Compact design with indicator and flow
adjustment valve

TF-600D/600V Series
MINI-THERMAL MASS FLOWMETEROUTLINE
The TF-600D/600V series mass flowmeter has evolved from theexisting cost-effective TF-600 mini-mini thermal mass flowmeter;and features an easy-to-read digital indicator and analog or digital(optional) signal output function. Indication can be either checkedat the site or remotely managed. The lineup includes a model witha flow adjustment valve, which is ideal for being mounted on units
for saving space.

FEATURES❑ Thermal mass flow measurement
Not influenced by changes in pressure and temperature❑ Flow adjustment valve
A model with a flow adjustment needle valve is available.
❑ Whole quantity passage detection system
No-bypass simple construction for easy maintenance❑ High durability
A highly durable general-purpose temperature sensor❑ Digital indicator
Easy-to-read indication by the self-illuminated LED❑ Analog output, totalized pulse output, and flow rate alarm output
Ensuring easy remote monitoring, batch operation, and safe
operation❑ User-friendly concept
Parameters can be set by keys on the panel.
❑ Complying with the CE marking

OPERATION PRINCIPLEThe TF-600D/600V series mass flowmeter has a resistancethermometer (Rw) in the flow path and heats it with electricity to acertain temperature (Tw). When gas with a temperature of Ta flows
through this path, current (I) is adjusted to keep the temperature
difference (Tw – Ta) constant.
The quantity of heat (Rw · I 2) transferred from the resistancethermometer to the gas is a function of the mass flow rate of thegas, thus the mass flow rate can be calculated from the value ofcurrent (I).
The electric circuit used to detect the flow rate can compensate
for even minute changes in properties which are caused bychanges in temperature. Thus the mass flow rate can be measured
with high accuracy. Current (I) is converted to an electric signal inproportion to a specific flow rate and output.

IRw

Flow

Tw

Ra
Ta

MODEL CODE
TF-6

Model Code——Description

Max. 100 L/min(nor), connection
size 1/4
Max. 200 L/min(nor), connection
2——
size 3/8
Flowrange
Max. 500 L/min(nor), connection
3——
size 1/2
Max. 1000 L/min(nor), connection
4——
size 3/4
Power supply 1——
24 V DC, 0 to 5 V output
D——With indicator
Construction *1
V——
With indicator and valveindicator
0 ——Mounted050—
0 to5100—
0 to 10200—
0 to 20 TF-601D
TF-601V
500—
0 to 50101—
0 to 100151—
0 to 150
TF-621D
TF-621V
Scale range
201—
0 to 200[L/min(nor)]
301—
0 to 300
TF-631V401—
0 to 400 TF-631D
501—
0 to 500— *1601—
0 to 600
801—
0 to 800 TF-641D— *1102—
0 to1000P —Rc screwConnection rating
S —Swagelok connector *1R —VCR connector *2A AirFluidN N2□ Others *30——*1 The maximum scale range of TF-631V is 400 L/min (nor). TF-641D canbe specified only with an indicator.
*2 The size 1/2 inch or smaller is available for VCR connection. VCRconnection is not available for TF-641D.
*3 Contact TOKYO KEISO Co., Ltd. for gases other than air and N2.

TG-F2095-E01
2nd edition Jan 2024 K
1st edition Apr 2021 K

TF-600D/600V Series MINI-THERMAL MASS FLOWMETERSTANDARD SPECIFICATIONS
TF-601D
TF-601V

TF-621D
TF-621V

TF-631D
TF-631VMin.

Air, Nitrogen *2
0 to5 L/min(nor)0 to 150 L/min(nor)0 to 300 L/min(nor)0 to 600 L/min(nor)Max.

0 to 100 L/min(nor)0 to 200 L/min(nor)0 to 500 L/min(nor)0 to 1000 L/min(nor)Model code
Fluid
Scale range*3, 6Rangeability
Temperature range
Pressure range*1

TF-641D

1：10

0 to 50｡C (without condensation)-0.05 to 0.75 MPa

Temperature inﬂuence±0.2% F.S. /｡C Max (23±10｡C)

Pressure inﬂuence±3% F.S. Max at -0.05 to 0.75 MPa

Response

2 seconds for 90% (variable by key operation or communication)

Wetted part materials

Body and ﬂow path: SCS14, SUS316 Sensor: POM, Ni, Polyimide, Epoxy

Indication

Either ﬂow rate or totalized ﬂow is selectable with panel keys. 4-digit, 7-segment red LED
Flow rate: ±3% F.S. ±1 dig at 23｡C
Totalization: ±3% F.S. ±1 dig at 23｡C

Indication accuracy

Seal: Fluorocarbon rubber
Letter height: 7 mm

Analog output

0 to 5 V DC
Analog output accuracy ±3%F.S. at 23｡C
Totalized pulse output *4 Open collector: 30 V DC/50 mA

Pulse width: 50 msec

Flow alarm output *4Open collector: 30 V DC/50 mA
Setting range: 0 to 100% F.S.

Digital output

RS485 (Dedicated cable provided)

Housing / Protection

ABS resin / IP20, not waterproof (IP20)

Installation

Horizontal or vertical

Electric connection

Connector (Dedicated cable provided)

Power supply

24 V DC ±10%

Consumption current

Approx. 120 mA

Multiplier: ×0.01, 0.1, 1, 10, 100 *5

High, Low, High and Low alarm contact output
Red LED turns ON for alarm.

Data backup

Totalized values are saved in EEPROM at power-oﬀ.

Process connection

Rc1/4
1/4SWL, 1/4VCR

Rc3/8, 3/8SWL
Equivalent to 3/8VCR

Rc1/2, 1/2SWL
Equivalent to 1/2VCR

Rc3/4, 3/4SWL

Mass (Approx.)

TF-601D: 260 g
TF-601V: 420 g

TF-621D: 360 g
TF-621V: 620 g

TF-631D: 670 g
TF-631V: 980 g

TF-641D: 1230 g*1 The scale range of TF-631V is max 400 L/min (nor).
*2 Contact TOKYO KEISO Co., Ltd. for other measuring ﬂuids.
*3 Low cut-oﬀ: 5.0 % F.S. (applicable to ﬂow indication, analog output, totalized ﬂow indication, totalized pulse output)*4 Designate a line for outputting totalized pulse output and ﬂow alarm output.
*5 Totalizing pulse rate: Max. 600 c/min
Totalizing pulse rate (c/min)＝Flow rate÷Totalizing multiplier (L (nor))*6 If the ﬂow rate is over approximately 110% of the ﬂow range,“-O.L.-”is displayed instead of ﬂow rate.

FRONT PANEL● UpIn the measuring mode
For switching ﬂow rate and totalized value
displays (press for at least 2 seconds)
In the setting mode
For changing setting values● High alarm LED
In the measuring and setting
modesLights up when the high alarmoccurs● Low alarm LED
In the measuring and settingmodes
Lights up when the low alarmoccurs● Indicator
In the measuring mode
Displays ﬂow rates or totalized values
In the setting mode
Displays parameter codes and setting values● SET + Down
In the totalizing count mode
For resetting totalized values(press for at least 2 seconds)

2TOKYO KEISO CO., LTD.

● SETIn the measuring mode
For changing to the setting mode (press for atleast 2 seconds)
In the setting mode
・ For changing setting values
・ For returning to the measuring mode aftersaving setting values(press for at least 2 seconds)● DownIn the setting mode
For changing setting values

TG-F2095-E01

TF-600D/600V Series MINI-THERMAL MASS FLOWMETERDIMENSIONS (Unit : mm)
TF-601V

TF-601D
Flow direction

Flow direction

2-M3 Depth 52-M3 Depth 5

TF-621D

TF-621V
Flow direction

Flow direction

2-M4 Depth 82-M4 Depth 8

TF-631V

TF-631DFlow direction

Flow direction

4-M4 Depth 84-M4 Depth 8

TF-641D
Flow direction

4-M4 Depth 8TG-F2095-E01

TOKYO KEISO CO., LTD.

3

TF-600D/600V Series MINI-THERMAL MASS FLOWMETERCONNECTOR ARRANGEMENT
Signal and power supply connector
RS485 connector

612

35

4

321

1. 24 V DC (Power supply (+))

2. GND (Power supply (-), analog output (-))

3. Data +3. Open collector 1

2. Data -4. Open collector 2

1. Shield

5. COM
6. Analog output (+)

CABLE WITH CONNECTOR (ACCESSORY)
RS485 cable
1000±20RedRed ③
Black ②Black thick ①

Data+Black Data-

Black thick shield

Signal and power supply cable
2000±50

Red ①
Green ②
Yellow ③
White ④
Black ⑤
Blue ⑥Red24 V DC
Green GND
Yellow Open collector 1
White Open collector 2Black COM
Blue Analog output
Black thick Shield* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
4TG-F2095-E01