SPECIALTY GASES AND ENGINEERED MATERIALS

Pegasus™ 500
Series Coatings
Highly fluorine etch-resistant andtransparent coatings
Entegris’ Pegasus™ 500 series coatings are a family of precisionengineered PVD coatings tailored for fluorine and chlorine
plasma etch applications. They are aluminum-based oxynitride
coatings deposited at low temperatures.
Pegasus 500 series coatings can be deposited on aluminum, alumina,
stainless steel and other commonly used substrate materials, withsuperior adhesion. These coatings are highly transparent in thevisible and IR range. They are of high purity, exhibit homogeneous
microstructure and are conformal to the substrate surface.
Entegris’ Pegasus 500 series coatings are dense and excellent
barriers to corrosive chemistries in a semiconductor etch environment, protecting surfaces from erosion and minimizing particle
generation. The coatings are superior in etch resistance performancecompared to plasma sprayed coatings since they are dense, havegood cohesive strength and are not prone to particulation. This
improves device yield and improves productivity of semiconductor
etch tools in a manufacturing environment.

BENEFITS—• Fluorine and chlorine etchresistance• Low particle generation• Dense and transparent• Oxidation resistance

APPLICATIONS—• Semiconductor chambercomponents• Optical components

SPECIFICATIONS—

Substrate

Compatibility

Metals, Ceramics (e.g., Alumina, AlN) and Semiconductors

Size

Up to 1016 mm D × 508 mm H (40” D × 20” H)

Structure

Microcrystalline

Temperature

Deposition<200°C (392°F)

Use

1000°C (1832°F)

Coating thickness

Up to 10 µm

Electrical resistivity>1012 Ω-cm

Purity>99%

Hardness

1100 HV

Elastic modulus

190 GPaRoughness

Conformal — substrate dependent

Wear resistanceVery good

Corrosion resistanceExcellent etch resistance in fluorine and chlorine environments
Oxidation-resistant up to 1000°C (1832°F) in air
Resistant to most acids and alkalis

CHARACTERISTICS—Etching Rate Performance*
3.0

Etch Rate (µm/hr)

2.5
2.0
1.5
1.0
0.5
0
Bulk
Quartz

Bulk
SiliconBulk
Aluminum

Bulk
AIN

Bulk
Alumina

Bulk
AlON

Pegasus Pegasus
100500Thin
Thin
FilmFilm*Tested under CF4+02 reactive plasma for 4 hours.
Note: T he fluorine plasma etch rate is highly non-linear withexposure time. Pegasus coatings are expected to last
10,000 RF hours of plasma exposure.

SEM Images of Pegasus 500 Series Coatings
Coating Surface Morphology

Coating Cross-section

Pegasus 500

FOR MORE INFORMATION
Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit entegris.com and select the Contact Us link to find the customer service center nearest you.
TERMS AND CONDITIONS OF SALE
All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit entegris.com and select the Terms & Conditions link in the footer.

Corporate Headquarters

Customer Service

129 Concord Road
Billerica, MA 01821
USA

Tel +1 952 556 4181
Fax +1 952 556 8022
Toll Free 800 394 4083

Entegris®, the Entegris Rings Design™, Pure Advantage™ and Pegasus™ are trademarks of Entegris, Inc.
©2010-2016 Entegris, Inc.

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Printed in the USA|

6102-5857ENT-1116

www.entegris.com