CNC Form Measuring Instrument Series
Surftest Extreme
Formtracer Extreme

Catalog No. E15021(2)Form Measurement

Surface Roughness/Contour/Surface Texture Measuring Instrument

CNC Surface Roughness Measuring Instrument

Surftest Extreme

CNC Surface Roughness / Contour Measuring Instrument
CNC Surface Texture Measuring Instrument

Formtracer Extreme

The world’s leading range of CNC Form Measuring Instruments ushers in a new age of automated measurement.
Simply switching to the dedicated part program for each workpiece greatly improves measurement throughput andhelps maximize productivity.

Towards improved measurement efficiency

Ties up the operator
for an extended
period of time.

■ Existing measurement process

Workpiece
loading/
unloading

Workpiece
leveling, etc.

Positioningthemeasurement
start point

Measurement

Analysis ofrecordedgeometricaldata

To be repeated for all workpieces.

■ CNC Measurement
 s soon as aAworkpiece
pallet is loaded,measurement
can be started.
A CNC measuring machine runs
unmanned. Now the operator cancommit to other tasks.

2

Print

Crankshaft

Printer rollTime for measurement

Manual90 minutes
Measurement conditions

CNC
20 minutes

Time for measurement

Manual50 minutes
Measurement conditions

CNC
15 minutes(Each estimated time covers
measurement of ten rolls.)

Number of measurement points: Approx. 40 points
Measuring position: Pin/ Journal/Thrust surface.
Measuring direction: Along the axis of each cylindrical unit/On the surface of each thrustbearing.
Preliminary arrangements: Shifting workpiece/ Changing workpiece position / Alignment
Analysis items: Surface roughness / Straightness
Alignment in the direction of measurement or mounting the shaft takes time,and can require two people!

Number of measurement points: Approx. 3 points /Workpiece
Measuring position: On the cylinder’s generatrix.
Measurement direction: Along the generatrix axis
Preliminary arrangements: Workpiece change /Alignment
Analysis items: Surface roughness /Straightness
Little time is required to measure only one piece. However, as the number of pieces
to be measured within a day becomes large, so does the total time required foralignment, resulting in a time-consuming job!

Cylinder head

Aspheric surface lensTime for measurement

Manual90 minutes
Measurement conditions

CNC
30 minutes

Time for measurement

Manual40 minutes
Measurement conditions

CNC
5 minutes

Number of measurement points: Approx. 60 points
Measuring position: Six surfaces and the inside diameter of each bore.
Measuring direction: Multiple directions including the top, bottom, and side surfaces; and in
the inclined holes.
Preliminary arrangements: Shifting workpiece/ Changing workpiece position / Alignment, etc.
Analysis items: Surface roughness / Contour and profile
Since more than ten position changes are required to set the workpiece at themeasuring point, the measurement efficiency is badly affected!

Number of measurement points: Approx. 2 points
Measurement position: A long two lines crossing each other on the sectional plane
perpendicular to the optical axis
Measurement direction: Backward
Preliminary Arrangements: Workpiece rotation/Workpiece leveling/Optical axis positioning
Analysis items: Contour and profile /Tolerance zone measurement data /Surface roughness
It is critical to measure at the sectional profile, which is perpendicular to the optical axis
and necessitates a significant amount of time for establishing the complete settings!

Transmission gear

Rotor/Spindle for motors
Time for measurement

Manual20 minutes
Measurement conditions

Time for measurement

CNC
5 minutes(Each estimated time covers
measurement of four teeth.)

Number of measurement points: Approx. 4 points
Measuring position: Near tip of tooth.
Measuring direction: Tangent line
Preliminary arrangements: Workpiece rotation / Workpiece positioning
Analysis item: Contour and profile
Although the rotary positioning at every 90° requires simple repetitive operations,a significant difference will result in the amount of time required andthe accuracy depending on the operator’s skill.

Manual40 minutes
Measurement conditions

CNC
20 minutes(Measurement of 20 workpieces is
estimated within each time period.)

Number of measurement points: Approx. 2 points /Workpiece
Measuring position: On the cylinder's generatrix
Measurement direction: Along the generatrix axis
Preliminary arrangements: Workpiece change /Alignment
Analysis items: Surface roughness /Straightness
It takes little time to measure only one piece. However, since it is often the case thatmany workpieces are measured during each job, the total setting time required may
become too large for piece-by-piece setting!

Valve bodyTime for measurement

Manual40 minutes
Measurement conditions

CNC
15 minutes

Number of measurement points: Approx. 20 points
Measuring position: Seating surface and holes
Measurement direction: Top surface and the hole inside diameter in any of the three directions.
Preliminary arrangements: Shifting workpiece/ Changing workpiece position / Alignment, etc.
Analysis items: Surface roughness
The seating surface can be measured easily after shifting the workpiece appropriately.
However, it is not so easy to measure the inside surface roughness of a hole, since themeasuring position may be difficult to see by the operator during positioning!

3

A Range of Functions EnhanceYour Measurement Efficiency
Accelerating measurement efficiency through newmeasuring functions under CNC control

Part program-guided automatic continuous
measurement of multiple points/multiple workpieces

・ Tracking measurement function・ The use of the Y-axis table makes it possible to perform automatic
continuous measurement of multiple workpieces (measurement points).

*

The Z2-axis control makes thetarget range of form (contour)
tracing measurement wider
than that covered by only thedetector unit.

Z2

Y axis* Upward and downward movement ofdetector unit・ Upper/ lower surface continuous measurement function(for contour measurement)
Upper and lower surfaces can be measured continuously by using
Mitutoyo’s double-sided conical stylus.
This continuous measurement data can be used to facilitate analysisof features that were difficult to measure before, such as the effective
diameter of an internal screw-thread.
Upper direction measurement(Top surface)

Lower direction measurement(Bottom surface)Y-axis table・ Models with the α axis (incorporated with the drive unit tilting function)
enable continuous measurement on multiple sections of surfaces including
inclined portions without changing the initial set up.
・ Installs the Automatic Leveling Function using the α axis or optional AutoLeveling Table.

Top and bottom
measurement
switched bysoftwareMeasuring
direction
With α axis

・ Inclined plane measurement function (surface roughness)
Simultaneous control over the X axis and Y axis enables
oblique-movement measurement to be performed.
Even continuous measurement canbe achieved without re-setting theworkpiece so that the measuring
direction can be parallel to thedrive unit.
X-axisdisplacement range・ Confining all cables needed for the detector and drive unit internallyhas eliminated cable friction that could be one of the causes of ameasurement error, while at the same time achieving high-speed drive.

4

High-throughput measurement enabled by fast
positioning

Easy-to-use Remote Box allows the operator tocontrol the measuring unit at hand・ Thanks to its high drive speed (a maximum of 200 mm/s*), which is thefastest in the world, and multiple-axis simultaneous control, the detector
can be positioned practically instantaneously on the target measurement
point.

・ Easy-to-understand operation buttons identified by each icon marked on
the top.
・ Also provided with the Speed Override Knob, which allows the operator tochange the traveling speed even during automatic execution.

(* Maximum 40 mm/s for CS-5000CNC)
Speed Override Knob thatallows real-time change oftraveling speed

Easy-to-understand operation buttons

An anti-collision safety function is also provided to protect the operator, measuring unit,
and/or workpiece from damage.
→ This safety device will automatically stop the measuring unit should a collision occur.
Detector for contour
measuring

Direction of collision that
may cause the safety
device to be triggered

Removable unit
Detector for surface
roughness measuring

5

FORMTRACEPAK, the surface roughness/contour analysis
software that strongly supports CNC measurement
・ Workpiece identification (coordinate system alignment)
It is possible to measure the same point even when the current workpiece ispositioned in a place offset from that which was set at the time of creating thepart program, if the operator establishes the workpiece coordinate system another

Identifies the coordinate systemthrough edge measurement.

time.

・ Supports multiple-part measurement.
By repeatedly running one section of a part program using the loop function,
it is possible to batch-measure multiple workpieces having an identical form.

Repeated measurement via the loop function

One workpiece・ Supports automation.
The optional software FORMEio, which enables external control, allows users to control the measuring instrument and monitor its statusthrough a PLC (Programmable Logic Controller).

6

Contributes greatly to your productivity improvement by increasing measurement throughput.
The world’s leading range of CNC Form Measuring Instruments ushers in a new age of
automated measurement.

Surftest Extreme
SV-3000CNC

Surftest Extreme
SV-M3000CNC(With drive unit inclination mechanism)(Y-axis column moving type Surface Roughness Measuring Instrument)(Picture above is special specification)

Formtracer Extreme
SV-C4500CNC HYBRID

Formtracer Extreme
SV-C4500CNC(Mounting example of non-contact detector)(Example of mounting detector for contour measurement)(With drive unit inclination mechanism and Y-axis table)

Formtracer Extreme
CS-5000CNC / CS-H5000CNC(Picture above is CS-H5000CNC with 3D Auto-leveling Table and compact θ1-axis/ Y-axis table)

7

CNC Surface Roughness Measuring Instrument

Surftest Extreme
SV-3000CNC■ Features・ T he X1, Y and Z2 axes have a maximum drive speed of 200 mm/s,
which permits high-speed positioning that may result in a large
increase in the throughput of multiple-profile/ multiple-workpiecemeasurement tasks.
・ It is possible to perform inclined plane measurements through 2-axis
simultaneous control in the X- and Y-axis directions.
・ F or models with the α-axis drive, it is possible to perform
continuous measurement over horizontal and inclined surfaces bypower-tilting the X1 axis.
・ It is possible to expand the measuring range for multiple workpieces,
etc., through positioning in Y.
・ E quipped with the Z1-axis detector (0.75 mN measuring force) as
standard.

SV-3000CNC(Pictured with drive unit inclination mechanism and Y-axis table)

8Specifications■ SV-3000CNC
Column typeX1 axisStandard column typeHigh column typeMeasuring range

200 mmResolution

0.05 µm

Scale unit

Reflective-type linear encoder

Drive speed

CNC mode

Max. 200 mm/s

Joystick control mode

0 to 50 mm/s

Measuring speed

0.02 to 2 mm/s

Measuring direction

Backward

Straightness
Y-axis table unit

0.5 µm / 200 mm

Measuring range

200 mmResolution

0.05 µm

Scale unit

Reflective-type linear encoder

Drive speed

CNC mode

Max. 200 mm/s

Joystick control mode
Maximum loading capacity

0 to 50 mm/s
20 kg (the center of gravity should be placed within ø100 mm from the table center)

Straightness

0.5 µm / 200 mm

Linear displacement accuracy (at 20 °C, contour mode)±(2+2L/ 100) μm L: Dimension between two measured points (mm)Table size

200×200 mm

External dimensions (W×D×H)

320×646×105 mm

Mass
Z2 axis (column)

35 kg

Travel range

300 mm

500 mmResolution

0.05 µm

Scale unit
Drive speed
Accuracy (20 °C)

Reflective-type linear encoder
CNC mode

Max. 200 mm/s

Joystick control mode

0 to 50 mm/s

Model without α axis±(1.5+|10H| / 1000) µm H: Z2 axis measurement height (mm)−Model with α axis
Base size (W×D)

750×600 mm

Base material

GraniteMeasurement analysis

Refer to the FORMTRACEPAK surface roughness measurement/ analysis on page 23.

External dimensions (W×D×H)

800×620×1000 mm

Mass (excluding Y-axis table unit and Vibration Insulating Stand)

240 kgOperating temperature and humidity ranges

15 to 25 °C, 20 to 80 % RH (non-condensing)

Storage temperature and humidity ranges-10 to 50 °C, 5 to 90 % RH (non-condensing)Note: While the appearance of the natural stone measuring table varies according to the source, the high stability for which this material is known can always be relied upon.

■ α-axis unit (for α-axis installed model)■ Vibration Insulating Stand (Required Option)

Inclination angle

Vibration insulating mechanism

Rotating speed under inclined condition
Resolution of inclination angle
Mass-45° (counterclockwise),+10° (clockwise)
1 rpm

Natural frequency

Diaphragm air spring
2.5 to 3.5 Hz

Damping mechanism

Orifice0.000225°

Leveling mechanism

Automatic control with mechanical valves

9 kg

Air supply pressure

0.4 MPa

Allowable loading capacity

350 kgExternal dimensions (W×D×H)

1000×895×715 mm

Mass

280 kg9

CNC Surface Roughness Measuring Instrument

Surftest Extreme
SV-M3000CNC■ Features
・A CNC Surface Roughness Measuring Instrument that covers
measurement of large / heavy workpieces such as engine blocks,
crankshafts, etc.
・ T he X1, Y and Z2 axes have a maximum drive speed of 200 mm/s.
This permits high-speed positioning that can potentially result ina large increase in the throughput of multiple-profile/ multiple
workpiece measurement tasks.
・A highly accurate instrument featuring column (Z2 axis) CNC drive.
This allows comprehensive surface roughness measurement on large
and heavy workpieces that cannot otherwise be tested except byusing a compact surface roughness tester (handy-type).
・ T he following three types of detector holder are available to suit theintended use.
1. Standard type (downward facing)
2. Long type (downward facing, particularly suitable formeasurement of deep holes, etc.)
3. Rotary type (orientation indexable for downward, upward, forward
and backward facing.)・ A large rotary table (option) with a loading capacity of 100 kg isavailable by special order.
・ Measuring force for the Z1-axis detector is selectable from 4 mN or
0.75 mN.

1. Standard-type detector holder

2. Long-type detector holder

Measurement example for long-type
detector holder

3. Rotary-type detector holder (downward facing)

3. Rotary-type detector holder (upward facing)

Measurement example for rotary-type
detector holder (backward facing)

Large θ-axis table (Option)

SV-M3000CNC(Y-axis column moving type Surface Roughness
Measuring Instrument)(Picture above is special specification)

10

Specifications■ SV-M3000CNC
X1 axisMeasuring range
Resolution
Scale unit
Drive speed

200 mm0.05 µm
Reflective-type linear encoder
CNC mode
Max. 200 mm/s
Joystick control mode
0 to 50 mm/s
Measuring speed
0.02 to 2 mm/s
Straightness
Using standard-type detector
0.5 µm / 200 mm
Using long-type detector
0.7 µm / 200 mm
0.5 µm / 200 mm
Using rotary-type Up/down direction
detector
Forward/backward direction
0.7 µm / 200 mm
System noise Rz*
Using standard-type detector
Rz<0.1 µm
Using long-type detector
Rz<0.2 µm
Using rotary-type detector
Up / down direction: Rz<0.2 µm Forward / backward direction: Rz<0.4 µm
Z2 axis (column)
Measuring range
500 mmResolution
0.05 µm
Scale unit
Reflective-type linear encoder
Measuring force
CNC mode
Max. 200 mm/s
Joystick control mode
0 to 50 mm/s
Y axisMeasuring range
800 mmResolution
0.05 µm
Scale unit
Reflective-type linear encoder
Drive speed
CNC mode
Max. 200 mm/s
Joystick control mode
0 to 50 mm/s
Measuring speed
0.02 to 2 mm/s
Straightness
Using standard-type detector
Narrow range
0.5 µm / 50 mm
Wide range
2 µm / 800 mm
Using long-type detector
Narrow range
0.7 µm / 50 mm
Wide range
3 µm / 800 mm
Using rotary-type detector (up/down direction) Narrow range
0.7 µm / 50 mm
Wide range
3 µm / 800 mm
System noise Rz*
Using standard-type detector
Rz<0.2 µm
Using long-type detector
Rz<0.3 µm
Using rotary-type detector
Rz<0.3 µm
Measurement analysis
Refer to the FORMTRACEPAK surface roughness measurement/ analysis on page 23.
Base unit
Base size (W×D)
600×1500 mm
Base material
SteelAllowable loading capacity
300 kgVibration isolating unit
Air supply pressure
0.4 MPa
Vibration insulating mechanism
Diaphragm air spring
Natural frequency
4.0 to 5.0 Hz
Damping mechanism
Orifice & Oil damper
Leveling mechanism
Automatic control with mechanical valves
External dimensions (W×D×H)
1085×1695×1922 mm
Mass (including the vibration isolating unit)
1600 kg
Operating temperature and humidity ranges
15 to 25 °C, 20 to 80 % RH (non-condensing)
Storage temperature and humidity ranges-10 to 50 °C, 5 to 90 % RH (non-condensing)* System noise Rz is determined when measuring the glass optical flat under condition below: (1) X1 axis is horizontal (2) Measuring speed: 0.5 mm/sec (3)λc: 0.8 (4) Number of intervals: 5 (ISO 4287 1997)■ α-axis unit (for α-axis installed model)
Inclination angle
Rotating speed under inclined condition
Resolution of inclination angle
Mass-45° (counterclockwise),+10° (clockwise)
1 rpm
0.000225°
9 kg

11CNC Surface Roughness / Contour Measuring Instrument

Formtracer Extreme
SV-C4500CNC HYBRID■ Features・A Surface Roughness / Contour Measuring Instrument that allows measurementof surface roughness and form /contour with one unit through detector
replacement.
・ CNC Surface Roughness / Contour Measuring Instrument equipped with a
non-contact type detector as well as a contact type surface roughness contour
measuring detector.
[Contour measuring function]
・ Equipped with a new, more-powerful detector (specific to contour measurement).
1. The measuring range has increased by 10 mm (compared to the previous
model).
2. The use of a magnet joint on the arm mount allows speedy replacement of an arm.
3. Upward and downward facing surfaces can be continuously measured in
combination with a dual-sided cone stylus.
4. T he measuring force can be specified (in 5 steps) from the software interface(FORMTRACEPAK).
[Surface roughness testing function]・ Compliant with JIS 1982 /1994 / 2001, ISO, ANSI, DIN, VDA, and otherinternational surface roughness standards.
・ Equipped with the Z1-axis detector (0.75 mN measuring force) as standard.
[Common specifications]・ T he X1, Y and Z2 axes have a maximum drive speed of 200 mm/s.
This permits high-speed positioning that can potentially result in a large increasein the throughput of multiple-profile/ multiple workpiece measurement tasks.
・ It is possible to perform inclined plane measurements through 2-axis
simultaneous control in the Y-axis direction.
・ It is possible to expand the measuring range for multiple workpieces, etc.,
through positioning in Y.
・ The non-contact detector is selectable between CPS2525 and CPS0517.

●SV-C4000CNC(Conventional model)● SV-C4500CNC

50
mm

60
mm
10
mm

19
mm

1. Detector measurement range expanded by 10 mm(When using the SPH-71 one-sided cut stylus)● SV-C4000CNC(Conventional model)● SV-C4500CNC

Screw fixing
Removable unit (arm)

2. Magnetic joint

Removal unit (detector)
Lower direction measurement(Bottom surface)

Upper direction measurement(Top surface)

Top and bottom
measurement
switched by software

Effective
diameter

Plain-section
diameter

3. Continuous top-bottom measurement function

Detector standSV-C4500CNC HYBRID (Contour measuring detector shown mounted)

12SV-C4500CNC HYBRID (Surface roughness measuring detector shown mounted)

Specifications■ SV-C4500CNC HYBRID
X1 axis (drive unit)

Measuring range
Resolution
Scale unit
Drive speed
Measuring speed
Form/contour mode

Surface roughness mode
Non-contact type
Y axisZ1 axis (detector unit)

Form/contour mode

CNC mode
Joystick control mode
Measuring direction
Straightness
Accuracy (20 °C)
Measuring direction
Straightness
Straightness
Accuracy
Measuring range
Resolution
Maximum table loading
Measuring range
Resolution
Measuring direction
Stylus up/down operation
Scale unit
Accuracy (20 °C)
Measuring force
Traceable angle
Stylus tip

Surface roughness modeZ2 axis (column)

Measuring range
Resolution
Measuring force
Non-contact type detector Measuring range
CPS2525*
Resolution
Non-contact type detector Measuring range
CPS0517*
Resolution
Travel range
Resolution
Scale unit
Drive speed
Accuracy (20 °C)

Base size (W×D)
Base material
Measurement analysis

CNC mode
Joystick control mode

200 mm0.05 µm
Reflective-type linear encoder
Max. 200 mm/s
0 to 50 mm/s
0.02 to 2 mm/s
Forward / backward
2 μm / 200 mm±(0.8+4L/ 200) μm L: Measurement length (mm)Backward
0.5 μm/200 mm
0.5 µm/200 mm±(0.8+4L / 200) µm L: Measuring length (mm)200 mm0.05 µm
20 kg
60 mm (±30 mm from the horizontal plane)
0.02 μm
Upward / downward direction (Direction can be switched by FORMTRACEPAK)
Arc movement
Arc scale±(0.8+|2H| / 100) μm H: Measurement height from the horizontal position (mm)10, 20, 30, 40, 50 mN (Can be switched by software)
70° for ascent, 70° for descent (depending on the surface texture)
30° cone, Carbide
800 μm / 80 μm / 8 μm
0.01 μm / 0.001 μm / 0.0001 μm
0.75 mN
1.2 mm25 nm
0.1 mm
5 nm
500 mm0.05 μm
Reflective-type linear encoder
Max. 200 mm/s
0 to 50 mm/s±(3.5+15H / 1000) μm H: Z2 axis measurement height (mm)750×600 mm
GraniteRefer to page 23.

* Select either CPS2525 or CPS0517.
Note: While the appearance of the natural stone measuring table varies according to the source, the high stability for which this material is known can always be relied upon.

13

CNC Surface Roughness / Contour Measuring Instrument

Formtracer Extreme
SV-C4500CNC■ Features・A Surface Roughness / Contour Measuring Instrument that allows measurementof surface roughness and form /contour with one unit through detector
replacement.
[Contour measuring function]
・ E quipped with a new, more-powerful detector (specific to contour measurement).
1. T he measuring range has increased by 10 mm (compared to the previous model).
2. The use of a magnet joint on the arm mount allows speedy replacement of an arm.
3. Upward and downward facing surfaces can be continuously measured in
combination with a dual-sided cone stylus.
4. T he measuring force can be specified (in 5 steps) from the software interface(FORMTRACEPAK).
[Surface roughness testing function]・ Compliant with JIS 1982 /1994 / 2001, ISO, ANSI, DIN, VDA, and otherinternational surface roughness standards.
・ Equipped with the Z1-axis detector (0.75 mN measuring force) as standard.
[Common specifications]・ The X1, Y and Z2 axes have a maximum drive speed of 200 mm/s.
This permits high-speed positioning that can potentially result in a large increasein the throughput of multiple-profile / multiple workpiece measurement tasks.
・ For models with the Y-axis table, it is possible to perform inclined planemeasurements through 2-axis simultaneous control in the X- and Y-axis directions.
・ For models with the α axis, it is possible to perform continuous measurement
over horizontal and inclined surfaces by power-tilting the X1 axis.
・ F or models with the Y-axis table, it is possible to expand the measuring range formultiple workpieces, etc., through positioning in Y.
・M itutoyo’s lineup of CNC Surface Roughness Measuring Instruments offers
8 models that cover all possible combinations of standard and high column
types, α-axis drive and Y-axis drive to suit every application.

● S V-C4000CNC(Conventional model)● SV-C4500CNC

50
mm

60
mm
10
mm

19
mm

1. Detector measurement range expanded by 10 mm(When using the SPH-71 one-sided cut stylus)● SV-C4000CNC(Conventional model)● SV-C4500CNC

Screw fixing
Removable unit (arm)

2. Magnetic joint

Removal unit (detector)
Lower direction measurement(Bottom surface)

Upper direction measurement(Top surface)

Top and bottom
measurement
switched by software

Effective
diameter

Plain-section
diameter

3. Continuous top-bottom measurement function

Detector standSV-C4500CNC (Contour measuring detector shown mounted)

14

SV-C4500CNC (Surface roughness measuring detector shown mounted)

Specifications■ SV-C4500CNC
Column typeX1 axis (drive unit)

Standard column typeMeasuring range
Resolution
Scale unit
Drive speed
Measuring speed
Form/contour mode

Surface roughness mode
Y axisZ1 axis (detector unit)

Form/contour mode

Surface roughness modeZ2 axis (column)

Travel range
Resolution
Scale unit
Drive speed
Accuracy (20 °C)

CNC mode
Joystick control mode
Measuring direction
Straightness
Accuracy (20 °C)
Measuring direction
Straightness
Measuring range
Resolution
Maximum table loading
Measuring range
Resolution
Measuring direction
Stylus up/down operation
Scale unit
Accuracy (20 °C)
Measuring force
Traceable angle
Stylus tip
Measuring range
Resolution
Measuring force

High column type

200 mm0.05 µm
Reflective-type linear encoder
Max. 200 mm/s
0 to 50 mm/s
0.02 to 2 mm/s
Forward / backward
2 μm / 200 mm±(0.8+4L/ 200) μm L: Measurement length (mm)Backward
0.5 μm / 200 mm
200 mm0.05 µm
20 kg
60 mm (±30 mm from the horizontal plane)
0.02 μm
Upward / downward (Direction can be switched by FORMTRACEPAK)
Arc movement
Arc scale±(0.8+|2H| / 100) μm H: Measurement height from the horizontal position (mm)10, 20, 30, 40, 50 mN (Can be switched by software)
70° for ascent, 70° for descent (depending on the surface texture)
30° cone, Carbide
800 μm / 80 μm / 8 μm
0.01 μm / 0.001 μm / 0.0001 μm
0.75 mN
300 mm

CNC mode
Joystick control mode
Model without α axis
Model with α axis

Base size (W×D)
Base material
Measurement analysis

500 mm0.05 μm
Reflective-type linear encoder
Max. 200 mm/s
0 to 50 mm/s±(1.5+10H / 1000) μm H: Z2 axis measurement height (mm)−750×600 mm
GraniteRefer to page 23.

Note: While the appearance of the natural stone measuring table varies according to the source, the high stability for which this material is known can always be relied upon.

■ α-axis unit (for α-axis installed model)
Inclination angle
Rotational speed under inclined condition
Resolution of inclination angle
Mass-45° (counterclockwise),+10° (clockwise)
1 rpm
0.000225°
9 kg

15CNC Surface Texture Measuring Instrument

Formtracer Extreme
CS-5000CNC/CS-H5000CNC■ Features・H igh-accuracy stylus type CNC Surface Measuring Instrument thatallows batch measurement of surface roughness and form /contour.
・ T he X1 and Z2 axes have maximum drive speeds of 40 mm/s and
200 mm/s, respectively. This permits high-speed positioning thatcan potentially result in a large increase in the throughput ofmultiple-profile / multiple workpiece measurement tasks.
・ A Mitutoyo Transmission type linear encoder is incorporated in
the X1 and Z1 axes so that high resolution is achieved and batchmeasurement of form /contour and surface roughness can be made.
・ The active control method is employed for the Z1-axis detector
to implement a wide-range measurement capability wherein thevariation in dynamic measuring force is restricted.
・ It is possible to perform inclined plane measurements through 2-axis
simultaneous control in the X- and Y-axis directions.
・ T he Z1-axis detector incorporates an anti-collision safety device
to automatically stop the machine if the detector body touches aworkpiece or jig.

・ For models with the axis, it is possible to perform continuous
measurement over horizontal and inclined surfaces by power-tilting
the X1 axis. (CS-5000CNC only)・ For models with the Y-axis table, it is possible to expand themeasuring range for multiple workpieces, etc., through positioning in
the Y-axis direction.
・ This system has a track record in an application to measure an
aspheric lens to a high level of accuracy.
The system is being well received because of its options (Y-axis
Table and 3D Auto-leveling Table) that allow easy and automatic
workpiece setting (inclination and peak / valley-point detection) andthe dedicated software (ASLPAK: refer to page 24) that allows easy
part-program creation and analysis in addition to the high-accuracy
main unit.

Wide range detector employing active
control technology

CS-H5000CNC(Pictured with Y-axis table, 3D Auto-leveling Table, and θ1 axis)

16Specifications■ CS-5000CNC/CS-H5000CNC
Model
Column typeX1 axisCS-5000CNC
Measuring range
Resolution
Scale unit
Drive speed
Measuring speed
Measuring direction
Straightness

α axisZ1 axis (detector unit)

Z2 axis (column)

CS-H5000CNC

Standard column typeHigh column typeHigh column type
200 mm
0.005 μm
Transmitted-type linear encoder
Max. 40 mm/s
0 to 40 mm/s
0.02 to 0.2 mm/s (surface roughness), 0.02 to 2 mm/s (form /contour)
Forward / backward(0.1+0.0015L) μm L: traverse length (mm)(0.05+0.0003L) μm L: traverse length (mm)(0.2+0.0015L) μm L: traverse length (mm)(0.1+0.0015L) μm L: traverse length (mm)±(0.3+0.002L) μm L: traverse length (mm)±(0.16+0.001L) μm L: traverse length (mm)-45° (counterclockwise), +10° (clockwise)
−
12 mm
24 mm
0.0008 μm
0.0016 μm
Arc motion
Transmitted-type linear encoder±(0.3+|0.02H|) μm H: probing height (mm)±(0.07+|0.02H|) μm H: probing height (mm)4 mN (Fixed)
0.75 mN (Fixed)
Ascent: 60°, Descent: 60°, (Depends on the surface texture.)
Tip radius: 5 μm, Tip angle: 40°, Diamond tip
Tip ball radius: 0.25 mm, Sapphire
Tip radius: 5 μm, Tip angle: 40°, Diamond tip−
Tip radius: 2 μm, Tip angle: 60°, Diamond tip
Tip ball radius: 0.25 mm, Sapphire
Downward
300 mm
500 mm
300 mm
500 mm0.05 μm
Reflective-type linear encoder
Max. 200 mm/s
0 to 50 mm/s
750×600 mm
GraniteRefer to page 23.

Standard column type

CNC mode
Joystick control mode(with standard stylus)(with 2X-long stylus)

Accuracy (20 °C)
Inclination angle
Measuring range(with standard stylus)(with 2X-long stylus)
Resolution(with standard stylus)(with 2X-long stylus)
Vertical movement of the stylus
Scale type
Accuracy (20 °C)
Measuring force(with standard stylus)(with 2X-long stylus)
Traceable angle
Stylus tip shapeStandard stylus
Standard ball stylus
2X-long stylus
2X-long stylus
2X-long ball stylus
Face of stylus
Travel range
Resolution
Scale type
Drive speed
CNC mode
Joystick mode
Base size (W×D)
Base material

Measurement analysis

Note: While the appearance of the natural stone measuring table varies according to the source, the high stability for which this material is known can always be relied upon.

■ Y-axis table unit (for Y-axis installed model)
Measuring range
Minimum reading
Scale unit
CNC mode
Drive
speed
Joystick control mode
Maximum loading capacity
Straightness
Accuracy (20 °C, contour mode)
Table size
External dimensions (W×D×H)
Mass

200 mm0.05 μm
Reflective-type linear encoder
Max. 200 mm/s
0 to 50 mm/s
20 kg (the center of gravity should be placed
within 50 mm from the table center)
0.5 μm/200 mm±(2+2L/100) μm
L: Dimension between two measured points (mm)200×200 mm
320×646×105 mm
35 kg

17

Surface Roughness / Contour Analysis Program

FORMTRACEPAKFORMTRACEPAK functions offer total support formeasurement system control, surface roughness analysis,

contour analysis, contour tolerancing, and inspection report creation.

Editing measurement procedures
The items displayed in the measurement procedure window can be directly
modified. You can, for example, perform new analyses by modifying theevaluation setup or roughness standard.

Operation messaging
The operation message window for explaining the next step is incorporated.

Versatile graphics windowing for data and analysis● Tab-selection graphics window
Just select a tab to display the measurement data required,such as contour, roughness, or tolerancing results.

● Dividing the screen into two or four windows
The screen can be divided into two, or four, windows for theconvenient display of measurement data (for contour androughness), analysis results, and contour tolerancing data, as
required.

● Displaying the results in the graphics window
You can paste the graphics obtained from measurements, aswell as measurement values (including pass/fail results) and ananalysis graph, into the graphics window. This enables you tocheck the graphics and measurement results at a glance using
the graphics window alone.

18

Measurement control
To make only a single measurement, you can create a part program in the
single mode. To measure multiple workpieces of an identical shape, you can
use the teaching mode.
Since you can embed the entire flow, from making measurement to printing areport, into a part program, you can efficiently make measurements, analyze
data, and output a report. A functionis also provided that enables you to
insert comments accompanied withphotographs at desired timings,
enabling you to embed the roles
described in a measurement procedure
document that specifies important
points such as work settings.
To make immediate measurements, you can use the pull-down menu to easily selectand call up the desired operating procedure.

Online help functions*

Button-editing function

Online help that can be viewed any time is incorporated into the software. In
addition to index and keyword searches, a status-saving help button, which displays
menus and Windows help with a click of the mouse, is provided.

You can hide buttons that are not used frequently. For example, you can choose
to display only those buttons that are used frequently and increase the size of thedisplayed graphics window, thereby customizing the window to suit your needs.

* Online help function supports only Japanese and English.

17 languages

Simple statistical commands

You can switch the language* to be used in the measurement, analysis, and layout windows.
After measurements have been made, you can switch to another language andcreate a report in that language. This function can be used worldwide.

You can perform statistical calculations of roughness parameters and contour
analysis results without using a separate program such as Excel.

* Supported languages: Japanese, English, German, French, Italian, Spanish, Polish, Hungarian,
Swedish, Czech, Chinese (simplified characters), Chinese (traditional characters), Korean, Turkish,Portuguese, Russian, Dutch.

19

FORMTRACEPAKContour Analysis● Contour analysis function
A wide variety of commands, which form the basic elements for analysis, areprovided, including those for points (10 kinds), lines (6 kinds), and circles (6 kinds).
A rich set of commands that combine these elements to calculate angles, pitches,and distances, a contour-tolerancing function, and a design value generation function
are also provided as standard features. These functions, combined with the functionthat allows you to customize the calculation command buttons by hiding lessfrequently used commands, let you tailor the window according to the user
environment.

● Contour-tolerancing function as a standard featurePatent registered in JapanThe best-fit processing function that moves the coordinate values of the design
data and measurement data to the optimum positions is provided as a standard
feature. Since the tolerancing results can be visually displayed as graphics, displayed
as tolerance values and tolerance expansions in each coordinate, or output as a text
file, they can be utilized as feedback data for machining systems.

● Best-fit processing function for measurement point strings
This function tries to fit the measurement points to the pre-registered reference dataon the same coordinate system. It can eliminate the effects of a shift that may occur
when setting the workpiece during automatic analysis.

● Data superimposition command
Example of contour-tolerancing result● Calculation command repetition setting Patent registered in JapanYou can superimpose two sets of data by detecting their characteristic points. Use
the mouse to drag and move the measurement point strings to the desired positions
to be superimposed.

When identical shapes have the same pitch, you can analyze all of the shapes in abatch by specifying a single analysis location and the pitch.

● Data combination function
You can combine partial data collected separately from a workpiece because of its
external shape into a single graphic and analyze it.
Data 1

Data 2● Circle and line automatic determination function
Using the circle / line auto-fitting command, you can automatically calculate all circles
and lines contained in the data without having to click the command button each
time.

20

Data combine

FORMTRACEPAK
Surface Roughness Analysis● Surface Roughness analysis function
FORMTRACEPAK can perform surface roughness analyses that conform to various
standards such as ISO, JIS, ANSI, and VDA. For comparing the measurement values
with the tolerance limits, you can use the 16 % rule or the maximum value rule.
Furthermore, since FORMTRACEPAK comes with parameter calculation functions aswell as a rich set of graphic analysis functions, it can be widely utilized for everythingfrom routine quality control to R&D applications. It also includes many otherfunctions, such as the function for eliminating (compensating) shapes, such as slopes
and R-surface, and a data deletion function.

● Microscopic contour analysis function
This function can calculate steps and surface areas from the roughness data.
Furthermore, as with the contour analysis function, a rich set of calculationcommands that combine various elements, such as points, lines, and circles,
to calculate angles, pitches, and distances are provided as standard features.

● Reference length dialog box● Simple input using drawing symbols

Example of drawing symbol
Grinding

You can easily set up cumbersome measurement
conditions by simply entering data according to thedrawing symbols of the ISO/JIS roughness standard.

When setting up the reference
length in a measurement
condition, you can display thestandard values defined by the
ISO/JIS standards by selecting
the applicable standard.

Ra 1.5⊥ − 2.5 / Rzmax 6.7
Example of entering data
U”X”0.08—0.8/Rz8max 3.3● Analysis condition modification with a preview function
You can easily modify various types of analysis conditions such as the standard to be
used, curve type, and filter. Furthermore, before eliminating (compensating) shapes
such as slopes, R-surfaces, and parabolas, the preview function allows you to checkthe impact on the spot.
Before compensation● Multiple-point measurement function

After compensation

You can easily create a part program that measures multiple points by simply
entering a shift.

● R-surface automatic measurement function
Based on the preliminary measurement results, you can automatically measure an
R-surface by allocating measurement distances using the peak or bottom of the
R-surface as the reference.

● Analysis function using multiple-point measurements
For a workpiece that cannot be measured over the evaluation distance specified bya standard, you can calculate the roughness parameter from the data obtained bymeasuring multiple points, and compare the measurement data with the tolerance
limits using the 16 % rule, for example.

Peak

Peak

21

FORMTRACEPAK
Layout program

Integrating Contour, Surface Roughness, and Roundness Measurement Results onto a Single Page!
You can use simple operations to lay out graphics obtained from measurements as well as measurement
results for surface roughness, contour, and roundness* on a single page.
Furthermore, since the program now allows you to specify a saved file and paste it, you can easily paste
results from multiple files.
* Note that the optional ROUNDPAK roundness / cylindricity analysis program is required. (Ver. 7 or higher)● Report creation function● Element insertion bar

You can freely assemble measurement results / conditions / graphics as well as
comments / circles/ lines / arrows, and print them out in a measurement result report.
You can also save the created layout and use it again later for similar measurements.

Using the mouse to drag and drop the analysis content displayed in the element
insertion bar, you can paste it into the layout.

● System layout printing
This function allows automatic layout and print of an inspection certificate with aneasy operation just by selecting print items such as calculation result, measurement
condition and measurement graphs. It also allows detailed setting of measurement
graph size, measurement result, font, etc. Use this function for an easy print solution.

22● Saving the result as a web page
Since the measurement result report can be output as a PDF file or html format, you
can check the result even on a PC in which no layoutediting program is installed.

FORMTRACEPAK Contour Measurement /Analysis Specifications
Point
Line
CircleArithmetic
processing

Coordinate
Distance/angle
Coordinate system
Arithmetic operations/compilation
Measurement point
compilation
Extended functions

Contouring tolerancing
Other functions
Calculation support
Measurement support function (common
to contour/roughness measurement)
CNC measurement
Statistical processing
Data file input/output
Coordinate control
Stylus calibration
Straightness correction
Sampling pitch
Memory capacity
Magnified display Vertical
Magnified display Horizontal

Point, peak point, valley point, contact point, foot of a perpendicular, intersection point, midpoint, inflection point (distance), inflection point (angle),
inflection point (angular variation), point readout
Line, tangent line, perpendicular line, parallel line, median line, line (point, angle), line readout
Circle, circle (center - radius), circle (2 points), contact circle, contact circle (measurement point), circle (radius / center fixed), circle readout,
ellipse (calculated with the quadratic curve command)
Coordinate difference (X-axis coordinate difference, Z-axis coordinate difference, angular difference, radial difference), positional judgment
Distance, step height (mean, maximum, minimum), groove dimensions, pitch (pitch, pitch [between centers]), angle, travel distanceOrigin setting of coordinate system, coordinate system rotation
Arithmetic operations (addition, subtraction, multiplication, division, absolute value, square root),
statistics (mean, maximum value, minimum value, standard deviation, unbiased standard deviation, total sum), data entry, data deletion
Deletion, translation, rotation, inversion, positioning, segmentation, offset, idealization, fairing, filtering,
scale handling of measurement points (polar coordinate spreading), combination
Area, quadratic curve (ellipse, hyperbola, parabola), circle/ line auto-determination command (automatically determines multiple circle / line features
included in the specified area)
Contour tolerancing, best-fitting, design value generation, design value reading, balloon display of arbitrarily-positioned data
Tolerancing, dimension display, simplified display
Auto-display of calculation command help (ON / OFF)
Peak/valley detection (manual), ball measurement, workpiece identification function, leveling, squareness alignment,straightness alignment, R-surface auto-measurement function (for roughness measurement only)
Measurement part program, multiple parts
Simplified statistical functions
Output: text, design value, IGES, DXF
Input: text, design value (IGES and DXF are loaded by the design value generation utility), data import from SJ-series
Origin setting, coordinate system rotation, coordinate system configuration through workpiece identification, zero-setting or resetting of each axis
Auto-calibration with the batch calibration kit, manual calibration with GB, reference hemisphere or pin gauge
Calibration history: Any stylus has no restriction on the number of events to be stored.
Equipped with the straightness correction function
0.1 to 2000 μm (depending on the measuring machine)
Up to 100,000 points (depending on the measuring machine)
Arbitrary value (in steps of 0.001), automatic and 0.001 to 10,000,000 times
Arbitrary value (in steps of 0.001), automatic and 0.001 to 10,000,000 times

FORMTRACEPAK Surface Roughness Measurement / Analysis Specifications
Compliant roughness standards

JIS1982, JIS1994, JIS2001, ISO1997, ANSI, VDA, OLDMIX
Ra, Rq, Sk, Ku, Rp, Rv, Ry, RyDIN, RzDIN, Rt, Rc, Rz, R3z, R3t, S, Δa, Δq, λa, λq, Lo, Ir, Rk, Rpk, Rvk, Mr1, Mr2, A1, A2, Sm, Pc, HSC, mr, mrd, δc, Vo, Rx,
Parameters
AR, R, NR, NCRX, CPM, SR, SAR, Wx, AW, W, Wte, NW, SW, SAW (Area and height-related parameters are analyzable with the contour analysis command.)GO / NG judgment methods
Mean or maximum value rule, 16 % rule
Primary (unfiltered) profile, roughness profile, filtered waviness profile, waviness profile, unfiltered rolling circle waviness profile, rolling circle waviness profile,
Assessed profiles
envelope residual profile, DF profile (DIN4776/ISO13565-1), roughness motif profile (An envelope waviness profile is displayed at the time of motif assessment.)
Material ratio curve (BAC), amplitude distribution curve (ADC), power spectrum, autocorrelation, Walsh power spectrum, Walsh autocorrelation, peak
Analysis graphheight distribution, tilt angle distribution, parameter distribution (As for abrasion amount or multilayer, area, etc. are analyzable through contour analysis.)Least square line, R-surface correction, elliptic correction, parabolic correction, hyperbolic correction, conic correction,
Form removal
polynomial correction (automatic or optional 2nd to 7th-order correction)
Filter type
Gaussian, 2CRPC75, 2CRPC50, 2CR75, 2CR50, robust spline(λc): 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25, 80 mm optional
Cutoff wavelengths(λs): 0.8, 2.5, 8, 25, 80, 250, 800 μm optional
Micro-contour analysis
Refer to Arithmetic processing in FORMTRACEPAK Contour Measurement / Analysis Specifications.
Statistical processing
Simplified statistical functions
Measurement support functions (common Peak/valley detection (manual), ball measurement, workpiece identification function, leveling, squareness alignment, straightness alignment,
to contour/roughness measurement)
R-surface auto-measurement function (for roughness measurement only)
Measurement support functions
Simplified input according to drawing instruction marks, sampling length setting dialog box, N-points measuring function
Stylus calibration
Roughness specimen, step-gage (Calibration history: no restriction on the number of events that can be stored for any stylus)
Memory capacity
Up to 100,000 points
Magnified display Vertical
Arbitrary value (in steps of 0.001), automatic and 0.001 to 10,000,000 times
Magnified display Horizontal
Arbitrary value (in steps of 0.001), automatic and 0.001 to 10,000,000 times
Natural language selection

Japanese, English, German, French, Italian, Spanish, Polish, Hungarian, Swedish, Czech, Chinese (simplified characters),
Chinese (traditional characters), Korean, Turkish, Portuguese, Russian, Dutch

Note: Online help is provided only in Japanese and English.

23

FORMTRACEPAK
Software

3D Data Analysis Program, FORMTRACEPAK-Pro (Option)
This software will analyze the three-dimensional surface roughness data collected from coordinate
measurement with the Y-axis table.
It can offer various visual representation methods, such as shading display, mesh display, andcontour-line display.
Thus, the user can analyze the target surface texture from various angles by making use of not
only the 3D Roughness Parameter Calculation, Profile Analysis (area, volume), but also Bearing
Area Curve (BAC), Amplitude Distribution Curve (ADC) and Power Spectrum Analysis, etc.

Aspheric Lens Analysis Program ASLPAKThis software allows you to create a part program for assessing an aspheric lens by merely entering the data of general that defines the aspheric surface and effective lensdiameter. It allows not only analysis of designed R and best-fit R, but also easy determination of the pseudo roughness parameters for the aspheric surface from those results.

Aspheric Simple Program Creation Screen

24

Aspheric Pseudo Roughness Parameter Analysis

Aspheric Accuracy Assessed Values (F’, A’, S’) Analysis

3D Surface Texture Analysis Program MCubeMap (Option)
This software is a 3D surface texture analysis program oriented to CNC Surface Roughness Measuring Instruments and CNC Surface Texture Measuring Instruments.
Its abundant display functionality for measured data includes colored view, contour lines, 3D view, 3D view plus mesh plot, photomicrography, etc., allowing easy and clear
recognition of surface features.
The software allows you to create a graphical report with analysis results presented in your own customized layout.
(This software is compatible with the 3D Surface Texture Parameter Standard in the latest issue of ISO 25178-2.)

External Communication Program, FORMEio (Option)
This is optional software for installing the external control function in the CNC form measuring instrument.
With this function it is possible to monitor and control the measuring instrument conditions via RS-232C communication from the PLC.

Workpiece Feed Unit

CNC Form Measuring Instrument
Data Processing Unit PC

RS-232C
Analysis Software
FORMTRACEPAK

External Communication
Software FORMEio

Operation Console
PLC*
Signal Tower
Available signals: Approach SW, Limit SW* Programmable Logic Controller

25Detectors/Styli (For Surface Roughness Measuring*)* Except for CS-5000CNC/CS-H5000CNC.

Detectors
11.5 10

φ14

14● 12AAG202 Extension rod 50 mm

14

60

3.1

φ8

1.3
3.6

φ

Extension rods

Unit: mmφ7

Detector

Skidless nosepiece（12AAB355）

4

Order No.

Measuring force

178-396-2

0.75 mN’97ISO and ’01JIS compliant detectors

178-397-2

4 mN

Detectors that comply with previous standards, for general use, etc.

● 12AAG203 Extension rod 100 mm

Note: No more than one extension rod can be connected.

Styli

Unit: mm( ): Tip radius

標準スタイラス
44.4

12AAC732 (2 µm)*1
12AAB404 (5 µm)
12AAB416 (10 µm)( ): Tip radius

0.4

0.6
0.6

2.4

3.4
1.6

30

φ1.2

12AAJ662 (φ0.5 mm)

Detail-A

8.5
A

Color
coding*3

Detail-A( ): Tip radius*1 Tip angle 60°*2 For downward-facing measurement only.

90°
3X stylus
12AAC741 (2 µm)*1
12AAB414 (5 µm)
深穴用
12AAB426 (10 µm)

φ0.5超硬球

φ0.6

Detail-A( ): Tip radius
*3

7

45

A部詳細

A

12AAE938 (2 µm)*1
12AAE940 (5 µm)

A

φ2.4

90°
2X stylus
12AAC740 (2 µm)*1
12AAB413 (5 µm)
12AAB425 (10 µm)

φ1.2

0.6

43.8
37.7

94.4
87.7

7

φ2.4

φ1.2

0.6

7.6
5.2

Color 0.9
coding*3

For small slotted hole*2

144.7
137.7
A

1.6

87.7

φ2.4

A

7.6
5.2

0.9

37.7
43.8

φ1.2

For deep hole (double-length and triple-length)*2
94.7 超小穴用

0.4

A

細穴形状用

φ2.4

Ball φ0.5

φ2.4

φ0.6

90°
Detail-A（S＝5/1）

φ2.4

For ultra-small hole*4

12AAC734 (2 µm)*1
12AAB406 (5 µm)
12AAB418 (10 µm)( ): Tip radius

0.8

2.5

φ1.2

Ball φ1.6

φ0.3

8.9

φ0.3

12AAE884 (φ1.6 mm)

小穴用・深穴2倍
93.8
87.7
41

Color
coding*3

極細穴用
44.2
37.7

0.4

For small hole*2*4

φ0.3

For extra-minute hole

A

3.1

φ2.4

2.5
φ0.6

1.2
A

φ2.4

1.2

90°
Detail-A（S＝5/1）0.8

0.6

12AAC733 (2 µm)*1
12AAB405 (5 µm)
12AAB417 (10 µm)( ): Tip radius

44.2
小穴用
37.7
8.9

φ0.3

極細穴形状用
細長穴用

Tip radius

1 µm

2 µm

5 µm

10 µm

250 µmColor coding

White

Black

No color

Yellow

No notch or color*4 Used for calibration, a standard step gauge (178-611, option) is also required.

26

12AAE892 (2 µm)*1
12AAE908 (5 µm)( ): Tip radius

94.4
87.7

φ0.6

Color
coding*3

0.4

Detail-A

0.6

3.4
1.6

A

For extra-small holeColor
coding*3

For small hole / Double-length for deep hole*2
深穴2倍用

Detail-A

90°
Detail-A（S＝5/1）

φ1.2

1.6

φ0.6

37.7
15

φ2.4

For small hole

φ2.4

90°

0.9

2.4

φ1.2

Detail-A

12AAE898 (2 µm)*1
12AAE914 (5 µm)( ): Tip radius

94.7
87.7

φ2.4

φ2.4

7.6
5.2

A
Color
coding*3

Double-length for deep hole*2

12AAE882 (1 µm)*1
12AAE924 (1 µm)
12AAC731 (2 µm)*1
12AAB403 (5 µm)
12AAB415 (10 µm)
12AAE883 (250 µm)*4

44.7
37.7

0.9

3
1.8
0.6

Standard stylus

Styli (For Surface Roughness Measuring*)* Except for CS-5000CNC/CS-H5000CNC.

Styli

Unit: mm
44.7
37.7
A

φ1.2

24.2
23

φ2.4

深溝用（10mm）45.2
For deep groove*2
深溝用237.7
倍（20mm）(40 mm)
φ2.4

12AAC736 (2 µm)*1
12AAB408 (5 µm)
12AAB420 (10 µm)( ): Tip radius

44.7
37.7

43.8
42.6
5.2

For deep groove*2 (20 mm)

A
φ1.2
90°

φ1.2

識別色

A部詳細

For gear tooth
37.7

φ3

5.2

93.8
87.7

深溝用（30mm）
深穴2倍

φ2.4

36.5
35

7

6.4

7.6

60°

( ): Tip radiusA
60° φ1.2

Detail-A

12AAE894 (2 µm)*1
12AAE910 (5 µm)( ): Tip radius

φ1.2

φ1.2

90°
For gear tooth/
12AAB339 (2 µm)*1
Double-length
12AAB410 (5 µm)*1*2
12AAB422(10 µm)
深溝用（*120mm）for deep hole60°

43.8（30mm）
深溝用

93.8
87.7
深溝用（40mm）

12AAE896 (2 µm)*1
12AAE912 (5 µm)*1( ): Tip radius

φ3

90°

For deep groove (30 mm)/Double-lengthfor deep hole*2

6.7

φ1.2

Detail-A

37.7
44.7
A

24.2
23

A

φ2.4

37.7
45.2

φ2.4

33
31.8
5.2

φ2.4

12AAC737 (2 µm)*1
12AAB407 (5 µm)
12AAB419 (10 µm)
0.9( ): Tip radius

36.5
35

For deep groove*2 (30 mm)

Color
coding*3

12AAE895 (2 µm)*1
12AAE911 (5 µm)( ): Tip radius

φ2.4

Detail-A

Color
coding*3( ): Tip radius

φ2.4

90°

Color
coding*3

12AAE893 (2 µm)*1
12AAE909 (5 µm)

95.2
87.7

( ): Tip radius

φ1.2

Detail-A

For deep groove*2 (20 mm)

23
21.8

Color
coding*3

12AAC735 (2 µm)*1
12AAB409 (5 µm)
12AAB421 (10 µm)

φ2.4

14.2
13

0.9

5.2

For deep groove (10 mm)

φ1.2*4
For rolling circle waviness surface歯面用

φ2.4

37.7

φ1.2

90°

φ2.4

A

12AAC739 (2 µm)*1
12AAB412 (5 µm)
12AAB424 (10 µm)( ): Tip radius

Detail-A

φ2.4

0.5

37.7

12AAE899 (2 µm)*1
12AAE915 (5 µm)( ): Tip radius

穴底用

Tip radius

2 µm

5 µm

Color codingBlack

No color

10 µm
Yellow

φ1.2

90°

φ2.4

Color
coding*3.2*4 Used for calibration, a standard step gauge (178-611, option) is also required
45.2
37.7

0.9
A

7.6

φ2.4

10

*3

φ1

Hole-bottom cone stylus
穴測定コーナー用
・深穴2倍
44.3

Detail-A*1 Tip angle 60°*2 For downward-facing measurement only.
Note: C ustomized special interchageable styli are available on request.
Please contact any Mitutoyo sales office for more information.

( ): Tip radius

φ2.4

60°

φ1

Color
coding*3

7.6
6.4
5.2

45.2
ナイフエッジ用
1.4

7.6

10

12AAM601 (2 µm)*1
12AAM603 (5 µm)*1

φ2.4

For eccentric arm*2

93.8
転がり円うねり
87.7 ・深穴2倍

7.6
6.4

Detail-A

歯面用
深穴2倍

For corner hole / Double-length for deep hole*2

5

φ1.2

90°

87.7

φ1.2

7.4
6.2

0.9

7.6

A

12AAC738 (2 µm)*1
12AAB411 (5 µm)
12AAB423 (10 µm)( ): Tip radius

44.7
転がり円
37.7
うねり用

12AAE886 (250 µm)

60°

Color
coding*3

φ2.4

Ball φ1.588

For knife-edge

For rolling circle waviness/
Double-length for deep hole*2*4 94.7
0.9

φ2.4

7.6
5.2

0.9

φ1.2

12AAB338 (φ1.588)

44.7
37.7

27

Arms /Styli (For SV-C4500CNC Contour Measuring)Arms● Arm compatibility table
Description

Arm No.

Order No.

Straight arm

AB-31

12AAM101*1

Eccentric arm

AB-37

12AAQ762*3*4

AB-33

*3*4

Small-hole arm

12AAM103● Straight arm AB-31

Applicable stylus No.
SPH-5＊, 6＊, 7＊, 8＊, 9＊
SPHW*2-56, 66, 76
SPH-5＊, 6＊, 7＊, 8＊, 9＊
SPHW*2-56, 66, 76

20

φ8● Small-hole arm AB-33● Eccentric arm AB-37
20

57.5

φ8

218*5

20
57.5

φ8

57.5

218

218*5

SPH-41, 42, 43
40

Styli
● Stylus compatibility table
Stylus nameDouble-sided conicalstylus*2

One-sided cut stylusIntersecting cut stylus

Cone stylus
Tip angle 30°
Sapphire tipped

Cone stylus
Tip angle 30°
Carbide-tipped

Cone stylus
Tip angle 20°
Carbide-tipped
Cone stylus
Tip angle 50°
Diamond tipped

Knife edge stylus

Ball stylus

Small hole stylus*7

Stylus No.
SPHW-56
SPHW-66
SPHW-76
SPH-51
SPH-61SPH-71SPH-81
SPH-91
SPH-52
SPH-62
SPH-72
SPH-82
SPH-92
SPH-53
SPH-63
SPH-73
SPH-83
SPH-93
SPH-56
SPH-66
SPH-76
SPH-86
SPH-96
SPH-57
SPH-67
SPH-77
SPH-87
SPH-97

Order No.
12AAM095*6
12AAM096*4
12AAM097*4
354882*3*4
354883354884*1
354885354886354887354888354889*3*4
354890354891354892354893354894354895354896
12AAA566
12AAA567
12AAA568*3*4
12AAA569
12AAA570
12AAE865
12AAE866
12AAE867
12AAE868
12AAE869

SPH-79SPH-54
SPH-64
SPH-74
SPH-84
SPH-94
SPH-55
SPH-65
SPH-75
SPH-85
SPH-95
SPH-41
SPH-42
SPH-43● Double-sided conical stylus

Application arm No.
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37

H (mm)
20
32
48
6
12
20
30
42
6
12
20
30
42
6
12
20
30
42
6
12
20
30
42
6
12
20
30
42

355129AB-31, AB-37

20354897354898354899354900354901354902354903354904354905354906
12AAM104*3*4
12AAM105
12AAM106*3*4

AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-31, AB-37
AB-33
AB-33
AB-33

6
12
20
30
42
6
12
20
30
42
2
4
6.5

*1 This is a standard accessory.
*2 Stylus for SV-C4500 Series*3 Arm stylus standard set (12AAN461) component.
*4 Arm stylus up/downward measurement set (12AAN462) component.
*5 When mounting one-sided cut stylus SPH-71 (standard accessory)*6 Standard accessory for SV-C4500 Series*7 Styli SPH-21, 22, and 23 for SV-C3100/4100 Series are not available.
*8 Arm stylus for SV-C4500 Series

φ3

φ4.8

H

φ1.6

H

Tip angle: 30º
Tip radius: 25 µm
Carbide-tipped

H● Cone stylus

H

13

0.4

● Small hole stylus SPH-42

φ3

φ3

Tip shape: One-sided cut
Tip angle: 20º
Tip radius: 25 µm
Carbide-tipped55

Tip angle: 30º (SPH-79: 50º)
Tip radius: 25 µm
Sapphire, Carbide-tipped(SPH-79: Diamond tipped)● One-sided cut stylus

φ5
φ3

H

Tip angle: 12º
Tip radius: 25 µm
Carbide-tipped

Tip angle: 20º
Tip radius: 25 µm
Carbide-tipped

Tip shape: One-sided cut
Tip angle: 20º
Tip radius: 25 µm
Carbide-tipped

55

20

H

1

● Knife edge stylus● Intersecting cut stylus
φ3

φ3

H

● Small hole stylus SPH-43
φ4

H

Tip angle: 20º
Edge width: 3 mm
Tip radius: 25 µm
Carbide-tipped

Tip angle: 20º
Tip radius: 25 µm
Carbide-tipped40

55

Tip shape:One-sided cut
Tip angle: 20º
Tip radius: 25 µm
Carbide-tipped

H● Ball stylus

2.5

φ3

H

Ball dia: 1 mm
Carbide-tipped● Arm stylus (comprising an arm and stylus)
Arm stylus nameDouble-sided small hole arm stylus*8

Stylus No.
SPHW-21
SPHW-31
SPHW-22
SPHW-32
SPHW-33

Order No.
12AAT469
12AAM108
12AAT470
12AAM109*4
12AAM110

H (mm)
2.4
2.4
5
5
9

● Double-sided small hole arm stylus SPHW-21/31 ● Double-sided small hole arm stylus SPHW-22/32
20

20
φ8

φ8

H

H
275

closeup of tip

φ4.8

Tip shape: Cone
Tip angle: 20°(SPHW-21)30°(SPHW-31)
Tip radius: 25 µm
Carbide-tipped

φ1.6

12.7

27

● Double-sided small hole arm stylus SPHW-33
20
φ8

H

closeup of tip
φ4

39.5

28

● Small hole stylus SPH-41● Cone stylus

φ3

275

Tip shape: Cone
Tip angle: 30º
Tip radius: 25 µm
Carbide-tipped

275

closeup of tip
φ3

φ5

19.5

20

Tip shape: Cone
Tip angle: 20°(SPHW-22)30°(SPHW-32)
Tip radius: 25 µm
Carbide-tippedStyli (For CS-5000CNC/CS-H5000CNC)

Styli

Unit: mm

(1.1)
ø6

1.2

Standard-length eccentric stylus

12AAD653

Stylus length: 12.5 mm
Tip material: Diamond
Tip shape: 40° cone
Tip radius: 5 μm

109
3

74.5
ø6
ø1.2

(31.5)

(6.5)

12.5

ø6
16

(146)

(31.5)

(66)

ø4

ø6

(36)
A

(19)

25

6

40°

Double-length stylus

(36)
(66)

12AAD545*1
12AAJ039*2

Stylus length: 25 mm
Tip material: Diamond
Tip shape: 40° cone
Tip radius: 5 μm

187

1

(31.5)
ø4

ø6

154.5

(19)

25

74.5
10

(31.5)(116)

60°

12AAD652
106.4

0.6

187
154.5

(66)

0.4

40°
A

12AAJ041*2

Stylus length: 25 mm
Tip material: Diamond
Tip shape: 60° cone
Tip radius: 2 μm

ø1.2

Stylus length: 0.6 mm
Tip material: Diamond
Tip shape: 40° cone
Tip radius: 5 μm
ø0.6

Double-length stylus(31.5)

Standard-length stylus for extra-small hole

ø4

ø6
(66)

(36)
A

0.4

(6.8)

12.75

(36)

1.6

ø1.2
(31.5)

ø1.2

ø0.5 mm ball

ø1.2

6

0.4
107

74.5

1

15

40°
A

12AAD544*1*2

1

74.5

ø4

ø4

ø6
(66)

(6.5)

12.5

(36)

Standard-length ball stylus
Stylus length: 12.75 mm
Tip material: Sapphire
Tip ball radius: 0.25 mm

106.6
0.6

0.6

ø1.2

40°

12AAD651

ø4(31.5)

74.5

Stylus length: 0.4 mm
Tip material: Diamond
Tip shape: 40° cone
Tip radius: 5 μm

ø4

107
1

Standard-length stylus for small hole

ø6

12AAD543*1
12AAJ037 *2

Stylus length: 12.5 mm
Tip material: Diamond
Tip shape: 40° cone
Tip radius: 5 μm

(1.1)

Standard-length stylus

Nosepiece(116)

Detector unit

(146)

40°

Double-length ball stylus

12AAD546*1*2

Stylus length: 25.25 mm
Tip material: Sapphire
Tip ball radius: 0.25 mm
1871

ø0.5 mmball

ø1.2(31.5)
ø4(19.3)

25.25

ø6

154.5

(116)

(146)

*1 Standard accessory for CS-5000CNC*2 Standard accessory for CS-H5000CNC

29

Wide choice of functions expands the application range
Examples of optimal combinations of accessories
Y-axis Table(mountablemodel only)○: Essential △: Recommended function —: Not necessary

2D Autolevelling table(Option)3D Autolevelling table(Option)Drive unit tilting
function(mountablemodel only)

—
—

○
—

○
—

○
△

—

—

—

—

—

○

—

—

—

—

—

Oblique measurement of
XY plane*

○

—

—

—

—

—

Outside 3D surface roughness
measurement /evaluation*

○

—

—

—

—

△

Multiple-piece measurement in
the Y-axis direction (Positioning
in the Y-axis direction)

○

—

—

—

—

—

Multiple-piece measurement in
the radial direction (Positioning in
the rotating direction of XY plane)

△

○

—

—

—

—

Inclined surface measurementin the X-axis direction

△

—

—

—

—

○

Inclined hole insidemeasurement in the X-axis
direction

△

—

—

—

—

○

Multiple cylinder generatrices
measurement

△

—

○

—

—

—

Measurement of both top andbottom surfaces

△

—

○

—

—

—

θ1 Tableθ2 Table

Automatic alignment

­
—
○

—
○

Multiple workpiece batchmeasurement△

Measurement in the Y-axis
direction

Function(Option)(Option)Item
Automatic leveling* Applicable only to surface roughness measurement● Precision Vise

● 3-axis Adjustment Table● Centering chuck (ring operated)

For use on a cross-travel stage, etc.

The use of this 3-axis Adjustment Table allows simple
straightness alignment and leveling by merely adjusting
the table according to guidance from
FORMTRACEPAK. This does not need any experienceor intuitive ability.

This chuck is useful when measuring cylindrical workpieces,which are easily clamped by turning the knurled ring.

Fixing method

Double clamping method

Clamping range

51 mm

Jaw width

44 mm

Jaw depth

16 mm

Overall height

37 mm

178-01930

Clamping range
Dimensions
Mass

178-047

Jaws normal OD: ø1 to ø36 mm
Jaws normal ID: ø16 to ø69 mm
Jaws reversed OD: ø25 to ø79 mm
ø118×41 mm
1.2 kg211-032

Inclined surface measurement in the X-axis direction

Automatic alignment

Y direction X direction
Inclined hole inside measurement in the X-axis direction

Oblique measurement of XY plane

Multiple workpiece batch measurement

Multiple cylinder generatrices measurement

Multiple-piece measurement in the radial direction

Measurement of both top and bottom surfaces

31240 2007 (1) e-(DI)HS-(JP2) Printed in Japan

Coordinate Measuring Machines

Vision Measuring Systems

Form Measurement

Optical Measuring

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supports you from start to finish.
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