1 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product name

ＳｉＯ２ （Quartz）

Product code

ES17

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Classification not possible

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)

Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Classification not possible

Respiratory sensitization

Classification not possible

Skin sensitization

Classification not possible

Germ cell mutagenicity

Category 2

Carcinogenicity

Category 1A

Reproductive toxicity

Classification not possible

2013/10/16
2024/3/15

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(singleexposure)Classification not possible

Specific target organ toxicity(repeatedexposure)

Category 1

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)

Not classified

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Health Hazard
Health Hazard

Signal word

DangerDangerous goods hazard
information

Suspected of causing genetic defects.
May cause cancer.
Causes damage to organs through prolonged or repeated exposure Respiratory
system,Immune system,Kidneys.

Precautionary statements

3 / 10 Page
CANON OPTRON INC.
SDS Number：Product Name：ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date

【Safety measures】

Obtain special instructions before use.
Do not handle until all safety precautions have been read and understood.
Do not breathe dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Wear Protective glovess/protective clothing/eye protection/face protection.

【First-aid measures】

If exposed or concerned：Get medical advice/attention.
Get medical advice/attention if you feel unwell.

【Storage】

Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-Composition/information on ingredients

Substance/Mixture

Substance

Chemical name

QuartzChemical formula

SiO2 (Quartz)

Concentration or concentration
range

99.9<CAS No.

14808-60-7

TSCA Inventry

Quartz (SiO2)EINECS number

238-878-4

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

2013/10/16
2024/3/15

4 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEET
rev. 8.0

SECTION 5

Date of Issue
Revised Date

2013/10/16
2024/3/15

Firefighting measures

Suitable extinguishing media

This material is non-flammable. It use an extinguishing agent adapted to thesurrounding fire.

Unsuitable extinguishing media

No data availableSpecific hazards

There is a risk of the container exploding due to heating.

Specific extinguishing methods

If it is not dangerous to do so, move the container out of the fire area.

Special protective equipment for
firefighters

Wear an appropriate breathing apparatus and chemical protective clothing whenextinguishing a fire.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
procedures

Immediately, It isolate leakage area as the appropriate distance in all directions.
It prohibits the entrance except the person concerned.
The worker wears appropriate personal protective equipment (in item of"8.revelation prevention and protection measures" reference) and avoids eyes,
contact and inhalation to skin.

Environmental precautions

The Note is discharged into rivers or the like, so as not to cause damage to theenvironment.
It should not be released to the environment.

Methods and material forcontainment and cleaning up

Collection and neutralization: Sweep up leaked material and collect it in asealable empty container.
If it is not dangerous to do so, stop the leak.
Promptly remove all sources of ignition (no smoking, sparks, or flames in thevicinity).
Because of the risk of slippery when left on the floor, to handle frequently.

Secondary disaster prevention
measures

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

Safety handling precautions

Be sure to get the instruction manual before use.
Do not handle until you read and understand all safety precautions.
Do not swallow contact, or inhalation.
Making a ventilation exhaust in order to keep the exposure limits or lessconcentration in the air.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,
including any incompatibilities

5 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEET
rev. 8.0

SECTION 8

Date of Issue
Revised Date

2013/10/16
2024/3/15

Safe storage conditions

Store locked up.

Safety packaging material

No packaging, regulation of the container, but put to those that do not damage
sealable.

Exposure controls/personal protection
SiO2 (Quartz)

Permissible concentration
ＡＣＧＩＨ

Appropriate engineering controls

TLV-TWA: 0.025 mg/㎥ (respiratory fraction)(a crystalline silica, α-quartz and cristobalite)(2015 version)
The workshop handling or storage of this material, it is recommended that you
install the appropriate safety shower and eye wash.
When dust and fume are generated in the high-temperature process, a ventilation
system should be installed to keep the air contaminants below the controlled andallowable concentrations.

Individual protection measures,such as personal protective
equipment

SECTION 9

Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

SolidForm

Pellets, granules

ColourTransparent or white

Odour

None

SiO2 (Quartz)
Melting point/freezing point

1610℃

Boiling point or initial boiling point
and boiling range

2230℃

Flammability

No data available

Upper/lower flammability or
explosive limits

Noninflammability (ICSC (2010))

Flash point

NoncombustibilityAuto-ignition temperature

Noncombustibility

6 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEETrev. 8.0

Decomposition temperature

No data available

pH

No data available

Kinematic viscosity

No data available

Date of Issue
Revised Date

2013/10/16
2024/3/15

Solubility
Water

Insoluble

Other solvents

No data available

Partition coefficient: noctanol/water

No data available

Vapour pressure

0 mmHg (20℃) (HSFS (2015))

Density and/or relative density

No data available（Density）
Relative vapor density

No data available

Particle characteristics

No data available

Other information

No data available

SECTION 10Stability and reactivity
SiO2 (Quartz)

Reactivity

No data available

Chemical stability

No data available

Possibility of hazardous reactions

It produce alkali hydroxide, hydrogen fluoride, hydrofluoric acid and a dangerous
reaction.

Conditions to avoid

No data available

Incompatible materials

No data available

Hazardous decomposition products No data available

SECTION 11Toxicological information
SiO2 (Quartz)

Acute toxicity(oral)

No data available

Acute toxicity(dermal)

No data available

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Acute toxicity （Inhalation:Vapours）

Solid (GHS definition)

Acute toxicity （Inhalation: Dustsand mists）

No data available

Skin corrosion/irritation

No data available

Serious eye damage/irritation

No data available7 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Respiratory or skin sensitization

No data available

Germ cell mutagenicity

As for in vivo, an hprt gene mutation test with alveolar epithelial cells of rats
dosed by intratracheal instillation was positive, an hprt gene mutation test withthe lung tissue of mice was negative though the method of administration was
not specified, a micronucleus test with mice dosed intraperitoneally was negative,a chromosomal aberration test and a sister chromatid exchange test with human
lymphocytes were positive though exposure methods were not specified,oxidative DNA damage tests with the lung and peripheral blood of rats werepositive or negative, and DNA strand break tests with the epithelial lung cells ofrats were positive (SIDS (2013), CICAD 24 (2000), DFGOT Vol. 14 (2000), IARC68 (1997)). As for in vitro, mammalian cell gene mutation tests gave positive andnegative results, micronucleus tests with mammalian cultured cells gave positive
and negative results, and chromosomal aberration tests and sister chromatid
exchange tests with mammalian cultured cells were negative (SIDS (2013),
CICAD 24 (2000), DFGOT Vol. 14 (2000), IARC 68 (1997)). From the above, thissubstance was classified in Category 2 in accordance with the GHS classification
guidance for the Japanese government. Besides, the genotoxicity of thissubstance is thought to be attributable to reactive oxygen species derived fromthis substance or from the inflammatory cells caused by this substance (SIDS(2013), IARC 100C (2012)).

Carcinogenicity

In the results of many epidemiological studies, a positive correlation between
occupational exposure to crystalline silica containing this substance (quartz) andan increased risk of lung cancer was found. Also, in particular, even when theresults of multiple studies were pooled, and different meta-analyses wereconducted, a significant increase in the relative risk was shown consistently(IARC 100C (2012), SIDS (2013)). Accordingly, it is described that there issufficient evidence for an increased risk of lung cancer in humans by inhalation
exposure to crystalline silica dust with the shape of this substance (quartz)(IARC 100C (2012)).
Meanwhile, in experimental animals, in a 2-year test in which female and malerats were exposed by inhalation to 1 mg/㎥ of this substance (mass medianaerodynamic diameter (MMAD): 1.3 micrometers), and in a 83-week test in whichfemale rats were exposed by nose inhalation to 12 mg/㎥ of this substance(MMAD: 2.24 micrometers), significant increases in lung tumors were observed in
the exposed group, and there were many adenocarcinomas as the histologicaltype. Furthermore, also in a study in which female rats were exposed by nose
inhalation to 6.1 and 30.6 mg/㎥ of this substance (MMAD: 1.8 micrometers), a
dose-dependent increase in lung tumors was observed, and squamous cell
carcinoma was the most common in the histological type, and bronchiolo/alveolar
epithelial carcinomas or adenomas were often observed (IARC 100C (2012)).
From the above, based on information on carcinogenicity in humans andexperimental animals, in 1997, IARC classified it in Group 1 with regard tocarcinogenicity in humans due to exposure to the dust of this substance, andeven in a reevaluation in 2012, the classification result was not changed (IARC
68 (1997), IARC 100C (2012)). As for results of carcinogenicity classifications byother organizations, Japan Society for Occupational Health classified it in Group
1 (Recommendation of Occupational Exposure Limits (2015)), ACGIH hasclassified it in A2 since 2004 (ACGIH (7th, 2006)), and NTP classified Crystalline
Silica (Respirable Size) as K (NTP RoC (13th, 2014)). Therefore, it was classified
in Category 1A for this hazard class.

Reproductive toxicity

No data available

Specific target organ toxicity(single Classification not possible due to lack of data. Besides, the data on effects onexposure)the human respiratory organs used in the previous classification was short-term
exposure data and not data on single-dose acute effects.

8 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEET
rev. 8.0Date of Issue
Revised Date

2013/10/16
2024/3/15

Specific target organ
toxicity(repeated exposure)In humans, in many epidemiological studies, effects on the respiratory organs(silicosis, lung cancer, pulmonary tuberculosis) due to occupational exposure to
this substance were found. In addition, autoimmune diseases (scleroderma,rheumatoid arthritis, polyarthritis, mixed connective tissue disease, systemic
lupus erythematosus, Sjogren's syndrome, polymyositis, fibrositis), chronic renal
disease, and subclinical renal changes were also observed (SIDS (2013), CICAD
24 (2000), DFGOT vol. 14 (2000)). These kidney diseases are thought to berelated to autoimmunity (SIDS (2013)).
Likewise in experimental animals, fibrosis in the lung was found in repeatedinhalation exposure tests with rats (SIDS (2013)).
Therefore, it was classified in Category 1 (respiratory organs, immune system,kidney).

Aspiration hazard

No data available

Other information

No data available

SECTION 12Ecological information
SiO2 (Quartz)

Toxicity
Hazardous to the aquaticenvironment Shortterm(acute)

From the test data on amorphous silica of 24-hour LL50 > 10,000 mg/L for
crustacea (Daphnia magna) and 96-hour LL0 = 10,000 mg/L for fish (Danio rerio)(both SIDS, 2013), it was classified as "Not classified."

Hazardous to the aquaticenvironment Longterm(chronic)

No data available

Persistence and degradablility

No data available

Bioaccumulative potential

No data available

Mobility in soil

No data available

Hazard to the ozone layer

No data available

Other adverse effects

No data available

SECTION 13

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
SiO2 (Quartz)

International regulation
UN number

Not applicable

UN proper shipping nameNot applicable9 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEET
rev. 8.0

UN classification

Not applicable

Transport hazard class

Not applicablePacking group

Not applicable

Hazardous to the aquaticenvironment

No data available

Maritime transport in bulk
according to IMO instruments

No data available

Date of Issue
Revised Date

Japanese lows and regulations

Land regulation information Not applicable
Maritime regulatory information non-hazardous materials
Aviation regulatory information non-hazardous materials

Special precautions for users

Requires retention of yellow card when transporting.
When transporting, protect from direct sunlight and take on cargo without
breakage of container, corrosion and leakage.
Do not stack heavy good thereupon.

Special Provisions-SECTION 15

Regulatoly information（Japan）
SiO2 (Quartz)

Occupational Safety and Health
Law

There is it in the case of an application or an application

PRTR Law

Not applicable

Poisonous and Deleterious
Substances control Law

Not applicable

Labor Standards Act

There is it in the case of an application or an application

Chemical substances control Law

Not applicable

Fire fighting Law

Not applicable

Air Pollution Control Act

Not applicable

Water Pollution Prevention Act

Not applicable

Water Supply Act

Not applicable

Sewerage Act

Not applicable

Marine Pollution Prevention Law

There is it in the case of an application or an applicationWaste Management and Public
Cleansing Act

Not applicable

NoteEnsure this material in compliance with federal requirements and ensure
conformity to local regulations.

2013/10/16
2024/3/15

10 / 10 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES17
ＳｉＯ２ （Quartz）

SAFETY DATA SHEET
rev. 8.0

SECTION 16

Date of Issue
Revised Date

2013/10/16
2024/3/15

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)