1ATLAS ITk microstrip detector @HL-LHC
T. Ishii (U. Tsukuba B4)
K. Saito (U Tsukuba M1)
S. Hirose (U. Tsukuba)
K. Hara (U. Tsukuba)
K. Nakamura (KEK)

Final Design Review (FDR): April 2019
Sensor pre-production delivery: Jan-Mar 2020
Production Readiness Review (PRR):
TCHoU 構成員会議2020年11月30日

2Higgs~14yrs (9 yrs Physics)~10yrsnow

HL-LHC physics

HL-LHCでは、LHC(350/fb)の10倍のデータ量(4000/fb)の取得をめざす

TCHoU 構成員会議2020年11月30日

3

HL-LHC飛跡検出器への要求

μ=200μ1011 p/bunch

一度(25ns間隔）に複数のpp衝突がおきる

＠HL-LHC✓ 検出器でのpileupを下げる⇒すべて高速応答可能なSiのシステム⇒channelサイズを小さく：strip:12cm⇒2.4cm/4.8cm✓ 放射線耐性⇒p型シリコン検出器
TCHoU 構成員会議2020年11月30日

4

ATLAS内部飛跡検出器 IDからITKへ
73layers

Gas tracker
Drift time~45ns/r=2mm
Q collection~100ns
Strip

LS=4.8cmx74.5um

SS=2.4cmx75.5um

Pixel=50x50um
siliconQ collection~20ns

Current Inner Detector ID ⇒ HL-LHC Inner Tracker ITk
TCHoU 構成員会議2020年11月30日

5Expected performance
μ= 200

ヒット占有率<1%⇒データ転送でのロスなし
全領域で14ヒット以上を確保できる

<0.8%
1.2%
一部の検出器(層)がダメでも効率は劣化しない

μが増えても効率の低下
や再構成ミスがない
TCHoU 構成員会議2020年11月30日

500V max allowed

6ATLAS Strip Detector
Performance evaluation by
R.Wakasa, S.Wada,S.Hirose et al.

SCT4” Hamamatsu
p+-on-n

SCT (after type inversion)⇒

ITk strip (started R&D in 2005)n⇒p by irradiation< full depletion required>< partial depletion possible>

TCHoU 構成員会議2020年11月30日

7

ITk p-type sensor charge collection
1. < partial depletion possible>

2. < large enough charge collection @500V due
to collecting fast electrons = less trapping>
Noise~600e ⇒ S/N~7000/600 > 11Sufficient charge collection after 1.6x1015 n/cm2
Max. fluence after 4000/fb x 1.5

All silicon sensors (strip+ pixel) are with p-type silicon
K.Hara et al., Itk strip sensor FDR/HSTD12TCHoU 構成員会議2020年11月30日

8

ITk Barrel sensor & module
14 modules both sides (±20mrad)
Capton hybrid glued on sensor topABC130->ABCStar:(256ch)x10/row in stave

10x10cm on 6” wafer

All (barrel+endcap) sensors will
be fabricated by Hamamatsu
Photonics

TCHoU 構成員会議2020年11月30日

9#ITK strip sensors＃sensors

Short strips (2.4cm)
Long strips (4.8cm) x 74.5um
Japan: ½ of barrel sensors fabrication, QC+QA⇒Module⇒Stave⇒Module PetalTCHoU 構成員会議2020年11月30日

10Pre- and Series-Production Schedule
Estimated delay

Pre-COVID19 schedule

6 months breakPre-production
PRRMid Nov
2 months
Schedule revised(?)
QA/QC
Sites
ready

Qualification
approvals;
scheduling PRR

1st part of testing• > 1/3 of volume

End Jan(Series-)production (~3.8 yrs)
4 months

PRRPOs• 1-2 weeks

2nd part of testing• < 2/3 of volumeProduction
testing starts• 3.8 year process

TCHoU 構成員会議2020年11月30日

Sensor QC&QA
Site Qualification

starting

11QC: main sensor test

QA: test chips
Irradiations:
Tohoku U. CYRIC 70MeV protons
Birmingham 28MeV protons
Ljubljana Reactor neutrons
Prague Co-60 gammas

TCHoU 構成員会議2020年11月30日

12Strip sensors: QC items
On every sensor• Human&Machine visual inspection/capture ☑
Auto focus microscope☑
• IV, CV, Metrology/surface profileat HPK

itemFrac.

ATLAS

HPK/Japan

IV/CV

100%

10V/10s;45+10-40%RH

20V/s;<60% (slow r.r. ⇒10%↑in time)

Image100%2um/pixel precision

2um/pixel precision

Warp

100%

11x11⇒3x3

11x11 (1um precision)

I_stab

2-5%

24hrs

none

Full strip

2-5%

Ccpl, Rbias

Use HPK scan data

Cint….
Bias tab
Japanese order(~6000 sensors):

On sampling (2-5%)
100%HPK(Test with test sensor/structure)
none

QC

QA chips

UCSC
CERN

UCSC

UCSC

Module sites
in US/Canada
KEK/Tsukuba
TCHoU 構成員会議2020年11月30日

13

Setup @ HPK CR

NIKON D5600

Wafer Loader

Auto Focus

cassette
HPK wafer carrier(25pcs, 5mm pitch)

Lens & e-revolver

Chuck

HPK wafer tray
(vacuum holes,<1.3mm thick.)

WL controller

Image capture/warp meas.

XY stage
TCHoU 構成員会議2020年11月30日

14NIKON D5600
Wafer Loader
Chuck

Auto Focus
Chuo-Seiki
AF-WFS2cassette
Mitutoyo
M Plan Apo

Lens & e-revolver

Wafer Tray
Chuck
WL controller
XY stage
TCHoU 構成員会議2020年11月30日

15Lens aberration issue of x2 lens
Top left of view area

Top Middle of view area

Shadow@bottom rightShadow@bottom

7.8mm (4000pix)

11.7mm (6000pix)

Middle of view area

This Issue doesn’t show up for x5 or x10 lensExcellent quality of picture!!
=> Allow more overlaps to use the central part of the pictures

TCHoU 構成員会議2020年11月30日

16Height Measurement: Metrology• Scanning over sensor with auto-focus adjusting. (tracking mode)• Measurement precision is ideally 0.9um.
LSSS
Large contrast requires fine autofocusing adjustment ⇒ solved

Online monitor with ROOT histogram

Maximum bow for all preproduction sensors:
Spec: <200 um

Measurements of pre-production sensors (>320 sensors) finished in MarchTCHoU 構成員会議2020年11月30日

Strip QA

17

3 half moon’s per batch (~50)

TCHoU 構成員会議2020年11月30日

Strip QA : CCE- mini
Alibava daughter b.

Two n-irrad samples delivered for site qual.

data is for sitequalification

18

Alibava mother(FPGA)

Non-irrad
500V

Pre-production mini’s• non-irradiated• 1.6x1015 n/cm2 irradiatedn (1.6e15)@500V

斉藤B4卒論(2019)

n (1.6e15)@500V
TCHoU 構成員会議2020年11月30日

19

QA: test system

Control GUI

TCHoU 構成員会議2020年11月30日

Summary of TC&MD8 measurements

20Site qualification

Proton irradiated

TESTCHIPM
D84.68× 1014 neq /cm2

1.54× 1015 neq /cm2

Un-irradCo-60
660 kGy

items

Requirement

Un-irradバイアス抵抗(20℃)(-20℃)

1.5±0.5MΩ

1.456MΩ
1.729MΩ

1.836MΩ

1.794MΩ

ストリップ間容量<1pF/cm

0.814pF/cm

0.974pF/cm

0.891pF/cm

0.876pF/cm

0.952pF/cm

ストリップ間抵抗>15MΩ

ほぼ絶縁

120MΩ@5V

27MΩ@5V

0.57GΩ

6.96MΩ

PTP作動電圧(<100V)

13V(20℃)

26.4V

25.4V

15.8V

9.1V

結合容量@1kHz>20pF/cm

20.5pF/cm

22.7pF/cm

22.1pF/cm

23.21pF/cm

23.46pF/cm

酸化膜厚

none

655nm

--

650nm

659nm

酸化膜リーク電流<10nA@100V<0.4nA<0.4nA<0.4nA

0.278nA

0.162nA

全空乏化電圧

<350V

300V

235.6V

238.2V

リーク電流@500V<100nA/cm2

10nA/cm2

11nA/cm2

6.2nA/cm2

1.555MΩ

10uA/cm2

2.195MΩ12nA/cm2

Irradiated (un-irradiated) samples are measured at -20℃ (20℃)
Requirements mostly apply for non-irradiated samples
TCHoU 構成員会議2020年11月30日

21Conclusions
ATLAS-Japan (Tsukuba/KEK) is responsible for ½ of ATLAS ITk Barrel strip sensors
Pre-production (5% of total) of strip sensors is finished – under evaluation for PRR
QC site qualification is under way- cross checks with other sites are under way
QA-CCE: site qualified
QA-TC&MD8; site qualification under way

Production should start 2021 Q2 and will continue for 3.8 years
TCHoU 構成員会議2020年11月30日