MemsONE Ver. 1.0 Release
MEMS System Development Center
The MEMS-ONE Project was completed in FY 2006,
and in FY 2007 the “MEMS-ONE Project Achievement
Dissemination Project (hereafter “Project”)” wascommissioned by the New Energy and Industrial
Technology Development Organization (NEDO) . In
this Project, a beta version of MemsOne (achieved inthe MEMS-ONE project) was distributed, and activities
that included user support, function improvement /upgrading and study regarding dissemination wereconducted. The Project issued more than 450
distribution licenses for the beta version and morethan 200 persons attended user support seminars.
This made a major contribution to the establishment ofa functional infrastructure for MemsONE as well as tothe achievement of dissemination and publicity
objectives.
Development of a commercial version was pursued
concurrently with the Project, and MemsONE Ver. 1.0
was released in mid-February 2008. MemsONE Ver.
1.0 represents an advanced function version of theprogram and reflects approximately 90% of thefunctional improvements and upgrades to the beta
version that were achieved by the Project.
Two versions of MemsONE have been prepared: anenterprise version for general company use and anacademic version for universities and research
institutions. The enterprise version will be marketedby software vendors and the academic version will bedistributed by the Micromachine Center. The detailed
product configuration is shown below.

@ Academic version
The academic version is designed for universities
and research institutions. There are two editions: a
research edition and a classroom edition. (Both werereleased starting in mid-March.)– Research edition (for researchers)

This edition contains the full set of professionaluse functions, subject to the following restrictions.
– Licensed period of use: 1 year (upgraded annually)– Conditions for use: comes with an obligation to provide
knowledge data, teach seminars, etc.
– Classroom edition (for teaching use)

This edition contains the full set of entry-level
functions, subject to the following restrictions.
– Licensed period of use: 4 years or 1 year
(two types: 30 licenses per classroom and 50 licenses /classroom)

As the organization for future support, a MemsONE
Support Center will be established within theMicromachine Center, and the Micromachine Center
will work with three software vendors to pursue
dissemination activities. Major releases will be issued
annually. Version 1.1 (representing the achievements ofthis Project) is scheduled for release in May, andVersion 2.0 is scheduled for release in January of nextyear.

MemsONE Operation (Support Organization)(1) Mechanical simulator(2) Process simulator<Software upgrades>

Software vendors(3) Wet etching simulator(4) Inverse process analysis(marketingof enterprise version)<System operation and support><Updating of knowledge / materials
and process database><Provision of knowledge /materials and process data>

Support Center

Universities, AIST etc.

(within Micromachine Center)(distributionof academic version)

Foundry companies
Device development companies

Users(5) Nano imprint simulator
Outside analysis
software(plugins)(6) MEMS circuit simulator

Framework
Advanced functional
analysis software, etc.

Enterprise version

Knowledge /materials
database

Foundry companies / users
Design houses
Engineers from many fields etc.

MEMS design / analysis support system
MemsONE@ Enterprise version

Academic version

The enterprise version is designed for generalcompany use. There are two editions: a professional
edition and an entry-level edition. (Both were released
starting in mid-February.)(development / provisionThird parties of outside software)
University researchers, software vendors, companies,government and NEDO professionals etc.

University researchers and students
Researchers at research institutions
together with
Individual user
database creation

MemsONE Support Organization– Professional edition (for actual use)

This edition is designed for real-world use andhas no functional limitations. It comprises the basic
product set ((1) - (3)) as well as the separate
products ((1) - (6)).

For details regarding MemsONE Ver. 1.0, see thefollowing website:
http://mmc.la.coocan.jp/memsone/hiroba/ver1_info/– Entry-level edition (for functional evaluation)

This is a low-cost edition provided for functional
evaluation purposes, with some limitations on thenumber of nodes and so on. It comprises only theseparate products ((1) - (6)).

For inquiries regarding MemsONE, please contact
the MemsONE Support Center:
TEL(+81) 3-5835-1870
Email mems1-user@mmc.or.jp

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