HL-LHCष਱ऐञআॡ७ঝਫ਼লஓभঅ‫ش‬঒ॸ५ॺੰෲ໒ణপ৾ ఊ૒‫ڮ‬ফ ଯઢਮ౓1

2017Jan CiRfSE Workshop

2

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৯ઃ LHCधATLASਫ਼লஓ‫ؚ‬HL-LHC আॡ७ঝਫ਼লஓभଡୗध৫৅ 50um x 50um pixel sensor

 ऽधी2017Jan CiRfSE Workshop

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3

A Toroidal LHC ApparatuS(ATLAS)৔৖ఄ඄ਫ਼লஓ• আॡ७ঝਫ਼লஓ(Pixel)• ३জ॥থ५ॺজॵউਫ਼লஓ(SCT)• ५ॺট‫ॳش‬গ‫ش‬ঈॳख़থং‫(ش‬TRT)• ९ঞঀॖॻঐॢॿॵॺ

঑গ‫ش‬၄৕ਫ਼লஓ
• ॺজफ़‫ॳش‬ख़থং‫(ش‬TGC,RPC)• ॻজইॺॳগ‫ش‬ঈॳख़থং‫(ش‬MDT)• ॺটॖॻঐॢॿॵॺ

HL-LHC(2025~)भॖথ५ॺ‫ش‬ঝ॑৯੐ख৫৅র‫آآ‬ढ़টজও‫ॱش‬• ਗ਼჌ढ़টজও‫ॱش‬• ঁॻটথढ़টজও‫ॱش‬
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2017Jan CiRfSE Workshop

4High Luminosity LHC2026ফऊै઩ऽॊ‫ؚ‬HL-LHCष਱ऐथਫ਼লஓ৫৅॑ষढथःॊ‫؛‬Luminosity ~5x1034cm-2 s-1
HL-LHC 10ফ ~ 3000fb-1‫ق‬LHC runभ৺10೅)

LHC->HL-LHCदଣೝ଍୤ੜপ
(5¼1014 1MeV neq/cm2-> 1.7¼1015 1MeV neq/cm2)->ৈଣೝ଍ິਙ॑੅णਫ਼লஓ
ऋ૑ਏ
2017Jan CiRfSE Workshop

ঃॖঝ॔ॵউহ଴भੜਸपൣः‫ؚ‬၄৕ಚથ૨भ଩ৣ‫؞‬ਫનऩvertexभગଡਛ
ऋ૑ਏ->ਠ૔भআॡ७ঝ१ॖ६(50um x400um)ेॉ৵औऎखथ‫ ؚ‬ৈਜ਼઼ীੰ
ચऩআॡ७ঝਫ਼লஓऋ૑ਏ
2017/1/24

5আॡ७ঝਫ਼লஓ

SiO2

 n+-in-p஑઄଑৬ਫ਼লஓ

¾ ৈ຅ಿp஑ংঝॡपn஑ਂෞ੟॑ॖথউ
ছথॺख‫ؚ‬p-nம়॑੿ॊ‫؛‬¾ ഫએपಗংॖ॔५॑ऊऐथ‫ؚ‬ॖথউছথॺखञn஑઄଑৬॑ASICपᇽएऒध
पेॉ‫ؚ‬૬࿅ಽ॑ઁऑॊ‫؛‬¾ ਗ਼ாभী௞॑ेऎघॊञीप‫ؚ‬p-stop॑ඇी੢ि‫؛‬ আॡ७ঝਫ਼লஓ

Poly-SiASICAl Padn+e-e-P-stop
Chargedparticlehh

AlP-stop

Bumpp-bulk

p+-V

Al Pad¾ ‫ڮ‬ઃ੪৓ऩଦ઼भ૚আॡ७ঝधഭा
লख৚ଡ଼मসരংথউदம়घॊञ
ीपBump-bonding॑ষअ‫؛‬¾ ASICपᇽए৐प७থ१‫ش‬૥ୡ॑घॊ
ञीप‫ؚ‬૚আॡ७ঝमBias-railधPoly-Si຅ಿदமਢघॊ‫؛‬→ऒभமਢ্১भਈి৲॑ষढथःॊ‫ ؛‬Bias-rail

Poly-Si
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2017Jan CiRfSE Workshop

6ॸ५ॺঅ‫ش‬঒

¾ ৈਜ਼઼ীੰચभਫ਼লஓ॑৷ःथ আॡ७ঝଡୗभਫ਼઒॑ষः‫ؚ‬ਫ਼লஓभਫ਼ল஍૨ृਜ਼઼ীੰચ॑৹सॊ
¾ CERN : 125GeV pionਜ਼઼ীੰચ‫ع‬5um

Testbeam Setupॸঞ५॥‫ش‬উॺছॵय़থॢ৷ৈਜ਼઼ীੰચআॡ७ঝਫ਼লஓ
Pixel size ~ 18um

၄৕অ‫ش‬঒oDetector Under Test(DUT)
ਙચ௬੼घॊআॡ७ঝਫ਼লஓ
Trigger Logic Unit(TLU)

३থॳঞ‫ॱش‬ऊैॺজफ़‫ش‬ਦಀ॑ਭऐ਄ॉ‫ؚ‬DUT‫ॸؚ‬ঞ५॥‫ش‬উष৅ষ
2017Jan CiRfSE Workshop

2017/1/24

750um x 50um sensorStructure ਠ૔‫ؚ‬਌प৫৅ऋষॎोथःॊਫ਼লஓमআॡ७ঝ१ॖ६ 50um x 250um→Φ্਱‫ؚ‬z্਱૏্भਜ਼઼ীੰચ਱঱॑અइ‫ؚ‬আॡ७ঝ१ॖ६َ॑50um x 50umُपखञਫ਼লஓभ
450um
৫৅ुਤষর

→नभेअऩংॖ॔५ଡୗऋଐःभऊ॑ใோभFEI4
ഭाলख৚ଡ଼द௬੼
→3x1015 1-MeV neq/cm2भਫ਼লஓपणःथੰෲ
Type1 No Offset

Type2 Small Offset Type5 No Bias

50um

Zoom
Type6 25um x100um
Small Offset

25um
100um

2017/1/24

2017Jan CiRfSE Workshop

8আॡ७ঝ৔ਫ਼ল஍૨ীഘ

Proton Irrad 3x1015 1MeV neq/cm2
Type1 1000V

Type2 1000V

Type5 1000V

Type6 1000V

2017Jan CiRfSE Workshop

2017/1/24

9আॡ७ঝ৔ਫ਼ল஍૨ীഘ

¾ Type1 : আॡ७ঝ୆ੀप bias-rail ऋ੎ऩॉপ்पਫ਼ল஍૨଩ৣ
¾ Type2 : bias-rail ऋআॡ७ঝ୆ੀध੎ऩॊ୩ୠऋ৵औःञीਫ਼ল஍૨଩ৣऋ৵औः
¾ Type5 : ংॖ॔५ଡୗऋऩःञीআॡ७ঝഓपेॊਫ਼ল஍૨଩ৣभाનੳ→ Charge sharingभ஍ટपेॉ⃦க॑தइऩऊढञ
¾ Type6 : ংॖ॔५ঞ‫ش‬ঝऋআॡ७ঝ୆ੀपলॊ୩ୠऋశଞप৵औःञीংॖ॔५ঞ‫ش‬ঝपेॊਫ਼ল஍૨଩ৣऋ৵औः‫؛‬Proton Irrad 3x1015 1MeV neq/cm2
Type1 1000V

Type2 1000V

Type5 1000VType6 1000V

2017/1/24

2017Jan CiRfSE Workshop

10ਫ਼ল஍૨଩ৣभ௬੼

Ex. Type5 1000Vংॖ॔५ঞ‫ش‬ঝृআॡ७ঝഓदभਫ਼ল஍૨଩ৣ॑௬੼घॊञीप‫ؚ‬ਫ਼ল஍૨௤ଷ εloss॑৒ଝखञ‫؛‬
1. ೝ୶खञআॡ७ঝ৔ਫ਼ল஍૨ঐॵউ॑5Gaussian + constant Fit(∫

Fit. func dx)/ 100um

ٙ Efficiency Loss per Pixel εloss→εloss॑আॡ७ঝभଡୗओधपૻຎख‫ؚ‬नभेअऩଡୗऋਈిऩभऊਫ਼઒

2017Jan CiRfSE Workshop

X ProjectionEfficiency

2.

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11ਫ਼ল஍૨௤ଷεloss vs HV HV॑পऌऎघॊऒधभेॉਫ਼ল஍૨௤ଷ੖૘ -> 1000Vदमनभ७থ१‫ش‬दुਫ਼ল஍૨98%ਰ঱‫ق‬৯ఏ୸ਛ‫ك‬

 50um x 50um : type1(no offset) > type2(Small offset) > type5(no bias)
Type1

Type2
Type5Type6
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2017Jan CiRfSE Workshop

12ਫ਼ল஍૨௤ଷεloss vs HV

 Type6 : ৊गଡୗभ७থ१‫ش‬दुਫ਼ল஍૨௤ଷपপऌऩୀः→ KEK109RJ4 < KEK111RJ3Mean~ 3000e→ ॹ‫ॱش‬਄੭ৎभ⃦கभୀः
Type1Mean
Type2~ 2600e
Type5Type62017Jan CiRfSE Workshop

2017/1/24

13ਫ਼ল஍૨௤ଷεloss vs HV Type6 : ৊गଡୗभ७থ१‫ش‬दुਫ਼ল஍૨௤ଷपপऌऩୀःMean~ 3000e→ আॡ७ঝ୆ੀदभਫ਼ল஍૨଩ৣपপ்ऩୀः→ ⃦கऋৣऋॊऒधपेॉCharge sharingखञधऌपु⃦க॑தइॊॖঋথॺऋੜइञ
আॡ७ঝ৔ਫ਼ল஍૨ীഘ type6 HV=1000V
KEK111RJ3 th3000e
4pointcharge sharing

3pointcharge sharing-> th2600दमऺऻનੳदऌऩः
Total charge~ 10000e-> 10ke/3~3.3ke

Mean
Type2~ 2600e
Type5

KEK109RJ4 : th2600e

2017Jan CiRfSE Workshop

14Type1Type62017/1/24

ऽधी ਠ૔‫ؚ‬HL-LHC(2026ফ~)भ৔৖ਫ਼লஓषभॖথ५ॺ‫ش‬ঝष਱ऐथআॡ७ঝਫ਼
লஓभ৫৅॑ষढथःॊ‫؛‬ ਠ૔৫৅॑ষढथःॊ50um x 250um भਫ਼লஓेॉुΦ্਱‫ؚ‬z্਱भਜ਼઼ী
ੰચऋଐऎऩॊेअपআॡ७ঝ१ॖ६ऋ“50um x 50um”भਫ਼লஓ॑৫৅র
→ ऽटഭाলख৚ଡ଼ऋदऌथःऩःञी50um x 250umभഭाলख৚ଡ଼॑৷ः
थ‫ؚ‬50um x 50umभংॖ॔५ଡୗभਫ਼઒
഻৕଍සೝ‫~ق‬3.0E+15neq/cm2‫ك‬भਫ਼লஓपणःथঅ‫ش‬঒ॸ५ॺੰෲ॑ষढञ‫؛‬¾ 50um x 250umআॡ७ঝਫ਼লஓध৊஘पংॖ॔५ঞ‫ش‬ঝधআॡ७ঝ୆ੀऋ੎
ऩॊ୩ୠदਫ਼ল஍૨଩ৣ
¾ ਫ਼ল஍૨‫؟‬type1(no offset) > type2(small offset) > type5(no bias)→नभ७থ१‫ش‬दु৯ఏக98%म୸ਛखथःॊऋ‫ؚ‬type2ऋਈुଐःଡୗ
¾ ⃦கऋৣऋॊऒधदਫ਼ল஍૨௤ଷम৵औऎऩॊ
→ আॡ७ঝഓपउऐॊਫ਼ল஍૨भ଩ৣमআॡ७ঝभଡୗपेॊुभदमऩऎCharge sharingपेॉ⃦க॑தइऩःञी
2017Jan CiRfSE Workshop

2017/1/24

15Back up

2017Jan CiRfSE Workshop

16

2017/1/24

Large Hadron Collider(LHC)५ॖ५धইছথ५भব୆पਜ਼઼खथःॊఢশ 27km
৉ৣ ৺100m
഻৕-഻৕้఍஑ਸசஓ
2010ফ~2012ফ ਈপ8TeVਠ૔‫ؚ‬ਈপ13TeVद༎௮
2017Jan CiRfSE Workshop

৉ৣ100mभॺথॿঝ

2017/1/24

17A Toroidal LHC ApparatuS(ATLAS)

৸শ 44m‫ؚ‬ৈऔ 25m‫ؚ‬੎औ 7000tभሑ৷၄৕ਫ਼লஓ‫؛‬৯৓ Higgs၄৕भಖഡ೾৒ தৌูਙ၄৕भർด ౟๪ઃ੪भർด ৗखः੟৶
2017Jan CiRfSE Workshop

18

2017/1/24

Full depletion voltage ఊ૒૛ધ‫ق‬໒ణপ༖ਉ‫ك‬

320um SCT CV೾৒Ex) 1E+15 neq/cm2

Pre-annealभகऊै3E+15 neq/cm2भ
৸૬࿅৲ਗ਼ಓम 1200V एैःटध੒୳औोॊ
2017Jan CiRfSE Workshop

2017/1/24

19

HL-LHCपउऐॊਗ਼௞ਙଣೝ଍୤ ้఍ਡ੺ວदम੗୤भଣೝ଍ऋଣলऔोॊ‫؛‬
HL-LHC‫ق‬Luminosity~3000fb-1‫ك‬दभ଍୤ঐॵউ
(ATL-UPGRADE-PUB-2014-003 )ਠ૔‫ؚ‬3ಽ৯‫ؚ‬4ಽ৯षभॖথ५ॺ‫ش‬ঝ॑અइथःॊ
Max 1MGy(HL-LHC run)
2017/1/24

2017Jan CiRfSE Workshop

HL-LHCदभଣೝ଍୤‫ق‬਍৸બਯٙ‫كڮ‬20සೝ૥ୡ HL-LHCदभଣೝ଍୤॑ગਠघॊञीप
CYRIC@ূਨপ৾द഻৕଍සೝ૥ୡ॑ষअ আॡ७ঝਫ਼লஓ ~ 3¼1015 1MeV neq/cm2→HL-LHCਗડ‫ڮ‬ಽभਏ੷கभ৺‫ڮ‬೅ සೝखञਫ਼লஓ॑অ‫ش‬঒ॸ५ॺद௬੼घॊ
70MeV proton beam

70MeV proton beam१থউঝभোो౹इৎप଺ೌखऩःञीप‫ؚ‬জঔ‫ॺش‬॥থॺট‫ش‬ঝदऌॊेअपऩढथःॊ
2017Jan CiRfSE Workshop

2017/1/24

γ଍௤ം

21

 ३জ॥থ७থ१‫ش‬मγ଍पेॉ਀એ௤ം॑ਭऐॊ‫؛‬ γ଍ऋਉ৕॑ॖड़থ৲‫ཫ؞‬କख‫ؚ‬ग़ॿঝॠ‫૳॑ش‬धघ‫؛‬‫ق‬ॖड़থ৲௤ം॑ਭऐॊ୩ୠ‫؟‬SiO2ಽ‫ ؚ‬SiO2 –Siੀએ‫ك‬
Fixed oxide charge : ਫሠ఑ඃपेॊुभ‫ؚ‬ਫपఝਗ਼Interface trapped charge : ੀએહ੺प + or - पఝਗ਼‫؛‬ग़ॿঝॠ‫૆ش‬ਜ਼॑஄ਛ‫؛‬਀એ௤ംपेॉਬऌକऒ
औोॊਠ଴
1. พਗ਼૴भੜਸ
2. ਀એਗ਼ৃभ঱ಊपेॊঈঞ‫ش‬ॡॲक़থਗ਼ಓभ
૗৲
3. ૬࿅৲खऩःDeadlayerभ஄ਛγ-ray
Fixed oxide charge+¼+¼+¼+¼SiO2++¼ ¼Interface trapped chargeSi

2017/1/24

2017Jan CiRfSE Workshop

22SiO2-Siঅ‫ش‬঒ॸ५ॺ ၄৕অ‫ش‬঒॑৷ःथ‫ؚ‬ਫ਼লஓभਫ਼ল஍૨‫ؚ‬ਜ਼઼ীੰચ॑৹सॊ
¾ CERN 125Gev pion beam
¾ DESY

4GeV electron beam

DetectorControlSystem(DCS)

Cooling boxॸঞ५॥‫ش‬উॺছॵय़থॢ৷ৈਜ਼઼ীੰચ
আॡ७ঝਫ਼লஓ
18.4¼18.4um2, 1152¼576আॡ७ঝ

Detector Under Test(DUT)၄৕অ‫ش‬঒ॺজफ़‫ش‬৷३থॳঞ‫ॱش‬oUSBpix DAQ
RCETrigger Logic Unit(TLU)

2017Jan CiRfSE Workshop

NI crate

2017/1/24অ‫ش‬঒ॸ५ॺੰෲ

23 অ‫ش‬঒ॸ५ॺੰෲपम2णभ९ইॺक़ख़॔॑৷ःॊ
¾ EUTelescoperawॹ‫॑ॱش‬૗ఌख‫ॸؚ‬ঞ५॥‫ش‬উभਜ਼઼ੲਾ॑৷ःथ‫ؚ‬clustering‫ؚ‬rotation‫ؚ‬alignment‫ؚ‬trackingऩन॑ষअ‫؛‬जभ৏‫ৢؚ‬ૌखञ၄৕भఄ඄ੲਾ॑লৡघॊ
¾ TBmon2
EUTelsescopeदলৡऔोञఄ඄ੲਾ॑৷ःथਫ਼ল஍૨ृઽૐਗ਼෰भੰෲ॑ষअ

EUTelescope
TBmon2

2017/1/24

2017Jan CiRfSE Workshop

24Bump bonding‫ٮ‬Bump bondingधमআॡ७ঝਫ਼লஓभ2ઃ੪৓पଦ઼औोञ૚আॡ७ঝऊैഭाলघञीपASICधॳॵউ॑म॒टংথউदᇽऑॊু১‫؛‬म॒टधॳॵউਗ਼ாदँॊAl॑ᇽऑॊञीप
َAl(ASIC)-UBM-Bump-UBM-Al(chip)ُभेअऩಽଡୗ॑खथःॊ‫؛‬
UBM(Under Bump Metal)‫؟‬Alਗ਼ாपংথউ॑஄ਛघॊञीपஂ૔औचॊসരಽMainੰ‫؟‬SnAg Bump-bonding
ASIC:150um
AlUBM~25um

Pixel

SnAg
Ni/Au
Al

2017Jan CiRfSE Workshop

Back upੰ‫؟‬Ni/In Bump-bonding
ASIC:150um
AlNi~15um

InPixelNiAl

2017/1/24

25

ਫ਼ল஍૨௤ଷεloss vs HV

 Type6 : ৊गଡୗभ७থ१‫ش‬दुਫ਼ল஍૨௤ଷपপऌऩୀः→ আॡ७ঝ୆ੀदभਫ਼ল஍૨଩ৣपপ்ऩୀः→ ⃦கऋৣऋॊऒधपेॉCharge sharingखञधऌपु⃦க॑தइॊॖঋথॺऋੜइञআॡ७ঝ৔ਫ਼ল஍૨ೝ୶ীഘ type6 HV=1000VKEK109RJ4 : th2600e, KEK111RJ3 th3000e

Mean~ 3000e
Type1Mean
Type2~ 2600e
Type5Type62017Jan CiRfSE Workshop

2017/1/24