MEMS Foundry Service at the National Institute of Advanced Industrial Science and Technology
Ryutaro Maeda
MEMS and Packaging Group, Advanced Manufacturing Research InstituteNational Institute of Advanced Industrial Science and Technology
generation high-frequency communications, optical
MEMS for use in optical communications and elements
of information presentation, and fluid MEMS used inbiotech analysis. These technologies have attracted
much attention for their ability to make Japan’s
industrial goods sophisticated and differentiated. With
the aim of applying MEMS to other fields, which has
not been possible due to the scarcity of technicalexperts, our facilities have also contributed to training
advanced and creative experts. In collaboration with
the nonprofit organization Precision Engineering andScience Network, we have launched a hands-on MEMS
course that is not merely a classroom lecture but
focuses on design simulations and the practice ofactual process measurements. The course has drawn
praise from experts in many fields of the private
sector.
Our facilities comprise primarily a highaccelerating voltage electron beam lithography device
as a machining tool for use in nanoregions, a deepfocus stepper for MEMS designed to print patterns on
multilevel structures with high precision, a high-aspectratio ICP etcher having numerous uses in MEMS, and ananoimprinter for low-cost industrial manufacturing ofnanostructures. In addition to these specialized
devices, the facilities include machining and measuring
equipment commonly used for MEMS to provide
everything necessary in one environment to support
the rapid development of prototypes. We are also
working to prevent reductions in service features dueto the limited number of available government
workers.

Outline
As part of the “Focus 21 Project” under theMinistry of Economy, Trade and Industry, the NationalInstitute of Advanced Industrial Science andTechnology (AIST) completed construction of the“MEMS Business Building” that makes available MEMS
production facilities to promote the industrialization ofMEMS. Operations at the building began in March2004.
As MEMS foundry services have become more
popular, the private sector has enhanced the services
available for producing device prototypes with somepotential for mass-production. At present, however,the private sector cannot immediately handle
prototypes required in research and development or
prototypes of diverse devices with limited productionthat are the niche of small and medium venturebusinesses. For this reason, AIST is serving as acollaborative research base for providing a prototype
service for devices that are essential in research anddevelopment but a high risk for private businesses.
These facilities coordinate the research potential
and technological seeds in MEMS possessed by AIST
with the technology and needs of industry. It is hopedthat these facilities will bring together the intellectual
minds of industry, academia, and government in thefield of MEMS, strengthen cooperation, and nurture
creative personnel. The facilities are now actively
operating as a control base for MEMS R&D.
Features of the Foundry Service
To date, MEMS technology has beencommercialized in the forms of medical andautomotive sensors, inkjet print heads, and mirrored
reflection projectors. Soon sensors and actuatorsdeveloped with MEMS technology are expected tohave applications in optical communications andmobile equipment, computer peripherals, portable
power supplies, and biotech analysis. MEMS hasreached the status of a next-generation technologythat can revitalize Japan’s industry.
We have identified the need to improve ourdeveloping speed and to reinforce proprietor
technologies that cannot be immediately imitated,particularly material technologies that require lengthy
research and development. At AIST we are rapidly
developing next-generation devices through close
collaboration with industry, making use ofsophisticated thin film material technology used insensors and actuators and 3D micromachinetechnology for silicon, as well as our own cultivatedglass and carbon. Some of our primary areas ofdevelopment include RF-MEMS for use in next-An optical scanner using ferroelectric material (left)
and an RF switch driven by a low voltage

A nanoimprinter (left) and a nanoimprinted glass
structure4