Cover Page

O

P

E

R

A

T

I

N

G

RSH-600
Rotary Sensor HeadPN 153800-L

M

A

N

U

A

L

Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
Scotch-Brite® is a registered trademark of 3M.
Teflon® and Kapton® are registered trademarks of E. I. du Pont de Nemours and Company or its affiliates.
All other brand and product names are trademarks or registered trademarks of their respective companies.

Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright©2018 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

RSH-600 Operating Manual

Table Of Contents
Trademarks
Disclaimer
Copyright

Chapter 1
1.1
1.2
1.3
1.4
1.5
1.6
1.7
1.8

Chapter 2
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.9
2.10

Chapter 3
3.1
3.2
3.3
3.4
3.5
3.6
3.7

Chapter 4Introduction
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Returning Your RSH-600 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Base Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Replacement Parts and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Installation
Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Functional Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Crystal Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Mounting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Adjustable Flange Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Copper Head Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Cooling System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Air Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Crystal Position Feedback Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Protection from Evaporant . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

Troubleshooting and MaintenanceTroubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Troubleshooting RSH-600 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 3-4
Crystal Holder Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Crystal Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

Outline Drawings

1–1

RSH-600 Operating Manual

Chapter 1
Introduction
1.1 Introduction
The RSH-600 rotary sensor is designed for the most demanding processes
employing very thick films and several different materials. See Figure 1-1.
Switching the crystal without venting the system makes it possible to run
automatically with continuous deposition. The fixed position of the crystal being
measured also makes it unnecessary to change the tooling factor.
RSH-600 can be used to deposit a different material on each of six crystals
providing greater measurement accuracy. Upon completion of deposition of one
material, the deposition controller may be programmed to switch crystals for the
next material. Switching crystals may also be actuated manually.
The RSH-600 sensor holds six crystals in a thermally shielded, water cooled
housing, insuring excellent crystal performance in temperature environments up to
300ºC. Crystals are housed in an easily removable Teflon® and stainless steel
crystal holder.
Crystal position is switched by applying a one second pulse to a 110/115 V (ac) or
24 V (dc) pneumatic valve. A 7-pin connector provides an indication of the numberof the active crystal. This may be used to interface with a thin film controller for
automatic crystal switching operation. Refer to the controller operating manual for
programming instructions.
Figure 1-1 RSH-600 and sensor head options

1–1

RSH-600 Operating Manual

1.2 Safety
When using this manual, please pay attention to the Notes, Cautions, and Warnings
found throughout. For the purposes of this manual they are defined as follows:
NOTE: Pertinent information that is useful in achieving maximum efficiency
when followed.

CAUTION
Failure to heed these messages could result in damage
to the instrument.

WARNING
Failure to heed these messages could result inpersonal injury.

1.3 How to Contact INFICONWorldwide customer support information is available under Support at
www.inficon.com where you can contact:a Technical Support Engineer with questions regarding applications.

a Service Engineer with questions regarding troubleshooting, diagnosing or
repairing a defective sensor.

Sales and Customer Service, to find the INFICON Sales office nearest to you.



Repair Service, to find the INFICON Service Center nearest to you.

If you are experiencing a problem with RSH-600, please have the following
information readily available:

1–2



the serial number of RSH-600,



a description of your problem,an explanation of any corrective action that you may have already attempted,

and the exact wording of any error messages that you may have received.

RSH-600 Operating Manual

1.4 Returning Your RSH-600
Do not return any component of your sensor to INFICON without first speaking witha Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will beheld and you will be contacted. This will result in delays in servicing your instrument.
Prior to being given an RMA number, you may be required to complete a
Declaration of Contamination (DOC) form if your sensor has been exposed toprocess materials. DOC forms must be approved by INFICON before an RMA
number is issued. INFICON may require that the sensor be sent to a designateddecontamination facility, not to the factory.

1.5 Unpacking and Inspection
1 If the RSH-600 sensor has not been removed from its shipping container, do
so now.

2 Carefully examine the RSH-600 sensor for damage that may have occurred
during shipping. This is especially important if there is obvious rough handlingon the outside of the container. Immediately report any damage to the carrier
and to INFICON.

3 Do not discard the packing materials until inventory is taken and a functionalverification test is performed. See section 2.2.

4 Take an inventory of the order by referring to the order invoice and verifying thatthe items listed in section 1.6 were received.

1–3

RSH-600 Operating Manual

1.6 Base Configuration
RSH-600 Rotary Sensor Head. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15320X-XX
See Figure 1-2 below for possible configurations.
Figure 1-2 RSH-600 configurations

Crystals (2 boxes, 10 total) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103200-2
Technical Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153800 on 074-5000-G1 CD

1–4

RSH-600 Operating Manual

1.7 Specifications
Number of Crystals: 6
Crystal Size . . . . . . . . . . . . . . . . . . . 14 mm (0.550 in.) diameter
Installation Aperture: . . . . . . . . . . . . 5.08 cm (2.0 in.) diameter
Overall Length
RSH-600 w/flat head . . . . . . . . . 208 mm (8.19 in.) plus in-vacuum length
RSH-600 w/angled head . . . . . . 219 mm (8.62 in.) plus in-vacuum length
Adjustable in-vacuum Length . . . 200 mm (7.9 in.) (standard)
350 mm (13.8 in.)
450 mm (17.7 in.)
540 mm (21.3 in.)
650 mm (25.6 in.)Power Requirement . . . . . . . . . . . . . 115 V (ac) @ 50 mA or 24 V (dc) @ 20 mA
Crystal Switching Method . . . . . . . . . Air Actuated @ 55 psi (4 kg/cm2) regulated
Cooling Method . . . . . . . . . . . . . . . . Water-cooled @ 5 L/m at 2 kg/cm2 (28 psi)
Air and Water Connections. . . . . . . . (3) 6.35 mm (1/4 in.) quick connects
Operating Temperature. . . . . . . . . . . 300°C max with water cooling and Standard
Head Cover
400°C max with water cooling and Copper
Head CoverWeight: (standard length) . . . . . . . . 200 mm (7.9 in.) RSH-600 - Flat - 3.8 kg(8.5 lb.)
RSH-600 - Angled - 4.5 kg (9.9 lb.)

1–5

RSH-600 Operating Manual

1.8 Replacement Parts and Accessories
Flat Copper Head Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153731
Angled Copper Head Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153731-2
Flat Stainless Steel Head Cover (See Figure 1-3) . . . . . . . . . . . . . . . . . . . 153708
Angled Stainless Steel Head Cover (See Figure 1-4) . . . . . . . . . . . . . . . . 153713
Flat Crystal Retainer Assembly (See Figure 1-3) . . . . . . . . . . . . . . . . . . . . 153204
Angled Crystal Retainer Assembly (See Figure 1-4) . . . . . . . . . . . . . . . . 153204-2
Flat Crystal Holder (See Figure 1-3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153710
Angled Crystal Holder (See Figure 1-4) . . . . . . . . . . . . . . . . . . . . . . . . . . . 153716
Flat Spring Retainer Assembly (See Figure 1-3) . . . . . . . . . . . . . . . . . . . . 153706
Angled Spring Retainer Assembly (See Figure 1-4) . . . . . . . . . . . . . . . . . 153714
Flat Spring Retainer Contact Kit (See Figure 1-3) . . . . . . . . . . . . . . . . . . . 153724
Spring Contact (See Figure 1-3 and Figure 1-4) . . . . . . . . . . . . . . . . . . . . 153726
Flat Retainer Screw (See Figure 1-3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153709
Angled Retainer Screw (See Figure 1-4) . . . . . . . . . . . . . . . . . . . . . . . . . . 153715
Angled Retainer Spacer (See Figure 1-4) . . . . . . . . . . . . . . . . . . . . . . . . . 153717
M3x6 Screw for Flat Crystal Retainer Assembly (See Figure 1-3) . . . . . . . 144-101
M3x12 Screw for Angled Crystal Retainer Assembly (See Figure 1-4) . . . 144-224
Solenoid Valve Assembly, 24 V (See Figure 4-1). . . . . . . . . . . . . . . . . . . . 153707
Crystal Position Male Connector (See Figure 4-1). . . . . . . . . . . . . . . . . . . 889128
Adjustable Flange (See Figure 4-1 and Figure 4-2) . . . . . . . . . . . . . . . . . . 153202
O-ring for Adjustable Flange (See Figure 4-1) . . . . . . . . . . . . . . . . . . . . . . 803188

1–6

RSH-600 Operating Manual

Figure 1-3 Rotary sensor head - flat

Crystal Retainer
AssemblyP/N 153204

Spring Retainer
AssemblyP/N 153706
Spring Retainer
Contact Kit (set of 6)
P/N 153724

Spring Contact
P/N 153726

Crystal Holder
P/N 153710

Retainer Screw
P/N 153709

Stainless Steel CoverP/N 153708
Copper Cover (not shown)
P/N 153731

1–7

RSH-600 Operating Manual

Figure 1-4 Rotary sensor head - angled

Crystal Retainer
AssemblyP/N 153204-2

M3x12 Screw
P/N 144-224

Spring Contact
P/N 153726

Spring Retainer
AssemblyP/N 153714
Crystal Holder
P/N 153716
Retainer Spacer
P/N 153717

Retainer Screw
P/N 153715

Stainless Steel CoverP/N 153713
Copper Cover (not shown)
P/N 153731-2

1–8

RSH-600 Operating Manual

Chapter 2
Installation
CAUTION
During installation, special care must be taken to protect
the barrel surface from being damaged. Scratches or
gouges may prevent RSH-600 from forming a goodvacuum seal to the O-ring.
Successful operation of any crystal sensor depends on proper placement,
compatibility of its construction with its operating environment and connection toproper utilities.

CAUTION
RSH-600 must be clean and grease free when installed in
the vacuum chamber. The sensor must be handled while
wearing clean nylon gloves. If parts do becomecontaminated, clean them thoroughly using a suitable
solvent to avoid outgassing and excessive peeling ofdeposition material from the sensor surfaces.

2–1

RSH-600 Operating Manual

2.1 Configurations
RSH-600 can be configured with a flat head or a 45° angled head. This allows for
mounting in various locations within the vacuum chamber. Standard head covers are
made of stainless steel. Copper head covers are available for applications where
temperature is a concern (see Figure 2-1). All versions of RSH-600 are fixed to their
specified lengths, but may be adapted to be adjustable in length using the optional
adjustable mounting flange (see section 1.8 for optional accessory information).
Figure 2-1 RSH-600 sensor head cover cooling efficiency

2–2

RSH-600 Operating Manual

2.2 Functional Verification
RSH-600 is equipped to operate on a 115 V (ac), 60 Hz line or a 24 V (dc) supply,
depending on the model number. The required voltage on the body of thepneumatic valve mounted on the side of RSH-600 can be verified. RSH-600 may
be bench checked using the following procedure:

1 Connect air pressure (55 psi) via 6.35 mm (1/4 in.) plastic tubing to the air inlet
fitting at the base of the solenoid valve marked "P."2 Connect RSH-600 as shown in Figure 2-2 or use any convenient method of
applying and removing the control voltage. RSH-600 will advance when thevoltage is applied and latch into position when it is removed. The electricalpulse duration should be at least one second.
Figure 2-2 Electrical connection
SwitchControl
Voltage
115 V (ac)or
24 V (dc)

J1

RSH

2–3

RSH-600 Operating Manual

2.3 Crystal Sensor Installation
Install the sensor as far as possible from the evaporation source (a minimum of
30.5 cm (12 in.)) while still being in a position to accumulate thickness at a rate
proportional to accumulation on the substrate. Figure 2-3 shows proper andimproper methods of installing sensors.
Figure 2-3 Sensor installation guidelines

To guard against spattering, use a source shutter to shield the sensor during theinitial soak periods. If the crystal is hit with even a minute particle of molten material
it may be damaged and stop oscillating. Even in cases when it does not completely
stop oscillating, it may immediately become unstable, or shortly after deposition
begins instability may occur.
Plan the installation to ensure that there are no obstructions blocking a direct path
between the sensor and the source. Install sensors in such a manner that thecenter axis of the crystal is aimed directly at the source to be monitored. Verify thatthe angle of the sensor location (with reference to the source) is well within theevaporant stream.

2–4

RSH-600 Operating Manual

2.4 Mounting
The RSH-600 smooth sealing surface mounts to an O-ring sealed nipple (notincluded). The optional adjustable flange allows the in-vacuum length to be
adjustable up to the RSH-600 original length. A flat head cover is typically used forcentered top mount applications while the angled heads may be used for either
off-center top mount or side mount applications. The customer must supply
specifications regarding mounting holes, exterior diameter of flange, and thesystem mating flange.
NOTE: The head cover must be removed from RSH-600 prior to installation.
To remove the standard stainless steel head cover: loosen the retainer ringnut. Push the head cover inward while turning it counterclockwise until it
stops (1/16 of a turn). Pull the head cover outward.
To remove the optional copper head cover: loosen the Allen head screws
that clamp the head to RSH-600 then gently pull the head off of theRSH-600 barrel.
The vacuum system must be equipped with a 5.08 cm (2.0 in.) diameter aperture
port. This port must have an O-ring to provide vacuum seal to the fixed flange on
RSH-600. If the head cover has been removed, simply slide RSH-600 through the
5.08 cm (2.0 in.) port. Secure RSH-600 to the port using four 1/4-24 bolts minimum.
Reinstall the head cover. See Figure 2-4.
Figure 2-4 Typical mounting configuration

J2
Air Solenoid ValveJ1

15.24 cm (6 in.) Coaxial Cable
Oscillator
3 m (10 ft.) Coaxial Oscillator
Cable to QCM

Water In

Water Out

Optional Flange

2–5

RSH-600 Operating Manual

2.5 Adjustable Flange Installation
1 Apply a small amount of vacuum compatible grease to the entire surface of the
O-ring that is included with the adjustable flange and then install the O-ring into
the O-ring groove in the adjustable flange.

2 Loosen the hex socket head screw on the adjustable flange.
3 Remove the cover from the RSH-600 sensor.
4 If the crystal holder contains any crystals, remove the holder and remove anddiscard the crystals. Reinstall the crystal holder.

5 Cut a piece of Kapton® tape (or equivalent), 3.8 cm (1.5 in.) to 5.08 cm (2 in.)wide, to a length of approximately 16 cm (6.3 in.).

6 Position the Kapton tape with the bottom edge of the tape on the beveledsurface just below the knurled ring. Not starting at any of the three bayonet
pins, wrap the tape around the circumference of the sensor. Fold the excess
tape over the top of the crystal holder. See Figure 2-5.
Figure 2-5 Wrap Kapton tape

2–6

RSH-600 Operating Manual

7 Stand the RSH-600 sensor upright on a firm surface. Place the adjustableflange, with smooth side up, over the top of the sensor barrel. With the flange
seating surface perpendicular to the sensor barrel, forcefully push the flange
downward, sliding the flange onto the sensor barrel. See Figure 2-6.
Figure 2-6 Slide flange onto sensor barrel

8 Slide the adjustable flange to the desired position on the sensor barrel and thensecure the flange to the barrel by tightening the hex socket head screw on theflange.

9 Remove the Kapton tape. Use a lint-free cloth dampened with reagent grade
isopropyl alcohol to clean the surfaces that were in contact with the tape.

2–7

RSH-600 Operating Manual

2.6 Copper Head Installation
The optional copper head must be installed after RSH-600 has been mounted on
the vacuum system. The copper head has two main pieces, the clamping ring andthe head cover.

1 Loosen the Allen head screw on the clamping ring and on the clamp portion of
the head cover.

2 Attach the clamping ring to the head cover.
3 Remove the crystal retainer to expose two gold springs. One spring makes
contact with the backside of the retainer. The other spring makes contact with
one of the individual crystal contacts.

4 Align the hole in the head cover so that the crystal, that this spring contacts, is
exposed. Note the position of this spring and replace the crystal retainer.

5 Carefully slide the cover over the barrel of RSH-600 until it touches the crystal
retainer, then rotate the cover so that the crystal, in contact with the spring, iscentered in the hole in the cover.

6 Tighten the Allen screws on the clamping ring.
The clamping ring should be left attached to the head during crystal changing. Only
the head cover should be removed so the alignment process will not have to berepeated unless the head is removed from the chamber.
If no flange was ordered and dimensions are needed for a custom adjustableflange, INFICON can provide essential dimensions and O-rings.

2.7 Cooling System
The direction of the water flow is not important. Use 6.35 mm (1/4 in.) plastic tubing
to connect one port to a water supply. The water flow rate should be 5 L/m (1.3 g/m)
at 2 kg/cm2 (28 psi). Water temperature should be less than 30°C. Connect theother port to a drain or water recycle system.

2.8 Air Supply
Use 6.35 mm (1/4 in.) plastic tubing to connect the air inlet port to an air supply.
Make sure the plastic tube is rated higher than 55 psi. The air pressure should be
regulated to 4 kg/cm2 (55 psi).

2–8

RSH-600 Operating Manual

2.9 Crystal Position Feedback Connections
The crystal position connector has seven pins. Pin numbers 1 through 6
correspond to the six crystals and pin number 7 is the common pin. A short
between pin 7 and one of the pins 1 through 6 indicates the active crystal. For
example, if pin 7 is shorted to pin 1, then crystal 1 is the active crystal.
Use this connector to interface with the controller for automatic crystal selection.
Refer to the controller operating manual for programming instruction.
Figure 2-7 Crystal position connector

6
5

1
7

2

4

3

Figure 2-8 Mating connector (male) - crystal position connector

1
2
3

6
7

5
4

RSH-600 provides a switch closure through connector J2 that can be used toindicate which crystal is active at a given time. Switch closure will be affected by
crystal positions.
Figure 2-9 Crystal position feedback diagram (crystal 1 is the active crystal)

Crystal 1
Crystal 2
Crystal 3
Crystal 4
Crystal 5
Crystal 6
Common

1
2
3
4
5
6
7

2.10 Protection from EvaporantPlace aluminum foil over the RSH-600 head cover and barrel to protect them from
evaporants during a vacuum operation.

2–9

RSH-600 Operating Manual

Chapter 3
Troubleshooting and Maintenance
3.1 Troubleshooting
If RSH-600 fails to function, or appears to have diminished performance, thefollowing Symptom/Cause/Remedy charts may be helpful.

WARNING
There are no user-serviceable components within the
RSH-600 sensor.
Refer all maintenance to qualified INFICON personnel.
A useful tool for diagnosing sensor head problems is the Digital Multi-Meter (DMM).
Disconnect the short oscillator cable from the feedthrough and measure theresistance from the center pin to ground. If the reading is less than ten megohms
the source of the leakage should be found and corrected.

3.2 Troubleshooting RSH-600
Table 3-1 General troubleshooting

SYMPTOM
Crystal fail signal on front
panel of unit will not
disappear

CAUSE

REMEDY

Damaged crystal

Replace crystal

Loss of electrical signal

Check for electrical continuity
at the BNC connector

Unit will not advance when Loss of pneumatic supply or Establish air supply andregulate to 55 psi
crystal switch key is pressed. pressure is insufficient for
proper operation
Xtal switch error message
displayed
Operation has been impaired Remove accumulated
as a result of peeling of the materialmaterial accumulated on theface of the aperture plate
Crystal not centered inaperture

Improper alignment

RSH-600 should realignautomatically. Be sure thecorrect air pressure (55 psi)
is used. Contact INFICON if
the issue persists

3–1

RSH-600 Operating Manual

Table 3-1 General troubleshooting (continued)

SYMPTOM
Large jumps of thickness
reading during deposition

CAUSE
Mode hopping

REMEDY
Mode-hopping is a byproductof active oscillation with aheavily damped crystal.
Temperature stabilization is
key to diminishing this.
Replace the crystal

Crystal near the end of its life Replace crystal
Scratches or foreign particles Clean, polish the crystal
on the crystal holder seating seating surface of the crystal
holdersurfaceInsufficient crystal cooling
Crystal ceases to oscillate
during deposition before it
reaches its "normal" life

Check water flow andtemperature

Crystal is being hit by small Move the sensor further
droplets of molten material away from the evaporantfrom the evaporation source
Damaged crystal

Replace crystal

Deposition material built-up Clean the crystal carousel
aperture plateon the edge of the crystal
carousel aperture plate andtouching the crystal, partiallymasking full crystal area
Crystal does not oscillate or Defective or damaged crystal Replace crystal
oscillates intermittently (bothExistence of electrical short Check for electrical continuity
in vacuum and in air)or poor electrical contacts
and short in sensor cable,
electrical connection
assembly, feedthroughs, andcrystals carousel
Insufficient crystal cooling

Check water flow andtemperature

Crystal oscillates in vacuum Crystal was near the end of Replace crystal
but stops oscillation after
its life; opening to air causes
open to air
film oxidation which
increases film stress
Excessive moistureaccumulates on the crystal

Turn off cooling water tosensor prior to venting, flow
warm water through sensor
while chamber is open

3–2

RSH-600 Operating Manual

Table 3-1 General troubleshooting (continued)

SYMPTOM

CAUSE

Inadequate cooling
Thermal instability: largechanges in thickness reading water/cooling watertemperature too highduring source warm-up(usually causes thickness
reading to decrease) and
Excessive heat input to theafter the termination of
crystaldeposition (usually causes
thickness reading toincrease)

REMEDY
Check cooling water flow
rate, be certain that coolingwater temperature is lessthan 30°C
If heat is due to radiationfrom the evaporation source,
move sensor further awayfrom source and use
sputtering crystals for better
thermal stability

Crystal not seated properly in Clean or polish the crystal
holderseating surface on the crystal
holderPoor thickness
reproducibility

Variable source flux
distribution

Move sensor to a more
central location to reliably
sample evaporant, ensure
constant relative pool heightof melt, avoid tunneling into
the melt

Sweep, dither, or position
where the electron beam
strikes the melt has beenchanged since the lastdeposition

Maintain consistent source
distribution by maintaining
consistent sweep
frequencies, sweep
amplitude and electron beam
position settings

Material does not adhere to
the crystal

Make certain the crystal
surface is clean; avoid
touching crystal with fingers,
make use of an intermediate
adhesion layer

3–3

RSH-600 Operating Manual

3.3 Maintain the Temperature of the Crystal
Periodically, measure the water flow rate through the crystal sensor to verify that itmeets or exceeds the value specified in section 2.7 on page 2-8. Depending upon
the condition of the cooling water used, the addition of an in-line water filtering
cartridge system may be necessary to prevent flow obstructions. Many systemcoaters use parallel water supply taps that provide high total flows. An obstruction
or closed valve in the pipe that supplies water to the sensor head would not resultin a noticeable reduction of total flow. The best test is to directly monitor the flow
leaving the sensor.
The crystal requires sufficient water cooling to sustain proper operational andtemperature stability. Ideally, a constant heat load is balanced by a constant flow ofwater at a constant temperature. INFICON quartz crystals are designed to provide
the best possible stability under normal operating conditions. No crystal cancompletely eliminate the effects of varying heat loads. Sources of heat variation
include radiated energy emanating from the evaporant source and from substrateheaters.

3.4 Use the Optimum Crystal Type
Certain materials, especially dielectrics, may not adhere strongly to the crystal
surface and may cause erratic readings. For many dielectrics, adhesion is
improved by using crystals with alloy coated electrodes. Gold is preferred for otherapplications.

3.5 Crystal Concerns when Opening the Chamber
Thick deposits of some materials, such as silicon oxide (SiO), silicon (Si) and nickel(Ni), will normally peel off the crystal when it is exposed to air due to changes infilm stress caused by gas absorption. When peeling material is observed, replace
the crystal.

3.6 Crystal Holder MaintenanceIn many applications, the surface where the crystal contacts the crystal holder may
require periodic cleaning. Material buildup on this surface can cause erratic or poor
electrical contact between the crystal and the sensor body. This buildup can also
cause a reduction in thermal transfer from the crystal to the sensor body. Poor
electrical contact and reduction in thermal transfer can result in excessive rate
noise or premature or intermittent crystal failure.
Cleaning may be accomplished by gently buffing the crystal holder to the crystal
seating surface with a white Scotch-Brite™ pad, followed by an ultrasonic bath insoap solution, followed by thorough rinsing in deionized water and drying or by
ultrasonic cleaning and rinsing only.

3–4

RSH-600 Operating Manual

NOTE: The crystal holder seating surface is machined to a very fine finish(16 micro inches rms). This high-quality finish is essential to provide goodelectrical and thermal contact with the crystal. Applying excessive force
during cleaning or using overly abrasive cleaning materials may damage
this finish and reduce sensor performance.

3.7 Crystal Replacement
Always use clean nylon gloves and clean plastic tweezers when handling the
crystal. Handle the crystals only by their edges. Anything that comes in contact withthe crystal surfaces may leave contamination, which may lead to poor film
adhesion. Poor film adhesion will result in high rate noise and premature crystal
failure.

CAUTION
Do not use metal tweezers to handle crystals. Metal
tweezers may chip the edge of the crystal.

1 Remove aluminum foil from RSH-600 (if installed).
2 Remove the stainless steel head cover (if installed).
2a Loosen the retainer ring nut.
2b Push the head cover inward while turning it counterclockwise until it stops(1/16 of a turn).

2c Pull the head cover outward and remove head cover from the head barrel.
3 Remove the copper head cover (if installed).
3a Loosen the three Allen head screws that attach the head cover to thecopper clamping ring. (Leave clamping ring attached).

3b Carefully slide the head off of the barrel of the RSH-600 sensor.
4 Loosen center screw of the head to release crystal retainer.
5 Remove the remaining three screws (on the backside of the retainer) toseparate the head from the spring retainer.

6 Remove the used crystals and replace new ones into the crystal holder. Make
sure to place the crystal so that the solid electrode is facing out of the head.

7 Put the spring retainer and crystal housing back together and tighten the threescrews, being careful not to deform the crystal springs or break the crystals.

8 Place the complete crystal retainer assembly back on the head barrel, observe
and line it up with the indexed pin. Tighten the screw.

9 Install the head cover.
NOTE: Crystal replacement time can be reduced by using a spare crystal holder.

3–5

RSH-600 Operating Manual

Chapter 4
Outline Drawings
Figure 4-1 Sensor head

NOTE: Dimensions are shown in millimeters.

4–1

RSH-600 Operating Manual

Figure 4-2 Adjustable flange (dimensions in inches)

NOTE: Dimensions are shown in inches.

www.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
All trademarks are the property of their respective owners.
PN 153800-L©2018 INFICON