http://support.spring8.or.jp/Report_JSR/PDF_IAe_ALL/IAe_10B1944.pdf

2010B1944                          BL46XU㧗⪏㣗㺃పࢡ࣒ࣟᆺ Sn ῧຍࣇ࢙ࣛ࢖ࢺ⣔ࢫࢸࣥࣞࢫ㗰࡟࠾ࡅࡿ୙ാែ⓶⭷ࡢ໬Ꮫ≧ែゎᯒ
Analysis of Passivation Film Formed on the Sn-added Ferritic StainlessSteel with High Corrosion Resistance and Low Cr Contents⛙㔝 ṇ἞ a, ᯇᒣ ᏹஅ a, ඵᮌ ᩍ᫂ a, ྂᕝ Ύᚿ a, 㝜ᆅ ᏹ b
Masaharu Hatanoa, Hiroyuki Mastuyamaa, Noriaki Yagia, Kiyoshi Furukawaa, Hiroshi Ojiba᪂᪥㚩ఫ㔠ࢫࢸࣥࣞࢫ㻔ᰴ㻕, b 㻔බ㈈㻕㧗㍤ᗘග⛉Ꮫ◊✲ࢭࣥࢱ࣮ aNippon Steel & Sumikin Stainless Steel Corporation, b JASRI◳ X ⥺ග㟁Ꮚศගἲ࡟ࡼࡾࠊ14Cr-0.1Sn ࡢ୙ാែ⓶⭷ࢆศᯒࡋࠊᚤ㔞 Sn ࡢᏑᅾ࡜ࡑࡢ໬Ꮫ≧ែ࡟㛵ࡍࡿ᝟ሗࢆᢳฟࡋࡓࠋ⬺ฟゅࡢゅᗘศゎ ᐃ࠿ࡽࠊ୙ാែ⓶⭷࡬ࡢ Cr ⃰໬࡜ᚤ㔞࡞ࡀࡽ Snࡶ㔠ᒓ࡜㓟໬≀㻔SnO㻕ࡢ≧ែ࡛⃰໬ࡋ࡚࠸ࡿ࡜᥎ᐃࡉࢀࡿศᯒ⤖ᯝࡀᚓࡽࢀࡓࠋ௒ᅇᢳฟࡋࡓ Sn4dࢫ࣌ࢡࢺࣝࡣࠊ୙ാែ⓶⭷࡟ྵࡲࢀࡿ㓟໬≀⏤᮶ࡢ O2s ࣆ࣮ࢡ࡜㔜␚ࡋ࡚ぢ࠼࡚࠸ࡿྍ⬟ᛶࡶ⪃࠼ࡽࢀࡿࡓࡵࠊSn ࡢ໬Ꮫ≧ែ࡟㛵ࡍࡿヲ⣽࡞ศᯒ࡜ゎ㔘ࡣ௒ᚋࡢㄢ㢟࡛࠶ࡿࠋ࣮࣮࢟࣡ࢻ㸸 ࢫࢸࣥࣞࢫࠊSnࠊ୙ാែ⓶⭷ࠊHAXPES⫼ᬒ࡜◊✲┠ⓗ㸸ࢫࢸࣥࣞࢫ㗰ࡣࠊCr ࡜ Ni ࢆῧຍࡋࡓ SUS304㻔18%Cr-8%Ni㻕ࠊNi ࢆྵ᭷ࡋ࡞࠸ SUS430㻔18%Cr㻕࡟௦⾲ࡉࢀࡿࠋ୧㗰✀ࡣࠊ⪏㣗ᛶ࡜ຍᕤᛶ࡟ඃࢀࡿ SUS304 ࡜ࠊᛶ⬟ࡣຎࡿࡶࡢࡢẚ㍑ⓗᏳ౯࡞
SUS430 ࡛ᐇ⏝ୖᴫࡡ౑࠸ศࡅࡽࢀ࡚࠸ࡿࠋNi ࡸ Cr ࡣᕼᑡඖ⣲࡛࠶ࡾࠊ㈨※ಖㆤ࡜⤒῭ᛶ࠿ࡽࠊSUS304 ࡜ SUS430 ࡢ୰㛫㡿ᇦࢆ࢝ࣂ࣮ࡍࡿ㧗⣧ᗘࣇ࢙ࣛ࢖ࢺ⣔ࢫࢸࣥࣞࢫ㗰ࡢ㛤Ⓨ࡜ࡑࡢ㐺⏝ࡀ㐍ࢇ࡛࠸ࡿࠋ㧗⣧ᗘࣇ࢙ࣛ࢖ࢺ⣔ࡣࠊSUS430LX ࡟௦⾲ࡉࢀࡿࡼ࠺࡟ 17%Cr ࡟࠾࠸࡚ C ࡸ N ➼ࡢ୙⣧≀ඖ⣲ࢆపῶࡋ࡚⪏㣗ᛶ࡜ຍᕤᛶࢆ㧗ࡵࡓࢫࢸࣥࣞࢫ㗰࡛࠶ࡿࠋ㧗⪏㣗㺃పࢡ࣒ࣟᆺ Sn ῧຍࣇ࢙ࣛ࢖ࢺ⣔ࢫࢸࣥࣞࢫ㗰ࡣࠊࡇ࠺ࡋࡓ㧗⣧ᗘࣇ࢙ࣛ࢖ࢺ⣔ࡢ₻ὶࡢ୰࡛ Sn ࢆῧຍࡍࡿ࡜࠸࠺ୡ⏺ึࡢ࢔ࣉ࣮ࣟࢳ࡟ࡼࡗ࡚㛤Ⓨ࣭ᐇ⏝໬ࡋࡓࠋྠ㗰ࡣࠊ0.1%ࡢᚤ㔞 Sn ῧຍ࡟ࡼࡗ࡚᪤Ꮡ㧗⣧ᗘࣇ࢙ࣛ࢖ࢺ⣔࡜ྠ➼ࡢ⪏㣗ᛶࢆᢸಖࡋࠊCr 㔞ࢆ 14%ࡲ࡛పῶࡋࡓ┬㈨※ᆺࡢ᪂ࢫࢸࣥࣞࢫ㗰㻔௨ୗࠊ
14Cr-0.1Sn㻕࡛࠶ࡿ[1]ࠋࢫࢸࣥࣞࢫ㗰⾲㠃ࡢ⪏㣗ᛶᶵ⬟ࢆᢸ࠺୙ാែ⓶⭷ࡣ Cr ࡜ Fe ࢆ୺せᵓᡂඖ⣲࡜ࡋࠊࡑࡢ⭷ཌࡣᩘ nm ࡜ⷧ࠸ࠋᚑ᮶ࠊ≀⌮ゎᯒᡭἲ࡜ࡋ࡚ࡣࠊXPS ࡸ AES ࡀࡼࡃ▱ࡽࢀ࡚࠸ࡿࠋ14Cr-0.1Sn ࡛ Sn࡟ࡼࡿ⪏㣗ᛶྥୖᶵᵓࢆ❧ドࡋ࡚࠸ࡃ࠺࠼࡛୙ാែ⓶⭷୰࡟࠾ࡅࡿ Sn ࡢᏑᅾ≧ែࢆ᫂ࡽ࠿࡟ࡍ
ࡿࡇ࡜ࡣᴟࡵ࡚㔜せ࡛࠶ࡿࠋࣛ࣎ XPS ἲ࡛ࡣࠊ14Cr-0.1Sn ࡛୙ാែ⓶⭷୰࡟ᚤ㔞࡟ྵࡲࢀࡿ SnࡢᏑᅾ≧ែࢆᢕᥱࡍࡿࡇ࡜ࡣ኱ኚᅔ㞴࡛࠶ࡿࠋ◳ X ⥺࡛ບ㉳ࡉࢀࡿග㟁Ꮚࡢ㐠ື࢚ࢿࣝࢠ࣮ࡣ
8 keV ࡛࠶ࡾࠊࣛ࣎ XPS ἲ㻔AlKȘ⥺ࡢሙྜࠊ⣙ 1.5 keV㻕࡜ẚ㍑ࡋ࡚ෆẆ㟁Ꮚࡢศᯒ⮬⏤ᗘࡣᗈࡀࡾࠊ
ᚤ㔞 Sn ࡢ᳨ฟឤᗘࡶྥୖࡍࡿࡶࡢ࡜ᮇᚅࡉࢀࡿࠋࡑࡇ࡛ᮏ◊✲࡛ࡣࠊ◳ X ⥺ග㟁Ꮚศගἲ࡟ࡼࡾࠊࢫࢸࣥࣞࢫ㗰⾲㠃ࡢ୙ാែ⓶⭷ࢆศᯒࡋࠊᚤ㔞 Sn ࡢᏑᅾ࡜ࡑࡢ໬Ꮫ≧ែ࡟㛵ࡍࡿ᝟ሗᢳฟࢆ┠ⓗ࡜ࡋࡓࠋᐇ㦂㸸‽ഛࡋࡓヨᩱࡣࠊᕤᴗ⏕⏘ࡋࡓ 14Cr-0.1Sn ࡢ 0.4 mm ཌ〇ရᯈ㻔JIS ‽ᣐ No.2B㻕࡛࠶ࡿࠋSn ࡢ໬Ꮫ≧ែ࡟㛵ࡍࡿ᝟ሗᢳฟࡢࡓࡵࠊ㔠ᒓ Sn ᯈ㻔⣧ᗘ 99.9%㻕࡜◊✲⏝ヨ⸆ SnO2 ⢊ᮎࢆᶆ‽ヨᩱ࡜ࡋࡓࠋ
ᑦࠊࢫࢸࣥࣞࢫ㗰࡜㔠ᒓ Sn ᯈࡢ⓶⭷ཌࡉࡣࠊࣛ࣎ AES ἲࡢࢫࣃࢵࢱ࣮࡟ࡼࡾ 2㹼3 nm ࡛࠶ࡿࡇ࡜ࢆ☜ㄆࡋࡓࠋヨᩱࡢศᯒࡣࠊBL46XU ࡢ◳ X ⥺ග㟁Ꮚศග⿦⨨㻔VG-SCIENTA 〇 R-4000㻕࡛ᐇ᪋ࡋࡓࠋධᑕ X⥺ࡢ࢚ࢿࣝࢠ࣮ࡣ 7939 eV ࡜ࡋࠊ14Cr-0.1Sn ࡣ Cr 2p,1sࠊFe 2p,1sࠊO1sࠊSn 4d,2sࠊC 1sࠊ㔠ᒓ Sn
ᯈ࡜ SnO2 ࡣࡑࢀࡒࢀ O1sࠊSn 4d,2sࠊC 1s ࡢࢫ࣌ࢡࢺࣝࢆ཰㞟ࡋࡓࠋග㟁Ꮚࡢ⬺ฟゅᗘ㻔TOA㻕ࡣࠊ
80,55,30 ᗘ࡛ ᐃࡋࡓࠋ⤖ᯝ࠾ࡼࡧ⪃ᐹ㸸
⾲ 1 ࡟ᮏᐇ㦂࡛⏝࠸ࡓບ㉳࢚ࢿࣝࢠ࣮㻔hȤ=7939 eV㻕࡛ほ ྍ⬟࡞ Cr ࡜ Sn ࡢෆẆ‽఩ࡢ᮰⦡࢚ࢿࣝࢠ࣮㻔EB㻕ࢆ♧ࡍࠋ౛࠼ࡤࠊCr ࡢሙྜࠊ㟁Ꮚࡢ᮰⦡࢚ࢿࣝࢠ࣮ࡀ㠀ᖖ࡟኱ࡁ࠸ 1s ‽఩ࡶ⌮ㄽୖ᳨ฟྍ⬟࡛࠶ࡿࠋᮏᐇ㦂࡛ࡣࠊ㏻ᖖࣛ࣎ XPS ἲ᳨࡛ฟࡍࡿ 2p ‽఩࡟ຍ࠼ࠊෆẆ㟁Ꮚࡢศᯒ⮬⏤ᗘࢆ☜ㄆࡍࡿࡓࡵ࡟ 1s ‽఩ࡢࢫ࣌ࢡࢺࣝࢆ᥇ྲྀࡋࡓࠋ
ᅗ 1 ࡟ࠊࢫࢸࣥࣞࢫ㗰⾲㠃࠿ࡽ᳨ฟࡉࢀࡓ Cr2p ࡜ Cr1s ࡢග㟁Ꮚࢫ࣌ࢡࢺࣝࢆ♧ࡍࠋ2p ࢫ࣌ࢡࢺࣝࡣࠊ2p1/2 ࡜ 2p3/2 ࡢࢫࣆࣥ㌶㐨ศ⿣࡜ࠊ㓟໬≀㻔Cr-O㻕࡜㔠ᒓ㻔Met.Cr㻕ࡢ໬Ꮫࢩࣇࢺ࡟ࡼࡾࡑࢀࡒ
ࢀ 2 ᮏ࡟ศ࠿ࢀࡿࠋ௚᪉ࠊ1s ࢫ࣌ࢡࢺࣝࡣࠊࢫࣆࣥ㌶㐨ศ⿣ࢆకࢃ࡞࠸ࡓࡵ༢୍ࣆ࣮ࢡ࡜࡞ࡾࠊ㓟໬≀㻔Cr-O㻕࡜㔠ᒓ㻔Met.Cr㻕ࡢ໬Ꮫࢩࣇࢺࢆ☜ㄆࡍࡿࡇ࡜ࡀฟ᮶ࡿࠋCr-O ᙉᗘ࡜ẚ㍑ࡋࡓ Met.Crᙉᗘࡣ 1s ‽఩ࢆ᳨ฟࡍࡿࡇ࡜࡛᱁ẁ࡟ᑠࡉࡃ࡞ࡿࠋࡍ࡞ࢃࡕࠊෆẆ㟁Ꮚ࡛࠶ࡿ 1s ‽఩ࡢࢫ࣌ࢡ
ࢺࣝࢆ᥇ྲྀࡍࡿࡇ࡜࡛ࠊ⾲㠃ឤᗘࡀ᱁ẁ࡟ቑ኱ࡍࡿࡇ࡜ࢆ☜ㄆࡋࡓࠋ⾲ 1㸬ග㟁Ꮚࢫ࣌ࢡࢺࣝࡢ᮰⦡࢚ࢿࣝࢠ࣮ /EB㻔eV㻕
Cr

1s

2s

2p 1/2

2p 3/23s

3p 1/2

3p 3/2

5989

696

584

574

74

42424465

4156

3929

885

757

715

Sn

Cr2p

3d 3/23d 5/24s

4p 1/2

4p 3/24d 3/24d 5/2

493

485

137

84

84

25

24

Cr1s

2p 3/2Cr-O

Met.CrMet.CrCr-O

593Intensity

Intensity

2p 1/2
Cr-O

587
581
575
Binding energy /eV

569

Met.Cr

5999

5994
5989
Binding energy /eV5984

ᅗ 1㸬⬺ฟゅ 80°ࡢ Cr2p ࡜ Cr1s ࡢග㟁Ꮚࢫ࣌ࢡࢺࣝSn ࡢ୙ാែ⓶⭷࠾ࡼࡧ⾲㠃࡬ࡢ⃰໬ᣲື࡟ಀࡿ᝟ሗࢆᢳฟࡍࡿࡓࡵ࡟ࠊ⬺ฟゅᗘࢆᑠࡉࡃࡋ࡚
⾲㠃ឤᗘࢆቑ኱ࡉࡏࡿゅᗘศゎ ᐃࢆ⾜ࡗࡓࠋᮏᐇ㦂࡛ࡣࠊග㟁Ꮚࡢ㐠ື࢚ࢿࣝࢠ࣮ࡀ᭱ࡶ㧗ࡃࠊศᯒឤᗘࡢ㧗࠸ Sn4d ‽఩࡟╔┠ࡋࠊゅᗘศゎ ᐃࢆᐇ᪋ࡋࡓࠋᅗ 2 ࡣࠊSn4d ࡢࢫ࣌ࢡࢺࣝศᯒ
⤖ᯝࢆ♧ࡋ࡚࠸ࡿࠋ㏻ᖖࠊග㟁Ꮚᙉᗘࡣࠊ⬺ฟゅ㻔TOA㻕ࡢゅᗘຠᯝ࡟ࡼࡾపゅഃ࡟࠿ࡅ࡚ῶ⾶ࡍࡿࠋ
Sn4d ࡢග㟁ᏊᙉᗘࡣࠊTOA=80°࠿ࡽ 55°࡟࠿ࡅ࡚Ṥ࡝పୗࡋ࡞࠸≉㛗ࢆ᭷ࡋࡓࠋ
ග㟁Ꮚᙉᗘࡢ TOA ౫Ꮡᛶ࡟ࡘ࠸࡚ࠊ80°ࢆᇶ‽࡟ࡋ࡚つ᱁໬ࡋࡓ⤖ᯝࢆᅗ 3 ࡟♧ࡍࠋFe㻔Fe-O㻕
ࡢග㟁ᏊᙉᗘࡣࠊTOA=80°࠿ࡽ 30°࡟࠿ࡅ࡚༢ㄪ࡟పୗࡋࡓࠋ୍᪉ࠊCr㻔Cr-O㻕ࡢᙉᗘపୗࡣ TOA=30°࡟࠾࠸࡚ Fe ࡼࡾࡶᑠࡉࡃࠊ୙ാែ⓶⭷࡬ࡢ Cr ⃰໬ࡀ࠺࠿ࡀ࠼ࡿࠋSn4d ࡢᙉᗘపୗࡣࠊ୙ാែ⓶⭷ࡢ୺せᵓᡂඖ⣲࡛࠶ࡿ Fe ࡸ Cr ࡜ẚ㍑ࡋ࡚ TOA=55°࡛ᑠࡉࡃࠊTOA=30°࡛ Fe ࡼࡾࡶᑠࡉ࠸ࠋࡇࢀࡼࡾࠊSn ࡣᚤ㔞࡞ࡀࡽ୙ാែ⓶⭷࠿ࡽ㗰⾲㠃࡬⃰໬ࡋ࡚࠸ࡿࡇ࡜ࡀ♧၀ࡉࢀࡿࠋSn ࡢ୙ാែ⓶⭷࠾ࡼࡧ⾲㠃࡛ࡢ໬Ꮫ≧ែ㻔㔠ᒓࠊ㓟໬≀ࡢ౯ᩘ㻕࡟㛵ࡍࡿ᝟ሗࢆᢳฟࡍࡿࡓࡵ࡟ࠊ
ᶆ‽ヨᩱࡢศᯒࢆ⾜ࡗࡓࠋᅗ 4 ࡣࠊ㔠ᒓ Sn ࡜ SnO2 ࡢ 4d ࢫ࣌ࢡࢺࣝࢆ♧ࡋ࡚࠸ࡿࠋMet.Sn ࡢࢫ࣌ࢡࢺࣝࡣ 24 eV㻔4d5/2㻕࡜ 25 eV㻔4d3/2㻕࡟఩⨨ࡋࠊSnO2 ࡢࢫ࣌ࢡࢺࣝ఩⨨ࡣ 26㹼27 eV ࡟఩⨨ࡍࡿࠋSnO ࡜ SnO2 ࡢ᮰⦡࢚ࢿࣝࢠ࣮ᕪࡣ 0.7eV[2]࡛࠶ࡾࠊSnO ࡣ 25㹼26 eV ࡟఩⨨ࡍࡿࡶࡢ࡜ุ᩿ࡉࢀ
ࡿࠋ ࢫࢸࣥࣞࢫ⾲㠃࠿ࡽᚓࡽࢀࡓ Sn4d ࢫ࣌ࢡࢺࣝࢆᅗ 5 ࡟♧ࡍࠋSn4d ࢫ࣌ࢡࢺࣝࡣࠊ22.8 eV ࡟఩⨨ࡋ㧗᮰⦡࢚ࢿࣝࢠ࣮ഃ㻔㹼26 eV㻕࡟࠿ࡅ࡚ᗈࡀࡾࢆᣢࡗ࡚࠸ࡿࠋࢫ࣌ࢡࢺࣝࡢᙧ≧࠿ࡽࠊSn ࡣ㔠ᒓ࠿ࡽ㓟໬≀㻔SnO㻕ࡢΰྜ≧ែ࡛Ꮡᅾࡍࡿࡇ࡜ࡀ᥎ᐹࡉࢀࡿࡶࡢࡢࠊᶆ‽ヨᩱ࡜ẚ㍑ࡋ࡚ Met.Snࡢࢫ࣌ࢡࢺࣝ఩⨨ࡣ 1.2㹼2.2 eV ࢩࣇࢺࡋ࡚࠸ࡿࡇ࡜࡟࡞ࡿࠋ

1.0

Sn4d
Normarized Intensity

Intensity

30deg

55deg

0.80.6
Nomaraized
TOA=80deg

0.4Fe-O
Cr-O
Sn4d0.280deg
0.0
32.0

28.0
24.0
20.0
Binding energy /eV016.0204060
TOA /deg

80100   ᅗ 2㸬Sn4d ࡢゅᗘศゎࢫ࣌ࢡࢺࣝ       ᅗ 3㸬ග㟁Ꮚᙉᗘࡢ⬺ฟゅ㻔TOA㻕౫Ꮡᛶ

Sn4d

1. Met.Sn
2. SnO
3. SnO2

Sn4d

SnO2

Intensity(b)SnO2
Met.Sn4d 5/24d 3/2

Intensity

3 2 1

Sn-O
4d 3/24d 5/2

(a)Sn

32.0

28.0
24.0
20.0
Binding energy /eV

16.0

32.0

28.0
24.0
20.0
Binding energy /eV16.0

ᅗ 4㸬ᶆ‽ヨᩱࡢ Sn4d ග㟁Ꮚࢫ࣌ࢡࢺࣝ   ᅗ 5㸬14Cr-0.1Sn ࡢ Sn4d ග㟁Ꮚࢫ࣌ࢡࢺࣝࢫ࣌ࢡࢺࣝ఩⨨ࡀࢩࣇࢺࡍࡿ୍ᅉ࡜ࡋ࡚ࠊᖏ㟁ຠᯝࡀᣲࡆࡽࢀࡿࠋᖏ㟁ຠᯝ࡟ࡼࡿࢫ࣌ࢡࢺࣝ఩⨨ࡢࢩࣇࢺࡣࠊởᰁ≀㉁࡛࠶ࡿ C1s ࡢࣆ࣮ࢡ఩⨨࠿ࡽ⡆౽࡟☜ㄆࡍࡿࡇ࡜ࡀฟ᮶ࡿ[3]ࠋᅗ 6 ࡣࠊ
14Cr-0.1Sn ࡜㔠ᒓ Sn ࡟࠾ࡅࡿ C1s ࡢග㟁Ꮚࢫ࣌ࢡࢺࣝࢆ♧ࡋ࡚࠸ࡿࠋࡇࢀࡼࡾࠊC1s ࡢࢫ࣌ࢡࢺ
ࣝࡣ 284.5㹼284.8 eV ࡟఩⨨ࡋࠊ
ᅗ 5 ࡛ㄆࡵࡽࢀࡓ 1.2㹼2.2 eV ࡟ཬࡪࢫ࣌ࢡࢺࣝ఩⨨ࡢࢩࣇࢺࡣᖏ
㟁ຠᯝ࡟ࡼࡾㄝ࡛᫂ࡁ࡞࠸ࠋࡲࡓࠊ௚ඖ⣲ࢫ࣌ࢡࢺࣝࡢᙳ㡪࡜ࡋ࡚ࠊ23 eV ௜㏆࡟⌧ࢀࡿࡇ࡜ࡀ▱ࡽࢀ࡚࠸ࡿ㓟໬≀⏤᮶ࡢ O2s ࣆ࣮ࢡ[4]࡜㔜␚ࡋ࡚ぢ࠼࡚࠸ࡿྍ⬟ᛶࡶ⪃࠼ࡽࢀࡿࠋࡋ࠿ࡋ࡞ࡀࡽࠊ
୙ാែ⓶⭷ࡣ 2㹼3 nm ࡜ⷧࡃࠊࣂࣝࢡᩄឤ࡞ TOA=80°࡛ࡑࡢᙉᗘࡀ኱ࡁ࠸⌮⏤ࢆㄝ᫂ࡍࡿࡇ࡜ࡶ
ᐜ࡛᫆࡞࠸ࠋᚑࡗ࡚ࠊ௒ᅇᢳฟࡋࡓ Sn4d ࢫ࣌ࢡࢺࣝࡣࠊ୙ാែ⓶⭷࠿ࡽ㗰⾲㠃࡟࠾ࡅࡿ Sn ࡢ໬Ꮫ≧ែࢆ཯ᫎࡋ࡚࠸ࡿྍ⬟ᛶࡶྰᐃ࡛ࡁ࡞࠸ࠋ

C1s

Intensity(b)Sn(a)14Cr-0.1Sn

290.0

285.0

280.0

Binding energy /eVᅗ 6㸬14Cr-0.1Sn ࡢ C1s ග㟁Ꮚࢫ࣌ࢡࢺࣝ
ࡲ࡜ࡵ㸸 ◳ X ⥺ග㟁Ꮚศගἲ࡟ࡼࡾࠊ14Cr-0.1Sn ࡢ୙ാែ⓶⭷ࢆศᯒࡋࠊᚤ㔞 Sn ࡢᏑᅾ࡜ࡑࡢ໬Ꮫ≧ែ࡟㛵ࡍࡿ᝟ሗࢆᢳฟࡋࡓࠋ ୙ാែ⓶⭷ࡢ୺せᵓᡂඖ⣲࡛࠶ࡿ Cr ࡣࠊෆẆ㟁Ꮚ 1s ‽఩ࢆ᳨ฟࡍࡿࡇ࡜࡛ࠊࡑࡢ⾲㠃ឤᗘࡀ᱁ẁ࡟ቑ኱ࡍࡿࡇ࡜ࢆ☜ㄆࡋࡓࠋ⬺ฟゅࡢゅᗘศゎ ᐃ࠿ࡽࠊ୙ാែ⓶⭷࡬ࡢ Cr ⃰໬࡜ᚤ㔞࡞ࡀࡽ Sn ࡶ㔠ᒓ࡜㓟໬≀㻔SnO㻕ࡢ≧ែ࡛⃰໬ࡋ࡚࠸ࡿ࡜᥎ᐃࡉࢀࡿศᯒ⤖ᯝࡀᚓࡽࢀࡓࠋ௒ᅇᢳฟࡋ
ࡓ Sn4d ࢫ࣌ࢡࢺࣝࡣࠊ୙ാែ⓶⭷࡟ྵࡲࢀࡿ㓟໬≀⏤᮶ࡢ O2s ࣆ࣮ࢡ㻔23 eV ௜㏆㻕࡜㔜␚ࡋ࡚ぢ࠼࡚࠸ࡿྍ⬟ᛶࡶ⪃࠼ࡽࢀࡿࠋࡋ࠿ࡋ࡞ࡀࡽࣂࣝࢡᩄឤ࡞ TOA=80°࡛ࡑࡢᙉᗘࡀ኱ࡁ࠸⌮⏤ࢆㄝ᫂ࡍࡿࡇ࡜ࡶᐜ࡛᫆࡞ࡃࠊ୙ാែ⓶⭷࠿ࡽ㗰⾲㠃࡟࠾ࡅࡿ Sn ࡢ໬Ꮫ≧ែࢆ཯ᫎࡋ࡚࠸ࡿྍ⬟ᛶࡶྰᐃ࡛ࡁ࡞࠸ࠋ௒ᚋࡢㄢ㢟㸸௒ᅇᢳฟࡋࡓ Sn4d ࢫ࣌ࢡࢺࣝࡢప࢚ࢿࣝࢠ࣮ഃ࡬ࡢࢩࣇࢺࡣࠊ୙ാែ⓶⭷࡟ྵࡲࢀࡿ㓟໬≀⏤᮶ O2s ࣆ࣮ࢡ࡜㔜␚ࡋ࡚ぢ࠼࡚࠸ࡿྍ⬟ᛶࡶྰᐃ࡛ࡁ࡞࠸ࡓࡵࠊSn ࡢ໬Ꮫ≧ែ࡟㛵ࡍࡿヲ⣽࡞ศᯒ࡜ゎ㔘ࡣ௒ᚋࡢㄢ㢟࡛࠶ࡿࠋ୙ാែ⓶⭷࠾ࡼࡧ⾲㠃࡬ࡢ Cr,Sn ࡢ⃰໬ࢆ᳨ウࡍࡿࡓࡵ࡟ࠊග㟁Ꮚࡢ⬺ฟゅᗘ࡜⬺ฟ῝ࡉࢆᐃ㔞ⓗ࡟ᢕᥱࡍࡿࡇ࡜ࡶᚲせ࡛࠶ࡿࠋཧ⪃ᩥ⊩㸸[1] NIKKEI MONOZUKURI, Sep, 20, 㻔2010㻕.
[2] NIST XPS DATABASE[3] ⾲㠃ศᯒ, ᰴᘧ఍♫࢔ࢢࢿ, 227-229, 㻔1990㻕㻚
[4] “Handbook of X-ray Photoelectron Spectroscopy a Reference Book of Standard Spectra for Identification
and Interpretation of XPS Data “ Ed. J. Chastain and R. C. King, Jr ULVAC-PHI / Physical Electronics
USA