Precision beam tracker for the KEK AR-TB
based on SOI sensor technology
Hisanori Suzuki，Takumi Omori，Kazuhiko Hara，Miho YamadaA，
Toru TsuboyamaB，Ayaki TakedaC，Kyoya MisumiC,
University of Tsukuba， TMCITA ，KEKB，University of MiyazakiC，
2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

Introduction
2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

2

SOI Pixel Detector

3Semiconductor detector with readout circuit integrated (monolithic sensor)

Transistors are formed on buried SiO2 oxide layer using SOI (Silicon On Insulator) technology
 SOI-CMOS
Isolate individual transistors in oxide insulator
 Monolithic type
→ Pixel size can be miniaturized
sensor material can be minimized

CircuitCircuitelectrode

Metal bump

Si Sensor
2022/3/23
2022/3/22

Metal via
Circuit
~3μm

Pixel

SiO2

Si Sensor

TCHoU Workshop Photon & Particle Detectors DivisionMotivation―KEK AR-TB & Telescope―

4Necessity of GeV order test beamline for development ofparticle detectors in Japan➡ KEK AR-TB (Electron beamline) delivered 1st beam on
March 4.
1kHz(ax at 2-3GeV), 400Hz (5GeV)

Need a telescope with high position resolution➡ Telescope system with SOI pixel detectors is capableof low multiple scattering and fine intrinsic resolution

Beam take out

Stage2022/3/22

PF-ARTCHoU Workshop Photon & Particle Detectors Division4

Development goals and steps

5

StepsDetector synchronization test

This Study

Ultimate goal

 High-precision telescope system forOct 2021 820MeV/c e+ beam test
@ELPH

various DUTs

short term goal (in 2022)

 Evaluation of SOI Pixel Detector“DuTiP”(test chip for Belle 2 upgrade) inImprovement (thinning? frame rate)
for AR-test beamlineAR-Test Beamline➡ requires Position resolution of ~10 μm
2022/3/22

GEANT4 Simulation

2022 Dutip Evaluation

TCHoU Workshop Photon & Particle Detectors Division

56“INTPIX4NA” sensor

2019 Fermilab

Fine pixel size (17μm × 17μm )Large sensitive area (14mm × 9mm )~2.1um including tracker resolution

Parallel 13-blocks analog outputs➡ digitized off-chip with ADCs on dedicated DAQ
board SEABAS2Chip image
2019 INTPIX4 (500μm thick) @120GeV proton
Intrinsic position resolution of ~1.5𝜇𝜇𝜇𝜇Pixel Size 17μm
300μm thick2022/3/22

INTPIX4 Position resolution (500μm thick)
TCHoU Workshop Photon & Particle Detectors Division

6

Readout system

Readarea（ROI）
INTPIX4NA

7Trigger
RESET &INTEGRATION

512 pxRESET &INTEGRATION

Repeat Integration & Reset

832 pxREADOUT

Readout
after Trigger signal
Trigger Detector
XRPIX5Tracker(INTPIX4NA×5)

INTPIX4NA

3.2cm

3.2cm 3.2cm 3.2cm 3.2cm

 SEABAS2(FPGA based) board + sub-board
 Region of Interest (ROI) can be set
 Distribute control signals from the Timing board

ResetTrigger Timestamp Busy
CLK Reset 5 INTPIX4NA sensors simultaneouslyN XRPIX issues Trigger on recording beam hit

DAQ Timing Board Trigger starts readout in each sensor (BUSY is Set)
 Guarantee synchronization by adding timeNNN

 Chip repeats Integration & Reset until trigger is setTriggerinTrigger
enableinformation (time stamp) to each frame Not accept triggers while BUSY is set in any of 5 sensors
2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

7

820MeV/c Electron BeamPerformance Evaluation

2022/3/22

TCHoU Workshop Photon & Particle Detectors Division8ELPH 820MeV/c positron beam test Clustering ・ S/N evaluation

 Position resolution evaluation in various DUT-tracker plane configuration
 Nominal beam momentum 820MeV/c (momentum scan 200-820MeV/c)
 Nominal bias voltage 20V (HV scan 1V ~ 100V)
e+Beamsub-board
FPGA boad

Al frame

2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

9Clustering ・S/N evaluation
clustering
Cluster seed

Cluster range
Extracted pixels
Hit position
Charge share010 20 30 40 50
Cluster Size

0400 800 1200 1600 2000

Charge [ADC] Signal charge is shared by neighbor pixels
 the cluster spreads over 6-7 px in average➡Position resolution improved by a charge centroid method
 Evaluate the S/N ratio from the cluster charge
2022/3/22

TCHoU Workshop Photon & Particle Detectors Division10Track reconstruction

Tracking Method

DUT #3-2-1
Number of
Number of
upstream side tracker downstream side tracker

820 MeV/c positron beam

① Linear approximation
DUT Tracking Method

σx [um]131-1

12.15±0.10

131-114.48±0.12

132-114.42±0.12

132-220.28±0.16②Use slope “a” & neighbor's hit positon

 Track reconstruction with Highly scattered tracks aredegrading 2-2 track resolution
2022/3/22050 100 200 300 400

σx [um]131-1

12.15±0.10

131-112.18±0.10

132-111.80±0.10

132-214.57±0.12③ χ2cut

χ2>100INTPIX4NA itself as DUT

DUT Tracking Method

χ2TCHoU Workshop Photon & Particle Detectors Division

DUT Tracking Method

σx [um]131-1

12.15±0.10

131-110.29±0.12

132-110.25±0.12132-212.22±0.1211 Apply 1-100V to all sensors
 Evaluate the full-depletion voltage

ChargeClusterSize
 Cluster size is maximum at 20V

Cluster Charge [ADC]

ClusterBack Bias [V]Cluster Size [px]HV scanBack Bias [V]suppressed by stronger electric field in V>20V

 Even if the cluster charge drops to 1/3, the resolution
doesn’t degrade.
depletion thickness ~130μm@5V，~250μm@20V

2-1 trackingresolution➡low scattering & fine resolution are possible by thinning2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

Resolution [μm]

 Increase of the depletion thickness in V<20V，spread5V20V80V

Back Bias [V] (300μm) 12(128μm) (249μm)

GEANT4Simulation
2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

13

Geant4 Simulation
 Charge spread is added about the charge deposition by a
two-dimensional Gaussian with standard deviation σsim
INTPIX4NA

Simulation
Viewere+ beam spread among pixels is evaluated by fitting a Gauss to 1D projections as σspread➡set σsim=9μm from comparison with beam test

2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

σsim ～9μm

14Geant4 Simulation Resolution@1~5GeV Calculate the position by the charged centroid method

Tracker
DUT➡ Track reconstruction with 2-1

2-1 position resolution [μm]Simulate with 200 - 820MeV, 1 - 5GeV/c

200MeV 2-1 resolution results of beam test (200 - 820MeV/c,120GeV/c) are

300MeV
1GeV

500MeV

820MeV
5GeV

120GeV
2022/3/23
2022/3/22

2𝜎𝜎𝑠𝑠𝑠𝑠𝑠𝑠
2𝜎𝜎𝑜𝑜𝑜𝑜𝑜𝑜 ～ 𝜎𝜎𝑡𝑡𝑡𝑡𝑡𝑡 + 2𝑃𝑃
Scattering effect
Tracking resolution

 Estimate the resolution @5GeV/c

2.209μm ± 0.02 μm
Geant4
TCHoU Workshop Photon & Particle Detectors Division

2.68 ± 0.14 μm
prediction frombeam-test fit 15

Summary Constructed a high-precision, low-multiple-scattering telescope for KEK ARTB using SOI pixel detectors
 Performance verification by beam test at ELPH
 Position resolution evaluation （Momentum scan、HV scan）
 resolution~12μm for 820 MeV/c positrons
 Performance prediction by Geant4 Simulation and ELPH/Fermilab data Position resolution prediction 2.2~2.7μm @5GeV We will improve the system for AR-TB
2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

16

Back up2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

17AR-TB Beam information

2022/3/22

TCHoU Workshop Photon & Particle Detectors Division1818

5 sensors sync. ―DAQ rate―

5 sensors DAQ rate

500

Ethernet Cable

1913 block(CA 832px)
8 block(CA 512px)
4 block(CA 256px)

DAQ Rate [Hz]

400

hub
13 blocks parallel readout
INTPIX4NA ５枚Ethernet cablePC

2 block(CA 128px)
1 block(CA 64px)
64300
200
10000100200300

Row [px]

400

500

Row Length [px]Column Length [px]ROI Readout area can be selected by ROI

INTPIX4NA512 px

 512px * 512px(40Hz) ~ 64px*64px(400Hz) KEK AR-TB predicts 200-300Hz events for the chip size Reduction of readout bits and development of zero suppression

2022/3/22

832 pxTCHoU Workshop Photon & Particle Detectors Division

19600

205 sensors sync. ― time chart / synchronization ―BUSY中はTRIGGERを無視

Trigger
INTPIX4NARESET & INTEGRATIONRESET & INTEGRATIONRESET & INTEGRATION

Repeat RESET and INTEGRATION with external reset

External Resetperiod 10us
width 0.16us
BUSY

READOUT

Readout with Trigger

BUSY output during Reset / Readout

Time Stamp(31bit)
1ms

Counter Value
Trigger counter
XRPIX5Tracker & DUT(INTPIX4NA*5)

Hold the count when the trigger rises and add it to the data

Data: ADC value (× number of read pixels) + Time Stamp
ResetNNTimestamp
CLKN

DAQ Master Board

2022/3/22

Confirm the time stamps of 5 sensors are synchronized with >99%.

BusyNTrigger
outTrigger
inTriggerenableTCHoU Workshop Photon & Particle Detectors Division20

Depletion layer thickness of INTPIX4NA
 Depletion layer thickness of INTPIX4NA calculated for resistivity(10.1 ~ 12.1kΩcm)
抵抗率(10.1~12.1kΩcm)
から計算したINTPIX4NAの空乏層厚(7kΩcm is the estimated resistivity value of INTPIX4 from 2019 beam test) 計算上25~30Vで完全空乏化
 INT4の抵抗率で計算した場合45Vで完全空乏化

2022/3/22

TCHoU Workshop Photon & Particle Detectors Division

逆バイアス [V]空乏層幅 MIN [μm]空乏層幅 MAX [μm]7kΩcm換算 [μm]

035.4

38.7

29.4

5

125.0

136.8

104.0

10173.2

189.5

144.2

15210.6

230.5

175.3

20242.3

265.2

201.7

25270.3

295.9

225.1

30

295.7

323.7

246.2

35319.1

349.2

265.6

40340.9

373.1

283.8

45361.3

395.5

300.8

50380.7416.7

316.9

55

399.1

436.8

332.3

60

416.7

456.1

346.9

65

433.6

474.6

361.0

70

449.9

492.4

374.5

75

465.6

509.6

387.6

80

480.7

526.2

400.2

85

495.5

542.3

412.5

90

509.7

557.9

424.4

95

523.6

573.2

435.9

100

537.2

588.0

447.2

105

550.4

602.4

458.2

110

563.3

616.6

469.0

115

575.9

630.4

479.4

120

588.3

643.9

489.7

125

600.3

657.1

499.8

130

612.2

670.1

509.6

135

623.8

682.8

519.3

140

635.2

695.3

528.8

145

646.4707.5

538.2

150

657.4

719.6

547.3

155

668.3

731.5

556.4

160

678.9

743.1

565.2

165

689.4

754.6

574.0

170

699.8

765.9

582.6

175

710.0

777.1

591.1

180

720.0

788.1

599.4

185

729.9

798.9

607.7

190

739.7

809.6

615.8

195

749.4

820.2

623.8

200

758.9

830.6

631.8

21

ELPHビームテスト e+ビームセッティング、プロファイル
 Beam target: W (tungsten) 20μm

Beam profile confirmed with XRPIX5

 Beam energy:
Current ofelectromagnet

momentum

100.0 A

197.79 MeV/c

QF=2T/m,
QD=4T/m

150.0 A

297.30 MeV/c

QF=3T/m,
QD=6T/m

250.0 A

492.5 MeV/c

QF=4T/m,
QD=10T/m

475.0 A

822.37 MeV/c

QF=9T/m,
QD=20T/m

2022/3/22

Quadrupole
magnet13.8mmTCHoU Workshop Photon & Particle Detectors Division

21.9mm22

INTPIX4 circuit / logic

2022/3/22

TCHoU Workshop Photon & Particle Detectors Division23