Activities of the MEMS Industry Forum
1. 16th International Micromachine/Nanotech Symposium~MEMS World~

2. MEMS Industry Forum Workshop
The MIF Workshop was held on July 30 (Fri) as Part II of
the TIA-NMEMS Symposium. The Workshop offered an
opportunity to distribute information on the activities of the
MIF and to promote an exchange of opinions.
This year’s Workshop was given the subtitle “Preparatory
Activities for Implementing a Micro/Nano R&D Center” andserved to introduce the MIF’s various activities within thecontext of TIA-NMEMS. The MIF reported on industrial trends
and trends in international R&D and international
standardization, as well as its efforts to promote MEMS
industrialization including activities related to personnel
training, foundry services, and the MemsONE design tool. As
with Part I of the Symposium, the conference area wassubstantially full for the Workshop, reflecting a heightenedinterest in the MEMS industry, trends in MEMS R&D, andefforts to build the R&D center at Tsukuba.

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The 16 International Micromachine/Nanotech Symposium
was one of the current events held at MicroNano 2010. The
Symposium took place on July 28, 2010 (Wed) in Micro/Nano
Conference Area A of Tokyo Big Sight, East Hall 5. The
audience filled most of the seats in the conference area andcontributed to a lively Q&A session.
In order to allow visitors sufficient time to attend the
Symposium and still take in the exhibitions, the Symposium waslimited this year to an afternoon program, rather than runningthe entire day, and featured six lectures including the keynote
speech.
The 16th International Micromachine/Nanotech Symposium
adopted the theme “Green Innovation Explored by Ambient
Devices” and included presentations from international
research institutes overseas detailing their latest results in thefield of sensor networks, which is attracting a lot of attention
and relates to the G-device Project. For the keynote speech, we
turned to Isao Shimoyama, professor in the Graduate School ofInformation Science and Technology at the University of Tokyoand chairman of the International Exchange Committee
established by the MEMS Industry Forum (MIF). As in previous
years, simultaneous interpretation was provided.
Other lectures were given by representatives of thefollowing member organizations.
• IMEC-NL of the Holst Centre (the Netherlands)• CEA-LETI (France)• Fraunhofer ENAS (Germany)• BSAC (America)• Dalsa Semiconductor (Canada)
According to a questionnaire distributed to audience
members, most respondents indicated that they were either“mostly satisfied” or “satisfied” with the contents of thelectures, and the evaluations were thought to be consistent.
There were also a few requests in the questionnaires from
respondents who wished to continue the discussion in a
separate room after the symposium in order to ask questions ingreater depth, which is a matter to be considered for
subsequent events.
We will work to incorporate your suggestions in a timely
manner in order to provide a productive program next year.

3. International Exchange: Visits to LETI and
Fraunhofer and Participation in Nano Korea
As part of its efforts to promote international exchange, theMIF visited France’s LETI and Germany’s Fraunhofer ENAS and
IPMS in June to participate in an exchange of views on the
MEMS industry. In addition, the MIF participated as an
exhibitor at the Nano Korea exhibition held in Korea in August
this year.

The Nano Korea exhibition hall

4. Investigative Committee for an Open Innovation Center
This fiscal year, the MIF established the Investigative
Committee for an Open Innovation Center under the Industrial
Exchange Committee. The Investigative Committee initiateddiscussions on the best course of action for implementing ananotech center at Tsukuba in order to strengthen Japan’sinternational competitiveness in the MEMS industry. The
Investigative Committee will also serve as the TIA-NMEMSWorking Group that participates in the Executive Council for
the Tsukuba nanotech center so that the results of discussions
conducted in the Investigative Committee are reported directly
to the Executive Council.
The first Investigative Committee meeting held in July and asubsequent council meeting revealed some specific challenges
to implementing the center. We intend to continue thisthorough investigation in order to help make the Tsukuba
nanotech center a reality. Progress in the investigation will bereported on the MMC’s Web site (Japanese only).

Speech given by an IMEC researcher3