1 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EZ03
ＺｒＯ２

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product name

ＺｒＯ２

Product code

EZ03

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Classification not possible

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：EZ03
ＺｒＯ２

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)

Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Classification not possible

Respiratory sensitization

Classification not possible

Skin sensitization

Category 1

Germ cell mutagenicity

Classification not possible

Carcinogenicity

Classification not possible

Reproductive toxicity

Classification not possible

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(singleexposure)Classification not possible

Specific target organ toxicity(repeatedexposure)Classification not possible

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Exclamation
Exclamation

Signal word

Warning

Dangerous goods hazard
information

May cause an allergic skin reaction.

Precautionary statements【Safety measures】

Avoid breathing dust/fume/gas/mist/vapours/spray.
Contaminated work clothing should not be allowed out of the workplace.
Wear Protective glovess/protective clothing/eye protection/face protection.

2013/10/162024/3/15

3 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EZ03
ＺｒＯ２

SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date【First-aid measures】

IF ON SKIN：Wash with plenty of soap and water.
Specific treatment .
If skin irritation or rash occurs: Get medical advice/attention.
Take off contaminated clothing and wash it before reuse.

【Storage】-【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-Composition/information on ingredients

Substance/Mixture

MixtureChemical name

Zirconium oxide

Chemical formula

ZrO2

Concentration or concentration
range

99.9< （include HfO2）

CAS No.

1314-23-4

TSCA Inventry

Zirconium oxide (ZrO2)EINECS number

215-227-2

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

Firefighting measures

Suitable extinguishing media

Water spray, foam, carbon dioxide, powder fire extinguisher.

2013/10/16
2024/3/15

4 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EZ03
ＺｒＯ２

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Unsuitable extinguishing media

Because a fire might spread through the outskirts, It avoid direct stick irrigation.

Specific hazards

As a general precaution, in the case of powdered materials, dust explosions canbe caused under certain conditions.

Specific extinguishing methodsCut off the source of combustion to the origin of the fire, and use a fire
extinguishing agent to extinguish the fire.
Cool surrounding tanks, buildings, etc. by spraying water to prevent the spread offire.
It performs the fire fighting from windward.
Restrict access to the area around the fire location to persons other than those
involved with the fire.
If it is not dangerous to do so, move the container out of the fire area.

Special protective equipment for
firefighters

Wear appropriate self-contained equipment for respiratory organ protection andprotective clothing (heat-resistant) for eye and skin protection during firefighting
operations.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
procedures

It prohibits the entrance except the person concerned.
The worker wears appropriate personal protective equipment (in item of"8.revelation prevention and protection measures" reference) and avoids eyes,contact and inhalation to skin.

Environmental precautions

It avoids an outflow to the environmental average of the product to havepossibilities to influence neighboring environment.

Methods and material forcontainment and cleaning up

Sweep up scattered material or use suction by a vacuum cleaner or the like toprevent scattering and dust emission as much as possible, and collect thematerial in an empty container.
No eating and drinking in the vicinity of handling and storage areas.
Promptly remove all sources of ignition (no smoking, sparks, or flames in thevicinity).
Prevent inflow into drains, sewers, basements, or closed areas.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

Safety handling precautions

Avoid breathing dust/fume/gas/mist/vapours/spray.
Wear Protective gloves/protective clothing/eye protection/face protection.
Avoid generating dust.

Avoidance of contact

No data available

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

5 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EZ03
ＺｒＯ２

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Conditions for safe storage,
including any incompatibilities
Safe storage conditions

Safety packaging material

SECTION 8

The storage area shall be equipped with the necessary lighting and ventilationequipment to store or handle dangerous or hazardous substances.
To take preventive measures against electrostatic discharge.
Storeroom
temperaturetemperatures
It usesatthe
container
which away
it canfrom
seal highup without
damageandandhumidity.
the leak.

Exposure controls/personal protection
ZrO2

Permissible concentration
ＡＣＧＩＨ

Appropriate engineering controls

TLV-TWA: 5 mg/㎥
TLV-TWA: 10 mg/㎥
(as zirconium and compound, zirconium)(2015 version)
In the work shop which dust produces, it uses a device, an apparatus sealed up
by all means or a local ventilator.

Individual protection measures,such as personal protectiveequipment

SECTION 9Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

SolidForm

Pellets, granules

ColourWhiteOdour

None

ZrO2
Melting point/freezing point

2,680℃ (Merck(15th,2013))

Boiling point or initial boiling point
and boiling range

4300℃

Flammability

No data available

Upper/lower flammability or
explosive limits

No data available

Flash point

Noninflammability (GESTIS (2015))

6 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EZ03
ＺｒＯ２

SAFETY DATA SHEET
rev. 8.0

Auto-ignition temperature

Noninflammability (GESTIS (2015))

Decomposition temperature

No data available

pH

No data available

Kinematic viscosity

No data available

Solubility
Water

Insoluble

Other solvents

No data available

Partition coefficient: noctanol/water

No data available

Vapour pressure

No data available

Density and/or relative density

No data available（Density）※ 3.90 ~ 5.15 (pellet) as ZrO2

Relative vapor density

No data available

Particle characteristics

No data available

Other information

No data available

SECTION 10

Stability and reactivity
ZrO2

Reactivity

No data available

Chemical stability

No data available

Possibility of hazardous reactions

No data available

Conditions to avoid

No data available

Incompatible materials

No data available

Hazardous decomposition products No data available

SECTION 11

Toxicological information
ZrO2

Acute toxicity(oral)

No data available

Acute toxicity(dermal)

No data available

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Acute toxicity （Inhalation:Vapours）

Solid (GHS definition)

Acute toxicity （Inhalation: Dustsand mists）

No data available

Skin corrosion/irritation

No data available

Date of Issue
Revised Date

2013/10/16
2024/3/15

7 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EZ03
ＺｒＯ２

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Serious eye damage/irritation

No data available

Respiratory or skin sensitization

The classification is not possible due to lack of data.
Besides, in DFGOT vol. 12 (1999), zirconium and its compounds are classified asa respiratory sensitizer from the information on zirconium and other zirconium
compounds, but this substance was classified as "Classification not possible"
due to no information on the substance.
It is reported that this substance causes Granulomatous skin reactions inhumans (DFGOT vol. 12 (1999)). In DFGOT vol. 12 (1999), zirconium and its
compounds are classified as a sensitizer (Sah). From the above, this substancewas classified in Category 1.

Germ cell mutagenicity

No data available

Carcinogenicity

As described in this hazard class for zirconium (CAS number: 7440-67-7), ACGIH
classified zirconium and its compounds in A4 in carcinogenicity (ACGIH (7th,2001)). Therefore, this substance was classified as "Classification not possible"
for this hazard class.

Reproductive toxicity

No data available

Specific target organ toxicity(single No data available
exposure)
Specific target organtoxicity(repeated exposure)

As for humans, it is reported that effects on lungs were not observed in workers
exposed to this substance (DFGOT vol. 12 (1999)).
On the other hand, changes in the lung (asthma, bronchitis, pneumoconiosis,sarcoid granulomatosis, granulomatous interstitial pneumonia) were reported, but
it is reported that association with this substance is not clear because they werealso exposed to other substances that could cause lung damage (DFGOT vol. 12(1999)).
However, there are cases where zirconium was confirmed in granulomatous
lesions in the lungs of three, and extrinsic allergic alveolitis was observed just inone. It is reported that histological examination of the lungs revealed "variousstages of epithelioid cell granuloma induced by foreign matter" with foreign
matter inclusions in giant cells and fibrosis, and the principal component offoreign matter is zirconium, and similar changes were also found in skin, andgranulomatous lesions were observed in mammary and axillary lymph nodes(DFGOT vol. 12 (1999)).
As for experimental animals, it is reported that toxic effects were not found in an
inhalation toxicity test using rats, rabbits, dogs, guinea pigs, and cats (DFGOT vol.
12 (1999), ACGIH (7th, 2001)). It is also reported that in a diet administration test
using rats, toxic effects were not observed (DFGOT vol. 12 (1999)).
As above, because effects of this substance cannot be denied completely inhumans, the substance was classified as "Classification not possible."

Aspiration hazard

No data available

Other information

No data available

SECTION 12

Ecological information
ZrO2Toxicity
Hazardous to the aquatic
environment Shortterm(acute)No data available8 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EZ03
ＺｒＯ２

SAFETY DATA SHEET
rev. 8.0

Hazardous to the aquatic
environment Longterm(chronic)

No data available

Persistence and degradablility

No data available

Bioaccumulative potential

No data available

Mobility in soil

No data available

Hazard to the ozone layer

No data available

Other adverse effects

No data available

SECTION 13

Date of Issue
Revised Date

2013/10/16
2024/3/15

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
ZrO2

International regulation
UN number

Not applicable

UN proper shipping nameNot applicable

UN classification

Not applicable

Transport hazard class

Not applicable

Packing group

Not applicable

Hazardous to the aquaticenvironment

No data available

Maritime transport in bulk
according to IMO instruments

No data available

Japanese lows and regulations

Land regulation information Not applicable
Maritime regulatory information non-hazardous materials
Aviation regulatory information non-hazardous materials

Special precautions for users

Requires retention of yellow card when transporting.
When transporting, protect from direct sunlight and take on cargo without
breakage of container, corrosion and leakage.

Special Provisions-9 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EZ03
ＺｒＯ２

SAFETY DATA SHEETrev. 8.0

SECTION 15

Date of Issue
Revised Date

2013/10/16
2024/3/15

Regulatoly information（Japan）
ZrO2

Occupational Safety and Health
Law

There is it in the case of an application or an application

PRTR Law

Not applicable

Poisonous and Deleterious
Substances control LawNot applicable

Labor Standards Act

There is it in the case of an application or an application

Chemical substances control Law

Not applicable

Fire fighting Law

Not applicable

Air Pollution Control Act

Not applicable

Water Pollution Prevention Act

Not applicable

Water Supply Act

Not applicable

Sewerage Act

Not applicable

Marine Pollution Prevention Law

Not applicable

Waste Management and Public
Cleansing Act

Not applicable

NoteEnsure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)