ELECTRON GUN / POWER SUPPLYELECTRON GUNS

EGL-2022 / EGPS-2022

50 eV to 5 keVEnergy Sweeping: Constant Beam Current and Approximately Constant SpotFOR USE IN:

The Kimball Physics EGL-2022 Electron Gun, with its matching
EGPS-2022 Power Supply , has applications in a variety of surface
physics, ionization, charge neutralization, and other vacuum physics
studies. It is a complete subsystem ready to attach and turn on.

new, and used firing units may be returned to the factory for rebuild.
Alternatively, the entire electron gun can be sent back to the factory forcomplete cleaning, rebuild, cathode replacement, and optional
in-vacuum testing.

Beam energy, beam current, and spot size are independently
adjustable over wide ranges. The energy is variable from 50 eV to
5 keV, and the beam current from 1 nA to 100 μA. By use ofmultistaging and a computer-designed electron zoom lens, a constantbeam current is maintained over a two-order-of-magnitude change inenergy, with a spot size also roughly constant. The electron gun uses
a unipotential cathode to generate a beam of low energy spread.

The extraction grid allows pulsing options: either fast capacitive beam
pulsing or dual grid pulsing. Capacitive beam pulsing, using a Pulse
Junction Box, permits fast beam pulsing down to 20 ns with 20%
maximum duty cycle. Capacitive pulsing requires an external, variablevoltage pulse generator (not included). Pulsing of the electron beam
can also be accomplished with dual grid supplies (positive andnegative), requiring only a TTL pulse input.

The gun design includes a positively biased acceleration grid toenhance emission and collimate the beam. A negative potential can beapplied to this grid element to suppress emission and cut off the beam.

A rastering option can be provided by an additional separate power
supply unit, the Raster Generator Deflection Unit.

UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr up to 10-5 torr for the standard Ta disc cathode. The
electron gun is bakable to 350°C with cables removed.
Optional cathodes include: barium oxide discs (BaO, low light, lowenergy spread, min. vacuum 1x10-7 torr), single-crystal lanthanum
hexaboride (LaB6, small spot, high brightness, min. vacuum
1x10-7 torr) and yttria-coated iridium discs (Y2O3 - Ir, rugged, vacuum
up to 10-4 torr, may survive brief loss of vacuum). With the exceptionof BaO, the cathodes are not damaged by repeated exposure toatmospheric gases or water vapor when cold. Cathode lifetime is afunction of vacuum conditions and beam current as related to cathodetemperature. Cathode lifetime at low currents in good vacuum may bein the many hundreds of hours, or even over a thousand hours.
Firing units are user-replaceable; spare firing units can be purchased

The EGPS-2022 Power Supply features a modular design withminiaturized power supply clusters, optically isolated signals, and thenew FlexPanel digital interface controller. The included power supplies
are Beam Energy and X,Y Deflection, as well as floating Source/ECC,Grid, First Anode and Focus supplies.
The new FlexPanel provides a digital display screen and a keypad forprogramming control on the front panel. Rear panel connectors allow
remote /computer control and metering of all gun power supplies. An
RS-232 serial port and an analog input/output connector are included
on standard power supply units. All common computer interface bustypes can be accommodated, by use of appropriate digital to analog
converters. RS-422/485 conversion is possible.
An optional LabVIEWTM computer program designed for theEGL-2022 is available for remote computer control and metering using
National Instrument DAQ boards and SCSI connectors on theEGPS-2022. The program provides a virtual panel of controls andmeters on the user’s computer screen.

EGPS-2022 Electron Gun Power Supply with FlexPanel controller
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

18DETECTORS

EGL-2022 Electron Gun Mounted on 2¾CF Flange Multiplexer

COMPONENTS

WIDE ENERGY RANGECONSTANT BEAM CURRENTCONSTANT SPOT SIZEZOOM LENS FOCUSINGHIGH SPEED PULSING
DEFLECTION, RASTERINGCOMPUTER / REMOTE CONTROLINDEX / INFORMATIONFEATURES / OPTIONS:EMITTERS

ION GUNSSURFACE PHYSICS STUDIESIONIZATION EXPERIMENTS
CHARGE NEUTRALIZATIONEGL-2022 ELECTRON GUN SPECIFICATIONS

EGPS-2022 ELECTRON GUN POWER SUPPLY SPECIFICATIONSBEAM ENERGYBEAM CURRENTENERGY SPREAD
SPOT SIZE
WORKING DISTANCE
BEAM DEFLECTIONOUTPUTSPULSE CAPABILITY(using appropriatepulse generator,not included)
BEAM UNIFORMITYFIRING UNITCATHODE TYPES

MOUNTING
BEAM ALIGNMENTINSERTION LENGTHGUN DIAMETER
FEEDTHROUGHSCABLES /CONNECTORSMAXIMUM BAKEOUT

50 eV to 5 keV (Independently adjustable)
Standard: 1 nA to 100 μA (Independently adjustable)
Approx. 0.4 eV cathode thermal spread, calculated
1 mm to 10 mm (Independently adjustable)Variable: 20 mm to 100 mm
4 pole electrostatic: ± 3.5° at 5 keV; scales larger atlower energies
Capacitive Pulse Junction Box: pulse width 20 ns to100 μs , rise/ fall 10 ns, 50 Ω impedance, 1 W standard(higher power available)
Optional Dual Grid Power Supply: pulse width 2 μs to
DC, rise/ fall 500 ns, rep rates to 5kHz (TTL required)
Gaussian
Customer-replaceable Firing Unit includes
precision-aligned cathode and Wehnelt (G-1) assembly,
with insulators and connectors
Standard: Tantalum disc
Optional: Lanthanum hexaboride (LaB6),
Barium oxide (BaO), or Yttrium oxide (Y2O3) Cathodes
not harmed by repeated exposure to atmospheric gases
while cold
Flange Multiplexer with a 2¾ inch rotatable CF,including both tapped and clear mounting holes
Optional: Mechanical alignment with ± 2° Port Aligner
Standard: 200 mm, Range: 200 mm to 300 mm.
Custom lengths available. Gun manufactured at standard
length unless otherwise specified at time of order.
34 mm, gun tube in vacuum
Multipin brazed ceramic, threaded stainless steel shell
Multiconductor high voltage fully ground-shielded cable,
coaxial grid cable, low voltage deflection cable, withmating aluminum shell connectors, to connect gun andpower supply. Standard lengths: 3 m Optional: 5 m
350°C with cables removed

All necessary voltages to drive the EGL-2022 Electron
Gun
ENERGY STABILITY±0.01% per hour; ±0.02% per 8 hours at full output
BEAM STABILITY±0.1% per hour with Emission Current Control or±10% per hour after warm up without ECC
FlexPanel controls: Energy, Source, Grid, First Anode,CONTROLS
Focus, X and Y Deflection, Emission Current Control
Beam On/Off
FlexPanel digital meters: Energy, Source Voltage,Source Current, Emission Current, Grid,METERINGFirst Anode Voltage, First Anode Current, Focus,
X and Y Deflection
Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
COMPUTER/REMOTE Metering: 0 to +2 V ( -2 V to +2 V, deflection)
CONTROL & METER On/off switches: 0 or +5 V
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-422 or RS-485 available, if
specified at time of order)
Optional: SCSI metering and programming connectors
Optional: National Instruments LabVIEWTM file,SOFTWARE
designed to run with computer DAQ boards NI 6034E
and NI 6703
INPUT
115 VAC switchable to 230 VAC, 50 to 60 Hz single
phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing,Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
DIMENSIONS
17 in. x 3.5 in. x 22 in. excluding handles(width x height x depth) (425 mm x 90 mm x 560 mm); 19 in. rack mountable

OPTIONAL RGDU-4A RASTER GENERATOR SPECIFICATIONS
10 separate frequency selections for both X and Y
RASTER GENERATOR (X up to 1000 Hz, Y up to 50 Hz) Variable position
offset (centering). Variable window size. All controllable
remotely via RS-232, RS-422, RS-485, or analog input.
DIMENSIONS
17 in. x 3.5 in. x 22 in.excluding handles(width x height x depth) (425 mm x 90 mm x 560 mm); 19 in. rack mountable

EGL-2022 ELECTRON GUNSpecify insertion length: 200 mm to 300 mm(Dimensions in mm)

Typical performance;data for guidance only.

Copyright © 2005 by Kimball Physics, Inc. 11/25/05 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.