◒⢏ຍᕤᏛ఍ㄅ㻞㻞㻌㻌㻌㻌㻌➨ 㻠 ᅇ◒⢏ຍᕤᇶ♏ㅮᗙ㻌 䛂◊☻䛃㻌䝷䝑䝢䞁䜾䞉䝫䝸䝅䞁䜾⿦⨨ᐑୗ㻌 ᛅ୍㻌 䠄୙஧㉺ᶵᲔᕤᴗᰴᘧ఍♫䠅㻌 㻌䠍䠊䛿䛨䜑䛻䠏䠊∦㠃䝷䝑䝢䞁䜾䞉䝫䝸䝅䞁䜾⿦⨨㐟㞳◒⢏䜢⏝䛔䛯◊☻᪉ἲ䛻䝷䝑䝢䞁䜾䛸䝫䝸䝅䞁䜾䛜䛒䜛䠊䠏䠊䠍㻌 ∦㠃◊☻⿦⨨䛾≉ᚩ䛔䛪䜜䜒୍ᐃ䛾ᅽຊୗ䛷䠈◒⢏䜢ᠱ⃮䛧䛯ຍᕤᾮ䠄䝇䝷䝸䞊䠅∦㠃◊☻⿦⨨䛿ᕤస≀䜢ᐃ┙㠃䛻ᢲ䛧ᙜ䛶ᐃ┙㠃䛾ᙧ䜢௓䛧䛶ᕤస≀䛸ᐃ┙䠄ᕤල䠅䜢┦ᑐ㐠ື䛥䛫䜛ຍᕤἲ䛷䛒䜛䠊≧䜢㌿෗䛩䜛ຍᕤᶵ䛷䛒䜛䠊ᅗ  䛻⿦⨨ᵓ㐀ᅗ䜢♧䛩䠊⿦⨨䝷䝑䝢䞁䜾䛿⢒䛔◒⢏䜢⏝䛔䛶⾜䛖ᶵᲔ◊☻䛷䛒䜚䠈㧗䛔ᑍ䛿ᐃ┙䛸ᐃ┙䜢ᨭᣢ䛩䜛ᅇ㌿㍈ཷ䛸㥑ື※䛛䜙䛺䜛䝅䞁䝥䝹ἲ⢭ᗘ䛸ᙧ≧⢭ᗘ䛜ᚓ䜙䜜䜛䠊䝫䝸䝅䞁䜾䛿ᕤල䛻㌾㉁䛾◊䛺ᵓ㐀䛷䛒䜛䠊ᅇ㌿㍈ཷ䛿㏻ᖖ䛾⢭ᗘရ䛻䛿㌿䛜䜚㍈ཷ䛜䠈☻ᕸ䜢⏝䛔䛶䠈1ȝm ᮍ‶䛾ᚤ⣽◒⢏䛸໬Ꮫస⏝䜢ᣢ䛴ຍᕤ䜸䝥䝔䜱䜹䝹䝣䝷䝑䝖䛺䛹䛾㉸⢭ᐦရ䛻䛿㟼ᅽ㍈ཷ䛜⏝䛔䜙ᾮ䜢⏝䛔䛶⾜䛖໬ᏛᶵᲔ◊☻䠄CMP䠖Chemical Mechanical䜜䜛䠊∦㠃◊☻⿦⨨䛿ᯛⴥᘧ∦㠃◊☻⿦⨨䛸䝞䝑䝏ᘧ∦㠃Polishing䠅䛷䛒䜚䠈ຍᕤኚ㉁ᒙ䛾䛺䛔ᖹ⁥䛺㙾㠃䛜ᚓ䜙䜜䜛䠊◊☻⿦⨨䛻ศ㢮䛥䜜䜛䠊䝷䝑䝢䞁䜾⿦⨨䜒䝫䝸䝅䞁䜾⿦⨨䜒ᇶᮏⓗ䛺⿦⨨ᵓ㐀䛿ྠ䛨䛷䛒䜛䠊⏝㏵䛻ᛂ䛨䛶ᐃ┙䛻䛿◒▼䜔㔠ᒓ㖡䠈ᚚᙳ▼䠈䝉䝷䝭䝑䜽䠈ⓎἻᶞ⬡ᮦ䛺䛹䛾ᵝ䚻䛺㒊ᮦ䜢㑅ᢥ䛷䛝䜛䠊䠄䠍䠅ᐃ┙ಟṇ㻌䝷䝑䝢䞁䜾⿦⨨䛷䛾ᐃ┙ᙧ≧䛾⟶⌮䛿┤ᚄᙧ≧䛸༙ᚄᙧ≧䛷⾜䛖䠊∦㠃䝷䝑䝢䞁䜾⿦⨨䛷䛿ᕤస≀⢭ᗘ䜈䛾ᙳ㡪䛜኱䝷䝑䝢䞁䜾⿦⨨䛿ຍᕤ䛾㐍⾜䛻క䛔ᐃ┙㠃䛾ᦶ⪖䛜㐍⾜䛝䛔༙ᚄᙧ≧䜢ᇶ‽䛻⟶⌮䛧䛶䛔䜛䠊ᐃ┙㠃䛾ᦶ⪖≉ᛶ䛿䛩䜛䛯䜑䠈ᐃ┙㠃䛾⢭ᗘ䜢⥔ᣢ䛩䜛ಟṇᶵᵓ䛜ᚲせ䛷䛒䜛䠊ᕤస≀䛾䝃䜲䝈䜔㓄⨨䛻䜘䛳䛶ኚ䜟䜛䛯䜑䠈䛭䜜䛻ྜ䜟䛫䛯䝫䝸䝅䞁䜾⿦⨨䛿໬Ꮫస⏝䜢ᣢ䛴ຍᕤᾮ䜢౑⏝䛩䜛䛯䜑⪏ᙧ≧䛾ಟṇ䝸䞁䜾䜢౑⏝䛩䜛䠊୍⯡ⓗ䛻ᕤస≀䜢ຍᕤ䛩䜛䛸⸆ရᛶ䛾㒊ရ䛜౑䜟䜜䜛䠊䜎䛯◊☻⇕䛻䜘䜛ᐃ┙ኚᙧ䜢ᢚᐃ┙䛾༙ᚄ䛿พᙧ䛻ᦶ⪖䛩䜛䛯䜑䠈ᐃ┙༙ᚄ䛾ᖜ䜘䜚኱䛝䛔ไ䛩䜛䛯䜑䠈෭༷ᶵ⬟௜䛝䛾ᐃ┙䜔ప⇕⭾ᙇྜ㔠ᐃ┙䛜౑ෆᚄᑍἲ䛾ಟṇ䝸䞁䜾䜢౑⏝䛩䜛䠊ᕤస≀䛾ຍᕤ䛸ྠ᫬䛻ಟ䜟䜜䜛䠊ṇ䝸䞁䜾䜢౑⏝䛧ᙧ≧䜢⥔ᣢ䛩䜛㐠⏝䜔䠈ᐃᮇⓗ䛻ᙧ≧䛾ಟᮏゎㄝ䛷䛿༊ู䛜ᚲせ䛺ሙྜ䛻䛿䝷䝑䝢䞁䜾⿦⨨䠈䝫䝸䝅䞁䜾⿦⨨䛸⾲グ䛧䠈䛭䛖䛷䛺䛔ሙྜ䛿◊☻⿦⨨䛸グ㍕䛩䜛䠊◊☻⿦⨨䛾༊ศ䜢⾲  䛻♧䛩䠊⿦⨨௙ᵝ㔠ᒓᐃ┙䠈ᶞ⬡㔠ᒓᐃ┙䠈䝢䝑䝏◊☻⏝䛾⿦⨨䛻䛿ᐃ┙ 䝷䝑䝢䞁䜾 䝫䝸䝅䞁䜾ᶵᵓ䛻ྲྀ䜚௜䛡䛯䝞䜲䝖䛻䜘䜚ᐃ┙㠃䜢ษ๐ຍᕤ䛩䜛䛣䛸䛜䛷ᐃ┙䠄ᕤල䠅ಟṇ἞ල䠋᪉ἲ㗪≀ᐃ┙䠄㻲㻯㻰䠅ಟṇ䝸䞁䜾㻔㻲㻯㻕䝗䝺䝇䝸䞁䜾䠄䝯䝍䝹䝪䞁䝗䠅ಟṇ䝸䞁䜾䠄䝉䝷䝭䝑䜽㻕◒▼ᐃ┙䠄䝡䝖䝸䝣䜯䜲䝗䠅䠄䠎䠅䝣䜵䞊䝅䞁䜾䞉⁁ධ䜜ຍᕤ㻌㠃䛾䝣䜵䞊䝅䞁䜾䜔⁁ධ䜜ᶵᵓ䛜ᦚ㍕䛥䜜䜛䠊䝣䜵䞊䝅䞁䜾⾲ 1㻌 ◊☻⿦⨨䛾༊ศṇసᴗ䜢⾜䛖㐠⏝䛜䛒䜛䠊㔠ᒓᐃ┙䠄㖡䠈㘏䠅ᶞ⬡㔠ᒓ䠄ᶞ⬡㖡䠈ᶞಟṇ䝸䞁䜾䠄䝉䝷䝭䝑䜽䠅⬡㘏䠅䠋䝣䜵䞊䝅䞁䜾䝢䝑䝏䠄䜰䝇䝣䜯䝹䝖⣔䠈䜴䝑䝗⣔䠅◊☻ᕸ䠄ⓎἻ䝫䝸䜴䝺䝍᪂ရ䜈஺᥮䞁䠈୙⧊ᕸ䠈䝇䜴䜵䞊䝗䠅ᐃ┙ᦶ⪖ᙧ≧ኚ໬኱䛝䜛䠊ᶵୖ䛷ᐃ┙ᙧ≧䜢㧗⢭ᗘ䛻ᩚ䛘䜛䛣䛸䛜䛷䛝䜛཯㠃䠈ᶵୖ䛷䛾సᴗ䛿䝎䜴䞁䝍䜲䝮䛻䛺䜛䛯䜑⏕⏘ᛶ䛜పୗ䛩䜛䠊㔞⏘ᕤሙ䛷䛿◊☻⿦⨨䛸䛿ู䛻ᑓ⏝䛾䝣䜵䞊䝅䞁䜾ຍᕤᶵ䜢‽ഛ䛧䠈ᐃᮇⓗ䛻ணഛᐃ┙䛸஺᥮䛩䜛䛣䛸䛷⏕⏘ᛶ䜢ⴠ䛸䛥䛪㐠⏝䛧䛶䛔䜛䠊ᑠ䠎䠊◊☻⿦⨨䛾ศ㢮◊☻⿦⨨䛿䝷䝑䝢䞁䜾䠈䝫䝸䝅䞁䜾䛺䛹◊☻᪉ἲ䛻䜘䜛༊ศ䛾௚䛻䠈ᕤస≀䛾∦㠃䜢ຍᕤ䛩䜛∦㠃◊☻⿦⨨䛸䠈୧㠃䜢ྠ᫬䛻ຍᕤ䛩䜛୧㠃◊☻⿦⨨䛻ศ㢮䛥䜜䜛䠊䜎䛯⏕⏘᪉ᘧ䛷䛿ᕤస≀䜢୍ᯛ䛪䛴ຍᕤ䛩䜛ᯛⴥ᪉ᘧ䛸䠈」ᩘ䛾ᕤస≀䜢ྠ᫬䛻ຍᕤ䛩䜛䝞䝑䝏᪉ᘧ䛻ศ㢮䛥䜜䜛䠊ᅗ 1㻌 ∦㠃◊☻⿦⨨䛾ᵓ㐀ᅗ*㻌 ୙஧㉺ᶵᲔᕤᴗᰴᘧ఍♫䠖䛈381-1233 㛗㔝┴㛗㔝ᕷᯇ௦⏫Ύ㔝1650㻞㻞㻶㼛㼡㼞㼚㼍㼘㻌㼛㼒㻌㼠㼔㼑㻌㻶㼍㼜㼍㼚㻌㻿㼛㼏㼕㼑㼠㼥㻌㼒㼛㼞㻌㻭㼎㼞㼍㼟㼕㼢㼑㻌㼀㼑㼏㼔㼚㼛㼘㼛㼓㼥㻌㻌㼂㼛㼘㻚㻢㻤㻌㻌㻺㼛㻚㻝㻌㻌㻞㻜㻞㻠㻌㻌㻶㻭㻺㻚㻌㻌㻞㻞㻙㻞㻡◒⢏ຍᕤᏛ఍ㄅ䠏䠊䠎㻌 ᯛⴥᘧ∦㠃◊☻⿦⨨䠄䜸䝇䜹䞊ᆺ䠈㍈ᨭᣢᘧ䠅㻌㻞㻟యᇶᯈ䛾௙ୖ䛢ᕤ⛬䛷䛿◊☻⿦⨨䜢」ᩘྎ㐃⤖䛧䠈⿦⨨㛫ᯛⴥᘧ◊☻⿦⨨䛿ᕤస≀䛾୰ᚰ㍈䜢ᨭᣢ䛩䜛ᵓ㐀䛜≉䛻䝥䝺䞊䝖䛾⮬ືᦙ㏦ᶵ⬟䜢タ䛡䠈୍ḟ◊☻䠈஧ḟ◊☻䠈௙ᚩ䛷䛒䜚䠈䜸䝇䜹䞊ᆺ䜔㍈ᨭᣢᘧ䠈㍈㥑ືᘧ䛸䛔䛳䛯⿦⨨䛜ୖ䛢◊☻䛸ከẁ㝵◊☻䜢⾜䛳䛶䛔䜛䠊䜎䛯䝥䝺䞊䝖䜈ᇶᯈ䜢䛒䜛䠊ᅗ  䛻ᶍᘧᅗ䜢♧䛩䠊᥋╔䛩䜛⿦⨨䛸䠈◊☻ᚋ䛻ᇶᯈ䜢๤㞳䛩䜛⿦⨨䜒㐃⤖䛧䛯⮬䜸䝇䜹䞊ᆺ⿦⨨䛿䝗䜲䝒䛾䜸䝇䜹䞊♫䛾⿦⨨䛜ཎᆺ䛸䛺䛳ື㔞⏘◊☻䝅䝇䝔䝮䛜ᵓ⠏䛥䜜䛶䛔䜛䠊䛶䛚䜚䠈ᅇ㌿䛩䜛ᐃ┙䛻ᕤస≀䜢ᢲᅽ䛧䠈䜹䞁䝄䝅䛸࿧䜀䜜䜛㍈䛷ᕤస≀䛾୰ᚰ䜢ᨭᣢ䛧㐃䜜ᅇ䜚䛥䛫䛺䛜䜙䠈㍈䜢෇ᘼ䛻ᦂື䛥䛫ຍᕤ䛩䜛◊☻⿦⨨䛷䛒䜛䠊⿦⨨䛾≉ᚩ䛿ᕤస≀䛾୰ኸ䜢ᨭᣢᢲᅽ䛩䜛䛣䛸䛷ᕤస≀䛿ᐃ┙㠃䜈ೌ䛔䠈ᖹ㠃ᙧ≧䜒᭤㠃ᙧ≧䜒๰ᡂ䛜ྍ⬟䛺Ⅼ䛷䛒䜛䠊พ䜔ฝᙧ≧䛾ᐃ┙䜢⏝䛔䛶᭤㠃䝺䞁䝈䛾ຍᕤ䛻౑䜟䜜䛶䛔䜛䠊䜸䝇䜹䞊ᆺ䛛䜙ὴ⏕䛧䛯⿦⨨䛻㍈ᨭᣢᘧ䠈㍈㥑ືᘧ䛜䛒䜛䠊⿦⨨䛾≉ᚩ䛿ᕤస≀䛾୰ᚰ㍈ୖ䛻⮬ᅾ㍈ཷ䜢ഛ䛘䠈㍈䜢௓䛧䛶ຍᕤⲴ㔜䛾ไᚚ䛜䛷䛝䜛Ⅼ䛸䠈୰ᚰ㍈䜢ᅇ㌿㥑ື䛩䜛䛣䛸䛷ᐜ᫆䛻ᕤస≀䛾ᅇ㌿ไᚚ䛜䛷䛝䜛Ⅼ䛷䛒䜛䠊㏆ᖺ䠈㞴ຍᕤᇶᯈ䛾䝞䝑䝏᪉ᘧ䛾ຍᕤ⿦⨨䛻౑⏝䛥䜜䛶䛔䜛䠊ᯛⴥᘧ∦㠃䝫䝸䝅䞁䜾⿦⨨䛿୺䛻༙ᑟయ䝕䝞䜲䝇䜴䜵䞊䝝䛾 CMP ᕤ⛬䛷౑⏝䛥䜜䛶䛔䜛䠊䛣䜜䜙䛾⿦⨨䛻䛿ὶయຍᅽᘧ䛾◊☻䝦䝑䝗䛜᥇⏝䛥䜜䛶䛚䜚䠈䜴䜵䞊䝝䠄ⷧ≀ᕤస≀䠅䛾඲㠃䜎䛯䛿୍㒊䜢㑅ᢥຍᅽ䛷䛝䜛ᶵ⬟䛺䛹䠈䝕䝞䜲䝇䜴䜵䞊䝝ᑓ⏝䛾◊☻⿦⨨䛸䛧䛶㐍໬䛧䛶䛔䜛䠊ᅗ  䛻 CMP ⿦⨨䛾◊☻䝦䝑䝗䛾ᶍᘧᅗ䜢♧䛩䠊ᅗ 2㻌 ⿦⨨ᶍᘧᅗᅇ㌿㥑ືᘧ䠅ಟṇ䝸䞁䜾ᘧ䛿ཌ≀ᕤస≀䛾ຍᕤ䛻㐺䛧䛶䛚䜚䠈」ᩘ䛾ᕤస≀䜢ಟṇ䝸䞁䜾䜔䝉䝷䝭䝑䜽䝸䞁䜾䛾ෆഃ䛾䜻䝱䝸䜰䛻㓄⨨䛧䠈ᕤస≀䛾⮬㔜䜎䛯䛿䜴䜵䜲䝖䜢ຍ䛘䛶ຍᕤ䛩䜛䝕䝑䝗䜴䜵䜲䝖ᘧ䛾⿦⨨䛷䛒䜛䠄ᅗ 䠅䠊䝸䞁䜾䛾እ࿘䛿ᅇ㌿䝻䞊䝷䞊䛷ᨭᣢ䛥䜜䜛䠊䝷䝑䝢䞁䜾⿦⨨䛷䛿ᕤస≀䛾ຍᕤ䛸ಟṇ䝸䞁䜾䛻䜘䜛ᐃ┙䛾ᙧ≧⥔ᣢ䜢ྠ᫬䛻⾜䛘䜛ඃ䜜䛯᪉ᘧ䛷䛒䜛䠊ⷧ≀ᕤస≀䛿᥋╔䝥䝺䞊䝖䛻䝽䝑䜽䝇ᅛᐃ䛧䠈䛭䛾䝥䝺䞊䝖䜢ᐃ┙㠃䛻ᢲᅽ䛧䛶ຍᕤ䛩䜛䠊䝥䝺䞊䝖༢఩䛷ຍᕤ䜢⾜䛖䝞䝑䝏ᘧ◊☻䛷䛒䜚䠈䝥䝺䞊䝖䛾ຍᅽ䛿㔜䜚䛻䜘䜛䝕䝑䝗䜴䜵䜲䝖ᘧ䛜㐺䛧䛶䛔䜛䛜䠈ᅽຊㄪᩚ䛜ྍ⬟䛺䜶䜰ຍᅽᘧ䛾⿦⨨䜒䛒䜛䠊䝥䝺䞊䝖䛾እ࿘䜢ᅇ㌿䝻䞊䝷䞊䛷ᨭᣢ䛩䜛᪉ᘧ䛷䛒䜛䠊◊☻䝦䝑䝗䝸䝔䞊䝘䝸䞁䜾ᐃ┙ᅗ 4 ಟṇ䝸䞁䜾ᘧ⿦⨨ᶍᘧᅗ䛿ᨭᣢ䝻䞊䝷䞊㒊䛾๛ᛶ䛜㔜せ䛻䛺䜛䠊ᨭᣢ䝻䞊䝷䞊䜢ᅇ㌿ ᥋╔ 䜴䜵䜲䝖Ⲵ㔜䠄⮬㔜䠅䜴䜵䝝◊☻䝦䝑䝗 䝥䝺䞊䝖ᅇ㌿ไᚚ䛜㞴䛧䛔䛸䛔䛳䛯ㄢ㢟䛜䛒䜛䠊᥋╔䝥䝺䞊䝖䜢⏝䛔䛯䝞䝑䝏ຍᕤ䛷䛿䝥䝺䞊䝖୰ኸഃ䛾ຍᕤ㔞䛜ప䛔ഴྥ䛜䛒䜚䠈ᕤస≀䛻䝔䞊䝟䛜Ⓨ⏕䛩䜛䛣䛸䛜䛒䜛䠊ᑐ⟇䛸䛧䛶䝥䝺䞊䝖⿬㠃䛸䝦䝑䝗㛫䛻௵ពᑍἲ䛾Ⲵ㔜ㄪᩚ⏝䛾䝇䝨䞊䝃ධ䜜䜛ᡭἲ䜔䠈䝥䝺䞊䝖୰ኸ㒊䜢䜶䜰ᅽ䛷ຍᅽ䛩䜛୰ᢲ䛧ᶵᵓ䛺䛹䛜᥇⏝䛥䜜䛶䛔䜛䠊༙ᑟయᇶᯈ䛾ຍᕤ䛻౑⏝䛥䜜䜛㔞⏘ྥ䛡䛾◊☻⿦⨨䛿䠈1 ᐃ┙䛻ᑐ䛧䛶 4 䝥䝺䞊䝖䜢ྠ᫬ຍᕤ䛷䛝䜛䠊ᅗ  䛻⿦⨨እほ䛸ᶍᘧᅗ䜢♧䛩䠊༙ᑟ◊☻ᕸ

ᅗ 3㻌 CMP ⿦⨨䛾◊☻䝦䝑䝗䛔䛪䜜䜒ᖹ㠃ຍᕤ⏝䛾⿦⨨䛷䛒䜚䠈ᐃ┙䛸ᨭᣢ䝻䞊䝷䞊䛸㌿䜢ఏ䛘䛶䛔䜛䠊䛣䛾䛯䜑㧗㈇Ⲵ䛾ຍᕤ᮲௳䛷䛿ᕤస≀䛾䝞䝑䜻䞁䜾ᮦ䜴䜵䝝䛔䛖䝅䞁䝥䝹䛺ᵓᡂ䛷䛒䜛䠊ᕤస≀䛾ရ㉁⢭ᗘ䜢ᚓ䜛䛯䜑䛻㥑ື䛥䛫䠈䝸䞁䜾䜔䝥䝺䞊䝖እ࿘䛸䛾᥋ゐᦶ᧿䛷ᕤస≀䛻ᅇไᚚὶయὶయຍᅽᐊ䠏䠊䠏㻌 䝞䝑䝏ᘧ∦㠃◊☻⿦⨨䠄ಟṇ䝸䞁䜾ᘧ䠈䝻䞊䝷䞊ᨭᣢ(b) ㍈ᨭᣢᘧ䞉㍈㥑ືᘧ(a) 䜸䝇䜹䞊ᆺ◊☻ᶵᅇ㌿ᐃ┙ᅇ㌿㥑ືᨭᣢ䝻䞊䝷䞊◊☻ᕸ䝻䞊䝷䞊ᨭᣢᘧ ᶍᘧᅗᅗ 5 䝞䝑䝏ᘧ∦㠃◊☻⿦⨨ 1)(䝻䞊䝷䞊ᨭᣢᘧ)

㻶㼛㼡㼞㼚㼍㼘㻌㼛㼒㻌㼠㼔㼑㻌㻶㼍㼜㼍㼚㻌㻿㼛㼏㼕㼑㼠㼥㻌㼒㼛㼞㻌㻭㼎㼞㼍㼟㼕㼢㼑㻌㼀㼑㼏㼔㼚㼛㼘㼛㼓㼥㻌㻌㼂㼛㼘㻚㻢㻤㻌㻌㻺㼛㻚㻝㻌㻌㻞㻜㻞㻠㻌㻌㻶㻭㻺㻚㻌㻌㻞㻞㻙㻞㻡㻞㻟㻞㻠◒⢏ຍᕤᏛ఍ㄅ

䠐䠊୧㠃䝷䝑䝢䞁䜾䞉䝫䝸䝅䞁䜾⿦⨨䠄䠍䠅䜻䝱䝸䜰ᑍἲ㻌䠐䠊䠍㻌 ୧㠃◊☻⿦⨨䛾≉ᚩ୧㠃◊☻⿦⨨䛿౑⏝䛩䜛䜻䝱䝸䜰䛾እᚄ䜢䜲䞁䝏䛷⾲䛧୧㠃◊☻⿦⨨䛿 4Way ᪉ᘧ䛸࿧䜀䜜䜛㐟ᫍ㐠ື䜢฼⏝䛧

9B䠈16B 䛺䛹䛸࿧䜀䜜䜛䠊つ᱁໬䛿䛥䜜䛶䛔䛺䛔䛜ྛ⿦⨨䝯䛯୧㠃ຍᕤᶵ䛷䛒䜛䠊ᅗ  䛻⿦⨨እほ䜢䠈ᅗ  䛻ᶍᘧᅗ䜢䞊䜹䞊䛸䜒䜻䝱䝸䜰ᑍἲ䛿ᴫ䛽ඹ㏻䛷䛒䜛䠊⾲  䛻୍⯡ⓗ䛺♧䛩䠊ᕤస≀䜢ಖᣢ䛩䜛䜻䝱䝸䜰䠈ኴ㝧䜼䝲䠈䜲䞁䝍䞊䝘䝹䜼䜻䝱䝸䜰䛾ᑍἲ䜢♧䛩䠊䜻䝱䝸䜰ᮦ䛻䛿ᕤල㗰䠄SK䠅䠈䝇䝔䞁䝺䝲䠈ୖᐃ┙䠈ୗᐃ┙䛷ᵓᡂ䛥䜜䜛䠊㐟ᫍ䜼䝲䛻┦ᙜ䛩䜛䜻䝱䝸䝇㗰䠈䜺䝷䝇䜶䝫䜻䝅ᶞ⬡䠄EG䠅䠈ሷ໬䝡䝙䝹䠄PVC䠅䛺䛹䛜౑䜰䛿ኴ㝧䜼䝲䛸䜲䞁䝍䞊䝘䝹䜼䝲䛻䛛䜏ྜ䛔䠈ኴ㝧䜼䝲䜢୰䜟䜜䜛䠊୍⯡ⓗ䛺䜲䞁䝪䝸䝳䞊䝖ṑᙧ䛾௚䛻䠈䝃䜲䜽䝻䜲䝗ṑᙧᚰ䛻⮬㌿䛧䛺䛜䜙බ㌿㐠ື䛩䜛䠊䜻䝱䝸䜰䛸ୖୗᐃ┙䛸䛾┦ᑐ䛾䜻䝱䝸䜰䜢౑䛔ኴ㝧䜼䝲䛸䜲䞁䝍䞊䝘䝹䜼䝲䜢䝢䞁ᘧ䛻䛧䛯㐠ື䛻䜘䜚ᕤస≀䛾୧㠃䜢ྠ᫬䛻ຍᕤ䛩䜛⿦⨨䛷䛒䜛䠊」ᩘ

⿦⨨䜒䛒䜛䠊䛾ᕤస≀䜢ྠ᫬䛻ຍᕤ䛷䛝䜛䛯䜑⏕⏘ᛶ䛻ඃ䜜䠈䜎䛯Ⲵ㔜䠄䠎䠅ᐃ┙ಟṇ㻌䜔ᅇ㌿㏿ᗘ䛺䛹䛾ຍᕤ᮲௳䛜୍ᐃ䛷䛒䜚䠈ᚓ䜙䜜䜛ᕤస≀䛾୧㠃䝷䝑䝢䞁䜾⿦⨨䛿ຍᕤ䛾㐍⾜䛸ඹ䛻ୖୗᐃ┙䛜ᦶ⪖ᙧ≧⢭ᗘ䛿㠀ᖖ䛻㧗䛟Ᏻᐃ䛧䛶䛔䜛䠊ⷧ≀ᕤస≀䛾ຍᕤ䛻䛧䠈ᐃᮇⓗ䛺ᐃ┙ಟṇ䛜ᚲせ䛻䛺䜛䠊ᐃ┙㠃䛾⟶⌮䛿∦㠃㐺䛧䛶䛚䜚䠈㧗䛔ᖹ⾜ᖹ㠃䛜ᚓ䜙䜜䜛Ⅼ䛜≉ᚩ䛷䛒䜛䠊⿦⨨䛸ྠᵝ䛻ୗᐃ┙㠃䛾┤ᚄᙧ≧䛸༙ᚄᙧ≧䛷⾜䛖䠊4Way

⿦⨨䛻䛿ୖୗᐃ┙䛿ᅇ㌿䛫䛪ኴ㝧䜼䝲䛸䜲䞁䝍䞊䝘䝹䜼᪉ᘧ䛾⿦⨨䛷䛿䜻䝱䝸䜰䛾⮬㌿䛸බ㌿㏿ᗘ䛻䜘䛳䛶ୖୗᐃ┙䝲䛜ᅇ㌿䛩䜛 2Way ᪉ᘧ䠊ୖୗᐃ┙䛸ኴ㝧䜼䝲䠈䜲䞁䝍䞊䝘䛾ᦶ⪖ഴྥ䛜Ỵ䜎䜛䠊ᅗ  䛻䜻䝱䝸䜰䛾⮬㌿䛸බ㌿䛾ᐃ⩏䜢䠈䝹䜼䝲䛾䛩䜉䛶䛜ᅇ㌿䛩䜛 4Way ᪉ᘧ䠊ୖᐃ┙䛜ᅇ㌿䛧䛺ᅗ  䛻ᐃ┙ಟṇ䛸䜻䝱䝸䜰䛾ᅇ㌿᪉ྥ䜢♧䛩䠊ᐃ┙ಟṇ䛻䛿

䛔 3Way ᪉ᘧ䛜䛒䜛䠊ᑓ⏝䛾ಟṇ䜻䝱䝸䜰䜢౑⏝䛧䠈ኴ㝧䜼䝲䛸䜲䞁䝍䞊䝘䝹䜼䝲䛾㏿ᗘ䜢ኚ䛘ಟṇ䜻䝱䝸䜰䛾⮬㌿䞉බ㌿㏿ᗘ䜢ไᚚ䛩䜛䠊ಟṇ㻌䜻䝱䝸䜰䛻䛿ᐃ┙ᮦ㉁䠄FCD䠅䜘䜚䜒◳ᗘ䛾㧗䛔ᮦ㉁(FC)䛜౑㻌䜟䜜䜛䠊ᐃ┙ಟṇ䛾ᣦᶆ䛻䛿䜻䝱䝸䜰⮬㌿㏿ᗘ䜢බ㌿㏿ᗘ䛷㻌㝖䛧䛯⮬බ㌿ẚ䠄C/D䠅䛸䠈䜻䝱䝸䜰⮬㌿㏿ᗘ䛛䜙බ㌿㏿ᗘ䜢㻌ᘬ䛔䛯┦ᑐ⮬㌿㏿ᗘ䠄E=C-D䠅䛜䛒䜛䠊ಟṇ䜻䝱䝸䜰䛻䜘䜛ಟ㻌ṇ䛻ຍ䛘䛶䠈ୖୗᐃ┙䛾㠃ᙧ≧䜢ྜ⮴䛥䛫䜛䛯䜑䛻ୖୗᐃ㻌┙䜢┤᥋᧿䜚ྜ䜟䛫䜛ඹ᧿䜚䜔䠈ຍᕤ⏝䛾ⷧᯈ䜻䝱䝸䜰䜢౑㻌䛳䛯䜻䝱䝸䜰᧿䜚䜒⾜䜟䜜䜛䠊㻌
㻌

㻌

㻌

㻌

AEC

㻌

㻌
ᅗ 6㻌 ୧㠃◊☻⿦⨨ 㻌㻌㻌㻌A䠖䜲䞁䝍䞊䝘䝹ᅇ㌿㏿ᗘ
B䠖ኴ㝧䜼䝲ᅇ㌿㏿ᗘ
C䠖䜻䝱䝸䜰⮬㌿㏿ᗘ
D䠖䜻䝱䝸䜰බ㌿㏿ᗘ㻌㻌C/D 䠖 ⮬බ㌿ẚE 䠖 ┦ᑐ⮬㌿㏿ᗘ䠄E =C -D䠅㻌㻌㻌㻌㻌㻌㻌㻌㻌㻌㻌㻌1)㻌㻌㻌㻌㻌

ᅗ 7㻌 ୧㠃◊☻ᶵ䛾ᶍᘧᅗ㻌⾲ 2㻌 䜻䝱䝸䜰ᑍἲ⾲㻌D

ᅗ 8㻌 䜻䝱䝸䜰䛾⮬㌿䞉බ㌿䛾ᐃ⩏㻌ṑᩘ እᚄmm䝃䜲䝈ṑᙧṑᩘ እᚄmm㻌䝃䜲䝈 ṑᙧ
5B
DP1232110.1
16B
DP12200
427.6
㻌 6B
DP1266
143.9
18B
M3150
456
9B
DP12108
232.8
20B
M3
170
516
㻌 12B
DP12134
287.9
22B
M3184
558
DP12147
315.4
24B
M4152
614
㻌 13B
15B
M3128
390
28B
M4178
718
㻌
DP 䛿䝎䜲䝲䝯䝖䝷䝹䝢䝑䝏䜢䠈M 䛿䝰䝆䝳䞊䝹䜢♧䛩䠊䚷M = 25.4 / DPṑᙧ䛾㻌㻌㻌㻌㻌㻞㻠B㻌㻌㻌㻌ᅗ 9㻌 ᐃ┙ಟṇ䛸䜻䝱䝸䜰䛾ᅇ㌿᪉ྥ㻶㼛㼡㼞㼚㼍㼘㻌㼛㼒㻌㼠㼔㼑㻌㻶㼍㼜㼍㼚㻌㻿㼛㼏㼕㼑㼠㼥㻌㼒㼛㼞㻌㻭㼎㼞㼍㼟㼕㼢㼑㻌㼀㼑㼏㼔㼚㼛㼘㼛㼓㼥㻌㻌㼂㼛㼘㻚㻢㻤㻌㻌㻺㼛㻚㻝㻌㻌㻞㻜㻞㻠㻌㻌㻶㻭㻺㻚㻌㻌㻞㻞㻙㻞㻡◒⢏ຍᕤᏛ఍ㄅ㻞㻡䠐䠊䠎㻌 㻠㼃㼍㼥 ᪉ᘧ㻌
4Way ᪉ᘧ䛾⿦⨨ᵓ㐀䜢ᅗ  䛻♧䛩䠊ୖᐃ┙䛿䜶䜰䝅䝸䞁䝎䛷ୖୗື䛧䠈୺㍈୰ኸ䛾㥑ື䝗䝷䝮䛻䝣䝑䜽䛧䛶ᅇ㌿䛩䜛䠊ୖᐃ┙䠈ୗᐃ┙䠈ኴ㝧䜼䝲䠈䜲䞁䝍䞊䝘䝹䜼䝲䛾 4 䛴䛾ᅇ㌿
䜢 1 䛴䛾㥑ື※䛛䜙ᅛᐃẚ⋡䛷ᅇ㌿䛩䜛 1 䝰䞊䝍㥑ືᘧ䠊ୖୗᐃ┙䜢 1 䛴䛾㥑ື※䛷䠈ኴ㝧䜼䝲䠈䜲䞁䝍䞊䝘䝹䜼䝲䜢䛭䜜䛮䜜ಶู䛾㥑ື※䛷ᅇ㌿䛥䛫䜛 3 䝰䞊䝍㥑ືᘧ䠊඲䛶ಶู䛾㥑ື※䛷ᅇ㌿䛥䛫䜛 4 䝰䞊䝍㥑ືᘧ䛜䛒䜛䠊ୗᐃ┙䜢ᨭᣢ䛩䜛ᅇ㌿㍈ཷ䛻䛿㌿䛜䜚㍈ཷ䠈ືᅽ㍈ཷ䠈㟼ᅽ㍈ཷ䛜⏝䛔䜙䜜䜛䠊䠄䠍䠅㻝 䝰䞊䝍㥑ືᘧ㻌
1 䝰䞊䝍㥑ືᘧ䛿㥑ື㍈䛛䜙ᅛᐃ䜼䝲ẚ䛷ྛ㍈䜢ᅇ㌿䛧䠈䜻䝱䝸䜰බ㌿㏿ᗘ䜢 1 䛸䛧䛶⮬㌿㏿ᗘ䛿ᴫ䛽 1䠊25 䜎䛯䛿ᅗ 10㻌 ⿦⨨ᵓ㐀(1 䝰䞊䝍㥑ື)

0.75䠈ୗᐃ┙㏿ᗘ䛿 3䠈ୖᐃ┙㏿ᗘ䛿཯ᑐ᪉ྥ䜈-1 䛾ẚ⋡䛷䛒䜛䠊䛣䛾㏿ᗘẚ䛿䜻䝱䝸䜰䛻ᑐ䛩䜛ୖ㠃ഃ䛾┦ᑐ㏿ᗘ䛸ୗ㠃ഃ䛾┦ᑐ㏿ᗘ䛜➼䛧䛟䜻䝱䝸䜰䛻ຍ䜟䜛㈇Ⲵ䛜䛺䛔䛯䜑䠈ᕤస≀ୖᐃ┙ⷧᯈ䜻䝱䝸䜰䛻䜘䜛ⷧ≀ᕤస≀䛾ຍᕤ䛻㐺䛧䛶䛔䜛䠊ୖᐃ┙ᕤస≀䜻䝱䝸䜰䜻䝱䝸䜰

1 䝰䞊䝍㥑ືᘧ䛿ᐃ┙䛾ᙧ≧ಟṇ䛜䛷䛝䛺䛔䛣䛸䛛䜙䝫䝸ୗᐃ┙䝅䞁䜾⿦⨨䛸䛧䛶౑⏝䛥䜜䜛䛣䛸䛜ከ䛔䠊䝷䝑䝢䞁䜾⿦⨨䛷䛿䜽䝷䝑䝏䜢⏝䛔䛶䜻䝱䝸䜰䛾ṇ㌿䞉㏫㌿䜢ษ䜚᭰䛘䜛⮬ᕫಟṇᶵ⬟௜䛝䛾⿦⨨ 2)䜒䛒䜛䛜䠈௵ព䛻⮬බ㌿䜢タᐃ䛷䛝䜛 3 䝰䞊䝍䜔 4 䝰䞊䝍㥑ືᘧ䛜㑅䜀䜜䛶䛔䜛䠊ୗᐃ┙

4Way᪉ᘧ

2Way᪉ᘧ

ୖᐃ┙㏿ᗘ 䜻䝱䝸䜰බ㌿㏿ᗘ
= -1
D=1

ୖᐃ┙㏿ᗘ =0䜻䝱䝸䜰බ㌿㏿ᗘ
D=2

ᕤస≀

ᕤస≀

䠄䠎䠅㻟 䝰䞊䝍㥑ືᘧ㻌ୗᐃ┙㏿ᗘ =33 䝰䞊䝍㥑ືᘧ䛿䠈ኴ㝧䜼䝲䛸䜲䞁䝍䞊䝘䝹䜼䝲䛾ᅇ㌿㏿ୖ㠃䛾┦ᑐ㏿ᗘ =2ᗘ䜢ㄪᩚ䛷䛝䠈ᕤస≀䛾ୖୗ㠃䛾ྲྀ䜚௦ㄪᩚ䜒ྍ⬟䛷䛒䜛䠊ୗᐃ┙㏿ᗘ =0䝰䞊䝯䞁䝖ᕤస≀䝷䝑䝢䞁䜾⿦⨨䛷䛿ᐃ┙ಟṇ䛻౑⏝䛷䛝䜛䠊ୖୗᐃ┙䛾㏿ᗘୖ㠃䛾┦ᑐ㏿ᗘ =2ᕤస≀䜻䝱䝸䜰㈇Ⲵ

䛜ᅛᐃ䛾䛯䜑ㄪᩚ⠊ᅖ䛿㝈ᐃ䛥䜜䜛䠊ୗ㠃䛾┦ᑐ㏿ᗘ =2䠄䠏䠅 䝰䞊䝍㥑ືᘧ㻌

ᅗ 11㻌 4Way ᪉ᘧ䛸 2Way ᪉ᘧ䛾ẚ㍑

4 䝰䞊䝍㥑ື᪉ᘧ䛿䠈඲䛶ಶู䛻㏿ᗘㄪᩚ䛜ྍ⬟䛷䛒䜚䠈ୗ㠃䛾┦ᑐ㏿ᗘ =2ᖜᗈ䛔ຍᕤ᮲௳䛾タᐃ䛜ྍ⬟䛷䛒䜛䠊タᐃḟ➨䛷䛿ᚋ㏙䛾

ᚲせ䛷䛒䛳䛯䠊3Way ᪉ᘧ䛷䛿ୖᐃ┙䛾ᅇ㌿ᶵ⬟䜢↓䛟䛩䛣

2Way 䜔 3Way ᪉ᘧ䛸ྠᵝ䛾㐠⏝䜒ྍ⬟䛷䛒䜚䠈ᕤస≀䛾ୖ䛸䛷䠈䝽䜲䝲䞊ྞ᪉ᘧ 3)䛺䛹ୗᐃ┙㠃䜈䛾㏣ᚑᛶ䛸◊☻Ⲵ㔜ୗ㠃䛾ྲྀ䜚௦䛻ᕪ䜢䛴䛡䜛ຍᕤ䜒ྍ⬟䛷䛒䜛䠊䛾ᆒ➼ศᩓᛶ䛾ྥୖ䛻≉໬䛧䛯ᶵᵓ䛜᥇⏝䛥䜜䛶䛔䜛䠊䝫䝸䝅䞁䜾⿦⨨䛻䛿ୖᐃ┙䛾㥑ື※䜢䝣䝺䞊䝮䛾ୖ㒊䛻タ䛡䠈ୖᐃ┙䛾୰ᚰ㍈䜢┤᥋ᅇ㌿㥑ື䛩䜛⿦⨨䜒䛒䜛䠊⿦⨨䛾䠐䠊䠑㻌 ⮬ື໬୧㠃◊☻⿦⨨䛿㐟ᫍ㐠ື䛩䜛䜻䝱䝸䜰䛾఩⨨᳨ฟ䛜㞴䛧䛟䠈Ὑίᛶ䜔◊☻ᕸ஺᥮䛾సᴗᛶ䛜ྥୖ䛩䜛䠊⿦⨨䛾⮬ື໬䛜㐜䜜䛶䛔䛯䠊㏆ᖺ䝃䞊䝪䝰䞊䝍䛾఩⨨Ỵ䜑䠐䠊䠏㻌 㻞㼃㼍㼥 ᪉ᘧ㻌₇⟬ᶵ⬟䛜㣕㌍ⓗ䛻ྥୖ䛧䛯䛣䛸䛷䠈⿦⨨䛾⮬ື໬䛜㐍䜣

2Way ᪉ᘧ䛿ୖୗᐃ┙䛜ᅇ㌿䛫䛪䠄ྠ୍᪉ྥ䛻ྠ୍㏿ᗘ䛷䛔䜛䠊⮬ື໬䜢ᐇ⌧䛩䜛䛯䜑䛻䛿䠈䜻䝱䝸䜰䛾௙㎸䜏ᯛᩘ䛸䠈䛷ᅇ㌿䛩䜛⿦⨨䜒䛒䜛䠅䠈ኴ㝧䜼䝲䛸䜲䞁䝍䞊䝘䝹䜼䝲䛾ᅇ㌿䜻䝱䝸䜰䠈ኴ㝧䜼䝲䠈䜲䞁䝍䞊䝘䝹䜼䝲䛾ṑᩘ䜢₇⟬䛻㐺䛧䛯㐠ື䛷ຍᕤ䜢⾜䛖᪉ᘧ䛷䛒䜛䠊ᅗ  䛻 4Way ᪉ᘧ䛸 2Way

ᩚᩘಸ䛻䛩䜛䛺䛹䠈ᚑ᮶䛾䜻䝱䝸䜰つ᱁䛾ぢ┤䛧䛜ᚲせ䛻䛺᪉ᘧ䛾ẚ㍑䜢♧䛩䠊4Way 䛿ᕤస≀䛾ୖ㠃䛸ୗ㠃䛻㏫ྥ䛝䛾䜛䠊䛣䜜䜎䛷㐟ᫍ㐠ື䛜ྠ䛨㌶㊧䜢ᥥ䛛䛺䛔䛯䜑䛻ṑᩘ䜢ᕤຊ䛜స⏝䛩䜛䛯䜑ᕤస≀䛻䝰䞊䝯䞁䝖䛜స⏝䛩䜛䛜䠈2Wayኵ䛧䛶䛔䛯䠊ᩚᩘಸ䛾ṑᩘ䛷䛿㌶㊧䛜ྠᮇ䛩䜛ᠱᛕ䜒䛒䜚䠈䛿ୖ㠃ୗ㠃䛸䜒ྠ䛨᪉ྥ䛾ຊ䛜ຍ䜟䜛䛯䜑㧗䛔ᖹ⾜ᗘ䛜ᚓ௒ᚋ䛾⿦⨨㛤Ⓨ䛾ㄢ㢟䛷䛒䜛䠊䜙䜜䜛䠊䛧䛛䛧䜻䝱䝸䜰䛻ຍ䜟䜛㈇Ⲵ䛜኱䛝䛔䛯䜑䠈ཌ䛔䜻䝱䝸䜰䜢౑䛔䝤䝻䝑䜽䝀䞊䝆䛺䛹ཌ≀ᕤస≀䛾ຍᕤ䛻౑⏝䛥䜜䜛䠊䠐䠊䠐㻌 㻟㼃㼍㼥 ᪉ᘧ㻌
4Way䠈2Way ᪉ᘧ䛷䛿ୖᐃ┙䛿ᅇ㌿䛸ୗᐃ┙㠃䜈䛾㏣ᚑ䜢୧❧䛥䛫䜛䛯䜑䠈ᅇ㌿㍈ཷ䛡䛸⮬ᅾ㍈ཷ䜢⤌ྜ䛫䛯ᵓ㐀䛜䠑䠊ཧ⪃ᩥ⊩㻌1)
2)

3)

୙஧㉺ᶵᲔᕤᴗ(ᰴ)䠖䝩䞊䝮䝨䞊䝆௚䠈http://www.fmc-fujikoshi.co.jpᕷᕝᾈ୍㑻䠖㉸⢭ᐦ⏕⏘ᢏ⾡య⣔ ➨ 2 ᕳ ᐇ⏝ᢏ⾡ ➨ 3 ⦅ ㉸⢭ᐦᶵᲔྛㄽ ➨ 5 ❶ ㉸⢭ᐦ䝷䝑䝢䞁䜾䞉䝫䝸䝅䞁䜾䝬䝅䞁䠈䝣䝆䞉䝔䜽䝜䝅䝇䝔䝮䠈
䠄1994䠅228ᮡୗᐶ䠖䝅䝸䝁䞁⤖ᬗᢏ⾡ -ᡂ㛗䞉ຍᕤ䞉Ḟ㝗ไᚚ䞉ホ౯ 3.4.1 䝅䝸䝁䞁䜴䜶䝝䞊䛾䝷䝑䝢䞁䜾䠈᪥ᮏᏛ⾡᣺⯆఍ 145 ጤဨ఍䠈䠄2015䠅178㻶㼛㼡㼞㼚㼍㼘㻌㼛㼒㻌㼠㼔㼑㻌㻶㼍㼜㼍㼚㻌㻿㼛㼏㼕㼑㼠㼥㻌㼒㼛㼞㻌㻭㼎㼞㼍㼟㼕㼢㼑㻌㼀㼑㼏㼔㼚㼛㼘㼛㼓㼥㻌㻌㼂㼛㼘㻚㻢㻤㻌㻌㻺㼛㻚㻝㻌㻌㻞㻜㻞㻠㻌㻌㻶㻭㻺㻚㻌㻌㻞㻞㻙㻞㻡㻞㻡