Topic : MicroNano 2009 Report/ 1
Activities of the Micromachine Center / 2
Activities of the BEANS Laboratory / 6
Members' Profiles / 8

Topic

MicroNano 2009 ReportFine MEMS Project and the BEANS Project; theJapanese-German MicroNano Business Forum providing
an opportunity for Japanese and German companies tomake business contacts; the MEMS Packaging Forum
focusing on MEMS packaging; presentations byexhibitors; and the Workshop on Industry-Academia
Collaboration at which universities and research
institutes affiliated with the MIF presented their latest
research findings. The fact that all events attracted alarge audience indicated a strong interest among visitors.
The 15 t h International Micromachine/Nanotech
Symposium held this year as a project of the MIF
International Exchange Committee featured ten lecturers
both within and without the MIF talking on such topics as
the concentration of MEMS R&D centers and MEMS
applications. In the keynote session, representatives from
LETI/MINATEC, Fraunhofer ENAS, and the MEMS
Industry Group discussed trends toward concentrating
MEMS R&D into major centers. The speakers in session 1
introduced some of the latest trends in MEMS
applications including sensor networks, optical MEMS,and energy-related MEMS. The speakers in session 2
focused on fabrication processes as emerging
technologies from the perspectives of wafer vendors,
fabrication equipment (bonding equipment) vendors, andmaterial vendors.
Unlike in previous years, there was no charge forattending the symposium, and the event was held during
the exhibition in the exhibition hall, rather than at a
separate location. While there was some concern whether
the Symposium would maintain its high status or see a
decline in attendance, all 230 seats in the conference area
were filled. Further, more than half of the lecturematerials were distributed to non-MIF members(nonmembers were charged 2,000 yen), indicating astrong and widespread interest among visitors. Thus, we
can conclude that the value of the Symposium was notaffected by the change in format.
MicroNano 2010 will be held next year around thesame time (July 28–30). We expect to begin preparations
for next year to ensure that this remains the world’s
largest event for micro- and nanotechnologies in bothform and content by further expanding the concurrent
program schedule and by adding a concurrent exhibitionfocusing on service robot fabrication technology(ROBOTECH) in order to create more business
opportunities and provide visitors with the latest
information of the highest quality.

MicroNano 2009 was held at Tokyo Big Sight, East
Hall 5 on July 29–31. Despite temperatures reaching thehigh 80s in Tokyo, the event was a great success,receiving a total of 12,247 over the three days. Thesponsors would like to express their appreciation to all
who attended.

With a program of concurrent events that included
the Exhibition Micromachine/MEMS and the International
Micromachine/Nanotech Symposium held at the sametime and place, MicroNano 2009 was organized with theaim of bringing together all the latest MEMS-related
technologies at one venue and providing business
opportunities for visitors and exhibitors alike.
Reflecting the current economic conditions, thenumber of exhibitors participating in the Exhibition
Micromachine/MEMS was down 30 percent from last year
(252 exhibitors with 320 booths). On the positive side,
there was an increase this year in the number ofexhibitors involved in nanoimprinting and MEMS
foundries and only about a 10 percent decrease inattendance from last year. Thus, the event has been
deemed a resounding success under the circumstances.
This year the Micromachine Center (MMC) increased its
exhibition area to six booths, our largest number to date,in order to introduce our activities on MemsONE, theMems Mall, foundry service promotion, and international
standardization. The MMC also launched a trial concierge
service this year in order to more efficiently direct
visitors to booths matching their interests.
A total of eight events were held concurrently in two
special conference areas set up in the exhibition hall.
These events were the 15 t h International
Micromachine/Nanotech Symposium in which experts
presented the latest MEMS-related information for
promoting industrialization; the MEMS Forum providing
an opportunity for the MEMS Industry Forum (MIF) to
distribute information; presentations of results on the1