range]－[OVER ACT MEAS]) is set to[STOP], sweep measurement and spot measurement are stopped upon over-level detection. If[OSC]－[ON/OFF SYNC] is set to [SYNC], measurement signal output is turned off together
with the stopping of measurement.
■ Measurement data when over-level is detected
The measurement data for which over-level was detected is indicated as “NaN” (Not a
Number). The measurement data for which over-level was detected is not plotted on the

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1.3 Input Settingsgraph.
Even if measurement is stopped as a result of over-level detection, the data from the start ofthe sweep to the over-level is retained. When not stopping measurement upon over-level
detection is set, the measurement data for which over-level was detected in the sweep data is
indicated as NaN. The measurement data that is stored in the USB memory device is also
indicated as NaN.
■ Over-level detection in measurement mode IMPD−3T or IMPD−2T
When the measurement mode is IMPD−3T or IMPD−2T, the over-level detection level isdetermined internally and cannot be changed. If over-level is detected in either of these modes,
move this instrument or DUT away from the source of the noise. If auto range is set or themeasurement signal amplitude is set high, there will also be cases where over-level will beless likely to occur.
■ Timing of over-level detection
This instrument detects whether the level is over or not over (normal state) at the point intime when measurement is performed. Therefore, this instrument will maintain theover-level state even if measurement signal output is turned off after over-level is detected.

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1.4 Measurement Signal Controls

1.4 Measurement Signal Controls
For the basic settings (frequency, AC amplitude, and DC bias) and on/off operation, refer to“4.3 Setting Measurement Signals” in Instruction Manual (Basics). This section describes moreadvanced measurement signal control.

1.4.1 Measurement Synchronous Drive
This function automatically turns measurement signal output on at the start of measurement
and off at the end of measurement. Since a measurement signal is output only during
measurement, you can use this when applying a measurement signal to the DUT for a long
period of time is undesirable. Configure the setting in [OSC]－[ON/OFF SYNC].

[ASYNC]: Do not control the measurement signal output at the start ofmeasurement and at the end of measurement.

[SYNC(AC+DC)] : Control the measurement signals of both AC amplitude and DC bias.
[SYNC(AC)]: Control the measurement signal output of only AC amplitude.

Set this to SYNC(AC) when changing the DC bias during measurement is undesirable (whenfrequency sweep or AC amplitude sweep).
Operation is performed in the following order when this is set to SYNC(AC+DC) or SYNC(AC).
Measurement process is started (UP, DOWN, or SPOT key is pressed).
↓
Measurement signal output turns on.
↓
Measurement starts.
↓
Measurement ends.
↓
Measurement signal output turns off.
During sequence measurement execution (refer to “1.9 Sequence Measurement”) and repeat
measurement, the output turns off once every time each sweep measurement or spotmeasurement ends.

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1.4 Measurement Signal Controls

1.4.2 ON/OFF Mode
This sets the operation for when measurement signal output is turned on/off. Configure thesetting in [OSC]－[ON/OFF MODE].

[QUICK]: Turn the output on or off immediately.

[SLOW]: Change the AC amplitude or DC bias gradually over a period of
approximately 10 seconds.

[0° SYNC] : When output is turned off, turn it off after waiting until the 0° phase of the
waveform.
Set this to SLOW when sudden changes in the signal amplitude are undesirable, such as
during mechanical impedance measurement, etc. In electrochemical measurement, set this to
0° SYNC when changes in the charge due to the measurement signals before and after
measurement are undesirable.
The following figure shows the difference in the waveform when output turns off while
QUICK is set and while 0° SYNC is set.
Time
0V

QUICK

0V

0° SYNCAC OFF
Figure 1-2 Waveform when Output Turns Off while 0° SYNC Is Set

When 0° SYNC is set, please note that it may take approximately one cycle of the signal forthe output to actually turn off depending on the timing of turning the output off. For 10 µHz,
it will take 105 s ≈ 28 hours to turn off in the worst case.
Please also note that the actual oscillation stop phase may deviate more from 0° if themeasurement signal frequency becomes higher than approximately 100 kHz.

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1.4 Measurement Signal Controls
The following figure shows an example of operation when this is set to SLOW.
AC and DC
output voltages(A)(B)
Setting value 2
Approx. 10 s

Setting value 3
Setting value 1

Time

0(OFF)

Figure 1-3 Change in Output Voltage when SLOW
When the off state is included before and after the change, such as when changing from theoutput off state to the output on state or from the output on state to the output off state, themeasurement signal outputs (both AC and DC) change continuously. However, please notethat when the off state is not included before and after the change (setting value 1 → setting
value 2 → setting value 3), discontinuous spike noise of approximately 10 ms is generated in
the measurement signal outputs at the timing indicated by (A) and (B) in the figure above.
This spike noise can be prevented by turning the outputs off, changing the settings, and thenturning the output on.
The AC and DC lamps on the front panel flash during the SLOW change or during the 0°
SYNC wait.

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1.4 Measurement Signal Controls

1.4.3 Frequency Change Mode
You can set the timing to change the frequency during frequency sweep measurement or thetiming to change the frequency when the frequency setting is changed. Configure the settingin [OSC]－[FREQ CHNG MODE].

[ASYNC] : Change the frequency immediately regardless of the measurement signal
phase.
[0° SYNC] : Change the frequency after waiting until the 0° phase of measurement signal
output. The average voltage (DC component) between the start and end of thefrequency sweep becomes zero.
When 0° SYNC is set, please note that it may take approximately one cycle of the signal forthe frequency to actually change depending on the timing of changing the frequency (for10 µHz, it will take 105 s ≈ 28 hours for the frequency to change in the worst case).
f1

f2
Time

0V

0° SYNC

0V

ASYNC
f1
f2
Change frequency

Figure 1-4 Frequency Change Mode Setting and Change in Waveform
The 0° SYNC setting is used for measurement such as electrochemical impedance
measurement (EIS). The total amount of electricity injected into the DUT at the start and endof the frequency sweep does not change.
Please also note that the actual frequency switch may deviate more from 0° if themeasurement signal frequency becomes higher than approximately 100 kHz.
The frequency indication on the LCD flashes while in the state of waiting until after the 0°phase to change the frequency.

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1.4 Measurement Signal Controls

1.4.4 Automatic Level Control (ALC)
This function automatically controls the level so that the measurement signal amplitude
applied to the DUT matches the amplitude set in [OSC]－[AMPLITUDE]. Use this function
when you wish to perform measurement with the voltage/current amplitude of the DUT in aconstant state by correcting the frequency characteristics of the measurement cable and DUT
drive amplifier (when the measurement mode is IMPD−EXT).
ALC : Automatic Level Control
CV : Constant Voltage
CC : Constant Current
Configure the setting in [OSC]－[ALC]－[ALC].
IMPD−EXTIMPD−3T
G−PH
IMPD−2T

Measurement is performed with the current settings and then the operation to performmeasurement again is repeated while adjusting the measurement signal amplitude until thedifference from the amplitude set in [OSC]－[AMPLITUDE] comes within the permissible error.
The ALC operation is performed as follows depending on the measurement mode.
[ALC]:

Set the ALC operation mode.

(Measurement mode IMPD−EXT or G−PH)[OFF] Do not perform ALC. (Initial value)[CV1] Automatically control the measurement signal amplitude so that the voltage
amplitude input to PORT1 becomes constant.
[CV2] Automatically control the measurement signal amplitude so that the voltage
amplitude input to PORT2 becomes constant.
(Measurement mode IMPD−3T or IMPD−2T)[OFF] Do not perform ALC. (Initial value)[ON]

Perform ALC. Perform constant voltage (CV) control when the setting of[OSC]－[AMPLITUDE UNIT] is V (voltage), and constant current (CC) control
when it is A (current).

[TOLERANCE]:

Set the permissible error from the set amplitude. Amplitudecontrol will be performed until the difference between theamplitude set in [OSC]－[AMPLITUDE] and the measured

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1.4 Measurement Signal Controls
amplitude becomes this value or lower.
Set the maximum number of times to repeat. If the difference[RETRY TIMES]:

does not become within the permissible error even after
exceeding this number of times, amplitude control will stop,
but measurement results can still be obtained.
[CORRECTION FACTOR]: Set the correction factor. Usually, use this instrument withthis set to 100%. Amplitude control may not settle and an
unstable state may result due to the response of the DUT. If
that happens, reduce this value.
The figure below shows a connection example in the IMPD−EXT measurement mode.
Controlling the amplitude for the input of PORT1 (CV1) enables measurement while thevoltage amplitude applied to the DUT is kept constant. Controlling the amplitude for the
input of PORT2 (CV2) enables measurement while the current is kept constant.
ZA57630

DUT drive amplifier

OSC / HCUR
Differential
probe

PORT1 / HPOT

DUT
Zx

v
i

PORT2 / LCUR

Current detection resistor
Rs

Figure 1-5 Example of Using ALC (Measurement Mode: IMPD−EXT)■ When amplitude control could not be achieved
If the difference did not become within the permissible error even after exceeding the
maximum number of repeat times or when an amplitude setting that exceeds the output
amplitude limit has become necessary, amplitude control has failed, but measurement results
can still be obtained. In sweep measurement, amplitude control is attempted again with thefollowing sweep parameters (frequency/AC amplitude/DC bias).
■ When correction processing is performed
Even if corrections such as open correction, short correction, load correction, port extension,and equalizing are performed, they will have no effect on ALC operation. The same amplitudecontrol as when measurement is performed with correction off will be performed.

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1.5 Automatic High Density Sweep

1.5 Automatic High Density Sweep
When the measurement data changes significantly in frequency sweep measurement, thisfunction automatically increases the density of sweep measurement only in the vicinity ofthat data. Increasing the measurement resolution only where necessary enables accurate
results to be obtained in a short time. This function can be used only for a frequency sweep.
This function compares the amount of measurement data change between adjacentmeasurement points |dn－dn-1| (where dn is the measurement data at frequency fn and dn-1 isthe measurement data at frequency fn-1 immediately before) with the set threshold value[VARIATION]. If the threshold value is exceeded, a measurement frequency point is added
between fn-1 and fn and then measurement is performed again. The frequency density is
increased automatically until the measurement data variation falls below the threshold. After
frequency fn, measurement is performed at the normal sweep density again.
The figure below shows an example of the automatic high density sweep measurement of the
impedance characteristics of a crystal oscillator. The black dots (●) indicate the measurement
data points. We can see that the frequency density is automatically made high only in theparts where there is a sudden change in the characteristics.

|Z|
Frequency
Figure 1-6 Example of Measurement Using Automatic High Density Sweep
Configure the automatic high density sweep settings in [Sweep]－[SLOW SWEEP].

[FUNCTION] :Set this to ON when you wish to perform an automatic high density
sweep. For normal sweep measurement, set this to OFF.
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1.5 Automatic High Density Sweep[TYPE]:[VARIATION] :Set the parameter to be monitored.
Set the parameter change threshold value. If the amount of change
relative to the measurement value at the previous frequency
exceeds the value set here, it is judged to be a sudden change andan automatic high density sweep is performed.

■ Example of automatic high density sweep setting
The measurement of the resonance characteristics of piezoelectric vibrators and crystal
oscillators is an example of measurements where the automatic high density sweep is
effective. The phase θ changes suddenly in the vicinity of the series/parallel resonant
frequency. Accordingly, automatic high density measurement only in the vicinity of theresonant frequency is possible if the monitoring parameter [TYPE] is set to phase θ.
Try performing measurement with a change threshold value [VARIATION] of approximately
10° and then adjust it as necessary. Setting this to a smaller value will produce higher density
results, but the measurement time will become longer.
■ Cautions for automatic high density sweep
・ Setting [VARIATION] to a smaller value will increase the number of frequency points. If the
maximum number of measurement points (20,001) for a high density sweep is exceeded, the-3072 error message is displayed and sweep measurement is ended at that time. Pleasetake note of this because the measurement ends without reaching either the uppermeasurement frequency limit or lower measurement frequency limit. For details on error
messages, refer to “3.1 Error Messages”.
・When the sweep item is other than frequency, an automatic high density sweep will not be
performed even if [FUNCTION] is set to ON. Normal sweep measurement is performed
instead.
・When sequence measurement is performed, an automatic high density sweep will not be
performed even if [FUNCTION] is set to ON. Normal sweep measurement is performed
instead. For details on sequence measurement, refer to “1.9 Sequence Measurement”.

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1.6 Graph Display

1.6 Graph Display
1.6.1 Setting the Title
Set the title text for the data that is being displayed. The set text is displayed at the top of thegraph. When the data is saved to the internal or external memory, the title is also saved
together with the data.
Configure the title text setting in [Graph]－[TITLE SET]. Up to 32 characters can be input.

1.6.2 Setting the Scale
Set the display range of the X, Y1, and Y2 axes of a graph. Usually, the AUTO or AUTO−R
setting is convenient, because the ranges are adjusted automatically to suit the data that isbeing displayed. The FIX setting allows the display range to be set to an arbitrary value.
Configure the setting in [Graph]－[SCALE].

:

Automatically adjust the display range for each of the X, Y1, and Y2 axes.

[AUTO−R] :An impedance locus or vector locus that becomes a semicircle in a Cole-cole[AUTO]

plot or Nyquist plot is displayed so that it becomes a semicircular shape on
the screen.
[FIX]

:

Manually set the display range for each of the X, Y1, and Y2 axes.

When you configure the range setting of each axis in [Graph]－[SCALE RANGE], a button for
setting the graph axis range is displayed in the function keys. In addition to specifying a
numerical value directly, you can set a graph range that matches the data range that is being
displayed. For details on operating the function keys, refer to “3.5.5 Graph Menu” in Instruction
Manual (Basics).

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1.6 Graph Display

1.6.3 Setting the Graph Style
Graphs have two display styles (SINGLE and SPLIT), which can be set in [Graph]－[STYLE].

When split display is set, the Y1-axis data is displayed on the graph in the upper half and theY2-axis data is displayed on the graph in the lower half.

Single Display

Split Display

Figure 1-7 Graph Display Styles■ Split display restrictions
When a Nyquist plot or Cole-cole plot is displayed with the SPLIT display style, a small graphis displayed in the upper half of the screen and the lower half is empty. Use the SINGLE
display style to display graphs other than Bode plots.

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1.6 Graph Display

1.6.4 Grid Display
This function displays a grid on the graph. Configure the settings in [Graph]－[GRID] / [GRID
LINE STYLE].

[GRID] :Select the grid display target.

[OFF]

Do not display a grid.

[X]

Display a grid for the X-axis only.

[X−Y1]

Display grids for the X-axis and Y1-axis.

[X−Y2]

Display grids for the X-axis and Y2-axis.

[X−Y1−Y2]

Display grids for the X-axis, Y1-axis, and Y2-axis.

[GRID LINE STYLE] :Select the type of grid line.

[BROKEN LINE]

Broken grid lines[SOLID LINE]

Solid grid lines

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1.6 Graph Display

1.6.5 Setting the Phase Display Operation
Set the phase display range. Configure the setting in [Graph]－[PHASE RANGE].

[±180°]:

Display the phase within the range of −180° ≤ θ < +180°.

[0°～+360°]: Display the phase within the range of 0° ≤ θ < +360°.
[−360°～0°]: Display the phase within the range of −360° ≤ θ < 0°.
[UNWRAP]: Display the unwrapped phase. The phase can also exceed ±360°.
The phase value itself does not change, regardless of the setting. For example, the phase thatis −90° when the setting is ±180° is displayed as +270° when the setting is 0° to +360°, but thephase angle itself is the same. The phase measurement examples in the figure below appear
different but all four of them are the same in terms of the phase information.

±180°

0° to +360°−360° to 0°
UNWRAP
Figure 1-8 Examples of Phase Measurement
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1.6 Graph Display■ Unwrapped phase display
For the [UNWRAP] display setting, the unwrapped phase process and display are performed
with the phase measurement value at the start of the sweep as the reference. Thus, when
DUTs that have exactly the same phase characteristics are measured by up-sweep anddown-sweep measurement, the results may be displayed in graphs that differ in phase by an
integer multiple of 360°.
■ About the 360° phase shift function
If you tap either [+360°] or [−360°] of the function keys displayed when [Graph]－[PHASE
RANGE] is selected, phase data for which 360° has been added or subtracted to/from thecurrently displayed phase is displayed in the graph. Use this function if a phase value
becomes too large when an unwrapped phase is displayed. Please note that the phase
information itself does not change. When the phase display range setting is other than
[UNWRAP], the display is not changed.

1) Select PHASE RANGE.

2) Tap.
■ Aperture setting[Graph]－[APERTURE] is the moving average width of the phase characteristic for group delay
display. This function is effective when the measurement mode is G−PH, which allows groupdelay display.

Setting a larger value for this setting reduces the noise and produces a smoother group delay
characteristic, but sudden changes are not observed. Set the aperture to an even number that
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1.6 Graph Display
is less than the number of the frequency points in the sweep (but no more than 200). Set a
value that is appropriate for the DUT.
The following figure shows differences in the group delay characteristic due to the aperture
setting of the bandpass filter for communication. Each of the upper parts shows the passcharacteristic (gain) and each of the lower parts shows the group delay characteristic. We cansee that a higher aperture setting results in a smoother group delay characteristic. Please
note that the gain and phase characteristics are not affected by the aperture setting.

Aperture setting = 2
Aperture setting = 20
Figure 1-9 Differences in Group Delay Display Due to Aperture Setting

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1.6 Graph Display

1.6.6 Trace Operations
The graphing function of this instrument can display a total of nine traces, one measurement trace(MEAS TRACE) and up to eight reference traces (REF TRACE), and each of them can be displayedor hidden individually. Furthermore, there is Y1 data and Y2 data for each of the traces.
Data that is obtained by measurement is stored in MEAS TRACE, and that data is overwritten eachtime a measurement is performed. The REF TRACE data, on the other hand, is retained unless anoperation to explicitly remove it is performed. Displaying reference data in REF TRACE allows it to
be plotted at the same time as the measurement data so that both data can be compared.
■ Copying MEAS TRACE to REF TRACE
To copy the measurement data (MEAS TRACE) to REF TRACE, tap [Trace]－[MEAS TRACECOPY]－[REF TRACE] and then enter the copy destination reference trace number (1 to 8).
Tap the [OK] function key to copy. When copying is finished, a message will be displayed for ashort time.

■ Deleting a trace
The data of each trace can be deleted in [Trace]－[DELETE MEAS] / [DELETE REF]. In the caseof a reference trace, specify the number (1 to 8) of the trace to delete. Tap the [DELETE]
function key and then tap [OK] in the deletion confirmation dialog box to delete the target
trace. Deleted data cannot be recovered, so perform the delete operation with care.

1) Select the trace
to delete.
2) Tap OK.

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1.6 Graph Display■ Displaying and hiding traces
Select [Graph]－[DISPLAY TRACE]－[MEAS] / [REF1] to [REF8] and then tap [ON] or [OFF] inthe displayed menu to display or hide the corresponding trace.
Data is retained even when hidden. If you set ON, the data will be redisplayed.

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1.6 Graph Display

1.6.7 Setting Trace Colors
An arbitrary color can be set for each of the data traces (MEAS and REF1 to REF8) and the Y1
and Y2 traces of each trace. Tap the trace for which to change the color in [Graph]－[PLOTCOLOR], select/set the color with the function keys, and tap [OK].

2) Select the trace
to change.

1) Tap PLOT
COLOR.

4) Tap OK.
Colors other than default colors
Default colors

3) Select a color.

[MEAS Y1], [MEAS Y2]:

Change the color of the MEAS trace.

[REFn Y1], [REFn Y2]:

Change the color of the REFn trace (n = 1 to 8).

[GRADATION]:

Automatically set the REF1 to REF8 traces to colors
determined by gradually fading using the current MEAS
trace color as the base.

[DEFAULT]:

Reset the colors of all traces to the factory default state.

[GRADATION] and [DEFAULT] are executed by tapping the [EXEC] function key.
[GRADATION] is convenient when you use the auto store function (refer to “1.6.8 Auto Store”).

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1.6 Graph Display

1.6.8 Auto StoreThis function automatically copies the measurement data (MEAS trace) to a REF trace whensweep measurement finishes. Each time a sweep finishes, the contents of MEAS and REF1 to
REF(n-1) trace data are copied to the respective adjacent REF1 to REFn traces (n is a
maximum of 8). The latest n sweep data is displayed and updated and data older than that is
discarded. This is convenient when, for example, you wish to observe the state of a DUT thatchanges over time.
Set auto store in [Trace]－[AUTO STORE]. Set the maximum number of data to display (1 to 8)
or OFF. If this is set to OFF, the REF traces will not be updated automatically.

Figure 1-10 Example of Auto Store

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1.7 Marker Operations

1.7 Marker Operations
Perform sweep measurement and display markers on data of the displayed graph to allow you
to read the measurement values. Up to eight markers (MARKER1 to MARKER8) can be used,
and the values of the active marker that can be moved with knob are displayed as numericalvalues in the marker display area at the top of the graph. The values of a maximum of eightmarkers can be displayed at the same time on the LCD.
For details on the basic operations of markers, refer to “3.1 Functions and Operations of Panel
Parts” and “3.5.6 Marker Menu” in Instruction Manual (Basics).
■ Types of markers
There are three type of markers: normal markers, ⊿markers, and ⊿TRKG markers. Onlya normal marker can be selected for MARKER1, but you can freely select from the three typesof markers for MARKER2 to MARKER8. Set the type of marker in [Marker]－[MARKERn]－[MODE].
MARKER1 MARKER2 to 8

[OFF]:Do not display a marker.

[NORMAL]: Set the marker to a normal marker. The marker position (measurement
value) is displayed.
[⊿ ]:Set the marker to a ⊿marker. The difference from MARKER1 is displayed.

[⊿TRKG]:

Set the marker to a ⊿TRKG marker. The information of the difference from
MARKER1 is displayed just like with a ⊿marker. If MARKER1 is moved,
the marker is moved while keeping the SWEEP value difference constant.

The active marker can be moved with the knob on the front panel, the active marker can bechanged with the ACTIVE key below the knob, and the data trace indicated by the active
marker can be selected with the TRACE key.
A normal marker is displayed as “＊,” a ⊿marker is displayed as “⊿,” and a ⊿TRKG marker
is displayed as “T” on the graph, and the marker numbers (1 to 8) are displayed above thecorresponding markers. The active marker is displayed highlighted.

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1.7 Marker Operations
The active marker and its read values are displayed at the top of the graph.

＊ M

01
None: When normal measurement (sequence measurement is off)
01 to 32: Memory number for sequence measurement

M: Measured data trace
R1 to R8: Reference trace＊: Normal marker⊿: ⊿marker
T: ⊿TRKG marker
Tapping the [Marker] button displays a list of all the markers at the bottom of the LCD.
Tapping × at the bottom right in all-marker display returns to active marker only display.

Display of active marker values only
Simultaneous display of all marker values
Figure 1-11 Switching Marker Display
A hidden marker cannot be made the active marker. Furthermore, the read values of a hidden
marker are indicated as “NA” in all-marker display.
The STATUS column on the right side of the marker list display is the range and over-level
information from when the data indicated by the marker was measured.
(Measurement mode: IMPD−EXT or G−PH)

100mV,

5V, 13(Measurement mode: IMPD−3T or IMPD−2T)

100Ω,

Over-level information 0 to 15
PORT2 measurement range,0Over-level information 0 to 15(Blank)PORT1 measurement range.

Measurement range

The over-level information is a decimal number from 0 to 15 with the following value added.
When PORT1 over+8

When PORT2 over+4

When over range+2 (when measurement mode is IMPD−3T or IMPD−2T only)

When ALC error

+1

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1.7 Marker Operations■ About the marker search function
In addition to turning the knob to move the marker and read data values, you can perform an
automatic search for locations that match specified conditions. The search conditions include
the maximum value (MAX), minimum value (MIN), value (VALUE), peak value (PEAK), andbottom value (BOTTOM) for each of the X-axis, Y1-axis, and Y2-axis. For value, peak value,and bottom value, you can also search for the next candidate (NEXT) or the previous
candidate (PREV).
Set the marker search related parameters in [Marker]－[SEARCH VALUE]. Select the searchtarget in [Marker]－[SEARCH] and then execute the search by tapping a displayed function key.
For details on the setting items, refer to “3.5.6 Marker Menu” in Instruction Manual (Basics).

2) Select the
search target.

1) Set the searchvalues.

3) Execute the search.

The marker search locations for when the X-axis of the graph is SWEEP (frequency, AC
amplitude, DC bias, or time) are shown in the figure below. Search with the active marker.
NEXT
MAX
PEAK
PEAK
(1)
(2)

Y1,Y2

(2)
BOTTOM, MIN

(1)
(3)
NEXT
BOTTOMX (SWEEP)

Figure 1-12 Marker Search Example (Bode Plot, MAX / MIN / PEAK / BOTTOM)

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1.7 Marker Operations
The marker search locations after the value search is performed are shown in the following
figure. This is an example for the Y1 value search, but it also applies to Y2 values. Searchwith the active marker.

Y1 VALUE
Y1,Y2

Y1

(1)

(2) (3) (4)NEXT Y1

X (SWEEP)(5)

Figure 1-13 Marker Search Example (Bode Plot, Y1 VALUE)
The locations from the ⊿Y1 and ⊿Y2 marker search are shown in the following figure.
Search with the active marker using MARKER1 as the reference. When the active marker is anormal marker, a search is performed with the active marker considered to be set as a⊿marker or ⊿TRKG marker, but the type of the active marker does not change.

⊿Y1 VALUE

MARKER1＊⊿
Y1,Y2⊿ MARKERn

X (SWEEP)(1)(2) (3) (4)NEXT ⊿ Y1(5)

Figure 1-14 Marker Search Example (Bode Plot, ⊿Y1 VALUE)
A BW1 search places MARKER1 at the maximum value (MAX) of Y1 and MARKER2 at alocation ⊿Y1 away using MARKER1 as the reference. MARKER2 is placed at the locationthat is ⊿Y1 away from MARKER1 and nearest to the X position of MARKER1. This isconvenient for obtaining the cutoff frequency in lowpass/highpass filter and other transfer
characteristic measurement (when the measurement mode is G−PH).
MARKER1＊⊿Y1

MARKER2⊿

Y1
X (SWEEP)

not MARKER2

Figure 1-15 Marker Search Example (Bode Plot, BW1)

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1.7 Marker Operations
A BW2 search places MARKER1 at the maximum value. MARKER2 is placed at the locationthat is ⊿Y1 away from MARKER1 and smaller than and nearest to the X position of
MARKER1. MARKER3 is placed at the location that is ⊿Y1 away from MARKER1 and larger
than and nearest to the X position of MARKER1. This is convenient for obtaining the pass
bandwidth in the transfer characteristics (measurement mode: G−PH) of a band pass filter.
MARKER1＊
not MARKER3⊿Y1⊿
MARKER2

MARKER3⊿
not MARKER3
Y1

not MARKER2X (SWEEP)

Figure 1-16 Marker Search Example (Bode Plot, BW2)
A BW3 search places MARKER1 at the maximum value. MARKER2 is placed at a locationthat is ⊿Y1 away from MARKER1 and where the X position is the minimum. MARKER3 isplaced in a location that is ⊿Y1 away from MARKER1 and the X position is the maximum.
This is convenient for obtaining the notch width in the transfer characteristics (measurement
mode: G−PH) of a band elimination filter.
MARKER1＊
MARKER2⊿⊿
MARKER3
Y1⊿Y1

X (SWEEP)
Figure 1-17 Marker Search Example (Bode Plot, BW3)

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1.7 Marker Operations
For graphs that have multiple Y values for an X value, such as Nyquist plot or Cole-cole plot,
the X axis is also searched for PEAK / BOTTOM. Search with the active marker.
Y (Imag)NEXT X
NEXT X PEAK

X (Real)X MAX
X PEAKX VALUE
Figure 1-18 Marker Search Example (Nyquist Plot, X MAX / PEAK / VALUE)An ⊿X search searches with the active marker using MARKER1 as the reference in the same
way as a Bode plot. When the active marker is a normal marker, a search is performed withthe active marker considered to be set as a ⊿marker or ⊿TRKG marker, but the type of theactive marker does not change.
Y (Imag)
MARKER1＊

NEXT ⊿ X⊿ MARKER⊿
X (Real)⊿ X VALUE

Figure 1-19 Marker Search Example (Nyquist Plot, ⊿ X)
A PREV search moves the marker in the reverse order of a NEXT search.

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1.7 Marker Operations■ Marker search procedure(1) When performing a value search, set the value to search in each parameter of [Marker]－[SEARCH VALUE].
(2) Select [SEARCH X], [SEARCH Y1] or [SEARCH Y2] depending on the search target (X, Y1,
or Y2).
(3) Tap the function key for the item to search. There are multiple search items, so scroll
with the [1/4 ⇒] to [4/4 ⇒] function keys and tap the desired search item key.
(4) The marker moves and a search completed message is displayed for a short time.

■ Data position indicated by a marker
A marker moves only to data that has actually been measured. A marker search also only
finds measured data, and a marker is moved to the data position that is nearest to the search
conditions. Accordingly, a location that is an exact match to the set value is not usually found.
For a more accurate reading of the marker value, increase the sweep resolution ([Sweep]－[SWEEP RESOLN]) and perform the measurement again.
■ Marker search for sequence measurement data
A marker search is performed within the sequence data on which the search target marker isplaced. Data for which the sequence number is exceeded cannot be searched.

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1.7 Marker Operations■ How to execute a marker search automatically when a sweep ends
The marker search settings can be preregistered so that a marker search is performed
automatically when sweep measurement ends. Select the search item in [Marker]－[AUTO
SEARCH]. If this is set to [OFF], a search is not performed automatically.

The search method is the same as for a manual search. However, the NEXT and PREV
operations cannot be set. For the search items that can be set, refer to “3.5.6 Marker Menu” inInstruction Manual (Basics).
A practical example of automatic searching is presented below.
(Measuring the self-resonant frequency of an inductor)
Perform a frequency sweep to measure the impedance-frequency characteristic of the DUT
inductor (set Y1 to Z and Y2 to θ).
・ Set [AUTO SEARCH] to [Y1 PEAK].
When the sweep ends, the marker moves to the maximum Z value. The marker frequency is
the self-resonant frequency. The resonant frequency may also be defined as the frequency forwhich the phase is 0°. In that case, set the settings of this instrument as shown below.
・ Set [SEARCH VALUE Y2] to 0.0.
・ Set [AUTO SEARCH] to [Y2].
Y1 (Z)

Y1 PEAK＊Y2 (θ)0°＊

VALUE Y2=0 °X (Frequency)
Resonance
Frequency

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1.8 Error Correction

1.8 Error Correction
This section describes the error correction functions of this instrument. The available
correction functions differ depending on the measurement mode.
HPOT/PORT1DFT

LCUR/PORT2

SLOPE
COMP

CALIBRATION

WTG
FAC

OPEN CORR
OPEN_PEXT CORR
PORT
Corrected
SHORT CORR
SHORT_PEXT
CORR
EXT
data
LOAD CORR
LOAD PEXT CORR
Figure 1-20 Error Correction Data Flow (Measurement Mode: IMPD−EXT)
HPOT/PORT1

DFT

SLOPE
COMP

OPEN CORR
SHORT CORR
LOAD CORR

PORT
EXT

LCUR/PORT2

OPEN_PEXT CORR
SHORT_PEXT CORR
LOAD PEXT CORR

Corrected
data

Figure 1-21 Error Correction Data Flow (Measurement Mode IMPD−3T or IMPD−2T)

HPOT/PORT1DFTCALIBRATIONLCUR/PORT2

WTG
FAC

Corrected
data

EQUALIZING

Figure 1-22 Error Correction Data Flow (Measurement Mode: G−PH)
・Self-calibration (CALIBRATION)
This corrects the errors that arise within this instrument itself.
・Input weighting (WaighTingG FACtor)
This corrects the attenuation of a probe or gain of a preamplifier.
・Slope compensation (SLOPE COMPensation)
This removes the effects of changes in electrical potential due to charging
and discharging of batteries, etc.
・Port extension (PORT EXTension)
This corrects the phase delay that occurs due to the propagation delay time
when a long cable is used.
・Open correction (OPEN CORRection)

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1.8 Error Correction
This corrects the error caused by stray admittance that remains whenmeasurement connectors are opened.
・Short correction (SHORT CORRection)
This corrects the error caused by residual impedance that remains whenmeasurement connectors are shorted.
・Load correction (LOAD CORRection)
This corrects the deviations from true values. It requires a standard
impedance with a known correct value.
There are two sets of corrections for open, short, and load corrections: corrections made on thefront panel of this instrument and corrections made at the port extended end. The correction
data and impedance standard values are independent for the two sets of corrections.
・Equalizing (EQUALIZING)
This corrects the frequency characteristics of an externally connected cable,probe, amplifier, etc. This correction is used in measurement mode G−PH
(gain and phase measurement).

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1.8 Error Correction

1.8.1 Self-calibration
This function can be set when the measurement mode is IMPD−EXT and G−PH.
Connect the measurement signal output of this instrument to the signal input to performself-error correction. Perform self-calibration with the CALIBRATION BOX that was included
with this instrument connected to LCUR and HCUR.
ZA57630

LCUR

HCUR

CALIBRATION BOX(accessory)
Figure 1-23 Connection for Self-calibration
Select [Calibration]－[CALIBRATION] and then tap the [EXEC] function key. A dialog box for
confirming whether to start self-calibration appears. Tap the [OK] button to start
self-calibration.

A window to indicate the progress is displayed during self-calibration. If an error is detected,
an error message is displayed and operation stops. For details on errors, refer to “3.1 Error
Messages”.

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1.8 Error Correction

Display during self-calibration

When error is detected

If an error occurred during self-calibration, this instrument may have malfunctioned. Turnthe power off and then back on, check “■ Cautions for self-calibration” below, and then performself-calibration again. If the error still occurs, contact NF Corporation or its authorized agent.
■ Cautions for self-calibration
・ When the measurement mode is set to IMPD-2T or IMPD-3T, it is initialized to the factory
calibration state.
The factors listed below cause errors related to measurement itself. If these factors affectself-calibration, they will also affect subsequent measurements (because the self-calibration
will be based on measurement results that contain errors).
・ Do not attach/remove and move the CALIBRATION BOX.
Changes in the pass characteristic may cause errors.
・ Do not bring your hands or body near the CALIBRATION BOX.
Stray capacitance, interference noise, etc. may affect self-calibration.
・ Move this instrument away from large noise sources
The results of self-calibration performed at the factory are stored in non-volatile memory andare retrieved for use when this instrument is turned on. However, we recommend performing
self-calibration at the times listed below.
・ When the ambient temperature deviates from 23±5℃.
・ Before performing important measurements

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1.8.2 Input WeightingThis function performs gain correction on the results of measurements performed with a 10:1 passive
probe for oscilloscopes, a preamplifier, etc. connected to the input connectors of this instrument (PORT1/HPOT and PORT2/LCUR) when the measurement mode is IMPD−EXT or G−PH and then displays theresults. Conversion to signal amplitudes on the probe or preamplifier input side is performed formeasurement. Configure the settings in [Range]－[WTG FAC PORT1] / [WTG FAC PORT2].

[WTG FACT PORT1] and [WTG FAC PORT2]:
Set the factors to be applied to the measurement data of PORT1 and PORT2. If a
factor of 1.0 is set, there will be no changes in the measurement data.
If the input weighting settings are set, they will have effect on the ALC operations. Thosefunctions operate with the weighting level on the probe or preamplifier input side applied.
■ Examples of setting weighting factors
Refer to the impedance measurement connection examples of “Figure 4-1” to “Figure 4-3” inInstruction Manual (Basics).
・ When using a 10:1 probe for oscilloscopes
When a probe is connected to PORT1/HPOT, set 10.0 (= 1/0.1) for [WTG FAC PORT1]. The
same applies when an attenuator is connected.
・ When using a voltage preamplifier
When a preamplifier that has a gain of 40 dB ( 100) is connected to PORT1/HPOT, set
0.01 (= 1/100) for [WTG FAC PORT1].
・ When using a current input amplifier
When using a current input amplifier for current-voltage conversion, connect it to
PORT2/LCUR. If the conversion gain is 1 GV/A (=  109), set 10−9 for [WTG FAC PORT2].
When the conversion gain is a negative value, also set a negative value for the weighting
factor. When the conversion gain is −10 GV/A, set −10−10 for [WTG FAC PORT2]. If thepolarities are not matched, the phase of the impedance measurement results will be inverted.
・ When using a shunt resistor
When performing current-voltage conversion with a current detection resistor (shunt resistor),connect the shunt resistor to PORT2/LCUR. Set the reciprocal of the shunt resistance in [WTG

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1.8 Error Correction
FAC PORT2]. For example, when using a 10 Ω shunt resistor, set 0.1 in [WTG FAC PORT2].
・ When using a current probe
Connect the current probe to PORT2/LCUR. When using a 0.1 V/A current probe, set[WTG FAC PORT2] to 10.0.
■ Input weighting function restrictions
The values that can be set for the input weighting function are limited to real numbers (notcomplex numbers) that are independent of the measurement frequency. For that reason, theamplitude, gain, and polarity of the measurement results are corrected as constant values,
but the gain and phase are not corrected according to the frequency. This is a simple
correction method for when the frequency is relatively low.
For more accurate corrections, use open correction, short correction, load correction, port
extension, and equalizing.

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1.8.3 Open Correction
1.8.4 Short Correction
The open correction function corrects the error caused by stray admittance (in themeasurement system) when measurement connectors are opened. The short correction function
corrects the error caused by residual impedance (in the measurement system) whenmeasurement connectors are shorted. The following figures show the relationship of theadmittance and impedance of the DUT (true values, denoted as Y and Z), and the admittanceand impedance measured by this instrument (denoted as Ym and Zm).
Ym
(measured admittance)

ActualrelationshipZm(measured impedance)

Actualrelationship

Ideal
relationship

Ideal
relationship
Stray admittance00

Residual impedance

0

Y(DUT admittance)(a) Open correction

Z(DUT impedance)0(b) Short correction

Figure 1-24 Description of Open Correction and Short Correction

Open correction subtracts a pre-measured stray admittance from the measured admittance.
Short correction subtracts a pre-measured residual impedance from the measured impedance.
These two types of correction can be performed independently or at the same time. They are
explained together here because they are similar operations.

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The following figure shows the connections for measuring open and short correction datawhen the measurement mode is IMPD−EXT.
ZA57630

DUT drive
amplifier

Keep the placement of the cables
the same as during DUT

OSC / HCUR(a) When measuring open
Measurement
connectors opened

PORT1 / HPOT
Voltageprobe

Keep the spacing the same as during
DUT measurement.

PORT2 / LCUR

Keep the positional relationship with the surrounding
electric conductors the same as during DUT measurement.

Current
probe

ZA57630

correction data

DUT drive
amplifier

OSC / HCUR
PORT1 / HPOT

Keep the placement of the cables
the same as during DUT
Measurement(b) When measuring short
Piece of metal
connectors
correction data
shortedVoltageprobe

PORT2 / LCUR

Keep the spacing the same as during
DUT measurement.
Keep the positional relationship with the surrounding
electric conductors the same as during DUT measurement.

Current
probe

Figure 1-25 Connections when Measuring Open and Short Correction Data (Measurement Mode: IMPD−EXT)！ CAUTION

When using a DUT drive amplifier, pay attention to overvoltage / overcurrent caused by themeasurement connectors opened / shorted. Take the following measures to prevent damage to
the DUT drive amplifier, current probe, voltage probe, etc. when measuring open / shortcorrection data.
・Reduce the measurement signal level of ZA57630 when measuring the correction data.
・Reduce the gain of the DUT drive amplifier when measuring the correction data.
・Add protection resistor. The drive capability of the DUT drive amplifier will decrease.
The following figure shows the examples of additional protection resistor.
ZA57630

DUT drive
amplifier

OSC / HCUR
PORT1 / HPOT

Protection resistor
for measurement connectors
are shorted
Protection resistor
for measurement connectors
are opened

Voltageprobe

Measurement
connectors

PORT2 / LCUR
Current
probe

Figure 1-26 Example of Protection Resistor for Measuring Open / Short Correction Data

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1.8 Error Correction
The following figure shows the connection methods for measuring open and short correction datawhen using a test fixture type that directly coupled to this instrument in the IMPD−3T
measurement mode.
ZA57630
HCUR / OSC

Test fixture
Measurement
connectors open(a) When measuring open
correction data

HPOT / PORT1
LPOTLCUR / PORT2

ZA57630
HCUR / OSC
HPOT / PORT1

Keep the positional relationship with the surrounding
conductors the same as during DUT measurement.

Test fixture(b) When measuring short
Measurement
correction data
connectors shorted
Piece of metal

LPOT
LCUR / PORT2

Keep the positional relationship with the surrounding
conductors the same as during DUT measurement.

Figure 1-27 Connections when Measuring Open and Short Correction Data (Measurement Mode: IMPD−3T (1))
The following figure shows the connections for measuring open and short correction datawhen connecting with the DUT using coaxial cables.
LCUR
HPOT
HCUR ・ Connect the outer conductor (shielding) of all three coaxial
cables together.
・ Keep the placement of the cables the same as during
DUT measurement.
Connect HCUR and HPOT.

(a) When measuring

Keep the spacing thesame as during DUT
measurement.

open correction data

Keep the positional relationship with the surrounding conductors the same as during DUT measurement.

LCUR

HPOT

Keep the spacing thesame as during DUT
measurement.

HCUR ・ Connect the outer conductor (shielding) of all three coaxial

cables together.
・ Keep the placement of the cables the same as during DUT
measurement.

Connect HCUR, HPOT,
and LCUR with a piece of
metal, etc.

(b) When measuring
short correction data

Keep the positional relationship with the surrounding conductors the same as during DUT measurement.

Figure 1-28 Connections when Measuring Open and Short Correction Data (Measurement Mode: IMPD−3T (2))

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1.8 Error Correction
The following figure shows the connections for measuring open and short correction datawhen the measurement mode is IMPD−2T.
PORT3

PORT3
Keep the placement the sameas during DUT measurement.

Piece of metal

Keep the spacing the same as
during DUT measurement.
Keep the positional relationship with thesurrounding conductors the same as
during DUT measurement.

Keep the placement the sameas during DUT measurement.

Keep the spacing the same as
during DUT measurement.
Keep the positional relationship with thesurrounding conductors the same as during
DUT measurement.

(a) When measuring open correction data (b) When measuring short correction data
Figure 1-29 Connections when Measuring Open and Short Correction Data (Measurement Mode: IMPD−2T)
No matter which connection method is used, take care that there is no change in the placement of
measurement cables and the parts connecting (measurement connectors) with the DUT between
when performing open and short correction data measurement and when performing DUT
measurement. If the placement changes, correction will not be performed sufficiently because
measurement system errors such as stray capacitance will also change.
The method to obtain open and short correction data differs depending on whether themeasurement mode is IMPD−EXT or IMPD−3T/IMPD−2T.
(When measurement mode is IMPD−EXT)
Measure the open and short correction data at the frequency for measurement with afrequency sweep. The setup and measurement procedure is described below.
1) Set the measurement conditions, including the measurement signal amplitude, DC bias,
and measurement range. Also set the frequency sweep range. Even when a frequency
sweep will not be performed, set the frequency sweep settings of the range including themeasurement frequency.
2) Set open and short corrections to OFF.
・ Set [Calibration]－[OPEN CORR] to [OFF].
・ Set [Calibration]－[SHORT CORR] to [OFF].
3) Measure the open correction data.
If open correction will not be performed, skip steps 3-1) to 3-3) and begin from step 4).
3-1) Open the measurement connectors.
3-2) Turn on measurement signal output, perform frequency sweep measurement, and wait
for the process to end.
3-3) Select [Trace]－[MEAS TRACE COPY]－[OPEN CORR MEM] and then tap the [COPY]
function key to copy the measurement data to the open correction memory.
Preparation of the data for open correction is now complete.
4) Measure the short correction data.
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1.8 Error Correction
If short correction will not be performed, skip steps 4-1) to 4-3) and begin from step 5).
4-1) Short the measurement connectors.
4-2) Turn on measurement signal output, perform frequency sweep measurement, and wait
for the process to end.
4-3) Select [Trace]－[MEAS TRACE COPY]－[SHORT CORR MEM] and then tap the [COPY]
function key to copy the measurement data to the short correction memory.
Preparation of the data for short correction is now complete.
5) Set the functions you wish to enable to ON. If both the open and short correction functions
will be used, turn both of them on.
・[Calibration]－[OPEN CORR]: Open correction

・[Calibration]－[SHORT CORR] : Short correction
Tap the [ON] function key to enable each correction.
Preparation for open and short corrections in the IMPD−EXT measurement mode is now
complete. If you connect a DUT to the measurement connectors, you will be able to obtainmeasurement data that has been corrected for the stray admittance and residual impedance
present in the measurement system.

(When measurement mode is IMPD−3T or IMPD−2T)
Measure the open and short correction data with the frequencies predetermined inside this
instrument and spot measurement frequency ([OSC]−[FREQUENCY]). The setup andmeasurement procedure is described below.
1) Set the measurement signal amplitude and spot measurement frequency. Duringcorrection data measurement, correction measurement is performed using settings
predetermined internally for the sweep frequency range, measurement time, measurement
delay time, and measurement start delay time. The measurement range is AUTO and DC
bias is turned off.
2) Measure the open correction data.
If open correction will not be performed, skip steps 2-1) to 2-2) and begin from step 3).
2-1) Open the measurement connectors or connect an open standard.
2-2) Select [Calibration]−[OPEN CORR] and then tap the [MEASURE] function key. Tap the[OK] button in the confirmation dialog. The status indication at the top of the LCD
becomes CAL and a down-sweep starts. When the status becomes IDLE, open correction
data measurement is complete. The correction data is stored in the currently set open
correction memory number.
Preparation of the data for open correction is now complete. When short correction will be
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1.8 Error Correction
performed, skip the following steps.
3) Measure the short correction data.
If short correction will not be performed, skip steps 3-1) to 3-2) and begin from step 4).
3-1) Short the measurement connectors or connect a short standard.
3-2) Select [Calibration]−[SHORT CORR] and then tap the [MEASURE] function key. The statusindication at the top of the LCD becomes CAL and a down-sweep starts. When the status
becomes IDLE, short correction data measurement is complete. The correction data isstored in the currently set short correction memory number.
4) Set the functions you wish to enable to ON. If both the open and short correction functions
will be used, turn both of them on.
・[Calibration]－[OPEN CORR]: Open correction

・[Calibration]－[SHORT CORR] : Short correction
Tap the [ON] function key to enable each correction.
Preparation for open and short corrections in the IMPD−3T or IMPD−2T measurement mode
is now complete. If you connect a DUT to the measurement connectors, you will be able toobtain measurement data that has been corrected for the stray admittance and residual
impedance present in the measurement system.
The correction data that has been copied to the open correction memory or short correction
memory is retained even if the power is turned off, so it is available for use the next time thepower is turned on. However, these functions are also executed as a part of the error
correction process of this instrument itself, so we recommend that the open/short correction
data be measured again after the internal temperature has stabilized after turning the poweron (after approximately 30 minutes) and after any change in the ambient temperature.
■ Cautions for open correction and short correction
・Even if the correction data is measured and copied to the respective correction memory, thefunctions are not executed unless they are enabled (set [Calibration]－[OPEN CORR] and[SHORT CORR] to [ON]).
・Results with the impedance/admittance values corrected are obtained for both open
correction and short correction, but please note that the relationship with the voltage
amplitude (or PORT1 amplitude) and current amplitude (or PORT2 amplitude) will nolonger hold true (corrected impedance and (voltage ÷ current) will not match).
・If the frequency of the correction data is different from the measurement frequency,
frequency interpolation is used to calculate the correction data. If the frequency sweep of
the correction data is coarse (when measurement mode is the IMPD−EXT), theinterpolation error will be large. Whenever possible, measure the correction data at thesame frequency as the measurement frequency.
・The frequencies of open and short correction data in the IMPD−3T or IMPD−2T
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1.8 Error Correction
measurement mode are fixed to the following frequencies regardless of the frequency sweep
settings.
Table 1-1 Open and Short Correction Frequencies in IMPD−3T and IMPD−2T Measurement Modes
10, 40, 400, 1 k, 1.00000001 k, 2 k, 5 k, 10 k, 12.5 k, 20 k, 27.5 k,
29.99999999 k, 30 k, 40 k, 50 k, 65 k, 75 k, 100 k, 125 k, 150 k, 175 k,
200 k, 225 k, 250 k, 275 k, 300 k, 360 k, 400 k, 450 k, 500 k, 600 k, 700 k,
800 k, 900 k, 1 M, 1.00000000001 M, 1.13 M, 1.25 M, 1.38 M, 1.5 M, 1.68 M,
1.82 M, 2 M to 9.75 M (0.25 M step), 10.1 M, 10.5 M to 16 M(0.5 M step),
17 M to 36 M(1 M step) [Hz],f

The f in the above table is the frequency when spot measurement is performed using the[OSC]−[FREQUENCY] setting value.
・ If you tap the [COPY TO REF8] function key displayed when [Calibration]－[OPEN CORR]
or [SHORT CORR] is open, the corresponding correction data stored in the current
correction data number is copied to REF8. It can be used to, for example, check thecorrection data.
・ If measurement is performed outside of the measured sweep frequency range with which
the correction data was measured, the correction data for the nearest frequency (sweep
upper or lower limit frequency) is used for the correction calculation.
・ If you set a function to ON without saving correction data, the −3074 error message (whenthere is no open correction data) or −3075 error message (when there is no short correctiondata) is displayed (refer to “Table 3-2 Panel Operation Errors”). When measurement isperformed in this state, the measurement data is the same as when correction function
setting off.
・ You can save 32 sets (memory numbers 1 to 32) of correction data independently for each ofopen correction and short correction. Please note that correction will not be performed if
the memory number to which the data was saved and the memory number to be used do
not match.
Set the save destination memory numbers and the memory numbers to use in thefollowing.
[Calibration]－[OPEN CORR][Calibration]－[SHORT CORR]
Usually, there is no need to change these settings (memory numbers). Use the initial valueof 1.
・ When you will switch between multiple measurement paths, such as test fixtures andmeasurement cables, to perform measurement, measure the open and short correction
data with each connection and save each correction data to a different number. This willallow you to switch the correction data for measurement by simply changing the correction
data number to use when changing the measurement paths. When you recall settings withthe handler interface (refer to “1.16 Handler Interface”) or when you recall setting
information in sequence measurement (refer to “1.9 Sequence Measurement”), you can also
switch the correction data together with the various measurement conditions.
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1.8 Error Correction

1.8.5 Load Correction
The open and short correction functions can correct (subtract) the stray admittance and residual
impedance contained in the measurement results. Those functions can remove the residual andstray components according to the measurement frequency, but they cannot correct errors caused
by gain errors. For example, the conversion error of a current-voltage converter (error in theresistance value of a shunt resistor), gain error of a voltage detector, etc. cannot be improved byopen correction and short correction. As illustrated in the followin figure, it is necessary to
perform load correction to correct errors caused by a gradient.
Zm(measured impedance)

Ideal relationship
Gradient correction
Actual relationship
Zero-point correction
0

Z(DUT impedance)0

Figure 1-30 Load Correction Operation
Load correction uses a standard impedance that has a known value as a reference to correct
measurement errors that are due to the circuit network that connects the measurement
connectors of this instrument to the DUT. For accurate correction, an impedance standard
with an impedance as close as possible to the impedance of the DUT should be used.
Load correction is always performed together with open correction and short correction.
Assuming a linear two-terminal pair network, it is possible to eliminate errors due to theconnection network by performing open, short, and load corrections. Load correction also has
the effect of reducing small errors in frequency, signal amplitude, measurement range, etc.
that occur under certain conditions. However, if the assumed model differs from the actualmode, errors may actually be increased rather than decreased.
The method to obtain load correction data differs depending on whether the measurementmode is IMPD−EXT or IMPD−3T/IMPD−2T.
(When measurement mode is IMPD−EXT)
Measure the load correction data at the frequency for measurement with a frequency sweep.
The setup and measurement procedure is described below.
1) Set the measurement conditions, including the measurement signal amplitude, DC bias,
and measurement range. Also set the frequency sweep range. Even when a frequency
sweep will not be performed, set the frequency sweep settings of the range including themeasurement frequency.

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1.8 Error Correction
2) Set the correction function to OFF.
・ Set [Calibration]－[OPEN CORR] to [OFF].
・ Set [Calibration]－[SHORT CORR] to [OFF].
・ Set [Calibration]－[LOAD CORR] to [OFF].
3) Measure the open correction data. Also refer to “1.8.3 Open Correction”.
3-1) Open the measurement connectors.
3-2) Turn on measurement signal output, perform frequency sweep measurement, and wait
for the process to end.
3-3) Select [Trace]－[MEAS TRACE COPY]－[OPEN CORR MEM] and then tap the [COPY]
function key to copy the measurement data to the open correction memory.
4) Measure the short correction data. Also refer to “1.8.4 Short Correction”.
4-1) Short the measurement connectors.
4-2) Perform frequency sweep measurement and wait for the process to end.
4-3) Select [Trace]－[MEAS TRACE COPY]－[SHORT CORR MEM] and then tap the [COPY]
function key to copy the measurement data to the short correction memory.
5) Measure the load correction data and enter the load standard values.
5-1) Connect an impedance standard to the measurement connectors.
5-2) Perform frequency sweep measurement and wait for the process to end.
5-3) Select [Trace]－[MEAS TRACE COPY]－[LOAD CORR MEM] and then tap the [COPY]
function key to copy the measurement data to the load correction memory.
6) Set the load standard value format. Tap [Calibration]－[LOAD CORR]－[LOAD STD
FORMAT] and select the load standard value format.
7) Enter the load standard values. Tap [Calibration]－[LOAD STD VALUE] and enter the load
standard values in the displayed table. The load standard values for at least threefrequencies included in the frequency range to be measured need to be entered. You canenter values for up to 30 frequencies.

After entering all the load standard values, tap the [] button to close the load standard value input table.
8) Set [Calibration]－[LOAD CORR]－[FUNCTION] to [ON]. Load correction can also be
performed normally with [OPEN CORR] and [SHORT CORR] left set to [OFF].
Preparation for load correction in the IMPD−EXT measurement mode is now complete. If you
disconnect the impedance standard and perform measurement with a DUT connected to themeasurement connectors, load-corrected measurement data can be obtained.

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1.8 Error Correction(When measurement mode is IMPD−3T or IMPD−2T)
Measure the open, short, and load correction data with the frequencies predetermined inside
this instrument and spot measurement frequency ([OSC]−[FREQUENCY]). The setup andmeasurement procedure is described below.
1) Set the measurement signal amplitude and spot measurement frequency. Duringcorrection data measurement, correction measurement is performed using settings
predetermined internally for the sweep frequency range, measurement time, measurement
delay time, and measurement start delay time. The measurement range is AUTO and DC
bias is turned off.
2) Measure the open correction data.
2-1) Open the measurement connectors or connect an open standard.
2-2) Select [Calibration]－[OPEN CORR] and then tap the [MEASURE] function key. The statusindication at the top of the LCD becomes CAL and a down-sweep starts. When the status
becomes IDLE, open correction data measurement is complete. The correction data isstored in the currently set open correction memory number.
3) Measure the short correction data.
3-1) Short the measurement connectors or connect a short standard.
3-2) Select [Calibration]－[SHORT CORR] and then tap the [MEASURE] function key. The
status indication at the top of the LCD becomes CAL and a down-sweep starts. When thestatus becomes IDLE, short correction data measurement is complete. The correction datais stored in the currently set short correction memory number.
4) Measure the load correction data.
4-1) Connect an impedance standard to the measurement connectors.
4-2) Select [Calibration]−[LOAD CORR] and then tap the [MEASURE] function key. The statusindication at the top of the LCD becomes CAL and a down-sweep starts. When the status
becomes IDLE, load correction data measurement is complete. The correction data isstored in the currently set load correction memory number.
5) Set the load standard value format. Tap [Calibration]－[LOAD CORR]－[LOAD STD
FORMAT] and select the load standard value format.
6) Enter the load standard value. Tap [Calibration]－[LOAD STD VALUE] and enter the load
standard values in the displayed table. The load standard values of a least threefrequencies included in the frequency range to be measured need to be entered. You canenter values for up to 30 frequencies.
After entering all the load standard values, tap the [] button to close the load standard
value input table.
7) Set [Calibration]－[LOAD CORR]－[FUNCTION] to [ON]. Load correction can also be
performed normally with [OPEN CORR] and [SHORT CORR] left set to [OFF].
Preparation for load correction in the IMPD−3T / IMPD−2T measurement mode is now
complete. If you disconnect the impedance standard and perform measurement with a DUT
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1.8 Error Correction
connected to the measurement connectors, load-corrected measurement data can be obtained.
The data that has been copied to the open, short, or load correction memory is retained even if
the power is turned off, so it is available for use the next time the power is turned on. However,these functions are also executed as a part of the error correction process of this instrument
itself, so we recommend that the open/short/load correction data be measured again after theinternal temperature has stabilized after turning the power on (after approximately 30
minutes) and after any change in the ambient temperature.
■ Cautions for load correction
・ Even if the correction data is measured and copied to the respective correction memory,the correction function is not executed unless it is enabled (set [Calibration]－[LOAD
CORR] to [ON] and display the correction memory number).
・ Use an impedance standard with an impedance as close as possible to the impedance of
the DUT. A large difference between the two may produce a large error in themeasurement of the load correction data or a large error in internal calculations, resulting
in insufficient correction. Use an impedance standard that differs in impedance from the
DUT by no more than about a factor of 10 (or a factor of 0.1).
・ For the load standard values, you can use either the calibration values of the impedance
standard or actual measured values obtained with an impedance measuring instrument(LCR meter, etc.).
・ Load correction uses the load standard values as the reference, so the accuracy of theload-corrected measurement data is limited to the accuracy of the load standard values(measurement accuracy cannot exceed the accuracy of the load standard values).
・ The load standard values are saved internally in the format of “frequency－Z－θ”,
regardless of the load standard value format setting. When a load standard value isentered and displayed, it is converted according to the load standard value format. For
that reason, a value different from the entered value may be displayed if the load
standard value format is changed after the load standard value is input. Nevertheless,there is no difference in the operation of the load correction function.
・ The load standard values for at least three frequencies need to be entered. Furthermore,correction will not be performed correctly with any frequency outside the frequency rangeof the entered load standard values.
If measurement is performed outside of the measured sweep frequency range with which
the correction data was measured, the correction data for the nearest frequency (sweep
upper or lower limit frequency) is used for the correction calculation.
・ The values should be entered so that the frequencies of the load standard values are as
close to equal intervals on the logarithmic axis as possible. Frequency interpolation is
performed internally, so if load standard values are entered for frequencies that are
extremely close or extremely far apart (on the logarithmic axis), interpolation errors will
increase.
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1.8 Error Correction
When the measurement mode is IMPD−3T or IMPD−2T, enter load standard values forthe frequencies to be actually measured among the frequencies listed in “Table 1-1 Openand Short Correction Frequencies in IMPD−3T and IMPD−2T Measurement Modes”.
・ When load correction is performed, the results with the impedance and admittance values
corrected are obtained, but please note that the relationship with the voltage amplitude(or PORT1 amplitude) and current amplitude (or PORT2 amplitude) will no longer holdtrue (corrected impedance and (voltage ÷ current) will not match).
・ The frequencies of load correction data in the IMPD−3T or IMPD−2T measurement mode
are fixed internally regardless of the frequency sweep settings just like with the open andshort correction data. Refer to “Table 1-1 Open and Short Correction Frequencies in
IMPD−3T and IMPD−2T Measurement Modes”.
・ If you tap the [COPY TO REF8] function key displayed when [Calibration]－[LOAD CORR]
is open, the load correction data stored in the current correction data number is copied to
REF8. It can be used to, for example, check the correction data.
・ If the frequency of the correction data is different from the measurement frequency,
frequency interpolation is used to calculate the correction data. If the sweep of thecorrection data is coarse, the interpolation error will be large. Whenever possible,
measure the correction data at the same frequency as the measurement frequency.
・ If you set the function to ON without saving correction data, the −3076 error message(refer to “Table 3-2 Panel Operation Errors”) is displayed. When measurement is performedin this state, the measurement data is the same as when correction function setting off.
・ The load standard values and the open, short, and load correction data are stored inseparate memory. The load standard values are stored in the measurement condition
memory and the open, short, and load correction data is each stored in its own dedicatedmemory. There are 32 sets for each correction data, and which number (1 to 32) ofcorrection data should be used is stored in the measurement condition memory. For thatreason, be careful with regard to the correspondence between the open, short, and loadcorrection data numbers and the load standard values when the measurement conditions
are restored (by panel operation, remote setting, or handler interface). If the loadcorrection data does not correspond to the load standard values, the load correction
results will be inaccurate.
・ Set the save destination memory numbers of the correction data and the memory numbers
to use in the following.
[Calibration]－[OPEN CORR][Calibration]－[SHORT CORR][Calibration]－[LOAD CORR]
Usually, there is no need to change these settings (memory numbers). Use the initial valueof 1.
・ When you will switch between multiple measurement paths, such as test fixtures andmeasurement cables, to perform measurement, measure the open, short, and loadcorrection data with each connection and save each correction data to a different number.
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1.8 Error Correction
This will allow you to switch the correction data for measurement by simply changing thecorrection data number to use when changing the measurement paths. When you recall
settings with the handler interface (refer to “1.16 Handler Interface”) or when you recall
setting information in sequence measurement (refer to “1.9 Sequence Measurement”), you
can also switch the correction data together with the various measurement conditions.

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1.8 Error Correction

1.8.6 Port Extension
This correction function is for when the measurement mode is IMPD−2T and the cable is long.
It corrects the phase delay that occurs due to the propagation delay in a cable.
ZA57630 Coaxial-port
PORT3

Characteristic impedance = Z0
Electrical length = L

Extension cable

DUT
Zx

Z'

Figure 1-31 Example of Port Extension in IMPD−2T Measurement Mode
Configure the settings in [Calibration]－[PORT EXTENSION].
Open, short, and load corrections are possible at the port extended end (DUT connection location).
These corrections at the port extended end are independent from the corrections made using thefront panel of this instrument ([Calibration]－[OPEN]/[SHORT]/[LOAD]), and you can store andset correction data, load standard value settings, and other separate values for them.
The setup and measurement procedure is described below.
1) Set the measurement signal amplitude and spot measurement frequency. Duringcorrection data measurement, correction measurement is performed using settings
predetermined internally for the sweep frequency range, measurement time, measurement
delay time, and measurement start delay time. The measurement range is AUTO and DC
bias is turned off.
Do not connect the extension cable to this instrument yet.
2) Measure the open correction data using the front panel of this instrument. Refer to “(Whenmeasurement mode is IMPD−3T or IMPD−2T)” in “1.8.3 Open Correction”.
If open correction will not be performed, begin from step 3). Please note that open
correction data measurement is required if load correction will be performed.
3) Measure the short correction data using the front panel of this instrument. Refer to “(Whenmeasurement mode is IMPD−3T or IMPD−2T)” in “1.8.4 Short Correction”.
If short correction will not be performed, begin from step 3). Please note that shortcorrection data measurement is required if load correction will be performed.
4) Measure the load correction data using the front panel of this instrument, set the load
standard value format, and set the load standard values. Refer to “(When measurementmode is IMPD−3T or IMPD−2T), from step 4)” in “1.8.5 Load Correction”.
If load correction will not be performed, begin from step 5).
Preparation for corrections using the front panel of this instrument is now complete. Next,

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1.8 Error Correction
carry out the preparation work for the extension cable and corrections at the cable end.
5) Enable (set to ON) the correction functions to be used with the front panel of this instrument.
・ Set [Calibration]－[OPEN CORR] to [ON].
・ Set [Calibration]－[SHORT CORR] to [ON].
・ Set [Calibration]－[LOAD CORR] to [ON].
When load correction is set to ON, this instrument will operate with open correction and shortcorrection both regarded as automatically set to ON internally even if those functions remain
set to OFF.
6) Set the parameters of port extension.
・ [Calibration]－[PORT EXTENSION]－[Z0]Set the characteristic impedance of the extension cable in ohms.
・ [Calibration]－[PORT EXTENSION]－[ELEC LENGTH]
Set the electrical length of extension cable in meters. Set not the physical length
but the electrical length taking into account the velocity factor. When using a
coaxial cable with a velocity factor of approximately 67% (RG-58A/U, etc.), theelectrical length is 1.49 m for a physical length of 1 m.
・ Set [Calibration]－[FUNCTION] to [ON].
7) Measure the open correction data at the port extended end.
If open correction will not be performed, begin from step 8). Please note that open
correction data measurement is required if load correction will be performed.
Select [Calibration]－[PORT EXTENSION]－[OPEN_PEXT CORR] and then tap the [MEASURE]
function key to measure the port extended end open correction data.
Also refer to “(When measurement mode is IMPD−3T or IMPD−2T)” in “1.8.3 Open Correction”.
8) Measure the short correction data at the port extended end.
If short correction will not be performed, begin from step 9). Please note that short correction
data measurement is required if load correction will be performed.
Select [Calibration]－[PORT EXTENSION]－[SHORT_PEXT CORR] and then tap the[MEASURE] function key to measure the port extended end short correction data.
Also refer to “(When measurement mode is IMPD−3T or IMPD−2T)” in “1.8.4 Short Correction”.
9) Measure the load correction data at the port extended end, set the load standard value
format, and set the load standard values.
If load correction will not be performed, begin from step 10).
Select [Calibration]－[PORT EXTENSION]－[LOAD_PEXT CORR] and then tap the [MEASURE]
function key to measure the port extended end load correction data.
Also refer to “(When measurement mode is IMPD−3T or IMPD−2T), from step 4)” in “1.8.5 Load
Correction”.
10) Enable each correction function.
・ Set [Calibration]－[PORT EXTENSION]－[OPEN_PEXT] to [ON].
・ Set [Calibration]－[PORT EXTENSION]－[SHORT_PEXT] to [ON].
・ Set [Calibration]－[PORT EXTENSION]－[LOAD_PEXT] to [ON].
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1.8 Error Correction
Preparation for port extension corrections is now complete. If you disconnect the impedance standard
and perform measurement with a DUT connected, corrected measurement data can be obtained.
The data that has been copied to the correction memory is retained even if the power is turnedoff, so it is available for use the next time the power is turned on. However, these functions
are also executed as a part of the error correction process of this instrument itself, so werecommend that the correction data be measured again after the internal temperature hasstabilized after turning the power on (after approximately 30 minutes) and after any change
in the ambient temperature.
■ About the port extension function
・ This function is effective when the distance to the DUT in terms of the wavelength of themeasurement frequency is long (a few percent or more of wavelength).
・ This correction applies to an IMPD−2T connection. Enabling this correction in othermeasurement modes will increase the error rather than reduce it.
・ Set not the physical length of the cable but the electrical length (physical length ÷ velocity
factor) for the electrical length setting for an extension cable ([ELEC LENGTH]). The
velocity factor of an ordinary coaxial cable (RG−58A/U) is approximately 67%, so theelectrical length = physical length ÷ 0.67, but you should check the specifications of thecable that you are using for more information.
・ Setting an accurate value for the electrical length setting will not necessarily always leadto good results due to factors such as variations in cable characteristics. We recommendthat you try taking actual measurements and adjusting the setting value accordingly. Thisis also a realistic setting method for setting an electrical length with which remarkable
resonance characteristics are not noticeable when measurement is performed with thecable end in the open or shorted state.
・ If you use a cable with a problem, such as a damaged or deteriorated cable, correction will
be insufficient because the characteristic impedance of the cable will not be constant.
・ When port extension is performed, the results with the impedance and admittance values
corrected are obtained, but please note that the relationship with the voltage amplitude(or PORT1 amplitude) and current amplitude (or PORT2 amplitude) will no longer holdtrue (corrected impedance and (voltage ÷ current) will not match).
・ You can save 32 sets (memory numbers 1 to 32) of correction data independently for eachof open correction, short correction, and load correction for each of this instrument front
panel and the extension port end respectively. Please note that correction will not be
performed if the memory number to which the data was saved and the memory number tobe used do not match.
Set the save destination memory numbers and the memory numbers to use in the following.
[Calibration]－[OPEN CORR][Calibration]－[SHORT CORR][Calibration]－[LOAD CORR]
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1.8 Error Correction[Calibration]－[PORT EXT]－[OPEN_PEXT CORR][Calibration]－[PORT EXT]－[SHORT_PEXT CORR][Calibration]－[PORT EXT]－[LOAD_PEXT CORR]
Usually, there is no need to change these settings (memory numbers). Use the initial valueof 1.
・ When you will switch between multiple measurement paths, such as test fixtures andmeasurement cables, to perform measurement, measure the open and short correction
data with each connection and save each correction data to a different number. This willallow you to switch the correction data for measurement by simply changing thecorrection data number to use when changing the measurement paths. When you recall
settings with the handler interface (refer to “1.16 Handler Interface”) or when you recall
setting information in sequence measurement (refer to “1.9 Sequence Measurement”), you
can also switch the correction data together with the various measurement conditions.

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1.8 Error Correction

1.8.7 Slope Compensation
When the impedance of a DUT such as a battery or high-capacity capacitor is measured, theDC voltage of the DUT will change over time together with the charging/discharging state of
the DUT. Since a signal with a ramp-like waveform superimposed will be analyzed, inprinciple, this will result in errors with ordinary discrete Fourier transform (DFT) processing.
The slope compensation function is an analysis method to detect the magnitude and phase ofeach of a sinusoidal wave and ramp wave individually, assuming that the measurement signal
is composed of a sinusoidal wave and ramp wave (potential fluctuation waveform). Only the
amplitude and phase of the sinusoidal wave component are used as the measurement results,
and the results of measuring the amplitude of the ramp wave component are discarded.
Sinusoidal wave (amplitude and phase)
Only the sinusoidal wave
component is analyzed.

Ramp wave(amplitude)VtFigure 1-32 Operation of Slope Compensation Function
When the slope compensation function is off, in most cases the errors listed below (theoreticalworst-case values) are likely to occur due to potential fluctuation that occurs over one cycle ofthe sinusoidal wave component.
Table 1-2 Errors due to Potential Slope (Theoretical Values)
Potential
fluctuation in Amplitude
one cycle
error
Phase error
0%
0%
0°
1%
±1%
± 0.5°
10 %
±7%
± 4°
100 %
± 70 %± 40°
When the slope compensation function is on, the above errors theoretically go to zero. Actually,
however, errors due to noise, deviation from the ramp wave (nonlinear potential fluctuations),
and other such effects remain. Nevertheless, the effects of potential fluctuation are greatly
reduced compared to when the function is turned off. Depending on the conditions, there may
even be a several tenfold reduction in errors.
The slope compensation function can be set when the measurement mode is IMPD−EXT. Set
the function in [Calibration]－[SLOPE COMP]. The setting applies to all ports.

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1.8 Error Correction■ Cautions for the slope compensation function
・ Usually, this function should be turned off when using this instrument.
This function is for analyzing signals that contain potential fluctuation. Turn this function
off for normal measurement. The measurement accuracy specifications for this
instrument are defined for operation with the slope compensation function turned off.
・ Frequency range restrictions
This function is intended for low-frequency measurements such as electrochemicalmeasurements. It is generally effective at frequencies of approximately 1 kHz or less(period of 1 ms or more).
・ Potential fluctuation waveform restrictions
For potential fluctuation, a waveform that changes linearly over time is assumed.
Fluctuation waveforms that involve exponential change functions or waveforms for which
there is a switching between charging and discharging during the analysis (triangularpotential fluctuation waveforms) cannot be eliminated normally. This function is also noteffective for waveforms for which there are sudden potential changes.

Non-linear fluctuation

Sudden changes inpotential slope part way

Sudden changes inpotential

Figure 1-33 Examples of Potential Fluctuation Waveforms That Cannot Be Eliminated

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1.8 Error Correction

1.8.8 Equalizing
This function is used in the G−PH measurement mode. It corrects the errors of cables, probes
etc. connected to this instrument.
The connection example in the following figure illustrates the method to correct measurement
system errors by equalizing.
ZA57630

PORT2
LCUR

PORT1
HPOT

PROBE2

PROBE1

OSC
HCUR

EUT
BNC
Tee adapter

Figure 1-34 Gain and Phase Measurement Connection Example
The setup and measurement procedure is described below.
1) Set the measurement conditions, including the measurement signal amplitude, DC bias,
and measurement range. Also set the frequency sweep range. Even when a frequency
sweep will not be performed, set the frequency sweep settings of the range including themeasurement frequency.
2) Set [Calibration]－[EQUALIZING] to [OFF].
3) Disconnect the equipment under test (EUT) and directly connect (short) the input and output.
ZA57630

PORT2
LCUR

PORT1
HPOT

PROBE2

PROBE1OSC
HCUR

Disconnect the EUT andconnect directly.

Figure 1-35 Connections to Measure the Measurement System Errors4) Turn on measurement signal output and then perform frequency sweep measurement.
5) When sweep measurement ends, select [Trace]－[MEAS TRACE COPY]－[EQU CORR MEM] andthen tap the [COPY] function key to copy the measurement data to the equalizing memory.
6) Set [Calibration]－[EQUALIZING] to [ON].
7) Restore the original connections of the EUT disconnected in step 3) (refer to “Figure 1-34
Gain and Phase Measurement Connection Example”).

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1.8 Error Correction
Preparation for equalizing is now complete. If you perform measurement, you will be able toobtain measurement data that has been corrected for the errors present in the probes, cables,
and other parts of the measurement system.
The correction data that has been copied to the equalizing memory is retained even if thepower is turned off, so it is available for use the next time the power is turned on. However,this function is also executed as a part of the error correction process of this instrument itself,
so we recommend that the equalizing correction data be measured again after the internal
temperature has stabilized after turning the power on (after approximately 30 minutes) andafter any change in the ambient temperature.
■ Cautions for equalizing
・ Even if the correction data is measured and copied to the equalizing memory, the function
is not executed unless it is enabled (set [Calibration]－[EQUALIZING] to [ON]).
・ When equalizing is performed, the results with the gain corrected are obtained, but please
note that the relationship with the PORT1 amplitude and PORT2 amplitude will no longer
hold true (corrected gain and (PORT1 amplitude ÷ PORT2 amplitude) will not match).
・ If the frequency of the correction data is different from the measurement frequency, frequency
interpolation is used to calculate the correction data. If the sweep of the correction data iscoarse, the interpolation error will be large. Whenever possible, measure the correction dataat the same frequency (range and density) as the measurement frequency.
・ If the correction data is measured outside the range specified by the upper and lower limit
frequencies, the correction data for the nearest frequency (upper or lower limit frequency)
is used for the equalizing calculation.
・ If you set the function to ON without saving correction data, the −3073 error message(refer to “Table 3-2 Panel Operation Errors”) is displayed. When measurement is performedin this state, the measurement data is the same as when correction function setting off.
・ You can save 32 sets (memory numbers 1 to 32) of correction data. Please note that
correction will not be performed if the memory number to which the data was saved andthe memory number to be used do not match.
Set the save destination memory number and the memory number to use in the following.
[Calibration]－[EQUALIZING]:
Usually, there is no need to change these settings (memory numbers). Use the initial valueof 1.
・ When you will switch between multiple measurement paths, such as probes andmeasurement cables, to perform measurement, measure the equalizing data with eachconnection and save each correction data to a different number. This will allow you toswitch the correction data for measurement by simply changing the correction data
number to use when changing the measurement paths. When you recall setting
information in sequence measurement (refer to “1.9 Sequence Measurement”), you canalso switch the correction data together with the various measurement conditions.
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1.8 Error Correction
・ If you tap the [COPY TO REF8] function key displayed when [Calibration]－[EQUALIZING]
is open, the load correction data stored in the current correction data number is copied to
REF8. It can be used to, for example, check the correction data.

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1.9 Sequence Measurement

1.9 Sequence Measurement
Sequence measurement is a function to perform sweep measurement by reading the settings
in the setting memory in numerical order. For one sweep, the sweep range can be divided into
up to 32 sweep ranges to enable measurement to be performed with different measurement
conditions (frequency, AC amplitude, DC bias, measurement time, etc.) for each sweep range.
The item (frequency, AC amplitude, or DC bias) for which sweeping is performed in sequence
measurement is in accordance with not the sweep item setting saved to the setting memory
but the sweep item setting of this instrument at that current point in time. When the sweep
item is set to a time sweep, sequence measurement will not be performed.
If the sweep lower limit ([Sweep]－[SWEEP LOWER]) is set to SWPLm, and the sweep upper
limit ([Sweep]－[SWEEP UPPER]) is set to SWPUm in setting memory number m, sweep
measurement for one up-sweep is performed in the following order.
(SWPL1 → SWPU1), (SWPL2 → SWPU2), ..., (SWPL(N-1) → SWPU(N-1)), (SWPLN → SWPUN)
For a down-sweep, sweep measurement is performed in the following order.
(SWPUN → SWPLN), (SWPU(N-1) → SWPL(N-1)), ...,(SWPU2 → SWPL2), (SWPU1 → SWPL1)
N is the highest setting memory number for which sequence measurement is performed, andis set in [Sweep]－[SEQ NUMBER]. If [OFF] is set, sequence measurement will not be
performed.
Within each sweep range, the important parameters such as the frequency, AC amplitude, DC
bias, and measurement time settings are read from the setting memory and set together withthe sweep range. However, there are also parameters such as graph settings that are not readfrom the setting memory and for which the current settings are retained. In “Table 3-4 Initial
Settings” in Instruction Manual (Basics), parameters for which the sequence target is indicatedas “Y” are read from the memory during a sequence, and parameters for which it is indicatedas “N” remain unchanged from the current settings.
The data obtained by sequence measurement is handled in the same way as normal sweep
measurement results (obtained with sequence measurement set to OFF).
・ Graph display: All sweep data is displayed.
・ Marker operations: Handled as continuous sweep data.
・ Saving or loading to/from data memory: Handled as a single data file.
■ About the trigger for sequence measurement[Sweep]－[SEQ TRIGGER] sets the progress method of sequence measurement.
[AUTO] :Measurement is performed for the entire sequence with one press of the
UP or DOWN key.

[STEP] :This instrument enters the standby state when each sweep ends, and starts
the next sweep when the sweep key (UP or DOWN key) is pressed again.

Usually, AUTO should be used. Use STEP when you wish to change the external device
connection and settings for each sweep in the sequence.
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1.9 Sequence Measurement■ Cautions for sequence measurement
・ A validity check is not made for the sweep range of each setting memory number.
Depending on the settings in the setting memory, the sweep ranges may be greatly
separated, overlapped, or reversed when the setting memory number is changed, but
measurement is performed in accordance with the settings in the setting memory.
・ For marker operations on the sequence measurement data, the markers are moved in theorder in which the sequence measurements were performed. If the high and low values ofthe sweep range are reversed between setting memories, turning the control knob to theright (clockwise) may move the marker in the direction of lower sweep parameters.
・ A marker search is not performed across setting memory number is exceeded. A search is
performed within the sweep data of the setting memory number on which the searchtarget marker is placed.
・ The total number of sweep points in a single sequence measurement is the sum of thenumber for memory 1 through to the maximum memory number, and the maximum total
is 2,001 points. If the maximum number of points is reached while sequence measurement
is still in progress, the measurement is stopped at that time. The total number of sweep
points is not checked when measurement begins.
・ The automatic high density sweep setting is disabled. Normal sweep measurement isperformed.
・ Sequence measurement cannot be performed from the handler interface or a remoteinterface. Sequence measurement is performed only when the SWEEP UP / DOWN key on
the front panel is pressed.

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1.10 Resonant Frequency Tracking Measurement

1.10 Resonant Frequency Tracking Measurement
This function automatically keeps the measurement frequency tracked to the resonant
frequency of the DUT in the impedance measurement of ceramic, crystal, and otherpiezoelectric vibrators. The measurement frequency is tracked automatically so that the DUT
can always be measured with the resonant frequency even if the resonant frequency shifts
due to changes in factors such as the ambient temperature and load.
The frequency for which the reactance component of the DUT becomes zero (phase is 0°) is theresonant frequency. The function to track the frequency that becomes the 0° phase is the resonant
frequency tracking function, but this instrument allows you to set any phase as the tracking
target phase to remove the effects of probes and other parts of the measurement system.
The fluctuation over time of the resonant frequency can also be observed by performing time
sweep (zero-span sweep) measurement in addition to spot measurement.
ZA57630

DUT drive amplifier

OSC / HCURi
PORT1 / HPOT

Current probev
Voltage probe

PORT2 / LCUR

DUT

Figure 1-36 Piezoelectric Vibrator Measurement Connection Example
The figure above shows a connection example in the IMPD−EXT measurement mode, but
resonant frequency tracking measurement is also possible in the IMPD−3T, IMPD−2T, andG−PH measurement modes.
The setup and measurement procedure is described below.
1) Set the measurement signal source (amplitude, DC bias, or frequency), measurement
range, and other measurement conditions. For the frequency setting, set a frequency thatis near the DUT resonant frequency.
2) Configure the following settings in [Sweep]－[RESONANT TRACK].
・[FUNCTION]: Set this to ON.

・[UPPER FREQUENCY] : Set the tracking frequency upper limit.
・[LOWER FREQUENCY] : Set the tracking frequency lower limit.
These are different from the settings for frequency sweep measurement.
・[TARGET PHASE]: Set the tracking target phase. Normally, set this to 0°.

・[TOLERANCE]: Set the permissible error.

A smaller value will improve the resonant frequency accuracy, but the
tracking response will become slower.
Try performing measurement with this set to approximately 5° and then

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1.10 Resonant Frequency Tracking Measurement
adjust it as necessary.
: Tracking polarity. For normal resonant tracking (series

・[POLARITY]

resonance), set this to POSITIVE.
If you set NEGATIVE, the operation to track the antiresonant frequency(parallel resonance) will be performed.
・[CORR FACTOR]: Frequency correction factor. Normally, set this to 100%.

The setup is now complete. When spot measurement is performed, the measurement signal
frequency moves to the resonant frequency. In the repeat measurement state, themeasurement will be repeated. Also if a time sweep is performed, data with a measurement
frequency that matches the resonant frequency (target phase) will be obtained. With a time
sweep, the fluctuation over time of the resonant frequency can be measured if you set the
Y-axis to FREQUENCY (tracking frequency).
When the measurement mode is G−PH, the resonant frequency tracking function performs
the operation to track the measurement frequency so that the phase of the transfer
characteristics becomes the set phase. The phase shifts (the order)  45° at the cutoff
frequency of a lowpass/highpass filter, so you can use this function to automatically search forthe cutoff frequency by setting the target value to that phase.
■ Cautions for resonant frequency tracking measurement
・ If the setting for the permissible error of the phase ([TOLERANCE]) is decreased too much,a long time will be required for the tracking response. Use an appropriate setting for thepermissible error.
・ Set the frequency range to track ([UPPER FREQUENCY] and [LOWER FREQUENCY]) to arange for which the polarity of the phase change in respect to the frequency change will
not change.
|Z|

Resonant frequency
θFrequency

θ=0°

Appropriate tracking
frequency range
Inappropriate tracking
frequency range

Figure 1-37 Search Frequency Range Setting ([POLARITY] = POSITIVE)
If a range for which the slope of the phase will become positive (⊿θ / ⊿frequency > 0) is not set
as the search frequency range as shown in the figure above, a correct search will not be possible.
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1.10 Resonant Frequency Tracking Measurement
・ Change the following settings when measurement frequency continues to fluctuate
between a frequency before and after the resonant frequency and does not become stable.
・ Increase [TOLERANCE].
・ Decrease [CORR FACTOR].
・ Increase the measurement delay time setting ([Measure]－[MEASURE DELAY]).
For a DUT with an extremely high Q, such as a crystal oscillator, tracking measurement
may not be able to be performed normally unless a sufficiently large measurement delay
is set. Also refer to “1.2 Delay Settings”.

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1.11 Equivalent Circuit Estimation

1.11 Equivalent Circuit Estimation
This function calculates the values of each LCR element (inductance value, capacitance value,
and resistance value) by fitting the impedance characteristic obtained by frequency sweep
measurement to the selected equivalent circuit. The following six types of equivalent circuit
are provided. This function can be used when the measurement mode is IMPD−EXT,IMPD−3T, or IMPD−2T.
Circuit name andequivalent circuit
CKT1
R

Table 1-3 Equivalent Circuit Types
Correspondent DUTs and typical impedance
characteristic
・ Inductor with large core loss
|Z|

C
L
freq
・ Inductor with large ESR
・ Low resistor with ESL
|Z|

CKT2
C
L

R

CKT3
C

L

R

CKT4
R

C

L

C0
C1

L

CKT6
R0

freq
・ General capacitor with ESR and ESL
|Z|

freq
・ Piezoelectric vibrator, crystal oscillator, etc.
|Z|

CKT5

R

freq
・ Capacitor with large leakage resistance・ High resistor with capacitance between
terminals
|Z|

R1

freq
・ Electrochemical impedance such as batteries−Imag(Z)C

Real(Z)

Perform equivalent circuit estimation with the following procedure.
1) Perform a frequency sweep to measure the impedance characteristic of the DUT.
2) Display MARKER7 and MARKER8, and place MARKER7 on the lower limit frequency and
MARKER8 on the upper limit frequency to perform equivalent circuit estimation. If
MARKER7 or MARKER8 are not displayed, equivalent circuit estimation is performed

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1.11 Equivalent Circuit Estimation
within the range that frequency sweep measurement was performed.
3) Select the equivalent circuit in [Calculate]－[EQUV CKT FTG]－[CKT TYPE]. Please note that
estimation cannot be performed correctly if an inappropriate equivalent circuit is selected.
4) Tap [EQUV CKT FTG]－[FIT] and then tap the [FIT] function key to perform equivalentcircuit estimation. The measured data (MEAS TRACE) and estimated impedance
characteristic are displayed. The estimated characteristic is stored in REF1 TRACE.
5) [EQUV CKT FTG]－[R]/[L]/[C] contain each of the estimated values. Tapping the parameters
allows you to change any of the element values with the function keys. When an element
value is changed, the estimated impedance characteristic is recalculated, and the result isthen stored and displayed in REF1 TRACE.
6) The equivalent circuit estimation results (circuit and element values) can be saved as a filein a USB memory device with the [SAVE] function key. For the file format, refer to “2.4
Equivalent Circuit File Format”.
Equivalent circuit estimation examples for CKT2 are displayed in the following figure. Please
note that even with the same measurement data, estimation may not be performed correctly
depending on the estimation range (positions of MARKER7 and MARKER8) settings.

(a) Example of incorrect estimation range (b) Example of range enabling correct estimation
Figure 1-38 Equivalent Circuit Estimation Examples■ Cautions for equivalent circuit estimation
・ Equivalent circuit estimation is a function to calculate each element value for the selected
equivalent circuit (CKT1 to CKT6). The actually measured impedance characteristics
contain errors and noise, so estimation results that exactly match measurement resultscannot be obtained.
・ If the selection of the equivalent circuit (CKT1 to CKT6) is inappropriate, equivalent circuit
estimation cannot be performed correctly. When estimated results and measurement
impedance characteristics differ significantly, also revise the equivalent circuit selection.
・ Equivalent circuit estimation can not be performed for data other than frequency sweep anddata obtained by sequence measurement.

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1.12 Calculating Piezoelectric Constants

1.12 Calculating Piezoelectric Constants
This function measures the frequency-impedance characteristic of piezoelectric ceramics andthen calculates the electromechanical coupling coefficient, piezoelectric constants, etc. These
parameters are calculated using methods that conform to “Japan Electronics and Information
Technology Industries Association (JEITA) Standard EM−4501 / Electrical test methods forpiezoelectric ceramic vibrators”.
This function can be used when the measurement mode is IMPD−EXT, IMPD−3T, or IMPD−2T.
The measurement and calculation procedure is described below.
1) Perform frequency sweep measurement to measure the impedance characteristic of the
DUT piezoelectric ceramic.
Z−θZ or Y−θY is suitable for the measurement item (graph Y-axis) setting. At this time,
perform the frequency sweep in an appropriate range. If the width of the resonance portionis too narrow or multiple resonance characteristics are included, the calculation cannot befrequency

Z

Z

Z

performed correctly.

frequency

Appropriate

frequency

Inappropriate

Inappropriate(Resonance characteristic
is too narrow)(Multiple resonancecharacteristics are present)

Figure 1-39 Example of Frequency Sweep for Which Piezoelectric Constant Calculation Is Possible
2) Perform equivalent circuit estimation for the impedance characteristic.
Display MARKER7 and MARKER8, and place MARKER7 on the lower limit frequency and
MARKER8 on the upper limit frequency for analysis. If MARKER7 and MARKER8 are notdisplayed, equivalent circuit estimation is performed within the range that the frequency
sweep was performed.
3) Tap [Calculate]－[PZT ]－[PZT PRMTR]－[FIT] and then tap the [FIT NORMAL] function key.
Estimated characteristics near the measured impedance characteristic (MEAS trace) arestored and displayed as the REF1 trace. The estimated values (C0, R, C, L) are the value inthe following equivalent circuit.
C0
R

C

L

3-1) If the differences between the measurement results and estimation results are significant
at this time, change [Calculate]－[PZT]－[PZT PRMTR]－[C0 MODE] to RESNf / fmax /Gmax / Bavg and perform equivalent circuit estimation again (tap the [FIT NORMAL]
function key) so that estimation data close to the actually measured data is obtained. C0
MODE is an algorithm for calculating the C0 of an equivalent circuit.
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RESNf: Calculate the C0 from the series/parallel resonant frequency.
fmax:

Calculate the C0 from the susceptance of the maximum frequency usedin equivalent circuit estimation.

Gmax:

Calculate the C0 from the frequency at which conductance is the maximum.

Bavg:

Calculate the C0 from the susceptance average.

3-2) If the characteristics in the vicinity of the resonant frequency are unclear due to thefrequency density of the measurement data being coarse, increase [Calculate]－[PZT]－[PZT PRMTR]－[FREQ RESOLN]. The characteristics in the vicinity of the resonant
frequency can be displayed in detail by setting the frequency resolution of the REF1 data.
This setting can be set to any value that is no higher than 2,000 regardless of the setting
when frequency sweep measurement was performed.
4) Tap the [FIT FINE] function key to perform even more accurate equivalent circuit
estimation. However, if the differences between the measurement data and estimation
data are large, the differences may become even more significant due to using [FIT FINE].
5) The equivalent circuit constants can also be finely adjusted by changing the C0, L, C, and R
displayed by selecting [Calculate]－[PZT ]－[PZT PRMTR].
When each constant is changed, the estimated impedance characteristic is recalculated,
and the result is then reflected in the display as the REF1 trace.
6) Each characteristic frequency of the DUT is calculated after equivalent circuit estimationends. Tap [Calculate]－[PZT]－[PZT PRMTR]－[FIT] and then tap the [RESN FREQ DISP]
function key to display the resonant frequency, etc. on the screen.
fs: Series resonant frequency (frequency at which conductance G is the maximum)

fp: Parallel resonant frequency (frequency at which resistance R is the maximum)fa: Antiresonant frequency (highest of the two frequencies at which θ = 0°)

fr: Resonant frequency (lowest of the two frequencies at which θ = 0°)

f1: Quadrant frequency 1 (frequency at which susceptance B is the maximum)f2: Quadrant frequency 2 (frequency at which susceptance B is the minimum)

fm : Maximum admittance frequency (frequency at which admittance |Y| is the
maximum)fn: Minimum admittance frequency (frequency at which admittance |Y| is theminimum)

Qm : Mechanical quality factor (sharpness of resonance)
These parameters are display-only parameters and cannot be changed.

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The positions of these frequencies on the complex admittance plane are shown in the figure
below. Since each frequency is calculated from the equivalent circuit estimation results, it may
be different from the frequency read by the marker from the measurement data.
jB
jB
f1
fm
fm
ωC0

fs

fs
0

fn

fp

G
fa
f2
(Expanded in vicinity of origin)
Figure 1-40 Position of Each Frequency on Complex Admittance Plane
fa

fr

0

G

7) Enter the information of the DUT, such as the type and dimensions of the DUT.
Tap [Calculate]－[PZT]－[PZT CONST] to display the window in the figure below.
1) DUT shape and vibration mode

2) DUT size, etc.

3) Calculation results
Figure 1-41 Layout of Piezoelectric Constant Calculation Window
7-1) Select the shape and vibration mode of the DUT from the pull-down menu. A schematic
diagram of the selected DUT shape and vibration mode is displayed in the window.
7-2) Enter the parameters, such as the size (dimensions) and Poisson's ratio of the DUT. The
required parameters vary depending on the DUT shape and vibration mode selected in7-1). Parameters that are not required are grayed out. Set all of the parameters that canbe entered.
7-3) The piezoelectric constant calculation results are displayed. If you change the DUT shape orparameters, the piezoelectric constants are recalculated and then the display is updated.
The DUT shapes and vibration modes that can be set, parameters such as the size that need
to be set, and piezoelectric constants that can be calculated are listed on the next page.
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Table 1-4 Piezoelectric Constant Calculation Function List
Disk shaped vibrator, radialvibration
Disk−Radial

Name

Disk shaped vibrator, thickness
extensional vibration
Disk−Thickness extensional
d

t
～

t
～

d
Set
parameters
Calculated
constantsNamet (Thickness), d (Diameter),Poisson's Ratio, Density
EEt (Thickness), d (Diameter),Poisson's Ratio, Density

T

D

E

T

S12 ，S66 ，ε33 / ε0 ，kr

C33 ，C33 ，ε33 / ε0 ，kt

Rod shaped vibrator, Axial
vibrationRod− Axial

Plate shaped vibrator, length
extensional vibration
Plate− Length extensionalt

Setparametersℓdℓ (Length), d (Diameter),T
Relative Permittivity (ε33/ ε0),

Calculated
constants

S33 ，S33 ，d33，g33，k33

Name

Plate shaped vibrator, thickness
shear vibration
Plate−Thickness shear
t
～

E

ℓ
Set
parameters
Calculated
constantsaℓ (Length), a (Width),t (Thickness),
Poisson's Ratio, Density

Poisson's Ratio, Density
D

～

～

ℓ

E

S11 ，d31，g31，k31

aℓ (Length), a (Width),t (Thickness),
Poisson's Ratio, Density
D

E

E

T

C44 ，C44 ，S44 ，ε11 / ε0 ，d15，g15，k15

E

D

E

D

T

Sij and Sij are referred to as compliance [m2/N], Cij and Cij as stiffness [N/m2], εij / ε0 as

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1.12 Calculating Piezoelectric Constants
relative permittivity, dij as piezoelectric constant [m/V], gij as piezoelectric constant [Vm/N],
and kij , kr and kt as electromechanical coupling coefficient. For details, refer to “Japan
Electronics and Information Technology Industries Association (JEITA) Standard EM-4501A /Electrical test methods for piezoelectric ceramic vibrators”.
8) Each calculated piezoelectric constant and the set DUT information can be saved to a USB
memory device as a file by tapping the [SAVE] button. For the file format, refer to “2.5
Piezoelectric Constant File Format”.
To close the piezoelectric constant calculation window, tap the [] button.
■ Cautions for piezoelectric constant calculation
・ Many resonant characteristics may appear depending on the DUT. The results will differ
for the piezoelectric constants depending on the selection of the resonant component to beanalyzed and calculated. Check the resonant component in accordance with the vibration
mode.
・ If stress is applied to the DUT by the holder that is holding the DUT, it will affect the
impedance measurement results. Measure the impedance in a state that is as close to thestate in which the DUT is actually used.
・ The shape of the DUT is assumed to be plate, disk, or rod. If the shape greatly differs fromthese shapes, such as a plate that is nearly a cube, errors will occur. For guidelines andother information on the shapes of DUTs, refer to “Japan Electronics and Information
Technology Industries Association (JEITA) Standard EM−4501A / Electrical test methods forpiezoelectric ceramic vibrators”.
・ Piezoelectric constants calculating can not be performed for data other than frequency sweep
and data obtained by sequence measurement.

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1.13 Relative Permittivity Measurement

1.13 Relative Permittivity Measurement
Setting the dimensions of the DUT and other information in advance enables the impedance
measurement results to be converted to the complex relative permittivity and then displayed.
This function can be used when the measurement mode is IMPD−EXT, IMPD−3T, or IMPD−2T.
Perform relative permittivity measurement with the procedure described below.
1) Set the following two parameters in [Calculate]－[REL PERMT].
[ELECTD AREA] : Set the electrode surface area of the DUT in mm2.
[ELECTD DIST]: Set the distance between electrodes in mm.

2) Set the measurement and display items.
When performing sweep measurement, select the display item from [Graph]－[DISPLAY MODE Y].
εS－Dε: Relative permittivity, dissipation factor

εS'－εS" : Real part of relative permittivity, imaginary part of relative permittivity
When performing spot measurement, select the items in [Measure]－[PRMTR1] to [PRMTR6].
εS: Relative permittivity

εS': Real part of relative permittivityεS": Imaginary part of relative permittivity

Dε: Dissipation factor

Preparation for relative permittivity measurement is now complete. For details on connectingwith the DUT and the measurement methods, refer to “4.2.2 Measurement Impedance” to“4.2.4 Measurement Impedance” in Instruction Manual (Basics). When sweep measurement or
spot measurement is performed, the relative permittivity is displayed.
■ About relative permittivity measurement
・ Relative permittivity is calculated with the following formula from the impedance
measurement results (CP and RP) of the DUT.
CP
1
εS "
，εS" =，εS = εS'2＋εS"2 ，Dε =εS ' =εS 'C0
2πf C0 RP
f is the measurement frequency [Hz]. C0 is the electrostatic capacitance of a virtual
capacitor when a dielectric substance is a vacuum with the same electrode surface areaand distance between electrodes as the DUT.
・ Conversion to permittivity is performed on the assumption that all lines of electric force
uniformly pass through the DUT (dielectric substance) located between the electrodes.
Please note that the error becomes larger if there is a gap between the electrodes and
DUT or if the electrode area is smaller in proportion to the distance between theelectrodes (more lines of electric force pass through the space).
Some lines of electric force
do not pass through thedielectric substance.

Electrodes
Dielectric substance
There is a gap between the DUT and electrodes.

Figure 1-42 Example of Dielectric Substance DUT with Large Error

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1.14 Relative Permeability Measurement

1.14 Relative Permeability Measurement
Setting the dimensions of the DUT and other information in advance enables the impedance
measurement results to be converted to the complex relative permeability and then displayed.
This function can be used when the measurement mode is IMPD−EXT, IMPD−3T, or IMPD−2T.
Perform relative permeability measurement with the procedure described below.
1)

Set the following six parameters in [Calculate]－[REL PERMB].
[CORE AREA]: Set the effective cross-section area of the DUT magnetic
substance in mm2.

[MAG PATH LENGTH] : Set the effective magnetic path length of the DUT magnetic
substance in mm.
[COIL TURNS]: Set the number of coil turns.

[ONE TURN LENGTH] : Set coil one turn length in mm.
[WIRE DIAMETER]: Set the winding wire diameter in mm.

[WIRE RESISTIVITY] : Set the winding wire resistivity in Ω/m2) Set the measurement and display items.
When performing sweep measurement, select the display item from [Graph]－[DISPLAY MODE Y].
µS－Dµ : Relative permeability, dissipation factorµS'－µS'' : Real part of relative permeability, imaginary part of relative permeability
When performing spot measurement, select the items in [Measure]－[PRMTR1] to [PRMTR6].
µS: Relative permeabilityµS': Real part of relative permeabilityµS'': Imaginary part of relative permeability

Dµ: Dissipation factor

Preparation for relative permeability measurement is now complete. For details on
connecting with the DUT and the measurement methods, refer to “4.2.2 Measurement
Impedance” to “4.2.4 Measurement Impedance” in Instruction Manual (Basics). When sweep
measurement or spot measurement is performed, the relative permeability is displayed.
■ About relative permeability measurement
・ Relative permeability is calculated with the following formula from the impedance
measurement results (LS and RS) of the DUT.
LS
RS−RW
µS "
，µS" =，µS = µS'2＋µS"2 ，Dµ =µS ' =µS 'L0
2πf L0f is the measurement frequency (Hz), L0 is the virtual inductance when a magnetic
substance is a vacuum, and RW is the winding resistance of the coil.

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・ Conversion to permeability is performed under the assumption that the magnetic
substance is an ideal toroidal core for which all lines of magnetic force pass through the
DUT (magnetic substance). Please note that the error becomes larger if there is amagnetic flux leakage (as in the case of a core with a gap or a solenoid coil).
Effective magnetic path length
Effective
cross-sectional area
Figure 1-43 Example of Toroidal Core

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1.15 Comparator

1.15 Comparator
This function allows you to preset comparison ranges for the measurement results to perform
sorting (bin sorting) and pass/fail comparison (limit comparison and zone comparison) for
selecting DUTs. This function can be used when the measurement mode is IMPD−EXT,IMPD−3T, or IMPD−2T.
Bin sorting and limit comparison can be performed for spot measurement results and zone
comparison can be performed for the sweep measurement results. Comparison results can bedisplayed on the screen and output to the handler interface and the USB or other remoteinterface.

1.15.1 Bin Sorting
This function sorts spot measurement results into up to 14 bins (BIN1 to BIN14). The following
figure shows an example of the spot measurement screen when bin sorting is performed.

primary
parameter

Sorting result

secondaryparameter

Figure 1-44 Bin Sorting Screen Example
Bin sorting is performed for the 1st and 2nd parameters of the spot measurement results. The
3rd to 6th parameters have no effect on the bin sorting results. The setup procedure is
described below.
1) Set the measurement items (1st to 6th parameters) for spot measurement.
2) Set the type (deviation mode) to specify the upper and lower limit range of each bin in[Comparator]－[BIN]－[DEVIATION TYPE].
ABS: Directly set the upper and lower limits of the range.

DEV: Set the type with upper and lower limit values in respect to the reference values.

DEV% : Set the type with upper and lower limit values in respect to the reference
values as percentages (%) of the reference values.
When setting the deviation with DEV or DEV%, set the reference value of the 1stparameter in [Comparator]－[BIN]－[PRI REF] and the reference value of the 2nd parameterin [Comparator]－[BIN]－[SEC REF].

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1.15 Comparator
3) Set the upper and lower limit range of each bin. Tap [Comparator]－[BIN]－[BIN SET] todisplay a palette to set the sorting range. Set the upper and lower limit values of the bins
to be used from BIN1 to BIN14. For spot measurement results, the ranges are checked inorder from BIN1 and the first bin that passes becomes the sorting result.
Spot measurement
primary parameter secondary parameter
Setting to enable
or disable bins

Scroll the bins todisplay/edit

Show a list of all
bin setting ranges

When both the 1st and 2nd parameters satisfy the sorting range, that bin becomes thesorting result. Even when the 1st parameter is inside the range, if the 2nd parameter is
outside the range, the sorting result will not be that bin but instead the next bin sorting
will be performed.
If a check mark on the left is cleared, the corresponding bin sorting will not be performed.
Please note that BIN1 cannot be disabled.
Tapping the BIN column (1 to 14) displays functions to edit on a row basis on the function
keys. When BINn (n is 1 to 14) is selected, the operation of each function key is as follows.
[Delete Row]:

Delete BINn. BIN(n+1) to BIN14 are moved to BINn to BIN13 anda new row is added for BIN14.

[Insert Row]:

Insert a new row at BINn. The original BINn to BIN13 are moved
to BIN(n+1) to BIN14, and the previous data of BIN14 is deleted.

[▲]:

Swap BINn and BIN(n−1). When n is 1, nothing is changed.

[▼]:

Swap BINn and BIN(n+1). When n is 14, nothing is changed.

If all of BIN2 to BIN14 are turned off (check mark is cleared), bin sorting is not performed
and limit comparison is performed instead. For details on limit comparison, refer to“1.15.2 Limit Comparison.”
When all of the sorting ranges are set, tap [] at the bottom right to close the palette.
4) This instrument can also sound a beep for the bin sorting result. When [Comparator]－[ACTION]－[BEEP] is set to ON, this instrument sounds one short beep when the bin
sorting result is BIN1 to BIN14, and one long beep when it is OUT OF BINS.
5) Set [Comparator]－[BIN]－[FUNCTION] to ON to enable bin sorting. When spotmeasurement is performed, the bin sorting result is displayed together with themeasurement result on the screen. There are the following bin sorting results.
BINn: Sorted into BINn (n = 1 to 14)

OUT OF BINS : No bin matches the conditions
ERR: The correct measurement value could not be obtained due to some error.
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1.15 Comparator■ About bin sorting・ If NA (Not Applicable) is set for a sorting value, the value will not be applicable. For
example, if NA is set for the upper limit, sorting is performed using only the lower limit
value. If both the upper and lower limits are set to NA, all measurement results except
errors will be judged to be that bin. If you wish to perform bin sorting for only one of the
1st and 2nd parameters, set the upper and lower limit values of the other parameter toNA.
・ Bin sorting is performed in order from BIN1. Therefore, if the bin sorting ranges overlap,
the result will be sorted into the bin that passes first (bin with the smallest number). If a
result does not fit into any of the bin ranges, it is sorted into OUT OF BINS.
・ The upper limit value, lower limit value, and reference value are interpreted according to
the measurement parameter type (1st and 2nd parameters) and deviation mode setting.
For example, the sorting result is interpreted as follows when the measurement
parameter is capacitance (C) and lower limit = 1, upper limit = 3, and reference value =1.5 are set.
Table 1-5 Deviation Mode Settings and Sorting Value Interpretation Example (Example of C)
Deviation mode
Lower limit (= 1) Upper limit (= 3) Reference value (= 1.5)
ABS
1F
3F
−−−
DEV
2.5 F
4.5F
1.5 F
(=1.5 F+1 F)(=1.5 F+3 F)
DEV%
1.515 F1.545 F
1.5 F(=1.5 F×1.01)(=1.5 F×1.03)
・ If you attempt to close the bin sorting setting screen when there are settings that result inupper limit ≤ lower limit, an error occurs and the screen cannot be closed. Set the sorting
range of each bin so that lower limit < upper limit.
・ If a measurement result that matches the bin upper limit or lower limit is obtained, there
will be cases where it is determined as that bin and cases where it is not determined asthat bin. A displayed measurement result is rounded to the number of significant digits
specified in the specifications, but a numerical value with a precision of about 15 digits isstored internally. Bin sorting is performed using the internal numerical value before
rounding, so even if a measurement result displayed on the screen is exactly the same, it
may be judged as a different bin.

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1.15 Comparator

1.15.2 Limit Comparison
This function performs pass/fail comparison using the BIN1 range for spot measurement
results. The following figure shows an example of the spot measurement screen when limit
comparison is performed.

Comparison
resultBar graph

Figure 1-45 Limit Comparison Screen Example
In limit comparison, a bar graph is displayed to indicate the relative position of themeasurement result using the BIN1 comparison range as the reference. The limit comparison
settings are the same as the bin comparison settings except that BIN2 to BIN14 comparisons
are disabled. Refer to “1.15.1 Bin Sorting”.
There are the following indications for limit comparison results.
PASS : Both the 1st parameter and 2nd parameter are within the BIN1 range.
FAIL : Either one of the 1st parameter and 2nd parameter are outside the BIN1
range.
ERR : The correct measurement value could not be obtained due to some error.

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1.15.3 Zone Comparison
This function performs pass/fail comparison using the two dimensions of the X-axis (sweep
parameter) and Y1/Y2 axes (measurement results) for sweep measurement results. Set any
comparison range for each of the Y1 axis and Y2 axis. The following figure shows an exampleof the sweep measurement screen when zone comparison is performed.

Area outsideof comparison
target|Z|

Measurement
data
Lower limit only
comparison

FREQUENCY

PASS

Comparison
resultFigure 1-46 Zone Comparison Screen Example (When Frequency Sweep)
The figure above is for a frequency sweep but zone comparison can be performed also for an AC
amplitude, DC bias, and time sweep. The measurement result is a pass if the measurement data
fits in the semi-transparent shaded area. It is also possible to set some portion of an area to not be
a comparison target or upper limit only or lower limit only comparison to be performed.
The comparison result is displayed as white text on a dark background at the bottom right ofthe screen.
PASS : Pass (All measurement data is within the pass range.)
FAIL : Fail (There is data that is out of the pass range.)
NA: Comparison not possible (Measurement data is not present in the comparison
area.)ERR : The correct measurement value could not be obtained due to some error.
Examples of zone comparison results are shown below.

PASS
FAIL
NA
Figure 1-47 Zone Comparison Result Examples
The setup procedure is described below.
1) Configure the sweep measurement settings. If zone comparison is set, the pass range isdisplayed in a semi-transparent state on the graph. To prevent graph display frombecoming complicated, we recommend setting the graph style to SPLIT (refer to “1.6.3
Setting the Graph Style”).
2) Set the type (deviation mode) to specify the pass range in [Comparator]－[ZONE]－[DEVIATION TYPE].

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1.15 Comparator
IMMED: Directly set the Y1 and Y2 upper and lower limit values.

REF(DEV): Set the type with upper and lower limit values using a reference data
trace as the reference.

REF(DEV%) : Set the type with a percentage (%) using a reference data trace as thereference.
The reference data trace that will be the reference of REF(DEV) and REF(DEV%) is any
one of REF1 to REF8.
3) Set the upper and lower limit values according to the set deviation mode.
○ Deviation mode: When IMMED
Tap [Comparator]－[ZONE]－[IMMED SET] to display a palette to set the comparison range.
The following shows an example with Y1: Cs and Y2: Rs in a frequency sweep.
X-axis value(SWEEP value)

Y1-axis lower andupper limit values

Y2-axis lower andupper limit values

Up to 20 sets of Y1 and Y2 upper and lower limit values can be set for the X-axis (SWEEP
value). Enter the X-axis values top-aligned in ascending order from No. 1. The upper limit
and lower limit are linearly interpolated for each of them and the enclosed area becomesthe pass range in the zone comparison.
Tapping the column at the left end displays functions to edit on a row basis on the function
keys. When row n (n is 1 to 20) is selected, the operation of each function key is as follows.
[Delete Row]: Delete row n. Row (n+1) to row 20 are moved to row n to row 19 and a
new row is added for row 20.
[Insert Row]:

Insert a new row at row n. The original row n to row 19 are moved torow (n+1) to row 20, and the previous data of row 20 is deleted.

[▲]:

Swap row n and row (n−1). When n is 1, nothing is changed.

[▼]:

Swap row n and row (n+1). When n is 20, nothing is changed.

○ Deviation mode: When REF(DEV)
Set the following settings in [Comparator]－[ZONE]－[DEVIATION SET].
[REF TRACE]: Set the reference data trace (REF1 to REF8) to be the reference.
[Y1 HI]:

Set the Y1 upper limit value for the reference data trace.

[Y1 LO]:

Set the Y1 lower limit value for the reference data trace.

[Y2 HI]:

Set the Y2 upper limit value for the reference data trace.

[Y2 LO]:

Set the Y2 lower limit value for the reference data trace.

(Reference REF trace + lower limit value) to (Reference REF trace + upper limit value)
become the pass range. Comparison is not performed for a limit set to NA. For example, if
Y1 LO is set to NA, comparison for Y1 is performed using only the upper limit value.

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1.15 Comparator○ Deviation mode: When REF(DEV%)
Set the following settings in [Comparator]－[ZONE]－[DEVIATION SET].
[REF TRACE]: Set the reference data trace (REF1 to REF8) to be the reference.
[Y1 HI]:

Set the Y1 upper limit value for the reference data trace as a percentage (%).

[Y1 LO]:

Set the Y1 lower limit value for the reference data trace as a percentage (%).

[Y2 HI]:

Set the Y2 upper limit value for the reference data trace as a percentage (%).

[Y2 LO]:

Set the Y2 lower limit value for the reference data trace as a percentage (%).

(Reference REF trace  (1 + lower limit value / 100)) to (Reference REF trace  (1 + upper
limit value / 100)) become the pass range. Comparison is not performed for a limit set to
NA. For example, if Y1 LO is set to NA, comparison for Y1 is performed using only theupper limit value.
4) This instrument can also sound a beep for the comparison result. When [Comparator]－[ACTION]－[BEEP] is set to ON, this instrument sounds one short beep when the comparison
result is PASS, one long beep when it is FAIL, and two short beeps when it is NA.
5) Set [Comparator]－[ZONE]－[FUNCTION] to ON to enable zone comparison. When sweep
measurement is performed, the comparison result is displayed in the lower right of thescreen together with the measurement result graph.
■ About the comparison range when the deviation mode is IMMED・ The comparison range (pass range) becomes the linear interpolation area passing throughthe set X values and Y1 upper and lower limit values and Y2 upper and lower limit values.
The following shows an example of the comparison range when Y1 is set to CS in afrequency sweep.
FREQUENCY
No.
[Hz]
1
1k
2
2k
3
3k
4
4k

CS [F]CS [F]
LOHI
1.0 µ 2.0 µ
2.0 µ 3.0 µ
1.5 µ 2.5 µ
2.5 µ 3.0 µ

Pass Range

3.0 µ
2.5 µ
2.0 µ
1.5 µ
1.0 µ
1k

2k

3k

FREQUENCY [Hz]4k

The linearly interpolated range becomes the pass range regardless of whether the graphaxis setting is set to linear or log. Therefore, please note that the linearly interpolated
pass range will also change if the graph axis setting (linear/logarithmic) is changed. The
following figure shows an example of the zone comparison pass range when the X-axis is

3.0 µ
2.5 µ
2.0 µ
1.5 µ
1.0 µ

CS [F]CS [F]

changed from linear axis to logarithmic axis while leaving the pass range setting as is.

(lin)
1k

2k

3k

4k

3.0 µ
2.5 µ
2.0 µ
1.5 µ
1.0 µ

(log)
1k

2k

3k 4k

FREQUENCY [Hz]FREQUENCY [Hz]The linearly interpolated pass range on the screen becomes the pass range even when the
Y-axis is changed between linear and log.

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・ If the upper limit or lower limit is set to NA, comparison is not performed for the limitthat is set to NA. For example, if the upper limit is set to NA and the lower limit is set to
1.5 µF, the measurement result is a pass if it is 1.5 µF or higher (1.5 µF to +∞F).
(+∞)
FREQUENCY
[Hz]
1k
2k
3k
4k
5k

CS [F]
LOHI
1.0 µ 2.0 µ
2.0 µ 3.0 µ
1.5 µ
NA
2.5 µ 3.0 µ
1.5 µ 2.0 µ

CS [F]

No.
1
2
3
4
5

3.0 µ
2.5 µ
2.0 µ
1.5 µ
1.0 µ
1k 2k

3k 4k 5k

FREQUENCY [Hz]The upper limit at 2 kHz will be 3 µF, and the upper limit from above 2 kHz to 4 kHz will
be not applicable (+∞F).
・ If the upper limit and lower limit are both set to NA, there will also be no effect on thepass/fail result because comparison itself will not be performed in the range before andafter that point on the X-axis. The comparison range will also not be displayed on thescreen.
CS [F]
LOHI
1.0 µ 2.0 µ
2.0 µ 3.0 µ
NANA
2.5 µ 3.0 µ
1.5 µ 2.0 µ

CS [F]

No.
1
2
3
4
5

FREQUENCY
[Hz]
1k
2k
3k
4k
5k

3.0 µ
2.5 µ
2.0 µ
1.5 µ
1.0 µ
1k 2k

3k 4k 5k

FREQUENCY [Hz]Zone comparison is not performed in the range from above 2 kHz to 4 kHz.
・ If the set of upper and lower limit value is only one, the comparison range is not displayed

CS [F]

on the screen. The comparison result is always NA.
CS [F]
FREQUENCY
3.0 µ
No.
[Hz]
LO
HI
1
2 k 2.0 µ 3.0 µ
2.0 µ
2
3
4
5

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1.16 Handler Interface

1.16 Handler Interface
The comparator comparison results are output from the HANDLER INTERFACE connector on
the rear panel. For details on the pin assignment and electrical specifications, refer to “3.2.7
Handler Interface” in Instruction Manual (Basics).
Configure the settings related to the handler interface in the following menus of [Remote]－[HANDLER].
[TRIGGER POLARITY] : Select from rising (POSITIVE) and falling (NEGATIVE) for
the trigger polarity.
[SWEEP DIRECTION] : Select from UP, DOWN, and SPOT for measurement
performed using a trigger from a handler.
The comparison output logic of the handler interface is active low. The output level is highnormally and low when asserted.
■ Output when bin sorting
When bin sorting is enabled and spot measurement is performed, one of the following
signals is output depending on the bin sorting result.
Table 1-6 Handler Interface Output when Bin Sorting
Bin comparison
Sorting output of handler interface
result
BIN1 to BIN14/BIN1 to /BIN14 (pins 6 to 12, pins 30 to 36)
OUT OF BINS/OUT OF BINS (pin 37)
ERR/ERR (pin 14)
Only one signal is output, and there are no cases where multiple outputs will become low
simultaneously.
■ Output when limit comparison
When limit comparison is enabled and spot measurement is performed, the following
signals are output depending on the limit comparison result.
Table 1-7 Handler Interface Output when Limit Comparison
Limit comparison result
Comparison output of handler interface
1st parameter is:
Fail (above upper limit)/P−HI (pin 30)
Passed/P−IN (pin 6)
Fail (below lower limit)/P−LO (pin 31)
2nd parameter is:
Fail (above upper limit)/S−HI (pin 7)
Passed/S−IN (pin 32)
Fail (below lower limit)/S−LO (pin 8)
Both 1st and 2nd parameters passed /IN (pin 33)
When at least one of 1st and 2nd/OUT (pin 37)
parameters failed
ERR/ERR (pin 14)
There are also cases where multiple comparison results are output simultaneously. For
example, when /IN is output, /P−IN and /S−IN are also output simultaneously.
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1.16 Handler Interface■ Output when zone comparison
When zone comparison is enabled and sweep measurement is performed, one of thefollowing signals are output depending on the zone comparison result.
Table 1-8 Handler Interface Output when Zone Comparison
Zone comparison result
Comparison output of handler interface
Y1 parameter
Failed/Y1−OUT (pin 30)
Passed/Y1−IN (pin 6)
Comparison not possible/Y1−NA (pin 31)
Y2 parameter
Failed/Y2−OUT (pin 7)
Passed/Y2−IN (pin 32)
Comparison not possible/Y2−NA (pin 8)
Both Y1 and Y2 passed/IN (pin 33)
At least one of Y1 and Y2/IN (pin 33)
passed, and the othercomparison not possible
At least one of Y1 and Y2 failed /OUT (pin 37)
Comparison of both Y1 and Y2 /NA ( pin 34)
not possible
ERR/ERR (pin 14)
There are also cases where multiple comparison results are output simultaneously. For
example, when /IN is output, /Y1−IN and /Y2−IN are also output simultaneously.

1.16.1 Recalling Setting Memory and Changing Correction Memory
The measurement conditions and correction memory can be recalled for measurement byusing a trigger from a handler.
■ Recalling setting conditions
If the trigger signal is received when /RCL-VALID is the low level, the setting memory with
the number (1 to 32) corresponding to /RCL6 to /RCL0 (negative logic, 7 bits) is recalled andthe measurement is performed. If an unsaved setting memory number is specified, the setting
state becomes the initial setting state. If a number other than 1 to 32 is specified, an error
occurs (/ERR is output) and measurement is not performed.
■ About the trigger source setting
If the trigger source setting ([Measure]－[TRIGGER SOURCE]) of the recalled setting memoryis set to other than a handler, a trigger from the handler will become unable to be acceptedfrom the next measurement.
■ Changing the correction memory
Information such as the various correction memory numbers (1 to 32) and load standard
values specified in [Calibration] of the restored measurement conditions are also changed
together with the restoration of the measurement conditions.
Correction data needs to be saved in advance to the correction memory number to be used. If anumber without correction data saved is specified, an error occurs. For how to save correction
data, refer to “1.8.3 Open Correction” to “1.8.6 Port Extension” and “1.8.8 Equalizing”.
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1.16.2 Handler Interface Operation Timing■ Timing to start measurement/TRIG

200 µs<

TRIG
10 µs<TRIG>10 µs/RCL-VALID/RCLn

100 µs<Trigger timing
Recall timing
Figure 1-48 Handler Interface Measurement Start Timing■ Operation timing (measurement synchronous driving: off)
TRIG

>0s

Signal output

Recall process
Delay process

t1
t2
t3

Signal acquisition
Parameter calculationcomparison processt4Comparison output(Comparison output last time)

0 s</INDEX

Comparison output
10 to 50 µs< 200 µs
/EOM
Figure 1-49 Handler Interface Operation Timing (Measurement Synchronous Driving: Off)
When /INDEX becomes the low level, it is possible to switch the DUT. When /EOM becomes the lowlevel, the comparison result is fixed and the next measurement can start (trigger input is possible).
Approximations of t1 to t4 are shown below. The actual times vary depending on the settingsand DUT measurement results.

t1
t2
t3

t4

Table 1-9 Handler Interface Timing
Spot measurement:
Sweep measurement:
200 ms or more
400 ms or more
0 s when recall not used
0 s when recall not used*1
Measurement start delay time setting(tm*3 + Measurement delay time
Measurement time setting*2
However,setting*4)✕(N*5 + 1)
･ largest or more of 1/f s and 1.5 ms (f < 30 kHz) + 100 ms or more
･ 0.6 ms or more (30 kHz ≤ f)
0.1 ms or more
200 ms or more

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1.16 Handler Interface
f : measurement frequency (Hz)*1 : [Measure]―[START DELAY] setting*2 : [Measure]―[MEASURE TIME] setting*3 : Measurement time of one point of sweep. Refer to ”5. Specifications” in Instruction Manual(Basics).
*4 : [Measure]―[MEASURE DELAY] setting*5 : [Sweep]―[RESOLUTION] setting■ Operation timing (measurement synchronous driving: on, ON/OFF mode: SLOW)
0 s<
TRIG
Signal output

Recall process
Delay process

t1
t2
t3

Signal acquisition
Parameter calculationcomparison processt4Comparison output(Comparison output last time)

0 s<Comparison output
10 µs >

/INDEX< 200 µs

>0 s

/EOM
Figure 1-50 Handler Interface Operation Timing (Measurement Synchronous Driving: On)
t1 to t4 are the same as when measurement synchronous driving is off. Refer to “Table 1-9
Handler Interface Timing”.
The timing is the same also when the ON/OFF mode is 0° SYNC. When the measurement
signal is turned off, /INDEX is kept at the high level until the phase becomes 0°.

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1.16 Handler Interface■ Handler interface terminal state when the comparator function is not used
When bin comparison, limit comparison, and zone comparison are disabled, the state of eachterminal of the handler interface connector is as follows.
Table 1-10 Handler Interface Terminal State when Comparator Is Disabled
Trigger
When the trigger source ([Measure]－[TRIGGER
TRIG, /TRIG
SOURCE]) is set to the handler interface, the recall/RCL−VALID, /RCLnfunction is also enabled.
Comparison output
Always high level
Pins 6 to 12 and 30 to 37/ERR
Handshake
When the trigger source is set to the handler/INDEX, /EOM
interface, output is at almost the same timing as
when comparison is enabled. When the trigger
source is set to other than the handler interface, thelevel is always high.
Power supply
The power supply can always be used regardless of
INT_DCV, EXT_DCV
the comparator function or trigger source settings.
INT_COM,EXT_COM

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1.16.3 Handler Interface Test Screen
This screen allows you to output a specific signal to the handler interface and monitor input
signals to confirm operation. It can be operated regardless of the comparator function setting.
Select [Remote]－[HANDLER]－[TEST SCREEN] and then tap the [TEST] function key todisplay the test screen.

Figure 1-51 Handler Interface Test Screen
Pins 1 to 5 and 26 to 29 indicate the currently input logic levels. Pins 6 to 14 and 30 to 38
indicate the currently output logic levels. Both the input and output are not the true/false oflogic but the H/L of the voltage level. If you tap [BIN] / [LIMIT] / [ZONE], the terminal names
change to those of the corresponding comparison function. For the terminal names, refer to“Table 3-1 Handler Interface Signal Layout” in Instruction Manual (Basics).
To change the output state, tap the [OUT PIN H/L Change] button at the top right of the screen.

Figure 1-52 Handler Interface Test Screen
The signal names of pins 6 to 14 and 30 to 39 in the figure above are the names for bincomparison. The currently displayed comparator mode (BIN/LIMIT/ZONE) is indicated at thebottom left.
Pins 1 to 5 and 26 to 29 indicate the currently input logic levels. The [H]/[L] buttons of pins 6 to
14 and 30 to 38 indicate the output levels. Tapping a button switches between H and L.
Tap the [×] button at the bottom right to close the test screen and return to the state display
screen. Even if you changed the output H/L levels in the test screen, they return to theoriginal output state.
■ Cautions for using handler interface
・ When the trigger is activated, the menu is closed and the settings can not be changed.
When changing the setting, stop the trigger to the handler interface.

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1.17 Memory Operations

1.17 Memory Operations
Measurement conditions and measurement data can be saved to the internal memory of this
instrument or a USB memory device, and can be read from memory and reused. It is also
possible to output an image of the LCD screen to a USB memory device as a file in bitmap
format (.bmp).
The following memory types can be handled by this instrument.
■ Internal memory
For the operating procedures and other information, refer to “1.6.6(For graph display)

Trace Operations”.
・MEAS TRACE

This stores the measurement data. The data is displayed in a graph.

・REF TRACE

There are eight reference traces (REF1 to REF8). They are used tocopy the data from MEAS TRACE and display it in a graph.
For the operating procedures and other information, refer to “1.17.2(Data for saving)

Measurement Data”.
・DATA FILE

There are 32 data files. They allow you to save the contents of MEAS
TRACE and load the data to MEAS TRACE to redisplay it in a graph.
For the operating procedures and other information, refer to “1.8

(Data for correction)

Error Correction”.
There are 32 memories for each of the following six data types for impedance correction.
・Open correction data (OPEN CORR MEM)
・Short correction data (SHORT CORR MEM)
・Load correction data (LOAD CORR MEM)
・Port extended end open correction data (OPEN_PEXT CORR MEM)
・Port extended end short correction data (SHORT_PEXT CORR MEM)
・Port extended end load correction data (LOAD_PEXT CORR MEM)
There are 32 of the following memory for gain and phase correction.
・Equalizing correction data (EQU CORR MEM)
(Measurement conditions)・CONDITION FILE

There are 32 for each measurement mode.

All data, except the contents of MEAS TRACE, is retained, even if the power is turned off.
■ USB memory device
・Measurement data file

The extension is “.DATA.CSV”.

・Measurement condition file

The extension is “.COND.TXT”.

・Equivalent circuit file

Equivalent circuit estimation results. The extension is“.ECKT.CSV”.

・Piezoelectric constant file

Piezoelectric constant calculation results. The extension is“.PZT.CSV”.

・Marker information fileMarker readings. The extension is “.MKR.CSV”.
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1.17 Memory Operations
・Screen file

File containing an image of the screen. The extension is“.BMP”.

The measurement data file and measurement condition file can be saved and read. The otherfiles are save-only files and cannot be read by this instrument.

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1.17 Memory Operations

1.17.1 Measurement Conditions
The current measurement conditions can be saved to the internal memory of this instrument
or a USB memory device and then later read from memory and restored. Up to 32 sets ofsettings can be saved to the internal memory. The measurement conditions saved in internal
memory can also be used for sequence measurement. For details on sequence measurement,
refer to “1.9 Sequence Measurement”.
■ Saving measurement conditions (to internal memory)
Tap [Storage]－[CONDITION FILE (INT MEM)]－[SAVE] to display a list of the measurement
condition files that are stored in internal memory. The memory that has the name“Condition_Default” contains the factory default settings (initial settings).
4) Enter a name.

1) Tap [SAVE].
2) Select the save destination memory.

5) Tap [OK].
7) Close thememory list.
3) Tap [SAVE].
6) Tap [OK].
Tap the screen or use the knob or cursor keys to select the save destination memory and thentap the [SAVE] function key. Enter the name of the setting conditions in the text input paletteand then tap [OK]. The save confirmation dialog box appears. Tap [OK] to save themeasurement conditions.
Tap the [] button at the bottom right of the memory list dialog box to close list display.

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1.17 Memory Operations■ Restoring measurement conditions (from internal memory)
Tap [Storage]－[CONDITION FILE (INT MEM)]－[LOAD] to display a list of the measurement
condition files that are stored in internal memory. Select the memory to restore and then tap
the [LOAD] function key. The restore confirmation dialog box appears. Tap the [OK] button to
restore the selected measurement conditions.

1) Tap [LOAD].
2) Select the memory
to restore.

4) Tap [OK].

5) Close thememory list.
3) Tap [LOAD].
(Supplementary explanation)
Separate internal memory for saving measurement conditions is provided for each measurement
mode. When you change the measurement mode after saving the measurement conditions, thesaved file will disappear from the list. However, it is stored inside this instrument, and will be
redisplayed when you switch the measurement mode back to the original mode.
○ Other operations (internal memory)
・[DELETE]
Initialize the selected memory. The title (Name) becomes “Condition_Default”.
・[RENAME]
Change the title (name) of the selected memory.
・[MOVE]－[MOVE UP]/[MOVE DOWN]
Tap the [MOVE UP] function key to swap the selected memory with the one directly
above (memory that is one number smaller), and the [MOVE DOWN] function key toswap the selected memory with the one directly below (memory that is one number
larger). This function is used to change the measurement order for sequence
measurement.

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1.17 Memory Operations■ Saving measurement conditions (to USB memory device)
Insert a USB memory device into the USB port on the front panel. Tap [Storage]－[CONDITION FILE (INT MEM)]－[⇒USB MEMORY] and then tap [SAVE] to display a list of thefiles that are stored in the USB memory device.

1) Tap [⇒ USB
MEMORY].

2) Tap [SAVE].

4) Enter a file name.

3) Tap [SAVE].

5) Tap [OK].

7) Close the filelist.

6) Tap [OK].

Tap the [SAVE] function key, enter a file name (an extension is not necessary) in the text input
palette, and tap [OK]. The save confirmation dialog box appears. Tap [OK] to save themeasurement conditions.
The extension of the file name is “.COND.TXT”. The extension does not need to be enteredbecause it is added automatically during saving. Measurement condition files saved to a USB
memory device are in text format. For the file format, refer to “2.3 Measurement Condition File
Format”.

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1.17 Memory Operations■ Restoring measurement conditions (from USB memory device)
Insert a USB memory device into the USB port on the front panel. Tap [Storage]－[CONDITION FILE (INT MEM)]－[⇒USB MEM] and then tap [LOAD] to display a list of the files
that are stored in the USB memory device.
3) Select the setting file
to restore.

1) Tap [⇒ USB
MEMORY].

2) Tap [LOAD].

6) Close the filelist.
4) Tap [LOAD].

5) Tap [OK].
Select the file to restore and then tap the [LOAD] function key. The restore confirmation dialog
box appears. Tap [OK] to restore the selected measurement conditions.
(Supplementary explanation)
A measurement condition file saved in a different measurement mode cannot be loaded.
○ Other operations (USB memory device)・[DELETE]
Delete the selected file.
・[RENAME]
Rename the selected file.
・[CREATE NEW FOLDER]
Create a new folder.
・Change the current folder.
Subfolders are indicated by file names enclosed in brackets ([ ]). The file name “..”indicates a folder one level higher in the hierarchy. Tapping a file name changes thecurrent folder.

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1.17 Memory Operations

1.17.2 Measurement Data
Measurement data can be saved to the internal memory of this instrument or a USB memory
device and then loaded at a later time for use. The data that can be saved is MEAS TRACE
and REF TRACE (REF1 to REF8) data. The saved measurement data can be loaded for display
in graph form or for use as open correction data and other error correction data.
The internal memory can hold up to 20 sets of measurement data.
■ Saving measurement data (to internal memory)
If you tap [Storage]－[DATA FILE (INT MEM)]－[SAVE] and then select the data to save (MEAS
TRACE or REF TRACE), a list of the measurement data stored in internal memory isdisplayed. If a name is “<empty>,” there is no data at that location.

2) Select the data
to save.

1) Tap[SAVE].

9) Close thememory list.

4) Select the savedestination memory.

6 Enter a name.

5) Tap [SAVE].

7) Tap [OK].

3) In the case of a REF trace,
set the number (1 to 8).

8) Tap [OK].

When the data trace to be saved is [REF TRACE], set the reference trace number (1 to 8) tosave the data. Select the save destination memory and then tap the [SAVE] function key.
Enter the name of the data in the text input palette and then tap [OK]. The save confirmation
dialog box appears. Tap [OK] to save the measurement data.

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1.17 Memory Operations■ Loading measurement data (from internal memory)
If you tap [Storage]－[DATA FILE (INT MEM)]－[LOAD] and then select the load destination(MEAS TRACE, REF TRACE, or correction data), a list of the measurement data stored ininternal memory is displayed. If a name is “<empty>,” there is no data at that location.

2) Select a load
destination.

1) Tap[LOAD].

3) Select the
memory to load.
7) Close thememory list.

5) Tap [LOAD].

4) In the case of a REF
trace, set the number(1 to 8).

6) Tap [OK].
Select the memory to load. When loading data to a REF trace, specify a load destination
number (1 to 8) and then tap the [LOAD] function key. The load confirmation dialog box
appears. Tap [OK] to restore the selected measurement data.
[MEAS TRACE]: Load to measurement data trace.

[REF TRACE]: Load to a reference data trace.
Specify the load destination number (1 to 8).

(Measurement Mode: IMPD−EXT, IMPD−3T, or IMPD−2T)[OPEN CORR MEM]

: Load to open correction data.

[SHORT CORR MEM]

: Load to short correction data.

[LOAD CORR MEM]

: Load to load correction data.

[OPEN_PEXT CORR MEM]

: Load to port extended end open correction data.

[SHORT_PEXT CORR MEM] : Load to port extended end short correction data.
[LOAD_PEXT CORR MEM]

: Load to port extended end load correction data.

(Measurement mode: G−PH)[EQU CORR MEM]

: Load to equalizing correction data.

When loading to open, short, load, or equalizing correction data is selected, the load
destination memory numbers (1 to 32) are displayed on the function keys, but editing(modifying) is not possible in this menu. Modify these load destination numbers in the[Calibration] menu. Refer to “1.8 Error Correction”.

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1.17 Memory Operations○ Other operations (internal memory)
・[DELETE] function key
Delete the selected memory. The memory name becomes “<empty>”.
・[RENAME] function key
Change the name of the selected memory.
■ Saving measurement data (to USB memory device)
Insert a USB memory device into the USB port on the front panel. Tap [Storage]－[DATA FILE
(INT MEM)]－[⇒ USB MEMORY]. If you tap [SAVE] and then select the data to save (MEAS
TRACE or REF TRACE), a list of the files stored in the USB memory device is displayed.
1) Tap [⇒ USB
MEMORY].

3) Select the data
to save.

2) Tap [SAVE].

9) Close the filelist.

6) Enter a file name.

5) Tap [SAVE].

7) Tap [OK].

4) In the case of a REF trace,
set the number (1 to 8).

8) Tap [OK].

When the [REF TRACE] is selected, set the reference trace number (1 to 8) to save the data.
Tap the [SAVE] function key to display the text input palette. Enter a file name (an extension
is not necessary) and then tap [ENTER]. The save confirmation dialog box appears. Tap [OK] tosave the measurement data.
The extension of the file name is “.DATA.CSV”. The extension does not need to be enteredbecause it is added automatically during saving. Measurement data files saved to a USB
memory device are in text format. For the file format, refer to “2.2 Measurement Data File
Format”.

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1.17 Memory Operations■ Loading measurement data (from USB memory device)
Insert a USB memory device into the USB port on the front panel. Tap [Storage]－[DATA FILE
(INT MEM)]－[⇒USB MEMORY]. If you tap [LOAD] and then select the load destination (MEAS
TRACE, REF TRACE, or correction data), a list of the measurement data stored in the USB
memory device is displayed.

1) Tap [⇒ USB
MEMORY].
2) Tap [LOAD].

3) Select a load
destination.
5) Select the file toload.
8) Close the filelist.

6) Tap [LOAD].

4) In the case of a REF trace,
set the number (1 to 8).

7) Tap [OK].
When loading data to a REF trace, specify a load destination number (1 to 8). Select the file toload and then tap the [LOAD] function key. The confirmation dialog box appears. Tap [OK] toload the measurement data to the specified load destination.
[MEAS TRACE]: Load to measurement data trace.

[REF TRACE]: Load to a reference data trace.
Specify the load destination number (1 to 8).

(Measurement Mode: IMPD−EXT, IMPD−3T, or IMPD−2T)[OPEN CORR MEM]

: Load to open correction data.

[SHORT CORR MEM]

: Load to short correction data.

[LOAD CORR MEM]

: Load to load correction data.

[OPEN_PEXT CORR MEM]

: Load to port extended end open correction data.

[SHORT_PEXT CORR MEM] : Load to port extended end short correction data.
[LOAD_PEXT CORR MEM]

: Load to port extended end load correction data.

(Measurement mode: G−PH)[EQU CORR MEM]

: Load to equalizing correction data.

When loading to open, short, load, or equalizing correction data is selected, the load
destination memory numbers (1 to 32) are displayed on the function keys, but editing(modifying) is not possible in this menu. Modify these load destination numbers in the[Calibration] menu. Refer to “1.8 Error Correction”.
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1.17 Memory Operations○ Other operations (USB memory device)・[DELETE]
Delete the selected file.
・[RENAME]
Rename the selected file.
・[CREATE NEW FOLDER]
Create a new folder.
・Change the current folder.
Subfolders are indicated by file names enclosed in brackets ([ ]). The file name “..”indicates a folder one level higher in the hierarchy. Tapping a file name changes thecurrent folder.

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1.17.3 Equivalent Circuit Data
The results obtained through equivalent circuit estimation from the frequency-impedance
characteristics of the DUT can be saved to a USB memory device. The equivalent circuit file isa save-only file and cannot be read by this instrument.
For details on the equivalent circuit estimation function, refer to “1.11 Equivalent Circuit Estimation”.
When the equivalent circuit estimation operation in [Calculate]－[EQIV CKT FITTING] isfinished, insert a USB memory device into the USB port on the front panel and then performthe following procedure.

6) Close the filelist.

1) Tap [SAVE].

2) Tap [SAVE].

3) Enter a file name.

5) Tap [OK].
4) Tap [OK].
Tap the [SAVE] function key to display the text input palette. Enter a file name (an extension
is not necessary) and then tap [OK]. The save confirmation dialog box appears. Tap [OK] tosave the equivalent circuit estimation results.
The extension of the file name is “.ECKT.CSV”. The extension does not need to be enteredbecause it is added automatically during file saving. The equivalent circuit data file is in text
format. For the file format, refer to “2.4 Equivalent Circuit File Format”.
The equivalent circuit type (CKT1 to CKT6) of the estimation results and each LCR element
value are saved to the equivalent circuit file. The impedance characteristics calculated fromthe estimated equivalent circuit are stored in the REF1 reference data trace, and are not

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1.17 Memory Operations
saved to the equivalent circuit file. When saving a reference data trace to a USB memory
device, refer to “■ Saving measurement data (USB memory device)” in “1.17.2 Measurement
Data”.

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1.17 Memory Operations

1.17.4 Piezoelectric Constant Data
The calculated piezoelectric constants of a piezoelectric vibrator and information such as thevarious characteristic frequencies can be saved to a USB memory device. For details on
piezoelectric constant calculation, refer to “1.12 Calculating Piezoelectric Constants”.
■ Saving piezoelectric constant data
When the piezoelectric constant calculation is finished, insert a USB memory device into the
USB port on the front panel and then perform the following procedure in the [[PZTCONSTANT]] window.

6) Close the filelist.
1) Tap [SAVE].
3) Enter a file name.

2) Tap [SAVE].

5) Tap [OK].

4) Tap [OK].

Tap [SAVE] in the [[PZT CONSTANT]] window and then tap the [SAVE] function key. Enter afile name (an extension is not necessary) in the text input palette and then tap [OK] to confirm
the file name. The save confirmation dialog box appears. Tap [OK] to save the piezoelectric
constant file.
The extension of the file name is “.PZT.CSV”. The extension does not need to be enteredbecause it is added automatically during saving.
Piezoelectric constant files saved to a USB memory device are in text format. For the fileformat, refer to “2.5 Piezoelectric Constant File Format”.

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1.17 Memory Operations

1.17.5 Marker Information
The setting state of the markers and the values of the data indicated by the markers can besaved to a USB memory device as a file. For details on how to use markers, refer to “1.7Marker Operations”.
Open the [Marker] menu, insert a USB memory device into the USB port on the front panel,and perform the following procedure.

1) Tap [SAVE].

6) Close the filelist.

3) Enter a file name.

2) Tap [SAVE].

5) Tap [OK].
4) Tap [OK].
Tap the [SAVE] menu and then tap the [SAVE] function key to display the text input palette.
Enter a file name (an extension is not necessary) and then tap [OK]. The save confirmation
dialog box appears. Tap [OK] to save the marker information at that point in time as a set to a
file.
The extension of the file name is “.MKR.CSV”. The extension does not need to be enteredbecause it is added automatically during saving.
Marker information files saved to a USB memory device are in text format. For the file format,
refer to “2.6 Marker Information File Format”.

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1.17 Memory Operations

1.17.6 Screen Copy
This function can capture an image of the LCD screen and save it to a USB memory device.
Insert a USB memory device into the USB port on the front panel and then press the
SCREEN COPY key to create a bitmap file in the USB memory device.

The file name of the created file is “ZA57630_nnn.bmp”. The “nnn” is a serial number from000 to 999 that is incremented by 1 each time a screen image is captured. If there is a file withthe same name, it is overwritten. The serial number can be set to an arbitrary three-digit
number in [Storage]－[SCRN COPY FILE NUMBER].
The file format is a Microsoft Windows bitmap image, there are 800x600 dots and 16.77
million colors, and the file size is approximately 1.9 MB.

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1.18 External Reference Clock1.18 External Reference ClockThis instrument uses an internal crystal oscillator as the reference clock, but an external
10 MHz clock signal can also be used.
Generally, an external reference clock is used for the following purposes.
・ To improve the accuracy and stability of the measurement frequency by using a reference
clock (e.g., a rubidium frequency standard) that is more accurate than the internal clock ofthis instrument.
・ To establish a common frequency accuracy by using a reference clock that is shared byother devices.
■ Inputting an external 10 MHz reference clock signal
Connect an external 10 MHz reference clock to the 10 MHz REF IN connector on the rear panel.
For the specifications for signals that can be input and the cautions, refer to “3.2.5 10 MHz
REF IN” in Instruction Manual (Basics).

10 MHzTo enable the external reference clock, set [OSC]－[10 MHz REF IN] to ENABLE. When this
instrument is operating with an external reference clock, the status display area in the upper
part of the LCD screen will indicate REF. If a valid clock signal is not being input, REF in thestatus display area will flash.
When [OSC]－[10 MHz REF IN] is set to DISABLE, this instrument will always operate with
the internal reference clock. The status display area will be blank (no indication).
Operating with the internal reference clock(No indication)

REF(“REF” flashing)

Operating with an external reference clock

REF
Even if a valid 10 MHz reference clock signal is being input to the 10 MHz REF IN connector,
this instrument will still operate with the internal reference clock if [OSC]－[10 MHz REF IN]
is set to DISABLE.
If the external reference clock signal is interrupted during operation, this instrument
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1.18 External Reference Clockautomatically switches to the internal reference clock. If the external reference clock issubsequently recovered, operation again continues with the external reference clock. Whether
this instrument is operating with the internal reference clock or an external reference clock isalways indicated in the status display area at the top of the screen.
■ Outputting a 10 MHz reference clock signal
The 10 MHz reference clock signal with which this instrument is operating can be output. For
the signal specifications and cautions, refer to “3.2.6 10 MHz REF OUT” in Instruction Manual(Basics).
When [OSC]－[10 MHz REF OUT] is set to ENABLE, a 10 MHz reference clock signal is output
from the 10 MHz REF OUT connector on the rear panel. A signal is not output when DISABLE
is set.

10 MHz

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1.19 AUX Port Settings

1.19 AUX Port Settings
The AUX port connector on the rear panel has a signal to indicate the measurement signal
output on/off state of this instrument as well as 4-bit logic output and 3-bit logic input, andcan be used for external device control. For details on the pin assignment and electrical
specifications, refer to “3.2.8 AUX” in Instruction Manual (Basics).
■ Setting the AUX port
Set the output signal to D3..D0 of the AUX port in [OSC]－[AUX PORT SET].

1) Tap [AUX PORT
SET].

2) Set or modify the port output values.
The AUX port output values are saved to the measurement condition data. Therefore,
different values can be output to the port by restoring measurement conditions or performing
sequence measurement.
The /ON terminal (pin 7) of the AUX connector is determined by the measurement signal
output state. The level is low with DC ON and AC+DC ON, and high otherwise.
■ Checking the AUX port status
The input/output status of the AUX port can be displayed. Select [Other] menu－[AUX PORTSTATUS] and then tap the [STATUS] function key to display the following window. This screen
is only for displaying the port status. The port output values cannot be changed.

Tap the [×] button at the bottom right to close the AUX port status display screen.

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1.20 Other Operations

1.20 Other Operations
1.20.1 Setting Beep Sounds
When [Other]－[BEEP] is set to ON, a click sound is output for button operations and a pop-up
sound is output when a message is displayed. If you set this to OFF, these sounds will not be
output.

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1.20.2 Setting Internal Clock■ Setting the date and time
Set the date and time of the internal clock in [Other]－[DATE/TIME]. The date is in theyyyy/mm/dd format, and the time is in the hh:mm:ss format and uses the 24-hour system.

1) Tap
DATE/TIME.

2) Tap MODIFY.

3) Set the date and time.

■ Setting the time zone
Tap [Other]－[SYSTEM] and then tap the [TIME ZONE] function key. Select the time zone, selectthe [Automatically adjust clock for Daylight Saving Time] check box if necessary, and tap [OK].

2) Select TIME ZONE.

4) Tap [OK].
3) Select this check box toenable automatic setting fordaylight saving time.

1) Tap [TIME ZONE].

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1.20 Other Operations

1.20.3 Adjusting Touch Panel
Perform touch panel position adjustment when there is a difference between the location
touched on the screen and the touch position recognized by this instrument. It is not normallynecessary to perform this adjustment. The adjustment procedure is described below.
1) Tap [Other]－[TOUCH PANEL ADJ] and then tap the [EXEC] function key. The adjustment
start message appears. Tap [OK].

1) Tap [TOUCH PANEL
ADJ].
3) Tap [OK].

2) Tap [EXEC].

2) The following confirmation message appears. Tap any location on the screen twice consecutively.
Tap this monitor twice to start setting.
Press the Enter or ESC button to end.
To not perform adjustment, press CANCEL/ESC. The adjustment screen will close.
3) A red mark like the one shown below is displayed on the screen. Tap the center of the markwith your finger.

When you tap the mark, the mark will be displayed in another location. Tap the center ofthe mark. The mark will be displayed in a total of four locations in the upper, lower, left,
and right parts of the screen.
You can cancel the adjustment any time by pressing CANCEL/ESC. If you cancel
adjustment, the results of the adjustments made up until now will be cleared and this
instrument will be restored to the state before you started adjustment.
4) After you tap the four locations, the following message appears. Tap the [OK] button to end
touch panel position adjustment.

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1.20 Other Operations

1.20.4 Adjusting LCD Backlight Brightness
You can adjust the brightness of the LCD backlight of this instrument in [Other]－[BRIGHTNESS]. The brightness can be set from 0 to 100, with a larger value indicating
greater brightness. Please note that setting 0 does not completely turn off the backlight.

1) Tap[BRIGHTNESS].

2) Set or modify the brightness.

1.20.5 Displaying System Information
Select [Other]－[SYSTEM] to display this instrument model name, firmware version, serial
number, last calibration date, and copyright information. There is no item to set.

1) Tap[SYSTEM].

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1.20.6 Resetting Settings
Reset the settings of this instrument. Tap [Other]－[RESET] and then tap the [RESET]
function key. A confirmation dialog box appears. Tap [OK] to reset the settings.
The settings cannot be initialized during measurement. Stop measurement and then performthe operation.

2) Tap [OK].

1) Tap [RESET].

For details on the settings that are reset, refer to “Table 3.4 Initial Settings” in Instruction
Manual (Basics).

1.20.7 Restoring Settings to Factory Default State
Restore all this instrument settings to the factory default state. Tap [Other]－[SYSTEM] andthen tap the [INITIALIZE] function key. A confirmation dialog box appears. Tap [OK] to restore
this instrument to the factory default state.
The settings cannot be initialized during measurement. Stop measurement and then performthe operation.

2) Tap [OK].

1) Tap [INITIALIZE].
Performing the operation described above restores all settings, including the measurementmode and remote interface settings, the measurement data saved in internal memory, and themeasurement condition files saved in internal memory (which are used in sequence
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1.20 Other Operations
measurement), to the state when this instrument was shipped from the factory. Also, the timezone setting window appears the next time the power is turned on after performing thisoperation (refer to “■ Setting the time zone” in “1.20.2 Setting Internal Clock”). The time zone
setting window does not appear when the power is turned on from the second time.
For details on the factory default settings, refer to “Table 3.4 Initial Settings” in Instruction
Manual (Basics).

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1.20 Other Operations

1.20.8 Outputting Log File
This function outputs a log file for analyzing the operation of this instrument to a USB
memory device.
When you report that a problem has occurred with the operation of this instrument, we may
ask you to output and provide the log file. A log file is not required in cases other than that.
Insert a USB memory device into the USB port on the front panel. Select [Other]－[SYSTEM]
and then tap the [LOG OUTPUT] function key. Tap [OK] to output the log file to the USB
memory device. The time required to output the log file varies depending on the log size but it
usually takes several minutes. The log file name will be “ZA57630_yyyymmddhhmm.LOG”.

2) Tap [OK]1) Tap[LOG OUTPUT]
Please note that the log file is encrypted so you will not be able to read its contents.
Even if you mistakenly output a log file, there will be no effect on the operation of this
instrument. Delete the log file created in the USB memory device.

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2. File Formats

2.1

General ............................................................................... 2-2

2.2

Measurement Data File Format ........................................... 2-2

2.3

Measurement Condition File Format ................................... 2-7

2.4

Equivalent Circuit File Format ........................................... 2-16

2.5

Piezoelectric Constant File Format ................................... 2-17

2.6

Marker Information File Format ......................................... 2-19

2.7

Screen Image File Format ................................................. 2-20

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2.1 General

2.1 General
This instrument can save the measurement data, measurement conditions, equivalent circuit,piezoelectric constants, marker information, and LCD screen images as files to a USB
memory device inserted in the USB port on the front panel. They can also be read by personal
computers and other IBM PC/AT compatible machines. A measurement data file, andmeasurement condition file can be reloaded and used by this instrument or loaded and usedby another ZA57630.
All files except screen image files are in text format, and there are the following formats forthe parameters contained in each file.
[Parameter formats]
SymbolFormatExample(NR1)

Integer (numerical value)

123

(NR2)

Decimal point notation without

0.075

exponent (numerical value)(NR3)

Decimal point notation with exponent

4.99E+06(numerical value)
(CRD)

Text

ALL

(SRD)

Text enclosed in double quotation"No error"

marks{CRD1|CRD2|..}(bool)

Any one of text of CRD1, CRD2, ...

{ON|OFF}

Boolean value

ON,OFF,1,0

2.2 Measurement Data File Format
This file is in text format (CSV format) and can be handled by text editors, spreadsheet
software, and other PC software. The extension of the file name is “.DATA.CSV”.
The structure of the measurement data file differs depending on whether or not the data was
obtained by sequence measurement.
Beginning of file
HeaderMeasurement
conditions

Measurement data

Measurement
data
DATA[0]DATA[1]DATA[2]：End of file
DATA[n-1]
Figure 2-1 Structure of Measurement Data File (without Sequence Measurement)

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2.2 Measurement Data File Format

Beginning of file

HeaderMeasurement
conditions(Sequence 1)

Measurement data
(Sequence 1)

Measurement
data
DATA[0]DATA[1]DATA[2]：DATA[n1-1]

Measurement
conditions(Sequence 2)

Measurement data
(Sequence 2)

Measurement
data
DATA[0]DATA[1]DATA[2]：DATA[n2-1]：
Measurement
conditions(Sequence m)

Measurement data
(Sequence m)

Measurement
data
DATA[0]DATA[1]DATA[2]：End of file
DATA[nm-1]
Figure 2-2 Structure of Measurement Data File (with Sequence Measurement)
The measurement conditions part and the measurement data part have the same format,
regardless of whether or not there is sequence measurement.
Table 2-1 Data File Format (Header Part)Line
Format (example)
Description
number1

Idn,"NF Corporation",ZA57630,
0123456,Ver1.00

Manufacturer, model name, serial
number, firmware version

2

FileFormatVer,1.00

File format version

3

FileType,DATA

File type (measurement data)

4

DateTime,(CRD)

Date and time file saved
yyyy/mm/dd,hh:mm:ss

5Mode,{IMPD−EXT|IMPD−3T|

Measurement modes

IMPD−2T|G−PH}

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2.2 Measurement Data File Format
Table 2-2 Data File Format (Measurement Conditions Part)
Relativeline
number+0

Format (example)

Description

Date,(CRD)

Measurement start date and time inyyyy/mm/dd,hh:mm:ss format+1

DataNum,(NR1)

Number of data items (sweep
resolution setting + 1)

+2

SweepSequence,(NR1)

Number of sequences
This is 0 when there is no sequence
measurement.

+3

OscFrequency,(NR2)

Measurement signal frequency Hz+4

OscAmplitudeUnit,{V|A}

Amplitude unit of measurement signal+5

OscAmplitude,(NR3)

Measurement signal AC amplitude
Vrms or Arms

+6

OscDCbiasValue,(NR3)

Measurement signal DC bias V or A

+7

OscHVbias,{ON|OFF}

Measurement signal, HV DC bias

+8

MeasTime,(NR3)

Measurement time

+9

MeasStartDelayTime,(NR3)

Measurement start delay time+10

MeasDelayTime,(NR3)

Measurement delay time s+11

SweepItem,{FREQUENCY|

Sweep itemss

AMPLITUDE|DC
BIAS|ZERO-SPAN}+12

SweepResType,{Log|Lin}

Sweep resolution type

+13

GraphTitleSet,(SRD)

Graph title+14

GraphXaxis,{SWEEP|R|G|P|a}Graph X-axis display item

+15

GraphYaxis,{Z−P|Y−P|R−X|G−B|

Graph Y1-axis and Y2-axis display

Cp−Rp|Cp−D|Cp−Q|Cs−Rs|

items

Cs−D|Cs−Q|Lp−Rp|Lp−Q|
Ls−Rs|Ls−Q|V−I|V1−V2|

es, es1, and es2 are the abbreviatedes−D|es1−es2|us−D|us1−us2|

forms of εS, εS', and εS", respectively,

FREQ−Pz|X|−X|B|

and us, us1, and us2 are theR−P|dBR−P|R−GD|dBR−GD|

abbreviated forms of µS, µS', and µS”,

a−b|FREQ−P|R|dBR|b}respectively.

The line number of the first line of the setting conditions part relative to the beginning of thefile can be calculated with the formula shown below, denoting the number of measurement
data items (DataNum) for sequence number m as nm.
The line number of the first line of setting conditions part = 6＋(16＋n1)＋(16＋n2)＋...＋(16＋nm)
If there is no sequence measurement (m = 0), the line number of the first line of the setting
conditions part would be 6.

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2.2 Measurement Data File Format

Table 2-3 Data File Format (Measurement Data Part)
Relativeline
number+0

Format (example)

Description(CRD),(CRD),(CRD),

Text indicating contents of(CRD),(CRD),(CRD),(CRD),STATUS

measurement data part+1

DATA[0](NR3),(NR3),(NR3),SWEEP*1, V1(Vrms)*2, V2(Vrms)*3,(NR3),(NR3),(NR3),(NR3),(NR1)+2DATA[1](NR3),(NR3),(NR3),SWEEP, V1(Vrms), V2(Vrms),(NR3),(NR3),(NR3),(NR3),(NR1)Z(Ω), θ(°), Y1, Y2, STATUS

：

：

：

+n

*1:

Z(Ω)*4, θ*4(°), Y1*5, Y2*5, STATUS*6

DATA[n-1](NR3),(NR3),(NR3),SWEEP, V1(Vrms), V2(Vrms),(NR3),(NR3),(NR3),(NR3),(NR1)Z(Ω), θ(°), Y1, Y2, STATUS

This is the sweep value. Any one of frequency (Hz), AC amplitude (Vrms or Arms), DC
bias (V or A), and time (s) is output.

*2:

This is the monitored voltage. V1 (Vrms) is output when the measurement mode is
IMPD−EXT or G−PH, and V (Vrms) when it is IMPD−3T or IMPD−2T.

*3:This is the monitored voltage or monitored current. V2 (Vrms) is output when themeasurement mode is IMPD−EXT or G−PH, and I (Arms) when it is IMPD−3T or
IMPD−2T.

*4:

These are the measurement results. Z (Ω) and θz (°) are output when the measurementmode is IMPD−EXT, IMPD−3T, or IMPD−2T, and R (unitless number) and θ (°) when itis G−PH.
These are the values for which each correction was performed, so the relationship with themonitored voltage and monitored current will not match (Z and V ÷ I will not match).

*5:

These are the Y1-axis value and Y2-axis value of each graph. The axis display items arein accordance with the graph settings when the file was saved, and are saved to relativeline number 15: GraphYaxis of the measurement conditions part. When the graphX-axis is other than SWEEP, the Y1 is the X-axis value and Y2 is the Y-axis value.

If normal measurement could not be performed due to a problem such as over-level detection,“NaN” (Not a Number) is output for the monitored voltage, monitored current, measurement
result, and Y1 and Y2 values.
*6:This information indicates the measurement range and over-level state. It is a numericalvalue that indicates the 16-bit values as a decimal number (0 to 65535) in "Table 2-4
STATUS Information".

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2.2 Measurement Data File Format(MSB)
D15..D12

D11..D8
D7..D4

D3
D2
D1
D0
(LSB)

Table 2-4 STATUS Information
Measurement Modes
IMPD−EXT
G−PH
IMPD−3T
IMPD−2T
PORT1
measurement range
0001:7 Vrms
0010:5 Vrms
0011:2 Vrms
0100:1 Vrms
(Invalid)
0101:500 Vrms
0110:200 Vrms
0111:100 Vrms
1000:50 Vrms
1001:20 Vrms
1010:10 mVrms
PORT2
measurement range(Invalid)Same as D15..D12
Always 0000
Measurement range
0001:1 MΩ
0010:100 kΩ
0011:10 kΩ
0100:1 kΩ
0101:100 Ω
0110:10 Ω
0111:1 Ω
0: Not over level
0: Not over level
0: Not over level
1: PORT1 over
1: Over voltage
1: Over current
level
level
level
0: Not over level
0: Not over level
0: Not over level
1: PORT2 over
1: Over current
1: Over voltage
level
level
level
Always 0
0: Not over level
1: Over range
0: ALC properly
1: ALC error

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2.3 Measurement Condition File Format

2.3 Measurement Condition File Format
This file is in text format (.TXT format) and can be handled by text editors, spreadsheet
software, and other PC software. The extension of the file name is “.COND.TXT”.
The structure of the measurement condition file is shown below.
Beginning of file
HeaderMeasurement
conditions
End of fileFigure 2-3 Structure of Measurement Condition File
Table 2-5 Measurement Condition File Format (Header Part)Line
number1

Format (example)

Description

Idn,"NF Corporation",ZA57630,
0123456,Ver1.00

Manufacturer, model name, serial
number, firmware version

2

FileFormatVer,1.00

File format version

3

FileType,CON

File type (setting condition file)

4

DateTime,(CRD)

Date and time file saved
yyyy/mm/dd,hh:mm:ss

5Mode,{IMPD−EXT|IMPD−3T|

Measurement modes

IMPD−2T|G−PH}
Table 2-6 Measurement Condition File Format (Measurement Conditions Part)Line
Format (example)
Description
number
6

OscFrequency,(NR2)

Measurement signal frequency Hz

7

OscAmplitudeUnit,{V|A}

Amplitude unit of measurement signal

8

OscAmplitude,(NR3)

Measurement signal AC amplitude
Vrms or Arms

9

OscAmplitudeLimit,(NR3)

Measurement signal AC amplitude
limit Vrms or Arms

10

OscALC,{ON|OFF|CV1|CV2}

11

OscALCTolerance,(NR1)Permissible error %12

OscALCRetry,(NR1)Maximum number of retries

13

OscALCCorrectionFactor,(NR1)Correction factor %14

OscDCbias,(NR3)

Measurement signal DC bias V or A

15

OscDCbiasHV,(NR3)

Measurement signal, HV DC bias voltage

16

OscHVbias,{ON|OFF}

Measurement signal, HV DC bias ON/OFF

2-7

Automatic level control

ZA57630

2.3 Measurement Condition File Format
Table 2-6 Measurement Condition File Format (Measurement Conditions Part) Continued
Line
Format (example)
Description
number17

OscOutputConnector,

Normal DC bias output connector{FRONT|REAR}
18

OscPowerAmpGain,(NR3)

DUT drive amplifier gain

19

OscAUXPort,(NR1)

AUX port output value 0 to 15

20

OscOnOffSync,

Measurement synchronous drive{ASYNC|SYNC(AC+DC)|SYNC(AC)}
21OscOnOffMode,{QUICK|SLOW|S

ON/OFF mode

YNC}
22

OscFrequencyChangeMode,

Frequency change mode

{ASYNC|SYNC}
23

Osc10MHzRefIn,

Reference clock selection{DISABLE|ENABLE}
24

Osc10MHzRefOut,

Reference clock output{DISABLE|ENABLE}
25

MeasParam1,{Z|Pz|Y|Py|R|X|G|

Spot measurement 1st to 6th

B|Cs|Cp|D|Qc|Ls|Lp|Ql|Rs|

parameters

Rp|es|es1|es2|De|us|us1|us2|
Du|FREQUENCY|V1|V2|V|I|
R|dBR|P|a|b|STATUS|NA}
26

MeasParam2,{...}

27

MeasParam3,{...}

28

MeasParam4,{...}

29

MeasParam5,{...}

30

MeasParam6,{...}

31

MeasTime,(NR3)

Measurement time

32

MeasStartDelayTime,(NR3)

Measurement start delay time

33

MeasDelayTime,(NR3)

Measurement delay time s

34

MeasTriggerSource,

Trigger Sourcess{PANEL|REMOTE|HANDLER}
35

MeasRepeat,{ON|OFF}

Repeat measurement36

SweepSequence,(NR1)Sequence sweep number 0 to 32

37

SweepSequenceTrigger,{AUTO|

Sequence trigger mode

STEP}
38

SweepItem,{FREQUENCY|

Sweep itemAMPLITUDE|DC BIAS|
ZERO-SPAN}

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2.3 Measurement Condition File Format
Table 2-6 Measurement Condition File Format (Measurement Conditions Part) Continued
Line
Format (example)
Description
number39

SweepLowerFrequency,(NR2)

Sweep lower frequency limit Hz

40

SweepUpperFrequency,(NR2)

Sweep upper frequency limit Hz

41

SweepLowerAmplitude,(NR3)

Sweep lower amplitude limit Vrms or Arms

42

SweepUpperAmplitude,(NR3)

Sweep upper amplitude limit Vrms or Arms

43

SweepLowerDCbias,(NR3)

Sweep lower DC bias limit V or A

44

SweepUpperDCbias,(NR3)

Sweep upper DC bias limit V or A

45

SweepLowerHVbias,(NR3)

Sweep lower HV DC bias limit V46

SweepUpperHVbias,(NR3)

Sweep upper HV DC bias limit V

47

SweepRes,(NR1)

Sweep resolution 3 to 2,000

48

SweepResType,{LOG|LIN}

Sweep type49

SweepSlowSweep,{ON|OFF}

Automatic high density sweep

50

SweepSlowSweepVarType,

Automatic high density sweep,{Z|Y|dBR|R|P}
51

monitoring parameter

SweepSlowSweepVarZ,(NR3)Automatic high density sweep, Z
threshold value Ω

52

SweepSlowSweepVarY,(NR3)Automatic high density sweep, Y
threshold value S

53

SweepSlowSweepVarDBR,(NR2)

Automatic high density sweep, dBR
threshold value dB

54

SweepSlowSweepVarR,(NR3)Automatic high density sweep, R
threshold value

55

SweepSlowSweepVarP,(NR2)

Automatic high density sweep, P
threshold value °56

SweepResonantTrack,{ON|OFF}

Resonant frequency tracking
measurement

57

ResonantTrackUpper,(NR2)

Tracking frequency upper limit Hz

58

ResonantTrackLower,(NR2)

Tracking frequency lower limit Hz

59

SweepResonantTrackTarget,(NR2)Target phase °60

SweepResonantTrackTolerance,(NR2)Permissible error °61

SweepResonantTrackCorrection,(NR1)Correction factor %62

SweepResonantTrackPolarity,

Tracking polarity{POSITIVE|NEGATIVE}
63

GraphTitleSet,(SRD)

Graph title

64

GraphStyle,{SINGLE|SPLIT}

Graph display style

65

GraphGridType,Graph grid line style{OFF|SOLIDLINE|
BROKENLINE}

2-9

ZA57630

2.3 Measurement Condition File Format
Table 2-6 Measurement Condition File Format (Measurement Conditions Part) Continued
Line
Format (example)
Description
number66

GraphGridStyle,

Graph grid display axis

{OFF|X|X−Y1|X−Y2|X−Y1−Y2}
67

GraphAxisType,{LIN|LOG},

Type of graph X, Y1, and Y2 axes

{LIN|LOG},{LIN|LOG}
68

GraphXaxis,{SWEEP|P|R|G|a}Graph X-axis display item

69

GraphYaxis,{Z−P|Y−P|R−X|G−B|

Graph Y1-axis and Y2-axis display

Cp−Rp|Cp−D|Cp−Q|Cs−Rs|

items

Cs−D|Cs−Q|Lp−Rp|Lp−Q|

70

Ls−Rs|Ls−Q|V−I|V1−V2|

es, es1, and es2 are the abbreviatedes−D|es1−es2|us−D|us1−us2|

forms of εS, εS', and εS," respectively,

FREQ−Pz|X|-X|B|

and us, us1, and us2 are theR−P|dBR−P|R−GD|dBR−GD|

abbreviated forms of µS, µS', and µS,"

a−b|FREQ−P|R|dBR|b}respectively.

GraphTrace,{ON|OFF},{ON|OFF},{ON|OFF},{ON|OFF},{ON|OFF},{ON|OFF},{ON|OFF},{ON|OFF},

Graph display trace selection
From beginning:
MEAS, REF1, REF2,..., REF8

{ON|OFF}71

GraphPhaseRange,{0|1|2|3}

Phase display range
0: ±180°, 1: 0 to +360°,
2: −360 to 0°, 3: UNWRAP

72

GraphPhaseAperture,(NR1)

Aperture size (for group delay
calculation)73

Trace color 0x000000 to 0xFFFFFF

GraphTraceColor,(CRD),(CRD),(CRD),(CRD),(CRD),

From beginning: MEAS Y1, MEAS Y2,(CRD),(CRD),(CRD),(CRD),(CRD),

REF1 Y1, REF1 Y2,..., REF8 Y2(CRD),(CRD),(CRD),(CRD),(CRD),(CRD),(CRD),(CRD)
74

GraphScaleMode,

Graph axis scale mode

{AUTO|AUTO-R|FIX}
75

GraphScaleX,(NR3),(NR3)Graph X-axis range

Lower limit toupper limit

76

GraphScaleY1,(NR3),(NR3)Graph Y1 axis range Lower limit toupper limit

77

GraphScaleY2,(NR3),(NR3)Graph Y2 axis range Lower limit toupper limit

2-10

ZA57630

2.3 Measurement Condition File Format
Table 2-6 Measurement Condition File Format (Measurement Conditions Part) Continued
Line
Format (example)
Description
number74

GraphScaleMode,

Graph axis scale mode

{AUTO|AUTO-R|FIX}
75

GraphScaleX,(NR3),(NR3)Graph X-axis range

Lower limit toupper limit
76

GraphScaleY1,(NR3),(NR3)Graph Y1 axis range Lower limit toupper limit

77

GraphScaleY2,(NR3),(NR3)Graph Y2 axis range Lower limit toupper limit

78

MarkerMkr1,

Marker 1 to marker 8 information{OFF|ON|DELTA|DELTA-T},

Mode,{MEAS|REF1|...|REF8},

Target trace,{SEQ0|...|SEQ32},(NR3)Target sequence number, position

79

MarkerMkr2,{...},{...},{...},{...}

80

MarkerMkr3,{...},{...},{...},{...}

81

MarkerMkr4,{...},{...},{...},{...}

82

MarkerMkr5,{...},{...},{...},{...}

83

MarkerMkr6,{...},{...},{...},{...}

84

MarkerMkr7,{...},{...},{...},{...}

85

MarkerMkr8,{...},{...},{...},{...}

86

MarkerActive,(NR1)

Active marker 1 to 8

87

MarkerSearchValueX,(NR3)Marker88

MarkerSearchValueDeltaX,(NR3)Marker ⊿X search value

89

MarkerSearchValueY1,(NR3)Marker Y1 search value

90

MarkerSearchValueDeltaY1,(NR3)Marker91

MarkerSearchValueY2,(NR3)Marker Y2 search value

92

MarkerSearchValueDeltaY2,(NR3)Marker93

MarkerAutoSearch,Marker automatic search mode

X search value⊿Y1 search value⊿Y2 search value{OFF|XMAX|XMIN|XPEAK|XBOTTOM|Y1MAX|Y1MIN|Y1PEAK|Y1BOTTOM|Y2MAX|Y2MIN|Y2PEAK|Y2BOTTOM|
X|Y1|Y2|DELTAX|DELTAY1|
DELTAY2|BW1|BW2|BW3}
94

TraceAutoStore,{OFF|1|2|...|8}

2-11

Trace auto store

ZA57630

2.3 Measurement Condition File Format
Table 2-6 Measurement Condition File Format (Measurement Conditions Part) Continued
Line
Format (example)
Description
number95

InputRangePort1,{AUTO|7V|5V|

PORT1 and PORT2 measurement

2V|1V|500mV|200mV|100mV|

ranges50mV|20mV|10mV}(Measurement mode: IMPD−EXT or

96

InputRangePort2,{...}

G−PH)

97

InputRange,{AUTO|1M|100k|

Measurement range

10k|1k|100|10|1}(Measurement modes IMPD−3T,
IMPD−2T)98

InputOverLevel,(NR3),(NR3)Over-level detection level PORT1,
PORT2

99

InputOverActionBeep,{ON|OFF}

Beep sound setting for over-level
detection

100

InputOverActionMeasStop,{STOP|
CONT}

101

Sweep stop setting for over-level
detection

InputWeightingFactor,(NR3),(NR3)

Input weighting factor PORT1,
PORT2

102

RemoteHandlerSweepDirection,{UP|DOWN|SPOT}

Measurement operation for handler
trigger

103

CalOpenCorrection,{ON|OFF}

OPEN correction

104

CalOpenCorrectionNunber,(NR1)105

CalShortCorrection,{ON|OFF}

106

CalShortCorrectionNunber,(NR1)107

CalLoadCorrection,{ON|OFF}108

CalLoadCorrectionNunber,(NR1)

Data memory number 1 to 32

109

CalLoadFormat,{Cs−D|Cp−D|

Load standard value format

Data memory number 1 to 32
SHORT correction
Data memory number 1 to 32
LOAD correction

Rp−Cp|Rs−Ls|Rs−X|Z−P}
110
：
139

CalLoad1,(NR3),(NR3),(NR3)Load standard values 1 to 30
Frequency Hz，|Z| Ω，θZ °：CalLoad30,(NR3),(NR3),(NR3)2-12

ZA57630

2.3 Measurement Condition File Format
Table 2-6 Measurement Condition File Format (Measurement Conditions Part) Continued
Line
Format (example)
Description
number140

CalPortExtension,{ON|OFF}Port extension

141

CalPortExtensionZ0,(NR3)Characteristic impedance Ω142

CalPortExtensionElectricalLength,

Electrical length m

(NR2)
143

CalPortOpenCorrection,{ON|OFF}

OPEN correction

144

CalPortOpenCorrectionNumber,(NR1)145

CalPortShortCorrection,{ON|OFF}

146

CalPortShortCorrectionNumber,(NR1)147

CalPortLoadCorrection,{ON|OFF}

148

CalPortLoadCorrectionNumber,(NR1)

Data memory number 1 to 32

149

CalPortLoadFormat,{Cs−D|Cp−D|

Load standard value format

Data memory number 1 to 32
SHORT correction
Data memory number 1 to 32
LOAD Correction

Rp−Cp|Rs−Ls|Rs−X|Z−P}
150：

CalPortLoad1,(NR3),(NR3),(NR3)Load standard values 1 to 30
Frequency Hz,|Z| Ω，θZ °：179

CalPortLoad30,(NR3),(NR3),(NR3)180

CalSlopeCompensation,{ON|OFF}

Slope compensation

181

CalEqualize,{ON|OFF}

Equalizing function

182

CalEqualizeCorrectionNumber,(NR1)

Data memory number 1 to 32

183

CalcDielectricPermittivityArea,(NR3)

Relative permittivity measurement,
electrode surface area mm2

184

CalcDielectricPermittivityDistance,

Distance between electrodes mm

(NR3)

2-13

ZA57630

2.3 Measurement Condition File Format
Table 2-6 Measurement Condition File Format (Measurement Conditions Part) Continued
Line
Format (example)
Description
number185

CalcMagneticPermeabilityCoreArea,(NR3)

Relative permeability
Core effective cross-sectional area
mm2

186
187

CalcMagneticPermeabilityCoreMagn

Core effective magnetic path length

eticPathLength,(NR3)mm

CalcMagneticPermeabilityCoilTurns,

Number of coil turns

(NR1)
188

CalcMagneticPermeabilityWireDiam

Winding wire diameter mm

eter,(NR3)189

CalcMagneticPermeabilityOneTurnL

Coil one turn length

mm

ength,(NR3)190

CalcMagneticPermeabilityWireResist

Winding wire resistivityΩmivity,(NR3)191

CalcEquivCkt,{CKT1|...|CKT6}

Equivalent circuit type192

CalcPZTEquivCkt,

Piezoelectric constant{RESNf|fmax|Gmax|Bavg},(NR1)

Equivalent circuit C0 mode,
frequency resolution

193

CalcPZTShape−Mode,

DUT shape, vibration mode

{Disk−Radial|Disk−Thickness|
Rod−Axial|Plate−Length|
Plate−ThicknessShear}
194

CalcPZTSize,(NR3),(NR3),(NR3),(NR3),(NR3),(NR3),(NR3)

DUT shape
Length mm, width mm, thickness
mm, diameter mm, relative
permittivity, Poisson's ratio, density
103 kg/m3

2-14

ZA57630

2.3 Measurement Condition File Format
Table 2-6 Measurement Condition File Format (Measurement Conditions Part) Continued
Line
Format (example)
Description
number195

CalcComptr,{OFF|ON}

Bin comparison

196

CalcComptrType,

Deviation mode, 1st parameter{ABS|DEV|DEV%},(NR3),(NR3)reference value, 2nd parameter
reference value

197

CalcComptrBIN1,ON,

Bin 1 comparison range*1(NR3),(NR3),(NR3),(NR3)

1st parameter upper level, lower
level,
2nd parameter upper level, lower
level

198

CalcComptrBIN2,{ON|OFF},(NR3),(NR3),(NR3),(NR3)：210

Bin 2 to 14 comparison range*1
Enabled or disabled,
1st parameter upper level, lower：
CalcComptrBIN14,{...},(...),(...),(...),(...)

level,
2nd parameter upper level, lower
level

211

CalcComprActionBeep,{ON|OFF}

212

CalcZone,{OFF|ON}

213

CalcZoneMode,

Pass/fail beep sound setting
Zone comparison
Comparison mode

{IMMED|REF_DEV|REF_DEV%}214

CalcZoneImmed1,

IMMED mode 1 to 20 comparison(NR3),(NR3),(NR3),(NR3),(NR3)：233

range*1
SWEEP value：
CalcZoneImmed20,(...),(...),(...),(...),(...)

Y1 lower limit value, Y1 upper
limit value
Y2 lower limit value, Y2 upper
limit value

234

CalcZoneRef,

REF_DEV mode comparison range*1(NR1),(NR3),(NR3),(NR3),(NR3)

Reference REF trace number (1to 8),
Y1 lower limit value, Y1 upper
limit value
Y2 lower limit value, Y2 upper
limit value*1: “NaN” (Not a Number) is output to the file for a parameter with “NA” (Not Applicable) set
in the screen.

2-15

ZA57630

2.4 Equivalent Circuit File Format

2.4 Equivalent Circuit File Format
This file is in text format (.CSV format) and can be handled by text editors, spreadsheet
software, and other PC software. The extension of the file name is “.ECKT.CSV”.
The structure of the equivalent circuit file is shown below.
Beginning of file
HeaderEquivalent circuitdata
End of fileFigure 2-4 Structure of Equivalent Circuit File
Table 2-7 Equivalent Circuit File Format (Header Part)Line
number1

Format (example)
Idn,"NF Corporation",ZA57630,
0123456,Ver1.00

Description
Manufacturer, model name, serial
number, firmware version

2

FileFormatVer,1.00

File format version

3

FileType,EQUIV

File type (equivalent circuit file)

4

DateTime,(CRD)

Date and time file saved
yyyy/mm/dd,hh:mm:ss

5Mode,{IMPD−EXT|IMPD−3T|

Measurement mode

IMPD−2T|G−PH}
Table 2-8 Equivalent Circuit File Format (Equivalent Circuit Data Part)Line
numberFormat (example)

Description

6

CKTType,{CKT1|CKT2|CKT3|
CKT4|CKT5|CKT6}

Equivalent circuit type CKT1 to
CKT6

7EquivalentCktTitle,(CRD)

Equivalent circuit element title

8

CKTType=1 to 4："C[F]", "R[ohm]", "L[H]", "---"

CKTType=5："C0[F]", "C1[F]", "R[ohm]", "L[H]"CKTType=6："C[F]", "R0[ohm]", "R1[ohm]", "---"

EquivalentCkt,

Each constant of equivalent circuit(NR3),(NR3),(NR3),(NR3)elements

CKTType=1 to 4：

C[F], R[Ω], L[H], Nan

CKTType=5：C0[F], C1[F], R[Ω], L[H]CKTType=6：

C[F], R0[Ω], R1[Ω], Nan

2-16

ZA57630

2.5 Piezoelectric Constant File Format

2.5 Piezoelectric Constant File Format
This file is in text format (.CSV format) and can be handled by text editors, spreadsheet
software, and other PC software. The extension of the file name is “.PZT.CSV”.
The structure of the piezoelectric constant file is shown below.
Beginning of file
Header

Piezoelectric
vibrator data
End of fileFigure 2-5 Structure of Piezoelectric Constant File
Table 2-9 Piezoelectric Constant File Format (Header Part)Line
number1

Format (example)
Idn,"NF Corporation",ZA57630,
0123456,Ver1.00

Description
Manufacturer, model name, serial
number, firmware version

2

FileFormatVer,1.00

File format version

3

FileType,PZT

File type (piezoelectric constant file)

4

DateTime,(CRD)

Date and time file saved
yyyy/mm/dd,hh:mm:ss

5Mode,{IMPD−EXT|IMPD−3T|

Measurement modes

IMPD−2T|G−PH}
Table 2-10 Piezoelectric Constant File Format (Piezoelectric Vibrator Data Part)Line
Format (example)
Description
number
6

PZTEquivCktTitle,"Cdmode","C0[F]",Equivalent circuit constant title text

"C[F]","R[ohm]","L[H]","FreqRes"
7

8

PZTEquivCkt,

Equivalent circuit constants{RESNf|fmax|Gmax|Bavg},

C0 mode, C0[F], C[F], R[Ω], L[H],(NR3),(NR3),(NR3),(NR3),(NR1)Frequency resolution (3 to 2,000)

PZTResonantFrequencyTitle,"fs","fp",Characteristic frequency title text

"fr","fa","fm","fn","f1","f2","Qm"
9

PZTResonantFrequency,

Characteristic frequency(NR2),(NR2),(NR2),(NR2),

fs[Hz], fp[Hz], fr[Hz], fa[Hz],(NR2),(NR2),(NR2),(NR2),(NR3)fm[Hz], fn[Hz], f1[Hz], f2[Hz], Qm

2-17

ZA57630

2.5 Piezoelectric Constant File Format
Table 2-10
Line
number10

Piezoelectric Constant File Format (Piezoelectric Vibrator Data Part) Continued
Format (example)

Description

PZTShape−Mode,

DUT shape, vibration mode

{Disk−Radial|Disk−Thickness|
Rod−Axial|Plate−Length|
Plate−ThicknessShear}
11

PZTSizeTitle,"Length[mm]",

Size and other DUT information title"Width[mm]", "Thickness[mm]",text"Diameter[mm]","RelativePermittivity","Poisson's Ratio","Density[10^3 kg/m^3]"
12

PZTSize,(NR3),(NR3),(NR3),(NR3),

DUT size(NR3),(NR3),(NR3)

Length [mm], width [mm],thickness [mm], diameter [mm],relative permittivity, Poisson's
ratio, density [103 kg/m3]

13

PZTConstantTitle,(CRD),(CRD),

Piezoelectric constant title text

(CRD),(CRD),(CRD),(CRD),(CRD)
PZTShape−Mode=
Disk−Radial：
Disk−Thickness："SE12", "SE66", "eT33", "kr", "---", "---", "---""CD33", "CE33", "eT33", "kt", "---", "---", "---"

Rod−Axial："SD33", "SE33", "d33", "g33", "k33", "---", "---"

Plate−Length："SE11", "d31", "g31", "k31", "---", "---", "---"

Plate−ThicknessShear："CD44", "CE44", "SE44", "eT11", "d15", "g15", "k15"
14

PZTConstant,(NR3),(NR3),

Piezoelectric constants(NR3),(NR3),(NR3),(NR3),(NR3)PZTShape−Mode=
E

E

T

D

E

T

D

E

Disk−Radial：s12 , s66 , ε33 , kr, Nan, Nan, Nan

Disk−Thickness：

c33 , c33 , ε33 , kt, Nan, Nan, Nan

Rod−Axial：

s33 , s33 , d33, g33, k33, Nan, Nan

Plate−Length：s11 , d31, g31, k31, Nan, Nan, Nan

E

D

E

E

T

Plate−ThicknessShear： c44 , c44 , s44 , ε11 , d15, g15, k15

2-18

ZA57630

2.6 Marker Information File Format

2.6 Marker Information File Format
This file is in text format (.CSV format) and can be handled by text editors, spreadsheet
software, and other PC software. The extension of the file name is “.MKR.CSV”.
The structure of the marker information file is shown below.
Beginning of file
HeaderMarker informationdata
End of fileFigure 2-6 Structure of Marker Information File
Table 2-11 Marker Information File Format (Header Part)Line
number1

Format (example)
Idn,"NF Corporation",ZA57630,
0123456,Ver1.00

Description
Manufacturer, model name, serial
number, firmware version

2

FileFormatVer,1.00

File format version

3

FileType,MKR

File type(marker information file)

4

DateTime,(CRD)

Date and time file saved
yyyy/mm/dd,hh:mm:ss

5Mode,{IMPD−EXT|IMPD−3T|

Measurement Modes

IMPD−2T|G−PH}
Table 2-12 Marker Information File Format (Marker Information Data Part)Line
Format (example)
Description
number6

7

MkrTitle, MODE, TRACE, SEQ,

Marker information title{FREQUENCY|AC|DC|TIME},SWEEP，{Z|Y|R|...},{P|X|...}Y1，Y2

Mkr1,{OFF|ON|DELTA|DELTA-T},

Marker 1 to 8 information{MEAS|REF1|...|REF8},

Mode, target trace,{SEQ0|...|SEQ32},

sequence number,(NR3),(NR3),(NR3)SWEEP，Y1，Y2

8

Mkr2,{...},{...},{...},{...},{...},{...}

9

Mkr3,{...},{...},{...},{...},{...},{...}

10

Mkr4,{...},{...},{...},{...},{...},{...}

11

Mkr5,{...},{...},{...},{...},{...},{...}

12

Mkr6,{...},{...},{...},{...},{...},{...}

13

Mkr7,{...},{...},{...},{...},{...},{...}

14

Mkr8,{...},{...},{...},{...},{...},{...}

2-19

ZA57630

2.7 Screen Image File Format

2.7 Screen Image File Format
This file contains an image of this instrument’s LCD screen.
The file is in uncompressed Microsoft Windows bitmap (BMP) image format. There are
800600 dots and 16.77 million colors, and the file size is approximately 1.9 MB.

2-20

ZA57630

3. Troubleshooting

3.1

Error Messages ................................................................... 3-2

3.1.1

Power-On Errors ........................................................... 3-2

3.1.2

Panel Operation Errors .................................................. 3-3

3.1.3

Measurement Errors...................................................... 3-6

3.1.4

Other Errors................................................................... 3-7

3.2

Information Messages ......................................................... 3-8

3.2.1

Startup Messages .......................................................... 3-8

3.2.2

Operation Messages ..................................................... 3-8

3.3

Troubleshooting................................................................. 3-11

3-1

ZA57630

3.1 Error Messages

3.1 Error Messages
This section describes the main errors that occur during the self-diagnosis process performed
when the power is turned on, during panel operations, and during normal measurement, as
well as their causes and the remedies required to resolve the problems.
If repair is required, contact NF Corporation or its authorized agent.
When requesting repair of this instrument, please include the error message code (error
number) and a description of any error message that was displayed.
An example of an error message is shown below. The error message code is the number
beginning with a minus sign after “Message” in the INFORMATION window. In the example
shown below, the error message code is “−2048”. Please note that there are error message
codes that have the same numbers as information message codes (refer to “3.2 Information
Messages”), and differ only in that they are negative numbers.

Rare events such as malfunctions due to strong external noise may cause error messages notdescribed in this manual to be displayed.
Unusual operations such as firmware updates may cause error messages not described in thismanual to be displayed. If other manuals have been provided, refer to them as well.
For details on errors that occur only with remote control, refer to “Instruction Manual (Remote
Control)”.

3.1.1 Power-On Errors
The self-diagnosis process is performed when the power is turned on. The following error
message may appear on the screen in the event of an error during that time.
Table 3-1 Power-On Errors
No.
−1024

Error Message

Description and Cause

RemedySettings load error.

The settings were initialized

Turn the power off

Initialize and start up.

because the contents of the resume

and then back on. If

memory were lost.

the error recurs, there
may be a failure
requiring repair.

3-2

ZA57630

3.1 Error Messages

3.1.2 Panel Operation Errors
The errors that may occur during panel operation are listed below.
Table 3-2 Panel Operation Errors
No.
−2048

Error Message
Data out of range.

Description and Cause

RemedyThe set parameter is out of the

Set a value that is

range.

within the correct
range.

−2049

Settings conflict.

There is a violation of constraints

Set a value that isamong multiple setting items.

within the correct
range.

−2050
−2051
−2052

−2053

Not allowed character.
String length error.
Execution error.

Syntax error.

An invalid character has been

Enter only valid

entered.

characters.

The permitted number ofReduce the number

characters has been exceeded.

of characters.

Execution was prevented by

Change the settings so

constraint conflicts amongthat the constraint

multiple setting items.

conditions are satisfied.

There is an error with the input

Input the numericalnumerical value.

value using correct
syntax.

−2054

−2055

Can't execute fitting.

The equivalent circuit estimation

Specify frequency

Fitting can be

cannot be performed because thesweep data.

performed only withdata is not measurement data

frequency sweep data.

resulting from a frequency sweep.

Can't execute.

Execution was not possible

Perform equivalentFitting must be done.

because equivalent circuit fitting

circuit fitting.

has not been performed.
−3073

Insufficient data for

The equalizing correction data is

Store correct

equalize correction. It

invalid. Equalizing correction may

equalizing correction

may not work

not be performed correctly.

data.

Insufficient data for

The open correction data is

Store correct open

open correction. It

invalid. Open correction may notcorrection data.

may not work

be performed correctly.

correctly.
−3074

correctly.
−3075

Insufficient data for

The short correction data is

Store correct short

short correction. It

invalid. Short correction may notcorrection data.

may not work

be performed correctly.

correctly.

3-3

ZA57630

3.1 Error Messages

Table 3-2 Panel Operation Errors (Continued)
No.

Error Message

Description and Cause−3076

Insufficient data for

The load correction data is invalid.

Store correct loadload correction. It may

Load correction may not becorrection data.

not work correctly.

performed correctly.

Can't execute

Self-calibration cannot begin

Turn measurement

calibration.

because measurement signal

signal output off andPlease turn off theoutput is turned on.

then try performing−3077

oscillator output.

Remedyself-calibration
again.

−3080

−3081

−3082

−3083

Input over:(place).

The input level has been exceeded.

Set auto range orPlace denotes the measurement

revise the circuit

connector where over-level wasconnecting with thedetected, and is PORT1 or PORT2.

DUT.

Insufficient data for

The open correction data at theStore correct open

open correction. It

port extension tip is invalid. Opencorrection data at the

may not work

correction may not be performed

port extension tip.

correctly.

correctly.

Insufficient data for

The short correction data at theStore correct short

short correction. It

port extension tip is invalid. Shortcorrection data at the

may not work

correction may not be performed

port extension tip.

correctly.

correctly.

Insufficient data for

The load correction data at theStore correct loadload correction. It may

port extension tip is invalid. Loadcorrection data at the

not work correctly.

correction may not be performed

port extension tip.

correctly.
−6144

Can't access USB

The USB memory device cannot be

storage.

accessed.

・Insert a normal
USB memory
device.
・Firmly insert theUSB memory
device into theconnector.

−6145

There is already a file

The file could not be renamed

Specify a differentof the same name.

because the same file namefile name.

already exists.

3-4

ZA57630

3.1 Error Messages
Table 3-2 Panel Operation Errors (Continued)−6146

USB storage overflow.

There is insufficient available

Insert a USB

space on the USB memory device.

memory device thathas sufficientavailable space.

−6147

File load error due to

The file could not be loaded

illegal header.

because it is an invalid file (e.g.,Specify a correct file.

measurement mode differs orheader part is invalid).
−6148

File load error due to

The file could not be loaded

illegal data.

because it contains invalid data

Specify a correct file.

(e.g., sweep item differs or header
part is invalid).
−6149

Failed to save.

Saving the file failed (USB

Remove thememory device).

read-only attributefrom the file.

−6150

Failed to load.

Loading the file failed (USB

Load a normal file.

memory device).
−6151

Failed to delete.

Deleting the file failed (USB

Remove thememory device).

read-only attributefrom the file.

−6152

Can't load empty

Loading the measurement data

Specify internal

memory.

failed (attempted to load empty

memory with datainternal memory).

saved.

3-5

ZA57630

3.1 Error Messages

3.1.3 Measurement Errors
The errors that may occur during measurement are listed below.
Table 3-3 Measurement Errors
No.
−3072

Error Message

Description and Cause

RemedyMeasurement

Sweep measurement was

Revise the thresholdterminated due toterminated because the number ofsetting when you

measurement points

measurement points exceededwish to perform anover 20,001.

20,001.

automatic highdensity sweep.

−3078

Calibration is failed.

Self-calibration failed because theTurn the power off andPlease check themeasurement error is large.

then back on, refer toconnection.

“1.8.1 Self-calibration,”and then performself-calibration again.
If the symptom occurs
frequently, this
instrument may be
malfunctioning. Contact
NF Corporation or its
authorized agent.

−3079

Measurement

Sweep measurement was

Revise the number ofterminated due toterminated because the number ofmeasurement points

measurement points

measurement points exceededfor each step whenover 2,001.

2,001.

you wish to perform asequencemeasurement.

3-6

ZA57630

3.1 Error Messages

3.1.4 Other Errors
The errors that may occur irregularly during use of this instrument are listed below.
Table 3-4 Other Errors
No.
−7168

−7169

−7170
−7171
−7172

Error Message

Description and Cause

RemedyMeasurement state

An error was detected in internal

If the front panel ormismatch.

communication (measurement

touch panel cannot

section).

be operated, turn the

Measurement section

Internal communication

power off and thenno response.

(measurement section) wasback on.

interrupted.

If the symptom

System section no

Internal communication (UIoccurs frequently,

response.

section) was interrupted.

this instrument may

Remote section no

Internal communication (remote

be malfunctioning.

response.

interface section) was interrupted.

Contact NF

Internal error.

An internal processing error

Corporation or its

occurred.

authorized agent.

3-7

ZA57630

3.2 Information Messages

3.2 Information Messages
This section describes the messages that are displayed when, for example, operations ormeasurements are completed normally.
An example of an information message is shown below. The information message code is the
positive number after “Message” in the INFORMATION window. In the example shown below,
the information message code is “2048”. Please note that there are information message codesthat have the same numbers as error message codes (refer to “3.1 Error Messages"), and differ
only in that they are positive numbers.

3.2.1 Startup Messages
The messages that may be displayed when the power is turned on are listed below.
Table 3-5 Startup Messages
No.

Message

1024

Settings have been initialized due to

All settings have been initialized as a

firmware update.

result of a firmware update.

Last shutdown caused by power

This instrument started up with the

failure.

settings of setting memory number 1

1025

Description

because last time the power was turned off
without entering the standby state.

3.2.2 Operation Messages
The messages that may be displayed during normal operation are listed below.
Table 3-6 Operation Messages
No.
100
101

Message

Description

Are you sure you want to reset theThis is a confirmation for executing thecurrent LAN settings?

LAN reset operation.

Interface setting in progress.

Setting of the remote interface is inprogress.

2048

Done.

The operation has completed.

2049

Are you sure to change theThis is a confirmation for changing themeasurement mode?

measurement mode.

The current settings are reset.

3-8

ZA57630

3.2 Information Messages
Table 3-6 Operation Messages (Continued)
No.

Message

Description

3072

Are you sure you want to delete theThis is a confirmation for clearing the<meas data>?

measurement data trace or reference data
trace.

3073
4096

Are you sure you want to execute theThis is a confirmation for executing a"CALIBRATION"?

self-calibration.

Done.

Executing a phase shift.

<Graph Min Phase> to <Graph Max
Phase>
Press the Cancel key to exit theexecution mode.
4097

Done.

Searching for a marker.

Press the Cancel key to exit theexecution mode.
4098
4099
6144
6145
6146
6147
6148
6149
6150
6251

Are you sure you want to change theConfirmation of graph trace color change.

plots color?

([Graph]−[PLOT COLOR]−[GRADATION])

Are you sure you want to reset theConfirmation of graph trace color change.

plots color?

([Graph]−[PLOT COLOR]−[DEFAULT])Are you sure you want to save theThis is a confirmation for saving to a

current settings to the <dist>?

setting data file.

Are you sure you want to load theThis is a confirmation for loading a setting<file> to the current settings?

data file.

Are you sure you want to delete theThis is a confirmation for clearing a setting<file>?

data file.

Are you sure you want to save theThis is a confirmation for saving to ameasurement data to the <dist>?

measurement data file.

Are you sure you want to load theThis is a confirmation for loading a<file> to the <dist1>?

measurement data file.

Are you sure you want to delete theThis is a confirmation for clearing a<file>?

measurement data file

<file> already exists.

This is a confirmation for overwriting a file

Are you sure you want to replace it?

in a USB memory device.

Are you sure you want to save theThis is a confirmation for saving to an

equivalent circuit to the USB

equivalent circuit data file.

storage?

3-9

ZA57630

3.2 Information Messages
Table 3-6 Operation Messages (Continued)
No.
6152

Message

Description

Are you sure you want to save theThis is a confirmation for saving to a

PZT constant to the USB storage?

piezoelectric constant file.

Are you sure you want to save theThis is a confirmation for saving to amarker value to the USB storage?

marker information file.

Are you sure you want to measure theConfirm start of correction data

<dist> data?

measurement.

Are you sure you want to reset theThis is a confirmation for resetting thecurrent settings?

settings.

Do you want to execute the "TOUCH

This is a confirmation for starting touch

ADJUST"?

panel position adjustment.

Are you sure you want to initialize all

This is a confirmation for initializing to thethe current settings?

factory default state.

7171

USB connected.

A USB memory device has been connected.

7172

USB disconnected.

A USB memory device has been

6153
6154
7168
7169
7170

disconnected.
7173

Are you sure you want off the Power?

This is a confirmation for turning off thepower (standby).

7174

Do you want to save the LOG FILE

This is a confirmation for outputting a log

for system inspection to the USB

file.

storage?
<dist>:The save destination is indicated as “memory No.X” (where X is a number from 1 to20) in the case of internal memory of this instrument, and “USB storage” in thecase of a USB memory device.

<dist1>: This is indicated as one of “MEAS TRACE,” “REF TRACE,” “Equalize correction
memory,” “Open correction memory,” “Short correction memory,” and “Loadcorrection memory” depending on the save destination.
<file>:The load source is indicated as “memory No.X” (where X is a number from 1 to 20)
in the case of internal memory of this instrument, and a file name in the case of a
USB memory device.

3-10

ZA57630

3.3 Troubleshooting

3.3 Troubleshooting
If you suspect a problem, check the following list for a solution at once. If the problem is not
resolved or remains unchanged after applying the suggested remedy, contact us or our agent.
Table 3-7 In Case of Suspected Anomaly
Description

Possible Cause

Power cannot be

Bad power cord

turned on.

connection.

RemedySecurely plug in the power cord.

The power source is

Use a commercial power supply that is withinout of the rated range.

the rated range.

External noise or

Use this instrument in a location withanother factor issuitable conditions.

causing misoperation.
The internal

Use this instrument in an environment

temperature of thiswithin the operating temperature andinstrument has

humidity ranges (0 to +40 °C and 5 tobecome high.

85 %RH).
If an abnormal temperature is detected, thepower supply is automatically shutdown toprevent destruction.

Panel operations

Remote control is

Tap the [LOCAL] button.

are not possible.

enabled.

In the local lock-out state, this operation isdisabled. Use the external controller tore-enable local control.

Measurement is not

The trigger source

Check the trigger source setting. For

possible (trigger issetting is not

example, to start measurement by remote

not applied).

appropriate.

control (USB, RS-232, GPIB, or LAN), set[Measure]－[TRIGGER SOURCE] to
REMOTE. The START UP, SPOT, and
DOWN keys on the front panel do not work at
this time.

This instrument

Setting initialization

Many descriptions presume settings havedoes not operate as

has not be executed.

been initialized. Select [Other]－[RESET] anddescribed in the
instruction manual.

then tap [OK].
The measurement

Refer to “3.5.1 Mode Menu” in Instruction

mode is incorrect.

Manual (Basics) and then set themeasurement mode correctly.

3-11

ZA57630

3.3 Troubleshooting
Table 3-7 In Case of Suspected Anomaly (Continued)
Description

Possible Cause

RemedyAn error occurs

Measurement

Use this instrument in a location withduringaccuracy hassuitable conditions.

self-calibration.

deteriorated due tothe influence of
external noise.
The CALIBRATION

Connect the CALIBRATION BOX to the

BOX (accessory) is not

HCUR , HPOT, and LCUR connectors on the front

connected.

panel. For details, refer to “1.8.1
Self-Calibration”.

3-12

ZA57630

3.3 Troubleshooting
Table 3-7 In Case of Suspected Anomaly (Continued)
Description

Possible Cause

RemedyThere are large

The measurement

Reduce the measurement speed to within thevariations inspeed is too fast.

allowable range.

measurement

The signal amplitude

Increase the signal amplitude.

values.

is too small.
Measurement starts

Make the measurement delay time longer.

before the signal

When the large variations are only

settles.

immediately after a sweep starts, increase
the measurement start delay time.
Perform measurement after the contacts with
the DUT stabilize and the signal settles.

There is noise<Electrostatic induction> When measuring

interference.

high impedance, sufficiently shield the signal
wires from electrostatic induction; inparticular, the low side. If the signal wires
are exposed, this instrument will be affectedby peripheral potential variations.
Furthermore, ground the enclosure andperipheral conductors.
<Electromagnetic induction> Route theconnection cables so that a large loop is notformed.

Contact with the DUT

Clean the contacts.

is unstable.
Measurement signals

Display the voltage and current levels andbecome small due tothen check the magnitude of the signal.

the measurement

If the DUT is discharged to the measurement

signal source being

connectors, the measurement signal source,

damaged or thevoltage detector, and current detector may beconnection cable being

damaged.

defective.

Check the cables for disconnection andshorting between the core wires and outerconductor.

3-13

ZA57630

3.3 Troubleshooting
Table 3-7 In Case of Suspected Anomaly (Continued)
Description

Possible Cause

RemedyMeasured values

Abnormal correction

Try turning off all of the correction functions,significantly differ

values are set.

including the open, short, load, and port

from the expected

extension correction functions. Check thevalues,frequency range for correction. Measure or
set the correction values again.

measurement is not

Measurement

Set the frequency and signal amplitude to thepossible,conditions are

specified values. The measured values may

incorrect.

vary significantly with the measurement

orconditions depending on the DUT.
Fixed to an

Switch the range setting to an appropriate

correction values

inappropriate

measurement range or change the range

cannot be measured.

measurement range.

setting to the auto range setting.

A cable connected to

Check the cables for conductivity, shortingthe DUT or the

between the core wire and outer conductor,

contacts are defective.

and dirt on the connecting points.

The low side of the

In the IMPD−3T measurement mode, do not

DUT is grounded orconnect the connectors of the DUT to thethe DUT is grounded

ground. The same applies for thewith low impedance

measurement of correction values.

(when measuring in

When measuring a grounded DUT, use thisthe IMPD−3T

instrument in the IMPD−2T or IMPD−EXT

measurement mode).

measurement mode.

There is noise

When measuring high impedance, such as ininterference. Exposed

open correction, shield the signal wires fromsignal wires (inelectrostatic induction or perform theparticular, the low

measurement away from noise sources.

side) and a part with

Ground the enclosure and peripheral

extreme potential

conductors. If the signal amplitude is small orvariations are near

the frequency is high, there is likely to beeach other.

interference.

3-14

ZA57630

3.3 Troubleshooting
Table 3-7 In Case of Suspected Anomaly (Continued)
Description

Possible Cause

RemedyMeasurement is

A long measurement

Reduce the measurement time so that theslow.

time is set.

variations in measurement results are within
the allowable range. However, a time lessthan the time equivalent to one 1 cycle of themeasurement frequency is not possible.

A long delay time is

Check the measurement delay time andset.

measurement start delay time, and set themto the minimum necessary values.

The measurement

When measuring a large number of DUTs

range is set to autowith almost the same value using spot

range.

measurement, set the range setting to a fixed

The measurement

range.

range is switchedfrequently due tonoise or a contact
failure.
ALC is operating.

Revise the ALC settings (increase theMeasurement[TOLERANCE] value and reduce thevariations are large[RETRY TIMES] value).

and many

Set ALC to OFF if it is not necessary.

measurements are
performed before thesignal amplitudesettles.
An automatic highRevise the automatic high density sweep

density sweep issetting (increase the [VARIATION] value).

operating.

Set automatic high density sweep to OFF if it
is not necessary.

The internal

Use this instrument in an environment

temperature of thiswithin the operating temperature andinstrument has

humidity ranges (0 to +40 °C and 5 tobecome high.

85 %RH).
If an abnormal temperature is detected, this
instrument operates with the operation clock
value automatically decreased to reduce
self-heating. Therefore, measurement
becomes slow.

3-15

ZA57630

3.3 Troubleshooting(Blank)3-16

ZA57630

4. Maintenance

4.1

Preface ................................................................................ 4-2

4.2

Daily Maintenance ............................................................... 4-3

4.3

Storage, Repacking, and Transportation ............................. 4-3

4.4

Checking the Version Number............................................. 4-4

4.5

Performance Test ................................................................ 4-5

4.5.1 Outline ............................................................................ 4-5
4.5.2 Measurement Signal Frequency Accuracy ..................... 4-7
4.5.3 Measurement Signal Amplitude Accuracy ...................... 4-8
4.5.4 Measurement Signal Amplitude
Frequency Characteristic .............................................. 4-9
4.5.5 DC Bias Voltage Accuracy (HCUR, Normal DC Bias) ..... 4-11
4.5.6 DC Bias Voltage Accuracy (HCUR, HV DC Bias)............ 4-12
4.5.7 DC Bias Voltage Accuracy (PORT3, Normal DC Bias) . 4-13
4.5.8 DC Bias Voltage Accuracy (PORT3, HV DC Bias) ....... 4-14
4.5.9 DC Bias Voltage Accuracy (DC BIAS, Normal DC Bias)4-15
4.5.10 Impedance Measurement Accuracy(Measurement Mode IMPD−3T) ................................. 4-16
4.5.11 Impedance Measurement Accuracy(Measurement Mode IMPD−2T) ................................. 4-20
4.5.12 Gain and Phase Measurement Accuracy(Measurement Mode G−PH) ...................................... 4-23
4.5.13 Analysis Section Dynamic Range(Measurement Mode G−PH) ...................................... 4-24
4.6

Calibration ......................................................................... 4-25

4-1

ZA57630

4.1 Preface

4.1 Preface
This chapter describes the following topics.
・ Precautions and storage method when the product is not used for a long period oftime.
・ Precautions for repacking and transportation when the product is transported.
・ Performance test necessary when, for example, performing preventive maintenanceand verifying performance during acceptance inspection and after repair.
For the basic operation checks, refer to “2.4 Simple Operation Check” in Instruction Manual(Basics).
This manual describes basic operation checking and performance testing procedures.
For advanced inspection, adjustment, calibration, or failure repair, contact NF Corporation or
its authorized agent.
！ WARNING

There are high voltage parts inside this instrument. Never remove the cover.
Even when the inside of this product needs to be inspected, do not touch the inside. All suchinspections are to be performed by service technicians designated by NF Corporation.

4-2

ZA57630

4.2 Daily Maintenance

4.2 Daily MaintenanceInstall this instrument in a location that satisfies the installation conditions.
For details on the installation conditions, refer to “2.2.2 Installation Conditions” in Instruction
Manual (Basics).
The front panel of this instrument is made of plastic. Avoid damage from contact with sharpor hot objects.
When the panel or case needs cleaning, wipe with a soft cloth. To remove persistentcontamination, wipe with a soft cloth soaked with neutral detergent and wrung out. Neveruse any organic solvents like thinner or benzene or a chemical cleaning cloth, as they may
cause the surface finish to deteriorate or peel off.
When the surface of the LCD touch panel becomes dirty, wipe it with absorbent cotton or asoft cloth. Avoid using detergents, organic solvents, etc., as they may cause deterioration or
tarnishing.

4.3 Storage, Repacking, and Transportation● Storage when not used for a long period of time・ Disconnect the power cord from the outlet and this instrument.
・ Store the product in a location free from falling objects and dust, such as a shelf or
rack.
If dust may be present, cover the product with a cloth or polyethylene cover.
・ The environmental conditions for storage are −10 °C to +50 °C and 5 % to 95 %RH.
However, avoid a location where the temperature fluctuates significantly or where theproduct will be exposed to direct sunlight, and store the product in an environment as
close to room temperature as possible.
● Repacking and transportation
When repacking the product to transport or send it for repairs, pay attention to the following
instructions.
・ If this instrument has moving parts, fix them in place.
・ Wrap this instrument in a polyethylene bag or sheet.
・ Prepare a carton box that can well withstand the weight of this instrument and is of alarge enough size to accommodate it.
・ Fill the carton box with a cushioning material so that the top, bottom, and four sidesof the main unit can be protected.
・ When making a request for transportation, inform the transport operator that the
product is a precision instrument.

4-3

ZA57630

4.4 Checking the Version Number

4.4 Checking the Version Number
Instruments of the same model may have different versions due to functional improvements
and fault repairs. Behavior can differ according to version, so if an anomaly is detected,
provide us with the version information along with the symptoms.
Our website provides guidance for updating the firmware.
After startup, the version information can be confirmed by the following procedure.
Open [Other]－[SYSTEM] and then check the firmware version. The number below “VERSION”
is the version.

4-4

ZA57630

4.5 Performance Test

4.5 Performance Test
4.5.1 Outline
A performance test is performed as part of preventative maintenance to prevent performance
deterioration of this instrument.
A performance test is conducted when necessary to verify performance during acceptanceinspection, periodic inspection and after repair.
The simple performance test described here is performed using commercially available
standards and measurement instruments.
For advanced testing, ask NF Corporation or its authorized agent. We conduct tests for a fee.
If the specifications are not satisfied after a performance test, calibration or repair is required.
Contact NF Corporation or its authorized agent.
1) Test environment confirmation
Conduct performance testing in the following environment.
・ Ambient temperature

23 ±5 °C・ Ambient humidity

20 to 70 %RH, non-condensing

・ Power outlet voltage

AC100 to 230 V ±10 % however 250 V or less・ Warm-up time

At least 30 minutes2) Test preparation
Before conducting a performance test, reset the settings. Reset the settings in [Other]－[RESET]. For details, refer to “■ Resetting settings” of “4.2.1 Common Operations” in Instruction
Manual (Basics).

4-5

ZA57630

4.5 Performance Test
3) Required equipment
The following measurement equipment is required for operation inspection and performance
testing.
Name

Required Capability

Frequency counter

Accuracy ±1 ppm or better

Digital multimeterAC voltage (true rms)
(70 mV to 3 V)
Accuracy ±0.2 % (1 kHz)Accuracy ±1.0 % (100 kHz)DC voltage
Accuracy ±0.1 % (100 mV to 40 V)

Wideband digital
multimeterAC voltage (true rms)
(70 mV to 3 V)
Accuracy ±2.0 % (100 kHz to 20 MHz)
Accuracy ±6.0 % (20 MHz to 30 MHz)
Accuracy ±10.0 % (30 MHz to 36 MHz)

Standard impedance(BNC 4-terminal)

10 Ω，100 Ω，1 kΩ，10 kΩ，100 kΩ，1 MΩ，
short standard, open standard
Standard resistor should be calibrated under the actual test
conditions.

Standard impedance(N connector)

50 Ω, short standard, open standard
Standard resistor should be calibrated under the actual test
conditions.

OthersBNC−BNC coaxial cable 50 Ω, RG-58A/U, 1 m

1

BNC 50 Ω terminating resistor (power rating 0.25 W or higher)
1
BNC−banana adapter

1

BNC short plug

1

N(m)−BNC(f) adapter

1

CALIBRATION BOX (accessory)

1

4-6

ZA57630

4.5 Performance Test

4.5.2 Measurement Signal Frequency Accuracy
Before performing each of the following measurements, reset the settings of this instrument.
Instrument settings: Set the measurement mode to IMPD−EXT,
measurement signal frequency to 1.0 MHz, and AC
amplitude to 1.0 Vrms.

Measurement instrument settings : Use a frequency counter. Set the gate time to 10
seconds.
Connections: Connect OSC / HCUR of this instrument to thefrequency counter with a coaxial cable.

Measurement method: Read the measured value on the frequency counter.

ZA57630
Frequency counter
OSC
HCUR

BNC−BNC coaxial cableComparison
Pass range:

0.999990 MHz to 1.000010 MHz

Measured value: _ . _ _ _ _ _ _ MHz

4-7

ZA57630

4.5 Performance Test

4.5.3 Measurement Signal Amplitude Accuracy
Instrument settings: Set the measurement mode to IMPD−EXT and thefrequency to 1 kHz.

Measurement instrument settings : Set the digital multimeter to the AC voltage mode
(true rms).
Connections: Connect OSC / HCUR of this instrument to the digital
multimeter with a coaxial cable.

Measurement method: Set the AC amplitude of this instrument to 70
mVrms, 1 Vrms, and 3 Vrms and read the AC voltage
with the digital multimeter.
Calculate the amplitude accuracy with thefollowing formula from the read AC voltage values.

Amplitude accuracy (dB)
AC voltage measurement value Vrms
 20  log10
Measurement signal amplitudesetting Vrms
ZA57630
DMM
OSC
HCUR

BNC−BNCcoaxial cable

BNC−banana
adapterComparison
Measurement
sigunalamplitude setting

AC voltage
measurement value

Amplitude accuracy

Pass range

70 mVrms_ _. _ _ mVrms_ _._ _ dB−0.30 to +0.30 dB

1 Vrms_. _ _ _ Vrms

_ _._ _ dB−0.30 to +0.30 dB

3 Vrms_ _. _ _ Vrms

_ _._ _ dB−0.30 to +0.30 dB

4-8

ZA57630

4.5 Performance Test

4.5.4 Measurement Signal Amplitude Frequency Characteristic
Instrument settings: Set the measurement mode to IMPD−EXT,
frequency to 1 kHz, and AC amplitude to 70 mVrms.

Measurement instrument settings : Set the digital multimeter and wideband digital
multimeter to the AC voltage mode (true rms).
Connections: Connect OSC / HCUR of this instrument to the digital
multimeter with a coaxial cable via a BNC 50 Ω
terminating resistor.

Measurement method: Set the frequency of this instrument to 1 kHz,
100 kHz, 1 MHz, 15 MHz, 30 MHz, and 36 MHz.
Read the AC voltage values with the digital
multimeter for 100 kHz or less and with the
wideband digital multimeter for 1 kHz and 1 MHz or
more.
Calculate the amplitude frequency characteristicwith the formula below from the read AC voltage
values using the AC voltage measurement value
at 1 kHz of each of the digital multimeter andwideband digital multimeter as the reference.

AC amplitude frequency characteristic (dB)
AC voltage measurement value
at each frequency Vrms
 20  log10
AC voltage measurement value
at1kHz Vrms
Set the AC amplitude to 1 Vrms and 10 Vrms andcalculate the frequency amplitude characteristic
using the AC voltage measurement value at 1 kHz
as the reference in the same way.
DMM
ZA57630

1 kHz
100 kHzOSC
HCUR

BNC−banana adapter
Wideband digital multimeter

BNC−BNCcoaxial cable

1 kHz
1 MHz
：
36 MHz

BNC 50 Ω terminating resistor*1*1 A 50 Ω terminating resistor is not necessary if the input impedance of the wideband
digital multimeter is 50 Ω.

4-9

ZA57630

4.5 Performance Test

Comparison(Digital multimeter)
Measurement
signalFrequency
amplitude
settingsetting
70 mVrms
1 Vrms3 VrmsAC voltage
measurementvalue

AC amplitude
frequency
characteristic

Pass range

1 kHz_ _. _ _ mVrms

0.00 dB(Reference)

100 kHz_ _. _ _ mVrms_ _._ _ dB−0.30 to +0.30 dB

1 kHz_. _ _ _ Vrms

0.00 dB(Reference)

100 kHz_. _ _ _ Vrms

_ _._ _ dB−0.30 to +0.30 dB

1 kHz_ _. _ _ Vrms

0.00 dB(Reference)

100 kHz_ _. _ _ Vrms

_ _._ _ dB−0.30 to +0.30 dB

AC amplitude
frequency
characteristic

Pass range(Wideband digital multimeter)
Measurement
AC voltage
signalFrequency
measurement
amplitude
settingvalue
setting
70 mVrms

1 Vrms3 Vrms1 kHz_ _. _ _ mVrms

0.00 dB(Reference)

1 MHz_ _. _ _ mVrms_ _._ dB

−0.5 to +0.5 dB

15 MHz_ _. _ _ mVrms_ _._ dB

−1.0 to +1.0 dB

30 MHz_ _. _ _ mVrms_ _._ dB

−3.0 to +3.0 dB

36 MHz_ _. _ _ mVrms_ _._ dB

−4.0 to +4.0 dB

1 kHz_. _ _ _ Vrms

0.00 dB(Reference)

1 MHz_. _ _ _ Vrms

_ _._ dB

−0.5 to +0.5 dB

15 MHz_. _ _ _ Vrms

_ _._ dB

−1.0 to +1.0 dB

30 MHz_. _ _ _ Vrms

_ _._ dB

−3.0 to +3.0 dB

36 MHz_. _ _ _ Vrms

_ _._ dB

−4.0 to +4.0 dB

1 kHz_ _. _ _ Vrms

0.00 dB(Reference)

1 MHz_ _. _ _ Vrms

_ _._ dB

−0.5 to +0.5 dB

15 MHz_ _. _ _ Vrms

_ _._ dB

−1.0 to +1.0 dB

30 MHz_ _. _ _ Vrms

_ _._ dB

−3.0 to +3.0 dB

36 MHz_ _. _ _ Vrms

_ _._ dB

−4.0 to +4.0 dB

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ZA57630

4.5 Performance Test

4.5.5 DC Bias Voltage Accuracy (HCUR, Normal DC Bias)
Instrument settings: Set the measurement mode to IMPD−EXT and AC
amplitude to 0 Vrms.

Measurement instrument settings : Set the digital multimeter to DC voltage mode.
Connections: Connect OSC / HCUR of this instrument to the digital
multimeter with a coaxial cable.

Measurement method: Set the DC bias of this instrument to −5.0 V, 0.0 V,
and +5.0 V and read the DC voltage with the digital
multimeter.

ZA57630
DMM
OSC
HCUR

BNC−BNCcoaxial cable

BNC−banana
adapterComparison
DC bias setting

DC voltage value

Pass range−5.0 V− _. _ _ _ V−5.080 to −4.920 V

0.0 V_ _ _ . _ mV

−30.0 to +30.0 mV+5.0 V+ _. _ _ _ V+4.920 to +5.080 V

4-11

ZA57630

4.5 Performance Test

4.5.6 DC Bias Voltage Accuracy (HCUR, HV DC Bias)
Instrument settings: Set the measurement mode to IMPD−3T, AC
amplitude to 0 Vrms, and HV bias to ON.

Measurement instrument settings : Set the digital multimeter to DC voltage mode.
Connections: Connect OSC / HCUR of this instrument to the digital
multimeter with a coaxial cable.

Measurement method: Set the DC bias of this instrument to −40.0 V, 0.0 V,
and +40.0 V and read the DC voltage with thedigital multimeter.

ZA57630
DMM
OSC
HCUR

BNC−BNCcoaxial cable

BNC−banana
adapterComparison
DC bias setting

DC voltage value

Pass range−40.0 V− _ _. _ _ _ V−40.430 to −39.570 V

0.0 V_ _ _ . _ mV

−30.0 to +30.0 mV+40.0 V+__.___V+39.570 to +40.430 V

4-12

ZA57630

4.5 Performance Test

4.5.7 DC Bias Voltage Accuracy (PORT3, Normal DC Bias)
Instrument settings: Set the measurement mode to IMPD−2T and AC
amplitude to 0 Vrms.

Measurement instrument settings : Set the digital multimeter to DC voltage mode.
Connections: Connect PORT3 of this instrument to the digital
multimeter with a coaxial cable.

Measurement method: Set the DC bias of this instrument to −5.0 V, 0.0 V,
and +5.0 V and read the DC voltage with the digital
multimeter.

ZA57630
DMM
PORT3

N−BNC
adapter

BNC−BNCcoaxial cable

BNC−banana
adapterComparison
DC bias setting

DC voltage value

Pass range−5.0 V− _. _ _ _ V−5.080 to −4.920 V

0.0 V_ _ _ . _ mV

−30.0 to +30.0 mV+5.0 V+_.___V+4.920 to +5.080 V

4-13

ZA57630

4.5 Performance Test

4.5.8 DC Bias Voltage Accuracy (PORT3, HV DC Bias)
Instrument settings: Set the measurement mode to IMPD−2T, AC
amplitude to 0 Vrms, and HV bias to ON.

Measurement instrument settings : Set the digital multimeter to DC voltage mode.
Connections: Connect PORT3 of this instrument to the digital
multimeter with a coaxial cable.

Measurement method: Set the DC bias of this instrument to −40.0 V, 0.0 V,
and +40.0 V and read the DC voltage with thedigital multimeter.

ZA57630DMM
PORT3N-BNC adapter

BNC-BNCcoaxial cable

BNC-banana
adapterComparison
DC bias setting

DC voltage value

Pass range−40.0 V− _ _. _ _ _ V−40.430 to −39.570 V

0.0 V_ _ _ . _ mV

−30.0 to +30.0 mV+40.0 V+__.___V+39.570 to +40.430 V

4-14

ZA57630

4.5 Performance Test

4.5.9 DC Bias Voltage Accuracy (DC BIAS, Normal DC Bias)
Instrument settings: Set the measurement mode to IMPD−EXT, AC
amplitude to 0 Vrms, and DC bias output to DC
BIAS on the rear panel.

Measurement instrument settings : Set the digital multimeter to DC voltage mode.
Connections: Connect DC BIAS of this instrument to the digital
multimeter with a coaxial cable.

Measurement method: Set the DC bias of this instrument to −5.0 V, 0.0 V,
and +5.0 V and read the DC voltage with the digital
multimeter.

Rear panel of ZA57630
DMM
DC BIAS

BNC−BNCcoaxial cable

BNC−banana
adapterComparison
DC bias setting

DC voltage value

Pass range−5.0 V− _. _ _ _ V−5.080 to −4.920 V

0.0 V_ _ _ . _ mV

−30.0 to +30.0 mV+5.0 V+ _. _ _ _ V+4.920 to +5.080 V

4-15

ZA57630

4.5 Performance Test

4.5.10 Impedance Measurement Accuracy (Measurement Mode IMPD−3T)
This section describes a simple check method. For an accurate test, ask NF Corporation to
perform the test.
Standard: To perform an accurate test, prepare a standard that has an accuracy ofapproximately 1/3 or less in respect to the accuracy of this instrument.
If a standard is not available, prepare a stable standard DUT that has beencalibrated with an accurate measuring instrument. Perform the test inaccordance with the accuracy and stability of the prepared standard.
A pseudo-capacity standard using a transformer cannot be used with this
instrument.
Reference: If the frequency characteristics are good (within the range of around 10 Ω to
100 kΩ), you can even use a resistor whose impedance calibration value is notprovided at each frequency to perform a simple test using the following
calculation formula.
・ Calibration value RDC of DC resistance・ Equivalent series inductance LS [H] at 1 MHz or equivalent parallel
capacitance CP [F]．
． RDC−j ω CP(RDC)2
Complex impedance Z = RDC + j ω LS or Z =1+(ω CP RDC)2．
|Z| =RDC2＋(ω LS)2．
ω LS
θ(＝∠Z) = tan−1()
RDC．
or |Z| =orRDC
1＋(ω CP RDC)2

θ = −tan−1(ω CP RDC)

Here, angular frequency ω = 2f and f is the measurement frequency [Hz].
Instrument settings: Set the measurement mode to IMPD−3T, AC
amplitude to 1 Vrms, and measurement speed to 0.2 s.

Connections: Connect the standard to HCUR / HPOT / LPOT / LCUR ofthis instrument.

Measurement method: Perform open correction and short correction.
Then, measure the standard in accordance withthe table below.

ZA57630

LCUR

HCUR

Standard

4-16

ZA57630

4.5 Performance Test
Comparison: The measurement value is normal if it is within thefollowing range.
Calibration value of standard ± (calibration
accuracy of standard + accuracy specifications of
ZA57630)

The specification values in the following table are calculated considering the calibration
values of the standard as being equal to the nominal values, and are rounded to 2 significant
digits. Insufficient calibration accuracy of standard may allow the difference to get out ofrange of the specification.

Measurement
rangeStandard(nominal
value)

1 MΩ

1 MΩ

100 kΩ

100 kΩ

10 kΩ

10 kΩ

1 kΩ

1 kΩ

100 Ω

100 Ω

10 Ω

10 Ω

Measurement frequency 1 kHz, signal amplitude 1 Vrms
Difference
Calibration value
Measured value
100×(B−A)/A Specificationof standard
B
A
B−A
Z _._ _ _ _ MΩ
θ _ _._ _ _ °Z _ _ _._ _ kΩ

Z _._ _ _ _ MΩ
θ _ _._ _ _ °Z _ _ _._ _ kΩ

Z _ _._ _ %θ _ _._ _ °Z _ _._ _ %Z ± 1.5 %θ ± 0.87 °Z ± 0.30 %θ _ _._ _ _ °Z _ _._ _ _ kΩ

θ _ _._ _ _ °Z _ _._ _ _ kΩ

θ _ _._ _ °Z _ _._ _ %θ ± 0.17 °Z ± 0.15 %θ _ _._ _ _ °Z _._ _ _ _ kΩ

θ _ _._ _ _ °Z _._ _ _ _ kΩ

θ _ _._ _ _ °Z _ _._ _ %θ ± 0.086 °Z ± 0.10 %

θ
Z
θ
Z
θ

θ
Z
θ
Z
θ

θ
Z
θ
Z
θ

θ ± 0.058 °Z ± 0.15 %θ ± 0.086 °Z ± 0.50 %θ ± 0.29 °_ _._ _ _ °_ _ _._ _ Ω_ _._ _ _ °_ _._ _ _ Ω_ _._ _ _ °4-17_ _._ _ _ °_ _ _._ _ Ω_ _._ _ _ °_ _._ _ _ Ω_ _._ _ _ °_ _._ _ _ °_ _._ _ %_ _._ _ _ °_ _._ _ %_ _._ _ °ZA57630

4.5 Performance Test

Measurement
rangeStandard(nominal
value)

1 MΩ

1 MΩ

100 kΩ

100 kΩ

10 kΩ

10 kΩ

1 kΩ

1 kΩ

100 Ω

100 Ω

10 Ω

10 Ω

Measurement
rangeStandard(nominal
value)

10 kΩ

10 kΩ

1 kΩ

1 kΩ

100 Ω

100 Ω

10 Ω

10 Ω

Measurement
rangeStandard(nominal
value)

100 Ω

100 Ω

Measurement frequency 10 kHz, signal amplitude 1 Vrms
Calibration
Difference
value ofMeasured value 100×(B−A)/A
Specification
standard
B
B−A
A
Z _._ _ _ _ MΩ Z _._ _ _ _ MΩ Z _ _._ _ %Z ± 0.81 %θ _ _._ _ _ °θ _ _._ _ _ °θ _ _._ _ °θ ± 0.46 °Z _ _ _._ _ kΩ
Z _ _ _._ _ kΩ
Z _ _._ _ %Z ± 0.25 %θ _ _._ _ _ °Z _ _._ _ _ kΩ

θ _ _._ _ _ °Z _ _._ _ _ kΩ

θ _ _._ _ °Z _ _._ _ %θ ± 0.14 °Z ± 0.14 %θ _ _._ _ _ °Z _._ _ _ _ kΩ

θ _ _._ _ _ °Z _._ _ _ _ kΩ

θ _ _._ _ _ °Z _ _._ _ _ %θ ± 0.080 °Z ± 0.092 %

θ
Z
θ
Z
θ

θ
Z
θ
Z
θ

θ
Z
θ
Z
θ

θ ± 0.053 °Z ± 0.080 %θ ± 0.046 °Z ± 0.50 %θ ± 0.29 °_ _._ _ _ °_ _ _._ _ Ω_ _._ _ _ °_ _._ _ _ Ω_ _._ _ _ °_ _._ _ _ °_ _ _._ _ Ω_ _._ _ _ °_ _._ _ _ Ω_ _._ _ _ °_ _._ _ _ °_ _._ _ _ %_ _._ _ _ °_ _._ _ %_ _._ _ °Measurement frequency 1 MHz, signal amplitude 1 Vrms
Difference
Calibration value
Measured value
100×(B−A)/A Specificationof standard
BA
B−A
Z _ _._ _ _ kΩ
Z _ _._ _ _ kΩ
Z _ _._ _ %Z ± 0.20 %θ _ _._ _ _ °θ _ _._ _ _ °θ _ _._ _ °θ ± 0.12 °Z _._ _ _ _ kΩ
Z _._ _ _ _ kΩ
Z _ _._ _ %Z ± 0.15 %θ _ _._ _ _ °θ _ _._ _ _ °θ _ _._ _ _ °θ ± 0.087 °Z _ _ _._ _ Ω
Z _ _ _._ _ Ω
Z _ _._ _ %Z ± 0.17 %θ _ _._ _ _ °θ _ _._ _ _ °θ _ _._ _ _ °θ ± 0.097 °Z _ _._ _ _ Ω
Z _ _._ _ _ Ω
Z _ _._ _ %Z ± 0.60 %θ

_ _._ _ _ °θ

_ _._ _ _ °θ

_ _._ _ °

θ ± 0.34 °Measurement frequency 10 MHz, signal amplitude 1 Vrms
Difference
Calibration value
Measured value
100×(B−A)/A Specificationof standard
BA
B−A
Z _ _ _._ _ Ω
Z _ _ _._ _ Ω
Z _ _._ _ %Z ± 0.50 %θ _ _._ _ _ °θ _ _._ _ _ °θ _ _._ _ °θ ± 0.29 °4-18

ZA57630

4.5 Performance Test

Measurement
rangeStandard(nominal
value)

1 kΩ

1 kΩ

100 Ω

100 Ω

Measurement
rangeStandard(nominal
value)

1 kΩ

1 kΩ

100 Ω

100 Ω

Measurement
rangeStandard(nominal
value)

1 kΩ

1 kΩ

100 Ω

100 Ω

Measurement
rangeStandard(nominal
value)

1 kΩ

1 kΩ

100 Ω

100 Ω

Measurement frequency 1 kHz, signal amplitude 0.1 Vrms
Difference
Calibration value
Measured value
100×(B−A)/A Specificationof standard
B
A
B−A
Z _._ _ _ _ kΩ
Z _._ _ _ _ kΩ
Z _ _._ _ %Z ± 0.26 %θ _ _._ _ _ °θ _ _._ _ _ °θ _ _._ _ °θ ± 0.15 °Z _ _ _._ _ Ω
Z _ _ _._ _ Ω
Z _ _._ _ %Z ± 0.27 %θ

_ _._ _ _ °θ

_ _._ _ _ °θ

_ _._ _ °

θ ± 0.15 °Measurement frequency 1 MHz, signal amplitude 0.1 Vrms
Difference
Calibration value
Measured value
100×(B−A)/A Specificationof standard
B
A
B−A
Z _._ _ _ _ kΩ
Z _._ _ _ _ kΩ
Z _ _._ _ %Z ± 0.68 %θ _ _._ _ _ °Z _ _ _._ _ Ω

θ _ _._ _ _ °Z _ _ _._ _ Ω

θ _ _._ _ °Z _ _._ _ %θ ± 0.39 °Z ± 0.68 %

θ

θ

θ

θ ± 0.39 °_ _._ _ _ °_ _._ _ _ °_ _._ _ °Measurement frequency 1 kHz, signal amplitude 3 Vrms
Difference
Calibration value
Measured value
100×(B−A)/Aof standard
Specification
B
A
B−A
Z _._ _ _ _ kΩ
Z _._ _ _ _ kΩ
Z _ _._ _ %Z ± 0.36 %θ _ _._ _ _ °Z _ _ _._ _ Ω

θ _ _._ _ _ °Z _ _ _._ _ Ω

θ _ _._ _ °Z _ _._ _ %θ ± 0.20 °Z ± 0.60 %

θ

θ

θ

θ ± 0.34 °_ _._ _ _ °_ _._ _ _ °_ _._ _ °Measurement frequency 1 MHz, signal amplitude 3 Vrms
Difference
Calibration value
Measured value
100×(B−A)/A Specificationof standard
B
A
B−A
Z _._ _ _ _ kΩ
Z _._ _ _ _ kΩ
Z _ _._ _ %Z ± 0.61 %θ _ _._ _ _ °Z _ _ _._ _ Ω

θ _ _._ _ _ °Z _ _ _._ _ Ω

θ _ _._ _ °Z _ _._ _ %θ ± 0.35 °Z ± 0.68 %

θ

θ

θ

θ ± 0.39 °_ _._ _ _ °4-19_ _._ _ _ °_ _._ _ °ZA57630

4.5 Performance Test

4.5.11 Impedance Measurement Accuracy (Measurement Mode IMPD−2T)This section describes a simple check method. For an accurate test, ask NF Corporation to
perform the test.
Standard: To perform an accurate test, prepare a standard that has an accuracy ofapproximately 1/3 or less in respect to the accuracy of this instrument.
If a standard is not available, prepare a stable standard DUT that has beencalibrated with an accurate measuring instrument. Perform the test inaccordance with the accuracy and stability of the prepared standard.
Instrument settings: Set the measurement mode to IMPD−2T, AC
amplitude to 1 Vrms, and measurement speed to 0.2 s.

Connections: Connect the standard to PORT3 of this instrument.

Measurement method: Perform open correction and short correction.
Then, measure the standard.

ZA57630PORT3Standard
Comparison: The measurement value is normal if it is within thefollowing range.
Calibration value of standard ± (calibration accuracyof standard + accuracy specifications of ZA57630)

The specification values in the following table are calculated considering the calibration
values of the standard as being equal to the nominal values, and are rounded to 2 significant
digits. Insufficient calibration accuracy of standard may allow the difference to get out ofrange of the specification.
Measurement
rangeStandard(nominal
value)

1 kΩ

50 Ω

100 Ω

50 Ω

Measurement frequency 10 kHz, signal amplitude 1 Vrms
Difference
Calibration value
Measured
100×(B−A)/A
Specificationof standard
value
A
B
B−A
Z _ _ _._ _ Ω
Z _ _ _._ _ ΩZ_ _._ _ %Z ± 0.34 %θ _ _._ _ _ °Z _ _ _._ _ Ω

θ _ _._ _ _ °Z _ _ _._ _ ΩθZ_ _._ _ °_ _._ _ %

θ ± 0.19 °Z ± 0.34 %

θ

θ

θ

_ _._ _ °

θ ± 0.20 °_ _._ _ _ °_ _._ _ _ °The specifications when the measurement range is 1 kΩ is a supplemental value
because it is out of the recommended range.

4-20

ZA57630

4.5 Performance Test

Measurement
rangeStandard(nominal
value)

1 kΩ

50 Ω

100 Ω

50 Ω

Measurement frequency 1 MHz, signal amplitude 1 Vrms
Difference
Calibration value
Measured
100×(B−A)/Aof standard
value
Specification
A
B
B−A
Z _ _ _._ _ Ω
Z _ _ _._ _ ΩZ_ _._ _ %Z ± 0.38 %θ _ _._ _ _ °Z _ _ _._ _ Ω

θ _ _._ _ _ °Z _ _ _._ _ ΩθZ_ _._ _ °_ _._ _ %

θ ± 0.22 °Z ± 0.36 %

θ

θ

θ

_ _._ _ °

θ ± 0.21 °_ _._ _ _ °_ _._ _ _ °The specifications when the measurement range is 1 kΩ is a supplemental value
because it is out of the recommended range.

Measurement
rangeStandard(nominal
value)

1 kΩ

50 Ω

100 Ω

50 Ω

Measurement frequency 10 MHz, signal amplitude 1 Vrms
Difference
Calibration value
Measured
100×(B−A)/A
Specificationof standard
value
A
B
B−A
Z _ _ _._ _ Ω
Z _ _ _._ _ ΩZ_ _._ %
Z ± 1.5 %θ _ _._ _ _ °θ _ _._ _ _ °θ
_ _._ _ °
θ ± 0.85 °Z _ _ _._ _ Ω
Z _ _ _._ _ ΩZ_ _._ %
Z ± 1.6 %θ

_ _._ _ _ °θ

_ _._ _ _ °θ

_ _._ _ °

θ ± 0.91 °The specifications when the measurement range is 1 kΩ is a supplemental value
because it is out of the recommended range.

Measurement
rangeStandard(nominal
value)

100 Ω

50 Ω

Measurement
rangeStandard(nominal
value)

100 Ω

50 Ω

Measurement frequency 30 MHz, signal amplitude 1 Vrms
Difference
Calibration value
Measured
100×(B−A)/Aof standard
value
Specification
A
B
B−A
Z _ _ _._ _ Ω
Z _ _ _._ _ ΩZ_ _._ %
Z ± 4.5 %θ _ _._ _ _ °θ _ _._ _ _ °θ
_ _._ °
θ ± 2.6 °Measurement frequency 36 MHz, signal amplitude 1 Vrms
Difference
Specification
Calibration value
Measured
100×(B−A)/A(supplemenof standard
value
tary value)A
B
B−A
Z _ _ _._ _ Ω
θ _ _._ _ _ °4-21

Z _ _ _._ _ Ω
θ _ _._ _ _ °Zθ

_ _._ %
_ _._ °

Z ± 4.6 %θ ± 2.7 °ZA57630

4.5 Performance Test

Measurement
rangeStandard(nominal
value)

100 Ω

50 Ω

Measurement
rangeStandard(nominal
value)

100 Ω

50 Ω

Measurement
rangeStandard(nominal
value)

100 Ω

50 Ω

Measurement
rangeStandard(nominal
value)

100 Ω

50 Ω

Measurement frequency 10 kHz, signal amplitude 0.1 Vrms
Difference
Calibration value
MeasuredSpecification
100×(B−A)/A (supplementaryof standard
value
A
B
value)B−A
Z _ _ _._ _ Ω

Z _ _ _._ _ Ω

Z _ _._ _ %Z ± 0.44 %

θ

θ

θ

θ ± 0.25 °_ _._ _ _ °_ _._ _ _ °_ _._ _ °Measurement frequency 1 MHz, signal amplitude 0.1 Vrms
Difference
Calibration value
MeasuredSpecification
100×(B−A)/A (supplementaryof standard
value
A
B
value)B−A
Z _ _ _._ _ Ω

Z _ _ _._ _ Ω

Z _ _._ _ %Z ± 0.58 %

θ

θ

θ

θ ± 0.33 °_ _._ _ _ °_ _._ _ _ °_ _._ _ °Measurement frequency 10 kHz, signal amplitude 3 Vrms
Difference
Calibration value
MeasuredSpecification
100×(B−A)/A (supplementaryof standard
value
value)AB
B−A
Z _ _ _._ _ Ω
θ _ _._ _ _ °Z _ _ _._ _ Ω
θ _ _._ _ _ °Z _ _._ _ %θ _ _._ _ °Z ± 0.75 %θ ± 0.43 °Measurement frequency 1 MHz, signal amplitude 3 Vrms
Difference
Calibration value
MeasuredSpecification
100×(B−A)/A (supplementaryof standard
value
value)AB
B−A
Z _ _ _._ _ Ω
θ _ _._ _ _ °4-22

Z _ _ _._ _ Ω
θ _ _._ _ _ °Z _ _._ _ %θ _ _._ _ °Z ± 0.79 %θ ± 0.46 °ZA57630

4.5 Performance Test

4.5.12 Gain and Phase Measurement Accuracy (Measurement Mode G−PH)
Instrument settings: Set the measurement mode to G−PH, AC amplitude
to 1 Vrms, measurement range fixed to 1 Vrms forboth PORT1 and PORT2, frequency sweep range to
100 Hz to 36 MHz, and measurement speed to 100
ms.

Measuring instrument connections : (None)
Connections: Connect the included CALIBRATION BOX to OSC /PORT1 / PORT2.

Measurement method: Perform a frequency up-sweep and then read each of
the maximum and minimum values at 1 MHz or less,
10 MHz or less, and 36 MHz or less of themeasurement values (gain dB and phase °)displayed on the LCD screen.

ZA57630

PORT2 OSCCALIBRATION BOX(accessory)
Comparison
Frequency range

Measured value(Minimum) _ _. _ _ _100 Hz < f ≦1 MHz

to (maximum) _ _. _ _ _ dB
(Minimum) _ _. _ _ to (maximum) _ _. _ _ °(Minimum) _ _. _ _ _1 MHz < f ≦10 MHz

to (maximum) _ _. _ _ _ dB
(Minimum) _ _. _ _ to (maximum) _ _. _ _ °(Minimum) _ _. _ _10 MHz < f ≦36 MHz

to (maximum) _ _. _ _ dB
(Minimum) _ _. _ _ to (maximum) _ _. _ _ °4-23

Pass range−0.01 to +0.01 dB−0.06 to +0.06°−0.03 to +0.03 dB−0.18 to +0.18°−0.1 to +0.1 dB−0.6 to 6°

ZA57630

4.5 Performance Test

4.5.13 Analysis Section Dynamic Range (Measurement Mode G−PH)
Instrument settings: Set the measurement mode to G−PH, AC amplitude
to 3 Vrms, frequency sweep range to 10 Hz to 36
MHz, and measurement speed to 40.0 s.

Measuring instrument connections : (None)
Connections: Connect the BNC short plug to PORT1.
Connect OSC to PORT2.

Measurement method: Perform frequency up-sweep measurement with this
instrument and then read the gain maximum values
for the ranges of 10 Hz to less than 1 MHz, 1 MHz toless than 10 MHz, and 10 MHz to 36 MHz from thegraph on the LCD, and record the values with thepolarity reversed.
When measurement is finished, change theconnections to those for PORT2 dynamic range
measurement. Perform frequency up-sweep
measurement and read and record the gain minimum
value at each frequency range from the LCD screen.

ZA57630

ZA57630

PORT1
PORT2 OSC

BNC−BNCcoaxial cable

PORT1
PORT2 OSC

BNC short plug
Connections for dynamic
range measurement of PORT2

Connections for dynamic
range measurement of PORT1
Comparison
Connection
PORT1
Dynamic range

Connection
PORT2
Dynamic range

Frequency range− (Maximum
measured value)

Pass range*1

10 Hz ≦f < 1 MHz_ _ _. _ dB

110 dB or higher

1 MHz ≦f < 10 MHz_ _ _. _ dB

60 dB or higher

10 MHz ≦f ≦36 MHz_ _ _. _ dB

50 dB or higher

Frequency range

Minimum
measured value

Pass range*1

10 Hz ≦f < 1 MHz_ _ _. _ dB

110 dB or higher

1 MHz ≦f < 10 MHz_ _ _. _ dB

60 dB or higher

10 MHz ≦f ≦36 MHz_ _ _. _ dB

50 dB or higher*1: This value may not be satisfied due to the effects of electromagnetic noise in theenvironment or other such factors, but determine the test to be a pass if most of thedata resulting from sweep measurement satisfies this value.
4-24

ZA57630

4.6 Calibration

4.6 Calibration
If the performance test results do not satisfy the specifications, NF Corporation will perform
adjustment or calibration to restore the original performance.
If calibration is required, contact NF Corporation or its authorized agent.
After warranty expiration, we provide adjustment and calibration for a fee.

4-25

ZA57630

(Blank)

4-26

ZA57630WABUN: (DA00070168-001)

If there are any misplaced or missing pages, we will replace the manual.
Contact the sales representative.

NOTES
 Reproduction of the contents of this manual is forbidden by applicable laws.
 The contents of this manual may be revised without notice.
 Information provided in this manual is intended to be accurate and reliable. However,
we assume no responsibility for any damage regarding the contents of this manual.
 We assume no responsibility for influences resulting from the operations in thismanual.

Copyright 2019, NF Corporation

ZA57630 INSTRUCTION MANUAL (ADVANCED)NF Corporation
6-3-20, Tsunashima Higashi, Kohoku-ku, Yokohama
223-8508 JAPAN
Phone +81-45-545-8128 Fax +81-45-545-8187

http://www.nfcorp.co.jp/

NF Corporation
6-3-20, Tsunashima Higashi, Kohoku-ku, Yokohama 223-8508 JAPAN