J. Inst. Electrostat. Jpn.

, 31, 3 (2007) 125 130ࠦࡠ࠽᡼㔚ᑼࠗࠝ࠽ࠗࠩߩૐࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦൻ੹ ࿦ ᶈ ਯ*, ┻ ౝቇ**, ጟ ㊁ ৻ 㓶*,1

㧔2006 ᐕ 7 ᦬ 7 ᣣฃઃ㧧2007 ᐕ 4 ᦬ 2 ᣣฃℂ㧕Contamination Control for Corona Discharge Ionizers
Hiroyuki IMAZONO*,1, Manabu TAKEUCHI** and Kazuo OKANO*(Received July 7, 2006; Accepted April 2, 2007)
A corona discharge air ionizer is one of the most useful devices for controlling electrostatic charges in ULSI
manufacturing processes. However, a corona discharge air ionizer generates particles that act as contamination.
Particle generation tests were carried out for a silicon emitter and a tungsten emitter in air and nitrogen atmospheres.
The number of particles generated from the silicon emitter was 5 times smaller than that generated from the tungsten
emitter in each type of atmosphere. The number of particles generated in nitrogen atmospheres was about 10 times
lower than that generated in air. The static control system utilizing the dual jet ionizer that creates ions in nitrogen gas
were proposed, made and evaluated. The number of particles generated by the static control system wasapproximately 180 times smaller than that by the conventional air ionizer with a tungsten emitter.
1.

ߣࠍᬌ⸛ߒߚ㧚ߪߓ߼ߦ࠺ࠖࠬࡊ࡟ࠗ࠺ࡃࠗࠬ㧘ࡂ࡯࠼࠺ࠖࠬࠢ࠺ࡃࠗࠬ㧘ULSI ╬ᧄႎ๔ߢᛒߞߡ޿ࠆ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩࠦࡦ࠲

ߩ㔚ሶ࠺ࡃࠗࠬߩ⵾ㅧᎿ⒟ߦ߅޿ߡ㧘㕒㔚᳇㓚ኂߪᄢ߈ߥ໧

ࡒࡀ࡯࡚ࠪࡦ․ᕈߪ㧘૶↪㔓࿐᳇ߩᓇ㗀ࠍฃߌ㔍޿᭴ㅧߣߥ㗴ߣߥߞߡ޿ࠆ1-2)㧚ߎߩኻ╷ߣߒߡ㧘ࠦࡠ࠽᡼㔚ᑼࠗࠝ࠽ߞߡ޿ࠆ߇㧘․ᕈࠍᲧセߔࠆߚ߼ߦ૶↪ߒߚᓥ᧪ဳࠗࠝ࠽ࠗ

ࠗࠩ߇ᐢߊ૶↪ߐࠇߡ޿ࠆ㧚ߒ߆ߒ㧘ߎߩࠗࠝ࠽ࠗࠩߪࠢ࡝

ࠩߩࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦ․ᕈߪ㧘૶↪ⅣႺߩᓇ㗀ࠍฃߌᤃ޿㧚࡯ࡦ࡞࡯ࡓౝߩࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦḮߣߥࠆߎߣ߇޽ࠆߚ߼㧘ߘߎߢ㧘ᧄႎ๔ߢߪ㧘ࠗࠝ࠽ࠗࠩߩೋᦼ․ᕈߛߌࠍᬌ⸛ߔࠆ

ߘߩૐࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦൻ߇ⷐ᳞ߐࠇߡ޿ࠆ 3-4)㧚

ߎߣߦߒߚ㧚

ߘߎߢᧄႎߢߪ㧘ࠗࠝ࠽ࠗࠩߩૐࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦൻࠍታ⃻ߔࠆߚ߼ߦ㧘ࠗࠝ࠽ࠗࠩ↪ࠛࡒ࠶࠲᧚ᢱ 5-7)㧘ࠗࠝ࠽ࠗ2.

ࠩߩ᭴ㅧ㧘߅ࠃ߮ࠗࠝ࠽ࠗࠩߩ೙ᓮࠪࠬ࠹ࡓൻߩ⷗࿾߆ࠄᬌ

ࠛࡒ࠶࠲ߪ㧘᫔⁁ߩ࠲ࡦࠣࠬ࠹ࡦ߅ࠃ߮ࠪ࡝ࠦࡦࠍ૶ߞߡ

⸛ࠍⴕߞߚߩߢ㧘ߘߩ⚿ᨐࠍႎ๔ߔࠆ㧚߹ߕ㧘ࠗࠝ࠽ࠗࠩ↪

૞⵾ߒߚ㧚ߎࠇࠄߩ᫔⁁ߩ࠲ࡦࠣࠬ࠹ࡦߣࠪ࡝ࠦࡦߩ৻┵ࠍࠛࡒ࠶࠲᧚ᢱߣࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦߣߩ㑐ଥࠍ᣿ࠄ߆ߦߒߚ㧚ᦛ₸ඨᓘ߇ 0.3 mm ߣߥࠆࠃ߁ߦ⎇೥ߒ㧘㊎⁁ߩࠛࡒ࠶࠲ࠍ

ᰴߦ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩࠍឭ᩺ߒ㧘᳇૕ߩ⒳㘃ߣ૞⵾ߒߚ㧚ྃ኿㊂ࠍᄌൻߐߖ㧘ࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦૐᷫൻࠍᬌ⸛ߒߚࠗࠝ࠽ࠗࠩ↪ࠛࡒ࠶࠲ߩࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦ․ᕈ

࿑ 1 ߦ␜ߔ᷹ቯⵝ⟎ࠍ↪޿ߡ㧘ࠛࡒ࠶࠲߆ࠄߩ⊒Ⴒ☸ሶᢙ8-11)㧚ߐࠄߦ㧘ߎߩ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩࠍ૶ߞߡ㕒㔚ࠍ᷹ቯߒߚ㧚ߎߩ᷹ቯߦ߅޿ߡ㧘ࠛࡒ࠶࠲߳ߩශട㔚࿶ߪ㧘᳇೙ᓮࠪࠬ࠹ࡓࠍ⹜૞ߒ㧘ࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦࠍૐᷫߔࠆߎࠛࡒ࠶࠲㔚ᵹ߇ 0.5 ǴA ߣߥࠆࠃ߁ߦ⺞ᢛߒߚ㧚߹ߚ㧘⊒Ⴒ☸ሶᢙߪ 1 ಽ㑆Ფߦ㓸⸘ߒ㧘ߎࠇࠄࠍ⚥Ⓧߒߥ߇ࠄ 24 ᤨ㑆ࠠ࡯ࡢ࡯࠼㧦ඨዉ૕⵾ㅧ㧘ࠗࠝ࠽ࠗࠩ㧘ࠛࡒ࠶࠲㧘ࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦ㧘㕒㔚᳇೙ᓮࠪࠬ࠹ࡓ* ⡯ᬺ⢻ജ㐿⊒✚วᄢቇᩞ㔚᳇ࠪࠬ࠹ࡓᎿቇ⑼㧔229-1196
␹ᄹᎹ⋵⋧ᮨේᏒᯅᧄบ 4-1-1㧕
Department of Electrical System Engineering, The PolytechnicUniversity, 4-1-1 Hashimotodai, Sagamihara, Kanagawa
229-1196, Japan** ⨙ၔᄢቇᎿቇㇱ㔚᳇㔚ሶᎿቇ⑼㧔316-8511 ⨙ၔ⋵ᣣ┙Ꮢਛᚑᴛ↸ 4-12-1㧕
Department of Electrical and Electronic Engineering, Ibaraki
University, 4-12-1 Nakanarisawa-tyou, Hitachi, Ibaraki
316-8511, Japan1
okano@uitec.ac.jp᷹ቯࠍⴕߞߚ㧚ߎߩࠃ߁ߥ᷹ቯߪⓨ᳇㔓࿐᳇㧘⓸⚛㔓࿐᳇㧘ࠕ࡞ࠧࡦ㔓࿐᳇ߢⴕߞߚ㧚ߥ߅㧘ᧄ᷹ቯߢ↪޿ߚࡄ࡯࠹ࠖࠢ
࡞ࠞ࠙ࡦ࠲ (TSI ␠⵾ Model 3025A) ߩᬌ಴㒢⇇ߪ㧘☸ᓘ߇
0.03 Ǵm ߩ☸ሶߢ޽ࠆ㧚߹ߚ㧘ᧄታ㛎ߢ૶↪ߒߚ⓸⚛ࠟࠬ߅ࠃ߮ࠕ࡞ࠧࡦࠟࠬߩ⚐ᐲߪ㧘99.99 % ߢ޽ࠆ㧚ⓨ᳇㔓࿐᳇ߦ߅ߌࠆ⚥Ⓧ⊒Ⴒ☸ሶᢙߣᤨ㑆ߣߩ㑐ଥࠍ࿑ 2ߦ␜ߔ㧚ߎߩ࿑ߦ߅޿ߡ㧘ᱜࠗࠝࡦ⊒↢↪ࠛࡒ࠶࠲ߣ⽶ࠗࠝࡦ⊒↢↪ࠛࡒ࠶࠲߇⊒↢ߒߚ☸ሶᢙߩ๺㧘ߔߥࠊߜ㧘24 ᤨ㑆126 (44)32007㪚㫌㫄㫌㫃㪸㫋㫀㫍㪼 㫅㫌㫄㪹㪼㫉 㫆㪽 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㪥㪧 㪲 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㪴31ߩ✚⚥Ⓧ⊒Ⴒ☸ሶᢙߪ࠲ࡦࠣࠬ࠹ࡦࠛࡒ࠶࠲ߢ 849 ୘㧘ࠪ࡝ࠦࡦࠛࡒ࠶࠲ߢ 165 ୘ߢ޽ߞߚ㧚ߎߩ⚿ᨐࠃࠅ㧘ࠪ࡝ࠦࡦࠛ
ࡒ࠶࠲ߩ✚⚥Ⓧ⊒Ⴒ☸ሶᢙߪ࠲ࡦࠣࠬ࠹ࡦߩ⚂ 1/5 ߢ޽ࠆߎߣ߇ࠊ߆ࠆ㧚ߥ߅㧘ࠗࠝ࠽ࠗࠩࠍേ૞ߐߖߥ޿⁁ᘒߢߩ 24ᤨ㑆ߩ✚⚥Ⓧ⊒Ⴒ☸ሶᢙߪ 6 ୘⒟ᐲߢ޽ߞߚ㧚ߔߥࠊߜ㧘⊒Ⴒ☸ሶᢙߩ᷹ቯߦ߅ߌࠆࡃ࠶ࠢࠣ࡜࠙ࡦ࠼ߪ㧘0.7×10-4 s-1㧘⒟ᐲߢ޽ߞߚ㧚
ࠪ࡝ࠦࡦࠛࡒ࠶࠲ࠍ૶↪ߒ㧘ߘࠇߙࠇߩ㔓࿐᳇ਛߢ⊒Ⴒ☸
ሶᢙࠍ᷹ቯߒߚ⚿ᨐࠍ࿑ 3 ߦ␜ߔ㧚ߎߩ࿑ߦ߅޿ߡ㧘24 ᤨ㑆ߩ✚⚥Ⓧ⊒Ⴒ☸ሶᢙߪⓨ᳇㔓࿐᳇߇ 165 ୘㧘⓸⚛㔓࿐᳇߇㪈㪇㪇㪐㪇㪏㪇㪎㪇
㪍㪇㪌㪇㪋㪇㪊㪇
㪉㪇㪈㪇㪇㫇㫆㫊㫀㫋㫀㫍㪼㫅㪼㪾㪸㫋㫀㫍㪼㪸㫀㫉㪥㪉㪘㫉㪇㪌㪈㪇㪈㪌㪉㪇㪉㪌㪦㫇㪼㫉㪸㫋㫀㫅㪾 㫋㫀㫄㪼 㫋㪪 㪲 㪿㫆㫌㫉㫊 㪴15 ୘㧘ࠕ࡞ࠧࡦ㔓࿐᳇߇ 4 ୘ߢ޽ߞߚ㧚ߎࠇࠄߩ⚿ᨐ߆ࠄ㧘ࠛࡒ࠶࠲᧚ᢱߣߒߡߪࠪ࡝ࠦࡦ㧘േ૞

࿑ 3 ࠪ࡝ࠦࡦࠛࡒ࠶࠲ߩ⚥Ⓧ⊒Ⴒ☸ሶᢙߣᤨ㑆ߣߩ㑐ଥ㔓࿐᳇ߣߒߡߪ⓸⚛߹ߚߪࠕ࡞ࠧࡦ߇ᦸ߹ߒ޿ߎߣ߇᣿ࠄ߆

Fig.3 Cumulative number of particles generated from the siliconߦߥߞߚ㧚

emitter as a function of operating time .

㪸㫀㫉㪃 㪥㪉㪃 㪘㫉 㪾㪸㫊㪛㫌㪸㫃 䌪㪼㫋 㫀㫆㫅㫀㫑㪼㫉㪟㫀㪾㪿 㫍㫆㫃㫋㪸㪾㪼㫇㫆㫎㪼㫉 㫊㫌㫇㫇㫃㫐㪌㪇㪇㫄㫄㪌㪇㫄㫄㪚㪸㪹㫃㪼㪜㫄㫀㫋㫋㪼㫉㪌㪇㫄㫄㪜㫄㫀㫋㫋㪼㫉㪤㪼㫋㪸㫃 㫉㫀㫅㪾㪞㫉㫆㫌㫅㪻 㪼㫃㪼㪺㫋㫉㫆㪻㪼㪥㫆㫑㫑㫃㪼㪘㫄㫄㪼㫋㪼㫉㪌㪇㪇㫄㫄㪌㪇㪇㫄㫄࿑ 4 ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩࠗࠝࡦ↢ᚑㇱ㪧㪸㫉㫋㫀㪺㫃㪼㪺㫆㫌㫅㫋㪼㫉

Fig.4 Structure of ion creator with the dual jet ionizer.

࿑ 1 ⊒Ⴒ☸ሶᢙߩ᷹ቯⵝ⟎Fig.1 Schematic setup for measuring particle number.

3.

࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩታ↪ᕈ⹏ଔ

3.1 ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ⹜૞㪚㫌㫄㫌㫃㪸㫋㫀㫍㪼 㫅㫌㫄㪹㪼㫉 㫆㪽 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㪥㪧 㪲 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㪴ࡄࠗࡊ⁁ߩࠪ࡝ࠦࡦߩ৻┵ࠍᦛ₸ඨᓘ߇ 0.3 mm ߣߥࠆ㪌㪇㪇㪋㪌㪇㪋㪇㪇㪊㪌㪇㪊㪇㪇㪉㪌㪇㪉㪇㪇㪈㪌㪇㪈㪇㪇㪌㪇㪇ࠃ߁ߦ⎇೥ߒ㧘ࠛࡒ࠶࠲߆ࠄ᳇૕ࠍྃ኿ߢ߈ࠆ᭴ㅧߩࠫࠚ࠶㫇㫆㫊㫀㫋㫀㫍㪼࠻ࠛࡒ࠶࠲ࠍ૞⵾ߒߚ㧚ߎߩࠛࡒ࠶࠲ࠍࡁ࠭࡞ౝߦ⸳⟎ߒ㧘㫅㪼㪾㪸㫋㫀㫍㪼ࠛࡒ࠶࠲ߩౝㇱߣᄖㇱߣ߆ࠄ⓸⚛߿ࠕ࡞ࠧࡦࠍྃ኿ߢ߈ࠆ᭴ㅧߩ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩࠍ⹜૞ߒߚ㧚ߎߩࠗࠝ࠽ࠗ㪮 㪼㫄㫀㫋㫋㪼㫉ࠩߩ᭴ㅧࠍ࿑ 4 ߦ␜ߔ㧚
3.2 ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ㒰㔚․ᕈ

㪪㫀 㪼㫄㫀㫋㫋㪼㫉࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߢ૶↪ߔࠆྃ኿᳇૕ߩ⒳㘃㧘
ౝㇱྃ኿㊂㧘ᄖㇱྃ኿㊂ࠍᄌൻߐߖߡ㒰㔚․ᕈࠍᬌ⸛ߒߚ㧚㪇㪌㪈㪇㪈㪌㪉㪇㪉㪌㪦㫇㪼㫉㪸㫋㫀㫅㪾 㫋㫀㫄㪼 㫋㪪 㪲 㪿㫆㫌㫉㫊 㪴࿑ 5 ߦ␜ߔ᷹ቯⵝ⟎ࠍ↪޿ߡ㧘ࠛࡒ࠶࠲߳ߩශട㔚࿶ߣ㒰㔚㔚ᵹߣߩ㑐ଥࠍ᷹ቯߒߚ㧚ࠛࡒ࠶࠲߳ߩශട㔚࿶ߪ 0 㨪±10 kV ߩ▸࿐ߣߒߚ㧚࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩౝㇱྃ

࿑ 2 ⓨ᳇㔓࿐᳇ߦ߅ߌࠆ⚥Ⓧ⊒Ⴒ☸ሶᢙߣᤨ㑆ߣߩ㑐ଥ኿㊂ߣᄖㇱྃ኿㊂ࠍ 1.0 " /min ৻ቯߣߒ㧘⓸⚛߹ߚߪࠕ࡞

Fig.2 Cumulative number of particles generated from emitters asࠧࡦࠍྃ኿ߒߚ㧚ߥ߅㧘᷹ቯߪ㧘22 ͠㧘⋧ኻḨᐲ 45 %㧘0.3

a function of operating time.

m/s ߩ࠳࠙ࡦࡈࡠ࡯ߩࠢ࡝࡯ࡦ࡞࡯ࡓౝߢⴕߞߚ㧚ࠛࡒ࠶࠲߳ߩශട㔚࿶ߣ㒰㔚㔚ᵹߣߩ㑐ଥࠍ࿑ 6 ߦ␜ߔ㧚

127 (45)㪈㪌㪅㪇ߎߩ࿑ߦ߅޿ߡ㧘⓸⚛ࠍྃ኿ߒߚ႐ว㧘㒰㔚㔚ᵹߪᕆỗߥ┙㪛㫀㫊㪺㪿㪸㫉㪾㪼㩷㪺㫌㫉㫉㪼㫅㫋 㪠 㪛 㪲㫅㪘㪴ߜ਄߇ࠅࠍ␜ߒߡ޿ࠆ㧚৻ᣇ㧘ࠕ࡞ࠧࡦࠍྃ኿ߒߚ႐ว㧘ᓸ㊂ߩ㒰㔚㔚ᵹ߇ᵹࠇᆎ߼ߚ⋥ᓟߦࠛࡒ࠶࠲ߣኻะ㔚ᭂߣߩ㑆ߢἫ⧎᡼㔚߇⊒↢ߒߚ㧚ߘߎߢ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩྃ኿᳇૕ߣߒߡߪ⓸⚛ࠍ૶↪ߔࠆߎߣߦߒߚ㧚㒰㔚㔚ᵹߪ⓸⚛ྃ኿㊂ߦଐሽߔࠆߣ⠨߃ࠄࠇࠆߚ߼㧘ྃ኿㊂ߣ㒰㔚㔚ᵹߣߩ㑐ଥࠍᬌ⸛ߒߚ㧚߹ߕ㧘ౝㇱྃ኿㊂߅ࠃ߮ᄖㇱྃ኿㊂
߇ 1.0 " /min ߩߣ߈ߩ㒰㔚㔚ᵹߩ⛘ኻ୯߇ 10.0 nA ߣߥࠆ㪈㪇㪅㪇㪌㪅㪇㪇㪄㪌㪅㪇㪠㫅㫅㪼㫉㩷㫁㪼㫋㩷㪽㫃㫆㫎㩷㫉㪸㫋㪼㪈㪅㪇㩷㪲㩷"㪆㫄㫀㫅㪴㪦㫌㫋㪼㫉㩷㫁㪼㫋㩷㪽㫃㫆㫎㩷㫉㪸㫋㪼㪈㪅㪇㩷㪲㩷"㪆㫄㫀㫅㪴㪄㪈㪇㪅㪇㪄㪈㪌㪅㪇㪄㪈㪇 㪄㪏 㪄㪍 㪄㪋 㪄㪉ࠃ߁ߦࠛࡒ࠶࠲߳ߩශട㔚࿶ࠍ᳿߼ߚ㧚ߔߥࠊߜ㧘ࠛࡒ࠶࠲㔚࿶ߪ +7.6 kV㧘-8.5 kV ߣߒߚ㧚

㪇

㪉

㪋

㪍

㪏㪈㪇

㪜㫄㫀㫋㫋㪼㫉㩷㫍㫆㫃㫋㪸㪾㪼 㪭㪜 㪲㫂㪭㪴ߎߩࠛࡒ࠶࠲㔚࿶ߢࠗࠝ࠽ࠗࠩࠍേ૞ߐߖߚ㓙ߩྃ኿㊂ߣ㒰㔚㔚ᵹߣߩ㑐ଥࠍ࿑ 7 ߦ␜ߔ㧚ߎߩ࿑ߦ߅޿ߡ㧘ౝㇱྃ኿

࿑ 6 ࠛࡒ࠶࠲߳ߩශട㔚࿶ߣ㒰㔚㔚ᵹߣߩ㑐ଥ㊂߹ߚߪᄖㇱྃ኿㊂߇ᄢ߈ߊߥࠆߦᓥߞߡ㧘㒰㔚㔚ᵹߪᄢ߈Fig.6 I-V characteristics for the silicon emitter.

ߊߥߞߡ޿ࠆߎߣ߇ࠊ߆ࠆ㧚
3.3 ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩᦨㆡྃ኿㊂ߩ᳿ቯ೨ㅀߩⓨ᳇㔓࿐᳇ਛߢߩ᷹ቯ⚿ᨐߢ᣿ࠄ߆ߦߥߞߚࠃ߁ߦ㧘ࠩࠍേ૞ߐߖࠆ႐ว㧘ࡁ࠭࡞ౝ߇ቢోߦ⓸⚛ߦ⟎឵ߐࠇߡ޿ࠆߎߣ߇㊀ⷐߦߥࠆ㧚ࡁ࠭࡞ౝߦ㉄⚛߇ᷙ౉ߒߡ޿ࠆߣ㧘ࠗࠝࡦߩ↢ᚑߣหᤨߦࠝ࠱ࡦ߽↢ᚑߔࠆ㧚ߒߚ߇ߞߡ㧘ྃ኿ߒߚ᳇૕ਛߩࠝ࠱ࡦỚᐲࠍ᷹ቯߔࠆߎߣߦࠃߞߡ㧘ࡁ࠭࡞ౝߩ⓸⚛⟎឵₸ߩផቯ߇น⢻ߦߥࠆߣ⠨߃ࠄࠇࠆ㧚߹ߚ㧘ࡁ࠭࡞ౝߩ⓸⚛⟎឵₸ߪྃ኿㊂ߦଐሽߔࠆߣ⠨߃ࠄࠇࠆ㧚ߘߎߢ㧘 +PPGTLGVHNQYTCVG9(+ ="OKP?

࿑ 8 ߦ␜ߔⵝ⟎ࠍ૶޿㧘ౝㇱྃ኿㊂ߣᄖㇱྃ኿㊂ࠍᄌൻߐߖ
ߡࠝ࠱ࡦỚᐲࠍ᷹ቯߒߚ㧚

T LG
V HN
QY T
9(1 =CVG"OKP?

ߪ⪺ߒߊᄙߊߥࠆ㧚ߒߚ߇ߞߡ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗ
1WVG&KUEJCTIGEWTTGPV +&  =P#?
&KUEJCTIGEWTTGPV⓸⚛㔓࿐᳇ਛߦ㉄⚛߇ሽ࿷ߔࠆߣࠛࡒ࠶࠲߆ࠄߩ⊒Ⴒ☸ሶᢙߎࠇࠄߩ᷹ቯ⚿ᨐࠍ࿑ 9 ߦ␜ߔ㧚ߎߩ࿑ߦ߅޿ߡ㧘ౝㇱྃ኿㊂߹ߚߪᄖㇱྃ኿㊂߇ᄢ߈ߊߥࠆߦᓥߞߡ㧘ࠝ࠱ࡦỚᐲߪ

࿑ 7 ྃ኿㊂ߣ㒰㔚㔚ᵹߣߩ㑐ଥૐߊߥߞߡ޿ࠆ㧚࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩࠍታ↪ൻߔࠆ

Fig.7 Discharge currents for positive ion creator as a function ofߚ߼ߦߪ㧘㒰㔚㔚ᵹ߇ᄢ߈ߊ㧘ࠝ࠱ࡦỚᐲ߇ૐ޿ߎߣ߇ⷐ᳞

inner jet flow rate and outer jet flow rate.

㪸 㫀㫉㪛㫌㪸㫃㩷㫁㪼㫋 㫀㫆㫅㫀㫑㪼㫉㪂㪟㫀㪾㪿㪟㫀㪾㪿㫍㫆㫃㫋㪸㪾㪼㩷 㫍㫆㫃㫋㪸㪾㪼㫊㫆㫌㫉㪺㪼 㫊㫆㫌㫉㪺㪼䋨㪂䋩䋨㪄䋩㪄㪇㪅㪌㩷㫄㪛 㫌 㪸 㫃㩷 㪡 㪼 㫋 㩷 㪠㫆 㫅 㫀㫑 㪼 㫉㪂㪝㫃㫆㫎㩷㫄㪼㫋㪼㫉㪝㫃㫆㫎㫄㪼㫋㪼㫉㪥㪉㪃㪘㫉㩷㪾㪸㫊㪥㪉㪃㪘㫉㩷㪾㪸㫊㪟 㫀㪾 㪿㫍 㫆 㫃㫋 㪸 㪾 㪼㫊㫆 㫌 㫉㪺 㪼䋨㪂䋩㪄㪟 㫀㪾 㪿㫍 㫆 㫃㫋 㪸 㪾 㪼㫊 㫆 㫌 㫉㪺 㪼䋨㪄䋩㪌㪇㪇㫄 㫄㪝 㫃㫆 㫎㫄 㪼 㫋㪼 㫉㪝 㫃㫆 㫎㫄 㪼 㫋㪼 㫉㪥 㪉㪾㪸㫊㪥 㪉㪾㪸㫊

㪌㪇㪇㫄 㫄㪦 㫑 㫆 㫅 㪼 㩷 㫄 㫆 㫅 㫀㫋 㫆 㫉㪚㪿㪸㫉㪾㪼 㫇㫃㪸㫋㪼 㫄㫆㫅㫀㫋㫆㫉࿑ 5 ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ㒰㔚․ᕈߩ᷹ቯⵝ⟎࿑ 8 ࠝ࠱ࡦỚᐲߩ᷹ቯⵝ⟎Fig.5 Schematic setup for measuring discharge current.

Fig.8 Schematic setup for measuring ozone density.

- 3 -128 (46)3132007 +PPGTLGVHNQYTCVG9 (+ ="OKP?

9(1 =T LG

V HN


㫇㫆㫊㫀㫋㫀㫍㪼㫅㪼㪾㪸㫋㫀㫍㪼㪋㪌㪋㪇㪊㪌㪊㪇㪚㫆㫅㫍㪼㫅㫋㫀㫆㫅㪸㫃㩷㫀㫆㫅㫀㫑㪼㫉㪉㪌㪉㪇㪈㪌㪛㫌㪸㫃㩷㫁㪼㫋㩷㫀㫆㫅㫀㫑㪼㫉㪈㪇㪌㪇"OKQY TCVGP?

㪌㪇㪚㫌㫄㫌㫃㪸㫋㫀㫍㪼㩷㫅㫌㫄㪹㪼㫉㩷㫆㪽㩷㫇㪸㫉㫋㫀㪺㫃㪼㫊㩷㪥㪧 㪲㫇㪸㫉㫋㫀㪺㫃㪼㫊㪴

1 WV G

1\QPGFGPUKV[ &1 =RRO?

࡜ࡦ࠾ࡦࠣ࠲ࠗ࠻࡞㧔⪺⠪ฬ㧘ߚߛߒⶄᢙߩ႐วవ㗡⪺⠪㧗ࠄ㧕㪇㪌㪈㪇㪈㪌㪉㪇㪦㫇㪼㫉㪸㫋㫀㫅㪾㩷㫋㫀㫄㪼㩷㫋㪪 㪲㪿㫆㫌㫉㫊㪴㪉㪌࿑ 10 ⚥Ⓧ⊒Ⴒ☸ሶᢙߣᤨ㑆ߣߩ㑐ଥ
Fig.10Cumulative number of particles generated from theconventional air ionizer and the dual jet ionizer.
࿑ 9 ྃ኿㊂ߣࠝ࠱ࡦỚᐲߣߩ㑐ଥ
Fig.9 Ozone densities for positive ion creator as a function ofinner jet flow rate and outer jet flow rate.

ߎࠇࠄߩ᷹ቯ⚿ᨐࠍ࿑ 10 ߦ␜ߔ㧚ߎߩ࿑߆ࠄ㧘ᱜ⽶ߩࠛࡒ࠶࠲߆ࠄߩ✚⚥Ⓧ⊒Ⴒ☸ሶᢙߪ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽
ࠗࠩߦኻߒߡ 12 ୘㧘ᓥ᧪ဳࠗࠝ࠽ࠗࠩߦኻߒߡ 83 ୘ߢ޽ߐࠇࠆ㧚ᧄ⎇ⓥߢߪ㧘ᄢ᳇ਛߩࠝ࠱ࡦỚᐲ߇ 0.005 ppm ⒟ᐲ

ࠆߎߣ߇ࠊ߆ࠆ㧚ߎߎߢ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ⚥ߢ޽ࠆߎߣࠍ⠨ᘦߒ㧘ࠝ࠱ࡦỚᐲ߇ 0.005 ppm એਅߢ޽ࠇ߫㧘Ⓧ⊒Ⴒ☸ሶᢙߪ㧘ᱜ⽶ߘࠇߙࠇߩࠛࡒ࠶࠲ߦኻߒߡ 7 ୘ ߣࠗࠝ࠽ࠗࠩߦ߅ߌࠆࠝ࠱ࡦ↢ᚑߪ⊝ήߢ޽ࠆߣ⠨߃ߚ㧚ߒߚ

5 ୘ߢ޽ࠅ㧘ࡃ࠶ࠢࠣ࡜࠙ࡦ࠼ߣห⒟ᐲߢ޽ߞߚ޽ߞߚߎߣ

߇ߞߡ㧘ࠝ࠱ࡦỚᐲ߇ 0.005 ppm એਅߢ޽ࠅ㧘ౝㇱྃ኿㊂ߣ
ᄖㇱྃ኿㊂ߣߩ๺߇ᦨዊߣߥࠆྃ኿㊂ࠍᦨㆡྃ኿㊂ߣߒߚ㧚ߎߩ⚿ᨐ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩౝㇱྃ኿㊂ߣᄖㇱࠍ⠨ᘦߔࠆߣ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ⊒Ⴒ☸ሶᢙߪ㧘ᓥ᧪ဳࠗࠝ࠽ࠗࠩߦᲧߴߡ⚂ 1/7 એਅߦૐᷫߢ߈ߚߎߣ߇
ࠊ߆ࠆ㧚

ྃ኿㊂ߩᦨㆡྃ኿㊂ߪ㧘ߘࠇߙࠇ 1.0 " /min ߢ޽ࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚
3.44.

㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩታ↪ᕈ⹏ଔ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߣᓥ᧪ဳࠗࠝ࠽ࠗࠩ

4.1 㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩ⹜૞ߣߩᲧセ৻⥸ߦ DC ဳࠗࠝ࠽ࠗࠩߪ㧘Ᏹߦᱜ߅ࠃ߮⽶ࠗࠝࡦࠍ↢ᚑ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ㒰㔚․ᕈߣࠦࡦ࠲ࡒࡀ࡯ࠪ

ߒߡ޿ࠆ㧚ߎߩࠗࠝ࠽ࠗࠩࠍ೙ᓮࠪࠬ࠹ࡓൻߒߡ㧘ᱜ߹ߚߪ

࡚ࡦ․ᕈࠍ᷹ቯߒߚ㧚ߎߎߢ㧘ࠛࡒ࠶࠲ߪࠪ࡝ࠦࡦࠛࡒ࠶࠲⽶ࠗࠝࡦߩߤߜࠄ߆৻ᣇ㧘ߔߥࠊߜ㒰㔚ߦᔅⷐߥᭂᕈߩࠗࠝߣߒ㧘⓸⚛ߪᦨㆡྃ኿㊂ߢྃ኿ߐߖߚ㧚߹ߚ㧘ࠪ࡝ࠦࡦࠛࡒࡦߛߌࠍ↢ᚑߔࠆߎߣߦࠃࠅ㧘ࠛࡒ࠶࠲߆ࠄߩࠦࡦ࠲ࡒࡀ࡯࠶࠲ࠍ૶↪ߒߚᓥ᧪ဳࠗࠝ࠽ࠗࠩߦߟ޿ߡ߽ห᭽᷹ቯࠍⴕ޿㧘࡚ࠪࡦࠍ⪺ߒߊૐᷫߢ߈ࠆߣ⠨߃ࠄࠇࠆ㧚ߘߎߢ㧘࿑ 11 ߦߎࠇࠄߩ⚿ᨐࠍᲧセ㧘ᬌ⸛ߒߚ㧚␜ߔࠃ߁ߥ㕒㔚᳇೙ᓮࠪࠬ࠹ࡓࠍ⹜૞ߒ㧘⊒Ⴒ☸ሶᢙߩૐᷫࠛࡒ࠶࠲߆ࠄߩ⊒Ⴒ☸ሶᢙߩ᷹ቯߪ㧘࿑ 8 ߦ␜ߒߚࠝ࠱ࡦ

ࠍ⹜ߺߚ㧚ߥ߅㧘ᧄታ㛎ߪ㧘22 ͠㧘⋧ኻḨᐲ 45 %㧘0.3 m/s ߩỚᐲߩ᷹ቯߣห᭽ߩᣇᴺߢⴕߞߚ㧚ߔߥࠊߜ㧘࿑ 8 ߦ␜ߒߚ࠳࠙ࡦࡈࡠ࡯ߩࠢ࡝࡯ࡦ࡞࡯ࡓౝߢⴕߞߚ㧚ⵝ⟎ߩࠝ࠱ࡦࡕ࠾࠲ࠍࡄ࡯࠹ࠖࠢ࡞ࠞ࠙ࡦ࠲ߦ⟎߈឵߃ߡ㧘

4.2 㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩ㒰㔚․ᕈ

ࠗࠝ࠽ࠗࠩࠍ⸳⟎ߒߚኈེౝߩ㔓࿐᳇ࠍࠞ࠙ࡦ࠲ߦๆᒁߒ㧘ߎߩ㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߪනᭂᕈߩࠗࠝࡦߛߌࠍ↢ᚑߒߡ⊒Ⴒ☸ሶᢙࠍ᷹ቯߒߚ㧚ߎߩࠃ߁ߦߒߡ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻

޿ࠆߩߢ㧘Ᏹߦⵍ㒰㔚‛ߩ㔚૏ࠍ࠮ࡦࠨߢ᷹ቯߒ㧘ⵍ㒰㔚‛ࠗࠝ࠽ࠗࠩߣᓥ᧪ဳࠗࠝ࠽ࠗࠩߩߘࠇߙࠇߦኻߒߡ㧘ᱜࠗࠝߩ㒰㔚߇ቢੌߒߚᤨὐߢࠗࠝࡦߩ↢ᚑࠍ஗ᱛߔࠆᔅⷐ߇޽ࠆ㧚ࡦ⊒↢↪ࠛࡒ࠶࠲ߛߌࠍേ૞ߐߖߚ႐ว㧘߅ࠃ߮⽶ࠗࠝࡦ⊒ᧄ⎇ⓥߢߪ㧘ⵍ㒰㔚‛ߩ㔚࿶߇ r30V એਅߦߥߞߚᤨࠍ㒰↢↪ࠛࡒ࠶࠲ߛߌࠍേ૞ߐߖߚ႐วߦߟ޿ߡ᷹ቯࠍⴕߞߚ㧚㔚ቢੌߣቯ⟵ߒߚ㧚߹ߚ㧘㒰㔚ቢੌᤨߦࠗࠝࡦߩ↢ᚑࠍ஗ᱛߥ߅㧘ߎࠇࠄߩ᷹ቯߦ߅޿ߡ߽㧘⊒Ⴒ☸ሶᢙߩࡃ࠶ࠢࠣ࡜࠙ߐߖߚ႐วߦߪ㧘ⓨ㑆ߦ⫾Ⓧߒߚࠗࠝࡦߦࠃߞߡⵍ㒰㔚‛ߩࡦ࠼ߪ㧘0.7×10-4 s-1㧘⒟ᐲߢ޽ߞߚ㧚㔚࿶߇ࠝ࡯ࡃ࡯ࠪࡘ࡯࠻ߔࠆ㧚ߘߎߢ㧘ᧄ⎇ⓥߢߪ㧘ⵍ㒰㔚

129 (47)㪛㫌㪸㫃㩷㫁㪼㫋㩷㫀㫆㫅㫀㫑㪼㫉㪟㫀㪾㪿㫍㫆㫃㫋㪸㪾㪼㫊㫆㫌㫉㪺㪼䋨㪄䋩㪚㫆㫅㫋㫉㫆㫃㫌㫅㫀㫋㪝㫃㫆㫎㫄㪼㫋㪼㫉㪋㪇㪇㪥㫆㫅 㪺㫆㫅㫋㫉㫆㫃㪉㪇㪇㪇㪅㪌㩷㫄㪥㪉㪾㪸㫊㪥㪉㪾㪸㫊㪧㫃㪸㫋㪼 㫍㫆㫃㫋㪸㪾㪼 㪭㪧 㪲㪭 㪴㪟㫀㪾㪿㫍㫆㫃㫋㪸㪾㪼㫊㫆㫌㫉㪺㪼䋨㪂䋩㪍㪇㪇㪝㫃㫆㫎㫄㪼㫋㪼㫉㪇㪄㪉㪇㪇㪄㪋㪇㪇㪭 㪧㪪 㪔㩷㪄㪉㪇㪇 㪭㪄㪍㪇㪇㪭 㪧㪪 㪔㩷㪄㪊㪇㪇㩷㪭㪄㪏㪇㪇㪚㪿㪸㫉㪾㪼 㫇㫃㪸㫋㪼 㫄㫆㫅㫀㫋㫆㫉㪭 㪧㪪 㪔㩷㪇㩷㪭㪭 㪧㪪 㪔㩷㪄㪈㪇㪇㩷㪭㪭 㪧㪪 㪔㩷㪄㪋㪇㪇㩷㪭㪄㪈㪇㪇㪇㪄㪈㪉㪇㪇㪇㪌㪈㪇࿑ 11 㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩ㒰㔚․ᕈߩ᷹ቯⵝ⟎Fig.11㪈㪌㪉㪇㪉㪌㪊㪇㪋㪇㪊㪌

㪜㫃㫀㫄㫀㫅㪸㫋㫀㫅㪾 㫋㫀㫄㪼 㫋㪜 㪲㫊㪴࿑ 12 ࡊ࡟࡯࠻㔚૏ߣ㒰㔚ᤨ㑆ߣߩ㑐ଥ

Schematic setup for measuring static discharge

Fig.12 Plate voltage as a function of eliminating time.

characteristic.

‛߇৻ቯߩ㔚࿶ߦ㆐ߒߚᤨὐߢ㧘ࠗࠝࡦߩ↢ᚑࠍ஗ᱛߐߖࠆ㪍㪇ᱛ㔚࿶ VPS ߣⵍ㒰㔚‛ߩᦨ⚳೔㆐㔚࿶ߣߩ㑐ଥࠍᬌ⸛ߒߚ㧚㪌㪇㪩㪼㫊㫇㫆㫅㫊㪼㩷㫋㫀㫄㪼 㱠 㪲㫊㪴ᣇᴺࠍណ↪ߒߚ㧚ߎߩ㔚࿶ࠍ஗ᱛ㔚࿶ VPS ߣቯ⟵ߒ㧘ߎߩ஗ߥ߅㧘ߎߩ஗ᱛ㔚࿶ VPS ߪࠗࠝ࠽ࠗࠩ૶↪ⅣႺߩ㘑ㅦ㧘ࠛࡒ࠶࠲߆ࠄⵍ㒰㔚‛߹ߢߩ〒㔌╬ߦଐሽߔࠆߣ⠨߃ࠄࠇࠆ㧚ߒߚ߇ߞߡ㧘ታ㓙ߩࠢ࡝࡯ࡦ࡞࡯ࡓߢ૶↪ߔࠆ㓙ߦߪ㧘೨ㅀߩ㘑ㅦ߿〒㔌ࠍᄌൻߐߖࠆᲤߦ஗ᱛ㔚࿶ VPS ࠍ⸳ቯߔࠆᔅⷐ߇޽ࠆ㧚㪥㪼㪾㪸㫋㫀㫍㪼 㫀㫆㫅㪋㪇㪧㫆㫊㫀㫋㫀㫍㪼 㫀㫆㫅㪊㪇㪉㪇㪈㪇࠴ࡖ࡯ࠫࡊ࡟࡯࠻ࡕ࠾࠲ߩ㊄ዻࡊ࡟࡯࠻ (20 pF) ࠍ -1100

㪇V ߢల㔚ߒ㧘ࠗࠝ࠽ࠗࠩߩᱜࠗࠝࡦ↢ᚑ↪ࠛࡒ࠶࠲ߛߌࠍേ㪇㪌㪇㪈㪇㪇㪈㪌㪇㪉㪇㪇㪉㪌㪇㪊㪇㪇㪊㪌㪇㪋㪇㪇㪪㫋㫆㫇 㫍㫆㫃㫋㪸㪾㪼 㫓㩷㪭㪧㪪 㫓㩷㪲㪭㪴૞ߐߖ㧘ࡊ࡟࡯࠻㔚૏ߣᤨ㑆ߣߩ㑐ଥࠍ⺞ߴߚ㧚ߎߎߢ㧘஗ᱛ㔚࿶ VPS ߪ 0 V㧘-100 V㧘-200 V㧘-300 V㧘-400 V ߣߒߚ㧚ߘࠇߙࠇߩ㔚࿶ VPS ߢ஗ᱛߐߖߚ႐วߩᤨ㑆ߣࡊ࡟࡯࠻㔚࿑ 13 ᔕ╵ᤨ㑆ߣ㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩ஗ᱛ㔚࿶ߣߩ㑐ଥ૏ߣߩ㑐ଥࠍ࿑ 12 ߦ␜ߔ㧚ߎߩ࿑ߦ߅޿ߡ㧘ᱜࠗࠝࡦߛߌ

Fig.13 Relation between response time and stop voltage.

ࠍ↢ᚑߒ⛯ߌߚ႐ว㧘ࡊ࡟࡯࠻㔚૏ߪ㧘㒰㔚ߐࠇߚᓟߩㅒᏪ
㔚ߦࠃࠅ+600 V ⒟ᐲߦ㆐ߒߡ޿ࠆ㧚৻ᣇ㧘೙ᓮߒߚ႐วߩᦨ⚳೔㆐㔚૏ߪ r100 V ઃㄭߦ෼᧤ߒߡ޿ࠆ㧚․ߦ㧘஗ᱛ㔚࿶㪈㪌㪇㪇

ࠍ +200 V ߹ߚߪ +300 V ߦߒߚ႐ว㧘ᦨ⚳೔㆐㔚૏ߪ 0 V㪈㪇㪇㪇㪧㫃㪸㫋㪼 㫍㫆㫃㫋㪸㪾㪼㩷㪭 㪧㩷㪲㪭㪴ઃㄭߦ෼᧤ߒߡ޿ࠆߎߣ߇ࠊ߆ࠆ㧚ᧄႎߢߪ㧘ࡊ࡟࡯࠻㔚૏߇ r1000 V ߆ࠄ ±30 V એౝߦߥࠆ߹ߢߩᤨ㑆ࠍᔕ╵ᤨ㑆ߣቯ⟵ߒߚ㧚ߘߎߢ㧘࿑ 12 ߆ࠄࡊ࡟࡯࠻㔚૏߇ ±30 V એౝߦߥࠆ߹ߢߩᤨ㑆ࠍ᳞߼㧘ߎߩᤨ㑆ߣ஗ᱛ㔚࿶ߣߩ㑐ଥࠍ᳞߼ߚ㧚ߎߩ⚿ᨐࠍ࿑ 13 ߦ␜ߔ㧚ߎ㪚㫆㫅㫋㫉㫆㫃 㫊㫐㫊㫋㪼㫄㪌㪇㪇㪇㪄㪌㪇㪇ߩ࿑ߦ߅޿ߡ㧘ᔕ╵ᤨ㑆߇ 60 s ࠍ⿥߃ߚ႐วߦߪ㧘ߔߴߡ㪄㪈㪇㪇㪇

60 s ߩὐߦࡊࡠ࠶࠻ߒߚ㧚ᱜࠗࠝࡦߦࠃࠆ㒰㔚ߩ႐ว㧘஗ᱛ㪄㪈㪌㪇㪇㪛㫌㪸㫃 㫁㪼㫋 㫀㫆㫅㫀㫑㪼㫉㪇㔚࿶߇ -130 V ߆ࠄ -200 V ߩ▸࿐ߢᔕ╵ᤨ㑆߇⍴ߊߥߞߡ㪌㪈㪇㪜㫃㫀㫄㫀㫅㪸㫋㫀㫅㪾 㫋㫀㫄㪼 䌴㪜㩷㪲㫊㪴㪈㪌㪉㪇޿ࠆߎߣ߇ࠊ߆ࠆ㧚৻ᣇ㧘⽶ࠗࠝࡦߦࠃࠆ㒰㔚ߩ႐ว㧘஗ᱛ㔚࿶߇ +50 V ߆ࠄ +80 V ߩ▸࿐ߢᔕ╵ᤨ㑆߇⍴ߊߥߞߡ޿

࿑ 14 㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߣ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩࠆߎߣ߇ࠊ߆ࠆ㧚ߎߩ⚿ᨐ߆ࠄ㧘㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩᦨㆡߩࡊ࡟࡯࠻㔚૏ߣ㒰㔚ᤨ㑆ߣߩ㑐ଥ஗ᱛ㔚࿶ߪ㧘ᱜࠗࠝࡦߩ↢ᚑߦኻߒߡ -140 V ઃㄭ㧘⽶ࠗࠝFig.14 Plate voltage as a function of eliminating time for the staticࡦߩ↢ᚑߦኻߒߡ +60 V ઃㄭߢ޽ࠆߎߣ߇ࠊ߆ࠆ㧚

control system and the dual jet ionizer.
- 5 -130 (48)3132007࡜ࡦ࠾ࡦࠣ࠲ࠗ࠻࡞㧔⪺⠪ฬ㧘ߚߛߒⶄᢙߩ႐วవ㗡⪺⠪㧗ࠄ㧕ߎߩࠃ߁ߥ᧦ઙߢേ૞ߐߖߚ㓙ߩ㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߣ࠺

ߣ߇න૏㔚᳇㊂ࠍ㒰㔚ߔࠆ㓙ߦ⊒↢ߔࠆ⊒Ⴒ☸ሶᢙߩᲧࠍߣ

ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ㒰㔚․ᕈࠍ࿑ 14 ߦ␜ߔ㧚ߎߩࠆߣ㧘1/5.3 ߣߥࠆ㧚ߔߥࠊߜ㧘න૏㔚᳇㊂ࠍ㒰㔚ߔࠆ㓙ߦ⊒࿑ߦ߅޿ߡ㧘೙ᓮࠪࠬ࠹ࡓߩᔕ╵ᤨ㑆ߪ㧘ߔߥࠊߜࡊ࡟࡯࠻

↢ߔࠆ⊒Ⴒ☸ሶᢙߪ㧘㕒㔚᳇೙ᓮࠪࠬ࠹ࡓࠍ૶↪ߔࠆߎߣߦ

㔚૏߇ -1000 V ߆ࠄ -30 V ߦߥࠆ߹ߢߩᤨ㑆ߪ㧘4.5 s㧘ࠃࠅ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ⚂ 1/5 ߦૐᷫߢ߈ࠆߎ+1000 V ߆ࠄ +30 V ߦߥࠆ߹ߢߩᤨ㑆ߪ㧘4.7 s ߢ޽ࠆ㧚ߣ߇ࠊ߆ࠆ㧚৻ᣇ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩࠍ↪޿ߡ㧘ᱜ⽶ߩࠗࠝ
5.

ࡦࠍหᤨߦ↢ᚑߒߚ႐วߩᔕ╵ᤨ㑆㧘ߔߥࠊߜࡊ࡟࡯࠻㔚૏߹ߣ߼ࠦࡠ࠽᡼㔚ᑼࠗࠝ࠽ࠗࠩߩૐࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦൻߦߟ޿

߇ -1000 V ߆ࠄ -30 V ߦߥࠆ߹ߢߩᤨ㑆ߪ㧘12.3 s㧘+1000V ߆ࠄ +30 V ߦߥࠆ߹ߢߩᤨ㑆ߪ㧘12.1 s ߢ޽ࠆ㧚ߡᬌ⸛ࠍⴕߞߚ㧚ߎߩ⚿ᨐ㧘ᓥ᧪ဳࠗࠝ࠽ࠗࠩ߇⊒↢ߔࠆࠦ

4.3ࡦ࠲ࡒࡀ࡯࡚ࠪࡦߪ㧘ࠛࡒ࠶࠲᧚ᢱࠍࠪ࡝ࠦࡦߦߔࠆߎߣߢ㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߣ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗ
ࠩߣߩࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦ․ᕈߩᲧセ

1/5㧘᭴ㅧࠍ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߦߔࠆߎߣߢ 1/7㧘㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߣ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߣߩࠦ

ࠗࠝ࠽ࠗࠩࠍ೙ᓮࠪࠬ࠹ࡓൻߔࠆߎߣߢ 1/5 ⒟ᐲߦૐᷫߢ

ࡦ࠲ࡒࡀ࡯࡚ࠪࡦ․ᕈߩᲧセߪ㧘ߘࠇߙࠇߩࠗࠝ࠽ࠗࠩ߇න߈ࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚ߔߥࠊߜ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗ૏㔚᳇㊂ࠍ㒰㔚ߔࠆ㓙ߦ⊒Ⴒߔࠆ☸ሶᢙߢⴕߞߚ㧚ࠝ࠽ࠗࠩࠍ↪޿ߚ㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦ㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߣ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ⊒Ⴒ☸ሶᢙߩᲧセࠍ⹜ߺߚ߇㧘੹࿁ߩ᷹ቯ⚿ᨐߢߪ㧘ਔ⠪ߩ⊒Ⴒߪ㧘ᓥ᧪ဳࠗࠝ࠽ࠗࠩࠍⓨ᳇㔓࿐᳇ਛߢ૶↪ߒߚ႐วߩ
1/180 ߦߥࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚ߢ޽ࠅ㧘☸ሶᢙߪ㧘ࡃ࠶ࠢࠣ࡜࠙ࡦ࠼ߣห⒟ᐲ
㧔 0.7×10-4 s-1 㧕᣿⏕ߥ᦭ᗧᏅߪ⹺߼ࠄࠇߥ߆ߞߚ㧚ߘߎߢ㧘㕒㔚᳇೙ᓮࠪࠬ
࠹ࡓߢߪേ૞ᤨߦᱜ⽶ߤߜࠄ߆৻ᣇߩࠛࡒ࠶࠲߇േ૞ߒߡ޿
ࠆ߇㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߢߪᏱߦਔᣇߩࠛࡒ࠶࠲
߇േ૞ߒߡ޿ࠆߎߣࠍ⠨ᘦߒ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩ
ߩ⊒Ⴒ☸ሶᢙߪ㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩ 2 ୚ߢ޽ࠆߣߒߡᬌ
⸛ࠍㅴ߼ߚ㧚ߔߥࠊߜ㧘㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩන૏ᤨ㑆ᒰࠅߩ⊒Ⴒ☸ሶᢙߪ 0.7×10-4 s-1㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩߩ
න૏ᤨ㑆ᒰࠅߩ⊒Ⴒ☸ሶᢙߪ 1.4×10-4 s-1 ߣߒߡᬌ⸛ࠍⴕߞ
ߚ㧚㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߩᔕ╵ᤨ㑆ߪᱜࠗࠝࡦ↢ᚑ↪ࠛࡒ࠶࠲ߢߪ 4.5 s㧘⽶ࠗࠝࡦ↢ᚑ↪ࠛࡒ࠶࠲ߢߪ 4.7 s ߢ޽ߞߚ㧚ߒߚ߇ߞߡ㧘ታല⊛ߥ㒰㔚㔚ᵹߪ +4.3 nA㧘-4.1 nA ߣߥࠅ㧘ߘߩ⛘ኻ୯ߩᐔဋߪ 4.2 nA ߣߥࠆ㧚ߎߩ㒰㔚㔚ᵹߣන૏ᤨ㑆ᒰࠅߩ⊒Ⴒ☸ሶᢙߣߩᲧ߆ࠄන૏㔚᳇㊂ࠍ㒰㔚ߔࠆ㓙ߦ⊒Ⴒߔࠆ☸ሶᢙࠍ߽ߣ߼ࠆߣ㧘1.7×104 ߣߥࠆ㧚߹ߚ㧘࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩ߇න૏㔚᳇㊂ࠍ㒰㔚ߔࠆ㓙ߦ⊒↢ߔࠆ⊒Ⴒ☸ሶᢙࠍห᭽ߩᣇᴺߢ᳞߼ࠆߣ㧘ߘߩ୯ߪ 9.0×104 ߣߥࠆ㧚ߎߎߢ㧘㕒㔚᳇೙ᓮࠪࠬ࠹ࡓߣ࠺ࡘࠕ࡞ࠫࠚ࠶࠻ࠗࠝ࠽ࠗࠩෳ⠨ᢥ₂
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