Members' Profiles

Mizuho Information &Research InstituteParticipating company in
the MEMS-ONE project

semiconductor process analysis, electrostaticmagnetic field analysis, optical, electronic, and plasma
analysis, thermal fluid analysis, chemical reaction
analysis, and structural analysis to develop advanced
simulators for MEMS devices that can help developing
this field. It is our goal to lead Japan in performance
simulations for MEMS technology.
This year, a research consortium was formed
through cooperation among industry and academia.
Initiated by the Ministry of Economy, Trade andIndustry and the New Energy and Industrial
Technology Development Organization (NEDO), theMEMS Open Network Engineering System of DesignTools (MEMS-ONE) project will last for three years
until 2006. Our company is participating in MEMSONE as a core business for developing a mechanism
analysis simulator, process analyzing tools, functionenhanced software (bouding and packaging functions),
and a database system.

Endeavors in MEMS
While the U.S. and European nations are currently
at the forefront of the MEMS industry, momentum has
been building recently in Asian countries such as
Taiwan and Singapore toward establishing MEMS as a
new pillar of their industry with national backing. An
increasing number of people in Japan as well arehoping that MEMS technology in the form ofaccelerometers, pressure sensors, and inkjet print
heads will revive Japan’s manufacturing industry. In
light of this, and with the heightened anticipation for
the future market expansion of MEMS, we areapplying our past achievements to integrate four of
our strengths given below in order to provide solutionsfor MEMS development.
• Research: fact-finding studies through collaboration
with a group of experts in economics,policy, and technology• Consulting: drawing on our experience in simulation
techniques and research• Simulation: techniques based on our extensive
achievements in scientific analysis• Software: development, sales, and customization

ContactAtsushi Sato, Researcher
MEMS Project Team
2-3 Kandanishiki-cho Chiyoda-ku, Tokyo
Tel: 03-5281-5303 Fax: 03-5281-5414
E-mail: atsushi.sato@gene.mizuho-ir.co.jp

Future Endeavors
Our objective is to develop advanced simulators forPrimary Achievements

Research• Micromachining Process Consortium (representative: Prof. Kazuo Satoof Nagoya University)• Study on lithography• Study on microchemical processes• Survey on machining precision and product precision in manufacturing technology• Capacitance analysis for MEMS devices• Stress and structural analysis of microstructures, including accelerometersand pressure sensors
Consulting•＆Simulation Microfluid analysis• Polymer structure analysis of resist materials• Wet/dry etching analysis of microstructures

Software• Designing Microstructures
Anisotropic etching simulator
Plasma etching simulator• Lithography
Optical, electron beam, and X-ray lithography simulators• Microfluid analysis
3D fluid analysis system• Electronic device analysis
Process device simulator

7

A microneedle manufactured byanisotropic etching (MICROCAD)

Pit pattern in an optical disc formedby direct electron beam writing

Free surface analysis