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cracks and keygens are presented here.The present invention relates to a semiconductor device and moreparticularly to a semiconductor device having a silicon carbide epitaxial layer used as a base layer, in which
impurities such as carbon are not doped and in which the dielectric breakdown voltage is excellent and the flatness
is excellent. In order to improve the breakdown voltage of a semiconductor device, it is known to lower the impurity
concentration of a base layer. In order to reduce the crystal defects caused by the epitaxial growth, it is also known
to use a silicon carbide (SiC) layer for the base layer. An example of a semiconductor device having such a baselayer is disclosed in Japanese Unexamined Patent Publication No. Hei 6-32234. In the semiconductor device of thispublication, an n-type region is formed at the surface of a p-type base layer of SiC in order to reduce thecapacitance between the base layer and a substrate. FIG. 14 shows a cross section of a semiconductor device of theprior art having a p-type base layer formed on an n-type SiC substrate. In the semiconductor device shown in FIG.
14, a p-type base layer 91 formed on a surface of an n-type SiC substrate 91, and a p-type epitaxial layer 92 formedon the p-type base layer 91. A p-type impurity region 93 is formed by diffusing an n-type impurity into a part of thep-type base layer 91. An n-type junction region 94 is formed at a boundary between the n-type SiC substrate 91 andthe p-type base layer 91. A source electrode 95 and a drain electrode 96 are formed on the p-type base layer 91, anda gate electrode 97 is formed on the p-type epitaxial 2d92ce491b

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