FPD Lithography SystemFX-6AS
Gen 6 Plate FPD Lithography System with
the Highest Level of Resolution

Gen 6 Plate FPD Lithography System with
the Highest Level of Resolution
FPD Lithography System FX-6AS
The FX-6AS produces leading edge small-and-medium-sized high-definition panels from Gen 6 plates. The newly-developed projection lensenables the highest level of resolution of 1.0 μm using a phase shift mask, improved productivity and high overlay accuracy.

Key Features• Multi-lens System
The FX-6AS features the multi-lens system consisting of multiple
projection lenses. This design enables a wide exposure field andexcellent resolution.
• High Resolution
Nikon has developed a new projection lens with a high NAthat has further advanced the evolution of the previous model.
The FX-6AS employs an i-line light source which has a track recordin high volume production, and an innovative focus correction
system that was developed for the FX-68SH/68S. These enable thehigh volume production of panels with a high resolution of 1.0 μm(L/S) using a phase shift mask, while ensuring high CD uniformity
over the entire surface of Gen 6 plates.

• High Overlay Accuracy
High overlay accuracy is realized by using a new projection lenswith reduced aberration in combination with highly accurate
measurement and position control performance of the previousmodel.
• High Throughput
The FX-6AS achieves a high resolution of 1.0 μm*1 with thesame exposure field as the previous model. It also provides a highthroughput of 85 plates per hour due to increased illuminanceresulting from optimization of the illumination system, while
enabling 4-scan on a Gen 6 plate.
• Stable Exposure Performance
The FX-6AS employs a variety of calibration functions from theprevious model, providing stable exposure performance during
operation.

Performance
1.0 μm*1 (i-line)

Resolution (L/S)
Projection magnification

1:1Overlay≦ ±0.23 µm

Plate size

1,500 mm × 1,850 mm

Takt time

42 s/plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, i-line, 30 mJ/cm2*1 When using a phase shift mask

WARNINGTO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.

All of the products in this brochure are under export restriction. The export of these products is controlled by Japanese Foreign Exchange and Foreign Trade andInternational export control regime. They shall not be exported without authorization from the appropriate government authorities.
Performance and equipment are subject to change without any notice or obligation on the part of themanufacturer.
Products and brand names are trademarks or registered trademarks of their respective companies. July 2024
©2024 NIKON CORPORATION

https://www.nikon.com/business/fpd/

Nikon Corporation

Nikon Precision Taiwan Ltd.

Precision Equipment Group
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Tel: +886-3-552-5888

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