Tokyo Electron

Annual Report 2012

Page16ContentsHighlights

Top Message

Segment Information

FeatureCorporate GovernanceCorporate Citizenship

R&D/Intellectual Property

Financial Section

Corporate Datan Environmental, Health and Safety Activities

Environmental, Health and Safety Activities
Tokyo Electron’s important corporate missions include placing
the highest priority on ensuring people’s health and safety
and preserving the global environment when conducting
business activities.

Fundamental Policy
Tokyo Electron positions environmental, health and safety activities as one of its most important management issues to achieveboth sustained corporate growth and a sustainable society. With
that in mind, Tokyo Electron is committed to reducing the environmental impact of all its activities, and to ensuring absolutesafety in the Company’s facilities and in those of its customers.
In order to accelerate our environmental activities, in May 2008
we codified Tokyo Electron’s environmental commitment, selecting“Technology for Eco Life” as a slogan to guide our environmentalactivities. One of the stipulated goals of this commitment is todevelop production equipment that will enable customers to cut
the total environmental burden of their factories in half by 2015,and also to cut the Company’s own environmental burden frombusiness activities and logistics in half by the same date. As a resultof progress in the related activities, the Company expected toachieve these goals ahead of schedule. The Company has therefore
set new goals this fiscal year, and under the slogan “Technology for
Eco Life” continues its global environmental preservation activities
centered on contributions by innovative product and technology.
Moreover, to push ahead with these environmental, health andsafety initiatives, we believe that it is vital to promote communication with all stakeholders as well as to receive and give feedback.
In line with this, we are also actively engaging in activities thatcontribute to society.

EHS ManagementSince 1997, Tokyo Electron has developed and implemented environmental management systems based on ISO 14001 standards, mainly
for the plants conducting manufacturing operations, and obtained
the relevant certification. Furthermore, to enhance the workability
and effectiveness of the EHS Management System, we are continuously raising the level of the audits that check the system and itsresults. These audits are performed from various viewpoints: fromwithin the workplace or the Group, or by a third party.

Initiatives to Reduce the Environmental Burdenof Products
Proactive Environmentally Conscious Product Design
Tokyo Electron believes that the promotion of product designs
sensitive to the environment is vital. In particular, Tokyo Electron
has positioned promotion of energy conservation in its products,
as well as the reduction and replacement of regulated hazardous
chemicals, as priority issues.
1. Initiatives to Reduce the Environmental Impact During
Equipment Usage
Tokyo Electron set a roadmap for reducing the environmental
impact of major products, together with such policies for theequipment usage as reducing the energy consumption, andreducing the heat, air output, water and chemical substancesused. In this connection, we now make technological and operational proposals to our customers, and in cooperation with themadjust our approach to each product’s characteristics in a multifaceted manner. We are actively implementing initiatives toachieve these goals. Furthermore, we are working to reduce thetotal environmental burden during product usage: not merely ofour products, but also of the facility equipment owned by customers by means of optimal power management.
2. Initiatives Regarding Regulated Hazardous Substances in
Products
As an environmental measure, Tokyo Electron promotes efforts toreduce hazardous chemical substances in its products. Chemical
substances contained in the units and parts used in products aremanaged in a dedicated database. Tokyo Electron has positioned
those products in which at least 98.5% of the constituent parts
meet standards stipulated by the Europe RoHS directive* as“equipment containing reduced amounts of chemicals.” Shipment of these products first began in October 1, 2008.
* Refers to the “Restriction of the use of certain Hazardous Substances in Electrical and ElectronicEquipment” directive in Europe (2002/95/EC) and amendments thereto. With the exception ofcertain applications excluded from its scope, this directive prohibits the inclusion of lead, mercury,cadmium, hexavalent chromium, PBB, and PBDE over a maximum prescribed amount in products.

has set a goal of achieving a 50% reduction of per-unit CO2 emissions by 2015 compared with 2007 (FY2008) base line year, andwe are promoting measures to reduce environmental impact.

Achieving Environmental Goals and New Goals
1. D evelop equipment that enables a 50% reduction in thetotal environmental impact of customer factories
We are nearly achieving the target of CO2 emissions per 300 mm
wafer unit for the most of our major products.
2. Reduce the environmental impact of our business activities and logistics by 50%
2-1 Logistics
The amount of CO2 emissions in fiscal 2012 was decreased by
54%, and reduced by 22% per ton-kilometer in comparison tothe baseline year.
2-2 Business Activities
CO2 emissions for FY2012 centered on development and manufacturing factories decreased by approximately 25,000 tons compared to the baseline year (FY2008: CO2 emissions approximately
113,000 tons) to approximately 88,000 tons. We achieved this byenergy-saving environmental investment, including the installation of solar power generation systems at the Miyagi andYamanashi plants, energy-saving activities, and plant integrations.

We expect to achieve our goal of reducing CO2 emissions per unitof sales by 52% and by over 60% in total volume by using
Domestic CDM*1 (Clean Development Mechanism) to achievecarbon offset*2 of about 50,000 tons, including the Great East
Japan Earthquake Recovery Program under Japan’s Domestic
Carbon Credit System, and green power in the U.S.
Tokyo Electron has closed the initial environmental goals inthese three fields of activities because we expect to achieve them,and set new environmental goals.
Based on a new environmental vision, these new environmental
goals proclaim individual targets in the fields of products, plants
and offices, procurement and logistics, and we will strengthen
environmental management to contribute to global environmental preservation through enhanced initiatives. For further details,
see the “Tokyo Electron Environmental and Social Report 2012”(to be published in September 2012).
*1 Domestic CDM (Clean Development Mechanism)
The approved reduction amount in CO2 emissions in Japan’s Domestic CDM System (a Japanese
government scheme that allows small and medium-sized businesses to receive funding, technology, and technical support from large businesses in working collaboratively to reduce CO2 emissions and trade the reduced amount as emission credits)*2 Carbon offset
The compensation for part or all of greenhouse gas emissions that cannot easily be reduced bypurchasing credits equal to the amount of reduction, or re-absorption, in greenhouse gas
elsewhere.

Health and Safety Activities
Tokyo Electron promotes health and safety in all of its operations.
This includes giving top priority to the health and safety not only
to our employees but also our customers and cooperating companies, and to designing products with health and safety in mind.
In fiscal 2012, Tokyo Electron developed activities in line with its
important goal of preventing accidents that could lead to serious
injuries. As a result, succeeded in reducing the number of accidents to half of the number in fiscal 2011. The Company tenaciously continued to implement accident prevention measures
such as prior checks of clean rooms before installing equipment,
on-site risk prediction activities, safety patrols activities, and safety
education for workers that uses accident examples. Tokyo Electronmarks the 50th year of its founding this year, and will return toprioritizing fostering a safety culture in line with the safety slogan“Safety First,” with the entire Company unitedin preventing accidents and disasters. For further details, see the “Tokyo Electron Environmental and Social Report 2012” (to bepublished in September 2012).

http://www.tel.com/eng/citizenship/ehsreport.htm

Tokyo Electron’s Environmental Goals
The Tokyo Electron Group has assessed the impact of its productson the environment throughout their entire lifecycle—from thedevelopment of major products, through manufacturing andlogistics to product use. Based on this assessment, Tokyo Electron

Initiatives in the Thermal Processing System TELINDY PLUSTM
The Thermal Processing System Business Unit (TPS BU) has developed a process for forming silicon dioxide films for double patterning*1 at room temperature. In conventional processes, atemperature of several hundred degrees is required in order tobreak down gases and promote a vapor phase reaction, but this
newly developed process takes place at room temperature throughtechniques such as selecting the source gas and generating radicals*2 of oxidized species using plasma.

Environmental Impact from Film Formation(CO2 Emissions per Wafer Area Unit)(%)
10048% Reduction

0

Conventional Process

New ProcessThis process has yielded the following results.

environmental impact from energy usage, heat emissions andcooling water by 48% in CO2 equivalent.

1. Reduced number of process steps:

3. Reduced size of equipment:This process makes it possible to form film atop a highly heat-susceptible resist
and achieve miniaturization using double patterning to reduce the number ofprocesses, which results in reducing the energy used at other utilities.

2. Reduced environmental impact from film formation:
Because heat is not required when forming the film, this process reduces theBecause no heater is required to apply heat to the wafer, this process is able toreduce the number of parts by 30% and footprint by 39%.
*1 Double patterning: One type of miniaturization process.
*2 Generating radicals: Describes one type of atom configuration where a single electron orbits
around the atomic nucleus in the outer shell, where normally electrons orbit in a pair.

Status of Tokyo Electron Group’s Environmental Initiatives
Organization dedicated to the environment
Highest responsibility for the environment
Environmental audits
Introduction of environmental management systems
Zero emissions of waste
Setting of energy conservation targets
Environmental training for employees
Punished for violating environmental regulations?

Corporate Environment Promotion Dept.
Board of Directors and Board of Executive Officers
Internal and external audits each conducted yearly; other irregular inter-Group audits
Acquired ISO 14001 at 8 plants and offices
Achieved at all domestic manufacturing bases; recycled products used in-house
Implementing energy-saving products and energy-saving targets at plants and offices
Conducted for all employees
Tokyo Electron has never been punished for this