BEST COST PERFORMANCE ACHIEVED

TC-3000 Series
MINI-THERMAL MASS FLOW CONTROLLEROUTLINE
TC-3000 MINI-THERMAL MASS FLOW CONTROLLER is developed
based on the technology of TF-1000 series MINI-THERMAL MASSFLOWMETER which have been accepted by the market for longtime with high reputation.
Highly accurate measurement and control of various kinds of gases
are conducted free from change of process operation condition, i. e.
pressure, temperature..., etc.
Thanks to simple design construction, remarkable competitive pricelevel has been possible for easy usage in wide application.
TM-1400, DIN 72×72 compact All-in One converter, is available forsimplified installation and wiring.

FEATURESOPERATION PRINCIPLE❏ COSTIn TC-3000, Sensor Rw is heated by feeding electric current I. Temp.

TC-3000 has broken the previous idea for cost of Mass Flowsensor Ra is not heated and detect gas temperature. The feeding

controller.

current I is controlled by electonics to keep the difference of tem-

❏ EASY MEASUREMENT

perature of Rw and Ra constant.

Thermal theory based mass flow measurement eliminates com-The heat which is transferred to gas to be measured from Rw is thepensation data processing for change of process condition.

function of mass flow rate which passes through Rw. Thus, the mass

❏ ALL-THROUGH DESIGN

flow rate of the gas can be calculated by the factor of feeding cur-

Eliminating by-pass sensor piping which is common on ordinary

rent I.

mass flow controllers. TC-3000 is insensitive against dust orThe value of I is converted into flow rate signal and sent to compari-

particles in process gases.

son/ control circuit.

❏ WIDE RANGE COVERAGE
TC-3000 covers maximum 800L/min (nor) flow range.
❏ ANALOG OUTPUT VERSIONIn this circuit, the flow rate signal and control signal are compared
and Control valve is controlled so that the two signals are equal.
Normal close type solenoid valve is adopted for small/ medium size,

24 V DC power supply + 4 to 20 mA DC output version (TC-3100S)

and solenoid valve controlled Diaphragm valve is used for large

is available standard control loop.

sizes.

❏ ALL-IN-ONE CONVERTER
TM-1400 converter offers simple installation and wiring with lowest instrumentation cost.

TG-F2277-E02
3rd edition Feb 2024 K1st edition Jul 2022 K

TC-3000 MINI-THERMAL MASS FLOW CONTROLLER

STANDARD SPECIFICATIONAll kinds of gases, except gases containing more than 10%(VOL) of H2 or He and mixtures of H2 or He and CnHm.

RANGE

TC-3100SSCALE RANGE

Min. 0 to 2L/min(nor) Max. 0 to 100L/min(nor) 0 to 300L/min(nor) 0 to 600L/min(nor) 0 to 800L/min(nor)TC-3100

TC-3300

MAX. GAS PRESS.

0.98MPaGAS TEMP.

5 to 50˚C

CONTROL DP RANGEPROCESS CONN.

TC-3800

2 to 100% of Full Scale

CONTROL RANGERESPONSE TIME

TC-3600

Within 2 sec.
Within 4 sec.
2 to 70L/min(nor)...0.06 to 0.3MPa
0.15 to 0.34MPa 0.18 to 0.44MPa 0.20 to 0.44MPa...
70 to 100L/min(nor) 0.07 to 0.3MPa
Rc1/4, OD1/4 Swagelok

Rc3/4, Rc1

FLOW OUTPUT SIGNAL 4 to 20 mA DC(0 to 100%)

Rc1

0 to 5 V DC(0 to 100%)

FLOW CONTROL INPUT SIGNAL 4 to 20 mA DC(0 to 100%)

0 to 5 V DC(0 to 100%)OUTPUT, CONTROL ACCURACY±2%F.S. (at 25°C)
SPAN : ±0.1%F.S./˚C Max.

TEMP. EFFECTZERO : ±0.01%F.S./˚C Max.

: SUS316, SCS14(TC-3100/3100S): Combination of SUS316, Pt, Glass, CTFE
: SUS430(TC-3100/3100S), *SHOMAC(TC-/3600/3800): FKM or CR+150mA ±+150mA±15 V DC +150mA
POWER SUPPLY 21 to 27 V DC, 330mA ±15 V DC _15 V DC __ 200mA200mA
320mA
GAS CONTACT MATERIAL

ELEC. CONN.

BODY
SENSORCONTROL VALVESEAL

M3 screw terminal

Exclusive connector
85% RH(To be free from condensation)

AMB HUMID.
WEIGHT

0.8kg

6.0kg

CONTROL SETTINGGAS TO BE MEASUREDANALOG OUTPUT INDICATION❏ TM-1400 CONVERTER UNIT

❏ TC-3000 CONTROLLER UNIT

STANDARD SPECIFICATION
INDICATION 31/2 digit Red colour LED(H; 10.2mm)
SCALING FACTOR FACTORY SETACCURACY Sensor accuracy ±0.1% F.S. ±1 dig
STANDARD SPECIFICATION
Max. load 550Ω
4 to 20 mA DC
Output Accuracy : ±0.1% F.S. on to Sensor Accuracy
Resistance load : ≧5KΩ
0 to 5 V DC
Output Accuracy : As per Sensor Accuracy
STANDARD SPECIFICATION
4 to 20 mA DC : Ri 250Ω
EXTERNALSETTING
0 to 5 V DC : Ri 100kΩ
SIGNAL
1 to 5 V DC : Ri 100kΩ
10 rotation POT., 1% resolutionalityMANUAL
Proportional setting of external signal
SETTING
External Control Signal
Soft Start Function (5 sec. setting)
OPTIONPOWER SUPPLY 85 to 240 V AC, 50/60Hz
CONSUMPTION Approx 15VA
Sensor : Exclusive Connector
ELEC. CONN.
Ext. : M3, Screw terminal
Panel mount
MOUNTING
DIN 72 × 72, Installation fitting provided
ENCLOSURE In-door use (IP 20)
AMB. TEMP. 0 to +50˚C
AMB. HUMID. 85%RH (to be free from condensation)
WEIGHT
550g

5.1kg* : Specially high purity Ferrite system Stainless steel(High corrosion resitant and strong magnetic material)❏ CONNECTION CABLE
Connection cables are available as follows.
End of cable model code: length in “meters” to be filled.
(Ex: SC-CM cable 2m → “SC-CM-02”)
Type
SC-CM-□□
SC-TC-□□

Application
TC-3000↔TM-1400

LengthStandard 2m(Max. 100m)

TC-3000↔power supply(prepared by customer)

Standard 2m(Max. 100m)

MODEL CODE
❏ TM-1400 CONVERTER UNIT

❏ TC-3000 CONTROLLER UNIT
TC_3__

Description

100100S
Size

MAX 300L/min (nor)MAX 600L/min (nor)MAX 800L/min (nor)300
600
800020100

2L/min (nor)
10L/min (nor)30L/min (nor)TC-3100/3100S
50L/min (nor)

300
500
700
101
201

Full scale

TM-14

MAX 100L/min (nor)801
RS
Connection size

04
1216

Rc ThreadTC-3100/3100S
TC-3300/3600/3800

Swagelok

TC-3100/3100S

1/4''
3/4''
1''

TC-3100/3100S
TC-3300/3600
TC-3300/3600/3800—

Description

2

4 to 20 mA DC

2

Flow setting

External setting signal

70L/min (nor)100L/min (nor)200L/min (nor)TC-3300
300L/min (nor)
600L/min (nor) TC-3600
800L/min (nor) TC-3800

301
601

Connection type

Analog output

0
10 to 5 V DC—

2External setting / With manual setting change
0Not provided

14 to 20 mA DC

20 to 5 V DC

3

1 to 5 V DC

CAUTION ON USE• Install the unit horizontally with its connector facing upwards.
• The primary pressure should be the same as the operating pressure as specified in the inquiry.
• Install the unit so that the arrow on the unit matches the flow direction of fluid.
2

TOKYO KEISO CO., LTD.

TG-F2277-E02

TC-3000 MINI-THERMAL MASS FLOW CONTROLLERDIMENSION(mm)❏ TC-3000 CONTROLLER UNIT
● TC-3100● TC-3300● TC-3100S● TC-3100S TERMINALTERMINAL OF TC-3100SNo
123456

Description+_ 24 V DC Powersupply+ 4 to 20 mA DC_ Flow signal output+ 4 to 20 mA DC_ Setting signal input❏ TM-1400 CONVERTER UNIT
● TM-1400● FRONT PANEL
No.

● TC-3600/3800

DESCRIPTION
31/2 digit LED
FULL 100% of full scale
Flow setting
SET
Ref. toswitch
ZERO 0% of full scale
to be set "SET"Flow
REF
Acc. to Dial setting (0 to 100% of full scale)setting
EXT(1) Acc. to Dial setting × External signal
signalswitch
EXT(2) Acc. to External signal

NAME
Indicator

10 rotation analog dial(1% resolution)
Clockwise Increase
C-Clockwise Decrease
Upper scale 10% graduation
Lower scale 1% graduation

Flowsettingdial● REAR PANELTERMINALContentsNo123456E
L1L2TG-F2277-E02+‒Analog output
Disabled+‒

External setting
input signal
NC

DC24V power supply

TOKYO KEISO CO., LTD.

3

TC-3000 MINI-THERMAL MASS FLOW CONTROLLERAPPLICATION EXAMPLE❏ GENERAL CONTROL PROCESS

TC-3100 MINI THERMAL MASS FLOW CONTROLLER
TC-3300/3600/3800 MINI THERMAL MASS FLOW CONTROLLER
24 V DC Power supply
4 to 20 mA DC Flow signal output
4 to 20 mA DC Setting signal input

TC-3100S MINI THERMAL MASS FLOW CONTROLLER

TC-3100 MINI THERMAL MASS FLOW CONTROLLER
TC-3300/3600/3800 MINI THERMAL MASS FLOW CONTROLLER❏ PROPORTIONAL MIXING PROCESSThis is an example of mixing of A and B gas in a given proportion. The flow rate of A gas is measured by TF-1000 series Mini-Thermal Mass
flowmeter and its signal is input to TM-1400 as External setting signal. At TM-1400 Converter, freely adjustable setting dial is provided for setgas proportion and TM-1400 sends valve signal to TC-3000 Mini-Thermal Massflow Controller to control the operation of control valve.
* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
4TG-F2277-E02