Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Table of content

PageA) AFM Cantilevers and material variations: 1) PointProbePlus with extra. mech. properties
2) Phosphorus doped PointProbePlus AFM Probes
3) Low Q- / High Q-Factor AFM Probes

233B) Special coatings:

1) Coatings
2) Partial Coatings of AFM Cantilevers3) PointProbePlus with very thin Silicon Nitride layer

445C) AFM Tips modifications:

1) Biotool / Biotool XXL
2) Carbon NanoTip
3) Extra-Tall PointProbePlus AFM Tips
4) Extra-Tall ATEC AFM Tips
5) Rounded AFM Tips R30
6) Rounded AFM Tips R150
7) Sphere AFM Tips
8) Large Plateau AFM Tips
9) Plateau AFM Tips

6
7
7
8
8
9
9
10
10

D) Ultra-Short AFM Cantilevers:(for High Speed Scanning)1) Ultra-Short Tipless AFM Cantilevers2) Ultra-Short Silicon Nitride AFM Cantilevers
3) High Frequency AFM Probes

11
12
13

E) Special AFM Probes:

1) AdvancedTEC™ with Alignment Grooves
142) Hollow SiO2 AFM Tip on Silicon AFM Cantilevers
143) Pierced Cantilever AFM Probes
154) uniqprobe Tipless AFM Cantilevers
155) uniqprobe Tipless AFM Cantilevers Arrays166) MAC Mode AFM Cantilevers for Keysight/Agilent/MI 177) Silicon Nitride Arrays with AFM Tips (NanoInk®)
188) nAmbition Silicon Nitride Arrays
18F) Diverse (AFM related):1) Alignment Chip
2) 2D200 Pitch-Grating
3) 2D300 Pitch-Grating
4) CalibLever
5) Quartz Tuning Fork
6) Spring Constant Calibrated AFM Cantilevers7) Stainless Steel AFM Probes Box (Gel free)

19
19
20
20
20
21
22

G) Nanomechanical Sensors:

1) Membrane-type Surface-stress Sensor (SD-MSS)2) MSS 8 Channel Readout Module (SD-MSS-8RM)

24
26

Version 6.0 (2023.11.13)

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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

A) AFM Cantilevers and material variations
PointProbePlus (PPP) AFM Probes with extraordinary mechanical properties:→ High Softness→ High Stiffness→ High Frequency
AFM Tip: Silicon

Radius [nm]< 10 (PPP) / < 5 (SSS 1)

Height [μm]10 - 15

AFM Cantilevers: Silicon. Different versions are available:
SD-T1L450

SD-T1L450B

6

6

25

Force Constant [N/m]

0.01

0.02

0.1

CB length [μm]

450

450

225

Resonance Frequency [kHz]SD-T1L225

CB width [μm]

23

48

23

CB thickness [μm]

1.0

1.0

1.0

Coating---

SD-T2L125

SD-T5L450B

SD-T5L225

Resonance Frequency [kHz]

150

35

130

Force Constant [N/m]

2

3

14

CB length [μm]

125

450

225

CB width [μm]

25

58

33

CB thickness [μm]

2.0

5.0

5.0

70 nm Au on
detector side
(optional)--

Coating

SD-T7L100

SD-T10L100

SD-NCVH

Resonance Frequency [kHz]

850

1’000

1’200

Force Constant [N/m]

600

2’000

66

CB length [μm]

100

100

45

CB width [μm]

38

45

25

CB thickness [μm]

7.0

10.0

1.8

Coating

30 nm Al on detector side (optional)
SD-SSS-T10L2501

SD-TL-T4L902

Resonance Frequency [kHz]

220

680

Force Constant [N/m]

120

110

CB length [μm]

250

90

CB width [μm]4530

CB thickness [μm]

10.0

4.0

Coating

1

SuperSharpSilicon (SSS) AFM

2

TipLess

Other mechanical properties available on request
AFM Support chip: SiliconVersion 6.0 (2023.11.13)

2/26

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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Phosphorus doped PointProbePlus (PPP) AFM Probes
AFM Tip: Phosphorus doped Silicon
Radius [nm]

< 10

Height [μm]10 - 15

AFM Cantilevers: Phosphorus doped Silicon. Different versions areavailable:
SD-P-NCH*

SD-P-FMResonance Frequency [kHz]

330

75

13

Force Constant [N/m]

42

2.8

0.2

CB length [μm]

125

225

450

CB width [μm]

30

28

50

CB thickness [μm]

4.0

3.0

2.0

30 nm Al on
detector side
(optional)*Optional: Rotated AFM tip--

Coating

SD-P-CONTAFM Support chip: Phosphorus doped Silicon

Low Q- / High Q-Factor AFM Probes
AFM Tip: Silicon

Radius [nm]

< 10

Height [μm]10 - 15

Hal f Ma xi mum

Max.

Amplitude [V]Max./2Frequency [Hz]AFM Cantilevers: Silicon. Different versions are available:
SD-LQNCHR

SD-QNCHR

Resonance Frequency [kHz]

330

330

SD-QFMR75

Force Constant [N/m]

42

42

2.8

CB length [μm]

125

125

225

CB width [μm]

30

30

28

CB thickness [μm]

4.0

4.0

3.0

Coating

30 nm Al on detector side (partial coating)

Q-Factor in UHV

2’000>30’000

AFM Support chip: SiliconVersion 6.0 (2023.11.13)

3/26

NANOSENSORSTM Special Developments List
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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

B) Special Coatings
Coatings
AFM Tips: PointProbePlus, Arrow, ATEC,…
AFM Cantilevers: NC, FM, CONT,…
AFM Support chips: Silicon, Pyrex
Coatings: Material: Ag, Al, Au, Cr, FeNi, Ir, Ni, NiCo, Pt, Rh, Ti
additional materials available upon request
Side:frontside (TipSide, TS), backside (DetectorSide, DS)
both sides (BothSides, BS)
Some restrictions concerning coating thickness and AFM probe
types could occur (due to technical problems)
Examples: SD NCHAu25:
SD-CONTTuR:
SD-CONTPt40:
SD-EFM60:
SD-ZEILR60:
SD-DT-CONT:
SD-DT-NCL:
SD-CDTP-NCHR:

Al-Bumps

25 nm Au (TS) / 70 nm Au (DS)40 nm Tungsten (TS) / 40 nm Tungsten+ 30 nm Al (DS)40 nm Pt (BS)60 nm Pt (BS)60 nm Al (DS)non-conductive Diamond coating (TS)non-conductive Diamond caoting (TS)200 nm conductive Diamond coating

Partial Coatings of AFM Cantilevers
Coatings: Material:

Pt

Ag, Al, Au, Cr, FeNi, Ir, Ni, NiCo, Pt,
Rh,Tiadditional materials available uponrequestSide:
frontside (TipSide, TS), backside(DetectorSide, DS), both sides(BothSides, BS)
Minimal feature size: 10 μm
Alignment accuracy: ~ 5 μm

Note: Reflex coating on ATEC is possible

Version 6.0 (2023.11.13)

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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

PointProbePlus (PPP) AFM Probes with very thin Silicon Nitride layer
AFM Tip: Silicon

Radius [nm]< 20

Height [μm]10 - 15

Coating

10 nm Silicon Nitride

Other AFM tips / coating thicknesses available on request
AFM Cantilevers: Silicon. Different versions are available:
SD-FM-SiN

SD-CONT-SiN*

Resonance Frequency [kHz]75

13Force Constant [N/m]

2.8

0.2

CB length [μm]

225

450

CB width [μm]2850

CB thickness [μm]

3.0

2.0

Coating

70 nm Au on detector side
* Rotated tip

Other mechanical properties available on request
AFM Support chip: SiliconVersion 6.0 (2023.11.13)

5/26

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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

C) AFM Tips modifications
Biotool / Biotool XXL

Biotool

AFM Tips: Quartz-like / High Dense Diamond Like Carbon (DLC) spike
SD-qp-BioACBio

SD-qp-BioACBioXXL

Radius [nm]2525Height [μm]

Quartz.: 6.5
DLC: 0.5

Quartz.: 6.5
DLC: 8.5

Orientation [°]0

12 (tilt compensated)

AFM Cantilever: Quartz-like
SD-qp-BioAC-Bio / SD-qp-BioAC-BioXXL

Biotool
XXL

Resonance Frequency [kHz]50

Force Constant [N/m]0.1

CB length [μm]60

CB width [μm]25

CB thickness [μm]0.4Coating tip side
Coating detector side

20 nm Au (spike remains uncoated)
70 nm Au

AFM Support chip: Silicon
Also available through nanotools®
These AFM probes have been developed incollaboration with nanotools®

Version 6.0 (2023.11.13)

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NANOSENSORSTM Special Developments List
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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Carbon NanoTip
AFM Tip: Silicon / High Dense Diamond Like Carbon (DLC) spike
Radius [nm]2 (< 5 guaranteed)

Height [μm]Si : 10 - 15 / DLC : 0.125

Orientation [°] 13 (tilt compensated)

AFM Cantilevers: Silicon
SD-aCNT-NCH

These AFM probes have been developed incollaboration with nanotools®

SD-aCNT-FM

Resonance Frequency [kHz]

330

75

Force Constant [N/m]

40

2.8

CB length [μm]

125

225

CB width [μm]3028

CB thickness [μm]

4.0

3.0

AFM Support chip: Silicon
Also available through nanotools®

Extra Tall PointProbePlus AFM Tips
AFM Tip: Silicon

Radius [nm]

< 10

Height [μm]50 - 60

AFM Cantilevers: Silicon. Different versions are available:
SD-PXLNCLSD-PXLFM

SD-PXLCONTSD-PXLCONTSC

Resonance Frequency [kHz]

105

45

7

8

Force Constant [N/m]

60

7.0

0.2

0.2

CB length [μm]

225

225

450

225

CB width [μm]60 - 85

55 - 80

50 -8045 – 75

6.0

3.0

2.0

1.0

CB thickness [μm]

AFM Support chip: SiliconVersion 6.0 (2023.11.13)

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NANOSENSORSTM Special Developments List
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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Extra Tall ATEC AFM Tips
AFM Tip: Silicon

Radius [nm]

< 10

Height [μm]30 - 40

AFM Cantilevers: Silicon. Different versions are available:
SD-AXL-NC

SD-AXL-FM

Resonance Frequency [kHz]

200

75

SD-AXL-CONT
20

Force Constant [N/m]

45

3.0

0.2

CB length [μm]

240

240

240

CB width [μm]

41

38

37

CB thickness [μm]

7.3

3.0

1.2

AFM Support chip: SiliconRounded AFM Tips R30
AFM Tip: Silicon

Radius [nm]30

Height [μm]10 - 15

AFM Cantilevers: Silicon. Different versions are available:
SD-R30-NCH

SD-R30-FM

Resonance Frequency [kHz]

330

75

SD-R30-CONT
13

Force Constant [N/m]

42

2.8

0.2

CB length [μm]

125

225

450

CB width [μm]

30

28

50

CB thickness [μm]

4.0

3.0

2.0

Coating-

25 nm PtIr on bothsides
(optional)

70 nm Au on
detector side
(optional)

AFM Support chip: SiliconVersion 6.0 (2023.11.13)

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NANOSENSORSTM Special Developments List
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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Rounded AFM Tips R150
AFM Tip: Silicon

Radius [nm]90 (from front) / 160 (from side)

Height [μm]10 - 15

AFM Cantilevers: Silicon. Different versions are available:
SD-R150NCH

SD-R150NCL

Resonance Frequency [kHz]

330

190

75

Force Constant [N/m]

42

48

2.8

CB length [μm]

125

225

225

CB width [μm]

30

38

28

CB thickness [μm]

4.0

7.0

3.0

Coating---

SD-R150CONT

SD-R150T3L450B

13

20

Resonance Frequency [kHz]Force Constant [N/m]

0.2

0.7

CB length [μm]

450

450

CB width [μm]5053

CB thickness [μm]

2.0

3.0

Coating-

25 nm PtIr on
both sides(optional)

SD-R150FM

AFM Support chip: Silicon

Sphere AFM Tips
AFM Tips: Silicon / Silicon Oxide. Different versions are available:
Sphere diameter [μm]

S

M

L

0.8

2.0

4.0

Height [μm]10 - 15

AFM Cantilevers: Silicon. Different versions are available:
SD-Sphere-NCH

SD-Sphere-FM SD-Sphere-CONT

Resonance Frequency [kHz]

330

75

13

Force Constant [N/m]

42

2.8

0.2

CB length [μm]

125

225

450

CB width [μm]

30

28

50

CB thickness [μm]

4.0

3.0

2.0

AFM Support chip: SiliconVersion 6.0 (2023.11.13)

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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Large Plateau AFM Tips
AFM Tip: Silicon

Plateau diameter [μm] 8 - 12
Height [μm]15

AFM Cantilevers: Silicon. Different versions are available:
SD-PL-NCH SD-PL-NCL

SD-PL-FM

SD-PL-CONT

Resonance Frequency [kHz]

330

190

75

13

Force Constant [N/m]

42

48

2.8

0.2

CB length [μm]

125

225

225

450

CB width [μm]

30

38

28

50

CB thickness [μm]

4.0

7.0

3.0

2.0

30 nm Al on
detector side
(optional)-

Coating

30 nm Al on 30 nm Al on
detector side detector side
(optional)(optional)oror
25 nm PtIr 70 nm Au on
on both sides both sides(optional)(optional)

AFM Support chip: Silicon

Plateau AFM Tips
AFM Tip: Silicon

Plateau diameter [μm] 1.8 (typical)
Rod height [μm]> 2.0Overall height [μm]10 - 15

AFM Cantilevers: Silicon. Different versions are available:
SD-PL2-NCH

SD-PL2-NCL

Resonance Frequency [kHz]

330

190

Force Constant [N/m]4248

CB length [μm]

125

225

CB width [μm]3038

CB thickness [μm]4.0Coating7.0
30 nm Al on detector side
(optional)

AFM Support chip: SiliconVersion 6.0 (2023.11.13)

10/26

NANOSENSORSTM Special Developments List
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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

D) Ultra-Short AFM Cantilevers
Ultra-Short Tipless AFM Cantilevers
AFM Tip: none
AFM Cantilevers: Quartz-like. Different versions are available:
SD-USC-F5k30-TL

SD-USC-F2k3-TL

SD-USC-F1.2k7.3-TL

Resonance Frequency [kHz]

5’000

2’000

1’200

Force Constant [N/m]

30

3

7.3

CB length [μm]

10

10

20

CB width [μm]

5

5

10

CB thickness [μm]

0.68

0.28

0.67

Coating

30 nm Au on both sides
SD-USC-F1.5k0.6-TL

SD-USC-F1.2k0.15-TL

SD-USC-F0.3k0.3-TL

Resonance Frequency [kHz]

1’500

1’200

330

Force Constant [N/m]

0.6

0.15

0.3

CB length [μm]

7

7

20

CB width [μm]

3

2

10

CB thickness [μm]

0.10

0.08

0.19

Coating

20 nm Au on both sides

30 nm Au on bothsides

AFM Support chip: Silicon with Alignment Grooves

Version 6.0 (2023.11.13)

11/26

NANOSENSORSTM Special Developments List
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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Ultra-Short Silicon Nitride AFM Cantilevers
AFM Tip: High Density Carbon / Diamond Like Carbon (HDC/DLC)
Radius [nm]

< 10

Height [μm]>2

AFM Cantilevers: Silicon Nitride. Different versions are available:
SD-USC-SiN SD-USC-SiN SD-USC-SiN SD-USC-SiN
0.5MHz1.2MHz
3MHz
6MHz
500

1’200

3’000

Force Constant [N/m]

0.2

0.4

0.9

45

CB length [μm]

13.5

6.8

4.2

9.5

Resonance Frequency [kHz]These AFM probes have been developed incollaboration with nanotools®

6’000

CB width [μm]

4.5

4.5

2.3

4.5

CB thickness [μm]

0.10

0.06

0.06

0.50

40 nm Au on 30 nm Au on detector side 70 nm Au on
detector side
detector side

Coating

AFM Support chip: SiliconVersion 6.0 (2023.11.13)

12/26

NANOSENSORSTM Special Developments List
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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

High Frequency AFM Probes
AFM Tip: High Density Carbon / Diamond Like Carbon (HDC/DLC)
Radius [nm]

< 10

Height [μm]2.5

AFM Cantilevers: Silicon Nitride. Different versions are available:
Hard cantilevers (for air)These AFM probes have been developed incollaboration with nanotools®

SD-HFP-H27R

SD-HFP-H45R

SD-HFP-HU45R

Resonance Frequency [kHz]

2’700

4’500

4’500

Force Constant [N/m]

40

47

32

CB length [μm]

20

15

20

CB width [μm]

10

5

10

CB thickness [μm]

0.77

0.77

0.16

CB cross-section

rectangular

rectangular

U-profile

Coating

30 nm Al on detector side

Soft cantilevers (for liquid)

SD-HFP-S04AuD SD-HFP-S07AuD

SD-HFP-S08TiD

Resonance Frequency [kHz]

360

660

800

Force Constant [N/m]

0.4

0.6

0.5

CB length [μm]

20

15

15

CB width [μm]

10

5

5

CB thickness [μm]

0.16

0.16

0.16

CB cross-section
Coating

rectangular
30 nm Au on detector side

30 nm Ti on
detector side

AFM Support chip: SiliconVersion 6.0 (2023.11.13)

13/26

NANOSENSORSTM Special Developments List
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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

E) Special AFM Probes
AdvancedTEC™ with Alignment Grooves
AFM Tip: Silicon

Radius [nm]

< 10

Height [μm]15 - 20

AFM Cantilevers: Silicon. Different versions are available:
SD-ATEC-NCLwG

SD-ATEC-NCLwGR

155

155

Resonance Frequency [kHz]Force Constant [N/m]33

33

CB length [μm]

250

250

CB width [μm]4040

CB thickness [μm]

7.0

7.0

Coating-

30 nm Al on detector side

AFM Support chip: Silicon with Alignment Grooves

Hollow SiO2 AFM Tip on Silicon AFM Cantilevers
AFM Tip: Hollow SiO2

Radius [nm]150 (including coating)

Height [μm]16

Setback [μm] 75
Tip Coating

250 nm Al (optionally without coating)

AFM Cantilevers: Silicon. Different versions are available:
Resonance Frequency [kHz]SD-HTT-NC

SD-HTT-CONT

58

11

Force Constant [N/m]

43

0.6

CB length [μm]

400

400

CB width [μm]

150

150

CB thickness [μm]

7.5

1.8

AFM Support chip: Pyrex glass

Version 6.0 (2023.11.13)

14/26

NANOSENSORSTM Special Developments List
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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Pierced Cantilever AFM Probes
Tipless AFM Cantilevers with Hole for Sphere gluing

AFM Tip: Hole insteadof tipSize [μm]4x4AFM Cantilevers: Silicon. Multi-cantilevers chip with 3 cantilevers:
SD-PD-TRI
NCH

SD-PD-TRIFM

SD-PD-TRI
CONT

330

75

13

Resonance Frequency [kHz]Force Constant [N/m]

42

2.8

0.2

CB length [μm]

100

210

500

CB width [μm]

50

30

30

CB thickness [μm]

2.7

2.7

2.7

AFM Support chip: Silicon

uniqprobe Tipless AFM Cantilevers
AFM Tip: none
AFM Cantilevers: Quartz-like. Different versions are available:
SD-qp-BioT-TL

SD-qp-CONT-TL SD-qp-SCONT-TL

Shape of the cantilevers

triangularResonance Frequency [kHz]

55

16

32

13

Force Constant [N/m]

0.4

0.09

0.1

0.01

CB length [μm]

100

200

130

130

CB width [μm]

2x 19

2x 33

40

40

CB thickness [μm]

0.9

0.9

0.75

0.35

Coating

rectangular

60 nm Au on detector side (partial coating)** Optionally available without coating (uncoated cantilevers are transparent!)

AFM Support chip: Silicon with Alignment Grooves

Version 6.0 (2023.11.13)

15/26

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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

uniqprobe Tipless AFM Cantilevers Arrays
AFM Tip: none
AFM Cantilevers: Quartz-like. Different versions are available:
SD-qp-TL8a
Shape of the cantilevers

SD-qp-TL8b
rectangularResonance Frequency [kHz]

4.0

2.3

Force Constant [N/m]

0.02

0.004

CB length [μm]

500

500

CB width [μm]

100

100

CB thickness [μm]

1.2

0.7

Number of cantilevers

8

8

Pitch [μm]

250

250

Coating sample facing side

30 nm Au*

Coating detector side
20 nm Au*
* Optionally available without coating (uncoated cantilevers are transparent!)

AFM Support chip: Silicon. Dimensions: L=3.4 mm; l=3.1 mm; t=315 µm

Version 6.0 (2023.11.13)

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Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

MAC Mode AFM Cantilevers for Keysight / Agilent / Molecular Imaging
AFM Tips: Different versions are available:
SD-MAC-Type2
SD-MAC-Type9

SD-MAC-Type7
SD-MAC-Type8

Material

SiliconQuartz-like

Radius [nm]

< 10

< 10

Height [μm]10 – 15

7

AFM Cantilevers: Different versions are available:
Material

SD-MAC-Type2

SD-MAC-Type7

SD-MAC-Type8
Quartz-like

SiliconQuartz-likeResonance Frequency [kHz]

75

43

48

Force Constant [N/m]

2.8

0.14

0.3

CB length [μm]

225

125

125

CB width [μm]

30

35

35

3.0

0.75

1.0

CB thickness [μm]75 nm Ni on
detector side

Coating

40 nm Ni on detector side

SD-MAC-Type9
CB 1
Material

CB 2

CB 3

SiliconResonance Frequency [kHz]

90

130

65

Force Constant [N/m]

1.0

2.0

0.6

CB length [μm]

110

90

130

CB width [μm]

33

33

33

CB thickness [μm]

1.0

1.0

1.0

Coating

60 nm Ni on detector side

AFM Support chip: SiliconVersion 6.0 (2023.11.13)

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Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Silicon Nitride Arrays with AFM Tips (NanoInk, Inc® compatible)
AFM Tip: Silicon Nitride

Radius [nm]

< 10

Height [μm]3.5

AFM Cantilevers: Silicon Nitride. Different versions are available:
SD-PNP-Array1

Shape of the cantilevers

NanoInk, Inc® is a registered trademarkof NanoInk, Inc.

SD-PNP-Array2
up /down left–rightSD-PNP-Array3

rectangulartriangularResonance Frequency [kHz]70

30 / 17-30

70

Force Constant [N/m]0.50.2 / 0.07-0.2

0.3

CB length [μm]100

150 / 200-150100

CB width [μm]4050 / 45-50

2x 14

CB thickness [μm]

0.55

0.55

0.55

Number of cantilevers

18

18 / 3-3

12

Pitch [μm]6070 / 70-70

66

Coating

60 nm Au on detector side

AFM Support chip: Pyrex glass

nAmbition Silicon Nitride Arrays
AFM Tip: Silicon Nitride

Radius [nm]

< 15

Height [μm]3.5

AFM Cantilevers: Silicon Nitride. Different versions are available:
SD-nAmbition-Array5
SD-nAmbition-Array10
Reference CB (45° tilted) / Reference CB (45° tilted) /Measurement CB
Measurement CB
Shape of the cantileversrectangularResonance Frequency [kHz]23 / 94

11 / 42

Force Constant [N/m]0.03 / 0.17

0.01 / 0.05

CB length [μm]100 / 50

144 / 75

CB width [μm]30 / 2030 / 20CB thickness [μm]

0.24

0.24

2 / 3 (1 without tip)

2 / 8 (1 without tip)

200

100

Number of cantilevers
Pitch [μm]
Coating

30 nm Au on both sides

AFM Support chip: Pyrex glass

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Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

F) Diverse (AFM related)
Alignment Chip
Alignment Chip features:- reproducible positioning of the AFM probe- easy tip exchange without readjustment of AFM cantileverdeflection system- fits on all NANOSENSORS™ AFM probes of the
PointProbe® Plus and PointProbe® Plus XY-Alignment
Series- high stability because of a chromium coating
SD-ALIGN
Dimensions [μm]3400 x 2900

Thickness without probe [μm]525Thickness with mounted probe [μm]700

Tip repositioning accuracy (same probe) [μm]±2

XY-Align. Series: Tip repositioning accuracy (any probe) [μm]±82D200 Pitch-Grating
Chip: Silicon

Chip size [mm]5x7Active area size [μm]100 x 100

Lattice:
Pitch [nm]200

Accuracy of pyramid position [nm]

± 10

Accuracy of pyramid pitch (10x10 μm2 scan) [%]± 0.1

Accuracy of pyramid pitch (100x100 μm2 scan) [%]±0.01

Pyramids:
Edge length of square pyramids [nm]54.7

Accuracy of sidewall angle [°]± 0.5

Depth of pyramids [nm]Version 6.0 (2023.11.13)

approx.. 50

Sidewall angle (versus wafer surface) [°]19/26

approx.. 70

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Special Developments List (version 6.0)
Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

2D300 Pitch-Grating
Chip: Silicon

Chip size [mm]5x7Active area size [μm]100 x 100

Lattice:
Pitch [nm]300

Accuracy of pyramid position [nm]

± 10

Accuracy of pyramid pitch (10x10 μm2 scan) [%]± 0.1

Accuracy of pyramid pitch (100x100 μm2 scan) [%]±0.01

Pyramids:
Edge length of square pyramids [nm]approx.. 50

Sidewall angle (versus wafer surface) [°]54.7

Accuracy of sidewall angle [°]± 0.5

Depth of pyramids [nm]approx.. 35

CalibLever
AFM Tip: none
AFM Cantilevers: Multi-cantilevers chip with 3 AFM cantilevers:
SD-CalibLever
CB450

SD-CalibLever
CB200

SD-CalibLever
CB80

Resonance Frequency [kHz]

14

65

330

Force Constant [N/m]

0.21

2.1

25

CB length [μm]

465

215

95

CB width [μm]

50

50

50

CB thickness [μm]

2.15

2.15

2.15

AFM Support chip: Silicon

Quartz Tuning Fork
Quartz Tuning Fork Type E158-24
Properties:
SD-TF
Resonance Frequency [kHz]approx. 32.768

Force Constant [N/m]approx. 1900

Prong length [μm]2300Prong width [μm]216Prong thickness [μm]125

Optionally available mounted on a ceramic plate (SD-QTFM)
Version 6.0 (2023.11.13)

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Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Spring Constant Calibrated AFM Cantilevers
Determination of the mechanical properties of AFM cantilevers by
Laser Doppler Vibrometry
Data:

Resonance Frequency
Force ConstantQuality Factor (Q-Factor)

Accuracy: Resonance Frequency:
better than 0.1 %Force Constant:better than 5 % (k < 1 N/m)better than 10% (1 N/m < k < 10 N/m)better than 20% (10 N/m < k < 100 N/m)
Quality Factor (Q-Factor): better than 3%
Service available for all products with cantilevers having a Force
Constant < 100 N/m
Measurement traceable with PTB certified Force Standard

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Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Stainless Steel AFM Probes Box (Gel and plastics free)
NANOSENSORSTM developed a box fabricated solely from metal
avoiding the usage of adhesion gel and plastics.
These boxes are especially suited for applications that are
extremely sensitive to organic molecules such as tip enhanced
infra-red spectroscopy.
The box can be used for transport and storage.
Each box has a capacity of 10 AFM probes that are individually fixed by a
movable clamp.
Product order codes are marked with ‘MB’. Apart from packaging the
products are identical to their base products:
PPPCONTPt-MB

PPPEFM-MB

PPPNCSTPt-MB

PPPNCLPt-MB
190

Resonance Frequency [kHz]

13

75

160

Force Constant [N/m]

0.2

2.8

7.4

48

CB length [μm]

450

225

150

225

CB width [μm]

50

28

27

38

CB thickness [μm]

2.0

3.0

2.8

7.0

Coating

25 nm PtIr5 on both sides
PPPPPPPPPPPPNCHPt-MB CONTAu-MB NCSTAu-MB NCHAu-MB

Resonance Frequency [kHz]

13

160

330

Force Constant [N/m]

42

0.2

7.4

42

CB length [μm]

125

450

150

125

CB width [μm]

30

50

27

30

CB thickness [μm]

4.0

2.0

2.8

4.0

Coating

25 nm PtIr5
on both sides

Au on both sides

PPPNCHAu25-MB

PPPNCHR-MB

ATECNCAu-MB

Resonance Frequency [kHz]

250

330

335

75

Force Constant [N/m]

35

42

45

2.8

CB length [μm]

125

125

160

225

PtSiFM-MB

CB width [μm]

30

30

45

28

CB thickness [μm]

3.8

4.0

4.6

3.0

Coating

Version 6.0 (2023.11.13)

330

25 nm Au on
tip side,
70 nm Au on
detector side

22/26

30 nm Al on Au on both
detector sidesides

25 nm PtSi
on bothsides

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Please be aware that all these Special Developments are not standard products.
Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…
PtSiNCH-MB
Resonance Frequency [kHz]330

Force Constant [N/m]42

CB length [μm]125

CB width [μm]30

CB thickness [μm]4.025 nm PtSi on
both sides

Coating

Other AFM probe types available on request.

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Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

G) Nanomechanical Sensors
Membrane-type Surface-stress Sensor (SD-MSS)(i) for gas/odor sensing
Type:
Silicon membrane platform supported with four beams on which
piezoresistors are embedded. SD-MSS-1K2GP has a passivation on theelectrodes for “liquid” applications.
Applications:Electronic nose, gas/odor sensing, human breath analysis e.g., forcancer research (note: for these applications, an appropriate receptor
layer must be coated on the membrane by user).
Working Principle:
Surface-stress yielded by the coated receptor layer absorbing gas/odor
molecules deforms the membrane and the supporting beams, which
induces resistance change of the piezoresistor. By measuring theresistance change, the magnitude of the target parameter can be
estimated.
SD-MSS-1K2G

SD-MSS-1K2GP
1000 (round)

Membrane size [μm]Membrane thickness [μm]2.8 (typical)

Chip dimensions [mm]5.5 x 2.5 x 0.3

Resistance value [kΩ]

2–6Electric configuration

Full bridge, 4 pads, 0.5 mm pitch

Coating

No

Electrode passivation

No

Yes

Easy Plug-in Connection:
These sensors fit to a commercial FPC (Flexible Printed Circuit) / FFC(Flexible Flat Cable) connectors with 0.5 mm pitch.

For more information please visit http://mss-sensor.com

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Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

Membrane-type Surface-stress Sensor (SD-MSS)(ii) for static/pulsed-field torque magnetometry
Type: Silicon membrane platform supported with four beams, designed
to rotate along with a torsional axis. A yielded torque is measured byembedded piezoresistors on the bending axis.
Applications:
Nanomechanical sensing, material assessment, static/pulsed-field torquemagnetometry, force sensing, etc.
Working Principle: A sample attached to the platform tends to align withthe applied magnetic field, which twists the torsional axis and bends thebending axis on which piezoresisors are embedded. By measuring theresistance change, the magnitude of the yielded force can be estimated.
SD-MSS-1KTM

200 (square)

Membrane size [μm]2.8 (typical)

Membrane thickness [μm]Chip dimensions [mm]SD-MSS-1KPMAl SD-MSS-1KPMAu

5.5 x 2.5 x 0.3

3.0 x 2.0 x 0.3

Resistance value [kΩ]

0.3 – 1.2

Electric configuration

Separated, 8 pads, Aluminum pads Gold pads for wire
0.25 (0.5) mm for wire bonding or bonding or gluing
pitchgluing

Piezoresistive cantileverNo

120 µm, 400 µm

For more information please visit http://mss-sensor.com

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Therefore, specifications are not guaranteed and may change, datasheets may not be available, price may
change, delivery time could be longer than usual and subsequent delivery may not be possible.
Price and delivery time on request. For ordering, please use the codes starting with SD-…

MSS 8 Channel Readout Module (SD-MSS-8RM)
MSS 8 Channel Readout Module (MSS-8RM) is a basic electronic
module to operate and to readout NANOSENSORSTM MSS, up to 8
sensors simultaneously, under a hardware configuration for electronic
nose/odor sensing. MSS-8RM contains two air pumps and users can
examine self-prepared MSS under different gas flow conditions.
MSS-8RM is designed as simple as possible so that users can learn
about a basic electronic-nose system and further improve the system
performance. It has the followings features.
■ Arduino microcontroller board and software■ Two air pumps integrated■ Two discrete sensors (Sensirion SHT21, Bosch BME280) integrated■ Only USB power■ 10 SD-MSS chips (SD-MSS-1K2G) included in the package
Note that MSS-8RM does not include any data processing functions
to distinguish one sample from the other. You will get raw numerical
data of the sensor responses under different conditions as final
output.
For more information please visit http://mss-sensor.com

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