EGF-6115 / EGPS-6115
ELECTRON GUN / POWER SUPPLY

1 keV to 50 keV
UNIFORM HIGH POWER FLOOD ELECTRON BEAMSFOR USE IN:
General Vacuum Physics
Spacecraft Materials TestingUHV Charging
Surface Physics

FEATURES / OPTIONS:Uniform Flood Beam
Rastering /Beam Washing for Wide Angle
Uniform SpotElectrostatic Divergence Control
Magnetostatic Deflection
Internal Alignment while Operating
User-replaceable Firing Units
2.75 inch CFF Mounting
UHV Technology / Bakeable
Computer / Remote ControlTM
LabVIEW Computer / Programming
EGF-6115 Electron Gun mounted on 2.75 inch CF Flange (shown without Deflection)
The Kimball Physics EGF-6115 Electron Gun with its matching
EGPS-6115 Power Supply is a complete subsystem ready to attach tothe user's vacuum system and turn on. It can deliver electrons over abroad range of energies, currents and power. The EGH-6115 is a highpower, focusable flood gun for use in spacecraft materials testing andother surface physics and general vacuum physics applications.
The gun can generate a high energy, adjustable divergence, floodelectron beam.
Both beam energy and beam current are
independently adjustable over wide ranges; energies from 1 keV to
50 keV and currents from picoamps to five milliamps can be achieved.
The electron beam can be pulsed by an input signal to the control grid.
The adjustable optics of the gun can adapt to different divergences anddifferent working distances. Rastering / beam washing is used toprovide a large uniform spot. Electrostatic focusing provides control ofthe spot size, which is typically in the tens of centimeters. The flood
beam is also partially dependent on the grid, anode and working
distance.
The firing unit cartridge (including the cathode, cathode-mount, andWehnelt aperture) is user-replaceable without removing the entire gun
from the vacuum chamber; used firing units may be returned to thefactory for rebuild.
Several cathode types and sizes are available: tantalum disc cathodes,

0.125 X

EGF-6115 ELECTRON GUN(Dimensions in mm)

Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

yttria-coated (Y2O3) iridium cathodes, or Barium Oxide coated (BaO)
cathodes. These cathodes (with the exception of BaO) are notdamaged by repeated exposure to atmospheric gases or water vapor
when cold.
UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr to 10-6 torr for the metal cathodes, or to 10-7 torr for BaO
cathodes. The yttria-coated iridium cathode can survive a total vacuum
dump. The electron gun is bakeable to 350oC with cables andelectronics box removed. The gun is usually mounted on a 2.75 inch
CF flange, and it has zero insertion distance into the vacuum chamber.
The EGPS-6115 Power Supply System contains all necessary power
supplies to run the EGF-6115 Electron Gun. The power supply system
includes a seperate HV supply, connected to, and controlled by theEGPS-6115.
TMAn optional LabVIEW computer program designed for the EGF-6115
is available for remote computer control and metering. Software isavailable in two types: Standard configuration is via serial connections.
or an option using National Instrument DAQ boards and SCSI
connectors on the EGPS-6115 is available. The program provides avirtual panel of controls and real-time metering on the user’s computer
screen.

EGF-6115 ELECTRON GUN SPECIFICATIONSBEAM ENERGYBEAM CURRENT

1 keV to 50 keV (Independently adjustable)
1 nA to 5 mA (Independently adjustable)
Low Current option: 100pA to 100nA

ENERGY SPREAD
BEAM DIVERGENCE

Approx. 0.4 eV cathode thermal spread, calculated
Variable. Adjustable optics to adapt to different
divergences and different working distances
15 mm to 50 mm at 100 mm working distance
100 mm to 1000 mm
Magnetostatic: ± 20° at 50 keV (Optional)
Magnetic: Improves beam uniformity (optional)

SPOT SIZE
WORKING DISTANCE
BEAM DEFLECTIONRASTERING/BEAMWASHINGPULSE CAPABILITY

BEAM UNIFORMITYFIRING UNITCATHODE TYPES

EGPS-6115 ELECTRON GUN POWER SUPPLY SPECIFICATIONS
All necessary voltages to drive the EGH-6115 ElectronGun.

ENERGY STABILITY<0.01% per hour with 0.05% rms ripple at full output±0.1% per hour with Emission Current Control or±10% per hour after warm up without ECC

BEAM STABILITYCONTROLSMETERING

Optional Dual Grid Power Supply: pulse width 2 μs to
DC, rep rates to 1 kHz, rise/ fall 500 ns, rep rates to 5kHz using appropriate pulse generator (not supplied)Center to outer edge ±10%, with rastering andappropriate gun potentials
Customer-replaceable Firing Unit Cartridge includes
precision-aligned cathode, and Wehnelt (G-1) assembly
Firing unit also includes first anode
Tantalum (Ta) disc, Yttrium oxide (Y2O3) or Barium
Oxide (BaO). Cathodes (with exception of BaO) notharmed by repeated exposure to atmospherie while cold

MOUNTING

Standard: 2.75 inch CF flange

INSERTION LENGTH

Zero mm

GUN DIMENSIONS

Gun length: 432 mm (393 W/O deflection) sealing
surface to end of cable connector, Gun dia: 76 mm

FEEDTHROUGHS

Multi-pin brazed ceramic with threaded stainless shell

CABLES

Multiconductor high voltage fully ground-shielded, withmating aluminum connector to connect gun to power
supply.
350°C with cables removed

MAXIMUM BAKEOUTOUTPUT

FlexPanel controls: Energy, Focus, Anode, Grid, Source
Voltage, Emission Current Control, optional Raster X andY Size and Frequency
FlexPanel digital meters: Energy, Focus Anode,Emission, Grid, Source Volts, Source Current

COMPUTER/REMOTE All power supplies: 0 to +10 volts or -10 to +10 volts
CONTROL & METER All meters: 0 to +2 volts
Standard configuration designed for RS-232 connectors.
SOFTWARE
Optional: National Instruments LabVIEWTM file, designed
to run with computer DAQ boards NI 6713 / 6036. SCSI
optional
115 VAC or 230 VAC, 50 to 60 Hz, 100 W
INPUT
Approx: 17 in. x 7 in. x 22 in. (432 mm x 180 mm x 560
DIMENSIONS(width x height x depth) mm);with rack mount kits, overall width is 19.5 in. (495 mm)

OPTIONAL RASTERING / BEAM WASHING SPECIFICATIONSFrequency in X and Y directions can be independently
RASTER GENERATOR set. X freq. is up to 500 Hz, Y freq. 100Hz. (Frequencies
above 100 Hz reduce total raster angle). All
parameters controllable via RS-232, RS-422, RS-485,
analog input, or computer control with LabVIEWTM
software option.
DIMENSIONS
Included in dimensions for standard EGPS (above)

A typical lab set-up of a complete Kimball Physics highenergy system with an flood-style electron gun, power
supplies and optional computer control system(details vary with gun model)

Typical performance;data for guidance only.

Copyright © 2010 by Kimball Physics, Inc. 9/30/10 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.