Augent™ OPG550 Optical Plasma Vacuum
Gauge

The INFICON AugentTM Optical Plasma Gauge is a compact andintelligent solution for vacuum monitoring. AugentTM combines twosensor technologies into one compact device for gas type monitoringfrom 1 x 10-7 to 5 mbar and to measure total pressure from 1 x 10-7
mbar to atmosphere at the same time. AugentTM is protected by an
integrated Pirani sensor to switch off plasma above 20 mbar. The fast
optical measurement principle allows the detection of in principle any
type of gas.

利点nHigh speed leak detection allows chamber leak testnIncrease of productivity and yieldnLong life time, no filament burns, air inrush protectionnWithstand process chemistrynSmart algorithm for easy integrationnCompact design and small footprintnReliable and fast start up

注文の情報

1

Augent™ OPG550 Optical Plasma Vacuum Gauge

タイプ

OPG550OPG550 9DSub, 16-CF-R

3OF0-003-010P

OPG550 9DSub, 16-KF

3OF0-001-010P

OPG550 9DSub, 25-KF

3OF0-006-010P

OPG550 9DSub, 8-VCR F

3OF0-00E-010P

OPG550 TI,LC,9DSub,16CF-R

3OF0-013-010P

OPG550 TI,LC,9DSub,16KF

3OF0-011-010P

OPG550 TI,LC,9DSub,25KF

3OF1-016-010P

OPG550 TI,LC,9DSub,40CF-F

3OF1-01Q-010P

OPG550 TI,LC,9DSub,40KF

3OF1-017-010P

OPG550 TI,LC,9DSub,8-VCR f

3OF0-01E-010P

2

Augent™ OPG550 Optical Plasma Vacuum Gauge

注文の情報3

Augent™ OPG550 Optical Plasma Vacuum Gauge

仕様タイプOPG550Measurement system

Cold Cathode according inverted magnetron principle
and Thermal conductivity according Pirani principle

Measurement range N₂mbar

Measurement range N₂

Torr

1×10⁻⁷ … 5(7.6×10⁻⁸ … 3.8)Detection limit 25 liter chamber
O₂ leaks in pressure risemethodmTorr/min>0.3

O₂ leaks during pump downfrom atmosphere with N₂
backfillmTorr/min>1

1 x 10⁻⁷ ... 100 mbar

% of reading

30

100 ... 1000 mbar

% of reading

50% of reading

5Accuracy total pressure reading
N₂

Repeatability total pressure
reading N₂
1 x 10⁻⁷ ... 100 mbar
Pressure
Limited to inert gases < 50°C

bar (absolute)<10Temperature
Operation (ambient)°C+5 … +50

Storage°C-20 … +70

Bakeout at flange withelectronic unit°C<80

Bakeout at flange w/oelectronic unit°C<120%<95 (non-condensing)

Relative humidity for 30 days ayear
Humidity
Supply voltage
At gauge

V (dc)+14.5 … +30V (p-p)

<1W

<5AT

1

Supply voltage
RippleSupply voltage
Power consumption
Supply voltage
Fuse to be connected
Output signal

4

Augent™ OPG550 Optical Plasma Vacuum Gauge

仕様
タイプ

OPG550

AnalogV (dc)

0 … +10Output signal
Digital

RS232CElectrical connection

D-Sub, 9-pin, maleHigh voltage (in the measuringchamber)
Ignition voltage

kV

<4.5

Operating voltage

kV<3.3Materials exposed to vacuum
GeneralAl₂O₃, Stainless seel 1.4435

AnodeMolybdenum

Ionization chamber

Titanium, stainless steel 1.4016

Ignition aid

Stainless steel 1.4310

Vacuum flange½ in. tube (spiral baffle):
DN16 ISO-KF, DN16 CF-R, 8-VCR female

1 in. tube (standard baffle):
DN25 ISO-KF, DN40 ISO-KF, DN40 CF-F
Internal volume

cm³ (in.³)< 46 (2.81)

Weightg<700

Footprintmm

68 x 68

Heightmm< 154

Dimensions

Protection type

IP40Standards

CE

スペア部品
OPG550OPG550 spare sensor, 16-CF-R

351-591

OPG550 spare sensor, 16-KF

351-590

OPG550 spare sensor, 25-KF

351-592

OPG550 spare sensor, 8-VCR female

351-593

5

Augent™ OPG550 Optical Plasma Vacuum Gaugeアクセサリ
OPG550Centering ring DN 16 ISO-KF, Inox / FPM

211-066

Centering ring DN 25 ISO-KF, SS/FPM

211-068

Clamping ring DN 10-16 ISO-KF

211-001

Communication adapter(2m)forPC RS232

303-333

Copper seal DN 16 CF; set of 10 pcs

213-451

Power Supply, OPG550, RS232/Analog Out

351-051

クランプリング DN 20-25 ISO-KF

211-002

寸法6

Augent™ OPG550 Optical Plasma Vacuum Gauge

www.inficon.com

reachus@inficon.com

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