SONOSYS® Ultrasonic / Megasonic
System with Submersible Transducer
in PVDF for 4" substrates

Function
Completely encapsulated Submersible Transducers made of PVDF to be positioned at the bottom or at
the side wall of an existing tank. Besides the standard systems for 4", 6" and 8" substrates, custom
specific solutions are offered. This flexible configuration allows a convenient retrofit with a Megasonicsystem in an existing process or experimental tank. All over the world, SONOSYS® stands for uniqueand future-secured solutions. The extremely uniform energy transmission ensures a hithertounachieved cleaning performance of particles down to the nano range, while at the same time providing
the best protection to the microstructures.

Unique in the world: our transducer systems, with patented piezoceramics with Butterfly-Technique,achieve a 40% higher sound pressure or an up to 30% higher efficiency than other systems.
Applications
Optic:
Semiconductor &Photovoltaic:
Mikro-/Nano-Technology:
Medical:Cleaning of optical components before coating
Cleaning of wafer and masks, process support of the wet-chemical
production of semiconductor products
Cleaning of parts and microsystems, support of the development
process in the LIGA –Technique
Cleaning of implants

Technical data modular Ultrasonic / Megasonic Generator
Electrical Data
Frequency / Output power:

Output power adjustment:
Mains voltage:

400 kHz / 500 Watt
600 kHz / 500 Watt
1 MHz / 500 Watt
2 MHz / 300 Wattapprox. 10 % - 100 %230 VAC; 50 – 60 Hz

Mechanical Data
Housing:
Dimensions:
Weight:19" enclosure 3/4U28HP; approx. 165 x 185 x 329 mm (WxHxD)
approx. 4,5 kg

Operational conditions
Ambient temperature:+10°C to +40°C
Condensed moisture is to be prevented! Protected from humidity, dirt and aggressive vapours.

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg / Germany
V 1.2
Phone +49-(0) 70 82 / 791 84-0 – Fax + 49-(0) 70 82 / 791 84-99 Internet: www.sonosys.de – E-Mail: info@sonosys.deTechnical data Ultrasonic / Megasonic Submersible Transducer in PVDF
Material:
Transducer array:
Transduced area:

PVDF-housing with PFA coated Transducer plate
special PZT-Piezoceramic (Butterfly-Technique)approx. 110 x 100 mm; completely continuous active area
Coax-cable with N-plug; length 3m;
thereof 1m in PTFE-corrugated tube
2x PTFE-corrugated tube, length 1m, straight outlet
up to +60°C without coolingup to +80°C with Nitrogen cooling:· Nitrogen pressure: maximum 0.1 bar· Nitrogen flow:
minimum 4 l/min.
· Nitrogen temperature range:+20°C to +40°C

HF-cable:
Cooling connection:

Liquid temperature:

Storage- and Transporttemperature:
Weight:not less than -10°C
approx. 2,3 kg to 5,0 kg

Order data Ultrasonic / Megasonic Submersible Transducer in PVDF
Order-No.

Frequency /Output power

13804-013

400 kHz / 500 Watt

13804-021

600 kHz / 500 Watt

Straight cable outlet

13800-212

1 MHz / 500 Wattwithout cooling

13802-101

2 MHz / 300 Watt

13804-018

400 kHz / 500 Watt

13804-023

600 kHz / 500 Watt

Straight cable outlet

13800-226

1 MHz / 500 Wattwith cooling

13802-102

2 MHz / 300 Watt

13804-017

400 kHz / 500 Watt

13804-022

600 kHz / 500 Watt

Angled cable outlet

13800-214

1 MHz / 500 Wattwithout cooling

13802-100

2 MHz / 300 Watt

Cable outlet / cooling

Dimensions

Drawing

160 x 160 x 35 mm

1160 x 160 x 35 mm

available
on request

190 x 160 x 35 mm

3Order data Ultrasonic / Megasonic Generator
Frequency
400 kHz400 kHz600 kHz600 kHz
1 MHz
1 MHz
2 MHz
2 MHz

Output power
500 Watt
500 Watt
500 Watt
500 Watt
500 Watt
500 Watt
300 Watt
300 Watt

Power adjustment
internal
external
internal
external
internal
external
internal
external

Order-No.
13404-006
13404-007
13404-009
13404-xxx
13401-272
13401-281
13405-201
13405-202

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg / Germany
V 1.2
Phone +49-(0) 70 82 / 791 84-0 – Fax + 49-(0) 70 82 / 791 84-99 Internet: www.sonosys.de – E-Mail: info@sonosys.deDrawing 1

Drawing 3

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg / Germany
V 1.2
Phone +49-(0) 70 82 / 791 84-0 – Fax + 49-(0) 70 82 / 791 84-99 Internet: www.sonosys.de – E-Mail: info@sonosys.de