SPECIALTY GASES AND ENGINEERED MATERIALS

Pegasus™ 100Series Coatings
Fluorine etch-resistant coatings
Entegris’ Pegasus™ 100 series coatings are a family of precisionengineered PVD coatings tailored for fluorine plasma etchapplications. Pegasus 100 series coatings are Yttrium-basedoxide coatings deposited at low temperatures.
Pegasus 100 series coatings can be deposited on aluminum,alumina, stainless steel and other commonly used substratematerials, with superior adhesion. These coatings are high purity,exhibit homogeneous microstructure and are conformal to thesubstrate surface.
Entegris’ Pegasus 100 series coatings are excellent barriers tocorrosive chemistries in a semiconductor etch environment,
protecting surfaces from erosion and minimizing particle
generation. These coatings have the highest etch/erosion
resistance in fluorine plasma environments. They are highly
dense compared to plasma sprayed coatings, microcrystalline
and conformal, which improves device yield and the productivityof semiconductor etch tools in a manufacturing environment.

APPLICATIONS—SPECIFICATIONS—

Substrate

Compatibility

Metals, Ceramics(e.g., Alumina, AlN)
and Semiconductors

Size

Up to 1016 mm D × 508 mm H
(40” D × 20” H)

Structure

Microcrystalline

Temperature

Deposition

200°C (392°F)

Use

1000°C (1832°F)• Semiconductor chamber components

FEATURES & BENEFITS—Coating thickness

Up to 10 µm

Electrical resistivity~ 1012 Ω-cm

Purity>99%• Fluorine etch resistance• Low particle generation

Hardness

1400 HV• Oxidation resistance• Dense and transparent

Elastic modulus

160 GPa

Roughness

Conformal — substrate dependent

Wear resistance

Very goodCorrosion
resistanceExcellent etch resistance in fluorine
environments
Oxidation-resistant up to 1000°C (1832°F) in air
Resistant to most acids and alkalis

CHARACTERISTICS—Etching Rate Performance*
3.0

Etch Rate (µm/hr)

2.5
2.0
1.5
1.0
0.50
Bulk
Quartz

Bulk
SiliconBulk
Aluminum

Bulk
AIN

Bulk
Alumina

Bulk
AlON

Pegasus Pegasus
500100Thin
Thin
FilmFilm* Tested under CF4+02 reactive plasma for 4 hours.
Note: The fluorine plasma etch rate is highly non-linear with exposure
time. Pegasus coatings are expected to last 10,000 RF hoursof plasma exposure.

SEM Images of Pegasus 100 Series Coatings
Coating Surface Morphology

Coating Cross-section

Pegasus 100

FOR MORE INFORMATIONTo learn more about how Entegris’ high-purity specialty coatings help customers enhance yields,
improve productivity and meet future technological needs, call Entegris at +1 781 538 8745.
To review Entegris’ specialty coatings offering, visit Entegris’ website at www.EntegrisSpecialtyCoatings.com.
TERMS AND CONDITIONS OF SALE
All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit entegris.com and select the Terms and Conditions link in the footer.

Corporate Headquarters

Customer Service

129 Concord Road
Billerica, MA 01821
USATel +1 952 556 4181
Fax +1 952 556 8022
Toll Free 800 394 4083

Entegris®, the Entegris Rings Design® and Pegasus™ are trademarks of Entegris, Inc.
©2010-2016 Entegris, Inc.

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