SONOSYS® Ultrasonic / Megasonic
System with Submersible Transducer
in PVDF for 8" substrates

Function
Completely encapsulated Submersible Transducers made of PVDF to be positioned at the bottom or at
the side wall of an existing tank. Besides the standard systems for 4", 6" and 8" substrates, custom
specific solutions are offered. This flexible configuration allows a convenient retrofit with a Megasonicsystem in an existing process or experimental tank. All over the world, SONOSYS® stands for uniqueand future-secured solutions. The extremely uniform energy transmission ensures a hithertounachieved cleaning performance of particles down to the nano range, while at the same time providing
the best protection to the microstructures.
Unique in the world: our transducer systems, with patented piezoceramics with Butterfly-Technique,achieve a 40% higher sound pressure or an up to 30% higher efficiency than other systems.
Applications
Optic:
Semiconductor &Photovoltaic:
Mikro-/Nano-Technology:
Medical:Cleaning of optical components before coating
Cleaning of wafer and masks, process support of the wet-chemical
production of semiconductor products
Cleaning of parts and microsystems, support of the development
process in the LIGA –Technique
Cleaning of implants

Technical data modular Ultrasonic / Megasonic Generator
Electrical data
Frequency / Output power:

Output power adjustment:
Mains voltage:

400 kHz / 2000 Watt
600 kHz / 2000 Watt
1 MHz / 2000 Watt
2 MHz / 1200 Watt
Approx. 10 % - 100 %230 VAC; 50 – 60 Hz

Mechanical data
Housing:
Dimensions:
Weight:19" enclosure 3/4 SU
84 HP; approx. 450x185x395 mm (WxHxD)
Approx. 14 kg

Operational conditions
Ambient temperature:+ 10°C to + 40°C
Condensed moisture is to be prevented! Protected from humidity, dirt and aggressive vapours.

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg / Germany
Phone +49-(0) 70 82 / 791 84-0 – Fax + 49-(0) 70 82 / 791 84-99 Internet: www.sonosys.de – E-Mail: info@sonosys.deTechnical data Ultrasonic / Megasonic Submersible Transducer in PVDF
Material:
Transducer Array:
Transduced area:

PVDF-housing with PFA coated Transducer plate
Special PZT-Piezoceramic (Butterfly-Technique)approx. 205 x 220 mm; completely continuous active area
4 pieces Coax-cable with N-plug; Length: 3 mthereof 1m in PTFE hose with PTFE-corrugated tube
up to max. +60°C

HF-cable:

Liquid temperature:
Storage- and Transport temperature: not less than -10°C
Weight:approx. 10,0 kg

Order data Ultrasonic / Megasonic Submersible Transducer in PVDF
Order-No.

Frequency/Output power

13804-213

400 kHz / 2000 Watt

13804-215

600 kHz / 2000 Watt

13800-233

1 MHz / 2000 Watt

13802-107

2 MHz / 1200 Watt

13804-212

400 kHz / 2000 Watt

13804-214

600 kHz / 2000 Watt

13800-232

1 MHz / 2000 Watt

13802-106

2 MHz / 1200 Watt

Cable outlet

Outer dimensions

Straight cableoutlet260 x 260 x 35 mm

Angled cableoutlet

290 x 260 x 35 mm

Drawing

1Drawing 1

2Drawing 2

Order data Ultrasonic / Megasonic Generator
Frequency
400 kHz400 kHz600 kHz600 kHz
1 MHz
1 MHz
2 MHz
2 MHz

Output power

Power adjustment

Order-No.

2000 Watt
2000 Watt
2000 Watt
2000 Watt
2000 Watt
2000 Watt
1200 Watt
1200 Wattinternal
external
internal
external
internal
external
internal
external

13404-608
13404-609
13404-702
13404-703
13401-702
13401-707
13405-600
13405-601

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg / Germany
Phone +49-(0) 70 82 / 791 84-0 – Fax + 49-(0) 70 82 / 791 84-99 Internet: www.sonosys.de – E-Mail: info@sonosys.deDrawing 1

Drawing 2

Datenblatt:Vers. 1.1
Vers. 1.2Änderung:First Edition Original GER
Unified housing design for all frequencies

Datum:
04.10.2014
11.12.2014

SONOSYS® Ultraschallsysteme GmbH Daimlerstraße 6 – 75305 Neuenbürg / Germany
Phone +49-(0) 70 82 / 791 84-0 – Fax + 49-(0) 70 82 / 791 84-99 Internet: www.sonosys.de – E-Mail: info@sonosys.de