Part 3. List of Publications“Experiments of Material Engineering III” for third-year students in
School of Engineering

(1) Papers

List of publications

1.

"Production of Medical 99mTc Isotope Via Photonuclear Reaction"
M. Fujiwara, K. Nakai, N. Takahashi, T. Hayakawa, T. Shizuma, S. Miyamoto, G. T. Fan, A. Takemoto, M.
Yamaguchi, and M. Nishimura
Physics of Particles and Nuclei, 2017, 48, No. 1, pp. 124–133. © Pleiades Publishing, Ltd., 2017.

2.

"Effect of the nuclear medium on α-cluster excitation in⁶Li"
T. Yamagata, S. Nakayama, H. Akimune, and S. Miyamoto
Physical Review C, 95, pp.044307-1-10 (2017).

3.

"Coherent radiation at the fundamental frequency by a Smith-Purcell free-electron laser with dielectric
substrate"
D. Li, Y. Wang, M. Nakajima, M. Tani, M. Hashida, M. R. Asakawa, Y. Wei, and S. Miyamoto
Appl. Phys. Lett. , 110, 151108-1-3 (2017).

4.

"Direct neutron-multiplicity sorting with a flat-efficiency detector"
H. Utsunomiya, I. Gheorghe, D. M. Filipescu, T. Glodariu, S. Belyshev, K. Stopani, V. Varlamov, B. Ishkhanov,
S. Katayama, D. Takenaka, T. Ari-izumi, S. Amano, S. Miyamoto
Nuclear Instrum. Methods Phy. Res. A, 871, pp. 135-141 (2017).

5.

"Measurement of deflection on germanium and gold prisms using 1.7 MeV laser Compton scattering γ-rays"
T. Kawasaki, S. Naito, Y. Sano, T. Hayakawa, T. Shizuma, R. Hajima, S. Miyamoto
Physics Letter A, vol. , 381, Issue 36, pp. 3129-3133 (2017).

6.

"Low-lying Dipole Strength in 52Cr"
T. Shizuma, T. Hayakawa, I. Daito, H. Ohgaki, S. Miyamato, and F. Minato
Physical Review C, 96, 044316 (2017).

7.

"Photoneutron cross section measurements in the 209Bi(γ, xn) reaction with a new method of direct
neutron-multiplicity sorting"
I. Gheorghe, H. Utsunomiya, S. Katayama, D. Filipescu, S. Belyshev, K. Stopani, V. Orlin, V. Varlamov, T.
Shima, S. Amano, S. Miyamoto, Y.-W. Lui, T. Kawano, and S. Goriely
Physical Review C, 96, 044604 (2017).

8.

"Structural analysis of amorphous carbon films by BEMA theory based on spectroscopic ellipsometry
measurement"
XiaoLong Zhou, Satoru Arakawa, Sarayut Tunmee, Keiji Komatsu, Kazuhiro Kanda, Haruhiko Ito, andHidetoshi Saitoh
Diamond & Related Materials 79C (2017) 46-59.

9.

"Soft X-ray irradiation effect on the fluorinated DLC film"
Hiroki Takamatsu, Masahito Niibe, XiaoLong Zhou, Keiji Komatsu, Hidetoshi Saitoh, Hiroki Akasaka, Akihiro
Saiga, Koji Tamada, Masahito Tagawa, Kumiko Yokota, Yuichi Furuyama, and Kazuhiro Kanda
Diamond & Related Materials 79C (2017) 14-20.

10. "Formation of nanocrystalline silicon in SiOx by soft X-ray irradiation at low temperature"
Akira Heya, Fumito Kusakabe, Naoto Matsuo, Kazuhiro Kanda, Kazuyuki Kohama, and Kazuhiro Ito
Japanese Journal of Applied Physics 56 (2017) 035501.
11. "Modification Processes of Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray
Irradiation"
Kazuhiro Kanda, Ryo Imai, Masahito Niibe, Hisashi Yoshioka, Keishi Komatsu, and Hidetoshi Saitoh
Sensors and Materials, 29 (2017) 817-826.

791

12. "Structural analysis of amorphous carbon films by spectroscopic ellipsometry, RBS/ERDA, andNEXAFS"
XiaoLong Zhou, Tsuneo Suzuki, Hideki Nakajima, Keiji Komatsu, Kazuhiro Kanda, Haruhiko Ito, and Hidetoshi
SaitohAppl. Phys. Lett. 110 (2017) 201902.
13. "Fabrication of DLC cone for fast ignition experiment"
Mayuko Koga, Kazuhiro Kanda, Tsuneo Suzuki, and Takayoshi Norimatsu
Fusion Engineering and Design, 123 (2017) 120-123.
14. "ダイヤモンドをよく知るために ～量子ビーム利用測定技術（１） X 線吸収分光を用いた局所構造
解析"
神田一浩
NEW DIAMOND, 126 (2017) 37-40.
15. "ＤＬＣ膜構造分析とＩＳＯ規格化"
神田一浩
応用物理, 86 (2017) 558-564.
16. "Characteristics of TiO2 thin film surfaces treated by O2 Plasma in dielectric barrier discharge with theassistance of external heating"
Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Yuma Araki, Yuki Yoshitani, Chisato Azuma, Takashi
Mukai
Vacuum, 152, 265-271 (2018). doi: 10.1016/j.vacuum.2018.03.051
17. "Nano-polycrystalline diamond synthesized from neutron-irradiated highly oriented pyrolytic graphite(HOPG)"
Mititaka Terasawa, Shin-ichi Honda, Keisuke Niwase, Masahito Niibe, Tomohiko Hisakuni, Tadao Iwata, Yuji
Higo, Toru Shinmei, Hiroaki Ohfuji, Tetsuo Irifune
Diamond & Related Materials, 82, 132-136 (2018).
18. "Quenchable compressed graphite synthesized from neutron-irradiated highly oriented pyrolytic graphite
in high pressure treatment at 1500°C"
Keisuke Niwase, Mititaka Terasawa, Shin-ichi Honda, Masahito Niibe, Tomohiko Hisakuni, Tadao Iwata, Yuji
Higo, Takeshi Hirai, Toru Shinmei, Hiroaki Ohfuji, Tetsuo Irifune
J. Appl. Phys. 123, 161577 (2018).
19. "Characteristics of N2 and O2 Plasma-Induced Damages on AlGaN Thin Film Surfaces"
Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Ryo Tanaka, Chisato Azuma, Takashi Mukai
Phys. Status Solidi, A214, 1700393 (2017).
20. "Generation of electrical damage in n-GaN films following treatement in a CF4 plasma"
Yoshitaka Nakano, Retsuo Kawakami, Masahito Niibe
Appl. Phys. Express, 10, 1162021 (2017).
21. "TiO2 Thin Film Surfaces Treated by O2 Plasma in Dielectric Barrier Discharge with Assistance of Heat
Treatment"
Retsuo Kawakami, Kengo Fijimoto, Masahito Niibe, Yuma Araki, Yoshitaka Nakano, Takashi Mukai
Proc. 14th Int’l Symp. Sputtering & Plasma Processes (ISSP 2017), 274-277 (2017).
22. "Laser plasma soft X-ray source based on cryogenic target"
S. Amano
Proc. of SPIE, vol.10243, 10243Q (2017)280

23. "クライオターゲットによる「水の窓」レーザ生成プラズマ軟 X 線源"天野壮
電気学会論文誌 C, Vol.137, No.3, 406-410(2017)24. "Terahertz spectroscopy of graphene complementary split ring resonators with gate tenability"
Satoru Suzuki, Yoshiaki Sekine, and Kazuhide Kumakura
Japanese Journal of Applied Physics 56, 095102-1-5 (2017).
25. "Initial stage of hexagonal boron nitride growth in diffusion and precipitation method"
Satoru Suzuki, Yui Ogawa, Shengnan Wang, Kazuhide Kumakura
Japanese Journal of Applied Physics 56, 06GE06-1-5 (2017).
26. "Depth analysis of molecular orientation induced by nanoimprint graphoepitaxy"
M. Okada, R. Fujii, Y. Haruyama, H. Ono, N. Kawatsuki, and S. Matsui
Jpn. J. Appl. Phys. 56 040302, 201727. "Formation of complex molecular orientation patterns in nanostructures via double nanoimprint
graphoepitaxy"
Makoto Okada, Ryosuke Fujii, Yuichi Haruyama, Hiroshi Ono and Nobuhiro Kawatsuki
Appl. Phys. Express 10, pp. 105201, 201728. "A study on enhancing EUV resist sensitivity"
Atsushi Sekiguchi, Tetsuo Harada, Takeo Watanabe
Proc. SPIE 10143 (2017) 1014322.
29. "ニュースバル放射光施設を活用したフォトマスク検査顕微鏡の開発"
原田哲男
姫路工業倶楽部部報工学レポート vol. 28, 2017/1/1.
30. "集光型コヒーレント回折イメージング法による EUV マスク上の欠陥評価法の開発"
原田哲男，橋本拓，渡邊健夫
電気学会論文誌 A, 137 (5), pp.260-264 (2017).
31. "Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope withhigh-harmonic generation extreme-ultraviolet source"
D. Mamezaki, T. Harada, Y. Nagata, and T. Watanabe
Jpn. J. Appl. Phys. 56, 06GB01 (2017).
32. "Observation of EUVL mask using coherent EUV scatterometry microscope withhigh-harmonic-generation EUV source"
D. Mamezaki, T. Harada, Y. Nagata, and T. Watanabe
Proc. SPIE 10454 (2017)1045413.
33. "Resist Investigation Method using ab initio MO Calculation on basis of Approximation Molecular
Model"S. Nagata, S. Niihara, T. Harada, and T. Watanabe
J. Photopolym. Sci. Technol. 30 (2017) 583.
34. "Absorption Coefficient Measurement Advanced Method of EUV Resist by Direct-Resist Coating on a
Photodiode"S. Niihara, D. Mamezaki, M. Watanabe, T. Harada, and T. Watanabe
J. Photopolym. Sci. Technol. 30 (2017) 87.
3

81

35. "Evaluation of Block Copolymer Structure using Soft X-Ray Scattering"
Y. Nakatani, T. Harada, A. Takano, M. Yamada, and T. Watanabe
J. Photopolym. Sci. Technol. 30 (2017) 77.
36. "原子状水素を用いた Ni コートミラーの炭素汚染の除去"
新部正人，原田哲男，部家彰，渡邊健夫，松尾直人
第 78 回応用物理学会秋季学術講演会予稿集，5a-S44-2 (2017).
37. "軟 X 線散乱を用いたトリブロック共重合体構造の評価"
中谷侑亮，原田哲男，高野敦志，山田素行，渡邊健夫
第 78 回応用物理学会秋季学術講演会予稿集，5p-S42-3 (2017).
38. "軟Ｘ線 CMOS イメージセンサの特性評価"
原田哲男，中谷侑亮，寺西信一，渡邊健夫
第 78 回応用物理学会秋季学術講演会予稿集，5p-S42-4 (2017)39. "フォトダイオード直接塗布法による EUV レジストの高精度な吸収係数測定法"
新原章汰，豆﨑大輝，渡辺雅紀，原田哲男，渡邊健夫
第 78 回応用物理学会秋季学術講演会予稿集，5p-S42-5 (2017)40. "Synthesis of Hyperbranched Polyacetals containing C-(4-t-butylbenz)calix[4]resorcinarene; Resist
Properties for Extreme Ultraviolet (EUV) Lithography"
Hiroto Kudo, Mari Fukunaga, Kohei Shiotsuki, Hiroya Takeda, Hiroki Yamamoto, Takahiro Kozawa, Takeo
Watanabe
Reactive and Functional PolymersREACT-D-18-00010.
41. "半導体微細パターニング技術最前線（共著）～基礎から MEMS 技術、応用開発事例まで～
第 2 章 EUV リソグラフィ技術、第 2 節 EUV 干渉露光技術"
渡邊健夫
株式会社エヌ・ティー・エス，2017.4.10.
42. "EUV レジストの最前線（特集「第 16 回放射線プロセスシンポジウムの各論として掲載）"
渡邊健夫「放射線と産業」第 142 号，一般財団法人 放射線利用振興協会編
43. "最新フォトレジスト材料開発とプロセス最適化技術" 河合晃 監修
渡邊健夫（株）シーエムシー出版，2017.9.
44. "ＵＶ硬化技術を使った新製品開発（共著）第 8 章 UV 硬化型ソルダーレジスト、フォトレジストの設計と評価
第 7 節 EUV レジストのアウトガス評価、反応解析"
渡邊健夫
株式会社技術情報協会，2017.11.
45. "Synthesis of cupric particles induced by X-ray radiolysis"
A. Yamaguchi, I. Okada, T. Fukuoka, Y. Utsumi
IEEJ Transactions on Electronics, Information and Systems, vol. 137, No.3, pp. 400 -405 (2017), DOI:
10.1541/ieejeiss.137.400"X 線照射による銅粒子生成"山口明啓，岡田育夫，福岡隆夫，内海裕一
電気学会論文誌 C（電子・情報・システム部門誌）
46. "A study for Sensitivity Improvement of 3-D Lab-on-a-CD based Immunosensor"
482

Chiwa Kataoka, Tsukasa Azeta, Kazuyuki Sawadaishi, Yoshiaki Ukita, Akinobu Yamaguchi and Yuichi Utsumi
IEEJ Transactions on Electronics Information and Systems Vol. 137 No.3, pp. 418 – 423 (2017), DOI:
10.1541/ieejeiss.137.418*Electronics and Communications in Japan, Vol. 101, No. 1, 2018 (Willey 英訳バージョン)
47. "On-chip Synthesis of Ruthenium Complex by Microwave-Induced Reaction in a Microchannel Coupledwith Post-Wall Waveguide"
Y. Utsumi, A. Yamaguchi, T. Matsumura-Inoue, and M. Kishihara
Sensors & Actuator B: Chemical, 242, 384-388 (2017).
48. "Interdigital Transducer Generated Surface Acoustic Waves Suitable for Powder Transport"
Tsunemasa Saiki, Akio Tsubosaka, Akinobu Yamaguchi, Michitaka Suzuki, Yuichi Utsumi
Advanced Powder Technology 28, 491-498 (2017).
49. "圧電体基板上に作製した NiCu 合金微小磁性細線の磁気抵抗効果"
山口明啓，大河内拓雄，保井晃，才木常正，内海裕一，木下豊彦，山田啓介
電気学会論文誌 A, Vol. 137 (No. 8), pp. 487-488 (2017).
IEEJ Transaction on Fundamentals and Materials Vol. 138 (No. 8), pp. 487-488 (2017).
50. "Caltrop particles synthesized by X-ray radiolysis in liquid phase with photochemical reaction"
A. Yamaguchi, I. Okada, I. Sakurai, T. Fukuoka, M. Ishihara and Y. Utsumi
Journal of Synchrotron Radiation 24, 653-660 (2017).
51. "Development of Bead-Based Multiplexed Immunoassay with Image Cytometric Analysis"
Yoshiaki Ukita, Chiwa Kataoka, Kazuyuki Sawadaishi, Akinobu Yamaguchi, and Yuichi Utsumi,
Sensors and Materials, Vol. 29 (No. 5), 567-573 (2017).
52. "Control of domain structure in artificial Ni wires fabricated on a LiNbO3 substrate"
A. Yamaguchi, T. Ohkochi, A. Yasui, T. Kinoshita, K. Yamada
IEEE Transactions on Magnetics 53, 8108504 (2017).
53. "X 線を用いた熱化学異方性エッチングによる PTFE の微細加工プロセスの検討"
山口明啓，木戸秀樹，竹内雅耶，内海裕一
電気学会論文誌 E, Vol. 137 (No. 12) pp. 417-421
54. "金ナノ粒子のボトムアッププロセスで表面増強ラマン散乱活性なナノセンサー／ナノビーコンを造る"
福岡隆夫，山口明啓，内海裕一，倉本亮介，森康維
BUNSEKI KAGAKU Vol. 66 No.2 pp. 919-923 (2017).
55. "Fabrication of Waveguide Butler Matrix for Short Millimeter-Wave by X-ray Lithography"
M. Kishihara, M. Takeuchi, A. Yamaguchi, Y. Utsumi, I. Ohta
IEEE 978-1-5090-6360-4 DOI: 10.1109/MWSYM.2017.8058629 Conference: Conference: 2017 IEEE/MTT-S
International Microwave Symposium - IMS 201756. "Biofilm Formation Behaviors on Graphene by E. coli and S. epidermidis"
H. Kanematsu, M. Sato, K. Shindo, D. M. Barry, N. Hirai, A. Ogawa, T. Kogo, Y. Utsumi, A. Yamaguchi, H.
Ikegai, Y. Mizunoe
ESC Transactions, 80(10), 1167-1175 (2017).
57. "Caltrop cupric oxide particles synthesized by X-ray photochemical reaction"
A. Yamaguchi, I. Okada, T. Fukuoka, and Y. Utsumi
2017 International Conference on Electronics Packaging (ICEP 2017) Conference Proceedings IEEE Xplore,sponsored by JIEP (The Japan Institute of Electronics Packaging),IEEE CPMT Society Japan Chapter, iMAPS.
583

58. "DIELECTROPHORESIS-ENABLED DYNAMIC FORMATION OF HIGHER-ORDER
NANOSTRUCTURE CONSISTING OF AU-NANOPARTICLES-DECORATED POLYSTYRENEBEADS FOR SERS DETECTION"
A. Yamaguchi, T. Fukuoka, and Y. Utsumi
Micro TAS 2017, W057c
59. "放射光励起光プロセスと新しい応用展開"
山口明啓, 内海裕一
公益社団法人 砥粒加工学会学会誌「特集 めっき技術における微細性」p535-538 (2017).
Journal of the Japan Society for Abrasive Technology Vo. 6, No. 10 (2017) Oct., pp. 535-538.
60. "研究室だより：兵庫県立大学 材料・放射光専攻ナノマイクロシステム研究室"
山口明啓
電気学会 E 部門誌 Vol. 138 (No. 2) , pp. 2

6

84

(2) International meetings
1.

"Performance measurement of HARPO: a Time Projection Chamber as a gamma-ray telescopeand polarimeter"
P. Gros, S. Amano, D. Atti ́e, P. Baron, D. Baudin, D. Bernard, P. Bruel, D. Calvet, P. Colas, S. Dat ́e, A.
Delbart, M. Frotin, Y. Geerebaert, B. Giebels, D. G otz, S. Hashimoto, D. Horan, T. Kotaka, M. Louzir, F.
Magniette, Y. Minamiyama, S. Miyamoto, H. Ohkuma, P. Poilleux, I. Semeniouk, P. Sizun, A. Takemoto,
M. Yamaguchi, R. Yonamine, and S. Wang
arXiv:1706.06483v1 [astro-ph.IM] 20 Jun 2017 (2017).

2.

"M1 strength in photonuclear reactions with linearly polarized γ-ray beam"
T. Hayakawa, T. Shizuma, K. Horikawa, S. Miyamoto, S. Amano, M. Yamaguchi, A. Takemoto, S. Chiba,
H. Akimune, K. Ogata, M. Fujiwara
JPS Conf. Proc. 14, 021012 (2017).

3.

"Measurement of neutron spectra for photonuclear reaction with linearly polarized photonsr"
Y. Kirihara, T. Itoga, T. Sanami1, H. Nakashima, Y. Namito1, S. Miyamoto, A. Takemoto, M. Yamaguchi,
and Y. Asano
EPJ Web of Conferences 153, 01019 (2017). DOI: 10.1051/epjconf/201715301019

4.

"Measurement of neutron energy spectra for Eg=23.1 and 26.6 MeV mono-energetic photon
induced reaction on natC using laser electron photon beam at NewSUBARU"
T. Itoga, H. Nakashima, T. Sanami, Y. Namito, Y. Kirihara, S. Miyamoto, A. Takemoto, M.Yamaguchi
and Y. Asano
EPJ Web of Conferences 153, 07010 (2017). DOI: 10.1051/epjconf/201715307010

5.

"Partial photoneutron cross section measurements on 209Bi"
I. Gheorghe, D. Filipescu, S. Katayama, H. Utsunomiya, S. Belyshev, K. Stopani, V. Varlamov, T. Shima,
Y.-W. Lui, S. Amano, and S. Miyamoto
EPJ Web of Conferences 146, 05011 (2017).

6.

"Photoneutron Reaction Data for Nuclear Physics and Astrophysics"
H. Utsunomiya, T. Renstrøm, G. M. Tveten, I. Gheorghe, D. M. Filipescu, S. Belyshev, K. Stopani, H.
Wang, G. Fan, Y.-W. Lui, D. Symochko, S. Goriely, A.-C. Larsen, S. Siem, V. Varlamov, B. Ishkhanov, T.
Glodariu, M. Krzysiek, D. Takenaka, T.Ari-izumi, S. Amano1, S. Miyamoto
Proceedings of the CGS16 Conference (Shanghai, September 2017).

7.

"Erosion process of fluorinated diamond-like carbon films by exposure to soft X-rays"
Kazuhiro Kanda, Hiroki Takamatsu, Eri Miura-Fujiwara, Hiroki Akasaka, Akihiro Saiga, Koji Tamada,
Masahito Tagawa, Kumiko Yokota, and Yuichi Furuyama (invited)
The Collaborative Conference on Materials Research (CCMR), Jeju, South Korea, Jun. 26-30 (2017).

8.

"Classification of Hydrogen-Free and Hydrogenated DLC Films Prepared by Filtered Arc
Deposition"
Toru Harigai, Takahiro Imai, Yoshiyuki Suda, Hirofumi Takikawa, Masao Kamiya, Satoru Kaneko,
Shinsuke Kunitsugu, Masahito Niibe, and Kazuhiro Kanda
IUMRS-ICAM 2017, Kyoto, Japan Aug. 27-Sep. 1 (2017).

9.

"DLC denture coating and the effect of prevention of contamination in oral cavity"
Yuichi Imai, Kazuhiro Kanda, Yoko Kato, Teppei Horikawa, and Tatsuyuki Nakatani
Plasma Conference 2017, Himeji, Japan, Nov. 20-24 (2017).

10. "Observation of B-K Emission and Absorption Spectra of Trace Boron Doped in HOPG"

185

Masahito Niibe, Noritaka Takehira and Takashi Tokushima
The 8th International Symposium on Surface Science (ISSS-8), Tsukuba, Oct. 2017.
11. "Surface Structure Analysis of AlGaN Thin Films Damaged by Oxygen and Nitrogen Plasmas"
Masahito Niibe, Ryo Tanaka, Retsuo Kawakami, Yoshitaka Nakano and Takashi Mukai
The 8th International Symposium on Surface Science (ISSS-8), Tsukuba, Oct. 2017.
12. "Generation Behavior of Electrical Damage Introduced into n-GaN Films by CF4 Plasma
Treatments"
Yoshitaka Nakano, Retsuo Kawakami and Masahito Niibe
29th International Conf. on Defects in Semiconductors (ICDS), Matsue, Aug. 2017.
13. "TiO2 Thin Film Surfaces Treated by O2 Plasma in Dielectric Barrier Discharge with Assistance ofHeat Treatment"
Retsuo Kawakami, Kengo Fujimoto, Masahito Niibe, Yuma Araki, Yoshitaka Nakano and Takashi Mukai
Proc. 14th International Symp. Sputtering & Plasma Processes, 274-277, Kanazawa, Jul. 2017.
14. "Laser Plasma soft X-ray Source Based on Cryogenic Target"
S. Amano (Invited)
SPIE, Optics+Optoelectronics, Prague, Czech Republic, April 24-27, 2017.
15. "Surface morphology changes of CVD-graphene/Cu{120} induced by post-annealing processes"
Y. Ogawa, Y. Murata, S. Suzuki, H. Hibino, S. Heun, K. Kumakura
30th Int. Microprocess and Nanotechnology Conf. (MNC2017), Jeju, Korea, November 7 (2017).
16. "Evolution of graphene alignment on recrystallizing polycrystalline Cu-foil for chemical vapor
deposition growth"
Yui Ogawa, Satoru Suzuki, Hiroki Hibino, Kazuhide Kumakura, Yoshitaka Taniyasu
Int. Symp. on Nanoscale Transport and Photonics 2017, Atsugi, November 14 (2017).
17. "T Molecular orientation of photoreactive liquid crystalline polymer films observed by NEXAFS"
Y. Haruyama, M. Okada, E. Nishioka, M. Kondo, N. Kawatsuki, and S. Matsui
European Congress and Exhibition on Advanced Materials and Processes (EUROMAT2017),
Thessaloniki, Greece, 2017/9/19
18. "CESIUM ION DOPED NICKEL OXIDE LAYERS FOR INVERTED PEROVSKITE SOLARCELLS"
Shota Fukumoto, Naoyuki Shibayama, Hiroyuki Kanda, Ajay Kumar Baranwal, Yuichi Haruyama,
Hiroshi Segawa, Tsutomu Miyasaka, Seigo Ito
The 27th International Photovoltaic Science and Engineering Conference (PVSEC-27), Otsu, Japan
2017/11/14
19. "Development of EUV Phase Imaging Microscope for Mask-3DEffect and Defect Evaluation"
Tetsuo Harada, Daiki Mamezaki, and Takeo Watanabe
Photomask Japan, Yokohama, April 5 - 7, 2017.
20. "NewSUBARU EUVL R&D Activities and EUV Mask Defect Inspection (Invited talk) "Takeo Watanabe, Tetsuo HaradaInternational Workshop on EUV Lithography, San Francisco, CA, USA, Jun. 12- 15, 2017.
21. "Resist Investigation Method using ab initio MO Calculation on basis of Approximation Molecular286Model"S. Nagata, S. Niihara, T. Harada, and T. Watanabe,
The 34th International Conference of Photopolymer Science and Technology
Makuhari Messe, Chiba, Japan, Jun. 26-29, 2017.
22. "Absorption Coefficient Measurement Advanced Method of EUV Resist by Direct-Resist Coating
on a Photodiode"
Shota Niihara, Daiki Mamezaki, Masanori Watanabe, Tetsuo Harada, Takeo Watanabe
The 34th International Conference of Photopolymer Science and Technology
Makuhari Messe, Chiba, Japan, Jun. 26-29, 2017.
23. "Evaluation of Block Copolymer Structure using Soft X-ray Scattering"
Yusuke Nakatani, Tetsuo Harada, Atsushi Takano, Motoyuki Yamada, Takeo Watanabe
The 34th International Conference of Photopolymer Science and Technology
Makuhari Messe, Chiba, Japan, Jun. 26-29, 2017.
24. "EUV Lithography Research and Development Activities at University of Hyogo (Invited talk) "Takeo Watanabe
OSA Laser Congress 2017, Nagoya Congress Center, Oct.,.1-5, 2017.
25. "Current Status and Prospect for EUV lithography (Panelist) "Takeo Watanabe
OSA Laser Congress 2017, Nagoya Congress Center, Oct.,.1-5, 2017.
26. "EUV Lithography Research and Development Activities at University of Hyogo"
Takeo Watanabe
IMEC meeting, Leuven, Belgium, Oct. 13, 2017.
27. "Current Status and Prospect for EUV lithography (Plenary talk) "Takeo Watanabe
2017 7th International Conference on Integrated Circuits, Design, and Verification (ICDV2017), Hanoi,
Vietnam, Oct. 5-6, 2017.
28. "Observation of EUVL Mask Using Coherent EUV Scatterometry Microscope with
High-Harmonic-Generation EUV Source"
Daiki Mamezaki, Tetsuo Harada, and Takeo Watanabe
Photomask Japan, Yokohama, April 5-7, 2017.
29. "Development of Polarization Control Unit with Broadband Mo/Si Multilayer for Accurate EUV
Reflectometry"
Masanori Watanabe, Tetsuo Harada, and Takeo Watanabe
Photomask Japan, Yokohama, April 5-7, 2017.
30. "Large Collector Mirror Reflectometer for the High Power EUV Light Source Achievement"
Takeo Watanabe and Tetsuo Harada Takeo Watanabe, Tetsuo Harada,2017 International Workshop on EUV Lithography, San Francisco, CA, USA, Jun. 12- 15, 2017.
31. "EUV Lithography Research and Development Activities at University of Hyogo"
Takeo Watanabe and Tetsuo Harada
2017 International Workshop on EUV Lithography, San Francisco, CA, USA, Jun. 12- 15, 2017.

38732. "EUV resist development at NewSUBARU in University of Hyogo"
Takeo Watanabe, Shota Niihara, Shohei Nagata, Masahiro Watanabe, Daiki Memezaki, Tetsuo Harada
Photomask Technology + Extreme Ultraviolet Lithography 2017, Monterey, CA, USA, 2017.9.11-14.
33. "A Study of EUV Resist Sensitivity by using metal materials"
Atsushi Sekiguchi, Yoko Matsumoto, Yoshiyuki Utsumi, Michiya Naito, Takeo Watanabe and Tetsuo
HaradaPhotomask Technology + Extreme Ultraviolet Lithography 2017, Monterey, CA, USA, 2017.9.11-14.
34. "Development of the negative-tone molecular resists for EB/EUVL having high EUV absorption
capacity, and molecular design method"
Takashi Sato, Tomoaki Takigawa, Yuta Togashi, Takumi Toida, Masatoshi Echigo, Tetsuo Harada, Takeo
Watanabe, Hiroto Kudo
Photomask Technology + Extreme Ultraviolet Lithography 2017, Monterey, CA, USA, 2017.9.11-14.
35. "Development of EUV phase imaging microscope for mask-3D-effect and defect evaluation"
Tetsuo Harada, Daiki Mamezaki, Yusuke Nakatani, Takeo Watanabe
Photomask Technology + Extreme Ultraviolet Lithography 2017, Monterey, CA, USA, 2017.9.11-14.
36. "Caltrop cupric oxide particles synthesized by X-ray photochemical reaction"
A. Yamaguchi, I. Okada, T. Fukuoka, and Y. Utsumi2017 International Conference on Electronics
Packaging (ICEP 2017), Yamagata, Japan, 2017/4/20
37. "Control of domain structure in artificial Ni wires fabricated on a LiNbO3 substrate"
A. Yamaguchi, T. Ohkochi, A. Yasui, T. Kinoshita, K. YamadaIntermag 2017, Dublin, Ireland, 24th-28th, April, 201738. "Dielectrophoresis-enabling Dynamic Formation of Higher-Order Nanostructure Consisting of
Au-nanoparticles-Decorated Polystyrene Beads for SERS Detection"
A. Yamaguchi, T. Fukuoka, Y. Utsumi
The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS
2017), Savannah, USA, 22nd-26th, Oct., 201739. "Strain-induced magnetic properties of micro-scale artificial magnets on ferroelectric LiNbO3
substrate"
A. Yamaguchi, K. Ueda, T. Nakajima, Y. Utsumi, T. Ohkochi, A. Yasui, T. Kinoshita, K. Yamada
The 62nd Annual Conference on Magnetism and Magnetic Materials (2017 MMM), Pittsburgh, USA,
November 6th-10th, 201740. "Ferromagnetic resonance of Ni wires fabricated on ferroelectric LiNbO3 substrate for studying
strain-induced magnetic properties"
A. Yamaguchi, K. Ueda, T. Nakajima, Y. Utsumi, K. Yamada
The 62nd Annual Conference on Magnetism and Magnetic Materials (2017 MMM), Pittsburgh, USA,
November 6th-10th, 201741. "Plasmonic Nanobeacon Based on Gold Nanoparticle Self-assembly for Universal
Bio-Nanosensing"
T. Fukuoka, A. Yamaguchi, Y. Mori
The first International Workshop by the 174th Committee JSPS“Symbiosis of Biology and Nanodevices”（第 174 委員会主催国際ワークショップ「Symbiosis of Biology and Nanodevices」）, Kyoto, Dec. 21st,2017

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