NANOTS2024— CALL FOR PAPERS (due: August 2)
The 44th Annual NANO Testing Symposium
12–14 November 2024
Senri Life-Science Center, Toyonaka, Osaka, Japan
https://inanot.sakura.ne.jp/nanots/
The institute of NANO testing invites nano testing professionals at all levels of experience from around the world to submit abstracts to NANOTS2024. NANOTS continues to be
one of the leading technical symposiums for discussing solutions that improve the testing process of nano-scale devices
and materials. For test designers, device manufacturers, andmaterials suppliers and testing equipment, NANOTS providesopportunities for testing professionals to network and learn
the latest in the practical application of advanced nano testing strategies and methodologies to achieving nano-scale device dependability excellence. The three-day event of the 44th
NANOTS (NANOTS2024) will consist of a symposium witha special invited talk, a special session, technical sessions, acommercial session, an equipment exhibition and an eveningsession. Papers for a special session and technical sessions
are peer-reviewed and are selected based on a clear outline ofproblem, analysis, solution/results and conclusion. Presentations on original, non-commercial and non-published works
are being solicited in the following technical scope.

Symposium Background
The NANO testing symposium is now in its 44th year since engineers and scientists facing the testing challenges posed by thethen-advanced integrated circuit devices organized a symposiumon Stroboscopic SEM and its Application in 1981. The name ofsymposium was changed to Electron Beam Testing Symposiumin 1982, the LSI Testing Symposium in 1994, and the NANO
Testing Symposium in 2013 as semiconductor technology andtesting issues became more complex, challenging and global.
The symposium is recognized as the foremost meeting dedicatedto the testing of nano-scale devices covering the complete cycle from test design, manufacturing process, test, fault diagnosis,
and failure analysis and back to process and design improvement.
The symposium brings together engineers and scientists from industries and universities from all over the world to discuss recent
progress and future trends.
Over the years, the symposium has evolved into the “annualmeeting” of the testing industry. Technical sessions, complemented by tutorials, a commercial session and exhibits of test
equipment and related services, have provided an opportunity forparticipants to see and discuss the latest available products andsystems. Last year, 32 companies exhibited at NANOTS and 240
participants attended NANOTS. Now, more than ever, NANOTS
is playing an increasingly important role as the industry’s meeting place.
The NANO testing symposium is sponsored by the Instituteof NANO Testing (https://inanot.smoosy.atlas.jp/), in cooperation with the Institute of Electronics, Information and Communication Engineering, the Japan Society of Applied Physics, Reliability Engineering Association of Japan, and Union of JapaneseScientists and Engineers.

Technical Scope

ADVANCED PROCESS TECHNIQUES FOR NANO TESTING
Interconnect: copper/low-k reliability / Wafer preparation /Physical characterization of wafers / Electrical characterization of wafers / Surface preparation: control and monitoring ofsurface treatment / Cleaning / Process control / Dopant diffusion / Oxidation and gate dielectrics: metrology of dielectric ﬁlms / Optical lithography / Photomask fabrication: photomask qualiﬁcation / Equipment reliability / In-line metrology: metrology for lithography processes, metrology for front
end processes, interconnect process control, and in-FAB FIB /In-situ metrology / Yield modeling / Yield management /Electrical, Physical, and Chemical Characterization

ADVANCED NANO TESTING
System-on-chip testing / Memory testing / Delay testing /Low-power testing / Built-in self-testing / Software-based
self-testing / Analog and mixed-signal testing / IDDQ testing / Burn-in testing / FPGA testing / High-speed I/O testing / RF testing

RELIABILITY PHYSICS AND ENGINEERING
Accelerated testing / Time-to-failure modeling / Time-tofailure statistics / Failure rate / Acceleration factor / Timedependent dielectric breakdown

EFFECTS OF RADIATION ON INTEGRATED CIRCUITSRadiation effects on semiconductor devices / Mitigation techniques

ADVANCED IC-LEVEL DEBUG AND DIAGNOSIS
Silicon debug / Defect diagnosis / Cause-effect analysis /Effect-cause analysis / Scan chain diagnosis / Logic BIST diagnosis / Memory diagnosis and built-in self-repair

ADVANCED CIRCUIT EDITING FOR DEBUG AND DIAGNOSIS
Focused Ion Beam / Layout-database-driven navigation system

ADVANCED PROBING TECHNOLOGIES FOR DEBUG
AND DIAGNOSISDie exposure technique / Mechanical probing / Injectionbased probing: e-beam probing, laser beam probing (laser voltage probing, resistance change (OBIRCH, SDL)) / Emission
microscopy / Emission-based probing: infrared emission microscopy (IREM), picosecond imaging circuit analysis (PICA),
time-resolved emissions (TRE) / Others

PHYSICAL ANALYSIS TOOL FOR FAILURE ANALYSIS
Package analysis / Deprocessing / Parallel polishing / Crosssection analysis / Microscopy / Transmission electron microscopy (TEM) / Others

CHEMICALANALYSIS

CHARACTERIZATIONFORFAILURE

X-ray analysis (energy dispersive) / Auger / Secondary ion
mass spectroscopy (SIMS) / Microspot Fourier transform infrared spectroscopy / Others

FAILURE MECHANISMS IN NEW MATERIALS AND
Abstracts representing high quality original research are inTRANSISTORS
vited in the following areas.
ADVANCED DESIGN METHODOLOGIES FOR NANOTESTING
Design error diagnosis / Design for debug and diagnosis(DFD) / Design for manufacturing (DFM) / Design for reliability (DFR) / Design for testability (DFT) / Design foryield (DFY)

Process-related issues / Hot carriers / NBTI / PBTI / Passivation stability / Dielectric integrity / High-k gate oxides /Latchup / ESD / Metal migration: mechanical and thermal
aspects / Low-k dielectrics and Cu interconnects / Reliability
related to nanotechnology

ECONOMICS OF NANO TESTING
Economic effects / Economic models / The learning curve /Technological driving forces / Factory and equipment economics

TESTING FOR NEW DEVICES (including Devices for Bi- of 1000 words, MS Word or pdf). The abstract should provide
ological Science, Medical Applications and Health Monitor- an overview of new product. Include title, author(s), companying)
afﬁliation(s), contact information, several key words and at
Micro Electro Mechanical Systems (MEMS, BioMEMS) / least one AREA as listed on this call for papers. Abstracts
Sensors / Liquid Crystal Display (LCD) / Nano-tube / for a commercial session (short presentation) are due August
PRAM / RRAM / FRAM / Others
2, 2024 and should be submitted on-line. For further information concerning an associate member, the equipment exADVANCED TESTING EQUIPMENT AND SYSTEMS
Transmission electron microscope (TEM) / Scanning elec- hibition and a commercial session, please visit our website:tron microscope (SEM) / Focused ion beam (FIB) / Scanning https://inanot.sakura.ne.jp/nanots/
Probe Microscope / Others

CASE STUDIES OF NANO TESTINGElectrical characterization / Die exposure / Package analysis / Global failure site isolation / Probe failure site isolation / Defect exposure / Physical inspection / Chemical analysis

Special sessions
Special invited talk: To be announced.
Invited talk: To be announced.
Panel discussion: To be announced.

Instructions to authors for technical sessions

Evening Session
The evening session of NANOTS will provide international
conference reports and so on. It will be held on the secondday evening. Registration fee includes one ticket to evening
session of NANOTS. For further information, please visit ourwebsite: https://inanot.sakura.ne.jp/nanots/Symposium Registration
We strongly encourage you to register on line by using ourwebsite: https://inanot.sakura.ne.jp/nanots/. The online registration system will be open in the middle of September 2024.

Important Dates

Abstracts are welcome from all those involved in all areas of• Extended abstract submission: August 2, 2024
nano testing. Original papers co-authored by a user and a sup• Acceptance notiﬁcation: September 13, 2024
plier and/or academia that demonstrate innovative, practical• Camera ready manuscript: October 18, 2024
solutions for advancing nano testing are highly encouraged.
• Symposium: November 12–14, 2024
Authors must provide an extended abstract of no more than
one page of text (A4 size paper, max. of 1000 words, MS
Word or pdf) with an additional page including supporting NANOTS committee (steering & program)data and ﬁgures. The abstract should provide an overview of: Chair:
the problem; current practice in industry and its limitations;K. Nakamae – Osaka University
and proposed solution, as well as provide a brief summary ofresults. Include title, author(s), company afﬁliation(s), con- Members:
tact information, ﬁve key words and at least one AREA asY. Cho– Tohoku University
listed on this call for papers. Abstracts are due August 2,Y. Goto
– MIRISE Technologies
2024 and should be submitted on-line. Please note that abY. Higuchi– Hitachi, Ltd.
stracts and papers must be in English or in Japanese. For aK. Kojima– Osaka Universitysample abstract and further author instructions, please visit
T. Koyama– Fuji Electric Co., Ltd.
our website: https://inanot.sakura.ne.jp/nanots/
S. Asahina– JEOL Ltd.
All abstracts will be peer reviewed by the NANOTS comS. Kyoh
– Kioxia Corp.
mittee according to the following criteria:
H. Maeda– Renesas Electronics Corp.
• Originality of work,
K. Nikawa– Device Evaluation Technology Labora• Speciﬁc results achieved and described, andtory• Potential impact and interest to attendees.
Y. Ose– Hitachi High-Tech Corp.
Notiﬁcation of acceptance, including additional author inH. Terada– Hamamatsu Photonics K.K.
structions, will be sent via e-mail by September 13, 2024.
M. Tsujita– Sony Semiconductor Manufacturing
A ﬁnal, company-approved manuscript and copyright form
Corp.
must be sent electronically by October 18, 2024 in order to be
Y. Yamazaki – TASMIT Inc.
published in the NANOTS2024 proceedings.

Instructions for equipment exhibition and commercial session
The Symposium will feature the latest in service providers,equipment manufacturers and suppliers. A large exhibit ﬂoor
will give the opportunity to key-vendors to represent the corebusiness area in these ﬁelds. Furthermore, a commercial session will give the opportunity to introduce new products withshort presentation.
Applicant for equipment exhibition and a commercial session must be an associate member of the Institute of NANO
testing. Applicants for a commercial session must provide anabstract of no more than one page of text (A4 size paper, max.

SecretaryY. Midoh– Osaka University
K. Nakamae – Osaka University

Contact usIntelligent Integrated Systems, Dept. Information
Systems Eng., Grad. Sch. Information Scienceand Technology, Osaka University
1-5 Yamada-Oka, Suita, Osaka, 565-0871, JAPAN
Phone : +81 6 6879 7813 Fax : +81 6 6879 7812
E-mail : secretariat@inanot.sakura.ne.jp
Web: https://inanot.smoosy.atlas.jp/