Operating Manual
Incl. EU Declaration of Conformity

MEMS Pirani & Piezo Diaphragm Gauge
Analog output with either RS232 or RS485 interface

PPG550

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1

Product Identification

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space provided
below.

ValidityThis document applies to products with the following part numbers:

1)

INFICON PCG55x / PSG55x, Leybold TTR 101N

2)

GP / MKS 275

3)

MKS 910 / 925 / 901P

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document correspond to gauge with part number 3PPM-001-DDR3. They apply to the other gauges
by analogy.

2

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Intended Use

The MEMS Pirani & Piezo Diaphragm Gauge PPG550 has been designed for
vacuum measurement of gases in the pressure range of 1×10-6 … 1333 mbar.
It must not be used for measuring flammable or combustible gases in mixturescontaining oxidants (e.g. atmospheric oxygen) within the explosion range.

Functional Principle

The PPG gauge is a combination gauge consisting of a MEMS Pirani sensor and a
MEMS Piezo diaphragm sensor. Both sensors are constantly active.
At low pressures, only the signal of the MEMS Pirani sensor is used for pressure
measurement; at high pressures, only the signal of the MEMS Piezo diaphragmsensor. To determine the output signal in the intermediate range, both signals areused proportionally to the pressure.

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3Contents
Product Identification
Validity
Intended Use
Functional Principle

2
2
3
3

1 Safety
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety Instructions
1.4 Liability and Warranty

5
5
5
5
5

2 Technical Data
2.1 Output Signal vs. Pressure (1.0 … 9 V)
2.2 Output Signal vs. Pressure (0.372 … 5.75 V)
2.3 Output Signal vs. Pressure (0.61 … 10.2 V)
2.4 Other Analog Output Options

6
8
8
8
8

3 Installation
3.1 Vacuum Connection
3.2 Power Connection
3.2.1 FCC 68 Connector
3.2.2 D-sub Connector

9
9
10
11
12

4 Operation
4.1 Switching Functions SP1, SP2, SP3
4.2 RS232 / RS485 Interface
4.2.1 List of Commands
4.2.1.1 ADR - Address Device
4.2.1.2 AOUT – Analog Output
4.2.1.3 AO – Linear Analog Output
4.2.1.4 BAUD – Baud Rate
4.2.1.5 BTN – Button Enable
4.2.1.6 LED – LED Behavior
4.2.1.7 FAIL – Failure Handling
4.2.1.8 P – Pressure Measurement Handling
4.2.1.9 Q – Quick Data Acquisitions
4.2.1.10 T – Temperature Measurement
4.2.1.11 U – Unit
4.2.1.12 STAT – Statistics
4.2.1.13 SPx – Setpoints
4.2.1.14 SN – Serial Number
4.2.1.15 PN – Part Number
4.2.1.16 MF – Manufacturer identity
4.2.1.17 FV– Firmware Version
4.2.1.18 VAC – Pirani Zero Adjustment
4.2.1.19 FS – Full Scale Adjustment
4.2.1.20 FD – Factory Default
4.3 RS232 / RS485 MKS Compatibility

13
14
15
16
16
17
18
19
19
19
19
19
20
20
20
21
22
23
23
23
23
23
23
24
25

5 Deinstallation

27

6 Maintenance, Repair
6.1 Zero Adjustment Pirani Sensor
6.2 Zero Adjustment Piezo Sensor
6.3 Full Scale Adjustment Piezo Sensor
6.4 Full Scale Adjustment Pirani Sensor

28
28
28
28
29

7 Returning the Product29

8 Disposal

30

EU Declaration of Conformity

31

UKCA Declaration of Conformity

32

For cross-references within this document, the symbol (→  XY) is used, for crossreferences to further documents and data sources, the symbol (→  [Z]).

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1 Safety
1.1 Symbols Used

DANGER
Information on preventing any kind of physical injury.

WARNING
Information on preventing extensive equipment and environmental damage.

CautionInformation on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Notice

1.2 Personnel Qualifications

Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.

1.3 General Safety
Instructions•

Adhere to the applicable regulations and take the necessary precautions for theprocess media used.
Consider possible reactions between the materials (→  7) and the process
media.
Consider possible reactions of the process media (e.g. explosion) due to theheat generated by the product.

•

Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.

•

Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties•

disregard the information in this document•

use the product in a non-conforming manner•make any kind of interventions (modifications, alterations etc.) on the product•use the product with accessories not listed in the corresponding product documentation.

The end-user assumes the responsibility in conjunction with the process media
used.
Gauge failures due to contamination are not covered by the warranty.

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5

2 Technical Data
Measurement principle

Pressure range
2 … 1333 mbar
1.5 … 2 mbar
1×10-6 … 1.5 mbar

MEMS Piezo resistive diaphragmcrossover range
MEMS Pirani thermal conductivity

Measuring range

Range (N2)

1×10-6 … 1333 mbar

Accuracy 1)
1100
800
100
2
1×10-4
1×10-5

Solid state relay… 1333 mbar
… 1099 mbar
… 800 mbar
… 99.9 mbar
… 1.99 mbar
… 9.99×10-5 mbar

0.5% of reading
0.25% of reading
0.5% of reading
1% of reading
5% of reading
25% of reading

Hysteresis
10 … 1333 mbar
1×10-3 … 10 mbar

0.1% of reading
1% of reading

Analog output resolution
Analog output update rate

16 bit (150 µV)
124 HzResponse time (ISO 19685:2017)
Temperature compensation
Temperature measurement absoluteaccuracy
Gas type dependence<20 ms+10 … +50 °C

Set point range
Contact rating
Contact on resistance

5×10-6 … 1333 mbar
50 V, 100 mArms / mA (dc)

Contact endurance±1.5 °C (0 … +80 °C)→  13<35 Ω
Unlimited (no mechanical wear)

Do not exceed maximum load rating of 250 mA, 50 V (dc) / V (ac) peakon relay contacts. Special precautions must be taken when driving an
inductive load. Ensure that inrush peak current does not exceed relay
contact ratings.

Analog output

3PPM-xxx-xxx0
3PPM-xxx-xxx2
3PPM-xxx-xxx3
3PPM-xxx-xxxZ
Error signal

1)60.61 … 10.2 V
0.375 … 5.570 V
1.0 … 9 V
no analog signal→  13

Accuracy and repeatability specifications are typical values measured atambient temperature in Nitrogen atmosphere after zero adjustment.
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Power supply

DANGER
The gauge may only be connected to power supplies, instruments orcontrol devices that conform to the requirements of a grounded extralow voltage (PELV) according to EN 60204-1. The connection to thegauge has to be fused).
Supply voltage at the gauge
Power consumption
Internal fuse
Reverse polarity and overvoltage
protection

Sensor cable connection

Electrical connection
3PPM-0xx-x0xx
3PPM-0xx-xDxx
3PPM-0xx-xExx
Sensor cable
Cable length
RS232C operation
RS485 operation

RS232C/RS485 interface

Data rate
Data format+12 … +30 V (dc)ripple max. 1 Vpp≤350 mW
100 mA (thermal recoverable)
yes

FCC 68, 8-pin
D-sub, 9-pin, male
D-sub HD, 15-pin, maleshielded, 0.14 mm2/conductor≤100 m≤15 m≤1200 m

9600 Baud (default)
binary8 data bits
one stop bit
no parity bit
no handshake

For further information on the RS232C / RS485 interface →  15

Materials used

Materials exposed to vacuum
Housing
FlangeFurther parts

Pressure max.

Ambiance

Admissible temperatures
Storage
Operation
Bakeout
Relative humidity (IEC 68-2-38)(year's mean / during 60 days)
Use
Mounting orientation
Degree of protection

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SS 1.4307, AISI 304L, Al 6061
SS 1.4307, AISI 304LAISI 304L, Kovar, glass, silicon, nickel,
Al, SiO2, Si3N4, gold, FPM, low outgassing epoxy resin, solder, RO4305
10 bar (absolute)-40 … +120 °C-20 … +50 °C+120 °C (non operating)98%, non-condensing
indoors only
altitude up to 2000 m
any
IP 40

7

Dimensions [mm]

DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 25 ISO-KF
4 VCR female
⅛" NPT

Weight

DN 16 ISO-KF≈136 g

DN 16 ISO-KF, long tube

≈154 g

DN 25 ISO-KF≈155 g4 VCR female≈158 g⅛" NPT≈139 g2.1 Output Signal vs.
Pressure (1.0 … 9 V)

1V (dc) / decade (MKS 901P/925/910)

2.2 Output Signal vs.
Pressure(0.372 … 5.75 V)

0.372 … 5.75 V (dc) (MKS GP275)

A
[mm]

B
[mm]

12
29
12
37.5
37.0

39.4
56.4
39.4
64.9
64.4

Unit Torr: 1.00 … 8.95 V (dc)
Unit Pa and mbar: 1.12 … 9.08 V (dc)

2.3 Output Signal vs.
Pressure (0.61 … 10.2 V)

p = 100.778(U-c)

U = c + 1.286log10 p⇔

valid in the range 5×10-5 mbar <p< 1333 mbar
U

p

c

U

p

c

[V]
[V]
[V]

[mbar][µbar][Torr]

6.143
2.287
6.304

[V]
[V]
[V]

[mTorr]
[Pa]
[kPa]

2.448
3.572
7.429

where

2.4 Other Analog Output
Options8

p pressure
U output signal
c constant (pressure unit dependent)

Configuration and list of analog output options →  17.

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3 Installation
DANGER
Leaking process media
High-intensity mechanical, chemical or thermal impacts can cause
leaks in the measuring sensor. Process media can thus leak andpossibly cause hazards, if overpressure is in the vacuum system.
•

Avoid high-intensity mechanical, chemical or thermal impacts andoverpressure in the vacuum system.

•

Take appropriate measures (e.g. shut off gas supply, extraction,leak test) to avoid hazards or damage due to leaking process
media.

3.1 Vacuum Connection

DANGER
Overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping processgases can result if clamps are opened while the vacuum system ispressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.

DANGER
Overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g. O-rings) cannot
withstand such pressures. Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering ring.

DANGER
The gauge must be electrically connected to the grounded vacuum
chamber. This connection must conform to the requirements of a protective connection according to EN 61010:•

VCR and NPT connections fulfill this requirement•

For gauges with a KF vacuum connection, use a conductive
metallic clamping ring.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures toensure cleanliness and prevent damages.

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9Caution
Dirt sensitive area
Touching the product or parts thereof with bare hands increases thedesorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.

Mount the gauge so that no vibrations occur. The gauge may be
mounted in any orientation. To keep condensates and particles fromgetting into the measuring chamber preferably choose a horizontal to
upright position and consider using a seal with centering ring and filter. If
adjustment should be possible after the gauge has been installed, besure to install it so that the buttons can be accessed with a pin.

Procedure

Remove the protective lid and connect the product to the vacuum system.

Keep the protective lid.

3.2 Power Connection

Make sure the vacuum connection is properly made.

DANGER
The gauge may only be connected to power supplies, instruments orcontrol devices that conform to the requirements of a grounded extralow voltage (PELV) according to EN 60204-1. The connection to thegauge has to be fused.

Ground loops, differences of potential, or EMC problems may affect themeasurement signal. For optimum signal quality, please do observe thefollowing notes:•

Connect the cable shield to ground on one side via the connector
housing. Do not connect the other side of the shield.

•

Connect the supply common with protective ground directly at thepower supply.

•

Use differential measurement input (signal common and supply
common conducted separately).

•

Potential difference between supply common and housing ≤18 V(overvoltage protection).

Do not exceed maximum load rating of 250 mA, 50 V (dc) / V (ac) peakon relay contacts. Special precautions must be taken when driving an
inductive load. Ensure that inrush peak current does not exceed relay
contact ratings.

10

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3.2.1 FCC 68 Connector

Pin assignment

If no sensor cable is available, make one according to the following diagram.
Connect the sensor cable.

Pin
1
2
3
4
5
6
7
8

SymbolDescription

V+
GND
S+
ID
GND
REL2
REL1
RELC

Supply voltage 12 … 30 V (dc)
Supply common, GND
Measurement signal
Gauge identification
Signal common
Relay SP2, closing contact
Relay SP1, closing contact
Relay 1 and 2 common
FCC 688-pin
connector

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113.2.2 D-sub Connector

9-pin

If no sensor cable is available, make one according to the following diagram.
Connect the sensor cable.

Pin
1
2
3
4
5
6
7
8
9

SymbolDescription

REL NOREL NCV+GNDS+REL COM
RS232TX
GND
RS-232RX

Relay 1 NO (normally open contact) (*)
Relay 1 NC (normally closed contact) (*)
Supply voltage12 … 30 V (dc)
Supply common
Measurement signal
Relay 1 Common (*)
RS232 Transmit / RS485 (-)
Signal common
RS232 Receive / RS485 (+)(*)

15-pin HD

Pin
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15

12

Optional relay

SymbolDescription

RS232TX
RS-232RX
V+
GND
S+
GND
REL NOREL COMREL NCREL NCREL COMREL NOREL NCREL COMREL NO

RS232 Transmit / RS485 (-)
RS232 Receive / RS485 (+)
Supply voltage12 … 30 V (dc)
Supply common
Measurement signal
Signal common
Relay 1 NO (normally open contact) (*)
Relay 1 Common (*)
Relay 1 NC (normally closed contact) (*)
Relay 2 NC (normally closed contact) (*)
Relay 2 Common (*)
Relay 2 NO (normally open contact) (*)
Relay 3 NC (normally closed contact) (*)
Relay 3 Common (*)
Relay 3 NO (normally open contact) (*)(*)

D-sub, 9-pin
femalesoldering side

D-sub HD,15-pin
femalesoldering side

Optional relay

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4 Operation
When the supply voltage is applied, the measurement signal is available at theconnector.
Allow a stabilization period of at least 1 minute. It is advisable to operate the gauge
continuously, irrespective of the pressure.
The gauge is factory calibrated. Due to long time operation or contamination, azero drift could occur. Periodically check the zero and adjust it if necessary. In
addition, we recommend performing a zero and ATM calibration after eachreinstallation (adjusting the gauge →  23).

Status LED

LED for pressure indication(Dynamic mode)

Startup sequence

0.5 sec purple followed by 4 sec. pulsing
green

Normal standard operation

Solid green

Overpressure indication (inDynamic Mode only)Flashing Orange (5 Hz)

Sensor fail stage

Flashing red (5 Hz)

A multi-color LED indicates the measured pressure by changing the color. The
dynamic LED can be enabled via the digital interface. Refer to page 19 for LED
configuration.

Gas type dependence

Pressure range

Measurement principle

Gas type dependence

2 … 1333 mbar

MEMS Piezo sensor

independent of gas type, nocorrection required

1.5 … 2 mbar

MEMS Piezo sensor and
MEMS Pirani sensor

crossover range

MEMS Pirani sensor

proportional to pressure 2)

1×10-6 … 1.5 mbar

2)
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The pressure reading applies to N2. For other gases, it has to be converted.
13

4.1 Switching Functions
SP1, SP2, SP3

The relay switches are per default controlled by the pressure measurement but canalso be configured to be controlled by the internal temperature sensor.
The switching functions can be set to any pressure within the measurement rangeof the gauge. A solid state relay is provided for each switching function.
The current threshold setting
is output at the measurement signal output instead of the pressure signal andcan be measured with a voltmeter• can be read / written via the RS232 or RS 485 interface.
•

Source for setpoint, switching
characteristics and hysteresis

The source for setpoint (pressure or temperature), the switching characteristics andthe hysteresis of each set point can be programmed (→  22).

Low Trip Point (default)

If the pressure or the temperature in the vacuum system is lower than the setpoint,
the corresponding LED is lit solid and the corresponding relay is closed.
Measurement signal(Pressure p)ue
ent val
urem
s
a
Me

Hysteresis(10% of threshold)SetpointThreshold value

Time t
Off

On

Off

The setpoints are factory disenabled and therefore do not switch (enable setpoints(→  22).
If the temperature measurement is selected as the source, the automatically calculated hysteresis values will be -1 °C / +1 °C insteadof -10% / +10%.

High Trip Point

If the pressure or the temperature in the vacuum system is higher than the setpoint,
the corresponding LED is lit solid and the corresponding relay is closed.
Measurement signal(Pressure p)

Threshold value

SetpointThreshold value

Hysteresis(10% of threshold)

Me
asu
reme
nt value

Time t
Off

On

Off

The setpoints are factory disenabled and therefore do not switch (enable setpoints(→  22).
If the temperature measurement is selected as the source, the automatically calculated hysteresis values will be -1 °C / +1 °C insteadof -10% / +10%.

14

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4.2 RS232 / RS485 Interface

The built-in RS232 / RS485 interface allows transmission of digital measurement
data and instrument conditions as well as the setting of instrument parameters.
Communication is based on an ASCII protocol that includes a start character, device address, command or query and an end character for termination.
The signs <> are written for separation of command name and values
and are for informational purposes only. These signs should not beentered in the actual command.
For multiple parameter commands or queries each parameter is separated by acomma (ASCII: 2C Hex).
@<device address><command or query><? or !><parameter(s)>\Start character:
Device Address:
Command:Query or set:Parameter(s):End character:tinb85e1@001-253
see List of Commands? or !
parameter(s)\Example of sending a single
parameter query to thetransducer

Query pressure from MEMS Pirani sensor:
Send:@254P?MP\
Reply:@ACK1.23E-5\

Example of sending a multiparameter command to thetransducer

Programming the setpoint 1 value to 1.23E-4 (using the default unit setting of thetransducer, i.e. mbar):
Send:@254SPV!1,1.24E-4\
Reply:@ACK1.23E-4\(2022-07)

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15

4.2.1 List of Commands
Command

Description

Query

Set

Valid input parameter

Page

ADR

Device address●●

1-3 digits (range 001-253)

16

AOUT

Analog output configuration●●<STD / 0-99>

17

AO

Linear analog output●●<Output1&2>, <LOW PRESSUREVALUE>,<HIGH PRESSURE VALUE>,<LOW
VOLTAGE VALUE>,<HIGH VOLTAGE VALUE>

18

BAUD

Set baud rate●●

<4800 / 9600 / 19200 / 38400 / 57600 / 115200>(default 9600)

19

BTN

Enable/disable push-button●●<ON>, <OFF>

19

FAIL

Sensor failure handling●●<WORKING / ZERO >19

FDFactory default●●<ADR / BAUD / GT / SP / U / (NONE)>24●<PRESSURE VALUE / CLEAR>

23

-

23

FS

Pirani / Piezo full-scale
adjustment●

FV

Firmware version●

GT

Gas type●●<NITROGEN / HELIUM / ARGON / AIR>LED

LED behavior●●<SOLID>, <DYNAMIC>, <ANALOG>MF

Manufacturer

●

-

MD

Model name

●

-

P

Pressure measurement●<CMB / MP / PZ / (none)>

19

PN

Part number

●

-

23

Q

Quick query●<PZ>, <PIR>, <CMB5>, <TMP>, <SP>

20

SN

Serial number

●

-

23

SP

Setpoint settings

●

-

22

SPD

Setpoint direction 1)●●<SETPOINT #>, <ABOVE / BELOW>

22

SPE

Setpoint enable 1)●●<SETPOINT #>, <OFF / ON>

22

SPH

Setpoint hysteresis 1)●●<SETPOINT #>, <PRESSURE VALUE>

22

SPV

Setpoint value 1)●●<SETPOINT #>, <PRESSURE VALUE>

22

SPR

Setpoint relay status 1)●<SETPOINT #>

22

SPS

Setpoint source 1)●●<SETPOINT #>, <P / T>

22

STAT

Statistics●●<P / T / (none) / CLEAR (Set only)>

21

T

Vacuum sensor temperature

●

-

20

U

Pressure unit●●(<PARAMETER>), <MBAR / PASCAL / TORR> or<CELSIUS / FAHRENHEIT / KELVIN>

20

VAC

Pirani Zero adjustment●●

No input or <PRESSURE VALUE>

23

1)

●

19

Setpoint solid-state relay is optional and is not relevant for all part numbers.

All valid input parameters written in italics are to be entered as a number. These numbers will vary with the type and model number of thetransducer. Refer to the specific commands for details.

4.2.1.1 ADR - Address Device

The sensor has an addressable communication protocol, and so it will only accept
commands or queries with the following addresses. All queries or commands sent
to all other addresses are simply ignored.
<device address>:
254
255

16

Pre-configured to 253, this value may be changed at any
time to anything in the range 1-253 using the ADR
command.
This is the ”global” address. The PPG550 will always respond to commands or queries at address 254, regardless ofthe device address setting.
This is the broadcast address, which may be used for performing the same operation on multiple PPG550 at once.
The sensor will not issue any replies to broadcast commands. Note that broadcasting requires a multidrop communication interface such as RS-485.
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Example

Change the device address from 253 (default) to 123 using the global address:
Send:@254ADR!123\
Reply:@253ACK123\
All replies after this one will begin with the new device address, 123.

4.2.1.2 AOUT – Analog Output

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PPG550 will be delivered with ordered analog output, however, the analog output
can be configured to emulate a collection of other equipment via the AOUT
command:

VendorTransducer model

OutputLINEAR

INFICON-

Programmable linear

0MKS

901P, 910, 925

1 V (dc)/decade (1 … 9 V (dc))

1

Edwards

APG-L

1.99 … 10 V (dc)2

Edwards

APG-100

2.00 … 9.00 V (dc)3

Edwards

WRG

2.75 … 10.00 V (dc)4

INFICON
Leybold

PSG500TTR91

1.547 … 10.00 V (dc)5

INFICON
Pfeiffer

MPG400
PKR2512.07 … 8.603 V (dc)6

INFICONMKS

BPG400999 Quattro

1.843 … 10.00 V (dc)7

MKS Granville Phillips

275

0.372 … 5.570 V (dc)8

MKS HPS

Moducell 325

0.2509 … 3.2398 V (dc)9

MKS HPS

Moducell 325 x3

0.753 … 9.719 V (dc)

10

MKS

Baratron® 0.1 Torr

0 … 10.00 V (dc)

11

MKS

Baratron® 1 Torr

0 … 10.00 V (dc)

12

MKS

Baratron® 10 Torr

0 … 10.00 V (dc)

13

MKS

Baratron® 100 Torr

0 … 10.00 V (dc)

14

MKS

Baratron® 1000 Torr

0 … 10.00 V (dc)

15

MKS

901P piezo differential output

1 V (dc)/decade

16

Edwards

AIM-S / - SL

2.5 … 10.00 V (dc)17

Edwards

AIM-X / XL

3.286 … 9.799 V (dc)18

Pfeiffer

IKR2512.324 … 8.500 V (dc)19

Pfeiffer

TPR 265 / 280

2.199 … 8.625 V (dc)20

Hastings

HPM-2002-OBE special

5.00 … 9.995 V (dc)21

Edwards

DV6M

2.00 … 10.00 V (dc)22

Edwards

APG-M

2.00 … 10.00 V (dc)23

MKS Granville Phillips

GP275 (0-9.0 VDC)

0 … 8.80 V (dc)24

ThyracontMT 241.1

0.41 … 9.99 (V (dc)25

MKS Granville Phillips(0-375.6VDC)

0.375 … 5.614 V (dc)26

Edwards

APG100-LC

2.00 … 10.00 V (dc)27

Edwards

APG100M

2.00 … 10.00 V (dc)

28

MKS

907

0.387 … 5.666 V (dc)29

AlcatelK6080

0.40 … 10.00 V (dc)30

INFICON

PEG1002.186 … 10.166 V (dc)31

VarianEysys

1.00 … 8.00 V (dc)32

AlcatelTA111

0.10 … 9.20 V (dc)

33

MKS

685

1.00 … 7.00 V (dc)

34

MKS

901P special 2VDC/decade1.00 … 9.00 V (dc)35

Pfeiffer

TTR 101

0.61 … 10.2 V (dc)50

MKS/INFICON

0.1 mbar F.S. (linear)0 … 10.00 V (dc)51

MKS/INFICON

1 mbar F.S. (linear)0 … 10.00 V (dc)52

MKS/INFICON

2 mbar F.S. (linear)0 … 10.00 V (dc)53

MKS/INFICON

5 mbar F.S. (linear)0 … 10.00 V (dc)17

54

MKS/INFICON

10 mbar F.S. (linear)0 … 10.00 V (dc)55

MKS/INFICON

20 mbar F.S. (linear)0 … 10.00 V (dc)56

MKS/INFICON

50 mbar F.S. (linear)0 … 10.00 V (dc)57

MKS/INFICON

100 mbar F.S. (linear)0 … 10.00 V (dc)58

MKS/INFICON

200 mbar F.S. (linear)0 … 10.00 V (dc)59

MKS/INFICON

500 mbar F.S. (linear)0 … 10.00 V (dc)60

MKS/INFICON

1000 mbar F.S. (linear)0 … 10.00 V (dc)61

MKS/INFICON

1100 mbar F.S. (linear)0 … 10.00 V (dc)

ExampleChange the Analog output emulation to MKS Baratron 0-10VDC with 0.1 Torr fullscale:
Send:@254AOUT!10\
Reply:@253ACK10\The PPG50 is available with a hardware optional secondary analog output. The
output can be configured to the same output curves as the primary analog output.

Example4.2.1.3 AO – Linear Analog
OutputConfiguration of output

Change the Analog output emulation to Pfeiffer TTR 101 analog output:
Send:@254AOUT!2,35\
Reply:@253ACK2,35\

When selecting Aout to "Linear" the analog output configuration can be user configured to any linear scaling within the
PPG550 measuring range and output
limitation. This feature allows magnifycation of a specific pressure range.

When programming the voltage output scaling, the minimum and maximum output
voltage must be entered in millivolt and the minimum and maximum pressure intransducer configured pressure unit.
Command syntax:

Example18

AO!<Output1&2>, <LOW PRESSURE VALUE>,<HIGHPRESSURE VALUE>,<LOW VOLTAGE VALUE>,<HIGH
VOLTAGE VALUE>

Configure the analog 1 output linear expression between 1 V (dc) @ 10 mbar and
10 V (dc) @ 100 mbar.
Send:@254AO!1,10,1000,100,10000\
Reply:@253ACKAOANALOG OUT 1# : PRESSURE , AOUT [mV]
L : +1.00E+01, 1000
H : +1.00E+02, 10000\

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4.2.1.4 BAUD – Baud Rate

Example4.2.1.5 BTN – Button Enable

Example4.2.1.6 LED – LED Behavior

Example4.2.1.7 FAIL – Failure Handling

The PPG550 supports the following baud rates: 4800, 9600, 19000, 38400, 57600,
115200. Note that whenever the baud rate is changed, the PPG550 will send an
acknowledgement to the BAUD command using the old baud rate setting before
switching to the new one.
Change the baud rate to 115200:
Send:@254BAUD!115200\
Reply:@253ACK115200\

Enable or disable the feature to perform Pirani zero-adjustments via the PPG550
push-button.
Disable the push-button:
Send:@254BTN!OFF\
Reply:@253ACKOFF\

The PPG550’s LED can be programmed to work in three different ways during
normal operation. See "Status LED" section for more details.
Parameter

Description

SOLID

The LED is solid green. (Factory default)

DYNAMICThe LED changes color to reflect the measured pressure.

ANALOGThe LED changes color to reflect the 0-10V analog output.

Have the LED change color as a function of the measured pressure:
Send:@254LED!DYNAMIC\
Reply:@253ACKDYNAMIC\The PPG550 can be configured to handle sensor failure in two different ways:• Switch the Combined Pressure output (P? or P?CMB) and Analog Output to•

Example4.2.1.8 P – Pressure
Measurement Handling
Reading the digital
combined pressure value

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only use the working sensor, i.e. if the Piezo sensor is malfunctioning, thecombined output is only based on the Vacuum Pirani and vice versa.
Set both the Combined Pressure output and the Analog Output to zero in caseof sensor errors to signal an error condition.

Parameter

Description

WORKING

Base Combined Pressure output and Analog Output on working
sensor only.

FAIL

Set Combined Pressure output and Analog Output to 0 in case of
sensor errors.

Have the Combined Pressure output and Analog Output go to zero if a sensor ismalfunctioning:
Send:@254FAIL!ZERO\
Reply:@253ACKZERO\

The digital pressure measurement can be accessed using the RS-232/485 serial
digital interface.
Send:
Reply:@254P?\@ACK1013.12\
19

Reading the digital Piezopressure

Send:
Reply:@254P?PZ\@ACK1013.12\

Reading the digital MEMS
Pirani pressure

Send:
Reply:@254P?MP\@ACK1.23E-3\

4.2.1.9 Q – Quick Data
Acquisitions

The quick data acquisition command provides all variable measurement data andsetpoint status in one string.

Reading the quick dataacquisition

Send:
Reply:@254Q?\@ACK1.0000E-2,1.2300E-2,1.2300E-2,23.24,101\

Configuration of the quick
data acquisition

Send:
Reply:@254Q!,PZ,PIR,CMB,SP,TEMP\@ACK1.0000E-2,1.2300E-2,1.2300E-2,23.24,101\

Read the currently
configured Q-configuration

Send:
Reply:@254Q?CONFIG\@ACKPZ,PIR,CMB,SP,TEMP\

Parameter

Description

PZ

Piezo pressure measurement

PIR

Pirani pressure measurement

CMB

Combined pressure measurement

TEMP

Temperature measurement

SP

Setpoint status

Setpoint status
The setpoint status value provides a 3-digit value, where each digit represents thestatus of the setpoint relay 1, 2 and 3, respectively. Each digit may be 1=Energized
relay, 0=De-energized relay, X=No relay installed.

4.2.1.10 T – Temperature
Measurement

Reading the temperature

4.2.1.11 U – Unit

The PPG550 has a built-in high-resolution precision temperature sensor that provides a temperature measurement of the vacuum gas in degrees Celsius with atypical accuracy of better than ±1 °C.
Send:
Reply:@254T?\@ACK25.22\

The PPG550 can be configured to three different pressure units and three different
temperature units. If no explicit parameter (pressure, temperature) is defined,
pressure is assumed.
All values related to pressures like setpoint values and full-scale must beentered in the current unit for the transducer. When changing unit all
setpoint values are converted to the new unit and consequently setpoint
functionality will remain intact when changing unit.
Pressure unit
mbar

PascalTorr

Temperature unit
Celsius20

Fahrenheit

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Setting pressure unit to
mbar

Send:
Reply:@254U!P,MBAR\@ACKMBAR\

Setting pressure unit to
PascalSend:
Reply:@254U!PASCAL\@ACKPASCAL\

Setting temperature unit to
Fahrenheit

Send:
Reply:@254U!T,FAHRENHEIT\@ACKFAHRENHEIT\

Reading current
temperature unit

Send:
Reply:@254U?T\@ACKFAHRENHEIT\

4.2.1.12 STAT – Statistics

Reading the statistics

The statistics function logs the number of operation hours and the maximum andminimum measured pressure or temperature value. If no explicit parameter (pressure, temperature) is defined, pressure is assumed.
Parameter is left out, so pressure is assumed:
Send:
Reply:@254STAT?\@254ACKSTAT<cr>
MIN : 5.6104E+00<cr>
MAX : 1.0159E+03<cr>
HOURS : 37\

Reading the temperature
statistics

Send:
Reply:@254STAT?T\@254ACKSTAT<cr>
MIN : 2.345E+01<cr>
MAX : 3.123E+01<cr>
HOURS : 37\

Clearing the statistics

Parameter is left out, so pressure is assumed:
Send:
Reply:

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21

4.2.1.13 SPx – Setpoints

All values related to pressures like setpoint values and full-scale must beentered in the current unit for the transducer. When changing unit all
setpoint values are converted to the new unit and consequently setpoint
functionality will remain intact when changing unit.
@254SP?\

SP - Setpoint status(This step is not mandatory.) Print an overview of all setpoint settings. If no setpoints have previously been defined, a PPG550 withthree relays will produce the following overview:#: ENABLE, ENERGIZED, SOURCE, DIRECTION,VALUE, HYSTERESIS<cr>
1:
OFF,
NO,
PRES,
ABOVE, +0.000E+00, +0.000E+00<cr>
2:
OFF,
NO,
PRES,
ABOVE, +0.000E+00, +0.000E+00<cr>
3:
OFF,
NO,
PRES,
ABOVE, +0.000E+00, +0.000E+00<cr>\
If the unit is set to mbar and the pressure reading is above 600 –energizing the Setpoint 1 relay – the generated output would look
like this:#: ENABLE, ENERGIZED, SOURCE, DIRECTION,VALUE, HYSTERESIS<cr>
1:
ON,
YES,
PRES,
ABOVE, +6.000E+00, +5.000E+00<cr>
2:
OFF,
NO,
PRES,
ABOVE, +0.000E+00, +0.000E+00<cr>
3:
OFF,
NO,
PRES,
ABOVE, +0.000E+00, +0.000E+00<cr>\

22

SPS- Setpoint source@254SPS!1,P\

Assign pressure measurement as the source for
Setpoint 1.

SPD - Setpoint direction@254SPD!1,ABOVE\

Configure the Setpoint 1 relay to be energized whenever the pressure reading is greater than the Setpoint 1
value. Whenever this value is changed, the corresponding Hysteresis value is automatically calculated to either-10% of the current setpoint value (when direction =ABOVE) or +10% of the current setpoint value (whendirection = BELOW). If the temperature measurement isselected as the source, the automatically calculated
Hysteresis values will be -1 °C /+1 °C instead of -10% /+10%.

SPV - Setpoint value@254SPV!1,600\

Set the value of Setpoint 1 to 600 and auto-calculate
Hysteresis value. As the direction is set to ABOVE, thehysteresis value will be automatically set to 540 (thesetpoint value -10%). Had the direction been BELOW,
the hysteresis would have been automatically set to660 (the setpoint value +10%).

SPH - Setpoint hysteresis@254SPH!1,500\

Set the Hysteresis value for Setpoint 1 to 500.

SPE - Setpoint enable@254SPE!1,ON\

Enable Setpoint 1.

SPR - Setpoint relay status@254SPR?1\

Get the current status of the Setpoint 1 relay.

Parameter

Description

Valid Input

SPD

Setpoint Direction<SETPOINT #>, <ABOVE, BELOW>SPE

Setpoint Enable<SETPOINT #>, <OFF/ON>

SPH

Setpoint Hysteresis<SETPOINT #>, <PRESSURE VALUE>

SPV

Setpoint Value<SETPOINT #>, <PRESSURE VALUE>

SPS

Setpoint Source (pressure or temperature)<SETPOINT #>, <P/T>

SP

Read all setpoint settings–

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4.2.1.14 SN – Serial Number

Serial number of the PPG550.
Send:
Reply:

4.2.1.15 PN – Part Number

Part number of the PPG550.
Send:
Reply:

4.2.1.16 MF – Manufacturer
identity

4.2.1.17 FV– Firmware Version@254SN?\@ACK191230123456;@254PN?\@ACKPPG550-123456;

Manufacturer identity.
Send:
Reply:@254MF?\@ACKINFICON;

Firmware version of the PPG550.
Send:
Reply:@254FV?\@ACK1.00;

4.2.1.18 VAC – Pirani Zero
Adjustment
Pirani zero adjustment at apressure below 1.00E-6
mbar

Evacuate the transducer to a vacuum pressure below 1.00E-6 mbar.
Send:
Reply:@254VAC!\@254ACK<value>\

The reply <value> is the calculated offset pressure value as function of the factory
default zero offset subtracted from the user offset adjustment.
If the recommended zero adjustment vacuum pressure cannot be
achieved due to inadequate vacuum pumping capacity, the zero-point
adjustment can be performed at a higher pressure by entering the actualpressure value measured by a reference transducer. Following command example will perform a zero adjustment at 5.00E-5 mbar:

Pirani zero adjustment at
known reference pressure

Following command example will perform a zero adjustment at e.g. 5.00E-5 mbar:
Send:
Reply:@254VAC!5.00E-5\@254ACK<value>\

4.2.1.19 FS – Full Scale
Adjustment
Piezo sensor full-scale
adjustment

Obtain the actual atmospheric pressure (e.g. 1013.1 mbar) from a reference gauge
Send:
Reply:@254FS!PZ,1013.1\@254ACK<value>\

The acknowledge value represents the scaling factor for the new piezo full-scalecalibration. The full-scale adjustment can be executed in the pressure range
400 … 1100 mbar (300 … 825 Torr).

Pirani sensor full-scale
adjustment

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Obtain the actual pressure (e.g. 11.2 mbar) from a reference gauge:
Send:
Reply:@254FS!MP,11.2\@254ACK<value>\23

Pirani sensor full-scale
adjustment by Piezo sensor

The Pirani sensor can also be full-scale adjusted by use of the internal Piezo
sensor as reference.
Expose the sensor flange to a Nitrogen pressure between 1 and 20 mbar.
Send:
Reply:

4.2.1.20 FD – Factory Default

This command will reset all user settings to factory default, including setpoint settings, pressure unit and user-adjustment of zero point and full-scale. If the PPG550
is delivered with a special user configuration, the factory default command will reset to the original user configuration as delivered.
Send:
Reply:

Factory default settings

Individual reset to factory
default

24@254FS!MP\@254ACK<value>\@254FD!\@ACKFD\

Parameter

Value

Vacuum zero adjustment

0

Full scale adjustment

1

Unit

As delivered

Baud rate

9600

Address

253

Analog output configuration

As delivered

Setpoint direction

Above or as delivered

Setpoint enable

OFF or as delivered

Setpoint hysteresis

As delivered

Setpoint value

As delivered

Setpoint source

Pressure

It is possible to reset only certain settings to their factory default values. This isdone by adding an optional argument to the FD command:

Analog output
configuration

Send:
Reply:@254FD!AOC\@ACKFD\

Gas type

Send:
Reply:@254FD!GT\@ACKFD\

Device address

Send:
Reply:@254FD!ADR\@ACKFD\

Baud rate

Send:
Reply:@254FD!BAUD\@ACKFD\

Setpoints

Send:
Reply:@254FD!SP\@ACKFD\

Unit

Send:
Reply:@254FD!U\@ACKFD\

Pirani zeroadjustment

Send:
Reply:@254FD!VAC\@ACKFD\
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4.3 RS232 / RS485 MKS
Compatibility

The PPG550 offers pin, analog output and digital communication protocolcompatibility with the 901P, 925 and 910 vacuum transducers from MKS
Instruments.
When using the 900 series communication protocol, the communication is basedon an ASCII protocol that includes a start character, device address, command or
query and an end character for termination:@<device address><command or query><? or !><parameter(s)>;FF
Start character:
Device Address:
Command:Query or set:Parameter(s):End character:

Example of sending acommandtinb85e1(2022-07)

PPG550.om@
001-253
see List of Commands? or !
parameter(s);FF

Example of how to send a command to the transducer using the 900 series protocol. Programming a setpoint value of 1.23E-4 (using the default unit setting of thegauge, e.g. mbar):
Send:@254SP1!1.23E-4;FFReply:@ACK1.23E-4;FF

25

The PPG550 supports following
900 series commands

26

Command

Description

Query

Set

Valid input parameterAD

Communication address●●

3 digits (range 001-253)

AO1

Analog output configuration●●

STD, 0-39

BR

Set baud rate●●

4800, 9600, 19200, 38400, 57600, 115200(default 9600)

FD

Factory default●●

ADR,AOC,FS,U,SP,VAC,<NONE>

FS

Full-scale adjustment

●

●

FV

Firmware version●

GT

Gas type●

MF

Manufacturer

●

-

MD

Model name

●

-

PR1

Pressure measurement (Pirani)

●

-

PR2

Pressure measurement (Piezo)●

PR3

Pressure measurement (Combined)●

PN

Part number●

SP1

Setpoint 1 value●●<PRESSURE VALUE>

SD1

Setpoint 1 direction●●

ABOVE, BELOW

EN1

Setpoint 1 enable●●

OFF, ON

SH1

Setpoint 1 hysteresis●●<PRESSURE VALUE>

SP2

Setpoint 2 value●●<PRESSURE VALUE>

SD2

Setpoint 2 direction●●

ABOVE, BELOW

EN2

Setpoint 2 enable●●

OFF, ON

SH2

Setpoint 2 hysteresis●●<PRESSURE VALUE>

SP3

Setpoint 3 value●●<PRESSURE VALUE>

SD3

Setpoint 3 direction●●

ABOVE, BELOW

EN3

Setpoint 3 enable●●

OFF, ON

SH3

Setpoint 3 hysteresis●●<PRESSURE VALUE>

SN

Serial number●

T

Sensor temperature●U

Pressure unit●●

MBAR, PASCAL, TORR

VAC

Pirani Zero adjustment●●

No input or <PRESSURE VALUE>●

Nitrogen, Helium, Argon, Air--

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5 Deinstallation
DANGER
Contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures toensure cleanliness and prevent damages.

CautionDirt sensitive area
Touching the product or parts thereof with bare hands increases thedesorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.

Procedure

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 Vent the vacuum system.
 Put the gauge out of operation.
 Disconnect the sensor cable.
 Remove the gauge from the vacuum system and install the protective lid.

27

6 Maintenance, Repair
Gauge failures due to contamination are not covered by the warranty.
INFICON assumes no liability and the warranty becomes null and void if any repair
work is carried out by the end-user or third parties.

6.1 Zero Adjustment Pirani
Sensor

The gauge is factory calibrated. Due to long time operation or contamination, azero drift could occur. Periodically check the zero and adjust it if necessary. In
addition, we recommend performing a zero calibration after each reinstallation.
The zero can be adjusted via• the button on the gauge,• the RS232 / RS485 interface (→  23).
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation as normally.
The gauge is adjusted to default values. However, it can also be adjusted to otherpressure values, if the exact pressure value is known (reference measurement).

 If you are using a seal with centering ring and filter, check that they areclean or replace them if necessary.

 Evacuate the vacuum system to <1×10 mbar and wait at least 2 minutes.
-6

If the recommended pressure cannot be achieved the Pirani zero should be
adjusted at a known reference pressure via the RS232 / 485 interface(→  23).

 Press the button with a pin (max. ø1.5 mm) for 2 seconds and the zeroadjustment is carried out.

Press button for 2 seconds

The LED blinks green if the zero was successful or red if the zero has
failed. In the latter case repeat steps 1-3.

6.2 Zero Adjustment Piezo
Sensor

The Piezo sensor is automatically zero-adjusted, whenever the pressure measured
by the Pirani is lower than 1×10-2 mbar.

6.3 Full Scale Adjustment
Piezo Sensor

The full scale can be adjusted via the RS232 / 485 interface (→  23).
The command "FS!PZ" allows to adjust the full scale at a known reference
pressure within the pressure range 400 … 1100 mbar.

28

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6.4 Full Scale Adjustment
Pirani Sensor

7

The full scale can be adjusted via the RS232 / 485 interface (→  23).
The command "FS!MP" allows to adjust the full scale• at a known reference pressure• by use of the internal Piezo sensor as reference

Returning the Product
WARNING
Forwarding contaminated productsContaminated products (e.g. radioactive, toxic, caustic or biologicalhazard) can be detrimental to health and environment.
Products returned to INFICON should preferably be free of harmful
substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination (form under "www.inficon.com").
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of contamination are
returned to the sender at his own expense.

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29

8Disposal
DANGER
Contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.

WARNING
Substances detrimental to the environment
Products or parts thereof (mechanical and electric components,
operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the relevant local
regulations.

Separating the components

30

After disassembling the product, separate its components according to the following criteria:

Contaminated components

Contaminated components (radioactive, toxic, caustic or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,separated according to their materials, and disposed of.

Other components

Such components must be separated according to their materials and recycled.

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EU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned below complies withthe provisions of the following directives:

Product•

2014/30/EU, OJ L 96/79, 29.3.2014•

2011/65/EU, OJ L 174/88, 1.7.2011(EMC Directive; Directive relating to electromagnetic compatibility)(RoHS Directive; Directive on the restriction of the use of certain hazardous substances in electricaland electronic equipment)

MEMS Pirani & Piezo Diaphragm Gauge
PPG550Standards

Harmonized and international/national standards and specifications:• EN 61326-1:2013; Group 1, Class B(EMC requirements for electrical equipment for measurement, control and laboratory use)

• EN 61326-2-3:2013(EMC: Test configuration, operational conditions and performance criteria for transducers withintegrated or remote signal conditioning )Manufacturer / Signatures

tinb85e1(2022-07)

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INFICON AG, Alte Landstraße 6, LI-9496 Balzers
12 July 2022

12 July 2022

Dr. Christian Riesch
Head of Development

Marco Kern
Product Manager

31

UKCA Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned below complies withthe provisions of the following regulations:••

S.I. 2016/1091(EMC Regulations; The Electromagnetic Compatibility Regulations 2016)

S.I. 2012/3032(RoHS Regulations; The Restriction of the Use of Certain Hazardous Substances in Electrical andElectronic Equipment Regulations 2012)

Product

MEMS Pirani & Piezo Diaphragm Gauge
PPG550Standards

Harmonized and international/national standards and specifications:• EN 61326-1:2013; Group 1, Class B(EMC requirements for electrical equipment for measurement, control and laboratory use)

• EN 61326-2-3:2013(EMC: Test configuration, operational conditions and performance criteria for transducers withintegrated or remote signal conditioning )Manufacturer / Signatures

32

INFICON AG, Alte Landstraße 6, LI-9496 Balzers
12 July 2022

12 July 2022

Dr. Christian Riesch
Head of Development

Marco Kern
Product Manager

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Notestinb85e1(2022-07)

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33Original: English

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com