J. Inst. Electrostat. Jpn.

, 31, 1 (2007) 31 36ㆤ⭁᭴ㅧࠍᜬߟエ㨄✢ࠗࠝ࠽ࠗࠩ࡯ߩㆤ⭁ᕈ⢻ߩ⹏ଔ
㋈ ᧁ ᡽ ౖ 㧘૒ ⮮ ᦮ ਌ 㧘᧻ ᯅ ⑲ ᣿ 㧘᳓ ㊁ᓆ㧔2006 ᐕ 9 ᦬ 15 ᣣฃઃ; 2007 ᐕ 2 ᦬ 19 ᣣฃℂ㧕

Shielding Performance of Soft X-ray Ionizer with Shielding Structure
Masanori SUZUKI*㧘Tomokatsu SATO*㧘Hideaki MATSUHASHI* and Akira MIZUNO**(Received September, 15 2006; Accepted February 19, 2007)

Recently, in semiconductor and LCD manufacturing processes, ionizers have been used that employ low energy
X-rays of 3 to 9.5 keV (soft X-rays), as the ionization source. However, when this ionizer is installed on amanufacturing equipment, the equipment must be covered with shielding panel to shield the soft X-rays. In addition,
this equipment requires safety measures to stop ionizer automatically, when a worker entered a shielding area by anychance. For those reasons, this type of ionizers are inconvenient. Therefore we have conducted the development ofsoft X-ray ionizer with shielding structure. In the previous paper, we reported the results of investigation about thestructural condition of shielding structure that consists of aluminum honeycomb and perforated plates. In this paper,
we report about the structural condition of shielding structure that consists of small pipes. We confirmed that theleakage dose rate of the soft X-rays could be decreased to less than 1 µSv/hr while allowing the passage of enough ion
pairs to eliminate the static electricity.

1.

ߪߓ߼ߦߎߩࠗࠝ࠽ࠗࠩ࡯ߦ߅޿ߡߪ㧘቟ో਄㧘ᱜ⽶ࠗࠝࡦߪㅢㆊ

ㄭᐕ㧘ඨዉ૕߿ᶧ᥏⵾ㅧᎿ⒟ߦ߅޿ߡ㧘ή⊒Ⴒߢ㒰㔚ᕈߢ߈ࠆ߇㧘エ㨄✢ߪㆤ⭁ߐࠇࠆ᭴ㅧ૕߇ᔅⷐߢ޽ࠆ㧚ߒ߆ߒ㧘⢻ߦఝࠇ㧘߆ߟㆤ⭁߇ኈᤃߥߎߣ߆ࠄ㧘ࠛࡀ࡞ࠡ࡯߇ 3㨪ㆤ⭁᭴ㅧ૕ߦࠗࠝࡦ߇ㅢࠆߚ߼ߩ㐿ሹࠍ⸳ߌߚ⁁ᘒߢ㧘エ㨄

9.5keV㧔peak ⚂ 6keV㧕ߩૐࠛࡀ࡞ࠡ࡯㨄✢㧔エ㨄✢㧕ࠍ✢ࠍㆤ⭁ߔࠆߎߣߪ࿎㔍ߢ޽ߞߚ㧚ࠗࠝࡦൻḮߣߔࠆࠗࠝ࠽ࠗࠩ࡯߇೑↪ߐࠇࠆࠃ߁ߦߥߞᣢႎ 3,4)ߦ߅޿ߡߪ㧘࿑ 2-(a)ߦ␜ߔࠃ߁ߦ㧘৻ቯߩ㓗㑆ࠍ޽ߡ߈ߡ޿ࠆ 1,2)㧚ߘߩ৻଀ࠍ࿑ 1 ߦ␜ߔ㧚ߒ߆ߒ㧘ߎߩࠗࠝߌߡ㧘ሹ߇㊀ߥࠄߥ޿ࠃ߁ߦ㊀ߨߚ⒳‫  ᧼ࠣࡦ࠴ࡦࡄߩޘ‬ᨎ࠽ࠗࠩ࡯ࠍ↢↥ⵝ⟎╬ߦ⸳⟎ߒߚ႐ว㧘エ㨄✢ࠍㆤ⭁ߔࠆߣࡂ࠾ࠞࡓ߆ࠄߥࠆ㧘◲නߥ᭴ㅧߩㆤ⭁᧼ߩࠨࡦࡊ࡞ࠍ↪޿ߚ߼㧘↢↥ⵝ⟎ࠍႮࡆ᧼╬ߢ࿐ߺ㧘ਁ৻૞ᬺ⠪߇࿐ߺౝߦߡ㧘エ㨄✢ࠍㆤ⭁ߔࠆߚ߼ߩㆤ⭁᭴ㅧߩ᧦ઙࠍᬌ⸛ߒߚ㧚ᧄ౉ߞߚ႐วߢ߽㧘㨄✢ᾖ኿߇⥄േ஗ᱛߔࠆ቟ోኻ╷߇ᔅⷐႎ㧔࿑ 2-(b)㧕ߢߪ㧘ᣂߚߦዊሹᓘߩ㊄ዻࡄࠗࡊߩࠨࡦࡊ࡞ࠍߢ㧘ขࠅᛒ޿߇Ყセ⊛ਇଢߢ޽ߞߚ 1)㧚ߘߎߢ㧘ࠗࠝ࠽ࠗ↪޿ߡエ㨄✢ࠍㆤ⭁ߔࠆߎߣࠍ⹜ߺ㧘ߘߩㆤ⭁᭴ㅧߩ᧦ઙߦࠩ࡯⥄૕߆ࠄߩ⊒Ⴒ߿エ㨄✢ߩṳࠇ߇ήߊ㧘⸳⟎ᓟႮࡆ᧼╬ߦࠃࠆㆤ⭁߇ਇⷐߥࠗࠝ࠽ࠗࠩ࡯㧔࿑ 2㧕ࠍ⠨᩺ߒߚ 1)㧚

ߟ޿ߡᬌ⸛ࠍⴕߞߚ㧚ߘߒߡ㧘ߘߩㆤ⭁᭴ㅧࠍᦨㆡൻߔࠆߎߣߢ㧘エ㨄✢ߩṳࠇ✢㊂₸ࠍ 1ǴSv/hr એਅߦߢ߈㧘߆ߟᱜ⽶ࠗࠝࡦ߇లಽߦㅢㆊߢ߈ࠆߎߣࠍ⏕⹺ߒ㧘ᧄᣇᑼߩࠗࠝ࠽ࠗࠩ࡯ߩታ↪ᯏࠍ㐿⊒ߒߚ㧚ࠠ࡯ࡢ࡯࠼㧦ૐࠛࡀ࡞ࠡ࡯㨄✢㧘エ㨄✢㧘ㆤ⭁㧘ࠗࠝ࠽ࠗࠩ࡯㧘ࠢ࡝࡯ࡦ࡞࡯ࡓ* 㧔ᩣ㧕࠹ࠢࡁ⪉๺ ᛛⴚ㐿⊒⎇ⓥᚲ㧔156-0052 ᧲੩ㇺ਎↰⼱඙⚻ၴ 5-33-6㧕Technical R&D Center, Techno Ryowa Ltd.,
33-6, Kyodo 5-chome, Setagaya-ku, Tokyo, 156-0052, Japan** ⼾ᯅᛛⴚ⑼ቇᄢቇ ࠛࠦࡠࠫ࡯Ꮏቇ♽㧔441-8580 ᗲ⍮⋵⼾ᯅ Ꮢ ᄤ ષ ↸ 㔕 㓴 ࡩ ਐ 1-1 㧕 Department of EcologicalEngineering,
Toyohashi
UniversityofTechnology,
Tempaku-cho, Toyohashi, Aichi , 441-8580, Japan2.

ㆤ⭁᭴ㅧࠍᜬߟエ㨄✢ࠗࠝ࠽ࠗࠩ࡯ߩ᭎ⷐ෸߮ਥ

ߥ․ᓽ
࿑ 2-(b)ߦ㧘੹࿁ᬌ⸛ߒߚㆤ⭁᭴ㅧࠍᜬߟࠗࠝ࠽ࠗࠩ࡯ߩ᭎
ⷐࠍ␜ߔ㧚ߎߩࠗࠝ࠽ࠗࠩ࡯ߪ㧘ⷺᩇ⁁ߩࠗࠝࡦൻ࠴ࡖࡦࡃ
࡯ౝࠍエ㨄✢ߢࠗࠝࡦൻߒ㧘ࠦࡦࡊ࡟࠶ࠨ࡯╬߆ࠄߩࠛࠕߢ
ᱜ⽶ࠗࠝࡦࠍ㕒㔚᳇⊒↢▎ᚲߦ็ઃߌߡ㒰㔚ߔࠆ߽ߩߢ޽ࠆ㧚ࠗࠝࡦൻ࠴ࡖࡦࡃ࡯ߩ็಴ㇱߪዊሹᓘߩࡄࠗࡊࠍᛂㄟࠎߛ᭴

32

31

ㅧߦߥߞߡ߅ࠅ㧘ߎߩࡄࠗࡊߩሹᓘ߅ࠃ߮㐳ߐߦࠃߞߡ㧘ࠗߩ╬ଔ✢㊂₸ߢ޽ࠆ 70Ǵm ✢㊂ᒰ㊂₸㧔ੱ૕⴫㕙߆ࠄᷓߐ 7ࠝࡦߪㅢߔ߇エ㨄✢ߪㆤ⭁ߔࠆ᭴ㅧߦߥߞߡ޿ࠆ㧚ߎߩࠗࠝ0Ǵm ߦ߅ߌࠆⵍᦑ✢㊂₸㧕ߢ᷹ቯࠍⴕߞߚ㧚ߎࠇߪ㧘9.5ke࠽ࠗࠩ࡯ߩਥߥ․ᓽࠍએਅߦ␜ߔ㧚ߎߩ․ᓽߪ㧘࠲ࠗࡊ # ߩV એਅߩૐࠛࡀ࡞ࠡ࡯㨄✢㧔エ㨄✢㧕ߪ㧘ᓸᒙߥߚ߼ߦ⊹⤏ࠗࠝ࠽ࠗࠩ࡯ߦ߅޿ߡ߽ห᭽ߢ޽ࠆ㧚⴫㕙ߢ߶ߣࠎߤๆ෼ߐࠇߡߒ߹߁ߩߢ㧘㔚㔌᡼኿✢㓚ኂ㒐ᱛ

12007ࠗࠝ࠽ࠗࠩ࡯⥄૕߇㧘エ㨄✢ߩㆤ⭁᭴ㅧߦߥߞߡ޿ࠆߚ߼㧘⸳⟎ߩ㓙㧘ߎߩࠗࠝ࠽ࠗࠩ࡯ߩ๟࿐ࠍㆤ⭁᭴ㅧߣߔࠆᔅⷐ߇ήߊ㧘⸳⟎߇ኈᤃߢ቟ోߢ޽ࠆ㧚ࠦࡠ࠽᡼㔚ࠍ↪޿ߚࠗࠝ࠽ࠗࠩ࡯ߩࠃ߁ߦ㧘᡼㔚㔚ᭂࠍ૶↪ߖߕ㧘エ㨄✢ߦࠃࠅࠗࠝࡦൻߔࠆߚ߼㧘Ԙ㔚ᭂ߆ࠄߩ⊒Ⴒ㧘ԙࠝ࠱ࡦߩ⊒↢╬ߩ໧㗴߇ή޿㧚⸳⟎ᤨߩ಴ജ⺞ᢛ߇ਇⷐ㧘߹ߚ㧘৻ቯᦼ㑆ߦ৻ᐲ㧘エ㨄✢ࡋ࠶࠼ࠍ੤឵ߔࠆߛߌߢ㧘ઁߩࡔࡦ࠹࠽ࡦࠬ߇ਇⷐߢ޽ࠆ㧚ࠦࡠ࠽᡼㔚ᑼߣ⇣ߥࠅἫ⧎᡼㔚ߩᕟࠇ߇ోߊߥ޿
ߚ߼㧘㒐῜ဳ઀᭽ߦߔࠆߎߣ߽ේℂ⊛ߦኈᤃߢ޽ࠆ㧚࿑ 1 エ㨄✢ࠗࠝ࠽ࠗࠩ࡯㧔ᵿ᧻ࡎ࠻࠾ࠢࠬ⵾ L9490㧕

3.

ታ㛎ⵝ⟎߅ࠃ߮ᣇᴺFig.1 Soft X-ray ionizer (Hamamatsu Photonics L9490).

ታ㛎ߦ↪޿ߚㆤ⭁↪ࡄࠗࡊ㧔ࠕ࡞ࡒ࠾࠙ࡓ⵾㧘⡺ෘ 1mm㧕ߩࠨࡦࡊ࡞ߪ㧘ሹᓘ߇ 4 ⒳㘃㧔d2mmǾ㧘3mmǾ㧘4mmǾ㧘
5mmǾ㧕㧘㐳ߐ߇ߘࠇߙࠇߩሹᓘߦߟ޿ߡ 6 ⒳㘃㧔L10mm㧘

(CP%JCODGT

15mm㧘20mm㧘25mm㧘30mm㧘50mm㧕ߩว⸘ 24 ⒳㘃ߢ޽ࠆ㧚ߎࠇࠄߩㆤ⭁↪ࡄࠗࡊߦࠃࠆエ㨄✢ߦኻߔࠆㆤ⭁ᕈ⢻ࠍ⹏ଔ

((77PKHQTOCKTHNQYߔࠆߚ߼ߩታ㛎ⵝ⟎ࠍ࿑ 3 ߦ␜ߔ㧚ㆤ⭁ᕈ⢻ߪ㧘ㆤ⭁↪ࡄࠗࡊ  ᧄᒰߚࠅߩエ㨄✢ߩㅘㆊ₸ࠍ᳞߼㧘ߘߩᄢዊࠍᲧセߔࠆ+QPK\GTߎߣߦࠃࠅ⹏ଔߒߚ㧚ㅘㆊ₸߇ዊߐ޿߶ߤ㧘ㆤ⭁ᕈ⢻ߪఝࠇ 㧔* OO㧕

7.2# (KNVGT㧔OO㧕5JKGNFKPIRNCVGUߡ޿ࠆߎߣࠍ␜ߔ㧚ㆤ⭁↪ࡄࠗࡊߩㆤ⭁ᕈ⢻ߔߥࠊߜㅘㆊ₸ࠍ᳞߼ࠆታ㛎ߪ㧘

5QHV :TC[ JGCF+QPK\GF CKTHNQYᰴߩࠃ߁ߦⴕߞߚ㧚߹ߕ㧘エ㨄✢▤㧔⴫ 12㧕㧕ࠍ෼߼ߚ SUS⵾ߩⷺ╴ౝߢエ㨄✢ࠍᾖ኿ߒ㧘✢Ḯ㧔Be ⓹㧕߆ࠄߩ〒㔌 D(a) Type Aߩ૏⟎ߦ㧘エ㨄✢ߩᾖ኿ᣇะߦኻߒߡု⋥ߦ㧘ㆤ⭁↪ࡄࠗࡊࠍ৻ᧄᛂㄟߺ㧘ߘߩࡄࠗࡊ߆ࠄߩṳࠇ✢㊂₸ + ࠍ㔚㔌▫ᑼࠨ࡯ࡌ࡯ࡔ࡯࠲㧔ࠕࡠࠞ⵾ ICS-321R1㧕ߢ᷹ቯߒߚ㧚ᰴߦ〒㔌D ߩ૏⟎ࠍ⒳‫ޘ‬ᄌ߃ߡห᭽ߥ᷹ቯࠍⴕߞߚ㧚ߘߒߡ㧘ߎߩ৻

2KRG+QP IGPGTCVKPI EJCODGTㅪߩ᷹ቯࠍ 24 ⒳㘃ߩࡄࠗࡊߦ߅޿ߡⴕߞߚ㧚ዏ㧘㔚㔌▫ᑼࠨ

#KT

5QHV :TC[JGCF࡯ࡌ࡯ࡔ࡯࠲ߪ㧘ᛂㄟࠎߛࡄࠗࡊߩ಴ญ߆ࠄታⴕਛᔃ✢߹ߢߩ〒㔌߇ 65mm ߦߥࠆࠃ߁ߦ⸳⟎ߒߚ㧚ㅘㆊ₸ ++ ߪ㧘ࠨ࡯

φ+QPK\GF CKTHNQYࡌ࡯ࡔ࡯࠲ߢ᷹ቯߒߚࡄࠗࡊ߆ࠄߩṳࠇ✢㊂₸ +㧔ࡄࠗࡊ಴ญ߆ࠄ 65mm ߩ૏⟎㧘ߔߥࠊߜ࿑ 3 ౝߩ*2 ߩ૏⟎ߢߩ✢㊂₸㧕ߣ㧘ᓟㅀߔࠆㄭૃᑼ(1)߆ࠄ⸘▚ߒߚ౉኿✢㊂₸ + 㧔ᛂㄟࠎߛࡄࠗࡊ౉ญߢߩ૏⟎㧘ߔߥࠊߜ࿑ 3 ౝߩ*1 ߩ૏⟎ߢߩ✢㊂₸㧕ߣߩᲧ߆ࠄ᳞߼ߚ㧚ㅘㆊ₸ࠍ᳞߼ࠆ㓙ߩ✢㊂₸ߪ㧘㨄✢ߦᢅᗵߥ⚵❱㧔⊹⤏㧕(b) Type B࿑ 2 ㆤ⭁᭴ㅧࠍᜬߟエ㨄✢ࠗࠝ࠽ࠗࠩ࡯ߩ᭎ⷐ
Fig.2 Outline of soft X-ray ionizer with shielding structure.

33ⷙೣߢⷙቯߐࠇߡ޿ࠆታല✢㊂₸㧔1cm ✢㊂ᒰ㊂₸㧦ੱ૕䈱エ䌘✢䈱ᷫᒙ․ᕈ䉕⺞䈼䈢䋮エ䌘✢䊓䉾䊄䈫䉰䊷䊔䊷䊜䊷䉺䈏⴫㕙߆ࠄᷓߐ 1cm ߦ߅ߌࠆⵍᦑ✢㊂₸㧕ߢ᷹ቯߔࠆߣ㧘エห䈛శゲ਄䈮䈒䉎䉋䈉䈮ะ䈇ว䈞䈩⸳⟎䈚䋬✢Ḯ䈎䉌శゲ䈮ᴪ䈦㨄✢ߩ✢㊂₸㧔㨄✢ᒝᐲ㧕ࠍㆊዊ⹏ଔߔࠆߎߣߦߥࠆ߆ࠄ

䈩䉰䊷䊔䊷䊜䊷䉺䉕㆙䈙䈔䈩✢㊂₸䋨Dose rate䋩䉕᷹ቯ䈚䈢䋮䈢䈣䈚䋬䉰䊷䊔䊷䊜䊷䉺 ICS-321R1 䈲䋬Max.10mSv/hr 䉁䈪䈚䈎᷹5)ߢ޽ࠆ 㧚߹ߚ㧘↪޿ߚ ICS-321R1 ߪ㧘ᣣᧄຠ⾰଻⸽ᯏ᭴ JQA ߦߡቯ䈪䈐䈭䈇䈢䉄䋬✢Ḯ䈮ㄭ䈇 10mSv/hr એ਄䈱᷹ቯ䈮䈲䋬☨࿖䊎

9.5keV એਅߩૐࠛࡀ࡞ࠡ࡯㨄✢㧔70Ǵm ✢㊂ᒰ㊂₸ߢ 1Ǵ䉪䊃䊥䊷䊮⵾ 450B-SI䋨Min.5㱘Sv/hr䋬Max.500mSv/hr䋩䉕૶↪䈚䈢䋮

Sv/hr એ਄㧕߇㧘᷹ቯߢ߈ࠆࠃ߁ߦᩞᱜߐࠇߡ޿ࠆ㧚߹ߚ㧘⓹

450B-SI 䈲䋬ICS-321R1 䈫ห᭽䈮䋬9.5keV એਅ䈱ૐ䉣䊈䊦䉩䊷䌘᧚ߣߒߡ㧘ෘߐ 0.0362mm ߩࡐ࡝ࠛ࠴࡟ࡦ࠹࡟ࡈ࠲࡟࡯࠻ࡈ

✢䋨70㱘m ✢㊂ᒰ㊂₸䈪 5㱘Sv/hr એ਄䋩䈏䋬᷹ቯ䈪䈐䉎䉋䈉䈮ᩞ

26㧕

ࠖ࡞ࡓ㧔Mylar㧘⾰㊂ᷫᒙଥᢙ㧦54.7cm /g at 4keV 㧕ࠍ૶↪ߒᱜ䈘䉏䈩䈇䉎䋮䉁䈢䋬4keV 䈱ૐ䉣䊈䊦䉩䊷䌘✢䈪䉅ᬌ಴น⢻䈪ߡ޿ࠆߩߢ㧘4keV ߩૐࠛࡀ࡞ࠡ࡯㨄✢ߢ߽ 82.0㧑ㅘㆊߢ߈ࠆ㧚䈅䉎䋮㩷エ㨄✢ߩ✢㊂₸㧔Dose rate㧕ߪ㧘✢Ḯߦㄭ޿⚂ 740mm એߎࠇߪ㧘4keV ߩૐࠛࡀ࡞ࠡ࡯㨄✢ߢ߽ᬌ಴น⢻ߢ޽ࠆߎߣࠍ

ౝߢߪㄭૃᑼ(1)ߦᓥ޿㧘✢Ḯ߆ࠄ㆙޿⚂ 1400mm એ਄ߢߪㄭ␜ߒߡ޿ࠆ㧚ૃᑼ  ߦᓥߞߡᷫ⴮ߒߚ㧚
4.

ታ㛎⚿ᨐ߅ࠃ߮⠨ኤ+㪯4.0106G-0.0055㪯 (1) 〒㔌⚂ 740㨙㨙એਅ

4.1 ⓨ᳇ਛߢߩエ㨄✢ߩᷫᒙ․ᕈ
ㅘㆊ₸ ++ ࠍ᳞߼ࠆ㓙ߩ౉኿✢㊂₸ + ߪ㧘࿑ 3 ߩᛂㄟࠎߛ+㪯2.9105G-0.0025㪯 (2)㧔〒㔌⚂ 1400㨙㨙એ਄㧕ࡄࠗࡊߩ౉ญ┵㕙ߩ૏⟎㧔࿑ 3 ౝߩ*1 ߩ૏⟎㧕ߢߩ⋥㆐✢㊂₸ߣߒߚ㧚ߘߎߢ㧘✢Ḯ㧔Be ⓹㧕߆ࠄછᗧߩ〒㔌ߦ߅ߌࠆエߔߥࠊߜ㧘ૐࠛࡀ࡞ࠡ࡯㨄✢㧔エ㨄✢㧕ߩ✢㊂₸ߪ㧘⎬㨄㨄✢ߩ⋥㆐✢㊂₸ࠍ᳞߼ࠆߚ߼ߦ㧘࿑ 4 ߦ␜ߔ᭽ߦⓨ᳇ਛߢ✢ߩࠃ߁ߦ〒㔌ߩੑਸ਼ߦᲧ଀ߒߡᷫ⴮ߒߥ޿㧚ߎࠇߪ㧘ૐࠛࡀ࡞ࠡ࡯㨄✢ߪⓨ᳇ߦๆ෼ߐࠇᤃ޿ߎߣ߇ේ࿃ߣ⠨߃ࠄࠇࠆ㧚&ᧄታ㛎ⵝ⟎ߦ߅޿ߡ㧘ࡄࠗࡊࠍᛂㄟ߻૏⟎ࠍ✢Ḯ߆ࠄߩ〒
5QHV:TC[VWDG

㔌 D20mm㨪200mm ߣߒߚߩߢ㧘਄⸥ߩ⚿ᨐߦᓥ޿㧘ㅘㆊ₸+ +PNGVߩၮḰߣߥࠆ౉኿✢㊂₸ +㧔+㪯㧕ߪㄭૃᑼ(1)ߦࠃࠅ᳞߼ߚ㧚.

2KRG

4.2 ౉኿✢㊂₸ߣㅘㆊ₸ߩ㑐ଥ

5JKGNFKPIE[NKPFGT

1WVNGV࿑ 5 ߦࡄࠗࡊ 1 ᧄᒰߚࠅߩ㧘౉኿✢㊂₸㧔✢Ḯ߆ࠄߩ〒㔌㧕$GT[NNKWOYKPFQY ǾFߣㅘㆊ₸ߩ㑐ଥࠍ␜ߔ㧚ࡄ࡜ࡔ࡯࠲ߪ㧘ࡄࠗࡊߩᓘߣ㐳ߐߢ㧘
OO+

ࡄࠗࡊᓘ߇ 4 ⒳㘃㧔࿑ 5-(a)㨪(d)㧕
㧘㐳ߐ߇ߘࠇߙࠇߩᓘߦߟ
߈ 6 ⒳㘃ߢ޽ࠆ㧚

'HHGEVKXGEGPVGTOCTM
5WTXG[OGVGT+ 㫏        G        㪯㪯҇    O O

࿑ 3 ㆤ⭁ᕈ⢻ࠍ⹏ଔߔࠆߚ߼ߩታ㛎ⵝ⟎
Fig. 3

Experimental setup for estimating the shielding

performance.
⴫ 1 エ㨄✢▤ߩ઀᭽
Table 1 Specifications of soft X-ray tube2)㪠㫋㪼㫄㫊㩷㪫㫌㪹㪼㩷㫍㫆㫃㫋㪸㪾㪼㩷㪫㫌㪹㪼㩷㪺㫌㫉㫉㪼㫅㫋㩷㪮㫀㫅㪻㫆㫎㩷㫄㪸㫋㪼㫉㫀㪸㫃㩷㪠㫉㫉㪸㪻㫀㪸㫋㫀㫆㫅㩷㪸㫅㪾㫃㪼㩷㪯㪄㫉㪸㫐㩷㫎㪸㫍㪼㫃㪼㫅㪾㫋㪿㩷㪯㪄㫉㪸㫐㩷㪼㫅㪼㫉㪾㫐㪪㫇㪼㪺㫀㪽㫀㪺㪸㫋㫀㫆㫅㫊㪛㪚㩷㪐㪅㪌㫂㪭㪈㪌㪇㱘㪘㩷㪙㪼㫉㫐㫃㫃㫀㫌㫄㪃㩷㪇㪅㪊㫄㫄㩷㫋㪿㫀㪺㫂㫅㪼㫊㫊㪸㫇㫇㫉㫆㫏㪅㩷㪈㪊㪇㩷㪻㪼㪾㫉㪼㪼㩷㩿㪺㫆㫅㪼㩷㪸㫅㪾㫃㪼㪀㪈㪅㪊䌾㪋㪅㪈㩷㪘㫅㪾㫊㫋㫉㫆㫄㫊㪃㩷㫇㪼㪸㫂㩷㪉㩷㪘㫅㪾㫊㫋㫉㫆㫄㫊㪊䌾㪐㪅㪌㫂㪼㪭㪃㩷㫇㪼㪸㫂㩷㪍㫂㪼㪭&QUGTCVG㪠㪠 㫏 =Ǵ5XJT?

+ 㫏         G        㪯㪯҈     O O
&KUVCPEGHTQO$GYKPFQYQHUQHV:TC[VWDG㪯㪯 =OO?

࿑4ⓨ᳇ਛߢߩエ㨄✢ߩᷫᒙ․ᕈ

Fig.4 Attenuation of soft X-ray in the air.

34

31

1

2007

ㆤ⭁᭴ㅧࠍᜬߟエ㨄✢ࠗࠝ࠽ࠗࠩ࡯ߩㆤ⭁ᕈ⢻ߩ⹏ଔ㧔㋈ᧁ᡽ౖࠄ㧕2GPGVTCVKQP㪠㪠 㪆 㪠㪇 =?

౉኿✢㊂₸߇ዊߐ޿⒟㧔✢Ḯ߆ࠄߩ〒㔌߇㐳޿⒟㧕ㅘㆊ₸ߪዊߐߊ㧘౉኿✢㊂₸ߩჇടߣߣ߽ߦ㧔✢Ḯߦㄭߊߥࠆ⒟㧕ㅘㆊ₸ߪᄢ߈ߊߥߞߡ޿ࠆ㧚߹ߚ㧘ࡄࠗࡊߩᓘߪዊߐ޿⒟㧘ࡄࠗࡊߩ㐳ߐߪ㐳޿⒟㧘ㅘㆊ₸ߪዊߐߊ㧘エ㨄✢ࠍㆤ⭁ߒᤃ޿ߎߣ߇ಽ߆ࠆ㧚ߎࠇߪ㧘ࡄࠗࡊ߳ߩ౉኿✢㊂₸߇ᄢ߈޿႐ว㧔✢Ḯߦㄭ޿႐ว㧕㧘↪޿ࠆࡄࠗࡊߪᓘ߇ዊߐߊ㧘㐳ߐ߇㐳޿߽ߩࠍㆬቯߔࠆߎߣߢㅘㆊ₸ࠍዊߐߊߔࠆߎߣ߇ߢ߈㧘ࡄ-G[2KRG NGPIVJOO
OO
OO
OO
OO
OO

2KRG FKCOGVGTFOOǾ.

ࠗࡊ߳ߩ౉኿✢㊂₸߇ዊߐ޿႐ว㧔✢Ḯ߆ࠄ㆙޿႐ว㧕㧘↪޿
&QUGTCVGCVRKRGKPNGV㪠㪠㪇 = Ǵ5XJT?

(a) d2mm㱢ࠆࡄࠗࡊߪᓘ߇ᄢ߈ߊ㧘㐳ߐ߇⍴޿߽ߩࠍㆬቯߢ߈ࠆߎߣࠍ␜ߒߡ޿ࠆ㧚

2GPGVTCVKQP㪠㪠 㪆 㪠 㪇 = ?

ታ㓙ߦࡄࠗࡊࠍㆬቯߔࠆᤨߪ㧘೨ㅀߩᷫᒙ․ᕈߩㄭૃᑼ(1)߆ࠄࡄࠗࡊࠍᛂㄟ߻૏⟎ߩ౉኿✢㊂₸ࠍ▚಴ߒ㧘࿑ 5 ߆ࠄߘߩㅘㆊ₸ࠍ᳞߼㧘ࡄࠗࡊ 1 ᧄᒰߚࠅ߆ࠄߩṳࠇ✢㊂₸ࠍ⸘▚ߒߥ߇ࠄࡄࠗࡊߩᓘߣ㐳ߐࠍ㧘቟ోࠍ⷗ㄟࠎߢㆬቯߔࠆ㧚ߒ߆ߒ㧘ࡄࠗࡊߦ߅ߌࠆᱜ⽶ࠗࠝࡦߩౣ⚿วߦࠃࠆᶖ⠻ࠍ⠨ᘦߔࠆߣ㧘ṳࠇ✢㊂₸ࠍᛥ߃ߟߟ㧘ߥࠆߴߊᓘ߇ᄢ߈ߊ㧘㐳ߐ

2KRG FKCOGVGTFOOǾߩ⍴޿ࡄࠗࡊࠍㆬቯߔࠆߎߣ߇ᔅⷐߣߥࠆ㧚
&QUGTCVGCVRKRGKPNGV㪠㪠 㪇 = Ǵ5XJT?

4.3 ࠗࠝ࠽ࠗࠩ࡯ታᯏߦࠃࠆㆤ⭁ᕈ⢻ߩ⏕⹺ߣ㒰㔚ᕈ⢻(b) d3mm㱢ߩ᷹ቯ

2GPGVTCVKQP㪠㪠 㪆 㪠 㪇 = ?

4.3.1 ㆤ⭁ᕈ⢻ߩ⏕⹺࿑ 6 ߦࠗࠝ࠽ࠗࠩ࡯ታᯏߩᄖⷰࠍ㧘ߘߩࠗࠝࡦൻ࠴ࡖࡦࡃ࡯ㇱߩ᭎ⷐࠍ࿑ 7 ߦ␜ߔ㧚2mmǾ50mmL ߩࡄࠗࡊ 9 ᧄ㧘
3mmǾ50mmL ߩࡄࠗࡊ 9 ᧄ㧘4mmǾ30mmL ߩࡄࠗࡊ 8ᧄ㧘5mmǾ30mmL ߩࡄࠗࡊ 16 ᧄࠍ㧘ᱜ⽶ࠗࠝࡦߩᶖ⠻߽⠨ᘦߒߡㆬቯߒ㧘ㆤ⭁ࠍⴕߞߚ㧚ࠗࠝ࠽ࠗࠩ࡯߆ࠄߩṳࠇ✢㊂₸ߪ㧘ᰴߩࠃ߁ߦ⸘▚ߔࠆ㧚

2KRG FKCOGVGTFOOǾ߹ߕ㧘ฦࡄࠗࡊߩ૏⟎Ფߦ౉኿✢㊂₸ࠍㄭૃᑼ(1)߆ࠄ᳞߼ࠆ㧚
&QUGTCVGCVRKRGKPNGV㪠㪠 㪇 = Ǵ5XJT?

(c) d 4mm㱢⛯޿ߡ㧘࿑ 5 ߦ␜ߔㅘㆊ₸ߩ࠺࡯࠲߆ࠄ㧘ㅘㆊ₸ࠍ᳞߼ࠆ㧚ߘߒߡห৻ᓘߩࡄࠗࡊࠍ⸳ߌߚࠛ࡝ࠕᲤߩṳࠇ✢㊂₸ࠍ᳞߼


2GPGVTCVKQP㪠㪠 㪆 㪠 㪇 = ?

ࠆ㧚଀߃߫ 2mmǾ50mmL ߩࡄࠗࡊࠍ⸳ߌߚࠛ࡝ࠕౝߢᦨ߽✢Ḯߦㄭ޿૏⟎ D60mm ߩࡄࠗࡊ㧔࿑ 7 ౝߢ㧘✂ដߌߐࠇߡ
޿ࠆࡄࠗࡊ㧕ߩ౉኿✢㊂₸ߪ +2.88106ǴSv/hr ߣߥࠆ㧚ᰴߦ㧘࿑ 5 ߩᓘ 2mmǾ㧘㐳ߐ 50mm ߩᦛ✢߆ࠄㅘㆊ₸ ++0.05
10-6 ࠍᓧࠆ㧚ࠃߞߡ㧘D60mm ߩ૏⟎ߢߩ 2mmǾ50mmLߩࡄࠗࡊ 1 ᧄ߆ࠄߩṳࠇ✢㊂₸ߪ㧘+2.88106 0.05

2KRG FKCOGVGTFOOǾ








10-60.14ǴSv/hr ߣ⸘▚ߐࠇࠆ㧚&QUGTCVGCVRKRGKPNGV㪠㪠 㪇 = Ǵ5XJT?

(d) d5mm㱢ߎߎߢࠛ࡝ࠕᲤߩᐢߐ߇චಽ⁜޿ߩߢ㧘ࠛ࡝ࠕౝߢᦨ߽✢Ḯߦㄭ޿ࡄࠗࡊ㧔࿑ 7 ౝߢ㧘✂ដߌߐࠇߡ޿ࠆࡄࠗࡊ㧕1 ᧄ߆ࠄߩṳࠇ✢㊂₸ࠍࠛ࡝ࠕౝߦᛂㄟࠎߛࡄࠗࡊᧄᢙ୚ߔࠆߎ

࿑ 5 ౉኿✢㊂₸ߣㅘㆊ₸ߩ㑐ଥߣߢ㧘ߎߩࠛ࡝ࠕߩṳࠇ✢㊂₸ߩ᭎▚୯ࠍ᳞߼ࠆ㧚਄⸥ߩࠛFig.5 Relationship between the dose rate at pipe inlet and the࡝ࠕ߆ࠄߩṳࠇ✢㊂₸ߩ᭎▚୯ߪ 0.14ǴSv/hr9 ᧄ1.29

penetration (I/I0).

- 4 -

35

ǴSv/hr ߣߥࠅ㧘ߎߩࠃ߁ߦߒߡ᭎▚ߔࠆߣ㧘3mmǾ50mm
L ߩࠛ࡝ࠕߪ 0.90ǴSv/hr㧘4mmǾ30mm L ߩࠛ࡝ࠕߪ 0.32
ǴSv/hr㧘5mmǾ30mmL ߩࠛ࡝ࠕߪ 0.96ǴSv/hr ߣ᳞߼ࠄࠇࠆ㧚ታ㓙ߦ㧘ࠨ࡯ࡌ࡯ࡔ࡯࠲ߢታᯏ߆ࠄߩṳࠇ✢㊂₸ࠍ᷹ቯߔࠆߣ㧘ߤߩᓘߩࠛ࡝ࠕߢ߽ 1.0ǴSv/hr એਅߢ޽ߞߚ㧚ߥ߅㧘ṳࠇ✢㊂₸ߩ⸵ኈ୯ࠍ 1ǴSv/hr ߣߒߚℂ↱ߪ㧘㨄✢ᔕ↪ⵝ⟎╲૕ᄖ஥ߩ⸵ኈ୯߇㧘ᘠ଀⊛ߦ 1ǴSv/hr એਅߢ޽ࠆߎߣߦၮߠ޿ߡ޿ࠆ㧚4.3.2 㒰㔚ᕈ⢻ߩ᷹ቯ࿑ 7 ߩㆤ⭁᭴ㅧࠍᜬߟࠗࠝ࠽ࠗࠩ࡯ታᯏߩ㒰㔚ᕈ⢻ࠍ᷹ቯߒߚ㧚㒰㔚ᕈ⢻ߪ㧘Ꮺ㔚ࡊ࡟࡯࠻ࡕ࠾࠲ Trek ⵾ Model 158
ߩ㊄ዻࡊ࡟࡯࠻ 152152mm㧘20pFr2pF ࠍ 1kV ߹ߚߪ࿑ 6 ㆤ⭁᭴ㅧࠍᜬߟエ㨄✢ࠗࠝ࠽ࠗࠩ࡯ߩᄖⷰ

-1kV ߦᏪ㔚ߐߖ㧘ߘߩೋᦼ㔚૏߇ㆤ⭁᭴ㅧ಴ญ߆ࠄߩᱜ⽶Fig.6 Soft X-ray ionizer with shielding structure.

ࠗࠝࡦߦࠃࠅචಽߩ৻ߩ 0.1kV ߹ߚߪ-0.1kV ߹ߢᷫ⴮ߔࠆ
ᤨ㑆 Voltage decay time㧘 ߔߥࠊߜ㒰㔚ᤨ㑆 ߦࠃࠅ⹏ଔߒߚ㧚

&
&
&
&
&㒰㔚ᤨ㑆ߪ⍴޿߶ߤ㧘㒰㔚ᕈ⢻߇ఝࠇߡ޿ࠆߎߣࠍ␜ߔ㧚߹ߚ㧘㊄ዻࡊ࡟࡯࠻ࠍᱜᭂᕈߦᏪ㔚ߐߖߚ႐วߪ㧘⽶ࠗࠝࡦߦࠃࠆ㒰㔚ᕈ⢻ࠍ㧘⽶ᭂᕈߩ႐วߪ㧘ᱜࠗࠝࡦߦࠃࠆ㒰㔚ᕈ⢻ࠍ⹏ଔߒߚߎߣࠍ␜ߔ㧚

࿑ 8 ߪ㧘㒰㔚ᕈ⢻㧔㒰㔚ᤨ㑆㧕ߣㆤ⭁᭴ㅧ㧔ࡄࠗࡊ㧕಴ญ㕙߆ࠄᏪ㔚ࡊ࡟࡯࠻ࡕ࠾࠲߹ߢߩ〒㔌ߣߩ㑐ଥࠍ␜ߔታ᷹⚿ $GYKPFQYᨐߢ޽ࠆ㧚߹ߚ㧘ྃ಴ࠛࠕ㘑㊂ߩ㒰㔚ᕈ⢻߳ߩᓇ㗀߽⺞ߴߚ㧚OOǾ
OO*OOǾ
OO*OOǾ
OO*OOǾ
OO*Ꮺ㔚ࡊ࡟࡯࠻ࡕ࠾࠲ߪ⽶ᭂᕈߦᏪ㔚ߐߖ㧘ᱜࠗࠝࡦߦࠃࠆ㒰㔚ᕈ⢻ࠍ⹏ଔߒߚ㧚〒㔌ߩჇടߦ઻޿㧘㒰㔚ᤨ㑆߇㐳ߊߥࠅ㒰㔚ᕈ⢻߇ૐਅߒWPKVOOߡ޿ࠆ㧚߹ߚ㧘ㆤ⭁᭴ㅧ಴ญ㕙߆ࠄߩ㘑㊂߇ᄙߊߥࠆߦߟࠇ

࿑ 7 ࠗࠝࡦൻ࠴ࡖࡦࡃ࡯ㇱߩㆤ⭁᭴ㅧߩ᭎ⷐ㒰㔚ᕈ⢻߇ะ਄ߔࠆߎߣ߇ಽ߆ࠆ㧚ߎࠇࠄߩ⚿ᨐߪ㧘ᱜࠗࠝ

Fig.7 Outline of shielding structure at the ion generating chamber.

ࡦߦࠃࠆ㒰㔚ᕈ⢻ࠍ␜ߒߡ޿ࠆ߇㧘⽶ࠗࠝࡦߦࠃࠆ႐ว߽ห᭽ߥ௑ะࠍ␜ߒߚ㧚ࠍ 1.0ǴSv/hr એਅߦߢ߈㧘߆ߟలಽߥ㒰㔚ᕈ⢻㧔ᢙ⑽ߢߩ㒰㔚߇น⢻ߢ޽ࠆߎߣ㧚㧕ࠍᓧࠆߎߣ߇ߢ߈ࠆߎߣ߇ಽ߆ࠆ㧚5.

߹ߣ߼ዊሹᓘߩ㊄ዻࡄࠗࡊࠍ↪޿ߡ㧘エ㨄✢ࠍㆤ⭁ߔࠆߚ߼ߩㆤ⭁᭴ㅧߩ᧦ઙࠍᬌ⸛ߒ㧘ਅ⸥ߩ⍮⷗ࠍᓧߚ㧚

8QNVCIGFGEC[VKOG
HTQOM8VQM8=U?

ߔߥࠊߜ㧘ㆬቯߒߚㆤ⭁᭴ㅧߦࠃࠅ㧘エ㨄✢ߩṳࠇ✢㊂₸-G[#KTHNQY XQNWOG.OKP
.OKP



Ԙ エ : ✢ߩ✢㊂₸ߪ㧘ⓨ᳇ਛߢߪ〒㔌ߩੑਸ਼ߦᲧ଀ߒߡᷫ⴮ߖߕ㧘✢Ḯߦㄭ޿૏⟎ߢߪᕆㅦߦᷫ⴮ߒ㧘✢Ḯ߆ࠄ㔌      &KUVCPEGHTQOKQPK\GTVQ%2/=OO?

ࠇߚ૏⟎ߢߪᷫ⴮߇✭߿߆ߢ޽ࠆ㧚㽳છᗧߩࡄࠗࡊߦኻߒߡ㧘౉኿✢㊂₸߇ዊߐ޿⒟㧔✢Ḯ߆࿑ 8 ㆤ⭁᭴ㅧࠍᜬߟエ㨄✢ࠗࠝ࠽ࠗࠩ࡯ߩ㒰㔚ᕈ⢻ࠄߩ〒㔌߇㐳޿⒟㧕ㅘㆊ₸ߪዊߐߊ㧘౉኿✢㊂₸߇ᄢ߈

Fig.8 Static eliminating performance of the soft X-ray ionizer

޿⒟㧔✢Ḯߦㄭ޿⒟㧕ㅘㆊ₸ߪᄢ߈ߊߥࠆ㧚with shielding structure.
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31

1

2007

ㆤ⭁᭴ㅧࠍᜬߟエ㨄✢ࠗࠝ࠽ࠗࠩ࡯ߩㆤ⭁ᕈ⢻ߩ⹏ଔ㧔㋈ᧁ᡽ౖࠄ㧕Ԛ ࡄࠗࡊߪᓘ߇ዊߐߊ㧘㐳ߐ߇㐳޿⒟ㆤ⭁ᕈ⢻߇ะ਄ߔࠆ㧚ԛ ࡄࠗࡊ౉ญߢߩ౉኿✢㊂₸ߣㅘㆊ₸ߩ㑐ଥ߆ࠄ㧘ࡄࠗ
ࡊ 1 ᧄ޽ߚࠅߩṳࠇ✢㊂₸ࠍ᳞߼ࠆߎߣ߇ߢ߈ࠆ㧚Ԝ ዊሹᓘߩࡄࠗࡊࠍ↪޿ߚㆤ⭁᭴ㅧࠍᜬߟࠗࠝ࠽ࠗࠩ࡯ታᯏߦߡ㧘エ : ✢ߩṳࠇ✢㊂₸ࠍ 1ǴSv/hr એਅߦߢ߈㧘߆ߟᱜ⽶ࠗࠝࡦ߇චಽߦㅢㆊߔࠆߎߣࠍ⏕⹺ߒߚ㧚3) M. Suzuki, T. Sato, H. Matsuhashi, A. Mizuno㧦 X-rayshielding of an ionizer using low-energy X-rays below 9.5keV
for ultra-clean assembly line of electronic devices, Jpn. J. Appl.
Phys., Vol.44, No.7A(2005)48784) ૒⮮᦮਌㧘㋈ᧁ᡽ౖ㧘᧻ᯅ⑲᣿ ㆤ⭁᭴ㅧࠍᜬߟエࠛ࠶ࠢࠬ✢ࠗࠝ࠽ࠗࠩ࡯ߩ㐿⊒㧔ߘߩ 2㧕
㧘╙ 23 ࿁ⓨ᳇ᷡᵺߣࠦ
ࡦ࠲ࡒࡀ࡯࡚ࠪࡦࠦࡦ࠻ࡠ࡯࡞⎇ⓥᄢળ੍Ⓜ㓸
2005 2225) Ⓑ⪲ੳጤᵄ⨃㧦10kV એਅߩエ㨄✢㒐⼔ߩߚ߼ߩ✢㊂᷹ቯ㧘
╙30࿁ᣣᧄ଻㒾‛ℂቇળ੍Ⓜ㓸 ᣣᧄ଻㒾‛ℂቇળ
㧔1995㧕ෳ⠨ᢥ₂31) ㋈ᧁ᡽ౖ㧘๺ᴰ⾆᥍㧘㌵ᴦᐘ㧘⍹Ꮉ᣽⟵㧦ᓸᒙ㨄✢ࠗ6) X-ray Attenuation Databases, National Institute of Standards andࠝ࠽ࠗࠩ࡯ߩ቟ోߥ૶↪ᣇᴺ㧘ࠢ࡝࡯ࡦ࠹ࠢࡁࡠࠫ࡯

Technology in USA

Vol.10, No.6(2000)182)ᵿ᧻ࡎ࠻࠾ࠢࠬ㧦ࡈࠜ࠻ࠗࠝ࠽ࠗࠩ L9490ขᛒ⺑᣿ᦠ- 6 -