PPG550 ATM to Medium Vacuum Gauge

The new INFICON Pirani Piezo combination gauge (PPG550) is basedon the most advanced MEMS (Microelctromechanical Systems) sensor
technology available.
The Pirani/ Piezo combination technology miniaturized in the MEMS
process enables the construction of a very small and thus space-saving
sensor, which makes it possible to keep the overall height of themeasuring device very small.
In addition to the advantage of the low height, a Pirani based on MEMS
technology also offers the advantage of measuring deeper and moreaccurately in the HV range than a classic Pirani. In combination with aMEMS piezo sensor, mounted in the same flange, the Pirani gauge
becomes a real vacuum wide range gauge, extending the measuring
range far beyond the usual 1000 mbar, also towards the atmosphere. At
the same time the MEMS piezo sensor provides gas type independentpressure measurement in the range of 2 ... 1333 mbar. Anotheradvantage of the technologies mentioned is the increased resistance toacceleration forces and vibrations.
Last but not least the new INFICON PPG550 can be used to direct dropin replace the so called MKS910 “DualTrans™ MicroPirani™ Absolute Piezo Vacuum Pressure Transducers” as well as MKS925“Micro Pirani™ Vacuum Pressure Transducers”. Inficon offes sameconnectors/ pin assignment, analog output and RS232/485
compatibility.

好处nGas type independent above 2 mbar – allows safe venting with any gas mixturenHigh accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detectionnVersatile of mounting orientation – provides engineering freedom in tool design

1PPG550 ATM to Medium Vacuum GaugenSelectable analog output signal for easy system integrationnDigital interfaces RS232/ RS485

nCompliance & standards: CE, EN, UL, CSA, RoHS

nAble to direct drop in replace MKS910 “DualTrans™ MicroPirani™ - Absolute Piezo Vacuum PressureTransducers” as well as MKS925 “Micro Pirani™ Vacuum Pressure Transducers”.
DualTrans™ MicroPirani™ are registered trademarks of MKS Instruments, Andover, MAnCompliance & standards: CE, EN, UL, CSA, RoHS

2

PPG550 ATM to Medium Vacuum Gauge订购信息3PPG550 ATM to Medium Vacuum Gauge规格类型PPG550 MEMS

Measurement principle
Pressure range

mbar
2 … 1333

MEMS Piezo resistive diaphragm
1.5 … 2&nbs

Measuring range
Range (N2)mbar

1x10⁻⁶ … 1333

Accuracy
1100 ... 1333 mbar

% of reading

0.5

800 ... 1099 mbar

% of reading

0.25

100 ... 800 mbar

% of reading

0.5

2 ... 99.9 mbar

% of reading1

1 x 10-4 ... 1.99 mbar

% of reading5

1 x 10-5 ... 9.99 x 10-5 mbar

% of reading

25

10 ... 1333 mbar

% of reading

0.1

1 x 10-3 ... 10 mbar

% of reading1

Responsetime (ISO19685:2017)

msTemperature compensation°C

Hysteresis<20+10 … +50
Temperature measurement
absolute accuracy°C

Gas type dependence+/-1.5 (0 … +80)
look operating manual page 13

Solid state relay
Set point range

mbar

5 x 10⁻⁶ … 1333

Solid state relay
Contact rating

V50mA100Ω<35

Solid state relay
Contact rating
Solid state relay
Contact on resistanceSolid state relay
Contact endurance

4

PPG550 ATM to Medium Vacuum Gauge

Unlimited (no mechanical wear)规格类型

PPG550 MEMS

Analog output
3PPM-xxx-xxx0V

0.61 … 10.2

3PPM-xxx-xxx2V0.375 … 5.570

3PPM-xxx-xxx3

V

1.0 … 9Error signal

V

Check operating Manual page 13

Power Supply
Supply voltage at the gauge

V (dc)+12 … 30

Power Supply
Power consumption

W<3.5mA

100

Power Supply
Internal fuse (thermalrecoverable)
Power Supply
Reverse polarity andovervoltage protection

yes

Sensor cable connection
3PPM-0xx-x0xx

IP40
FCC 68, 8-pin electrical connection

3PPM-0xx-xExx

IP40

D-Sub HD, 15-pin, male electrical connector

3PPM-0xx-xDxx

IP40

D-Sub, 9-pin, male electrical connection

Sensor cable connection
Sensor cableshielded, 0.14 mm²/ conductor

Sensor cable connection
Cable lenght for analog
operationm<100

Cable lengt for RS232
operationm<15

Cable lenght for RS482
operationm<1200

baud9600 (default)

RS232C/ RS485 interface
Data Rate
RS232C/ RS485 interface

5

PPG550 ATM to Medium Vacuum Gauge

规格类型

PPG550 MEMS

Data format

bitbinary,
8 data bits
onestop bit
no parity bit
no handshake
For further informaion on RS232/ RS485
interfaceplease look operating manua page 15

Materials exposed to vacuumFlange

SS 1.4307, AISI 304L

Housing

SS 1.4307, AISI 304L, AL 6061

Further parts

Pressure max.

AISI 304L, Kovar, glass, Silicon, nickel, AL, SiO₂,Si₃N₄, gold, FPM, low outgassng epoxy resin, solder,RO4305bar

10 (absolute)

Operation°C-20 … +50

Storage°C-40 … +120

Bakeout°C+120 (non operating)Relative humidity ambiance(IEC 68-2-38); year`s mean/
during 60 days%

98 (non-condensing)

Usem

Admissible temperatures(ambiance)

Indoors only
altitude up to 2000
Mounting orientation
Protection class6any
IP40

PPG550 ATM to Medium Vacuum Gauge

degree of protection

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reachus@inficon.com

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2022-07-13(2022-07)© 2022 INFICON