FRA-2X1-2 / EGPS-1011
ELECTRON GUN / POWER SUPPLY

5 eV to 1000 eV
Wide-Angle Low-Energy Electron Beams from a Compact Source
FOR USE IN:CHARGE NEUTRALIZATIONSURFACE PHYSICS STUDIESIONIZATION EXPERIMENTS
SURFACE SCRUBBING(a)FEATURES / OPTIONS:COMPACT SIZE: 13 mm DIA x 17 mm LENGTHVARIABLE MOUNTING CONFIGURATIONSMEDIUM CURRENTS AT LOW ENERGIESREBUILDABLE COMPONENTSPULSING OPTIONS

(b)

10 mm

FRA-2X1-2 Electron Guns,(a) Mounted on 2¾ CF and (b) Unmounted style

The Kimball Physics FRA-2X1-2 Electron Gun, with its matching
EGPS-1011 Power Supply, is intended for use in a variety of UHV,
surface physics, charge neutralization, and processing applications. It
is a complete subsystem ready to attach to the user’s vacuum systemand turn on. Both beam energy and beam current are adjustable overwide ranges.

Standard FRA-2X1-2 Electron Gun,unmounted (no CFF or feedthrough)actual size

UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr up to 10-5 torr for the standard Ta disc cathode.
Unmounted, the electron gun is bakeable up to 400°C. Mounted on afeedthrough, it is bakeable up to 350°C with the cable removed.

The FRA-2X1-2 Electron Gun uses a refractory metal cathode togenerate a uniform flood beam. The cathode was specificallydesigned for low energy spread. The gun design allows for generationof the beam down to low energies, and very low currents. TheFRA-2X1-2 can produce modest beam currents at energies as low as
5 eV. It can deliver maximum beam currents of 50 μA at 5 eV, and400 μA at 1000 eV.

Optional cathodes include: barium oxide discs (BaO, low light, lowenergy spread, min. vacuum 1x10-7 torr) or yttria-coated iridium discs(Y2O3 - Ir, rugged, vacuum up to 10-4 torr, may survive brief loss ofvacuum). With the exception of BaO, the cathodes are not damaged
by repeated exposure to atmospheric gases or water vapor when cold.
Cathode lifetime is a function of vacuum conditions and beam current
as related to cathode temperature. Cathode lifetime at low currents ingood vacuum may be in the many hundreds of hours, or even over athousand hours.

The FRA-2X1-2 low-energy electron flood gun uses a planar triode
design. An acceleration grid enhances beam current at low energies.
Secondary electrons which may be generated at this grid cannot exit
the electron gun because of the positive potential (0 to +100 V withrespect to the cathode) applied to the grid.

In the mounted gun, firing units are user-replaceable; spare firing units
can be purchased new, and used firing units may be returned to thefactory for rebuild. Alternatively, the entire mounted electron gun, or an
unmounted gun, can be sent back to the factory for complete cleaning,rebuild, cathode replacement, and optional in-vacuum testing.

Enhanced in design for flood gun performance at low energies, theFRA-2X1-2 Electron Gun has a half angle divergence at 50 eV of
11.5 degrees. As the beam energy is increased, the divergencedecreases. Larger spots are achievable at low energies, but notnecessarily at higher energies.

The extraction grid allows pulsing options: either fast capacitive beam
pulsing or dual grid pulsing. Capacitive beam pulsing, using a PulseJunction Box, permits fast beam pulsing down to 20 ns with 20%
maximum duty cycle. Capacitive pulsing requires and an external,variable-voltage pulse generator (not included) and Flange Multiplexer
mounting. Pulsing of the electron beam can also be accomplished withdual grid supplies (positive and negative) in the EGPS-1011, requiring
only a TTL pulse input.

The standard FRA-2X1-2 Electron Gun is a compact unmounted gun
with no feedthrough, as shown above. When part of a system with theEGPS-1011 Power Supply, this standard unmounted gun comes with amounting kit (clamps, plates, and wire) and a separate flange andmultipin feedthrough combination. Optionally the electron gun can bemounted on a 11/3 inch CF or 2¾ inch CF flange with a single multi-pin
feedthrough (upper gun, above). The gun may also be mounted on aFlange Multiplexer for installation of a Faraday cup or to allow the grid
lead to be separate for pulsing, as shown below.

FRA-2X1-2 on a 2¾ CF Flange Multiplexer, with a rotary Faraday CupToll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

The EGPS-1011 Power Supply features a modular design withminiaturized power supply clusters, optically isolated signals, and thenew FlexPanel digital interface controller. The included power supplies
are Beam Energy, the floating Source/ECC and Grid supplies.
The new FlexPanel provides a digital display screen and a keypad forprogramming control on the front panel. Rear panel connectors allow
remote /computer control and metering of all gun power supplies. AnRS-232 serial port and an analog input/output connector are included
on standard power supply units. All common computer interface bus
types can be accommodated, by use of appropriate digital to analog
converters. RS-422/485 conversion is possible.
An optional LabVIEWTM computer program designed for the FRA-2X1
is available for remote computer control and metering using National
Instrument DAQ boards and SCSI connectors on the EGPS-1011. The
program provides a virtual panel of controls and meters on the user’s
computer screen.
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FRA-2X1-2 ELECTRON GUN SPECIFICATIONS

EGPS-1011 ELECTRON GUN POWER SUPPLY SPECIFICATIONSBEAM ENERGYOUTPUTSBEAM CURRENTENERGY SPREAD

5 eV to 1000 eV (Independently adjustable)
1 nA to 400 μA (Independently adjustable)with maximums of 50 μA at 5 eV, 100 μA at 50 eV, and400 μA at 1000 eVApprox. 0.4 eV cathode thermal spread, calculated

Flood beam: 2 mm to 50 mm Spot size varies with beam
parameters. Design optimized for 20 mm dia spot at50 eV and 25 mm working distance.
WORKING DISTANCE Variable: 10 mm to 50 mm
BEAM DEFLECTION
None
PULSE CAPABILITY
Optional Capacitive Pulse Junction Box: pulse width(using appropriate
20 ns to 100 μs , rise/ fall 10 ns, 50 Ω impedance, 1 W
pulse generator,
standard (higher power available)
not included)
Optional Dual Grid Power Supply: pulse width 2 μs toDC, rise/ fall 500 ns, rep rates to 5kHz (TTL required)
BEAM UNIFORMITY
Gaussian
For mounted gun: Customer-replaceable Firing Unit
FIRING UNIT
includes precision-aligned cathode and Wehnelt (G-1)
assemblyand anode, with insulators and connectors
Standard: Tantalum disc
CATHODE TYPES
Optional: Barium oxide (BaO) or Yttrium oxide (Y2O3)
Cathodes not harmed by repeated exposure toatmospheric gases while coldStandard: Unmounted— optional UHV mounting kit
MOUNTING(SS plates, clamps, wire, CFF/feedthrough)Optional: Mounted—11/3 or 2¾ CFF with feedthroughor Flange Multiplexer with a 2¾ inch rotatable CFF,including both tapped and clear mounting holes
FARADAY CUP
Optional: Mounted on gun, manual or pneumatic control
BEAM ALIGNMENT
Optional: Mechanical alignment with ± 2° Port Aligner
Unmounted: approximately 17.2 mm, Leads usuallyextend 90 mm beyond gun structure
INSERTION LENGTH Mounted: Standard: 150 mm. Range: 110 to 170 mm.
Custom lengths available. Gun manufactured at standard
length unless otherwise specified at time of order.
GUN DIAMETER
Unmounted: 13.2 mm
Mounted: 19.1 mm
FEEDTHROUGHS
Multipin brazed ceramic, threaded stainless steel shell
Multiconductor high voltage fully ground-shielded cable,
CABLES /with mating aluminum shell connectors, to connect gun
CONNECTORS
and power supply. Standard lengths: 3 m Optional: 5 m(included with system, optional with unmounted gun)
Unmounted: 400°C
MAXIMUM BAKEOUT Mounted: 350°C with cables removed(Faraday cup: removable pneumatic actuator 65°C max)

ENERGY STABILITY
BEAM STABILITYCONTROLS

SPOT SIZE

Optional Mounting Kit
for an unmounted FRA-2X1-2 Electron Gun

METERINGCOMPUTER/REMOTE
CONTROL & METERAll necessary voltages to drive the FRA-2X1-2 ElectronGun±0.01% per hour; ±0.02% per 8 hours at full output±0.1% per hour with Emission Current Control or±10% per hour after warm up without ECC
FlexPanel controls: Energy, Source, Grid,
Emission Current Control
FlexPanel digital meters: Energy, Source Voltage,
Source Current, Emission Current, Grid
Power supplies: 0 to +10 V
Metering: 0 to +2 V, On/off switches: 0 or +5 V
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-422 or RS-485 available, if
specified at time of order)
Optional: SCSI metering and programming connectors

Optional: National Instruments LabVIEWTM file,designed to run with computer DAQ boards NI 6034E
and NI 6703
INPUT
115 VAC switchable to 230 VAC, 50 to 60 Hz single
phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing,Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
DIMENSIONS
17 in. x 3.5 in. x 22 in. excluding handles(width x height x depth) (425 mm x 90 mm x 560 mm); 19 in. rack mountable
SOFTWARE

UNMOUNTED FRA-2X1-2 ELECTRON GUN (Dimensions in mm)

Typical performance;data for guidance only.

Copyright © 2005 by Kimball Physics, Inc. 11/25/05 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.