EGH-6210 / EGPS-6210
ELECTRON GUN / POWER SUPPLY
1 keV to 60 keV
Focusable, High Energy Electron Beams, Small Spot to 50 μm
FOR USE IN:
General vacuum physics
Radiation studies
Surface bombardment
Semiconductor researchBiological specimen irradiation
X-Ray generation
Plasma excitation
Flourescence studies
Surface physics studies

FEATURES / OPTIONS:Small spots, down to 50 μm
Beam currents, up to 5 mA
(High Current, up to 10 mA)
Magnetostatic focusing
Optional magnetostatic beam shaping
Magnetostatic deflection
Pulse capability
Internal alignment while operating
User-replaceable firing units
The Kimball Physics EGH-6210 Electron Gun with its matching
EGPS-6210 Power Supply is a complete subsystem ready to attach tothe user's vacuum system and turn on. It can deliver electrons over a
very broad range of energies, currents and power. The EGH-6210 has
applications in space materials testing, radiation studies,
semiconductor research, x-ray generation and plasma excitation.
The gun uses a single-crystal lanthanum hexaboride (LaB6) cathode togenerate a high energy, focusable, small spot electron beam. Bothbeam energy and beam current are independently adjustable overwide ranges, the energy from 1 keV to 60 keV, and current from 10 μA
to 5 mA. The electron beam can be pulsed by an input signal to thecontrol grid.
The adjustable optics of the gun can adapt to different divergences anda range of working distances, suitable to a variety of applications. The
magnetic focusing lens can vary the spot size from 10 mm down to50 μm. The magnetic centering and optional shaping coils provide
additional beam control, allowing the user to deflect and shape theelectron beam. Shaping typically results in an elliptical beam, bothaxes of which can be independently compressed or extended. The
magnetostatic focusing lens and the deflection / shaping quadrupole
both produce results with low aberration. In addition, the cathode toanode spacing is internally adjustable to change perveance.
The gun features an adjustable cathode feedthrough assembly thatallows the mechanical alignment of the firing unit with respect to theanode and the column. This alignment can be done in real time while
the gun is operating with beam on.

EGH-6210 Electron Gun Mounted on 2.75 inch CF.
Optional Turbo Pump and Ion Gauge not shown

Firing units are user-replaceable without removing the entire gun fromthe vacuum chamber; spare firing units can be purchased new, andused firing units may be returned to the factory for rebuild. Alternatively,
the entire electron gun can be sent back to the factory for complete
cleaning, rebuild, cathode replacement, and optional in-vacuum
testing. Various stand-alone Faraday cup designs are available.
The Power Supply System for the EGH-6210 is composed of two
separate units: the EGPS-6210 Electron Gun Power Supply and aseparate H.V. Power Supply controlled by the EGPS-6210. TheEGPS-6210 features a modular design with miniaturized power supplyclusters, optically isolated signals, and the new FlexPanel digitalinterface controller. The included power supplies are Beam Energy,
magnetic Lens, and magnetic X, Y Deflection, as well as the floating
Source/ ECC, and Grid supplies.
The FlexPanel provides a digital display screen and a keypadcontroller for programming control on the front panel. Rear panel
connectors allow remote /computer control and metering of all gun
power supplies. An RS-232 or RS-422/485 serial port and an analog
input/output connector are included on standard power supply units. Allcommon computer interface bus types can be accommodated, by useof appropriate digital to analog converters.
An optional LabVIEWTM computer program designed for theEGH-6210 is available for remote computer control and metering.
Software is available in two types: Using National Instrument DAQ
boards and SCSI connectors on the EGPS-6210, or via a simple serial
connector interface. The program provides a virtual panel of controls
and real-time metering on the user’s computer screen.

UHV technology is used throughout, and the gun can be run invacuums from 10-11 torr to 10-7 torr. The electron gun is bakeable to
200ºC with cables removed; bakeout is limited by the magnetic focus
and deflection coils.
The cathode is single-crystal lanthanum hexaboride (LaB6, small spot,high brightness, min. vacuum 1x10-7 torr). The cathode is not damaged
by repeated exposure to atmospheric gases or water vapor when cold.
The gun design provides for differential pumping of the Source region
with a 4½ inch CF flange on the source chamber for attachment for aTurbo pump and a 2¾ inch CF flange for an ionization gauge. The gun
is usually mounted on a 2¾ inch CF flange and has zero insertion
distance, i.e. does not extend into the vacuum chamber. Due to thehigh power beam produced by the EGH-6210, X-ray shielding isessential.
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

EGPS-6210 Electron Gun Power Supply with FlexPanel Controller

EGH-6210 ELECTRON GUN SPECIFICATIONSBEAM ENERGYBEAM CURRENTENERGY SPREAD

EGPS-6210 ELECTRON GUN POWER SUPPLY SPECIFICATIONS

1 keV to 60 keV (Independently adjustable)
10 μA to 5 mA (Independently adjustable)
Approx. cathode thermal spread, calculated:
LaB6 - 0.4eV

OUTPUT
ENERGY SUPPLYSTABILITYBEAM FOCUSING

Magnetostatic (Quadrupole)
Optional: Magnetostatic beam shaping
BEAM DIVERGENCE Variable. Adjustable optics to adapt to different
divergences and different working distances
SPOT SIZE
50 μm to 10 mm
WORKING DISTANCE 50 mm to 1000 mm
BEAM DEFLECTION Magnetostatic: ± 0.5° at 60 keV
Optional Dual Grid Power Supply: pulse width 2 μs to
PULSE CAPABILITY
DC, rise/ fall 500 ns, rep rates to 5 kHzwith optional LabVIEWTM program pulse generator or
user’s TTL pulser.
BEAM UNIFORMITY
Gaussian
FIRING UNIT
Customer-replaceable Firing Unit Cartridge includes
precision-aligned cathode, and Wehnelt (G-1) assembly
Entire firing unit also includes first anodeStandard: Lanthanum hexaboride (LaB6)CATHODE TYPES
Adjustable Feedthrough for mechanical alignment ofINTERNAL GUN
firing unit while gun is operating
ALIGNMENTMOUNTINGStandard: 2¾ inch CF flange
Source chamber with 4½ inch CF port for small pump
DIFFERENTIALand ionization gauge. Optional pump: Varian Turbo-V70
PUMPINGLP with controller. Optional gauge: Granville-Phillips 354
Micro-Ion Module
INSERTION LENGTH Zero mm
GUN DIMENSIONS
Gun length: 440 mm sealing surface to end of cable(outside vacuum)
connector. Gun diameter: 217 mm max at flange cluster
on source chamber (with pump and gauge), 105 mm dia
source chamber and lens support tube
FEEDTHROUGHS
Multi-pin brazed ceramic, threaded aluminum-plated shellfor main cable and stainless steel shell for others
CABLES /All high voltage fully ground-shielded cables with mating
CONNECTORS
metal to metal connectors, to connect gun and power
supply. Standard lengths: 3 m, Optional: longer available
MAXIMUM BAKEOUT

BEAM STABILITY

All necessary voltages to drive the EGH-6210 Electron
Gun (in combination with H.V. Power Supply)<0.01% per hour with 0.05% rms ripple at full output±0.1% per hour with optional Emission Current Control
or ±10% per hour after warm up without ECC

CONTROLS

FlexPanel controls: Energy, Source, Grid, Lens, X and Y
Deflection, optional Emission Current Control (ECC)
METERING
FlexPanel digital meters: Energy, Source Voltage,
Source Current, Emission Current, Grid, Lens Current,
X and Y Deflection Currents, Anode Current
COMPUTER/REMOTE Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
CONTROL & METER Metering: 0 to +2 V ( -2 V to +2 V, deflection)
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-232, RS-422 or RS-485
available, if specified at time of order)
Optional: SCSI metering and programming connectorsINPUT
115 VAC or 230 VAC, (specify on order) 50 to 60 Hz
single phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC. Relative humidity: 0 to 75% RH
non condensing
Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
Standard configuration designed for RS-232
connections.
Optional: National Instruments LabVIEWTM file,designed to run with computer DAQ boards NI PCI-6733
and PCIe-6341. SCSI interface
DIMENSIONS
Two units, total approx: 17 in. x 20.3 in. x 22 in.
(width x height x depth) excluding handles (432 mm x 516 mm x 560 mm);
19 in. rack mountable
SOFTWARE

200°C with cables removed(200°C for magnetic Lens and Deflection coils, 350°C forSource chamber region)

Typical performance;data for guidance only.

Copyright© 2015 by Kimball Physics, Inc. 08/20/15 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.