Communication Protocol

EtherCAT®
for the Optical Plasma Gauges

Augent® OPG550

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1

Table of Contents

2

General Information
Intended Use
EtherCAT–Interface
Product Identification
Validity
Trademarks
Patents

4
4
4
4
5
5
5

1 Technical Data

6

2 Power Connection
2.1 D-sub, 9-pin Connector
2.2 RJ45, 8-pin Connector

77
8

3 Operation
3.1 Introduction
3.2 Front View
3.3 Indicators and Switches
3.3.1 <RUN> LED
3.3.2 <ERR> LED
3.3.3 <LA> LED (<IN> Port)
3.3.4 <LA> LED (<OUT> Port)
3.3.5 Device Address Switch
3.3.6 Life Information LED <LI>
3.3.7 Status LED <ST>
3.3.8 High Voltage LED <HV>
3.3.9 Augent Measurement LED <AM>
3.3.10 Firmware Update

9
9
9
10
10
10
10
10
11
11
12
12
12
12

4 Object Structure OPG550
4.1 Object Dictionary structure
4.2 Communication Profile Objects (0x1000…0x1FFF)
4.2.1 EtherCAT Properties
4.2.2 Process Data Mapping (PDO's)
4.2.3 Sync Manager
4.3 OPG550 Specific Input Area (0x2000…0x2FFF)
4.3.1 Common Sensor
4.3.2 SPEC4.3.3 ROR
4.3.4 RGD
4.4 OPG550 Specific Configuration Area (0x4000…0x4FFF)
4.4.1 SPEC4.4.2 ROR
4.4.3 RGD
4.4.4 Common Configuration
4.4.5 Operating mode
4.5 OPG550 Specific Information Area (0x5000…0x5FFF)
4.5.1 ROR
4.5.2 RGD
4.5.3 Common
4.6 ETG.5003 Input Area (0x6000…0x6FFF)
4.6.1 Pirani
4.6.2 Cold Cathode4.7 ETG.5003 Information Area (0x9000…0x9FFF)
4.7.1 SPEC4.7.2 ROR
4.7.3 RGD
4.7.4 Pirani
4.7.5 Cold Cathode4.8 ETG.5003 Device Area (0xF000...0xAFFF)
4.8.1 Semiconductor Device Profile
4.8.2 Module Profile List
4.9 ETG.5003 Exceptions
4.9.1 Active Exception Status
4.9.2 Active Module Device Exception Details
4.9.3 Active Global Device Exception Details
4.9.4 Latched Exception Status
4.9.5 Latched Module Device Exception Details
4.9.6 Latched Global Device Exception Details

13
13
15
15
16
18
18
18
19
20
21
23
23
24
26
28
29
30
30
31
32
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40
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OPG550 EtherCATcp

4.9.7 Device Exception Masks
4.10 ETG.5003 Device Specific Profile Objects
4.10.1 Vacuum Combination Gauge
4.10.2 Input Latch Local Timestamp
4.11 ETG.5003 Configure Device
4.11.1 Pressure Data Units
4.12 ETG.5003 Device Specific Information Data
4.12.1 SDP Information Device
4.12.2 CDP Information Device
4.13 OPG550 Specific Commands
4.13.1 HV On/Off Command
4.13.2 Algorithm On/Off
4.14 ETG.5003 Commands
4.14.1 Device Reset Command
4.14.2 Exception Reset Command
4.14.3 Store Parameters Command
4.14.4 Calculate Checksum Command
4.14.5 Load Parameters Command

42
42
42
43
43
43
44
44
44
45
45
45
46
46
47
48
49
50

Appendix
A: Literature
B: Certificate EtherCAT Conformance Test

51
51
52

For cross-references within this document, the symbol (→  XY) is used, for crossreferences to further documents, listed under literature, the symbol (→  [Z]).

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OPG550 EtherCATcp

3

General Information

Caution
Data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface or the diagnostic port may
result in incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and EtherCAT interface, or the diagnostic
port.

Intended Use

This Communication Protocol contains instructions for operating EtherCAT interfaces (slaves) together with a master.
For safety information, specifications and operation instructions of thevacuum gauges refer to Operating Manual tinb84d1 (German) or
tinb84e1 (English). Both can be downloaded from our website(www.inficon.com).

EtherCAT–Interface

The following description of the EtherCAT interface is compliant to the EtherCAT
specification of the EtherCAT Technology Group (ETG) and to the  "EtherCAT
Semiconductor Device Profile".
This manual describes the functionality of an EtherCAT slave and supports•

ETG.5003.1 S (R) V1.1.0: Common Device Profile (CDP) (→  [10]) and•ETG.5003.2080 S (R) V1.3.0: Semiconductor Device profile – Part 2080:
Specific Device Profile (SDP): Vacuum Pressure Gauge (→  [11]).

For operating the gauge via EtherCAT, prior installation of the device specific ESI
file is required on the bus master side. This file can be downloaded from our
website (www.inficon.com).

Product Identification

4

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space provided
below.

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OPG550 EtherCATcp

Validity

This document applies to products of the Augent® OPG550 series with EtherCAT
interface.
Part numbers of standard products are indicated below. OEM products have otherpart numbers and different parameter settings (e.g. factory setting of setpoint) as
defined in the corresponding ordering information.

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document correspond to OPG550 gauges with the DN 25 ISO-KF vacuum connection. They apply
to the other gauges by analogy.
We reserve the right to make technical changes without prior notice.

Trademarks

Patents

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OPG550 EtherCATcp

EtherCAT®

EtherCAT® is a registered trademark and patented technology,
licensed by Beckhoff Automation GmbH, Germany.

Augent®

INFICON Holding AG

EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085

5

1 Technical Data
Further technical data →  [1]Power supply

DANGER
The gauge may only be connected to power supplies, instruments, orcontrol devices that conform to the requirements of a grounded
protective extra-low voltage (PELV) and limited power source (LPS),Class 2. The connection to the gauge has to be fused.
Supply voltage at the gauge
RipplePower consumption
Fuse to be connected+14.5 … +30 V (dc)Class 2 / LPS≤1 Vpp≤5 W
1 AT

The minimum voltage of the power supply unit must be increased proportionally tothe length of the sensor cable.
Electrical connection
Sensor cable

EtherCAT interface

Communication protocol

EtherCAT

Communication standards
Data rate

ETG.5003.1 S (R) V1.1.0: Part 1
Common Device Profile (CDP)
100 Mbps

Node address

Explicit Device Identification

Physical layer

100BASE-Tx (IEEE 802.3)

EtherCAT connector

2 × RJ45, 8-pin (socket)<IN>: EtherCAT input<OUT>: EtherCAT output
shielded, special Ethernet Patch Cable(CAT5e quality or higher)≤100 mCable
Cable length
Process data
Mailbox (CoE)6

D-sub, 9-pin, male
7-pin, shielded

Fixed PDO mapping and configurable
PDO mapping
SDO requests, responses andinformation

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OPG550 EtherCATcp

2 Power Connection
Make sure the vacuum connection is properly made (→ Operating
Manual).

DANGER
The gauge may only be connected to power supplies, instruments, orcontrol devices that conform to the requirements of a grounded
protective extra-low voltage (PELV) and limited power source (LPS),Class 2. The connection to the gauge has to be fused.
Ground loops, differences of potential, or EMC problems may affect themeasurement signal. For optimum signal quality, please do observe thefollowing notes:

2.1 D-sub, 9-pin Connector(2024-06)

OPG550 EtherCATcp

Use an overall metal braided shielded cable. The connector musthave a metal case.

•Connect the supply common with protective ground directly at thepower.

•

Use differential measurement input (signal common and supply
common conducted separately).

•

Potential difference between supply common and housing ≤6 V
(overvoltage protection).

If no sensor cable is available, make one according to the following diagram.

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5
Pin 6
Pin 7
Pin 8
Pin 8

tirb84e1•

Signal output (measuring signal)
RS232, RxD
RS232, TxD
Supply (+14.5 … +30 V dc))
n.c.
n.c.
RS232, GND
Signal common
Supply common

D-sub, 9-pin
femalesoldering side7

2.2 RJ45, 8-pin Connector

For operating the OPG550 gauges via EtherCAT, at least one cable conforming to
the EtherCAT standard are required.
If no sensor cable is available, make one according to the following diagram.

Cable type

Ethernet Patch Cable Cable (CAT5e quality) with RJ45 connector.

Procedure1

Pin assignment:
Pin
1
2
3
4
5
6
7
8

2

8

SignalDescription

TD+
TDRD+
nu
nu
RDnu
nu

Transmission Data +Transmission Data Receive Data +not used
not used
Receive Data not used
not used

RJ45, 8-pin
malesoldering side

Plug the EtherCAT (and sensor) cables connector into the gauge: From theprevious device the cable connected to OUT port has to be connected to the
OPG550 <IN> port. And the cable from the OPG550 <OUT> port has to beconnected to the next device's <IN> port.

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OPG550 EtherCATcp

3 Operation

3.1 Introduction

Via the EtherCAT interface, the following and further data are exchanged in thestandardized EtherCAT protocol:•

SPEC, ROR or RGD values•

Pressure reading•

Pressure unit (Torr, mbar, Pa)•

Status and error messages•

Device control commands

Caution
Data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface or the diagnostic port may
result in incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and EtherCAT interface or the diagnostic
port.

3.2 Front View

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OPG550 EtherCATcp

9

3.3 Indicators and Switches
3.3.1 <RUN> LED

Displays the operating status.
Color

LED Stateoffblinking(200 ms on
200 ms off)green

single flash(200 ms on1000 ms off)on

3.3.2 <ERR> LED

LED State

red

SAFEOP (safe-operational status).
Communication of cyclic data transfer running. Input
values available, output values written to the device but
not updated on device output.
OP (operational status).

Description
No error or no power applied to device.

blinking

Error occurred (see error parameter).

single flash

Slave device application has changed the EtherCAT state
autonomously, due to local error (see error parameter).

double flash

An application watchdog timeout has occurred.
Sync Manager Watchdog timeout or communication
timeout occurred.

(200 ms on1000 ms off)
(200 ms on
200 ms off
200 ms on
1000 ms off)on

A critical communication or application controller error has
occurred. Application controller is not responding any
more (PDI Watchdog Timeout detected by ESC)

Displays the input status.
Color

LED State

green

blinking

off
on

Description
Port not connected or no power applied to device.
Port connected and communication active.
Port connected but no communication.

Displays the output status.
Color

LED State
off

green

blinkingon

10

PREOP (pre-operational status).

off(200 ms on
200 ms off)

3.3.4 <LA> LED (<OUT> Port)

INIT (initialization status) or no power applied to device.

Displays the error content.
Color

3.3.3 <LA> LED (<IN> Port)

Description

Description
Port not connected or no power applied to device.
Port connected and communication active.
Port connected but no communication.

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OPG550 EtherCATcp

3.3.5 Device Address Switch

During device initialization, the device address switches are read by the device
firmware. This device address is supported to the master as Explicit Device
Identification.
Example: Value of the Explicit Device ID = 0xDDD (dec 3549):
0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD (dec 13)

3.3.6 Life Information LED <LI>

Displays the main status of the sensor.
Color

LED State

Description

green

on

Operational.

orange on

Warning: scheduled maintenance soon.

red

on

Device failure.

blinking

The device is in error status (no communication possible).

Double flash

Application firmware is not valid or firmware update failed.

Triple flash

The device is in error status (communication possible).

(200 ms on
200 ms off
200 ms on
1000 ms off)
(200 ms on
200 ms off
200 ms on
200 ms off
200 ms on
1000 ms off)

During firmware update, the lifetime LED shows up the current progress.
Colorgreen/redgreen

LED Statealternating

Description
FW upgrade in progress.

ondouble flash

FW upgrade without version change – nothing done.
FW upgrade done – reboot required.

double flash

Application firmware is not valid or firmware update failed.

(200 ms on
200 ms off
200 ms on
1000 ms off)red

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OPG550 EtherCATcp(200 ms on
200 ms off
200 ms on
1000 ms off)11

3.3.7 Status LED <ST>

Displays the status of the device.
Color

LED Stateoffblinking

Description
No power applied to device.
The device is starting up.

double flash

The device is in bootloader status.

onApplication firmware is running.

(200 ms on
200 ms off)

green

3.3.8 High Voltage LED <HV>

Displays the cold cathode high voltage status.
Color
green

3.3.9 Augent Measurement
LED <AM>LED Stateoffblinkingon

Description
High voltage is off.
High voltage is on, but no plasma ignited.
High voltage is on and plasma ignited.

Displays the gas measurement status.
Color
blue

3.3.10 Firmware Update(200 ms on
200 ms off
200 ms on
1000 ms off)

LED State
offon

Description
No spectrum measurement active.
Spectrum measurement active (SPEC, ROR or RGD)

The firmware update can be done via FTP interface via EtherCAT connection.
Please ensure to
•

user:

fwupdate•

password:(empty)The firmware update progress is indicated at the <LI> LED (chapter 3.3.6).

12

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OPG550 EtherCATcp

4 Object Structure OPG550
This chapter describes the CANopen over EtherCAT (CoE) Object Dictionary.

4.1 Object Dictionary
structure
Device Description

The objects in the CoE Object Dictionary can be accessed with SDO services, andmany of the dictionary objects can be mapped for cyclic communication in PDOs.
Each object is addressed using a 16-bit index and an 8-bit subindex.

A device description is available on our website (www.inficon.com).
The GSDML file provides the available SDOs and default PDOs as well as all
relevant device specific fieldbus settings.
The following table presents the overall layout of the standard Object Dictionary.
Index (hex.)

Object dictionary area

1000 – 1FFF

Communication profile area

2000 – 2FFF
3000 – 3FFF
4000 – 4FFF
5000 – 5FFF

Input area

OPG550Area

Layout Object Dictionary

Output area
Configuration area
Information area

7000 – 7FFF
8000 – 8FFF
9000 – 9FFF
A000 – AFFF
B000 – BFFF
C000 – EFFF

Input area
ETG.5003 Profile
Specific Area

6000 – 6FFF

Output area
Configuration area
Information area
Diagnosis area
Service Transfer area

F000 – FFFF

Modular device concept

Reserved area
Device area

The device is structured according to the modular device concept into modules.
The modules share common hexadecimal digits in the Object Directory:
Index (hex.)

Module0xX00X

Algorithm SPEC

0xX01X

Algorithm ROR

0xX02X

Algorithm RGD

0xX03X

Pressure Gauge Pirani

0xX04X

Pressure Gauge Cold Cathode

Common elements are mapped in 0X1XX:
Index (hex.)
0xX10X

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OPG550 EtherCATcp

ModuleDevice Common

13Abbreviations

14

Explanations for the abbreviations in the columns of the tables are given below:
Abbr.

Description

Access

SDO read/write access
RO: object can only be read by the SDO service
RW: object can be both read and written by the SDO service

CoE

CAN application protocol over EtherCAT

Index

Object Index (hex.) (address of an object)

NV

Nonvolatile; attribute value is maintained through power cycles

ObjectAbstract representation of a particular component within a device,
which consists of data, parameters, and methods.

PDO

Process Data Object. Structure described by mapping parameters
containing one or several process data entities.

PM

PDO mapping
Rx: object can be mapped into an Rx PDO
Tx : object can be mapped into a Tx PDO

SDOService Data Objects. CoE asynchronous mailbox communications
where all objects in the Object Dictionary can be read and written.

SI

Subindex (hex.) (sub-address of an object)

Type

Data Type
BOOL, BIT = 1 bit. Boolean (0 = false, 1 = true)
USINT, BYTE = 8 bit. Unsigned Byte
UINT = 16 bit. Unsigned integer value
UDINT = 32 bit. Unsigned integer value
ULINT = 64 bit. Unsigned integer value
REAL = 32 bit. Floating point
V_STRING = 8×n bit. Visible string (1 byte for character)

RxPDO

Receive PDO. A Process Data Object received by an EtherCAT slave.

TxPDOTransmit PDO. A Process Data Object sent from an EtherCAT slave.

SPEC

Spectrum
The SPEC measuring type measures the gas emission spectrum with amanually set integration time.
At the beginning of the measurement, the background spectrum is
automatically recorded and then subtracted from the measured
spectrum.

ROR

Leak Detection (RoR – Rate of Rise)
The RoR measurement type measures the effective gas emission
spectrum and characterizes the outgassing behavior of a vacuum
chamber during a pressure rise measurement.

RGD

Residual Gas Detection
The RGD measuring type measures a signal-to-noise optimized gas
emission spectrum and detects gas types and measures gas partialpressures.

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OPG550 EtherCATcp

4.2 Communication Profile
Objects(0x1000…0x1FFF)

This chapter describes the basic EtherCAT communication objects covered by the
EtherCAT standard.

4.2.1 EtherCAT Properties

The objects of the communication profile describe the basic EtherCAT properties of
the OPG550 and are common to all EtherCAT slaves using the CoE communication protocol. The objects are described in following table:
Index

SI

DataType

NV

AccessPM Name0x1000

UDINT

RO

Device Type

0x1008STRINGRO

Manufacturer Device name0x1009STRINGRO

Manufacturer Hardware
Version0x100ASTRINGRO

Manufacturer Software
Version0x100BSTRINGRO

Manufacturer Bootloader
VersionUDINT

RWStore Parameters
Read:
Bit 0 = 1: slave saves the
backup entries when writing 0x1010:01 with
0x65766173

0x10100x01

Bit 1 = 1: slave saves the
backup entries automatically when they are written
Bit 2-31 = 0
Write:
With the value
0x65766173 the backup
entries will be stored to
non-volatile memory of theslave
0x1011

0x01

UDINT

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OPG550 EtherCATcp

RW

Restore Default
Parameters
Read:
Bit 0 = 1: slave supports
the restoring of backup
entries with the default
values when writing
0x1011:01 with
0x64616F6C
Bit 1-31 = 0
Write:
With the value
0x64616F6C the backupf
entries will be restoredwith the default values

RO

Identity Object

0x01

UDINT

RO

Vendor ID

0x02

UDINT

RO

Product Code

0x03

UDINT

RO

Revision Number

0x04

UDINT

RO

Serial Number

ULINT

RO

Timestamp Object

15

4.2.2 Process Data Mapping(PDO's)

The sensor provides a default PDO mapping of the most important process data.
There are some PDO groups predefined:•

0x1A00:SPEC•

0x1A02:

ROR•

0x1A04:RGD•

0x1A06:

Combo Pressure Gauge•

0x1BFE:

Sensor Status

In scope of ETG.5003.1, TxPDO's 1A01, 1A03, 1A05, 1A07, 1BFF and theRxPDO 1601 are designated for user mapping. These PDO's do not have default
values and can be set up by the PDO configuration.

RxPDOThere are no objects mappe das RxPDO.
Index

TxPDO SPECSI

DataType

Access

Value

Name

0x1600PM

RW

Receive PDO
Mapping,

0x1601PM

RW

Receive PDO
Mapping, User
Mapping

The SPEC measuring type measures the gas emission spectrum with a manually
set integration time.
Further technical data →  [1]
The mapped signals are described in chapter 4.3.2.
Index

SI

0x1A00

0x1A01

16

DataType

Access Value

Name

PM

RW

SPEC TxPDO
Mapping0x01

BIT0x2802:01

Reading Valid

0x02

BIT7

0x2802:02

Reserved (padding
7 bit)

0x03

UDINT

0x2802:03

Timestamp

0x04

USINT

0x2802:04

Algorithm Status

0x05

USINT

0x2800:01

Ignition Status

0x06

UDINT

0x2802:05

Integration Time

0x07
…
0x10

REAL

0x2802:06…
0x2802:0F

Spectrum Power ofWavelength 1 to 10

PM

RW

SPEC TxPDO
Mapping, User
Mapping

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OPG550 EtherCATcp

TxPDO RORThe ROR measurement type measures the effective gas emission spectrum andcharacterizes the outgassing behavior of a vacuum chamber during a pressure risemeasurement.
Further information →  [1]
The mapped signals are described in chapter 4.3.3.
Index

SI

0x1A02

Access

PM

RW

Value

Name
ROR TxPDO Mapping

0x01

BIT

0x2803:01 Reading Valid

0x02

BIT7

0x2803:02 Reserved (padding 7
bit)

0x03

UDINT

0x2803:03 Timestamp

0x04

USINT

0x2803:04 Algorithm Status

0x05

USINT

0x2800:01 Ignition Status

0x06

UDINT

0x2803:05 Integration Time

0x07
…
0x10

UINT

0x2803:06 Spectrum Intensity of…
Wavelength 1 to 10
0x2803:0F

0x11
…
0X1a

REAL

0x2803:10 Leak Rate Number of…
Gas Number 1 to 10
0x2803:19

0x1A03TxPDO RGD

DataTypePM

RW

ROR PDO Mapping,User Mapping

The RGD measuring type measures a signal-to-noise optimized gas emission
spectrum and detects gas types, detects gas types and measures gas partialpressures.
Further information →  [1]
The mapped signals are described in chapter 4.4.3.
Index

SI

0x1A040x1A05

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OPG550 EtherCATcp

DataType

Access

PM

RW

Value

Name
RGD TxPDO Mapping

0x01

BIT

0x2804:01 Reading Valid

0x02

BIT7

0x2804:02 Reserved (padding 7
bit)

0x03

UDINT

0x2804:03 Timestamp

0x04

USINT

0x2804:04 Algorithm Status

0x05

USINT

0x2800:01 Ignition Status

0x06

UDINT

0x2803:05 Integration Time

0x07
…
0x10

REAL

0x2804:06 Spectrum Power of…
Wavelength 1 to 10
0x2804:0F

0x11
…
0x1A

REAL

0x2804:0F Gas Intensity of Gas…
Number 1 to 10
0x2804:18

0x1B
…
0x24

REAL

0x2804:19 Gas Partitial Pressureof Gas Number 1

0x25
…
0x2E

REAL

0x2804:23 Ratio Number 1 to 10…
0x2804:32

PMRW

RGD TxPDO Mapping,User Mapping
17

TxPDO Combo Pressure
Gauge

The gauge consists of two separate measuring systems (the Pirani and the cold
cathode system according to the inverted magnetron principle). They are combined
for the user providing one main pressure value.
The mapped signals are defined according to ETG.5003 and described inchapter 4.10.1.
Index

SI

0x1A06

PM

RW

Value

Name
Pressure TxPDO
Mapping

BIT

0xF640:01 Reading Valid

0x02

BIT

0xF640:02 Overrange Exceeded

0x03

BIT

0xF640:03 Underrange Exceeded

0x04

BIT5

0xF640:04 Reserved (padding 5
bit)

0x05

REAL

0xF640:0B Combo Pressure Value

0x06

UINT
PM

0xF640:0C Combo Active Sensor
RW

Pressure TxPDO
Mapping, User Mapping

The gauge provides the sensor status according to ETG.5003. These signals aredescribed in chapter 4.9.
Index

SI

0x1BFE
0x01
0x1BFF4.2.3 Sync Manager

Access0x01

0x1A07TxPDO Sensor Status

DataType

DataType

Access

PM

RW

Value

Name
TxPDO Mapping

BYTE

0xF380:00 Active Exception Status

PM

RW

NV

TxPDO Mapping User
Mapping

Index

SI

DataType0x1C00

0x01
0x02
0x03
0x04

BYTE

AccessRW

PM NameSync Manager Type

0x1C12 /0x1C13

0x01
0x02
0x03
0x04

UINT

RW

Sync Manager PDO
Assignment

0x1C32 /0x1C33

0x01
0x20

RW

Sync Manager Parameter

4.3 OPG550 Specific Input
Area (0x2000…0x2FFF)

This chapter describes the input area for objects specific for OPG550 not coveredby the device profiles of ETG.5003.

4.3.1 Common Sensor

Index

Subindex 0x01

18

SI

DataType

NV

Access PM Name

0x01

USINT

RO

TX

Ignition Status

0x02

USINT

RO

TX

Self Diagnostic Status

0x2800COMMON: Input

Ignition Status
0

OFF

1

Plasma ON but not ignited yet.

2

Plasma ON and ignited.

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Subindex 0x02

4.3.2 SPEC

Self Diagnostic Status
0

OK

1

Service soon

2

Device failure

The SPEC measuring type measures the gas emission spectrum with a manually
set integration time.
Further information →  [1]The device allows to output the spectrum power of up to 10 user defined
wavelengths on EtherCAT. These wavelengths can be configured by SDO
elements 0x4001:0x00.
Index

SI

DataType

NV

Access PM Name

0x01

BOOL

RO

TX

Reading Valid

0x02

BOOL[7]RO

TX

Reserved

0x03

UDINT

RO

TX

Timestamp

0x04

USINT

RO

TX

Algorithm Status

0x05

UDINT

RO

TX

Integration Time

0x06
to
0x0F

REAL

RO

TX

Spectrum Power ofWavelength 1 to 10

0x2801

SPEC: Input

Subindex 0x01

Reading Valid0
Invalid1
Valid: the values of following subindexes include valid values.

Subindex 0x02

Reserved: always 0.

Subindex 0x03

Timestamp: the relative time from start of the measurement in [ms].

Subindex 0x04

SPEC Algorithm Status0

Not selected

1

Idle

2

Setup

3

Background capture

4

Spectrum capture5

Cleanup

255

Error

Subindex 0x05

Integration Time: Optical integration time in [µs].

Subindex 0x06 to 0x0F

Spectrum Power of Wavelength 1 to 10: raw measured value by the SPECmeasuring type.
The related wavelength can be configured by SDOs elements 0x4001:0x00.

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19

4.3.3 ROR

The ROR measurement type measures the effective gas emission spectrum andcharacterizes the outgassing behavior of a vacuum chamber during a pressure risemeasurement.
Further information →  [1]The device allows to output the spectrum intensity of up to 10 user defined
wavelengths on EtherCAT. These wavelengths can be configured by SDO
elements 0x4011:0x00.
The device allows to output the ROR leak rate numbers (formerly named Augent
Numbers) of up to 10 user defined gases on EtherCAT. These gases can be
configured by SDO elements 0x4012:0x00.
Index

SI

DataType

NV

Access PM Name

0x2802Subindex 0x01

ROR: Input
0x01

BOOL

RO

TX

Reading Valid

0x02

BOOL[7]RO

TX

Reserved

0x03

UDINT

RO

TX

Timestamp

0x04

USINT

RO

TX

Algorithm Status

0x05

UDINT

RO

TX

Integration Time

0x06
to
0x0F

UINT

RO

TX

Spectrum Intensity ofWavelength 1 to 10

0x10
to
0x19

REAL

RO

TX

Leak Rate Number of Gas
Number 1 to 10

Reading Valid0

Invalid1

Valid: the values of following subindexes include valid values.

Subindex 0x02

Reserved: always 0.

Subindex 0x03

Timestamp: the relative time from start of the measurement in [ms].

Subindex 0x04

ROR Algorithm Status0

Not selected

1

Idle

2

Setup

3

Spectrum capture4

Cleanup

255

Error

Subindex 0x05

Integration Time: Optical integration time in [µs].

Subindex 0x06 to 0x0F

Spectrum Intensity of Wavelength 1 to 10: raw measured value by the ROR
measuring type.
The related wavelengths can be configured by SDOs elements 0x4011:0x00.

Subindex 0x10 to 0x19

Leak Rate Number of Gas Number 1 to 10: output by the ROR measuring type.
The related gas indexes can be configured by SDOs elements 0x4012:0x00.

20

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4.3.4 RGD

The RGD measuring type measures a signal-to-noise optimized gas emission
spectrum and detects gas types, detects gas types and measures gas partialpressures.
Further information →  [1]The device allows to output the spectrum powers of up to 10 user defined
wavelengths on EtherCAT. These wavelengths can be configured by SDO
elements 0x4021:0x00.
The device allows to output the gas intensities and the gas partial pressures of up
to 10 user defined gases on EtherCAT. These gases can be configured by SDO
elements 0x4022:0x00.
The device allows to output the ratio information of up to 10 user defined ratio
indexes on EtherCAT. These ratios can be configured by SDO elements
0x4023:0x00.
Index
0x2803

tirb84e1

SI

DataType

0x01
0x02
0x03
0x04
0x05
0x06
to
0x0F
0x10
to
0x19
0x1A
to
0x23
0x24
to
0x2D

BOOL
BOOL[7]
UDINT
USINT
UDINT
REAL

NV

Access PM Name
RGD: Input
RO
TX Reading ValidRO
TX Reserved
RO
TX Timestamp
RO
TX Algorithm StatusRO
TX Integration TimeRO
TX Spectrum Power ofWavelength 1 to 10

REAL

RO

TX

Gas Intensity of Gas
Number 1 to 10

REAL

RO

TX

Gas Partial Pressure of
Gas Number 1 to 10

REAL

RO

TX

Ratio Number 1 to 10

Subindex 0x01

Reading Valid0
Invalid1
Valid: the values of following subindexes include valid values.

Subindex 0x02

Reserved: always 0.

Subindex 0x03

Timestamp: the relative time from start of the measurement in [ms].

Subindex 0x04

RGD Algorithm Status0
Not selected
1
Idle
2
Setup
3
Background capture
4
Spectrum capture5
Cleanup255
Error

Subindex 0x05

Integration Time: Optical integration time in [µs].

(2024-06)

OPG550 EtherCATcp

21

Subindex 0x06 to 0x0F

Spectrum Power of Wavelength 1 to 10: raw measured value by the RGD
measuring type.
The related wavelengths can be configured by SDOs elements 0x4021:0x00.

Subindex 0x10 to 0x19

Gas Intensity of Gas Number 1 to 10: output of the RGD measuring type. The
whole spectrum is taken into account to get the residual gas intensities.
The related gas indexes can be configured by SDOs elements 0x4022:0x00.

Subindex 0x1A to 0x23

Gas Partial Pressure of Gas Number 1 to 10: output of the RGD measuring type.
The gas intensities are recalculated as partial pressures.
The related gas indexes can be configured by SDOs elements 0x4022:0x00.

Subindex 0x24 to 0x2D

Ratio Number 1 to 10: output of the RGD measuring type. The gas intensities are
put into ratios.
The related ratio indexes can be configured by SDOs elements 0x4023:0x00.

22

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4.4 OPG550 SpecificConfiguration Area
(0x4000…0x4FFF)

This chapter describes the configuration area for objects specific for OPG550 not
covered by the device profiles of ETG.5003.

4.4.1 SPECThe SPEC measuring type measures the gas emission spectrum with a manually
set integration time.

SPEC: Start parameter
MANUALIn MANUAL mode, the operation starts when the user successfully executes the
Algo On/Off command (chapter 4.13.2). This mode can be configured with index
0x4101 (see chapter 4.4.5).
Index

SI

DataType

NV

Access PM Name

0x4000Subindex 0x01

SPEC: Start parameter
MANUAL
0x01

UDINT

RW

Number of spectra tocapture

0x02

UDINT

RW

Integration time

Number of spectra to capture: defines that the measurement ends after a specificnumber of spectra.
Value of 0: Endless mode. Algorithm runs till stopped via command ”Algorithm
ON/OFF” in element 0xFB43 (described in chapter 4.13.2).

Subindex 0x02

SPEC: Start parameter
AUTO

Integration time: manually set optical integration time for SPEC algorithm in [µs].

In AUTO mode, the operation starts under a defined pressure. This mode can be
configured with index 0x4101 (see chapter 4.4.5).
Index

SI

DataType

NV

Access PM Name

0x4001

SPEC: Start parameter
AUTO
0x02

Subindex 0x02
SPEC: Configuration of
PDO output

Index 0x4002

UDINT

x

RW

Integration time

Integration time: manually set optical integration time for SPEC algorithm in [µs].
Index

SI

DataType

0x4002

0x00

REAL[10]

NV

Access PM Name
RW

SPEC: Configuration
Wavelength 1 to 10

Configuration wavelength 1 to 10: configuration of the wavelength output from theSPEC algorithm.
This configuration is common for the AUTO and MANUAL mode.

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23

4.4.2 ROR

ROR: Start parameter
MANUALThe ROR measurement type measures the effective gas emission spectrum andcharacterizes the outgassing behavior of a vacuum chamber during a pressure risemeasurement.

In MANUAL mode, the operation starts when the user successfully executes the
Algo On/Off command (chapter 4.13.2). This mode can be configured with index
0x4101 (see chapter 4.4.5).
Index

SI

DataType

NV

Access PM Name

0x4010Index 0x01

ROR: Start parameter
MANUAL
0x01

UDINT

RW

Number of spectra tocapture

0x03

UINT

RW

Sensitivity gas number

Number of spectra to capture: defines that the measurement ends after a specificnumber of spectra.
Value of 0: Endless mode. Algorithm runs till stopped via command ”Algorithm
ON/OFF” in element 0xFB43 (chapter 4.13.2).

Index 0x03

Sensitivity gas number: The ROR algorithm detects the integration time for
optimizing the measurement for a specific gas information. This index sets thefocus to a specific gas.
ROR Sensitivity Gas Number

ROR: Start parameter AUTO

0

Whole Spectrum

1

Oxygen 777 nm

2

Argon 812 nm

3

Nitrogen 822 nm

4

Nitrogen 870 nm

5

Nitrogen 337 nm

6Hydrogen 656 nm

In AUTO mode, the operation starts under a defined pressure. This mode can be
configured with index 0x4101 (see chapter 4.4.5).
Index

SI

DataType

NV

Access PM Name

0x4011

ROR: Start parameter
AUTO
0x03

Subindex 0x03

UINT

x

RW

Sensitivity gas number

Sensitivity gas number: The ROR algorithm detects the integration time for
optimizing the measurement for a specific gas information. This index sets thefocus to a specific gas.
ROR Sensitivity Gas Number

240Whole Spectrum

1

Oxygen 777 nm

2

Argon 812 nm

3

Nitrogen 822 nm

4

Nitrogen 870 nm

5

Nitrogen 337 nm

6Hydrogen 656 nm
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OPG550 EtherCATcp

ROR: Configuration of PDO
output

Index

SI

DataType

NV

Access PM Name

0x4012

0x00

REAL[10]RW

ROR: Configuration
Wavelength 1 to 10

0x40130x00

UINT[10]RW

ROR: Configuration
Gas number 1 to 10

Index 0x4012

Configuration wavelength 1 to 10: configuration of the wavelength output from the
ROR algorithm.

Index 0x4012

Configuration gas number 1 to 10: configuration of the gas output from the ROR
algorithm.
ROR Configuration Gas Number

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OPG550 EtherCATcp0

Whole Spectrum

1

Oxygen 777 nm

2

Argon 812 nm

3

Nitrogen 822 nm

4

Nitrogen 870 nm

5

Nitrogen 337 nm

6Hydrogen 656 nm

25

4.4.3 RGD

RGA: Start parameter
MANUALThe RGD measuring type measures a signal-to-noise optimized gas emission
spectrum and detects gas types, detects gas types and measures gas partialpressures.
In MANUAL mode, the operation starts when the user successfully executes the
Algo On/Off command (chapter 4.13.2). This mode can be configured with index
0x4101 (see chapter 4.4.5).
Index

SI

DataType

NV

Access PM Name

0x01

UDINT

RW

Number of spectra tocapture

0x03

UINT

RW

Sensitivity gas number

0x4020Subindex 0x01

RGD: Start parameter

Number of spectra to capture: defines that the measurement ends after a specificnumber of spectra.
Value of 0: Endless mode. Algorithm runs till stopped via command ”Algorithm
ON/OFF” in element 0xFB43 (chapter 4.13.2).

Subindex 0x03

Sensitivity gas number: The RGD algorithm detects the integration time for
optimizing the measurement for a specific gas information. This index sets thefocus to a specific gas.
RGD Sensitivity Gas Number

26

0Whole Spectrum

1

Hydrogen 656 nm

2

Helium 501 nm

3

Nitrogen 337 nm

4

Oxygen 775 nm

5Argon 809 nm

6

Ammonia 335 nm

7

OH 314 nm

8

CH 431 nm

9

CO 452 nm

10

Fluor 687 nm

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OPG550 EtherCATcp

RGD: Start parameter AUTO

In AUTO mode, the operation starts under a defined pressure. This mode can be
configured with index 0x4101 (see chapter 4.4.5).
Index

SI

DataType

NV

Access PM Name
RGD: Start parameter
AUTO

0x4021
0x03

Subindex 0x03

UINT

x

RW

Sensitivity Gas number

Sensitivity Gas number: The RGD algorithm detects the integration time for
optimizing the measurement for a specific gas information. This index sets thefocus to a specific gas.
RGD Sensitivity Gas Number

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Whole Spectrum

1

Hydrogen 656 nm

2

Helium 501 nm

3

Nitrogen 337 nm

4

Oxygen 775 nm

5Argon 809 nm

6

Ammonia 335 nm

7

OH 314 nm

8

CH 431 nm

9

CO 452 nm

10

Fluor 687 nm

27

RGD: Configuration of PDO
output

Index

SI

DataType

NV

Access PM Name

0x4022

0x00

REAL[10]RW

RGD: Configuration
Wavelength n0x40230x00

UINT[10]RW

RGD: Configuration
Gas number n

0x40240x00

UINT[10]RW

RGD: Configuration
Ratio number nIndex 0x4022

Configuration wavelength 1 to 10: configuration of the wavelength output from the
RGD algorithm.

Index 0x4023

Configuration gas number 1 to 10: configuration of the gas output from the RGD
algorithm.
RGD Configuration Gas Number

Index 0x4024

1

Hydrogen 656 nm

2

Helium 501 nm

3

Nitrogen 337 nm

4

Oxygen 775 nm

5Argon 809 nm

6

Ammonia 335 nm

7

OH 314 nm

8

CH 431 nm

9

CO 452 nm

10

Fluor 687 nm

Configuration Ratio number 1 to 10: configuration of the ratio output from the RGD
algorithm.
RGD Configuration Ratio Number

4.4.4 Common Configuration

Subindex 0x4100:0x00

1

391 nm N2+ vs 311nm OH

2336 nm N2 vs 311nm OH

3391 nm N2+ vs 656 nm H

4336 nm N2 vs 656 nm H

5391 nm N2+ vs 810 nm Ar

6

777 nm O vs 810 nm Ar7502 nm He vs 336 nm N2

8777 nm O vs 336 nm N29656 nm H vs 777 nm O

10656 nm H vs 810 nm Ar

Index

SI

DataType

NV

Access PM Name

0x4100

0x00

USINT

x

RW

Plasma Interlock

Plasma Interlock: Command to switch off the plasma interlock of the cold cathode.
If enabled, the sensor automatically switches the plasma off if the vacuum pressure
is too high. It is not recommended to switch off the plasma interlock due to lifetime
considerations.
Plasma interlock

28

0

No plasma interlock

1

Plasma is switched off at too high pressure (default)

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4.4.5 Operating mode

Subindex 0x01

Index

SI

DataType

NV

Access PM Name

0x4101

Operating mode
0x01

USINT

x

RW

Mode

0x02

REAL

x

RW

Pressure trip point limit

0x03

REAL

x

RW

Pressure trip point
hysteresis percent

Mode: This configuration selects if the algorithms start automatically when a given
pressure is reached or manually by executing the Algorithm On/Off command(chapter 4.13.2).
Modetirb84e10Manual1

Automatic SPEC2

Automatic ROR

3Automatic RGA

Subindex 0x02

Pressure trip point limit: Configuration for the automatic modes. In automatic mode,
the algorithm automatically starts when the pressure is below this configuratedpressure value.
The pressure data unit is configured by index 0xF840 (see chapter 4.11.1).

Subindex 0x03

Pressure trip point hysteresis: In automatic mode, the algorithm switches off if thepressure value is above the pressure this point limit plus this hysteresis.
The trip pint hysteresis is defined in percent of the Trip Point Limit.

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OPG550 EtherCATcp

29

4.5 OPG550 SpecificInformation Area
(0x5000…0x5FFF)

This chapter describes the information area for objects specific for OPG550 not
covered by the device profiles of ETG.5003.

4.5.1 ROR
ROR: Gas information

The ROR algorithm got an enumeration of gases used to configure the sensor.
This enumeration can be programmatically accessed via following elements.
Index

SI

DataType

NV

Access PM Name

0x5010

0x00

UINT

RO

ROR: Number of gases

0x5011

0x00

UINT

RW

ROR: Enum Gas number

0x5012

ROR: Enum Gas
information
0x01

STRING[32]RO

Description

0x02

REAL

RO

Wavelength

The enumeration will result in following table. The definition might be extended infuture SW versions.
ROR Sensitivity Gas Number
0

Whole Spectrum

1

Oxygen 777 nm

2

Argon 812 nm

3

Nitrogen 822 nm

4

Nitrogen 870 nm

5

Nitrogen 337 nm

6Hydrogen 656 nm

The index 0 means that the sensor is sensitive to the whole spectrum, this isreserved for element “Sensitivity Gas Number”.

30

Index 0x5010

Number of gases: highest index of enumeration (6).

Index 0x5011

Enum Gas Number: Changing this number will change the information output on
0x5012:0x01 and 0x5012:0x02.

Subindex 0x5012:0x01

Description: Description of the gas.

Subindex 0x5012:0x02

Wavelength: Informative wavelength in [nm].

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OPG550 EtherCATcp

4.5.2 RGD
RGD: Gas information

This enumeration can be programmatically accessed via following elements.
Index

SI

DataType

0x5020

0x00

UINT

NV

Access PM NameRO

RGD: Number of gases

0x5021

0x00

UINT

RW

RGD: Enum Gas number

0x5022

RGD: Enum Gas
information
0x01

STRING[32]RO

Description

0x02

REAL

RO

Wavelength

The enumeration will result in following table. The definition might be extended infuture SW versions.
RGD Gas Number
0

Whole Spectrum

1

Hydrogen 656 nm

2

Helium 501 nm

3

Nitrogen 337 nm

4

Oxygen 775 nm

5Argon 809 nm

6

Ammonia 335 nm

7

OH 314 nm

8

CH 431 nm

9

CO 452 nm

10

Fluor 687 nm

The index 0 means that the sensor is sensitive to the whole spectrum, this isreserved for element “Sensitivity Gas Number”.

tirb84e1(2024-06)

Index 0x5020

Number of gases: highest index of enumeration (10).

Index 0x5021

Enum Gas Number: Changing this number will change the information output on
0x5022:0x01 and 0x5022:0x02.

Subindex 0x5022:0x01

Description: Informative description of the gas.

Subindex 0x5022:0x02

Wavelength: Informative wavelength in [nm].

OPG550 EtherCATcp

31

RGD: Ratio information

The RGD algorithm got an enumeration of ratios used to configure the sensor.
This enumeration can be programmatically accessed via following elements.
Index

SI

DataType

NV

Access PM Name

0x5023

0x00

UINT

RO

RGD: Number of ratios

0x5024

0x00

UINT

RW

RGD: Enum Ratio number

0x5025

RGD: Enum Ratio
information
0x01

STRING[32]RO

Description

The enumeration will result in following table. The definition might be extended infuture SW versions.
RGD Ratio Number
1

391 nm N2+ vs 311 nm OH

2336 nm N2 vs 311 nm OH

3391 nm N2+ vs 656 nm H

4336 nm N2 vs 656 nm H

5391 nm N2+ vs 810 nm Ar

6

777 nm O vs 810 nm Ar7502 nm He vs 336 nm N2

8777 nm O vs 336 nm N29656 nm H vs 777 nm O

10656 nm H vs 810 nm Ar

Index 0x5023

Number of ratios: highest index of enumeration (10).

Index 0x5024

Ratio Number: Changing this number will change the information output on
0x5025:0x01.

Subindex 0x5025:0x01

Description: Informative description of the ratio.

4.5.3 Common
Pixel Information

32

These elements provide basic information for the spectrometer.
Index
0x5100SI
0x00

DataType
UINT

0x51010x00

UINT0x5102

0x00

REAL[10]

NV

Access PM Name
RO
Spectrometer: Number ofpixelsSpectrometer: Start pixel
RW
numberRO
Spectrometer: Wavelength

Index 0x5100

Number of pixels: Number of pixels of the spectrometer (288).

Index 0x5101

Start pixel number: Changing this number will change the information output on
0x5102 and 0x5103.
There is a slot of 10 returned wavelengths with the start index defined in 0x5101.

Index 0x5102

Wavelength of the related spectrometer pixels in [nm].

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OPG550 EtherCATcp

4.6 ETG.5003 Input Area
(0x6000…0x6FFF)

This chapter describes the input area for objects covered by the device profiles of
ETG.5003.

4.6.1 Pirani

The included Pirani sensor can be accessed separately. But it is recommended touse the Combo Pressure Gauge output on 0xF640 in chapter 4.10.1.

Pirani: Input Common

Index

SI

DataType

NV

Access PM Name

0x6030Subindex 0x0E

Pirani: Input Common
0x0E

BOOL

RO

TX

TxPdoState

0x11

REAL

RO

TX

Sensor Value

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState

Subindex 0x11
Pirani: Pressure Value0

Safe state

1

Actual value

The corrected, converted, calibrated pressure value of the sensor.
Index

SI

DataType

NV

Access PM Name

0x6033Subindex 0x01

Pirani: Value
0x01

BOOL

RO

TX

Reading Valid

0x02

BOOL

RO

TX

Overrange Exceeded

0x03

BOOL

RO

TX

Underrange Exceeded

Indicates whether the value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Overrange Exceeded

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the value parameter contains a value in under range.
Underrange Exceeded

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0

No Underrange Exceeded1

Underrange Exceeded33

4.6.2 Cold CathodeCold Cathode: Input
CommonSubindex 0x0E

The included Cold Cathode sensor can be accessed separately. But it isrecommended to use the Combo Pressure Gauge output on 0xF640 in chapter 0.
Index

SI

DataType

NV

Access PM Name

0x6040Cold Cathode: Input
Common
0x0E

BOOL

RO

TX

TxPdoState

0x11

REAL

RO

TX

Sensor Value

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState

Subindex 0x11
Cold Cathode: Pressure
Value

Subindex 0x01

0

Safe state

1

Actual value

The corrected, converted, calibrated pressure value of the sensor.
Index

SI

DataType

NV

Access PM Name

0x6044

Cold Cathode: Value
0x01

BOOL

RO

TX

Reading Valid

0x02

BOOL

RO

TX

Overrange Exceeded

0x03

BOOL

RO

TX

Underrange Exceeded

0x04

BOOL

RO

TX

High Voltage Status Off/On

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Overrange Exceeded

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Underrange Exceeded

Subindex 0x04

0

No Underrange Exceeded1

Underrange Exceeded

Indicates whether the High Voltage is Off or On.
High Voltage Status Off / On

34

0

No High Voltage turned on

1

High Voltage turned on

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4.7 ETG.5003 InformationArea(0x9000…0x9FFF)

This chapter describes the information area for objects covered by the device
profiles of ETG.5003.

4.7.1 SPEC
SPEC Sensor Warnings andErrorsETG.5003 defines to output sensor warnings and errors per module. Theseelements output the sensor of algorithm SPEC.
Index

SI

DataType

NV

Access PM Name

0x01

UINT

RO

Sensor Warnings

0x02

UINT

RO

Sensor Errors

0x9001

Information Sensor

Subindex 0x01

Sensor Warnings
Bit 0…15 Reserved: always 0

Subindex 0x02

Sensor Errors
Bit 0

FSM State Error

Bit 1…15 Reserved: always 0

4.7.2 RORROR Sensor Warnings andErrorsETG.5003 defines to output sensor warnings and errors per module. Theseelements output the sensor of algorithm ROR.
Index

SI

DataType

NV

Access PM Name

0x01

UINT

RO

Sensor Warnings

0x02

UINT

RO

Sensor Errors

0x9011Subindex 0x01

Information Sensor

Sensor Warnings
Bit 0…15 Reserved: always 0

Subindex 0x02

Sensor Errors
Bit 0

FSM State Error

Bit 1…15 Reserved: always 0

4.7.3 RGDRGD Sensor Warnings andErrorsETG.5003 defines to output sensor warnings and errors per module. Theseelements output the sensor of algorithm RGD.
Index

SI

DataType

NV

Access PM Name

0x9021Subindex 0x01

Information Sensor
0x01

UINT

RO

Sensor Warnings

0x02

UINT

RO

Sensor Errors

Sensor Warnings
Bit 0…15 Reserved: always 0

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OPG550 EtherCATcp

35

Subindex 0x02

Sensor Errors
Bit 0

FSM State Error

Bit 1…15 Reserved: always 0

4.7.4 Pirani
Pirani: Measurement Range

The "measurement range" is the range between minimum and maximum pressure,
where the reading of the gauge is within the specified measurement uncertainty
limits.
The display range is the complete pressure range where the gauge gives anindication (measurement signal). The display range consists of underrange,measurement range and overrange.
According to these definitions, 4 points are defined:
12
3
4

Lowest informational measurement value
Lowest precision measurement value
Highest precision measurement value
Highest informational measurement value

Index

SI

DataType

NV

Access PM Name

0x903036

Information Common
0x02

REAL

RO

Highest Informational
Measurement Value

0x03

REAL

RO

Highest Precision
Measurement Value

0x04

REAL

RO

Lowest Precision
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.
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Pirani: Sensor Warnings
and Errors

ETG.5003 defines to output sensor warnings and errors per module. Theseelements output of the Pirani sensor.
Index

SI

DataType

NV

Access PM Name

0x9031Subindex 0x01

Information Sensor
0x01

UINT

RO

Sensor Warnings

0x02

UINT

RO

Sensor Errors

Sensor Warnings
Bit 0

Sensor Element Failure

Bit 1

Electronics Warning

Bit 2

Sensor High Temp

Bit 3…15 0

Subindex 0x02

Sensor Errors
Bit 0

Sensor Element Failure

Bit 1

Electronics Failure

Bit 2

Sensor High Temp

Bit 3…15 0

4.7.5 Cold CathodeCold Cathode:
Measurement Range

The "measurement range" is the range between minimum and maximum pressure,
where the reading of the gauge is within the specified measurement uncertainty
limits.
The display range is the complete pressure range where the gauge gives anindication (measurement signal). The display range consists of underrange,measurement range and overrange.
According to these definitions, 4 points are defined:12
3
4

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Lowest informational measurement value
Lowest precision measurement value
Highest precision measurement value
Highest informational measurement value

37IndexSI

DataType

NV

Access PM Name

0x9040Information Common
0x02

REAL

RO

Highest Informational
Measurement Value

0x03

REAL

RO

Highest Precision
Measurement Value

0x04

REAL

RO

Lowest Precision
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Cold Cathode: Sensor
Warnings and Errors

ETG.5003 defines to output sensor warnings and errors per module. Theseelements output the Cold Cathode sensor.
Index
0x9041Subindex 0x01

SI

DataType

0x01
0x02

UINT
UINT

NV

Access PM Name
Information Sensor
RO
Sensor Warnings
RO
Sensor Errors

Sensor Warnings
Bit 0

Reserved: always 0

Bit 1

Electronics Warning

Bit 2

Sensor High Temp.

Bit 3…15 Reserved: always 0

Subindex 0x02

Sensor Errors
Bit 0

Reserved: always 0

Bit 1

Electronics Failure

Bit 2

Sensor High Temp.

Bit 3…15 Reserved: always 0

4.8 ETG.5003 Device Area
(0xF000...0xAFFF)

This chapter describes the device area for objects covered by the device profiles of
ETG.5003.

4.8.1 Semiconductor Device
ProfileIndex

Subindex 0x01
38

SI

DataType

NV

Access PM Name

0xF000

Semiconductor Device
Profile
0x01

UINT

RO

Index Distance

0x02

UINT

RO

Maximum Number ofModules

Index Distance: Index offset between PDO entries of two consecutive modules (forETG.5003 = 0x10).
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Subindex 0x02

Maximum Number of Modules: The OPG550 is split into 5 modules:•

SPEC algorithm•

ROR algorithm•

RGD algorithm•

Pirani sensor•

Cold Cathode sensor

The Pirani sensor and Cold Cathode sensor are combined as “Combo Pressure
Gauge” in 0xF640.

4.8.2 Module Profile List

Subindex 0x01 to 0x05

4.9 ETG.5003 Exceptions

Index

SI

DataType

0xF0100x00

UDINT[5]NV

Access PM NameRO

TX

Module Profile List

Each sub-index lists the profile-number of the corresponding module.

This chapter describes the exception area defined by the device profiles of
ETG.5003.
The device exceptions are split into warnings where the device is still operationaland errors where the device switches off.
The warnings and errors are detailed in registers providing specific errors andwarnings.

To simplify, the exception module also provides status bits indicating that any bit ofthese registers is active. The exception masks can be used to mask the detailed
registers to be influencing the status bits.

4.9.1 Active Exception Status

Index 0xF380

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Index

SI

DataType

0xF380

0x00

USINT

NV

Access PM NameRO

TX

Active Exception Status

Active Exception Status
Bit 0

Device Warning

Bit 1

Manufacturer Warning (not used)

Bit 2

Device Error

Bit 3

Manufacturer Error (not used)

Bit 4…7

Reserved: always 039

4.9.2 Active Module Device
Exception Details

Subindex 0xF381:0x01

Index

SI

DataType

NV

Access PM Name

0xF381

0x00

UDINT[5]RO

TX

Active Module Device
Warning Details

0xF3830x00

UDINT[5]RO

TX

Active Module Device
Error Details

SPEC Algorithm Warnings
Bit 0…31 Reserved: always 0

Subindex 0xF383:0x01

SPEC Algorithm Errors
Bit 0

FSM State Error

Bit 1…31 Reserved: always 0

Subindex 0xF381:0x02

ROR Algorithm Warnings
Bit 0…31 Reserved: always 0

Subindex 0xF383:0x02

Subindex 0xF381:0x03

ROR Algorithm Errors
Bit 0

FSM State Error

Bit 1…31

Reserved: always 0

RGD Algorithm Warnings
Bit 0…31 Reserved: always 0

Subindex 0xF383:0x03

RGD Algorithm Errors
Bit 0

FSM State Error

Bit 1…31 Reserved: always 0

Subindex 0xF381:0x04

Pirani Sensor Warnings
Bit 0

Sensor Element Warning

Bit 1

Electronics Warning

Bit 2

Sensor High Temp

Bit 3…31 Reserved: always 0

Subindex 0xF381:0x04

Pirani Sensor Errors
Bit 0

Sensor Element Failure

Bit 1

Electronics Failure

Bit 2

Sensor High Temp

Bit 3…31 Reserved: always 0

Subindex 0xF381:0x05

Cold Cathode Sensor Warnings
Bit 0

Reserved: always 0

Bit 1

Electronics Warning

Bit 2

Sensor High Temp

Bit 3…31 Reserved: always 0

Subindex 0xF381:0x05

Cold Cathode Sensor Errors
Bit 0

Reserved: always 0

Bit 1

Electronics Failure

Bit 2

Sensor High Temp

Bit 3…31 Reserved: always 0

40

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4.9.3 Active Global Device
Exception Details

Index 0xF385

Index 0xF387

4.9.4 Latched Exception Status

Index 0xF380

4.9.5 Latched Module Device
Exception Details

Index

SI

DataType

NV

Access PM Name

0xF385

0x01

UDINT

RO

TX

Active Global Device
Warning Details

0xF387

0x01

UDINT

RO

TX

Active Global Device Error
Details

Active Global Device Warning Details
Bit 0

Reserved: always 0

Bit 1

uP High Temp.

Bit 2...11

Reserved: always 0

Bit 12

Scheduled maintenance soon

Bit 13…31

Reserved: always 0

Active Global Device Error Details
Bit 0...2

Reserved: always 0

Bit 3

EEPROM exception

Bit 4…9Reserved: always 0

Bit 10Internal Power supply output voltage error (3.3, 5.0 or
12.0V)

Bit 11

External Power supply output voltage error (24V)

Bit 12

Scheduled maintenance due

Bit 13

Notify vendor

Bit 14…31

Reserved: always 0

Index

SI

0xF390

DataType

NV

USINT

AccessPM NameRO

tx

Latched Exception Status

Latched Exception Status: Latched version of 0xF380.

Index

SI

DataType

0xF391

0x00

UDINT[5]NV

RO

Access PM Name
TX

Latched Device Warning
Details

0xF3930x00

UDINT[5]RO

TX

Latched Device Error
Details

Index 0xF391

Latched Device Warning Details: Latched version of 0xF381.

Index 0xF393

Latched Device Error Details: Latched version of 0xF383:01.

4.9.6 Latched Global Device
Exception Details

tirb84e1

The active global exceptions detail the warning and error state of the device itself.

Index

SI

DataType

0xF395

0x01

UDINT

NV

RO

Access PM Name
TX

Latched Global Device
Warning Details

0xF397

0x01

UDINT

RO

TX

Latched Global Device
Error Details

Index 0xF395

Latched Global Device Warning Details: Latched version of 0xF385.

Index 0xF397

Latched Global Device Error Details: Latched version of 0xF387.

(2024-06)

OPG550 EtherCATcp

41

4.9.7 Device Exception Masks

Index

SI

DataType

NV

Access PM Name

0xF3A1 0x00

UDINT[5]xRW

Device Module Warning
Mask

0xF3A3 0x00

UDINT[5]xRW

Device Module Error Mask

0xF3A5 0x01

UDINT

x

RW

Global Device Warning
Mask

0xF3A7 0x01

UDINT

x

RW

Global Device Error Mask

Index 0xF3A1

Device Module Warning Mask: Mask bits for 0xF381 and 0xF391.

Index 0xF3A3

Device Module Error Mask: Mask bits for 0xF383 and 0xF393.

Index 0xF3A5

Global Device Warning Mask: Mask bits for 0xF385:01 and 0xF395:01.

Index 0xF3A7

Global Device Error Mask: Mask bits for 0xF387:01 and 0xF397:01.

Index 0xF3A8

Global Manufacturer Error Mask: Mask bits for 0xF388:01 and 0xF398:01.

4.10 ETG.5003 Device
Specific Profile Objects

The manufacturer-specific profile objects contain the manufacturer's data. The
objects are described in the following tables.

4.10.1 Vacuum Combination
Gauge

Index

SI

DataType

0xF640

0x01

42

NV

AccessPM Name

BOOL

RO

tx

Combination Gauge
Reading Valid

0x02

BOOL

RO

tx

Combination Gauge
Overrange Exceeded

0x03

BOOL

RO

tx

Combination Gauge
Underrange Exceeded

0x11

REAL

RO

tx

Combination Gauge Active
Value

0x12

UINT

RO

tx

Combination Gauge Active
Sensor Number

Subindex 0x01

Identifies whether the complete vacuum pressure gauge (with several measuring
principles) is out of its absolute overrange or absolute underrange, or in any otherfailure condition.

Subindex 0x02

If the bit "Overrange" is set, all modules of the gauge are in an overrange condition.

Subindex 0x03

If the bit "Underrange” is set, all modules of the gauge are in an underrange
condition.

Subindex 0x11

The value copied from the measurement value of the active measuring module
used for the Input PDO.

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Subindex 0x12

Identifies the module that is providing the measurement value, the latter of which iscopied into the Active Value parameter for the Combo Pressure Value.
Active Sensor Number

4.10.2 Input Latch Local
Timestamp0

No module has a valid value

4

Heat Transfer sensor is providing the Active Value

5

Cold Cathode sensor is providing the Active Value

Index

SI

DataType

0xF6F0

0x01
0x02

NV

AccessPM Name

UDINT

RO

tx

Input Latch Local
Timestamp.

UDINT

RO

tx

Input Latch Local
Timestamp.

Subindex 0x01

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. This corresponds the time immediately prior to writing
to input SM.

Subindex 0x02

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. This corresponds the time immediately prior to writing
to input SM.

4.11 ETG.5003 Configure
Device4.11.1 Pressure Data Units

Subindex 0x01

Index

SI

DataType

NV

AccessPM Name

0xF840

0x01

UDINT

x

RW

Data Units

0x03

USINT

x

RW

Data Units Enum

Unit of the Value of the Pressure Sensor Instance and all related parameters.
Data Units
0x00220000
0xFD4E0000
0x00A10000

Pascalmbar
Torr

If this value is changed, also Subindex 2 will change the value accordingly.

Subindex 0x03

Data Unit for Input Sensor as Enum to have a list of possible values.
Data Units
0x01
0x04
0x05

Pascalmbar
Torr

If this value is changed, also Subindex 1 will change the value accordingly.

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43

4.12 ETG.5003 Device
Specific Information
Data
4.12.1 SDP Information Device

Subindex 0x01

Index

SI

DataType

NV

Access PM Name

0x01

UDINT

RO

Measurement Principle

0x02

USINT

RO

Number of Sensors

0xF940Information Device

Measurement principle assigned to the object instance.
Measurement Principle

Subindex 0x02

1

Capacitance Manometer

2

Piezo

3

Pirani4

Cold Cathode5

Hot CathodeNumber of Sensors: The number of sensors implemented on the device.
This value is 2 because there are a Pirani and Cold Cathode sensor available.

4.12.2 CDP Information Device

44

Index

SI

DataType

0xF9F0

0x00

STRING[32]NV

RO

Access PM Name
Manufacturer Serial
Number

0xF9F1

0x00

UDINT

RO

CDP Functional
Generation Number

0xF9F20x00

UDINT[5]RO

SDP Functional
Generation Number

0xF9F3

0x00

STRING[32]RO

Vendor Name

0xF9F4

0x00

STRING[8]RO

Semiconductor SDP
Device Name

0xF9F50x00

USINT[5]RW

0xF9F6

0x00

UDINT

RO

Time since power on

0xF9F7

0x00

UDINT

RO

Total time powered

0xF9F8

0x00

UDINT

RO

Firmware Update
Functional Generation
NumberRX Output Identifier

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4.13 OPG550 SpecificCommands
4.13.1 HV On/Off Command

Execution of this command will start a high voltage on / off operation.
Index
0xFB42

DataType
BYTE[2]BYTE
BYTE[3]

NV

AccessRWROROPM NameCommand
StatusResponse

Subindex 0x01

Command
Byte 0
0: HV OFF
1: HV ON
5: Index of the Sub Sensor (always 5 for Cold
Byte 1
Cathode Sensor)

Subindex 0x02

Status (supported values)0
Last command completed, no errors, no reply
available
1
Last command completed, no errors, reply available
Last command completed, errors present, no reply
2
available
Last command completed, errors present, reply
3
available
255
Command is executing

Subindex 0x03

Response
Byte 0See Subindex 0x02
Byte 1
not used = 0x00
Byte 2
0: HV ON/OFF successful
1: HV ON/OFF failed (unspecific reason)
2: HV ON failed because pressure to high254: No previous HV ON/OFF command issued

4.13.2

Algorithm On/Off

Subindex 0x01

tirb84e1

SI
0x01
0x02
0x03

(2024-06)

OPG550 EtherCATcp

Execution of this command will turn on or off the specified algorithm.
Index
SI
0xFB430x01

DataType

0x02
0x03

BYTE
BYTE[3]

BYTE[2]NV

Access PM Name
Algorithm On/Off
Algorithm On/Off
RW
CommandRO
Algorithm On/Off Status
RO
Algorithm On/Off
Response

Command
Byte 0
0: Algorithm OFF
1: Algorithm ON
Byte 1
0 : SPEC
1: ROR
2: RGD45

Subindex 0x02

Status (supported values)0
Last command completed, no errors, no reply
available
1
Last command completed, no errors, reply available
Last command completed, errors present, no reply
2
available
3
Last command completed, errors present, reply
available
255
Command is executing

Subindex 0x03

Response
Byte 0 See Subindex 0x02
Byte 1 not used = 0x00
Byte 2 0: Algorithm ON/OFF successful
1: Algorithm ON/OFF failed (unspecific reason)
254: No previous Algorithm ON/OFF commandissued

4.14 ETG.5003 Commands
4.14.1 Device Reset Command

Execution of this command causes the device to emulate a complete power cycle.
This includes an ESC reset. An SDP may limit some behavior of the power cycle
emulation, but shall not exclude the EtherCAT interface.
As consequence of an ESC reset all following devices are disconnectedfrom the network.
There are two versions of this command:

Subindex 0x01•

Standard reset (as described above)•

Factory reset (as described above, but additionally, all parameters are restored
to as-shipped defaults).

Index

SI

DataType

NV

AccessPM Name

0xFBF00x01

BYTE [6]RW

Command

0x02

BYTE

RO

Status0x03

BYTE[2]

RO

Response

A device reset is initiated when the following byte sequence is sent.
Command

Subindex 0x02

46

Byte 00x74

Byte 1

0x65

Byte 20x73

Byte 30x65

Byte 40x72

Byte 50x00 = Standard reset

Status (supported values)0

Reserved

1

Reserved

2

Last command completed, error, no response

3

Reserved

255

Command is executing

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OPG550 EtherCATcp

Subindex 0x03

4.14.2 Exception ResetCommand

Subindex 0x01

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

Execution of this command clears the latched exceptions.
Index

SI

DataType

NV

AccessPM Name

0xFBF10x01

BYTE[5]RW

Command

0x02

BYTE

RO

Status0x03

BYTE[2]

RO

Response

A device reset is initiated when the following byte sequence is sent.
Command

Subindex 0x02

Subindex 0x03

tirb84e1(2024-06)

OPG550 EtherCATcp

Byte 00x74

Byte 1

0x65

Byte 20x73

Byte 30x65

Byte 40x72

Status (supported values)0

Last command completed, no error, no response1

Reserved

2

Last command completed, error, no response

3

Reserved

255

Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

47

4.14.3 Store Parameters
Command

Subindex 0x01

Execution of this command will store all parameters to non-volatile memory. If adevice automatically saves all non-volatile parameters at the time they are set, thiscommand will not take any action.
Index

SI

DataType

NV

AccessPM Name

0xFBF20x01

BYTE[4]RW

Command

0x02

BYTE

RO

Status0x03

BYTE[2]

RO

Response

All device parameters are stored when the following byte sequence is sent.
Read:
Command: Read
Byte 00x65

Byte 1

0x76

Byte 20x61

Byte 30x73

Write:
Command: Write

Subindex 0x02

Subindex 0x03

48

Byte 00x73

Byte 1

0x61

Byte 20x76

Byte 30x65

Status (supported values)0

Last command completed, no error, no response1

Reserved

2

Last command completed, error, no response

3

Reserved

255

Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

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4.14.4 Calculate Checksum
Command

Subindex 0x01

Execution of this command will calculate a checksum for all writable, non-volatileparameters as currently stored in non-volatile memory.
Index

SI

DataType

0xFBF30x01

BYTE[4]

NV

AccessRW

PM NameCommand

0x02

BYTE

RO

Status0x03

BYTE[6]

RO

Response

The calculation of the checksum is initiated when the following byte sequence is
sent.
Read
Command: Read
Byte 0

Bit 0 = 1: non-volatile parameters supported
Bit 1 = 1: CRC-32
Bit 2..7 = 0: not used

Byte 1

not used = 0x00

Byte 2

not used = 0x00

Byte 3

not used = 0x00

Write
Command: Write

Subindex 0x02

Subindex 0x03

tirb84e1(2024-06)

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Byte 0

Bit 0 = 1: use default checksum algorithm of theslave
Bit 1 = 1: CRC-32
Bit 2..7 = 0: not used

Byte 1

not used = 0x00

Byte 2

not used = 0x00

Byte 3

not used = 0x00

Status (supported values)0

Last command completed, no error, no response1

Reserved

2

Last command completed, error, no response

3

Reserved

255

Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0

Byte 2Checksum return value, Byte 0

Byte 3Checksum return value, Byte 1

Byte 4Checksum return value, Byte 2

Byte 5Checksum return value, Byte 349

4.14.5 Load Parameters
Command

Subindex 0x01

Execution of this command will load all parameters from non-volatile memory.
Index

SI

DataType

NV

AccessPM Name

0xFBF40x01

BYTE[4]RW

Command

0x02

BYTE

RO

Status0x03

BYTE[2]

RO

Response

The loading is initiated when the following byte sequence is sent.
Read:
Command: Read
Byte 00x64

Byte 1

0x61

Byte 20x6F

Byte 30x6C

Write:
Command: Write

Subindex 0x02

Subindex 0x03

50

Byte 00x6C

Byte 1

0x6F

Byte 20x61

Byte 30x64

Status (supported values)0

Last command completed, no error, no response1

Reserved

2

Last command completed, error, no response

3

Reserved

255

Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

not used = 0x00

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Appendix
A:

tirb84e1

Literature(2024-06)

OPG550 EtherCATcp

 [1]Operating Manual OPG550
tinb84d1 (German)
tinb84e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [2]ETG.1000.2: Physical Layer service definition and protocol specification

 [3]ETG.1000.3: Data Link Layer service definition

 [4]ETG.1000.4: Data Link Layer protocol specification

 [5]ETG.1000.5: Application Layer service definition

 [6]ETG.1000.6: Application Layer protocol specification

 [7]ETG.1020: EtherCAT Protocol Enhancements [8]ETG.2000: EtherCAT Slave Information

 [9]ETG.5001.1: Modular Device Profile – Part 1: General MDP DeviceModel [10]

ETG.5003.1 S (R) V1.1.0: Semiconductor Device profile – Part 1:
Common Device Profile (CDP) [11]

ETG.5003.2080 S (R) V1.3.0: Semiconductor Device profile – Part
2080: Specific Device Profile (SDP): Vacuum Pressure Gauge [12]IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications

 [13]IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3

 [14]SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATORNETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES [15]SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers

51

B:

52

Certificate EtherCAT
Conformance Test

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Notestirb84e1(2024-06)

OPG550 EtherCATcp

53

Original: English

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com