MODEL 1080

PicoMill ® TEM specimen
preparation system
Combines an ultra-low energy, inert gas
ion source, and a scanning electron column
with multiple detectors to yield optimal TEMspecimens.

POST-FIB PROCESSING PRODUCES
THE HIGHEST QUALITY TEM
SPECIMENS
Focused ion beam (FIB) milling is a
widely used technique for today’s
cutting-edge materials that provides
a means to prepare transmission
electron microscopy (TEM) specimens.
The challenge in working withthese advanced materials is tocreate specimens that are electrontransparent and are free from artifacts.
The FIB is highly effective in
preparing TEM specimens, but theuse of a high-energy, liquid metal ion
source can often result in specimen
amorphization, gallium implantation,or both.
The PicoMill system is the ideal
complement to FIB technology; itadds the increased capability of
producing optimal specimen quality
while enhancing the overall specimen
preparation throughput by moving
final thinning offline.

• Achieve ultimate specimen quality –free from amorphous and implantedlayers• Complements FIB technology• Milling without introduction ofartifacts• Advanced detector technology for
imaging and precise endpoint detection• In situ imaging with ions and electrons• Microscope connectivity for risk-free
specimen handling• Adds capability and capacity• Fast, reliable, and easy to use

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A history of specimen preparation
innovation
Since 2006, Fischione Instruments’ revolutionary
NanoMill® TEM specimen preparation system
has set the standard for high-quality TEM
specimen preparation.
The NanoMill system’s unique combination offeatures – ultra-low energy ion source, low-angle
milling capabilities, and submicron ion beam
diameter – have been critical for uncovering
specific features of interest within TEM specimens.
The NanoMill system has produced specimens
with optimal quality for a number of research andindustrial applications, including oxides, fuel cells,photovoltaics, battery materials, and many others.
For microelectronic and semiconductor
applications, the NanoMill system’s capabilities
have played a critical role in producing pristine
TEM specimens.
Since the introduction of the NanoMill system,
the microelectronics industry has continued todevelop products that are increasingly smaller insize and increasingly complex in geometry, suchas three-dimensional FinFET gate architecturesand vertical NAND gates.
These intricate devices are comprised of varying
densities of dissimilar materials with structuresthat can contain compounds, such as repeating
layers of oxides, silicides, nitrides, various
metals, and a mix of high-k and low-k dielectricmaterials.
These structures contain materials with very
different atomic numbers, which can result indiffering sputter rates. Preparing these uniquespecimens for high-resolution imaging by TEM
has been consistently achieved with the NanoMill
system’s advanced technology.
Decreased device sizes coupled with increasedmaterials complexity demand the next generationof TEM specimen preparation. Drawing on ourhistory of innovation, Fischione Instruments
developed the PicoMill TEM specimen
preparation system, taking the NanoMill systemtechnology to the highest possible level.

Fischione Instruments Model 1080 PicoMill TEM specimen preparation system.
®

E.A. FISCHIONE INSTRUMENTS, INC.

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Designed specifically to integrate intoa FIB workflow
Focused ion beam (FIB) technology is frequently
the choice for creating TEM specimens. The
FIB is used to create a site-specific, extremely
thin lamella that is extracted and mounted to asupporting grid for TEM imaging and analysis.
The FIB is highly effective in preparing TEM
specimens; however, the FIB’s liquid metal(gallium) ion source can result in amorphization,gallium implantation, or both. These damagedlayers can be as thick as 10 to 30 nm.
The FIB process is often started at high kilovolt
energy levels and the voltage is decreased as
the lamella thins. For very low-energy FIB
applications, the operator may need to refocus theinstrument and realign the beam. This can slow
down the overall processing time per specimen.
In addition, even low-voltage milling with theFIB may result in gallium implantation.
The PicoMill system is ideally suited to removing
these damaged layers. It offers the key featuresof the NanoMill system – ultra-low energy, inert
gas ion source, low-angle milling capabilities, andsubmicron ion beam diameter – with the added
capability of a scanning electron column andmultiple detectors. The scanning electron column
provides the ability to image a lamella at a scalethat is sufficient to view areas of interest.

Let the FIB do what the FIB does best;
let the PicoMill system do the rest
To maximize FIB capacity, specimens can be
moved offline for final thinning on the PicoMillsystem. The PicoMill system provides the ability
to precisely and predictably thin a specimen,
which reduces the potential for rework andoptimizes specimen processing time. Thisincreases your capability by producing specimensof superior quality and enhances the overallspecimen preparation throughput.
The PicoMill system will allow you to achieve
first time right specimen preparation every time.
E.A. FISCHIONE INSTRUMENTS, INC.

THE IDEAL COMPLEMENT TO FIB TECHNOLOGY
By moving final specimen thinning offline, you increase thecapability of producing optimal specimen quality whileenhancing overall specimen preparation throughput.

FIBLamella is prepared by FIB and mounted to asupporting grid.

PicoMill system
The grid with lamella is mounted on the PicoMill
specimen holder. The specimen holder is theninserted into the PicoMill system goniometer for
final thinning by ion milling.

TEM
PicoMill holder with specimen is plasma cleaned
and then inserted into the TEM for imaging andanalysis.

ResultImproved specimen quality and enhanced throughput.

From FIB to PicoMill system to TEM
A FIB-prepared lamella is mounted on a supporting
grid and is loaded onto the PicoMill specimen
holder, a TEM-style holder that can be used inboth the PicoMill system and the TEM. The designof the holder allows for positive and negative tilt ion
milling of the specimen in the PicoMill system andfacilitates imaging of the specimen in the TEM.
Following pre-pump of the PicoMill system’s
standard side-entry goniometer, the specimen holder
is inserted into the chamber and the specimen is
positioned accordingly for ion milling operations
and scanning electron microscope (SEM) imaging.
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Site-specific, ultra-low-energy milling

The PicoMill system’s ion source features
a filament-based ionization chamber andelectrostatic lenses. The ion source was specificallydeveloped to produce ultra-low ion energies witha submicron ion beam diameter. It uses inert gas(argon) and has an operating voltage range of
50 eV to 2 kV.
The ion source’s feedback control algorithm
automatically produces stable and repeatable ion
beam conditions over a wide variety of millingparameters. Redeposition of sputtered material onto
the area of interest is avoided because the ion beam
can be focused to a specific area. You can scan aregion of the specimen’s surface or target a specificarea for selective milling. The ions only contact
the area of interest on the specimen where they areneeded to do the work. The ion beam is kept awayfrom the grid, which prevents redeposition.
Precise milling angle adjustment

The ion beam impingement angle isprogrammable from -15 to +90°. The ion source
is fixed in position and the goniometer tilts thespecimen holder to achieve the programmed
milling angle through the PicoMill system userinterface. The specimen is positioned along the X,

Y, and Z axes to precisely orient the FIB lamellawith respect to the ion and electron beams.
Milling specimens at a low angle of incidence(less than 10°) minimizes damage and specimen
heating. Because low-angle milling, combinedwith ion beam rasterizing, facilitates uniform
thinning of dissimilar materials, it is highly
beneficial when preparing layered structures orcomposite materials.
In situ imaging

To complement the scanning electron column,
the PicoMill system has multiple detectors:• A backscatter electron detector (BSE) for insitu imaging with electrons• A secondary electron detector (SED) for insitu imaging with ions and electrons• A scanning/transmission electron detector(STEM) for electron transparency andendpoint detection
The detector combination allows you to performin situ imaging of the specimen before, during,
and after ion milling. The grid containing a
FIB lamella or a specific site on a conventionallyprepared specimen can be imaged.

FIB LAMELLA IN
PICOMILL SYSTEMThe PicoMill systemallows the operator
to choose a specificarea of interest for
selective milling via
a submicron-sizedion beam. The redraster box indicatesthe selected millingarea. The ion beam
can be targetedaway from thegrid, which reduces
the likelihood ofredeposition.

E.A. FISCHIONE INSTRUMENTS, INC.

5

M O D E L 1080 Pic o M il l ® T E M s p e cim e n p re p a ra t io n s ys t e m

You can view specimens in situ on a dedicatedmonitor that displays both electron- and ioninduced secondary electron images. Image
capture is as simple as a click of a mouse.
Computer control

The PicoMill system is controlled via an intuitive
user interface. You enter all milling parameters
through the interface, such as milling angle,specimen position, and processing time. SEM
control and detector selection are also usercontrolled.
End-point detection/process termination

A specimen prepared with optimal electrontransparency is the ultimate goal for the best
quality TEM imaging and analysis. Thisis particularly key when employing today’s
aberration corrected TEM technology.
As the specimen thins, electron transmission
increases and the leading edge recedes, whichallows the STEM detector to provide end point
information. The PicoMill system is also capableof time-based termination or it can be stopped
manually.
Plasma cleaning

For the PicoMilling process, Fischione highly
recommends that you plasma clean the specimen
and specimen holder prior to insertion into theTEM. During fine-probe microanalysis, organic
contamination may build up on the specimen.
A cleaning time of 10 seconds to 2 minutes in
the Fischione Model 1020 Plasma Cleaner orModel 1070 NanoClean removes the contamination
without altering the specimen’s structure orcomposition. Longer cleaning times can remove
contamination caused by previous TEM viewing ofspecimens that were not plasma cleaned.
SM

Microscope connectivity reduces specimen handling

The ability to use the same holder in the PicoMill
system and the TEM means that you can quickly
and safely transport the milled specimen fromthe PicoMill system to the TEM, which isparticularly advantageous when you are working
with one-of-a-kind specimens.
E.A. FISCHIONE INSTRUMENTS, INC.

TEM-STYLE HOLDER
The PicoMill specimen holder was designed
specifically for the PicoMill system. The designof the holder tip (top) allows positive andnegative tilt ion milling of the specimen. The
PicoMill specimen holder is inserted into thePicoMill system’s side-entry goniometer (middle).
The specimen holder can then go directly fromthe PicoMill system into the TEM for imaging
and analysis (bottom).

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3D STRUCTURES REVEALEDFinFET specimens preparedwith the PicoMill system
reveal three-dimensional
structures for TEM imaging andanalysis. A 22 nm Ivy Bridge
microstructure imaged in a
300 kV scanning transmission
electron microscope (STEM)
with Cs correction is shown.

Additional features

Customer service that you can rely on

Automatic gas control

The PicoMill system’s fully integrated vacuum
system includes a turbomolecular drag pumpbacked by a multistage diaphragm pump. Thisoil-free system assures a clean environment forspecimen processing.

Fischione Service is always there for you
and is dedicated to delivering exceptionalcustomer service. Fischione Service provides
onsite installation and operations training,
onsite preventive maintenance and repair, andreplacement parts and supplies. Be sure to protect
your investment and your budget with a service
contract to reduce the risk of unexpected repair
costs and instrument downtime. Fischione
Instruments offers service contract options for thelevel of coverage and peace of mind that you need.

The vacuum chamber is under constant vacuum,
which means that ion milling can begin almost
immediately after specimen insertion into thegoniometer.

Visit www.fischione.com to view the PicoMill
system service contract options. For questionsregarding service of your Fischione products,
contact service@fischione.com.

Gas is regulated automatically using precisionmass flow technology. The low-flow ion source
results in minimal gas consumption.
Contamination-free, dry vacuum system

E.A. Fischione Instruments, Inc.
9003 Corporate Circle
Export, PA 15632 USA
Tel: +1 724.325.5444
Fax: +1 724.325.5443
info@fischione.com
www.fischione.com

The PicoMill and NanoMill TEM specimen preparation systems are the subjectof United States Patent Nos. 7,132,673 and 7,504,623. Other patents pending.
NanoMill and PicoMill are registered trademarks of E.A. Fischione Instruments, Inc.
PicoMilling is a service mark of E.A. Fischione Instruments, Inc.
©2015 E.A. Fischione Instruments, Inc. All rights reserved.
Document Number PB1080 Revision 02 12/2015