Ideal for ﬂow measurement and control of cleaning and CMP processes

ULTRA-CLEAN ULTRASONICFLOWMETER

UCUF-M Series

RoHSOUTLINEThe UCUF series ultrasonic ﬂowmeter is designed for measuring
small flow rates of ultrapure water and chemical liquids. It iscomprised of the UCUF-M detector and SFC converter. All
wet parts of the detector are made of special-grade PFA molds
for the semiconductor industry and have no moving parts orsealing mechanism such as O-rings which would accumulateliquid components. The simple and smooth construction leaves
no residues and is ideal for processes such as semiconductor
manufacturing which requires ultimate cleanliness.
The SFC converter significantly reduces the effect of bubbles
in liquid, which cause problems in semiconductor and chemicalprocesses. It has an adjustment function to offset the effecton the kinematic viscosity of liquids, making the converter
compatible with various chemicals. The DIN rail mount-typesaves installation space. The RS485 communication function
enables integrated management of the process. For details, see
the Technical Guidance of the converter.

FEATURES❑ EMC compliance: EN61326-1❑ RoHS compatible❑ A standardized pitch of 80 mm for connecting tubes❑ Liquids with kinematic viscosity of as high as 40 mm2/s canbe measured.
❑ Accuracy: Within ±1% of the reading at flow velocity of 1m/s or more
❑ Wide rangeability of 100:1 (At low cut-oﬀ of 1% F.S.)❑ Detector with highly clean construction❑ Corrosion resistant and easy to install

OPERATING PRINCIPLE
The measuring fluid flows into the U-shaped tube, changes
direction by 90 degrees twice, and goes out as shown in Figure 1.
Two piezoelectric transducers A and B are mounted at both endsof the measuring section. They emit and receive ultrasonic waves
alternately and measure the traveling times tA (A to B) and tB (B toA) through the liquid. Without flow, tA is equal to tB. With flow, tA
becomes shorter and tB longer in proportion to the ﬂow rate. Thus,calculating tB - tA gives the ﬂow rate of the liquid. tA and tB dependon the size and shape of the tube and liquid viscosity. The actualflow test data are stored in the linearizer in the converter, whichenables the UCUF-M to measure ﬂow rates with high accuracy.

APPLICATIONS❑ Pure water and ultrapure water in the semiconductor
manufacturing process❑ Chemical feeding❑ Highly corrosive chemicals❑ Chemical mechanical polishing (CMP) slurries❑ Process liquids of small and medium ﬂow rate
❑ Ideal for ﬂow measurement and control of cleaning and CMP
processes

Piezoelectrictransducer AIN

OUT

Piezoelectrictransducer B

Traveling time tA

Traveling time tB

Figure 1 Operating principle

TG-F1080-2E
RevisedApr 2016 K
1st edition Mar 2013 K

UCUF-M Series ULTRA-CLEAN, ULTRASONIC FLOWMETER

STANDARD SPECIFICATIONS
Measuring ﬂuid

: Liquids (those that do not contain air
bubbles and permeate or corrode PFA)
Fluid temperature: 10 to 90°C
Ambient temperature: 0 to 60°C
Fluid pressure: 0 to 0.5 MPa
Fluid sound speed: 1000 to 2200 m/s
Fluid kinematic viscosity : 0.8 to 40 mm2/s
Process connection: PFA tube end (see Table 1)
Enclosure classiﬁcation : IP65
Location: Indoor
Flow range: See Table 1.

Material

Table 1 Flow range and connecting tube sizeCable

Model
UCUF-02MUCUF-04M
UCUF-04HM
UCUF-06M
UCUF-10M
UCUF-15M
UCUF-20M

Flow rate (L/min)Max. range
Min. range
0 to 0.1
0 to 0.01
0 to 2.0
0 to 0.05
0 to 0.05
0 to 3.0
0 to 8.0
0 to 0.4
0 to 20.0
0 to 1.0
0 to 50.0
0 to 3.0
0 to 80.0
0 to 4.0

Accuracy

Connecting
tube size
1/4"
1/4"
3/8"
3/8"
1/2"
3/4"
1"

: See Table 2.

Table 2 Accuracy and ﬂow rate
Flow velocity < 1 m/s
Model
Flow rate
Accuracy
UCUF(L/min)(L/min)-02M-04M-04HM-06M
-10M
-15M
-20M

0 to 0.025
0 to 0.8
0 to 0.8
0 to 1.7
0 to 4.7
0 to10.6
0 to18.8

Flow velocity 1 m/s
Flow rate(L/min)± 0.00025 0.025 to 0.1
0.8 to 2± 0.008
0.8 to 3± 0.008± 0.017
1.7 to 8
4.7 to 20± 0.047± 0.106
10.6 to 50
18.8 to 80± 0.188

Accuracy(L/min)
±1 %
±1 %
±1 %
±1 %
±1 %
±1 %
±1 %

*Quoted accuracy is based on water calibration.
*The accuracy and ﬂow rate range of UCUF-02M do not change
at a ﬂow velocity of 1 m/s.

Pressure loss:
Pressure loss for water (kPa) = C×Q2
Where
C: Pressure loss coeﬃcient (see Table 3)
Q: Flow rate (L/min): See Table 4.

Table 4 Materials of the ﬂow detector
PartsNo.

Body
Tube
Sensor cap

1○
2○
3○
4○
5○
6○

Wettedpart

Cable ﬁtting
Cable sheath
Fixing band

Model code
Mass
Connector

02M
PFA
PFA

Material
04M,06M 10M,15M,20M
PFA
PFA
PFA
PFA

PP
PP
PP
Nitrile
PVDF
PP
PVC
PVC
PVC
PP
PP
See Dimensions for part numbers.

: 2 coaxial cables (5 m) attached(Up to 30 m with extension cables): See Table 5.
: See Table 6.
: SMB, BNC

MODEL CODE
Table 5 Model codes of the ﬂow detector
Model code
Description
UCUF- □□ M □ -□ □ □2.5 mm02
4 mm (connection 1/4")
04
4 mm (connection 3/8")
04H
Size
6 mm
06
10 mm
1015 mm
1520 mm
20BNC connector
BConnector type*1
SMB connectorDU-shape (standard)-U
Shape
Z-shape-Z
5 mm (standard)
5Cable lengthBlank Not provided
Special/Z Provided*2*1 Type of cable connector depends on the type of converter.
See Table 7.
*2 For special speciﬁcations, add /Z at the end of the code anddescribe the content separately.
Contact Tokyo Keiso in advance about the possibility of manufacture.

Table 3 Pressure loss factor
CModel
16.8
UCUF-02M
4.5
UCUF-04M
3.04
UCUF-04HM
0.9
UCUF-06M
0.142
UCUF-10M
0.0148
UCUF-15M
0.00332
UCUF-20M

2

TOKYO KEISO CO., LTD.

TG-F1080-2E

UCUF-M Series ULTRA-CLEAN, ULTRASONIC FLOWMETERDIMENSIONS
Flow detector
UCUF-02M□-UUCUF-04（H）M□-U
UCUF-06M□-UUCUF-10M□-U
UCUF-15M□-U
UCUF-20M□-U
L

E

C

IN

OUT

ØDØd

L
CIN

ØD
Ød

22A

5E
OUT

411(17.5)

B

A

453G

36Fitting hole
(Revolving-adjustable)

P

K

2-4-G

UCUF-02M□-Z
UCUF-04（H）
M□-Z
UCUF-06M□-ZP

UCUF-10M□-Z
UCUF-15M□-Z
UCUF-20M□-Z
L
C

E

L
C

E

OUT

A

OUT

214B

2-G

(17.5)

3(180)

53261P

4IN

ØdØD

Fitting hole
5K

(Revolving-adjustable)INØd4-GØD

P

Table 6 Dimensions and mass
Model
UCUF

Connecting
tubesize-02M-04M

Dimension (mm)

Mass (g)

LA

B

EGK

P

Flow
detector

Cable(5 m)

Total

4.35 80±1

134±1100-20

φ4.2-

96±1100150

250

4.35 80±1

134±1100150

250

9.53

6.33 80±1

136±1

3/8"

9.53

6.33 80±1

136±1

100-

20

φ4.2-

98.5±1

100

150

250-10M

1/2"

12.70

9.50 80±1

136±1120

3132M4、
312580±1

100150250-15M

3/4"

19.00 15.80 80±1142±1130

3138M5、313080±1130150

280-20M

1"

25.40 22.20 80±1148±1140

3442M4、343580±1170

150

320Dd1/4"

6.35

1/4"

6.35

-04HM

3/8"

-06M

C100-20φ4.2-96±1
98.5±1*For -10M, -15M, and -20M models, the screw depth is added to size G.
TG-F1080-2E

TOKYO KEISO CO., LTD.

3UCUF-M Series ULTRA-CLEAN, ULTRASONIC FLOWMETERAPPLICABLE CONVERTERS
Table 7 Applicable converters
Model

Measurement method

SFC-900
SFC017
SFC2000
SFC2100
SFC-010L

Digital subtracting correlation
Digital zero crossAnalog trigger
Analog trigger
Digital zero cross

04M
○○○

06M
○○○Converter
10M○○

15M
○○○
○
For the UCUF-02M only

20M○○○Connector type
BNC
BNC
SMB
SMB
SMB

CAUTIONS ON INSTALLATION❑ To ensure precise, stable measurement, do not bend the connecting tube during installation.
❑ To ensure precise, stable measurement, stabilize the liquid temperature (within ±5°C).
❑ Keep the instrument pressurized even when it is not in use to avoid the formation of bubbles.
❑ Keep the measuring tube ﬁlled with liquids. Although the instrument can be installed with horizontal, vertical, or slant tubing, it isrecommended to select a position for easy self-draining.
❑ Install a control valve downstream of the instrument, if necessary.
❑ Install the ﬂow detector and converter away from noise sources such as power relays and solenoid valves.
❑ Lay the signal cable away from power cables of high voltage or current.
❑ For details on how to connect ﬁttings, see the relevant documents of each manufacturer.

* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : http://www.tokyokeiso.co.jp
4TG-F1080-2E