1 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/5/17
2024/3/15

Chemicals and company identification

Product name

ＳＵＲＦＣＬＥＡＲ １００

Product code

ES22

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Classification not possible

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Classification not possible

Respiratory sensitization

Classification not possible

Skin sensitization

Category 1A

Germ cell mutagenicity

Classification not possible

Carcinogenicity

Classification not possible

Reproductive toxicity

Classification not possible

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(single
exposure)

Category 1

Specific target organ toxicity(repeatedexposure)Classification not possible

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Exclamation

Health Hazard

感嘆符

健康有害性

Signal word

DangerDangerous goods hazard
information

May cause an allergic skin reaction.
May cause respiratory irritation.
Causes damage to organs Digestive organs.

Precautionary statements

2013/5/17
2024/3/15

3 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date

【Safety measures】

Do not breathe dust/fume/gas/mist/vapours/spray.
Avoid breathing dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Use only outdoors or in a well-ventilated area.
Contaminated work clothing should not be allowed out of the workplace.
Wear Protective glovess/protective clothing/eye protection/face protection.

【First-aid measures】

IF ON SKIN：Wash with plenty of soap and water.
IF INHALED: Remove person to fresh air and keep comfortable for breathing.
If exposed or concerned：Call a poison center or doctor/physician.
Call poison center or doctor/physician if you feel unwell.
Specific treatment.
If skin irritation or rash occurs：Get medical advice/attention.
Take off contaminated clothing and wash it before reuse.

【Storage】

Store in a well-ventilated place. Keep container tightly closed.
Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-

2013/5/17
2024/3/15

Composition/information on ingredients

Substance/Mixture

MixtureChemical name

CopperIron

Fluoropolyether compound

Chemical formula

Cu

Fe

Fluoropolyether compound

Concentration or concentration
range

Cu ： 77.1-79.9%
Fe ： 19.3-20.0%
Fluoropolyether compound ： 0.1-3.6%
Total = 100%

CAS No.

7440-50-8

7439-89-6

Confidential-6

TSCA Inventry

Copper

Iron

Listed on the TSCA
Inventory or otherwise
exempted under TSCA
section 5

EINECS number

231-159-6

231-096-4

No data available

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

4 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

2013/5/17
2024/3/15

Firefighting measures

Suitable extinguishing media

This product itself is not flammable.

Unsuitable extinguishing media

No data available

Specific hazards

No data available

Specific extinguishing methods

In the case of a fire in the periphery, the portable container is quickly moved to asafe place.

Special protective equipment for
firefighters

Wear suitable protective equipment (gloves, glasses and a mask) in fire-fighting.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
proceduresProtection equipment (specified as those in which the properties of the productare suitable) worn during operation so that airborne droplets, etc., do not adhere
to the skin and dusts and gases are not absorbed.

Environmental precautions

The leakage may not directly flow into rivers or sewage.

Methods and material forcontainment and cleaning up

The leaked material is scooped up, or swept up and gathered to be recovered ina paper bag or a drum.
After recovery, a small amount of the residue is absorbed in sediment, sawdust,
etc.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personal
protection” and wear protective equipment.

5 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Safety handling precautions

Handling work must be practiced in a room where there is a local or total
ventilation facility.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

2013/5/17
2024/3/15

Conditions for safe storage,
including any incompatibilities

SECTION 8

Safe storage conditions

Store in a well-ventilated place. Keep container tightly closed.
Store locked up.

Safety packaging material

No data available

Exposure controls/personal protection
Cu

Fe

Fluoropolyether
compoundPermissible concentration
ＡＣＧＩＨ

Appropriate engineering controls

TWA 0.2 mg/㎥ (Hume),
No data available
TWA 1 mg/㎥ (dust, mist)(2013 Edition)

TWA 200ppm (methanol
decomposition products:)
STEL 250ppm (methanol
decomposition products:)(2012 edition)

Use sealed devices, equipment, or a local exhaust ventilation as much as
possible.

Individual protection measures,such as personal protective
equipment

SECTION 9

Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

Solid

Form

Cup, fibrous

ColourRed copper color and dark gray

Odour

None

Cu

Fe

Fluoropolyether
compound6 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/5/17
2024/3/15

Melting point/freezing point

1083℃

1535℃

Not applicable

Boiling point or initial boiling point
and boiling range

2595℃

2730℃

Not applicable

Flammability

No data available

No data available

No data available

Upper/lower flammability or
explosive limits

No data available

No data available

No data available

Flash point

No data available

No data available

Not applicableAuto-ignition temperature

No data available

No data available

No data available

Decomposition temperature

No data available

No data available

No data available

pH

No data available

No data available

No data available

Kinematic viscosity

No data available

No data available

No data available

Water

Insoluble

Insoluble

Insoluble

Other solvents

It gradually dissolve in an No data available
ammonium solution. :HSDB(2013)

No data available

Partition coefficient: noctanol/water

No data available

No data available

No data available

Vapour pressure

1 mm Hg at 1628℃：
HSDB(2013)

No data available

Fine (25 ℃)

Density and/or relative density

8.94g/c㎥：HSDB(2013)

7.86

1.78（25℃）

Relative vapor density

No data available

No data available

No data available

Particle characteristics

No data available

No data available

No data available

Other information

No data available

No data available

No data available

Cu

Fe

Fluoropolyether
compoundReactivity

Turns green upon
exposure to humid air.
Compounds sensitive toshock are formed byacetylene compounds,
ethylene oxides, andazidesNo data available

No hazardous reaction
known under normal
condition of use,storage
and transport.

Chemical stability

Turns green upon
exposure to humid air.
Compounds sensitive toshock are formed byacetylene compounds,
ethylene oxides, andazidesSlowly oxidizes in theatmosphere.

Stable under normal
conditions

Solubility（Density）

SECTION 10

Stability and reactivity

7 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/5/17
2024/3/15

Possibility of hazardous reactions

Reacts with oxides
Produces rust when in(chlorates, bromates, and presence of humidity.
iodates, etc.), so there is arisk of explosion

Hazardous polymerization
will not occur

Conditions to avoid

Contact with humidity and High temperature,
hazardous reactive
humidity, and flame
materials.

No data available

Incompatible materials

Acetylene compounds,
ethylene oxides, azides,
and oxidants (chlorate,
bromate, iodate, etc)

Strong acids and ammonia Strong oxidizing agents,
water, acid, alkali

Hazardous decomposition products Carbon monoxide, carbon No data available
dioxide, and copper fumes
produced by combustion.

SECTION 11

This article is to generate(hydrolysis), methanol in
response to mild acid andwater, and the alkaline
compound.
There is a possibility that
harmful decomposition
gases containing hydrogen
fluoride by combustion,
carbonyl fluoride, carbon
monoxide, and lowmolecular fluorocarbons,generates carbon dioxide,or heat.

Toxicological information
Cu

Fe

Fluoropolyether
compoundAcute toxicity(oral)

No data available

Oral administration in rat:
LD50： 30 g/kg,
Intraperitoneal
administration in rat:
LDLo: 20 mg/kg
Oral administration inguinea pig: LD50: 20
mg/kg

LD50: 14.1g/kg (rabbit)(methanol decomposition
products:)
LD50: 7300mg/kg (rat)(methanol decomposition
products:)
LD50: 5628mg/kg (rat)(methanol decomposition
products:)

Acute toxicity(dermal)

No data available

No data available

LD50: 15800mg/kg (rabbit)(methanol decomposition
products:)

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

No data available

LC50: 87.5mg / l (rat)(methanol decomposition
products:)

Acute toxicity （Inhalation:
Vapours）

Solid (GHS definition)

No data available

No data available8 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/5/17
2024/3/15

Acute toxicity （Inhalation: Dusts
and mists）

No data available

No data available

No data available

Skin corrosion/irritation

Classification not possible No data available
due to lack of data.
Besides, it is described in
PATTY (6th, 2012) that
contact dermatitis
associated with copper
has been reported, but
few cases of dermatitis
caused by copper metal orits compounds occur inthe industry.

No data available

Serious eye damage/irritation

No data available

Strong eye irritation(methanol decomposition
products:)

Respiratory or skin sensitization

It was classified in
No data available
Category 1A because theJapan Society for
Occupational Health(JSOH) classified copperand its compounds as
occupational skinsensitizers Group 2(Recommendation of
Occupational Exposure
Limits (Japan Society For
Occupational Health(JSOH), 2012)), and it
applies to this substance(OEL Documentations(Sensitization
classification) (Japan
Society For Occupational
Health (JSOH, May 26,2010))).

No data available

Germ cell mutagenicity

No data available

No data available

No data available

Carcinogenicity

It was classified as
No data available"Classification notpossible" because theU.S. EPA classified it in I
(IRIS (2005)). The
category was revised
according to the revised
GHS classification
guidance for the Japanese
government.

No data available

Reproductive toxicity

No data available

Fear fertility or the unborn
child (methanol
decomposition products:)

No data available

No data available9 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Specific target organ toxicity(single From the knowledge in
No data available
exposure)humans in EHC (1998),
ACGIH (7th, 2001), and
ATSDR (2004), respiratory
symptoms (respiratory
tract irritation) are themain acute toxic signs in
the inhalation route. As
for oral exposure, it isdescribed that digestive
symptoms (nausea,
vomiting, abdominal pain,etc.) were observed after
the ingestion of drinkingwater and others
containing high copper
concentrations, and there
are numerous reports thatnausea and vomiting
mainly occurred. Other
than these, it is reported
in EHC that inhalation
exposure caused
hepatomegaly, but the airlevels were very high, and
it is described in ATSDR
that liver lesions fromacute copper poisoning
are rare except for
specific diseases (Wilson's
disease, etc.). Therefore,
the liver was not includedin the target organs, and it
was classified in Category
1 (digestive system),Category 3 (respiratory
tract irritation).

Date of Issue
Revised Date

2013/5/17
2024/3/15

Which may affect thefollowing organs
Central nervous system,
systemic toxicity, organ ofvision, respiratory tract
irritation, anesthetic
action (methanol
decomposition products:)

10 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/5/17
2024/3/15

Specific target organ
toxicity(repeated exposure)

It is reported in EHC
No data available(1998), DFGOT vol. 22(2006) that repeated oral
exposure to copper inhumans caused digestive
symptoms (nausea,
vomiting, abdominal pain,etc.) and liver disorder(hepatic failure, cirrhosis).
Because digestive
symptoms are nausea,
vomiting, abdominal pain,etc., they cannot be
regarded as specifictarget organ toxicity.
Furthermore, hepatic
failure is reported in only
one case, therefore it was
judged impossible togeneralize it. From theabove, it was classified as"Classification notpossible."

May have an impact on
the following organs
through prolonged orrepeated exposure overtime.
NakagamIt nervous
system, organ of vision(methanol decomposition
products:)

Aspiration hazard

No data available

No data available

No data available

Other information

No data available

Cu

Fe

Fluoropolyether
compoundHazardous to the aquatic
environment Shortterm(acute)No data available

No data available

No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data available

No data available

Persistence and degradablility

No data available

No data available

No data available

Bioaccumulative potential

No data available

No data available

No data available

Mobility in soil

No data available

No data available

No data available

Hazard to the ozone layerThis substance is notlisted in Annexes to theMontreal Protocol.

No data available

No data available

Other adverse effects

No data available

No data available

No data available

SECTION 12

Ecological information

Toxicity

SECTION 13

Disposal considerations

11 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/5/17
2024/3/15

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
Cu

Fe

Fluoropolyether
compoundUN number

Not applicableNot applicableNot applicable

UN proper shipping nameNot applicableNot applicableNot applicable

UN classification

Not applicableNot applicableNot applicable

Transport hazard class

Not applicableNot applicableNot applicable

Packing group

Not applicableNot applicableNot applicable

Hazardous to the aquatic
environment

No data available

No data available

No data available

Maritime transport in bulk
according to IMO instruments

No data available

No data available

No data available

Japanese lows and regulations

Refer to “15. Regulatory
information.”

Refer to “15. Regulatory
information.”

No data available

Special precautions for users

When transporting, protect No data available
from direct sunlight andtake on cargo without
breakage of container,
corrosion and leakage.
Do not transport with foodand feedstuffs.
Do not stack heavy good
thereupon.

No data available

Special Provisions

-

-

-

Cu

Fe

Fluoropolyether
compoundOccupational Safety and Health
Law

There is it in the case of
an application or an
application

There is it in the case of
an application or an
application

No data available

PRTR Law

Not applicableNot applicable

No data available

Poisonous and Deleterious
Substances control Law

Not applicableNot applicableNot applicable

Labor Standards Act

There is it in the case of
an application or an
application

There is it in the case of
an application or an
application

No data available

International regulation

SECTION 15

Regulatoly information（Japan）

12 / 12 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES22
ＳＵＲＦＣＬＥＡＲ １００

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Chemical substances control Law

Not applicableNot applicableNot applicable

Fire fighting Law

Not applicable

There is it in the case of
an application or an
application

Not applicable

Air Pollution Control Act

There is it in the case of
an application or an
application

Not applicable

No data available

Water Pollution Prevention Act

There is it in the case of
an application or an
application

There is it in the case of
an application or an
application

No data available

Water Supply Act

There is it in the case of
an application or an
application

There is it in the case of
an application or an
application

No data available

Sewerage Act

There is it in the case of
an application or an
application

Not applicable

No data available

Marine Pollution Prevention Law

Not applicableNot applicableNot applicable

Waste Management and Public
Cleansing Act
Note

Not applicableNot applicable

No data available

SECTION 16

2013/5/17
2024/3/15

Ensure this material in compliance with federal requirements and ensure
conformity to local regulations.

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)