2022
TECHNICALPROGRAMThe 17th IEEE International Conference on
Nano/Micro Engineered & Molecular Systems

VIRTUAL IEEE-NEMS

https://ieee-nems.org/2022/

April 14-17, 2022

VIRTUAL IEEE-NEMS 2022
TECHNICAL PROGRAMAPRIL 2022_____________________All rights reserved.
Copyright ©2022
by the 17th IEEE International Conference on
Nano/Micro Engineered & Molecular System (IEEE-NEMS 2022).
Copyright and Reprint Permission
Abstracting is permitted with credit to the source.

1

IEEE-NEMS 2022

VIRTUAL IEEE-NEMS 2022
APRIL 2022_____________________IEEE Event Conduct & Safety Statement
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2

IEEE-NEMS 2022

VIRTUAL IEEE-NEMS
2022
The 17th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
April 14-17, 2022

4

Welcome5-6

Conference Organizers & Committees

7

Plenary & Keynote Hightlights

8-10

Program Schedule

11-13

Sponsors

14-16

Technical Program Index

17-30

Plenary & Keynote Sessions

31-42

Invited Sessions

43-47

Regular Sessions

3

IEEE-NEMS 2022

On behalf of
the IEEE Nanotechnology Council& the conference organizing
committee

WELCOME

Welcome all of you to the 17th IEEE International
Conference on Nano/Micro Engineered & Molecular
Systems (IEEE-NEMS 2022) as held on-line from
April 14-17, 2022. The IEEE-NEMS is a premierconference series sponsored by the IEEE
Nanotechnology Council focusing on the promotionof advanced research areas related to MEMS,
nanotechnology, and molecular technology. Prior
conferences were held in Xiamen (China, 2021), San
Diego (USA, 2020), Thailand (2019), Singapore(2018), Los Angeles (USA, 2017), Matsushima Bay
and Sendai (Japan, 2016), Xi’an (China, 2015),
Hawaii (USA, 2014), Suzhou (China, 2013), Kyoto(Japan, 2012), Kaohsiung (Taiwan, 2011), Xiamen(China, 2010), Shenzhen (China, 2009), Hainan
Island (China, 2008), Bangkok (Thailand, 2007),and Zhuhai (China, 2006). The IEEE-NEMS
Conference typically attracts over 600 attendees
with participants from more than 20 countries andregions worldwide. Due to Covid-19 pandemic, theIEEE-NEMS conference operates virtually this year.
The conference has managed to invite leading
scientists to give 5 plenary talks, 9 keynote talks, 24
invited session presentations, and 12 regular session
presentations covering topics from reviews to future
perspectivesofNEMS
fundamentals
andapplications.
Before we kick-off IEEE-NEMS 2022, we want toexpress our appreciation to every attendee who
contributes your works. Without your brilliant ideas
and elegant works, the conference cannot be
successful. We also want to thank our conference
organizers, technical program committee members,
our sponsors, and the great organization committee
members. We hope all of you enjoy this virtual
conference.
Welcome to IEEE-NEMS 2022!

Eric Pei-Yu Chiou, General Chair
University of California at Los Angeles

Thomas Kin Fong Lei, Program Chair
Chang Gung University

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IEEE-NEMS 2022

CONFERENCE ORGANIZERS & COMMITTEESINTERNATIONAL ADVISOR COMMITTEE
Chih-Ming Ho, University of California, Los Angeles
Masayoshi Esashi, Tohoku University
Meyya Meyyappan, NASA AMES
Nicolas F. de Rooij, University of Neuchatel
Toshio Fukuda, Peijing Institute of Technology / Meijo University

STEERING COMMITTEE
Gwo-Bin Vincent Lee, National Tsing Hua University (Chair)
Alice H.X. Zhang, Peking University
Daoheng Sun, Xiamen University
Ning Xi, University of Hong Kong
Osamu Tabata, Kyoto University of Advanced Science
Wen J. Li, City University of Hong Kong
William C. Tang, University of California, Irvine
Shuji Tanaka, Tohoku University
Yu-Chong Tai, California Institute of Technology

GENERAL CHAIR
Eric Pei-Yu Chiou, University of California, Los Angeles
GENERAL CO-CHAIR
Pin-Chuan Chen, National Taiwan University of Science and Technology
PROGRAM CHAIR
Thomas Kin Fong Lei, Chang Gung University
ORGANIZING CHAIR
Cheng-Hsin Chuang, National Sun Yat-sen University

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IEEE-NEMS 2022

CONFERENCE ORGANIZERS & COMMITTEESAWARD COMMITTEE
Aaron Ohta, University of Hawaii
Pak Kin Wong, Pennsylvania State University
INVITED SESSION CHAIRS
Guangyi Shi, Peking University
Sung Yong Park, San Diego State University
Akio Higo, Tokyo University
FINANCIAL CHAIR
Chi-Shuo Chan, National Tsing Hua University
PUBLICATION CHAIR
Zhidong Wang, Chiba Institute of Technology
TECHNICAL PROGRAM COMMITTEE
Ting-Hsuan Chen, City Univ. of Hong Kong

John Yeow, Univ. of Waterloo

Cheng-Hsin Chuang, National Sun Yat-sen Univ.

Kuo-Yung Hung, Mingchi Univ. of Tech.

Raymond H. W. Lam, City Univ. of Hong Kong

Jungmok Seo, Yonsei Univ.

Pak Kin Wong, Pennsylvania State Univ.

Niraj Sinha, Indian Institute of Tech. Kanpur

Pin-Chuan Chen, Natl. Taiwan Univ. Sci. & Tech.

Zhidong Wang, Chiba Institute of Tech.

Yoshikazu Hirai, Kyoto Univ.

Tak Sing Wong, Pennsylvania State Univ.

Chih-Ting Lin, Natl. Taiwan Univ.

Che-Hsin Lin, National Sun Yat-sen Univ.

Wibool Piyawattanametha, KMITL

Zong-Hong Lin, Natl. Tsing Hua Univ.

Zhuoqing Yang, Shanghai Jiao Tong Univ.

Yen-Heng Lin, Chang Gung Univ.

Yi Zhang, Univ. of Electronic Sci. & Tech.

Aaron Ohta, Univ. of Hawaii

Yu-Jui Fan, Taipei Medical Univ.

Jeffrey Yao, Natl. Tsing Hua Univ.

King Lai, City Univ. of Hong Kong

Xinge Yu, City Univ. of Hong Kong

Gwo-Bin Lee, Natl. Tsing Hua Univ.

Yunlong Zi, The Chinese Univ. of Hong Kong

Yubing Sun, Univ. of Massachusetts

Shuo Gao, Beihang Univ.

Steve Tung, Univ. of Arkansas

Huicong Liu, Soochow Univ.

6

IEEE-NEMS 2022

PLENARY & KEYNOTE HIGHLIGHTSPlenary Speakers

Burn J. Lin
National Tsing Hua
University

Robert S. Langer
Massachusetts
Institute ofTechnology

Yi CuiStanford University

Ming C. Wu
University ofCalifornia, Berkeley

Dino Di Carlo
University ofCalifornia, Los
Angeles

Hiroshi Toshiyoshi
The University ofTokyo

Katsuo Kurabayashi
University ofMichigan, Ann Arbor

Jeff WangJohn Hopkins
University

Michael Teitell
University ofCalifornia, Los
Angeles

Vincent C. Lee
National University ofSingapore

Dean Ho
National University ofSingaporeJohn X.J. Zhang
Dartmouth
Engineering

Rahul Shendure
Carbon Built

Akihiro Kusumi
Okinawa Institute of
Science andTechnology Graduate
University

Keynote Speakers

7IEEE-NEMS 2022

VIRTUAL IEEE-NEMS 2022
IEEE-NEMS Sessions are all in UTC+8:00 (Morning in Asia and Evening in America)
Microsoft TEAMS Meeting links: Please download and install Microsoft TEAMS before joining the conference. https://www.microsoft.com/en/microsoft-teams/
RM 001

RM 002

RM 003

RM 004

RM 005

RM 006

RM 007https://reurl.cc/mGmYLM

https://reurl.cc/Kpa9Ag

https://reurl.cc/zMd5W6

https://reurl.cc/g0qYzX

https://reurl.cc/bkOmnM

https://reurl.cc/Np7xpp

https://reurl.cc/RjZkj9

April 14 [Thursday] (UTC+8)
Time (UTC+8)
08:55-09:00
09:00-09:45
09:45-10:30
10:30-10:40

10:40-11:10

RM 001
Opening Ceremony
EDOM Plenary Lecture 1: Akihiro Kusumi, Okinawa Institute of Science and Technology Graduate University
Metastable Nano-liquid Signaling Platforms on the Cell Membrane as Revealed by Single Molecular Imaging
EDOM Plenary Lecture 2: Burn J. Lin, National Tsing Hua University
Lithography Advances to Shrink IC by a Million Times
Break (10 min)
RM 001
RM 002
Keynote Lecture 1
Keynote Lecture 2
Dino Di Carlo, University of California, Los Angeles
Lab on a Particle Technology to Scale Biological Research
1000-fold

Hiroshi Toshiyoshi, The University of Tokyo
Silicon Oxide Electret as a Power Generation
Material

Chair: Eric Chiou

Chair: Wibool Piyawattanametha

RM 001
11:10-12:40

RM 002

RM 003Invited Session T1.1

Invited Session T1.2

Invited Session T1.3

Novel Micro/Nano
Systems for Bio andEnergy Applications
Chair: Sung-Yong Park

Advanced Nanofluidic
Systems for Single
Molecule Detection
Chair: Wei-Lun Hsu

Invited Session T2.1

Regular Session T2.2

Smart Mechatronics forEnergy Harvesting

Micro/Nano Fluidics
Paper ID: 103, 110, 118,
119, 133, 134

Chair: Daisuke Yamane

Chair: Yu-Jui (Ray) Fan

Functional Materials
and NEMS/MEMS
Chair: Akio Higo

12:40-12:50

12:50-14:20

RM 004Chair: Tim Yeh
Chair: Thomas Lei
RM 003
Keynote Lecture 3

Katsuo Kurabayashi, University of Michigan, Ann
Arbor
Plasmo-Opto-Electro-Fluidic Biosensors for Critical
Care Medicine
Chair: Aaron Ohta

RM 005

RM 006

Invited Session T1.4

Invited Session T1.5

Invited Session T1.6

Invited Session T1.7

Advanced Fabrication
Technologies for
Nano/Micro Systems
Chair: Yoshikazu Hirai

Emerging Micro- andNano-scale Sensing andManipulation Techniques
Chair: Tim Yeh

MEMS/NEMS Based
Microfluidic andMedical Devices
Chair: Sang-Seok Lee

Wearable / Stretchable
Sensors and LiquidMetal Systems
Chair: Aaron Ohta

Regular Session T2.4
Molecular Sensors,
Actuators, & Systems I
Paper ID: 115, 120, 121,
122, 135, 136

Regular Session T2.5
Nanobiology /Nanomedicine
Paper ID: 107, 108, 165,
166, 171, 174

Regular Session T2.6
Nanomaterial Based
Devices and Systems I
Paper ID: 109, 126, 131,
141

Chair: Pin-Chuan Chen

Chair: Chi-Shuo Chen

Chair: Hsieh-Fu Tsai

Break (10 min)Regular Session T2.3
Micro/Nano ElectroMechanical Systems I
Paper ID: 114, 127,
128, 130, 138, 145
Chair: Cheng-Hsin
Chuang

RM 007

VIRTUAL IEEE-NEMS 2022
IEEE-NEMS Sessions are all in UTC+8:00 (Morning in Asia and Evening in America)
Microsoft TEAMS Meeting links: Please download and install Microsoft TEAMS before joining the conference. https://www.microsoft.com/en/microsoft-teams/
RM 001

RM 002

RM 003

RM 004

RM 005

RM 006

RM 007https://reurl.cc/mGmYLM

https://reurl.cc/Kpa9Ag

https://reurl.cc/zMd5W6

https://reurl.cc/g0qYzX

https://reurl.cc/bkOmnM

https://reurl.cc/Np7xpp

https://reurl.cc/RjZkj9

April 15 [Friday] (UTC+8)
RM 001
Hygeia Touch Plenary Lecture 3: Robert S. Langer, Massachusetts Institute of Technology
Microtechnologies and Nanotechnologies in Drug Delivery
EDOM Plenary Lecture 4: Yi Cui, Stanford University
Reinventing Batteries through Nanoscience
Break (10 min)
RM 001
RM 002
Keynote Lecture 4
Keynote Lecture 5

Time (UTC+8)
09:00-09:45
09:45-10:30
10:30-10:40

10:40-11:10

11:10-12:40

Jeff Wang, John Hopkins University
Droplet Microfluidics Enables Rapid Diagnostics andAntimicrobial Susceptibility Testing
Chair: Cecil Chen

Michael Teitell, University of California, Los Angeles
Mitochondrial Transfer and Cell Fate Transitions

Chair: Keng-Hui Lin
RM 003
Keynote Lecture 6
Chengkuo Lee, National University of Singapore
Artificial Intelligence Enabled Sensing Technologies
and Applications in Metaverse
Chair: Tak Sing Wong

RM 001

RM 002

RM 003

RM 004

RM 005

RM 006

RM 007

Regular Session F1.1

Invited Session F1.2

Invited Session F1.3

Invited Session F1.4

Invited Session F1.5

Invited Session F1.6

Invited Session F1.7

Nano-constructs for
Biosensing and CellularEngineering

Microneedles

The Impact of Interdisciplinary Science

Advanced Nanotool for
NEMS

Applications andExperimental Techniques
for Economical
Microfluidic Devices

Advanced
Bioelectronics andBiointerfaces

Chair: Aram Chung

Chair: Zhihong Li

Chair: Tzu-En Lin

Chair: Koji Sugano

Chair: Wei-Hsin Tien

Chair: Huiliang Wang

Regular Session F2.1

Invited Session F2.2

Invited Session F2.3

Invited Session F2.4

Regular Session F2.5

Best Conference
Paper Competition
Paper ID: 104, 132,
139, 140
Chairs: Pak Kin Wong,
Aaron Ohta

Microfluidic Platforms
for Cell Manipulation
and Biomarker
Detection

Wearable andImplantable
NanoEnergy and
NanoSystem (NENS)

Translational Advances in
Micro-, Nano- and Digital
Medicine

Micro/Nano ElectroMechanical Systems II
Paper ID: 147, 149, 150, 151,
154, 159

Chair: Ting-Hsuan Chen

Chair: Chengkuo Lee

Chair: Edward Kai-Hua
Chow, Agata Blasiak

Chair: Cheng-Hsin Chuang

CM Ho Best Paper
Competition
Paper ID: 124, 125,
158, 160
Chairs: Pak Kin Wong,
Aaron Ohta

12:40-12:50

12:50-14:20

Chair: Dean HoChair: Chao-Min Cheng

Break (10 min)

VIRTUAL IEEE-NEMS 2022
IEEE-NEMS Sessions are all in UTC+8:00 (Morning in Asia and Evening in America)
Microsoft TEAMS Meeting links: Please download and install Microsoft TEAMS before joining the conference. https://www.microsoft.com/en/microsoft-teams/
RM 001

RM 002

RM 003

RM 004

RM 005

RM 006

RM 007https://reurl.cc/mGmYLM

https://reurl.cc/Kpa9Ag

https://reurl.cc/zMd5W6

https://reurl.cc/g0qYzX

https://reurl.cc/bkOmnM

https://reurl.cc/Np7xpp

https://reurl.cc/RjZkj9

April 16 [Saturday] (UTC+8)
RM 001EDOM Plenary Lecture 5: Ming C. Wu, University of California, Berkeley
Optoelectronic Tweezers – A New Optofluidic Platform for Single Cell Biology

Time (UTC+8)
09:0000-09:45
09:45

09:45
09:4545-10:
10:15

RM 001

RM 002

RM 003

Keynote Lecture 7

Keynote Lecture 8

Keynote Lecture 9

Dean Ho, National University of Singapore
Big Data versus Small Data: Optimizing N-of-1
Interventional Healthcare

John X.J. Zhang, Dartmouth Engineering
Nanotechnology in Bioenergy Harvesting and Sensing
for Medical Implants

Rahul Shendure, Carbon Built
CarbonBuilt – Taking Low Carbon Concrete from
University Bench to Commercial Production

Chair: Edward Chow

Chair: Mark Cheng

Chair: Eric Chiou

Break (15 min)10:
10:15-10:3
10:30

10:3
10:30-12:00

RM 001

RM 002

RM 003

RM 004

RM 005

RM 006

Invited Session S1.1

Invited Session S1.2

Invited Session S1.3

Invited Session S1.4

Invited Session S1.5

Invited Session S1.6

RM 007
Invited Session S1.7

NEMS Emerging
Applications

Micro-/nano-StructureEnabled Sensors

Advanced Micro/Nano
Photonics Technology

Biomaterials andBiosensors in
Biomedical
Application

Micro/Nano Biosensing
Technologies: From
Diseases Diagnostics to
Health Monitoring

NEMS for Human
SensingEngineering-Based Microphysiological System(MPS): From
Fundamentals to
Commercial Applications

Chair: Mark Cheng

Chair: Faheng Zang

Chair: Guo-En Chang

Chair: Yu-Jui (Ray) Fan

Chair: Tak-Sing Wong

Chair: Hiroyuki Kudo

Chair: Ryuji Yokokawa

Break (10 min)

12:00-12:10

12:10-13:4
13:40

Chair: Eric Chiou

Regular Session S2.1
Best Student Paper
Competition
Paper ID: 113, 123, 137,
148, 173
Chairs: Pak Kin Wong,
Aaron Ohta

Invited Session S2.2
Microstructure
Engineering andApplications
Chair: Chia-Wen Tsao

Regular Session S2.3
Molecular Sensors,
Actuators, & Systems II
Paper ID: 143, 152,
156, 167, 170

Regular Session S2.4
Micro/Nano Fluidics
and Fabrication
Paper ID: 142, 153, 169,
161, 162, 164

Chair: Sanket Goel

Chair: Yu-Jui (Ray) Fan

Regular Session S2.5
Nanomaterial Based
Devices and Systems II
Paper ID: 146, 163, 168
Chair: Chi-Shuo Chen

IEEE-NEMS 2022
SPONSORS
Institute of Electrical & Electronics Engineering (IEEE)
IEEE Nanotechnology Council (NTC)
Ministry of Science and Technology, Taiwan
Ministry of Education, Taiwan
University of California, Los Angeles
Chang Gung University
National Taiwan University of Science and Technology
EDOM Technology Co., Ltd.
Hygeia Touch Inc.

11

IEEE-NEMS 2022

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Founded in July 1996 and headquartered in
Taipei, EDOM Technology is Asia’s best
distribution and solutions provider. EDOMPRODUCT CATEGORY

provides best-in-class distribution andPortable & Wearable Devices

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Internet of Things (IoT)
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Semiconductor
Distributor

StrongTechnical
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ProviderIndustrial Control
Computers

With deep technical experience in
opto-electronics, digital, analog andmixed-signal applications, and excellent
logistics and operation, EDOM bridges thegap between vendors, customers andpartners to provide a full range of services
and solutions.

Hygeia Touchprovide you a healthy and happy way of life
Interleukin 6 (IL-6) Rapid Test System (RUO)

Positive

Serum

Negative
Spectrometer(Spectrochip Inc.)

IL-6 Test Strip

The system consists of IL-6 test strip and a miniature spectrometer. The purpose is to assist
clinicians to detect the IL-6 concentration in serum or plasma of patients with infectious
symptoms, and to assist doctors to give patients the most appropriate care in a short period oftime. This system can be used for qualitative evaluation with rapid test strip or quantitativeevaluation with spectrometer. Currently, it is only for laboratory/research use. The system
has also been tested for serum IL-6 analysis of patients with confirmed COVID-19.

Sperm Motility Rapid Test System (RUO)

LOW

Sperm

Motility Test Paper

NORMALSpectrometer(Spectrochip Inc.)

Quantitative
Concentration

The system consists of motility test paper and a miniature spectrometer. The purpose is toprovide users to monitoring the semen quality (i.e., for follow-up treatment, ligation, pregnancy) through measuring the number of swimming (motile) sperm cells per ml in the semen
sample (human/animal). The system can be used for qualitative evaluation with test paper orquantitative evaluation with spectrometer.

HygeiaTouch Self Sampling Kit for Women

HygeiaTouch Self Sampling Kit for Women is clinical verified (selfcollected vs physician collected) for the sampling of vaginal cell material without the aid of a vaginal speculum. The collected specimen issuitable for microbial studies, including human papillomavirus(HPV) testing, and other genomic studies such as common vaginal
pathogens through polymerase chain reaction (PCR) in a professional
laboratory.
Hygeia Touch Inc.
www.hygeiatouch.com

Email: elainelien@hygeiatouch.com

TECHNICAL PROGRAM INDEXPlenary Sessions
Metastable Nano-liquid Signaling Platforms on the Cell Membrane as Revealed by
PL1Single Molecular Imaging
PL Speaker: Akihiro Kusumi, Okinawa Institute of Science and Technology Graduate University
Chair: Tim Yeh | Time: 09:00-09:45 (TWN), April 14, 2022 (RM 001)

PL2

Lithography Advances to Shrink IC by a Million Times
PL Speaker: Burn J. Lin, National Tsing Hua University
Chair: Thomas Lei | Time: 09:45-10:30 (TWN), April 14, 2022 (RM 001)

PL3

Microtechnologies and Nanotechnologies in Drug Delivery
PL Speaker: Robert S. Langer, Massachusetts Institute of Technology
Chair: Chao-Min Cheng | Time: 09:00-09:45 (TWN), April 15, 2022 (RM 001)

PL4

Reinventing Batteries through Nanoscience
PL Speaker: Yi Cui, Stanford University
Chair: Keng-Hui Lin | Time: 09:45-10:30 (TWN), April 15, 2022 (RM 001)

PL5

Optoelectronic Tweezers – A New Optofluidic Platform for Single Cell Biology
PL Speaker: Ming C. Wu, University of California, Berkeley
Chair: Eric Chiou | Time: 09:00-09:45 (TWN), April 16, 2022 (RM 001)

Keynote Sessions
Lab on a Particle Technology to Scale Biological Research 1000-fold
KN1
KN Speaker: Dino Di Carlo, University of California, Los Angeles
Chair: Eric Chiou | Time: 10:40-11:10 (TWN), April 14, 2022 (RM 001)

KN2

Silicon Oxide Electret as a Power Generation Material
KN Speaker: Hiroshi Toshiyoshi, The University of Tokyo
Chair: Wibool Piyawattanametha | Time: 10:40-11:10 (TWN), April 14, 2022 (RM 002)

KN3

Plasma-Opto-Electro-Fluidic Biosensors for Critical Care Medicine
KN Speaker: Katsuo Kurabayashi, University of Michigan, Ann Arbor
Chair: Aaron Ohta | Time: 10:40-11:10 (TWN), April 14, 2022 (RM 003)

KN4

Droplet Microfluidics Enables Rapid Diagnostics and Antimicrobial Susceptibility
Testing
KN Speaker: Jeff Wang, John Hopkins University
Chair: Cecil Chen | Time: 10:40-11:10 (TWN), April 15, 2022 (RM 001)

KN5

Mitochondrial Transfer and Cell Fate Transitions
KN Speaker: Michael Teitell, University of California, Los Angeles
Chair: Dean Ho | Time: 10:40-11:10 (TWN), April 15, 2022 (RM 002)

KN6

Artificial Intelligence Enabled Sensing Technologies and Applications in Metaverse
KN Speaker: Vincent C. Lee, National University of Singapore
Chair: Tak Sing Wong | Time: 10:40-11:10 (TWN), April 15, 2022 (RM 003)

KN7

Big Data versus Small Data: Optimizing N-of-1 Interventional Healthcare
KN Speaker: Dean Ho, National University of Singapore
Chair: Edward Chow | Time: 09:45-10:30 (TWN), April 16, 2022 (RM 001)

KN8

Nanotechnology in Bioenergy Harvesting and Sensing for Medical Implants
KN Speaker: John X.J. Zhang, Dartmouth Engineering
Chair: Mark Cheng | Time: 09:45-10:30 (TWN), April 16, 2022 (RM 002)

KN9

CarbonBuilt – Taking Low Carbon Concrete from University Bench to Commercial
Production
KN Speaker: Rahul Shendure, Carbon Built
Chair: Eric Chiou | Time: 09:45-10:30 (TWN), April 16, 2022 (RM 003)

14

IEEE-NEMS 2022

Invited Sessions
IS T1.1

Novel Micro/Nano Systems for Bio
and Energy Applications

IS T1.2

Chair: Sung-Yong Park
Time: 11:10-12:40 (TWN), April 14, 2022 (RM001)

IS T1.3

Functional Materials andNEMS/MEMS

Chair: Wei-Lun Hsu
Time: 11:10-12:40 (TWN), April 14, 2022 (RM 002)

IS T1.4

Chair: Akio Higo
Time: 11:10-12:40 (TWN), April 14, 2022 (RM003)

IS T1.5

Emerging Micro- and Nano-scaleSensing and Manipulation
Techniques

IS T1.6

Wearable / Stretchable Sensors andLiquid-Metal Systems

Nano-constructs for Biosensing andCellular Engineering

IS T2.1

The Impact of Inter-disciplinary
Science

IS F1.3

IS F1.5

Applications and Experimental
Techniques for Economical
Microfluidic Devices

IS F1.7

Microfluidic Platforms for Cell
Manipulation and Biomarker
Detection

Advanced Bioelectronics andBiointerfaces
Chair: Huiliang Wang
Time: 11:10-12:40 (TWN), April 15, 2022 (RM 007)IS F2.3

Wearable and Implantable NanoEnergy
and NanoSystem (NENS)
Chair: Chengkuo Lee
Time: 12:50-14:20 (TWN), April 15, 2022 (RM 003)

Chair: Ting-Hsuan Chen
Time: 12:50-14:20 (TWN), April 15, 2022 (RM002)

IS F2.4

Advanced Nanotool for NEMS
Chair: Koji Sugano
Time: 11:10-12:40 (TWN), April 15, 2022 (RM 005)

Chair: Wei-Hsin Tien
Time: 11:10-12:40 (TWN), April 15, 2022 (RM006)

IS F2.2

Microneedles
Chair: Zhihong Li
Time: 11:10-12:40 (TWN), April 15, 2022 (RM 003)

Chair: Tzu-En Lin
Time: 11:10-12:40 (TWN), April 15, 2022 (RM004)

IS F1.6

Smart Mechatronics for Energy
Harvesting
Chair: Daisuke Yamane
Time: 12:50-14:20 (TWN), April 14, 2022 (RM 001)

Chair: Aram Chung
Time: 11:10-12:40 (TWN), April 15, 2022 (RM002)

IS F1.4

MEMS/NEMS Based Microfluidic andMedical Devices
Chair: Sang-Seok Lee
Time: 11:10-12:40 (TWN), April 14, 2022 (RM 006)

Chair: Aaron Ohta
Time: 11:10-12:40 (TWN), April 14, 2022 (RM
007)

IS F1.2

Advanced Fabrication Technologies for
Nano/Micro Systems
Chair: Yoshikazu Hirai
Time: 11:10-12:40 (TWN), April 14, 2022 (RM 004)

Chair: Tim Yeh
Time: 11:10-12:40 (TWN), April 14, 2022 (RM005)

IS T1.7

Advanced Nanofluidic Systems for Single
Molecule Detection

Translational Advances in Micro-,Nano- and Digital Medicine
Chairs: Edward Kai-Hua Chow and Agata
Blassiak
Time: 12:50-14:20 (TWN), April 15, 2022 (RM004)

IS S1.1

NEMS Emerging ApplicationsIS S1.2

Chair: Mark Cheng
Time: 10:30-12:00 (TWN), April 16, 2022 (RM
001)

IS S1.3

Advanced Micro/Nano Photonics
Technology

IS S1.4

Chair: Guo-En Chang
Time: 10:30-12:00 (TWN), April 16, 2022 (RM
003)

15

Micro-/nano-Structure-Enabled Sensors
Chair: Faheng Zang
Time: 10:30-12:00 (TWN), April 16, 2022 (RM 002)

IEEE-NEMS 2022

Biomaterials and Biosensors in
Biomedical Application
Chair: Yu-Jui (Ray) Fan
Time: 10:30-12:00 (TWN), April 16, 2022 (RM 004)

IS S1.5

Micro/Nano Biosensing
Technologies: From Diseases
Diagnostics to Health Monitoring

IS S1.6

NEMS for Human Sensing
Chair: Hiroyuki Kudo
Time: 10:30-12:00 (TWN), April 16, 2022 (RM 006)

Chair: Tak-Sing Wong
Time: 10:30-12:00 (TWN), April 16, 2022 (RM005)

IS S1.7

Engineering-Based Microphysiological System (MPS): From
Fundamentals to Commercial
ApplicationsIS S2.2

Microstructure Engineering andApplications
Chair: Chia-Wen Tsao
Time: 12:10-13:40 (TWN), April 16, 2022 (RM 002)

Chair: Ryuji Yokokawa
Time: 10:30-12:00 (TWN), April 16, 2022 (RM
007)

Regular Sessions
RS T2.2

Micro/Nano Fluidics

RS T2.3

Chair: Yu-Jui (Ray) Fan
Time: 12:50-14:20 (TWN), April 14, 2022
(RM 002)

RS T2.4

Molecular Sensors, Actuators, &Systems I

RS T2.5

Nanomaterial Based Devices andSystems I

RS F1.1

Best Conference Paper
Competition

RS F2.5

Chair: Pak Kin Wong and Aaron Ohta
Time: 12:50-14:20 (TWN), April 15, 2022
(RM 001)

RS S2.1

Best Student Paper Competition

Micro/Nano Fluidics andFabrication

RS S2.3

Molecular Sensors, Actuators, & Systems
II
Chair: Sanket Goel
Time: 12:10-13:40 (TWN), April 16, 2022 (RM 003)

RS S2.5

Chair: Yu-Jui (Ray) Fan
Time: 12:10-13:40 (TWN), April 16, 2022
(RM 004)16

Micro/Nano Electro-Mechanical Systems
II
Chair: Cheng-Hsin Chuang
Time: 12:50-14:20 (TWN), April 15, 2022 (RM 004)

Chair: Pak Kin Wong and Aaron Ohta
Time: 12:10-13:40 (TWN), April 16, 2022
(RM 001)

RS S2.4

CM Ho Best Paper Competition
Chairs: Pak Kin Wong and Aaron Ohta
Time: 11:10-12:40 (TWN), April 15, 2022 (RM 001)

Chair: Hsieh-Fu Tsai
Time: 12:50-14:20 (TWN), April 14, 2022
(RM 006)

RS F2.1

Nanobiology / Nanomedicine
Chair: Chi-Shuo Chen
Time: 12:50-14:20 (TWN), April 14, 2022 (RM 005)

Chair: Pin-Chuan Chen
Time: 12:50-14:20 (TWN), April 14, 2022
(RM 004)

RS T2.6

Micro/Nano Electro-Mechanical Systems I
Chair: Cheng-Hsin Chuang
Time: 12:50-14:20 (TWN), April 14, 2022 (RM 003)

Nanomaterial Based Devices andSystems II
Chair: Chi-Shuo Chen
Time: 12:10-13:40 (TWN), April 16, 2022 (RM 005)

IEEE-NEMS 2022

IEEE-NEMS PLENARY
Metastable Nano-liquid Signaling Platforms on the
Cell Membrane as Revealed by Single Molecular
Imaging

Akihiro Kusumi

EDOM PL1: 09:00 – 09:45
Friday, April 14, 2022
Location: RM 001

Okinawa Institute of Science and Technology
Graduate University

Abstract
Signaling is one of the most important functions of the cellular plasma membrane (PM). A variety of
extracellular signaling molecules bind to their specific receptors in the PM, and the engaged receptors in turntrigger various cytoplasmic signaling cascades. These signaling pathways are intertwined and affect each other,in a process called crosstalk, which enables the cells to fine tune the overall signal. The crosstalk of different
receptor signaling pathways has been examined quite extensively, but the platform responsible for signal
integration has never been discovered. Here, using single-molecule imaging, we found a nanometer-scale (5080 nm) liquid-like protein assembly on the PM cytoplasmic surface (at a density of ~2-µm apart from eachother on average, with a lifetime of ~10 s), working as the signal transduction and integration platform forreceptors, including GPI-anchored receptors (GPI-ARs), receptor-type tyrosine kinases (RTKs), and GPCRs.
The platform consists of integrin, talin, RIAM, VASP, and zyxin, and is thus termed iTRVZ. These molecules
are known as focal-adhesion constituents, but iTRVZ is distinct from focal adhesions, because iTRVZ exists
on both the apical and basal PMs and lack vinculin. The iTRVZ formation is driven by specific protein-protein
interactions, liquid-liquid phase separation, and interactions with actin filaments and raft domains via PI(4,5)P2.
iTRVZ integrates and amplifies the GPI-AR and RTK signals in a strongly non-linear fashion, and thus works
as an AND gate and noise filter. These findings greatly advance our understanding of the mechanism forcrosstalk between signaling pathways.

Short Bio
Akihiro Kusumi somehow developed his love of time-resolved fluorescence measurements under the
microscope (1984) and single-molecule imaging (1989). Like molecules in the plasma membrane, I underwent
hop diffusion from Kyoto (Asst. Prof. 1984), Tokyo (Assoc. Prof. 1988), Nagoya (Prof. 1997), Kyoto again(Prof. 2005), and then to Okinawa (Prof. 2016), and sometimes became trapped in smaller domains within acompartment, carrying out projects called “Membrane Organizers”, “Membrane Mechanisms”, and“Hierarchical Meso-Scale Domains”, supported by Japan Science and Technology agency and the Ministry of
Education of the Japanese government.
My H-index is 64, as of October 17, 2019 (the H-index and the number of citations for each paper is basedon the analysis by Google Scholar). In the following, he summarizes his previous scientific contributions
related to the present proposal by Prof. Subczynski.

17

IEEE-NEMS 2022

IEEE-NEMS PLENARY
Lithography Advances to Shrink IC by a Million
Times

Burn J. Lin

EDOM PL2: 09:45 – 10:30
Thursday, April 14, 2022
Location: RM 001

National Tsing Hua University

Abstract
The minimum feature size of semiconductors has shrunken from 5µm to 5 nm in 21 generations since the80s. In terms of area, the IC circuits have shrunken 1 million times. Improvement of the imaging lens enables
a feature size reduction to 11% while the imaging wavelength has reduced from 436 to 193 nm enabling
feature size reduction to 44%. With just these improvements, the minimum half pitch can only shrink to 114
nm. Many other innovations are needed to reach the 5 nm minimum feature size. In this presentation, thetechniques and tools to reach this phenomenal λ/20 feature size are presented.

Short Bio
Dr. Burn J. Lin is the Dean of the College of Semiconductor Research at National Tsing Hua University. He
holds Distinguished Research Chairs at the National Tsing Hua University, National Yang Ming Chiao Tung
University, and National Taiwan University. From 2011 to 2015 he was a Vice President and the Sole
Distinguished Fellow at TSMC, Ltd., which he joined in 2000 as a Senior Director. Earlier he held various
technical and managerial positions at IBM in the US, after joining in 1970. He has been extending the limit of
optical lithography for half a century.
Dr. Lin is a member of the US National Academy of Engineering, Academician of Academia Sinica, ITRI
laureate, IEEE and SPIE Fellows, Distinguished alumni of Ohio State University and National Taiwan University.

18

IEEE-NEMS 2022

IEEE-NEMS PLENARY
Microtechnologies and Nanotechnologies in Drug
Delivery

Robert S. Langer

Hygeia Touch PL3: 09:00 – 09:45
Thursday, April 15, 2022
Location: RM 001

Massachusetts Institute of Technology

Abstract
There are numerous new technologies being developed that may impact the future of medicine. For example,
new drug delivery technologies including microparticles, nanoparticles and nanotechnology promise to create
new treatments for cancer, heart disease and other illnesses. Nanotechnology may also be useful in delivering
DNA and siRNA as well. An important example--the development of nanoparticles for delivering the
COVID-19 mRNA vaccine will be discussed. Approaches involving polymers, microchips, and lipids will be
examined.

Short Bio
Robert S. Langer is one of 12 Institute Professors at MIT; being an Institute Professor is the highest honorthat can be awarded to a faculty member. Dr. Langer has written more than 1,500 articles. He also has over
1,400 issued and pending patents worldwide. Dr. Langer’s patents have been licensed or sublicensed to over
400 pharmaceutical, chemical, biotechnology and medical device companies. He is the most cited engineer
in history (h-index 299 with over 361,000 citations according to Google Scholar).

19

IEEE-NEMS 2022

IEEE-NEMS PLENARY
Reinventing Batteries through Nanoscience

Yi CuiEDOM PL4: 09:45 – 10:30
Friday, April 15, 2022
Location: RM 001

Stanford University

Abstract
The fast growth of portable power sources for transportation and grid-scale stationary storage presents great
opportunities for new battery chemistries. The invention of lithium ion batteries has been recognized with
Nobel Prize in 2019. How to increase energy density, reduce cost, speed up charging, extend life, enhancesafety and reuse/recycle are critical challenges. Here I will present how we utilize nanoscience to reinvent
batteries and address many of challenges by understanding the materials and interfaces through new tools
and providing new materials guiding principles. The topics to be discussed include: 1) A breakthrough tool ofcryogenic electron microscopy, leading to atomic scale resolution of fragile battery materials and interfaces.
2) Materials design to enable high capacity materials: Si and Li metal anodes and S cathodes. 3) Interfacial
design with polymer and inorganic coating to enhance cycling efficiency of battery electrodes. 4) New
electrolyte design. 5) New battery chemistry for grid scale storage.

Short Bio
At Stanford University, Yi Cui is the director of the Precourt Institute for Energy, co-director of the StorageX
Initiative, Fortinet Founders Professor Engineering in the Department of Materials Science and Engineering.
He is currently a Somorjai Miller Visiting Professor at University of California, Berkeley. A cleantech pioneer
and entrepreneur, Cui earned his bachelor’s degree in chemistry in 1998 from the University of Science &Technology of China and his PhD in chemistry from Harvard University in 2002. He was a Miller Postdoctoral
Fellow at the University of California, Berkeley from 2002 to 2005 before joining the Stanford faculty. He has
founded five companies to commercialize the energy and environment technologies from his lab: Amprius,
4C Air, EEnotech, EnerVenue and LifeLab Design Inc. Cui has published more than 500 studies and is one of
the world’s most cited scientists. He is an elected fellow of the American Association for the Advancementof Science, the Materials Research Society, the Electrochemical Society and the Royal Society of Chemistry.
He is an executive editor of Nano Letters and co-director of the Battery 500 Consortium, co-director of Bay
Area Photovoltaic Consortium. His selected awards include Global Energy Prize (2021), DoE LawrenceAward (2021), Materials Research Society Medal (2020), Electro Chemical Society Battery Technology Award(2019), Nano Today Award (2019), Blavatnik National Laureate (2017), and the Sloan Research Fellowship(2010).

20

IEEE-NEMS 2022

IEEE-NEMS PLENARY
Optoelectronic Tweezers – A New Optofluidic
Platform for Single Cell Biology

Ming C. Wu

EDOM PL5: 09:00 – 09:45
Saturday, April 16, 2022
Location: RM 001

University of California, Berkeley

Abstract
Recent success stories of treating cancer with immunotherapy has generated tremendous excitement in thelast few years. The remarkable treatment of former President Jimmy Carter’s cancer was widely publicized.
Immunotherapy uses the antibodies produced by white blood cells, or the cells themselves, to boost theimmune response of patients to fight cancer cells. The discovery and production of such “biological drugs”
require efficient screening and analysis of a large number of individual white blood cells. In this talk, I will
discuss an optofluidic technology developed at Berkeley several years ago called “optoelectronic tweezers”(OET). OET enables cloning of single cells in sub-nanoliter compartments in a microfluidic chip. Antibodies
produced by individual cells can be measured in hours, significantly shorter than the 3-month long traditional
workflow. The fully automated OET instruments are now helping pharmaceutical industries speed up drug
discovery and production process.

Short Bio
Ming Wu is Nortel Distinguished Professor of Electrical Engineering and Computer Sciences at UC Berkeley.
He received his Ph.D. from the same department in 1988 and joined the faculty in 2004 after doing research
at AT&T Bell Labs and UCLA. Professor Wu is best known for his work on Optical MEMS and optoelectronic
tweezers (OET). He received the 2016 William Streifer Scientific Achievement Award from IEEE Photonics
Society, 2017 C.E.K. Mees Medal from Optica (formerly Optical Society), and 2020 Robert Bosch Micro andNano Electro Mechanical Systems Award from IEEE Electron Device Society. He co-founded Berkeley Lights
Inc. (NASDAQ: BLI) in 2011 to bring optoelectronic tweezers to market. OET-based instruments are now
widely used by biopharma companies for antibody discovery, cell line development, and synthetic biology.

21

IEEE-NEMS 2022

IEEE-NEMS KEYNOTELab on a Particle Technology to Scale Biological Research
1000-Fold

Dino Di Carlo

KN1: 10:40 – 11:10
Thursday, April 14, 2022
Location: RM 001

University of California, Los Angeles

Abstract
The ultimate limits of measurement in biology are the “quantum” units that convey information, e.g. single
nucleic acids, proteins, and cells. Microfluidics has emerged as a powerful tool to compartmentalize single
cells and molecules into sub-nanoliter droplets as individual bioreactors to enable sensitive detection andanalysis down to this quantum limit. However, the current systems for these quantum assays have not been
widely adopted, partly due to the requirement of specialized instruments and microfluidic chips to generateuniform droplets and perform adequate manipulations. I will discuss the platforms we are developing to
fractionate volumes in simplified, instrument-free ways using 3D-shaped microparticles. These “lab on aparticle” platforms enable sorting cells based on secreted products for the discovery of antibodies, thedevelopment of cell lines producing recombinant products, and the selection of functional cells for celltherapies. Each cell and its secreted products can be analyzed and sorted using widely available flow
cytometers operating at up to a 1000 cells per second, promising to democratize single-cell technologies.

Short Bio
Dino Di Carlo received his B.S. in Bioengineering from the University of California, Berkeley in 2002 and received a Ph.D.
in Bioengineering from the University of California, Berkeley and San Francisco in 2006. From 2006-2008 he conducted
postdoctoral studies in the Center for Engineering in Medicine at Harvard Medical School. He has been on the faculty in
the Department of Bioengineering at UCLA since 2008 and now as Professor of Bioengineering serves as the Vice Chairof the Department and Deputy Director of an NSF Engineering Research Center focused on diagnostics for underserved
populations. In 2019 he was named the Armond and Elena Hairapetian Chair Professor in Engineering and Medicine at
UCLA. His research pioneered the use of inertial fluid dynamic effects for the control, separation, and analysis of cells in
microfluidic devices. His recent work extends into numerous other fields of biomedicine and biotechnology including labon-a-particle technologies, directed evolution of cells, rapid diagnostics, mechanomedicine, next generation biomaterials,
and phenotypic drug screening. He has also been a leader in technology entrepreneurship: He co-founded several
companies that are commercializing UCLA intellectual property developed in his lab including CytoVale, Vortex
Biosciences, Tempo Therapeutics, Forcyte, Ferrologix, Hana Diagnostics, and Partillion Bioscience. He has served as
Scientific Advisor for companies including Omega Biosystems, Acoustic Bio and Cue Health (NASDAQ:HLTH). Amongother honors he received the Presidential Early Career Award for Scientists and Engineers (PECASE) and was elected a
Fellow of the American Institute for Medical and Biological Engineering in 2016, was elected a Fellow of the Royal Societyof Chemistry (FRSC) in 2014, was awarded the National Science Foundation (NSF) Faculty Early Career Development
award and the U.S. Office of Naval Research (ONR) Young Investigator Award, the Packard Fellowship and Defense
Advanced Research Projects Agency (DARPA) Young Faculty Award, and received the National Institutes of Health (NIH)
Director’s New Innovator Award and Coulter Translational Research Award.
22

IEEE-NEMS 2022

IEEE-NEMS KEYNOTE
Silicon Oxide Electret as a Power Generation
Material

Hiroshi Toshiyoshi

KN2: 10:40 – 11:10
Thursday, April 14, 2022
Location: RM 002

The University of Tokyo

Abstract
Besides being used as a mechanical material, silicon can be turned into an electret or permanent electricalcharge when oxidized with impurity. We discuss on a process to include silicon oxide electret in a MEMS
(microelectromechanical systems) vibrational energy harvester that delivers more than 1 mW power fromenvironmental vibrations of less than 1 G (= 9.8 m/s2) in a low frequency range (~ 100 Hz).

Short Bio
Hiroshi Toshiyoshi received the B.S., M.E. and Ph.D. degrees in electrical engineering from The University ofTokyo, Tokyo, Japan, in 1991, 1993 and 1996, respectively. He joined the Institute of Industrial Science, The
University of Tokyo in 1996 as a Lecturer. From 1999 to 2001, he was a Visiting Assistant Professor at the
University of California, Los Angeles, CA, USA. In 2002, he became an Associate Professor with the Instituteof Industrial Science (IIS), The University of Tokyo. From 2002 to 2007, he was a Codirector of LIMMS/CNRSIIS UMI-2820, an international joint laboratory of the Centre National de la Recherche Scientifique, Paris,
France. Since 2009, he has been a Professor with the IIS, The University of Tokyo. His research interests
include optical MEMS, power MEMS, and CMOS-MEMS.

23

IEEE-NEMS 2022

IEEE-NEMS KEYNOTE
Plasmo-Opto-Electro-Fluidic Biosensors for Critical
Care Medicine

Katsuo Kurabayashi

KN3: 10:40 – 11:10
Thursday, April 14, 2022
Location: RM 003

University of Michigan, Ann Arbor

Abstract
Biomarker-guided precision medicine holds the promise to target treatment to the specific pathologic processes
occurring in an individual patient, thus increasing the efficacy of care and decreasing the use of harmful, unhelpfulinterventions. However, many acute inflammatory life-threatening illnesses caused by severe infection, trauma,
surgery, immunotherapy, or organ transplantation remain left behind in the field of precision medicine owing to
the lack of appropriate diagnostic tools. While testing and therapeutic plans for cancers and other chronic diseases
are formulated over days to weeks, a life-saving treatment for critically ill patients must be delivered in minutes tohours, requiring fast, sensitive, and accurate diagnostic technologies near the patient. To address this unmet need,
my research group at University of Michigan is currently developing advanced blood biomarker analysis platforms
incorporating microfluidic systems, biologically functionalized plasmonic nanostructures, and two-dimensional
atomically layered semiconducting transition metal dichalcogenide (TMDC) photoconductive nanosheet channels
into a hand-held module. The near-infrared (NIR) operation of our biosensors allows colloidal nanoparticle-based
colorimetric measurement of target protein biomarkers with a minimum effect of the photo absorption by
constituents (e.g. blood cells, platelets, fat globules, and metabolites) in the background biofluid. This eliminates
the need for sample purification steps, which has been the critical bottleneck challenging point-of-care testing(POCT). It also facilitates ultrasensitive biomarker detection of levels as low as approximately 100 fg/mL withdynamic detection ranges of 106 in less than 15 minutes. The limit of detection value is more than 100 times lower
than that of the current non-POCT gold standard method; enzyme-linked immunosorbent assay (ELISA).
Simultaneously achieving speed, sensitivity, selectivity, and battery-powered portability, our biosensor platforms
manifest the potential to broadly advance critical care strategies for treating systemic inflammatory disorders at
the point of care. This talk provides an overview of our plasmo-opto-electro-fluidic (POEF) biosensor technology
and discusses its translation to near-patient monitoring of cytokine release syndrome (CRS)/neurotoxicity andmanagement of sepsis through our collaborative research between University of Michigan College of Engineeringand Medical School.

Short Bio
Katsuo Kurabayashi is Professor of Mechanical Engineering and Electrical Engineering and Computer Science at the
University of Michigan, Ann Arbor. He received his BS in Precision Engineering from the University of Tokyo in 1992,
and his MS and PhD in Materials Science and Engineering from Stanford University, CA, in 1994 and 1998, respectively.
His current research focuses on optofluidics, nanoplasmonic and biomolecular biosensing, and BioMEMS/microsystems
for immunoassay, clinical diagnosis, single-cell study, and analytical chemistry. He authored and co-authored more than
175 peer-reviewed papers and holds 11 U.S. patents. He received the 2001 NSF Early Faculty Career Development(CAREER) Award, and the Robert Caddell Memorial Award in 2005, the Pi Tau Sigma Outstanding Professor Award in
2007, the University of Michigan Mechanical Engineering Outstanding Achievement Award in 2013, the Ted KennedyAward in 2015, and the Wise-Najafi Prize for Engineering Excellence in the Miniature World in 2019 from the College
of Engineering at the University of Michigan. He is a Fellow of RSC and ASME.
24

IEEE-NEMS 2022

IEEE-NEMS KEYNOTE
Droplet Microfluidics Enables Rapid Diagnostics
and Antimicrobial Susceptibility Testing

Jeff Wang

KN4: 10:40 – 11:10
Friday, April 15, 2022
Location: RM 001

John Hopkins University

Abstract
The talk describes droplet microfluidic-based platforms for pathogen detection and antimicrobial
susceptibility testing (AST). I will first introduce droplet magnetofluidics, a technology that eliminates theneed for large, complex instrumentation and fluidics typically associated with clinical laboratory nucleic acidamplification testing. Droplet magnetofluidics facilitates facile extraction and purification of nucleic acid targets
from clinical samples and concentrates them into a small volume for amplification detection. The assay
miniaturization helps maximize the thermocycling speed and minimize reagent consumption, thereby enablinga molecular test with a short turnaround time of 15 minutes and a low assay cost of ~$2. The magnetofluidic
diagnostic platforms have demonstrated clinically relevant sensitivity and specificity for Hepatitis C viral
infections, sexually transmitted diseases, and, recently, COVID-19. Meanwhile, I will also present a
microfluidic single-cell biosensing platform that employs droplet microfluidics to enable pathogen detection
without performing nucleic acid amplification via hybridization detection of 16S rRNA from single bacterial
cells captured in picolitre droplets. In-droplet quantitative measurements of genetic contents from single
bacterial cells also provide a surrogate for accelerating AST. When applied to urinary tract infections, thedroplet-based single-cell platform achieved both pathogen identification and AST from urine samples in 30
minutes, as opposed to 2-3 days by conventional culture-based methods.

Short Bio
Jeff T.H. Wang is Louis M. Sardella Professor in Mechanical Engineering at JHU, where he has served on thefaculty since 2002. He earned his doctorate in mechanical engineering from UCLA in 2002. His research
focuses on the development of new technologies for molecular analysis and biomedical research via advancesin micro- and nano-scale sciences. He has contributed to developments in single-molecule fluorescence
spectroscopy, microfluidics, and nano-biosensors for genetic and epigenetic biomarker-based diagnostics ofcancer, infectious disease, and an array of other diseases. Dr. Wang is an inventor of 25 patents and has
authored 170 research articles and delivered 130 invited talks. He received the NSF CAREER Award in 2006,
CSR Jorge Heller Award in 2007, ASGR Excellence in Research Award in 2007, the JALA Ten Award in 2011.
He is a Fellow of the American Institute for Medical and Biological Engineering (AIMBE), American Society of
Mechanical Engineering (ASME), Institute of Electrical and Electronics Engineers (IEEE), and Royal Society ofChemistry (ROC).

25

IEEE-NEMS 2022

IEEE-NEMS KEYNOTE
Mitochondrial Transfer and Cell Fate Transitions

Michael Teitell

KN5: 10:40 – 11:10
Friday, April 15, 2022
Location: RM 002

University of California, Los Angeles

Abstract
The ability to generate primary cell lines with desired, compatible nDNA-mtDNA sequences is difficult toachieve due to the necessity of controlled mitochondrial transfer. We deploy a massively parallel transfer
platform to deliver isolated healthy mitochondria from peripheral blood mononuclear cells into mtDNAdepleted (rho-0) primary fibroblasts. The resulting stable isolated mitochondrial replacement (SIMR)
fibroblast (SIMR) lines have restored respiration, but retain a rho0-like metabolome and transcriptome.
Reprogramming of SIMR fibroblasts to pluripotency followed by differentiation to mesenchymal stem cells(MSCs) progressively resets the metabolome and transcriptome profiles to that of reprogrammed and MSCdifferentiated control fibroblasts. Despite having non-native mtDNA sequences, the SIMR lines were able toproduce adipocytes, osteocytes, and chondrocytes by directed differentiation. Finally, preliminary work has
successfully generated SIMR fibroblasts with specific detrimental mtDNA sequences that show impaired
respiration and may aid in the modeling of mitochondrial disorders. We show using SIMR fibroblasts thatfate transition is necessary to fully reset rho-0 cell metabolism following mitochondrial transfer, enablingstreamlined studies of novel mtDNA-nDNA combinations.

Short Bio
Dr. Michael Teitell holds the Latta Endowed Chair in Pathology and is a Professor in the Departments of
Pathology, Pediatrics, and Bioengineering at UCLA. He is the Director of the UCLA Jonsson Comprehensive
Cancer Center and President of the Jonsson Cancer Center Foundation. He directs the National Cancer
Institute funded UCLA Tumor Immunology Training Program. Dr. Teitell’s laboratory studies overlapping
areas with emerging roles in cancer and mitochondrial disease. These areas include: (1) development andoncogenesis in germinal center B lymphocytes; (2) metabolism and epigenetic regulation in stem cell biology;(3) mitochondrial biology and transplantation; and (4) the development and applications of biotechnology tobasic and translational problems in human disease. Dr. Teitell is Board certified in anatomic, clinical andpediatric pathology and is a recipient of the Stohlman Memorial Scholar Award from the Leukemia Society ofAmerica, the Margaret E. Early Medical Research Trust Award, the FOCIS/Millenium Pharmaceuticals Award
for Genomics Research, and he was elected to the American Society of Clinical Investigators and the
Association of American Physicians.

26

IEEE-NEMS 2022

IEEE-NEMS KEYNOTE
Artificial Intelligence Enabled Sensing
Technologies and Applications in Metaverse

Chengkuo Lee

KN6: 10:40 – 11:10
Friday, April 15, 2022
Location: RM 003

National University of Singapore

Abstract
Wireless and portable electronics are undergoing explosive development in the 5G and Internet of Things(IoT) platform. Flexible and wearable electronics will further drive the future direction of the next generationelectronics. Among the enabling devices of future electronics in 5G/IoT applications, the flexible and wearable
sensors play the indispensable roles. When sensors integrated with the artificial intelligence (AI) technology
to enable the analysis function, such AI-assisted systems achieve a higher level of intelligence for a wide rangeof smart home applications including advanced identity recognition, human-machine interfaces, andpersonalized healthcare. In this talk, sensory information from gloves, socks, mats and toilet are analyzed bydeep learning approaches and wide range of applications are provided.

Short Bio
Dr. Chengkuo Lee received his Ph.D. degree in precision engineering from The University of Tokyo, Tokyo,
Japan, in 1996. Currently, he is the director of Center for Intelligent Sensors and MEMS at National Universityof Singapore, Singapore. He cofounded Asia Pacific Microsystems, Inc. (APM) in 2001, where he was Vice
President of R&D from 2001 to 2005. From 2006 to 2009, he was a Senior Member of the Technical Staff at
the Institute of Microelectronics (IME), A-STAR, Singapore. His research interests include MEMS, NEMS andflexible devices for IoT, energy harvesting, metamaterials and biomedical applications. He has trained 30 PhD
students graduated from ECE Dept., NUS. He has co-authored 410+ journal articles and 360+ conference
papers. He holds 10 US patents. His google scholar citation is more than 19000+. He is the associate-editorin-chief of Trans. Nanotechnology (IEEE), and editor-in-chief of Intern. J. Optomechatronics (Taylor & Francis).
He is in the Executive Editor Board of J Micromechanics and Microeng. (IOP, UK). He is the Associate editorof J. MEMS (IEEE) and Internet of Things (Elsevier). He is also the Editor of next journals: Scientific Reports(Springer Nature), Bioelectronic Medicine (BMC, Springer Nature), CHIP (Elsevier), J. Optical Microsystems(SPIE), Journal of Sensors (Hindawi), Sensors (MDPI), and Micromachines (MDPI). He serves on steeringcommittee and technical program committee for various conferences such as Transducers 2015, IEEE MEMS
2015, IEEE NEMS 2015, IEEE SENSORS 2018, IEEE MEMS 2019, Transducers 2019, IEEE MEMS 2020, andTransducers 2021, etc. He has also chaired many conferences including IEEE NEMS’18, OMN ’16 and ’14,
ISMM’14, and Bio4Apps’13 etc.

27

IEEE-NEMS 2022

IEEE-NEMS KEYNOTEBig Data versus Small Data: Optimizing N-of-1
Interventional Healthcare

Dean Ho

KN7: 09:45 – 10:15
Saturday, April 16, 2022
Location: RM 001

National University of Singapore

Abstract
Drug discovery and development are different segments of the therapy roadmap that need to be seamlessly
integrated. Discovering promising candidates represents the first of many steps needed to optimally harness
a drug’s potential, particularly due to the fact that monotherapies may yield improved but sub-optimal clinicaloutcomes compared to standard care. As such, these candidates often need to be delivered in combination
with other therapies, and the methodologies used to design these combinations vary widely. Importantly,
traditional and truly optimised drug development can be the difference between no efficacy and life-saving
outcomes. In the quest for truly optimised drug development - whether novel or repurposed - multiple
challenges need to be overcome. The right drugs and corresponding doses need to be identified, which will
have a profound impact on the drugs that ultimately comprise that combination. Using traditional approaches,
this can be an insurmountable barrier given the very large drug and dose parameter space that is created. In
addition, a one-size-fits-all approach serves as a barrier to truly individualised, or N-of-1 treatment, as even
effective drugs given at incorrect dosages can result in little to no efficacy. Furthermore, these doses mayneed to be modulated dynamically during the course treatment, since the patient response to treatment canalso be dynamic. This talk will address our recent clinical development studies at WisDM and N.1 todynamically tailor patient-specific treatment outcomes, reduce healthcare costs, and increase accessibility topractice-changing and optimised medicine.

Short Bio
Professor Dean Ho is currently Provost’s Chair Professor, Director of The N.1 Institute for Health (N.1), Directorof The Institute for Digital Medicine (WisDM) and Head of the Department of Biomedical Engineering at the
National University of Singapore.
Prof. Ho and collaborators successfully developed and validated CURATE, a powerful digital medicine platformthat has optimized human treatment for broad indications ranging from oncology to infectious diseases.
Prof. Ho is a Fellow of the US National Academy of Inventors (NAI), the American Association for the
Advancement of Science (AAAS), American Institute for Medical and Biological Engineering (AIMBE), and the Royal
Society of Chemistry. He was also recently named to the HIMSS Future50 Class of 2021 for his internationallyrecognised leadership in digital health. His discoveries have been featured on CNN, The Economist, National
Geographic, Forbes, Washington Post, NPR and other international news outlets. Prof. Ho is also a Subgroup Leadin the World Health Organization (WHO)-ITU AI for Health Working Group for Regulatory Considerations.
Prof. Ho is a recipient of the Tech Heroes from Crisis Pathfinder Award from the Singapore Computer Society,
NSF CAREER Award, Wallace H. Coulter Foundation Translational Research Award, and V Foundation for Cancer
Research Scholar Award, among others. He has also served as the President of the Board of Directors of theSociety for Laboratory Automation and Screening (SLAS), a 26,000+ member global drug development
organization.

28

IEEE-NEMS 2022

IEEE-NEMS KEYNOTE
Nanotechnology in Bioenergy Harvesting and
Sensing for Medical Implants

John X.J. Zhang

KN8: 09:45 – 10:15
Saturday, April 16, 2022
Location: RM 002

Dartmouth Engineering

Abstract
As the complexity of implantable devices is increasing, the size and power requirements of implantable devices
has shrunk by more than double over the past few decades. However, the functionality or lifespan of thedevices is often found to be limited due to shortage of power. With more than 50% of the device size being
occupied by the battery alone, longevity of such implantable devices has garnered huge concern over theyears. Fueled by the demand of additional biosensors coupled to such devices, implantable energy harvesters,
capable of harvesting the body's mechanical, chemical, or thermal energy over a long period of time, havegained tremendous popularity. Amongst these technologies, implantable piezoelectric thin film devices
provide a promising method recently to generate continuous supply of power. Realization of such implantable
power sources can shift the burden from commonly used lithium-ion batteries by utilizing physiologicalresources. In this talk, we will review recent developments with focus on piezoelectric polymer-based
nanotechnology for implantable cardiac energy harvesting and sensing.

Short Bio
Dr. John X.J. Zhang is a Professor at Thayer School of Engineering at Dartmouth College, and an Investigatorin the Dartmouth-Hitchcock Medical Center. He served as NSF program director during 2020-2021 global
pandemics, helping launched the research initiatives related to predictive intelligence for pandemic prevention.
He received his Ph.D. in Electrical Engineering from Stanford University, California in 2004, and was a
Research Scientist in Systems Biology at the Massachusetts Institute of Technology (MIT) before joining thefaculty at University of Texas at Austin in 2005. Dr. Zhang is a Fellow of American Institute for Medical andBiological Engineering (AIMBE) and a Fellow of Royal Society of Chemistry (FRSC). Dr. Zhang is also a
graduate of Stanford LEAD executive program at Graduate School of Business.
His research takes multi-disciplinary approaches, utilizing engineering expertise in bionanotechnology,
microfluidics, functional materials design, and micro-nanofabrication of biochips for synergizing sensing,imaging, and biomarker screening on-chip to facilitate studies of biomedical complexity and early diagnostics
towards precision healthcare. He has received numerous recognitions including NSF CAREER award, NIH
Director’s Transformative award, DARPA Young Faculty Award, Wallace Coulter Foundation Early CareerAward, Facebook SARA award, Sony Faculty Innovation Award, and Agilent University Research Award.
Dr. Zhang has published over 300 peer-reviewed papers and proceedings, presented over 80 invited seminars
worldwide, and has 8 US and over 30 international patents issued. His research discoveries and patents werelicensed to two companies with successful commercialization. Dr. Zhang has mentored over 30 Ph.D.
students and post-doctoral scholars and published a textbook Molecular Sensors and Nanodevices inBiomedical Engineering.

29

IEEE-NEMS 2022

IEEE-NEMS KEYNOTE
CarbonBuilt - Taking Low Carbon Concrete from
University Bench to Commercial Production

Rahul Shendure

KN9: 09:45 – 10:15
Saturday, April 16, 2022
Location: RM 003

Carbon Built

Abstract
CarbonBuilt's mission is to enable concrete manufacturing to drive large-scale greenhouse gas reductions
through the cost-effective utilization of CO and other industrial waste. CarbonBuilt’s Reversa™ processtransforms carbon dioxide (CO ) taken directly from industrial processes, biomass boilers, or emerging
direct air capture solutions into a low carbon, but otherwise "no compromise", precast concrete product.
Reversa's breakthrough use of low cost and low carbon materials enables this capital and energy efficient
curing process to deliver an 80%+ reduction in concrete's carbon footprint along with a 30%+ financial return.
CarbonBuilt's core technology was developed at UCLA’s Institute for Carbon Management. In 2021, theUCLA CarbonBuilt team was awarded the grand prize in the NRG COSIA Carbon XPRIZE.

₂

₂

Short Bio
Rahul Shendure is the CEO of CarbonBuilt, a low carbon concrete technology company. Rahul has spentalmost all of his 26+ year career focused on reducing humankind’s environmental impact. Concurrently, Rahul
serves as Board Chair of Oscilla Power, a pioneering ocean energy technology company he co-founded in
2009, and as a Director of the Composite Recycling Technology Center, a non-profit commercializing
products from carbon fiber scrap. He is active early-stage investor with a portfolio consisting of more than
40 companies, 80% of which are focused on climate solutions. Previously, Rahul served as co-founder, CEO
and Board Chair of Bellwether Bio, a cancer diagnostics company acquired by Guardant Health in 2019.
Earlier, Rahul was the Vice President of Product Marketing and first business hire at Amyris, a pioneering
industrial biotechnology company, and led product management at Ballard Power Systems, a pioneeringhydrogen fuel cell company. He started his career with engineering and operational assignments at General
Electric. Rahul has a BS in Chemical Engineering from MIT and an MBA from Harvard.

30

IEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
University, San Diego, CA, USA

Novel Micro/Nano Systems for
Bio and Energy Applications
IS T1.1: 11:10-12:40
Thursday, April 14, 2022
Location: RM 001
Session Chair: Sung-Yong ParkSan Diego State University

Description
This session will present the recent studies involved withnanomaterials and micro/nano systems for energy- and biorelated applications.
T1.1.1 Selective artificial neural network by targeted
delivery of neuronal cells using magneticallycontrolled microrobots, Hongsoo Choi, Department of
Robotics Engineering, Daegu Gyeongbuk Institute of Scienceand Technology (DGIST), Daegu, Korea.
T1.1.2 Novel computational design of high refractive
index nanocomposites and effective refractive index
tuning based on nanoparticle morphology effect, Jong
Eun Ryu, Department of Mechanical and Aerospace
Engineering, North Carolina State University, Raleigh, NC,
USA
T1.1.3 A novel microsensor embedded coronary
artery stent to continuously monitor in-stentrestenosis, Moataz Elsisy1, Robert Herbert2, Woon-Hong
Yeo2,3,4, Mohamed Ibrahim1, Youngjae Chun1,5,6*,
1
Department of Industrial Engineering, University ofPittsburgh, PA 15261, USA
2
George W. Woodruff School of Mechanical Engineering,
Institute for Electronics and Nanotechnology, Georgia
Institute of Technology, Atlanta, GA 30332, USA
3
Wallace H. Coulter Department of Biomedical Engineering,
Georgia Institute of Technology and Emory University Schoolof Medicine, Atlanta, GA 30322, USA
4
Parker H. Petit Institute for Bioengineering and Biosciences,
Institute for Materials, Neural Engineering Center, Institutefor Robotics and Intelligent Machines, Georgia Institute ofTechnology, Atlanta, GA 30332, USA
5
McGowan Center for Regenerative Medicine, University ofPittsburgh Medical Center, PA 15213, USA,
6
Department of Bioengineering, University of Pittsburgh, PA
15261, USA
T1.1.4 Microfluidics for Environmental application:
Monitoring harmful microorganisms and biofilm
formation in microfluidic chips, Sungwoo Bae,
Department of Civil and Environmental Engineering, National
University of Singapore, Singapore
T1.1.5 An optofluidic solar indoor lighting for green
and sustainable buildings, Sung-Yong (Sean) Park,
Department of Mechanical Engineering, San Diego State
31°°°°°°°°°°

Advanced Nanofluidic Systems forSingle Molecule Detection
IS T1.2: 11:10-12:40
Thursday, April 14, 2022
Location: RM 002
Session Chair: Wei-Lun Hsu
The University of Tokyo

Description
Understanding intricate and coupled electrokinetic andelectrochemical phenomena in nanospace is of crucial
importance for single molecule detection toward next
generation of medical diagnostic applications. In this session,
we invite five exceptional talks on nanofluidics forbiosensing research from young and inspiring scientists inJapan, P. R. China and Taiwan (R. O. C.), covering the
cutting-edge topics of nanofluidic protein separation,
femtoliter-droplet mass spectrometry, nanopore-confinedelectrochemical sensing, digital nanopore virus detection
and nonlinear electrokinetics in nanopores. This session
will enable us to merge novel ideas for the exploration of apathway forward for the advancement of current
nanobiosensor technology.
T1.2.1 Digestion and Separation of pL Protein Sample
Utilizing Nanofluidics, Kyojiro Morikawa, Institute of
NanoEngineering and MicroSystems (iNEMS), Department ofPower Mechanical Engineering National Tsing Hua University,
Hsinchu, Taiwan, Collaborative Research Organization forMicro and Nano Multifunctional Devices (NMfD), The
University of Tokyo, Tokyo, Japan
T1.2.2 Femtoliter-Droplet Shooter by Gas/Liquid
Nanofluidics for an Interface of Mass Spectrometry,
Yutaka Kazoe Department of System Design Engineering,
Faculty of Science and Technology, Keio University,
Kanagawa, Japan
T1.2.3 Glass Nanopore Confined Electrochemical
Sensing at Single Entity Level, Ru-Jia Yu, Yi-Lun Ying, YiTao Long, State Key Laboratory of Analytical Chemistry forLife Science, School of Chemistry and Chemical Engineering,
Nanjing University, Nanjing, P. R. China Chemistry andBiomedicine Innovation Center, Nanjing University, Nanjing,
P. R. China
T1.2.4 Nanopore Sensing for Single-Virus Detections
to Digital Infection Diagnosis, Makusu Tsutsui the
Institute of Scientific and Industrial Research, Osaka
University, 8-1 Mihogaoka, Ibaraki, Osaka, Japan
T1.2.5 Transport-Induced-Charge Electrokinetics in
Nanopores, Wei-Lun Hsu, Zhixuan Wang, Haoyu Wang,

IEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
Hirofumi Daiguji, Department of Mechanical Engineering,
The University of Tokyo, Tokyo, Japan°°°°°°°°°°

Functional Materials and NEMS /MEMS
IS T1.3: 11:10-12:40
Thursday, April 14, 2022
Location: RM 003
Session Chair: Akio Higo
The University of Tokyo

University of Tokyo, Japan, Platform Device Research
Division, Systems Design Lab., School of Engineering, theUniversity of Tokyo, Japan°°°°°°°°°°

Advanced Fabrication Technologies
for Nano/Micro Systems
IS T1.4: 11:10-12:40
Thursday, April 14, 2022
Location: RM 004
Session Chair: Yoshikazu Hirai
Kyoto University

Description
This invited session shows the functional materials andNEMS/MEMS for future integration of materials and devices.
We selected in simulation field, nano-material field,
NEMS/MEMS field, Bio-related device field, and compound
semiconductor field. We discuss the material
characteristics and future integration of the functional
materials to NEMS/MEMS and colloidal quantum dots solar
cell devices.
T1.3.1 Beyond Nanomaterials: The Science ofSubnanometer Particles, Takane Imaoka, Laboratory for
Chemistry and Life Science, Institute of Innovative Research,
Tokyo Institute of Technology, Japan., School of Materials
and Chemical Technology, Tokyo Institute of Technology,
Japan
T1.3.2 Molecular Analyses of Transport Phenomenaof Reactant/Product Materials in Polymer Electrolyte
Fuel Cell, Takashi Tokumasu1, Takuya Mabuchi2 1Instituteof Fluid Science, Tohoku University, Sendai, Japan 2Frontier
Research Institute for Interdisciplinary Science, Tohoku
University, Sendai, Japan
T1.3.3 Bio-sensor Using Electrochemical ImpedanceSpectroscopy, Ichiro Yamashita, Graduate School of
Medicine, Osaka University, 8-1 MihogaOka Suita, Osaka,Japan
T1.3.4 Photoelectric conversion using Infraredabsorbing colloidal nanocrystals, Haibin Wang1, Takaya
Kubo2, and Hiroshi Segawa1, 2
1
Graduate School Arts & Sciences, The University of Tokyo,
Tokyo, Japan.
2
Research Center for Advanced Science and Technology,
The University of Tokyo, Tokyo, Japan

Description
Current micro-nano fabrication technology has reachedintegration levels at which high-performance MEMS devices
and sensitive sensors can be fabricated. The scope of thisinvited session covers new design, fabrication technology,
characterization, and applications of devices and systems in
micro- and nano-scales. This session is organized fiveenergetic researchers in Japan and highlights recent
advances in the field of fabrication technologies and thestate of the art in Nano/Micro System applications.
T1.4.1 Femtosecond Laser Direct Writing ofMetal/Metal Oxide Composite Patterns for Sensor
Applications, Mizue Mizoshiri, Nagaoka University ofTechnology, Japan
T1.4.2 Rapid Prototyping of Microstructure Using
Grayscale Lithography, Kentaro Totsu, Micro System
Integration Center, Tohoku University, Japan
T1.4.3 Development of Ultra-thin Glass and Its
Application to Micro/Nanofluidics, Yo Tanaka,
Laboratory for Integrated Biodevice, Center for Biosystems
Dynamics Research (BDR), RIKEN, Japan
T1.4.4 Z-axis Controllable Multi-Electrode-Layer
Electrorotation Device Utilizing Levitation Effect,
Yuki Okamoto, Sensing System Research Center, National
Institute of Advanced Industrial Science and Technology,
Japan
T1.4.5 Alkali Metal Vapor Cells Fabricated withThree-Dimensional Microstructuring Technique for
Miniature Atomic Clocks, Yoshikazu Hirai, Departmentof Mechanical Engineering and Science, Kyoto University,Japan

T1.3.4 Tailor-made CMOS-MEMS as tools fornanomaterials, Yoshio Mita, Senior Member, Department
of Electrical Engineering and Information Systems (EEIS), the32

IEEE-NEMS 2022°°°°°°°°°°

IEEE-NEMS INVITED SESSION
Emerging Micro- and Nano-scaleSensing and Manipulation Techniques
IS T1.5: 11:10-12:40
Thursday, April 14, 2022
Location: RM 005
Session Chair: Tim Yeh
University of Texas at Austin

Description
This session will focus on exciting emerging microscale andnanoscale technologies for molecular, cellular and tissuelevel studies. The topics range from novel photonic sensors,
microfluidic systems for tissue culture, nanopore
measurements, and membrane receptor trajectoryacquisition and analysis. Both early-stage conceptual
investigation and translational work will be presented.
T1.5.1 Assessing metastatic potential andclassifying cancer cells using deep learning-based
EGFR trajectory analysis, Yen-Liang Liu, Master
Program for Biomedical Engineering, China Medical
University, Taichung City, Taiwan
T1.5.2 Using the next-generation sequencing
platform for massively parallel selection offluorescent nanomaterials, Tim Yeh, Biomedical
Engineering Department, University of Texas at Austin,
TX, USAwill be presented in the session.
T1.6.1 Robust Processing of Multi-Step Reactions in
Drops, Hee-Sun Han, Chemistry Department, University of
Illinois at Urbana-Champaign, IL, USA, Center for Biophysics
and Quantitative Biology, Urbana, IL, USA, Institute for
Genomic Biology, Urbana, IL, USA
T1.6.2 Nanoparticle Polymer Composites for
Microfluidics and BioMEMS, Bonnie L. Gray, Engineering
Science, Faculty of Applied Sciences, Simon Fraser University,
Burnaby, BC, Canada
T1.6.3 Minimally Invasive Medical Devices Utilizing
Non-planar Photofabrication Techniques, Tadao
Matsunaga, Faculty of Engineering, Tottori University, Tottori,Japan
T1.6.4 Point-of-Care Finger-Actuated Microfluidic
Devices, Je-Kyun Park, Department of Bio and Brain
Engineering, Korea Advanced Institute of Science andTechnology (KAIST), Daejeon, Korea; KAIST Institute for the
NanoCentury, Daejeon, Korea; KAIST Institute for Health
Science and Technology, Daejeon, Korea
T1.6.5 Development of Ingestible Thermometer
Charged by Gastric Acid Battery as a NextGeneration Healthcare Device, Shinya Yoshida, Graduate
School of Engineering, Tohoku University, Sendai, Miyagi,Japan°°°°°°°°°°

T1.5.3 Resistive pulse nanopore sensing forsingle-molecule and single-particle analysis,
MinJun Kim, Mechanical Engineering Department,
Southern Methodist University, TX, USA

Wearable / Stretchable Sensors andLiquid-Metal Systems

T1.5.4 Microfluidic chip-based method for cellspheroids culture, Chia-Hsien Hsu, Institute of
Biomedical Engineering and Nanomedicine, National
Health Research Institutes, Taiwan

IS T1.7: 11:10-12:40
Thursday, April 14, 2022
Location: RM 007
Session Chair: Aaron Ohta
University of Hawaii at Manoa°°°°°°°°°°

Description

MEMS/NEMS Based Microfluidic andMedical Devices
IS T1.6: 11:10-12:40
Thursday, April 14, 2022
Location: RM 006
Session Chair: Sang-Seok Lee
Tottori University

Description
In this session, we focus on MEMS/NEMS based devices for
medical and health care applications. This session consistsof 5 invited talks such as 3 talks for microfluidics, 2 talks for
medical devices. The cutting-edge research achievement
33

This session covers topics in wearable and/or stretchable
sensors and systems, such as electrodes for ECG
measurements and wearable sweat analysis systems. Thissession also includes systems and sensors that use roomtemperature liquid metals as functional materials. This
covers stretchable materials, thermal management systems,
reconfigurable circuits, actuators, and thin-film coatings.
T1.7.1 Fabrication of metal microneedle arrayelectrodes based on Bi-In-Sn alloys for ECG detection,
Soonmin Seo, College of BioNano Technology, Gachon
University, Gyeonggi, Korea
T1.7.2 3D-Printed Epidermal Microfluidic Systems for
the Collection and Analysis of Sweat, Tyler Ray,

IEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
Department of Mechanical Engineering, University of Hawaiʻiat Mānoa, Honolulu, HI, USA; Department of Cell andMolecular Biology, John A. Burns School of Medicine,
University of Hawaiʻi at Mānoa, Honolulu, HI, USA

T2.1.3 Smart mechatronics for electrostatic MEMS
vibration energy harvesters, Daisuke Yamane,
Department of Mechanical Engineering, Ritsumeikan
University, Shiga, Japan

T1.7.3 Polymerized Liquid Metal Networks forStretchable RF Conductors, Alexander Watson,
Engineering Management, Systems and Technology
Department, University of Dayton, Dayton OH, USA

T2.1.4 Smart energy extraction from energy
harvesters using timing-based asynchronous digital
circuits, Takeaki Yajima, Department of ElectricalEngineering and Computer Science, Kyushu University,
Fukuoka, Japan

T1.7.4 Progress in Liquid-Metal Actuation andApplications, Wayne A. Shiroma, Aaron T. Ohta,
Department of Electrical and Computer Engineering,
University of Hawaii at Manoa, HI, USA
T1.7.5 Liquid-Metal Systems and Applications, Arif
Rahman, Department of Electrical and Computer Engineering,
University of Hawaii at Manoa, HI, USA. Department ofComputer Science and Engineering, Hawaii Pacific University,
HI, USA°°°°°°°°°°

Smart Mechatronics for Energy
HarvestingT2.1.5 Smart mechatronics based on piezoelectric
polymer energy harvesting, Takashi Nakajima,
Department of Applied Physics, Faculty of Science,
Tokyo University of Science, Tokyo, Japan°°°°°°°°°°

Nano-constructs for Biosensing andCellular Engineering
IS F1.2: 11:10-12:40
Friday, April 15, 2022
Location: RM 002
Session Chair: Aram Chung
Korea University

Description

IS T2.1: 12:50-14:20
Thursday, April 14, 2022
Location: RM 001
Session Chair: Daisuke Yamane
Ritsumeikan University

Description
Energy harvesting is one of the key technologies forrealizing self-powered, maintenance-free, and autonomous
wireless network systems for the coming next-generation
Internet of Things era. The technological advancement ofenergy harvesting devices/systems can be achieved by thedevelopment of both mechanical and electrical aspects.
This is because one characteristic affects the other, and theperformance of energy harvesting devices/systems isrelated to the performance of both. With this background,
this session will focus on state-of-the-art mechatronics
technologies for energy harvesting and will cover a wide
range of topics including materials, mechanics, electronics,
fabrication processes, and applications.
T2.1.1 Development of Vibrational Energy Harvester
Based on Smart Mechatronics, Shimpei Ono, Central
Research Institute of Electric Power Industry, Kanagawa,Japan
T2.1.2 Smart electret composed of polar organic
molecules for vibrational energy generators, Yuya
Tanaka, Center for Frontier Science, Chiba University,
Japan

34

This session introduces novel nanoparticles andnanodevices for biosensing and cellular engineering
applications.
F1.2.1 Metal-organic framework nanoparticleembedded functional platform to guide neuralstem cell differentiation, Tae-Hyung Kim, School ofIntegrative Engineering, Chung-Ang University, Seoul,
Korea
F1.2.2 Nanoparticles for Intracellular Glucose
Monitoring, Yun Jung Heo, Department of MechanicalEngineering, Kyung Hee University, Gyeonggido, Korea
F1.2.3 Dielectrophoretic underwater captureand detection of ultra-low concentrated
nanoparticles, Yong-Sang Ryu, Brain Science Institute,
Korea Institute of Science and Technology (KIST), Seoul,02792, Republic of Korea, KU-KIST Graduate School ofConverging Science and Technology, Korea University,
Seoul, 02841, Korea
F1.2.4 Plasmonic Nanostructures for Sensitive
Molecular Sensing and High-Spatial Imaging,
Inhee Choi, Department of Life Science, University ofSeoul, Seoul, Korea

IEEE-NEMS 2022°°°°°°°°°°

IEEE-NEMS INVITED SESSION
Microneedles
IS F1.3: 11:10-12:40
Friday, April 15, 2022
Location: RM 003
Session Chair: Zhihong Li
Peking University

Description
Microneedles are able to penetrate into the tissue and offer
great chances in various biomedical applications includingtransdermal drug delivery, stable bio-signal monitoring,
sampling and bio-sensing. Owing to the micro-scale featuresize, microneedles have advantages of minimal invasiveness,
painlessness, high biosafety and simple operation. Our
invited speakers will share their excellent research on
materials, fabrication technologies and applications on
various microneedles.
F1.3.1 Minimally invasive bioelectronics, Xi Xie, Sun
Yat-sen University, China
F1.3.2 Microneedles for applications of biomedical
engineering, Jingquan Liu, Shanghai Jiaotong University,
China
F1.3.3 Silk microneedle patch capable of on-demand
multidrug delivery to the brain for glioblastoma
treatment, Tiger Hu Tao, SIMIT CAS, China
F1.3.4
Polycrystalline
diamond-based
microelectrodes for neurotransmitter sensing, Wen Li,
Michigan State University, USA
F1.3.5 Microneedle based Nanoelectroporation for
localized gene delivery in vivo, Lingqian Chang, Beihang
University, China

F1.4.1 Triboelectric field-enabled switching
structures in cholesteric liquid crystals for selfpowered applications of information security
and vision correction, Zong-Hong Lin, Institute of
Biomedical Engineering, Department of Power
Mechanical Engineering, and Frontier Research Centeron Fundamental and Applied Sciences of Matters,
National Tsing Hua University, Hsinchu, Taiwan
F1.4.2 Microfluidic Analytical Systems for
Disease Diagnosis, Chien-Fu Chen, Institute ofApplied Mechanics at National Taiwan University,
TaiwanF1.4.3 The application of fungal polysaccharides
on anti-cancer, Tung-Yi Lin, Institute of Traditional
Medicine, National Yang Ming Chiao Tung University,
Taipei, Taiwan, Program in Molecule Medicine,National Yang Ming Chiao Tung University, Taipei,
Taiwan, Biomedical Industry Ph.D. Program, National
Yang Ming Chiao Tung University, Taipei, Taiwan
F1.4.4 Single-molecule Analytical Platform for
NanoscienceandChemical/BiologicalApplications, Peng Zhang, Water Desalination andReuse Center, Biological and Environmental Scienceand Engineering Division, King Abdullah University of
Science and Technology, 23955, Thuwal, Saudi Arabia
F1.4.5 AI-Based Scanning Electrochemical
Microscopy Image Fusion using Novel SoftUltramicroelectrode, Tzu-En Lin, Dept ofElectronics and Computer Engineering, Int. of
Biomedical Engineering, National Yang Ming Chiao
Tung University, Taiwan°°°°°°°°°°

Advanced Nanotool for NEMS°°°°°°°°°°The Impact of Interdisciplinary
Science

IS F1.5: 11:10-12:40
Friday, April 15, 2022
Location: RM 005
Session Chair: Koji Sugano
Kobe University

Description

IS F1.4: 11:10-12:40
Friday, April 15, 2022
Location: RM 004
Session Chair: Tzu-En Lin
National Yang Ming Chiao Tung
University

Description
The session is dedicated to providing a forum to discuss thelatest developments in all areas of science and engineering,
especially in fields of chemistry, chemical engineering,biomedical engineering.

35

Nanotechnology researches have been developed on thefoundations of nanotechnological tools such as electron
microscopy, atomic force microscopy (AFM), and various
other observation and analytical technologies. These arestill developing and are expected to lead to novel
nanotechnologies. The electron microscopy is used for not
only observation but also manipulation of biomolecules. Its
combination with MEMS enables novel characterization ofnanoscale physics. The plasmonic nanostructures will also
open up novel technologies for analyzing biomolecules. The
novel AFM provides the capability of nanoscale resolution
visualization and interaction measurements in liquids. In thisIEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
session, recent research activities on advanced nanotools
are presented.
F1.5.1 Molecular Mixed Reality Using Nano
Resolution Virtual Cathode Display, Takayuki Hoshino,
Department of Mechanical Science and Engineering, Hirosaki
University at Hirosaki, Japan
F1.5.2 MEMS Probes in Electron Microscope for
Nanotribology], Tadashi Ishida, Department of MechanicalEngineering, Tokyo Institute of Technology, Kanagawa, Japan
F1.5.3 Manipulation and Detection of a Single DNA
Oligomer using a Gold Nanoparticle Dimer, Koji
Sugano, Department of Mechanical Engineering, Graduate
School of Engineering, Kobe University, Japan
F1.5.4 Atomic-Scale Imaging of Surface andInterfacial Structures in Liquids by Frequency
Modulation Atomic Force Microscopy, Naritaka
Kobayashi, Department of Electronic Systems Engineering,
School of Engineering, The University of Shiga Prefecture,Japan
F1.5.5 Development of Nanoendoscopy-AFM for
Visualizing Intracellular Nanostructures of Living
Cells, Keisuke Miyazawa, Faculty of Frontier Engineering,
Kanazawa University, Ishikawa, Japan, Nano Life Science
Institute (WPI-NanoLSI), Kanazawa University, Ishikawa,
Japan

Technology, 106 Taipei, Taiwan; Department of Neurological
Surgery, Tri-Service General Hospital and National Defense
Medical Center, 114 Taipei, Taiwan
F1.6.2 Development of a micro xuan-paper-based
analytical device for chemical sensing, Noel A.S.
Alvarado, Jose Lizama, Hsiu-Yang Tseng, MechanicalEngineering Department, National Taiwan University of
Science and Technology, Taiwan
F1.6.3 A printed-circuit-board-based biosensing
platform for point-of-care diagnostics, Yong-Ming Ye,
Noel A.S. Alvarado, Hsiu-Yang Tseng, Mechanical Engineering
Department, National Taiwan University of Science andTechnologyy, Taiwan
F1.6.4 Post-processing schemes for temperaturesensitive particles for thermal and flow visualizationin microscopic flows, Wei-Hsin Tien, Shang-Yu Wu,
Mechanical Engineering Department, National Taiwan
University of Science and Technology, Taiwan
F1.6.5 Particle streak velocimetry and its applicationsin flow visualization of acoustofluidics Mumtaz Hussain
Qureshi, Wei-Hsin Tien, Mechanical Engineering Department,
National Taiwan University of Science and Technology,
Taiwan°°°°°°°°°°°°°°°°°°°°

Applications and Experimental Techniques for
Economical Microfluidic Devices
IS F1.6: 11:10-12:40
Friday, April 15, 2022
Location: RM 006
Session Chair: Wei-Hsin Tien
National Taiwan University of Scienceand Technology

Advanced Bioelectronics andBiointerfaces
IS F1.7: 11:10-12:40
Friday, April 15, 2022
Location: RM 007
Session Chair: Huiliang Wang
University of Texas at Austin

Description

Description

As more microfluidic devices get commercialized and themarket size grows, the need to reduce the fabrication anddevelopment cost of the microfluidic products also become
important. In this invited session, five research works will
be presented for applications and experimental techniques
for cost-effective microfluidic devices. These studies range
from novel applications in medical training, chemical sensing
clinical diagnostic tools to instrumentation andexperimental methods for design and build evaluations.

Bioelectronics and Biointerfaces is a rapidly growing fieldthat utilizes advanced materials and electronic systems tobidirectionally interface with biological systems. Suchbioelectronic systems can be applied not only for deeper
understanding of basic brain functions but also forenhanced diagnostics, monitoring and therapeutics inhuman disease. In this session, we will have five invited
speakers to discuss about the design of advanced
nanomaterials, organic materials, device fabrication
strategies for improved bio-interfacing capability.

F1.6.1 Application of Advanced Manufacturing toEnhance the Quality of Clinical Neurosurgeon
Training – Creation of Lifelike Brain Simulator, YuWen, Yang, Pin-Chuan, Chen, Department of MechanicalEngineering, National Taiwan University of Science and36

F1.7.1 Multifunctional Integrated Nanoelectronics
for the Brain, Hui Fang, Thayer School of Engineering,
Dartmouth College, Hanover, NH, USA

IEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
F1.7.2 Seeing the Sound: Wireless Neural Interfaces
for In Vivo Neuromodulation, Guosong Hong,
Department of Materials Science and Engineering, Stanford
University, CA, USA., Wu Tsai Neurosciences Institute,
Stanford University, CA, USAF1.7.3 Smart Textiles for Personalized Health Care,
Jun Chen, Bioengineering Department, University ofCalifornia at Los Angeles, CA, USAF1.7.4 Skin-Interfaced Wearable Biosensors, Wei Gao,
Senior member, Andrew and Peggy Cherng Department ofMedical Engineering, California Institute of Technology,
Pasadena, CA 91125, USAF1.7.5 Design of Advanced Wearable EEG Electrodes
for Brain-Computer Interface, Huiliang Wang,
Department of Biomedical Engineering, University of Texas
at Austin, Austin, TX 78712, USAF2.2.3 The microfluidic system integrating
surface-enhanced Raman spectroscopy for
antimicrobial susceptibility testing, Nien-Tsu
Huang, Department of Electrical Engineering &Graduate Institute of Biomedical Electronics andBioinformatics, National Taiwan University, Taiwan
F2.2.4 Efficient fabrication of monodisperse
hepatocyte spheroids and encapsulation in
hybrid hydrogel with controllable extracellularmatrix effect, Hon Fai Chan, Institute for Tissue
Engineering and Regenerative Medicine & School of
Biomedical Sciences, The Chinese University of Hong
Kong, Hong KongF2.2.5 Microfluidic Particle Dam for Direct
Visualization of SARS-CoV-2 Antibody Levels in
COVID-19
Vaccinees,
Ting-Hsuan
Chen,
Department of Biomedical Engineering, City
University of Hong Kong, Hong Kong°°°°°°°°°°°°°°°°°°°°

Microfluidic Platforms for
Cell
Manipulation
andBiomarker Detection
IS F2.2: 12:50-14:20
Friday, April 15, 2022
Location: RM 002
Session Chair: Ting-Hsuan Chen
City University of Hong Kong

Wearable and Implantable
NanoEnergy and NanoSystem(NENS)IS F2.3: 12:50-14:20
Friday, April 15, 2022
Location: RM 003
Session Chair: Chengkuo Lee
National University of Singapore

Description
Leveraging the microfluidics enables unprecedented
accessibility for research in the small scale. In this invited
session, we provide a venue for discussing an array of
micro/nano devices with factors ranging from fluidic, optic,
and nanomaterials for investigation of biological researchsuch as cell manipulation and biomarker detection. It is
anticipated to bring inspiration propelling research withnew perspectives.
F2.2.1 A Novel Photo-Responsive Surfactant for
Droplet Microfluidics, Guangyao Cheng1, To Ngai2,
Yi-Ping Ho1
1
Department of Biomedical Engineering, The Chinese
University of Hong Kong, Hong Kong
2
Department of Chemistry, The Chinese University ofHong Kong, Hong KongF2.2.2 Predicting Cell Cycle of Live Cells in
Detachable Microfluidics with Mask Regional
Convolutional Neural Networks, Hsieh-Fu Tsai,
Department of Biomedical Engineering, Chang Gung
University, Taiwan

37

Description
Wearable, flexible and implantable electronics have beendeveloped as self-powered and self-sustained nanosystems
with diversified applications, such as human motions
sensing, environmental monitoring, healthcare monitoring,therapy, rehabilitation, human-machine interfaces, andfactory automation. The future development of
NanoEnergy and NanoSystems (NENS) will change theresearch landscape of wearable and implantable electronics.
This invited session presents you the leading works in thisarea.
F2.3.1 Self-powered Medical Devices andElectrical Stimulation Therapy, Zhou LI, Beijing
Institute of Nanoenergy and Nanosystems, Universityof Chinese Academy of Sciences, Beijing, China
F2.3.2 Optical Transduction
Mechanism
Towards Self-Powered Soft Pressure and Strain
Sensors, Inkyu Park, Korea Advanced Institute of
Science and Technology (KAIST), Korea

IEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
F2.3.3
Advanced
Multimaterial
Fibers:
Structure-Enabled Self-Powered Functionalities,
Lei Wei, Nanyang Technological University, Singapore
F2.3.4 Self-driven Nanomaterials, Devices andSystems for Healthcare and Environmental
Applications, Zong-Hong Lin, National Tsing Hua
University, Hsinchu, Taiwan
F2.3.5 From triboelectric nanogenerators andelectronic skins to actively-perceiving soft
robots and autonomous flexible applications,
Ying-Chih Lai, National Chung Hsing University,
Taiwan°°°°°°°°°°

Translational Advances in
Micro-, Nano- and Digital
Medicine
IS F2.4: 12:50-14:20
Friday, April 15, 2022
Location: RM 004
Session Chairs: Edward Kai-Hua Chow
Agata Blasiak
National University of Singapore

Description
Innovations in biomedical engineering have led tounprecedented translational advances in a range ofclinical applications, from cancer treatment to diabetes
management. These innovation presented hereencompass the development of micro-, nano- and digital
medicine to address the most pressing medical problemsof our time.
F2.4.1
Immuno-modulatory
Therapeutic
Delivery Systems, Dang Thuy Tram, Nanyang
Technological University, Singapore
F2.4.2 Development of microneedle-based skinpatch for transdermal glucose sensing, Xu Chenjie,City University of Hong Kong, Hong KongF2.4.3 CURATE.AI – small data, AI-derived
platform for optimizing personalized healthcare,
Agata Blasiak, National University of Singapore,
SingaporeF2.4.4 Turning tumors from cold to hot using
RIG-I agonists delivered by extracellular vesicles,
Minh Le, National University of Singapore, Singapore

NEMS Emerging ApplicationsIS S1.1: 10:30-12:00
Saturday, April 16, 2022
Location: RM 001
Session Chair: Mark Cheng
The University of Alabama

Description
Micro/nano microsystems have found many applications inrecent years. In this section, the invited speakers will
discuss on-going research in their research group, including
label-free detection (called SHRED) for water-in-oil droplet
systems, to 3D printed microfluidic microfluidic, and to
microplastic detection based on computer vision andmachine learning. The section will also cover quantum
computerconnectors
usingelectrodeposited
superconductor and parity-time symmetric wirelesssensing for biomedical device.
S1.1.1 Chemical Detection in Droplets using the
Stagnant-Cap Hydrodynamic Retardation Effect
Detector (SHRED), Amar S. Basu, Electrical andComputer Engineering and Biomedical Engineering
Wayne State University, Detroit MI, USA
S1.1.2 Monolithically 3D-Printed Microfluidics withWirelessly-Driven Boundary Layer Pump, Joe Fujiou Lo,
Mechanical Engineering Department, University of Michigan at
Dearborn, MI, USA
S1.1.3 Microfluidic for In-line Microplastic Detection,
Mark Cheng, Professor, Electrical and Computer Engineering,
The University of Alabama, Tuscaloosa, AL, USA
S1.1.4 Electrodeposited Superconductor Thin Films
for the Fabrication of Quantum Computer
Connectors, Qiang Huang, Department of Chemical andBiological Engineering, University of Alabama, Tuscaloosa,
AL, USA
S1.1.5 Higher-Order PT-Symmetric Telemetry for
Wireless Microsensors, Pai-Yen Chen, Department ofElectrical and Computer Engineering, University of Illinois
at Chicago, IL, USA°°°°°°°°°°

Micro-/nano-structure-enabled
Sensors
IS S1.2: 10:30-12:00
Saturday, April 16, 2022
Location: RM 002
Session Chair: Faheng Zang
Shanghai Jiao Tong University°°°°°°°°°°

38

IEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
Description
Micro- and nano-scale structures and fabrication
technology are increasingly used in creation of highperformance and multi-functional sensor platforms forhealth. These micro-/nano-structures-integrated sensors
require minimal amount analyte, benefit from the highsurface-area sensing probes and exhibit ultra-highsensitivity. Researchers around the global are invited to thissession to discuss micro-/nano-structures and advanced
fabrication technologies. The topics include microneedles,
CNT-modified electrochemical sensors, nanostructured
receptors and transducers, 3D nanofabrication, andnanostructured-Si microcantilevers, as well as theirapplications in sensing.
S1.2.1 Microneedle fabrication and applications,
Bo Cui, Department of Electrical & Computer
Engineering, University of Waterloo, Waterloo,
Ontario, Canada
S1.2.2 Electrochemical sensing of biomolecules
usingcarbonnanotube
nanocomposites
modified electrodes, Xiaoxue Xu1, Wei Zheng2
1
School of Biomedical Engineering, Faculty ofEngineering and Information Technology, University ofTechnology Sydney, Ultimo, 2007, NSW, Australia
2.
Institute of Corrosion Science and Surface Technology,
College of Materials Science and Chemical Engineering,Harbin Engineering University, Harbin 150001, China
S1.2.3 Versatile biosensing enabled bynanostructured transducers and receptors,
Faheng Zang, Department of Micro/Nano Electronics,
Shanghai Jiao Tong University, Shanghai, China
S1.2.4 3-D Nanofabrication and Nanostructure
Fine-tuning via Helium Ion Microscope, Huan Hu,
ZJU-UIUC Institute, International Campus, Zhejiang
University, Haining, Zhejiang Province, China., StateKey laboratory of Fluidic Power & Mechanical Systems,
Zhejiang University, Hangzhou, China
S1.2.5 Nanostructured-Silicon Microcantilever
Resonatorsfor
Multifunctional
Sensing
Applications, Jiushuai Xu, Institute of Semiconductor
Technology (IHT), TU Braunschweig, Braunschweig,
Germany, Laboratory for Emerging Nanometrology(LENA), TU Braunschweig, Braunschweig, Germany

Advanced Micro/Nano Photonics
Technology
IS S1.3: 10:30-12:00
Saturday, April 16, 2022
Location: RM 003
Session Chair: Guo-En Chang
National Chung Cheng University

Description
Micro-nano photonics have long being important
technologies for miniaturizing optical systems and enabling
various applications including communications, computing,and sensing. This invited section provides a forum forresearchers to discuss the cutting-edge research in
micro/nano photonics technologies for a wide range ofapplications.
S1.3.1 Bio-Intelligent Lasers for Healthcare
Applications, Yu-Cheng Chen, School of Electrical andElectronics Engineering, School of Chemical and Biomedical
Engineering, Nanyang Technological University, Singapore
S1.3.2 Nanostructured Inorganic Semiconductors
for Advanced Optoelectronics, Munho Kim, School ofElectrical and Electronic Engineering, Nanyang
Technological University, Singapore
S1.3.3 Integrated on-chip nanolasers based on
solution-processed perovskite quantum dots, Ya-Lun
Ho, University of Tokyo, Japan
S1.3.4 Plasmonic-enhanced Terahertz Tomography,
Shang-Hua Yang, Department of Electrical Engineering,
National Tsing Hua University, Taiwan
S1.3.5 Fabrication of Photodetectors Based on LowDimensional Materials, Wei-Chen Tu, Department ofElectrical Engineering, National Cheng Kung University,
Tainan, Taiwan°°°°°°°°°°

Biomaterials and Biosensors in
Biomedical Application
IS S1.4: 10:30-12:00
Saturday, April 16, 2022
Location: RM 004°°°°°°°°°°

Session Chair: Yu-Jui (Ray) Fan
Taipei Medical University

Description
In recent years, a great deal of focus has been aimed toengineer biomaterial-based cues, both at the micro/nano
scales, and biosensors with applied perspectives for target
39

IEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
applications in different bio- and non-bio sectors of themodern world. The key scientific advancements inbiomedical area, have presented next generation concepts
related to biomaterials. Use of properly designed andstructured materials, allows for the development welldefined sensing prototype that supports a series of directed
events. For these reasons, we are pleased to launch theinvited session and the issue is focused on “biomaterials andbiosensors in biomedical application”.
S1.4.1 The effect of cyclic mechanical stretch on the
3D culture model of lung cancer cells, Yi-Chiung Hsu,
Department of Biomedical Sciences and Engineering,
National Central University, Taiwan.
S1.4.2 Surface Properties of Nanoparticles
Influencing its distribution in eye, Ching-Li Tseng
Graduate Institute of Biomedical Materials & Tissue
Engineering, Taipei Medical University, Taipei, Taiwan
S1.4.3 Phase-Dependent MoS2 Nanoflowers as LightActivated Antibacterial Agents, Tsung-Rong Kuo,
Graduate Institute of Nanomedicine and Medical
Engineering, College of Biomedical Engineering, Taipei
Medical University, Taipei, Taiwan
S1.4.4 Phototherapeutic performances of functional
biomaterials, Er-Yuan Chuang, Graduate Institute of
Biomedical Materials & Tissue Engineering, Taipei Medical
University, Taiwan
S1.4.5 Biosensing platforms with nanostructuresurface plasmon resonance for nuclear acid sensing
and immunosensing, Yu-Jui Fan, Member, School of
Biomedical Engineering, Taipei Medical University, Taiwan

micro/nanotechnologies ranging from single cell biosensors
for cancer study to protein-based biosensors for COVID19 diagnostics to advanced non-invasive health monitoring.
S1.5.1 Ultrasensitive Biomolecular Detection Enabled
by Pitcher-Plant-Inspired Slippery Surfaces, Tak-Sing
Wong, Department of Mechanical Engineering and theMaterials Research Institute, The Pennsylvania State
University, PA, USA., Convergence Center for Living
Multifunctional Material Systems, The Pennsylvania State
University, PA, USA
S1.5.2 Targeting Bladder Cancer Heterogeneity bySingle Cell Biosensors, Pak Kin Wong, Department of
Biomedical Engineering, Mechanical Engineering and Surgery,
The Pennsylvania State University
S1.5.3 Modifying Paper’s Wicking Properties for
Microfluidic Paper-Based Sensors, Hideaki Tsutsui,
Departments of Mechanical Engineering and Bioengineering,
Stem Cell Center, University of California Riverside, USA
S1.5.4 Magneto-Immunoassays for Rapid, HighSensitivity Quantification of Protein Biomarkers,
Peter B. Lillehoj, Department of Mechanical Engineering,
Rice University, Houston, TX, USA., Department of
Bioengineering, Rice University, Houston, TX, USA
S1.5.5 Plenty of Room Under the Skin: A Wearable’s
Perspective, Sheng Xu, Department of Nanoengineering,
University of California, San Diego, USA°°°°°°°°°°NEMS for Human Sensing°°°°°°°°°°

Micro/Nano Biosensing Technologies:
From Diseases Diagnostics to Health
Monitoring
IS S1.5: 10:30-12:00
Saturday, April 16, 2022
Location: RM 005
Session Chair: Tak-Sing Wong
The Pennsylvania State University

Description
Detection and diagnosis of critical diseases such as cancer
and infectious diseases rely on the ability to detect
biological signatures at the cellular and molecular levels.
Advancements in micro- and nanotechnologies allow us todetect, monitor, and quantify these biological signatureswith unprecedented sensitivity and speed. In this session,
we will sample through some of the state-of-the-art
biosensing
technologies
using
advanced40

IS S1.6: 10:30-12:00
Saturday, April 16, 2022
Location: RM 006
Session Chair: Hiroyuki Kudo
Meiji University

Description
In this session, highly active Japanese researchers will
introduce the latest research status from fundamentals toapplications of human sensing, which is accelerating towarda post-pandemic. We focused on non-invasive andminimally invasive biomonitoring for human sensing.
S1.6.1 Bioelectrical Interfaces for Enzyme-Free
Biosensors, Toshiya Sakata, Department of Materials
Engineering, School of Engineering, The University ofTokyo, Tokyo, Japan
S1.6.2 Minimally Invasive Microperfusion
System for Measurement of Subepidermal
Biological Substances, Noriko Tsuruka, Graduate
School of Engineering, Tohoku University, Miyagi,
Japan

IEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
Kyoto University, Kyoto, Japan
S1.6.3 Sensing Your Mind by Wearable Devices:a Challenge of Neuroengineering for Human
Well-being, Yumie Ono, Health Science and Medical
Engineering Laboratory, Meiji University, Kawasaki,
Japan, Department of Electronics and Bioinformatics,
School of Science and Technology, Meiji University,
Kawasaki, Japan
S1.6.4 Conformal Printings for Stress-Free
Human Monitoring: Sensor Elements Blended
with the Environment, Ken-ichi Nomura, Sensing
System Research Center, National Institute ofAdvanced Industrial Science and Technology, Tsukuba,Japan
S1.6.5 Non-invasive Biosensing Systems for
Personal Health Recording, Hiroyuki Kudo,
Department of Electronics and Bioinformatics, Schoolof Science and Technology, Meiji University, Kawasaki,
Kanagawa, Japan°°°°°°°°°°Engineering-Based Microphysiological
System (MPS): From Fundamentals to
Commercial Applications

S1.7.3 Co-culturing of Epithelial and Endothelial
Tissues in Microfluidic Devices Toward SARS-CoV-2
Analysis, Kazuya Fujimoto, Department of MicroEngineering, Kyoto University, Japan
S1.7.4 A Triculture Model of the Blood-Brain Barrier
for Assessing the Effect of Cell-Cell Interactions on
Barrier Integrity, Kennedy Omondi Okeyo1,2, Ryutaro
Tamai2, and Taiji Adachi1,21Institute for Frontier Life and Medical Sciences,
Kyoto University, Kyoto, Japan2
Department of Micro Engineering, Kyoto University,
Kyoto, Japan°°°°°°°°°°

Microstructure Engineeringand ApplicationsIS S2.2: 12:10-13:40
Saturday, April 16, 2022
Location: RM 002
Session Chair: Chia-Wen Tsao
Engineering, National Central
University

Description

IS S1.7: 10:30-12:00
Saturday, April 16, 2022
Location: RM 007
Session Chair: Ryuji Yokokawa
Kyoto University

Description
Microphysiological system (MPS) is recognized as a
microfluidic chip that replicate patho/physiologically
relevant cell culture environment toward the evaluation ofnumerus candidate drugs. Focus of engineering-based
researchers in MPS are widely ranging from fundamental
academic research to commercial applications: To develop
a novel assay platform for understanding biologicalquestions, to develop a prototype for commercializationand to implement industrial use by bridging end users in a
regulatory context. Speakers in this session will introduce
recent activities of MPS in Japan.
S1.7.1 Microphysiological Systems (MPS) Based-on
Microfluidic Devices for Commercialization, Hiroshi
Kimura1,2
1
Department of Mechanical Engineering, School ofEngineering, Tokai University, Kanagawa, Japan
2
Micro/Nano Technology Center, Tokai University,
Kanagawa, Japan
S1.7.2 Reverse Bioengineering of Living Systems for
Drug Discovery, Ken-ichiro Kamei, Institute forIntegrated Cell-Material Sciences (WPI-iCeMS),41

Micro- or nano-structure engineering enables broad rang
applications. In this invited section, we demonstrate various
microstructure engineering techniques to create
microchannel, liquid lens or liquid metal coil. And theirapplication towards to biological, optical or energy
engineering.
S2.2.1 Miniature Power Generation System
Integrated with a Liquid Metal Coil Array, ShihJui Chen, Department of Mechanical Engineering,
National Central University, Taiwan
S2.2.2 Laser Nanotexturing by Micro Liquid
Lenses and Material Melting, Yuan-Jen Chang,
Department of Mechanical Engineering, National Yunlin
University of Science and Technology, Taiwan
S2.2.3 The Study of the Microfluidics Flow
Controlled Modes in the Runner of the Platform,
Yao-Tsung Lin, Department of Mechanical Engineering,
Chien Hsin University of Science and Technology,
TaiwanS2.2.4 Rheotaxis and Unsteady Migration ofUnicellular Alga Flowing in a Microchannel,
Cheng-Hsi Chuang, Department of Mechanical andMechatronic Engineering, National Taiwan Ocean
University, Keelung, Taiwan

IEEE-NEMS 2022

IEEE-NEMS INVITED SESSION
S2.2.5 Using Stereolithography 3D printing to
Manufacture Three-Dimensional Paper-Based
Microfluidic Devices for Efficient Chemical
Mixing and Biodetection, Pin-Chuan Chen,
Department of Mechanical Engineering National Taiwan
University of Science and Technology, Taiwan.
°°°°°°°°°°

42

IEEE-NEMS 2022

IEEE-NEMS REGULAR SESSION
T2.3.1 High-sensitive Flexible Temperature
Sensor with PEDOT: PSS Composites and PI
Substrate for Human Body Monitoring,
Zhengfang Zhu, Yi Su, Jing Chen, Lin Li, Lei Wang andHui Li, Shenzhen Institute of Advanced Technology,
Chinese Academy of Sciences, Shenzhen Institutes ofAdvanced Technology, Chinese Academy of Sciences

Micro/Nano Fluidics
RS T2.2: 12:50-14:20
Thursday, April 14, 2022
Location: RM 002
Session Chair: Yu-Jui (Ray) Fan
Taipei Medical University

T2.2.1 Microfluidic Paper-Based Colorimetric
System for Simultaneous Multi-Time Nitrite
Detection in Foods, Zong-Xiao Cai, Ya-Ju Chuang
and junan kuo, National Formosa University, National
Taiwan University Hospital Yunlin Branch
T2.2.2
Alginate
HydrogelMicrocapsules
Produced by Coaxial Electrohydrodynamic
Method, Zixuan Song, Zhihai Wang, Xi Chen,
Jingang Gui and Yaohong Wang, Beijing University ofTechnology, Beijing Children's Hospital, Tianjin
University
T2.2.3 Exploring the Change of Ion Current
Under
the
CrowdedConditionofMacromolecules Based on Nanopores, Hongluan
Li, Xun Yao, Wei Xu, Haiyan Wang and Jingjie Sha,
School of Mechanical Engineering, Southeast University
T2.2.4 Screening of Short Single- and Doublestranded DNA Molecules Using Silicon Nitride
Nanopores, Chaochao Wang, Zengdao Gu, Yin Zhang
and Jingjie Sha, School of Mechanical Engineering,Southeast University
T2.2.5 Quantitative Hematocrit Measurement
on a Paper Microfluidic Chip Pretreated by
Sodium Chloride, Zhiqing Xiao, Zitao Feng, Yuqian
Yang, Zejingqiu Chen, Lexin Sun, Rongkai Xu, Ruoqi
Zeng and Weijin Guo, Shantou University
T2.2.6 Reversal of Nanopore Ion Selectivity Dueto Transport-Induced-Charge Phenomena,
Haoyu Wang, Zhixuan Wang, Hirofumi Daiguji and
Wei-Lun Hsu, The University of Tokyo

T2.3.2 Ultrathin Si NEMS Resonators for Gas
Sensing with Ultrahigh Sensitivity, Wei Yu, Amit
Banerjee, Yoshikazu Hirai, Jun Hirotani and Toshiyuki
Tsuchiya, Kyoto University, Kyoto University
T2.3.3 A Fully 3D Printed Accelerometer for
Movement Monitoring Applications, Guandong
Liu, Zhejiang University
T2.3.4
Diaphragms
Functionalizedwith
Nanogranular Tunneling Resistors for Pressure
Sensing in Cardiovascular Implants, Ann-Kathrin
Klein, Claus J. Burkhardt, Alexander Kaya and Andreas
Dietzel, Technische Universität Braunschweig, Instituteof Microtechnology, NMI Natural and Medical Sciences
Institute at the University of Tübingen, NanoScale
Systems, Nanoss GmbHT2.3.5 An Impedance Flow Cytometer Chipwith Tunable Impedance Responses for HighSensitive Cellular Biomarker Detection, Mu Chen,
Southeast University
T2.3.6 Self-Powered Triboelectric Pressure
Sensors Without Environmental and User Effectby Spike-Based Communication, Chankyu Han,
Jungrak Choi and Inkyu Park, Korea Advanced Instituteof Science and Technology°°°°°°°°°°

Molecular Sensors, Actuators& Systems I
RS T2.4: 12:50-14:20
Thursday, April 14, 2022
Location: RM 004°°°°°°°°°°

Micro/Nano Electro-Mechanical
Systems I
RS T2.3: 12:50-14:20
Thursday, April 14, 2022
Location: RM 003
Session Chair: Cheng-Hsin Chuang
National Sun Yat-sen University

43

Session Chair: Pin-Chuan Chen
National Taiwan University of Scienceand Technology

T2.4.1 A PVDF/PET Flexible Piezoelectric
Actuator Array Based on Row/Column
Addressing Scheme, Dengfei Yang, Shuo Ding andFangyi Ma, Advanced Institute of Information
Technology, Peking University, National University ofSingapore, Shaoxing Vocational & Technical College

IEEE-NEMS 2022

IEEE-NEMS REGULAR SESSION
T2.4.2 Dual-Mode Arduino-Based Cmos-Mems
Magnetic Sensor System with Self-Calibrationfor Smart Building’S Energy Monitoring, Hadi
Tavakkoli, Izhar, Mingzheng Duan, Xu Zhao, Reshmi
Waikho, Lung-Jieh Yang and Yi-Kuen Lee, Departmentof Mechanical and Aerospace Engineering, The Hong
Kong University of Science and Technology,
Department of Mechanical and Electro-MechanicalEngineering, Tamkang University
T2.4.3 Scaling Analysis and Identification of
Critical Dimensions of CMOS Compatible Micro
Search-Coil Magnetometers for Internet ofThings Application, Hadi Tavakkoli, Xu Zhao, Izhar,
Mingzheng Duan and Yi-Kuen Lee, The Department of
Mechanical and Aerospace Engineering, The Hong Kong
University of Science and Technology, College of Civil
Engineering & Mechanics, Xiangtan University, China
T2.4.4 Analysis of Single BSA Protein Molecules
Using MoS2 Nanopores, Chaoming Gu, Zhoubin Yu,
Xiaojie Li, Xin Zhu, Zhen Cao, Zhi Ye, Chuanhong Jin
and Yang Liu, Zhejiang University
T2.4.5 Detection of Molecules Based on
Enhanced Backscattering Effect in MicrosphereLens, Pengcheng Zhang, Guoqiang Gu, Zitong Yu, Xi
Chen, Xiaoqin Huo, Lin Zeng, Yuye Wang, Yi Zhang andHui Yang, SIAT Shenzhen
T2.4.6 Development of Oxygen Sensor in Humid
Hydrogen Background based on Metal Oxide
and Machine Learning Algorithm, Yeongjae Kwon,
Kichul Lee, Mingu Kang and Inkyu Park, Korea
Advanced Institute of Science and Technology

University
T2.5.3 Real-time Tracking of Living Cell
Proliferation with Nano Mechanical Biomarkers,
Yuxuan Xue, Mukun Zhang, Xinyu Liu, Ye Ma and Ning
Xi, The University of Hong Kong
T2.5.4 Dynamic Mechanical Response of
Adenovirus Infected Living Single Cell and UVC
Irradiation Disinfection Effects, Yuxuan Xue,
Mukun Zhang, Xinyu Liu, Ye Ma and Ning Xi, The
University of Hong Kong
T2.5.5 Development of a Microfluidic Device
Integrated with a Membrane Emulating Airblood Barrier for Lung-on-a-chip Applications,
Gulsim Kulsharova, Perizat Kanabekova and Bereke
Dauletkanov, Nazarbayev University
T2.5.6 High Frequency Ti3C2Tx NEMS
Resonators, Bo Xu, Jiankai Zhu, Fei Xiao, Na Liu,
Yachun Liang, Hujie Wan, Xu Xiao and Zenghui Wang,
University of Electronic Science and Technology ofChina°°°°°°°°°°

Nanomaterial Based Devices
and Systems I
RS T2.6: 12:50-14:20
Thursday, April 14, 2022
Location: RM 006
Session Chair: Hsieh-Fu Tsai
Chang Gung University°°°°°°°°°°

Nanobiology / Nanomedicine

T2.6.1 Size-Based Sorting of Extracellular
VesiclesVia
Optically-Induced
Dielectrophoresis on A Microfluidic Chip, WeiJen Soong, Yi-Sin Chen and Gwo-Bin Lee, National
Tsing Hua University

RS T2.5: 12:50-14:20
Thursday, April 14, 2022
Location: RM 005
Session Chair: Chi-Shuo Chen
National Tsing Hua University

T2.5.1 Preliminary Experiment Results on Dog
BreathAnalysis
Using
the
MEMS
Micropreconcentrator, Sang-Seok Lee, Junya Maeda,
Tomoaki Kageyama, Yusuke Murahata, Tadao
Matsunaga and Yoshiharu Okamoto, Tottori University
T2.5.2 A Microfluidic System for Methylated
BRCA1 Detection from Cell-Free DNA By
Utlizing a Novel Aptamer-Based Assay, ChihHung Wang, Yu-Jen Cheng, Keng-Fu Hsu and Gwo-Bin
Lee, Department of Power Mechanical Engineering,
National Tsing Hua University, Department of
Obstetrics Gynecology, National Cheng Kung
44

T2.6.2 Fast Synthesis of Gold Nanotriangles
Using Glass Microfluidic Device, Mao Hamamotoand Hiromasa Yagyu, Kanto Gakuin University
T2.6.3 Self-powered Vibration Detector for theIntelligent Vibration Control System Based on
Triboelectric Nanogenerator, Ruixue Sun, Zeyu
Liu, Fenqiang Liu, Yonghao Zhang, Honghui Zhang, Lei
Xie and Changrong Liaoy, Chongqing University
T2.6.4 Simultaneous Generation and Delivery of
Neutral Polymeric Aerosol by ElectroHydrodynamic Nebuliser, Trung-Hieu Vu, Jarred W.
Fastier-Wooller, Tuan-Hung Nguyen, Canh-Dung Tran,
Dzung Viet Dao and Van Thanh Dau, School ofEngineering And Built Environment, Griffith University,

IEEE-NEMS 2022

IEEE-NEMS REGULAR SESSION
Queensland, Australia,
Departmen of Aerospace
Engineering, University of Ulsan, Ulsan, Republic ofKorea, School of Electrical Engineering And Robotics,
Queenslan University of Technology, Brisbane,
Queensland, Australia, University of Engineering And
Technology, Vietnam National University, Hanoi,
Vietnam, School of Engineering And Built Environment,
Griffith University, Australia, Centre of Catalysis And
Clean Energy, Griffith University, Australia°°°°°°°°°°

CM Ho Best Paper Competition
RS F1.1 11:10-12:40
Friday, April 15, 2022
Location: RM 001
Session Chair: Pak Kin Wong
Pennsylvania State University
Session Chair: Aaron Ohta
University of Hawaii

F1.1.1 Robotic Printed Combinatorial Droplet(RoboDrop)for
Antibiotic
Combination
Screening, Fangchi Shao, Hui Li, Kuangwen Hsieh,
Pengfei Zhang and Tza-Huei Wang, Johns Hopkins
University
F1.1.2 Detection of Nanoparticles in A MinuteSample Using the Vibration Induced Flow, Kanji
Kaneko, Mamiko Tsugane, Taku Sato, Takeshi
Hayakawa, Yosuke Hasegawa and Hiroaki Suzuki, Chuo
University, The University of Tokyo
F1.1.3 Facile Wettability-Patterned Flexible
Surface for Multifunctional Microdroplet Array
Manipulation, Hao Chen, Dachao Li and Xiaoping Li,
Tianjin University
F1.1.4 Dielectrophoresis-Based Blood Plasma
Extraction Using Two-Layer Conducting-Pdms
Microelecrodes, Junwang Liu, Penghui Shen, Duli Yu
and Xiaoxing Xing, Beijing University of Chemical
Technology°°°°°°°°°°

Best Conference Paper
Competition

F2.1.1 Nanowell-based Nano/Micropolarizer
Array Biochip for Super-Resolution Imaging,
Hsin-Yi Hsieh, Chung-Hao Lin, Po-Chou Chen, WeiKo Wang and Chin-Chuan Hsieh, VisEra Technologies
Company Limited
F2.1.2The
Influenceof
Substrate
Microstructures on the Fluorescent Intensity
Profile, Size, Roundness, and Coffee Ring Ratioof Protein Microarray Spots, Weijin Guo, Lluisa
Vilaplana, Jonas Hansson, M.-Pilar Marco and Woutervan der Wijngaart, Shantou University, Institute forAdvanced Chemistry of Catalonia (IQAC-CSIC), KTH
Royal Institute of Technology
F2.1.3 Data Analysis Platform for Nanobubble
Characterization of Solid-state Nanopores,
Soumyadeep Paul, Yuichiro Hanada, Bluest Lan,
Hirofumi Daiguji, Kuo-Ching Liang and Wei-Lun Hsu,
The University of Tokyo, National Taiwan University,
Keio University
F2.1.4 Aluminum Oxide-Coated Particle
Differentiation Employing Supervised Machine
Learning and Impedance Cytometry, Brandon
Ashley, Jianye Sui, Mehdi Javanmard and Umer Hassan,
Rutgers, the State University of New Jersey°°°°°°°°°°

Micro/Nano Electro-Mechanical
Systems II
RS F2.5 12:50-14:20
Friday, April 15, 2022
Location: RM 004
Session Chair: Cheng-Hsin Chuang
National Sun Yat-sen University

F2.5.1 Fuzzy sliding-mode control of theelectrostatically tuned quasi-zero stiffness
MEMS accelerometer, Ziyi Ye, Zhipeng Ma, Yixuan
Guo, Yiming Jin, ZTF, Xudong Zheng and Zhonghe Jin,
Zhejiang University
F2.5.2 A Novel Piezoresistive Transducer for
Bulk Mode Mems Resonator, Yupeng Tian,
Haoshen Zhu and Quan Xue, South China University ofTechnology

RS F2.1 12:50-14:20
Friday, April 15, 2022
Location: RM 001
Session Chair: Pak Kin Wong
Pennsylvania State University
Session Chair: Aaron Ohta
University of Hawaii
45

F2.5.3 Design and Simulation of a Resettable
MEMS Safety and Arming Device, Xiaoyu Kong,
Yun Cao, Hengbo Zhu, Haotian Liu, Weirong Nie andZhanwen Xi, Nanjing University of Science andTechnology

IEEE-NEMS 2022

IEEE-NEMS REGULAR SESSION
F2.5.4 A Linear Model for Multiple Degree-OfFreedom Weakly Coupled Resonators Based
Accelerometers, Boyi Zhu, Jiayue Lou, Li Tang andZhipeng Ma, Zhejiang University
F2.5.5 Temperature Drift Compensation of a
Tuned Low Stiffness Mems Accelerometer
Based on Double-Sided Parallel Plates, Tengfei
Zhang, Zhipeng Ma, Yiming Jin, Ziyi Ye, Xudong Zheng
and Zhonghe Jin, Zhejiang University
F2.5.6 Demonstration of Production of Pull-In
Cancellation Voltage Generated by ElectretBased Vibrational Energy Harvester andCockcroft-Walton Voltage Multiplier, Hiroaki
Honma, Shota Harada and Hiroshi Toshiyoshi, The
University of Tokyo

S2.1.5 Stem-FIT: a Microneedle-based Multiparametric Sensor for In Situ Monitoring ofSalicylic Acid and pH Levels in Live Plants, Nafize
I. Hossain and Shawana Tabassum, The University ofTexas at Tyler°°°°°°°°°°

Molecular Sensors, Actuators,& Systems II
RS S2.3 12:10-13:40
Saturday, April 16, 2022
Location: RM 003
Session Chair: Sanket Goel
Birla Institute of Technology & Science
Pilani, Hyderabad Campus°°°°°°°°°°

S2.3.1 Enhanced Non-Enzymatic Microfluidic
Biofuel Cells to Continuously Self-Power Biodevices, Sanket Goel, Birla Institute of Technology &Science Pilani, Hyderabad Campus

Best Student Paper
Competition
RS S2.1 12:10-13:40
Saturday, April 16, 2022
Location: RM 001
Session Chair: Pak Kin Wong
Pennsylvania State University
Session Chair: Aaron Ohta
University of Hawaii

S2.1.1 Highly Sensitive Flexible Capacitive
Pressure Sensor Based on Bionic Hybrid
Microstructures, Lin Li, Jing Chen, Zhengfang Zhu,
Zebang Luo, Nian Zhou, Yuewu Tan, Lei Wang and Hui
Li, Shenzhen Institutes of Advanced Technology,
Chinese Academy of Sciences
S2.1.2
DesignAnalysisofCapacitive
Micromachined Ultrasonic Transducers, Kendalle
Howard, Lucrecia Ramirez, Byoung Hee You and InHyouk Song, Texas State University, Lone Star College
S2.1.3 Synthesis and Immobilization of Silver
Nanoparticles on Filter Paper and Surgical
Masks for Antimicrobial Applications, Hammad
Arshad, Saima Sadaf and Umer Hassan, School ofBiochemistry & Biotechnology, University of the Punjab,
Rutgers the State University of New Jersey
S2.1.4 2.5-dimensional insect-mimetic wingmodel for flapping wing nano air vehicles anddesign window search for manufacturable
solutions using polymer micromachining, Vinay
Shankar, Ryunosuke Matsuo, Minato Onishi and
Daisuke Ishihara, Kyushu Institute of Technology

46

S2.3.2 A Needle-Type Sensor Fabricated on a 32
Guage Needle for the Measurement of 1D
Partial Pressure of Oxygen Distribution, Bokyung
Seo, Jaeho Park and Inkyu Park, Korea Advanced
Institute of Science and Technology
S2.3.3 Influence of Electrode Duty Factor on the
Performance of Lamb-Wave AlN Resonators on
SOI Substrate, Haichao Cao and Hao Ren, School ofInformation Science and Technology, ShanghaiTech
University
S2.3.4 A Deep Learning Assisted Smartphone
Platform for Screening of Alzheimer’s Disease
Using a Microfluidic Paper-based Analytical
Device, Sixuan Duan, Tianyu Cai, Ziren Xiao, XinhengWang, Xi Yang, Jia Zhu and Pengfei Song, Xi'an Jiaotong- Liverpool University, Suzhou City University
S2.3.5 Impact of Aperture on the Performanceof AlN Lamb Wave Resonators on SOI substrate,
Zhihao Li, Yunping Niu and Hao Ren, ShanghaiTech
University, School of Information Science andTechnology
S2.3.6 Enhanced Dna Binding Detection on
Dense Particle Packed Microreactor Array,
Wenrui Zhang, Dachao Li and Xiaoping Li, Tianjin
University

IEEE-NEMS 2022°°°°°°°°°°

IEEE-NEMS REGULAR SESSION
Micro/Nano Fluidics andFabrication

Nanomaterial Based Devices
and Systems II

RS S2.4 12:10-13:40
Saturday, April 16, 2022
Location: RM 004

RS S2.5: 12:10-13:40
Saturday, April 16, 2022
Location: RM 005

Session Chair: Yu-Jui (Ray) Fan
Taipei Medical University

Session Chair: Chi-Shuo Chen
National Tsing Hua University

S2.4.1 Deep Learning Assisted Ultra-Accurate
Smartphone Testing of Paper-Based ELISA
Assays, Sixuan Duan, Tianyu Cai, Ziren Xiao, Jia Zhu,
Xinheng Wang, Xi Yang and Pengfei Song, Xi'an Jiaotong- Liverpool University, Suzhou City University

S2.5.1 Wireless, Skin-mountable, CrackActivated Pressure Sensor for Pressure Injury
Prevention, Seokjoo Cho, Yong Suk Oh, Hyeonseok
Han and Inkyu Park, Korea Advanced Institute of
Science and Technology

S2.4.2 Transport-Induced-Charge Distribution
Near the Entrance of an Ultrathin Nanopore,
Zhixuan Wang, Wei-Lun Hsu and Hirofumi Daiguji,
Zhejiang University

S2.5.2 A Flexible Pressure Sensor with Wide
Range
Using
Polyimide/Graphene
Oxide/BaTiO3 Nanofibers as Dielectric Layer,
Dezhi Wu, Xianshu Cheng, Yunheng Wu and Zhenjin
Xu, Xiamen University

S2.4.3 Applying Hybrid Bonding Technique toManufacture a Peristaltic Micropump with
Extremely High Flow Rate, Tuan Ngoc Anh Vo, PinChuan Chen and Yu-Hsiang Chen, Department of
Mechanical Engineering, National Taiwan University of
Science and Technology

S2.5.3
Screen-Printed
Electrochemical
Immunosensor utilizing Polyaniline and Gold
Nanoparticles for the detection of the bladdercancer cell membrane protein FGFR3, Ting-Hui
Cheng, Institute of Medical Science and Technology,
National Sun Yat-sen University

S2.4.4 3D Alkali Vapor Cell with Vertical
Sidewalls, Jin Zhang, Jianfeng Zhang and Jintang Shang,
The Key Laboratory of MEMS of the Ministry of
Education, Southeast University
S2.4.5
FacileFabricationofSilk/Offstoichiometry Thiol-ene (OSTE) Microneedle
Patches, Yuqian Yang, Zhiqing Xiao, Lexin Sun, Zitao
Feng, Zejinqiu Chen and Weijin Guo, Shantou
University
S2.4.6 Fabrication of Solid Microneedle using
Multi-slit Diffraction UV Lithography, Jun Ying
Tan, Yuankai Li, Punit Prakash, Bala Natarajan andJungkwun Kim, Kansas State University°°°°°°°°°°

47

IEEE-NEMS 2022°°°°°°°°°°