News Release
July 28, 2021
Sumitomo Precision Products Co., Ltd.

Announcement of sales release on a newly developed highest performance*1 Epitaxial PZT film
Sumitomo Precision Products Co., Ltd. (SPP) has developed two new types of highest performance Epitaxial leadzirconate titanate (PZT) film that can be applicable for piezoelectric MEMS devices such as MEMS mirrors, micro pumps,
inkjet print heads, actuators, microphones, speakers, ultrasonic sensors, and infrared sensors.
with 6-inch and 8-inch large diameter wafer processes.

These films are compatibleA customer sample will be provided from October 2021 and will

be on sale from April 2021.

Epitaxial PZT film（8-inch wafer）

MEMS (Micro Electro Mechanical Systems) is a device that realizes very compact sensors and actuators
by forming micron-level mechanical structures and electrical and electronic circuits on a silicon substrateusing microfabrication technology. In order to function as a sensor / actuator, the technology for converting
electricity and force in MEMS is an important element. By means of using a piezoelectric thin film iscalled piezoelectric MEMS.
In MEMS actuators such as MEMS mirrors and inkjet heads, which exert mechanical functions byelectrical signals given to MEMS, piezoelectric thin films are required to have high actuation ability(ability to convert electricity into force). On the other hand, in a MEMS sensor such as a MEMS
microphone that functions by converting the force received by MEMS into an electric signal, thepiezoelectric thin film is required to have high sensing ability (ability to convert force into electricity).
Gyro sensors and ultrasonic sensors require both actuation ability and sensing ability. The ability of thesetwo piezoelectric thin films can be evaluated by the characteristics of the piezoelectric constant and thedielectric permittivity of the film.

It is said that the higher the piezoelectric constant and the lower thedielectric permittivity, the better the ability of piezoelectric thin film is.
The PZT thin film, which has relatively high piezoelectric constant among piezoelectric materials, has been used inmany MEMS devices. However, the conventional PZT thin film has a high dielectric permittivity, and there is a problemthat high sensing ability cannot be obtained.
The epitaxial PZT thin film (Novel A: sensor performance-oriented type, Novel B: sensor performance / actuator
performance balance type) developed by SPP has 1.5 to 2 times the sensing ability compared to the conventional one
while suppressing the decrease in actuation capacity.

The index (Figure Of Merit (FOM)) that indicates theSumitomo Precision Products Co., Ltd.
General Administration Department / Public Relations
1-10, Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
Tel 81-(0)6-6489-5829 Fax 81-(0)6-6489-5801
https://www.spp.co.jp/

1performance of the piezoelectric thin film that combines the functions of both the actuator and the sensor has achieved
the highest performance in the world.
With this product, it is expected that the mechanical structure and signal processing circuit of MEMS with sensor
functions will be simplified and downsized, and that MEMS with high sensitivity and new functions will be introduced.
We believe that we can contribute to the realization of a comfortable and convenient life and a safe and secure society
through MEMS applications such as medical and high-security authentication systems.

Toward the promising future, SPP will continue to contribute to solving social issues such as promoting a
post-5G digital society and realizing a carbon-free society by providing products and services that utilize thestrengths of our technology.
*1 Based on our research as of July 2021
<Contacts on this product>
Sumitomo Precision Products Co., Ltd., ICT Equipment and Devices Department, Marketing Group, Taku Aoki
TEL: +81-6-6489-8273

FAX: +81-6-6489-8263<Reference >Product Specifications

Novel A

PiezoelectDielectricric

permittivit

constantyd31※2εr※3149264

5320.6

19651648

1.50.8240

9004011

FOM [GPa]※4SensorActuator

performanceperformance(Ratio to(Ratio toconventional） conventional）（sensor performance-orientedtype）
Novel B（sensor performance / actuator
performance balance type）
Conventional polycrystalline PZT
thin film※2 Piezoelectric coefficient d31［pm/V］：Ability to deform under voltage※3 Dielectric permittivity εr：Ratio to dielectric permissibility of vacuum※4

FOM [GPa]：Figure Of Merit, Performance index, proportional to square of d31 and inverse

proportion to εr
Please refer the SPP’s ICT Equipment and Devices Web page for further details.
https://www.spp.co.jp/mems/ict/en/index2.html

Sumitomo Precision Products Co., Ltd.
General Administration Department / Public Relations
1-10, Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
Tel 81-(0)6-6489-5829 Fax 81-(0)6-6489-5801
https://www.spp.co.jp/2