Flameproof Construction
Covering Hydrogen Atmosphere

EP-TF-5300 Series EP-TC-1000 Series
H-EP-TF-5300 Series EP-TC-2000V Series

Thermal Mass Flowmeter/Mass Flow Controller

OUTLINE
EP-TF-5300 Series are Thermal Mass Flowmeter for the gases witha flameproof construction. The mass flow rate of various kinds ofgases can be measured, regardless of such process conditions aspressure, temperature etc.
The minimum full scale is 5mL/min (nor), and the maximum fullscale is 500L/min (nor). Maximum Operating Pressure is 4.9MPa
which covers the various applications.
Meantime, H-EP-TF-5300 Series (for the high pressure) can coverthe max. operating pressure up to 14.7MPa.
T he r ma l Ma s s Flow Controlle r (EP-TC -10 0 0 S e r ie s) is theflameproof control valve, and this can be used together with EPTF-5300 Series. The mass flow rate of the various kinds of gasses
can be automatically controlled.
EP-TC-2000V Series is for the high pressure and used together
with H-EP-TF-5300 Series, covering the maximum operatingpressure of 9.8MPa.

FEATURES❑ FLAMEPROOF CONSTRUCTION
Both Mass Flowmeter and Mass Flow Controller cover thehydrogen atmosphere(JIS Class “1” area).
The application has become much wider than before.
❑ HIGH ACCURACY (±1% F.S.)
The gas mass flow rate can be measured in high accuracy
because of our theory and the know-how for many years.
❑ EXTENSIVE FLOW RANGE
These instruments can be used for the applications from thepilot plant to the actual industrial applications.
❑ SUPPORTING INSTRUMENT READY
The indication, integration (TM3000 only) and controlling canbe conducted, assembled with TM-1400/3000 Mini Convertor
unit.

TG-F2302-E01
2nd edition Feb 2024 K1st edition Oct 2022 KEP-TF-5300 Series THERMAL MASS FLOWMETER / MASS FLOW CONTROLLER（H-）EP-TF-5300

Flameproof Mass Flowmeter for High Pressure

STANDARD SPECIFICATIONSEXTERNAL DIMENSION (EP-TF-5300)

Model（H-）EP-TF-5310（H-）EP-TF-5320（H-）EP-TF-5330（H-）EP-TF-5340
Flow Range
5mL/min.（nor）to 20 to
80 to300 to(Full Scale)
20L/min.（nor） 80L/min.（nor）300L/min.（nor）500L/min.（nor）
Flow output
0 to 5 V DC
signalAccuracy±1.0% F.S.（25℃ Standard）
Response Time
Within 3 seconds for 90%
Max. operating
4.9 MPa (H-EP-TF-5300 is up to 14.7 MPa.)pressure
Ambient and5 to 50℃
gas temp.
Temperature
Span ± 0.1%F.S./℃ max.
effectZero point ±0.05%F.S./℃ max.
※
Pressure effect±0.1% F.S. /（0.1MPa）max.（on N 2）
Enclosure
Flameproof construction JIS d3aG4
Cable entry
G1/2（=PF1/2）Female screw+15 V DC 25mA max.
Power source-15 V DC 5mA max.
Gas contact
SUS 316, FKM or CR
materialConnection size
1/4"
1/4",3/8"
3/8",1/2" 3/8",1/2",3/4"(OD)
Type of
Swagelok, VCR, VCO, Rc (=PT), NPT, Flange
connection

ModelDimension

EP-TF-5310
EP-TF-5320
EP-TF-5330
EP-TF-5340

HL※

a177 107
183 116203 182
203 22216192929bc268 60
261 60281 104
281 144

Estimated
Mass
4-M5-106.0kg
4-M5-10
7.0kg
4-M10-15
10.5kg4-M10-15
12.0kgn-φ-d（1）Flow direction can be changed by 90 degrees.

EXTERNAL DIMENSION（H-EP-TF-5300）
Screw Connection

Flange Connection※T he pressure effect varies with the operating pressure and kind of fluidwhen the pressure exceeds 1 MPa.

MODEL CODE
Model

Flow RateEP-TF-53

0-Gas
FluidConnection

A-B-C

H1234（A×10+B）
10c
Unit mL/min（nor）
SROPNF0 40 60 8
1 2For high pressure
5mL/min（nor）to 20L/min（nor）
20L/min（nor）to 80L/min（nor）
80L/min（nor）to 300L/min（nor）
300L/min（nor）to 500L/min（nor）
1L/min（nor）=1000mL/min（nor）
L/min（nor）: Normal
Liters per minute
Swagelok
VCR（EP-TF-5300）
VCO（EP-TF-5300）
Rc（=PT）
NPT
Flange
1/4"
3/8"
1/2"
3/4"

FLOW MEASUREMENT ONLY
(WITH TM3000 Mini convertor unit)
Hazardous Area

SCREW OR SWAGELOK CONNECTION
ModelDimension

HL

H-EP-TF-5310 183 124
H-EP-TF-5320 193 150
H-EP-TF-5330 205 223
H-EP-TF-5340 205 263

a19243030

Estimated
Mass
276 60 4-M5-10
7.0kg
282 60 4-M5-10
8.5kg
313 110 4-M10-15 12.5kg
313 150 4-M10-15 14.0kg
bcn-φ-d(1) In case of Swagelok, the fitting is regarded as the accessory,and it is not screwed in the body.
(2) Cable entry can be changed by 90 degrees against the flow
direction.

FLANGE CONNECTION
List for dimension between surfaces. (mm)In case the cable entry is the right angle against the flow
direction.

Safe Area

Connection size: 15mm (1/2") or 20mm (3/4")
SC-EP3 Exclusive cable(Max. 100m)

ModelStandardJIS
10K 20K
250 270
270 290
340 360
380 400

Scaled pulse output

H-EP-TF-5310
H-EP-TF-5320
H-EP-TF-5330
H-EP-TF-5340

Alarm output

ESTIMATED MASS (kg)

Analog output

ANSI・JPI
150Lb 300Lb 800Lb 1500Lb
250
270
300
320
270
290
320
340
340
360
390
410
380
400
430
450

Connection size: 20mm (3/4")(H-)EP-TF-5300 Detector

AC power

ModelStandardH-EP-TF-5310
H-EP-TF-5320
H-EP-TF-5330
H-EP-TF-5340
2TOKYO KEISO CO., LTD.

JIS
10K 20K
8.5
8.7
10.0 10.2
14.0 14.2
15.5 15.7

ANSI・JPI
150Lb 300Lb 800Lb 1500Lb
8.7
9.2
10.0
12.5
10.2
10.7
11.5
14.0
14.2
14.7
15.5
18.0
15.7
16.2
17.0
19.5
TG-F2302-E01

EP-TF-5300 Series THERMAL MASS FLOWMETER / MASS FLOW CONTROLLER

EP-TC-1000/2000V MASS FLOW CONTROLLER
EP-TC Series Mass Flow Controller is the flameproof control valve and is used together with(H-) EP-TF-5300 Mass Flowmeter.

Standard Specification for EP-TC-1000
Model
Scale Range＊1
Flow Control Range
Response Time
Input Setting Signal
Primary Side Max.
Pressure
Controllable
Differential Pressure
Ambient and Gas
Temperature
EnclosureStandard Specification for EP-TC-2000V

EP-TC-1000
Min. 0 to 5mL/min.（nor）
Max. 0 to 100L/min.（nor）
2 to 100% of full scale
3 sec. for 98% of setting value
0 to 5 V DC

Model
Scale Range＊1
Flow Control Range
Response Time
Input Setting Signal
Primary Side Max.
Pressure

2.9MPa0.07 to 0.3MPa

Controllable
Differential Pressure

5 to 50℃

EnclosureAmbient and GasTemperature

Flameproof, JIS d3aG4+15V DC 25mA max.
Use TM-1400 TypePower Source
Convertor unit.
ｰ15V DC 320mA max.
SUS316, SHOMAC®＊2 ,FKM or CR
Gas Contact Material
Caliber
OD1/4"、3/8"Connection
Standard
Swagelok, VCR, VCO, Rc(=PT), NPT（）＊1：‌Flow rate based on N 2. Min. flow range of H 2 is 250mL/min. (nor).
＊2：Specially high purity Ferrite system Stainless steel (High corrosion
resitant and strong magnetic material)

EXTERNAL DIMENSION（EP-TC-1000）

Power Source
Gas Contact
MaterialConnection

EP-TC-2000V
Min. 0 to 200mL/min.（nor）
Max. 0 to 100L/min.（nor）
2 to 100% of full scale
Within 3 sec. for 98% of setting value
0 to 5 V DC
9.8 MPa
Less than F.S. 20L/min. (nor) 20% to 80% ofPrimary pressure
More than F.S. 20L/min (nor) 20% to 40%
Flameproof, Exd II CT6
5 to 48℃
TM-1400 Type（ UseConvertor）
unit.

+15V DC 25mA max.
ｰ15V DC 320mA max.

SUS316、SHOMAC®＊2 ,FKM or CR
CaliberStandard

OD 3/8"
Swagelok (OD1/4", 3/8"), Rc (=PT)

EXTERNAL DIMENSION（EP-TC-2000V）

FLOW METER/CONTROLLER(WITH TM-1400 Mini convertor unit)
Hazardous area
CVVS 2C, 1.25mm 2OD8.9 to10.5)
By customer

Safe Area
SC-TM
Exclusive cable

STH
SC-T-EPC
Flameproof
Terminal Box Exclusive cable

TM-1000 CONVERTERFLOW SET
1FULL

09090

30 20

1080 70

SETZERO
EXT2DIRECT

50 40

REF
EXT160SCALE ZEROTOKYO KEISO

EP-TC-1000/2000V (H-)EP-TF-5300
Controller
Mass Flowmeter

TG-F2302-E01

Analog output

External setting
signalAC Power

TOKYO KEISO CO., LTD.

3EP-TF-5300 Series THERMAL MASS FLOWMETER / MASS FLOW CONTROLLER

EXAMPLE OF MODEL SELECTION
The flow range is indicated as that of N 2 gas.
When measuring other gases, use the conversion factors (CF) shown below to convert the flow rate of the desired gas to that of N 2 andconfirm that the selected model is appropriate for that measurement.
Formula for single-component gas
Flow rate of the gas specified by customers
Flow rate converted=to that of N 2
CF of the gas
Formula for mixed gas (gas with two or more components)
First, identify each CF of the component gases, calculate the CF of the mixed gas, and then convert its flow rate to that of N 2.
CF of the mixed gas=1X1
X2
X6++…+
CF1
CF2
CF6

X1 ：Composition ratio of Component 1 (vol%/100)
X2 ：Composition ratio of Component 2 (vol%/100)⋮
X6 ：Composition ratio of Component 6 (vol%/100)
CF1 ：CF of Component 1
CF2 ：CF of Component 2⋮
CF6 ：CF of Component 6
Flow rate of the mixed gas specified by customers
Flow rate converted=
to that of N 2
CF of the mixed gas
CF of main gases
MolecularCFformulaNitrogen
N21.000
Air
AIR1.001
Argon
Ar1.2※aCarbon monoxide CO0.998
Carbon dioxide※b CO20.745
HeliumHe1.404
HydrogenH21.007
NeonNe1.403
Ammonia
NH 30.769
Nitric monoxide
NO0.976
FluidMolecular
CFformulaNitrogen dioxide
NO20.740
Nitrogen monoxide N 2O
0.714
OxygenO20.984
MethaneCH40.782
EthyleneC 2H40.623
EthaneC 2H 60.505
Propylene
C3H 60.407
PropaneC3H 80.351
n-butanen-C 4H10 0.266

Fluid※a：Use 1.4, not 1.2, for CF to convert the flow rate of Ar to that of N 2.
※b：Operating pressure is limited to 3 MPa at 30℃ or more for CO2（H-EP-TF-5300Series）.
Example: When the fluid is helium, the flow rate is 25 L/min (nor), pressure is 0.1 MPa, temperature is 20℃, and fitting is 1/4"SWL:Flow rate converted=to that of N 2

25L/min（nor）
1.404（CF）=

17.8 L/min.(nor)Thus, TF-5310-253-S04 should be selected.

4TOKYO KEISO CO., LTD.

TG-F2302-E01

EP-TF-5300 Series THERMAL MASS FLOWMETER / MASS FLOW CONTROLLER

Cautions on use• The mass flowmeter outputs flow rate signals from 0% to 100%. If the value in the lowest digit fluctuates too much at thezero point, set the low-cut at the converter. TM3000 (a dedicated converter) cuts off values of 2% or less as standard.
• When fluid flows in the opposite direction, the mass flowmeter outputs negative signals. To prevent this, install a check valve
in the down stream of the flowmeter.
• The flow rate output characteristic of the mass flowmeter has been set to 5.000 [V] at the full-scale flow rate. If the flow rate
exceeds the upper limit, the output of the flowmeter rises linearly at first but then declines gradually. To prevent this, use theflowmeter within the rated flow rates.
• Stop the flow of gas completely before adjusting the zero point. For details, see the Instruction Manual.
• Never allow gases that corrode SUS316 to flow through the flowmeter because the sensor capillary is made of SUS316TP.
• Install the unit horizontally.
• The primary pressure of mass flow controller should be the same as the operating pressure as specified in the inquiry.
• Install the unit at the place where rainwater does not splash directly.
• Read Instruction Manual carefully.

Cautions on installation• Since the sensor capillary has a small bore of ø0.3, it is easily blocked by dust and other foreign matter. Flush the piping
thoroughly to remove foreign matter and moisture before mounting the flowmeter.
• For ammonia, DME, and other liquescent gases, install a filter in the upstream of the flowmeter.
• To avoid electrical noise, use shielded lines. Do not place them alongside other power lines.
• The arrow on the main body shows the correct direction of the flow for measurement. Install the flowmeter so that themeasuring gas flows in this direction.
• The (H-) EP-TF-5300 series (high-pressure type) must be installed horizontally.
• The flowmeter and its piping may be cooled at the high pressure service. To prevent measuring gases from liquefying,
add insulation material or a tape heater on the piping or the flowmeter.

TG-F2302-E01

TOKYO KEISO CO., LTD.

5

EP-TF-5300 Series THERMAL MASS FLOWMETER / MASS FLOW CONTROLLERPERIPHERAL EQUIPMENT / ACCESSORY Mass Flowmeter / Controller
FLAMEPROOF TERMINAL BOX

TM-1400/3000 Mini convertor unit

When using EP-TC-1000/2000V with Mass Flow Controller, thisis used for connection at the hazardous area.

TM-1400/3000 is a compact converter unit based on DIN 72,
and not only Indication, but the ratio setting can be made withthe mass flow controller.

ModelConstruction
Material
Cable Entry
Paint Color

STH-1S-A
Flameproof, JIS d2G4
AC7A-F
3×G1/2（Cable gland attached）
Mansel 7.5BG6/1.5

TM-1400（For mass flow controller）

TM3000（For mass flowmeter）

Technical Guidance for TM-1400/3000 Mini Converter Unit isseparately available. Contact us if needed.

ORDERING /INQUIRY FORM

EXCLUSIVE CABLE
SC-EP3 （H-）
EP-TF-5300 to TM3000
SC-TM
STH Flameproof Terminal Box to TM1400
SC-T-EPC（H-）
EP-TF-5300 to STH Flameproof
Terminal Box

Max. 100m
Max. 100m
in total

Model （H-）EP-TF-53□□/EP-TC-1000/2000V
Gas
Primary SideMax.
MPa Normal
MPa Min.
Mpa
Pressure
Variation
Range ofto
Mpa
SecondaryPressure
Temperature℃
Full Scale□mL/min.（nor） □L/min.（nor）
Connection
□1/4"
□3/8"
□1/2"
□3/4"
Size
Connection□Swagelok□Rc（=PT）□Others
Standard

Convertor

Exclusivecable□TM32□□For mass（Indication/Integration/Alarm）
flowmeter□TM-14□0-□□
For mass flow（Indication/setting）
controller
SC-TM□m （Ma x. 10 0m in
SC-T-EPC□m total）
SC-EP3□m （Max.100m）* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
6TG-F2302-E01