Operating Manual
Incl. EU Declaration of Conformity

DeviceNet™
for Penning Gauges

PEG100-D

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This document is a supplement to the Operating Manual of the PEG100. It
should be used together with it.

Product Identification

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space providedbelow.

ValidityThis document applies to products with part numbers(PEG100-D,
DN 25 ISO-KF)
351-003351-004(PEG100-D,
DN 40 CF-F)
The part number (No:) can be taken from the product nameplate.

DeviceNet Interface

The PEG100-D is equipped with a fieldbus interface DeviceNet. Thus, process
automatization devices can easily be interconnected.
The fieldbus-system DeviceNet is described in the DeviceNet specification of theOpen DeviceNet Vendor Association (ODVA). The technical and functionalfeatures of the DeviceNet Standards are specified herein.
The PEG100-D has the functionality of DeviceNet Group 2 Only Slaves.

Scope of Delivery

2•

Penning Gauge PEG100-D•

Replacement cathode plate of titanium•

Replacement ceramics disc•

Operating Manual PEG100 (German)•

Operating Manual PEG100 (English)•Operating Manual PEG100-D (English)

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Contents
Product Identification
DeviceNet Interface
Scope of Delivery

2221 Technical Data

42 Starting-up of the PEG100-D
2.1 Baud rate and Address
2.2 MNS - LED556

3 Object Structure
3.1 Identity Object (Class Code 01hex)
3.2 Device Manager(DM) Object (Class Code 64hex)
3.3 Assembly Objects (Class Code 04hex)
3.4 Sensor Pressure Object (Class Code 67hex)
3.5 Transform Pressure Object (Class Code 68hex)
3.6 Analog Output Point Object (Class Code 6Ahex)

777899104 Supported Modes
4.1 Pit Strobe
4.2 Change of State

1111115 Format of Real Values

11

6 Returning the Product13

7 Disposal

13

EU Declaration of Conformity

14

For cross-references within this document, the symbol (→  XY) is used.

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3

1 Technical Data
Device type
Baud rates
I/O-slave messaging

generic
125 k, 250 k, 500 k Baudbit strobe, polling, change of state,
cyclic11 … 25 V

Input voltage range for DeviceNet option
Voltage levels CAN Lines
Transmitter requirements
Differential output level (nominal)
Differential output level (minimum)
connector, 50 Ohms load
Minimum recessive bus voltage
CAN H and CAN L
Maximum recessive bus voltage
CAN H and CAN L
Output short circuit protection
Receiver requirements
Differential input voltage dominantDifferential input voltage recessive
Hysteresis
1)

Status signals
Operating ambient temperature
Storage temperature4

2.0 V1)

3.0 V 1)internally limited
0.95 V min.
0.45 V max.
150 mV typ.

Voltages at CAN H and CAN L are referenced to the transceiver IC ground pin. Thisvoltage (IC ground pin) is app. 0.6 Volt higher than the V-terminal.

Address adjustment
Baud rate selection

Pin Description of DeviceNet
Plug2.0 V p-p
1.5 V p-p

Pin Numberabc

Function
Ground supply
CAN –Shield

selectable via address switches
3 fixed baud rates and auto-baudrate detection selectable via theaddress switches
1 bicolor combined Module / Network
Status LED (MNS)
0 … 50 °C–20 °C … +80 °C

Pin NumberdeFunction
CAN ++24 V supply

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2 Starting-up of the PEG100-D
For starting-up the fieldbus•

the whole system has to be installed electronically•the master has to be configurated•

the address of the slaves has to be set.

2.1 Baud Rate and Address
Baud rate

Alternatively you can choose between two kinds of baud rate installations:•Auto - Baud - Rate - Detection
If the unit is switched on during data transfer on the net work (minimum:
2 nodes installed with data traffic between these nodes) the unit detects automatically the installed baud rate on the bus.

•Pre-installed baud rate
You can install three baud rates (125 kBaud, 250 kBaud and 500 kBaud) byusing the address switches (see figure  4).

The function of the address switches (see figure  4) is as follows:

How to install a fixed baudrateAddress

Function0 - 649091
92
99

MAC ID (address selection by address switches
Baud rate 125 kBaud
Baud rate 250 kBaud
Baud rate 500 kBaud
Initialization with default values and auto baudrate detection•Switch off the power of the DeviceNet option.

•Set the address switches to the address 90, 91 or 92 (depending on the baudrate you want).

•

Switch on the power of the DeviceNet option. The MNS - LED will glow orange.

•Switch off the power of the DeviceNet option.

•Set the address switches to the MAC ID you want the device to work with.

•Switch on the power of the DeviceNet option. The MNS - LED will flash green ifa communication between the PEG and an other device takes place.

After power ON the unit must find a device to communicate with (duplicate MAC ID
check) (for example a master or a monitor) otherwise the MNS - LED will not flashgreen and it will be impossible to allocate the PEG. The installed baud rate issaved in EEPROM. After power ON/OFF the unit works with this installed baudrate.

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5How to install the auto baudrate detection

If a fixed baud rate is installed and you want to change this fixed baud rate to auto
baud rate detection, you have to proceed as follows:•Switch off the power of the DeviceNet option.

•Set the address switches to the address 99 (initialization of all values withdefault values).

•Switch on the power of the DeviceNet option. The MNS - LED will glow orange.

•Switch off the power of the DeviceNet option.

•Set the address switches to the MAC ID you want the device to work with.

•Switch on the power of the DeviceNet option. The MNS - LED will flash green ifa communication bet- ween the PEG and an other device takes place.

The installed auto baud rate detection is saved in EEPROM. After power ON/OFF
the unit works with this installed auto baud rate detection.
After power ON the unit must find a device to communicate with (duplicate MAC IDcheck) (for example a master or a monitor) otherwise the MNS - LED will not flash
green and it will be impossible to allocate the PEG.

Address setting

2.2 MNS - LED

It is necessary in a network to give each device a specific address. Therefore theaddress switches have to be set to the requested MAC ID (addresses between 0and 64 are possible).

The MNS - LED corresponds to the ODVA standard. The following additionalfeatures were integrated:
LED color

Function

ORANGE permanent

The address switches are set to one of the possible baudrate settings (90, 91, 92) or to "Initialization with default
values" (99).
Not allowed MAC ID

RED permanent

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3 Object Structure
3.1 Identity Object (ClassCode 01hex)
Instance attributes

Services

3.2 Device Manager(DM)Object (Class Code64hex)

Class Code:1 (01hex)
Class Attributes: None
Attribute ID

Access rule

Name

Description

1 (01hex)

get

INFICON

2 (02hex)
3 (03hex)
4 (04hex)

get
get
get

Generic device
Product code
Revision

5 (05hex)
6 (06hex)
7 (07hex)

get
get
getStatus
Serial number
Product name

Vendor identification
Vendor ID: 144 dez.
Device type
Vendor product code
DeviceNet software version
numberDevice status

Service codeName

5 (05hex)
14 (0Ehex)
15 (10hex)

Reset
Get attribute single
Set attribute single

PEG100-D

Class Code:100 (64hex)
Class Attributes: None

Instance attributes

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Attribute ID

Accessrule

Name

Data / type

Description

49 (31hex)

get

Device type

50 (32hex)

get

Device type SEMI "CIG" (Coldcathode ion gauge)"DRAFT"51 (33hex)

get

52 (34hex)

get

53 (35hex)

get

54 (36hex)

get

55 (37hex)
56 (38hex)
57 (38hex)

getgetgetStandard revisionlevel
Device manufacturer
identifier
Manufacturer modelnumber
Firmware revisionlevel
Hardware revisionlevel
Serial number
Device configuration
Device status

String [3]43 49 47
String [5]44 52 41 46 54
String [5]4c 45 59 42 4f 4c 44
String [5]

58 (3Ahex)

get / set

Reporting mode

BYTE

60 (3Chex)

get

Exception status

BYTE

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String [5]31 2e 30 30 30
String [5]30 2e 30 30 30
String [5]String [8]UNIT

Vendor identification"INFICON"
Part number
Software version
Hardware version

PEG100-DDevice status
1 = Initializing
2 = Idle (HV on)
4 = Executing (HV on)
Polling, bit strobe = 6
COS / Cyclic = 00hex = ok1hex = HV on, no plasma
2hex = HV off7

Services

3.3 Assembly Objects(Class Code 04hex)

Service codeName

14 (0Ehex)

Get attribute single

A collection of assembly objects allows the sending of attributes from different
application objects in one message (i.e.: Polling I/O).

Output Assemblies

Messages which a master sends to the PEG100-D.

Output Assembly 1

Input Assemblies

Byte

Bit 7Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 00res

res

res

res

res

res

HVON / OFF

HVON / OFF
Control

Messages which the PEG100-D sends to the master.

Input Assembly 2
Byte

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 00res

res

res

res

res

HVON / OFFSource

HV status

Sensorstatus12345

Exception Status
Pressure value (Low Byte)
Pressure value (Low Middle Byte)
Pressure value (High Middle Byte)
Pressure value (High Byte)

Input Assembly 3
Byte

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3Bit 2

Bit 1

Bit 00res

resresresres

HVON / OFFSource

HV status

Sensorstatus

18

Exception Status

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3.4 Sensor Pressure Object(Class Code 67hex)

The Sensor Pressure Object contains characteristics and behavior of the PEG.
This object is specified as a SAC-Object. All defined services for SAC-Objects arevalid.
Class Code:103 (67hex)
Class Attributes: None

Instance attributes
Attribute ID

Accessrule

Name

Data / type

Description

3 (03hex)

getSensor status

BOOL

100 (64hex)

get / set

HV ON / OFFBIT

101 (65hex)

get / set

BYTE

102 (66hex)

get / set

HV ON / OFFSource
HV status

Sensor status (gauge ON = 1 /gauge off
1 = HV ON
2 = HV OFF
0 = Control by analog input signal
1 = Control by DeviceNet
0 = OFF
1 = ON

Services

3.5 Transform Pressure
Object (Class Code68hex)

BYTE

Service codeName

14 (0Ehex)
16 (10hex)

Get attribute single
Set attribute single

Class Code:104 (68hex)
Class Attributes: None

Instance attributes
Attribute ID

Accessrule

Name

Data / type

Description

1 (01hex)
3 (03hex)

getget / set

Pressure value
Pressure units

REAL
BYTE

Pressure value
0 = mbar
1 = Torr
2 = Pascal

Services

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Service codeName

14 (0Ehex)
16 (10hex)

Get attribute single
Set attribute single

93.6 Analog Output Point
Object (Class Code6Ahex)

Class Code:106 (6Ahex)
Class Attributes: None

Instance attributes

Services

10Attribute ID

Accessrule

Name

Data / type

Description

101 (65hex)

getAnalog output mode

BYTE

0 = logService codeName

14 (0Ehex)
16 (10hex)

Get attribute single
Set attribute single

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4 Supported Modes
The PEG100-D acts as a "DeviceNet Group Two Only Slave". It supports themodes Polling, Bit-Strobe, Change of State/ Cyclic and explicit messages. Please
set the "Interscan Delay" of your master to app. 20 ms if your system is as fast thatis polls the PEG100-D at regular intervals shorter than 20 ms.

4.1 Pit Strobe

The HV may be switched on and off by the Bit-Strobe application.
Bit-Strobe Bit = 1 → HV on, and response with Input Assembly 1Bit-Strobe Bit = 0 → HV off

4.2 Change of State

Connection Object Instance Attribute(Class 5 / Instance 4/ Attribute 100)

Attribute ID

AccessruleName

Data / type

Description

100 (64hex)

get / set

Pressure change

BYTE

See below

Pressure change

The attribute describes the deviation in percent of the measurement value which
will result in a COS message on the bus.
Possible values for "Pressure Change": 1 … 100 %.

5 Format of Real Values
According to the IEEE-754 standard real values are stored in floating point format.
The floating point values are transmitted according to the following format:
Byte2345Content

SEEE EEEEEMMM MMMM

MMMM MMMM

MMMM MMMM"S" means:"E" means:"M" means:

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Sign Bit, which means 1 = negative, 0 = positiveTwo-complement exponents with offset 127
23 bit mantissa. The most significant bit is always 1 and is,therefore, not stored

11

Example

The value–12.5

Byte numberof the floating
point value

Byte 3:
C1 hex

Byte 2:48 hex

Byte 1:00 hex

Byte 0:00 hexContent

SEEE EEEEEMMM MMMM

MMMM MMMM

MMMM MMMM

Content in thisexample

1100 0001
binary0100 1000binary

0000 0000
binary0000 0000
binarySign bit

The bit S in this example is 1. That means the sign bit of the whole value (or of themantissa) is "minus".

Exponent

The EEEE EEEE have the value: 1000 0010 binary. This value converted indecimal it is: 130 decimal. This value has the offset 127. So the exponent is:
130 – 127 = 3

Mantissa

Because the mantissa is normalized the most significant bit has the value 1, thenext bit has the value 0.5, the next bit has the value 0.25.
Bit number

Value of the bit, if the bit is set to 1

Bit 24 (MSB)
Bit 23
Bit 22
Bit 21
Bit 20
Bit 19Bit 18Bit 17and so on

10.5
0.25
0.125
0.06250.031250.015625
0.0078125

The MMM MMMM MMMM MMMM MMMM MMMM (23 bit) have the value
100 1000 0000 0000 0000 0000. The most significant bit (MSB) is always 1 (andnot stored). You have to implement this most significant bit.
So the value of the mantissa is: 1100 1000 0000 0000 0000 0000 (binary).
Bit numberValue

Bit 24 is set to 1

1

Bit 23 is set to 1

+0.5

Bit 20 is set to 1

+0.0625

So the mantissa has the value 1.5625

Whole value

12The whole value is: –1.5625×23 = –12.5

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6 Returning the Product

WARNINGWARNING: forwarding contaminated products
Products returned to INFICON for service or repair should, if possible,
be free of harmful substances (e.g. radioactive, toxic, caustic or microbiological). Otherwise, the type of contamination must be declared.
Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a completed contamination declaration (Form under www.inficon.com).
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of contamination are
returned to the sender at his own expense.

7 Disposal

DANGERDANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

WARNINGWARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric components,operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the relevant localregulations.

Separating the components

tina12e1-aAfter disassembling the product, separate its components according to thefollowing criteria:

Contaminated components

Contaminated components (radioactive, toxic, caustic or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,separated according to their materials, and disposed of.

Other components

Such components must be separated according to their materials and recycled.

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EU Declaration of Conformity
We, INFICON, hereby declare, that the equipment mentioned below complies withthe following directives:••

Product

2014/30/EU, OJ L 96/79, 29.3.2014(EMC directive; Directive on electromagnetic compatibility)

2011/65/EU, OJ L 174/88, 1.7.2011(RoHS directive; Directive on the restriction of the use of certain hazardous substances in electricaland electronic equipment)

Penning Gauge
PEG100-D

Part numbers

351-003351-004

Standards

Harmonized and international / national standards and specifications:•

14(EMC: generic immunity standard)•EN 61000-6-3:2007 + A1:2011•

EN 61010-1:2010•Manufacturer / Signatures

EN 61000-6-2:2005(EMC: generic emission standard)(Safety requirements for electrical equipment for measurement, control andlaboratory use)

EN 61326: 2013; Group 1, Class B(EMC requirements for electrical equipment formeasurement, control and laboratory use)

INFICON AG, Alte Landstraße 6, LI-9496 Balzers
6 December 2017

6 December 2017

Dr. Bernhard Andreaus
Director Product Evolution

Markus Truniger
Product Managertina12e1-a(2017-12)

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Notestina12e1-a(2017-12)

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15

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com

Original: English

t i na12e1- a

www.inficon.com