Activities of the MEMS System Development Center
The enthusiastic atmosphere at the conference hallthroughout the presentation of results and the exhibition
showed a strong interest in the achievements of this project. We
hope that more companies will utilize this data for commercial
products and that the project will lead to new collaborations.
Information on all of the activities in the project performed
thus far, materials prepared for the presentation of results, andNEDO reports are available via the Fine MEMS Project linkprovided on the Micromachine Center’s home page. Feel free tomake use of these materials.

1. Presentation of Results from the Fine MEMS Projectand Activities for Disseminating MEMSPedia
A meeting for presenting the results from the Highly
Integrated, Complex MEMS Production TechnologyDevelopment Project (the Fine MEMS Project) commissionedand subsidized by the New Energy and Industrial Technology
Development Organization (NEDO) was held on July 31(Friday) in a special conference room set up within East Hall 5of Tokyo Big Sight as part of the MicroNano 2009 event(sponsored by NEDO and cosponsored by METI). The meeting
began with opening remarks from the sponsor given by KatsuyaOkano, head of the Machinery System Technology Development
Department at NEDO, and was followed by a guest speech byMotoki Korenaga, Deputy Director of the Industrial Machinery
Division under METI’s Manufacturing Industries Bureau. Next,Dr. Isao Shimoyama, project leader of the Fine MEMS Projectand professor of the Graduate School of Information, Science,and Technology, the University of Tokyo, gave an overview ofachievements made through the Fine MEMS Project.
Thereafter, the individual leaders for each of the ninecommissioned projects and the eight subsidized projects gave adetailed report on their own project achievements, which led tomuch lively discussion. As was the case with last year’s meetingfor presenting the interim achievements, this year’s meeting
proved to be quite popular, with a large enough audience to fillmost of the approximately 200-person-capacity hall and toexhaust all 400 copies of the prepared material handouts.
Similarly, NEDO’s booth on the Fine MEMS Project at theexhibition center attracted a large number of visitors and also
served as a place for more in-depth and animated discussion on
the presentation of results. Panel exhibits and computerdemonstrations were provided at both the NEDO booth and theMicromachine Center booth on the knowledge database andMEMS equivalent circuit generator, which the Micromachine
Center made available to the public in June 2009 under thename MEMSPedia. There was a lot of positive feedback on
MEMSPedia, with many visitors looking forward to further
developments and expanded functions in the tool.

Web page for the Fine MEMS Project

2. Nano-Tech R&D Base, Tsukuba
METI’s policy measures for strengthening the role of AIST
Tsukuba Central as an R&D base for nanotechnology haveentered the implementation stage. The measures call for moreemphasis on N/MEMS, as well as nanoelectronics and powerelectronics. The policy sets a new direction that will not only
enhance MEMS R&D at the arena, but also initiate
implementation of the arena as a center for trial manufacturing,with the Micromachine Center playing an active role in planning
the specifics. In addition to cutting-edge technologies
emphasizing multilayer integration, large-diameter wafers, andlow environmental impact, the MMC recognizes the importanceof a trial production line that facilitates the transition to mass
production and is investigating this possibility. We will beproviding more information as the investigation progresses.

Presentation of the Fine MEMS Project (upper left)
and MEMSPedia demonstrations

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