Quartz Crystals
Superior Sensibility

Optimize Process Efficiency
and Consumable Inventory
INFICON quartz crystals minimize process interruption
and consumable cost. Each crystal is tested andinspected to ensure the most consistent and mostreliable crystal with maximum crystal life. INFICON works
with you to optimize inventory management with flexible
delivery schedules. We offer a stable supply of a criticalcomponent as the world leader in thin film solutions.

manufactures specialty crystals that are applicationspecific, such as crystals customized for ALD depositions.
For more information on all the variations of crystals andtheir purposes, refer to the application note, Guide toINFICON Quartz Monitor Crystals, available on the website
at: https://goo.gl/UEHuXY
CHOOSING THE RIGHT CRYSTAL

DELIVERING JUST THE RIGHT CRYSTALINFICON offers vacuum deposition crystals in different
crystal diameters, frequencies, electrode patterns,electrode coatings, and packaging options to meet theunique needs of each customer. In addition, INFICONADVANTAGESnnnnnn Minimize cost of consumables with the mostconsistent and most reliable crystals Increase profitability and maximize continuous
process runs with increased production time Optimize inventory management with flexible delivery
schedules and in-stock products

Our continuing research into quartz crystal characteristics
results in ongoing improvements to offer the highest
reliability in your process. We recommend gold crystals
for most applications. However, silver crystals will provide
superior performance in processes with high heat loads,
such as sputtering. They may also improve the depositionof oxides. Alloy crystals are recommended for opticalcoating with dielectric materials and for semiconductor
processes with high-stress materials.
FOUR CONVENIENT PACKAGES• Cleanroom compatible dispenser—holds 10 crystals
which can be dispensed directly into the sensor holder,with Teflon® tweezers, or with the tool provided.

 Maximize process performance and gain customized
solutions with worldwide applications support• Flatpack carousel dispenser—holds 10 crystals which
are extracted by vacuum pencil, with Teflon tweezers,
or dispensed directly into the holder. Flat Pack Carousel
packages are easy to store and stack.

 Rapid troubleshooting of process variances withexpert support• Compact box—holds 10 INFICON crystals, provides easystorage and consumes the least amount of shelf space.

 Stable supply from an ISO-certified company

Crystals are dispensed using plastic tweezers or a vacuum
pencil. Crystals are separated from each other by inert,
low-friction paper, and are cushioned with foam pads.
• 50-Pack—holds 50 INFICON crystals in a clear rectangular
plastic package. This package is convenient for high volume
production. The 50-Pack package is easy to store andstack. Crystals are dispensed using a vacuum pencil.
A COMPLETE LINE OF THIN FILM
CONTROL INSTRUMENTS
However simple or complex your system—whether it
involves thermal evaporation, sputtering or ion beamprocesses—INFICON makes a complete line of controllers,monitors, sensors and feedthroughs to meet your needs,
allowing for deposition process optimization and enabling
you to produce superior quality products.

100% TESTING AND INSPECTION
INFICON manufactures and inspects each crystal in acleanroom to deliver the highest standards of quality
assurance from raw quartz to the final packaged
products ready for shipment using the following criteria:nnnn Resistance: checked to assure measurement stability
and longer coating life
 Curvature: assures resonance stability Frequency: before and after application of electrodes
to ensure accurate thickness measurement Visual conformity: inspected for electrode uniformity,
surface flaws, and other imperfections which might
indicate poor adhesion or contamination

SPECIFICATIONS
6 MHZ SENSOR CRYSTALS 14 MM (0.550 IN.) DIAMETERGold electrode, in clean room compatible dispenser of 10008-010-G10

Gold electrode, in box of 10SPC-1093-G10Gold electrode, in flat pack carousel of 10750-1000-G10

Gold electrode, in 50 piece flat pack750-1051-G50

Silver electrode, in clean room compatible dispenser of 10008-009-G10

Silver electrode, in box of 10750-1014-G10

Silver electrode, in flat pack carousel of 10750-1001-G10

Alloy electrode, in clean room compatible dispenser of 10750-679-G1

Alloy electrode, in box of 10750-1015-G10

Alloy electrode, in flat pack carousel of 10750-1002-G10

Alloy electrode, in 50 piece flat pack750-1053-G50

Gold electrode, THERMAL SHOCK, in clean room compatible dispenser of 10SPC-1157-G10Gold electrode, THERMAL SHOCK, in flat pack carousel of 10SPC-1194-G10

5 MHZ SENSOR CRYSTALS 14 MM (0.550 IN.) DIAMETERGold electrode, in clean room compatible dispenser of 10750-225-G2Gold electrode, in box of 10750-1016-G10Gold electrode, in flat pack carousel of 10750-1005-G10

Silver electrode, in clean room compatible dispenser of 10750-226-G2

Silver electrode, in box of 10750-1017-G10

Silver electrode, in flat pack carousel of 10750-1006-G10

Alloy electrode, in clean room compatible dispenser of 10750-678-G1

Alloy electrode, in box of 10750-1018-G10

Alloy electrode, in flat pack carousel of 10750-1007-G105 MHZ SENSOR CRYSTALS 12.4 MM (0.490 IN.) DIAMETERGold electrode, in clean room compatible dispenser of 10750-1020-G10

Silver electrode, in clean room compatible dispenser of 10750-1080-G10

NOTE: If the desired crystal is not shown, please contact INFICON at reachus@inficon.com to inquire about our many additional crystal offerings.

w w w. i n fi c on. c omr e a c hus @inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
cibd31a1-b    ©2019 INFICON