Edge CDG025D2 with EtherCAT 0.1 … 1000 ㈀ġİġ㮓⶜

INFICON Edge 䟄⹈含䓖䦮䴉帰⻭ℝ浧位⑕䦮䴉㿚摞ⅹ⣷᧨₢⃉啪Ⓤ䤓䞮ℶ䘾⬒力幍帰ᇭ兞洛幐䤓䂸ㄵ㘶Ⓟᇬ棁叟夏怔儾椅䞆↯㎮⣷♾栎㦮㙟∪◢怙䤓䅰摞䲚䳂⸩㊶✛㦏⏗扪䤓榅䍈䳂⸩㊶ᇭEdge 摖䞷INFICON 噆㈦₢Ⓒ䤓䕻䔈↯㎮⣷⻞埌᧨♾≬㔳䦮䴉帰⦷∎䞷扖䲚₼ℶ䞮ₜ榏尐䤓棓サ兢㨫ᇭ⏗扪䤓䟄⷟幍⮖⃉㓏㦘ㄣ䞷㙟∪⚓䱜♾揜函䤓≰⚆㧰ↅⅴ♙♾
折䤓EtherCAT 䘿⧉㋊兎㘴♲ᇭ⒪㠿䤓┯䍼㰑㊄䫽≬ℕ␿⑘䤓㘴屵嫷槱ㄅ唑䦐ℕ⸬忄䤓ぴ␆䴉梃ᇭINFICON Edge 㢾⚛伊ℶ❐₼⇢䱾㦏⺞䤓䦮䴉㿚摞ⅹ⣷ᇭ䙲⢬㢢ℝ楕㒟᧨EtherCAT᧨⚓䱜䅰Ⓤㄵ✛㽤⏿᧨㪖揜₳₹幍⸩䍈戊㨍₏枽庒榅㒥扫䲚≰⚆庒榅㖖ⅳ᧨♾庒榅䍈⋞䲊幙㠼䵾♲䞷ℝ㉺抮冃≽✛冃㔳棁叟椅䞆↯㎮⣷◢怙䤓栎㦮≰⚆䳂⸩㊶䂸ㄵ嫴⌎↯㎮⣷棁㻰㩢≬㔳⚗屓㊶₝㪖⑕᧶CEᇬENᇬULᇬSEMIᇬRoHS

1

Edge CDG025D2 with EtherCAT 0.1 … 1000 ㈀ġİġ㮓⶜孊峕ᾉ〗

2

Edge CDG025D2 with EtherCAT 0.1 … 1000 ㈀ġİġ㮓⶜奬㟤
伊⨚1000 Torr,
1100 mbar

500 ... 10 Torr/ mbar

1 Torr / mbar

0.25 Torr /mbar

0.1 Torr / mbar

% of reading

0.2

0.2

0.2

0.25

0.5

percent FS/°C

0.005

0.005

0.015

0.02

0.02

䅰摞䲚

% of reading /°C

0.01

0.01

0.01

0.03

0.03

☚┪᧨㦏⮶kPa(absolute)

400

260

260

130130⒕户䘖

percent FS

0.003

0.003

0.003

0.003

0.003

㦏⇝床㟿percent FS

0.01

0.01

0.01

0.010.01

ㆉ帽䤓㦏⇝床㟿

percent FS

0.05

0.05

0.05

0.05

0.05

ㆉ帽䤓㦏⇝㘶Ⓟ☚┪

percent FS

0.5

0.5

0.5

0.50.5↯㎮⣷°C2525252525扟嫛᧤䘾⬒᧥

°C+5 … +50+5 … +50+5 … +50+5 … +50+5 … +50⦷㽤⏿⮓䍧䍳

°Cืื

ื

ื

ื

徽ⷧ

°C

–20 … +65

–20 … +65

–20 … +65

–20 … +65

–20 … +65

位ㄵ 
䂸ㄵ㟗ㄣ
榅䍈䂸ㄵ㟗ㄣ䂸ㄵ䟄䄟䟄☚+14 … +30
+14 … +30+14 … +30+14 … +30
+14 … +30
VDC or ±15 V VDC or ±15 V VDC or ±15 V VDC or ±15 V VDC or ±15 V
(±5%)
(±5%)
(±5%)
(±5%)
(±5%)

┮劦扟嫛䂸ㄵ

W戢⒉≰⚆᧤㲰㕮᧥♜ㄣ㢅梃 ≬㔳䷘儶ืืืืื

V (dc)

0 … +100 … +100 … +100 … +100 … +10ms

30

30

30

130130 / 30 (3)

IP 40

IP 40

IP 40

IP 40

IP 40

㪖⑕
CE ⚗屓

ENENENENENತತ ತತ ತತ ತತ ತತ
3, EN 61010 & 3, EN 61010 & 3, EN 61010 & 3, EN 61010 & 3, EN 61010 &RoHS
RoHS
RoHS
RoHS
RoHS

ETL 帳幐

8/ತ
CSA 22.2
1Rತ

8/ತ
CSA 22.2
1Rತ

8/ತ
CSA 22.2
1Rತ

8/ತ
CSA 22.2
1Rತ

8/ತ
CSA 22.2
1Rತ

SEMI ⚗屓

SEMI S2

SEMI S2

SEMI S2

SEMI S2

SEMI S2

3

Edge CDG025D2 with EtherCAT 0.1 … 1000 ㈀ġİġ㮓⶜奬㟤
伊⨚1000 Torr,1100 mbar

500 ... 10 Torr/ mbar

1 Torr / mbar

0.25 Torr /mbar

0.1 Torr / mbar䟄㺣扭㘴

D-sub, 15pole, male

D-sub, 15pole, male

D-sub, 15pole, male

D-sub, 15pole, male

D-sub, 15pole, male

2 (SP1,SP2)

2 (SP1,SP2)

2 (SP1,SP2)

2 (SP1,SP2)

2 (SP1,SP2)

V (dc)

ืืื

ื

ื

A (dc)

ืืืืื

111

11

◞帽

RS232-C

RS232-C

RS232-C

RS232-C

RS232-C床㟿

pressure,
status, ID

pressure,
status, ID

pressure,status, ID

pressure,status, ID

pressure,status, ID幍⸩䍈幍⸩䍈㟿摞
幍⸩䍈其䟄⣷屵䍈幍⸩䍈其䟄⣷屵䍈幍⸩䍈䅭⚝

percent FS幙㠼䵾♲幍函

set points,
set points,
set points,
set points,
set points,filter, zerofilter, zerofilter, zerofilter, zerofilter, zeroadjust, factory adjust, factory adjust, factory adjust, factory adjust, factory
reset, DCreset, DCreset, DCreset, DC
reset, DC
offsetoffsetoffsetoffset
offset㥃槁ℝ䦮䴉䤓㧟㠨

Aluminum
Aluminum
Aluminum
Aluminum
Aluminumoxide ceramic oxide ceramic oxide ceramic oxide ceramic oxide ceramic(AIೣO೤ (AIೣO೤ (AIೣO೤ (AIೣO೤ (AIೣO೤ 
stainless steel stainless steel stainless steel stainless steel stainless steel$,6,/ೞೕ೟
$,6,/ೞೕ೟
$,6,/ೞೕ೟
$,6,/ೞೕ೟
$,6,/ೞೕ೟␔捷⹈䱾␔捷⹈䱾 丰

cm³ (in.³)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)␔捷⹈䱾DN 16 ISO KF

cm³ (in.³)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)␔捷⹈䱾DN 16 CF-R

cm³ (in.³)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)␔捷⹈䱾VCR®

cm³ (in.³)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)

4.2 (0.26)

摜摞摜摞 丰

g

837

837

837

837837

摜摞DN 16 ISO KF

g

852

852

852

852852

摜摞DN 16 CF-R

g

875

875

875

875875摜摞VCR®

g

897

897

897897897

EtherCAT

4Edge CDG025D2 with EtherCAT 0.1 … 1000 ㈀ġİġ㮓⶜奬㟤伊⨚1000 Torr,
1100 mbar

500 ... 10 Torr/ mbar

1 Torr / mbar

0.25 Torr /mbar

0.1 Torr / mbar

◞帽EtherCAT

protocolprotocolprotocolprotocolprotocolspecialized for specialized for specialized for specialized for specialized for
EtherCAT
EtherCAT
EtherCAT
EtherCAT
EtherCAT抩帾㪖⑕

ETG.5003 Part ETG.5003 Part ETG.5003 Part ETG.5003 Part ETG.5003 Part
111
1
1
"Semiconducto "Semiconducto "Semiconducto "Semiconducto "Semiconductor Devicer Devicer Devicer Devicer Device
Profile"Profile"Profile"Profile"Profile"ETG.5003 Part ETG.5003 Part ETG.5003 Part ETG.5003 Part ETG.5003 Part2080 "Specific 2080 "Specific 2080 "Specific 2080 "Specific 2080 "SpecificDevice Profile: Device Profile: Device Profile: Device Profile: Device Profile:
VacuumVacuumVacuumVacuumVacuumPressure
Pressure
Pressure
Pressure
Pressure
Gauge"
Gauge"
Gauge"
Gauge"
Gauge"

唑䍈⦿⧏

Explicit Device Explicit Device Explicit Device Explicit Device Explicit Device
Identification
Identification
Identification
Identification
Identification䓸䚕⻑

100BASE-Tx(IEEE 802.3)

100BASE-Tx(IEEE 802.3)

100BASE-Tx(IEEE 802.3)

100BASE-Tx(IEEE 802.3)

100BASE-Tx(IEEE 802.3)

㟿ⷦ┮厌床♥

pressure,status, IDpressure,status, ID

pressure,status, ID

pressure,status, ID

pressure,status, ID㟿ⷦ┮厌幍函set points,filter, zeroadjust, reset,
DC offset

set points,
filter, zeroadjust, reset,
DC offset

set points,
filter, zeroadjust, reset,
DC offset

set points,filter, zeroadjust, reset,
DC offset

set points,filter, zeroadjust, reset,
DC offset

扖䲚㟿㗽

Fixed PDO
Fixed PDO
Fixed PDO
Fixed PDO
Fixed PDO
mapping and mapping and mapping and mapping and mapping andconfigurable
configurableconfigurable
configurable
configurable
PDO mapping PDO mapping PDO mapping PDO mapping PDO mapping挽乀(CoE)

SDO requests, SDO requests, SDO requests, SDO requests, SDO requests,
responses and responses and responses and responses and responses andinformation
information
information
information
information

EtherCAT 扭㘴⣷

RJ45, 8-pin(socket), IN
and OUT

RJ45, 8-pin(socket), IN
and OUT

RJ45, 8-pin(socket), IN
and OUT

RJ45, 8-pin(socket), IN
and OUT

RJ45, 8-pin(socket), IN
and OUT䟄冕shielded
Ethernet
CAT5e orhigher

shielded
Ethernet
CAT5e orhigher

shielded
EthernetCAT5e or
highershielded
Ethernet
CAT5e orhighershielded
Ethernet
CAT5e orhigherKbps

100000100000100000100000100000m (ft.)ื ื ื ื ื 

EtherCAT㟿㗽䘖
EtherCAT䟄冕栎ㄵ

5Edge CDG025D2 with EtherCAT 0.1 … 1000 ㈀ġİġ㮓⶜

(1) 25 °C 䘾⬒䂸ㄵ㢅槭兎㊶ᇬ䅭⚝ᇬ♾摜⮜᧨扟嫛⺞㢅⚝ₜℶ䞮䂸ㄵ㟗ㄣᇭ ⬭┯… 90 % FS ⅔抑䞷ℝ☚┪㘶Ⓟ伊⨚ 杻᧨柜᧨杋᧨材⯢⮠

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