SKY ® CDG160D / CDG200D
Heated Capacitance Diaphragm Gauge
INFICON SKY CDG160D and CDG200D hightemperature manometers are your best choice for
accurate total pressure measurement and control.
CDG160D and CDG200D gauges are temperature
controlled at 160°C respectively 200°C for superior
performance in demanding semiconductor and plasma
processes. They are available for full scale ranges from
1 Torr to 1000 Torr, with all common flange types andfieldbus interfaces and provide a linear 0 to 10 V, gas
type independent, pressure signal. INFICON
capacitance manometers use an ultra pure alumina
ceramic diaphragm which is corrosion proof. The
advantages of the ceramic sensor are better signal
stability, faster recovery from atmosphere, short warm
up time and an extraordinary lifetime. INFICON CDGs
are high quality, cost effective pressure sensors fordemanding semiconductor, plasma and vacuum
applications.
ADVANTAGES• Lower cost of ownership, 50% faster warm up, energy efficient low power consumption• Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points• Easy one push button or remote signal zero command, zero offset adjustable• Diagnostic port for quick service and maintenance• Two year warranty, longer lifetime with HT heating concept and gauge protection• No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications• Compliance and standards: CE, EN, UL, SEMI, RoHSAPPLICATIONS• Etch, CVD, PVD and and other semiconductor production processes• Chemical and corrosive high temperature processes• General thin film and vacuum processes requiring gauge protection

1SKY® CDG160D / CDG200D

SKY ® CDG160D / CDG200D
ORDERING INFORMATION

3 C E 1 – 6 5 E – 2 3 0 0
Sensor temperature °C
160200EF0B

Full Scale (FS)

Fieldbus interface

125102050
100200500(Torr only) 1000(mbar only) 1100

012
EG

6789A
BC
DEFG1)
2)2301

15-pin D-Sub, 2SP
9-pin D-Sub 2)
Flange

139C
DEH

56

DN 16 ISO-KF
DN 16 CF-R
OD 1/2 in. tube
4 VCR male
4 VCR female
8 VCR female
8 VCR female long

Optimized signal filter setting for pressure control
Not possible with fieldbus interfaces

bold = standard products
Other flange types on request.
ACCESSORIESType
Diagnostic cable RS232C; USB-A - phone jack 2.5mm (1.8m)
1)2

Diagnostic SW available upon request

SKY® CDG160D / CDG200D

None
DeviceNet TM
Profibus DP TM
4...20mA current loop
EtherCATConnector

Unit(× 1.33 mbar; × 133 Pa) Torr
(× 100 Pa) mbar

Standard
P control 1)

Part no.
1)

303-366

SKY ® CDG160D / CDG200D
SPECIFICATIONS
Full scale (FS)Torr / mbar

1000 / 1100 ... 200

Accuracy 1)
Temperature effect0.4 % of reading

On zeroOn spanPressure, max. (absolute)
Response time 2)
Resolution
Lowest reading
Lowest suggested

100 ... 1

0.005 % FS / °C
0.02 % of reading / °C
400 kPa

260 kPa
30 ms
0.003 % FS
0.01 % FS

Reading

0.05 % FS

Control pressure
Temperature

0.5 % FS

Operation (ambient) 3)+10 ... +50 °C

Bakeout at flange≤200 °C

Storage
Supply voltage
Power consumption
during heat up–20 ... +65 °C+21 ... +30 V (dc) or ±15 V (±5%)

CDG160D≤18 W

CDG200D
Power consumption atoperating temperature≤25 WCDG160D≤12 W

CDG200D
Output signal (analog)
Degree of protection
Standards≤18 W
0 ... +10 V (dc)
IP 40

CE conformity

EN 61000-6-2, EN 61000-6-3, EN 61010

ETL certification

UL 61010-1, CSA 22.2 No.61010-1

SEMI complianceElectrical connection
Setpoint

SEMI S2
D-Sub, 15-pin, male

Number of setpoints

2 (SP1, SP2)

Relay contact≤30 V (dc) / ≤0.5 A (dc)

Hysteresis
Diagnostic port

1 % FS

ProtocolRS232-C

Readpressure, status, ID,Set

setpoints, filter, zero adjust, factory reset, DC offset

Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after three hours operation2)

Increase 10 ... 90% FS3)

Ambient temperatures >40°C may increase surface temperature above SEMI S2 compliance levels — mark “caution hot!”31)

SKY® CDG160D / CDG200D

SKY ® CDG160D / CDG200D
Full scale (FS)Torr / mbar
Materials exposed tovacuum
Internal volume
Weight1000 / 1100 ... 200

100 ... 1

ceramics (AI2O3), stainless steel (AISI 316L)≤6.8 cm3
891 … 964 g

Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after three hours operation2)

Increase 10 ... 90% FS3)

Ambient temperatures >40°C may increase surface temperature above SEMI S2 compliance levels — mark “caution hot!”41)

SKY® CDG160D / CDG200D

SKY ® CDG160D / CDG200D
SPECIFICATIONS INTERFACES
DeviceNet™
ProtocolData rate switch
Cable length

DeviceNet™, group 2 slave only
125, 250, 500 kBaud or network programmable

125 kbps

500 m (1650 ft.)

250 kbps

250 m (825 ft.)

500 kbps
MAC ID
Digital functions

100 m (330 ft.)
Two switches (address 00 – 63) or network programmable
Read pressure, select units: Torr, mbar, Pa
Set points, filter, zero adjust, factory reset, DC offset
Monitor gauge status
Safe state allows definition of behavior in case of error

Analog functions

Detailed alarm and warning information
0 … 10 V analog output pressure indication

Visual communication indicators

two setpoint relays A + B
LED network status (green / red)Specification
Device typeI / O slave messaging
Supply voltage for DeviceNet™

LED module status (green / red)
DeviceNet™ “Vacuum Gauge Device Profile”“VG” for combination gauge
Polling only
24 V nominal (11 ... 25 V)

Supply voltage for gauge
Connector for DeviceNet™
Connector for Gauges (analog output,supply voltage, setpoints)+21 ... +30 V (dc) or ±15 V (±5%)
Microstyle, 5-pin
D-Sub, 15-pin, male

PROFIBUS DP
Baud rates
Address
Digital functions

9.6 / 19.2 / 93.75 / 187.5 / 500 kBaude
1.5 / 12 MBaud
Two switches (address 00 - 125) or network programmable
Read pressure, select units: Torr, mbar, Pa
Set points, filter, zero adjust, factory reset, DC offset
Monitor gauge status, filament status
Safe state allows definition of behavior in case of error

Analog functions
Connector for Profibus DPConnector for CDG (analog output,supply voltage, setpoints)

5SKY® CDG160D / CDG200D

Detailed alarm and warning information
0 … 10 V analog output pressure indication
two setpoint relays A + B
D-Sub, 9-pin, female
D-Sub, 15-pin, maleSKY ® CDG160D / CDG200D
EtherCAT®
ProtocolCommunication standards
Process Data
EtherCAT connector
CableCable length
Data rate

EtherCAT®
Semiconductor Device Profile
ETG.5003 Part 1 Common Device Profile
ETG.5003 Part 2080 “Specific Device Profile - Vacuum Pressure Gauge"
Fixed PDO mapping and configurable PDO mapping
RJ45, 8-pin (socket), IN and OUT
Shielded Ethernet CAT5e or higher≤100 m (330 ft.)
100000 Kbps

4-20mA current loop (analog)
Output signal (measurement signal)
Signal range
Measuring rang (zero ... FS)
Loaded impedance RL

2-wire, current loop
3.8 ... 20.2 mA
4.0 ... 20.0 mA
18.5 ... 33.3 V (dc) 1) 500 Ω
16.2 ... 31.0 V (dc) 1) 400 Ω
13.9 ... 28.8 V (dc) 1) 300 Ω
11.7 ... 26.5 V (dc) 1) 200 Ω
9.4 ... 24.2 V (dc) 1) 100 Ω1)

6

Supply voltage current interfaceSKY® CDG160D / CDG200D

SKY ® CDG160D / CDG200D
DIMENSIONS

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reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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