UHP Valves, Fittings & System Integrate

ZD Series

200 high-temperature replaceable valves

ZD-K Series

250 high-temperature replaceable valves

UHP Gas Series

The ZD series (high-temperature replaceable valves) are valves that can be used inhigh-temperature environments and the seats of which are structurally detachable
and replaceable.
Specifications
SizeCv
Room Temperature (ZD: 200°C/ZD-K: 250°C) *1
Maximum Operating Pressure

1/4″

0.27 (0.16)

ZD-K

1/2 ″
1.3 (1.0)

1/4 ″0.27 (0.10)

1/2 ″

Grade

1.3 (0.8)

Fluid Temperature PFA
Atmospheric Temperature

44 psig (0.3 MPa(G))

Across the Seat He Leak Rates
Initial value/room temperature
Leak Rates Across the Seat He Leak Rates
ZD: at 200°C / ZD-K: at 250°C

Inboard He Leak Rates

33Actuation Pressure (Pneumatic Valve)
Manual Valve
Pneumatic Valve

- 0.7
- 0.7
- 0.7
- 0.6)( 0.4MPa(G)) ( 0.5MPa(G)) (0.4MPa(G)) ( 0.5MPa(G)−(Double melt material)≤ Rz 126µin (3.2μm)≤ Ra 20µin (0.5μm)≤ Rz 28 µin (0.7μm)≤ Ra 5 µin (0.13μm)

Mechanical polishedElectro polished

Degreasing + Precision cleaning
Single bagged package

Double bagged package*1 Measured value with male fitting body and temperature elevated by ourin-house facilities (guideline)*2 Calculated value from drawing dimensions*3 Test condition / Seat material : PFA, Gas : N2, Pressure : 44psig (0.3MPa(G))

5,000 cycles
800,000 cycles

1,000,000 cycles

SUS316L

Cobalt alloy

Packaging-103≤ 1×10 SCCS ( ≤ 1×10 Pa m /s )58 - 102 psig 73 - 102 psig 58 - 87 psig 73 - 102 psig
-9SEPSUS316LE

PFA

Diaphragm
SurfaceRoughness
PolishCleaning≤ 1×10 SCCS ( ≤ 1×10 Pa m /s )-7-6

EPSeat-9≤ 1×10 SCCS ( ≤ 1×10 Pa m /s )
-10

STD

Body Material

0.099in3
0.718in 3
0.099in 3
0.718in3(1.63 cm3) (11.76 cm3) (1.63 cm3) (11.76 cm3)
Room temperature ~ 200°C Room temperature ~ 250°C
Room temperature ~ 200°C Room temperature ~ 250°C

Wetted Area Volume *2

Cycle Life *3

ZD

Type
ModelSizeZD

4

ZD:High-temperature
replaceablevalve

4 : 1/4”
6 : 3/8”
8 : 1/2”

OperatingTemperature

Operation

Valve ShapeConnection

Seat Material

MSVA

S :Straight
A :Angle
L :L-type
B:Branch-type

V:CVC male
VF:CVC female
S:Compression fitting
W:Butt welding

A : PFA

Not shown:
M :120-degree *1
200°C-compatible
manual
K: 250°C-compatible C :Normally closed

GradeSpecial Spec

EP-316L
Not shown:Standard product

STD-316L : Mechanical polished + SUS316L
EP-316L : Electro polished + SUS316L
SEP-316LE : Electro polished + SUS316LE(Double melt material)*1 Only the ZD-K is capable of 120-degree manual operation.

Dimensions【ZD series】■ZD Pneumatic
Model

Unit:inch(mm)TypeConnection

ZD4CS-VA

L

L1H

H1

1/4" CVC Male

2.24(57.0)―

2.83(72)

ZD8CS-VA

1/2" CVC Male

3.03
(77.0)―ZD4CS-VFA

1/4" CVC Female

2.78(70.6)ZD8CS-VFA

1/2" CVC Female

A

B

C

P

M

M 1

0.43 1.56(11.0) (39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00 2-M5
Depth(25.4) 0.2(5)4.57(116)

0.63 1.73(16.0) (44.0)

1.69
1.69(43.0) (43.0)

Rc1/8

1.10 2-M5
Depth(28.0) 0.2(5)―2.83(72)

0.43 1.56(11.0) (39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00 2-M5(25.4) Depth
0.2(5)

3.27(83.0)

―4.57
(116)

0.63 1.73(16.0) (44.0)

1.69
1.69(43.0) (43.0)

Rc1/8

1.10 2-M5
Depth(28.0) 0.2(5)ZD4CS-SA

1.89
1/4" Compression fitting (48.0)

0.31
(7.9)

2.83(72)

0.43 1.56(11.0) (39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

ZD6CS-SA

2.80
3/8" Compression fitting (71.0)

0.37(9.5)

4.57(116)

0.63 1.73(16.0) (44.0)

1.69
1.69(43.0) (43.0)

Rc1/8

ZD8CS-SA

2.80
1/2" Compression fitting (71.0)

0.50(12.7)

4.57(116)

0.63 1.73(16.0) (44.0)

1.69
1.69
(43.0) (43.0)

Rc1/8

ZD4CS-WA

1/4" Butt Welding

2.13(54.0)―

2.83(72)

0.43 1.56(11.0) (39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

ZD6CS-WA

3/8" Butt Welding

2.99(76.0)―

4.57(116)

0.63 1.73(16.0) (44.0)

1.69
1.69(43.0) (43.0)

Rc1/8

ZD8CS-WA

1/2" Butt Welding

2.99(76.0)―4.57(116)

0.63 1.73(16.0) (44.0)

1.69
1.69(43.0) (43.0)

Rc1/8

1.00 2-M5
Depth(25.4) 0.2(5)1.10 2-M5
Depth(28.0) 0.2(5)1.10 2-M5
Depth(28.0) 0.2(5)1.00 2-M5
Depth(25.4) 0.2(5)1.10 2-M5
Depth(28.0) 0.2(5)1.10 2-M5
Depth(28.0) 0.2(5)Dimensions【ZD-K series】

Unit:inch(mm)■ ZD-K Manual

TypeModelA

Connection

L

L1H

H 1A

BCM

A45°
MH

ZD4KMS-VA

1/4" CVC Male

2.24(57.0)―

4.13(105)

0.43(11.0)

1.02(26.0)

1.02 0.98 1.00
(26.0) (25.0) (25.4)

2-M5
Depth
0.2(5)ZD8KMS-VA

1/2" CVC Male

3.03
(77.0)

―

4.80
(122)

0.63(16.0)

1.97(50.0)

1.69
1.69 1.10(43.0) (43.0) (28.0)

2-M5
Depth
0.2(5)ZD4KMS-VFA

1/4" CVC Female

2.78(70.6)―

4.13(105)

0.43(11.0)

1.02(26.0)

1.02 0.98 1.00
(26.0) (25.0) (25.4)

2-M5
Depth0.2(5)ZD8KMS-VFA

1/2" CVC Female

3.27(83.0)―4.80(122)0.63(16.0)

1.97(50.0)

1.69 1.10
1.69(43.0) (43.0) (28.0)

2-M5Depth0.2(5)ZD4KMS-SA

1/4" Compression fitting

1.89(48.0)

0.31(7.9)

4.13(105)

0.43(11.0)

1.02(26.0)

1.02 0.98 1.00
(26.0) (25.0) (25.4)

2-M5
Depth
0.2(5)ZD6KMS-SA

3/8" Compression fitting

2.80(71.0)

0.37(9.5)

4.80
(122)

0.63(16.0)

1.97(50.0)

1.69
1.69 1.10(43.0) (43.0) (28.0)

2-M5
Depth
0.2(5)ZD8KMS-SA

1/2" Compression fitting

2.80(71.0)

0.50(12.7)

4.80(122)

0.63(16.0)

1.97(50.0)

1.69 1.10
1.69(43.0) (43.0) (28.0)

2-M5
Depth
0.2(5)ZD4KMS-WA

1/4" Butt Welding

2.20(56.0)―

4.13(105)

0.43(11.0)

1.02(26.0)

1.02 0.98 1.00
(26.0) (25.0) (25.4)

ZD6KMS-WA

3/8" Butt Welding

2.99(76.0)―

4.80(122)

0.63(16.0)

1.97(50.0)

1.69 1.10
1.69(43.0) (43.0) (28.0)

ZD8KMS-WA

1/2" Butt Welding

2.99(76.0)

―4.80
(122)

0.63
(16.0)

1.97(50.0)

1.69
1.69 1.10(43.0) (43.0) (28.0)

2-M5
Depth
0.2(5)
2-M5
Depth
0.2(5)
2-M5
Depth
0.2(5)

A

B

C
M1

H1
B
L
A

45°
M

C

H

M1

H1B
L

A

45°
M

H

C

M1

H1
L1

L1

B
L

M 1A

45°
M

H

C

M1

H1
B
L

■ ZD-K Pneumatic
Model

Type

Connection

ZD4KCS-VA

L

L1

H

H1

H2

C

P

M

M1

1/4" CVC Male

2.24(57.0)

―4.29
(109)

0.43(11.0)

1.00 2-M5
3.07 2.05 1.02 0.98 1/8"
(78) (52.0) (26.0) (25.0) Compression (25.4) Depth
0.2(5)
fitting

ZD8KCS-VA

1/2" CVC Male

3.03
(77.0) ―

4.96
(126)

0.63
(16.0)

1/8"
1.10 2-M5
3.54 2.44 1.69 1.69 Compression
Depth(28.0) 0.2(5)(90) (62.0) (43.0) (43.0) fitting

ZD4KCS-VFA

1/4" CVC Female

2.78(70.6)―

4.29(109)

0.43(11.0)

1/8"
3.07 2.05 1.02 0.98 Compression 1.00 2-M5
Depth
(25.4) 0.2(5)(78) (52.0) (26.0) (25.0) fitting

ZD8KCS-VFA

1/2" CVC Female

3.27(83.0) ―4.96(126)0.63(16.0)

1/8"
3.54 2.44 1.69 1.69 Compression 1.10 2-M5
Depth(28.0) 0.2(5)(90) (62.0) (43.0) (43.0) fitting

ZD4KCS-SA

1.89 0.31
1/4" Compression fitting (48.0) (7.9)

4.29
(109)

0.43(11.0)

ZD6KCS-SA

2.80 0.37 4.96
3/8" Compression fitting (71.0) (9.5) (126)0.63(16.0)ZD8KCS-SA

2.80 0.50 4.96
1/2" Compression fitting (71.0) (12.7) (126)0.63(16.0)

3.54 2.44 1.69 1.69 1/8"
1.10 2-M5(90) (62.0) (43.0) (43.0) Compression (28.0) Depth
0.2(5)
fitting

ZD4KCS-WA

1/4" Butt Welding

2.20(56.0) ―4.29(109)

0.43(11.0)

1/8"
1.00 2-M5
3.07 2.05 1.02 0.98 Compression
Depth(25.4) 0.2(5)(78) (52.0) (26.0) (25.0) fitting

ZD6KCS-WA

3/8" Butt Welding

2.99 ―(76.0)

4.96
(126)

0.63
(16.0)

3.54 2.44 1.69 1.69 1/8"
1.10 2-M5(90) (62.0) (43.0) (43.0) Compression (28.0) Depth0.2(5)fitting

ZD8KCS-WA

1/2" Butt Welding

2.99 ―(76.0)

4.96
(126)

0.63(16.0)

1/8"
3.54 2.44 1.69 1.69 Compression 1.10 2-M5
Depth
(28.0) 0.2(5)(90) (62.0) (43.0) (43.0) fitting

φA
P45°
H

M

H2

C

M1

H1B
L

φA
P

45°
H

M
C

H2

M1

H1B
L

φA
P45°
M

H

C
H2

3.07 2.05 1.02 0.98 1/8"
1.00 2-M5
Depth(78) (52.0) (26.0) (25.0) Compression (25.4) 0.2(5)fitting
1/8"
1.10 2-M5
3.54 2.44 1.69 1.69 Compression
Depth(28.0) 0.2(5)(90) (62.0) (43.0) (43.0) fitting

M1

H1
L1

L1BL

φAP45°
M
HC

H2
M1

H1BL

* L1 dimension for compression fitting is the dimension of how far tube inserted from end of body.
* H and H2 dimensions are references.

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