Commitment to the Environment, Health and Safety
We believe that, as a business enterprise, Tokyo Electron has an important mission tofully consider environmental protection in its business activities, giving top priority topeople’s health and safety.

Environmental Activities
Having established the Tokyo Electron (TEL) Group Environmental Committee in 1996 as
the base for our environmental activities, we proceeded to create the TEL Group Credo andPrinciples on Environmental Preservation, which were announced in 1998. Since then, we havebeen fully committed to environmental protection. Among other achievements, we have received
ISO 14001 international environmental management standard certification for seven of our majordomestic facilities. Utilizing this foundation, we are actively working to attain consistent improvement in our environmental performance. Specifically, we have continuously been accomplishing
results in the following types of activities.

Safety First!

• Reduction of wastes and improvement of recycling rate
• Promotion of energy and resource conservation• Proper control of chemical substances• Development of environmentally benign products

Further Emphasis on Products with Reduced Environmental Impact
Our environmental activities have gotten successfully under way and are beginning to yield
results. From the fiscal year under review, we have entered our second phase in which we areplacing particular emphasis on development of products with reduced environmental impact. The
following are a few of those related activities.
•Green Procurement“Green procurement” means sourcing parts based on environmental considerations inaddition to the conventional criteria of quality, cost, and delivery period. We issued the TELGroup’s Green Procurement Guideline in January 2001, distributing it to suppliers throughout
Japan. In addition, around 200 companies were invited to take part in green-procurement seminars to solicit their cooperation in the implementation of our green-procurement policies. Taking
the initiative as an industry leader, our first step in this process involves conducting vendor
assessments of the environmental activities implemented by our suppliers. In the second step, we
assess the environmental considerations for the parts procured by the TEL Group.
Conventional Procurement Criteria

quality+cost+ delivery period

Green Procurement Criteria

quality+cost+ delivery period + environmental considerations•LCA Initiative
Life Cycle Assessment (LCA) is a technique for quantitatively assessing a product’s environmental impact at each stage of the course of its life: from raw materials through manufacture,transport, use, and disposal. We can significantly reduce a product’s overall environmental impact
by analyzing, assessing, and giving priority to rectifying major problems. In the fiscal year ended
March 2001, each business unit implemented LCA with its sights set on reducing global warming.
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Environmental Accounting
Environmental accounting is a tool for ascertaining the cost and effect of a company’s environmental activities for use within the company’s routine operations. As a Group, we have beenusing environmental accounting since the fiscal year ended March 2001. The results for the fiscal
year under review will be available in the Environmental Report 2002, which will be published infall 2002.

Leadership in SEMI’s Global Care™ Program
The semiconductor and LCD industries are attracting global attention for their cutting-edge
technologies and growth. Befitting their technological prowess, there are equally high expectations forthese industries to be on the cutting-edge of activities aimed at preserving the global environment andpromoting human health and safety.
No company can achieve this goal single-handedly, and the semiconductor and FPD industries as a whole—from top to bottom of the supply chain—must cooperate in attaining this goal. As
an industry leader, Tokyo Electron is involved in a wide range of activities focused on this goal under
the Global Care™ Program of Semiconductor Equipment and Materials International (SEMI).
.
The Global Care™ Program focuses on the following five important targets;• Workplace Health & Safety• Resource Conservation• Product Stewardship• Community Service• Excellence
A declaration expressing our endorsementof Global CareTM. It has been submitted toSEMI.

Safety Activities
Our continued existence as a corporation relies upon the safety and health of our employees, customers, and everyone involved with the TEL Group’s business. During 2000, to set out
our commitment to these areas in a clear and understandable fashion, we drew up the TELGroup Credo and Principles on Safety and Health. According to these guidelines, safety andhealth have top priority in our business activities. Profit considerations and decisions regarding
delivery dates and times must not take precedence over human safety and the safety of facilities
and equipment.
The TEL Group also provides Group-standardized safety training to its officers and employees under its Safety 2000 Program. This system has been developed so that all the employees of the Group acquire the same
safety awareness, regardless of differences between countries
and cultures, based on the Tokyo Electron's corporate policy—
Safety First. The training program is also designed to further
improve our customers’ confidence in the TEL Group.

For further information on our environment, health and safety
activities, please see our Environment Report. (available at
http://www.tel.co.jp/index_e.html)

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