EMG-4212 / EGPS-3212
ELECTRON GUN / POWER SUPPLY

1 keV to 20 keV
Small Spot Collimated Beam, Alignment during Operation, Higher Current Option
FOR USE IN:MBE RHEED STUDIESELECTRON DIFFRACTIONSPACE PHYSICS STUDIESGAS ELECTRON FLUORESCENCE
X-RAY GENERATIONHEATING / MELTING / WELDINGVACUUM PHYSICS EXPERIMENTS

FEATURES / OPTIONS:NEW MODULAR DESIGNINTERNAL ALIGNMENT WHILE OPERATINGCOLLIMATED BEAM
SMALL SPOT OPTION DOWN TO 100 μm
HIGHER CURRENT OPTION uP TO 1 mA
ELECTROSTATIC FOCUSING & DEFLECTIONUHV COMPATIBLE / BAKEABLECOMPUTER / REMOTE CONTROLUSER-REPLACEABLE FIRING UNITSThe Kimball Physics EMG-4212 Electron Gun, with its matching
EGPS-3212 Power Supply, is a multi-purpose modular Electron Gun
with applications in many areas. The EMG-4212/ EGPS-3212 is acomplete subsystem ready to attach to a user's vacuum system andturn on. The gun has the capability of producing a collimated, small
spot or flood electron beam.
Beam current, beam divergence, and beam energy are all adjustable
over wide ranges. The energy can be varied from 1 keV to 20 keV. Thebeam current and spot size range depend on the system option asshown in the table below. With the standard cathodes, the beam
current is independently adjustable from 1 nA to 100 μA. With a small
spot option using a lanthanum hexaboride cathode, the gun can deliver
spots down to 100 μm. With a high current option, beam currents up
to 1 mA can be obtained. Beam blanking and rastering are alsoavailable as options.
The modular design of the EMG-4212 allows either the firing unit
assembly or the lens assembly to be replaced. The firing unit cartridge(including the cathode, cathode-mount, and Wehnelt aperture) is userreplaceable without removing the entire gun from the vacuum chamber.
The anode is also replaceable. The cathode to anode spacing isinternally adjustable to vary perveance.
The gun features an adjustable cathode feedthrough assembly thatallows the mechanical alignment of the firing unit with respect to theanode and the column. This alignment can be done in real time while
the gun is operating at full voltage with beam on.

EMG-4212A Electron Gun with 4½ CF mounting flange
UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr up to 10-5 torr for the standard Ta disc cathode. The
electron gun is bakable to 350°C with cables removed.
Several cathode types are available to provide different system
options: standard tantalum disc cathodes (Ta), single-crystal lanthanum
hexaboride (LaB6, small spot, high brightness, min. vacuum 1x10-7
torr), barium oxide discs (BaO, low light, low energy spread, min.
vacuum 1x10-7 torr) and yttria-coated iridium discs (Y2O3 - Ir, rugged,
vacuum up to 10-4 torr). With the exception of BaO, the cathodes are
not damaged by repeated exposure to atmospheric gases or water
vapor when cold.
Firing unit cartridges are user-replaceable, and used cartridges may bereturned to the factory for rebuild. The electron gun itself may also besent back to the factory for complete disassembly, cleaning, and rebuildof the firing unit assembly (including installation of a new cathode).
The EGPS-3212 Power Supply features a modular design withminiaturized power supply clusters, optically isolated signals, and thenew FlexPanel digital interface controller. The included power supplies
are Beam Energy, Focus, X,Y Deflection and optional Beam Blanker,
as well as the floating Source/ECC and Grid supplies. The high current
system also includes a separate High Voltage Power Supply connected
to and controlled by the EGPS-3212. A rastering option can beprovided by an additional unit within the power supply, or by
LabVIEWTM software.
The new FlexPanel provides a digital display screen and keypad forprogramming control on the front panel. Rear panel connectors allow
remote /computer control and metering of all gun power supplies. An
RS-232 serial port and an analog input/output connector are included
on standard power supply units. All common computer interface bus
types can be accommodated, by use of appropriate digital to analog
converters. RS-422/485 conversion is possible.

EGPS-3212 Power Supply with FlexPanel controller
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

An optional LabVIEWTM computer program designed for theEMG-4212 is available for remote computer control and metering using
National Instrument DAQ boards and SCSI connectors on theEGPS-3212. The program provides a virtual panel of controls andmeters on the user’s computer screen. Software pulsing and rastering
options are available.

20EMG-4212 ELECTRON GUN SPECIFICATIONS

EGPS-3212 ELECTRON GUN POWER SUPPLY SPECIFICATIONSBEAM ENERGYOUTPUTSBEAM CURRENTENERGY SPREAD
BEAM DIVERGENCE
SPOT SIZE
WORKING DISTANCE
BEAM DEFLECTIONPULSE CAPABILITY(using appropriate
pulse generator,
not included)

BEAM UNIFORMITYFIRING UNITCATHODE TYPESINTERNAL GUN
ALIGNMENTMOUNTING
INSERTION LENGTHGUN DIMENSIONSFEEDTHROUGHSCABLES /CONNECTORSMAXIMUM BAKEOUT

1 keV to 20 keV (Independently adjustable)
Standard: 10 nA to 100 μA (Independently adjustable)
Small Spot option: 1 nA to 10 μA
High Current option: 1 μA to 1 mAApprox. 0.4 eV cathode thermal spread, calculated
Collimated beamStandard: 500 μm to 25 mm
Small Spot option: 100 μm to 10 mm
High Current option: 1.5 mm to 25 mm
Typical: 150 mm. Range: 100 mm to 1000 mm
4 Pole Electrostatic: ± 3° at 20 keV; scales larger atlower energies
Optional Dual Grid Power Supply: pulse width 2 μs toDC, rise/ fall 500 ns, rep rates to 5 kHz (TTL required)
Note: with High Current option, Grid may not cut off
beam at higher energies
Optional Blanker with TTL input: Pulse width 1 μs to DC,
rep rate to 5 kHz
Optional Blanker and Capacitive Pulse Junction Box:pulse width 20 ns to 100 μs, to DC, rise/ fall 10 ns, 50 Ω
impedance, 1 W
Gaussian
Customer-replaceable Firing Unit Cartridge includes
precision-aligned cathode and Wehnelt (G-1) assemblyStandard: Tantalum discOptional: Lanthanum hexaboride (LaB6),Barium oxide (BaO) or Yttrium oxide (Y2O3) Cathodes
not harmed by repeated exposure to atmospheric gases
while cold
Adjustable Feedthrough for mechanical alignment offiring unit while gun is operating
Flange Multiplexer with a 4½ inch CFF, including both
tapped and clear mounting holes
Standard: 51 mm
Gun length in vacuum: 51 mm sealing surface to end,
51 mm dia. Outside vacuum: 258 mm sealing surface toend of cable (313 mm with blanker)
Multipin brazed ceramic, threaded stainless steel shell
Multiconductor 20 kV high voltage fully ground-shieldedcable, 20 kV focus cable, and low voltage deflection
cable, with mating aluminum connectors, to connect gunand power supply. Standard lengths: 3 m, Optional: 5 m
350°C with cables removed

ENERGY SUPPLYSTABILITYBEAM STABILITYCONTROLSMETERINGCOMPUTER/REMOTE
CONTROL & METERAll necessary voltages to drive the EMG-4212 Electron
Gun (in combination with H.V. Power Supply)<0.01% per hour with 0.05% rms ripple at full output±0.1% per hour with Emission Current Control or±10% per hour after warm up without ECC
FlexPanel controls: Energy, Source, Grid, Focus,
X and Y Deflection, Emission Current Control,
Optional Blanker
FlexPanel digital meters: Energy, Source Voltage,Source Current, Emission Current, Grid, Focus,
X and Y Deflection,
Optional Blanker, Optional Beam Dump Current
Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
Metering: 0 to +2 V ( -2 V to +2 V, deflection)
On/off switches: 0 or +5 V
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-422 or RS-485 available, if
specified at time of order)
Optional: SCSI metering and programming connectors

Optional: National Instruments LabVIEWTM file,designed to run with computer DAQ boards NI 6034Eand NI 6703 (NI 6036E and NI 6713 with raster)
Optional Computer generated pulsing, rastering
COMPUTER SYSTEM Optional: Industrial computer system including dataacquisition and control hardware DAQ.
INPUT
115 VAC switchable to 230 VAC, 50 to 60 Hz single
phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing
Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
DIMENSIONS
Two units, total approx: 17 in. x 12.2 in. x 22 in.
(width x height x depth) excluding handles (425 mm x 310 mm x 560 mm);
19 in. rack mountable
SOFTWARE

EMG-4212 ELECTRON GUN(Dimensions in mm)
A typical lab set-up of a complete Kimball Physics system withpower supplies, electron gun, and optional computer controlsystem

Typical performance;data for guidance only.
Copyright © 2006 by Kimball Physics, Inc. 06/22/06 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.