SONOSYS® Ultrasonic / Megasonic
System with Submersible Transducer
in PVDF for 6" substrates

Function
Completely encapsulated Submersible Transducers made of PVDF to be positioned at the bottom or at
the side wall of an existing tank. Besides the standard systems for 4", 6" and 8" substrates, custom
specific solutions are offered. This flexible configuration allows a convenient retrofit with a Megasonicsystem in an existing process or experimental tank. All over the world, SONOSYS® stands for uniqueand future-secured solutions. The extremely uniform energy transmission ensures a hithertounachieved cleaning performance of particles down to the nano range, while at the same time providing
the best protection to the microstructures.
Unique in the world: our transducer systems, with patented piezoceramics with Butterfly-Technique,achieve a 40% higher sound pressure or an up to 30% higher efficiency than other systems.
Applications
Optic:
Semiconductor &Photovoltaic:
Mikro-/Nano-Technology:
Medical:Cleaning of optical components before coating
Cleaning of wafer and masks, process support of the wet-chemical
production of semiconductor products
Cleaning of parts and microsystems, support of the development
process in the LIGA –Technique
Cleaning of implants

Technical data modular Ultrasonic / Megasonic Generator
Electrical Data
Frequency / Output power:

Output power adjustment:
Mains voltage:

400 kHz / 1000 Watt
600 kHz / 1000 Watt
1 MHz / 1000 Watt
2 MHz / 600 Wattapprox. 10 % - 100 %230 VAC; 50 – 60 Hz

Mechanical Data
Housing:
Dimensions:
Weight:19" enclosure 3/4U
42 HP; approx. 236 x 185 x 395 mm (W x H x D)
approx. 7,0 kg

Operational conditions
Ambient temperature:+10 °C to +40 °C
Condensed moisture is to be prevented! Protected from humidity, dirt and aggressive vapours.

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg (Germany)
Phone +49 70 82 79184 0 – Fax +49 70 82 79184 99 Internet: www.sonosys.de – E-Mail: info@sonosys.de

V1.4

Technical data Ultrasonic / Megasonic Submersible Transducer in PVDF
Material:
Transducer array:
Transduced area:
HF-cable:

PVDF-housing with PFA coated Transducer plate
special PZT-Piezoceramic (Butterfly-Technique)approx. 180 x 170 mm; completely continuous active area
2x Coax-cable with N-plug; length 3 m;thereof 1 m in PTFE-corrugated tube
up to +60 °C without coolingup to +80 °C with Nitrogen cooling: Nitrogen pressure: maximum 0.1 bar
 Nitrogen flow: minimum 4 l/min.
 Nitrogen temperature range: +20 °C to +40 °C

Liquid temperature:

Storage- and Transport temperature: not less than -10 °C
Weight:approx. 5,0 kg

Order data Ultrasonic / Megasonic Submersible Transducer in PVDF
Order-No.

Frequency / Output
power

13804-201

400 kHz / 1000 Watt

13804-203

600 kHz / 1000 Watt

13800-231

1 MHz / 1000 Watt

13802-105

2 MHz / 600 Watt

13804-200

400 kHz / 1000 Watt

13804-202

600 kHz / 1000 Watt

13800-230

1 MHz / 1000 Watt

13802-104

2 MHz / 600 Watt

Cable outlet

Dimensions

Drawing

Straight cable outlet

250 x 220 x 35 mm

1Angled cable outlet

250 x 220 x 35 mm

2

250 x 220 x 35 mm

3Angled cable outlet
13800-235

1 MHz / 1000 Wattwith coolingOrder data Ultrasonic / Megasonic Generator
Frequency

Output power

Power adjustment

Order-No.

400 kHz400 kHz600 kHz
1 MHz
1 MHz
2 MHz

1000 Watt
1000 Watt
1000 Watt
1000 Watt
1000 Watt
600 Watt

internal
external
internal
internal
external
internal

13404-601
13404-602
13404-700
13401-630
13401-634
13405-500

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg (Germany)
Phone +49 70 82 79184 0 – Fax +49 70 82 79184 99 Internet: www.sonosys.de – E-Mail: info@sonosys.de

V1.4

Drawing 1

Drawing 2

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg (Germany)
Phone +49 70 82 79184 0 – Fax +49 70 82 79184 99 Internet: www.sonosys.de – E-Mail: info@sonosys.de

V1.4

Drawing 3

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg (Germany)
Phone +49 70 82 79184 0 – Fax +49 70 82 79184 99 Internet: www.sonosys.de – E-Mail: info@sonosys.deV1.4