Inventing for your success,inventing for the futureBe the first point of contact for worldwide customers
searching for solutions.
“Inventing for your success, inventing for the future”
Corporate philosophy of Lasertec
Lasertec has been creating unique inspection and measurement systems that feature leading-edge
technologies for many years. We capture market needs at an early stage and bring high-value solutions quickly
to help customers at their R&D and production sites based on our proprietary technologies in applied optics.
Thanks to our unique technologies, high quality, and good customer support, we have earned a good reputationand customer trust in fields such as semiconductor, energy and environment, laser microscope, and flat panel
display.
Lasertec will keep creating new value and contribute to the progress of society.

Lasertec uses its proprietary optical technologies
to help customers overcome new challenges.
The core technology that enables Lasertec to create
epoch-making products is applied optics.

Electronics

High-speed analog/
digital circuits■Parallel image signalprocessing■Applied Optics
Precision
Mechanics■Confocal optics
DUV/EUV optics■Interferometry■■High-precisionhigh-speed stage■Defect repair and particle removal

Image
Processing
Image processing
Defect detection■■Lasertec has accumulated its own proprietary
technologies by pursuing the ultimate possibility in theuse of light for inspection and measurement. It beganwith our success in developing a "laser microscope"
through the effort to use a laser light source to achieve
high resolution. Since then, we have mastered a“confocal optics” technology that enables theconstruction of all-in-focus, three-dimensional images ofsamples. We have also succeeded in developing a“DUV/EUV optics” technology that addresses theneed to use a shorter wavelength light source insemiconductor lithography that has emerged withscaling, and an “interferometry” technology that
accurately measures very small shifts in the phase oflight.
We combine these core technologies in applied optics
with other technologies in peripheral areas to offer thebest solution to each application. We meet various
customer needs in this manner.

“ Let’s launch a product that is totally new to the world every year.”
Spirit of the founders
In October 1976, we successfully developed the world’s first automated
LSI photomask inspection system. The system contributed to quality
improvement and cost reduction in the semiconductor industry, achieving
a higher defect detection rate (from 60% to near 100%) and a significantly
reduced inspection time (to 1/10 of what it used to be). It gave us afoundation for growth. Drawing on this success, we have launched moreinnovative products featuring unique optical technologies.
“A product that is totally new to the world” - by upholding the spirit of thefounders and redefining it, we will keep enhancing our productdevelopment capability and strive for higher growth.

LSI photomask inspection system in 1976
（Winner of “Ten Best New Products Award”
from Nikkan Kogyo Shimbun）

Rapid product development and good customer support
Advanced and unique products are developed in the shortest time possible
At Lasertec, engineers are responsible not only for productdevelopment but also for all stages of the product life cycle, i.e.,planning, technology research, designing, prototyping,fabrication, delivery, installation and after-sale support. Armedwith diverse experience from this process and highly motivatedby professional spirit, our engineers take on tough challenges.
This leads to the accumulation of unique knowhow and drives
our rapid product development.

Technical support infrastructure for leading-edge customers worldwide
Leading-edge inspection and measurement systems are required to show good performance without interruption. Lasertec
strives to maximize the uptime for all of its systems in use. We put in place technical support infrastructure to provide fullon-site support and prompt backup in case of an emergency. Our global operations are assisting our customers’ production
and R&D efforts.

Ireland,KildareOregon
Idaho

Germany,Dresden

Lasertec Corp.
Korea (Hwaseong)
Kiryat Gat(HQ, Japan)
China (Shanghai, Nanjing,Beijing, Amoy, Tianjin)
Taiwan (Hsinchu,Tainan, Taichung)Israel,USA

California
Arizona Texas

New York
North Carolina

Singapore

Environmental policy
Lasertec proactively takes on the growing challenge of global warming and other environmental issues as part ofits efforts to contribute to solving social issues through business execution.

Mid- to long-term vision
We are striving to make the following vision come true in the mid- to long-term:■ We contribute to increasing the energy efficiency ofelectronics and industrial equipment around the world withthe development of innovative inspection and measurement
tools that are necessary for semiconductors, FPDs andothers to achieve higher performance, higher production
yields, and lower energy consumption.

■ We contribute to facilitating the commercial application ofnext-generation power semiconductors using SiC and GaN
and enhancing the performance and safety of lithium-ion
and other rechargeable batteries, which are crucial formaking electric vehicles more reliable and affordable.

■ We anticipate mid- to long-term market growth for ourproducts driven by an increase in demand forsemiconductors with the advent of new applications suchas 5G, AI, IoT, and autonomous driving, but we prevent itfrom causing a proportional increase in GHG emissions
from our production and sales promotion activities bymanaging to reduce emissions per revenue effectively.

■ We contribute to the realization of a sustainable society
throughout our supply chain in cooperation with ourmanufacturing subcontractors and suppliers.

Semiconductor-related systems
Inspection and measurement systems for semiconductor photomasks, mask blanks, and wafers

Lasertec provides highly accurate inspection and measurement systems essential for semiconductor manufacturing process.
Our inspection and measurement technologies have become an essential part of semiconductor production, which is evolving with the adoption of EUV lithography, new materials, and new architectures, enabling the further miniaturization of IC designs. In the area of semiconductor
photomask-related inspection, which is our main business, we offer EUV mask blank inspection systems regarded as the de facto industry standard and photomask inspection systems for leading-edge lithography that have captured high market share.
In the area of wafer-related measurement and inspection, our systems offer a range of solutions to customer needs, including wafer-edge inspection, whole-wafer film-thickness inspection, silicon thickness measurement, and SiC wafer inspection.

Lasertec systems in the semiconductor manufacturing process

EUV mask

Mask Blanks Inspection
and Review System

Mask Blanks Inspection
and Review System

MAGICS Series
M9650/M9651

MAGICS Series
M9650/M9651

EUV Mask Blanks Inspection
and Review System
EUV mask substrate

ABICS E120

EUV light(13.5nm)
Multilayer

EUV mask blank

Mask Edge
Inspection System

Actinic EUV Patterned
Mask Inspection System

MZ100

ACTIS A300 Series
A150

Targen area of inspection

EUV light(13.5nm)

Pellicle

EUV mask EUV mask
without pellicle with pellicle

EUV mask

MATRICSX9ULTRAEUV mask

EUV Mask Backside Inspection without pellicle with pellicle
and Cleaning System

Mask Inspection System
EUV mask with pellicle

BASIC Series

Photomask

Mask Blanks Inspection
and Review System

Phase-Shift and Transmittance
Measurement System

Mask Edge
Inspection System

MAGICS Series
M9650/M9651

MPM193EX

MZ100

Mask Inspection SystemMATRICS
X810EX Series

Front end process

Back end process

Pattern Design

Mask blank manufacturing

Mask manufacturing

Wafer Edge
Inspection Systm

Wafer Inspectionand Review System

EZ300

MAGICS Series M5640

Packaging

Device manufacturing

Wafer manufacturing

High Sensitivity Under-layer
Defect Inspection
and Review System

CIRIUS Series

3DIC

High Sensitivity Wafer
Edge Inspection System

Multi-Wavelength
Wafer Inspection System

CIEL Series

LX Series

CarrotBPD

3D Stack
DeviceTSV

3DIC

Via Depth Measurement System

VIANCA Series

SiC wafer,GaN,etc.

GaN Wafer Inspection and Review System

SICA88GALOIS 211

3D Stack
DeviceTSV

Wafer Bump Inspection
and Measurement System

BGM300

BIM300

Defects captured by SICA88■Defect map and histogram

Triangle

3DIC

TSV Back Grinding Process
Measurement SystemWafer

SiC Wafer Inspection and Review System

3D StackDevice
TSV

Stacking Fault

Laser microscopes and lithium-ion battery-related systems
3D surface-profiling microscopes and lithium-ion battery observation systems

Lasertec provides high-performance, multifunctional 3D surface-profiling microscopes for R&D in cutting-edge technology areas, and systems for analyzing charge/discharge
characteristics of lithium-ion batteries.
Our high-performance, multifunctional hybrid laser microscopes are widely used for R&D and quality control in a variety of industries including semiconductor materials, transparent films, coating materials, inorganic/organic materials, biological samples, metal parts, and plastic components.
We offer customization to meet the needs of automatic transfer, inspection, and measurement for volume production applications. In the area of lithium-ion batteries, we provide a material analysis system based on our proprietary, cutting-edge technologies.

The multifunctional, high-performance OPTELICS HYBRID+

For analyzing charge/discharge characteristics of lithium ion batteries
Electro-Chemical Reaction Visualizing Confocal System

Combining white light confocal and laser confocal

Achieving industry-leading performance

ECCS B320●In-situ observation of electrochemical reactions inside a charging/discharging battery■Visualization of lithium ion intercalation■Quantification of the expansion and contraction of active materials■Analysis of dendrite formation mechanism
Graphite anode inside a lithium ion battery being charged
HYBRID+ features white light and laser confocal optics, offering thebenefits of both technologies.

HYBRID+ achieves industry-leading performance in the various
measurement and observation functions required for a confocal laser
scanning microscope.

Six different functions from a single platform

Meeting a wide range of measurement needs
0% charged▶

33% charged▶

50% charged▶

75% charged▶ 100% charged

FPD-related systems
Systems used to inspect defects on FPD photomasks and mask blanks
HYBRID+ is a multifunctional microscope that addresses a variety of needs
that would normally require the capabilities of multiple tools. It features twotypes of confocal optics (white light and laser) and performs differential
interference contrast observation, vertically scanning white lightinterferometry, phase shift interferometry, and spectroscopic reflectometry film
thickness measurement.

HYBRID+ meets measurement needs on a wide range of scales fromnanometers to millimeters.

HYBRID+ application example
3D surface profilingInterferometric surface profiler

Lasertec provides state-of-the-art inspection systems to support innovations in FPD technology.
Lasertec’s inspection systems support innovations in liquid crystal and other flat panel display (FPD) technologies and facilitate
the adoption of higher resolution FPDs. Our FPD photomask inspection systems have a track record of being regarded as defacto standard tools. We also offer a full lineup of solutions to cover inspection needs of the processes before and after
photomask inspection. We upgrade the defect detection performance of our inspection systems in response to the introductionof finer patterns. We pride ourselves on making significant contributions to the quality improvement of FPD photomasks.

Spectoscopic reflectometry film thickness mesurement

Lasertec systems used in FPD manufacturing process
Glass for array
FPD Photomask Inspection System

CLIOS G8/G10 SeriesHigh aspect ratio trenchÅ step height measurement in a short time

Micro defect on 400nm thickness transparent film

Array manufacturing
process
Pattern design
Mask blank manufacturing

Cellprocess

Mask manufacturing

FPD Mask Blanks
Inspection SystemPellicle Inspection and Pellicle
Mounting System for CLIOSLBIS Series
L852/L1052

71PA CM/51PA CM

Color filter
process

Glass for color filter

OPTELICS HYBRID+Lasertec products are used to inspect photomasks necessary for the production of organic LED panels.

Moduleprocess

Company Outline
Name
Corporate office
CapitalFoundedBusiness

Lasertec Corporation
2-10-1 Shin-yokohama, Kohoku-ku, Yokohama, 222-8552, Japan
931 million yen
July 1960
Development, manufacturing, sale and service of the following products
1.Semiconductor-related systems
2.FPD-related systems
3.Laser Microscopes

Milestones
1960

Tokyo ITV Laboratory is founded and starts to design and develop
X-ray TV cameras

1962

NJS Corporation is established and starts exploring a wide range of technology
development besides X-ray television.

1976

The world’s first LSI photomask inspection system isdeveloped and launched.

1985

The world’s first color laser scanning microscope is developed
and launched.

1986

NJS Corporation is renamed as Lasertec Corporation.
Lasertec U.S.A., Inc. is established in San Jose, CA.

1990

Lasertec is listed on the OTC stock market (code 6920).
The world’s first phase shift measurement system is developed
and launched.

1993

Mask blank inspection system, MAGICS Series,
is developed and launched

2000
2001

Lasertec Korea Corporation is established in Seoul, Korea.

2002

Lasertec Corporation receives ISO9001: 2000 certification.

2004

Lasertec is listed on JASDAQ.

2006
2008

Overseas■Lasertec USA, Inc.
Headquarters: Santa Clara
US locations: Oregon, New York, Idaho, North Carolina,Texas, Arizona
German branch: Dresden
Ireland branch: Kildare
Israel branch: Kiryat Gat■Lasertec Korea Corp. (Hwaseong)■Lasertec Taiwan, Inc.
Headquarters: Hsinchu
Other locations: Tainan, Taichung■Lasertec China Co., Ltd.
Headquarters: Shanghai
Other locations: Nanjing, Beijing, Amoy, Tianjin■Lasertec Singapore Pte. Ltd. (Singapore)

Photomask defect inspection system,MATRICS Series, is developed and launched.
New corporate head office and R&D center is inaugurated in Shin-yokohama.

Corporate office-R&D center

2009
2010

Lasertec Taiwan, Inc. is established in Hsinchu, Taiwan.

2012

Lasertec is listed on the second section of the Tokyo Stock Exchange.

2013

Lasertec is listed on the first section of the Tokyo Stock Exchange.
Lasertec receives “Commissioner of the Japan Patent Office Award” as acompany making good use of the industrial property rights system.

2017

Lasertec China Co., Ltd. is established in Shanghai, China.

2019

Lasertec Singapore Service Pte. Ltd. is established in Singapore(renamed Lasertec Singapore Pte. Ltd. in 2023)

2022

Real estate in Shin-yokohama is acquired to build a new R&D facility “Lasertec Innovation Park”.

SiC wafer inspection and review system,SICA, is developed and launched.

The world's first EUV mask blanks inspection & review
system using EUV light (13.5nm wavelength) isdeveloped and launched.
The world's first actinic EUV patterned mask inspection
system, ACTIS A150, is developed and launched.

www.lasertec.co.jp
Head Office 2-10-1 Shin-yokohama, Kohoku-ku, Yokohama, 222-8552, Japan Phone: +81-45-478-7111
Lasertec Innovation Park 555 Toriyama-cho, Kohoku-ku, Yokohama, 222-0035, Japan
Lasertec USA, Inc. 3131 Jay Street, Suite 110, Santa Clara, CA 95054, USA Phone: +1-408-437-1441
Lasertec USA, Inc. Zweigniederlassung Deutschland Waldschloesschenstr. 1, 01099 Dresden, Germany Phone: +49 351-3092-6604
Lasertec Korea Corp. A-6F, 150, Dongtanyeongcheon-ro, Hwaseong-si, Gyeonggi-do, 18462, Korea Phone: +82-31-8015-0540
Lasertec Taiwan, Inc. Rm. 16, 7F., No. 81, Shuili Rd., East Dist., Hsinchu City, Taiwan (R.O.C.)
Lasertec China Co., Ltd. Building2 1st Floor unit1101 Sunplus Building 1077 ZuChongZhi Road, Zhang Jiang Hi-Tech Park, Pudong New Area, Shanghai, China 201203
Phone:+86 21-5083 0806
Lasertec Singapore Pte. Ltd. 51 Changi Business Park Central 2 #09-08 The Signature, Singapore 486066 Phone:+65 62161877
24/06-10