1 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：EW04
ＷＯ３（Ｄ、Ｆ）

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product nameＷＯ３（Ｄ、Ｆ）

Product code

EW04

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Category 4

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EW04
ＷＯ３（Ｄ、Ｆ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)

Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Classification not possible

Respiratory sensitization

Classification not possible

Skin sensitization

Classification not possible

Germ cell mutagenicity

Classification not possible

Carcinogenicity

Classification not possible

Reproductive toxicity

Classification not possible

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(singleexposure)Classification not possible

Specific target organ toxicity(repeatedexposure)

Category 2

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Exclamation

Health Hazard

感嘆符

健康有害性

Signal word

Warning

Dangerous goods hazard
information

Harmful if swallowed.
Causes damage to organs through prolonged or repeated exposure Lungs.

Precautionary statements【Safety measures】

Do not breathe dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

2013/10/16
2024/3/15

3 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EW04
ＷＯ３（Ｄ、Ｆ）

SAFETY DATA SHEETrev. 8.0

SECTION 3

Date of Issue
Revised Date【First-aid measures】

IF SWALLOWED：Immediately call poison center or doctor/physician if you feelunwell.
Get medical advice/attention if you feel unwell.
Rinse mouth.

【Storage】－【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-Composition/information on ingredients

Substance/Mixture

MixtureChemical name

Tungsten oxide

Aluminum oxide

Chemical formula

WO3

Al2O3

Concentration or concentration
range

WO3 ： 97.0- 99.9%
Al2O3 ： 0.1- 3.0%
Total = 100%

CAS No.

1314-35-8

1344-28-1

TSCA Inventry

Tungsten oxide (WO3)

Aluminum oxide (Al2O3)EINECS number

215-231-4

215-691-6

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

2013/10/16
2024/3/15

Firefighting measures

Suitable extinguishing media

This product itself is not flammable.

4 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EW04
ＷＯ３（Ｄ、Ｆ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Unsuitable extinguishing media

No data available

Specific hazards

No data available

Specific extinguishing methods

In the case of a fire in the periphery, the portable container is quickly moved to asafe place.

Special protective equipment for
firefighters

Wear suitable protective equipment (gloves, glasses and a mask) in fire-fighting.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
proceduresProtection equipment (specified as those in which the properties of the productare suitable) worn during operation so that airborne droplets, etc., do not adhere
to the skin and dusts and gases are not absorbed.

Environmental precautions

The leakage may not directly flow into rivers or sewage.

Methods and material forcontainment and cleaning up

The leaked material is scooped up, or swept up and gathered to be recovered ina paper bag or a drum.
After recovery, a small amount of the residue is absorbed in sediment, sawdust,etc.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

Safety handling precautions

Handling work must be practiced in a room where there is a local or totalventilation facility.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,
including any incompatibilities

SECTION 8

Safe storage conditions

Store in a well-ventilated place. Keep container tightly closed.

Safety packaging material

No data available

Exposure controls/personal protection
WO3

Al2O3

TWA 5mg/㎥ (as W)
STEL 10mg/㎥ (as W)(2010 version)

TWA 1 mg/㎥(R),STEL -Permissible concentration
ＡＣＧＩＨ5 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：EW04
ＷＯ３（Ｄ、Ｆ）

SAFETY DATA SHEET
rev. 8.0

Appropriate engineering controls

Date of Issue
Revised Date

2013/10/16
2024/3/15

Use sealed devices, equipment, or a local exhaust ventilation as much as
possible.

Individual protection measures,such as personal protective
equipment

SECTION 9Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical stateSolidFormPellet

ColourYellowOdourNone

WO3

Al2O3

Melting point/freezing point

1472℃

2072℃

Boiling point or initial boiling point
and boiling range

1837℃

2980℃

Flammability

No data available

No data available

Upper/lower flammability orexplosive limits

No data available

No data available

Flash point

Noncombustibility

Noncombustibility

Auto-ignition temperature

Noncombustibility

Noncombustibility

Decomposition temperature

No data available

No data available

pH

6.1 : GESTIS (Access on Apr. 2010)

No data available

Kinematic viscosity

No data available

No data available

Water

Insoluble

Insoluble

Other solvents

No data available

The slightly soluble in non-polar organic
solvent

Partition coefficient: noctanol/water

No data available

No data available

Vapour pressure

No data available

0.073Pa (mp.)

Solubility

6 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EW04
ＷＯ３（Ｄ、Ｆ）

SAFETY DATA SHEET
rev. 8.0

Density and/or relative density（Density）

7.2

Date of Issue
Revised Date

2013/10/16
2024/3/15

3.97※ 5.8 ~ 6.4 (pellet) as WO3 (D)Relative vapor density

No data available

No data available

Particle characteristicsNo data available

No data available

Other information

No data available

No data available

WO3

Al2O3Reactivity

No data available

No data available

Chemical stability

It is considered to be stable in storage andhandling in accordance with the laws andregulations

Stability

Possibility of hazardous reactions

No data available

Possibility of hazardous reaction isnegligible.

Conditions to avoid

No data available

Generation of dust, diffusion.

Incompatible materials

No data available

Not applicable

Hazardous decomposition products No data available

Not applicable

SECTION 10

SECTION 11Stability and reactivity

Toxicological information
WO3

Al2O3

Acute toxicity(oral)

Rat LD50 value: 840 mg / kg bw (ATSDR(2005))

SPECIES: Rat
ENDPOINT: LD50
VALUE: > 5000 mg/kg

Acute toxicity(dermal)

No data available

No data available

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Solid (GHS definition)

Acute toxicity （Inhalation:Vapours）

No data available

No data available

Acute toxicity （Inhalation: Dusts
and mists）

No data available

No data available

Skin corrosion/irritation

No data available

No data available

Serious eye damage/irritation

No data available

No data available

Respiratory or skin sensitization

No data available

No data available

Germ cell mutagenicity

In the Ames test negative (NTB DB (Access The in vivo mutagenicity test has not beenon May 2010))
carried out, and in the in vitro mutagenicity
test, we could only find the Ames test(negative). Therefore we presupposed that
we could not classify it for the lack of data.

7 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EW04
ＷＯ３（Ｄ、Ｆ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised DateCarcinogenicity

No data available

Not classified because of "A

Reproductive toxicity

No data available

No data available

2013/10/16
2024/3/15

Specific target organ toxicity(single Although it was reported that in the case of It was set as category 3 (respiratoryexposure)
intratracheal instillation to rats, proliferation irritation) from the statement of upperof leukocytes and histiocytes withrespiratory irritation (ICSC (2000)).
subsequent slight fibrosis were seen in thelungs, especially at the injection site
(DFGMAK-Doc. 23 (2007)), no other data
were available. Thus, "Classification notpossible" was concluded due to lack ofsufficient data.
Specific target organ
toxicity(repeated exposure)In the 70 days feeding study with rats,
It was classified into Category 1 according
deaths were observed in the groups given at the statement that by occupational exposure
dietary concentration of 0.5% (convertedof aluminas, pulmonary fibrosis was occurred
dose level as that of 90-day study: approx. (EHC (1997)).
194 mg/kg) and more, but only body weightloss was described at lower concentration of0.1% (DFGMAK-Doc. 23 (2007)). In humans,
it was reported that in the survey of workers
with long industrial experience, nopneumoconiosis developed among those
exposed to solely tungsten or its insolublecompounds (ACGIH (2001)). On the otherhand, there was the report mentioning thatsymptom of pulmonary fibrosis was observedin the workers exposed to dust containing
this substance (ATSDR (2005)). But, thereport also described that the original data
lacked critical information regarding thesmoking history and past medical historiesof workers examined. As described above, inspite of multiple hazard information, thesewere insufficient to use properly as evidence
to classify. Therefore, the classification wasconcluded as "Classification not possible".

Aspiration hazard

No data available

Other information

No data available

SECTION 12

No data available

Ecological information
WO3

Al2O3

Hazardous to the aquatic
environment Shortterm(acute)No data available

No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data available

Persistence and degradablility

No data available

No data available

Bioaccumulative potential

No data available

No data available

Toxicity

8 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：EW04
ＷＯ３（Ｄ、Ｆ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Mobility in soil

No data available

No data available

Hazard to the ozone layerThis substance is not listed in Annexes tothe Montreal Protocol.

No data available

Other adverse effects

No data available

No data available

SECTION 13

2013/10/16
2024/3/15

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
WO3

Al2O3

UN number

Not applicableNot applicable

UN proper shipping nameNot applicableNot applicable

UN classification

Not applicableNot applicable

Transport hazard class

Not applicableNot applicable

Packing group

Not applicableNot applicable

Hazardous to the aquaticenvironment

No data available

No data available

Maritime transport in bulk
according to IMO instruments

No data available

No data available

Japanese lows and regulations

No data available

Land regulation information Not applicable
Maritime regulatory information nonhazardous materials
Aviation regulatory information nonhazardous materials

Special precautions for users

Requires retention of yellow card when
When transporting, protect from directtransporting.
sunlight and take on cargo without breakage
When transporting, protect from directof container, corrosion and leakage.
sunlight and take on cargo without breakageof container, corrosion and leakage.
Do not transport with food and feedstuffs.
Do not stack heavy good thereupon.

Special Provisions-International regulation-

9 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EW04
ＷＯ３（Ｄ、Ｆ）

SAFETY DATA SHEETrev. 8.0

SECTION 15

Date of Issue
Revised Date

2013/10/16
2024/3/15

Regulatoly information（Japan）
WO3

Al2O3

Occupational Safety and Health
Law

No data available

Not applicable

PRTR Law

No data available

Not applicable

Poisonous and Deleterious
Substances control Law

No data available

Not applicable

Labor Standards Act

No data available

Not applicableChemical substances control Law

No data available

Not applicable

Fire fighting Law

No data available

Not applicable

Air Pollution Control Act

No data available

Not applicable

Water Pollution Prevention Act

No data available

There is it in the case of an application oran application

Water Supply Act

No data available

There is it in the case of an application oran application

Sewerage Act

No data available

Not applicable

Marine Pollution Prevention Law

No data available

Not applicable

Waste Management and Public
Cleansing Act

No data available

Not applicable

NoteEnsure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)