MMC Activities..............1
MEMS-ONE Pj...............5
Overseas Trends............6
Member’s Profiles .........7
Worldwide R&D ............8

MMC Activities

Overview of MMC’s Activities in Fiscal 2005
I. Basic Objectives of Activities
The basic objectives of MMC activities are, firstly, toestablish basic micromachine technologies and increase
utilization of micromachines through promoting research andinvestigation of micromachines (MEMS and other minutemachines and systems), collection and provision of
micromachine information, and exchange and cooperation withworldwide organizations; and secondly, to contribute to thefurther development of Japan’s industrial economy and tointernational society.
MMC’s basic objectives in Fiscal 2005 are, as in the previous
fiscal year, to promote the industrialization of
micromachines/MEMS and to strive for the establishment ofnext generation basic micromachine and NEMS technologies inaccordance with trends in cutting-edge technological fields
such as biotechnology, nanotechnology, and IT.

II. Description of Primary Activities
1. Research and Investigation of Micromachines
Planned activities in the field of micromachine/MEMS
technology, which is becoming a key technology for the
manufacturing industry, are aimed towards gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research on
new technological issues regarding the fusion of micro- andnano-technologies. The MMC also proposes national and NEDO
projects in fields in which new research and development isdeemed necessary.
(National/NEDO Project-related Activities)(1) MEMS-ONE: MEMS Open Network Engineering System
of Design Tools Project (NEDO-commissioned project)
Now entering its second year, the objective of the MEMSONE Project is to develop an open network engineering systemof design tools for MEMS. This is starting to be made possible
for the first time by bringing together the intellectual data ofuniversities, corporate researchers and technicians that have a
track record in cutting-edge MEMS research and development,
the leading numerical analysis researchers and softwaredevelopment companies, and foundry-operating businesses andpublic institutions, the latter two of which both have substantial
knowledge about the problems that occur in the MEMS
manufacturing process. In particular, the MMC plays amanagement role in cooperation with universities and the AISTin overseeing the creation of a knowledge/materials database, as
well as the promotion and progress of the project overall.
(2) Studies on MEMS-ONE Propagation Activities(NEDO-commissioned project)
In parallel with the MEMS-ONE project, studies will be
conducted on activities that promote MEMS-ONE as part ofresearch on the propagation effect of and propagation activities
related to the project. In Fiscal 2004, studies were conducted on
the attitudes and needs of Japan-based businesses, universities,
and public institutions that were potential users. In Fiscal 2005,
however, studies will be conducted mainly on effective
propagation methods, including the role of support centers.
(3) Next Generation Project Investigation Committee
With a view nationalizing the Next Generation Project from
Fiscal 2006 in accordance with Fiscal 2004 proposals, policies

Internet Home Page : http://www.mmc.or.jp/

concerning the project’s research system and development base,refinement of the research topics undertaken and theconsequent results, and elaboration of common elements for
integration will be considered.
(4) Micro-chemical Chip DB System(Contract agreement with The Research Associationof Micro Chemical Process Technology)
As part of the Microanalysis/Production System Project, inwhich The Research Association of Micro Chemical Process
Technology plays a central role, the MMC is creating a databaseof documentary information useful in the research anddevelopment of microchip devices and systems as well as
carrying out activities, such as information gathering and data
provision, that aid the creation of this database.
(Research and Investigation-related Activities)(5) Studies on R & D trends for micromachinetechnology in Japan and abroad
These studies aim to identify and analyze the latest trends
in the field of micromachine technology, which is progressing at
a remarkable pace, and micromachine R&D in Japan andabroad; and to develop basic technological data to aid indeveloping micromachine technologies.
(6) Joint Survey Research Activities Concerning theIndustrialization of MEMS
Opportunities for the industrial application of MEMS havebeen opening up rapidly in recent years; in order to further
accelerate the industrialization of MEMS, this research willcomprehensively tackle such challenges as advancing foundry
services and coordinating MEMS devices and materials fields.
Joint research with businesses that provide foundry services
will also be conducted, as in the previous fiscal year, on specificissues such as overseas foundry fact-finding missions, process
standardization, creation of a materials database, andcoordination between foundries.
(7) Studies on MEMS Reliability Assessment Technology(application submitted to the Japan Machinery
Federation as a commissioned project)This research project involves the investigation andconsideration of current status, issues, and policies relevant to
the improvement of MEMS reliability.

2. Collection and Provision of Micromachine Information
Information and documents on micromachine use inuniversities, industries, and public organizations in Japan andoverseas will be collected, combined with survey results andMMC-produced documents, and made freely available in the
MMC library. At the same time, information will bedisseminated widely, both domestically and internationally,
through the MMC website.
(1) Improved Dissemination and Exchange ofInformation through the MMC Website
Utilizing the MMC website, efforts to exchange anddisseminate information will be made proactively. Website
content aimed at supporting members will be enhanced.
(2) Publication of a Micromachine Periodical“Micromachine Index,” containing abstracts of technicaldocuments and information on materials, is issued on a regularbasis and provided to supporting members and organizations
concerned with micromachines.

(1) Standardization of Fatigue Testing Methods for
Micro-nano Materials (NEDO-commissioned project)
Continuing from last year, research on standard fatigue
testing methods that enable evaluation of the properties ofvarious thin film materials measuring less than 10µm wide and100µm long, with the aim of international standardization.
Fatigue tests using conventional 1/1000 sized specimens will be
conducted in order to clarify the limits of application for fatigue
testing methods that use the current standard mm orderspecimens, and proposals for international standards will bemade in Fiscal 2005, the 3-year project’s final year.
(2) Standardization of Tensile Testing Methods for Thin Film Materials
The results of MMC research conducted between Fiscal
1999 and Fiscal 2001 as part of the NEDO project“standardization of evaluation method of properties for
micromachine material” have been included in international
standardization proposals submitted to IEC in Fiscal 2003; theCD (Committee Draft) was approved in Fiscal 2004 and the
CDV (Committee Draft for Vote) will be submitted in Fiscal
2005. This year MMC will continue its activities towards
international standardization.
(3) Standardization of Micromachine Terminology
Having passed the NP (New Project) stage, theinternational specifications proposal “Technical Terms in
Micromachine Technology” submitted to IEC in Fiscal 2002 wasapproved at the CDV (Committee Draft for Vote) stage in Fiscal
2004, and the FDIS (Final Draft International Standard) will bedrawn up in Fiscal 2005. This year MMC will again continue its
activities towards international standardization.

(3) Publication of a Newsletter
Information concerning research and governmental trends
related to micromachines is distributed monthly to supporting
members and other interested individual and organizations.
(4) Maintaining and Upgrading the MMC LibraryTechnical documents and materials are collected and stored
in the MMC library and listed in a database together with otherrelevant information.

3. Exchange and Cooperation with Organizations Worldwide
To promote affiliation, exchange and cooperation withrelated organizations in and outside Japan, MMC will involve
itself in such activities as participating in the micromachinesummits, holding international symposiums, inviting to Japanand sending overseas researchers and experts in the field, andbuilding foundry services.
(1) Participation in the 11th Micromachine Summit
MMC will participate in the 11th Micromachine Summit in
Dallas, USA, taking part in discussions of a wide range of topics,
including worldwide trends in micromachine technology and its
fields of application.
(2) Holding the 11 t h International Micromachine/Nanotech
Symposium (partially subsidized by activities promoting theJapan Motorcycle Racing Organization)
This year MMC will hold the 11 t h International
Micromachine/Nanotech Symposium focusing on technologicalissues pertaining to and the future prospects for the fusion of
micromachine/MEMS and nanotechnology.
(3) International Exchange and Dispatch of Researchers
A group will be dispatched overseas to promote theexchange of information and opinions with micromachinerelated research institutes in universities and similar institutions.
This group will also participate in international symposiums andacademic meetings held overseas. MMC will further promoteexchange by inviting experts in the field from America andEurope and by sending our experts and researchers overseas.
(4) Building a foundry network system
Foundries are vital to the industrialization of MEMS. In
order to improve these facilities, we will undertake theestablishment of a system to improve services through a
network comprising members of the Foundry Service Industry
Committee, who represent businesses either involved in or
related to the provision of foundry services.
(5) Establishing a forum for the exchange of cuttingedge micro/nano technology
In order to accelerate the development of cutting-edge
micro/nano technology – a basic technology expected to have adiversity of applications in various fields – MMC will hold ameeting for the exchange of cutting-edge micro/nanotechnologies as an exploratory opportunity for the exchange of
information and joint research as in the previous fiscal year.

(4) Research and Investigation of Micromachine Standardization
Further to the international standardization proposals
mentioned above, to enable formulation of new strategic
proposals for international standardization, issues for inclusion
in standardization proposals will be narrowed down throughcooperation between the MEMS-ONE project and the MEMS
Reliability Assessment Committee and a roadmap for futureinternational standardization formulated.

5. Dissemination of Information and Education
about Micromachines
By issuing and distributing quarterly magazines and by holding
exhibitions, we hope to disseminate information on micromachines
extensively in order to educate as many people as possible.

4. Standardization of Micromachines(1) The quarterly magazine “MICROMACHINE” will be
published periodically and distributed to those in orconnected with the field. The quarterly magazine will
also be made available on the Internet through theCenter’s home page.
(2) The 16th Micromachine Exhibition and other events
will be held to present the latest researchachievements, as well as the latest cutting-edge
micromachine/MEMS industry-related products andproduct materials.

In cutting-edge technological fields such as
micromachine/MEMS, standardization is being promoted asinternational initiatives are being taken.

(3) We will serve as the Federation of MicromachineTechnology Secretariat to work with and strengthen
micromachine-related organizations.

Upcoming Event Announcement
The 2005 International Micromachine / Nanotech Symposium and Micromachine Exhibition

The 11th International Micromachine/ Nanotech Symposium
November 10 (Thurs.), 2005
Science Hall
Science Museum, Tokyo (Kitanomaru Park)The 16th Micromachine Exhibition
November 9 (Wed.) – 11 (Fri.), 2005
Science Museum, Tokyo (Kitanomaru Park)
2

The 10th International Micromachine/Nanotech SymposiumSpecial Guest Speech: New Progress of Integration and Fusion in MEMS
– Expectations for New Industry Creation –Susumu Sugiyama
Professor, Ritsumeikan University
I would like to talk about some of the MEMS research wehave been doing and consider together the future outlook for
MEMS. MEMS are integrated devices much like integrated
circuits, but while the in/out signals for LSI chips are electric
signals, MEMS can support numerous types of quantities,
including such physical quantities as electrical, mechanical,
optical, and magnetic quantities; chemical quantities; andbiological quantities. The characteristics of MEMS can befurther exploited in the form of living (or motional) devices inwhich moving mechanisms have been introduced. At theInternational Conference on Solid-State Sensors and Actuatorsin 1987, a U.S. presentation introduced living devices in which
gears and linkage were formed on silicon using the same
method for fabricating LSIs. This triggered a boom in the
research and development of MEMS throughout the world.
Now in the 21 s t century, we have entered an age ofindustrialization that no longer asks “how” to make something,but “what” to make. There is much anticipation for a
fundamental device to succeed the integrated circuit and be
useful in our everyday lives. With advanced integration and theintroduction of nanotechnology in systems, micro and nanosystems have become the standard. Microtechnology employing
a top-down approach to investigate the limits of fine processing
and nanotechnology employing a bottom-up approach todevelop new functions by designing materials from the atomic
and molecular level come together on a MEMS substrate.
Hence, MEMS provides the bridge for putting nanotechnology
to use for us.
MEMS devices are expected to be vital in such industrial
fields as information and communications, automobiles,
precision machines and biotechnology. While the market for
MEMS in 2002 was about 430 billion yen, it is estimated that
this value will rise to 1.3 trillion yen by 2010. The NEDO project
was initiated to respond to this market demand. The MEMS
project (2003–2005) has included R&D on optical MEMS withsuch themes as mirror flatness, angular control, and rotational
life; RF-MEMS with such topics as low loss at 10 GHz, highprocessing precision, and the life of RF-switch contacts; andsensor MEMS with the goal of achieving chip size packaging at alow cost. In the MEMS-ONE project (2004-2006), we haveconducted research on MEMS designing tools, with which wehope to facilitate manufacturing that combines creating
technologies with design technologies.
Next, I will talk about the integration of MEMS and thefusion of MEMS with other technologies based on our research.
(1) Multicellular integration: many cellular elements areassembled to produce various functions, such as 1
thermopile generators capable of generating several volts
with a low temperature difference by arranging hundreds or
thousands of thermocouples in series, 2 painless micro
needles in a drug delivery system that includes 1,000
needles arranged in 1cm 2 , and 3 pneumatic balloon
actuator that uses the air pressure in an array of balloons to
produce cell-like movement similar to cilia.

(2) Multiaxis integration: integrating one axis to three axes ofrotation in multiple dimensions to produce 1 6-DOF (sixDegree of Freedom) force-moment sensor 2 6-DOF
accelerometer for precisely measuring the movement of
humans and other moving objects.
(3) Mechanical integration: combining mechanical elements in asingle system to produce 1 micro reciprocating engine forpower generation in which a cylinder and piston are
integrally processed by dry-etching silicon, 2 electrostatic
controlled linear inchworm actuator (ECLIA) capable ofhigh-precision work that includes an array of piezoelectric
actuators and electrostatic actuators, 3 micro/nanomaterials testing system employing 1,000 electrostatic
actuators to create a motor, load mechanism, and measuring
mechanism capable of performing tensile tests in nano-level
fields such as nanotubes and nanowires, and 4 micro
conveyer systems that employs electrostatic actuators for
capturing, transporting, measuring, and selecting
nanoparticles and cells under a microscope.
(4) Fusion with information technology: the fusion of MEMS
with information technology is important. By incorporating acommunication function in MEMS, leads would become
unnecessary. The objective is to create MEMS as small as 0.5
x 0.5 mm that cost just a few pennies. These particle-like
MEMS called “smart MEMS” would be used for sensing andmeasurements. By incorporating the Internet, points of datadetected by this smart dust are expanded to linear data by acommunication device and further expanded to planar datawhen transferred to the Internet. These sensors are widely
anticipated for use in simultaneous measurements inagriculture, transportation, distribution, and health care.
Finally, MEMS devices are important for industry, since
manufacturing technology and equipment are essential for
innovation. MEMS is a platform for making nanotechnology
useful in our daily lives. Thus a union with nanotechnology for
producing new functions can be considered an important rolefor MEMS. To achieve this, an R&D center for incorporating
nanotechnology in MEMS must be linked with businesses anduniversities in order to produce a high benefit-cost ratio.
However, rather than distributing research activities among
many locations, a certain degree of concentration may benecessary since distribution requires a large investment.
Furthermore, improvements in the infrastructure will benecessary to provide a foundation for international
competitiveness.

3

MEMS Foundry Service at the National Institute of Advanced Industrial Science and Technology
Ryutaro Maeda
MEMS and Packaging Group, Advanced Manufacturing Research InstituteNational Institute of Advanced Industrial Science and Technology
generation high-frequency communications, optical
MEMS for use in optical communications and elements
of information presentation, and fluid MEMS used inbiotech analysis. These technologies have attracted
much attention for their ability to make Japan’s
industrial goods sophisticated and differentiated. With
the aim of applying MEMS to other fields, which has
not been possible due to the scarcity of technicalexperts, our facilities have also contributed to training
advanced and creative experts. In collaboration with
the nonprofit organization Precision Engineering andScience Network, we have launched a hands-on MEMS
course that is not merely a classroom lecture but
focuses on design simulations and the practice ofactual process measurements. The course has drawn
praise from experts in many fields of the private
sector.
Our facilities comprise primarily a highaccelerating voltage electron beam lithography device
as a machining tool for use in nanoregions, a deepfocus stepper for MEMS designed to print patterns on
multilevel structures with high precision, a high-aspectratio ICP etcher having numerous uses in MEMS, and ananoimprinter for low-cost industrial manufacturing of
nanostructures. In addition to these specialized
devices, the facilities include machining and measuring
equipment commonly used for MEMS to provide
everything necessary in one environment to support
the rapid development of prototypes. We are also
working to prevent reductions in service features dueto the limited number of available government
workers.

Outline
As part of the “Focus 21 Project” under the
Ministry of Economy, Trade and Industry, the National
Institute of Advanced Industrial Science andTechnology (AIST) completed construction of the“MEMS Business Building” that makes available MEMS
production facilities to promote the industrialization of
MEMS. Operations at the building began in March
2004.
As MEMS foundry services have become more
popular, the private sector has enhanced the services
available for producing device prototypes with somepotential for mass-production. At present, however,the private sector cannot immediately handle
prototypes required in research and development or
prototypes of diverse devices with limited productionthat are the niche of small and medium venturebusinesses. For this reason, AIST is serving as acollaborative research base for providing a prototype
service for devices that are essential in research anddevelopment but a high risk for private businesses.
These facilities coordinate the research potential
and technological seeds in MEMS possessed by AIST
with the technology and needs of industry. It is hopedthat these facilities will bring together the intellectual
minds of industry, academia, and government in thefield of MEMS, strengthen cooperation, and nurture
creative personnel. The facilities are now actively
operating as a control base for MEMS R&D.
Features of the Foundry Service
To date, MEMS technology has beencommercialized in the forms of medical andautomotive sensors, inkjet print heads, and mirrored
reflection projectors. Soon sensors and actuatorsdeveloped with MEMS technology are expected tohave applications in optical communications andmobile equipment, computer peripherals, portable
power supplies, and biotech analysis. MEMS hasreached the status of a next-generation technologythat can revitalize Japan’s industry.
We have identified the need to improve ourdeveloping speed and to reinforce proprietor
technologies that cannot be immediately imitated,particularly material technologies that require lengthy
research and development. At AIST we are rapidly
developing next-generation devices through close
collaboration with industry, making use ofsophisticated thin film material technology used insensors and actuators and 3D micromachinetechnology for silicon, as well as our own cultivatedglass and carbon. Some of our primary areas ofdevelopment include RF-MEMS for use in next-

An optical scanner using ferroelectric material (left)
and an RF switch driven by a low voltage

A nanoimprinter (left) and a nanoimprinted glass
structure4Expectations For The MEMS-ONE Project
Hiroyuki Fujita, Project Leader and Professor at The Institute of Industrial Science,
the University of Tokyo
As a variety of MEMS products led by automotive
sensors are now entering the market, it is a safe bet
that the applications for MEMS will continue toexpand into other fields. Some areas that lookparticularly promising for MEMS are opticalapplications such as optical communication devices
and optical sensors; information systems such as
printers, displays, and data storage devices;micro/nano chemical systems and nano-biotechnology
applications; and nano-technology applications such as
scanning probe microscopes.
In order to accelerate MEMS commercialization inthese diverse fields of application, it is important todevelop not only individual products, but also a more
complete infrastructure consisting of manufacturing
equipment to serve as a foundation for micromachinerelated industries, foundry services that undertake
production, and design and analysis software. Since
the development of such an infrastructure can reduce
development and manufacturing costs for individual
products, there is an increased likelihood that thedegree of added value from MEMS can be usedeffectively toward the successfully marketing of MEMS
products, for which the market scale is not always
great.
The provision of a computer-aided design system isparticularly effective in reducing the costs of trial
production since the actual desired MEMS are
produced after freely designing and analyzing theshapes of mechanical parts on a computer. This
environment consists of a simulator for analyzing
processes and electrical and mechanical properties
suited to MEMS characteristics, and a database usedby this simulator. Since the content of a database for
manufacturing processes is heavily dependent on thedevice and its operating parameters, cooperation
between a foundry company and companies involvedin manufacturing the device is indispensable forconstructing an effective database. By standardizing
the manufacturing process and dividing the process
into design, analysis, processing, and evaluation steps,
a mechanical engineer will be able to apply a design
and analysis simulator effectively to obtain design
results approaching the desired final product, without
being conscious of the actual details in each process
step.
Now that MEMS technology has already madesignificant progress, manufacturing equipment andprocesses, as well as micromachines, actuators, andother devices developed for specific applications canbe used intact in other fields after only slight changes.
However, few businesses have the know-how foraccumulating knowledge acquired throughdevelopment processes in a form that can be used inother situations. Further, each business has limited
specializations and may not have the capacity toappropriate this knowledge to diverse fields ofapplication. Databases for accumulating intellectual
property on MEMS design and production in areusable form and simulators for applying thisdatabase to MEMS applied systems of various fields todemonstrate the functions of these systems are
expected to play a large role in overcoming such
limitations.
In response to these demands, NEDO has
undertaken the MEMS Open Network Engineering
System of Design Tools (abbreviated as MEMS-ONE)project as a consignment project for a three-year
period beginning in 2004 with the aim of constructing
a database and simulation software conforming toJapan’s manufacturing environment and integrating
research findings to date. The activities of MEMS-ONE
involve conducting earnest research and development
through collaboration with companies that develop
design and analysis software, companies involved in
manufacturing MEMS products, and The National
Institute of Advanced Industrial Science andTechnology through coordination by theMicromachine Center. Databases for materials andprocesses have also been constructed with thecooperation of MEMS foundry companies anduniversities specializing in MEMS or numericalanalysis.
Upon completion, we plan to distribute a MEMS
design and analysis support system and database to
everyone at a very low price. The system is provided
with sufficient functionality for use by scientists andstudents studying MEMS for the first time, enablingthese users to simulate basic manufacturing processes
and to analyze the structural properties ofmanufactured devices. To meet more advanced
demands, various functions may be used to enhance
the performance of the system, including an interface
for connecting the system to existing or new
development software programs and a function
allowing users to expand the database.
It is my hope that this MEMS design and analysis
support system will be used at various levels, fromventure companies to large firms and from beginners
to experts, to assist in the implementation of MEMS
and industrial construction based on MEMS. I would
be pleased if our project helps to promote new
businesses by developing special analysis software andconstructing special databases on a common platform.

5Overseas Trends

MEMS 2005, Miami (Jan. 30 – Feb. 3, 2005)
The 18th International Conference on Micro
Electro Mechanical Systems (MEMS 2005) was held in
Miami Beach, Florida at the Fontainebleau Hilton
Resort from January 30 to February 3, 2005. The
conference, which began in 1987 as the Micro Robots
and Teleoperators Workshop, has continued to grow inscale, exceeding the previous year’s numbers ofsubmissions and participants.
The number of abstracts submitted for this year’s
conference was 750, of which 216 were accepted, aconsiderable increase over last year’s 629 submissions,of which 217 were selected. Since the accepted
number changed very little, the percentage ofaccepted abstracts dropped to 29% from 34% lastyear. Countries who gave the largest number ofpresentations this year were the United States with
107, Japan with 47, South Korea with 16, and Germany
with 9, followed by Denmark, Holland, Switzerland,
and Taiwan. By region, 50% of the presentations were
given by North America, 21% by Japan, 16% byEurope, and 13% by Asian countries other than Japan.
Among research institutes, 21 presentations were
given by the University of Tokyo, 20 by the Universityof Michigan, 9 by the Georgia Institute of Technology,
and 9 by the University of California, Berkeley. The
final tally of participants was estimated at about 702,with 376 participants from North America, 162 from
Asia, and 104 from Europe, based on advance
enrollment.
Sessions of the conference featuring oralpresentations were divided into the categories Self
Assembly and Packaging, RF-MEMS, Pneumatic/Jet
Systems, Optical Microsystems, Power MEMS,
Physical Microsystems, Polymer MEMS, Bioanalytical
Systems, and Nano Systems. Polymer MEMS was a
new category established this year.
The presentations covered a wide range from basic
research on materials, processing technologies, andelement technologies for actuation to applied researchenvisioning specific applications. However, few
companies gave presentations detailing actuallycommercialized devices and systems. Overall, theconference seemed to serve as an opportunity for
speculating about what systems will be produced overthe long term. This impression is supported by the factthat 86% of all presentations were given by
universities.
The three invited speakers at this year’s conference
introduced the principles of microfabricated atomic
clocks, liquid lens technology, and direct methanol
fuel cells, and reported on the recent trends andfuture outlook of these technologies. These fields are
expected to have future applications and,
consequently, seemed to attract much interest.
One of the general trends in many presentations
appeared to be developing practical applications for
RF-MEMS and Physical Microsystems based on CMOS.
Presentations on Polymer MEMS talked about on-chipprocessing of the polymers themselves, and the use ofpolymers for flexible movement. Devices
manufactured by combining nanoprocessed polymers(plastics) and silicon substrates that are capable ofcontrolling the functions and performance expressed
through nanoprocessing by extending and pulling thepolymer with the silicon actuator likely indicate afuture trend toward devices that are capable ofintegrating dissimilar materials.
There was also a sense of heightened anticipation
for future applications of bio and nanomaterials inreports on cell patterning in the Bioanalytical Systems
session, particularly with regard to imagers forpatterning and mapping bacteriorhodopsin andproperty measurements of nanomaterials in the Nano
Systems session.
Next year, MEMS 2006 is scheduled to be held in
Istanbul, Turkey on January 22-26, 2006.

Conference room for oral presentations

Conference room for poster presentations

6

Members' Profiles

Mizuho Information &Research InstituteParticipating company in
the MEMS-ONE project

semiconductor process analysis, electrostaticmagnetic field analysis, optical, electronic, and plasma
analysis, thermal fluid analysis, chemical reaction
analysis, and structural analysis to develop advanced
simulators for MEMS devices that can help developing
this field. It is our goal to lead Japan in performance
simulations for MEMS technology.
This year, a research consortium was formed
through cooperation among industry and academia.
Initiated by the Ministry of Economy, Trade andIndustry and the New Energy and Industrial
Technology Development Organization (NEDO), theMEMS Open Network Engineering System of Design
Tools (MEMS-ONE) project will last for three years
until 2006. Our company is participating in MEMSONE as a core business for developing a mechanism
analysis simulator, process analyzing tools, functionenhanced software (bouding and packaging functions),
and a database system.

Endeavors in MEMS
While the U.S. and European nations are currently
at the forefront of the MEMS industry, momentum has
been building recently in Asian countries such as
Taiwan and Singapore toward establishing MEMS as a
new pillar of their industry with national backing. An
increasing number of people in Japan as well arehoping that MEMS technology in the form ofaccelerometers, pressure sensors, and inkjet print
heads will revive Japan’s manufacturing industry. In
light of this, and with the heightened anticipation for
the future market expansion of MEMS, we areapplying our past achievements to integrate four of
our strengths given below in order to provide solutionsfor MEMS development.
• Research: fact-finding studies through collaboration
with a group of experts in economics,
policy, and technology• Consulting: drawing on our experience in simulation
techniques and research• Simulation: techniques based on our extensive
achievements in scientific analysis• Software: development, sales, and customization

Contact
Atsushi Sato, Researcher
MEMS Project Team
2-3 Kandanishiki-cho Chiyoda-ku, Tokyo
Tel: 03-5281-5303 Fax: 03-5281-5414
E-mail: atsushi.sato@gene.mizuho-ir.co.jp

Future Endeavors
Our objective is to develop advanced simulators forPrimary Achievements

Research• Micromachining Process Consortium (representative: Prof. Kazuo Satoof Nagoya University)• Study on lithography• Study on microchemical processes• Survey on machining precision and product precision in manufacturing technology• Capacitance analysis for MEMS devices• Stress and structural analysis of microstructures, including accelerometersand pressure sensors
Consulting•＆Simulation Microfluid analysis• Polymer structure analysis of resist materials• Wet/dry etching analysis of microstructures

Software• Designing Microstructures
Anisotropic etching simulator
Plasma etching simulator• Lithography
Optical, electron beam, and X-ray lithography simulators• Microfluid analysis
3D fluid analysis system• Electronic device analysis
Process device simulator

7

A microneedle manufactured byanisotropic etching (MICROCAD)

Pit pattern in an optical disc formedby direct electron beam writing

Free surface analysis

Worldwide R&D

Biomaterials System Engineering Laboratory, Department of Materials Engineering,
Graduate School of Engineering, The University of Tokyo
Ryo Yoshida, Associate Professor
http://www.bmw.t.u-tokyo.ac.jp/yoshida/
The Biomaterials System Engineering Laboratory isentering its fifth year since its launch in April 2001. The
laboratory is currently staffed by three doctoral students (oneworking adult), four master’s students, three undergraduate
students, and one technical assistant.
Living organisms are perhaps the ultimate material systemcapable of transmitting data, transporting materials, andcreating motion and force through cooperation at themolecular level. Using such organisms as a model, we areattempting to artificially design and construct materials andsystems with polymer gels that can replace or imitate thefunctions of these living organisms.
Polymer gels can be broadly defined as a cross-linked
polymer network inflated with a solvent such as water. In
addition to foodstuffs, there are numerous gels that we use in
our daily lives, such as the superabsorbent material indisposable diapers, and soft contact lenses. Polymer gels areused in a variety of fields. Many gel-like tissues can also befound in living organisms, including the cornea of our eye andvitreous bodies.
This type of gel can exhibit a very unusual phenomenon
called volume phase transition in which the gel reversibly anddiscontinuously swells or shrinks in response to environmental
changes, such as changes in the solvent composition,
temperature, and pH, the application of an electric field,
exposure to light, and the addition of specific molecules. Much
research is now being conducted on this quality to findapplications for these gels as functional materials. So far
several “intelligent” gels having organism-like functions havebeen developed, including gels that function as artificial
muscles and gels that release medicine only when heated.
While various stimuli-responsive gels are being created inthis way, our laboratory is developing a “life-like” functional gelthat produces spontaneous pulses under uniform conditions
similar to myocardial cells. By developing a molecular design inthe gel for inducing the BZ reaction, an oscillating reaction
known as a chemical model of biological metabolic reactions(citric acid cycles), and converting the chemical changes todynamic changes, we have succeeded in producing a periodic
swelling and shrinking oscillation in the gel (Fig. 1). This led tothe creation of a new biomimetic gel capable of inducing its
own oscillations in a regular rhythm under fixed conditions,much like the pulsations of a cardiac muscle. Unlike
conventional stimuli-responsive gels, this is the first gel in theworld that produces swelling-shrinking oscillations without anexternal stimulus being turned on and off and is expected tohave applications in molecular pacemakers, pulsating
micropumps, and microactuators having peristalsis. New gelsthat imitate a cardiac muscle have also been developed
recently. These gels are capable of self-induced pulsations in
the presence of ATP.
Currently we are attempting to apply lithography andother micromachining technologies that have made remarkableadvances in recent years to develop micromachines andnanomachines from these functional gels. For example, we are
creating microactuators (artificial cilia) by arranging hundredsof microprotrusions on the surface of self-oscillating gel andgenerating wave propagation through a chemical reaction,
spontaneously producing periodic fluctuations in the
protrusions (Fig. 2). It is thought that such a microactuator
may have applications in a microtransfer system fortransporting minute particles and cells added to a surface.
We are also working on applications for medical chips. By
providing a medicine storage section in a chip and forming a
gel at the exit passage to this section through local
photopolymerization, we can produce a drug release systemthat opens and closes a gate in response to abnormal signals(Fig. 3). We are designing a drug release chip for releasing
insulin in response to changes in temperature and pH andglucose concentrations. Further, a pulsating gel embedded in achip is anticipated to serve as the power source for a pulsating
micropump designed to releasing drugs periodically. Thischemical engine requires no electrical power and can be used
as a completely independent drug release chip having no wires
connected to an external power source. By fusing this gel withmicromachining technology, we believe that new
developments and applications for the gel as a functional
material will continue to expand.
For more information on our research activities, please
visit our Web site. Although our laboratory is relatively new,the students and I are conducting research round the clock.

Pulsation

100

Fig. 1 Self-oscillating gel that pulses
spontaneously pulsation

Fig. 2 Gel array createdthrough micromachining(artificial cilia)

Fig. 3 Microvalve formed of gel in a microchannel
for automatically controlling drug release(the valve is closed in the top photo andopen in the bottom photo)

MICROMACHINE No. 51
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
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