ENVIRONMENTAL, HEALTH AND SAFETY ACTIVITIESBASIC POLICYTokyo Electron observes socially responsible corporate management
as a means to achieve sustained corporate growth and continued
social development. Assuring safety in our own facilities and thoseof our customers and minimizing environmental loads across ouractivities are the two defining principles of our CSR policy. Tokyo
Electron aims to achieve cohesion of environmental protection andsafety by investing the required management resources from theequipment development stage onwards.
In 1997, Tokyo Electron adopted environmental management
policies based on ISO 14001 that have subsequently acquired ISO
certification for our facilities. Tokyo Electron recognizes that making
every effort to assure that everyone associated with our businesscan look forward to a comfortable, healthy and safe life is no lessimportant than the environment. Acting on this, we established theTokyo Electron Credo and Principles on Environment, Safety andHealth in 1998. At Tokyo Electron, we are aware of the importanceof the environment, health and safety. We have given them animportant place in our statement of management philosophy andactively promote these activities throughout Tokyo Electron.

ENVIRONMENTAL ACTIVITIES■ Preventing Global Warming

generated during their life cycles, we have compiled quantitative
data on such environmental burdens during each stage of a
product’s life, from manufacturing and use to disposal, and built
up a product LCA database. The ability to draw on this informationin the design of our products has made us a leading company in
our industry in energy conservation.
Since many of our products are manufactured and used in clean
rooms, we take an all-inclusive approach that factors in the energy
conservation aspect of the entire system, including the equipment
and the clean room. The five major approaches taken in this respect are as follows:
1. Reducing the energy consumption of the equipment itself
2. Reducing the energy consumption of peripheral devices
3. Using equipment in a way that conserves energy
4. Reducing the energy consumption of the clean room
5. Overall clean room management (planned andappropriate operation)
Tokyo Electron will implement environmental activities concerning ourequipment and operation of clean rooms in cooperation with customers.
Promoting these initiatives directs Tokyo Electron toward themanufacture of energy-efficient equipment and to advisingcustomers on how to use the equipment in a way that minimizes
energy consumption.

Following ratification of the Kyoto Protocol, companies are being
asked to contribute more to prevent global warming.
5. Overall clean room management (planned and appropriate operation)
Carbon dioxide is emitted during the operation of ourequipment. It is also emitted by our manufacturing
4. Reducing the energy consumption of the clean room
facilities and from the use of energy at our offices. TheLife Cycle Assessment (LCA) method we use to quantitatively assess a product’s environmental load showed thatour products emit relatively high levels of carbon dioxide
gas during the operation stage as compared to otherstages in their life cycle. We are responding with special
Chiller 2. Reducing the energy consump- Vacuum
environmental measures to reduce such emissions.

■ Promoting Environmentally Friendly Products
We are active in incorporating environmental suggestions from our customers into our products in order tolower environmental loads during the semiconductor
manufacturing process and to eliminate use ofhazardous substances in the manufacture of ourequipment. Particular about environmental loads

Unittion of peripheral devices

1. Reducing the energy consumption of the equipment itself
3. Using equipment in a way thatconserves energyPump■ Lead-free Soldering Technology■ Green Procurement

European Union (EU) directives will ban the use of mercury, cadmium,lead and other hazardous substances in electrical and electronicequipment in Europe after June 2006. Although these directives
do not apply to semiconductor manufacturing equipment, Tokyo
Electron is voluntarily and systematically manufacturing lead-freeproducts as part of efforts to forestall further pollution.
Tokyo Electron established the Lead-free Task Team, made up ofleaders of Tokyo Electron’s firms and operating divisions, to develop lead-free soldering technology for the manufacture of ourequipment. Plans call for completing preparations for production ofequipment using lead-free solder in the year ending March 31,
2006 and starting production in January 2006.

Almost all of our materials and parts
for the manufacturing of semiconductor
production equipment are sourced
from suppliers. If we are to reduce
environmental loads across all of ourbusiness activities, components andraw materials must be produced inways that take the environment intoaccount. In this respect, we are making an effort to conduct procurement
based on our Green Procurement
Green Procurement Guideline
Guideline, buying only from those
suppliers who are actively making efforts to reduce environmental
impacts. In the future, we intend to start procuring materials only
from suppliers who meet specific environmental standards.

■ Introduction of Environmental Management System
Tokyo Electron’s manufacturing facilities have developed and implemented environmental management systems based on ISO 14001
and are now ISO certified. The Tokyo Electron Device Limited
Yokohama Office and the Tokyo Electron AT Limited Miyagi Plant
became ISO 14001 certified in the year ended March 31, 2005.

■ Energy Conservation Initiatives
Each of our facilities is working to prevent the greenhouse effect byreducing energy use. Energy conservation programs include those to
reduce power consumption for lighting and office equipment, andsetting air-conditioning temperature targets. Our manufacturing anddevelopment facilities systematically shut down equipment duringconsecutive holiday periods, and implement measures to reduceenergy consumption by enhancing operating efficiency.
Tokyo Electron Kyushu Limited’s Koshi Plant in February 2005
won the Kyushu Bureau of Economy, Trade and Industry Director’sPrize (Electrical Division), which is awarded to manufacturing
plants in recognition of notable achievements in energy conservation. The Koshi Plant
was cited for its
energy conservation
measures, such as
adjusting air circulation in its clean room
facilities at night andon holidays and for
reducing lighting in its
logistics areas.
Tokyo Electron Kyushu Limited, Koshi Plant■ Environmental Sustainability
ReportTokyo Electron has been publishingenvironmental reports since 2000.
We believe that it is important tostrengthen communication with thepublic by providing and sharing as
much information as possible about
our environmental activities. The environmental report for the fiscal year
ended March 2005 is to be publishedin autumn 2005.

■ Safety and Health Activities

Environmental Sustainability
Report 2004

Tokyo Electron promotes health and safety in all of its operations.
This includes giving top priority to the health and safety of ouremployees and customers, and ensuring safety rules are adheredto with regard to equipment.
The Tokyo Electron Credo and Principles on Environment, Safety
and Health clearly state that employees are responsible for being
constantly aware of health and safety considerations in each andevery business activity. To implement these guidelines, we conduct
risk assessments of our shipped products and each assembly andstart-up process. Where safety risk is judged to be high, we takesystematic steps to reduce it. We are also making efforts to identifyand eliminate dangers in our work processes before problems occur.

TOKYO ELECTRON LIMITEDANNUAL REPORT 05

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