2. Overview of concurrent conferences
SThe 14 t h International Micromachine / Nanotech Symposium(1) Purpose
The International Micromachine / Nanotech Symposium is held to promote the growth of MEMS related industries and improve theinternational competitiveness of the key components manufactured in Japan. The symposium includes the exchange of information withmicromachine and nanotech researchers who are promoting research and development on the front lines of leading-edge technical fields
both at home and abroad, and it also provides MEMS researchers from Japan and overseas countries with the latest information and avenue for discussion. The theme of the 14th International Micromachine / Nanotech Symposium is “ Technology Convergence MEMS: LSI,
Nano and Bio,” and features issues such as LSI/MEMS integration efforts and their application and next-generation BEANS process
technologies and the prospects for these technologies.
(2) Program

The 14 th International Micromachine / Nanotech Symposium--- International Exhibition focusing on MEMS, Nanotechnology, Ultraprecision / Microfabrication and Biotechnology --Date & Time: July 29, 2008 (Tuesday)
10:00 a.m. - 6:10 p.m.
Venue: Tokyo Bay Ariake Washington Hotel (Iris Banquet Hall)
Sponsor: Micromachine CenterSupport (planned): Ministry of Economy, Trade and Industry (METI), New Energy and Industrial Technology Development Organization (NEDO)
Cooperation (planned): The Japan Machinery Federation / Japan Robot Association / Japan Analytical Instruments Manufacturers Association
10 : 00 - 10 : 05
10 : 05 - 10 : 10
Keynote Session
10 : 10 - 10 : 55
10 : 55 - 11 : 40
11 : 40 - 12 : 40
Session 1
12 : 40 - 13 : 1013 : 10 - 13 : 40
13 : 40 - 14 : 1014 : 10 - 14 : 40
14 : 40 - 14 : 50
Session 214 : 50 - 15 : 20
15 : 20 - 15 : 50
15 : 50 - 16 : 20
16 : 20 - 16 : 30
Session 3
16 : 30 - 17 : 00
17 : 00 - 17 : 30
17 : 30 - 18 : 00
Closing
18 : 00 - 18 : 10

Chair: Keiichi Aoyagi, Micromachine Center
Opening
Tamotsu Nomakuchi, Micromachine Center
Opening Remarks
Takeshi Yoneyama, Industrial Machinery Division, Manufacturing Industries Bureau, METI
Guest Speech
Chair: Hiroyuki Fujita, The University of Tokyo
Technology Convergence on MEMS
Hidetoshi Kotera, Kyoto University
MEMS Industrialization Perspective in Japan
Roger T. Howe, Stanford University
Integrated Micro/nanosystems - Technology and Applications
Lunch
Chair: Seiji Samukawa, Tohoku University
MEMS LSI Integration
Albert Chang, Asia Pacific Microsystems (APM)
CMOS/MEMS Integration from Foundry Standpoint
Yoshiaki Toyoshima, Toshiba Corp.
MEMS and CMOS - Cooperation and Integration
Wilbur Catabay, Silicon Valley Technology Center
Opportunities and Challenges for MEMS at 200 mm
Susumu Sugiyama, Ritsumeikan University"FineMEMS" Project: Highly Integrated and Complex MEMS
BreakChair: Kazuyoshi Furuta, Seiko Instruments
MEMS Emerging Applications
Uwe Kleinkes, IVAM
Emerging Micro / Nano Applications from Euro
Yoshio Sekiguchi, Omron Corp.
MEMS MEMS Microphone and 8 inch manufacturing
Ryo Ota, Olympus Corp.
MEMS Applications on Biotechnology and Sensing
BreakChair: Takashi Usuda, AIST
Emerging Technology -- BEANS
Jouni Ahopelto, VTTMEMS and innovative nano-patterning
Ichiro Yamashita, Matsushita Electric Industrial
Nano-structure Design Using Protein
Koji Miyazaki, Kyushu Institute of Technology
Realizing High Efficiency Overcoming the Material Limitation in Thermoelectric Power Generation Using Nano-structure
Keiichi Aoyagi, Micromachine Center

Closing Remarks

SJapanese-German Micro / Nano Business Forum(1) Purpose
The Japanese-German Micro/Nano Business Forum has been held annually in Japan since 2003. This year’s forum, the sixth, will beheld for the first time concurrently with and within the same venue as the Micromachine/MEMS Exhibition. The forum is sponsored bythe IVAM Microtechnology Network, an organization set up in 1993 in the North Rhine-Westphalia (NRW) province of Germany with theobjective of promoting networking among small and medium-sized microtechnology companies. The forum introduces state-of-the-art
technical developments in Japan and Germany, two countries that lead the world in the microtechnology field.
(2) Program

Japanese-German Micro / Nano Business Forum
Date & Time: July 30, 2008 (Wednesday) 10:30 a.m. - 5:00 p.m.
Venue: Tokyo Big Sight (Tokyo International Exhibition Center, West Hall 1)
19th Exhibition Micromachine/MEMS special venue
Sponsor: IVAM Microtechnology Network
Cosponsor: Micromachine Center / MEMS Industry Forum(Attendance free / Simultaneous interpretation provided)

Opening (Registration Starts 10:30 -)10 : 45 - 11 : 00
Opening Remarks
Session 1
Solutions for Production of Microsystems
11 : 00 - 11 : 20
Electrical vias for multi-stack MEMS and packaging issues
Michael Schilling, Plan Optik AG (Germany)
11 : 20 - 11 : 40
Equipment Solutions for Automatic Assembly of Microsystems
Manfred Glantschnik, Datacon Technologies (Austria)
11 : 40 - 12 : 00
Micro machining system for cutting and laser processing
Naoki Iwamura, Leybold Co., Ltd. (Japan) / Kugler GmbH (Germany)
12 : 00 - 13 : 00
LunchSession 2
Business development for Micro and Nano
13 : 00 - 13 : 40
Innovations for industry- market chances for micro and nano in Europe
Dr. Uwe Kleinkes, IVAM Microtechnology Network (Germany)
13 : 40 - 14 : 00
Technology Transfer Europe-Japan
Dr. Robert Harrison, 24IP LAW GROUP Sonnenberg Fortmann (Germany)
14 : 00 - 14 : 20
MEMS Industry Forum plays a key role of technology and business development on microtechnology in cooperation with the academia and the government
Junji Adachi, Micromachine Center
14 : 20 - 14 : 40
- to be announced Dr. Heiko Kopf, MST. factory Dortmund (Germany)
14 : 40 - 15 : 00
Break15 : 00 - 15 : 20
- to be announced Session 3
Innovation in Measuring and Analysis
15 : 20 - 15 : 40
- to be announced 15 : 40 - 16 : 00
Optical 3D Surface Measurement Tools for Micro Production
Heinz-Peter Hippler, NanoFocus AG (Germany)
16 : 00 - 16 : 20
Complex Miniaturized Analysis System for Nuclear Magnetic Resonance Spectroscopy
Stefan Leidich, Fraunhofer IZM (Germany)
Closing
16 : 20 - 16 : 40
Towards successful MEMS business by open collaboration
Prof. Masayoshi Esashi, Tohoku Universty
16 : 40 - 17 : 00
Q&A2