UL3000Fab(ULTRA)
Mobile Helium Leak Detector
ULTRATEST® Sensor Technology
Progress meets experienceAlways one step ahead–new generation ofleak detector
INFICON leak detection has
a long history setting market
standards in performance andADVANTAGES AT A GLANCE Save Time with I·CAL
software algorithm for fastmeasurements in the rangeof 10-9 to 10-12 mbar l/s

nease of use. The UL3000 Faboffers the highest possible
speed and optimal userfriendliness in leak test today.

 Most efficient leak checking
using I·ZERO 2.0 withimproved intelligent functionfor fast backgroundsuppression while maintaining
high measurement sensitivity Time saved by easy maneuverability through slim designnn

The UL3000 Fab was specificallydeveloped for the specialized
demands of semiconductor
manufacturing, like leakchecking of semiconductor Minimize leak checking efforts
through quick evacuation andresponse timen Applicable for vacuum andsniffer leak search Low total cost of ownership(TCO) enabled by robust ion
source (3 year warranty) andcounterflow vacuum systemn Easy to use, operator-guided
HMI with full color highresolution rotatable displaynn

and display tools, including
subcomponents.

ADDITIONAL ADVANTAGES FOR UL3000 FAB ULTRA Start leak checking earlier as
HYDRO·S software eliminates
the water vapor background,­making it possible to quickly
reach sensitive measurement
rangesnnn Faster pump down (evacuation) times due to higher air
pumping speed Lower TCO due to maintenancefree roots roughing pump

EASY OPERATION, ANALYSIS AND STORAGE
OF MEASUREMENT RESULTSn Intuitive user guidance with touch displayn Modern menu structuren Rotatable full color high resolution displayn Remote control by mobile device via Wi-Fin Data storage capabilityn Data export using USB stick (access controlled)

LOW OPERATIONAL AND
MAINTENANCE COSTS
Low-maintenance despite long service life thanks to:n Robust vacuum systemn Ruggedized ion source with 3-year warranty

OPTIMAL ACCESS TO APPLICATION AREASn Small and ruggedized design for stability andoptimal mobilityn Easy handling with low center of gravityn Big wheels easily overcome obstacles

ULTRATEST SENSOR TECHNOLOGYTYPICAL APPLICATIONS 180° mass spectrometern INFICON leak detectors are used daily in all
major semiconductor fabsn All components made of stainless steeln Various Process tools:
Etch, CVD, PVD, Furnace, Implant, MOCVD,Solar, FPD, etc.

 Ruggedized ion source with 3 year warrantynn Pre-amplifier with highest sensitivity in industryn Quick confirmation of tool integrity and pinpoint
leaks to be fixed after tool maitenancen Vacuum lines and pumps in sub fabn

 Gas cabinets and complex gas delivery linesn Fab facilities and abatementnACCESSORIES AVAILABLE
RIGHT ON THE DEVICE Helium bottle holder on the leak detectorn Vacuum hose holder on the devicen Accessories in lockable compartmentnEARLY DETECTION OF LARGE LEAKSBig leaks can be detected significantly faster, as
it is no longer necessary to wait for the system tobe pumped down. This is possible thanks to: MASSIVE leak function (special pumping/valveblock function)nYour specialists for leakdetection solutions
INFICON offers globally leading technologies in measurement and sensor technology, as
well as process management for demanding vacuum processes in highly specializedindustries. INFICON products for gas leak detection are used particularly in cooling andair conditioning technology, semiconductor manufacturing and automotive production.
With INFICON you have an expert consultant at your side who knows the challenges ofyour industry and works with you to find the right solutions for your needs. INFICON
guarantees top service and maximum support with specialized experts at many branch
offices around the world. Leading manufacturing facilities are located in the US andEurope, with branches in China, Denmark, France, Germany, Japan, Korea, Liechtenstein,Singapore, Switzerland, Taiwan, Great Britain and the US.

UL3000 FAB (ULTRA) MOBILE HELIUM LEAK DETECTORSPECIFICATIONS
Min. detectable leak rate for helium (vacuum method)Min. detectable leak rate for helium (sniffer mode)
Max. inlet pressure (MASSIVE mode)
Pumping speed during evacuation
Helium pumping speed (high sensitive mode ULTRA)
Response time
Time until ready for operation
Detectable masses (ULTRATEST Sensor Technology)
Ion source
Test port
Adjustable triggers
InterfaceSupply voltagePower consumption
Dimensions (L x W x H)
WeightPermissable ambient temperature range (during operation)
Additional Features

UL3000 FabUL3000 Fab ULTRA<5 x 10-12 mbar l/s<5 x 10-8 mbar l/s
1000 mbar>32 m³/h>36 m³/h
4 l/s<1 s<3 min2, 3, 4 (H2, 3He, He)2 filaments, iridium/yttria oxide coated
DN 25 KF
42 x USB, Ethernet / LAN
100 to 240 V 50/60 Hz (AC)typ. 700 VA, max. 1500 VA
1050 x 472 x 987 mm (42 x 21 x 34 in.)
118 kg132 kg10 to 40°C
HYDRO·S, separate–sniffer line SL3000 port

ORDERING INFORMATIONPRODUCTUL3000 Fab 100 to 230 V 50/60 Hz
UL3000 Fab ULTRA 100 to 230 V 50/60 Hz(HYDRO·S, separate sniffer line SL3000 port)
ACCESSORIES
RC1000 remote control, wired, incl. 4 m coiled cable
RC1000WL remote control, wireless, incl. wireless transmitter
Sniffer line SL200 incl. el. extention cable, 4 m length
Sniffer line SL3000 for UL3000 Fab ULTRA only, with integrated display
3 m length
5 m length
10 m length
Bracket for SL3000
I/O1000 module (input / output module)
BM1000 Profibus module
BM1000 PROFINET I/O module
BM1000 Device Net module
BM1000 Ethernet/IP
Data cable (I/O1000 / BM1000 to UL3000 Fab ULTRA)
0.5 m
2m
5m
10 m
Test Chamber TC1000
Helium bottle holder
Vacuum hose holder

Cat. no.
550-200
550-260

551-010551-015551-210525-001525-002525-003551-203560-310560-315560-316560-317560-318560-334560-332560-335
560-340551-005551-201551-202cTÜVus certified assuring­compliance with U.S. and­Canadian National Standards

w ww. i nfi c on. c om

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
iicb73en1-01-(2006)    ©2020 INFICON