, 32, 1 (2008) 7 12J. Inst. Electrostat. Jpn.

⺰ᢥࡈࠜ࠻ࡦࠗࠝ࠽ࠗࠩߩ㒰㔚ㅦᐲߦ෸߷ߔࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩലᨐศ ㊁ 㦖 ᄥ㧖, ጟ ㊁ ৻ 㓶㧖,1㧔2007 ᐕ 10 ᦬ 17 ᣣฃઃ㧧2007 ᐕ 11 ᦬ 29 ᣣฃℂ㧕

Effect of Grounded Grid on Neutralization Speed of Photon Air Ionizer
Ryuta YOSHINO* and Kazuo OKANO*, 1(Received October 17, 2007㧧Accepted November 29, 2007)

Soft X-ray air ionizers are widely used for static control in the manufacture of electronic devices such as LCD and LSI
because of the contamination free. Higher neutralizing rate has been required for the air ionizers for increasing theproductivity rate of the electronic devices. The grounded grid located between the soft X-ray ionizer and the charged
product was proposed in order to increase the neutralization efficiency. It was found that the grounded grid play animportant role to increase the static neutralizing speed. The relationship between the concentration distribution of thecharged particles and the neutralizing speed were calculated by computer simulation to estimate the optimum
operating conditions.
1.

ߪߓ߼ߦᧄ⎇ⓥߢߪ㧘ߎߩࠣ࡜ࡦ࠼ࠣ࡝࠶࠼߇㒰㔚ㅦᐲߦ෸߷ߔല

LCD (Liquid Crystal Display) ߩ⵾ㅧᎿ⒟ߦ߅޿ߡࠟ࡜ࠬၮᨐࠍᬌ⸛ߒߚ㧚ࠗࠝ࠽ࠗࠩߩേ૞᧦ઙߣߒߡࠣ࡜ࡦ࠼ࠣ࡝࠶᧼ߦ㕒㔚᳇߇⊒↢ߔࠆߣ㧘ၮ᧼ߦࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦ߇ઃ⌕࠼ߣၮ᧼ߩ㑆ߩ〒㔌߅ࠃ߮ၮ᧼ߩ㔚࿶ࠍㆬ߮㧘㒰㔚ㅦᐲߩᜰߒ㧘LCD ߩ⵾ㅧᱠ⇐߇ૐਅߔࠆߎߣ߇޽ࠆ㧚ߎߩ໧㗴ࠍ⸃ᮡߣߒߡ㒰㔚㔚ᵹኒᐲࠍㆬ߮㧘ߎࠇࠄߩ㑐ଥࠍታ㛎ߣࠪࡒࡘ᳿ߔࠆߚ߼ߦ㧘ࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦࡈ࡝࡯ߩエ X ✢ᑼࠗࠝ࡟࡯࡚ࠪࡦߩਔ㕙߆ࠄᬌ⸛ߒߚ㧚1)࠽ࠗࠩ߇ᵈ⋡ߐࠇߡ޿ࠆ 㧚ߎߩࠗࠝ࠽ࠗࠩߢᏪ㔚ߒߚࠟ࡜ࠬၮ᧼ࠍ㒰㔚ߔࠆ㓙㧘ࠗࠝ࠽ࠗࠩ߇↢ᚑߒߚ⩄㔚☸ሶߩౝ㧘

2.

㒰㔚ߦᔅⷐߥᭂᕈߩ⩄㔚☸ሶߪၮ᧼ߩ㔚⇇ߦࠃߞߡๆᒁߐ

2.1ࠇ㧘ၮ᧼ࠍ㔚᳇⊛ߦਛ๺ߔࠆ㧚৻ᣇ㧘㒰㔚ߦਇⷐߥᭂᕈߩ⩄࿑ 1 ߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼߇㒰㔚ㅦᐲߦ෸߷ߔലᨐࠍታ㛎㔚☸ሶߪ㧘㔚⇇ߦࠃߞߡၮ᧼߆ࠄ㆙ߑ߆ࠆᣇะߦ⒖േߔࠆ㧚⊛ߦᬌ⸛ߔࠆߚ߼ߩⵝ⟎ߢ޽ࠆ㧚ᧄታ㛎ߢߪ㧘ၮ᧼ߪ LCD

ߎߩ⒖േㅦᐲߪ㧘ၮ᧼ㄭறߩ㔚⇇ᒝᐲࠍ㜞߼ࠆߎߣߦࠃߞߡ↪ࠟ࡜ࠬၮ᧼ࠍᗐቯߒߡ޿ࠆ㧚৻⥸ߦ㧘ߎߩࠃ߁ߥၮ᧼⁁ߩ㜞ߊߥࠆ㧚⩄㔚☸ሶߩ⒖േㅦᐲ߇㜞ߊߥࠆߣ㧘⩄㔚☸ሶߩ㘧Ꮺ㔚‛ߩਛᄩㇱߣ๟ㄝㇱߢߪ㔚⇇ᒝᐲߪ⇣ߥࠆ㧚߹ߚ㧘⛘✼ⴕᤨ㑆߇⍴ߊߥࠅ㧘ౣ⚿วߢᶖṌߔࠆ⩄㔚☸ሶᢙ߇ᷫዋߔࠆ㧚૕ၮ᧼ࠍ㒰㔚ߔࠆ႐วߦߪ㧘ၮ᧼ߩਛᄩㇱߣ๟ㄝߩ㔚૏߇৻ߎߩ⚿ᨐ㧘ၮ᧼ࠍ㒰㔚ߔࠆߚ߼ߩ㒰㔚㔚ᵹ߇㜞ߊߥࠆߣ⠨߃⥌ߒߡ޿ߥ޿ߎߣ߇޽ࠆߚ߼㧘ၮ᧼⴫㕙ㄭறߩ㔚⇇ᒝᐲ߇ਇࠄࠇࠆ㧚ဋ৻ߦߥࠆߎߣ߇⠨߃ࠄࠇࠆ㧚ߘߎߢ㧘ၮ᧼ࠍਛᄩㇱߣ๟ㄝߘߎߢ㧘ၮ᧼ㄭறߦࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳ߌ㧘㔚⇇ᒝᐲࠍ㜞߼㧘㒰㔚ㅦᐲࠍ㜞ߊߔࠆᣇᴺࠍឭ᩺ߒߡ޿ࠆ㧚ࠠ࡯ࡢ࡯࠼㧦LCD㧘ࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦ㧘エ X ✢㧘ࠗࠝ࠽ࠗࠩ㧘㒰㔚ㅦᐲ* ⡯ᬺ⢻ജ㐿⊒✚วᄢቇᩞ㔚᳇ࠪࠬ࠹ࡓᎿቇ⑼㧔229-1196
␹ᄹᎹ⋵⋧ᮨේᏒᯅᧄบ 4-1-1㧕
Department of Electrical Engineering, The University ofIndustrial Technology, 4-1-1 Hashimotodai, Sagamihara,Kanagawa 229-1196, Japan1
okano@uitec.ac.jpࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩലᨐߦ㑐ߔࠆታ㛎⊛ᬌ⸛᷹ቯᣇᴺㇱߦಽ㔌ߒ㧘ਛᄩㇱߩ㒰㔚ㅦᐲࠍ᷹ቯߔࠆߎߣߦߒߚ㧚ᧄ⎇ⓥߢߪ㧘ၮ᧼ߩਛᄩㇱߛߌߩ㒰㔚ㅦᐲࠍᬌ⸛ߔࠆߩߢ㧘㒰㔚ㅦᐲߩᜰᮡߣߒߡ㒰㔚㔚ᵹኒᐲࠍ᷹ቯߔࠆߎߣߦߒߚ㧚ၮ᧼ߦ⋧ᒰߔࠆၮ᧼ߩਛᄩㇱߪ㧘๟ㄝㇱߣ㔚᳇⊛ߦ⛘✼ߒ㧘⋥ᓘ Ǿ ߇ 35.7 mm (㕙Ⓧ S ߇ 1000 mm2) ߩࠬ࠹ࡦ࡟ࠬࠬ࠴࡯࡞᧼ߢ᭴ᚑߒߚ㧚ߎߩਛᄩㇱࠍหゲࠤ࡯ࡉ࡞ߢ CPM(Charge Plate Monitor) (ࡅࡘ࡯ࠣ࡞ࠛ࡟ࠢ࠻ࡠ࠾ࠢࠬᩣᑼળ␠ MODEL 700A) ߩ㊄ዻࡊ࡟࡯࠻ߦធ⛯ߒߚ㧚ᧄታ㛎ߢߪ㧘ߎߩㇱಽࠍࡊࡠ࡯ࡉߣ๭߮㧘ߎߩࡊࡠ࡯ࡉࠍ૶↪ߒߡၮ᧼

83212008㪈㪌㪇㪇㪪㫆㪽㫋 㪯㪄㫉㪸㫐 㫀㫆㫅㫀㫑㪼㫉㪠㫉㫉㪸㪻㫀㪸㫋㪼㪻 㫉㪼㪾㫀㫆㫅㪞㫉㫆㫌㫅㪻㪼㪻 㪾㫉㫀㪻㪭㪚㪧 㪔㪄㪊㪇㪇㪇 㪭 䌾 㪂㪊㪇㪇㪇 㪭㪌㪇㪇 㫄㫄㪊㪇㪇 㫄㫄㪛㪞㪧 㪔 㪌㪇 䌾 㪉㪌㪇 㫄㫄㪚㪿㪸㫉㪾㪼㪻 㫇㫉㫆㪻㫌㪺㫋 㪑㪍㪇㪇 㬍 㪍㪇㪇 㫄㫄㪉㪚㪧㪤㪧㫉㫆㪹㪼 㫍㫆㫃㫋㪸㪾㪼 㪭㪧 㪲㪭㪴㪪㪿㫀㪼㫃㪻㪛㪚㪟㫀㪾㪿 㫍㫆㫃㫋㪸㪾㪼㫇㫆㫎㪼㫉 㫊㫌㫇㫇㫃㫐㪭㪚㪧 㪔 㪂㪈㪇㪇㪇 㪭㪈㪇㪇㪇㪈㪇 㫄㫄㪎㪇㪇 㫄㫄㪌㪇㪇㪡㪥䋭㪚㪪 w 㪭㪧䋫u㪪w㫋㪡㪥 㪚㪪 w 㪭 㪧 㪄u㪪w㫋㪇㪄㪌㪇㪇㪄㪈㪇㪇㪇㪭㪚㪧 㪔 㪄㪈㪇㪇㪇 㪭㪄㪈㪌㪇㪇㪎㪇㪇 㫄㫄㪇㪈㪇㪧㫉㫆㪹㪼㪚㪧 㪔 㪈㪇㪇 㫇㪝㪃 㪪 㪔 㪈㪇㪇㪇 㫄㫄㪉㪉㪇㪊㪇㪋㪇㪫㫀㫄㪼 㫋 㪲㫊㪴࿑㧝 㒰㔚㔚ᵹኒᐲߩ᷹ቯⵝ⟎Fig.1 Setup for measuring neutralizing current density JN.

࿑㧞 ᤨ㑆ߣࡊࡠ࡯ࡉ㔚࿶ߣߩ㑐ଥ
Fig.2 Probe voltage VP as a function of time t.

ਛᄩㇱߩ㒰㔚ㅦᐲࠍ᷹ቯߒߚ㧚ߥ߅㧘ࡊࡠ࡯ࡉߩ㕒㔚ኈ㊂ߪߒߥ޿႐วߩ㒰㔚㔚ᵹኒᐲ߽᷹ቯߒߚ㧚㪌㪇㪍㪇

100 pF ߢ޽ࠆ㧚৻ᣇ㧘๟ㄝㇱߪ⋥ᓘ 1.2 mm ߩࠬ࠹ࡦ࡟ࠬߎߩ㒰㔚㔚ᵹኒᐲ JN ߪએਅߩᚻ㗅ߢ᷹ቯߒߚ㧚߹ߕ㧘㜞ࠬ࠴࡯࡞✢ࠍ 13 mm 㑆㓒ߩᩰሶ⁁ߦ㈩⟎ߒ㧘৻ㄝ߇ 600㔚࿶⊒↢ⵝ⟎ߢၮ᧼ߦ VCP [V] ࠍශടߒߚ㧚ᰴߦ㧘ࡊࡠ࡯ࡉmm ߩᱜᣇᒻߩࠣ࡝࠶࠼ߢ᭴ᚑߒߚ㧚ࠍ |VCP| ࠃࠅ 100 V ᄢ߈޿㔚࿶ߢల㔚ߒߚ㧚ߎࠇߪ㧘᷹ቯࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߪၮ᧼ߩ๟ㄝㇱߣหߓ᧚⾰㧘᭴ㅧߩࠣ࡝㐿ᆎᤨߩ࠺࡯࠲ߦ฽߹ࠇࠆਇ቟ቯߥ࠺࡯࠲ࠍ㒰෰ߔࠆߚ߼࠶࠼ߢ᭴ᚑߒ㧘ኸᴺߪ৻ㄝ߇ 700 mm ߩᱜᣇᒻߣߒߚ㧚߹ߢ޽ࠆ㧚ߘߩᓟ㧘ࠗࠝ࠽ࠗࠩߦࠃߞߡࡊࡠ࡯ࡉ߇㒰㔚ߐࠇࠆߚ㧘エ X ✢ᑼࠗࠝ࠽ࠗࠩ↪㜞࿶ࠤ࡯ࡉ࡞╬߆ࠄ⊒↢ߔࠆᄖߣ߈ߩ VP ߣᤨ㑆 t ߣߩ㑐ଥࠍ᷹ቯߒߚ㧚ߎߩ᷹ቯ⚿ᨐߦ߅ㇱ㔚⇇߇᷹ቯߦ෸߷ߔᓇ㗀ࠍ㒰෰ߔࠆߚ߼ߦ㧘エ X ✢ᑼࠗ޿ߡ㧘VP ߇ VCP ߦ৻⥌ߒߚߣ߈ߩ௑߈ (УVP / Уt) ߆ࠄ㒰ࠝ࠽ࠗࠩߩᾖ኿ญߣห৻ᐔ㕙਄ߦធ࿾ߒߚࠣ࡝࠶࠼ࠍ⸳ߌ㔚㔚ᵹኒᐲࠍ᳞߼ߚ㧚ߔߥࠊߜ㧘㒰㔚㔚ᵹኒᐲߪ㧘ߚ㧚ߥ߅㧘ߎߩࠣ࡝࠶࠼ߩ᧚⾰㧘ኸᴺ╬ߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣห᭽ߢ޽ࠆ㧚

J N

C P w VP u
Swt

(1)

J N-

C P w VP u
Swt

(2)

ߎߩⵝ⟎ࠍ૶↪ߒߡਛᄩㇱߩ㒰㔚㔚ᵹኒᐲࠍ᷹ቯߒ㧘㒰㔚ㅦᐲߦ෸߷ߔࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩലᨐࠍᬌ⸛ߒߚ㧚ߎߩⵝ⟎ߪエ X ✢ᑼࠗࠝ࠽ࠗࠩ㧘ၮ᧼㧘㜞㔚࿶⊒↢ⵝ⟎㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼㧘ធ࿾ߒߚࠣ࡝࠶࠼㧘エ X ✢ࠍㆤ⭁ߔࠆࠪ࡯࡞࠼ߢ᭴ᚑߐࠇߡ޿ࠆ㧚ࠗࠝ࠽ࠗࠩߣߒߡエ X ✢⊒↢ⵝ⟎ (ᵿߣቯ⟵ߒߚ㧚ߎߎߢ㧘CP ߪࡊࡠ࡯ࡉߩ㕒㔚ኈ㊂㧘S ߪࡊࡠ᧻ࡎ࠻࠾ࠢࠬᩣᑼળ␠ L6941) ࠍ૶↪ߒ㧘ߎߩࠗࠝ࠽ࠗࠩࠍ࡯ࡉߩ㕙Ⓧߢ޽ࠆ㧚߹ߚ㧘JN+ ߪᱜߩ⩄㔚☸ሶߦၮߠߊ㒰㔚ࠪ࡯࡞࠼ౝߩ਄ㇱߦ⸳⟎ߒߚ㧚߹ߚ㧘㜞㔚࿶⊒↢ⵝ⟎ߦធ⛯㔚ᵹኒᐲߢ޽ࠆ㧚ห᭽ߦ㧘JN- ߪ⽶ߩ⩄㔚☸ሶߦၮߠߊ㒰㔚ߒߚၮ᧼ࠍエ X ✢ᑼࠗࠝ࠽ࠗࠩߩਅᣇ 300 mm ߩ૏⟎ߦ㔚ᵹኒᐲߢ޽ࠆ㧚࿑ 2 ߪߎߩ᷹ቯ⚿ᨐߩ৻଀ߢ޽ࠆ㧚ߎߩ⸳⟎ߒߚ㧚㜞㔚࿶⊒↢ⵝ⟎ߪ⋥ᵹ቟ቯൻ㔚Ḯ (⩵᳓㔚ሶᎿᬺ᷹ቯ⚿ᨐߪ VCP ߇ -1000 V ߹ߚߪ +1000 V ߩ႐วߢ޽ࠆ㧚ᩣᑼળ␠ MODEL 7326) ߣࠕࡦࡊ࡝ࡈࠔࠗࠕ (࠻࡟࠶ࠢ࡮ࠫߎߩ㓙㧘ၮ᧼ߩ㔚࿶ VCP ߇ -1000 V ߩ႐วߪ VP ߇ -1000ࡖࡄࡦᩣᑼળ␠ MODEL 10/10B) ߢ᭴ᚑߒ㧘⋥ᵹ቟ቯൻ㔚ḮV ߩߣ߈ߩ௑߈߆ࠄ JN+ ࠍ▚಴ߒ㧘VCP ߇ +1000 V ߩ႐วߩ಴ജࠍࠕࡦࡊ࡝ࡈࠔࠗࠕߦ౉ജߒ㧘ࠕࡦࡊ࡝ࡈࠔࠗࠕߦࠃ

ߪ VP ߇ +1000 V ߩߣ߈ߩ௑߈߆ࠄ JN- ࠍ▚಴ߒߚ㧚ห᭽ߞߡ㜞㔚࿶ࠍ಴ജߐߖࠆ᭴ㅧߣߒߚ㧚ߎߩ㜞㔚࿶⊒↢ⵝ⟎ࠍߥᚻ㗅ߢߘࠇߙࠇߩ VCP ߦኻߒߡ㧘㒰㔚㔚ᵹኒᐲࠍ᳞߼ߚ㧚૶↪ߒ㧘ၮ᧼ߦ -3000V 㨪 +3000 V ߩ▸࿐ߩ⋥ᵹ㔚࿶ VCPߎߩ㒰㔚㔚ᵹኒᐲ߇㜞޿߶ߤ㒰㔚ㅦᐲߪ㜞޿ߎߣࠍ⴫ߒߡࠍශടߒߡల㔚ߒߚ㧚ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߪエ X ✢ᑼࠗࠝ࠽޿ࠆ㧚ࠗࠩߣၮ᧼ߩ㑆ߦ⸳⟎ߒ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌 DGP ࠍ 50 mm 㨪 250 mm ߩ▸࿐ߣߒߡ㧘ၮ᧼ਛᄩㇱߩ2.2㒰㔚㔚ᵹኒᐲࠍ᷹ቯߒߚ㧚߹ߚ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼߇㒰㔚ㅦၮ᧼ߩߘࠇߙࠇߩ㔚࿶ߦኻߒߡ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ᐲߦ෸߷ߔലᨐࠍᬌ⸛ߔࠆߚ߼ߦ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳⟎ߩ㑆ߩ〒㔌ࠍᄌൻߐߖߚ㓙ߩ㒰㔚㔚ᵹኒᐲ㧘߅ࠃ߮ࠣ࡜ࡦ࠼᷹ቯ⚿ᨐLCDࠣ࡝࠶࠼ࠍ⸳⟎ߒߥ޿႐วߩ㒰㔚㔚ᵹኒᐲࠍ᷹ቯߒߚ㧚9ߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚ᰴߦ㧘|VCP| ߇ 2000 V ߩ႐วߪ㧘ࠣ࿑ 3㧘࿑ 4 ߪၮ᧼ߩ㔚࿶ VCP ࠍࡄ࡜ࡔ࡯࠲ߣߒ㧘ࠣ࡜ࡦ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳⟎ߔࠆߎߣߦࠃߞߡ㒰㔚㔚ᵹኒᐲߪ㜞࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌 DGP ࠍᄌൻߐߖߚ㓙ߩ㒰㔚㔚ߊߥࠅ㧘DGP ߇ 150 mm ઃㄭߩߣ߈ߦ JN ߪᦨᄢ୯ࠍ␜ߔߎ

ᵹኒᐲ JN ߩ᷹ቯ⚿ᨐߢ޽ࠆ㧚࿑ 3 ߪ VCP ߇⽶ߩ႐วߩ⚿ߣ߇᣿ࠄ߆ߦߥߞߚ㧚ߒ߆ߒ㧘|VCP| ߇ 3000 V ߩ႐วߪ㧘ᨐߢ޽ࠅ㧘࿑ 4 ߪ VCP ߇ᱜߩ႐วߩ⚿ᨐߢ޽ࠆ㧚ߎࠇࠄߩ

DGP ߦ㑐ଥߥߊ JN ߪ JN0 ࠃࠅ߽ૐߊߥߞߡ޿ࠆߎߣ߇᣿ࠄ

࿑ߦ߅޿ߡ㧘JN0 ߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳⟎ߒߥ޿႐วߩ㒰߆ߦߥߞߚ㧚࿑ 5㧘࿑ 6 ߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩലᨐࠍᬌ⸛ߔࠆߚ߼ߦߥߞߚ㧚߹ߕ㧘ߔߴߡߩ VCP ߦኻߒߡ㧘JN ߪ DGP ߦଐሽߒ|JN| ࠍ |JN0| ߢⷙᩰൻߒߚ⚿ᨐߢ޽ࠆ㧚࿑ 5 ߪ VCP ߇⽶ߩ႐ߡ޿ࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚|VCP| ߇ 1000 V ߩ႐วߪ㧘วߩ⚿ᨐߢ޽ࠅ㧘࿑ 6 ߪ VCP ߇ᱜߩ႐วߩ⚿ᨐߢ޽ࠆ㧚ߎࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳⟎ߔࠆߎߣߦࠃߞߡ㒰㔚㔚ᵹኒᐲߪࠇࠄߩ࿑ߦ߅޿ߡ㧘|JN/JN0| > 1.0 ߩ㗔ၞߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼

㜞ߊߥࠅ㧘DGP ߇ 100 mm ઃㄭߩߣ߈ߦ JN ߪᦨᄢ୯ࠍ␜ߔࠍ⸳⟎ߔࠆߎߣߦࠃߞߡ㒰㔚㔚ᵹኒᐲ߇㜞ߊߥߞߚߎߣࠍ㫓㪡㪥㪇㪂㫓㪉㪇㪭㪚㪧 㪔 㪄㪊㪇㪇㪇 㪭㪈㪌㪈㪇㪭㪚㪧 㪔 㪄㪉㪇㪇㪇 㪭㪌㪭㪚㪧 㪔 㪄㪈㪇㪇㪇 㪭㪇㪇㪌㪇㪈㪇㪇 㪈㪌㪇 㪉㪇㪇 㪉㪌㪇 㪊㪇㪇㪛㫀㫊㫋㪸㫅㪺㪼 㪹㪼㫋㫎㪼㪼㫅 㪾㫉㫆㫌㫅㪻㪼㪻 㪾㫉㫀㪻㪸㫅㪻 㪺㪿㪸㫉㪾㪼㪻 㫇㫉㫆㪻㫌㪺㫋 㪛㪞㪧 㪲㫄㫄㪴࿑㧟 ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌ߣ㒰㔚㔚ᵹኒᐲߣߩ㑐ଥ
Fig.3 Neutralizing current density |JN+| versus distance between
grounded grid and charged product DGP at various voltage ofcharged product VCP.

㪥㪼㫌㫋㫉㪸㫃㫀㫑㫀㫅㪾 㪺㫌㫉㫉㪼㫅㫋 㪻㪼㫅㫊㫀㫋㫐㪉㫓㪡㪥㪄㫓 㪲㱘㪘㪆㫄 㪴㪉㪌㫓㪡㪥㪇㪄㫓㪉㪇㪭㪚㪧 㪔 㪂㪊㪇㪇㪇 㪭㪈㪌㪈㪇㪭㪚㪧 㪔 㪂㪉㪇㪇㪇 㪭㪌㪭㪚㪧 㪔 㪂㪈㪇㪇㪇 㪭㪇㪇㪌㪇㪈㪇㪇 㪈㪌㪇 㪉㪇㪇 㪉㪌㪇 㪊㪇㪇㪛㫀㫊㫋㪸㫅㪺㪼 㪹㪼㫋㫎㪼㪼㫅 㪾㫉㫆㫌㫅㪻㪼㪻 㪾㫉㫀㪻㪸㫅㪻 㪺㪿㪸㫉㪾㪼㪻 㫇㫉㫆㪻㫌㪺㫋 㪛㪞㪧 㪲㫄㫄㪴࿑㧠 ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌ߣ㒰㔚㔚ᵹኒᐲߣߩ㑐ଥ
Fig.4 Neutralizing current density |JN-| versus distance between
grounded grid and charged product DGP at various voltage ofcharged product VCP㪉㪅㪉㪇㪈㪅㪌

㪈㪈㪅㪇㪑 㪭㪚㪧 㪔 㪄㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪈㪇㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪈㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪉㪇㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪉㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪊㪇㪇㪇 㪭㪇㪅㪌㪇㪇㪌㪇㪈㪇㪇㪈㪌㪇㪉㪇㪇㪉㪌㪇㪛㫀㫊㫋㪸㫅㪺㪼 㪹㪼㫋㫎㪼㪼㫅 㪾㫉㫆㫌㫅㪻㪼㪻 㪾㫉㫀㪻㪸㫅㪻 㪺㪿㪸㫉㪾㪼㪻 㫇㫉㫆㪻㫌㪺㫋 㪛㪞㪧 㪲㫄㫄㪴㪊㪇㪇࿑㧡 ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌ߣⷙᩰൻߒߚ㒰㔚㔚ᵹኒᐲߣߩ㑐ଥ
Fig.5 Normalized neutralizing current density |JN+/ JN0+| versus
distance between grounded grid and charged product DGP at various
voltage of charged product VCP.

㪥㫆㫉㫄㪸㫃㫀㫑㪼㪻 㫅㪼㫌㫋㫉㪸㫃㫀㫑㫀㫅㪾 㪺㫌㫉㫉㪼㫅㫋 㪻㪼㫅㫊㫀㫋㫐㫓 㪡㪥㪄 㪆 㪡㪥㪇㪄 㫓㪥㪼㫌㫋㫉㪸㫃㫀㫑㫀㫅㪾 㪺㫌㫉㫉㪼㫅㫋 㪻㪼㫅㫊㫀㫋㫐㪉㫓㪡㪥㪂㫓 㪲㱘㪘㪆㫄 㪴㪉㪌㪥㫆㫉㫄㪸㫃㫀㫑㪼㪻 㪻㪼㫅㫊㫀㫋㫐 㫆㪽 㫅㪼㫌㫋㫉㪸㫃㫀㫑㫀㫅㪾 㪺㫌㫉㫉㪼㫅㫋㫓 㪡㪥㪂 㪆 㪡㪥㪇㪂 㫓㔚㔚ᵹኒᐲߢ޽ࠆ㧚ߎࠇࠄߩ⚿ᨐ߆ࠄએਅߩߎߣ߇᣿ࠄ߆ߦ㪉㪉㪅㪇㪈㪅㪌㪈㪈㪅㪇㪑 㪭㪚㪧 㪔 㪂㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪈㪇㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪈㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪉㪇㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪉㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪊㪇㪇㪇 㪭㪇㪅㪌㪇㪇㪌㪇㪈㪇㪇㪈㪌㪇㪉㪇㪇㪉㪌㪇㪛㫀㫊㫋㪸㫅㪺㪼 㪹㪼㫋㫎㪼㪼㫅 㪾㫉㫆㫌㫅㪻㪼㪻 㪾㫉㫀㪻㪸㫅㪻 㪺㪿㪸㫉㪾㪼㪻 㫇㫉㫆㪻㫌㪺㫋 㪛㪞㪧 㪲㫄㫄㪴㪊㪇㪇࿑㧢 ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌ߣⷙᩰൻߒߚ㒰㔚㔚ᵹኒᐲߣߩ㑐ଥ
Fig.6 Normalized neutralizing current density |JN-/ JN0-| versus
distance between grounded grid and charged product DGP at various
voltage of charged product VCP

103212008

ᗧ๧ߒߡ޿ࠆ㧚ߎࠇࠄߩ⚿ᨐ߆ࠄ㧘એਅߩߎߣ߇᣿ࠄ߆ߦߥߎߩࠃ߁ߦ㒰㔚㔚ᵹኒᐲࠍૐਅߐߖࠆലᨐߣ਄᣹ߐߖࠆല

ߞߚ㧚߹ߕ㧘|VCP| ߇ૐߊߥࠆ߶ߤ㧘|JN/JN0| ߩᦨᄢ୯ߪᄢ߈ᨐ߇㊀ߥߞߚߚ߼ߣ⠨߃ࠄࠇࠆ㧚ߊߥߞߡ޿ࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚ᰴߦ㧘|VCP| ߇ૐߊߥࠆᰴߦ㧘㒰㔚㔚ᵹኒᐲߪၮ᧼ߩ㔚࿶ߦଐሽߔࠆℂ↱ߦߟ޿ߡ߶ߤ㧘|JN/JN0| ࠍᦨᄢߦߔࠆᦨㆡߥ DGP ߪ⍴ߊߥࠆߎߣ߇᣿

⠨ኤߔࠆ㧚VCP ߇ૐߊߥࠆ߶ߤ㧘Ee ߇ᒙߊߥࠅ㧘⩄㔚☸ሶߩࠄ߆ߦߥߞߚ㧚⒖േㅦᐲ߇ᷫዋߔࠆ㧚⒖േㅦᐲ߇ᷫዋߔࠆߣ㘧ⴕᤨ㑆߇㐳ߊߥࠅౣ⚿วߢᶖṌߔࠆ⩄㔚☸ሶᢙ߇Ⴧടߔࠆ㧚ߒߚ߇ߞߡ㧘2.3⠨ኤ

VCP ߇ૐߊߥࠆ߶ߤ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳⟎ߔࠆߎߣߦࠃએ਄ߩ⚿ᨐ߆ࠄ㧘㒰㔚㔚ᵹኒᐲߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮߞߡ㒰㔚㔚ᵹኒᐲ߇਄᣹ߔࠆലᨐߪᄢ߈ߊߥࠅ㧘㒰㔚㔚ᵹኒ᧼ߩ㑆ߩ〒㔌߅ࠃ߮ၮ᧼ߩ㔚࿶ߦଐሽߔࠆߎߣ߇᣿ࠄ߆ᐲ߇ᦨᄢߦߥࠆࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩᦨㆡ〒㔌ߪߦߥߞߚ㧚ߘߎߢ㧘ߎߩࠃ߁ߥ⚿ᨐ߇ᓧࠄࠇߚℂ↱ߦߟ޿⍴ߊߥߞߚߣ⠨߃ࠄࠇࠆ㧚ߡ⠨ኤߔࠆ㧚࿑ 7 ߪၮ᧼߇ᱜߦᏪ㔚ߒߡ޿ࠆ႐วߩエ X ᾖ኿㗔ၞౝߩ⩄㔚☸ሶỚᐲߩಽᏓ⁁ᘒ߅ࠃ߮ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼3.

ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩലᨐߦ㑐ߔࠆࠪࡒࡘ࡟࡯࡚ࠪࡦߦࠃࠆᬌ⸛ߩ㑆ߩ㔚⇇ࠍࡕ࠺࡞ൻߒߚ࿑ߢ޽ࠆ㧚ߎߩ࿑ߦ߅޿ߡ㧘n+ ߪ

3.1ᱜߩ⩄㔚☸ሶỚᐲ㧘n- ߪ⽶ߩ⩄㔚☸ሶỚᐲ㧘r ߪエ X ✢ᑼ᷹ቯ⚿ᨐ߆ࠄ㒰㔚㔚ᵹኒᐲߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩࠗࠝ࠽ࠗࠩߩᾖ኿ญ߆ࠄߩ〒㔌ߢ޽ࠆ㧚ߎߩ࿑ߦ␜ߔࠃ߁ߦ㧘㑆ߩ〒㔌߅ࠃ߮ၮ᧼ߩ㔚࿶ߦଐሽߔࠆߎߣ߇᣿ࠄ߆ߦߥߞၮ᧼߇⊒↢ߔࠆ㔚⇇ߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߛߌߦߚ㧚߹ߚ㧘㒰㔚㔚ᵹኒᐲ߇ᦨᄢߣߥࠆᦨㆡ〒㔌߇޽ࠆߎߣ߇ሽ࿷ߔࠆ㧚ߒߚ߇ߞߡ㧘㒰㔚㔚ᵹኒᐲߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣ᣿ࠄ߆ߦߥߞߚ㧚ߐࠄߦ㧘ߎߩᦨㆡ〒㔌ߪၮ᧼ߩ㔚࿶ߦࠃߞၮ᧼ߩ㑆ߦሽ࿷ߔࠆ⩄㔚☸ሶߩ᜼േߦᄢ߈ߊଐሽߔࠆߎߣߡᄌൻߔࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚ߎߩࠃ߁ߦ㒰㔚㔚ᵹኒᐲߦߥࠆ㧚߹ߚ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳⟎ߒߥ޿႐ว㧘ၮ᧼߇ࠍᦨᄢߦߔࠆߚ߼ߦߪ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌⊒↢ߔࠆ㔚⇇ߪធ࿾ߒߚࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߦሽ࿷ߔࠆ㧚ࠍㆡᒰߦㆬቯߔࠆᔅⷐ߇޽ࠆ㧚ߘߎߢ㧘ߎߩᦨㆡ〒㔌ࠍࠪࡒ߹ߕ㧘㒰㔚㔚ᵹኒᐲߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩℂ〒㔌ߦଐሽߔࠆℂ↱ߦߟ޿ߡ⠨ኤߔࠆ㧚DGP ߇⍴ߊߥࠆߣ㧘એਅߩലᨐ߇⃻ࠊࠇߚߚ߼ߣ⠨߃ࠄࠇࠆ㧚ࠪࡒࡘ࡟࡯࡚ࠪࡦᣇᴺࡘ࡟࡯࡚ࠪࡦߢផቯߔࠆน⢻ᕈࠍᬌ⸛ߒߚ㧚㒰㔚㔚ᵹኒᐲߪエ X ✢ᑼࠗࠝ࠽ࠗࠩ߇↢ᚑߒߚ⩄㔚☸ሶỚᐲߩಽᏓ⁁ᘒߦଐሽߔࠆ㧚߹ߚ㧘ߎߩ⩄㔚☸ሶỚᐲߩಽᏓ(1) ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ૕Ⓧ߇ᷫዋߒ㧘㒰㔚ߦ⁁ᘒߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌ߦଐሽߔࠆ㧚ߘߎᔅⷐߥ⽶ߩ⩄㔚☸ሶߩ✚ᢙ߇ᷫዋߔࠆ㧚ߎߩ⚿ᨐ㧘㒰ߢ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌ࠍᄌൻߐߖߚ㓙ߩ㒰㔚㔚ᵹኒᐲࠍૐਅߐߖࠆലᨐ߇⃻ࠊࠇࠆ㧚㔚㔚ᵹኒᐲࠍ᳞߼ࠆߚ߼ߦߪ⩄㔚☸ሶỚᐲߩⓨ㑆⊛㧘ᤨ㑆⊛(2) ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ㔚⇇ Ee ߇ᒝߊߥࠅ㧘ߥಽᏓ⁁ᘒࠍ᳞߼ߥߌࠇ߫ߥࠄߥ޿㧚⩄㔚☸ሶỚᐲߩಽᏓ⁁⩄㔚☸ሶߩ⒖േㅦᐲ߇਄᣹ߔࠆ㧚⒖േㅦᐲ߇਄᣹ߔࠆᘒࠍⓨ㑆⊛㧘ᤨ㑆⊛ߦᄌൻߐߖࠆⷐ⚛ߪએਅߩⷐ⚛߇޽ࠆ㧚ߣ㘧ⴕᤨ㑆߇⍴ߊߥࠅౣ⚿ว߇ૐਅߔࠆ㧚ߎߩ⚿ᨐ㧘1)⩄㔚☸ሶߩ↢ᚑ㒰㔚㔚ᵹኒᐲ߇਄᣹ߔࠆലᨐ߇⃻ࠊࠇࠆ㧚2)⩄㔚☸ሶߩౣ⚿ว3)ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ㔚⇇4)⩄㔚☸ሶ߇૞ࠆዪᚲ㔚⇇5)⩄㔚☸ሶߩỚᐲᏅߦၮߠߊ⒖േߩ᜛ᢔ

㫅㪄 㪲㫄㪄㪊㪴㫅㪂 㪲㫄㪄㪊㪴

㪞㫉㫆㫌㫅㪻㪼㪻 㪾㫉㫀㪻ߢ޽ࠆ㧚ߒߚ߇ߞߡ㧘ߎࠇࠄߩⷐ⚛ࠍ⠨ᘦߔࠆߎߣߦࠃߞߡ
⩄㔚☸ሶỚᐲߩಽᏓ⁁ᘒࠍࠪࡒࡘ࡟࡯࡚ࠪࡦߒߚ㧚ߎߩ㓙㧘ࠪࡒࡘ࡟࡯࡚ࠪࡦߪ㧘ㅪ⛯ߩᣇ⒟ᑼ㧘㪛㪞㪧

㪜㪼

wnrwt

㪂

㪂

㪂

㪂

㫉 㪲㫄㪴࿑㧣 ⩄㔚☸ሶߩಽᏓ⁁ᘒ߅ࠃ߮ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ㔚⇇
Fig.7 Model for concentration distribution of charged particles
and electric field in the soft X-ray air ionizer.

G n  Į nr n #w 2 nr
 Dr# r Ee# r E Lwr
wr
wr 2wnrwnr(3)ࠍ૶↪ߒߚ 2)㧚ߎߎߢ㧘 Gn [m-3/s] ߪ⩄㔚☸ሶỚᐲߩ↢ᚑଥᢙ㧘 ǩ [m3/s] ߪ⩄㔚☸ሶỚᐲߩౣ⚿วଥᢙ㧘 Ǵ+ [m2/Vs]

LCD

11

ᱜߩ⩄㔚☸ሶߩ⒖േᐲ㧘Ǵ- [m2/Vs] ⽶ߩ⩄㔚☸ሶߩ⒖േᐲ㧘22ᢔቯᢙ㧘 D- [m /s] ߪ⽶ߩ⩄㔚☸ሶߩ᜛ᢔቯᢙߢ޽ࠆ㧚㒰㔚㔚ᵹኒᐲߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߦሽ࿷ߔࠆ
⩄㔚☸ሶߩ᜼േߦᄢ߈ߊଐሽߔࠆ㧚ߘߎߢ㧘ࠪࡒࡘ࡟࡯࡚ࠪ

㪛㫀㫊㫋㪸㫅㪺㪼 㫉 㪲㫄㪴ߪ⩄㔚☸ሶ߇૞ࠆዪᚲ㔚⇇㧘 D+ [m /s] ߪᱜߩ⩄㔚☸ሶߩ᜛ࡦߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߣߒ㧘એਅߩᚻ㗅ߢⴕߞߚ㧚1)㪇㪌㪇㪌㪇㪈㪇㪇㪈㪌㪇㫅㪂㫅㪄㪉㪇㪇㪉㪌㪇㪈㪇㪇㪈㪌㪇㫅㪂㫅㪄㪉㪇㪇㪉㪌㪇ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩⓨ㑆ࠍᓸዊ㗔ၞ Ӡr㪊㪇㪇㪋㪅㪇ߦಽഀߔࠆ㧚㪚㫆㫅㪺㪼㫅㫋㫉㪸㫋㫀㫆㫅 㪻㫀㫊㫋㫉㫀㪹㫌㫋㫀㫆㫅 㫆㪽㪺㪿㪸㫉㪾㪼㪻 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㫅 㪲㬍㪈㪇㪈㪊㪆㫄㪊㪴㪚㫆㫅㪺㪼㫅㫋㫉㪸㫋㫀㫆㫅 㪻㫀㫊㫋㫉㫀㪹㫌㫋㫀㫆㫅 㫆㪽㪺㪿㪸㫉㪾㪼㪻 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㫅 㪲㬍㪈㪇㪈㪊㪆㫄㪊㪴㩿㪸㪀 㪭㪚㪧 㪔 㪄㪈㪇㪇㪇 㪭㩿㪹㪀 㪭㪚㪧 㪔 㪂㪈㪇㪇㪇 㪭t = ti ߦ߅ߌࠆⓨ㑆⊛ߥỚᐲಽᏓ n(r,ti) ߆ࠄ㧘ฦጀ2)㪇㪛㫀㫊㫋㪸㫅㪺㪼 㫉 㪲㫄㪴Ee [V/m] ߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ㔚⇇㧘EL [V/m]ߦ૞↪ߔࠆⷐ⚛߆ࠄᓸዊᤨ㑆 Ӡt [s] ᓟߩᄌൻ㊂ࠍ㪉㪅㪇㪇㪉㪅㪇㪊㪇㪇㪋㪅㪇㪋㪅㪇㪉㪅㪇㪇㪉㪅㪇㪋㪅㪇▚಴ߔࠆ㧚3)ᓸዊᤨ㑆 Ӡt [s] ᓟߩỚᐲಽᏓ n(r,ti+1) ࠍ▚಴ߔࠆ㧚4)છᗧߩᤨ㑆 t = tn ߣߥࠆ߹ߢ㧘2)㨪3) ࠍ➅ࠅ㄰ߔ㧚ߎߩ㓙㧘છᗧߩᓸዊ㗔ၞߦ߅ߌࠆ⩄㔚☸ሶỚᐲߩᄌൻ㊂ߪ㧘࿑㧤 DGP ߇ 100 mm ႐วߩ⩄㔚☸ሶߩಽᏓ⁁ᘒߩࠪࡒࡘ
࡟࡯࡚ࠪࡦ⚿ᨐFig.8 Simulated result of concentration distribution of charged
particles at DG = 100 mm.

(3) ᑼࠍ૶↪ߒߚ㧚Gn ߪ r = 0 ߢ 7.01018 m-3/s ߣߒ㧘 Gn߹ߚ㧘ᓸዊ㗔ၞ Ӡr ߪ 250 Ǵm㧘ᓸዊᤨ㑆 Ӡt ߪ 1.010-4

㪌㪇-12s㧘ǩ ߪ 1.010-423 2)-42m /s 㧘Ǵ+ ߪ 1.410 m /Vs㧘Ǵ- ߪ6)

-6

2-6

1.910 m /Vs 㧘 D+ ߪ 4.110 m /s㧘 D- ߪ 4.91027)

m /s ߣߒߚ 㧚ߥ߅㧘Ꮺ㔚ߒߚၮ᧼߇ሽ࿷ߒߥ޿႐วߩ r =15-30 mm ߦ߅ߌࠆ n+ ߅ࠃ߮ n- ߪ 2.8103.2

㪈㪌㪇㪉㪇㪇m ߢ޽ࠅ㧘r =㪉㪌㪇㪊㪇㪇
㪈㪅㪇

300 mm ߦ߅ߌࠆ n+ ߅ࠃ߮ n- ߪ 2.810m ߣߒߚ㧚ࠪࡒࡘ࡟࡯࡚ࠪࡦ⚿ᨐ࿑ 8㧘࿑ 9 㧘࿑ 10 ߪၮ᧼ߩ㔚࿶ VCP ߇ -1000 V ߹ߚߪ࡚ࡦ⚿ᨐߢ޽ࠆ㧚࿑ 8 ߪ DGP ߇ 100 mm㧘࿑ 9 ߪ DGP ߇200 mm㧘࿑ 10 ߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳⟎ߒߥ޿႐วߩ⚿ᨐߢ޽ࠆ㧚ߎࠇࠄߩ࿑ߦ߅޿ߡ㧘ỚᐲゲߩᏀ஥߇⽶ߩ⩄㔚☸

㫅㪂㫅㪄㪈㪇㪇㪈㪌㪇㪉㪇㪇㪉㪌㪇㪇㪅㪌㪇㪇㪅㪌㪊㪇㪇㪈㪅㪇㪈㪅㪇㪇㪅㪌㪇㪇㪅㪌㪈㪅㪇㪚㫆㫅㪺㪼㫅㫋㫉㪸㫋㫀㫆㫅 㪻㫀㫊㫋㫉㫀㪹㫌㫋㫀㫆㫅 㫆㪽㪺㪿㪸㫉㪾㪼㪻 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㫅 㪲㬍㪈㪇㪈㪋㪆㫄㪊㪴㪚㫆㫅㪺㪼㫅㫋㫉㪸㫋㫀㫆㫅 㪻㫀㫊㫋㫉㫀㪹㫌㫋㫀㫆㫅 㫆㪽㪺㪿㪸㫉㪾㪼㪻 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㫅 㪲㬍㪈㪇㪈㪋㪆㫄㪊㪴㩿㪸㪀 㪭㪚㪧 㪔 㪄㪈㪇㪇㪇 㪭㩿㪹㪀 㪭㪚㪧 㪔 㪂㪈㪇㪇㪇 㪭+1000 V ߩ႐วߩࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌 DGPࠍᄌൻߐߖߚ㓙ߩ⩄㔚☸ሶỚᐲߩಽᏓ⁁ᘒߩࠪࡒࡘ࡟࡯ࠪ㪌㪇㫅㪂㫅㪄

㪈㪇㪇

13-3

㪇

㪛㫀㫊㫋㪸㫅㪺㪼 㫉 㪲㫄㪴㪇㪛㫀㫊㫋㪸㫅㪺㪼 㫉 㪲㫄㪴о 1/r2 ߣߒߡߘࠇߙࠇߩ〒㔌ߦ߅ߌࠆ Gn(r) ࠍ᳞߼ߚ 3㨪5)㧘

࿑㧥 DGP ߇ 200 mm ႐วߩ⩄㔚☸ሶߩಽᏓ⁁ᘒߩࠪࡒࡘ
࡟࡯࡚ࠪࡦ⚿ᨐFig.9 Simulated result of concentration distribution of charged
particles at DG = 200 mm.

ሶỚᐲߢ޽ࠅ㧘ฝ஥߇ᱜߩ⩄㔚☸ሶỚᐲߢ޽ࠆ㧚ߎࠇࠄߩ⚿㪇⍴ߊߥࠆ߶ߤ㧘⩄㔚☸ሶỚᐲߩಽᏓ⁁ᘒߪၮ᧼⸳⟎೨ࠃࠅ㗼⪺ߦᄌൻߒ㧘㒰㔚ߦᔅⷐߥᭂᕈߩ⩄㔚☸ሶߪၮ᧼ߩᣇ߳⒖േߒ㧘㒰㔚ߦਇⷐߥᭂᕈߩ⩄㔚☸ሶߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩᣇ߳ᰴߦ㧘㒰㔚㔚ᵹኒᐲ JN ࠍᬌ⸛ߔࠆߚ߼ߦ⩄㔚☸ሶߩಽᏓሶ⁁ᘒ߆ࠄၮ᧼ߦ೔㆐ߔࠆ⩄㔚☸ሶỚᐲࠍ᳞߼㧘nr (r,t)  S r (Ee  E L )㫅㪂㫅㪄㪌㪇㪈㪇㪇㪈㪌㪇㪉㪇㪇㫅㪂㫅㪄㪈㪇㪇㪈㪌㪇㪉㪇㪇㪉㪌㪇

⒖േߒߡ޿ࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚

JNr㪌㪇㪛㫀㫊㫋㪸㫅㪺㪼 㫉 㪲㫄㪴ߩ✚ᢙ߇ᷫዋߒߡ޿ࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚߹ߚ㧘DGP ߇㪇㪛㫀㫊㫋㪸㫅㪺㪼 㫉 㪲㫄㪴ᨐ߆ࠄ㧘DGP ߇⍴ߊߥࠆ߶ߤ㧘㒰㔚ߦᔅⷐߥᭂᕈߩ⩄㔚☸ሶ(4)߆ࠄ㒰㔚㔚ᵹኒᐲ JN ࠍ▚಴ߒߚ㧚q ߪ㔚᳇⚛㊂ߢ޽ࠅ㧘qߪ 1.610-19 C ߣߒߚ㧚࿑ 11㧘࿑ 12 ߪၮ᧼ߩ㔚࿶ VCP ࠍ㪊㪇㪇㪉㪅㪇㪈㪅㪇㪇

㪈㪅㪇㪉㪅㪇㪊㪇㪇㪉㪅㪇㪈㪅㪇㪇㪈㪅㪇㪉㪅㪇㪚㫆㫅㪺㪼㫅㫋㫉㪸㫋㫀㫆㫅 㪻㫀㫊㫋㫉㫀㪹㫌㫋㫀㫆㫅 㫆㪽㪺㪿㪸㫉㪾㪼㪻 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㫅 㪲㬍㪈㪇㪈㪌㪆㫄㪊㪴㪚㫆㫅㪺㪼㫅㫋㫉㪸㫋㫀㫆㫅 㪻㫀㫊㫋㫉㫀㪹㫌㫋㫀㫆㫅 㫆㪽㪺㪿㪸㫉㪾㪼㪻 㫇㪸㫉㫋㫀㪺㫃㪼㫊 㫅 㪲㬍㪈㪇㪈㪌㪆㫄㪊㪴㩿㪸㪀 㪭㪚㪧 㪔 㪄㪈㪇㪇㪇 㪭㩿㪹㪀 㪭㪚㪧 㪔 㪂㪈㪇㪇㪇 㪭࿑㧝㧜 ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳⟎ߒߥ޿႐วߩ⩄㔚☸ሶߩಽᏓ⁁ᘒߩࠪࡒࡘ࡟࡯࡚ࠪࡦ⚿ᨐ
Fig.10 Simulated result of concentration distribution of charged
particles at without grounded grid.

1232

12008

ࡄ࡜ࡔ࡯࠲ߣߒ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌 DGP4.

ࠍᄌൻߐߖߚ㓙ߩ JN ࠍ JN0 ߢⷙᩰൻߒߚ |JN/ JN0| ߩ⚿ᨐᧄ⎇ⓥߢߪ㧘ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼߇㒰㔚ㅦᐲߦ෸߷ߔലᨐࠍ

ߢ޽ࠆ㧚࿑ 11 ߪ VCP ߇⽶ߩ႐วߩ⚿ᨐߢ޽ࠅ㧘࿑ 12 ߪᬌ⸛ߒߚ㧚ࠗࠝ࠽ࠗࠩߩേ૞᧦ઙߣߒߡࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣ

VCP ߇ᱜߩ႐วߩ⚿ᨐߢ޽ࠆ㧚ߎࠇࠄߩ࿑ߦ߅޿ߡ㧘ታ✢߇ၮ᧼ߩ㑆ߩ〒㔌߅ࠃ߮ၮ᧼ߩ㔚࿶ࠍㆬ߮㧘㒰㔚ㅦᐲߩᜰᮡߣࠪࡒࡘ࡟࡯࡚ࠪࡦ⚿ᨐߢ޽ࠅ㧘ࡊࡠ࠶࠻߇᷹ቯ୯ߢ޽ࠆ㧚ߎߒߡ㒰㔚㔚ᵹኒᐲࠍㆬ߮㧘ߎࠇࠄߩ㑐ଥࠍታ㛎ߣࠪࡒࡘ࡟࡯ࠇࠄߩ⚿ᨐ߆ࠄ㧘ࠪࡒࡘ࡟࡯࡚ࠪࡦ⚿ᨐߪ᷹ቯ୯ߣ㘃ૃߒߚ࡚ࠪࡦߩਔ㕙߆ࠄᬌ⸛ߒߚ㧚ߎߩ⚿ᨐએਅߩߎߣ߇᣿ࠄ߆ߦ௑ะࠍ␜ߒߡ޿ࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚એ਄ߩߎߣ߆ࠄ㧘ߥߞߚ㧚߹ߣ ߼(1) ࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࠍ⸳⟎ߔࠆߎߣߦࠃߞߡ㧘㒰㔚㔚ᵹ㒰㔚㔚ᵹኒᐲߪផቯน⢻ߢ޽ࠅ㧘ᦨㆡ〒㔌ࠍࠪࡒࡘ࡟࡯࡚ࠪኒᐲߪ㜞ߊߥࠅ㧘㒰㔚ㅦᐲࠍ㜞߼ࠆࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ࡦߦࠃࠅផቯน⢻ߢ޽ࠆߎߣ߇᣿ࠄ߆ߦߥߞߚ㧚㪥㫆㫉㫄㪸㫃㫀㫑㪼㪻 㫅㪼㫌㫋㫉㪸㫃㫀㫑㫀㫅㪾 㪺㫌㫉㫉㪼㫅㫋 㪻㪼㫅㫊㫀㫋㫐㫓 㪡㪥㪂 㪆 㪡㪥㪇㪂 㫓ߩലᨐ߇⃻ࠊࠇࠆ㧚㪉㪅㪇㪉(2) ߎߩࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩലᨐߪࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣ㪪㫀㫄㫌㫃㪸㫋㫀㫆㫅 㪑㪜㫏㫇㪼㫉㫀㫄㪼㫅㫋 㪑ၮ᧼ߩ㑆ߩ〒㔌ߦଐሽߔࠆ㧚(3) ߎߩࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩലᨐߪၮ᧼ߩ㔚࿶߇ૐߊߥ㪈㪅㪌ࠆ߶ߤᄢ߈ߊߥࠆ㧚(4) ߎߩࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩലᨐࠍᦨᄢߦߔࠆࠣ࡜ࡦ࠼㪈㪅㪇㪈ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩᦨㆡ〒㔌ߪၮ᧼ߩ㔚࿶߇ૐߊ㪑 㪭㪚㪧 㪔 㪄㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪈㪇㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪈㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪉㪇㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪉㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪄㪊㪇㪇㪇 㪭㪇㪅㪌㪇㪇㪌㪇㪈㪇㪇㪈㪌㪇㪉㪇㪇㪉㪌㪇㪛㫀㫊㫋㪸㫅㪺㪼 㪹㪼㫋㫎㪼㪼㫅 㪾㫉㫆㫌㫅㪻㪼㪻 㪾㫉㫀㪻㪸㫅㪻 㪺㪿㪸㫉㪾㪼㪻 㫇㫉㫆㪻㫌㪺㫋 㪛㪞㪧 㪲㫄㫄㪴ߥࠆ߶ߤ⍴ߊߥࠆ㧚(5) ߎߩࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߩലᨐߪ⩄㔚☸ሶߩಽᏓ⁁ᘒࠍ⠨ᘦߒߚࠪࡒࡘ࡟࡯࡚ࠪࡦߦࠃߞߡផቯน⢻ߢ޽ࠆ㧚㪊㪇㪇ෳ⠨ᢥ₂
H.Inaba㧘T.Ohmi㧘T.Yoshida㧘T.Okada㧘 IEICE Transactions
on Electronics㧘Vol.E79C㧘No.3㧘 pp.328-335㧔1996㧕2) ଐ↰቟ၮ㧘ศጟ߭ߐࠃ㧘ጟ㊁৻㓶㧦╙ 15 ࿁ RCJ ା㗬ᕈࠪࡦࡐࠫ࠙ࡓ⊒⴫⺰ᢥ㓸 ̉pp.157-160 (2005)3) ૞ጊ᣽ผ㧘┻ౝቇ㧘ศ㊁㦖ᄥ㧘ጟ㊁৻㓶㧦㕒㔚᳇ቇળ⻠Ṷ⺰ᢥ㓸 ’06 pp.29-30 (2006)4) ࠽ࠗࡦࠧ࡯࡜ࡦࠪࡕࡦ㧘ጟ㊁৻㓶㧦2007 ᐕᐲ㕒㔚᳇ቇળᤐᦼ⻠Ṷળ⺰ᢥ㓸㧘pp.41-44 (2007)5) ጊፒᵏኼ㧘࠽ࠗࡦࠧ࡯࡜ࡦࠪࡕࡦ㧘૞ጊ᣽ผ㧘┻ౝቇ㧘ጟ㊁৻㓶㧦╙ 54 ࿁ᔕ↪‛ℂቇ㑐ଥㅪว⻠Ṷળ⻠Ṷ੍Ⓜ
㓸㧘p.248 (2007)6) ዣᴦᢥ㧘ᄢ⼱ศ↢㧘ਗᧁೣ๺㧘ᳯ⷗Ḱ㧦╙ 14 ࿁ⓨ᳇ᷡᵺߣࠦࡦ࠲ࡒࡀ࡯࡚ࠪࡦࠦࡦ࠻ࡠ࡯࡞⎇ⓥᄢળ㧘
pp.121-124 (1996)7) 㜞ᯅᷡ㧦‫ޟ‬ඨዉ૕Ꮏቇ‫ޠ‬㧘pp.97-98㧘᫪ർ಴ (2001)1)㪥㫆㫉㫄㪸㫃㫀㫑㪼㪻 㫅㪼㫌㫋㫉㪸㫃㫀㫑㫀㫅㪾 㪺㫌㫉㫉㪼㫅㫋 㪻㪼㫅㫊㫀㫋㫐㫓 㪡㪥㪄 㪆 㪡㪥㪇㪄 㫓࿑㧝㧝 ࠪࡒࡘ࡟࡯࡚ࠪࡦߦࠃࠆࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌ߣⷙᩰൻߒߚ㒰㔚㔚ᵹኒᐲߣߩ㑐ଥ
Fig.11 Simulated result of normalized neutralizing current density|JN+/ JN0+| versus distance between grounded grid and charged
product DGP at various voltage of charged product VCP.
㪉㪉㪅㪇㪪㫀㫄㫌㫃㪸㫋㫀㫆㫅 㪑㪜㫏㫇㪼㫉㫀㫄㪼㫅㫋 㪑㪈㪅㪌㪈㪈㪅㪇㪑 㪭㪚㪧 㪔 㪂㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪈㪇㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪈㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪉㪇㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪉㪌㪇㪇 㪭㪑 㪭㪚㪧 㪔 㪂㪊㪇㪇㪇 㪭㪇㪅㪌㪇㪇㪌㪇㪈㪇㪇㪈㪌㪇㪉㪇㪇㪉㪌㪇㪛㫀㫊㫋㪸㫅㪺㪼 㪹㪼㫋㫎㪼㪼㫅 㪾㫉㫆㫌㫅㪻㪼㪻 㪾㫉㫀㪻㪸㫅㪻 㪺㪿㪸㫉㪾㪼㪻 㫇㫉㫆㪻㫌㪺㫋 㪛㪞㪧 㪲㫄㫄㪴㪊㪇㪇࿑㧝㧞 ࠪࡒࡘ࡟࡯࡚ࠪࡦߦࠃࠆࠣ࡜ࡦ࠼ࠣ࡝࠶࠼ߣၮ᧼ߩ㑆ߩ〒㔌ߣⷙᩰൻߒߚ㒰㔚㔚ᵹኒᐲߣߩ㑐ଥ
Fig.12 Simulated result of normalized neutralizing current density|JN-/ JN0-| versus distance between grounded grid and charged
product DGP at various voltage of charged product VCP.