J. Inst. Electrostat. Jpn.

, 30, 3 (2006) 146 151ᐔ᧼⓭⿠㔚ᭂߣᐔ᧼㔚ᭂ㑆ߩࠦࡠ࠽᡼㔚ߦࠃࠆࠝ࠱ࡦ↢ᚑ․ᕈ
ฎ ᯅ ᜏ ਽*,1㧘⮮ ↰ ᵗ ม*
㧔2005 ᐕ 8 ᦬ 1 ᣣฃઃ㧧2006 ᐕ 4 ᦬ 28 ᣣฃℂ㧕

Ozone Generation by the Corona Discharge between Needle Electrode and thePlate Electrode
Takuya FURUHASHI*,1 and Yoji FUJITA*(Received August 1, 2005; Accepted April 28, 2006)

The ozone generation by the corona discharge between needle discharge electrode and plate electrode wasinvestigated. Amount of ozone generation was changed by the material and configuration of needle discharge
electrode. This study showed there was an optimal needle material and configuration of the needle discharge electrodeaffected ozone generation. Amount of ozone generation decreased by the metal with the catalytic oxide. The ozone
generation decreased by thinning the thickness of the needle electrode. The ozone generation increased, as the basewidth of the needle electrode became longer. The ozone generation increased when the width of the plate electrodewas small. The ozone generation could be decreased by thecatalytic oxide on the surface of needle electrode and bydecreasing the volume of ionizing corona discharge.
1.

ߪߓ߼ߦߚߪᐔ᧼ߣߩ㑆ߦ⋥ᵹ㜞㔚࿶ࠍශടߒߡ⊒↢ߐߖࠆ㧚ኅᐸ↪

㕒㔚᳇ᛛⴚߩᔕ↪ߩઍ⴫⊛ߥ߽ߩߣߒߡ㔚᳇㓸Ⴒⵝ⟎߇1-4)

ᯏེߢߪ৻⥸⊛ߦࡢࠗࡗ✢߹ߚߪ㊎⁁㔚ᭂߦ⋥ᵹ㜞㔚࿶ࠍ㧚㔚᳇㓸Ⴒⵝ⟎ߪࠟࠬਛߩᶋㆆ☸ሶ߿ᶧ૕ߩᓸ☸ሶࠍශടߔࠆᱜࠦࡠ࠽߇૶↪ߐࠇࠆ㧚ߘߩℂ↱ߪ⽶ࠦࡠ࠽ߣᲧセ㕒㔚᳇ജߦࠃࠅ㒰෰ߔࠆⵝ⟎ߢ޽ࠅ㧘↥ᬺ⸳஻߿Ꮏᬺ⸳஻߆ߒߡ㧘ᱜࠦࡠ࠽ߪ㧘ੱ૕ߦ᦭ኂߥࠝ࠱ࡦ߿⓸⚛㉄ൻ‛ߩ↢ᚑ޽ࠆ5)ࠄ⊒↢ߔࠆ࠳ࠬ࠻㧘ࡅࡘ࡯ࡓ㧘ࡒࠬ࠻ߥߤߩ᝝㓸 ߿㧘ࠢ࡝߇ዋߥ޿ߚ߼ߢ޽ࠆ 7,8)㧚㔚᳇㓸Ⴒⵝ⟎ߩ㓸Ⴒ₸ߦᓇ㗀ߔࠆࡄ࡯ࡦ࡞࡯ࡓ㧘∛㒮 6)ߥߤߢⓨ᳇ߩᷡᵺᕈࠍ⛽ᜬߔࠆߚ߼ߩႲ࡜ࡔ࡯࠲ߣߒߡ㧘㓸Ⴒ㕙Ⓧ㧘㔚ᭂᒻ⁁㧘⩄㔚ㇱ࡮㓸Ⴒㇱߩශ၎㒰෰ߥߤߦ᏷ᐢߊ૶↪ߐࠇߡ޿ࠆ㧚㔚᳇㓸Ⴒⵝ⟎ߪઁߩ㓸ട㔚࿶╬߇᜼ߍࠄࠇࠆ㧚ශട㔚࿶ࠍ㜞߼ߚ႐ว㧘㓸Ⴒ₸ࠍ㜞Ⴒⵝ⟎ߣᲧセߒߡ࿶ജ៊ᄬ߇ዋߥߊ㧘᝝㓸ᕈ⢻߇⦟޿ߚ߼㧘߼ࠆߎߣ߇น⢻ߢ޽ࠆ߇㧘หᤨߦࠝ࠱ࡦ߿⓸⚛㉄ൻ‛ߩ↢ᚑㄭᐕߪ↥ᬺ⸳஻㧘Ꮏᬺ⸳஻㧘ᬺോ↪ᯏེߩߺߥࠄߕ㧘ኅᐸ↪

㊂߽Ⴧടߔࠆߚ߼㧘ࠝ࠱ࡦ߿⓸⚛㉄ൻ‛ߩ⊒↢ૐᷫ߇⺖㗴ߣᯏེߢ߽㔚᳇㓸Ⴒⵝ⟎߇૶↪ߐࠇߡ޿ࠆ㧚৻⥸⊛ߦᓸ☸ሶߩߥࠆ㧚ߘߩߚ߼㧘ฦ⒳㔚ᭂᒻ⁁ࠍ↪޿ߚ㔚᳇㓸Ⴒⵝ⟎ߩ᡼㔚৻ㇱߪ៺ᡂ╬ߦࠃࠅ⩄㔚ߐࠇߡ޿ࠆ߇㧘ߘߩ㊂ߪࠊߕ߆ߢ޽․ᕈߣ㓸Ⴒ₸㧘ࠝ࠱ࡦ↢ᚑߣߩ㑐ଥߦ㑐ߒߡᬌ⸛߇ⴕࠊࠇߡࠆ㧚ᓥߞߡ㧘⥄ὼߦ⩄㔚ߐࠇߚ߽ߩߢߪ㧘㓸Ⴒㇱߩᐔⴕᐔ᧼޿ࠆ 9-16)㧚᡼㔚ߦࠃࠅ↢ߓࠆឃࠝ࠱ࡦಣℂᴺߣߒߡߪࠝ࠱ࡦ㔚ᭂߦ㓸Ⴒߐࠇࠆ☸ሶߩ㊂ߪ㕖Ᏹߦዋߥ޿㧚ߘߩߚ߼㔚᳇㓸ಽ⸃⸅ᇦࠍᓟᲑߦ⸳⟎ߒ㧘⸅ᇦ⇇㕙ߢಽ⸃ߔࠆᣇᴺ߇⠨߃ࠄႲⵝ⟎ߢߪ㧘ᓸ☸ሶࠍ⩄㔚ߔࠆᣇᴺߣߒߡࠦࡠ࠽᡼㔚ࠍ೑↪

ࠇࠆ 17)㧚ߒ߆ߒ㧘ኅᐸ↪ᯏེߥߤ⋭ࠬࡍ࡯ࠬߢߩ⸳⟎೙㒢߇ߒߡ޿ࠆ㧚ࠦࡠ࠽᡼㔚ߪ㧘ࡢࠗࡗ✢߹ߚߪ㊎⁁㔚ᭂߣ౞╴߹޽ࠆ႐ว㧘ࠝ࠱ࡦಽ⸃⸅ᇦࠍᓟᲑߦ⸳⟎ߔࠆߎߣ߇࿎㔍ߥ႐ว߇⠨߃ࠄࠇࠆ㧚߹ߚ৻⥸⊛ߥ㔚᳇㓸Ⴒⵝ⟎ߢߪ㧘ࡢࠗࡗ✢ࠠ࡯ࡢ࡯࠼㧦ࠝ࠱ࡦ 㔚ᭂ㧘ࠦࡠ࠽᡼㔚ࡊ࡜࠭ࡑⓨ᳇ᷡᵺ㧚* ਃ⪉㔚ᯏᩣᑼળ␠૑ⅣႺ⎇ⓥ㐿⊒࠮ࡦ࠲࡯ⷐ⚛ᛛⴚ㐿⊒ㇱ㧔247-8501 ␹ᄹᎹ⋵㎨ୖᏒᄢ⦁ 5-1-1㧕
Component Design & Engineering Department, Living
Environment Systems Laboratory, Mitsubishi Electric
Corporation, 5-1-1 ofuna,kamakura,Kanagawa 247-8501, Japan1
Furuhashi.Takuya@ea.MitsubishiElectric.co.jp㔚ᭂߣᐔ᧼㔚ᭂ㑆ߩࠦࡠ࠽᡼㔚ߦࠃࠅ㧘ᓸ☸ሶࠍ⩄㔚ߔࠆ߽ߩ߇ᄙ޿㧚ߒ߆ߒࡢࠗࡗ✢ߪ᡼㔚ഠൻߦࠃࠆᢿ✢ߩෂ㒾߇޽ࠆߚ߼㧘ࡢࠗࡗ✢ߦઍ߃ߡᐔ᧼⓭⿠㔚ᭂࠍ↪޿ߚ㔚᳇㓸Ⴒⵝ⟎߽㐿⊒ߐࠇߡ޿ࠆ㧚ߎࠇ߹ߢࡢࠗࡗ✢ࠍ↪޿ߚ㔚᳇㓸Ⴒⵝ⟎ߩ㓸Ⴒ₸߿ࠝ࠱ࡦ↢ᚑߦ㑐ߔࠆႎ๔ 9)ߪ޽ߞߚ߇㧘ᐔ᧼⓭⿠㔚ᭂࠍ↪޿ߚ႐วߩࠦࡠ࠽᡼㔚ߦ߅ߌࠆࠝ࠱ࡦ↢ᚑߦ㑐

147 (43)ߔࠆႎ๔ߪⴕࠊࠇߡ޿ߥ߆ߞߚ㧚੹࿁㧘᧚⾰㧘ᒻ⁁ߩ⇣ߥࠆࡔ࠶ࠠ㧘ࠬ࠹ࡦ࡟ࠬ㧔SUS304㧕ߦ 0.52m ߩ࠾࠶ࠤ࡞ࡔ࠶ࠠᐔ᧼⓭⿠㔚ᭂࠍ↪޿ߡ㧘ࠝ࠱ࡦ↢ᚑ㊂ࠍ᷹ቯߒߚ⚿ᨐ㧘㔚ᭂ

ߩ 5 ⒳㘃ߩᐔ᧼ࠍ⓭⿠ᒻ⁁ߦࡢࠗࡗࠞ࠶࠻ߢടᎿߒߚ߽ߩࠍ

᧚⾰㧘ᒻ⁁ߦࠃࠅࠝ࠱ࡦ↢ᚑ㊂߇⇣ߥࠆߎߣࠍ⷗಴ߒߚߩߢ

↪޿ߚ㧚ᐔ᧼⓭⿠㔚ᭂߩ᧼ෘߪ㧘0.2mm㧘0.3mm ߣߒ㧘⓭⿠ႎ๔ߔࠆ㧚㐳ߪ 1mm ߦ࿕ቯߒߚ㧚⓭⿠ᐩㄝ㐳ߪ㧘0.5mm㧘1mm㧘2mmߣߒߚ㧚ធ࿾㔚ᭂߩᐔ᧼㔚ᭂߦߪ㧘ࠬ࠹ࡦ࡟ࠬ㧔SUS304㧕ࠍ

2.

૶↪ߒ㧘ᐔ᧼㔚ᭂ᏷ࠍ 10mm㧘20mm ߣߒߚ㧚ᐔ᧼㔚ᭂߩ᧼ታ㛎ⵝ⟎߅ࠃ߮ᣇᴺ࿑ 1 ߦᏪ㔚ㇱߩ᭴ㅧࠍ␜ߔ㧚ࡐ࡝ࠝࠠࠪࡔ࠴࡞⵾ߩ 100mm

ෘߪ㧘0.3mm ߣߒߚ㧚ᐔ᧼⓭⿠㔚ᭂߣᐔ᧼㔚ᭂߪ੤੕ߦⓍጀⷺߩᨒߦ᡼㔚㔚ᭂߣߒߡᐔ᧼⓭⿠㔚ᭂ㧘ធ࿾㔚ᭂߣߒߡᐔ᧼ߐࠇ㧘㔚ᭂ㑆ࡇ࠶࠴ߪ 24mm ߣߒߚ㧚ᐔ᧼⓭⿠㔚ᭂߪᐔ᧼㔚㔚ᭂࠍ⚵ߺㄟߺᏪ㔚ㇱࠍ᭴ᚑߒߚ㧚࿑ 2 ߦᐔ᧼⓭⿠㔚ᭂవ┵ᭂߩ᏷ᣇะߩਛᔃ૏⟎ߦ⸳⟎ߒߚ㧚ᐔ᧼⓭⿠㔚ᭂߣᐔ᧼㔚ᭂㇱߩ᜛ᄢ౮⌀ࠍ␜ߔ㧚᡼㔚㔚ᭂߩᐔ᧼⓭⿠㔚ᭂߦߪ㧘ࠬ࠹ࡦߦߪ㧘㜞࿶㔚Ḯ߇ធ⛯ߐࠇ㧘ᐔ᧼⓭⿠㔚ᭂߦᱜ߽ߒߊߪ⽶ߩ

࡟ࠬ㧔SUS304㧕
㧘ࠬ࠹ࡦ࡟ࠬ㧔SUS316㧕㧘ࠬ࠹ࡦ࡟ࠬ㧔SUS304㧕

⋥ᵹ㜞㔚࿶ࠍශടߒߚ㧚㜞࿶㔚Ḯߦߪ㧘᳢↪㜞࿶㔚Ḯ㧔Trek

ߦ 0.52m ߩ㌃ࡔ࠶ࠠ㧘ࠬ࠹ࡦ࡟ࠬ㧔SUS304㧕ߦ 0.52m ߩ㊄610㧘0-10kV㧕ࠍ૶↪ߒ㧘㔚࿶ශടᤨߩ㔚࿶୯ߣ㔚ᵹ୯ࠍ࠺ࠫ࠲࡞ࠝࠪࡠࠬࠦ࡯ࡊ㧔Tektronix 㧘TDS754D㧕
㧘㜞࿶ࡊࡠ࡯
ࡉ㧔Tektronix 㧘6015A㧕ߢ᷹ቯߒߚ㧚Ꮺ㔚ㇱߩᓟᲑߦࡈࠔࡦ

㪈㪇㪇㫄㫄ࠍ⸳⟎ߒ㧘ⓨ᳇߇ 1m/s ߩᵹㅦߢᵹㅢߔࠆࠃ߁ߦ⺞ᢛߒߚ㧚
࿑ 3 ߦࠝ࠱ࡦ↢ᚑ㊂ߩ᷹ቯታ㛎ⵝ⟎ߩ᭴ᚑࠍ␜ߔ㧚1000L

㪉㪋㫄㫄
㪈㪇㪇㫄㫄

ߩ࠴ࡖࡦࡃౝߦᏪ㔚ㇱࠍ⸳⟎ߒ㧘Ꮺ㔚ㇱߦ㔚࿶ࠍශടߔࠆ㧚ࡈࠔࡦࠍㆇォߒ࠴ࡖࡦࡃౝߩࠝ࠱ࡦỚᐲߩ⚻ᤨᄌൻࠍ᷹ቯߒߚ㧚࠴ࡖࡦࡃౝߩࠝ࠱ࡦỚᐲߩ᷹ቯߦߪ㧘⚡ᄖ✢ๆ෼ᑼࠝ࠱ࡦ⸘㧔Thermo Electron㧘 Model 49㧕ࠍ૶↪ߒߚ㧚ࠝ࠱ࡦ↢ᚑ㊂㧘ࠦࡠ࠽᡼㔚․ᕈߪ᷷ᐲ㧘Ḩᐲߦࠃࠆᓇ㗀ࠍᄢ߈ߊฃߌࠆߚ߼ 18)㧘᷹ቯᤨߪ࠴ࡖࡦࡃౝߩ᷷ᐲࠍ 25͠㧘Ḩᐲࠍ 30㧑㪛㫀㫊㪺㪿㪸㫉㪾㪼㩷㪼㫃㪼㪺㫋㫉㫆㪻㪼ߦ⺞ᢛߒߚ㧚࠴ࡖࡦࡃౝߩ㔓࿐᳇ࠟࠬߪቶౝⓨ᳇ࠍ૶↪ߒߚ㧚㪧㫃㪸㫋㪼㩷㪼㫃㪼㪺㫋㫉㫆㪻㪼੹࿁᷹ቯߒߚߩߪ㧘ᐔ᧼⓭⿠㔚ᭂߩ᧚⾰㧘᧼ෘ㧘ᐔ᧼⓭⿠㪏㫄㫄㔚ᭂߩ⓭⿠ᐩㄝ᏷㧘ᐔ᧼㔚ᭂ᏷ߢ޽ࠆ㧚
1000L ࠴ࡖࡦࡃౝߩࠝ࠱ࡦỚᐲߩ⚻ᤨᄌൻ߆ࠄ㧘ࠝ࠱ࡦ↢㪈㫄㫄㪉㫄㫄㪈㫄㫄㪏㫄㫄ᚑ㊂ࠍ▚಴ߒߚ㧚ᧄታ㛎ߢߪ㧘ࠝ࠱ࡦ↢ᚑ㊂ߪ৻ቯߢ޽ࠅ㧘࠴ࡖࡦࡃౝߩࠝ࠱ࡦỚᐲߪᤨ㑆ߩ㑐ᢙߢ⴫ߐࠇࠆߣ⠨߃ࠄ㪙㪸㫊㪼㩷㫎㫀㪻㫋㪿ࠇࠆ㧚ᓥߞߡ㧘1000L ࠴ࡖࡦࡃౝߩࠝ࠱ࡦỚᐲ C[ppm]ߩផ⒖
ߪᑼ(1)ߢ␜ߐࠇࠆ 19)㧚㪛㪚 㫇㫆㫎㪼㫉 㫊㫌㫇㫇㫃㫐㪧㫃㪸㫋㪼㩷㫎㫀㪻㫋㪿࿑ 1 ᡼㔚ㇱߩ᭴ᚑ
Fig.1 Configuration of Charging section.

㪝㪸㫅㪦 㪊㩷㪸㫅㪸㫃㫐㫑㪼㫉㪚㪿㪸㫉㪾㫀㫅㪾 㫊㪼㪺㫋㫀㫆㫅㪈㪇㪇㪇㪣 㪺㪿㪸㫄㪹㪸㫉࿑ 2 ᡼㔚㔚ᭂవ┵ㇱ

࿑ 3 ࠝ࠱ࡦ᷹ቯታ㛎ⵝ⟎ߩ᭴ᚑ

Fig.2 The tip of Needle.

Fig.3 Experimental setup of ozone measurement.

Material AISI304, Base width 0.5mm, Thickness 0.2mm.

148 (44)30QC ᑼ(1)ࠍೋᦼ᧦ઙ t=0㧘C=0 ߩ߽ߣ⸃ߊߣᑼ(2)ࠍᓧࠆ㧚Ct M(1 EXPQQtV)

2006㪪㪬㪪㪊㪇㪋㪪㪬㪪㪊㪈㪍㪚㫌㪘㫌㪥㫀㪎

(1)

(2)

㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅㩿㫄㪾㪆㪿㪀dC
MVdt

33

ߎߎߢ Q ߪ⥄ὼᷫ⴮㊂[m /h]㧘Ct ߪ࠴ࡖࡦࡃౝߩ㨠ᤨ㑆ᓟ3㪍㪌㪋㪊㪉㪈㪇
㪇3ߩỚᐲ[ppm]㧘V ߪኈⓍ[m ]ߎߎߢߪ 1[m ]㧘㨠ߪᤨ㑆[h] 㧘M ߪࠝ࠱ࡦ↢ᚑ㊂[mg/h]ߢ޽ࠆ㧚ᑼ(2)ࠍࠝ࠱ࡦ↢ᚑ㊂ M ߦߟM 

48 K Q K Ct
QKt
(1 EXP()) K 22.4
V(3)⥄ὼᷫ⴮㊂ Q ߪ㧘࠴ࡖࡦࡃౝߦ৻ቯỚᐲߩࠝ࠱ࡦࠍḩߚߒߚ⁁ᘒߢ㧘৻ቯᤨ㑆⚻ㆊᓟߩ࠴ࡖࡦࡃౝߩࠝ࠱ࡦỚᐲࠍ᷹ቯߒ▚಴ߒߚ㧚೎ㅜታᣉߒߚੑ㉄ൻ὇⚛ߩṳᵨ㊂᷹ቯߦࠃࠅ㧘࠴ࡖࡦࡃߩ⥄ὼ឵᳇㊂ߪ 0 ߢ޽ࠆߎߣ߇ࠊ߆ߞߡ߅ࠅ㧘࠴ࡖࡦࡃౝߩࠝ࠱ࡦỚᐲߩᷫ⴮ߪ㧘ࠝ࠱ࡦߩ⥄Ꮖಽ⸃ߦࠃࠆ߽ߩߣ⠨߃ࠄࠇࠆ㧚ࠝ࠱ࡦߩ⥄Ꮖಽ⸃෻ᔕߪ⒳‫ߩޘ‬෻ᔕߦࠃࠅ⿠ߎࠆ 20)ߚ߼㧘ߘߩ෻ᔕᑼࠍ৻ߟߩᑼߢ⴫ߔߎߣߪ࿎㔍ߢ޽ࠆ㧚ᧄታ㛎ߢߪ㧘࠴ࡖࡦࡃౝߦࠝ࠱ࡦࠍḩߚߒߚ⁁ᘒߢ㧘࠴ࡖࡦࡃౝߩࠝ࠱ࡦỚᐲߩᤨ㑆ᄌൻࠍ᷹ቯߒߚ⚿ᨐ㧘ᜰᢙ㑐ᢙ⊛ߦᷫዋߔࠆߎߣ߇⏕⹺ߢ߈ߚ㧚ߘߩᷫዋߩⷐ࿃ߪ㧘⥄Ꮖಽ⸃ߦࠃࠆ߽ߩߣ⠨߃ࠄࠇࠆ߇㧘ࠝ࠱ࡦߩ⥄ὼᷫ⴮㊂ࠍ৻⟵⊛ߦ⴫ߔߚ߼ߦ㧘⥄ὼᷫ⴮㊂ Q ߩ▚಴ߦᑼ(4)ࠍ૶↪ߒߚ㧚Q

CVK Ln( 0 )Ct1t1(4)ߎߎߢ C0 ߪ࠴ࡖࡦࡃౝߩೋᦼỚᐲ[ppm]㧘Ct1 ߪ t1 ᤨ㑆ᓟߩỚᐲ[ppm]ߢ޽ࠆ㧚ᑼ(4)ߪ㧘ᑼ(1)ߢ M=0 ߣ߅߈㧘ೋᦼ᧦ઙ
t=0㧘C=C0(ҁ0)ߣߒߚᤨߩ⸃ߢ޽ࠆ

21)

㧚

㪉㪇㪇

࿑ 4 ᱜ㔚࿶ශടᤨߩ᡼㔚㔚ᭂ᧚⾰ߩ㆑޿ߦࠃࠆ
ࠝ࠱ࡦ↢ᚑ㊂Fig.4 Ozone generation vs. positive discharge current
with discharge electrode of a different material.

㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅㩿㫄㪾㪆㪿㪀޿ߡ⸃߈㧘න૏ࠍ[ppm]߆ࠄ[mg/h]ߣߔࠆߣᑼ(3)ࠍᓧࠆ㧚㪌㪇㪈㪇㪇㪈㪌㪇㪛㫀㫊㪺㪿㪸㫉㪾㪼㩷㪺㫌㫉㫉㪼㫅㫋䋨㱘㪘䋩㪪㪬㪪㪊㪇㪋㪪㪬㪪㪊㪈㪍㪚㫌㪘㫌㪥㫀㪌㪋㪅㪌㪋㪊㪅㪌㪊㪉㪅㪌㪉㪈㪅㪌㪈㪇㪅㪌㪇㪇㪌㪇㪈㪇㪇㪈㪌㪇㪛㫀㫊㪺㪿㪸㫉㪾㪼㩷㪺㫌㫉㫉㪼㫅㫋䋨㱘㪘䋩㪉㪇㪇࿑ 5 ⽶㔚࿶ශടᤨߩ᡼㔚㔚ᭂ᧚⾰ߩ㆑޿ߦࠃࠆ
ࠝ࠱ࡦ↢ᚑ㊂Fig.5 Ozone generation vs. negative discharge current
with discharge electrode of a different material.

ว㧘⽶㔚࿶ߩ႐วߣ߽ᐔ᧼⓭⿠㔚ᭂߩ᧚⾰ߦࠃࠅࠝ࠱ࡦ↢ᚑ㊂ߦᏅ߇⷗ࠄࠇߚ㧚߽ߞߣ߽ࠝ࠱ࡦ↢ᚑ㊂߇ᄙ޿߽ߩߪ㧘S
US304 ߢ޽ࠅ㧘ዋߥ޿߽ߩߪ Cu㧘Ni ߢ޽ߞߚ㧚ࠝ࠱ࡦ↢ᚑ㊂ߩ᧚⾰ߦࠃࠆᏅߪ㧘ᱜ㔚࿶ߩᣇ߇⽶㔚࿶ࠃࠅ߽ᄢ߈߆ߞߚ㧚3.

ታ㛎⚿ᨐ߅ࠃ߮⠨ኤࠝ࠱࠽ࠗࠩߩ⺃㔚૕⴫㕙ߦ⒳‫ߩޘ‬㊄ዻ㉄ൻ‛ࠍႣᏓߒߚ႐

ᐔ᧼⓭⿠㔚ᭂ᧚⾰ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂วߩࠝ࠱ࡦ↢ᚑ㊂ 22)㧘ࡢࠗࡗ✢ࠍ૶↪ߒߚ႐วߩ᡼㔚㔚ᭂߩ

࿑ 4 ߦᐔ᧼⓭⿠㔚ᭂߦᱜߩ⋥ᵹ㜞㔚࿶ࠍශടߒߚ႐วߩᐔ

᧚⾰ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ 23,24)ߦ㑐ߒߡߪႎ๔଀߇޽ࠅ㧘᧼⓭⿠㔚ᭂ᧚⾰ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ࠍ␜ߔ㧚߹ߚ࿑ 5޿ߕࠇߩ႐ว߽ Cu㧘Ag ߥߤߩ᧚⾰ߩ႐ว㧘W ߣᲧセߒߡࠝߦᐔ᧼⓭⿠㔚ᭂߦ⽶ߩ⋥ᵹ㜞㔚࿶ࠍශടߒߚ႐วߩᐔ᧼⓭࠱ࡦ↢ᚑ㊂߇ᛥ೙ߐࠇࠆ௑ะ߇␜ߐࠇߡ޿ࠆ㧚ߎࠇߪฦ㊄ዻ⿠㔚ᭂ᧚⾰ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ࠍ␜ߔ㧚਄ߢࠝ࠱ࡦಽ⸃෻ᔕ߇ㅴⴕߔࠆߚ߼ߣ⠨߃ࠄࠇࠆ㧚੹࿁ߩ⚿3.1

࿑ 4㧘࿑ 5 ߪ㧘ᐔ᧼⓭⿠㔚ᭂߩ᧼ෘ߇ 0.3mm㧘⓭⿠ᐩㄝ㐳ᨐ߽ห᭽ߦ Cu㧘Ni ߩ႐ว㧘ߎࠇࠄߩ㊄ዻ਄ߢࠝ࠱ࡦಽ⸃෻

߇ 0.5mm㧘ᐔ᧼㔚ᭂ᏷߇ 20mm ߩߣ߈ߩ⚿ᨐߢ޽ࠆ㧚ශട㔚ᔕ߇ㅴⴕߒߚߚ߼㧘ࠝ࠱ࡦ↢ᚑ㊂߇ᛥ೙ߐࠇߚߣ⠨߃ࠄࠇࠆ㧚࿶߇ᱜߩ႐ว߽⽶ߩ႐ว߽᡼㔚㔚ᵹߩჇടߣߣ߽ߦࠝ࠱ࡦ

᡼㔚㔚ᭂߩ⸅ᇦ૞↪ߦ㑐ߒߡߪ㧘ࡢࠗࡗ✢ߦ㊄ዻ㉄ൻ‛ࠍႣ↢ᚑ㊂߇Ⴧടߒ㧘ߘߩჇട₸ߪ߶߷᡼㔚㔚ᵹߦᲧ଀ߒߡ޿ࠆ㧚Ꮣߒߚ႐ว㧘ࠝ࠱ࡦ↢ᚑ㊂߇ૐᷫߒߡ޿ࠆႎ๔߇޽ࠆ 25)㧚߹ߎߩߣ߈ශട㔚࿶ߣ᡼㔚㔚ᵹߩ㑐ଥߢߪ㧘ᐔ᧼⓭⿠㔚ᭂߩ᧚ߚ㧘᡼㔚ᤨߦടᾲಣℂࠍߔࠆߎߣߢ⸅ᇦ૞↪߇ะ਄ߒ㧘ࠝ࠱⾰ߦࠃࠆᏅߪ⷗ࠄࠇߕ৻ቯߢ޽ߞߚ㧚ශട㔚࿶߇ᱜ㔚࿶ߩ႐ࡦ↢ᚑ㊂߽ૐᷫߔࠆ⚿ᨐߣߥߞߡ޿ࠆ㧚੹࿁ߩᐔ᧼⓭⿠㔚ᭂ

149 (45)㪈㪏⏕⹺ߢ߈ߥ߆ߞߚߚ߼㧘25͠ߢߩ⓭⿠⴫㕙ߦ↢ᚑߔࠆ㉄ൻ‛㪈㪍ߩࠝ࠱ࡦಽ⸃⸅ᇦ૞↪ߦࠃࠅࠝ࠱ࡦ߇ૐᷫߒߚ߽ߩߣ⠨߃ࠄࠇࠆ㧚หߓࠬ࠹ࡦ࡟ࠬߢ߽ SUS316 ߩᣇ߇ SUS304 ࠃࠅ߽Ni㧘Mo ฽᦭㊂߇ᄙߊ Ni㧘Mo ߩ㉄ൻ‛ߦࠃࠆ⸅ᇦ૞↪߇㑐ਈߒߡ޿ࠆน⢻ᕈ߇␜ໂߐࠇߚ㧚
SUS304ߢߪNi8.0㨪10.5%㧘
Cr18.0㨪20.0%㧘
Mo ฽߹ࠇߕ‫ ޕ‬SUS316 ߢߪ Ni10.0㨪14.0%㧘
Cr16.0㨪18.0%㧘Mo2.0㨪3.0%ߣߥߞߡ޿ࠆ㧚㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅㩿㫄㪾㪆㪿㪀ߩ႐ว㧘᡼㔚ਛߩ⓭⿠వ┵ߩ᷷ᐲ਄᣹ߪࠨ࡯ࡕࠣ࡜ࡈࠖߢߪ㪇㪅㪌㫄㫄㪈㫄㫄㪉㫄㫄㪈㪋㪈㪉㪈㪇㪏㪍㪋㪉

3.2ᐔ᧼⓭⿠㔚ᭂ᧼ෘߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂㪇㪇

࿑ 6 ߦᐔ᧼⓭⿠㔚ᭂߩ᧼ෘࠍᄌ߃ߚ႐วߩࠝ࠱ࡦ↢ᚑ㊂ࠍ㪌㪇㪈㪇㪇㪈㪌㪇㪛㫀㫊㪺㪿㪸㫉㪾㪼㩷㪺㫌㫉㫉㪼㫅㫋㩿㱘㪘㪀㪉㪇㪇␜ߔ㧚࿑ 6 ߩ⚿ᨐߪ㧘ᐔ᧼⓭⿠㔚ᭂߩ᧚⾰߇ࠬ࠹ࡦ࡟ࠬ㧔SUS304㧕
㧘⓭⿠㔚ᭂߩ⓭⿠ᐩㄝ㐳߇ 0.5mm㧘ᐔ᧼㔚ᭂ᏷߇ 20mm ߩߣ߈ߩ⚿ᨐߢ޽ࠆ㧚ᐔ᧼⓭⿠㔚ᭂߩ᧼ෘࠍ⭯ߊߔࠆߎߣߢࠝ࠱ࡦ↢ᚑ㊂߇ૐᷫߔࠆߎߣ߇ࠊ߆ࠆ㧚᧼ෘ߇ෘ޿႐ว㧘᧼ෘᣇะ߳᡼㔚㗔ၞ߇ᐢ߇ࠆ᭽ሶ߇⊒శ⁁ᘒߢ⏕⹺ߢ߈ߚ㧚࿑ 7 ᱜ㔚࿶ශടᤨߩ᡼㔚㔚ᭂ⓭⿠ᐩㄝ㐳ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂
Fig.7 Ozone generation vs. positive discharge current with
discharge electrode of a different base width (Plate width: 20mm).

ᓥߞߡ᧼ෘ߇ෘ޿႐ว㧘᡼㔚㗔ၞ߇ᐢ߇ࠅ㧘㉄⚛ಽሶߣߩធ㪏ࠍ૶↪ߒߚ႐ว߽㧘ࡢࠗࡗ✢ߩ⋥ᓘߦᲧ଀ߒߡࠝ࠱ࡦ↢ᚑ㊂㫇㫆㫊㫀㫋㫀㫍㪼㪄㪇㪅㪊㫋㫅㪼㪾㪸㫋㫀㫍㪼㪄㪇㪅㪊㫋㫇㫆㫊㫀㫋㫀㫍㪼㪄㪇㪅㪉㫋㫅㪼㪾㪸㫋㫀㫍㪼㪄㪇㪅㪉㫋㪈㪇㪐㪏㪎㪍㪌㪋㪊㪉㪈㪇㪍㪌㪋
㪊
㪉㪈
㪇

㪇

㪌㪇
㪈㪇㪇
㪈㪌㪇
㪛㫀㫊㪺㪿㪸㫉㪾㪼㩷㪺㫌㫉㫉㪼㫅㫋㩿㱘㪘䋩㪉㪇㪇

࿑ 6 ᡼㔚㔚ᭂ᧼ෘߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂
Fig.6 Ozone generation vs. discharge current with discharge
electrode of a different thickness. (Plate width: 20 mm).

3.3

㪇㪅㪌㫄㫄
㪈㫄㫄㪉㫄㫄㪎

㪇ᐔ᧼㔚ᭂ᏷㧘ᐔ᧼⓭⿠㔚ᭂߩ⓭⿠ᐩㄝ㐳ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂
࿑ 7 ߦᐔ᧼⓭⿠㔚ᭂߦᱜߩ⋥ᵹ㜞㔚࿶ࠍශടߒߚ႐วߩᐔ
᧼⓭⿠㔚ᭂߩ⓭⿠ᐩㄝ㐳ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ࠍ␜ߔ㧚߹ߚ࿑ 8 ߦᐔ᧼⓭⿠㔚ᭂߦ⽶ߩ⋥ᵹ㜞㔚࿶ࠍශടߒߚ႐วߩ
ᐔ᧼⓭⿠㔚ᭂߩ⓭⿠ᐩㄝ㐳ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ࠍ␜ߔ㧚
࿑ 7㧘
࿑ 8 ߣ߽ᐔ᧼⓭⿠㔚ᭂߩ᧚⾰߇ࠬ࠹ࡦ࡟ࠬ
㧔SUS304㧕㧘ᐔ᧼⓭⿠㔚ᭂߩ᧼ෘ߇ 0.3mm㧘ᐔ᧼㔚ᭂ᏷ 20mm ߩߣ߈ߩ⚿ᨐߢ޽ࠆ㧚࿑ 9 ߦ⓭⿠ᐩㄝ㐳ࠍᮮゲߦߣߞߚࠝ࠱ࡦ↢ᚑ㊂ࠍ␜ߔ㧚⓭⿠ᐩㄝ㐳ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ߩᏅߪ㧘ශട㔚࿶߇ᱜ㔚࿶ߩ႐วߦᄢ߈ߊ㧘⽶㔚࿶ߩ႐วߪዊߐ޿⚿ᨐߢ޽㪌㪇㪈㪇㪇㪈㪌㪇㪛㫀㫊㪺㪿㪸㫉㪾㪼㩷㪺㫌㫉㫉㪼㫅㫋㩿㱘㪘㪀㪉㪇㪇

࿑ 8 ⽶㔚࿶ශടᤨߩ᡼㔚㔚ᭂ⓭⿠ᐩㄝ㐳ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂
Fig.8 Ozone generation vs. negative discharge current withdischarge electrode of a different base width (Plate width: 20mm).

㫇㫆㫊㫀㫋㫀㫍㪼㪈㪌㪇㱘㪘㫇㫆㫊㫀㫋㫀㫍㪼㪉㪇㪇㱘㪘㫅㪼㪾㪸㫋㫀㫍㪼㪈㪌㪇㱘㪘㫅㪼㪾㪸㫋㫀㫍㪼㪉㪇㪇㱘㪘㪈㪏㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅㩿㫄㪾㪆㪿㪀㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅䋨㫄㪾㪆㪿㪀߇Ⴧടߔࠆߎߣࠍ␜ߒߚႎ๔଀߇޽ࠆ 26)㧚㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅㩿㫄㪾㪆㪿㪀⸅߇Ⴧߒ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߒߚߣ⠨߃ࠄࠇࠆ㧚ࡢࠗࡗ✢

㪈㪍
㪈㪋
㪈㪉
㪈㪇
㪏
㪍
㪋
㪉㪇
㪇

㪇㪅㪌
㪈㪈㪅㪌
㪙㪸㫊㪼㩷㫎㫀㪻㫋㪿㩿㫄㫄㪀㪉

࿑ 9 ⓭⿠ᐩㄝ㐳ߣࠝ࠱ࡦ↢ᚑ㊂ߩ㑐ଥ
Fig.9 Ozone generation vs. discharge electrode of a base width(Plate width: 20 mm).

150 (46)

30

32006

ߞߚ㧚⓭⿠ᐩㄝ㐳߇ᄢ߈޿႐ว㧘᡼㔚㐿ᆎ㔚࿶߇਄᣹ߒ㧘ශ㪈㪍㆑޿ߦࠃࠅ㧘᡼㔚㔚ജߦᏅ߇ߢߡ߅ࠅ㧘᡼㔚㔚ജߩᏅ⇣ߢࠝ࠱ࡦ↢ᚑ㊂ߩᏅ⇣߇⊒↢ߔࠆ㧚ߒ߆ߒ㧘ශട㔚࿶߿᡼㔚㔚ജߩ㆑޿ࠍട๧ߒߡ߽㧘⓭⿠ᐩㄝ㐳ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ߩᏅ߇ᄢ߈޿ߎߣ߆ࠄ㧘⓭⿠ᒻ⁁ߦࠃࠆᓇ㗀߇ᡰ㈩⊛ߣ್ᢿߐࠇߚ㧚⓭⿠ᐩㄝ㐳߇ᄢ߈ߊߥߞߚ႐วߦࠝ࠱ࡦ↢ᚑ㊂߇ᄙ޿ℂ↱ߣߒߡߪ㧘⓭⿠ᐩㄝ㐳߇ᄢ߈ߊߥࠆߦᓥ޿㧘⓭⿠ⷺᐲ߇ᄢ߈ߊߥࠆߚ߼㧘⓭⿠ᐩㄝᣇะ߳ߩ᡼㔚㗔ၞ߇ᐢ߇ࠅ㧘㉄㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅㩿㫄㪾㪆㪿㪀ട㔚࿶߇Ⴧടߔࠆ௑ะ߇⷗ࠄࠇߚ㧚ߘߩߚ߼㧘⓭⿠ᐩㄝ㐳ߩ㫅㫆㫄㪸㫃㪺㫆㫍㪼㫉㪼㪻㪈㪋㪈㪉㪈㪇㪏㪍㪋⚛ಽሶߣߩធ⸅߇Ⴧߒ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߒߚߚ߼ߣ⠨߃㪉ࠄࠇࠆ㧚ታ㓙⓭⿠ᐩㄝ㐳߇ᄢ߈޿႐ว㧘⓭⿠ᐩㄝᣇะ߳᡼㔚㪇㪇㗔ၞ߇ᐢ߇ࠆ᭽ሶ߇⊒శ⁁ᘒߢ⏕⹺ߢ߈ߚ㧚࿑ 10 ߦᐔ᧼㔚ᭂ᏷߇ 10mm ߩ႐วߣ 20mm ߩ႐วߩᲧセࠍ␜ߔ㧚ᐔ᧼㔚ᭂ᏷ߩ㆑޿ߢߪ㧘ᐔ᧼㔚ᭂ᏷ 10mm ߩߣ߈ߩᣇ߇㧘ᐔ᧼㔚ᭂ᏷ 20mm ߩߣ߈ࠃࠅ߽ࠝ࠱ࡦ↢ᚑ㊂߇ᄙ߆ߞߚ㧚᡼㔚㔚ᵹ߇ 502A ᤨߪᐔ᧼㔚ᭂ᏷ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ߩ㪌㪇㪈㪇㪇㪈㪌㪇㪛㫀㫊㪺㪿㪸㫉㪾㪼㩷㪺㫌㫉㫉㪼㫅㫋㩿㱘㪘㪀㪉㪇㪇

࿑ 11 ᐔ᧼㔚ᭂ┵ㇱ⛘✼ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂
Fig.11 Ozone generation vs. positive discharge current withcovering discharge electrode (Plate width: 10 mm).

Ꮕߪ⷗ࠄࠇߥ޿߇㧘㔚ᵹ߇ 2002A ᤨߪᏅ߇ᄢ߈ߊߥߞߡ޿ࠆ㧚ᐔ᧼㔚ᭂ᏷߇⍴޿႐วߪ㧘⓭⿠㔚ᭂߩవ┵ㇱߣᐔ᧼㔚ᭂߩ┵߇น⢻ߣߥࠆ㧚┵ㇱ߳ߩ᡼㔚ߦࠃࠅࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆㇱ߇ㄭߊ㧘ߘߩ▎ᚲߩ㔚⇇ᒝᐲ߇㜞ߊߥࠅ㧘ዪᚲ⊛ߦ᡼㔚߇ⷐ࿃ߣߒߡ㧘┵ㇱ߳ߩ᡼㔚ߩ⊒↢ߦࠃࠅ㧘㔚⇇ᒝᐲ߇㕖Ᏹߦ⊒↢ߒߡ޿ߚน⢻ᕈ߇㜞޿㧚ታ㓙᡼㔚㐿ᆎ㔚࿶ߪ㧘ᐔ᧼㔚ᭂ㜞ߊߥࠅ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆߎߣ߇⠨߃ࠄࠇࠆ㧚᏷ 10mm ߩߣ߈ߩᣇ߇㧘ᐔ᧼㔚ᭂ᏷ 20mm ߩߣ߈ࠃࠅ߽ૐ߆
ߞߚ㧚᡼㔚㔚ᵹ߇ૐ޿႐วߪ㧘┵ㇱ߳ߩ᡼㔚߇ዋߥ߆ߞߚߣ

3.4⠨߃ࠄࠇࠆ㧚┵ㇱ߳ߩ᡼㔚ᓇ㗀ࠍ⏕⹺ߔࠆߚ߼㧘㘑਄஥㧘㘑੹࿁ߩታ㛎ߦ߅޿ߡߪ㧘ߔߴߡߩ᧦ઙߢᱜ㔚࿶ශടߩᣇ߇

ਅ஥ߩਔ┵ㇱࠍ⛘✼࠹࡯ࡊߢⷒ޿㓝ߒߡࠝ࠱ࡦ↢ᚑ㊂ࠍ᷹⽶㔚࿶ශടࠃࠅ߽ࠝ࠱ࡦ↢ᚑ㊂߇ᄙ޿⚿ᨐߣߥߞߚ㧚ࡢࠗࡗቯߒߚ㧚 ࿑ 11 ߦ᷹ቯ⚿ᨐࠍ␜ߔ㧚࿑ 11 ߪᐔ᧼⓭⿠㔚ᭂߩ᧚✢ࠍ᡼㔚㔚ᭂߣߒߡ૶↪ߒߚ႐ว㧘⽶㔚࿶ශടߩᣇ߇ᱜ㔚࿶⾰߇ࠬ࠹ࡦ࡟ࠬ㧔SUS304㧕㧘⓭⿠㔚ᭂߩ⓭⿠ᐩㄝ᏷߇ 1mm㧘ශടࠃࠅ߽ࠝ࠱ࡦ↢ᚑ㊂߇ᄙ޿ 7)8)㧚੹࿁ߪ᡼㔚㔚ᭂߦᐔ᧼⓭ᐔ᧼㔚ᭂ᏷ 10mm ߩߣ߈ߩᱜ㔚࿶ߩ⚿ᨐߢ޽ࠆ㧚ਔ┵ㇱࠍⷒ⿠㔚ᭂࠍ૶↪ߒߚߚ߼㧘ࡢࠗࡗ✢ߩ႐วߣߪ⇣ߥߞߚ⍮⷗߇޿㓝ߒ㧘ߘߩㇱಽ߳ߩ᡼㔚ࠍᛥ೙ߔࠆߎߣߢห㔚ᵹߢߩࠝ࠱ᓧࠄࠇߚ㧚ߎࠇߪᐔ᧼⓭⿠㔚ᭂࠍ૶↪ߒߚ႐ว㧘ࡢࠗࡗ✢ߩࡦ↢ᚑ㊂߇ૐᷫߢ߈ࠆߎߣ߇ࠊ߆ߞߚ㧚ᓥߞߡ㧘ᐔ᧼㔚ᭂ᏷႐วߣߪ᡼㔚ᒻᘒ߇⇣ߥߞߡ޿ߚߚ߼ߣ⠨߃ࠄࠇࠆ㧚ߒ߆ߒࠍᄢ߈ߊߒ㧘┵ㇱ߳ߩ᡼㔚ࠍᛥ೙ߔࠇ߫ࠝ࠱ࡦ↢ᚑ㊂ߩૐᷫߥ߇ࠄ㧘ߘߩ⹦⚦ߥⷐ࿃ߦ㑐ߒߡߪ㧘੹ᓟᬌ⸛ߔߴ߈⺖㗴ߢᱜ㔚࿶ߣ⽶㔚࿶ߢߩࠝ࠱ࡦ↢ᚑ㊂ߩ㆑޿޽ࠆ㧚㪧㫃㪸㫋㪼㩷㫎㫀㪻㫋㪿㪉㪇㫄㫄㪄㪉㪇㪇㱘㪘㪧㫃㪸㫋㪼㩷㫎㫀㪻㫋㪿㪈㪇㫄㫄㪄㪉㪇㪇㱘㪘㪧㫃㪸㫋㪼㩷㫎㫀㪻㫋㪿㪉㪇㫄㫄㪄㪌㪇㱘㪘㪧㫃㪸㫋㪼㩷㫎㫀㪻㫋㪿㪈㪇㫄㫄㪄㪌㪇㱘㪘㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅㩿㫄㪾㪆㪿㪀㪉㪌㪉㪇4.

⚿⺰ᐔ᧼⓭⿠㔚ᭂߣᐔ᧼㔚ᭂߣࠍ↪޿㧘ᐔ᧼⓭⿠㔚ᭂߩ᧚⾰㧘ߘߩᒻ⁁ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ․ᕈࠍ᷹ቯߒߚ㧚ߘߩ⚿ᨐ㪈㪌એਅߩߎߣ߇ࠊ߆ߞߚ㧚Ԙᐔ᧼⓭⿠㔚ᭂߩ᧚⾰ߦࠃࠅࠝ࠱ࡦ↢ᚑ㊂ߦᏅ߇޽ࠆ㧚ߎࠇ㪈㪇ߪ㧘㔚ᭂ⴫㕙ߢࠝ࠱ࡦಽ⸃෻ᔕ߇ㅴⴕߒߚߎߣߦࠃࠆ߽ߩߣ㪌⠨߃ࠄࠇࠆ㧚ԙᐔ᧼⓭⿠㔚ᭂߩ᧼ෘࠍ⭯ߊߔࠆߎߣߢࠝ࠱ࡦ↢ᚑ㊂߇ૐ㪇㪇㪇㪅㪌㪈㪈㪅㪌㪙㪸㫊㪼 㫎㫀㪻㫋㪿㩿㫄㫄㪀㪉

࿑ 10 ᐔ᧼㔚ᭂ᏷߇ 10mm ߩ႐วߣ 20mm ߩ႐วߩࠝ࠱ࡦ↢ᚑ㊂ߩᲧセ
Fig.10 Ozone generation vs. discharge electrode of a basewidth (Plate width: 10 mm-20 mm㧘Discharge current: 50 2A200 2A 㧘Positive discharge).

ᷫߔࠆ㧚ߎࠇߪ㧘᧼ෘ߇ෘ޿႐ว㧘ෘߐᣇะ߳᡼㔚㗔ၞ߇ᐢ߇ࠅ㧘㉄⚛ಽሶߣߩធ⸅߇Ⴧߒ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߒߚߚ߼ߣ⠨߃ࠄࠇࠆ㧚Ԛᐔ᧼⓭⿠㔚ᭂߩ⓭⿠ᐩㄝ㐳߇ᄢ߈ߊߥࠆߦߒߚ߇޿㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆ㧚⓭⿠ᐩㄝ㐳߇ᄢ߈޿႐ว㧘⓭⿠ⷺᐲ߇ᄢ߈ߊߥࠆߚ߼㧘⓭⿠ᐩㄝᣇะ߳᡼㔚㗔ၞ߇ᐢ߇ࠅ㧘㉄⚛ಽሶߣߩធ⸅߇Ⴧߒ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆߣ⠨߃ࠄࠇࠆ㧚

151 (47)ԛᐔ᧼㔚ᭂ᏷ 10mm ߩ႐ว㧘ਔ┵ㇱࠍⷒ޿㓝ߒ㧘ߘߩㇱಽ߳ߩ᡼㔚ࠍᛥ೙ߔࠆߎߣߢห㔚ᵹߢߩࠝ࠱ࡦ↢ᚑ㊂߇ૐᷫߢ߈ࠆ㧚┵ㇱ߳ߩ᡼㔚ߦࠃࠅࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆⷐ࿃ߣߒߡ㧘┵ㇱߣߩ〒㔌߇ㄭߊ┵㕙߇㍈೑ߢ޽ࠆߚ߼㧘᡼㔚㔚ᭂవ┵ㇱ߆ࠄ┵ㇱ߳ࠬ࠻࡝࡯ࡑ᡼㔚߇⊒↢ߒ㧘㔚⇇ᒝᐲ߇㕖Ᏹߦ㜞ߊߥࠅ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆߎߣ߇⠨߃ࠄࠇࠆ㧚ෳ⠨ᢥ₂ᣣᧄ☳૕Ꮏᬺᛛⴚදળ✬㧦㓸Ⴒߩᛛⴚߣⵝ⟎, p.105, ᣣೀᎿᬺᣂ⡞␠ (1997)2) ᣣᧄⓨ᳇ᷡᵺදળ✬㧦ⓨ᳇ᷡᵺࡂࡦ࠼ࡉ࠶ࠢ, p.250, 317,ࠝ࡯ࡓ␠ (1981)3) 㕒㔚᳇ቇળ✬㧦ᣂ 㕒㔚᳇ࡂࡦ࠼ࡉ࠶ࠢ, p.38, ࠝ࡯ࡓ␠(1998)4) Ⴧ↰㐹৻㧦ⓨ᳇ᷡᵺ, 22 (1985) 285) ਈᎹᘕᄥ㇢㧘ᩊ↰ବ᥍㧘᳗ୖஜᄥ㇢㧦㕒㔚᳇ቇળ⹹, 18(1994) 4046) દ⮮⧐⧷㧦ࡅ࡯࠻ࡐࡦࡊߣߘߩᔕ↪, 38 (1995) 557) 㔚ሶ౮⌀ቇળ✬㧦㔚ሶ౮⌀ᛛⴚߩၮ␆ߣᔕ↪, p.221, ࠦࡠ࠽␠ (1988)8) ᚱኅᱜඳ㧘㔎⼱ᢘผ㧘᧻ਅ⑲㢬㧘⋧㚍శਯ㧦ⅣႺൻቇ, 8(1998) 823
9) Viner. A. S, Lawless. P. A, Ensor. D. S and Sparks. L. E, IEEETrans. Ind. Appl., 28 (1992) 50410) ᄢਭ଻೑৻㧘ᧁ᧛ඳિ㧘㊄ᴛ⺈ม㧘㊁ᧄᐘᴦ㧘⿷┙ቱ⦟㧦ᄢಽᄢቇᎿቇㇱ⎇ⓥႎ๔, 24 (1991) 211)

11) ᄢਭ଻೑৻㧘㊄ᴛ⺈ม㧘㊁ᧄᐘᴦ㧘⿷┙ቱ⦟㧦㕒㔚᳇ቇળ⹹, 15 (1991) 5612) ᷰㄝᕡ㓶㧦㔚ജਛᄩ⎇ⓥᚲ㔚ജ⎇ⓥᚲ⎇ⓥႎ๔, 184012(1984) 6113) Laghari. J. R, Shaw. D. T and Chou. K. H, Ind. Pollut Control
Symp., (1983) 185
14) ᄢਭ଻೑৻㧘㊁ᧄᐘᴦ㧘⿷┙ቱ⦟㧦㕒㔚᳇ቇળ⹹, 8 (1984)
39815) ⠀㊁శᄦ㧘⿷┙ቱ⦟㧦㕒㔚᳇ቇળ⹹, 4 (1980) 353
16) T. Ohkubo, S. Hamasaki, Y. Nomoto, T. Adachi and Chang. J.
S, IEEE Trans. Ind. Appl., 23 (1988) 164717) ᧻ਅ㔚ེ↥ᬺᩣᑼળ␠㧦․㐿 2001-32758518) ቬችഞ㧦ࠝ࠱ࡦ೑↪᳓ಣℂᛛⴚ, p.29, ౏ኂኻ╷ᛛⴚห෹ળ (1989)19) ᣣᧄⓨ᳇ᷡᵺදળ✬㧦ⓨ᳇ᷡᵺࡂࡦ࠼ࡉ࠶ࠢ, p.190, ࠝ࡯ࡓ␠ (1981)20) ቬችഞ㧦ࠝ࠱ࡦࡂࡦ࠼ࡉ࠶ࠢ, p.56, ᣣᧄࠝ࠱ࡦදળ(2004)21) ฎᯅᜏ਽㧘ᔒ⾐ᓆ㧘┻ౝผᦶ㧘⮮↰ᵗม㧦㕒㔚᳇ቇળ⹹㧘29, 1 (2005) 5622) ⍹੗໪ᄦ㧘☨ౝિ৻㧦ࠝ࠱ࡦ೑↪ߩᣂᛛⴚ, p.61, ਃ℃ᦠᚱ (1986)23) K. Nashimoto, J. Imaging, Sci. 32, No. 5 (1988)
24) Kimberly J. B and Jane H.D, Aerosol Science and Technology,27 (1997) 68925) ዊ㚤⋉ᒄ㧘ⁿୀᔘᤘ㧘ጟፒᐘሶ㧦ᣣᧄࠝ࠱ࡦදળᐕᰴ⎇ⓥ⻠Ṷળ (1995) 9726) ㄁↰᣹㧦㕒㔚᳇ቇળ⹹, 12 (1988) 409

150 (46)3032006ߞߚ㧚⓭⿠ᐩㄝ㐳߇ᄢ߈޿႐ว㧘᡼㔚㐿ᆎ㔚࿶߇਄᣹ߒ㧘ශ㪈㪍㆑޿ߦࠃࠅ㧘᡼㔚㔚ജߦᏅ߇ߢߡ߅ࠅ㧘᡼㔚㔚ജߩᏅ⇣ߢࠝ࠱ࡦ↢ᚑ㊂ߩᏅ⇣߇⊒↢ߔࠆ㧚ߒ߆ߒ㧘ශട㔚࿶߿᡼㔚㔚ജߩ㆑޿ࠍട๧ߒߡ߽㧘⓭⿠ᐩㄝ㐳ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ߩᏅ߇ᄢ߈޿ߎߣ߆ࠄ㧘⓭⿠ᒻ⁁ߦࠃࠆᓇ㗀߇ᡰ㈩⊛ߣ್ᢿߐࠇߚ㧚⓭⿠ᐩㄝ㐳߇ᄢ߈ߊߥߞߚ႐วߦࠝ࠱ࡦ↢ᚑ㊂߇ᄙ޿ℂ↱ߣߒߡߪ㧘⓭⿠ᐩㄝ㐳߇ᄢ߈ߊߥࠆߦᓥ޿㧘⓭⿠ⷺᐲ߇ᄢ߈ߊߥࠆߚ߼㧘⓭⿠ᐩㄝᣇะ߳ߩ᡼㔚㗔ၞ߇ᐢ߇ࠅ㧘㉄㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅㩿㫄㪾㪆㪿㪀ട㔚࿶߇Ⴧടߔࠆ௑ะ߇⷗ࠄࠇߚ㧚ߘߩߚ߼㧘⓭⿠ᐩㄝ㐳ߩ㫅㫆㫄㪸㫃㪺㫆㫍㪼㫉㪼㪻㪈㪋㪈㪉㪈㪇㪏㪍㪋⚛ಽሶߣߩធ⸅߇Ⴧߒ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߒߚߚ߼ߣ⠨߃㪉ࠄࠇࠆ㧚ታ㓙⓭⿠ᐩㄝ㐳߇ᄢ߈޿႐ว㧘⓭⿠ᐩㄝᣇะ߳᡼㔚㪇㪇㗔ၞ߇ᐢ߇ࠆ᭽ሶ߇⊒శ⁁ᘒߢ⏕⹺ߢ߈ߚ㧚࿑ 10 ߦᐔ᧼㔚ᭂ᏷߇ 10mm ߩ႐วߣ 20mm ߩ႐วߩᲧセࠍ␜ߔ㧚ᐔ᧼㔚ᭂ᏷ߩ㆑޿ߢߪ㧘ᐔ᧼㔚ᭂ᏷ 10mm ߩߣ߈ߩᣇ߇㧘ᐔ᧼㔚ᭂ᏷ 20mm ߩߣ߈ࠃࠅ߽ࠝ࠱ࡦ↢ᚑ㊂߇ᄙ߆ߞߚ㧚᡼㔚㔚ᵹ߇ 502A ᤨߪᐔ᧼㔚ᭂ᏷ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂ߩ㪌㪇㪈㪇㪇㪈㪌㪇㪛㫀㫊㪺㪿㪸㫉㪾㪼㩷㪺㫌㫉㫉㪼㫅㫋㩿㱘㪘㪀㪉㪇㪇

࿑ 11 ᐔ᧼㔚ᭂ┵ㇱ⛘✼ߦࠃࠆࠝ࠱ࡦ↢ᚑ㊂
Fig.11 Ozone generation vs. positive discharge current withcovering discharge electrode (Plate width: 10 mm).

Ꮕߪ⷗ࠄࠇߥ޿߇㧘㔚ᵹ߇ 2002A ᤨߪᏅ߇ᄢ߈ߊߥߞߡ޿ࠆ㧚ᐔ᧼㔚ᭂ᏷߇⍴޿႐วߪ㧘⓭⿠㔚ᭂߩవ┵ㇱߣᐔ᧼㔚ᭂߩ┵߇น⢻ߣߥࠆ㧚┵ㇱ߳ߩ᡼㔚ߦࠃࠅࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆㇱ߇ㄭߊ㧘ߘߩ▎ᚲߩ㔚⇇ᒝᐲ߇㜞ߊߥࠅ㧘ዪᚲ⊛ߦ᡼㔚߇ⷐ࿃ߣߒߡ㧘┵ㇱ߳ߩ᡼㔚ߩ⊒↢ߦࠃࠅ㧘㔚⇇ᒝᐲ߇㕖Ᏹߦ⊒↢ߒߡ޿ߚน⢻ᕈ߇㜞޿㧚ታ㓙᡼㔚㐿ᆎ㔚࿶ߪ㧘ᐔ᧼㔚ᭂ㜞ߊߥࠅ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆߎߣ߇⠨߃ࠄࠇࠆ㧚᏷ 10mm ߩߣ߈ߩᣇ߇㧘ᐔ᧼㔚ᭂ᏷ 20mm ߩߣ߈ࠃࠅ߽ૐ߆
ߞߚ㧚᡼㔚㔚ᵹ߇ૐ޿႐วߪ㧘┵ㇱ߳ߩ᡼㔚߇ዋߥ߆ߞߚߣ

3.4⠨߃ࠄࠇࠆ㧚┵ㇱ߳ߩ᡼㔚ᓇ㗀ࠍ⏕⹺ߔࠆߚ߼㧘㘑਄஥㧘㘑੹࿁ߩታ㛎ߦ߅޿ߡߪ㧘ߔߴߡߩ᧦ઙߢᱜ㔚࿶ශടߩᣇ߇

ਅ஥ߩਔ┵ㇱࠍ⛘✼࠹࡯ࡊߢⷒ޿㓝ߒߡࠝ࠱ࡦ↢ᚑ㊂ࠍ᷹⽶㔚࿶ශടࠃࠅ߽ࠝ࠱ࡦ↢ᚑ㊂߇ᄙ޿⚿ᨐߣߥߞߚ㧚ࡢࠗࡗቯߒߚ㧚 ࿑ 11 ߦ᷹ቯ⚿ᨐࠍ␜ߔ㧚࿑ 11 ߪᐔ᧼⓭⿠㔚ᭂߩ᧚✢ࠍ᡼㔚㔚ᭂߣߒߡ૶↪ߒߚ႐ว㧘⽶㔚࿶ශടߩᣇ߇ᱜ㔚࿶⾰߇ࠬ࠹ࡦ࡟ࠬ㧔SUS304㧕㧘⓭⿠㔚ᭂߩ⓭⿠ᐩㄝ᏷߇ 1mm㧘ශടࠃࠅ߽ࠝ࠱ࡦ↢ᚑ㊂߇ᄙ޿ 7)8)㧚੹࿁ߪ᡼㔚㔚ᭂߦᐔ᧼⓭ᐔ᧼㔚ᭂ᏷ 10mm ߩߣ߈ߩᱜ㔚࿶ߩ⚿ᨐߢ޽ࠆ㧚ਔ┵ㇱࠍⷒ⿠㔚ᭂࠍ૶↪ߒߚߚ߼㧘ࡢࠗࡗ✢ߩ႐วߣߪ⇣ߥߞߚ⍮⷗߇޿㓝ߒ㧘ߘߩㇱಽ߳ߩ᡼㔚ࠍᛥ೙ߔࠆߎߣߢห㔚ᵹߢߩࠝ࠱ᓧࠄࠇߚ㧚ߎࠇߪᐔ᧼⓭⿠㔚ᭂࠍ૶↪ߒߚ႐ว㧘ࡢࠗࡗ✢ߩࡦ↢ᚑ㊂߇ૐᷫߢ߈ࠆߎߣ߇ࠊ߆ߞߚ㧚ᓥߞߡ㧘ᐔ᧼㔚ᭂ᏷႐วߣߪ᡼㔚ᒻᘒ߇⇣ߥߞߡ޿ߚߚ߼ߣ⠨߃ࠄࠇࠆ㧚ߒ߆ߒࠍᄢ߈ߊߒ㧘┵ㇱ߳ߩ᡼㔚ࠍᛥ೙ߔࠇ߫ࠝ࠱ࡦ↢ᚑ㊂ߩૐᷫߥ߇ࠄ㧘ߘߩ⹦⚦ߥⷐ࿃ߦ㑐ߒߡߪ㧘੹ᓟᬌ⸛ߔߴ߈⺖㗴ߢᱜ㔚࿶ߣ⽶㔚࿶ߢߩࠝ࠱ࡦ↢ᚑ㊂ߩ㆑޿޽ࠆ㧚㪧㫃㪸㫋㪼㩷㫎㫀㪻㫋㪿㪉㪇㫄㫄㪄㪉㪇㪇㱘㪘㪧㫃㪸㫋㪼㩷㫎㫀㪻㫋㪿㪈㪇㫄㫄㪄㪉㪇㪇㱘㪘㪧㫃㪸㫋㪼㩷㫎㫀㪻㫋㪿㪉㪇㫄㫄㪄㪌㪇㱘㪘㪧㫃㪸㫋㪼㩷㫎㫀㪻㫋㪿㪈㪇㫄㫄㪄㪌㪇㱘㪘㪦㫑㫆㫅㪼㩷㪾㪼㫅㪼㫉㪸㫋㫀㫆㫅㩿㫄㪾㪆㪿㪀㪉㪌㪉㪇4.

⚿⺰ᐔ᧼⓭⿠㔚ᭂߣᐔ᧼㔚ᭂߣࠍ↪޿㧘ᐔ᧼⓭⿠㔚ᭂߩ᧚⾰㧘ߘߩᒻ⁁ߩ㆑޿ߦࠃࠆࠝ࠱ࡦ↢ᚑ․ᕈࠍ᷹ቯߒߚ㧚ߘߩ⚿ᨐ㪈㪌એਅߩߎߣ߇ࠊ߆ߞߚ㧚Ԙᐔ᧼⓭⿠㔚ᭂߩ᧚⾰ߦࠃࠅࠝ࠱ࡦ↢ᚑ㊂ߦᏅ߇޽ࠆ㧚ߎࠇ㪈㪇ߪ㧘㔚ᭂ⴫㕙ߢࠝ࠱ࡦಽ⸃෻ᔕ߇ㅴⴕߒߚߎߣߦࠃࠆ߽ߩߣ㪌⠨߃ࠄࠇࠆ㧚ԙᐔ᧼⓭⿠㔚ᭂߩ᧼ෘࠍ⭯ߊߔࠆߎߣߢࠝ࠱ࡦ↢ᚑ㊂߇ૐ㪇㪇㪇㪅㪌㪈㪈㪅㪌㪙㪸㫊㪼 㫎㫀㪻㫋㪿㩿㫄㫄㪀㪉

࿑ 10 ᐔ᧼㔚ᭂ᏷߇ 10mm ߩ႐วߣ 20mm ߩ႐วߩࠝ࠱
ࡦ↢ᚑ㊂ߩᲧセ
Fig.10 Ozone generation vs. discharge electrode of a basewidth (Plate width: 10 mm-20 mm㧘Discharge current: 50 2A200 2A 㧘Positive discharge).

ᷫߔࠆ㧚ߎࠇߪ㧘᧼ෘ߇ෘ޿႐ว㧘ෘߐᣇะ߳᡼㔚㗔ၞ߇ᐢ߇ࠅ㧘㉄⚛ಽሶߣߩធ⸅߇Ⴧߒ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߒߚߚ߼ߣ⠨߃ࠄࠇࠆ㧚Ԛᐔ᧼⓭⿠㔚ᭂߩ⓭⿠ᐩㄝ㐳߇ᄢ߈ߊߥࠆߦߒߚ߇޿㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆ㧚⓭⿠ᐩㄝ㐳߇ᄢ߈޿႐ว㧘⓭⿠ⷺᐲ߇ᄢ߈ߊߥࠆߚ߼㧘⓭⿠ᐩㄝᣇะ߳᡼㔚㗔ၞ߇ᐢ߇ࠅ㧘㉄⚛ಽሶߣߩធ⸅߇Ⴧߒ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆߣ⠨߃ࠄࠇࠆ㧚

151 (47)ԛᐔ᧼㔚ᭂ᏷ 10mm ߩ႐ว㧘ਔ┵ㇱࠍⷒ޿㓝ߒ㧘ߘߩㇱಽ߳ߩ᡼㔚ࠍᛥ೙ߔࠆߎߣߢห㔚ᵹߢߩࠝ࠱ࡦ↢ᚑ㊂߇ૐᷫߢ߈ࠆ㧚┵ㇱ߳ߩ᡼㔚ߦࠃࠅࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆⷐ࿃ߣߒ
ߡ㧘┵ㇱߣߩ〒㔌߇ㄭߊ┵㕙߇㍈೑ߢ޽ࠆߚ߼㧘᡼㔚㔚ᭂవ┵ㇱ߆ࠄ┵ㇱ߳ࠬ࠻࡝࡯ࡑ᡼㔚߇⊒↢ߒ㧘㔚⇇ᒝᐲ߇㕖Ᏹߦ㜞ߊߥࠅ㧘ࠝ࠱ࡦ↢ᚑ㊂߇Ⴧടߔࠆߎߣ߇⠨߃ࠄࠇࠆ㧚ෳ⠨ᢥ₂ᣣᧄ☳૕Ꮏᬺᛛⴚදળ✬㧦㓸Ⴒߩᛛⴚߣⵝ⟎, p.105, ᣣೀᎿᬺᣂ⡞␠ (1997)2) ᣣᧄⓨ᳇ᷡᵺදળ✬㧦ⓨ᳇ᷡᵺࡂࡦ࠼ࡉ࠶ࠢ, p.250, 317,ࠝ࡯ࡓ␠ (1981)3) 㕒㔚᳇ቇળ✬㧦ᣂ 㕒㔚᳇ࡂࡦ࠼ࡉ࠶ࠢ, p.38, ࠝ࡯ࡓ␠(1998)4) Ⴧ↰㐹৻㧦ⓨ᳇ᷡᵺ, 22 (1985) 285) ਈᎹᘕᄥ㇢㧘ᩊ↰ବ᥍㧘᳗ୖஜᄥ㇢㧦㕒㔚᳇ቇળ⹹, 18(1994) 4046) દ⮮⧐⧷㧦ࡅ࡯࠻ࡐࡦࡊߣߘߩᔕ↪, 38 (1995) 557) 㔚ሶ౮⌀ቇળ✬㧦㔚ሶ౮⌀ᛛⴚߩၮ␆ߣᔕ↪, p.221, ࠦࡠ࠽␠ (1988)8) ᚱኅᱜඳ㧘㔎⼱ᢘผ㧘᧻ਅ⑲㢬㧘⋧㚍శਯ㧦ⅣႺൻቇ, 8(1998) 8239) Viner. A. S, Lawless. P. A, Ensor. D. S and Sparks. L. E, IEEETrans. Ind. Appl., 28 (1992) 50410) ᄢਭ଻೑৻㧘ᧁ᧛ඳિ㧘㊄ᴛ⺈ม㧘㊁ᧄᐘᴦ㧘⿷┙ቱ⦟㧦ᄢಽᄢቇᎿቇㇱ⎇ⓥႎ๔, 24 (1991) 211)

11) ᄢਭ଻೑৻㧘㊄ᴛ⺈ม㧘㊁ᧄᐘᴦ㧘⿷┙ቱ⦟㧦㕒㔚᳇ቇળ⹹, 15 (1991) 5612) ᷰㄝᕡ㓶㧦㔚ജਛᄩ⎇ⓥᚲ㔚ജ⎇ⓥᚲ⎇ⓥႎ๔, 184012(1984) 6113) Laghari. J. R, Shaw. D. T and Chou. K. H, Ind. Pollut ControlSymp., (1983) 18514) ᄢਭ଻೑৻㧘㊁ᧄᐘᴦ㧘⿷┙ቱ⦟㧦㕒㔚᳇ቇળ⹹, 8 (1984)
39815) ⠀㊁శᄦ㧘⿷┙ቱ⦟㧦㕒㔚᳇ቇળ⹹, 4 (1980) 353
16) T. Ohkubo, S. Hamasaki, Y. Nomoto, T. Adachi and Chang. J.
S, IEEE Trans. Ind. Appl., 23 (1988) 164717) ᧻ਅ㔚ེ↥ᬺᩣᑼળ␠㧦․㐿 2001-327585
18) ቬችഞ㧦ࠝ࠱ࡦ೑↪᳓ಣℂᛛⴚ, p.29, ౏ኂኻ╷ᛛⴚห෹ળ (1989)19) ᣣᧄⓨ᳇ᷡᵺදળ✬㧦ⓨ᳇ᷡᵺࡂࡦ࠼ࡉ࠶ࠢ, p.190, ࠝ࡯ࡓ␠ (1981)20) ቬችഞ㧦ࠝ࠱ࡦࡂࡦ࠼ࡉ࠶ࠢ, p.56, ᣣᧄࠝ࠱ࡦදળ(2004)21) ฎᯅᜏ਽㧘ᔒ⾐ᓆ㧘┻ౝผᦶ㧘⮮↰ᵗม㧦㕒㔚᳇ቇળ⹹㧘29, 1 (2005) 5622) ⍹੗໪ᄦ㧘☨ౝિ৻㧦ࠝ࠱ࡦ೑↪ߩᣂᛛⴚ, p.61, ਃ℃ᦠᚱ (1986)23) K. Nashimoto, J. Imaging, Sci. 32, No. 5 (1988)
24) Kimberly J. B and Jane H.D, Aerosol Science and Technology,27 (1997) 68925) ዊ㚤⋉ᒄ㧘ⁿୀᔘᤘ㧘ጟፒᐘሶ㧦ᣣᧄࠝ࠱ࡦදળᐕᰴ⎇ⓥ⻠Ṷળ (1995) 9726) ㄁↰᣹㧦㕒㔚᳇ቇળ⹹, 12 (1988) 409