SPECIALTY CHEMICALS AND ENGINEERED MATERIALS

Caerus™ 100Series Coatings
Superior aluminum oxide coating
Entegris’ Caerus™ 100 series is a family of aluminum-basedoxide coatings that are deposited at low temperatures withsuperior film quality. Caerus coatings are highly conformal,dense, pinhole-free and exhibit homogeneous microstructure.
Caerus coatings have a good combination of excellent adhesion
and outstanding etch resistance properties. The coatings
are characterized by superb electrical voltage stand-off andexceptional trace metal diffusion barrier layer characteristics.
Caerus 100 series coatings can be deposited on aluminum,quartz, alumina, stainless steel and other commonly used
substrate materials, including polymers and organic compounds.
These coatings are of the highest purity, have amorphousmicrostructure and are extremely conformal to the substratesurface, which enables coatings on surfaces with high aspectratio features and complex 3-dimensional parts.
Entegris’ Caerus 100 series coatings have good cohesive strengthand are excellent barriers to corrosive chemistries in semiconductor plasma etch and wet etch environments, protecting
surfaces from erosion and minimizing particle generation.
Caerus 100 series coatings are an excellent choice for applications requiring a combination of mechanical, chemical andelectrical resistance.

APPLICATIONS—• Semiconductor chambercomponents• Optical coatings• Parts with high aspect ratio
features and complex
3-dimensional surfaces

FEATURES & BENEFITS—• Dense, highly conformal,
pinhole free
• Excellent electrical properties• Good chemical etch resistance• Diffusion barrier layer

SPECIFICATIONS—

SubstrateCompatibility

Metals, ceramics, polymers

Size

Up to 355 mm D × 50 mm H (14" D × 2" H)

Structure

Amorphous

Temperature

Deposition

150°–   250°C (302°–  482°F)

Use

Up to 1000°C (1832°F)

Coating thickness

Typically between 10  –1000 nm

Electrical resistivity>1013 Ω-cmPurity>99.99%Composition

Al 40%; O 60%

Dielectric breakdown voltage>500 V/μm

Elastic modulus>200 GPa

Roughness

Conformal – substrate dependent

Wear resistance

Very good

Corrosion resistanceExcellent etch resistance in fluorine environments
Resistant to most acids and alkalis

2CHARACTERISTICS—EDS of Caerus 100 Series Coatings
40271

05.0 keV @ eV/channelElementWeight %Atomic %O

47.59

60.49

Al52.41

39.51

TOTAL

100.0030203
CountsAl

20135

10060

00.00

1.28

2.56

3.84

X-ray Energy (keV)

SEM Images of Caerus 100 Series Coatings
COATING CROSS-SECTION

COATING SURFACE MORPHOLOGY

CaerusCaerus 110 deposited on silicon

Caerus 100 deposited on alumina

To review Entegris’ specialty coatings offering, visit Entegris’ website atwww.EntegrisSpecialtyCoatings.com.

FOR MORE INFORMATION
Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit entegris.com and select the Contact Us link to find the customer service center nearest you.
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USA

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