MODEL 1522 ENHANCED PERFORMANCEPREMIUM SURFACE MOUNT ACCELEROMETER

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Low Noise: 7 μg/√Hz Typical for 2g Full Scale Version
Superior Bias & Scale Factor Temperature Coefficients
Responds to Frequencies from Zero (DC) to 2000+ Hz-55 to +125°C Operation±4V Differential Analog Output+5 VDC, 5 mA Power (Typical)
Integrated Sensor & Amplifier
Internal Temperature Sensor
Nitrogen Damped
Hermetically Sealed
Serialized for Traceability & RoHS Compliant

AVAILABLE G-RANGESFULL SCALE
20 PINACCELERATION
LCC±2g
1522L-002±5g
1522L-005± 10 g1522L-010± 25 g1522L-025± 50 g1522L-050± 100 g1522L-100± 200 g1522L-200± 400 g1522L-400

DESCRIPTION
The Model 1522 is a low-cost, general-purpose integrated MEMS accelerometer with enhanced
performance over temperature for use in zero to medium frequency industrial applications
experiencing large or rapid temperature variations or maintaining hot or cold extremes for extended
periods of time. The Model 1522 accelerometers are individually tested, programmed, calibrated
and verified in a climate chamber to ensure the greatest accuracy in even thermally volatile
conditions.
Each miniature, hermetically sealed package combines a MEMS capacitive sense element and acustom integrated circuit that includes a sense amplifier and differential output stage. Each device
is marked with a serial number on its top and bottom surfaces for traceability. A calibration test
report is supplied with each unit showing the measured bias, scale factor, linearity, operating
current, & frequency response.

ZERO (DC) TO MEDIUM FREQUENCY APPLICATIONSPERFORMANCE
INPUT
RANGE

g
±2
±5
±10
±25
±50
±100
±200
±400

SENSITIVITY,DIFFERENTIALFREQUENCYRESPONSE(TYPICAL, 5%)

mV/g
Hz
2000
0 – 250
800
0 – 400
400
0 – 700
160
0 – 1300
80
0 – 1600
40
0 – 1700
20
0 – 1900
10
0 – 2000
By Model: VDD=VR=5.0 VDC, TC=25°C

FREQUENCYRESPONSE(TYPICAL, 3 DB)Hz
0 – 525
0 – 800
0 – 1100
0 – 1750
0 – 2100
0 – 30000 – 3600
0 – 4200

FREQUENCYRESPONSE(MINIMUM, 3 DB)

OUTPUT NOISE,DIFFERENTIAL(RMS, TYPICAL)MAX.
MECHANICALSHOCK (0.1 MS)

Hz
μg/(root Hz)
g (peak)0 – 300
7
2000
0 – 420
12
0 – 660
18
0 – 1050
25
0 – 1400
50
5000
0 – 1700
100
0 – 2100
200
0 – 2400
400
Single ended sensitivity is half of values shown.

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SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE
Silicon Designs, Inc. • 13905 NE 128th Street, Kirkland WA 98034 • Phone: 425-391-8329 • Fax: 425-391-0446
www.silicondesigns.com[page 1]29-July-2020

MODEL 1522 SURFACE MOUNT ACCELEROMETERPERFORMANCE - ALL VERSIONSAll Models: Unless otherwise specified VDD=VR=5.0 VDC, TC=25°C, Differential. Span = ±g range = 8000 mV
PARAMETER
Bias Calibration Error (mV)Bias Calibration Error (Span)
Bias Temperature Shift (TC= -55 to +125°C)
Scale Factor Calibration Error 1
Scale Factor Temperature Shift (TC= -55 to +125°C)
Non-Linearity (-90 to +90% of Full Scale) 1
Long Term Bias Stability
Long Term Scale Factor Stability
Cross Axis Sensitivity
Input Axis Misalignment
Turn-On Transient (in less than 0.5ms)
Output Impedance
Operating Voltage 2
Operating Current (IDD+IVR)
Mass: ‘L’ package
Case Operating Temperature-55 to +125°C
Storage Temperature-55 to +125°C
Max Reflow Solder Temperature+239°CPower Dissipation

MIN

TYP
MAX
16
40
0.2
0.5
-50
0
+50
0.5
1
-100
0
+50
0.10
0.25
1000
2000
500
1000
2
3
5
10
75
90
4.75
5.0
5.25
5.5
6.5
0.62
Voltage on VDD to GND
Voltage on Any Pin (except DV) to GND3
Voltage on DV to GND (Self-Test)
35 mW

UNITS
± mV
± % of span
(PPM of span)/°C±%
PPM/°C± % of span
± PPM of span
± PPM±%
± mrad± PPM of FS
Ohms
volts
mA
grams
-0.5V to 6.0V
-0.5V to VDD+0.5V±15V

Note 1: For 2g thru 50g only; 100g and greater versions are tested and specified from -65 to +65g.
Note 2: Voltages on pins other than DV, GND or VDD may exceed 0.50 volt above or below the supply voltages provided max current is <1 mA.

NOTICE: Minimize exposure above 125°C for maximum lifespan. Stresses greater than those listed above may cause permanent damage to thedevice. These are maximum stress ratings only. Functional operation of the device at or above these conditions is not implied. Exposure to
absolute maximum rating conditions for extended periods may affect device reliability and lifespan.

BIAS & SCALE FACTOR TEMPERATURE SHIFT EXPLAINEDEvery accelerometer has a bias and scale factor temperature coefficient, meaning the output shifts slightly due totemperature changes. Many applications operate within a relatively small temperature band or at room
temperature, and therefore rarely encounter interference from the bias or scale factor temperature shifts. For
applications experiencing larger temperature variations SDI suggests the upgraded High-Performance 1522
accelerometer. These are temperature compensated, and then individually tested, calibrated and verified in a
climate chamber to ensure enhanced performance.
The accelerometer output with no acceleration present. For SDI’s differential output analog accelerometers,
it is a signed quantity that is expressed in terms of either g or output volts and is ideally equal to zero g orzero volts.
The ratio of the change in output to a unit change in the input acceleration expressed in millivolts per g(mV/g). Since the output of most accelerometers is slightly non-linear, the scale factor value is defined as
Scale Factor
the slope of the least-squares-fit line to the acceleration input vs output curve. SDI measures over the rangeof -90% to +90% of full scale or from -65g to +65g, whichever is smaller.
The amount of bias shift to expect with a change in temperature expressed as PPM of span per °C. For
Bias
example, the percent of span bias shift that would occur for a 25g full scale device with a +/-200 PPM of span
Temperatureper °C rating and a 55 °C rise from room temperature would be: +/-200 / 1,000,000 x (80C - 25C) x 100% of
Shiftspan = +/-1.1% of span. The g shift would be +/-1.1% of 50g = 0.55 g. This error in terms of output voltage for(Coefficient)a 25 g analog accelerometer would be +/-1.1% of span = +/-1.1% of 8 V = 88 mV.
The amount of scale factor shift to expect with a change in temperature expressed as PPM per °C. For
Scale Factor
example, the percent shift in scale factor that would occur for a device with a +200 PPM per °C rating and a
Temperature
60 °C rise from room temperature would be: +200 / 1,000,000 x (85C - 25C) x 100% = +1.2%. For an analog
Shift
10g device, the scale factor would rise from its nominal (8 V)/(20 g) = 400 mV/g at +25C to 400 mV/g +1.2% =(Coefficient)404.8 mV/g.

Bias

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MODEL 1522 SURFACE MOUNT ACCELEROMETERSAMPLE OF INCLUDED TEST REPORT
Every 1522 accelerometer is accompanied by a test report featuring the measured bias, scale factor, bias and scale
factor over temperature, linearity, output, and frequency and phase response.


SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE
Silicon Designs, Inc. • 13905 NE 128th Street, Kirkland WA 98034 • Phone: 425-391-8329 • Fax: 425-391-0446
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MODEL 1522 SURFACE MOUNT ACCELEROMETEROPERATION
The model 1522 sensitive axis is perpendicular to thebottom of the package, with positive acceleration
resulting from a positive force pushing on the bottom of
the package. The seismic center is located on acenterline through the dual sense elements and halfway
between them.
The Model 1522 produces a differential +/-4 volts output
voltage, the value of which varies with acceleration asshown in the figure. The seismic center is located on acenterline through the dual sense elements halfway
between them. Any errors due to rotation about this point
are effectively cancelled by the internal electronics.
Two reference voltages, +5.0 and +2.5 volts (nominal), are required; scale factor is ratiometric to the +5.0 volt
reference voltage relative to GND, and both outputs at zero acceleration are nominally the same as the +2.5 volt
input.

JQG

ground.

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VDD and GND (power): Pins (14) and (19) respectively. Power (+5 Volts DC) and95

SIGNAL DESCRIPTIONS
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AOP and AON (output): Pins 12 and 16 respectively. Analog output voltages

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proportional to acceleration. The AOP voltage increases (AON decreases) withpositive acceleration; at zero acceleration both outputs are nominally equal to
the +2.5 volt reference. The device experiences positive (+1g) acceleration with
its lid facing up in the earth’s gravitational field. Use of differential mode isstrongly recommended for both lowest noise and highest accuracy operation.
Voltages can be measured ratio-metrically to VR for good repeatability without
requiring a separate precision reference voltage for an A/D.

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DV (input): Pin 4. Deflection Voltage. Connect to the 2.5 Volt pin for best

JQG

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repeatability. A test input that applies an electrostatic force to the sense element, simulating a positive
acceleration. The nominal voltage at this pin is ½ VDD. DV voltages higher than required to bring the output topositive full scale may cause device damage to 2g, 5g, and 10g devices.
VR (input): Pin 3. Voltage Reference. Tie to a good reference (not directly to VDD) for best scale factor repeatability.
A 0.1μF bypass capacitor is recommended at this pin. The current is less than 100 μA.
2.5 Volt (input): Pin 17. Sets internal and output common mode value. Tie to a resistive voltage divider from +5
volts. A 0.1μF bypass capacitor is recommended at this pin. The current is less than 50 μA.
IT (output): Pin 8. Temperature dependent current source. May be tied to VDD or left disconnected if not used.
Special Use Pins: Pins 9 and 11 should be tied to VDD, Pins 2, 5, 6, and 18 to GND.

** Pins 1, 7, 10, 13, 15, and 20 are reserved for future use and should remain unused **

SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE
Silicon Designs, Inc. • 13905 NE 128th Street, Kirkland WA 98034 • Phone: 425-391-8329 • Fax: 425-391-0446
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MODEL 1522 SURFACE MOUNT ACCELEROMETEROPTIONAL INTERNAL TEMPERATURE SENSINGVT ≈ RT [(500 μ A ) + [(1. 5μ A)(T − 25 )]]The model 1522 accelerometer contains a temperaturedependent current source that is output on pin 8. This signal isuseful for measuring the internal temperature of the
ΔVT= RT (1.5μA)
accelerometer so that any previously characterized bias andΔT
scale factor temperature dependence, for a particularªVºaccelerometer, can be corrected.
VT ≈ − RG « OFF + (500 μA) + [(1.5μA)(T − 25)]»¬ ROFF¼
The nominal output current at 25°C is ≈500 (±200) μA and thenominal sensitivity is 1.5 (±0.5) μA/°C. Fluctuations in VDD & VR
− VOFF
have little effect on the temperature reading. A reduction of 0.10 ROFF = §V·
¨ T R ¸ + (500 μA) + [(1.5μA)(T − 25)]
V to both VDD & VR will reduce the current about 1 μA, which
G¹©
corresponds to less than a 1°C change in reading. With a single
ΔV− ΔVT
resistor RT = 2K between IT (pin 8) and GND the output voltage VT= − RG (1.5μA)
RG =will vary between +0.76 and +1.3 volts from -55 to +125°C, which
ΔT(1.5μA)(ΔT )equates to a sensitivity of ≈+3 mV/°C.
If a greater voltage change versus temperature or lower signal source impedance is needed, add the amplifier
as shown on the right side in Figure 2. With offset voltage VOFF = -5V, gain resistor RG = 15.0K and offset resistor
ROFF = 7.32K, the output voltage VT will vary between +4.5 and +0.5 Volts from -55 to +125°C, which equates to asensitivity of ≈ -29 mV/°C.
Figure 3 shows the voltage compliance of the temperature dependent current source (IT) at room temperature.
The voltage at pin 8 must be kept in the 0 to +3V range in order to achieve proper temperature readings.
+ 5V
RG
11
5K
4

17

14
VDD

3
VR

0.1 uF9+ 5 to + 15V
IT

DV

AOP
2.5V
AON

.01uF

5K
2

5

GND
19

Figure 2

8
VT

12
16

R OFF
- 5 to - 15 V

6

18
VOFF

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MODEL 1522 SURFACE MOUNT ACCELEROMETERPACKAGE DIMENSIONS
1. *Dimensions “M,” “T,” and “U” locate sensing element’s center ofmass.
2. Lid is electrically tied to terminal 19 (GND).
3. Controlling dimension: Inch.
4. Terminals are plated with 60 micro inches min gold over 80 micro
inches min nickel. This plating specification does not apply to thePin-1 identifier mark on the bottom of the J-lead package version.
5. Package: 90% min alumina (black), lid: solder sealed kovar.
(

Dim
A
C
D
E
F
G
H
J
K
L
*M
*T
*U

)

C

K

F

*U

L

*T

TERMINAL 20AE

TERMINAL 1

Millimeters
Min
Max
8.69
9.09
1.40 TYP
2.41
2.92
2.16 TYP
1.27 BSC
0.64 TYP
1.27 TYP
0.10 x 45°
0.25 R TYP
0.41 TYP
1.68 TYP
2.16 TYP
4.45 TYP

H

J

Positive
Acceleration

Inches
Min
Max
0.342
0.358
0.055 TYP
0.095
0.115
0.085 TYP
0.050 BSC
0.025 TYP
0.050 TYP
0.004 x 45°
0.010 R TYP
0.016 TYP
0.066 TYP
0.085 TYP
0.175 TYP

*M
D

A

G

RECOMMENDED CONNECTIONSDEFLECTION VOLTAGE (DV) TEST INPUT: This test input applies an electrostatic force to the sense element,
simulating a positive acceleration of up to +10g. It has a nominal input impedance of 32 kΩ and a nominal open
circuit voltage of ½ VDD. For best accuracy during normal operation, this input should be left unconnected orconnected to a voltage source equal to ½ of the VDD supply.
The change in differential output voltage (AOP - AON) is proportional to the square of the difference between thevoltage applied to the DV input (VDV) and ½ VDD. Only positive shifts in the output voltage may be generated by applying
voltage to the DV input. When voltage is applied to the DV input on 2g, 5g, or 10g devices, it should be applied
gradually to avoid damage. The application of DV voltages greater than required to bring the output to positive fullscale may cause device damage. The proportionality constant (k) varies for each device and is not characterized.
ESD and LATCH-UP CONSIDERATIONS: The model 1522 accelerometer is a CMOS device subject to damage fromlarge electrostatic discharges. Diode protection is provided on the inputs and outputs, and it is not easily damaged,
but care should be exercised during handling. However, individuals and tools should be grounded before comingin contact with the device. Although the 1522 is resistant to latch-up, inserting a 1522 into or removing it from a
powered socket may cause damage.
2
1
§
·
+ 5V
Δ ( AOP − AON ) ≈ k ¨ V DV − V DD ¸
2
©
¹
11
5K
4

TEST INPUT(OPTIONAL)

17

14

3

VDD

VR

0.1 uF

9

AOP

DV

AON

12
16

2.5V
IT

0.01uF

5K
2

5

GND
19

6

8

OUTPUT (POSITIVE)OUTPUT (NEGATIVE)
TEM PERATURE DEPENDENTCURRENT SOURCE

18

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MODEL 1522 SURFACE MOUNT ACCELEROMETERSOLDERING RECOMMENDATIONSRoHS Compliance: The model 1522 does not contain elemental lead and is RoHS compliant.
Soldering: Solder reflow should not exceed 239°C, exceeding this temperature may result in permanent damage.
Pre-Tinning of Accelerometer Leads is Recommended: To prevent gold migration embrittlement of the solder
joints, it is best to pre-tin the accelerometer leads.
LCC Solder Contact Plating Information: The plating composition and thickness for the solder pads andcastellations on the “L” suffix (LCC) package are 60 to 225 micro-inches thick of gold (Au) over 80 to 350 microinches thick of nickel (Ni) over a minimum of 5 micro-inches thick of moly-manganese or tungsten refractorymaterial.
Recommended Solder Pad Pattern: The recommended solder pad size and shape is shown in the diagram and tablebelow. These dimensions are recommendations only and may or may not be optimum for your particular soldering
process.

Do not use ultrasonic cleaners. Ultrasonic cleaning may break internal wire bonds and willvoid the warranty.

F

G
F
E
A
C
D

DIM
A
B
C
D
E
F
G

Inch
.230
.430
.100
.033
.050
.013
.120

mm
5.84
10.92
2.54
0.84
1.27
0.33
3.05

B

COMPANION ACCESSORY
The Model EB-L Test Sets provide a convenient means of testing andevaluating SDI Model 1522 surface mount accelerometers. The zeroinsertion-force socket is pre-fitted to the board, which includes set
jumpers for advanced features of SDI accelerometers. A 10-pin
connector and ribbon cable provide connections to the user's test
equipment. The EB-L Test Sets and SDI Surface Mount Accelerometers
are each sold separately.


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MODEL 1522 SURFACE MOUNT ACCELEROMETERTEST REPORT EXAMPLES: LINEARITY, PHASE & FREQUENCY RESPONSE BY G-LEVEL
The included 1522-TST test reports provide additional information about the linearity, output, phase, and frequency
response as tested for each individual unit. The following are examples of the graphical data supplied on test
reports, by G-level.
NOTE: Frequency response on test reports is documented by simulating frequency response with the DV pin. This
will indicate lower values than the actual performance once soldered or otherwise permanently installed upon aboard.

EXAMPLE 2G: 1522L-002

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MODEL 1522 SURFACE MOUNT ACCELEROMETEREXAMPLE 5G: 1522L-005

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MODEL 1522 SURFACE MOUNT ACCELEROMETEREXAMPLE 10G: 1522L-010

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MODEL 1522 SURFACE MOUNT ACCELEROMETEREXAMPLE 25G: 1522L-025

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MODEL 1522 SURFACE MOUNT ACCELEROMETEREXAMPLE 50G: 1522L-050

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MODEL 1522 SURFACE MOUNT ACCELEROMETEREXAMPLE 100G: 1522L-100

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MODEL 1522 SURFACE MOUNT ACCELEROMETEREXAMPLE 200G: 1522L-200

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MODEL 1522 SURFACE MOUNT ACCELEROMETEREXAMPLE 400G: 1522L-400

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29-July-2020