1 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO11
ＯＭ－６

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product nameＯＭ－６

Product code

EO11Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Classification not possible

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO11
ＯＭ－６

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)

Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Classification not possible

Respiratory sensitization

Classification not possible

Skin sensitization

Category 1

Germ cell mutagenicity

Classification not possible

Carcinogenicity

Classification not possible

Reproductive toxicity

Classification not possible

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(singleexposure)

Category 3

Specific target organ toxicity(repeatedexposure)

Category 1

Aspiration hazard

Classification not possibleHazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Exclamation

Health Hazard

感嘆符

健康有害性

Signal word

DangerDangerous goods hazard
information

May cause an allergic skin reaction.
May cause respiratory irritation.
Causes damage to organs through prolonged or repeated exposure Lungs.

2013/10/16
2024/3/15

3 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO11
ＯＭ－６

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Precautionary statements

SECTION 3【Safety measures】

Do not breathe dust/fume/gas/mist/vapours/spray.
Avoid breathing dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Use only outdoors or in a well-ventilated area.
Contaminated work clothing should not be allowed out of the workplace.
Wear Protective glovess/protective clothing/eye protection/face protection.

【First-aid measures】

IF ON SKIN：Wash with plenty of soap and water.
IF INHALED: Remove person to fresh air and keep comfortable for breathing.
IF exposed or concerned：Call poison center or doctor/physician.
Call poison center or doctor/physician if you feel unwell.
Get medical advice/attention if you feel unwell.
Specific treatment .
If skin irritation or rash occurs: Get medical advice/attention.
Take off contaminated clothing and wash it before reuse.

【Storage】

Store in a well-ventilated place. Keep container tightly closed.
Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-Composition/information on ingredients

Substance/Mixture

MixtureChemical name

Zirconium oxide

Aluminum oxide

Chemical formula

ZrO2

Al2O3

Concentration or concentration
range

ZrO2 ： 66.5- 76.5%
Al2O3 ： 23.5- 33.5%
Total = 100%

CAS No.

1314-23-4

1344-28-1

TSCA Inventry

Zirconium oxide (ZrO2)

Aluminum oxide (Al2O3)EINECS number

215-227-2

215-691-6

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

2013/10/16
2024/3/15

4 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：EO11ＯＭ－６

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised DateIngestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

2013/10/16
2024/3/15

Firefighting measures

Suitable extinguishing media

This product itself is not flammable.

Unsuitable extinguishing media

No data available

Specific hazards

No data available

Specific extinguishing methods

In the case of a fire in the periphery, the portable container is quickly moved to asafe place.

Special protective equipment for
firefighters

Wear suitable protective equipment (gloves, glasses and a mask) in fire-fighting.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
proceduresProtection equipment (specified as those in which the properties of the productare suitable) worn during operation so that airborne droplets, etc., do not adhere
to the skin and dusts and gases are not absorbed.

Environmental precautions

The leakage may not directly flow into rivers or sewage.

Methods and material forcontainment and cleaning up

The leaked material is scooped up, or swept up and gathered to be recovered ina paper bag or a drum.
After recovery, a small amount of the residue is absorbed in sediment, sawdust,etc.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

Safety handling precautions

Handling work must be practiced in a room where there is a local or total
ventilation facility.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

5 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO11
ＯＭ－６

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Conditions for safe storage,
including any incompatibilities

SECTION 8Safe storage conditions

Store in a well-ventilated place. Keep container tightly closed.
Store locked up.

Safety packaging materialNo data available

Exposure controls/personal protection
ZrO2

Al2O3

TLV-TWA: 5 mg/㎥
TLV-TWA: 10 mg/㎥
(as zirconium and compound, zirconium)(2015 version)

TWA 1 mg/㎥(R),STEL -Permissible concentration
ＡＣＧＩＨ

Appropriate engineering controls

Use sealed devices, equipment, or a local exhaust ventilation as much aspossible.

Individual protection measures,such as personal protective
equipment

SECTION 9Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

Solid

FormPellets, granules

ColourWhiteOdour

None

ZrO2

Al2O3

Melting point/freezing point

2,680℃ (Merck(15th,2013))

2072℃

Boiling point or initial boiling point
and boiling range

4300℃

2980℃

Flammability

No data available

No data available

Upper/lower flammability or
explosive limits

No data available

No data available

Flash point

Noninflammability (GESTIS (2015))

Noncombustibility

2013/10/16
2024/3/15

6 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO11
ＯＭ－６

SAFETY DATA SHEET
rev. 8.0

Date of IssueRevised Date

2013/10/16
2024/3/15

Auto-ignition temperature

Noninflammability (GESTIS (2015))

Noncombustibility

Decomposition temperature

No data available

No data available

pHNo data available

No data available

Kinematic viscosity

No data available

No data available

Water

Insoluble

Insoluble

Other solvents

No data available

The slightly soluble in non-polar organicsolvent

Partition coefficient: noctanol/water

No data available

No data available

Vapour pressure

No data available

0.073Pa (mp.)

Density and/or relative density

No data available

3.97

Solubility（Density）※3.0 ~ 3.8 (pellet) as OM-6

Relative vapor density

No data available

No data available

Particle characteristics

No data available

No data available

Other information

No data available

No data available

ZrO2

Al2O3Reactivity

No data available

No data available

Chemical stability

No data available

Stability

Possibility of hazardous reactions

No data available

Possibility of hazardous reaction isnegligible.

Conditions to avoid

No data available

Generation of dust, diffusion.

Incompatible materials

No data available

Not applicable

Hazardous decomposition products No data availableNot applicable

SECTION 10

SECTION 11

Stability and reactivity

Toxicological information
ZrO2

Al2O3

Acute toxicity(oral)

No data available

SPECIES: Rat
ENDPOINT: LD50
VALUE: > 5000 mg/kg

Acute toxicity(dermal)

No data available

No data available

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Solid (GHS definition)

Acute toxicity （Inhalation:Vapours）

Solid (GHS definition)

No data available7 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO11
ＯＭ－６

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity （Inhalation: Dustsand mists）

No data available

No data available

Skin corrosion/irritation

No data available

No data available

Serious eye damage/irritation

No data available

No data available

Respiratory or skin sensitization

The classification is not possible due to lack No data availableof data.
Besides, in DFGOT vol. 12 (1999), zirconium
and its compounds are classified as a
respiratory sensitizer from the information
on zirconium and other zirconium
compounds, but this substance wasclassified as "Classification not possible"
due to no information on the substance.
It is reported that this substance causes
Granulomatous skin reactions in humans(DFGOT vol. 12 (1999)). In DFGOT vol. 12(1999), zirconium and its compounds areclassified as a sensitizer (Sah). From theabove, this substance was classified inCategory 1.

Germ cell mutagenicity

No data available

Carcinogenicity

As described in this hazard class for
Not classified because of "A
zirconium (CAS number: 7440-67-7), ACGIH
classified zirconium and its compounds in A4
in carcinogenicity (ACGIH (7th, 2001)).
Therefore, this substance was classified as"Classification not possible" for this hazard
class.

Reproductive toxicity

No data available

Specific target organ toxicity(single No data available
exposure)

2013/10/16
2024/3/15

The in vivo mutagenicity test has not been
carried out, and in the in vitro mutagenicity
test, we could only find the Ames test
(negative). Therefore we presupposed that
we could not classify it for the lack of data.

No data available
It was set as category 3 (respiratoryirritation) from the statement of upper
respiratory irritation (ICSC (2000)).

8 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：EO11ＯＭ－６

SAFETY DATA SHEETrev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Specific target organ
toxicity(repeated exposure)

As for humans, it is reported that effects on It was classified into Category 1 according
lungs were not observed in workers exposed the statement that by occupational exposure
to this substance (DFGOT vol. 12 (1999)).
of aluminas, pulmonary fibrosis was occurred
On the other hand, changes in the lung(EHC (1997)).
(asthma, bronchitis, pneumoconiosis, sarcoid
granulomatosis, granulomatous interstitial
pneumonia) were reported, but it is reportedthat association with this substance is notclear because they were also exposed toother substances that could cause lungdamage (DFGOT vol. 12 (1999)).
However, there are cases where zirconium
was confirmed in granulomatous lesions in
the lungs of three, and extrinsic allergic
alveolitis was observed just in one. It isreported that histological examination of thelungs revealed "various stages of epithelioid
cell granuloma induced by foreign matter"with foreign matter inclusions in giant cells
and fibrosis, and the principal component offoreign matter is zirconium, and similarchanges were also found in skin, andgranulomatous lesions were observed in
mammary and axillary lymph nodes (DFGOT
vol. 12 (1999)).
As for experimental animals, it is reported
that toxic effects were not found in an
inhalation toxicity test using rats, rabbits,dogs, guinea pigs, and cats (DFGOT vol. 12(1999), ACGIH (7th, 2001)). It is also
reported that in a diet administration test
using rats, toxic effects were not observed(DFGOT vol. 12 (1999)).
As above, because effects of this substancecannot be denied completely in humans, thesubstance was classified as "Classification
not possible."

Aspiration hazard

No data available

Other information

No data available

SECTION 12No data available

Ecological information
ZrO2

Al2O3

Hazardous to the aquatic
environment Shortterm(acute)No data available

No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data available

Persistence and degradablility

No data available

No data available

Bioaccumulative potential

No data available

No data available

Mobility in soil

No data available

No data available

Toxicity9 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO11
ＯＭ－６

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised DateHazard to the ozone layer

No data available

No data available

Other adverse effects

No data available

No data available

SECTION 13

2013/10/16
2024/3/15

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
ZrO2

Al2O3

UN number

Not applicableNot applicable

UN proper shipping nameNot applicableNot applicable

UN classification

Not applicableNot applicable

Transport hazard class

Not applicableNot applicable

Packing group

Not applicableNot applicable

Hazardous to the aquaticenvironment

No data available

No data available

Maritime transport in bulk
according to IMO instruments

No data available

No data available

Japanese lows and regulations

Land regulation information Not applicable
Maritime regulatory information nonhazardous materials
Aviation regulatory information nonhazardous materials

Land regulation information Not applicable
Maritime regulatory information nonhazardous materials
Aviation regulatory information nonhazardous materials

Special precautions for users

Requires retention of yellow card when
When transporting, protect from directtransporting.
sunlight and take on cargo without breakage
When transporting, protect from directof container, corrosion and leakage.
sunlight and take on cargo without breakageof container, corrosion and leakage.

Special Provisions-International regulation

SECTION 15-

Regulatoly information（Japan）
ZrO2

Al2O3

Occupational Safety and Health
Law

There is it in the case of an application oran application

Not applicable

PRTR Law

Not applicableNot applicable

Poisonous and Deleterious
Substances control Law

Not applicableNot applicable10 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO11
ＯＭ－６

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Labor Standards Act

There is it in the case of an application oran application

Not applicableChemical substances control Law

Not applicableNot applicable

Fire fighting Law

Not applicableNot applicable

Air Pollution Control Act

Not applicableNot applicable

Water Pollution Prevention Act

Not applicable

There is it in the case of an application oran application

Water Supply Act

Not applicable

There is it in the case of an application oran application

Sewerage Act

Not applicableNot applicable

Marine Pollution Prevention Law

Not applicableNot applicable

Waste Management and Public
Cleansing Act

Not applicableNot applicable

Note

Ensure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)