Overview of the Micromachine Center Booth andBEANS Laboratory Booth
1. Micromachine Center Boothcountries. The booth is sponsored jointly by the BEANS
Laboratory and the New Energy and Industrial Technology
Development Organization (NEDO).
The exhibition will be significant as a venue for unveilingthe achievements of BEANS Project activities during the past
year. More importantly, it is an opportunity to promotewidespread awareness of the BEANS Project itself and givevisitors a sense of the dedicated enthusiasm of the participating
researchers. The content of the exhibits will reflect both ofthese objectives.
The green booth will have zone partitions decorated withthe “beans” that are the project’s symbol. In addition, the booth
will be enclosed by five green message stands that present ageneral overview of the BEANS Project. The side of themessage stands that faces the passageway will present anoverview of BEANS headquarters, while the other (inner) side
will provide personal profiles of the researchers involved in theproject and the positioning of the individual research centers inKyushu, Shiga, Tsukuba and Komaba.
The inner walls of the booth will be dedicated to posters
and exhibits with particular emphasis on promoting andoutlining the research efforts of the individual centers: LifeBEANS, Life BEANS Kyushu, 3D BEANS, 3D BEANS Shiga andMacro BEANS.
The main attraction of the booth will be the various exhibits
placed in the very center of the space so as to enable many
visitors to gather around them for viewing. These exhibits will
present the technical details of microfabrication processes thatare difficult to explain using only posters and the like. They will
also include biotech exhibits that are expected to attract many
visitors as a result of TV and newspaper coverage in Januaryand June of this year, and exhibits relating to large-area film
deposition and fibrous nanostructures that were covered in theJuly edition of Nikkei Microdevices. The loom for laboratory usethat is also scheduled to be exhibited is sure to be seen as abreath of fresh air by those in the MEMS industry.
The essential mission of the BEANS Project is to develop
the manufacturing process technologies that will lead to theachievement of next-generation devices, and so the actual workthat researchers are engaged in day and night is fundamental
process development that is by no means glamorous. For thisreason, it is not the essential purpose of the project tointroduce exciting futuristic devices, and unavoidably thecontent tends to consist of unglamorous posters explaining
technical processes. However, nothing will be gained if visitors
do not come to see the exhibition, so we focused our efforts onpresenting in visible form those process development efforts
that are extremely important but essentially difficult to view.
Visitors are invited to come and see for themselves whether ourefforts were in vain or (hopefully) we succeeded beyond ourwildest dreams.
In conjunction with the exhibit content, the 3rd BEANS
Project Seminar will also be held during the afternoon of July 30
at a special venue set up next to the booth. As this will be first
seminar to give a full picture of the BEANS Project, we hopethat all interested parties will attend.

(1) Special 20th Anniversary BoothThis year, to commemorate the 20 t h anniversary ofExhibition Micromachine/MEMS, the Micromachine Center will
provide a special booth that introduces major topics andreviews the history of the event, showing how it grew from theinitial “Industrial Micromachine Exhibition” to become
Micro/Nano 2009, one of the world’s major integrated events inthis field.
(2) MEMSOne BoothThis marks the second year since full-fledged MemsONE
dissemination activities began. In February of this year, version
2.0 was released, with improved analysis capabilities, ease ofoperation and stability.
To encourage dissemination, a special corner will be set up
at this exhibition for consultations, and a version with a limited
number of licenses will be provided at no charge. Detailed
information will also be provided through video screenings,
demonstrations and so on.
(3) MEMS Mall BoothThis booth will offer exhibits relating to MEMS Mall, whichmakes MEMS products and technologies available on theInternet. MEMS Mall opened in October of last year with theparticipation of the member companies of the MEMS Industry
Forum, and starting this April participation was opened to othercompanies for a fee (with companies exhibiting at Exhibition
Micromachine/MEMS given preferential status). The boothfeatures panels showing the products and services offered byMEMS Mall as well as participating companies and methods.
There are also computers that visitors can use to visit the mall.
(4) MEMS Foundry Network BoothThis booth provides information about the MEMS Foundry
Network that is made up of MEMS Industry Forum member
companies. It also features MEMStation, a help desk forsubmitting items for prototyping. MEMStation makes it easy foreven users who do not have manufacturing equipment toconduct MEMS manufacturing.
(5) Standardization BoothThis booth presents the current status of standardization in
the MEMS industry. To promote international standardization
activities in the MEMS industry in a more strategic manner, theMicromachine Center has established a roadmap for MEMS
standardization, and standardization activities are being
conducted in accordance with this roadmap. The boothshowcases the MEMS nomenclature and definitions that havebeen proposed and established, tensile test methods for MEMS
thin membrane materials, standard test specimens for tensile
tests, and fatigue test methods for MEMS thin film materials, inaddition to international draft standards that are currently
being reviewed or are under development.

2. BEANS BoothOne year has passed since Process Integration Project for
Hetero-Functional Integrated Devices (BEANS Project) waslaunched in July of last year. This exhibition marks the fullfledged debut of the BEANS Project at a public venue attended
by interested parties in the MEMS area from Japan and other4