Sion™ RF Detector
for Plasma Arc Detection

ULTRA-FAST, HIGH POWERANALYSES OF MICRO-ARCINGNO N-I NVA S I V E , C L A M P - ON RF DET ECTOR DEL IVERS
HI G H-S P EE D A RC D E T E C T ION IN IPVD, PECVD AND ETCHFEATURES AT A GLANCEPATENTED SENSOR TECHNOLOGYFOR EASY INSTALLATION■ Easy retrofit to existing toolset

The Sion’s extremely small size and revolutionary clamp-on■ Non-invasive sensor installation

design allows the sensor to be installed in the tightest of■ High-speed data collection (250 kHz)■ Integrated data management with FabGuard

spaces. More compact than any other arc detector on themarket, the Sion can easily retrofit to existing process tools.
The design requires no modification to the RF path and will
not impact process performance. Other RF sensors must

REDUCING WAFER LOSS
AND IMPROVING YIELDS
Arcing during plasma processing can result in target andchamber damage leading to substrate damage and particle creation. As feature sizes decrease, microelectronic
devices become increasingly susceptible to arc-induceddamage. Arcing can occur in any plasma assisted process
such as ionized Physical Vapor Deposition (iPVD), Plasma
Enhanced Chemical Vapor Deposition (PECVD) and Etch.
The INFICON Sion Arc Detector provides a crucial first lineof defense. Sion makes it possible to detect micro-arcs

be installed in the RF path, which can add impedance andimpact plasma characteristics. The Sion eliminates this problem while still providing critical voltage and current information necessary for detecting arcing events.

ANALYZE ARC EVENTS IN REAL TIMEINFICON FabGuard Sensor Integration and Analysis Systemprocesses high-speed data and performs simple or complex
analysis to detect arcing as it happens. This is possible,
because unlike competing products, FabGuard synchronizes
arc data with other process parameters from the tool (includ-

quickly and react to them before significant damage or scrap
occurs. The system provides real-time detection and analysis of plasma micro-arcing events.

UNIQUE RF PLASMA ARC DETECTIONCAPABILITY AND ANALYSISThe Sion Arc Detector allows users to automatically detectarcs in order to halt wafer processing or identify the root
cause of arcing events. The Sion detection system iscapable of measuring RF voltage and current information at
speeds of up to 250 kHz. Collection and storage of full trace
data enables advanced analysis routines to differentiate
between critical arcing events and normal plasma instability.

Close-up view of ultra-fast micro-arcs in real time. Data is collected at
250 kHz to catch arcing events whenever they occur.

S i o n R F D e t e c t o r f o r P l a s m a A r c D e te c t i o n

POWERFUL DATA ANALYSISFOR BETTER YIELDSFabGuard offers an easy, intuitive interface enabling advanced
diagnostics, fault detection and classification (FDC) and reliable
real-time process control. Because FabGuard runs complex
algorithms, false alarms due to process changes are eliminated.
FabGuard also offers superior statistical and analytical functions
to provide the next generation of FDC.

OUR EXPERTISE IS YOURCOMPETITIVE ADVANTAGE
We offer a worldwide expert applications development teamUltra-fast micro-arcing with the Sion RF Detector.

and resources for installation, evaluation and support. Our
ing power, pressures and gas flows), providing the information

highly skilled semiconductor applications engineers provide

necessary to identify and isolate potential arcing events. This

the right solutions at the right time.

allows for simple SPC limits on the arc indices, so that wafers
can be tagged for off-line particle analysis.

SPECIFICATIONS
Input signal

Voltage:
Current:

1 VRMS to 5000 VRMS strap voltage
10 mA RMS to 70 ARMS strap current

Input frequency range

350 kHz to 41 MHz

Detector voltage rating 	Detector clamps to a tool RF delivery strap carrying up to5000 V(dc) and up to 5000 VRMS
Converter signal input≤2 V(ac) p-p on two channels at 350 kHz to 41 MHz

Operating ambient temperature range

10°C to 80°C

0.38 in.
(9.5mm)1.46 in.
(37.0mm)0.04 in.
(1.02mm)0.50 in.
(12.7mm)

2.88 in.
(73.15mm)

1.50 in.
(38.1mm)

End View

Standard Clamp

Detector head dimensions

Side View
Converter dimensions

www.inf icon.com

reachu s@in f ico n .co m

Due to our continuing program of product improvements, specifications are subject to change without notice.
FabGuard is a registered trademark of INFICON. Sion is a trademark of INFICON.
oibd09a1-b©2012 INFICON