Minimizing Burrs and Defects on Microstructureswith Laser Assisted Micromachining Technology

Paper:

Minimizing Burrs and Defects on Microstructureswith Laser Assisted Micromachining Technology
Shaolin Xu∗,† , Shinsaku Osawa∗∗, Ryuichi Kobayashi∗∗ , Keita Shimada∗∗ ,Masayoshi Mizutani∗∗ , and Tsunemoto Kuriyagawa∗∗ Division of Biomechanical Engineering, Graduate School of Biomedical Engineering, Tohoku University

Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan† Corresponding author, E-mail: shaolin@pm.mech.tohoku.ac.jp∗∗ Department of Mechanical Systems Engineering, Graduate School of Engineering, Tohoku University

Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan[Received May 24, 2016; accepted July 12, 2016]

Molding technology is widely used to manufacture optical components because of its high efficiency. Alongwith the quick development of miniaturization in industry, the detrimental effects of previously negligible burrs and defects on mold surfaces have become significant to the performance of components, sothese problems should be minimized. In this study, alaser assisted micromachining method was developed
to solve this problem during the fabrication of periodic microstructures on a molding material of electroless nickel-phosphorus (NiP) plating. The transient temperature distributions of the workpiece under laser irradiation and the change in the maximum
shear stress during the laser assisted micromachining
process were simulated to set appropriate experimental conditions. Then, periodic micropyramid structures were fabricated by both conventional cutting andthe laser assisted cutting processes. Results show that
defects largely decreased on machined structures withthe assistance of laser irradiation. The decrease in specific cutting force and the change of chips’ morphology
were also utilized to analyze the reasons for this improvement.
Keywords: laser assisted micromachining, burrs and defects, microstructures, electroless NiP plating

1. Introduction
Molding technology is generally used to replicate structures on materials such as glass and polymers to fabricate functional optical components at a high rate ofefficiency [1–3]. Electroless nickel-phosphorous (NiP)
plating with an amorphous structure is a widely usedmold material owning to its excellent mechanical properties and good machinability [1–4]. Therefore, structures are generally fabricated on NiP plating surfaces using cutting technology. Recently, the miniaturization ofindustrial components has attracted a lot of attention andachieved many improvements [5], but this miniaturization
Int. J. of Automation Technology Vol.10 No.6, 2016

Fig. 1. A typical retroreflective structure with burrs and defects.

has made previously negligible burrs and defects on structures become very detrimental to the functional performances of the components. Fig. 1 demonstrates a typicalexample of burrs and defects on a retroreflective structure
fabricated using a conventional cutting technique. The
required optical properties of glass or polymer components, such as reflectivity and transmissivity, will be decreased by these defects. When the sizes of periodic structures are decreased to dimensions of several micrometers
or even much smaller, burrs and defects of submicrometer scale also greatly decrease the required performances[6, 7]. Conventional deburring technologies can be used
to remove burrs, and some new techniques are capable ofremoving burrs of microfeatures [8–10], but they are incapable of repairing defects. Besides, form accuracy is
generally decreased in deburring processes, and the increased costs also have to be considered. When burrs
are decreased to several-micrometer or even submicrometer dimensions, most of the conventional deburring methods seem to be inadequate. Therefore, new micromachining technologies capable of minimizing burrs and defects
should be developed to solve this problem.
Laser assisted machining (LAM) is a thermal-assisted
machining process in which the work material is locallysoftened by means of laser irradiation before being machined [11]. LAM has already garnered a lot of attention
for machining hard-to-machine materials [12–14] because891

Xu, S. et al.
2.5

Fig. 2. Schematic of laser assisted micromachining process.

Pulse energy ȝJ

2
Average output power

600

1.5

Pulse energy
1400

Average output power W

800

0.5
200

892

0

5000

0
10000

Oscillation frequency Hz

Fig. 3. Average output power and pulse energy versus theoscillation frequency of the laser beam.

0.8

Absorptivity A

their mechanical strength and hardness can be decreasedby the heat softening. Therefore, the quality of machined
surfaces can be improved with a prolonged tool life ata high rate of machining efficiency. Ductile plastic deformation can be obtained with few cracking occurrenceswith the help of laser irradiation, which can be used to explain the improved machinability and surface quality [14].
The enhanced machinability obtained with heat softening
also has the potential to be used to minimize burrs anddefects generated in the mechanical micromachining process. That potential was investigated in this study.
There have also been reports on improving quality ofmachined surfaces by preheating the entire workpiecewith an induction heating method [15]. Local preheating methods have also been investigated with other external heat sources [16]. Preheating the entire workpiece toa high temperature may introduce undesirable microstructural changes in workpieces, and thermal distortion is also
highly detrimental to the required precision if fine surface structures are required. The thermal efficiency is also
relatively low. Compared to other local thermal-assisted
machining techniques, LAM has some advantages [16].
One advantage is that the diameter of the laser spot canbe concentrated to micrometer or even nanometer dimensions at a high power density. As a result, only the small
area of material to be machined is efficiently heated, andthis serves to minimize the area affected by heat. The
fast heating rate of laser irradiation can also obtain a large
thermal gradient along the depth direction, which has thebenefit of producing a high surface temperature withoutleaving much thermal damage on the machined surfaces.
The light path can be also freely controlled. All of thesemerits make micromachining under laser irradiation possible. Therefore, a laser assisted micromachining method
was developed to fabricate microstructures on NiP plating
surfaces in this study.
The purpose of this study is to verify the efficiency of
LAM for fabricating microstructures on surfaces while
producing fewer burrs and defects than those producedby conventional cutting. Fig. 2 schematically shows thedesign of the laser assisted micromachining process thatwas performed by locally heating the work material justahead of a diamond tool using a laser beam with a small
incident angle. A pulse laser (Nd: YAG) was used because of its high heating rate. The large thermal gradientof the workpiece can ensure a high surface temperature
with few detrimental effects on the machined subsurface.

0.6

0.4

200

400

600
800
Wavelength nm

1000

Fig. 4. The absorptivity of light in the NiP plating versus
the light wavelength.

2. Simulations of Distributions of Temperatureand Shear Stress
One of the challenges of LAM is to ensure that the heating rate is beneficial to the removal of the work materials
at a low level of shear stress without causing thermal damage to the tool or machined surfaces [17]. Therefore, thetransient temperature distribution of the workpiece andthe change in shear stress in the material removal process under laser irradiation should be analyzed so that thedesired experimental conditions for effective machining
may be set. The laser input parameters, including average
power, spot diameter, and scanning speed, among otherparameters such as the light absorptivity of the work material, finally determine the temperature distribution.
The average power of the pulse laser was first measured
using a thermal sensor. Fig. 3 shows the measured average power and pulse energy versus the oscillation frequency. A stable output power for the pulse laser was
obtained under the oscillation frequency of 7.5 kHz with
Int. J. of Automation Technology Vol.10 No.6, 2016

Minimizing Burrs and Defects on Microstructureswith Laser Assisted Micromachining Technology

Table 1. Conditions for simulations of heat conduction under laser irradiation.
Parameters
Laser wavelength
Average output power
Diameter of laser beam spot
Absorptivity
Workpiece
Thickness of NiP plating
Material density
Specific heat capacity
Thermal conductivity
Initial temperature

Temperature 䉝

400

Values
532 nm
1.9 W
0.3, 0.5, 0.7, 1.0 mm
0.536
NiP alloy plated on SUS304 (1.0 × 1.0 × 1.1 mm3 )0.1 mmNiP: 5.02; SUS304: 15.0 W/(m · K)
NiP: 7.9; SUS304: 8.03 g/(cm3 )NiP: 0.48; SUS304: 0.502 J/(g · K)
20 ◦ C

0.3 mm
0.5 mm
0.7 mm
1.0 mm

300

200

100

0
0

0.2

0.4

Irradiation time s

Fig. 6. Typical simulation results of temperature distribution in a workpiece after 0.1 s irradiation with a beam spot
diameter of 0.5 mm.

Fig. 5. Changes of surface temperature versus irradiation
time with different diameters of laser beam spot.

a power of 1.9 W. The absorptivity of laser irradiation in
the NiP plating can be calculated by using the following
equation:A = 1−R = 1−(n − 1)2 + k2
(n + 1)2 + k2

. . . . . . (1)where R is the reflectivity, n is the refractive index, and k is
the extinction coefficient. By referencing the data in [18],the absorptivity of the laser beam in the NiP plating can beplotted against its wavelength, as shown in Fig. 4. Basedon the measured stable average power, the calculated absorptivity, and other parameters listed in Table 1, a finite
element method was used to simulate the temperature distribution by employing a commercial software of COMSOL Multiphysics.
During LAM, the thermal energy of laser irradiation istransferred to the work material. The governing equation
for the heat transfer is the following:∂T= ∇ · (k∇T ) + qin . . . . . . . . (2)∂twhere ρ is material density, C p is specific heat capacity,
T is temperature, t is time, k is thermal conductivity, andρCpInt. J. of Automation Technology Vol.10 No.6, 2016

qin is the energy generated by the laser irradiation. In thisstudy, the laser energy is represented as a volumetric heating source with an ideal Gaussian intensity profile. The
attenuation of the laser power within the material was described by the Beer-Lambert law, and the power density
in the workpiece was finally expressed by the following
equation:
8 x2 + y2
8 ε Q0. . . . . (3)
qin =
exp −
π d2
d2
where qin is the laser beam power density, Q0 is the average laser beam power, ε is the absorptivity of laser poweron the surface, and d is the laser beam diameter. The
boundary condition for the top surface is a combinationof the thermal radiation of the laser energy and convection
heat transfer through the air. Thermal insulation boundary conditions are defined on the bottom and lateral surfaces. Fig. 5 plots top surface temperature versus irradiation time with different diameters of the beam spot,
and Fig. 6 shows a typical temperature distribution after
0.1 s laser irradiation with a beam spot of 0.5 mm. It canbe seen that the highest temperature is determined by thebeam spot diameter under a certain laser output power.
Temperature above 150 ◦ C can be obtained up to a depthof 50 μ m.
893

Xu, S. et al.

Fig. 7. The distributions of shear stress during material removal processes at temperatures of (a) 20◦ C and (b) 200◦ C.

Table 2. Conditions for cutting simulations at different temperatures.
Parameters
Rake angle
Clearance angle
Tool materialWork material
Initial temperature
Depth of cut
Cutting speed

Values0◦8◦Single crystalline diamond tool
MP35N
20 ◦ C, 200◦ C
10 μ m1200 mm/min

To evaluate the effects of temperature rise on the shear
stress distributions while material is being removed using
LAM, orthogonal cutting processes under temperaturesof 20 and 200◦ C with a single crystalline diamond tool
were simulated using commercially available software,
AdvantEdge FEM (Three Wave Systems). The simulations were done under the conditions listed in Table 2. A
nickel alloy MP35N with properties near to those of the
NiP alloy was utilized because NiP plating does not appear in the material database of AdvantEdge FEM. The
work material was set with an elastic body, and the toolwith a rigid body was used in the simulations. The foursides and the bottom of the workpiece were rigidly fixed.
Fig. 7 shows the shear stress distributions at different temperatures. These data demonstrate that a rise in temperature will decrease the maximum shear stress in the material removal process. The change in specific cutting
forces with the temperature rise will be shown in the subsequent experiment. Stress distributed around the cutting
tip before the tool leaves the workpiece generally resultsin burrs or defects on exit edges [19]. The stress can bediminished by heating the removal area locally, as shownin the simulation results, and this seems to help minimize
burrs and defects. However, the deformation mechanismsof amorphous NiP alloys are unclear [20]. In other words,
894

Fig. 8. Setup of laser assisted micromachining experiment.

its ductile-brittle transition or other effects caused by thetemperature changes cannot be accurately predicted. Furthermore, the amorphous NiP plating is thermodynamically unstable, and the heat treatment may lead to its crystallization [21], which makes it a harder and more brittle
material. Therefore, cutting experiments should be done
under increased temperatures to investigate the effects oflaser irradiation on burrs and defects by combining thesefindings with the simulation results.

3. Experiments and Discussion
Figure 8 is a picture of a practical laser assisted micromachining process. A five-axis, numerically controlled,
ultraprecision cutting machine (MIC-300, Nagase Integrex Co., Ltd.) was used. As this machine has a resolution of 0.1 nm on the XYZ axes and 0.00001◦ on the
BC axes, it is capable of ultraprecision machining for the
fabrication of very fine structures. The laser focusing unit
was mounted on the ultraprecision machine with a small
Int. J. of Automation Technology Vol.10 No.6, 2016

Minimizing Burrs and Defects on Microstructureswith Laser Assisted Micromachining Technology

Table 3. Conditions of microgroove and micropyramid array fabrication.
Parameters
Workpiece
Depth of cut
Cutting speed
Cooling system
Temperature

Microgrooving Fabrication of micropyramid arrayNiP (Phosphorus content: 10%)
10 μ m
1.0 (0.6, 0.3, 0.1) μ m
1200 mm/min
1000 mm/min
Compressed air
23.0 ◦ C(a)Specific cutting force N/mm2

7000

6000

Simulation results
Experimental results

5000

(b)
4000

3000

Conventional cutting Laser assisted Machining

Fig. 9. Comparison of specific cutting forces in laser assisted micromachining and conventional cutting.

incident angle. Compressed air was used to remove debris immediately in the LAM process to protect the machined surface and laser head. A three-axis dynamometer(MiniDyn 9256A2, Kistler) was mounted under the workpiece to measure the cutting forces. The diameter of thelaser spot was first measured using a simple laser irradiation process on a workpiece coated with printing ink, andthe test results showed that the spot was approximately
0.5 mm in diameter. A single crystal diamond tool withthe tip angle of 90◦ , rake angle of 0◦ , and clearance angle of 8◦ was used in the cutting processes. All the LAM
experiments were performed with the pulse laser with anaverage power of 1.9 W. Other test conditions are listed
in Table 3. The machined surfaces were observed with afield emission scanning electron microscope (SM-71010,
JEOL Corporation).
First, the effects of laser irradiation on cutting forceswere investigated through microgrooving experiments under the condition listed in Table 3. Fig. 9 compares the
specific cutting forces of conventional cutting and LAM
with both the simulation and experimental results. The
specific cutting forces were decreased approximately 30%
with the assistance of laser irradiation, higher than the approximately 12% decrease in the simulation result. The
experimental results verified that using laser irradiation
for the thermal softening of work material will lead to a
reduction of flow stress, just as that was found throughsimulation. Therefore, we can conclude that the thermal
Int. J. of Automation Technology Vol.10 No.6, 2016

Fig. 10. Micropyramid arrays fabricated using (a) conventional cutting and (b) laser assisted micromachining.

softening effect plays a major role, although the possible
crystallization of amorphous NiP plating may lead to anincrease of hardness under this condition. Then, to verify the effect of laser irradiation on minimizing burrs anddefects, periodic micropyramid structures were fabricatedunder the conditions shown in Table 3. A total depth ofcut of 1 μ m was achieved by continuous cutting processes
in three successive steps with depths of cut of 0.6, 0.3 and0.1 μ m, respectively. Fig. 10 shows the FE-SEM imagesof the structures fabricated. It was found that surface defects greatly decreased with the assistance of laser irradiation while the burrs on the edges of structures seemed toremain unchanged.
To further demonstrate the reasons for the observed
phenomena in the LAM processes, the morphology ofchips generated during the microgrooving experiments
was also observed with a scanning electron microscope(SU1510, Hitachi). The results of these observations
can be seen in Fig. 11. A typical infinite helix chip inconventional cutting process became a twisted chip in
LAM, meaning that the chip curl decreased or mostly
disappeared. Smaller curl diameter with the same crosssectional geometry of cutting chip indicates that morestrain accumulated during the material deformation process [22]. Segmented, saw-toothed chips with periodic
slippages can be observed on each chip, but the slippage
spacing is larger in LAM chips, as the enlarged images
show. This indicates the slippages easily propagate andbecome bigger in LAM. The deformation processes are895

Xu, S. et al.

(a)changes in chip morphology seemed to serve to decrease burrs.
(4) In future work, the changes in material removal
mechanisms under various laser irradiation conditions should be further studied to address more completely the phenomena observed in this study.

(b)
Acknowledgements
The work in the present research was supported by a Grant-inAid for Challenging Exploratory Research (No. 26630017) fromJapan Society for the Promotion of Science.

References:Fig. 11. Morphology of chips generated in (a) conventional
cutting process and (b) laser assisted micromachining.

not similar, and less strain is required for material removal
in LAM. These results can explain what causes the minimization of defects in LAM. By decreasing the depth of
cut to several hundreds of nanometers or even smaller, thesize of the burrs in both conventional cutting and the LAM
process can be kept at a very low level. However, thematerial deformation mechanisms of amorphous NiP alloy are different from those of crystalline metals, and thisshould be paid more attention to in future work to get abetter understanding, experimentally and theoretically, ofchip generation mechanisms.

4. Conclusion
This study has verified that it is feasible to use laser
assisted micromachining to fabricate periodic microstructures with fewer burrs and defects than when conventional
cutting processes are used. A pulse laser was used, and thetemperature distributions and shear stress in the cutting
processes under laser irradiation were simulated. Laser
assisted micromachining experiments were carried out inconditions based on the simulation results. Findings canbe summarized as follows.
(1) Irradiation with the pulse laser heated the surface of
the workpiece quickly with a large thermal gradient,and the maximum shear stress during the material
removal process decreased with the rise in workpiecetemperature.
(2) Laser irradiation has a valid softening effect on thework material. This was verified by a 12% decreasein the specific cutting force in the simulation and a
30% decrease in the microgrooving experiment.
(3) Surface defects on the microstructures fabricated bymeans of laser assisted micromachining were foundto be significantly reduced. The effectiveness oflaser irradiation on burr minimization was not verified, although the decrease in cutting forces and the896[1] R. Kobayashi, T. Zhou, K. Shimada, M. Mizutani and T. Kuriyagawa, “Ultraprecision glass molding press for microgrooves withdifferent pitch sizes,” Int. J. Automation Technol., Vol.7, No.6,
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Name:
Ryuichi Kobayashi

Affiliation:
Department of Mechanical Systems Engineering, Graduate School of Engineering, Tohoku
University

Address:
Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

Brief Biographical History:
Name:
Shaolin Xu

Affiliation:
Assistant Professor, Bio-Medical Interface Fabrication Laboratory, Division of Biomechanical Engineering, Graduate School of Biomedical
Engineering, Tohoku University

2014- Doctoral student, Department of Mechanical Systems Engineering,
Graduate School of Engineering, Tohoku University

Main Works:• R. Kobayashi, T. Zhou, K. Shimada, M. Mizutani and T. Kuriyagawa,“Ultraprecision Glass Molding Press for Microgrooves with Different
Pitch Sizes,” Int. J. Automation Technol., Vol.7, No.6, pp. 678-685, 2013.

Name:
Keita Shimada

Address:
Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan.

Brief Biographical History:

Affiliation:

2012-2015 Doctoral student, Department of Mechanical Systems andDesign, Graduate School of Engineering, Tohoku University
2014-2015 JSPS Research Fellow, Department of Mechanical Systems andDesign, Graduate School of Engineering, Tohoku University
2015- Assistant Professor, Division of Biomechanical Engineering,
Graduate School of Biomedical Engineering, Tohoku University

Assistant Professor, Department of Mechanical
Systems Engineering, Graduate School of Engineering, Tohoku University

Main Works:• Ultrasonic assisted machining, laser assisted machining, nanofabricationand its biomedical applications.
• S. Xu, K. Shimada, M. Mizutani and T. Kuriyagawa, “Fabrication of
hybrid micro/nano-textured surfaces using rotary ultrasonic machining
with one-point diamond tool,” Int. J. of Machine Tools and Manufacture,
Vol.86, pp. 12-17, 2014.

Membership in Academic Societies:• Japan Society of Mechanical Engineers (JSME)

Address:
Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

Brief Biographical History:
2009- Graduated from Tohoku University, Japan with Master ofEngineering
2012- Graduated from Tohoku University, Japan with Doctor ofEngineering
2012- Assistant Professor, Graduate School of Engineering, Tohoku
University

Main Works:

Name:
Shinsaku Osawa

Affiliation:
Department of Mechanical Systems Engineering, Graduate School of Engineering, Tohoku
University• K. Shimada, N. Yoshihara, J. Yan, T. Kuriyagawa, Y. Sueish and H.
Tezuka, “Ultrasonic-assisted Grinding of Ultra-High Purity SUS 316,” Int.
J. Automation Technol., Vol.5, No.3, pp. 427-432, 2011.
• K. Shimada, P. J. Liew, T. Zhou, J. Yan and T. Kuriyagawa, “Statistical
Approach Optimizing Slant Feed Grinding,” J. Adv. Mech. Design,
Systems and Manu, Vol.6, No.6, 2012.
• K. Shimada, C.-I Kuo, M. Mizutani and T. Kuriyagawa, “Statistical
Analysis for Evaluating Surface Roughness of Plane Honing,” Int. J.
Automation Technol., Vol.8, No.4, pp. 576-583, 2014.

Membership in Academic Societies:• Japan Society of Mechanical Engineers (JSME)• Japan Society for Precision Engineering (JSPE)• Japan Society for Abrasive Technology (JSAT)

Address:
Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

Brief Biographical History:
2014- Graduated from Department of Mechanical Systems and Design,
Graduate School of Engineering, Tohoku University, Japan with Master ofEngineering
2014- Materials Engineer, Toray Group in Japan

Int. J. of Automation Technology Vol.10 No.6, 2016

897

Xu, S. et al.

Name:
Masayoshi Mizutani

Affiliation:
Associate Professor, Department of Mechanical
Systems Engineering, Graduate School of Engineering, Tohoku University

Address:
Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

Brief Biographical History:
2003- Completed Master Course Integrated Design Engineering, Graduate
School of Science and Technology, Keio University
2004- Junior Research Associate, Ohmori Materials Fabrication
Laboratory, RIKEN
2006- Completed Doctor Course Integrated Design Engineering, Graduate
School of Science and Technology, Keio University
2006- Collaboration Researcher, Advanced Development & Supporting
Center, RIKEN
2007- Collaboration Researcher, Ohmori Materials Fabrication Laboratory,
RIKEN
2009- Special Postdoctoral Researcher, Ohmori Materials Fabrication
Laboratory, RIKEN
2011- External Collaborative Researcher, Sophia University
2012- Collaboration Researcher, Ohmori Materials Fabrication Laboratory,
RIKEN
2012- Associate Professor, Graduate School of Engineering, Tohoku
University

Main Works:• Micro/Meso Mechanical Manufacturing (M4 Process), Laser Process,Powder Jet Deposition (PJD), Functional Interface, Biomaterials,
Bio-Medical Applications, Biomimetic Surface

Membership in Academic Societies:• Japan Society of Mechanical Engineers (JSME)• Japan Society for Precision Engineering (JSPE)• Japan Society for Abrasive Technology (JSAT)

Name:
Tsunemoto Kuriyagawa

Affiliation:
Professor, Graduate School of Biomedical Engineering, Tohoku University

Address:
Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

Brief Biographical History:
1984-1990 Research Associate, Tohoku University
1990-1992 Assistant Professor, Tohoku University
1991-1992 Visiting Professor, University of Connecticut
1992-2002 Associate Professor, Tohoku University
2003- Professor, Tohoku University

Main Works:• Nano-Precision Mechanical Manufacturing, Micro/Meso Mechanical
Manufacturing (M4 process), Powder Jet Deposition and Creation of
Functional Interface

Membership in Academic Societies:• Science Council of Japan (SCJ)• International Committee for Abrasive Technology (ICAT)• International Society for Nanomanufacturing (ISNM)• Japan Society of Mechanical Engineers (JSME)• Japan Society for Precision Engineering (JSPE)• Japan Society for Abrasive Technology (JSAT)

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Int. J. of Automation Technology Vol.10 No.6, 2016