Area of expertise：
Semiconductor-related
Inspection Equipment

Lasertec manufactures unique inspection andmeasurement systems that incorporate the cutting-edge
technologies of applied optics and offers them tocustomers worldwide. Our core business is themanufacture and sale of semiconductor-related
inspection equipment.

1

Ubiquitous semiconductor devices

Semiconductor devices are used in almost every electronic device and industrial product around us today. Theirapplications span a wide range of areas, from consumer products such as smartphones, PCs, TVs, and air-conditioning
systems, to cars and trains, and to credit cards and digital currencies.

Communication products

Smartphone

Telephone
TabletPCTV

Game console

AutomotiveDigitalcamera

Surveillance camera

Semiconductor
DeviceTrain

Air-conditioningsystem

Home electronics

Industrial
robot
Washing machine

Microwave
oven

Vending
machineSolar cell

Infrastructure andindustrial equipment

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Lasertec plays an important role behind the scenes

Semiconductor devices are
manufactured using photomasks,
which serve as the source of original
patterns for integrated circuits.
Lasertec’ s inspection systems aredesigned to optically inspectphotomasks and their pre-patterned
substrates called mask blanks.

1 Mask Substrate

A glass plate from which a mask blankis made.

2 Mask Blank

A plate with light-shield metal coating
applied to the surface of a mask substrate.
A photomask is made from a mask blank.

(Blank)3 Photomask

A plate with a circuit pattern defined on
the surface of a mask blank. It provides
the original pattern to be transferred towafers in lithography.

(Mask)

4 Wafer

5 Semiconductor
DeviceLithography

A circular and thin semiconductor material
made by slicing a crystalline silicon ingotextruded in a cylindrical shape. Circuit
patterns are printed on a wafer inlithography to form integrated circuits.
Once integrated circuits are formed,
the wafer is diced into individual chips.
Each chip is then sealed with resin.

Mask to Semiconductor Device

1
3

As electronic devices become more downsized and better performing,
more masks are required.

Lithography

Photomask (Mask)

Lithography

Mask

Reduction
opticsLight
source

Wafer
Wafer

Electronic device

Semiconductor
deviceThe original circuit pattern on the mask istransferred to wafers in lithography using reductionoptics. The process is repeated many times withdifferent masks to print multiple-layer patterns oneach wafer to create semiconductor devices.

14Size of defects detected by Lasertec’s inspection systems
1m■ Semiconductor Mask

Blanks Inspection System

Capybara (large rodent)
1m■ Semiconductor Mask

Inspection System
Water flea
2mm

1mm
Hair
100µm

1µm
Defect on blank material

E. coli
1µm

Defect on patterned mask
Influenza virus
100nm

5µm
1nm
One nanometer isa billionth of one meter.

DNA2nm15Semiconductor devices will be used in greater numbers.

Mobile / IoT

Data CenterAI

Automotive

Various things connectedto the Internet

Massive data storage

Emergence of artificial
intelligence

Electric vehicles,
onboard electronics,
and self-driving
cars

The expansion of these four areas will dramatically increase the demand for semiconductor devices.
■ Logic devices for calculation and image processing■ Image sensors for light sensing and imaging■ Memories for data storage■ Power devices for optimum power conversion
and control

As the scope of semiconductor application expands and the demand for semiconductor devices increases, inspection
systems will be required in greater numbers. Lasertec will offer the cutting-edge technologies of inspection and metrology
to meet the requirement and contribute to society.