Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 1

Piezo data sheet

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 2

Content

2 piezo data sheet

1. Cofired monolithic ceramic stacks, rings and chips
Low voltage 150 V

4

2. Piezostacks PSt150
with preloaded casings VS

10

3. Piezo ring actuators HPSt150 (tubular)
with preloaded casings VS

16

4. Frontmount piezo cartridges FPSt 150

18

5. Piezo mirror shifters STr for optomechanics

22

6. Accessories

24

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 3

Overview: main operating parameters

Piezoactuators
PSt 150, HPSt 150, PCh 150, HPCh 150
Max. Voltage ranges: -30V thru +150V
Typical operating schemes:
Unipolar range: 0V/+150V
for high power applications
Semi-bipolar range: -30V thru +150V
for quasistatic low power applications withenhanced stroke/blocking force

Strokes A/B
Max. ratings shown in data sheet
A, for max. semi bipolarB, for max. unipolar activation
Example:Max. stroke: PSt 150/7/20 VS12
A/B = 27µm/20µm
Stiffness
Inverse compliance,– measured for open loop voltage control operation– measured with a static preload of at least of– 10% of actuator’s maximum load.
Blocking force/max force generation
Means maximum force generation of an actuator.
Depends on the applied voltage variation.
Stated values refer to maximum semi-bipolar
operation.
Maximum uni-polar operation gives about 30%
lower values

Actuator’s poling

Piezo-actuators are poled components from factory
Usually, the positive pole is indicated e.g. by
red insulation wires , dots , longer wire

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Resonant frequency– Refers to axial mode
– Defined for one side fixed piezo-element– (other modes like planar diameter not taken into)
Capacitances– Measured at low field excitation at room
– temperature– Manufacturing tolerances up to +/- 20%– Capacitance can depend on high field excitation– and temperature

piezo data sheet

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 4

1. Cofired monolithic solid stacks PSt 150/axb/… (osi-type)amax. Voltage range -30V/+150Vb

motionDimensions a, b, L refer to ceramic body only,
coating not included
Length L: tolerance +/-0.1 mm

L3Actuator PSt with thick epoxy-coatingtype
osi-stack(+) Umax 150 V
PSt 150/2x3/5

ceramiccrosssectiona x b /mm
2x3

length L 1) max. stroke 2) capacitance resonancefrequency
mm
µm
nF
kHz
5
6.5/5
100
150

stiffnessblockingforce 3)

N / µm45

N
300

max. load
force
N
300

PSt 150/2x3/7

2x3

9

13/9

170

100

25

300

300

PSt 150/2x3/20

2x3

18

28/20

PSt 150/3.5x3.5/7

3.5 x 3.5

9

13/9

420

50

12

300

300

350

100

50

800

PSt 150/3.5x3.5/20

3.5 x 3.5

18

28/20

800

800

50

25

800

800

PSt 150/5x5/7

5x5

9

13/9

800

100

120

1600

2000

PSt 150/5x5/20

5x5

18

28/20

1800

50

60

1600

2000

PSt 150/7x7/7

7x7

9

13/9

1400

100

240

3500

4000

PSt 150/7x7/20

7x7

18

28/20

3400

50

120

3500

4000

PSt 150/10x10/7

10 x 10

9

13/9

3000

100

500

7000

8000

PSt 150/10x10/20

10 x 10

18

28/20

6500

50

250

7000

8000

PSt 150/14x14/20

14 x 14

18

28/20

14500

47

500

15000

16000

PSt 150/25x25/20

25 x 25

18

28/20

32000

on request

1)

axis of motion

2)-30 V-150V // 0V-150V

3)max. force for (-)30 V-150 V activation (blocking)Combined longer stacks for increased stroke
27 mm, 36 mm, 54 mm ... on request

Monolithic stacks with modified PZT ceramic
formula forhigh temperature operation,
reduced capacitance values
on request
4 piezo data sheet

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 5

Further specs and options

Spherical end pieces
Half balls,
corundum Al2O3aStrain gages
for position detection
and feedback

b

r= a
2

L

4-element strain gage-bridge
configuration on a piezo stack
Typical gage resistance:
1.2 kiloOhms

3

Actor with spherical endpiece

Coatings
Thin type (thickness approx 100 µm),
color grey/white order code g or w
for max. temperature range << -50°C thru 100°C(120°C non-operating)Thick type (thickness approx 0,5mm),
color green or black order code gr or bl
For mechanicall ruggedizing
temperature range > -50°C thru 100°C(120°C non-operating)

thick

thin

thick

Different kinds of stack coatings

Cryogenic operation:
On request:
Special coating
Electrical wiring: Kapton insulated manganin-wires
to minimize thermal heat conduction/thermal load tocryostatwww.piezomechanik.com

Vacuum compatibility: standard for all kinds ofcoating, UHV on request
Special modifications: feel free to ask ourengineers for special solutions.

piezo data sheet

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 6

Cofired monolithic ring stacks HPSt 150/a-b/. . . (osi-type, tubular design)

Voltage range -30V / +150VØaØb

Dimensions a,b, L: ceramic stack only
(no coating included)
L tolerance +/- 0.1 mm

motioncoatings: check page 4L3

Ringactuator HPSt 150/a-b/...

type
osi-stack(+) Umax 150 V
HPSt 150/14-10/12

ceramiccrosssectiona x b /mm
14 - 10HPSt 150/20-15/12

20 - 151)

2)

axis of motion

length L 1) max. stroke 2) capacitance resonancefrequency
mm
µm
nF
kHz
13.5
16/12
2600
75
13.5

-30 V-150V // 0V-150V

16/12
3)

5300

75

stiffnessblockingforce 3)

N / µm250

kN
4,5max. load
force
kN
7

450

8

12

max. force for (-)30 V-150 V activation (blocking)

 15

 22

 9

 14
Polymer coating

L

L
3

3

Ceramic

Ceramic

Ringactuator HPSt 150/14-10/xx
free aperture 9 mm

6 piezo data sheet

Polymer coating

Ringactuator HPSt 150 /20 -15 / xx
free aperture 19 mm

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 7

Combined longer ring stacks HPSt150 for increased stroke

1)

Stroke A/B:

A: for -30V thru +150V
B: for -30V thru +150V



Ringactuators HPSt 150, various types

type
HPSt 150/14-10/25
HPSt 150/14-10/40

diameters
mm

length L
mm

14 - 1014 - 10

27
40.5

1)

max. stroke capacitance
µm
µF
30/25
50/40

5.2
8

resonanceHz

stiffness
N/µm

20
on request

120

resonanceHz

stiffness
N/µm

22
on request

230

Max. load approx. 7 kNewtons
Blocking force: 4500 Newtons, (-)30V/+150V)

type
HPSt 150/20-15/25
HPSt 150/20-15/40

diameters
mm

length L
mm

20 - 15
20 - 15

27
40.5

1)

max. stroke capacitance
µm
µF
32/25
50/40

10
15

Max. load approx. 12 kNewtons
Blocking force: 8 kNewtons, (-)30V/+150V)











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piezo data sheet

7

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 8

Flat piezo-chips and rings PCh150 / HPCh150 (isi technology)

Piezo-chips

ceramic
thickness L 1) max. stroke2) capacitance resonancecrosssection
frequencya x b/mm 2
mm
µm
nF
kHz

actor typesolid-stacks

stiffnessblockingforce3)

N / µmN

max. load
force
N(+) Umax 150 V
PCh 150/3x3/2

3x3

2

>3/>2

30

>500 kHz

190

500

500

PCh 150/5x5/2

5x5

2

>3/>2

110

>500 kHz

500

1500

2000

PCh 150/7x7/2

7x7

2

>3/>2

240

>500 kHz

1000

3000

5000

PCh 150/10x10/2

10x10

2

>3/>2

480

>500 kHz

1900

6000

10000

ring-chips(+) Umax 150 V

diameters
a- bHPCh 150/6-2/2

6-2

2

>3/>2

110

>500 kHz

400

1500

2000

HPCh 150/8-3/2

8-3

2

>3/>2

200

>500 kHz

900

2500

4000

HPCh 150/10-5/3

10-5

3

>4/>3

375

>300 kHz

900

3000

4500

HPCh 150/12-6/2

12-6

2

>3/>2

500

>500 kHz

1400

5000

5000

HPCh 150/15-8/3

15-8

3

>4/>3

790

>300 kHz

1800

7000

10000

1)

direction of expansion
semi-bipolar/unipolar activation
3)
blocking force = max. force generation defined for max. semi-bipolar operation
2)

a
a

b
b

L

L

Dimensions: a, b, L
tolerances: a, b +/- 0.3 mm, L +/- 0.1 mm
Maximum voltage ranges
PCh 150: -30 V/+150 V
Temperature range-273 °C thru approx. +130 °C
Surface insulation
buried electrode, no coating
wiring on request: insulation: teflon, kapton

Piezo-chips PCh, HPCh

8 piezo data sheet

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 9

Further specs and options

Strain gages
for position detection and feedback: ask for details

Cryogenic operation
Special coating

Coatings
Thin type: (approx 100 µm), color grey/white
for max. temperature range << -50°C thru 100°C(120°C non operating)Electrical wiring
Kapton insulated manganin-wires to minimize
thermal heat conduction / thermal load to cryostat

Thick type: (approx 0,5mm), color green or black
mechanically ruggedized version
temperature range > -50°C thru 100°C(120°C non-operating)Special modifications
feel free to ask our engineers for special solutions

Threaded endpiece HAg 14 for
HPSt 150/20-15/xx
free aperture 14 mm

Threaded endpiece HAg 9 for
HPSt 150/14-12/xx
free aperture 9 mm
 15

 25

9

15

8

6

12

10
M22x0.75

M 12x0.5
9
7

14
5

7

5

Optic adaptors 0A1/2” and 0A1”;
see Chapter Accessories

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piezo data sheet

9Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 10

2. Low voltage actuators PSt150 with preloaded casings VS

PSt 150/4 /… VS9
Prestress force = max. tensile force = approx. 40 N
Max. load force: 300 N
Max. force generation: 300 N1)
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/4/7 VS9: approx. 0.05 Nanometer

9
3

30.5

M2, 3 mm depth

L
3
3

3

SW 6 mm
M3, 4 mm depth

type

PSt 150/4/7 VS9PSt 150/4/20 VS9max, stroke2)

length

µm
13/9
27/20

stiffness

mmel.
capacitance
nF

N/µm

resonance
frequency
kHz

19
28

170
340

25
12

40
30

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178 with BNC connector
9Options:
Coaxial cable RG 178 with LEMO connectors 00250 or 0S250
Moving end with spherical end piece VbS
UHV compatibility

3
R

1

1

30.5

Accessories see section 6
1)Max. force generation: for –30 V thru +150 V
Stroke A/B
A: for –30 V thru +150 V
B: for 0 V thru +150 V2)

10 piezo data sheet

VbS

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 11

PSt 150/5/… VS10
Prestress force = max. tensile force = approx. 150 N
Max. load force: 800 N
Max force generation: 800 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/5/7 VS10: 0.05 Nanometer 10
4
M3, 4 mm depth
40.5

L
SENSOR3PIEZO
SW 8 mm
M3, 4 mm depth

type

PSt 150/5/7 1 VS10
PSt 150/5/20 VS10
PSt 150/5/40 VS10
PSt 150/5/60 VS10
PSt 150/5/80 VS10
PSt 150/5/100 VS10max, stroke

lengthstiffness

mmel.
capacitance
nF

N/µm

resonance
frequency
kHz

µm
13/9
27/20
55/40
80/60
105/80130/100

19
28
46
64
82
100

350
800
1600
2400
3200
4000

50
25
12
8
6
5

40
30
20
15
12
10

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178 with
BNC connector
Options:
Coaxial cable RG 178 with LEMO connectors 00250
or 0S250

Moving end with spherical end piece Vbs
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 6
 10

 10

 10

4

4

4
.5

M3
6

4

VAg

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SW 3 mm

R

40.5

VbS

1

1

40.5

pF

piezo data sheet

11

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 12

PSt 150/7/… VS12
Prestress force = max. tensile force = 300 N
Max. load force: 1800 N
Max. force generation: 1800 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/7/7: 0.05 Nanometer 12
5
M3, 4 mm depth
40.5

3
SW 4 mmL
SENSOR3PIEZOSW 10 mmM4, 4 mm depth

typemax, stroke

length

µm
13/9
27/20
55/40
80/60
105/80130/100
160/120190/140
210/160

PSt 150/7/7 VS12
PSt 150/7/20 VS12
PSt 150/7/40 VS12
PSt 150/7/60 VS12
PSt 150/7/80 VS12
PSt 150/7/100 VS12
PSt 150/7/120 VS12
PSt 150/7/140 VS12
PSt 150/7/160 VS12

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kHz

19
28
46
64
82
100
118
136
154

0.8
1.8
3.6
5.4
7.2
9
11
13
15

120
60
25
15
12
10
8
7
6

40
30
20
15
12
10
8
6
5

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178 with
BNC connector
Options:
Coaxial cable RG178 with LEMO connectors
00250 or 0S250

Accessories see section 6

 12
5

Moving end with spherical end piece VbS
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection

 12

 12

5

5

M4



70.5
2

VAg

12 piezo data sheet

SW 4 mm

5
1.

1

40.5

VbS

40.5

pF
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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 13

PSt 150/10/… VS15
Prestress force = max. tensile force = approx. 400 N
Max. load force: 4000 N
Max. force generation: 3500 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/10/7 VS15: 0.05 Nanometer.

 15
6
M4, 4 mm depth
40.5

3.75
SW 5 mmL
SENSOR3
PIEZO
SW 13 mmM4, 4 mm depth

type

PSt 150/10/20 VS15
PSt 150/10/40 VS15
PSt 150/10/60 VS15
PSt 150/10/80 VS15
PSt 150/10/100 VS15
PSt 150/10/120 VS15
PSt 150/10/140 VS15
PSt 150/10/160 VS15
PSt 150/10/180 VS15
PSt 150/10/200 VS15

max, stroke

lengthstiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kHz

µm
27/20
55/40
80/60
105/80130/100
160/120190/140
210/160
240/180
270/200

128
146
164
182
100
118
136
154
172
190

3.6
7.2
11
14
18
21
25
28
33
37

120
60
35
25
20
15
14
13
11
10

30
20
14
12
10
8
7
6
5
4

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178 with
BNC connector
Options:
Coaxial cable RG 178 with LEMO connectors
00250 or 0S250

VAg
www.piezomechanik.com

Accessories see section 6

 15

 15

 15

6

6

6

M4
70.5

Moving end with spherical end piece Vbs
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection

R2

2

SW 5 mm

40.5

Vbs

1

40.5

pF
piezo data sheet

13

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 14

PSt 150/14/… VS20
Prestress force = max. tensile force = approx. 1000 N
Max. load force: 7000 N
Max. force generation: 7000 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/14/20: approx. 0.1 Nanometer 20
8
M5, 5 mm depth
SW 6 mm
3

40.5

L
SENSOR5PIEZOSW 17 mm
M8, 7 mm depth

type

PSt 150/14/20 VS20
PSt 150/14/40 VS20
PSt 150/14/60 VS20
PSt 150/14/80 VS20
PSt 150/14/100 VS20
PSt 150/14/120 VS20
PSt 150/14/140 VS20
PSt 150/14/160 VS20
PSt 150/14/180 VS20
PSt 150/14/200 VS20

max, stroke

length

µm
27/20
55/40
80/60
105/80130/100
160/120190/140
210/160
240/180
270/200

Standard configuration:
Tapped hole in moving end
1 m coaxial cable RG 178 with BNC connector
Options:
Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Coaxial cable RG 316 for power applications

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kHz

35
53
71
89
107
125
143
161
179
197

17
14
22
30
39
47
55
63
71
80

250
120
70
50
40
35
30
25
22
20

30
20
14
12
10
8
7
6
5
4

Moving end with spherical end piece Vbs
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 6

 20

 20

R

3

8

SW 6 mm

 20
8
M5
2

40.5

VbS

14 piezo data sheet

8

3

VAg

8

40.5

pF
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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 15

PSt 150/20/… VS25
Prestress force = max. tensile force = approx. 1500 N
Max. load force: 14000 N
Max. force generation: 11000 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/20/20 VS25: approx. 0.1 Nanometer

 25
 10
M6, 6 mm depth
SW 8 mm

40.5

3

L
SENSOR
5PIEZOSW 22 mm
M8, 7 mm depth

type

PSt 150/20/20 VS25
PSt 150/20/40 VS25
PSt 150/20/60 VS25
PSt 150/20/80 VS25
PSt 150/20/100 VS25
PSt 150/20/120 VS25
PSt 150/20/140 VS25
PSt 150/20/160 VS25
PSt 150/20/180 VS25
PSt 150/20/200 VS25

max, stroke

lengthstiffness

mmel.
capacitance
nF

N/µm

resonance
frequency
kHz

µm
25/20
50/40
75/60
95/80
120/100
150/120
175/140200/160
230/180250/200

37
57
77
97
117
137
157
177
197
217

15
30
45
60
75
90
105
120
135
150

500
250
160
100
180
165
155
150
145
140

28
20
13
11
9
7
6
5
4
3

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178 with
BNC connector
Options:

Thermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 6

Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Coaxial cable RG 316 for power applications
Modified end pieces on request
Stroke A/B

A: for –30 V thru +150 V
B: for –30 V thru +150 V
Max. force generation: for –30 V thru +150 V

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piezo data sheet

15

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 16

3. Low voltage HPSt150 piezo-ring actuators with preloaded casings(tubular design)

HPSt 150/14-10/… VS22
Prestress force = max. tensile force = 400 N
Maximum load: 6000 N
Maximum force generation: 4500 N (-30V/+150V)
Open loop sensitivity for 1 mV amplifier noise for actuator HPSt 150/14-10/12 VS22: approx. 0.1 Nanometer

 15
9
8

SW20

6
M12x0.5
9

M2, 4 mm depth

45.50.5

6

4 5

 15

L

 22

type

HPSt 150/14-10/12 VS22
HPSt 150/14-10/25 VS22
HPSt 150/14-10/40 VS22
HPSt 150/14-10/55 VS22
1)

Stroke A/B:

max, stroke1)

length

µm
16/12
32/25
50/40
70/50

M12x0.5

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kHz

31
44
58
71

2.6
5.2
7.8
11.6

250
120
70
50

30
20
14
9

A: for –30 V thru +150 V
B: for 0 V thru +150 V

Standard configuration:
Coaxial cable RG 178 length 1 m with BNC connector
Options:
Coaxial cable RG 178 length 1 m with LEMO 00250 or 0S250 connector
UHV compatibility
Low temperature application
Thermostable modification
Position sensor
Optics adaptor 0A ½”: see section 6: accessories
Adaptor rings AR: see section 6: accessories

16 piezo data sheet

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 17

3. Low voltage HPSt150 piezo-ring actuators with preloaded casings(tubular design)

HPSt 150/20-15/… VS35
Prestress force = max. tensile force = 700 N
Maximum load: 11000 N
Maximum force generation: 8000 N (-30V/+150V)
Open loop sensitivity for 1 mV amplifier noise for actuator HPSt 150/20-15/12 VS35: approx. 0.1 Nanometer

 25
 15
SW32
 12

 10
 14

M22x0.75

5

80.5

4xM3, 5 mm depth
 28

L
6

4
M22x0.75
 35

type

HPSt 150/20-15/12 VS35
HPSt 150/20-15/25 VS35
HPSt 150/20-15/40 VS35
HPSt 150/20-15/55 VS35

max, stroke1)

length

µm
16/12
32/25
50/40
70/50

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kHz

31
44
58
71

5.5
10
15
20

450
230
150
100

30
20
17
15

Standard configuration:
Coaxial cable RG 178 length 1 m with BNC connector
Options:
Coaxial cable RG 178 length 1m with LEMO 00250 or 0S250 connector
UHV compatibility
Low temperature application
Thermostable modification
Position detector
Optics adaptor 0A 1”: see section 6: accessories
Adaptor rings AR: see section 6: accessories
1)

Stroke A/B:

www.piezomechanik.com

A: for –30 V thru +150 V
B: for 0 V thru +150 V

piezo data sheet

17

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 18

4. Piezocartridges:
Low voltage actuators in casings with front mount threading

Stack actuators in cartridge-version offer elegant design features by simple attachment ofan actuator to the mechanics using a front mounting thread. Using this thread a coarse
adjustment for the system is provided. Piezocartridges can retrofit conventional leadscrews. Mechanical arrangements for adjusting purposes can be very simply upgraded byusing piezocartridges.

Standard configuration:

Options:

Casing: stainless steel
Electrical connection: 1 m coaxial cable RG 178 with
BNC connector

Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Position detection
Thermostable

18 piezo data sheet

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 19

4. Piezocartridges:
Low voltage actuators in casings with front mount threadingtilt range
fix holder
coarse adjust byfine pitch threadpiezo
cartridge
reset springtilt plate

bearing

Schematic of a mirror mount based on piezo cartridges for coarse adjust by mounting screw and ultra
fine adjustment by piezo action.
Piezoactuator types: FPSt M12(BD)www.piezomechanik.com

piezo data sheet

19

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 20

Frontmount piezo-cartridges FPSt 150

FPSt 150/4/… M8x0.5(no internal prestress)
Maximum load: 150 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/4/20: approx. 0.1 Nanometer

type

L
12

M8x0.5
R2

.5
SW10

8

1-1.5

FPSt 150/4/20 M8FPSt 150/4/40 M8FPSt 150/4/60 M8max, stroke

lengthµm

mm

el.
capacitance
nF

27/20
55/40
80/60

22
40
58

340
700
1000

FPSt 150/5/… M10x0.75(no internal prestress)
Maximum load 600 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/5/20: approx. 0.1 Nanometer
type

L

15

R2

FPSt 150/5/20 M10
FPSt 150/5/40 M10
FPSt 150/5/60 M10
FPSt 150/5/80 M10
FPSt 150/5/100 M10

.5
SW15

 9.5

max, stroke

lengthµm

mm

el.
capacitance
nF

27/20
55/40
80/60
105/80130/100

23
41
59
77
95

800
1600
2400
3200
4000

M10x0.75

1-1.5

FPSt 150/5/… M12x0.5(-BD) (former versions MPSt(-BD)(no internal prestress)
For retrofi tting translation stages MRL 80.25 and Newport mirror mounts SL
Maximum load: 600 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/5/20 : approx. 0.1 Nanometer
L

type
SW 12

15
 14

M12x0.5

1.5

6

FPSt
L
26

FPSt-BD

 14

 11

M12x0.5

1.5

FPSt 150/5/20 M12 (BD)FPSt 150/5/30 M12 (BD)FPSt 150/5/40 M12 (BD)FPSt 150/5/60 M12 (BD)FPSt 150/5/80 M12 (BD)SW 12
FPSt 150/5/100 M12 (BD)FPSt 150/5/120 M12 (BD)FPSt 150/5/140 M12 (BD)

8.5

20 piezo data sheet

max, stroke

lengthµm

mm

el.
capacitance
nF

27/20
40/30
55/40
80/60
105/80130/100
160/120190/140

25 (27)34 (34)43 (43)61 (64)79 (82)
97
115
133

800
1200
1600
2400
3200
4000
4800
5600

6

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 21

Frontmount piezo-cartridges FPSt 150

FPSt 150/7/… M14x1
Prestress force = max. tensile force = 200 N
Maximum load: 1500 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/7/20: approx. 0.1 Nanometer
type

L

SW12

 13

20

40.5

M14x1

5
R1.5
SW20

FPSt 150/7/20 M14
FPSt 150/7/40 M14
FPSt 150/7/60 M14
FPSt 150/7/80 M14
FPSt 150/7/100 M14
FPSt 150/7/120 M14
FPSt 150/7/140 M14
FPSt 150/7/>140 M14

max, stroke

length

µm

mm

27/20
60/40
80/60
105/80130/100
160/120190/140
/>140

28
46
64
82
100
118
136
on requestel.
capacitance
µF
1.8
3.6
5.4
7.2
19
11
13

FPSt 150/10/… M18x1(with internal prestress)
Prestress force = max. tensile force = 400 N
Maximum load: 3000 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/10/20: approx. 0.1 Nanometer
type
L

20
40.5

SW16

 17

7
2 R2.5
M18x1 SW22

www.piezomechanik.com

FPSt 150/10/20 M18
FPSt 150/10/40 M18
FPSt 150/10/60 M18
FPSt 150/10/80 M18
FPSt 150/10/100 M18
FPSt 150/10/120 M18
FPSt 150/10/140 M18
FPSt 150/10/>140 M18

max, stroke

length

µm

mm

27/20
55/40
80/60
105/80130/100
160/120190/140
>/140

28
46
64
82
100
118
136
on requestel.
capacitance
µF
3.6
7.2
11
14
18
21
25

piezo data sheet

21

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 22

5. Piezo Mirror-shifter STr-25

ST (mirror support)
mirroradaptorringM3 on  28

1/2” mirror
SA 1/2”
cable exit
optics adaptor 1/2”
on  28

For attaching mirrors to the shifter, mirror supports
or optic adaptors are used.

Piezo mirror-shifters are used for ultrafine axial positioning of mirrors and other optical components without the use of heavy stages or other external guiding
mechanisms.
Piezo mirror-shifters are internally preloaded resulting in high resonance frequencies, outperforming
hereby conventional arrangements like stages etc.
with regard to dynamics and stability.
Piezo mirror-shifters are mainly used in coherent optics like interferometry or holography eg. phase shiftarrangements for measuring surface topographieswith a resolution in the submicron range.

The mirror support ST is a flat screw-on cap where
the mirrors are glued on.
The optic adaptors SA are especially for easy mounting and changing of 1/2 and 1 mirrors.
The mirror-shifters are driven by standard amplifiers
described in the corresponding data sheet. In applications where not the full travel of the shifter isused, it is reasonable to use power supplies withlower output voltage. Usually such electronics show
higher output currents, which results in a wider
frequency range of the shifters operation.

Mounting of piezo mirror-shifters is done by• using an adaptorring for fitting to mirror mounts• using the rear side tapped holes• clamping at the circumference.
Technical data

STr-25/150/6

max. operating
voltageVmax. stroke

capacitanceµm

nF

resonance
frequency
kHz-30 /+150

6

2500

15

Option:inverse polarity
Max. weight of optics, when mounted horizontally:
20 gElectricalconnection: 1 m coaxial cable with BNC-connector
or LEMOSA (see catalog “amplifiers”)
The mirror shifter is delivered incl. 1 mirror
support ST.

22 piezo data sheet

Accessories: mirror support ST25 (for glueing on the
mirror)optic adaptor SA 1/2 for inserting
1/2 optics
adaptorring for mounting the shifters tomirror mounts AR 25/50
other sizes of adaptor rings
on request

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 23

Piezo Mirror-shifter STr-35

ST (mirror support)
adaptorring

mirror

M4 on  27
1” mirror
SA 1”
optics adaptor 1”

Technical data

STr-35/150/6

max. operating
voltageVmax. stroke

capacitanceµm

nF

resonance
frequency
kHz-30 /+150

6

2800

10

The mirror shifter is delivered incl.1 mirror
support ST.
Max. weight of optics, when mounted
horizontally: 40 g
Electrical connection:
1 m coax cable with BNC-connector
or LEMOSA (see catalog “amplifiers”)

www.piezomechanik.com

cable exiton  27

Accessories: mirror support ST 35
optics adaptor SA 1
adaptor ring AR 35/50(other dimensions on request)

piezo data sheet

23

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 24

6. Accessories

6.1 Electricals
Supply coaxial cables: one side connector, otherside free for attaching piezocomponents such asbare stacks etc.
Cable type RG 178 (PTFE), thickness 1.8 mm:
length 1.5 m
Connectors available: BNC, LEMO 0S250,
LEMO 00250
Extension cables:
Cable types RG 178, length 2 m/4 m/6 m
Connecting adaptors for matching different connectingsystems BNC/LEMO 0S250,
BNC/LEMO 00250

6.2 Mechanics
Adaptor rings
The adaptor rings are normally used to match thediameter of actuators with casing to mirror mounts,
defined for a distinct mirror’s diameter. An often

used combination are ring actuators (e.g. with casing VS22), which are adopted to 2” mirror mountsystem. The proper adaptor ring is an AR (51/22).

D0thread3x120°

tdDesignation AR X/Y X external diameter, Y internal diameter (corresponds to actuator’s casing’s diameter),T thickness of ring (all dimensions in mm)
AR
AR
AR
AR
AR
AR
AR
AR

24 piezo data sheet

25/10
25/12
25/18
50/18
50/20
50/22
50/25
50/35

t
t
t
t
t
t
t
t

5
5
5
7
7
7
7
7

AR
AR
AR
AR
AR
AR
AR
AR

31/12
31/22
31/25
51/18
51/20
51/22
51/25
51/35

t
t
t
t
t
t
t
t

7
7
7
7
7
7
7
7

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Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 25

6.3 Optic adaptor for ring actuators
Ring actuators are often used within optical arrangements for precise adjustment of transmissive opticalcomponents e.g. within laser resonators or tunableetalons. The optic adaptors allow the simple mounting and changing of circular optics with the standard diameters 1/2” and 1”.
Optic adaptor OA ½”
This element allows mounting of optics with diameter 1/2” up to a thickness of 8 mm. It can be simply attached using the M12x0.5 thread to all thecorresponding ring actuators with a HAg M12x0.5
end piece (bare rings) such as the
HPSt 150/14-10/…, or the equivalent cased types
with a VS22 casing.
Optic adaptor OA 1”
This element allows mounting of optics with diameter 1” up to a thickness of 8 mm. It can be simply
attached using the M22x0.5 thread to all the corresponding ring actuators with a HAg M22x0.75 end
piece (bare rings) such as the HPSt 150/20-15/…

M14x0.5

M28x0.75
 16

9

 2,5

 2,5
M28x0.75

M14x0.5

 14
3

9

 17

 10

 25.5

 11  12

4
 16

6.4 Screw in front adaptor SE(For stacks with casings VS)
The adaptors have a threaded pin for simple attachment to the standard front pieces VS with tappedhole and provide a plane or spherical front to match

M12x0.5
 16

M22x0.5

OA ½’’

OA 1’’

 30

the actuator for various uses. For example small mirrors can be glued onto the plane faces.
Designation: SE xx plane and SE xx sphere, where
xx represents the casing’s diameter, where it ismounted to (e.g. 12 for VS 12).
R

D

2

2
L

L

M xx

M xx
plane

Type
SE9
SE10
SE12
SE15
SE18/20Mx (mm)D (mm)L (mm)R (mm)

2.3
3
3
4
5

5
6
7
8
10

3
3
4
4
4

2.5
2.5
3.5
3.5
4

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sphereMagnetic front pieces
Based on the above described front adaptors,
MA components with magnetic plane face areoffered for VS10 and VS12 casings (designation
MA10 / MA12). Small ferromagnetic components
can be easily attached to the moving pin of stackactuators.

piezo data sheet

25

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 27

Electronics/amplifiersElectronics for piezoaction
Power supplies
Strain gage position detection
Closed loop positioning

Using the full potential of piezo-actuators regarding
precision and dynamics requires a proper power supply
with regard to voltage range, current (power), noise,well adapted to your application.

Summary
Use of cofired monolithic
piezo-ceramic stacks and chips

A few basics about cofired monolithic piezo-ceramic
actuators and chips regarding handling, properties,
modifications, technology.

Overview

ExtendedPiezoaction in practice

Thermograph of a dynamically operated piezo stack

More details on PZT- actuating structures, operating
parameters, design aspects, “must not”s and theinteraction between PZT-actuators and attachedmechanics as well as the importance of a well-adapted
electronics to get the optimum performance out of yoursystem.

Piezomechanik data sheet_Piezomechanik Datenblätter 10.05.2021 18:31 Seite 28

PIEZOMECHANIK is a globally recognized supplier of first-class piezo systems.
Our actuator specialists are excellent connoisseurs of the current actuator scene.
This allows you to point out certain intricacies of the topic, which you will not find in the usual company scripts.
PIEZOMECHANIK successfully provides advice and development contributions even for unorthodox
piezoaktorian applications, some of which go far beyond the classical approaches.

Piezomechanik · Dr. Lutz Pickelmann GmbHStand: März 2021

We get for you from actuators what is really in it.