BEST COST EFFECTIVE & COMPACT DESIGN

TF-600 Series
MINI THERMAL MASS FLOWMETEROUTLINE
TF-600 MINI THERMAL MASS FLOWMETERS are developed in theextreme priority for very competitive price. TF-600 has not been
influenced by the change in temperature and pressure, and candirectly measure mass flow rate of Air and Nitrogen.
TF-600 adopted general-purpose type temperature sensor as theflow rate sensor. And low price is realized by reconsidering design
thoroughly with high performance.
TF-600 MINI THERMAL MASS FLOWMETERS are designed anddeveloped to offer the remote indication and control of gas flow
process where Purgemeters have been commonly used.

FEATURESOPERATION PRINCIPLE❏ Light and compact design

As for TF-600, a resistance thermometer Rw is installed in the flow

❏ Low costpath. The current I is controlled to keep the temperature difference❏ Mass flow measurement(Tw–Ta) between the temperature Tw and gas temperature Ta con-

Influences due to changes in pressure and temperature are negli-stant by heating with electric current.

gible small.

The quantity of heat (Rw-I2) transferred from the resistance ther-❏ High speed response

mometer is a function of mass flow rate of passed gas, thus theHigh speed response - 90 % within two seconds❏ Whole quantity passage detection system

mass flow rate can be measured from the electric current I.
The electric circuit to detect the flow is a unique component tocompensate even the minute change of performance with theNo by-pass tube used.
❏ High durabilitychange of physical properties value. Thus the mass flow rate canNewly adopted general-purpose temperature sensor offers highbe measured with high accuracy. The current I is converted to anelectric signal in proportion to the specified flow rate in order to bedurability.
❏ Standard power supply can be used.

output.

Standard power supply is used and the analogue output of flowrate is obtained easily.
I

STANDARD SPECIFICATION

Output signal
Accuracy
Rangeability
temp.
Gas press.
Temp. change effectPress. change effectResponse
Material
Housing / Protection
Installation
Electric connection
Power supply
Consumption current
Process connection
MassRwTaTw

ow

Scale range

Air, Nitrogen
Min. 0 to 20 L/min (nor)Max. 0 to 100 L/min (nor)0 to 5 V DC±5 % F.S.
1:200 to 60 °C–0.05 MPa to 1 MPa±0.1 % F.S / °C
±1 % F.S. at –0.05 to 1 MPa
2 seconds for 90 %Body and Flow path SCS14, SUS316
Sensor: POM, Ni, Polyimide, Epoxy
Seal: FKM
ABS resin / Un-waterproofing
Horizontal or VerticalConnector±12 V DC+: 85 mA, –: 25 mA
Thread: Rc1/4
Approx. 240 gFl

FluidRa

MODEL CODE
Model code
TF-60——
Power supply 0
Body material
S200300
Scale range
500
800
101Connection rating
PProcess connection
04

Description±12 V DC 0 to 5 V output
SCS14
0 to 20 L/min (nor)0 to 30 L/min (nor)0 to 50 L/min (nor)0 to 80 L/min (nor)0 to 100 L/min (nor)Rc
1/4

TG-F2350-E00
1st edition Feb 2023 K

TF-600 MINI THERMAL MASS FLOWMETERCONNECTOR ARRANGEMENT

70

2250

5321Pin number

Description

1+12 V

2-Rc 1/42COM

1636

2041048

DIMENSION

3–12 V

4OUT+5OUT–2-M3 Depth 5PRESSURE LOSSAPPLICATION

N2, 25°C, Atmospheric pressure (Inner diameter of joint: ø6.5)
Scale range L/min(nor)Pressure loss (kPa) (*)

0 to 20

1.50 to 30

2.20 to 50

4.50 to 80

13.00 to 100

20.0With standard power supply
Exclusive cable
SC-M60
0-5 V DC
Flow rate signal

TF-600±12 V DCPower supply*: Pressure loss at the time of maximum flow in the maximum range
The rough value of the pressure loss is proportional to the square
100 V ACof flow rate and is in inverse proportion to the pressure.

With TM3000 series converter unit

Cable with connector SC-M60
Connection: Standard power supply ±12V DC
Model code

Length (m)Note

SC-M60-22Standard

SC-M60-L

L

Max.10 m

Red (1)
Green (2)
Yellow (3)White (4)Black (5)Red +12V
Green COM
Yellow –12V
White OUT+
Black OUT–

Flow rate
Totalization
High and Low alarm

TF-600Exclusive cable
SC-MM3

Analog output
Pulse output
High and Low
alarm output

100 V AC* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
2TG-F2350-E00