1 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product nameＣｅＯ２（Ｂ，Ｄ）

Product codeEC03-2Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Not classified

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Classification not possible

Respiratory sensitization

Classification not possible

Skin sensitization

Classification not possible

Germ cell mutagenicity

Classification not possible

Carcinogenicity

Classification not possible

Reproductive toxicity

Classification not possible

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(single
exposure)

Category 2

Specific target organ toxicity(repeatedexposure)

Category 1

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Health Hazard

健康有害性Signal word

DangerDangerous goods hazard
information

May cause damage to organs Lungs.
Causes damage to organs through prolonged or repeated exposure Lungs.

Precautionary statements【Safety measures】

Do not breathe dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

2013/10/16
2024/3/15

3 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date【First-aid measures】

If exposed or concerned：Call poison center or doctor/physician.
Get medical advice/attention if you feel unwell.
Specific treatment.

【Storage】

Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-

Composition/information on ingredients

Substance/Mixture

MixtureChemical name

Cerium oxide

Aluminum oxide

Chemical formula

CeO2

Al2O3

Concentration or concentration
range

Rare earth oxide ： 97.0- 99.9%
Al2O3 ： 0.1-3.0%
Total = 100%

CAS No.

1306-38-3

1344-28-1

TSCA Inventry

Cerium oxide (CeO2)

Aluminum oxide (Al2O3)EINECS number

215-150-4

215-691-6

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

Firefighting measures

Suitable extinguishing media

This product itself is not flammable.

2013/10/16
2024/3/15

4 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Unsuitable extinguishing media

No data available

Specific hazards

No data available

Specific extinguishing methods

In the case of a fire in the periphery, the portable container is quickly moved to asafe place.

Special protective equipment for
firefighters

Wear suitable protective equipment (gloves, glasses and a mask) in fire-fighting.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
proceduresProtection equipment (specified as those in which the properties of the productare suitable) worn during operation so that airborne droplets, etc., do not adhere
to the skin and dusts and gases are not absorbed.

Environmental precautions

The leakage may not directly flow into rivers or sewage.

Methods and material forcontainment and cleaning up

The leaked material is scooped up, or swept up and gathered to be recovered ina paper bag or a drum.
After recovery, a small amount of the residue is absorbed in sediment, sawdust,
etc.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personal
protection” and wear protective equipment.

Safety handling precautions

Handling work must be practiced in a room where there is a local or total
ventilation facility.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,
including any incompatibilities

SECTION 8

Safe storage conditions

Store in a well-ventilated place. Keep container tightly closed.
Store locked up.

Safety packaging material

No data available

Exposure controls/personal protection
CeO2

Al2O3

No data available

TWA 1 mg/㎥(R),STEL -Permissible concentration
ＡＣＧＩＨ
Appropriate engineering controls

Use sealed devices, equipment, or a local exhaust ventilation as much as
possible.

5 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Individual protection measures,such as personal protective
equipment

SECTION 9

Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

Solid

Form

Pellets, granules

ColourPale yellow

Odour

None

CeO2

Al2O3

Melting point/freezing point

2480℃

2072℃

Boiling point or initial boiling point
and boiling range

3730℃

2980℃

Flammability

No data available

No data available

Upper/lower flammability or
explosive limits

No data available

No data available

Flash point

No data available

Noncombustibility

Auto-ignition temperature

No data available

Noncombustibility

Decomposition temperature

No data available

No data available

pH

No data available

No data available

Kinematic viscosity

No data available

No data available

Water

Insoluble

Insoluble

Other solvents

And insoluble in solvents

The slightly soluble in non-polar organic
solvent

Partition coefficient: noctanol/water

No data available

No data available

Vapour pressure

No data available

0.073Pa (mp.)

Density and/or relative density

7.21

3.97

Solubility（Density）
Relative vapor density※ 4.1 ~ 4.95(pellet) as CeO2(B, D)
No data available

No data available6 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Particle characteristics

No data available

No data available

Other information

No data available

No data available

CeO2

Al2O3

Reactivity

No data available

No data available

Chemical stability

It is considered stable.

Stability

Possibility of hazardous reactions

Do not react in the storage conditions andnormal handling.
It will generate NOx gas in the reaction ofchlorine gas, and nitric acid reaction withhydrochloric acid.

Possibility of hazardous reaction is
negligible.

Conditions to avoid

High-temperature and humidity

Generation of dust, diffusion.

Incompatible materials

Carbon dioxide, acidNot applicable

SECTION 10

Stability and reactivity

Hazardous decomposition products Acid mist is generated upon dissolution of
the acid.

SECTION 11

Not applicable

Toxicological information
CeO2

Al2O3

Acute toxicity(oral)

Rat LD50 value:> 5000 mg / kg bw (IUCLID(2000))

SPECIES: Rat
ENDPOINT: LD50
VALUE: > 5000 mg/kg

Acute toxicity(dermal)

Based on the result that administration of
No data available
2000 mg/kg bw to rats caused no mortality,and LD50 value was > 2000 mg/kg bw(IUCLID (2000)), the substance wasclassified as "Not classified".

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Solid (GHS definition)

Acute toxicity （Inhalation:
Vapours）

No data available

No data available

Acute toxicity （Inhalation: Dusts
and mists）

Based on the rat LC50 value of 5.05 mg/L No data available(OECD TG 403) (IUCLID (2000)), thesubstance was classified as "Not classified"in the JIS classification (corresponding toCategory 5 in the UN-GHS classification).
According to the description that the test
particles which was less than 3 micrometerin particle diameter were account for 85.4%(IUCLID (2000)), the criterion values for
dust/mist were adopted.

7 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Skin corrosion/irritation

In the rabbit test (OECD TG404), application No data availableof 0.5 g of test substance caused noirritation (IUCLID (2000)). In another rabbit
test, the primary skin irritation index value
was 0.0 and it was concluded that thesubstance was not irritating (IUCLID (2000)).
Based on the information, the substancewas classified as "Not classified".

Serious eye damage/irritation

In the rabbit test (OECD TG405), instillation No data availableof 0.1 g of test substance to eye resulted in
non-irritating (IUCLID (2000)). In anotherrabbit test, slightly irritating was reported(IUCLID (2000)). Based on the information,
the substance was classified as "Notclassified".

Respiratory or skin sensitization

In the maximization test using guinea pigs
No data available(OECD TG406), no reaction of sensitization
was observed after elicitation, andconcluded as a non-sensitizer (IUCLID(2000)). However, since it was the "List 2"
information source designated in the GHS
classification guidance for the Japanese
government, the substance was classified as"Classification not possible".

Germ cell mutagenicity

The substance was classified as"Classification not possible" due to thenegative results in the micronucleus test
(OECD TG474) using bone marrow cells ofmice orally administered (in vivo
mutagenicity test in somatic cells) (IUCLID(2000)). As relevant information, as for invitro study, negative results in the Ames
test were reported (Initial Environmental
Risk Assessment of Chemicals (Ministry of
the Environment), vol. 8 (2010)).

Carcinogenicity

No data were available. As relevant
Not classified because of "A
information, the US EPA reports that thedata of this substance are insufficient toevaluate the possibility of carcinogenicity inhumans under the carcinogenicity risk
assessment guidelines (IRIS (2009) Tox
Review).

Reproductive toxicity

No data available

2013/10/16
2024/3/15

The in vivo mutagenicity test has not been
carried out, and in the in vitro mutagenicity
test, we could only find the Ames test
(negative). Therefore we presupposed that
we could not classify it for the lack of data.

No data available

Specific target organ toxicity(single In the acute inhalation study in rats exposed It was set as category 3 (respiratory
exposure)
to dust for 4 hours at the range of
irritation) from the statement of upper
concentrations from 4.12 to 5.98 mg/L
respiratory irritation (ICSC (2000)).
(OECD TG 433, GLP-compliant), labored
respiration and ruffled fur were noted in twoof ten animals, and the lungs of all animals
were incompletely collapsed with diffuse
whitish foci (IUCLID (2000)). Based on thesefindings observed in the concentration
corresponding nearly to the upper limit
within Category 2 of the guidance values,
the substance was classified as Category 2(lung). In addition, in the acute oral toxicity
study in rats administered up to 5000 mg/kg
bw, no mortality was recorded, body weightgain was normal, and no abnormalities wereobserved at necropsy (IUCLID (2000)).

8 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

Specific target organ
toxicity(repeated exposure)

Date of Issue
Revised Date

2013/10/16
2024/3/15

In the lungs of the workers exposed for
It was classified into Category 1 according
many years to the fumes of rare-earth
the statement that by occupational exposure
elements such as cerium, accumulation ofof aluminas, pulmonary fibrosis was occurred
rare-earth elements was observed, and lung (EHC (1997)).
lesions such as granuloma, emphysema, orinterstitial fibrosis and decrease of
pulmonary breathing capacity were reported(Initial Environment Risk Assessment ofChemicals (Ministry of Environment), vol. 8(2010)). Many reports were publisheddescribing long-term residue of rare earth
elements in lung and numerous cases ofworkers who developed adverse lung effects
associated with cerium oxide as follows. In
the case of the 58-year-old worker whocame to hospital complaining of dyspnea atleast 15 years after exposures to cerium
oxide polishing agents, slight pleural
thickening, and pulmonary obstruction werenoted. He was diagnosed byhistopathological examination as chronic
pachypleuritis (Initial Environment Risk
Assessment of Chemicals (Ministry ofEnvironment), vol. 8 (2010)). In the case of
68-year-old man who was engaged in theabrasive operation of the optical lens for 35
years, rare earth pneumoconiosis associatedwith cerium oxide exposure was identified
after 13 years of separation of work
(PATTY, 5th (2001)). On the other hand, inthe 13-week repeated inhalation study inrats exposed to dust, enlargement anddiscoloration of diaphragm in approximately
half of the animals, changes of bronchial
lymph nodes in all animals were found at 5
mg/㎥ or higher, and discoloration of thelungs in all animals at 51 mg/㎥ or higher at
necropsy. Histopathologically, lymphoid
hyperplasia and pigmentation in the
bronchial lymph nodes, and pigmentation in
the lung were noted at 5 mg/㎥ or higher inboth sexes, and alveolar epithelial
hyperplasia in the lungs and metaplasia andpigmentation in the larynx were noted at 51
mg/㎥ or higher in both sexes (Initial
Environment Risk Assessment of Chemicals(Ministry of Environment), vol. 8 (2010)).
These effects were observed at doses
within Category 1 of the guidance values.
Based on the findings for both humans andexperimental animals, the substance wasclassified as Category 1 (lung).

9 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

Aspiration hazard

No data available

Other information

No data available

SECTION 12

Date of Issue
Revised Date

2013/10/16
2024/3/15

No data available

Ecological information
CeO2

Al2O3

Hazardous to the aquatic
environment Shortterm(acute)No data available

No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data available

Persistence and degradablility

No data available

No data available

Bioaccumulative potential

No data available

No data available

Mobility in soil

No data available

No data available

Hazard to the ozone layerThis substance is not listed in Annexes tothe Montreal Protocol.

No data available

Other adverse effects

No data available

No data available

Toxicity

SECTION 13

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
CeO2

Al2O3

UN number

Not applicableNot applicable

UN proper shipping nameNot applicableNot applicable

UN classification

Not applicableNot applicable

Transport hazard class

Not applicableNot applicable

Packing group

Not applicableNot applicable

Hazardous to the aquatic
environment

No data available

No data available

Maritime transport in bulk
according to IMO instruments

No data available

No data available

International regulation

10 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Japanese lows and regulations

No data available

Special precautions for users

Requires retention of yellow card when
When transporting, protect from directtransporting.
sunlight and take on cargo without breakage
When transporting, protect from directof container, corrosion and leakage.
sunlight and take on cargo without breakageof container, corrosion and leakage.
Do not transport with food and feedstuffs.
Do not stack heavy good thereupon.

Special Provisions-

SECTION 15

Land regulation information Not applicable
Maritime regulatory information nonhazardous materials
Aviation regulatory information nonhazardous materials-

Regulatoly information（Japan）
CeO2

Al2O3

Occupational Safety and Health
Law

No data available

Not applicable

PRTR Law

There is it in the case of an application oran application

Not applicable

Poisonous and Deleterious
Substances control Law

No data available

Not applicable

Labor Standards Act

No data available

Not applicableChemical substances control Law

No data available

Not applicable

Fire fighting Law

No data available

Not applicable

Air Pollution Control Act

No data available

Not applicable

Water Pollution Prevention Act

No data available

There is it in the case of an application oran application

Water Supply Act

No data available

There is it in the case of an application oran application

Sewerage Act

No data available

Not applicable

Marine Pollution Prevention Law

No data available

Not applicable

Waste Management and Public
Cleansing Act

No data available

Not applicable

Note

Ensure this material in compliance with federal requirements and ensure
conformity to local regulations.

11 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

EC03-2
ＣｅＯ２（Ｂ，Ｄ）

SAFETY DATA SHEET
rev. 8.0

SECTION 16

Date of Issue
Revised Date

2013/10/16
2024/3/15

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)