FPD Lithography Systems

FX-103SH/103S
Gen 10.5 Plate FPD Lithography Systems forHigh-definition Panel ProductionGen 10.5 Plate FPD Lithography Systems forHigh-definition Panel Production
FPD Lithography Systems FX-103SH/103S
By incorporating techniques from both the FX-67S2, which is ideal for the production of small-and-medium-sized high-definition
panels, and the FX-86SH2, which excels in the production of TV panels, the FX-103SH/103S is optimized for manufacturing largesized high-definition panels and achieves a shorter takt time than our conventional Gen 10 lithography system. The FX-103SH
achieves a high resolution of 2.2 μm.

Key Features• Multi-lens System
Both models feature the multi-lens system consisting of multiple
projection lenses. This design enables a wide exposure field andexcellent resolution.

a new auto-focus system that optimally corrects the measurement
errors of mask bending and plate flatness. This enables a highresolution of 2.2 μm (L/S) while also ensuring a wide depth offocus.

• Short Takt Time
Incorporating the renewed exposure sequence and calibration
sequence of the conventional model, the FX-103SH/103S realizesfaster and higher accuracy exposure.

• High Overlay Accuracy
The position measuring system of the conventional model isrenewed to improve measurement results, achieving a high overlay
accuracy of ±0.5 μm.

• High Resolution
In making the Gen 10.5 FPD lithography system, the FX-103SH
has fully enhanced illumination and multi-lens systems, both ofwhich use Nikon’s proprietary resolution enhancement technique,originally developed for the FX-86SH2. The FX-103SH incorporates• High Throughput
The FX-103SH/103S achieves a high throughput of 480 plates perhour for 65-inch panels, up 77 % compared with the conventionalmodel, and 322 plates per hour for 75-inch panels.

Performance

Resolution (L/S)

FX-103SH

FX-103S

2.2 μm (g+h+i-line)

3.0 μm (g+h+i-line)

Projection magnification

1:1

Overlay≦ ±0.5 μm

Plate size

2,940 mm × 3,370 mm

Takt time

60 s/plate
Conditions: 2,940 mm × 3,370 mm, 4 scans, g+h+i-line, 30 mJ/cm2

WARNINGTO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.

All of the products in this brochure are under export restriction. The export of these products is controlled by Japanese Foreign Exchange and Foreign Trade andInternational export control regime. They shall not be exported without authorization from the appropriate government authorities.
Performance and equipment are subject to change without any notice or obligation on the part of the manufacturer.
Products and brand names are trademarks or registered trademarks of their respective companies. July 2024
©2024 NIKON CORPORATION

https://www.nikon.com/business/fpd/

Nikon Corporation

Nikon Precision Taiwan Ltd.

Precision Equipment Group
Marketing Department

3F.-1, NO.28, Taiyuan Street, Zhubei City, Hsinchu County 302, Taiwan, R.O.C.
Tel: +886-3-552-5888

1-5-20, Nishioi, Shinagawa-ku, Tokyo 140-8601, Japan
Tel: +81-3-6743-5533

Nikon Precision (Shanghai) Co., Ltd.

Nikon Precision Korea Ltd.

11-12F, Tower 5, Crystal Plaza No. 36, Ping Jia Qiao Road, Pudong New District,Shanghai 200126, China
Tel: +86-21-5899-0266

2, Singal-ro 124beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, 16968 Korea
Tel: +82-31-288-5601