J. Inst. Electrostat. Jpn.

, 31, 4 (2007) 165 170ήჿ᡼㔚ߩࡃ࡝ࠕߦ↪޿ࠆ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩ૞⵾Ꮉ ፒ ᢅ ਯ㧔2007 ᐕ 3 ᦬ 22 ᣣฃઃ 㧧 2007 ᐕ 6 ᦬ 20 ᣣฃℂ㧕Manufacturing of Anodic Porous Alumina for Barriers
in a Silent Discharge Reactor
Toshiyuki KAWASAKI
㧔Received March 22, 2007 㧧 Accepted June 20, 2007㧕

The simultaneous treatment of gaseous pollutants and suspended particle matter exhausted from a diesel
engine is one of the most serious problems in our living environment. Non-thermal plasma skillfully
combined with porous ceramics or/and catalysts is very attractive for the simultaneous treatment.
In this study, we focused on the silent discharge reactor with anodic porous alumina as barriers. A purity
99.99% Al substrate was electropolished after buffing. Then, anodization was carried out under a constantvoltage condition in sulfuric acid solution. Spark voltage of the silent discharge reactor were studied using
anodic porous alumina prepared under various conditions as barriers. Film thickness and relative dielectric
constant were also studied. As a result, stable and uniform non-thermal plasma was able to generate underatmospheric pressure using the silent discharge reactor, of which electrodes and barriers are Al substrate andanodic porous alumina, respectively.
 ߪߓ߼ߦࠕ࡞ࡒ࠽ߪ㧘ሹᓘ߇࠽ࡁࠝ࡯࠳࡯ߢ㜞ࠕࠬࡍࠢ࠻Ყࠍ᦭ߔࠆᄢ᳇࿶㕖ᾲᐔⴧࡊ࡜࠭ࡑ㧔એਅ ᡼㔚ࡊ࡜࠭ࡑ㧕㧘ᄙሹ⾰࠮⚦ሹ߇ⷙೣ⊛ߦ㈩೉ߒߚࡂ࠾ࠞࡓ᭴ㅧߣߥࠆ㧚ߎߩࠃ߁ߥ㓁࡜ࡒ࠶ࠢ㧘߅ࠃ߮⸅ᇦ╬ࠍ૬↪ߒߚⵝ⟎ߦࠃࠆ㧘࠺ࠖ࡯࠯࡞ᭂ㉄ൻࠕ࡞ࡒ࠽ࠍ↪޿ߚࠟࠬಣℂⵝ⟎ߦߪᄙߊߩ೑ὐ߇᜼ߍឃࠟࠬਛߩࠟࠬ⁁࡮☸ሶ⁁ᳪᨴ‛⾰ߩหᤨ㒰෰ߦᦼᓙ߇ነߖࠄࠇࠆ㧚㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩ⚦ሹߪ PM ߩ৻ㇱ᝝㓸࡮㉄ൻߦࠄࠇߡ޿ࠆ㧚⃻࿷߹ߢߦ᭽‫ߥޘ‬෻ᔕེᒻᘒߢታ㛎߇ⴕࠊࠇߡ᦭ലߢ޽ࠆߣᕁࠊࠇࠆ㧚Al ၮ᧼ࠍߘߩ߹߹㔚ᭂߣߒߡ೑↪ߔ޿ࠆ߇1-3)㧘ᧄ⎇ⓥߢߪᄙሹ⾰࠮࡜ࡒ࠶ࠢߣߒߡࡐ࡯࡜ࠬဳ㓁ࠆߎߣߦࠃࠅ࡝ࠨࠗࠢ࡞ᕈ㧘ടᾲ᡼ᾲᕈߦఝࠇߚシ㊂ߢࠪࡦᭂ㉄ൻࠕ࡞ࡒ࠽㧔એਅ 㓁ᭂ㉄ൻࠕ࡞ࡒ࠽㧕ߦ⌕⋡ߒߚ㧚㓁ᭂࡊ࡞ߥⵝ⟎ߣߥࠅ߁ࠆ㧚Al ၮ᧼ߦ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽߇ኒ⌕ߒ㉄ൻࠕ࡞ࡒ࠽ߩߺࠍήჿ᡼㔚ߩࡃ࡝ࠕ㧘ߐࠄߦߪ⸅ᇦߩᜂ૕ߡ޿ࠆߎߣ߽ടᾲ᡼ᾲᕈߦ߅޿ߡ᦭೑ߢ޽ࠆ㧚ടᾲ᡼ᾲᕈߦߣߒߡ↪޿ࠆߎߣߦࠃߞߡ㧘⸅ᇦࠍ૬↪ߒߚήჿ᡼㔚ဳ࠺ࠖఝࠇࠆߎߣߪ⸅ᇦߩᜂ૕㧘ߐࠄߦߪ PM ㉄ൻߦ߅޿ߡ㕖Ᏹߦ࡯࠯࡞ឃࠟࠬಣℂⵝ⟎ࠍ㐿⊒ߒࠃ߁ߣߔࠆ߽ߩߢ޽ࠆ㧚᦭ലߢ޽ࠆ㧚㔚ᭂ㧙⺃㔚૕㑆ߦ߅ߌࠆવᾲ․ᕈߦ߅޿ߡߪࡄ

ࠕ࡞ࡒ࠾࠙ࡓ㧔Al㧕ࠍ㉄ᕈ㔚⸃ṁᶧਛߢ㓁ᭂ㉄ൻߔࠆߎߣ࠶ࠢ࠼ࡌ࠶࠼ဳ෻ᔕེࠃࠅఝࠇߡ޿ࠆ 5)㧚߹ߚ㓁ᭂ㉄ൻࠕ࡞ߦࠃߞߡ㧘⥄Ꮖ⚵❱ൻ⊛ߦ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽߇ᒻᚑߐࠇࠆߎ

ࡒ࠽ߪ᭽‫ߥޘ‬ᒻ⁁ࠍߒߚ Al ߦᒻᚑ߇น⢻ߢ޽ࠆߚ߼㧘ࠟࠬಣ4)ߣߪฎߊ߆ࠄ⍮ࠄࠇߡ޿ࠆ 㧚㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩᮨᑼ࿑ࠍ

ℂⵝ⟎᭴ㅧߩᦨㆡൻࠍᐢ޿▸࿐ߢⴕ߁ߎߣ߇ߢ߈ࠆ㧚࿑ 1 ߦ␜ߔ㧚⤑ෘ߇ࡑࠗࠢࡠࠝ࡯࠳࡯ߢᒻᚑߐࠇࠆ㓁ᭂ㉄ൻ
Pore
Cell
Anodic porousalumina filmࠠ࡯ࡢ࡯࠼㧦ឃࠟࠬಣℂ㧘ᄢ᳇࿶㕖ᾲᐔⴧࡊ࡜࠭ࡑ㧘ήჿ᡼㔚ဳ෻ᔕེ㧘㓁ᭂ㉄ൻࠕ࡞ࡒ࠽㧘ᄙሹ⾰᧚ᢱᣣᧄᢥℂᄢቇ Ꮏቇㇱ 㔚᳇࡮㔚ሶᎿቇ⑼㧔870-0397 ᄢಽ⋵ᄢಽᏒ৻ᧁ 1727㧕
Department of Electrical and Electronic Engineering, Facultyof Engineering, Nippon Bunri University, 1727 Ichigi, Oita
870-0397, Japan
kawasaki@nbu.ac.jp

࿑1Alࡐ࡯࡜ࠬဳ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩᮨᑼ࿑

Fig.1 Schematic diagram of anodic porous alumina.

166 (32)31㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߦ㑐ߒߡߪᄙߊߩవⴕ⎇ⓥ߇޽ࠆ㧚⚦ሹ42007 ታ㛎ⵝ⟎ߣᣇᴺߩᓘ㧘ᷓߐ㧘߅ࠃ߮㑆㓒ߪ㓁ᭂ㉄ൻᤨߩ㔚࿶࡮ᤨ㑆㧘㔚⸃ᶧ੹࿁㧘㓁ᭂ㉄ൻߦࠃࠅဋ৻ߥ⤑߇Ყセ⊛ኈᤃߦᓧࠄࠇࠆ⚐ߩ⒳㘃࡮᷷ᐲ╬ߦࠃࠅᲧセ⊛⥄↱ߦ೙ᓮߔࠆߎߣ߇น⢻ߢ޽

ᐲ 99.99%ߩ Al ࠍၮ᧼ߣߒߡ↪޿ߚ㧚
߹ߕ Al ၮ᧼
㧔2060mm㧘

ࠆ6,7)㧚߹ߚߘߩⷙೣᱜߒߊ㈩೉ߐࠇߚᓸ⚦ሹࠍ೑↪ߒߚࡑࠗ8-10)

1.2mm ෘ㧕ߩ㓁ᭂ㉄ൻߔࠆ㕙ࠍࡃࡈ⎇⏴ߒߚᓟ㧘⎇⏴೷߿ᴤ߿⸅ᇦߩᜂ૕ߣߒ

ಽࠍขࠅ㒰ߊߚ߼⿥㖸ᵄᵞᵺ㧔ࠕ࠮࠻ࡦਛ㧕ࠍⴕߞߚ㧚ߘߩ㧚ߒ߆ߒߥ߇ࠄήჿ

ᓟ㧘60%ㆊႮ⚛㉄/ࠛ࠲ࡁ࡯࡞ᷙวṁᇦ㧔૕ⓍᲧ 1㧦4㧘ೋᦼ᷷᡼㔚ߩࡃ࡝ࠕߣߒߡ೑↪ߔࠆ⎇ⓥߪ㕖Ᏹߦዋߥ޿㧚Cho ࠄߪᐲ⚂ 3͠㧕ਛߦ߅޿ߡቯ㔚ᵹ 100mA/cm2㧔3 ಽ㧕ߩ᧦ઙߢ㔚ᾖ᣿㧘⚡ᄖ✢⊒↢ⵝ⟎ߣߒߡߩ೑↪ߦ㑐ߔࠆ⎇ⓥࠍႎ๔ߒߡ

⸃⎇⏴ߔࠆߎߣߦࠃߞߡ⴫㕙ࠍ㏜㕙⁁ߦ઀਄ߍߚ㧚㓁ᭂ㉄ൻࠢࡠ࡮࠽ࡁ࠹ࠢࡁࡠࠫ࡯ߦ㑐ߔࠆ⎇ⓥ
ߡ೑↪ߔࠆ⎇ⓥ߇ᄙߊⴕࠊࠇߡ޿ࠆ

11,12)

13)

㧚Ne㧔5torr㧕㔓࿐᳇ਅߢ⤑ෘ 2Pm ߩ㓁ᭂ㉄ൻࠕ࡞ࡒࠕ࡞ࡒ࠽ߪߘߩ㏜㕙⁁ߦ઀਄ߍߚ⴫㕙ߦᒻᚑߐߖߚ㧚࿑ 2 ߦ࠽ߩߺࠍࡃ࡝ࠕߣߒߡ㧘20kHz ࡄ࡞ࠬ㔚࿶ 460㨪510V ߢࡊ࡜㓁ᭂ㉄ൻࠍⴕ߁ⵝ⟎ߩ᭎⇛࿑ࠍ␜ߔ㧚ߥ߅࿑ 2 ߪ 㕙ߦ㓁ᭂ࠭ࡑ㧔ᦨ⍴ࠡࡖ࠶ࡊ㐳 5mm㧕ࠍ↢ᚑߒߡ޿ࠆ㧚Park ࠄߪࡑࠗ㉄ൻࠍⴕ߁႐วߢ޽ࠆ㧚ਔ㕙ߦⴕ߁႐วߪฦ㕙ߦኻะߔࠆࠃ޿ࠆ14)㧚⤑ෘ 10Pm ߩ߁ߦ㒶ᭂࠍ⸳⟎ߒߚ㧚੹࿁㧘㔚⸃ᶧߣߒߡઍ⴫⊛ߥ⎫㉄ࠍ↪

㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩߺࠍࡃ࡝ࠕߣߒߡ㧘Ne㧔700torr㧕㧘Air㧔ᄢ

޿ߡ㓁ᭂ㉄ൻࠍⴕߞߚ㧚㔚⸃⎇⏴ᓟߩ Al ၮ᧼ࠍ 550mL ߩ⎫᳇࿶㧕㔓࿐᳇ਅߦ߅޿ߡߘࠇߙࠇ 20kHz ੤ᵹ㔚࿶ 650V㧘800㉄᳓ṁᶧਛߦߡ㑆㓒 10mm ߢኻะߐߖ㧘⋥ᵹ㔚࿶ 24V ৻ቯߩ

㨪850V ߢࡊ࡜࠭ࡑ㧔Ǿ100Pm ߩ౞╴ౝ㧕ࠍ↢ᚑߒߡ޿ࠆ㧚᧦ઙਅߢ㓁ᭂ㉄ൻࠍⴕߞߚ㧚㓁ᭂ㉄ൻߐࠇࠆ㗔ၞߪ 20ࠢࡠ᡼㔚ⵝ⟎ߣߒߡߩ⎇ⓥࠍႎ๔ߒߡ޿ࠆ

߹ߚ Iwasaki ࠄߪ᳓⚛↢ᚑߦ㑐ߔࠆ⎇ⓥࠍႎ๔ߒߡ޿ࠆ

15)

㧚40mm ߢ޽ࠆ㧚⎫㉄ߩỚᐲ㧔0.3㧘0.5㧘1.0㧹㧕ߣ᷷ᐲ㧔3͠એᣇߩࡃ࡝ࠕߦ὾ᚑ╬ߩᓟಣℂࠍᣉߒߚ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽

ਅ㧘10͠㧘20͠㧕㧘߅ࠃ߮㓁ᭂ㉄ൻᤨ㑆㧔1㨪20h㧕ࠍᄌൻߐߖ

ࠍ㧘߽߁৻ᣇߦߪ৻⥸⊛ߥࠕ࡞ࡒ࠽ࠍ↪޿ߡ㧘ਥᚑಽ߇ Air㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ࠍ૞⵾ߒߚ㧚㓁ᭂ㉄ൻਛߪᏱߦࡑࠣࡀ࠹ࠖ

㧔ᄢ᳇࿶㧕ߢ޽ࠆ㔓࿐᳇ਅߦ߅޿ߡ 2kHz ੤ᵹ㔚࿶ 3kV ߢࡊ࠶ࠢࠬ࠲࡯࡜࡯ߦߡᡬᜈࠍⴕߞߚ㧚⴫ 1 ߦฦ᧦ઙߦ߅ߌࠆ㓁࡜࠭ࡑ㧔ᦨ⍴ࠡࡖ࠶ࡊ㐳 1.5mm㧕ࠍ↢ᚑߒߡ޿ࠆ㧚ᭂ㉄ൻਛߩᤨ㑆ᐔဋ㔚ᵹࠍ␜ߔ㧚৻ᣇ㧘ᧄ⎇ⓥߢߪᄢ᳇࿶ਅߢࡒ࡝ࠝ࡯࠳࡯ࠡࡖ࠶ࡊ㧘߆ߟᧄ⎇ⓥߦ߅޿ߡߪ㧘ᐢ޿ශട㔚࿶▸࿐ߢ᡼㔚ࡊ࡜࠭ࡑ߇ᓧ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩߺࠍࡃ࡝ࠕߣߔࠆ᧦ઙਅߢ᡼㔚ࡊ࡜࠭ࡑࠄࠇࠆᣇ߇ᦨㆡൻࠍⴕ߁਄ߢᅢ߹ߒ޿㧚ࠃߞߡ㧘߹ߕߪ◲ᤃࠍ↢ᚑߐߖࠆߎߣࠍ⠨߃ߡ޿ࠆ߇㧘ߘߩࠃ߁ߥ⎇ⓥႎ๔଀ߪߥⵝ⟎ߦࠃࠅࠡࡖ࠶ࡊ㑆߇ࠬࡄ࡯ࠢߦ⥋ࠆ㔚࿶㧔એਅ ࠬࡄ࡯ᬌ⚝ߒߚ▸࿐ౝߢ⷗ᒰߚࠄߥ޿ߩ߇⃻⁁ߢ޽ࠆ㧚ߘߎߢ㧘੹ࠢ㔚࿶㧕ߣ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩ૞⵾᧦ઙߣߩ㑐ଥߦߟ޿ߡో࿁ߪ߹ߕᄢ᳇࿶ਅߦ߅ߌࠆࡒ࡝ࠝ࡯࠳࡯ࠡࡖ࠶ࡊ㑆ߦဋ৻߆૕⊛ߥ௑ะࠍ⺞ߴߚ㧚ߘߒߡ㜞޿ࠬࡄ࡯ࠢ㔚࿶ࠍ␜ߒߚ᧦ઙߟ቟ቯߦ᡼㔚ࡊ࡜࠭ࡑࠍ↢ᚑߐߖࠆߎߣࠍ⋡⊛ߣߒߚ㧚᭽‫ޘ‬ߦࠃࠅ᡼㔚ࡊ࡜࠭ࡑߩ↢ᚑࠍ⹜ߺߚ㧚ߥታ㛎᧦ઙਅߢ૞⵾ߒߚ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ࠍࡃ࡝ࠕߣߒ㧘᡼㔚ࡊ࡜࠭ࡑߩ↢ᚑ߇น⢻߆ߤ߁߆⺞ߴߚߩߢႎ๔ߔࠆ㧚ࠬࡄ࡯ࠢ㔚࿶ߪห᧦ઙߢ૞⵾ߒߚ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ࠍᄢ᳇
ਛߦߡࠡࡖ࠶ࡊ㐳 1mm ߢኻะߐߖ㧘Al ၮ᧼ࠍ㔚ᭂߣߒߡ
1kHz ᱜᒏᵄ੤ᵹ㔚࿶ࠍශടߔࠆߎߣߦࠃࠅ⺞ߴߚ㧚ࠬࡄ࡯ࠢ

24V

߳ߩ⒖ⴕߪ⋡ⷞߣࠝࠪࡠࠬࠦ࡯ࡊ㧔LeCroy, LT374M㧕ߦ߅ߌThermostatࠆ㔚࿶ᵄᒻߩᄌൻ߆ࠄ್ᢿߒߚ㧚ߎߩ႐วߪ㓁ᭂ㉄ൻࠕ࡞ࡒ

A10mm

AlAl

Heater
Thermometer⴫1
Table 1㓁ᭂ㉄ൻߦ߅ߌࠆᐔဋ㔚ᵹ
Average current in anodizing.

Sulfuric acid solution
Concentration
䋨mol/L䋩
0.3
Ice-coldwater

Sulfuric acid solution
Magnetic stirrer

࿑2㓁ᭂ㉄ൻⵝ⟎ߩ᭎⇛࿑

Fig.2

Schematic diagram for the anodizing setup.

0.5

1.0Temperature䋨㷄䋩

Av. current
䋨mA䋩

3
1020
31020
31030
50
100
50
100
190
100
300

20870

167 (33)࠽ਛᔃㇱߩ 2010mm ߇᡼㔚㗔ၞߣߥࠆ㧚ࠟࠬߩᵹ౉಴ߪߥ

࿑ 4㧔a㧕
㧘㧔b㧕㧘㧔c㧕ߪߘࠇߙࠇ⴫㕙㧘⴫㕙ߦᐔⴕߥᢿ㕙㧘⴫޿㧚ߘߒߡ࿑ 3 ߦ␜ߔࠃ߁ߥᐔⴕᐔ᧼࠲ࠗࡊߩήჿ᡼㔚ဳ෻㕙ߦ⋥ⷺߥᢿ㕙ࠍ␜ߔ㧚࿑ 4㧔a㧕ߣ㧔b㧕ߩᲧセ߆ࠄ㧘⴫㕙ᔕེࠍ૞⵾ߒߡ᡼㔚ࡊ࡜࠭ࡑߩ↢ᚑࠍ⹜ߺߚ㧚㜞㔚࿶஥㧘ធ߆ࠄ⷗߃ࠆሹߪᢿ㕙ࠃࠅᲧセ⊛ዊߐ޿ߎߣ߇ࠊ߆ࠆ㧚ߎࠇߪ࿾஥㔚ᭂߣߥࠆ Al ၮ᧼ߦߪߘࠇߙࠇਔ㕙㧘 㕙ߦ㓁ᭂ㉄ൻࠕ㓁ᭂ㉄ൻ㐿ᆎೋᦼߩㆊᷰ⊛ߥሹᒻᚑߩߚ߼ሹᓘ߇ዊߐߊႧ߇

࡞ࡒ࠽ࠍᒻᚑߒࡃ࡝ࠕߣߒߚ㧚ߥ߅㔚ᭂߩࠛ࠶ࠫㇱߪ Al ߇㔺ߞߚ⁁ᘒߦߥߞߡ޿ࠆߚ߼ߢ޽ࠆ 16)㧚࿑ 4㧔c㧕߆ࠄሹߪ⋥✢಴ߒߡ޿ࠆߩߢ㧘੹࿁ߪߘߩㇱಽߩߺ࠹ࡈࡠࡦߦߡ⛘✼ߒߚ㧚⊛ߦᚑ㐳ߒࡂ࠾ࠞࡓ⁁ߩ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽߇ᒻᚑߐࠇߡ޿ࠆ

ࠡࡖ࠶ࡊ㐳ߪ 1.16mm ߢ޽ࠆ㧚㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩߺ߇ࡃ࡝

ߎߣ߇ࠊ߆ࠆ㧚ߎߩࠃ߁ߥࠕ࡞ࡒ࠽ጀ߇㓁ᭂ㉄ൻߒߚ㗔ၞోࠕߢ޽ࠆ㗔ၞߪ 2010mm ߢ޽ࠆ㧚᡼㔚㗔ၞ߳ߪᵹ㊂૕ߦᒻᚑߐࠇߡ޿ࠆߎߣࠍ⏕⹺ߒߚ㧚ઁߩ᧦ઙߢ૞⵾ߒߚ㓁

1.0L/min ߦߡ N2 ࠍଏ⛎ߒߚ㧚ᭂ㉄ൻࠕ࡞ࡒ࠽ߦߟ޿ߡ߽ห᭽ߢ޽ߞߚ㧚߹ߚ㧘৻⥸⊛ߦ㓁੤ᵹ㜞㔚࿶ߪାภ⊒↢ེ㧔IWATSU, SG-4105㧕߆ࠄߩ಴ജ

ᭂ㉄ൻࠕ࡞ࡒ࠽ߪ㕖⚿᥏⁁ᘒߦ޽ࠆߎߣ߇⍮ࠄࠇߡ޿ࠆ߇

ାภࠍჇ᏷ེ㧔TREK, 20/20C㧕ߢ 2000 ୚ߔࠆߎߣߦࠃߞߡ17,18)⊒↢ߐߖߚ㧚
ශട㔚࿶୯ߪାภ⊒↢ེߩ಴ജ୯ߦ 2000 ࠍ߆ߌ߆ࠄోߡߩ૞⵾᧦ઙߦ߅޿ߡ㕖⚿᥏⁁ᘒߦ޽ࠆߎߣࠍ⏕⹺ߒߚ୯ߣߒߚ㧚᡼㔚㔚ജߪធ࿾஥ߦធ⛯ߐࠇߚ 100nF ߩࠦࡦ࠺ߚ㧚⵬⿷ߢߪ޽ࠆ߇㧘὾ᚑߦࠃߞߡǫဳ߿ǩဳߩ⚿᥏ᕈࠕ࡞ࡦࠨߦࠃࠅ V㧙Q ࡝ࠨ࡯ࠫࡘ࿑ᒻࠍឬ߈ߘߩ㕙Ⓧ߆ࠄ▚಴ߒࡒ࠽ߦォ⒖߇น⢻ߢ޽ࠆߎߣ߽⍮ࠄࠇߡ޿ࠆ 19)㧚৻ᣇ㧘⴫㕙ߚ㧚᡼㔚㔚ᵹᵄᒻߩⷰኤߦߪ㔚ᵹࡊࡠ࡯ࡉ㧔Pearson, Model⁁ᘒߦߪ㆑޿߇⷗ࠄࠇߚ㧚ߎࠇߦߟ޿ߡߪᓟㅀߔࠆߎߣߦߔ2878㧕ࠍ↪޿ߚ㧚ࠆ㧚ᧄ⎇ⓥߢߪߎߩࠃ߁ߥ㕖⚿᥏⁁ᘒߦ޽ࠆࡐ࡯࡜ࠬဳ㓁ᭂ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩ⴫㕙╬ࠍశቇ㗼ᓸ㏜㧔Nikon㧘ECLIPSE㧘ᧄታ㛎ߦ߅ߌࠆ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽߽ X ✢࿁᛬ࡄ࠲࡯ࡦ㉄ൻࠕ࡞ࡒ࠽ࠍήჿ᡼㔚ߩࡃ࡝ࠕߣߒߡ↪޿ߚ㧚

E600㧕
㧘㔚⇇᡼಴ᒻ⿛ᩏ㔚ሶ㗼ᓸ㏜㧔ᣣᧄ㔚ሶ㧘JSM-7400F㧕

࿑ 5 ߦ㓁ᭂ㉄ൻᤨ㑆ߣࠬࡄ࡯ࠢ㔚࿶ߩ㑐ଥࠍ␜ߔ㧚࿑ 5㧔a㧕㧘

ߦߡⷰኤߒߚ㧚⚿᥏᭴ㅧࠍ X ✢࿁᛬ⵝ⟎㧔࡝ࠟࠢ㧘RINT 2000㧕

㧔b㧕ߪߘࠇߙࠇ⎫㉄᷷ᐲ 10͠㧘Ớᐲ 1.0M ߩ႐วߢ޽ࠆ㧚࿑ߦࠃࠅ⺞ߴߚ㧚⤑ෘࠍ᷵㔚ᵹᑼ⤑ෘ⸘㧔ࠨࡦࠦ࠙㔚ሶ⎇ⓥᚲ㧘

5㧔a㧕ࠃࠅ⎫㉄Ớᐲ 0.5M㧘1.0M ߩ႐วߪࠬࡄ࡯ࠢ㔚࿶߇ᦨ

EDY-1000㧕ߦࠃࠅ⺞ߴߚ㧚Ყ⺃㔚₸ࠍ LCR ࡔ࡯࠲㧔KEISEI㧘ᄢߣߥࠆ㓁ᭂ㉄ൻᤨ㑆߇ሽ࿷ߔࠆߎߣ߇ࠊ߆ࠆ㧚ㅢᏱ㧘㓁ᭂ

AR-490D㧕߆ࠄ᳞߼ߚ㕒㔚ኈ㊂ࠃࠅ▚಴ߒߚ㧚㕒㔚ኈ㊂᷹ቯ㉄ൻࠕ࡞ࡒ࠽ߪㅘ᣿ߢ޽ࠆ߇㧘ᦨᄢ୯ࠍ␜ߔᤨ㑆એ਄ߩ㓁ᭂ↪ߩ㔚ᭂ㧔55mm㧕ߪࠪ࡯࡞ㇱ߽ዉ㔚ᕈࠍ᦭ߔࠆࠕ࡞ࡒ࠹

㉄ൻࠍⴕ߁ߣ⋡ⷞߢ߽⨥⦡߹ߚߪ⊕⦡ߦᄌ⦡ߔࠆߩ߇ⷰኤߐ

࡯ࡊߦߡ૞⵾ߒߚ㧚᷵㔚ᵹᑼ⤑ෘ⸘ߦࠃࠅ᳞߼ߚ⤑ෘࠍ᷹ቯࠇࠆ㧚ߎࠇߪᦨ⴫㕙߇㉄ᕈ㔚⸃ᶧߦࠃߞߡൻቇṁ⸃ߐࠇࠆߎ

ㇱߩෘߐߣߒߡ↪޿ߚ㧚ߣߦࠃߞߡ࠮࡞᭴ㅧߩ⎕უ߇ᆎ߹ࠅ㧘ࠗࠝࡦߩ⒖േ߇㒖ኂߐ ታ㛎⚿ᨐ߅ࠃ߮⠨ኤ
࿑ 4 ߦઍ⴫⊛ߥ߽ߩߣߒߡ 0.5M㧘20͠㧘2h ߩ᧦ઙߢ૞⵾
ߒߚ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽㧔⤑ෘ⚂ 60Pm㧕ߩ SEM ౮⌀ࠍ␜ߔ㧚
1kHz
H.V. Al20

㧔a㧕⴫㕙
N2ATeflon
sheet

Anodic porousaluminaAl20

1.16㧔b㧕ᢿ㕙㧔⴫㕙ߦᐔⴕߥ㕙㧕SpacerAl

10
Cross section at Aunit : mm

࿑3200nmN2

ήჿ᡼㔚ဳ෻ᔕེ

Fig.3 Schematic diagram of the silent discharge reactor
only with anodic porous alumina as barriers.

࿑4㧔c㧕ᢿ㕙㧔⴫㕙ߦ⋥ⷺߥ㕙㧕ઍ⴫⊛ߥ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽㧔0.5M㧘20͠㧘2h㧕ߩ
SEM ౮⌀

Fig.4 Typical SEM photographs of the anodic porousalumina prepared in 0.5M sulfuric acid at 20͠ for 2hours : 㧔a㧕the surface,㧔b㧕the cross section parallel
to surface and㧔c㧕the cross section perpendicular tosurface.

168 (34)31ࠇᱜᏱߥ㓁ᭂ㉄ൻ߇ⴕࠊࠇߥߊߥߞߚߚ߼ߢ޽ࠆߣᕁࠊࠇ

42007

ߘߩ᧦ઙߦଐሽߔࠆᤨ㑆ߢᦨᄢ୯ࠍ␜ߔߎߣ߇ࠊ߆ߞߚ㧚ࠆ㧚ߎࠇ߇ࠬࡄ࡯ࠢ㔚࿶߇ૐਅߒߚⷐ࿃ߩ 1 ߟߢ޽ࠆߣᕁࠊ࿑ 6 ߦࠬࡄ࡯ࠢᓟߩ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽⴫㕙౮⌀ࠍ␜ߔ㧚ࠬࠇࠆ㧚0.3M ߩ႐ว߽ߐࠄߦᤨ㑆ࠍ߆ߌߡ㓁ᭂ㉄ൻࠍⴕ߁ߣ㧘ࡄ࡯ࠢߦࠃࠅ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽߇៊்ߒߡ߅ࠅ㧘ߘߎ߆ࠄ߭޽ࠆᤨ㑆ߢࠃࠅૐ޿ࠬࡄ࡯ࠢ㔚࿶ࠍᦨᄢ୯ߣߒߡ␜ߔߣផ᷹߮ഀࠇ߇↢ߓߡ޿ࠆߎߣ߇ࠊ߆ࠆ㧚ߐࠇࠆ㧚ߒ߆ߒ㧘ઁߩỚᐲߩ႐วߣหᤨ㑆ߢᲧセߒߡࠬࡄ࡯ࠬࡄ࡯ࠢ㔚࿶ߦᓇ㗀ࠍਈ߃ࠆ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ጀߩ⠴㔚࿶ࠢ㔚࿶ߪૐ޿௑ะߦ޽ߞߚߚ߼㧘૞⵾᧦ઙߣߒߡߪਇㆡᒰߢߪߘߩෘߐߣ㑐ଥ߇ᷓ޿ߚ߼㧘ᧄ⎇ⓥߢ૞⵾ߒߚ㓁ᭂ㉄ൻࠕ޽ࠆߣߩ್ᢿߦࠃࠅߐࠄߦ㐳޿ᤨ㑆ߢߩታ㛎ߪⴕߞߡ޿ߥ࡞ࡒ࠽ࠍෘߐࠍ⺞ߴߚ㧚޿㧚߹ߚᦨᄢࠍ␜ߔ߹ߢߩᤨ㑆ౝߦ߅ߌࠆᄌൻߪ㧘Ớᐲ߇㜞

࿑ 7 ߦ㓁ᭂ㉄ൻᤨ㑆ߣ⤑ෘߩ㑐ଥࠍ␜ߔ㧚ᤨ㑆ߩ⚻ㆊߣߣߊߥࠆ߶ߤᕆߢ޽ࠆ௑ะߦ޽ߞߚ㧚ߎࠇߪઁߩ᷷ᐲߦ߅޿ߡ߽ߦ߶߷⋥✢⊛ߦ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩ⤑ෘߪჇടߔࠆ௑ะߦ

߽หߓ௑ะߦ޽ߞߚ㧚࿑ 5㧔b㧕ߦ⎫㉄Ớᐲ 1.0M ৻ቯߦ߅ߌ

޽ߞߚ㧚߹ߚᚑ⤑ㅦᐲ㧔௑߈㧕ߪ᷷ᐲ㧘Ớᐲ߇㜞޿߶ߤᣧ޿

ࠆ᷷ᐲଐሽᕈࠍ␜ߔ㧚10͠ߩ․ᕈߪ 3͠ߩ․ᕈ߇⍴ᤨ㑆஥ߦ߇㧘ߘࠇ߇࿑ 5 ߦ␜ߔࠬࡄ࡯ࠢ㔚࿶ߩᄌൻߦኻᔕߒߡ޿ࠆߣ

ࠪࡈ࠻ߒߡ޿ࠆࠃ߁ߢ޽ࠆ㧚20͠ߩ႐วߢߪߐࠄߦ⍴ᤨ㑆ߢᕁࠊࠇࠆ㧚ߒ߆ߒߥ߇ࠄ㧘ࠬࡄ࡯ࠢ㔚࿶ߦߪᦨᄢࠍ␜ߔᤨ㑆㜞޿ࠬࡄ࡯ࠢ㔚࿶ࠍ␜ߔߣᕁࠊࠇߚ߇㧘ઁߩ᧦ઙߣᲧセߒߡ߇޽ࠆߩߦኻߒߡ㧘ߘࠇߪ⤑ෘߩᄌൻߣߪ㑐ଥ߇ߥ޿ߎߣ߇

ૐ޿௑ะߦ޽ߞߚ㧚ߎߩ᧦ઙߢߪ⍴ᤨ㑆ߢ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽

ࠊ߆ࠆ㧚ᤨ㑆ߣߣ߽ߦ⤑ෘߪჇടߒࠬࡄ࡯ࠢ㔚࿶ߪ㜞ߊߥࠆ߇ᄌ⦡ߔࠆ㧚ࠃߞߡ㧘࠮࡞᭴ㅧ߇⎕უߐࠇࠆߣ޿߁หߓⷐ࿃

߇㧘᧦ઙࠃߞߡ᳿߹ࠆ޽ࠆᤨ㑆ࠍ⚻ㆊߔࠆߣหᤨߦ࠮࡞᭴ㅧߢࠬࡄ࡯ࠢ㔚࿶ߪૐਅߒߚߣᕁࠊࠇࠆ㧚ઁߩ᧦ઙߦ߅޿ߡ߽㧘ߩ⎕უ߇ᆎ߹ࠅ㧘ߘࠇ߇ⷐ࿃ߣߥߞߡࠬࡄ࡯ࠢ㔚࿶ߪૐਅߒ

7654200Pm

0.3M
0.5M
1.0M30510

152025

Anodizing time [hour]㧔a㧕⎫㉄᷷ᐲ 10͠㧔b㧕ࠬࡄ࡯ࠢ㔚࿶ 6.0kV
㧔1.0M㧘3͠㧘10h㧕㧔a㧕ࠬࡄ࡯ࠢ㔚࿶ 4.6kV
㧔1.0M㧘3͠㧘3h㧕
࿑6ࠬࡄ࡯ࠢߦࠃࠅ៊்ߒߚ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽

Fig.6

Typical photographs of the arc spot.
㧔a㧕Spark voltage : 4.6kV㧔1.0M㧘3͠㧘 3h㧕㧔b㧕Spark voltage : 6.0kV㧔1.0M㧘3͠㧘10h㧕

7300
6250
200

5150
43͠
10͠
20͠

0.3M, 10͠
0.5M, 10͠
1.0M, 3͠
10͠
20͠

100
50

305

1015

20

Anodizing time [hour]2500㧔b㧕⎫㉄Ớᐲ 1.0M
࿑5㓁ᭂ㉄ൻᤨ㑆ߣࠬࡄ࡯ࠢ㔚࿶ߩ㑐ଥ

Fig.5 The influence of the anodizing time on thespark voltage at㧔a㧕10͠ and㧔b㧕1.0M.

5101520

Anodizing time [hour]࿑7㓁ᭂ㉄ൻᤨ㑆ߣ⤑ෘߩ㑐ଥ

Fig.7

The influence of the anodizing time on thethickness of alumina film.

25

169 (35)ߚߣᕁࠊࠇࠆ㧚ࠃߞߡ㧘㜞޿ࠬࡄ࡯ࠢ㔚࿶ࠍᓧࠆߚ߼ߦߪ㓁․ᕈࠍ␜ߒߚ߇㧘20͠ߩ႐วߪ⤑ෘ߇ห⒟ᐲߢ޽ࠆߦ߆߆ࠊ

ᭂ㉄ൻࠍ㐳޿ᤨ㑆ⴕߞߡෘ޿⤑ࠍᒻᚑߐߖࠇ߫⦟޿ߣ޿߁ࠊ

ࠄߕో૕⊛ߦૐ޿ࠬࡄ࡯ࠢ㔚࿶ࠍ␜ߒߚ㧚੹࿁㧘࠺࡯࠲ࠍ␜

ߌߢߪߥߊ㧘
᧦ઙߦࠃߞߡߪ਄㒢߇ሽ࿷ߔࠆߎߣ߇ࠊ߆ߞߚ㧚ߒߡߪ޿ߥ޿߇㧘⎫㉄Ớᐲ 2.0M㧘᷷ᐲ 3͠ߩ႐วߦ߅޿ߡ߽㧘࿑ 8 ߦ੹࿁ⴕߞߚታ㛎᧦ઙߦ߅ߌࠆ⤑ෘߣࠬࡄ࡯ࠢ㔚࿶ߩ

1.0M㧘20͠ߩ႐วߣห᭽ߥ․ᕈࠍ␜ߒߚ㧚߹ߚోߡߩ᧦ઙߦ

㑐ଥࠍ␜ߔ㧚
ߎߩ࿑߆ࠄో૕⊛ߥ௑ะ߇ࠊ߆ࠆ㧚⤑ෘ߇100Pm߅޿ߡ⤑ෘ߇ 220Pm ઃㄭࠍ⿥߃ࠆߣ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߪᄌ

એਅߩ▸࿐ߢߪ૞⵾᧦ઙ߇෸߷ߔࠬࡄ࡯ࠢ㔚࿶߳ߩᓇ㗀ߪዋ⦡ߒᆎ߼ࠬࡄ࡯ࠢ㔚࿶ߪૐਅߔࠆ௑ะߦ޽ߞߚ㧚ߥ޿ߣᕁࠊࠇࠆ㧚ᄙዋ߫ࠄߟ߈ߪ޽ࠆ߽ߩߩߎߩ▸࿐ߦ߅޿ߎߎߢ㧘࿑ 9㧔a㧕㧘㧔b㧕㧘㧔c㧕ߦ⎫㉄Ớᐲ 1.0M ߦ߅ߌࠆߘߡߪ૞⵾᧦ઙߢߪߥߊ⤑ෘߦᄢ߈ߊଐሽߔࠆߣᕁࠊࠇࠆ㧚৻

ࠇߙࠇ 3͠㧔12h㧕㧘10͠㧔5h㧕㧘20͠㧔2h㧕ߩ᧦ઙߢ૞⵾ߒߚ

ᣇ㧘⤑ෘ߇ 150Pm એ਄ߦߥࠆߣࠬࡄ࡯ࠢ㔚࿶ߪ૞⵾᧦ઙߦ߽

㓁ᭂ㉄ൻࠕ࡞ࡒ࠽⴫㕙ߩ SEM ౮⌀ࠍ␜ߔ㧚ߎߩ᧦ઙߢߪ޿ଐሽߔࠆ㧚⎫㉄Ớᐲ 1.0M ߢ᷷ᐲ 3͠ߣ 10͠ߩ႐วߪห᭽ߥ

ߕࠇ߽⴫㕙ߪᄌ⦡ߒߡ޿ߥ޿㧚ሹᓘߩ㆑޿ߥߤ߽ⷰኤߐࠇߚ߇㧘㗼⪺ߥ㆑޿ߣߒߡ࿑ 9㧔c㧕ߦ␜ߔ 20͠ߩ႐วߪሹߣሹ߇

0.3M, 3͠
10͠
20͠

0.5M, 3͠
10͠
20͠

1.0M, 3͠10͠
20͠ߟߥ߇ߞߡ޿ࠆ▎ᚲ߇㕙ో૕ߦᄙߊⷰኤߐࠇߚ㧚ߎߩࠃ߁ߥ
▎ᚲ߇⿠ὐߣߥߞߡ⛘✼⎕უࠍ⿠ߎߒ߿ߔ޿⁁ᘒߦ޽ࠅ㧘ૐ

7޿ࠬࡄ࡯ࠢ㔚࿶ࠍ␜ߒߚߣᕁࠊࠇࠆ㧚੹࿁ߩ૞⵾᧦ઙߦ߅޿ߡ㧘150Pm એ਄ߩ⤑ෘ߇Ყセ⊛ኈᤃ6ߦᓧࠄࠇߚߩߪ⎫㉄Ớᐲ 1.0M ߩ႐วߩߺߢ޽ߞߚ㧚ઁߩỚᐲߦ߅޿ߡߪ㧘㕖Ᏹߦ㐳޿ᤨ㑆ࠍⷐߔࠆߣផ᷹ߐࠇߚ߆㧘߽

5ߒߊߪ⍴޿ᤨ㑆ߢᄌ⦡ߔࠆ߆ߩ޿ߕࠇ߆ߦࠃߞߡ૞⵾߇࿎㔍
ߢ޽ߞߚ㧚

4

એ਄ߩߎߣ߆ࠄ㧘੹࿁ߩታ㛎▸࿐ౝߢߪ 1.0M ߢ 3͠߹ߚߪ
10͠ߢ૞⵾ߒߚ⤑ෘ 150㨪220Pm ߩ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ࠍ↪޿

3050

100

150

200

250300ߚ႐ว߇ᦨ߽㜞޿ࠬࡄ࡯ࠢ㔚࿶ࠍ␜ߔߎߣ߇ࠊ߆ߞߚ㧚ߎߎ
ߢ࿑ 5㧔b㧕ߦ␜ߐࠇࠆ 1.0M ߩ႐วߩ㓁ᭂ㉄ൻᤨ㑆ߣࠬࡄ࡯

Thickness of alumina film [Pm]ࠢ㔚࿶ߩ㑐ଥ߆ࠄ㧘10͠ߩ႐วߩ߶߁߇⍴޿ᤨ㑆ߢ૞⵾ߔࠆ࿑8⤑ෘߣࠬࡄ࡯ࠢ㔚࿶ߩ㑐ଥ

Fig.8

The relationship between the thickness of alumina
film and the spark voltage.

ߎߣ߇น⢻ߢ޽ࠆߎߣ߇ࠊ߆ࠆ㧚ࠃߞߡ㧘1.0M㧘10͠㧘5hߩ᧦ઙߢ૞⵾ߒߚ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ࠍ↪޿ߡ㧘࿑ 3 ߦ␜ߔ෻PO
㧔a㧕3͠, 12h㧔b㧕10͠, 5h㧔c㧕20͠, 2h⤑ෘ㧦192Pmࠬࡄ࡯ࠢ㔚࿶㧦6.2kV⤑ෘ㧦154Pmࠬࡄ࡯ࠢ㔚࿶㧦6.3kV⤑ෘ㧦165Pmࠬࡄ࡯ࠢ㔚࿶㧦5.2kV

࿑9㓁ᭂ㉄ൻࠕ࡞ࡒ࠽⴫㕙ߩ SEM ౮⌀㧔⎫㉄Ớᐲ 1.0M㧕

Fig.9

The surface SEM photographs of the anodic porous alumina prepared in 1.0M sulfuric acid.
㧔a㧕 3͠, 12h㧔Thickness : 192Pm㧘Spark voltage : 6.2kV㧕㧔b㧕10͠, 5h㧔‫ޖ‬: 154Pm㧘‫ޖ‬: 6.3kV㧕㧔c㧕20͠, 2h㧔‫ޖ‬: 165Pm㧘‫ޖ‬: 5.2kV㧕170 (36)3142007ήჿ᡼㔚ߩࡃ࡝ࠕߦ↪޿ࠆ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩ૞⵾㧔Ꮉፒᢅਯ㧕ᔕེߦࠃࠅ᡼㔚ࡊ࡜࠭ࡑߩ↢ᚑࠍ⹜ߺߚ㧚ߎߩ᧦ઙߢ૞⵾ߒߚ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩᲧ⺃㔚₸㧔ሹࠍ฽߻㧕ߪ⚂ 6.4 ߢ޽ߞ20mmߚ㧚ߘߩ⚿ᨐ㧘࿑ 10 ߦ␜ߔࠃ߁ߦ N2 ਛ㧘5.4kV㧘2.2㨃ߩ᧦ઙߢဋ৻߆ߟ቟ቯߦ᡼㔚ࡊ࡜࠭ࡑࠍ↢ᚑߔࠆߎߣ߇ߢ߈ߚ㧚
20mm ߩㇱಽ߇㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩߺ߇ࡃ࡝ࠕߩㇱಽߢ޽ࠆ㧚ߚߛߒ㧘ߎߩ᡼㔚㔚ജߦߪ࠹ࡈࡠࡦ߇ࡃ࡝ࠕߦߥߞߡ޿
ࠆㇱಽߦ⊒↢ߒߡ޿ࠆ᡼㔚ߩ㔚ജ߽฽߹ࠇߡ޿ࠆ㧚੹ᓟ㧘᡼
㔚․ᕈ㧘ࠟࠬಣℂ․ᕈ㧘⸅ᇦႣᏓߩലᨐ߅ࠃ߮㔚ᭂᒻ⁁ߩᦨㆡൻ╬ࠍ⺞ߴߡ޿ߊ੍ቯߢ޽ࠆ㧚࿑ 10㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩߺࠍࡃ࡝ࠕߣߒߚήჿ
᡼㔚ࡊ࡜࠭ࡑ

Fig.10The silent discharge plasma only with theanodic porous alumina as barriers.

 ߹ߣ߼੹࿁㧘ᄢ᳇࿶ਅߢࡒ࡝ࠝ࡯࠳࡯ࠡࡖ࠶ࡊ㧘߆ߟ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ߩߺࠍࡃ࡝ࠕߣߔࠆ᧦ઙਅߢ᡼㔚ࡊ࡜࠭ࡑࠍဋ৻߆ߟ቟ቯߦ↢ᚑߐߖࠆߎߣࠍ⋡⊛ߣߒߚ㧚᭽‫ߥޘ‬ታ㛎᧦ઙਅߢ૞⵾ߒߚ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ࠍࡃ࡝ࠕߣߒ㧘᡼㔚ࡊ࡜࠭ࡑߩ↢ᚑ߇น⢻߆ߤ߁߆ࠍ⺞ߴߚ㧚ߘߩ⚿ᨐ㧘⎫㉄Ớᐲ 1.0M㧘᷷ᐲ 3͠
㧔12㨪15h㧕߹ߚߪ 10͠㧔5㨪7h㧕ߩ᧦ઙਅߢ૞⵾ߒߚ⤑ෘ 150
㨪220mm ⒟ᐲߩ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽߇੹࿁ߩታ㛎▸࿐ౝߦ߅޿ߡߪᦨ߽ㆡᒰߢ޽ࠆߎߣ߇ࠊ߆ߞߚ㧚ߘࠇࠃࠅ⭯ߊߡ߽ෘߊߡ߽ήჿ᡼㔚ߩࡃ࡝ࠕߣߒߡߪਇㆡᒰߢ޽ߞߚ㧚ߘߒߡ㧘
1.0M㧘10͠㧘5h ߩ᧦ઙߢ૞⵾ߒߚ⤑ෘ⚂ 150Pm ߩ㓁ᭂ㉄ൻࠕ࡞ࡒ࠽ࠍࡃ࡝ࠕߣߒߡ㧘ήჿ᡼㔚ࡊ࡜࠭ࡑࠍဋ৻߆ߟ቟ቯߦ↢ᚑߐߖࠆߎߣߦᚑഞߒߚ㧚ᦨᓟߦ㧘ታ㛎߿࠺࡯࠲ᢛℂߩ⵬ഥࠍߒߡ޿ߚߛ޿ߚ૒⮮⑲ବำ㧔ᐔᚑ 18 ᐕᐲᧄቇᄢቇ㒮ୃੌ㧕ߦᗵ⻢޿ߚߒ߹ߔ㧚ᣣ㗃߆ࠄߏᜰዉ㧘ߏᡰេࠍ޿ߚߛߊ㧘ᄢಽᄢቇᎿቇㇱ㔚᳇㔚ሶᎿቇ⑼㧘ᄢਭ଻೑৻ᢎ᝼㧘㊄Ỉ⺈มಎᢎ᝼㧘߅ࠃ߮ᔕ↪ൻቇ⑼㧘
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