J. Inst. Electrostat. Jpn.

, 31, 5 (2007) 198 204

㜞᳇࿶ O2 ࠟࠬਛߦ߅ߌࠆ⽶ࠗࠝࡦ⒖േᐲߩ᷹ቯ
ᨋ༜ਭ*(2007 ᐕ 1 ᦬ 25 ᣣฃઃ㧧2007 ᐕ 7 ᦬ 13 ᣣฃℂ)

Measurement of Negative Ion Mobility at High Pressure Condition in O2 Gas
Takahisa HAYASHI*(Received January 25, 2007 ; Accepted July 13, 2007)

This paper describes the experimental results and discussions on negative ion mobility in oxygen gas
under the gas pressure ranging from 450 to 2230 Torr. The obtained negative ion mobility tends to be
proportional inversely to the gas pressure.

The reduced values of mobility under the standardcondition of 760 Torr at 0͠ are almost in agreement with the values reported by other researcher.
The author confirmed that the values of reduced mobility is 2.08 cm2 / V࡮s, which is obtained in thisexperiment is very close to the reported value of the mobility of O2̆.
એਅߦ߅޿ߡߪᱴࠎߤ৻ቯߩ⒖േᐲǴ=2.05cm2 /V࡮s ࠍ᷹ⷰ1. ߪߓ߼ߦ㔚⇇߇ශടߐࠇߚࠟࠬⓨ㑆ਛࠍ⩄㔚☸ሶ߇⒖േߔࠆᤨ, ⩄ߒ, ߘߩᓟ E/p0 ߩჇടߣ౒ߦᷫዋߒߚߣႎ๔ߒߡ޿ࠆ.

1).

Fujibayashi ߪ 㜞᷷ᄢ᳇࿶ਛߦ߅ߌࠆࠗࠝࡦߩ⒖േᐲ᷹ቯࠍ

ߎߩ⒖േᐲߪ, ᷹ቯᤨߩࠟࠬ࿶ജߦߪ෻Ყ଀ߔࠆߎߣ߇ℂ⺰ⴕߞߚ. ⓨ᳇ߩ࿶ജߪ 1005hPa, ᷷ᐲᄌൻߪ㧜͠㨪⚂ 400͠⊛ߦ෶ታ㛎⊛ߦ߽⸽᣿ߐࠇߡ߅ࠅ, න૏ࠟࠬ࿶ജᒰࠅߩ୯ߣߦ߅޿ߡ⽶ࠗࠝࡦ⒖േᐲࠍ᳞߼ߚߘߩ⚿ᨐ⒖േᐲߪ㧜͠ߢߒߡ␜ߐࠇࠆߎߣ߇ᄙ޿. ߘߩࠃ߁ߥਛߢᄙߊߩ႐วࠗࠝࡦ⚂ 2.010-4 m2 /V࡮s, 200͠ߢ⚂ 3.8510-4 m2 /V࡮s, 420͠

⒖േᐲ᷹ቯߪᢙ 10Torr એਅߩૐࠟࠬ࿶ജߦ߅ߌࠆ ”ࠬࠝ࡯ߢ⚂ 7.810-4 m2 /V࡮s ߢ޽ࠆߎߣࠍႎ๔ߒߎࠇߪ㜞᷷ߢߩ

ࡓᴺ” 2) 3) ߦࠃߞߡⴕߥࠊࠇࠆߎߣ߇ᄙ޿.

ࠗࠝࡦ⒳ߩᄌൻߣੑᰴ㔚ሶ᡼኿ߦࠃࠆലᨐߢ޽ࠆߣㅀߴߡ޿㔚☸ሶߩ⒖േㅦᐲߣශട㔚⇇ߩᲧࠍ⒖േᐲߣ๭ࠎߢ޿ࠆ

ߎࠇߦኻߒ, ⪺⠪߇↪޿ߡ߈ߚᣇᴺ 4)㨪9) ߪᄢ᳇࿶ਅߢേ૞ߔࠆࠗࠝࡦᬌ಴ེࠆ

ࠍ஻߃ߚ࠼࡝ࡈ࠻࠴ࡘ࡯ࡉࠍ↪޿ߡ޿ࠆߩߢࠗࠝࡦߩ᜛ᢔߩ᧲ጊߪ ࡄ࡞ࠬࠦࡠ࠽᡼㔚ࠍ೑↪ߒߚⓨ᳇ਛߢߩᱜࠗࠝࡦᓇ㗀ࠍዊߐߊߒߚ⁁ᘒߢⴕ߃ࠆߎߣߦ․㐳߇޽ࠆ. ෶, 㜞ࠟ

⒖േᐲ᷹ቯᴺࠍ㐿⊒ߒ ߎߩⵝ⟎ࠍ↪޿ߚታ㛎⚿ᨐߣߒߡ឵

ࠬ࿶ജߢߩ᷹ቯߢ޽ࠆߩߢࠗࠝࡦ⒖േᐲ߇, ૐ޿឵▚㔚⇇▚㔚⇇ 0.7㧨E/p㧨2.2V/cm࡮Torr ߦ߅޿ߡᐔဋ⒖േᐲ 1.95

E/p0 (E:㔚⇇ᒝᐲ, p0 :㧜͠឵▚ࠟࠬ࿶ജ) ߦ⸳ቯߢ߈ E/p0 ߦ

10-4 m2 /V࡮s ࠍ߽ߟࠗࠝࡦ⒳ߩሽ࿷ࠍႎ๔ߒߡ޿ࠆ

ኻߒߡᐔမߥ․ᕈࠍឬߊ㗔ၞߢߩ឵▚⒖േᐲ᷹ቯ߇น⢻ߣߥ↪޿ߡ O2 ਛ 4) 5) O2 /O3 ᷙวࠟࠬਛ 6), SF6 ਛ 7) ෸߮ CF4 ਛ 8)ࠆ.
⪺⠪ߩ⎇ⓥߦవ┙ߜᄢ᳇࿶ਛߢߩ⒖േᐲ᷹ቯߦߟ޿ߡߪ,Gosho ࠄ 10)⪺⠪ߪ Gosho ࠄ 10) ߇㐿⊒ߒߚࠗࠝࡦ࠼࡝ࡈ࠻࠴ࡘ࡯ࡉࠍ
ߩ⒖േᐲ᷹ቯࠍᄢ᳇࿶ਅߢⴕߥ޿, ߘࠇࠄߩ⚿ᨐߦߟ޿ߡႎFujibayashi ࠄ 11) ߩႎ๔߇޽ࠅ,෶ᦨㄭߢߪ

๔ߒߚ. ߎߩࠃ߁ߥਛߢ․ߦᄢ᳇࿶ O2/O3 ᷙวࠟࠬਛߩ⽶ࠗ᧲ጊࠄ 11) ߦࠃࠆ⺰ᢥ߽ႎ๔ߐࠇߡ޿ࠆ, ߎࠇࠄࠍ߹ߣ߼ࠆߣࠝࡦ⒖േᐲ߇ O3 Ớᐲߩ㜞ߊߥࠆ⒟ዊߐߊߥࠆߎߣࠍ⷗಴ߒ,ᰴߩࠃ߁ߦߥࠆ.

⃻࿷߽ߎߩ⚿ᨐߦߟ޿ߡᬌ⸛ߒߡ޿ࠆ. ⹦⚦ߪ੹ᓟߩᬌ⸛⚿߿,Gosho ࠄ ߪ ᄢ ᳇ ࿶ ਛ ߢ ឵ ▚ 㔚 ⇇ ᒝ ᐲ 0.02 ҇ E/p0 ҇ᨐࠍᓙߚߥߌࠇ߫ߥࠄߥ޿߇, ⚐ O2 ਛߢ᷹ⷰߒߚ O2࡯߇ O3

0.8V/cm࡮Torr ߩ▸࿐ߢⴕߞߚ⚿ᨐ, E/p0=0.15 V/cm࡮TorrỚᐲߩ㜞ߊߥࠆߩߦᓥߞߡ࠼࡝ࡈ࠻ⓨ㑆ࠍ㘧ⴕߒߥ߇ࠄ O2--------------------------------------------------------------------

෶ߪ O3 ߣⴣ⓭ࠍߊࠅ㄰ߒ, ೎ߩࠢ࡜ࠬ࠲࡯ࠍ฽߻ࠗࠝࡦߦᄌࠠ࡯ࡢ࡯࠼㧦O2, 㜞᳇࿶‫ޔ‬O2̆‫ޔࡦࠝࠗ⽶ޔ‬⒖േᐲ

ൻߒߡ޿ࠆߩߢߪߥ޿߆ߣផ᷹ߒߡ޿ࠆ. ߎߩ⚿ᨐߪ* ජ⪲Ꮏᬺᄢቇ 㔚᳇㔚ሶᖱႎᎿቇ⑼Matejcik ࠄߩႎ๔ 13) 14) ߦ߽㑐ㅪߒߡ⥝๧޽ࠆᬌ⸛੐㗄ߢ‫ޥ‬275-0016 ජ⪲⋵⠌ᔒ㊁Ꮢᵤ↰ᴧ 2-17-1
Department of Electrical Electronics and Computer
Engineering,Chiba Institute of Technology.

޽ࠆ.
ߎߩࠃ߁ߥႎ๔߇޽ࠆਛߢ, ᄢ᳇࿶એ਄ߢ᷹ቯߒߚ⽶ࠗࠝ
ࡦ⒖േᐲߩ᷹ቯ⚿ᨐߦߟ޿ߡߩႎ๔ߪ⪺⠪ߩ⚂ 3 ᳇࿶ߦ߅ߌ

2-17-1, Tsudanuma, Narashino-shi, Chiba 275-0016

ࠆ᷹ቯ⚿ᨐ 9)એᄖߪ⷗ᒰߚࠄߥ޿. ߘߎߢᧄ⺰ᢥߪ,⚐ O2 ਛߢ,hayashi.takahisa@it-chiba.ac.jp

450 Torr ߆ࠄ 2230 Torr ߹ߢߦ߅ߌࠆ⒖േᐲ᷹ቯࠍⴕߞߚ

O2199 (25)⚿ᨐߦߟ޿ߡႎ๔ߔࠆ. ᄢ᳇࿶એ਄ߩ㜞᳇࿶ߢ߽⽶ࠗࠝࡦ⒖േᐲ᷹ቯ߇น⢻ߢ޽ࠆߣ޿߁ὐߦᵈ⋡ߒታ㛎ࠍⴕߞߚ⚿ᨐࠍㅀߴߚߩ߇ᧄ⺰ᢥߩ․㐳ߢ޽ࠆ. ߘߩⷐὐߪ, ࠟࠬ࿶ജ1277Torr ߹ߢ, ᦝߦ, ೎ߩ᷹ቯⵝ⟎ࠍ↪޿ߡ, 2230Torr ߹ߢᄌൻߒߚᤨߩࠗࠝࡦ⒖േᐲߪ, ࠟࠬ࿶ജߦ෻Ყ଀ߒߡૐਅߔࠆ߽ߩߩ, ᮡḰ⁁ᘒߦ឵▚ߒߚ⒖േᐲߪߔߴߡ৻⥌ߒ, ߘߩ୯ߪ O2̆ߩ⒖േᐲߢ޽ࠆߎߣࠍ⏕⹺ߔࠆߎߣ߇ߢ߈ߚߎߣߦ
޽ࠆ.
E/p0 =0.175 (V/cm㨯Torr), p0 =760 (Torr), d=45mm

2. ታ㛎ⵝ⟎෸߮ᣇᴺ2.1 ᡼㔚ኈེ࿑㧝ߪ↪޿ߚታ㛎ⵝ⟎ߩ᭎⇛࿑ߢ޽ࠆ.

ߎࠇߪ Gosho ࠄ߇㐿⊒ߒߚ߽ߩߣၮᧄ⊛ߦߪหߓߢ޽ࠅ,0.5ǴA/div,
࿑25ms/divࡃ࡯ࠬ࠻ࡄ࡞ࠬᵄᒻ

Fig.2 Wave form of burst pulses.

ᣢ ߦ ႎ ๔ ߒ ߚታ 㛎 ⵝ ⟎ 7) ߢ ߽ ޽ ࠆ . ࠼࡝ ࡈ ࠻ ⓨ 㑆 㐳ߪ ,15mm ߆ࠄ 95mm ߹ߢᄌൻߢ߈ࠆ. ᡼㔚ኈེߪࠕࠢ࡝࡞᮸⢽450, 600, 760, 980, 1130, 1277 Torr, ࠼࡝ࡈ࠻ⓨ㑆㐳ߪ 15,⵾౞╴ဳ㧔⋥ᓘ 200mm㨮㐳ߐ 340mm㧕ߢ޽ࠆ.

45, 95㨙m ߩਅߢ⒖േᐲ᷹ቯࠍⴕߥߞߚ. ৻ቯߩ E/p0 ߩਅߢࠡࡖ࠶ࡊ G1 ߪ㒶ᭂ(C) ෸߮㓁ᭂ(A)ߣ࡝ࡦࠣ⁁ࠟ࡯࠼㔚ᭂዋߥߊߣ߽ 100 ࿁➅ࠅ㄰ߒ᷹ቯࠍⴕߞߚ. ᦝߦ, ࿁ᢙࠍ㊀ߨ(D)ࠃࠅ᭴ᚑߐࠇߚᐔ╬㔚⇇ࠡࡖ࠶ࡊߢ⽶ࠗࠝࡦ࠼࡝ࡈ࠻ⓨࠆߣ߈ߪㅪ⛯ߒߡ 500 ࿁ⴕ߁ߏߣߦ᷹ቯࠍਛᢿߒ,ࠟࠬࠍ੤

㑆ߢ޽ࠆ. ࠟ࡯࠼㔚ᭂߪ㒶ᭂߣ㓁ᭂ㑆ߦ㧡ߟ㈩⟎ߒߚ. ޿ߕ឵ߒߚ. ↪޿ߚ O2 ࠟࠬ⚐ᐲߪ 99.99%ߢ޽ߞߚ. ߎࠇߣߪ೎ࠇ߽㒶ᭂ߆ࠄ࡝ࡦࠣဳࠟ࡯࠼㔚ᭂߩਛᔃゲ߹ߢߩ૏⟎ߦኻᔕߩⵝ⟎ߢ࠼࡝ࡈ࠻ⓨ㑆㐳 94㨙m, ࠟࠬ࿶ജߪ 760, 1860,ߒߚⓨ㑆㔚૏ࠍਈ߃ࠆࠃ߁ߦᛶ᛫ R=100Mǡߦࠃࠅ㓁ᭂߣ㒶

2230 Torr ߦ߅޿ߡ᷹ቯߒߚ႐ว߽޽ࠆ. ૉߒ, ߎߩ႐วߩࠟᭂ㑆ߩ㔚࿶ࠍಽഀߒශടߒߚ. 㓁ᭂਛᄩߦߪ⋥ᓘ 15mm ߩⓣࠬ⚐ᐲߪ 99.9㧑ߢ޽ߞߚ.

ࠍ㐿ߌ, ㊄ዻࡔ࠶ࠪࡘ(M) #32 ࠍᒛߞߚ. ߎࠇߪࡄ࡞ࠬ⚡ᄖ

2.2 ⒖േᐲ᷹ቯ

⽶ࠗࠝࡦ↢ᚑ↪ೋᦼ㔚ሶߩଏ⛎ߪ, ᄢశ㧔UV శߣ⸥ߔ㧕߿⽶ࠗࠝࡦ⟲߇ㅢㆊߢ߈ࠆࠃ߁ߦߔࠆߚ᳇࿶ਛ⋥ᓘ 12.5mm ߩ⃿㔚ᭂ㑆ߩ㐳ߐ 1mm ߩࠡࡖ࠶ࡊਛߦ߼ߢ޽ࠆ.

⊒↢ߔࠆἫ⧎᡼㔚శߦࠃߞߚ. એᓟ, ߎࠇࠍࡄ࡞ࠬ UV శߣࠡࡖ࠶ࡊ G2 ߪࡔ࠶ࠪࡘ㔚ᭂ(M)ߣ㊎㔚ᭂ(P)ࠃࠅߥࠆᱜࠦ

๭߱ߎߣߦߔࠆ߇, ߎߩ➅ࠅ㄰ߒᤨ㑆ߪ⚂㧝⑽ߢ޽ߞߚ. ߎࡠ࠽ࠡࡖ࠶ࡊ(P㧙M 㑆ߪ 15㨙m)ߢ, 㔚ᭂ㑆ߦߪࠟࠗࠟ࡯ࠞ

ߩࡄ࡞ࠬ UV శࠍ᡼㔚ኈེߦ⸳ߌߚ⍹⧷⓹ࠍㅢߒߡ㓁ᭂਛᄩ࠙ࡦ࠲㗔ၞߩ⋥ᵹ㔚࿶ࠍ⋥೉ᛶ᛫ Rs =100 Mǡࠍㅢߒߡශട

ㇱߩࡔ࠶ࠪࡘߣ㒶ᭂਛᄩㇱߩ⴫㕙ߦᾖ኿ߔࠆߣ, ࡔ࠶ࠪࡘ㔚

ߒߚ. ㊎㔚ᭂߩవ┵ߦߪ⊕㊄✢(ᦛ₸ඨᓘ 0.2mm, 㐳ߐ 3mm)ᭂߣ㒶ᭂ߆ࠄశ㔚ሶ߇᡼಴ߐࠇࠆ. ߎߩᤨೞࠍ࿑㧞ߦ߅޿ߡࠍ૶↪ߒߡᒝ㔚⇇ࠍᒻᚑߒߚ. ߎࠇߪ᡼኿✢⸘᷹ߦ↪޿ࠄࠇ㨠㧜ߣߔࠆ. ߎߩ㔚ሶߪ⋥ߜߦ㔚ᭂ⴫㕙ㄭߊߢ O2 ߦઃ⌕ߒߡࠆࠟࠗࠟ࡯ࠞ࠙ࡦ࠲15)ߣኽ౉ࠟࠬߪ⇣ߥࠆ߇หߓേ૞ේℂߦࠃࠆ߽ߩߢ, ᧄታ㛎ߢߪ⽶ࠗࠝࡦᬌ಴ེߣߒߡേ૞ߔࠆ.
O2 ࠟࠬߪ㓁ᭂ஥߆ࠄ᡼㔚ኈེߦ౉ࠇ, ࿶ജߪ㧜͠឵▚୯ߢ⽶ࠗࠝࡦߣߥࠅශട㔚⇇ߦࠃࠅ࠼࡝ࡈ࠻ࠍ㐿ᆎߔࠆ. వߕࡔ࠶ࠪࡘ߆ࠄ಴⊒ߒߚ⽶ࠗࠝࡦ⟲ߪ, G2 ࠍᮮಾࠅ㊎㔚ᭂㄭறߩᒝ㔚⇇ㇱߢ㔚ሶ㔌⣕ࠍ⿠ߎߔ. ߘߩ㔚ሶߪᕆㅦߦ㔚ሶߥߛࠇࠍ⿠ߎߒߎߩ㔚ᵹߪᬌ಴ᛶ᛫ r=100kǡߦࠃࠅᬌ಴ߐࠇ, ࠺ࠫ࠲࡞ࠝࠪࡠࠬࠦ࡯ࡊ਄ߦࡃ࡯ࠬ࠻ࡄ࡞ࠬ BP1 ߣߒߡឬ߈಴ߐࠇࠆ. ߎߩࡄ࡞ࠬߩ಴⃻ᤨೞ߇࿑ਛߩ㨠㧝ߢ޽ࠆ. ৻ᣇ㒶ᭂ߆ࠄ಴⊒ߒߚ⽶ࠗࠝࡦߪ, ᐔ╬㔚⇇߇ශടߐࠇߚࠗࠝࡦ࠼࡝ࡈ࠻ⓨ㑆 G1 ࠍㅢࠅ, ߘߩ৻ㇱߪࡔ࠶ࠪࡘࠍߊߋࠅᛮߌ G2 ߦ
౉ࠆ. ߘߩᓟߪవߦࡔ࠶ࠪࡘ߆ࠄ಴⊒ߒߚࠗࠝࡦ⟲ߣหߓ⚻〝ࠍߚߤࠅ, ห࿑ਛߩᤨೞ㨠 㧞 ߦ㧞ߟ⋡ߩࡃ࡯ࠬ࠻ࡄ࡞ࠬBP2 ߣߒߡ᷹ⷰߐࠇࠆ. ߎߩࠃ߁ߦߒߡ 2 ߟߩㅪߥߞߚࡄ࡞ࠬ BP1‫ ޔ‬BP2 ߩᵄᒻ߇ห࿑ߦ␜ߒߚࠃ߁ߦ᷹ⷰߐࠇࠆ.
࿑ 2 ߩ㨠㧝ߣ㨠㧞ߩᤨ㑆Ꮕߪ㧞ߟߩࠗࠝࡦ⟲ߩ㊎㔚ᭂ߳ߩ೔⌕ᤨ㑆ᏅǼߢ޽ࠅ, ߎߩ୯߆ࠄ G1 ࠍ㘧ⴕߒߚ⽶ࠗࠝࡦߩ࠼࡝

࿑ 1 ታ㛎ⵝ⟎Fig.1 Experimental apparatus.

ࡈ࠻ㅦᐲǽd ෸߮⒖േᐲǴ߇ᰴᑼߦࠃࠅ᳿ቯߢ߈ࠆ.

200 (26)

315

2007

㨯㨯㨯㨯㨯㨯㨯㨯 (1)ࡔ࠶ࠪࡘ㔚ᭂ㑆 d=15mm‫ޔ‬හߜᱜࠦࡠ࠽ࠡࡖ࠶ࡊࠍᒻᚑߒߚǽd 㧩d㧛Ǽ 㧔cm㧛s㧕㨯㨯㨯㨯㨯㨯 (2)ࠗࠝࡦᬌ಴ⓨ㑆ߦࠟࠗࠟ࡯ࠞ࠙ࡦ࠲㗔ၞߩ㔚࿶ࠍශടߒߥߌǴ 㧩ǽd㧛E (cm2㧛V㨯s) 㨯㨯㨯㨯(3)ࠇ߫ߥࠄߥ޿. ੹࿁ߩࠃ߁ߦ㜞᳇࿶ਛߢ⽶ࠗࠝࡦࠍᬌ಴ߔࠆǼ 㧩㨠 㧙㨠Uߦߪ‫ޔ‬㊎㔚ᭂߩශട㔚࿶ࠍࠟࠬ࿶ജߦᔕߓߡᄌൻߐߖࠆߎߣ
d㧦࠼࡝ࡈ࠻ⓨ㑆〒㔌 (cm),E㧦㔚⇇ᒝᐲ (V㧛cm)߇ᔅⷐߣߥࠆ. ߎߩࠃ߁ߥ଀ߣߒߡ 450, 980, 1277, 1420
Torr ߦ߅ߌࠆᱜࠦࡠ࠽ࠡࡖ࠶ࡊߩ V̆I ․ᕈࠍ࿑㧟ߦ␜ߔ‫ޕ‬

BP1 ߣ BP2 ߩᤨ㑆ᏅǼߪ, หߓ E/p0 ߢ޽ߞߡ߽࿶ജ߇ᄌࠊ࿑ਛߩ⍫ශߢ␜ߒߚ▸࿐߇ࠟࠗࠟ࡯ࠞ࠙ࡦ࠲㗔ၞߩ㔚࿶ߢ޽ࠆߣߘߩߟߤᄌേߒߡ᷹ⷰߐࠇߚ. ߒ߆ߒ, BP1 ߩ಴⃻ᤨೞࠆߣ್ᢿߢ߈ࠆ 15). ߎߩ㗔ၞࠍࠟࠬ࿶ജߦኻߒߡ␜ߒߚߩ߇㨠 㧝 ߣ㨠 㧜 ߩ㑆㓒ߪᏱߦ৻ቯߢ޽ߞߚߩߢ, Ǽߩ߫ࠄߟ߈ߪ

࿑ 4 ߢ޽ࠆ. ࠟࠬ࿶ജࠍ 300㨪1420 Torr ߹ߢᄌൻߒߚ႐ว‫ޔ‬

G1 ߣ G2 ࠍᮮಾߞߚࠗࠝࡦ⟲ߩ૞ࠆ BP2 ߩ಴⃻ᤨೞ㨠㧞ߩᄌേ㊎㔚ᭂ߳ߩශട㔚࿶ߪ࿶ജߦᲧ଀ߒߡ㜞ߊߥࠆߎߣ߇ࠊ߆

ߦࠃࠆ߽ߩߢ޽ࠆ. ଀߃߫ E/p0 = 0.3 V/cm࡮Torr ߦ߅޿ߡ‫ޔ‬ࠆ.

450 Torr ߩᤨ,Ǽߩᄌേ᏷ߪ 0.7ms 1277 Torr ߩᤨǼߩᄌേ
᏷ߪ 0.37ms ߢ޽ߞߚ ߘߒߡߎߩࠃ߁ߥ᷹ቯࠍ 100 ࿁એ਄➅ࠅ㄰ߒ, ߘߩㇺᐲ⒖േᐲࠍ▚಴ߒߡ⒖േᐲߩ᷹ⷰ㗫ᐲಽᏓ
ߣߒߚ. ෶, หߓ E/p0 ߩਅߢ 100 ࿁᷹ቯߒߚ⒖േᐲߩᐔဋ୯
ࠍǴߣߒ, ߎࠇࠍ(4)ᑼߦࠃࠅ㧜͠, 760Torr ߩᮡḰ⁁ᘒߦ឵▚ߒǴ㧜ߣߒߡ⴫ߒߚ.
Ǵ㧜㧩Ǵ(㨜㧛760)࡮(273㧛T) 㨯㨯㨯㨯㨯㨯(4)Ǵ㧦᷹ቯߒߚ⒖േᐲ㨜㧦ࠟࠬ࿶ജ (Torr),(cm2㧛V㨯s)

T㧦᷹ቯᤨߩ᷷ࠟࠬᐲ (K)࿑ 4 ࠟࠬ࿶ജߦࠃࠆࠟࠗࠟ࡯ࠞ࠙ࡦ࠲㗔ၞૐ㔚⇇ਅߢߪ⒖േᐲ߇឵▚㔚⇇ߦኻߒߡᐔမߦߥࠆ⒖േᐲ

Fig.4

Geiger Counter region of positive corona gap(gap. 15mm).

ࠍᜬߟ߇, ߎߩ୯ࠍ឵▚⒖േᐲǴ00 ߣߒߡ⴫ࠊߔߎߣߦߔࠆ.

3. ታ㛎⚿ᨐ෸߮⠨ኤ
3.1 ⽶ࠗࠝࡦᬌ಴ࠡࡖ࠶ࡊߩࠟࠗࠟ࡯ࠞ࠙ࡦ࠲㗔ၞ⒖േᐲ᷹ቯߦᔅⷐߥࡃ࡯ࠬ࠻ࡄ࡞ࠬࠍ⊒↢ߐߖࠆߦߪ㊎ኻ3.2 ࠟࠬ࿶ജᄌൻᤨߩ⒖േᐲ᷹ቯ
࿑㧡, 㧢, 㧣 ߪࠗࠝࡦ࠼࡝ࡈ࠻ⓨ㑆㐳ࠍ 15, 45, 95 mm ߣ
ߒ, E/p0 ߦኻߔࠆ⒖േᐲࠍ 6 ⒳㘃ߩࠟࠬ࿶ജߢ᷹ቯߒߚ⚿ᨐ
ߢ޽ࠆ. ࿑ਛߩ㧝୘ߩࡊࡠ࠶࠻ὐߪ 100 ࿁ߩ᷹ቯ୯ߩᐔဋࠍ
␜ߒߡ޿ࠆ.
(1) ࠼࡝ࡈ࠻ⓨ㑆㐳 d=15mm ߦ߅ߌࠆታ㛎ࠟࠬ࿶ജࠍᄌൻߒߥ߇ࠄ᷹ቯߒߚ⚿ᨐࠍ࿑㧡ߦ␜ߔ. 450
Torr ߩ႐ว, 0.011҇E/p0҇0.1V/cm㨯Torr ߦ߅޿ߡ‫ޔ‬⒖േᐲ
ߪ E/p0 ߦኻߒ߶߷৻ቯߢ‫ޔ‬ᐔᜂߥ․ᕈࠍ␜ߔ. ߎߩߣ߈ߩ⒖േᐲߩᐔဋ୯ߪǴ㧩3.9 cm2 /V㨯s, 760 Torr ߢ, Ǵ㧩2.1cm2/V࡮s, 1277 Torr ߢߪǴ 㧩1.25cm2 /V࡮s ߣߥߞߚ. ᦝߦ,⒖േ
ᐲߪ E/p0㧪0.3 V/cm㨯Torr ߦ߅޿ߡჇടߒ,ߎߩࠃ߁ߥჇട௑
ะߪ 1277 Torr ߹ߢߩ᷹ቯ⚿ᨐߦ౒ㅢߒߡ᷹ⷰߐࠇߡ޿ࠆ.
࿶ജ߇ 980Torr ߆ࠄ 1277 Torr ߦߥࠆߣ E/p0㧪0.3 V/cm࡮Torr
ߦ߅ߌࠆ⒖േᐲߩჇടߪ 450 Torr ߩ႐วߣᲧセߒߡዊߐߊߥࠆ.

࿑3ࠟࠬ࿶ജߦࠃࠆ㔚࿶̆㔚ᵹ․ᕈ

Fig.3 Characteristics of positive corona gap
by gas pressure (gap. 15mm).

හߜ, ࠼࡝ࡈ࠻ⓨ㑆ౝߦ߅޿ߡࠟࠬ࿶ജࠍ 450 Torr ࠃࠅ㜞ߊߔࠆߣ‫࠻ࡈ࡝࠼ޔ‬ⓨ㑆ࠍ㘧ⴕߔࠆ⽶ࠗࠝࡦߩಽሶߣⴣ⓭ߔࠆᯏળ߇Ⴧߔߎߣ߆ࠄ⒖േᐲߪߔߴߡߩ E/p0 ߦ߅޿ߡૐਅ ߒߚ.

O2201 (27)(2) ࠼࡝ࡈ࠻ⓨ㑆㐳 d=45mm ߦ߅ߌࠆታ㛎߇, 15mm ߩ႐วߣห᭽ E/p0㧪1.0V/cm㨯Torr ߦ߅ߌࠆ⒖േᐲ᷹ቯ⚿ᨐࠍ࿑㧢ߦ␜ߔ. 450 Torr ߩ႐ว, ⒖േᐲߪ 0.04҇

ߩჇട௑ะߪ 450Torr ߩ႐วࠃࠅ߽ዊߐߊߥߞߡ޿ࠆ.

E/p0҇0.7 V/cm࡮Torr ߦ߅޿ߡ߶߷৻ቯ୯ࠍ␜ߒ E/p0 ߩૐ޿㗔ၞߢ৻ቯߢᐔမߥ୯ߪ

Ǵ00 = 3.92cm2 /V㨯s߇ᓧࠄࠇߚ.

(3)࠼࡝ࡈ࠻ⓨ㑆㐳 d=95mm ߦ߅ߌࠆታ㛎᷹ቯ⚿ᨐࠍ࿑㧣ߦ␜ߔ. 450 Torr ߩ႐ว, ⒖േᐲߪ 0.04㧨෶‫ޔ‬E/p0㧪0.7V/cm㨯Torr ߦ߅޿ߡჇട௑ะࠍ␜ߔ. ߎߩࠃ߁E/p0㧨0.7V/cm㨯Torr ߦ߅޿ߡ߶߷৻ቯ୯ࠍ␜ߒ, E/p0㧪0.7

ߥ⒖േᐲߩᄌൻ․ᕈߪ࠼࡝ࡈ࠻ⓨ㑆㐳 15mm ߦ߅ߌࠆ E/p0V/cm࡮Torr ߦ߅޿ߡ✭߿߆ߥ਄᣹௑ะࠍ␜ߒߚ. ᦝߦ E/p0

㧪0.4 V/cm࡮Torr ߩ․ᕈߣ߶߷หߓ௑ะࠍ␜ߒߡ޿ࠆ. ෶,߇ᄢ߈ߊߥࠆߣ 450 ߣ 600Torr ߦ߅޿ߡ‫ޔ‬⒖േᐲߪ࠼࡝ࡈ࠻

ࠟࠬ࿶ജࠍ 450Torr ࠃࠅ㜞ߊߔࠆߣ⒖േᐲߪ㗅ᰴૐਅߔࠆ

࿑ 7 ⽶ࠗࠝࡦ⒖േᐲߩ᷹ቯ୯ (d=95mm)
࿑㧡
Fig.5

⽶ࠗࠝࡦ⒖േᐲߩ᷹ቯ୯ (d=15mm)

Fig.7 Observed negative ion mobility (d=95mm).

Observed negative ion mobility (d=15mm).
ⓨ㑆㐳 15, 45 mm ߩᤨߣห᭽ߥჇട௑ะࠍ␜ߔ߇‫ޔ‬760Torrએ਄ߩ࿶ജߦ߅޿ߡߪ‫ߥ߆߿✭ࠅࠃߢ߹ࠇߎޔ‬Ⴧടߦߥߞߚ.
෶, E/p0㧪1.5V/cm㨯Torr ߦ߅޿ߡ߽⒖േᐲߩჇടߪ✭߿߆ߦߥߞߡ޿ࠆ. ߎߩࠃ߁ߦ,E/p0 ߦኻߔࠆᄌൻ߽✭߿߆ߦߥࠆߩ
߇࠼࡝ࡈ࠻ⓨ㑆㐳ࠍ㐳ߊߒߚߣ߈ߩ․㐳ߢ޽ࠆ. E/p0 ߩૐ޿ㇱಽߢߩ৻ቯߥ୯ߩ⒖േᐲߪ, 450Torr ߢǴ00㧩3.9 cm2 /V࡮s߇ᓧࠄࠇ, 760Torr ߢߪǴ00 = 2.08 cm2 /V㨯s ߣߥࠆ. හߜ, ࠟࠬ࿶ജࠍ 450Torr ߆ࠄ 1277Torr ߩ▸࿐ߦ߅޿ߡ⒖േᐲߪ㗅ᰴૐਅߔࠆ. ࠟࠬ࿶ജ߇ 1277 Torr ߣ㜞ߊߥࠆߣ, ߎߎߢ᷹ቯߒߚ E/p0҈1.0V/cm㨯Torr ߢߪ ߶߷৻ቯߥ⒖േᐲࠍ␜ߒ,ߎࠇ߹ߢߩࠃ߁ߦჇടߔࠆ௑ะߪዊߐߊߥߞߚ.
(4)ᮡḰ⁁ᘒߦ឵▚ߒߚ⒖േᐲ

࿑㧡, 㧢, 㧣 ߩ⚿ᨐࠍᮡḰ⁁ᘒ (0͠‫ޔ‬760Torr) ߩ឵▚୯ߣߒߡࡊࡠ࠶࠻ߒߚ⚿ᨐ߇࿑㧤, 㧥, 10 ߢ޽ࠆ. ߎߎߢ␜ߒߚ․㐳ߪ㨮E/p0҇0.1V/cm㨯Torr ߦ߅ߌࠆ᷹ቯ୯ߪࠟࠬ࿶ജߦ㑐ࠊࠄߕ, ࠼࡝ࡈ࠻ⓨ㑆㐳ߏߣߦ߶߷৻⥌ߒߚ⒖േᐲ․ᕈࠍ
࿑ 6 ⽶ࠗࠝࡦ⒖േᐲߩ᷹ቯ୯ (d=45mm)

ឬ ߊ ߎ ߣ ߢ ޽ ࠆ . ฦ ࠼ ࡝ ࡈ ࠻ ⓨ 㑆 㐳 ߦ ߅ ޿ ߡ E/p0 ҇ 0.1

Fig.6 Observed negative ion mobility (d=45mm).

V/cm㨯Torr ၞߢ E/p0 ߦኻߒߡ৻ቯߢᐔမߥ⒖േᐲࠍ឵▚⒖േᐲߣߒߡ᳞߼ࠆߣ ࠼࡝ࡈ࠻ⓨ㑆㐳ߦ߆߆ࠊࠄߕǴ00 =202 (28)

315

2007

ߢ޽ࠆ߇, ߎߎߦ૬ߖߡ⸥ㅀߒ,߹ߣ߼ߡ⼏⺰ߔࠆ. ߎߩᤨߩ᷹ቯ᧦ઙߪ O2 ߩ⚐ᐲߪ 99.9㧑ߢ੹࿁ߩࠟࠬ⚐ᐲߣߪ⇣ߥࠆ.
෶‫࠻ࡈ࡝࠼ޔ‬ⓨ㑆㐳ߪ 94mm ߢ޽ࠅ, ․ߦࠟࠬ࿶ജߪᦨᄢ
2230Torr ߹ߢߩ▸࿐ߢ᷹ቯߒߚ. ߎࠇࠄߩ᷹ቯ⚿ᨐࠍᮡḰ⁁ᘒߦ឵▚ߒߚ⒖േᐲߣߒߡ࿑ 11 ߦ␜ߒߚ. ᷹ቯߒߚࠟࠬ࿶
ജߦࠃࠅ E/p0 ߦኻߒߡᐔမߦߥࠆߪߕߩ឵▚⒖േᐲ߇௖߆ߦ

࿑ 8 ᮡḰ⁁ᘒߦ឵▚ߒߚ⽶ࠗࠝࡦ⒖േᐲߩ᷹ቯ୯
Fig.8 Reduced negative ion mobility (d=15mm)

࿑ 11 ᮡḰ⁁ᘒߦ឵▚ߒߚ⽶ࠗࠝࡦ⒖േᐲߩ᷹ቯ୯
Fig.11 Reduced negative ion mobility (d=94mm).
ᄌേߒ߫ࠄߟ߈߽ᄢ߈޿. ߎࠇߪ᡼㔚ኈེߩ㆑޿ߦࠃࠆ߽ߩ
ߣ߽⠨߃ࠄࠇࠆ߇‫ޔ‬ᮡḰ⁁ᘒߢߪ߶߷㧝ᧄߩᦛ✢ߢ⴫⃻ߢ߈
ࠆ. ߎߩࠃ߁ߥ⒖േᐲ․ᕈ߆ࠄ឵▚⒖േᐲࠍ᳞߼ࠆߣ
Ǵ00ѳ2.08r3.5㧑 cm2/V࡮s ߣߥߞߚ
࿑ 9 ᮡḰ⁁ᘒߦ឵▚ߒߚ⽶ࠗࠝࡦ⒖േᐲߩ᷹ቯ୯
Fig.9

Reduced negative ion mobility (d=45mm).

એ਄ߩ࿑ 8, 9, 10, 11 ߦ␜ߒߚ᷹ቯ୯ࠍฦ‫ޘ‬ᐔဋߒ߹ߣ߼ߚ⚿ᨐࠍ࿑ 12 ߦ␜ߔ. E/p0҇0.1V/cm㨯Torr ߦ߅ߌࠆ⒖േᐲߪ‫ޔ‬
E/p0 ߦኻߒᐔမߣߥࠅߘߩ୯ߩǴ00 ߪ 2.08 cm2/V࡮s ߢ޽ߞߚ. හߜ, 2230Torr ߹ߢߩࠟࠬ࿶ജߦ߅޿ߡ߽឵▚⒖േᐲ
Ǵ00 ߪหߓߢ޽ࠆߎߣ߇᣿ࠄ߆ߣߥߞߚ. ߎߩ⒖േᐲߪ O2̆
ߦࠃࠆ߽ߩߢ޽ࠆߣ್ᢿߢ߈ࠆ. ߘࠇߪ, ߎߩ୯߇⾰㊂ಽᨆ⸘ߦࠃࠅࠗࠝࡦ⒳ࠍหቯߒߥ߇ࠄ᷹ቯߒߚ Snuggs ࠄ 16) ߩ࿑ 10 ᮡḰ⁁ᘒߦ឵▚ߒߚ⽶ࠗࠝࡦ⒖േᐲߩ᷹ቯ୯
Fig.10

Reduced negative ion mobility (d =95mm).

2.08 cm2/V࡮s ߣߥࠅหߓߢ޽ߞߚ. ߒ߆ߒ, E/p0҈0.1V/cm㨯
Torr ߢߩ⒖േᐲߪ, หߓ࠼࡝ࡈ࠻ⓨ㑆㐳ߢ޽ߞߡ߽ࠟࠬ࿶ജ
߇ૐ޿⒟Ⴧടߔࠆ௑ะ߇ᄢ߈޿,ߎߩࠃ߁ߥ E/p0҈0.1V/cm࡮

࿑ 12 ฦ࠼࡝ࡈ࠻ⓨ㑆㐳ߦࠃࠆ⽶ࠗࠝࡦ⒖േᐲߩ

Torr ߢߩ⒖േᐲߩᄌൻߦߟ޿ߡߪᰴߩ▵ߢㅀߴࠆ
(5)

760㨪2230 Torr ߦ߅ߌࠆ᷹ቯ⚿ᨐ੹࿁ߩታ㛎⚿ᨐߣᲧセߔࠆ⋡⊛ߢᣢߦႎ๔ߒߚ᷹ቯ⚿ᨐ 9)ᮡḰ⁁ᘒߦ឵▚ߒߚᐔဋ୯Fig.12

Averaged values of reduced negative ion mobility
at each drift length.

O2203 (29)O2̆ ߩ⒖േᐲߦㄭ޿߆ࠄߢ޽ࠆ. ߎߩࠃ߁ߦ㜞޿ࠟࠬ࿶ജ߹

࠶࠻ߪࠟࠬ࿶ജ਄᣹ߦኻߒᷫዋߔࠆ௑ะࠍ␜ߒ ߆ߟ࠼࡝ࡈߢᬌ⸛ߒߚታ㛎⚿ᨐߪᧄ⺰ᢥ߇ೋ߼ߡߩႎ๔ߢ޽ࠆߣᕁࠊࠇ࠻ⓨ㑆㐳ߩ⍴޿⒟ߘߩᄌൻߪ㗼⪺ߣߥࠆ ߎߩࠃ߁ߥ⚿ᨐ߇ࠆ.

ᓧࠄࠇߚේ࿃ߣߒߡ ࠗࠝࡦᬌ಴ེߢ޽ࠆࠦࡠ࠽ࠡࡖ࠶ࡊE/p0҈0.1V/cmὉὉTorr ߦ߅ߌࠆ⒖േᐲߩ਄᣹ߦߟ޿ߡ

G2 ਛߩ㔚⇇߇ G1 ߣ G2 ࠍಽߌߡ޿ࠆࡔ࠶ࠪࡘ㔚ᭂߢቢోߦ

E/p0 ҈0.1V/cm࡮Torr ߦ߅ߌࠆ⒖േᐲ․ᕈߦߟ޿ߡ⠨߃ࠆ.

ಽ㔌ߢ߈ߕ࠼࡝ࡈ࠻ⓨ㑆 G1 ஥߳ߒߺߛߔ හߜ‫ޔ‬㔚⇇ᱡߦࠃ

3.3ߎߎߢߩჇടߪ, ଀߃߫ O2 ࠃࠅ߽ㅦ޿⒖േᐲࠍᜬߟࠗࠝࡦ

ߞߡ G1 ஥ߢਈ߃ࠆ㔚⇇ࠃࠅࡔ࠶ࠪࡘઃㄭߩ㔚⇇߇㜞ߊߥߞ⒳ OɆ ߿ߎߩࠟࠬਛߢ⊒↢ߔࠆ O3Ɇ ߥߤߩࠗࠝࡦߦࠃࠆ߽ߩߡ޿ࠆߎߣߦࠃࠆ߽ߩߣផ᷹ߒߚ ߎߩᤨߩ㔚⇇ߩᄌൻ᏷ߪ

ߣߩផ᷹߽น⢻ߢ޽ࠆ. Burch ࠄ 17) ߦࠃࠆߣ㧻㧙 ߪ㜞࿶ജߩࠟࠬ࿶ജ৻ቯߢ޽ࠇ߫ࠗࠝࡦ࠼࡝ࡈ࠻ⓨ㑆㐳߇⍴޿߶ߤᄢ߈ਅߢࠗࠝࡦ੤឵෻ᔕࠍ⿠ߎߒ O3

ߦᄌൻߔࠆߎߣࠍᜰ៰ߒ

޿ᄌൻࠍਈ߃⒖േᐲ߽ࠃࠅᄢ߈ߥᄌൻ᏷ߣߒߡ᷹ⷰߐࠇࠆ

ߩႎ๔ߦࠃࠆߣᐔဋ㔚ሶࠛࡀ࿑ 12 ߩ⒖േᐲߩ਄᣹߇ࠗࠝࡦ࠼࡝ࡈ࠻ⓨ㑆㐳ߦࠃࠅᄌࠊࠆ

̆ߡ޿ࠆ.

ߒ߆ߒ, Greunberg 18)

̆࡞ࠡ࡯߇㜞ߊߥࠆߣੑ૕⸃㔌ᕈઃ⌕෻ᔕ߇⿠ߎࠅᆎ߼, ߘߩ⃻⽎ߪߎߩࠃ߁ߦ⺑᣿ߢ߈ࠆ㔚⇇ᒝᐲߪ E/p0 = 2.0V/cm࡮Torr ߢ޽ࠈ߁ߣㅀߴߡ޿ࠆ. ᓥ৻ᣇ หߓ࠼࡝ࡈ࠻ⓨ㑆㐳ߢ޽ࠇ߫㊎㔚ᭂߦශടߔࠆ㔚࿶ߞߡ E/p0 =0.1V/cm࡮Torr ࠍㆊ߉ߚㄝࠅ߆ࠄߩ⒖േᐲߩჇട

ߪ৻ቯߢ޽ࠆߚ߼ࡔ࠶ࠪࡘઃㄭߩ㔚⇇ᱡߪหߢ޽ࠆ߇ࠟࠬ࿶ࠍ⺑᣿ߔࠆߎߣߪߢ߈ߥ޿.

ജ߇㜞޿⒟ ࠼࡝ࡈ࠻ߔࠆࠗࠝࡦߦ૞↪ߔࠆ E/p0 ߣߒߡߪዊߘߎߢ, ࿑ 12 ߦߟ޿ߡ߽߁৻ᐲᵈ⋡ߔࠆ. ߎߎߢ␜ߔࠃ߁ߐߊߥࠆߩߢ ࠗࠝࡦߩㅦᐲ਄᣹᏷ߪዊߐߊ ᓥߞߡ ⒖േ

ߦ‫ޔ‬E/p0 㧨0.1V/cm㨯Torr ߦ߅޿ߡ E/p0 ߦኻߒߡᐔမߥ․ᕈ

ᐲߩჇട߽ዊߐߊߥࠆ ࿑ 13 ߩ․ᕈߪߎߩࠃ߁ߥࡔ࠶ࠪࡘ

ࠍឬߊ⒖േᐲǴ00 ࠍ᳿ቯߒߚ‫ ߦᦝޕ‬0.1҇E/p0 㧨0.7V/cm࡮㔚ᭂ⴫㕙ㄭߊߩ㔚⇇ᱡߦࠃࠆ߽ߩߣℂ⸃ߢ߈ࠆ

Torr ߢߪ‫࠻ࡈ࡝࠼ޔ‬ⓨ㑆㐳 d=94mm (࿶ജ 2230Torr) ߩ․ᕈ

E/p0҈2.0V/cm࡮Torr ߦ߅ߌࠆ⒖േᐲߩ਄᣹ߪߎࠇ߹ߢㅀ

ࠍ㒰޿ߡ E/p0 ߩჇടߣ౒ߦ⒖േᐲ߇࠼࡝ࡈ࠻ⓨ㑆㐳ߦ㑐ଥߥߴߡ߈ߚࠃ߁ߦࠗࠝࡦ⒳ߩᄌൻߢ O2 ̆ ߛߌߢߥߊ O ̆ ߊ৻⥌ߒ✭߿߆ߦ਄᣹ߔࠆ. ෶‫ޔ‬0.7㧨E/p0 V/cm࡮Torr ߢߪO3̆ ࠍᬌ಴ߒߚ߽ߩߣ⠨߃ࠄࠇࠆ࠼࡝ࡈ࠻ⓨ㑆㐳߇⍴ߊߥࠆߣ⒖േᐲߩ਄᣹௑ะߪᄢ߈ߊߥࠆ.
ߎߩࠃ߁ߥ⒖േᐲߩ✭߿߆ߥჇടߪࠗࠝࡦ⒳ߩᄌൻߣߪ೎

4. ߹ߣ߼ߦ᷹ቯⵝ⟎ߩ૗ࠄ߆ߩᓇ㗀ߦࠃࠆ߽ߩߣ⠨߃ࠆߩ߇ᅷᒰߢ޽

એ਄ㅀߴߡ߈ߚታ㛎⚿ᨐ߆ࠄᓧࠄࠇߚ⚿⺰ࠍ߹ߣ߼ࠆߣᰴߩࠃ߁ߦߥࠆ.

ࠈ߁ߎࠇߦߟ޿ߡߪᰴ▵ߢ⼏⺰ߔࠆ‫ޕ‬1) 2230 Torr ߹ߢߩࠟࠬ࿶ജᄌൻߩਅߢ᷹ቯߒߚ⒖േᐲߩ

3.4 ⒖േᐲ਄᣹ߩࠟࠬ࿶ജߦࠃࠆᓇ㗀࿑㧤㨪10 ߩ⚿ᨐࠍ⹦⚦ߦ⷗ࠆߣ E/p0҈0.1V/cm࡮Torr ߦ߅E/p0 ߦኻߒߡ৻ቯߥ୯Ǵ00 ߪ᷹ቯߒߚ㜞ࠟࠬ࿶ജߦ㑐ࠄ޿ߡߪ หߓ E/p0 ߢߩ⒖േᐲߪࠟࠬ࿶ജ߇㜞޿⒟ዊߐ޿୯ࠍ

ߕ৻ቯߢ޽ߞߚ. ߎࠇߪ⒖േᐲߩℂ⺰߇⏕߆ߦᚑ┙ߒߡข ࠆ ߣ ޿ ߁ ౒ ㅢ ὐ ߇ ޽ ࠆ  ߘ ߎ ߢ ࿑ 㧤 㨪 10 ߩ ⚿ ᨐ ࠃ ࠅ޿ࠆߎߣࠍ⏕⹺ߒߚߎߣߦߥࠆ.

E/p0ѳ1.0V/cm࡮Torr ߦ߅ߌࠆ⒖േᐲǴ0 ࠍǴ00 = 2.08 cm2෶‫ߩߎޔ‬୯ߪ O2̆ߩ⒖േᐲߢ޽ࠆߎߣ߽ࠊ߆ߞߚ.

/V࡮s ߆ࠄߩᄌൻಽߣߒߡ␜ߒߚߩ߇࿑ 13 ߢ޽ࠆ ⸒޿឵߃2) 0.2҇E/p0҇2.0V/cm࡮Torr ߦ߅ߌࠆ⒖േᐲߪჇടߒߚ߇,ࠆߣߎࠇߪ E/p0҇0.1V/cm࡮Torr ߢߩ឵▚⒖േᐲ Ǵ00㧩2.08ߎࠇߪࡔ࠶ࠪࡘ㔚ᭂㄭறߩ㔚⇇ᱡ߇ࠗࠝࡦ࠼࡝ࡈ࠻ⓨ㑆

cm2 /V࡮s ߦኻߔࠆᄌൻ₸ߢ⴫ߒߚ߽ߩߢ޽ࠅ

ߩ㔚⇇ࠍ਄᣹ߐߖߚߚ߼ߦ᷹ⷰߐࠇߚ߽ߩߣ⠨߃ࠄࠇߔߴߡߩࡊࡠࠆ.

࿑ 13 ࠟࠬ࿶ജߦ߅ߌࠆ⽶ࠗࠝࡦ⒖േᐲߩᄌേ₸Fig. 13

Regulation of negative ion mobility for gas pressure.

204 (30)⚳ࠅߦ ᓮᚲᐽ৾వ↢ ర ᓼፉᄢቇᣣᧄᎿᬺᄢቇߩߏ㖊ᠤߣ⾆㊀ߥߏᗧ⷗ߦᷓߊᗵ⻢⥌ߒ߹ߔ ෶ታ㛎⚿ᨐߦߟ޿ߡ⸛⺰㗂߈߹ߒߚᧄቇᢎ᝼દ⮮᥍㓶వ↢ߦෘߊ߅␞↳ߒ਄ߍ߹ߔ

31

52007

Non-Thermal Discharge Plasma Technology for Air
Pollution Control, p.167 (1997)
10) Y.Gosho and A.Harada: J .Phys. D: Appl. Phys., 16,(1983) 1159
11) K.Fujibayashi, M.Matsui, H.Kuroki and N.Murasaki:ෳ⠨ᢥ₂1) J.S.Chang, R.M.Hobson, ᏒᎹᐘ⟤, ㊄↰ノ↵ : 㔚㔌᳇૕ߩේሶಽሶㆊ⒟, p.287 (1982)
2) Y.Nakamura : J.Phys.D:Appl.Phys., 21 (1988) 673) J.de Urquijo, I.Alvarez and C.Cisneros : J.Phys.D:Appl.Phys., 24 (1991) 6644) ਸ਼ᧄᐘᴦ, ᨋ༜ਭ, દ⮮᥍㓶 : 㔚᳇ቇળ⺰ᢥ⹹, 116-A(1996) 488

ESA-IEJ Joint Symp. On Electrostatics 1998 Proc.,
p.202 (1998)12) ᧲ጊ⑓ᄦ㧘㐳ጘஜᔒ㧘౎Ⴆ੩ሶ㧘ᵻ㊁๺ବ㧦㔚᳇ቇળ⺰ᢥ⹹㧘1
121-A (2001) 984
13) S. Matejcik, P. Cicman, A. Kiendler, J.D. Skalny, E.
Illenberger, A. Stamatovic and T.D. Maerk: Chem.
Phys. Lett., 261 (1996) 437
14) J.D. Skalny, S. Matejcik, A. Kiendler, A. Stamatovic5) ᨋ༜ਭ, દ⮮᥍㓶 : 㔚᳇ቇળ⺰ᢥ⹹, 120-A (2000) 350

and T.D. Maerk : Chem. Phys. Lett., 255 (1996) 112

6) ᨋ༜ਭ, દ⮮᥍㓶 : 㔚᳇ቇળ⺰ᢥ⹹, 120-A (2000) 71215) ᓮᚲᐽ৾㧦‫ޟ‬᡼㔚⃻⽎Ṷ⠌‫ޠ‬, ႓ ቁᄦ✬㧘p.36, p.106 ᦺ7) ᨋ༜ਭ: 㕒㔚᳇ቇળ⹹, 29 (2005) 74
8) T.Hayashi, H.Itoh and S.Garan : Proc. The 4th Inter.

Conf. on Electrostatic Precipitation. International
Academic Publishers (Beijing), p.387 (1990)
9) T.Hayashi and H.Itoh : Proc. of NEDO Symp. onୖᦠᐫ (1985)
16) R.M. Snuggs, D.J. Volz, J.H. Schummers, D.W. Martin
and E.W. McDaniel : Phys. Rev. A, 3 (1971) 47717) D.S. Burch and R. Geballe : Phys. Rev., 106 (1957) 18818) R. Greunberg: Z. Naturforsch., 24a (1969) 1039