2011A1697

BL47XU

CO2 ࣮ࣞࢨ↷ᑕ࡟ࡼࡿࣇ࢓࢖ࣂ⼥╔᥋⥆࡟࠾ࡅࡿࣇ࢓࢖ࣂෆ㒊ᚤ⣽✵Ꮝᙧᡂࡢ SPring-8 ᨺᑕගග※ࢆ⏝࠸ࡓX ⥺࣐࢖ࢡࣟ CT ほᐹ࡟ࡼࡿ◊✲Three-Dimensional Observation of Silica Glass Microstructure change dueto the porosity in Optical Fiber Formed by the CO2 Laser Irradiation Using
the X-ray Micro-Tomography System called SP-PCTᑠụ ┿ྖ a, ᰗ ⚽୍ a, ஭ୖ 㟹அ a, ୖᮡ ೺ኴᮁ b, ➉ෆ ᫭ஂ b, ᫍ㔝 ┿ே b,㕥ᮌ ⰾ⏕ b, *Ώ㎶ ⩏ኵ baa
Shinji Koike , Shuichi Yanagi , Yasuyuki Inouea, Kentaro Uesugib, Akihisa Takeuchib, Masato Hoshinob,Yoshio Suzukib, *Yoshio Watanabeba᪥ᮏ㟁ಙ㟁ヰᰴᘧ఍♫, b 㻔㈈㻕㧗㍤ᗘග⛉Ꮫ◊✲ࢭࣥࢱ࣮aNTT Corp., b JASRI

CO2 ࣮ࣞࢨ↷ᑕ࡟ࡼࡿගࣇ࢓࢖ࣂ⼥╔㒊ࡢᚤ⣽ᵓ㐀ኚ໬ࢆ SPring-8 BL47XU タ⨨ࡢ࣐࢖ࢡࣟ
Computed Tomography 㻔CT㻕⿦⨨ SP-PCT ࡟ࡼࡾホ౯ࡋࡓࠋ2010A1699 ࡟࠾࠸࡚ᢞᙳᩘࡢቑຍ࡟ࡼࡗ࡚ࠊ⥺྾཰ಀᩘࡢ ᐃ⢭ᗘྥୖࢆᅗࡗࡓ SP-PCT ࢆ⏝࠸࡚ࠊ⼥╔ගࣇ࢓࢖ࣂ୰࡟ほᐹࡉࢀࡓᚤ⣽Ꮝ⩌ᙧᡂ⟠ᡤࡣ⥺྾཰ಀᩘศᕸ࡟ኚ໬ࢆࡶࡓࡽࡋ࡚࠸ࡿࡇ࡜ࢆ᫂ࡽ࠿࡜ࡋࡓࠋ௒ᅇ 2011A1697ㄢ㢟ᐇ㦂࡟࠾࠸࡚ࠊᮏ⥺྾཰ಀᩘศᕸࡢኚ໬ࡣࣇ࢓࢖ࣂࢡࣛࢵࢻ㒊ࡢࢡࣜࢫࢺࣂࣛ࢖ࢺ⤖ᬗ໬࡟ᅉࡿࡶࡢ࡛࠶ࡿࡇ࡜ࢆ⼥╔⏺㠃࡟㝈ᐃࡋࡓ X-ray Diffraction㻔XRD㻕 ᐃ࡟ࡼࡾ᫂ࡽ࠿࡜ࡋࡓ⤖ᯝࢆ
୰ᚰ࡟㏙࡭ࡿࠋ
࣮࣮࢟࣡ࢻ㸸 ࣮࢜ࣥ࣎ࢻ࣮ࣞࢨ⼥╔ࠊSPring-8PCT 㻔SP-PCT㻕ࠊXRDᐃ⫼ᬒ࡜◊✲┠ⓗ㸸㏆ᖺࡢ㏻ಙᶵჾ➃ᮎࡢࡼࡾ࢖ࣥࢸࣜࢪ࢙ࣥࢺ໬ࡢ㐍ᒎ࡟ࡼࡗ࡚ࠊࢿࢵࢺ࣮࣡ࢡ࡟᥋⥆ࡍࡿࢹࣂ࢖ࢫࡢቑຍ࡜ࠊྲྀࡾᢅ࠺᝟ሗࡢ㧗ᗘ໬ࡢ⤖ᯝࠊ2015 ᖺࡢ IP㻔Internet Protocol㻕ࢺࣛࣇ࢕ࢵࢡ㔞ࡣ 2010ᖺࡢ 4 ಸ࡟ࡲ࡛ቑຍࡍࡿ࡜ண ࡉࢀ࡚࠸ࡿ[1]ࠋࡑࡢ⤖ᯝࠊ㏻ಙ⣔ㅖ⿦⨨ࡢ㛤Ⓨ࡟࠾࠸࡚ࡣࠊࡇࢀࡽ┈ࠎࡢ኱ᐜ㔞໬࡞ࡽࡧ࡟㧗㏿໬ࡢせồࢆ‶ࡓࡍࡓࡵࠊ㏻ಙ⿦⨨ෆ㓄ᕸ⥺ࢆග໬ࡍࡿࡇ࡜ࡼࡾゎỴࢆᅗࡿග࢖ࣥࢱࢥࢿࢡࢩࣙࣥᢏ⾡ࡀὀ┠ࢆ㞟ࡵ࡚࠸ࡿ[2]ࠋᡃࠎࡣ࡞࠿࡛ࡶ࣮࣎ࢻୖ࡛ࡢගࣇ࢓࢖ࣂ⡆᫆⼥╔ᢏ⾡ࡢ☜❧࡟ྥࡅࠊගࣇ࢓࢖ࣂᗙᒅࢆᛂ⏝ࡋࡓ CO2 ࣮ࣞࢨ↷ᑕ࡟ࡼࡿ⼥╔ᡭἲࡢ᳨ウࢆ㐍ࡵ࡚ࡁࡓ[3]ࠋࡋ࠿ࡋ࡞ࡀࡽࠊ▷㊥㞳᥋⥆࡛࠶ࡾከᩘࡢග᥋⥆㒊ࡀぢ㎸ࡲࢀࡿࡓࡵࠊ᥋⥆ಙ㢗ᛶࡢྥୖࡀ୍ᒙồࡵࡽࢀࡿ࡟ࡶ㛵ࢃࡽࡎࠊࡑࡢᶵᲔ≉ᛶ࡟ࡘ࠸࡚ࡣᚑ᮶ࡢ࢔࣮ࢡᨺ㟁⼥╔ᢏ⾡࡟ࡼࡿࣇ࢓࢖ࣂ◚᩿ᙉᗘ≉ᛶࢆ༑ศ࡟ࡋࡢࡄࡲ࡛࡟⮳ࡗ࡚࠸࡞࠸[4]ࠋࡇࢀࡲ࡛࡟ࠊගࣇ࢓࢖ࣂࢆᗙᒅࡉࡏࡓ᫬ࡢࣇ࢓࢖ࣂ⏺㠃࡟࠿࠿ࡿᢲᅽຊ᮲௳ࠊࣇ࢓࢖ࣂ࡬ࡢ࣮ࣞࢨ↷ᑕ᮲௳௨እ࡟ࠊSP-CT[4]࡟ࡼࡗ࡚ጞࡵ࡚᫂ࡽ࠿࡜ࡋࡓගࣇ࢓࢖ࣂࢆᩚิ཰ᐜࡍࡿ
ࡓࡵࡢ V ⁁ᇶᯈࡢᮦ㉁࣭⾲㠃≧ែ[5]࡟ࡼࡗ࡚ࠊ⼥╔⏺㠃࡬ࡢᇶᯈᮦᩱᵓᡂ࡜ྠ୍≀㉁ࡢෆໟࡀ⏕ࡌࠊࣇ࢓࢖ࣂᵓ㐀࡟ኚ໬ࢆࡶࡓࡽࡍࡇ࡜ࢆ᫂ࡽ࠿࡜ࡋ࡚ࡁࡓࠋࡲࡓࠊ2010A1699 ࡟࠾࠸࡚ࡣᢞᙳᩘࢆྥୖࡉࡏࡿࡇ࡜࡛⥺྾཰ಀᩘ㻔LAC: Linear Absorption Coefficient㻕ࡢ ᐃ⢭ᗘࡢྥୖࢆᅗࡗࡓ
SP-CT ࡟ࡼࡗ࡚ࠊࣇ࢓࢖ࣂෆ㒊࡟ᚤ⣽࡞✵Ꮝࢆほ ࡋࠊࡑࡢ࿘㎶఩⨨࡛ࣇ࢓࢖ࣂࢡࣛࢵࢻ㒊࡜␗࡞ࡿ᪂ࡓ࡞ LAC ศᕸࡢほ ࡟ᡂຌࡋࡓࠋࡇࢀࡽࡢ⼥╔ගࣇ࢓࢖ࣂᶵᲔⓗᙉᗘ࡟ᙳ㡪ࢆཬࡰࡍࣇ
࢓࢖ࣂෆ㒊ᚤ⣽✵Ꮝᙧᡂཎᅉࢆ᫂ࡽ࠿࡜ࡍࡿࡓࡵࠊᮏㄢ㢟࡛ࡣᚑ᮶ࡢ SP-CT ᐃ࡟ຍ࠼࡚ࠊ⼥╔⏺㠃࡟ᒁᡤ㝈ᐃࡋࡓ XRD ᐃࢆ⾜࠸ࠊࡑࡢᙧᡂཎᅉ࡟ࡘ࠸࡚ศᯒࢆヨࡳࡓ⤖ᯝࢆ㏙࡭ࡿࠋᐇ㦂㸸Iヨᩱస〇᪉ἲᥦ᱌ࡋ࡚࠸ࡿගࣇ࢓࢖ࣂ⼥╔ᡭἲࡣ 2 ᮏࡢගࣇ࢓࢖ࣂྠኈࢆ✺ྜࡋࠊ୍᪉ࡢගࣇ࢓࢖ࣂࢆᗙᒅ
ࡉࡏࡓ≧ែ࡛ࠊCO2 ࣮ࣞࢨࢆ୧ࣇ࢓࢖ࣂ⏺㠃௜㏆࡟↷ᑕࢆ⾜ࡗ࡚⼥╔ࢆᐇ⌧ࡍࡿ[3]ࠋ୍᪉ࡢගࣇ࢓࢖ࣂࢆᗙᒅࡉࡏࡓ᫬ࡢࣇ࢓࢖ࣂ⏺㠃࡟࠿࠿ࡿᢲᅽຊ㹄ࡣᗙᒅࡀ㉳ࡇࡾ࠺ࡿタᐃࣇ࢓࢖ࣂ㛗㸦ࢫࣃࣥ㛗㸧L ࡜ᗙᒅࢆ㉳ࡇࡉࡏࡿࣇ࢓࢖ࣂᢲࡋ㎸ࡳ㔞 L ࡟౫Ꮡࡍࡿ[2]ࠋᮏሗ࿌࡛㏙࡭ࡿホ౯ヨᩱࡣගࣇ࢓࢖ࣂࢫࣃࣥ㛗 L ࢆ 13.5mmࠊᢲࡋ㎸ࡳ㔞 L ࢆ 10 m ࡟タᐃࡋ࡚స〇ࡋࡓヨᩱ࡛ࡢ ᐃ⤖ᯝࢆ♧ࡋ࡚࠸ࡿࠋヨᩱస〇᫬ࡢ V ⁁ᇶᯈ࡜ࡋ࡚ࢪࣝࢥࢽ࢔ᇶᯈ࡜ -Al2O3 ᇶᯈࡢ 2 ✀㢮࡟࡚స〇ࢆ⾜ࡗࡓࠋII. ⼥╔⏺㠃ᒁᡤ㝈ᐃ XRD/SP-CT ᐃ᪉ἲ௒ᅇࡢ XRD ᐃ࡛ࡣᐇ㦂㹖⥺ගᏛ⣔タᐃ᮲௳࠿ࡽࠊ14 keV ࡟ධᑕ㹖⥺࢚ࢿࣝࢠ࣮ࢆタᐃࡋ࡚ᐃࢆ⾜ࡗࡓࠋࡲࡎࠊගࣇ࢓࢖ࣂࡢ X ⥺㏱㐣ീࢆほ ࡋࠊ⼥╔⏺㠃࡟ࢫࣜࢵࢺࢆྜࢃࡏ࡚ࠊගࣇ࢓࢖ࣂࡢ㛗ᡭ᪉ྥ࡟⣙ 12m ᖜࡢ⼥╔⏺㠃㡿ᇦ࠿ࡽࡢ XRD ࢹ࣮ࢱࢆྲྀᚓࡋࡓࠋ࡞࠾ࠊ⼥╔⏺㠃᥈⣴᫬࡜ XRD ᐃ᫬࡟࠾࠸࡚ࠊ᭱㐺ග᮰ࢆỴᐃࡍࡿࡓࡵࠊ࢔ࣥࢪ࣮ࣗࣞࢱࢠࣕࢵࣉࡢㄪᩚࢆࡑࢀࡒ ࢀ ࡢ ᐃ ᫬ ࡟ ヨ ࡳ ࡓ ࠋ ࡲ ࡓ ࠊ ᶆ ‽ ヨ ᩱ ࡜ ࡋ ࡚ NIST 㻔National Institute of Standards andTechnology㻕XRD ᶆ‽≀㉁ 1879a ࢡࣜࢫࢺࣂࣛ࢖ࢺ⢊ᮎヨᩱ࡟ࡘ࠸࡚ࡶ XRD ᐃࢆ⾜࠸ࠊᐇ㦂⣔ࣃ࣓࣮ࣛࢱࡢタᐃ⏝࡞ࡽࡧ࡟ࠊࣇ࢓࢖ࣂ⤖ᬗ໬ࡢཧ↷ヨᩱ࡜ࡋࡓࠋᮏᶆ‽ࢧࣥࣉࣝࡢ㻔101㻕࠿ࡽࡢᅇᢡ⥺࡟ࡼࡾࠊヨᩱ࠿ࡽ XRD ᐃ⏝ࣇࣛࢵࢺࣃࢿࣝࢫࢡ࣮ࣜࣥࡲ࡛ࡢ࣓࢝ࣛ㛗ࡣ 60.515mm ࡜Ỵᐃࡉࢀࡓࠋࡲࡓࠊ⼥╔⏺㠃௜㏆ࡢ SP-CT ᐃࡶྠ᫬࡟⾜ࡗ࡚࠾ࡾࠊ௒ᅇࡢ ᐃ࡟⏝࠸ࡓ㹖⥺࢚ࢿࣝࢠ࣮ࡣ XRD ࡜ࡢྠ᫬ ᐃࡢࡓࡵ 14 keV ࡛࠶ࡿࠋࣇ࢓࢖ࣂ᩿㠃㸦x-y ㍈㠃ෆ㸧࠾ࡼࡧࣇ࢓࢖ࣂ㛗ᡭ᪉ྥ㸦z ㍈᪉ྥ㸧ࡢศゎ⬟ࡣ࡜ࡶ࡟ 1m ࡛࠶ࡿ[5]ࠋࡲࡓࠊᢞᙳᩘࡣᐇ㦂ࡢຠ⋡໬ࡢࡓࡵࠊ
ᚑ᮶ࡢ M=900 ࡜ࡋ࡚ ᐃࢆ⾜ࡗࡓࠋ⤖ᯝ࠾ࡼࡧ⪃ᐹ㸸
Iࢪࣝࢥࢽ࢔ V ⁁ᇶᯈ࡛స〇ࡋࡓ࣮ࣞࢨ⼥╔ගࣇ࢓࢖ࣂࡢほ ⤖ᯝᅗ 1 ࡟ࡣ 8 keV ࡢධᑕ X ⥺࢚ࢿࣝࢠ࣮タᐃ࡛ࠊSP-CT ࡟࠾ࡅࡿᢞᙳᯛᩘࢆ 4,500 ᯛ࡟ቑຍࡉࡏ
㸦㏻ᖖ᫬ 900 ᯛ㸧ࠊ ᐃ LAC ࡢ SN ẚࢆྥୖࡉࡏ࡚[6]CT ほ ࢆ 2010A1699 ㄢ㢟ᐇ㦂࡟࡚⾜ࡗࡓ⤖ᯝࢆ♧ࡋ࡚࠸ࡿࠋᅗ୰࡟ࡣࣇ࢓࢖ࣂ㛗ᡭ᪉ྥ z ᪉ྥ ࡢྛ఩⨨࡛ࡢ⼥╔ගࣇ࢓࢖ࣂࡢ᩿㠃 CTࢆ♧ࡍ࡜࡜ࡶ࡟ࠊᚤ⣽ከᏍ⩌ᙧᡂ఩⨨࡛ࡢ LAC ศᕸࡀࣇ࢓࢖ࣂ㛗ᡭ᪉ྥ࡟ኚ໬ࡍࡿᵝᏊࢆ♧ࡋ࡚
࠸ࡿࠋLAC ศᕸࢆᚓࡿࡓࡵࡢࢧࣥࣉࣝࣆࢡࢭࣝᩘࡣ 316 ಶ࠿ࡽᵓᡂࡉࢀࡿࠋᮏᅗࡀ♧ࡍࡼ࠺࡟ࠊ
ᚤ⣽ከᏍ⩌ᙧᡂ఩⨨࡛ࡣࠊḞ㝗ࡢ↓࠸ගࣇ࢓࢖ࣂࢡࣛࢵࢻ㒊ࡢ LAC ศᕸ࡜␗࡞ࡿࣈ࣮ࣟࢻ࡞ศᕸࢆ♧ࡍࡇ࡜ࡀศ࠿ࡿࠋከᏍ⩌ࡀᙧᡂࡉࢀࡿ┤๓㸦ᤄධᅗ㻔a㻕 z =0㸧࡛ࡢᖹᆒ LAC ್ࡣ 65 cm-1 ࡛࠶ࡿ୍᪉ࠊከᏍ⩌ࡢᙧᡂࡀ☜ㄆࡉࢀࡓ఩⨨㸦ᤄධᅗ㻔b㻕 z 㸻+4mࠊᤄධᅗ㻔c㻕 z 㸻+6m㸧࡛ࡢ LAC ศᕸࡢᖹᆒ LAC ್ࡣ 76 cm-1 ࡜ 71 cm-1 ࡜ࠊ↓Ḟ㝗ࢡࣛࢵࢻ㒊࡜ẚ࡭࡚㧗࠸್ࢆ♧ࡋ࡚࠸ࡓࠋ
ᅗ 2 ࡟ࡣᅗ 1 ࡛♧ࡋࡓᚤ⣽ከᏍ⩌ࡀᙧᡂࡉࢀࡓࢧࣥࣉࣝ࠿ࡽࡢ XRD ᅗᙧࡢ ᐃ⤖ᯝࢆ♧ࡋࡓࠋ࡞࠾ࠊྠᅗ୰࡟ࡣࠊᶆ‽ࢧࣥࣉ࡛ࣝ࠶ࡿ NIST ࡢ XRD ᶆ‽≀㉁ࡢࢡࣜࢫࢺࣂࣛ࢖ࢺࡢ XRD ᅗᙧᐃ⤖ᯝࡶ♧ࡋࡓࠋࡇࢀࡽࡢ XRD ᅗᙧ ᐃ⤖ᯝࡣ⏬ീ୰ࡢᙉᗘࡣ 0.0-1.0 ࡟ኚ᥮ࡋ࡚つ᱁໬ࡋ࡚♧ࡋ࡚࠸ࡿࠋࡲࡓࠊ⼥╔ࢧࣥࣉࣝࡢ XRD ᅗᙧ ᐃ࡛ࡣ SiO2 ࣁ࣮ࣟࣜࣥࢢࡀᨭ㓄ⓗ࡜࡞ࡿࡓࡵࠊ⏬ീῶ⟬ฎ⌮ࢆ᪋ࡋࣆ࣮ࢡᢳฟࢆ⾜ࡗࡓ⤖ᯝࢆ♧ࡋ࡚࠸ࡿࠋ⼥╔ගࣇ࢓࢖ࣂ࡜ࢡࣜࢫࢺࣂࣛ࢖ࢺ
ᶆ‽ࢧࣥࣉࣝࡢᅇᢡᅗᙧࡢ཮᪉ࡢ 㻔a㻕,㻔b㻕,㻔c㻕,࡞ࡽࡧ࡟㻔d㻕࡛♧ࡋࡓ 2 ゅᗘ఩⨨ࡢࣆ࣮ࢡ࡛࡯ࡰ୍⮴ࡍࡿᵝᏊࡀぢࡽࢀࡿࠋࡑࢀࡒࢀࡢࣆ࣮ࢡࡢ 2 ゅᗘࢆᅗ୰࡟⾲࡜ࡋ࡚♧ࡋࡓࠋᮏࣆ࣮ࢡゅᗘࡣຍ㔜ᖹᆒ࡟ࡼࡗ࡚ồࡵࡓࠋࡇࢀࡽ 4 ࣆ࣮ࢡࡢ཮᪉ࡢ᭱኱೫ᕪࡣ 4㸣࡛࠶ࡾࠊ⼥╔ගࣇ࢓࢖ࣂࡣࢡࣜࢫࢺࣂࣛ࢖ࢺ⤖ᬗ໬ࡋࡓࡶࡢ࡜⪃࠼ࡽࢀࡿࠋࡲࡓࠊࡇࡢゅᗘ఩⨨࠿ࡽᅇᢡᅗᙧࡢࣆ࣮ࢡ㻔a㻕,㻔b㻕,㻔c㻕,࡞ࡽࡧ࡟㻔d㻕ࡣࢡࣜࢫࢺࣂࣛ࢖ࢺࡢ㻔101㻕,㻔111㻕,㻔102㻕,࡞ࡽࡧ࡟ 㻔200㻕࡟ᑐᛂࡍࡿࡶࡢ࡜⪃࠼ࡽࢀࡿࠋ
2010A-1699 ࡛᫂ࡽ࠿࡜ࡋࡓᢞᙳᯛᩘቑຍ࡟ࡼࡿ㧗⢭ᗘ SP-PCT ᐃ࡟ࡼࡗ࡚ほ ࡉࢀࡓ⼥╔㒊ගࣇ࢓࢖ࣂࡢᚤ⣽ከᏍ⩌ࡢ LAC ࡢቑຍࡣࠊᮏ ᐃ⤖ᯝ࠿ࡽࢩࣜ࢝ගࣇ࢓࢖ࣂࡢࢡࣜࢫࢺࣂࣛ࢖ࢺ࡬ࡢ⤖ᬗ໬࡟ࡼࡿࡶࡢ࡜⪃࠼ࡽࢀࡿࠋࡋ࠿ࡋ࡞ࡀࡽࠊࢡࣜࢫࢺࣂࣛ࢖ࢺࡢᐦᗘࢆ 2.3 g/cm3ࠊྜ
ᡂࢩࣜ࢝࢞ࣛࢫࡢᐦᗘࢆᑠࡉࡃぢ✚ࡶࡾ 2.2 g/cm3 ࡜ࡋ࡚[7]ࠊNIST ࡀᥦ౪ࡍࡿ X-ray Form Factor,Attenuation and Scattering Table[8]࡟࠾࠸࡚ 8 keV ௜㏆ࡢ⌮ㄽ LAC ್ࢆồࡵࡓࠋࡇࡢᐦᗘୖ᪼࡟ࡼ
ࡗ࡚ࡶࡓࡽࡉࢀࡿ⌮ㄽ LAC ್ࡢቑຍศࡣࠊ4 cm-1 ⛬ᗘ࡜࡞ࡿࠋᅗ 1 ࡛♧ࡋࡓ LAC ್ࡢቑຍࡀ⌮ㄽ LAC ್ࡢቑຍศ࡟ẚ࡭࡚ࠊⱝᖸ␗࡞ࡿ್ࢆ♧ࡋࡓࡢࡣࠊ✵Ꮝ࡟࠾ࡅࡿ X ⥺ࡢᒅᢡ࡟㉳ᅉࡍࡿࡶࡢ࡜⪃࠼ࡽࢀࡿࠋ
ᅗ 1. ከᏍ㉁㒊ࡢ LAC ศᕸ ᐃ⤖ᯝ ᅗ 2. ከᏍ㉁㒊ࢆྵࡴ⼥╔⏺㠃ࡢ XRDᐃ⤖ᯝ

II. -Al2O3V ⁁ᇶᯈ࡛స〇ࡋࡓ࣮ࣞࢨ⼥╔ගࣇ࢓࢖ࣂࡢほ ⤖ᯝ ᚤ⣽Ꮝࡢᙧᡂࡀ V ⁁ᇶᯈᮦᩱ࡟ࡼࡾᙳ㡪ࢆཷࡅࡿࡶࡢ࠿࡝࠺࠿ࢆㄪ࡭ࡿࡓࡵ࡟ࠊࡇࢀࡲ࡛ࡢࢪ
ࣝࢥࢽ࢔ V ⁁ᇶᯈᮦᩱ࡜ྠࡌࡃ CO2 ࣮ࣞࢨἼ㛗ࡢ྾཰ࢆཷࡅࡿ -Al2O3 ᇶᯈ࡟ኚ᭦ࡋ࡚స〇ࡋࡓ
ヨᩱ࡟ࡘ࠸࡚ࡶࠊ௒ᅇ SP-PCT ᐃࢆ⾜ࡗࡓࠋ ᐃヨᩱࡢ⼥╔⏺㠃ࡢ᩿㠃࡟ࡣᚤ⣽࡞Ꮝ࡜኱ࡁ࠸Ꮝࡢ୧᪉ࢆྵࡴ⼥╔ࣇ࢓࢖ࣂࡢ CT ᩿㠃ᵓ㐀ほ ࡀ࡛ࡁࡓࠋࡑࡢᏍ௜㏆࡛ࡢ LAC ศᕸࡢ ᐃ⤖ᯝࢆྛᏍ఩⨨ࡢ㡿ᇦẖ࡟ศࡅ࡚ᅗ 3 ࡟♧ࡋࡓࠋᮏᅗ࡟ࡣᚤ⣽࡞Ꮝ࿘㎶㒊㻔ᅗ 3 ୰㻔a㻕㻕࡜ࠊᚤ⣽Ꮝ࠿ࡽ㞳ࢀࡓ఩⨨࡛ࡢ㏻ᖖࡢගࣇ࢓࢖ࣂࢡࣛࢵࢻ㒊㻔ᅗ 3 ୰㻔b㻕㻕ࠊ࡞ࡽࡧ࡟኱ࡁ࡞Ꮝ௜㏆࡛ほᐹࡉࢀࡓLAC ࡢ㧗࠸≀㉁ࢆෆໟࡍࡿ㒊ศ㻔ᅗ 3 ୰㻔c㻕㻕ࡢ 3 ఩⨨࡟࠾࠸࡚ࠊ25m ࡢ㡿ᇦ࡛ほ ࡉࢀࡓ LAC
ศᕸࢆ♧ࡋ࡚࠸ࡿࠋᚤ⣽Ꮝ௜㏆ࡢ LAC ศᕸ㻔ྠᅗ୰㻔a㻕㻕ࡣࠊගࣇ࢓࢖ࣂࢡࣛࢵࢻ㒊࡛ࡢ LAC ศᕸ㸦㻔ྠᅗ୰㻔b㻕㻕࡜␗࡞ࡿ⤖ᯝࢆ♧ࡍࡇ࡜ࡀศ࠿ࡿࠋ

ᅗ 3. -Al2O3V ⁁ᇶᯈ࡛స〇ࡋࡓ࣮ࣞࢨ⼥╔ࣇ࢓࢖ࣂࡢᏍ௜㏆ࡢ LAC ศᕸࡑࢀࡒࢀࡢศᕸ࡟࠾࠸࡚ࠊᖹᆒ LAC ್࡛ࡣࠊᚤ⣽Ꮝ௜㏆㻔ྠᅗ୰㻔a㻕㻕࡛ 19.9 cm-1, ගࣇ࢓࢖ࣂࢡࣛࢵࢻ㒊㻔ྠᅗ୰㻔b㻕㻕࡛ 15.3 cm-1 ࡜࠸࠺⤖ᯝࡀᚓࡽࢀࡓࠋᇶᯈᮦᩱ࡛࠶ࡿD-Al2O3 ࡜ SiO2 ࡢ 14keV࡟࠾ࡅࡿ⌮ㄽ LAC ್ࡣࠊࡑࢀࡒࢀ 21.9 cm-1, ࡜ 13.8 cm-1 ࡛࠶ࡾࠊᚤ⣽Ꮝ௜㏆㻔ྠᅗ୰㻔a㻕㻕ࡢ᪂ࡓ࡞
LAC ศᕸࡣ -Al2O3 ࡛࠶ࡿྍ⬟ᛶࡀ࠶ࡿࠋࡲࡓࠊࢩࣜ࢝ࡢᐦᗘࡀ 2.2 g/cm3 ࠿ࡽ 2.3 g/cm3 ࡬࡜኱ࡁࡃኚ໬ࡋࡓ࡜௬ᐃࡋ࡚ࡶࠊᮏ ᐃ㹖⥺࢚ࢿࣝࢠ࣮14keV ࡛ࡣࠊ⌮ㄽ LAC ್ࡣ 13.8cm-1 ࠿ࡽ
14.4cm-1 ࡜ᚤᑠኚ໬࡛࠶ࡾࠊᢞᙳᩘࢆ 900 ࡜ࡋ࡚࠸ࡿࡓࡵࠊࢩࣜ࢝ᵓ㐀ࡢ᥎ᐃࢆ LAC ್ࢆࡶ࡜࡟⾜࠺ࡇ࡜ࡣᅔ㞴࡛࠶ࡿ࡜⪃࠼ࡽࢀࡿࠋ୍᪉ࠊ኱ࡁ࡞Ꮝ௜㏆࡛ࡣ㻔ྠᅗ୰㻔c㻕㻕㧗࠸ LAC ࢆࡶࡘ≀㉁ࡀ
ᩓᅾࡍࡿᵝᏊ㸦ྠᅗ୰ࡢ◚⥺㒊ࡢ LAC 㡿ᇦࡀᑐᛂࡍࡿ㸧ࡀㄆࡵࡽࢀࡿࡀࠊ15 cm-1 ௜㏆࡟ぢࡽࢀࡿ LAC ศᕸࡢ୺せ࡞ࣆ࣮ࢡࡣගࣇ࢓࢖ࣂࢡࣛࢵࢻࡢᵓᡂ LAC ศᕸ㻔ྠᅗ୰㻔b㻕㻕ࡢࣆ࣮ࢡ࡜࡛ࠊ࡯
ࡰ୍⮴ࡀࡳࡽࢀࡿࠋ
௒ᅇࠊᇶᯈᮦᩱࢆኚ࠼࡚⼥╔⏺㠃࡟࡚ほ ࡉࢀࡓᚤ⣽Ꮝᙧែࡣᅗ 1 ࡛♧ࡋࡓࢪࣝࢥࢽ࢔ V ⁁ᇶᯈ࡟࡚ほࡽࢀࡓᚤ⣽ከᏍ⩌࡛ࡣ࡞࠸ࡶࡢࡢࠊࡇࢀࡲ࡛ࡢほ ⤖ᯝ࠿ࡽࠊᏍᙧᡂ㐣⛬࡟ࡣࣇ࢓࢖ࣂࢡࣛࢵࢻ࡜␗࡞ࡿ≀㉁ࡢෆໟࡀఱࡽ࠿ࡢᙧ࡛ᐤ୚ࡍࡿࡶࡢ࡜⪃࠼ࡽࢀࡿࠋ௒ᚋࡢㄢ㢟㸸௒ᅇࡢほ ⤖ᯝ࠿ࡽᏍࡢᙧᡂ⟠ᡤ௜㏆࡟ࡣࣇ࢓࢖ࣂࢡࣛࢵࢻ࡜␗࡞ࡿᵓ㐀࣭≀㉁ࡢෆໟࡀ⼥╔ࡢ⤖ᯝ࡜ࡋ࡚⌧ࢀ࡚࠸ࡿࠋᏍᙧᡂࡢཎᅉࡢࡦ࡜ࡘ࡜ࡋ࡚ࠊ⼥╔᫬ࡢ⏺㠃ࡢᅽຊୖ᪼࡟ࡼࡿෆໟ≀ࡢ⇿Ⓨ[9]ࡀ⪃࠼ࡽࢀࡿࡀࠊࢡࣛࢵࢻ࡜␗࡞ࡿ≀㉁ࡢෆໟ࡟ࡼࡿ⤖ᬗ᰾⏕ᡂ࡜࣮ࣞࢨ↷ᑕ࡟ࡼࡿ⤖ᬗ┦࡬ࡢ᪼ ᛴ෭[10]ࡢ㐣⛬࡛⾲㠃ᙇຊࢆཷࡅࠊከᏍ㉁ᙧᡂ[11]࡟ཬࡪྍ⬟ᛶࡶ࠶ࡿࠋ௒ᚋࡣ XRDᐃ⤖ᯝࡢゎᯒࢆ㐍ࡵࠊᏍᙧᡂཎᅉࢆࡉࡽ࡟᳨ウࢆ㐍ࡵࡿ࡜࡜ࡶ࡟ࠊ௒ᅇࠊᇶᯈࢆኚ᭦ࡋ࡚స〇ࡋࡓ⼥╔ヨᩱࡢほ ⤖ᯝ࠿ࡽࡶࠊෆໟ≀㉁ࡀ V ⁁ᇶᯈᮦᩱ࡛࠶ࡿྍ⬟ᛶࢆ♧ࡋࡓࡇ࡜࠿ࡽࠊࣇ࢓࢖ࣂᩚิ V ⁁ᇶᯈࡢ࣮ࣞࢨ↷ᑕ⪏ᛶࡢᙉ໬ᡭἲ࡟ࡘ࠸࡚ࡶ᳨ウࢆ㐍ࡵ࡚࠸ࡁࡓ࠸ࠋཧ⪃ᩥ⊩㸸[1] http://newsroom.cisco.com/dlls/2011/prod_060111.html[2] M. Kobayashi, T. Yoshida, S. Asakawa, S. Iwano, R. Nagase, S. Sumida, and S. Mitachi,IEEE J. Sel. Topics Quant. Electron., 5, pp.1271-1277, 㻔1999㻕.
[3] S. Koike, S. Asakawa, M. Kobayashi, and R. Nagase, Int. Conf. Electron. Packag. 㻔ICEP㻕, pp.421-426
㻔2008㻕.
[4] K. Uesugi, A. Takeuchi and Y. Suzuki, J. Phys. : Conf. Ser. 186 012050 㻔3pp㻕
doi:10.1088/1742-6596/186/1/012050 㻔2009㻕.
[5] S.Koike, S.Asakawa, M.Kobayashi, R.Nagase, J. Kobayashi, K. Uesugi, K. Kajiwara, A. Takeuchi, Y.
Suzuki, I. Hirosawa, and Y. Watanabe, IEEE Transactions on CPMT, 1, pp.100-110, 㻔2011㻕.
[6] M. Uesugi, K. Uesugi and M. Oka, Earth and Planetary Science Letters, 299, pp.359-367, 㻔2010㻕.
[7] ᕝ๪༤ྖ ⦅ࠕ㠀ᬗ㉁ࢩࣜ࢝ᮦᩱᛂ⏝ࣁࣥࢻࣈࢵࢡࠖࣜ࢔ࣛ࢖ࢬ♫ 1999 Part2-3㸬
[8] National Institute of Standards and Technology, X-Ray Form Factor, Attenuation, and Scattering
Tables http://physics.nist.gov/PhysRefData/FFast/html/form.html[9] ᗈᯇ㑥᫂ ఀ⸨࿴ᘯ 㯮ᒾ⿱ Ṉ⏣஭ὒྐ ᡞ಴࿴ ⢭ᐦᕤᏛ఍ㄅ 77 pp.761-765, 㻔2011㻕.
[10] ᑠᯇ㧗⾜ ᛂ⏝≀⌮ 78 pp.631-636 㻔2009㻕.
[11] A. Yeganeh-Haeri, D. J. Weidner, J. B. Parise, Science 257, pp.650-653, 㻔1992㻕.
㸨⌧ᡤᒓ㸸㻔⊂㻕⛉Ꮫᢏ⾡᣺⯆ᶵᵓ