The Launch of Gdevice@BEANS
In response to a call for research proposals from the New
Energy and Industrial Technology Development Organization(NEDO), the Hetero-functional Integrated Device TechnologyDevelopment Project (the BEANS Project) added a new R&D
project entitled “Research and development of an advanced
sensor network system and environmentally friendlyprocesses,” which was launched in FY 2009 and will be pursued
through FY 2010. The research project is divided according tocontent into a part submitted in response to the call for
research proposals and a part made possible by the accelerated
pace of the BEANS Project. The BEANS Project proposal sent
to NEDO was adopted on March 10.
With problems of the environment and energy resources
now acknowledged as global issues, there is strong pressure on
every country and industry to implement more eco-friendly
measures. Specifically, it is vital to conserve resources and work
toward high efficiency and low environmental impact in orderto reduce greenhouse gas emissions by 25%. With thisbackdrop, the newest BEANS R&D project is aimed atdeveloping a sensor network system capable of monitoringenergy usage in real-time, controlling the air conditioning
system, and the like. The project calls for constructing a clean
room as a testing ground and installing an 8-inch MEMS
production line therein. Numerous high-performance MEMS
sensor modules will then be arranged in the clean room toprovide detailed information. Wireless communications will beessential for installing sensor chips freely within the network.
Therefore, we will attempt to identify any technical issues suchas what type of integrated MEMS sensor chip will be compatible
with wireless communication LSI and can be configured of alarge number of multifunctional sensors while being microsized
inexpensively.
Concurrently, we will be developing environmentallyfriendly MEMS fabrication technologies, such as the use of analternative gas for deep etching and low-temperature waferlevel packaging. Further, in order to develop and manufacture
prototypes for hetero-functional integrated devices andintegrated sensor devices more effectively and efficiently, we
will be formulating high-quality processes for an 8-inch MEMS
production line, gathering process recipes to support newmaterials and new structures, improving the design technology
for controlling process machinery, and researching anddeveloping technologies for processing environmentallyfriendly, biocompatible polymers.
The BEANS Laboratory has adopted a spirit of open
innovation. By making use of the infrastructure in place at theTsukuba Innovation Arena N-MEMS aimed at the developmentof new technologies and industries and establishing a research
center at Ritsumeikan University, we can take advantage ofthese assets to carry out more efficient and effective R&D.
Please follow our progress in this project, as we intend to get
the best results possible during this one-year period.

1. Development of an advanced sensor network system. Produce a prototype of a sensor network system for sensing energy consumption, temperature, pressure, air volume, foreign particles,gas, etc. in a MEMS clean room for large-diameter wafers in order to analyze the effects on energy savings and reducing carbon content.
. Formulate new sensing principles aimed at the development of advanced integrated sensor chips capable of wireless communications
with a wireless-independent power supply and having a small size and low profile and a highly sensitive sensing capacity.

2. Development of environmentally friendly processes. Develop an efficient etching process for deep etching of silicon that has low environmental impact through an alternative gas to SF6.
. Integrate various heterogeneous devices at the wafer level.
. Use polymer MEMS to reduce the environmental impact of processes and devices.
. Improve yield, quality, and throughput by designing and prototyping devices and processes using large-diameter test element groups,
sharing information between the design and inspection stages, and providing design feedback from the inspection and measurement data.
. Implement information sharing at the design stage with consideration for environmental impact.

Advancedsensor module

Developing environmentallyfriendly processes. Deep etching technology. Joining technology. Smart fab system. Smart prototyping

TimeNode ID

21:22:30
21:25:13
21:40:20
21:41:40

20153
12516

Green sensor network
Visual energy consumption
Wireless sensor
terminal(four times)

Wireless sensor
terminal(four times)

Wireless sensor
terminal(four times)

Wireless sensor
terminal(four times)

Developing an advanced
sensor network andsensor modules. Management of energy andprocess gas. Green working environment

Tsukuba Innovation ArenaN-MEMS7