EGA-1012 / EGPS-1012
ELECTRON GUN / POWER SUPPLY10 eV to 1000 eVHigh-Current Medium-Diameter Low-Energy Electron Beam
FOR USE IN:SURFACE PHYSICS STUDIESVACUUM PHYSICS EXPERIMENTSCHARGE NEUTRALIZATIONELECTRON DESORPTIONSURFACE SCRUBBING
PHOSPHOR TESTINGIONIZATION EXPERIMENTS
SEMICONDUCTOR PROCESSINGFEATURES / OPTIONS:BEAM CURRENT UP TO 2 MA
FEEDBACK STABILIZED EMISSION CURRENTUSER-REPLACEABLE FIRING UNITSUHV COMPATIBLE / BAKEABLECOMPUTER / REMOTE CONTROLEGA-1012 Electron Gun on 2¾ inch CFF

The Kimball Physics EGA-1012 Electron Gun, with its matching
EGPS-1012 Power Supply, is intended for use in a variety of UHV,
surface physics, and processing applications where high beam
currents are needed at low energy. It is a complete subsystem ready toattach and turn on. Beam energy, beam current and beam divergence
are all independently adjustable. The EGA-1012 Electron Gun uses a
space-charge-limited oxide-coated cathode to generate a uniform flood
beam. This design allows for generation of the beam down to lowenergies and very low currents.
UHV technology is used throughout. The electron gun is bakeable up
to 350°C with cables removed. The cathodes are not damaged byrepeated exposure to atmospheric gases or water vapor when cold.
The gun can be run in vacuums from 10-11 torr to 10-5 torr. Cathodelifetime is a function of vacuum conditions and beam current as related
to cathode temperature. Cathode lifetime at low currents in goodvacuum may be in the many hundreds of hours, or even over a
thousand hours. Firing units (containing cathode, control grid, andanode, with ceramic insulators and electrical connections—thecomplete triode structure) are user-replaceable; used firing units may
be returned to the factory for rebuild. The electron gun itself may also
be sent back to the factory for complete disassembly, cleaning, andrebuild of the firing unit assembly (including installation of a newcathode).

Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

The EGPS-1012 Power Supply Unit contains all power supplies
necessary to generate the required voltages to run an EGA-1012
Electron Gun. An external connector allows computer/remote control of
all gun power supplies, including the floating supplies, via 0 to 10 V
analog inputs at ground potential. All common computer interface bus
types can be accommodated, by use of appropriate D to A converters.
The new FlexPanel provides a digital display screen and a keypad forprogramming control on the front panel. Rear panel connectors allow
remote /computer control and metering of all gun power supplies. An
RS-232 serial port and an analog input/output connector are included
on standard power supply units. All common computer interface bus
types can be accommodated, by use of appropriate digital to analog
converters. RS-422/485 conversion is possible.
An optional LabVIEWTM computer program designed for the EGL-1012
is available for remote computer control and metering using National
Instrument DAQ boards and SCSI connectors on the EGPS-1012. The
program provides a virtual panel of controls and meters on the user’s
computer screen.
Phosphor screens (for locating / experimenting with electron beams)
are available in UHV and Ruggedized versions.

EGPS-1012 ELECTRON GUN POWER SUPPLY SPECIFICATIONS

EGA-1012 ELECTRON GUN SPECIFICATIONSBEAM ENERGYBEAM CURRENTENERGY SPREAD

10 eV to 1000 eV (Independently adjustable)
1 μA to 2 mA (Independently adjustable)
Approx. 0.4 eV cathode thermal spread, calculated
10 mm to 25 mm at 55 mm working distance

SPOT SIZE
WORKING DISTANCE 10 mm to 200 mm
BEAM DEFLECTION None
FIRING UNIT
Customer-replaceable Firing Unit Cartridge includes
precision-aligned cathode, Wehnelt (G-1) assembly andanode
CATHODE TYPES
MOUNTING

Standard: Yttria Oxide
Standard: 2¾ inch CF flange
Optional: Unmounted

FARADAY CUPINSERTION LENGTH
BEAM ALIGNMENTGUN DIAMETER

Optional: Mounted on gun, manual or pneumatic control
28 mm
Optional mechanical alignment with ± 2° Port Aligner
33.5 mm at gun end

FEEDTHROUGHSCABLES /CONNECTORS

Multipin brazed ceramic, threaded stainless steel shell
Multiconductor high voltage fully ground-shielded, withmating aluminum connector to connect gun and power
supply. Standard lengths: 3 m, Optional: 5 m

MAXIMUM BAKEOUT 350°C with cables removed(Removable Faraday cup pneumatic actuator 65°C)

OUTPUTSENERGY STABILITY

All necessary voltages to drive the EGA-1012 ElectronGun±0.01% per hour ±0.02% per 8 hours at full output

BEAM STABILITY±1.0% per hour with Emission Current Control or±10% per hour after warm up without ECC
CONTROLS
Energy, Source, Grid, Emission Current Control (ECC)
METERING
FlexPanel digital meters: Energy, Source Voltage,
Source Current, Emission Current, Grid Voltage
COMPUTER/REMOTE Power supplies: 0 to +10 V
CONTROL
Metering: 0 to +2 V
On/off switches: 0 or +5 V
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-422 or RS-485 available, if
specified at time of order)
INPUT
115 VAC switchable to 230 VAC, 50 to 60 Hz single
phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing,Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
Optional: National Instruments LabVIEWTM file, designed
to run with computer DAQ boards NI 6034E and NI 6703
DIMENSIONS
17 in. x 3.5 in. x 22 in.excluding handles (425 mm x(width x height x depth) 90 mm x 560 mm); 19 in. rack mountableSOFTWARE

Typical performance;data for guidance only.

EGA-1012 ELECTRON GUN(Dimensions in mm)

Copyright © 2008 by Kimball Physics, Inc. 11/18/08 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.