Research and Standardization Activities
in its manufacture enabledminiaturization of the device.
Issues to be considered withregard to compass performance
include the inclination of thedevice and correction of thedisturbances caused by external
magnetic fields.

MEMS international standardization was reviewed at an
IEC/SC47F meeting held June 17 and 18 at Jeju in Korea, wherethree of the Unesco World Heritage sites are located. In
coordination with this meeting, the 5th Japan-Korea-China
MEMS Standardization Workshop was held on June 19. This
workshop is held to promote cooperation and the exchange ofinformation relating to MEMS standardization on the part ofJapan, Korea and China. The first workshop was held in 2005 inTokyo, and each year the venue alternates among the threecountries. The following is an overview of this year’s workshop.

(2) Professor Isono of Kobe University gave a presentation
entitled “Scanning Prove??? Parallel Nanolithography for
NEMS Fabrication Using MEMS Cantilever Array,” relating
to nanoscale patterning and processing using a cantilever
array. Applying bias voltage
with an AFM cantilever during
scanning makes it possible toprocess 50 nm linewidths
during anodic oxidation, selfassembledmonolayerpatterning and EB resistprocessing.

1. IEC SC47F / WG1 meeting
Following email review and agreement by specialists
regarding some of the technical issues, it was agreed that the“RF-MEMS Switch” “FBAR Filter” “Tensile Properties Test
Method by Means of Bending” and “Wafer-to-wafer Bonding
Strength Test Method” proposed by Korea would be promoted
from the Committee Draft (CD) stage to the Committee Draft
for Vote (CDV) stage. The response to comments from theother countries regarding the “Fatigue Test Method Using
Resonant Vibration” that had been proposed by Japan andapproved as a New Work Item Proposal (NP) was accepted, anda CD will be prepared in accordance with this response. The“Micropillar Compression Test Method” and “Coefficient ofThermal Expansion Test Method” proposed by Korea did not
attract sufficient project participant countries and were notapproved as NPs. Although the proposals were rejected thistime, they will be resubmitted, and China is expected tobecome a project participant next time, resulting in projectapproval.

(3) Professor Ya-pu Zhao of the Chinese Academy of Sciencegave a presentation entitled “Electrowetting on a Lotus Leaf(EWOL).” Electrowetting is the process of changing theangle of contact by applying voltage. This process isexpected to find applications in fluid variable-focus lenses(Philips) and monitors (e-ink) (Liquavista).
(4) Yong-Hak Huh of the Korea Research Institute of Standards
and Science (KRISS) gave a presentation on a bulge test
method using application of hydraulic pressure,measurement of displacement using a laser interferometer(electronic speckle pattern interferometry or ESPI),
application of gas pressure, and detection of displacement
using capacitance. He also discussed parameters that will be
important for standardization.
(5) Dr. Hojun Ryu of the Electronics and Telecommunications
Research Institute (ETRI) gave a presentation on an
uncooled infrared sensor (bolometer) and said thatstandardization of this infrared sensor would also bepursued.

2. 5th Japan-Korea-China MEMS Standardization Workshop
The first half of this workshop was devoted to presentations
by representatives from Japan, Korea and China on the latest
news and roadmaps relating to MEMS standardization in eachcountry. The second half of the workshop was devoted to thefollowing MEMS research presentations.

At this workshop, China also announced that it had
established a domestic organization for MEMS standardization,and specifically that it will propose, as an NP, a draft standard
for defining and measuring geometrical shapes. There is great
anticipation with regard to the start of concrete action byChina. While the vibrant activity in MEMS standardization is awelcome development, duplication and competition haveoccurred in the draft standards proposed by the individual
countries, making cooperation and coordination by Japan,
Korea and China all the more essential.

(1) Professor Ohwada of Teikyo University gave a presentation on
an electronic compass that is currently under development.
This electronic compass is made up of biaxial and triaxial
magnetic sensors and an acceleration sensor that detects theinclination of the compass. The use of MEMS technology

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