Datasheet

SE50A-OIP FT-IR Ingot Oi Profiler
For Interstitial Oxygen ingot Oi Profiler
Systems Engineering combines the Thermo Fisher Scientific′s FT-IR measurement
technology and to introduce a next generation "FT-IR SE50-ECO series" as silicon ingot
material characterization tools.

Operation Software

Application Specifications

Interstitial Oxygen in Silicon ingot
Range：0.3 to 35 ppmAPrecision ：STD0.08 ppmA
：3000 mm
：1 mm：±0.5 mm
：Automatic detection of upper shoulder
position of ingot.			 F ind ingot shoulder any ingot blocks. Upto 10 blocks.
Ingot stage ingot support ：Automatic switching height of 202 and302 mm by measuring recipe.
Measurement length
Minimum pitch
Position Accuracy
Ingot Sensing

DIMENSION, UTILITY AND ENVIROMENTAL
Dimension：4 800w x 1515d x 1822h mm without
EMO and signal light.		
PC rack is 659w x 600d x 1480h mm

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Intuitive Graphical User Interface
Easy-to-Use operator and Authorizedengineer user levels
Easy to learn and use, giving optimum
efficiency
Measurement result,display and data logging.

Made in Japan

Specifications
RELIABILITY
MTBF> 3 months
MTTR
48 hours
MTTS4 hours
Uptime> 97%
Computer Specifications
Operation
SystemWindows 10 64bit
Memory 32GB
Hard Disk SSD RAID1

OPTICAL
7800 - 350cm-1
0.5cm-1
Standard 8mm(Variable)
15°

Spectral Range
Spectral Resolution
Beam Diameter
Analysis Angle

FACILITY REQUREMENTS
100 - 240VPower(50/60Hz)-61±10kPa (G)House Vacuum
30L/min (ANG)
Pressurized
0.52 - 0.6Mpa (G)CDA
Gas
30L/min (ANR)
0.2MPa (G)N2
15L/min (ANR)

SE50 Product Line
Hardware

SoftwareProduct#Model

Wafer size

StationHandring

Product#

Model

ECO-02S

SE50S-ECO

2-12 inch

Stage

Edge Grip

ECO-1EP

Epitaxial ThicknessECO-031

SE50A-ECO_150SS

2-6 inchSingleVacuum

ECO-1COCarbon & Oxygen in Silicon

ECO-032

SE50A-ECO_150DS

2-6 inchDoubleVacuum

ECO-1BP

Boron & Phosphorus in BPSG or PSG
Films

ECO-041

SE50A-ECO_200SS

4-8 inchSingleVacuum

ECO-1SN

Hydrogen in Silicon Nitride

ECO-042

SE50A-ECO_200DS

4-8 inchDoubleVacuum

ECO-1SF

Fluorine in Silicon Oxside Films

ECO-043D

SE50A-ECO_200DSMIF 8 inch

Double SMIF

Vacuum

ECO-1MB

Multi Background Option

Vacuum

ECO-1GM

GEM/SECS Host Communication

ECO-1SH

Share File Host Communication

ECO-1DS

Double Station Sorting Support

ECO-1FS

Four Station Sorting Support

ECO-1SSSix Station Sorting Support

ECO-1OH

Hydrogen in Silicon Software

ECO-1SCSiC Epitaxial Thickness Support

ECO-1SU

Shuttle Background Software

ECO-1CH

Carbon-doped Films

ECO-1SO

Silicon Oxiside Film Analysis (SiXx)

ECO-044

SE50A-ECO_200FS

4-8 inch

Four

ECO-051

SE50A-ECO_300SS

8-12 inch

SingleVacuum

ECO-052

SE50A-ECO_300DS

8-12 inch

DoubleVacuum

ECO-051F

SE50A-ECO_300SF

8-12 inch

Single Foup

Vacuum

ECO-052F

SE50A-ECO_300DF

8-12 inch

Double Foup

Vacuum

ECO-051E

SE50A-ECO_300SSE

12 inchSingleEdge Grip

ECO-052E

SE50A-ECO_300DSE

12 inchDoubleEdge Grip

ECO-051FE

SE50A-ECO_300SFE

12 inchSingle Foup

Edge Grip

ECO-052FE

SE50A-ECO_300DFE

12 inchDouble Foup

Edge Grip

THZ-02

SE50A-THz_150DS

4-6 inchDoubleVacuum

THZ-04

SE50A-THz_150FS

4-6 inch

Four

VacuumProduct#Model

VacuumECO-FA1

200mm wafer adapter for FOUP system

ECO-FA2

Tag Reader for FOUP & SMIF system
・Keyence : BL600
・Omron : V640

ECO-FA3

E84 OHT Support for OHT COM module

ECO-FA4Safety Light Curtain for OHT

ECO-FA5

Sensing lonizer System

ECO-FA6

Water ID Reader Module

ECO-FA7

Optical FFU (Fan Filter Unit)

ECO-FA8

Share File Host Communication

THZ-06

SE50A-THz_150SiS

4-6 inch

Six

OptionHead Office: 1-4-12 Koishikawa Bunkyo-ku, Tokyo 112-0002 Japan		TEL +81-3-3868-2634 FAX +81-3-3868-2633

Factory: 3-5-8 Funado Itabashi-ku, Tokyo 174-0041 Japan

TEL +81-3-6279-8908 FAX +81-3-6279-8907

West Branch: Miyahara Yodogawa-ku Oosaka-shi, Oosaka 532-0003 Japan		TEL +81-6-6868-9790 FAX +81-6-6868-9796

Made in Japan*The appearance and specifications described in this brochure are subject to change without notice for improvement purposes. 20240807