MMC Activities..............1
TOPICS.......................6
Members’ Profiles .........7
Worldwide R&D ............8

MMC Activities

The Research Reports under the 8th MicromachineTechnology Research Grant
This research grant program started inviting applications in 1993 as a part of the independent activities of MMC.
The purpose of the program is to assist college and university staff engaged in basic research on micromachines, andto promote further development of micromachine technology and communication between academics and people in
the industrial world.
Among the themes selected for the eighth (2000) research grant, six 2-year research projects carried over fromfiscal 1999 have been completed.
The following are the summaries of the research results.

No.

Subjects

Leader and
Co-Worker

Affiliations

PeriodCarried-Over Projects Granted for Fiscal 1999
1

Development of noninvasive single
cellmanipulator
utilizing Dr. Masayuki Yamato
temperature-responsive polymer

Assistant Professor, Institute of Advanced
Biomedical Engineering and Science,
Tokyo Women’s Medical University

2 Years2

Construction of micro-lens array
Prof. Yoshihiro Ito,by micro-fabrication of stimuliDr. Eng.
responsive gel

Project Leader, Regenerative Medical
Bioreactor Laboratory, Kanagawa Academyof Science and Technology

2 Years

3

Professor, Department of Materials
Study of novel polymer microProf. Kazuhiko Ishihara,
Science, Graduate School of Engineering,
actuator powered by enzymatic
Dr. Eng.
The University of Tokyo
reactions of biomolecules

2 Years

4

Catheter tip position sensing
Dr. Yoichi Haga
system using MI sensor

Research Associate, Graduate School ofEngineering, Tohoku University

2 Years

Assoc. Prof. Gen Hashiguchi, Associate Professor, Faculty of Engineering,
Dr. Eng.
Kagawa University

5

6Electrical, thermal and mechanicalProf. Hiroyuki Fujita,
properties of nano mechanical
Dr. Eng.
structures
Dr. Manabu Ataka

Assistant, Institute of Industrial Science,
The University of Tokyo

Prof. Takehiko Kitamori,
Dr. Eng.

Professor, Department of Applied
Chemistry, Graduate School of Engineering,
The University of Tokyo

Dr. Hideaki Hisamoto

Lecturer, Department of Applied
Chemistry, Graduate School of Engineering,
The University of Tokyo

Integration of chemical systems
toward artificial organ

Internet Home Page : http://www.mmc.or.jp/

Professor, Institute of Industrial Science,
The University of Tokyo

2 Years

2 YearsDevelopment of a Noninvasive Single Cell Manipulator Utilizing a TemperatureResponsive Polymer
Masayuki Yamato, Assistant Professor, Institute of Advanced Biomedical Engineering and Science,
Tokyo Women's Medical University
1. Introduction
Along with the recent miniaturization of physical objects insuch fields as medicine, engineering, agriculture, and biology,
there is an increased demand to establish methods for working in
microscopic environments, such as operating and processing
methods. With the developments in biotechnology over the past
several years, there is an increasing need for cell microinjection
and micromanipulation technologies in particular. The objectiveof this study is to provide an entirely new concept of
micromanipulation aimed at greatly improving cell operability andachieving low invasiveness by developing a micromanipulation
technique that uses temperature responsive polymers.

Above 32: : hydrophobic Promotes cell attachment
Manipulator tip
PIPAAmTarget cell

Below 32: : hydrophilic Promotes cell detachment

2. Temperature control for cell attachment anddetachment

Manipulator tip

In this study, a temperature-responsive polymer,
polyisopropylacrylamide (PIPAAm) was grafted onto the end
surface of the manipulator. The properties of the polymer
changes in response to temperature. By controlling temperature
with a small Peltier device, the property of the PIPAAm was
switched between hydrophilic and hydrophobic to control cellattachment and detachment (Fig. 1). The cell-trapping domain
was ordered in an array by controlling the thickness of thetemperature-responsive polymer layer on the order ofnanometers and ablating the layer with UV excimer laser (Fig. 2).

Target cell
PIPAAmFig. 1 Single cell manipulator employing atemperature-responsive polymer

3. Conclusion
It has been pointed out that cells can be damaged throughsingle-cell traps and other manipulation using physicaltechniques, such as optical tweezers and electric fields. The
technique for manipulating single cells used in the present
study, using temperature changes to control the chemical
nature of the manipulator surface, was found to be less invasive
than existing methods. This technique is expected to havepractical applications once the switching speed is improved.

Fig. 2 Array of orderly arranged hepatocytes

Construction of Micro-Lens Array by Micro-Fabrication of Stimuli-Responsive Gel
Yoshihiro Ito, Project Leader, Regenerative Medical Bioreactor Laboratory,
Kanagawa Academy of Science and Technology
A gel that expands and contracts in response to physicalstimuli, such as thermal, electrical, and optical variations, andchemical stimuli, such as pH and chemical substances, has begun
to attract much attention for its use as a soft functional material.
Now we have discovered a method enabling micromachining of
this type of stimuli-responsive gel. The objective of this study is to
produce a compound-eye lens as an application of the gel. Whilethe use of this gel for optical lenses has been considered before,
the greatest weakness of this substance is its lengthy stimulationresponse time. For example, a gel having a size of centimeters
requires several hours to respond to stimulation. However, this
response time can be shortened when reducing the size tomicrometers. In this study, we designed a compound-eye gel
micro-lens array with this gel, as shown in Fig. 1. We attempted toform the gel in a convex shape between micro-patterned ITO(indium tin oxide) transparent electrodes, controlling the
thickness and focal length of the lenses individually by voltage.
Micro-lenses having a diameter of about 500 micrometers werearranged at regular intervals. Variations in response to pH andelectrical stimuli were observed within 1 second. Fig. 2 shows animage acquired using this micro-lens array. A toy dinosaur wasused as the subject of imaging. Variations in focal length inresponse to stimuli were observed from pH 7 to pH 2.

ITOelectrodes
Glass
Gel

Fig. 1 Principles of the compound-eye systemhaving an array of gel micro-lenses

Focal length

pH7

pH2

1100µm560µm

Fig. 2 An image taken by the compound-eye micro-lenses showing
variations in focal length in response to pH stimuli

2

Study of Novel Micropolymer Actuator Powered by Enzymatic Reactions of Biomolecules
Kazuhiko Ishihara, Professor, Department of Materials Engineering, School of Engineering,
The University of Tokyo
1. Introduction

deswelled in this system. Hence, we achieved a polymer actuator capable ofsupplying chemical energy using the energy source of glucose was achieved.

The central issue in how to achieve autonomous operation of
micromachines in a living organism is how to supply the energy thatdrives the micromachines. In such an extremely small environment,
there is no space to allocate for a battery or the like, nor is it possible
to supply energy from an external source. In this study, chemical
substances existing in the living organism were employed as polymer
actuators by varying their concentrations. The idea is to produce
mechanical energy from the chemical substance, a process very similar
to the mechanism that living system use to produce energy.

20
10
0

Fig. 1 Dependence of the volume of a cross-linked MPC polymer gel on alcoholcomposition Ethanol composition (from left): 0, 20, 40, 60, 80, and 100%

2. Developing a Polymer Gel that Responds to Alcohol
Phospholipid bilayers forming biomembranes have a thickness of 50 nm.
Though they are extremely thin, they have many functions. Polymers with aphospholipid polar group in the side chain, 2-methacrylooyloxyethyl
phosphorylcholine (MPC) polymers, show excellent properties as a new
biomaterial. Further, it was discovered to control the volume of the polymer
reversibly through changes in concentration based on the peculiar solvation
effect of a phospholipid polar group (Fig. 1). The polymer was repeatedlyswelled and deswelled by increasing and decreasing the alcohol concentration(Fig. 2). This indicates that it is possible to manipulate the volume of a bioresponsive polymer gel by causing a reaction with components in an MPC
polymer gel to selectively fix enzymes that generate alcohol.

Percentage
of volume 1.0
change0.8

Swelling

0.6
0.4
Deswelling

0.2
0.0

3. Enzymatic Reactions Produced by Alcohol andthe Swelling Function of Gel

5
1015
No. of repetitions
O=

It was attempted to generate movement in an MPC polymer gel by
combining enzymatic reactions using alcohol compounds that exist in the
body. Using an EMP cycle, it was generated ethanol with pyruvic aciddecarboxylase and alcohol deyhdrogenase using pyruvic acid generated fromglucose as the initial substance. It was confirmed that the MPC polymer gel

0

CH3
+
COOCH2CH2OPOCH2CH- 2N (CH3)3O

20
Phospholipid
polar group varied
by solvation

Fig. 2 Reversible volume changes of a cross-linked MPC polymer gel in an
aqueous solution of pure water and 60% ethanol solution

Catheter Tip Position Sensing System Using MI Sensor
Yoichi Haga, Research Associate, Graduate School of Engineering, Tohoku University
1. Introduction

3. Conclusion

Minimally invasive examinations and treatments are performed byinserting a small instrument, such as an endoscope or catheter (a polymer
tube having a diameter of about 0.3-3 mm) into the patient's body. Whilefluoroscopy is currently employed to determine the position of the catheter
tip, this method provides only two-dimensional data, which makes fordifficult determinations, and moreover produces inadequate image
resolution. The capacity to determine the position and attitude (directionin which the tip is pointing) of the catheter tip three-dimensionally and inreal time will benefit catheter navigation.
A practical tip position detecting system that employs micro-coils has
already been developed. However, we are striving to develop a highperformance 3-axis micro-sensor that can be mounted on a catheter using
micro-magnetic vector sensors. These sensors are based on a new principleof the magneto-impedance effect. The system detects exchange magnetic
field emitted by an external coil and geomagnetism using three sensors
mounted on the tip of the catheter, as shown in Fig. 1.

If we liken this sensor system to a car navigation system, the catheter
tip corresponds to the car and the blood vessels to roads. By making thissystem practical, it is expected that minimally invasive therapy will becomesafer and more reliable, enabling us to perform examinations and treatment
not possible before. Applying the system to an endoscope is also anticipated.
3-axis MI sensor

Catheter

Patient
Computerx
3D
angiogramzyData of 3D
angiogramCatheter

Excitation coil
Signal processor

2. Developing a 3-axis MI Sensor System
In this sensor, a coil generating a bias magnetic field was wound aroundan amorphous wire having a diameter of 30µm. The sensor generates a
voltage between the ends of the wire that varies according to the strength ofthe magnetic field. Three of the sensors were arranged orthogonally to one
another in a 2-mm square column and achieved a positional resolution lessthan 1 mm and an angular resolution of about 1 degree at the point of
position and attitude measurement. In order to combine the positions
detected by the three sensors precisely, the sensors were mounted on apolymer which has an electrode patterns, as shown in Fig. 2.
To present 3-dimensional position and attitude data to the doctor, one
could obtain and store three-dimensional blood vessel images in a computer
prior to operation using contrast medium CT or the like and superimpose thethree-dimensional position and attitude of the catheter tip onto the blood vessel
images displayed on the screen. The current display system is configured of athree-dimensional blood vessel model image in a computer, as shown in Fig. 3.
Measurement signals are input into the computer while calculations are
performed to display superimposed position and attitude data in real time.

Fig. 1 A catheter tip position/attitude sensor system
MI Sensor

throughhole

MI Sensor

electrode
1mm

Fig. 2 3-axis micromagnetic sensor

3

Fig. 3 Catheter tip position /attitude display system

Electrical, Thermal, and Mechanical Properties of Nano Mechanical Structures
Gen Hashiguchi, Associate Professor, Faculty of Engineering, Kagawa University
Hiroyuki Fujita, Professor, Institute of Industrial Science, The University of Tokyo
Manabu Ataka, Assistant, Institute of Industrial Science, The University of Tokyo
1. Introduction

bio-nano objects, such as DNA, thereby necessitating a system capable ofroutinely measuring such objects. To aid in these measurements, we aredeveloping integrated microactuator devices called nano-grippers andnano-testers. Please take a look at these devices, as well.

To achieve practical nanotechnology, which has garnered muchattention in recent years, it is essential to establish a method of
evaluating small matter on the nano order. In this study, weinvestigated methods for measuring electrical, thermal, andmechanical properties of nano-size matter using micromachinetechnology. There are two conceivable methods for measuring theproperties of nanostructures. One method integrally forms ananostructure with an approachable electrode structure. The othermethod uses multiple nanoprobes to probe nanostructures. The
following is a report of these two methods as studied in our research.

Si wire20ku x15,000

1 µm 020203

Magnified view
Actuator

2. Four-Terminal Freestanding Silicon Nanostructure
We produced a four-terminal nanostructure for measuring thethermal response of silicon nanostructures. Fig. 1 shows an SEM
photograph of this element. The cross-section of the wire is shaped as an
isosceles triangle with a width of about 0.5 µm and a length of 4 µm. Fig. 2
shows the inverse relationship between input power and the resistancevariations of the element. We can see there is a sharp peak in theresistance at a particular input power. Fig. 3 shows the properties of thiselement as a flow sensor and its frequency characteristics, illustrating thatan air flow can be measured even by such a nano scale element.

20ku x2,000

1 0µm02020120ku x1,000

1 0µm

011222

Fig. 1 SEM photo of a four- Fig. 4 An integrated electrostatic
terminal free-standing
actuator type mechanicalsilicon elementnanostructure testing device
Electrical resistance [Ω]1000

3. Silicon Nanostructure Testing Device Using
an Integrated Microactuator Element

Power [1/W]100
1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10

We developed a process for integrally forming a silicon wire
structure with an electrostatic actuator in order to study themechanical properties of nanostructures. Fig. 4 shows an SEM photo ofthis device. This device is manufactured with a three-layer SOI wafer,
wherein the electrostatic actuator is formed by the middle SOI layer
and a nanostructure having an electrode terminal is formed by the top
SOI layer. A special technique is implemented in this process to
produce the nanostructure in freestanding form.

4. Conclusion
This was a report on nano-scale measurements using micromachining
technology. The present study was limited to devices for measuring siliconnanostructures. However, there has recently been increasing interest in

5
4.5
4
3.5
3
2.5
2
1.5
1
0.5
0

Output [dB]

Voltage [V]Fig. 2 Resistance variations in the free-standing nano wire

2
0.1
0
-2
-4
-6
-8
-10
-12
-14
-16

1

10

100

Frequency [kHz]

0

10

20

30

40
50
60
Velocity [m/s]

70

80

90

100

Fig. 3 Characteristics of a flow sensor employing a free-standing silicon nano wire

Integration of Chemical Systems toward Artificial Organs
Takehiko Kitamori, Professor, Department of Applied Chemistry, School of Engineering, The University of Tokyo
Hideaki Hisamoto, Lecturer, Department of Applied Chemistry, School of Engineering, The University of Tokyoa simple combination of macroscale reaction processes, the same series on a
microchip only took 30 minutes. This indicates that by introducing a sugar
into an artificial organ, such as a microchip, a colored chemical species isefficiently produced through various chemical processes.

1. Introduction
It is believed that chemical conversion processes performed by organs,including metabolism, detoxification, and bio-synthesis, consist of cell response,
enzymatic reactions, synthesis, and the like that progress very efficiently as aseries of reactions within micro spaces, such as capillaries and cell surfaces.
We concluded that we could use microchannels, having a width of several
tens to several hundreds of microns and manufactured on a microchip, in
place of capillaries and accumulate elementary processes of organs, such ascell response, enzymatic reactions, and synthesis to achieve an efficientmodel of an artificial organ on a microchip, which would transcend a simple
combination of macroscale reaction processes. The objective of this study was
to detect multiple stage chemical conversion processes of sugar by integratingcell response, enzymatic reactions, and synthesis.

3. Conclusion
The integration of elementary processes in a micro space, as describedabove, is extremely important to the realization of organ functions andother advanced biological functions on an artificial device. In the future wehope to be able to construct even more complex biological function
mimicking devices by integrating many technologies, such as molecular
fixation and a technique for fabricating functional separation membranes
on a single chip. We also hope to apply this new knowledge to reproductionengineering and artificial organ development.

2. Integrating Modeled Chemical Reactions of an
Organ on a Microchip
Fig. 1 shows our designed microchip, which comprises a cell culturebath, enzymatic reaction section, synthesis section, and sensing section.
When lipopolysaccharide is introduced from an external source as a sugar andreacted with microphage, nitric oxide (NO) is produced. The generated NO is
immediately converted into NO2 and NO3 by a reaction with water. Of these,
NO3 is converted into NO2 by an enzyme introduced through a separate
channel and subsequently generates a colored chemical species through areaction with a mixing reagent introduced through the next channel. Hence, it
is possible to confirm a series of chemical conversion processes by detecting
this colored chemical species through a thermal lens microscope.
While it required half a day to detect the above series of reactions using

EnzymeEnzymatic reaction

Synthesis

Cell culture/
response
Sugar

3cm

Mixing reagent
7cm

Product
Detection

Fig. 1 Integrating Organ Chemical Reactions on a Microchip

4Activities of the Micromachine Center in Fiscal 2001
I. Investigation and Research on Micromachines
1. R&D on a Micro-Fluid System for the High Speed
Measurement of Dioxins (Commissioned by the New
Energy and Industrial Technology Development
Organization [NEDO])

7. Research Related to the Creation of Systems Incorporating
Next-Generation Micromachine Technology (Commissionedby the Mechanical Social Systems Foundation)
This research project was begun in Fiscal 2000. This survey has
thus far shown that the application of micromachine technology innational projects conducted before and during Fiscal 2000 haveenabled the achievement of significant results in the technologicaland industrial fields. In addition to focusing particular attention on
certain fields, through this research we have been able to clarify thepractical role required of government, academia, and industry and toformulate strategies for R&D in the micromachine technology field.

This project applies a branch of micromachine technology calledmicro-fluid system technology to methods for analyzing dioxins inexhaust gas. The goal of the project is to develop micro-fluid element
technologies. Research in Fiscal 2001 included the examination of
micronized dioxin pre-treatment systems and micro-device
specifications; and the testing and evaluation of unit operation
devices (absorption, extraction, and condensation) and cooling andtemperature distribution measuring devices (regarded as structuralrequisites in micro-fluid systems). R&D was also conducted in areas
related to processing technology, such as microchannels and microfluid connectors.

II. Collection and Provision of Micromachine Information
Information and documents on micromachines in universities,
industries, and public organizations both in Japan and overseas havebeen collected, combined with survey results compiled anddocuments produced by MMC, and made freely available in the MMC
library.

2. Investigation and Research into the Applicability of
Basic and Sprout Technologies in Other Fields to
Micromachine Technology

1.
2.
3.
4.

Maintenance and Expansion of the MMC Library
Publication of a Micromachine Periodical
Publication of a Newsletter
Database Construction and Data Management
System Operations(indexed full-text retrieval)III. Exchange and Cooperation with Worldwide
Organizations Involved with Micromachines
1. Providing Research Grants for R&D on MicromachineTechnology (3 new themes and six themes carriedover from FY 2000)
2. Participating in the 7th Micromachine Summit andHolding Overseas Seminars(1) Participated in the 7th Micromachine Summit(Freiburg, Germany: April 30 - May 2, 2001)(2) Held European Seminars in Finland and Greece in June 2001
(3) The 7th International Micromachine Symposium(October 31 - November 1, 2001) held at the Science
Hall, Science Museum in Kitanomaru Park, Tokyo
IV. Standardization of Micromachines
1. Research and Development for Standards "Standardizationof Quality/Characteristic Measurement/Evaluation forMicromachine Materials" (Commissioned by the New
Energy and Industrial Technology Development
Organization [NEDO])This joint study between industry and academia is aimed at
encouraging the establishment of theories in micro and nano scienceand engineering and probing for technological seeds necessary forpromoting the merging and application of micro andnanotechnologies. Research on the following two themes was begun
in 2001.

(1) Research Related to Cell Manipulation
Discussions will be held among specialists in a diversity of fields
focusing on the methodology, significance, and future direction of cellmanipulation, at the same time as technology streams are merged andintegrated. Thus formulated, this new national research project
proposal will aim to raise the curtain on nanotechnology, the nextchallenge in the field of micromachine technology.

(2) Research Related to the Field of Nano-Optics
A committee to examine research in the field of nano-optics wasestablished and is ready to begin its investigative activities.

3. Research on Constructing a System for Evaluating
the Micromachine Market
To upgrade statistics on micromachine technology basedindustries, a survey of market research, data/sampling, and evaluation
methods was conducted.

4. Investigation of R&D Trends in Micromachine Technology
in Japan and Abroad (Collation and Analysis of the Latest,
Detailed Information from within Japan and Overseas)
5. Research into the Concept of Foundry Network System
Micro-/Nano-Production Technologies (Commissionedby the Mechanical Social Systems Foundation)

The three-year plan for the standardization of quality/characteristic
measurement/evaluation for micromachine materials reached its final
year in 2001. Round robin testing (RRT) was conducted in the tensile
testing of various types of thin-film materials, which was the final
objective of the project. This completed the R&D conducted to obtainthe technological data required for submitting proposals forinternational standardization.

This research forms the foundation for the industrialization of
micro-/nano-technologies; thus, the potential of foundry network
system micro-/nano-production technologies has been examined, an
investigative committee established, and the following objectives
achieved.

2. Investigation and Research into MicromachineStandardization
The Micromachine International Standardization Forum,
organized mainly by the standardization committee, was establishedon the Internet as a method for promoting international
standardization initiatives. As the standardization of evaluation
standards for measurement WG has been promoted in theInternational Standardization Forum, an abstract (in English) is being
prepared for inclusion in the MCC Technical Report "Measurement
Evaluation Methods for Micromachine Technology." The specialist
term WG was also coined following Forum discussions.

(1) Demonstration of the significance of micro-/nanoproduction technologies and the necessity forindustrialization and foundry services.
(2) Survey of the situation regarding foundry services
overseas and the industry-government-academia
relationship in Japan(3) Questionnaire conducted regarding demand forfoundry services(4) Reconfirmation of the primary purpose of foundries
from the results of the survey on the current
situation of foundries and issues identified.
(5) A concept proposed for a foundry network system(FNS) that is consistent with the current situationin Japan and which is also necessary if Japan is tocontinue leading the world in this field.
(6) Presentation of the practical roles required ofindustry, government, and academia in FNS.
6. Research Relating to Functional Expression andProcess Technology in the Field of Micro-/Nano-Fusion(Commissioned by the New Energy and Industrial
Technology Development Organization [NEDO])

V. Dissemination of Information and Education about
Micromachines
1. Publication of a Public Relations Quarterly Magazine"MICROMACHINE"
2. Transmission of Information via the Internet(website : http://www.mmc.or.jp/)
3. Organization of the 8th Micromachine Drawing Contest
4. Micromachine Seminars held in Japan (in Akita on
September 14, 2001, and in Hiroshima on February 8, 2002)
5. Seminar presenting the results of "Research on the
Applicability of Emerging Technology in Other Fields to
Micromachine Technology in FY 2000" (held on July 16, 2001)
6. Workshop presenting the results of "Research
Subjects for the 7th Micromachine Technology
Research Grants (FY 1999)" on September 11, 2001
7. The 12th Micromachine Exhibition (October 31 November 2, 2001) held at the Science Museum in
Kitanomaru Park, Tokyo

In this research, surveys were conducted in relation to Micro/Nano-Fusion Functional Expression Technology, a new technology
for use in the new functional expression fields, such as process
technology. As part of this research, a workshop, R&D in the Field ofMicro-/Nano-Fusion, was held.

5

TOPICSThe 8th Micromachine Summit
The 8th International Micromachine Summit was held for threedays, from April 30 to May2, 2002, in Maastricht, the Netherlands, justnear the border of the co-host nation, Belgium. The Summit, chairedby Professor Albert van den Berg from the University of Twente
MESA + Research Institute and Mr. Kris Baert from IMEC Belgium,
brought together high level experts from around the world to discuss
the present status and future outlook for micromachine technology.
The common topics at the Summit were the fundamentals, theapplications, the industrialization, and the education of micromachinetechnology. And this summit put particular emphasis' on technicaltransfer and industrial infrastructure, the rapidly advancing field ofbiotechnology and nanotechnology such as lab-on-a-chip.
The Summit presented major initiatives such as the CEA in
France, a huge site which is hosting research facilities of industry,
university, government and related institutions such as NEXUS andEURIMUS. The CEA is designed as the largest micro andnanotechnology "innovation center" in Europe based on the closeinterdisciplinary and industry-university-government cooperation in
research and the synergic effects brought by these collective
research. Participants also heard about large-scale ultra-clean rooms
such as IMEC, set up by the government of Flanders in Belgium.
IMEC boasts 24-hour, seven-day operation, and performs

commercially-oriented joint research work based on the contract
with over 450 private companies and research institutions worldwide.
The Japanese presentation discussed the set-up of the Council for
Science and Technology Policy chaired by Prime Minister Koizumi. And
the Council has taken up nanotechnology as one of the priority items to
be industrialized effectively for new economy developments in Japan.
And the Japanese delegation discussed that it will be needed to study a
new technology called "micro-nano fusion area technology" which
encompasses "top-down" development of micromachine technology thatmust be complemented by "bottom-up" development of nanotechnology.
The summit was attended by 74 delegates from 19 countries andregions, including three delegates and four
observers fromJapan. The 9 thInternational
Micromachine
Summit will beheld at the endof April, 2003,
in Beijing, China.

The Eighth International Micromachine/Nanotech Symposium
Foundation of Industrial Technology in the 21st Century
1. Date : 14th Nov. 2002
2. Place : Science hall, Kagaku-Gijutsu-Kan, in Kitanomaru park, Tokyo
3. Entrance fee : 17,000 yen/person (Include Proceedings)
4. Acceptance of participants : (till) 31st Oct. 2002
5. Information window : Micromachine Center, International Exchange Dept.
Tel : 0 3 - 5 8 3 5 - 1 8 7 0 Fax : 0 3 - 5 8 3 5 - 1 8 7 3❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉ PROGRAM (Tentative) ❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉
November 14, 2002
9:00 --

Registration

As of August 7th

Session 1 : Opening
9:30 -- 9:35
9:35 -- 9:40
9:40 -- 10:20

Chairman : Mr. T. HIRANO

Opening Remarks
Mr. Toshiro SHIMOYAMA, Chairman, Micromachine Center
Guest Speech
Director-General,Manufacturing Industries Bureau, METI
Special Guest Speech: strategy towards Fusion of Nano and Micro systems
Prof. Isao SHIMOYAMA, Tokyo University

Session 2 : The Path to New Industries in the 21st Century
10:20 -- 10:45
10:45 -- 11:10
11:10 -- 11:35
11:35 -- 12:00
12:00 -- 13:00
13:00 -- 13:30

Chairman : Prof. H. FUJITAInternational Standardization of MEMS
Dr. Kuniki OHWADA, International Standardization Engineering Laboratory
Standardization of Tensile Testing Method for Thin Film Material--Round Robin Test of Thin Film Specimen-Toshiyuki TSUCHIYA, Toyota Central R&D LABS INC
MEMS in China, Especially in Shanghai Area
Prof. Yilong HAO, Peking University (to be confirmed)
MMC's Initiative towards Foundry Service Network
Foundry Service Industry Committee❋❋❋❋❋❋❋❋ Lunch ❋❋❋❋❋❋❋❋The Sensibility of Scaling Recognition
Prof. Kazuo KAWASAKI, Nagoya City University Medical School

Session 3 : Innovative R & D
13:30 -- 14:00
14:00 -- 14:30
14:30 -- 15:00
15:00 -- 15:30
15:30 -- 16:00

Chairman : Prof. K. IKUTA

Health care Chip
Micro-fluidics for pre-process of Dioxin Measurement
Advanced MEMS Research in US
Nano Photonics❋❋❋❋❋❋❋❋ Break ❋❋❋❋❋❋❋❋

Prof. Yasuhiro HORIIKE, Tokyo University
Dr. Ryo MIYAKE, Hitachi Ltd.
(to be decided)
Prof. Kobos KUIPERS, MESA

Session 4 : National Strategy for Micro/Nano Fusion domain
16:00 -- 16:30
16:30 -- 17:00
17:00 -- 17:30
17:30 -- 18:00

Chairman : Prof. I. SHIIMOYAMA

Strategy to enhance the application of micro @ nano-technology in France
Cooperation Practice between Academy and Industry
Bio Nano technology in 21st century, CELLOMIXNational Strategy on NEMS/MEMS in France

Dr. Dirk BEERNAERT, European Commission
Prof. Susumu SUGIYAMA, Ritsumeikan University
Prof. Teruo OKANO, Tokyo Women’s Medical University
Dr. Constant AXELRAD, CRE

Session 5 : Closing
18:00 -- 18:10

Closing speech

Mr. Takayuki HIRANO, Executive Director, Micromachine Center

6

Members' Profiles

Moritex Corporation
Moritex Corporation is developing projects indiverse fields, including fiber optic illumination,
imaging, optical communications, bioscience, and newmaterials, based on such technologies as fiber optics,
machine vision, automatic alignment of opticaldevices, bio-instrument automation, spheres, opticallenses, and software.
Moritex's involvement in the field of micromachines
began shortly after its foundation when it began
importing and selling microspheres manufactured byDuke Scientific Corporation. Ten years ago, Moritex
joined forces with the Research Development
Corporation of Japan (presently the Japan Science andTechnology Corporation) to develop laser tweezers
called a laser manipulator that uses optical radiationpressure. In 1998 Moritex participated in a photon
control project for studying the measurement andprocessing of submicroscopic matter using light andbegan conducting research on optical fiber probes forobserving near-field optics around objects in highresolution, on the nano-meter order.
In October 2000, we began forming alliances withdomestic and overseas manufacturers having theirown processing technologies through commissioned
production and sales of microstructure parts. Our
company focused on processing using X-ray deep
lithography as a departure from semiconductor
fabrication. This technology is called a LIGA process.
A feature of the LIGA process is its capability for
manufacturing three-dimensional parts with a highaspect ratio using X-rays. This technology is one of themost anticipated for future micromachining because of
its high precision processing capacity, including
minimum dimensions on the order of submicrons andmaximum dimensions of several ten micrometer orgreater. Many of the processes performed by X-ray
deep lithography are described below.

Yukoh Morito
President and CEO

molding processes and mass-produce (tens of
thousands per month) PMMA (resist material)
microparts at a low cost.
In addition to the LIGA process, Moritex sells
microparts produced by the TIEGA process. This is a
micromachining process that effectively uses radiation
etching of Teflon (PTFE), which has a particularlyhigh processing rate.
Moritex has already begun sales of LIGAmicrospectrometers in conjunction with Germany's
Microparts Co. The microspectrometers incorporate adiffraction grating produced through the LIGA
process. Developments in our business have been
focused on manufacturers of colorimeters, liquiddensitometers, thin film measuring instruments, andthe like. Currently we are engaged in research on
molding technologies for ultrafine nonreflective
constructions and glass chip microfabrication
technology, and are undertaking commissioned
production of micromachined components, including
optical switches and VOA (variable opticalattenuators), which are key devices for DWDM
networks. Future plans call for assembling production
equipment to develop our own products, including
optical elements, microprisms, and lens arrays.

1) Processing resist material by lithography using an
X-ray light source obtained by synchrotron
radiation (SR)2) Producing dies by electroforming (electroplating)3) Processing microparts formed of various materials
by precision molding (plastic molding)Self light-harvesting diffraction grating(d=0.2µm, g=2µm)

Synchrotron radiation is an electromagnetic wave
emitted when the paths of electrons accelerated near
the speed of light by a synchrotron accelerator bend.
The wavelength of synchrotron radiation spans fromvisible light to the X-ray region and is noted for a highbrightness and sharp directivity comparable to laser
light. Moritex uses small SR rings developed forindustrial use as short electron path rings in the
production of microparts. Use of these small SR rings
allows us to eliminate the electroforming and precision

Incident light froman optical fiber
Outgoing light fromthe diffraction end

Array of diodes

Fig. 1 LIGA-microspectrometer7

Worldwide R&D

Nano Coordinate Measuring Machine and Nanoprobe
Kiyoshi Takamasu, Professor, School of Engineering, the University of Tokyo
One objective at our laboratory is to develop a threedimensional measuring instrument called a Nano CMM (NanoCoordinate Measuring Machine) for measuring objects threedimensionally with nanometer resolution. Currently, we canmeasure the three-dimensional surface of objects with nanometer
resolution using STM and AFM. However, we are unable to truly
measure three-dimensional shapes, such as the diameter of holes
formed in the side of an object, surface direction, or related
dimensions. We believe that a device for measuring threedimensional sizes, positions, and other shapes on a nanometerorder will be an indispensable basic tool in the future
development of micromachines. The necessity for this research
was first proposed at our laboratory, after which we began
development. Recently, however, many other countries, including
Germany, Holland, and UK, have been developing instruments forthe three-dimensional measurement of objects on a nanometerorder.
Fig. 1 shows the construction of a Nano CMM. This threedimensional measuring instrument was made more compact formeasuring three-dimensional shapes and dimensions in theautomobile industry and the like. About 300 x 300 x 200 mm insize, this device has a measuring range of 10 x 10 x 10 mm and a
resolution of 10 nm. The measuring device has a symmetricalconstruction with a double Vee groove guiding mechanism andemploys a position sensing method using an optical scale toachieve high stability. Fig. 2 shows a prototype of the Nano CMM.
When measuring the absolute shape and dimensions of objects on
a nanometer order, the factor causing greatest error istemperature drift. When a 100-mm length of iron rises 1 degree intemperature, 1 µm of thermal expansion occurs. This effect isdirectly reflected in the measured value. This prototype canrestrain thermal drift of about 10 nm in an environment of about
0.1 degrees, as the entire mechanism is constructed of material
having low thermal expansion and is designed to restrain theeffects of temperature.
The most problematic point in Nano CMM researchworldwide lies in the probing system. Numerous contact-type
probing systems have been used in three-dimensional measuring
devices in order to achieve stable measurements of threedimensional positions and dimensions for objects formed of avariety of materials and having a variety of surface conditions. A
contact-type Nanoprobe having two-dimensional or threedimensional sensing capacity and resolution on the nanometerorder is necessary for Nano CMM.
Fig. 3 shows the construction of a Nanoprobe and a prototype
that we developed. The object to be measured is contacted by asmall ball having a diameter of less than 0.5 mm. An optical sensor
detects the movement of the ball. By combining a contact-type
measuring instrument and optical sensor in this way, it is possible
to construct a reliable Nanoprobe capable of high resolution.

Fig. 1 Construction of a Nano CMM

Fig. 2 Prototype of the Nano CMM

Fig. 3 Construction and prototype of a Nanoprobe
As described above, development is proceeding on Nano
CMM and Nanoprobe, which will become basic tools fordeveloping future micromachines. However, various issues
remain before these devices can be put to actual use, such as theestablishment of a method for calibrating the measuring
instrument, as well as evaluations of the reliability and the
durability of the device. Our laboratory hopes to continue leading
the world in research on establishing Nano CMM.

MICROMACHINE No. 40
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
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Date of Issue : August 22, 2002

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