SEMI F47
Voltage Sag Immunity Test Report
forPower Supply FPS300.241-002-101

Other devices covered by this report:
FPS300.aab-ccc-ddd One-phase input, 300W output
aa: blankb: 1Standard version, adjustable output voltage
2Standard version, output voltage not adjustable
5
Version with multiple outputs individually current limited
6
Version with multiple NEC CLASS 2 limited power source outputs
7
Version with regular and NEC CLASS 2 limited power source outputs
ccc: 001-999
Defines the connection terminal module
ddd: 001-999
Defines product variant (consecutive number)

Date: reportGenDate

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SEMI F47 Test Report
Document Number

FPS300.24b Semi F47 Rev1 DB1Approval Order Number

AN447 internal projectStandards

SEMI F47-0706 (July 2006)
SPECIFICATION FOR SEMICONDUCTOR PROCESSING EQUIPMENT - Voltage
Sag Immunity Compliance Tests
IEC 61000-4-11 2004 +A1:2017
Electromagnetic compatibility (EMC) - Part 4-11: Testing and measurement
techniques - Voltage dips, short interruptions and voltage variations
immunity tests for equipment with input current up to 16 A per phase

Applicant

PULS GmbH
Elektrastraße 681925 Munich, Germany

Test Laboratory

PULS Vario GmbH
Kranichberggasse 61120 Vienna, Austria

Test Engineer

David Baumhackl

Test Date

21.09.2020

Description of Test Device

Built-in power supplies for DIN-Rail mounting

Devices under Evaluation

FPS300.241-002-101
Input: AC 100-240V, Output: DC 24-28V, 300W

S/N of Devices

FPS300.241-002-101: S/N: 20828210

Application Details

Input voltage:
Input frequency:
Output load:Date: reportGenDate

1-Phase AC 100V - 240V
50 or 60Hz
300W

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PASS/FAIL Criterions:

In accordance with paragraph 7.8.2 a) of SEMI F47-0706
The output voltage is not allowed to deviated more than 5% of the initialvalue
DC OK contact is not allowed to trigger during and after the test

Test Result:

PASS
The test device passed all essential SEMI F47-0706 tests according to thedefined application details without any limitations and is qualified to bear thefollowing approval mark:Since DC power supplies, as covered in this test report, are only components
of a semiconductor processing equipment, the tests of the SEMI F47 standard
were conducted with selected rated characteristics of the DC power supply.

The system integrator of the final semiconductor processing equipment
needs to judge if the results of this test report are compatible with the SEMI
F47 requirements of his system or if test data under other operating
conditions are additionally required.
The system integrator also needs to judge if the results of the inrush current
peaks are compatible with the selected external fuses for input protection.
The system integrator also needs to be aware about aging effects. It is
expected that the ride through time can be reduced by 15% at end of thespecified lifetime expectancy.
A SEMI F47 certificate is not intended for this type of component, however
the product fulfils the general requirements and can be marked with thefollowing symbol.
Approved

Harald Etlinger
Sr. Qualification Eng.
PULS Vario GmbH, Vienna

Date of Approval

24.09.2020

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Copy of marking plate:

Copy of marking plate

List of Test Equipment
TypeAC Source
Scope
Scope
Current Probe
Differential Probeel. LoadModelKikusui PCR3000WE2LeCroy WS454
LeCroy WS424
LeCroy CP150LeCroy AP031
Chroma 63201 - 2.6kW

Inventory number10372
10130
10179
1026610262
10053

The test equipment complies with the requirements of IEC 61000-4-11.
The peak current capability of the test generator was evaluated according Annex A of IEC 61000-4-11 and is able todeliver minimum 32.7A.
Test Specification for SEMI F47 compliance
Voltage Sag Immunity according to the following table:
Sag depth#1
50%
70%
80%

Duration
200ms
500ms
1000msDuration at 50 Hz
10 cycles
25 cycles
50 cycles

Duration at 60 Hz
12 cycles
30 cycles
60 cycles#1 Sag depth is expressed in percent of remaining nominal voltage. For example, during a 70% voltage sag on a 200
volt nominal system, the voltage is reduced during the sag to 140 volts and not 60 volts.

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Test Setup
The unit under test in normal operating condition mounted in climate chamber.
The input is connected to an AC Source. The input voltage is measured with a 100:1 differential probe and the input
current is measured with current probes. These probes are connected to oscilloscopes.
The output is connected to an active load. The output voltage is connected directly to the oscilloscope.
“DC-OK” signal is also measured with an oscilloscope.
Input and output voltages are measured with oscilloscope #1 and input currents with oscilloscope #2.

DUT in chamber

Setup PictureDate: reportGenDate

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Voltage Sag Results
90
Ridethroughchart
80
70
60
50
4030
20
1000,010

0,100
Limit

1,000
208V/50Hz - L1-N

10,000208V/60Hz - L1-N

Worst Case pictures of Norm Conditions
50Hz

Worst Case pictures of Norm Conditions
60Hz

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Conducted Tests at 208V 50Hz
Input Voltage
Input Frequency
Output Voltage
Output Current
Ambient Temperature
Sag duration [s]0,020
0,2000,500
110208Vac50Hz
24V
12.5A
25°C
Voltage remaining [%]050
7080
80Pos. peak current [A]
4,4
3,8
1,9
1,61,6Neg. peak current [A]-1,7-2,5-1,9-1,7-1,6Informational measurements
Sag duration [s]Voltage remaining [%]0,020
00,03500,055150,075
190,085230,10527Sag duration [s]0,1750,2000,2550,500
110Voltage remaining [%]272727272737Neg. peak current [A]050708080Pos. peak current [A]4,44,1
1,71,4
1,6Informational measurements
Sag duration [s]Voltage remaining [%]0,016
00,03500,055140,075
190,085
220,105
27Sag duration [s]0,1750,2000,255
0,500
110Voltage remaining [%]272727272737

Conducted Tests at 208V 60Hz
Input Voltage
Input Frequency
Output Voltage
Output Current
Ambient TemperatureSag duration [s]0,0160,2000,500
110Date: reportGenDate

208Vac60Hz
24V
12.5A
25°C
Voltage remaining [%]Document revision: 1-2-2,3-1,7-1,7-1,7

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Inrush current measurements according 61000-4-11 at 208V 50Hz
Input Voltage
Input Frequency
Output Voltage
Output Current
Ambient Temperature

208Vac50Hz
24V
12.5A
25°C

Peak input current measurements on unit under test:
First two measurements turn off input power for EUT for 5 minutes and thenMeasure peak input current when AC turned on at 90°:
4.2A
Measure peak input current when AC turned on at 270°:
1.4A
Next two measurements turn on the input power for EUT for at least 1 minute then turn off input power for 5s andon again.
Measure peak input current when AC turned on at 90°:
3.9A
Measure peak input current when AC turned on at 270°:
4.1A

Inrush current measurements according 61000-4-11 at 208V 60Hz
Input Voltage
Input Frequency
Output Voltage
Output Current
Ambient Temperature

208Vac60Hz
24V
12.5A
25°C

Peak input current measurements on unit under test:
First two measurements turn off input power for EUT for 5 minutes and thenMeasure peak input current when AC turned on at 90°:
3.4A
Measurepeakinput
current
whenACturnedonat270°:
3.9A1 minute then turn off input power for 5s andNext two measurements turn on the input power for EUT for at leaston again.
Measure peak input current when AC turned on at 90°:
4.4A
Measure peak input current when AC turned on at 270°:
4.1A

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Operating conditions and their influence in test results:a) Ambient temperature:
Control measurements show that the ambient temperature has only a minor influence in the ride-through time testresults.
Depending on the used topology to reduce the input inrush current, the ambient temperature can have a major
influence in the arising peak current after the sag test. Therefore, tests were performed at ambient temperatures of25°C and +60°C.
It is assumed that semiconductor processing equipment is never used at lower temperatures than +25°C. Although
the power supply itself is specified down to -25°C, a test at such low temperatures is not performed.
b) Mains frequency 50Hz vs. 60Hz:
Control measurements show that 50Hz testing is more critical than 60Hz testing.
Therefore, unless otherwise noted, all tests were performed with a mains frequency of 50Hz.
c) Output voltage 24V vs. 28V:
The ride-through time depend on the stored energy in the input capacitors and the amount of output power. The
output voltage is not essential as long as the output power is constant.
The adjusted output voltage has no influence in input currents peaks after input voltage sags.
Therefore, unless otherwise noted, all tests were performed with an output voltage of 24Vdc.

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APPENDIX
Informational measurements at 200V
Input Voltage
Input Frequency
Output Voltage
Output Current
Ambient Temperature

200Vac50Hz
24V
12.5A
25°C

Informational measurements
Sag duration
Voltage remaining[s][%]
0,020
00,03500,055150,075
200,085
250,105
280,17528
0,200
280,255
280,500
28
128
1038

Positive peak current[A]
4,54,4
4,24,7
9,28,64,24,5
3,94,44,24,1

Negative peak current[A]-1,7-11,3-20-18,9-3,9-3,9-8-3,6-8-3,8-3,6-2,5

Picture with highest Current

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Informational measurements at 230V
Input Voltage
Input Frequency
Output Voltage
Output Current
Ambient Temperature

230Vac
50Hz
24V
12.5A
25°C

Informational measurements
Sag duration
Voltage remaining
[s]
[%]
0,020
0,035
0,055
0,075
0,0850,1050,1750,200
0,255
0,500
110

Positive peak current
[A]
00
14
171825
25
25
25
25
25
33

0,9
3
4,24,219,89,16,14,25,6
4,14,23,6

Negative peak current[A]-0,9-20-20-20-4,2-4,1-9,4-4,1-9,1-4,1-3,8-3

Picture with highest Current

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