ENERGETIC CHEMICALSIN THE SEMICONDUCTOR
INDUSTRY – Ensuring Safeand Efficient Processes

Semiconductor IndustrySafety

Process Safety in the Semiconductor Industry
Understanding and avoiding the risks of explosions and fires in order to improve performance in the semiconductor industry.

On-Site Audits

As in every process and manufacturing

operations cannot be achieved without aindustry, process safety in thethorough understanding of the hazardous

semiconductor sector requires that all

properties of all materials, familiar andOur experienced consultants can audit

credible operational hazards are evaluatedunfamiliar, used in chemical processes andmanufacturing facilities to ensure

and that a suitable basis for safe operations

present in their byproducts.

compliance with applicable national andis determined and implemented.

local codes, and specify safety-related

Semiconductor manufacturing faces aequipment such as emergency relief vents

particular set of challenges as it seeks to

Full-Scale Testing of Materials

to be used on production equipment. We
carefully review the overall arrangements ofmaintain its safety standards and minimize
harm to people and the environment. ThisOur comprehensive services foreach facility and pay special attention tois chiefly because its processes often involve

semiconductor industries help you tomaking certain that protective measures,the use of highly flammable, pyrophoric,

understand and manage the risk of fires,

whether mechanical mechanisms, gas

and water-reactive chemicals in exothermic

explosions, and accidental releases ofdetection or alarms, are appropriate andreactions that demand special attention tomaterials and energy potentially harming

proportionate to the degree of hazard. Our

ensure safe handling. Another area ofpersonnel and equipment. Apart fromextensive experience in working withconcern, whether in semiconductor

ASTM standard tests such as measurement

chemical suppliers serving the

manufacturing or R&D, is that someof the autoignition temperature andsemiconductor industry has enabled us toprocess chemicals produce extremely

temperature limits of flammability, webecome knowledgeable about thedangerous byproducts. While theprovide specialized testing for new andchemistries used in the industry and has

hazardous properties of most commonly

evolving chemicals in order to obtainallowed us to develop many special

used chemicals are well documented, therelevant process safety data and to ensure

capabilities tailored to semiconductor

speed of innovation in the semiconductor

their safe use in a manufacturing

manufacturing. We have gained a depth ofindustry frequently leads to the use of newenvironment. Additionally, we offer support

understanding of chemical reactions thatand evolving chemicals with unknownwith transportation and exothermic

we apply when making recommendations

properties. Complicating the risks are tightchemical reaction testing, guaranteeing safe

regarding safety improvements in both theproduct development timelines and fierce

scale-up and operation of chemical

design and operation of facility systems andcompetition. We understand theseprocesses.

processes. Our priority is incident

constraints, and we know as well that safe

prevention coupled with strong incident
response procedures for emergency
scenarios.
DEKRA Process Safety is an industryleader in expertise relating to the safe
handling, use, transport, and storage ofhazardous and energetic materials in allphases of semiconductor research anddevelopment as well as manufacturing
processes. We understand the complexities
facing the semiconductor industry when it
comes to achieving safety objectives andhave the capacity, know-how and drive tosupport our clients as trusted advisors and2

Semiconductor IndustrySafety

reliable experts. We have consulting officesin the United States, Europe, and Asia as
well as state of the art ISO 17025 and GLP
accredited laboratories and remotely
located large-scale facilities for testing andevaluation. Our services for thesemiconductor industry include:>> Providing the required laboratory andfull-scale testing and evaluation ofmaterial for their “energetic” properties>> Providing safety recommendations

for the safe supply, storage, handling,processing, and post processing ofenergetic materials according toapplicable national and international
codes, regulations, standards, and bestindustry practices>> Providing training to the technical andoperating staff on the safe handling andprocessing of energetic materials

Specialist Testing:Transportation Testing:>> Modified flash point in a dry, H2O-free>> Dangerous when wet test>> Skin corrosivity test>> Solid and liquid oxidizing substances tests>> Adiabatic storage test>> Shock test>> Sustained combustibility test>> Pyrophoric solids and liquids tests>> Self-heating substances test

atmosphere

Our specialist laboratory and full-scale>> Limits of flammability in alternateStandard Physical and Chemical
Properties:

oxidizers such as O2, N2O, Cl2, and F2>> Flash point>> Autoignition temperature>> Temperature limits of flammability>> Limits of flammability(lower and upper flammabilitylimits) in air>> Limits of flammability at elevatedtemperatures and/or pressurestesting services include:>> Limiting oxidant concentration (LOC)at elevated temperatures and/orpressures>> Limiting oxidant concentration withalternate oxidizers such as O2, N2O, Cl2,and F2>> Limiting oxidant concentration (LOC)>> Conductivity>> Vapor pressure>> Boiling point>> Melting point>> Autoignition temperature at elevatedpressure>> Chemical compatibility testing insimulated process gases, including O2,N2O, NF3, Cl2, F2 and NH3>> Customized, large-scale testing

Exothermic Chemical Reaction Testing:>> Differential scanning calorimetry(DSC)>> Reaction calorimetry (RC-1)>> Accelerated rate calorimetry (ARC)>> Vent sizing package (VSP)>> Adiabatic pressure Dewar calorimetry>> Carius tube>> Thermal stability

Would you like to get more information?
Contact Us
www.dekra-process-safety.com

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DEKRA Process Safety
113 Campus Drive,Princeton, NJ 08540
Tel : (+1) 609-799-4449
Fax : (+1) 609-799-5559
process-safety-usa@dekra.com
www.dekra-process-safety.com