Head Office(18510) 10-7, Jangjinam-gil, Dongtan-myeon,
Hwaseong-si, Gyeonggi-do, Korea
TEL. +82-31-379-5800 FAX. +82-31-379-5820
http://www.unisem.co.kr
USA Branch (at Austin)
Unisem America
TEL: +1-512-672-3438
E-mail : osk@unisem.co.kr

TAIWAN Branch (at Hsinchu)
Unisem Taiwan (Parrion Technology)
TEL: +886-3-539-8180
E-mail : jelee@unisem.co.kr

CHINA Branch (at Shanghai)
2018 ver.

Unisem China
TEL: +86-021-5422-0618
E-mail: parkil@unisem.co.kr

UNISEM IS PURSUING STATE-OF-THE-ART EQUIPMENTFOR SEMICONDUCTOR, LCD, LED, SOLAR CELL AND
FUTURE ENVIRONMENTUNISEM IS PERSISTENTLY AIMING AT THE TOP

About UNISEM Co., Ltd.

Founded in 1988, Unisem specialized in sophisticated semiconductor equipment, such as gas
scrubber and chiller unit, entered into the semiconductor industry.
As Unisem had continued its R&D to successfully come up with a gas scrubber since 1996,
Unisem developed Heat-wet scrubber which abates toxic gases for wafer fabrication process
first time in Korea. Then, Unisem have had biggest market share in local scrubber market andprogressively expand global market share. Recently, Unisem developed huge capacity Burn-Wet
scrubber and Catalyst scrubber for protecting environmental pollution.
With investing research and development continuously, Unisem develop a wide range of “Chiller
unit” for semiconductor field as well. Through sustained research and development efforts
coupled with technological progress, Unisem maintains ISO-9001 certification and certified
with SEMI-S2. Unisem prides itself on manufacturing semiconductor equipment with its own
technologies and can provide solutions to future environment.

Contents
HistoryGAS SCRUBBER Gas Abatement System
Triton Dual, IGNIS, ARENS
Burn wet type + Burn box typeHeat-wet type
Plasma type
CHILLER Temperature Control System
INTERGRATED type(R-CO1000, P-CO1000)
PROXIMITY type(CUBE, P-TOM)
Intergrated type
Proximity type
Mixing system(SECA) typeHeat Exchanger type
Low temp type, Display Type
Global Sales Networtk

History of UNISEM
Beginning

1988 ~ 1999

1988

Company establishment

1993

Launching Gas Scrubber business(Refines Environmental Pollutants)

1998

Launching Chiller business (Controls Proper Temperature)

1999

Enlisted on Korean stock market(KOSDAQ)

Growing

2000 ~ 2009

2000

Established UNISEM America (Austin)

2007

Certificated “ISO 27001” Information Protection System

2009

Established UNISEM Taiwan

2009

Established UNISEM China

2009

Receive the presidential citation for industrial safety

Present

2010~Present

2013

Established Smart ID Korea

2014

Certificated ISO14001, OHSAS18001, KOSHA18001

2014

Award Gold Tower Order of Industrial Service Merit2015

The 52th Award “30 Million Export Prize” from Korean government

2016

Selected as one of the top best 100 employers
Established IOT Department

2017

Confirmed achieve uninjury record 19times

Overseas Sales Branch : U.S.A., Taiwan, China, Japan, Singapore/Malaysia

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GAS ABATEMENT SYSTEM

Burn Wet Type

Triton Dual

IGNIS

WET-BURN-WET

BURN-WET
Large capacity

Plasma Type

ATOM1000ECOBRID1000

Heat Wet Type

ATOM1000L

MAGMA1000

ECOBRID2000

UN2005A-PL

Burn Box Type

NECA4000

VULCAN1000

VULCAN2000

Heat Cooling TypeLEAD2000 (Dual)YBURN WET

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SYSTEM FEATURES
1. Type : Fuel (LNG, LPG, H2) Burn+Heat(Eco Friendly Concept)
2. Enhanced abatement ability for NOx, THC, bad smell, etc.(NOx Free)
3. Reduced energy consumption more 15% than Burn-Wet type scrubber
4. High abatement efficiency for PFC gases
5. Saving of LNG usage by applying thermal Heater
6. Applied dry system to minimize moisture vapor exhaust & enhanced find dust collection
7. Excellent safety Interlock system & explosion proof design
8. Relatively lower operation cost by applying energy saving system
9. Simple operation & easy maintenance
10. Effective corrosion resistance structure

TARGET ABATEMENT GAS
1. PFCs : NF3, C2F6, SF6, CF4, C3F8, etc
2. Flammable gases : SiH4, PH3, TEOS, H2, DCS, etc
3. Water soluble gases : Cl2, HCl, HF, NH3, etc

ECOBRID2000
ITEM
Class

GeneralUtilityECOBRID1000

SPECIFICATION

Details

ECOBRID1000(SINGLE)ECOBRID2000(DUAL)

Dimension (mm)750x850x1850(WxDxH)

1200x1000x1850(W×D×H)

Flame Temperature (℃)

1200-1500℃

1200-1500 ℃

Capacity

300LPM

600LPM

Electric Power

208V, 20A, 3P

208V,30A, 3P

REMARKS

Except Scrubber Utility

Weight

600Kg

850 Kg

Inlet Port

NW40 x 4port(Standard)

NW40 x 4port(Standard)

User Option

Air

200~250LPM

360 ~ 400LPM

1/2" 1Port, 4~6Kg/㎠

N2

15~25LPM

20 ~ 30LPM

1/2" 1Port, 4~6Kg/㎠

O2

10~20LPM

20 ~ 30LPM

1/2" 1Port, 4~6Kg/㎠

LNG

8~14LPM16 ~ 24LPM

1/2" 1Port, 5psi

PCW

Supply & Return

Supply & Return

1/2" 2Port, 2~4Kg/㎠

CW

3 ~ 5LPM

3 ~ 5 LPM

1/2" 1Port, 2~4Kg/㎠

NaOH-10 mmH2O

0.32 Liter/Hr

1/2", 1Port(User Option)

Cabinet Exhaust-50 mmH2O-10 mmH2O

SUS304, NW100(90A) 1Port

Acid Exhaust

Pump drain-50 mmH2O

SUS304, NW100(100A) 1Port

Drain

Pump drain

Pump drain

PVC, 3/4"1Port

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SYSTEM FEATURES
1. Type : Fuel (LNG, LPG, H2) Wet-Burn-Wet
2. Pre-Wet System : PM cycle extension by 1st water treatment
3. Flame Mode By Process Step : Energy Saving
4. Scraper System : Anti Powder stuck
5. Build an excellent interlock system
6. Easy operation and maintenance (Easy PM, Cylinder structure)
7. Corrosion resistance by internal Teflon coating
8. Extension Metal & DIFF 'process PM cycle extension
9. S-Mark Certification

TARGET ABATEMENT GAS
1. Flammable gases : SiH4, PH3, TEOS, H2, DCS, etc.
2. Water soluble gases : WF6, Cl2, HCl, HF, NH3, etc.
3. PFCs : NF3 etc.

TRITON DUAL
ITEM
Class

GeneralUtility

TRITON

SPECIFICATION

Details

TRITONTRITON(D)REMARKS

Dimension (mm)900 x 1050 x 1850(WxDxH)

1800 x 1200 x 1888(WxDxH)

Flame Temperature (℃)

1200 ~ 1600 ℃

1200 ~ 1600 ℃

Max. Capacity

300LPM

500LPM

Inlet Port

NW40 x 4Port

NW40 x 4Port

Electric Power3P, 208V AC

3P, 208V AC

LNG

6~10 LPM

12~20 LPM

1/2", VCR, 1Port, 5psi

O2

5~15 LPM

10~30 LPM

1/2", SWG, 1Port, 4~6 kg·f/㎠

Air

160~180 LPM

320~440 LPM

1/2", SWG, 1Port, 4~6 kg·f/㎠

30~40 LPM

40~80 LPM

60~100 LPM (HOT N2)

120~200 LPM (HOT N2)

N2

User Option

1/2", SWG, 1Port, 4~6 kg·f/㎠

CW

3~4 LPM

6~8 LPM1/2", SWG, 1Port, 2~4 kg·f/㎠

PCW

Supply & Return

Supply & Return

3/4", SWG, 2Port, 2~4 kg·f/㎠

Cabinet Exhaust＜ -10 mmH2O＜ -10 mmH2O

NW100(Φ101.6), 1Port

Acid Exhaust＜ -50 mmH2O＜ -50 mmH2O

NW100(Φ114.3), 2Port

Drain

Pump Drain / Gravity Drain

Pump Drain / Gravity Drain

User Option

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SYSTEM FEATURES
1. Type : Fuel (LNG, LPG, H2) Burn –Wet
2. High abatement efficiency for PFC
3. Excellent safety Interlock system & adopted explosion
proof design
4. Relatively lower operation cost by applying energy saving
system
5. Simple operation & easy maintenance
6. Effective corrosion resistance structure
7. CE & SEMI-S2 certified

TARGET ABATEMENT GAS
1. PFCs : NF3, C2F6, SF6, CF4, C3F8, etc.
2. Flammable gases : SiH4, PH3, TEOS, H2, DCS, etc.
3. Water soluble gases : Cl2, HCl, HF, NH3, etc.
VULCAN1000

VULCAN2000

UN2005A-PL

ITEM
Class

GeneralUtility

IGNIS

SPECIFICATION

Details

IGNIS(D)

VULCAN1000 (SINGLE)

VULCAN2000 (DUAL)

UN2005A-PL

Max. Capacity

3000 LPM

600LPM

Flame Temp.(℃)

1200~1600 ℃

1200~1600℃

1200LPM
1200~1600℃

1500LPM
Max. 1200℃
NW50 x 2port

REMARKS

Main Inlet

NW40 x 2Port, NW50 x 2Port

NW40 x 4port

NW40 x 4port

By-pass Inlet

NW40 x 2Port, NW50 x 2Port

NW40 x 4port

NW40 x 4port

NW50 x 2port

Dimension(mm)1900x1300x1918(WxDxH)

900 x 800 x 1800(WxDxH)

1400 x 1000 x 1800(WxDxH)

1200 x 1100 x 1700(WxDxH)

Electric Power3P, 208V AC, 30A

1P, 208V AC, 30A

1P, 208V AC, 30A

1P, 208V AC, 30A

Fuel (LNG)

20~40 LPM

10~14 LPM, ½” 1Port(VCR)

20~28 LPM , ½” 1Port(VCR)

30~35 LPM, ½”, VCR, 1Port, 5 psi

CDA

640~740 LPM,3/4",1Port (SWG)

160~180 LPM, ½” 1Port(SWG)

320~360 LPM , ½” 1Port(SWG)

330~370 LPM, 3/4", SWG, 1Port, 5~6 kgf/㎠

O2

30~50 LPM,1/2",1Port (SWG)

10~15 LPM, ½” 1Port(SWG)

20~30 LPM , ½” 1Port(SWG)

20~30 LPM, 1/2", SWG, 1Port, 5~6 kgf/㎠

N2

24~32 LPM,1/2",1Port (SWG)

30~40 LPM, ½” 1Port(SWG)

60~80 LPM , ½” 1Port(SWG)

40~50 LPM, 1/2", SWG, 1Port, 5~6 kgf/㎠

CW

8~10 LPM,1/2",1Port (SWG)

6~8 LPM, ½” 1Port(SWG)

12~16 LPM, ½” 1Port(SWG)

12~14 LPM, 1/2", SWG, 1Port, 2~4 kgf/㎠

PCW (Supply/Return)Supply & Return 3/4",2Port (SWG)

Supply, ½” 1Port(SWG)

Supply, ¾” SWG 1P

1/2", SWG, 2Port, 2~4 kgf/㎠

NaOH

-

Supply, ½” 1Port

Supply, ½” 1Port-

OptionCabinet Exhaust＜ -10 mmH2O< 759 torr, 3 ½” 1P< 759 torr, 3 ½” 1P< -10 mmH2O, NW100 x1Port, MF Flange

NW100(Φ101.6), 1Port

Acid Exhaust＜ -50 mmH2O< 757 torr, 4” 1P< 757 torr, 4” 2P< -50 mmH2O( 3㎤/m↑), NW100 x1Port, MF Flange

NW100(Φ114.3), 2Port

Drain

Pump Drain / Gravity Drain

Pump Drain, ½” PVC 1P

Pump Drain, 3/4" PVC X 1 Port

Gravity Drain, PVC 50A(2”) 1Port

User Option

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SYSTEM FEATURES
1. Type : Fuel(LNG,LPG,H2) Burn Box
2. High abatement efficiency for PFC, THC, NOx gases
3. Applied dry system to minimize moisture vapor exhaust
4. Excellent safety interlock system
5. Relatively lower operation cost by applying energy saving system &No water consumption
6. Simple operation & easy maintenance
7. High corrosion resistance structure
8. SEMI-S2 certified

TARGET ABATEMENT GAS
1. PFCs : NF3, C2F6, SF6, CF4, C3F8, etc.
2. Flammable gases : SiH4, PH3, TEOS, H2, DCS, etc.

ITEM
Class

GeneralSPECIFICATION

Details

NECA4000

Heater Temp. (℃)

1200~1600℃

Max. Capacity

2500LPM

Dimension (WxDxH)

1500mm x 1000mm x 1850mm

PCW

NECA4000

NF3 Abatement

In-Let Port

NW50 x 6 Port, KF FLANGE Type

OptionBy-Pass Port

NW50 x 6 Port, KF FLANGE Type

OptionElectric Power3P, 208V AC, 30A

LNG

25~40 LPM, ½”, VCR, 1Port, 1~2 kgf/㎠

CDA

120~140 LPM, ½”, SWG, 1Port, 4~6 kgf/㎠

N2

15~20 LPM, ½”, SWG, 1Port, 4~6 kgf/㎠

Emergency N2
Utility

REMARKS

SupplyReturn1200LPM ↑, ¾”, SWG, 1Port, 4~6 kgf/㎠½”, SWG, 1Port, 2~4 kgf/㎠½”, SWG, 1Port

Outer Air Inlet

60㎤/min↑, Φ 350 x 1port, Pipe Welding TypeSUS 304

Cabinet Exhaust< - 0.1 kPa, 3 1/2" (Φ101.6) x 1port, Pipe Welding TypeSUS 304

Toxic Exhaust>60㎤/min, < - 1.0 kPa, 10” (Φ267.4) x 1port,
JIS 5K Bolted"

SUS 304

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SYSTEM FEATURES
1. Type : Electric Heat-Wet
2. Perfect abatement efficiency for flammable & water soluble gases
3. Excellent safety interlock system
4. Relatively lower utility and operation cost
5. Simple operation & easy maintenance(Heater, Cylinder structure)
6. High corrosion resistance structure(Teflon Insert Lining)
7. SEMI-S2 certificated

TARGET ABATEMENT GAS
1. Flammable gases : SiH4, PH3, TEOS, H2, DCS, etc.
2. Water Soluble gases : Cl2, HCl, HF, NH3, etc.
3. PFCs : NF3

MAGMA3000
ITEM
Class

SPECIFICATION

Details

MAGMA1000

MAGMA3000

Heater Temp. (℃)

800℃ ~ 900℃

800℃ ~ 900℃

Max. Capacity

500 LPM

1500LPM

Scrubber In-let

NW50 x 2port

NW80 x 1port

Dimension(mm)800 x 1150 x 1600(WxDxH)

1200 x 1300 x 1850(WxDxH)

Electric Power3P, 208V AC, 100A

3P, 208V AC, 100A

CDA

100~120 LPM, 3/8” 1Port, 4~5kgf/㎠

300LPM, 1/2" 1port

REMARKS

GeneralUtility

MAGMA1000

N2

1~2 LPM, 1/4” 1Port, 4~5kgf/㎠2 LPM, 3/8” 1port

CW

10~12 LPM, 1/2" 1Port, 2~3kgf/㎠

20~30 LPM, 3/4" 1port

PCW(Supply/Return)

5LPM, 3/8” 1port, 2~3kgf/㎠

5LPM, 3/8” 1port, 2~3kgf/㎠

Cabinet Exhaust< -15 mmH2O, NW100 x1port< -15mmH2O, NW160 x1Port

Toxic Exhaust< -50 mmH2O, NW100 x1port< -50mmH2O, NW160 x1Port

Drain

Gravity(PVC 50A) /Pump Drain(PVC 3/4")

Gravity(PVC 50A) /Pump Drain(PVC 3/4")

OptionOption10

PLASMA

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SYSTEM FEATURES
1. Type : Plasma-Wet
2. Thermal or Equilibrium Plasma
3. High abatement efficiency for PFC gases(99%)
4. Excellent safety interlock system
5. Low utility consumption(water, power)
6. High corrosion resistance structure
7. Relatively lower utility & operation cost (Applied low power torch)
8. Simple operation and easy maintenance
9. Third party certified.

TARGET ABATEMENT GAS
1. PFC gases : NF3, SF6, CF4, C2F6, C3F8, etc.
2. Flammable gases : SiH4, DCS, TEOS, H2, PH3, etc.
3. Water Soluble gases : BCl3, Cl2, HF, HCl, NH3, etc.
ATOM1000L
ITEM
Class

Details

GeneralUtility

ATOM1000

REMARKSATOM1000L

Max. Capacity

400LPM

1500 LPM

Dimension(mm)850 x 1052 x 1752(WxDxH)

1300 x 1000 x 1800

In-Let Port

NW40 x 4port

NW50 *2P

By-Pass Port

NW40 x 4port

NW50 1P, KF FLANGE TypeElectric Power3P, 208V AC, 100A

3P, 208V AC, 100A, 50Hz

CDA

30~50LPM, 3/8” 1Port, 4~5kgf/㎠

60~80 LPM

N2

50~60LPM, 3/8” 1Port, 4~5kgf/㎠

60~80 LPM

CW

10~12 LPM, 1/2" 1Port, 2~4kgf/㎠

12~14 LPM

Supply, 3/8” 2Port, 2~4 kgf/㎠

Supply / Return

SupplyPCWReturn 3/8” 2Port(10~12 LPM)

Cabinet Exhaust

Return< -10 mmH2O, NW100(Φ101.6) x 1Port< -10 mmH2O ( ＞8 ㎥ / min )Acid Exhaust
Drain

ATOM1000

SPECIFICATION< -50 mmH2O, NW100(Φ114.3) x 1Port< -50 mmH2O ( ＞3 ㎥ / min )Pump Drain

PVC 3/4"(20A) Welding TypePVC 3/4"(20A) Welding TypeOver Flow

PVC 1 ½”(40A) Welding TypePVC 1 ½”(40A) Welding Type

Option

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CHILLERTEMPERATURE CONTROL SYSTEM

Intergrated TypeLow Temp Type

Proximity Type

ChillerHeat exchanger

ChillerHeat Exchanger

R-CO1000

P-CO1000

CUBE2500

P-TOM

Combination Type

Refrigerant TypeRCS2500A

RCD2050A RCS6000A

RCS2500S

RPM7500A

LOW TEMP CHILLER

Refrigerant + Heat Exchanger

RPD13000A

RPT13000A

Heat Exchanger TypePCS8000A PCS12000AA PCD12000A

Thermoelement Type

ECS8000A

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INTEGRATED

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R-CO1000COMPRESSOR CHILLER

ENERGY SAVING Electric Power consumption : Max. 78% Reduction
Inverter compressor & pump
application

INVERTER COMP.

2.2 kWhNORMAL PUMP TYPE

4.5 kWhNORMAL COMPRESSOR TYPE

INVERTER PUMP.

1.0kWh

0.6kWhHIGH PERFORMANCE Wide Temp. Range : △T 110℃

 Temperature stability : Max. 30% Improve

Expanding temperature range
by hybrid type application

500ms

NORMAL TYPE

25ms

R-CO1000

Heat-Exchanger△T 70℃
Refrigerant Chiller△T 70℃HYBRID CHILLER△T 110℃

 Optimized dimension for fab.

 Increase Cooling Capacity :Max.11kW (at 20℃)
High performance of compressor

Item

Channel 1

1

Temperature Range-20℃ ~ +80℃

2

Temperature Stability±0.1℃ (at. Idle Process)3

Cooling Capacity

4,000W (at +20℃)

4Temperature Control Mode

Supply / Return5

Temperature Control & Display

PID Control & Touch Screen

6

Remote Interface

RS485, RS422, RS232C, Analog, D/Net (User Option)

7

Electric Power3Φ, AC200/208V, 50/60Hz (Breaker 30A)

8

Reservoir Volume20.0 ℓ25% 

9Compressor

1.2 ~ 4.5 kW (Inverter Control)

10

Circulation Pump

0.75 ~ 2.2 kW (Inverter Control)

11

Coolant

FC-3283

12

Coolant Flow Rate

20LPM (at 0.5 Mpa)

PCW Flow Rate

20±2℃, 10LPM, 3kg/㎠

920mm

0.4㎡

No

▶
NORMALCHILLER

440mm

R-CO1000NORMAL TYPECOMPACT DESIGN

380mm

800mm

13
14

0.3㎡

15
16

Connection Size

Coolant

3/4˝

PCW

1/2˝

Dimension

380W x 800D x 1,400H (mm)13

INTEGRATED

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P-CO1000
HEAT-EXCHANGERENERGY SAVING Reduce brine vaporization :Max. 90%
Seperated Tank concept for
Heating zone and Reservior
3.0cc / 1day

NORMAL TYPE

P-CO1000

0.3cc / 1day Lower Electric consumption :Max. 37% Reduction
Inverter control application
3.2kW

NORMAL TYPE

2.2kW

P-CO1000

 Lower operation cost :Max. 30% Reduced
Minimize brine usage.
100%

NORMAL TYPE

70%

P-CO1000

HIGH PERFORMANCE Response time : Max. 55% Reduction Temperature rise time :Max. 24% Reduction

Seperated tank System can precise temperature control.

Relative small amount fluid can
reduce temperature rising time.
360secNORMAL TYPE

276secP-CO1000COMPACT DESIGN Optimized dimension for fab.

 Cooling Capacity :Max. 9.5kW
Improve Control cycle & precisionby high Performance Controller.

▶
26% 
800mm
400mm

0.3㎡

340mm

700mm

0.24㎡

No

Item

Channel 1

1

Temperature Range+25℃ ~ +90℃

2

Temperature Stability±0.1℃ (at. Idle Condition)

3

Cooling Capacity

12,000W (at +50℃, Supply Control)4Temperature Control Mode

Supply / Return5

Temperature Control & Display

PID Control & Touch Screen

6

Remote Interface

User Option (Interface Module)

7

Electric Power3Φ, AC208V, 50/60Hz (Breaker 30A)

8

Reservoir Volume20.0 Liters

9Compressor

-

10

Pump

0.75 ~ 2.2 kW (Inverter Control)

11

Heater

5.0 kW

12

Coolant

Galden, Fluorinert, EG/DI, DI Water

13

PCW Flow Rate

14
15
16
17
18

Flow Rate
Connection Size

20±2℃, 10LPM, 3kg/㎠

Coolant

30 LPM (at 0.5 Mpa)

PCW

20±2℃, 10LPM, 3kg/㎠

Coolant

3/4 ˝

PCW

Dimension, Weight

1/2 ˝
340W x 700D x 1,450H, 120 kg

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SYSTEM FEATURES
1. Application process : CVD
2. Maintaining stable temperature by PID control ofheater & PCW Valve
3. Easy operation by touch screen
4. High reliable & durable by professional experience
5. Multiple application to communication protocol
through interface board
6. Applied with various safety interlock system(Temperature, Pressure, etc)
7. Highly optimized design for coolant circulation system

PCS12000AA

PCS300KA

PCD4000A

Type

Temp. Range

PCS12000AA

Single Channel+40℃ ~ +140℃

12.0KW (+50℃)

380 X 840 X 1250

PCS300KA

Single Channel+20℃ ~ +30℃

300.0KW (+25℃)

600 X 1200 X 1800

PCD4000A

Dual Channel+30℃ ~ +90℃

4.0KW (+50℃)

440 X 800 X 1200

PCS8000A

Single Channel+30℃ ~ +90℃

8.0KW (+50℃)

400 X 680 X 1060

PCD40000A

Dual Channel+30℃ ~ +90℃

40.0KW (+50℃)

580 X 1100 X 1450

PCD12000A

Dual Channel+30℃ ~ +90℃

12.0KW (+50℃)

440 X 840 X 1250

PCS8000A

PCD40000A

Cooling CAPA.

Dimension(mm)(W X D X H)

Model

PCD12000A

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P-TOM

CUBE

HEAT EXCHANGERCHILLERENERGY SAVING

ENERGY SAVING Electric Power consumption :Max. 80% ReductionE lectric Power consumption :Max. 45% Reduction

 PCW : Max. 80% Reduction Operation Cost :Max. 80% Reduction

HIGH PERFORMANCEHIGH PERFORMANCE Temperature stability :Max. 75% Improve Response time : Max. 45% Reduction

High performance controller andvalve applicable Optimized dimension
for fab.

COMPACT DESIGN± 0.05 ℃

P-TOM
+1℃

± 0.05 ℃

Temp

Temp

-1℃

-1℃

50% 
Foot print :240mm x 425mm

0.1㎡

6min.56sec.

sec.

+1℃

+1℃

± 0.1 ℃

± 0.05 ℃

-1℃

20% 

sec.

Foot print :500mm x 500mm

P-TOM

Temp

0.3㎡

Foot print :380mm x 800mm

1min.16sec.

Normal Heat-Exchanger

1min. 15sec.

Temp

0.2㎡

Foot print :340mm x 700mm

CUBE

 Optimized dimension
for fab.

+1℃± 0.2 ℃

2min. 17sec.

NORMAL CHILLER± 0.2 ℃NORMAL HEAT-EXCHANGERCOMPACT DESIGNHigh performance controller
applicable.

0.25㎡

-1℃

2min.17sec.

sec.

1min.15sec.

sec.

CUBE(Direct)

NORMAL CHILLER

No

Item

Channel 1

No

Item

Channel 1

1

Temperature Range+30℃ ~ +90℃

1

Temperature Range-20℃ ~ +80℃

2

Temperature Stability±0.1℃ (at. Idle Condition)2

Temperature Stability±0.1℃ (at. Idle Condition)

3

Cooling Capacity

8,000W (at +50℃, Supply Control)

3

Cooling Capacity (RF Power)

8,000W (at +20℃, Supply Control)4Temperature Control Mode

Supply / Return4

Temperature Control Mode

Coolant Supply / Return5

Temperature Control & Display

PID Control & Touch Screen

5

Temperature Control & Display

PID Control & Touch Screen

6

Remote Interface

User Option

6

Remote Interface

RS485, RS422, RS232C, Analog, D/Net (User Option)

7

Electric Power3Φ, AC208V, 50/60Hz (Breaker 15A)

7

Electric Power3Φ, AC208V, 50/60Hz (Breaker 30A)

8

Reservoir Volume

6.0 Liters

8

Reservoir Volume

6.5 Liters

9Compressor-

9Compressor

0.75 ~ 1.5 kW (Inverter Control)

10

Pump

0.2 ~ 1.1 kW (Inverter Control)

10

Circulation Pump

0.75 ~ 2.2 kW (Inverter Control)

11

Heater

2.4 kW

11

Coolant

FC-3283

12

Coolant

Galden, Fluorinert

12

Coolant Flow Rate

20LPM (at 0.5 Mpa)

13

PCW Flow Rate

PCW Flow Rate

20±2℃, 10LPM, 3kg/㎠

14
15
16
17
18

Flow Rate
Connection Size

20±2℃, 10LPM, 3kg/㎠

13

Coolant

20 LPM (at 0.5 Mpa)

14

PCW

20±2℃, 10LPM, 3kg/㎠

15

Coolant

1/2 ˝

16

1/2 ˝

17

PCW

Dimension, Weight

240W x 425D x 530H, 50 kg

Connection Size
Dimension

Coolant

1/2˝

PCW

1/2˝

Chiller

500W x 500D x 450H

Eletric Cabinet

400W x 560D x 685H

16

MIXING SYSTEM

C

H

I

L

L

E

R

TYPE

SECA
MIXING SYSTEM CHILLER

ENERGY SAVING Electric Power consumption : Max 45% Reduction
Reduce 45% of electric power consumption by inverter
compressor

HIGH PERFORMANCESYSTEM VIEW
 System Diagram

Minimize Heating & Cooling time by mixing unit controller Cooling Time :Max 77% Reduction Heating Time :Max 85% Reduction
0℃

~

80℃

80℃

Reduce PCW and heating rateby heat recovery system.

~

0℃

SECA
NORMAL TYPENORMAL TYPE

SECA
17min. 30sec.

2min. 30sec.

2min

9min.

No

ITEM

Channel 1(BTM)

Channel 2 (TOP)Mixing Unit

1

Temperature Range-20℃ ~ +60℃

+30℃ ~ +40℃

+0℃ ~ +80℃

2

Temperature Stability

±0.2℃

±0.2℃

±0.2℃

3

Cooling Capacity

6,200W (at -10℃)

4,500W (at +35℃)

8,000W (at +20℃)

SupplySupply-4Temperature Control Mode

Supply5Temperature Control & Display

PID Control & Touch Screen

6

Remote Interface

RS422 / DIO

7

Electric Power3Φ, AC208V, 50/60Hz (Breaker 125A)

8

Reservoir Volume24.0 ℓ24.0 ℓ9Compressor

10.0 kW (Inverter)

-

-

10

Pump

2.2 kW (Inverter)

1.5 kW (Inverter)

1.1 kW (Inverter)

11

Heater

-3.0 kW

20.0 kW

12

Coolant

FC-3283

HT-200FC-328313

PCW Flow Rate

25 LPM (at 0.5 Mpa)

25 LPM (at 0.5 Mpa)

3/4 ˝

3/4 ˝

14
15
16
17
18

Flow rate
Connection Size

20±2℃, 10LPM, 3kg/㎠

Coolant

25 LPM (at 0.7 Mpa)

PCW

20±2℃, 50LPM, 4kg/㎠

Coolant

1/2 ˝

PCW

Dimension, Weight

-

3/4 ˝

-

500W x 1,200D x 1,700H (mm), 300kg

250 x 600 x 280 (mm), 50kg

17

LOW TEMP CHILLER

C

H

I

L

L

E

R

TYPE

18

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