TOKYO ELECTRON LIMITEDANNUAL REPORT 07

ENVIRONMENTAL, HEALTH AND SAFETY ACTIVITIESTokyo Electron’s corporate values include placing the highest
priority on people’s health and safety and taking the global environment into account when conducting business activities.

Fundamental Policy
Tokyo Electron positions environmental, health and safety activities as one of its most important management issues to achievesustained corporate growth and continued development ofsociety. With that in mind, Tokyo Electron is committed to reducing environmental loads across its activities, and to ensuring
absolute safety in the Company’s business premises and in thoseof its customers.
Tokyo Electron embodied these commitments in “TEL’s Credoand Principles on Environmental Preservation” and “TEL’s Safetyand Health Credo and Principles” formulated in 1998. The former
statement was reviewed and revised in May 2006 in light of thedirection the business is taking and the Company’s evolving
approach to these issues. The recent revisions clarify a road map
for environmental protection measures in product development;
they mandate evaluation of environmental issues in the design,manufacture and utilization of our products, and disclosure of
information to stakeholders through the publication of environmental and other reports.

EHS Management
Since 1997, Tokyo Electron has developed and implemented environmental management systems based on ISO 14001 standards,
mainly for manufacturing operations, and obtained such certification.

Adoption of Environmental Accounting
Tokyo Electron has introduced an environmental accounting
system that quantifies the cost of its activities in respect of environmental protection, and uses this as the basis for developing
corporate action policies. For more information on achievements
in fiscal 2007, please see the “Environmental and Social Report2007” to be released in October 2007.

Product-related Environmental Initiatives
Proactive Environmentally Conscious Product Design
As clearly set forth in our revised TEL’s Credo and Principles on
Environmental Preservation, Tokyo Electron believes that promotion of product designs sensitive to the environment is vital. Tokyo
Electron has positioned promotion of energy conservation in its

products, and reduction and replacement of hazardous chemicals
in its products as priority issues.
1. Energy Conservation During Equipment Use
Since many of our products are manufactured and used in clean
rooms, we take an all-inclusive approach that factors in theenergy conservation aspect of the entire system, including theequipment and the clean room. The five major targets in thisrespect are as follows:
1. Reduce energy consumption of the equipment
2. Reduce energy consumption of peripheral devices
3. Use equipment in ways that conserve energy
4. Reduce energy consumption of the clean room
5. Overall clean room management (planned and appropriateoperation)
Tokyo Electron played a central role in developing the SEMIS23 Guide for Conservation of Energy, Utilities and Materials Usedby Semiconductor Manufacturing Equipment that was adopted as
the global standard by the semiconductor industry. Tokyo
Electron assesses the energy consumption of its products inaccordance with these guidelines.
2. Hazardous Substances in Products
Growing out of the concern that hazardous substances in partsand materials could affect the environment and the ecologicalsystem, regulations restricting the use of such substances in
automotive and electrical products are being tightened throughout
the world. In July 2006, for example, the RoHS*1 directive cameinto force in Europe. Having determined that its semiconductor
production equipment could be exempt from these directives as
they fall within the definition of “large-scale stationary industrialtools,” Tokyo Electron has prepared a written statement to thateffect. Regarding the China RoHS directive*2 issued in March
2007, Tokyo Electron has achieved complete compliance. Tokyo
Electron Group is acting in advance of regulatory requirements
and has established the Chemical Substance Measures Team toshare necessary information. The team comprises representativesof manufacturing divisions. In addition, Tokyo Electron Group isseeking active cooperation from suppliers, and investigating
substances contained in products and finding and promoting
substitutes. In fiscal 2007, Tokyo Electron Group formulated aschedule for the complete elimination of six substances specified
by the RoHS directive.
*1 Restriction of the Use of Certain Hazardous Substances in electrical and electronic equipment*2 The official name of the Chinese version of RoHS is Measures to Control Pollution From
Electronic Information Products

ISO-14001-Certified Plants and Offices
Company/plantTokyo Electron AT Limited
Tokyo Electron PS Limited
Tokyo Electron Tohoku Limited
Tokyo Electron Kyushu Limited
Tokyo Electron AT Limited
Tokyo Electron Device Limited

30PlantSagami Plant

Certification date
December 10, 1997

Certification number
1110-1997-AE-KOB-RvA

Tohoku Plant
Kumamoto/Koshi/Ozu/Saga plants
Yamanashi Plant (Fujii/Hosaka area)
Miyagi Plant
Yokohama OfficeFebruary 19, 1998
March 26, 1998
May 15, 1998
March 1, 2005
July 14, 2004

1118-1998-AE-KOB-RvA
1120-1998-AE-KOB-RvA
1124-1998-AE-KOB-RvA
01245-2005-AE-KOB-RvA
EC04J0144

ANNUAL REPORT 07

Health and Safety Activities
Tokyo Electron promotes health and safety in all of its operations.
This includes giving top priority to the health and safety of ouremployees and customers, and designing products with safety inmind. TEL’s Safety and Health Credo and Principles clearly statethat all employees are responsible for being constantly aware ofhealth and safety considerations in all their business activities.
Continuing on from fiscal 2006 when the Company held safety
training programs for top management, in fiscal 2007 the Company ran safety training for middle management. Targeted atdepartment managers, section heads, group leaders and othermid-level management personnel, this training included discussion of case studies. The Company also introduced a training
technique called team resource management (TRM) for on-siteleaders. The goal of this training is to get workers to appreciatethat communication and teamwork, which people usually do not
pay much attention to, is actually extremely important and difficult
to achieve.

TOKYO ELECTRON LIMITEDOne example is efforts to give back to local communities. Our
philosophy states, “We place the highest priority on gaining thetrust and acceptance of customers, suppliers, investors, andcommunities around the world” and “We therefore strive to be afaithful and cooperative member of the communities and nations
where we do business.” In line with this philosophy, we engage inactivities to contribute to society and build relationships of trustwith governments and local communities around our facilities.
These activities are conducted not just in Japan but also abroad.
For further details, see “Environmental and Social Report 2007”(to be published in October 2007).
URL: http://www.tel.com/eng/citizenship/ehsreport.htm

Communicating With Stakeholders
Tokyo Electron Group actively promotes communication with all
stakeholders. To develop environmental, health and safety initiatives, we believe that it is vital to share information as much as
possible with all parties related to our business activities and toreceive feedback.

TOPICS
Reducing Nitrogen Used by Thermal Processing Systems
In the loading area of the thermal processing system, wherewafers are loaded for input into the reactor furnace, the oxygen content is kept at a low level by injecting nitrogen toprevent the surface of the wafer from oxidizing naturally. In theprevious model, the inflow volume of nitrogen was kept at acertain level, but for TELINDY™, we have made it possible toconstantly monitor the oxygen content in the loading area tocontrol it, and so we can optimize the inflow volume of nitrogen according to the oxygen content at each of the wafer

Reducing the amount of nitrogen used by
the thermal processing systemGas
supply box

TELINDYTM

Oxygen meter

Nitrogen(optimizing the inflow volume)(Constantly monitoring
the oxygen content)

Reactorfurnace

Loading
area

processing stages. This has enabled us to reduce the use ofnitrogen by approximately 60% compared with the amountused by the previous model.
Tokyo Electron Kyushu Plants Trees to Protect theWatershedIn March 2007, Tokyo Electron Kyushu planted trees on Mt.
Tawara in Aso to create
a forest to protect thewatershed. Based on a
5-year plan, this was thesecond time trees havebeen planted by thecompany. Many Tokyo
Electron Kyushu
employees and family
Tokyo Electron Kyushu employees and family
members participated.
members plant trees on Mt. Tawara, Aso.
Later, after the hard
work was over, participants enjoyed a barbeque and the children present took part in a quiz to test and foster their knowledge of environmental issues.

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