ఫ཭㟁ᕤࣅ࣮࣒ࣛ࢖ࣥ㸦%/㸧ࡢ⌧≧ᒣཱྀᾈྖఫ཭㟁Ẽᕤᴗᰴᘧ఍♫ ఫ཭㟁Ẽᕤᴗ࡛ࡣ  ᖺ࡟ᨺᑕගศᯒࢆᮏ᱁ⓗ࡟฼⏝㛤ጞࡋࠊྛ✀ࡢᮦᩱࡸ㒊ရࡢཎᏊࣞ࣋ࣝࡢゎᯒࢆᇶ࡟〇ရ➇தຊྥୖࢆᅗࡗ࡚ࡁࡓࠋ᭦࡟ࠊศᯒࢽ࣮ࢬࡢᣑ኱࡟ᑐᛂࡍࡿࡓࡵࠊᖺ  ᭶࡟బ㈡ /6 ࡟࠾࠸࡚ࠊ%/ ◳ ; ⥺ ࡜ %/ ㌾ ; ⥺ ࡢ  ᮏࡢ௚ᶵ㛵ࣅ࣮࣒ࣛ࢖ࣥᘓタ࡟╔ᕤࡋࠊ ᖺ  ᭶ࡼࡾᮏ᱁ⓗ࡞✌ാࢆ㛤ጞࡋࡓࠋ ୗ⾲࡟ࣅ࣮࣒ࣛ࢖ࣥࡢᴫせࢆグࡍࡀࠊ฼⏝ྍ⬟࡞ ; ⥺ࡢ࢚ࢿࣝࢠ࣮⠊ᅖࢆH9㹼NH9࡜ᗈࡃ࡜ࡾࠊ/L ௨ୖࡢ඲ඖ⣲ࡢ . ➃ཪࡣ / ➃ࢆ࢝ࣂ࣮ࡋ࡚࠸ࡿࡇ࡜ࡀ≉ᚩࡢ୍ࡘ࡛࠶ࡿࠋࡲࡓࠊ;$)6; ⥺ᅇᢡᑠゅᩓ஘ග㟁Ꮚศගࡢ  ࡘࡢศᯒἲࢆഛ࠼࡚࠾ࡾࠊᵝࠎ࡞ᮦᩱ㛤Ⓨ࡟࠾ࡅࡿከᵝ࡞ࢽ࣮ࢬ࡟ᑐᛂ࡛ࡁࡿࡼ࠺࡟ࡋ࡚࠸ࡿࠋ  ᖺ  ᭶ࡢᮏ᱁✌ാ௨᮶ࠊ௨ୗࡢࡼ࠺࡞ᮦᩱホ౯ࢆᐇ᪋ࡋ࡚ࡁࡓࠋ࣭㔠ᒓᮦᩱ୰ࡢᚤ㔞ῧຍඖ⣲ࡢ≧ែゎᯒ㸦◳ ; ⥺྾཰ศගࠊ㌾ ; ⥺྾཰ศග㸧ࠊᯒฟ≀ࡢゎᯒ㸦◳ ; ⥺྾཰ศගࠊ; ⥺ᅇᢡࠊᑠゅᩓ஘㸧࣭ྛ✀ᵓ㐀ᮦᩱࡢṍཬࡧṧ␃ᛂຊᐃ࡜ࡑࡢᇶ♏ⓗ᳨ウ㸦; ⥺ᅇᢡ㸧࣭࣓ࢵ࢟ᾮ➼㟁ゎᾮ୰ࡢ࢖࢜ࣥࡸ㘒యࠊᯒฟ≀➼ࡢ≧ែゎᯒ㸦◳ ; ⥺྾཰ศග㸧࣭ᶞ⬡ᮦᩱࡢ⤌⧊ゎᯒ㸦ᑠゅᩓ஘㸧࣭Ⅳ⣲⣔ᮦᩱࡢ໬Ꮫ≧ែゎᯒ㸦㌾ ; ⥺྾཰ศග㸧࣭༙ᑟయ࢚࢘ࣁࡸ㟁Ꮚࢹࣂ࢖ࢫࡢᴟ⾲㠃ࡢởᰁࠊ໬Ꮫ⤖ྜ≧ែࡢゎᯒ㸦㌾ ; ⥺྾཰ศගࠊග㟁Ꮚศග㸧 ᙜ᪥ࡣලయⓗ࡞ᐃ஦౛ࢆ஺࠼࡚ࠊࣅ࣮࣒ࣛ࢖ࣥࡢ⌧≧࡟ࡘ࠸࡚ሗ࿌ࡍࡿࠋ7DEOH ఫ཭㟁ᕤࣅ࣮࣒ࣛ࢖ࣥࡢᴫせࣅ࣮࣒ࣛ࢖ࣥ%/㸸◳ ; ⥺ %/%/㸸㌾ ; ⥺ %/ග※7 ㉸ఏᑟ࢘࢕ࢢࣛ೫ྥ㟁☢▼ศගჾ஧⤖ᬗศගჾྍኚ೫ゅᆺᅇᢡ᱁Ꮚศගჾ 6L6L  ,Q6E       /LQHVPPගᏊ࢚ࢿࣝࢠ࣮

NH9㹼NH9

H9㹼H9

ගᏊᩘ㸦ಶV㸧㹼 #NH9㹼#H9

㞟ගࢧ࢖ࢬ㸦PP㸧㸦Ỉᖹ㸧 ᆶ┤ 㸦Ỉᖹ㸧 ᆶ┤ ྾཰ศග; ⥺ᅇᢡ྾཰ศගග㟁Ꮚศගᐃᡭἲ  ᑠゅᩓ஘ ఫ཭㟁ᕤࣅ࣮࣒ࣛ࢖ࣥࡢタィ࣭ᘓタ࣭ㄪᩚ࡟ࡣࠊ஑ᕞࢩࣥࢡࣟࢺࣟࣥග◊✲ࢭࣥࢱ࣮ࡢྛ㒊ᒁࡢ᪉ࠎ࡟ከ኱࡞ࡈᨭ᥼࣭ࡈ༠ຊࢆ㡬ࡁࡲࡋࡓࠋࡲࡓࠊ⌧ᅾࡢ฼⏝࡟㝿ࡋ࡚ࡶᵝࠎ࡞ࡈ༠ຊࢆ㡬࠸࡚࠾ࡾࡲࡍࠋࡇࡢሙࢆ࠾೉ࡾࡋ࡚࠾♩⏦ࡋୖࡆࡲࡍࠋ12
34

2017 0809

2017-08-09 @2017-08-09 @Pt / Ni
Ni / Rh

BL170BL161©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

4T
Si 111 Si 311
InSb 111

X

234X

5m01234DSS5m

2017-08-09 @He0XAFS/Be

2017-08-09 @©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

12345©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

m/

XAFS

/XPS

400 / 1000 / 1400/ 2200 lines/mm

XAFS//

XRD/
2017-08-09 @SAXS©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

2017-08-09 @©2015 Sumitomo Electric Industries, Ltd. All Rights Reservedphotons/s

300 mA@ SCM3Si 111
Si 111 + He
InSb 111 + He@keV
2017-08-09 @DCM

2017-08-09 @©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

300 mAS1 = S2 = 20 m

Cu-K1

©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

Gr #1400 lines/mm

Gr #2 1000 lines/mm

photons/s

Gr #3 1400 lines/mm
Gr #4 2200 lines/mm

WS H=1.0 mm
WS H=0.5 mmeV
2017-08-09 @2017-08-09 @©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

Si 311©2015 Sumitomo Electric Industries, Ltd. All Rights ReservedSn-K

XAFS

Grating 1000 lines/mm
S1=S2=10 m
SlitGasN2 10 Pa

ta.u.

a.u.

E / E = 3480

SnO
SnO2
Sn Metal

keVeV
2017-08-09 @©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

2017-08-09 @©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

HeP

XAFS

GIXD
Au 11110nm-Au/GaAs

X

10 keV 0.124 nm
0.4V
3.2H mm20.60.2/ Step = 0.1

89cps

a.u.

2 = 292.5 h/

Au 133
Au 024

Au 113

Au 022

Au 002Ca3 PO4 2

Au 222X

CaHPO4

Au 004InSbeV22017-08-09 @arcdeg.

2017-08-09 @©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

LiNiO2©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

Li-K= 9 keV
3 m / 0.3 m
0.3 m WAXS

a.u.

3 m SAXS

3rd
1st

2nd

1steV

2017-08-09 @

Si-K

SiC

PFY

©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

Si-2p XPS
SiO2

SiC

1SiC

21SiC

2h = 200 eV

TEYeVeV
2017-08-09 @SiCa.u.

a.u.

SiC

2017-08-09 @©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved

2017-08-09 @©2015 Sumitomo Electric Industries, Ltd. All Rights Reserved