Operating Manual

Transpector APX®
Residual Gas Analyzer

INFICON
Two Technology Place
East Syracuse, NY 13057-9714

INFICON

Table of Contents

Table of Contents
1 Trademarks, Disclaimer, and Copyrights .................................................................................................... 8
2 Revision History ............................................................................................................................................. 9
2.1 Revision History Chart ............................................................................................................................. 9
3 Bibliography ................................................................................................................................................. 10
4 Warranty........................................................................................................................................................ 11
5 Declaration of Conformity ........................................................................................................................... 13
6 Getting Started ............................................................................................................................................. 14
6.1 Safety ..................................................................................................................................................... 14
6.1.1 Definition of Cautions and Warnings........................................................................................... 14
6.1.2 Personal Qualifications ............................................................................................................... 14
6.1.3 General Safety Instructions......................................................................................................... 14
6.2 Purpose of Transpector APX ................................................................................................................. 15
6.3 Description of Transpector APX............................................................................................................. 15
6.4 Physical Specifications........................................................................................................................... 16
6.4.1 Physical Dimensions................................................................................................................... 16
6.4.2 Weight......................................................................................................................................... 18
6.4.3 Ventilation Requirements............................................................................................................ 18
6.4.4 Electrical Power Requirements................................................................................................... 19
6.4.4.1

Required Supply Voltage ................................................................................................... 19

6.5 Transpector APX Multi-Pressure Data Sheet......................................................................................... 20
6.5.1 Specifications.............................................................................................................................. 20
6.5.2 HexBlock Orifice Sampling Inlets................................................................................................ 21
6.6 Nitrogen Purge Gas (Corrosive System Only) ....................................................................................... 22
6.7 Exhaust Gas........................................................................................................................................... 22
6.8 Pneumatic Pressure Requirements ....................................................................................................... 23
6.8.1 Valves ......................................................................................................................................... 23
6.8.2 Pneumatic Pressure Range ........................................................................................................ 23
6.8.3 Moisture Content of Compressed Air Supply.............................................................................. 23
6.8.4 Pneumatic Pressure Connections............................................................................................... 23
6.9 Vacuum Requirements........................................................................................................................... 24
6.9.1 Required Vacuum ....................................................................................................................... 24
6.9.2 Acceptable Range Of Vacuum.................................................................................................... 25

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7 Environmental Requirements ..................................................................................................................... 26
7.1 Use......................................................................................................................................................... 26
7.2 Altitude Range........................................................................................................................................ 26
7.3 Maximum Humidity................................................................................................................................. 26
7.4 Pollution Degree..................................................................................................................................... 26
7.5 Maximum Operating Temperature ......................................................................................................... 26
7.6 Minimum Operating Temperature .......................................................................................................... 26
7.7 Clean Room Requirements.................................................................................................................... 26
7.8 Anti-Static Conditions............................................................................................................................. 26
8 Computer System Requirements................................................................................................................ 27
8.1 Operating System .................................................................................................................................. 27
9 Installation .................................................................................................................................................... 28
9.1 Ambient Temperature Requirements ..................................................................................................... 29
9.2 Sniffer or Capillary Installation ............................................................................................................... 29
9.3 Mount the Pumping System ................................................................................................................... 29
9.3.1 Install the Support Kit.................................................................................................................. 30
9.4 Foreline Pump Installation...................................................................................................................... 31
9.5 Software Installation............................................................................................................................... 32
10 Connecting the Instrument.......................................................................................................................... 33
10.1 General Networking Information ............................................................................................................ 33
10.1.1 IP Addresses............................................................................................................................... 33
10.1.2 Subnetworking ............................................................................................................................ 34
10.2 IP Address.............................................................................................................................................. 34
10.2.1 Use the INFICON Mass Spectrometer Search Utility to Change the IP Address ....................... 34
10.2.1.1 Change IP address ............................................................................................................ 36
10.2.1.2 Launch Web UI .................................................................................................................. 37
10.2.1.3 Find the Device.................................................................................................................. 37
10.2.1.4 Show Settings.................................................................................................................... 37
10.3 Connect the Instrument.......................................................................................................................... 37
10.3.1 Connect a Single Instrument....................................................................................................... 38
10.3.1.1 Single Sensor Direct Connection Installation..................................................................... 38
10.3.1.2 Install a Single Sensor on an Existing Local Network........................................................ 38
10.3.2 Install Multiple Sensors ............................................................................................................... 38
10.3.2.1 Install Multiple Sensors Directly to a Host Computer......................................................... 38
10.3.2.2 Install Multiple Sensors on an Existing Local Network ...................................................... 39
10.4 Change the Computer IP Address ......................................................................................................... 39

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10.4.1 Windows 7 .................................................................................................................................. 39
10.4.2 Windows 10 ................................................................................................................................ 41
11 How the System Works................................................................................................................................ 47
11.1 Components........................................................................................................................................... 47
11.2 Theory of Operation ............................................................................................................................... 48
11.3 Instrument Overview .............................................................................................................................. 48
11.3.1 Input/Output (Auxiliary I/O) ......................................................................................................... 48
11.3.1.1 Auxiliary I/O Connector...................................................................................................... 48
11.3.1.2 Two Digital Inputs (Remote Logic)..................................................................................... 49
11.3.1.3 Two Relays ........................................................................................................................ 49
11.3.1.4 Two Analog Outputs .......................................................................................................... 49
11.3.2 Ultra-High Vacuum System......................................................................................................... 50
11.3.2.1 Foreline Subsystem ........................................................................................................... 50
11.3.3 Heater(s) Subsystem .................................................................................................................. 50
11.3.4 Solenoid Valves .......................................................................................................................... 51
11.3.5 Sensor and Electronics Module Subsystem ............................................................................... 52
11.4 Application.............................................................................................................................................. 52
11.5 Sample Inlet Systems and Examples of Use ......................................................................................... 53
11.5.1 Inlet System ................................................................................................................................ 53
11.5.2 High Pressure Sampling: Orifice Bypass (V4) ............................................................................ 55
11.6 Advice and Tips...................................................................................................................................... 55
11.6.1 Achieving Good Base Pressure .................................................................................................. 55
11.6.2 Avoiding Trapped Gas when Sampling Valves are Closed ........................................................ 56
12 Theory and Application Guide .................................................................................................................... 57
12.1 Theory of Operation ............................................................................................................................... 57
12.2 Sensors .................................................................................................................................................. 57
12.2.1 Closed Ion Source ...................................................................................................................... 57
12.2.2 Quadrupole Mass Filter............................................................................................................... 60
12.2.2.1 Scanning Characteristics ................................................................................................... 62
12.2.2.2 The Zero Blast ................................................................................................................... 63
12.2.2.3 The Ion Detector ................................................................................................................ 63
13 Operation ...................................................................................................................................................... 66
13.1 HexBlock ................................................................................................................................................ 66
13.1.1 HexBlock Inlet ............................................................................................................................. 66
13.1.2 HexBlock Process Connections.................................................................................................. 67
13.1.3 Calibration Option ....................................................................................................................... 68

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13.1.4 Process Gauge ........................................................................................................................... 68
13.2 Heaters................................................................................................................................................... 69
13.3 Pumping System .................................................................................................................................... 69
13.3.1 Foreline Pump............................................................................................................................. 69
13.3.2 Foreline Pirani Gauge ................................................................................................................. 70
13.3.3 Turbomolecular Pump................................................................................................................. 70
13.3.3.1 Turbomolecular Pump Status ............................................................................................ 70
13.4 Nitrogen Purge Valve for the Turbomolecular Pump on Corrosive Pumping Systems .......................... 71
13.5 Filament Control..................................................................................................................................... 71
13.5.1 Interlock ...................................................................................................................................... 71
13.5.2 Total Pressure Calibration .......................................................................................................... 71
13.5.3 Filament Lifetime......................................................................................................................... 72
13.6 Pneumatic Digital Pressure Switch and Pressure Gauge ...................................................................... 74
14 Diagnosing Problems .................................................................................................................................. 76
14.1 Introduction ............................................................................................................................................ 76
14.2 Communication Problems ...................................................................................................................... 76
14.3 If You Cannot Resolve Your Problem .................................................................................................... 76
14.4 Event Log Files ...................................................................................................................................... 76
15 Maintenance.................................................................................................................................................. 77
15.1 Introduction ............................................................................................................................................ 77
15.2 Safety Considerations ............................................................................................................................ 77
15.2.1 Toxic Material.............................................................................................................................. 77
15.2.2 Radiation..................................................................................................................................... 77
15.2.3 Electrical Voltages ...................................................................................................................... 77
15.3 General Instructions for All Maintenance Procedures............................................................................ 78
15.4 Bakeout of Quadrupole .......................................................................................................................... 78
15.5 Maintenance Procedures ....................................................................................................................... 79
15.5.1 Tools Required............................................................................................................................ 79
15.5.2 How to Determine if a Filament Replacement is Required ......................................................... 79
15.5.3 Filament Kit Replacement........................................................................................................... 80
15.5.4 Ion Source Replacement ............................................................................................................ 83
15.5.5 Electron Multiplier Replacement ................................................................................................. 85
15.5.6 Changing Diaphragms in the Foreline Pump .............................................................................. 88
15.5.6.1 Replacement Interval......................................................................................................... 88
16 Returning Your Instrument to INFICON ..................................................................................................... 89

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17 Recommended Parts List ............................................................................................................................ 90
17.1 Ordering Information .............................................................................................................................. 90
17.2 Sensors .................................................................................................................................................. 90
17.3 Consumable Parts.................................................................................................................................. 91
17.4 Electronic Boxes .................................................................................................................................... 91
17.5 Pumps and Maintenance Kits ................................................................................................................ 92
17.5.1 Cable and Foreline Pumps ......................................................................................................... 92
17.6 Inlet Assembly and Parts ....................................................................................................................... 93
17.6.1 Atmospheric Inlet Accessories.................................................................................................... 93
17.7 Heaters/Insulators .................................................................................................................................. 93
17.8 Orifice Kits.............................................................................................................................................. 94
17.9 CDGs ..................................................................................................................................................... 94
17.1 Preventative Maintenance Kits............................................................................................................... 95
0
18 Glossary ........................................................................................................................................................ 96

1 | Trademarks, Disclaimer, and Copyrights

INFICON

1 Trademarks, Disclaimer, and Copyrights
Trademarks
The trademarks of the products mentioned in this manual are held by the companies
that produce them.
INFICON® and FabGuard® are registered trademarks of INFICON GmbH.
All other brand and product names are trademarks or registered trademarks of theirrespective companies.
Software Copyrights
This product contains embedded software protected under the following copyrights:
Copyright INFICON Inc.
Disclaimer
The information contained in this operating manual is believed to be accurate andreliable. However, INFICON assumes no responsibility for its use and shall not beliable for any special, incidental, or consequential damages related to the use of thisproduct.
Due to our continuing program of product improvements, specifications are subject tochange without notice.
Copyright©2023 All rights reserved.
Reproduction or adaptation of any part of this document without permission is
unlawful.

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Revision History | 2

2 Revision History
2.1 Revision History Chart
Date

Rev. Level

Description

Approval Service
Engineer074-752-P1-B Transpector APX Operating Manual

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3 | Bibliography

INFICON

3 Bibliography
For further information on partial pressure analyzers, see Partial Pressure Analyzers
and Analysis, M. J. Drinkwine and D. Lichtman, American Vacuum Society Monograph
Series, or A User’s Guide to Vacuum Technology, J. F. O’Hanlon, John Wiley andSons (1989). The latter book also contains a wealth of information on related topics
including gas flow, pressure gauges, pumps, materials, and the design of vacuum
systems.

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Warranty | 4

4 Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on thereverse hereof, to be, for the period of warranty coverage specified below, free fromdefects of materials or workmanship under normal proper use and service. The periodof warranty coverage is specified for the respective products in the respective Seller
instruction manuals for those products but shall not be less than one (1) year from thedate of shipment thereof by Seller. Seller's liability under this warranty is limited tosuch of the above products or parts thereof as are returned, transportation prepaid, toSeller's plant, not later than thirty (30) days after the expiration of the period of
warranty coverage in respect thereof and are found by Seller's examination to havefailed to function properly because of defective workmanship or materials and not
because of improper installation or misuse and is limited to, at Seller's election, either(a) repairing and returning the product or part thereof, or (b) furnishing a replacement
product or part thereof, transportation prepaid by Seller in either case. In the event
Buyer discovers or learns that a product does not conform to warranty, Buyer shallimmediately notify Seller in writing of such non-conformity, specifying in reasonabledetail the nature of such non-conformity. If Seller is not provided with such written
notification, Seller shall not be liable for any further damages which could have been
avoided if Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHERWARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLDHEREUNDER. All other obligations and liabilities of Seller, whether in contract or tort(including negligence) or otherwise, are expressly EXCLUDED. In no event shallSeller be liable for any costs, expenses or damages, whether direct or indirect,
special, incidental, consequential, or other, on any claim of any defective product, inexcess of the price paid by Buyer for the product plus return transportation charges
prepaid.
No warranty is made by Seller of any Seller product which has been installed, used or
operated contrary to Seller's written instruction manual or which has been subjected tomisuse, negligence or accident or has been repaired or altered by anyone other thanSeller or which has been used in a manner or for a purpose for which the Seller
product was not designed nor against any defects due to plans or instructions supplied
to Seller by or for Buyer.
This manual is intended for private use by INFICON and its customers. Contact
INFICON before reproducing its contents.

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4 | Warranty

INFICON

These instructions do not account for every contingency that may arise
in connection with the installation, operation or maintenance of thisequipment. Should you require further assistance, please contact
INFICON.

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Declaration of Conformity | 5

5 Declaration of Conformity

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6 | Getting Started

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6 Getting Started
6.1 Safety
6.1.1 Definition of Cautions and Warnings
When using this manual, please pay attention to the notes, cautions and warnings
found throughout. For the purposes of this manual they are defined as follows:

CAUTION
This is a Caution paragraph. It cautions against actions which may cause
an instrument malfunction or the loss of data.

WARNING
This is a General Warning paragraph. It warns against actions which may
cause bodily injury.

WARNING
This is an example of a Electrical Warning paragraph. It warns of thepresence of electrical voltages which may cause bodily injury.

6.1.2 Personal Qualifications
All work described in this document may only be carried out by persons who havesuitable technical training and the necessary experience.

6.1.3 General Safety Instructions
CAUTION
The product is not for use in a manner not specified by the
manufacturer. If the product is used in a manner not specified by the
manufacturer, the protection provided by the equipment may be
impaired.

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Getting Started | 6

CAUTION
Only trained personnel may perform service actions on the product.

CAUTION
The product is part of the end user's application. Fire protection features
should be provided by the end user.

CAUTION
When installing the product, make sure it is properly secured in case of aseismic event.

CAUTION
This product is assembled in a clean room environment. Proper PPE
must be worn at installation to maintain system cleanliness.

6.2 Purpose of Transpector APX
Transpector APX samples a representative fraction of a process environment anddirects the gas sample to a Residual Gas Analyzer (RGA). Transpector APX candetect levels of impurities in process gases at sub-ppm levels.

6.3 Description of Transpector APX
Transpector APX is comprised of:• FabGuard® Software: FabGuard software provides automatic or manual control
and status information. It includes a full array of basic RGA features, including
Spectrum or Selected Peaks scanning, Leak Detection and Recipe Generation.
• Quadrupole Sensor: the quadrupole sensor analyzes gases by: (1) ionizing thegas molecules, (2) separating the ions by their mass-to-charge ratio, and (3)measuring the quantity of ions at each mass. The sensor can indicate the partialpressure of the gases characteristic of processes occurring within a vacuum. It is
used to investigate the nature of a process or to monitor process conditions.
• Electronics Module (Transpector): the electronics module controls the sensor,
pumping system, valve actuation, heaters, and power to all elements of thesystem. The electronics module and quadrupole sensor are a matched set. The
electronics module mounts on and is supported by the sensor.

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6 | Getting Started

INFICON• Pumping System: the pumping system provides process sampling from 1.2
atmospheres to high vacuum.
• Inlet Valves and HexBlock™ inlet: the inlet valves and HexBlock inlet provides
several sampling ranges, a calibration reference, and a process pressure gauge.

6.4 Physical Specifications
6.4.1 Physical Dimensions

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6 | Getting Started

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System dimensions: 20.7 in. x 6.4 in. x 12.7 in. (527.7 mm x 162.9 mm x 322.5 mm)
Foreline pump dimensions: 8.6 in. x 5.9 in. x 5.8 in. ( 218 mm x 150 mm x 147 mm)

6.4.2 Weight
The approximate weight of Transpector APX (without the foreline pump ) is 31 lbs(14.1 kg).
The weight includes all connecting cables.

6.4.3 Ventilation Requirements
If enclosing Transpector APX, the enclosure must be large enough or ventilated toprovide adequate cooling airflow to the fan on the Transpector APX pumping system.

CAUTION
For adequate ventilation, maintain at least 1 in. (25.4 mm) clearance
around the Transpector APX electronics module, the Transpector APX
heaters and the pumping system.

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6.4.4 Electrical Power Requirements
The SafeGuard system components that require AC power input are:• SafeGuard: use a universal input. Any voltage in the range specified in Acceptable
Supply Voltage Range [} 19] is acceptable.
• Personal computer: use a universal input. Any voltage in the range specified inAcceptable Supply Voltage Range [} 19] is acceptable.

6.4.4.1 Required Supply Voltage
AC power input is required. The AC input voltage is supplied and regulated throughthe external power supply. Input Voltage range: 90 - 264 V (ac) (47 - 63 Hz).
For NC to operate, SafeGuard requires a 1 mA load.
For C to operate, SafeGuard requires 48 V (dc) with a max of 500 mA.

6.4.4.1.1 Acceptable Supply Voltage Range
The AC voltage input must be within 100 - 240 V (ac).

6.4.4.1.2 Required Frequency
The required frequency of the AC input power is 50 - 60 Hz.

6.4.4.1.3 Power Rating
The rating of the current drawn by SafeGuard external power supply is
24 V(dc) at 15 W.

6.4.4.1.4 Overvoltage Category
Short circuit protection: Continuous hiccup mode (110-160%).
Over-voltage protection: 110-130% of nominal (cycle input power to reset).

6.4.4.1.5 Electrical Connections
The electrical connections are a 110 V (ac), three-pronged, grounded plug or a 230 V(ac), two-pronged plug with a ground contact. The plug can be US, UK, European orIsrael plug type.

CAUTION
Do not replace the power cord with an inadequately rated cord. The cord must be
rated 10 A or higher.

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6.5 Transpector APX Multi-Pressure Data Sheet
6.5.1 Specifications
Mass range

1 to 100 amu

Peak width at 10% peak

0.9 amu ± 0.05 amu

1 to 200 amu

1 to 300 amu

maximum
Ion source type

Closed ion source

Total pressure range1

5E-7 to 1E-3 Torr (6.6E-7 to 1.3E-3 mbar)

Total pressure accuracy2±25% 1E-6 to 1E-3 Torr (1.3E-6 to 1.3E-3 mbar)

Maximum ion source

1E-3 Torr (1.3E-3 mbar)

operating pressure3

Nominal ion source
operating pressure

2E-4 Torr (2.6E-4 mbar)

4

System operating

1E-8 Torr (1.3E-8 mbar) to 900 Torr (1200mbar)

pressure (with orifices/
capillary)Sensitivity at low>4.0E-6 amps/Torr>2.0E-6 amps/Torr>1.0E-6 amps/Torremission, FC mode(>3E-6 amps/mbar)(>1.5E-6 amps/mbar)(7.6E-7 amps/mbar)

Sensitivity at high

>2.0E-5 amps/Torr>1.0E05 amps/Torr>5.0E-6 amps/Torremission, FC mode(>1.5E-5 amps/mbar)(>7.6E-6 amps/mbar)(>3.8E-6 amps/mbar)

Maximum data rate

1.8 ms per point (555 data points per second)(analog scans or selectedpeaks)
Abundance sensitivity6<5 ppm<10 ppm<100 ppm

7<1 ppm<15 ppm<100 ppm

Detection limit8<10 ppb<25 ppb<50 ppb

Linearity9±20%

Minimum background<1.0E-8 Torr (<1.3E-8 mbar)

Zero blastpressure
Maximum sensor and inlet manifold: 120°C, inlet: 180°C
operating temperature
1. The pressure reading at low emission using a total pressure lens.
2. The total pressure accuracy at low emission.
3. The maximum ion source operating pressure at low emission (the filament turn-off
threshold).
4. 2E-4 Torr (2.6E-4 mbar) in the closed ion source produces 1E-5 Torr (1.3E-5mbar) in the quadrupole region .
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Getting Started | 6

5. The mass 40 contribution onto 41 amu.
6. The zero blast contribution onto 2 amu.
7. The minimum detectable concentration with krypton in air at a two second dwelltime.
8. The specification is for 1 Torr (1.33 mbar) orifices and lower. This is the linearity
specification at low emission at 0.1 to 2 times the nominal orifice pressure.

6.5.2 HexBlock Orifice Sampling Inlets
Inlet

Orifices

V1 (LP)

3 mTorr (4E-3 mbar) (no orifice)
10 mTorr (1.3E-2 mbar)
15 mTorr (2E-2 mbar)
100 m Torr (1.3E-1 mbar)
360 mTorr (4.8E-1 mbar)
1 Torr (1.3 mbar)
3 Torr (4 mbar)
10 Torr (13 mbar)

V2 (HP)

3 mTorr (4E-3 mbar) (no orifice)
10 mTorr (1.3E-2 mbar)
15 mTorr (2E-2 mbar)
100 m Torr (1.3E-1 mbar)
360 mTorr (4.8E-1 mbar)
1 Torr (1.3 mbar) (recommended bypass)
3 Torr (4 mbar) (recommended bypass)
10 Torr (13 mbar) (required bypass)
30 Torr (40 mbar) (required bypass)
1 Torr Sniffer (1.3 mbar) (recommended bypass)
3 Torr Sniffer (4 mbar) (recommended bypass)
7 Torr Sniffer (9.3 mbar) (required bypass)
10 Torr Sniffer (13 mbar) (required bypass)
30 Torr Sniffer (40 mbar) (required bypass)
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6.6 Nitrogen Purge Gas (Corrosive System Only)
Nitrogen is recommended to use as the purge gas for corrosive pumping systems.
The corrosive pumping system provides 8.5 ± 1 sccm of nitrogen purge gas to flow
through its bearings to protect the bearings from corrosion and loss of lubricant by
evaporation. For the corrosive pumping system, nitrogen gas is routed directly to thesolenoid valve block and to the pressure regulator through a 6.35 mm (1/4 in.) tee.
The supplied pressure is displayed on an LCD screen, attached to the solenoid. The
location of the pressure switch is indicated in the illustration below.

The pressure gauge is rated for 58 up to 120 psi (4–8.89 bar) [400–889 kPa]. The
recommended supply pressure is 75-80 psi (gauge) (5.17 to 5.52 bar) [517 kPa to 552
kPa].

CAUTIONThe nitrogen pressure must be at least 58 psi (4 bar) [400 kPa] and must
not exceed 120 psi (8.89 bar) [889 kPa]

6.7 Exhaust Gas
Exhausting gas from the turbomolecular pump is required for corrosive applications.
If sampling toxic gas chemistries it is essential that the exhaust port of theturbomolecular pump be connected to an abatement system at the factory. With

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Getting Started | 6

non-corrosive applications, exhaust the turbomolecular pump in accordance withthe facility's requirements. The dry foreline pump has a 1/4 in. (6.35 mm) VCR
connection .

6.8 Pneumatic Pressure Requirements
6.8.1 Valves
The HexBlock and discrete inlet valves are pneumatic. The pilot valves
are electro-pneumatic.

6.8.2 Pneumatic Pressure Range
Typically, dry nitrogen or dry air is used as pneumatic gas to actuate pneumatic
valves. The pneumatic pressure range is 58-120 psi (gauge) (4-8.27 bar)
[400-827.371 kPa]. The recommended setting is 75-80 psi (gauge) (5.17 to 5.52 bar)[517 kPa to 552 kPa].

6.8.3 Moisture Content of Compressed Air Supply
Compressed air can be used as pneumatic gas if dry Nitrogen is not available.
The compressed air must be dry enough to avoid moisture condensation in lines,
solenoids or valve actuators.

CAUTION
Moisture condensation can cause corrosion.

6.8.4 Pneumatic Pressure Connections
The supplied pneumatic gas is delivered to the solenoid through a 1/4 in. (6.35 mm)polymer hose. The 1/4 in. (6.35 mm) connector is a friction-lock, right-angle fitting toadapt the supply hose to the solenoid base.

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6.9 Vacuum Requirements
6.9.1 Required Vacuum
Transpector APX requires a combination of foreline pump and turbomolecular pump tocreate vacuum conditions necessary for proper operation. The turbomolecular pump isalways included with the system, where as the foreline pump is optional. Users may
utilize the foreline pump of the tool on which the Transpector APX is installed, if
available.
In initial pumpdown, the foreline pump and turbomolecular pump start runningsimultaneously. The foreline pump evacuates the residual gas inside the foreline hosethat connects to the system at the exhaust port. The Pirani gauge monitors thepressure at the exhaust port (also known as foreline pressure). Once the forelinepressure is below 12 Torr (16 mbar), the foreline isolation valve will open and theresidual gas inside the Transpector APX manifold will be pumped out by theturbomolecular pump and transferred through the foreline hose into the foreline pump.
During initial pumpdown, also known as conditioning time, FabGuard software will lockthe instrument to avoid any unwanted interruption
If the foreline pump is not able to bring the foreline pressure from atmosphericpressure down below 12 Torr (16 mbar) within 12 seconds, the firmware will trigger a
shutdown by closing the foreline isolation valve, shutdown the foreline pump andturbomolecular pump. If the foreline pump is the tool's foreline pump, the firmware willclose the foreline isolation valve and shutdown turbomolecular pump only. When it
happens, user is required to execute initial pumpdown again through FabGuard
software.
When the foreline isolation valve is open, and the foreline pressure is under 12 Torr
(16 mbar), the turbomolecular pump will accelerate to its maximum speed of 90,000
revolutions per minute (rpm). Once the turbomolecular pump reaches the maximum
speed and emission is turned on, the initial pumpdown is completed, emission andelectrometer will be turned on automatically, and then the system is ready for use.
When the foreline pressure is below 12 Torr (16 mbar), and the foreline isolation valve
is open during initial pumpdown and during normal operation, if the exhausted gases
flow back into the system and increase the foreline pressure up to 10 Torr or higher,
the system allows 10 seconds for the turbomolecular pump and the foreline pump tobring the foreline pressure below 10 Torr. If the system fails to achieve under 10 Torr
after 10 seconds, the firmware will trigger its safety interlock by closing the foreline
isolation and shutting down the turbomecular pump and the foreline pump to protect
the sensor from back-streaming gases.

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Getting Started | 6

6.9.2 Acceptable Range Of Vacuum
The Transpector APX manifold can achieve <1x10-8 Torr (1.3x10-8 mbar) of basepressure ( when there is no sample flow) after bakeout and cool down. This level of
vacuum requires a foreline pressure of <12 Torr (16 mbar).

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INFICON

7 Environmental Requirements
7.1 UseThe instrument is for indoor use only.

7.2 Altitude Range
The instrument can be used up to an altitude of 6561 ft. (2000 m). Contact INFICON
for operation instructions at higher altitudes.

7.3 Maximum Humidity
The instrument can be used up to 80% relative humidity (no condensation).

7.4 Pollution Degree
The instrument can be used at a pollution degree of 2 (per EN61010-1:2010).

7.5 Maximum Operating Temperature
The maximum ambient operating temperature is 40°C (104 °F).

7.6 Minimum Operating Temperature
The minimum operating temperature is 5°C (41°F).

7.7 Clean Room Requirements
SafeGuard is clean room compatible.

7.8 Anti-Static Conditions
SafeGuard passes standard EN 61326-1:2020.

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Computer System Requirements | 8

8 Computer System Requirements
The minimum system requirements for FabGuard Explorer Operating Software arelisted here:
Parameter

FabGuard Node Requirements

Processor

4.0+ GHz quad core

Memory16+ GB recommended

Hard drive

DATA 500 GB to 1 TB SSD

Resolution

1024 x 768 16-bit color or greater

Ethernet port

One free Ethernet port to allow connection toTranspector APX.

Operating system

Windows® 7 or 10

INFICON can supply a controller to run the software that operates SafeGuard.

8.1 Operating System
FabGuard software requires either Windows 7 or Windows 10 for proper operation.

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9 Installation
The Transpector APX system is shipped with the electronics module attached to thesensor module as shown, and sandwiched between two plastic panels. If the system
includes the foreline hose and/or a diaphragm foreline pump, these will be packaged
separately. All the connecting cables from the VSI will be installed in the designatedports at the factory prior to shipping.

System handle

PanelElectronics box

VSI

Pirani gauge
Bosch RailFig. 1: Transpector APX attached to one plastic panel

28 / 1041

Install sniffer or capillary, if applicable.

2

Mount Transpector APX to the process tool, if applicable.

3

Install the Transpector APX foreline pump, if included.

4

Install pneumatic supply gas, and purge gas, if applicable.

5

Install FabGuard software.

6

Establish communication between the Transpector APX and FabGuard

7

Pump down the Transpector APX

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Installation | 9

Lint free gloves should be worn whenever installing or maintaining
vacuum components to avoid impacting vacuum cleanliness.

9.1 Ambient Temperature Requirements
The Transpector APX electronics module must be mounted in an area where theambient temperature does not exceed 35°C (95°F) and there is ample air flow. The
best performance is achieved when the electronics module is not exposed to wide
temperature variations.

9.2 Sniffer or Capillary Installation
Install the sniffer or capillary into the Swagelok® fitting on the HexBlock using the
9/16 in. (14.3 mm) nut and vespel ferrule supplied with the sniffer.

9.3 Mount the Pumping System
Transpector APX typically mounts directly to a process chamber via a CF or KF
process connection at the end of the HexBlock inlet. Normally there is no need to usean additional isolation valve between the HexBlock and the process chamber. When
all HexBlock valves are closed, the HexBlock effectively acts as an isolation valve.
If an isolation valve is needed and Transpector APX does not have a CDG interlock
for the HexBlock inlet, it is essential to pump down the volume between the HexBlockand isolation valve from the process side before Transpector APX is turned on. If thisvolume is not pumped down properly, filament failure can result.

CAUTION
If an isolation valve is used, ensure any trapped volumes are pumped
out in order to avoid filament failure.
A support kit is supplied for Transpector APX configurations with a standard processconnection. The support kit, PN 922-209-G1, consists of two 4 ft. (1.22 m) support
legs, two adjustable feet and mounting hardware.

CAUTION
When installing the Transpector APX, make sure it is properly secured incase of a seismic event.

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9.3.1 Install the Support Kit
ü Two Bosch rails underneath the system base plate are designed to support
installation. Support legs can be attached to these Bosch rails with provided
hardware.
ü Measure the support leg to make sure that there is ample room for installation. The
legs may be cut to size. One end of the support leg has a threaded hole for an
adjustable foot. When cutting the leg, make sure that the threaded hole end is used
for the support.
1

Screw the adjustable foot fully into the bottom of the support leg.

2

Install the right-angle bracket onto the support leg using the T-nut and bolts
provided. Finger-tighten the bolt.

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Installation | 93

Install the second bolt and T-nut into the bracket, leaving it loose.

4

Slide the T-nut into the Transpector APX mounting rail slot and adjust theposition of the leg so that it is perpendicular to the floor with the adjustable footabout 12.7 mm (1/2 in.) from the floor.

5

Tighten all of the hardware.

6

Install the safety cap.

7

Unscrew the adjustable foot until it supports Transpector APX and relievespressure from the flange.

8

Tighten the lock nut on the adjustable foot against the support leg.

9.4 Foreline Pump Installation
The 24 V (dc) dry foreline pump has the following connections:• An electrical connection to the Transpector APX vacuum system interface.
• A foreline hose connection to the foreline isolation valve/Pirani assembly
connection.
• An exhaust port connection. This connection is required for corrosive or toxic gas
sampling. Refer to the appropriate standards, such as SEMI S6-0707E, for
exhaust gas guidelines.

WARNING
Proper exhaust connections must be installed when sampling toxic, corrosiveor any hazardous gases to protect the environment from lethal levels of gas.

CAUTION
If a customer-supplied foreline pump is used, it must provide acontinuous pressure below 12 Torr (16 mbar).

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2
1

exhaust port

32

foreline connection

3

foreline power cable

9.5 Software Installation
Refer to the FabGuard Operating Manual for information regarding software
installation.

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Connecting the Instrument | 10

10 Connecting the Instrument
Transpector APX communicates via Ethernet. Devices on an Ethernet network have
two identifying addresses: an IP address and a MAC address.
• IP addresses are assigned to identify individual devices on a network. Each device
on an Ethernet network, including the host computer, must have a unique IP
address. IP addresses can be reassigned to other devices on the network as longas each device has a unique IP address.
• MAC addresses are unique for each device. MAC addresses are never duplicated.

10.1 General Networking Information
10.1.1 IP Addresses
IP addresses can be either static or dynamic.
• Static (manual) IP addresses are set by the user and are changeable by the user.
Static IP addresses are preferred.
• Dynamic (automatic) IP addresses are automatically set by a host or by a server
on a network. Dynamic IP addresses can be set through dynamic hostcommunication protocol (DHCP).
When using static IP addresses on a large network (for example, on a company
network), a block of addresses should be reserved for static IP address use andprohibited from being assigned by the DHCP server (host). This will avoid duplicate IP
address conflicts.

CAUTIONUse static IP addresses with Transpector APX. Using DHCP, the hostserver may generate a new IP address if Transpector APX is taken offline
and then returned online or if there is an IP address conflict on the
network.
If the Transpector APX IP address is randomly changed during data acquisition,
FabGuard will not reconnect to the new sensor IP address. This will result in a loss ofcommunication and a loss of data.
Transpector APX follows the IPv4 IP address convention. An example IP address is
192.168.1.100. Each of the four parts is referred to as an “octet.” The IP addressconsists of a network prefix and a host protocol.

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10.1.2 Subnetworking
An IP network can be split into multiple subnets. Subnetting sets a region of the IP
address as a network prefix for all IP addresses inside the subnet through a subnet
mask. The subnet mask determines which octets of the IP address are used as the
network prefix.
In order for two network devices to communicate, they must be on the same subnet,
be connected to the same internet network and have the same network prefix.
If two devices have different network prefixes, the two devices are on different
subnets.

Example 1

Example 2

Example 3

IP address

192.168.1.104

192.168.1.105

192.168.1.150

Subnet mask

255.255.255.0

255.255.0.0

255.255.255.192

Network prefix

192.168.1.0

192.168.0.0

192.168.1.128

Host protocol

0.0.0.104

0.0.1.105

0.0.0.22

10.2 IP Address
The default Transpector APX IP address is 192.168.1.100 with a subnet mask of
255.255.0.0.
When connecting to an existing local network, there must be a static IP address foreach Transpector APX RGA. Contact the network administrator for IP address
assignments.
Two methods of changing the Transpector APX IP address are available:• INFICON Mass Spectrometer Search Utility• Transpector APX Web UI

10.2.1 Use the INFICON Mass Spectrometer Search Utility to
Change the IP Address
The INFICON Mass Spectrometer Search Utility (IMSSU) is included with FabGuard
Explorer software. Once the FabGuard Explorer software is installed onto the hostcomputer, the user can find the INFICONMassSpecSearch.exe installer file in the
directory [C:\Inficon].

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Right click the file and select "Run as Administrator" to install the application software.
The IMSSU opens as shown below.

The IMSSU detects every Transpector APX RGA installed on the network regardlessof IP address. The IMSSU runs automatically, and can be manually started orrestarted by clicking Search (Clears List). The display shows:• Genus (MPCPM for Transpector APX sensors)• Serial Number• Current IP Address• MAC Address

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INFICON• DHCP status (On or Off)
• Description (user editable)
Right-click on a sensor to display the menu.

10.2.1.1 Change IP address
1

Right-click on the sensor and select Change IP Address. The TCP/IP
Properties window displays. The TCP/IP Properties window displays the:ð Transpector APX MAC Address
ð Transpector APX IP addressð Change To text box, to enter a new Transpector APX IP addressð DHCP On or DHCP Off selection

CAUTIONSet DHCP Off so the IP address cannot be automatically reassigned.
2

Type the new IP address in the Change To text box.

3

Click Apply. Transpector APX automatically reboots and returns online with the
new IP address.

4

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Launch the Web UI.

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10.2.1.2 Launch Web UITranspector APX Web UI can be launched from inside the IMSSU. Refer to the074-581-P1 Transpector Web UI Operating Manual for instructions.

10.2.1.3 Find the Device
Find Device On flashes the power indicator on the device. The indicator flashes for
up to 60 seconds and then illuminates.
Find Device Off selected within 60 seconds after selecting Find Device On stops thesearch.

10.2.1.4 Show Settings
Click Show Settings to display multiple settings useful for troubleshooting. The
display shows:• serial number• gateway• IP address• DHCP status• MAC address• description• subnet mask
• name• description• structure version• box type• port• firmware version• TCP/IP source

10.3 Connect the Instrument
Before connecting Transpector APX, decide:• Is Transpector APX going to be on a private network (installed directly on either acomputer or a router that is not hooked up to the internet) or an internal network
where multiple computers are connected with access to the internet?
• Is more than one Transpector APX sensor being installed at the same time?

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10.3.1 Connect a Single Instrument
10.3.1.1 Single Sensor Direct Connection Installation
When installing a single Transpector APX on a private network or connecting directly
to a computer, changing the IP address of Transpector APX is necessary only if thecomputer being used to connect to Transpector APX has a different network prefix
than Transpector APX.
The default network prefix of Transpector is 192.168.x.x. The IP address of the hostcomputer used to control Transpector APX must have a subnet mask of 255.255.0.0
and a network prefix of 192.168.x.x.
If this is not the case, change the computer IP address to match the network prefix ofTranspector APX. For example, giving the computer an IP address of 192.168.1.101
allows Transpector APX to communicate directly with the computer.

10.3.1.2 Install a Single Sensor on an Existing Local Network
When installing a single Transpector APX on an existing local network, the default IP
address of Transpector APX may not be compatible with the network.
Transpector APX can have either a static IP address (recommended) or a dynamic IP
address set by DHCP (not recommended).
Contact the network administrator for information regarding valid IP addresses andask the administrator to assign an IP address for Transpector APX.

10.3.2 Install Multiple Sensors
Each Transpector APX is shipped with an identical default IP address. When installing
multiple Transpector APX, the IP address of each Transpector APX must be changed
one at a time so that each Transpector APX has a unique IP address.

CAUTION
Do not connect multiple Transpector APX to a network without firstchanging the IP addresses. Otherwise, there will be IP address conflicts
on the network.

10.3.2.1 Install Multiple Sensors Directly to a Host Computer
A private local network must be created when multiple Transpector APX sensors areconnected to a single host computer instead of an existing local area network.
Transpector APX must be installed on either a router or Ethernet switch. The router orswitch is connected to the host computer through the LAN port of the router/switch.
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10.3.2.2 Install Multiple Sensors on an Existing Local Network
Use an Ethernet switch instead of a router when multiple Transpector APX sensors
are connected to an existing local network.

CAUTION
Routers can cause conflicts with local networks because the router willattempt to set IP addresses for all network connected devices.
Since Transpector APX sensors are network connected devices, each sensor musthave an IP address assigned to it by a network administrator. After changing each IP
address manually, connect all of the sensors to the Ethernet switch and connect theswitch to the local network.

10.4 Change the Computer IP Address
An alternative to changing the Transpector APX IP address is to change the hostcomputer’s IP address to allow communication between the host computer andTranspector APX.

10.4.1 Windows 7
ü Changing the IP address of the host computer requires administrator rights.
1

Click Start, then click Control Panel.

2

In the Network and Internet group, click View network status and tasks.

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In the Network Status and Tasks window, click Change adapter settings.

4

If the host computer is connected directly to Transpector APX through the
Ethernet port of the computer, right-click Local Area Connection and selectProperties.

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5

Click Internet Protocol Version 4 (TCP/IPv4).

6

Click Properties.

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7

In the Internet Protocol Version 4 (TCP/IPv4) window, click Use thefollowing IP address.

8

In the IP address field, type 192.168.1.XXX. The last octet can be any number
as long as it is unique to the network and is not the same as theTranspector APX IP address.

9

In the Subnet mask field, type 255.255.0.0.

10

Click OK.

ð The IP address is now set to the manual IP address chosen in step 7.
11

Exit from all of the windows.

12

Connect to Transpector APX.

To change the IP address back to the default settings, follow steps 1 through 6 andreset the properties to their original settings.

10.4.2 Windows 10
ü Changing the IP address of the host computer requires administrator rights.
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INFICON2

In the Network and Internet group, click View network status and tasks.

3

In the Network and Sharing Center window, click Change adapter settings.

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Connecting the Instrument | 10

4

If the host computer is connected directly to Transpector APX through the
Ethernet port of the computer, right-click Local Area Connection and selectProperties.

5

Click Internet Protocol Version 4 (TCP/IPv4).

6

Click Properties.

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7

In the Internet Protocol Version 4 (TCP/IPv4) window, click Use thefollowing IP address.

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8

In the IP address field, type 192.168.1.XXX. The last octet can be any number
as long as it is unique to the network and is not the same as the Transpector
APX IP address.

9

In the Subnet mask field, type 255.255.0.0.

10

Click OK.

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INFICONð The IP address is now set to the manual IP address chosen in step 7.
11

Exit from all of the windows.

12

Connect to Transpector APX.

To change the IP address back to the default settings, follow steps 1 through 6 andreset the properties to their original settings.

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How the System Works | 11

11 How the System Works
11.1 Components
An example of a fully configured Transpector APX corrosive pumping system is shown
below.

4

6

3

2

5

7

12
1

13

8

14

10

15

9
11

16

1

Process2

Processpressureconnection

gauge(CF40, KF40

3

HexBlock4

inlet

Calibrationreference

or KF25)
5

Transpector

6

Sensor

APX sensor

manifold and(inside theheater

7

Electronic

8

Pressure switch

12

Turbomoleculars module

manifold)
9

Valve

10

solenoids

Nitrogen11

Foreline

regulator (forisolation

nitrogen purge

valve

pump

and valve
operation)
13

Foreline
Pirani gauge074-752-P1-B Transpector APX Operating Manual

14

Bypass15

VSIconnection for(Vacuumhigh pressure

Systemapplications

Interface)

16

Base plate andrails

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INFICON11.2 Theory of Operation
Many gas analysis applications involve pressures too high for direct exposure to thequadrupole sensor. In that scenario, a pressure reduction system is required to reducethe inlet pressure and maintain the pressure at the quadrupole sensor at an
operational level. With a pressure reduction system, a quadrupole sensor may be
used for high pressure applications such as sputtering, chemical vapor deposition(CVD), etch, vacuum furnace analysis, and laser gas analysis.
Transpector APX pressure reduction system is an orifice or a combination of an orifice
and a capillary or sniffer to reduce the partial pressure of the gas-mixture at theprocess side, typically by a fixed proportion, with minimum mass discrimination. An
orifice, a small disk with a defined radius hole, acts as a conductance limitation. Whenboth the volume and the high vacuum pump speed are constant, the orifice hole size
determines the magnitude of the pressure drop from the process pressure to thepressure at the sensor for proper operation. Orifices are available in various sizes tocover various pressure ranges.

CAUTION
FabGuard displays the total pressure inside the closed ion source.
Optimum performance is obtained when the total pressure display reads
approximately 2x10-4 Torr (2.6E-4 mbar) measured in low energy mode (40 eV, 200µA) and in high energy mode (70eV, 2000 µA).

11.3 Instrument Overview
11.3.1 Input/Output (Auxiliary I/O)
This section describes the available input and output (I/O) for Transpector APX.
Transpector APX has two digital inputs, referred to as Remote Logic inputs, which
default as emission control, two digital relay outputs (one of which reflects emission
status by default), and two analog outputs. No analog input is available forTranspector APX.

11.3.1.1 Auxiliary I/O Connector
User I/O is provided through a DA15 female connector, labelled "USER I/O" on the
VSI module.
A mating DA15 male connector is supplied in the ship kit for connecting to theTranspector APX auxiliary I/O connections.

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11.3.1.2 Two Digital Inputs (Remote Logic)
Remote Logic 1 and 2 are by default set to remotely control the emission status.
Remote Logic 1 turns on emission when transitioning from high to low. Remote Logic
2 acts as an emission interlock when in the low state, and will turn emission off when it
enters the low state, if emission was on.

11.3.1.3 Two Relays
Two relays are available from AUX I/O. These relays may be used as digital outputs.

Relay 1

The relay is open = Pin 2 and pin 1 are connected.

Relay 1

The relay is closed = Pin 3 and pin 1 are connected

Contact rating

24 V(DC) at 0.5 A

Relay 2

The relay is open = Pin10 and pin 1 are connected

Relay 2

The relay is closed = Pin 9 and pin 1 are connected

Contact rating

24 V(DC) at 0.5A

11.3.1.4 Two Analog Outputs
Two analog outputs are available. The available analog output voltage range is from
0 V to +10 V and can be configured through control software.
Analog output 1

pin 6 and pin 15

Analog output 2

pin 5 and pin 15

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11.3.2 Ultra-High Vacuum System
The vacuum system provides low pressure to:• establish a sample flow from the process by pressure difference• provide low pressure for optimum operation of the sensor
A dry pumping system comprised of a turbomolecular pump and a foreline pump isused to minimize hydrocarbons in the residual gas background. The turbomolecularpump provides a high compression ratio between the high vacuum side and theforeline pump side for all gases, including hydrogen. Hydrogen is the major residual
gas component in ultra-high vacuum. The high compression ratio for hydrogen isimportant for producing a low base pressure.

11.3.2.1 Foreline Subsystem
The foreline subsystem components include a flexible foreline hose of various lengths(≤10 m [≤32 ft.]), a foreline Pirani gauge, and a diaphragm foreline pump.
The foreline pump produces base pressures (when there is no gas flow) of 2 Torr (2.7
mbar), significantly less than the 12 Torr (16 mbar) needed for turbomolecular pump
operation. The 2 Torr (2.7 mbar) operating pressure for the foreline is in the viscousgas flow regime such that the foreline does not require a large diameter. The inside
diameter of the foreline is 6 mm (1/4 in.) which produces a 2 Torr (2.7 mbar) pressure
drop across a 10 m (32 ft.) length of foreline at 20 sccm of gas flow. The foreline Pirani
gauge can be used to troubleshoot pumping system problems and to verify that the
turbo pump is being backed properly.

11.3.3 Heater(s) Subsystem
The heaters are zone-based cartridges with maximum temperature dependent upon
the system configuration. The zones are divided into the Inlet Zone, the Manifold
Zone, and the Auxiliary Zone. Plastic heater covers lined with insulation and an IR
reflective material provide insulation.
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The Transpector APX VSI supplies power to the heaters.
Heater temperatures are defined in "Sensor Hardware Configuration" within FabGuardand each zone can be controlled interdependently. Zone states can be controlled
manually or via recipe within FabGuard.

WARNING
During or immediately after bakeout, the heater cover and metal surfaces
in the vicinity of the heater cover are hot.
These surfaces exceed 100°C at the maximum ambient operating temperature (35°C[95°F]), and can cause burns if touched.

11.3.4 Solenoid Valves
The solenoid-controlled valves are a group of valves joined together as one manifold
assembly which is mounted to a bracket on the base plate.
When solenoid valves are activated, compressed gas from the input gas supply (58–120 psi (4–8.27 bar) [400–690 kPa]) opens the appropriate valve. The recommended
setting is 75-80 psi (5.17 to 5.52 bar) [517 kPa to 552 kPa]. All valves areelectropneumatically operated. There are six solenoid valves on the valve block:V0

V0 is the foreline isolation valve. The valve is automatically
opened and closed by the start/stop of the pumping system.

V1

V1 is the low pressure orifice valve for the HexBlock or thecapillary sampling option. The valve is configured dependingon the application. This valve is typically used for backgroundmonitoring.

V2

V2 is the high pressure orifice valve for the HexBlock or thecapillary sampling option. The valve is typically used forprocess pressure sampling. This valve is user-configured
depending on the application.

V3

V3 is a high conductance valve (1 mTorr [1.3mbar] maximum
nominal pressure).

V4

V4 is a bypass valve. It is used in conjunction with the highpressure bypass option for high pressure orifices or a sniffer
or capillary sampling option.

V5

V5 is the calibration reference.

For more details about the function of each valve, see HexBlock Inlet [} 66].

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Each solenoid has a red indicator that illuminates when the solenoid is activated.

exhaust muffler
9-pin D connector

V3
V1
air lines to valves

V0
V2
V5
V4

air supply line connection

11.3.5 Sensor and Electronics Module Subsystem
The sensor is a quadrupole partial pressure analyzer that analyzes gases by:
1. ionizing gas species
2. separating the ions by mass
3. measuring the quantity of ions at each mass
The masses, unique for each substance, allow the identification of the gas moleculesfrom which the ions were created. The magnitudes of these signals are used todetermine the partial pressures (amounts) of the respective gases.
The Transpector APX electronics module mounts to the sensor and provides all of therequirements for operating the sensor, making the appropriate ion current
measurements, communicating to a computer, and sending the resulting output to thecomputer.
The Transpector APX VSI module contains all the cable connections to the various
components of the Transpector APX pumping system, including turbomolecular pump,gauges, and solenoid valves.

11.4 Application
The pumping and pressure reduction system reduces the pressure of process gas toallow proper operation at the ion source region. The pressure of 2x10-4 Torr (2.7E-4mbar) at the ion source region is considered optimal for partial pressure
measurements for the closed ion source (CIS). The general formula to calculate theflow rate of gas that produces the optimal pressure is described as below
Q(T-L/s) = PCISSCIS
PCIS = the pressure at the CIS ion source within the CPM manifold region
SCIS = the pumping speed of the closed ion source
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Q = throughput of the CIS ion sourceThis flow rate produced by process gas flowing through the process gas orifice is:
Q(T-L/s) = (PProcess- PCIS) * CProcess Orificewhere the conductance CProcess Orifice determines the orifice diameters needed to
produce this flow for each process pressure.
A selection of orifice diameters are available for reducing pressure for a multi-decade
range of (maximum) process pressures ranging 0.001 – 100 Torr (1.3E-3 –133 mbar).
For example, a 10 Torr (13 mbar) orifice has a 20 micron diameter hole to produce
approximately 2x10-4 Torr (2.7E-4 mbar) at the CIS when the process has 10 Torr (13mbar) of nitrogen. Since process pressures can vary within the operating range of theprocess, different pressure reductions may be needed. The Transpector APX system
has a variety of inlet orifices that allow pressure range sampling which typically covers
measurement of the base pressure of the process chamber (for leak detection andbase vacuum analysis), with a high conductance port and two orifices for processpressures.

11.5 Sample Inlet Systems and Examples of Use
11.5.1 Inlet System

HexBlock Inlets
HexBlock inlet with one orifice (V1) and high vacuum (V3)HexBlock inlet with one orifice (V2) with high pressure bypass (V4) and high vacuum (V3)HexBlock inlet with two orifices (V1) and (V2)HexBlock inlet with two orifices (V1) and (V2) with high pressure bypass (V4)HexBlock inlet with two orifices (V1), (V2) and high vacuum (V3)HexBlock inlet with two orifices (V1), (V2) with high pressure bypass (V4) and high vacuum (V3)074-752-P1-B Transpector APX Operating Manual

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When both volume and high vacuum pump speed are constant, the orifice hole size
determines the pressure at the sensor. Orifices are available in various sizes to cover
several pressure ranges. The tables below show different orifices for low and highpressure range applications. The figure below shows pressure ranges for sampling
which will assist in choosing the proper orifice for the application.
HexBlock Orifices

Part Number

10 mTorr (1.3E-2 mbar) orifice923-706-G6

15 mTorr (2E-2 mbar) orifice923-706-G8

100 mTorr (1.3E-1 mbar) orifice923-706-G5

360 mTorr (4.8E-1 mbar) orifice923-706-G7

1 Torr (1.3 mbar) orifice923-706-G4

3 Torr (4 mbar) orifice923-706-G9

10 Torr (13 mbar) orifice923-706-G3

Size of Orifices, Sniffers and Capillaries

Part Number

10 mTorr (1.3E-2 mbar) orifice923-706-G6

15 mTorr (2E-2 mbar) orifice923-706-G8

100 mTorr (1.3E-1 mbar) orifice923-706-G5

360 mTorr (4.8E-1 mbar) orifice923-706-G7

1 Torr (1.3 mbar) orifice923-706-G4

3 Torr (4 mbar) orifice923-706-G9

10 Torr (13 mbar) orifice923-706-G3

30 Torr (40 mbar) orifice (requires high pressure923-706-G10

bypass)7 Torr (9.3 mbar) sniffer (requires high pressure923-707-G3

bypass, 30.5 cm length)
10 Torr (13 mbar) sniffer (requires high pressure923-707-G1

bypass, 5 cm length)
100 Torr (133 mbar) sniffer (requires high923-707-G2

pressure bypass, 5 cm length)
30 Torr sniffer (40 mbar) (requires high pressure923-707-G4

bypass, 10 cm length)
300 Torr sniffer (400 mbar) (requires high923-707-G5

pressure bypass, 5 cm length)
30 Torr sniffer (40 mbar) (requires high pressure923-707-G6

bypass, 30.5 cm length)
10 Torr sniffer (13 mbar) (requires high pressure923-707-G7

bypass, 30.5 cm length)

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11.5.2 High Pressure Sampling: Orifice Bypass (V4)
When process pressures exceed 10 Torr (13 mbar), the process gas is dense enoughthat the gas molecules collide with each other more often than with the walls of thesampling system. In this transition or viscous flow regime, the time constant for
detecting changes in process gas composition becomes dominated by the time ittakes for the gas species that changes in the process to diffuse through the gas matrix
and arrive at the sampling orifice. This diffusion time is proportional to the processpressure and the square of the distance from the process to orifice. This sampling
method effectively shortens the diffusion distance from process change to thesampling orifice by drawing a small quantity (8.5 ± 1 sccm) of the process gas throughthe sampling valve and bypass valve to the interstage port of the turbomolecularpump. When the process gas flows in this manner, the diffusion distance of the gas is
reduced to about 2 cm (0.8 in.) and the response time for changes in the process gas
is significantly reduced.

11.6 Advice and Tips
11.6.1 Achieving Good Base Pressure
The Transpector APX vacuum manifold must be baked out after initial installation orwhenever the RGA sensor is exposed to air. After an eight hour bakeout and cool
down, the base pressure must be less than 5E-7 Torr (6.7E-7 mbar) at 40 eV, 200 µA.

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If not, examine the background mass spectrum to look for the largest peak. If thespectrum is dominated by mass 18, continued bakeout is required to reduce water
vapor.

11.6.2 Avoiding Trapped Gas when Sampling Valves are Closed
When V2 is closed, the sampled process pressure is trapped between V2 and theorifice installed at V2. This gas pumps out in a few minutes. It is best to keep V2 open
until the process pressure is evacuated. When the process pressure is evacuated,
open V1 to scan the background spectrum of the process vacuum system.

CAUTION
Close the sampling valves when finished with measurements to avoid
pressure bursts to the RGA if the process is vented.

Transpector APX turns off emission and the electron multiplier and closes all sampling
valves when a pressure burst occurs.

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12 Theory and Application Guide
12.1 Theory of Operation
The residual gas analyzer (RGA) draws the gas sample to its ion source. Gas species
are ionized in the ion source. These ions are focused into a quadrupole mass filter
where they are filtered by their mass-to-charge ratio. The detector collects the charge
from ions which have been filtered, one mass-to-charge ratio at a time.

12.2 Sensors
The three main components of the Transpector APX sensor are:• ion source (ionizer)• quadrupole mass filter• detector/electron multiplier
These components are mounted on an electrical feedthrough flange bolted to thevacuum manifold. The sensor works only in a high-vacuum environment because theions, once created, must not collide with other gas molecules as they move throughthe sensor.

1
1

3

2

Closed ion source2

mass filter

3

detector/electron multiplier12.2.1 Closed Ion Source
A closed ion source is the chosen ion source type for most applications above 20
mTorr (2.7E-2 mbar).

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1
2
3
4
5

6
7
8

9

1

Sealing disk

2

Spring3

Anode cylinder

4

Filament block5

Shield washer

6

Anode plate

7

Focus plates

8

Total pressure plate

9

Insulator ring

Inside the closed ion source, a heated filament emits electrons which bombard theincoming gas molecules and give them an electrical charge.Transpector APX detects
only positive ions. Once a molecule is charged (ionized), electric fields can be used tomanipulate the molecule.
The default filament is made of tungsten. Tungsten offers the best resistance toaggressive gases, particularly those containing fluorine and chlorine. A yttria coatediridium filament can be used in oxygen or water vapor heavy environments. Suchenvironments would otherwise quickly oxidize a tungsten filament.

CAUTION
Filaments can be damaged when operated at high pressures orenvironments with incompatible chemistry.
The term emission current refers to the stream of electrons emitted by the filament.
Emission current is controlled by the temperature of the filament.

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The filament is centered over a hole in the anode cylinder. The potential (voltage) on
the anode is positive with respect to the filament. The electron repeller, a flat plate, islocated behind the filament and is electrically connected to the negative side of thefilament. The potential difference between the filament and the anode determines the
kinetic energy (electron energy) of the emitted electrons. The electron energy
determines how gas molecules will ionize when struck by electrons.
Electron energy can range from 70 eV down to 10 eV. Operation below 70 eV isrestricted to emission currents of no greater than 200 μA. At 70 eV or above, anemission current of 2 mA will maximize sensitivity for background monitoring and leakchecking.
The ions formed within the ionization region are focused by the potential on the focus
lens and formed into an ion beam. (The focus lens is also called an extractor, since it
extracts the ions from the region in which they are created.) The focus lens focuses
the ion beam into the hole in the source exit lens. To attract positive ions, the focus
lens is biased negatively with respect to the anode.
The potential on the source exit lens is negative with respect to the anode and thefocus lens. The ion beam passes through the hole in the exit lens and is injected into
the mass filter.

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12.2.2 Quadrupole Mass Filter
Ions produced in the ion source are focused into the quadrupole mass filter. RF and
DC potentials are applied to the quadrupole mass filter. Each ion has a uniquemass-to-charge ratio. The ratio of RF to DC potentials applied to the quadrupole
dictates which mass-to-charge ratio is allowed through the quadrupole. The mass filter
will step through different RF-to-DC ratios as needed to filter each mass-to-charge
ratio of interest.

The mass filter’s four rods (hence the term quadrupole) are alternately charged todirect ions of specific masses down through the center, deflecting all larger andsmaller masses (hence the term mass filter).
The mass filter consists of four parallel rods, or poles, in a square array. The rods, andthe insulators in which they are mounted, form an extremely precise mechanicalassembly. The distance between the center of the square array and the closest rod
surface is known as the quadrupole radius, r0. Ideally, the rod should have a

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hyperbolic shape (towards the center of the assembly) rather than round. If the ratio of
the round rod radius to r0 is equal to 1.148, the resulting electric field is a reasonably
good approximation of the desired hyperbolic shape.
Opposite rods are electrically connected together. The ions are directed into the space
between the poles in a direction nominally parallel to the length of the rods. There theions are separated according to their mass-to-charge ratios by the lateral forces
resulting from the potentials applied to the poles.
The applied potentials consist of an RF component and a DC component. The RF
potential on one set of rods is out of phase by 180° with respect to the RF potential on
the other set of rods, but all are the same amplitude. For one pair of rods, the “X” pair,the DC potential is positive. For the other, the “Y” pair, the DC potential is of the same
magnitude but negative. The DC and RF potentials are referenced to a center voltage(pole zero).
The following equations summarize the potentials applied to the rods:[1] X = VCOS(2πft) + U + PZ
[2] Y = VCOS(2πft+π) - U + PZ
V = RF amplitude
f = RF frequencyt = time
U = DC potential
PZ = pole zero
The RF component removes the low-mass ions from the beam. Ions of sufficiently low
mass have their motions remain in phase with the applied RF. These ions will gain
energy from the field and oscillate with increasingly large amplitudes. Eventually, as
they travel along the length of the rods, they will strike one of the rods and beneutralized. High mass ions are focused by the RF component to an area close to thequadrupole’s long axis, the Z axis.
The DC component is superimposed on the RF to remove high mass ions from thebeam. The DC field deflects the high mass ions toward the negative poles, opposing
the focusing effects of the RF field. Eventually, these high mass ions strike thenegative rods and are neutralized. By a suitable choice of DC-to-RF ratio, the massfilter can be made to discriminate against both high and low mass ions. The ion
energy directed along the Z axis of the mass filter is dependent on the difference
between the potential at which the ions were formed (the anode voltage) and the polezero.
The ion energy is usually only slightly modified by the electric field (the fringing field)
between the source exit aperture and the quadrupole. Imbalances in the amplitude of
the two phases of RF applied to the rod pairs, and DC voltages are also applied,
resulting in a further modification of the ion energy.

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The mass of the ions passed by the filter is determined by the RF amplitude, the RF
frequency, and the quadrupole radius. (See equation [6].)[3] V = 14.438Mf2(r0)2
V = peak-to-peak RF amplitude in Volts
M = mass of the ion in atomic mass unites (amu) per electron charge
f = RF frequency in megahertz
r0 = quadrupole radius in centimeters
For example, a 200 amu singly-charged ion would pass through a quadrupole withnominal 6.35 mm (1/4 in.) diameter rods (an r0 of 0.277 cm), operating at 1.78 MHz, ata peak-to-peak RF amplitude of approximately 700 Volts.
The mass of ions transmitted (M) is directly proportional to the RF amplitude (provided
f is constant). As the RF amplitude is increased, progressively higher mass ions will bemade to oscillate in phase with the RF field and thus gain sufficient energy to strike
the poles. The DC voltage must be increased to maintain the high mass rejection
properties of the filter. A mass spectrum is generated by sweeping the RF amplitude
along with the DC voltage.
The next section (Scanning Characteristics) discusses the variation in the efficiency oftransmission of ions through the filter with mass. The Zero blast, discusses the
behavior of the filter at very low masses where the applied voltages approach zero.

12.2.2.1 Scanning Characteristics
The quadrupole acts as a pass-band mass filter for a mixed beam of ions in normal
operation, rejecting ions outside of the pass band and allowing ions with mass-tocharge ratios inside the pass band to travel to the detector. The selectivity of the massfilter is expressed in terms of resolution, R, which is numerically given by the ratio of
the center mass-to-charge ratio, M, to the width, ΔM (both unitless), of the pass band.
Since the number of the ions passed by the filter falls off gradually as the edge of thepass band is approached, the width is defined at the point where the ion current falls
to some specified fraction (usually 1/2 or 1/10) of the maximum value. The width of thepass band is determined by the DC-to-RF ratio.
The quadrupole can be designed so that R varies in any desired manner with M.
However, keeping ΔM constant ensures adequate separation of ions that are 1 MU
apart. This mode of scanning is called Constant ΔM. As a result, R is proportional toM, and therefore the efficiency with which ions of mass M are transmitted through thequadrupole decreases with M. Therefore, the sensitivity of the sensor decreases as M
increases.

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12.2.2.2 The Zero Blast
When the RGA scans over the very low end of the mass spectrum, the RF and DC
voltages applied to the rods approach zero. The quadrupole then ceases to act as afilter and a large current of unseparated ions is detected, called the zero blast.
Zero blast will interfere with the observation of masses 1 and 2 in the higher pressure
range of the RGA (for example, 1E-6 Torr to 5E-4 Torr [1.3E-6 to 6.7E-4 mbar]) whensignificant quantities of higher-mass ions are present. The zero blast contribution to
the mass 2 signal intensity can be between 5 ppm and 100 ppm depending on themass range of the RGA.

zero blast signal contribution

12.2.2.3 The Ion Detector
The ion detector region of the sensor consists of the quadrupole exit lens, the electron
multiplier and the detector itself. The quadrupole exit aperture is biased negatively
with respect to the anode, focusing ions that have been transmitted through thequadrupole into the electron multiplier and detector.

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12.2.2.3.1 The Electron Multiplier (EM) Detector
The electron multiplier (EM) acts as an in situ preamplifier for improved sensitivity.
Incoming ions are accelerated into the EM by a high negative voltage (usually -1.0 kVor more). When an ion strikes the surface of the EM, one or more secondary electrons
are emitted. These electrons are accelerated to a second surface which is at a morepositive potential, where additional electrons are generated.
This process repeats itself until a pulse of electrons emerges from the output of the
EM and is collected on a Faraday cup. The result is that as many as a million
electrons or more can be produced by each incident ion. The current output from an
EM detector is negative due to this pulse of electrons.
The ratio of the electron output current to the incident ion current is the EM gain. The
gain primarily depends on the EM type, the voltage applied to the EM input, thevoltage applied across the EM, the condition of the EM, and to a lesser extent themass and chemical nature of the incident ion. In general, EM gain decreases as theion mass increases. The advantage of the EM detector sensor is its high sensitivity (asmuch as 500 A/Torr), making it possible to measure partial pressures as low as
1x10-15 Torr (1.3E-15 mbar) for a 100 amu sensor.

12.2.2.3.2 The Continuous Dynode Electron Multiplier/Faraday Cup Detector
The continuous dynode electron multiplier/Faraday cup (CDEM/FC) detector amplifies
the electron pulse, significantly increasing the analyzer’s sensitivity.
2
1

4
3

1

CDEM cone2

Electron collector

3Signal output

4

Deflector shield

The CDEM/FC detector continuous dynode element is a special type of glass, rather
than a copper-beryllium alloy that a discrete dynode EM might use. The advantage of
the CDEM/FC detector over a discrete dynode EM detector is that CDEM/FC
performance does not degrade when exposed to air and does not need to be stored
under vacuum.
The maximum operating temperature for the CDEM/FC detector is 150°C. It can be
baked out at 300°C with the high voltage off.
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The CDEM/FC detector is slightly slower to recover after exposure to excessive input
or output currents. It may take longer for the gain to stabilize after the high voltage ischanged.
The CDEM/FC detector is operated at high voltages between -0.6 and -2.0 kV. A new
CDEM/FC detector will typically have a gain between 10 and 1,000 at -0.8 kV. The
gain at -3.0 kV typically exceeds 1 x 10+6. The Transpector APX default EM voltage is-0.8 kV.

CAUTION
Do not operate the CDEM/FC detector at temperatures above 150°C.
Permanent damage may result.

CAUTION
Avoid output currents in excess of 1 x 10-6 amps. Either decrease thehigh voltage or decrease the pressure. Permanent damage may result.
Use the minimum CDEM/FC detector voltage required to obtain the necessary peak
amplitudes and/or signal-to-noise ratio. Operating at higher voltages than necessary
will result in premature aging of the EM. As the CDEM/FC detector ages, the voltage
needed to obtain a specific EM gain will increase.
Since EM performance depends on the condition of its interior surfaces, preventhydrocarbon or other contamination:• Make sure diffusion-pumped vacuum systems are properly trapped to reduce oilback-streaming.
• Make sure turbomolecular pumped systems are interlocked to eliminate
mechanical pump oil back-streaming through a nonspinning turbo pump.
EM gain reduction from these kinds of problems can range from 50% to more than90%. The initial gain of the EM is generally high enough to accommodate somedegradation and still be usable. With repeated instances of contamination, the EM will
eventually require replacement.

CAUTION
In addition to hydrocarbon contamination, an EM can be adversely
affected by exposure to highly reactive chemicals.
Avoid any substance that will either cause the deposition of a surface film on the EM
or etch its surface. Avoid high levels of reactive fluorides, such as tungsten
hexafluoride, hydrogen fluoride, and nitrogen trifluoride.

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13 Operation
13.1 HexBlock
The HexBlock provides several inlets, a process pressure gauge (Porter CDG) and acalibration reference. It allows for up to three pressure ranges, including a highconductance inlet that covers various applications such as high density plasma etch
(HDP), TiN Deposition such as TDMAT, W CVD, or any other semiconductor process.
Advantages include:• Small vacuum path lengths• Minimum surface area
• Interchangeable orifices• Multiple process connection options (CF40, KF40 and KF25)• Multiple sniffer (capillary) inlet options for sampling the process
The orifices mounted in the HexBlock valves are replaceable.
Pressure ranges for the two main sampling valves are:• V1: 3 mTorr–10 Torr (4E-3 mbar – 13 mbar)• V2: 3 mTorr–Atmosphere (4E-3 mbar – Atmosphere)

CAUTION
The tool and the Transpector APX must be vented before changing
orifices, except when a tool isolation valve is installed.

13.1.1 HexBlock Inlet• V1 allows low pressure sampling (LP). It also indicates the background pressures
for some etch or CVD processes. No bypass is available.
• V2 allows high pressure sampling (HP). It also indicates process pressures for
etch, CVD and 300 mm degas sampling. Bypass is optional.
• V3 is for high conductance HC). It is similar to a wide open position. V3 is used forany high vacuum condition lower than 1 mTorr (1.3E-3 mbar).
• V4 is for bypass. V4 is used in conjunction with V2 in high pressure applications(above 1 Torr [1.3 mbar]). V4 connects to the interstage of the turbomolecularpump via a bypass tube which pulls gas from the process directly to V2. This cancut the response time down from several minutes to less than ten seconds for a
100 Torr (133 mbar) process. The V4 bypass inlet typically consumes
approximately 17 sccms of process gas.

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When sampling lighter gases such as hydrogen and helium, it may be necessary toconnect the V4 bypass tube to the foreline pump port rather than the turbomolecularpump interstage port to improve pumping efficiency.

CAUTIONTo prevent pressure bursts to the RGA, V4 should open before V2 toensure the pressure is correct for the V2 orifice.
When V2 is closed, V4 should remain open for several seconds to pump out residuals
left from sampling the process.
• V5 is a calibration reference. The calibration valve refers to the option of adding acalibration reference to the Transpector APX system. The calibration reference islocated near the ion source. V5 is used for mass tuning and as a sensitivity
reference, providing:– A means to tune the RGA.
– A reference for adjusting the EM voltage.
– A way to check whether the orifices are getting dirty or clogged.
– A reference for tracking the performance of the RGA.
The Transpector APX emission and EM are turned off prior to opening the calibration
valve (V5). This is due to trapped gas in the calibration reference.

• The sniffer or capillary option allows sampling closer to the actual process
reactions and it gives a faster response time and better signal (uses valve V2).
Capillaries also provide part of the necessary pressure drop to sample fromatmospheric pressure.
• The CDG gauge measures process pressure. It helps to prevent accidental or
erroneous inlet valves from being opened at sub-optimal or unsafe pressures.

13.1.2 HexBlock Process Connections
Types of Connections

Part Number

KF25 in-line connection

923-700-G1

KF40 in-line connection

923-701-G1

CF40 in-line connection

923-702-G1

KF25 90 degree elbow connection

923-703-G1

KF40 90 degree elbow connection

923-704-G1

CF40 90 degree elbow connection

923-705-G1

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13.1.3 Calibration Option
A single source of gas mixture accomplishes two calibration functions:• Mass scale calibration• Partial pressure reference levels
Selection of the appropriate gas mixture components is dictated by the mass range
desired.

The composition of the Calibration Reference option is shown in the table below. The
method of delivery is a flow reference with a remote on/off valve (V5). The gas flowrate is calibrated at the factory and is kept small (typically 1x10-4 Torr-L/s [1.3x10-4
mbar-L/s]) by a sintered leak. Flow through the leak element is viscous, therefore thegas composition in the reservoir is not altered by sampling. To ensure that no
calibration mix enters the tool, the pumping system does not allow other valves toopen with the calibration reference.
Component (Composition)

Calibration Masses

H2 (1%)

2

He (1%)

4

N2 (1%)

28

Ar (balance)

36, 38, 40

Kr (1%)

84

Xe (1%)

134, 136

Refer to the software operating manual for more information regarding mass tuning.
Results using FabGuard with this calibration mixture may be different than shown
above due to the programming of the ionization probability and material factors.

13.1.4 Process Gauge
The Porter capacitance diaphragm gauge (CDG) measures the pressure based on theelastic deformation of a ceramic diaphragm. The capacitance change caused by thedeflection is converted into a linear output signal proportional to pressure.
The Porter® CDG is resistant to high pressure surges. The Porter CDG type isselected based on process conditions. See the table below. Select a gauge based on
maximum pressure orifice. The Porter CDG range must be equal to or the next higher
range than the highest pressure orifice (typically V2 or the sniffer).

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Process Range

Part Number

1 Torr (1.3 mbar) range

964-208-G11
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Process Range

Part Number

10 Torr (13 mbar) range

964-208-G12

100 Torr (133 mbar) range

964-208-G131000 (1330 mbar) Torr range

964-208-G14

13.2 Heaters
A Transpector APX software interlock only allows for heater operation when theturbomolecular pump is at normal speed (90,000 RPM). The temperature is
programmable through FabGuard application software.

WARNINGTo avoid burn hazard and for proper operation of heaters, heater covers should
always be installed when operating heaters.

13.3 Pumping System
The pumping system is preconfigured at the factory. The pumping system can bereconfigured with a different:• Foreline pump, either system controlled or customer supplied• Turbomolecular pump, either standard or corrosive• Inlet arrangement, the type of inlet and/or orifices

13.3.1 Foreline Pump
The system controlled foreline pump configuration is selected when there is an
INFICON supplied foreline pump. If a customer supplied foreline pump is used to backother vacuum equipment, a check valve should be used to temporarily isolate
Transpector APX from any short (<10 seconds) pressure bursts that would damage
Transpector APX.

CAUTION
A customer supplied pump must supply a continuous foreline pressure
below 12 Torr (16 mbar).

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13.3.2 Foreline Pirani Gauge
A Pirani gauge mounted to the Transpector APX foreline monitors the pressure in theforeline. In the event of a pumping system malfunction, the foreline Pirani gauge will
indicate a pressure >12 Torr (16 mbar) and shut down the system. For optimal
pumping system performance, the foreline pressure should be <2.25 Torr (3 mbar).

13.3.3 Turbomolecular Pump
There are two types of pumping systems: standard (non-corrosive) and corrosive. The
same standard turbomolecular pump is used in both applications.
The corrosive pump configuration is selected for applications such as CVD or etch or
whenever corrosive gases are being sampled. The purge valve is automatically
opened when the Transpector APX turbomolecular pump is operating.
The corrosive pumping system provides purge gas flow through the bearing region of
the turbomolecular pump to protect the bearings from corrosion and loss of bearing
lubricant by evaporation. The regulator is preset at the factory to produce 8.5 ± 1 sccm
of nitrogen purge.

CAUTION
For the corrosive service turbomolecular pump (CVD/etch), nitrogenpurge gas is required whenever the system is operational.

WARNING
The turbomolecular pump must be completely at rest and the electronics
power supply must be disconnected before removing the turbomolecularpump connecting cable.

13.3.3.1 Turbomolecular Pump Status
Pump rotational speed is the RPM at which the turbomolecular pump is operating. Fullspeed is 90,000 RPM.

CAUTION
With the corrosive turbomolecular pumping system, a nitrogen purge
valve with regulator is connected to the purge port of the pump.
The nitrogen purge valve is always open when the corrosive turbomolecular pump is
running. This protects the bearings from corrosive gas attack and evaporation of the
bearing lubricant.

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13.4 Nitrogen Purge Valve for the Turbomolecular
Pump on Corrosive Pumping Systems
On corrosive pumping systems, the nitrogen purge valve provides a continuous flow of
dry nitrogen to the bearings of the turbomolecular pump.
The nitrogen purge valve opens when the turbomolecular pump is turned on, andcloses when the pump is shut down.

13.5 Filament Control
13.5.1 Interlock
On pump down, emission automatically turns on when the turbomolecular pumpreaches full speed (90,000 RPM). The emission automatically turns off if the pumpcontroller determines the turbomolecular pump is no longer up to speed.

13.5.2 Total Pressure Calibration
To protect the filament, Transpector APX has a factory-calibrated total pressure lensthat measures the total pressure in the closed ion source. The filament turns off (within
50 ms) after the pressure in the ion source rises above the total pressure setpoint,
typically 1E-3 Torr (1.3E-3 mbar) @ 40 eV 200 µA for a closed ion source.
The total pressure reading is calibrated with the ionizer set at both the default low
emission settings (200 µA emission; 40 eV electron energy) and default high emission
settings (2mA at 70eV). The default value for the over-pressure setpoint is 1 to 3
mTorr (1.3E-3 to 4E-3 mbar).
When sampling at process pressures, running at high emission will result in poor
linearity if the over-pressure does not trip. If 70 eV is desired for monitoring processgas, in FabGuard enter Sensor Configuration and change the electron energy to 70
eV, leaving the emission current at 200 µA.
Re-calibration requires calculation of the pressure in the CIS when the process gas is
introduced at a known pressure. The relationship is:
PCIS = COrifice PProcess / CCIS [1]The table below lists the values for the exit conductance for CIS and for different
orifices used in Transpector APX sampling systems. Equation [1] can be used to infer
the target gas pressure in the CIS that produces the total pressure measurement.
Using the process gas pressure (measured by the CDG or other gauge) and the
conductance of the orifice in use, the PCIS value can be calculated to use the automatic
Total Pressure Calibration option in FabGuard software.

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Orifice

Nominal Orifice

Designation

DiameterConductance (L/s)

PCIS (Torr) [@Design PProcess](microns)
CVD-CIS Exit

N/A

1.0

N/A

10 mTorr

675

3.9E-2

3.9E-4170

2.8E-3

2.8E-455

2.7E-4

2.7E-431

8.6E-5

2.6E-422

4.4E-5

2.6E-418

2.8E-5

2.8E-4(1.3E-2 mbar)
100 mTorr(1.3E-1 mbar)
1 Torr
(1.3 mbar)
3 Torr
(4 mbar)
6 Torr
(8 mbar)
10 Torr(13 mbar)

13.5.3 Filament Lifetime
Tungsten filament material is used in corrosive applications. The melting point oftungsten is 3410°C (6170°F); its boiling point is 5660°C (10220°F). At normal
operating temperatures (approximately 2200°C [4000°F]), tungsten vapor pressure isapproximately 1E-7 Torr (1.3E-7 mbar), which normally results in a reasonable
lifetime. Various oxides of tungsten are known.
The lowest oxide, WO2, is brown in color and has a sublimation temperature of around
800°C (1470°F). The intermediate oxides, W2O5 and W4O11, which are blue-violet incolor, and sublimes between 800°C and 900°C (1470°F and 1652°F).
The highest oxide, WO3 is yellow in color and has a melting point of 1473°C (2680°F).
No boiling point or sublimation temperature is reported, but presumably it is far morevolatile than the pure metal itself.
At normal filament operating temperature, tungsten readily reacts with oxygen or water
vapor to form oxides.
• If the oxygen (or water vapor) is very high, WO3 is formed. This would be observed
if an attempt had been made to turn on the filament in air at 760 Torr (1 bar).
• At lower oxygen (or water vapor) partial pressures, lower tungsten oxides areformed, giving rise to the blue color observed on the electron repeller. Since thetungsten oxides are far more volatile than the pure tungsten, when they form on
the filament surface, they evaporate away, depositing on the nearest relatively
cool surface.

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Operation | 13

The figure below depicts a graph correlating tungsten filament mean time between
failure (MTBF) in seconds with oxygen or water vapor partial pressure in Torr. The
graph predicts a filament lifetime of approximately 200 seconds at 1 Torr (1.3 mbar),
the maximum pressure at which Transpector APX can maintain electron emission.

At 1 Torr (1.3 mbar) at the filament, the pressure inside the anode cylinder will beapproximately five times higher (assuming the bulk of the gas load is entering theTranspector APX manifold through the closed ion source).
At 5 Torr (6.7 mbar), the collisional mean-free-path for ions will be less than 0.01 mm(4E-4 in.). The distance from the ion creation region to the total pressure collector
electrode is about 4 mm (0.16 in.), or approximately 400 mean-free-paths away. At
this pressure, the scattering losses may sufficiently reduce the total pressure ion
current so that it remains less than the over-pressure trip current. Under these
conditions, the filament would stay on and react with the oxygen, producing relatively
volatile tungsten oxides, until the filament diameter had been reduced to the point
where the tension on the wire was sufficient to cause the wire to pull apart.
The figure below depicts a Transpector APX over-pressure trip calculation. The totalpressure current curve after 5E-1 is due to the pure collisional scattering. Without
collisional scattering, it will be linear. The point where the CIS total pressure current
and DAC line meet is called the over-pressure trip point. When the total pressure
current exceeds the DAC line (Region II) the filament is turned off.

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In Region II, there is a six second delay in turning emission on and off.

At 5 Torr (6.7 mbar) in Region III, there is no overpressure and no emission error, but
the filament will last only hours. At 100 Torr (133 mbar), the filament would bedestroyed instantly.

13.6 Pneumatic Digital Pressure Switch andPressure Gauge
The pneumatic digital pressure switch and pressure gauge:• Provides a visual display of the air (or nitrogen) pressure provided to thepneumatic block.
• Ensures a proper pressure for the Transpector APX to function. If the pressure
decreases below 58 psi (4 bar) [400 kPa] or exceeds 120 psi (8.27 bar) [827 kPa],
the Transpector APX system shuts itself down.

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1

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Operation | 13

pneumatic digital pressure switch and gauge

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14 | Diagnosing Problems

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14 Diagnosing Problems
14.1 Introduction
Downtime can be reduced by diagnosing problems from observations related to thefailure, examining the FabGuard event logs, and checking the hardware status.

14.2 Communication Problems
To correct communication problems, check the following:• Is the Ethernet cable connected to the Transpector APX electronics module andthe host computer (either directly or through a router/switch)?
• Does the Transpector APX IP address have the same network prefix as the hostcomputer?
• Is Port 80 open on the host computer?
• Is there an IP address conflict between Transpector APX and another network
device?

14.3 If You Cannot Resolve Your Problem
If you cannot resolve your problem, contact INFICON.

14.4 Event Log Files
FabGuard software records errors and events, along with the time of occurrence, foreach day of operation, providing a chronology of operations that can be useful indiagnosing problems. See the FabGuard Operating Manual for additional information.

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Maintenance | 15

15 Maintenance15.1 Introduction
The Transpector APX Sensor is subject to aging with normal use and some of its
components will eventually require repair or replacement.

WARNING
Performing maintenance tasks on the Transpector APX sensor should
only be done by qualified personnel.
INFICON provides complete maintenance service for Transpector APX electronic
modules, Transpector APX sensors, and the pumping system.

15.2 Safety Considerations
If Transpector APX is used in a manner not specified by INFICON, protection provided
by the equipment may be impaired.

15.2.1 Toxic Material
The sensor does not contain any toxic material. However, if the sensor is used in an
application wherein toxic material is used or generated, residue of the toxic material
will likely be present on the surface of the sensor. Appropriate safety precautions must
be taken when handling contaminated sensors in order to assure safety ofmaintenance personnel.
The electronics module is RoHS compliant.

15.2.2 Radiation
Transpector APX gas analysis systems are not known to produce harmful radiation.

15.2.3 Electrical Voltages
Transpector APX does not present electrical hazards when enclosed and grounded
according to the specifications given in the installation instructions.

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15 | Maintenance

INFICONWARNING
If the electronics module is operated while open, hazardous electricalvoltages may be present. Such operation should only be performed byqualified service personnel.

15.3 General Instructions for All Maintenance
Procedures
CAUTION
Perform any servicing in a clean, well illuminated area.
Obey all cautions and warnings.
Wear clean, nylon, lint free lab gloves or finger cots.
Do not touch the vacuum side of the sensor with unprotected fingers.
Use clean tools for sensor disassembly and assembly.

15.4 Bakeout of Quadrupole
If the symptoms suggest that the sensor is contaminated, try first to restore normal
performance by baking the sensor under a high vacuum (1E-5 Torr (1.3E-5 mbar)[1.3E-3 Pa] or lower) for several hours, preferably overnight. The table below shows
the maximum bakeout temperatures.
If baking the sensor does not improve the sensor performance, it may be necessary to
perform the tasks described in Filament Kit Replacement, and also in Ion Source
Replacement.
If the procedures explained above do not solve the problem, contact INFICON.
While Operating With Electronics
RemovedElectron

EM Mode

150°C

300°C

multiplier faraday FC Modecup combination

200°C

300°C

CAUTION
When heating the sensor above 200°C, the electronics module must be
removed from the sensor.

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Maintenance | 15

15.5 Maintenance Procedures
15.5.1 Tools Required
Tools for Replacing• Ohmmeter

the Filament Kit• 3.2 mm nut driver• 1.5 mm (1/16 in.) flat blade screwdriver• 0.9 mm (.035 in.) hex driver• Non-metallic precision tweezers

Tools for Replacing• Ohmmeter

the Ion Source• 1.5 mm (1/16 in.) flat blade screwdriver• 0.9 mm (.035 in.) hex driver• #1 Phillips head screwdriver• Non-metallic precision tweezers

Tools for Replacing• 1.5 mm (1/16 in.) flat blade screwdriverthe Electron• #1 Phillips head screwdriver

Multiplier• 1.5 mm x 50 mm hex driver• 2.0 mm x 75 mm hex driver• Non-metallic precision tweezers

15.5.2 How to Determine if a Filament Replacement is Required
Follow these steps to determine if a filament replacement is required.
1

Measure the resistance of each filament. This can be accomplished while thesensor is under vacuum by measuring the resistance between pins 3 and 10. A
failed filament will measure open while an intact filament will measure between
0.2 and 0.8Ω.

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Although the following measurements may measure below 30 MΩ withthe filament assembly and ceramic shield in place, they must be above
30 MΩ when measured with the filament assembly and ceramic shieldremoved.
2

Measure the resistance of each of the pins with respect to ground (pin 7 and 8).
These measurements must be above 30 MΩ.

3Measure the resistance of each of the pins with respect to each other. All ofthese measurements must be above 30 MΩ, with the exception of
measurements between each filament pin and the filament common pin if thefilaments have not failed.

Pin

Assignment

1

PP

2

EM HV

3

Filament

4

Reserved

5

Anode

6

RF-

7

GND

8

GND

9

RF+

10

Filament
Common11

Reserved

12

Focus

13

TP

15.5.3 Filament Kit Replacement
Perform the following steps to replace the filament. Use non-metallic precision
tweezers throughout replacement to aid in handling small parts.

CAUTION
Neither the filament assembly nor the ion source can be cleaned. When
dirty, these components must be replaced.
ü Refer to Tools Required before continuing.

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Maintenance | 15

1

Remove the ceramic sealing disk (A) by carefully pulling the wire hold downs(B) away from the edges of the disk and pulling off the sealing disk.

2

Remove spring (C).

3

Remove the filament lead screw and washer (D1) using a 1.5 mm flat blade
screwdriver, loosen the filament lead screw (D2) using a 0.9 mm hex driver andremove the filament leads (E) from the filament.

B C D1

E

A

D2
4

E

Remove three nuts and the washers holding the filament assembly in placeusing a 3.2 mm nut driver. Be careful; do not to lose the two ceramic sealing
disk wire hold downs.

5

Carefully remove the filament assembly.

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6

Remove the three screws holding the filament assembly on the shipping fixture.

7

Carefully remove the new filament from its fixture and place it on the ion source
posts.

8

Replace the three filament assembly nuts and washers. Be sure to install thewire hold downs.

CAUTION
To avoid cracking the ceramic plate, do not overtighten the three nuts.
9

Reattach the filament leads and tighten the filament lead screws.

10

Reinstall the spring and the ceramic sealing disk.

11

Using an ohmmeter, check that the filament is not shorted to ground and thatthe filament shows a resistance of approximately 1Ω at the feedthrough.

12

Connect the RGA to FabGuard software and go to Sensor Hardware
Configuration, view the Lifetime section, and select Reset for Emission
Filament (h).

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Reset the Emission Filament (h) to zero.
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Maintenance | 15

It is required to perform sensor tuning, calibrating Faraday sensitivity,and calibrate sensitivity and EM gain before using the RGA.

15.5.4 Ion Source Replacement
Proceed as follows to replace the ion source. Use non-metallic precision tweezers
throughout replacement to aid in handling small parts.
ü Refer to Tools Required before continuing.
1

Remove filament lead screw (A1) using a 1.5 mm flat blade screwdriver, loosen
filament lead screw (A2) using a 0.9 mm hex driver, and loosen the threescrews (B) using a 1.5 mm flat blade screwdriver.

A1

A2

B
2

Pull the electrical leads away from the sensor.

CAUTION
Do not bend the leads.
3

Remove the three ion source retaining screws (circled in red, one is hidden in
the figure) around the bottom of the ion source assembly using a #1 Phillips
head screwdriver. They hold the ion source onto the mass filter.

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The ion source can now be removed by lifting it off the mass filter. Install a newion source by reversing the above steps.

5

Using an ohmmeter, check:ð that the filament is not shorted to ground or to any of the ion source plates.
ð that the two filament leads show a filament resistance of approximately 1Ω at
the feedthrough (approximately 0.5Ω at the lead connectors). See the image
below for pin-out locations.

6

Connect the RGA to FabGuard software and go to Sensor Hardware
Configuration, Lifetime section, and select Reset for Emission Filament (h).

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Maintenance | 15

7

Reset the Emission Filament (h) to zero.

It is required to tune the mass-scale table, calibrate Faraday sensitivity,
calibrate sensitivity and calibrate EM gain before using the RGA.

It is highly recommended to perform total pressure calibration, if
possible, after replacing the ion source.

15.5.5 Electron Multiplier Replacement
The following steps should be performed to replace the electron multiplier.
Use non-metallic precision tweezers throughout replacement to aid in handling small
parts.
ü Refer to Tools Required [} 79] before continuing.
1

Remove filament lead screw (A1) using a 1.5 mm flat blade screwdriver, loosen
the filament lead screw (A2) using a 0.9 mm hex driver, and loosen the threescrews (B) using a 1.5 mm flat blade screwdriver. Using the 1.5 x 50 mm hex
driver, unscrew the screws (C) that secure the two RF leads. Make sure to
remove the lock washers as well. There are a total of seven leads that must beloosened.

A1

A2
C

B
2

Gently pull the electrical leads away from the sensor.

CAUTION
Do not bend the leads.

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3

Using the 2.0 x 75 mm hex driver, unscrew three screws and three locking
washers (circled in red, one is hidden in the figure) holding the sensor
assembly to the feedthrough. Gently remove the sensor assembly from thefeedthrough. It may be necessary to remove the RF Leads (D) using precisionpliers.

D

4

Using a #1 Phillips head screwdriver, remove three gold screws (H, one ishidden in the figure) holding the EM assembly inside of the sensor assembly.

5

Gripping the bottom of the EM assembly, gently remove the EM assembly fromthe sensor assembly.

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Maintenance | 15

6

Remove the signal shield on the bottom of the old detector assembly.

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7

Install the signal shield removed in step 6 onto the new electron multiplierassembly.

8

Inspect the feedthrough pins for any contacts that may have come loose fromthe detector and remove the contact from the feedthrough pin prior to installingthe new detector.

9

Install the new electron multiplier assembly into the sensor can.

10

When installing the sensor back into the feedthrough, ensure that the two pinson the bottom of the detector align with the two pins on the feedthrough.

11

Reverse steps 1-4 to reassemble the Transpector APX sensor.

It is required to tune the mass-scale table, calibrate Faraday sensitivity,
calibrate sensitivity and calibrate EM gain before using the RGA.

15.5.6 Changing Diaphragms in the Foreline Pump
15.5.6.1 Replacement Interval
The foreline pump diaphragm disks, valve seals, valve disks, and O-rings must be
replaced every 8000 hours of operation, when used in an inert environment.
More frequent diaphragm replacement arre required in less than optimal
operating/process conditions.

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Returning Your Instrument to INFICON | 16

16 Returning Your Instrument to INFICON
Do not return any component of your instrument to INFICON without first obtaining a
Return Material Authorization (RMA) number from a Customer Support
Representative.
If you deliver a package to INFICON without an RMA number, your package will beheld and you will be contacted. This will result in delays in servicing your instrument.
Prior to being given an RMA number, you may be required to complete a Declaration
Of Contamination (DOC) form if your instrument has been exposed to certain
materials. DOC forms must be approved by INFICON before an RMA number isissued. INFICON may require that the instrument be sent to a designateddecontamination facility, not to the factory.

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17 | Recommended Parts List

INFICON

17 Recommended Parts List
17.1 Ordering Information
To contact INFICON order services regarding Transpector APX, please use thefollowing contact information:
INFICON, Inc.
Two Technology Place
East Syracuse, NY 13057
USA
Tel: +315.434.1100
email: reachus@inficon.com

17.2 Sensors
The following spare sensors should be readily available.
Part Number

Description

961-M1MCS

100 AMU sensor with Y2O3/Ir filament

969-1MLS

100 AMU sensor with Y2O3/Ir filament, coated/gold

961-M1MHS

100 AMU sensor with Y2O3/Ir filament & anode liner

969-1MNS

100 AMU sensor with Y2O3/Ir filament & anode liner, coated/gold

969-1MMS

100 AMU sensor with tungsten filament, coated/gold

961-M1MJS

100 AMU sensor with tungsten filament & anode liner

969-1MPS

100 AMU sensor with tungsten filament & anode liner, coated/gold

961-M2MCS

200 AMU sensor with Y2O3/Ir filament969-2MLS

200 AMU sensor with Y2O3/Ir filament, coated/gold

961-M2MHS

200 AMU sensor with Y2O3/Ir filament & anode liner

969-2MNS

200 AMU sensor with Y2O3/Ir filament & anode liner, coated/gold

961-M2MDS

200 AMU sensor with tungsten filament969-2MMS

200 AMU sensor with tungsten filament, coated/gold

961-M2MJS

200 AMU sensor with tungsten filament & anode liner

969-2MPS

200 AMU sensor with tungsten filament & anode liner, coated/gold

961-M3MCS

300 AMU sensor with Y2O3/Ir filament969-3MLS

300 AMU sensor with Y2O3/Ir filament, coated/gold

961-M3MH

300 AMU sensor with Y2O3/Ir filament & anode liner

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Recommended Parts List | 17969-3MNS

300 AMU sensor with Y2O3/Ir filament & anode liner, coated/gold

961-M3MDS

300 AMU sensor with tungsten filament969-3MMS

300 AMU sensor with tungsten filament, coated/gold

961-M3MJS

300 AMU sensor with tungsten filament & anode liner

969-3MPS

300 AMU sensor with tungsten filament & anode liner, coated/gold

17.3 Consumable Parts
The following consumable parts should be readily available.
Part Number

Description

969-818-G1S

APX CIS tungsten filament kit

969-800-G1S

APX CIS tungsten filament kit, gold

969-818-G2S

APX CIS coated filament kit

969-800-G2S

APX CIS coated filament kit, gold

969-819-G1S

APX CIS tungsten ion source kit

969-801-G1S

APX CIS tungsten ion source kit

969-819-G2S

APX CIS tungsten coated ion source kit with anode liner

969-801-G2S

APX CIS tungsten coated ion source kit with anode liner, gold

969-819-G3S

APX CIS coated ion source kit

969-801-G3S

APX CIS coated ion source kit, gold

969-819-G4S

APX CIS coated ion source kit with anode liner, gold

969-801-G4S

APX CIS coated ion source kit with anode liner, gold

915-724-G

Package of three spare liners (used only with liner configured ion source)059-0828S

Retained NI gasket

059-0826S

Unretained NI gasket

961-707-G1

Electron multiplier replacement kit

17.4 Electronic Boxes
The following electronic boxes should be readily available.
Part Number

Description

AP-A110SAPX ALD 100 AMU electronics box

AP-A210SAPX ALD 200 AMU electronics box

AP-A310SAPX ALD 300 AMU electronics box

969-210-G1S

Spare APX cable box assembly

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17 | Recommended Parts List

INFICON17.5 Pumps and Maintenance Kits
The following pump and maintenance kit should be readily available.
Part Number

Description

969-270-G1S

Diaphragm pump, 2 stage (no cable)

923-418-G2

Replacement diaphragm kit for 2-stage pump (for PU4829-N813.3,
PU5200-N813.3)

17.5.1 Cable and Foreline Pumps
The following spare parts should be readily available.

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Part Number

Description

600-1621-P1S

Power supply

600-1597-P1S

Turbo cable

600-1598-P1S

Foreline gauge cable

600-1599-P1S

Valve manifold cable

600-1600-P1S

CDG cable

600-1601-P1S

Porter cable

600-1622-P1S

Power extension cable pigtail

969-021-G1S

US plug (standard)

969-021-G2S

US plug 3 m

969-021-G2S

US plug 3 m

969-021-G3S

US plug 5 m

969-021-G4S

EUR plug (standard)

969-021-G5S

EUR plug 3 m

969-021-G6S

EUR plug 5 m

969-021-G7S

IL plug (standard)

969-021-G8S

IL plug 3 m

969-021-G9S

IL plug 5 m

969-021-G10S

UK plug (standard)

969-021-G11S

UK plug 3 m

969-021-G12S

UK plug 5 m

600-1605-P1S

1m foreline pump cable

600-1605-P3S

3m foreline pump cable

600-1605-P5S

5m foreline pump cable

600-1605-P10S

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Recommended Parts List | 17922-205-G1S

1 meter foreline hose922-205-G3S

3 meter foreline hose922-205-G5S

5 meter foreline hose922-205-G10S

Foreline hose, 10 m

17.6 Inlet Assembly and Parts
The following spare parts should be readily available.
Part Number

Description

059-0391S

SS-4-VCR-4-SP, silver PL male VCR nut

923-310-P2S

Blank polished HexBlock923-700-G1S

KF25 in-line connection

969-702-G1S

KF25 in-line connection, coated/xparts

923-701-G1S

KF40 in-line connection

969-703-G1S

KF40 in-line connection, coated/xparts

923-702-G1S

CF40 in-line connection

969-704-G1S

CF40 in-line connection, coated/xparts

923-703-G1S

KF25 elbow connection

969-705-G1S

KF25 elbow connection, coated/xparts

923-704-G1S

KF40 elbow connection

969-708-G1S

KF40 elbow connection, coated/xparts

923-705-G1S

CF40 elbow connection

969-709-G1S

CF40 elbow connection, coated/xparts

969-810-G1S

APX packaging kit

969-605-G1S

APX platform bypass kit

969-605-G2S

APX platform bypass kit, coated/xparts

17.6.1 Atmospheric Inlet Accessories
The following spare parts should be readily available.
Part Number

Description

922-204-G1

APX capillary assembly,1.5 m

922-204-G3

APX capillary assembly, 3 m

17.7 Heaters/Insulators
The following spare parts should be readily available.
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Part Number

Description

969-719-G1S

APX manifold heater cover kit

969-722-G1S

APX HexBlock heater cover w/o QCM kit

969-723-G1S

APX HexBlock heater cover w/ QCM kit

600-1596-P4S

APX heater(s)17.8 Orifice Kits
The following spare parts should be readily available.
Part Number

Description

969-706-G6S

10 mtorr HexBlock orifice (750 micron), gold

969-706-G8S

15 mtorr HexBlock orifice (350 micron), gold bypass

969-706-G5S

100 mtorr HexBlock orifice (200 micron), gold

969-706-G7S

360 mtorr HexBlock orifice (95 micron), gold

969-706-G4S

1 Torr HexBlock orifice (62 micron), gold

969-706-G9S

3 Torr HexBlock orifice (35 micron), gold

969-706-G3S

10 Torr HexBlock orifice (20 micron), gold

969-706-G10S

30 Torr HexBlock orifice (10.5 micron), gold

969-706-G11S

15 mTorr HexBlock orifice (350 micron), gold

059-0835S

Replacement c-ring, gold plated

17.9 CDGs
The following list of spare parts should be readily available.
Part Number

Description

969-832-G1S

100 Torr male HARSH gauge

969-833-G1S

1000 Torr male HARSH gauge

969-828-G1S

10 Torr female HARSH Gauge

969-829-G1S

100 Torr female HARSH gauge

969-830-G1S1000 Torr female HARSH gauge

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Recommended Parts List | 17

17.10 Preventative Maintenance Kits
The following spare parts should be readily available.
Part Number

Description

923-712-G1

HexBlock orifice gasket (pack of five)969-380-P2S

HexBlock orifice gasket, GP (pack of five)923-711-G1

HexBlock valve replacement kit

969-814-G1S

HexBlock valve replacement kit coated/
xparts923-710-G1

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18 | Glossary

INFICON

18 Glossary
Anode

The anode is the structure in the ion source in whichions are created by electron impact. It can be formed
from a mesh, such as in the open ion source, or from asolid tube, such as in the closed ion source. Its
electrical potential is positive with respect to thefilament, focus lens, total pressure plate, pole zero, exit
aperture and Faraday cup.

Appearance

The minimum electron energy required to produce, byPotential

electron bombardment, a given ion in its lowest energy
state.

Atomic Mass Unit An atomic mass unit is a unit of measurement for the(AMU)

mass of a molecule or ion. It is based on the definition
that the mass of an atom of the carbon-12 isotope isexactly 12.

BackgroundThe background is the residual atmosphere in a
vacuum apparatus when no gases are being
deliberately introduced.

Bakeout

A bakeout is the process of heating a vacuum chamber
above the ambient temperature in order to accelerate
the desorption of species such as water vapor andhydrocarbons which are adsorbed onto the innersurfaces of the vacuum chamber.

Center Voltage

The center voltage is the DC potential to which thequadrupole rod RF and differential DC potentials arereferenced.

Closed Ion

The closed ion source is an ion source in which theSource (CIS)

pressure in the ionization region is higher than in therest of the analyzer sensor. This is usuallyaccomplished by fabricating the anode from a solid
walled tube instead of an open mesh. This type ofsource is usually employed to measure tracecontaminant levels in a process gas.

ConductanceThe conductance of a gas flow channel is the ratio of
the gas quantity flowing through the channel to thepressure drop across that channel.

Cracking Pattern

See Fragmentation Pattern.

Detection Factor

The detection factor is the ratio of the detected signal
for a given ion current from a certain substance to thedetected signal for the same ion current of nitrogen ions

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as measured at mass 28. For Faraday cup detectors,
the detection factor is usually 1. For electron multiplierdetectors, this factor depends on the mass andchemical nature of the ion.
Detector

The detector is that part of the mass spectrometer
sensor which converts a beam of ions into an electricalsignal.

Doubly Charged

For positive ions, a doubly charged ion is a parent orIon

fragment ion where two electrons have been removed.

Electron Energy

The electron energy is the kinetic energy of the ionizing
electrons in an electron bombardment ion source and istypically measured in units of electron volts (eV). The
electron energy is approximately equal to the difference
between the bias voltage on the filament and the anode
potential, times the electron charge.

ElectronAn electron multiplier is a in situ amplifier which is used

Multiplier

to increase the sensitivity of a mass spectrometer.
When a high voltage is applied to an electron multiplier,positive ions are accelerated into the multiplier, causing
the release of a large number of electrons per incident
ion at the output.

Emission Current The emission current is the current of electrons leaving
the surface of a heated filament.
Exit Aperture

The exit aperture is a focus lens at the ion exit

(Quadrupole)(detector) end of a quadrupole mass spectrometer. Thislens is often biased by a potential that is negative withrespect to the quadrupole center voltage such that ionsare extracted from the exit end of the quadrupole andfocused into the detector.

Extractor

See Focus Lens.

Faraday Cup

The Faraday Cup is a detector for ions and/or electrons
consisting of a cup shaped, conductive electrode.

Filament

The filament is a fine wire or ribbon, which, whenheated by means of electrical current, emits electrons.
The filament typically made of iridium with a thorium or
yttrium oxide coating, or of tungsten or a tungsten alloy.

Focus Lens

The focus lens is a conductive aperture located next to,
and usually biased negatively with respect to, theanode. Its purpose is to draw the ions out of the anode,
form them into a beam, and focus them into the next
lens element.

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Fragment Ion

A fragment ion is an ion with fewer atoms than theparent gas molecule from which the ion is produced.
The mass of the fragment ion is always less than that ofthe parent ion.

Fragmentation

The fragmentation factor is the fraction of the total ions

Factorproduced from a specified substance which have agiven mass. The sum of the fragmentation factors for allof the ions produced from a specified substance isequal to one.

Fragmentation

The fragmentation pattern is the pattern of ion masses

Pattern

and intensities produced by electron bombardment of a
specified gas species as transmitted by the mass filter,
detected and recorded.

Gain (Electron

The gain of an electron multiplier is the ratio of incident

Multiplier)ion current to electron current output. The gain of themultiplier is a strong function of the bias potential
applied across it.

Ion

An ion is a molecule or atom which has either lost or
added one or more electrons. Those molecules whichhave lost electrons are positive ions. Those molecules
which have added electrons are negative ions.

Ion Current

An ion current is the rate of flow of electrical charge
associated with the flow of ions.

Ion Energy

The ion energy is the kinetic energy associated with abeam of ions. It is equal to the potential difference
across which the ion beam is accelerated (ordecelerated) times the charge on the ion, and istypically measured in electron volts (eV). Specifically, ina quadrupole mass spectrometer, it is the kinetic
energy, along the axis, of the ions as they pass throughthe mass filter. The ion energy is approximately equal tothe anode potential minus the quadrupole centervoltage time the ionic charge.

Ion Source

The ion source is that part of a mass spectrometer inwhich neutral gas molecules or atoms are ionized byelectron bombardment.

Ionization

The ionization probability for a chemical substance isProbability

the ratio of the total ion current (at all masses) produced
from a given partial pressure of that substance, to thetotal ion current produced from nitrogen at the same
partial pressure.

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Isotope

The atom is composed of nucleus protons and neutrons
surrounded by an electron cloud. The chemical
properties of an element are determined by the number
and arrangement of electrons (with -1 charge) in an
atom. The number of electrons in a neutral atom in turndepends on the number of protons (with +1 charge)
within the nucleus of that atom. Atomic nuclei also
contain neutrons which, being uncharged, do not affectthe chemistry of an element. Protons and neutrons haveapproximately the same mass, which is approximately
1,800 times the mass of an electron. All atoms of agiven element have the same number of protons but notnecessarily the same number of neutrons. Atoms of thesame element which have a different number ofneutrons are called isotopes. See also Natural
Abundance.

Linearity

Linearity is the mathematical relationship between an
ion current and the total or partial pressure giving rise tothat current. A mass spectrometer is said to have good
linearity when the ion current is proportional to thepressure over a specified pressure range within a
specified tolerance. Typically (but not always), the ion
current will be linear with pressure at the low end of an
instrument’s pressure range. At some pressure near thehigh pressure end of an instrument’s range, the ion
current will be less than proportional to the pressure.

Mass to Charge

The mass to charge ratio is ratio of the mass of an ion

Ratio

to its charge, usually expressed in atomic mass units
per unit electron charge.

Mass Filter

The mass filter is that part of the mass spectrometer
which separates a beam of ions by their mass to charge
ratios.

Mass

A mass spectrometer is an instrument which ionizes aSpectrometergas sample, separates the resulting beam of ions bymass to charge ratio, and detects the filtered ions as anelectrical signal.

Mass Spectrum

A mass spectrum is a record of ion current as a functionof mass to charge ratio obtained with a mass
spectrometer. The spectrum can be presented as agraph with mass to charge ratio on the X-axis and ion
current on the Y-axis, or as a tabular listing of ion
currents and the associated mass to charge ratios.

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Material Factor

The material factor for a chemical substance is that partof the proportionality constant between the partialpressure of that substance and the resulting massfiltered ion current, which depends on the chemical
nature of that substance but not the particular
instrument used for that measurement. The material
factor is a function of the ionization probability andfragmentation factor for the specified substance.

Mean-Free-Path

The mean-free-path is the average distance an ion,
electron, atom, or molecule can travel before colliding
with an ambient gas molecule. The mean free path isinversely proportional to the pressure.

Molecular Flow

Molecular flow is that motion of gas molecules wherein
the collisional mean free path is greater than the criticaldimension of a flow constraining element, such as anorifice of tube diameter. The gas flow characteristics are
dominated by collisions between the gas molecules andthe appropriate surfaces of the vacuum system.

NaturalThe natural abundance of an isotope is the average

Abundance

percentage of all atoms of a given element which havethe same number of neutrons. For example, 99.985% of
all naturally occurring hydrogen atoms have noneutrons, giving an atomic mass of approximately 1,
while 0.015% have one neutron, giving an atomic massof approximately 2. There is a third isotope of hydrogen
which contains two neutrons, giving an atomic mass of
3, but this isotope is unstable with such a shortradioactive half life that it is not normally naturally
occurring in any significant quantity on earth.
There are occasions when an observed isotopic
abundance will not reflect the natural abundance. For
instance, in semiconductor processing tools know as
ion implanters, it is not unusual for the BF3 boron
dopant source to be isotopically enriched to 99%+ of theboron-11 isotope (instead of the naturally occurring
80.22%).

Open Ion Source An open ion source is an ion source constructed with an(OIS)

open grid structure with high conductance between theionization region and the vacuum region surrounding it.
Residual gas analyzers are typically equipped with thistype of ion source.

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Outgassing

Outgassing is the evolution of gas which was dissolvedin or adsorbed on solid surfaces inside a vacuum
chamber.

Parent Ion

A parent ion is an ion made by removing a single
electron from the original, or parent, gas molecule, andtherefore has the same mass.

Partial Pressure

The partial pressure is the pressure of a specificchemical component of a gas mixture. The sum of all
the partial pressures is the total pressure.

Pole Zero

See Center Voltage.

Quadrupole

A quadrupole is a mass filter consisting of four parallel
electrodes or poles (hence quadrupole) arranged in asquare array. Opposite poles are connected together
electrically such that an electric field of hyperbolic
geometry is produced. The potentials applied to thesepoles are a superposition of variable DC and RF
voltages, generally of fixed RF frequency.

Repeller

The electron repeller is an electrode located on the(Electron)

opposite side of the filament than the anode. The
repeller is usually biased at the same potential as thenegative side of the filament, or a more negative
potential.

Residual Gas

A residual gas analyzer is an instrument which is used

Analyzer

to determine the quantities and chemical nature ofgases present in a vacuum system. The instrument istypically a mass spectrometer equipped with an open
ion source.

Resolution

Resolution is the ability of a mass filter to selectbetween nearby masses. It is typically measured as themass of the peak divided by the width of a given mass
peak at 10% or 50% of the peak maximum intensity.

SecondaryA secondary electron is an electron emitted from aElectronsurface when that surface is struck by a sufficiently
energetic ion, electron, neutral molecule or photon.

Sensitivity

The sensitivity of a mass spectrometer is the ratio of ion
current at a specified mass from a specified gas to thepartial pressure of that gas, suitably corrected forbackground. The specified gas is typically nitrogen,measured at 28 AMU, although argon at 40 AMU issometimes used instead, depending on the instrument.

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Total Pressure

The total pressure is the force per unit area exerted bya gas on the walls of its container. It is equal to the sumof all the partial pressures of the different chemical
species which comprise that gas.

Total Pressure

The total pressure plate, or collector, is an electrode inPlate

the ion source on which at least a part of the ion beam
impinges. The current striking this plate is a function of
the total pressure in the ion source.

Transition Flow

Transition flow is that motion of gas molecules wherein
the collisional mean free path is approximately thesame as the critical dimension of a flow constraining
element such as an orifice of tube diameter.

Transmission

The transmission factor is the ratio of ion current

Factordetected at the exit end of the mass filter (set totransmit a given mass) to the current of ions of thesame mass entering the filter from the ion source.
Typically, the transmission factor for nitrogen ions at 28
AMU is set equal to 1. The transmission factor at othermasses is given relative to that for nitrogen.

Viscous Flow

Viscous flow is that motion of gas molecules wherein
the collisional mean free path is less than the criticaldimension of a flow constraining element such as anorifice of tube diameter. The gas flow characteristics are
dominated by collisions between gas molecules.

Zero Blast

Zero blast is the ion current which is not mass filteredand is detected when the mass spectrometer isscanning near mass zero.

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