EMG-4210 / EGPS-4210

ELECTRON GUN / POWER SUPPLY
1 keV to 30 keV

Focusable, High Energy Electron Beams, Small Spot to 100 μm
FOR USE IN:
General vacuum physics
Radiation studies
Surface bombardment
Semiconductor researchBiological specimen irradiation
X-Ray generation
Plasma excitation
Flourescence studies
Surface physics studies

FEATURES / OPTIONS:Small spots, down to 100 μm
Beam currents, up to 5 mA
Magnetostatic focusing
Optional magnetostatic beam shaping
Magnetostatic deflection
Pulse capability
Internal alignment while operating
User-replaceable firing units

EMG-4210 Electron Gun Mounted on 2.75 inch CF.
Optional Turbo Pump and Ion Gauge not shown

The Kimball Physics EMG-4210 Electron Gun with its matching
EGPS-4210 Power Supply is a complete subsystem ready to attach tothe user's vacuum system and turn on. It can deliver electrons over a
very broad range of energies, currents and power. The EMG-4210 has
applications in space materials testing, radiation studies,
semiconductor research, x-ray generation and plasma excitation.

Firing units are user-replaceable without removing the entire gun fromthe vacuum chamber; spare firing units can be purchased new, andused firing units may be returned to the factory for rebuild. Alternatively,
the entire electron gun can be sent back to the factory for complete
cleaning, rebuild, cathode replacement, and optional in-vacuum
testing. Various stand-alonr Faraday cups designs are available.

The gun uses a single-crystal lanthanum hexaboride (LaB6) cathode togenerate a high energy, focusable, small spot electron beam. Bothbeam energy and beam current are independently adjustable overwide ranges, the energy from 1 keV to 30 keV, and current from 10 μA
to 5 mA. The electron beam can be pulsed by an input signal to thecontrol grid.

The Power Supply System for the EMG-4210 is composed of two
separate units: the EGPS-4210 Electron Gun Power Supply and aseparate H.V. Power Supply controlled by the EGPS-4210. The
EGPS-4210 features a modular design with miniaturized power supplyclusters, optically isolated signals, and theFlexPanel digitalinterface controller. The included power supplies are Beam Energy,magnetic Lens, and magnetic X, Y Deflection, as well as the floatingSource/ ECC, and Grid supplies.

The adjustable optics of the gun can adapt to different divergences anda range of working distances, suitable to a variety of applications. The
magnetic focusing lens can vary the spot size from 10 mm down to
100 μm. The magnetic centering and optional shaping coils provide
additional beam control, allowing the user to deflect and shape theelectron beam. Shaping typically results in an elliptical beam, bothaxes of which can be independently compressed or extended. In
addition, the cathode to anode spacing is internally adjustable tochange perveance.
The gun features an adjustable cathode feedthrough assembly thatallows the mechanical alignment of the firing unit with respect to theanode and the column. This alignment can be done in real time while
the gun is operating with beam on.

The FlexPanel provides a digital display screen and a keypadcontroller for programming control on the front panel. Rear panel
connectors allow remote /computer control and metering of all gun
power supplies. An RS-232 or RS-422/485 serial port and an analog
input/output connector are included on standard power supply units. All
common computer interface bus types can be accommodated, by useof appropriate digital to analog converters.
An optional LabVIEWTM computer program designed for theEMG-4210 is available for remote computer control and metering.
Software is available in two types: Using National Instrument DAQ
boards and SCSI connectors on the EGPS-4210, or via a simple serial
connector interface. The program provides a virtual panel of controls
and real-time metering on the user’s computer screen.

UHV technology is used throughout, and the gun can be run invacuums from 10-11 torr to 10-7 torr. The electron gun is bakeable to
200ºC with cables removed; bakeout is limited by the magnetic focus
and deflection coils.
The cathode is single-crystal lanthanum hexaboride (LaB6, small spot,high brightness, min. vacuum 1x10-7 torr). The cathode is not damaged
by repeated exposure to atmospheric gases or water vapor when cold.
The gun design provides for differential pumping of the Source region
with a 2¾ inch CF flange on the source chamber for attachment for aTurbo pump and a 2¾ inch CF flange for an ionization gauge. The gun
is usually mounted on a 2¾ inch CF flange and has zero insertion
distance, i.e. does not extend into the vacuum chamber. Due to thehigh power beam produced by the EMG-4210, X-ray shielding isessential.
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

EGPS-4210A Electron Gun Power Supply with FlexPanel controller
38

EMG-4210 ELECTRON GUN SPECIFICATIONSBEAM ENERGYBEAM CURRENTENERGY SPREAD

EGPS-4210 ELECTRON GUN POWER SUPPLY SPECIFICATIONS

1 keV to 30 keV (Independently adjustable)
10 μA to 5 mA (Independently adjustable)
Approx. cathode thermal spread, calculated:
LaB6 - 0.4eV

OUTPUT
ENERGY SUPPLYSTABILITY

Magnetostatic Lens
Optional: Magnetostatic beam shaping
BEAM DIVERGENCE Variable. Adjustable optics to adapt to different
divergences and different working distances
SPOT SIZE
100 μm to 10 mm
WORKING DISTANCE 50 mm to 1000 mm
BEAM DEFLECTION Magnetostatic: ± 5.0° at 30 keV
Optional Dual Grid Power Supply: pulse width 2 μs toPULSE CAPABILITY
DC, rise/ fall 500 ns, rep rates to 5 kHzwith optional LabVIEWTM program pulse generator or
user’s TTL pulser.
BEAM UNIFORMITY
Gaussian
FIRING UNIT
Customer-replaceable Firing Unit Cartridge includes
precision-aligned cathode, and Wehnelt (G-1) assembly
BEAM FOCUSINGCATHODE TYPESINTERNAL GUN
ALIGNMENTMOUNTING
DIFFERENTIAL
PUMPING
INSERTION LENGTHGUN DIMENSIONS(outside vacuum)Standard: LaB6 (180-330). High current option available
Adjustable Feedthrough for mechanical alignment offiring unit while gun is operatingStandard: 2¾ inch CF flange
Source chamber with 2¾ inch CF ports for small pumpand ionization gauge. Optional pump: Varian TurboV81-M with controller. Optional gauge: GranvillePhillips 356 Micro-Ion ModuleZero mm
Gun length: 364 mm sealing surface to end of cableconnector. Gun diameter: 110 mm (without turbo
pump and ion gauge).

FEEDTHROUGH

Multi-pin brazed ceramic

CABLES /CONNECTORSAll high voltage fully ground-shielded cables with mating
metal to metal connectors, to connect gun and power
supply. Standard lengths: 3 m, Optional: longer available

MAXIMUM BAKEOUT

BEAM STABILITY

All necessary voltages to drive the EMG-4210 Electron
Gun (in combination with H.V. Power Supply)<0.01% per hour with 0.05% rms ripple at full output±0.1% per hour with Emission Current Control or ±10%
per hour after warm up without ECC

CONTROLS

FlexPanel controls: Energy, Source, Grid, Lens, X and Y
Deflection, Emission Current Control (ECC)
FlexPanel digital meters: Energy, Source Voltage,
METERING
Source Current, Emission Current, Grid, Lens Current,
X and Y Deflection Currents
COMPUTER/REMOTE Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
CONTROL & METER Metering: 0 to +2 V ( -2 V to +2 V, deflection)
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-232, RS-422 or RS-485
available, if specified at time of order)
Optional: SCSI metering and programming connectors
INPUT
115 VAC or 230 VAC, (specify on order) 50 to 60 Hz
single phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC. Relative humidity: 0 to 75% RH
non condensing
Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
Standard configuration designed for RS-232
connections.
Optional: National Instruments LabVIEWTM file,designed to run with computer DAQ boards NI PCI-6733
and PCIe-6341. SCSI interface
DIMENSIONS
Two units, total approx: 17 in. x 20.3 in. x 22 in.
(width x height x depth) excluding handles (432 mm x 516 mm x 560 mm);
19 in. rack mountable
SOFTWARE

200°C with cables removed(200°C for magnetic Lens and Deflection coils, 350°C for
Source chamber region)

Typical performance;data for guidance only.

Line beam imaged on phosphor screen

Copyright© 2015 by Kimball Physics, Inc. 05/20/15 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.