MAPS development at IPHC for HEP
and X-ray applications
KEK, 30 Nov. 2017

Maciej Kachelmaciej.kachel@iphc.cnrs.fr➙ IPHC & PICSEL group➙ MAPS for high energy physics➙ MAPS for low energy X-ray applications➙ Summary and FutureInstitut Pluridisciplinaire Hubert Curien

IN2P3INC
INEEINSB• 300 employees(≳100 researchers)• Pluri-disciplinary: subatomic physics, chemistry, ethology

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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PICSEL group
 Complementary expertise• Physicists: 3 permanent,••••1 post-doc
Micro-electronics designers:
11 permanents, 3 PhD students
5 test engineers
Since 1999: 120 publications, 14
PhD defended~50 sensors designed (MIMOSAseries) Partners• Academics:
CERN, USA (Berkeley, Brookhaven), DESY (Hambourg), IHEP in China, …

• CMOS foundries:
AMS, TSMC, STM , Tower-Jazz, ESPROS, X-FAB, …
M.Kachel - MAPS development at IPHC for HEP and X-ray applications

3IPHC-PICSEL group: MAPS Detection of high energy particles with MAPS sensors• Pioneers in using Monolithic Active Pixel Sensors since 1998
collecting- Single particle detection ➙ position at µm level
diodeNMOS••••

Very low signal (≲200 e-)
Pixel noise ≃ 10 to 20 ePixel size 10 - 100 µm
Low occupancy ≃ 1%nn
P - WELL

N-WELLNMOSnn
P - WELL

epitaxial layer ~20 µm

P- substrate Readout in 2 ways:• Analog - external ADC• Digital – on-chip discrimination / ADC

 Detection surface:• Individual sensors: 1 to 4 cm2• Module with several sensors: .. tens of cm2• Full detector: few 100 cm2
M.Kachel - MAPS development at IPHC for HEP and X-ray applications

4IPHC-PICSEL strategy
EUDET 2006/2010
Beam Telescope

STAR 2014
EUDET (R&D for ILC, EU project)

Solenoid Tracker At RHIC

STAR (Heavy Ion physics)
CBM (Heavy Ion physics)
ILC (Particle physics)
HadronPhysics2 (generic R&D, EU project)
AIDA (generic R&D, EU project)
ILC >2025
Internatinal Linear Collider

FIRST (Hadron therapy)

ALICE 2019
A Large Ion Collider at LHC

ALICE/LHC (Heavy Ion physics)
EIC (Hadronic physics)
Belle II (Particle physics)
CLIC (Particle physics)

CBM 2018
Compressed Baryonic Matter…

 Spin-off: Interdisciplinary applications, biomedical, space …
M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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IPHC-PICSEL: STAR experiment
MIMOSA28(ULTIMATE)- ~ 1M pixels- Thinned to 50 µm- 10 chips per ladder- Power dissipation~350 mW /cm2

 400 MIMOSA-28 sensors
 360 106 pixels
 Air flow cooling Top ≲ 35∘C
 𝜎𝜎s.p. ≃ 4 µm
 mat. budget = 0.39 % X0 / layer
 Read-out time ~ 190 µs
Operated 2014-2016
M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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PLUME Pixel Ladder with Ultra low Material Embedding
Mimosa 26 sensors

•••••
•

Thickness 2 mm
8 Mpixels,
Readout time 115 µs,
Material budget 0.4 % of X0
Weight - 10 g
Power - 9 Watts (air cooled)

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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PLUME – BEAST @ KEK

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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SALAT - Single Arm Large Area Telescope
Motivation -> Big surface and thin reference planes

4.6 cm

4.2 cm4 x Chips thinned down to 50 μm glued on a 50 μm thick mylar layer• 3.6 M-pixels over 15.3 cm2• < 200 µs integration time
• Gap between the pixels ~ 100 µm
Build with AIDA european project
M.Kachel - MAPS development at IPHC for HEP and X-ray applications

9Molecular imaging
with 𝛃𝛃+ emitters in moving rats

 MAPSSIC project:

From previous project PIXSIC• Constraint on size and power dissipation• 16 x 128 pixels – pitch 30 x 50 µm• Pixel based on Alpide architecture (ALICE)• Power consumption ~ 160 µW• Expected flux - few counts / s – slow readout• IMNC, IPHC, CPPM, CERMEP, NeuroPSi
probe in the brain :- section ~500x500 µm2- sensitive volume (18 um) immune to 𝛾𝛾

Currently integrating prototype sensor …
M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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Current main project of PICSEL group
MIMOSIS - sensor for CBM experimentM.Kachel - MAPS development at IPHC for HEP and X-ray applications

MIMOSIS - sensor for CBM experiment
Current main project of PICSEL group

 MIMOSIS pixel details: schematic

VdiodeMemory 1

AMP
THRSensing
diode

MASKMemory 2
MEM_SEL

MEM_SEL

MEM_FLUSH

MEM_RST- Pixel design based on Alpide*- Modifications in sensing part and the memory part

PIXEL_OUT*D. Kim, et al. “Front end optimization for the monolithic active pixel sensor of the ALICE Inner Tracking System upgrade”
JINST, Volume 845, 11 February 2017, Pages 583-587

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Current main project of PICSEL group

 MIMOSIS pixel details: layout
Single pixel
diodeM.Kachel - MAPS development at IPHC for HEP and X-ray applications

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MIMOSIS - sensor for CBM experiment
Current main project of PICSEL group
But there is more than 1 pixel…

 Full sensor Overview•••••••

Matrix of pixels – 504 x 1024
Pixel pitch – 26.88 x 30.24 µm2
Configurable by I2C
Integration time 5 µs
Readout: 8 x e-link @ 320 Mbit/s
Small prototype producedFirst full scale submission- Q3 2018

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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Monolithic Active Pixel Sensors forlow energy X-ray applications

Motivation – MAPS for Imaging Devices
Monolithic Sensor(ex: MAPS)

CCD

Hybrid Pixel Sensor

Detector
Readout &Processing Cell

Small pixel pitch
Wide energy range
Low noise (cooling)
No single particleimage Limited counting rate


Sensitive Volume

Pixel detector

Single particle counting
Small pixel pitch
Low noise
Low cost Single particle counting
 High counting rate Noise impacted bydetector connection
 High cost
 Bonding detector

 Moderate counting rate

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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Depletion studies of MAPS
 Principle
Undepleted MAPS
NMOS
transistor
p+n+n+

pwellcollecting diode(~1 V)

PMOS
transistorn+p+nwellp+Fully depleted MAPS

p+NMOStransistor
p+p+
nwell

pwell

n+n+p+nwellp+p+p+
nwelldeep pwelldeep pwell
X-ray
photonn+collecting diode(~15 V)

PMOS
transistor

Depletion
RegionX-ray
photonp-- epitaxial layer

high res p-- substrateor epitaxial layer

p substrate••Charge collection by drift and diffusion
Diode at ~ 1.0 V••Charge collection by drift
Diode at higher voltage ~ 15-20 V

Motivation for having depleted sensors:• Larger depleted volume -> Increased signal• Drift -> Faster charge collection-> Larger pixels possible (small clusters)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications17

Depletion studies of MAPS
 Pipper sensor (FSI)
VdiodeCollectingdiode•••••bias

readColumn
OUTPUT

Prorotype - 32x128 pixels
Pixel size 22x22 µm2
Analog outputs
AC coupled collecting diodeProduced on two substrates:• Epitaxial layer 18µm
• High resistivity substrate

Laboratory measurements with 55Fe in function of diode bias (1-20V)

Epitaxial layer 18 um

Czochralski substrate

Energy resolution obtained ~ 300eV
M.Kachel - MAPS development at IPHC for HEP and X-ray applications18

Depletion studies of MAPS (II) Goal: « costless » BSI sensor
METAL layers + oxide ~10µm

METAL layers + oxide ~10µm

col. diodeDepleted zonecol. diode• Thinning 50 µm• Ion implant.
• Annealing[J. HEYMES]

p+ layer

Preliminary studies
on CZ wafer with 55Fe

Post processing done in Jan 2017

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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Counting low energy X-rays - Mimosa 22SX
Requirements:• X-Ray Energy Range [few 100 eV – 5 keV] with 100% QE• Counting Dynamic [1-107] ph/pix/s• High occupancy• High Spatial Resolution (pixel pitch ~ 20 µm)••••

Strategy for counting:
Small pixels – amplification only
Rolling shutter readout
Column Discriminator
Serialization and readout

Counting outside of the pixels

Mimosa 22SXFirst prototype specs
 Tower Jazz 180 nm CIS
 128 x 256 pixels with 22µm pixel pitch Collecting diode AC coupled to theamplifier Discriminator with 2 thresholds -> energywindow Binary outputs

Vdiode 16 mm² of active area
RfVclamppower

Cc

Collecting
diodeM.Kachel - MAPS development at IPHC for HEP and X-ray applications_powerColumnOUTPUT20Mimosa 22SX – energy window NIR laser emulates a space-correlated continuous energyspectrum• Short laser pulses (100ns) sent at the beginning of every recordedframe• Unfocused laser spot –> center ~6000 eV, outer ring ~ 500 eV
Reconstructed laser spot profile

NIR laser

Equivalent Stable number of pulses detected throughout range of thresholds=> suggest constant detection efficiency from 800 to 6000 eV
M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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M22SX – results with X-rays
1. Front Side Illumination vs Back Side Illumination:• Higher diode voltage => deeper depletion• Higher number of counts BSI => full depletion of 40µm probable• Quantitative interpretation needs to account for charge sharing⇒Need low X-ray energy tests to verify that full depletionis achieved and entrance window is operational

2. X-ray Image (single photon counting)

Image obtained with Mimosa 22SX•
Obtained with 55Fe – very low flux•
Thickness of the aluminum strips calculated=> 15 µm for the thin (150µm), and ≥ 50µm for the thick strips
M.Kachel - MAPS development at IPHC for HEP and X-ray applications

Piece of a flex PCB - aluminum strips

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M22SX results – Soleil – 1.5keV
 Post process M22SX
 Vdiode = 40V
 We can see 1.5 keVphotons!

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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A spin-off application for M22SX
 Dose Monitoring at CYRCé Cyclotron at IPHC:• 24 MeV protons• Milimeter beam size
Motivation:
Monitor dose for small beam size (problematic with current detector)
First tests with Mimosa 22SX
• Linear behaviour in the measured fluence range• At least 1000 protons/pix/s possible

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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Depleted MAPS – good for HEP!
 Tests performed with irradiated Pipper2 chipat the University of Frankfurt
5x1014 neq/cm²
T=-60°C

1013 neq/cm²
T=-60°C

20V

10V 20V
1V

10V

3V
3V
1V

 1013 neq/cm2 performance restored after cooling 1015 neq/cm2 degraded, but we still see the energy peak
M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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Summary – future Plans
PICSEL group capabilities:• Design of sensors for HEP experiments / low X-ray applications• Readout systems• Sensor integration into modules / detectors

Future plans :• Sensor following MIMOSIS architecture (towards ILC)
- Integration time < 1µs- Power pulsing- …
• Large(r) scale depleted imager with analog readout- Active area ~1cm2- Applications : X-ray spectroscopy, Hadron therapy, …
- SOI technology would be an ideal candidate (depletion wise..)M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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Thank you for your attention

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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Short-term fellowship at KEK

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Plan for theShort-term fellowship at KEK Hands-on the SOI technology
Desing of the analog part of MIMOSIS pixel used
for CBM experiment• Schematic + layout + simulations• How much we benefit from the SOI vs TJ 0.18µm :- Pixel size- Power- Speed Future collaboration

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

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