Activities of the Micromachine Center

Research Studies and Standardization Activities
1. MicroNano 2009

Fig. 2 shows the numbers of oral presentations by country
for the past three conferences. The U.S. had the mostpresentations at Transducers 2009 with 94, an increase of 1.7
times over its previous conference’s total of 56. Japan wassecond with 43 presentations, less than half of that fromAmerica, while Taiwan had a remarkable increase inpresentations to take the third spot. The top three presenterswere followed by Germany, Switzerland, China, theNetherlands, and South Korea.

In the MEMS Forum held at MicroNano 2009, Dr. Shuichi
Shoji, a professor at Waseda University, gave a talk on “Trendsin MEMS Technology at International Conferences and theFuture Outlook for MEMS.” Dr. Shoji is the chairman of theInvestigative Committee on Technological Trends at Home andAbroad established by the MEMS Industry Forum to study
these trends. On the topic of standardization, Dr. Kuniki Owadaof Teikyo University gave a speech entitled “Recent Trends inMEMS International Standardization: Heightened Significanceand Business Applications” and Dr. Kazuki Takashima ofKumamoto University spoke on “International Standards forEvaluating MEMS Materials.”
At the Exhibition Micromachine/MEMS, the Micromachine
Center presented an exhibit detailing terms and definitions for
MEMS that have been proposedor established thus far, tensile
testing methods for thin film
materials, standard test pieces
for tensile testing, and fatigue
testing methods for thin film
materials, as well as drafts ofinternational standards that areeither currently under review
or under development.

Number of oral presentations

10080

60
50

30

11US

A

0

1999

2001

2003

2005

Sw

edCa

nadaSing

ap

Transducers '07 (Lyon)

Sp

3

2

1naiiaumAustrBelgi

Transducers '09 (Denver)

26 25241719171618 181412

1191084323

21Technologies
outside the above Categories

45RF-MEMS

45117

Power-MEMS

8

Other applied Technologies

0%

1919

Optical0600

2009

an

3
UK

32

1020%

2007

Fr

e
or

37

1510%

1997

r

Fluidic

50%

2000Ko4Biomedical Systems

401n

Chemical/Bio Sensors

400

358

464

laRadiation/Material
Substance Sensors

439

er

en

Mechanical Sensors

634
524

N

het

ce

521800

639

iea

2630%

600

Chds

25

5854

826

la5301035

960

1000

er

53540%

40.8%

Sw

itz

Materials

1200a

Other basic Technologies

1307

rm

Design and Modeling

48.3%

47.0%

45.9%

Gena

640

2050.6%

1400

iwnd

Number of presentations

1554

53.1%

Ta

ny

6Fig. 3 shows the numbers of presentations broken down by
specific technological field. Among the basic technologies (1-1
through 1-7 in Fig. 3), actuators were the most popular,
followed by packaging technologies, whose number increased
dramatically over the previous conference. Under appliedtechnologies (2-1 through 2-9 in Fig. 3), mechanical sensors
occupied the top spot with a considerable increase in number
over the previous conference. This topic was followed in
popularity by fluidic and biomedical systems, while the numberof presentations on chemical/biosensors was half that of theprevious conference.

60%

56.0%

pan

Actuators

1600

Ja

an

8Fig.2 Numbers of oral presentations by country forthe past three conferences

Acceptancerate

Acceptance rate

810

Packaging Technologies

Accepted

2420

Fabrication
Technologies(Silicon)
Fabrication
Technologies (non-Silicon)

Submitted

4340

For its activities in the first half of 2009 in the Survey ofTechnological Trends at Home and Abroad, the Committee
conducted a survey on Transducers 2009 (the 15th Annual
Conference on Solid-State Sensors, Actuators andMicrosystems). The Transducers conference features
presentations on the latest R&D casework related tomicrosensors and microactuators and has occurred bienniallysince the first conference was held in Boston, Massachusetts in1981. As the 15th installment of this conference, Transducers
2009 was held in Denver, Colorado in June 21–25.
Transducers 2009 drew 984 participants from 28 countries
according to the advance registration. The conference attracted
1,307 paper submissions, with an acceptance rate of 45.9%, as
well as 216 oral presentations and 384 poster presentations.
Fig. 1 shows the numbers of submissions and corresponding
acceptance rates over the past several conferences.

1800

Transducers '05 (Seoul)
Transducers '07 (Lyon)
Transducers '09 (Denver)70

2. Survey of Technological Trends at Home orAbroad (First Semester)

Number ofpapers

94

90

1-1 1-2 1-3 1-4 1-5 1-6 1-7 2-1 2-2 2-3 2-4 2-5 2-6 2-7 2-8 2-9 3-1

Fig.1 Numbers of submissions and corresponding
acceptance rates over the past several conferences

Fig.3 Numbers of presentations broken down by specifictechnological field

2