UHP Valves, Fittings & System Integration

TD-S Series
SCV Submersible Valves®

UHP Gas Series

The TD-S series of SCV submersible valves®, incorporating our unique technology, can be used inhigh-temperature environments compatible with integrated gas systems. They are suitable for supplying
precursors in atomic layer deposition (ALD) processes where consistent ﬂow rate reproducibility is required.
“Submersible valve”: a valve that can be used in a high-temperature environment.
*SCV® submersible valve is a registered trademark of KITZ SCT Corporation.

Features
Compatible with high-temperature environments
Eﬃcient heating is possible because the entire valve can be used in high-temperature environments up to200˚C.

Stable Cv value
Cv values are 100% factory-adjusted. With little variation in the Cv value during use, stable gas ﬂow rates
can be obtained.
Initial Cv value error within ±5%; variation during use within ±10%Adoption of PFA seat
PFA with excellent heat resistance and corrosion resistance is adopted as a seat material. It can be used
for a wide variety of gases.

High durability
Performance value of 20 million cycles*
Compared with the metal seat type, adoption of the PFA seat improves durability performance, including
excellent seat leak rates and extended life cycles in high-temperature environments.
*Our pneumatic valve test performance (test conditions): ﬂuid: N2, charged pressure: 0.7MPa(G), atmospheric temperature: 200˚C

User Friendly Concept
Pneumatic valve
Optimized actuator design for improved heat eﬃciency.
With the location of the actuator's air vent port on the top, the heater jacket comes into closer
contact with the actuator.

Manual valveWith the LOTO (Lock-Out, Tag-Out) mechanism installed, heat-resistant spec handle design
allows for visual inspection of the open/closed state
The handle is designed for maximum valve temperature. Therefore, it is possible to bake-out
without removing the handle. The equipped LOTO mechanism enables locking when the handle
is closed, so that safety measures can be taken by using a padlock. The LOTO is not designed
to lock in the valve's open position.

Speciﬁcations
Size

0.50.19101.5psig (0.7 MPa(G))

Maximum Operating Pressure
Wetted Area Volume0.0372in³ (0.61 cm 0.1123in³ (1.84 cm(C-seal, 2-port))(C-seal, 3-port))
3*2

Fluid Temperature
Atmospheric Temperature
Across the Seat He
Leak Rates(Room temperature Inboard Hewhen shipped)
Leak Rates

Actuation Pressure(Pneumatic valve)
Cycle Life *43

Surface Roughness
PolishCleaning

60℃～200℃*3

Packaging

65.3-87.0psig
58.0-101.5psig(0.45 ‒ 0.6 MPa(G)) (0.4 ‒ 0.7MPa(G))

Manual Valve

10,000 cycles

Pneumatic Valve

20 million cycles

SEP
SUS316LE(Double melt material)≦ Rz 3.2 μm≦ Rz 0.7 μm

Mechanical polishedElectro polished

Degreasing + Precision cleaning*3≦ 1×10－10 Pa・m3/s

EPSUS316L

Body Material

60℃～200℃≦ 1×10－10 Pa・m3/s

Leak Rates

STDGrade

TD8S (1.5″HF)

TD4S (1.125″)Cv at 200℃ *1

Double bagged package

Single bagged package

PFA

Seat

Cobalt alloy

Diaphragm*1 The minimum value is stated by Cv value measurement (200̊C) based on SEMASPEC90120394B-STD.
*2 Calculated value from the C-seal surface mount drawing dimensions*3 If not in continuous use, normal temperature to 200̊C.
*4 N.C. valve: In-house durability test performance value in a 200̊C constant temperaturebath with N2 charged at 0.7MPa(G).
Manual valve: In-house durability test performance value by heating the body section
at 200̊CPrecautions
1) The pneumatic valve's exterior is designed to be used under atmospheric pressure. If the valve's actuator is within a vacuum environment then the performance is
not guaranteed .
2) For high temperature applications, please select appropriate material for the actuator's air-ﬁttings and tubes to assure proper performance.

TypeModel

Size

Temperature

Operation

Valve
Shape

Connection

Seat
Material

TD

4SCS

GA

TD：TD-type
Diaphragm valve

4：1.125"
8：1.5“HF

S：200℃
0.7MPaHighly durable

Q：LOTOC：
Normally closed

S：Straight
B：Branch

G： C-seal
Surface mount

A：PFA

Cv
Adjustment

HandleColor(Pneumatic valve only)

Grade

EP-316L

Not shown:
Adjusted
N：Not adjusted

Not shown:
Base material color
Color *

STD-316L:
Mechanical polished + SUS316L
EP-316L: Electro polished + SUS316L
SEP-316LE:
Electro polished + Double melt material* For colors, contact our sales representative.

Dimensions
ModelUnit:inch(mm)Type

TD4SCS-GA

Connection

A

B

C□D□EFG

HJK

P

C-1.125′′ 0.305 0.500 0.205 1.126 0.856 0.260 1.122 3.15 0.187 0.061
Surface mount (7.75) (12.7) (5.2) (28.6) (21.74) (6.6) (28.5) (80) (4.75) (1.55)

Rc1/8

TD8SCS-GA

C-1.5′′
HF
0.455 0.645 0.330 1.490 1.188 0.315 1.496 3.90 0.203 0.079(38) (99) (5.16) (2)Surface mount (11.56)(16.38) (8.38) (37.85)(30.18) (8)TD4SQS-GA

C-1.125′′ 0.305 0.500 0.205 1.126 0.856 0.260 1.102 2.87 0.187 0.061
Surface mount (7.75) (12.7) (5.2) (28.6) (21.74) (6.6) (28) (73) (4.75) (1.55)

0.551
(14)

TD8SQS-GA

C-1.5′′
HF
0.455 0.645 0.330 1.490 1.188 0.315 1.496 3.31 0.203 0.079(38) (84) (5.16) (2)Surface mount (11.56)(16.38) (8.38) (37.85)(30.18) (8)https://kitz-sct.jp/english/■ Global Network
Tokyo Head Oﬃce

KITZ SCT AMERICA CORPORATION

Osaka Sales Oﬃce

KITZ SCT CORPORATION

Omorieki Higashiguchi Bldg. 3F, 1-5-1 Omorikita, Ota-Ku,
Tokyo 143-0016, Japan
TEL. 81-3-6404-2171 FAX. 81-3-6404-2172

5201 Great America Parkway, Suite 238,Santa Clara, CA 95054, USA
TEL. 1-408-747-5546
FAX. 1-408-747-5726

202 MG Amagasaki Ekimae Bldg., 21 Misono-Cho, Amagasaki-shi,
Hyogo 660-0861, Japan
TEL. 81-6-6413-4177 FAX. 81-6-6413-4188

TAIWAN REPRESENTATIVE OFFICE

3F-1, No. 38, Beida Rd., East Dist.,
Hsinchu City 30044, Taiwan (R.O.C.)
TEL. 886-3-542-0110
FAX. 886-3-542-0551

Chukyo Branch Oﬃce

KITZ CORPORATION OF SHANGHAI

Ozeki-Heights 1F, 1-12-13 Unomori, Yokkaichi-shi,Mie 510-0074, Japan
TEL. 81-59-350-8121 FAX. 81-59-350-8122

Rm. 1701-1704, No.3000, North Zhongshan Rd., Putuo Dist.,
Shanghai 20063, China
TEL. 86-21-5243-5025 FAX. 86-21-6439-1257

Kyushu Sales Oﬃce

KITZ SCT CORPORATION OF KUNSHAN

Nitta SC Factory

KITZ SCT CORPORATION OF KUNSHANZ•S Fukuoka Bldg. 4F, 3-4-2 Higashihie, Hakata-Ku, Fukuoka-shi,
Fukuoka 812-0007, Japan
TEL. 81-92-483-0185 FAX. 81-92-483-0186

8-3, No. 3 Road, Export Processing A Zone,
Kunshan Jiangsu 215300, China
TEL. 86-512-5735-0700 FAX. 86-512-5735-7500

150-2 Nittakane-Cho, Ota-shi, Gunma 370-0352, Japan
TEL. 81-276-60-9600 FAX. 81-276-60-9330

BRANCH FACTORY

Bldg. 9, No. 68, Taoyuen Rd., Export Processing B Zone,
Kunshan Jiangsu 215300, China!

Caution

Product speciﬁcations and performance values described in this catalog are based on our design calculations, in-house testing, product usage performance, and public standards and speciﬁcations,and are posted as a user’s guide under general usage conditions of the product. If the product is used outside of the described usage conditions or under special usage conditions, you should receive
our technical advice in advance or it will be necessary to ﬁrst conduct research and evaluation for performance veriﬁcation at the users’ own responsibility. Even if physical or personal damage
occurs without use of this procedure, we shall assume no responsibility. Although this catalog has been edited with the utmost care possible, contact us if there are any unclear points or if you comeacross any questionable matter. In addition, information described in this catalog will be revised without notice due to reasons that include correction of errors, supplementation/improvement ofinsuﬃcient content, improvement in product performance, design change, and discontinuation of production of products, etc., when deemed necessary. This invalidates the product catalog of theprevious version. The issue code is described on the back of your catalog. For product selection, contact us to conﬁrm whether your catalog is the latest version.
In addition, when exporting our products, exporters should obtain an export permit from the Ministry of Economy, Trade and Industry based on the provisions of the Export Trade Control Order of the“Foreign Exchange and Foreign Trade Act.” Contact us regarding any unclear points.

20.12①