EFG-7 / EGPS-1017
ELECTRON GUN / POWER SUPPLY

50 eV to 1500 eVFocused or Uniform Wide-Angle Low-Energy Electron Beams
FOR USE IN:SURFACE PHYSICS STUDIESVACUUM PHYSICS EXPERIMENTS
CHARGE NEUTRALIZATIONELECTRON DESORPTIONSURFACE SCRUBBINGPHOSPHOR TESTINGIONIZATION EXPERIMENTS
SEMICONDUCTOR PROCESSINGFEATURES / OPTIONS:WIDELY CONTROLLABLE PARAMETERSFLOOD BEAMS or NARROW ANGLE BEAMSELECTROSTATIC FOCUSING
DEFLECTION, RASTERING, PULSING
DEMOUNTABLE GUNCOMPUTER / REMOTE CONTROLThe Kimball Physics EFG-7 Electron Gun, with its matchingEGPS-1017 Power Supply, is intended for use in a variety of UHV,
surface physics, and processing applications. It is a complete
subsystem ready to attach and turn on. Beam energy, beam current
and spot size are independently adjustable over wide ranges.
The EFG-7 Electron Gun uses a refractory metal cathode to generatea uniform flood beam. The gun design allows for generation of thebeam down to low energies, and very low currents. The standard
model EFG-7 produces a beam current of 1 nA to 100 μA and energiesof 50 eV to 1500 eV. A High Current option provides beam currents up
to 1 mA.
Centering deflection, rastering and pulsing are all available as options.
Because the design has been optimized as a flood gun and uses acylindrical 4-pole deflector, deflection aberrations can be severe when
the beam is focused into a small spot.
UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr up to 10-5 torr for the standard Ta disc cathode. The
electron gun is bakable to 350°C with cables removed.

EFG-7 Electron Gun with Deflection.
(Inset shows gun demounted)
Alternatively, the entire electron gun can be sent back to the factory forcomplete cleaning, rebuild, cathode replacement, and optional
in-vacuum testing.
The EFG-7 Electron Gun is available in three different mounting
configurations. The standard gun is without deflection and is mounted
on a 2¾ CF Flange Adaptor with a single cable connector. With
optional deflection, the gun is mounted on a 2¾ CF Flange Multiplexer
with separate source, grid and deflection connectors. A demountablestyle shown above is also available for a gun with deflection. The
demountable gun can be used as mounted gun, or it can be removedby the user from its mounting and used as an unmounted gun with theFlange Multiplexer as a separate vacuum feedthrough.
The control grid allows pulsing options: either fast capacitive beam
pulsing or dual grid pulsing. Capacitive beam pulsing, using a Pulse
Junction Box, permits fast beam pulsing down to 20 ns with 20%
maximum duty cycle. Capacitive pulsing requires and an external,
variable-voltage pulse generator (not included) and Flange Multiplexer
mounting. Pulsing of the electron beam can also be accomplished withdual grid supplies, requiring only a TTL pulse input.

Optional cathodes include: barium oxide discs (BaO, low light, lowenergy spread, min. vacuum 1x10-7 torr) and yttria-coated iridium discs(Y2O3 - Ir, rugged, vacuum up to 10-4 torr, may survive brief loss ofvacuum). With the exception of BaO, the cathodes are not damaged
by repeated exposure to atmospheric gases or water vapor when cold.
Cathode lifetime is a function of vacuum conditions and beam current
as related to cathode temperature. Cathode lifetime at low currents ingood vacuum may be in the many hundreds of hours, or even over a
thousand hours.

For guns with deflection, a rastering option can be provided by theRaster Generator Deflection Unit, integrated into the EGPS-1017
power supply.

Firing units are user-replaceable; spare firing units can be purchased
new, and used firing units may be returned to the factory for rebuild.

The new FlexPanel provides a digital display screen and a keypad forprogramming control on the front panel. Rear panel connectors allow
remote /computer control and metering of all gun power supplies. An
RS-232 serial port and an analog input/output connector are included
on standard power supply units. All common computer interface bus
types can be accommodated, by use of appropriate digital to analog
converters. RS-422/485 conversion is possible.

EGPS-1017 Electron Gun Power Supply with FlexPanel controller
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

The EGPS-1017 Power Supply features a modular design withminiaturized power supply clusters, optically isolated signals, and thenew FlexPanel digital interface controller. The included power supplies
are Beam Energy, Focus, and optional X,Y Deflection, as well as thefloating Source/ECC and Grid supplies.

An optional LabVIEWTM computer program designed for the EFG-7 isavailable for remote computer control and metering using National
Instrument DAQ boards and SCSI connectors on the EGPS-1017. The
program provides a virtual panel of controls and meters on the user’s
computer screen.
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STANDARD MODEL EFG-7 ELECTRON GUN SPECIFICATIONS

EGPS-1017 ELECTRON GUN POWER SUPPLY SPECIFICATIONSBEAM ENERGYBEAM CURRENTOUTPUTSENERGY SPREAD
SPOT SIZE
WORKING DISTANCE
BEAM DEFLECTIONPULSE CAPABILITY(using appropriatepulse generator,not included)
BEAM UNIFORMITYFIRING UNITCATHODE TYPES

MOUNTING

FARADAY CUP
BEAM ALIGNMENTINSERTION LENGTHGUN DIAMETER
FEEDTHROUGHSCABLES /CONNECTORSMAXIMUM BAKEOUT

50 eV to 1500 eV (Independently adjustable)
Standard: 1 nA to 100 μA (Independently adjustable)
High Current option: 1 nA to 1 mAApprox. 0.4 eV cathode thermal spread, calculatedStandard: 1 mm to 100 mm (Independently adjustable)
High Current option: 3 mm to 100 mm
Variable: 25 mm to 200 mm
Optional: 4 pole electrostatic: ± 5° at 1500 eV; scales
larger at lower energies
Optional Capacitive Pulse Junction Box: pulse width
20 ns to 100 μs , rise/ fall 10 ns, 50 Ω impedance, 1 W
standard (higher power available)
Optional Dual Grid Power Supply: pulse width 2 μs toDC, rise/ fall 500 ns, rep rates to 5kHz (TTL required)
Gaussian
Customer-replaceable Firing Unit includes
precision-aligned cathode and Wehnelt (G-1) assemblyand anode, with insulators and connectors
Standard: Tantalum disc
Optional: Barium oxide (BaO) or Yttrium oxide (Y2O3)
Cathodes not harmed by repeated exposure toatmospheric gases while coldStandard: Flange Adaptor with a 2¾ inch CF (no deflect)
Optional: Flange Multiplexer with a 2¾ inch rotatable
CF,including both tapped and clear mounting holes
Optional: Demountable (Unmounted / Mounted) witha Flange Multiplexer with a 2¾ inch rotatable CF
Optional: Mounted on gun, manual or pneumatic control
Optional: Mechanical alignment with ± 2° Port Aligner
Standard: 160 mm, Range: 120 mm to 180 mm.
Demounted gun :Gun length with pins 135 mm standard
Custom lengths available. Gun manufactured at standard
length unless otherwise specified at time of order.
25.4 mm at the gun flange, necks down to 19.1 mm at
100 mm from the flange
Multipin brazed ceramic, threaded stainless steel shell
Multiconductor high voltage fully ground-shielded cable,
coaxial grid cable, low voltage deflection cable, withmating aluminum shell connectors, to connect gun andpower supply. Standard lengths: 3 m Optional: 5 m
350°C with cables removed(Faraday cup: removable pneumatic actuator 65°C max)

ENERGY STABILITY
BEAM STABILITYCONTROLSMETERINGCOMPUTER/REMOTE
CONTROL & METERAll necessary voltages to drive the Standard EFG-7
Electron Gun±0.01% per hour; ±0.02% per 8 hours at full output±0.1% per hour with Emission Current Control or±10% per hour after warm up without ECC
FlexPanel controls: Energy, Source, Grid, Focus,
Emission Current Control, optional X and Y Deflection
FlexPanel digital meters: Energy, Source Voltage,Source Current, Emission Current, Grid, Focus,
optional X and Y Deflection
Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
Metering: 0 to +2 V ( -2 V to +2 V, deflection)
On/off switches: 0 or +5 V
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-422 or RS-485 available, if
specified at time of order)
Optional: SCSI metering and programming connectors

SOFTWARE

Optional: National Instruments LabVIEWTM file,
115 VAC switchable to 230 VAC, 50 to 60 Hz single
phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing,Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
DIMENSIONS
17 in. x 3.5 in. x 22 in. excluding handles(width x height x depth) (425 mm x 90 mm x 560 mm); 19 in. rack mountable
INPUT

OPTIONAL RGDU-4A RASTER GENERATOR SPECIFICATIONS
10 separate frequency selections for both X and Y
RASTER GENERATOR (X up to 1000 Hz, Y up to 50 Hz) Variable position
offset (centering). Variable window size. All controllable
remotely via RS-232, RS-422, RS-485, or analog input.
DIMENSIONS
17 in. x 3.5 in. x 22 in.excluding handles(width x height x depth) (425 mm x 90 mm x 560 mm); 19 in. rack mountable

EFG-7 ELECTRON GUN
Standard, without Deflection, mounted on Flange Adaptor(Dimensions in mm)

Typical performance;data for guidance only.

Copyright © 2008 by Kimball Physics, Inc. 11/12/08 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.