LCR METER

ZM2376
Instruction Manual (Basics)

NF Corporation

DA00042208-005

LCR METER

ZM2376
Instruction Manual (Basics)

Registered Trademarks
National Instruments and LabVIEW are registered trademarks of National Instruments
Corporation in the United States.
Other company names and product names used in this Instruction Manual may be trademarks orregistered trademarks of respective companies.
ｆPreface
Thank you very much for purchasing our “ZM2376 LCR METER”.
Please read, first of all, "Safety Precautions" on the follawing pages, to use the instrument in thecorrect and safe manner.
 Caution Symbols Used in This Manual
The following caution symbols are used in this manual. Be sure to observe these caution symbols andtheir contents to ensure the safety of the user and avoid damage to the equipment.
！ WARNING
Equipment handling could result in death or serious injury. This symbol contains
information to avoid such risk.

！ CAUTION
Equipment handling could result in minor or moderate injury or property damage. Thissymbol contains information to avoid such risk.

 The scope of this ManualThis manual describes the ZM2376 with the firmware version 1.00 or more and CE Marking.
Please make sure the CE marking on the rear panel.
Please watch the version that appears at the power-on.

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ZM2376

Preface The following instruction manuals are provided for ZM2376.


ZM2376 Instruction Manual (Basics)
This manual describes basic items such as how to operate ZM2376 from the panel,specifications, and maintenance.



ZM2376 Instruction Manual (Remote Control)
This manual describes how to remote control ZM2376.
It includes the description of standard commands (ZM2376 primary commands).



ZM2376 Instruction Manual (Alternative Commands)
This manual describes the alternative commands of ZM2376.
If you find the alternative commands easier to use than the standard commands, you can use
them. However, the alternative command provides limited functions.

 This manual (Basics) has the following chapters.
If using this equipment for the first time, start from Chapter 1.
1. OUTLINEThis chapter describes the overview, specificities, applications, functions and simple principle ofoperations of this product.
2. PREPARATIONS BEFORE USE
This chapter describes important preparation before installation and operation.
3. PANEL FEATURES AND BASIC OPERATIONSThis chapter describes the functions and basic operations available for each panel screen part.
Read while operation the instrument.
4. ADVANCED OPERATIONSThis chapter describes even further the instrument operation.
5. TROUBLESHOOTINGThis chapter describes how to deal with error messages and troubles.
6. MAINTENANCE
This chapter describes storage, repacking transportation as well as performance testing.
7. SPECIFICATIONThis chapter describes the product’s specifications (functions and performance).

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ZM2376

Safety Precautions———— Safety Precautions ————
To ensure safe use, be sure to observe the following warnings and cautions.
NF Corporation shall not be held liable for damages that arise from a failure to observe these warnings
and cautions.
This product is a Class I product (with protective conductor terminal) that conforms to the IEC insulation
standards.

 Be sure to observe the contents of instruction manual.
This instruction manual contains information for the safe operation and use of this product.
Be sure to read this information first before using this product.
All the warning items contained in this instruction manual are intended for preventing risks
that may lead to serious accidents. Ensure to obey them.

 Be sure to ground the product.
This product uses a line filter, which may cause electric shock if the product is not
grounded.
To prevent electric shock accidents, connect it to an earth ground so that ground resistanceis 100Ω or less.

 Check the power supply voltage.
This product operates on the power supply voltage indicated in “Grounding and Power
Supply Connection” in this instruction manual.
Prior to connecting the power supply, check that the voltage of the power outlet matches
the rated power supply of the product.

 In case of suspected anomaly
If this product emits smoke, an abnormal smell, or abnormal noise, immediately power it
off and stop using it.
If such an abnormal occurs, prevent anyone from using this product until it has been
repaired, and immediately report the problem to NF Corporation or one of ourrepresentatives.

 Do not use this product when gas is present.
An explosion or other such hazard may result.

 Do not remove the cover.
This product contains high-voltage parts. Absolutely never remove its cover.
Even when the inside of this product needs to be inspected, do not touch the inside. Allsuch inspections are to be performed by service technicians designated by NF Corporation.

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ZM2376

Safety Precautions

 Do not modify this product.
Never modify or try to modify the instrument. Your modification of the instrument could
cause unexpected accidents or failures. NF Corporation has the right to refuse providing
services for any instruments modified by unauthorized persons.


Do not expose this product to water.
When this product is used in wet condition, it may cause an electric shock and a fire. If
this product is exposed to water, unplug the power cord immediately, and contact NF
Corporation or one of our representatives.



If lightning occurs, power off this product and unplug the power cord.
A lightning may cause an electric shock, a fire and a failure.

 Safety-related symbols
The general definitions of the safety-related symbols used on this product and in the
instruction manual are provided below.

！

Instruction Manual Reference SymbolThis symbol is displayed to alert the user to potential danger and refer him/herto the instruction manual.

！ WARNING

Warning SymbolThis symbol indicates information for the avoidance of a hazard such as electric
shock that may endanger human life or cause injury during handling of theequipment.

！

Caution SymbolThis symbol indicates information for the avoidance of damage to theequipment during handling.

CAUTION Other Symbols
This symbol indicates the “on” position of the power switch.
This symbol indicates the “off” position of the power switch.
Shows when connected to the housing.

———— Electromagnetic Compatibility ————
This product may cause interference if used in residential areas. Such use must be avoided unless theuser takes special measures to reduce electromagnetic emissions to prevent interference to the receptionof radio and television broadcasts.

———— Request about disposal ————
To protect the environment, ensure that this device is disposed of by an appropriate industrial waste
processor. This product does not use batteries or a backlight that contains mercury.

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Table of Contents
Page

1． OUTLINE··························································································1-1
1.1
1.2
1.3
1.4

Features ··································································································· 1-2
Applications ······························································································· 1-3
List of Functions ························································································· 1-4
Principle of Operation ·················································································· 1-5

2． PREPARATIONS BEFORE USE ···························································2-1
2.1
2.2

Checking Before Use ·················································································· 2-2
Installation································································································· 2-6
2.2.1 General Precautions for Installation ····························································· 2-6
2.2.2 Installation Conditions ·············································································· 2-6
2.2.3 Rack Mounting ························································································ 2-7
2.3 Grounding and Power Supply Connection ····················································· 2-12
2.4 Simplified Operation Check ········································································ 2-13
2.5 Calibration······························································································· 2-14

3． PANEL FEATURES AND BASIC OPERATIONS ·······································3-1
3.1
3.2

Panel Component Names and Functions ························································· 3-2
Display at Power “ON” and Initial Settings ······················································· 3-4
3.2.1 Check before Power “ON” ········································································· 3-4
3.2.2 Displays and Indications at Power “ON”························································ 3-5
3.2.3 Initialization ···························································································· 3-6
3.3 Operation Tree ························································································· 3-13
3.4 Connection of DUT ··················································································· 3-17
3.4.1 Measurement Terminals ········································································· 3-17
3.4.2 Connection to DUT ················································································ 3-18
3.4.3 Precautions on Connection ······································································ 3-19
3.5 Basic Operations ······················································································ 3-21
3.5.1 Outline of Measurement Screen ······························································· 3-21
3.5.2 Basic Key Operations ············································································· 3-22
3.5.3 Simplified Operating Method When You Use Instrument for the First Time ········· 3-25
3.5.4 Initialization ·························································································· 3-29
3.5.5 Setting of Measurement Parameters ·························································· 3-30
3.5.5.1 Selection of Primary Parameters ································································ 3-30
3.5.5.2 Setting of Equivalent Circuit······································································· 3-32
3.5.5.3 Setting of Secondary Parameters ······························································· 3-33

3.5.6 Setting of Basic Measurement Conditions ··················································· 3-35
3.5.6.1
3.5.6.2
3.5.6.3
3.5.6.4
3.5.6.5
3.5.6.6
3.5.6.7
3.5.6.8
3.5.6.9

Measurement Frequency ·········································································· 3-35
Measurement Signal Level ········································································ 3-36
Measurement range················································································· 3-37
Trigger ·································································································· 3-43
Measurement speed ················································································ 3-48
Correction of Measurement Error································································ 3-51
OPEN Correction ···················································································· 3-53
SHORT Correction ·················································································· 3-59
LOAD Correction····················································································· 3-63v

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3.5.6.10 Cable Length Correction ··········································································· 3-73

4． ADVANCED OPERATIONS··································································4-1
4.1
4.2
4.3
4.4
4.5
4.6
4.7
4.8
4.9
4.10
4.11
4.12
4.13
4.14
4.15
4.16
4.17
4.18

Measuring with Specific Voltage or Current (ALC) ············································· 4-2
Restricting the Variation of Measured Value (Averaging) ···································· 4-6
Displaying the Deviation from the Reference Value ··········································· 4-7
Sorting the Part (Comparator) ····································································· 4-10
Connecting to the Part handler (Handler Interface) ·········································· 4-20
Measuring with More Than One Condition (Multi-measurement) ························ 4-30
Changing the Contents Displayed on the Second Line of Measurement Screen(Auxiliary Display) ····················································································· 4-37
Saving/Recalling the Setting and Correction Value into the Memory ···················· 4-39
Setting the Contact Check ·········································································· 4-41
Applying the DC Bias Voltage ····································································· 4-44
Applying the DC Bias Current······································································ 4-51
Disabling the Key-Operation of Panel ··························································· 4-54
Changing the Settling Wait Time During Automatic Adjustment ·························· 4-55
Initializing of All Settings ············································································ 4-56
Self-Diagnosis ························································································· 4-59
Checking the Version ················································································ 4-60
Remote Control ························································································ 4-61
Switching the Operation Mode (alternative command) ······································ 4-62

5． TROUBLESHOOTING ········································································5-1
5.1

Error Message ··························································································· 5-2
5.1.1 Errors at Power ON·················································································· 5-3
5.1.2 Errors at Panel Operation ·········································································· 5-4
5.1.3 Errors During Measurement ······································································· 5-5
5.1.4 Measured Value Display in Case of Error······················································ 5-6
5.2 When the Device Appears to be a Problem ······················································ 5-8

6． MAINTENANCE ·················································································6-1
6.1
6.2
6.3
6.4
6.5
6.6

Preface····································································································· 6-2
Daily Maintenance ······················································································ 6-3
Storage, Repacking, and Transportation ························································· 6-3
Checking Version Number ············································································ 6-3
Checking Isolation ······················································································ 6-4
Performance Testing ··················································································· 6-4
6.6.1 Measurement Frequency Accuracy ····························································· 6-5
6.6.2 Measurement Signal Level Accuracy ··························································· 6-5
6.6.3 Voltage Monitor Accuracy·········································································· 6-6
6.6.4 DC Bias Voltage Accuracy········································································· 6-7
6.6.5 AC Impedance Measurement Accuracy ························································ 6-8
6.6.6 DC Resistance Measurement Accuracy······················································ 6-13
6.7 Calibration······························································································· 6-15

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7． SPECIFICATION ················································································7-1
7.1
7.2

Specification ······························································································ 7-2
External Dimensions ················································································· 7-17

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Attached figures and tables
Page
Figure 1-1

Block Diagram ······················································································· 1-5

Figure 2-1

Rack-mount assembly (mm-rack) ······························································ 2-8

Figure 2-2

Rack-mount assembly (inch-rack) ····························································· 2-9

Figure 2-3

Size and dimensions of the rack-mount (mm-rack) ······································2-10

Figure 2-4

Size and dimensions of the rack-mount (inch-rack) ······································2-11

Figure 3-1

Front panel ··························································································· 3-2

Figure 3-2

Rear panel ··························································································· 3-3

Figure 3-3

Functions of measurement terminals ························································3-17

Figure 3-4

Connection to DUT················································································3-18

Figure 3-5

Capacitance to measurement signal level characteristics ······························3-39

Figure 3-6

Measurement sequence ·········································································3-43

Figure 3-7

Signal acquisition time ···········································································3-49

Figure 3-8

Terminal processing at OPEN correction ···················································3-54

Figure 3-9

Terminal processing at SHORT correction ·················································3-60

Figure 3-10 Connection circuit network for LOAD correction ··········································3-63
Figure 3-11 Measurement of LOAD standard value ······················································3-70
Figure 3-12 Measurement of LOAD correction value ····················································3-71

Figure 4-1

Maximum capacitance measurable at constant voltage (typical value) ·············· 4-5

Figure 4-2

Inductance range measurable at constant voltage (typical value) ····················· 4-5

Figure 4–3

Output of comparator result ····································································4-11

Figure 4–4

Range setting and comparison when sorting into bins ··································4-16

Figure 4–5

Equivalent circuit of handler interface ························································4-23

Figure 4–6

Handler interface operation timing ····························································4-24

Figure 4–7

Dummy output timing ·············································································4-29

Figure 4-8

Handler interface operation timing in the multi-measurement ·························4-35

Figure 4-9

Example of external voltage bias circuit ·····················································4-49

Figure 4-10 Example of external current bias circuit ·····················································4-51

Figure 7-1

Range of error ······················································································7-11

Figure 7-2

LC - Z conversion graph ·········································································7-12

Figure 7-3

ZM2376 external dimensions ··································································7-17viii

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Table 2-1

Package contents ·················································································· 2-2

Table 3-1

Setting items and initial values ·································································· 3-7

Table 3-2

Measurement range list ··········································································3-37

Table 3-3

Max. current, max. voltage, and output impedancein each measurement range ····································································3-39

Table 3-4

Example of measurement time (typical value) ·············································3-48

Table 4-1

Display format of measured value and interpretation of setting value(example of L) ······················································································4-14

Table 4–2

Initialization contents of comparator ··························································4-14

Table 4–3

Handler interface signal layout ·································································4-20

Table 4–4

Functions of handler interface signal ·························································4-21

Table 4-5

Handler interface output in the multi-measurement ······································4-34

Table 5-1

When the device appears to be a problem ·················································5-11

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1． OUTLINE

1． OUTLINE ......................................................................... 1-1
1.1 Features ........................................................................... 1-2
1.2 Applications...................................................................... 1-4
1.3 List of Functions ............................................................... 1-5
1.4 Principle of Operation ....................................................... 1-6

1-1

ZM2376

1.1 Features

1.1 Features
The “ZM2376 LCR Meter” is a high speed LCR meter with the maximum frequency 5.5MHz andmaximum signal level 5V. It has high basic accuracy of 0.08% and is capable of measuring the impedance
in a wide application range from manufacturing and inspection lines of electronic parts up to the researchof materials.

 Measurement frequency 1mHz to 5.5MHz
The instrument has the maximum 6-digit resolution and thus it is capable of measuring the detailed
frequency characteristics of the DUT (Device Under Test).
 Signal level 10mV to 5V / Maximum current 200mA
It is capable of measuring the characteristics of DUT in a wide signal level range.
 Constant voltage / Constant current drive
It can make evaluation on stable signal level even for the DUT of which characteristics vary withthe signal level.
 High speed measurement
It provides high speed measurement at the fastest 2ms (1kHz - 1MHz) or 10ms (120Hz).
 Cable length 0m / 1m / 2m / 4m
Allowable length of connection cable to the DUT is maximum 4m. However, it is limited by thefrequency.
 Triggered drive
A signal is output after the instrument contacted the DUT, thus reducing the contact damage whenhigh capacitance capacitor is measured. Also, this feature reduces measurement dispersion of the
DUT having hysteresis characteristics.
 Contact check
A contact failure to DUT can be detected based on an abnormally low capacitance or abnormal
voltage/current signal, with little additional time required.
 Handler interface
The bin sorting results of maximum 14 categories can be output to the part handler.
 Remote control
The instrument is equipped with the USB, RS-232 (230.4kbps max), and GPIB interfaces asstandard, which is useful for installing it in production lines or measurement systems. A LAN
interface is also available optionally.

1-2

ZM2376

1.1 Features DC (Direct-current) resistance measurement
Direct-current resistance such as a winding resistance of inductor or transformer can be measured.
 Setting/correction value memory
32 sets of settings and correction values can be stored in nonvolatile memory, and they can be u sed
selectively.

1-3

ZM2376

1.2 Applications

1.2 Applications
 Inspection, sorting, and evaluation test in production lines of electronic parts
such as inductors, capacitors, and sensors.
 Evaluation and research of magnetic materials and dielectrics.
 Impedance measurement of batteries.

1-4

ZM2376

1.3 List of Functions

1.3 List of Functions
The following shows the functional tree of ZM2376.

1-5

ZM2376

1.4 Principle of Operation

1.4 Principle of Operation
The ZM2376 gives sine wave signal from an internal oscillator to the DUT (Device Under Test). The
impedance bridge detects the current I flowing in DUT and the voltage V applied to DUT, and then themain processor obtains the impedance Z (= V / I). The parameters such as inductance L, capacitance C,
resistance R, etc. are calculated from the impedance (magnitude, phase angle).

Panel
LCD Character Display,
Key & Lamp

USB
RS-232GPIB
LAN(Option)

Oscillator
Frequency
Synthesizer

Amplitude
Control

Main ProcessorPower
Amp HCUR

DC BiasHPOT
DC canceller

Isolator

HandlerInterface

DUT
V
signaldiff-AMP

A/D
R_range

LPOT

LCUR

I
signaldiff-AMP

Impedance
BridgeFigure 1-1 Block Diagram Main Processor
According to the user’s operation, the main processor controls the oscillator and impedance bridge tocalculate the vector ratio from the voltage signal and current signal obtained from the DUT. Then, themain processor makes necessary correction, and finally converts the data into the required parameterto be displayed or output.

1-6

ZM2376

1.4 Principle of Operation
 Oscillator
The oscillator generates sine wave signals having exact frequencies by means of a direct digitalfrequency synthetic method based on the reference clock of crystal oscillator.
When the Automatic Level Control (ALC) function is effective, the main processor adjusts
automatically the signal level so that the voltage and current monitored values become the specified
values.
 Impedance Bridge
The current flowing in the DUT is converted into the voltage by the range resistance and differential
amplifier. At this time, the potential of LCUR between LPOT terminals is maintained to almost zero byautomatic balancing motion of the bridge. Accordingly, the current that runs away to the groundthrough capacitance to earth and insulation resistance and is not detected can be reduced.
The voltage applied to the DUT is detected by the differential amplifier.
After that, the voltage signal and current signal are converted into digital values by the A/D converter,and sent to the main processor.

1-7

ZM2376

2． PREPARATIONS BEFORE USE

2． PREPARATIONS BEFORE USE ...................................... 2-1
2.1 Checking Before Use ......................................................... 2-2
2.2 Installation ......................................................................... 2-6
2.2.1 General Precautions for Installation ....................................... 2-6
2.2.2 Installation Conditions ............................................................ 2-6
2.2.3 Rack Mounting ....................................................................... 2-7

2.3 Grounding and Power Supply Connection ....................... 2-12
2.4 Simplified Operation Check ............................................. 2-13
2.5 Calibration ....................................................................... 2-14

2-1

ZM2376

2.1

2.1

Checking Before Use

Checking Before Use Safety check
To ensure the safety, refer to “Safety Precautions” described in the beginning of this instruction
manual before using ZM2376.
Before turning the power on, read “2.3 Grounding and Power Supply Connection” and observe
the necessary cautions.
 Unpacking
Check that the instrument has not been damaged during transit.
After unpacking, refer to “Table 2-1 Package contents” to check the contents.
Table 2-1 Package contents
ZM2376 Main Unit ························································· 1
Instruction Manual (Basics) ··············································· 1
CD-ROM (see the next page for the contents) ··························· 1Power Cord Set (3 Pole, 2 m) ············································· 1！

WARNING
This instrument contains high-voltage parts. Never remove the cover.
The internal parts of this instrument must only be serviced by an engineer who
has a thorough understanding of risk prevention.

2-2

ZM2376

2.1

Checking Before Use Contents of CD-ROM supplied•ZM2376 Instruction Manual (Remote Control)
This manual describes how to remote control ZM2376.
It includes the description of standard commands.
•ZM2376 Instruction Manual (Alternative Commands)
This manual describes the alternative commands of ZM2376.
•Application Software
Main settings of ZM2376, acquisition and display of measured data, measurement and setting
by sweeping the frequencies, and saving of measured data can be performed.
•IVI (Interchangeable Virtual Instrument) DriverThis driver handles the ZM2376 main commands and query. It can be used by various
programming languages. LabVIEW can use the IVI driver by importing and converting it tovi or llb.
•Sample Programs
Examples of controlling ZM2376 through various interfaces in various programming
languages such as C# and VB.NET are provided.
This section describes the outline. For detailed contents and handling method, refer to the
instructions stored in the CD-ROM.

2-3

ZM2376

2.1

Checking Before Use Signal cables
Since the signal cables are not supplied, please purchase commercially available cables. The cablespecifications are as follows.
•DUT connecting cable
Coaxial cable having BNC connector
To correct the cable length exactly, use a coaxial cable (capacitance about 105pF/m) of
characteristic impedance 50Ω.
•GPIB cable
Cable that conforms to the IEEE488.1 Standard.
•USB cable
Cable that conforms to the USB1.1 or USB2.0 Standard.
•RS-232 cable
Interlink cable with D-Sub 9 pins, female-female, inch screws, and shield.
The controllers other than general personal computers have different connector or signal
layout and may require a dedicated cable.
•LAN cable
CAT5 or higher (CAT3 or higher for 10BASE-T). Use a straight cable when connecting to a
hub or router which does not have the automatic cable recognition function, or use a cross
cable when connecting to a peer PC.

2-4

ZM2376

2.1

Checking Before Use Major relevant products
Since the test fixture and test lead are not supplied, please purchase them additionally. Major test
fixtures and test leads which can be used with ZM2376 are shown below.
Model
name
ZM23632324
2325AL2325AM
ZM2392
ZM2391
2326A

Product name
Test fixture
4-terminal alligator clip
test leads
Kelvin clip
test leads
Kelvin clip
test leads
Kelvin clip
test leads
3-terminal alligator clip
test leads
Chip component test lead

Supplemental noteFrequency range

For lead components
4-terminal connection------

DC - 10MHz

Large-sized clip
(replaceable clip)
Medium-sized clip
(replaceable clip)
Simple typeDC - 100kHz

Two signals, one shield

DC - 20kHz

DC - 100kHz

DC - 100kHz
DC - 20kHz

Tweezers typeDC - 1.2MHz
2-terminal connection
ZM2394Chip test fixture
For SMD & chip parts
DC - 2MHz
2-terminal connection
ZM2394H Chip test fixture
For SMD & chip parts
DC - 30MHz
2-terminal connection
The models connected to the DUT with two terminals are affected by the contact resistance and i ts
variations. For a measurement of about 50Ω or less, it is recommended to evaluate the variation of
measured value due to the contact resistance before using the test fixture.
The information given here is as of the preparation of this Instruction Manual. Relevant products are
subject to change, abolition, or addition without notice. Be sure to contact NF Corporation or one of
our representatives for confirmation when ordering them.

2-5

ZM2376

2.2

Installation

2.2

Installation

2.2.1

General Precautions for Installation！ CAUTION

Take the following precautions to prevent damage to ZM2376.
• ZM2376 is cooled by forced air-cooling.
Do not block the air inlet on both side panels and the air outlet on the rear
panel.
• ZM2376 must be installed horizontally (with the bottom panel facing the floor).
Using the instrument with the rear panel or side panel facing downward (in the
upright position) causes the instrument to be toppled down easily, leading to adanger.
 Handling of the panel and housing
The front panel of ZM2376 is made of plastic. It can be damaged by sharp or hot tools.
When the housing/panel surface needs cleaning, wipe with a soft cloth. To remove persistentcontamination, wipe with a soft cloth soaked with neutral detergent and wrung out. Do not use anyorganic solvents like thinner or benzene, or any chemical cleaning cloth, as they may cause thesurface finish to deteriorate, tarnish, or come off.

2.2.2

Installation Conditions

Install ZM2376 in a place that satisfies the following temperature and humidity conditions.
Operation

0 to +40°C, 5 to 85% RH (where absolute humidity is 1 to 25g/m 3, non-condensing)
Altitude:2000m or less

Storage-10 to +50°C, 5 to 95% RH (where absolute humidity is 1 to 29g/m 3, non-condensing)！ CAUTION

Do not install the instrument in locations such as:• Place exposed to direct sunlight, or place near a heat source.
• Environment with dust, salinity, or metallic powder.
• Environment with corrosive gas, moisture, or oil smoke.
• Place of frequent vibration.
• Place near an intense magnetic or electric field source.
• Place near a pulse noise source.
If the measurement accuracy is important, warm up the instrument for more than 30 minutes before
use. Ensure adequate distance between power cable of ZM2376 or other devices and signal cable.
Close distance between power cable and signal cable may cause measurement dispersions due to a
malfunction or noise.

2-6

ZM2376

2.2

Installation！ CAUTION

This product may cause interference if used in residential areas.

Such use must

be avoided unless the user takes special measures to reduce electromagnetic
emissions to prevent interference to the reception of radio and television
broadcasts.

2.2.3

Rack Mounting

ZM2376 can be mounted on a 19-inch IEC rack, an EIA specification rack or a JIS specification rackby the use of a rack-mount adapter (optional). The rack-mount adapter is provided for mm-rack andinch-rack.
First, mount the rack-mount adapter on the device as shown in “ Figure 2-1 Rack-mount assembly(mm-rack)” or “Figure 2-2 Rack-mount assembly (inch-rack)”, and then, mount the instrument on therack.
！

WARNING
When mounting the instrument on the rack, be sure to install rack rails to support
the ZM2376. Otherwise, ZM2376 may fall, causing a human injury.

！ CAUTION• When mounting the instrument on the rack, be sure to install rack rails to
support the ZM2376. Otherwise, ZM2376 may fall, causing a product damage.
• Make sure that the rack is sufficiently air-cooled by providing appropriate
ventilation ports or cooling fans.
• The air inlet of ZM2376 is provided on both side panels.
Ensure 20mm or more clearance between side panel and wall.
• The air outlet is provided on the rear panel.
Ensure 50mm or more clearance between rear panel and wall.
Higher ambient temperature than the specification or blocking the air inlet oroutlet may reduce the performance or damage the ZM2376.

2-7

ZM2376

Figure 2-1

2-8

Part nameM3 × 10

M3 × 06

Countersunk screw

Countersunk screw

Rack-mount R
Rack-mount L
Panel spacer

Q’ty.

Remove label on the side face of body.

CautionWhen mounting on the rack, install angles or shelf on the rack to support the body.
Do not hold the device by the rack-mount metal fittings only.
Do not use the removed feet, screws, and label.

Part No.

Remove four feet.

2.2
Installation

Rack-mount assembly (mm-rack)

ZM2376

Figure 2-2

2-9Part nameCountersunk screw

Rack-mount L

Rack-mount R

M3 × 10

Q’ty.

Remove label on the side face of body.

CautionWhen mounting on the rack, install angles or shelf on the rack to support the body.
Do not hold the device by the rack-mount metal fittings only.
Do not use the removed feet, screws, and label.

Part No.

Remove four feet.

2.2
Installation

Rack-mount assembly (inch-rack)

ZM2376

Surface treatment
Rack-mount adapter: Paint Ultra light gray (Munsell 6. OPB9. 2/0. 1)
CautionWhen mounting on the rack, do not hold only the rack-mount adapter.
Make sure that the rack uses L metal fittings or shelves to hold the body.

2.2

Figure 2-3
Installation

Size and dimensions of the rack-mount (mm-rack)

2-10

ZM2376

Surface treatment
Rack-mount adapter: Paint Ultra light gray (Munsell 6. OPB9. 2/0. 1)
CautionWhen mounting on the rack, do not hold only the rack-mount adapter.
Make sure that the rack uses L metal fittings or shelves to hold the body.

2.2

Figure 2-4
Installation

Size and dimensions of the rack-mount (inch-rack)

2-11

ZM2376

2.3

2.3

Grounding and Power Supply Connection

Grounding and Power Supply Connection

 Grounding！

WARNING
Take the following precautions to avoid risk of electric shock.
Before connecting the instrument for measurement, make sure the protective
grounding terminal is grounded.
The protective grounding terminal for ZM2376 is the grounding pin of thethree-pole power cord. Make sure you insert the power cord’s plug into athree-pole power outlet with a protective grounding contact.

 Power Supply！ CAUTION

Before connecting the power supply, make sure that the voltage of power outlet
is within the power voltage range of the specifications. Otherwise, ZM2376 may
be damaged.
ZM2376 operates the following commercial power supplies.
Power voltage range:

100 to 230VAC ±10%, but 250VAC or less.

Power frequency range:

50Hz/60Hz ±2Hz

Maximum power consumption is 75VA or less.
The power switch of ZM2376 is located on the rear panel.
Make sure that the power switch is set to OFF before connecting the power cord.
After powering off the instrument, be sure to wait for at least five seconds before powering on again.

！

WARNING
This instrument contains high-voltage parts. Never remove the cover.

！ CAUTION

The power cord which comes with the instrument is exclusively used with the
instrument only. Do not use this power cord for other equipment or purposes.

2-12

ZM2376

2.4

2.4

Simplified Operation Check

Simplified Operation Check

Before an important measurement or after a long unused time of instrument, it is recommended tocheck the ZM2376 operation by the following procedure. Check it within an application range.
1.

Plug the power cord in the AC outlet and turn on the power switch on the rear pan el.
Wait until the starting message disappears and the measurement screen is displayed.

2.

Initialize the settings.
Press the _SHIFT_ + [INIT] keys to display the initialize menu, and press the _1_ key.
(First press the _SHIFT_ key, and then press the _0_ | [INIT] key where INIT is written inupper place.)

3.

Connect the test fixture or test leads to the measurement terminal on the front panel.

4.

Attach the DUT to the test fixture or test leads.
Prepare the DUT of which value is known exactly every measurement range used. For 1k Ω
range, for instance, a value of about 1kΩ will be appropriate.

5.

Switch the measurement conditions, and check that the measurement can be performed
normally.
_FREQ_ key: Display the measurement frequency setting menu and set the frequency.

_LEVEL_ key: Display the measurement signal level setting menu and set the voltage.

– – Evaluation of measured result – –The measured value may vary depending on the connection method or whether OPEN andSHORT are corrected or not, and accordingly an error due to these factors should be taken into
consideration. Also, as the impedance of DUT itself may vary depending on the frequency orsignal level, the DUT’s characteristics should be checked in advance.
6.

Check the triggered drive timing (if used).
Press the _SHIFT_ + [TRIG MODE] keys to display the trigger setting menu, and press the_1_ key to set the trigger source to Manual.
Press the _SHIFT_ + [TRIG MODE] keys to display the trigger setting menu, and press the_5_ key to select S.Sync. Further, press the _1_ key to select ON, so as to make the triggered
drive valid, and then press the [EXIT] key to return to the measurement screen ([EXIT] key:
_ENTR_ | [EXIT] key where EXIT is written in lower place).
Attach the DUT to the test fixture, and observe the signal of the H terminal with an
oscilloscope.
Press the _TRIG_ key to check that the drive signal is output only at the measurement.

Thus, the simplified operation check is completed.
Finally, it is recommended to initialize the settings.

2-13

ZM2376

2.5

2.5

Calibration

Calibration

Ensure that ZM2376 undergoes the test described in “6.6 Performance Testing” at least once a
year, depending on the use environment and use frequency.
It is recommended to conduct a performance test before using it for an important measurement ortest.
If the performance test does not produce satisfying results, NF Corporation will make the necessary
adjustment or calibration to restore performance.
When the calibration or adjustment is necessary, please contact NF Corporation or one of ourrepresentatives.
You will be liable for the costs of calibration or adjustment.

2-14

ZM2376

3． PANEL FEATURES AND BASIC OPERATIONS

3．

PANELFEATURESANDBASICOPERATIONS ...................................... 3-1

3.1 Panel Component Names and Functions ........................... 3-2
3.2 Display at Power “ON” and Initial Settings ......................... 3-4
3.2.1 Check before Power “ON” .................................................... 3-4
3.2.2 Displays and Indications at Power “ON” ............................... 3-5
3.2.3 Initialization .......................................................................... 3-6

3.3 Operation Tree ................................................................ 3-11
3.4 Connection of DUT .......................................................... 3-15
3.4.1 Measurement Terminals ..................................................... 3-15
3.4.2 Connection to DUT ............................................................. 3-16
3.4.3 Precautions on Connection ................................................ 3-17

3.5 Basic Operations ............................................................. 3-19
3.5.1 Outline of Measurement Screen ......................................... 3-19
3.5.2 Basic Key Operations ......................................................... 3-20
3.5.3 Simplified Operating Method When You Use
Instrument for the First Time .............................................. 3-23
3.5.4 Initialization ........................................................................ 3-27
3.5.5 Setting of Measurement Parameters .................................. 3-28
3.5.5.1 Selection of Primary Parameters ............................ 3-28
3.5.5.2 Setting of Equivalent Circuit ................................... 3-30
3.5.5.3 Setting of Secondary Parameters ........................... 3-31
3.5.6 Setting of Basic Measurement Conditions .......................... 3-33
3.5.6.1 Measurement Frequency ........................................ 3-33
3.5.6.2 Measurement Signal Level ..................................... 3-34
3.5.6.3 Measurement range ............................................... 3-35
3.5.6.4 Trigger .................................................................... 3-41
3.5.6.5 Measurement speed ............................................... 3-46
3.5.6.6 Correction of Measurement Error ........................... 3-49
3.5.6.7 OPEN Correction .................................................... 3-52
3.5.6.8 SHORT Correction ................................................. 3-58
3.5.6.9 LOAD Correction .................................................... 3-62
3.5.6.10 Cable Length Correction ....................................... 3-74

3-1

ZM2376

3.1

3.1

Panel Component Names and Functions

Panel Component Names and Functions

This section describes the names and functions of the components on the front and rear panel of
ZM2376.
Register keys

Status indicator lamps

Correction

Each lamp is lit in the following case.
AUTO CKT: When the automatic selection ofequivalent circuit is enabled
COMPRTR: When the comparator is enabled
BUSY:
During measurement
CONTACT: When the contact check is enabled
CHECK
BIAS ON: During the DC bias voltage output
SOURCE: When the triggered drive is enabled
SYNC
KEY LOCK: When the key operation is disabled
REMOTE: During remote control

OPEN, SHORT, LOAD, CABLE

0 .. 9 Number•
Decimal point
Negative sign
EXP Exponential part
( p n µ m k M)
BS(Back Space)
ENTR(Enter)

Comparator/Handler interface
COMPRTR, Pri/Sec, NO LIMIT, HANDLER

Setting/correction value memory
SAVE, RECALLINIT
SYSTEM
CONTACT

Initialization
System setting
Contact check setting

Secondary function

Other operations<Secondary function>
CE(Clear Entry)

Tertiary function

Display

Status (2nd line)

40-character x 2-line LCD display.
1st line: Measured value (primary and secondary
parameters) and measurement frequency.
When the comparator is enabled, the comparison result
is also displayed.
(▲: > Upper limit, ▼: < Lower limit)
2nd line: Status, DC bias voltage,
measurement signal level.
The status can be switched to IV monitor, etc.
When detailed setting is made, the entire display isused for the setting menu.

RANGE: Auto / Hold and measurement
rangeSPEED: FAST / MED / SLOW, etc.
AVERAGE: Averaging count
TRIG SOURCE: INT / MAN / EXT, etc.
CORRECTION: Op (OPEN)
Sh (SHORT)
Ld (LOAD)(Cable length)
0m / 1m / 2m / 4m

It is connected tothe enclosure, andused to shield DUT.

Enables the secondary functions written above
each key.

LOCAL key
Restores local operation from remote state.
<Secondary function>
KEY LOCK: Disables key operations

Measurement Terminals

NEXT
EXIT

: Previous
page: Next page
: Close<Secondary function>∆Pri: Sets deviation
display
Sec: Selects secondary parameter ∆Sec: Sets deviation
display
CKT: Selects equivalent circuit
AUX DISP: Auxiliary display (status, etc. on 2nd line)
Pri: Selects primary parameter

Measurement conditions
setting keys

BNC connector comprising a set of 4-terminal-pair connected tothe device under test (DUT).
H CUR : Outputs signals to drive the DUT.
HPOT, LPOT: Measures the voltage applied to the DUT.
LCUR: Measures the current flowing in the DUT.
Connect all external conductors (shields) of 4 cables.

Figure 3-1

PREV

Display setting keys

SHIFT key

Measurement
ground terminal

In the setting
menu<Secondary function>
FREQ: Sets the frequency ··············· LIST: Sets multi-measurement
LEVEL: Sets signal level .................... ALC: Sets constant voltage / Constantcurrent
SPEED: Sets measurement speed ..... AVERAGE: Sets averaging
TRIG: Manual trigger .......................... TRIG MODE: Sets trigger mode
AUTO/HOLD: Range auto/manual
RANGE: Sets measurement range
BIAS: Sets DC bias

Front panel

3-2

ZM2376

3.1

Power switch

Panel Component Names and Functions

USBconnector

Handler interface connector

Power inlet

Push up to turnthe power on,
and push down toturn it off.

Certification label

Cooling fan
air outlet

GPIB
connectorLAN
connector(Optional)

RS-232connector

Nomenclature
plate
Attached whenthe LAN option
is included

Figure 3-2

Rear panel

3-3

ZM2376

3.2

3.2

Display at Power “ON” and Initial Settings

Display at Power “ON” and Initial Settings

3.2.1 Check before Power “ON”
ZM2376 operates the following commercial power supplies.
Power voltage range:

100 to 230VAC ±10%, but 250VAC or less.

Power frequency range:

50Hz/60Hz ±2Hz

The power consumption is 75VA or less.

！

WARNING
Take the following precautions to avoid accidents due to electric shock.
Before connecting the instrument for measurement, make sure the protective
grounding terminal is grounded.
The protective grounding terminal for ZM2376 is the grounding pin of thethree-pole power cord.
Make sure you insert the power cord’s plug into a three-pole power outlet with aprotective grounding contact.

！ CAUTION

Be sure to connect to the power outlet after checking that the power voltage iswithin the specified range for the ZM2376. Otherwise, ZM2376 may be damaged.
Make sure that the power switch is set to OFF before connecting the power cord.
After turning the power off, be sure to wait for at least 5 seconds before turning it on.

！ CAUTION

Wait at least 5 seconds between each power activation/deactivation.
Turning the power on and off in a very short span of time may cause the device
to not work properly.
Turn the power on according to the following procedure.
• Make sure that the power switch is OFF (turned downward).
• Connect the power cord to the power inlet at the back of the device.
• Insert the power cord’s plug to a three-pole power outlet.
• By switching the power switch upward the ZM2376 is turned on.
When the power switch is turned on, a starting message is displayed and then the device becomes
ready for measurement.
Display at launch “3.2.2 Displays and Indications at Power “ON” ”

3-4

ZM2376

3.2

Display at Power “ON” and Initial Settings

3.2.2 Displays and Indications at Power “ON”
Take necessary steps before instrument usage/operation according to “2. PREPARATIONSBEFORE USE”.
When the power switch is turned on, a test pattern is displayed, and then a starting message including
the model name and firmware version is displayed (see below).
Model nameExample: ZM2376
V1.00

2013/10/25 16:27

VersionLast adjustment date and timeAlso, all lamps light up. During this time, the self diagnosis is conducted. If an error is found, anerror message is displayed.
For details

 “5.1.1 Errors at Power ON’’

If a serious error is found, the device will no longer operate with an error message displayed.
When a setting or correction value has been lost, an error message is displayed but the parameter forwhich the error occurred is initialized and started. This error message can be reset by pressing any
key.
Initialization contents

 “3.2.3 Initialization”

The settings and correction values at the time when the power was turned off last are resumed unlessthe resume memory that saves last settings is normal.

3-5

ZM2376

3.2

Display at Power “ON” and Initial Settings

3.2.3 Initialization
ZM2376 is reset to the factory default settings in the following cases: At the time of shipment from factory
All settings and correction values including operation modes and memory contents are set to theinitial values.
 When full initialization of settings is specified
Except operation modes, the memory contents, settings, and correction values are reset to thefactory default settings.

 “4.14 Initializing of All Settings”
 At the power ON, if backed up setting or correction value is faulty
Faulty part is initialized.

 “3.2.2 Displays and Indications at Power “ON” ”
 When operation mode is switched
The settings and correction values except operation modes are all initialized including memory
contents.
For details of the initial setting in the operation mode 1, see “Instruction Manual (Alternative
Commands)”.
To start the operation from the initial setting state, perform initialization as follows:• After pressing the SHIFT key, press the 0 | [INIT] key to display the initialize menu, andpress the1

key.

Initialized items, initialized contents

 “Table 3-1 Setting items and initial values”

3-6

ZM2376

3.2

ResumeSetting items and initial values
SettingmemoryTable 3-1

Display at Power “ON” and Initial Settings

OFF(HOLD)|ON100mΩ to 1MΩ

ON
100Ω

←
←

←
←







1mHz to 5.5MHz
0.01 to 5Vrms
OFF|ON
6|25|100Ω
1|100Ω
1µ to 200mArms
OFF|ON
0 to 5V
OFF|ON|AUTO|TRACK
Continuous | Sync.
RAP|FAST|MED|SLOW|
VSLO

1kHz
1Vrms
OFF
25Ω
1Ω
1mArmsOFF
0V
OFF
Continuous
MED

←
←
←
←
←
←
←
←
←
←
←

←
←
←
←
←
←
←
←
←
←
←









×











×



OFF|ON
1 to 256

OFF
1

←
←

←
←







Trigger source
Trigger delay timeContinuous

INT|MAN|EXT|BUS
0.0000 to 999.9999 s
OFF|ONINT (internal)
8ms
ON

←
←
←

←
←
OFF



×



×

<Multi-measurement>(LIST) ON/OFF

OFF|ONOFF

SEQuence|STEPped

SEQuence

←
←

←
←

×
×




×
×

×
×

×
×




Setting item

Parameter range

Initial value

INIT *RST<Measurement range(including Rdc)>
Automatic selection
Range<Measurement signal>
Frequency
Signal level (voltage)
Constant voltage drive (CV)Minimum output impedance
Rd 25Ω upper limit range
Constant current level
Constant current drive (CC)Internal DC bias voltage
Internal DC bias output
Triggered drive<Measurement speed><Averaging>
ON/OFFCount<Trigger>

Multi-measurement mode
Multi-measurement list
Frequency
Setting memory<Correction frequency
range>
Correction upper limit
frequency
Correction lower limit
frequency<SPOT correction>
ON/OFF
Frequency<OPEN correction>
ON/OFF
Correction value (Primary &Secondary parameters)
Format of correction value<SHORT correction>
ON/OFF
Correction value (Primary &Secondary parameters)
Format of correction value{Frequency|OFF} x 32 steps All OFF{0 to 31|OFF} x 32 steps
All OFF


←

←

←

←

OFF
All disabled

←
←

←
←




OFF|ON
±9.99999E+11
Y-equivalent
G-B|Cp-G

OFF

←
←

←
←













G-B

←

←



OFF|ON
±9.99999E+11Z-equivalent
Rs-X|Ls-Rs

OFF

←
←

←
←











←

←





2kHz to 5.5MHz

2MHz

1mHz to 100kHz

40Hz

OFF|ON(automatic)

0, 0

0, 0
Rs-X

3-7









ZM2376

<LOAD correction>
ON/OFF
Correction value (Primary &Secondary parameters)
Standard value (Primary &Secondary parameters)
Format of standard value /correction value<Cable length><Contact check>Contact check
Low capacitance check
Low capacitance limit<Measured data>
Measurement parameter
automatic selection
Kind of primary parameters

ResumeSetting item

Display at Power “ON” and Initial Settings

Settingmemory

3.2


















←



←
←
←

←
←
←













←

←





←

←





←

←





←

←





←

←





←

←





←

←





←

←





←

←





←

←





←

←





←

←





FIMP

←

←

OFF
ON
OFF

←
←
←
←

←
←
←
←

















←

←





←

←





←

←





←

←





←

←





Parameter range

Initial value

INIT *RST

←
←

←
←

←

←

←

←

0m

←

OFF|ON
OFF|ON
0 to 9.99999E-7 [F]

OFF
OFF
0

OFF|ONON

L|C|R|Z|Y|G(|REAL|MLIN)C

OFF|ON

OFF±9.99999E+111, 0±9.99999E+11

1, 0

Cp-D|Cs-D|Rp-Cp|
Rs-Ls|Rs-X|Z-θ
0|1|2|4 m

Rs-X

Equivalent circuit (primary
Series | Parallel
parameter)
Equivalent circuit automatic
ON|OFF
selection
Kind of secondary
Q|D|θ|X|B|Rs|Rp|G
parameters|Lp|Rdc(|IMAG|REAL)
Primary parameter deviation
Deviation | Deviation %display format
Primary parameter deviation
OFF|ON
display
Primary parameter reference±9.99999E+11
value
Secondary parameter
Deviation | Deviation %deviation display format
Secondary parameter
OFF|ONdeviation display
Secondary parameter±9.99999E+11
reference value
Dual measurement (Rdc and
OFF|ONothers)Measurement function
FIMP|FADM, etc.
<Comparator>
Comparator function
OFF|ONBIN1 sorting
OFF|ON
BIN2..14 sorting
OFF|ON
Comparison of secondary
OFF|ONparameter
Primary parameter upper limit±9.99999E+11, OFF|ON(value, ON/OFF)
Primary parameter lower limit±9.99999E+11, OFF|ON(value, ON/OFF)
Secondary parameter upper±9.99999E+11, OFF|ON
limit (value, ON/OFF)
Secondary parameter lower±9.99999E+11, OFF|ON
limit (value, ON/OFF)
Primary parameter
Absolute value|comparison format
Deviation|Deviation %3-8

ParallelON
D
Deviation
OFF

(ABS)

0
Deviation
OFF

(ABS)

0
OFF

ON
0,OFF (No Limit)
0,OFF (No Limit)
0,OFF (No Limit)
0,OFF (No Limit)
Absolute value

ZM2376

Primary parameter deviationcomparison reference value<Limit comparison >Primary parameter limit
comparison
Secondary parameter limit
comparison<Handler interface>
AUX BIN function
Bin extension BIN10..14
TRIG polarity

Parameter range(Common to deviation
display)

Initial value

0

OFF|ONOFF

OFF|ONOFF
OFF (Include)
OFF
Positive

Test mode

OFF|ON
OFF|ON
Positive|Negative
SPOT correction|
Partial settings|Settings|
Correction values|Both
OFF|ON|ER

Test output

L|H (for each pin)

Setting/correction value
memory recall target<Beeper>Sounding selection
Sounding condition<Auxiliary display><Data transfer
format><Measured data buffer>

OFF|ON
FAIL|PASS
Status|BINn-Limit|
Sec-Limit|P-S-REF|
I-V|Z-θ|List
ASCII|Real (binary)|Packed

←

←

←

←

←

←
←
×
←

←
←
×
←

OFF
(Depending on
the pin)

←
←

←
←

OFF
FAIL
Status

←
←
←

←
←
←




















×




×

























×

×





(BIN 1)
ASCII

←

←

×

×

←

←

×

×

←

←

×

×

OFF

←

←

×


USB
2
9600
CR LF
OFF
192.168.0.1
255.255.255.0
0.0.0.0

×
×
×
×
×
×
×
×

×
×
×
×
×
×
×
×

×
×
×
×
×
×
×
×


×











×

×

－

－

←

←





None, None

BUF1, BUF2, BUF3 feed

Send|Not send

Not send(All)

1 to 200, 1 to 200,
1 to 1000
OFF|ON(LAN is optional)
USB|RS232|GPIB|LAN
0 to 304800 to 230400
CR|LF|CR LF
OFF|SOFT|HARD
0.0.0.0 to 255.255.255.255
0.0.0.0 to 255.255.255.255
0.0.0.0 to 255.255.255.255←←

Primary parameter |Secondary parameter|None<Key lock><Interface>Type
GPIB address
RS-232 bit rate
RS-232 terminator
RS-232 handshake
LAN IP address
LAN subnet mask
LAN default gateway<Setting/correction value
memory>←SPOT correction

BUF1, BUF2 data

BUF1, BUF2, BUF3 size

INIT *RSTResumeSetting item

Display at Power “ON” and Initial Settings

Settingmemory3.2

200,200,1000

Content-

Empty(no saving)

Recall target (at panel
operation)

Settings|Correction
values|BothSetting





3-9





ZM2376

<Others>
Settling wait time during
automatic adjustment
Operation mode

Parameter range

Initial value

INIT *RST
1ms to 99ms

20ms

Mode 0|1

Mode 0←←××

ResumeSetting item

Display at Power “ON” and Initial Settings

Settingmemory

3.2







×



 Remarks
Initial value

Set when device is shipped from factory, or when full initialization is executed withthe system setting menu.

INIT

Set when initialization is executed with the initialize menu ( SHIFT+ [INIT]).

*RST

Set when *RST command of remote control is executed←

Same as left (initial values)

Function provided. However, it is saved not in the setting memory but in thecorrection value memory.

×

Function not provided. (No influence)Function provided.



Function provided. However, it is saved independently from general resume target().
It cannot be set/query by the remote control.

The followings are out of the resume target:• Measured data saved in the measured data buffer• Latest measured data
• Range selected automatically• Measurement parameters selected automatically• Equivalent circuit selected automatically

3-10

ZM2376

3.3

3.3

Operation Tree

Operation Tree

An operation tree when ZM2376 is operated from the panel is shown below.
For the expression of operations, see “3.5.2 Basic Key Operations”.
Operation Tree (1/4)_FREQ_: { Measurement frequency setting menu }Frequency selection | { Measurement frequency input menu }_SHIFT_ + [LIST]: { Multi-measurement setting menu }Mode selection | { List input menu }_LEVEL_: { Measurement signal level setting menu }_SHIFT_ + [ALC]: { ALC setting menu }{ Current setting menu }_BIAS_: { DC bias setting menu }{ DC bias voltage input menu } | Mode selection_SPEED_: { Measurement speed setting menu }_SHIFT_ + [AVERAGE]: { Averaging count setting menu }_Pri_: { Primary parameter selection menu }Direct selection L / C / R / ...
Auto selection Disabled / Enabled_CKT_: { Equivalent circuit selection menu }Series / Parallel
Auto selection Disabled / Enabled_SHIFT_ + [∆Pri]: { Primary parameter deviation display menu }Display format selection{ Reference value setting menu }_Sec_: { Secondary parameter selection menu }_SHIFT_ + [∆Sec]: { Secondary parameter deviation display menu }Display format selection{ Reference value setting menu }_AUX DISP_: { Auxiliary display selection menu }{ Bin number input menu }_TRIG_: Manual trigger_SHIFT_ + [TRIG MODE]: { Trigger setting menu }Trigger source selection{ Trigger delay setting menu }{ Triggered drive setting menu }Continued

3-11

ZM2376

3.3

Operation Tree

Operation Tree (2/4)_AUTO/HOLD_: Measurement range Auto/Manual selection_SHIFT_ + [RANGE]: { Measurement range setting menu }Range selection{ Minimum output impedance setting menu }_SHIFT_ + [OPEN]: { OPEN correction menu }Disabled / Enabled / Correction value measurement{ Measurement stop menu }{ Spot correction menu }{ Format setting menu }{ Correction value input menu }{ Lower limit frequency setting menu }{ Upper limit frequency setting menu }_SHIFT_ + [SHORT]: { SHORT correction menu }Disabled / Enabled / Correction value measurement{ Measurement stop menu }{ Spot correction menu }{ Format setting menu }{ Correction value input menu }{ Lower limit frequency setting menu }{ Upper limit frequency setting menu }_SHIFT_ + [LOAD]: { LOAD correction menu }Disabled / Enabled / Correction value measurement/ Standard value measurement{ Measurement stop menu }{ Measurement stop menu }{ Spot correction menu }{ Format setting menu }{ Standard value input menu }{ Correction value input menu }{ Lower limit frequency setting menu }{ Upper limit frequency setting menu }_SHIFT_ + [CABLE]: { Cable length correction menu }_SHIFT_ + [CONTACT]: { Contact check setting menu }{ Low capacitance check setting menu }{ Low capacitance limit setting menu }Continued

3-12

ZM2376

3.3

Operation Tree

Operation Tree (3/4)_SHIFT_ + [COMPRTR]: { Comparator setting menu }Disabled / Enabled{ Deviation comparison menu }Format selection{ Reference value setting menu }Initialization{ Upper / Lower limit value setting menu }Comparison enabled, upper limit value, lower limit value_SHIFT_ + [NO LIMIT]: Disabled setting (Don't care)_SHIFT_ + [Pri/Sec]: Pri-Sec switch[PREV]: Switch through all parameter values (reverse)[NEXT]: Switch through all parameter values (forward)_SHIFT_ + [HANDLER]: { Handler interface setting menu }{ OUT OF BINS output setting menu }{ Bin extension menu }{ Trigger polarity setting menu }{ Recall setting menu }{ Test menu }Continued

3-13

ZM2376

3.3

Operation Tree

Operation Tree (4/4)_SHIFT_ + [INIT]: { Initialization menu }_SHIFT_ + [SAVE]: { Setting/Correction value memory save menu }_SHIFT_ + [RECALL]: { Setting/Correction value memory recall menu }_SHIFT_ + [SYSTEM]: { System setting menu }{ Remote control interface setting menu }{ USB check screen }{ RS-232 setting menu }{ Communication speed setting menu }{ Message terminator setting menu }{ Hand shake setting menu }{ GPIB address setting menu }{ LAN setting menu }{ IP address setting menu }{ Subnet mask setting menu }{ Default gateway setting menu }{ Beeper setting menu }{ Fully initialization menu }{ Settling wait time setting menu }Self-Diagnosis
Version display{ Operation mode setting menu }_LOCAL_: Shift from remote to the local_SHIFT_ + [KEY LOCK]: Key operation disabled / enabled

3-14

ZM2376

3.4

3.4

Connection of DUT

Connection of DUT

3.4.1 Measurement Terminals
 Description of each terminal
HCUR

Outputs the signal to drive the DUT.

HPOT

Measures the voltage applied to the DUT.

LPOT

Measures the voltage applied to the DUT.

LCUR

Measures the current flowing in the DUT.
Ground terminal to guard the DUT.

A

V
Connect total four outer conductors(shields) of each terminal together.

LCUR

LPOT

HPOT

HCUR

Be sure to connect outerconductors (shields) of H CUR and
LCUR terminals, since the signal

DUT

currents return through these
conductors.

Figure 3-3

Functions of measurement terminals

 Measurement terminals when power is OFF
Even when the power is in OFF state, the measurement terminals are connected to internal circuits.

！ CAUTION• Do not give signals from outside to the measurement terminals. Do not give
signals from outside even when the power is OFF. Otherwise, ZM2376 may bedamaged.
• Do not connect the charged capacitor. When the DUT could have been
charged, discharge the DUT completely before connection. Discharging the
DUT to the measurement terminals may damage the ZM2376. (Whenconnecting a capacitor which is charged to a voltage approximately equal tothe bias voltage, the ZM2376 will not be damaged since thecharge-discharging current is small.)

3-15

ZM2376

3.4

Connection of DUT

 Measurement signals
Main specifications of measurement signals are as follows:Signal level

Voltage

10mVrms to 5Vrms (ALC possible)

Constant current 1µArms to 200mArms (range depends on
measurement range, etc.)
Max. 7.1Vpk also including DC bias is outputted.
Output impedance

About 6Ω / 25Ω / 100Ω (depending on measurement range, frequency,etc.)Max. drive current

About 200mArms

3.4.2 Connection to DUTConnect ZM2376 and DUT with 4-terminal (4-terminal-pair) as shown below to avoid the influenceof contact resistance.
LCR meter
LCUR

LPOT

HPOT

HCUR

Use four coaxial cables having BNC
connector.
Connect 4 shields together on the
DUT side.

DUT
Insulating
plate
Shield plate

When the measured value is unstable due to a noise, lay a metallic plate connected to theouter conductor (shields) of measurement cables or the case under the DUT for shielding.
Figure 3-4

Connection to DUT

In the measurement of high impedance, shielding around the DUT can restrict variation of measured
value. In a simplified method, place an insulating plate on the top surface of ZM2376, and measure
the DUT on it.
The ZM2376 cannot measure the grounded DUT. Both ends of DUT must be both insulated from thegrounding.
When commercially available test fixture or test lead is used, refer to the instructi on manual of theseproducts. The product in which the shields of respective terminals are not connected cannot be used
together with the ZM2376.

3-16

ZM2376

3.4

Connection of DUT

3.4.3 Precautions on Connection
 Handling of shields
Connect the shields (outer conductor) of connection cables, 4 pieces together on the DUT side. The
current that flows from H CUR terminal through DUT to the L CUR terminal returns to the H CUR terminal
through the shield. Measurement will fail unless this return path is provided. To stabilize reference
potential in the voltage detection part, connect the voltage cable shield and the current cable shield.
Do not connect the connection cable shields to the ground. If grounded, a noise will mix in due toelectromagnetic coupling by a ground loop or common impedance coupling with other equipment.
 Electromagnetic interference prevention and electromagnetic susceptibility improvement
In the cable connection with the DUT, put four coaxial cables together in the vicinity of measurement
terminals of LCR meter, and attach the common mode choke. It can reduce high-frequency radiation
field disturbance received from the periphery, or reversely disturbance given to the periphery.
Measurement cables (ex. : 1.5D-2V × 4 pieces)
LCR meter

DUT

Measurement Terminals

Common mode choke(ex. : ESD-SR-250

NEC/TOKIN)

 Selection of cables
In the measurement of low impedance such as capacitors having large capacitance, a voltage drop of
LCUR cable causes a common mode noise, increasing the measurement error. This error cannot becorrected by the cable length correction. In a narrow measurement range, the error can be reduced by
the LOAD correction and it is therefore recommended to use thick and short current cables(particularly for L CUR) so as to reduce the resistance of cable inner conductor to 0.5Ω or less percable. Note that the circuit (including probe resistance and contact resistance) between cables and
DUT has similar influence.
In the measurement of high impedance such as capacitors having small capacitance, using longconnection cables increases the error due to capacitance of the cables. This error can be corrected by
the cable length correction. However, correctable cables are coaxial cables of characteristic
impedance 50Ω (capacitance: about 105pF/m) having the specified length. When the cables used areout of specification or when an error is large due to the DUT to earth capacitance, the error can be
reduced by the LOAD correction only in a narrow measurement range.
If cables substantially exceeding the specified length are used, or if DUT to earth capacitance is large,
the ZM2376 operation may become unstable or the measurement dispersions may become large dueto the influence of resistance value or capacitance of cable inner conductor. Note that particularly thecapacitance to ground on the L side is more likely to be influential. It may not be always true
depending on DUT or resistance of cables, but a total of capacitance of four connection cables andcapacitance to earth of DUT should be reduced to about 2000pF or less.

3-17

ZM2376

3.4

Connection of DUT

 Cable routing and electromagnetic induction
Presence of noise sources such as motors or power transformers that generate large magnetic fieldnear the device causes a noise to get mixed in due to electromagnetic induction. To avoid this,perform the wiring so that a large loop is not made.
If electromagnetic induction occurs between current cable and voltage cable, an error will increase in
the low impedance measurement or an error will vary with the movement of cables. Twisting two
cables each between current cable and current cable, and between voltage cable and voltage cable, or
twisting four cables together so that the voltage cables are arranged diagonally and also the current
cables are arranged diagonally as viewing the cross section can reduce an error due toelectromagnetic induction between cables.
 Noise mixing in due to electrostatic coupling
If inner conductor of L CUR and LPOT cables are exposed, a noise will mix in due to electrostatic
coupling with noise sources. Provide an electrostatic shield or keep peripheral potential constant.
Be sure to connect the ZM2376 case to the ground. Using 3-pole power cord, connect ZM2376 to
the 3-pole power outlet having a protective grounding contact, so that the device is connected to theground. Unless grounded, not only a hazardous situation occurs but also the potential of case varies
according to the power frequency or line noise, thus allowing a large noise to mix in.
 Avoidance of 2-termianl connection
Connecting between L CUR and LPOT cables or between H CUR and HPOT cables in the middle of wiring
disables the 4-terminal connection. Since such a connection is equivalent to the 2-terminal
connection, it is affected by the contact resistance. In the measurement of low impedance ormeasurement of small dissipation factor D (or small equivalent series resistance ESR), when thecontact resistance is not negligible, connect four connection cables independently to the DUT.
 Influence of contact resistanceAn error caused by the contact resistance with DUT can be restricted by 4-terminal connection, butsince the input impedance of voltage measurement terminals is not infinite, there may be someinfluence. Particularly when the contact resistance exceeds 10Ω, prior evaluation of additional error
should be made before use.

3-18

ZM2376

3.5

3.5

Basic Operations

Basic Operations

3.5.1 Outline of Measurement Screen
During the measurement, the measured value and main settings are displayed on the LCD display (40characters x 2 lines) of the front panel. Basic contents of display are as shown below.
Measured value
Lp Ls Cp Cs Rp Rs Z Y GPrimary parameters

Q D θ X B Rs Rp G Lp Rdc
Secondary parameters

Measurement frequency

Ls:+1.23456µH Q :+12.3456
A100mΩ FAST256 Int OpShLd2m

1.00000M
0.000 1.00 V

1)

Vdc Vrms or Arms
DC bias Measurement signal level

2)
3)
4)
Status (main settings: See below)

Hz1) RANGE: Measurement range{Auto | Hold} and impedance measurement range
2) SPEED/AVERAGE: Measurement speed and averaging{RAP | FAST | MED | SLOW | VSLO} and averaging count3) TRIG SOURCE:{Int | Man | Ext | Bus}4) CORRECTION:

{

Op

OPEN

Sh

SHORT

Ld

LOAD

Xm

Cable length {0m | 1m | 2m | 4m}(Only the enabled corrections are displayed)} indicates that either one of options delimited with | is displayed.

3-19

ZM2376

3.5

Basic Operations

3.5.2 Basic Key Operations
 Primary function
Press each key on the front panel, and the function written on the key top will operate.
_T T T _ key: Indicates the key with “TTT” written on the key top.

TTT Secondary function
If the _SHIFT_ key (blue) is pressed, the secondary function written with blue characters above thekey becomes active. At this time, SHIFT is displayed at the bottom right of character display. In thisstate, press any key, and the secondary function of that key will operate.
If the secondary function operates once or the _SHIFT_ key is pressed again, the SHIFT state iscancelled.
_SHIFT_ + [AAA]Indicates that after pressing the _SHIFT_ key, the key with AAA (blue)
written above the key is pressed.

_T T T _ | [BBB] key

Indicates the key with TTT written on the key top and BBB written above orunder the key.

AAA

ZM2376
SHIFT

SHIFT

+

TTT
BBB

 Tertiary function
The tertiary function (BBB) written under the key operates according to the operation flow orsituations at that time.

TTT
BBB

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Basic Operations

 Operation of setting menu
Depending on the key operations, the setting menu will be displayed to select a function or set a
numeric value.
Function selection: When options are displayed on the lower line of the setting menu, an option canbe selected by pressing a numeric key associated with each option.
Options that cannot be accommodated in one line are displayed over multiple
pages. The pages can be switched with _BS_ | [PREV] key and _EXP_ |[NEXT] key.
Even an option that exists on the page not displayed, it can be selected with theassociated numeric key.
Parameter name and current settings

Parameter_name: Value10)alt11)alt22)alt3(Value2)
Comments>NEXT
Indicates that more options

Options

exist on another page
Numeric value input: When the cursor is located at the parameter to which a numeric value can beentered, the comments such as a range of settable values are displayed on thelower line of the setting menu. The cursor is displayed by blinking the digit.
The following key operations are possible.
• Numeric keys, decimal point key, sign key : Input a numeric value.
• _EXP_ + [_x_]: Input the exponential part (x = p, n, µ, m, k, M) of anumeric value (to enter the value (_ENTR_ need not
be pressed).
For details

 Input of exponential part
(Mentioned later)• _ENTR_ key:

Enters the input value.

• _BS_ key:

Clears a value being input,
one character at a time from the last.

• _SHIFT_ + [CE]: Clear a value being input, all at once.
Upon clear of a value being input, the currently set value is displayed.
For the menu that needs multiple parameters, the parameters to be set can beswitched with _BS_ | [PREV] key and _EXP_ | [NEXT] key.
Parameter name and current settings

Parameter_name:
Range of value

Value1(Value2)
Comments

Available ranges

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Basic Operations

Input of exponential part
_EXP_ + [_x_] Indicates that after the _EXP_ key is pressed, the key expressed as x on the right sideis pressed.
If the _EXP_ key is pressed during input of a numeric value, EXP is displayed at thebottom right of display, waiting for input of exponential part. In this state, press any
key, so that exponential part x written on the right side of that key can be input.
Available exponential parts: p (10 -12), n (10-9), µ (10-6), m (10-3), k (103), M (106).
If the exponential part is input or the _EXP_ key is pressed again, the exponential part
input waiting state is cancelled.
ZM2376EXP

EXP

EXIT operation

+

NNN

x

With the setting menu, if the _ENTR_ | [EXIT] key is pressed without setting or
selecting a value, one-previous menu is returned. However, depending on theparameter, the setting menu is closed and the measurement screen comes back.
There are some parameters that automatically returns to one-previous menu ormeasurement screen without executing the EXIT operation, after a value was set or
selected.

 Reset of error message
An error message may be displayed when, for instance, the input value exceeds the setting range.
The error message can be reset by pressing any key. After confirming the contents of an error, press
the _ENTR_ | [EXIT] key at the bottom right for instance to reset the error message.

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3.5.3 Simplified Operating Method When You Use “ZM2376” for the First Time
This section describes the simplified operating method when you use the ZM2376 for the first time.
Do not connect the handler interface and remote control interface.
Perform operation through the procedure mentioned below:
1) Unlock the key lock2) Initialization
3) Setting of measurement conditions4) Connect and measure the DUT.
With the factory default settings, unlocking of key lock and initialization can be omitted.
 Unlock the key lock
When the KEY LOCK lamp lights up, first press the _SHIFT_ + [KEY LOCK] keys to unlock the key
lock. In concrete terms, after pressing the _SHIFT_ key, press the _LOCAL_ | [KEY LOCK] key with
KEY LOCK written above the key.
 Initialization
Press the _SHIFT_ + [INIT] keys to display the initialize menu, and press the _1_ key to return to theinitial setting state.
When you use the ZM2376 that has already been set variously, performing the initialization makes later
operations easy. The contents saved in the setting/correction value memory are not initialized by thisoperation.
KEY LOCK lamp

_SHIFT_[KEY LOCK][INIT]

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Basic Operations

 Selection of measurement parameters Selection of Primary Parameters
Press the _Pri_ key to display the primary parameter selection menu (see below), and select a
primary parameter with a numeric key. Also, the measurement parameters (primary and secondary)can be selected automatically.
For details

 “3.5.5.1 Selection of Primary Parameters”

Primary parameter : C

Auto:OFF

Current setting0)Auto OFF 1)ON 2)L 3)C 4)R 5)Z 6)Y 7)GOptionsIf either L, C, or R is selected, the equivalent circuit selection menu is displayed.
 Selection of primary parameter equivalent circuit
For the L, C, and R, specify the equivalent circuit additionally.
Press the _CKT_ key to display the equivalent circuit selection menu (see below), and selectParallel (suffix p) or Series (suffix s) with a numeric key. Automatic selection is also possible.
For details

 “3.5.5.2 Setting of Equivalent Circuit”

Equivalent CKT : Series0)Auto OFF1)ON

Auto:OFF2)Parallel

Current setting3)Series

Options Selection of secondary parameter
Press the _Sec_ key to display the secondary parameter selection menu (see below), and select asecondary parameter with a numeric key. The options can be switched to those on the second page
with the _EXP_ | [NEXT] key.
For details

 “3.5.5.3 Setting of Secondary Parameters”

Secondary parameter : D
0)Q

1)D

2)θ

6)Rp

7)G

8)Lp

3)X

Current setting
4)B

5)Rs

9)Rdc

_CKT_

3-24

_Pri_

>NEXT

Options (first page)<PREV

Options (second page)_Sec_

ZM2376

3.5

Basic Operations

 Setting of measurement conditions
 Measurement frequency
Press the _FREQ_ key to display the measurement frequency setting menu, and select thefrequency with a numeric key or set a numeric value.
 Measurement signal level
Press the _LEVEL_ key to display the measurement signal level setting menu, and set the voltage.
 Measurement speed
Press the _SPEED_ key to display the measurement speed setting menu, and select themeasurement speed with a numeric key.

_FREQ__LEVEL__SPEED_

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 Trigger source
Press the _SHIFT_ + [TRIG MODE] keys to display the trigger setting menu (see below), and set
the trigger source with a numeric key.
TRIG SRC:Ext

Delay=99.0000s

0)Int

2)Ext

1)Man

3)Bus

SRC Sync=ON4)Delay

Current setting5)S.Sync

Options

Int

Internal. Automatic repetitive measurement (default value)Man

Manual. Press the _TRIG_ key on the front panel to trigger the measurement.

Ext

External. The trigger signal of handler interface is used to trigger themeasurement.

Bus

Remote control

 Measurement range
The default setting is automatic selection.
Press the _AUTO/HOLD_ key to switch between Automatic selection (Auto) and Manual
selection (Hold).
Press the _SHIFT_ + [RANGE] keys to display the measurement range setting menu (see below),
and press a numeric key (_0_ key or _1_ key) to change the measurement range manually. The
range is held (manual selection).
RANGE : Manual1kΩ0)DOWN

100mΩ to 1MΩ

1)UP

Rd : 25Ω-12)Rd-minCurrent setting
Options

When a measurement range value is large, it is approximate the lower limit of measurement range,or when a value is small, it is approximate the upper limit of measurement range.
For details

 “Table 3-2 Measurement range list’’_SHIFT__TRIG_ | [TRIG MODE]_AUTO/HOLD_ | [RANGE] Connection of DUT and measurement
 Connection of DUT
Connect the LCR meter to the DUT by referring to “3.4Connection of DUT”.

 Manual trigger
When you set the trigger source to Manual (Man) and press the _TRIG_ key, the trigger signal isapplied and the measurement is executed once.

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3.5.4 Initialization
There are two types of initialization as described below.
 Initialization of current settings_SHIFT_ + [ INIT ]Press the _SHIFT_ + [INIT] keys to display the initialize menu, and press the _1_ key, so thatcurrently used settings and correction values are reset to the default values.
Upon initialization, the initialization completion message “Done” is displayed, and then themeasurement screen comes back.
Done
The contents of the setting/correction value memory and the multi-measurement list are notinitialized.
If the EXIT operation is performed without pressing the _1_ key, the initialization is not
performed, and the measurement screen comes back.
Only the settings cannot be initialized without initializing correction values. Save necessary
correction values in the correction value memory.
_SHIFT__0_ | [INIT]

 Full initialization
To reset all settings except operation modes to the factory default values, perform full initialization.
The setting/correction value memory and the multi-measurement list are also initialized.
For details

 “4.14 Initializing of All Settings”

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Basic Operations

3.5.5 Setting of Measurement Parameters
The ZM2376 can display two parameters (primary parameter and secondary parameter) at the sametime.
In general, L, C, R values are different between series equivalent circuit and parallel equivalentcircuit, and therefore select appropriate equivalent circuit according to the nature and circuits used of
the DUT.

3.5.5.1

Selection of Primary Parameters_Pri_
Press the _Pri_ key to display the primary parameter selection menu (see below), and select a
primary parameter with a numeric key.
Primary parameters
Primary parameter : C0)Auto OFF 1)ON

2)LAuto selection function
Auto:OFF

3)C

4)R

5)Z

6)Y

Current setting7)GOptions

Auto OFF

Disables automatic selection of measurement parameters.

ON

Enables automatic selection of measurement parameters.

L

Inductance Lp or Ls (unit: Henry “H”)

C

Capacitance Cp or Cs (unit: Farad “F”)

R

Resistance Rp or Rs (unit: Ohm “Ω”)

Z

Magnitude of impedance |Z| (unit: Ohm “Ω”)

YMagnitude of admittance |Y| (unit: Siemens “S”)

G

Conductance indicated with parallel equivalent circuit Gp (unit: Siemens “S”)

If a parameter other than L, C, and R is selected or the EXIT operation is performed, themeasurement screen comes back.
If either L, C, or R is selected, the equivalent circuit selection menu is displayed.
If it is not necessary to change the equivalent circuit setting, you can use the EXIT operation to
return to the measurement screen.
If primary parameter is set to G, automatic selection of equivalent circuit is disabled and theparallel equivalent circuit is set.
_Pri_

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Basic Operations

Each display range of primary parameters is as follows:
L±(0.000nH - 999.999MH)
C±(0.00000pF - 9.99999kF)
R±(0.000mΩ - 999.999MΩ)
Z
0.000mΩ - 999.999MΩ
Y
0.00nS - 9.99999kS
G±(0.00nS - 9.99999kS)
The display range is limited by the measurement range.
The display range of L and C varies depending on the frequency.
 Automatic selection of measurement parameters
Automatic selection rule of measurement parameters is as follows:
Phase angle θ of impedance+30 to +120°-30 to +30°
-120 to -30°
OthersPrimary parameters
L
R
C
Z

Secondary parameters
Q
Q
DθWhen a measurement parameter is automatically selected, the primary parameter, secondary
parameter, and equivalent circuit are automatically selected based on the phase angle or magnitude of
impedance. When the primary parameter is other than L, C, R, and Z, if a measurement param eter is
automatically selected, immediately after that, Z is selected as a primary parameter.
If a specific primary parameter, secondary parameter, or equivalent circuit is set, or if automatic
selection of equivalent circuit is disabled, automatic selection of measurement parameter is disabled
and the primary parameter, secondary parameter, and equivalent circuit at that time are set.
 Negative display of L, C, R
From the relation of reactance X=ωL=-1/(ωC) and susceptance B=ωC=-1/(ωL), (here,ω=2×π×frequency), when θ > 0 (X > 0), C is smaller than 0 (C < 0). Also, when θ < 0 (B > 0), L issmaller than 0 (L < 0).
From the relation of R=|Z|cosθ, if θ > +90° or θ < -90° due to a measurement error, R is smaller than
0 (R < 0).
 Parameters that can be selected by remote control only
By remote control, the followings can be specified, in addition to L, C, R, Z, Y, and G.
For details

 ZM2376 Instruction Manual (Remote Control)

Lp, Ls:CALCulate1:FORMat command
Inductance with equivalent circuit specified to parallel or series

Cp, CsCapacitance with equivalent circuit specified to parallel or series

Rp, RsResistance with equivalent circuit specified to parallel or series

REAL

Real part of immittance (Rs or Gp. Either one is displayed as measured value)

MLIN

Magnitude of immittance (|Z| or |Y|. Either one is displayed as measured value)

Immittance is a concept combining impedance and admittance.
If these are selected, automatic selection of measurement parameter and equivalent circuit is disabled.

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3.5

3.5.5.2

Basic Operations

Setting of Equivalent Circuit_CKT_
Press the _CKT_ key to display the equivalent circuit selection menu (see below), and selectparallel (suffix p) or series (suffix s) with a numeric key.
Equivalent circuit
Equivalent

CKT :0)Auto OFF

Auto selection function

Series1)ONAuto:OFF2)Parallel

Current setting3)Series

Options

Auto OFF
Disables automatic selection of equivalent circuit.
ON
Enables automatic selection of equivalent circuit.
Parallel
Parallel equivalent circuit (automatic selection is disabled)
SeriesSeries equivalent circuit (automatic selection is disabled)
If a setting is made or the EXIT operation is performed, the measurement screen comes back.
AUTO CKT lamp
The AUTO CKT lamp lights up when automatic selection of equivalent circuit is enabled.
When the primary parameter is L, C, R, Z, or Y, the equivalent circuit can be specified or its
automatic selection function can be used. However, |Z| and |Y| values do not depend on theequivalent circuit.
If automatic selection of equivalent circuit is enabled, the equivalent circuit is automatically selectedbased on the automatic selection rule listed below when the primary parameter is L, C, or R.
L|Z|≤1kΩ|Z| > 1kΩ

Automatic selection ruleC
|Z|≤1kΩ|Z| > 1kΩ

R
θ≥0
θ<0

Equivalentcircuit
SeriesParallelIf the primary parameter is set to other than L, C, and R, automatic selection of equivalent circuit
is as follows.
Primary
parameters
Z, Y
Rs, Cs, Ls
Rp, Cp, Lp, G
REAL, MLIN[:SENSe]:FUNCtion[:ON]

Equivalent circuit

Automatic selection(Don't care)(Don't care)(Don't care)
FIMPedance
FADMittance

Last value retained
SeriesParallel
SeriesParallelLast value retained
DisableDisableDisableDisableAUTO CKT lamp

_CKT_

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3.5.5.3

Basic Operations

Setting of Secondary Parameters_Sec_
Press the _Sec_ key to display the secondary parameter selection menu (see below), and select asecondary parameter with a numeric key.
Secondary parameter : D
0)Q

1)D

2)θ

6)Rp

7)G

8)Lp

3)X

Current setting
4)B

5)Rs

9)Rdc

>NEXT

Options (first page)<PREV

Options (second page)

Q

Quality factor (=1/D)

D

Dissipation factor (= tanδ)θPhase angle of impedance (unit: degree “°”)X

Reactance Xs expressed with series equivalent circuit (unit: Ohm “Ω”)

B

Susceptance Bp expressed with parallel equivalent circuit (unit: Siemens “S”)

Rs

Resistance Rs expressed with series equivalent circuit (= ESR, unit: Ohm “Ω”)

Rp

Resistance Rp expressed with parallel equivalent circuit (unit: Ohm “Ω”)

GConductance Gp expressed with parallel equivalent circuit (unit: Siemens “S”)

Lp

Inductance Lp expressed with parallel equivalent circuit (unit: Henry “H”)

Rdc

Direct-current resistance Rdc (unit: Ohm “Ω”)

Any secondary parameters can be selected regardless of a setting of equivalent circuit.
If a setting is made or the EXIT operation is performed, the measurement screen comes back.
_Sec_

A display range of each secondary parameter is as follows:
Q, D±(0.00000 - 99999.9)

θ±(0.000° - 180.000°)

Rs, Rp, X, Rdc±(0.000mΩ - 999.999MΩ)

G, B±(0.00nS - 9.99999kS)±(0.000nH - 999.999MH)
The display range is limited by the measurement range.
Lp

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Basic Operations

 Negative display of Q, D, R, G
When the phase angle of impedance θ > +90° or θ < -90° due to a measurement error, the loss angle
seems to be a negative value, and thus the Q, D, Rs (ESR), Rp, and G become negative values. Also,
Rdc may become a negative value due to a measurement error of voltage or current.
 Parameters that can be selected by remote control only
The following options can be selected by remote control only. They cannot be selected from thepanel.
For details

 ZM2376 Instruction Manual (Remote Control):CALCulate2:FORMat command

IMAG

Imaginary part of immittance (X or B)

REAL

Real part of immittance (either of Rs, G, or Rdc)

Immittance is a concept combining impedance and admittance.
 DC (Direct-current) resistance Rdc
When Rdc is selected, ZM2376 measures the DC resistance after measuring the AC impedance. Thisfunction is mainly intended to measure the DC resistance of coil, and is not suited for themeasurement of the insulation resistance of capacitor.
When the DC bias output is turned on, the DC resistance Rdc cannot be selected.

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Basic Operations

3.5.6 Setting of Basic Measurement Conditions
3.5.6.1 Measurement Frequency
The measurement frequency is displayed at the top right of measurement screen.
•

•

•

•

•

•

•

1.00000M

•

•

•

•

•

•

•

1.00 V

Measurement frequency Hz
Measurement signal level_FREQ_
Press the _FREQ_ key to display the measurement frequency setting menu.
Frequency:0)120

1.00000MHz

1)1k

2)10k

3)100kCurrent setting
4)1M

5)Entry

Options

120

120Hz

1k

1kHz

10k

10kHz

100k

100kHz

1M

1MHz

Entry

Displays the measurement frequency input menu to input a numeric value.

If a setting is made or the EXIT operation is performed, the measurement screen comes back.
Entry: The measurement frequency input menu is as follows.
Frequency: 1.00000MHz

Current setting

1mHz

Available value ranges

to5.50000MHz

The setting resolution is 6 digits (1mHz when < 100Hz).
If a setting is made or the EXIT operation is performed, one-previous menu comes back.

_FREQ_

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3.5.6.2 Measurement Signal Level
The measurement signal level is displayed at the bottom right of measurement screen.
•

•

•

•

•

•

•

1.00000M

•

•

•

•

•

•

•

1.00 V

Measurement frequency Hz
Measurement signal level Vrms

_LEVEL_
Press the _LEVEL_ key to display the measurement signal level setting menu.
Level: 1.00 V

Current setting

0.010V to 5.00V

Available value ranges

The setting resolution is 3 digits (1mV when < 100mV).
Though the value is an RMS value (unit: Vrms), it is simply displayed as V.
If a setting is made or the EXIT operation is performed, the measurement screen comes back.
If the measured value varies due to noise mixing, you can reduce the variation by increasing themeasurement signal level.

_LEVEL_For the direct-current resistance Rdc, the voltage and current are measured with two measurement
signals of about +1.4V and -1.4V, and Rdc is obtained from a difference of them, regardless of asetting of measurement signal level.

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3.5.6.3 Measurement range
Set the measurement range according to the impedance of DUT.
Current measurement range setting is displayed at the bottom left of measurement screen.
•

•

•

•

•

•

•

A100Ω FAST256 Int OpShLd1m

•

•

•

•

•

•

RANGE

A

Auto: Measurement range Auto selection

H

Hold: Measurement range is held for manual selection100ΩCurrent measurement range (100mΩ to 1MΩ)

Table 3-2

Measurement range list 1/4 (Rd-min = 25Ω-1

initial value)

Rd: Output impedance, Rd-min: Minimum output impedance
Measurement
range

Recommended range

Measureable range

Rd

Restrictions

1MΩ

1MΩ -

11MΩ

900kΩ -

100Ω

Frequency ≤ 20kHz

100kΩ

100kΩ -

1.1MΩ

90kΩ -

100Ω

Frequency ≤ 1MHz

10kΩ

10kΩ -

110kΩ

9kΩ -

100Ω

Frequency ≤ 2MHz

1kΩ

1kΩ -

11kΩ

900Ω -

100Ω

100Ω

9Ω -

1.1kΩ

Not limited100Ω------

10Ω

0.9Ω -

10Ω

- 11Ω

100Ω

1Ω

90mΩ -

1.0Ω- 1.1Ω

25Ω

Frequency ≤ 2MHz

- 110mΩ25Ω

Frequency ≤ 1MHz

100mΩ

9mΩ - 100mΩ

Recommended range:
Recommended operating range for high accuracy measurement. If out of the recommended
range extremely, the measured value or data output may vary greatly or be overflow.
Measureable range:
Approximate range in which the measurement is possible. The measurement may be possible
even outside the above range depending on the measurement conditions.
Restrictions:
The upper and lower limits of the measurement range are restricted depending on the frequency.
If you specify an unavailable range, the device operates with the nearest available range(recommended range, measureable range).
The output impedance may be restricted depending on the frequency, signal level, measurement
parameters, and CV/CC. (CV: Constant voltage function, CC: Constant current function)

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Table 3-2
Measurement
range

Basic Operations

Measurement range list 2/4 (Rd-min = 100Ω)
Recommended
range

Measureable range

Rd

Restrictions

1MΩ

1MΩ -

11MΩ

900kΩ -

100Ω

Frequency ≤ 20kHz

100kΩ

100kΩ -

1.1MΩ

90kΩ -

100Ω

Frequency ≤ 1MHz

10kΩ

10kΩ -

110kΩ

9kΩ -

100Ω

Frequency ≤ 2MHz

1kΩ

1kΩ -

11kΩ

900Ω -

100Ω

100Ω

9Ω -

1.1kΩ

Not limited

100Ω

10Ω

0.9Ω -

10Ω

1Ω

Same as above(Measured in the 10Ω
range)

100mΩ

Table 3-2
Measurement
range

- 11Ω

100Ω

Same as above(Measured in the 10Ω
range)

100Ω------

These ranges are unavailable.

Measurement range list 3/4 (Rd-min = 25Ω-100)
Recommended
range

Measureable range

Rd

Restrictions

1MΩ

1MΩ -

11MΩ

900kΩ -

100Ω

Frequency ≤ 20kHz

100kΩ

100kΩ -

1.1MΩ

90kΩ -

100Ω

Frequency ≤ 1MHz

10kΩ

10kΩ -

110kΩ

9kΩ -

100Ω

Frequency ≤ 2MHz

1kΩ

1kΩ -

11kΩ

900Ω -

100Ω------

100Ω

100Ω -

1.1kΩ

90Ω -

25Ω

*1 Signal level ≤ 1.2V
( When CV is enabled,≤ 1.05V )CC is disabled
Secondary parameter ≠ Rdc

25Ω
10Ω

0.9Ω -

110Ω

1Ω

90mΩ -

1.0Ω

100mΩ

9mΩ - 100mΩ

Not limited- 1.1Ω

25Ω

Frequency ≤ 2MHz

- 110mΩ25Ω

Frequency ≤ 1MHz

*1 If the restriction conditions are not met, the operation is the same as when Rd-min = 25Ω-1.

Table 3-2
Measurement
range

Measurement range list 4/4 (Rd-min = 6Ω-100-f1k)
Recommended
range

Measureable range

Rd

1MΩ

1MΩ -

11MΩ

900kΩ -

100Ω

100kΩ

100kΩ -

1.1MΩ

90kΩ -

100Ω

10kΩ

10kΩ -

110kΩ

9kΩ -

100Ω

1kΩ

1kΩ -

11kΩ

900Ω -

100Ω

100Ω

100Ω -

1.1kΩ

90Ω -

6Ω

10Ω

0.9Ω -

110Ω

Not limited6Ω

1Ω

90mΩ -

1.0Ω

100mΩ

9mΩ - 100mΩ- 1.1Ω

6Ω- 110mΩ6Ω

Restrictions*2

Frequency ≤ 1kHz

Signal level ≤ 1.2V
(when CV is enabled,≤ 1.05V
when CC is enabled,≥ 40mA )Secondary parameter ≠ Rdc*2 If the restriction conditions are not met, the operation is the same as when Rd -min = 25Ω-1.

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Table 3-3

Basic Operations

Max. current, max. voltage, and output impedance in each measurement range

Measurement
range

Maximum current(Detection)

Maximum voltage
Measurement signal
level

Detection

Outputimpedance
Rd

1MΩ

5µArms

5Vrms

5Vrms

100Ω

100kΩ

50µArms

5Vrms

5Vrms

100Ω

10kΩ

500µArms

5Vrms

5Vrms

100Ω

1kΩ

5mArms

5Vrms

5Vrms

100Ω

100Ω

50m / 12mArms(Rd= 100 / 25, 6 Ω)

5 / 1.2 Vrms
(Rd= 100 / 25, 6 Ω)

5 / 1.2 Vrms
(Rd= 100 / 25, 6 Ω)

100 / 25 / 6 Ω

10Ω

50m / 200mArms(Rd= 100, 25 / 6 Ω)

5 / 1.2 Vrms
(Rd= 100 / 25, 6 Ω)

0.5 / 1.2Vrms(Rd= 100 / 25, 6 Ω)

100 / 25 / 6 Ω

1Ω

200mArms

5 / 1.2 Vrms
(Rd= 25 / 6 Ω)

200mVrms

25 / 6 Ω

100mΩ

200mArms

5 / 1.2 Vrms
(Rd= 25 / 6 Ω)

20mVrms

25 / 6 Ω The output impedances shown in bold font indicate the initial values.
 The max sensing current/voltage shown in the above table are values obtained at the largest
measurement signal level for each output impedance. If the measurement signal level isdecreased, the range of detection current/voltage will be narrower.
 Allowable current peak value (instantaneous value) including DC bias current (leak current) is
about 1.4 times the max sensing current (RMS value). Actually, the detection side has a marginof 10% or more.

Signal信号レベル低下率
level decreasing rate% (%)

0
D = 0.1
R-cable = 0.5Ω
ALC=OFF
Rd=100Ω
1kHz

Rd=100Ω
120Hz

Rd=6Ω
1kHz

Rd=6Ω
120Hz

-10

-20
10n

100n

1µ

10µ

100µ

1m

Cp F （DUT)
Rd: Output impedance
Sum of cable resistance, contact resistance, and Rd error (+) = 0.5Ω
Figure 3-5

Capacitance to measurement signal level characteristics

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Basic Operations

 Automatic selection or hold of measurement range_AUTO / HOLD_
Press the _AUTO/HOLD_ key, and the measurement range is switched between automatic
selection (AUTO) and hold (HOLD).
When the measurement range is held, it can be selected manually. When holding the measurement
range, select a measurement range within the recommended range if possible, consideri ng thevariations of DUT.
For the DUT having large variations or strong nonlinearity, automatic selection may fail. Also, inthe measurement of large capacitance or inductance, the settling of signal will take time. Several
measurements may be required until correct measurement range is set in automatic selection andthe measured value becomes stable.
 Manual selection of measurement range_SHIFT_ + [ RANGE ]Press the _SHIFT_ + [RANGE] keys to display the measurement range setting menu.
Auto / Manual

Current range

Minimum output impedance

RANGE :

Manual1kΩ0)DOWN1)UP100mΩ to 1MΩ

Selectable operations

Selectable range

Rd:25Ω-1

Current setting2)Rd-minOptions

Auto

Displayed when the measurement range is automatically selected.

ManualDisplayed when the measurement range is manually selected (hold).

DOWN

Switches the measurement range to a range having lower impedance by zero.

UP

Switches the measurement range to a range having higher impedance by one.

Rd-min

Displays the minimum output impedance setting menu of drive signal source.

The measurement range can be changed with a numeric key, one step at a time. If DOWN or UP is
operated, the measurement range is held (manual selection). Note that the measurement range ofimpedance should be lowered when measuring larger capacitance C or admittance |Y|.
Perform the EXIT operation to return to the measurement screen.
_SHIFT_

3-38_AUTO/HOLD_ | [RANGE]ZM2376

3.5

Basic Operations

Rd-min: The minimum output impedance setting menu is as follows.
R-drive min: 25Ω-1

Current setting0)6Ω-100-f1k1)25Ω-12)25Ω-100

3)100Ω

6Ω-100-f1k

For measurement ranges from 100mΩ to 100Ω, this sets the output

Options

impedance to 6Ω.
25Ω-1

For measurement ranges from 100mΩ to 1Ω this sets the output impedance
to 25Ω (initial value).

25Ω-100

For measurement ranges from 100mΩ to 100Ω, this sets the output
impedance to 25Ω100Ω

For all measurement ranges, this sets the output impedance to 100Ω.

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
Each option has the following features:
6Ω-100-f1k : Suitable for large capacitance measurement.
 The settling time is short since the CR time constant is small.
 The variation of measured value is small since the measurement current is large.
 The measurement with almost constant voltage is possible since the voltage drop causedby the output impedance is small.
 The distortion of signal voltage can be reduced even when DUT has nonlinear
voltage-current characteristics.
25Ω-1 : Suitable for general measurement.
When measuring low impedance, the measurement variation of low impedance can be
reduced since the measurement current is large.
25Ω-100 : When measuring a DUT which has nonlinear voltage-current characteristics, themeasured value can be in agreement with the value of an impedance measurement instrument
which has an equivalent output impedance of 25Ω.
This option allows you, for example, to measure the inductance of up to about 150 µH within
the recommended range under the conditions of frequency = 1MHz, signal level = 0.5V, andoutput impedance = 25Ω. When measuring larger inductances, since the impedance of DUT ishigh. Measured values of the rate depending on the output impedance decreases.
100Ω : Suitable for measurement of inductors with core.
When measuring a DUT which has nonlinear voltage-current characteristics, the measured
value can be in agreement with the value of an impedance measurement instrument which has
an output impedance of 100Ω. Note that the variation may become large when measuring low
impedance (small inductance).

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For inductors with core or ceramic capacitors which have nonlinear voltage-current characteristics,
the measured value varies depending on the voltage applied to the DUT, the current flowing in the
DUT, and the signal distortion (waveform). The signal distortion mainly depends on the output
impedance and impedance bridge method of the LCR meter. When the impedance of DUT is low
enough or high enough for the output impedance, almost the same measured value can be ob tained
regardless of the output impedance, by keeping the current flowing in the DUT or the voltage
applied to the DUT constant.

！ CAUTION

When measuring low impedance, if the output impedance is reduced, the voltage
applied to the DUT may increase greatly. When measuring a DUT weak to thereverse voltage or overvoltage, do not exceed the permissible range, forexample, by reducing the measurement signal level in advance.
 When a number of DUTs are measured
It is recommended to hold the measurement range when measuring a number of DUTs having almost
same value. If you connect or disconnect DUTs when both the internal trigger and the automatic
range selection are set, the measurement range is switched at each connection/disconnection toincrease the measurement time.
 Measurement range of DC (direct-current) resistance
If DC resistance is selected as a secondary parameter, the measurement range of DC resistance isdisplayed in the measurement range setting menu. The DC resistance measurement range isindependent from the AC impedance measurement range, and normally it is automatically selected.
In the remote control, it can be held to specific range. To return to automatic selection by the panel
operation, initialize it with the initialize menu.
Measurement range of DC (direct-current) resistance
RANGE:

Manual 100kΩ

DC100mΩ3-40

Rd:25Ω-100

ZM2376

3.5

Basic Operations

3.5.6.4 Trigger
The ZM2376 receive a trigger signal to start the measurement.
With the trigger setting menu, set the trigger source and measurement sequence.
Trigger delay time

Trigger delay time

Trigger delay time

Trigger signal
Measurement
signal output
Signalacquisition
Parameter
calculation
Measurement
resultZ( a ) Continuous drive

Figure 3-6( b ) Triggered driveRdc( c ) When measuring DC resistance

Measurement sequence

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Basic Operations

 Selection of trigger source_SHIFT_ + [ TRIG MODE ]Press the _SHIFT_ + [TRIG MODE] keys to display the trigger setting menu.
Trigger source
TRIG SRC:Ext

Trigger delay

Triggered drive

Delay=100.0000s

SRC Sync=ON2) Ext3) Bus4) Delay5) S . Sync

Current setting0) Int1) ManInt

Internal trigger. Upon completion of measurement, a trigger is

Options

applied automatically and measurement is executed continuously.
Other trigger signals are ignored.
Man

Manual trigger. Press the _TRIG_ key on the front panel to apply
a trigger signal.

Ext

External trigger.

Trigger source

A trigger is applied with TRIG signal through the handler interface.
Bus

A trigger is applied by the remote control.
Refer to the description of *TRG and GET.

Delay

Displays the trigger delay setting menu.

S.Sync

Displays the triggered drive setting menu.

Select a trigger source or perform the EXIT operation to return to the measurement screen.
BUSY

SOURCE SYNC_SHIFT__TRIG_ | [TRIG MODE]

Current trigger source is displayed on the second line of measurement screen (in case of status
display).
A100Ω FAST256 Int OpShLd1m

•

•

•

•

•

•

TRIG SOURCE

Trigger source: Int / Man / Ext / Bus

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Basic Operations

 Applying a trigger (measurement start)_TRIG_
When the trigger source is Man (manual) and the measurement has not been executed, if the_TRIG_ key is pressed, the measurement starts and it is executed only once. One-timemeasurement will take long time when the frequency is lower than 1Hz, or the number of
averaging count is large. Note that the last measured value is displayed during the measurement.
BUSY lamp
During measurement, the BUSY lamp lights up or blinks.
 Trigger delay time: Trigger delay setting menu
The trigger delay time is the time from trigger up to signal acquisition start. The signal settling timevaries depending on the nature of DUT or required accuracy. For the trigger delay time, set long timeto the extent that the measured value does not vary even if the trigger delay time is changed a little.
Press the _SHIFT_ + [TRIG MODE] keys to display the trigger setting menu, and select Delaywith a numeric key and the trigger delay setting menu (see below) will be displayed.
Trigger Delay :0.4567s

Current setting

0.0000s to 999.9999s

Available value ranges

Input a numeric value to set the trigger delay time.
If a setting is made or the EXIT operation is performed, one-previous menu comes back.
If the measurement frequency > 20kHz, the settlement of the internal bridge by
connection/disconnection of DUT will take 10ms at maximum. If the measurement frequency ≤20kHz, the settling time of the internal bridge can be ignored.
For high dielectric type capacitors or inductors with a core having hysteresis characteristics, it isrecommended to acquire the signal after at least one period of signal elapsed (1ms at 1kHz, or 8ms at
120Hz) since the measurement signal was applied to the DUT. It may take long time for settling if
dielectrics absorption of DUT is large.
When the DUT does not have hysteresis or dielectrics absorption, the settling time of signal isdetermined by the following two factors:
1) Time constant determined by the output impedance or maximum drive current of ZM2376 andthe capacitance of DUT.
2) ZM2376 internal settling time
The ZM2376 output impedance and maximum drive current depend on the measurement range.
For details

 “3.5.6.3 Measurement range”

If the DUT is pure capacitance C or inductor L, the signal settles at the time constant C ×Rd or L/Rd
where the ZM2376 output impedance is Rd. Make allowance for the settling time of 5 to 7 times thetime constant. The settling time will vary if the current is limited.

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When the triggered drive is enabled, if the trigger delay time is set to zero, the measurement will beincorrect. If the triggered drive is enabled, it will take time from output of the drive signal tosettlement of the signal. Also, the settling time is required when the frequency or signal level ischanged.
Approximate settling time in the measurement of large capacitance can be obtained from themeasurement frequency, DUT capacitance C (F), and output impedance Rd (Ω).
Measurement frequency 120Hz Settling time = 4ms + 6 × Rd × C
Measurement frequency 1kHz Settling time = 1ms + 6 × Rd × C
Setting example of trigger delay time (in both cases, Rd=100Ω)
Measurement frequency 120Hz, DUT 220µF

Trigger delay time 142ms(about 17 periods of signal)

Measurement frequency 1kHz, DUT 10µF

3-44

Trigger delay time 7ms

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3.5

Basic Operations

 Drive only at measurement: Triggered drive setting menu
Use the triggered drive to add the measurement signal to the DUT only during the required period.
Press the _SHIFT_ + [TRIG MODE] keys to display the trigger setting menu, and select S.Sync
with a numeric key, and the triggered drive setting menu (see below) will be displayed.
Source Sync:ON

Current setting

0)OFF

1)ON

OptionsOFF

Disables triggered drive.
Outputs measurement signal at all times.

ON

Enables triggered drive.
Drives the DUT in synchronization with the trigger, until the signal has beenacquired from the trigger. Once the measurement is completed, the measurement
signal is not output until the next trigger.

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
SOURCE SYNC lamp
The SOURCE SYNC lamp lights up when the triggered drive is enabled.
The triggered drive has the following advantages.
 Reduction of measurement contact degradation
Since the measurement signal can be output only during the required period after the DUT isconnected, the damage to the contact caused by connecting or disconnecting the DUT can be
reduced. With the measurement signal output, connecting or disconnecting the low impedance
DUT (for example, large capacitance) or inductor may damage the measurement contact.
 Reduction of interference caused by close installation
When two or more instruments are installed closely, if the measurement timing is shifted sothat the measurement signals do not overlap, the disturbance from other ZM2376 can be
reduced.
 Reduction of variation in short-time measurement
Since the measurement start phase of signal is always the same, the variation of measured
value becomes small even when the settling time is insufficient. If you want to just monitor thevariation of value and do not need an accurate value, you can shorten the measurement time byunderstanding the correlation with the correct value. This is particularly useful for DUTs withhysteresis characteristics.
The DC bias is maintained constant regardless of the triggered drive setting.
！ CAUTION

When measuring a capacitance with the internal DC bias turned on, charge the
DUT to the same voltage as the bias voltage of the LCR meter before connecting
the DUT. Otherwise, a large charge-discharging current flows even with triggered
drive when the DUT is connected, which may damage the measurement contact.

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3.5.6.5

Basic Operations

Measurement speed_SPEED_
Press the _SPEED_ key to display the measurement speed setting menu.

_SPEED_

Measuring Speed : FAST

Current setting0)RAP 1)FAST 2)MED 3)SLOW 4)VSLO

Available value ranges

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
Current measurement speed is displayed on the second line of measurement screen.
A100Ω FAST256 Int OpShLd1m

•

•

•

•

•

•

SPEED/AVERAGE

Measurement speed: RAPid / FAST / MEDium / SLOW / VerySLOw(Lower-case letters are not displayed)
Table 3-4

Example of measurement time (supplementary value)

Measurement
frequency
(DC)
120Hz

RAP
150ms
10ms
(1 cycle)

Measurement speed
FAST
MED
SLOW
150ms
150ms
218ms
10ms
26ms
126ms
(1 cycle)(3 cycles)(15 cycles)
121ms
5ms
25ms
(120
(4 cycles)(24 cycles)
cycles)
5ms
25ms
121ms

VSLO
616ms
501ms
(60 cycles)
501ms
(500
cycles)
501ms

1kHz

2ms
(1 cycle)

10kHz

2ms

100kHz

2ms

5ms

25ms

121ms

501ms

1MHz

2ms

5ms

25ms

121ms

501ms

Conditions: Measurement range hold, Trigger delay time = 0, Averaging count = 1
The measurement time of direct current (DC) is the time added when DC resistance ismeasured.
The measurement time at each frequencies is the time from input of TRIG signal to
output of EOM signal through the handler interface when DC resistance is not measured.
The values in ( ) at 120Hz and 1kHz express the signal acquisition time with the cyclesof the signal.

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The signal acquisition time is obtained by subtracting the calculation time of about 1ms from themeasurement time given in Table 3-4.

Signal acquisition time [s]After the signal acquisition, the DUT can be replaced.

Frequency [Hz]The signal acquisition time at frequency below 1Hz is about one cycle of the signal.
Figure 3-7

Signal acquisition time Measurement time of DC resistance
When DC resistance Rdc is selected as a secondary parameter, DC resistance is measured
following the measurement of AC impedance.

 “Figure 3-6 Measurement sequence” (c)Accordingly, the measurement time is the sum of the following three values:• Measurement time of AC impedance• Automatic range selection time of DC resistance (about 75 ms × 1 to 75ms × 5)
The measurement range of DC resistance is automatically selected unless the range is held by
remote control.
The adjustment time of measurement range varies depending on the DC resistance.
• Additional time to measure DC resistance “Table 3-4 Example of measurementtime” (DC)3-47

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3.5

Basic Operations

 Measurement time when trigger delay time ≠ 0• Measurement time of AC impedance is extended by the amount of trigger delay time.
• Automatic range selection time of DC resistance is extended up to about maximum trigger
delay time.
• Measurement time of DC resistance is extended by about(trigger delay time - 40ms) × 2 when trigger delay time > 40ms.

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3.5.6.6 Correction of Measurement Error
The ZM2376 can correct the following errors that will occur by a measurement fixture or connection
cable.
 Zero correction
OPEN correction

Corrects the error due to the stray admittance that remains whenmeasurement terminals are opened.

SHORT correction

Corrects the error due to the residual impedance that remains whenmeasurement terminals are shorted.

 LOAD correction
Correct the deviation from the true value. This makes sure that measurement of a standard with aknown value has no error. The LOAD correction cannot be made individually but executed
together with the zero correction.
 Cable length correction
Corrects the additional error due to the connection cable and adjusts the stability of ImpedanceBridge.
Setting of current correction is shown on the second line of measurement screen.
A100Ω

FAST256

Int

OpShLd1m
CORRECTIONOp

OPEN: Indicates the OPEN correction is enabled. (Blank when disabled)Sh

SHORT: Indicates the SHORT correction is enabled. (Blank when disabled)

Ld

LOAD: Indicates the LOAD correction is enabled. (Blank when disabled)

1m

0m / 1m / 2m / 4m: Indicates a setting of cable length correction.

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Basic Operations

 Relationship between OPEN / SHORT / LOAD correction and frequency
The OPEN / SHORT / LOAD correction can be executed either in the specified frequency range orwith one specific frequency. Detailed settings can be set in each correction setting menu.
 When measuring the correction value
GLOBAL correction

The correction value is measured between the specified lower and upper
limit values.

SPOT correction

The correction value is measured only at the current measurement
frequency.

The correction value for DC is always measured in both types of measurement.
For the LOAD standard value, there are also two types of measurement, global and spot.
 When measuring DUT
GLOBAL correction

Only the global correction value is used, and not the spot correction value.

SPOT correction

If the measurement frequency is equal to the spot correction frequency, thespot correction value is used. Otherwise, the global correction value is
used.

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 Direct correction frequencies
In the global correction, the correction value is measured directly at the following frequencies (direct
correction points):
DC / 0.02 / 0.03 / 0.05 / 0.07 /0.1 / 0.15 / 0.22 / 0.33 / 0.5 / 0.7 /1 / 1.5 / 2.2 / 3.3 / 5 / 7 /10 / 15 / 20 / 30 / 40 / 55 / 70 / 90 /110 / 130 / 165 / 220 / 290 / 400 / 500 / 600 / 800 /1k / 1.2k / 1.5k / 2k / 2.5k / 3k / 4k / 5k / 6k / 8k /10k / 12k / 15k / 20k / 25k / 30k / 40k / 50k / 60k / 80k /100k / 120k / 150k / 200k / 250k / 300k / 400k / 500k / 600k / 800k /1M / 1.2M / 1.5M / 2M / 2.5M / 3M / 4M / 5M / 5.5M [Hz]The correction value is measured at the direct correction frequencies required to execute thecorrection in the range between the specified lower and upper limit frequenci es.
For other frequencies, correction values are obtained by interpolation. At a point near resonancepoint where the correction value varies largely depending on the frequency, an error by interpolation
becomes large, and therefore it is recommended to use the spot correction.
 Measurement signal level when measuring correction values
The OPEN, SHORT or LOAD correction value is measured on the measurement signal level at thattime. Since correction values may vary depending on the measurement signal leve l, it isrecommended to measure correction values again when the measurement signal level is changed.
If the measured value after the correction varies at each time of measurement of correction value, it
may mean the variation of correction value. In such a case, measure the correction value on a little
larger measurement signal level. If you execute the correction only at a specific frequency, moreaccurate correction is possible by setting the spot correction value with the following steps.
• Disable the OPEN / SHORT / LOAD correction.
• Reduce the measurement speed and set a large averaging count to restrict the variation.
• Measure the spot correction values.
• Set the spot correction values.
 DC bias when measuring the correction value
Regardless of the DC bias setting, during the measurement of the OPEN or SHORT correction value,
the DC bias is automatically turned off only during that measurement. With the DC bias turned on,
the OPEN and SHORT correction values cannot be measured.

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3.5.6.7 OPEN Correction
Executing the OPEN correction can make the admittance zero when the measurement terminals are
opened.
The OPEN correction value can be measured by opening the measurement terminals, or can be set
with numeric values.
With the measurement terminals open, press the _SHIFT_ + [OPEN] keys to display the OPEN
correction menu, and select Measure, so that the admittance when the measurement terminals are
opened can be corrected to zero.
To set the spot OPEN correction value at the current measurement frequency with a numeric value,
set the correction value in the spot OPEN correction menu and finally select ON.
The operation of OPEN correction is executed with the OPEN correction menu.
_SHIFT_ + [ OPEN ]Press the _SHIFT_ + [OPEN] keys to display the OPEN correction menu.
OFF|ON

Lower limit - Upper limit(or SPOT)

OPEN Correction:OFF

100Hz - 1.0MHz

Current setting0)OFF3)SPOT>NEXT

Options (first page)<PREV

Options (second page)

1)ON2)Measure4)LowFREQ

5)UppFREQOFFDisables the OPEN correction and returns to the measurement screen.
OPEN correction value is held internally.
Enables the OPEN correction and returns to the measurement screen.
Measures the OPEN correction values.
Upon completion, enables the OPEN correction and returns to themeasurement screen.
Displays the spot OPEN correction menu.
When the spot correction is enabled, the correction value is measured with
only the current frequency.
Displays the lower limit frequency setting menu for the global correction.
This can prohibit the correction with unused low frequencies.
Displays the upper limit frequency setting menu for the global correction.
This can prohibit the correction with unused high frequencies.

ON
MeasureSPOT

LowFREQ
UppFREQ

Perform the EXIT operation to return to the measurement screen.
_SHIFT_

3-52_7_ | [OPEN]

ZM2376

3.5

Basic Operations

 Measurement of OPEN correction values
First, place the measurement terminals in open state.
LCUR

LPOT

HPOT

HCUR
Connect the outer conductors (shields) offour coaxial cables together

Connect LCUR
and LPOT

Connect HCUR
and HPOT
Retain the same distance as thatduring DUT measurement

Retain positional relation to ambientdielectrics and conductors same as thatduring DUT measurement
Figure 3-8

Terminal processing at OPEN correction

To measure the OPEN correction values, press the _SHIFT_ + [OPEN] keys to display the OPEN
correction menu, and select Measure with a numeric key. With the initial setting, it will take about
40s to measure the correction values.
During the measurement of OPEN correction values, the following message is displayed.
OPEN Measurement
Running(>1kΩ)

9)ABORT

The measurement of OPEN correction value can be aborted by pressing the _9_ key. The above
message is also used as the correction value measurement abort menu.
Upon completion of OPEN correction value measurement, the OPEN correction is enabled, and thefollowing completion message is displayed for a short time, and then the measurement screen comesback.
Completed

Correction ON

However, when measured value ≤1kΩ, the following warning message is displayed.
Warning: Out of range
Same warning message is also displayed when the measurement failed by any reason. Even if thiswarning message is displayed, the ZM2376 use the obtained measured values as OPEN correction
values. However, the previous OPEN correction values are held for the frequencies at which themeasurement failed.
This warning will disappear when any key is operated or after several seconds have passed.
Perform the EXIT operation to return to one-previous menu.

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When you execute both of the OPEN and SHORT corrections, or when you execute the LOAD
correction, any of OPEN, SHORT, or LOAD correction is not executed and the measured value
becomes CORR Err unless the following condition is met.
Condition for correction : OPEN correction value (|Z|) > SHORT correction value (|Z|) × 2
When the OPEN and SHORT correction values are close, the error will increase unless the LOAD
correction is executed. If the ratio is 1000 times or less, it is recommended to execute the LOAD
correction.

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 Setting of correction lower and upper limit frequencies(Common to OPEN / SHORT / LOAD correction)
For the global correction, you can set the lower and upper limit frequencies for correction.
The initial values are 40Hz for the correction lower limit frequency and 2MHz for the correction
upper limit frequency.
If the correction is not executed for the unused frequency, the measurement time of correction value
can be shortened.
The lower and upper limit frequencies set for the global correction are common to the OPEN,
SHORT, and LOAD corrections. The following describes the operation procedure in the OPEN
correction menu, and the same procedure can be used for the SHORT and LOAD corrections.
_SHIFT_ + [OPEN]>>

OPEN correction menu
For the global correction, the lower and upper limit frequencies are
displayed.

OFF|ONOPEN Correction:OFF
4) LowFREQ
LowFREQ

Correction frequency range
100Hz - 1.0MHz

5) UppFREQ

Current setting<PREV

Options (second page)>> Correction lower limit frequency setting menu

Lower Frequency = 100Hz

Current setting

1mHz to 100kHz

Available ranges

Upper >= Lower*2

Set the lowest measurement frequency to be used.
The lower and upper limit frequencies can be set with two significant digits.
If the upper limit < the lower limit × 2, the upper limit is automatically set to the lower limit × 2.
If a setting is made or the EXIT operation is performed, one-previous menu comes back.
UppFREQ>>

Correction upper limit frequency setting menu

Upper Frequency = 1.0MHz

Current setting

2kHz to 5.5MHz

Available ranges

Lower <= Upper/2

Set the highest measurement frequency to be used.
If the lower limit > the upper limit / 2, the lower limit is automatically set to the upper limit / 2(truncated).
In the global correction, the correction value is measured at the direct correction points required to
execute the correction in the range between the specified lower and upper limit frequencies. At otherdirect correction points, the correction value is retained without being updated. If the frequency range
is extended, measure the correction value again. Otherwise, the interpolated correction value may beincorrect.

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 Setting spot OPEN correction
To execute the correction with only the current frequency, enable the spot correction.
In the spot correction, compared to the global correction, the measurement time of correction value isshorter, and no interpolation error occurs. The correction of only DC resistance is not supported.
The spot OPEN correction is set as follows.
_SHIFT_ + [OPEN]>>

OPEN correction menu
When the spot correction is enabled, "SPOT" is displayed.
Correction frequency range

SPOT

OPEN Correction:OFF

SPOT0) OFF

3) SPOT>>

1) ON

2) Measure

Current setting>NEXT

Options

Spot OPEN correction menu

SPOT Correction:OFF

Format:Cp-G

0) OFF

1) ON

2) Format

OFF

Disables the spot correction.

@OPEN3) Entry

Current setting
Options

At the correction value measurement, global correction values are measured.
At the DUT measurement, the global correction value is used.
ON

Enables the spot correction.
At the correction value measurement, the spot correction value at the current
measurement frequency is measured.
At the DUT measurement, the spot OPEN correction value is used only when themeasurement frequency is same as the spot OPEN correction frequency. Otherwise
the global correction value is used.

FormatDisplays the format setting menu for spot OPEN correction value.

Entry

Displays the spot OPEN correction value input menu.

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
Whether the spot correction is enabled or disabled is common to the OPEN, SHORT, and LOAD
corrections. It can also be set in the spot SHORT correction menu.
If the measurement frequency is changed when the spot correction is enabled, the OPEN, SHORT,
and LOAD corrections are all disabled automatically. When you want to execute the spot correction
with a new frequency, measure the correction value again.
The spot correction is disabled when recalling either the settings or the correction value.
The spot correction will not be disabled in the following cases.
• When both the setting and the correction value are recalled (Press _SHIFT_ + [RECALL] andselect Both).
• When the frequency is changed during the multi-correction.

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 Setting numeric values/reading of spot OPEN correction value
You can set the spot OPEN correction value at the current measurement frequency with a numericvalue or can read the value to fine tune it.
In the spot OPEN correction menu, first specify the format and then set the value.
_SHIFT_ + [OPEN], _3_ key operations
SPOT Correction: OFF0) OFF
Format

>>

1) ON

>>

Spot OPEN correction menu

Format: Cp-G

2) Format@OPEN3) Entry

Format setting menu for spot OPEN correction value

Format:Cp-G
0)G-B

@OPEN

Current setting1)Cp-G

Options

G

Stray conductance (unit: S)

B

Stray susceptance (unit: S)

Cp

Stray capacitance

G

G

B
Cp

(parallel equivalent circuit, unit: F)
If a setting is made or the EXIT operation is performed, one-previous menu comes back.
Entry

>>

Spot OPEN correction value input menu
Example:Correction value for the Cp-G format

Co-OPEN=Cp: +123.456pF±(0.0000p to 999999M)

G:+1.23456µS

Z>1kΩ

1.00000kHz

Current value
Available ranges

Spot OPEN correction frequency
Frequency when the correction value is measured or set, If disabled, "---"
Set the measured value in the open state measured with all of the OPEN, SHORT, and LOAD
corrections disabled. Initially, the cursor exists on the previous value. When the previous value isinput and entered with the

ENTR key, the cursor moves to the next value, indicating that thenext value can be input. The cursor can be moved between previous and next values by pressingtheBS| [PREV] or

EXP| [NEXT] key. If either one of the values is set, the measurement

frequency at that time is recorded as the spot OPEN correction frequency.
Perform the EXIT operation to return to one-previous menu.
If the spot OPEN correction value is set, the OPEN correction is disabled. To use the set correction
value, enable both the spot correction and the OPEN correction.
Though the warning message will be displayed for the input of correction value of impedance ≤1kΩ, it is set as it is as the spot OPEN correction value.
If the spot OPEN correction value is zero, the measured value remains as it was before thecorrection even when the correction is executed.

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3.5.6.8 SHORT Correction
Executing the SHORT correction can make the impedance zero when the measurement ter minals areshorted.
The SHORT correction values can be measured by shorting the measurement terminals, or can be set
with numeric values.
With the measurement terminals short, press the _SHIFT_ + [SHORT] keys to display the SHORT
correction menu, and select Measure, so that the impedance when the measurement terminals areshorted can be corrected to zero.
To set the spot SHORT correction value at the current measurement frequency with a numeric value,
set the correction value in the spot SHORT correction menu and finally select ON.
The operation of SHORT correction is executed with the SHORT correction menu.
_SHIFT_ + [ SHORT ]Press the _SHIFT_ + [SHORT] keys to display the SHORT correction menu.
OFF|ONSHORT Correction: OFF0) OFF

1) ON

4) LowFREQ
OFF
ON
MeasureSPOT
LowFREQ
UppFREQ

2) Measure

Lower limit - Upper limit or SPOT
100Hz - 1.0MHz
3) SPOT

5) UppFREQ

Current setting>NEXT

Options (first page)<PREV

Options (second page)

Disables the SHORT correction and returns to the measurement screen.
SHORT correction value is held internally.
Enables the SHORT correction and returns to the measurement screen.
Measures the SHORT correction value.
Upon completion, enables the SHORT correction and returns to themeasurement screen.
Displays the spot SHORT correction menu.
Displays the lower limit frequency setting menu for the global correction.
Displays the upper limit frequency setting menu for the global correction.

Perform the EXIT operation to return to the measurement screen.
The lower and upper limit frequencies set for the global correction are common to the OPEN,
SHORT, and LOAD corrections.
Lower limit frequency setting menu
Upper limit frequency setting menu “3.5.6.7 OPEN Correction”_SHIFT_

3-58_8_ | [SHORT]

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3.5

Basic Operations

 Measurement of SHORT correction valueFirst, short the measurement terminals.
LCUR

LPOT

HPOT

HCUR
Connect the outer conductors (shields) offour coaxial cables together

Connect 4 terminals H CUR , L CUR , H POT, L POT together.
Or, short with a metallic piece of low impedance.
Ideally, the voltage between H POT and L POT terminals should be zero.

Retain positional relation to ambient
conductors same as that during
DUT measurement

POT
CUR

Metallic
piece
Metallic piece

As short as possible

Overlap directly

Retain positional relation of the cables, particularly the relation of H CUR - LCUR current loop and H POT LPOT voltage loop same as that during DUT measurement. The loop should be as small as possible toreduce the electromagnetic coupling.

Figure 3-9

Terminal processing at SHORT correction

To measure the SHORT correction value, press the _SHIFT_ + [SHORT] keys to display the
SHORT correction menu, and select Measure with a numeric key.
During the measurement of SHORT correction value, the following message is displayed.
SHORT Measurement
Running(<900Ω)

9)ABORT

The measurement of SHORT correction value can be aborted by pressing the _9_ key.
Upon completion of SHORT correction value measurement, the SHORT correction is enabled, andthe following completion message is displayed for a short time, and then the measurement screen
comes back.
Completed

Correction ON

However, when measured value ≥ 900Ω, the following warning message is displayed.
Warning: Out of range
Same warning message is also displayed when the measurement failed by any reason. Even if thiswarning message is displayed, the ZM2376 use the obtained measured values as SHORT correction
values. However, the previous SHORT correction values are held for the frequencies at which themeasurement failed.
This warning will disappear when any key is operated or after several seconds have passed.
Perform the EXIT operation to return to one-previous menu.

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 Setting spot SHORT correction
To execute the correction with only the current frequency, enable the spot correction.
The spot SHORT correction is set as follows.
_SHIFT_ + [SHORT]>>SHORT correction menu
When the spot correction is enabled, "SPOT" is displayed.
Correction frequency range

SPOT

SHORT Correction: OFF

SPOT0) OFF

3) SPOT>>

1) ON

2) Measure

Current setting>NEXT

Options

Spot SHORT correction menu

SPOT Correction: OFF
2) Format

Format: Ls-Rs0) OFF

1) ON

OFFDisables the spot correction.

@SHORT

3) Entry

Current setting
Options

At the correction value measurement, global correction values are measured.
At the DUT measurement, the global correction value is used.
ON

Enables the spot correction.
At the correction value measurement, the spot correction value at the current
measurement frequency is measured.
At the DUT measurement, the spot SHORT correction value is used only when themeasurement frequency is same as the spot SHORT correction frequency.
Otherwise the global correction value is used.

FormatDisplays the format setting menu for spot SHORT correction value.

Entry

Displays the spot SHORT correction value input menu.

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
Whether the spot correction is enabled or disabled is common to the OPEN, SHORT, and LOAD
corrections. It can also be set in the spot OPEN correction menu.
If the measurement frequency is changed when the spot correction is enabled, the OPEN, SHORT,
and LOAD corrections are all disabled automatically. When you want to execute the spot correction
with a new frequency, measure the correction value again.

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 Setting numeric values/reading of spot SHORT correction value
You can set the spot SHORT correction value at the current measurement frequency with a numericvalue or can read the value to fine tune it.
In the spot SHORT correction menu, first specify the format and then set the value.
_SHIFT_ + [SHORT], _3_ key operations
SPOT Correction: OFF0) OFF
Format

>>

1) ON

>>

Spot SHORT correction menu

Format:Ls-Rs

2) Format@SHORT

3) Entry

Format setting menu for spot SHORT correction value

Format: Ls-Rs@SHORT

Current setting0) Rs-X

1) Ls-Rs

Rs

Residual resistance (unit: Ω)X

Residual reactance (unit: Ω)

Ls

Residual inductance (unit: H)

Options
Rs

X

Rs

Ls

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
Entry

>>

Spot SHORT correction value input menu
Example:Correction value for the Rs-X format

Co-SHORT=Rs: +123.456mΩ±(0.0000p to 999999M)

X : +123.456mΩ

Z<900Ω

1.00000kHz

Current value
Available ranges

Spot SHORT correction frequency
Frequency when the correction value is measured or set
If disabled, "---"
Set the measured value in the short state measured with all of the OPEN, SHORT, and LOAD
corrections disabled. Initially, the cursor exists on the previous value. When the previous value isinput and entered with the _ENTR_ key, the cursor moves to the next value, indicating that thenext value can be input. The cursor can be moved between previous and next values by pressing
the _BS_ | [PREV] or _EXP_ | [NEXT] key. If either one of the values is set, the measurement
frequency at that time is recorded as the spot SHORT correction frequency.
Perform the EXIT operation to return to one-previous menu.
If the spot SHORT correction value is set, the SHORT correction is disabled. To use the set
correction value, enable both the spot correction and the SHORT correction.
Though the warning message will be displayed for the input of correction value of impedance ≥900Ω, it is set as it is as the spot SHORT correction value.
If the spot SHORT correction value is zero, the measured value remains as it was before thecorrection even when the correction is executed.

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3.5.6.9 LOAD Correction
The LOAD correction corrects the measurement error caused by the connection circuit network
between the measurement terminals and DUT, based on a standard with a known value. To execute
more accurate correction, use a standard with an impedance as close to that of DUT as possible.
The LOAD correction is always executed together with the OPEN and SHORT c orrections.
Assuming that the circuit is a linear 2-terminal-pair circuit network, the error caused by theconnection circuit network can be removed by executing the OPEN, SHORT, and LOAD corrections.
The LOAD correction also has the effect of reducing a small error which occurs under certain
conditions of frequency, signal level, measurement range, and so on. However, if the expected model
differs from the actual model, the error may be rather increased.
The OPEN correction value, the SHORT correction value, and the LOAD correction value can bemeasured as often as needed in an arbitrary order. It is also possible to change the LOAD standard
value later.
Cable length

HCUR

OPEN

HPOT
2-terminal-pair

SHORT

circuit network

LOAD

LPOT

DUT

LCUR

Figure 3-10 Connection circuit network for LOAD correction

Typical LOAD correction procedures are described below.

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Basic Operations

 Spot LOAD correction procedure 1 (When the value of the standard is known)
If you only need to execute the correction at a specific frequency and the correct value of t hestandard at that frequency is known in advance, perform the following steps to execute the LOAD
correction.
Enables the spot correction.

Disables the OPEN correction and the SHORT correction.



Set the exact value of the standard as the LOAD standard value.

 _SHIFT_ + [LOAD] >> SPOT >> Format setting, STD setting>>

EXIT operation

Connect the standard at the end of the actual connection circuit network and measure the LOAD
correction value.

 Measure

The LOAD correction is automatically enabled.



Execute the OPEN correction and the SHORT correction at the end of the actual connection
circuit network.

 Spot LOAD correction procedure 2 (When the value of the standard is unknown)
If you only need to execute the correction at a specific frequency but the correct value of the standard
cannot be obtained, perform the following steps to execute the LOAD correction.
Enables the spot correction.

Disables the LOAD correction.



Execute the OPEN correction and the SHORT correction with a smallest addit ional error, andthen measure the LOAD standard value with the standard.

 _SHIFT_ + [LOAD] >> STD-Meas
For example, directly connect the standard to the measurement terminals and execute themeasurement. You may use a direct-coupled type test fixture (4-terminal connection type)attached to a part with stable characteristics as the standard.


Disables the OPEN correction and the SHORT correction.

Connect the standard at the end of the actual connection circuit network and measure the LOAD
correction value.

 Measure

The LOAD correction is automatically enabled.



Execute the OPEN correction and the SHORT correction again at the end of the actual
connection circuit network.

If the correction is performed correctly, almost the same value is obtained as the direct connection
even when the measurement is executed at the end of the connection circuit network.

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 Global LOAD correction procedure (When the value of the standard is not known)
To execute the correction in the range between the specified lower and upper limit frequencies,
perform the following steps to execute the LOAD correction.
Disables the spot correction. Also, disables the LOAD correction.



Execute the OPEN correction and the SHORT correction with a smallest additional error, andthen measure the LOAD standard value with the standard.



Disables the OPEN correction and the SHORT correction.

Connect the standard at the end of the actual connection circuit network and measure the LOAD
correction value.



The LOAD correction is automatically enabled.



Execute the OPEN correction and the SHORT correction again at the end of the actual
connection circuit network.

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 LOAD correction menu
The operation of LOAD correction is executed with the LOAD correction menu.
_SHIFT_ + [ LOAD ]Press the _SHIFT_ + [LOAD] keys to display the LOAD correction menu.
OFF|ON

Lower limit - Upper limit or SPOTLOAD Correction: OFF

100Hz - 1.0MHz0 ) OFF

3) SPOT>NEXT

Options (first page)6) STD-Meas<PREV

Options (second page)

1) ON

4) LowFREQOFF2) Measure5) UppFREQ

Current setting

Disables the LOAD correction and returns to the measurement screen.
LOAD correction value is held internally.

ON

Enables the LOAD correction and returns to the measurement screen.
The OPEN correction and SHORT correction are also enabled.

MeasureMeasures the LOAD correction value.
Before measurement, connect the standard with a known value at the end of
the actual connection circuit network.

SPOT

Displays the spot LOAD correction menu.

LowFREQ

Displays the lower limit frequency setting menu for the global correction.

UppFREQ

Displays the upper limit frequency setting menu for the global correction.

STD-Meas

Measures the LOAD standard value.
Before measurement, connect

the standard under high measurement accuracy

conditions.
If a setting is made or the EXIT operation is performed, the measurement screen comes back.
The lower and upper limit frequencies set for the global correction are common to the OPEN,
SHORT, and LOAD corrections.
Lower limit frequency setting menu
Upper limit frequency setting menu “3.5.6.7 OPEN Correction”

The LOAD correction of DC resistance Rdc is not supported.

_SHIFT_

3-65_9_ | [LOAD]

ZM2376

3.5

Basic Operations

 Setting spot LOAD correction
To execute the correction with only the current frequency, enable the spot correction.
The spot LOAD correction is set as follows.
_SHIFT_ + [LOAD]>>

LOAD correction menu
When the spot correction is enabled, "SPOT" is displayed.
Correction frequency range

LOAD Correction: OFF0) OFF
SPOT

>>

1) ON

SPOT

2) Measure3) SPOT

Current setting>NEXT

Options

Spot LOAD correction menu

SPOT Correction: OFF
2) Format

Format: Cp-D

0) OFF

1) ON

3) STDOFF

Disables the spot correction.

@LOAD4) Entry

Current setting
Options

At the correction value measurement, global correction values are measured.
At the standard value measurement, global standard values are measured.
At the DUT measurement, the global correction value and the global standard value
are used.
ON

Enables the spot correction.
At the correction value measurement, the spot correction value at the current
measurement frequency is measured.
At the standard value measurement, the spot standard value at the current
measurement frequency is measured.
At the DUT measurement, the spot correction value and the spot standard value areused only when the measurement frequency is same as the spot LOAD correction
frequency. Otherwise the global correction value and the global standard value areused.

FormatDisplays the format setting menu for LOAD correction.

STD

Displays the spot LOAD standard value input menu.

Entry

Displays the spot LOAD correction value input menu.

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
Whether the spot correction is enabled or disabled is common to the OPEN, SHORT, and LOAD
corrections.
If the measurement frequency is changed when the spot correction is enabled, the OPEN, SHORT,
and LOAD corrections are all disabled automatically. When you want to execute the spot correction
with a new frequency, measure the correction value again. When recalling from the setting memory,
the OPEN, SHORT, and LOAD corrections are not disabled even if the frequency is changed due tothe operation, and the saved settings are restored. Even if the frequency is automatically changed by

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the multi-measurement, the OPEN, SHORT, and LOAD corrections are not disabled, and theprevious setting of enable/disable is held.
Format>>Format setting menu for LOAD correction

LOAD Standard format: Cp-D
0) Cp-D

1) Cs-D4) Rs-X

5) Z-θ

2) Rp-Cp

Current setting3) Rs-Ls>NEXT

Options (first page)<PREV

Options (second page)

Select the format to use when setting the spot LOAD correction value or the spot LOAD standard
value with numeric values or displaying them.
If a setting is made or the EXIT operation is performed, one-previous menu comes back.
STD>>

Spot LOAD standard value input menu
Example: Standard value for the Cp-D format

LOAD STD= Cp: +1.23456µF

D: +234.56m±(0.0000p to 999999M)

1.00000kHz

Current value
Available ranges

Spot LOAD correction frequency
Frequency when the correction or standard value is set or measured
If disabled, "---"
Enter the calibration value (exact value) of the standard.
Initially, the cursor exists on the previous value. When the previous value is input and entered with
the _ENTR_ key, the cursor moves to the next value, indicating that the next value can be input.
The cursor can be moved between previous and next values by pressing the _BS_ | [PREV] or_EXP_ | [NEXT] key.
If a setting is made or the EXIT operation is performed, one-previous menu comes back.

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Entry

>>

Basic Operations

Spot LOAD correction value input menu
Correction value for the Cp-D format (example)

Co-LOAD=Cp: +1.02345µF

D: +123.456m±(0.0001p to 999999M)

Current value
1.00000kHz

Available ranges

Spot LOAD correction frequency
Set the value of the standard measured with all of the OPEN, SHORT, and LOAD corrections
disabled. Initially, the cursor exists on the previous value. When the previous value is input andentered with the _ENTR_ key, the cursor moves to the next value, indicating that the next value
can be input. The cursor can be moved between previous and next values by pressing the _BS_ |[PREV] or _EXP_ | [NEXT] key. If you specify an extreme value which ZM2376 cannot calculate,an error occurs, and it cannot be set.
Perform the EXIT operation to return to one-previous menu.
If the spot LOAD correction value is set, the LOAD correction is disabled. To us e the set
correction value, enable both the spot correction and the LOAD correction.
 Setting LOAD standard value with numeric values (Spot correction)
To use a known calibration value of a standard for the spot LOAD correction, specify the format andthen set the standard value in the spot LOAD correction menu.
_SHIFT_ + [LOAD]>>

LOAD correction menu

LOAD Correction: OFF0) OFF
SPOT

>>

1) ON

2) Measure3) SPOT>NEXT

Spot LOAD correction menu

SPOT Correction: OFF0) OFF
Format100Hz - 1.0MHz

>>

1) ON

2) Format

Format: Cp-D
3) STD@LOAD

4) Entry

Format setting menu for LOAD correction

LOAD Standard format: Cp-D
0) Cp-D
STD>>

1) Cs-D

2) Rp-Cp

3) Rs-Ls>NEXT

Spot LOAD standard value input menu

LOAD STD= Cp: +1.23456µF

D: +234.56m±(0.0000p to 999999M)

1.00000kHz

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 Setting numeric values/Reading of LOAD correction value (Spot correction)
To use the pre-measured value of a standard as the spot LOAD correction value, specify the format
and then set the correction value in the spot LOAD correction menu.
It is also possible to read the correction value to fine tune it.
_SHIFT_ + [LOAD]>>

LOAD correction menu

LOAD Correction: OFF0) OFF
SPOT

>>

1) ON

2) Measure0) OFF>>

3) SPOT>NEXT

Spot LOAD correction menu

SPOT Correction: OFF

Format100Hz - 1.0MHz

1) ON

Format: Cp-D

2) Format3) STD@LOAD

4) Entry

Format setting menu for LOAD correction

LOAD Standard format: Cp-D
0) Cp-D
Entry>>1) Cs-D

2) Rp-Cp

3) Rs-Ls>NEXT

Spot LOAD correction value input menu

CO-LOAD= Cp: +1.02345µF

D: +123.456m±(0.0001p to 999999M)

1.00000kHz

If the entered value differs by 20% or more from the standard value, the warning message isdisplayed as in the case of measuring the correction value.


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 Measuring LOAD standard value
The LOAD standard value can be measured similarly to the normal DUT measurement.
 Setting of measurement conditions
As a reference value is measured, the measurement accuracy should be as high as possible, andthe measurement variation should be small. Set the measurement signal level to 1V and themeasurement speed to SLOW or VSLO. Also, the measurement range, output impedance, trigger
delay time, and others need to be set properly.
 Preparations for connecting the standard
Remove the connection circuit network between ZM2376 for the LOAD correction and DUT so
as to connect the standard and ZM2376 directly with a cable length of 0m. An additional error
should be much smaller than that of the connection circuit network for correction.
 Disables OPEN correction and SHORT correction.
 Connection of standard for LOAD correction.
Use a 4-terminal connection as much as possible. Otherwise, use a test fixture of 2-terminal
connection in an impedance range where the contact resistance has less impact.

Figure 3-11

Measurement of LOAD standard value

When a test fixture is used to connect the standard (part) and the LCR meter, an exac t LOAD
standard value can be obtained only in lower frequencies where the additional error due to the test
fixture can be ignored. In higher frequencies, the test fixture itself generates an additional error
which needs the LOAD correction.

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 Disables the OPEN correction and the SHORT correction.
 Measurement of LOAD standard value
Select STD-Meas in the LOAD correction menu.
_SHIFT_ + [LOAD]>>

LOAD correction menu

LOAD Correction: OFF0) OFF

1) ON

4) LowFREQ>>_6_ key

100Hz - 1.0MHz

2) Measure5) UppFREQ

3) SPOT>NEXT

6) STD-Meas <PREV

Options (first page)
Options (second page)

During the measurement of LOAD standard value, the following message is displayed.
LOAD Standard Measurement
Running9) ABORT

The measurement of LOAD standard value can be aborted by pressing the _9_ key.
When the LOAD standard value measurement is completed properly, the following completion
message is displayed for a short time, and then the LOAD correction menu (first page) comes back.
Completed
If the measurement cannot be executed properly, the previous LOAD standard value is retained, andthe following warning message is displayed.
Warning: Out of range
This warning will disappear when any key is operated or after several seconds have pass ed.

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Basic Operations

 Measuring LOAD correction value Setting of measurement conditions
The LOAD correction value may vary depending of the measurement conditions such asmeasurement range and signal level. Thus, in principle, the LOAD correction value should bemeasured under the same measurement conditions as when measuring DUT. When themeasurement condition is changed, it is recommended to execute the LOAD correction again.
Examples of measurement conditions:
Measurement frequency, measurement signal level, measurement range,measurement speed, averaging count, triggered drive, trigger delay time,
cable length, and DC bias.
If the signal level is small, the correction value may vary due to noise. If the variation is problem,
increase the signal level or reduce the measurement speed to restrict it.
 Preparations of connection circuit network
Connect the same connection circuit network as when actually measuring DUT.
 Disables the OPEN correction and the SHORT correction.
 Connection of standard for LOAD correction.
Attach the standard for LOAD correction at the end of the connection circuit network forcorrection.

Actually used connection circuit network

Standard / OPEN / SHORT
Figure 3-12

Measurement of LOAD correction value

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Basic Operations

To measure LOAD correction value, select Measure with the LOAD correction menu.
_SHIFT_ + [LOAD]>>

LOAD correction menu

LOAD Correction: OFF0) OFF

1) ON>>_2_ key

100Hz - 1.0MHz

2) Measure3) SPOT>NEXT

During the measurement of LOAD correction value, the following message is displayed.
LOAD Measurement
Running+/-20%

9) ABORT

The measurement of LOAD correction value can be aborted by pressing the _9_ key.
Upon successful completion of LOAD correction value measurement, the LOAD correction isenabled, and the following completion message is displayed for a moment, and then the measurement
screen comes back.
Completed

Correction ON

When the standard for LOAD correction is measured and the measured value different more than
20% from the set standard value is obtained, the following warning message is displayed.
Warning: Out of range
This warning will disappear when any key is operated or after several seconds have passed.
When the LOAD correction value cannot be obtained by any reason, the previous LOAD correction
value is retained, and the same warning message as the above is displayed. When the warning isdisplayed, it is recommended to measure the standard for LOAD correction to check fo r failures, asin the case of usual DUT measurement. Even if the obtained LOAD correction value is out of therange of "standard value ±20%", the LOAD correction is executed based on the standard value andthe obtained correction value.

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3.5.6.10 Cable Length Correction
The cable length correction corrects an additional error due to the connection cable between ZM2376
and DUT. ZM2376 uses coaxial cables of impedance 50Ω (cable capacitance = about 105pF/m) andthe length of four cables must be same. If the cables have different characteristics, the correction
cannot be performed correctly.
The cable length correction is operated with the cable length correction menu.
_SHIFT_ + [ CABLE ]Press the _SHIFT_ + [CABLE] keys to display the Cable Length correction menu.
CABLE Length: 0m
0) 0m

1) 1m

2) 2m

Current setting
3) 4m

4) 4m

Options

Select the cable length with a numeric key according to the actual cable length.
4m can be selected with either _3_ key or _4_ key.
If a selection is made or the EXIT operation is performed, the measurement screen comes back.
_SHIFT_

3-74_6_ | [CABLE]

ZM2376

4． ADVANCED OPERATIONS

4． ADVANCED OPERATIONS ............................................. 4-1
4.1 Measuring with Specific Voltage or Current (ALC) ............. 4-2
4.2 Restricting the Variation of Measured Value (Averaging) ... 4-6
4.3 Displaying the Deviation from the Reference Value ........... 4-7
4.4 Sorting the Part (Comparator) ......................................... 4-10
4.5 Connecting to the Part handler (Handler Interface) .......... 4-21
4.6 Measuring with More Than One Condition(Multi-measurement) ...................................................... 4-30
4.7 Changing the Contents Displayed on the Second Line of
Measurement Screen (Auxiliary Display) ........................ 4-37
4.8 Saving/Recalling the Setting and Correction Value into theMemory .......................................................................... 4-39
4.9 Setting the Contact Check ............................................... 4-41
4.10 Applying the DC Bias Voltage ........................................ 4-44
4.11 Applying the DC Bias Current ........................................ 4-51
4.12 Disabling the Key-Operation of Panel ............................ 4-54
4.13 Changing the Settling Wait Time During Automatic
Adjustment ..................................................................... 4-55
4.14 Initializing of All Settings ................................................ 4-56
4.15 Self-Diagnosis ............................................................... 4-59
4.16 Checking the Version ..................................................... 4-60
4.17 Remote Control ............................................................. 4-61
4.18 Switching the Operation Mode (alternative command) ... 4-62

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4.1

4.1

Measuring with Constant Voltage or Current (ALC)

Measuring with Constant Voltage or Current (ALC)

Enable the ALC function when the DUT is to be driven with constant voltage or constant current.
ALC: Automatic Level Control
CV: Constant Voltage
CC: Constant Current
Set or check the voltage or current value in advance when specifying the CV or CC. Otherwise, an
unexpected large signal may be given to the DUT.

_SHIFT_ + [ ALC ]_SHIFT_ + [ALC] keys to display the ALC setting menu.
Measurement signal level
ALC:CV0)OFF

Source 1.2574V
1)CV

2)CC

3)Current

Current setting
OptionsOFF

Disables the ALC function (CV and CC).

CV

Enables the constant voltage function. CC is disabled.
(Voltage  Measurement signal level setting menu)

CC

Enables the constant current function. CV is disabled.
(Current  Current setting menu)

Current

Displays the current setting menu.

If a setting is made or the EXIT operation is performed, the measurement screen comes back.
When CV or CC is enabled, the automatically adjusted measurement signal level at the time when
this menu is activated (voltage with the HCUR terminal opened) is displayed at the bottom right.
The measurement error depends on this signal level. Note that the measurement error can increaseat a low signal level.

_SHIFT_

4-2_LEVEL_ | [ALC]ZM2376

4.1

Measuring with Constant Voltage or Current (ALC)

When ALC function is enabled, “c” is displayed before the measurement signal level.
•

•

•

•

•

•

•

1.00000M

Measurement frequency Hz

•

•

•

•

•

•

•

c1.00

V

Voltage Vrms

•

•

•

•

•

•

•

c1.00mA

Current Arms

！ CAUTION

With the constant voltage function enabled, if the DUT is removed after small
impedance was measured, the maximum 5Vrms signal may be output.
With the constant current function enabled, if the measurement terminals are
opened, the maximum 5Vrms signal may be output.

Current: The current setting menu is as follows.
Current: 1.00mA

Current setting

0.0010mA to 200mA

Available value ranges

The setting resolution is 3 digits (0.1µA when < 10µA).
If a setting is made or the EXIT operation is performed, one-previous menu comes back.

4-3

ZM2376

4.1

Measuring with Constant Voltage or Current (ALC)

When the ALC function (CV or CC) is enabled, ZM2376 repeats the measurement while adjusting
the measurement signal level until the following values are obtained.
CV: Voltage monitored value is the set value ± 1% of set value.
CC: Current monitored value is the set value ± (1% of set value + 0.02% of max. drive / detection
current in measurement range)
Accordingly, the measurement will take time.
When the measurement range is automatic selection, first the measurement range is selected anddetermined. Then, the measurement signal level is changed in a range of 10mVrms to 5Vrms toadjust to the specified voltage or current. It cannot be adjusted to a value that exceeds the maximum
current or voltage which can be detected with the measurement range.
There are the following other restrictions.
 Due to the characteristic variations of ZM2376, the voltage or current may not be adjusted tosettable maximum voltage or maximum current.
 The upper limit of the adjustable range of the measurement signal level is restricted to 1.2V inthe following conditions.
Rd: Minimum output impedance
Rd = 25Ω-100

CV is enabled, and the signal level ≤ 1.05Vrms

Rd = 6Ω-100-f1k

CV is enabled, and the signal level ≤ 1.05Vrms
CC is enabled, and the current setting ≥ 40mArms

 When the DC bias output is on, the DC bias voltage takes precedence, and the adjustable r angeof the measurement signal level is restricted as follows.
Measurement signal level < 5 - (DC bias voltage setting value [V]) × 0.7071 [Vrms]
When the auto DC balance function is enabled, use the following value instead of the DC bias
setting value.
DC bias voltage setting value[V] + 0.25[V] (up to 5[V]) With a DC bias currency (leak current), the adjustable range decreases.
 When the voltage-current characteristic of DUT is extremely nonlinear or the value changes inshort term, the specified voltage or current cannot be obtained, and an error occurs(measurement value ALC Err) even though the measurement signal level is adjusted
repeatedly.

4-4

ZM2376

4.1

Measuring with Constant Voltage or Current (ALC)

When you measure a high-dielectric type ceramic capacitor that has nonlinear characteristic, it isrecommended to use up to about 10µF at 1kHz and about 100µF at 120Hz. The measured value may
change due to signal distortion, when the voltage drop caused by the output impedance increases.
10m
Output impedance Rd = 6Ω
D = 0.2, Sum of cable resistance and contact resistance = 0.5Ω
Rd=6Ω (measure range 100Ω)
can be used only at 1kHz, 1.05V.

Cp max F

1m

120Hz
100µ
1kHz

10µ
0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

0.9

1

1.1

DUT terminal
voltage Vrms
試料端子電圧Vrms

Figure 4-1 Maximum capacitance measurable at constant voltage (supplementary value)

1

上限
Upper limit

1kHz, Q =下限
Lower limit

Rd: Output impedance

インダクタンス
Indactance H H

100m

Rd=100Ω
5V
Measureable range

Rd=6Ω
can be used only at≤1kHz, ≥40mA

10m

Rd=6Ω
1.2V

1m
Rd=100Ω
10mV

100µ
10µ

100µ

Rd=
25Ω
10mV

Rd=25
can be used only when

Rd=
25Ω
5V

Z≤1Ω (L≤159µH)

1m
10m
Current
Arms
電流 Arms

100m

1

Figure 4-2 Inductance range measurable at constant voltage (supplementary value)

4-5

ZM2376

4.2

4.2

Restricting the Variation of Measured Value (Averaging)

Restricting the Variation of Measured Value (Averaging)

When measured values vary due to the noise, it is able to restrict the variation by the averaging
function.
_SHIFT_ + [AVERAGE]
Press the _SHIFT_ + [AVERAGE] keys to display the averaging count setting menu.
Averaging times = 256, ON

Current setting

1 to 256

Available value ranges

Enter the averaging count with the numeric key, and press the _ENTR_ key.
If a setting is made or the EXIT operation is performed, the measurement screen comes back.
If the averaging count is set to “1”, the averaging function is disabled (OFF).
If the averaging count is set to “2 to 256”, the averaging function is enabled (ON).

_SHIFT__SPEED_ | [AVERAGE]

The current averaging count is displayed on the second line in measurement screen.
A100kΩ FAST256 Int OpShLd1m••••••

SPEED/AVERAGE

Averaging count: 1  256
When the averaging function is enabled, the signal acquisition time becomes the multiple
number of the averaging count. To sensitively adjust the measurement speed in consideration of
the balance with the variation or fluctuation of measured values, speed up the measurement
speed and adjust it by the averaging count.
Even if the measurement speed is RAP or FAST, increase the averaging count, so that themeasurement accuracy achieved when measurement speed is MED can be used when the signal
acquisition time of MED is exceeding.

4-6

ZM2376

4.3

4.3

Displaying the Deviation from the Reference Value

Displaying the Deviation from the Reference Value

It is able to display the deviation or deviation% from the reference value of measured values.
To display the deviation or deviation%, previously specify the given primary and secondary
parameters. Also, set the reference value for obtaining the deviation.
 Displaying the deviation of primary parameter_SHIFT_ + [ ∆Pri ]_SHIFT_ + [Pri] keys to display the Displaying the deviation of primary parameter menu.
Display format

Reference value for deviation display

Deviation Pri:ABS

REF:+1.23456µF

0)ABS

1)DEV

2)DEV%3)REF

ABS

Displays the measured value as is. (default value)

DEV

Displays the deviation from reference value.

Current setting
Options

Deviation = Measured value – Reference value
DEV%

Displays the deviation % from the reference value.
Deviation % = ((Measured value – Reference value) / Reference value) × 100

REF

Display the reference value setting menu of primary parameter.

Select one of ABS, DEV or DEV% as the display format with the numeric key.
To display the deviation or deviation%, previously set the reference value.
If a setting is made or the EXIT operation is performed, the measurement screen comes back.
REF: The reference value setting menu of the primary parameter is as follows.
Pri Reference:+1.23456µF

Current setting±(0.0000p to 999999M)

Available value ranges

Enter the numeric value and use the _ENTR_ key or the exponential part input _EXP_ + [µ] keys
for instance. If a setting is made or the EXIT operation is performed, one-previous menu comesback.
When the deviation or deviation% is selected, the “∆” displayed in front of measured value ofprimary parameter.
∆Cp:+ 23.456 %D:+0.12345

1.00000k_SHIFT_

4-7_Pri_ | [∆Pri]

ZM2376

4.3

Displaying the Deviation from the Reference Value Displaying the deviation of secondary parameter_SHIFT_ + [ ∆Sec ]_SHIFT_ + [∆Sec] keys to display the Displaying the deviation of secondary parameter menu.
Display format

Reference value for deviation display

Deviation Sec:ABS

REF:+1.23456
2)DEV%

Current setting

0)ABS

1)DEV

3)REF

ABS

Displays the measured value as is. (Initial value)

DEV

Displays the deviation from reference value.

Options

Deviation = Measured value – Reference value
DEV%

Displays the deviation % from the reference value.
Deviation % = ((Measured value – Reference value) / Reference value) × 100

REF

Display the reference value setting menu of secondary parameter.

Select one of ABS, DEV or DEV% as the display format with the numeric key.
To display the deviation or deviation%, previously set the reference value.
If a setting is made or the EXIT operation is performed, the measurement screen comes back.
REF: The reference value setting menu of the secondary parameter is as follows.
Sec Reference:+1.23456

Current setting±(0.0000p to 999999M)

Available value ranges

Enter the numeric value and use the _ENTR_ key or the exponential part input _EXP_ + [µ] keys
for instance. If a setting is made or the EXIT operation is performed, one-previous menu comesback.
When the deviation or deviation% is selected, the “∆” displayed in front of measured value of
secondary parameter.
Cp:+12.3456µF ∆D :+0.12345

1.00000k_SHIFT_

4-8_Sec_ | [∆Sec]

ZM2376

4.3

Displaying the Deviation from the Reference Value

The displaying ranges for deviation% both for primary and secondary parameters are shown as
follows:
Deviation%±(0.000 to 999.999), Fixed decimal place

The unit of reference value depends on the parameter (ex. Z  Ω   °).
When the parameter is changed, the unit to be displayed is also changed (ex. C, 2.2mF  L, 2.2mH).
When the primary or secondary parameter to be displayed is changed, the display is changed from theone of deviation and deviation% into the other of original measured value as is for both prima ry andsecondary parameters. To display the deviation or deviation%, previously set the given primary andsecondary parameters. Also confirm that “” is displayed in front of measured value.
The display format for measured value and the comparison format for comparator are common. Also
the reference value for obtaining the deviation is common for both display and comparator. For bothprimary and secondary parameters, even if either display or comparator is set up, the same display
format or comparison format or reference value is obtained.

4-9

ZM2376

4.4

4.4

Sorting the Part (Comparator)

Sorting the Part (Comparator)

For ZM2376, up to 14 bins for primary parameter and one set range for secondary parameter can be
set to sort the comparison results.
 Limit comparison
The remote control allows the use of limit comparison function wherein sorting is done while
upper/lower limit (one set) of primary parameter and upper/lower limit (one set) of secondary
parameter are being set. The limit comparison function is not made into effect through the panel.
Once the limit comparison function is made into effect, independent of the setting for Bin sorting,comparison can be done only for one set (common to BIN1 for Bin sorting) of upper/lower limit
values of primary parameter and one set (common to secondary parameter for Bin sorting) of
upper/lower limit values of secondary parameter. In this case, the comparison for Bin 2 to BIN14 is
not conducted.
For detail, see the explanation for the following commands stated in “ZM2376 Instruction Manual(Remote Control)”.
:CALCulate:COMParator[:STATe] Command:CALCulate1:LIMit Subsystem Command:CALCulate2:LIMit Subsystem Command
When you use alternative commands, see the explanation for the following command stated in“ZM2376 Instruction Manual (Alternative Commands)”.
:COMParator Subsystem Command Multi-measurement
In the multi-measurement function, which measures with more than one condition, the comparator
and handler interface operate in a slightly different way.
Details • • • “4.6 Measuring with More Than One Condition (Multi-measurement)”

4-10

ZM2376

4.4

Sorting the Part (Comparator)

 Output of comparator result
The comparator result are displayed on the front panel and also output from the Handler interface ofrear panel. The relation between measured values of primary/secondary parameters, setting ofupper/lower limit values and comparator result is as follows.
In bin sorting

Primary parameter
→

P-HI

P-IN

OUT OF BINS, PHI
BIN1  BIN14
S-NG

S-NG

:

(Also OUT OF BINSOUT OF BINS, PHI(Also OUT OF BINS()

can be output: Initial( Clearance of Bin )can be output: Initialvalue)

BIN1  BIN14

value)P-LO

OUT OF BINS, PLO

Display:Secondary parameter →In limit comparison
S-LO

S-IN

S-HI

Figure 4–3 Output of comparator result
Signal name  “4.5 Connecting to the Part Handler (Handler Interface)”
The limit comparison also conducts the following comparison. The parameter, which does notconduct comparison, should be regarded as pass one.
IN

Both primary parameter and secondary parameter are passed

OUT OF BINS

Either or both of primary and secondary parameters is failed (initial value)

S-NG

Primary parameter is acceptable but secondary parameter is failed.

However, when the correct value cannot be obtained due to an error, it can be classified as P -HI,S-HI.
 Displaying the measured value when comparator function is enabled
When comparator function is enabled, the COMPRTR lamp on the left of front panel lights up.
The measured values are displayed as follows when comparator function is enabled.
The primary parameter is larger than any upper limits or is between Bins. ERR:

The primary parameter is within one of Bins orNCcomparison of primary parameter is not conducted.

LoC: Low C

The primary parameter is less than any lower limits.

OUT: OUT OF BINSComparison result
Cp:+12.3456µF
•

•

•

•

•

•

D:+0.12345 12
•

•

•

•

•

SNG: S-NG
1.00000k•114: Bin No.
IN

The secondary parameter is larger than the upper limit.

:

The secondary parameter is within the upper/lower limit range orcomparison for secondary parameter is not conducted.

The secondary parameter is less than lower limit.

4-11

ZM2376

4.4

Sorting the Part (Comparator)

The upper or lower limit values of comparator can be displayed on the lower line.
For details • • • “4.7 Changing the Contents Displayed on the Second Line
(Auxiliary Display)” Setting the comparator
The comparator function is set with the comparator setting menu.
_SHIFT_ + [ COMPRTR ]Press the _SHIFT_ + [COMPRTR] keys to display the comparator setting menu.
At limit comparison

L/U

Comparator function ON/OFF

Comparison format of primary parameter

Comparator:OFF0)OFF
3)CLEAR

1)ONABS

Current setting

2)DEV

4)LIMIT>NEXT

Options (first page)<PREV

Options (second page)OFF

Disables the comparator function (Bin sorting). (Default value)

ON

Enables the comparator function (Bin sorting).

DEV

Displays the primary parameter deviation comparison menu for comparator.

CLEAR

Displays the comparator initializing menu.

LIMIT

Displays the comparator upper/lower limit setting menu.

L/U

Appears when primary or secondary parameter limit comparison function isenables. The limit comparison function cannot made enabled through the panel.
Turning on/off of comparator function disables the limit comparison function ofprimary/secondary parameters.

If a setting is made or the EXIT operation is performed, the measurement screen comes back.
COMPRTR lamp
When the comparator function is enabled, the COMPRTR lamp on front panel lights up.
It also lights up when the limit comparison function is enabled.
COMPRTR lamp

_SHIFT__4_ | [COMPRTR]_5_ | [Pri/Sec]_1_ | [NO LIMIT]

4-12_EXP_ | [SYSTEM]

ZM2376

4.4

Sorting the Part (Comparator)

 Sorting the primary and secondary parameters with the deviation
When the primary and secondary parameters are display format of deviation or deviation%, they aresorted by the values of deviation or deviation%.
The comparison format of primary parameter can be set in the comparator setting menu. Since thecomparison format (=Display format) and the reference value for obtaining a devi ation are common
to both display and comparator, they may be set for either display or comparator.
Since it is impossible to set the comparison format of secondary parameter in the comparator setting
menu, alternatively use the setting for display format.
Select the DEV with the comparator setting menu, the primary parameter deviation comparison menu
for the comparator is displayed.
DEV: The primary parameter deviation comparison menu is as follows:
Comparison format

Reference value for deviation comparison

Deviation:ABS
0)ABS
ABS

1)DEV

REF:+1.23456µF2)DEV%

3)REF

Current setting
Options

Conducts the comparison according to the original
measured values. (Default value)

DEV

Conducts the comparison according to the deviationfrom the reference values.

DEV%

Comparison format

Conducts the comparison according to the deviation%
value from the reference values.

REF

Displays the primary parameter reference value
setting menu for the comparison of deviation.

Select one of ABS, DEV or DEV% as the comparison format by the numeric key.
To display the deviation or deviation%, previously set the reference value.
If a setting is made or the EXIT operation is performed, one-previous menu comes back.
REF: The deviation comparison of primary parameter reference value setting menu is as follows.
DEV Reference:+1.23456µF

Current setting±(0.0000p to 999999M)

Available value ranges

Enter the numeric value and the exponential part input _EXP_ + [µ] keys for instance, decides by
the

ENTER

key.

If a setting is made or the EXIT operation is performed, one-previous menu comes back.

4-13

ZM2376

4.4

Sorting the Part (Comparator)

 The display format for the lower/upper limit values and reference values, and unit
The lower limit value, upper limit value and reference values are construed according to the type ofmeasurement parameter or the display format.
For example, “F” is used as the unit of lower/upper limit value when displaying/sorting thecapacitance (C) by the absolute value or deviation, meanwhile “%” is used as the unit whendisplaying/sorting the capacitance by the deviation%.
The following table shows an example when the measurement parameters are set to inductance (L),lower limit value=1, upper limit value=2, and reference value=3.
Table 4-1 Display format of measured value and interpretation of setting value (example of L)
Display
format
ABS
DEV

DEV%

Lower limit value (=1)

Upper limit value (=2)

1H
Deviation is 1H(Equivalent to 4H for original
measured value)
Deviation is +1%(Equivalent to 3.03H for
original measured value)

2H
Deviation is 2H(Equivalent to 5H for original
measured value)
Deviation is +2%(Equivalent to 3.06H for
original measured value)

Ref. value
(=3)
3H
3H

3H

 Initializing the setting of comparator
To newly set the upper/lower limit value of comparator, it will be convenient to initialize the setting
at first.
To initialize the upper/lower limit value, select the CLEAR in the comparator setting menu, andthe following comparator initializing menu is displayed.
Comparator CLEAR
1)ExecuteOptions

Done

Completion message

Perform the EXIT operation to return to one-previous menu.
Press the _1_ key to execute the initialization, and the completion message will be displayed for ashort time, and then one-previous menu will come back.
Table 4–2 Initialization contents of comparator
Item

Initial value

Comparator function (Bin sorting)OFF

Sorting for BIN1

ON

Sorting for BIN2 to BIN14

OFF

Comparison of secondary parameter

ON

Item

Limit comparison
All upper limit values(Value, ON/OFF)All lower limit values(Value, ON/OFF)------

Initial
value

OFF
0,OFF
(No Limit)

0,OFF(No Limit)-

The display format and comparison format are not initialized.

4-14

ZM2376

4.4

Sorting the Part (Comparator)

 Setting the upper/lower limit value of comparator
To sort the parts, set the upper/lower limit values of primary/secondary parameters.
Select the LIMIT with the comparator setting menu, and the comparator upper/lower limit value
setting menu (shown below) is displayed.
Examples of primary parameters (C):When the comparison format is either ABS or DEV while the cursor is at either upper orlower limit:
Bin Enable/disable Lower limit value

Upper limit value<BIN1

Hi:+1.23456µF>

ON

Lo:+1.23456µF±(0.0000p to 999999M)

Current setting
Available value ranges

Examples of secondary parameters (D):When the cursor is at either lower or upper limit:
Enable/disable
< Sec

OFF

Lower limit value

Upper limit value

Lo:+10.0000µ

Hi:+100.000m >±(0.0000p to 999999M)

Current setting
Available value ranges

Move the cursor to the point of parameter you need to set (mentioned later) and set the value.
The unit depends on each parameter.
Perform the EXIT operation to return to one-previous menu.

4-15

ZM2376

4.4

Sorting the Part (Comparator)

 Sorting DUTs into bins by the measured values of primary parameter
To sort DUTs into plural bins, set the upper/lower limit values for each bin for sorting.
The DUT is sorted in order from the smaller number of bin. Therefore, if the range of each bin isoverlapped, the DUT is sorted into the bin of the smallest number. If the DUT does not fall in any bin
range, it is sorted as "OUT OF BINS”.
Measured value

Measured value

BIN1
BIN2
BIN3
OUT OF BINS
Small

Large
(a) When overlapped

Small

Large

(b) When there is a clearance

Figure 4–4 Range setting and comparison when sorting into bins
4-16

ZM2376

4.4

Sorting the Part (Comparator) Moving the cursor in the comparator upper/lower limit value setting menu
The cursor is placed at the point of parameter to be set in comparator upper/lower limit value setting
menu. The initial cursor position is at lower limit value of BIN1.
The cursor can be moved by pressing the _BS_ | [PREV] key or _EXP_ | [NEXT] key. It moves not
only between enable and disable of range comparison or between lower and upper limit values but
more the between Bins or between primary parameter and secondary parameter.
Pressing the _EXP_ | [NEXT] key causes the cursor to be moved as below.
(Secondary parameter upper limit) (BIN1 enabled → lower limit → upper limit) (BIN2 enabled → upper limit → lower limit)••• (BIN14 enabled → upper limit → lower limit) (Secondary parameter enabled → lower limit → upper limit)→ (BIN1 enabled)

Pressing the _BS_ | [PREV] key causes the cursor to be moved in the reversed order.

_SHIFT_ + [ Pri/Sec ]With the comparator upper/lower limit value setting menu, pressing the _SHIFT_ + [Pri/Sec]
keys causes the cursor to be moved between primary and secondary parameter.
When switched from primary parameter (BIN) into secondary parameter, the cursor moves to thelower limit value of secondary parameter.
BIN10

ON

Lo:+1.23456µF

Hi:+1.23456µF

Sec

OFF

Lo:+10.0000µ

Hi:+1.23456m

When switched from secondary parameter into primary parameter (BIN), the cursor moves to thelower limit value of BIN1.
Sec

OFF

Lo:+10.0000µ

Hi:+1.23456m

BIN1

ON

Lo:+1.23456µF

Hi:+1.23456µF_SHIFT__5_ | [Pri/Sec]_BS_ | [PREV]

4-17_EXP_ | [NEXT]ZM2376

4.4

Sorting the Part (Comparator)

 Enabling/disabling the range comparison
To make comparison using the comparator, set not only the upper/lower limit value but also “ON orOFF” for the comparison.
If the cursor is at the position of ON/OFF, it is able to set “ON or OFF” for the comparison ofprimary parameter’s Bin or secondary parameter where the cursor is placed.
Example of range comparison: When the cursor is at ON/OFF position<BIN11

OFF

0)OFF

1)ON

Lo:+1.23456µF

Hi:+1.23456µF>

Current setting
Options

ON

Enables the range comparison for one set of upper/lower limit values

OFF

Disables the range comparison for one set of upper/lower limit values

When the comparison of secondary parameter is disabled, the comparison for secondary parameter is
not conducted but only the comparison for each Bin of primary parameter can be done
(S-LO/S-IN/S-HI and S-NG are not output).
When “OFF” is set for specific Bin of primary parameter, the comparison for LO/IN/HI for that Bin
is not conducted and the DUT is not sorted into that Bin. When such setting is m ade that thecomparison for all Bins (1 to 14) of primary parameter is not conducted, the DUT is always sorted
into “OUT OF BINS”.
Note that, even if range comparison is set to “Enable(ON)”, it cannot be sorted for the given Bin incase of lower limit value ≥ upper limit value. Substantially the comparison for upper/lower limit
value is not conducted.

4-18

ZM2376

4.4

Sorting the Part (Comparator)

 Disabling only either side of lower or upper limit_SHIFT_ + [ NO LIMIT ]With the comparator upper/lower limit setting menu, pressing the _SHIFT_ + [NO LIMIT] keys
causes the comparison of the lower or upper limit value on cursor to be disabled and thecomparison is not conducted.
<BIN2

ON

Lo:+1.23456µF

Hi: No limit>

Once both of lower and upper limit values for the Bin (primary parameter) are disabled, it becomes
the same state as is the case when the range comparison of Bin is disabled.
Once both of lower and upper limit values for the secondary parameter are disabled, it becomes thesame state as is the case when the range comparison of secondary parameter is disabled.
_SHIFT_

4-19_1_ | [NO LIMIT]

ZM2376

4.4

Sorting the Part (Comparator)

 Sounding the beep sound depending on the comparator result
It is able to sound the beep sound according to the comparator result.
The beep sound can be set in the system setting menu.
_SHIFT_ + [ SYSTEM ]Press the _SHIFT_ + [SYSTEM] keys to display the system setting menu.
SYSTEM setting0)INTERFACE

1)BEEPER>NEXT

Options (first page)

Press the _1_ key to select the BEEPER, and the beeper setting menu is displayed.
BEEPER:OFF

Current setting0)OFF1)FAIL

2)PASSOFF

Disables the beeper (Beep sound stops).

FAIL

When the comparator result is failed (other than BIN1 to BIN14), sounds the beeper.

PASS

When the comparator result is passed (BIN1 to BIN14), sounds the beeper.

Options

In case that the limit comparison is enabled: it should be regarded as “PASS” whencomparison result is IN or be regarded as “FAIL” in other cases.
After setting, the results are displayed for a short time and return to one-previous menu.
Perform the EXIT operation to return to one-previous menu.

_SHIFT_

4-20_EXP_ | [SYSTEM]

ZM2376

4.5

4.5

Connecting to the Part handler (Handler Interface)

Connecting to the Part handler (Handler Interface)

For the ZM2376, the comparator result can be output into the handler interface of rear panel.
Connecting to the part handler allows auto part sorting system to be configured.
Table 4–3 Handler interface signal layout
Pin No.

I/O

Signal namePin No.

I/O

Signal name1

IN

TRIG, /TRIG

26

IN

/RCL0

2

IN

/RCL1

27

IN

/RCL2

3

IN

/RCL3

28

IN

/RCL4

4

IN

/RCL5

29

IN

/RCL6

5

IN

/RCL-VALID

30

OUT

/BIN1,

/P-HI

6

OUT

/BIN2,

/P-IN

31

OUT

/BIN3,

/P-LO

7

OUT

/BIN4,

/S-HI

32

OUT

/BIN5,

/S-IN

8

OUT

/BIN6,

/S-LO

33

OUT

/BIN7,

/IN

9

OUT

/BIN8

34

OUT

/BIN9

10

OUT

(/BIN10)35

OUT(/BIN11)

11

OUT(/BIN12), /NC

36

OUT

(/BIN13), /PHI

12

OUT

(/BIN14), /PLO

37

OUT

/OUT OF BINS

13

OUT

/INDEX

38

OUT

/EOM

14

OUT

/ERR

39

OUT

/S-NG

15

IN

/KEY_LOCK

40---(reserved)

1620

IN

EXT DCV

4145

OUT

INT DCV

2125

IN

EXT COM

4650

OUT

INT COM• The “/” at the top of signal name shows the negative logic where “low level” specifies “1”.
• The “( )" shows the signal when number of Bin is expanded (/NC, /PLO and /PHI are not
output).
Extending the Bin number• • •  “ Extending the Bin number of primary parameter”•

reversed character shows the output signal in case of limit comparison.
/BIN1 to /BIN14, /PHI and /PLO are not output in case of limit comparison.
25••• 2

1

Terminal layout (rear view)

50•••27

26

DDK57-series 50-pin or equivalent

Rear Panel

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4.5

Connecting to the Part handler (Handler Interface)

Table 4–4 Functions of handler interface signal
Pin No.

I/O

1

IN

TRIG,

IN

/RCL0(LSB)

Setting/correction value memory selection signal (Binary)

IN

/RCL1

When /RCL-VALID is 1 (low level) and trigger source is external (Ext):

IN

/RCL2

once the external trigger signal of Pin No.1 is received, the memory

IN

/RCL3

IN

/RCL4

memory number out of the range may result in an error.

IN

/RCL5

Not in use. Do not connect anything.

IN/RCL6(MSB)

Not in use. Do not connect anything.

IN/RCL-VALID

It shows that the memory selection signal is valid.

OUT/BIN1,/P-HI/BIN1 to /BIN14: Bin sorting signal

OUT/BIN2,

/P-IN

26
2
27
3
28
4
29
5
30

Signal name
/TRIG

Description
External trigger signal (rising edge).
Can be switched into falling edge.

specified by this signal allows the setting and correction value to berecalled and measurement is conducted under those conditions. Recall of/BIN10 to /BIN14 are output when Bin expansion is enabled besides
6
31
7
32
8
33
9
34
10
35
11
36
12
37
13
38
14
39

the limit comparison is disabled.
/NC: Contact failure or Low C

OUT/BIN3,/P-LO

OUT/BIN4,/S-HI

OUT/BIN5,/S-IN(default value).

OUT/BIN6,/S-LO/P-HI, /P-IN, /P-LO:

OUT/BIN7,

/IN

OUT

/BIN8

OUT

/BIN9

/PHI: primary parameter upper limit over signal/PLO: primary parameter lower limit under signal/NC, /PHI and /PLO are output only when Bin expansion is disabled

Primary parameter comparison
signal/S-HI, /S-IN, /S-LO:
Secondary parameter

When limit comparison isenabled, Bin sorting signals
of“/BIN1

to/BIN14”

OUT

---

/BIN10OUT---/BIN11OUT/NC,/BIN12OUT/PHI,/BIN13

Also for the limit comparison, /NC, /ERR, /OUT OF BINS (invert of /IN)

OUT

/PLO,

/BIN14and /S-NG (/S-HI or /S-LO) are output.

OUT/OUT OF BINSOUT/INDEX

OUT

/EOM

OUT

/ERR

OUT

/S-NG

IN

/KEY_LOCK

comparison signal/IN: Primary/secondary total passareoutput in place of /PHI and/PLO.

comparison signal

Fail comparison signal
Signal acquisition end signal. Once it becomes “1” (low level), it ispossible to switch into next DUT.
End of measurement signal. Once it becomes “1”(low level), thecomparison result become valid and it is possible to read.
Measurement error signal. It shows excessive voltage or current, contact
failure (NC), ALC failure or other errors.
Secondary parameter fail comparison signal
Key lock signal. Once it becomes “1”(low level), it disables all

15

key-operations of panel. It cannot be canceled through the panel orremote control.

40

---

(reserved)

Not in use. Do not connect anything.

16 ～20IN

EXT DCV

External DC power input (+5V to +24V)

21 ～25IN

EXT COM

41 ～45OUT

INT DCV

External DC power input (common)
Each signal of handler interface is isolated from the case and operates
with the external DC power.
Internal DC power output (+5V)
Internal DC power output (common)
46 ～50OUTINT COM

It is connected to the enclosure. To operate the Handler interface with theInternal DC power source, make connection between EXT COM and INT
COM and also between EXT DCV and INT DCV.

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4.5

Connecting to the Part handler (Handler Interface)• /BIN1 to /BIN14, /OUT OF BINS, /S-NG, /PLO and /PHI are not output when /ERR is
output.
In case of limit comparison, it is justified as “/P-HI and /S-HI” when /ERR is output.
 Electrical characteristics of handler interface
External power

Rated voltage +5V to +24V, Operation range +4.5V to +26.4V
Max power consumption 45mA(5V) / 100mA(12V) / 180mA(24V)Internal power+5V typ, 70mA max, Common is grounded to the case

Isolation

42Vpk.(Each signal, Common) vs. case
When Internal DC power output terminal is connected with External DC power
input, isolation is not provided.

Output characteristics
Output low level

0.5V max (Power voltage 5V, Sink current 6mA)
1.2 V max (Power voltage 12V, Sink current 8mA)
2.4 V max (Power voltage 24V, Sink current 10mA)

Output high level 5 to 24V (Depend on power voltage)
Input characteristics (Trigger excluded)
Input low level(Power voltage - 4.1V) max

Input high level(Power voltage - 1.1V) min

Input characteristics (Trigger)
Input low level(Power voltage × 0.3) max

Input high level(Power voltage × 0.7) min！

WARNING
Do not apply the voltage more than 42Vpk onto the signals or common ofhandler interface versus case. Otherwise, you may feel an electric shock.

！ CAUTION

Do not apply the voltage more than 42Vpk onto the signals or common ofhandler interface versus case. Otherwise, the ZM2376 may be damaged.
 Handler interface I/O equivalent circuit
EXT DCV
5k
OUT
EXT COM(a) Output

EXT DCVEXT DCV

3.3k

5k
12k

IN
EXT
COM
(b) Input other than trigger

IN
EXT
COM
(c) Trigger input

Figure 4–5 Equivalent circuit of handler interface

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4.5

Connecting to the Part handler (Handler Interface) Handler interface operation timing
Trigger delay time

Trigger delay time

TRIG
Remarks:
When the secondary
parameters is Rdc,
/INDEX remains highlevel until after thetrigger DC(Direct-current)
resistancesignal acquisition isfinished.

Measurement
signal output
Signalacquisition
Parameter
calculation
Comparison
output/INDEX/EOM(a)200µs(min)(/TRIG)

Continuous drive(b) Triggered drive(Negative
logic is also
possible)

0µs(min)
TRIG

TRIG
Comparison

100µs(min)output/INDEX/INDEX/EOM

200µs(typ)0µs(min)(c) Measurement start timing

10µs(min)(d) Measurement completion timing

Figure 4–6 Handler interface operation timing
 Cable length of handler interface
It should be preferably within 5m, or should not exceed 15m maximum. Use the shielded cable to
avoid noise emission and contamination.
 Relation between enabled/disabled of comparator and handler interface signal
When the comparator is disabled, handler interface output is as below:• Comparison signal (Terminal corresponding to /BIN1 to /BIN14, /OUT OF BINS, /S-NG, or/ERR): Fixed to high level (not output).
• /EOM, /INDEX: Fixed to low level (always output).
The output immediately after power turned on is the same as above as well. Also, the same stateis established by the initializing operation with the initialize menu or system setting menu or by
the *RST command.
Regardless of enabled/disabled of comparator, input of handler interface is always enabled.
•Input: TRIG, /KEY_LOCK,/RCL0/RCL6,/RCL-VALID

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4.5

Connecting to the Part handler (Handler Interface) Adjusting the function of handler interface_SHIFT_ + [ HANDLER ]Press the _SHIFT_ + [HANDLER] keys to display the handler interface setting menu.
Handler0)OUT OF BINS

1)BIN10-14

2)TRIG Polarity

3)RCL

>NEXT

Options (first page)<>4)TEST

Options (second page)<PREV

Options (third page)OUT OF BINSOUT OF BINS Output setting menu

BIN10-14

Bin extension menu

TRIG Polarity

Polarity setting menu of trigger input signal

RCL

Setting menu of memory selection signal

TEST

Handler interface test menu

Use each function after selecting the sub menu.
Perform the EXIT operation without selecting anything and the measurement screen will come back.
_SHIFT__3_ | [HANDLER] Setting "OUT OF BINS” output in case of S-NG
You can select whether or not S-NG (outside the range of secondary parameter) should be regarded as
auxiliary BIN (AUX BIN) independent from OUT OF BINS. It is the same for limit comparison as
well.
“OUT OF BINS” output setting menu is as follows:
OUT OF BINS: Include S-NG

Current setting0)Include1)Exclude

Options

IncludeIn case of S-NG, “OUT OF BINS” signal is output in parallel. (Default value)“Outside the range of primary parameter” and “Outside the range of secondary
parameter” are not distinguished and classified as “OUT OF BINS”.

ExcludeIn case of S-NG, “OUT OF BINS” signal is not output.
When primary parameter is within the range but secondary parameter is outside
the range, it should be classified as the independent AUX Bin (S-NG) instead of“OUT OF BINS”.

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4.5

Connecting to the Part handler (Handler Interface)

Select either by the numeric key.
If a setting is made or the EXIT operation is performed, one-previous menu comes back.
 Extending the Bin number of primary parameter
The initial value of class number of primary parameter is “9”, but can be expanded to “14”.
Bin extension setting menu is as follows:
BIN10-14 Output: OFF

Current setting0)OFF=PHI,PLO

OptionsOFF1)ON=BIN10-14

The signals of BIN10 to BIN14 are not output (max 9-class).
When the primary parameter is outside the range, PHI or PLO signal is output.

ON

The signals of BIN10 to BIN14 are output (max 14-class).
Even if the primary parameter is outside the range, both PHI and PLO signal are not
output.

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
When signals of BIN10 to BIN14 are not output, BIN10 to BIN14 are not sorted regardless ofother settings.
 Setting the trigger polarity
You can select which of rising edge and falling edge of trigger signal is used to start measurement.
Polarity setting menu of trigger input signal is as follows:
TRIG Polarity:Negative

Current setting0)Negative

1)Positive

Options

Negative

Falling edge (H→L) of trigger signal is used to trigger.

Positive

Rising edge (L→H) of trigger signal is used to trigger. (Initial value)

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
The Trigger polarity cannot be selected in Remote control. Also, it cannot be initialized with the*RST command or the initialize menu by the _SHIFT_ + [INIT] key operation.

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4.5

Connecting to the Part handler (Handler Interface) Setting the functions of memory selection signal
You can select the item for restoring from the setting/correction value memory specified by the input
signal to the handler interface specified with /RCL0.../RCL6.
Memory selection signal setting menu is as follows:
Handler Recall Function:Setting0)SPOT

Current setting1)Partial4)Both>NEXT

Options (first page)<PREV

Options (second page)2)Setting3)Correction

SPOT

Recalls only the spot correction value (OPEN/SHORT/LOAD). The global
correction value and the setting are not recalled. (Initial value)

PartialRecalls main settings and the spot correction value.

Setting

Recalls all settings.

Correction

Recalls all correction values. (global correction value and spot correction value).

Both

Recalls all settings and correction values.

If a setting is made or the EXIT operation is performed, one-previous menu comes back.
Recalling the less parameter, the quicker they can be changed.
To switch the correction value per channel when more than one DUT are measured by switchingthem with a scanner (multi-channel correction), SPOT is suitable.
When the frequency and signal level are also changed per DUT, Partial is suitable. The follo wing
settings are recalled in Partial.
Measurement frequency
Measurement signal level (voltage value, CV, and CC)
Internal DC bias voltage
Measurement range (including Auto and Rdc range)
Trigger delay time
Measurement speed
Measurement parameters (type and equivalent circuit of primary parameter, and type of secondary
parameter)
Comparator function
Lower and upper limit of the primary parameter for limit comparison (= Lower and upper
limit of BIN 1)
Lower and upper limit of the secondary parameter for limit comparison
When the frequency is recalled with Partial, enabled/disabled of the OPEN/SHORT/LOAD
correction is retained.
Save setting values and correction values to recall in the setting/correction value memory in advance.
When you try to recall them from the memory with no data saved, an error occurs.
For multi-channel correction, ZM2376 supports up to 32 channels. For channels more than 32, you
can read and save the spot correction value of each channel with remote control, and then write it

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4.5

Connecting to the Part handler (Handler Interface)back at measurement of the channel.
 Checking the operation of handler interface
You can check the operation through outputting the given signal into handler interface or monitoring
the input signal.
Handler interface test menu is as follows:
OFF|ON|ER

OutputTEST:OFF

Bbb Ee Mm

0)OFF

1)ON

2)ER

Input
TRGt RCLsss VLDv LOCk
3)BIN

4)ERR

5)EOM

Signal monitor
Output control

OFF

Disables the test mode and performs usual operation. (Default value)

ON

Enables the test mode.
Outputs a test signal instead of a usual signal.

ER

Changes only /ERR to the test mode.
/ERR can be used as a general-purpose port.
However, the normal error status is not output.

The following operations work only when the test mode is enabled.
BIN

The comparison output is made into the low level one at a time.
For details, refer to “Dummy output signal” below.

ERR

Inverts /ERR.

EOM

Outputs dummy /INDEX and /EOM signals.
For details, refer to “Dummy output signal” below.

Perform the EXIT operation to return to the measurement screen.
When ON is selected, the output signal is initialized to the state when the comparator is disabled. The
test signal is operated with BIN/ERR/EOM on the menu. ZM2376 ignores the input signal andoperates as if nothing is connected to the handler interface. Lock by /KEY_LOCK signal is also
released.
When ER is selected, only /ERR is initialized to the state when the comparator is disabled. /ERR
signal is operated with ERR in the above menu. Operation of BIN and EOM are unavailable. Input
signals and output signals except /ERR operate usually.
It is recommended to change the test mode while the comparator and limit comparison are disabled.
When the test mode is switched from ON or ER to OFF while the comparator is enabled (the normal
operation), each output returns to normal. When switched from ON to ER, the output except /ERR
returns to normal in the same way.
When the test mode is set to OFF while the comparator is disabled, the output returns to normal atthat time. When switched from ON to ER, the output except /ERR returns to normal at that time.

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4.5

Connecting to the Part handler (Handler Interface)

Input signal monitor
Numeric values appear while the status of Input signal line is being regarded as the negative logic
input.
Display
name

Signal name

Status

/TRIG

TRG

t

/RCL0../RCL6

RCL

sss

/RCL-VALID/KEY_LOCK

VLD
LOC

v
k

Descriptions of status
When Trigger polarity = Negative
0 : High level, 1 : Low level
When Trigger polarity = Positive
0 : Low level, 1 : High level0 .. 127 : /RCL6(MSB)../RCL0(LSB)
Displays 7 bits of negative logic as 3 digits of decimal.
0 : High level, 1 : Low level0 : High level, 1 : Low level

Dummy output signal
You can control the output using numeric keys as follows.
Key
1)ON

3)BIN

Operation
Initializes all outputs to the status when thecomparator is disabled.
The comparison output is made into the lowlevel one at a time.
All are high level /OUT OF BINS
 /BIN1...... /BIN14
 /S-NG....All are high level

4)ERR

Inverts /ERR.

5)EOM

Changes /INDEX and /EOM as shown in the
figure below.

Output signal monitor
B00 E0 M1
Bbb
bb = 00 : OUT OF BINS,
bb = 14 : BIN14,
bb = 15 : S-NG,
bb = 16 : All are high levelEe
e = 0 : High levele = 1 : Low level
Mm (status of EOM)m = 0 : High levelm = 1 : Low level

Approx 10ms
/INDEX/EOM
Nearly simultaneously

Approx 1ms

Figure 4–7 Dummy output timing

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4.6

4.6

Measuring with More Than One Condition (Multi-measurement)

Measuring with More Than One Condition (Multi-measurement)

The multi-measurement function allows you to measure one DUT with more than one condition forcomprehensive pass/fault comparison or sent these measured values to the measured data buffer collectively.
When the multi-measurement is performed, register a measurement condition in each step of themulti-measurement list. Parameters other than the frequency should be saved in the setting/correction value
memory.
Step 0 •••Multi-measurement list

Step nFrequency (n)Spot correction value (correction value memory n)
Settings other than frequency (setting memory m)

Step 31 •••In the multi-measurement step n, the measurement is performed at the frequency (n) which isregistered in the list. Also, each spot correction value of OPEN/SHORT/LOAD is recalled from thecorrection value memory n. Other settings than the frequency (ex. signal level, upper and lower limitsof pass/fail comparison) are recalled from a given setting memory m associated in the list.
 Setting multi-measurement functions_SHIFT_ + [ LIST ]_SHIFT_ + [LIST] keys to display the multi-measurement menu.
Operation Mode
LIST:OFF0)OFF1)SEQUENCEOFF
SEQUENCE
STEP

Entry

Current setting2)STEP

3)Entry

Options

Disables the multi-measurement and returns to the normal measurement(initial value).
Enables the multi-measurement in sequence mode.
Measures in all steps in the order of the list once triggered.
Enables the multi-measurement in step mode.
Measure step-by-step at each trigger. It is useful to read the measurement
value at each step.
Displays the multi-measurement list input menu.

If a setting is made or the EXIT operation is performed, the measurement screen comes back.
_SHIFT_

4-30_FREQ_ | [LIST]

ZM2376

4.6

Measuring with More Than One Condition (Multi-measurement)

Set the frequency on the multi-measurement list input menu.
To set (/check) parameters other than the frequency, you need to save them to the setting memory(/recall from the setting memory).
Entry: Multi-measurement list input menu is as follows.
(Other than frequency)
Step number
LIST

31

Measurement frequency
FREQ:1.23456kHz

Setting memory
Memory: 31

Current setting
Available ranges

1mHz to 5.50000MHz
0 to 31(-1/0:OFF-->)(-1:OFF-->)

Frequency
Setting memory

Initially, the cursor is placed on the measurement frequency.
Register measurement frequencies starting from step 0. Steps with a registered frequency areenabled. When you want to change measurement conditions other than the frequency in each step,
register the number of the setting memory where they are registered.
The cursor can be moved between two parameters or across steps by pressing _BS_ | [PREV] key
or _EXP_ | [NEXT] key. When an invalid step exists, the cursor cannot move to steps beyond it
and cycles within valid steps.
Following shows examples of cursor movement when the _EXP_ | [NEXT] key is pressed.
(STEP 0: frequency  memory)  (STEP 1: frequency  memory) •••  (STEPx : OFF

memory)  (STEP 0: frequency  memory)(When all steps are valid)(STEP 31: frequency  memory)  (STEP 0: frequency  memory)
Currently available range is displayed in the second line.
Perform the EXIT operation to return to one-previous menu.
When zero or a negative value is specified for the frequency, steps beyond it are disabled, and thesemeasurement are not performed. For an invalid step, the frequency is displayed as OFF. When thestep 0 is invalid, a trigger cannot cause the measurement, and an error occurs (error number -211,
Trigger ignored).
When a negative value is specified for the setting memory number, recall is disabled in all steps
following the current step. When the recall is disabled, the memory number is displays as OFF, andthe previous settings are held in the step. When it is set to OFF, the content of the setting memory isheld. When the setting memory numbers are OFF (initial value) in all steps, only the frequency isswitched. When the setting memory number is specified to 0 to 31, the setting is recalled before the4-31

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4.6

Measuring with More Than One Condition (Multi-measurement)

measurement in the step.
 Selectable parameters in multi-measurement
In multi-measurement, only some main settings are recalled from the setting memory.
The following settings are recalled in multi-measurement.
Signal level (voltage value, constant current value, CV, and CC)
Internal DC bias voltage
Measurement range (including Auto and Rdc range)
Trigger delay time
Measurement speed
Measurement parameters (type and equivalent circuit of primary parameter, and type of secondary
parameter)
Comparator function
Lower and upper limit of the primary parameter for limit comparison (= Lower and upper
limit of BIN 1)
Lower and upper limit of the secondary parameter for limit comparison
When a setting memory with no data is specified, the previous setting is held.
 OPEN/SHORT/LOAD correction in multi-measurement
When the multi-measurement is enabled, the correction value is measured and the correction is
performed at DUT measurement as follows.
 When the spot correction is disabled
The global correction value (or standard value) is measured, and the correc tion is performed
using it.
 When the spot correction is enabled
When the correction value is measured, the frequency, main settings, and spot correction value(and standard value) are recalled for each step that is registered in the multi -measurement list,
and the new spot correction value (or standard value) is measured to be saved in the correction
value memory corresponding to the step. The global correction value (and standard value) on thecorrection value memory is held as the previous value.
When the DUT is measured, the spot correction value (and standard value) is recalled from thecorrection value memory corresponding to each step. The global correction value (and standard
value) is not recalled. When no valid spot correction value is saved in the correction value
memory, the current global correction value (and standard value) is used for correction.
Unlike usual measurement, the OPEN/SHORT/LOAD correction is not disabled in each stepeven when the frequency changes.

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4.6

Measuring with More Than One Condition (Multi-measurement) Operation of comparator in multi-measurement
When the multi-measurement is enabled, the limit comparison function of the primary and secondary
parameters is also enabled automaticaly. When the multi-measurement is disabled, the limit
comparison function of the primary and secondary parameters is also disabled. The limit comparison
determines pass/fail based on the upper/lower limit value pair of the primary parameter (common to
BIN1 for Bin sorting) and the upper/lower limit value pair of the secondary parameter.
Limit comparison ••• “4.4 Sorting the Part (Comparator)”, “4.5 Connecting to the Part

handler (Handler Interface)”, and separate manual “ZM2376 Instruction Manual (Remote
Control)” :CALCulate:COMParator[:STATe] Command
In the multi-measurement, the limit comparison is performed on the upper/lower limit values of the
primary parameter (BIN1) and the upper/lower limit values of the secondary parameter for each step.
Once the measurement has finished on every enabled step registered in the multi -measurement list,
total comparison is conducted.
 Panel display
The comparison result of primary and secondary parameters is displayed for each step.
When the measurement is finished on all the steps, the total comparison result is updated.
Primary parameter comparison result :  (each step)
Total comparison result
IN / OUT / SNG / ERR / NC / LoC

Cp:+12.3456µF

D:+0.12345

IN 1.00000k

Secondary parameter comparison result(When all steps are finished) :  (each step)Comparison result of each stepThe measured value is larger than the upper limit or any error occurs.

:

The measured value is within the range of the upper/lower limit values.

The measured value is less than the lower limit value.

Total comparison result (in order of priority)
ERR

A measurement error such as signal overload or ALC error occurs.

NC

A contact failure occurs.

LoC

A Low C error occurs.

OUT

Any of primary or secondary parameters failed.

SNG

Primary parameters are all acceptable, but secondary parameters are failed.
With the initial setting, OUT is displayed instead of SNG. When you set to suppress
the /OUT OF BINS output in case of the /S-NG output, SNG is displayed as a priority.

IN

All measured values are passed.

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Measuring with More Than One Condition (Multi-measurement)

 Handler interface output
The following signals are output from the handler interface in the multi-measurement.
When the measurement is finished on all the steps, the total comparison signal (/IN, /OUT OF BIN,
/S-NG, /NC, /ERR) is updated. The total comparison signal is not updated in midway steps.
Table 4-5 Handler interface output in the multi-measurement
Pin No.
30
6Signalname/P-HI

Description
Primary parameter comparison signal (updated in each step)

/P-IN
31

7

/P-LO
/S-HI

32
8

Secondary parameter comparison signal (updated in each step)

/S-IN
/S-LO

33

/IN

35

/EOS
(/BIN11)

11

/NC

37

13

/OUT OFBINS/INDEX

38

14

/EOM

/ERR
39

/S-NG

Total pass comparison signal
Indicates that all measurement is normal, and all measurement values in the
primary and secondary parameters are passed. In the last step, the totalcomparison signal is updated simultaneously with the primary and secondary
parameter comparison signals.
Sequence completion signal
Output simultaneously with the total comparison signal after the measurement
is finished in all steps. In the multi-measurement, the limit comparison
function is enabled, and the /BIN11 signal for bin sorting is not used. The/EOS signal is output instead.
Total contact failure signal
In the process of multi-measurement, a contact failure or Low C failure
occurs.
Total fail comparison signal
Invert signal of /IN. You can set to suppress the /OUT OF BINS output at the/S-NG output.
•• 
OUT OF BINS Output setting menu
Signal acquisition end signal
In the sequence mode, this signal is output when the signal acquisition ends
in all steps and the DUT can be replaced.
In the step mode, it is output when the signal acquisition ends in each step.
End of measurement signal
In the sequence mode, this signal is output when the measurement ends in all
steps and the total comparison signal is updated.
In the step mode, it is output when the comparison signal is updated in each
step.
Total measurement error signal
Any error occurs in the process of multi-measurement.
Total secondary parameter fail comparison signal
All measurement is normal, primary parameters are passed, but any ofsecondary parameters is failed.

The other output signals are fixed to the high level.
Input signal is always enabled with or without multi-measurement.

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4.6

STEP

Measuring with More Than One Condition (Multi-measurement)

0

1

Last

Internal auto trigger

TRIG
Signalacquisition
Parameter
calculation
Comparison
output/EOS (BIN11)/INDEX/EOMa) Sequence mode

STEP

0

1

Last

TRIG
Signalacquisition
Parameter
calculation
Comparison
output/EOS (BIN11)/INDEX/EOMb) Step mode
Figure 4-8 Handler interface operation timing in the multi-measurement
In the step mode, the DUT can be changed per step. For example, you can measure components of acomposite part with conditions suitable for each of them in sequence.

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ZM2376

4.6

Measuring with More Than One Condition (Multi-measurement) Remarks
1) Triggered drive
When the triggered drive is enabled, the drive signal is output only while the /INDEX signal is H
(high level).
2) Trigger delay time
In each step, the signal acquisition starts at the trigger delay time after the setting and correct ion
value are recalled.
3) Contact check
The contact check and low capacitance check are performed in each step.

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ZM2376

4.7

4.7

Changing the Contents Displayed on the Second Line (Auxiliary Display)

Changing the Contents Displayed on the Second Line (Auxiliary
Display)

Normally the specified setting information is displayed on the second line (Auxiliary display) of
measurement screen.
It is possible to change those contents into other setting information or voltage/current monitor
values.
_AUX DISP_
Press the _AUX DISP_ key to display the auxiliary display selection menu.
Aux Display:Status

Current setting0)Status

1)Pri-Limit

2)Sec-Limit

3)P-S REF

4)I-V

StatusMeasurement condition (initial value)5)Z-6)List>NEXT

Options (first page)<PREV

Options (second page)A100kΩ FAST100 Int OpShLd1m
Pri- Limit

•

•

•

ex.

Lower and upper limit values of primary parameter (specified Bin)
10:+970.000nF to +1.03000µF

•

•

•

ex.

The Bin number input menu is displayed. Specify the Bin number there.
Sec-Limit

Lower and upper limit values of secondary parameter
Sec+0.00000

to +12.0000m

•

•

•

ex.

Even if Pri-Limit and Sec-Limit are selected, the status appears whencomparator and limit comparison are disabled.
P-S REF

Reference value for primary/secondary parameter deviation display
REF:P+1.00000µF S+100.000m

•

•

•

ex.

Even if P-S REF is selected, the status appears when the deviation display
and deviation comparison are disabled.
I-V

Current/voltage monitor value
Im:+123.456mA Vm:+1002.34mV

Z-

•

•

•

ex.

•

•

•

ex.

Impedance measured value
Z:+123.456kΩ

:+ 1.567°_AUX DISP_

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ZM2376

4.7

Changing the Contents Displayed on the Second Line (Auxiliary Display)

List

Steps during multi-measurement•

Step: 12

•

•

ex.

Even if List is selected, the status appears when the multi-measurement isdisabled.
If a setting is made or the EXIT operation is performed, the measurement screen comes back.
Bin number input menu is as follows.
BIN No:14

Current setting

1 to 14

Available value ranges

To display the upper/lower limit values of primary parameter, set the Bin number.
Perform the EXIT operation to return to one-previous menu.
After setting, measurement screen comes back.

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ZM2376

4.8

4.8

Saving/Recalling the Setting and Correction Value

Saving/Recalling the Setting and Correction Value

ZM2376 saves/recalls the setting and correction value up to 32-set.
 Saving the setting and correction value into the memory_SHIFT_ + [ SAVE ]Press the _SHIFT_ + [SAVE] keys to display the setting/correction value memory saving setting
menu.
SAVE : Setting
0 to 31.)Correction

Current settable-)BothAvailable ranges

Enter the item to be saved and the memory number, and press the _ENTR_ key, to carry out
saving (overwriting).
After saving, the following confirmation message appears for a short time and measu rement screen
comes back.
Save -> 9

Example Recalling the setting and correction value saved in memory_SHIFT_ + [ RECALL ]Press the _SHIFT_ + [RECALL] keys to display the setting/correction value memory recall setting
menu.
RECALL : Setting
0 to 31.)Correction

Current settable-)BothAvailable ranges

Enter the item to be recalled and the memory number, and press the _ENTR_ key, to carry out
recalling.
After recalling, the following confirmation message appears for a short time and measurement
screen comes back.
Recall <- 9

ExampleIt is invalid to recall the setting/correction value memory, which is not being saved.
Recall <- EMPTY

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ZM2376

4.8

Saving/Recalling the Setting and Correction Value

The item for Save/Recall is setting (only setting) at first. Therefore, if you enter the memory
number and press the _ENTR_ key, only the setting can be saved or recalled.
You can temporarily change the item to Correction (only correction value) or Both by entering thedecimal point _._ or negative sign _-_.
RECALL : Correction

Correction value only

Perform EXIT operation without performing saving or calling, and the measurement screen will
come back.

_SHIFT__._ | [SAVE]_-_ | [RECALL]

Examples of specifying
Setting(Setting only)ex.) _2_ _1_

Correction(Correction value only)ex.) _._ _2_ _1_

Both

Input the numeric value only
Input the decimal point before numeric value(Both setting and correction value)ex.) _-_ _2_ _1_

Input the negative sign before numeric value.

Before entering the _ENTR_ key, you can change the item for Save/Recall by entering the decimal
point _._ or negative sign _-_ . For example, press the _._ key to change the item to Correction, andthen press the _-_ key to change it to Both. Meanwhile, when the item is Correction, press the _._key to change the item back to Setting.
After performing Save/ Recall, the item for Save/ Recall turns back to the setting.
The load standard value is treated as a set with the corresponding load correction value.
 Initializing the setting/correction value memory
The contents of setting/correction value memory cannot be initialized by the _SHIFT_ + [INIT] and_1_ key.
It is possible to initialize the setting/correction value memory by the operation of “Fully
initialization” in system setting menu. However, the setting of interface is also initialized.
Fully initialization

“4.14 Initializing of All Settings”.

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ZM2376

4.9

4.9

Setting the Contact Check

Setting the Contact Check

ZM2376 provides the contact check function which can check the contact condition with DUT. To
avoid a wrong measurement due to contact failure, set the contact check to “enabled”.
ZM2376 also provides the low capacitance check function to detect an abnormal low capacitancecaused by a contact failure, independently of the contact check function described above.
The contact check and low capacitance check provided by ZM2376 do not give an additional error tomeasured values. An additional time to the measurement can be ignored.
_SHIFT_ + [ CONTACT ]Press the _SHIFT_ + [CONTACT] keys to display the contact check setting menu.
Low capacitance limit
Low capacitance check ON/OFF
ON/OFF
Contact check:OFF
0)OFF

1)ON

Low C:OFF<

123.456pF

Current setting

2)Low C

OptionsOFF

Disables the contact check (initial value).

ON

Enables the contact check.

Low C

Display the low capacitance check setting menu.

If a setting is made or the EXIT operation is performed, the measurement screen comes back.

CONTACT CHECK lamp
When the contact check or low capacitance check is enabled, CONTACT CHECK lamp lights up.
CONTACT CHECK lamp

_SHIFT__2_ | [CONTACT]When the measured value is NC, refer to the following document for corrective actions: NC section in “5.1.4 Measured Value Display in Case of Error”

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ZM2376

4.9

Setting the Contact Check Operational outline of contact check
The contact check of ZM2376 is a simple type which detects mainly a contact failure of HCUR
terminal in 4-terminal connection.
The contact check of ZM2376 can be used in the following ranges.
• Measurement frequency

1mHz  1MHz

• Measurement signal level

100mV  5V

• Cable length0m, 1m, 2m

The contact check should be disabled outside this range.
When a contact failure is detected:
 Panel display
The measured value is displayed as NC.
 Comparator
Failed.
(OUT OF BINS for Bin sorting, or P-HI and S-HI for limit comparison) Handler interface/NC signal is at low level when the comparator function is enabled.
 Measured value output in the remote control
The measured value is becomes as error value 9.9E+37.
The measurement status is becomes as 2, which indicates a contact failure.
ZM2376 checks the relation between drive signal and measured values of voltage, current and
impedance of DUT when obtaining the measured results of AC impedance. If there is incoherence, it
is regarded as contact failure (NC).
In the DC resistance Rdc measurement, a contact failure cannot be detected.
In 2-terminal connection, the contact check does not work. Use the low capacitance check.

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ZM2376

4.9

Setting the Contact Check Detecting abnormal low capacitance
When a low capacitance is measured due to a contact failure, it is regarded as Low C (abnormal low
capacitance) in ZM2376. Exactly, it is regarded as Low C when an impedance higher than the
impedance corresponding to the specified capacitance is detected.
Low C: Low capacitance check setting menu is as follows.
ON/OFF
Low C check:OFF
0)OFF

1)ON

OFF
ON
Cth

Low capacitance limit
Cth:123.456pF

2)Cth

Current setting
Options

Disables the low capacitance check (initial value).
Enables the low capacitance check.
Displays the low capacitance limit setting menu.

If a setting is made or the EXIT operation is performed, the measurement screen comes back.
Cth: Low capacitance limit setting menu is as follows.
C threshold: 12.3456 pF

Current setting

0.0000p to 999.999n

Available value ranges

Set the upper limit value of capacitance that should be regarded as abnormal.
When it is set to zero (initial value), the low capacitance check is not conducted even if it isenabled.
If a setting is made or the EXIT operation is performed, one-previous menu comes back.
If the low capacitance check acquires a measured value of impedance higher than 100 times of theupper limit of the recommended range for the measurement range (except the highest measurement
range used in the current measurement frequency), it is regarded as Low C regardless of the low
capacitance limit.
When it is regarded as Low C:
 Panel display
LoC status is displayed whether or not the comparator function is enabled/disabled.
Cp:+0.23456pF

D:+0.12345

LoC

1.00000k

 Comparator
The comparison is conducted as usual on the assumption that the measured value can be obtained.
 Handler interface/NC signal is at low level when the comparator function is enabled.
 Measured value output in the remote control
The measured value is output as usual. It is never an error value.
The measurement status is displayed as 2, which indicates a contact failure.

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4.10

4.10

Applying the DC Bias Voltage

Applying the DC Bias Voltage

ZM2376 allows the measurement where DC bias voltage up to 5V is applied on polar capacitance,
PN junction of semiconductor and etc. It is also possible to compensate the electromotive force ofbattery to measure the impedance. It cannot be ON when the secondary parameter is D C resistance
Rdc.
_BIAS_
Press the _BIAS_ key to display the DC bias setting menu.
Output status
DC BIAS: OFF

Auto mode

Bias voltage

AUTO

1.500V

0)OFF

1)ON

2)AUTO

3)TRACKOFF

Turns off (0V) the DC bias output.

4)DC Volt

Current setting
Options

The set value of DC bias voltage is retained inside.
The auto DC balance and auto DC cancel functions are disabled.
ON

Turns on (preset voltage) the DC bias output.
The auto DC balance and auto DC cancel functions are disabled.

AUTO

Turns on the DC bias output and enables the auto DC balance function and theauto DC cancel function.
This function is mainly used to measure the impedance of the battery.
The measurement range is restricted to 100Ω or less.

TRACK

Turns on the DC bias output and enables the auto DC cancel function. The auto
DC balance function is disabled.
This function is mainly used to measure DUT with a leak current.

DC Volt

Display the DC bias voltage input menu.

Press the ON/OFF or perform EXIT operation, and the measurement screen comes back.
BIAS ON lamp
The BIAS ON lamp of front panel lights up during DC bias output ON.
BIAS ON lamp

Bias polarity:

Reference_BIAS_Plus

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4.10

Applying the DC Bias Voltage

DC volt: DC bias voltage input menu is as follows
BIAS Voltage: 0.000V

Current setting

0.000V to 5.000V

Available ranges

It is possible to set at 1mV in resolution. Enter the numeric value, and press the _ENTR_ key.
If a setting is made or the EXIT operation is performed, one-previous menu comes back.
The set value of current DC Bias voltage appears on the second line of measurement screen.
•

•

•

•

•

•

1.500

1.00 VBIAS

Vdc

 Restriction between signal level and bias voltage
The peak voltage that can be output by ZM2376 is approx 7.07V.
It is impossible to set when the total of the peak value of AC measurement signal and DC bias
voltage exceeds the above voltage.
If you intend to set the measurement signal level or DC bias voltage beyond the above limit, it will
be set as the permissible maximum value at that moment. When the measurement signal level is
5Vrms, the bias voltage is restricted to 0V. When the DC bias voltage is 5 V, the measurement signal
level is restricted to approx 1.4Vrms.
 Restriction on charge-discharging current due to DC bias
The peak current that can be output from the HCUR terminal by ZM2376 is approx 280mA.
When the total of the peak value of AC measurement signal and the charge -discharging current orleak current of the DC bias exceeds this current substantially, it causes overload and cannot bemeasured correctly.
When the bias voltage is changed substantially while the output impedance is low, a highcharge-discharging current flows. When the measurement signal level exceeds the peak current, thebias voltage decreases.
 Settling time for DC bias voltage
The charge-discharging current at early stage of discharge/charge can be suppressed up to approx
1.4-time that of the max sensing current Ip[Arms] that can be absorbed by the current sensing sectionin each measurement range. Therefore, the settling time Ts[s], which is determined by the above
current value, capacitance C (F) of DUT and change Vc[V] in Bias voltage, is needed until it can bewithin the limited current range.
Ts  C × Vc / ( Ip × 1.4 ).
Max sensing current that can be absorbed by the current sensing section
 “Table 3-3 Max. current, max. voltage and output impedance in each measurement range ”
However, the measurement range (max sensing current) changes depending of themeasurement frequency.
When the charge-discharging current exceeds this value, since the current beyond the value runs

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ZM2376

4.10

Applying the DC Bias Voltage

through the protection circuit of LCUR/LPOT terminal, it is possible that the actual settling time can beless than T S.
When the current enters the limited current range during charging/discharging, it will converges forthe settling time Tstl[s], which is determined by the output impedance Rd[ ] and capacitance C[F] of
DUT.
Tstl[s]  7.13×C×Rd .
 Actions when there is a leak current or it takes time for charge/discharging
When the leak current is large due to a low insulation resistance of DUT, when the charging current
runs for a long time due to the dielectrics absorbing, or when charging takes a long time due to alarge capacitance, the measurement may be impossible by the following reasons:• DC cancel becomes insufficient due to a leak current and output impedance to cause the voltage
sensing section to saturate.
• The peak value of the signal current exceeds the permissible range of measurement range.
• Auto selection of measurement range does not work properly.
Even in these situations, the measurement may be possible as follows.
 Hold the measurement range to the range accepting measurement range.
Try changing the measurement range once.
However, it is afraid that the measurement accuracy may go down while exceeding therecommended measurement range.
 Increase the measurement signal level
Permissible range of the voltage and current measurement increases.
 In the DC bias setting menu, select TRACK
Since DC cancel amount is adjusted following variation of the bias voltage actually applied to the
DUT, the voltage sensing section becomes less likely to saturate when measuring low impedance.
However, the current sensing section may saturate due to a leak current. When the current sensing
section saturates, adjust with the measurement range and measurement signal level as describedabove.
ZM2376 fine adjusts the DC cancel amount at the voltage sensing section in the range of the DC bias
voltage ± 0.25V when the auto DC cancel function is enabled. However, it takes time to adjust. Whenthe auto DC cancel function is disabled, the cancel amount is equal to the set value of the bias
voltage.

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ZM2376

4.10

Applying the DC Bias Voltage

 Measure the battery internal impedance
It is possible to directly measure the impedance of a battery with electromotive force 5V or lower inthe following procedure. However it assumes a chemical battery that can be charged in some degree.


Set the signal level in the following recommended range.
When the output impedance is 100Ω

100mVrms to 5Vrms

When the output impedance is 25Ω

200mVrms to 5Vrms

When the output impedance is 6Ω

501mVrms to 1.2Vrms(this may be limited by other settings)
Considering the electromotive force, the upper limit is (5 - max value of electromotive
force[Vdc] / 1.414) [Vrms].
Outside the above ranges, the auto DC balance function may not work properly.
To use the whole range of DC bias voltage, this should be 1.46Vrms or less.
Measure the electromotive force of the battery with a separately prepared DC voltmeter.



Set the DC bias voltage of ZM2376 to the measured electromotive force.

Connect the buttery to ZM2376 with an adequate jig.

By matching the DC bias voltage and electromotive force exactly, you can prevent the current
sensing section from saturating with the DC current or the voltage sensing section from saturatingwith the unbalanced voltage.
If it is difficult to match them exactly, the following setting makes the measurement easier.


In the DC bias setting menu, select AUTO.
ZM2376 fine adjusts the DC bias voltage in the range of the set value ± 0.25V so that the DC
current at the LCUR terminal is approx zero when the auto DC balance function is enabled.
However, the measurement range is restricted to 100Ω or less. Therefore, the upper limit ofimpedance for correct measurement is approx 2kΩ. Also, it takes time to operate the auto DC
balance, and it accompanies some charging/discharging.

！

WARNING• Be sure to match the DC bias voltage with the actual electromotive force of abattery.
Do not use the nominal value or estimated value. Measure the actual voltage.
• Do not connect in reversed polarity.
Be sure to check the polarity before connecting a battery.
If the above precautions are not observed, the battery may burst or cause fire
due to overcharge or over discharge.

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ZM2376

4.10！

Applying the DC Bias Voltage

WARNING• If an error message "DC Bias unbalance" is displayed
Remove the battery immediately and check the polarity and electromotive
force.

！ CAUTION

This message is displayed instead of the measured value when the auto balance
failed. When the measurement failed, check the polarity and electromotive forceof the battery. When leaving the actual electromotive force and the DC bias
voltage differ significantly, a large current may continue flowing to deteriorate
ZM2376 and the battery.
As with the battery, a charged EDLC (Electric double layer capacitor) with big capacity can bemeasured.
When the internal registance is significantly high, the auto DC balance may not work properly. In thiscase, disable the auto DC balance function and adjust the DC bias voltage manually.
When many batteries are measured with a higher measurement speed, disable the auto DC balance
function and match the DC bias voltage and electromotive force as exactly as possible. If an exact
match is difficult, take the following actions.


Increase the measurement signal level.
This increases the margin to the unbalanced voltage.
However, the available max electromotive force (= DC bias voltage) is restricted.

Make the output impedance 25Ω or more.
This can decrease the charge-discharging current compared to 6Ω.
Note that the variation may become large when measuring low impedance.



Fix to a measurement range for a larger current.
However, the measurement accuracy becomes lower.

Enables the auto DC cancel function.
It makes low impedance easier to measure.
Although the measurement becomes slow, it can save time for the auto DC balance.

For a battery whose electromotive force exceeds 5V, measure it in the same way as “ Figure 4-9
Example of external voltage bias circuit”. Usually, DC blocking capacitors C1 and C2 are charged
from the battery, external voltage source is not needed. If you do not want to take off the load current
from the battery or you want to save charge-/discharging time, charge C1 and C2 to the electromotive
force of the battery by an external voltage source in advance. You can reduce the load of the battery
by removing the external

voltage source

or increasing the resistance value R1 for

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ZM2376

4.10

Applying the DC Bias Voltage

charge-/discharging.
 Applying the high DC bias voltage
To apply the high bias voltage beyond 5V onto the DUT, external voltage source is required. In thiscase, insert the capacitance in series between HCUR terminal and HPOT terminal so that the DC voltage
and current may not run through the LCR meter.
Set the DC bias output of ZM2376 to OFF.
DC biasVoltage source

DC blocking circuit

ZM2376

R1
C1

HCUR
R2
S1

R3

DUT

HPOT

C2

LPOT

LCUR

Element value: Example when frequency is 100Hz or more and minimum output impeda nce is25Ω.
C1 = 200µF (Bipolar electrolytic capacitor)
C2 = 2.2µF (Film capacitor)
R1 =1kΩ (R2=1kΩ , R3=1MΩ)
Figure 4-9 Example of external voltage bias circuit

C1

When the minimum output impedance is 100Ω or the measurement is not performed at low
frequency, the charge-/discharging time can be shorten by decreasing C1. When themeasurement is performed at lower frequency or you want to decrease the measurement
error at low impedance, increase C1.

C2

As with C1, select an optimum value depending on the frequency and so on. An additional
error of the phase increases at lower frequency. To reduce this error, increase C2. However,it takes a longer settling time of the signal.

R1

R1 provides the charge-discharging current. R1 should be set to the value excessively
higher than the parallel value between the output impedance of LCR meter and theimpedance of DUT. Otherwise, the signal level applied to the DUT decreases, thereby
resulting in a large measurement error. In case of measurement of a large capacitance

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ZM2376

whoseimpedance

4.10

Applying the DC Bias Voltage

is

lower

than

outputimpedance

of

the

LCR

meter,

thecharge-/discharging time of DUT can be shortened by decreasing R1.
S1, R2

When you greatly change the bias voltage while the DUT is being connected: if the switch
S1 is closed temporarily, the charge-/discharging time of C2 can be shortened. Whencharge-/discharging almost finishes, open S1 to avoid an additional error caused by R2 andwait settling of the signal before the measurement.

R3

If you need the C2 to be remained in charged state while the DUT is not being mounted,
provide R3.

At a low or high frequency, an additional error that cannot be correct with OPEN and SHORT
correction is often distinguishable. In these situations, perform the LOAD correction if necessary. By
setting the bias voltage to 0 V and measuring a resistor of approx 100Ω with a good frequency
response, you can check an approx additional error.
If a change occurs in the bias voltage, the charge-discharging current of the DUT runs through the
LCUR terminal of the LCR meter, and the current sensing circuit of the LCR meter temporarily
saturates to disable the measurement. Also, the change of the bias voltage is applied to the HPOT
terminal through C2, and the voltage sensing circuit of the LCR meter temporarily saturates todisable the measurement.

！

WARNING
Use the bias voltage within the following range:(|Bias voltage[V]|+ 1.41 × Measurement signal level[Vrms]) < 42[V]
Otherwise, it may cause an electric shock.

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4.11

4.11

Applying the DC Bias Current

Applying the DC Bias Current

To flow the DC bias current in the inductor for measurement, you need a choke coil to reduce an
influence of the external power supply connected with DUT in parallel in addition to a DC blocking
circuit for applying the bias voltage and an external power to provide the bias current. Typicalmeasurement system is as follows.

External
power

L1
LCR meter

L2
S1

C1
HCUR
C2

DUT

HPOT

LPOT
n-pieceseriesLCUR(Protective diode)
Element value: Example when the measurement frequency is 1kHz or more.
C1=20µF (Film capacitor)
C2 = 1µF (Film capacitor)
Figure 4-10 Example of external current bias circuit
Usually, since the OPEN correction cannot be performed to remove an influence caused by the bias
current source, set the impedance of the choke coil L1 + L2 excessively larger than the impedance of
the DUT to reduce the measurement error.
The external power must be isolated from the ground. When the stray capacitance to grounding islarge, the measurement error may increase or the LCR meter may be unstable to disable themeasurement.
It is safe to lower the bias current to zero slowly and close the switch S1 before
connecting/disconnecting the DUT. The LCR meter may be damaged due to a high voltage caused by
the disconnected DUT. Set the protective diode. The rectifier diode, which has a serge current
susceptibility for preventing from damaging due to the bias current and also has a small reverse leak

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4.11

Applying the DC Bias Current

current, is suitable. When the signal voltage at the DUT end is 1Vrms max, the number of series
between H and L should be approx 8 pieces. Keep the forward voltage not to conduct the diode by
the measure signal！

WARNINGThe bias current should be increased/decreased little by little. If it is changed
rapidly, a high voltage may be generated, thereby causing an electric shock or
damaging the LCR meter.
To connect/disconnect the DUT, the bias voltage should be set to zero first. The
DUT should be connected firmly by tightening with screws or soldering. Once theinductor is disconnected while the bias current is running, a high voltage may begenerated, thereby causing an electric shock or damaging the LCR meter.
If the temperature of DUT can be increased during measurement, do not touch it
until the temperature excessively drops after measurement. If high voltage orcurrent is applied on the DUT for a long time, high temperature may cause aburn.

！ CAUTION

The bias current should be increased/decreased little by little. If it is changed
rapidly, a high voltage may be generated, thereby causing an electric shock or
damaging the LCR meter.
To connect/disconnect the DUT, the bias voltage should be set to zero first. The
DUT should be connected firmly by tightening with screws or soldering. Once theinductor is disconnected while the bias current is running, a high voltage may begenerated, thereby causing an electric shock or damaging the LCR meter.
If the temperature of DUT can be increased during measurement, do not touch it
until the temperature excessively drops after measurement. If high voltage orcurrent is applied on the DUT for a long time, high temperature may cause
DUT/ circumference can be burn out.

Usually, a constant voltage/current power supply (CVCC) is used for an external power. Set theoutput voltage to minimum necessary value so that it is safe even if the output terminal is released.
When the power supply operates unstably, you can adjust the response characteristics of the power
supply or insert a register in series to stabilize it.
When an external power is connected, measured values may vary by noise mixing like ripple current.
Also, the capacitance to grounding may increase (the impedance to grounding decreases), and themeasurement error increases or the operation is unstable to disable the measurement. In these

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4.11

Applying the DC Bias Current

situations, consider the following measures.
 Use an external power with low noise.
 Connect a bypass capacitor between power supply terminals to absorb the ripple current.
 Separate the ripple frequency of the external power and the measured frequency.
 Insert a choke coil to the LOW side to restrict noise mixing and decrease of the impedance togrounding. When the common mode noise is high, it may be improved by reversing thepolarity of the power.
 Fix to a measurement range not prone to cause a measurement error.
 Increase the measurement signal level of the LCR meter or decrease the output impedance.
 Decrease the measurement speed and also use averaging.

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4.12

4.12

Disabling the Key-Operation of Panel

Disabling the Key-Operation of Panel

The key-operation of panel can be disabled.
 Disabling/enabling the key-operation through the front panel_SHIFT_ + [ KEY LOCK ]Press the _SHIFT_ + [KEY LOCK] keys allows alternately switching between disabling (lock)and enabling (unlock) for key-operation.
However, even if key-operation is disabled, only the following functions are effective:•Enabling function for the key-operation with the _SHIFT_ + [KEY LOCK] keys.
•Restoring function from Remote into Local (panel operation) with the _LOCAL_ key.
KEY LOCK lamp
The KEY LOCK lamp of front panel lights up while the key-operation is being disabling.
KEY LOCK lamp

_SHIFT__LOCAL_ | [KEY LOCK] Disabling the key-operation through the Handler interface
If /KEY_LOCK signal of handler interface is set to “1” (low level), the key-operation of panel can bedisabled for that period. The /KEY_LOCK signal is disabling all key-operation. Also in this case, theKEY LOCK lamp lights up.
Locking by the /KEY_LOCK signal cannot be canceled by the panel operation or remote control
interface. Only when the /KEY_LOCK signal is set to “0” (high level), it can be canceled.

4-54

ZM2376

4.13

4.13

Changing the Settling Wait Time During Automatic Adjustment

Changing the Settling Wait Time During Automatic Adjustment

Auto adjustment operations like the auto range selection perform more than one measurement bychanging the setting during adjustment. Settling wait time for the next measurement after the setting
is changed is set to 20ms (default value). It does not need to be changed.
Under actual operating conditions, you can change it, for example, if you want to shorten the time forauto adjustment as the settlement is quick or if you want to make the settling wait time longer
because auto adjust do not operate correctly by a longer settlement.

_SHIFT_ + [ SYSTEM ]Press the _SHIFT_ + [SYSTEM] keys to display the system setting menu.
SYSTEM setting0)INTERFACE

1)BEEPER

2)INITIALIZE ALL
4)SELF TEST>NEXT

3)SETTLING

Options (first page)<>5)VERSION<PREV

Options (second page)
Options (third page)

Press the _3_ key to select the SETTLING, and the settling wait time setting menu is displayed.
SETTLING : 20ms

Current setting

1ms to 99ms

Available value ranges

Enter the numeric value and use the _ENTR_ key or the exponential part input _EXP_ + [m]keys.
If a setting is made or the EXIT operation is performed, one-previous menu comes back.

_SHIFT_

4-55_EXP_ | [SYSTEM]

ZM2376

4.14

4.14

Initializing of All Settings

Initializing of All Settings

ZM2376 can be initialized in some levels.
 Initializing the current setting while the contents of setting/correction value memory arebeing left over
_SHIFT_ + [ INIT ]Press the _SHIFT_ + [INIT] keys to display the initializing menu.
INITIALIZE1)ExecuteOptions

Done

Completion message

Press the _1_ key and select the Execute, and the current setting and correction value return to theinitial values.
After execution, the completion message appears for a short time and measurement screen comesback.
The following setting cannot be initialized but retained:
1) Contents of setting/correction value memory2) Frequency and setting memory specified in the multi-measurement list3) Setting of interface (GPIB, RS-232, USB, and LAN)
4) Trigger polarity of handler interface_0_ | [INIT]_SHIFT_

4-56

ZM2376

4.14

Initializing of All Settings

 Fully initialization: Initializes of all settings
Fully initialization is conducted in system setting menu.
_SHIFT_ + [ SYSTEM ]Press the _SHIFT_ + [SYSTEM] keys to display the system setting menu.
SYSTEM setting2)INITIALIZE ALL

3)SETTLING<>

Options (second page)

Press the _2_ key to select the INITIALIZE ALL, and the following fully initialization setting
menu is displayed.
INITIALIZE ALL
1)ExecuteOptions

Done

Completion message

Perform the EXIT operation to return to one-previous menu.
If _1_ key is pressed, following settings will return to factory default settings.
1) Current setting and correction value2) Contents of setting/correction value memory3) Contents of multi-measurement list
4) Setting of interface (GPIB, RS-232, USB, and LAN)
5) Trigger polarity of handler interface
After execution, the completion message appears for a short time and measurement screen comesback.

_SHIFT__EXP_ | [SYSTEM]

In the remote control, it is possible to initialize only 1), 2), and 3) described above.
•••the separate manual “ZM2376 Instruction Manual (Remote Control)” :SYSTem:RST

command

4-57

ZM2376

4.14

Initializing of All Settings

 Initializing the operation mode
ZM2376 provides more than one operation mode.
The operation mode cannot be initialized by the above two initializing operations.
To initialize the operation mode, set the operation mode to the default value. Set the operation modein the following orders.
_SHIFT_ + [SYSTEM] key operation → Displays the system setting menu_-_ _2_ _3_ _0_ _0_→ Displays the operation mode setting menu

_0_ key→ Selects the Mode 0 (Default value)

If the operation mode is set, same initial state as when fully initialization is executed in that mode isestablished. Initial setting may differ in each operation mode.
For details • • •



"4.18

Switching the Operation Mode (alternative command)" Completely restoring to the setting before shipment
To completely restore the factory default settings, set the operation mode to Mode 0 (default value).
Operation method • • • “Initializing the operation mode” above

4-58

ZM2376

4.15

4.15

Self-Diagnosis

Self-Diagnosis

The self-diagnosis function for analog measurement circuit is built in the ZM2376.
This function automatically runs at power-on, besides you can use it at your option.
_SHIFT_ + [ SYSTEM ]Press the _SHIFT_ + [SYSTEM] keys to display the system setting menu.
SYSTEM setting4)SELF TEST

5)VERSION<>

SELF TEST

123456h

Options (third page)
Maintenance data

Running

Running message

PassedPass message

Hardware failed

Error message example

Press the _4_ key to start the self-diagnosis, and display the “Running” message.
The self-diagnosis function finishes after several seconds, and if there is no error, the “Passed”
message appears for a short time and the measurement screen comes back. It is impossible tointerrupt this diagnosis function.
The maintenance data on the top right shows the total time operated.

_SHIFT__EXP_ | [SYSTEM]

If there is an error, the following error message is displayed.
•Hardware failed

Error of general measurement circuit•Oscillator failed

Error of drive signal source•Analyzer failed

Error of voltage/current measurement section•HF failed

Error of high-frequency internal impedance bridge

The serious error of measurement circuit can be detected by the self-diagnosis function. Slight error
cannot be found. To enhance the reliability of measurement, we recommend you to make a periodical
inspection such as starting inspection. The measurement of the DUT whose correct value was alreadyidentified enables even the slight error to be detected. To make a critical measurement, it is preferable
to check before and after the measurement.

4-59

ZM2376

4.16

4.16

Checking the Version

Checking the Version

The version number of ZM2376 firmware (built-in control software) is displayed after power-on.
You can also check it in the system setting menu.
_SHIFT_ + [ SYSTEM ]Press the _SHIFT_ + [SYSTEM] keys to display the system setting menu.
SYSTEM setting4)SELF TEST

5)VERSION<PREV

Options (third page)

Press the _5_ key to select VERSION to display the version of ZM2376.
VERSION
V1.00
Version2012/5/21 15:34
Last adjustment date and time (display only, and cannot be set)This is an example indicating the display format. The displayed content is different from that ofactual product.
Perform the EXIT operation to return to one-previous menu.

_SHIFT_

4-60_EXP_ | [SYSTEM]

ZM2376

4.17

4.17

Remote Control

Remote Control

ZM2376 can be remotely controlled by USB or RS-232 and GPIB.
LAN is available optionally.
For more information, refer to the separate manual “ZM2376 Instruction Manual (Remote Control)”.
The separate manual is included in the attached CD-ROM.
The setting of remote control interface is made from the system setting menu.
_SHIFT_ + [ SYSTEM ]Press the _SHIFT_ + [SYSTEM] keys to display the system setting menu.
SYSTEM settings0)INTERFACE

1)BEEPER>NEXT

Options (first page)

Select INTERFACE with the _0_ key to display the remote control interface setting menu.
INTERFACE:USB0)USB1)RS-232

Current setting2)GPIB

3)LAN

Options

USB

Selects USB (initial value) and displays the USB confirmation screen.

RS-232

Selects RS-232 and displays the RS-232 setting menu.

GPIB

Selects GPIB and displays the GPIB address setting menu.

LAN

Selects LAN and displays the LAN setting menu.
When the option is not furnished, this option is not displayed.

Select either one with a numeric key.
Perform the EXIT operation to return to one-previous menu.

_SHIFT_

4-61_EXP_ | [SYSTEM]

ZM2376

4.18

4.18

Switching the Operation Mode (alternative command)

Switching the Operation Mode (alternative command)

ZM2376 can change the remote control commands by switching the operation mode.
1) Operation mode 0: Standard operation modeUse the standard command for remote control.
The factory default setting is the operation mode 0.
The operating method and functions in the operation mode 0 are described in Chapters 3, 4, 5,
and the separate manual “ZM2376 Instruction Manual (Remote Control)”.
2) Operation mode 1: Alternative command modeUse the alternative command for remote control instead of the standard command
Use the operation mode 1 when the alternative command is easier to use for you.
The alternative command is described in the separate manual “ZM2376 Instruction Manual(Alternative Command)”.
The panel operation is the same as the operation mode 0.
The separate manual is included in the attached CD-ROM.
 Switching of operation mode
The operation mode is switched with the system settings menu.
_SHIFT_ + [ SYSTEM ]Press the _SHIFT_ + [SYSTEM] keys to display the system setting menu.
SYSTEM settings0)INTERFACE

1)BEEPER>NEXT

Options (first page)

Press the _-_ _2_ _3_ _0_ _0_ keys in this order to display the operation mode setting menu as
shown below. (This option is not displayed in the system menu.)
Operation mode:0

Current setting0)Mode 0

Options1)Mode 1

If a setting is made or the EXIT operation is performed, the measurement screen comes back.
When the operation mode is set, the initialization equivalent to “INITIALIZE ALL” in each operation
mode is executed.
When the operation mode 0 is selected, all settings are reset to the factory default. The operation
mode cannot be initialized by any method other than the selection of operation mode 0.

4-62

ZM2376

4.18

Switching the Operation Mode (alternative command)

In the operation mode 1, the underline cursor is displayed at the end of second line of the display.
Operation mode 0 •

•

•

•

•

•

•

1.00000k

•

•

•

•

•

•

•

1.00 V

Operation mode 1 •

•

•

•

•

•

•

1.00000k

•

•

•

•

•

•

•

1.00 V

4-63

Underline

ZM2376

5． TROUBLESHOOTING

5.

TROUBLESHOOTING ..................................................... 5-1

5.1 Error Message ................................................................... 5-2
5.1.1 Errors at Power ON .............................................................. 5-3
5.1.2 Errors at Panel Operation ..................................................... 5-4
5.1.3 Errors During Measurement ................................................. 5-5
5.1.4 Measured Value Display in Case of Error ............................. 5-6

5.2 When the Device Appears to be a Problem ....................... 5-7

5-1

ZM2376

5.1

5.1

Error Message

Error Message

An error in the self-diagnosis at power-on or a failure in the panel operation or remote control causes
an error message to be displayed.
This section describes the content, cause, and corrective action of main error messages.
The error messages related to the remote control are described in the separate manual “ZM2376
Instruction Manual (Remote Control)”.
When the repair is required, please contact NF Corporation or one of our representatives.
When you request the repair of ZM2376, please let us know the content of an error message if it isdisplayed. An error message not listed in this instruction manual may be displayed due to a
malfunction caused by strong external noise.
Before an error message, internal status at the time when an error occurred may be dis played. Whenmaking an inquiry to NF Corporation, giving us the internal status along with the error message will
be helpful to solve the problem.
Warning Level:nCode xxxxxxxx

Internal status

Error Message
Usual message

A special message not listed here may be displayed, for instance, when the firmware is updated. Ifother documents are supplied, also refer to such documents.

5-2

ZM2376

5.1

Error Message

5.1.1 Errors at Power ON
At power-on, the self-diagnosis is conducted and if an error is found, an error message as listed
below is displayed on the initial screen.
Error Message
ROM ERROR

Content and Cause
Internal memory (ROM) error

RAM ERROR

Internal memory (RAM) error

Calibration
memory lost

Calibration data has been lost

Hardware failed

Error of general measurement circuit

Oscillator failed

Drive signal source (H CUR terminal)
failureAnalyzer failed

Error of voltage/current measurement
section

HF failed

Error of high-frequency internal
impedance bridge

Previoussetting lost

Settings or correction values have beenlost.
An error is found in the setting memory,correction value memory, or resume
memory.
•Defective memory•Temporary failure due to power off,
etc. during data processing

Configuration
memory lost

System settings such as GPIB address
have been lost.
•Defective memory•Temporary failure due to power off,
etc. during data processing

5-3

Corrective action
Turn off the power once, and turn it on
again.
If the error occurs again, the device is
defective, requiring the repair.
If either of these errors is detected, theerror message is kept displayed, and thedevice cannot proceed to usual
operation.

Re-set the lost data.
If data loss is detected, the memory is
initialized and the device proceeds tousual operation. This error message canbe reset by pressing any key.
If this error message is displayed every
time when the power is turned on, thedevice is defective, requiring the repair.

ZM2376

5.1

Error Message

5.1.2 Errors at Panel Operation
Main errors due to the panel operation are as listed below.
Content and Cause

Corrective action

Settings conflict

Error Message

Specified settings could not be madedue to the restriction by other settings.

Use within restricted conditions. Or,change the settings that restrict others.

BIAS OverDC bias voltage setting was limited sothat it does not exceed the maximum
output voltage (about 7Vpeak) because
measurement signal level is large.

Reduce the signal level when large DC
bias voltage is required.

LEVEL Over

Measurement signal level setting was
limited so that it does not exceed the
maximum output voltage (about
7Vpeak) because DC bias voltage is
output.

Reduce the DC bias voltage setting or
turn off the DC bias output when large
measurement signal level is required.

Memory error

Contents of setting/correction value
memory are lost.

Re-save the contents.

Since there are other error messages and warning messages not listed here, see the description ofrespective operations.

5-4

ZM2376

5.1

Error Message

5.1.3 Errors During Measurement
Main error messages displayed during measurement or during measurement of correction values are
as listed below.
Error Message
Trigger ignored

Content and Cause•When trigger source is INT (internal),
an attempt to apply other trigger
was made and thus that trigger was
ignored.

Corrective action
Set the trigger source correctly
according to actual trigger signal.

•Though the device does not wait fortrigger, an attempt to apply thetrigger was made and thus thattrigger was ignored. Possible
causes will be as follows:

For the operation from the panel, press
the _SHIFT_ + [INIT] keys and then the_1_ key to execute initialization.

1) During the measurement, the trigger
is not accepted.

1) Send :ABORT command to abort
the measurement once.

2) If *RST command is executed,
continuous initiation is disabled, andthus the trigger immediately afterthat is not accepted.

2) Send :INIT:CONT ON command
or :INIT command to place thedevice in trigger waiting state.

•The device is in overheating state,
and thus the trigger was ignored.

Allow time until internal temperature
lowers sufficiently, and reset the error.

Correction meas
failedOPEN, SHORT, LOAD correction
values could not be measured.

Perform usual measurement to checkthe condition where measurement failed,
and then remove a problem.

Timeout error•As the measurement impossible state
lasts for a long time, themeasurement was terminatedforcibly.

Install device or cables that generatelarge noise away from the LCR meter.
Beware of charged device or humanbody so as not to discharge to the LCR
meter during measurement.

Main cause is large external noise orelectrostatic discharge.
Over
Temperature(Tripped)•Overheat was detected.
The drive signal level becomes
zero, disabling new measurement.

Remove a cause of overheat, and thenallow time until internal temperature
lowers sufficiently, and reset the error.

Main causes will be as follows:

1) Restrain the internal temperatureby lowering the ambient
temperature or executingintermittent measurement bytriggered drive.

1) The impedance below 1Ω was
measured for a long time at aplace of high ambient temperature.
2) Cooling fan is defective.
Over
Temperature(Removed)

For the operation from remote control,•Though overheat was detected, thetemperature has already lowered atwhich the device can operate.

2) Please ask NF Corporation or oneof our representatives for repair.
Press the _ENTR_ | [EXIT] key to reset
this message and the device will berecovered to usual operation.

Other error message may be displayed according to the situations.
For warning messages displayed due to various operations, see the description of each operation.

5-5

ZM2376

5.1

Error Message

5.1.4 Measured Value Display in Case of Error
If an error occurred in the impedance measurement, the measured values, including primaryparameter, secondary parameter, voltage monitored value, current monitored value, and theimpedance on the second line of the measurement screen are displayed as follows.
Display ofmeasured value
NC(No Contact)

Content and Cause
1) A contact failure was detected in
the contact check.
2) A contact failure was detected in
the low capacitance check.
When the contact check is enabled,
the measured value may become NC
due to the following causes:

ERR(ERRor)

ALC Err(ALC Error)

For the cases of 3) and 4), disable thecontact check and the low capacitancecheck, and then use the voltage/current
monitor function to check the signal level.
Confirm that the measured value is not
NC by using another test fixture to ensurea normal contact. If you find any failure,
repair it.

Measurement error: Correct measured
value cannot be obtained due to any
error such as detection of voltage orcurrent out of measurable range.

1) Switch to proper measurement range.
2) Use electrostatic shield to prevent
peripheral noise from mixing in.
3) Clean the contacts.

Main causes will be as follows:
1) Improper measurement range.
2) Noise mixed in.
3) Contact failure

The measured value read by the remotecontrol is the error value 9.9E+37.

ALC error: Though ALC is enabled,
the voltage or current monitored value
cannot be adjusted within the specified
range.

1) No corrective action available. Use
the device on the measurement signal
level in a range of 10mVrms to
5Vrms.

Main causes will be as follows:

2) Adjust manually the measurement
signal level so that the monitored
value becomes the specified value.

2) Since the DUT has strong
nonlinear voltage-current
characteristics, the built-in
algorithm failed to adjust.
3) Since the DUT parameter value
varies, repetitive adjustment failed
to obtain the specified value.

OVF(OVerFlow)

For the cases of 1) and 2), check theconnection cables and contact conditions
to ensure stable connections. To avoid
false detection, use the contact check inthe specified range.
For the case of 1), the measured value
read by the remote control is the error
value 9.9E+37.

3) The damaged drive signal source(HCUR) generates an abnormallysmall measurement signal.
4) The voltage detector or current
detector is faulty.

1) Out of adjustable range.

CORR Err(CORRection
Error)

Corrective action3) Adopt the measured value
successfully obtained by themeasurement.
The measured value read by the remotecontrol is the error value 9.9E+37.
The voltage and current measured values
are displayed even if out of specified
range.

Correction error: Since the OPEN
correction value and SHORT
correction value are too close or
reversed, any of OPEN, SHORT, andLOAD corrections cannot be executed.

Measure or set the correction value in arange where the OPEN correction value is
two times larger than the SHORT
correction value.

Overflow: Measured value exceeds thedisplay range.

Switch to proper measurement range.
Measured value may be displayed bychanging the type of parameters.
In the remote control, the measured value
is output within the specified range of
remote control, regardless of the display.

5-6

The measured value read by the remotecontrol is the error value 9.9E+37.

ZM2376

5.2

5.2

When the Device Appears to be a Problem

When the Device Appears to be a Problem

When the device appears to be a problem, check the following table to see if a corrective action is
given. When the problem persists or the device cannot be recovered though a corrective action was
taken, please contact NF Corporation or one of our representatives.
Table 5-1
Content

When the device appears to be a problem

Possible cause

1/4

Corrective action
Insert the power cord tightly.

not turn on

The power cord is notconnected correctly.
The power supply out of rated
range is used.

Panel operation

The key lock is turned on.

When KEY LOCK lamp is lighting,press the _SHIFT_ + [KEY LOCK]
keys to cancel the key lock.

/KEY_LOCK signal of handler
interface is active (Low).

Make the /KEY_LOCK signal inactive (High). No
other resetting method is available.

The device is in remote state.

When REMOTE lamp is lighting,press the _LOCAL_ key to return to the local state.
If the local lockout is set with USB or GPIB, thedevice cannot return to the local from the panel
operation. Return the device to local from thecontroller, or disconnect the USB cable or GPIB
cable.

Keys are deteriorated.

Please ask NF Corporation or one of ourrepresentatives for repair.

By *RST command:INIT:CONT OFF setting isretained.
In this case, the trigger is notapplied even if trigger source is
INT (internal).

Try to perform the following operations:•Initiate the trigger system with :INIT:CONT ON
or :INIT command.
•Press the _SHIFT_ + [INIT] keys and then the _1_
key to execute initialization.
•Turn off and on the power.

Trigger source setting isincorrect.

Check the trigger source setting. For example, toapply the trigger by remote control (USB, RS-232,
GPIB, LAN), set the trigger source to BUS. At thistime, manual trigger is ineffective.

Settings are not initialized.

In general, the operations are described, provided
that the settings have been initialized. Retry after
initialization by pressing the _SHIFT_ + [INIT] keys
and then the _1_ key.

Operation mode is incorrect.

Set the operation mode correctly by referring to “4.18
Switching the Operation Mode”. The underline cursor
is displayed at the bottom right of display in otherthan standard operation mode.

The power does

dose not work

Trigger is notappliedDevice does notoperate as
described in theInstruction Manual/ Remote control
commands do not

Check the voltage of power outlet with a multimeter.

function as
expected

5-7

ZM2376

5.2

Table 5-1

When the Device Appears to be a Problem

When the device appears to be a problem

2/4

Content

Possible cause

Corrective action

Large variations ofmeasured value

Measurement speed is too fast.

Reduce the measurement speed within allowable
range. If the averaging function is used together,more precise speed can be set.

Signal level is too small.

Increase the signal level.

Measurement started before the Make the trigger delay time longer.
signal settles.
Start the measurement after the contact becomesstable and the signal settled.
The current cables and voltage
cables interfere with each other(measured value varies when
the cables move).

Twist the current cable to current cable and thevoltage cable to voltage cable respectively to reducethe mutual interference.

Noise mixes in.

<Electrostatic induction> When high impedance ismeasured, electrostatic-shield the L-side signal wires
appropriately. Exposed signal wires cause the device
to be affected by peripheral potential variations. Also,
ground the case and peripheral conductors.
<Electromagnetic induction> Route the connection
cables so that a large loop is not formed.
<Common impedance coupling> Do not ground outerconductor of connection cables. If grounded, noise
current or a signal of adjacent LCR meter will flow in,affecting the measurement.

Signals interfere between
multiple LCR meters.

With the triggered drive enabled, adjust the trigger
timing so that the measurement signals of respective
meters do not overlap temporally.

Two-terminal connection is
made.

Make four-terminal connection. If low impedance ismeasured with two-terminal connection, contact
resistance will have strong effect. Do not connect
between HCUR and HPOT or between L CUR and LPOT in
the middle of wiring.

Contact to DUT is unstable.

Clean the contacts.
Turn on the contact check to check for abnormality.
The contact resistance can be checked withresistance value between H CUR and HPOT or between
LCUR and LPOT. The influence of contact resistancecan be checked by replacing a contact point withknown series resistance.

Measurement signal becomes
small due to damage ofmeasurement signal source ordefective connection cables.

Check the magnitude of signal with a voltage monitor
or current monitor.
If discharge is made to measurement terminals, themeasurement signal source, voltage detector, or
current detector may be damaged.
Check the cables for disconnection, or the inner andouter conductors for short-circuit.

5-8

ZM2376

5.2

Table 5-1
Content
Measured value
differs largely
from the expectedvalue,
measurement is
impossible,orcorrection values
cannot bemeasured

When the Device Appears to be a Problem

When the device appears to be a problem

Possible cause

3/4

Corrective action

Wrong correction values are set. Try to turn off OPEN, SHORT, and LOAD correction.
Check the frequency range for correction.
Re-measure or re-set correction values.
Measurement conditions areincorrect.

Set the frequency and signal level to the specified
values. Measured value may vary largely with themeasurement conditions depending on the DUT.

Improper measurement range is Switch to a proper measurement range, or enable theheld.
auto selection of measurement range.
The shield-to-shield connectionof connection cables is not
made.

For four connection cables, connect their outerconductor (shields) together. Otherwise, a return pathof measurement current is not formed, causing ameasurement failure.

Connection cables to DUT or
contacts are defective.

Check the cables for continuity, or the inner and outerconductors for short-circuit, or the contacts forcontamination.
If a contact failure of the L CUR terminal occurs, thebridge may be unbalanced to cause an error display.

The L side of DUT is grounded.
Or, DUT is grounded with low
impedance.

Do not connect the DUT’s terminal to the ground. It
can be checked with a multimeter. ZM2376 cannot
measure the grounded DUT. This is also true for themeasurement of correction values.

Internal impedance bridge isunstable (too large capacitance
between L terminal of DUT andground).

Including the capacitance of four connection cables,
reduce the capacitance between L terminal of DUT
and ground. Check the capacitance to ground(capacitance to shield), which may be very large for alarge DUT or DUT having complex construction.

Noise mixes in. Exposed signallines (particularly L side) arenear to a portion where potential
variations are extreme.

When measuring high impedance such as OPEN
correction, electrostatic-shield the signal lines or
ensures adequate distance from noise sources.
Ground the case and peripheral conductors. Whenthe signal level is small or the frequency is high, thedevice is likely to be interfered.

5-9

ZM2376

5.2

Table 5-1
Content
Measurement isslow

When the Device Appears to be a Problem

When the device appears to be a problem

4/4

Possible cause

Corrective action

Refreshing of display is slow.
Or, same measured value isobtained repeatedly, and thus
the measured value does notchange.

No corrective action available.
When the measurement speed is fast, the device
thins out and displays the measured results so thatthe measured values can be read appropriately.
The measurement itself is executed at the specified
speed.

Averaging is executed.

Check the setting of averaging count, and set it to 1 if
the averaging is not necessary.

Long delay time is set.

Check the trigger delay time, and set it to minimum
necessary value. When the trigger source is internal,
set it to initial value (8ms) or zero.

The measurement range isswitched by the range automatic
selection function.
The measurement range is notdetermined due to a noise orcontact failure.

When many DUTs having almost same value aremeasured, set the measurement range to HOLD.
The settling wait time with the automatic selection
enabled can be adjusted depending on the situation.

5-10

ZM2376

6． MAINTENANCE

6． MAINTENANCE ............................................................... 6-1
6.1 Preface .............................................................................. 6-2
6.2 Daily Maintenance ............................................................. 6-3
6.3 Storage, Repacking, and Transportation ........................... 6-3
6.4 Checking Version Number ................................................. 6-3
6.5 Checking Isolation ............................................................. 6-4
6.6 Performance Testing ......................................................... 6-4
6.6.1 Measurement Frequency Accuracy ...................................... 6-5
6.6.2 Measurement Signal Level Accuracy ................................... 6-5
6.6.3 Voltage Monitor Accuracy .................................................... 6-6
6.6.4 DC Bias Voltage Accuracy ................................................... 6-7
6.6.5 AC Impedance Measurement Accuracy ............................... 6-8
6.6.6 DC Resistance Measurement Accuracy ............................. 6-13

6.7 Calibration ....................................................................... 6-15

6-1

ZM2376

6.1

6.1

Preface

Preface

The following maintenance is essential for using the device under the best condition.
•Operation Inspection:

Check if the device operates properly.

•Performance Testing:

Check if the device respects the rated values.

•Adjustment, calibration: If the rated values are not satisfying, NF Corporation will make thenecessary adjustment or calibration to restore performance.
•Damage repairs:

When performance cannot be restored by the adjustment or calibration, NF
Corporation will identify the cause and location of the damage and will
execute repairs.

This instruction manual describes how to easily proceed with a performance test ing.
For more accurate inspections, adjustments, calibration or repairs, contact NF Corporation or one of
our representatives.
The following measurement instrument and standard are needed for the performance test .
•Frequency counter:

Accuracy: within ± 10 × 10-6
Reciprocal type, with noise rejection filter•AC voltmeter:

RMS value display
Accuracy: ± 0.5% (1kHz)
Input resistor: approx. 1M or more

•DC voltmeter:

Accuracy: ± (0.5% + 0.3mV) (10V range)
Input resistance: approx. 10M or more•Multimeter:

Should be able to make a diode test for measuring the voltage atapproximately 1mA in test current•Standard capacitor:

1pF, 10pF, 100pF, 1nF, 10nF, 100nF, 1µF•Standard resistor:

10m, 100m, 1, 10, 100, 1k, 10k, 100k, 1M, 10MThe standard capacitor and the standard resistor should be calibrated under
the actual test conditions.

•Others:

OPEN standard, SHORT standard

6-2

ZM23766.2

6.2

Daily Maintenance

Daily Maintenance

When the housing/panel surface needs cleaning, wipe with a soft cloth. To remove persistentcontamination, wipe with a soft cloth soaked with neutral detergent and wrung out. Do not use anyorganic solvents like thinner or benzene, or any chemical cleaning cloth, as they may cause thesurface finish to deteriorate, tarnish, or come off.

6.3

Storage, Repacking, and Transportation

Keep ZM2376 in a location that fills the installation requirements.
Installation conditions

 “2.2.2 Installation Conditions”

When repacking is necessary, for transportation for example, use a case that is of sufficient size andstrength, use filling that can withstand the weight of the instrument and make sure the instrument issufficiently protected.
During transportation, handle the instrument, taking care not to apply strong shocks to the
instrument.

6.4

Checking Version Number

The version number of ZM2376 firmware is displayed after power-on.

 “3.2.2 Displays and Indications at Power “ON” ”
During in use, the version can be checked in the system setting menu.

 “4.16 Checking the Version”
It is also possible to read out the version by means of *IDN? (Query).

 ZM2376 Instruction Manual (Remote Control) “5.3.1 Common Commands”
NF Corporation may offer a new improved version without notice. Please check our Web site andupdate if necessary.

 http://www.nfcorp.co.jp/
When turning the power on, also check the displayed test pattern (full dot display pattern) and alllamps being lit.

6-3

ZM23766.5

6.5

Checking Isolation

Checking Isolation

Remove all power cord, cable and etc of ZM2376 to separate it from others.
Fix the measurement range of multimeter to the range, which can be measured by the specified test
current.
Set the multimeter to diode test mode (test current 1mA), and measure between the outer conductorof each BNC connector on front panel of ZM2376 and the ground terminal (case) at bottom left.
Make sure that the voltage is within the range stated below. When out of this range, it might bepossibly damaged.
•HCUR vs. Case

0.4 to 0.8V (approx. 0.6V, the typical value at room temperature)•HPOT vs. Case

0.3 to 0.7V (approx. 0.5V, the typical value at room temperature)•LPOT vs. Case

0.3 to 0.7V (approx. 0.5V, the typical value at room temperature)•LCUR vs. Case

0 to 0.1V (approx. 0mV)

6.6

Performance Testing

Performance testing is conducted as part of preventive maintenance to prevent performancedegradation of ZM2376. Besides, conduct it if needed after acceptance inspection, periodic
inspection or repair.
If the result of a performance testing does not meet the specifications, calibration or repair is required.
Contact NF Corporation or one of our representatives.
The performance testing should be conducted in the following conditions.
•Power supply voltage:

100 to 230V ± 10% (250V or less)•Ambient temperature:

23 ± 5°C•Ambient humidity:

20 to 70%RH, non-condensing•Warm-up:

30 min or more

•Operation mode 0:

Should be set at first by referring to “4.18

Switching the Operation

Mode (alternative command)”. If you do not use the remote control, theoperation mode needs not to be set.
Take the following precautions when you conduct a performance testing.
• The setting contents for each test item contains the descriptions of items which should be further
changed after initializing the setting.
Initialization of settings

 “3.5.4 Initialization”_SHIFT_ + [INIT] and _1_ key
operations

6-4

ZM2376

6.6

Performance Testing

6.6.1 Measurement Frequency Accuracy
Connection: Connect the HCUR terminal and the frequency counter input with a coaxial cable.
After the initialization (_SHIFT_ + [INIT], and _1_ key operations),

Setting:

set the measurement frequency 1kHz (initial value) and measurement signal level
1Vrms (initial value).
Measurement:

Measure the frequency with the frequency counter.

Evaluation:

If the values on the counter are within the following range, it is normal.
Set value ± 100ppm (0.999900 to 1.000100kHz)

Remarks:

For the measurement of 1kHz, a reciprocal type counter equipped with a noise
rejection filter is suitable. If an unsuitable counter is used, it will cause a wrong
trigger or an insufficient resolution, resulting in an incorrect measurement. In such acase, set the measurement frequency to 1MHz and execute the measurement withgate time of 1s.

6.6.2 Measurement Signal Level Accuracy
Connection:

Connect the HCUR terminal and the input terminal of AC voltmeter with a coaxial
cable. The cable length should be approx. 1m or less.

Setting:

After initializing the setting, set the measurement frequency and measurement
signal level according to the contents in table stated below.

Measurement:

Measure the output voltage with the AC voltmeter.

Evaluation:

If the values indicated on AC voltmeter are within the specification range in table, it
is normal.

Measurement signal
level

Measurement frequency 1kHz (initial value)
Values indicated on AC voltmeter
Specification: ± (8% + 5 mVrms)

0.1Vrms

87m to 113mVrms

1Vrms

0.915 to 1.085Vrms

5Vrms

4.595 to 5.405Vrms

6-5

ZM2376

6.6

Performance Testing

6.6.3 Voltage Monitor Accuracy
HCUR and HPOT terminals together  AC voltmeter input (- terminal)

Connection:

LCUR and LPOT terminals together  AC voltmeter input (+ terminal)
For the connection, use a kelvin clip test leads (2325AL, etc.).

Kelvin clip

H terminal+ terminal

test leads, etc.

L terminal- terminal

AC voltmeter

If a multimeter powered by AC source is used, a large capacitance to earth isconnected to the L-side terminal, so the LCR meter gets unstable and correct
measurement may not be done. Therefore, we recommend you to connect +/inversely.
Setting:

After initializing the setting, set the measurement frequency and measurement
signal level according to the contents in table stated below.
Press the _AUX DISP_ key to display the auxiliary display selection menu, andselect the current / voltage monitored value (I-V).

Measurement:

Measure the output voltage under each condition with the AC voltmeter.

Evaluation:

If the values of voltage monitor are within the specification range in table for the
specified values of voltmeter, it is normal.
Measurement frequency 1kHz (initial value)
Measurement signal
level

Values indicated on AC voltmeter
Specification: ±(2% + 2mVrms)
Monitor

0.1Vrms

mVrms
VoltmetermVrms
Monitor

1Vrms

Vrms
Voltmeter
Vrms
Monitor

5Vrms

Vrms
Voltmeter
Vrms

6-6

Specification: ± 4.0mVrms
Difference:mVrms

Specification: ± 0.022Vrms
Difference:

Vrms

Specification: ± 0.102Vrms
Difference:

Vrms

ZM2376

6.6

Performance Testing

6.6.4 DC Bias Voltage Accuracy
HCUR and HPOT terminals together  AC voltmeter input (- terminal)

Connection:

LCUR and LPOT terminals together  AC voltmeter input (+ terminal)
For the connection, use a kelvin clip test leads (2325AL, etc.).
To use the coaxial cable, connect 4 shields all together.

Setting:

Kelvin clip

H terminal+ terminal

test leads, etc.

L terminal- terminal

AC voltmeter

After initializing the setting, set the measurement frequency to 1kHz (initial value)
and the measurement signal level to 0.1Vrms.
Press the _BIAS_ key to display the DC Bias setting menu, and turn on the DC Bias.
Set the DC Bias voltage according to the contents in table stated below in order ofprecedence.

Measurement:

Measure the DC Bias voltage with the DC voltmeter which is fixed at 10V range.
As the AC voltage is superimposed, correct measurement may not be performed if
the automatic range is enabled on the voltmeter.

Evaluation:

If the values on DC voltmeter are within the specification range of table, it isnormal.

DC bias voltage

Values indicated on DC voltmeter
Specification: ± (2% + 5mV)
-0.0050 V to +0.0050 V-1.0250 V to -0.9750 V-2.555 V to -2.445 V-5.105 V to -4.895 V

0.000 V
1.000 V
2.500 V
5.000 VCAUTION: The polarity is inversed due to the connection.

6-7

ZM2376

6.6

Performance Testing

6.6.5 AC Impedance Measurement Accuracy
Described here is the easy checking method. For the correct test, request NF Corporation to maketest.
Standard:

To make correct test, prepare a 4-terminal-pair standard with approximately 1/3 orless in calibration accuracy against the accuracy of ZM2376. Described here is an
example of test where easy-to-available standard is used.
When the frequency is low (for example, 120Hz), you can use a resistor whose
calibration value of impedance is not provided at each frequency for a simple test,by considering its impedance equal to the DC resistance. For the range of 10  to100k having good frequency response, you can obtain the impedance at 100kHz orless for a simple test in the following procedure.
• Calibration value Rdc of DC resistance• From the equivalent series inductance Ls[H] at 1MHz or the equivalent parallel．
capacitance Cp[F] , calculate the complex impedance Z by:．
．
Z = Rdc + j ω Ls or Z = 1/(1/Rdc + j (ω Cp))
．
．
2
2
2
2
|Z| = √( Rdc + (ω Ls) ) or |Z| = Rdc/√( Rdc (ω Cp) + 1)
θ = tan-1(ω Ls / Rdc) or θ = - tan-1(ω Cp Rdc)
where angular frequency ω = 2πf,f is frequency[Hz]When a calibrated general resistor is connected via test fixture to be used as thestandard, the test should be only intended for quick operation check, since
additional errors occur due to the test fixture or due to surrounding environment
differences from the calibration.
Connection:

Connect the standard to the measurement terminal of ZM2376.

Setting:

After initializing the setting, setting as shown below.
Measurement frequency = 120Hz, 1kHz, 10kHz, 100kHz, 1MHz, 5MHz
Measurement signal level = 1V (initial value)
Measurement speed = SLOW, Averaging count = 1 (initial value)
Cable length correction = 0m (initial value)
Measurement range = Fix it to the specified range.
Auto selection may not allow the specified measurement range. Accordingly, besure to fix it to the specified measurement range.

Measurement:

First, measures the OPEN correction and SHORT correction.
Thereafter, measure the standard according to the contents in table shown below.

Evaluation:

If the measurement values are within the range stated below, it is approximately
correct.
Calibration value of standard ± (Calibration accuracy of standard + Accuracy
specification of ZM2376)

6-8

ZM2376

6.6

Performance Testing

The specification values in the following table are calculated based on the fact that calibration valueof standard is equal to the nominal value, and are rounded to 2-digit in significant digit.
Measurement frequency 120Hz, Measurement signal level 1 Vrms, Cable length 0m
Measurement
rangeStandard(nominal
value)

1MΩ

1000pF100kΩ

0.01µF

10kΩ

0.1µF

1kΩ

1µF

100Ω

100Ω

10Ω

10Ω

1Ω

1Ω

100mΩ

100mΩ

Calibration value ofstandard
A
C
D
C
D
C
D
C
D
Z
θ
Z
θ
Z
θ
Z
θ

F
F
F
F
Ω
°
Ω
°
Ω
°
Ω
°

Difference
100×(B-A)/A

Measured value
B

Specification

B-A
C
D
C
D
C
D
C
D
Z
θ
Z
θ
Z
θ
Z
θ

F
F
F
F
Ω
°
Ω
°
Ω
°
Ω
°

C
D
C
D
C
D
C
D
Z
θ
Z
θ
Z
θ
Z
θ

%
%
%
%
%
°
%
°
%
°
%
°

C ± 0.35 %D ± 0.0035
C ± 0.011 %D ± 0.00011
C ± 0.10 %D ± 0.0010
C ± 0.10 %D ± 0.0010
Z ± 0.14 %θ ± 0.080 °Z ± 0.18 %θ ± 0.10 °Z ± 0.27 %θ ± 0.16 °Z ± 0.80 %θ ± 0.46 °Measurement frequency 1kHz, Measurement signal level 1 Vrms, Cable length 0m
Measurement
rangeStandard(nominal
value)

1MΩ

100pF

100kΩ

1000pF10kΩ

0.01µF

1kΩ

0.1µF

100Ω

1µF

10Ω

10Ω

1Ω

1Ω

Calibration value ofstandard
A
C
F
D
C
F
D
C
F
D
C
F
D
C
F
D
Z
Ω
θ
°
Z
Ω
θ
°

Measured value
B
C
D
C
D
C
D
C
D
C
D
Z
θ
Z
θ

F
F
F
F
F
Ω
°
Ω
°

6-9

Difference
100×(B-A)/A
B-A
C
%
D
C
%
D
C
%
D
C
%
D
C
%
D
Z
%
θ
°
Z
%
θ
°

Specification
C ± 0.44 %D ± 0.0044
C ± 0.12 %D ± 0.0012
C ± 0.11 %D ± 0.0011
C ± 0.098 %D ± 0.0010
C ± 0.098 %D ± 0.0010
Z ± 0.16 %θ ± 0.093 °Z ± 0.25 %θ ± 0.14 °ZM2376

6.6

Performance Testing

Measurement frequency 10kHz, Measurement signal level 1 Vrms, Cable length 0m
Measurement
rangeStandard(nominal
value)

1MΩ

10pF

100kΩ

100pF

10kΩ

1000pF1kΩ

0.01µF

100Ω

0.1µF

10Ω

10Ω

Calibration value ofstandard
A
C
D
C
D
C
D
C
D
C
D
Z
θ

F
F
F
F
F
Ω
°

Difference
100×(B-A)/A

Measured value
B

Specification

B-A
C
D
C
D
C
D
C
D
C
D
Z
θ

F
F
F
F
F
Ω
°

C
D
C
D
C
D
C
D
C
D
Z
θ

%
%
%
%
%
%
°

C ± 0.86 %D ± 0.0086
C ± 0.16 %D ± 0.0016
C ± 0.11 %D ± 0.0011
C ± 0.098 %D ± 0.0010
C ± 0.11 %D ± 0.0011
Z ± 0.20 %θ ± 0.12 °Measurement frequency 100kHz, Measurement signal level 1 Vrms, Cable length 0m
Measurement
rangeStandard(nominal
value)

100kΩ

100kΩ

10kΩ

10kΩ

1kΩ

1kΩ

100kΩ

10pF

10kΩ

100pF

1kΩ

1000pF100Ω

0.01µF10Ω

10Ω

Calibration value ofstandard
A
Z
θ
Z
θ
Z
θ
C
D
C
D
C
D
C
D
Z
θ

Ω
°
Ω
°
Ω
°
F
F
F
F
Ω
°

Difference
100×(B-A)/A

Measured value
B

Specification

B-A
Ω
°
Ω
°
Ω
°
F

Z
θ
Z
θ
Z
θ
C
D
C
D
C
D
C
D
Z
θ

F
F
F
Ω
°

Z
θ
Z
θ
Z
θ
C
D
C
D
C
D
C
D
Z
θ

%
°
%
°
%
°
%
%
%
%
%
°

Z ± 0.33 %θ ± 0.19 °Z ± 0.15 %θ± 0.083 °Z ± 0.14 %θ± 0.081 °C ± 0.41 %D ± 0.0041
C ± 0.17 %D ± 0.0017
C ± 0.16 %D ± 0.0016
C ± 0.11 %D ± 0.0011
Z ± 0.23 %θ± 0.13 °For the 1k, 10k, and 100k ranges, either a standard resistor or a standard capacitor should be
used for the test.

6-10

ZM2376

6.6

Performance Testing

Measurement frequency 1MHz, Measurement signal level 1Vrms, Cable length 0m
Measurement
rangeStandard(nominal
value)

1k

100pF

100

1000pF

100kΩ

100kΩ

10kΩ

10kΩ

1kΩ

1kΩ

100Ω

100Ω

10Ω

10Ω

Calibration value ofstandard
A
C
D
C
D
Z
θ
Z
θ
Z
θ
Z
θ
Z
θ

F
F
Ω
°
Ω
°
Ω
°
Ω
°
Ω
°

Difference
100×(B-A)/A

Measured value
B

Specification

B-A
C
D
C
D
Z
θ
Z
θ
Z
θ
Z
θ
Z
θ

F
F
Ω
°
Ω
°
Ω
°
Ω
°
Ω
°

C
D
C
D
Z
θ
Z
θ
Z
θ
Z
θ
Z
θ

%
%
%
°
%
°
%
°
%
°
%
°

C ± 0.41 %D ± 0.0041
C ± 0.22 %D ± 0.0022
Z ± 2.9 %θ ± 1.7 °Z ± 1.0 %θ ± 0.57 °Z ± 0.37 %θ ± 0.21 °Z ± 0.20 %θ ± 0.11 °Z ± 0.37 %θ ± 0.21 °For the 100 and 1k ranges, either a standard resistor or a standard capacitor should be used forthe test.
Measurement frequency 5MHz, Measurement signal level 1Vrms, Cable length 0m
Measurement
rangeStandard(nominal
value)

1kΩ

1kΩ

100Ω

100Ω

10Ω

10Ω

Calibration value ofstandard
A
Z
θ
Z
θ
Z
θ

Ω
°
Ω
°
Ω
°

Difference
100×(B-A)/A

Measured value
B

Specification

B-A
Ω
°
Ω
°
Ω
°

Z
θ
Z
θ
Z
θ

6-11

Z
θ
Z
θ
Z
θ

%
°
%
°
%
°

Z ± 1.8 %θ ± 1.0 °Z ± 1.6 %θ ± 0.91 °Z ± 2.3 %θ ± 1.3 °ZM2376

6.6

Performance Testing

Measurement signal level 0.1Vrms, Measurement frequency 1kHz, Cable length 0m
Measurement
range

100kΩ

Standard(nominal
value)

Calibration value ofstandard
A

1000pF

C
D

F

Difference
100×(B-A)/A

Measured value
B

Specification

B-A
C
D

F

C
D

%

C ± 0.43 %D ± 0.0043

Measurement signal level 0.1Vrms, Measurement frequency 1MHz, Cable length 0m
Measurement
range

1kΩ

Standard(nominal
value)

Calibration value ofstandard
A

100pF

C
D

F

Difference
100×(B-A)/A

Measured value
B

Specification

B-A
C
D

F

C
D

%

C ± 1.7 %D ± 0.017

Measurement signal level 5Vrms, Measurement frequency 1kHz, Cable length 0m
Measurement
range

100kΩ

Standard(nominal
value)

Calibration value ofstandard
A

1000pF

C
D

F

Difference
100×(B-A)/A

Measured value
B

Specification

B-A
C
D

F

C
D

% C ± 0.22 %D ± 0.0022

Measurement signal level 5Vrms, Measurement frequency 1MHz, Cable length 0m
Measurement
range

1kΩ

Standard(nominal
value)

Calibration value ofstandard
A

100pF

C
D

F

Difference
100×(B-A)/A

Measured value
B

Specification

B-A
C
D

F

6-12

C
D

% C ± 1.9 %D ± 0.019

ZM2376

6.6

Performance Testing

6.6.6 DC Resistance Measurement AccuracyStandard:

To make correct test, prepare a 4-terminal-pair standard with approximately 1/3 orless in calibration accuracy against the accuracy of ZM2376. For the measurementof low resistance, a 4-terminal connection is required to avoid an effect from contact
resistance.

Connection:

Connect the standard resistor to the measurement terminal of ZM2376.

Setting:

After initializing the setting, setting as shown below.
Primary parameter = Z
Secondary parameter = Rdc
Measurement speed = SLOW, Averaging count = 1 (initial value)
Measurement range of DC resistance = Auto selection (initial value, it cannot be
fixed by manual)Measurement:

First, measures the OPEN correction and SHORT correction.
Thereafter, measure the standard resistance according to the contents in table shown
below.
Directly connect the standard with the measurement terminal of LCR meter (cable
length= 0m).

Evaluation:

If the measurement values are within the range stated below, it is approximately
correct.
Calibration value of standard ± (Calibration accuracy of standard + Accuracy
specification of ZM2376)

Measurement
Standard
range of DC
resistor
resistance (nominal value)

Calibration valueof standard resistor
A

Measured value
B

Difference
100×(B - A)/ A

Specification(According tomeasurement
range)

1MΩ

10MΩ

Ω

Ω

%

± 2.2%

1MΩ
100kΩ

1MΩ

Ω

Ω

%

± 0.40%± 0.41%

100kΩ
10kΩ

100kΩ

Ω

Ω

%

± 0.095%± 0.37%

10kΩ
1kΩ

10kΩ

Ω

Ω

%

± 0.091%± 0.36%

1kΩ
100Ω

1kΩ

Ω

Ω

%

± 0.090%± 0.40%

100Ω

100Ω

Ω

Ω

%

± 0.13%

100Ω
10Ω

10Ω

Ω

Ω

%

± 0.44%± 0.17%

10Ω
1Ω

1Ω

Ω

Ω

%

± 0.50%± 0.27%

1Ω
100mΩ

100mΩ

Ω

Ω

%

± 0.90%± 0.90%

100mΩ

10mΩ

Ω

Ω

%

± 6.3%

6-13

ZM2376

6.6

Performance Testing

Supplement: When it is possible to fix the measurement range of DC resistance with the remotecontrol, fix it to the measurement range with high measurement accuracy. Since it is
impossible to fix by manual, press the _SHIFT_ + [RANGE] keys to display the
Measurement range setting menu, check the measurement range of DC resistance, andthen check the measurement accuracy at that measurement range.

6-14

ZM23766.7

6.7

Calibration

Calibration

If the performance test does not satisfy the specification, NF Corporation will make the necessary
adjustment or calibration to recover the performance. If necessary, contact NF Corporation or one of
our representatives.
You will be liable for the costs of adjustment and calibration outside the warranty period.

6-15

ZM2376

7． SPECIFICATION

7． SPECIFICATION .............................................................. 7-1
7.1 Specification ...................................................................... 7-2
7.2 External Dimensions ........................................................ 7-16

Supplementary value:

These values show the guideline data forreference and do not guarantee theperformance.

7-1

ZM2376

7.1

7.1

Specification

Specification

 Measurement parameters• Primary parameters|Z|, |Y|, L, C, R, G
For equivalent circuit of L, C, and R, Parallel / Series / Auto Selection are
selectable.

• Secondary parameters

Q, D, , X, B, Rs, Rp, G, Lp, Rdc (direct-current resistance)• Auto parameterPrimary parameters (including equivalent circuit) and secondary parameters

selection

can be selected automatically.

 Measured value display range• |Z|

0.000m to 999.999M

• R (Rs, Rp, Rdc), X

0 , ±(0.001m to 999.999M)• |Y|

0.00nS to 9.99999kS• G, B

0 S, ±(0.01nS to 9.99999kS)• C (Cp, Cs)

0 F, ±(0.00001pF to 99.9999kF)• L (Ls, Lp)

0 H, ±(0.00001nH to 9.99999GH)• Q, D0, ±(0.00001 to 99999.9)•±180.000°
Actual measurement and display ranges of respective parameters are
restricted by the measurement range or frequency.

7-2

ZM2376

7.1

Specification

 Measurement conditions• Measurement frequency 1mHz to 5.5MHz, Resolution 6 digits (1mHz when < 100Hz),
Accuracy ±0.01%• Measurement signal
Level Setting range

10mV to 5V, Resolution 3 digits (1mV when < 100mV)

Level accuracy± (8% + 5mV)  1MHz (typical value when < 1Hz)
± (10% + 5mV) > 1MHz
RMS values at open output.

• ALC

Constant voltage drive / Constant current drive / Disabled
Voltage setting range 10mV to 5V, Resolution 3 digits (1mV when <100mV)
Current setting range 1µA to 200mA, Resolution 3 digits (0.1µA when <10µA)
The constant control range will be narrower than the above specifications
depending on the product dispersion or DUT’s impedance.
The current range is restricted depending on the measurement range.

• Output impedance

6 / 25 / 100 (supplementary value).
The minimum output impedance can be selected from the above three values.
However, it is limited by the measurement range, the signal level, and thefrequency.

• Internal DC bias

Setting range 0V to +5V, Resolution 1mV,
Accuracy ± (2% + 5mV) [Level  2V]± (2% + 10mV) [Level  2V]
at signal frequency of 1 MHz or less, 23±10°C (Environmental
temperature), and open output.
It can be turned on / off.
• Trigger source• Trigger delay time

INT

Internal (automatic continuous trigger)

MAN

ManualEXT

Handler interface

BUS

Remote control

Setting range 0s to 999.9999s, Resolution 0.0001s(Time after input of trigger until start of signal acquisition)• Triggered drive

Drive only at measurement / Continuous drive selectable(Measurement signal can be output only during the time from trigger tocompletion of signal acquisition)

7-3

ZM2376

7.1• Measurement speed

Specification

RAPid / FAST / MEDium / SLOW / VerySLOw
Typical measurement time
(Typical value. Time from input of trigger to output of measurement end
signal EOM)
Measurement
frequency
120Hz

RAP

FAST

MED

SLOW

VSLO

10ms

10ms

26ms

126ms

501ms

1kHz

2ms

5ms

25ms

121ms

501ms

10kHz

2ms

5ms

25ms

121ms

501ms

100kHz

2ms

5ms

25ms

121ms

501ms

1MHz

2ms

5ms

25ms

121ms

501ms

Conditions: Measurement range hold, Trigger delay time = 0,
Averaging count = 1, Secondary parameter  Rdc.
Signal acquisition time is the value subtracted by about 1ms from the above
value.
DUT can be replaced immediately after the completion of signal acquisition.
After replacement of DUT, the signal settling time is required additionally.
It should be an appropriate trigger delay time and not zero.
Additional

time

when

measuring

direct-current

FAST
150ms

MED
150ms

resistance

Rdc(supplementary value)
(DC)

RAP
150ms

SLOW
218ms

VSLO
616ms

Conditions: DC resistance measurement range fixed, Trigger delay time = 0,
Averaging count = 1.

7-4

ZM2376

7.1

Specification• Measurement range
Measurement
range
1MΩ

Recommended
range
1MΩ to 11MΩMeasureablerange≥900kΩ

100kΩ

100kΩ to 1.1MΩ

≥90kΩ

100Ω

10kΩ

10kΩ to 110kΩ

≥9kΩ

100Ω

1kΩ

1kΩ to 11kΩ

≥0.9kΩ

100Ω

100Ω

9Ω to 1.1kΩ

No limitation100Ω (*1)

10Ω

0.9Ω to 10Ω≤11Ω100Ω (*1)

1Ω

90mΩ to 1Ω

≤1.1Ω

25Ω / 6Ω100mΩ9mΩ to 100mΩ

≤110mΩ

25Ω / 6ΩMeasureable range:

Output impedance100ΩApproximate range in which measurement and display
are possible (supplementary value).

*1

For the 10 and 100 ranges, the output impedance may
become 25 or 6 depending on the minimum output
impedance setting. In this case, the recommended range and themeasureable range for the 10 and 100 ranges change asfollows:
Measurement
range
100Ω

Recommended
range100Ω to1.1kΩ

Measureable
range
≥90Ω

10Ω

0.9Ω to110Ω

Not limited

Recommended range: Recommended operating range for high accuracy
measurement.
Limitations:

When frequency > 20kHz, the 1M range cannot be
used.
When frequency > 1MHz, the measureable range islimited to between 1 and 10k ranges.
When frequency > 2MHz, the measureable range islimited to between 10 and 1k ranges.
The output impedance may be restricted depending on
the frequency and signal level.
When cable length = 4m and frequency > 200kHz, themeasureable range is limited to between 10 and10k ranges.

• Measurement range selection

Auto / Manual

7-5

ZM2376

7.1

Specification

 Measurement accuracy• Basic accuracy

0.08%• Impedance measurement accuracy
Zr: Measurement range (100m to 1M
Zx: Measured value of impedance magnitude |Z|
With the above definitions, the impedance measurement accuracy is
obtained as follows:
Accuracy of impedance magnitude |Z| ±Az[%]
Az = ( A + B×U + Kz + Ky) × KT + ( Kv + KB )× U (Level ≤ 1V)
Az = ( A + B×U + Kz + Ky) × KT + Kv + KB × U (Level > 1V)
Accuracy of phase angle  of impedance ±Pz[°]
Pz = 0.573 × Az
The measurement accuracy when Az exceeds 10[%] is a supplementary
value. Excluding the highest and the lowest ranges available for eachfrequency, the measurement accuracy for the measured value smaller thanhalf the lower limit of each recommended measurement range or larger than
twice the upper limit is a typical value.
Each parameter value in the expression is listed below.
• U: Ratio coefficient
Zx

U> 100Ω

Zx / Zr (however, 1 when Zx / Zr < 1)

≤ 100Ω

Zr / Zx (however, 1 when Zr / Zx < 1)

If the measureable range for the 10 range becomes unlimited depending on the minimum
output impedance setting, the following values should be used.
Zx
> 10Ω

U
Zx / Zr (however, 1 when Zx / Zr < 1)

≤ 10ΩZr / Zx (however, 1 when Zr / Zx < 1)

7-6

ZM2376

7.1

Specification• A (upper row): Basic coefficient[%]• B (lower row): Proportional coefficient[%]
For the measurement speeds, MED, SLOW, and VSLO, the coefficient is as shown in the tablebelow.
For the measurement speeds, RAP and FAST, the coefficient is 1.1 times of the value shown
below.
Measurement
range
Zr
1MΩ
100kΩ
10kΩ
1kΩ
100Ω
10Ω
1Ω
100mΩ

Measurement
range
Zr
1MΩ
100kΩ
10kΩ
1kΩ
100Ω
10Ω
1Ω
100mΩ

Measurement frequency Hz
0(DC)

999.999
↑
1m

1k

20k
↑
1.00001k

50k↑
20.0001k

100k↑
50.0001k

200k↑
100.001k

0.20
0.15
0.06
0.03
0.06
0.03
0.06
0.03
0.09
0.03
0.08
0.04
0.20
0.05
0.30
0.40

0.15
0.10
0.06
0.03
0.06
0.03
0.06
0.03
0.12
0.02
0.12
0.06
0.20
0.05
0.30
0.30

0.12
0.15
0.06
0.03
0.06
0.03
0.05
0.03
0.05
0.03
0.10
0.06
0.20
0.03
0.20
0.20

0.30
0.30
0.06
0.06
0.06
0.03
0.05
0.03
0.06
0.03
0.12
0.08
0.30
0.08
0.30
0.40

----0.08
0.08
0.07
0.03
0.06
0.03
0.06
0.03
0.12
0.08
0.30
0.08
0.30
0.40

----0.20
0.08
0.10
0.04
0.10
0.04
0.06
0.03
0.12
0.10
0.30
0.08
0.40
0.40

----0.20
0.08
0.15
0.04
0.12
0.04
0.12
0.03
0.12
0.10
0.30
0.08
0.40
0.40

500k
↑
200.001k

1M↑
500.001k

2M↑
1.00001M

3M↑
2.00001M

4M↑
3.00001M

5.5M↑
4.00001M----0.30
0.10
0.20
0.05
0.15
0.05
0.14
0.03
0.12
0.20
0.30
0.50
0.50
1.00

----1.00
0.30
0.80
0.10
0.30
0.06
0.15
0.04
0.12
0.20
0.30
0.50
0.50
1.00

--------1.50
0.80
0.50
0.20
0.30
0.05
0.12
0.60
0.60
0.60
-----

--------1.50
1.00
0.60
0.30
0.40
0.08
0.12
0.80
-----------------1.50
1.20
0.60
0.30
0.40
0.08
0.15
0.80
-----------------2.00
2.00
1.50
0.30
1.50
0.08
0.20
2.00
---------

Measurement frequency Hz

The measurement accuracy is not guaranteed for "---".
The basic coefficient A of the 100 Ω range is increased 1.5 times, when the output impedance is25Ω or 6Ω below 1MHz.

7-7

ZM2376

7.1

Specification• Kc: Cable length coefficientFrequency range

Kc [%]DC, Frequency ≤ 1kHz

0.01 x (Cable length[m])1kHz < Frequency ≤ 100kHz

0.2 x (Cable length[m])100kHz < Frequency ≤ 1MHz

0.5 x (Cable length[m])1MHz < Frequency

20 x (Cable length[m])22Restriction on measurement frequency and signal level depending on cable length
Applicable signal level0m

Applicable frequency
range
All ranges including DC

1m

DC, Frequency ≤ 2MHz

All range

2m

DC, Frequency ≤ 2MHz

4m

DC, Frequency ≤ 1MHz

All range
All range for DC and frequency ≤ 500kHz≤ 2V for frequency > 500kHz

Cable length

All range

The measurement accuracy is not guaranteed for frequencies and signal levels out of theseranges.

• Kz: Residual impedance coefficientFrequency range

Kz [%]DC, Frequency ≤ 20kHz(0.02 + Kc) / Zx[Ω]20kHz < Frequency ≤ 100kHz(0.05 + Kc) / Zx[Ω]100kHz < Frequency(0.5 + Kc) / Zx[Ω]• Ky: Residual admittance coefficient
When the cable length is 0m, the coefficient is as shown in the table below.
When an extension cable (1m, 2m, or 4m) is used on the frequency of more 20kHz, thecoefficient is 10 times of the value shown below.
Frequency range

Ky [%]DC, Frequency ≤ 50kHz

Zx[Ω] / ( 2 × 107)

50kHz < Frequency ≤ 500kHz

Zx[Ω] × (Frequency[kHz]) 2 / (2 × 1010)

500kHz < Frequency

Zx[Ω] / ( 1× 105)

7-8

ZM2376

7.1

Specification• Kv: Signal level coefficient
For the DC resistance Rdc, V = 0.
The measurement accuracy is not guaranteed for signal levels < 100mV.
The measurement accuracy is not guaranteed for frequency > 2MHz, range = 10kΩ, and signal
level > 2V.
For other measurement parameters, the coefficient is as shown in the table below.
Frequency ≤ 120Hz
Signal level[Vrms]
Measurement
range
Zr

200m
↑
100m

500m
↑
201m

999m
↑
501m

2
↑
1.01

5
↑
2.01

1MΩ

0.40

0.10

0.10

0

0.10

0.15

100kΩ

0.10

0.02

10kΩ

0.10

0.02

0.02

0

0.03

0.10

0.02

0

0.03

0.10

1

1kΩ

0.10

0.01

0.01

0

0.03

0.10

100Ω

0.10

0.03

0.03

0

0.03

0.15

10Ω

0.20

0.03

0.01

0

0.04

0.04

1Ω

0.40

0.10

0.02

0

0.03

0.03

100mΩ

3.5

0.80

0.50

0

0.03

0.03

2
↑
1.01

5
↑
2.01

120Hz < Frequency ≤ 100kHz
Signal level[Vrms]
Measurement
range
Zr

200m
↑
100m

500m
↑
201m

999m
↑
501m

1

1MΩ

0.40

0.10

0.10

0

0.10

0.20

100kΩ

0.20

0.05

0.05

0

0.02

0.10

10kΩ

0.10

0.02

0.02

0

0.03

0.20

1kΩ

0.10

0.02

0.02

0

0.03

0.20

100Ω

0.15

0.05

0.05

0

0.10

0.20

10Ω

0.15

0.05

0.05

0

0.10

0.10

1Ω

0.10

0.01

0.01

0

0.01

0.01

100mΩ

1.5

0.20

0.10

0

0.01

0.01

2
↑
1.01

5
↑
2.01

100kHz < Frequency
Signal level[Vrms]
Measurement
range
Zr

200m
↑
100m

500m
↑
201m

999m
↑
501m

100kΩ

4.00

1.00

0.10

0

0.10

0.15

10kΩ

4.00

1.00

0.10

0

0.10

0.15

1kΩ

0.80

0.10

0.10

0

0.30

1.5

100Ω

0.20

0.05

0.05

0

0.50

3.0

10Ω

0.20

0.05

0.05

0

0.10

1.0

1Ω

0.10

0.01

0.01

0

0.01

0.20

100mΩ

1.5

0.20

0.10

0

0.01

0.01

7-9

1

ZM2376

7.1

Specification• KT: Temperature-dependent coefficient
Ambient temperature(T °C)

Frequency ≤ 20kHz

KT
Frequency > 20kHz

0 to +18

1 + 0.1 × (18-T)

1 + 0.15 × (18-T)+18 to +28

1

1+28 to +40

1 + 0.1 × (T-28)

1 + 0.15 × (T-28)• KB: DC bias coefficient
For the DC resistance Rdc, K B = 0 [%].
When the internal DC bias is disabled, K B = 0 [%].
When the internal DC bias is enabled, K B [%] is as shown in the table below.
Frequency Hz
Measurement
range
Zr

0
(DC)

120
↑
1m

20k
↑
120.001

100k↑
20.0001k

1M↑
100.001k

5.5M↑
1.00001M
---

1MΩ

0

0.02

0.02

---

---

100kΩ

0

0.01

0.01

0.01

0.01

---

10kΩ

0

0.01

0.01

0.01

0.01

0.20

1kΩ

0

0.01

0.01

0.01

0.01

0.20

100Ω

0

0.01

0.01

0.01

0.01

0.30

10Ω

0

0.05

0.05

0.05

0.20

0.50

1Ω

0

---

0.20

0.20

0.50

0.50

100mΩ

0

---

---

---

---

---

The measurement accuracy is not guaranteed for "---".

7-10

ZM2376

7.1

Specification• Other conditions
Warm-up

30 min or more

Zero correction

Execute OPEN correction and SHORT correction.

Cable Length Correction

Execute according to the connection cable length.

Calibration cycle

1 year• Measurement accuracy of measurement parameters except Z and θ
From the measurement accuracy of impedance, obtain as follows.
Here, Qx is a measured value of Q, Dx is a measured value of D, and x is a measured value of .
x used for accuracy calculation may be obtained from (90 ° - tan-1|1/Qx|) or (90 ° - tan-1|Dx|).
Parameter

Measurement accuracy±Az [%]|Y|
Lp, Ls, X±Az [%] (|Qx|≥10), ±Az / sinθx [%] (|Qx| < 10)

Cp, Cs, B±Az [%] (|Dx|≤0.1), ±Az / sinθx [%] (|Dx| > 0.1)

Rp, Rs, G±Az [%] (|Qx|≤0.1), ±Az / cosθx [%] (|Qx| > 0.1)
±Az [%]

Rdc±Qx2 × Pe / ( 1 - |Qx| × Pe ) (|Qx|≥10,|Qx|× Pe ≤0.1)
Here, the phase angle error Pe[rad] = 0.01 × Az[%]. It differs from Pz[°].
Measurement accuracy of Q is absolute value. It is not a % value.
±(0.01 × Az) (|Dx|≤0.1)
Measurement accuracy of D is absolute value. It is not a % value.

Q
D

In general, a range of each measurement parameter (maximum value and minimum value) can becalculated based on an error circle of the impedance.
±Az / sin(x) [%]±Az / sin(x) [%]Az [%]

Lsx = Xx= -1/(Csx)

Az [%]
Cpx = Bx= -1/(Lpx)

Phase
accuracy

Phase

c

|Zx|
x
Qx = tan(x)x: 0180°

accuracy

|Yx|
x

Rsx
±Az / cos(x) [%]Dx = tan(c)c: ±90°

Gx = 1 / Rpx±Az / cos(x) [%] = 2 ×  × Measurement frequency[Hz]. Suffix “x” of a parameter indicates a measured value.
Figure 7-1

Range of error

7-11

ZM2376

7.1

Specification

Pure L[H] and C[F] can be converted into |Z|[] by the following expression:|Z|[] = 2 × × Frequency[Hz] × L[H]
|Z|[] = 1 / (2 × × Frequency[Hz] × C[F])Approximate value can be read from the following graph.

Frequency

Frequency

Figure 7-2

LC - Z conversion graph

7-12

ZM2376

7.1

Specification

 Other measurement related functions• Zero correction

OPEN correction and SHORT correction provided. Both can be turned on oroff.

• LOAD correction

Provided. It can be turned on or off.

• Cable length correction 0m / 1m / 2m / 4m
• Contact check

Provided.
Based on detection of an abnormally low capacitance or abnormal
voltage/current.

• Averaging

1 to 256 times• Deviation measurement Primary parameters: Deviation and deviation % from reference value can bedisplayed.
Secondary parameters: Deviation and deviation % from reference value can bedisplayed.
• Comparator

Primary parameters: Max. 14 bins
Original measured value / Deviation / Deviation % canbe sorted.
Secondary parameters: Upper limit and lower limit comparison
Original measured value / Deviation / Deviation % canbe sorted.
Beeper:Sounds according to comparison result(Pass / Fail / Off)• Handler interface

Signal isolation:

All I/O signals are optically isolated(withstand voltage ±42V)

Input signal:

Trigger, Key lock, Settings/correction value memory
designation.
High speed recalling with only spot correction value ispossible.

Output signal:

Comparison result BIN1 to BIN11, NC / BIN12, PHI /BIN13, PLO / BIN14, OUT OF BINS, S-NG, ERR,INDEX, EOM (when BIN10 - BIN14 are used, NC,
PHI, and PLO cannot be used).

Rated power voltage: External +5V to +24V, Internal +5V (non-isolated)• Multi-measurement

Execute measurement and limit comparison under multiple conditions forthe total comparison.
Maximum number of steps: 32
Selectable measurement conditions: Measurement frequency, measurement
signal level, internal DC bias voltage, measurement parameters, etc.

7-13

ZM2376

7.1• Monitor display

Voltage:Specification

Voltage value applied to the DUT
Voltage Monitor Accuracy

Current:±(2%+2mVrms)

from 10Hz to 50kHz±(3.5%+2mVrms)

over 50kHz to 100kHz±(5%+5mVrms)

over 100kHz to 1MHz±(10%+10mVrms)

over 1MHz to 5.5MHz

Current value flowing in the DUT
Current monitor accuracy (supplementary value)
Voltage monitor accuracy + Measurement accuracy of
impedance Z• Discharge protection

4J or less when voltage is below 250V, or 0.5J or less when below 1kV.
(All are supplementary values)
For voltage V[V], the energy stored in capacitance C[F] is (1/2) × C × V2[J].

 Remote control interface• USB

USBTMC, USB 1.1 Full-speed• RS-232

Data rate
4800 / 9600 / 19200 / 38400 / 57600 / 115200 / 230400bps
For the data rate exceeding 19200bps, communication may faildepending on the characteristics of cable or controller.
Flow control
None, Software (X-ON/X-OFF), Hardware (RTS/CTS)• GPIB

Conforms to IEEE 488.1 and IEEE 488.2 Standards• LAN (optional)

10BASE-T / 100BASE-TX, RJ-45 connector

7-14

ZM2376

7.1

Specification

 General specifications• Power Supply

Voltage:

AC 100V to 230V ±10%, but 250V or lessFrequency:

50Hz/60Hz ±2Hz

Power consumption:

75VA or less

Overvoltage category II• Environmental conditions
Operation

Storage

Temperature:

0 to +40°C

Humidity:

5 to 85%RH. Absolute humidity 1 to 25g/m 3, non-condensing

Altitude:

2000m or lessTemperature:-10 to +50°C

Humidity:

5 to 95%RH. Absolute humidity 1 to 29g/m 3, non-condensing

Storage

Operation• Pollution degree

2 (indoor use)

• Safety

EN 61010-1
EN 61010-2-030• EMC

EN 61326-1 (Group 1, Class A)
EN 61000-3-2
EN 61000-3-3• RoHS

Directive 2011/65/EU• Warm-up Time

30 minutes• Settings/correction value memory

32 sets. Settings and correction values can be saved and restore
individually or together.

• Resume

Last setting and correction value are restore at power-on.

• External dimensions

Approx. 260 (W) × 88 (H) × 280 (D) mm, not including
protuberances• Weight

Approx. 2.4kg (without accessories)

7-15

ZM2376

7-16

Surface treatment
Front panel : Plastic sheet Ultra light gray (Munsell 6PB9.2/0.1)
Rear panel : Munsell 8.5PB2.6/0.2
Cover: Light gray leather tone (Munsell 6PB7.6/1.2 leather tone)

ZM2376 external dimensions

When the LAN option is mounted

When the LAN option is
mountedWarning labels on the cover

Figure 7-3

Rear view

When stand is used

Side view

7.2

Front view

7.2
External Dimensions

External Dimensions

ZM2376────── WARRANTY ──────
NF Corporation certifies that this product was thoroughly tested and inspected and found tomeet its published specifications when it was shipped from our factory.
All NF products are warranted against defects in materials and workmanship for a period of
one year from the date of shipment. During the warranty period, NF will repair the defective
product without any charge for the parts and labor. For repair service under warranty, theproduct must be returned to either NF or an agent designated by NF. Purchaser shall prepay
shipping charge, duties and taxes for the product to either NF or the agent from anothercountry, and shipping charge for the return of the product to purchaser shall be paid by NF
side.
This warranty shall not apply to any defect, failure or damage caused by a) improper use; b)
improper or inadequate maintenance and care; or c) modification by purchaser or personnel
other than NF representatives.
 Failure due to the handling or storage that violates the operating methods or precautions given in
the instruction manual Failure or damage caused by a fall or shock during transportation or relocation performed by thepurchaser Modification made to the product by the purchaser Failure by external abnormal voltage or influence of external equipment connected to the product Failure or damage caused by fire, earthquake, flood, thunder, rebellion, war, and force majeure
including other act of providence.
 Replenishment of consumable parts such as magnetic tapes and batteries────── REPAIR ──────
When a failure occurred and the product was found to be defective or you have any uncertainty,
please get in touch with NF Corporation or one of our representatives.
In such a case, let us know the model name (or product name), serial number (SERIAL No. given on
the nameplate), and symptom and operating conditions as detail as possible.
Though we will make efforts to reduce the repair period, when five or more years have passed since
you purchased the product, it may take time due to, for instance, the out of stock of repair parts.
Also, if the production of repair parts is discontinued, the product is extremely damaged, or the
product is modified, we may decline the repair.

NOTES

Reproduction of the instruction manual, part or whole, is forbidden without priorwritten permission.

The contents of the instruction manual are subject to change without notice.



Information provided in the instruction manual is intended to be accurate and reliable.
However, we assume no responsibility for any damage regarding the contents of the
instruction manual.
If you have any uncertainty or you found an error or omission, please contact NF
Corporation or one of our representatives from which you purchased the product.

ZM2376

Instruction Manual (Basics)
NF Corporation

6-3-20 Tsunashima Higashi, Kohoku-ku, Yokohama
223-8508, JAPAN
Phone: +81-45-545-8128

Fax: +81-45-545-8187

http://www.nfcorp.co.jp/© Copyright 2013 – 2022

NF Corporation

http://www.nfcorp.co.jp/

NF Corporation
6-3-20 Tsunashima Higashi, Kohoku-ku, Yokohama 223-8508 JAPAN