1 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/5/17
2024/3/15

Chemicals and company identification

Product name

ＯＦ－ＳＲ

Product code

EO17

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Classification not possible

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)

Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Classification not possible

Respiratory sensitization

Classification not possible

Skin sensitization

Category 1A

Germ cell mutagenicity

Classification not possible

Carcinogenicity

Classification not possible

Reproductive toxicity

Classification not possible

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(singleexposure)

Category 1

Specific target organ toxicity(repeatedexposure)Classification not possible

Aspiration hazard

Classification not possibleHazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Exclamation

Health Hazard

感嘆符

健康有害性

Signal word

DangerDangerous goods hazard
information

May cause an allergic skin reaction.
May cause respiratory irritation.
Causes damage to organs Digestive organs.

2013/5/17
2024/3/15

3 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Precautionary statements

SECTION 3【Safety measures】

Do not breathe dust/fume/gas/mist/vapours/spray.
Avoid breathing dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Use only outdoors or in a well-ventilated area.
Contaminated work clothing should not be allowed out of the workplace.
Wear Protective glovess/protective clothing/eye protection/face protection.

【First-aid measures】

IF ON SKIN：Wash with plenty of soap and water.
IF INHALED: Remove person to fresh air and keep comfortable for breathing.
If exposed or concerned：Call a poison center or doctor/physician.
Call poison center or doctor/physician if you feel unwell.
Specific treatment.
If skin irritation or rash occurs：Get medical advice/attention.
Take off contaminated clothing and wash it before reuse.

【Storage】

Store in a well-ventilated place. Keep container tightly closed.
Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-Composition/information on ingredients

Substance/Mixture

MixtureChemical name

Copper

Iron

Perfluoropolyethercompound

Chemical formula

CuFe

Perfluoropolyether
compoundConcentration or concentrationrange

Cu： 77.1-79.6%
Fe ：19.3-19.9%
Perfluoropolyether compound ： 0.5-3.6%
Total = 100%

CAS No.

7440-50-8

7439-89-6

Confidential-1

TSCA Inventry

CopperIron

No data available

EINECS number

231-159-6

231-096-4

No data available

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

2013/5/17
2024/3/15

4 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

2013/5/17
2024/3/15

Firefighting measures

Suitable extinguishing media

This product itself is not flammable.

Unsuitable extinguishing media

No data available

Specific hazards

No data available

Specific extinguishing methods

In the case of a fire in the periphery, the portable container is quickly moved to asafe place.

Special protective equipment for
firefighters

Wear suitable protective equipment (gloves, glasses and a mask) in fire-fighting.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
proceduresProtection equipment (specified as those in which the properties of the productare suitable) worn during operation so that airborne droplets, etc., do not adhere
to the skin and dusts and gases are not absorbed.

Environmental precautions

The leakage may not directly flow into rivers or sewage.

Methods and material forcontainment and cleaning up

The leaked material is scooped up, or swept up and gathered to be recovered ina paper bag or a drum.
After recovery, a small amount of the residue is absorbed in sediment, sawdust,
etc.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

5 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEETrev. 8.0

Date of Issue
Revised Date

Safety handling precautions

Handling work must be practiced in a room where there is a local or total
ventilation facility.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

2013/5/17
2024/3/15

Conditions for safe storage,
including any incompatibilities

SECTION 8

Safe storage conditions

Store in a well-ventilated place. Keep container tightly closed.
Store locked up.

Safety packaging material

No data available

Exposure controls/personal protection
CuFe

Perfluoropolyether
compoundPermissible concentration
ＡＣＧＩＨ

Appropriate engineering controls

Individual protection measures,such as personal protective
equipment
Respiratory protection

SECTION 9

TWA 0.2 mg/㎥ (Hume),
No data available
TWA 1 mg/㎥ (dust, mist)(2013 Edition)

TWA 200ppm (methanoldecomposition products:)
STEL 250ppm (methanoldecomposition products:)(2012 edition)

Use sealed devices, equipment, or a local exhaust ventilation as much as
possible.

Dustproof mask

Hand protection

Protective gloves

Eye/face protectionDust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

SolidFormCup, fibrous

ColourRed copper color and dark grayOdour

None

Melting point/freezing point

CuFe

Perfluoropolyether
compound

1083℃

1535℃

Not applicable6 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Boiling point or initial boiling point
and boiling range

2595℃

2730℃

Not applicable

Flammability

No data available

No data available

No data available

Upper/lower flammability or
explosive limits

No data available

No data available

No data available

Flash point

No data available

No data available

No data available

Auto-ignition temperature

No data available

No data available

No data available

Decomposition temperature

No data available

No data available

No data available

pHNo data available

No data available

No data available

Kinematic viscosity

No data available

No data available

No data available

Water

Insoluble

Insoluble

Sparingly soluble

Other solvents

It gradually dissolve in an No data available
ammonium solution. :HSDB(2013)No data available

Partition coefficient: noctanol/water

No data available

No data available

No data available

Vapour pressure

1 mm Hg at 1628℃：HSDB(2013)

No data available

Fine (25 ℃)

Density and/or relative density

8.94g/c㎥：HSDB(2013)

7.86

1.71（25℃）

Relative vapor density

No data available

No data available

No data available

Particle characteristics

No data available

No data available

No data available

Other information

No data available

No data available

No data available

CuFe

Perfluoropolyether
compoundReactivity

Turns green upon
exposure to humid air.
Compounds sensitive toshock are formed byacetylene compounds,ethylene oxides, andazides

No data available

No data available

Chemical stability

Turns green upon
exposure to humid air.
Compounds sensitive toshock are formed byacetylene compounds,ethylene oxides, andazides

Slowly oxidizes in theatmosphere.

No data available

Solubility（Density）

SECTION 10Stability and reactivity

2013/5/17
2024/3/15

7 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Possibility of hazardous reactions

Reacts with oxides
Produces rust when in(chlorates, bromates, and presence of humidity.
iodates, etc.), so there is arisk of explosion

No data available

Conditions to avoid

Contact with humidity and High temperature,
hazardous reactive
humidity, and flame
materials.

No data available

Incompatible materials

Acetylene compounds,ethylene oxides, azides,and oxidants (chlorate,bromate, iodate, etc)

Strong acids and ammonia No data available

Hazardous decomposition products Carbon monoxide, carbon No data available
dioxide, and copper fumes
produced by combustion.

SECTION 11

2013/5/17
2024/3/15

No data available

Toxicological information
CuFe

Perfluoropolyether
compoundAcute toxicity(oral)

No data available

Oral administration in rat: LD50: 5628mg/kg (rat)
LD50： 30 g/kg,(methanol decomposition
Intraperitoneal
products:)
administration in rat:
LDLo: 20 mg/kg
Oral administration inguinea pig: LD50: 20mg/kg

Acute toxicity(dermal)

No data available

No data available

No data available

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

No data available

LC50: 6400ppm/4Hr (rat)(methanol decompositionproducts:)

Acute toxicity （Inhalation:Vapours）

Solid (GHS definition)

No data available

No data available

Acute toxicity （Inhalation: Dustsand mists）

No data available

No data available

No data available

Skin corrosion/irritation

Classification not possible No data available
due to lack of data.
Besides, it is described in
PATTY (6th, 2012) that
contact dermatitis
associated with copper
has been reported, but
few cases of dermatitis
caused by copper metal orits compounds occur inthe industry.

Skin irritation: 20mg/24Hrin irritation (rabbit)(methanol decompositionproducts:)

8 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

No data available

Date of Issue
Revised Date

Serious eye damage/irritation

No data available

Respiratory or skin sensitization

It was classified in
No data available
Category 1A because theJapan Society for
Occupational Health(JSOH) classified copperand its compounds as
occupational skinsensitizers Group 2(Recommendation ofOccupational Exposure
Limits (Japan Society For
Occupational Health(JSOH), 2012)), and it
applies to this substance(OEL Documentations(Sensitizationclassification) (JapanSociety For Occupational
Health (JSOH, May 26,2010))).

No data available

Germ cell mutagenicity

No data available

No data available

No data available

Carcinogenicity

It was classified as
No data available"Classification notpossible" because theU.S. EPA classified it in I
(IRIS (2005)). The
category was revised
according to the revised
GHS classification
guidance for the Japanese
government.

No data available

Reproductive toxicity

No data available

No data available

No data available

2013/5/17
2024/3/15

Eye irritation: 100mg/24Hrin irritation (rabbit)(methanol decompositionproducts:)

9 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

Specific target organ toxicity(single From the knowledge inNo data availableexposure)humans in EHC (1998),
ACGIH (7th, 2001), andATSDR (2004), respiratory
symptoms (respiratorytract irritation) are themain acute toxic signs in
the inhalation route. As
for oral exposure, it isdescribed that digestive
symptoms (nausea,vomiting, abdominal pain,etc.) were observed after
the ingestion of drinkingwater and others
containing high copper
concentrations, and there
are numerous reports thatnausea and vomiting
mainly occurred. Other
than these, it is reported
in EHC that inhalation
exposure caused
hepatomegaly, but the airlevels were very high, and
it is described in ATSDR
that liver lesions fromacute copper poisoning
are rare except for
specific diseases (Wilson'sdisease, etc.). Therefore,
the liver was not includedin the target organs, and it
was classified in Category
1 (digestive system),Category 3 (respiratory
tract irritation).

Date of Issue
Revised Date

No data available

2013/5/17
2024/3/15

10 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/5/17
2024/3/15

Specific target organ
toxicity(repeated exposure)

It is reported in EHC
No data available(1998), DFGOT vol. 22(2006) that repeated oral
exposure to copper inhumans caused digestive
symptoms (nausea,vomiting, abdominal pain,etc.) and liver disorder(hepatic failure, cirrhosis).
Because digestive
symptoms are nausea,vomiting, abdominal pain,etc., they cannot be
regarded as specifictarget organ toxicity.
Furthermore, hepatic
failure is reported in only
one case, therefore it wasjudged impossible togeneralize it. From theabove, it was classified as"Classification notpossible."

There can cause
conjunctivitis, headache,dizziness, insomnia,
gastrointestinal disorders,blurred vision (methanoldecomposition products:)

Aspiration hazard

No data available

No data available

Other information

The fluorine resin, which is an active ingredient, there may be generated toxic
gas containing hydrogen fluoride is thermally decomposed slowly at hightemperatures.

SECTION 12

No data available

Ecological information
CuFe

Perfluoropolyether
compoundHazardous to the aquatic
environment Shortterm(acute)No data available

No data available

No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data available

No data available

Persistence and degradablility

No data available

No data available

No data available

Bioaccumulative potential

No data available

No data available

No data available

Mobility in soil

No data available

No data available

No data available

Hazard to the ozone layerThis substance is notlisted in Annexes to theMontreal Protocol.

No data available

No data available

Other adverse effects

No data available

No data available

No data available

Toxicity11 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

SECTION 13

Date of Issue
Revised Date

2013/5/17
2024/3/15

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
CuFe

Perfluoropolyether
compoundUN number

Not applicableNot applicableNot applicable

UN proper shipping nameNot applicableNot applicableNot applicable

UN classification

Not applicableNot applicableNot applicable

Transport hazard class

Not applicableNot applicableNot applicable

Packing group

Not applicableNot applicableNot applicable

Hazardous to the aquaticenvironment

No data available

No data available

No data available

Maritime transport in bulk
according to IMO instruments

No data available

No data available

No data available

Japanese lows and regulations

Refer to “15. Regulatoryinformation.”

Refer to “15. Regulatoryinformation.”

No data available

Special precautions for users

When transporting, protect No data available
from direct sunlight andtake on cargo without
breakage of container,corrosion and leakage.
Do not transport with foodand feedstuffs.
Do not stack heavy good
thereupon.

No data available

Special Provisions---CuFe

Perfluoropolyether
compoundOccupational Safety and Health
Law

There is it in the case of
an application or anapplication

There is it in the case ofan application or anapplication

No data available

PRTR Law

Not applicableNot applicable

No data available

Poisonous and Deleterious
Substances control Law

Not applicableNot applicable

No data available

International regulation

SECTION 15

Regulatoly information（Japan）

12 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EO17
ＯＦ－ＳＲ

SAFETY DATA SHEET
rev. 8.0

Labor Standards Act

Date of Issue
Revised Date

There is it in the case of
an application or anapplication
Not applicable

No data available

Chemical substances control Law

There is it in the case of
an application or anapplication
Not applicable

Fire fighting Law

Not applicable

There is it in the case of
an application or anapplication

No data available

Air Pollution Control Act

There is it in the case of
an application or anapplication

Not applicable

No data available

Water Pollution Prevention Act

There is it in the case of
an application or anapplication

There is it in the case of
an application or anapplication

No data available

Water Supply Act

There is it in the case of
an application or anapplication

There is it in the case of
an application or anapplication

No data available

Sewerage Act

There is it in the case of
an application or anapplication

Not applicable

No data available

Marine Pollution Prevention Law

Not applicableNot applicable

No data available

Waste Management and Public
Cleansing Act

Not applicableNot applicable

No data available

NoteEnsure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16

2013/5/17
2024/3/15

No data available

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)