砥粒加工学会誌 65 巻 7 号 ／ 目次
Journal of the Japan Society for Abrasive Technology (JSAT) Vol.65 No.7 Contents

パナソニック株式会社

論文賞
こぼれ話

鷹巣良史 ···················································································································································· 347
株式会社ソディック
小河誉典 ···················································································································································· 349
LED 用サファイア基板の割断
川畑孝志，北市 充，浅井義之，飯田純平 ······················································································ 352
GaN 基板の超精密加工プロセスと加工変質層の評価

特集

會田英雄，土肥俊郎 ······························································································································· 356
GaN 基板のトライボケミカル研磨技術

LED 材料の加工技術

久保田章亀 ················································································································································ 360
触媒表面基準エッチング法による GaN 基板の平坦化
佐野泰久，有馬健太，山内和人 ·········································································································· 364
GaN 基板の高速高精度加工法の開発鷹巣良史 ···················································································································································· 368

砥粒加工基礎講座
「砥石」
研究室紹介

第 7 回 砥石の構造(その 6)：結合剤（ボンド）の種類とその適性《メタルボンド編》
本間宏之 ···················································································································································· 372
宇都宮大学 特殊精密加工研究室 ········································································································ 376
東京農工大学 笹原研究室 ······················································································································ 377
装身具用硬質金属の磁気バレル研磨に関する研究
第１報：水流が加工性能に及ぼす影響論

文

林 善永，宮川和博，小松利安，有泉直子，平 晋一郎 ···························································· 378
工作機械の板金部品の特徴と機能性に関する考察
山口陽平，宮嶋健太郎，廣垣俊樹，青山栄一 ················································································ 384
会告会告・その他

2021 年度砥粒加工学会学術講演会（ABTEC2021） ················································· 391
ABTEC2021 企業の皆様へのご案内 ··········································································· 394
ABTEC2021 「企業紹介 （プレミア）」のおすすめ ····················································· 395
ABTEC2021 「企業技術紹介」のおすすめ ·································································· 396
ABTEC2021 「学生のための企業技術発表会」のおすすめ ··································· 397
ABTEC2021 「学生のための企業技術発表会」に関するご案内(企業向け) ······ 398
ABTEC2021 「学生のための企業技術発表会」に関するご案内(学生向け) ······ 399
ABTEC2021 公的研究機関・大学高専研究室・専門委員会の研究紹介のおすすめ ····································································································· 400
ISAAT2021 講演論文募集
第 23 回 国際先端砥粒加工シンポジウム(ISAAT2021) ····································· 401
カレンダー ······················································································································································· 402
編集後記 ························································································································································· 403

Journal of the Japan Society for Abrasive Technology (JSAT)Vol.65 No. 7 Contents

Panasonic Corporation

Episodes of JSAT
Paper Award

Yoshifumi TAKASU ································································································································· 347
Sodick Co.,Ltd.
Yoshinori OGAWA ···································································································································· 349
Cutting technology of sapphire substrate for LED
Takashi KAWABATA, Mitsuru KITAICHI,
Yoshiyuki ASAI and Junpei IIDA ·········································································································· 352

Special Issue

Ultra-precise polishing of GaN substrate and evaluation of subsurface damages
Hideo AIDA and Toshiro DOI ················································································································ 356

Processingtechnologyfor LED materials

Tribochemical polishing technique of GaN substrate
Akihisa KUBOTA ····································································································································· 360
Polishing of GaN substrates using catalyst-referred chemical etching
Yasuhisa SANO, Kenta ARIMA and Kazuto YAMAUCHI ····························································· 364
Development of high-speed and high-accuracy manufacturing of gallium nitride
Yoshifumi TAKASU ································································································································· 368

Lecture series ongrinding wheel

Basics of grinding wheels Part 6Introductionof Laboratories

Utsunomiya University Non-traditional Precision Machining Laboratory ···································· 376

Homma HIROYUKI ································································································································· 372

Tokyo University of Agriculture and Technology, Sasahara Laboratory ······································· 377
Magnetic barrel finishing of hard metals for accessories
1st report: Effect of water flow on machining performance
Zenei HAYASHI, Kazuhiro MIYAGAWA, Toshiyasu KOMATSU,

PapersNaoko ARIIZUMI and Shin’ichiro HIRA ···························································································· 378
Features and functionality of sheet metal parts for machine tools
Yohei YAMAGUCHI, Kentaro MIYAJIMA,
Toshiki HIROGAKI and Eiichi AOYAMA·························································································· 384

Information································································································································································391～403

砥粒加工学会誌【 特351

集 】

LED 材料の加工技術
青色 LED（Light Emitting Diode）が実現したことにより，LED の建築照明，車載ヘッドライトなど，その応用は多岐にわたる．青色または白色 LED 用材料には窒化ガリウム（GaN）が使用されるが，熱的・化学的に安定であるという材料物性から機械加工が難しい．また，LED はサファイア基板表面に成長し GaN 薄膜が用いられるが，サファイアも難加工性材料であることが知られている．GaNは LEDだけでなく，レーザや高周波電子デバイスへの応用も進んでおり，本特集では，GaNおよびサファイアの加工技術について，最新動向を紹介する．

〔特集１〕 LED 用サファイア基板の割断〔特集３〕 GaN 基板のトライボケミカル研磨技術【久保田 章亀】（くぼた・あきひさ）【川畑 孝志】（かわばた・たかし）

現職：熊本大学大学院 自然科学研究科 准教授
専門／業務：精密加工
連絡先：〒860-8555 熊本県熊本市中央区黒髪2-39-1
TEL 096-342-3764
e-mail：kubota@mech.kumamoto-u.ac.jp

現職：三星ダイヤモンド工業株式会社 開発統括部ツール研究開発部 部長
専門／業務：脆性材料基板の割断に関する工具および基板加工プロセスの研究開発
連絡先：〒566-0034 大阪府摂津市香露園32-12
TEL 072-648-5022
e-mail：tkawabata@mitsuboshi-dia.co.jp【北市 充】（きたいち・みつる）

現職：三星ダイヤモンド工業株式会社 開発統括部
ツール研究開発部 ツールラボグループ グループ
リーダー代理専門／業務：脆性材料基板の割断に関する工具の研究開発〔特集４〕 触媒表面基準エッチング法による GaN 基板の平坦化【佐野 泰久】（さの・やすひさ）

現職：大阪大学大学院工学研究科 准教授
専門／業務：超精密加工, 特殊加工
連絡先：〒565-0871 大阪府吹田市山田丘2-1
TEL 06-6879-7284 FAX 06-6879-7284
e-mail：sano@prec.eng.osaka-u.ac.jp【浅井 義之】（あさい・よしゆき）

現職：三星ダイヤモンド工業株式会社 開発統括部
ツール研究開発部 ツールラボグループ 主席研究員専門／業務：脆性材料基板の割断に関する工具の研究開発【有馬 健太】（ありま・けんた）

現職：大阪大学大学院工学研究科 准教授
専門／業務：表面科学, 半導体プロセス, ナノ材料科学
連絡先：〒565-0871 大阪府吹田市山田丘2-1
TEL 06-6879-7273 FAX 06-6879-7274
e-mail：arima@prec.eng.osaka-u.ac.jp【飯田 純平】（いいだ・じゅんぺい）

現職：三星ダイヤモンド工業株式会社 開発統括部
ツール研究開発部 ツールラボグループ
専門／業務：脆性材料基板の割断に関する工具の研究開発【山内 和人】（やまうち・かずと）

現職：大阪大学大学院工学研究科 教授
専門／業務：超精密加工, 表面計測, 表面形状計測,
Ｘ線光学
連絡先：〒565-0871 大阪府吹田市山田丘2-1
TEL 06-6879-7285 FAX 06-6879-7285
e-mail：yamauchi@prec.eng.osaka-u.ac.jp〔特集２〕 GaN 基板の超精密加工プロセスと加工変質層の評価【會田 英雄】（あいだ・ひでお）

現職：長岡技術科学大学 機械創造工学専攻 准教授
専門／業務：精密加工，結晶成長
連絡先：〒940-2188 新潟県長岡市上富岡町1603-1
TEL 0258-47-9734
e-mail：h-aida@mech.nagaokaut.ac.jp〔特集５〕 GaN 基板の高速高精度加工法の開発【土肥 俊郎】（どい・としろう）
現職：九州大学名誉教授
埼玉大学名誉教授／ Doi Laboratory Inc.
専門／業務：超精密加工技術と応用
連絡先：〒814-0001 福岡県福岡市早良区百道浜3-8-33 福岡システムLSIセンター 401
TEL 092-986-3507
e-mail：toshiro.doi.883@m.kyushu-u.ac.jp

Journal of the Japan Society for Abrasive Technology Vol.65 No.7 2021 JUL.

【鷹巣 良史】（たかす・よしふみ）

現職：パナソニック株式会社 マニュファクチャリング
イノベーション本部 ラピッドマニュファクチャリング推進室 室長
専門／業務：超精密加工・特殊加工，機能性界面創成
連絡先：〒571-8502 大阪府門真市松葉町2番7号
TEL 080-9932-3040
e-mail：takasu.yoshifumi@jp.panasonic.com

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