February 28, 2024
A High-Purity Hydrazine Gas Delivery System has been Developed

Taiyo Nippon Sanso Corporation (President: Kenji Nagata; hereinafter “TNSC”), a Japaneseindustrial gas company in Nippon Sanso Holdings Group, has developed a gas delivery system
for high-purity hydrazine, compatible with RASIRC’s ※ 1 BRUTE ® Hydrazine.
1．BackgroundIn the electronic device manufacturing industry, hydrazine gas is favored for its superior
reactivity over conventional nitriding sources, such as ammonia. This advantage facilitates
the reduction of temperatures in the semiconductor manufacturing process, enhances film
quality, and improves throughput. Such advancements are crucial for miniaturizing advanced
logic semiconductors and increasing the storage capacity of memory chips. ※ 2
TNSC offers RASIRC’s BRUTE ® Hydrazine as a high-purity material specifically forsemiconductor manufacturing. ※ 3 BRUTE ® Hydrazine, prepared by blending anhydrous
hydrazine with a unique organic solvent stabilizer from RASIRC, significantly boosts safety.
While high-purity hydrazine gas has attracted attention as an emerging specialty gas forsemiconductor manufacturing, a system that can deliver this gas via a concentrated and stable
method has not been developed. Given the necessity for consistent delivery of such specialty
gases in semiconductor production processes, the availability of a dedicated delivery system
has become crucial.
Therefore, leveraging their proprietary gas handling technology, TNSC has pioneered thedevelopment of a gas delivery system capable of safely and reliably delivering high -purity
hydrazine gas tailored to semiconductor manufacturing processes .
2. System Overview
The features of the high-purity hydrazine gas delivery system are as follows:✓ A BRUTE ® Hydrazine vessel is securely housed within the gas delivery cabinet,
facilitating the safe and stable delivery of a nitrogen/hydrazine gas mixture (See Figures
1 & 2).
✓✓✓The system includes an integrated monitoring feature that continuously tracks theremaining amount of BRUTE ® Hydrazine gas, ensuring uninterrupted delivery.
Vessel replacement is streamlined through an automated sequence, allowing for safeand easy maintenance without exposing the hydrazine gas.
The interior of the gas delivery cabinet is maintained under continuous negative
pressure to swiftly evacuate any potential gas leaks from the BRUTE ® Hydrazine
cabinet or internal piping through the exhaust duct, thereby preventing disasters.
In case of hazardous conditions, the system is equipped with a safety feature thattriggers an alarm and automatically ceases operation to ensure safety.

- 1 -Figure 1. High-purity hydrazine delivery system (exterior)

Figure 2. Hydrazine gas concentration behavior using the delivery system- 2 -3．Future developments
We are committed to offering innovative solutions to our clients, specifically designed forsemiconductor manufacturing processes. Our goal transcends the expansion of BRUTE ®
Hydrazine sales. By capitalizing on hydrazine’s higher reactivity compared to that of ammonia,
we aim to tackle the unique challenges our clients will encounter in semiconductor production.
[Notes]※1. RASIRC, Inc. (CEO: Jeffrey Spiegelman, headquartered in California, USA), a
subsidiary of the TNSC Group, specializes in the provision of innovative materials andvapor generation equipment for semiconductor processes undergoing continual
miniaturization, achieved through the company’s proprietary advanced membrane
separation technology.
※2. Our company data: Taiyo Sanso Technical Report No. 39 (2020), TiN ALD (atomic layerdeposition) process using anhydrous hydrazine※3. News release dated March 28, 2023, “Notice Regarding the Sales of BRUTE® Hydrazine, an Anhydrous Hydrazine Material”【Company Overview】
Taiyo Nippon Sanso Corporation
Business description: Manufacture and sale of various industrial gases such as oxygen,nitrogen, argon, LP gas, gas for medical uses, and specialty gases,
manufacture and sale of welding equipment and materials, gas -related
devices, and, air separation equipment, assembly, processing,inspection of electrical components, and equipment maintenance
Established:
October 30, 1910
Incorporated:
February 4, 2020
Capital:
1.5 billion yen
Shareholder:
Nippon Sanso Holdings Corporation (Investment ratio: 100%)
Revenue:420.4 billion yen*
*Note: This figure shows the revenue of Japan for Nippon Sanso
Holdings Corporation in FYE2023

Taiyo Nippon Sanso Corporation
Tnsc.Info@tn-sanso.co.jp- 3 -