J. Inst. Electrostat. Jpn.

論

静電気学会誌, 29, 1 (2005) 50-55

文◲ᤃဳૐࠛࡀ࡞ࠡ࡯㨄✢ᬌ಴ེߩ㐿⊒㋈ᧁ᡽ౖ 㧘੹੗♖৻ 㧘᧻ᯅ⑲᣿ 㧘᳓㊁ᓆ㧔2004 ᐕ 8 ᦬ 23 ᣣฃઃ; 2004 ᐕ 12 ᦬ 15 ᣣฃℂ㧕Development of the Detector for Low Energy Scattered X-rays
Using Charged Spheres
Masanori SUZUKI*㧘Seiiti IMAI**㧘Hideaki MATSUHASHI**㧘Akira MIZUNO*(Received August 23, 2004; Accepted December 15, 2004)

Recently, in semiconductor and LCD manufacturing processes, ionizers have been used that employ
low energy X-rays (soft X-rays) of 3 to 9.5 keV, as the ionization source. However, these low energy X-rays
cannot be detected using film badges or the like as their energies are so low, and there is no appropriate
personal dose meter. In these conditions, an inexpensive and easy-to-use personal dose detector is required forworkers for daily use to avoid unexpected exposure.
Therefore, we have designed a wearable low energy X-ray detector that uses four electrically charged
conductive spheres floated by static electricity repulsion force. Ions generated by ionization function of thelow energy X-rays projected in the detector neutralize electrically charged conductive spheres. From thenumber of spheres dropped, the detector detects the dose of the low energy X-rays.
In this report, we have examined a simple way to detect low energy scattered X-ray dose from thenumber of dropped conductive spheres.
1.

ߪߓ߼ߦ਄ߐߖ㧘ᬌ಴ེౝߦ౉኿ߒߚૐࠛࡀ࡞ࠡ࡯㨄✢ߩ㔚㔌૞↪ߢㄭᐕ㧘ඨዉ૕߿ᶧ᥏⵾ㅧᎿ⒟ߦ߅޿ߡ㧘ή⊒Ⴒߢ㒰㔚ᕈ⊒↢ߒߚࠗࠝࡦߦࠃࠅߘࠇࠄࠍਛ๺ߒߡ㧘⪭ਅߒߚ୘ᢙ߆ࠄ⢻ߦఝࠇ㧘߆ߟㆤ⭁߇ኈᤃߥߎߣ߆ࠄ㧘ࠛࡀ࡞ࠡ࡯߇ 3㨪ૐࠛࡀ࡞ࠡ࡯㨄✢ߩ✢㊂ࠍ◲ᤃ⊛ߦᬌ಴ߔࠆᣇᑼߩⵝ⌕ဳૐ

9.5keV ߩૐࠛࡀ࡞ࠡ࡯㨄✢㧔エ㨄✢㧕ࠍࠗࠝࡦൻḮߣߔࠆࠛࡀ࡞ࠡ࡯㨄✢ᬌ಴ེࠍ⠨᩺ߒߚ㧚ࠗࠝ࠽ࠗࠩ࡯߇೑↪ߐࠇࠆࠃ߁ߦߥߞߡ߈ߡ޿ࠆ 1)㧚ߘࠇᧄ⺰ᢥߢߪ㧘ߎߩᬌ಴ེߦ߅޿ߡ㧘⪭ਅߒߚዉ㔚ᕈࡏ࡯࡞ࠄߩࠗࠝ࠽ࠗࠩ࡯ߩ৻଀ߩᄖⷰߣ઀᭽ࠍߘࠇߙࠇ࿑ 1 ߣ⴫ߩ୘ᢙ߆ࠄ㧘ૐࠛࡀ࡞ࠡ࡯ᢔੂ㨄✢ߩ✢㊂ࠍ◲ᤃ⊛ߦᬌ಴ߔ12)ߦ␜ߔ㧚ߒ߆ߒ㧘ߎߩ㨄✢ߪ㧘ࠛࡀ࡞ࠡ࡯߇ૐ޿ߚ߼㧘ࠆᣇᴺࠍᬌ⸛ߒ㧘ߘࠇ߇น⢻ߢ޽ࠆߎߣࠍ⏕⹺ߒߚߩߢ㧘ߘᓥ᧪ߩࡈࠖ࡞ࡓࡃ࠶ࠫ╬ߢߪᬌ಴ߢ߈ߕ㧘ㆡᒰߥ୘ੱⵍᦑߩ⚿ᨐߦߟ޿ߡႎ๔ߔࠆ㧚ߚߛߒ㧘ᧄႎߢߪ㧘Ḩᐲߩᓇ㗀ߦ✢㊂⸘߇ή޿ߩ߇ታᖱߢ޽ࠆ㧚ߘࠇ᡿㧘୘ੱⵍᦑ✢㊂⸘ߣ

ߟ޿ߡ․ߦ⺞ᩏࠍߒߡ޿ߥ޿㧚ߘࠇߪ㧘ߎߩᬌ಴ེࠍታ↪ൻߒߡ㧘቟ଔߢ◲නߦⵍᦑ㊂ࠍ᷹ቯߢ߈ࠆᬌ಴ེ߇᳞߼ࠄࠇߔࠆ㓙ߪ㧘ߘߩ⓹᧚ߦෘ߼ߩ㨄✢ㅘㆊࡈࠖ࡞ࡓࠍណ↪ߒ㧘߆ߡ޿ࠆ㧚ߘߎߢ㧘㕒㔚᳇⊛ߥᢺജߦࠃߞߡ 4 ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍᶋࠠ࡯ࡢ࡯࠼㧦ૐࠛࡀ࡞ࠡ࡯㨄✢㧘エ㨄✢㧘◲ᤃဳᬌ಴ེ㧘ࠗࠝ࠽ࠗࠩ࡯㧘ࠢ࡝࡯ࡦ࡞࡯ࡓ* ⼾ᯅᛛⴚ⑼ቇᄢቇ ࠛࠦࡠࠫ࡯Ꮏቇ♽㧔441-8580 ᗲ⍮⋵⼾ᯅ Ꮢ ᄤ ષ ↸ 㔕 㓴 ࡩ ਐ 1-1 㧕 Department of EcologicalEngineering, Toyohashi University of Technology, Tempaku-cho,
Toyohashi, Aichi , 441-8580, Japan** 㧔ᩣ㧕࠹ࠢࡁ⪉๺ ᛛⴚ㐿⊒⎇ⓥᚲ㧔156-0052 ᧲੩ㇺ਎↰⼱඙⚻ၴ 5-33-6㧕Technical R&D Center, Techno Ryowa Ltd.,
33-6, Kyodo 5-chome, Setagaya-ku, Tokyo, 156-0052, Japanߟᬌ಴ེߩኈེࠍធ⌕೷ߢኒኽߔࠆߚ߼ㅘḨߦࠃࠆ㔚⩄ߩ࡝࡯ࠢߩෂ㒾ߪ߶ߣࠎߤή޿ߣ੍ᗐߐࠇࠆ߆ࠄߢ޽ࠆ㧚
2.

ᬌ಴ේℂߣ↪ㅜߎߩᬌ಴ེߪ㧘ૐࠛࡀ࡞ࠡ࡯㨄✢߇ㅘㆊߔࠆࡐ࡝ࠗࡒ࠼᮸⢽ࡈࠖ࡞ࡓ㧔࠺ࡘࡐࡦ␠⵾ Kapton㧘ෘߺ 50Ǵm㧕ࠍ⾍ߞߚ⓹ࠍᜬߟ࠴ࡖࡦࡃ࡯ౝߦ㧘㊄ዻ⃿㔚ᭂߣ 4 ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍኽ౉ߒ㧘㊄ዻ⃿㔚ᭂߣዉ㔚ᕈࡏ࡯࡞ࠍหᭂߦᏪ㔚ߐߖ㧘㕒㔚᳇⊛ߥᢺജߦࠃߞߡ 4 ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍᶋ਄ߐߖࠆᣇᑼ
ߩⵝ⌕ဳૐࠛࡀ࡞ࠡ࡯㨄✢ᬌ಴ེߢ޽ࠆ㧔࿑ 2㧕
㧚㊄ዻ⃿㔚ᭂߣዉ㔚ᕈࡏ࡯࡞ߩᏪ㔚ߪ㧘ᬌ಴ེਅㇱ߆ࠄ㊄ዻ⃿㔚ᭂࠍ⋥ᵹ簡易型低エネルギーＸ線検出器の開発（鈴木政典ら）◲ᤃဳૐࠛࡀ࡞ࠡ࡯㨄✢ᬌ಴ེߩ㐿⊒㧔㋈ᧁ᡽ౖࠄ㧕51㔚ḮߢᏪ㔚ߐߖࠆߎߣߦࠃࠅⴕ߁㧚㊄ዻ⃿㔚ᭂ㧔Steel㧘⋥ᓘ឵▚ߔࠆߣᢙ mSv ߣߥࠆߣߎࠈ߆ࠄ㧘ᬌ಴▸࿐ࠍ᳿߼ߡ޿ࠆ㧚

6mmǾ㧕ߪ㧘⃿ᒻߢ޽ࠆߎߣ߆ࠄᏪ㔚ߩ㓙ߩ᡼㔚ࠍ㒐ᱛߔࠆዏ㧘9.5keV એਅߩૐࠛࡀ࡞ࠡ࡯㨄✢ߪ㧘߶ߣࠎߤ߇⊹⤏ߢๆߚ߼ߦ㔚ᭂߣߒߡ↪޿ࠄࠇߡ޿ࠆ㧚ߘߩ਄㧘㊄ዻ⃿㔚ᭂߪ㧘෼ߐࠇ㧘ੱ૕ᷓㇱ߳⥋ࠄߥ޿ߚ߼㧘ⵍᦑኻ⽎ࠍ⊹⤏ߣߒߡ޿㔚᳇⊛ߦ㜞⛘✼ߐࠇ㧘ߢ߈ࠆߛߌ㔚⩄ߩ࡝࡯ࠢ߇㒐ᱛߐࠇߡࠆ 2,3)㧚޿ࠆ㧚ዉ㔚ᕈࡏ࡯࡞ߪ㧘⊒ᵃࡐ࡝ࠬ࠴࡟ࡦߩ⴫㕙ࠍෘߺ⚂ 10
Ǵm ߩ㌃ࡔ࠶ࠠߢዉ㔚ൻߒߚ⋥ᓘ 6mmǾߩシ㊂ࡏ࡯࡞㧔⚂ 3.

3.

8mg/1 ୘㧕ߢ޽ࠆ㧚߹ߚ㧘ߎࠇࠄߩዉ㔚ᕈࡏ࡯࡞ߪ㧘ု⋥ߦታ㛎ⵝ⟎࿑ࠍ࿑ 3 ߦ␜ߔ㧚ࠟ࡜ࠬ⵾ߩㆤ⭁▫㧔600280

ᶋ߆ߖࠆߚ߼ߦ 6 ᧄߩ࠹ࡈࡠࡦᩇ㧔⋥ᓘ 1mmǾ㧕ߢᡰᜬߐࠇ

340mmH㧕ౝߦ㧘ⵝ⌕ဳૐࠛࡀ࡞ࠡ࡯㨄✢ᬌ಴ེ㧔࿑ 2㧕ࠍߡ޿ࠆ㧚⸳⟎ߔࠆบࠍ⟎߈㧘ߘߩ਄ߦߘߩᬌ಴ེࠍ⟎޿ߚߣ߈ᬌ಴ེታ㛎ⵝ⟎෸߮ᣇᴺߎߩᬌ಴ེߪ㧘㨄✢ㅘㆊࡈࠖ࡞ࡓࠍ⾍ߞߚ⓹ࠃࠅ౉኿ߒߚߩ౉኿⓹ߩਛᔃߣหߓ㜞ߐߦ✢Ḯߩ⓹ߩਛᔃ߇᧪ࠆࠃ߁ߦ㧘ૐࠛࡀ࡞ࠡ࡯㨄✢ߩ㔚㔌૞↪ߦࠃࠅ㧘౉኿ߒߚ㨄✢ߩ✢㊂ߦૐࠛࡀ࡞ࠡ࡯㨄✢㧔エ㨄✢㧕⊒↢ⵝ⟎㧔ᵿ᧻ࡎ࠻࠾ࠢࠬ⵾ C

ᔕߓߡᱜ⽶ߩⓨ᳇ࠗࠝࡦ߇⊒↢ߒ㧘ߘࠇߦࠃࠅᏪ㔚ߒߚ㊄ዻ

4870㧕ࠍ⸳⟎ߒߚ㧔࿑ 3-(b)㧕
㧚ߎߩ㨄✢Ḯߩ઀᭽㧔⴫ 2 4㧕㧕

⃿ߣ 4 ୘ߩዉ㔚ᕈࡏ࡯࡞߇ਛ๺ߐࠇ㧘ߘߩ⚿ᨐ⪭ਅߒߚዉ㔚ߪ㧘ࠗࠝ࠽ࠗࠩ࡯ߣߒߡ೑↪ߐࠇߡ޿ࠆ㨄✢Ḯ㧔⴫ 1㧕ߣ߶ᕈࡏ࡯࡞ߩ୘ᢙ߆ࠄ㧘ૐࠛࡀ࡞ࠡ࡯㨄✢ߩ✢㊂ࠍ◲ᤃ⊛ߦᬌ߷หߓߢ޽ࠆ㧚߹ߚ㧘ߎߩ㨄✢Ḯߪ㧘಴ജࠍ⺞ᢛߢ߈ࠆ߇㧘಴ߔࠆߎߣࠍᗧ࿑ߒߚ߽ߩߢ޽ࠆ㧚ߘࠇߢ߽ߎߩㆤ⭁▫ౝߢ૶↪ߔࠆߦߪ㧘✢㊂₸߇ᄢ߈ㆊ߉ߚ

ߎߩᬌ಴ེߪ㧘9.5keV એਅߩૐࠛࡀ࡞ࠡ࡯㨄✢ߦࠃࠆᢙ mߚ߼㧘✢Ḯߩ⓹ߦ㧘ࡐ࡝ࠗࡒ࠼᮸⢽ࠪ࡯࠻㧔ෘߺ 0.525mmt㧕

Sv/ᣣ⒟ᐲ㧔⊹⤏ߦ߅ߌࠆⵍᦑ✢㊂㧦70Ǵm ✢㊂ᒰ㊂㧕ߩⵍᦑࠍ⾍ߞߡ✢㊂₸ࠍૐਅߐߖߡ૶↪ߒߚ㧚ߚߛߒ㧘ߎࠇߦࠃࠆߩ᦭ήߣ᭎⇛୯ࠍ૞ᬺ⠪ߦ⍮ࠄߖ㧘
⼊๔ߔࠆߚ߼ߦ૶↪ߔࠆ㧚㨄✢Ḯߩ㨄✢ࠬࡍࠢ࠻࡞߳ߩᓇ㗀߇߶ߣࠎߤߥ޿ߎߣࠍ⏕⹺㔚㔌᡼኿✢㓚ኂ㒐ᱛⷙೣߢߪ㧘࿖㓙᡼኿✢㒐⼔ᆔຬળ㧔ICRP㧕ߒߡ޿ࠆ㧚1990 ᐕ൘๔ࠍฃߌߡ㧘⊹⤏ߦߟ޿ߡߩⵍᦑ✢㊂㒢ᐲࠍ 500mS

ฦ⒳᧦ઙߢߩⓍ▚✢㊂㧔70Ǵm ✢㊂ᒰ㊂㧕ࠍ᳞߼ࠆታ㛎ߪ㧘v/ᐕ㧔70Ǵm ✢㊂ᒰ㊂㧕ߣߒߡ߅ࠅ㧘ߎࠇࠍ 1 ᣣᒰߚࠅߦૐḨᐲቶౝ㧔⋧ኻḨᐲ㧦⚂ 1%㧘᷷ᐲ㧦24͠㧕ߦ਄ㅀߩታ㛎ⵝ⟎ࠍ⸳⟎ߒߡ㧘ᰴߩᚻ㗅ߢⴕߞߚ㧚Ԙ߹ߕ㧘ᬌ಴ེࠍ⸳⟎บߩ਄ߦ⟎޿ߚߣ߈ᬌ಴ེౝߩዉ㔚ᕈࡏ࡯࡞㧔ᬌ಴ེࠍ⌀਄߆ࠄߺߚᤨߩᬌ಴ེਛᔃ㧕%CR 26('26(' 6GHNQP%QPFWEVKXGURJGTGU%QRRGTRNCVGF
RQN[UV[TGPGHQCOǾ5VQRRGTHQT
EQPFWEVKXGURJGTGU:TC[RGPGVTCVKPIYKPFQY
2QN[KOKFGTGUKPVJKEMPGUUǴO5WRRQTVGTUHQTEQPFWEVKXGURJGTGU
26('Ǿ࿑ 1 ૐࠛࡀ࡞ࠡ࡯㨄✢ࠗࠝ࠽ࠗࠩ࡯㧔ᵿ᧻ࡎ࠻࠾ࠢࠬ⵾/GVCNNKEURJGTKECNGNGEVTQFG
5VGGNǾL9490㧕

Fig.1 Low energy X-ray ionizer (Hamamatsu Photonics L9490).

26('%CR 26('⴫ ૐࠛࡀ࡞ࠡ࡯㨄✢ࠗࠝ࠽ࠗࠩ࡯ߩ઀᭽

%JCODGT #ET[NKETGUKPVJKEMPGUUV

Table 1 Specifications of low energy X-ray ionizer. 2)㪠㫋㪼㫄㫊㩷㪫㫌㪹㪼㩷㫍㫆㫃㫋㪸㪾㪼㪫㫌㪹㪼 㪺㫌㫉㫉㪼㫅㫋㩷㪮㫀㫅㪻㫆㫎㩷㫄㪸㫋㪼㫉㫀㪸㫃㩷㪠㫉㫉㪸㪻㫀㪸㫋㫀㫆㫅㩷㪸㫅㪾㫃㪼㩷㪯㪄㫉㪸㫐㩷㫎㪸㫍㪼㫃㪼㫅㪾㫋㪿㩷㪯㪄㫉㪸㫐㩷㪼㫅㪼㫉㪾㫐㪪㫇㪼㪺㫀㪽㫀㪺㪸㫋㫀㫆㫅㫊㪛㪚㩷㪐㪅㪌㫂㪭㪈㪌㪇㱘㪘㩷㪙㪼㫉㫐㫃㫃㫀㫌㫄㪃㩷㪇㪅㪊㫄㫄㩷㫋㪿㫀㪺㫂㫅㪼㫊㫊㩷㪸㫇㫇㫉㫆㫏㪅㩷㪈㪊㪇㩷㪻㪼㪾㫉㪼㪼㩷㩿㪺㫆㫅㪼㩷㪸㫅㪾㫃㪼㪀㩷㪈㪅㪊䌾㪋㪅㪈㩷㪘㫅㪾㫊㫋㫉㫆㫄㫊㪃㩷㫇㪼㪸㫂㩷㪉㩷㪘㫅㪾㫊㫋㫉㫆㫄㫊㪊䌾㪐㪅㪌㫂㪼㪭㪃㩷㫇㪼㪸㫂㩷㪍㫂㪼㪭:TC[RGPGVTCVKPIYKPFQY%QPFWEVKXGURJGTGUǾ5WRRQTVGTUHQT
EQPFWEVKXGURJGTGUǾ࿑ ታ㛎↪ૐࠛࡀ࡞ࠡ࡯㨄✢ᬌ಴ེ
Fig.2 Low energy X-ray detector for experiment.

- 2 -70+6OO

52

静電気学会誌

第 29 巻

第 1 号（2005）

4.2ߩ᧪ࠆ૏⟎㧔✢Ḯߩ⓹߆ࠄ 250mm ߩ૏⟎㧘࿑ 3-(a)㧕ߦ㧘㔚㔌▫ᑼࠨ࡯ߴ࡯ࡔ࡯࠲㧔☨࿖ Victoreen ␠⵾㧘4ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ߣዉ㔚ᕈࡏ࡯࡞਄ߩ㔚⩄㊂ߩ㑐ଥ

50B-SI㧕ߩ㔚㔌▫ߩਛᔃ㧔ታലਛᔃࡑ࡯ࠢ㧦㔚㔌▫ౝ

࿑ 6 ߦ㧘ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ߣ㊄ዻ⃿ߩ࠮ࡦࠨ࡯ߩ޽ࠆ૏⟎ࠍ␜ߔශ㧕߇᧪ࠆࠃ߁ߦ㧘✢Ḯ㔚ᭂߦශടߔࠆ㔚࿶ߣߩ㑐ଥࠍ␜ߔ㧚ߚߛߒ㧘ታ㛎ߪ㧘ዉ㔚ߦ᷹ቯ⓹ࠍะߌߡߘߩࠨ࡯ࡌ࡯ࡔ࡯࠲ࠍ⸳⟎ߒߚ㧚ߘᕈࡏ࡯࡞ 1 ୘ࠍᬌ಴ེౝߦኽ౉ߒ㧘㊄ዻ⃿㔚ᭂߦ৻ቯ㔚࿶ࠍߒߡ㧘৻ቯ✢㊂₸ࠍ಴኿ߔࠆࠃ߁ߦ㧘ߘߩࠨ࡯ࡌ࡯ࡔශടߔࠆߎߣߦࠃࠅዉ㔚ᕈࡏ࡯࡞ࠍᶋ਄ߐߖ㧘ߘߩᓟ㧘ᬌ಴࡯࠲ߦࠃࠅ✢Ḯߩ಴ജ⺞ᢛࠍⴕߞߚ㧚಴ജ⺞ᢛߪ㧘࠲ེਛᔃߩ૏⟎㧔ዉ㔚ᕈࡏ࡯࡞ߩ޽ࠆ૏⟎㧕ߢ 64mSv/h ߦߥࠆ࡯ࠥ࠶࠻㔚࿶ࠍ 9.5kV ߦ࿕ቯߒ㧘࠲࡯ࠥ࠶࠻㔚ᵹࠍ⺞ࠃ߁ߦૐࠛࡀ࡞ࠡ࡯㨄✢ࠍዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢᾖ኿▵ߔࠆᣇᴺߢⴕߞߚ㧚ߚߛߒ㧘ᢔੂ㨄✢ߩ᷹ቯߩ႐วߒߡⴕߞߚ㧚ߪ㧘㨄✢߇⋥ធࠨ࡯ࡌ࡯ࡔ࡯࠲߿ᬌ಴ེߦᒰߚࠄߥ޿૏⟎㧔࿑ 3-(a)ߩ B ߩ૏⟎㧕ߦ⒖േߒߡ⺞ᢛࠍⴕߞߚ㧚
5VCIGHQTRNCEKPIFGVGEVQT↪޿ߚ 450B-SI ߪ㧘ᣣᧄຠ⾰଻⸽ᯏ᭴ JQA ߦߡ 9.5ke:TC[YKPFQY $GVJKEMPGUUVǾEQXGTGFYKVJ:TC[RGPGVTCVKPIUJGGV&GVGEVQTV એਅߩૐࠛࡀ࡞ࠡ࡯㨄✢㧔70Ǵm ✢㊂ᒰ㊂₸ߢ 5ǴSv/h એ਄㧕߇㧘᷹ቯߢ߈ࠆࠃ߁ߦᩞᱜߐࠇߡ޿ࠆ㧚ԙߘߩᓟ㧘ᔅⷐ୘ᢙߩዉ㔚ᕈࡏ࡯࡞ࠍᬌ಴ེౝߦኽ౉ߒ
#ߡ㧘㕒㔚ኈ㊂ࠍ৻ቯߦߔࠆߚ߼ᚲቯߩ૏⟎ߢ㧘৻ቯ㔚$࿶ࠍᬌ಴ེߩ㊄ዻ⃿㔚ᭂߦශടߒߡ㧘ዉ㔚ᕈࡏ࡯࡞ࠍᶋ਄ߐߖߡ߆ࠄㆤ⭁▫ౝߩᚲቯߩ૏⟎ߩบߩ਄ߦᬌ಴

5JKGNFKPIEJCODGT INCUUVJKEMPGUUVེࠍ⸳⟎ߒߚ㧚Ԛ.QYGPGTI[:TC[UQWTEG*COCOCVUW2JQVQPKEU%#$.QECVKQPQHFGVGEVQT QTKQPK\CVKQP
EJCODGTUWTXG[OGVGT 8KEVQTGGP$5+ߘߒߡ㧘৻ቯ✢㊂₸ߩ㨄✢ࠍ಴኿ߒߡ㧘ዉ㔚ᕈࡏ࡯࡞(a) Top view߇⪭ਅߔࠆ߹ߢߩᤨ㑆ࠍ᷹ቯߒ㧘ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ࠍ᳞߼ߚ㧚ዏ㧘ታ㛎ߪૐḨᐲⅣႺߢⴕߞߚ߇㧘ߎࠇߪ㧘㊄ዻ⃿㔚ᭂߣ

5JKGNFKPIEJCODGTዉ㔚ᕈࡏ࡯࡞ߦ⫾Ⓧߔࠆ㔚⩄㊂߇ࠊߕ߆ߣ੍ᗐߐࠇߚߩߢ㧘:TC[RGPGVTCVKPIYKPFQY&GVGEVQTḨᐲߦࠃࠆ㔚⩄ߩ࡝࡯ࠢߦၮߠߊᄖੂࠍឃ㒰ߔࠆߚ߼ߢ޽ࠆ㧚4.
4.1

ታ㛎⚿ᨐ෸߮⠨ኤ

.QYGPGTI[:TC[UQWTEGૐࠛࡀ࡞ࠡ࡯㨄✢ㅘㆊࡈࠖ࡞ࡓߩㅘㆊ₸ߩ․ᕈ
ᬌ಴ེߩ⓹᧚ߣߒߡ૶↪ߒߡ޿ࠆૐࠛࡀ࡞ࠡ࡯㨄✢ㅘㆊࡈࠖ࡞ࡓ㧔ࡐ࡝ࠗࡒ࠼᮸⢽㧕ߩ․ᕈߣߒߡ㧘ࡈࠖ࡞ࡓෘߺ෸߮5VCIGHQTRNCEKPIFGVGEVQT౉኿㨄✢✢㊂₸㧔㨄✢ᒝᐲ㧕ߩㅘㆊ₸߳ߩᓇ㗀ࠍ࿑ 4 ෸߮࿑70+6OO(b) Side view

5 ߦߘࠇߙࠇ␜ߔ㧚࿑ 4㧘5 ߢߪ㧘᷹ቯ⓹ࠍ✢Ḯߦะߌߡࠨ࡯
ࡌ࡯ࡔ࡯࠲ࠍ࿑ 3-(a)ߩ A ߩ૏⟎㧔ࠨ࡯ࡌ࡯ࡔ࡯࠲ߩ㔚㔌▫ߩታലਛᔃࡑ࡯ࠢ߇✢Ḯߩ⓹߆ࠄ 250mm ߩ૏⟎㧕ߦ⸳⟎ߒ㧘

࿑ 3 ታ㛎ⵝ⟎ࠨ࡯ࡌ࡯ࡔ࡯࠲ߩ᷹ቯ⓹ߩ⋥೨ߦࡐ࡝ࠗࡒ࠼᮸⢽ࡈࠖ࡞ࡓࠍ

Fig.3 Experimental setup.

⸳⟎ߒߡ㧘ࡈࠖ࡞ࡓ߇ߥ޿႐วߣ޽ࠆ႐วߩ✢㊂₸ࠍ᷹ቯߒߡ㧘ߘߩᲧ߆ࠄㅘㆊ₸ࠍ᳞߼ߚ㧚⴫ 2 ૐࠛࡀ࡞ࠡ࡯㨄✢Ḯߩ઀᭽ࡈࠖ࡞ࡓ߇ෘ޿߶ߤㅘㆊ₸ߪૐਅߔࠆ߇㧘ෘߺߩჇട㊂㧔2

Table 2 Specifications of low energy X-ray source. 4)5Ǵm ψ 175Ǵm㧕ߦᲧߴㅘㆊ₸ߩૐਅ㧔96% ψ 72%㧕ߪዋߥ޿㧔࿑ 4㧕㧚ߎࠇߪ㧘ㅘḨ㒐ᱛߩߚ߼ߦࡈࠖ࡞ࡓෘߺࠍෘߊ
ߔࠆߎߣ߇น⢻ߢ޽ࠆߎߣࠍ␜ߒߡ޿ࠆ㧚߹ߚ㧘౉኿㨄✢✢㊂₸ߦࠃࠆㅘㆊ₸߳ߩᓇ㗀ߪ߶ߣࠎߤⷰࠄࠇߥ޿㧔࿑ 5㧕㧚૗ࠇ߽㧘ߎߩࡈࠖ࡞ࡓࠍᬌ಴ེߩ⓹᧚ߣߒߡ೑↪ߔࠆ਄ߢ᦭ല㪠㫋㪼㫄㫊㪫㪸㫉㪾㪼㫋 㫍㫆㫃㫋㪸㪾㪼㩷㪫㪸㫉㪾㪼㫋 㪺㫌㫉㫉㪼㫅㫋㩷㪮㫀㫅㪻㫆㫎㩷㫄㪸㫋㪼㫉㫀㪸㫃㩷㪠㫉㫉㪸㪻㫀㪸㫋㫀㫆㫅㩷㪸㫅㪾㫃㪼㩷㪯㪄㫉㪸㫐㩷㪼㫅㪼㫉㪾㫐ߥ․ᕈߢ޽ࠆ㧚- 3 -㪪㫇㪼㪺㫀㪽㫀㪺㪸㫋㫀㫆㫅㫊䌾㩷㪤㪸㫏㪅 㪐㪅㪌㫂㪭䇭㪛㪚㩷㩷㩷䌾㩷㪤㪸㫏㪅㩷㪉㪇㪇㱘㪘㩷㪙㪼㫉㫐㫃㫃㫀㫌㫄㪃㩷㪇㪅㪌㫄㫄㩷㫋㪿㫀㪺㫂㫅㪼㫊㫊㩷㪸㫇㫇㫉㫆㫏㪅㩷㪈㪉㪇㩷㪻㪼㪾㫉㪼㪼㩷㩿㪺㫆㫅㪼㩷㪸㫅㪾㫃㪼㪀㪉䌾㪐㪅㪌㫂㪼㪭㪃㩷㫇㪼㪸㫂㩷㪌㫂㪼㪭

53

簡易型低エネルギーＸ線検出器の開発（鈴木政典ら）◲ᤃဳૐࠛࡀ࡞ࠡ࡯㨄✢ᬌ಴ེߩ㐿⊒㧔㋈ᧁ᡽ౖࠄ㧕
2GPGVTCVKQPQHNQYGPGTI[:TC[U=?

࿑ 6 ࠃࠅ㧘⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ߣ㊄ዻ⃿㔚ᭂ߳ߩශട㔚࿶㧔ߔߥࠊߜ㧘ዉ㔚ᕈࡏ࡯࡞߳ߩශട㔚࿶㧕ߣߪ߶߷Ყ଀㑐ଥߦ޽ࠆߎߣ߇ಽ߆ࠆ㧚(1)ᑼߦ␜ߔࠃ߁ߦ㧘ዉ㔚ᕈࡏ࡯࡞ߩ㕒㔚ኈ㊂ C ߇߶߷৻ቯߢ޽ࠆߩߢ㧘㔚࿶ශടߦࠃߞߡዉ㔚ᕈࡏ࡯࡞ߦ⫾Ⓧߔࠆ㔚⩄㊂ Q ߇ශട㔚࿶ V ߦᲧ଀ߔࠆ㧚ߔߥࠊߜ㧘ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ߣዉ㔚ᕈࡏ࡯
࡞ߦ⫾Ⓧߒߚ㔚⩄㊂ߪ߶߷Ყ଀ߔࠆߎߣ߇ಽ߆ࠆ㧚Q = CV






&QUG TCVG YKVJQWV HKNOU  O5XJ(1)



4.3

ⶄᢙ୘ߩዉ㔚ᕈࡏ࡯࡞ߦࠃࠆᬌ಴ᗵᐲߩะ਄

6JKEMPGUUQH:TC[RGPGVTCVKPIHKNO 2QN[KOKFG =ǴO?

࿑ 4 ૐࠛࡀ࡞ࠡ࡯㨄✢ㅘㆊࡈࠖ࡞ࡓෘߺߩㅘㆊ₸߳ߩᓇ㗀࿑ 7 ߪ㧘1㧘2㧘4 ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍߘࠇߙࠇ৻ᐲߦ㕒㔚Fig.4 Influence on penetration by low energy X-ray᳇ജߢᶋ਄ߐߖ㧘ᬌ಴ེਛᔃߩ૏⟎ߢ 64mSv/h ߦߥࠆࠃ߁ߦ

penetrating film thickness.

ૐࠛࡀ࡞ࠡ࡯㨄✢ࠍᾖ኿ߒߚᤨߩ㧘ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ
߹ߢߩⓍ▚✢㊂ߣዉ㔚ᕈࡏ࡯࡞ߩ⪭ਅ୘ᢙߣߩ㑐ଥࠍ␜ߒߡ
2GPGVTCVKQPQHNQYGPGTI[:TC[U=?

޿ࠆ㧚ߚߛߒ㧘ශട㔚࿶ߪ-6kV㧘㨄✢ㅘㆊࡈࠖ࡞ࡓߩෘߺߪ
25Ǵm ߢ޽ߞߚ㧚ᶋ਄ߒߚⶄᢙ୘ߩዉ㔚ᕈࡏ࡯࡞ߪ㧘౉኿ߒߚૐࠛࡀ࡞ࠡ࡯㨄✢ߩ㔚㔌૞↪ߢ↢ᚑߒߚᱜ⽶ࠗࠝࡦߦࠃࠅਛ๺ߐࠇ㧘ਅ߆ࠄ㗅⇟ߦ⪭ਅߔࠆ㧚ߘߩ⪭ਅߒߚ୘ᢙࠍࠞ࠙ࡦ࠻ߔࠆߎߣߦࠃࠅ㧘࿑ 7 ߦ␜ߔࠃ߁ߦ㧘౉኿ߒߚૐࠛࡀ࡞ࠡ࡯㨄✢ߩⓍ▚✢㊂ࠍ⚦߆ߊ⺒ขࠆߎߣ߇ߢ߈ࠆ㧚ዉ㔚ᕈࡏ࡯࡞ߩ୘ᢙ߇ᄙ



-G[(KNO VJKEMPGUUǴOǴOߊߥࠆߣ㧘ૐࠛࡀ࡞ࠡ࡯㨄✢ߩⓍ▚✢㊂ࠍࠃࠅᱜ⏕ߦᬌ಴ߢ߈ࠆߎߣ߇ಽ߆ࠆ㧚ߚߛߒ㧘୘ᢙ߇ᄙㆊ߉ࠆߣ৻⇟ਅߩዉ㔚

&QUGTCVGDGHQTGRGPGVTCVKPIHKNOU=O5XJ?

ᕈࡏ࡯࡞ߦߘߩ਄ߩዉ㔚ᕈࡏ࡯࡞ߩ㊀ߐ߇ߔߴߡដ߆ࠆߚ߼
࿑ 5 ౉኿㨄✢✢㊂₸㧔㨄✢ᒝᐲ㧕ߩㅘㆊ₸߳ߩᓇ㗀ᶋ਄ߢ߈㔍ߊߥࠆ㧚

Fig.5 Influence on penetration by projected X-ray dose rate (X-ray4.4ᬌ಴ེߦ౉኿ߔࠆ㨄✢ߩ✢㊂₸㧔㨄✢ᒝᐲ㧕ߩᓇintensity).

㗀⃿㔚ᭂߦ-8kV ࠍශടߔࠆߎߣߦࠃࠅ㧘4 ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍ+PVGITCVGFFQUG=O5X?

࿑ 8 ߪ㧘ᬌ಴ེౝߦ 4 ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍኽ౉ߒߡ㧘㊄ዻᶋ਄ߐߖߚᓟ㧘ᬌ಴ེਛᔃߩ૏⟎ߢ 0.3㧘2㧘8㧘32㧘128mSv/h ߦߥࠆࠃ߁ߦૐࠛࡀ࡞ࠡ࡯㨄✢ࠍߘࠇߙࠇᾖ኿ߒߡ㧘ߘࠇ
ߙࠇߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙߣߩ㑐ଥࠍ᳞߼ߚ߽ߩߢ޽ࠆ㧚ߘࠇߙࠇߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙߪ߶߷Ყ଀㑐ଥߢ㧘ߘߩࠣ







࡜ࡈߪ⋥✢ߦㄭ޿㧚߹ߚ㧘ߘߩฦ⋥✢߇߶߷৻⥌ߒߡ޿ࠆߎߣ߆ࠄ㧘౉኿ߔࠆૐࠛࡀ࡞ࠡ࡯㨄✢ߩ✢㊂₸㧔㨄✢ᒝᐲ㧕ߦ

ࠃࠆⓍ▚✢㊂ߣ⪭ਅ୘ᢙߩ㑐ଥ߳ߩᓇ㗀ߪዋߥ޿ߎߣ߇ಽ߆

%JCTIGFXQNVCIGQPVJGOGVCNNKEURJGTKECNGNGEVTQFG=M8?

ࠆ㧚ߎߩߎߣߪ㧘੍߼ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙߩ㑐ଥߩࠣ࡜ࡈࠍ᳞߼ߡ߅ߌ߫㧘ߎߩᬌ಴ེ߇㧘࿑ 6 ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ߣ㊄ዻ⃿㔚ᭂ౉኿ߔࠆૐࠛࡀ࡞ࠡ࡯㨄✢ߩⓍ▚✢㊂ࠍ᭎⇛ߢߪ޽ࠆ߇ᬌ಴ߦශടߔࠆ㔚࿶ߣߩ㑐ଥߢ߈ࠆߎߣࠍ⃻ߒߡ޿ࠆ㧚Fig.6 Relationship between the integrated dose before one
conductive sphere will drop and the charged voltage on the metallic
spherical electrode.

- 4 -

54

静電気学会誌

4.5

第 28 巻

第 1 号（2004）ᢔੂߒߚૐࠛࡀ࡞ࠡ࡯㨄✢ߩᬌ಴+PVGITCVGFFQUG=O5X?

࿑ 9 ߪ㧘ᬌ಴ེߦ⋥㆐ߒߚૐࠛࡀ࡞ࠡ࡯㨄✢ߩ✢㊂ࠍᬌ಴ߒߚ႐วߣᢔੂ㨄✢ߩ✢㊂ࠍᬌ಴ߒߚ႐วߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙߩ㑐ଥࠍ␜ߒߡ޿ࠆ㧚ታ㛎ߢߪ㧘ᬌ಴ེౝߦ 4 ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍኽ౉ߒߡ㧘㊄ዻ⃿㔚ᭂߦ-8kV ࠍශടߔࠆߎߣߦࠃࠅ㧘4 ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍᶋ਄ߐߖߚᓟ㧘ᬌ಴ེਛᔃߩ૏⟎ߢ⋥㆐㨄✢ߣᢔੂ㨄✢ߩ✢㊂₸߇ߘࠇߙࠇ 0.3mSv/h ߦߥࠆࠃ߁ߦᾖ኿ߒߡ㧘ߘࠇߙࠇߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙߣߩ㑐ଥࠍ᳞߼ߚ㧚

࿑ 9 ࠃࠅ㧘⋥㆐㨄✢ߣᢔੂ㨄✢ߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙߩ㑐

0WODGTUQHFTQRRGFEQPFWEVKXGURJGTGUଥߩࠣ࡜ࡈߪ㧘߶߷৻⥌ߒߡ޿ࠆߎߣ߇ಽ߆ࠆ㧚ߔߥࠊߜ㧘(a) 1 Sphereߎࠇߪ㧘ߎߩᬌ಴ེ߇㧘ࠦࡦࡊ࠻ࡦᢔੂߩࠃ߁ߦᢔੂߒߡૐߊߥߞߚࠛࡀ࡞ࠡ࡯ߩ㨄✢߽㧘↪޿ߚ㔚㔌▫ᑼࠨ࡯ࡌ࡯ࡔ࡯࠲ߣห╬ߦᬌ಴น⢻ߢ޽ࠆߎߣࠍ␜ߒߡ޿ࠆ㧚↪޿ߚࠨ࡯ࡌ࡯ࡔ࡯࠲ߪ㧘⓹᧚ߣߒߡ㧘ෘߐ 0.0123mm ߩࡐ࡝ࠛ࠴࡟ࡦ࠹+PVGITCVGFFQUG=O5X?

࡟ࡈ࠲࡟࡯࠻ࡈࠖ࡞ࡓ㧔Mylar㧘⾰㊂ᷫᒙଥᢙ㧦54.7cm2/g at
4keV㧕ࠍ૶↪ߒߡ޿ࠆߩߢ㧘4keV ߩૐࠛࡀ࡞ࠡ࡯㨄✢ߢ߽ 93㧑ㅘㆊߢ߈ࠆ㧚ߎࠇߪ㧘↪޿ߚࠨ࡯ࡌ࡯ࡔ࡯࠲ߪ㧘4keV ߩૐࠛࡀ࡞ࠡ࡯㨄✢ߢ߽ᬌ಴น⢻ߢ޽ࠆߎߣࠍ␜ߒߡ޿ࠆ㧚ᓥߞߡ㧘ߎߩᬌ಴ེ߽㧘4keV ߩૐࠛࡀ࡞ࠡ࡯㨄✢ߩᬌ಴߇น⢻ߢ޽ࠆߎߣ߇ಽ߆ࠆ㧚ዏ㧘Mylar ࡈࠖ࡞ࡓߩㅘㆊ₸ߩ⸘▚ߦ↪޿ߚ⾰㊂ᷫᒙଥᢙߪ㧘National Institute of Standards and Technology in USA ߩ X-ray Attenuation Databases ߆ࠄᒁ↪ߒߚ㧚
4.6

0WODGTU QH FTQRRGFEQPFWEVKXGURJGTGU(b) 2 Spheresᬌ಴▸࿐ߩ⺞ᢛ࿑ 10 ߪ㧘ᬌ಴ེߩ㊄ዻ⃿㔚ᭂߦ㧘-6㧘-8㧘-10kV ࠍශടߒߚᤨߩߘࠇߙࠇߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙߩ㑐ଥࠍ␜ߒߡ޿ࠆ㧚ߚߛߒ㧘ߎߩታ㛎ߪ㧘4 ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍᶋ਄ߐߖ㧘ᬌ಴
+PVGITCVGFFQUG=O5X?

ེਛᔃߩ૏⟎ߢ 32mSv/h ߦߥࠆࠃ߁ߦૐࠛࡀ࡞ࠡ࡯㨄✢ࠍᾖ኿ߒߡⴕߞߚ㧚ฦශട㔚࿶ߦ߅ߌࠆⓍ▚✢㊂ߣ⪭ਅ୘ᢙߩ㑐ଥ䈲䋬䈾䈿Ყ଀㑐ଥ䈪䋬䈠䈱䉫䊤䊐䈲⋥✢䈮ㄭ䈇䋮䉁䈢䋬䈠䈱⋥✢䈱௑䈐䈲䋬䈾䈿৻⥌䈚䈩䈇䉎䋮䈜䈭䉒䈤䋬࿑ 6 䈎䉌䉅੍ᗐ䈘䉏䉎䈖䈫䈣䈏䋬㊄ዻ⃿㔚ᭂ䈻䈱ශട㔚࿶䉕ᄌ䈋䉎䈖䈫䈮䉋䉍䋬䈖䈱ᬌ಴ེ䈱ᬌ಴▸࿐䉕⺞ᢛ䈪䈐䉎䈖䈫䈏ಽ䈎䉎䋮

5.





0WODGTUQHFTQRRGFEQPFWEVKXGURJGTGU߹ߣ߼(c) 4 Spheres਄ㅀߩࠃ߁ߦ㧘⠨᩺ߒߚⵝ⌕ဳૐࠛࡀ࡞ࠡ࡯㨄✢ᬌ಴ེߩᬌ⸽ࠍⴕߞߚ㧚ߘߩ⚿ᨐ᣿ࠄ߆ߦߥߞߚએਅߩ੐㗄ࠃࠅ㧘੍߼ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙߩ㑐ଥ

࿑ 7 ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ߣዉ㔚ᕈࡏ࡯ߩࠣ࡜ࡈࠍ᳞߼ߡ߅ߌ߫㧘⪭ਅߒߚዉ㔚ᕈࡏ࡯࡞ߩ୘ᢙ߆ࠄ㧘࡞ߩ⪭ਅ୘ᢙߣߩ㑐ଥૐࠛࡀ࡞ࠡ࡯ᢔੂ㨄✢ߩ✢㊂ࠍ◲ᤃ⊛ߦᬌ಴ߔࠆߎߣ߇น⢻Fig.7 Relationship between the integrated dose before conductiveߢ޽ࠆߎߣࠍ⏕⹺ߒߚ㧚

spheres will drop and the number of them dropped.

- 5 -簡易型低エネルギーＸ線検出器の開発（鈴木政典ら）◲ᤃဳૐࠛࡀ࡞ࠡ࡯㨄✢ᬌ಴ེߩ㐿⊒㧔㋈ᧁ᡽ౖࠄ㧕-G[&QUG TCVG

 O5XJO5XJO5XJO5XJO5XJ+PVGITCVGFFQUG=O5X?

+PVGITCVGFFQUG=O5X?

55





-G[&KTGEVN[TGCEJKPI:TC[U5ECVVGTGF:TC[U&QUG TCVG  O5XJ
0WODGTUQHFTQRRGFEQPFWEVKXGURJGTGU0WODGTUQHFTQRRGFEQPFWEVKXGURJGTGU

࿑ 8 ᬌ಴ེߦ౉኿ߔࠆ㨄✢ߩ✢㊂₸㧔㨄✢ᒝᐲ㧕ߩᓇ㗀

࿑ 9 ᬌ಴ེߦ⋥㆐ߒߚૐࠛࡀ࡞ࠡ࡯㨄✢ߩ✢㊂ࠍᬌ಴ߒߚ

Fig.8 Influence of dose rate (X-ray intensity) of X-rays႐วߣᢔੂ㨄✢ߩ✢㊂ࠍᬌ಴ߒߚ႐วߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙ

projected to the detector.

ߣߩ㑐ଥ
Fig.9 Relationship between the integrated dose by detecting
directly reaching X-rays and scattered X-rays doses, and theԘ ᬌ಴ེߩ⓹᧚ߩࡐ࡝ࠗࡒ࠼᮸⢽ࡈࠖ࡞ࡓߪ㧘ૐࠛࡀ࡞ࠡ࡯

number of spheres dropped.

㨄✢ߩㅘㆊ₸߇ᄢ߈ߊ㧘౉኿㨄✢✢㊂₸㧔㨄✢ᒝᐲ㧕ߦࠃࠆㅘㆊ₸߳ߩᓇ㗀ߪ߶ߣࠎߤߥ޿㧚ԙ ዉ㔚ᕈࡏ࡯࡞߇⪭ਅߔࠆ߹ߢߩⓍ▚✢㊂ߣዉ㔚ᕈࡏ࡯࡞-G[Ԛ ⶄᢙ୘ߩዉ㔚ᕈࡏ࡯࡞ࠍ↪޿ࠆߎߣߦࠃࠅ㧘౉኿ߒߚૐࠛࡀ࡞ࠡ࡯㨄✢ߩⓍ▚✢㊂ࠍࠃࠅ⚦߆ߊ⺒ขࠆߎߣ߇ߢ߈ࠆ㧚ԛ Ⓧ▚✢㊂ߣ⪭ਅ୘ᢙߪ㧘߶߷Ყ଀㑐ଥߢ㧘ߘߩࠣ࡜ࡈߪ⋥✢ߦㄭ޿㧚߹ߚ㧘ߘߩⓍ▚✢㊂ߣ⪭ਅ୘ᢙߩ㑐ଥߪ㧘౉኿ߔࠆૐࠛࡀ࡞ࠡ࡯㨄✢ߩ✢㊂₸㧔㨄✢ᒝᐲ㧕ߦࠃࠆᓇ㗀ࠍ+PVGITCVGFFQUG=O5X?

ߦ⫾Ⓧߒߚ㔚⩄㊂ߪ߶߷Ყ଀ߒߡ޿ࠆ㧚߶ߣࠎߤฃߌߥ޿㧚%JCTIGF XQNVCIG M8M8M8Ԝ ߎߩᬌ಴ེߪ㧘4keV ߩૐࠛࡀ࡞ࠡ࡯ᢔੂ㨄✢ߢ߽ᬌ಴น⢻ߢ޽ࠆ㧚
0WODGTUQHFTQRRGFEQPFWEVKXGURJGTGUԝ ㊄ዻ⃿㔚ᭂ߳ߩශട㔚࿶ࠍᄌ߃ࠆߎߣߦࠃࠅ㧘ߎߩᬌ಴ེ࿑ 10 Ⓧ▚✢㊂ߣ㊄ዻ⃿㔚ᭂߦ⒳‫ߩޘ‬㔚࿶ࠍශടߒߚߣ߈ߩߩᬌ಴▸࿐ࠍ⺞ᢛߢ߈ࠆ㧚ዉ㔚ᕈࡏ࡯࡞ߩ⪭ਅ୘ᢙߣߩ㑐ଥ
Fig.10 Relationship between the integrated dose and theෳ⠨ᢥ₂number of spheres dropped when charging different voltage on1) ㋈ᧁ᡽ౖ, ๺ᴰ⾆᥍, ㌵ᴦᐘ, ⍹Ꮉ᣽⟵㧦ࠢ࡝࡯ࡦ࠹ࠢࡁࡠthe metallic spherical electrode.

ࠫ࡯, 10(2000)182) ᵿ᧻ࡎ࠻࠾ࠢࠬ㧦ࡈࠜ࠻ࠗࠝ࠽ࠗࠩ L9490 ขᛒ⺑᣿ᦠ3) Ⓑ⪲ੳ,ጤᵄ⨃㧦╙ 30 ࿁ᣣᧄ଻㒾‛ℂቇળ੍Ⓜ㓸, p.3, ᣣᧄ଻㒾‛ℂቇળ㧔1995㧕4) ᵿ᧻ࡎ࠻࠾ࠢࠬ㧦エ㨄✢Ḯ C4870 ขᛒ⺑᣿ᦠ- 6 -