2015.3.6 最終講義

Curriculum Vitae	 
1949

Born in Yamanashi Prefecture

1949

Osaka1954

Tokyo (5 year old)

1958

Osaka (9 year old)

1968-1978

Osaka University

1978

Tohoku University

1984-1985

Arizona State University

1990

Tonomura Wave Front Project (JRDC ERATO)

1995

Nagoya University, CIRSE (理工科学総合研究センター)	 

2002

Nagoya University, Department of electrical Engineering andCommunication Science

2007

Nagoya University, EcoTopia Science Institute12015.3.6 最終講義

With Prof. Hatsujiro Hashimotoat IMC 2006 (85 year old)2

2015.3.6 最終講義

Prof. Keiji Yada at 77 year old party	2015.3.6 最終講義

Young Prof. John Cowley	

2015.3.6 最終講義

With Prof. John M. Cowley

at 80 year old party 	2015.3.6 最終講義

Dr. Akira Tanomura 	2015.3.6 最終講義

With Akira Tonomura, Sumio Iijima & ・・・・・ 	

7

2015.3.6 最終講義

With Dr. Akira Tonomura & ・・・ 	

2015.3.6 最終講義

History of Studies	 
1971-1972
1972-1978
1978-1984
1984-1985
1985-1990

1990-1995

Osaka Univ. BS: Measurements of work functions byphotoemission
Osaka Univ. MS & PhD: Optical image processing of highresolution electron microscopic images
Tohoku Univ. Assistant Prof. : High resolution observation ofasbestos
ASU: High resolution observation of the surface profile of MgO
Tohoku Univ. Assistant Prof. & Associate Prof. :・X-ray diffraction effects on quantitative analysis by EDX
・Scanning image detection system for TEM
・Simulation of electron holography ・・・・・Start of surfing
Tonomura Project , Group Leader:・High resolution electron holography and observation of magnetics
92015.3.6 最終講義

History of Studies	 
1995-Nagoya University:
・Precise electron holography (phase shifting EH)
・Differential electron holography 科研費基盤(B)・Observations of magnetics by EH and Lorentz microscopy 経済産業省「次世代自動車向け高効率モーター用磁性材料技術開発」	 

Magnetic nano particles, Magnetic multi layers 科研費基盤(B)､	 	 	 特定A	 (公募･計画)	 	 

・Field emission gun of carbon nano tubes 科研費基盤(B)・Stereoscopic TEM with TV rate 科研費基盤(A)・In situ observation of SOFC 科研費特定領域(計画)、基盤(A)、文科省「ナノテクノロジーを活用した環境技術開発プログラム」ナノ材料科学
環境拠点(GREEN)	 

・Phase plate using A-B effect 科研費基盤(A)102015.3.6 最終講義

Contents	 
１．Introduction
２．Interference of waves
３．Electron holography
・High resolution imaging
・Observation of Magnetic field
５．Stereoscopic TEM
６．Phase plate using A-B effect	
112015.3.6 最終講義

Contents	 
１．Introduction
２．Interference of waves
３．Electron holography
・High resolution imaging
・Observation of Magnetic field
５．Stereoscopic TEM
６．Phase plate using A-B effect	
122015.3.6 最終講義

What’s This ?

13

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Equipotential Lines	 

14

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What’s This ?

15

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Magnetic Line of Force	 

16

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Magnetic Structure of Ferromagnetic	 
Magnetic domain	  Domain wall	 

Magnetization	 
Multi domain structure	 External field	 

External field	 
SN

Magnetic energy＝Static energy＋wall energy	 ∝ V ∝ d3
∝ S ∝ d2

φ < ~1mm

Singl magnetic domain particle	 
17

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Single Magnetic Domain Particle of Ba-Ferrite 	 18

2015.3.6 最終講義

Development of Electron Microscope�
1858

J. Plücker

陰極線の発見1869

J. W. Hittorf

陰極線の電磁偏向

1874

E. Abbe

顕微鏡の分解能限界

1897

J. J. Thomson

電子の存在を確認

1899

E. Wiechert

軸方向磁界によるスポット径縮小

1924

L. de Broglie

電子の波動性（物質波）

1927

C.J.Davison & L.H.Germer

Ni表面での電子線回折実験

H. Busch

回転対称磁界のレンズ作用

R. Rüdenberg

電子顕微鏡の特許申請

M. Knoll & E. Ruska

電子顕微鏡（磁界型）で最初の像(x17)を発表

1933

B. von Borries & E. Ruska

２段磁界型電顕で光顕を超える(75kV, x12,000,50nm)

1934

L. Marton

Os染色による生物試料の撮影(x3,900)

E.Sugata 	

大阪大学	

1935

M. Knoll

走査電子顕微鏡(SEM)

1936

Metropolitan-Vickers社

商用第１号機

J.Okubo & T.Hibi

東北大学	

1931.5.5
6.4	

EM-1 (20kV, >1µm)

2015.3.6 最終講義
1939

H. Mahl & H. Boersch

静電型電子顕微鏡 AGE社 (8nm)

Ruska & Borries, Siemens社

UM-100 (100kV, x30,000, 7nm)

（JSTS）
1940

第37小委員会（Shoji Seto）	

M. V. Ardenne

分解能3nm

H. Rusk

バクテリアファージの電顕像

H. Boersch

フレネル縞

浅尾荘一郎

x100（東芝）

1941

SeimensUM-220 (220kV, 2nm)

1943

HitachiHU-2（名古屋大学）

1946

J. Hillier & E. G. Ramberg

非点収差補正で1.1nm

1948

D. Gabor

ホログラフィ

1949

Japanese Electron Microsocpy Society 日本電子顕微鏡学会設立

1954

Seimens

Elmiskop I (100kV, <1nm)

1956

J. W. Menter

白金フタロシアニン (1.19nm)

G. Möllenstedt & H. Düker

電子線バイプリズムの開発

1960

T. H. Maiman

レーザーの発明(ルビーレーザー)

1962

E.N.Leith & J. Upatnieks

二光束(off-axis)ホログラフィーの考案

1968

A. V. Crew et al.

FE-SEM, 単原子像

1979

A. Tonomura et al.

FE-TEM, 電子線ホログラフィ

20

2015.3.6 最終講義

Dennis Gabor (1900 - 1979)	

Nature, 1948	

21

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Contents	 
１．Introduction
２．Interference of waves
３．Electron holography
・High resolution imaging
・Observation of Magnetic field
５．Stereoscopic TEM
６．Phase plate using A-B effect	
22

2015.3.6 最終講義

Interference of Light	 
Thomas Yang (Eng.1773-1829) 	

Interference with double slits

xr1r2

a/2
a/20zRI22⎡ ⎧ ⎛a ⎞ ⎛a ⎞ ⎫⎤⎢ ⎪ ⎜ x + ⎟ ⎜ x − ⎟ ⎪⎥2⎡ ⎢2⎛π ⎪2⎝π ⎞ 2 ⎠ ⎛⎝ 2π2 ⎠ ⎞⎪⎤⎥
r2 ⎟⎬⎥
I == cos− ⎜ i
⎜ i ⎨ r1 ⎟ + exp⎢exp⎢λ ⎠⎪⎦⎥⎠⎝ 2R⎣ λ⎝ ⎪λ 2R⎢ ⎪⎪⎭⎥⎦⎣ ⎩ ⎧ 2π⎫
= 2 + 2 cos ⎨ ( r1 − r2 )⎬⎛ 2π ax⎩ ⎞λ⎭= cos⎜⎟
11⎝⎛ λ R⎡ ⎧⎠2222 ⎤ ⎞⎫⎧⎫
2πaa⎪⎪⎪⎪⎛⎞⎛⎞⎜⎢ ⎨ x += cos akx+ R 2 ⎬ − ⎨⎜ x − ⎟ + R 2 ⎬ ⎥ ⎟⎜⎟= cos ⎜⎜ λ ⎢ ⎪⎝⎥ ⎟⎟
2 ⎠
2 ⎠
⎝
⎪
⎪
⎪
⎩
⎭
⎩
⎭
⎦ ⎠
⎝R ⎣

23

2015.3.6 最終講義

Interference of Light	 
Fresnel’s Biprism (Augustin J. Fresnel:Fr.1788-1827)
Diffraction with a pin hole is not essential for Young’s experiment 	
xr1r20z

RI24

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Interference of Electron Wave	
Interference experiment with electrons
The core of quantum mechanics (R.P.Feynman)

Electron Biprism

G. Möllenstedt and H. Düker, Z. Phys. 145 (1956) 377.
+V

25

2015.3.6 最終講義

Electron Biprism

A: Rotation	
B: X-traslation	
C: Y-translation	

Hitachi	Electron Biprism

A: Rotation	
B: X-traslation	
C: Y-translation	2015.3.6 最終講義

Making Filaments of Biprism	 28

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Interference of the Electron Wave	
Vf=15 V	

Vf=30 V	
2 0nm

2 0nm

Interfering region：〜20 nm	

Interfering region：〜83 nm	

Fringe spacing：0.90 nm	

Fringe spacing：0.44 nm	29

2015.3.6 最終講義

Contents	 
１．Introduction
２．Interference of waves
３．Electron holography
・High resolution imaging
・Observation of Magnetic field
５．Stereoscopic TEM
６．Phase plate using A-B effect	
30

2015.3.6 最終講義

Holography	 Prism	
Hologram	
Reference wave	
Laser light	

Mirror	Laser light	

Specimen	Object wave	 image
Reconstructed(Imaginary image)	 Conjugate image
Hologram	
(Real image)	

31

2015.3.6 最終講義

Electron Holography
FE-Gun	 Specimen	 
レーザー光	 

Electronbiprism	 +V
Hologram	 

ホログラム	 

Recording of a hologram	 

Aperture	 Reconstructedwave-front	 

Reconstructed optics	 

2015.3.6 最終講義

Interference Microscopy(Machzender Interferometer)	 
FE-Gun  Specimen	 Condenser	 
Objective	 Mirror	 Half mirror	  Hologram	 
Aperture	 Laser	 Lens	 

Lens	 +V Electronbiprism	 

Lens	 
Mirror	  Filter	 Hologram	 Half mirror	 Interferogram	 

Interference micrograph	 33

2015.3.6 最終講義

Digital Reconstruction
FilterInverse Fourier Transform
Fourier Transform

Reconstructed Complex amplitude	ψ (r) = a(r)exp{iφ (r)}€Hologram

Reconstructed phase image% Imψ (r) (φ (r) = Tan−1 &)' Reψ (r) *Interference micrograph	I(r) = Reψ (r)34

Phase Shift of Electronsby the Electromagnetic Field	

2015.3.6 最終講義"!
%2$ grad + eA ' Ψ − 2m( E − eV ) Ψ = 0#i&Schrödinger Eq.	

・WKB applrox. & E<<eV€
if	

Ψ(r) = a(r)exp{iφ (r)} exp{i(ωt − k ⋅ r)}

Phase shift by an electrostatic potential€

Phase shift by a magnetic fieldπΔφ =∫Z V ( x, y, z )dzλEe
Δφ = − ∫S B( x, y, z )･dS!
35

Phase Shift of Electronsby the Electromagnetic Field	

2015.3.6 最終講義

Source	PathⅠ	

B	V	×	PathⅡ	

Observation plane	Phase shift by an electrostatic potential

Phase shift by a magnetic fieldπΔφ =∫Z V ( x, y, z )dzλEe
Δφ = − ∫S B( x, y, z )･dS!
36

Phase Shift of Electronsby the Electromagnetic Field	
Magnetic field

Electric fieldΔφ =2015.3.6 最終講義eΔφ = − ∫S B( x, y, z )･dS!

π∫ V ( x, y, z )dz
λE Z

Incident electron wave
EB
V	 Specimen

Shifted electron
wavefront
Phase map

Contour map
Equi-potential lines

37

Magnetic flux lines

2015.3.6 最終講義

Latex Particle Charged Up	 38

Single Magnetic Domain Particle of Ba-Ferrite	

TEM Image	

Hologram	

Interference image	2015.3.6 最終講義

Contents	 
１．Introduction
２．Interference of waves
３．Electron holography
・High resolution imaging
・In situ observation of SOFC
５．Stereoscopic TEM
６．Phase plate using A-B effect	40内部電位による電子の位相変化	
Uee-λ0e ( E + V )∗n==λ1eE ∗eE0（真空準位）	

eV1eE ⎞⎛
1+2 ⎟V ⎜mc= 1+⎜⎟
2 E ⎜ 1 + eE ⎟⎜⎟
2mc 2 ⎠⎝eV2
真空	試料	真空	xeE ⎞⎛
1+2 ⎟
2π kVd ⎜mcΔφ =⎜⎟eE
2 E ⎜ 1 +⎟⎜2 ⎟
2mc ⎠
⎝

2015.3.6 最終講義

波長の変化とホログラムe-	λλ042

2015.3.6 最終講義

Electron Hologram of MgO	 

43

2015.3.6 最終講義

MgOホログラムのFourier変換像	 44

2015.3.6 最終講義

MgO [110] 表面の電子線ホログラ
フィー	 
Biprism filament

AB

[110]

Mg++
O--

45

2015.3.6 最終講義

MgO (001) 表面	 Simulation t=10nm

Reconstructed Phase46

2015.3.6 最終講義

MgO (001) の表面ポテンシャル	 

Vvac

O--

Vvac

Mg++

47

2015.3.6 最終講義

Contents	 
１．Introduction
２．Interference of waves
３．Electron holography
・High resolution imaging・Observation of magnetic field
５．Stereoscopic TEM
６．Phase plate using A-B effect	
48

2015.3.6 最終講義

Low-Magnetic-Field Objective Lens

Specimen holder

1TBB <> 0.5mT,

x 1K~500K
49

2015.3.6 最終講義

Magnetic Domain in a Permalloy Thin Film

1 µm502015.3.6 最終講義

Real-Time electron Holography

51

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Rea-time Observation of Magnetic Domain

52

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Rea-time Observation of Magnetic Domain	

53

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Magnetic Structure in a Permalloy Thin Film54

2015.3.6 最終講義

Contents	 
１．Introduction
２．Interference of waves
３．Electron holography
・High resolution imaging
・Observation of Magnetic field
５．Stereoscopic TEM
６．Phase plate using A-B effect	
55

2015.3.6 最終講義

Development of a Real-Time StereoTransmission Electron Microscope	 ••Real-Time Observation: Deformation, Crystal growth, Dislocation
3D Observation: Defect, Radiation damage, Cell
Stereoscopy, Computer Tomography
Recording time, Computation time for RT

Real-Time 3D TEM	Tilted Illumination Stereo Microscopy	
・D.Typke et al. Proc. 6th EUREM (1976) 334.	
・J.M.Pawley Proc. 6ht Int. Conf. on HVEM 4 (1980) 58.	
・P.F.M.Teunis et al. J. Microscopy, 168 (1992) 275.	
・G.Fan and M.H.Ellisman Ultramicroscopy 55 (1994) 155.	

2015.3.6 最終講義

Real-Time Stereo TEM
Electron Source	
1st Deflector	

Deflection 	Control Circuit 	

Condenser Lenses	
Specimen	Enlarging Lenses	
2nd Deflector	
Image Intensifier	+	CCD Video Camera	

Image Shift	Cancellation	
Circuit 	Video Signal

3D Monitor	

2015.3.6 最終講義

Real-Time Stereo TEM (HF-2000)
1st Deflector	
2ndDeflector	

3D Monitor	

I.I.+CCD Camera	

2015.3.6 最終講義

Video Signal and Deflector Potential
Deflector Potential (V)500

Video Signal (V)2250

100-250-1-500-2Odd Field (Left image)

Even Field (Right image)

1Frame (Output image)

2015.3.6 最終講義

Illumination SystemSource	

≦±450V	Deflector	θ0	Condenser Lens	

θSpecimen	Max. Angle 0.081ﾟ （1.4mrad ）	
Required Angle：θ >2ﾟ	
Need Angle Mag.：x 25	
Image Mag.：x 1/25	

Use condenser lenses in a reduction mode.	
±2.3°	
Deflector and Specimen plane 	should be conjugate.	

2015.3.6 最終講義

Stereo Pair of Au Particles

30nm
Right Image

Left Image
Lateral Resolution: ~1 nm	
Depth Resolution: ~13 nm	2015.3.6 最終講義

Real-Time Stereo Observation of ZnO
0.00 sec0.06 sec

0.28 sec

2015.3.6 最終講義

Real-Time Stereo TEM (HF-2000)
1st Deflector	
2ndDeflector	

3D Monitor	

I.I.+CCD Camera	

2015.3.6 最終講義

Depth Measurementdx ldxrz = (dxr / sin θ + dxl / sin θ ) / 2zz = (dxr + dxl ) 2sin θz = dx 2sin θθoδ z = δ x 2sin 2.3≤ 13nm (δ x = 1nm)

2015.3.6 最終講義

Detection of corresponding points

Right Image (standard)

Left Image

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Detection of corresponding points

Outline extraction

Standard Image
Characteristics

Thinning2015.3.6 最終講義

3-D Reconstruction and Plot2015.3.6 最終講義

Continuous Observation by 3D Plot
( Actual time )	

2015.3.6 最終講義

Summary of the Real-Time 3D-TEM
・Developed a real-time stereo TEM
ー Introduced electrostatic deflectors and a 3D-Monitor
ー Spatial resolution:~ 1 nmlateral~13 nmlongitudinalー Temporal resolution
33 msec (TV rate)<5msexpectable
・Developed an on-line 3D plot application
ー Extract characteristics and find corresponding points
ー Temporal resolution
2-8 sec
TV frameー Spatial resolution:~18 pxlongitudinal(estimation)

2015.3.6 最終講義

Contents	 
１．Introduction
２．Interference of waves
３．Electron holography
・High resolution imaging
・Observation of Magnetic field
５．Stereoscopic TEM
６．Phase plate using A-B effect	70

2015.3.6 最終講義

Hilbert Phase Plate for TEM	 
Electron source	Thin film type Hilbert phase plate	ψ0ψ1
Phase shiftof π[rad]	

sgn function	

No shift	Phase plate	Specimen	γ

ψ 2ʹ′Back focal plane	ψ 3ʹ′Intermediate llense	

Intermediate lens	Observation plane	2015.3.6 最終講義

A-B Effect Phase Plate	 
Vector potential appearing with the magnetic flux inside
the filament causes the phase shift of the electron wave
pass through the both sides of the filament 	Phase advanceof π/2[rad]	

Phase delay 	
π/2[rad]	

−π2+π2磁束	2015.3.6 最終講義

Phase Plate	 
Thin film type phase plate	Phase shiftof π[rad]	

A-B effect phase plate	No shift	Phase delay 	
π/2[rad]	

Phase advanceof π/2[rad]	
磁束	・Damage	・Short life time	・Degradation of image quality	

・Clean	・long life time	
・Keeping image quality	
・Cannot centered	2015.3.6 最終講義

Phase Plate	 
Cross section of Wollaston wire	Phase plate	Pt filament 1.0μm	
接着剤	

Coated Ag 0.2mm	Filamentト	Single hole mesh	Magnetic filament	

Hard magnetic	Pt thin filament	2015.3.6 最終講義

Phase Shift by A-B Effect	 Phase [rad]	

Reconstructed phase	210-2μm	

1204080120	

[pixel]	

phase shift of 〜1.5rad	160	

2015.3.6 最終講義

Differential Image of Holly C Film	 
Under-focus	

in-focus	Insert filament	
Differential image	
フィラメントの影	

0.5μm	

direction of differentiation	

Obtain in-focus → Higher resolution	2015.3.6 最終講義

Differential Effect	 

under-focusedimage	Line profile	

differential image	Line profile	2015.3.6 最終講義

Observation of Bio-specimen	 Colon bacillus（Pb stained）	
Under-focused image	

Differential image in focus	

0.50.2[μm]	
µm	

0.

5µm

2015.3.6 最終講義

Observation of Bio-specimen	 Colon bacillus（Pb stained）	
微分像	

0.2[μm]	

0.5 µm	0

微分方向	.

5µm

Thank you for your attention !!