Mitsubishi Heavy Industries Technical Review Vol. 52 No. 3 (September 2015)
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Environment-proof High-accuracy MP Scale

M a c h i n e To o l D i v i s i o n
M a c h i n e r y, E q u i p m e n t & I n f r a s t r u c t u r e

In 1970, Mitsubishi Heavy Industries, Ltd. (MHI) started to manufacture and market scales
under a technical alliance with Inductosyn Corp., a scale manufacturer in the U.S. This alliance wasformed for the establishment of position detection technology as the core of enhancing machine
tool positioning accuracy. After the product name was changed to MP (Mitsubishi Precision) Scalein 1990, MHI continued with its original technology-incorporated and market needs-addressed
product development. At present MP Scale is used in machine tools and presses not only in house,but also by our customers as a harsh environment-resistant, high-speed/high-accuracy scale.
This paper introduces the Linear MP Scale, which detects the linear position, and its
downsized and performance-improved controller (A/D converter) for the MP Scale, as well as theRotary MP Scale with a built-in A/D converter for angle detection.

|1. Features of MP Scale(1)

High accuracy
The basic function of a machine tool depends upon how fast a tool and a workpiece canbe moved and how precisely the position can be determined.
The desired position to be detected using a machine tool is where the tool contacts theworkpiece to be machined or the so-called machining position. For high-accuracy positioning
by a machine tool, a high-accuracy scale that can be mounted near the machining position
becomes necessary.
The Linear MP Scale for linear position detection is accurate up to 5 μmp-p/m in spec.
(for the MPLC series), and in addition, its thickness of 19 mm (Figure 1) makes it thin enoughto be mounted near the machining position. Figure 2 shows an example of the Linear MP Scale
mounted on a horizontal machining center. The machine’s accuracy can be improved by
mounting the scale near the machining position so as to limit the effect of the machine’syawing.

Figure 1

Linear MP Scale

The Linear MP Scale is composed of a fixed part scale and a moving part slider, which are not incontact and are spaced-mounted. It is unbreakable as the base material is iron.

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Figure 2

Example of a linear MP scale mounted on a horizontal machining center

Mounting of MP Scale near the machining position reduced the influence of machinery yawing (curving),
thereby improving machining accuracy.

The Rotary MP Scale is also thin at 19 mm and has an accuracy of 2 seconds p-p in spec.
(for the MPRZ-1236B). Furthermore, unlike general rotary scales, since a detection pattern has
been prepared for the entire 360° circumference, even if eccentricity occurs such as due to aload or mechanical backlash and play, the resulting error is cancelled out (Figure 3).

Figure 3(2)Rotary MP Scale

High-speed detection
Because of the movable side's high-speed sliding, a scale should desirably have no parts
that wear such as bearings. The MP Scale is a non-contact open type with its fixed partseparated from its moving part so it has no parts that wear. Depending upon the type of A/Dconverter, the Rotary MP Scale can detect thickness down to as low as 10,000 min-1, andtherefore is used not only on a rotational axis of a rotary table, etc., but also around the main
shaft of a lathe that rotates at a high speed (Figure 4).

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Figure 4(3)Case of mounting for the main shaft of a lathe

Resistance to environment
Customers need a scale that satisfies not only high speed, high resolution, and highaccuracy, but also long-term stability to maintain high-rate operation.
MP Scale is an electromagnetically induced open-type detector with no parts that wear or
deteriorate as a factor for accuracy degradation. Moreover, its iron base, unlike a glass one, isunbreakable.
Since machine tools are found in environments in which coolant, chips, shavings, etc.,
easily scatter on the scale, it is important for the scale to be environment-proof.
In the case of an optical scale, the scale is generally an encased package type to beprotected from coolant, etc., within which bearings, seals, and other parts that wear exist.
Furthermore, air purging* and other measures are undertaken in order to limit the amount offoreign matter entering the scale, but if purged air or other mist causes clouding and/orcondensation on the scale surface or detection head, sometimes the position cannot be detected.
* To send compressed air into the scale from outside, using a hose, to eliminate foreign matter by
the pressure.

The MP Scale is theoretically unaffected by water, oil and condensation since it iselectromagnetically induced. Based on over 40 years of successful utilization on machine tools,
improvement efforts have been accumulated for environmental resistance, realizing theredundancy of air purging despite being an open-type scale. Figure 5 shows an example ofexperiments where the Rotary MP Scale operated normally even when submerged, andFigure 6 represents an actual case of the Linear MP Scale operating normally and stably for 7years, even under oil-smeared conditions.

Figure 5 Example of submerged
Rotary MP Scale experiments

Figure 6 Example of linear MP scale used with actual
equipment
After 7 years of operation, the position is detected normally even
if the scale is smeared with oil.

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In addition, since a detection pattern has, unlike in general scales, been prepared over awide range, the influence of scale division errors is mitigated due to the averaging effect, even
if a small amount of foreign matter is on the divisions (Figure 7).
Here, some examples of extreme cases are introduced and the test results of the scalesurface covered by pieces of iron or copper or water droplets are shown (Figure 8). Pieces ofiron and copper block the light completely and also affect the action of electromagneticinduction as the principle on which an MP scale operates, but the position was detected with
only slightly deteriorated accuracy. At the same time, on the water droplet-covered surface,
there was no change in accuracy.

Figure 7

Influence of general scale and MP Scale divisional errors

Figure 8

Influence of foreign matter adhered to scale surface

Position is detected almost normally, even on a scale surface with adhered pieces of iron or copper orwater droplets.

Mitsubishi Heavy Industries Technical Review 52 No. 3 (September 2015)72|2. Linear MP Scale line-upThe Linear MP Scale is available in 3 series (Figure 9), meeting a variety of applications.
MPLN
The most compact 30 mm-wide type for small aircraft.
(2) MPLC
Wider with a width of 58 mm but more accurate than the MPLN and used for generalaircraft products.
(3) MPS-C
For large aircraft with the same size (of 58 mm in width) and accuracy as those ofMPLC. With a length of 1 meter or less per scale, several scales can be put together to extend
the stroke. The long scales of other companies are commonly of a one-piece type, requiringstroke-specific order/inventory management, but the MPS-C series can connect short-stroke
products for greater convenience in terms of management.
(1)

Figure 9

Linear MP Scale lineup|3. A/D converter with better performance
The A/D converter is an external controller to be connected to the MP Scale that calculates
the position from electromagnetic induction signals of the scale to output positional information toan NC device. It is generally mounted on the control panel. Recently, this A/D converter wasdownsized and had its performance improved, and thus a new A/D converter (K type) wasdeveloped. Table 1 shows a comparison with the existing product (J type).
Table 1New-old comparison of A/D converter

Size

Existing J type160 x 160 x 40 mm

Power supplyResolution
Gain adjustment

AC100V x 0.4 A
0.05 μm
Necessary

Interpolation
accuracy
adjustment
DIN rail fitting

New K type85 x 57 x 40 mm

DC5V x 0.35 A
0.01 μm
Unnecessary
The machine is made to
The interpolation accuracy move at a constant speed soadjustment volume is used to that interpolation errors cancorrect errors of the converter be automatically obtained
while monitoring the accuracy. for value-basedcompensation.
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Downsizing
Downsized to 1/5 the volume of the existing device.
(2) Wire saving
The J type requires AC power supply wiring, while the K type can be driven by the NC
device’s DC5V power supply, eliminating the need for power supply wiring.
(3) Higher resolution
The resolution (= minimum detection unit) was improved from conventional 0.05 μm to
0.01 μm while preserving the capability to detect signals at the same high speed of 1,800 m/minas the J type.
(4) Eliminating need for gain adjustment
For the J type, it was necessary to manually adjust the amplitude of the gain volume ofthe scale signals, while on the other hand, the K type no longer requires such manualadjustment due to automation.
(5) Automated interpolation error compensation
A scale is generally divided into equal pitches and the position within one pitch isdetermined through electric divisional compensation (interpolation). The error within a
one-pitch range is called an interpolation error, which repeatedly appear on each division asperiodic errors. The J type can reduce the periodic component of an interpolation error, using
the adjustment volume, but is necessary to measure the error by a method such as using a laser
for adjustment.
For the K type, on the other hand, if the scale is made to slide at a constant speed, theperiodic component of an interpolation error is automatically extracted and memorized to becorrected. As a result, neither laser measurement nor volume adjustment is required. Moreover,even the periodic component that the J type failed to remove completely is corrected.
Since an interpolation error also depends upon the scale itself and how the scale ismounted, the fact that the compensation of interpolation errors can be handled on machine(with the scale remaining on the machine tool) by the customer is another excellent feature.
Like in the actual case shown in Figure 10, the addition of the K type A/D converter’sinterpolation function to the MP Scale not only permits the removal of periodic errors, but also
improves accuracy.

Figure 10

Interpolation error compensation by K type A/D converter|4. Rotary MP Scale with built-in A/D converter
In response to the recent needs for more compact machinery, as well as for control panel
downsizing, MHI developed the Rotary MP Scale MPZA series with a built-in A/D converter andmade it more compact.
(1) Compactness
The MPZA series has 2 models at present (Table 2), and the small caliber-type
MPZA2024A is 13% smaller in outer diameter than the existing product(MPRZ536A+ADB-20J70 controller) and the controller has also been downsized by 96% to bebuilt into the scale (Figure 11). In addition to a thickness as thin as 20 mm, the scale has
proven to be able to contribute to downsizing of machine tools (Figure 12).

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Table 2 Main data on MPZA series
Item
Outer/inner diameter
Accuracy (peak to peak)in seconds
Resolution
Speed (maximumresponse rotating speed)
Connectable NC

MPZA-2024A
110/20 mm

MPZA-6036A
200/60 mm

5 seconds p-p

4 seconds p-p

23

2 /rev(8388608 pulses/revolution)

223/rev(8388608 pulses/revolution)

10,000 min-1

10,000 min-1

FANUC, Mitsubishi CNC, Siemens

Figure 11

Comparison with existing product components

Figure 12

Mounted MPZA2024A(2)High accuracy
As a rule, the smaller the scale diameter, the worse the interpolation errors. This isbecause the circumferential error ⊿ of r-diameter rotary scale divisions has easily depended
on factors such as the manufacturing conditions, and it is roughly calculated as ⊿/r in terms ofangle. The MPZA has achieved both compactness and high accuracy, using devised patterns
and an error compensation function (Figure 13).

Figure 13

Error compensation function of MPZA2024A

Toward the future, MHI intends to expand and improve built-in controller-type products tomaintain an attractive lineup.