DATASHEET D-6340-AND-D-6440
MASS-STREAM D-6340 &D-6440 MFM
ガス用直接サーマルマスフローメータ、保護等級IP65

Compact IP65 Mass Flow Meters for low/medium ow rates of gasesBronkhorst® models D-6340 and D-6440 Mass Flow Meters (MFMs) are suited for precise measurement of ow ranges between 0,14…7 ln/min and
0,5…50 ln/min at operating pressures between vacuum and 10 bar (Aluminium) or 20 bar (Stainless Steel). The MFM consists of a proven inline thermal(CTA) mass ow sensor and a microprocessor based pc-board with signal and eldbus conversion and a PID controller for optional mass ow control bymeans of a separately mounted control valve. The instument is IP65 complient and can optionally be equipped with a modern, multi-functional andmulti-colour display, with operator buttons on the instrument.
The digital MASS-STREAM™ series is characterized by a high degree of signal integrity and, as an option, up to 8 calibration curves of diﬀerent gases
and process conditions can be memorized in the instrument. In addition to the standard RS232 output the instruments also oﬀer analog I/O. As anoption, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP,EtherNet/IP, POWERLINK or FLOW-BUS protocols.

Technical speci cations
Measurement / control system
Flow range (intermediate ranges
available)

min. 0,14…7 ln/min
max. 0,5…50 ln/min(based on N2)

Accuracy (incl. linearity) (based on
actual calibration)± 1,0 % RD plus ± 0.5% FS (at calibration conditions)

Repeatability< 0,2 % FS

Turndown ratioup to 1:100

Type of gases

almost all gases, compatible with chosen materials

Response time (sensor)

approx. 0,9 sec.

Operating temperature

0 … 50 °C

Storage / Transport conditions

with display : 0 … 50 °C, max. 95% RH (non-condensing);
without display : -20 … +80 °C, max. 95% RH (non-condensing)

Temperature sensitivity

D-63xx : ±0,2% Rd/°C (Air)
D-64xx : ±0,1% Rd/°C (Air)

Pressure sensitivity± 0,3% Rd/bar typical (Air)

Leak integrity, outboard

tested < 2 x 10-8 mbar l/s He

Attitude sensitivity

at 90° deviation from horizontal max. error 0,2 % at 1 bar typical N2

Warm-up time

30 min. for optimum accuracy,
within 30 seconds for accuracy ±4% FSMechanical parts
Sensor

Stainless steel SS 316 (AISI 316L)

Instrument body

D-63xx : Aluminium AL 50ST/51ST (anodised) or stainless steel SS 316 /D-64xx : Aluminium EN AW-6082-T6 (non-anodised) or stainless steel SS 316

Sieves and rings

Stainless steel SS 316

Pressure rating (PN)

10 bar g for instrument body in aluminium,
20 bar g for instrument body in stainless steel SS 316

Process connectionsG1/4" (D-63xx : RP-type cavity / D-64xx : ISO1179-1 cavity) /compression type or face seal (VCR/VCO) couplings

Seals

standard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds

WeightAluminium: 1,0 kg
Stainless steel: 1,5 kg

Ingress protection

IP65

Electrical properties
Power supply+15 … 24 Vdc ±10%Max. power consumption

Supply15 V
24 V

Analog output

0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP,EtherNet/IP, POWERLINK or FLOW-BUS

Basic model
115 mA
85 mA

Electrical connection
Analog/RS232

8 DIN (male);

PROFIBUS DP

bus: 5-pin M12 (female);power: 8 DIN (male)

CANopen® / DeviceNet™

5-pin M12 (male)

Modbus RTU / FLOW-BUS

5-pin M12 (male)

Modbus TCP / EtherNet/IP /POWERLINK

bus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male);

EtherCAT®/ PROFINET

bus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male)Control valve options

External actuator options to be connected to the controller

Ex-proof speci cations

Approvals / certi cates

Add. for eldbus
80 mA
50 mA

Add. for display
30 mA
20 mA

Technical speci cations subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Recommended accessories

PIPS SERIES
プラグイン電源 PiPS
ラボ用および一般工業用
交換可能な主電源用プラ
グ (欧州、英国、米国(日本向け)、豪州、IEC)

Related products
MASS-STREAM D-6320 &D-6420 MFM
流量レンジ最小 0.05…1ln/min
最大 0.35…7 ln/min
定格圧力 2 MPaまで
堅牢なセンサとハウジング（IP65）
オプションの内蔵型TFTディスプレイ

MASS-STREAM D-6360 &D-6460 MFM
流量レンジ最小 0.4…20ln/min
最大 2…200 ln/min
定格圧力 2 MPaまで
堅牢なセンサとハウジング（IP65）
オプションの内蔵型TFTディスプレイ

MASS-STREAM D-6341 &D-6441 MFC
流量レンジ最小 0.14…7ln/min
最大 0.1…50 ln/min
定格圧力 2.0 MPaまで
堅牢なセンサとハウジング（IP65）
オプションの内蔵型TFTディスプレイ

Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low- ow measurement and control foruse in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we oﬀer an
extensive range of (mass) ow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuringwww.bronkhorst.com

principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®!