Activities of the Micromachine Center in Fiscal 2001
I. Investigation and Research on Micromachines
1. R&D on a Micro-Fluid System for the High Speed
Measurement of Dioxins (Commissioned by the New
Energy and Industrial Technology Development
Organization [NEDO])

7. Research Related to the Creation of Systems Incorporating
Next-Generation Micromachine Technology (Commissionedby the Mechanical Social Systems Foundation)
This research project was begun in Fiscal 2000. This survey has
thus far shown that the application of micromachine technology innational projects conducted before and during Fiscal 2000 haveenabled the achievement of significant results in the technologicaland industrial fields. In addition to focusing particular attention on
certain fields, through this research we have been able to clarify thepractical role required of government, academia, and industry and toformulate strategies for R&D in the micromachine technology field.

This project applies a branch of micromachine technology calledmicro-fluid system technology to methods for analyzing dioxins inexhaust gas. The goal of the project is to develop micro-fluid element
technologies. Research in Fiscal 2001 included the examination of
micronized dioxin pre-treatment systems and micro-device
specifications; and the testing and evaluation of unit operationdevices (absorption, extraction, and condensation) and cooling andtemperature distribution measuring devices (regarded as structuralrequisites in micro-fluid systems). R&D was also conducted in areas
related to processing technology, such as microchannels and microfluid connectors.

II. Collection and Provision of Micromachine Information
Information and documents on micromachines in universities,industries, and public organizations both in Japan and overseas havebeen collected, combined with survey results compiled anddocuments produced by MMC, and made freely available in the MMC
library.

2. Investigation and Research into the Applicability ofBasic and Sprout Technologies in Other Fields toMicromachine Technology

1.
2.
3.
4.

Maintenance and Expansion of the MMC Library
Publication of a Micromachine Periodical
Publication of a Newsletter
Database Construction and Data Management
System Operations(indexed full-text retrieval)III. Exchange and Cooperation with Worldwide
Organizations Involved with Micromachines
1. Providing Research Grants for R&D on MicromachineTechnology (3 new themes and six themes carriedover from FY 2000)
2. Participating in the 7th Micromachine Summit andHolding Overseas Seminars(1) Participated in the 7th Micromachine Summit(Freiburg, Germany: April 30 - May 2, 2001)(2) Held European Seminars in Finland and Greece in June 2001
(3) The 7th International Micromachine Symposium(October 31 - November 1, 2001) held at the Science
Hall, Science Museum in Kitanomaru Park, Tokyo
IV. Standardization of Micromachines
1. Research and Development for Standards "Standardizationof Quality/Characteristic Measurement/Evaluation forMicromachine Materials" (Commissioned by the New
Energy and Industrial Technology Development
Organization [NEDO])This joint study between industry and academia is aimed atencouraging the establishment of theories in micro and nano scienceand engineering and probing for technological seeds necessary forpromoting the merging and application of micro andnanotechnologies. Research on the following two themes was begun
in 2001.

(1) Research Related to Cell Manipulation
Discussions will be held among specialists in a diversity of fields
focusing on the methodology, significance, and future direction of cellmanipulation, at the same time as technology streams are merged andintegrated. Thus formulated, this new national research project
proposal will aim to raise the curtain on nanotechnology, the nextchallenge in the field of micromachine technology.

(2) Research Related to the Field of Nano-Optics
A committee to examine research in the field of nano-optics wasestablished and is ready to begin its investigative activities.

3. Research on Constructing a System for Evaluating
the Micromachine Market
To upgrade statistics on micromachine technology basedindustries, a survey of market research, data/sampling, and evaluation
methods was conducted.

4. Investigation of R&D Trends in Micromachine Technology
in Japan and Abroad (Collation and Analysis of the Latest,
Detailed Information from within Japan and Overseas)
5. Research into the Concept of Foundry Network System
Micro-/Nano-Production Technologies (Commissionedby the Mechanical Social Systems Foundation)

The three-year plan for the standardization of quality/characteristic
measurement/evaluation for micromachine materials reached its final
year in 2001. Round robin testing (RRT) was conducted in the tensile
testing of various types of thin-film materials, which was the final
objective of the project. This completed the R&D conducted to obtainthe technological data required for submitting proposals forinternational standardization.

This research forms the foundation for the industrialization of
micro-/nano-technologies; thus, the potential of foundry network
system micro-/nano-production technologies has been examined, aninvestigative committee established, and the following objectivesachieved.

2. Investigation and Research into MicromachineStandardization
The Micromachine International Standardization Forum,
organized mainly by the standardization committee, was establishedon the Internet as a method for promoting international
standardization initiatives. As the standardization of evaluation
standards for measurement WG has been promoted in theInternational Standardization Forum, an abstract (in English) is being
prepared for inclusion in the MCC Technical Report "MeasurementEvaluation Methods for Micromachine Technology." The specialist
term WG was also coined following Forum discussions.

(1) Demonstration of the significance of micro-/nanoproduction technologies and the necessity forindustrialization and foundry services.
(2) Survey of the situation regarding foundry services
overseas and the industry-government-academia
relationship in Japan(3) Questionnaire conducted regarding demand forfoundry services(4) Reconfirmation of the primary purpose of foundries
from the results of the survey on the current
situation of foundries and issues identified.
(5) A concept proposed for a foundry network system(FNS) that is consistent with the current situationin Japan and which is also necessary if Japan is tocontinue leading the world in this field.
(6) Presentation of the practical roles required ofindustry, government, and academia in FNS.
6. Research Relating to Functional Expression andProcess Technology in the Field of Micro-/Nano-Fusion(Commissioned by the New Energy and Industrial
Technology Development Organization [NEDO])

V. Dissemination of Information and Education about
Micromachines
1. Publication of a Public Relations Quarterly Magazine"MICROMACHINE"
2. Transmission of Information via the Internet(website : http://www.mmc.or.jp/)
3. Organization of the 8th Micromachine Drawing Contest
4. Micromachine Seminars held in Japan (in Akita onSeptember 14, 2001, and in Hiroshima on February 8, 2002)
5. Seminar presenting the results of "Research on theApplicability of Emerging Technology in Other Fields toMicromachine Technology in FY 2000" (held on July 16, 2001)
6. Workshop presenting the results of "ResearchSubjects for the 7th Micromachine Technology
Research Grants (FY 1999)" on September 11, 2001
7. The 12th Micromachine Exhibition (October 31 November 2, 2001) held at the Science Museum inKitanomaru Park, TokyoIn this research, surveys were conducted in relation to Micro/Nano-Fusion Functional Expression Technology, a new technology
for use in the new functional expression fields, such as process
technology. As part of this research, a workshop, R&D in the Field ofMicro-/Nano-Fusion, was held.

5