Inventry List september 2024
№ Category1 Category2

Control number

Item nameModel

Manufact urer

Serial numberVintage
MA99-1023-12340(SA99Equipment Evaporation

RS22-40020A

Equipment Evaporation

RS23-40360A

Evaporation

EBX-1000C

ULVAC

1147-4)

2000/2/1

EBX-2000C

ULVAC

SA00-3013-0

2002/3/1

EBX-2000C

ULVAC

SA00-3014-0

2002/3/1

ei-5

ULVAC

MA05-3097-0

2008/3/1

Vacuum Evaporation
SystemVacuum Evaporation
Equipment Evaporation

RS23-40370A

SystemVacuum Evaporation

Equipment Evaporation

RS23-40380A

SystemBatch Type5Sputtering
Equipment SputteringRS18-11190A

Equipment

SH-350H

ULVAC

MH63-0211

1989/1/1

Equipment Sputtering

RS18-21440A

Sputtering

SIV-200S

ULVAC

MA09-3312-0

2010/9/1

7

Equipment Sputtering

RS18-21450A

Sputtering

SIV-200S

ULVAC

MA09-3313

2010/9/1

8Equipment Sputtering

RS19-10010A

Sputtering

SV-4540

ULVAC

MH63-0301

1989/3/17

Equipment Sputtering

RS19-30040A

Sputtering

ENTRON-EX W300 ULVAC

ME05-4533-0 2006/5/31

10 Equipment Sputtering

RS22-40210A

Sputtering

SIH-450

ULVAC

MH95-1083

Equipment Sputtering

RS22-50030A

Sputtering

SRH-420

ULVAC

MA07-3480-0

12 Equipment SputteringRS23-40420A

Sputtering

SH-250ULVAC

MH90-1013

Equipment Sputtering

RS23-40540A

Sputtering

MPS-4000

ULVAC

MB97-1009-0

Equipment Sputtering

RS23-40550A

Sputtering

MPS-4000

ULVAC

MB97-1046-0

15 Equipment Sputtering

RS23-40560A

Sputtering

SME-200

ULVAC

RS23-40520A

Ellipsometer

UNECS-2000A-030 ULVAC

691113141617181920212223242526

1997/1/1

1990/12/1

Optical Film
Equipment Thickness Meter
Ultra High Vacuum
Equipment Equipment

RS19-10870A
RS19-10880A
RS19-10920A
RS19-10930A
RS19-10940A

2019/1/1

Vacuum Pump

G-50SA

ULVAC

190159T

2019/1/1

Vacuum Pump

G-50SA

ULVAC

190162T

2019/1/1

Vacuum Pump

G-50SA

ULVAC

190156T

2019/1/1

Vacuum Pump

G-10DA

ULVAC

85213

2019/1/1

Vacuum Pump

G-10DA

ULVAC

85229

2019/1/1

Vacuum Pump

G-10DA

ULVAC

85211

2019/1/1

G-20DA

ULVAC

180188T

2018/1/1

G-20DA

ULVAC

180011T

2018/1/1

Oil Sealed Rotary
RS19-10980A

Oil Sealed Rotary
Component Vacuum Pump

190161T

Oil Sealed Rotary

Oil Sealed Rotary
Component Vacuum PumpULVAC

Oil Sealed Rotary

Oil Sealed Rotary
Component Vacuum Pump

G-50SAOil Sealed Rotary

Oil Sealed Rotary
Component Vacuum Pump

Vacuum Pump

Oil Sealed Rotary

Oil Sealed Rotary
Component Vacuum PumpULVAC

Oil Sealed Rotary

Oil Sealed Rotary
Component Vacuum Pump

BC3218

Oil Sealed Rotary
RS19-10860A

Oil Sealed Rotary
Component Vacuum Pump

Equipment
Oil Sealed Rotary

RS19-10850A

Oil Sealed Rotary
Component Vacuum Pump

2015/3/1

Ultra High Vacuum
RS23-40610A

Oil Sealed Rotary
Component Vacuum Pump

U410002

Vacuum Pump
Oil Sealed Rotary

RS19-10990AVacuum Pump

127282930313233

Oil Sealed Rotary
Component Vacuum Pump

Oil Sealed Rotary
RS19-20400A

Oil Sealed Rotary
Component Vacuum Pump

RS19-20410A
RS19-20460A
RS19-25120A

Vacuum Pump

PKS-016

ULVAC

2-23021

Vacuum Pump

PKS-016ULVAC

A30A-01253

Vacuum Pump

PKS-016

ULVAC

2-3239

PMB-012CMULVAC

A17A-01357

PMB-012CMULVAC

A17A-00522

Mechanical Booster
RS23-40090A

Mechanical Booster
Component Pump

A30A-02197

Oil Sealed Rotary

Mechanical Booster
Component PumpULVAC

Oil Sealed Rotary

Oil Sealed Rotary
Component Vacuum Pump

PKS-016

Oil Sealed Rotary

Oil Sealed Rotary
Component Vacuum Pump

Vacuum Pump

Pump
Mechanical Booster

RS23-40100A

Mechanical Booster

Pump
Mechanical Booster

Component Pump

RS23-40120A

Pump

PMB-012CMULVAC

A17A-00521

34 Component Dry Pump

RS19-20080A

Dry Pump

DA-241S

ULVAC

10002092010/1/1

UTM-150ULVAC

015P1009

2017/6/1

3536
3738
39

Turbo MolecularComponent Pump

Turbo Molecular
RS23-40400A

Turbo MolecularComponent Pump

Turbo Molecular
RS16-83740A

Turbo MolecularComponent Pump

Pump

FZL308/LKB
TMP-403LM

SHIMADZU

Turbo MolecularRS16-83750A

Turbo MolecularComponent Pump

Pump

Pump

RS16-83760A

TMP-403LM

Pump

2000/11/1*******/LKB2SHIMADZU

Turbo Molecular

Turbo Molecular

29794*******/LKB2

TMP-403LM

SHIMADZU

96

Turbo MolecularComponent Pump

RS16-83770A

Pump

TMP-403LM

SHIMADZU

MZL02640 Component Cryopump

RS15-81570A

Cryopump

U8HSP

ULVAC

0011054

41 Component Cryopump

RS15-81580A

Cryopump

U-6H

ULVAC

0011328D

42 Component Cryopump

RS18-11940A

Cryopump

CRYO-U10PU

ULVAC

0111392

43 Component Cryopump

RS19-11850A

Cryopump

CRYO-U10PUULVAC8607028

44 Component Cryopump

RS20-10070A

Cryopump

CRYO-U10HSP

ULVAC

1507647

45 Component Cryopump

RS21-40240A

Cryopump

U8HSP

ULVAC

0610387

2006/1/1

46 Component Cryopump

RS21-40250A

Cryopump

U8HSP

ULVAC

0610388

2006/1/1

BC5791-016

ULVAC

MB01-7001

2001/1/1

BC5791-016

ULVAC

MB01-7001

2001/1/1

MB01-7001

2001/1/1

47
48
49

Sputtering
Component Accessories

5in Magnetic
RS19-80720A

Sputtering
Component Accessories

2006/1/1

Cathode5in Magnetic

RS19-80730A

Sputtering

Cathode5in Cathode for Non-

Component Accessories

RS19-80740A

Magnetic Material

BC5791-017

ULVAC

50 Component Manipulator

RS20-10370A

Manipulator

直線導入

unknown

51 Component DC Power Supply

RS16-83690A

DC Power Supply

HPK-15ZI

Kyosan Electric WA2985

2000/7/1

52 Component RF Power Supply

RS19-12150A

RF Power Supply

RFS-1310A3

ULVAC

209003

2008/1/1

53 Component EB Power Supply

RS18-80910A

EB GunEGO-406M

ULVAC

178000010

2000/1/1

54

S/N10220800
Component Matching Box

RS23-40590A

Matching Box

AMVG-600-12.5M-AVAdtec

138

55 Component Pirani Gauge Body

RS23-40240A

Pirani Gauge

GP-1SRY

ULVAC

44096

56 Component Pirani Gauge Body

RS23-40270A

Pirani Gauge

GP-1SRYULVAC

62752

2000/1/1

57 Component Pirani Gauge Body

RS23-40280A

Pirani Gauge

GP-1SRYULVAC

62755

2000/1/1

58 Component Pirani Gauge Body

RS23-40290A

Pirani Gauge

GP-1SRY

ULVAC

62751

2000/1/1

59 Component Pirani Gauge Body

RS23-40300A

Pirani Gauge

GP-1SRY

ULVAC

62749

2000/1/1

60 Component Pirani Gauge Body

RS23-40310A

Pirani Gauge

GP-1SRY

ULVAC

62750

2000/1/1

61 Component Pirani Gauge Body

RS23-40320A

Pirani Gauge

GP-1SRY

ULVAC

62756

2000/1/1

62 Component Pirani Gauge Body

RS23-40330A

Pirani Gauge

GP-1SRY

ULVAC

62753

2000/1/12

63 Component Pirani Gauge Body

RS23-40340A

Pirani Gauge

GP-1SRY

ULVAC

62754

2000/1/1

64 Component Pirani Gauge Body

RS23-40350A

Pirani Gauge

GP-1SRY

ULVAC

62757

2000/1/1

CCMT-1D

ULVAC

0020242023/1/1

CCMT-10D

ULVAC

0021172023/1/1

CCMT-100D

ULVAC

0011552023/1/1

CCMT-1000D

ULVAC

0037572023/1/1

65

Diaphragm Vacuum
Component Gauge Head66Diaphragm Vacuum
Component Gauge Head

67

SC23-10020A

Gauge
Diaphragm Vacuum

SC23-10030A

Diaphragm Vacuum
Component Gauge HeadGauge
Diaphragm Vacuum

Diaphragm Vacuum
Component Gauge Head

68

Diaphragm Vacuum
SC23-10010A

Gauge
Diaphragm Vacuum

SC23-10040A

Gauge3