J. Inst. Electrostat. Jpn.

, 31, 1 (2007) 14 19,()╬ଔ⊛઀੐㑐ᢙߦၮߠߊ㔚ሶᯏེ៝ㅍᎿ⒟ߩ
Ꮺ㔚ᛥ೙ᛛⴚർ ᨋ ብ ૫㧖,1㧘ᱞ ⮮ ᶈ 㓉㧖㧔2006 ᐕ 9 ᦬ 15 ᣣฃઃ㧧2007 ᐕ 1 ᦬ 20 ᣣฃℂ㧕Technology of Charging Control in Conveyance Manufacturing
Process of Electronic Machineryon the Basis of the Effective Work Function
Hiroyoshi KITABAYASHI,*,1 and Hirotaka MUTO,*(Received September 15, 2006 ; Accepted January 20, 2007)

Recently in manufacturing process of electronic machinery, the contact electrification of machinery is probable tocause the ESD to the semiconductor devices in the electronic machinery. In particular, this phenomenon can beconfirmed in the conveyance process of machinery manufacturing. Therefore it is necessary to provide thecountermeasures to the contact electrification. The electrification suppression method based on the effective work
function was proposed in order to solve the problem of the contact electrification. According to this method, theelectrification is suppressed by applying materials with similar work function to the contact and separation area in theconveyance process of electronic machinery.
1.

㔚ሶᯏེ⚵┙Ꮏ⒟ߢߩ㕒㔚᳇⊒↢ߣ⺖㗴㕒㔚᳇ࠍᛥ೙ߔࠆኻ╷ߪ㧘Ԙ㒰㔚ⵝ⟎㧔ࠗࠝ࠽ࠗࠩ╬㧕ߩᦨㄭߩ᭽‫ߥޘ‬㔚ሶᯏེߦߪ㜞㓸Ⓧൻߒߚඨዉ૕࠺ࡃࠗࠬ⸳⟎ߦࠃࠆ⊒↢㔚⩄ߩਛ๺㧘ԙ㔚⩄ߩ✭๺ࠍଦㅴߔࠆૐᛶ᛫߇៞タߐࠇߡ߅ࠅ㧘ߎࠇࠄߩඨዉ૕࠺ࡃࠗࠬߪ㜞ᯏ⢻ൻ࡮㜞᧚ᢱߩㆡ↪㧘Ԛ㔚⩄⊒↢⥄૕ߩᛥ೙ߩ㧟⒳㘃߇਄ߍࠄࠇࠆ㧚ᓸ⚦ൻߐࠇࠆ௑ะߦ޽ࠆ㧚ඨዉ૕࠺ࡃࠗࠬߪ㜞㓸Ⓧൻߐࠇࠆߎࠇࠄߩኻ╷ࠍ⵾ㅧᎿ⒟߳ㆡ↪ߔࠆߣ߈ߦߘࠇߙࠇ໧㗴߇߶ߤ㕒㔚᳇᡼㔚ߦኻߔࠆ⠴ᕈߪૐਅߔࠆ1,2)㧚৻ᣇ㧘㔚ሶᯏེ⊒↢ߔࠆ㧚╙৻ߩ㒰㔚ⵝ⟎ߩ⸳⟎ߪ㧘ࠗࠝ࠽ࠗࠩ߆ࠄࠗࠝࡦਛߩၮᐙㇱ᧚ߪ⛘✼ᕈߩ㜞޿㜞ᛶ᛫᧚ᢱ߇ᄙ↪ߐࠇߡ޿ࠆ㘑ࠍᾖ኿ߔࠆߎߣߢᏪ㔚‛ࠍਛ๺ߐߖࠆᣇᴺߢ޽ࠆ㧚ߒ߆ߒ㧘ߚ߼㧘⚵┙ਛߦ⊒↢ߒߚ㔚⩄ߪ✭๺ߒߠࠄߊ㧘ធ⸅ಽ㔌ࠍ➅ࠗࠝ࠽ࠗࠩߩ⸳⟎▎ᚲ߇ㆡಾߢߥ޿႐ว㧘⵾ຠߦኻߒߡㅒߦࠅ㄰ߔߎߣߦࠃࠅ⫾Ⓧߐࠇ⛯ߌ㔚૏߇਄᣹ߔࠆ㧚ߎࠇࠄߩ⛘㔚⩄ࠍᵈ౉ߒ㧘㕒㔚᳇⎕უࠍ↢ߓߐߖࠆน⢻ᕈ߇޽ࠆ㧚╙ੑ✼ㇱ᧚ߦᏪ㔚ߒߚ㔚⩄߇㧘㔚ሶᯏེߩ┵ሶ߿㈩✢ࠍ੺ߒߡඨߩኻ╷ߪ㧘Უ᧚ߢ޽ࠆ᦭ᯏ⛘✼᧚ᢱߦࠞ࡯ࡏࡦࡉ࡜࠶ࠢ߿㊄ዉ૕⚛ሶౝㇱߦ᡼㔚ߔࠆߎߣߦࠃࠅ㧘㔚ሶᯏེ߇ਇ⦟ߣߥࠆዻ☳ࠍᷙ౉ߔࠆߎߣߢዉ㔚ᕈࠍઃਈߔࠆߩ߇৻⥸⊛ߢ޽ࠆน⢻ᕈ߇޽ࠆ㧚ㄭᐕߩ⵾ㅧᎿ⒟ߢߪ⥄േൻⵝ⟎ߩዉ౉߇ㅴߺ㧘߇㧘㐳ᦼ㑆ߩ૶↪ߦࠃࠅ㧘ᷙ౉ߒߚ᧚ᢱ߇ᶐ಴ߒ㧘Ꮏ႐ౝߩ⚵┙ߡࠄࠇࠆ㔚ሶᯏེ⴫㕙ߣ⵾ㅧ㨯៝ㅍⵝ⟎ߩ⴫㕙߇ធ⸅ߔⅣႺ߿⵾ຠߩᳪᨴߦ❬߇ࠆน⢻ᕈ߇޽ࠆ㧚╙ਃߩኻ╷ߪ㧘ᏪࠆᎿ⒟߇ᄙߊ㧘ធ⸅ಽ㔌Ꮺ㔚ߦࠃࠆ㕒㔚᳇᡼㔚߇⊒↢ߒᤃ޿㔚ߩ⊒↢ߘߩ߽ߩࠍᛥ೙ߔࠆߣ޿߁ᧄ⾰⊛ߥᚻᴺߢ޽ࠆ㧚ᧄ⁁ᴫߦ޽ࠆ㧚⺰ᢥߢㅀߴࠆ╬ଔ⊛઀੐㑐ᢙߦၮߠߊᏪ㔚ᛥ೙ߪߎߩኻ╷ߦ฽߹ࠇࠆ㧚ࠠ࡯ࡢ࡯࠼㧦ធ⸅ಽ㔌Ꮺ㔚, ઀੐㑐ᢙ, Ꮺ㔚ᛥ೙, 㕒㔚᳇᡼㔚,
㒰㔚* ਃ⪉㔚ᯏ㧔ᩣ㧕వ┵ᛛⴚ✚ว⎇ⓥᚲ
㧔661-8661 ౓ᐶ⋵ ዦፒᏒႦญᧄ↸ 8-1-1㧕
Mitsubishi Electric Corporation. Advanced Technology R&DCenter, 1-1, Tsukaguchi-Honmachi 8-chome, Amagasaki,Hyogo, 661-8661, Japan1
Kitabayashi.Hiroyoshi@dx.MitsubishiElectric.co.jp

2.

╬ଔ⊛઀੐㑐ᢙࠍ↪޿ߚᏪ㔚ᛥ೙ᚻᴺ㕒㔚᳇Ꮺ㔚ࠍᷫࠄߔᦨ⦟ߩᣇᴺߪ㧘ធ⸅ಽ㔌߇ㆱߌࠄࠇߥ޿ㇱಽߦ㧘Ꮺ㔚㔚⩄߇⊒↢ߒߥ޿ࠃ߁ߥ᧚ᢱࠍ૶↪ߔࠆߎߣߢ޽ࠆ㧚ੑߟߩ⇣ߥࠆ᧚ᢱ߇ធ⸅ߒߚ႐ว㧘ᔅߕߘߩ⴫㕙ߦ㔚⩄߇⊒↢ߔࠆ 3)㧚޿ߊߟ߆ߩౖဳ⊛ߥ⛘✼᧚ᢱߦߟ޿ߡߪ

15ฎߊ߆ࠄᏪ㔚೉ߣߒߡ⍮ࠄࠇߡ޿ࠆ㧚Ꮺ㔚೉਄㧘ធㄭߒߚ૏⟎ߦ޽ࠆ᧚ᢱߩ⚵ߺวࠊߖߢߪᏪ㔚ࠍᛥ೙ߢ߈ࠆߣႎ๔ߐࠇߡ޿ࠆ 4)㧚ߒ߆ߒ㧘᧚ᢱߩᏪ㔚․ᕈߪᲣ᧚ߘߩ߽ߩߩ․ᕈ
࠴ࡖ࠶ࠢ㋕ ߦട߃㧘ᷝട‛ߩ฽᦭㊂߿ߘߩ⴫㕙⁁ᘒߢᄢ߈ߊ⇣ߥࠆ㧚߹ߚ㧘Ꮺ㔚೉਄ߩᐨ೉ߪ⋧ኻ⊛ߥ߽ߩߦߔ߉ߕ㧘ቯ㊂⊛ߥᏪ㔚㊂ࠍផቯߔࠆߎߣߪߢ߈ߥ޿㧚ធ⸅ಽ㔌Ꮺ㔚ߩේ࿃ߪ⇣ߥࠆ᧚ᢱ㑆ߩ㔚ሶߩ⒖േߢ޽ࠅ㧘᧚ᢱߩ઀੐㑐ᢙ߇ߘߩ㔚ሶߩ⒖േ㊂㧘ߔߥࠊߜᏪ㔚㔚⩄㊂ࠍⷙቯߔࠆ 5-7)㧚઀੐㑐ᢙߩᏅ߇ᄢ߈޿᧚ᢱ㑆ߩធ⸅ಽ㔌Ꮺ㔚ߢᯏེ╲૕㩘㩩㩢㩖㨴㩐㩤㩧㩅㩣㩖㨱㨼㩎㩨 Ԙᯏེ╲૕ߣ࠴ࡖ࠶ࠢㇱ⴫㕙ߩធ⸅ಽ㔌Ꮺ㔚ߪ㧘⊒↢㔚⩄㊂߇ᄙߊ㧘Ꮕ߇ዊߐ޿᧚ᢱ㑆ߢߪ⊒↢㔚⩄㊂߇ዋߥ޿ߎߣ߇᣿ࠄ߆ߦߐࠇߡ޿ࠆ 8,9)㧚ߎߩࠃ߁ߦ㧘ߎࠇ߹ߢ㔚ሶᯏེߩ⎇ⓥߢߪᏪ㔚ࡔࠞ࠾࠭ࡓ⸃᣿ߩ‛ᕈ୯ߣߒߡ઀੐㑐ᢙ߇૶ࠊࠇߡ߈ߚ߇㧘ታᎿ⒟ߦ߅޿ߡ઀੐㑐ᢙࠍ㕒㔚᳇ᛥ೙ߦㆡ
↪ߒߚ଀ߪ⷗ࠄࠇߥ޿㧚ᧄ⺰ᢥߢߪ㔚᳇࡮㔚ሶᯏེߩ៝ㅍᎿ⒟ߦ߅޿ߡ㧘ᯏེߘߩ߽ߩߩ᧚ᢱߣߘࠇߦធ⸅ߔࠆᎿ⒟ౝᯏ

៝ㅍ▫㩘㩩㩢㩖㩩㩥㩕㩩㩤㩧 ེㇱ᧚ߩ઀੐㑐ᢙࠍቯ㊂⊛ߥᜰᮡߣߒߡណ↪ߒ㧘઀੐㑐ᢙᏅߩዊߐ޿᧚ᢱࠍㆬቯߔࠆߎߣߦࠃࠅ㧘㕒㔚᳇Ꮺ㔚ࠍ⊒↢ߐߖߥ޿ߣ޿߁Ꮺ㔚ᛥ೙ᚻᴺߦߟ޿ߡႎ๔ߔࠆ㧚ౕ૕⊛ߥ੐଀ߣߒߡ㧘㔚ሶᯏེ៝ㅍᎿ⒟ߩਛߢ৻⥸⊛ߢ޽ࡠ࡯࡜ԙ៝ㅍ▫ߣࡠ࡯࡜⴫㕙㑆ߩធ⸅ಽ㔌Ꮺ㔚ࠅ㧘៝ㅍⵝ⟎ߣ㔚ሶᯏེߣߩធ⸅ಽ㔌߇ㆱߌࠄࠇߥ޿࿑㧝ߦ␜ߒߚએਅߩੑߟࠍᬌ⸛ߒߚ㧚Ԙ⥄േ៝ㅍࡠࡏ࠶࠻ߩࠕ࡯ࡓవ┵ߦ⸳⟎ߐࠇߚ࠴ࡖ࠶ࠢ
ㇱߢᯏེࠍឞߺ㧘೎ߩ႐ᚲ߳⒖േߐߖߚᓟ㧘ᯏེ߇࠴ࡖ࠶ࠢ

࿑㧝 ៝ㅍᎿ⒟ߢߩធ⸅ಽ㔌Ꮺ㔚
Fig.1 Contact electrification on conveyance manufacturing.
㽲 Package on machinery and surface on chucks.
㽳 Conveyance box and surface on rollers.

ㇱ߆ࠄಽ㔌ߒߚߣ߈ߦ⊒↢ߔࠆᯏེ╲૕ߣ࠴ࡖ࠶ࠢㇱ⴫㕙ߩធ⸅ಽ㔌Ꮺ㔚㧚ԙᯏེࠍ៝ㅍ▫ߦⓍタߒߡ㧘ࡠ࡯࡜ࠦࡦࡌࠕߢ៝ㅍߔࠆߣ߈ߦ⊒↢ߔࠆ៝ㅍ▫ߣࡠ࡯࡜⴫㕙ߣߩធ⸅ಽ㔌Ꮺ㔚㧚ߒߡߘߩ⴫㕙ࠍ㏜㕙઀਄ߍߣߒ㧘Al, Ni, Au ࠍฦ‫ޘ‬2000Έߕߟ⫳⌕ߒߚ㧚ߎࠇࠄ⫳⌕ߒߚฦ㊄ዻ⴫㕙ߩశ㔚ሶ᡼಴ᴺߢ᷹ቯߒߚ઀੐㑐ᢙߪ㧘ߘࠇߙࠇ Al㧦4.19eV㧘Ni㧦4.68eV㧘 Au㧦
4.90eV ߢ޽ࠆ㧚ߎࠇࠄ㊄ዻߦߟ޿ߡߪ㉄ൻߩน⢻ᕈ߇⠨߃ࠄ

3.

⛘✼‛ߩ╬ଔ⊛઀੐㑐ᢙߩ᷹ቯࠇࠆ߇㧘ዉㅢߩ⏕⹺߆ࠄ⛘✼‛߳ߩᄌൻߪዋߥߊ㧘ߎߩ⁁ᘒ

㊄ዻ᧚ᢱߩ઀੐㑐ᢙߪ⚡ᄖ✢ᾖ኿ߦࠃࠅ㊄ዻਛ߆ࠄ᡼಴

ߢ᷹ቯߒߚ઀੐㑐ᢙ୯ࠍታ↪਄㧘ฦ㊄ዻߩ઀੐㑐ᢙ୯ߣߔࠆ㧚ߐࠇࠆ㔚ሶߩࠛࡀ࡞ࠡ࡯․ᕈ߆ࠄᓧࠆశ㔚ሶᴺߦࠃࠅᱜ⏕ⵍ᷹ቯ↪ߩ⛘✼‛⹜ᢱߪ㧘100x100x2mm ߩᄢ߈ߐߦടᎿߒ

ߦ᷹ቯߢ߈ࠆ㧚ᧄႎ๔ߦ߅޿ߡ߽㊄ዻߩ઀੐㑐ᢙߪᏒ⽼ߐࠇߚ᧼⁁⹜ᢱࠍ↪޿ࠆ㧚ๆḨߦࠃࠆ࠺࡯࠲ߩ߫ࠄߟ߈ࠍᛥ೙ߔ

ߡ޿ࠆℂ⎇⸘ེ␠⵾ߩశ㔚ሶ᡼಴᷹ቯⵝ⟎㧔AC-1㧕ࠍ↪޿ߡࠆߚ߼ߦ㧘᷹ቯ೨ߦߪ㧘⌀ⓨࠝ࡯ࡉࡦࠍ↪޿ߡ 0.1atm ߩ⌀ⓨశ㔚ሶ᡼಴ᴺߢ᷹ቯߒߚ㧚ਛ㧘100͠ߢ 2 ᤨ㑆㧘ᾲಣℂߔࠆ㧚ߘߩᓟ㧘Ḩᐲ 30㧑ߦ೙ᓮ৻ᣇ㧘⛘✼‛ߩ႐ว㧘Ꮺ㔚ߦࠃࠆᓇ㗀ߥߤߢశ㔚ሶᴺߦࠃߐࠇߚ࠺ࠪࠤ࡯࠲ߦ౉ࠇߡ଻▤ߔࠆ㧚ታ㛎⋥೨ߦ⹜ᢱࠍ࠺ࠪࠆᱜ⏕ߥ઀੐㑐ᢙߩ᷹ቯߪ࿎㔍ߢ޽ࠆ㧚ߘߎߢ㧘ᣢ⍮ߩ઀੐ࠤ࡯࠲߆ࠄขࠅ಴ߒ㧘ߘߩਔ㕙ࠍࠗࠝࡦㅍ㘑ེߢ㒰㔚ߒߚᓟ㑐ᢙࠍ᦭ߔࠆฦ㊄ዻࠍ㧘⛘✼‛ߦធ⸅ಽ㔌ߒߚߣ߈ߩ⛘✼‛ߦᏪ㔚․ᕈࠍ᷹ቯߔࠆ㧚᷹ቯߪࠢ࡜ࠬ 1000 ߩࠢ࡝࡯ࡦ࡞࡯

਄ߩᏪ㔚㔚૏ࠍ᷹ቯߒ㧘ߘߩ઀੐㑐ᢙଐሽᕈ߆ࠄ㧘╬ଔ⊛ߥࡓ㧔᷷ᐲ㧦23͠,Ḩᐲ㧦50㧑㧕ౝߢⴕߞߚ㧚⴫㕙㔚૏ߩ᷹ቯߪ୯ߣߒߡ᳞߼ߚ 10)㧚㊄ዻߣ⛘✼᧚ᢱߣߩᏪ㔚․ᕈߪ઀੐㑐ᢙᰴߩࠃ߁ߦߔࠆ㧚Al, Ni, Au ࠍ⴫㕙ߦ⫳⌕ߒߚᏪ㔚↪㊄ዻࠍᏅߦଐሽߔࠆߣ޿߁೨ឭߦ┙ߜ㧘Ꮺ㔚㊂߇࠯ࡠߣߥࠆ઀੐㑐120g ߩ৻ቯ㊀㊂ߢ㧘⹜ᢱߦ 10 ⑽㑆ធ⸅ߐߖߚ㧚ߘߩᓟ㧘ಽᢙࠍߘߩ᧚ᢱߩ╬ଔ⊛઀੐㑐ᢙߣߔࠆ㧚╬ଔ⊛઀੐㑐ᢙࠍធ㔌ߒ 10 ⑽㑆㔌ߒߚ⁁ᘒࠍ⛽ᜬߔࠆ㧚ߎߩᠲ૞ࠍ 10 ࿁➅ࠅ㄰⸅Ꮺ㔚․ᕈ߆ࠄ᷹ቯߔࠆߚ߼ߩ㊄ዻߣߒߡࠕ࡞ࡒ࠾࠙ࡓߒߚᓟߩ⹜ᢱߩ⴫㕙㔚૏ࠍ᷹ቯߒߚ㧚⴫㕙㔚૏ߪ㕖ធ⸅⴫㕙

㧔Al㧕
㧘࠾࠶ࠤ࡞㧔Ni㧕㧘㊄㧔Au㧕ࠍㆬቯߒߚ㧚Al ࠍၮ᧚ߣ㔚૏⸘㧔Monroe Electronics ␠⵾ MODEL279㧕ߦធ⛯ߐࠇߚ

16

311㧟ᧄߩࡊࡠ࡯ࡉ㧔1034E㧕ࠍ↪޿ߡ᷹ቯߒߚ㧚㧝ߟߩ᧚ᢱߦኻߒ㧘⹜ᢱࠍ㧞ᨎḰ஻㧘ฦ⹜ᢱߦኻߒߡ਄⸥᷹ቯࠍ㧞࿁ታᣉߒߚ㧚ᓥߞߡ㧘㧠࿁ߩ᷹ቯ࠺࡯࠲߇ᓧࠄࠇ㧘ߘߩᐔဋ୯ࠍណ

2007225↪ߒߚ㧚

26('#W
#N࿑㧞ߪࡐ࡝ࡈࠚ࠾࡟ࡦࠨ࡞ࡈࠔࠗ࠼㧔PPS㧕㧘ࡐ࡝࠹࠻࡜ࡈ࡞ࠝࡠࠛ࠴࡟ࡦ㧔PTFE㧕ߩ╬ଔ⊛઀੐㑐ᢙߩ᷹ቯ଀ߢ޽ࠆ㧚26(' ߩ઀੐㑐ᢙ0Kᮮゲߪ⛘✼‛ߣធ⸅ߐߖߚ㊄ዻߩ઀੐㑐ᢙࠍ❑ゲߪ⛘✼‛ߩ⴫㕙㔚૏ࠍ␜ߔ㧚઀੐㑐ᢙߣ⴫㕙㔚૏ߪᲧ଀㑐ଥߦ޽ࠅ㧘ᧄ⛘✼‛ߩធ⸅ಽ㔌Ꮺ㔚ߢߪ㔚ሶ߇ਥߥࠠࡖ࡝ࠕߢ޽ࠆߎ઀੐㑐ᢙ㧔G8㧕 225 ߩߣ߇੍ᗐߢ߈ࠆ㧚ᓥߞߡ㧘ฦ⋥✢ߩ㔚૏߇࠯ࡠߣߥࠆᮮゲߣ઀੐㑐ᢙߩಾ ߩ୯ࠍ╬ଔ⊛઀੐㑐ᢙߣߔࠆ 9,10)㧚ߘࠇߙࠇߩ᧚ᢱߩ
࿑㧞 225 ߣ 26(' ߩ╬ଔ⊛઀੐㑐ᢙߩ᷹ቯ
Fig.2 Measurement of effective work function on
PPS and PTFE.

╬ଔ⊛઀੐㑐ᢙߪ 5.1eV, 5.4eV ߣ⹏ଔߢ߈ࠆ㧚
4.

࠴ࡖ࠶ࠢߣᯏེ╲૕ߩធ⸅ಽ㔌Ꮺ㔚

4.1

Ꮺ㔚ᛥ೙࠴ࡖ࠶ࠢ᧚ᢱߩᬌ⸛⴫㧝 ࠴ࡖ࠶ࠢ୥⵬ߣᯏེ╲૕᧚ᢱߩ઀੐㑐ᢙ

Table 1ߩࠕ࡯ࡓవ┵ߦ⸳⟎ߐࠇߚ࠴ࡖ࠶ࠢㇱߢᯏེࠍឞߺ㧘೎ߩ႐

Work function of materials on chucks
and package on machinery.

ᚲߦ⒖േߐߖߚᓟ㧘ᯏེ߇࠴ࡖ࠶ࠢㇱ߆ࠄಽ㔌ߒߚߣ߈ߦᯏ᧚㩷 ᢱ㩷⥄േ៝ㅍࡠࡏ࠶࠻ߢ㔚ሶᯏེࠍ៝ㅍߔࠆߣ߈ߦ㧘ࡠࡏ࠶࠻઀੐㑐ᢙ䋨㪼㪭䋩ེ╲૕ߣ࠴ࡖ࠶ࠢ⴫㕙㑆ߦ㕒㔚᳇߇⊒↢ߔࠆ㧚Ꮺ㔚߇໧㗴ߣAl

4.2

ߥߞߚᯏེߩ╲૕ߪ⚂ 1017ǡ࡮cm ߩ૕Ⓧᛶ᛫୯ߢ޽ࠆࡐ࡝ࡈ

Au

4.8

ࠚ࠾࡟ࡦࠨ࡞ࡈࠔࠗ࠼㧔PPS㧕߇૶↪ߐࠇߡ޿ࠆ㧚ᛶ᛫߇㜞

Pt

4.9

޿ߚ߼ធ⸅Ꮺ㔚ߦࠃࠅ⊒↢ߒߚ㔚⩄ߪ✭๺ߒߠࠄߊ㧘ធ⸅ಽ

SUS3044.7

㔌ࠍ➅ࠅ㄰ߒߡ޿ࠆ㑆ߦ㧘㔚⩄߇⫾Ⓧߒ㜞㔚૏ߦߥࠆ㧚ߎߩ

SUS316

4.8╲૕ਛߦߪඨዉ૕࠺ࡃࠗࠬ߇៞タߐࠇߡ޿ࠆߩߢ㧘㕒㔚᳇᡼

SUS4404.7

㔚߇⊒↢ߒߚ႐วߦ࠺ࡃࠗࠬ⎕უߩේ࿃ߣߥࠆน⢻ᕈ߇޽⛘✼ᕈ PE

5.1

ࠆ㧚ዉ㔚ᕈ PE

5.0PPS㧔㩋㨶㨹㩂ടᎿ↪㧕

5.2

PI 㩄㨺㩎

5.1⃻⁁㩋㨶㨹㩂᧚ᢱ㧔Fe㧕

4.5

ᯏེ╲૕᧚ᢱ㧔PPS㧕

5.1

㕒㔚᳇ࠍᛥ೙ߔࠆᚻᴺߣߒߡ㧘࠴ࡖ࠶ࠢߢᯏེ╲૕ࠍឞࠎߢಽ㔌ߒߡ߽㧘╲૕߇Ꮺ㔚ߒߥ޿࠴ࡖ࠶ࠢ᧚ᢱߩㆬቯࠍᬌ⸛
ߒߚ㧚
4.2

ᯏེ╲૕᧚ᢱߣᏪ㔚ᛥ೙୥⵬᧚ᢱߩ
╬ଔ⊛઀੐㑐ᢙ࿑㧝ߦ␜ߒߚᯏེ╲૕ߪ⛘✼᧚ᢱߩ PPS ߢ޽ࠅ㧘⃻⁁ߩ࠴੐㑐ᢙߪ 4.5eV ߢ޽ࠅ㧘ߘߩᏅ߇ 0.6eV ޽ࠆߎߣ߆ࠄ㧘ߎࠇࡖ࠶ࠢ᧚ᢱߪ㋕㧔Fe㧕ߢ޽ࠆ㧚ᯏེ▋૕ߩᏪ㔚ࠍᛥ೙ߢ߈ࠆࠄߩ᧚ᢱߦࠃࠆᏪ㔚ߪᄢ߈޿ߣផቯߐࠇࠆ㧚⴫㧝߆ࠄ㧘╬ଔ࠴ࡖ࠶ࠢ᧚ᢱߩ୥⵬ߣߒߡ㊄ዻߣ᦭ᯏ㜞ಽሶ᧚ᢱࠍᬌ⸛ߒ⊛઀੐㑐ᢙ߇ᯏེ▋૕᧚ᢱߢ޽ࠆPPS ߩ઀੐㑐ᢙߦㄭ޿୯ࠍߚ㧚㊄ዻ᧚ᢱߩ୥⵬ߣߒߡࠕ࡞ࡒ࠾࠙ࡓ㧔Al㧕㧘㊄㧔Au㧕㧘⊕ᜬߟ⛘✼ᕈ PE ߣ PI ࠦ࡯࠻߇ᦨ߽Ꮺ㔚ࠍᛥ೙ߢ߈ࠆ᧚ᢱߣផ

㊄㧔Pt㧕
㧘3 ⒳㘃ߩࠬ࠹ࡦ࡟ࠬ㧔SUS304, SUS316, SUS440㧕

ቯߢ߈ࠆ㧚ࠍㆬቯߒߚ㧚㜞ಽሶ᧚ᢱߩ୥⵬ߣߒߡ㧘⛘✼ᕈࡐ࡝ࠛ࠴࡟ࡦ

4.3㧔PE㧕㧘ዉ㔚ᕈࡐ࡝ࠛ࠴࡟ࡦ㧔PE㧕㧘ࡐ࡝ࡈࠚ࠾࡟ࡦࠨ࡞ࡈࠔ╬ଔ⊛઀੐㑐ᢙࠍ᷹ቯߒߚ⴫㧝ߩฦ᧚ᢱࠍ࠴ࡖ࠶ࠢߩᒻ

ࠗ࠼㧔PPS㧦࠴ࡖ࠶ࠢടᎿ↪ߢᯏེ╲૕ߩ PPS ߣߪ⚵ᚑ߇⇣⁁ߦടᎿߒ㧘៝ㅍേ૞ࠍታᣉߒߚߣ߈ߩᏪ㔚㔚૏ࠍ᷹ቯߒߚ㧚ߥࠆ㧕㧘߅ࠃ߮㧘⃻⁁ߩ㋕⵾࠴ࡖ࠶ࠢߦᏒ⽼ߩࡐ࡝ࠗࡒ࠼ṁᯏེ╲૕ࠍ᷹ቯ೨ߦࠗࠝ࠽ࠗࠩߦࠃࠅ㒰㔚ߒߚᓟ㧘ࠕ࡯ࠬ᧼ᶧࠍႣᏓߒߚࡐ࡝ࠗࡒ࠼㧔PI㧕ࠦ࡯࠻ࠍㆬቯߒߚ㧚਄ߦ࿕ቯߒߚ⁁ᘒߢ㧘㧟ߟߩ࠴ࡖ࠶ࠢ߇╲૕ߩ㧟▎ᚲࠍ࠴ࡖ࠶ࠢ୥⵬᧚ᢱߩᏪ㔚․ᕈ

೨▵ߩᣇᴺߢ᷹ቯߒߚߎࠇࠄߩ୥⵬᧚ᢱߩ╬ଔ⊛઀੐㑐

0.1MPa ߩ৻ቯ࿶ജߢ㧘ធ⸅ߣಽ㔌ߩᠲ૞ࠍ 10 ࿁➅ࠅ㄰ߒߚ㧚ᢙ୯ࠍ⴫㧝ߦ␜ߒߚ㧚ᯏེ╲૕᧚ᢱߢ޽ࠆ PPS ߩ઀੐㑐ᢙ߇ߘߩᓟ㧘࠴ࡖ࠶ࠢߣᯏེ▋૕ߪ㧟▎ᚲߢធ⸅ߔࠆߚ߼ߘߩ⴫

5.1eV ߢ޽ࠆߩߦኻߒߡ㧘⃻⁁ߩ࠴ࡖ࠶ࠢ᧚ᢱߢ޽ࠆ㋕ߩ઀㕙㔚૏ࠍ⴫㕙㔚૏⸘ߢ᷹ቯߔࠆ㧚᷹ቯߦ↪޿ߚ⹜㛎ࠨࡦࡊ࡞- 3 -17╬ଔ⊛઀੐㑐ᢙߦၮߠߊ㔚ሶᯏེ៝ㅍᎿ⒟ߩᏪ㔚ᛥ೙ᛛⴚ㧔ർᨋብ૫ࠄ㧕ᢙߪ㧟୘ߢ㧘㧝ߟߩᯏེ╲૕ߦኻߒ㧟▎ᚲࠍធ⸅ㇱ૏߇޽ࠆ5.

ߩߢ㧘ว⸘㧥ὐߩᐔဋࠍฦ࠴ࡖ࠶ࠢ᧚ᢱߩ᷹ቯ୯ߣߒߚ㧚

5.1ࠦࡦࡌࠕࡠ࡯࡜ߣ៝ㅍ▫ߩធ⸅ಽ㔌Ꮺ㔚Ꮺ㔚ᛥ೙ࡠ࡯࡜᧚ᢱߩᬌ⸛࿑㧟ߪ࠴ࡖ࠶ࠢ୥⵬᧚ᢱߣᯏེ╲૕ߣߩធ⸅ಽ㔌ߦࠃࠆ㔚ሶᯏེࠍ೎Ꮏ⒟߳⒖േߔࠆߣ߈ߦ៝ㅍ▫ߦᯏེࠍⓍタ㔚૏ࠍ␜ߔ㧚ᯏེ╲૕ߦ૶↪ߐࠇߡ޿ࠆ PPS ߩ઀੐㑐ᢙߪߒ㧘ࡠ࡯࡜ࠦࡦࡌࠕ਄ࠍ▫߇⥄േ៝ㅍߐࠇࠆ႐ว߇޽ࠆ㧚៝

5.1eV ߢ޽ࠅ㧘࿑ਛߦ❑✢ߢ␜ߒߚ㧚࿑㧟ࠃࠅᯏེ╲૕ߩ⴫ㅍ▫ߦ⛘✼᧚ᢱࠍㆡ↪ߒߚߣ߈ߦ៝ㅍ▫ߩᐩ㕙ߣࡠ࡯࡜㑆㕙㔚૏ߪ㧘࠴ࡖ࠶ࠢ୥⵬᧚ᢱߩ઀੐㑐ᢙߦኻߒߡᲧ଀㑐ଥߦߢធ⸅ಽ㔌Ꮺ㔚߇↢ߓ㧘㕒㔚⺃ዉߦࠃࠅ៝ㅍ▫ਛߩᯏེ߽Ꮺ޽ࠅ㧘࠴ࡖ࠶ࠢ᧚ᢱߣ╲૕᧚ᢱߩធ⸅ಽ㔌Ꮺ㔚ߢߪ㧘㔚ሶ߇㔚ߔࠆ㧚ߎߩ⁁ᘒߢᯏེߩ┵ሶ߇᡼㔚ߒߚߣ߈ߦߪ㧘៞タߐਥߚࠆࠠࡖ࡝ࠕߦߥߞߡ޿ࠆߣ੍ᗐߢ߈ࠆ㧚╲૕᧚ᢱ㧔PPS㧕ࠇߡ޿ࠆඨዉ૕࠺ࡃࠗࠬߩ⎕უߦ❬߇ࠆน⢻ᕈ߇޽ࠆ㧚ࠃࠅዊߐ޿઀੐㑐ᢙߩ᧚ᢱ㧔Fe, SUS ߥߤ㧕ߢߪ㧘╲૕஥ߪ៝ㅍ▫ߩᐩ㕙ߦ⊒↢ߒߚ㕒㔚᳇ࠍ㒰෰ߔࠆᚻᴺߣߒߡ㧘⸳⽶ᭂᕈߦᏪ㔚ߒ㧘╲૕ࠃࠅᄢ߈ߥ઀੐㑐ᢙߩ᧚ᢱ㧔PPS㧕ߢ⟎ߩ◲ଢߐ߿ࠦࠬ࠻㕙߆ࠄ㧘ࡠ࡯࡜ߣࡠ࡯࡜ߩ㑆ߩ㓗㑆ߦ▫

ߪ㧘╲૕஥ߪᱜᭂᕈߦᏪ㔚ߔࠆ㧚╲૕ߣ࠴ࡖ࠶ࠢ᧚ᢱ㑆ߩ઀ߩᐩ㕙ߦធ⸅ߔࠆࠃ߁ߦ㒰㔚ࡉ࡜ࠪࠍ⸳⟎ߔࠆߎߣࠍ⹜ߺ੐㑐ᢙᏅ߇ᄢ߈޿߶ߤ㧘╲૕ߩᏪ㔚㊂߇ᄢ߈ߊߥࠆ㧚ߎߩ࿑ߚ㧚ߒ߆ߒ㧘ࡉ࡜ࠪߩߺߩ⸳⟎ߢߪ㧘ࡉ࡜ࠪ❫⛽߳ߩࠧࡒઃ߆ࠄᏪ㔚ᛥ೙ലᨐ߇㜞޿᧚ᢱߪ㧘⴫㧝ߩ઀੐㑐ᢙ߆ࠄ੍᷹ߐ⌕߿㧘ࡉ࡜ࠪߩᄌᒻߦࠃࠅ㧘⍴ᦼ㑆ߢ㒰㔚ലᨐ߇ᖡൻߔࠆߎࠇߚࠃ߁ߦ㧘⛘✼ᕈ PE ߣ PI ࠦ࡯࠻ߢ޽ࠅ㧘⃻⁁ߩ࠴ࡖ࠶ࠢߣ߇᣿ࠄ߆ߣߥߞߚ㧚ߘߩ⚿ᨐ㧘㗫❥ߦࡉ࡜ࠪࠍ੤឵ߔࠆᔅ

᧚ᢱߢ޽ࠆ Fe ߣᲧセߔࠆߣᏪ㔚㔚૏߇ᡷༀߢ߈ࠆߎߣ߇ࠊⷐ߇޽ࠅ㧘࡜ࠗࡦ▤ℂ⠪ߩ⽶ᜂ߇ᄢ߈ߊߥࠆ㧚▤ℂ⠪ߩ⽶ᜂ߆ࠆ㧚ࠍシᷫߐߖࠆߚ߼ߦߪ㧘ߐࠄߦࡔࡦ࠹࠽ࡦࠬ㑆㓒ߩ㐳޿㧘ᕡ

4.4ਭ⊛ߥᏪ㔚ᛥ೙ኻ╷ࠍታᣉߔࠆߎߣ߇ᔅⷐߢ޽ࠆ㧚

ታᎿ⒟ߢߩㆡ↪ᕈߩ⏕⹺Ꮺ㔚ᛥ೙࠴ࡖ࠶ࠢ᧚ᢱߦߪ㧘╲૕ PPS ᧚ᢱߩ╬ଔ⊛઀੐㑐ߘߎߢ㧘ࡠ࡯࡜ࠦࡦࡌࠕߦ߅޿ߡ៝ㅍ▫߇៝ㅍߐࠇࠆߣ߈ᢙߦ╬ߒ޿᧚ᢱߢ޽ࠆࡐ࡝ࠗࡒ࠼㧔PI㧕ࠍ૶↪ߔࠇ߫㧘Ꮺ㔚ߦ㧘៝ㅍ▫ߣࡠ࡯࡜߇ធ⸅ಽ㔌ࠍ➅ࠅ㄰ߒߡ߽㧘៝ㅍ▫߇Ꮺ߇ᛥ೙ߢ߈ࠆߎߣ߇ࠊ߆ߞߚ㧚ߘߎߢ㧘ታ㓙ߩ⵾ㅧᎿ⒟ߢᏪ

㔚ߒߥ޿᧚ᢱࠍ╬ଔ઀੐㑐ᢙߦၮߠ߈ㆬቯߒ㧘ࡠ࡯࡜⴫㕙ߦ㔚ᛥ೙࠴ࡖ࠶ࠢߩㆡ↪ᕈࠍ⏕⹺ߒߚ㧚Ꮞ߈ઃߌࠆߎߣߢᏪ㔚ߩᛥ೙ࠍᬌ⸛ߒߚ㧚5.2⃻࿷ߩ㋕㧔Fe㧕࠴ࡖ࠶ࠢ⴫㕙ߦ PI ࠦ࡯࠻ߒߚ࠴ࡖ࠶ࠢࠍ૞៝ㅍ▫ߣᏪ㔚ᛥ೙୥⵬ࡠ࡯࡜᧚ᢱߩ╬ଔ⊛઀੐㑐ᢙ୯⵾ߒ㧘ㅢᏱߩ⵾ㅧᎿ⒟ߩ࠴ࡖ࠶ࠢߦㆡ↪ߒߚ㧚╲૕ߩធ⸅ಽ
㔌Ꮺ㔚㔚૏ߩ⚿ᨐࠍ࿑㧠ߦ␜ߔ㧚⃻⁁ߩ࠴ࡖ࠶ࠢ᧚ᢱ㧔Fe㧕

⃻⁁ߩࡠ࡯࡜ߪ㋕ࠍਥᚑಽߣߔࠆ㍑▤ߢ޽ࠆ㧚៝ㅍ▫ߪ૕ߦࠃࠆ╲૕ߩ⴫㕙㔚૏ߪ⚂8 ߢ޽ߞߚ㧚৻ᣇ㧘Ꮺ㔚ᛥ೙

Ⓧᛶ᛫₸߇⚂ 1016ǡ࡮cm ߩ⛘✼᧚ߢ޽ࠅ㧘ਥᚑಽ߇ࡐ࡝ࡊࡠ

࠴ࡖ࠶ࠢ㧔PI ࠦ࡯࠻㧕ߦࠃࠆ╲૕ߩᐔဋ㔚૏ߪ⚂8 ߢ޽ࠅ㧘

ࡇ࡟ࡦ㧔PP㧕ߢ㧘⌕⦡೷ߣߒߡߩᷝട೷ࠍ฽߻㧚ࡠ࡯࡜⴫㕙⚂ 1/50 એਅߦ╲૕ߩᏪ㔚ࠍᛥ೙ߢ߈ࠆߎߣ߇ࠊ߆ߞߚ㧚ߦᏎߊࡈࠖ࡞ࡓߩ୥⵬᧚ᢱߣߒߡ㧘Ꮢ⽼ࡈࠖ࡞ࡓߩਛ߆ࠄ⛘✼ᕈࡐ࡝ࠛ࠴࡟ࡦ㧔PE㧕㧘ዉ㔚ᕈࡐ࡝ࠛ࠴࡟ࡦ㧔ዉ㔚ᕈ PE㧕㧘ࡐ࡝ࠛࠬ࠹࡞㧔PET㧕㧘ࡐ࡝࠹࠻࡜ࡈ࡞ࠝࡠࠛ࠴࡟ࡦ㧔PTFE㧕㧘╲૕᧚ᢱ㧔225㧕
㧦G8࠽ࠗࡠࡦ㧔Nylon㧕ࠍㆬᛯߒߚ㧚⛘✼ᕈ 2'ዉ㔚ᕈ 2'#W
2V
575
575
575



#N



225㧔㩋㨶㨹㩂ടᎿ↪㧕

2+ 㩄㨺㩎‫ غ‬ᐔဋ୯

⃻⁁㩋㨶㨹㩂᧚ᢱ(G ⃻⁁㩋㨶㨹㩂 (G Ꮺ㔚ᛥ೙㩋㨶㨹㩂 2+ ઀੐㑐ᢙ G8࿑㧟 ࠴ࡖ࠶ࠢ୥⵬᧚ᢱߩ઀੐㑐ᢙߣᯏེ╲૕ߩ⴫㕙㔚૏ߣߩ㑐ଥ
Fig.3 Relationship between work function of materials
on chucks and surface potential of package.

- 4 -࿑㧠 ⃻⁁ߣᏪ㔚ᛥ೙࠴ࡖ࠶ࠢߦࠃࠆታᎿ⒟ߢߩ
⴫㕙㔚૏ߩᲧセ
Fig.4 Comparison of surface potential at having usedexisting and charging control chuck inmanufacturing process.

1831

12007

⴫㧞 ࡠ࡯࡜୥⵬ߣ៝ㅍ▫᧚ᢱߩ઀੐㑐ᢙ
Table 2 Work function of materials on rollers
and conveyance box.

ߎࠇࠄ᧚ᢱߩ઀੐㑐ᢙࠍ⴫㧞ߦ␜ߔ㧚⴫㧞߆ࠄ៝ㅍ▫᧚ᢱ
㧔PP㧕ߩ઀੐㑐ᢙߪ 4.9eV ߢ޽ࠆߩߦኻߒߡ㧘⃻⁁ߩࡠ࡯࡜ߩ઀੐㑐ᢙߪ 4.2eV ߢ޽ࠅ㧘ߘߩᏅ߇ 0.7eV ߣធ⸅Ꮺ㔚߇ᄢ߈޿ߣផቯߢ߈ࠆ㧚߹ߚ㧘⴫㧞߆ࠄ៝ㅍ▫ߣߩᏪ㔚߇߽ߞߣ᧚㩷 ᢱ㩷߽ᛥ೙ߢ߈ࠆ᧚ᢱߪ㧘╬ଔ⊛઀੐㑐ᢙ߇╬ߒ޿ዉ㔚ᕈ PE ߢ઀੐㑐ᢙ䋨㪼㪭䋩

⛘✼ᕈ PE

5.1

ዉ㔚ᕈ PE

4.9

PET

4.4

៝ㅍ▫ߩធ⸅ಽ㔌Ꮺ㔚⹏ଔߪ㧘Ꮏ⒟ਛߦ૶↪ߐࠇߡ޿ࠆ៝

PTFE

5.4

ㅍ▫㧔ኸᴺ㧦ZZOO㧕ࠍ૶↪ߒ㧘ㅢᏱߩ㔚᳇ᯏེߩ

Nylon

3.7

៝ㅍᣇᴺߣห᭽ߦ㧘㧝୘ᒰߚࠅߩ㊀㊂߇ MI ߩ㔚᳇ᯏེࠍ៝

⃻⁁㩥㨺㩡᧚ᢱ (Fe)4.2

ㅍ▫ਛߦ㧠୘౉ࠇ㧘⥄േ៝ㅍߩࡠ࡯࡜ࠦࡦࡌࠕ਄ࠍ៝ㅍߐߖ

៝ㅍ▫᧚ᢱ㧔PP㧕

4.9޽ࠆߎߣ߽ផቯߢ߈ࠆ㧚5.3

ࡠ࡯࡜୥⵬᧚ᢱߩᏪ㔚․ᕈࠆ㧚៝ㅍᓟ㧘㔚᳇ᯏེࠍ▫߆ࠄขࠅ಴ߒߡ㧘ⓨ▫ࠍࠕ࡯ࠬ᧼
਄ߦ⸳⟎ߒߚ OO ෘߩ㧠୘ߩ࠹ࡈࡠࡦࠬࡍ࡯ࠨ࡯਄ߦ⟎߈㧘៝ㅍ▫ᐩ㕙ߩ㧠▎ᚲߩ⴫㕙㔚૏ࠍ㕖ធ⸅⴫㕙㔚૏⸘㧔ࠪࡓࠦࠫࡖࡄࡦ␠⵾ (/:㧕ࠍ↪޿ߡ᷹ቯߒߚ㧚⴫㧞ߢ␜ߒߚฦ୥⵬᧚ᢱࠍࡠ࡯࡜ߦᏎ޿ߡ㧘ߘߩࡠ࡯࡜਄ࠍ៝ㅍߐߖߚߣ߈ߩ៝ㅍ▫ߩ⴫㕙㔚૏ࠍ᷹ቯߒߚ㧚ฦ୥⵬᧚ᢱߩ᷹ቯߦ៝ㅍ▫ࠍ㧞୘↪޿㧘㧝ߟߩ▫ߢ㧠▎ᚲߩ㕙ౝ᷹ቯ߆ࠄ㧘ว⸘㧤ὐߩᐔဋࠍฦࡠ࡯࡜᧚ᢱߦࠃࠆ៝ㅍ▫ߩᏪ㔚㔚૏᷹ቯ୯ߣߒߚ㧚࿑㧡ߪࡠ࡯࡜ߦᏎ޿ߚฦ⒳᧚ᢱߩ઀੐㑐ᢙߣߘࠇࠄߩ᧚ᢱࠍᏎ޿ߚࡠ࡯࡜ߢ⊒↢ߒߚ៝ㅍ▫ߩធ⸅ಽ㔌Ꮺ㔚㔚૏ࠍ␜ߔ㧚៝ㅍ▫᧚ᢱ㧔PP㧕ߩ઀੐㑐ᢙߪ 4.9eV ߢ޽ࠅ࿑ਛߦ❑✢ߢ␜ߒߚ㧚⴫㧞ߩ઀੐㑐ᢙ୯߆ࠄផቯߐࠇߚߣ߅ࠅ㧘៝ㅍ▫ߩ઀੐㑐ᢙߣหߓ઀੐㑐ᢙࠍ߽ߟዉ㔚ᕈ PE ࠍᏎ޿ߚࡠ࡯៝ㅍ▫᧚ᢱ㧔22㧕
㧦G826('ዉ㔚ᕈ

2'

2'

⃻⁁㩥㨺㩡
᧚ᢱ (G2'6
0[NQP઀੐㑐ᢙ㧔G8㧕࿑㧡 ࡠ࡯࡜୥⵬᧚ᢱߩ઀੐㑐ᢙߣ៝ㅍ▫ߩ⴫㕙㔚૏ߣߩ㑐ଥ
Fig.5 Relationship between work function of material
on rollers and surface potential of conveyancebox.

࡜ߢߪ㧘⴫㕙㔚૏ߪዊߐ޿㧚߹ߚ㧘៝ㅍ▫ߩ઀੐㑐ᢙࠃࠅዊߐ޿઀੐㑐ᢙߩ᧚ᢱ㧔PET㧘Nylon㧕ࠍᏎ޿ߚࡠ࡯࡜ߢߪ㧘៝ㅍ▫஥ߪ⽶ᭂᕈߦᏪ㔚ߒ㧘៝ㅍ▫ߩ઀੐㑐ᢙࠃࠅᄢ߈ߥ઀੐㑐ᢙߩ᧚ᢱ㧔PE㧘PTFE㧕ࠍᏎ޿ߚࡠ࡯࡜ߢߪ㧘៝ㅍ▫ߪᱜᭂᕈߦᏪ㔚ߒߡ޿ࠆ㧚៝ㅍ▫ߣࡠ࡯࡜᧚ᢱ㑆ߩ઀੐㑐ᢙᏅ߇ߐߩᓇ㗀ࠍฃߌߡ㧘ធ⸅ߔࠆ⋧ᚻ‛૕ߦ㔚ሶࠍଏ⛎ߢ߈ࠆ⁁ᄢ߈޿߶ߤ㧘៝ㅍ▫ߩᏪ㔚㊂߇ᄢ߈ߊߥࠆߎߣ߇ࠊ߆ࠆ㧚ߚᘒ㧔࠼࠽࡯㧕ߣ㧘⋧ᚻ‛૕߆ࠄ㔚ሶࠍฃߌขࠆߎߣ߇ߢ߈ࠆߛߒ㧘ฦ⒳ࡠ࡯࡜᧚ᢱߩ઀੐㑐ᢙߣ៝ㅍ▫ߩ⴫㕙㔚૏ߪ㧘⋥⁁ᘒ㧔ࠕࠢ࠮ࡊ࠲࡯㧕߇ሽ࿷ߔࠆߣ⠨߃ߡ޿ࠆ㧚ធ⸅ߒߚ⋧✢਄ߦࡊࡠ࠶࠻ߐࠇߕ㧘Ყ଀㑐ଥࠍ␜ߒߡ޿ߥ޿㧚․ߦ៝ㅍ

ᚻ‛૕ߩ઀੐㑐ᢙߣߩᏅߦࠃࠅ㧘㔚ሶ߇⒖േߔࠆ߇㧘ߎࠇࠄ▫ߩ઀੐㑐ᢙࠃࠅ߽ࡠ࡯࡜᧚ᢱߩ઀੐㑐ᢙ߇ዊߐ޿▸࿐ߢߩ㜞ಽሶ᧚ᢱߩ㔚ሶ⁁ᘒኒᐲߪ㧘ฦ‫ߩޘ‬㜞ಽሶߦࠃࠅ⇣ߥࠅ㧘ߪ㧘⚂ 4eV ߆ࠄ 4.9eV ߹ߢߩ௑߈ߪዊߐ޿߇㧘⚂ 4eV ࠃࠅዊ࠼࠽࡯㗔ၞߣࠕࠢ࠮ࡊ࠲࡯㗔ၞߩ㔚ሶߩ⒖േᢙ߇⇣ߥࠆߣߐ޿࠽ࠗࡠࡦ߇ሽ࿷ߔࠆ㗔ၞߢ௑߈߇ᄢ߈ߊߥࠅ㧘⽶ᭂᕈ஥ㅀߴߡ޿ࠆ㧚ᓥߞߡ㧘࿑㧡ߦ␜ߒߚᦛ✢ߩ௑߈ߪ៝ㅍ▫ߣࡠ߳㔚૏߇ᕆỗߦჇടߔࠆ㧚࡯࡜ߦᏎ޿ߚฦ᧚ᢱ㑆ߩ࠼࠽࡯㗔ၞߣࠕࠢ࠮ࡊ࠲࡯㗔ၞߩ

ߎߩℂ↱ߪੑߟ⠨߃ࠄࠇࠆ㧚৻ߟ⋡ߪធ⸅ಽ㔌Ꮺ㔚ߦ㑐ਈ㔚ሶߩಽᏓߦଐሽߒߡ޿ࠆน⢻ᕈ߇ផ᷹ߐࠇࠆ㧚ߎߩࡕ࠺࡞ߔࠆ៝ㅍ▫㧘޽ࠆ޿ߪࡠ࡯࡜᧚ᢱߩធ⸅Ꮺ㔚ߦᓇ㗀ࠍ෸߷ߔࠍ⏕⸽ߔࠆߚ߼ߦߪ㧘ߎࠇࠄ᧚ᢱߩ㔚ሶ⁁ᘒࠍ⏕⹺ߔࠆᔅⷐ㔚ሶߩ⁁ᘒኒᐲߩ㆑޿ߦࠃࠆߣ⠨߃ࠄࠇࠆ㧚࿕૕㜞ಽሶߩᏪ߇޽ࠆ㧚㔚⃻⽎ࠍ⺑᣿ߔࠆߚ߼ߦ㧘Duke ࠄߪ޽ࠆࠛࡀ࡞ࠡ࡯ߩᷓߐࠍੑߟ⋡ߪࡠ࡯࡜᧚ᢱߣ៝ㅍ▫ߩ⌀ߩធ⸅㕙Ⓧߢ޽ࠆ㧚ࡠ࡯ਛᔃߦࠟ࠙ࠬಽᏓߔࠆ㧘㜞ಽሶ࿕᦭ߩ㔚ሶ⁁ᘒ߇ሽ࿷ߔࠆߣ࡜᧚ᢱߩਛߢ Nylon ߪ❫⛽⁁ߩࠪ࡯࠻ߢ޽ࠅ㧘ઁߩࡠ࡯࡜᧚ߒߚᏪ㔚ࡕ࠺࡞ࠍឭ᩺ߒߡ޿ࠆ㧚ߎߩࡕ࠺࡞ߢߪ㜞ಽሶᢱߦ૶↪ߒߚࡈࠖ࡞ࡓ↢࿾ߢߪߥ޿ߩߢ㧘⴫㕙ᒻ⁁߇⇣ߥࠆ㧚⴫㕙ߪ㔚ሶߢḩߚߐࠇ㧘ಽሶ㊂ߩಽᏓ߿ಽሶ㈩೉ߩ࡜ࡦ࠳ࡓ
- 5 -ᓥߞߡ㧘៝ㅍ▫ߣߩធ⸅㕙Ⓧ߇ࡈࠖ࡞ࡓ᧚ᢱࠃࠅ߽ᄢ߈ߊߥ

19╬ଔ⊛઀੐㑐ᢙߦၮߠߊ㔚ሶᯏེ៝ㅍᎿ⒟ߩᏪ㔚ᛥ೙ᛛⴚ㧔ർᨋብ૫ࠄ㧕ࠅ⊒↢㔚⩄㊂߇Ⴧടߒ㧘㔚૏߇⽶ᭂᕈ஥߳Ⴧടߒߚน⢻ᕈ߽

6.

⠨߃ࠄࠇࠆ㧚ታᎿ⒟ߢ⌀ߩធ⸅㕙Ⓧߩ᷹ቯߪ㔍ߒ޿ߩߢቯ㊂㔚ሶᯏེ៝ㅍᎿ⒟ߢߩ㕒㔚᳇Ꮺ㔚ߩ໧㗴ࠍ⸃᳿ߔࠆᣇᴺ

⊛ߥ⠨ኤߪߢ߈ߥ޿㧚ߒ߆ߒ㧘ࡠ࡯࡜᧚ᢱߣߩធ⸅ߦࠃࠅ៝

ߣߒߡ㧘╬ଔ⊛઀੐㑐ᢙߦၮߠߊᏪ㔚ᛥ೙ᛛⴚࠍឭ᩺ߒߚ㧚ㅍ▫ߩ⴫㕙㔚૏ߩᭂᕈ߇᧚ᢱߦࠃࠅ⇣ߥࠆߎߣߪ㧘ᧄ᷹ቯߢ

ᧄᚻᴺߪ⵾ㅧᎿ⒟ߦ߅޿ߡធ⸅ಽ㔌ߔࠆㇱಽߦ㧘઀੐㑐ᢙ߇᣿ࠄ߆ߢ޽ࠅ㧘ߎࠇߪធ⸅㕙Ⓧߦ㑐ࠄߕ㧘઀੐㑐ᢙߩ㆑޿߇ㄭ޿᧚ᢱࠍ૶↪ߔࠆߎߣߢᏪ㔚ࠍᛥ೙ߔࠆ㧚⥄േ៝ㅍࡠࡏ࠶

㑐ਈߒߡ޿ࠆ㧚࠻ࠕ࡯ࡓవ┵ߦ⸳⟎ߐࠇߚ࠴ࡖ࠶ࠢㇱߢ㧘ᯏེࠍឞߺ⒖േߐ

5.4

ታᎿ⒟ߢߩㆡ↪ᕈߩ⏕⹺߹ߣ߼ߖߚᓟ㧘ᯏེ߇࠴ࡖ࠶ࠢㇱ߆ࠄಽ㔌ߐࠇߚߣ߈ߦ⊒↢ߔࠆᯏ

៝ㅍᎿ⒟ߦ߅޿ߡ㧘ࠦࡦࡌࠕࡠ࡯࡜ߦᏪ㔚ᛥ೙᧚ᢱ㧔ዉ㔚ེ╲૕ߩធ⸅ಽ㔌Ꮺ㔚㧘ᯏེࠍ៝ㅍ▫ߦⓍタߒߡ㧘ࡠ࡯࡜ࠦᕈ PE㧕ࠍᏎ޿ߚࡠ࡯࡜ߣ㧘⃻࿷㧘૶↪ߒߡ޿ࠆ㍑▤ࡠ࡯࡜ߢࡦࡌࠕߢ⥄േ៝ㅍߔࠆߣ߈ߦ⊒↢ߔࠆ៝ㅍ▫ߣࡠ࡯࡜⴫㕙៝ㅍᓟ㧘៝ㅍ▫ࠍ㧡୘Ⓧߺ㊀ߨߚ⁁ᘒߢߩᦨ਄Ბߩ៝ㅍ▫ߩ㑆ߩធ⸅ಽ㔌Ꮺ㔚ߩߘࠇߙࠇߦߟ޿ߡ㧘╬ଔ⊛઀੐㑐ᢙߦၮ⴫㕙㔚૏ࠍ᷹ቯߒߚ㧚߹ߚ㧘㍑▤ࡠ࡯࡜਄ࠍ៝ㅍߐߖࠆߣ߈ߠ߈᧚ᢱࠍㆬቯ㧘ㆡ↪ߔࠆߎߣߢᄢ᏷ߦᏪ㔚㔚૏ࠍᛥ೙ߢ߈ߦ㧘ࡠ࡯࡜㑆ߦ㒰㔚ࡉ࡜ࠪࠍ⸳⟎ߒ㧘㒰㔚ࡉ࡜ࠪߣᏪ㔚ᛥ೙ࠆߎߣࠍ␜ߒߚ㧚ᧄ⺰ᢥߦ⸥タߒߚ៝ㅍᎿ⒟ߢߪ‫ޔ‬Ꮺ㔚㔚૏᧚ᢱ㧔ዉ㔚ᕈ PE㧕ࠍᏎ޿ߚࡠ࡯࡜ࠍ૬↪ߒߚ႐วߩ⚿ᨐࠍ࿑ࠍᛥ೙ߔࠆਥⷐ࿃ߪធ⸅ߔࠆ᧚ᢱ㑆ߩ઀੐㑐ᢙߢ޽ߞߚ㧚ߒ㧢ߦ␜ߔ㧚ኻ╷ߒߡ޿ߥ޿㍑▤ࡠ࡯࡜ߩߺߩ㔚૏ߪ⚂M8߆ߒ㧘ㆡ↪᧚ᢱߩ㔚᳇ᛶ᛫₸╬ߩ‛ᕈ୯߇⵾ㅧᎿ⒟ߢᓇ㗀ߔߢ޽ࠆ߇㧘㒰㔚ࡉ࡜ࠪߩ⸳⟎ߢߪM8㧘ߐࠄߦ㒰㔚ࡉ࡜ࠪࠆน⢻ᕈ߽⠨߃ࠄࠇ㧘ߎࠇࠄߩ⋧㑐ߦߟ޿ߡߪ੹ᓟߩ⺖㗴ߢߦട߃Ꮺ㔚ᛥ೙᧚ᢱߩࡠ࡯࡜⸳⟎ߢߪM8 ߹ߢᛥ೙ߔࠆ޽ࠆ㧚ߎߣ߇ߢ߈ߚ㧚ߐࠄߦ㔚᳇࡮㔚ሶᯏེߪ㧘㜞ᯏ⢻ൻ࡮㜞ᓸ⚦ൻߐࠇ㧘㕒㔚᳇᡼㔚ߦࠃࠆਇ⦟߇⊒↢ߒ߿ߔ޿⁁ᴫ߇⛯ߊߣផ᷹ߢ߈ࠆ㧚㔚⩄ࠍਛ๺ߔࠆࠗࠝ࠽ࠗࠩߩ⸳⟎߿ዉ㔚ᕈ᧚ᢱߩㆡ↪ߪ੹ᓟ߽ᔅⷐߢ޽ࠆ㧚৻ᣇ㧘㔚⩄ߩ⊒↢ߘߩ߽ߩࠍᛥ೙ߔࠆߣ޿

M8

߁ᧄ⾰⊛ߥኻ╷߇㧘੹ᓟ㧘߹ߔ߹ߔ㊀ⷐߦߥࠆߣ⠨߃ࠄࠇࠆ㧚ᧄ⺰ᢥߢㅀߴߚ╬ଔ⊛઀੐㑐ᢙߦၮߠߊ㔚ሶᯏེ៝ㅍᎿ⒟ߢߩᏪ㔚ᛥ೙ᚻᴺߪ㧘ߘߩ᦭ലߥᚻᲑߣߥࠆ㧚ෳ⠨ᢥ₂
L.B. Levit and J. Menear: Solid State Technol,41 (1998) 852) ਣᴦᒾ, ᧖ᧄᵏᒾ, ੖᦬ᅚᷡቁ, ᏒᎹ๺↵㧦㕒㔚᳇ቇળ⹹,26 (2002) 113) ᧛↰㓶ม㧦⴫㕙㨯⭯⤑ಽሶ⸳⸘ࠪ࡝࡯࠭㧡‫⴫ޟ‬㕙㨯㜞ಽሶߣ㕒㔚᳇‫ޠ‬, p.16, ౒┙಴ (1988)4) 㕒㔚᳇ቇળ㧦ᣂ 㕒㔚᳇ࡂࡦ࠼ࡉ࠶ࠢ, p.1026,
ࠝ࡯ࡓ␠ (1998)
5) R.G.C. Arridge: Brit. J. Appl. Phys., 18 (1967) 1311
6) Y.Murata: Jpn. J. Appl. Phys., 18 (1979) 17) ർᨋብ૫ ⮮੗ᴦਭ ᄢ⍹⾆ਯ㧦㕒㔚᳇ቇળ⹹
22 (1998) 253
8) H. Graf von Harrach and B.N. Chapman: Vacuum,22 (1972) 535
9) D.K. Davies: Brit. J. Appl. Phys., D2 (1969) 1533
10) ർᨋብ૫, ⮮੗ᴦਭ㧦㕒㔚᳇ቇળ⹹, 27 (2003) 240
11) T.J. Fabish and C.B. Duke: J. Appl. Phys.,
48, 1 (1977) 4256
12) C.B. Duke and T.J. Fabish: J. Appl. Phys.,1)M8 M8⃻⁁Ꮏ⒟

㩖㩨㩡㩆⸳⟎㩖㩨㩡㩆㧗Ꮺ㔚ᛥ೙㩥㨺㩡࿑㧢 ⃻⁁ࡠ࡯࡜ߣࡉ࡜ࠪߦട߃ߡᏪ㔚ᛥ೙ࡠ࡯࡜ࠍ૶↪ߒߚߣ߈ߩታᎿ⒟ߢߩ⴫㕙㔚૏ߩᲧセ
Fig.6 Comparison of surface potential at having usedexisting roller, brush and charging control roller
in addition to brush in manufacturing process.

49, 1 (1978) 315- 6 -