mag.x system 125
High Resolution Wide Field
Micro-Inspection System

High Resolution Micro-Inspection System

Modular System
High resolution inspection is being used in many

Illumination

applications. Each application has its own require-For coaxial bright field illumination Koehler illumination

ments and constraints. In order to cater for all these

optics are included that can be interfaced to lightdiverse needs the mag.x system 125 is as modular assources via optical fibers or directly to LED sources.

possible. Integration of customized elements is easy

Darkfield illumination can be added easily with anand enables a system that integrates seamlessly intooptional adapter.

the surrounding equipment.

Accessories

02Base units

No system is complete without an array of accessories.

Heart of the system is always

The wide selection ranges from camera and fiber

the base unit which is available

adapters to mounting accessories and also includes

in different variations. All othermore advanced components for focusing andcomponents are attached to these

special contrasting methods. The optional Piezo Unit

base units. Mounting of the systemenables fine focusing with a range of 400µm. It canto the surrounding equipment is also

be combined with the AF base unit to build a true

provided by the base unit.

through-the-lens AF system. The new DIC module forthe 5x lens enables differential interference contrast

Objective lenses

microscopy over a large field-of-view.

The optical performance of the system is mainly
defined by the objective lenses. These are thecomponents that make the mag.x system 125 reallyunique. All of Qioptiq’s highest end technology is
being used in manufacturing and testing of theselenses.

Tube lenses

DIC module without piezo

System magnification and maximum sensor size
are the result of the combination of tube lens andobjective lens. The current selection of tube lenses

allows the use of sensors with a diagonal of up to57 mm. All tube lenses are also telecentric on image
side.

Detail of machined aluminum image with DIC module

Applications
Numerous applications benefit from the versatility

at once or with only few images with an area scanand the high optical performance of the mag.x systemcamera. The 1.73x tube lens is specifically designed

125. The large field-of-view increases throughput

for the popular 35mm format cameras that achieveof inspection installations as more object space isup to 50MPixel resolution. Typical applications here

imaged at once and the number of images that needareto be acquired to image an object in its entirety is• Semiconductor inspection• Biochip reading• Fluorescence microscopy• Digital pathology/histology• High precision non-contact measurement

reduced drastically – in the best case only one image
is necessary by maintaining sub-µ resolution.

machines• Cleanliness of optical components

Color CCD sensor with 5.5µm pixel size

Typical applications include the inspection of largeobjects like• Display panels• Printed circuit boards• Glass panels

Color TFT display

The optional DIC module expands the applications
even more to transparent objects and enables
visualization of changes in refractive index or
thickness in materials that would not be possible toinspect otherwise.

Bovine Pulmonary Artery fluorescence sample

These objects are usually inspected with line scancameras to achieve maximum resolution andthroughput. Smaller objects can often be imaged

Micro lens array in DIC mode03

High Resolution Micro-Inspection System

Camera adapters for tube 2.25x

G192-071-000

G192-074-000

4401-535-824-00

Camera adapters for tube 1.73x

G192-078-000

G192-079-000

4401-535-825-00

Camera adapters for tube 1x

G192-073-000

04

4401-535-134-00

Light source

Fiber guide

010-00340R 805-00039

G405-524-000

4401-535-136-00

Tube lenses

Fiber adapters

Illumination tube

G192-043-000

G192-032-000

G192-034-000

G192-080-905

G192-031-000

Direct adapter

Base units

G192-009-000

G192-080-000

G192-081-000

G192-082-000

Filters

G192-083-000

Objective lenses

4401-552-830-00

G192-080-082

G192-080-919

DIC modules

4401-574-823-00

G192-012-000

G192-045-000

G192-011-000

Darkfield illumination adapter

Piezo unit

G192-044-901

4401-535-822-01

4401-574-824-00

Order no.

Tube lenses

G192-031-000

Tube lens 1x

G192-034-000

Tube lens 1.73x

G192-071-000

M72 Dalsa 6.56 for G192-032-000

G192-032-000

Tube lens 2.25x

G192-077-000

M72 Dalsa 12mm forG192-032-000

Order no.

Base units

G192-074-000

M95 e2v for G192-032-000

G192-080-000

Compact base unit

4401-535-824-00

F-mount for G192-032-000

G192-082-000

Compact base unit w/ filter

4401-535-133-00

M58 SVS-Vistek for G192-032-000

G192-081-000

Base unit AF

4401-535-135-00

M58 ISVI IC-29 for G192-032-000

G192-083-000

Base unit AF w/filter

G192-075-011

G192-009-000

Direct adapter

Finger lakes PC 65 AC for
G192-032-000

G192-080-905

Illumination tube 5x to be used with
G192-08x-000

G192-078-000

M72 Dalsa 6.56 for G192-034-000

G192-079-000

M72 SVS-Vistek for G192-034-000

4401-535-825-00

F-mount for G192-034-000

G192-073-000

M42 SVS-Vistek for G192-031-000

4401-535-134-00

C-mount for G192-031-000

4401-535-136-00

F-mount for G192-031-000

Order no.

Objective lenses

G192-011-000

LD-Plan Apo 2x/0.08

G192-012-000

LD-Plan Apo 5x/0.20

4401-552-830-00

LD-Plan Apo 8x/0.32

Order no.

Order no.

Camera adapters

Light source
010-00340R
805-00039

Accessories

Filters for base unit G192-082/3-000
G192-080-082

Dummy filter slider

G192-080-919

Filter slider incl. polarizing filter

Darkfield illumination adapter
G192-044-901

Accessories

X-Cite 110LED w/ 5mm fiber
Liquid light guideG405-524-0001m length; 5mm active diameter;
Volpi connector
Fiber adapters

G192-043-000

Fiber adapter for 9mm fiberdiameter

G192-045-000

Fiber adapter for 7mm fiber diameter; to be used for G405-524-000

Darkfield adapter 66mm diameter
Piezo unit for AF

4401-535-822-01

Piezo unit to be used with
G192-080-000 or G192-081-000

DIC modules for 5x lens
4401-574-823-00

DIC module incl. Prism foruse w/o piezo

4401-574-824-00

DIC module incl. Prism foruse w/ piezo

Mounting accessories
G192-080-912

X95 carrier

4401-535-138-00

Mount for direct adapter│ A closer look
Find additional information and download
datasheets from: www.qioptiq-shop.com/
en/Precision-Optics/Micro-Imaging/mag-xsystem-125/05

High Resolution Micro-Inspection System06

Designed forLarge Sensors

Optical Performance

The mag.x system 125 is the first microscope system

Mag.x system 125 stands out from conventionalthat is specifically designed for the use with large

microscope systems by numerical aperture (NA)sensors to achieve true wide field imaging with highvalues considerably higher than those of otherresolution. With a supported sensor diameter ofsystems. High optical quality is not only ensured

57mm popular line scan sensors like 8k TDI sensors

on the optical axis, but also is maintained over theas well as modern super high-resolution array sensors

entire sensor format. The MTF chart below shows

can be used. These sensors fully utilize the high optical

the polychromatic MTF versus field height. Values

bandwidth of the mag.x system 125 that supports up

for object y and image heights y’ are given under

to 50MPixel sensor resolution.

the horizontal axis. Note that the high contrast
values close to the diffraction limit are maintained
over the entire field!

Polychromatic MTF vs. field heightLD Plan Apo 5x/0.2 + TL2.25x; 2y=5 mm, 2y‘=56.3 mm

The complete system is chromatically corrected in
the spectral range of 430–700 nm. High contrast
is maintained over the entire spectrum and norefocusing is required if the illumination wavelength
is changed. Multispectral imaging becomes possible
without any additional focus needs.
To enable even the most demanding measurementtasks the mag.x system 125 features precise objectmag.x system 125

space telecentricity to prevent flawed measurementsof objects with varying height.

Configuration Made Easy:
MachVis Software
The MachVis software from Qioptiq makes it easy to find the right lens fora given task and facilitates configuration of a mag.x system 125 setup
considerably. Furthermore all technical data is available right away.

07│ MachVis download
Download for free today:
www.qioptiq.com/machvis

Specifications

Tube Lens System
Objective Plan Apochromat

WDf'obj

δobj

R0M

1x

1.73x

2.25x

f'tub = 250 mm

f'tub = 432.5 mm

f'tub = 563 mm

2y' = 25 mm

2y' = 43.3 mm

2yNA'R'0

Magn. / NAmm

mmµm

lp/mm

2x / 0.08

24.8

125.0

± 42.7293212.50.04

147

5x / 0.20

13.0

50.0

± 6.8

733

5

5.00.04

8x / 0.32

23.0

31.3

± 2.7

1172

8

3.10.04

NA Numerical aperture in the object space = n · sin (σ)
WD Working distancef'obj Focal length of the objective
f'tub Focal length of the tube lens

mm

lp/mm

2yMmm

NA'2y' = 57 mm
R'0lp/mm

M2ymm

R'0lp/mm

3.5

12.50.023

854.5147

8.7

5.00.023

85

11.25

5.00.018

65

147

13.8

3.10.02385

18.0

3.10.018

65

δobj
R'0R02y'2yM

12.5NA'0.018

Depth of field at 546 nm δobj = ±n · λ/(2 · NA2)
Cut off frequency in image space at 546 nm
Cut off frequency in object space at 546 nm R0 = (2 · NA) / λImage field size (maximum detector diagonal)
Object field size
Magnification of the overall system; M = Mobj · Mtub

65

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332-1-magx-02-XXEN-2016.07 Technical data are subject to change without notice.

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