1 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03
ＣｅＯ２（Ａ，Ｃ）

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product nameＣｅＯ２（Ａ，Ｃ）

Product code

EC03

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures Classification not possible

Health hazards

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Not classified

Acute toxicity(dermal)

Not classified

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

Acute toxicity (Inhalation: Dusts andmists)

Not classified

Skin corrosion/irritation

Not classified

Serious eye damage/eye irritation

Not classified

2 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03
ＣｅＯ２（Ａ，Ｃ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Respiratory sensitization

Classification not possible

Skin sensitization

Classification not possible

Germ cell mutagenicity

Not classified

Carcinogenicity

Classification not possible

Reproductive toxicity

Classification not possible

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(singleexposure)

Category 2

Specific target organ toxicity(repeatedexposure)

Category 1

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Health Hazard
Health Hazard

Signal word

DangerDangerous goods hazard
information

May cause damage to organs Lungs.
Causes damage to organs through prolonged or repeated exposure Lungs.

Precautionary statements

SECTION 3【Safety measures】

Do not breathe dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

【First-aid measures】

If exposed or concerned：Call poison center or doctor/physician.
Get medical advice/attention if you feel unwell.
Specific treatment.

【Storage】

Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-Composition/information on ingredients

2013/10/16
2024/3/15

3 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03
ＣｅＯ２（Ａ，Ｃ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Substance/Mixture

Substance

Chemical name

Cerium oxide

Chemical formulaCeO2Concentration or concentration
range

99.9%<CAS No.

1306-38-3

TSCA Inventry

Cerium oxide (CeO2)

EINECS number

215-150-4

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

Firefighting measures

Suitable extinguishing mediaWater spray, foam fire extinguishing agent, powder fire extinguishing agent ,carbon dioxide gas, dry sand such

Unsuitable extinguishing media

No data available

Specific hazards

Is a non-flammable, itself does not burn, but there is a risk which break downwhen heated, to generate fumes and toxic or corrosive /.
Is likely to generate toxic gases irritating, corrosive and fire.

Specific extinguishing methods

It move a container from the fire area if not dangerous.
Eliminate all ignition sources if safe to do so.

Special protective equipment forfirefighters

It wear appropriate respiratory air, the protective clothing (heat resistance).

SECTION 6

2013/10/16
2024/3/15

Accidental release measures

Personal precautions, protective
equipment, and emergency
procedures

Immediately, It isolate leakage area as the appropriate distance in all directions.

Environmental precautions

It should not be released to the environment.

4 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03
ＣｅＯ２（Ａ，Ｃ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Methods and material forcontainment and cleaning upMoisten with water to reduce dust in the air and prevent dispersion.
Collection and neutralization: Sweep up leaked material and collect it in an empty
container for later waste disposal.

Secondary disaster prevention
measures

Was covered with a plastic sheet to prevent scattering.

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

Safety handling precautions

Do not inhale dust, fumes, vapors, spray.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,
including any incompatibilities

SECTION 8

Safe storage conditions

Store locked up.

Safety packaging material

No data available

Exposure controls/personal protection
CeO2

Permissible concentration
ＡＣＧＩＨ
Appropriate engineering controls

No data available
The workshop handling or storage of this material, it is recommended that you
install the appropriate safety shower and eye wash.
In order to prevent the exposure, it is recommended that you install theappropriate general ventilation equipment, local exhaust ventilation in theworkplace.

Individual protection measures,such as personal protectiveequipment

SECTION 9Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

SolidForm

Pellets, granules

ColourPale yellow

Odour

None

5 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03
ＣｅＯ２（Ａ，Ｃ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

CeO2
Melting point/freezing point

2480℃

Boiling point or initial boiling point
and boiling range

3730℃

Flammability

No data available

Upper/lower flammability orexplosive limits

No data available

Flash point

No data available

Auto-ignition temperature

No data available

Decomposition temperature

No data available

pH

No data available

Kinematic viscosity

No data available

Solubility
Water

Insoluble

Other solvents

And insoluble in solvents

Partition coefficient: noctanol/water

No data available

Vapour pressure

No data available

Density and/or relative density

7.21（Density）※ 4.0 ~ 4.4 (pellet) as CeO2 (A, C)

Relative vapor density

No data available

Particle characteristics

No data available

Other information

No data available

SECTION 10Stability and reactivity
CeO2Reactivity

No data available

Chemical stability

It is considered stable.

Possibility of hazardous reactions

Do not react in the storage conditions and normal handling.
It will generate NOx gas in the reaction of chlorine gas, and nitric acid reaction
with hydrochloric acid.

Conditions to avoid

High-temperature and humidity

Incompatible materials

Carbon dioxide, acidHazardous decomposition products Acid mist is generated upon dissolution of the acid.

SECTION 11

Toxicological information
CeO2

Acute toxicity(oral)

Rat LD50 value:> 5000 mg / kg bw (IUCLID (2000))6 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03
ＣｅＯ２（Ａ，Ｃ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Acute toxicity(dermal)

Based on the result that administration of 2000 mg/kg bw to rats caused no
mortality, and LD50 value was > 2000 mg/kg bw (IUCLID (2000)), the substancewas classified as "Not classified".

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Acute toxicity （Inhalation:Vapours）

No data available

Acute toxicity （Inhalation: Dustsand mists）

Based on the rat LC50 value of 5.05 mg/L (OECD TG 403) (IUCLID (2000)), thesubstance was classified as "Not classified" in the JIS classification(corresponding to Category 5 in the UN-GHS classification). According to thedescription that the test particles which was less than 3 micrometer in particle
diameter were account for 85.4% (IUCLID (2000)), the criterion values for
dust/mist were adopted.

Skin corrosion/irritation

In the rabbit test (OECD TG404), application of 0.5 g of test substance caused
no irritation (IUCLID (2000)). In another rabbit test, the primary skin irritationindex value was 0.0 and it was concluded that the substance was not irritating(IUCLID (2000)). Based on the information, the substance was classified as "Notclassified".

Serious eye damage/irritation

In the rabbit test (OECD TG405), instillation of 0.1 g of test substance to eye
resulted in non-irritating (IUCLID (2000)). In another rabbit test, slightly irritating
was reported (IUCLID (2000)). Based on the information, the substance wasclassified as "Not classified".

Respiratory or skin sensitization

In the maximization test using guinea pigs (OECD TG406), no reaction ofsensitization was observed after elicitation, and concluded as a non-sensitizer(IUCLID (2000)). However, since it was the "List 2" information source
designated in the GHS classification guidance for the Japanese government, thesubstance was classified as "Classification not possible".

Germ cell mutagenicity

The substance was classified as "Classification not possible" due to thenegative results in the micronucleus test (OECD TG474) using bone marrow cellsof mice orally administered (in vivo mutagenicity test in somatic cells) (IUCLID(2000)). As relevant information, as for in vitro study, negative results in theAmes test were reported (Initial Environmental Risk Assessment of Chemicals(Ministry of the Environment), vol. 8 (2010)).

Carcinogenicity

No data were available. As relevant information, the US EPA reports that thedata of this substance are insufficient to evaluate the possibility ofcarcinogenicity in humans under the carcinogenicity risk assessment guidelines(IRIS (2009) Tox Review).

Reproductive toxicity

No data available

Specific target organ toxicity(single In the acute inhalation study in rats exposed to dust for 4 hours at the range ofexposure)concentrations from 4.12 to 5.98 mg/L (OECD TG 433, GLP-compliant), labored
respiration and ruffled fur were noted in two of ten animals, and the lungs of all
animals were incompletely collapsed with diffuse whitish foci (IUCLID (2000)).
Based on these findings observed in the concentration corresponding nearly tothe upper limit within Category 2 of the guidance values, the substance wasclassified as Category 2 (lung). In addition, in the acute oral toxicity study in rats
administered up to 5000 mg/kg bw, no mortality was recorded, body weight gain
was normal, and no abnormalities were observed at necropsy (IUCLID (2000)).

7 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03
ＣｅＯ２（Ａ，Ｃ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Specific target organ
toxicity(repeated exposure)In the lungs of the workers exposed for many years to the fumes of rare-earth
elements such as cerium, accumulation of rare-earth elements was observed,and lung lesions such as granuloma, emphysema, or interstitial fibrosis anddecrease of pulmonary breathing capacity were reported (Initial Environment Risk
Assessment of Chemicals (Ministry of Environment), vol. 8 (2010)). Many reports
were published describing long-term residue of rare earth elements in lung andnumerous cases of workers who developed adverse lung effects associated withcerium oxide as follows. In the case of the 58-year-old worker who came tohospital complaining of dyspnea at least 15 years after exposures to cerium
oxide polishing agents, slight pleural thickening, and pulmonary obstruction werenoted. He was diagnosed by histopathological examination as chronic
pachypleuritis (Initial Environment Risk Assessment of Chemicals (Ministry ofEnvironment), vol. 8 (2010)). In the case of 68-year-old man who was engaged in
the abrasive operation of the optical lens for 35 years, rare earth
pneumoconiosis associated with cerium oxide exposure was identified after 13
years of separation of work (PATTY, 5th (2001)). On the other hand, in the 13week repeated inhalation study in rats exposed to dust, enlargement anddiscoloration of diaphragm in approximately half of the animals, changes ofbronchial lymph nodes in all animals were found at 5 mg/㎥ or higher, anddiscoloration of the lungs in all animals at 51 mg/㎥ or higher at necropsy.
Histopathologically, lymphoid hyperplasia and pigmentation in the bronchial lymph
nodes, and pigmentation in the lung were noted at 5 mg/㎥ or higher in both
sexes, and alveolar epithelial hyperplasia in the lungs and metaplasia andpigmentation in the larynx were noted at 51 mg/㎥ or higher in both sexes (Initial
Environment Risk Assessment of Chemicals (Ministry of Environment), vol. 8(2010)). These effects were observed at doses within Category 1 of the guidancevalues. Based on the findings for both humans and experimental animals, thesubstance was classified as Category 1 (lung).

Aspiration hazard

No data available

Other information

No data available

SECTION 12

Ecological information
CeO2

Toxicity
Hazardous to the aquatic
environment Shortterm(acute)Hazardous to the aquatic
environment Longterm(chronic)

No data available

Persistence and degradablility

No data available

Bioaccumulative potential

No data available

Mobility in soil

No data available

Hazard to the ozone layerThis substance is not listed in Annexes to the Montreal Protocol.

Other adverse effects

No data available

SECTION 13

No data available

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

8 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03
ＣｅＯ２（Ａ，Ｃ）

SAFETY DATA SHEET
rev. 8.0

SECTION 14

Date of Issue
Revised Date

Transport information
CeO2

International regulation
UN number

Not applicable

UN proper shipping nameNot applicable

UN classification

Not applicable

Transport hazard class

Not applicable

Packing group

Not applicable

Hazardous to the aquatic
environment

No data available

Maritime transport in bulk
No data available
according to IMO instruments
Japanese lows and regulationsNo data available

Special precautions for users

Requires retention of yellow card when transporting.
When transporting, protect from direct sunlight and take on cargo without
breakage of container, corrosion and leakage.
Do not transport with food and feedstuffs.
Do not stack heavy good thereupon.

Special Provisions-SECTION 15

Regulatoly information（Japan）
CeO2

Occupational Safety and Health
Law

No data available

PRTR Law

There is it in the case of an application or an application

Poisonous and Deleterious
Substances control Law

No data available

Labor Standards Act

No data available

Chemical substances control LawNo data available

Fire fighting Law

No data available

Air Pollution Control Act

No data available

Water Pollution Prevention Act

No data available

Water Supply Act

No data available

Sewerage Act

No data available

Marine Pollution Prevention Law

No data available

Waste Management and Public
Cleansing Act

No data available

NoteEnsure this material in compliance with federal requirements and ensure
conformity to local regulations.

2013/10/16
2024/3/15

9 / 9 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03
ＣｅＯ２（Ａ，Ｃ）

SAFETY DATA SHEETrev. 8.0

SECTION 16

Date of Issue
Revised Date2013/10/16
2024/3/15

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)