PXRNMS2023 Program
Oral Presentation
Wednesday, 11th Oct.

Page No.

Conference Place: Medium Hall of Acrea Himeji
https://www.himeji-ccc.jp/img/pdf/pamphlet_A4-en-202304.pdf

9:00

Coffee & Sandwitch

9:55

Opening Remarks
Takeo Watanabe (Univ. of Hyogo)

10:05(Keynote)
Development and Application of Multilayer Mirror
13
Hisataka Takenaka (TOYAMA)

10:45(Invited)
Tailoring the nanoscale multilayer optics with high efficiency and precision for EUV,
X-ray and Neutron applications

14

Qiushi Huang, Runze Qi, Zhe Zhang, Zhong Zhang ,Wenbin Li, Shengzhen Yi, Zhanshan Wang (Tongji University)
Igor V. Kozhevnikov (Shubnikov Institute of Crystallography))

11:10― Coffee Break (30 min)―

11:40(Invited)
Interface characterization of neutron and X-ray multilayer using Grazing Incidence X-ray
Absorption & Fluorescence spectroscopy experiments at Indus-2 SRS

15Arup Biswas (Bhabha Atomic Research Centre)

12:05(Invited)
Current Status and Prospcet for EUV Lithograpy Which Is a Significant Application
Using Multilayers

16

Takeo Watanabe, Tetsuo Harada, and SHinji Yamakawa (Univ. of Hyogo)

12:30
14:00

― Lunch (90 min) with Lunch box @ 409 meeting room ―(Invited)
Resolving and improving the interfaces of Soft X-ray Multilayers

17
Marcelo Ackermann (Univ. of Twente)

14:25

High Reflective C/B Multilayer for Beyond EUV Lithography
Tetsuo Harada, Umi Fujimoto, Shinji Yamakawa, Takeo Watanabe (Univ. of Hyogo)

14:45― Coffee Break (30 min)―

15:15

Poster Presentations (120 min) @ Foyer of Medium Hall

17:15

Communication Party @ Foyer of Medium Hall

318

Oral Presentation
Thurthday, 12th Oct.
8:30

Coffee & Sandwitch

9:00(Invited)
Multilayer reflective optics for intense high-energy X-rays at SPring-8

19

Takahisa Koyama (Japan Synchrotron Radiation Research Institute (JASRI))

9:25

Highly efficient ultra-low blaze angle multilayer grating

20

Dmitriy Voronov, Sooyeon Park, Eric Gullikson, Farhad Salmassi and Howard Padmore(Lawrence Berkeley National Laboratory)

9:45

Multilayer-coated blazed grating for high transmission tender X-ray energy range
monochromator

21

Andrey Sokolov, Stephanie Lemke, Svyatoslav Alimov, Jeniffa Knedel, Oliver Kutz, TinoSeliger, Grzegorz Gwalt, Franz Schfers, Friedmar Senf, Frank Siewert, Jens Viefhaus(Helmholtz-Zentrum Berlin fr Materialien und Energie, BESSY-II, Berlin, Germany)
Qiushi Huang, Yeqi Zhuang, Runze Qi, Zhong Zhang, Wenbin Li, Zhanshan Wang
(Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision
Optical Engineering, School of Physics Science and Engineering, Tongji University,Shanghai, China)

10:05
10:35

― Coffee Break (30 min)―
Optimisation of Cr/Sc-based multilayer coatings for water window applications

22Evgueni Meltchakov, Sbastien de Rossi, Eirini Papagiannouli, Franck Delmotte(Universit Paris-Saclay, Institut d'Optique Graduate School)
Blandine Capitanio, Pascal Mercere (Synchrotron Soleil)

10:55

Synthesis and characterization of short- and ultrashort W-based multilayers for softx-rays

23

Dennis IJpes, Andrey E. Yakshin, Jacobus M. Sturm, Marcelo D. Ackermann(University of Twente)

11:15

NiV-based Multilayer for Soft and Hard X-ray Mirrors
Zhe Zhang, Qiushi Huang, Runze Qi, Zhong Zhang, Zhanshan Wang
(Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision
Optical Engineering, School of Physics Science and Engineering, Tongji University,Shanghai, P. R. China)

11:35― Lunch with Lunch box @ 409 meeting room ―13:00

Bus DEPARTURE time @ Acrea Himeji
To Excursion of SPring-8, SACLA, NewSUBARU synchrotron facility

17:00

Bus Arrival time @ Himeji Station
Himeji Station South Charter Bus Boarding Area
https://goo.gl/maps/PYdjtS6vETic68cQ6

18:00

Bus DEPARTURE time @ Himeji Station
To Banquet at NADA-GIKU Japanese Sake Traditional Restaurant

19:00

Banquet 120 min

21:30

Bus Arrival time @ Himeji Station

424

Oral Presentation
Friday, 13th Oct.
8:30

Coffee & Sandwitch

9:00(Invited)
Wide Bandwidth Neutron-Spin Polarizer Due to Ferromagnetic Interlayer Exchange
Coupling

25

Ryuji Maruyama (Japan Atomic Energy Agency (JAEA))

9:25(Invited)
11B4C-containing Ni/Ti multilayer neutron optics

26

Fredrik Eriksson, Sjoerd Stendahl, Naureen Ghafoor, Anton Zubayer, and Jens Birch(Linkping University, Sweden)
Mattias Schwartzkopf (DESY, Hamburg, Germany)

9:50

Material design optimization for large-m 11B4C-based Ni/Ti supermirror neutron optics

27

Naureen Ghafoor, Sjoerd Stendahl, Anton Zubayer, Marcus Lorentzon, *Alexei Vorobiev,Jens Birch, Fredrik Eriksson(Department of Physics, Chemistry, and Biology, IFM, Linkping University, Sweden,*Department of Physics and Astronomy, Material Physics, Uppsala University, Sweden,and Institut Max von LauePaul Langevin (ILL), Grenoble, France)

10:10

10B/11B-modulated chemically homogeneous boron carbide neutron interferencemirrors

28

Jens Birch, Sjoerd Stendahl, Samira Dorri, Anton Zubayer, Naureen Ghafoor, FredrikEriksson (Linkping University)

10:30
11:00

― Coffee Break (30 min)―(Invited)
All-dielectric multilayer mirrors tuned at vacuum ultraviolet wavelengths

29

Paloma López-Reyes, Nuria Gutirrez-Luna, Carlos Honrado-Bentez, and Juan Ignacio
Larruquert (GOLD-IO-CSIC Instituto de ptica Consejo Superior de Investigaciones
Cientficas, Serrano 144, 28006 Madrid, Spain)

11:25

Design Study of Soft X-Ray Aplanat with Four Multilayer Mirrors in Grazing Incidence
Configuration

30

S. Yamashita, M. Toyoda (Tokyo Polytechnic University)

11:45

Thermally stable MoNx/Si1-xNx multilayer as a substrate for XSW study of SMSI

31

Atul Tiwari, Matteo Monai, Ksenia Matveevskii, Sergey N. Yakunin, Marcelo D. Ackermann,Laurens D. B. Mandemaker, Florian Meirer and Igor A. Makhotkin(Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University ofTwente, Enschede, Netherlands)

12:05

Surface roughening by ion beams: Is ballistics “be-all and end-all”?

32

Parikshit Phadke, Jacobus M. Sturm, Fred Bijkerk, Marcelo D. Ackermann(University of Twente)

12:25

13:55

― Lunch (90 min) with Lunch box @ 409 meeting room ―(Invited)More accurate prediction of optical constants: A prerequisite for the development of
next-generation metrology instruments based on soft X-rays
Victor Soltwisch (PTB)533

14:20

Bayesian Inferences and Time-Frequency Analysis Assisted Determination of OpticalConstants in the EUV

34

Qais Saadeh, Victor Soltwisch, Christian Laubis, Michael Kolbe, and Frank Scholze (PTB)

14:40

Refractive index measurements with improved accuracy for EUV/x-ray multilayer optics
Franck Delmotte, Eirini Papagiannouli (Universit Paris-Saclay)
Regina Soufli, Catherine Burcklen (Lawrence Livermore National Laboratory)
Farhad Salmassi, Eric Gullikson (Lawrence Berkeley National Laboratory)

15:00

Closeing Remarks635

Poster Program
Wednesday, 11th Oct. 15:15 - 17:15

Page No.

The poster board will be availavle from the morning of 11th
to the end of th conference.
The board size is W1200 mm x H1800 mm.
(Recommended poster format: A0 Portrait)

1Enhancement of Diffraction Efficiency and Spectral Flux with Quasi-Graded Index
Coating (QGIC) on Soft X-Ray Laminar-Type Diffraction Gratings Optimized for B-Kand Li-K Emissions

39

Masato Koike1-3, Tadashi Hatano2, Alexander S. Pirozhkov1, Masami Terauchi2(1 Kansai Photon Science Institute, Fundamental Quantum Sciences Directorate,
National Institutes for Quantum Science and Technology
2 Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
3 Laboratory of Advanced Science and Technology for Industry, University of Hyogo)

2Development of Narrowband Multilayer Mirrors for Extracting a Single Harmonic froman EUV HHG Source

40

Suet Yi Liu, Yuya Iwamoto, Hisataka Takenaka (TOYAMA Co. Ltd, Japan)
Hiroki Mashiko, Satoshi Ichimaru, Masatoshi Hatayama (NTT Advanced TechnologyCorporation, Japan)
Eric Gullikson (Center for X-ray Optics, Lawrence Berkeley National Laboratory, USA)
Tomoya Mizuno, Takayuki Kurihara, Jiro Itatani ( Institute for Solid State Physics, theUniversity of Tokyo, Japan)

3

Resolving buried interfaces by Low-Energy Ion Scattering

41

Adele Valpreda, Jacobus M. Sturm, Andrey E. Yakshin, Marcelo Ackermann(University of Twente)

4

Fabrication and characterization of EUV multilayer gratings

42

A.H.K. Mahmoud, S. de Rossi, Anne-Lise Coutrot, A. Jrome,
E. Meltchakov, E. Papagianouli, F. Delmotte (Universit Paris-Saclay)
B. Capitanio, M. Thomasset (Synchrotron SOLEIL)

5

EMIL@BESSY-II: In-situ investigations of material combinations at a synchrotron lightsource43

Stefan Hendel, Regan G. Wilks, Mihaela Gorgoi, Anna Efimenko, Marcus Br(Helmholtz-Zentrum Berlin)

6

Upgrades of PTB’s EUV Reflectometry Instrumentation

44

Andreas Fischer, Christian Laubis, Michael Kolbe, Frank Scholze ((PTB)
Physikalisch-Technische Bundesanstalt)

7

Optical Constants of Carbon and Boron material for Beyond EUV Lithography
Umi Fujimoto, Tetsuo Harada, Shinji Yamakawa, Takeo Watanabe (Univ. of hyogo)

745

8

Improved performance of polarizing Fe/Si multilayer neutron optics by 11B4C
incorporation

46

A. Zubayer1, N. Ghafoor1, K. rarinsdttir2, S. Stendahl1, A. Glavic3, J. Stahn3, G. Nagy4, G.
Greczynski1, M. Schwarzkopf5, A. Le Febvrier1,P. Eklund1, J. Birch1, F. Magnus2, F. Eriksson1( 1. Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM),Linkping University, SE-581 83 Linkping, Sweden
2. Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland
3. Paul Scherrer Institut, 5232, Villigen PSI, Switzerland
4. Department of Physics and Astronomy, Uppsala University,SE-75120, Uppsala, Sweden
5. Photon Science, DESY, Notkestrae 85, 22607, Hamburg, Germany)

9

CeMOX, a Collaborative facility for Development of High-Performance MultilayerOptics (Withdraw)
Capitanio Blandine (Synchrotron-soleil, Gif-sur-Yvette)

10

Removal of Mo/Si Multilayer Coatings on Fused Silica Substrates by Wet ChemicalEtching

47

Mitsunori TOYODA, Ryo YOKOYAMA, Shuntaro WAKI, Jun CHEN
(Tokyo Polytechnic University)
Toshiyuki KAKUDATE(Tohoku University)

11

Picometer Sensitivity on Laboratory-based XRR Instrument Equipped with Fast andAccurate Sample Alignment System

48

Hitoshi Morioka (Bruker Japan K.K.)
Fernando Rinaldi, Martin Zimmermann (Bruker AXS GmbH)12

At-Wavelength Metrology for diffractive and reflective optics in the EUV, XUV andtender X-ray energy range

49

Andrey Sokolov, Frank Eggenstein, Peter Bischoff, Peter Baumgrtel, Matthias Mast, Marcel
Mertin, Ingo Packe, Franz Schfers, Frank Siewert, Jens Viefhaus (Helmholtz-Zentrum
Berlin fr Materialien und Energie (BESSY-II), Berlin)

13

Ultra-low thickness thin film multilayer devices for application in Water Window regimeof Soft X-ray (Withdraw)
Piyali Sarkar Roy, Arup Biswas, Dibyendu Bhattacharyya(Atomic and Molecular Physics Division, Bhabha Atomic Research Centre,
Mumbai-400085, INDIA)

14

Structural, electrical and magnetic properties of reactively DC sputtered Cu and Ti thinfilms. Application to CuTi neutron supermirrors for low spin-flip applications (Withdraw)
Jose Manuel Gómez-Guzmán, Peter Link (Heinz Maier-Leibnitz Zentrum,Technische Universität München, Germany)
Matthias Opel (Walther-Meißner-Institut, Bayerische Akademie
der Wissenschaften, Germany)
Tamás Veres (Budapest Neutron Center, Centre for Energy Research , Hungary)
László Bottyán (Wigner Research Centre for Physics, Hungary)

15

Low-Cost Cleaning Method of Mo/Si Multilayer Soft X-ray Mirrors Using a Wet ProcessToshiyuki Kakudate (National Institute of Technology (KOSEN), Hachinohe College)
Mitsunori Toyoda (Tokyo Polytechnic University)

850

16

High Irradiance Illuminator for Transmission Extreme Ultraviolet Microscopy

51

Shuntaro Waki, Yusuke Tsukui, Jun Chen, Mitsunori Toyoda (Tokyo Polytechnic University)

17

Multilayer structures in coherent x-ray diagnostics in BISER and Relativistic FlyingMirror experiments

52

A. S. Pirozhkov1, A. N. Shatokhin2, E. A. Vishnyakov3, A. Sagisaka1, K. Ogura1,
M. Koike1,4,5, T. Hatano4, H. Ohiro6, S. Namba6, J. K. Koga1, A. O. Kolesnikov2,
H. Kiriyama1, T. Zh. Esirkepov1, T. A. Pikuz7, E. N. Ragozin2, S. V. Bulanov3, M. Kando1(1. Kansai Institute for Photon Science (KPSI), QST,
2. P. N. Lebedev Physical Institute, RAS,
3. ELI-Beamlines, ELI-ERIC,
4. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
5. Laboratory of Advanced Science and Technology for Industry, University of Hyogo,
6. Department of Advanced Science and Engineering, Hiroshima University
7. Open and Transdisciplinary Research Initiatives, Osaka University)

17

A new variant of high-performance neutron supermirror polarizer
Thierry Bigault, Alexander K. Petoukhov, Guillaume Delphin,Sébastien Batisse, Amandine Vittoz, Pierre Courtois,
Valery V. Nesvizhevsky, Torsten Soldner, David Jullien, Anton Devishvili, Thomas Saerbeck(Institut Max von Laue - Paul Langevin, (ILL), Grenoble, France)

953