ELECTRON GUNS

EGH-6002 / EGPS-6002
ELECTRON GUN / POWER SUPPLY

1 keV to 50 keV
FOCUSABLE SMALL SPOT HIGH-ENERGY ELECTRON BEAMSNEFOR USE IN:WGUNION GUNSGENERAL VACUUM PHYSICSRADIATION STUDIESSURFACE BOMBARDMENTSEMICONDUCTOR RESEARCHBIOLOGICAL SPECIMEN IRRADIATIONX-RAY GENERATION
PLASMA EXCITATIONFLUORESCENCE STUDIESSURFACE PHYSICS STUDIES

EGH-6002 Electron Gun mounted on 6 inch CFF

The adjustable optics of the gun can adapt to different divergencesand different working distances. The spot size can be varied from half
a mm to ten cm. A magnetic focusing lens and magnetic centering
deflection provide beam control with low aberration. In addition, thecathode to anode spacing is internally adjustable to change perveance.
The gun features an adjustable cathode feedthrough assembly thatallows the mechanical alignment of the firing unit with respect to theanode and the column. This alignment can be done in real time while
the gun is operating at full voltage with beam on. The firing unit
cartridge (including the cathode, cathode-mount, and Wehneltaperture) is user-replaceable without even removing the gun from thevacuum chamber; used firing units may be returned to the factory forrebuild.

UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr to 10-6 torr for the metal cathodes, or to 10-7 torr for LaB6
cathodes. The thoria-coated iridium cathode can survive a total
vacuum dump. The electron gun is bakeable to 200oC with cables andelectronics box removed; bakeout is limited by the magnetic focus anddeflection coils. The Source region separately is bakeable to 350oC.
The gun can be mounted on a 4½ inch or 6 inch CF flange, and has
zero insertion distance into the vacuum chamber.

DETECTORSThe gun can generate a high energy, focusable, small spot electronbeam. Both beam energy and beam current are independently
adjustable over wide ranges; energies from 1 keV to 50 keV andcurrents from picoamps to tens of milliamps can be achieved. Theelectron beam can be pulsed by an input signal to the control grid.

Several cathode types and sizes are available: tantalum disc cathodes,
thoria-coated (ThO2) iridium cathodes, or single-crystal lanthanum
hexaboride (LaB6) cathodes. These cathodes are not damaged byrepeated exposure to atmospheric gases or water vapor when cold.

The EGPS-6002 Power Supply System contains all necessary power
supplies to run the EGH-6002 Electron Gun. The power supply design
includes a unique optically-controlled floating electronics box that ismounted close to the gun. Among other advantages, this design
reduces the possibility of arc damage due to excess stored energy inthe high voltage cable
Rear panel connectors allow control and metering of all gun power
supplies, including the floating supplies, via analog inputs at ground
potential. A National Instruments LabViewTM computer program,
written by Kimball Physics, is available for complete remote computercontrol. The program can provide the user with a virtual control panelon the user’s computer screen similar to the real EGPS-8102 front
panel. If desired, a computer system can be provided with the software
loaded and checked out.

COMPONENTS

The Kimball Physics EGH-6002 Electron Gun with its matching
EGPS-6002 Power Supplies is a complete subsystem ready to attach
to the user's vacuum system and turn on. It can deliver electrons overa very broad range of energies, currents and power. The EGH-6002
can be used in many different applications from semiconductor
reasearch to secondary electron emission studies.

EMITTERSFEATURES / OPTIONS:MEDIUM BEAM CURRENTS
SMALL SPOTSMAGNETOSTATIC FOCUSINGMAGNETOSTATIC DEFLECTIONPULSE CAPABILITY
INTERNAL ALIGNMENT WHILE OPERATING
USER-REPLACEABLE FIRING UNITS
4½ OR 6 INCH CFF MOUNTINGUHV TECHNOLOGY / BAKEABLECOMPUTER / REMOTE CONTROL

EGH-6002 ELECTRON GUN(Dimensions in mm)
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

1 - 41INDEX / INFORMATION

0.125 X

EGH-6002 ELECTRON GUN SPECIFICATIONSBEAM ENERGYBEAM CURRENTENERGY SPREAD
BEAM FOCUSING
BEAM DIVERGENCE
SPOT SIZE
WORKING DISTANCE
BEAM DEFLECTIONPULSE CAPABILITY
BEAM UNIFORMITYFIRING UNITCATHODE TYPESINTERNAL GUN
ALIGNMENTMOUNTING
GUN DIMENSIONS,(OUTSIDE VACUUM)
INSERTION LENGTHFEEDTHROUGHSCABLES /CONNECTORSMAXIMUM BAKEOUT

EGPS-6002 ELECTRON GUN POWER SUPPLY SPECIFICATIONS

1 keV to 50 keV (Independently adjustable)
10 nA to 100 µA (Independently adjustable)
High Current option: 10 nA to 15 mA
Low Current option: 100 pA to 100 nA
Approx. 0.4 eV cathode thermal spread, calculated
MagnetostaticVariable. Adjustable optics to adapt to different
divergences and working distances
0.5 mm to 100 mm
50 mm to 1000 mm; Typical: 100 mm
Magnetostatic ±0.5°
Optional Dual Grid Power Supply: pulse width 2 µs toDC, rep rates to 1 kHz, 500 ns rise/fall,using appropriate pulse generator, not furnished
Gaussian
Customer-replaceable Firing Unit Cartridge includes
precision-aligned cathode, and Wehnelt (G-1) assembly
Entire firing unit also includes first anode
Tantalum disc, Thorium oxide (ThO2),or Lanthanum
hexaboride (LaB6) Cathodes not harmed by repeatedexposure to atmospheric gases while cold
Adjustable Feedthrough for mechanical alignment offiring unit while gun is operating
4½ inch or 6 inch CFF
Gun length:636 mm, sealing surface to end of cableconnector, Gun diameter: 151 mm for most of length
Gun with electronics box & H.V.cable: approx. 745 mm x415 mm x 220 mm overall (30 in x 16 in x 9 in)Zero mm
Multipin brazed ceramic, threaded stainless steel shell
Multiconductor high voltage fully ground-shielded, withmating aluminum connector to connect gun and power
supply. Standard lengths: 3m Optional: 5 m
200°C with cables and floating electronics box removed(200°C for magnetic Lens and Deflection coils, 350°C
for Source chamber region)

OUTPUTSENERGY SUPPLYSTABILITYBEAM STABILITY

All necessary voltages to drive the EGH-6002 ElectronGun.
<0.01% per hour with 0.05% rms ripple at full output±1.0% per hour with Emission Current Control or±10% per hour after warm up without ECC
CONTROLS
Energy, Lens, Anode, Grid, Source, Emission Current
Control, X and Y Deflection
COMPUTER/REMOTE All power supplies: 0 to +10 volts or -10 to +10 volts
CONTROL
All meters: 0 to +2 volts
METERING
Digital: Energy, Lens, Anode, Emission, Grid, Source
Volts, Source Amps, optional X and Y Deflection
INPUT
115 VAC switchable to 230 VAC, 50 to 60 Hz, 100 W
DIMENSIONS
Two units, total approx: 17 in. x 12 in. x 17 in. (432 mm(width x height x depth) x 305 mm x 432 mm);with rack mount kits, overall width is 19.5 in. (495 mm)
COMPUTER SYSTEM Optional: Industrial computer system including dataacquisition and control hardware DAC.
LAB SOFTWARE
Optional: National Instruments LabViewTM executable
file (installed on computer system)

A typical lab
set-up of acomplete
Kimball Physics
high energy
system with afocusable
electron gun,power supplies
and optional
computer
control system(details varywith gun model)

100

EGH-6002-5257 / EGPS-6002-620
06/24/02
CATHODE TYPE: ThO2 - Ir DISC ES-505 (0.84 mm dia)
ENERGY = 50 keV
ANODE VOLTAGE = 500 V
GRID VOLTAGE = 0 V
LENS CURRENT= 0.700 A
WORKING DISTANCE = 90 mm-8
CHAMBER PRESSURE = 5.1 x 10- torr
EMISSION CURRENT
BEAM CURRENT

5050

EGH-6002-5257 / EGPS-6002A-620
06/27/02
CATHODE TYPE: ThO 2 - Ir DISC
ES-505 (0.84 mm dia)
ENERGY = 25 keV
ANODE VOLTAGE = 500 V
GRID VOLTAGE = 10 V
SOURCE CURRENT = 1.56 A
SOURCE VOLTAGE = 1.00 V
CHAMBER PRESSURE =-85.2 X 10 torr

FARADAY CUP RESPONSE

252010 us

1510010 microsecond Pulse (5 kHz)

5TTL TRIGGER

CEGH60025257d_03.jnb

01412101.46

1.50-101.54

SOURCE CURRENT (A)Typical performance;data for guidance only.

EGH-6002 ELECTRON GUN

EGH-6002-5257 / EGPS-6002A-620
06/20/02
CATHODE TYPE: ThO 2 - Ir DISC ES-505 (0.84 mm dia)

86420

ENERGY = 50keV
ANODE VOLTAGE = 1000 V
SOURCE VOLTAGE = 0.74 V
SOURCE CURRENT = 1.40 A
GRID VOLTAGE = 50 V
WORKING DISTANCE = 90 mm-7CHAMBER PRESSURE = 7.2 x 10 torr
Spot size measured visually
on ruled phosphor screen.

0.00.20.4

CEGH60025257c_03.jnb

0.6

LENS CURRENT (A)

0.8

1.001020

TIME referenced to Trigger (us)175

SPOT SIZE vs LENS CURRENT

0-50

CEGH60025257a_03.jnb

1.42

SPOT SIZE (mm)10030

BEAM CURRENT PULSE RESPONSE TO
TTL PULSE INPUT

EGH-6002 ELECTRON GUN

EGH-6002 ELECTRON GUN

BEAM CURRENT (uA)

150

150

TTL VOLTAGE (V)BEAM & EMISSION CURRENTvs SOURCE CURRENT

BEAM & EMISSION CURRENT (uA)

BEAM & EMISSION CURRENT (uA)Standard specifications listed; Enhanced and custom specifications available.

150
125

BEAM & EMISSION CURRENTvs ANODE VOLTAGE
EGH-6002 ELECTRON GUN
EGH-6002-5257 / EGPS-6002A-620
06/20/02

100

CATHODE TYPE: ThO 2 - Ir DISC
ES-505 (0.84 mm dia)
ENERGY = 50 keV
SOURCE VOLTAGE = 0.93 V
SOURCE CURRENT = 1.56 A
GRID VOLTAGE = 0 V
LENS CURRENT = 0.700 A
WORKING DISTANCE = 90 mm-7
CHAMBER PRESSURE = 1.5 x 10 torr

755025EMISSION CURRENTBEAM CURRENT
CEGH60025257b-03.jnb

00200

400600

ANODE VOLTAGE (V)8001000

Copyright © 2003 by Kimball Physics, Inc. 6/16/03 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.