㧗ฟຊࣃࣝࢫ࣮ࣞࢨ࣮㉸㡢Ἴࢆ⏝࠸ࡓ᥋ྜ⏺㠃ࡢ⑂ປᙉᗘホ౯ࢩࢫࢸ࣒ࡢ㛤Ⓨ௦⾲◊✲⪅㸸 ୰ኸ኱Ꮫ⌮ᕤᏛ㒊 ⢭ᐦᶵᲔᕤᏛ⛉ ᩍᤵ ⡿ὠ ᫂⏕ඹྠ◊✲⪅㸸 ࢥࣟࣥࣅ࢔኱Ꮫ ᆅ⌫⎔ቃᕤᏛ⛉ ᩍᤵ Xi Chen1㸬⥴ゝྛ✀ࢥ࣮ࢸ࢕ࣥࢢᮦࡸ␗✀᥋ྜᮦᩱࡣ㸪ᵝࠎ࡞ᵓ㐀ᮦᩱࡢ㧗ᶵ⬟໬࡟㈉⊩ࡋ࡚࠾ࡾ㸪౛࠼ࡤࢥ࣮ࢸ࢕ࣥࢢᮦࡣ⪏ᦶ⪖ᛶࡸᦾືᛶࡢྥୖ㸪㧗 ࡸ⭉㣗࡞࡝࡬ࡢ⪏⎔ቃᛶᨵၿ࡞࡝ࡀᣲࡆࡽࢀࡿࡀ㸪⓶⭷ࡢᙉᗘࡸᐦ╔ຊࡀᮦᩱ඲యࡢᑑ࿨ࢆỴᐃࡍࡿࡓࡵ㸪ᵓ㐀ᮦᩱࡢ㛗ᑑ࿨໬ࡸ⿵ಟ࡟ࡼࡿᘏ࿨໬࡟ᑐࡋ࡚ಙ㢗ᛶࡢ㧗࠸ࢥ࣮ࢸ࢕ࣥࢢ⭷ࡸ᥋ྜᢏ⾡ࡢ㛤Ⓨࡀ୙ྍḞ࡛࠶ࡿ㸬ࡋࡓࡀࡗ࡚㸪ࢥ࣮ࢸ࢕ࣥࢢ⭷ࡸ␗✀ᮦᩱ᥋ྜࡢ⏺㠃ᙉᗘ࡞ࡽࡧ࡟ࡑࡢ⑂ປᙉᗘ࡟㛵ࡍࡿ◊✲ࡀ㔜せ࡛࠶ࡿ㸬ࡑࡇ࡛㸪ᮏ◊✲࡛ࡣᙉຊ࡞ࣃࣝࢫ࣮ࣞࢨ࣮ㄏ㉳࡟ࡼࡿ㉸㡢Ἴࢆ฼⏝ࡋࡓ᪂ࡓ࡞㠀᥋ゐᘧ⏺㠃ᙉᗘホ౯ἲࢆ☜❧ࡋ㸪⏺㠃⑂ປᙉᗘࡢホ౯ἲ࡬࡜ᣑᙇࡍࡿࡇ࡜
ࢆ┠ⓗ࡜ࡋࡓ㸬ᮏሗ࿌࡛ࡣ๓༙ࡢᡂᯝෆᐜ࡟㔜Ⅼࢆ⨨ࡁ㸪㕲㗰ᮦᩱ⾲㠃࡟⏕ᡂࡍࡿ㓟໬⓶⭷ࢆᑐ㇟࡜ࡋ࡚ホ౯ἲࡢ☜❧ࢆ┠ᣦࡋࡓෆᐜࢆグࡍ㸬Ⅳ⣲㗰࡞࡝ࡢ୍⯡ⓗ࡞㕲㗰ᮦᩱࡣ㧗 ⎔ቃ࡟࠾࠸࡚㓟໬⓶⭷ࢆᙧᡂࡋࡸࡍࡃ㸪࢚࣮ࣟࢪࣙࣥࢥ࣮ࣟࢪࣙࣥࡸ㸪୙༑ศ࡞ࢹࢫࢣ࣮ࣜࣥࢢ࡟ࡼࡿࢫࢣ࣮ࣝയ㸪ࣈࣜࢫࢱࣜࣥࢢ࡞࡝㓟໬⓶⭷⏕ᡂ࡟㛵ࡍࡿᦆയ஦౛ࡀᩘከࡃሗ࿌ࡉࢀ࡚࠸ࡿ㸬ࡋࡓࡀࡗ࡚㸪㕲㗰ᮦᩱࡢಙ㢗ᛶࡢ୍ࡘ࡜ࡋ࡚㓟໬⓶⭷ࡢᐦ╔ᙉᗘࡍ࡞ࢃࡕ⏺㠃ᙉᗘࢆᐃ㔞ⓗ࡟ホ౯ࡍࡿࡇ࡜ࡣ㔜せ࡛࠶ࡿ㸬⏺㠃ᙉᗘࢆホ౯ࡍࡿᡭἲ࡜ࡋ࡚㸪ࣆࣥᘬᙇヨ㦂㸪ࢫࢡࣛࢵࢳヨ㦂㸪ᅄⅬ᭤ࡆヨ㦂㸪࡞࡝ᩘከࡃࡢᡭἲࡀᥦ᱌ࡉࢀ࡚࠸ࡿ㸬ࡋ࠿ࡋ࡞ࡀࡽ㸪ࡇࢀࡽࡢᡭἲࡣ㸪ᐃ㔞ᛶࡸಙ㢗ᛶ࡟Ḟࡅࡿሙྜࡀ࠶ࡾ㸪⏺㠃ᙉᗘ࡟࠾ࡅࡿᬑ㐢ⓗᡭἲ࡜ࡋ࡚༑ศ࡜ࡣゝ࠸㞴࠸㸬ࡑࡢ⌮⏤࡜ࡋ࡚㸪ࡇࢀࡽࡢᡭἲࡣ᥋ゐᘧ࡛㸪 ᐃ࡟࠾࠸࡚⓶⭷ഃࡢຊᏛ≉ᛶ㸦◳ࡉࡸࣖࣥࢢ⋡㸧ࡀᙳ㡪ࡋ࡚ࡋࡲ࠺ࡓࡵ㸪┿ࡢ⏺㠃ᙉᗘࢆồࡵࡿࡢࡀᅔ㞴࡜࡞ࡗ࡚࠸ࡿࡓࡵ࡛࠶ࡿ㸬ࡑࡇ࡛㸪᪂ࡓ࡞⏺㠃ᙉᗘホ౯ᡭἲ࡜ࡋ࡚࣮ࣞࢨ࣮ㄏ㉳㉸㡢Ἴࢆ⏝࠸ࡓ◊✲ࡀ⌧ᅾ㐍ࡵࡽࢀ࡚࠸ࡿ(1)(2)㸬ࡇࡢᡭἲࡣ⓶⭷ࢆ᭷ࡍࡿᇶᮦ⾲㠃࡟ࣃࣝࢫ࣮ࣞࢨ࣮ࢆ↷ᑕࡋ㸪ᮦᩱෆ㒊࡟ᙎᛶἼࢆບ㉳ࡍࡿࡇ࡜࡛ࡣࡃ㞳ࢆᘬࡁ㉳ࡇࡍᡭἲ࡛࠶ࡾ㸪㠀᥋ゐ࠿ࡘከᵝ࡞⓶⭷࡟ᑐࡋ࡚ヨ㦂ࢆ⾜࠼ࡿࡇ࡜࠿ࡽὀ┠ࡉࢀ࡚࠸ࡿ㸬ࡑࡇ࡛㸪ᮏ◊✲࡛ࡣ࣮ࣞࢨ࣮ㄏ㉳㉸㡢Ἴࢆ⏝࠸࡚㕲㗰ᮦᩱ⾲㠃࡟⏕ᡂࡉࢀࡓ㓟໬⓶⭷ࡢᐦ╔ᙉᗘཬࡧ⏺㠃◚ቯ㠌ᛶ್ࡢホ౯ࢆ⾜ࡗࡓ㸬ࡑࢀ࡟ࡼࡾ㸪⏕ᡂࡉࢀࡓ㓟໬⓶⭷ࡢ⤌⧊ࡀ⓶⭷⏺㠃ࡢᙉᗘ≉ᛶ࡟ཬࡰࡍᙳ㡪ࢆ᫂ࡽ࠿࡟ࡋࡓ㸬2㸬⏺㠃ᙉᗘホ౯2㸬1 ࣮ࣞࢨ࣮ㄏ㉳㉸㡢Ἴἲ
Fig. 1 ࡟࣮ࣞࢨ࣮↷ᑕヨ㦂ࡢᴫせᅗࢆ♧ࡍ㸬ᮏᡭἲ࡛ࡣ㸪ࣞࣥࢬ࡟ࡼࡾ㞟ගࡋࡓࣃࣝࢫ࣮ࣞࢨ࣮㸦Ἴ㛗 1064 nm㸪ࣃࣝࢫᖜ 3-5 ns㸧ࢆヨ㦂∦⫼㠃࡟඘ሸࡋࡓ࢚ࢿࣝࢠ࣮྾཰ᒙ㸦ࢢ࣮ࣜࢫᒙ㸧࡟↷ᑕࡍࡿࡇ࡜࡛࢔ࣈ࣮ࣞࢩࣙࣥ⌧㇟ࢆㄏⓎࡉࡏࡿ㸬ࢢ࣮ࣜࢫᒙࡀ㸪࣮ࣞࢨ࣮㸫㸫ࡢᣢࡘ㧗࠸࢚ࢿࣝࢠ࣮ࢆ྾཰ࡋࣉࣛࢬ࣐ࡲ࡛ᛴ⃭࡟≧ែኚ໬ࡍࡿࡇ࡜࡟ࡼࡾ㸪ᛴ⃭࡞య✚⭾ᙇࢆᘬࡁ㉳ࡇࡋ㸪ᇶᮦෆ㒊࡟ᅽ⦰ᡂศࡢᙎᛶἼࢆບ㉳ࡍࡿ㸬ࣃࣝࢫ࣮ࣞࢨ࣮ࡢ❧ୗࡾ࡜࡜ࡶ࡟ࣉࣛࢬ࣐ࡣయ✚཰⦰ࢆ㉳ࡇࡋ㸪ࡑࢀ࡟క࠺ᇶᮦࡢᙎᛶᅇ᚟࡟ࡼࡗ࡚ᘬᙇᛂຊࡀ⏕ᡂࡉࢀࡿ㸬ࡇ࠺ࡋ࡚ບ㉳ࡉࢀࡓᙎᛶἼࡣᅽ⦰Ἴࢆ୺࡜ࡋ࡚ఏ᧛ࡍࡿࡀ㸪ᇶᮦ࠿ࡽ⓶⭷࡬࡜ఏ᧛ࡋ᭱⾲㠃࡛⮬⏤➃཯ᑕࡍࡿ㝿࡟఩┦ࡀ㏫㌿ࡋ㸪⭾ᙇἼ㸦ᘬᙇἼ㸧࡜ࡋ࡚෌ࡧ⓶⭷/ᇶᮦෆ࡟ఏ᧛ࡍࡿ㸬ࡇࢀ࡟ࡼࡾ㸪ᮦᩱෆ㒊࡛ࡣᙎᛶἼࡢ཯ᑕ࣭ᖸ΅ࡀⓎ⏕ࡋ㸪኱ࡁ࡞ᛂຊࢆ⏺㠃࡟௜୚ࡍࡿࡇ࡜ࡀฟ᮶ࡿ㸬ࡑࡋ࡚⏺㠃࡟௜୚ࡉࢀࡓᛂຊࡀ㸪ᮦᩱᅛ᭷ࡢ⏺㠃ᙉᗘ࡟฿㐩ࡍࡿ࡜ࡣࡃ㞳ࡀⓎ⏕ࡍࡿ㸬ࡲࡓᮏᡭἲ࡛ࡣ㸪ࡣࡃ㞳Ⓨ⏕ࢱ࢖࣑ࣥࢢࡢྠᐃࡸᩘ್ゎᯒ࡟ࡼࡿṇ☜࡞⏺㠃ᙉᗘ᥎ᐃࢆ⾜࠺ࡓࡵ࡟㸪⓶⭷᭱⾲㠃ࡢ㠃እኚ఩Ἴᙧࢆ࣮ࣞࢨ࣮㉸㡢Ἴᖸ΅ィ࡟ࡼࡾィ ࡋࡓ㸬

Fig. 1 Experimental setup of laser irradiating technique2㸬2 ヨ㦂∦ࡢసᡂ౪ヨᮦࡣ㸪ᕷ㈍ࡉࢀ࡚࠸ࡿ୍⯡ᵓ㐀⏝ᅽᘏ㗰ᮦ㸦SS400㸧ࢆ 50 mm×75 mm×3 mm ࡢࢧ࢖ࢬ࡟ຍᕤࡋࡓࡶࡢࢆ౑⏝ࡋ㸪700°C ࡢ኱Ẽ⅔࡛㧗 㓟໬ࡉࡏࡿࡇ࡜࡟ࡼࡾ㓟໬⓶⭷ࡢసᡂࢆ⾜ࡗࡓ㸬ᮏ◊✲࡛ࡣ㸪700°C ࡢ኱Ẽ⅔୰ࡢຍ⇕᫬㛫ࢆ 20 ศ࡜ 120 ศࡢ 2 ࣃࢱ࣮ࣥ࡟ศࡅ㸪ࡑࢀࡒࢀࡢ᫬㛫ಖᣢࡋࡓᚋ㸪✵෭ࡋ࡚ᐊ ࡲ࡛ᡠࡍࡇ࡜࡛㸪2 ✀㢮ࡢ␗࡞ࡿ㧗㓟໬᮲௳࡛ࡢ㓟໬⓶⭷సᡂࢆ⾜ࡗࡓ㸬ᮏᮦᩱࢆ 570°C ௨ୖ࡛ຍ⇕ࡋࡓሙྜ㸪㧗 㓟໬ࡸඹᯒኚែࢆ㉳ࡇࡍࡇ࡜࡛㸪࢘ࢫࢱ࢖ࢺ㸦‫ܱ݁ܨ‬㸧㸪࣐ࢢࢿࢱ࢖ࢺ㸦‫݁ܨ‬ଷ ܱସ 㸧㸪࣐࣊ࢱ࢖ࢺ㸦‫݁ܨ‬ଶ ܱଷ 㸧࠿ࡽ࡞ࡿከᒙᵓ㐀ࢆ᭷ࡍࡿ㓟໬⓶⭷ࢆ⏕ᡂࡍࡿࡇ࡜ࡀ▱ࡽࢀ࡚࠸ࡿ(3)㸬Fig. 2(a)࠾ࡼࡧ(b)࡟㓟໬⓶⭷ࡢ᩿㠃ࢆほᐹࡋࡓ SEM ⏬ീࢆ♧ࡍ㸬ࡇࡢほᐹ⤖ᯝ࠿ࡽ㸪㓟໬⓶⭷ࡣຍ⇕᫬㛫 20

ศ࡜120 ศ࡝ࡕࡽ࡟࠾࠸࡚ࡶ‫݁ܨ࡜ܱ݁ܨ‬ଷ ܱସ ࠿ࡽ࡞ࡿከᒙᵓ㐀ࢆ᭷ࡋ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬
Fig. 2(c)࠾ࡼࡧ(d)࡟ຍ⇕᫬㛫 20 ศ࠾ࡼࡧ 120 ศࡢ᩿㠃ᵓ㐀ࡢ࢖ࣛࢫࢺࢆ♧ࡍ㸬ᇶᮦ‫݁ܨ‬ഃ࠿ࡽ‫݁ܨ‬ଷ ܱସ ࢩ࣮࣒㸪‫ܱ݁ܨ‬㸪‫݁ܨ‬ଷ ܱସ ࡢᒙࡀ SEM ീ࠿ࡽࡶ☜ㄆ࡛ࡁࡓ㸬ࡋ࠿ࡋ㸪᪤ ◊✲(4)࡛
ሗ࿌ࡉࢀ࡚࠸ࡿࡼ࠺࡟⾲ᒙ࡟ࡣ㸪‫݁ܨ‬ଶ ܱଷ ࢆ᭷ࡋ࡚࠸ࡿࡣࡎ࡛࠶ࡿࡀ㸪ᮏ SEM ീ࡛ࡣ☜ㄆࡍࡿࡇ࡜ࡀฟ᮶࡞࠿ࡗࡓ㸬ࡇࢀࡣ 1 μm ௨ୗ࡛㠀ᖖ࡟ⷧ࠸ࡓࡵ࡜ᛮࢃࢀࡿ㸬Table 1 ࡟ྛ⭷㸫㸫ཌࡢ ᐃ⤖ᯝࢆ♧ࡍ㸬ࡑࡢ⤖ᯝ㸪20 ศຍ⇕ࡋࡓヨ㦂∦࡟ẚ࡭࡚ 120 ศࡢヨ㦂∦࡛ࡣ㸪ࡍ࡭࡚ࡢᒙ࡟࠾࠸࡚⭷ཌࡢቑຍࡀ☜ㄆࡉࢀࡓ㸬

Fig. 2 SEM observations of cross-sectional oxide films for (a)700°C-20 min and(b)700°C-120 min. Schematic of cross-section of films of 700°C-20 min(c) and700°C-120 min(d)Table 1 Thickness of oxide films
Heatingcondition
700°C 20min
700°C 120min‫݁ܨ‬ଷ ܱସ [μm]8.89±1.13‫݁ܨ‬ଷ ܱସ [μm]Total thickness

1.66±0.321‫[ ܱ݁ܨ‬μm]

3.25±0.532

13.8±1.98

2.78±1.46

15.8±1.08

10.5±1.73

29.0±4.27[μm]

2㸬3 ᐇ㦂⤖ᯝ2㸬3㸬1 ࡣࡃ㞳⏺㠃ࡢ≉ᐃ
Fig. 2 ࡢ࡜࠾ࡾ㸪ᮏ◊✲࡛సᡂࡋࡓ㓟໬⓶⭷ࡣከᒙᵓ㐀ࢆ᭷ࡋ࡚࠸ࡿࡓࡵ XPS㸦X ⥺ග㟁Ꮚศග㸧࡜࣮ࣞࢨ࣮㉮ᰝᆺ㢧ᚤ㙾ࢆ⏝࠸࡚㸪ࡣࡃ㞳⏺㠃ࡢྠᐃࢆ⾜ࡗࡓ㸬Fig. 3 ࡟ XPS࡟ࡼࡿ⾲㠃໬ྜ≀ࡢศᯒ⤖ᯝࢆ♧ࡍ㸬Fig. 3(a)ࡣ࣮ࣞࢨ࣮↷ᑕヨ㦂๓ࡢࡶࡢ࡛࠶ࡾ㸪‫݁ܨ‬ଶ ܱଷࡢࣆ࣮ࢡࢆ᳨ฟࡋࡓࡇ࡜࠿ࡽ㸪ᮏ◊✲ࡢ㓟໬⓶⭷ࡢ⾲㠃࡟ࡣ SEM ࡛ࡣほᐹࡍࡿࡇ࡜ࡀฟ᮶࡞࠿ࡗࡓ‫݁ܨ‬ଶ ܱଷ ࡀᏑᅾࡍࡿ࡜⪃࠼ࡽࢀࡿ㸬୍᪉㸪Fig. 3(b)࡟ࡣ࣮ࣞࢨ࣮↷ᑕヨ㦂ᚋ࡟㟢ฟࡋࡓࡣࡃ㞳㒊ࢆ᭷ࡍࡿヨ㦂∦ࡢศᯒ⤖ᯝࢆ♧ࡍ㸬ࡑࡢ⤖ᯝ‫݁ܨ‬ଷ ܱସ ࡢࣆ࣮ࢡࡀ☜ㄆ࡛ࡁࡓࡓࡵ㸪࣮ࣞࢨ࣮↷ᑕヨ㦂࡟ࡼࡿࡣࡃ㞳⏺㠃ࡣ‫݁ܨ‬ଶ ܱଷ -‫݁ܨ‬ଷ ܱସ ⏺㠃࠿‫ ܱ݁ܨ‬-‫݁ܨ‬ଷ ܱସ ⏺㠃ࡢ࡝ࡕࡽ࠿࡛࠶ࡿࡇ࡜ࡀ≉ᐃ࡛ࡁࡓ㸬㸫㸫

Fig. 3 Narrow scanning spectra of as filmed and delaminated specimen by using
XPS measurementḟ࡟㸪Fig. 4 ࡟ࡣ࣮ࣞࢨ࣮㉮ᰝᆺ㢧ᚤ㙾ࢆ⏝࠸࡚㸪Fig. 3(b)ࡢヨ㦂∦ࡢࡣࡃ㞳㟢ฟ⟠ᡤࡢ㧗పᕪࣉࣟࣇ࢓࢖ࣝࢆ ᐃࡋࡓ⤖ᯝࢆ♧ࡍ㸬᭱⾲㠃ࡢ‫݁ܨ‬ଶ ܱଷ ࡜ࡣࡃ㞳㒊ࡢ‫݁ܨ‬ଷ ܱସ ࡜ࡢ⭷ཌࡉࡀ⣙ 11 μm ࡛࠶ࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬ࡇࢀ࡜ Table 1 ࡢ⭷ཌ ᐃ⤖ᯝ࡜ࢆẚ㍑ࡍࡿࡇ࡜࡛㸪ᮏヨ㦂࡟࠾ࡅࡿ㓟໬⓶⭷ࡢࡣࡃ㞳ࡣ‫ ܱ݁ܨ‬-‫݁ܨ‬ଷ ܱସ ⏺㠃࡛㉳ࡁ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬Height, μm

201511um

105050100

Distance, μm

Fig. 4 Height profile around delamination area observed by laser scanningmicroscope2㸬3㸬2 ࡣࡃ㞳Ⓨ⏕ࡢ࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮ࡢ≉ᐃ
Fig. 1 ࡢ⿦⨨ࢆ⏝࠸࡚⏺㠃ᙉᗘࢆ᥎ᐃࡍࡿࡀ㸪ࡣࡃ㞳ࡀⓎ⏕ࡍࡿ࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮㸦ୗ㝈⏺್㸧ࢆᐇ㦂ⓗ࡟ồࡵࡿᚲせࡀ࠶ࡿ㸬ࡑࡇ࡛㸪ᮏ◊✲࡛ࡣ㸪ྠ୍⟠ᡤ࡟ᑐࡋ࡚ྛ࢚ࢿࣝ
ࢠ࣮10 ᅇࡢ࣮ࣞࢨ࣮↷ᑕࢆ⾜࠸㸪 ᐃἼᙧࡢኚ໬ࢆヲ⣽࡟ほᐹࡋࡓ㸬ࡇࢀࡣ᪤ ◊✲ࡢ᪉
ἲ(1)(2)࡟ᇶ࡙࠸࡚࠸ࡿ㸬Ἴᙧࡢኚ໬ࡀ☜ㄆ࡛ࡁ࡞࠿ࡗࡓሙྜࡣ㸪ࡑࡢ࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮㸫㸫࡛ࡣࡣࡃ㞳ࡋ࡞࠸࡜ุ᩿ࡋ㸪࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮ࢆୖ᪼ࡉࡏ෌ᗘ↷ᑕࡍࡿ᪉ἲ࡛㸪ࡣࡃ㞳ࡢ⮫⏺࢚ࢿࣝࢠ࣮ࢆᐇ㦂ⓗ࡟≉ᐃࡍࡿ㸬ࡲࡓ㸪ᮏ◊✲࡛ࡣ㸪࣮ࣞࢨ࣮㉸㡢Ἴᖸ΅ィ࡟ࡼࡾྲྀᚓࡋࡓ㠃እኚ఩Ἴᙧࢆ┦㛵ಀᩘ࡛ẚ㍑(1)(2)ࡍࡿࡇ࡜࡟ࡼࡾἼᙧࡢኚ໬ࢆᐃ㔞ⓗ࡟ホ౯ࡋࡓ㸬Fig. 5 ࡟ 20 ศຍ⇕ࡋࡓヨ㦂∦࡟࠾࠸࡚࣮ࣞࢨ࣮↷ᑕヨ㦂ࢆ⾜ࡗࡓ㝿ࡢἼᙧኚ໬ࢆ㸪
Fig. 6 ࡟↷ᑕᅇᩘ࡟ᑐࡍࡿྛ࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮ࡢ┦㛵ಀᩘࡢኚ໬ࢆ♧ࡍ㸬࡞࠾ヨ㦂᮲௳࡜ࡋ࡚ࡣ㸪࣮ࣞࢨ࣮↷ᑕᚄࢆ 2.2 mm ⛬ᗘ࡟タᐃࡋ㸪࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮ࢆ 20 mJ ࠿ࡽẁ㝵ⓗ࡟ୖࡆ࡚↷ᑕࡋࡓ㸬ࡑࡢ⤖ᯝ 80 mJ ࡲ࡛ࡣἼᙧࡢኚ໬ࡀ࡞ࡃ㸪Fig. 6(a)ࡢ┦㛵ಀᩘࡣ㧗࠸್ࢆ♧ࡋࡓ㸬୍᪉㸪90 mJ ࡟࠾࠸࡚┦㛵ಀᩘࡣ↷ᑕᅇᩘࢆቑࡍࡈ࡜࡟పୗࡋ㸪1 ᅇ┠
࡜ 10 ᅇ┠ࢆẚ㍑ࡍࡿ࡜Ἴᙧࡀኚ໬ࡋ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿ㸬ࡋࡓࡀࡗ࡚ࡣࡃ㞳ࡢ⮫⏺࢚ࢿࣝࢠ࣮ࡣ 90 mJ ࡛࠶ࡿ࡜᥎ᐃࡋࡓ㸬ྠᵝ࡟ Fig. 6(b)ࡢ┦㛵ಀᩘࡢኚ໬࠿ࡽ 120 ศຍ⇕ࡋ(a)

Displacement, nm

1stCorrelation
coeficient:0.988

10th

1.2(b)

1stCorrelation
coeficient:0.74

10th90mJ80mJ
0.8

Displacement, nmࡓヨ㦂∦࡟࠾ࡅࡿࡣࡃ㞳ࡢ⮫⏺࢚ࢿࣝࢠ࣮ࡣ 60 mJ ࡛࠶ࡿ࡜᥎ᐃࡋࡓ㸬

0.8

1.6

1.2

1.6Time, nsTime, ns

Fig. 5 Out-of-plane displacement waveform with comparison of between 1stirradiation and 10th ones for 80 mJ and 90 mJ of laser energy

10.5

䕿䠖80mJ
䕿䠖90mJ
䕿䠖100mJ(a)20min005

Number of irradiation

Correlation coefficient

Correlation coefficient

1100.5

䕻䠖50mJ
䕻䠖60mJ
䕻䠖70mJ(b)120min005

10Number of irradiation

Fig. 6 Correlation coefficients between 1st and others at each laser energy;(a)Specimen 700°C-20 min (b)Specimen 700°C-120 min㸫㸫

2㸬4 FEM㸦᭷㝈せ⣲ἲ㸧ࢆ⏝࠸ࡓἼືఏ᧛ゎᯒ⏺㠃ᙉᗘࢆ᥎ᐃࡍࡿࡓࡵ࡟㸪Fig. 7 ࡟♧ࡍ 2 ḟඖ㍈ᑐ㇟ࡢ FEM㸦᭷㝈せ⣲ἲ㸧ࣔࢹࣝࢆ⏝࠸ࡓἼືఏ᧛ࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜ࡗࡓ㸬ᮦᩱᐃᩘ࡟ࡘ࠸࡚㸪㓟໬ࢫࢣ࣮ࣝࡢ≀ᛶ್ࢆ┤᥋ ᐃࡍࡿࡇ࡜ࡣᅔ㞴࡞ࡓࡵ㸪࣏࢔ࢯࣥẚࢆ 0.3 ࡜௬ᐃࡋ㸪ྛᒙࡢ↝⤖ᮦ࠿ࡽồࡵࡓ
್(5)ࢆ⏝࠸ࡓ㸬ࡲࡓ㸪ධຊ㡢※ࡣ㸪ᐇ㦂࡟ࡼࡾồࡵࡓ⮫⏺࢚ࢿࣝࢠ࣮࡟࠾ࡅࡿ ᐃἼᙧ࠿ࡽᛂ⟅㛵ᩘἲ(2)(6)࡟ࡼࡾ᥎ᐃࡋࡓࡶࡢࢆ⏝࠸ࡓ㸬ࡑࡋ࡚㸪᥎ᐃࡋࡓධຊ㡢※ࢆ⏝࠸࡚㸪෌ᗘ FEM ゎᯒࢆ⾜࠺ࡇ࡜࡟ࡼࡾヨ㦂∦ෆ㒊ࡢᆶ┤ᛂຊศᕸࢆ᳨ウࡋࡓ㸬Fig. 8 ࡟ヨ㦂∦ෆ㒊࡟ఏ᧛ࡍࡿᛂຊศᕸࢆ♧ࡍ㸬Fig. 8 ࡣゎᯒࣔࢹࣝࢆ 800 μm ᅄ᪉࡟ษࡾྲྀࡗࡓࡶࡢ࡛㸪㐍⾜᪉ྥࡢᆶ┤ᛂຊ࡟ὀ┠ࡋࡓࡶࡢ࡛࠶ࡿ㸬Fig. 8(a)ࡣᙎᛶἼࡀ⏺㠃࡟฿㐩ࡍࡿ๓࡛㸪ࡇࡢᙎᛶἼࡣ Fig. 8(a) (b)ࡢࡼ࠺࡟⏺㠃ࢆ㏱㐣ࡋ࡚⭷⾲㠃ࡲ࡛ఏ᧛ࡍࡿ㸬ఏ᧛ࡋࡓἼࡣ㸪⭷⾲㠃࡛⮬⏤➃཯ᑕ࡟ࡼࡾ఩┦཯㌿ࢆ㉳ࡇࡋ࡚෌ࡧᮦᩱෆ㒊࡬࡜ఏ᧛ࡍࡿ㸬ࡇࡢἼࡀ Fig.
8(c)ࡢࡼ࠺࡟ᚋ⥆ࡢἼ࡜ᖸ΅ࢆ㉳ࡇࡍࡇ࡜࡛㸪⏺㠃࡟࡚ᙉ࠸ᘬᙇᛂຊࡀస⏝ࡍࡿ㸬Fig. 8(d)ࡣ⏺㠃ᛂຊࡀ᭱኱್ࢆ♧ࡍࢱ࢖࣑ࣥࢢ࡛࠶ࡿ㸬

Magnetite
Wustiteinterface
AXISYMMETRIC

300

Magnetite_seam
Thickness:3mm

Substrate(a)t=500ns(b)t=525ns(c)t=536ns(d)t=540ns

interface
Laser Input

100 μmModel Width:4mm

YX

Fig. 7 Numerical model for axisymmetric-150

Fig. 8 Visualization of wave propagation(a)Before arrival at interface (b)Arrival atfree surface (c)Reflection and interference(d)Peak stress at interface

FEM simulationḟ࡟⭷ཌ᪉ྥ㸦῝ࡉ㸧࡜᭱኱ᆶ┤ᛂຊ㸦x ᪉ྥᛂຊ㸧ࢆࡲ࡜ࡵࡓ⤖ᯝࢆ Fig. 9 ࡟♧ࡍ㸬ᅗ୰࡟ࡣ㸪20 ศຍ⇕ࡢ⤖ᯝ࡜ 120 ศຍ⇕ࡢ⤖ᯝࡢ 2 ✀㢮ࢆ♧ࡋ࡚࠸ࡿ㸬Fig. 9 ࡢᶓ㍈ࡣ㓟໬⓶⭷⾲㠃ࢆཎⅬ࡜ࡋ㸪ࡑࢀࡒࢀࡢࡣࡃ㞳⟠ᡤ㸦⮬⏤⾲㠃࠿ࡽࡢ㊥㞳㸧ࢆⅬ⥺࡛♧ࡋࡓ㸬ࡍ࡞ࢃࡕ㸪Table 1 ࡼࡾ 20 ศຍ⇕ヨ㦂∦࡛ࡣ 10.7 μm㸪120 ศຍ⇕࡛ࡣ 18.6 μm ࡛࠶ࡿ㸬ࡇࢀࡼࡾ㸪୧ヨ㦂∦ࡢ⏺㠃ᛂຊࡢ⤖ᯝࡣẚ㍑ⓗ㏆࠸್ࢆ♧ࡍࡇ࡜ࡀศ࠿ࡗࡓ㸬㸫㸫

Maximum tensile stress, MPa

200:Delaminatedinterface at 20min

䕿䠖20min䕿䠖120min:Delaminatedinterface at 120min

10000

1020

Distance from oxide layer surface, μm

Fig. 9 Comparison of maximum tensile stresses at delaminated interfacein the specimen of 20 min and 120 min3㸬⏺㠃◚ቯ㠎ᛶ್ホ౯3㸬1 ࡣࡃ㞳㐍ᒎᐇ㦂⏺㠃ࡢ◚ቯ㠌ᛶ್ࢆ᥎ᐃࡍࡿࡓࡵ࡟㸪ࡣࡃ㞳㐍ᒎヨ㦂ࢆ⾜ࡗࡓ㸬ࡇࡢヨ㦂࡛ࡣጞࡵ࡟ࣞ
࣮ࢨ࣮↷ᑕヨ㦂࡟ࡼࡾึᮇࡣࡃ㞳ࢆ⏕ᡂࡋ㸪ࡑࡢึᮇࡣࡃ㞳ᚄࢆ ᐃࡍࡿ㸬ࡑࡢᚋ㸪ྠ୍⟠ᡤ࡟␗࡞ࡿ↷ᑕᚄ࡛෌ᗘ࣮ࣞࢨ࣮↷ᑕヨ㦂ࢆ⾜࠸㸪ึᮇࡣࡃ㞳ࢆ㐍ᒎࡉࡏࡿ㸬ࡇࢀࡼࡾ㸪ࡣࡃ㞳ࡀ㐍ᒎࡍࡿ࡜ࡁࡢ㝈⏺࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮ࢆỴᐃࡍࡿ㸬ヨ㦂᮲௳࡜ࡋ࡚㸪ᮏ◊✲࡛ࡣ࣮ࣞࢨ࣮↷ᑕᚄ 2.2 mm㸪࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮150 mJ ࡟࠾࠸࡚ึᮇࡣࡃ㞳 1.1 μm ࢆ⏕ᡂࡋ㸪࣮ࣞࢨ࣮┤ᚄࢆ 3 mm ⛬ᗘ࡟ᣑ኱ࡋࡓ≧ែ࡛෌ᗘྠ୍⟠ᡤ࡟࣮ࣞࢨ࣮↷ᑕヨ㦂ࢆ⾜࠺ࡇ࡜࡛ࡣࡃ㞳㐍ᒎヨ㦂ࢆ⾜ࡗࡓ㸬Fig. 10 ࡟㐍ᒎ๓ࡢึᮇࡣࡃ㞳ࡢ≧ែ࡜࣮ࣞࢨ࣮࢚ࢿ
ࣝࢠ࣮140 mJ ཬࡧ 150 mJ ࡛↷ᑕࡋࡓᚋࡢ⾲㠃⏬ീࢆ♧ࡍ㸬࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮ࢆẁ㝵ⓗ࡟ୖ᪼ࡉࡏࡓ⤖ᯝ㸪140 mJ ࡲ࡛ࡣࡣࡃ㞳ࡀ㐍ᒎࡋ࡞࠿ࡗࡓ㸦Fig. 10(c)㸧㸬ࡑࡢᚋ 150 mJ࡛↷ᑕࡋࡓ㝿࡟ࡣ㸪ึᮇࡣࡃ㞳㸦Fig. 10(a)㸧࡜ẚ࡭࡚ࡣࡃ㞳ᚄࡀ኱ࡁࡃ࡞ࡗ࡚࠸ࡿࡇ࡜ࡀ
☜ㄆ࡛ࡁࡓ㸦Fig. 10(b)㸧㸬ࡋࡓࡀࡗ࡚㸪ᮏᐇ㦂࡟࠾ࡅࡿࡣࡃ㞳㐍ᒎࡢ⮫⏺࢚ࢿࣝࢠ࣮ࢆ
150 mJ ࡜Ỵᐃࡋࡓ㸬௒ᚋࡣ FEM ࡟ࡼࡾࡁ⿣ඛ➃ࡢᛂຊሙࢆ⟬ฟࡋ㸪ᛂຊᣑ኱ಀᩘࢆィ⟬ࡍࡿࡇ࡜࡟ࡼࡾ㸪⏺㠃◚ቯ㠌ᛶ್ࢆ᥎ᐃ(2)ࡍࡿணᐃ࡛࠶ࡿ㸬㸫㸫(b)Growth1mm
Delamination diameter:
Laser energy:
Laser diameter:(Energy Fluence:(a)

(c)

1mm
Delamination diameter:
Laser energy:
Laser diameter:(Energy Fluence:)

Not Growth)

1mm
Delamination diameter:
Laser energy:
Laser diameter:(Energy Fluence:)

Fig. 10 Observation images of bulge shape with delamination progression
using digital microscope

4. ⤖ゝᮏ◊✲࡛ࡣ㸪㠀᥋ゐ᪉ᘧ࡛࠶ࡿ࣮ࣞࢨ࣮ㄏ㉳㉸㡢Ἴࢆ⏝࠸࡚⏺㠃ᙉᗘホ౯࡞ࡽࡧ࡟⧞㏉
ࡋ㈇Ⲵ࡟ᑐࡍࡿ⑂ປᙉᗘホ౯ἲࢆ㛤Ⓨࡋ㸪㕲㗰ୖ࡟⏕ᡂࡍࡿ㓟໬⓶⭷ࡢࡣࡃࡾᙉᗘࢆ᳨ウࡋࡓ㸬ࡑࡋ࡚㸪⏺㠃ᙉᗘホ౯ࢆṇ☜࡟⾜࠺ࡓࡵ࡟㸪FEM㸦᭷㝈せ⣲ἲ㸧ࢆ⏝࠸ࡓἼືఏ᧛ࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜࠸㸪ᛂຊゎᯒ࠿ࡽ㓟໬⓶⭷ࡢ⏺㠃ᙉᗘホ౯ࢆ⾜ࡗࡓ㸬௨ୗ࡟ᚓࡽࢀࡓ⤖ᯝࢆ♧ࡍ㸬1)

Ⅳ⣲㗰ࢆ኱Ẽ⅔୰࡛ 700°C ⛬ᗘ࡛ຍ⇕ࡋࡓ⤖ᯝ㸪᭱⾲㠃ഃ࠿ࡽ‫݁ܨ‬ଶ ܱଷ 㸪‫݁ܨ‬ଷ ܱସ 㸪‫ܱ݁ܨ‬㸪‫݁ܨ‬ଷ ܱସ ࡢ 4 ᒙࡢከᒙᵓ㐀⤌⧊ࢆ᭷ࡍࡿ㓟໬⓶⭷ࢆᙧᡂࡍࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬ࡲࡓ㸪ຍ⇕᫬㛫ࡢቑຍ࡟క࠸ྛ⭷ཌࡢቑຍࡶ☜ㄆ࡛ࡁࡓ㸬2)ࣃࣝࢫ࣮ࣞࢨ࣮↷ᑕ࡟ࡼࡗ࡚㓟໬⓶⭷ࢆࡣࡃ㞳ࡉࡏࡓ㸬ࡑࡋ࡚㸪XPS㸦 X ⥺ග㟁Ꮚศග㸧࡟ࡼࡿ⾲㠃ඖ⣲ศᯒ࠾ࡼࡧ࣮ࣞࢨ࣮㉮ᰝᆺ㢧ᚤ㙾ࢆ⏝࠸ࡓ⤖ᯝ㸪‫ ܱ݁ܨ‬-‫݁ܨ‬ଷ ܱସ ⏺㠃࡛ࡣࡃ㞳ࡍࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬3)࣮ࣞࢨ࣮↷ᑕヨ㦂࡟࠾࠸࡚㸪ࡣࡃ㞳ࡢ⮫⏺࣮ࣞࢨ࣮࢚ࢿࣝࢠ࣮ࢆ≉ᐃࡍࡿࡓࡵ࡟㸪㓟໬⓶⭷ࡢ㠃እኚ఩Ἴᙧࢆィ ࡋࡓ㸬ࡑࡢἼᙧࡢኚ໬࠿ࡽࡣࡃ㞳Ⓨ⏕ࢆ≉ᐃࡋࡓ㸬4)㓟໬⓶⭷ࡢ⏺㠃ᙉᗘࢆᐃ㔞ⓗ࡟ホ౯ࡍࡿࡓࡵ࡟㸪FEM㸦᭷㝈せ⣲ἲ㸧࡟ࡼࡿἼືఏ᧛ࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜ࡗࡓ㸬ࡑࡢ⤖ᯝ㸪␗࡞ࡿ⭷ཌࡢ㓟໬⓶⭷ࡢ⏺㠃ᙉᗘࡣ㸪࡯ࡰ୍⮴ࡋࡓ㸬5)㓟໬⓶⭷ࡢ⏺㠃◚ቯ㠌ᛶ್ࢆホ౯ࡍࡿࡓࡵ࡟㸪ࡣࡃ㞳㐍ᒎヨ㦂ࢆ⾜ࡗࡓ㸬ึᮇࡣࡃ㞳ࢆ᭷ࡍࡿヨ㦂∦࡟ࡉࡽ࡟࣮ࣞࢨ࣮ࢆ↷ᑕࡋ࡚ࡣࡃ㞳ࢆ㐍ᒎࡉࡏࡓ㸬௒ᚋࡣ FEM ࢆ⏝࠸࡚ࡣࡃ㞳ࡢࡁ⿣ඛ➃ࡢᛂຊᣑ኱ಀᩘࢆ⟬ฟࡍࡿࡇ࡜࡛⏺㠃◚ቯ㠌ᛶ್ࡢホ౯ࢆ⾜࠺ணᐃ࡛࠶ࡿ㸬㸫㸫6)ᮏሗ࿌࡛ࡣ๭ឡࡋࡓࡀ㸪⧞㏉ࡋ࣮ࣞࢨ࣮↷ᑕࡢヨ㦂ἲࡶ☜❧ࡋ㸪⧞㏉ࡋ㈇Ⲵࢆཷࡅࡿ
⏺㠃ࡢᙉᗘホ౯ࡢᐇ⌧ྍ⬟ᛶࢆ♧ࡋࡓ㸬ヲ⣽ࡣࠕᮏ◊✲ࡢᡂᯝࠖࡢᩥ⊩࡟♧ࡉࢀ࡚࠸ࡿ㸬ㅰ ㎡ ᮏ◊✲ࡣ㸪බ┈㈈ᅋἲே JFE21 ୡ⣖㈈ᅋ 2016 ᖺᗘᢏ⾡◊✲ຓᡂ࡟ࡼࡾ⾜ࢃࢀࡓ㸬ࡇࡇ࡟グࡋ࡚ㅰពࢆ⾲ࡋࡲࡍ㸬ཧ⪃ᩥ⊩(1) H. Ito, S. Kiminami, H. Cho, Evaluation of adhesion quality of oxide scale on low
carbon steel at high temperature using a laser spallation technique, Transactionsof the JSME (in Japanese) 81 (2015) 1-12.
(2) Y. Watanabe, A. Yonezu, X. Chen, Measurement of interfacial fracture toughness ofsurface

coatingusing

pulsed-laser-inducedultrasonicwave,JournalofNondestructive Evaluation, 37, 2 (2018) pp.1-11.
(3) ᳥ᒣṇᏕ, 㔠ᒓࡢ㧗 㓟໬࡜ࡑࡢᑐ⟇, 㔠ᒓ⾲㠃ᢏ⾡, 10 (1959)323-328.
(4) M.Takeda, Influence of Cr Content and Heating Conditions on the Microstructureand Adhesion of Scales in Cr Steels, KOBE STEEL ENGINEERING REPORTS,
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(5) Ṋ⏣ᐇెᏊ, 㕲㗰ᮦᩱ〇㐀ᕤ⛬࡟⏕ᡂࡍࡿࢫࢣ࣮ࣝࡢᛶ≧࡜㧗 ≀ᛶ࡟㛵ࡍࡿ◊✲,኱㜰኱Ꮫ, (2010), ༤ኈㄽᩥᮏ◊✲ࡢᡂᯝ1.

Hiroki Watanabe, Takeshi Yamada, Yusaku Saito, Akio Yonezu, Interfacial
strength evaluation of oxide films on carbon steel by using the laser shockadhesion test, under review.

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Yousuke Watanabe, Akio Yonezu, Xi Chen, Measurement of interfacial fracture
toughness of surface coatings using pulsed-laser-induced ultrasonic waves,
Journal of Nondestructive Evaluation, Vol.37,2 (2018) pp.1-11

3.

Takeshi Yamada, Hiroki Watanabe, Yusaku Saito, Akio Yonezu, Non-contact
measurement of coating adhesion by using pulsed laser irradiation, ASME2017
International Mechanical Engineering Congress & Exposition, TechnicalPresentation (IMECE2017-71178), p.169, Tampa, Florida, U.S.A. 11/9(2017)4.

Yousuke Watanabe, Shoichi Fujisawa, Hiroki Watanabe, Akio Yonezu, Evaluationof interfacial fracture strength and toughness by using laser-induced ultrasonicwaves, ASME2016 International Mechanical Engineering Congress & Exposition,㸫㸫

Technical Presentation (IMECE2016-66378), p.160, Phoenix, Arizona, U.S.A.
11/17(2016)5.

Yousuke Watanabe, Shoichi Fujisawa, Akio Yonezu, Characterizations ofInterfacial Strength and Crack Growth of Surface Coating by Using Laser
Ultrasonic Wave, The 10th Asia-Pacific Conference on Fracture and Strength;
APCFS2016 (JSME-MMD), pp.91-92, Track04-6, Toyama, Japan, 9/20, 2016.

6.

Ώ㑔⪀௓㸪⡿ὠ᫂⏕㸪࣮ࣞࢨ࣮ㄏ㉳㉸㡢Ἴࢆ⏝࠸ࡓ࣓ࢵ࢟⭷ࡢ⏺㠃ᙉᗘホ౯࡜๤㞳᳨ฟἲ㸪᪥ᮏᶵᲔᏛ఍ 2016 ᖺᗘᖺḟ኱఍㸪J0410405.pdf㸪஑ᕞ኱Ꮫ㸪9/14㸦2016㸧

7.

Ώ㑓ᘯᶞ㸪Ώ㑔⪀௓, ⡿ὠ᫂⏕, ࣮ࣞࢨ࣮㉸㡢Ἴ࡜ᩘ್ゎᯒἲࢆ⏝࠸ࡓࢥ࣮ࢸ࢕ࣥࢢ⭷ࡢ⏺㠃◚ቯ㠌ᛶホ౯, ᪥ᮏ㠀◚ቯ᳨ᰝ༠఍㸪➨ 24 ᅇ㉸㡢Ἴ࡟ࡼࡿ㠀◚ቯホ౯ࢩ࣏ࣥࢪ࣒࢘, ᮾி㒔❧⏘ᴗᢏ⾡◊✲ࢭࣥࢱ࣮㟷ᱵᮏ㒊, pp.37-38, 1/26(2017)8.

ᒣ⏣๛ྐ, Ώ㑔⪀௓, Ώ㑓ᘯᶞ, ⡿ὠ᫂⏕, ⧞㏉ࡋࣃࣝࢫ࣮ࣞࢨ࣮↷ᑕἲ࡟ࡼࡿࢥ࣮
ࢸ࢕ࣥࢢ⭷ࡢ⏺㠃ᙉᗘホ౯, ᪥ᮏᶵᲔᏛ఍㸪㛵ᮾᏛ⏕఍➨ 56 ᅇᏛ⏕ဨ༞ᴗ◊✲Ⓨ⾲ㅮ
₇఍㸪ㅮ₇␒ྕ 1211.pdf㸦2017-3㸧3/16㸪ᮾி⌮⛉኱9.

ᒣ⏣๛ྐ㸪Ώ㑓ᘯᶞ㸪㰻⸨భ᭾㸪⡿ὠ᫂⏕㸪ࣃࣝࢫ࣮ࣞࢨ࣮↷ᑕἲ࡟ࡼࡿࢥ࣮ࢸ࢕ࣥࢢ⭷ࡢ⏺㠃ᙉᗘホ౯㸪᪥ᮏᮦᩱᏛ఍㛵ᮾᨭ㒊 2017 ᖺᗘᏛ⏕◊✲஺ὶ఍㸪Ⓨ⾲␒ྕ
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₇㈹10. Ώ㑓ᘯᶞ㸪ᒣ⏣๛ྐ㸪㰻⸨భ᭾㸪⡿ὠ᫂⏕㸪࣮ࣞࢨ࣮ㄏ㉳㉸㡢Ἴࢆ⏝࠸ࡓ㓟໬⓶⭷ࡢ⏺㠃ᙉᗘホ౯㸪᪥ᮏᶵᲔᏛ఍ 㛵ᮾᨭ㒊➨ 24 ᮇ⥲఍࣭ㅮ₇఍, OS0718.pdf㸦2018-3㸧
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