J. Inst. Electrostat. Jpn.

論

静電気学会誌, 32, 5 (2008) 216-221

文ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪
਄㊁ፏኼ  1 㧘૒ਭᎹൎ ᧁ⾆ᔒ 㧘⑺ ጊ 㓷 ⵨ 㧘ᶉᷕ 㧘⑺ ጊ ⑲ ౖᐔ㓉↵ 㧘㧔2008 ᐕ 6 ᦬ 28 ᣣฃઃ; 2008 ᐕ 9 ᦬ 8 ᣣฃℂ㧕Development of Miniaturized Marx Generator and Its Application toMicro-Plasma Jet
Takahisa UENO*,1, Takashi SAKUGAWA***, Masahiro AKIYAMA***, Takao NAMIHIRA**,Sunao KATSUKI** and Hidenori AKIYAMA***(Received June 26, 2008; Accepted September 8, 2008)

The micro-plasma jet has been used in various fields such as materials processing, chemical analysis,
short-wavelength light source, and biomaterials treatment. The miniaturized electric power generator has beenrequested to produce these plasmas in the micro-scale area, because the present large size generator limits the use of
these small plasmas. Under such background, a miniaturized Marx generator which has Bipolar Junction Transistors(BJTs) as closing switches has been developed to generate micro-plasma jet. In the miniaturized Marx generator, BJTs
were operated in avalanche mode to obtain a faster switching speed with nanosecond regime. In this paper, three kindsof BJTs which have different collector current are evaluated as closing switch, and the micro-plasma jet is generated
by the miniaturized Marx generator. The generator is able to output -2.5kV voltage, 38ns pulse-width by series BJTs
for cutting load current. It has been found that the dependence of length of micro-plasma jet was different from loadcurrent.
1.

ߪߓ߼ߦࡒࠢࡠ෻ᔕ႐ᒻᚑ߿㜞ኒᐲᇦ⾰ਛߦ߅ߌࠆࡊ࡜࠭ࡑߩᣂߚㄭᐕ㧘ࡊ࡜࠭ࡑࠍ೑↪ߒߚᛛⴚߪ߼ߑ߹ߒ޿⊒ዷࠍㆀߍ㧘ߥ‛ᕈ⊒ជ╬ 1, 2)㧘ߘߩᣂⷙᕈߦࠃࠅᵈ⋡ࠍ㓸߼㧘ᄙߊߩ⎇ⓥฦ⒳⭯⤑ߩ૞ᚑ߿ࠛ࠶࠴ࡦࠣߣ޿ߞߚ↥ᬺߩၮ⋚ᛛⴚߣߒ߇ផㅴߐࠇࠆࠃ߁ߦߥߞߡ߈ߡ޿ࠆ 3-5)㧚ߥ߆ߢ߽㧘ࠟࠬᵹߦߡᔅⷐਇนᰳߥ߽ߩߦߥߞߡ޿ࠆ㧚৻⥸⊛ߦߘࠇࠄߩࡊ࡜࠭ࠃࠅࡑࠗࠢࡠࡊ࡜࠭ࡑࠍࠫࠚ࠶࠻⁁ߦྃ኿ߔࠆࡑࠗࠢࡠࡊࡑߦߪᄢኈ㊂߆ߟဋ৻ߢ޽ࠆߎߣ߇ⷐ᳞ߐࠇߡ޿ࠆ㧚৻ᣇ㧘࡜࠭ࡑࠫࠚ࠶࠻ߪ㧘ߘߩ⊒↢ㇱߣ෻ᔕㇱ߇⁛┙ߒߡ޿ࠆߚ߼㧘ࡊ࡜࠭ࡑߩᄢኈ㊂ൻߣߪㅒߦ㧘ᓸዊⓨ㑆ߦ߅ߌࠆࡑࠗࠢࡠࡊ೙ᓮᕈߩኈᤃߐ߿ዪᚲ⊛ߥ㜞޿෻ᔕᕈߣ޿ߞߚ․ᓽࠍᜬߞ࡜࠭ࡑ߽㧘ᄢ߈ߥ⴫㕙Ⓧ/૕Ⓧ㧔S/V㧕Ყߦ⿠࿃ߔࠆ㜞ല₸ߥߡ߅ࠅ㧘ࡑࠗࠢࡠࡊ࡜࠭ࡑߩታ↪ൻࠍㅴ߼ࠆ߽ߩߣߒߡᵈ⋡ࠠ࡯ࡢ࡯࠼㧦ࡑ࡞ࠢࠬ⊒↢ⵝ⟎㧘ࡃࠗࡐ࡯࡜ធว࠻࡜ࡦࠫࠬ࠲㧘㒠ફ⃻⽎㧘ࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻
* ᄢಽᎿᬺ㜞╬ኾ㐷ቇᩞ㔚᳇㔚ሶᎿቇ⑼ 870-0152 ᄢಽᏒᄢሼ’ 1666 ⇟࿾
Department of Electrical and Electronics Engineering, Oita
National College of Technology, Maki 1666, Oita 870-0152,
Japan** ᾢᧄᄢቇࡃࠗࠝࠛ࡟ࠢ࠻࡝ࠢࠬ⎇ⓥ࠮ࡦ࠲࡯㧔860-8555 ᾢᧄᏒ㤥㜬 2-39-1㧕
Bioelectrics Research Center, Kumamoto University, Kurokami
1-39-1, Kumamoto 860-8555, Japan***ᾢᧄᄢቇ⥄ὼ⑼ቇ⎇ⓥ⑼㧔860-8555 ᾢᧄᏒ㤥㜬 2-39-1㧕
Graduate School of Science and Technology, KumamotoUniversity, Kurokami 1-39-1, Kumamoto 860-8555, Japan
1ueno@oita-ct.ac.jpࠍ㓸߼ߡ޿ࠆ㧚ࡑࠗࠢࡠࡊ࡜࠭ࡑࠍࡄ࡞ࠬߢ↢ᚑߔࠆߚ߼ߩ㔚Ḯߦߪ㧘᡼㔚ࠍ㐿ᆎߢ߈ࠆࠃ߁ߥ㜞㔚࿶ߩ⊒↢ߣࡄ࡞ࠬ⊒↢ߩߚ߼ߩ㜞ㅦߥࠬࠗ࠶࠴ࡦࠣ⚛ሶ߇ᔅⷐߢ޽ࠆ㧚ᓸዊߥኸᴺߢ޽ࠆࡊ࡜࠭ࡑߦല₸⦟ߊࠛࡀ࡞ࠡ࡯ࠍㅍࠅㄟ߻ߚ߼㧘᭽‫ߥޘ‬ᔕ↪ߦ૶߁ߚ߼ߦߪ㧘㔚Ḯ߽ߢ߈ࠆ㒢ࠅዊߐߊߔࠆᔅⷐ߇޽ࠆ㧚ዊဳൻࠍታ⃻ߔࠆߚ߼ߦߪ㧘ᓥ᧪↪޿ࠄࠇߡ߈ߚࠡࡖ࠶ࡊࠬࠗ࠶࠴ߢߪߥߊ㧘ඨዉ૕ࠬࠗ࠶࠴ࠍ૶↪ߔࠆߎߣ߇ㆡᒰߢ޽ࠆ㧚⪺⠪ࠄߪ㧘ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩࠡࡖ࠶ࡊࠬࠗ࠶࠴ߦ޽
ߚࠆㇱಽࠍඨዉ૕⚛ሶߢ޽ࠆࡃࠗࡐ࡯࡜ធว࠻࡜ࡦࠫࠬ࠲
㧔Bipolar Junction Transistor㧦BJT㧕ߦ⟎߈឵߃ߚࡒ࠾࠴ࡘࠕ

ミニチュアマルクス発生装置の開発とマイクロプラズマジェットへの応用（上野崇寿ら）
ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪㧔਄㊁ࠄ㧕ᄢ㔚࿶ᵄ㜞୯-2.5kV㧘㔚࿶┙ߜਅ߇ࠅᤨ㑆 3 ns ߩ಴ജࠍᓧߚ6)㧚ߎߩⵝ⟎ߪ BJT ߩ㒠ફ⃻⽎㧔ࠕࡃ࡜ࡦࠪࠚࡉ࡟ࠗࠢ࠳࠙

R+VDCࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ࠍⴕߞߡ߈ߚ㧚వⴕ⎇ⓥߦࠃࠅ㧘ᦨ
Trigger

217 (27)

FETCBJTࡦ㧕ࠍ↪޿ߡ޿ࠆ㧚BJT ߩㅢᏱ⁁ᘒߢߩ૶↪ߢߪ㧘IGBT ߿VoutSIT ߣ޿ߞߚઁߩᄢኈ㊂ඨዉ૕⚛ሶߣᲧセߒߡ㧘⠴㔚࿶߿ࠬ

࿑ 1 ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ࿁〝࿑ࠗ࠶࠴ࡦࠣㅦᐲ╬ߩࠬࠗ࠶࠴ࡦࠣ․ᕈߦ߅ߌࠆఝ૏ᕈߪᱴ

Fig. 1 Circuit diagram of Miniaturized Marx generator.

ߤᜬߞߡ޿ߥ޿߇㧘BJT ߦ㒠ફ⃻⽎ࠍ⊒↢ߐߖࠆߎߣߢ㧘࠽

3.

ࡁ⑽ࠝ࡯࠳ߩࠬࠗ࠶࠴ࡦࠣ߇น⢻ߣߥࠅ㧘┙ߜ਄߇ࠅߩ㜞ㅦ

3.1ߥࡄ࡞ࠬࠍ಴ജߔࠆߎߣ߇ߢ߈ࠆ㧚

BJT ߩ㒠ફ⃻⽎ࠍ⿠ߎߐߖࠆߚ߼ߦߪ㧘ࠦ࡟ࠢ࠲㧙ࠛࡒ࠶

BJT ߩ㒠ફ․ᕈ
㒠ફ․ᕈ⹜㛎࿁〝ߒ߆ߒߥ߇ࠄ㧘㒠ફ⃻⽎ߦߪ㧘BJT ߩࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲࠲㑆ߦ㒠ફ㔚࿶ࠍශടߔࠆߣ޿ߞߚ․ᱶߥᣇᴺߢ޽ࠆ߇᡿

㑆ߦ㒠ફ㔚࿶એ਄ߩ㔚࿶ࠍශടߐߖߥߌࠇ߫ߥࠄߕ㧘Ꮢ⽼ߩߦ㧘㒠ફ․ᕈߪࡔ࡯ࠞߩ࠺࡯࠲ࠪ࡯࠻߆ࠄߢߪ⺒ߺขࠆߎߣ

BJT ߩ࠺࡯࠲ࠪ࡯࠻߆ࠄ㧘ߘߩ․ᕈࠍᛠីߔࠆߎߣߪ࿎㔍ߢ߇ᭂ߼ߡ࿎㔍ߢ޽ࠆ㧚ߘߎߢ㧘Ꮢ⽼ߐࠇߡ޿ࠆ BJT ߩ㒠ફ․޽ࠅ㧘᣿ࠄ߆ߦߐࠇߡ޿ߥ޿㧚㒠ફ․ᕈࠍ⸃᣿ߔࠆߎߣߢ㧘ᕈߩᛠីࠍⴕߞߚ㧚࿑ 2 ߦ BJT ߩኈ㊂ᄌൻߦኻߔࠆ㒠ફ․ᕈ

಴ജ㔚࿶ߩჇട㧘៊ᄬߩᷫዋ㧘┙ߜਅ߇ࠅᤨ㑆ߩᷫዋߣ޿ߞ

ᛠីߩߚ߼ߩ⹜㛎࿁〝ࠍ␜ߔ㧚੹࿁㧘2SC2655, 2SC5076,

ߚⵝ⟎ߩᕈ⢻ߩะ਄ࠍ࿑ࠆߎߣ߇ߢ߈ࠆ㧚

2SC50007)ߩ 3 ⒳㘃ߩ BJT ࠍ⹜㛎ߦ↪޿ߚ㧚ߎࠇࠄߩ BJT ߪߘߎߢ㧘ᧄ⎇ⓥߢߪ㧘ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎㐿⊒ߩࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߩቯᩰ㔚࿶߇╬ߒߊ㧘ቯᩰࠦ࡟ࠢ࠲㔚৻Ⅳߣߒߡ‫⚛ࠣࡦ࠴࠶ࠗࠬޔ‬ሶߣߒߡ↪޿ߚ BJT ߩ㒠ફ⃻⽎ᵹ߇ߘࠇߙࠇ㧘2, 5, 10A ߣ⇣ߥࠆ㧚⹜㛎ߢߪ⋥ᵹ㔚Ḯ߆ࠄߩߦ㑐ߔࠆ․ᕈ⹜㛎ࠍⴕߞߚ㧚ߘߩᓟ㧘․ᕈ⹜㛎⚿ᨐࠍ෻ᤋߒශട㔚࿶㧔Vch㧕ࠍ㔚࿶਄᣹₸ 1 V/sec ߦߡჇടߐߖ㧘ల㔚ᛶߚࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍ⵾૞ߒ‫ࡑ࠭࡜ࡊࡠࠢࠗࡑޔ‬᛫(Rch=20kǡ)ࠍㅢߒ㧘ࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߩࠦࡦ࠺ࡦࠨࠍ

ࠫࠚ࠶࠻ߩ↢ᚑࠍ⹜ߺߚ㧚ల㔚ߔࠆ㧚ల㔚߇ቢੌߒߚߩߜ㧘ାภ⊒↢ེ(33220A,Agilent)߆ࠄ BJT ߩࡌ࡯ࠬ߳ TTL ାภࠍㅍࠅ㧘㒠ફࠍ↢ߓߐߖࠆ㧚

2.

ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߎߩᤨ㧘ࠦࡦ࠺ࡦࠨኈ㊂ࠍ 0.1uF ߆ࠄ 1uF ߹ߢᄌൻߐߖࠦ࡟ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߣߪ㧘ల㔚ᛶ᛫ࠍ੺ߒߡਗ೉ߦల㔚ߐࠢ࠲㧙ࠛࡒ࠶࠲㑆ߩ㔚࿶(VC)෸߮ࠦ࡟ࠢ࠲㔚ᵹ(Ic)ࠍ⸘᷹ߒ

ࠇߚⶄᢙߩࠦࡦ࠺ࡦࠨࠍ⍴⛊ࠬࠗ࠶࠴ࠍࠝࡦߔࠆ੐ߢ⍍ᤨߚ㧚㔚࿶㔚ᵹߩ᷹ቯᯏེߦߪ㧘ࠝࠪࡠࠬࠦ࡯ࡊ(TDS3034B,ߦ⋥೉߳ធ⛯ᄌ឵ߔࠆ‫៊ޕ‬ᄬ߇ߥ޿႐วߩ಴ജߪ‫ࡦ࠺ࡦࠦޟ‬Tektronix)㧘㜞࿶ࡊࡠ࡯ࡉ(PHV641, PMK)㧘ࠞ࡟ࡦ࠻ࡕ࠾࠲ࠨߩ୘ᢙࠦࡦ࠺ࡦࠨߩల㔚㔚࿶‫▚ߡߦޠ‬಴ߐࠇࠆ㔚࿶ᵄ㜞

(Model 2877, Pearson, Electronics)ࠍߘࠇߙࠇ૶↪ߒߚ㧚୯ࠍ᦭ߒ㧘ૐ޿ల㔚㔚࿶ߦߡᲧセ⊛ኈᤃߦ㜞㔚࿶ࠍ⊒↢ߐߖࠆߎߣ߇น⢻ߢ޽ࠆ㧚ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ⍴⛊ࠬࠗ࠶࠴ߣߒߡߪ‫ޔ‬ㅢᏱ⥄Ꮖ᡼㔚ဳߩࠡࡖ࠶ࡊࠬࠗ࠶࠴߇ណ↪ߐࠇߡ޿ࠆ㧚ߒ߆ߒߥ߇ࠄ㧘↥ᬺᔕ↪ࠍ⋡ᜰߒߚࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻↪ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߣߒߡߪ㧘ዊဳൻߦട߃ߡ㐳ኼ๮ൻ߇ᔅ㗇ⷐઙߣߒߡ᜼ߍࠄࠇࠆߚ߼㧘᡼㔚ࠡࡖ࠶ࡊࠬࠗ࠶࠴ߩ૶↪ߪ࿎㔍ߢ޽ࠆ‫ߢߎߘޕ‬㧘ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ⍴⛊ࠬࠗ࠶࠴࿑ 2 㒠ફ․ᕈ⹜㛎࿁〝ߣߒߡ㧘࿑ 1 ߦ␜ߔࠃ߁ߦ BJT ࠍㆡ↪ߒߚ㧚
BJT ߩㅢᏱ⁁ᘒߦ߅ߌࠆࠬࠗ࠶࠴ࡦࠣㅦᐲߪㆃ޿ߚ߼㧘㜞ㅦߥ┙ߜ਄߇ࠅࠍ⋡ᜰߒߚࡄ࡞ࠬࡄࡢ࡯ߩ⊒↢ߦߪਇㆡߢ޽ࠆ㧚ߘߩߚ߼㧘ᧄ⊒↢ⵝ⟎ߢߪ BJT ߩࠦ࡟ࠢ࠲́ࠛࡒ࠶࠲㑆ߩ㒠ફ⃻⽎ࠍ೑↪ߔࠆߎߣߢ㧘㜞ㅦ࠲࡯ࡦࠝࡦࠍታ⃻ߒߡ޿ࠆ㧚ߔߥࠊߜ BJT ߩࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߦ㒠ફ㔚࿶એ਄ߩ㔚࿶ࠍශടߔࠆߎߣߢ㧘㒠ફࠍ↢ߓߐߖ㧘㜞ㅦߥࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߩዉㅢࠍ⍴⛊ࠬࠗ࠶࠴ߣߒߡ೑↪ߔࠆߎߣߢ
޽ࠆ㧚ߎߩᤨ㧘BJT ߳ߩ㔚ᵹࠍ೙㒢ߖߕߦᵹߒ⛯ߌࠆߣ㧘⚛
ሶߪ⎕უߦ⥋ࠆ߇㧘ߘߩ㔚ᵹࠍ೙㒢ߔࠆߎߣߢ቟ቯߒߚ➅ࠅ㄰ߒേ૞߇น⢻ߢ޽ࠆ㧚

Fig. 2 Evaluation circuit of BJT.
3.2

ṳࠇ㔚ᵹ․ᕈ

࿑ 3 ߦ BJT 2SC2655 ࠍ⹜㛎࿁〝ߦ૶↪ߒ㧘Vch ࠍჇടߐߖߚᤨߩ Vc ߩᄌൻࠍ⴫ߔ㧚Vch ߇ 165V ߦ㆐ߔࠆ߹ߢߪ㧘Vcߣߩ㑐ଥߪᱜᲧ଀ࠍ␜ߒ㧘Vch㧩Vc ߣߥࠆ㧚ߒ߆ߒ㧘Vch ߇165V ࠍ⿥߃ࠆߣ㧘VchҁVc ߣߥࠅ㧘㔚૏Ꮕ߇↢ߓࠆ㧚ߎߩ㔚૏Ꮕߪ㧘BJT ߇ࠝࡈ⁁ᘒߦ߽㑐ࠊࠄߕ㧘ࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߦᵹࠇࠆ㔚ᵹ㧘හߜ BJT ߩṳࠇ㔚ᵹߦࠃߞߡ↢ߓࠆ߽ߩߣ⠨߃ࠄࠇࠆ㧚ߟ߹ࠅ㧘ᧄ BJT ߦട߃ࠄࠇࠆ㔚࿶߇ 165V ࠍ⿥߃ࠆߣࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߦṳࠇ㔚ᵹ߇↢ߓ㧘ߘߩ㔚ᵹ୯ߪ㧘Vch ߦ218 (28)

静電気学会誌 第 32 巻 第 5 号（2008）ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪㧔਄㊁ࠄ㧕ଐሽߔࠆ㧚ઁߩ 2 ⒳㘃ߩ BJT ߦ߅޿ߡߪ㧘Vch=200V ߩᤨ߆Ic ߇ᷫ⴮ᝄേᵄᒻࠍ␜ߒ㧘C ߩᐔᣇᩮ෸߮ Vc ߦᲧ଀ߔࠆߎࠄṳࠇ㔚ᵹ߇↢ߓࠆ㧚ṳࠇ㔚ᵹߪࠛࡀ࡞ࠡ࡯ല₸ߩૐਅߣߥ

ߣ߆ࠄ㧘Ic ߣ Vc ߩ㑐ଥߪਅᑼߦᓥ߁㧚ࠆߩߢ㧘ߢ߈ࠆ㒢ࠅዊߐ޿ᣇ߇ᅢ߹ߒ޿㧚ᓥߞߡ㧘2SC2655

Ic

ࠍ૶↪ߔࠆ႐ว㧘ṳࠇ㔚ᵹ߇ዊߐߊ‫⏕ޔ‬ታߦ㒠ફ⃻⽎ࠍ⿠ߎߔߎߣ߇น⢻ߥ㔚࿶㧘හߜ Vch㧩Vc҈165㨪175V ߢ㒠ફ⃻⽎ࠍ⿠ߎߐߖࠆߎߣ߇ㆡᒰߢ޽ࠆ㧚VcCLc(1)C ߪ⹜㛎࿁〝ߦ߅ߌࠆࠦࡦ࠺ࡦࠨኈ㊂㧘Lc ߪ࿁〝ࠗࡦ࠳ࠢ࠲ࡦࠬࠍ⴫ߔ㧚ᰴߦ BJT ߩ⒳㘃ߦኻߔࠆ㔚ᵹ․ᕈࠍ࿑ 7 ߦ␜ߔ㧚ㅢᏱ⁁ᘒߦ߅޿ߡߪ㧘ฦ BJT ߩ Ic ߪቯᩰㅢࠅߢ޽ࠅ㧘ߘߩᦨᄢ୯ߣᦨዊ୯ߣߩ㑆ߢ 5 ୚ߩ㆑޿߇⷗ࠄࠇࠆ㧚ߒ߆ߒ㧘㒠ફ⁁ᘒߦ߅޿ߡ㧘㆑޿ߪήߊ㧘Ic ߪ߶߷ห୯ߣߥࠆ㧚ߟ߹ࠅ㧘㒠ફ⁁ᘒߦ߅ߌࠆ Ic ߩᦨᄢ୯ߪ㧘BJT ߩ⒳㘃ߦࠃࠄߕหߓߢ޽ࠅ㧘
BJT ࠬࠗ࠶࠴ࡦࠣᤨߩࠗࡦࡇ࡯࠳ࡦࠬ߇⹜㛎࿁〝ߩ࿁〝ࠗࡦࡇ࡯࠳ࡦࠬࠃࠅᭂ߼ߡዊߐ޿ߎߣࠍ␜ߒߡ޿ࠆ㧚ߎߩߎߣߪ㧘
ᑼ(1)߆ࠄߢ߽ห᭽ߦ⺑᣿߇น⢻ߢ޽ࠆ㧚ᓥߞߡ㧘㒠ફ⁁ᘒߦ߅ߌࠆ Ic ߩᦨᄢ୯ߪ㧘BJT ߩࠬࠗ࠶࠴ࡦࠣᤨߩࠗࡦࡇ࡯࠳ࡦࠬ߇ᭂ߼ߡዊߐ޿ߚ߼㧘࿁〝ࠗࡦࡇ࡯࿑ 3 Vch ᄌൻᤨߩ Vc ․ᕈ

࠳ࡦࠬߦࠃߞߡ৻ᗧߦቯ߹ࠆߣ޿߃ࠆ㧚

Fig. 3 Dependence of Vc on Vch(2SC2655).
3.3ࠬࠗ࠶࠴ࡦࠣᤨߩ㔚࿶㔚ᵹᵄᒻ

BJT 2SC2655 ߩࠬࠗ࠶࠴ࡦࠣᤨߩ Vc ෸߮ Ic ߩᵄᒻࠍ࿑ 4ߦ␜ߔ㧚࿑ 4(a)ߣ(b)ߪ‫ ࠇߙࠇߘޔ‬Vc ߇ 50V ߣ 140V ߦ߅ߌࠆ㔚࿶࡮㔚ᵹᵄᒻߢ޽ࠆ㧚ߎߩᤨ㧘ࠦࡦ࠺ࡦࠨኈ㊂ߪ޿ߕࠇ߽ 0.1uFߣߒߚ㧚࿑ 4(a)ߩᵄᒻߦ߅޿ߡ㧘Vc ߩ┙ߜਅ߇ࠅᤨ㑆ߪ⚂0.5us㧘Ic ߩᦨᄢ୯ߪ 6A ߢ޽ߞߚ㧚ߎࠇߪቯᏱ⁁ᘒߦ߅ߌࠆቯᩰࠦ࡟ࠢ࠲㔚ᵹߩ 3 ୚ߦ޽ߚࠆ㧚ߥ߅㧘┙ߜਅ߇ࠅᤨ㑆ߣߪ㔚࿶ᦨᄢ୯ߩ 90㧑߆ࠄ 10㧑ߦⷐߔࠆࠬࠗ࠶࠴ࡦࠣᤨ㑆ߣቯ⟵ߔࠆ㧚
࿑ 4(b)ߩᵄᒻߢߪ㧘Vc ߩ┙ߜਅ߇ࠅᤨ㑆ߪ⚂ 0.1us㧘(a) ㅢᏱ⁁ᘒ

Ic ߩᦨᄢ୯ߪ 90A ߢ޽ߞߚ㧚Vc㧩140V ߩᤨߩᵄᒻߪ㧘50Vߩ႐วߣᲧセߒߡ㧘㔚࿶ߩ┙ߜਅ߇ࠅ㧘㔚ᵹࡄ࡞ࠬ᏷౒ߦᭂ߼ߡ⍴ߊߥߞߡ߅ࠅ㧘㔚ᵹ Ic ߩᦨᄢ୯߽Ⴧടߒߡ޿ࠆߎߣ߇ಽ߆ࠆ㧚࿑ 5 ߦ BJT 2SC500 ߩ Vc ࠍ 140V㧘160V㧘180V ߣᄌൻߐߖߚᤨߩ Ic ߩᵄᒻࠍ␜ߔ㧚Vc㧩140V ߩ Ic ᵄᒻߢߪ㧘t=0 ߆ࠄ㔚ᵹ߇ᵹࠇᆎ߼ t=0.17usߩᤨࠍႺߦߒߡ Ic ߩᤨ㑆ᄌൻ₸ di/dt ߇ᄢ߈ߊჇടߒߡ޿ࠆߎߣ߇ુ߃ࠆ㧚 Vc㧩160V ߢߪ t=0.05us㧘Vc㧩180V ߦ߅޿ߡߪ㧘ᭂ߼ߡ⍴ߊ t=0.01us ߩᤨ㧘di/dt ߩᄢ߈ߥჇട߇⷗ࠄࠇߚ㧚ࠃߞߡ Vc ࠍჇടߔࠆߎߣߢ㧘di/dt ߇ᄌൻߔࠆ߹ߢߩᤨ㑆߇ᷫዋߒ㧘㔚ᵹࡄ࡞ࠬ᏷߇⍴ߊᵄ㜞୯ߩᄢ߈ߥ㔚ᵹࡄ࡞ࠬࠍᓧࠆߎߣ߇ߢ߈ࠆ㧚
3.4

㔚ᵹ․ᕈ

BJT 2SC2655 ࠍ↪޿ߚᤨߩ Vc ᄌൻᤨߩ㔚ᵹ․ᕈࠍ࿑ 6 ߦ␜ߔ㧚ࠦࡦ࠺ࡦࠨኈ㊂ࠍ 0.1uF ߆ࠄ 1uF ߹ߢᄌൻߐߖ㧘Vc
ᄌൻߦኻߔࠆ Ic ߩᦨᄢ୯ࠍࡊࡠ࠶࠻ߒߚ㧚㒠ફ⁁ᘒߦ߅ߌࠆ(b)㒠ફ⁁ᘒ
࿑ 4 BJT ࠬࠗ࠶࠴ࡦࠣᤨߩ Vc ෸߮ Ic ᵄᒻFig. 4 Capacitor voltage waveform (Vc) and collector
current waveform (Ic). (a) When BJT wasoperated in normal mode. (b) When BJT wasoperated in avalanche mode.

ミニチュアマルクス発生装置の開発とマイクロプラズマジェットへの応用（上野崇寿ら）
ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪㧔਄㊁ࠄ㧕
3.5219 (29)ࠬࠗ࠶࠴ࡦࠣᤨ㑆․ᕈ

࿑ 8 ߦ BJT 2SC2655 ࠍᄌൻߐߖߚߣ߈ߩࠬࠗ࠶࠴ࡦࠣᤨ㑆․ᕈࠍ␜ߔ㧚ㅢᏱ⁁ᘒߢߪ㧘Vc ෸߮ C ߩჇടߦ઻޿㧘ࠬࠗ࠶࠴ࡦࠣᤨ㑆߽Ⴧᄢߔࠆ㧚ߎߩᤨߩ㔚⩄㊂ߪ Vc ߣ C ߣߩⓍߢ⴫ߐࠇࠆߩߢ㧘㔚⩄㊂ߦᲧ଀ߒߡࠬࠗ࠶࠴ࡦࠣᤨ㑆߽Ⴧടߔࠆߣ⸒߃ࠆ㧚㒠ફ⁁ᘒߦ߅޿ߡߪ㧘C ߦᓥߞߡࠬࠗ࠶࠴ࡦࠣᤨ㑆߽Ⴧടߒߡ޿ࠆ߇㧘Vc ߇Ⴧടߔࠆߣࠬࠗ࠶࠴ࡦࠣᤨ㑆ߪᷫዋߒߡ޿ࠆߎߣ߇ࠊ߆ࠆ㧚ߎࠇߪ㧘Vc ߩჇടߦࠃߞߡㅢᏱ⁁ᘒ߆ࠄ㒠ફ⁁ᘒ߳⒖ⴕߔࠆᤨ㑆߇ᷫዋߔࠆߣ޿߁㧘3.3 ߩ⎇ⓥ⚿ᨐߣ৻⥌ߔࠆ㧚
࿑ 5 Vc ᄌൻᤨߩ Ic ᵄᒻFig. 5 Collector current waveform for three different Vc(2SC5000, C=0.100uF).

⛯޿ߡ㧘3 ⒳㘃ߩ BJT ࠍ૶↪ߒ㧘C ࠍห৻ߣߒߚ႐วߩࠬࠗ࠶࠴ࡦࠣᤨ㑆ߩᄌൻࠍ࿑ 9 ߦ␜ߔ㧚ㅢᏱ⁁ᘒߦ߅޿ߡߪ㧘ቯᩰࠦ࡟ࠢ࠲㔚ᵹߩ୯߇ᄢ߈޿߶ߤ㧘ࠬࠗ࠶࠴ࡦࠣㅦᐲߪᣧߊߥߞߡ޿ࠆ㧚৻ᣇ㧘㒠ફ⁁ᘒߦ߅޿ߡߪ㧘ߘߩ௑ะߪㅒォߒ㧘ቯᩰࠦ࡟ࠢ࠲㔚ᵹߩዊߐ޿߶ߤࠬࠗ࠶࠴ࡦࠣᤨ㑆ߪᷫዋߔࠆ௑ะߦ޽ࠆߚ߼㧘ቯᩰࠦ࡟ࠢ࠲㔚ᵹ߇ᦨ߽ዊߐ޿
2SC2655 ߩࠬࠗ࠶࠴ࡦࠣㅦᐲ߇ᣧߊߥߞߡ޿ࠆߎߣ߇ુ߃ࠆ㧚࿑ 6 ࠦࡦ࠺ࡦࠨኈ㊂ᄌൻᤨߩ㔚ᵹ․ᕈ
Fig. 6 Current characteristic as a function of Vc.
࿑ 8ࠦࡦ࠺ࡦࠨኈ㊂ᄌൻᤨߩࠬࠗ࠶࠴ࡦࠣᤨ㑆․ᕈ
Fig.8 Switching time characteristic as a function of Vc.

࿑ 7 ฦ⒳ BJT ߦࠃࠆ㔚ᵹ․ᕈ
Fig. 7 Comparison of the current characteristic as a functionof Vc.

࿑ 9 ฦ⒳ BJT ߦࠃࠆࠬࠗ࠶࠴ࡦࠣᤨ㑆․ᕈ
Fig. 9 Comparison of the switching time characteristic as afunction of Vc.

220 (30)4.

静電気学会誌 第 32 巻 第 5 号（2008）ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪㧔਄㊁ࠄ㧕ቯࡄ࡞ࠬ᏷ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒࠶ࠢ࠴ࡘ࡯ࡉౝਛᔃㇱߦ⋥ᓘ 0.025mm ߩ࠲ࡦࠣࠬ࠹ࡦ✢ࠍ਄ㅀߩ⚿ᨐߦၮߠ߈㧘BJT 2SC2655 ࠍ⍴⛊ࠬࠗ࠶࠴ߣߒߡ

㔚ᭂߣߒߡ㈩⟎ߒ㧘಴ญߩ㌃ᐔ᧼ߣߩ㑆ߦዊဳࡑ࡞ࠢࠬ⊒↢ណ↪ߒߚࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ࠍⴕߞߚ㧚੹࿁㧘ⵝ⟎ࠍធ⛯ߒߚ㧚ࡍࡦౝߦߪᵹ㊂ 2.5L/min ߩⓨ᳇ࠍᵹߒ㧘ࡊ⊒↢ེߩ಴ജㇱಽߦ㧘Ბᢙߦᔕߓߚ BJT ࠍ⋥೉ធ⛯ߒ㧘⽶⩄࡜࠭ࡑߪ㌃ᐔ᧼ߦⓨߌߚ⋥ᓘ 1mm ߩⓣࠃࠅᄢ᳇ਛߦ᡼಴ߐ

ߦࠃࠄߕ৻ቯߩࡄ࡞ࠬ᏷ࠍ಴ജߔࠆߎߣ߇น⢻ߥ࿁〝ࠍ૞

ࠇࠆ㧚

ᚑߒߚ㧚
࿑ 10 ߦߘߩ࿁〝᭴ᚑࠍ␜ߔ㧚࿁〝ߪ 14 Ბ᭴ᚑߣߒ㧘ቯࡄ࡞ࠬ᏷ߩ⁁ᘒߢߩࠫࠚ࠶࠻ߩ᭽ሶࠍ࿑ 13(a)㧘⋥೉ࠬࠗฦᲑߦ߅ߌࠆࠦࡦ࠺ࡦࠨኈ㊂ߪ 0.1uF ߣߒߚ㧚಴ജㇱߦߪ㧘࠶࠴ࠍᄖߒߚ⁁ᘒߢߩࠫࠚ࠶࠻ߩ᭽ሶࠍ࿑ 13(b)ߣ(c)ߦ␜ߔ㧚⊒↢ེߩᲑᢙಽߦ޽ߚࠆ 14 ୘ߩ BJT ࠍ⋥೉ធ⛯ߒߡ޿ࠆ㧚᠟ᓇߦߪࠞࡔ࡜(D40, Nikon)ࠍ૶↪ߒ㧘ࠪࡖ࠶࠲࡯ᤨ㑆ࠍ 30⊒↢ེߩ಴ജ߇ᦨᄢߦ㆐ߒߚ⍍㑆㧘⋥೉ធ⛯ߒߚ BJT ߢ᭴ᚑ⑽ߣߒߚ㧚࿑ 13(a)ߩ਄ㇱߢߪ࠴ࡘ࡯ࡉౝߢߩ᡼㔚ߦࠃࠆ⊕⦡ߐࠇߚࠢࡠ࡯ࠫࡦࠣࠬࠗ࠶࠴߇ࠝࡦߔࠆߚ߼㧘ᒝ೙⊛ߦ⽶⩄߇߆ߞߚ⊒శ߇ߺࠄࠇ㧘ਅㇱߦߪ⿒ߺ߇߆ߞߚ᡼㔚߇ߺࠄࠇ߳ߩࠛࡀ࡞ࠡ࡯ࠍᒁ߈ᛮ߈㧘ᢙච࠽ࡁ⑽ࠝ࡯࠳ߩቯࡄ࡞ࠬࠍ

ࠆ߇㧘ߘߩિ߮ߪዊߐ޿㧚৻ᣇ㧘⋥೉ࠬࠗ࠶࠴ࠍᄖߒ㧘⽶⩄⽶⩄ߦ಴ജߔࠆߎߣ߇ߢ߈ࠆ㧚߳ߩࠛࡀ࡞ࠡ࡯ߩᒁᛮ߈ࠍήߊߒߚ႐ว㧘ࡊ࡜࠭ࡑߩિ㐳߇

࿑ 11 ߦߪ㧘⵾૞ߒߚዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍల㔚㔚࿶ 18⏕⹺ߢ߈ࠆ(࿑ 13(b))㧚⦡෻ォߒߚ࿑ 13(c)߆ࠄߘߩિ㐳߇ࠃࠅ

0V ߣߒ⽶⩄ࠍ㐿᡼ߣߒߡേ૞ߐߖߚ႐วߩ಴ജᵄᒻࠍ␜ߔ㧚㞲᣿ߦⷞ⹺ߢ߈ࠆ㧚ߎߩᤨߩࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩ㐳ߐߪ⚂㧟ᦨዊ୯-2.5kV ߩᵄ㜞୯෸߮ࡄ࡞ࠬߩඨ୯ో᏷ 35ns ࠍ᦭ߔࠆmm ߢ޽ߞߚ㧚ࡄ࡞ࠬ㔚࿶߇ᓧࠄࠇߡ޿ࠆߎߣ߇⏕⹺ߐࠇࠆ㧚߹ߚ㧘ߎߩ႐วߩ㔚࿶೑↪₸ߪ 99%ߢ޽ߞߚ㧚⛯޿ߡ㔚࿶㔚ᵹᵄᒻࠍ࿑ 14㧘15 ߦ␜ߔ㧚࿑ 14 ߪ⋥೉ࠬࠗ࠶࠴ࠍធ⛯ߒᒝ೙⊛ߦ⽶⩄߳ߩࠛࡀ࡞ࠡ࡯ࠍᒁ߈ᛮ޿ߚ⁁ᘒߢ޽ࠅ㧘ᦨዊᵄ㜞୯-2.5kV,-2.1A㧘ࡄ࡞ࠬඨ୯ో᏷ 38ns ߩ㔚࿶㔚ᵹ౒ߦ᏷ߩ⍴޿ࡄ࡞ࠬࠍ಴ജߒߡ޿ࠆ㧚⋥೉ࠬࠗ࠶࠴
ࠍᄖߒߚ႐วߢߪ㧘ᦨዊᵄ㜞୯-2.5kV㧘ࡄ࡞ࠬߩඨ୯ో᏷ 40ns ߩ㔚࿶ࡄ࡞ࠬ߇⊒↢ߒߚ⍍㑆ߦ㧘㔚ᵹ߇-2.1A ߦ㆐ߒ㧘ߘߩᓟ㧘㔚ᵹߪ✭߿߆ߦᷫዋߔࠆ㧚ߎߩ႐วߩ㔚ᵹࡄ࡞ࠬߩඨ
୯ో᏷ߪ 28us ߢ޽ࠆ㧚࿑ 10 ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ࿁〝࿑
Fig. 10 Circuit diagram of Miniaturized Marx generator.

ᦨዊᵄ㜞୯ߦ㆐ߒߚ⍍㑆㧘හߜ᡼㔚߇⿠ߎߞߚ⍍㑆ߦ⽶⩄߳ߩ㔚ᵹࠍᒝ೙⊛ߦㆤᢿߒߚ႐ว㧘ࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩિ߮ߪዊߐߊ㧘෻ኻߦ⽶⩄߳ߩ㔚ᵹࠍㅪ⛯ߒߡਈ߃ࠆߎߣߢ㧘ߘߩિ㐳߇⏕⹺ߢ߈ࠆ㧚ᓥߞߡ㧘ࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩિ߮ߪ㧘᡼㔚ߦ㆐ߒߚᓟߩ㔚ᵹߦ⿠࿃ߒ㧘ߘߩ㔚ᵹ୯ߦࠃߞߡિ߮߇ᄌൻߒߡ޿ࠆߣᕁࠊ
ࠇࠆ㧚

࿑ 11 ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎಴ജᵄᒻ(⽶⩄㐿᡼)
Fig. 11 Output voltage of Miniaturized Marx generator.
࿑ 12 ࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻࡝ࠕࠢ࠲౮⌀5.

ࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩ↢ᚑ㐿⊒ߒߚࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍ↪޿ߡࡑࠗࠢࡠ
ࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩ↢ᚑࠍ⹜ߺߚ㧚ߘߩ࡝ࠕࠢ࠲ߩᒻ⁁ࠍ࿑
12 ߦ␜ߔ㧚࡝ࠕࠢ࠲ᒻ⁁ߪࡍࡦဳߣߒ㧘⋥ᓘ 1mm ߩ࠮࡜ࡒFig.12 Photograph of micro-plasma jet reactor.

ミニチュアマルクス発生装置の開発とマイクロプラズマジェットへの応用（上野崇寿ら）

221 (31)ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪㧔਄㊁ࠄ㧕
6.

߹ߣ߼ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ਗ߮ߦࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩ↢ᚑࠍⴕߞߚ㧚వⴕ⎇ⓥߦߡ㐿⊒ߒߚ㧘BJTTubeࠍណ↪ߒߚࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩ↢ᚑߦ↪޿ࠆ႐ว㧘ࠛࡀ࡞ࠡ࡯ኈ㊂ߩჇട߇ᔅ
1mmElectrodeⷐߣߥࠆ㧚ߘߎߢኈ㊂Ⴧടࠍ⋡⊛ߣߒߡ㧘ቯᩰࠦ࡟ࠢ࠲㔚ᵹPlasma߇⇣ߥࠆ 3 ⒳㘃ߩ BJT ߩ․ᕈ⹜㛎ࠍⴕ޿㧘ㅢᏱ⁁ᘒߣ㒠ફ⁁ᘒߣߩ㑆ߢࠬࠗ࠶࠴ࡦࠣߩ․ᕈ߇ᄢ߈ߊᄌൻߔࠆߎߣࠍ⏕⹺ߒߚ㧚㒠ફ⁁ᘒߦ߅޿ߡߪቯᩰࠦ࡟ࠢ࠲㔚ᵹߦࠃࠄߕ㧘ᵹࠇࠆ㔚ᵹ߇߶߷ห৻ߣߥࠅ㧘ࠬࠗ࠶࠴ࡦࠣᤨ㑆ߪቯᩰࠦ࡟ࠢ(a)⋥೉ BJT ᦭(b) ⋥೉ BJT ή(c)⦡෻ォ࠲㔚ᵹ߇ᄢ߈޿߶ߤ⍴ߊߥࠆ㧚ߎࠇߪࠬࠗ࠶࠴ࡦࠣᤨߩࠗࡦ

࿑ 13 ࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻౮⌀㧘⦡෻ォ࿑ࡇ࡯࠳ࡦࠬߩᄢዊ߇㑐ଥߒߡ߅ࠅ㧘㒠ફ⁁ᘒߦ߅޿ߡߪ࿁〝Fig. 13 Photograph of micro-plasma jet.

ࠗࡦࡇ࡯࠳ࡦࠬ߇ᡰ㈩⊛ߦߥࠆߚ߼ߢ޽ࠆߣᕁࠊࠇࠆ㧚ᓥߞߡ㧘੹࿁⹜㛎ߒߚ 3 ⒳㘃ߩౝ㧘ࠬࠗ࠶࠴ࡦࠣᤨ㑆߇ᦨ߽ዊߐ
޿ BJT 2SC2655 ߇ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߦะ޿ߡ޿ࠆߣ⸒
߃ࠆ㧚ᰴߦ․ᕈ⹜㛎ߩ⚿ᨐࠍ߽ߣߦ㧘2SC2655 ࠍ૶ߞߚቯࡄ࡞ࠬ
᏷ߩ಴ജ߽น⢻ߥዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍ㐿⊒ߒ㧘ࡊ࡜࠭ࡑࠫࠚ࠶࠻↢ᚑࠍ⹜ߺߚ㧚ߘߩ⚿ᨐ㧘ࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩિ߮ߪ㧘᡼㔚ߦ㆐ߒߚᓟߩ㔚ᵹߦࠃߞߡᄌൻߔࠆߎߣ߇್ߞߚ㧚੹ᓟߪ㧘⋥ᵹ㔚Ḯ߿໡↪๟ᵄᢙ㔚Ḯ╬ߩᣢሽ㔚ࠍ↪޿ߚࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻↢ᚑ․ᕈߩᲧセ߿ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍ↢૕߿᧚ᢱടᎿߣ޿ߞߚ᭽‫ߥޘ‬ᔕ↪ಽ㊁ߦㆡ↪ߔࠆ੍ቯߢ޽ࠆ㧚࿑ 14 ࡝ࠕࠢ࠲㔚࿶㔚ᵹᵄᒻ(⋥೉ BJT ᦭)
Fig. 14 Voltage and current waveforms of micro-plasma jet
reactor (with series BJT).

࿑ 15 ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎಴ജᵄᒻ(⋥೉ BJT ή)
Fig. 15 Voltage and current waveforms of micro-plasma jet
reactor (non series BJT).

ෳ⠨ᢥ₂
K. Tachibana: Journal of Plasma and Fusion Research, 76(2000) 435
2) K. Tachibana: Journal of Plasma and Fusion Research, 80(2004) 8253) K. Terashima, T. Ito, H. Fujiwara, K. Katahira, A. Kono, J/Wang, M. Aramaki and T. Ichiki: Journal of Plasma andFusion Research, 80 (2004) 8454) T. Namihira, S. Tsukamoto, D. Wang, S. Katsuki, R. Hackam,K. Okamoto, H. Akiyama: IEEE Transactions on Plasma
Science, 28 (2000)109
5) ⑺ጊ⑲ౖ:O plus E, 26 (2004)1324
6) T. Heeren, T. Ueno, D. Wang, T. Namihira, S. Katsuki, H.
Akiyama: IEEE Transactions on Plasma Science, 33 (2005)
1205
7) Toshiba Semiconductor Corporation: Datasheet for
2SC2655/5076/5000

1)