Gas distribution systems | Chip-tool support | Facilities support equipment

Measurement solutions forsemiconductor, solar, light

WIKA in brief
A family businesssince 1946

> 11,200 employees
Global service anddistribution

1.2 billion euro turnover
Quality management:
ISO 9001, ISO 13485
Environmental

management: ISO 14001
2„

WIKA’s unique experienceand know-how makesensing technology
smarter, add more value
and prepare it for asustainable future.

CONTENTS
WIKA KNOW-HOW

Design and materials

4

Certificates and approvals

7

Testing, packaging and preservation
PROCESS GAS MANAGEMENT

6

Ultra High Purity pressure transducers

8

Diaphragm pressure gauges

11

Pressure Gauges and switches
Displays and scales

FACILITIES SUPPORT EQUIPMENT

1012Installation and testing

13

Pressure sensors for industrial applications

14

Exhaust and abatement monitoring

CDA, pneumatics and purity gas sticks
Process cooling water
WIKA WORLDWIDE

14

15
15
16

WIKA – YOUR YOUR RELIABLE PARTNER
WIKA’s UHP pressure gauge and transducer productAs the market leader in measurement technology, we

taic and flat panel display industries a comprehensive

innovative and high-precision products, IIoT solutionslines offer customers in the semiconductor, photovolportfolio of pressure measurement solutions for gas

delivery systems and on-tool gas panels of the highest
purity requirements.

A team of development engineers provide custom-

ised designs to meet customer-specific applications

support your transformation with a broad portfolio ofand services, which we are continuously developingwith more than 100 development engineers. Together

with our global service and distribution network and ourown production, we offer smart, efficient, and sustainable top quality for your requirements.

and requirements. Comprehensive quality control andIn this way, we can continue to grow together. That is

is built to last.

the future.

engineering efforts ensure that every WIKA instrument“Smart in sensing” and you can rely on it now and in

Alexander Wiegand,

Chairman and CEO, WIKA
3

DESIGN AND MATERIALS

WIKA’s High Purity and Ultra High Purity products are designed to the rigorous standards and recommendations
relevant to the semiconductor market and its governing agencies. UHP Bourdon tube pressure gauges have electropolished internal surfaces and are the standard gauge of gas distribution systems installed in semiconductor
FABs.
The bourdon tube UHP pressure gauge series is complemented by a diaphragm-based UHP pressure gauge offering
the smallest possible dead space and shortest purge cycle
times.
WIKA’s UHP pressure transducers are electronic instrumentsof the smallest footprint which meet the highest ex protection
requirements. They enable the increasingly compact designof gas cabinets or valve manifold panels that are installed inmodern chip production.

4

A patented design provides the semiconductor industry withthe only true vacuum-referenced, non-capacitance based
UHP pressure transducer in the market. WIKA’s provenmonolithic thin-film pressure sensor technology serves
advanced requirements in pressure measurement for gas
distribution and point of use on chip tools.

Media-wetted surfaces are designed to comply with SEMI
standards and are compatible with semiconductor flammable, toxic and corrosive gases. While all reputable manufacturers comply with SEMI specifications, WIKA products
go one step further incorporating technology with customer
preference into every design. By allowing to select wetted
surface area materials comprised of 316L double-melt stainless steel or proprietary VIM/VAR materials, the extensive
configurability in terms of electrical and process connections
makes the UT01 transducers perfect for both design-ins andretrofits.
The accuracy of all WIKA products is reported in accordance with national ASME and international IEC standards toaddress industry expectations for non-linearity, hysteresis,
non-repeatability and reproducibility.

5

TESTING, PACKAGING
AND PRESERVATION

In order to comply with the High Purity and Ultra High Purity(UHP) requirements of the semiconductor industry, WIKA
UHP and HP products are cleaned, packaged and preservedin accordance with SEMI specifications. All UHP products
are 100% helium leak tested to 1 x 10-9 scc/sec in an ISO
class 6 cleanroom or better.

Ensuring continued SEMI conforming quality of UHP
products and manufacturing processes, WIKA assigns
periodic analytical assessments carried out by RJ Lee
Group, Inc. using analytical methods corresponding to SEMI
F72 and SEMATECH 91060573B (AES), SEMATECH
90120403B (XPS) and SEMATECH 90120401B and SEMI
F73 (SEM).

6

CERTIFICATES AND APPROVALS

Given the increasing requirements in terms of quality and product safety,
WIKA offers a wide range of approvals and certificates to best meet customer
expectations and regulatory compliances. For hazardous applications, WIKA offersa host of international approvals for key locations in Asia, US and the EU.

7Ultra High Puritypressure transducers
Compact

WUC-10, WUC-15,
WUC-16The most compact design of the WUC series transducer meets the smallest product footprint requirements. The space-saving design and extensive configurability
makes it the perfect fit for new, as well as retrofit projects.
■ Accuracy class:≤ 0.5 % FS per IEC 61298-2 (≤ 0.2 % RSS)

■ Special features:

4 ... 20 mA, DC 0 ... 5 V, DC 0 ... 10 V,
IP67 (NEMA 4),
Manual zero point setting■ Measuring range:■ Data sheet:

True vacuum reference

WU-20, WU-25,
WU-26■ Accuracy class:≤ 0.3 % FS per IEC 61298-2 (≤ 0.15 % RSS)

■ Special features:

4 ... 20 mA, DC 0 ... 5 V, DC 0 ... 10 V,
Vacuum reference,
IP67 (NEMA 4),
Manual zero point setting■ Data sheet:

iWU-2x

30 ... 5,000 psi / 2 ... 360 bar(further pressure units available),
Compound, absolute, gauge

PE 87.07

With its Ex ia zone 0 approval the iWU-2x series transducer can be used in almost
all hazardous semiconductor applications. That, coupled with its excellent performance, makes it the perfect choice for demanding applications.
■ Accuracy class:≤ 0.3 % FS per IEC 61298-2 (≤ 0.15 % RSS)

■ Special features:

Zone 0 Ex ia,
Vacuum reference
IP67
Manual zero point setting■ Measuring range:■ Data sheet:8

PE 87.06

The WU-2 series transducer combines state-of-the-art digital transducer concepts
with analogue-like output signals to provide the safest and most accurate pressure
measurements necessary for today’s demanding market requirements.

■ Measuring range:

Intrinsically safe

30 ... 5,000 psi / 2 ... 360 bar(further pressure units available),
Compound, absolute, gauge

30 ... 5,000 psi / 2 … 360 bar(further pressure units available),
Compound, absolute, gauge

PE 87.09

Integrated display, EtherCAT

WUD-2x-E

The WUD-2x-E brings EtherCAT® down to the transducer level, enabling customers to gather more data, reduce cabling cost and increase tool reliability byleveraging the built-in cable redundancy.
■ Accuracy class:≤ 0.3% FS per IEC 62828-2■ Special features:

EtherCAT,
Cable redundancy,
Vacuum reference
Manual or electronic zero point setting■ Measuring range:■ Data sheet:

30 ... 5,000 psi / 2 … 360 bar(further pressure units available),
Compound, absolute, gauge

PE 87.12

Cable redundancy
Due to the designated “IN” and “OUT” ports of the WUD-2x-E
it can be connected to the main device in a ring topology.
This, together with the full duplex capability of the network,
allows for a cable redundant setup. In the event of a failure,
all remaining devices can be addressed both in receiving
and transmitting direction. Therefore every device up until thefailed device can be addressed.

Integrated display & switch

WUD-20, WUD-25,
WUD-26

The WUD-2x incorporates a local, rotatable, and programmable display with thestate-of-the-art electronics of the WU-2x. The WUD-2x transducer with integrated
display provides a local reading of the process pressure measurement as well as
the associated analogue output signal (current or voltage) from the transducer.
■ Accuracy class:≤ 0.3 % FS per IEC 61298-2 (≤ 0.15 % RSS)

■ Special features:

4 ... 20 mA, DC 0 ... 5 V, DC 0 ... 10 V,
Vacuum reference,
IP67
Manual zero point setting,
Optional 2 switching outputs (NPN)■ Measuring range:

Optional alarm contacts are available forprogramming two user-defined switch points■ Data sheet:

30 ... 5,000 psi / 2 ... 360 bar(further pressure units available),
Compound, absolute, gauge

PE 87.08

EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.

9

Pressure gauges and switches
Ultra High Purity Bourdon
tube pressure gauge

230.15, 230.25

The 230.15 is the right choice for specialty gas, Ultra High Purity, PV and SEMI
applications in gas distribution systems using face seal fittings. The 230.25 is best
suited for applications that require VIM/VAR wetted parts and face seal fittings.
Both product variants have electropolished media-wetted stainless steel surfaces,
as well as electropolished stainless steel cases.

■ Nominal size:2" (53 mm), 1½" (40 mm)■ Accuracy class:2": Grade A per ASME B40.1,
1½": Grade B per ASME B40.1■ Scale range:■ Data sheet:

UHP Bourdon tube pressuregauge with switch contact

230.15, 230.25
with 851.3

Vacuum / compound and positive pressure ranges

PM 02.20

The 230.15 and 230.25 series are complemented by a reed switch option allowing
for monitoring pressure levels by electrical alert output. The WIKA switch option
offers normally open (NO) and normally closed (NC) functionality in one single
instrument.
■ Nominal size:2" (53 mm), 1½" (40 mm)■ Scale range:

Vacuum / compound and positive pressure ranges■ Data sheet:

PV 22.05■ Accuracy class:2": Grade A per ASME B40.1,
1½": Grade B per ASME B40.1(other accuracy classes upon request)

Functional diagram

Contact blade

Reed contact SPDT
(change-over) not
actuated
C = common
NC = normally closed
NO = normally open

High Purity Bourdon
tube pressure gauge

130.15

Inert gasC

Connection leadNC
NO

The 130.15 series is designed for specialty gas installations where High Purity gas
distribution systems are assembled using NPT connections.
■ Nominal size:2" (53 mm), 1½" (40 mm)■ Accuracy class:2": Grade A per ASME B40.1,
1½": Grade B per ASME B40.1■ Scale range:■ Data sheet:

10

Glass envelope

Vacuum / compound and positive pressure ranges

PM 02.19

Diaphragm pressure gauges
Diaphragm gauges are the perfect mechanical pressure gauge for low-pressure, point-of-use applications. The gauge’s design
allows for use in potentially corossive gases in etch applications, reduces particle generation and decreases dry-down times.
UHP Flow-Through-Gauge

432.25

Sensitive installations, such as hook-up in chip fabs, require a specific focus onparticle prevention. Using a flow-through gauge in a GDS eliminates any deadspace and shortens purge cycles after installation or maintenance.

■ Nominal size:2" (53 mm), 1½" (40 mm), 11/8" (28 mm)■ Accuracy class:

Grade B per ASME B40.1,(other accuracy classes upon request)■ Scale range:■ Data sheet:

UHP mini diaphragm pressure gauge

432.15 1.3"

PM 04.12

Gas distribution systems on chip production tools combine the need for an excellent Ultra High Purity class with the need for a minimal footprint. These applications
are addressed by the mini diaphragm pressure gauges (MDG).
■ Nominal size:

1.3" (33 mm)■ Accuracy class:

Grade B per ASME B40.1,■ Scale range:

432.10 1"-1 … 4 bar / -30 inHg ... 60 psi,
-1 … 9 bar / -30 inHg ... 130 psi■ Data sheet:■ Nominal size:-1 … 4 bar / -30 inHg ... 60 psi,
-1 … 9 bar / -30 inHg ... 130 psi,
-30 inHg ... 160 psi,
0 ... 160 psi
PM 04.18

1" (25.4 mm)

11

Displays and scales
Remote digital display

DI30■ Input:

Standard signals■ Special features:

TARE Function■ Alarm output:■ Power supply:■ Data sheet:

Gas cylinder scale
Specialty gas filling level control

GCS-1

AC 230 V or AC 115 V
AC 80.05

Gas cylinder scales are engineered and designed for liquid delivery sources usedin both indoor and outdoor hazardous and non-hazardous applications.

■ Nominal size:≤ 0.1 % FS

■ Output signal:

4 ... 20 mA, DC 0 ... 5 V, DC 0 ... 10 V,■ Measuring range:■ Ingress protection:■ Data sheet:12

2 relays

0 … 60 lbs (0 … 27.22 kg),
0 … 100 lbs (0 … 45.36 kg),
0 … 300 lbs (0 … 136.08 kg)
IP65

PE 87.19

Installation and testing
UHP high-accuracy test gauge

332.54-UHP

The 332.54-UHP is a high-accuracy “Inspector’s Test Gauge” used to qualify equipment installations serving UHP upstream source and point-of-use applications
within semiconductor fabrication facilities.
■ Nominal size:4" (100 mm)■ Accuracy class:-30 inHg ... 600 psi: ±0.25 % of span (ASME B40.1 Grade 3A),
600 ... 2,000 psi: ±0.5 % of span (ASME B40.1 Grade 2A),
2,000 ... 5,000 psi: ±0.25 % of span (ASME B40.1 Grade 3A)■ Scale range:■ Data sheet:-1 … 1 bar / -30 inHg ... 15 psi,
-1 … 360 bar / -30 inHg ... 5,000 psi

332.54-UHP

Pneumatic hand pump

CPP7-H■ Pressure range:■ Medium:■ Special features:■ Data sheet:-0,8 ... +7 bar-11.6 ... 101.5 psi
Ambient air

Pressure and vacuum generation switchable,
Low weight,
Compact dimensions
CT 91.02

13

Exhaust andabatement monitoring
Clean room monitoring

A2G-10■ Measuring range:■ Accuracy class:■ Ingress protection:■ Data sheet:

0 ... 6.000 Pa≥ 250 Pa = 3,0
101 ... 249 Pa = 5.0≤ 100 Pa = 10.0
IP65

PM 07.40

Differential pressure sensor

A2G-50■ Output signal:■ Measuring range:■ Accuracy class:■ Ingress protection:■ Data sheet:0 … 10 V (3-wire),4 … 20 mA (3-wire)
100 ... 2.500 Pa±1.5 % +1 Pa of reading
IP54

PE 88.02

Pressure sensors for generalindustrial applications
Standard version

Superior version

A-10■ Non-linearity(± % of span):■ Measuring range:■ Special features:■ Data sheet:

14

S-20

≤ 0.25 or 0.5 BFSL
0 … 0.05 to
0 … 1.000 bar

Compact design,Free test certificate
PE 81.60■ Non-linearity(± % of span):■ Measuring range:■ Special features:■ Data sheet:≤ 0.25 BFSL
(optional ≤ 0.125 or 0.5 BFSL)
0 … 0.4 to 0 … 1.600 bar

Extreme operating conditions,Customer-specific variants,
Free test certificate
PE 81.61

CDA, pneumatics andgeneral purity gas sticks
Welding gauge

Pressure gauge, stainless steel

Utility gauge, lower mountand centre back mount■ Data sheet: PM 01.03■ Data sheet: PM 01.05■ Data sheet: PM 01.01

111.11131.11111.10, 111.12

Process cooling water
Bimetal thermomanometer

100.02.063■ Data sheet: PM 01.23

Bourdon tube pressure gauge,
stainless steel with VCR®compatible process connections

Process cooling water gauge

232.35232.53■ Data sheet: PM 02.11■ Data sheet: 23X.53

15

WIKA worldwide
EuropeAustria
WIKA Messgerätevertrieb
Ursula Wiegand GmbH & Co. KG
Tel. +43 1 8691631
info@wika.at / www.wika.at
Benelux
WIKA Benelux
Tel. +31 475 535500
info@wika.nl / www.wika.nl
Bulgaria
WIKA Bulgaria EOOD
Tel. +359 2 82138-10
info@wika.bg / www.wika.bg
Croatia
WIKA Croatia d.o.o.
Tel. +385 1 6531-034
info@wika.hr / www.wika.hr
Denmark
WIKA Danmark A/S
Tel. +45 4581 9600
info@wika.as / www.wika.as
Finland
WIKA Finland Oy
Tel. +358 9 682492-0
info@wika.fi / www.wika.fi
France
WIKA Instruments s.a.r.l.
Tel. +33 1 71 68 10 00
info@wika.fr / www.wika.fr

Poland
WIKA Polska spółka z ogranizoną
odpowiedzialnością sp. k.
Tel. +48 54 230110-0
info@wikapolska.pl
www.wikapolska.pl
Romania
WIKA Instruments Romania S.R.L.
Tel. +40 21 4048327
info@wika.ro / www.wika.ro
RussiaAO “WIKA MERA”
Tel. +7 495-648018-0
info@wika.ru / www.wika.ru
Serbia
WIKA Merna Tehnika d.o.o.
Tel. +381 11 2763722
info@wika.rs / www.wika.rs
Spain
Instrumentos WIKA S.A.U.
Tel. +34 933 9386-30
info@wika.es / www.wika.es
Switzerland
WIKA Schweiz AG
Tel. +41 41 91972-72
info@wika.ch / www.wika.ch

Türkiye
WIKA Instruments
Endüstriyel Ölçüm Cihazları Tic. Ltd. Şti.
Tel. +90 216 41590-66
Germany
info@wika.com.tr
WIKA Alexander Wiegand SE & Co. KG www.wika.com.tr
Tel. +49 9372 132-0
info@wika.de / www.wika.de
UkraineTOV WIKA Prylad
IrelandTel. +38 044 496 83 80
WIKA Instruments Ireland Limited
info@wika.ua / www.wika.ua
Tel. +35 386 1449 360
info@wika.ie / www.wika.ie
United Kingdom
WIKA Instruments Ltd
Italy
Tel. +44 1737 644-008
WIKA Italia S.r.l. & C. S.a.s.
info@wika.co.uk / www.wika.co.uk
Tel. +39 02 93861-1
info@wika.it / www.wika.it

North America

Asia

Canada
WIKA Instruments Ltd.
Tel. +1 780 4637035
info@wika.ca / www.wika.ca

China
Botswana
WIKA Instrumentation Suzhou Co., Ltd. WIKA Instruments Botswana (Pty.) Ltd.
Tel. +86 512 6878 8000
Tel. +267 3110013
info@wika.cn / www.wika.com.cn
info@wika.co.bw / wika.co.bw

USA
WIKA Instrument, LP
Tel. +1 770 5138200
info@wika.com / www.wika.us

India
WIKA Instruments India Pvt. Ltd.
Tel. +1800-123-101010
info@wika.co.in / www.wika.co.in

Egypt
WIKA Near East Ltd.
Tel. +20 2 240 13130
info@wika.com.eg / www.wika.com.eg

Gayesco-WIKA USA, LP
Tel. +1 713 4750022
info@wikahouston.com
www.wika.us

Japan
WIKA Japan K. K.
Tel. +81 3 5439-6673
info@wika.co.jp / www.wika.co.jp

Namibia
WIKA Instruments Namibia Pty Ltd.
Tel. +26 4 61238811
info@wika.com.na / www.wika.com.na

Mensor Corporation
Tel. +1 512 3964200
sales@mensor.com
www.mensor.com

Kazakhstan
TOO WIKA Kazakhstan
Tel. +7 727 220 80 08
info@wika.kz / www.wika.kz

Nigeria
WIKA WEST AFRICA LIMITED
Tel. +234 17130019
info@wika.com.ng / www.wika.ng

Latin America

Korea
WIKA Korea Ltd.
Tel. +82 2 869-0505
info@wika.co.kr / www.wika.co.kr

Saudi Arabia
WIKA Saudi Arabia Llc
Tel. +966 53 555 0874
info@wika.sa / www.wika.sa

Malaysia
WIKA Instrumentation (M) Sdn. Bhd.
Tel. +60 3 5590 6666
info@wika.my / www.wika.my

South Africa
WIKA Instruments Pty. Ltd.
Tel. +27 11 62100-00
sales@wika.co.za / www.wika.co.za

Philippines
WIKA Instruments Philippines Inc.
Tel. +63 2 234-1270
info@wika.ph / www.wika.ph

United Arab Emirates
WIKA Middle East FZE
Tel. +971 4 883-9090
info@wika.ae / www.wika.ae
Australia
Australia

Argentina
WIKA Argentina S.A.
Tel. +54 11 5442 0000
ventas@wika.com.ar
www.wika.com.ar
Brazil
WIKA do Brasil Ind. e Com. Ltda.
Tel. +55 15 3459-9700
vendas@wika.com.br
www.wika.com.br
Chile
WIKA Chile S.p.A.
Tel. +56 9 4279 0308
info@wika.cl / www.wika.cl
Colombia
Instrumentos WIKA Colombia S.A.S.
Tel. +57 601 7021347
info@wika.co / www.wika.co
MexicoInstrumentos WIKA Mexico S.A. de C.V.
Tel. +52 55 50205300
ventas@wika.com / www.wika.mx

Singapore
WIKA Instrumentation Pte. Ltd.
Tel. +65 6844 5506
info@wika.sg / www.wika.sg
Taiwan
WIKA Instrumentation Taiwan Ltd.
Tel. +886 3 420 6052
info@wika.tw / www.wika.tw
Thailand
WIKA Instrumentation Corporation(Thailand) Co., Ltd.
Tel. +66 2 326 6876
info@wika.co.th / www.wika.co.th

Africa/Middle East

Australia
WIKA Australia Pty. Ltd.
Tel. +61 2 88455222
sales@wika.com.au / www.wika.com.au
New Zealand
WIKA Instruments Limited
Tel. +64 9 8479020
info@wika.co.nz / www.wika.co.nz

Uzbekistan
WIKA Instrumentation FE LLC
Tel. +998 71 205 84 30
info@wika.uz / www.wika.uz

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WIKA Alexander Wiegand SE & Co. KG
Alexander-Wiegand-Straße 30 | 63911 Klingenberg | Germany
Tel. +49 9372 132-0 | info@wika.de | www.wika.de

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