Communication Protocol

EtherCAT®
for Bayard-Alpert Pirani Capacitance Diaphragm Gauge

BCG450-SE

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1

General Information

Caution
Data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface or the diagnostic port may
result in incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and EtherCAT interface, or the diagnostic
port.

Intended Use

This Communication Protocol contains instructions for operating EtherCAT interfaces (slaves) together with a master.
For safety information, specifications and operation instructions of thevacuum gauges refer to the appropriate documents (→  [1], [2], [3]).

EtherCAT–Interface

The following description of the EtherCAT® interface is compliant to the EtherCAT
specification of the EtherCAT Technology Group (ETG) and to the  "EtherCAT®
Semiconductor Device Profile".
This manual describes the functionality of a EtherCAT slave and supports•

ETG.5003.1 S (R) V1.1.0: Part 1 Common Device Profile (CDP) (→  [12])and•ETG.5003.2080 S (R) V1.3.0: Part 2080: Specific Device Profile (SDP):
Vacuum Pressure Gauge (→  [13]).

For operating the gauge via EtherCAT, prior installation of the device specific ESI
file is required on the bus master side. This file can be downloaded from our
website.

Product Identification

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space provided
below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V

2

W

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Validity

This document applies to products with part numbers
353-598 (BCG450-SE with EtherCAT, vacuum connection DN 25 ISO-KF)
353-599 (BCG450-SE with EtherCAT, vacuum connection DN 40 CF-R)
This manual is based on firmware version 2.0.0.0.
If your unit does not work as described in this document, please check that it isequipped with the above firmware version (→  12, Index 100A).
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document correspond to the gauge BCG450-SE with vacuum connection DN 25 ISO-KF. They
apply to gauges with other vacuum connections by analogy.
We reserve the right to make technical changes without prior notice.

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EtherCAT

Beckhoff Automation GmbH, Deutschland

3

Contents

4

General Information
Intended Use
EtherCAT–Interface
Product Identification
Validity
Trademark

2
2
2
2
3
3

Contents

4

1 Technical Data

6

2 Interface Connection

7

3 Operation
3.1 Introduction
3.2 Front View
3.3 Indicators and Switches
3.3.1 <RUN> LED
3.3.2 <ERR> LED
3.3.3 <LA> LED (<IN> Port)
3.3.4 <LA> LED (<OUT> Port)
3.3.5 Device Address Switch

8
8
8
9
9
9
9
9
10

4 Object Structure
4.1 Object Dictionary structure
4.2 Communication Profile Objects (0x1000…0x1FFF)
4.2.1 Process Data Objects (PDO's)
4.3 Manufacturer-specific Profile Objects (0x2000...0x5FFF)
4.3.1 Configuration Capacitance Diaphragm (Module 1)
4.3.2 Configuration Piezo (Module 2)
4.3.3 Configuration Heat Transfer (Module 3)
4.3.4 Configuration Hot Cathode Ion (Module 4)
4.4 Input Area (0x6000…0x6FFF)
4.4.1 Input Common Capacitance Diaphragm
4.4.2 Input Capacitance Diaphragm
4.4.3 Input Common Piezo
4.4.4 Input Piezo
4.4.5 Input Common Heat Transfer
4.4.6 Input Heat Transfer
4.4.7 Input Common Hot Cathode Ion
4.4.8 Input Hot Cathode Ion
4.4.9 Input Trip Point 1
4.4.10 Input Trip Point 2
4.5 Configuration Area (0x8000…0x8FFF)
4.5.1 Configuration Hot Cathode Ion
4.5.2 Configuration Trip Point 1
4.5.3 Configuration Trip Point 2
4.6 Information Area (0x9000…0x9FFF)
4.6.1 Information Capacitance Diaphragm
4.6.2 Information Common Piezo
4.6.3 Information Piezo
4.6.4 Information Common Heat Transfer
4.6.5 Information Heat Transfer
4.6.6 Information Common Hot Cathode Ion
4.6.7 Information Hot Cathode Ion
4.6.8 Information Trip Point 1/2
4.7 Device Area (0xF000...0xAFFF)
4.7.1 Semiconductor Device Profile
4.7.2 Module Profile List
4.7.3 Exceptions
4.7.4 Active Exception Status
4.7.5 Active Device Warning Details
4.7.6 Active Device Error Details
4.7.7 Active Global Device Warning Details
4.7.8 Active Global Device Error Details
4.7.9 Latched Device Warning Details
4.7.10 Latched Device Error Details
4.7.11 Latched Global Device Warning Details
4.7.12 Latched Global Device Error Details
4.7.13 Device Warning Mask

11
11
12
12
14
14
14
14
15
15
15
15
15
16
16
17
17
17
18
18
19
19
19
22
23
24
25
25
25
26
26
26
27
27
27
27
28
28
28
29
30
30
31
32
32
33
33
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4.7.144.7.154.7.164.7.174.7.184.7.194.7.204.7.21
4.7.22
4.7.234.7.244.7.254.7.264.7.274.7.284.7.29Device Error Mask
Global Device Warning Mask
Global Device Error Mask
Combination Gauge
Trip Point Output All
Input Latch Local Timestamp
Configure Device
Information Device
Command Full Scale Adjust
Command Degas ON / OFF
Command Emission ON / OFF
Device Reset Command
Exception Reset Command
Store Parameters Command
Calculate Checksum Command
Load Parameters Command

Appendix
A: Overview Setting Trip Points
B: Literature

33
34
34
34
35
35
36
37
38
38
39
40
40
41
42
43
44
44
46

For cross-references within this document, the symbol (→  XY) is used, for crossreferences to further documents, listed under literature, the symbol (→  [Z]).

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5

1 Technical Data
Further technical data →  [1], [2], [3].

EtherCAT interface

Communication protocol
Communication standards

protocol specialized for EtherCAT
ETG.5003.1: Part 1 Common Device Profile(CDP)
ETG.5003.2080: Part 2080 Specific Device
Profile (SDP): Vacuum Pressure Gauge
100 Mbps
Explicit Device Identification
100BASE-Tx (IEEE 802.3)
read pressure, select units (Torr, mbar, Pa)emission control, degas function
monitor gauge status, filament statussafe state allows definition of behavior in caseof error0 … 10 V analog output pressure indication
two setpoint relays A + B
2-9
1×10 … 100 mbar
NO, potential free
10 % of reading≤30 V / ≤0.5 A (dc)
2 × RJ45, 8-pin (socket)<IN>:
EtherCAT input<OUT> EtherCAT output
shielded, special Ethernet Patch Cable (CAT5equality or higher)≤100 mData rate
Node address
Physical layer
Digital functions

Analog functions
Setpoint relays
Range
Relay contact
Hysteresis
Contact rating
EtherCAT connector

Cable
Cable length
Process data

Fixed PDO mapping and configurable PDO
mapping
SDO requests, responses and information

Mailbox (CoE)Dimensions [mm]

LA

LA

111

IN

OUT

59

RUN ERR

PWR

48

42

67

DN 25 ISO-KF

6

DN 40 CF-R

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2 Interface Connection
Making an EtherCAT interface
cable

For operating the BCG450-SE gauge via EtherCAT, two interface cables conforming to the EtherCAT standard are required.
If no such cables are available, make two according to the following indications.

Cable type

Ethernet Patch Cable (CAT5e quality) with FCC68 connector.

Procedure Pin assignment:
FCC68, 8-pin,male, soldering side
8

1

Pin

SignalDescription

1
2
3
4
5
6
7
8

TD+
TDRD+
nu
nu
RDnu
nu

Transmission Data +Transmission Data Receive Data +not used
not used
Receive Data not used
not used

Pin assignment of the D-sub 15-pin sensor connector according to therespective operating manual (→  [1], [2], [3]).

 Plug the EtherCAT (and sensor) cables connector into the gauge: From theprevious device the cable connected to OUT port has to be connected to
the BCG450-SE <IN> port. And the cable from the BCG450-SE <OUT> port
has to be connected to the next device's <IN> port.
FCC68 cable<OUT> port
FCC68 cable<IN> port
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7

3 Operation

Via the EtherCAT interface, the following and further data are exchanged in thestandardized EtherCAT protocol:

3.1 Introduction•

Pressure reading•

Pressure unit (Torr, mbar, Pa)•

Status and error messages•

Status of the switching functions•

Set Trip Point for switching functions

Caution
Data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface or the diagnostic port may
result in incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and EtherCAT interface or the diagnostic
port.

3.2 Front View
5

6

7 8

9

4
3

Position

2
1

8

Label

Function1

x1

Address Switch × 1, hexadecimal2x10

Address Switch × 10, hexadecimal

3

RUN

EtherCAT Status LED

4

ERR

Error LED

5IN

EtherCAT IN connector

6

LA

Link activity EtherCAT IN

7

OUT

EtherCAT OUT connector

8

LA

Link activity EtherCAT OUT

9

PWR

Sensor cable connector(Power, analog I/O, RS232C I/O and Relay contacts)

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3.3 Indicators and Switches

3.3.1 <RUN> LED

Displays the operating status.

RUN

Color

LED Stateoffblinking

Description
INIT (initialization status) or no power applied to device.
PREOP (pre-operational status).

(200 ms on
200 ms off)green

single flash(200 ms on1000 ms off)on

3.3.2 <ERR> LED

SAFEOP (safe-operational status).
Communication of cyclic data transfer running. Input
values available, output values written to the device but not
updated on device output.
OP (operational status).

Displays the error content.

ERR

Color

LED State

Descriptionoff

No error or no power applied to device.

blinking

Error occurred (see error parameter).

(200 ms on
200 ms off)

single flash(200 ms on1000 ms off)red

double flash(200 ms on
200 ms off
200 ms on
1000 ms off)on

3.3.3 <LA> LED (<IN> Port)

Slave device application has changed the EtherCAT state
autonomously, due to local error (see error parameter).
An application watchdog timeout has occurred.
Sync Manager Watchdog timeout or communication
timeout occurred.
A critical communication or application controller error has
occurred. Application controller is not responding any more
(PDI Watchdog Timeout detected by ESC)

Displays the input status.

LA
IN

Color

LED State

green

blinking

off
on

3.3.4 <LA> LED (<OUT> Port)

Description
Port not connected or no power applied to device.
Port connected and communication active.
Port connected but no communication.

Displays the output status.

LA
OUT

Color

LED State
off

green

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Description
Port not connected or no power applied to device.
Port connected and communication active.
Port connected but no communication.

93.3.5 Device Address Switchx1
x10
24 6 24 6
080
8
E A E A

During device initialization, the device address switches are read by the device
firmware. This device address is supported to the master as Explicit Device
Identification.
Example: Value of the Explicit Device ID = 0xDD (dec 221):0x10 * 0xD (dec 208) + 0x1 * 0xD (dec 13)
x10
4
2
6

10

2

x1
4

6

0

8 0

8

E

A

A

E

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4 Object StructureThis chapter describes the CANopen over EtherCAT (CoE) Object Dictionary.

4.1 Object Dictionary
structure

The objects in the CoE Object Dictionary can be accessed with SDO services, andmany of the dictionary objects can be mapped for cyclic communication in PDO's.
Each object is addressed using a 16-bit index and an 8-bit subindex.
The following table presents the overall layout of the standard Object Dictionary.
Index (hex.)

Object dictionary area

1000 – 1FFF

Communication profile area

2000 – 5FFF

Manufacturer-specific profile area
Input area

7000 – 7FFF

Output area

8000 – 8FFF
9000 – 9FFF
A000 – AFFF
B000 – BFFF
C000 – EFFF
F000 – FFFF

Profile Specific Area

6000 – 6FFF

Configuration area
Information area
Diagnosis area
Service Transfer area
Reserved area
Device area

Explanations for the abbreviations in the columns of the tables are given below:
Abbr.

Description

Access

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RO: object can only be read by the SDO service
RW: object can be both read and written by the SDO service

CoE

CAN application protocol over EtherCAT

Index

Object Index (hex.) (address of an object)

NV

Nonvolatile; attribute value is maintained through power cycles

ObjectAbstract representation of a particular component within a device,
which consists of data, parameters, and methods.

PDO

Process Data Object. Structure described by mapping parameters
containing one or several process data entities.

PM

PDO mapping•

Rx: object can be mapped into an Rx PDO•

Tx : object can be mapped into a Tx PDO

RxPDO

Receive PDO. A Process Data Object received by an EtherCAT slave.

SDO

Service Data Objects. CoE asynchronous mailbox communications
where all objects in the Object Dictionary can be read and written.

SI

Subindex (hex.) (sub-address of an object)

Type

Data TypeTxPDO

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BOOL, BIT = 1 bit. Boolean (0 = false, 1 = true)•

USINT, BYTE = 8 bit. Unsigned Byte•

UINT = 16 bit. Unsigned integer value•

UDINT = 32 bit. Unsigned integer value•

ULINT = 64 bit. Unsigned integer value•

REAL = 32 bit. Floating point•

V_STRING = 8×n bit. Visible string (1 byte for character)Transmit PDO. A Process Data Object sent from an EtherCAT slave.

114.2 Communication Profile
Objects(0x1000…0x1FFF)

The objects of the communication profile describe the basic EtherCAT properties of
the BCG450-SE and are common to all EtherCAT slaves using the CoE communication protocol. The objects are described in following table:
Index

SI

1000

DataType
UDINT

NV

AccessRO

PM Name
Device Type
0x0000138B => 0x138B = dec
5003

1008

V_STRINGRO

Manufacturer Device name

1009

V_STRINGRO

Manufacturer Hardware
Version

100A

V_STRINGRO

Manufacturer Software
Version

100B

V_STRINGRO

Manufacturer Bootloader
Version

1010

0x01

UDINT

RW

Store Parameters
Read:
Bit 0 = 1: slave saves the
backup entries whenwriting 0x1010:01 with
0x65766173
Bit 1-31 = 0
Write:
With the value
0x65766173 the backup
entries will be stored to
non-volatile memory of the
slave

1011

0x01

UDINT

RW

Restore Default
Parameters
Read:
Bit 0 = 1: slave supports
the restoring of backup
entries with the default
values when writing
0x1011:01 with
0x64616F6C
Bit 1-31 = 0
Write:
With the value
0x64616F6C the backup
entries will be restoredwith the default values

RO

Identity Object

0x01

UDINT

RO

Vendor ID

0x02

UDINT

RO

Product Code

0x03

UDINT

RO

Revision Number

0x04

UDINT

RO

Serial Number

ULINT

RO

Timestamp Object

1018

10F8

4.2.1 Process Data Objects(PDO's)12

The BCG450 consists of three vacuum pressure sensors. The characteristic of thiscombo device is that only one vacuum pressure sensor outputs an actual pressure
value at one time. The other sensor is in overrange condition which means that thepressure is higher than the measurement range of the sensor or underrange
condition which means that the pressure is lower than the measurement of thesensor. The 'Combination Gauge Active Value' outputs the pressure value form theactive measuring sensor.
For each sensor module a default mapping is configured. The mapping for eachsensor module has the same contents. For a compact cyclic data frame duplicatedmappings can be deactivated.

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Or to meet other requirements the TxPDO's 1A01, 1A03, 1A05 or 1A07 and theRxPDO 1601 are designated for user mapping. These PDO's do not have default
values and can be set up by the PDO configuration.

RxPDO's

TxPDO's

Index

SI

DataType

NV

AccessPM Name

1600

PM

RW

RxPDO Receive PDO
Mapping,

1601

PM

RW

RxPDO Receive PDO
Mapping, User Mapping

Index

SI

1A00

DataType
PM

NV

AccessRW

PM NameTxPDO Transmit PDO
Mapping

0x01

BIT

Reading Valid
Combination Gauge

0x02

BIT

Overrange Exceeded
Combination Gauge

0x03

BIT

Underrange Exceeded
Combination Gauge

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

Sensor Value Combination
Gauge

0x06

UINT

Active Sensor Number
Combination Gauge

1A01

PM

RW

TxPDO Transmit PDO
Mapping, User Mapping

1A02

PM

RW

TxPDO Transmit PDO
Mapping

0x01

BIT

Reading Valid

0x02

BIT

Overrange Exceeded

0x03

BIT

Underrange Exceeded

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

1A03
1A04

1A05

)

Sensor ValuePM

RW

TxPDO Transmit PDO
Mapping, User MappingPM

RW

TxPDO Transmit PDO
Mapping Combination
Gauge

0x01

BIT

Reading Valid
Combination Gauge

0x02

BIT

Overrange Exceeded
Combination Gauge

0x03

BIT

Underrange Exceeded
Combination Gauge

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

Sensor Value Combination
Gauge

0x06

UINT

Active Sensor Number
Combination GaugePM

RW

TxPDO Transmit PDO
Mapping, User Mapping(continued)

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13

(Table "TxPDO's" conluded)
1A06

PM

RW

TxPDO Transmit PDO
Mapping

0x01

BIT

Reading Valid

0x02

BIT

Overrange Exceeded
Combination Gauge

0x03

BIT

Underrange Exceeded
Combination Gauge

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

Sensor Value Combination
Gauge

0x06

UINT

Active Sensor Number
Combination Gauge

1A07
1BFE

PM

RW

TxPDO Transmit PDO
Mapping, User Mapping

PM

RW

Transmit PDO Mapping

0x01

BYTE

Active Exception Status

0x02

UDINT

Trip Point Output All
Instance

1BFF

PM

RW

TxPDO Transmit PDO
Mapping Device, User
Mapping

1C00

0x01
0x02
0x03
0x04

BYTE

RW

Sync Manager Type

1C12 /
1C13

0x01
0x02
0x03
0x04

UINT

RW

Sync Manager PDO
Assignment

1C32 /
1C33

0x01
0x20

RW

Sync Manager Parameter

4.3 Manufacturer-specific
Profile Objects(0x2000...0x5FFF)

The manufacturer-specific profile objects contain the manufacturer's model number
and device configuration data, status and diagnostic data. The objects aredescribed in the following tables.

4.3.1 Configuration
Capacitance Diaphragm(Module 1)

Index

SI

DataType

4000

0x02

REAL

Subindex 0x02

4.3.2 Configuration Piezo(Module 2)
Subindex 0x02

4.3.3 Configuration Heat
Transfer (Module 3)
Subindex 0x02

14

NV

AccessRW

PM Name
Safe Value

Safe Value: The value to be used for Safe State = Safe Value.

Index

SI

DataType

4010

0x02

REAL

NV

AccessRW

PM Name
Safe Value

Safe Value: The value to be used for Safe State = Safe Value.

Index

SI

DataType

4020

0x02

REAL

NV

AccessRW

PM Name
Safe Value

Safe Value: The value to be used for Safe State = Safe Value.

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4.3.4 Configuration Hot
Cathode Ion (Module 4)
Subindex 0x02

Index

SI

DataType

4030

0x02

REAL

NV

AccessPM Name

RW

Safe Value

Safe Value: The value to be used for Safe State = Safe Value.

4.4 Input Area
(0x6000…0x6FFF)
4.4.1 Input Common
Capacitance DiaphragmSubindex 0x0E

Index

SI

DataType

AccessPM Name

6000

0x0E

BOOL

NV

RO

tx

TxPdoState

0x11

REAL

RO

tx

Sensor Value

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

4.4.2 Input Capacitance
Diaphragm

Subindex 0x01

Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index

SI

DataType

AccessPM Name

6001

0x01

BOOL

NV

RO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid

4.4.3 Input Common Piezo

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0

No Underrange Exceeded1

Underrange Exceeded

Index

SI

DataType

AccessPM Name

6010

0x0E

BOOL

NV

RO

tx

TxPdoState

0x11

REAL

RO

tx

Sensor Value
15

Subindex 0x0E

Is set if the device is not in Safe State (value (I 0x6010, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

4.4.4 Input Piezo

Subindex 0x01

Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index

SI

DataType

AccessPM Name

6012

0x01

BOOL

NV

RO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid

4.4.5 Input Common Heat
Transfer

Subindex 0x0E

0No Underrange Exceeded1

Underrange Exceeded

Index

SI

DataType

AccessPM Name

6020

0x0E

BOOL

NV

RO

tx

TxPdoState

0x11

REAL

RO

tx

Sensor Value

Is set if the device is not in Safe State (value (I 0x6020, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

16Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

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4.4.6 Input Heat Transfer

Subindex 0x01

Index

SI

DataType

6023

0x01

BOOL

NV

AccessPM NameRO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid

4.4.7 Input Common Hot
Cathode Ion

Subindex 0x0E

0No Underrange Exceeded1

Underrange Exceeded

Index

SI

DataType

AccessPM Name

6030

0x0E

BOOL

NV

RO

tx

TxPdoState

0x11

REAL

RO

tx

Sensor Value

Is set if the device is not in Safe State (value (I 0x6020, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

4.4.8 Input Hot Cathode Ion

Subindex 0x01

Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index

SI

DataType

AccessPM Name

6035

0x01

BOOL

NV

RO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

0x05

BOOL

RO

tx

Emission Status Off/On

0x06

BOOL

RO

tx

Degas Status Off/On

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

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0Invalid

1

Valid

17

Subindex 0x02

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid0

No Underrange Exceeded1

Underrange Exceeded

Subindex 0x05
Emission Status Off/On
0

OFF

1

ON

Subindex 0x06
Degas Status Off/On

4.4.9 Input Trip Point 1

Subindex 0x01

0

OFF

1

ON

Index

SI

DataType

AccessPM Name

600E

0x01

BOOL

RO

tx

Status High Trip

0x02

BOOL

RO

tx

Status Low Trip

AccessPM Name

Status High Trip
01

Subindex 0x02

Subindex 0x01

SI

DataType

600F

0x01

BOOL

RO

tx

Status High Trip

0x02

BOOL

RO

tx

Status Low Trip

NV

Status High Trip
High Trip not assert
High Trip assert

Status Low Trip
0
1

18

Low Trip not assert
Low Trip assert

Index

0
1

Subindex 0x02

High Trip not assert
High Trip assert

Status Low Trip
01

4.4.10 Input Trip Point 2

NV

Low Trip not assert
Low Trip assert

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4.5 Configuration Area(0x8000…0x8FFF)
4.5.1 Configuration Hot
Cathode Ion

Subindex 0x02

Index

SI

DataType

NV

Access

8035

0x02

BOOL

x

RW

PM NameEmission User Mode

0x13

REAL

x

RW

Emission Current

Defines whether the emission is switched on automatically (controlled by a different
sensor) (automatic) or manually by the user (manual)
Emission User Mode01

Subindex 0x13

4.5.2 Configuration Trip
Point 1

Automatic
ManualEmission current in milliamps

If High Trip Source Index is 0x60101100
The High Trip Point is calculated by:*)High Trip Point Limit = Value × Percentage
*)
**)

**)

Value from Piezo Sensor (I: 0x6010, SI: 0x11)
Percentage High Trip Source (I: 0x800E/F, SI: 0x13)

In this case, the High Trip Point Limit value is automatically updated by the device
itself. Any user-written value to the parameter High Trip Point Limit will be refusedwith an abort code.
If High Trip Source Index is 0x800E1100 or 0x800F1100 the High Trip Point isequal with the value referenced in High Trip Point Limit.
The value defined in High Trip Point Limit is compared with the pressure valuereferenced by the Source Index parameter.
If Low Trip Source Index is 0x60101100
The Low Trip Point is calculated by:*)

Low Trip Point Limit = Value × Percentage
*)
**)

**)

Value from Piezo Sensor (I: 0x6010, SI: 0x11)
Percentage Low Trip Source (I: 0x800E/F, SI: 0x16)

In this case, the Low Trip Point Limit value is automatically updated by the device
itself. Any user-written value to the parameter Low Trip Point Limit will be refusedwith an abort code.
If Low Trip Source Index is 0x800E1400 or 0x800F1400 the Low Trip Point is equalwith the value referenced in Low Trip Point Limit.
The value defined in Low Trip Point Limit is compared with the pressure valuereferenced by the Source Index parameter.

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19

Measurement signal(Pressure p)

High Trip
Hysteresis

High Trip Point

Low Trip
Hysteresis

Low Trip PointTime tinactive

Subindex 0x01

NV

Access

800E

0x01

BOOL

x

RW

High Trip Enable

0x02

BOOL

x

RW

Low Trip Enable

0x04

BOOL

x

RW

Override Enable

0x05

BOOL

x

RW

Override High Trip

0x06

BOOL

x

RW

Override Low Trip

0x11

REAL

x

RW

High Trip Point Limit

PM Name

0x12

UDINT

x

RW

High Trip Source Index

0x13

REAL

x

RW

Percentage High Trip
Source

0x14

REAL

x

RW

Low Trip Point Limit

0x15

UDINT

x

RW

Low Trip Source Index

0x16

REAL

x

RW

Percentage Low Trip
Source

0x17

REAL

x

RW

High Trip Hysteresis

0x18

REAL

x

RW

Low Trip Hysteresis

0x1A

UDINT

x

RW

Source Index

High Trip Point Enable
DisableEnableLow Trip Point Enable
DisableEnableOverride Enable
DisableEnableOverride High Trip
0120

inactive

DataType01

Subindex 0x05

activeSI

01

Subindex 0x04

inactive

Index

0
1

Subindex 0x02

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Subindex 0x06

Override Low Trip0
1

DisableEnableSubindex 0x11

High Trip Point Limit: High limit to trigger trip point condition if Input Value (I0x900E, SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
It is possible to reference to "High Trip Point Limit" or to the sensor value from the
Piezo Sensor (I 0x6010, SI 0x11).

Subindex 0x13

Percentage of Value referenced by High Trip Source Index (I 0x6010, SI 0x11) in[%]. If High Trip Source Index is I 0x800E, SI 0x12 this parameter is not used.

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900E,
SI 0x01) is below this limit.

Subindex 0x15

Object index of Low Trip Point Value source. Index of Low Trip Point Limit(I 0x800E, SI 0x14)
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
It is possible to reference to "Low Trip Point Limit" or to the sensor value from the
Piezo Sensor (I 0x6010, SI 0x11).

Subindex 0x16

Percentage of Value referenced by Low Trip Source Index (I 0x6010, SI 0x11) in[%]. If Low Trip Source Index is I 0x800E, SI 0x14 this parameter is not used.

Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0xF640 SI 0x11) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

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Index
Subindex
Reserved

21

4.5.3 Configuration Trip
Point 2Subindex 0x01

Index

SI

DataType

NV

Access

800F

0x01

BOOL

x

RW
RW

Low Trip Enable

RW

Override Enable

0x05

BOOL

x

RW

Override High Trip

0x06

BOOL

x

RW

Override Low Trip

0x11

REAL

x

RW

High Trip Point Limit

0x12

UDINT

x

RW

High Trip Source Index

0x13

REAL

x

RW

Percentage High Trip
Source

0x14

REAL

x

RW

Low Trip Point Limit

0x15

UDINT

x

RW

Low Trip Source Index

0x16

REAL

x

RW

Percentage Low Trip
Source

0x17

REAL

x

RW

High Trip Hysteresis

0x18

REAL

x

RW

Low Trip Hysteresis

0x1A

UDINT

x

RW

Source Index

DisableEnableDisableEnableDisableEnableDisableEnableOverride Low Trip
0
1

22

x
x

Override High Trip
01

Subindex 0x06

BOOL
BOOL

Override Enable
01

Subindex 0x05

0x02
0x04

Low Trip Point Enable
01

Subindex 0x04

High Trip Enable

High Trip Point Enable
01

Subindex 0x02

PM NameDisableEnableSubindex 0x11

High Trip Point limit: High limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
It is possible to reference to "High Trip Point Limit" or to the sensor value from the
Piezo Sensor (I 0x6010, SI 0x11).

Subindex 0x13

Percentage of Value referenced by High Trip Source Index (I 0x6010, SI 0x11) in[%]. If High Trip Source Index is I 0x800F, SI 0x12 this parameter is not used.

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is below this limit.
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Subindex 0x15

Object index of Low Trip Point Value source. Index of Low Trip Point Limit(I 0x800F, SI 0x14)
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
It is possible to reference to "Low Trip Point Limit" or to the sensor value from the
Piezo Sensor (I 0x6010, SI 0x11).

Subindex 0x16

Percentage of Value referenced by Low Trip Source Index (I 0x6010, SI 0x11) in[%].If Low Trip Source Index is I 0x800F, SI 0x14 this parameter is not used.

Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0xF640 SI 0x11) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

Highest / lowest measurement
value

The Information Data object defines the input process data.

Indicatedpressure
p6'

Error

p5'

4

p4'

Overrangep3'3
Display range

4.6 Information Area
(0x9000…0x9FFF)

Index
Subindex
Reserved

Measurement
range
p2'
p1'

2
1

Underrange

Error
Real pressure
p0 p1

p2 p3

The "measurement range" is the range between minimum and maximum pressure,
where the reading of the gauge is within the specified measurement uncertainty
limits.
The "valid measurement information range" (display range) is the complete pressure range where the gauge gives an indication (measurement signal). The valid
measurement information range (display range) consists of underrange, measurement range and overrange.
According to these definitions, 4 points are defined:12
3
4

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Lowest informational measurement value
Lowest precision measurement value
Highest precision measurement value
Highest informational measurement value

23

4.6.1Index

SI

DataType

NV

Access

9000

0x02

REAL

x

RO

Highest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

0x05

REAL

x

RO

Lowest Informational
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Subindex 0x05

Lowest value the gauge can measure without a specified accuracy.

Information
Capacitance DiaphragmSubindex 0x01

Index

SI

DataType

9001

0x01

UINT

RO

Sensor Warning

0x02

UINT

RO

Sensor Error

Subindex 0x02

NV

AccessPM NameSensor Warnings
Bit 0
Bit 1
Bit 2…15

0
Electronics Warning
0

Sensor Errors
Bit 0
Bit 1
Bit 2…15

24

PM Name0Electronics Failure0

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4.6.2

4.6.3

Information Common
Piezo

Index

SI

DataType

NV

Access

9010

0x02

REAL

x

RO

Highest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

0x05

REAL

x

RO

Lowest Informational
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Subindex 0x05

Lowest value the gauge can measure without a specified accuracy.

Information Piezo

Index

SI

DataType

9012

0x01

UINT

RO

Sensor Warning

0x02

UINT

RO

Sensor Error

Subindex 0x01

Subindex 0x02

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AccessPM Name0Electronics Warning
0

Sensor Errors
Bit 0
Bit 1
Bit 2…15

Information Common
Heat Transfer

NV

Sensor Warnings
Bit 0
Bit 1
Bit 2…15

4.6.4

PM Name0Electronics Failure
0

Index

SI

DataType

NV

Access

9020

0x02

REAL

x

RO

PM NameHighest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

0x05

REAL

x

RO

Lowest Informational
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

BCG450-SE.cp

25

4.6.5

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Subindex 0x05

Lowest value the gauge can measure without a specified accuracy.

Information Heat
Transfer

Index

SI

DataType

9023

0x01

UINT

RO

Sensor Warning

0x02

UINT

RO

Sensor Error

Subindex 0x01

4.6.7

26

Information Common
Hot Cathode Ion

PM Name0Electronics Warning
0

Sensor Errors
Bit 0
Bit 1
Bit 2…15

4.6.6

AccessSensor Warnings
Bit 0
Bit 1
Bit 2…15

Subindex 0x02

NV

0Electronics Failure
0

Index

SI

DataType

NV

AccessPM Name

9030

0x02

REAL

x

RO

Highest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

0x05

REAL

x

RO

Lowest Informational
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Subindex 0x05

Lowest value the gauge can measure without a specified accuracy.

Information Hot
Cathode Ion

Index

SI

DataType

9035

0x01

UINT

RO

Sensor Warning

0x02

UINT

RO

Sensor Error

NV

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Subindex 0x01

Sensor Warnings
Bit 0
Bit 1
Bit 2…8
Bit 9
Bit 10
Bit 11
Bit 12…15

Subindex 0x02

Sensor Errors
Bit 0
Bit 1
Bit 2…8
Bit 9
Bit 10
Bit 11
Bit 12…15

4.6.8

Information Trip
Point 1/2

Sensor Filament 1 Warning
Sensor Filament 2 Warning
0
Electronics Warning
0
Pressure to high for Degas0

Sensor Filament 1 Error
Sensor Filament 2 Error
0Electronics Failure0
Overpressure Emission OFF
0

Index

SI

DataType

NV

AccessPM Name

900E

0x01

REAL

RO

Input Value Trip Point 1

900F

0x01

REAL

RO

Input Value Trip Point 2

Subindex 0x01 (900E)

Input Value Trip Point 1: Trip Point Input value as referenced by Source Index(I 0x800E, SI 0x0E).

Subindex 0x01 (900F)

Input Value Trip Point 2: 0 Trip Point Input value as referenced by Source Index(I 0x800F, SI 0x0E).

4.7 Device Area
(0xF000...0xAFFF)
4.7.1 Semiconductor Device
ProfileSI

DataType

F000

0x01

UINT

NV

AccessRO

PM NameIndex Distance

0x02

UINT

RO

Maximum Number ofModulesSubindex 0x01

Index Distance: Index offset between PDO entries of two consecutive modules (forETG.5003 = 0x10), e.g. 0x6000, 0x6010.

Subindex 0x02

Maximum Number of Modules: For the BCG450 this value always is 4.

4.7.2 Module Profile List

Subindex 0x01

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Index

SI

DataType

F010

0x01

UDINT

NV

AccessRO

PM NameModule Profile List

0x02

UDINT

RO

Module Profile List

0x03

UDINT

RO

Module Profile List

0x04

UDINT

RO

Module Profile List

Each sub-index lists the profile-number of the corresponding module.

27

Subindex 0x02

Each sub-index lists the profile-number of the corresponding module.

Subindex 0x03

Each sub-index lists the profile-number of the corresponding module.

Subindex 0x04

Each sub-index lists the profile-number of the corresponding module.

4.7.3 Exceptions
4.7.4 Active Exception Status

Index

SI

F380

Active Exception Status

4.7.5 Active Device Warning
Details

Subindex 0x02

28

USINT

Bit 0

Device Warning

Bit 1

Manufacturer Warning

Bit 2

Device Error

Bit 3

Manufacturer Error

Bit 4…7

0

AccessPM NameRO

tx

ActiveException Status

The "active device warning details" parameter describes the warning state of thecomplete device.
Index

SI

DataType

F381

0x01

NV

AccessPM Name

UDINT

RO

tx

Active Device Warning
Details

0x02

UDINT

RO

tx

Active Device Warning
Details

0x03

UDINT

RO

tx

Active Device Warning
Details

0x04

UDINT

RO

tx

Active Device Warning
Details

0x01

UDINT

RO

tx

Active Manufacturer
Warning Details

0x02

UDINT

RO

tx

Active Manufacturer
Warning Details

0x03

UDINT

RO

tx

Active Manufacturer
Warning Details

0x04

UDINT

RO

tx

Active Manufacturer
Warning Details

Active Device Warning Details (Index F381)
Bit 0

0

Bit 1

Electronics warning

Bit 2…31

0

Active Device Warning Details (Index F381)
Bit 0…31

Subindex 0x03

NV

Active Exception Status

F382

Subindex 0x01

DataType

0

Active Device Warning Details (Index F381)
Bit 0

0

Bit 1

Electronics warning

Bit 2…31

0

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Subindex 0x04

Subindex 0x01

Active Device Warning Details (Index F381)
Bit 0

0

Bit 1

Electronics warning

Bit 2…31

0

Active Manufacturer Warning Details (Index F382)
Bit 0…31

Subindex 0x02

Active Manufacturer Warning Details (Index F382)
Bit 0…31

Subindex 0x03

Subindex 0x02

Subindex 0x03

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0

The "active device error details" parameter describes the error state of the complete device.
Index

SI

DataType

F383

0x01
0x02

F384

Subindex 0x01

0

Active Manufacturer Warning Details (Index F382)
Bit 0…31

4.7.6 Active Device Error
Details0

Active Manufacturer Warning Details (Index F382)
Bit 0…31

Subindex 0x04

0NV

AccessPM Name

UDINT

RO

tx

Active Device Error Details

UDINT

RO

tx

Active Device Error Details

0x03

UDINT

RO

tx

Active Device Error Details

0x04

UDINT

RO

tx

Active Device Error Details

0x01

UDINT

RO

tx

Active Manufacturer Error
Details

0x02

UDINT

RO

tx

Active Manufacturer Error
Details

0x03

UDINT

RO

tx

Active Manufacturer Error
Details

0x04

UDINT

RO

tx

Active Manufacturer Error
Details

Active Device Error Details (Index F383; Capacitance Diaphragm)
Bit 0

0

Bit 1

Electronics failure

Bit 2…31

0

Active Device Error Details (Index F383; Piezo)
Bit 0

0

Bit 1

Electronics failure

Bit 2…31

0

Active Device Error Details (Index F383; Heat Transfer)
Bit 0

0

Bit 1

Electronics failure

Bit 2…31029

Subindex 0x04

Active Device Error Details (Index F383; Hot Cathode)Bit 0

Subindex 0x01

Bit 1

Electronics failure

Bit 2…31

0

Active Manufacturer Error Details (Index F384)
Bit 0…31

Subindex 0x02

Subindex 0x01

Subindex 0x01

4.7.8 Active Global Device
Error Details

Subindex 0x01

30

0Active Manufacturer Error Details (Index F384)
Bit 0…31

4.7.7 Active Global Device
Warning Details

0

Active Manufacturer Error Details (Index F384)
Bit 0…31

Subindex 0x04

0

Active Manufacturer Error Details (Index F384)
Bit 0…31

Subindex 0x03

00

The "active global device warning details" parameter describes the warning state of
the complete device.
Index

SI

DataType

F385

0x01

F386

0x01

NV

AccessPM Name

UDINT

RO

tx

Active Global Device
Warning Details

UDINT

RO

tx

Active Global
Manufacturer Warning
Details

Active Global Device Warning Details (Index F385)
Bit 0…20

Bit 3

EEPROM exception

Bit 4…31

0

Active Global Manufacturer Warning Details (Index F386)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1…31

0

The "active global device error details" parameter describes the error state of thecomplete device.
Index

SI

DataType

F387

0x01

F388

0x01

NV

AccessPM Name

UDINT

RO

tx

Active Global Device Error
Details

UDINT

RO

tx

Active Global
Manufacturer Error Details

Active Global Device Error Details (Index F387)
Bit 0

0

Bit 1

uP exception

Bit 2…31

0

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Subindex 0x01

4.7.9 Latched Device Warning
Details

Active Global Manufacturer Error Details (Index F388)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1

Wrong software version used in base device

Bit 2

Wrong sensor type detected

Bit 3…31

0

Index

DataType
USINT

RO

tx

Latched Exceptions Status

0x01

UDINT

RO

tx

Latched Device Warning
Details

0x02

UDINT

RO

tx

Latched Device Warning
Details

0x03

UDINT

RO

tx

Latched Device Warning
Details

0x04

UDINT

RO

tx

Latched Device Warning
Details

0x01

UDINT

RO

tx

Latched Manufacturer
Warning Details

0x02

UDINT

RO

tx

Latched Manufacturer
Warning Details

0x03

UDINT

RO

tx

Latched Manufacturer
Warning Details

0x04

UDINT

RO

tx

Latched Manufacturer
Warning Details

F390
F391

F392

tirb52e1

SI

NV

AccessPM Name

Latched Exceptions Status

Latched version of 0xF380.

Subindex 0x01 (F391)

Latched Device Warning Details: Latched version of 0xF381:01.

Subindex 0x02 (F391)

Latched Device Warning Details: Latched version of 0xF381:02.

Subindex 0x03 (F391)

Latched Device Warning Details: Latched version of 0xF381:03.

Subindex 0x04 (F391)

Latched Device Warning Details: Latched version of 0xF381:04.

Subindex 0x01 (F392)

Latched Manufacturer Warning Details: Latched version of 0xF382:01.

Subindex 0x02 (F392)

Latched Manufacturer Warning Details: Latched version of 0xF382:02.

Subindex 0x03 (F392)

Latched Manufacturer Warning Details: Latched version of 0xF382:03.

Subindex 0x04 (F392)

Latched Manufacturer Warning Details: Latched version of 0xF382:04.

(2019-02)

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31

4.7.10 Latched Device Error
Details

Index

SI

DataType

F393

0x01

F394

AccessPM Name

UDINT

RO

tx

Latched Device Error
Details

0x02

UDINT

RO

tx

Latched Device Error
Details

0x03

UDINT

RO

tx

Latched Device Error
Details

0x04

UDINT

RO

tx

Latched Device Error
Details

0x01

UDINT

RO

tx

Latched Manufacturer
Error Details

0x02

UDINT

RO

tx

Latched Manufacturer
Error Details

0x03

UDINT

RO

tx

Latched Manufacturer
Error Details

0x04

UDINT

RO

tx

Latched Manufacturer
Error Details

Subindex 0x01 (F393)

Latched Device Error Details: Latched version of 0xF383:01.

Subindex 0x02 (F393)

Latched Device Error Details: Latched version of 0xF383:02.

Subindex 0x03 (F393)

Latched Device Error Details: Latched version of 0xF383:03.

Subindex 0x04 (F393)

Latched Device Error Details: Latched version of 0xF383:04.

Subindex 0x01 (F394)

Latched Manufacturer Error Details: Latched version of 0xF384:01.

Subindex 0x02 (F394)

Latched Manufacturer Error Details: Latched version of 0xF384:02.

Subindex 0x03 (F394)

Latched Manufacturer Error Details: Latched version of 0xF384:03.

Subindex 0x04 (F394)

Latched Manufacturer Error Details: Latched version of 0xF384:04.

4.7.11 Latched Global Device
Warning Details

32

NV

Index

SI

DataType

AccessPM Name

F395

0x01

UDINT

NV

RO

tx

Latched Global Device
Warning Details

F396

0x01

UDINT

RO

tx

Latched Global
Manufacturer Warning
Details

Subindex 0x01 (F395)

Latched Global Device Warning Details: Latched version of 0xF385:01.

Subindex 0x01 (F396)

Latched Global Manufacturer Warning Details: Latched version of 0xF386:01.

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4.7.12 Latched Global Device
Error Details

Index

SI

DataType

F397

0x01

F398

0x01

PM Name

UDINT

RO

tx

Latched Global Device
Error Details

UDINT

RO

tx

Latched Global
Manufacturer Error Details

Latched Global Device Error Details: Latched version of 0xF387:01.

Subindex 0x01 (F398)

Latched Global Manufacturer Error Details: Latched version of 0xF388:01.

Index

SI

DataType

NV

Access

F3A1

0x01

UDINT

x

RW

Device Warning Mask

0x02

UDINT

x

RW

Device Warning Mask

0x03

UDINT

x

RW

Device Warning Mask

0x04

UDINT

x

RW

Device Warning Mask

0x01

UDINT

x

RW

Manufacturer Warning
Mask

0x02

UDINT

x

RW

Manufacturer Warning
Mask

0x03

UDINT

x

RW

Manufacturer Warning
Mask

0x04

UDINT

x

RW

Manufacturer Warning
Mask

F3A2

PM NameSubindex 0x01 (F3A1)

Device Warning Mask: Mask bits for 0xF381:01 and 0xF391:01.

Subindex 0x02 (F3A1)

Device Warning Mask: Mask bits for 0xF381:02 and 0xF391:02.

Subindex 0x03 (F3A1)

Device Warning Mask: Mask bits for 0xF381:03 and 0xF391:03.

Subindex 0x04 (F3A1)

Device Warning Mask: Mask bits for 0xF381:04 and 0xF391:04.

Subindex 0x01 (F3A2)

Manufacturer Warning Mask: Mask bits for 0xF382:01 and 0xF392:01.

Subindex 0x02 (F3A2)

Manufacturer Warning Mask: Mask bits for 0xF382:02 and 0xF392:02.

Subindex 0x03 (F3A2)

Manufacturer Warning Mask: Mask bits for 0xF382:03 and 0xF392:03.

Subindex 0x04 (F3A2)

Manufacturer Warning Mask: Mask bits for 0xF382:04 and 0xF392:04.

4.7.14 Device Error Mask

Index

SI

DataType

NV

Access

F3A3

0x01

UDINT

x

RW

Device Error Mask

0x02

UDINT

x

RW

Device Error Mask

0x03

UDINT

x

RW

Device Error Mask

0x04

UDINT

x

RW

Device Error Mask

0x01

UDINT

x

RW

Manufacturer Error Mask

0x02

UDINT

x

RW

Manufacturer Error Mask

0x03

UDINT

x

RW

Manufacturer Error Mask

0x04

UDINT

x

RW

Manufacturer Error Mask

F3A4

(2019-02)

AccessSubindex 0x01 (F397)

4.7.13 Device Warning Mask

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PM Name33

Subindex 0x01 (F3A3)

Device Error Mask: Mask bits for 0xF383:01 and 0xF393:01.

Subindex 0x02 (F3A3)

Device Error Mask: Mask bits for 0xF383:02 and 0xF393:02.

Subindex 0x03 (F3A3)

Device Error Mask: Mask bits for 0xF383:03 and 0xF393:03.

Subindex 0x04 (F3A3)

Device Error Mask: Mask bits for 0xF383:04 and 0xF393:04.

Subindex 0x01 (F3A4)

Manufacturer Error Mask: Mask bits for 0xF384:01 and 0xF394:01.

Subindex 0x02 (F3A4)

Manufacturer Error Mask: Mask bits for 0xF384:02 and 0xF394:02.

Subindex 0x03 (F3A4)

Manufacturer Error Mask: Mask bits for 0xF384:03 and 0xF394:03.

Subindex 0x04 (F3A4)

Manufacturer Error Mask: Mask bits for 0xF384:04 and 0xF394:04.

4.7.15 Global Device Warning
Mask

SI

DataType

NV

Access

F3A5

0x01

UDINT

x

RW

PM NameGlobal Device Warning
Mask

F3A6

0x01

UDINT

x

RW

Global Manufacturer
Warning Mask

Subindex 0x01 (F3A5)

Global Device Warning Mask: Mask bits for 0xF385:01 and 0xF395:01.

Subindex 0x01 (F3A6)

Global Manufacturer Warning Mask: Mask bits for 0xF386:01 and 0xF396:01.

4.7.16 Global Device Error
Mask

Index

SI

DataType

NV

Access

F3A7

0x01

UDINT

x

RW

PM NameGlobal Device Error Mask

F3A8

0x01

UDINT

x

RW

Global Manufacturer Error
Mask

Subindex 0x01 (F3A7)

Global Device Error Mask: Mask bits for 0xF387:01 and 0xF397:01.

Subindex 0x01 (F3A8)

Global Manufacturer Error Mask: Mask bits for 0xF388:01 and 0xF398:01.

4.7.17 Combination Gauge

34

Index

Index

SI

DataType

AccessPM Name

F640

0x01

BOOL

NV

RO

tx

Combination Gauge
Reading Valid

0x02

BOOL

RO

tx

Combination Gauge
Overrange Exceeded

0x03

BOOL

RO

tx

Combination Gauge
Underrange Exceeded

0x11

REAL

RO

tx

Combination Gauge Active
Value

0x12

UINT

RO

tx

Combination Gauge Active
Sensor Number

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Subindex 0x01

Identifies whether the complete vacuum pressure gauge (with several measuring
principles) is out of its absolute overrange or absolute underrange, or in any otherfailure condition.

Subindex 0x02

If the bit "Overrange" is set, all modules of the gauge are in an overrange condition.

Subindex 0x03

If the bit "Underrange" is set, all modules of the gauge are in an underrange
condition

Subindex 0x11

The value copied from the measurement value of the active measuring module
used for the Input PDO.

Subindex 0x12

Identifies the module that is providing the measurement value, the latter of which iscopied into the Active Value parameter for all Input PDO’s.

4.7.18 Trip Point Output All

Subindex 0x01

0

No module has a valid value

1

Capacitance diaphragm sensor is providing the
Active Value2

Piezo sensor is providing the Active Value

3

Heat Transfer sensor is providing the Active Value

4

Hot Cathode sensor is providing the Active Value

Index

SI

DataType

F641

0x01

UDINT

NV

AccessPM NameRO

tx

Trip Point Output All
Instance

Status of Trip Point instances.
Trip Point Output All Instance

4.7.19 Input Latch Local
Timestamp

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Bit 0
Bit 1
Bit 2
Bit 3
Bit 4…31

Status High Trip (I 0x600E, SI 0x01)
Status Low Trip (I 0x600E S,I 0x02)
Status High Trip (I 0x600F, SI 0x01)
Status Low Trip (I 0x600F, SI 0x02)
0

Index

SI

DataType

F6F0

0x01

NV

AccessPM Name

UDINT

RO

tx

Input Latch Local
Timestamp

0x02

UDINT

RO

tx

Input Latch Local
Timestamp

0x03

UDINT

RO

tx

Input Latch Local
Timestamp

0x04

UDINT

RO

tx

Input Latch Local
Timestamp

Subindex 0x01

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

Subindex 0x02

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

BCG450-SE.cp

35

Subindex 0x03

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

Subindex 0x04

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

4.7.20 Configure Device

Subindex 0x01

Index

SI

DataType

NV

Access

F840

0x01

UDINT

x

RW

Data Units

0x02

V_STRING

RW

Password

0x03

Enum

RW

Data Units Enumx

PM Name

Unit of the Value of the Analog Input Sensor Instance and all related parameters.
Trip Point Output All Instance
0x00220000
0xFD4E0000
0x00A10000
0x00E00000

Pascalmbar
TorrCounts (INFICON)

If this value is changed, also Subindex 3 will change the value accordingly.

Subindex 0x02

Writing the corresponding password (vendor specified value) enables Access
Rights (Index F940 Subindex 03).

Subindex 0x03

Data Unit for Input Sensor as Enum to have a list of possible values.
Data Units
0x01(Pa)
0x04(mBar)
0x05(Torr)

Pascalmbar
Torr

If this value is changed, also Subindex 1 will change the value accordingly.

36

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4.7.21 Information Device

Index

SI

DataType

F940

0x01

UDINT

AccessPM NameRO

Measurement Principle

0x02

BYTE

RO

Number of Sensors

0x03

USINT

RO

Access Rights

0x04

V_STRING

F9F0

RO

SW Version VPG PCB

V_STRINGx

RO

Manufacturer Serial
Number

F9F1

0x01

UDINT

RO

CDP Functional
Generation Number

F9F2

0x01

UDINT

RO

SDP Functional
Generation Number(Module 1)

0x02

UDINT

RO

SDP Functional
Generation Number(Module 2)

0x03

UDINT

RO

SDP Functional
Generation Number(Module 3)

0x04

UDINT

RO

SDP Functional
Generation Number(Module 4)

V_STRINGRO

Vendor Name

0x01

V_STRING

RO

Semiconductor SDP
Device Name (Module 1)

0x02

V_STRING

RO

Semiconductor SDP
Device Name (Module 2)

0x03

V_STRING

RO

Semiconductor SDP
Device Name (Module 3)

0x04

V_STRING

RO

Semiconductor SDP
Device Name (Module 4)

0x01

USINT

RW

rx
tx

Output Identifier

0x02

USINT

RW

rx
tx

Output Identifier

0x03

USINT

RW

rx
tx

Output Identifier

0x04

USINT

RW

rx
tx

Output Identifier

F9F3
F9F4

F9F5

Subindex 0x01 (F940)

NV

F9F6

UDINT

F9F7

UDINT

F9F8

UDINT

x

RO

Time since power onROTotal time poweredRO

Firmware Update
Functional Generation
NumberMeasurement principle assigned to the object instance.
The most significant nibble of the parameter represents the sensor type of the first
Module, the second most significant nibble of the parameter represents the sensor
type of the second Module, and so forth.
Measurement Principle (Index F940)
1
2
3
4
5

Subindex 0x02 (F940)

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Capacitance Manometer
Piezo
Heat Transfer
Cold Cathode
Hot CathodeNumber of Sensors (Index F940): In this device are 4 sensors implemented.

37

Subindex 0x03 (F940)

Access Rights (Index F940)
01
2

Subindex 0x04 (F940)

4.7.22 Command Full Scale
AdjustSubindex 0x01

User
access to measurement and limited diagnostic features
Service
access to additional diagnostic features (vendor specific)
Superuser
access to vendor-specific parameters and features, e.g.
calibration parameters, model number, serial numbers

Software version of the basic device.

Execution of this command will start a Full Scale Adjust operation.
Index

SI

DataType

FB41

0x01

V_STRING

NV

AccessRW

PM NameCommand

0x02

BYTE

RO

Status0x03

V_STRING(3)RO

Response

A full scale adjust command is initiated when the following byte sequence is sent.
Command

Subindex 0x02

Byte 00: Full Scale Adjust

Byte 1

Index of the Sensor Module. Value has to be 1
1: Capacitance Diaphragm

Byte 2…5

Full Scale value (Data format: REAL). Value has tobe 0

Status (supported values)
0
1
2
3
255

Subindex 0x03

4.7.23 Command Degas ON /OFF

38

Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply
available
Last command completed, errors present, reply available
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

Byte 20: Full Scale Adjust successful
1: Full Scale Adjust failed: out-of-range
254: No previous Full Scale Adjust command issued

Execution of this command will initiate or cancel a degas operation.
Index

SI

DataType

FB43

0x01

V_STRING(2)NV

AccessRW

PM NameCommand

0x02

BYTE

RO

Status0x03

V_STRING(3)RO

Response

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Subindex 0x01

A degas command is initiated when the following byte sequence is sent.
Command

Subindex 0x02

Byte 00: Degas OFF
1: Degas ON

Byte 1

Index of the sensor module. Value has to be 4
4: Hot CathodeStatus (supported values)
0
1
2
3
255

Subindex 0x03

4.7.24 Command Emission
ON / OFF

Subindex 0x01

Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply
available
Last command completed, errors present, reply available
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

Byte 20: Degas ON / OFF successful
1: Degas ON / OFF failed (unspecified reason)
2: Degas On failed because pressure to high254: No previous Degas ON / OFF command issued

Execution of this command will turn on or off the gauge’s emission state.
Index

SI

DataType

NV

AccessPM Name

FB44

0x01

V_STRING(2)RW

Command

0x02

BYTE

RO

Status0x03

V_STRING(3)RO

Response

An emission command is initiated when the following byte sequence is sent.
Command

Subindex 0x02

Byte 0

0: Emission OFF
1: Emission ON

Byte 1

Index of the sensor module. Value has to be 4
4: Hot CathodeStatus (supported values)
0
1
2
3
255

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Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply available
Last command completed, errors present, reply available
Command is executing

39

Subindex 0x03

4.7.25 Device Reset Command

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

Byte 2

0: Emission ON / OFF successful
1: Emission ON / OFF failed (unspecified reason)
2: Emission On failed because pressure to high254: No previous Emission ON / OFF commandissuedExecution of this command causes the device to emulate a complete power cycle.
This includes an ESC reset. An SDP may limit some behavior of the power cycle
emulation, but shall not exclude the EtherCAT interface.
As consequence of an ESC reset all following devices are disconnectedfrom the network.
There are two versions of this command:

Subindex 0x01•

Standard reset (as described above)•

Factory reset (as described above, but additionally, all parameters are restored
to as-shipped defaults).

Index

SI

DataType

NV

AccessPM Name

FBF0

0x01

V_STRING(6)RW

Command

0x02

BYTE

RO

Status0x03

V_STRING(2)RO

Response

A device reset is initiated when the following byte sequence is sent.
Command
Byte 0
Byte 1
Byte 2Byte 3
Byte 4
Byte 5

Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

4.7.26 Exception ResetCommand

40

0x74
0x65
0x73
0x65
0x72
0x00 = Standard reset, 0x66 = Factory Reset

Reserved
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

Execution of this command clears the latched exceptions.
Index

SI

DataType

FBF1

0x01

V_STRING(5)NV

AccessRW

PM NameCommand

0x02

BYTE

RO

Status0x03

V_STRING(2)RO

Response

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Subindex 0x01

An exception reset is initiated when the following byte sequence is sent.
Command
Byte 0
Byte 1
Byte 2Byte 3
Byte 4

Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

4.7.27 Store Parameters
Command

Subindex 0x01

0x74
0x65
0x73
0x65
0x72

Last command completed, no error, no response
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

Execution of this command will store all parameters to non-volatile memory. If adevice automatically saves all non-volatile parameters at the time they are set, thiscommand will not take any action.
Index

SI

DataType

FBF2

0x01

V_STRING(4)NV

AccessRW

PM NameCommand

0x02

BYTE

RO

Status0x03

V_STRING(2)RO

Response

A device reset is initiated when the following byte sequence is sent.
Read:
Command: Read
Byte 0
Byte 1
Byte 2Byte 30x01 = slave saves the non-volatile parameterswhen writing 0xFBF2:01 with 0x65766173
not used = 0x00
not used = 0x00
not used = 0x00

Write:
Command: Write
Byte 0
Byte 1
Byte 2Byte 3Subindex 0x02

Status (supported values)
0
1
2
3
255

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0x73
0x61
0x76
0x65

Last command completed, no error, no response
Reserved
Last command completed, error, no response
Reserved
Command is executing

41

Subindex 0x03

4.7.28 Calculate Checksum
Command

Subindex 0x01

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

Execution of this command will calculate a checksum for all writable, non-volatileparameters as currently stored in non-volatile memory.
Index

SI

DataType

FBF3

0x01

V_STRING(4)NV

AccessRW

PM NameCommand

0x02

BYTE

RO

Status0x03

V_STRING(6)RO

Response

A device reset is initiated when the following byte sequence is sent.
Read
Command: Read
Byte 0

Bit 0 = 1: non-volatile parameters supported
Bit 1 = 1: CRC-32
Bit 2..7 = 0: not used
not used = 0x00
not used = 0x00
not used = 0x00

Byte 1
Byte 2Byte 3
Write

Command: Write
Byte 0

Bit 0 = 1: use default checksum algorithm of the slave
Bit 1 = 1: CRC-32
Bit 2..7 = 0: not used
not used = 0x00
not used = 0x00
not used = 0x00

Byte 1
Byte 2Byte 3Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

42

Last command completed, no error, no response
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0

Byte 2Checksum return value, Byte 0

Byte 3Checksum return value, Byte 1

Byte 4Checksum return value, Byte 2

Byte 5Checksum return value, Byte 3

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4.7.29 Load Parameters
Command

Subindex 0x01

Execution of this command will load all parameters from non-volatile memory.
Index

SI

DataType

NV

AccessPM Name

FBF4

0x01

V_STRING(4)RW

Command

0x02

BYTE

RO

Status0x03

V_STRING(2)RO

Response

A device reset is initiated when the following byte sequence is sent.
Read:
Command: Read
Byte 00x01 = slave loads the non-volatile parameterswhen writing 0xFBF4:01 with 0x64616F6C
not used = 0x00
not used = 0x00
not used = 0x00

Byte 1
Byte 2Byte 3
Write:

Command: Write
Byte 0
Byte 1
Byte 2Byte 3Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

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0x6C
0x6F
0x61
0x64

Last command completed, no error, no response
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

43

Appendix
A:

Overview Setting Trip
Points

Input Data Trip Point
Index

ObjectCode

0x6nnxRECORD

Sub
Index

Data
Type

Ac- B/S PM Name
cess
RO

Description

Input Trip Point 1 / 2

Trip Point 1 / Trip Point 2
E = Trip Point 1
F = Trip Point 20x600E0x600F

0x01

BOOL

RO

tx

Status High Trip

1: High Trip asserted

0x600E0x600F

0x02

BOOL

RO

tx

Status Low Trip

2: Low Trip asserted

Trip Point 1 →  18

Trip Point 2 →  18

Trip Point Configuration
Index

ObjectCode

0x8nnxRECORD

Sub
Index

Data
Type

Ac- B/S PM Name
cess
RO

Description

Configuration Trip
Point 1 / 2

Trip Point 1 / 2
E = Trip Point 1
F = Trip Point 20x800E0x800F

0x01

BOOL

RW

B/S

High Trip enable

High Trip Point
0: disable
1: enable

0x800E0x800F

0x02

BOOL

RW

B/S

Low Trip enable

Low Trip Point
0: disable
1: enable

B/S

High Trip Point Limit

Mandatory, if 0x8nnE.20 is not supported (Low
Trip Point Limit).
High limit to trigger trip point condition, if Input
Value (I 0x9nnE, SI 0x01) is above this limit.

0x800E0x800F

0x11

REAL

RW

0x800E0x800F

0x12

UDINT RW

B/S

Object index of High Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
High Trip Source Index Bit 00…07: reserved
It is possible to reference to "High Trip Point
Limit" or any other available input source fromanother sensor (in case of combi / multigauges.

0x800E0x800F

0x13

REAL

B/S

Percentage High Trip
SourcePercentage of value referenced by High Trip
Source Index (I 0x8nnE, SI 0x12) in %.

Low Trip Point Limit

Mandatory, if 0x8nnE.17 is not supported (High
Trip Point Limit).
Low limit to trigger trip point condition, if Input
Value (I 0x9nnE, SI 0x01) is below this limit.

0x800E0x800F

0x14

REAL

RW

RW

B/S

(continued)

44

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(Table "Trip Point Configuration" concluded)
Index

ObjectCode

Sub Data
Index TypeAc- B/S PM Namecess

Description

0x800E0x800F0x15 UDINT RW

B/S

Low Trip Source Index

Object index of Low Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
It is possible to reference to "Low Trip Point Limit"
or any other available input source from anothersensor (in case of combi / multigauges.

0x800E0x800F0x16 REAL

RW

B/S

Percentage Low Trip
SourcePercentage of value referenced by Low Trip Source
Index (I 0x8nnE, SI 0x15) in %.

0x800E0x800F0x17 REAL

RW

B/S

High Trip Hysteresis

Mandatory, if 0x8nnE.17 is not supported (High Trip
Point Limit).
Hysteresis value for High Trip Point.

0x800E0x800F0x18 REAL

RW

B/S

Low Trip Hysteresis

Mandatory, if 0x8nnE.20 is not supported (Low Trip
Point Limit).
Hysteresis value for Low Trip Point.

Source Index

Mandatory, if combi and multigauges and High Trip
Point Limit or Low Trip Point Limit supported.
Object index of active source of Input Value(I 0x9nnE, SI 0x01).
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved

0x800E0x800F

0x1A UDINT RW

B/STrip Point 1 →  19

Trip Point 2 →  22

Information Data of the Modules
Index

ObjectCode

0x9nnxRECORD

0x900E0x900FSub Data
Index Type0x01 REAL

Ac- B/S PM Namecess

Description

RO

Information Trip
Point 1 / 2

Trip Point 1 / Trip Point 2
E = Trip Point 1
F = Trip Point 2

RO

Input Value of Trip
Point 1 / 2

Mandatory, if 0x8nnE.26 is not supported(Source Index).
Trip Point Input value as referenced by Source
Index (I 0x8nnE, SI 0x1A).

Trip Point 1 / 2 →  27

Trip Point All Slots Combined
Index

ObjectCode

0xF641 RECORD

0xF641

Sub Data
Index TypeAc- B/S PM Namecess

Description

RO

Trip Point Output All

Trip Point Output All

Trip Point Output All
Instance

Status of Trip Point Instances
Bit 0: Status High Trip
(I 0x6nnE, SI 0x01)
Bit 1: Status Low Trip
(I 0x6nnE, SI 0x02)
Bit 2: Status High Trip
(I 0x6nnF, SI 0x01)
Bit 3: Status Low Trip
(I 0x6nnF, SI 0x02)

0x01 UDINT RO

TX

Trip Point 1 / 2 →  35
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BCG450-SE.cp

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Literature [1]www.inficon.com
Instruction Sheet
TripleGauge™,
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450, BCG450-SD, BCG450-SE, BCG450-SP
tima40d1 (German)
tima40e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [2]www.inficon.com
Instruction Sheet
TripleGauge™,
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450-SD, BCG450-SE, BCG450-SP
tima41d1 (German)
tima41e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [3]www.inficon.com
Operating Manual
TripleGauge™,
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450, BCG450-SD, BCG450-SE, BCG450-SP
tina40d1 (German)
tina40e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [4]ETG.1000.2: Physical Layer service definition and protocol specification

 [5]ETG.1000.3: Data Link Layer service definition

 [6]ETG.1000.4: Data Link Layer protocol specification

 [7]ETG.1000.5: Application Layer service definition

 [8]ETG.1000.6: Application Layer protocol specification

 [9]ETG.1020: EtherCAT Protocol Enhancements [10]

ETG.2000: EtherCAT Slave Information

 [11]

ETG.5001.1: Modular Device Profile – Part 1: General MDP DeviceModel [12]

ETG.5003.1 S (R) V1.1.0: Semiconductor Device profile – Part 1:
Common Device Profile (CDP) [13]

ETG.5003.2080 S (R) V1.3.0: Semiconductor Device profile – Part
2080: Specific Device Profile (SDP): Vacuum Pressure Gauge [14]IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications

 [15]IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3

 [16]SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATORNETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES [17]SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers

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BCG450-SE.cp

Notestirb52e1(2019-02)

BCG450-SE.cp

47

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com

Original: English

t i r b52e1

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