1.2 Piezocartridges:
Low voltage actuators in casings with front mount threading

Stack actuators in cartridge-version offer elegant design features by simple attachment of an actuator tothe mechanics using a front mounting thread. Using this thread a coarse adjustment for the system isprovided. Piezocartridges can retrofit conventional lead screws. Mechanical arrangements for adjusting
purposes can be very simply upgraded by using piezocartridges.

12 PIEZOMECHANIKPIEZOMECHANIKtilt range
fix holdercoarse adjust byfine pitch threadpiezo
cartridge
reset springtilt plate

bearing

Schematic of a mirror mount based on piezo cartridges for coarse adjust by mounting screw and ultra fineadjustment by piezo action.
The stiffness of piezo cartridges is reduced compared to a normally mounted stack because of the force
transmission from mounting plate to moving end via stack + casing, and in addition by the quality thescrew mount. A lock nut is provided to increase attaching force.
Piezocartridges can therefore withstand high loads, but force generation is reduced due to the lower stiffness. Most applications (e.g. for adjusting purposes) use constant loading.
Standard configuration:

Options:

Casing: stainless steel
Electrical connection: 1 m coaxial cable RG 178
with BNC connector

Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Position detection
Thermostable

Stroke A/B

A: for –30 V thru +150 V
B: for –30 V thru +150 V
Max. force generation: for –30 V thru +150 V

PIEZOMECHANIKPIEZOMECHANIK 13

FPSt 150/4/… M8x0.5(no internal prestress)
Maximum load: 150 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/4/20: approx. 0.1 Nanometer
TypeL
12R2.5SW10

8max. stroke

lengthµmmm

el.
capacitance
nF

27/20
55/40
80/60

2240
58

340
700
1000

M8x0.5

1-1.5

FPSt 150/4/20 M8FPSt 150/4/40 M8FPSt 150/4/60 M8FPSt 150/5/… M10x0.75(no internal prestress)
Maximum load 600 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/5/20: approx. 0.1 Nanometer
TypeL

15M10x0.75

FPSt 150/5/20 M10
FPSt 150/5/40 M10
FPSt 150/5/60 M10
FPSt 150/5/80 M10FPSt 150/5/100 M10R2.5
SW15

 9.5

1-1.5

max. stroke

lengthµm

mmel.
capacitance
nF

27/20
55/40
80/60
105/80130/100

2341
59
7795

800
1600
2400
3200
4000

FPSt 150/5/… M12x0.5(-BD) (former versions MPSt(-BD)(no internal prestress)
For retrofi tting translation stages MRL 80.25 and Newport mirror mounts SLMaximum load: 600 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/5/20 : approx. 0.1 Nanometer
LSW 12

146

FPSt26
14

11M12x0.5

SW 12L1.5

FPSt-BDTypemax. stroke

lengthµm

mm

el.
capacitance
nF

27/20
40/30
60/40
80/60
105/80130/100
160/120190/140

25
34
43
61
79
97
115
133

800
1200
1600
2400
3200
4000
4800
5600

15

M12x0.5

1.5

8.5

14 PIEZOMECHANIKPIEZOMECHANIK6FPSt 150/5/20 M12 (BD)FPSt 150/5/30 M12 (BD)FPSt 150/5/40 M12 (BD)FPSt 150/5/60 M12 (BD)FPSt 150/5/80 M12 (BD)FPSt 150/5/100 M12 (BD)FPSt 150/5/120 M12 (BD)FPSt 150/5/140 M12 (BD)FPSt 150/7/… M14x1
Prestress force = max. tensile force = 200 N
Maximum load: 1500 NOpen loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/7/20: approx. 0.1 Nanometer
TypeLSW12

1320

40.5

M14x1

5R1.5SW20

FPSt 150/7/20 M14
FPSt 150/7/40 M14
FPSt 150/7/60 M14
FPSt 150/7/80 M14
FPSt 150/7/1000 M14
FPSt 150/7/120 M14
FPSt 150/7/140 M14
FPSt 150/7/>140 M14

max. stroke

lengthel.
capacitance
µF

µm

mm

27/20
60/40
80/60
105/80130/100
160/120190/140/>140

28
4664
82
100
118
136
on request

1.8
3.6
5.4
7.2
911
13

40.5

40.5
70.5M4  5SW4 mm

5M3, 4 mm depth  523SW4 mmVlg

pFVAg

FPSt 150/10/… M18x1(with internal prestress)
Prestress force = max. tensile force = 400 N
Maximum load: 3000 N
Open loop sensitivity at 1 mV amplifier noise for actuator FPSt 150/10/20: approx. 0.1 Nanometer
TypeL

20
40.5

SW16

17

72 R2.5
M18x1 SW22

FPSt 150/10/20 M18
FPSt 150/10/40 M18
FPSt 150/10/60 M18
FPSt 150/10/80 M18
FPSt 150/10/100 M18
FPSt 150/10/120 M18
FPSt 150/10/140 M18
FPSt 150/10/>140 M18

max. strokelengthµm

mm

27/20
55/40
80/60
105/80130/100
160/120190/140>/140

28
4664
82
100118136
on request

7M4  7

3.6
7.2
1114
18
2125

40.5

40.5

80.5

el.
capacitanceµF

M4, 4 mm depth  7

SW6 mm
3VAg

pF

Vlg

3SW6 mmPIEZOMECHANIK

15