UHP Valves, Fittings & System Integration

KD-S Series
SCV Submersible Valves®

UHP Gas Series

Our KD-S SCV Submersible Valves® series, using our unique technology, provides ﬂow rate reproducibility
in high-temperature environments; making them suitable for supplying precursors in atomic layer
deposition (ALD) processes.
*SCV submersible valve ® is a registered trademark of KITZ SCT Corporation.

Features
Compatible with high-temperature environments
The entire valve can be submerged in high-temperature environments up to 200 °C,
allowing for eﬃcient heating.

Flow rate reproducibility
Valve Cv values are factory-set. Flow rates stay stable during use and consistent withreplacements.
Initial Cv value error within ±5% (Pneumatic valve); variation during use within ±10%

PFA seat
PFA seat provides excellent heat and corrosion resistance, and is compatible with awide variety of gases.

High durability
Cycle life of 5 million.*
PFA seat improves valve performance in comparison with a metal seat.
*Our pneumatic valve test performance (test conditions): ﬂuid: N2, charged pressure: 101psig (0.7MPa(G)),
atmospheric temperature: 200˚C

User-friendly Design
Pneumatic valve
Design for use with heater jacket
Placing the air vent port on top of the actuator allows the heater jacket to haveclose contact with the sides of the valve to minimize heat loss.

Manual valve
Heat resistant handle with open/close indicator
By making the handle and the open/close indicator window heat-resistant, it ispossible to bake-out without removing the handle.

Speciﬁcations
KD4S（1/4″)

Size

KD8S（1/2″）

Maximum Operating Pressure
Fluid Temperature *3333

60℃～200℃
Across the Seat He Leak Rates ≦ 1×10－9 sccs(≦ 1×10－10 Pa・m3/sec)

Atmospheric Temperature *3
Leak Rates(Room temperaturewhen shipped)

Inboard He Leak Rates
Manual Valve58-101psig (0.4 ‒ 0.7 MPa(G))
10,000 cycles

Pneumatic valve

5 million cycles

Actuation Pressure (Pneumatic valve)
Cycle Life *4≦ 1×10－9 sccs(≦ 1×10－10 Pa・m3/sec)

SEP
SUS316LE

SUS316L

Body Material

0.083in (1.36cm ) 0.449in (7.36cm )60℃～200℃

Wetted Area Volume *23EP

STD

Grade

0.5
0.19
101psig (0.7MPa(G))

Cv *1(Double melt material)

Surface Roughness≦ Rz 3.2 μm≦ Rz 0.7 μm

PolishMechanical polishedElectro polished

Degreasing + Precision cleaning

Cleaning

Single bagged package

Packaging

Double bagged package
PFASeatCobalt alloy

Diaphragm*1 N.C valve : Ajusted value (±５%), Manural valve : the minimum value(Cv value measurement (200̊C) based on SEMASPEC-90120394B-STD.)*2 Calculated value from the CVC male drawing dimensions*3 If not in continuous use, normal temperature to 200˚C.
*4 N.C. valve: In-house durability test performance value in a 200˚C constanttemperature bath with N2 charged at 101psig (0.7MPa(G)).
Manual valve: In-house durability test performance value by heating the bodysection at 200̊C with N2 charged at 101psig (0.7MPa(G)).

Precautions
1) The pneumatic UHP valves are not guaranteed to function if their exterior is submerged inside a vacuum.
2) For high temperature applications, please select appropriate material for air-ﬁttings and tubes to assure proper performance.

TypeModelSize

Temperature

KD4SKD : KD-type
Diaphragm valve

4：1/4"
8：1/2"

Operation Valve ShapeC

S：200℃
M：Manual valve
101psig (0.7MPa(G)) C：Normally closed
Highly durable

Connection

Seat Material

SVA

S：Straight
A：Angle
L：L-shape
B：Branch

V： CVC male
VF：CVC female
W： Tube end

A：PFA

Cv Adjustment(Pneumatic valveonly)

Handle Color

GradeEP-316L

Not shown：Adjusted
N：Not adjusted

Not shown：
Base material color
Ask sales for coloredhandles.

STD-316L : Mechanical polished + SUS316L
EP-316L : Electro polished + SUS316L
SEP-316LE：Electro polished + Double melt material

Dimensions

Unit : inch (mm)Model

TypeConnection

L

H

KD4SCS-VA

1/4”CVC male

2.24 2.99 0.43 1.56 1.02 0.98
(57) (76) (11) (39.7) (26) (25)1.00
(25.4)

KD8SCS-VA

1/2”CVC male

3.03 4.06 0.63 2.17 1.42 1.42(77) (103) (16) (55) (36) (36)1.10(28)

H1A

B

C

PM

M1

Rc1/8
KD4SCS-VFA 1/4”CVC Female

2.78 2.99 0.43 1.56 1.02 0.98
(70.6) (76) (11) (39.7) (26) (25)1.00
(25.4)

KD8SCS-VFA 1/2”CVC Female

3.27 4.06 0.63 2.17 1.42 1.42(83) (103) (16) (55) (36) (36)1.10(28)

KD4SMS-VA

1/4”CVC male

2.24 2.87 0.43(57) (73) (11)1.02 0.98(26) (25)

2-M5
Depth
1.00 0.20(5.0)(25.4)

KD8SMS-VA

1/2”CVC male

3.03 3.39 0.63(77) (86) (16)1.42 1.42(36) (36)1.10(28)

KD4SMS-VFA 1/4”CVC Female

2.78 2.87 0.43
(70.6) (73) (11)KD8SMS-VFA 1/2”CVC Female

3.27 3.39 0.63(83) (86) (16)Please ask for demention of valves with tube end connection.

1.65(42)－1.02 0.98
(26) (25)1.00(25.4)

1.42 1.42(36) (36)1.10(28)

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