1 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO01
ＯＡ－１００SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product name

ＯＡ－１００

Product code

EO01

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）

No data available

Label element
hazard Pictograms

No data available

Signal word

No data available

Dangerous goods hazard
information

No data available

Precautionary statement【Safety measures】

Obtain special instructions before use.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Do not breathe dust/fume/gas/mist/vapours/spray.

【First-aid measures】

If swallowed：
Call a poison center or doctor/physician if you feel unwell.
Rinse mouth.
If in eyes：
Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
Immediately call poison center or doctor/physician【Storage】

Store in a well-ventilated place, keep container tightly closed.
Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-2 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO01
ＯＡ－１００SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date

Composition/information on ingredients

Substance/Mixture

MixtureChemical nameTantalum oxide

Tantalum

Chemical formula

Ta2O5

TaConcentration or concentration
range

Ta2O5 ： 78- 88%
Ta ： 12- 22%
Total = 100%

CAS No.

1314-61-0

7440-25-7

TSCA Inventry

Tantalum oxide (Ta2O5)

Tantalum

EINECS number

215-238-2

231-135-5

Radioactive information

Radioactive substances are not used as the material. Therefore, there is noreason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

2013/10/16
2024/3/15

Firefighting measures

Suitable extinguishing media

This product itself is not flammable.

Unsuitable extinguishing media

No data available

Specific hazards

No data available

Specific extinguishing methods

In the case of a fire in the periphery, the portable container is quickly moved to asafe place.

Special protective equipment for
firefighters

Wear suitable protective equipment (gloves, glasses and a mask) in fire-fighting.

3 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO01
ＯＡ－１００SAFETY DATA SHEET
rev. 8.0

SECTION 6

Date of Issue
Revised Date

2013/10/16
2024/3/15

Accidental release measures

Personal precautions, protective
equipment, and emergency
proceduresProtection equipment (specified as those in which the properties of the productare suitable) worn during operation so that airborne droplets, etc., do not adhere
to the skin and dusts and gases are not absorbed.

Environmental precautions

The leakage may not directly flow into rivers or sewage.

Methods and material forcontainment and cleaning up

The leaked material is scooped up, or swept up and gathered to be recovered ina paper bag or a drum.
After recovery, a small amount of the residue is absorbed in sediment, sawdust,etc.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

Safety handling precautions

Handling work must be practiced in a room where there is a local or total
ventilation facility.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,including any incompatibilities

SECTION 8

Safe storage conditions

Store in a well-ventilated place. Keep container tightly closed.

Safety packaging material

No data available

Exposure controls/personal protection
Ta2O5TaTWA 5 mg/㎥ (as Ta)(2004 edition)

Unestablished(2015 version)

Permissible concentration
ＡＣＧＩＨ

Appropriate engineering controls

Use sealed devices, equipment, or a local exhaust ventilation as much aspossible.

Individual protection measures,such as personal protective
equipment
Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

4 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO01
ＯＡ－１００SAFETY DATA SHEET
rev. 8.0

Skin protection

SECTION 9

Date of Issue
Revised Date

2013/10/16
2024/3/15

Protective clothing

Physical and chemical properties

Appearance
Physical state

SolidForm

Pellets, granules

ColourGrayOdourNone

Ta2O5Ta

Melting point/freezing point

1862～1882℃

2996℃

Boiling point or initial boiling point
and boiling range

No data available

5425℃Flammability

No data available

No data available

Upper/lower flammability orexplosive limits

No data available

No data available

Flash point

No data available

No data available

Auto-ignition temperature

No data available＞250℃

Decomposition temperature

No data available

No data available

pH

No data available

No data available

Kinematic viscosity

No data available

No data available

Water

Insoluble

Insoluble

Other solvents

No data available

No data available

Partition coefficient: noctanol/water

No data available

No data available

Vapour pressure

No data available

1 kPa (3,024℃)、10 Pa (3,324℃)、100 Pa(3,684℃)、1 kPa (4,122℃)、10 k Pa(4,666℃)、100 kPa (5,361℃) (HSDB (2015))

Density and/or relative density

8.2

No data available

Solubility（Density）※ 6.0 ~ 7.0 (pellet) as OA-100

Relative vapor density

No data available

No data available

Particle characteristics

No data available

No data available

Other information

No data available

No data available5 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO01ＯＡ－１００

SAFETY DATA SHEET
rev. 8.0

SECTION 10

Date of Issue
Revised Date

2013/10/16
2024/3/15

Stability and reactivity
Ta2O5TaReactivity

No data available

There might be the dust explosion with aminute particle.
Nonflammable in bulk form.

Chemical stability

It is stable in storage conditions and normal No data available
handling.

Possibility of hazardous reactions

Violently react with bromine trifluoride. ItIt produce strong oxidizer, bromine
reacts violently with chlorine trifluoride, emit trifluoride, fluorine and a dangerous reaction.
flames.
This occurs at around 410 ℃, reaction withlithium increases to 595 ℃.

Conditions to avoid

No data available

No data available

Incompatible materials

Bromine trifluoride, chlorine trifluoride,lithium

No data available

Hazardous decomposition products No data available

SECTION 11

No data available

Toxicological information
Ta2O5Ta

Acute toxicity(oral)

Oral - Rat LD50: 8g/kg, intraperitoneal - rat For a murine LD50 price the report (RTECS
LD:> 5g/kg(Access on September 2015)) with 595
Oral - Mouse LD50:> 4g/kg
mg/kg But, there is it.

Acute toxicity(dermal)

No data available

No data available

Acute toxicity （Inhalation: Gases）

If inhaled, to stimulate the respiratory
system and mucous membranes.

Solid (GHS definition)

Acute toxicity （Inhalation:Vapours）

No data available

Solid (GHS definition)

Acute toxicity （Inhalation: Dustsand mists）

No data available

No data available

Skin corrosion/irritation

No data available

No data available

Serious eye damage/irritation

No data available

No data available

Respiratory or skin sensitization

No data available

No data available

Germ cell mutagenicity

No data availableNo data available6 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO01
ＯＡ－１００SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Carcinogenicity

No data available

There is a description that for local
influence, 714 days after implantation of
metal tantalum into the rats, there is areport that formation of malignant
fibrosarcoma was found in 2 out of 50 sites,
but objection and controversy occurredagainst the report (PATTY (6th, 2012)). In
addition, there is also a report that for theevaluation of the safety of a novel medical
material for implantation in the body, a groupin which pellets of this substance wereimplanted into the bodies of rats (1 mm x 2mm, cylindrical) was set as a negativecontrol. Up to 20 pellets wereintramuscularly implanted in rats, however,tumor development was not observed(PATTY (6th, 2012)). Regarding
carcinogenicity of this substance, there are
no classification results by otherorganizations. From the above, it wasclassified as "Classification not possible"
due to lack of data for this hazard class.

Reproductive toxicity

No data available

Classification not possible due to lack ofdata. Besides, there is a report that 20
pellets of this substance, 1-2 mm, wereimplanted into the bodies of male rats, andthey were observed for a period
corresponding to about 21% of their lifetime,
but no adverse effects on the fertility andthe quality of sperm (concentration, motility)
in males were seen (PATTY (6th, 2012)).

Specific target organ toxicity(single No data available
exposure)

Base on the description that this substance
may be irritating to the respiratory tract(ACGIH (7th, 2001)), it was classified in
Category 3 (respiratory tract irritation).

7 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO01
ＯＡ－１００SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Specific target organ
toxicity(repeated exposure)

No data available

Classification not possible due to lack ofdata.
Besides, there is a report that the passivityof tantalum metal to biological tissues wassufficiently demonstrated by long-term use
in surgical treatment in animals and humans(ACGIH (7th, 2001), DFGOT Vol.16 (2001),
PATTY (6th, 2012)). In animals, it is reported
that implantation of tantalum plates orscrews did not cause inflammation andedema (ACGIH (7th, 2001), DFGOT Vol.16(2001), PATTY (6th, 2012)), and there is areport that on the insertion of tantalum
plates into the bones of dogs and rabbits for
3 weeks to 3 months, no evidence for
irritation of the bone and soft tissue wasseen in microscopic and X-ray examinations(ACGIH (7th, 2001), DFGOT Vol.16 (2001),
PATTY (6th, 2012)).
On the other hand, as one report showing afew effects, it is reported that in patients
who had orbital implants, pain, headache,mucopurulent eye discharge, diffuse
conjunctival inflammation, and erosion oftissues surrounding the implants wereobserved 10-15 years after the implantation(PATTY (6th, 2012)).

Aspiration hazard

No data available

No data available

Other information

No data available

SECTION 12

Ecological information
Ta2O5TaHazardous to the aquatic
environment Shortterm(acute)No data available

No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data availablePersistence and degradablility

No data available

No data available

Bioaccumulative potential

No data available

No data available

Mobility in soil

No data available

No data available

Hazard to the ozone layer

No data available

No data available

Other adverse effects

No data available

No data available

Toxicity

SECTION 13

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

8 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO01
ＯＡ－１００SAFETY DATA SHEETrev. 8.0

Contaminated container andcontaminated packaging

SECTION 14

Date of Issue
Revised Date

2013/10/16
2024/3/15

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

Transport information
Ta2O5

TaUN number

Not applicableNot applicable

UN proper shipping nameNot applicableNot applicable

UN classification

Not applicableNot applicable

Transport hazard class

Not applicableNot applicable

Packing group

Not applicableNot applicable

Hazardous to the aquaticenvironment

No data available

No data available

Maritime transport in bulk
according to IMO instruments

No data available

No data available

Japanese lows and regulations

Land regulation information Not applicable
Maritime regulatory information nonhazardous materials
Aviation regulatory information nonhazardous materials

Refer to “15. Regulatory information.”

Special precautions for users

No data available

Requires retention of yellow card whentransporting.
When transporting, protect from direct
sunlight and take on cargo without breakageof container, corrosion and leakage.
Do not stack heavy good thereupon.

Special Provisions--

International regulation

SECTION 15

Regulatoly information（Japan）
Ta2O5Ta

Occupational Safety and Health
Law

There is it in the case of an application oran application

There is it in the case of an application oran application

PRTR Law

Not applicableNot applicable

Poisonous and Deleterious
Substances control Law

Not applicableNot applicable

Labor Standards Act

Not applicable

There is it in the case of an application oran application

Chemical substances control Law

Not applicableNot applicable

Fire fighting Law

Not applicable

There is it in the case of an application oran application

Air Pollution Control Act

Not applicableNot applicable9 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO01
ＯＡ－１００SAFETY DATA SHEETrev. 8.0

Date of Issue
Revised Date

Water Pollution Prevention Act

Not applicableNot applicable

Water Supply Act

Not applicableNot applicable

Sewerage Act

Not applicableNot applicable

Marine Pollution Prevention Law

Not applicableNot applicable

Waste Management and Public
Cleansing Act

Not applicableNot applicable

Note

Ensure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16

2013/10/16
2024/3/15

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)