Semiconductor and FPD
Related Products

The NICHIAS product family, fulfilling advanced needs forsemiconductor and FPD production
Materials used in clean rooms or in semiconductor/FPD manufacturing equipment must be highly clean andable to withstand diverse usage environments. Both contamination of materials and chemical contaminationof the ambient atmosphere are factors that have an important impact on process.
TM

NICHIAS offers a wide variety of fluoropolymer (NAFLON ) products with excellent chemical-resistance andhigh purity. NICHIAS also offers rubber products that can be used under more severe conditions and filter
products that allow a clean environment, providing solutions to every problem.

Examples of the application to semiconductor/FPD
manufacturing process

Explanatory notes for customers

Index

The following signs and abbreviations are used in this catalogue.
●

O-RINGTOMBO No.2670-BNX/2680-BNX BLAZERTM NEXT ……… 2
TM

The product might fall into the category of goods to be controlled by Foreign
Exchange and Foreign Trade Law. If it does fall into this category, export
permission will be required in accordance with the law.
TM

●PEEK
PEEKTM is a trademark of Victorex, Inc. (United Kingdom).
●Fluoropolymer Engineering Plastic
PTFE
PFA
FEP
PVDF
ETFE

Poly-tetra-fluoro-ethylene (tetra fluoride)
Perfluoro-alkoxyl-alkane
Perfluoro-ethylene-prolylene copolymer(tetra, hexa-fluoride)
Poly-vinyliden-fluoride (difluoride)
Ethylene-tetra-fluoro-ethylene

PCTFE
PEEK
PPS
PEI
PES
PI

Poly-chloro-trifluoro-ethylene
Poly-ether-ether-ketone
Poly-phenylene-sulfide
Poly-ether-imide
Poly-ethyl-sulfone
Poryimide* TOMBO is a registered trademark or trademark of NICHIAS Corporation.
* All brand names and product names are trademarks or registered trademarks of NICHIAS
Corporation.

TOMBOTM No.2675-A/2685-A BLAZERTM-A ………………… 2
TOMBOTM No.2670-PFW/2680-PFW
Perfluoroelastomer PFW ……………………………………… 2
O-Ring Selection Guide for Semiconductor
Manufacturing Processes …………………………………… 3

HEATING DEVICESTOMBOTM No.9501/9501-HS
CRYSTAL HTM/CRYSTAL HTM Super …………………………… 4
TOMBOTM No.9502-A, B In-Line Heater (Lamp type) ……… 5

CONTAINERS
TM………… 6TOMBO No.9947 PFA Roto Molded Container

TOMBOTM No.9947-T NAFLONTM PFA
Roto Molded Tank…………………………………………… 6

High Purity Chemicals
Manufacturing Process

Use Point●BLAZERTM-A …………………………… 2●CRYSTAL HTM/CRYSTAL HTM Super … 4

FABRICATED PRODUCTS●Perfluoroelastomer PFW …………… 2●In-Line Heater (Lamp type) ………… 5

TOMBOTM No.9500-M, -H NAFLONTM PTFE Sink …………… 8●NAFLONTM Tube (PTFE/PFA/FEP) … 10

●NAFLONTM PTFE Sink ……………… 8

TOMBOTM No.9023 NAFLONTM Welded Products●NAFLON PFA-HG Tube …………… 11●NAFLONTM Welded Products

TOMBOTM No.9024 PEEKTM Fabricated Products …………… 8●NAFLONTM PFA-SG Tube …………… 12●PEEKTM Fabricated Products ………… 8●NAFLON PFA-AS Tube …………… 12●NAFLONTM Injection Molded Products … 9●NAFLONTM PFA-NE Tube …………… 13●NAFLONTM Machined Products ……… 9●NAFLONTM BT Tube………………… 13●NAFLONTM Bubbler …………………… 9●Fluoropolymer Lining……………… 16

TM

TM●NAFLONTM Bent Tube

TOMBOTM No.9948 NAFLONTM PFA Chemicalware ………… 7……… 8……………… 15●NAFLONTM Tube Connector ………… 15

Supply of High Purity
Chemicals to Use Point●PFA Roto Molded Container……… 6●NAFLONTM

PFA Roto Molded Tank…………… 6

●NAFLONTM Tube (PTFE/PFA/FEP) … 10………… 8TOMBOTM No.9021 NAFLONTM Injection Molded Products … 9
TOMBOTM No.9020 NAFLONTM Machined Products ………… 9
TOMBOTM No.9087 NAFLONTM Bubbler ……………………… 9

TUBE/TUBE FABRICATED PRODUCTS
TOMBOTM No.9003 NAFLONTM Tube (PTFE/PFA/FEP)……10

TOMBOTM No.9003-PFA-HG NAFLONTM PFA-HG Tube……11

Process and Transportationof Chemical Waste

TOMBOTM No.9003-PFA-SG NAFLONTM PFA-SG Tube……12

TOMBOTM No.9003-PFA-AS NAFLONTM PFA-AS Tube……12

●PFA Roto Molded Container

TOMBOTM No.9003-PFA-NE NAFLONTM PFA-NE Tube

……13

……… 6

TOMBOTM No.9003-BT NAFLONTM BT Tube …………………13●NAFLONTM…………… 6TOMBOTM No.9003-DPL NAFLONTM DPL Tube ………………14……………… 16

TOMBOTM No.9003-RPL NAFLONTM RPL Tube ………………14●NAFLONTM PFA-SG Tube …………… 12●ETFE Roto Lining …………………… 17

TOMBOTM No.9055-PFA/PTFE NAFLONTM Bent Tube ………15●NAFLONTM PFA-AS Tube …………… 12●NAFLONTM Coating

TOMBOTM No.9510 NAFLONTM Tube Connector

PFA Roto Molded Tank

●NAFLONTM PFA-HG Tube …………… 11●Fluoropolymer Lining………………… 17……………15●NAFLONTM PFA-NE Tube …………… 13●NAFLONTM BT Tube………………… 13●NAFLONTM DPL Tube ………………… 14

Heating tube equipment●NAFLONTM RPL Tube ………………… 14●NAFLONTM Tube Connector ………… 15●BLAZERTM NEXT ……………………… 2●ENETHERMOTM CR ………………… 18

Reception & Filtration ofHigh Purity Chemicals●ENETHERMOTM PH ………………… 18●BLAZERTM-A …………………………… 2

Air Cleaning

LININGS
Fluoropolymer Lining………………………………………16

TOMBOTM No.9966 ETFE Roto Lining………………………17

TOMBOTM No.9035 NAFLONTM Coating……………………17

INSULATORS/HEATERSTOMBOTM No.4500-CR ENETHERMOTM CR …………………18●Perfluoroelastomer PFW …………… 2

TOMBOTM No.4500-PH ENETHERMOTM PH …………………18●NAFLONTM PFA Chemicalware ……… 7●SOLVENT CLEANTM ………………… 19

HONEYCOMB FILTERS●NAFLON Tube (PTFE/PFA/FEP) … 10

●HONEYCLE -ZCH2 ………………… 19

TOMBOTM No.8805-SC SOLVENT CLEANTM …………………19●NAFLONTM PFA-HG Tube …………… 11●HONEYCOMB WASHERTM ………… 20

TOMBOTM No.8803-ZCH2 HONEYCLETM-ZCH2●NAFLON PFA-SG Tube …………… 12●CHEMICAL GUARDTOMBOTM No.8805-HW HONEYCOMB WASHERTM …………20

TM

TM●NAFLONTM PFA-AS Tube …………… 12

TMTM……………… 21……………19

TOMBOTM No.8803 CHEMICAL GUARDTM ……………………21●NAFLON PFA-NE Tube …………… 13
TM………………… 13

Analysis Technologies …………………………………………22●NAFLON DPL Tube ………………… 14

Warnings and cautions for handling products ………………23●NAFLONTM BT Tube
TM

●NAFLONTM RPL Tube ………………… 14●NAFLONTM Tube Connector ………… 15●Fluoropolymer Lining……………… 16

1

Heat resistant elastomer
O-RINGTOMBOTM No.2670-BNX/2680-BNX
TM

BLAZER NEXTBLAZERTM NEXT (BNX) O-rings provide good sealing effect

Test result of compression set

with its excellent heat resistance, for high temperatureapplications where other elastomer O-rings are difficult to use.

１００

●Heat Resistance Guideline : 315˚C●Hardness (Durometer Type A): 76●Small compression set at high temperatures, and long-term
stable sealing performance is expected.

Compression set (%)

９０

Features

８０
７０

BNX
Competitor A
Competitor B

６０
５０
４０
３０
２０

Applications●Seals for heat treatment equipment which requires heat

１０１０etc.) which is subject to fluorine radicals environment.

Test Condition●Test specimen: O-ring (AS568-214, φ3.53× ID24.99mm)●Temperature: 300˚C●Compression rate: 19% (RT), 25% (300˚C)

Chemical resistant elastomer

TOMBOTM No.2675-A/2685-A
TM

BLAZER -A
Excellent in chemical resistance and has proven chemical
resistance against polar solvents such as amine, organic acids,
etc for which other types of fluoroelastomers cannot be used.

Features●Heat Resistance Guideline : 190˚C●Hardness (Durometer Type A): 75●Excellent chemical resistance, and can be used for almost
any chemical (with the exception of fluorine solvents)

Applications●Seals for cleaning equipment, coaterdevelopers, wet
etching equipment.

Plasma resistant elastomer

TOMBOTM No.2670-PFW/2680-PFW

Perfluoroelastomer PFW
PFW is white perfluoroelastomer O-ring with excellent plasma
resistance.

Features●Heat Resistance Guideline : 200˚C●Hardness (Durometer Type A): 70●Less weight reduction when exposed to plasma, andexcellent plasma resistance.

Applications
2●Seals for plasma etching equipment, plasma CVD equipment.

１０００
Period (hr)resistance. (Annealing furnace, LPCVD system,etc.)●Seals for CVD equipment (Plasma CVD, LPCVD system,

１００

１００００

Process

DeviceApplications

Recommended Material

Material Features

Oxidation/
Diffusion furnace

Furnace casing seals

BLAZERTM NEXT…… Exceptional heat resistanceand reduced gas emissions

CoaterChemical bath line seals

BLAZERTM-A…… Exceptional solvent
resistance and purity
characteristics

Developer

Chemical bath line seals

BLAZERTM-A…… Exceptional solvent
resistance and purity
characteristics

Plasma etchingsystem(Chamber lids, view ports, etc.)

Perfluoro PFW…… Exceptional plasma
resistance characteristics

Plasma etching system(Chamber lids, view ports, etc.)

Perfluoro PFW…… Exceptional plasma
resistance characteristics

Heat diffusion system
Ion injection system

Inner chamber seals

BLAZERTM NEXT…… Exceptional heat resistanceand reduced gas emissions

BLAZERTM NEXT…… Exceptional heat resistanceand reduced gas emissions

O-RING

O-Ring Selection Guide for Semiconductor Manufacturing Processes

Oxidation/Diffusion
Oxide Film

Wafer

Lithography●Resist Coating

Resist●Development

Etching●Dry Etching
Inner chamber seals●Ashing
Inner chamber seals

Ion Implantation

Thin Film Desposition
Film

Low pressure CVD systems
Inner chamber seals
Metal CVD systems(Chamber lids, view ports, etc.)
Plasma CVD systems
Spattering systems
Exhaust seals

Planarization

CMP systems

Inner chamber seals
Chemical bath line seals

BLAZERTM-A…… Exceptional solvent
resistance and purity
characteristics

BLAZERTM-A…… Exceptional solvent
resistance and purity
characteristics

Cleaning

Cleaning equipment

Chemical bath line seals
Filter seals

3

TOMBOTM No.9501/9501-HSTM

TM

CRYSTAL H / CRYSTAL H Super
CRYSTAL HTM is a constant temperature-controlled bathconsisting of a high-purity transparent quartz tank withstamped heating elements on all side walls and the bottom of

HEATING DEVICES

the tank. It ensures stable temperature control in any range
from ambient up to max (200˚C).
The service temperature is 200˚C for CRYSTAL HTM and 300˚C
for CRYSTAL HTM Super. CRYSTAL HTM Super, which allows arapid heat-up time, is especially suitable for phosphoric acidcleaning in nitride film removal processes.
The enclosure, made of PVDF (Poly-vinyliden-fluoride),affords resistance to chemicals and atmospheric conditions.

Features

Specifications■The quartz bath has heating elements on all side walls
and the bottom of the tank, providing many

Type CRYSTAL HTM Super

Item

Maximum temperature forcontinuous use (˚C)

advantages.

200
2●Rapid heat-up time

●Accurate temperature control

Watt density of heater (w/cm )Maximum service temperatureof heater (˚C)

●Uniform heat distribution●Spacious interior

Enclosure material●Contamination free since the bath is heated from outside●Safe operation*Note that at more than 150˚C phosphoric acid will react

CRYSTAL HTM

2.0

1.5

300

200
PVDF, PVC, SUS

Overflow type, single typeType of Tank

* Products for 100V and 200V available* Please ask us about detailed specifications for individual design.
* Please prepare the quartz tank used for this product by the customer.

with quartz (corrosion).

Applications●Temperature control of chemicals used for semiconductor
cleaning equipment

Heat-up Properties■Fluid: Water■Fluid: Phosphoric Acid
180

CRYSTAL H Super
actual fluid temp.

Temperature (˚C)

Temperature (˚C)

100

CRYSTAL H
actual ﬂuid temp.

50

150
100
50
0

0

10

20

30

20

●Fluid mass: 21 Liters●Heating value: CRYSTAL H …4280W (nominal) 3530W (in operation)
CRYSTAL H Super …5700W (nominal) 4700W (in operation)●Room temp.: 23˚C
* The above values are actual measurement values, not specification values.

30

40

50

60

70

80

90 100Time (min)40Time (min)410●Fluid mass: 20 Liters●Heating value: CRYSTAL H …5500W (nominal) 4600W (in operation)●Room temp.: 25˚C
* The above values are actual measurement values, not specification values.

TOMBOTM No.9502-A, B

In-Line Heater (Lamp type)
The In-Line Heater (Lamp type) is heating equipment for DI
water or chemical water. It consists of a halogen lamp heater
around the double quartz pipe through which fluid runs. Using

HEATING DEVICES

a halogen lamp as a heat source allows excellent heat-up
capabilities.
There are two types (A and B) depending on the direction of
the port and the locations of the fluid inlet and outlet.

Features

Dimensions●As all components coming into contact with fluid are madeof high-purity quartz, there is no contamination.
●Halogen lamp allows rapid heat-up and easy control.

Model type

Product dimensions (W×H×D)

Type A

240×196×530

Type B

240×200×515●Heater can easily be replaced without draining fluid (easymaintenance)●Heater can easily be fitted into a system, since it is small.

Applications●Temperature control of chemicals used for semiconductor
cleaning equipment

Specifications
Model
type

Insertion of
halogen lamp

Type AOne side

Maximum
Location ofservice
fluid inlet andoutlettemperature (˚C)

Electric
capacity(v·kW)

Enclosurematerial

Maximum
Pipe
Appliedacceptable innerdimension
volume ofpressure MPa(mm)fluid (liter/min)(kgf/cm2)

2

SelfextinguishingPP

φ20×φ14

One side
180

Type B

Number ofpasses

One side200·6

Both sides

1

5〜40

0.5
（5）

* Heathers with 4 and 5 kW capacity are available in addition to 6 kW.
* Alarm outputs: excessive heat sensor, leak sensor* Maximum service temperature depends on the type of fluid used.

Heat-up Properties■Heat-up Properties (DI water)■Heat-up Test with Phosphoric Acid
Please note that phosphoric acid at more than 150˚C will react with quartz (corrosion).

W
６k
W
５k
W
４k
50

Heating conditions
Fluid: DI water
Fluid mass: 32 liters
Flow: 10 liters/min
Setting temperature: 95˚C
Heater output: 6kW

180
150
Temperature (℃)

Temperature (℃)

100

Heating conditions
Fluid mass: 32 liters
Flow: 10 liters/min
Setting temperature: 180˚C
Heather output: 6kW

100

50

20
0

10

20

30

40

50

Time (min)* The above values are actual measurement values, not specification values.

0

30

60

90

Time (min)* The above values are actual measurement values, not specification values.

5

TOMBOTM No.9947

PFA Roto Molded Container
PFA Roto Molded Containers are made from pure PFA with arotational molding method. Screw caps are made from PTFE.
Couplers, connectors, and so on can be fitted to the caps onrequest. They can be sealed with O-Rings.

Features●Seamless one piece structure provides good heat and pressure
resistance.
●Low initial mold cost for special order, so suitable for small
production of various models.

Specifications
CONTAINERS●Capacity
Round bottles: 2 liters, 3 liters, 5 liters, 8 liters, 15 liters, 50 liters, 100 liters* Regarding service temperature for each case, please consult.

Applications●Chemical dispense, storage and weighing tank of semiconductor
manufacturing equipment

Dimensions●Maximum available dimensions: φ700×700H●Standard sizes
H

O.D.

Pressure resistance

(mm)

(mm)

MPa
｛ kgf/cm2｝

2 liters

238

125

3 liters239

155

5 liters

282

186

8 liters

275

237

15 liters

435

245

50 liters

590

400

100 liters

725

490

0.1
｛1.0｝

0.19*
｛1.9｝

* The 50-liters and 100-liters containers are designed to be used with an outer casing.
Please ask us about other capacities and shapes.

TOMBOTM No.9947-T
TM

NAFLON PFA Roto Molded Tank
NAFLONTM PFA Roto Molded Tank is a tank for the supply, storage,
and transportation of chemicals, with a single-piece PFA containeron the external SUS can.
The parts in contact with the liquid are made from one-piece
PFA-HG to provide a smooth surface. In addition, the lack ofwelded parts enables efficient washing.

Applications●Tank for chemical dispense, storage and transfer

Specifications●Standard capacities: 100 liters, 200 liters, 400 liters, 500 liters, 800
liters, 1000 liters●Maximum service temperature: 50˚C

6

TOMBOTM No.9948
TM

NAFLON PFA Chemicalware
NALFONTM PFA Chemicalware is a blow-molded PFA
container. It is suitable for use as a high purity chemical
container since almost no impurities dissolve out into theliquid in use.

Features●Almost no impurities dissolve out into the liquid in use.
●Transparency allows easy confirmation of the volume ofliquid.
●More shock-resistant than glass.

CONTAINERS

Applications●Container for highly pure chemicals* Regarding service temperature for each case, please consult.

Specifications

PFA
Narrow Mouth
BottlesD
C

Screwed cap:
PFA

Inner cap: PTFE

B

Body: PFAA

PFA
Wide Mouth
BottlesD
C

Screwed cap:
PFA

Inner cap: PTFE

B

Body: PFA

Model
numberCapacity
(mℓ)

A
(mm)

B
(mm)

C
(mm)

D
(mm)

N-20

20

28

62

φ12

φ25

50

50

48

67

φ17

φ32

100

100

48

105

φ17

φ32

250

250

61

132

φ17

φ32

500

500

74

165

φ17

φ32

1L

1000

95

203

φ25

φ41

2L

2000

129

245

φ37

φ56

3L

3000

146

265

φ37

φ56

5L

5000

172

330

φ37

φ56

10L

10000

230

360

φ37

φ56

Model
numberCapacity
(mℓ)

A
(mm)

B
(mm)

C
(mm)

D
(mm)

W-20

20

26.5

60

φ14.5

φ27.5

100

100

48

105

φ25

φ41

250

250

61

136

φ25

φ41

500

500

74

177

φ37

φ56

1L

1000

95

214

φ37

φ56

Model
numberCapacity
(mℓ)

A
(mm)

B
(mm)

C
(mm)

D
(mm)

E
(mm)

WN-100

100

48

105

φ17

φ32

φ6

250

250

61

132

φ17

φ32

φ6

500

500

74

165

φ17

φ32

φ6

1L

1000

95

203

φ25

φ41

φ6

A

Tube: PFA

E
Inner cap:
PTFE

D
C

Screwed cap:PFA

* PFA Wash Wide Mouth Bottles are also available (manufacturing
number: WW-100, 250, 500, 1 liter)

Body: PFAB

PFA
Wash Narrow
Mouth Bottles●Please ask us about other sizes and chemicalware not listed on
this catalogue.
A

7

TOMBOTM No.9500-M, -H
TM

NAFLON PTFE Sink
There are two types of NAFLONTM PTFE Sink. "Molded Seamless PTFE Sink
(TOMBOTM No.9500-M)" is a one-piece sink manufactured by isostatic molding.
"Welded PTFE Sink (TOMBOTM No.9500-H)" is made by welding sheets in 7~25
mm thickness. Both can be designed with any flow gradient and drain opening.
Welded type offers greater freedom in its design and size.

Features●Our unique welding technology (welding structure) and strict quality control
ensure the high reliability of welded parts.

Specifications

Dimensions●Maximum service temperature: 80˚C

Applications●Chemical storage●Maximum size available (Molded Seamless PTFE Sink):
Square type: 700×500×500Hmm Round type: φ700×500Hmm (φ500×700Hmm)●Thickness
Molded Seamless PTFE Sink: 15~50mm Welded PTFE Sink: 7~25mm* Please ask us about the Welded PTFE Sink.

●Wafer processing tank

TOMBOTM No.9023
TM

FABRICATED PRODUCTS

NAFLON Welded Products
NAFLONTM Welded Products are products made of welded fluoropolymer (PTFE,
PFA, PVDF) for many purposes. They can be fabricated in a variety of forms,
ranging from pump and valve parts to manufacturing parts for semiconductor/FPD.

Features●Fabrication in a clean environment enables us to supply high quality products.
●Our unique welding technology enables the production of products for specificpurposes.

Applications●Parts for semiconductor or FPD manufacturing equipment

TOMBOTM No.9024
TM

PEEK Fabricated Products
PEEKTM abricated products not only have excellent resistance to chemicals and heat, butalso are made out of an extremely strong plastic, PEEKTM . PEEKTM is the most suitable
plastic for jigs, since the semiconductor production process requires metal-free materials.
By putting together the welding, machining, injection molding, and depositing
technologies we have developed over many years, we can now manufacture a variety of
PEEKTM products.

Features●Our original welding technology cultivated over many years ensures safe useof products.
●Our welding, machining, injection molding, and depositing technologies
enable us to assist you with holistic product design.

Specifications
8●Maximum service temperature: 240˚C

Applications●Parts for semiconductor or FPD manufacturing equipment

TOMBOTM No.9021
TM

NAFLON Injection Molded Products
NAFLONTM Injection Molded Products are manufactured by injection molding
fluoropolymers (PFA, ETFE, PVDF) and various super engineering plastics (PPS, PEEK,
PEI, PES, PBI) with advanced technology and under severe quality control. These
products can contribute to lowering the cost of products such as pump/valve parts,
manufacturing parts for semiconductor/FPD, and electronics parts in mass production.

Features●Highly engineered quality products molded in clean rooms.
●Machining and welding after injection molding are available.

Applications●Parts for Pump, valve, flow meter and parts for semiconductor or FPD
manufacturing equipment●Parts for Office automation equipment* Regarding service temperature for each case, please consult.

TOMBOTM No.9020
TM

NAFLON Machined Products
FABRICATED PRODUCTS

NAFLONTM Machined Products consist of fluoropolymer (PTFE, PFA, PVDF, PCTFEetc). Materials can be machined into a variety of forms for specific purposes.

Features●Highly engineered quality products molded in clean rooms.
●Our unique welding technology enables production of products for specific purposes.

Applications●Pump, valve and parts for semiconductor or FPD manufacturing equipment* Regarding service temperature for each case, please consult.

TOMBOTM No.9087
TM

NAFLON Bubbler
NAFLONTM Bubbler is a bubble generator made with PTFE with no additives
such as foaming agents. It generates bubbles of 40μm on average fromrandomly dispersed pores.

Features●Excellent resistance to chemicals since it is made with fluoropolymer.
●It generates bubbles with a major axis of 5~100μm (about 40μm on
average).
●Maximum service temperature is 100˚C.

Applications

Dimensions
Thickness (mm)Short form (mm)Round shape (mm)15~30

Not more than 400×400

Not more than φ400

* Effective area with pores.

■Shape of the bubbler: plate* Alcohol is used in the picture. Please note bubble size depends on the type of liquid.

Gas resistance pressure (MPa)

Range of use●For semiconductor or FPD manufacturing equipment

0.2

0.1

0.01
0

25

50

75

Temperature (˚C)

100

9

TOMBOTM No.9003
TM

NAFLON Tube (PTFE/PFA/FEP)
NAFLONTM Tubes are pure fluoropolymer tubes, and containno additives such as fillers or plasticizers. Each of the PTFE,
PFA, and FEP tubes has exceptional chemical-resistant,heat-resistant, and weather-resistant features.

Features●Exceptional anti-adhesive properties prevent most dirtying
and scaling.
●Almost no less of electrical properties under hightemperature, high humidity, and high frequency conditions,making these tubes excellent electrical insulators.
●Excellent Weather resistance.

Applications●For highly pure chemicals and pure water●Protection of wiring

Type●PTFE tubes can be made in a variety of colors.

Specifications●Maximum usage temperature : 260˚C (PTFE/PFA),
200˚C (FEP)* Please refer to the below "Maximum Usage Pressure" for the maximum usage pressure.

●ETFE tubes are available upon request.
* There may be slight difference of color tone for PTFE tubes depending on
production lot. (There is no quality issue.)* Please ask us for fluoropolymer tubes other than PTFE, PFA or FEP.

NAFLONTM Tube Room-Temperature Destructive Pressure and Mimimum Bend Radius■PFA/FEP Tube

■PTFE Tube

TUBE/TUBE FABRICATED PRODUCTS

Innner diameter(mm)

Outside diameter(mm)

Room-Temperature Destructive
Pressure (Mpa)

Mimimum Bend Radius (mm)Innner diameter(mm)

Outside diameter(mm)

Room-Temperature Destructive
Pressure (Mpa)

2

4

8.8

15

2

3

5.9

10

4

6

5.7

25

3

4

3.9

15
25

Mimimum Bend Radius (mm)

6

8

4.1

50

4

6

5.9

8

10

3.2

80

6

8

3.9

45

10

12

2.7

130

8

10

2.9

70

20

23

2.0

310

10

12

2.4

105

1.59

3.17

8.8

15

16

19

2.2

120

3.96

6.35

6.5

20

1.59

3.17

11.7

5

4.35

6.35

5.3

30

3.17

6.35

11.8

15

6.35

9.52

5.7

40

4.35

6.35

5.4

30

7.52

9.52

3.4

70

6.35

9.52

6.0

35

9.52

12.7

4.1

75

7.52

9.52

3.1

65

10.7

12.7

2.5

150

9.52

12.7

3.9

65

15.88

19.05

2.6

200

10.7

12.7

2.1

115

22.22

25.4

2.0

370

15.88

19.05

2.3

120

* The above values are calculated based on autually measured values and partly calculated values, so not the specification values.
* The minimum bend radius shows 1.2 times larger values than actually measured (calculated) values.

Maximum Usage pressure■Please only use our tubes at pressures bellow PU.T as determined by the following formula:TM
NAFLON PFA/FEP/PTFE Tube

●Tubes room temperature destructive
1
pressure
0.8●Destructive pressure decline coefficient
0.6*The destructive pressure decline
coefficient by material can be
0.4
obtained from the table to the right.
●Safety factor (1/3~1/5)
0.2*A safety factor of 1/3~1/5 is obtained0
according to the fluid type (gas or20
liquid), danger level and the existenceof impact pressure levels.
●Maximum usage pressure at a given temperature.
Destructive pressure
decline coefficient

P U.T ＝S×a×P R. T

10

PFA
PTFE

FEP

100
Usage temperature (˚C)

200

260

TOMBOTM No.9003-PFA-HG
TM

NAFLON PFA-HG Tube
NAFLONTM PFA-HG Tubes is made from "Super PFA", amaterial with low levels of eluted fluorine ions. By allowing
for control of the structure of PFA (miniaturization of
spherulites), this tube allows for further smoothing of theinner tube surface. This tube is prefect for use in the
manufacture of semiconductors and liquid crystal products,
where ultra-clean environments are required.

Features
In addition to the features of our standard PFA Tubes:■Smoothness of the tube inner surface is increased to
Rt=0.2μm.. (Rt is approximately equal to Rmax,
maximum height)●Reduced incidence of retained particles or chemicals●Reduced time required for cleaning●Reduced chemical permeation thanks to less inner▼NAFLON PFA-HG Tubes

surface area and higher crystallinity●Improved transparency●Longer performance as an insulator■Uses a Super PFA material▼Standard PFA Tubes●Reduction in eluted fluorine ions
●Resistant to cracking under stress conditions such as
exposure to SPM or fuming sulphuric acid
* Photo to compare transparency between NAFLONTM PFA-HG
Tube and standard PFA Tube (Our products' comparison)

TUBE/TUBE FABRICATED PRODUCTS

Specifications●Maximum usage temperature: 260˚C●Maximum usage pressure: Same as NAFLONTM PFA Tubes* Please refer to our catalogue, "NAFLONTM Tube" for maximum service pressure.

Applications●For highly pure chemicals and pure water▲Inner wall surface image of NAFLON PFA-HG Tube

Other Features■Metallic elution
Element

Amount eluted (μg)

K

<0.02

Na

<0.01

Ca

<0.01

Al

<0.02

Cr

<0.01

Ni

<0.01

Fe

<0.02

Cu

<0.01

* The values give above are intended as representative values, not standard values.
●Method of analysis:（1）
A 1m section of the φ10×φ12 NAFLONTM PFA-HG Tube to be tested was cut, thecut portion cleaned, and then the tube was washed in water.
（2）
Approximately 70 mℓ (length: 900mm) of hydrofluoric acid was added, and thetest material was allowed in water.
（3）
At the conclusion of the test period, the elution liquid was allowed to evaporate.
After nitric acid was added to the remaining liquid, the mixture was diluted withpure water, and frameless atomic absorption analysis was used to determine theamounts of each element contained in the elution liquid.

▲Inner wall surface image of general PFA Tube
(Other manufacturer's)■Comparison of Inner Surface Roughness With PFA Tubes
Units
SurfaceRoughness
（Rt）

(μm)

NAFLONTM Competitor Competitor
New
PFA-HG Tubes
A
B
PFA Tubes
0.2

0.8

0.8

0.8

* The values given above are intended as representative values, not standard values.
* Rt≒Rmax* Products from Competitor A and B are standaed PFA Tubes.

11

TOMBOTM No.9003-PFA-SGTM

NAFLON PFA-SG Tube
NAFLONTM PFA-SG Tube not only has all the features of our PFA-HG
Tube (smooth inner surface and stabilization of end group ofmolecules) but also ensures less permeation of chemicals and gases.
It is anticipated that this tube will be able to reduce chemical
contamination of ambient air and contamination by reverse
permeation of highly permeable chemicals, and that it can also
decrease permeable gasses in high temperature processes during
semiconductor/FPD manufacturing.

Features●Less permeation of chemicals.
Reduced permeation volume compared to PFA-HG (actual
values) …HCL, N2 gas, O2 gas: about 60%* Permeation volume of PFA-HG is roughly 50% less than that of ordinary PFA tubes.
(as far as HCL is concerned)●Little elution of fluorine ions …as little as PFA-HG Tube

Specifications●Maximum service temperature/pressure is the same

●Little elution of metal ions …as little as PFA-HG Tube

as PFA-HG Tube.

●Smooth inner surface …as smooth as PFA-HG Tube
●Excellent resistance to stress such as chemicals, heat, and●Destructive pressure at ambient temperature andpressure. …double the durability of PFA-HG Tube in terms ofminimum bending radius are the same as PFA-HG

bending life.

Tube.
●Maximum service temperature: 260˚C

Applications●For highly pure chemicals, pure water and highly permeable chemicals (hydrofluoric acid, hydrochloric acid, nitric acid,ozone, ammonia peroxide mixture, amine chemicals, fluorine surfactant, etc.)

TUBE/TUBE FABRICATED PRODUCTS

TOMBOTM No.9003-PFA-AS
TM

NAFLON PFA-AS Tube
The NAFLONTM PFA-AS Tube is constructed with a PFA conducting
stripe on both inner and outer surfaces of our PFA-HG Tube. This
tube can prevent destruction of the tube insulation during thetransport of organic solvents, fuels, refrigerant, powders, and vapors.
In addition, transparency allows checking the liquid inside the tube.

Features●As resistant to chemicals, heat, and weather as PFA Tube.
●Anti-static function prevents destruction of tube insulation.
●Free from spark discharge that could lead to ignition.
●Transparency allows checking the liquid running inside.

Specifications●Maximum service temperature: 260˚C (same as PFA Tube)

Material:
conductive PFA* Please refer to "Maximum Usage pressure of NAFLONTM Tubes" on page 10 for Maximum
usage pressure.

Applications●For refrigerant, flux, steam and organic solvent (stripping
liquid, acetone, IPA, thinner, etc.)

Properties
12●Electric resistance value of conductive part (applied voltage 500V): 5×106Ω/m

Material:PFA-HG

TOMBOTM No.9003-PFA-NE
TM

NAFLON PFA-NE Tube
NAFLONTM PFA-NE Tubes are constructed with a PFA
conducting stripe on surface of our PFA-HG tubing. Thanks
to the conducting PFA portion's shielding effect, these tubes
are excellent at preventing fires that could occur due tosparking between an atmosphere of transported flammablegases and the exterior surface of the tube.

Features●Prevents the release of sparks that could result in thestarting of fires.
●Prevents tube insulation damage that could result fromelectric release from an insulated atmosphere.

Exterior surface is a conductor
Material:
conductive PFA●No unsettling corrosion as with metallic wires and meshes.

Specifications●Maximum service temperature: 260˚C* Please refer to "Maximum Usage pressure of NAFLONTM Tubes" on page 10 for
Maximum usage pressure.

Fluid carrier
portionMaterial:PFA-HG

Applications●For ignitable organic solvent (stripping liquid, acetone, IPA, thinner, etc.)●For highly pure chemicals or gas transfer near precision electronics device which should avoid noise caused by static charge

Properties■Volumetric Resistance
Volumetric Resistance (Ω・cm)

Tube Type

Center of 1m Length
Tube0.5~0.7>2.00

5.3×102

PFA-NE Tubing>1018

PFA-HG Tubing（limit of measurement capability）* Method of measurement: As per JIS K 7194
* The values give above are intended as representativevalues, not standard values.

units:V

Center of 15m Length
Tube0.5~0.7

End of 15m Length Tube−−

0.5~0.7*Method of measurement: One end was grounded, and cotton rubbed 50 times along a 20cm span, either in thecenter or at the ends of the tube. Electric potential was then measured in the applicable area.
*The values give above are intended as representative values, not standard values.

TOMBOTM No.9003-BT
TM

NAFLON BT Tube

TUBE/TUBE FABRICATED PRODUCTS

Material
Conductive
PFA
PFA-HG■Anti-Static Features

NAFLONTM BT Tubes are a PTFE tube with added flexibility
and transparency. They bend easily and will not buckle,
making them perfect for application where tubing in tightspaces is required.

Features●Bends easily, and will not buckle.
●More transparent than normal PTFE tubing.

Specifications●Maximum service temperature: 260˚C* Please refer to "Maximum Usage pressure of NAFLONTM Tubes" on page 10 for
Maximum usage pressure.

Applications●For highly pure chemicals and pure water●For tubing arrangement in a narrow space

13

TOMBOTM No.9003-DPL
TM

NAFLON DPL Tube
In addition to the features of our NAFLONTM PFA Tube, NAFLONTM PFA-DPL
Tube has wavy grooves. It provides excellent flexibility, a small bending
radius, low friction, and non-adhesivity. It also allows minimum loss of fluid
from pressure and minimum attachment of fluid on the inner walls.

Applications

Features●Excellent flexibility●For highly pure chemicals and pure water●Little contamination of liquid in use●For tubing arrangement in a narrow space* Please ask us for movable tubing arrangement.

Specifications●Maximum service temperature: 150˚C* Please refer to our catalogue, "NAFLONTM Tube" for Maximum usage pressure.

Standard sizes/properties
NominalEnds (straight part)
diameter(1B)
Inside diameter (mm) Outside diameter (mm) Length (mm)Outside diameter (mm)Pitch (mm)Destructive
pressure atambient temp. (MPa)

Wavy part

Minimum bending Maximum length
radius (mm)available (m)

1/4

6.0

6.9

19

9.7

3.60

2.0

1.6

3.6

3/8

9.2

10.3

25

13.1

3.75

1.4

2.4

3.6

1/2

12.1

13.5

25

17.1

5.00

1.3

3.2

3.6

5/8

15.5

17.0

25

21.1

5.55

1.1

4.0

3.6

3/4

18.7

20.3

38

24.6

6.80

1.0

4.8

3.6

1

24.8

26.7

50

33.2

8.00

1.0

6.4

1.8

* The dimensions given above are standard values.
* The above values are actual measurement values, not specification values.

* Length of the straight part can be customized upon request.
* Inner pressure makes the pitch of the wavy part longer. Thus the minimum bending radius
gets larger, slightly affecting flexibility.

TOMBOTM No.9003-RPL
TM

NAFLON RPL Tube
TUBE/TUBE FABRICATED PRODUCTS

In addition to the features of our NAFLONTM PTFE Tube, NAFLONTM RPL
Tube has a spiral-shaped groove. This provides excellent flexibility, a small
bending radius, low friction, and non-adhesivity. It also allows minimum lossof fluid from pressure and minimum attachment of fluid on the inner walls.

Features

Applications●Excellent flexibility●For highly pure chemicals and pure water●For tubing arrangement in a narrow space* Please ask us for movable tubing arrangement.

Specifications●Maximum service temperature: 200˚C* Please refer to our catalogue, "NAFLONTM Tube" for Maximum usage pressure.

Standard sizes/properties

14■Standard inside diameter tube (I)■Standard outside diameter tube (O)Destructive
Minimum Maximum length
Nomina Inside diameter Outside diameter pressure
at ambient bending radiusavailable
diameter of ends (mm) of spiral part (mm) temp (MPa)
(mm)
(m)

Destructive
Minimum Maximum length
Nomina Inside diameter Outside diameter pressure
at ambient bending radiusavailable
diameter of ends (mm) of spiral part (mm) temp (MPa)
(mm)
(m)

6A

6

8.5

1.8

6.0

3.0

6A

6

8.5

1.8

6.0

3.0

8A

8

10.5

1.4

7.0

3.0

8A

8

9.5

1.6

7.0

3.0

10A

10

13.0

1.0

10.0

3.0

10A

10

12.0

1.3

9.0

3.0

12A

12

16.0

0.9

15.0

3.0

12A

12

14.5

1.0

10.0

3.0

15A

16

17.5

0.8

25.0

3.0

1/4B

6.4

8.5

1.8

6.0

3.0

1/4B

6.4

8.5

1.8

6.0

3.0

3/8B

9.5

12.0

1.3

9.0

3.0

3/8B

9.5

13.0

1.0

10.0

3.0

1/2B

12.7

14.5

1.0

10.0

3.0

1/2B

12.7

16.0

0.9

15.0

3.0

* Please refer to our catalogue, "NAFLONTM Tube" for the shape of the ends.
* The above dimensions are standard values. Please contact us separately about
lengths greater than 3m.
* The above values are actual measurement values, not specification values.

* Please refer to our catalogue, "NAFLONTM Tube" for the shape of the ends.
* The above dimensions are standard values. Please contact us separately about
lengths greater than 3m.
* The above values are actual measurement values, not specification values.

TOMBOTM No.9055-PFA/PTFETM

NAFLON Bent Tube
NAFLONTM Bent Tubes are created with a special bending
manufacturing process. This prevents leakage problems thatcan occur from the use of joints, and also helps to greatly
reduce loss of pressure.

Features●Far less loss of pressure as compared to the use of joints.
●No leakage problems.
●Reduces space required for piping.
●Usable at high temperature up to 150˚C.

Specifications●Maximum service temperature: 150˚C

Applications●For highly pure chemicals of semiconductor
manufacturing equipment, etc.
■Minimum Bend Radius and Measurement Variance
Inner Diameter ×
Outer Diameter (mm)Minimum Bend Radius(mm)

R variance(mm)

Bend Area Flatness(%)

Bent Area Thickness
(mm)

Angel
(˚)

4.35×6.35

10R

±2

≧85

≧0.8

±5

15R

±3

≧85

≧0.8

±5

20R

±4

≧85

≧1.3

±5

15.88×19.05

30R

±6

≧85

≧1.3

±5

* The values give above are intended as representative values, not standard values.

TOMBOTM No.9510
TM

NAFLON Tube Connector

TUBE/TUBE FABRICATED PRODUCTS

7.52×9.52
9.52×12.7

NAFLONTM Tube Connector is composed of connector body,union nut and a ferrule, and all are made with pure
fluoropolymer. It has high sealing performance under heat
cycles.

Features●High sealing performance can be maintained even underheat cycles.

Specifications●Maximum service temperature: 150˚C

Applications●Connection of PTFE or PFA Tubes

15

Fluoropolymer Lining
Fluoropolymer Lining is manufactured with ouraccumulated experience in processing
fluoropolymer and new technologies.
Compared to other common plastics,
fluoropolymer has excellent resistance tochemicals and heat. Also, it does notcontaminate the fluid since no additives such as
plasticizer or heat stabilizer are used formolding. This outstanding product can be used
in a wide range of fields from semiconductorrelated industries to petroleum chemistry, iron▲Ball Check Valve▲Ball Valve▲Diaphragm valve▲Bellows connector

manufacturing, food industries, or nuclear power
generation.

Applications●For highly pure chemicals and ultra pure waterof semiconductor manufacturing equipment,
etc.
●PFA-HG
Made of NEW-PFA material that has smoothsurface and low level of fluorine ion elution, used insemiconductor applications. Thanks to its smooth

Available Products

surface, cleaning time can be effectively shortened.
Also, since gas permeation level of PFA-HG is

Products

Material of lining
Product

about half of that of PFA, it can effectively reduce

Straight pipe

environmental stress crack (specially at the nozzle

Fitting

and welded part), deterioration of adhesion force
reverse permeation.

Valveand pollution of highly pure chemicals caused by●PFA
best fluoropolymer and can be used for many

VesselThis is a product with a PFA lining. PFA is the

PFA-HG

PFA

PTFE

＊

15A~300A−＊

15A~300A−

Diaphragm valve−

15A~150A−

Ball valve＊

15A~100A−

Ball check valve＊

20A~100A−

Sheet (loose)

◯

◯

−

Sheet (adhesion)

◯

◯

◯

Coating−◯−

purposes since it can be fusion molded like

Vessel accessories

◯

◯

−

general thermoplastics while having properties

Bellows/hoses

＊

◯

◯

equivalent to or better than PTFE. PFA is more

Please contact us regarding the products shown with an ＊.

LININGS

resistant to chemicals and heat than PTFE.
Moreover, PFA is twice as mechanically durable
as PTFE at a 250˚C tensile yielding point. The
continuous service temperature is 260˚C. In
addition, PFA is extremely pure. It does notinclude or dissolve out any impurities.
●PTFE
PTFE is widely known for its excellent resistanceto heat and chemicals, but it is not easily molded.
Thus, we offer bellows and hoses as standardized
products fabricated from tubes.

▲PFA chemical supply type (designed for semiconductor)

16

TOMBOTM No.9966

ETFE Roto Lining
Our ETFE Roto Lining is firmly attached to the metal surface
by a rotational molding method. Seamless lining on a basematerial in a complicated form is possible. This lining cannot
be used with high purity chemicals.

Features●We can handle more complicated forms, which are notpossible with sheet lining.
●We can ensure uniform thickness of the film, even with thick
film.
●ETFE can be firmly attached to the base material without
primer.
●We can ensure seamlessness by etching the ETFE powder
to the base material.
■What is ETFE?
ETFE is a thermoplastic of the copolymer of
Polytetrafluoroethylene (C2F4) and ethylene (C2H4). It hasproperties similar to other fluoropolymers, such as resistance tochemicals and heat, non-stickiness, and resistance to weather.
Compared to other fluoropolymers, it has low fusion viscosityand can be firmly attached to metal without primer. It is mostsuitable for a rotational molding method.

Specifications●Maximum service temperature: 100˚C* Please consult us for chemical-resistance, available size and others.

Applications●For storage of chemicals and waste fluid of semiconductor
manufacturing equipment, etc.

TOMBOTM No.9035
TM

NAFLON Coating
NAFLONTM Coating is an etching fluoropolymer used to makethe surface of a metal non-sticky and corrosion-resistant.
We will select from and process a wide range offluoropolymer materials depending on their purpose andintended use.

Dimension

Normal10~100260℃

possible200~700

260℃

applicable

Normal

10~50

260℃

not applicable

Normal10~100200℃

possibleThick film
LowtemperatureHigh
temperature

200~700

200℃

applicable

5~100

150~200℃

not applicable

5~100

200~260℃

not applicable

Normal20~100150℃

possibleThick film

200~1000

150℃

applicable

FEP
Modified
type

ETFE

PVDF

Upper
Applicability fortemperature
Pinhole-free
limit
film

Thick film

PFA
PTFE

*Thickness of
coating film(μm)

Normal20~100135℃

possibleThick film

200~800

135℃

applicable

Laminated

1000~1500

135℃

applicable* Coating film is a coated item, so the thickness ranges ± 30% compared to the indicated value.
We can finish coating with MIN (-0) for specific thickness of film upon request.

LININGS

Type of plastic

Applications●Corrosion-resistant coating of semiconductor manufacturing
equipment, etc.

17

TOMBOTM No.4500-CR
TM

ENETHERMO CR
ENETHERMOTM CR helps improve the operational
environment of plants for semiconductor related equipment,
food, and precision equipment where cleanliness is a priority.

Features●Low dust characteristics enable usage in a clean room.
(class 1000)●Detachable●Excellent insulation efficiency●Can be designed to fit in equipment.

Applications▲Clean room

●Semiconductor manufacturing equipment●Heat retention and insulation of radiating equipment●Valves●Prevents burns from radiating equipment

Specifications●Fluoropolymer coating glass cloth with low dust
characteristics is used.
●Maximum service temperature: 200˚C▲Used for injection molding machine* Never use this product under conditions which could exceed the maximum temperature
indicated in this catalogue.

TOMBOTM No.4500-PH
TM

ENETHERMO PH
ENETHERMOTM is a detachable jacket heater for pipe heating
and insulation in a clean room.
We can offer installation of heaters, control panel settings,
second wiring, etc. upon your request.

Features●Detachable●Low dust characteristics●Maximum service temperature: 200˚C (A heater for higher
temperatures is also available)●Low out gases (It is confirmed no Siloxane is generated)

Applications●Heating devices and pipes related to semiconductor/liquid

INSULATORS/HEATERS

crystal fabrication equipment:･Ensures discharging lines of CVD, dry etching equipment are
not deposited.
･Ensures charging lines of CVD, dry etching equipment are notliquidized.
･Heats pipes of dry pumps, exhaust gas treatment equipment.
●Heating pipes related to food processing equipment

18

TM

SOLVENT CLEAN
Organic solvents emitted to the atmosphere have negative
impacts on the human body and the global environment.

HONEYCOMB FILTERSTOMBOTM No.8805-SC

Previously, large volumes of gases containing low
concentrations of volatile organic compounds (VOC) were
emitted to the atmosphere because of the difficulty in processing
them. Now, SOLVENT CLEANTM concentrates these
VOC-containing gases and reduces their volume. The combinationof SOLVENT CLEANTM and existing processing equipment(combustion method, collection method, etc.) enables the efficient
processing of VOC which used to be emitted to the atmosphere.
* VOC=VOLATILE ORGANIC COMPOUND

Features●Simple structure of whirling type rotor allows easy
maintenance.
●Organic solvents can continuously be concentrated.
●Suitable for processing gases of low concentration andlarge volume, keeping the running cost low.
●Use of hydrophobic zeolite as the absorbent ensuresnon-combustibility.
●Applicable to the processing of a wide variety of organic
solvents.
●Allows about 3~15 times concentration.

Application●Concentration of organic solvent of low concentration
emitted during semiconductor manufacturing and LCD
manufacturing.

TOMBOTM No.8803-ZCH2
TM

HONEYCLE -ZCH2
HONEYCLETM-ZCH2 is a honeycomb ozone removal filter
developed to remove high concentrations of ozone. As highperformance catalyst is incorporated inside the paper, evenhigh concentrations of ozone can be decomposed.
* High concentration ozone: 200ppm, or less. Contact us directly for products dealing
with even higher concentrations.

Features●As the catalyst is fully penetrated into the paper walls, it ispossible to decompose ozone at high concentrations.
●Less deterioration and longer service life than activatedcarbon because it is a reactive catalyst type with highdecomposing efficiency.
●A variety of cell type and filter dimension is service
available.
* Service life and performance are subject to design specihication.

Application●Equipment generating high concentration ozone●Semiconductor products, ozone washing products, ozone
sterilizing products, corona discharge treatments

19

HONEYCOMB FILTERSTOMBOTM No.8805-HW
TM

HONEYCOMB WASHER
Clean as ever environments are required for the mostadvanced semiconductor industries. The HONEYCOMBWASHERTM made by NICHIAS is a system which removes
water soluble gases (Nox, Sox, and NH3) existing in outside
air or a clean room. The HONEYCOMB WASHERTM is an ideal
system which removes chemicals with excellent performance,
lower pressure loss, compact space and lower power
consumption, in comparison with a conventional water spraysystem.

Features●High chemical removal performance
By employing our unique porous ceramic, the HONEYCOMBWASHERTM holds water to the inner part of wall and maintains ahigh chemical removal performance.
●Low pressure drop
The honeycomb construction of highly water adsorptive
performance eliminates water dropping, does not require an
eliminator and minimizes pressure drop of the whole system.
●Low energy consumption
In comparison with conventional air washer, the HONEYCOMBWASHERTM reduces circulated water by 80% and reduces
circulation pump power. energy consumption effect: consumed
power is 50% down.
●Compact space
The width of system can be reduced to more than 50% of aconventional air washer.

Applications●Installed on the outdoor unit of air conditioners in asemiconductor manufacturing factory.
Removal of water soluble gases from outside air / humidificationof air taken into a clean room.
●Installed on the outdoor unit of air conditioners in a FPD
manufacturing factory.
Removal of water soluble gases from outside air / humidificationof air taken into a clean room.

Basic Process Flow

Fan

HEPA Filter

Heating Coil

Cooling Coil

Medium Performance
FilterPre-filter

20

HONEYCOMBWASHERSTM

CHEMICAL GUARDCHEMICAL GUARDTM is a low concentration gas removal
chemical filter for Clean room, Semiconductor & FPD production

HONEYCOMB FILTERSTOMBOTM No.8803

tools.
CHEMICAL GUARDTM is designed for removing a wide range ofbasic gas, acid gas and organic gas.

Model
Product Name

Target Gas

TOMBOTM No.8803-HC

Basic Gas

TOMBO No.8803-HA

Acid Gas

TOMBO No.8803-HT

Organic Gas

TM

TM

Features●Honeycomb structure that has a larger surface area allows●Low out gassing and dust

superior removal efficiency.

Consisting of the raw materials which have low out gassing and

A great adsorption capacity achieves longer service life.

less dusts achieves high cleanliness.

●Dimensional advantage●Laminar airflow

High removal efficiency and long life time makes thin filter

The honeycomb structure supplies laminar airflow anddesign.

contributes to the long service life.
●Design flexibility
Design dimension, service life, removal efficiency ratio etc
flexibly for requirement.

Applications●Remove low concentration gas from the clean room or manufacturing tool for Semiconductor and FPD.

21

Analysis Technologies
Thermal diagnostics
Thermographic imaging provides a quantitative

ANALYSIS TECHNOLOGIES

understanding of the distribution of the amountof emitted heat and calculates the level ofdegradation. The pattern of the image alsoenables estimating the shape of the open
space of an insulator.

Gas analysis

Inorganic component

Air in a clean room or in the manufacturing
equipment is taken as sample, and metalcomponents, inorganic components, andorganic components are analyzed.
Contamination levels in the manufacturing
environment can be read and the functioning ofchemical filters can be confirmed.

Sampling Kit

Ion Chromatograph

Organic component

Sampling Kit

Main analytical equipment●X-ray Diffraction (XRD)●X-ray Fluorescence Analysis (XRF)●Inductively Coupled Plasma - Atomic
Emission Spectrometer (ICP-AES)●Thermo Gravimetric/Differential Thermal
Analysis (TG/DTA)●Differential Scanning Colorimetry (DSC)●Fourier Transform Infrared Spectrophotometer(FT-IR)●High Performance Liquid Chromatography(HPLC)

22

Gas Chromatograph Mass SpectrometerCautions for handling products* Please use products within the permissible temperature range specified in the catalogue.
* Please refer to MSDS (material safety data sheet) when using products.
* Please dispose of products in accordance with applicable lows for waste disposal in each country.
* When selecting or using our products, please refer to the details or cautions indicated in the relevant catalogue in the following list.
Item

O-Rings

Containers"O-Ring"

BLAZERTM-A"O-Ring""O-Ring"

Perfluoroelastomer PFW"O-Ring""O-Ring"TM

CRYSTAL H /CRYSTAL H Super"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

In-Line Heater (Lamp type)"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

PFA Roto Molded Container"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLONTM PFA Roto Molded Tank

"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLONTM PFA Chemicalware"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLON PTFE Sink

"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLONTM Molded Products"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

PEEKTM Fabricated Products"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLONTM Injection Molded Products"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLONTM Machined Products"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLON Bubbler"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLONTM Tube (PTFE/PFA/FEP)"NAFLONTM Tube""NAFLONTM Tube"

TM

TM

TM

"NAFLONTM Tube"

TM"NAFLON Tube""NAFLONTM Tube"

NAFLONTM PFA-AS Tube

"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLONTM PFA-NE Tube

"NAFLONTM Tube""NAFLONTM Tube"

NAFLON PFA-HG Tube
TM

NAFLON PFA-SG Tube

Tube/
Tube FabricatedProducts

TM

NAFLON BT Tube
TM

NAFLON DPL Tube
TM

Linings

Insulators/Heaters"NAFLON Tube"

TM"NAFLONTM Tube"

TM"NAFLONTM Tube"

TM"NAFLON Tube""NAFLON Tube"

NAFLON RPL Tube

"NAFLON Tube""NAFLONTM Tube"

NAFLONTM Bent Tube

"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLONTM Tube Connector"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

Fluoropolymer Lining"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

ETFE Roto Lining"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

NAFLONTM Coating"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

ENETHERMOTM CR"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

ENETHERMOTM PH"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

SOLVENT CLEAN

Honeycomb Filters

Cautions"O-Ring"TM

Fabricated Products

Details

BLAZERTM NEXTTM

Heating Devices

Relevant catalogue (others)

Product nameTM

TM

"SOLVENT CLEAN "Refer to the "Instructions for use" of the product

HONEYCLETM-ZCH2

ー

Refer to the "Instructions for use" of the product

HONEYCOMB WASHERTM"HONEYCOMB WASHERTM""HONEYCOMB WASHERTM"CHEMICAL GUARD"Semiconductor and FPD related products"

Refer to "warnings and cautions" on tne next page

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