1 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product name

ＯＡ－５００

Product code

EO03

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Classification not possible

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Classification not possible

Respiratory sensitization

Classification not possible

Skin sensitization

Category 1

Germ cell mutagenicity

Classification not possible

Carcinogenicity

Classification not possible

Reproductive toxicity

Classification not possible

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(single
exposure)Classification not possible

Specific target organ toxicity(repeatedexposure)Classification not possible

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Exclamation

感嘆符

Signal word

Warning

Dangerous goods hazard
information

May cause an allergic skin reaction.

Precautionary statements【Safety measures】

Avoid breathing dust/fume/gas/mist/vapours/spray.
Contaminated work clothing should not be allowed out of the workplace.
Wear Protective glovess/protective clothing/eye protection/face protection.

2013/10/16
2024/3/15

3 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date【First-aid measures】

IF ON SKIN：Wash with plenty of soap and water.
Specific treatment .
If skin irritation or rash occurs: Get medical advice/attention.
Take off contaminated clothing and wash it before reuse.

【Storage】-【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-

Composition/information on ingredients

Substance/Mixture

MixtureChemical nameTantalum oxide

Zirconium oxide

Yttrium oxide

Chemical formula

Ta2O5

ZrO2

Y2O3

Concentration or concentration
range
CAS No.

Ta2O5 ： 60- 70%
ZrO2 ： 25- 35%
Y2O3 ： 1- 8%
Total = 100%
1314-61-0

1314-23-4

1314-36-9

TSCA Inventry

Tantalum oxide (Ta2O5)

Zirconium oxide (ZrO2)

Yttrium oxide (Y2O3)EINECS number

215-238-2

215-227-2

215-233-5

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

2013/10/16
2024/3/15

4 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

SECTION 5

Date of Issue
Revised Date

2013/10/16
2024/3/15

Firefighting measures

Suitable extinguishing media

This product itself is not flammable.

Unsuitable extinguishing media

No data available

Specific hazards

No data available

Specific extinguishing methods

In the case of a fire in the periphery, the portable container is quickly moved to asafe place.

Special protective equipment for
firefighters

Wear suitable protective equipment (gloves, glasses and a mask) in fire-fighting.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
proceduresProtection equipment (specified as those in which the properties of the productare suitable) worn during operation so that airborne droplets, etc., do not adhere
to the skin and dusts and gases are not absorbed.

Environmental precautions

The leakage may not directly flow into rivers or sewage.

Methods and material forcontainment and cleaning up

The leaked material is scooped up, or swept up and gathered to be recovered ina paper bag or a drum.
After recovery, a small amount of the residue is absorbed in sediment, sawdust,
etc.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personal
protection” and wear protective equipment.

Safety handling precautions

Handling work must be practiced in a room where there is a local or total
ventilation facility.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,
including any incompatibilities
Safe storage conditions

Store in a well-ventilated place. Keep container tightly closed.

Safety packaging material

No data available5 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

SECTION 8

Date of Issue
Revised Date

2013/10/16
2024/3/15

Exposure controls/personal protection
Ta2O5

ZrO2

Y2O3

TWA 5 mg/㎥ (as Ta)(2004 edition)

TLV-TWA: 5 mg/㎥
TLV-TWA: 10 mg/㎥
(as zirconium andcompound, zirconium)(2015 version)

TLV-TWA: 1 mg/㎥
(as yttrium and compound,yttrium)(2015 version)

Permissible concentration
ＡＣＧＩＨ

Appropriate engineering controls

Use sealed devices, equipment, or a local exhaust ventilation as much as
possible.

Individual protection measures,such as personal protective
equipment

SECTION 9

Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

Solid

Form

PelletColour

White

Odour

None

Ta2O5

ZrO2

Y2O3

Melting point/freezing point

1862～1882℃

2,680℃(Merck(15th,2013))

2,420 degrees Celsius(inorganic compound,chelate dictionary (1997))

Boiling point or initial boiling point
and boiling range

No data available

4300℃

Approximately 4,300
degrees Celsius (inorganic
compound, chelate
dictionary (1997))

Flammability

No data available

No data available

No data available

Upper/lower flammability or
explosive limits

No data available

No data available

No data available

Flash point

No data available

Noninflammability (GESTIS Noninflammability (GESTIS(2015))(2015))

6 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Auto-ignition temperature

No data available

Noninflammability (GESTIS Noninflammability (GESTIS(2015))(2015))

Decomposition temperature

No data available

No data available

No data available

pH

No data available

No data available

No data available

Kinematic viscosity

No data available

No data available

No data available

Water

Insoluble

Insoluble

Insoluble (GESTIS (2015))

Other solvents

No data available

No data available

No data available

Partition coefficient: noctanol/water

No data available

No data available

No data available

Vapour pressure

No data available

No data available

No data available

Density and/or relative density

8.2

No data available

No data available

Solubility（Density）※ 3.4 ~ 4.0 (pellet) as OA-500

Relative vapor density

No data available

No data available

No data available

Particle characteristics

No data available

No data available

No data available

Other information

No data available

No data available

No data available

Ta2O5

ZrO2

Y2O3

Reactivity

No data available

No data available

No data available

Chemical stability

It is stable in storage
conditions and normal
handling.

No data available

No data available

Possibility of hazardous reactions

Violently react withNo data available
bromine trifluoride. It
reacts violently withchlorine trifluoride, emit
flames.
This occurs at around 410℃, reaction with lithiumincreases to 595 ℃.

No data available

Conditions to avoid

No data available

No data available

No data available

Incompatible materials

Bromine trifluoride,
No data available
chlorine trifluoride, lithium

No data available

SECTION 10

Stability and reactivity

Hazardous decomposition products No data available

No data available

No data available7 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

SECTION 11

Date of Issue
Revised Date

2013/10/16
2024/3/15

Toxicological information
Ta2O5

ZrO2

Y2O3

Acute toxicity(oral)

Oral - Rat LD50: 8g/kg,
intraperitoneal - rat LD:>
5g/kg
Oral - Mouse LD50:>
4g/kg

No data available

For a rat LD50 price,>
5,000 mg/kg (GESTIS(Access on September2015)) There isinformation.

Acute toxicity(dermal)

No data available

No data available

No data available

Acute toxicity （Inhalation: Gases）

If inhaled, to stimulate the Solid (GHS definition)
respiratory system andmucous membranes.

Solid (GHS definition)

Acute toxicity （Inhalation:
Vapours）

No data available

Solid (GHS definition)

Solid (GHS definition)

Acute toxicity （Inhalation: Dusts
and mists）

No data available

No data available

No data available

Skin corrosion/irritation

No data available

No data available

It is written that thissubstance showed noirritation to rabbit skin
(HSDB (Access on
September 2015)).
However, due to its
unknown details, it wasconsidered as insufficient
data to be used for the
judging as "Notclassified."

Serious eye damage/irritation

No data available

No data available

From the information that
this substance showedslight irritation to rabbit
eyes (HSDB (Access on
September 2015)), it wasclassified in Category 2B.

8 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Respiratory or skin sensitization

No data available

The classification is not
No data available
possible due to lack ofdata.
Besides, in DFGOT vol. 12(1999), zirconium and its
compounds are classified
as a respiratory sensitizer
from the information on
zirconium and otherzirconium compounds, but
this substance wasclassified as"Classification notpossible" due to no
information on thesubstance.
It is reported that thissubstance causes
Granulomatous skinreactions in humans(DFGOT vol. 12 (1999)). In
DFGOT vol. 12 (1999),
zirconium and its
compounds are classified
as a sensitizer (Sah).
From the above, thissubstance was classified
in Category 1.

Germ cell mutagenicity

No data available

No data available

Carcinogenicity

No data available

As described in thisThe classification is nothazard class for zirconium possible due to lack of(CAS number: 7440-67-7), data.
ACGIH classified
Besides, it is reported
zirconium and itsthat in a test in which
compounds in A4 inmice were administeredcarcinogenicity (ACGIH
yttrium nitrate in the diet
(7th, 2001)). Therefore,(feeding with a foodthis substance wascontaining 5 ppm as Y) for
classified as
life, a dosed group showed"Classification not
an increased tendency inpossible" for this hazard incidence of malignant
class.
tumors (leukemia,
lymphoma, lungadenocarcinoma) of 33.3%
in comparison with 14.6%
in a control group (notstatistically significant)(HSDB (Access on
September 2015), DFGOT(1998; German language),
Netherlands evaluation
document (2000)).

Reproductive toxicity

No data available

No data available

No data available

Specific target organ toxicity(single No data available
exposure)

No data available

No data available

No data available9 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

Specific target organ
toxicity(repeated exposure)

No data available

Date of Issue
Revised Date

As for humans, it is
No data available
reported that effects onlungs were not observedin workers exposed to thissubstance (DFGOT vol. 12(1999)).
On the other hand,changes in the lung(asthma, bronchitis,
pneumoconiosis, sarcoid
granulomatosis,
granulomatous interstitial
pneumonia) were reported,but it is reported thatassociation with thissubstance is not clear
because they were also
exposed to othersubstances that could
cause lung damage(DFGOT vol. 12 (1999)).
However, there are cases
where zirconium wasconfirmed in
granulomatous lesions in
the lungs of three, andextrinsic allergic alveolitis
was observed just in one.
It is reported that
histological examination of
the lungs revealed"various stages of
epithelioid cell granuloma
induced by foreign
matter" with foreign
matter inclusions in giant
cells and fibrosis, and theprincipal component offoreign matter iszirconium, and similarchanges were also foundin skin, and granulomatous
lesions were observed in
mammary and axillary
lymph nodes (DFGOT vol.
12 (1999)).
As for experimental
animals, it is reported that
toxic effects were notfound in an inhalation
toxicity test using rats,
rabbits, dogs, guinea pigs,
and cats (DFGOT vol. 12(1999), ACGIH (7th,2001)). It is also reported
that in a dietadministration test using
rats, toxic effects were
not observed (DFGOT vol.
12 (1999)).
As above, because effectsof this substance cannot
be denied completely inhumans, the substancewas classified as"Classification notpossible."

2013/10/16
2024/3/15

CANON OPTRON INC.
SDS Number：
Product Name：found in an inhalation
toxicity test using rats,
10 / 12 Page rabbits, dogs, guinea pigs,
and cats (DFGOT vol. 12(1999), ACGIH (7th,2001)). It is also reported
that in a dietadministration test using
rats, toxic effects wererev. 8.0
not observed (DFGOT vol.
12 (1999)).
As above, because effectsof this substance cannot
be denied completely inhumans, the substancewas classified as"Classification notpossible."

EO03
ＯＡ－５００SAFETY DATA SHEET

Aspiration hazard

No data available

Other information

No data available

Date of Issue
Revised Date

No data available

No data available

Ta2O5

ZrO2

Y2O3

Hazardous to the aquatic
environment Shortterm(acute)No data available

No data available

No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data available

No data available

Persistence and degradablility

No data available

No data available

No data available

Bioaccumulative potential

No data available

No data available

No data available

Mobility in soil

No data available

No data available

No data available

Hazard to the ozone layer

No data available

No data available

No data available

Other adverse effects

No data available

No data available

No data available

SECTION 12

2013/10/16
2024/3/15

Ecological information

Toxicity

SECTION 13

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
Ta2O5

ZrO2

Y2O3

UN number

Not applicableNot applicableNot applicable

UN proper shipping nameNot applicableNot applicableNot applicable

UN classification

Not applicableNot applicableNot applicable

Transport hazard class

Not applicableNot applicableNot applicable

Packing group

Not applicableNot applicableNot applicable

Hazardous to the aquatic
environment

No data available

No data available

No data available

International regulation

11 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

Maritime transport in bulk
according to IMO instruments

No data available

No data available

Date of Issue
Revised Date

2013/10/16
2024/3/15

No data available

Japanese lows and regulations

Land regulation
Land regulation
Land regulation
information Not applicable information Not applicable information Not applicable
Maritime regulatory
Maritime regulatory
Maritime regulatory
information noninformation noninformation nonhazardous materials
hazardous materials
hazardous materials
Aviation regulatory
Aviation regulatory
Aviation regulatory
information noninformation noninformation nonhazardous materials
hazardous materials
hazardous materials

Special precautions for users

No data available

Requires retention of
Requires retention ofyellow card when
yellow card whentransporting.
transporting.
When transporting, protect When transporting, protectfrom direct sunlight andfrom direct sunlight andtake on cargo without
take on cargo without
breakage of container,
breakage of container,
corrosion and leakage.
corrosion and leakage.
Do not stack heavy good
thereupon.

Special Provisions

-

-

-

Ta2O5

ZrO2

Y2O3

Occupational Safety and Health
Law

There is it in the case of
an application or an
application

There is it in the case of
an application or an
application

There is it in the case of
an application or an
application

PRTR Law

Not applicableNot applicableNot applicable

Poisonous and Deleterious
Substances control Law

Not applicableNot applicableNot applicable

Labor Standards Act

Not applicableChemical substances control Law

Not applicable

There is it in the case of
an application or an
application
Not applicable

There is it in the case of
an application or an
application
Not applicable

Fire fighting Law

Not applicableNot applicableNot applicable

Air Pollution Control Act

Not applicableNot applicableNot applicable

Water Pollution Prevention Act

Not applicableNot applicableNot applicable

Water Supply Act

Not applicableNot applicableNot applicable

Sewerage Act

Not applicableNot applicableNot applicable

Marine Pollution Prevention Law

Not applicableNot applicableNot applicable

Waste Management and Public
Cleansing Act

Not applicableNot applicableNot applicable

Note

Ensure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 15

Regulatoly information（Japan）

12 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO03
ＯＡ－５００SAFETY DATA SHEET
rev. 8.0

SECTION 16

Date of Issue
Revised Date

2013/10/16
2024/3/15

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)