Members' Profiles

Toshiba
Corporation
1. Achievements of Micromachine Technology
Under the Industrial Science and Technology Frontier Program,Toshiba, along with Denso and Sanyo Electric, has developed an"Experimental Wireless Micromachine for Inspection on Inner Surfaceof Tubes" for applications in confined areas like the narrow piping inelectric power plants. This "microrobot" can move along a pipe having adiameter of 10 mm, while transmitting images ahead and debris inside
the pipe. The microrobot is driven by energies received wirelessly fromexternal microwave and laser sources.
In this project, Toshiba was in charge of developing a "CCD
Microvision System" to be mounted on the front of the microrobot. The
microvision system comprises a color video camera with built-in
focusing mechanism mounted on a 2-DOF universal head, all powereddriven, in the body-size of 25 mm in length and 8.9 mm in diameter. In
developing this system, we achieved various advances in camera size
and image quality that have not been paralleled under such restrictedenergy conditions and transmission capacity.
We also developed various element technologies necessary todevelop this microvision system, including micromachining, highdensity three-dimensional packaging, electrostatic micromotor, and thincatadioptric system technologies. We further developed assembly
technology for integrating the above components and a method forconstructing images to support the small transmission capacity, alongwith technical development on systematization.
25mm

Nobuyuki Toyoda
Deputy Director
Corporate Research & Development Center

3D Endoscope

Stereoscopic Micro Vision
CCD

LSI
Electrostatic Actuators

Fig.2

micro-sized CCD unit and electrostatic linear motor mounted in themicrovision system, it is possible to construct a stereoscopic camerathat can fine-tune the three-dimensional effect and should contribute
greatly to examinations and surgery.
We also developed new systems applying some of the element
technologies that were developed in the microvision system for the trial
production and verification of practical devices. In Fig. 3, theelectromagnetic micromotor has been applied to an in-pipe inspection
robot with wheels. An electromagnetic motor having a diameter of 5
mm is mounted on a 7-mm diameter case for a 400,000-pixel CCD.
Observing the inner pipe walls are performed using a focusing
mechanism formed of a shape-memory alloy (SMA). The robot canobserve debris as small as 20µm in a pipe with a minimum diameter of20 mm. Powered by wiring, the robot can be used in environments inwhich microwaves or lasers cannot.

f 8.9mm

Separable Body Type Polymer Body TypeElectrostatic Wobble Motor,
f 2.5mm, f 6.5mm,

3D Packaged LSI Module,
4.435.2311.5mm
CCD, 1.6mmu, 100Kpixels

Catadioptric Lens,f 2.5mm31mm

Electrostatic LinearMotor, 4mmu38mm

Fig.1

2. Future Activities
In addition to mounting the microvision system on the in-pipe
inspection microrobot, we hope to apply this system to new applications
using the entire system or individual element technologies. The first
applications that come to mind are in the security and medical fields. In
terms of the former, the development of information network services ashousehold and social infrastructures is likely to make wireless imagetransfers from remote locations possible in the near future. The
microvision system is expected to have few restrictions in the numberand location of installation because of its ability to freely change viewing
angles and the fact that it has 1/1000 the volume of conventional devices.
In the medical field, it is likely that the microvision system can beapplied to examination apparatus used in laparoscopic and endoscopic
surgery, which are now receiving much attention as minimally invasive
operating methods that allow quick recovery period. By combining theHigh-output motor and planetary wheel mechanism

CCD camera (7 mm in diameter)

Electrostatic motor
SMA focusing mechanism

Fig.3

3. Future Stances
Other conceivable applications for the microvision system include
PDAs and robot eyes. We plan to continue these studies as deemed
appropriate for satisfying the needs of society.

13Hitachi, Ltd.
1. The Challenge of Micromachine Technology
Hitachi, Ltd. manufactures a comprehensive array ofelectrical machinery and appliances, such as nanometersized electronic devices, consumer products, power andenergy systems, and industrial machinery. We supply
products and services in a wide range of fields and areimplementing projects on a global level.
Micromachine technology is a cutting-edge basic
technology that will shape the 21 s t century. The
Mechanical Engineering Research Laboratory is chiefly
responsible for R&D on micromachines at Hitachi, Ltd..
The entire research laboratory is working together on
this research and development with the aim ofincorporating our basic technologies in mechanicalsystems as a base to provide the best customer solutions
in such fields as medical and human-care, theenvironment, information, and communications.
2. Development of Micromachine Technology
Hitachi, Ltd. participated in the planning for"Micromachine Technology," part of the Industrial
Science and Technology Frontier (ISTF) Program
sponsored by the Ministry of Economy, Trade, andIndustry that was completed in March 2000, and oversaw
research and development on element technologies andsystem integration technology for developing a
microfactory, the concept of which is a micro-sized
system for producing small numbers of many products.
The anisotropic wet etching process for single-crystal
silicon, which Hitachi, Ltd. has developed over manyyears, is gradually having a rippling effect on the creationof micromachines, which will benefit society.
2.1Achievements of the Industrial Science andTechnology Frontier Program
In overseeing the research and development on a
microfluid operation technology, we developed amicrofluid operation device for supplying corrosive
working fluid for micromachining and a holding device
End ofmicroarm

Hiroshi Ohki
General Manager
Mechanical Engineering Research Laboratory

for assembling microparts. By incorporating surface
treatment and forming techniques on a micrometerorder, we developed a microfluid sealing method forrotary driven trochoid and scroll pumps. In this way, weachieved a micro size while maintaining high output.
These features were applied to a fluid pump for
supplying fluid and a vacuum pump for holding
microparts. Both devices were then incorporated into a
trial microfactory system to verify the processing andassembly operations of a microgear. Fig.1 shows aholding device (vacuum chuck; outer diameter of 7mm
and length of 26mm) mounted on the end of a microarm(manipulator) used in assembly operations. The holding
device conveys a microgear having a diameter of 2.6 mm.
2.2Achievements in Silicon Micromachining
Technology
We applied silicon micromachining technology to thedevelopment of a small sized water quality monitor thesize of an A4 sheet of paper (1/100 the conventional
volume). This device contributes to human safety andhealth management by automatically measuring residual
chlorine and the like in water pipes for generalhouseholds that have extremely limited installation
space. The primary feature of this device is that itemploys microfluid channels produced by siliconanisotropic wet etching (see Fig.2).

Pad

Absorbing cell
10mm

Motor
Microgear

Mixer

Fig.2 Microfluid circuit for a small sized water quality monitor

Pump

3. Future Stances
In our future challenges, we would like to apply theachievements of the Industrial Science and Technology
Frontier Program to the field of micro total analysis
systems (µTAS) to develop an analyzer for medical andenvironmental applications.

Conveying pallet
5mm

Pad

External view ofvacuum chuck

Water inlet

1mm

Microgear chucked by
the holding device

Fig.1 Vacuum chuck and operation of chucking microgear

14