MMC Activities..............1Fine MEMS Pj...............9Column .....................10
Overseas Trends ..........11
Member’s Profiles ........12

MMC Activities

Activities of the Micromachine Center in Fiscal 2006
The Micromachine Center conducted the following activities
relating to micromachine technology (MEMS and othernanoscale machines and systems) in fiscal 2006. The aim ofthese activities was to establish and promote theindustrialization of basic micromachine technologies, thereby
contributing to the further development of Japan’s industry andeconomy as well as to the international community.

industry, the MEMS Industry Forum was established in April asa new Special Project Committee. With members made up ofcompanies involved in the MEMS industry, the MEMS Industry
Forum promotes policy recommendation projects and industry
interchange and stimulation projects, with the goal of helping tostrengthen the international competitiveness of the MEMS
industry in Japan.

1. Governmental/NEDO project related activities(1) Policy recommendation projects
On September 29, 2006, an exchange of views (Micro/Nano
Cutting Edge Technology Exchange) was held between themembers of the MEMS Industry Forum Promotion Committeeand representatives from the government and related agencies.
In addition, a MEMS Forum was held at the Micro-Nano 2006
general exhibition in November. These policy recommendation
activities were conducted with the aim of promoting thedevelopment of MEMS-related industries.

To establish basic micromachine technologies relating tomicromachines and microelectromechanical systems (MEMS),
the Micromachine Center actively promoted national
government and NEDO-sponsored research and development
projects that mobilized the capabilities of government, industry
and academia. During fiscal 2006, the Center continued topromote the MEMS Design and Analysis Support System
Development Project and also initiated the Highly Integratedand Complex MEMS Manufacturing Technology Development
Project.
(1) MEMS Design and Analysis Support SystemDevelopment Project(project commissioned by NEDO)This project, a three-year commissioned project initiated inFY 2004, ended in March of this year, having completed its
initial objectives. In addition, approximately 400 licenses havebeen issued for the alpha version of the MemsONE design andanalysis software that was released last November, and thesoftware is currently being evaluated by MEMS researchers andengineers.
(2) Study of methods for promoting MEMS-ONE(project commissioned by NEDO)
A briefing was held last year on November 9 to announce
the achievements of the MEMS-ONE project. The briefing wasattended by approximately 250 persons and provided
information on functions, pricing, support and so on, as well as
information on participation in dissemination activities
scheduled to start in the coming fiscal year.
(3) Highly Integrated and Complex MEMS Manufacturing
Technology Development Project(project commissioned by NEDO)
In this project, a high-capacity database server was installedin the Micromachine Center and trial operation of a web-based
entry system was conducted. In addition, knowledge andinformation was upgraded through sharing by a Knowledge
Database Committee. Moreover, the Project Promotion Liaison
Committee met three times to provide overall management
support for the diverse array of issues, and objectives wereachieved by each entity involved in the project.

2. MEMS Industry Forum Project(policy recommendations and industry
interchange / stimulation projects)
In order to support the further development of the MEMS

Internet Home Page : http://www.mmc.or.jp/(2) Industry-academia liaison activities
Micro/Nano Cutting Edge Technology Exchange meetings
were held four times (in April, July, October and February) inorder to promote interchange between industry and academia
in the micro/nano field.
(3) Creation of an infrastructure for MEMS development
1 With the aim of broadening the base of the MEMS
industry, a study was conducted regarding the approach
to local publicly-run trials and liaison among foundrycompanies.
2 Dissemination of MemsONE
A study was conducted of liaison with MemsONE in theeffort to establish MEMS foundry services.
3 Strengthening of collaboration with public foundries ineach area and local clusters
In order to support the participation in MEMS projectsby local small and medium-size companies and venture firms,
a study was conducted in fiscal 2007 regarding the proposal
to set up a forum for the regular exchange of information
between publicly-run trials and foundry companies.
4 Promotion of personnel training projects
Study of an Internship Support Project (holdingexchanges of views with universities and companies andproviding information on a web site) was conducted.
(4) MEMS business interchange activities both at homeand abroad
1 Opening of a MEMS Mall
2 Holding of the Micro/Nano 2006 micromachine exhibition
3 Participation in the 12th Micromachine Summit
4 Construction of an international affiliate network
5 Dispatch of overseas missions and researcher interchange

3. Research and investigation of micromachines
The Micromachine Center carried out activities aimed at
gaining a clear understanding of the technological and industrial
trends in micromachines and MEMS as they become key

testing methods and draft standards for standard test
specimens for tensile testing, which were at the stage of theFinal Draft for International Standard (FDIS), and was able topublish these as international standards in August.

manufacturing technologies. The Center also pursued research
into new technological issues in domains in which
nanotechnologies are becoming integrated.
(1) MEMS frontiers: study of future device technologies madepossible by fusion with nanodevices (project commissionedby the Mechanical Social Systems Foundation)
A study was implemented regarding future device
technologies that will have a revolutionary impact on thesociety 20 years from now, which can be achieved through thefusion of nanotechnology and biotechnology by expanding on
the achievements of the long-term vision roundtable conference
held in FY 2005.

(4) Micromachine terminology standardization activities
The Committee met three times and completed draft JIS
standards and submitted them to the Japanese Standards
Association (JSA).
(5) Research and development relating to standardizationof life acceleration tests for MEMS materials andstandard test specimens for calibration (projectcommissioned by METI)The Committee met three times during this fiscal year andconducted a basic study relating to the standardization of life
acceleration test methods and standard test specimens forcalibration, and also implemented life testing.

(2) Study of technical trends in Japan and other countries
During the last fiscal year, a study was conducted regarding
MEMS research trends in 2001 through 2006 in order toconsider current trends. Technological categories were revised
based on the results of this study, and the latest research
trends for MEMS 2007 were studied in accordance with the newcategories.

5. Publicity activities
The Micromachine Center worked to publicize and increase
public awareness of micromachines/MEMS by publishing anddistributing magazines and newsletters and holding exhibitions
and the like. The Center also posted summaries of various
research reports on its website and made information widely
available to people both at home and abroad.

(3) MEMS market research (partially commissioned byNEDO in order to evaluate the roadmap for MEMS
technical strategies
The Micromachine Center conducted MEMS market
research jointly with the Japan Technical Information Services(JATIS), using the MEMS market research techniqueestablished in the “Study of the current status of the MEMS
market and analysis of Japanese competitiveness” implementedin FY 2003.

(1) Improved dissemination and exchange of information
through the MCC website
The Center has actively worked to provide up-to-the-minuteinformation on the Micromachine Center website in a timely
manner.

(4) Outcomes research relating to micromachinetechnology (project commissioned by NEDO)The Micromachine Technology Outcomes ResearchCommittee, made up of members from companies participatingin related NEDO projects, was set up within the Micromachine
Center, and outcomes research was conducted jointly with theJapan Technical Information Services (JATIS).

(2) Publication of “MICRONANO” quarterly
The Center published a quarterly magazine entitled“MICRONANO” in April, July, October and January anddistributed it to supporting members, MEMS Industry Forummembers and MMC personnel.
(3) Publication of monthly newsletter
The Center published a monthly newsletter in Japaneseentitled MMC/MIF News and distributed it to supporting
members, MEMS Industry Forum members etc.

(5) Upgrading of micro/nano database
Efforts were made to upgrade document retrieval functions
and the database of research reports, etc. made available tosupporting members on the MMC website.

(4) Publication of MicroNanoExpress newsletter
The Center published an electronic newsletter in Japaneseusing the MicroNano mailing list to provide information on
special events and the like.

4. Projects to promote standardization of micromachines
Inmicromachine/MEMS
technologicalfields,standardization is being promoted as international initiatives
get underway.

(5) Maintaining and upgrading of the MMC library(by upgrading the academic paper abstract database, etc.)
The Center summarized abstracts of technical papers andreferences in the Micro/Nano Index newsletter (Japaneseonly) and distributed the newsletter in electronic form tosupporting members, related institutions etc.
The Center also upgraded the library by gathering further
technical documentation and materials, and added this andother information to its database.

(1) Study of roadmap for MEMS standardization(project re-commissioned by the Japanese governmentand Mitsubishi Research Institute, Inc.)
To maintain and increase the international competitivenessof the MEMS industry, guidelines for strategic efforts tostandardize those fields in which Japan can excel werecompiled as a roadmap for standardization for the next 10years.
(2) Response to overseas efforts at international standardization
The Center conducted a study of Japanese responses toKorea’s proposed international MEMS standards and mounted a
successful effort to ensure that Japan’s views would bereflected in the draft Korean standards (RF-MEMS switches,general principles for MEMS etc.).

(6) Micromachine Exhibition
The Micromachine Center sponsored the 17th Micromachine
Exhibition at Tokyo International Forum (Yurakucho, Tokyo)
November 7 - 9, 2006. Total attendance was 11,736 persons, thelargest yet (last year’s attendance was 9,098 persons).

(3) Promotion of international standardization of MEMS
thin film material testing (project commissioned byNEDO)The Center conducted follow-up activities relating to tensile2