SPECIALTY CHEMICALS AND ENGINEERED MATERIALS

Metallocenes
High purity and thermal stability makethem versatile as ALD precursors fordeposition applications
As a leader in specialty chemicals and advanced materials forthe microelectronics, life sciences, and other high-techindustries, we can accelerate your new product development
efforts and manufacturing supply chain by providing criticalmaterials at the appropriate scale, and within the communicated delivery schedule. Our metallocenes are tailored toyour manufacturing requirements and specifications to meetyour high-quality customized needs.
Organometallics bearing the cyclopentadienyl (Cp) ligand
have been instrumental in the design and development of
atomic layer deposition (ALD) precursors that require highthermal stability of the molecule relative to other organometallic precursors. Our state-of-the the-art Cp cracking
capabilities enable synthesis of a wide range of metallocenebased organometallics.
Our experienced R&D teams provide deep chemistry expertisein an innovative culture to deliver custom synthesis solutions
that meet your proprietary development needs. With ourextensive manufacturing capabilities, we can handle a rangeof projects from grams to metric ton quantities, throughscale-up and full commercialization. We also provide
chemical process development, piloting, and custom
chemical manufacturing.

FEATURES & BENEFITSState-of-the-art Cp
cracking anddistillation
capabilities

Enable synthesis of a wide range ofmetallocene-based organometallics

High purity andthermal stability
properties

Provide versatility as ALD precursors forsemiconductor deposition applications
that require higher temperatures

Advanced scientificexpertise and over 20years of Cp chemistry
experience

Technical transfers, R&D, scale-up
optimization, and continuous
improvement are conducted by PhD
chemist-led teams that are supported byworld-class quality and analyticalresources

ISO 9001
certification

The Entegris quality management system(QMS) certified by the ISO 9001 standard
ensures provision of consistent quality
products meeting customer regulatory
requirements

APPLICATIONS• ALD precursors for semiconductor deposition• High aspect ratio (HAR) ALD• Higher temperature ALD processes

SPECIFICATIONS
Product

Pentamethylcyclopentadienyl titanium trichloride, Cp*TiCl3Appearance

Red crystalline powder

NMR purity>99.0%

Trace metalsAluminum<20 ppm

Chromium<10 ppm

Copper<50 ppm

Iron<20 ppm

Magnesium<10 ppm

Nickel<10 ppm

Zinc<10 ppm

DRAWINGSCapabilities
Our state-of-the art system for cracking dicyclopentadiene (1) allows access to the synthesis of a wide range ofmetallocene-based organometallics. The parent cyclopentadiene can be effectively derivatized to several alkylsubstituted cyclopentadienyl ligands (2), which allows for extensive customization of metallocene precursors. For
example, MeCp and iPrCp can be readily prepared and attached to a preformed organometallic complex to yieldproducts with motifs such as 3 (see graphic).
The cyclopentadienyl ligand can also be attached to metal halides, metal amides, and metal imides to yield products
such as 4, 5, and 6 (see graphic). We also supply a full range of metal amides and imides to complement thischemistry and capability.
Metal carbonyls bearing Cp ligands 7a and 7b (see graphic) can also be accessed through reactions involving theirparent metal carbonyls. Our commitment to safety ensures the safe handling of all raw materials and finished goods
that have the propensity to lose carbon monoxide.

2FOR MORE INFORMATION
Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit entegris.com and select the Contact Us link to find the customer service center nearest you.

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Corporate Headquarters

Customer Service

129 Concord
Billerica, MA 01821
USA

Tel +1 952 556 4181
Fax +1 952 556 8022
Toll Free 800 394 4083

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