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CANON OPTRON INC.
SDS Number：
Product Name：ET13
ＬＵＭＩＬＥＡＤ ＴＮＯ

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product name

ＬＵＭＩＬＥＡＤ ＴＮＯ

Product code

ET13

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）

No data available

Label element
hazard Pictograms

No data available

Signal word

No data available

Dangerous goods hazard
information
Precautionary statement

No data available【Safety measures】

Obtain special instructions before use.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Do not breathe dust/fume/gas/mist/vapours/spray.

【First-aid measures】

If swallowed：
Call a poison center or doctor/physician if you feel unwell.
Rinse mouth.
If in eyes：
Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
Immediately call poison center or doctor/physician

SECTION 3【Storage】

Store in a well-ventilated place, keep container tightly closed.
Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-Composition/information on ingredients2 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：ET13
ＬＵＭＩＬＥＡＤ ＴＮＯ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Substance/Mixture

MixtureChemical nameTitanium oxide

Niobium oxide

Chemical formula

Ti3O5

Nb2O5

Concentration or concentration
range

Ti3O5 ： 74- 97%
Nb2O5 ： 3- 26%
Total = 100%

CAS No.

12065-65-5

1313-96-8

TSCA Inventry

No data available

Niobium oxide (Nb2O5)

EINECS number

No data available

215-13-6

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aidersRescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

2013/10/16
2024/3/15

Firefighting measures

Suitable extinguishing media

This product itself is not flammable.

Unsuitable extinguishing media

No data available

Specific hazards

No data available

Specific extinguishing methods

In the case of a fire in the periphery, the portable container is quickly moved to asafe place.

Special protective equipment for
firefighters

Wear suitable protective equipment (gloves, glasses and a mask) in fire-fighting.

3 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：ET13
ＬＵＭＩＬＥＡＤ ＴＮＯ

SAFETY DATA SHEET
rev. 8.0

SECTION 6

Date of Issue
Revised Date

2013/10/16
2024/3/15

Accidental release measures

Personal precautions, protective
equipment, and emergency
proceduresProtection equipment (specified as those in which the properties of the productare suitable) worn during operation so that airborne droplets, etc., do not adhere
to the skin and dusts and gases are not absorbed.

Environmental precautions

The leakage may not directly flow into rivers or sewage.

Methods and material forcontainment and cleaning up

The leaked material is scooped up, or swept up and gathered to be recovered ina paper bag or a drum.
After recovery, a small amount of the residue is absorbed in sediment, sawdust,etc.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personalprotection” and wear protective equipment.

Safety handling precautions

Handling work must be practiced in a room where there is a local or total
ventilation facility.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,including any incompatibilities
Safe storage conditions

Safety packaging material

SECTION 8

Store in a well-ventilated place. Keep container tightly closed.
Save strict prohibition of high temperature and high humidity. Do not store
together with oxidants and strong acids.
No data available

Exposure controls/personal protection
Ti3O5

Nb2O5

No data available

No data availablePermissible concentration
ＡＣＧＩＨ
Appropriate engineering controls

Use sealed devices, equipment, or a local exhaust ventilation as much aspossible.

Individual protection measures,such as personal protectiveequipment
Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

4 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：ET13
ＬＵＭＩＬＥＡＤ ＴＮＯ

SAFETY DATA SHEET
rev. 8.0

Skin protection

SECTION 9Date of Issue
Revised Date

Protective clothing

Physical and chemical properties

Appearance
Physical stateSolidFormGranularColourBlackOdour

None

Ti3O5

Nb2O5

Melting point/freezing point

About 1800 ℃

1520℃

Boiling point or initial boiling point
and boiling range

No data available

No data available

Flammability

No data available

No data available

Upper/lower flammability orexplosive limits

No data available

No data available

Flash point

No data available

No data available

Auto-ignition temperature

No data available

No data available

Decomposition temperature

No data available

No data available

pHNo data available

No data available

Kinematic viscosity

No data available

No data available

WaterInsoluble

Insoluble

Other solvents

No data available

No data available

Partition coefficient: noctanol/water

No data available

No data available

Vapour pressure

No data available

No data available

Density and/or relative density

About 4.0

4.6

Relative vapor density

No data available

No data available

Particle characteristics

No data available

No data available

Other information

No data available

No data available

Ti3O5

Nb2O5

No data available

No data available

Solubility（Density）

SECTION 10Stability and reactivity

Reactivity

2013/10/16
2024/3/15

5 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：ET13
ＬＵＭＩＬＥＡＤ ＴＮＯ

SAFETY DATA SHEETrev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Chemical stability

It is stable in storage conditions and normal It is stable in storage conditions and normal
handling.
handling.
It is TiO2 by reacting with oxygen andheated to 300 ℃ than in air.

Possibility of hazardous reactions

Do not react in the storage conditions andnormal handling.

It is soluble in water when dissolved withalkali hydroxide or alkali carbonate, buthydrolyzes to produce niobic acidprecipitation.

Conditions to avoid

No data available

No data available

Incompatible materials

No data available

No data available

Hazardous decomposition products No data available

No data available

SECTION 11Toxicological information
Ti3O5

Nb2O5

Acute toxicity(oral)

No data available

Oral - Rat LD:> 10g/kg
Intraperitoneal - rat LD:> 10g/kg,
Oral - Mouse LD50:> 4g/kg
Intraperitoneal - mouse LD:> 10g/kg

Acute toxicity(dermal)

No data available

No data available

Acute toxicity （Inhalation: Gases）

No data available

If inhaled, to stimulate the respiratory
system and mucous membranes.

Acute toxicity （Inhalation:Vapours）

No data available

No data available

Acute toxicity （Inhalation: Dustsand mists）

No data available

No data available

Skin corrosion/irritation

No data available

No data available

Serious eye damage/irritation

No data available

No data available

Respiratory or skin sensitization

No data available

No data available

Germ cell mutagenicity

No data available

No data available

Carcinogenicity

No data available

No data available

Reproductive toxicity

No data available

No data available

Specific target organ toxicity(single No data availableexposure)

No data available

Specific target organtoxicity(repeated exposure)

No data available

No data available

Aspiration hazard

No data available

No data available

Other information

No data available

SECTION 12

Ecological information
Ti3O5

Nb2O5

6 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：ET13
ＬＵＭＩＬＥＡＤ ＴＮＯ

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Toxicity
Hazardous to the aquatic
environment Shortterm(acute)No data available

No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data available

Persistence and degradablility

No data available

No data available

Bioaccumulative potential

No data available

No data available

Mobility in soil

No data available

No data available

Hazard to the ozone layer

No data available

No data available

Other adverse effects

No data available

No data available

SECTION 13

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
Ti3O5

Nb2O5

UN number

Not applicableNot applicable

UN proper shipping nameNot applicableNot applicable

UN classification

Not applicableNot applicable

Transport hazard class

Not applicableNot applicable

Packing group

Not applicableNot applicable

Hazardous to the aquatic
environment

No data available

No data available

Maritime transport in bulk
according to IMO instruments

No data available

No data available

Japanese lows and regulations

No data available

No data available

Special precautions for users

No data available

No data available

Special Provisions--International regulation

7 / 7 Page
CANON OPTRON INC.
SDS Number：
Product Name：ET13
ＬＵＭＩＬＥＡＤ ＴＮＯ

SAFETY DATA SHEET
rev. 8.0

SECTION 15

Date of Issue
Revised Date

Regulatoly information（Japan）
Ti3O5

Nb2O5

Occupational Safety and Health
Law

No data available

No data available

PRTR Law

No data available

No data available

Poisonous and Deleterious
Substances control Law

No data available

No data available

Labor Standards ActNo data available

No data available

Chemical substances control Law

No data available

No data available

Fire fighting Law

No data available

No data available

Air Pollution Control Act

No data available

No data available

Water Pollution Prevention Act

No data available

No data available

Water Supply Act

No data available

No data available

Sewerage Act

No data available

No data available

Marine Pollution Prevention Law

No data available

No data available

Waste Management and Public
Cleansing Act

No data available

No data available

NoteEnsure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16

2013/10/16
2024/3/15

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)