June 10, 2024

Carbon-Free Abatement system for the Semiconductor Industry
Started Sales of Blisters Burner H2, a Hydrogen Combustion-Type Exhaust GasAbatement SystemTaiyo Nippon Sanso Corporation (Headquarters: Shinagawa-ku, Tokyo; President Kenji Nagata;hereinafter "TNSC"), a Japanese industrial gas business company in the Nippon Sanso HoldingsGroup, began selling an exhaust gas abatement system for the semiconductor industry this April
that uses hydrogen (H2) gas as a fuel and does not emit any fuel-derived greenhouse gases.
TNSC will continue to develop and market optimal exhaust gas abatement systems to meet theevolving needs of the times, including global efforts to achieve carbon neutrality.

Appearance of Blisters Burner H2

1. Development Background
Japan's Basic Energy Plan calls for electrification with decarbonized electricity, or the use ofdecarbonized energy sources, such as hydrogen, synthetic methane, and synthetic fuels, inprocesses that are challenging to electrify. Against this backdrop, it has been challenging toelectrify semiconductor manufacturing processes that use special material gases, such as SiH4, forfilm deposition because of the generation of powder during exhaust gas treatment.
We used our technology to solve this issue. Being a manufacturer of GaN-MOCVD equipment,
we have also launched a combustion-type exhaust gas abatement system, Hercules Burner, which
serves as the auxiliary equipment. This system uses only H2 gas as a fuel and decomposes NH3 gas
by efficiently burning H2 gas in the process exhaust. The technology underlying this system isutilized in Blisters Burner H2.
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2. Features and Structure of the System
We have marketed combustion-type exhaust gas abatement systems for the semiconductor industry
for some time, and now we announce the launch of Blisters Burner H2, a combustion-type exhaustgas abatement system using only H2 fuel, as a non-fossil fuel-based product.
The system consists of a burner section, a primary cooling section, and a secondary cooling section(scrubber section), as shown in Fig. 1. Gases discharged from semiconductor manufacturing
equipment are introduced into the burner section and heated for decomposition. Inside the burner,cooling air is supplied to prevent corrosion of components and adhesion of secondary productpowder, increasing the stability of the system for continuous operation.
The primary cooling section rapidly cools the high-temperature process gas, and the scrubber
section provides final gas cooling and cleans and removes water-soluble gases, such as HF andHCl, which are by-products of the process gas.
Fig. 1 Schematic diagram of hydrogen combustion-type exhaust gas abatement system

This system exploits the potential of H2 gas combustion by effectively contacting and mixing ahydrogen flame with the process gas, thereby achieving a burner structure that can treat exhaustgas other than H2-rich exhaust gas. An evaluation showed that energy savings of 30% to 50% havebeen achieved in the PFC* decomposition process compared to conventional combustion
processes using fossil fuels.
Another feature of this product is that it is designed to convert to H2 fuel specifications with only
minor modifications from the existing Blisters Burner, which uses conventional fossil fuels. Thisfeature anticipates future increase in the demand for H2 fuel.
2Blisters Burner H2 can be a useful option for achieving carbon neutrality in the coming hydrogensociety, as it is based on our rich sales experience and expertise gained from Hercules Burner, anexhaust gas abatement system that uses only H2 fuel.
*PFCs, or perfluorocarbons, are chemical compounds in which carbon and fluorine are bondedtogether.

【Company Overview】
Taiyo Nippon Sanso Corporation
Business description: Manufacture and sale of various industrial gases such as oxygen, nitrogen, argon, LP gas, gas for
medical uses, and specialty gases, manufacture and sale of welding equipment and materials, gas-related
devices, and, air separation equipment, assembly, processing, inspection of electrical components, andequipment maintenance
Established:
October 30, 1910
Incorporated:
February 4, 2020
Capital:
1.5 billion yen
Shareholder:
Nippon Sanso Holdings Corporation (Investment ratio: 100%)
Revenue:
414.3 billion yen*
*Note: This figure shows the revenue of Japan for Nippon Sanso Holdings Corporation in FYE2024

Taiyo Nippon Sanso Corporation
Tnsc.Info@tn-sanso.co.jp

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