VOICE COIL

BALL SCREWAIR BEARINGREPEATABILITYPIGLIDEMICROPOSITIONING

ENGINEERED SYSTEMSACCURACY

NANOPOSITIONING

DIRECT DRIVE

PRECISION POSITIONING
AND MOTION CONTROLLINEAR MOTORHIGH DYNAMICSPIMAG®

W W W. P I . W S

Precision Positioning and Motion Control

Product Finder Online – What is the easiest way for you to find the best positioning solution?
The printed catalog is a major showcase for PI and, as well as presenting the entire productrange, it also acts as a reference for all of our motion solutions. However, to take advantageof the latest products and developments, we recommend using the product finder on the PI
website www.pi.ws.
How to use the product finder:
Select the product type specified by the axes of motion required. Selection of more criteria
expands or shortens the list of results. Select more than one filter at a time, for example, tofind positioning stages designed for higher load capacity, too.

INTRODUCTION
Markets and Applications ............................................................................................
Motorized Standard Products Overview ......................................................................
Technological Depth for Optimized Products ..............................................................
Custom Examples Picture Wall ...................................................................................
The PI Group – A Strong Partner for Industry and Research .......................................
The PI Group Milestones .............................................................................................
Expert Consulting ........................................................................................................
Engineering Design Expertise and Customization .......................................................
Production Capabilities ...............................................................................................
Vacuum Know-how .....................................................................................................
From 1-off to Series: OEM Users Benefit From Maximum Flexibility ...........................
Global Service and After-Sales ....................................................................................
Preferred Solutions for High-Precision Automation Tasks ..........................................

2

W W W. P I . W S

04
10
12
15
17
18
20
21
22
23
24
25
26

Introduction
Translation Stages

PRODUCTS

XY Stages

Translation Stages .............................................................................................................................................................. 28
Precision Linear Stages ................................................................................................ 30
High-Precision Linear Stages ....................................................................................... 72
PIglide Linear Air Bearing Stages ................................................................................. 112
Z Stages ....................................................................................................................... 126

Rotation Stages

XY Stages ........................................................................................................................................................................... 138
XY Stages with Mechanical Bearings .......................................................................... 140
PIglide XY Stages with Air Bearings ............................................................................ 158

Linear Actuators

Rotation Stages .................................................................................................................................................................. 162
Rotation Stages ........................................................................................................... 164
Rotation Stages with Torque Motor and Air Bearing .................................................. 184
Goniometer Stages ..................................................................................................... 192

Linear Actuators .................................................................................................................................................................. 200
Voice Coil Actuators .................................................................................................... 202
Screw-Drive Precision Actuators ................................................................................. 216
High-Load Screw-Drive Actuators ............................................................................... 226

Motion Control

Motion Control .................................................................................................................................................................... 232
Industrial motion control ............................................................................................. 234
Modular Multi-Channel Piezo Controllers .................................................................... 250
Stepper Motor Controllers ........................................................................................... 252
DC Motor Controllers .................................................................................................. 254
Voice Coil Controllers .................................................................................................. 258

Gantry Systems

Gantry Systems .................................................................................................................................................................. 260
Throughput, Precision and Reliability ......................................................................... 262

Components & Accessories ................................................................................................................................................ 264
Air Bearings ................................................................................................................. 266
Accessories for Air Bearings and Stages ..................................................................... 280
Adapter Brackets for Multi-Axis Combinations ........................................................... 286

More information, step-files and downloads are available from our website www.pi.ws.
All data subject to change without notice, ©PI 2018.

3

MOTION|POSITIONING

Terms and Technology
Glossary

Components &Accessories

Terms and Technology Glossary ......................................................................................................................................... 290

Markets and Applications

SEMICONDUCTOR PRODUCTION AND INSPECTION
The automation of process steps in production and inspection is steadily on the increase. At the same time, the requirements toaccuracy required in motion and positioning are growing. Today, in many industrial areas accuracy levels are needed as they wereneeded just a few years ago in research institutions. PI with its linear stages, rotation stages, and lifting stages, as well as more
complex multi-axis kinematics, offers excellent solutions for industrial applications in many growing markets and even for very
general automation tasks with challenging specifications.

The requirements to the straightness and flatness, and the precision are particucularly high in the production and inspection of semiconductors or circuit boards.
s.
High dynamics of the motion axis are required for an optimized throughput. In
n thiscase, a standard A-311 stage with a 200 mm × 200 mm travel range in XY carries
ies acustomized rotation stage. All stages have air bearings to warrant the best flatnessnessand direct drives for precision and high dynamics positioning. In addition, it isspossible to hold a stable position

The semiconductor industry often requires very specific solutions, e.g., for wireor ball bonders. PI's Gantry systems are an ideal basis for customized adaptations.
The strokes and the stacking height can be varied almost arbitrarily, the configuration of the motors provides extremely high accelerations of up to 5 g and thisensures the highest productivity in the application. Control features of ACS motion
controllers such as “Input Shaping” help to build a stable system which actively
suppresses possible vibrations

4

W W W. P I . W S

Wafer inspection system with integrated linear
motor axes for fast precision XY scanning.
Stepper motor axis for fine vertical position of
the inspection equipment

Introduction

PHOTONICS PACKAGING AND OPTICAL ALIGNMENT
During production and inspection of components with optical data transmission, it is important to align fibers or fiber arrays for
optimum connection with thee highest possible accuracy. Position tolerances way under 50 nm are usual and multi-channel inputs
and outputs require simultaneous
eous alignment in several axes.

In this multi-axis system for
wafer inspection and photonics
alignment, high speed linear motororstages are used for the long xy stroke,ewhile mechanical stages with stepper
motors and screw drives are used for theother degrees of freedom that do not require
too high dynamics

18-axis double alignment system provides fast NxM alignmentof SiP devices in wafer probers. Cascade Microtech’s pioneering
CM300xi photonics-enabled engineering wafer probe station
integrates PI’s parallel-kinematic Fast Multichannel Photonics
Alignment systems for high throughput, wafer-safe, nanoprecision optical probing of on-wafer Silicon Photonics devices.
(Image: Cascade Microtech, a FormFactor company)

In photonics, automated alignment is the key to high throughput
and outstanding quality. The basis of this optical alignment system isa very stiff XYZ set-up consisting of three motorized linear stages
and a P-616 NanoCube® piezo nanopositioner. The low overall height
simplifies integration in limited installation space. The motorized
drives make longer travel ranges possible and at the same time, the
NanoCube® nanopositioner ensures fast scanning motion and dynamic
compensation of drift effects. Flexure guides and all-ceramic insulated
PICMA® actuators guarantee a long lifetime. Because all drives areequipped with position sensors, it is possible for example, to reliably
prevent collisions with expensive silicon wafers

5

MOTION|POSITIONING

Markets and Applications

Automated testing procedures ensure
quality, e.g., in the production processof printed circuit boards (PCBs). Thereby,
the precise control of the forces acting
on the sensitive boards as well as the fast
capturing and interpretation of measurement data are extremely important

INDUSTRIAL MANUFACTURING
The field of industrial manufacturing and assembly offers the widest range of applications for the PI micropositioning stages. In
many applications the precision requirements keep growing for industrial application.
For example, digital printing becomes more and more common. The accuracy of the separate dots needs to be better than 20 μm
to be recognized as equidistant by the human eye. This requires motion technology providing an accuracy typically 10 times higher
meaning 2 μm, as well as motion with constant speed, good straightness and flatness.
Another example is force-controlled testing of a touch screen, a keyboard or electronic car keys, as well as the control of force
with which small parts are being assembled. Here, PI offers advanced solutions for those markets using its proprietary voice coiland force sensor technologies.

6

W W W. P I . W SIntroduction

LASER MATERIAL PROCESSING
Laser cutting for example, often requires lowest tracking errors while following thearbitrary path of the customer’s workpiece. This means very dynamic multi-axis motionthat is ideally realized by using linear motor solutions which combine dynamics andaccuracy. An additional vertical motion is typically realized using a ball screw stage.
For improved dynamics in the Z-direction, a linear motor axis can be equipped with amechanical, magnetic or pneumatic weight balance. These applications can be servedwith standard linear stages with a debris protection or with fully customized solutions.
Building Highly Productive Laser Systems
ACS Motion Control, as part of the PI group, allows to supply highly sophisticatedMotion Controller and Universal Drive Modules for the control of laser processing
applications. Control of the laser power and the triggering of the laser is done by the
LCMV2 Laser Control Module. A dedicated software to create a custom specific Human
Machine Interface (HMI) is available as well. Additionally integrating a 3rd party galvo
scanner allows to decouple the high and the low frequencies of motion: The high frequencies will be covered by the galvo scanner and the low frequency motions will be
executed by PI linear stages. The resulting possibilities for the overlapping motion of
the scanner and stages are practically unlimited and allow to create best-productivity
systems with high-precision motion without any stitching errors.

SPiiPlusEC

PI’s dynamic positioning systems combined with ACS motion controllers
become fast, productive systems which,with the help of lasers, can label, mark,rip, cut, or drill

UDMnt

ACS Motion Control and PI motion
ion systems are perfectly matched to each other. A solution froma single-source supplier does not just offer the customer sophisticated positioning technology
and high-performance control solutions, but also faster start-up and high flexibility when implementing new requirements

7

MOTION|POSITIONING

Markets and Applications

Typical 2-axis setup with clear aperture for the scanningof larger surfaces

3-axis combination of linear motor stages. The vertical axis uses
weight compensation and it can, therefore, move with high dynamics
while, at the same time, offering the best positioning accuracy

AUTOMATED OPTICAL INSPECTION (AOI)

To increase productivity, it is very common to do a meander scan.
While one axis generates a motion with constant speed, theperpendicular axis moves one step to the next line. Pictures aretaken during the constant speed motion which leads to highrequirements in straightness and flatness of those stages.

The field of optical inspection widens as the requirements inquality assurance are growing higher and higher. There are different ways of inspecting devices like PCB, electronic components, and medical samples.
The easiest way is to move from point to point, stop, and takea picture. This requires fast step-and-settle times and a highstability when on target position. To cover large surfaces willtake a long time.

In many cases an additional Z-stage is used for autofocusing
during the scan. Those Z-stages typically carry the objective
and have to execute a high-bandwidth, very fast short-stroke
motion. Depending on the requirements in stroke, PI offers different solution for the vertical systems.

8

W W W. P I . W SIntroduction

The sample positioning setup inside the holography endstation uses a variety of PI’s motorized translation and rotary stages, as well as piezo
stages for ultra-fine positioning (Image: M. Osterhoff, Institute for X-Ray Physics, Georg-August-University Göttingen)BASIC RESEARCH, SCIENTIFIC INSTRUMENTATION
Why scientists rely on PI: Creativity for Research and Development. Many scientific publications cite PI systems because they
are an important prerequisite for successful research and development projects. Customized designs for university research are
everyday business for PI, also for environmental conditions such as UHV to 10–10 hPa, radiation, or strong temperature changes
down to the cryogenic range. The spectrum reaches from completely new designs to small modifications of standard products
for a better adaptation to the application. Important fields of research are, for example, beamline instrumentation, micro systems
and nanotechnology.

Compact linear translation
stage that features two
separate moving plates on
one guiding

Hybrid drive, consisting ofelectric motor and piezo actuator,
for optimum positioning accuracy
and minimum path deviation

9

MOTION|POSITIONING

Motorized Standard Products Overview

Linear Actuators■

Optional force control■

Screw or voice coil drive■

Compact

Linear Stages■

Travel range up to several 100 mm■

Screw or direct drive■

Mechanical or air bearing■

Incremental or absolute encoders■

Vacuum or clean room compatible

Rotary Stages■

360° or goniometer stages■

Worm or direct drive■

Mechanical or air bearing■

Incremental or absolute encoders■

Vacuum or clean room compatible

XY Stages■

Screw or direct drive■

Mechanical or air bearing■

Incremental or absolute encoders■

Optional aperture10

W W W. P I . W SIntroduction

Broad Range of Standard Axes
The PI Group has many years of experience in the development and construction of highly complex motion systems with the highest
precision classes. The experience gained over the years, mainly from customized solutions, has been transferred to the standard
products. As a result, a broad spectrum of standard positioning systems has been established, which offers many options within theindividual series such as variable travel ranges, different motors, or adaptations to different ambient conditions such as a vacuum
and clean-room environments. Today, the use of PI positioning systems is very common in robust industrial environments withhigh demands on lifetime and productivity.

Stacked Systems Configured from Standard Products■

Flexible■

Fast to adapt to custom application
plication■

Cost-efficient solution

Integrated System Solutions■

Gantries with industrial motion controllers■

Fast multi-channel photonics alignment systems

11

MOTION|POSITIONING

Technological Depth for Optimized Products
From Standard to Custom Products

Customization on all levels of integration
PI’s proprietary technological know-how and vertically integrated production are the basis for the successful development ofcustomized motion systems from scratch. All technologies can be adapted specifically to an application. Examples range from a
PIMag® voice coil drive for integration into an OEM system, to complex multi-axis positioning setups, to fully integrated, turn-key
system solutions.

Individual assembly of a stage

PI produces core components in-house for its precision positioning
systems. This applies to sensors, electronics, and motors as well as
certain milled parts with particularly low tolerances

PI’s own development of guiding technologies allows the designof individual solutions. Linear guiding technologies such as flexures
for small displacements, air bearings for extreme requirements on
travel accuracy, or magnetic levitation for the highest demands in
up to six degrees of freedom are developed in-house. Leveraging of
long-standing piezo technology at PI Ceramic, PI is able to manufacture ceramic bearings in its own facilities. For many requirements,
mechanical bearings in different precision grades from highly
qualified suppliers are used

12

W W W. P I . W SIntroduction

Systems From a Single Source
The controller technology of ACS Motion Control ensures that even complex industrial applications can be managed by one single
source. This means that PI can offer ideal solutions from one single source to meet the demands of the most diverse industries,
which all need reliable, durable technology with increasing levels of precision.

Modular multi-axis controllers from ACS for automation control are based on an internal
EtherCAT network. This modular technology allows to control stages needing a bus
voltage from 24 VDC up to 560 VDC and a peak current of 5 A up to 90 A. The ACS control
technologies are designed especially for direct drives such as voice coils and linear motors
in the best possible way enabling fast settling times, high speed stability and low jitter

OEM controllers from PI meet customers’
requirements in every aspect. They areavailable for any drive technology and canbe adapted to include special functions
such as force control

Positioning stages with PIMag® linear motor and with PIOne measuring system allow
minimum incremental motion and the highest precision such as for example, theV-551.xD linear stage. The diagram shows steps from 1 nm and the idle noise of <±0.4 nm.
In the linear motor axes, this precision can be combined with long travel ranges, highvelocities, and accelerations

Compact motion control solutions
permit the control of individual axes
with different drive technologies suchas stepper, DC or linear motors andpiezo-based drives. The modular design
allows a subsequent adaptation of
the network while using one common
control interface

13

MOTION|POSITIONING

Technological Depth for Optimized Products
From Standard to Custom Products

In-House Technological ExpertiseAll decisive technologies required for the drive or motor, the measuring system, the motion controller, and the guiding system,
are available in-house. To serve industrial applications, in-house development and the production capabilities of PIMag® magnetic
drive and PIglide air bearing technologies are essential. PI also has production capabilities for high-end mechanical parts such as
the milling of components with lowest tolerances.

0

10

20

30

40

50 mm

Commercially available torque motors offer very high torque but only limited
apertures. This customized PIMag® torque motor has a particularly large
aperture and it positions with high dynamics and stability while needing minimal
installation space. It can be integrated as a rotation stage on top of a PI hexapod

PIMag® linear motors with or without iron core
are the result of in-house development. In thisway, specific properties of the stages and axes
can be influenced directly. PI is in a position
to develop customized linear motor and voicecoil solutions not only for standard products
but also for customized OEM solutions, where
special features are needed. In most cases, theform factor of such a motor will be customized
and adapted to the customers’ needs

PIMag® voice coil drives can be designed with a particularly compact size andthey can be directly integrated into the customers’ application. The PIMag®
technology and dedicated simulation tools allow to optimize the force-to-size
ratio for a required form factor

The highly precise PIOne linear encoder, one
of PI’s own measurement systems, permits asignal period to 0.5 μm. In the controller, sine/
cosine signals are evaluated which allow fora very high position measurement accuracy ofdown to a fraction of a nanometer

14

W W W. P I . W SIntroduction

Custom Examples Picture Wall

56 motors, 16 motion controllers, and 20 tons weight make the system for Microscopy and Quality Assurance (MiQA). The unique system
integrates hexapods, rotation stages, goniometers, and a custom sample stage and will be used in a beamline for X-ray microscopy and thequalification of X-ray optics. Virtually all available PI technologies are combined here in a highly specialized solution providing the best
possible accuracy for this application, resulting in 80 nm at the tool center point over multiple stacked axes

Focusses an objective in space:
Linear stage for the “Mars 2020”
NASA mission

Coordinate measuring machines (CMM) and metrology
tools use a variety of design architectures, including
moving gantries, static gantries, cantilevered XYZ, andmany others. The most common type of CMM is composed of three orthogonal axes (X, Y, and Z) operating ina three-dimensional coordinate system. Each axis has aposition encoder that indicates the position of that axis.
The machine will read the input from the touch probe,
as directed by the operator or computer program. The
machine then utilizes the X, Y, and Z coordinates of eachof these discrete points to determine size and positionof the part being measured

15

MOTION|POSITIONING

Custom Examples Picture Wall

Complete autofocus systemwith PIMag® voice coil drive. Not
only the voice coil stage is supplied
by PI but also the alignment tools and analignment routine to warrant highest precisionassembly of the payload

The dynamics and precision of voice coil or linear motor stages isrequired in vertical direction as well. For an improved position stability
PI offers various solutions for a counter balance system which can bebased on springs, magnetic solutions and pneumatic cylinders. The
picture shows a modified V-528 standard product with PIMag® directdrive and gravity compensation for vertical applications. The compensation is done by a constant force spring and is adjusted precisely tothe customers payload

Customized parallel-kinematics stage with six degrees of freedom.
The PIMag® linear motors ensure high dynamics and precision as
required in optical alignment or fiber alignment. The solution isbased on 3 XY stages which are driven by linear motors that allow
high dynamics for the precision alignment. The SpaceFAB parallel
kinematic allows a very flat design with long strokes in x and y.
In comparison to a PI Hexapod, the footprint of the SpaceFAB isrelatively large, and the hexapod is better suited for longer verticalstrokes

16

W W W. P I . W SIntroduction

The PI Group – A Strong Partner
for Industry and ResearchOver the last four decades, PI (Physik Instrumente) has developed into the leading manufacturer of nanopositioning technology. The key element and motivation of the entrepreneurial
behavior have always remained the same: Finding the best possible solution for the customer.
PI is well known for the quality of its products and has been one of the leading players in the
global market for precision positioning technology for many years. One of the most importantbuilding blocks for this is the team spirit within the international PI family, which is based on
mutual understanding and support that goes beyond international borders and functional
restrictions.
PI is a privately owned company with healthy growth, more than 1000 employees worldwide
and a flexible, vertically integrated organization, which enables PI to fulfill almost any request
in the field of innovative precision positioning technology. The foremost priority for PI is tobe a reliable and highly qualified partner for the customer.

17

MOTION|POSITIONING

The PI Group Milestones
A Success Story

Well known for the high quality of its products, PI (Physik Instrumente) has been
one of the leading players in the global
market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM

products with piezo or motor drives formore than 40 years. In addition to four
locations in Germany, the PI Group isrepresented internationally by fifteen
sales and service subsidiaries. All of ourcustomers worldwide can rely on this.

Market introductionof PILine® ultrasonicpiezomotors

Foundation of PI Ceramicin Thuringia, Germany,
cornerstone for market
leadership in nanopositioning technology

Founding year
of PI

2001

1998

1994

1993

1992

Market introduction of capacitive
position sensors, implementationin piezo-based nanopositioning
systems

1991

1987

1970

Market introductionof six-axis parallelkinematic positioning
systems (Hexapods)

Market introductionof digital
control electronics
Newsubsidiaryin the USA

New
subsidiaryin Japan

New subsidiaries
in Great Britain
and France

18

W W W. P I . W S

Newsubsidiary
in ItalyIntroduction

Market introductionof the PICMA®
multilayer piezo
actuators

2015

2016

Market introductionof the magnetic
PIMag® direct drives

Acquisition ofmajority sharesin ACS Motion
Control

2014

Acquisitionof majority sharesin miCos GmbH,
Eschbach, Germany

Introduction
ofair bearings

2011

Market introductionof the NEXLINE®
high-performancepiezo linear drives

2002

2004

2007

Acquisitionof Nelson
Air Corp., USA

Market introductionof Q-Motion®
and PiezoMikes

Market introductionof NEXACT®
piezo linear drivesNew
subsidiaryin China

New subsidiaries
in Korea andSingapore

New subsidiaries
in Taiwan and theNetherlands

19

MOTION|POSITIONING

Expert Consulting

Time for qualified technical consultation is crucial for the success of high-tech projects

The PI Group can respond precisely to what customers want: Specific requirements can often only be satisfied by customized solutions – solutions that canbe found by unconventional and creative thinking. Together with the customers,
PI plans and realizes individual solutions for the most varied applications andintegration levels. And that means that PI’s customers can always be sure thatthey will get the best solution every time.
Customers directly benefit from:
Highly Qualified Consultancy Through Trained Specialists
Individual advice often is key to solve a complex problem. PI sales engineers
are ready to come on site with all the time necessary for a solid understandingof the topic. Or they will gladly meet at the PI head office. All PI sales engineers
have a background in natural sciences or engineering, and have up to 20 yearsof experience in optical, micro- or nanopositioning technology.

20

W W W. P I . W SInternational Support
PI subsidiaries and distributors in many
countries across the world guarantee global
support – a decisive advantage, especiallyfor globally operating customers. PI has its
own sales and service offices in all important
markets. Moreover, the company maintains
testing devices for nanometrology on threecontinents. PI Shanghai and PI USA haveadditional development and manufacturingresources that allow rapid local reaction tocustom-engineered specifications.

Introduction

Engineering Design Expertiseand Customization

Core Technologies■

In-house manufacturing of piezo
components and piezo actuators■

Magnetic direct drives: linear motors
and voice coils■

Air bearings, magnetic and flexure
guides■Comprehensive range of piezo motor
technologies■

Nanometrology sensors■

Parallel-kinematic systems for
positioning in six axes (Hexapods)■

Motion control technology■

Software

The development and customized design ofelectromagnetic direct drives that are used forhigh-resolution motion and positioning tasks
require a scientific approach to the technology.
The images show the analysis of magnetic fields
down to a magnitude of 5 μT that were used to
select the optimum position of the drive components within an application

Unique Technological Breadth
The technological diversity of the PI Group is unrivalled all over the world.
PI develops, manufactures, and qualifies all its core technologies itself. PI is
therefore not dependent on components available on the market. That puts PI
in a position to offer its customers the most advanced products for motion andpositioning tasks – without technological restriction.
Customized Solutions
With this background, PI develops positioning solutions with innovative drive
technologies for high-tech applications worldwide. PI covers the whole motion
range from finger-tip sized nanopositioners to large-scale stages with long
travel ranges, through their plethora of differ-ent drive and guiding systems.

Calculation of the magnetic flux density andcurrents for a novel voice coil drive allowing
multiple degrees of freedom

21

MOTION|POSITIONING

Production Capabilities

PI’s flexibility in serial production allows for fast adaptation of both processes and quantities

A modern production management and an integrated management
system allow PI to guarantee the high quality of its products, processes,
and services. The continual improvement of organization and processes
is an integral part of the corporate culture. KAIZEN workshops and an
active innovation management are important elements for achieving
this.
The production processes for the standard range are made flexible by
the fractal production structure and it is therefore possible to manufacture even large series with full process control. Active, system-based
requirements management makes it possible to dispense with comprehensive storage facilities.
Vertical Production Range and Production Capacity
The product spectrum ranging from the two-ton hexapod to the 10-gram
nanopositioner requires PI to have the equipment and technologies at
its disposal that allow the systems to be manufactured, assembled, andqualified.

22

W W W. P I . W S■

13,000 m² of overall production space■

5,000 m² for cleanrooms■

Air-conditioned and vibration-proof measuringconditions■

Vacuum chambers for startup and residual gas
analysis■

Measuring technology with traceable, calibrated
measuring equipment■

Monitoring of piezo actuator technology frommaterial composition to final inspection■

In-house manufacturing of positioning sensors■

Production hall with measuring technology forheavy loads■

Fractal production organization

Introduction

Vacuum Know-How

PI offers high-precision solutions for positioning in vacuum conditions to 10–10 hPa.
Positioning solutions in a vacuum follow clearly defined constraints. This applies tothe limited installation space, as well as prevention of contamination and excessive
heat input.
Selection of the optimum drive technology for the respective application and themechanical design must be matched exactly to the required load capacity andvelocity as well as the intended operating and planned duty cycles.
The handling regulations for vacuum positioning systems are just as importantt as
the design principles. Cleanrooms are available for assembling larger parts. Suitableable
packaging and the corresponding instructions for the recipient are part of shipping.
g.
Vacuum chambers are available in several sizes with vacuum levels down to 10–10 hPa,
where start-up and measurement of outgassing, but also interferometric measuring
g ofposition accuracy under real operating conditions is possible.

At PI, several vacuum
chambers are available
in various sizes

23

MOTION|POSITIONING

From 1-off to Series:
OEM Users Beneﬁt From Maximum Flexibility

PI serves both the research and industrial markets. The complete control over the design and manufacturing process provides our customers with significant competitive advantages. Optimized processes
allow PI to deliver customized products in quantities up to several 100,000 units per year at low cost andright on time. The range of OEM products offered by the PI Group varies widely, ranging from “bare”
actuators and sensors to highly integrated parallel-kinematic positioning systems. Evaluation of preproduction run samples, test procedures, production processes and quality management are all includedin the development process.
Services■

Global account management: Close proximity to the customer thanks to international presence■

Risk assessment from design to delivery■

Depending on the task: From the drive to the turnkey system■

Copy exactly policy■

Preparation of internal and external certification■

Production of series of several 10,000 units in the shortest time■

Sustainable spare parts service■

Manufacturing and testing capacities from functional samples to mass production

Standardized performance control with full documentation of individual measurement charts

24

W W W. P I . W SIntroduction

Global Service and After-Sales

On-site training is key to optimize and maximize the potential of new PI systems

Start-Up, User Training and Life Long Support

Contracted Services

PI is dedicated to supporting its customers right from the initial consultation
through to when a customer has purchased a PI system. Beyond that, PI’s services
division is committed to ensuring that every aspect of owning a PI system iscatered for.

Customers subscribing to Contractual Support Services will receive commitment fromPI to achieving agreed Service Levels. These
include responding to the customer’s firstcontact and providing remote technicalsupport, through to response times for a PI
expert to be on site, either to repair or replacea defective unit.

Global Coverage
Supported by 4 Global Service Hubs in Asia, China, Europe and USA, with field
product specialists working from these hubs, PI is able to support all technologies and customer applications via this global services team.
PI’s Standard On-Site Services■

Set up and Commissioning – On-site support to un-box, set-up andcommission the PI system■

Training Program – User training on software and programming,
through to optimization of system performance■

Maintenance Systems Health Check – Preventative maintenance toprolong the life of the motion device■

Support – Ongoing remote and on-site support to maximize system
uptime and provide maintenance for the whole life of any system

Extended Warranty
Most customer applications require PI’s
systems to be operational beyond the standard warranty period. Extending the warranty
for additional year(s), is simply extending thecustomers peace of mind and PI’s commitment that the product will not fail due to poor
workmanship or faulty materials. Shoulda customer’s system then fail due to these
conditions, PI will cover the costs to repair or
replace it.

25

MOTION|POSITIONING

Preferred Solutionsfor High-Precision Automation Tasks

Application
ExamplesMajor
Requirements

Translation
StagesZ-Stagessee p. 28 ff

see p. 126 ff

XY-Stages,
GantrySystems

Rotation &Goniometer
StagesLinearActuators

see p. 138 ff,
see p. 260 ff

see p. 162 ff

see p. 200 ff

Autofocus

High dynamics
High repeatability
Compact size
High precision

L-505
L-509
L-511
MTS-65
V-522

V-524
V-528

Automated
OpticalInspection (AOI)

Good precisionHigh dynamics

L-402
L-412
L-417
L-505

V-412
V-417

Biotechnology /Life Scienceand Microscopy

High dynamics
High repeatability
Good precision

L-402
L-505
L-509
L-511
M-403

M-404
M-413
M-414
MTS-65
V-551

Digital Printing

High dynamics

V-412
V-417
V-508

V-522
V-524
V-528

Electronics
Manufacturing

High dynamics
Constant velocity
Position stability

L-402
L-412
L-417
V-412
V-417

V-508
V-551

Flatpanel
Inspection

Best straightness
and ﬂatness
Constant velocity
High repeatability

A-110
A-121
A-123
V-412
V-417

Laser CuttingHigh precision
Long stroke
High dynamics

L-412
L-417
L-509
L-511

V-408
V-412
V-417

L-310
UPL-120

A-321
GantryL-731
L-738

Laser Marking

Compact size
High precisionHigh repeatability

HPS-170
M-110
M-122.2DD1
MTS-65
V-408

V-508
V-522
V-524
V-528

L-310
UPL-120

A-311
L-731
L-741
V-731
V-741

MachineTooling /Fast ToolingHigh dynamics
Compact size
Constant velocity

A-131

MedicalIndustry

High repeatability
Good precision
Best straightness
and ﬂatness

A-131
L-505
M-403
M-404
M-413

M-414
V-508
V-551

L-310
UPL-120

L-731
L-738
L-741

Metrology
and Testing

Best straightness
and ﬂatness
Constant velocity
High dynamics

A-110
A-121
A-123
HPS-170
M-406
M-511
M-521

M-531
V-508
V-522
V-524
V-528
V-551

L-310
UPL-120

L-731
L-738
L-741
V-731
V-738
V-741

OpticalAlignment

High repeatability
High dynamics
Compact size

A-141
L-505
L-509
L-511
M-110
M-122.2DD1
M-511
M-521
M-531

V-900KPIC

L-310
UPL-120

V-731
V-738
V-741
L-731
L-738
L-741

L-611
PRS-200
UPR-100
UPR-120
V-731
V-738
V-741

A-311
A-322
Gantry

L-310
UPL-120

26

W W W. P I . W S

L-741
V-731
V-738
V-741

L-611
PRS-200
UPR-100
UPR-120
UPR-120 Air

V-900KPIC

UPR-100
UPR-120

L-220
L-239
V-273
V-275
V-277

L-611
PRS-200
UPR-100
UPR-120
L-611
M-116
PRS-200
UPR-100
UPR-120

V-731
V-738
V-741

L-611
PRS-200
UPR-100
UPR-120
UPR-120 Air

V-900KPIC

A-62x
WT-100
L-611
WT-90
PRS-200
WT-120
UPR-100
UPR-120
UPR-120 Air
WT-85

V-273
V-275
V-277

A-62x
L-611
M-060
M-061
M-062
M-116
PRS-200
UPR-100
UPR-120

L-220
L-239
M-227
M-228
M-229
M-230
M-232
M-235
M-238

WT-85
WT-100
WT-90
WT-120Introduction

Application
ExamplesMajor
Requirements

Translation
StagesZ-Stagessee p. 28 ff

see p. 126 ff

Photonics
Probing &Packaging

Compact size
High repeatability
High dynamics

A-110
A-121
A-123
A-141
L-505
M-403
M-404
M-413
M-414

Precision Micro
Assembly

Most compact
size
Dynamic motion
High duty cycles

A-141
L-402
L-406
L-408
L-505
M-110
M-122.2DD1
M-406

SampleInspection

Best straightness
and ﬂatness
Force control

A-110
A-121
A-123
HPS-170
LS-180

M-511
M-521
M-531

Scanning

High repeatability
High dynamics
Constant velocity
Position stability

A-110
A-121
A-123
A-131
A-141
V-408
V-412

V-417
V-508
V-522
V-524
V-528
V-551

Scientiﬁc
Instrumentation

Versatility
Networkable
solutionsCompact size

HPS-170
L-402
L-406
L-408
L-505
L-509
L-511
LS-180M-110
M-122.2DD1

M-406
M-511
M-521
M-531
MTS-65
V-408
V-522
V-524
V-528
VT-80

Semiconductor

High dynamics
High precision
Position stability
Constant velocity

HPS-170
LS-180
V-522
V-524
V-528
V-551

M-511
M-521
M-531
V-408
V-522
V-524
V-528
V-551

XY-Stages,
GantrySystems

Rotation &Goniometer
StagesLinearActuators

see p. 138 ff,
see p. 260 ff

see p. 162 ff

see p. 200 ff

L-306
L-310
M-501
UPL-120

L-731
L-738
L-741
V-731
V-738
V-741

L-611
WT-100
PRS-200 WT-90
WT-85
WT-120

L-310
UPL-120

L-738
V-738

DT-34
DT-80
L-611
M-060
M-061
M-062
M-116
PRS-200

RS-40
UPR-100
UPR-120
UPR-120 Air
WT-85
WT-100
WT-90
WT-120

L-220
L-239
V-273
V-275
V-277
V-900KPIC

L-310
UPL-120

GantryA-62x
L-611
PRS-200
UPR-100
UPR-120

UPR-120 Air
WT-85
WT-100
WT-90
WT-120

V-273
V-275
V-277
V-900KPIC

A-311
A-322
V-731
V-738
V-741

A-62x

L-306
L-310
M-501
UPL-120

A-311
A-322
Gantry
L-731
L-738
L-741
V-731
V-738
V-741

A-62x
DT-34
DT-80
L-611
M-060
M-061
M-062
M-116
PRS-200
RS-40

UPR-100
UPR-120
UPR-120 Air

L-220
L-239
M-227
M-228
M-229
M-230
M-232
M-235
M-238

L-306
L-310
M-501
UPL-120

A-311
A-322
Gantry
L-731
L-738
L-741
V-731
V-738
V-741

L-611
PRS-200
UPR-100
UPR-120
UPR-120 Air

L-220
L-239

27

MOTION|POSITIONING

Translation Stages

28

W W W. P I . W STranslation Stages

Precision Linear Stages ............................................................................................................................................................

30

L-402 Miniature Linear Stage ........................................................................................
M-110 / M-111 / M-112 Compact Linear Stage ...............................................................
L-406 Compact Linear Stage ..........................................................................................
L-408 Compact Linear Stage ..........................................................................................
V-408 PIMag® Linear Stage ............................................................................................
VT-80 Linear Stage ........................................................................................................
M-406 Precision Linear Stage ........................................................................................
M-403 Precision Translation Stage ................................................................................
M-404 Precision Translation Stage ................................................................................
M-413 High-Load Precision Stage .................................................................................
M-414 High-Load Precision Stage .................................................................................
L-412 High-Load Linear Stage .......................................................................................
V-412 PIMag® High-Load Linear Stage ...........................................................................
L-417 High-Load Linear Stage .......................................................................................
V-417 PIMag® High-Load Linear Stage ...........................................................................
LS-180 Linear Stage for Heavy Loads ............................................................................

30
32
34
36
38
40
42
44
46
48
50
52
56
60
64
68

High-Precision Linear Stages ...................................................................................................................................................

72

L-505 Compact Linear Stage ..........................................................................................
V-522 / V-524 / V-528 High-Dynamics PIMag® Linear Stage ...........................................
V-508 PIMag® Precision Linear Stage ............................................................................
M-122.2DD1 Micro Translation Stage ............................................................................
MTS-65 Miniature Linear Stage .....................................................................................
M-105 / M-106 Microtranslation Stage ..........................................................................
L-509 Precision Linear Stage .........................................................................................
L-511 High-Precision Linear Stage .................................................................................
V-551 PIMag® Precision Linear Stage ............................................................................
M-511 / M-521 / M-531 High-Precision Linear Stage ......................................................
HPS-170 High-Precision Linear Stage for Heavy Loads .................................................

72
76
78
80
82
84
86
94
102
106
108

PIglide Linear Air Bearing Stages ............................................................................................................................................

112

A-141 PIglide MB Miniature Linear Stage with Air Bearings .........................................
A-121 PIglide AT1 Linear Stage with Air Bearings .........................................................
A-123 PIglide AT3 Linear Stage with Air Bearings .........................................................
A-110 PIglide LC Linear Stage with Air Bearings ...........................................................
A-131 PIglide VC Voice Coil Linear Stage with Air Bearings ..........................................

112
114
116
120
124

Z Stages ...................................................................................................................................................................................

126

L-306 Compact Precision Z Stage ..................................................................................
L-310 Precision Z Stage .................................................................................................
M-501 Precision Z Stage ................................................................................................
UPL-120 Precision Z Stage ............................................................................................

126
128
132
134

29

MOTION|POSITIONING

L-402 Miniature Linear Stage
With DC or Stepper Motor■

Travel range 13 mm■

Unidirectional repeatability to 0.5 μmm■

Velocity to 5 mm/s■

Load capacity to 1 kg■

Integrated reference point and limitt switch■

Crossed roller guides, anti-creep■

Directly mountable XY and XYZ combinations
mbinations

L-402.10DD, dimensions in mm

Applications>> Incremental Encoder■ Automation>> Vacuum-Compatible Versions■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

30

W W W. P I . W S

L-402.10DD

L-402.10SD

Unit

Tolerance

Travel range

13

13

mm

Integrated sensor

Rotary encoder–

Design resolution

0.122

2.5 (full step)

Sensor resolution rotary encoder

4096

–

Cts./rev.

Minimum incremental motion

1

0.5

μm

typ.

Unidirectional repeatability

1

0.5

μm

typ.

Translation Stages

Motion and positioningμm

Bidirectional repeatability

±5

±5

μm

typ.

Pitch

±175

±175

μrad

typ.

Yaw

±125

±125

μrad

typ.

Straightness

±3

±3

μm

typ.

Flatness

±3

±3

μm

typ.

Velocity

5

5

mm/s

max.

Reference and limit switches

Optical

OpticalDrive screw

Leadscrew

Leadscrew

Drive screw pitch

0.5

0.5

mm

Load capacity

10

10

N

Push/pull force

10

10

N

max.

Holding force

10

10

N

max.

Mechanical properties

max.

Permissible lateral force

5

5

N

max.

Permissible torque in θX, θY, θZ

1

1

N·m

max.

Drive properties
Motor typeDC motor

2-phase stepper motor

Step resolution–

200

Operating voltage, nominal

24

24

V

nom.

Operating voltage, max.

48

48

V

max.

Operating temperature range

5 to 40

5 to 40°C

Material

Aluminum, anodized,
stainless steel

Aluminum, anodized,
stainless steel

Mass

0.16

0.15

kg

Cable length

0.135

0.25

m

Connector

HD Sub-D 26 (m)HD Sub-D 26 (m)Recommended controllers

C-863 (single axis)

C-663.12 (single axis)

Full steps/rev.

Miscellaneous±10 mmAll cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m.
Motion controllers for >1 axis are available on www.pi.ws. Ask about custom designs!

L-402.10SD, dimensions
imensions in mm

31

MOTION|POSITIONING

M-110 / M-111 / M-112 Compact Linear Stage
XY(Z) Combinations with a Variety of Drives and Travel Ranges■

Very compact due to folded driveve■Stepper motors and closed-loop
p DC motors■

Sliding thread and ball screws■

Noncontact reference and limit switches■

XY setups can be mounted directly
ectly

■

Larger quantities available quicklykly

M-11x.xxx1, dimensions in mm

Applications

A

B

M-110.1DG1
M-110.2DG1
M-110.12S1
M-110.22S1

60

25

M-111.1DG1
M-111.2DG1
M-111.12S1
M-111.22S1

70

30

M-112.1DG1
M-112.2DG1
M-112.12S1
M-112.22S1

80

35>> Incremental Encoder■ Automation■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

32

W W W. P I . W S

M-110.12S1
M-111.12S1
M-112.12S1

M-110.2DG1
M-111.2DG1
M-112.2DG1

M-110.22S1
M-111.22S1
M-112.22S1

Unit

Travel range

5 / 15 / 25

5 / 15 / 25

5 / 15 / 25

5 / 15 / 25mm

Integrated sensor

Rotary encoder–

Rotary encoder–

Tolerance

Motion andpositioning

Sensor resolution

2048

Design resolution (1)0.00690.000290.00862048
0.00036μm

Cts./rev.

Min. incremental
motion (1)

0.05

0.02

0.2

0.2

μm

typ.

Backlash

2

2

4

4

μm

typ.

Unidirectional
repeatability

0.25

0.25

0.15

0.15

μm

typ.

Pitch / yaw±50 / ±150 / ±150

±50 / ±150 / ±150

±50 / ±150 / ±150

±50 / ±150 / ±150μrad

Velocity

1 / 1.5 / 1.5

1/1/1

1.5 / 2 / 2

1/1/1

mm/s

max.

Mechanicalproperties
Drive screw type

Leadscrew

Leadscrew

Ball screw

Ball screw

Drive screw pitch

0.4

0.4

0.5

0.5

Gear ratio

256:9

256:9

256:9

256:9

Step resolution

–

24

–

24

Full steps/
rev.

mm

Load capacity

30 / 30 / 20

30 / 30 / 20

30 / 30 / 20

30 / 30 / 20

N

Push/pull force

10

10

10

10

N

max.
max.

Holding force

10

10

10

10

N

max.

Permissible lateralforce

15 / 10 / 10

15 / 10 / 10

15 / 10 / 10

15 / 10 / 10

N

max.

DC gear motor

2-phasestepper motor

DC gear motor

2-phasestepper motor

Drive properties
Motor typeOperating voltage

0 to ±12–0 to ±12–

V

Motor power

0.52 / 1.75 / 1.75

1.5

0.52 / 1.75 / 1.75

1.5

W

Nominal current
per phase

160 / 320 / 320

250

160 / 320 / 320

250

mA

Reference and limit
switches

Hall effect

Hall effect

Hall effect

Hall effectOperatingtemperature range–20 to 65–20 to 65–20 to 65–20 to 65

Material

Al (blackanodized)

Al (blackanodized)

Al (blackanodized)

Al (blackanodized)

Miscellaneous
°C

Mass

0.25 / 0.27 / 0.3

0.25 / 0.27 / 0.3

0.25 / 0.27 / 0.3

0.25 / 0.27 / 0.3

kg

Cable length

0.5

0.5

0.5

0.5

m

Connection

HD Sub-D 26 (m)HD Sub-D 26 (m)HD Sub-D 26 (m)HD Sub-D 26 (m)Recommended
controllers

C-863
C-884

C-663.12

C-863
C-884

C-663.12(1) With recommended controller.
Ask about custom designs!

33

MOTION|POSITIONINGTranslation Stages

M-110.1DG1
M-111.1DG1
M-112.1DG1

L-406 Compact Linear StageFor Loads up to 10 kg■

Travel ranges from 26 mm to 102 mm(1” to 4”)■

Stepper motor or DC servo motor withand without gearhead■

Direction-sensing reference point switch■

Integrated optical limit switches

L-406, dimensions in mm

Detail drawing of the L-406 motion platform,
dimensions in mm

L-406.10SD00
L-406.20SD00
L-406.40SD00

A

B

C

D

E

55,5
68,5
93,5

–
100
150

82
82
82

132
158
208

62,5
75,5
75,5

L-406.10DG10
L-406.20DG10
L-406.40DG10

A

B

C

D

E

55,5
68,5
93,5

–
100
150

73,5
73,5
73,5

132
158
208

62,5
75,5
75,5

Applications>> Incremental Encoder■ Automation>> Vacuum-Compatible Versions■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

34

W W W. P I . W S

Unit

Tolerance

L-406.10DG10
L-406.20DG10
L-406.40DG10

L-406.10SD00
L-406.20SD00
L-406.40SD00

Linear stage withDC motor and rotary
encoder

Linear stage with DCgear motor and rotary
encoder

Linear stage withstepper motor

Travel range

26 / 52 / 102

26 / 52 / 102

26 / 52 / 102

Integrated sensor

Rotary encoder

Rotary encoder–

Sensor resolution rotary
encoder

4096

2048

–

Cts./rev.

Design resolution

0.244

0.01655 (full step)μm

Minimum incremental
motion

0.5

0.2

0.2

μm

typ.

Unidirectional
repeatability

0.5

0.5

0.5

μm

typ.

Bidirectional
repeatability

±5

±5

±5

μm

typ.

Pitch / yaw±70 / ±90 / ±100

±70 / ±90 / ±100

±70 / ±90 / ±100

μrad

typ.

Straightness / ﬂatness±2 / ±4 / ±6

±2 / ±4 / ±6

±2 / ±4 / ±6

μm

typ.

Max. velocity

20

3

20

mm/s

max.

Reference and limit
switches

Optical

Optical

OpticalRecirculating ballbearing

Recirculating ballbearing

Recirculating ballbearing

Translation Stages

L-406.10DD10
L-406.20DD10
L-406.40DD10

Motion and positioningmm

Mechanical properties
Guide type
Drive screw type

Leadscrew

Leadscrew

Leadscrew

Drive screw pitch

1

1

1

Gear ratio–

2401:81–

Load capacity

100

100

100

N

max.

Push/pull force

15

100

50

N

max.

Permissible lateral force

50

50

50

N

max.

Holding force

15

100

50

N

max.

Permissible torquein θX, θY, θZ

7.5

7.5

7.5

N·m

max.

mm

Drive properties
Motor typeDC motor

DC gear motor

2-phase stepper motor

Step resolution

–

–

200

Full steps/
rev.

Operating voltage,
nominal

24

24

24

V

Operating voltage, max.

48

48

48

5 to 40

5 to 40

5 to 40nom.
max.

Miscellaneous
Operating temperature
range

°C

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Mass

0.8 / 0.9 / 1.0

0.8 / 0.9 / 1.0

0.8 / 0.9 / 1.0

kg

±5 %

Moved mass

0.16

0.16

0.16

kg

±5 %

Connector

HD Sub-D 26 (m)HD Sub-D 26 (m)HD Sub-D 26 (m)Recommended
controllers

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular controller

All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

35

MOTION|POSITIONING

L-408 Compact Linear StageFor Loads up to 200 N■

Travel range 25 mm■

Stepper motor, DC or DC gear mo
motor

■

Precision sliding-thread spindle■

Crossed roller guides for high loa
load capacity and precision,
anti-creep■

Integrated optical limit switches■

Optical reference point switch with direction sensing

L-408.503232 and L-408.504232, dimensions in mm

Applications>> Incremental Encoder■ Automation■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

36

W W W. P I . W S

L-408.504232

L-408.503232

L-408.501200

Unit

Tolerance

Travel range

25

25

25

mm

max.

Integrated sensor

Rotary encoder

Rotary encoder–

Sensor resolution

2048

4096

–

Cts./rev.

Design resolution

0.008

0.122

2.5

μm

Minimum incremental
motion

0.1

0.5

0.1

μm

typ.

Unidirectional
repeatability

0.5

0.5

0.5

μm

typ.

Bidirectional
repeatability

±5

±5

±5

μm

typ.

Pitch / yaw

±100

±100

±100

μrad

typ.

Straightness / ﬂatness

±2

±2

±2

μm

typ.

Max. velocity

1.1

10

10

mm/s

max.

Reference and limit
switches

Hall effect

Hall effect

Hall effect

Reference point switch
repeatability

1

1

1

μm

typ.

Guide type

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

Drive screw

Leadscrew

Leadscrew

Leadscrew

Drive screw pitch

0.5

0.5

0.5

Gear ratio

2401:81––Translation Stages

Motion and positioning

Mechanical propertiesmm

Push/pull force

50

50

40

N

max.

Holding force

50

50

40

N

max.
max.

Load capacity

200

200

200

N

Permissible lateral force

100

100

100

N

max.

Permissible torque in θX

15

15

15

N·m

max.

Permissible torquein θY, θZ

10

10

10

N·m

max.

Motor typeDC gear motor

DC motor

2-phase stepper motor

Operating voltage,
nominal

24

24

24

V

nom.
max.

Drive properties

Operating voltage, max.

48

48

48

V

Step resolution

–

–

200

Full steps/
rev.

Operating temperature
range

5 to 40

5 to 40

5 to 40°C

Material

Aluminum blackanodized, steel

Aluminum blackanodized, steel

Aluminum blackanodized, steel

Mass

0.87

0.87

0.98

kg

±5 %

Moved mass

0.155

0.155

0.155

kg

±5 %

Connector

HD Sub-D 26

HD Sub-D 26

HD Sub-D 26

Recommended
controllers

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular controller

Miscellaneous

All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

37

MOTION|POSITIONING

V-408 PIMag® Linear Stage
Inexpensive, with Linear Motor■

Iron core 3-phase linear motor■

Crossed roller bearings for high load
capacity, anti-creep■

Minimum incremental motion 20 nm■

Bidirectional repeatability ±0.1 μm■

Compact design■

Low price

V-408, dimensions in mmtravel range
A
B
C
D
E
F

Applications

V-408.132020

V-408.232020

25
80
70
n/a
8
4
25

50
105
95
70
12
6
50

>> Linear Encoder>> PIMag® Magnetic Linear Motors■ Automation■ Photonics■ Laser Cutting■ Scanning■ Laser Marking■ Scientific Instrumentation

Technology Glossary ...................... page 290

38

W W W. P I . W SUnit

Travel range

V-408.132020: 25
V-408.232020: 50

mm

Integrated Sensor

Incremental linear encoder

Translation Stages

V-408

Tolerance

Motion and positioning

Sensor signal period

80μm

Sensor resolution

10 (1)nm

typ.

Min. incremental motion

20

nm

typ.

Bidirectional repeatability

±0.1

μm

typ.

Pitch / Yaw

±150

μrad

typ.

Straightness / ﬂatness

±4

μm

typ.

Velocity

V-408.132020: 1.2
V-408.232020: 1.5

m/s

max.

Load capacity in Z

80

N

max.

Permissible lateral force

80

N

max.

Permissible torque in θX

2.3

N·m

max.

Permissible torque in θY, θZ

1.3

N·m

max.

Moved mass

V-408.132020: 0.23
V-408.232020: 0.3

kg

Mass without cable

V-408.132020: 0.5
V-408.232020: 0.65

kg

Overall mass

V-408.132020: 0.79
V-408.232020: 0.94

kg

Guide type

Crossed roller guide with anti-creep system

Mechanical properties

Drive properties
Drive type

PIMag® Linear motor, iron core, 3-phase

Intermediate circuit voltage

48

V DC

max.

Peak force

14

N

typ.

Nominal force

5

N

typ.

Peak current, effective

3.2

A

typ.

Nominal current, effective

1.1

A

typ.

Force constant, effective

4.60

N/A

typ.

Resistance phase-phase

1.23

Ω

typ.

Inductance phase-phase

0.97

mH

typ.

Back EMF phase-phase

2.81

V·s/m

max.

Pole pitch N-N

18mm

Operating temperature range

10 to 50°C

Humidity

20 – 90 % rel., not condensing

Material

Aluminum, black anodized

Motor connector

HD Sub-D 26 (m)Miscellaneous

Sensor connection

Sub-D 15 (f)Cable length2

Recommended controllers

C-891 (single axis)
C-885 with C-891.10C885 (up to 20 axes)
ACS modular controllerm(1) interpolated
Ask about custom designs!

39

MOTION|POSITIONING

VT-80 Linear Stage
Basic Version for Universal Use■

Travel ranges from 25 to 300 mm (1 to 12”)■

Low profile design■

Max. velocity to 20 mm/s■

Load capacity to 5 kg■Compact XY combinations

VT-80, DC motor, dimensions in mm

VT-80, dimensions in mm

VT-80, stepper motor, dimensions in mmction of the axes andDirection
ues for linear stages
torques

25 mm
50 mm
75 mm
100 mm
150 mm
200 mm
300 mmApplications

A (mm)B (mm)C (mm)

52.5
65
77.5
90
115
140
190

100
125
150
175
225
275
375

70
95
120
145
195
245
345

>> Incremental Encoder■ Automation■ Scientific Instrumentation

Technology Glossary ...................... page 290

40

W W W. P I . W S

623092x0

Unit

Tolerance

Linear stage with DC motor androtary encoder

Linear stage with stepper motor

Travel range

25 / 50 / 75 / 100 / 150 / 200 / 300

25 / 50 / 75 / 100 / 150 / 200 / 300

Integrated sensor

Rotary encoder, incremental–

Design resolution

0.5

5 (full step)μm

Sensor resolution

2000

–

Cts./rev.

Minimum incremental motion

0.5

0.2

μm

typ.

Unidirectional repeatability

0.8

0.4

μm

typ.

Motion and positioningmm

Bidirectional repeatability

±10

±10

μm

typ.

Pitch

±100 / ±110 / ±120 / ±130 / ±150 /±170 / ±210±100 / ±110 / ±120 / ±130 / ±150 /±170 / ±210

μrad

typ.

Yaw

±150

±150

μrad

typ.

Straightness / ﬂatness±8 / ±10 / ±11 / ±12 / ±14 / ±20 /±35±8 / ±10 / ±11 / ±12 / ±14 / ±20 /±35μmMax. velocity

20

20

mm/s

Guide type

Recirculating ball bearing

Recirculating ball bearing

Drive screw type

Leadscrew

Leadscrew

Drive screw pitch

1

1

mm

Load capacity

50

50

N

max.

Push/pull force

40

40

N

max.

Permissible lateral force

30

30

N

max.

Holding force, power off

40

40

N

max.

Permissible torque Mx in X

2.5

2.5

N·m

max.

Permissible torque My in Y

5

5

N·m

max.

Permissible torque Mz in Z

2.5

2.5

N·m

max.

Mechanical properties

Drive properties
Motor typeDC motor

2-phase stepper motor

Operating voltage

24

24

V

nom.

Operating voltage

48

48

V

max.

Step resolution–

200

Full steps/
rev.

Limit switches

2 × mechanical2 × mechanical

Operating temperature range

5 to 40

5 to 40

Material

Aluminum, black anodized

Aluminum, black anodized

Mass

0.55 / 0.65 / 0.7 / 0.75 / 0.85 /0.95 / 1.25

0.55 / 0.65 / 0.7 / 0.75 / 0.85 /0.95 / 1.25

kg

±5 %

Moved mass

0.13 / 0.14 / 0.14 / 0.15 / 0.15 /0.15 / 0.15

0.16 / 0.16 / 0.17 / 0.17 / 0.17 /0.18 / 0.18

kg

±5 %

Connector

HD Sub-D 15 (m)HD Sub-D 15 (m)Recommended controllers

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885(to 40 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885(up to 20 axes)
ACS modular controller

Miscellaneous°C

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

41

MOTION|POSITIONINGTranslation Stages

623091x0

M-406 Precision Linear Stage
High Travel Accuracy and Inexpensive■

Travel ranges to 150 mm■

Crossed roller guides,
ides, anti-creep■

DC servo motor drive
rive■

Direction-sensing reference point switch

M-406, dimensions in mm

M-406.2xx
M-406.4xx
M-406.6xx

A

L

98,5
123,5
148,5

207
257
307

Applications>> ActiveDrive■ Metrology / Testing>> Incremental Encoder■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

42

W W W. P I . W S

M-406.2PD
M-406.4PD
M-406.6PD

Unit

Travel range

50 / 100 / 150

50 / 100 / 150

mm

Integrated sensor

Rotary encoder

Rotary encoder

Sensor resolution

2000

4000

Cts./rev.

Design resolution

0.00850.125μm

Minimum incremental motion

0.1

0.25

μm

Unidirectional repeatability

0.2

0.2

μm

Tolerance

Motion and positioning

Backlash22μm

Crosstalk, angular error±25 / ±50 / ±75±25 / ±50 / ±75μradVelocity

1

15

mm/s

Drive screw pitch

0.5

0.5

mm

Gear ratio

29.6:1–max.

Mechanical properties

Load capacity

200

200

N

max.

Push/pull force

50 / 50

50 / 50N

max.

Lateral force

150

150

N

max.

Drive properties
Motor typeDC gear motor

DC motor with PWM control

Operating voltage

0 to ±1224VMotor power

3

30

W

Reference and limit switches

Hall effect

Hall effectOperating temperature range–20 to 65–20 to 65

Material

Aluminum, steel

Aluminum, steel

Mass

2.1 / 2.4 / 2.8

2.1 / 2.4 / 2.8

Connector

Sub-D 15, incl. 3 m cable

Sub-D 15, incl. 3 m cable

Recommended controllers

C-863
C-884

C-863
C-884

Miscellaneous°Ckg

Ask about custom designs!

43

MOTION|POSITIONINGTranslation Stages

M-406.2DG
M-406.4DG
M-406.6DG

M-403 Precision Translation Stage
Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants■

Inexpensive cost-optimized design for
precise positioning■

Travel ranges from 25 mm to 200 mm■

Resolution to 0.018 μm■

Min. incremental motion to 0.2 μm■

Preloaded precision leadscrew■

M-413 and M-414 versions for higher
load requirements

M-403 and M-404, dimensions in mm

A
B
C
D
E
H

M-403.1xx
M-404.1xx

M-403.2xx
M-404.2xx

M-403.4x
M-404.4xx

M-403.6xx
M-404.6xx

M-403.8xx
M-404.8xx

141
25
20,5
16,5 (±12,5)
10
X

166
37,5
33
29 (±25)
22,5
X

216
62,5
58
54 (±50)
47,5
X

266
87,5
83
79 (±75)
72,5
50

316
112,5
108
104 (±100)
97,5
75

F
G

M-403.xPD

M-403.xDG

114
59,5

119,5
56

Applications

FG

M-404.xPD

M-403.xDG

114
59,5

128,5
56

>> ActiveDrive■ Automation■ Medical Industry■ Biotechnology■ Photonics>> Incremental Encoder

Technology Glossary ...................... page 290

44

W W W. P I . W STranslation Stages

Unit

Tolerance

M-403.1PD
M-403.2PD
M-403.4PD
M-403.6PD
M-403.8PD

M-403.1DG
M-403.2DG
M-403.4DG
M-403.6DG
M-403.8DG

with ActiveDrive

with DC gear motor

Travel range

25 / 50 / 100 / 150 / 200

25 / 50 / 100 / 150 / 200

Integrated sensor

Rotary encoder

Rotary encoder

Sensor resolution

4000

2000

Design resolution

0.25

0.018

μm

typ.

Minimum incremental motion

0.25

0.2

μm

typ.

Backlash

6

10

μm

typ.

Unidirectional repeatability

1

1

μm

typ.

Pitch

200

200

μrad

typ. over
100 mm

Yaw

200

200

μrad

typ. over
100 mmVelocity

10 (1)

2.5

mm/s

max.

Reference point switch
repeatability

1

1

μm

typ.

Drive screw pitch

1

1

mm

Gear ratio–

2304:81

Motion and positioningmm
Cts./rev.

Mechanical properties

Stiffness in motion direction

3.5

3.5

N/μm

±20 %

Load capacity (2)

200

200

N

max.

Push/pull force

50

50

N

max.

Lateral force

100

100

N

max.

Drive typeDC motor, ActiveDrive

DC gear motor

Operating voltage

24

0 to ±12

V

Motor power

26

2.5

W
°C

Drive properties

nominalMiscellaneous
Operating temperature range–20 to 65–20 to 65

Material

Al (black anodized)

Al (black anodized)

Mass

1.7 / 1.8 / 2.1 / 2.2 / 2.5

1.7 / 1.8 / 2.1 / 2.2 / 2.5

Connector

Sub-D 15 (m), incl. 3 m cable

Sub-D 15 (m), incl. 3 m cable

Recommended controllers /drivers

C-863
C-884

C-863
C-884

kg

±5 %

(1) Recommended velocity(2) Load capacity: Max. possible normal load capacity, centered, vertical load (linear stage horizontal).

45

MOTION|POSITIONING

M-404 Precision Translation Stage
Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants■

Inexpensive cost-optimized design for
precise positioning■

Travel ranges from 25 mm to 200 mm■

Resolution to 0.012 μm■

Min. incremental motion to 0.1 μm■

Ball screw for high velocities and numberof cycles■

M-413 and M-414 versions for higher loadrequirements

M-403 and M-404, dimensions in mm

A
B
C
D
E
H

M-403.1xx
M-404.1xx

M-403.2xx
M-404.2xx

M-403.4x
M-404.4xx

M-403.6xx
M-404.6xx

M-403.8xx
M-404.8xx

141
25
20,5
16,5 (±12,5)
10
X

166
37,5
33
29 (±25)
22,5
X

216
62,5
58
54 (±50)
47,5
X

266
87,5
83
79 (±75)
72,5
50

316
112,5
108
104 (±100)
97,5
75

F
G

M-403.xPD

M-403.xDG

114
59,5

119,5
56

Applications

FG

M-404.xPD

M-403.xDG

114
59,5

128,5
56

>> ActiveDrive■ Automation■ Medical Industry■ Biotechnology■ Photonics>> Incremental Encoder

Technology Glossary ...................... page 290

46

W W W. P I . W STranslation Stages

Unit

Tolerance

M-404.1PD
M-404.2PD
M-404.4PD
M-404.6PD
M-404.8PD

M-404.1DG
M-404.2DG
M-404.4DG
M-404.6DG
M-404.8DG

with ActiveDrive

with DC gear motor

Travel range

25 / 50 / 100 / 150 / 200

25 / 50 / 100 / 150 / 200

Integrated sensor

Rotary encoder

Rotary encoder

Sensor resolution

4000

2000

Design resolution

0.25

0.012

μm

typ.

Minimum incremental motion

0.25

0.1

μm

typ.

Backlash

0.5

2

μm

typ.

Unidirectional repeatability

0.5

1

μm

typ.

Pitch

75

75

μrad

typ. over
100 mm

Yaw

75

75

μrad

typ. over
100 mmVelocity

50

1.5

mm/s

max.

Reference point switch
repeatability

1

1

μm

typ.

Drive screw pitch

1

1

mm

Gear ratio–

2704:63

Motor resolution––

Stiffness in motion direction

3

3

N/μm

±20 %

Load capacity (1)

200

200

N

max.

Push/pull force

50

50

N

max.

Lateral force

100

100

N

max.

Drive typeDC motor, ActiveDrive

DC gear motor

Operating voltage

24

0 to ±12

V

Motor power

26

2.5

W

nominalkg±5 %Motion and positioningmm
Cts./rev.

Mechanical properties

steps/rev.

Drive properties

Miscellaneous
Operating temperature range–20 to 65 °C–20 to 65 °C

Material

Al (black anodized)

Al (black anodized)

Mass

1.8 / 1.9 /2.2 / 2.3 /2.6

1.8 / 1.9 /2.2 / 2.3 /2.6

Connector

Sub-D 15 (m), incl. 3 m cable

Sub-D 15 (m), incl. 3 m cable

Recommended controllers /drivers

C-863
C-884

C-863
C-884

(1) Max. possible normal load capacity, centered, vertical load (linear stage horizontal).

47

MOTION|POSITIONING

M-413 High-Load Precision Stage
Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants for High Loads■

Very inexpensive, robust models■

Flexible modular system M-403,
M-404, M-413, M-414■

Travel ranges from 100 to 300 mm■

Resolution to 0.018 μm■

Preloaded precision leadscrew■

Min. incremental motion 0.2 μm

M-413 and M-414, dimensions in mm

A
B
C
D
E
H

M-413/414.1xx

M-413/414.2xx

M-413/414.3xx

255
65
59,5
54 (±50)
40
X

355
115
109,5
104 (±100)
90
X

455
165
159,5
154 (±150)
140
100

F
G

Applications

M-413/414.xPD

M-413.xDG

M-414.xDG

120
59,5

122
56

133
59,5

>> ActiveDrive■ Automation■ Medical Industry■ Biotechnology■ Photonics>> Incremental Encoder

Technology Glossary ...................... page 290

48

W W W. P I . W STranslation Stages

Unit

Tolerance

M-413.1PD
M-413.2PD
M-413.3PD

M-413.1DG
M-413.2DG
M-413.3DG

with ActiveDrive

with DC gear motor

Travel range

100 / 200 / 300

100 / 200 / 300

Integrated sensor

Rotary encoder

Rotary encoder

Sensor resolution

4000

2000

Design resolution

0.25

0.018

μm

typ.

Minimum incremental motion

0.25

0.2

μm

typ.

Backlash

6

10

μm

typ.

Unidirectional repeatability

1

1

μm

typ.

Pitch / yaw (1)

300

300

μrad

typ. over
100 mmVelocity

10 (2)

2.5

mm/s

max.

Reference point switch
repeatability

1

1

μm

typ.

Drive screw pitch

1

1

mm

Gear ratio–

2304:81

Stiffness in motion direction

3.5

3.5

N/μm

±20 %

Load capacity

500

500

N

max.

Push/pull force

50

50

N

max.

Lateral force

200

200

N

max.

Drive typeDC motor, ActiveDrive

DC gear motor

Operating voltage

24

0 to ±12

V

Motor power

70

3.6

W
°C

Motion and positioningmm
Cts./rev.

Mechanical properties

Drive properties

nominalMiscellaneous
Operating temperature range–20 to 65–20 to 65

Material

Al (black anodized)

Al (black anodized)

Mass

4.4 / 5.4 / 6.6

4.2 / 5.2 / 6.4

Connector

Sub-D 15 (m), incl. 3 m cable

Sub-D 15 (m), incl. 3 m cable

Recommended controllers /drivers

C-863
C-884

C-863
C-884

kg

±5 %

(1) This value applies to each 100 mm respectively for travel ranges greater than 100 mm.
(2) Recommended velocity

49

MOTION|POSITIONING

M-414 High-Load Precision Stage
Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants for High Loads■

Use of precision components■

Flexible modular system M-403, M-404,
M-413, M-414■

Travel ranges from 100 mm to 300 mm■

Resolution to 0.023 μm■

Ball screw for high velocities and numberof cycles■

Min. incremental motion 0.1 μm

M-413 and M-414, dimensions in mm

A
B
C
D
E
H

M-413/414.1xx

M-413/414.2xx

M-413/414.3xx

255
65
59,5
54 (±50)
40
X

355
115
109,5
104 (±100)
90
X

455
165
159,5
154 (±150)
140
100

F
G

Applications

M-413/414.xPD

M-413.xDG

M-414.xDG

120
59,5

122
56

133
59,5

>> ActiveDrive■ Automation■ Medical Industry■ Biotechnology■ Photonics>> Incremental Encoder

Technology Glossary ...................... page 290

50

W W W. P I . W STranslation Stages

Unit

Tolerance

M-414.1PD
M-414.2PD
M-414.3PD

M-414.1DG
M-414.2DG
M-414.3DG

with ActiveDrive

with DC gear motor

Travel range

100 / 200 / 300

100 / 200 / 300

Integrated sensor

Rotary encoder

Rotary encoder

Sensor resolution

4000

2000

Cts./rev.

Design resolution

0.5

0.023

μm

Minimum incremental motion

0.5

0.1

μm

typ.

Backlash

0.5

4

μm

typ.

Motion and positioning
mm

typ.

Unidirectional repeatability

0.5

1

μm

typ.

Pitch / yaw (1)

100

100

μrad

typ. over
100 mmVelocity

100

3

mm/s

max.

Reference point switch
repeatability

1

1

μm

typ.

Drive screw pitch

2

2

mm

Gear ratio–

42.9206

Stiffness in motion direction

8

8

N/μm

±20 %

Load capacity

500

500

N

max.

Push/pull force

100

50

N

max.

Lateral force

200

200

N

max.

Drive typeDC motor, ActiveDrive

DC gear motor

Operating voltage

24

0 to ±12

V

Motor power

70

3.6

W
°C

Mechanical properties

Drive properties

nominalMiscellaneous
Operating temperature range–20 to 65–20 to 65

Material

Al (black anodized)

Al (black anodized)

Mass

4.4 / 5.4 / 6.6

4.2 / 5.2 / 6.4

Connector

Sub-D 15 (m), incl. 3 m cable

Sub-D 15 (m), incl. 3 m cable

Recommended controllers /drivers

C-863
C-884

C-863
C-884

kg

±5 %

(1) This value applies to each 100 mm respectively for travel ranges greater than 100 mm.

51

MOTION|POSITIONING

L-412 High-Load Linear Stage
High Performance and Cost Efficiency, Drive Screw■

Width 116 mm■

Travel range to 610 mm■

Precision ball screw■

Incremental or absolute rotary encoder options■

Additional linear encoder options■

Precision recirculating ball bearings, load capacity to 400 N■

Covering strip on the side for protection against debris

Reference-class linear stage

Options

PI has extended its product portfolio for industrial solutions with a new familyof precision linear ball-screw stages. Various versions are availablewith highperformance synchronous servo motors, heavy-duty recirculating ball bearings,
and precision rotary and linear encoders. An optional holding brake allows use
as a vertical axis. The stage’s internal ball screw can be relubricated externallythus removing the need to disassemble the stage. This provides a higher reliability and longer lifetime when compared to stages requiring additional effort inrelubrication. It is also possible to integrate such lubrication into a customer‘scentral lubrication system. The protective side seal and the purge air connection
prevent contamination by debris entering the stage.

■

Holding brake (L-412.xxxxxxB)■

Various rotary and linear encoders,absolute and incremental■

Versions with linear encoder with
optional drag chain and connection box(L-412.xxxxxxE1) or without drag chain(L-412.xxxxxxE0)■

Foldback kits to reduce overall length
available on request■

Certification and calibration available
on request

Synchronous servo motor
These motors have high positioning accuracy and overload capacity over alarge rotation speed range. High torque and low inertia ensure high dynamic
operation of the stage. The motor provides an adaptable cable exit, allowing theuser to be flexible with their cable positioning strategies in their machine. Thelong lifetime, high performance and robustness of these servo motors produce
excellent results in applications in precision industrial automation.

Applications

Class leading design
When compared to current market offerings, the
new L-412 series of stages provides users with ahigher specification recirculating ball bearing thatoffers higher load carrying capacity and dynamic
performance. The standard motor offers a highresolution resulting in improved motion tracking
errors and refined move and settle performance.

>> Absolute Encoder■ Automated Optical■ Automation

Inspection (AOI)■ Laser Cutting>> Incremental Encoder■ Electronics Manufacturing

Technology Glossary ...................... page 290

52

W W W. P I . W S

L-412.05

L-412.09

L-412.13

Unit

Tolerance

MotionTravel range

52

102

204

305

mm

Pitch / yaw

±9

±14

±19

±29

μrad

Straightness / ﬂatness

±1.5

±2.5

±4

±6

μm

max.

Velocity, unloaded

300

300

300

300

mm/s

max.

Positioning accuracy(uncalibrated)

±5

±6

±8

±10

μm

max.

Unit

Tolerance

L-412.17

L-412.21

L-412.25

max.

MotionActive axes

X

X

X

Travel range

407

508

610

mm

Pitch / yaw

±39

±48

±58

μrad

Straightness / ﬂatness

±8

±9

±10

μm

max.

Velocity, unloaded

300

300

300

mm/s

max.

Positioning accuracy(uncalibrated)

±12

±14

±16

μm

max.

L-412.xxx232
basic option

L-412.xxx244

L-412.xxx054

Unit

Tolerance

Integrated sensor

Incremental rotary
encoder

Absolute rotary
encoder, single turn

Absolute rotary
encoder, multiturnSensor signal

A/B quadrature, RS-422

EnDat 2.1

EnDat 2.1

Sensor resolution

20000

8192

8192

Cts./rev.

Design resolution

0.25

0.6

0.6

μm

Minimum incremental
motion

1

2

2

μm

Bidirectional repeatability

±1

±3

±3

μm

max.

Limit switches

Hall effect, 5 V NPNHall effect, 5 V NPN–

Sensor connection

M23

M23

M23

L-412.xxx212Ex

L-412.xxx211Ex

L-412.xxx025Ex

Unit

Tolerance

Integrated sensor

Incremental linear
encoder
Additional rotary
encoder, see basic
optionIncremental linear
encoder
Additional rotary
encoder, see basic
optionAbsolute-measuring
linear encoder
Additional rotary
encoder, see basic
optionSensor signal

A/B quadrature, RS-422

Sin/cos, 1 V peak-peak,
20 μm signal period

EnDat 2.2

Design resolution

0.05

–

0.001

μm

Minimum incremental
motion

300

50

50

nm

typ.

Bidirectional
repeatability

±0.5

±0.5

±0.5

μm

max.

Limit switches

Hall effect, 5 V NPNHall effect, 5 V NPN–

Sensor connection

Sub-D 15 (m)

M17

M17

max.

Encoder options

Encoder options

53

MOTION|POSITIONINGTranslation Stages

L-412.03

L-412.xxxxxx

L-412.xxxxxxB

Unit

Tolerance

Mechanical properties
Guide type

Recirculating ball bearing

Recirculating ball bearing

Drive screw type

Ball screw

Ball screw

Holding brake–

Electromagnetic safety brake

Drive screw pitch

5

5

mm

Push/pull force,
power on

700

700

N

max.

Holding force, power off

–

500

N

typ.

Load capacity in Z

400

400

N

max.

Permissible lateral force

200

200

N

max.

Permissible torque in θX

20

20

N·m

max.

Permissible torque in θY

15

15

N·m

max.

Permissible torque in θZ

20

20

N·m

max.

L-412.xx9

Unit

Tolerance

V DC

max.

Drive properties
Drive type

Synchronous servo motor

Intermediate circuit
voltage, effective

320

Peak torque

2.76

N·m

typ.

Nominal torque

0.7

N·m

typ.

Peak current,
effective (RMS)

10.9

A

typ.

Nominal current,
effective (RMS)

2.2

A

typ.

Torque constant,effective

0.32

N·m/A

typ.

Resistance phase-phase

5.22

Ω

typ.

Inductance phase-phase

9.7

mH

typ.

Back EMF phase-phase

20.4

V/kRPM

max.

Number of pole pairs

3

L-412

Unit

Tolerance

kg

±5 %

±5 %

MiscellaneousMaterial

Aluminum, black anodized stainless steel

Overall mass

L-412.03 (52 mm travel range): 6.4
L-412.05 (102 mm travel range): 6.9
L-412.09 (204 mm travel range): 7.9
L-412.13 (305 mm travel range): 8.9
L-412.17 (407 mm travel range): 9.8
L-412.21 (508 mm travel range): 10.8
L-412.25 (610 mm travel range): 11.8

Moved mass

1.4

kg

MTBF

20000

h

Connection

M23 (motor)
M23 (rotary encoder)optional connection for linear encoder
Fitting for purge air hose with outside diameter 4 mm
Funnel-type grease nipple for spindle lubrication

Limit switch connection

M8 8-pin

Recommended
controllers

ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

54

W W W. P I . W STranslation Stages

L-412, dimensions in mm

TRAVEL

L-417.03xxxx
L-417.05xxxx
L-417.09xxxx
L-417.13xxxx
L-417.17xxxx
L-417.21xxxx
L-417.25xxxx

52 (4”)
102 (4”)204 (8”)305 (12”)407 (16”)508 (20”)610 (24”)

A

290
340
445
545
645
745
850

B

147,5
172,5
225
275
325
375
427,5

C

D

100
100, 200
100, 200, 300
100, 200, 300, 400
100, 200, 300, 400, 500
100, 200, 300, 400, 500, 600
100, 200, 300, 400, 500, 600, 700

E

D1
L-412.xxxxxxxx

D2
L-412.xxxxxxxxB

E1
L-412.xxxxxxEO

E2
L-412.xxx211E1

E3
L-412.xxx212E1

114,5
114,5
114,5
114,5
114,5
114,5
114,5

148,5
148,5
148,5
148,5
148,5
148,5
148,5

44
44
44
44
44
44
44

28,5
28,5
28,5
28,5
28,5
28,5
28,5

28
28
28
28
28
28
28

55

MOTION|POSITIONING

V-412 PIMag® High-Load Linear Stage
High Performance and Cost Efficiency, Linear Motor■

Width 116 mm■

Travel range to 610 mm■

Nominal force 33 N■

Incremental or absolute linear encoder■

Precision recirculating ball bearings,
load capacity to 400 N■

Covering strip on the side for protection
against debris

Reference-class linear stage

Class leading design

PI has extended its product portfolio for industrial solutions with a new familyof precision linear motor stages. Various versions are available with high-performance linear motors, heavy-duty recirculating ball bearings, and precisionlinear encoders. The protective side seal and the purge air connection prevent
contamination by debris entering the stage.

When compared to current market offerings, the
new V-412 series of stages provides users with ahigher specification recirculating ball bearing thatoffers higher load carrying capacity and dynamic
performance. The encoder options offer a highresolution resulting in improved motion tracking
errors and refined move and settle performance.
For full flexibility the user can select either incremental or absolute types. Absolute types remove
the requirement to home the stage during startup
and provide additional benefits including reduced
collision risks during operation.

PIMag® magnetic direct drive
3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without
friction. The ironless linear motors reach high velocities and accelerations.
Ironless motors are particularly suitable for positioning tasks with the highest
demands on precision because there is no undesirable interaction with thepermanent magnets. This is in comparison to iron core linear motors which
exhibit ‘cogging’. This allows smooth running even at low velocities and novibration at high velocities.

Applications■ Automated Optical

Inspection (AOI)>> Absolute Encoder■ Flatpanel Inspection>> Linear Encoder■ Automation>> PIMag® Magnetic Linear Motors■ Digital Printing■ Laser Cutting■ Electronics Manufacturing■ Scanning

Technology Glossary ...................... page 290

56

W W W. P I . W S

V-412.05

V-412.09

V-412.13

Unit

Tolerance

MotionTravel range

52

102

204

305

mm

Pitch / yaw

±9

±14

±19

±29

μrad

Straightness / ﬂatness

±1.5

±2.5

±4

±6

μm

max.

Velocity, unloaded

2000

2000

2000

2000

mm/s

max.

Positioning accuracy(uncalibrated)

±3

±4

±8

±10

μm

typ.

Unit

Tolerance

V-412.17

V-412.21

V-412.25

max.

MotionActive axes

X

X

X

Travel range

407

508

610

mm

Pitch / yaw

±39

±48

±58

μrad

Straightness / ﬂatness

±8

±9

±10

μm

max.

Velocity, unloaded

2000

2000

2000

mm/s

max.

Positioning accuracy(uncalibrated)

±12

±14

±15

μm

typ.

Unit

Tolerancemax.

V-412.xxx211Ex

V-412.xxx025Ex

Integrated sensor

Incremental linear encoder

Absolute-measuring linear encoder

Sensor signal

Sin/cos, 1 V peak-peak,
20 μm signal period

EnDat 2.2

Design resolution

0.00030.001

μm

Minimum incremental
motion

5

10

nm

typ.

Bidirectional
repeatability

±0.5

±0.5

μm

typ.

Limit switches

Hall effect, 5 V NPN–

V-412.xxxxxx

V-412.xxxxxxB

Unit

Tolerance

Encoder options

Mechanical properties
Guide type

Recirculating ball bearing

Recirculating ball bearing

Load capacity in Z

400

400

N

max.

Permissible lateral force

200

200

N

max.

Permissible torque in θX

20

20

N·m

max.

Permissible torque in θY

15

15

N·m

max.

Permissible torque in θZ

20

20

N·m

max.

57

MOTION|POSITIONINGTranslation Stages

V-412.03

V-412.xx6

Unit

Tolerance

V DC

max.

Drive properties
Drive type

Ironless 3-phase linear motor

Intermediate circuit
voltage, effective

300

Peak force

151

N

typ.

Nominal force

33

N

typ.

Peak current,
effective (RMS)

10.6

A

typ.

Nominal current,
effective (RMS)

2.3

A

typ.

Force constant, effective

14.1

N/A

typ.

Motor constant

4

N/√W

typ.

Electrical time constant

0.19

ms

Resistance phase-phase

8.69

Ω

typ.

Inductance phase-phase

1.4

mH

typ.

Back EMF phase-phase

8.1

V·s/m

max.

Pole pitch N-N

30.5

mm

V-412

Unit

Tolerance

kg

±5 %

±5 %

MiscellaneousMaterial

Aluminum, black anodized
stainless steel

Overall mass

V-412.03 (52 mm travel range): 5.0
V-412.05 (102 mm travel range): 5.6
V-412.09 (204 mm travel range): 6.7
V-412.13 (305 mm travel range): 7.9
V-412.17 (407 mm travel range): 9.0
V-412.21 (508 mm travel range): 10.2
V-412.25 (610 mm travel range): 11.3

Moved mass

1.7

kg

MTBF

20000

h

Connection

M17 (motor)
M17 (linear encoder)
Fitting for purge air hose with outside diameter 4 mm

Recommended
controllers

C-891 (single axis)
C-885 with C-891.10C885 (up to 20 axes)
ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

58

W W W. P I . W STranslation Stages
V-412, dimensions in mm

V-412.03xxxx
V-412.05xxxx
V-412.09xxxx
V-412.13xxxx
V-412.17xxxx
V-412.21xxxx
V-412.25xxxx

TRAVELA

B

C

52 (2”)
102 (4”)204 (8”)305 (12”)407 (16”)508 (20”)610 (24”)

285
335
440
540
640
740
845

142,5
167,5
220
270
320
370
422,5

100
100, 200
100, 200, 300
100, 200, 300, 400
100, 200, 300, 400, 500
100, 200, 300, 400, 500, 600
100, 200, 300, 400, 500, 600, 700

59

MOTION|POSITIONING

L-417 High-Load Linear Stage
High Performance and Cost Efficiency, Drive Screw■

Width 166 mm■

Travel range to 813 mm■

Precision ball screw■

Incremental or absolute rotary encoder options■

Additional linear encoder options■

Precision recirculating ball bearings, load capacity to 450 N■

Covering strip on the side for protection against debris

Reference-class linear stage

Options

PI has extended its product portfolio for industrial solutions with a new familyof precision linear ball-screw stages. Various versions are available with highperformance synchronous servo motors, heavy-duty recirculating ball bearings,
and precision rotary and linear encoders. An optional holding brake allows use
as a vertical axis. The stage’s internal ball screw can be relubricated externallythus removing the need to disassemble the stage. This provides a higher reliability and longer lifetime when compared to stages requiring additional effort inrelubrication. It is also possible to integrate such lubrication into a customer‘scentral lubrication system. The protective side seal and the purge air connection
prevent contamination by debris entering the stage.

■

Holding brake (L-417.xxxxxxB)■

Various rotary and linear encoders,absolute and incremental■

Versions with linear encoder with
optional drag chain and connection box(L-417.xxxxxxE1) or without drag chain(L-417.xxxxxxE0)■

Foldback kits to reduce overall length
available on request■

Certification and calibration available
on request

Synchronous servo motor
These motors have high positioning accuracy and overload capacity over alarge rotation speed range. High torque and low inertia ensure high dynamic
operation of the stage. The motor provides an adaptable cable exit, allowing theuser to be flexible with their cable positioning strategies in their machine. Thelong lifetime, high performance and robustness of these servo motors produce
excellent results in applications in precision industrial automation.

Applications■ Automated Optical Inspection(AOI)

Class leading design
When compared to current market offerings, the
new L-417 series of stages provides users with ahigher specification recirculating ball bearing thatoffers higher load carrying capacity and dynamic
performance. The standard motor offers a highresolution resulting in improved motion tracking
errors and refined move and settle performance.

>> Absolute Encoder>> Incremental Encoder■ Automation■ Laser Cutting■ Electronics Manufacturing

Technology Glossary ...................... page 290

60

W W W. P I . W S

L-417.09

L-417.13

L-417.17

Unit

Tolerance

MotionTravel range

102

204

305

407

mm

Pitch / yaw

±14

±19

±29

±35

μrad

Straightness / ﬂatness

±2.5

±4

±6

±8

μm

max.

Velocity, unloaded

300

300

300

300

mm/s

max.

Positioning accuracy(uncalibrated)

±6

±8

±10

±12

μm

max.

Unit

Tolerance

L-417.21

L-417.25

L-417.33

X

max.

MotionActive axes

X

X

Travel range

508

610

813

mm

Pitch / yaw

±40

±45

±50

μrad

Straightness / ﬂatness

±9

±10

±12

μm

max.

Velocity, unloaded

300

300

250

mm/s

max.

Positioning accuracy(uncalibrated)

±14

±16

±18

μm

max.

L-417.xxx232
basic option

L-417.xxx244

L-417.xxx054

Unit

Tolerance

Integrated sensor

Incremental rotary
encoder

Absolute rotary
encoder, single turn

Absolute rotary
encoder, multiturnSensor signal

A/B quadrature, RS-422

EnDat 2.1

EnDat 2.1

Sensor resolution

20000

8192

8192

Cts./rev.

Design resolution

0.25

0.6

0.6

μm

Minimum incremental
motion

1

2

2

μm

Bidirectional
repeatability

±1

±3

±3

μm

max.

Limit switches

Hall effect, 5 V NPNHall effect, 5 V NPN–

Sensor connection

M23

M23

M23

L-417.xxx212Ex

L-417.xxx211Ex

L-417.xxx025Ex

Unit

Tolerance

Integrated sensor

Incremental linear
encoder
Additional rotary
encoder, see basic
optionIncremental linear
encoder
Additional rotary
encoder, see basic
optionAbsolute-measuring
linear encoder
Additional rotary
encoder, see basic
optionSensor signal

A/B quadrature, RS-422

Sin/cos, 1 V peak-peak,
20 μm signal period

EnDat 2.2

Design resolution

0.05

–

0.001

μm

Minimum incremental
motion

300

50

50

nm

typ.

Bidirectional
repeatability

±0.5

±0.5

±0.5

μm

max.

Limit switches

Hall effect, 5 V NPNHall effect, 5 V NPN–

Sensor connection

Sub-D 15 (m)

M17

M17

max.

Encoder options

Encoder options

61

MOTION|POSITIONINGTranslation Stages

L-417.05

L-417.xxxxxx

L-417.xxxxxxB

Unit

Tolerance

Mechanical properties
Guide type

Recirculating ball bearing

Recirculating ball bearing

Drive screw type

Ball screw

Ball screw

Holding brake–

Electromagnetic safety brake

Drive screw pitch

5

5

mm

Push/pull force,
power on

700

700

N

max.

Holding force, power off

–

500

N

typ.

Load capacity in Z

450

450

N

max.

Permissible lateral force

250

250

N

max.

Permissible torque in θX

40

40

N·m

max.

Permissible torque in θY

30

30

N·m

max.

Permissible torque in θZ

40

40

N·m

max.

L-417.xx9

Unit

Tolerance

V DC

max.

Drive properties
Drive type

Synchronous servo motor

Intermediate circuit
voltage, effective

320

Peak torque

2.76

N·m

typ.

Nominal torque

0.7

N·m

typ.

Peak current,
effective (RMS)

10.9

A

typ.

Nominal current,
effective (RMS)

2.2

A

typ.

Torque constant,effective

0.32

N·m/A

typ.

Resistance phase-phase

5.22

Ω

typ.

Inductance phase-phase

9.7

mH

typ.

Back EMF phase-phase

20.4

V/kRPM

max.

Number of pole pairs

3

L-417

Unit

Tolerance

kg

±5 %

±5 %

MiscellaneousMaterial

Aluminum, black anodized
stainless steel

Overall mass

L-417.05 (102 mm travel range): 9.3
L-417.09 (204 mm travel range): 10.8
L-417.13 (305 mm travel range): 12.2
L-417.17 (407 mm travel range): 13.7
L-417.21 (508 mm travel range): 15.1
L-417.25 (610 mm travel range): 16.5
L-417.33 (813 mm travel range): 19.4

Moved mass

2.4

kg

MTBF

20000

h

Connection

M23 (motor)
M23 (rotary encoder)optional connection for linear encoder
Fitting for purge air hose with outside diameter 4 mm
Funnel-type grease nipple for spindle lubrication

Limit switch connection

M8 8-pin

Recommended
controllers

ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

62

W W W. P I . W STranslation Stages

L-417, dimensions in mm

TRAVEL

L-417.05xxxx
L-417.09xxxx
L-417.13xxxx
L-417.17xxxx
L-417.21xxxx
L-417.25xxxx
L-417.33xxxx

102 (4”)204 (8”)305 (12”)407 (16”)508 (20”)610 (24”)813 (32”)

A

356
470
570
670
775
875
1080

B

198
250,5
300,5
350,5
403
453
555,5

C

D

150
150, 350
150, 350
150, 350, 550
150, 350, 550
150, 350, 550, 750
150, 350, 550, 750, 950

E

D1
L-417.xxxxxxxx

D2
L-417.xxxxxxxxB

E1
L-417.xxxxxxEO

E2
L-417.xxx211E1

E3
L-417.xxx212E1

119,5
119,5
119,5
119,5
119,5
119,5
119,5

153,5
153,5
153,5
153,5
153,5
153,5
153,5

44
44
44
44
44
44
44

28,5
28,5
28,5
28,5
28,5
28,5
28,5

28
28
28
28
28
28
28

63

MOTION|POSITIONING

V-417 PIMag® High-Load Linear Stage
High Performance and Cost Efficiency, Linear Motor■

Width 166 mm■

Travel range to 813 mm■

Nominal force 87 N■

Incremental or absolute linear encoder■

Precision recirculating ball bearings, load
capacity to 450 N■

Covering strip on the side for protection
against debris

Reference-class linear stage

Class leading design

PI has extended its product portfolio for industrial solutions with a new familyof precision linear motor stages. Various versions are available with high-performance linear motors, heavy-duty recirculating ball bearings, and precisionlinear encoders. The protective side seal and the purge air connection prevent
contamination by debris entering the stage.

When compared to current market offerings, the
new V-417 series of stages provides users with ahigher specification recirculating ball bearing thatoffers higher load carrying capacity and dynamic
performance. The encoder options offer a highresolution resulting in improved motion tracking
errors and refined move and settle performance.
For full flexibility the user can select either incremental or absolute types. Absolute types remove
the requirement to home the stage during startup
and provide additional benefits including reduced
collision risks during operation.

PIMag® magnetic direct drive
3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without
friction. The ironless linear motors reach high velocities and accelerations.
Ironless motors are particularly suitable for positioning tasks with the highest
demands on precision because there is no undesirable interaction with thepermanent magnets. This is in comparison to iron core linear motors which
exhibit ‘cogging’. This allows smooth running even at low velocities and novibration at high velocities.

Applications■ Automated Optical

Inspection (AOI)>> Absolute Encoder■ Flatpanel Inspection>> Linear Encoder■ Automation>> PIMag® Magnetic Linear Motors■ Digital Printing■ Laser Cutting■ Electronics Manufacturing■ Scanning

Technology Glossary ...................... page 290

64

W W W. P I . W S

V-417.09

V-417.13

V-417.17

Unit

Tolerance

MotionTravel range

102

204

305

407

mm

Pitch / yaw

±14

±19

±29

±39

μrad

Straightness / ﬂatness

±2.5

±4

±6

±8

μm

max.

Velocity, unloaded

2000

2000

2000

2000

mm/s

max.

Positioning accuracy(uncalibrated)

±4

±8

±10

±12

μm

typ.

Unit

Tolerance

V-417.21

V-417.25

V-417.33

X

max.

MotionActive axes

X

X

Travel range

508

610

813

mm

Pitch / yaw

±40

±45

±50

μrad

Straightness / ﬂatness

±9

±10

±12

μm

max.

Velocity, unloaded

2000

2000

2000

mm/s

max.

Positioning accuracy(uncalibrated)

±14

±15

±17

μm

typ.

Unit

Tolerancemax.

V-417.xxx211Ex

V-417.xxx025Ex

Integrated sensor

Incremental linear encoder

Absolute-measuring linear encoder

Sensor signal

Sin/cos, 1 V peak-peak,
20 μm signal period

EnDat 2.2

Design resolution

0.00030.001

μm

Minimumincremental motion

5

10

nm

typ.

Bidirectional
repeatability

±0.5

±0.5

μm

typ.

Limit switches

Hall effect, 5 V NPN–

V-417.xxxxxx

V-417.xxxxxxB

Unit

Tolerance

Encoder options

Mechanical properties
Guide type

Recirculating ball bearing

Recirculating ball bearing

Load capacity in Z

450

450

N

max.

Permissible lateral force

250

250

N

max.

Permissible torque in θX

40

40

N·m

max.

Permissible torque in θY

30

30

N·m

max.

Permissible torque in θZ

40

40

N·m

max.

65

MOTION|POSITIONINGTranslation Stages

V-417.05

V-417.xx6

Unit

Tolerance

V DC

max.

Drive properties
Drive type

Ironless 3-phase linear motor

Intermediate circuit
voltage, effective

300

Peak force

300

N

typ.

Nominal force

87

N

typ.

Peak current,
effective (RMS)

15

A

typ.

Nominal current,
effective (RMS)

4.4

A

typ.

Force constant, effective

19.9

N/A

typ.

Motor constant

8.4

N/√W

typ.

Electrical time constant

0.35

ms

Resistance phase-phase

3.6

Ω

typ.

Inductance phase-phase

1.2

mH

typ.

Back EMF phase-phase

16

V·s/m

max.

Pole pitch N-N

30

mm

V-417

Unit

Tolerance

kg

±5 %

±5 %

MiscellaneousMaterial

Aluminum, black anodized
stainless steel

Overall mass

V-417.05 (102 mm travel range): 9.3
V-417.09 (204 mm travel range): 11.2
V-417.13 (305 mm travel range): 13.0
V-417.17 (407 mm travel range): 14.8
V-417.21 (508 mm travel range): 16.6
V-417.25 (610 mm travel range): 18.4
V-417.33 (610 mm travel range): 21.1

Moved mass

2.8

kg

MTBF

20000

h

Connection

M17 (motor)
M17 (linear encoder)
Fitting for purge air hose with outside diameter 4 mm

Recommended
controllers

C-891 (single axis)
C-885 with C-891.10C885 (up to 20 axes)
ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

66

W W W. P I . W STranslation Stages
V-417, dimensions in mm

V-417.05XXXX
V-417.09XXXX
V-417.13XXXX
V-417.17XXXX
V-417.21XXXX
V-417.25XXXX
V-417.33XXXXTRAVELA

B

C

102 (4”)204 (8”)305 (12”)407 (16”)508 (20”)610 (24”)813 (32”)

360
465
565
665
770
870
1075

180
232,5
282,5
332,5
385
435
537,5

150
150, 350
150, 350
150, 350, 550
150, 350, 550
150, 350, 550, 750
150, 350, 550, 750, 950

67

MOTION|POSITIONING

LS-180 Linear Stage for Heavy Loads
Robust Design for Industrial Use■

Travel ranges from 155 mm to 508 mm(6” to 20”)■

Max. velocity to 150 mm/s■

Load capacity to 1000 N■

Optional linear encoder for direct
position measurement

Reference-class linear stage

Drive types

Recirculating ball bearings for high travel accuracy and load capacity. Precisionball screw with 5 mm pitch. Stress-relieved aluminum base for highest stability.
Noncontact inductive limit switches.

■

Closed-loop DC servo motor with rotary
encoder on the motor shaft■

2-phase stepper motor for high torqueeven at low velocities and high resolution

Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the actual position directly at the
motion platform with the greatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on position measuring.
Recirculating ball bearings
When carefully assembled, recirculating ball bearings are distinguished bya beneficial combination of high load capacity, lifetime, maintenance-free
operation, and guiding accuracy. The moving part of the stages is supported
by four preloaded linear ball bearing units which run on two guide rails. Eachbearing unit is made up of two independent rows of circulating ball bearings.

Applications

Minimum incremental motion
In conjunction with the SMC Hydra controller,
versions with stepper motor and integrated linear
encoder achieve repeatable minimum incremental motion in the range of the sensor resolution.
The same configuration achieves constant low
velocities of a few sensor increments per second.

>> Linear Encoder■ Sample Inspection■ Scientific Instrumentation■ Scanning■ Semiconductor

Technology Glossary ...................... page 290

68

W W W. P I . W S

624091x1

624092x0

624092x1-0001

Unit

Tolerance

Linear stage withDC motor androtary encoder

Linear stage
with DC motor,
linear and rotary
encoder

Linear stage withstepper motor

Linear stage
with stepper
motor and linear
encoderTravel range

155 / 205 / 305 /508

155 / 205 / 305 /508

155 / 205 / 305 /508

155 / 205 / 305 /508

Integrated sensor

Rotary encoder

Linear androtary encoder–

Linear encoder

Sensor signal rotary
encoder

A/B quadrature,
RS-422

A/B quadrature,
RS-422––

Sensor signal linear
encoder–

A/B quadrature,
RS-422–

Sin/cos,
1 V peak-peak,
20 μm signal
periodDesign resolution

0.25

0.05

25

0.005

Sensor resolution
rotary encoder

20000

20000

–

Sensor resolution linear
encoder

–

0.05

–

–

μm

Minimum incremental
motion

0.5

0.1

0.5

0.1

μm

typ.

Unidirectional
repeatability

0.5

0.1

0.5

0.1

μm

typ.

Bidirectional
repeatability

±2.5

±0.1

±2.5

±0.1

μm

typ.

Pitch

±40 / ±50 / ±60 /±80±40 / ±50 / ±60 /±80±40 / ±50 / ±60 /±80±40 / ±50 / ±60 /
±80

μrad

typ.

Yaw

±50

±50

±50

±50

μrad

typ.

Straightness±2 / ±3 / ±4 / ±6

±2 / ±3 / ±4 / ±6

±2 / ±3 / ±4 / ±6

±2 / ±3 / ±4 / ±6

μm

typ.

Flatness±2 / ±3 / ±4 / ±6

±2 / ±3 / ±4 / ±6

±2 / ±3 / ±4 / ±6

±2 / ±3 / ±4 / ±6

μm

typ.

Max. velocity

150

150

75

75

mm/s

Recirculatingball bearing

Recirculatingball bearing

Recirculatingball bearing

Recirculatingball bearing
Ball screw

Motion and positioningmm

μm
Counts/rev.

Mechanical properties
Guide type
Drive screw type

Ball screw

Ball screw

Ball screw

Drive screw pitch

5

5

5

5

mm

Load capacity

1000

1000

1000

1000

N

max.

Push/pull force

800

800

800

800

N

max.

Holding force, power off

20

20

50

50

N

max.

Permissible lateral force

500

500

500

500

N

max.

Permissible torque Mx
in θX

250

250

250

250

N·m

max.

Permissible torque My
in θY

132

132

132

132

N·m

max.

Permissible torque Mz
in θZ

125

125

125

125

N·m

max.

69

MOTION|POSITIONINGTranslation Stages

624091x0

624091x0

624091x1

624092x0

624092x1-0001

Unit

Tolerance

Motor typeDC motor

DC motor

2-phase stepper
motor

2-phase stepper
motorOperating voltage,
nominal

24

24

48

48

V

nom.

Operating voltage, max.

48

48

Peak current, effective

3.8

3.8

48

48

V

max.

2

2

A

Electrical time constant

6

6

typ.

Drive properties

ms

Resistance phase-phase

0.62

0.62

2.4

2.4

Ω

Inductance phase-phase

0.13

0.13

2.87

2.87

mH

typ.

Back EMF phase-phase

0.00349

0.00349

V/kRPMmax.

Step resolution

Limit switches

200

200

Inductive

Inductive

Inductive

Inductive

5 to 40

5 to 40

5 to 40

0 to 55

typ.

Fullsteps/
rev.

Miscellaneous
Operating temperature
range

°C

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Aluminum, steel

Mass

7.8 / 8.4 / 9.4 /
10.6

8.5 / 9.1 / 10.3 /11.5

8.3 / 8.9 / 9.9 /
11.0

9.0 / 9.6 / 10.8 /
12

kg

±5 %

kg

±5 %

Moved mass

2.2

2.2

2.2

2.2

Connection

Sub-D 25 (m)Motor:
Sub-D 25 (m)Sensor:
Sub-D 9 (m)Sub-D 25 (m)Motor:
Sub-D 25 (mSensor:
Sub-D 9 (m)Recommended
controllers

C-863(single axis)
with C-863.AD11
line driver
C-884 (to 6 axes)
with C-863.AD11
line driver
C-885 with
C-863.20C885(to 40 axes)
and C-863.AD11
line driver
ACS modular
controller

C-863(single axis)
with C-863.AD11
line driver
C-884 (to 6 axes)
with C-863.AD11
line driver
C-885 with
C-863.20C885(to 40 axes)
and C-863.AD11
line driver
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

Ask about custom designs!
Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

70

W W W. P I . W STranslation Stages
LS-180, dimensions in mm, LS-010: Cable for linear encoder

Travel range/mm

A

B

C

D

155
205
305
508

235
260
310
410

470
520
620
820

3
3
5
5

350
350
450
650

Direction of the axes
and torques for linear stages

71

MOTION|POSITIONING

L-505 Compact Linear Stage
With DC or Stepper Motor

Product overview
Compact linear stage with low-backlash fine-threaded leadscrews and ballguides. Directly mountable XY combination. Integrated reference point andlimit switches: Hall effect.
The linear stage is available in two design variants:■

Narrow, long variant with direct fixed drive (flange motor).

■

Wide, compact variant with belt drive (folded drivetrain).
These variants are marked by an “F” at the end of the item number.

Drive types■

DC motor with or without gearhead■

Stepper motor with or without gearhead

Applications■

Travel ranges 13 or 26 mm■

Stepper motor or DC servo motor withand without gearhead■

Velocity to 15 mm/s■

Load capacity to 30 N■

Integrated reference point and limit switch

Variants with DC motor are equipped with anincremental linear encoder. This is optional in
the case of stepper motor variants.
Highly accurate position measuring withincremental linear encoder
Noncontact optical linear encoders measure theactual position directly at the motion platform
with the greatest accuracy so that nonlinearity,
mechanical play or elastic deformation have noinfluence on position measuring.

>> Linear Encoder■ Autofocus■ Medical Industry■ Biotechnology■ Precision Micro Assembly■ Automation

Technology Glossary ...................... page 290

72

W W W. P I . W S

L-505.014212F
L-505.024212F

Linear stage with DC motor
and linear encoder

Linear stage with DC gear motor
and linear encoder

X

X

Travel range

13 / 26

13 / 26

Integrated sensor

Incremental linear encoder

Incremental linear encoder

Sensor signal linear
encoder

A/B quadrature, RS-422

A/B quadrature, RS-422

Design resolution

0.05

0.05

μm

Sensor resolution linear
encoder

0.05

0.05

μm

Minimum incremental
motion

0.1

0.5

μm

typ.

Unidirectional
repeatability

0.1

0.25

μm

typ.

Bidirectional
repeatability

±0.15

±0.25

μm

typ.

Pitch / yaw±50 / ±75

±50 / ±75

μrad

typ.

Straightness / ﬂatness±0.5 / ±1±0.5 / ±1

μm

typ.

Max. velocity

L-505.xxxxxx: 15
L-505.xxxxxxF: 7.5

1

mm/s

Reference and limit
switches

Hall effect

Hall effect

Reference point switch
repeatability<4<4Guide type

Ball guide

Ball guide

Drive screw type

Leadscrew

Leadscrew

Drive screw pitch

0.5

0.5

mm

Load capacity

30

30

N

Permissible lateral force

30

30

N

max.

Push/pull force

20

20

N

max.

Holding force, power off

20

20

N

typ.

Permissible torque Mx
in θX

L-505.01: 7
L-505.02: 9

L-505.01: 7
L-505.02: 9

N·m

max.

Permissible torque My
in θY

L-505.01: 6
L-505.02: 8

L-505.01: 6
L-505.02: 8

N·m

max.

Permissible torque Mz
in θZ

L-505.01: 6
L-505.02: 8

L-505.01: 6
L-505.02: 8

N·m

max.

Motor typeDC motor

DC gear motor

Operating voltage,
nominal

24

12

V

nom.

Operating voltage, max.

48

24

V

max.

5 to 40

5 to 40°C

Active axes

Unit

Tolerance
Translation Stages

L-505.013212
L-505.013212F
L-505.023212
L-505.023212F

L-505 with DC motor

Motion and positioning
mm

μm

typ.

Mechanical properties

max.

Drive properties

Miscellaneous
Operating temperature
range
Material

anodized aluminum, stainless steel

anodized aluminum, stainless steel

Mass

0.4

0.4

kg

±5 %

Moved mass

0.07

0.07

kg

±5 %

Connection

HD Sub-D 26 (m)HD Sub-D 26 (m)Recommended
controllers

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885 (to 40 axes)
ACS modular controller

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885 (to 40 axes)
ACS modular controller

73

MOTION|POSITIONING

L-505.011200
L-505.011200F
L-505.021200
L-505.021200F

L-505.011212
L-505.011212F
L-505.021212
L-505.021212F

L-505.01A200F
L-505.02A200F

L-505.01A212F
L-505.02A212F

Linear stage withstepper motor

Linear stage
with stepper
motor and linear
encoder

Linear stage withstepper motor
and gearhead

Linear stage withstepper motor,
gearhead andlinear encoder

X

X

Travel range

13 / 26

13 / 26

13 / 26

13 / 26

Integrated sensor–

Incremental
linear encoder–

Incremental
linear encoder

Sensor signal linear
encoder–

A/B quadrature,
RS-422–

A/B quadrature,
RS-422

Design resolution

2.5 (full step)

0.005

0.732 (full step)

0.005

μm

Sensor resolution
linear encoder

–

0.005

–

0.005

μm

Minimum incremental
motion

0.1

0.05

0.2

0.05

μm

typ.

Unidirectional
repeatability

0.3

0.1

0.3

0.1

μm

typ.

Bidirectional
repeatability

±2.5

±0.15

±2.5

±0.15

μm

typ.

Pitch / yaw±50 / ±75

±50 / ±75

±50 / ±75

±50 / ±75

μrad

typ.

Straightness / ﬂatness±0.5 / ±1±0.5 / ±1±0.5 / ±1±0.5 / ±1

μm

typ.

Max. velocity

L-505.xxxxxx: 10
L-505.xxxxxxF: 7.5

L-505.xxxxxx: 10
L-505.xxxxxxF: 7.5

0.75

0.75

mm/s

Reference and limit
switches

Hall effect

Hall effect

Hall effect

Hall effect

Reference point switch
repeatability

<4

<4

<4

<4

Guide type

Ball guide

Ball guide

Ball guide

Ball guide

Drive screw type

Leadscrew

Leadscrew

Leadscrew

Leadscrew

Drive screw pitch

0.5

0.5

0.5

0.5

mm

Load capacity

30

30

30

30

N

Permissible lateral force

30

30

30

30

N

max.

Push/pull force

20

20

20

20

N

max.

L-505 with stepper
motor

Active axes

Unit

Tolerance

Motion and positioning
mm

μm

typ.

Mechanical properties

max.

Holding force, power off

20

20

20

20

N

typ.

Permissible torque Mx
in θX

L-505.01: 7
L-505.02: 9

L-505.01: 7
L-505.02: 9

L-505.01: 7
L-505.02: 9

L-505.01: 7
L-505.02: 9

N·m

max.

Permissible torque My
in θY

L-505.01: 6
L-505.02: 8

L-505.01: 6
L-505.02: 8

L-505.01: 6
L-505.02: 8

L-505.01: 6
L-505.02: 8

N·m

max.

Permissible torque Mz
in θZ

L-505.01: 6
L-505.02: 8

L-505.01: 6
L-505.02: 8

L-505.01: 6
L-505.02: 8

L-505.01: 6
L-505.02: 8

N·m

max.

Motor type2-phase stepper
motor

2-phase stepper
motor

2-phase stepper
motor with gearhead

2-phase stepper
motor with gearhead

Operating voltage,
nominal

24

24

24

24

V

nom.
max.

Drive properties

Operating voltage, max.

48

48

48

48

V

Step resolution

200

200

24

24

Full
steps/rev.

74

W W W. P I . W S

L-505.011212
L-505.011212F
L-505.021212
L-505.021212F

L-505.01A200F
L-505.02A200F

L-505.01A212F
L-505.02A212F

Unit

Tolerance

Operating temperature
range

5 to 40

5 to 40

5 to 40

5 to 40°C

Material

anodizedaluminum,
stainless steel

anodizedaluminum,
stainless steel

anodizedaluminum,
stainless steel

anodizedaluminum,
stainless steel

Mass

0.4

0.4

0.4

0.4

kg

±5 %

Moved mass

0.07

0.07

0.07

0.07

kg

±5 %

Connection

HD Sub-D 26 (m)HD Sub-D 26 (m)HD Sub-D 26 (m)HD Sub-D 26 (m)Recommended
controllers

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

Translation Stages

L-505.011200
L-505.011200F
L-505.021200
L-505.021200F

L-505 with stepper motor

Miscellaneous

All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Custom designs or different specifications on request.

L-505 with direct fixed drive,
dimensions in mm

L-505.xxxxxxF with belt drive,
dimensions in mm

Travel range

A

B

13 mm
26 mm

40.5
47

75
88

Travel range

A

B

13 mm
26 mm

28.5
35

136
149

L-505 motion platform,
dimensions in mm

75

MOTION|POSITIONING

V-522 / V-524 / V-528
High-Dynamics PIMag® Linear Stage
Voice Coil-Direct Drive with Direct Position Measurement■

Fast scanning and positioning■

Travel ranges 5 mm, 10 mm, 20 mm■

Scanning frequencies of more than 10 Hz■

Max. velocity 250 mm/s■

Crossed roller bearings for the highest
precision, anti-creep

V-52x, dimensions in mm

The V-522 reliably performs 20-nm repeatable steps

V-522.1AA
V-522.1AB
V-524.1AA
V-524.1AB
V-528.1AA
V-528.1AB

Applications

A

B

C

D

E

F

G

80
80
90
90
120
120

65
65
75
75
95
95

70
70
80
80
110
110

70
70
70
70
100
100

–
–
–
–
75
75

–
15
–
15
–
20

–
23
–
25,5
–
39,5

>> Linear Encoder>> PIMag® Voice Coil■ Autofocus■ Photonics■ Digital Printing■ Scanning■ Laser Marking■ Scientific Instrumentation■ Metrology / Testing■ Semiconductor

Technology Glossary ...................... page 290

76

W W W. P I . W S

V-524.1AA
V-524.1AB

V-528.1AA
V-528.1AB

Unit

mm

Tolerance

Motion and positioning
Active axes

X

Travel range

5

10

20

Integrated Sensor

Optical, incremental

Optical, incremental

Optical, incremental

Sensor resolution

10

10

10

nm

Min. incremental motion

20

20

20

nm

Unidirectional
repeatability

20

20

20

nm

Bidirectional repeatability

±120

±120

±120

nm

Reference pointswitch repeatability

<1

<1

<1

μm

Pitch

±50

±50

±50

μrad

max.

Yaw

±50

±50

±50

μrad

max.

Straightness

0.5

0.5

0.5

μm

max.

Flatness

0.5

0.5

0.5

μm

max.

Velocity

250

250

250

mm/s

max.
max.

typ.

typ.

Mechanical properties
Load capacity in Z

100

100

100

N

Moved mass

131

137

150

g

Overall mass

460

500

580

g

Drive properties
Drive typevoice coilvoice coilvoice coil

Nominal force

4

3.8

2.9

N

nominalNominal current

1.3

1.3

1.3

A

nominalPeak current

3

3

3

A

max. (3s)Force constant

3.4

2.9

2.3

N/A

typ.

Motor constant

1.3

1.1

0.85

N/(√W)

typ.

Coil resistance

7.2

7.2

7.2

Ω

typ.

Coil inductance

1.7

1.7

1.7

mH

typ.

Time constant

0.32

0.32

0.32

ms

Aluminum,
black anodized

Aluminum,
black anodized

Aluminum,
black anodized

Miscellaneous
Housing material
Cable length

2

2

2

Cable exit

V-52x.1AA:
cable exit in X
V-52x.1AB:
cable exit in Y

V-52x.1AA:
cable exit in X
V-52x.1AB:
cable exit in Y

V-52x.1AA:
cable exit in X
V-52x.1AB:
cable exit in Ym

Voltage / sensor
connection

Sub-D 15 (m)Sub-D 15 (m)Sub-D 15 (m)Lifetime

20000

20000

20000

km

Operating temperature
range

18 to 45

18 to 45

18 to 45

°C

Relative humidity
during operation

20 to 80

20 to 80

20 to 80%

Recommended
controllers

C-413 (single axis)
ACS modular controller

C-413 (single axis)
ACS modular controller

C-413 (single axis)
ACS modular controller±10 mm

Ask about custom designs!

77

MOTION|POSITIONINGTranslation Stages

V-522.1AA
V-522.1AB

V-508 PIMag® Precision Linear Stage
Versatile options for adapting to requirements■

Travel ranges 80, 170, and 250 mm■

Ironless or iron core linear motor■

Incremental or absolute linear encoder,various resolutions■

Compact cross section: 80 mm × 25 mm■

Crossed roller bearings for high load
capacity, anti-creep

V-508, dimensions in mm

Applications

Travel80
V-508.3xxxxx

170
V-508.6xxxxx

250
V-508.9xxxxx

A
B
C
D
E
F

145
25
25
2
100
25

235
25
25
4
100 / 200
37,5

315
12.5
–
5
100 / 20050>> Absolute Encoder■ Digital Printing■ Medical Industry>> Linear Encoder■ Electronics Manufacturing■ Metrology / Testing>> PIMag® Magnetic Linear Motors■ Laser Marking■ Scanning

Technology Glossary ...................... page 290

78

W W W. P I . W S

V-508.2

V-508.6

V-508.9

X

Unit

Tolerance

Active axes

X

X

Travel range

80

170

250

mm

Pitch / yaw

±100

±200

±300

μrad

Straightness / ﬂatness

±4

±10

±20

μm

max.

Velocity, unloaded

1

1

1

m/s

max.

Acceleration, unloaded

5

5

5

m/s²

max.
max.

Translation Stages

Motion and positioning

max.

Mechanical properties
Load capacity in Z

100

100

100

N

Moved mass

0.35

0.55

0.8

kg

Overall mass

1.1

1.6

2.1

kg

Guide type

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

V-508.x3

V-508.x5

V-508.xB

Integrated sensor

Incremental linear
encoder

PIOne incremental
linear encoder

Absolute encoder

Sensor signal

Sin/cos, 1 V peak-peak,
80 μm signal period

Sin/cos, 1 V peak-peak,
2 μm signal period

BiSS-C

Unit

Tolerance

Encoder options

Sensor resolution

10 (1)

0.2 (1)

78

nm

typ.

Minimum incremental
motion

20

0.5

160

nm

typ.

Bidirectional repeatability

±0.1

±0.05

±0.15

V-508.xx1

V-508.xx2

typ.

Unit

Tolerance

Drive properties
Drive typeLinear motor, ironless, 3-phase

Linear motor, iron core, 3-phase

Intermediate circuit
voltage, effective

48

48

V DC

Peak force

12

14

N

typ.

Nominal force

3

4

N

typ.

Peak current, effective

3.2

3.2

A

typ.

Nominal current,
effective

0.7

1.1

A

typ.

Force constant, effective

4.28

4.81

N/A

typ.

Resistance phase-phase

2.96

1.23

Ω

typ.

Inductance phase-phase

0.63

0.97

mH

typ.

Back EMF phase-phase

5.36

3.02

V·s/m

max.

Pole pitch N-N

20

18

mm

V-508
Miscellaneous
Operating temperature
range

10 °C to 50 °C

Humidity

20 – 90 % rel., not condensing

Material

Aluminum, black anodized

Motor connector

HD Sub-D 26 (m)Sensor connection

Sub-D 15 (f)Cable length2m

Recommended
controllers

C-891 (single axis)
C-885 with C-891.10C885 (up to 20 axes)
ACS modular controller(1) interpolated
Ask about custom designs!

79

MOTION|POSITIONING

M-122.2DD1 Micro Translation Stage
Compact Linear Stage with Direct Position Measuring■

Travel range 25 mm■

Integrated linear encoder option forhighest accuracy with 0.1 μm resolution■

Min. incremental motion 0.2 μm■

Max. velocity 20 mm/s■

Ball screw for high velocities and numberof cycles

M-122.2DD1, dimensions in mm

Applications>> Linear Encoder■ Automation■ Precision Micro Assembly■ Laser Marking■ Scientific Instrumentation■ Optical Alignment

Technology Glossary ...................... page 290

80

W W W. P I . W SUnit

Travel range

25

mm

Integrated sensor

Linear encoder

Translation Stages

M-122.2DD1

Tolerance

Motion and positioning

Sensor resolution

0.1

μm

Design resolution

0.1

μm

Minimum incremental motion

0.2

μm

typ.

Backlash

0.2

μm

typ.

Unidirectional repeatability

0.15

μm

typ.

Pitch

±150

μrad

typ.

Yaw

±150

μrad

typ.

Velocity

20

mm/s

max.

Reference point switch repeatability

1

μm

typ.

typ.

Mechanical properties
Drive screw

Ball screw

Stiffness in motion direction

0.25

N/μm

Load capacity

50

N

Push/pull force

20

N

max.

Lateral force

25

N

max.

max.

Drive properties
Motor typeDC motor

Operating voltage

0 to ±12

V DC

Motor power

2.25

W

Drive screw pitch

0.5

mm

Reference and limit switches

Hall effectMiscellaneous
Cable length

0.5mOperating temperature range

10 to 50

°C

Material

Aluminum, steel

Mass

0.22

Recommended controllers

C-863
C-884

kg

XYZ setup consisting of three
M-122.2DD1 microtranslation stages.

81

MOTION|POSITIONINGMTS-65 Miniature Linear Stage
Robust Design for Industrial Use■

Travel ranges to 52 mm (2”)■

Repeatability to 0.1 μm■

Load capacity to 2 kg

MTS-65, dimensions in mm

Travel range/mm

13

26

52

A / mmB / mmC / mm

38.5
62
99.5

45
75
112.5

62
105
147.5

Applications■ Autofocus■ Laser Marking■ Biotechnology■ Scientific Instrumentation■ Automation

Technology Glossary ...................... page 290

82

W W W. P I . W S

621792x03

Tolerance

X

Translation Stages

Active axes

Unit

Motion and positioning
Travel range

13 / 26 / 52

mm

Design resolution

5 (full step)μm

Minimum incremental motion

0.1

μm

typ.

Unidirectional repeatability

0.2

μm

typ.

Bidirectional repeatability

±5.0

μm

typ.

Straightness±1.0 / ±2.0 / ±3.0

μm

typ.

Flatness±1.0 / ±2.0 / ±3.0

μm

typ.

Pitch

±40 / ±60 / ±80

μrad

typ.

Yaw

±40

μrad

typ.

Max. velocity

8

mm/s

max.

Mechanical properties
Drive screw type

Ball screw

Drive screw pitch

1mm

Load capacity

10N

Push/pull force

3

N

max.

Holding force, power off

3

N

typ.

max.

Permissible lateral force

10

N

max.

Permissible torque Mx in X

0.4

N·m

max.

Permissible torque My in Y

0.6

N·m

max.

Permissible torque Mz in Z

0.4

N·m

max.

Drive properties
Motor type2-phase stepper motor

Operating voltage, nominal

24

V

nom.

Operating voltage, max.

48

V

max.

Step resolution

200

Full steps/
rev.

Limit switches

OpticalMiscellaneous
Operating temperature range

5 to 40

Material

Aluminum, black anodized

°C

Mass

0.4 / 0.6 / 0.8

Connector

HD Sub-D 15 (m)kgRecommended controllers

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885 (up to 20 axes)
ACS modular controller±5 %Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

Direction of the axes
and torques for linear stages

83

MOTION|POSITIONING

M-105 / M-106 Microtranslation Stage
Precision Crossed Roller Guides, PiezoMike Option, XY(Z) Combinations■

Travel range to 18 mm■

All-stainless-steel construction■

XY and XYZ combinations■

Resolution to 0.1 μm■

Optional PiezoMike with 10 nm resolution■

Optional motor drives

The M-105 and M-106 linear stages are available
in X, XY, and XYZ configurations, and allow travel
ranges of up to 18 mm. They have crossed roller
bearings that allow a guiding accuracy of better
than 2 μm. The carriage is preloaded against the
precision micrometer screw with springs to suppress backlash. With the XYZ version, the Z axis
is mounted with an adapter bracket so that theload acts in the direction of the spring preload.

M-105.10, dimensions in mm

M-105.1P, dimensions in mm

Applications■ Manual sample manipulation

84

W W W. P I . W S

M-105.1P*

M-106.10*

Unit

Tolerance

Travel range

18

18

5

mm

Piezo ﬁne travel range

–

30

–

μm

Min. incremental
motion (piezo drive)

–

0.01

–

μm

Minimum incremental
motion (micrometerscrew)**

1

1

0.1

μm

Backlash

2

2

2

μm

Straightness

2

2

2

μm

Flatness

2

2

2

μm

Load capacity

100

100

100

N

Push/pull force

20 / 420 / 420 / 4N

max.

Lateral force

25

25

25

N

max.

Drive

M-626.00

P-854.00

M-653.00

Drive screw pitch(coarse / ﬁne)

0.5 / –

0.5 / –

0.4 / 0.02

mm/rev.

Mass

0.32

0.38

0.33

kg

Housing material

St

St

St

Recommended piezo
driver

–E-610, E-500 system

–

max.

* Versions M-105.2x, M-106.2x and M-105.3x, M-106.x0 are combinations of basic .1x. versions** Motorized versions achieve up to 50 nm.

85

MOTION|POSITIONINGTranslation Stages

M-105.10*

L-509 Precision Linear Stage
Compact Design, for Loads to 10 kg

Applications■

Travel ranges from 26 to 102 mm (1” to 4”)■

Repeatability to 0.1 μm■

Optionalpwith Direct-Measuringg Linear Encoder■

ActiveDrive DC, DC, BLDC, and DC gear motors■

Stepper motors■

Direction-sensing reference point sswitch>> ActiveDrive■ Autofocus■ Laser Cutting>> Linear Encoder■ Biotechnology■ Optical Alignment>> Vacuum-Compatible Versions■ Automation■ Scientific Instrumentation

Technology Glossary ...................... page 290

86

W W W. P I . W S

L-509.xxSD00 / L-509.xASD00

Unit

Tolerance

Active axes

X

X

Travel range

L-509.1xADxx: 26
L-509.2xADxx: 52
L-509.4xADxx: 102

L-509.1xSDxx: 26
L-509.2xSDxx: 52
L-509.4xSDxx: 102

mm

Pitch / yaw

L-509.1xADxx: ±60
L-509.2xADxx: ±90
L-509.4xADxx: ±120

L-509.1xSDxx: ±60
L-509.2xSDxx: ±90
L-509.4xSDxx: ±120

μrad

typ.

Straightness / ﬂatness

L-509.1xADxx: 2
L-509.2xADxx: 4
L-509.4xADxx: 8

L-509.1xSDxx: 2
L-509.2xSDxx: 4
L-509.4xSDxx: 8

μm

typ.

Velocity

50

20

mm/s

max.

Unit

Tolerance

Translation Stages

L-509.xxADxx

Stages with stepper
motor and ActiveDrive
DC motor
MotionL-509.xxADxx

L-509.xxSD00

L-509.xASD00

Integrated sensor

L-509.xxAD10:
Incremental rotary
encoder
L-509.xxAD00:
Incremental linear
encoder–

Incremental linear
encoder

Sensor signal

A/B quadrature, TTL–

Sin/cos, 1 V peak-peak,
20 μm signal period

Design resolution

L-509.xxAD10: 0.061
L-509.xxAD00: 0.05

5.0

0.005

μm

Sensor resolution
rotary encoder

L-509.xxAD10: 16384––

Cts./rev.

Sensor resolution
linear encoder

L-509.xxAD00: 0.05

–

0.005

μm

Resolution stepper
motor

–

200

200

Full
steps/
rev.

Minimum incremental
motionL-509.xxAD10: 0.8
L-509.xxAD00: 0.2

0.1

0.02

μm

typ.

Unidirectional
repeatability

L-509.xxAD10: 0.2
L-509.xxAD00: 0.1

0.3

0.1

μm

typ.

Bidirectional
repeatability

L-509.xxAD10: ±0.5
L-509.14AD00: ±0.3
L-509.24AD00: ±0.2
L-509.44AD00: ±0.2

±1

±0.2

μm

typ.

Reference and limit
switches

Optical

Optical

OpticalUnit

Tolerance

Positioning

L-509.xxADxx / L-509.xxSD00 / L-509.xASD00
Mechanical properties
Drive screw type

Crossed roller guide with anti-creep system

Drive screw pitch

1

Guide type

Recirculating ball bearings

Holding force, power off

L-509.xxADxx: 20
L-509.xxSD00 / L-509.xASD00: 60

N

typ.

Push/pull force Fx,
power on

60

N

max.

Permissible lateral force

50

N

max.

Load capacity

100

N

max.

Permissible torque Mx
in θX

30

N·m

max.

Permissible torque My
in θY

25

N·m

max.

Permissible torque Mz
in θZ

20

N·m

max.

mm

87

MOTION|POSITIONING

L-509.xxADxx

L-509.xxSD00 / L-509.xASD00

Motor type

ActiveDrive DC motor (PWM)

Stepper motor, 2-phase

Operating voltage,
nominal24

Operating voltage, max.

24

Stages with stepper
motor and ActiveDrive
DC motor

Unit

Tolerance

24

V

nom.

48

V

max.

Tolerance

Drive properties

L-509.xxADxx

L-509.xxSD00

L-509.xASD00

Unit

Operating temperature
range

5 to 40

5 to 40

5 to 40°C

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Mass

L-509.10AD10: 1.4
L-509.20AD10: 1.5
L-509.40AD10: 1.7
L-509.14AD00: 1.4
L-509.24AD00: 1.6
L-509.44AD00: 1.8

L-509.10SD00: 1.4
L-509.20SD00: 1.5
L-509.40SD00: 1.7

L-509.1ASD00: 1.5
L-509.2ASD00: 1.6
L-509.4ASD00: 1.8

kg

±5 %

Moved mass, unloaded

L-509.x0AD10: 0.22
L-509.14AD00: 0.24
L-509.24AD00: 0.24
L-509.44AD00: 0.25

0.22

L-509.1ASD00: 0.24
L-509.2ASD00: 0.24
L-509.4ASD00: 0.25

kg

±5 %

Connection

1 × Sub-D 15 (m)(motor/sensor)

1 × HD Sub-D 26 (m)(motor)1 × HD Sub-D 26 (m)(motor)1 × Sub-D 9 (m) (sensor)

Recommended
controllers / drivers

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular controller

Stages with DC motor
and BLDC motor

L-509.xxDG10

L-509.xx3111 /L-509.xx3132

L-509.xx5132

Unit

Tolerance

Active axes

X

X

X

Travel range

L-509.10DG10: 26
L-509.20DG10: 52
L-509.40DG10: 102

L-509.023xxx: 26
L-509.033xxx: 52
L-509.053xxx: 102

L-509.025132: 26
L-509.035132: 52
L-509.055132: 102

mm

Pitch / yaw

L-509.10DG10: ±60
L-509.20DG10: ±90
L-509.40DG10: ±120

L-509.023xxx: ±60
L-509.033xxx: ±90
L-509.053xxx: ±120

L-509.025132: ±60
L-509.035132: ±90
L-509.055132: ±120

μrad

typ.

Straightness / ﬂatness

L-509.10DG10: 2
L-509.20DG10: 4
L-509.40DG10: 8

L-509.023xxx: 2
L-509.033xxx: 4
L-509.053xxx: 8

L-509.025132: 2
L-509.035132: 4
L-509.055132: 8

μm

typ.

Velocity

3

50

50

mm/s

max.

Miscellaneous

Motion88

W W W. P I . W S

L-509.xxDG10

L-509.xx3111

L-509.xxx132

Unit

Tolerance

Integrated sensor

Incremental rotary
encoder

Incremental linear
encoder

Incremental rotary
encoder

Sensor signal

A/B quadrature, TTL

Sin/cos, 1 V peak-peak,
20 μm signal period

A/B quadrature, TTL

Design resolution

0.008

0.005

0.05

μm

Sensor resolution
rotary encoder

4096

–

20000

Cts./rev.

Sensor resolution
linear encoder

–

–

μm

Minimum incremental
motion

0.1

0.1

0.5

μm

typ.

Unidirectional
repeatability

0.1

0.1

0.2

μm

typ.

Bidirectional repeatability

±2

±0.2

±0.5

μm

typ.

Reference and limit
switches

Optical

Optical

OpticalUnit

Tolerance

L-509.xxDG10

L-509.xx3xxx
L-509.xx5xxx

Drive screw type

Crossed roller guide with anti-creep
systemCrossed roller guide with anti-creep
systemDrive screw pitch1

1

Gear ratio

2401:81–Translation Stages

Positioning

Mechanical propertiesmm

Guide type

Recirculating ball bearings

Recirculating ball bearings

Holding force, power off

L-509.10DG10: 40
L-509.20DG10: 60
L-509.40DG10: 60

20

N

typ.

Push/pull force Fx,
power on

60

60

N

max.

Permissible lateral force

50

50

N

max.

Load capacity

100

100

N

max.

Permissible torque Mx
in θX

30

30

N·m

max.

Permissible torque My
in θY

25

25

N·m

max.

Permissible torque Mz
in θZ

20

20

N·m

max.

Unit

Tolerance

L-509.xxDG10

L-509.xx3xxx

L-509.xx5xxx

Motor typeDC motor(with gearhead)DC motor

Brushless DC motor,
3-phaseOperating voltage,
nominal

24

24

24

V

nom.

Operating voltage, max.

48

48

48

V

max.

Drive properties

89

MOTION|POSITIONING

Stages with DC motor
and BLDC motor

L-509.xxDG10

L-509.xx3xxx

L-509.xx5132

Unit

Tolerance

Operating temperature
range

5 to 40

5 to 40

5 to 40°C

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Mass

L-509.10DG10: 1.4
L-509.20DG10: 1.6
L-509.40DG10: 1.9

L-509.023xxx: 1.2
L-509.033xxx: 1.3
L-509.053xxx: 1.5

L-509.025132: 1.4
L-509.035132: 1.5
L-509.055132: 1.7

kg

±5 %

Moved mass, unloaded

0.22

L-509.023111: 0.24
L-509.033111: 0.24
L-509.053111: 0.25

0.22

kg

±5 %

Connection

1 × HD Sub-D 26 (m)(motor/sensor)

1 × HD Sub-D 26 (m)(motor)L-509.xx3111 additional:
1 × Sub-D 9 (m) (sensor)

1 × HD Sub-D 26 (m)(motor/sensor)

Recommended
controllers / drivers

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

C-891 (single axis)
C-885 with
C-891.10C885(up to 20 axes)
ACS modular controller

Miscellaneous

All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

L-509 versions with DC and BLDC motor, dimensions in mm

L-509.023111
L-509.023132
L-509.025132
L-509.033111
L-509.033132
L-509.035132
L-509.053111
L-509.053132
L-509.055132

A

B

C

D

157.3
157.3
157.3
166.8
166.8
166.8
191.8
191.8
191.8

100
100
100
100
100
100
150
150
150

135.3
135.3
135.3
154.3
154.3
154.3
204.3
204.3
204.3

104.4
–
–
104.4
–
–
104.4
–
–

90

W W W. P I . W STranslation Stages

Detail drawing of the L-509 motion platform

L-509 versions with DC gear motor, dimensions in mm

L-509.10DG10
L-509.20DG10
L-509.40DG10

A

B

C

D

157.3
166.8
191.8

100
100
150

135.3
154.3
204.3

106
106
106

91

MOTION|POSITIONING

L-509 versions with stepper motor, dimensions in mm

L-509.10SD00
L-509.1ASD00
L-509.20SD00
L-509.2ASD00
L-509.40SD00
L-509.4ASD00

A

B

C

D

E

129.3
129.3
138.8
138.8
163.8
163.8

100
100
100
100
150
150

135.3
135.3
154.3
154.3
204.3
204.3

78
78
78
78
78
78

–
104.2
–
104.2
–
104.2

92

W W W. P I . W STranslation Stages
L-509 versions with ActiveDrive DC motor, dimensions in mm

L-509.10AD10
L-509.14AD00
L-509.20AD10
L-509.24AD00
L-509.40AD10
L-509.44AD00

A

B

C

D

E

157.3
157.3
166.8
166.8
191.8
191.8

100
100
100
100
150
150

135.3
135.3
154.3
154.3
204.3
204.3

106
106
106
106
106
106

–
104.2
–
104.2
–
104.2

93

MOTION|POSITIONING

L-511 High-Precision Linear Stage
High Travel Accuracy■

Travel ranges to 155 mm (6”)■

Repeatability to 0.1 μm■

ActiveDrive DC, DC, BLDC, and DC gear motors■

Stepper motors■

Optional linear encoder for direct position measurement■

Direction-sensing reference
nce point switch

Reference-class linear stage

Drive types

Recirculating ball bearings for high travel accuracy and load capacity. Precisionball screw with 2 mm pitch. Stress-relieved aluminum base for highest stability. Noncontact limit switches. Noncontact optical reference point switch withdirection sensing in the middle of the travel range.

■.xxAD variant: ActiveDrive DC motor for highvelocity: Control via pulse-width-modulated(PWM) signals, the operating voltage isattained via an amplifier integrated in the
motor housing.

■.xxDG variant: DC servo motor with gearhead
for high torques and resolution at low motor
power

■

.xxSD variant: 2-phase stepper motor for
low velocity and high resolution■.xx3xxx variant: DC motor■.xx5xxx variant: Brushless DC motor

Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the actual position directly at the
motion platform with the greatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on position measuring.
Minimum incremental motion and slow motion
In conjunction with the SMC Hydra controller, versions with stepper motor andintegrated linear encoder (L-511.xASD00) achieve repeatable minimum incremental motion in the range of the sensor resolution. The same configurationachieves constant low velocities of a few sensor increments per second.

Applications

Position measurement■

Integrated rotary encoder on the motor
shaft (xxAD10, xxDG10, xxxx32).

■

Incremental linear encoder(xxAD00, xASD00, xxxx11).

>> ActiveDrive■ Autofocus■ Laser Cutting>> Linear Encoder■ Biotechnology■ Optical Alignment>> Vacuum-Compatible Versions■ Automation■ Scientific Instrumentation

Technology Glossary ...................... page 290

94

W W W. P I . W S

L-511.xxADxx

L-511.xxSD00 / L-511.xASD00

Unit

Tolerance
Translation Stages

Stages with stepper
motor and ActiveDrive
DC motor
MotionActive axes

X

X

Travel range

L-511.2xADxx: 52
L-511.4xADxx: 102
L-511.6xADxx: 155

L-511.2xSD00: 52
L-511.4xSD00: 102
L-511.6xSD00: 155mm

Pitch / yaw

L-511.2xADxx: ±40
L-511.4xADxx: ±60
L-511.6xADxx: ±70

L-511.2xSD00: ±40
L-511.4xSD00: ±60
L-511.6xSD00: ±70

μrad

typ.

Straightness / ﬂatness

L-511.2xADxx: ±1.5
L-511.4xADxx: ±2.5
L-511.6xADxx: ±3.0

L-511.2xSD00: ±1.5
L-511.4xSD00: ±2.5
L-511.6xSD00: ±3.0

μm

typ.

Velocity

90

45

mm/s

max.

Unit

Tolerance

L-511.xxADxx

L-511.xxSD00

L-511.xASD00

Integrated sensor

L-511.xxAD10:
Incremental rotary
encoder
L-511xxAD00:
Incremental linear
encoder–

Incremental linear
encoder

Sensor signal

A/B quadrature, TTL–

Sin/cos, 1 V peak-peak,
20 μm signal period

Design resolution

L-511.xxAD10: 0.122
L-511.xxAD00: 0.05

10.0

0.005

μm

Sensor resolution
rotary encoder

L-511.xxAD10: 16384––

Cts./rev.

Sensor resolution
linear encoder

L-511.xxAD00: 0.05

–

0.005

μm

Resolution stepper
motor

–

200

200

Full steps/
rev.

Minimum incremental
motionL-511.xxAD10: 0.488
L-511.xxAD00: 0.1

0.2

0.02

μm

typ.

Unidirectional
repeatability

L-511.xxAD10: 0.488
L-511.xxAD00: 0.1

0.2

0.1

μm

typ.

Bidirectional
repeatability

L-511.xxAD10: ±1.250
L-511.xxAD00: ±0.2

±2

±0.2

μm

typ.

Reference and limit
switches

Optical

Optical

OpticalUnit

Tolerance

Positioning

L-511.xxADxx / L-511.xxSD00 / L-511.xASD00
Mechanical properties
Drive screw type

Ball screw

Drive screw pitch

2

Guide type

Recirculating ball bearings

Holding force, power off

L-511.xxADxx: 20
L-511.xxSD00 / L-511.xASD00: 60

N

typ.

Push/pull force Fx,
power on

100

N

max.

Permissible lateral force

250

N

max.

Load capacity

500

N

max.

Permissible torque Mx
in θX

60

N·m

max.

Permissible torque My
in θY

30

N·m

max.

Permissible torque Mz
in θZ

30

N·m

max.

mm

95

MOTION|POSITIONING

L-511.xxADxx

L-511.xxSD00 / L-511.xASD00

Motor type

ActiveDrive DC motor (PWM)

Stepper motor, 2-phase

Operating voltage,
nominal24

Operating voltage, max.

24

Stages with stepper
motor and ActiveDrive
DC motor

Unit

Tolerance

24

V

nom.

48

V

max.

Tolerance

Drive properties

L-511.xxADxx

L-511.xxSD00

L-511.xASD00

Unit

Operating temperature
range

5 to 40

5 to 40

5 to 40°C

Material

Aluminum,
stainless steel

Aluminum,
stainless steel

Aluminum,
stainless steel

Mass

L-511.2xADxx: .2.5
L-511.40AD10: 2.8
L-511.60AD10: 3.3
L-511.44AD00: 2.7
L-511.64AD00: 3.5

L-511.20SDxx: 2.4
L-511.40SDxx: 2.6
L-511.60SDxx: 3.1

L-511.2ASDxx: 2.4
L-511.4ASDxx: 2.6
L-511.6ASDxx: 3.1

kg

±5 %

Moved mass, unloaded

L-511.2xADxx: 0.6
L-511.4xADxx: 0.6
L-511.6xADxx: 0.65

L-511.20SDxx: 0.6
L-511.40SDxx: 0.6
L-511.60SDxx: 0.65

L-511.2ASDxx: 0.6
L-511.4ASDxx: 0.6
L-511.6ASDxx: 0.65

kg

±5 %

Connection

1 × Sub-D 15 (m)(motor/sensor)

1 × HD Sub-D 26 (m)(motor)1 × HD Sub-D 26 (m)(motor)1 × Sub-D 9 (m) (sensor)

Recommended
controllers / drivers

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular controller

Stages with DC motor
and BLDC motor

L-511.xxDG10

L-511.xx3111 / L-511.xx3132
L-511.xx5111 / L-511.xx5132

Unit

Tolerance

Active axes

X

X

Travel range

L-511.20DG10: 52
L-511.40DG10: 102
L-511.60DG10: 155

L-511.03xxxx: 52
L-511.05xxxx: 102
L-511.07xxxx: 155mm

Pitch / yaw

L-511.20DG10: ±40
L-511.40DG10: ±60
L-511.60DG10: ±70

L-511.03xxxx: ±40
L-511.05xxxx: ±60
L-511.07xxxx: ±70

μrad

typ.

Straightness / ﬂatness

L-511.20DG10: ±1.5
L-511.40DG10: ±2.5
L-511.60DG10: ±3.0

L-511.03xxxx: ±1.5
L-511.05xxxx: ±2.5
L-511.07xxxx: ±3.0

μm

typ.

Velocity

6

90

mm/s

max.

Miscellaneous

Motion96

W W W. P I . W S

L-511.xx3111 /L-511.xx5111

L-511.xx3132 /L-511.xx5132

Unit

Tolerance

Integrated sensor

Incremental rotary
encoder

L-511.xx3111:
Incremental linear
encoder
L-511.xx5111:
Incremental rotary
encoder, incremental
rotary encoder

Incremental rotary
encoder

Sensor signal

A/B quadrature, TTL

Linear encoder:
Sin/cos, 1 V peak-peak,
20 μm signal period
Rotary encoder:A/B quadrature, TTL

A/B quadrature, TTL

Design resolution

0.017

L-511.xx3111: 0.005
L-511.xx5111: 0.05

0.1

μm

Sensor resolution
rotary encoder

4096

20000

20000

Cts./rev.

Sensor resolution
linear encoder–

L-511.xx3111: 0.005
L-511.xx5111: 0.05

0.1

μm

Minimumincremental motion

0.1

0.1

0.2

μm

typ.

Unidirectional
repeatability

0.2

0.1

0.2

μm

typ.

Bidirectional
repeatability

±2

±0.1

±1.25

μm

typ.

Reference and limit
switches

Optical

Optical

OpticalUnit

Tolerance

Translation Stages

L-511.xxDG10
Positioning

L-511.xxDG10

L-511.xx3xxx /L-511.xx5xxx

Mechanical properties
Drive screw type

Ball screw

Ball screw

Drive screw pitch2

2

Gear ratio

2401:81–

Guide type

Recirculating ball bearings

Recirculating ball bearings

Holding force,
power off

100

20

N

typ.

Push/pull force Fx,
power on

100

100

N

max.

mm

Permissible lateral force

250

250

N

max.

Load capacity

500

500

N

max.

Permissible torque Mx
in θX

60

60

N·m

max.

Permissible torque My
in θY

30

30

N·m

max.

Permissible torque Mz
in θZ

30

30

N·m

max.

97

MOTION|POSITIONING

Stages with DC motor
and BLDC motor

L-511.xxDG10

L-511.xx3xxx

L-511.xx5xxx

Unit

Tolerance

Motor typeDC motor(with gearhead)DC motor

Brushless DC motor,
3-phaseOperating voltage,
nominal

24

24

24

V

nom.

Operating voltage, max.

48

48

48

V

max.

Operating temperature
range

5 to 40

5 to 40

5 to 40°C

Mass

L-511.20DG10: 2.5
L-511.40DG10: 2.7
L-511.60DG10: 2.9

L-511.033xxx: 2.5
L-511.053xxx: 2.6
L-511.073xxx: 3.1

L-511.035xxx: 2.4
L-511.055xxx: 2.7
L-511.075xxx: 3.0

kg

±5 %

Moved mass, unloaded

L-511.20DG10: 0.6
L-511.40DG10: 0.6
L-511.60DG10: 0.65

L-511.033xxx: 0.6
L-511.053xxx: 0.6
L-511.073xxx: 0.65

L-511.035xxx: 0.6
L-511.055xxx: 0.6
L-511.075xxx: 0.65

kg

±5 %

Connection

1 × HD Sub-D 26 (m)(motor/sensor)

L-511.xx3111:
1 × HD Sub-D 26 (m)(motor),1 × Sub-D 9 (m) (sensor)
L-511.xx3132:
1 × HD Sub-D 26 (m)(motor/sensor)

L-511.xx5111:
1 × HD Sub-D 26 (m)(motor/sensor),
1 × Sub-D 9 (m) (sensor)
L-511.xx5132:
1 × HD Sub-D 26 (m)(motor/sensor)

Recommended
controllers / drivers

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular controller

L-511.xx5111:
C-891 (single axis)
C-885 with
C-891.10C885(up to 20 axes)
ACS modular controller
L-511.xx5132 additional:
SMC Hydra(double axis)

Drive properties

Miscellaneous

All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

The L-511 reliably performs repeatable 20-nm steps with the linear encoder
and SMC Hydra motion controller

98

W W W. P I . W STranslation Stages

L-511 versions with DC and BLDC motor, and rotary encoder, dimensions in mm

L-511.033132
L-511.035132
L-511.053132
L-511.055132
L-511.073132
L-511.075132

A

B

C

186
186
211
211
261
261

–
–
–
–
250
250

210
210
260
260
360
360

A

B

C

186
211
261
186
211
261

–
–
250
–
–
250

210
260
360
210
260
360

L-511 versions with DC and BLDC motor, and linear encoder, dimensions in mm

L-511.033111
L-511.053111
L-511.073111
L-511.035111
L-511.055111
L-511.075111

99

MOTION|POSITIONING

L-511 versions with DC gear motor, dimensions in mm

L-511.20DG10
L-511.40DG10
L-511.60DG10

A

B

C

D

186
211
261

–
–
250

210
260
360

131
131
131

A

B

C

D

158
158
183
183
233
233

–
–
–
–
250
250

210
210
260
260
360
360

103
103
103
103
103
103

L-511 versions with stepper motor, dimensions in mm

L-511.20SD00
L-511.2ASD00
L-511.40SD00
L-511 4ASD00
L-511.6OSD00
L-511.6ASD00

100

W W W. P I . W STranslation Stages

L-511 versions with ActiveDrive DC motor, dimensions in mm

L-511.20AD10
L-511.24AD00
L-511.40AD10
L-511.44AD00
L-511.60AD10
L-511.64AD00

A

B

C

D

186
186
211
211
261
261

–
–
–
–
250
250

210
210
260
260
360
360

131
131
131
131
131
131

Detail drawing of the L-511 motion platform, dimensions in mm

101

MOTION|POSITIONING

V-551 PIMag® Precision Linear Stage
High Velocity and Precision due to Magnetic Direct Drive■

Travel ranges to 230 mm■

Velocity up to 0.5 m/s■

Absolute encoder with 1 nm resolution■

Highest precision with PIOne linear encoder:coder:
Minimum incremental motion 0.5 nm■

High guiding accuracy■

Compact design with 160 mm width■

Crossed roller guide, anti-creep

Reference-class linear stage

PIMag® magnetic direct drive

Thanks to the smooth-running precision linear guides with crossed roller bearings, the linear stage is particularly suitable for scanning applications with constant velocity. The anti-creep system reliably prevents cage creep. The guides
have high load capacity and high precision under all operating conditions.

3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit
the drive force to the motion platform directly
and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with thehighest demands on precision because there isno undesirable interaction with the permanent
magnets. This allows smooth running even at thelowest velocities and at the same time, there
is no vibration at high velocities. Nonlinearity incontrol behavior is avoid-ed and any position canbe controlled easily. The drive force can be set
freely.

Direct position measurement
Position measuring takes place directly at the motion platform with the highest
accuracy so that nonlinearity, mechanical play or elastic deformation have noinfluence on position measuring. The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured values,
allows a position resolution of much less than one nanometer. The opticaland noncontact PIOne encoders are based on an interferometric measuring
principle. Due to the short signal period and the high quality of the signals,
the linearity error of PIOne encoders is less than 1 %. PIOne encoders support
direction sensing when evaluating a reference signal. Absolute encoders
supply explicit position information that enables immediate determinationof the position. This means that referencing is not required during switch-on,
which increases efficiency and safety during operation.

Applications>> Absolute Encoder■ Biotechnology■ Photonics>> Linear Encoder■ Electronics Manufacturing■ Scanning>> PIMag® Magnetic Linear Motors■ Medical Industry■ Semiconductor■ Metrology / Testing

Technology Glossary ...................... page 290

102

W W W. P I . W S

V-551.2x

V-551.4x

V-551.7x
X

Unit

Tolerance

Active axes

X

X

Travel range

60

130

230

mm

Pitch

±50

±100

±100

μrad

typ.

Yaw

±50

±50

±50

μrad

typ.

Straightness

±1

±1

±2

μm

typ.

Flatness

±2

±2

±2

μm

typ.

Velocity

0.5

0.5

0.5

m/s

max.

Load capacity in Z

150

150

150

N

max.

Load capacity in Y

50

50

50

N

max.

Moved mass

2.2

2.7

4.9

kg

Overall mass

4.2

5.5

9.7

kg

Linear guide

Crossed roller bearing
with anti-creep system

Crossed roller bearing
with anti-creep system

Crossed roller bearing
with anti-creep system

Translation Stages

Motion and positioning

Mechanical properties

V-551

Unit

Tolerance

Drive properties
Drive type

PIMag® linear motor, ironless, 3-phase

Intermediate
circuit voltage

110 *

V DC

max.

Peak force

180

N

typ.

Nominal force

27

N

typ.

Peak current, effective

10

A

typ.

Nominal current, effective

1.5

A

typ.

Force constant, effective

18

N/A

typ.

Resistance per phase

3.15

Ω

typ.

Inductance per phase

0.9

mH

typ.

Back EMF phase-phase

16

V·s/m

max.

V-551.xB

V-551.xD

Integrated Sensor

Absolute encoder

PIOne incremental linear encoder

Sensor signal

BiSS-C

Sin/cos, 1 V peak-peak, 2 μm signal period

Sensor resolution

1 nm

0.2 nm**Min. incremental motion

2 nm

0.5 nmUnidirectional
repeatability

0.02 μm

0.02 μm

Bidirectional repeatability±0.05 μm

±0.05 μm

Travel range limit

Limits are set via software;
additional mechanical stop buffers.

Hall effect limit switches

Encoder options

Reference point switch–

Encoder index

Reference point switch
repeatability

–

<1 μm

V-551
Miscellaneous
Operating temperature
range

10 °C to 50 °C

Humidity

20 – 90 % rel., not condensing

Material

Aluminum, black anodized

Motor connector

HD Sub-D 26 (m)Sensor connection

Sub-D 15 (f)Recommended
controllers

C-891 (single axis)
C-885 with C-891.10C885 (up to 20 axes)
ACS modular controller* 24 V DC with C-891.120200** interpolated

Ask about custom designs.

103

MOTION|POSITIONING

V-551, dimensions in mm

V-551.4x :B
D x 405
D x 40C
F x 100
E

20

20

S

160
130
110
40

Y

X

79,85

M4

50,5

A

StrokeA
B
C
D
E
F

V-551.2x

V-551.4x

V-551.7x

60
220
210
60
1
–
1

130
290
280
120
1
40
1

230
450
440
120
3
40
3

104

W W W. P I . W STranslation Stages

G
H

50,5

50,5

I

8,5

8,5

30

30

75
100

30

30

79,85

79,85

4

M
4

M

6

M

4,
4
6,

V-551.4x

V-551.7x

125
175
130

225
200
130

225
250
190

A V-551.4D with PIOne linear encoder performs a sequence of 0.5-nm steps.

7,5

M

4

4

G
H
I

V-551.2x20

A V-551.4D with PIOne linear encoder performs a sequence of 1-nm steps.

105

MOTION|POSITIONING

M-511 / M-521 / M-531
High-Precision Linear Stage
High Travel Accuracy, Long Travel Ranges, Many Motor Variants■

Travel ranges 102, 204, and 306
06 mm(4”, 8”, 12”)■Max. velocity to 100 mm/s■

Encoder resolution 50 nm■

Load capacity to 100 kg■

Zero-play ball screw■

XY and XYZ combinations

M-511, M-521, M-531, dimensions in mm

M-511.xx1
M-521.xx1
M-531.xx1

L

A

B

C

400
500
600

250
350
450

186,5
236,5
286,5

283
383
483

Applications>> ActiveDrive■ Metrology / Testing■ Sample Inspection■ Optical Alignment■ Scientific Instrumentation>> Linear Encoder■ Photonics

Technology Glossary ...................... page 290

106

W W W. P I . W S

M-5x1.EC /M-5x1.PD1

M-5x1.DG1 /M-5x1.PG1

Unit

Tolerance

Travel range

M-511: 102 (4”) /M-521: 204 (8”) /M-531: 306 (12”)

M-511: 102 (4”) /M-521: 204 (8”) /M-531: 306 (12”)

M-511: 102 (4”) /M-521: 204 (8”) /M-531: 306 (12”)

mmIntegrated sensor

Linear encoder

Rotary encoder

Rotary encoder

Sensor resolution linear
encoder

0.05

Sensor resolution rotary
encoder

–

4096

2048

Design resolution

0.05

0.488

0.033

μm

typ.

Minimum incremental
motion

0.1

0.5

0.4

μm

typ.

Unidirectional
repeatability

0.1

0.5

0.4

μm

typ.

Bidirectional repeatability

±0.2

–

–

μm

typ.

Backlash

–

1

1

μm

typ.

Pitch / yaw per 100 mm

±35

±35

±35

μrad

typ.

Straightness / ﬂatness
per 100 mm

1

1

1

μm

Velocity

50

100

6

mm/s

2

2

2

mm

Motion and positioning

μm
Cts./rev.

max.

Mechanical properties
Drive screw pitch of ballscrew
Gear ratio––(28/12)4 ~ 29.6:1

Load capacity

1000

1000

1000

N

Push/pull force

80

80

80

N

max.

Permissible lateral force

200

200

200

N

max.

Motor typeDC motor with PWM
control

DC motor with PWM
control*

DC gear motor

Motor resolution

–

–

–

Guide

Recirculating ballbearings

Recirculating ballbearings

Recirculating ballbearings

Operating voltage

2424

M-5x1.DG1: 0 to ±12
M-5x1.PG1: 24

V

Motor power

30

60

3

W

nom.

Torque

80

70

5

mN·m

nom.

Reference and limit
switches

Hall effect

Hall effect

Hall effectOperating temperature
range

10 to 50

–20 to 65–20 to 65°C

Material

Aluminum,
black anodized

Mass

5 (M-511) /6.1 (M-521) /7.2 (M-531)

5 (M-511) /6.1 (M-521) /7.2 (M-531)

5 (M-511) /6.1 (M-521) /7.2 (M-531)

kg

Connector

Sub-D 15,3 m incl. cable

Sub-D 15,3 m incl. cable

Sub-D 15,3 m incl. cable

Recommended
controllers

C-863
C-884

C-863
C-884

C-863
C-884

max.

Drive properties

steps/rev.

Miscellaneous±5 %* M-5xx.EC: Brushless DC motor with integrated block commutation (PWM control).
Ask about custom designs!

107

MOTION|POSITIONINGTranslation Stages

M-5x1.DD1 /M-5x1.DD2

HPS-170
High-Precision Linear Stage for Heavy Loads
Excellent Repeatability and Travel Accuracy■

Travel ranges from 52 to 205 mm(2 to 8”)■Max. velocity to 10
100 mm/s■

Load capacity to 3
35 kg

■

Optional linear en
encoder for direct
position measurem
measurement■

Crossed roller gui
guide, anti-creep

Direction of the axes
and torques for linear stages

Applications>> ActiveDrive■ Laser Marking■ Sample Inspection■ Metrology / Testing■ Semiconductor>> Linear Encoder

Technology Glossary ...................... page 290

108

W W W. P I . W S

626291x10

626292x00

626292x10-0001

Linear stage withDC motor androtary encoder

Additionally withlinear encoder

Linear stage withstepper motor

Additionally withlinear encoder

Unit

Tolerance
Translation Stages

Active axes

626291x00

X

X

Travel range

52 / 102 / 155 /205

52 / 102 / 155 /205

Integrated sensor

Rotary encoder

Rotary and linear
encoder–

Sensor signal rotary
encoder

A/B quadrature,
RS-422

A/B quadrature,
RS-422–

Sensor signal linear
encoder–

A/B quadrature,
RS-422–

Sin/cos, 1 V
peak-peak, 20 μm
signal period

Design resolution

0.1

0.05

10 (full step)

0.005

Sensor resolution rotary
encoder

20000

20000

–

Sensor resolution
linear encoder

–

0.05

–

–

μm

typ.

Minimum incremental
motion

0.2

0.2

0.2

0.05

μm

typ.

Unidirectional
repeatability

0.2

0.2

0.2

0.05

μm

typ.

Bidirectional
repeatability

±2

±0.2

±2

±0.05

μm

typ.

Pitch

±20 / ±25 / ±30 /±35±20 / ±25 / ±30 /±35±20 / ±25 / ±30 /±35±20 / ±25 / ±30 /
±35

μrad

typ.

Yaw

±40

±40

±40

±40

μrad

typ.

Straightness / ﬂatness±0.75 / ±1 / ±2 /±3±0.75 / ±1 / ±2 /±3±0.75 / ±1 / ±2 /±3±0.75 / ±1 / ±2 /
±3

μrad

typ.

Max. velocity

100

100

35

35

mm/s

Guide type

Crossed roller
guide with anticreep system

Crossed roller
guide with anticreep system

Crossed roller
guide with anticreep system

Crossed roller
guide with anticreep system

Drive screw type

Ball screw

Ball screw

Ball screw

Ball screw

Drive screw pitch

2

2

2

2

mm

Load capacity

350

350

350

350

N

Push/pull force

100

100

150

150

N

max.

Holding force

20

20

60

60

N

max.

Motion and positioningmm
Linear encoderμm
Cts./rev.

Mechanical properties

max.

Permissible lateral force

150

150

150

150

N

max.

Permissible torque Mx
in θX

400

400

400

400

Nm

max.

Permissible torque My
in θY

300

300

300

300

Nm

max.

Permissible torque Mz
in θZ

300

300

300

300

Nm

max.

Motor typeDC motor

DC motor

2-phase stepper
motor

2-phase stepper
motorOperating voltage,
nominal

24

24

24

24

V

nom.

Operating voltage, max.

48

48

48

48

V

nom.

Peak current, effective

3.8

3.8

1.2

1.2

A

typ.

Torque constant,effective

0.03

0.03

N·m/A

typ.

Electrical time constant6

6

Resistance phase-phase

0.62

0.62

3.3

3.3

Ω

typ.

Inductance phase-phase

0.13

0.13

2.8

2.8

mH

typ.

Back EMF phase-phase

0.00349

0.00349

V/kRPMmax.

Limit switches

mechanicalmechanicalmechanicalmechanical

Drive properties

ms

109

MOTION|POSITIONING

626291x00

626291x10626292x00

626292x10-0001

Unit

Linear stage withDC motor androtary encoder

Additionally withlinear encoder

Linear stage withstepper motor

Additionally withlinear encoder

Operating temperature
range

5 to 40

5 to 40

5 to 40

5 to 40

°C

MTBF

10000

10000

–

–

h

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Aluminum, steel

Mass

5.1 / 5.8 / 6.6 / 7.5

5.1 / 5.8 / 6.6 / 7.5

5 / 5.7 / 6.5 / 7.4

5 / 5.7 / 6.5 / 7.4

Moved mass

1.1

1.4

1.1

1.4

Connection

Sub-D 15 (m)Motor:
Sub-D 15 (m)Sensor:
Sub-D 9 (m)Sub-D 15 (m)Motor:
Sub-D 15 (m)Sensor:
Sub-D 9 (m)Recommended
controllers

C-863(single axis)
with C-863.AD12
line driver
C-884(to 6 axes) with
C-863.AD12
line driver
C-885 with
C-863.20C885(to 40 axes)
and C-863.AD12
line driver
ACS modular
controller

C-863(single axis)
with C-863.AD12
line driver
C-884(to 6 axes) with
C-863.AD12
line driver
C-885 with
C-863.20C885(to 40 axes)
and C-863.AD12
line driver
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

Tolerance

Miscellaneous

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

HPS-170, DC motor, dimensions in mm

HPS-170, stepper motor, dimensions in mm

110

W W W. P I . W S

kg

±5 %

Translation Stages
HPS-170, dimensions in mm

Travel range/mm

52

102

155

205

A/mm
B/mm
C/mm

261
127.5
3

311
152.5
3

381
187.5
3

456
225
6

111

MOTION|POSITIONING

A-141 PIglide MB Miniature
Linear Stage with Air Bearings
High Performance, Cleanroom Compatible, Customizable■

Size of the motion platform 57 mm × 93 mm■

Low profile 38 mm■

Travel ranges to 35 mm■

Load capacity to 3 kg■

Velocity to 0.25 m/sec■

Acceleration to 3.5 m/s²

Accessories and options

A-141.035A1, dimensions in mm

Applications■

PIglide filter and air preparation kits■

Single and multi-axis motion controller■

XY setups and individual configurations■

Counterbalance options for vertical (Z)orientations■

Base plates made of granite and systems
for reducing vibration>> Air bearings■ Precision Micro Assembly■ Photonics>> Linear encoder■ Scanning■ Optical Alignment>> Linear motor
Technology Glossary ...................... page 290

112

W W W. P I . W S

Unit

Translation Stages

A-141

Tolerance

MotionActive axes

X

Travel range

35

mm

Pitch / yaw (1)over the entire travel range

10

μrad

max.

Straightness / ﬂatness (1)over the entire travel range

0.5

μm

max.

Velocity (2), unloaded

0.25

m/s

max.

Acceleration (2), unloaded

3.5

m/s²

max.

Load capacity in z (3)

3

kg

max.

Moved mass

0.3

kg

Overall mass

0.6

kg

Guide typeAir bearing

Mechanical properties

Drive properties
Drive typeLinear motor, ironless, 3-phase

Intermediate circuit voltage, effective

48, nominal
80, max.

V DC

Peak force

2.3

N

typ.

Nominal force

0.58

N

typ.

Force constant, effective

2.1

N/A

typ.

Resistance phase-phase

22.4

Ω

typ.

Inductivity phase-phase

1.0

mH

typ.

Back EMF phase-phase

0.7

V·s/m

max.

Cabling

Internal, no moving cable

Positioning
Integrated sensor

Incremental linear encoder with travel range limits
and home index

Sensor signal

Sin/cos, 1 V peak-peak, 20 μm signal period

Sensor resolution

1.2 nm (4)Bidirectional repeatability±0.1 μm (4)Accuracy, uncompensated (5)±2.0 μm

Accuracy, with error compensation (5)±0.25 μm

Miscellaneous
Operating pressure (6)65±5 psi (450±35 kPa)

Air consumption<1.0 SCFM (28 SLPM)

Air quality

Clean (unﬁltered to 1.0 μm or better) – ISO 8573-1 class 1
Oil free – ISO 8573-1 class 1
Dry (–15 °C dew point) – ISO 8573-1 class 3

Materials

Hardcoat aluminum, stainless steel fasteners(1) Dependent on the flatness of the surface, on which the stage is mounted.
(2) Can be limited by the payload, controller or drive.
(3) Assumes payload CG is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only.
(4) Assumes 16384x interpolation. Contact PI for the use of other factors.
(5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.
Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.
(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the E-Stop input of the controller.

113

MOTION|POSITIONING

A-121 PIglide AT1 Linear Stage with Air Bearings
High Performance Small Footprint Nanopositioning Stage■

Ideal for scanning applications
or high-precision positioning■

Cleanroom compatible■

Size of the motion platform
115 mm × 115 mm■

Travel ranges to 350 mm■

Low profile from 60 mm■

Resolution to 1 nm■

Best flatness / straightness■

Counterbalance options forvertical assembly

A-121, dimensions in mm

Applications

MODEL

A

A-121.050
A-121.100
A-121.150
A-121.200
A-121.250
A-121.350

240
290
340
390
440
540

B

C

D

E

F

G

100

75
100
125
150
150
200

25
50
75
100
125
175

30
55
80
105
130
180

4
4
6
6
6
10

126.5
151.5
176.5
201.5
226.5
276.5

>> Air bearings■ Sample Inspection■ Photonics>> Linear encoder■ Scanning■ Flatpanel Inspection>> Linear motor■ Metrology / Testing

Technology Glossary ...................... page 290

114

W W W. P I . W S

A-121.050

A-121.100

A-121.150

A-121.200

A-121.250

A-121.350

Unit

Tolerance

X
50
12
±0.5
0.1

X
100
12
±0.5
0.1

X
150
15
±0.5
0.1

X
200
20
±0.75
0.1

X
250
25
±0.75
0.1

X
350
35
±1.25
0.1

mm
μrad
μm
μm

max.
max.
max.

1
20

1
20

1
20

1
20

1
20

1
20

m/s
m/s²

max.
max.

100
40
1.2
3.5
Air bearing

100
40
1.2
4.2
Air bearing

100
40
1.2
4.5
Air bearing

100
40
1.2
5.2
Air bearing

100
40
1.2
5.7
Air bearing

100
40
1.2
6.8
Air bearing

N
N
kg
kg

max.
max.

Unit

Tolerance

A-121
Drive properties
Drive typeIntermediate circuit voltage,effective
Peak force
Nominal force
Force constant, effective
Resistance phase-phase
Inductivity phase-phase
Back EMF phase-phase
Cabling

Positioning
Integrated Sensor
Sensor signal
Sensor resolution
Bidirectional repeatability

Accuracy, uncompensated (5)Accuracy, with error
compensation (5)Linear motor, ironless, 3-phase48, nominal
80, max.
33.2
11.1
6.67
6.3
1.0
7.7
External, moving cable

V DC
N
N
N/A
Ω
mH
V·s/m

typ.
typ.
typ.
typ.
typ.
max.

A-121.xxxA

A-121.xxxB

A-121.xxxC

Incremental linear encoder
Sin/cos, 1 V peak-peak,
20 μm signal period
1.2 nm (4)A-121.050: ±0.25 μm (4)A-121.100: ±0.25 μm (4)A-121.150: ±0.25 μm (4)A-121.200: ±0.25 μm (4)A-121.250: ±0.25 μm (4)A-121.350: ±0.50 μm (4)A-121.050: ±1.0 μm
A-121.100: ±1.0 μm
A-121.150: ±1.5 μm
A-121.200: ±2.0 μm
A-121.250: ±2.0 μm
A-121.350: ±3.0 μm
A-121.050: ±0.50 μm
A-121.100: ±0.50 μm
A-121.150: ±0.50 μm
A-121.200: ±0.50 μm
A-121.250: ±0.50 μm
A-121.350: ±1.0 μm

Absolute encoder
BiSS-C

Incremental linear encoder
A/B quadrature, TTL

1 nm
A-121.050: ±0.25 μm
A-121.100: ±0.25 μm
A-121.150: ±0.25 μm
A-121.200: ±0.25 μm
A-121.250: ±0.25 μm
A-121.350: ±0.50 μm
A-121.050: ±1.5 μm
A-121.100: ±1.5 μm
A-121.150: ±1.5 μm
A-121.200: ±1.5 μm
A-121.250: ±1.5 μm
A-121.350: ±1.5 μm
A-121.050: ±0.5 μm
A-121.100: ±0.5 μm
A-121.150: ±0.5 μm
A-121.200: ±0.5 μm
A-121.250: ±0.5 μm
A-121.350: ±0.5 μm

50 nm
A-121.050: ±0.25 μm
A-121.100: ±0.25 μm
A-121.150: ±0.25 μm
A-121.200: ±0.25 μm
A-121.250: ±0.25 μm
A-121.350: ±0.50 μm
A-121.050: ±1.0 μm
A-121.100: ±1.0 μm
A-121.150: ±1.5 μm
A-121.200: ±2.0 μm
A-121.250: ±2.0 μm
A-121.350: ±3.0 μm
A-121.050: ±0.50 μm
A-121.100: ±0.50 μm
A-121.150: ±0.50 μm
A-121.200: ±0.50 μm
A-121.250: ±0.50 μm
A-121.350: ±1.0 μm

A-121
Miscellaneous
Operating pressure (6)Air consumption
Air quality
Materials

65 to 75 psi (450 to 520 kPa)
<1.0 SCFM (28 SLPM)
Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 8573-1 Class 1
Dry (–15 °C dew point) – ISO 8573-1 Class 3
Hardcoat aluminum, stainless steel fasteners(1) Dependent on the flatness of the surface, on which the stage is mounted.
(2) Can be limited by the payload, controller or drive.
(3) Assumes payload CG is centered no more than 50 mm above the motion
platform.
(4) Assumes 16384x interpolation. Contact PI for the use of other factors.

MOTION(5) Improved accuracy can be obtained with controller-based error compensation.
The stage must be ordered with a controller from PI to reach these values.
Accuracy values assume short-term duration and do not consider the long-term
effects of thermal drift on the stage.
(6) To protect the stage against damage, it is recommended to connect
115
an air pressure sensor to the Motion-Stop input of the controller.

|

POSITIONINGTranslation Stages

MotionActive axes
Travel range
Pitch / yaw (1)Straightness / ﬂatness (1)Straightness / ﬂatness
per 25 mm travel range (1)Velocity, unloaded (2)Acceleration, unloaded (2)Mechanical properties
Load capacity in z (3)Load capacity in y (3)Moved mass
Overall mass
Guide type

A-123 PIglide AT3 Linear Stage with Air Bearings
High Performance Nanopositioning Stage■

Ideal for scanning applications or highprecision positioning■

Cleanroom compatible■

Size of the motion platform 210 mm × 210 mm■

Travel ranges 50 mm to 750 mm■

Resolution to 1 nm

Product Overview

Accessories and options

The stages in the PIglide are equipped with a servo drive linear motor withpreloaded air bearings and integrated linear encoder. The combination of thesenoncontact components results in a frictionless motion platform that offers
the highest performance, quality, and lifetime. A high-force linear motor candrive the stage to top speed within a few milliseconds, and the high-capacity
bearings can support payloads up to 60 kg. The laterally opposed, actively
preloaded air bearing design in this model allows mounting in any orientation.

■

Encoder■

PIglide filter and air preparation kits■

Single and multi-axis motion controller■

XY setups and individual configurations■

Cable track variations■

Options with counterweight for vertical (Z)orientation■

Customizations available■

Base plates made of granite and systems
for reducing vibration

Application fields
PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing. Thanks to the friction-free motion,no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Applications>> Air bearings■ Sample Inspection■ Photonics>> Linear encoder■ Scanning■ Flatpanel Inspection>> Linear motor■ Metrology / Testing

Technology Glossary ...................... page 290

116

W W W. P I . W S

A-123.100

A-123.150

Active axes

X

X

X

Travel range

50

100

150

Pitch / yaw (1)

5

10

15

Straightness /ﬂatness (1)

±0.5

±0.5

Straightness /ﬂatness per
25 mm travel
range (1)0.1

Velocity,
unloaded (2)Acceleration,
unloaded (2)A-123.200

A-123.350

A-123.500

A-123.750

Unit

Tolerance

X

X

X

X

200

350

500

750

mm

15

20

25

35

μrad

max.

±0.5

±1

±1.5

±1.5

±2.5

μm

max.

0.1

0.1

0.1

0.1

0.1

0.1

μm

max.

1

1

1

1

1

1

1

m/s

max.

30

30

30

30

30

30

30

m/s²

max.

Load capacity
in z (3)

590

590

590

590

590

590

590

N

max.

Load capacity
in y (3)

295

295

295

295

295

295

295

N

max.

Moved mass

5

5

5

5

5

5

5

kg

Overall mass

14

15.5

16.5

18

21.5

25

32

kg

Guide typeAir bearing

Air bearing

Air bearing

Air bearing

Air bearing

Air bearing

Air bearing

MotionMechanicalproperties

A-123

Unit

Tolerance

Drive properties
Drive typeLinear motor, ironless, 3-phase

Intermediate circuit
voltage, effective

48, nominal
80, max.

V DC

Peak force

298

N

typ.

Nominal force

87.5

N

typ.

Force constant, effective

19.9

N/A

typ.

Resistance phase-phase

3.6

Ω

typ.

Inductivity phase-phase

1.2

mH

typ.

Back EMF phase-phase

16

V·s/m

max.

Cabling

External, moving cable

117

MOTION|POSITIONINGTranslation Stages

A-123.050

A 123.xxxA

A 123.xxxB

A 123.xxxC

Integrated Sensor

Incremental linear encoder

Absolute encoder

Incremental linear encoder

Sensor signal

Sin/cos, 1 V peak-peak,
20 μm signal period

BiSS-CA/B quadrature, TTL

Sensor resolution

1.2 nm (4)

1 nm

50 nm

Bidirectional repeatability

A-123.050: ±0.25 μm (4)A-123.100: ±0.25 μm (4)A-123.150: ±0.25 μm (4)A-123.200: ±0.25 μm (4)A-123.350: ±0.5 μm (4)A-123.500: ±0.5 μm (4)A-123.750: ±0.75 μm (4)A-123.050: ±0.25 μm
A-123.100: ±0.25 μm
A-123.150: ±0.25 μm
A-123.200: ±0.25 μm
A-123.350: ±0.5 μm
A-123.500: ±0.5 μm
A-123.750: ±0.75 μm

A-123.050: ±0.25 μm
A-123.100: ±0.25 μm
A-123.150: ±0.25 μm
A-123.200: ±0.25 μm
A-123.350: ±0.5 μm
A-123.500: ±0.5 μm
A-123.750: ±0.75 μm

Accuracy,
uncompensated (5)A-123.050: ±1 μm
A-123.100: ±1 μm
A-123.150: ±1.5 μm
A-123.200: ±2 μm
A-123.350: ±3 μm
A-123.500: ±3.5 μm
A-123.750: ±5 μm

A-123.050: ±1.5 μm
A-123.100: ±1.5 μm
A-123.150: ±1.5 μm
A-123.200: ±1.5 μm
A-123.350: ±1.5 μm
A-123.500: ±1.5 μm
A-123.750: ±1.5 μm

A-123.050: ±1 μm
A-123.100: ±1 μm
A-123.150: ±1.5 μm
A-123.200: ±2 μm
A-123.350: ±3 μm
A-123.500: ±3.5 μm
A-123.750: ±5 μm

Accuracy, with error
compensation (5)A-123.050: ±0.5 μm
A-123.100: ±0.5 μm
A-123.150: ±0.5 μm
A-123.200: ±0.5 μm
A-123.350: ±1 μm
A-123.500: ±1 μm
A-123.750: ±1.5 μm

A-123.050: ±1.5 μm
A-123.100: ±1.5 μm
A-123.150: ±1.5 μm
A-123.200: ±1.5 μm
A-123.350: ±1.5 μm
A-123.500: ±1.5 μm
A-123.750: ±1.5 μm

A-123.050: ±0.5 μm
A-123.100: ±0.5 μm
A-123.150: ±0.5 μm
A-123.200: ±0.5 μm
A-123.350: ±1 μm
A-123.500: ±1 μm
A-123.750: ±1.5 μm

Positioning

A-123
Miscellaneous
Operating pressure (6)75 to 85 psi (515 to 585 kPa)

Air consumption<1.0 SCFM (28 SLPM)

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 8573-1 Class 1
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners(1) Dependent on the flatness of the surface, on which the stage is mounted.
(2) Can be limited by the payload, controller or drive.
(3) Assumes payload CG is centered no more than 50 mm above the motion platform.
(4) Assumes 16384x interpolation. Contact PI for the use of other factors.
(5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.
Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.
(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

118

W W W. P I . W STranslation Stages
A-123, dimensions in mm

MODEL

A

B*

A-123.050
A-123.100
A-123.150
A-123.200
A-123.350
A-123.500
A-123.750

350
400
450
500
650
800
1050

100
100
100
100
100
100

C*

325
300
400

D*

E*

F

G

Hx

J

Moving Mass

Total Mass

500
700

250
300
350
400
550
700
1000

25
50
75
100
175
250
375

31.5
56.5
81.5
106.5
181.5
256.5
381.5

4
8
8
8
12
16
16

181.5
206.5
231.5
256.5
331.5
406.5
531.5

5 kg
5 kg
5 kg
5 kg
5 kg
5 kg
5 kg

14 kg
15.5 kg
16.5 kg
18 kg
21.5 kg
25 kg
32 kg

*The mounting holes are symmetric around the center line located at “J”

119

MOTION|POSITIONING

A-110 PIglide LC Linear Stage with Air Bearings
High-Performanceg
Nanopositioningpg Systemyfor a Good Price■

Ideal for scanning applications or high-precision
positioning■

Cleanroom compatible■

Size of the motion platform 160 mm × 200 mm■

Travel ranges to 400 mm■

Load capacity to 100 N

Accessories and options■

Best flatness / straightness■

Encoder■

PIglide Filter and Air Preparation Kits■

Single and multi-axis motion controller■

XY setups and individual configurations■

Base plates made of granite and systems
for reducing vibration

Product Overview
PIglide positioning systems have a magnetic linear
motor, magnetically preloaded air bearings andan optical linear encoder: Noncontact and frictionfree motion for the highest accuracy and reliability.

Applications>> Air bearings■ Sample Inspection■ Photonics>> Linear encoder■ Scanning■ Flatpanel Inspection>> Linear motor■ Metrology / Testing

Technology Glossary ...................... page 290

120

W W W. P I . W S

A-110.100xx

A-110.200xx

A-110.300xx

A-110.400xx

Active axes

X

Travel range

50

Pitch / yaw (1)Unit

Tolerance

X

X

X

X

100

200

300

400

10

20

30

40

50

μrad

max.

Straightness / ﬂatness (1)

±1

±1

±1.5

±2

±2.5

μm

max.

Straightness / ﬂatness
per 10 mm travel range (1)

±10

±10

±10

±10

±10

nm

max.

Velocity, unloaded (2)

0.5

0.5

1

1

1

m/s

max.

Acceleration, unloaded (2)

10

10

30

30

30

m/s²

max.

Load capacity in z (3)

100

100

100

100

100

N

max.

Moved mass

2.5

2.5

2.6

2.6

2.6

kg

Overall mass

6.3

7.5

11

12

14

kg

Guide typeAir bearing

Air bearing

Air bearing

Air bearing

Air bearing

Motionmm

Mechanical properties

A-110.050xx
A-110.100xx

Unit

A-110.200xx
A-110.300xx
A-110.400xx

Tolerance

Drive properties
Drive typeLinear motor, ironless, 3-phase

Linear motor, ironless, 3-phase

Intermediate circuit voltage,effective

48, nominal
60, max.

48, nominal
60, max.

V DC

Peak force

25

85

N

typ.

Nominal force

9.2

39

N

typ.

Force constant, effective

4.2

12.3

N/A

typ.

Resistance phase-phase

8.2

3.6

Ω

typ.

Inductivity phase-phase

2.7

1.24

mH

typ.

Back EMF phase-phase

4.2

10.1

V·s/m

max.

Cabling

Internal, no moving cable

External, moving cable

A-110.xxxA

A-110.xxxB

A-110.xxxC

Integrated Sensor

Incremental linear encoder

Absolute encoder

Incremental linear encoder

Sensor signal

Sin/cos, 1 V peak-peak,
20 μm signal period

BiSS-CA/B quadrature, TTL

Sensor resolution

1.2 nm (4)

1 nm

50 nm

Bidirectional repeatability±0.5 μm (4)±0.5 μm±0.5 μm

Accuracy, uncompensated (5)A-110.050: ±1 μm
A-110.100: ±1.5 μm
A-110.200: ±2 μm
A-110.300: ±3 μm
A-110.400: ±4 μm

A-110.050: ±1.5 μm
A-110.100: ±1.5 μm
A-110.200: ±1.5 μm
A-110.300: ±1.5 μm
A-110.400: ±1.5 μm

A-110.050: ±1 μm
A-110.100: ±1.5 μm
A-110.200: ±2 μm
A-110.300: ±3 μm
A-110.400: ±4 μm

Accuracy, with error
compensation (5)A-110.050: ±1 μm
A-110.100: ±1 μm
A-110.200: ±1 μm
A-110.300: ±1.5 μm
A-110.400: ±1.5 μm

A-110.050: ±0.5 μm
A-110.100: ±0.5 μm
A-110.200: ±0.5 μm
A-110.300: ±0.5 μm
A-110.400: ±0.5 μm

A-110.050: ±1 μm
A-110.100: ±1 μm
A-110.200: ±1 μm
A-110.300: ±1.5 μm
A-110.400: ±1.5 μm

Positioning

121

MOTION|POSITIONINGTranslation Stages

A-110.050xx

A-110Miscellaneous
Operating pressure (6)60 to 70 psi (415 to 485 kPa)

Air consumption<1.0 SCFM (28 SLPM)

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 8573-1 Class 1
Dry (–15 °C dew point) – ISO 857-1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners(1) Dependent on the flatness of the surface, on which the stage is mounted.
(2) Can be limited by the payload, controller or drive.
(3) Assumes payload CG is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only.
(4) Assumes 16384x interpolation. Contact PI for the use of other factors.
(5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reachthese values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.
(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

A-110.050 and A-110.100, dimensions in mm

A-110.050
A-110.100

A

B

C

D

302
352

275
325

25
50

35
60

122

W W W. P I . W STranslation Stages

A-110.200, A-110.300 and A-110.400, dimensions in mm

MODEL

A

B

C

D

E

A-110.200
A-110.300
A-110-400

475
575
675

400
500
600

200
250
300

102
152
202

105
155
205

123

MOTION|POSITIONING

A-131 PIglide VC Voice CoilLinear Stage with Air Bearings
High-Performance Miniature Nanopositioning System■

Ideal for scanning applications
or high-precision positioning■

Cleanroom compatible■

Travel ranges to 25 mm■

Load capacity to 100 N■

Acceleration to 80 m/s²■

Best flatness / straightness

A-131.025xx, dimensions in mm

A-131.025xxB, dimensions in mm

Applications>> Air bearings■ Medical Industry>> Linear encoder■ Scanning>> Voice Coil Drives■ Machine Tool / Fast Tool

Technology Glossary ...................... page 290

124

W W W. P I . W S

A-131

Unit

Tolerance

Active axes

X

Travel range

25

mm

Pitch (1)

10

μrad

Yaw (1)

10

μrad

max.

Straightness / ﬂatness (1)±0.125μm

max.

Velocity, unloaded (2)

1

m/s

max.

Acceleration, unloaded (2)

80

m/s²

max.

Load capacity in z (3)

100

N

max.

Moved mass

0.85

kg

Overall mass

3.6

kg

Guide typeAir bearing

Translation Stages

Motionmax.

Mechanical properties

Drive properties
Drive type

Brushless voice coil drive, ironless, 1 phase

Intermediate circuit voltage,effective

48, nominal
80, max.

V DC

Peak force

70.4

N

typ.

Nominal force

22.3

N

typ.

Force constant, effective

6.9

N/A

typ.

Resistance

2.7

Ω

typ.

Inductivity (at 1000 Hz)

1.4

mH

typ.

Back EMF

6.9

V·s/m

Nominal power

28

W

Cabling

Internal, no moving cable

A-131.025A1x

A-131.025D1x

max.

A-131.025F1x

Positioning
Integrated sensor

Incremental linear encoder

Incremental linear encoder

Incremental linear encoder

Sensor signal

Sin/cos, 1 V peak-peak,
20 μm signal period

A/B quadrature, TTL

A/B quadrature, TTL

Sensor resolution

1.2 nm (4)100 nm (5)500 nm (5)(4)

Bidirectional repeatability±0.1 μm±0.1 μm±0.1 μm

Accuracy (6)0.2 μm

0.2 μm

0.2 μmReference point switch

Home index

Home index

Home index

Reference point switch repeatability±1 encoder step

±1 encoder step

±1 encoder step

A-131
Miscellaneous
Operating pressure (7)75 to 85 psi (520 to 585 kPa)

Air consumption<1.0 SCFM (28 SLPM)

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 857-1 Class 1
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners(1) Dependent on the flatness of the surface, on which the stage is mounted.
(2) Can be limited by the payload, controller or drive.
(3) Assumes that the center of gravity is centered no more than 50 mm from the motion platform.
(4) Assumes 16384x interpolation. Contact PI for the use of other factors.
(5) Alternative resolutions on request. Higher resolutions can limit the velocity.
(6) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.
(7) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

125

MOTION|POSITIONING

L-306 Compact Precision Z Stagege
Compact Design, Multi-Axis Combinations■

Compact design: Surface 63 mm × 63 mm■

Stepper motors and closed-loop DC motors■

Optional linear encoder for direct position measurement■

Crossed roller guides, anti-creep■

Noncontact reference and limit switches

L-306, dimensions in mm

Applications>> Linear Encoder■ General Automation■ Scientific Instrumentation■ Photonics■ Semiconductor

Technology Glossary ...................... page 290

126

W W W. P I . W S

L-306.011112

L-306.013112

Z stage with 2-phase
stepper motor

Z stage with 2-phase
stepper motor, linear
encoder with A/B
quadrature signaltransmission

Z stage with DC motor,
linear encoder with
A/B quadrature signaltransmission

Travel range

13

13

13

Integrated sensor–

Incremental linear
encoder

Incremental linear
encoder

Unit

Tolerance
Translation Stages

L-306.011100

Motion and positioningmm

Sensor resolution

–

5

50

nm

Design resolution

2.5

0.005

0.05

μm

Minimumincremental motion

2.5

0.1

0.1

μm

typ.

Unidirectional
repeatability

0.5

0.1

0.1

μm

typ.

Bidirectional
repeatability

±2

±0.5

±0.5

μm

typ.

Pitch

±175

±175

±175

μrad

typ.

Yaw

±150

±150

±150

μrad

typ.

Straightness / ﬂatness

±3

±3

±3

μm

typ.

Velocity

5

5

5

mm/s

max.

Reference and limit
switches

Optical

Optical

Optical

Guide type

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

Drive screw type

Ball screw

Ball screw

Ball screw

Drive screw pitch

0.5

0.5

0.5

Push/pull force

20

20

20

N

max.

Holding force, power off

20

20

20

N

typ.

Mechanical properties

mm

Permissible lateral force

10

10

10

N

max.

Load capacity

20

20

20

N

max.

Permissible torque inθX, θY

1

1

1

N·m

max.

Permissible torque in θZ

2

2

2

N·m

max.

2-phase stepper motor

2-phase stepper motor

DC motor

Operating temperature
range

5 to 40

5 to 40

5 to 40

Humidity

20 – 80 % rel.,not condensing

20 – 80 % rel.,not condensing

20 – 80 % rel.,not condensing

Material

Anodized aluminum,
steel

Anodized aluminum,
steel

Anodized aluminum,
steel

Drive properties
Motor type
Miscellaneous
°C

Mass

0.6

0.6

0.6

kg

±5 %

Moved mass

0.18

0.18

0.18

kg

±5 %

Connection

HD Sub-D 26 (m) (motor)

HD Sub-D 26 (m)(motor and encoder)

HD Sub-D 26 (m)(motor and encoder)

Cable length

0.5

0.5

0.5

Recommended
controllers

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885(up to 20 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885(up to 20 axes)
ACS modular controller

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885(to 40 axes)
ACS modular controllerm

All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

127

MOTION|POSITIONING

L-310 Precision Z Stage
Compact Multi-Axis Combinations with Linear and Rotation Stages■

Travel range 26 mm (1”)■

High-resolution encoder■

ActiveDrive DC, DC, BLDC,
and stepper motors■

Zero-play ball screw■

MTBF 10000 h■

Self-locking to 10 kg

Precision-class Z stage

Drive types

High guiding accuracy and stiffness due to ball screws and crossed roller
guides. Stress-relieved aluminum base for highest stability. Vacuum versions
available on request. Noncontact limit and reference point switches (Hall effect).
Reference point switch with direction sensing in the middle of the travel range.

■.xxSD variant: 2-phase stepper motor forhigh torque even at low velocities and highresolution.

■.xxAD variant: ActiveDrive DC motor for highvelocity: Control via pulse-width-modulated(PWM) signals, the operating voltage isattained via an amplifier integrated in the
motor housing.

■.023xxx variant: DC servo motor■.025xxx variant: Brushless DC motor (BLDC)
for high rotational velocity. Smooth runningand low wear, therefore higher lifetime.

Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the actual position directly at the
motion platform with the greatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on position measuring.
Minimum incremental motion and slow motion
In conjunction with the SMC Hydra controller, versions with stepper motor andintegrated linear encoder (L-310.xASD) achieve repeatable minimum incremental
motion in the range of the sensor resolution. The same configuration attains
constant low velocities of a few sensor increments per second.

Applications

Position measurement■

Versions with DC motor: Rotary encoder■

Optional: Integrated linear encoder,installed centrically.

>> ActiveDrive■ General Automation■ Scientific Instrumentation>> Linear Encoder■ Photonics■ Semiconductor>> Vacuum-Compatible Versions

Technology Glossary ...................... page 290

128

W W W. P I . W S

L-310Unit

Tolerance
Translation Stages

MotionActive axis

Z

Travel range

26

mm

Pitch / yaw

±150

μrad

typ.

Straightness / ﬂatness

±3

μm

typ.

Velocity

L-310.2xAD: 20
L-310.2xSD: 15
L-310.02xxxx: 50

mm/s

max.

Tolerance

L-310.2ASD
L-310.023211

L-310.24AD
L-310.xxx212

L-310.20AD
L-310.xxx232

L-310.20SD

Unit

Design resolution

0.005

0.05

L-310.20AD: 0.061
L-310.023232: 0.061
L-310.025232: 0.055μm

Integrated sensor

Incremental
linear encoder

Incremental
linear encoder
L-310.025212
additionalrotary encoder

Rotary encoder–

Sensor signal

Sin/cos,
1 V peak-peak,
20 μm signal
periodA/B quadrature,
TTL

A/B quadrature,
TTL–

Sensor resolution
rotary encoder–

L-310.025212:
20000

L-310.20AD: 16384
L-310.023232:
16384
L-310.025232:
20000

–

Cts./rev.

–μm

Positioning

Sensor resolution
linear encoder

0.05

Minimum incremental
motionL-310.2ASD: 0.05
L-310.023211: 0.2

L-310.24AD: 0.3
L-310.xxx212: 0.2

0.3

0.3

μm

typ.

Unidirectional
repeatability

L-310.2ASD: 0.1
L-310.023211: 0.2

L-310.24AD: 0.3
L-310.xxx212: 0.2

0.3

0.3

μm

typ.

Bidirectional
repeatability

±0.2

±0.2

±2

±2

μm

typ.

Limit switches

Hall effect

Hall effect

Hall effect

Hall effect

Reference point switch
repeatability

2

2

2

2

μm

typ.

Unit

Tolerance

L-310
Mechanical properties
Drive screw

Ball screw

Drive screw pitch

1

Guide

Crossed roller guide with anti-creep system

Holding force, power off

L-310.2xAD: 30 / L-310.2xSD: 50 / L-310.02xxxx: 30

N

max.

Permissible
lateral force, Fx

100

N

max.

Permissible
lateral force, Fy

50

N

max.

Permissible
torque in θX (Mx)

40

N·m

max.

Permissible
torque in θY (My)

80

N·m

max.

Permissible
torque in θZ (Mz)

80

N·m

max.

mm

129

MOTION|POSITIONING

L-310.xxSD

L-310.xxAD

L-310.xx3xxx

L-310.xx5xxx

Unit

Tolerance

Motor type2-phase stepper
motor

DC motor with
PWM control

DC motor

BLDC motor

Operating voltage,
nominal

24

24

24

24

V

nom.

Operating voltage, max.

48

48

48

Step resolution

200

–

–

48

V

max.

–

Full
steps/rev.

L-310.20SD

L-310.2ASD

L-310.023xxx
L-310.2xAD

L-310.025xxx

Unit

Operating temperature
range

5 to 40

5 to 40

5 to 40

5 to 40°C

Material

Al (black anodized)

Al (black anodized)

Al (black anodized)

Al (black anodized)

MTBF

–

–

–

10000

h

Mass

2.7

2.8

2.7

2.7

kg

±5 %

Moved mass, unloaded

0.9

0.9

0.9

0.9

kg

±5 %

Connection

HD Sub-D 26 (m)HD Sub-D 26 (m)(motor) Sub-D 9(m) (sensor)

L-310.2xAD:
Sub-D 15 (m)L-310.023232:
HD Sub-D 26 (m)L-310.023211:
HD Sub-D 26 (m)(motor), Sub-D 9(m) (sensor)

HD Sub-D 26 (m)Recommended
controllers / drivers

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes
ACS modular
controller

C-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-891(single axis)
C-885 with
C-891.10C885(up to 20 axes)
ACS modular
controller

Drive properties

Tolerance

Miscellaneous

All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m.
Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

Direction of theaxes and torques
for Z stages

130

W W W. P I . W STranslation Stages

L-310, dimensions in mm

131

MOTION|POSITIONING

M-501 Precision Z StageeCompact XYZ Combinations with M-511 Translation Stage
ge Series■

Extremely high-resolution encoder■

ActiveDrive motor■

Zero-play ball screws■

Noncontact limit and reference point switches■

Stress-relieved aluminum base for highest stability■

Self-locking to 10 kg

M-501, dimensions in mm

Applications>> ActiveDrive■ General Automation■ Scientific Instrumentation■ Photonics■ Semiconductor>> Incremental Encoder

Technology Glossary ...................... page 290

132

W W W. P I . W S

M-501.1DG

ZZ

Travel range

12.5

12.5

Integrated sensor

Rotary encoder

Rotary encoder

Active axes

Unit

Tolerance

Motion and positioningmm

Sensor resolution

40960

2048

Cts./rev.

Design resolution

0.024

0.005

μm

Minimum incremental motion

<0.1

<0.1

μm

Unidirectional repeatability

0.1

0.1

μm

Pitch

±150

±150

μrad

Yaw

±150

±150

μrad

Velocity

3

1

mm/s

Reference point switch
repeatability

1

1

μm

mm

max.

Mechanical properties
Drive screw pitch1

1

Gear ratio

80/26 (belt drive)

80/26 (belt drive);(28/12) 4:1 ~ 29.6:1 gearhead

Load capacity

50

100

N

max.

Holding force

20

100

N

max.

Motor typeDC motor with PWM control(ActiveDrive)

DC gear motor

Operating voltage

24

0 to ±12

V

Motor power

17

4

W

Reference and limit switches

Hall effect

Hall effect

Drive properties

Miscellaneous
Operating temperature range

10 to 50

–20 to 50

Material

Al (black anodized)

Al (black anodized)

Mass

2.6

2.6

Recommended controllers /driversC-863 (single axis)
C-884 (up to 6 axes)

C-863 (single axis)
C-884 (up to 6 axes)

°C
kg

±5 %

Ask about custom designs!

133

MOTION|POSITIONINGTranslation Stages

M-501.1PD

UPL-120 Precision Z Stage
Excellent Accuracy for High Loads■

Travel range 13 mm (1/2”)■

Unidirectional repeatability to 0.05 μm■

Load capacity to 20 kg■

Integrated optical limit switches■

Available with direct-measuring encoder■

Crossed roller guide, anti-creep

Reference-class Z stage
Extremely accurate and reliable positioning. Crossed roller guides for smooth
feed at high loads. Stress-relieved aluminum base for highest stability. Drive
variants with DC motor and 2-phase stepper motor. Noncontact limit switches.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the actual position directly at the
motion platform with the greatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on position measuring.
Crossed roller guideWith crossed roller guides, the point contact of the balls in ball guides isreplaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Applications>> Linear Encoder■ General Automation■ Scientific Instrumentation■ Photonics■ Semiconductor

Technology Glossary ...................... page 290

134

W W W. P I . W S

6635921030

6635911130

6635921130-0001

Z stage withDC motor androtary encoder

Z stage withstepper motor

Z stage withDC motor,
linear androtary encoder

Z stage withstepper motor
and linear
encoder

Z

Z

Z

Z

Travel range

13

13

13

13

Integrated sensor

Rotary encoder–

Linear encoder
Rotary encoder

Linear encoder

Sensor signal rotary
encoder

A/B quadrature,
RS-422–

A/B quadrature,
RS-422–

Sensor signal linear
encoder––

A/B quadrature,
RS-422

Sin/cos,
1 V peak-peak,
20 μm signal
periodDesign resolution

0.013

1.34

0.05

0.005

μm

Sensor resolution
rotary encoder

20000

–

20000

–

Cts./rev.

Sensor resolution
linear encoder

–

–

0.05

–

μm

Minimum incremental
motion

0.1

0.1

0.1

0.05

μm

typ.

Unidirectional
repeatability

0.1

0.1

0.1

0.05

μm

typ.

Bidirectional
repeatability

±2

±2

±0.1

±0.05

μm

typ.

Pitch

±100

±100

±100

±100

μrad

typ.

Yaw

±100

±100

±100

±100

μrad

typ.

Straightness

±3.0

±3.0

±3.0

±3.0

μm

typ.

Flatness

±3.0

±3.0

±3.0

±3.0

μm

typ.

Velocity

6

3

6

3

mm/s

max.

Reference point switch
repeatability

<1

<1

<1

<1

μm

typ.

Guide type

Crossed roller
guide with anticreep system

Crossed roller
guide with anticreep system

Crossed roller
guide with anticreep system

Crossed roller
guide with anticreep system

Drive screw type

Ball screw

Ball screw

Ball screw

Ball screw

Drive screw pitch

1

1

1

1

Gear ratio

2911:780

2911:780

2911:780

2911:780

Push/pull force,
power on

200

200

200

200

Holding force, power off

40

80

40

80

N

typ.

Load capacity

200

200

200

200

N

max.

Permissible lateral force
Fy in Y

150

150

150

150

N

max.

Permissible torque Mx
in θx

130

130

130

130

N·m

max.

Permissible torque My
in θy

38

38

38

38

N·m

max.

Permissible torque Mz
in θZ

150

150

150

150

N·m

max.

Active axes

Unit

Tolerance

Motion and positioningmm

Mechanical properties

mm
N

max.

135

MOTION|POSITIONINGTranslation Stages

6635911030

6635911030

6635921030

6635911130

6635921130-0001

Unit

Tolerance

Motor typeDC motor

2-phasestepper motor

DC motor

2-phasestepper motor

Step resolution

–

200

–

200

Full steps/
rev.

Operating voltage,
nominal

24

24

24

24

V

nom.

Operating voltage, max.

48

48

48

48

V

max.

Limit switches

Optical

Optical

Optical

Optical5 to 40

5 to 40

5 to 40

5 to 40°C

Drive properties

Miscellaneous
Operating temperature
range
Mass

2.4

2.3

2.4

2.4

kg

±5 %

Moved mass

1.3

1.3

1.3

1.3

kg

±5 %

Material

Aluminum,
black anodized

Aluminum,
black anodized

Aluminum,
black anodized

Aluminum,
black anodized

Connection

HD Sub-D 15 (m)HD Sub-D 15 (m)Motor:HD Sub-D 15 (m)Sensor:
Sub-D 9 (m)Motor:HD Sub-D 15 (m)Sensor:
Sub-D 9 (m)Recommended
controllers / drivers

C-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

UPL-120, DC motor,
dimensions in mm

UPL-120, stepper motor,
dimensions in mm

136

W W W. P I . W S

Direction of theaxes and torques
for Z stages

Translation Stages
UPL-120, dimensions in mm

137

MOTION|POSITIONINGXY Stages

138

W W W. P I . W S

140

L-731 Precision XY Stage ..............................................................................................
V-731 PIMag® High-Precision XY Stage .........................................................................
L-741 Precision XY Stage ..............................................................................................
V-741 PIMag® High-Precision XY Stage .........................................................................
L-738 Precision XY Stage ..............................................................................................
V-738 PIMag® High-Precision XY Stage .........................................................................

140
144
146
150
152
156

PIglide XY Stages with Air Bearings .......................................................................................................................................

158

A-311 PIglide IS Planar Scanner with Air Bearing ..........................................................
A-322 PIglide HS Planar Scanner with Air Bearing ........................................................

158
160

139

MOTION|POSITIONING

XY Stages

XY Stages with Mechanical Bearings ......................................................................................................................................

L-731 Precision XY Stage
High Travel Accuracy and Stability■

Travel ra
range 205 mm × 205 mm (8”)■

Unidirectional repeatability to 0.05 μm
Unidirect■

Velocity tto 90 mm/s■

2-phase sstepper motor or DC motors■

Incremental encoder with 1 nm resolution
Incremen■Rotary en
encoder with 20000 impulses/
revolution
revolutio■

Crossed rroller guide, anti-creep

Highly accurate position measuring with incremental linear encoder

Drive types

Noncontact optical linear encoders measure the actual position directly at the
motion platform with the greatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on position measuring.
Optical limit and reference point switches.

■

2-phase stepper motor for high torque evenat low velocities and higher resolution■

DC motor for high velocity constancy, lowvibration, and high velocities

Other travel ranges on request.

Crossed roller guideWith crossed roller guides, the point contact of the balls in ball guides
is replaced by line contact of the hardened rollers. Consequently, they are
considerably stiffer and need less preload, which reduces friction and allows
smoother running. Crossed roller guides are also distinguished by high guiding
accuracy and load capacity. Force-guided rolling element cages prevent cage
creep.

Applications>> Incremental Encoder■ Biotechnology■ Medical Industry■ Laser Cutting■ Metrology / Testing■ Laser Marking

Technology Glossary ...................... page 290

140

W W W. P I . W SStages with DC motor

L-731.093111 / L-731.093112 / L-731.093132

Unit

Tolerance

MotionX, Y

Travel range

205 × 205mm

Angular error xry (pitch)

±50

μrad

typ.

Angular error xrz (yaw)

±30

μrad

typ.

XY Stages

Active axes

Angular error yrx (pitch)

±40

μrad

typ.

Angular error yrz (yaw)

±30

μrad

typ.

Straightness / ﬂatness

±2

μm

typ.

Orthogonality±96.963

μrad

typ.

Velocity

L-731.093111 / L-731.093112: 50
L-731.093132: 90

mm/s

max.

Stages with DC motor

L-731.093111

L-731.093112

L-731.093132

Unit

Tolerance

Integrated sensor

Incremental linear
encoder

Incremental linear
encoder

Incremental rotary
encoder

Sensor signal

Sin/cos, 1 V peakpeak, 20 μm signal
periodA/B quadrature,
TTL

A/B quadrature,
TTL

Design resolution

0.001

0.01

0.1

Sensor resolution rotary encoder

–

–

20000

Cts./rev.

Minimum incremental motion

0.1

0.5

0.8

μm

typ.

Unidirectional repeatability

0.1

0.5

0.8

μm

typ.

Bidirectional repeatability

±0.5

±0.5

±2.5

μm

typ.

Reference point switch repeatability

<1

<1

<1

μm

typ.

Reference and limit switches

Optical

Optical

OpticalStages with DC motor

L-731.093xxx

Unit

Tolerance

Positioning

μm

Mechanical properties
Drive screw type

Ball screw

Drive screw pitch

2

Guide type

Crossed roller guide with anti-creep system

mm

Load capacity

200

N

max.

Permissible torque Mx in θX

125

N·m

max.

Permissible torque My in θY

125

N·m

max.

Permissible torque Mz in θZ

125

N·m

max.

Drive properties
Motor typeDC motor

Operating voltage, nominal

24

V

nom.

Operating voltage, max.

48

V

max.

141

MOTION|POSITIONING

Stages with DC motor

L-731.093111

L-731.093112 / L-731.093132

Unit

Tolerance

Operating temperature range

5 to 40

5 to 40°C

Material

Aluminum, black anodized

Aluminum, black anodized

Mass

16

16

kg

±5 %

Moved mass in X, unloaded

12

12

kg

±5 %

Moved mass in Y, unloaded

3.5

3.5

kg

±5 %

Connection

2 × HD Sub-D 26 (m) (motor)
2 × Sub-D 15 (f) (sensor)

2 × HD Sub-D 26 (m)(motor/sensor)

Recommended controllers / drivers

SMC Hydra (double axis)
C-891 (single axis)
C-885 with C-891.10C885(up to 20 axes)
ACS modular controller

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885(to 40 axes)
ACS modular controller

Stages with stepper motor

L-731.40SD / L-731.44SD / L-731.4ASD

Unit

Tolerance

Miscellaneous

MotionActive axes

X, Y

Travel range

205 × 205mm

Angular error xry (pitch)

±50

μrad

typ.

Angular error xrz (yaw)

±30

μrad

typ.

Angular error yrx (pitch)

±40

μrad

typ.

Angular error yrz (yaw)

±30

μrad

typ.

Straightness / ﬂatness

±2

μm

typ.

Orthogonality±96.963

μrad

typ.

Velocity

45

mm/s

max.

Stages with stepper motor

L-731.40SD

L-731.44SD

L-731.4ASD

Unit

Tolerance

Integrated sensor–

Incremental linear
encoder

Incremental linear
encoder

Sensor signal–

A/B quadrature,
TTL

Sin/cos, 1 V
peak-peak, 20 μm
signal period

Design resolution

10.0

0.01

0.001

μm

Minimum incremental motion

1

0.05

0.05

μm

Unidirectional repeatability

1

0.05

0.05

μm

typ.

Bidirectional repeatability

±2.5

±0.5

±0.5

μm

typ.

Reference and limit switches

Optical

Optical

OpticalStages with stepper motor

L-731.4xSD

Unit

Tolerance

Positioning

typ.

Mechanical properties
Drive screw type

Ball screw

Drive screw pitch

2

Guide type

Crossed roller guide with anti-creep system

mm

Load capacity

200

N

max.

Permissible torque Mx in θX

125

N·m

max.

Permissible torque My in θY

125

N·m

max.

Permissible torque Mz in θZ

125

N·m

max.

Drive properties
Motor type

Stepper motor, 2-phase

Operating voltage, nominal

24

V

nom.

Operating voltage, max.

48

V

max.

Stepper motor

200

Full steps/
rev.

142

W W W. P I . W SStages with stepper motor

L-731.40SD / L-731.44SD

L-731.4ASD

Unit

Tolerance

Operating temperature range

5 to 40

5 to 40°C

Material

Aluminum, black anodized

Aluminum, black anodized

Mass

15.5

15.5

kg

±5 %

Moved mass in X, unloaded

12

12

kg

±5 %

Moved mass in Y, unloaded

3.5

3.5

kg

±5 %

Connection

L-731.40SD: 2 × HD Sub-D
26 (m) (motor)
L-731.44SD: 2 × HD Sub-D
26 (m) (motor/sensor)

2 × HD Sub-D 26 (m) (motor)
2 × Sub-D 15 (f) (sensor)

Recommended controllers / drivers

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885(up to 20 axes)
ACS modular controller

SMC Hydra (double axis)
ACS modular controller

XY Stages

Miscellaneous

All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

L-731, dimensions in mm

143

MOTION|POSITIONING

V-731 PIMag® High-Precision XY Stage
High Travel Accuracy and Stability, Magnetic Direct Drive■

Travel range 205 mm × 205 mm (8”)■

Unidirectional repeatability to 0.1 μm■

Ironless 3-phase linear motor■

Velocity to 200 mm/s■

Incremental linear encoder with 1 nm resolution■

Crossed roller guides, anti-creep

V-731, dimensions in mm

Applications>> Incremental Encoder■ Automated Optical Inspection (AOI)■ Medical Industry■ Biotechnology■ Metrology / Testing■ Laser Cutting■ Scanning■ Laser Marking>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

144

W W W. P I . W S

V-731.096111

Unit

Tolerance

Motion and positioning
X, Y

Travel range

205 × 205

Integrated sensor

Incremental linear encodermm

Design resolution

0.001

Sensor signal

Sin/cos, 1 V peak-peak,
20 μm signal periodμm

Minimum incremental motion

0.02

μm

typ.

Unidirectional repeatability

0.1

μm

typ.

Bidirectional repeatability

±0.25

μm

typ.

Angular error xry (pitch)

±50

μrad

typ.

Angular error xrz (yaw)

±30

μrad

typ.

Angular error yrx (pitch)

±40

μrad

typ.

Angular error yrz (yaw)

±30

μrad

typ.

Orthogonality±96.963

μrad

typ.

Straightness / ﬂatness

±2

μm

typ.

Velocity

200

mm/s

max.

Acceleration in X, without load

5

m/s²

max.

Acceleration in Y, without load

15

m/s²

max.

Reference and limit switches

OpticalXY Stages

Active axes

Mechanical properties
Load capacity

50

N

max.

Permissible torque in θX, θY

125

N·m

max.

Permissible torque in θZ

125

N·m

max.

Guide

Crossed roller guide with
anti-creep system

Drive properties
Motor type

Ironless 3-phase linear motor

Operating voltage, nominal

48

V

nom.

Operating voltage, max.

48

V

max.

Peak force

80

N

max.

Nominal force

29

N

typ.

Peak current, effective

5

A

typ.

Nominal current, effective

1.5

A

typ.

Force constant, effective

19.9

N/A

typ.

Motor constant

4.89

N/√W

typ.

Electrical time constant

0.4

ms

Resistance phase-phase

11

Ω

typ.

Inductance phase-phase

3.6

mH

typ.

Back EMF phase-phase

16

V·s/m

max.

Pole pitch N-N

30mm

Operating temperature range

5 to 40°C

Material

Aluminum, black anodized

Moved mass in X

15.4

kg

Moved mass in Y

5.6

kg

±5 %

Overall mass

19.4

kg

±5 %

MTBF

20000

h

Connection

2 × HD Sub-D 26 (m) (motor)
2 × Sub-D 15 (f) (sensor)

Recommended controller

SMC Hydra (double axis)
C-891 (single axis)
C-885 with C-891.10C885 (up to 20 axes)
ACS modular controller

Miscellaneous±5 %All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

145

MOTION|POSITIONING

L-741 Precision XY Stage
High Travel Accuracy and Stability, 305 × 305 mm Travel Range■

Travel range 305 mm × 305 mm (12”)
Trave

■

Unidirectional repeatability to 0.05 μm
Unid■Velocity to 90 mm/s
Veloc

■

2-phase stepper motors or DC motors
2-pha

■

Incremental linear encoder with 1 nm resolution
Incre

■

Rotary encoder with 20000 impulses/revolution
Rotar

■

Crossed roller guide, anti-creep

Highly accurate position measuring with incremental linear encoder

Drive types

Noncontact optical linear encoders measure the actual position directly at
the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring.
Optical limit and reference point switches.

■

2-phase stepper motor for high torque evenat low velocities and higher resolution■

DC motor for high velocity constancy, lowvibration, and high velocities

Other travel ranges on request.

Crossed roller guideWith crossed roller guides, the point contact of the balls in ball guides isreplaced by line contact of the hardened rollers. Consequently, they are
considerably stiffer and need less preload, which reduces friction and allows
smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent
cage creep.

Applications>> Incremental Encoder■ Biotechnology■ Medical Industry■ Laser Cutting■ Metrology / Testing■ Laser Marking

Technology Glossary ...................... page 290

146

W W W. P I . W SStages with DC motor

L-741.133111 / L-741.133112 / L-741.133132

Unit

Tolerance

MotionX, Y

Travel range

305 × 305mm

Angular error xry (pitch)

±60

μrad

typ.

Angular error xrz (yaw)

±40

μrad

typ.

XY Stages

Active axes

Angular error yrx (pitch)

±60

μrad

typ.

Angular error yrz (yaw)

±40

μrad

typ.

Straightness / ﬂatness

±4

μm

typ.

Orthogonality±96.963

μrad

typ.

Velocity

L-741.133111 / L-741.133112: 50
L-741.133132: 90

mm/s

max.

Stages with DC motor

L-741.133111

L-741.133112

L-741.133132

Unit

Tolerance

Integrated sensor

Incremental linear
encoder

Incremental linear
encoder

Incremental rotary
encoder

Sensor signal

Sin/cos, 1 V peakpeak, 20 μm signal
periodA/B quadrature,
TTL

A/B quadrature,
TTL

Design resolution

0.001

0.01

0.1

Sensor resolution rotary encoder

–

–

20000

Cts./rev.

Minimum incremental motion

0.1

0.5

0.8

μm

typ.

Unidirectional repeatability

0.1

0.5

0.8

μm

typ.

Bidirectional repeatability

±0.5

±0.5

±2.5

μm

typ.

Reference point switch repeatability

<1

<1

<1

μm

typ.

Reference and limit switches

Optical

Optical

OpticalStages with DC motor

L-741.133xxx

Unit

Tolerance

Positioning

μm

Mechanical properties
Drive screw type

Ball screw

Drive screw pitch

2

Guide type

Crossed roller guide with anti-creep system

mm

Load capacity

200

N

max.

Permissible torque Mx in θX

125

N·m

max.

Permissible torque My in θY

125

N·m

max.

Permissible torque Mz in θZ

125

N·m

max.

Drive properties
Motor typeDC motor

Operating voltage, nominal

24

V

nom.

Operating voltage, max.

48

V

max.

147

MOTION|POSITIONING

Stages with DC motor

L-741.133111

L-741.133112 / L-741.133132

Unit

Tolerance

Operating temperature range

5 to 40

5 to 40°C

Material

Aluminum, black anodized

Aluminum, black anodized

Mass

28

28

kg

±5 %

Moved mass in X, unloaded

20.2

20.2

kg

±5 %

Moved mass in Y, unloaded

6.1

6.1

kg

±5 %

Connection

2 × HD Sub-D 26 (m) (motor)
2 × Sub-D 15 (f) (sensor)

2 × HD Sub-D 26 (m)(motor/sensor)

Recommended controllers / drivers

SMC Hydra (double axis)
C-891 (single axis)
C-885 with C-891.10C885(up to 20 axes)
ACS modular controller

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885(to 40 axes)
ACS modular controller

Stages with stepper motor

L-741.131100 / L-741.131111 / L-741.131112

Unit

Tolerance

Miscellaneous

MotionActive axes

X, Y

Travel range

305 × 305mm

Angular error xry (pitch)

±60

μrad

typ.

Angular error xrz (yaw)

±40

μrad

typ.

Angular error yrx (pitch)

±60

μrad

typ.

Angular error yrz (yaw)

±40

μrad

typ.

Straightness / ﬂatness

±4

μm

typ.

Orthogonality±96.963

μrad

typ.

Velocity

45

mm/s

max.

Stages with stepper motor

L-741.131100

L-741.131111

L-741.131112

Unit

Tolerance

Integrated sensor–

Incremental linear
encoder

Incremental linear
encoder

Sensor signal–

Sin/cos, 1 V peakpeak, 20 μm signal
periodA/B quadrature,
TTL

Design resolution

10.0

0.001

0.01

μm

Sensor resolution rotary encoder

–

–

–

Cts./rev.

Sensor resolution linear encoder

–

0.001

0.01

μm

Minimum incremental motion

1

0.05

0.05

μm

Unidirectional repeatability

1

0.05

0.05

μm

typ.

Bidirectional repeatability

±2.5

±0.5

±0.5

μm

typ.

μm

typ.

Unit

Tolerance

Positioning

Reference point switch repeatability

<1

<1

<1

Reference and limit switches

Optical

Optical

OpticalStages with stepper motor

L-741.131xxx

typ.

Mechanical properties
Drive screw type

Ball screw

Drive screw pitch

2

Guide type

Crossed roller guide with anti-creep system

mm

Load capacity

200

N

max.

Permissible torque Mx in θX

125

N·m

max.

Permissible torque My in θY

125

N·m

max.

Permissible torque Mz in θZ

125

N·m

max.

Drive properties
Motor type

Stepper motor, 2-phase

Operating voltage, nominal

24

V

nom.

Operating voltage, max.

48

V

max.

Step resolution

200

Full steps/
rev.

148

W W W. P I . W SStages with stepper motor

L-741.131100 / L-741.131112

L-741.131111

Unit

Tolerance

Operating temperature range

5 to 40

5 to 40°C

Material

Aluminum, black anodized

Aluminum, black anodized

Mass

27.5

27.5

kg

±5 %

Moved mass in X, unloaded

19.9

19.9

kg

±5 %

kg

±5 %

Moved mass in Y, unloaded

6.1

6.1

Connection

L-741.131100. 2 × HD Sub-D
26 (m) (motor)
L-741.131112. 2 × HD Sub-D
26 (m) (motor/sensor)

2 × HD Sub-D 26 (m) (motor)
2 × Sub-D 15 (f) (sensor)

Recommended controllers / drivers

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885(up to 20 axes)
ACS modular controller

SMC Hydra (double axis)
ACS modular controller

XY Stages

Miscellaneous

All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

L-741, dimensions in mm

149

MOTION|POSITIONING

V-741 PIMag® High-Precision XY Stage
High Travel Accuracy and Stability, 305 mm × 305 mm Travel Range, Magnetic Direct Drive■

Travel range 305 mm × 305 mm ((12”))■

Unidirectional repeatability to 0.1 μm■

Ironless 3-phase linear motor■

Velocity to 200 mm/s■

Incremental linear encoder with 1 nm resolution■

Crossed roller guides, anti-creep

V-741, dimensions in mm

Applications>> Linear Encoder■ Automated Optical Inspection (AOI)■ Medical Industry■ Biotechnology■ Metrology / Testing■ Laser Cutting■ Scanning>> PIMag® Magnetic Linear Motors■ Laser Marking

Technology Glossary ...................... page 290

150

W W W. P I . W S

V-741.136111

Unit

Tolerance

Motion and positioning
X, Y

Travel range

305 × 305

Integrated sensor

Incremental linear encodermm

Design resolution

0.001

Sensor signal

Sin/cos, 1 V peak-peak,
20 μm signal periodμm

Minimum incremental motion

0.02

μm

typ.

Unidirectional repeatability

0.1

μm

typ.

Bidirectional repeatability

±0.25

μm

typ.

Angular error xry (pitch)

±70

μrad

typ.

Angular error xrz (yaw)

±50

μrad

typ.

Angular error yrx (pitch)

±60

μrad

typ.

Angular error yrz (yaw)

±50

μrad

typ.

Orthogonality±96.963

μrad

typ.

Straightness / ﬂatness

±3

μm

typ.

Velocity

200

mm/s

max.

Acceleration in X, without load

3

m/s²

max.

Acceleration in Y, without load

9

m/s²

max.

Reference and limit switches

OpticalXY Stages

Active axes

Mechanical properties
Load capacity

50

N

max.

Permissible torque in θX, θY

125

N·m

max.

Permissible torque in θZ

125

N·m

max.

Guide

Crossed roller guide with
anti-creep system

Drive properties
Motor type

Ironless 3-phase linear motor

Operating voltage, nominal

48

V

nom.

Operating voltage, max.

48

V

max.

Peak force

80

N

max.

Nominal force

29

N

typ.

Peak current, effective

5

A

typ.

Nominal current, effective

1.5

A

typ.

Force constant, effective

19.9

N/A

typ.

Motor constant

4.89

N/√W

typ.

Electrical time constant

0.4

ms

Resistance phase-phase

11

Ω

typ.

Inductance phase-phase

3.6

mH

typ.

Back EMF phase-phase

16

V·s/m

max.

Pole pitch N-N

30mm

Operating temperature range

5 to 40°C

Material

Aluminum, black anodized

Moved mass in X

25.5

kg

Moved mass in Y

9.2

kg

±5 %

Overall mass

33

kg

±5 %

MTBF

20000

h

Connection

2 × HD Sub-D 26 (m) (motor)
2 × Sub-D 15 (f) (sensor)

Recommended controller

SMC Hydra (double axis)
C-891 (single axis)
C-885 with C-891.10C885 (up to 20 axes)
ACS modular controller

Miscellaneous±5 %All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

151

MOTION|POSITIONING

L-738 Precision XY Stage
Clear Aperture, High Travel Accuracy, and Stability■

Travel rang
range 102 mm × 102 mm (4”)■

Large apert
aperture, 150 mm × 150 mm■

Unidirectional repeatability to 0.05 μm
Unidirection■

Velocity to 9
90 mm/s■2-phase ste
stepper motors, DC motors■

Incrementa linear encoder with
Incremental
1 nm resolution

Highly accurate position measuring with incremental linear encoder

Drive types

Noncontact optical linear encoders measure the actual position directly at the
motion platform with the greatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on position measuring. Opticalreference points and limit switches.

■

2-phase stepper motor for high torque evenat low velocities and higher resolution■

DC motor for high velocity constancy, lowvibration, and high velocities

Recirculating ball bearings
When carefully assembled, recirculating ball bearings are distinguished by abeneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four
preloaded linear ball bearing units which run on two guide rails. Each bearing
unit is made up of two independent rows of circulating ball bearings.

Applications>> Incremental Encoder■ Biotechnology■ Medical Industry■ Laser Cutting■ Metrology / Testing■ Laser Marking

Technology Glossary ...................... page 290

152

W W W. P I . W SStages with DC motor

L-738.053111 / L-738.053112 / L-738.053132

Unit

Tolerance

MotionX, Y

Travel range

102 × 102mm

Angular error xry (pitch)

±40

μrad

typ.

Angular error xrz (yaw)

±20

μrad

typ.

XY Stages

Active axes

Angular error yrx (pitch)

±40

μrad

typ.

Angular error yrz (yaw)

±20

μrad

typ.

Straightness / ﬂatness

±2

μm

typ.

Orthogonality±96.963

μrad

typ.

Velocity

L-738.053111 / L-738.053112: 50
L-738.053132: 90

mm/s

max.

Stages with DC motor

L-738.053111

L-738.053112

L-738.053132

Unit

Tolerance

Integrated sensor

Incremental linear
encoder

Incremental linear
encoder

Incremental rotary
encoder

Sensor signal

Sin/cos, 1 V peakpeak, 20 μm signal
periodA/B quadrature,
TTL

A/B quadrature,
TTL

Design resolution

0.001

0.01

0.1

Sensor resolution rotary encoder

–

–

20000

Cts./rev.

Minimum incremental motion

0.1

0.1

0.4

μm

typ.

Unidirectional repeatability

0.1

0.1

0.4

μm

typ.

Bidirectional repeatability

±0.5

±0.5

±2

μm

typ.

Reference point switch repeatability

<1

<1

<1

μm

typ.

Reference and limit switches

Optical

Optical

OpticalStages with DC motor

L-738.053xxx

Unit

Tolerance

Positioning

μm

Mechanical properties
Drive screw type

Ball screw

Drive screw pitch

2

Guide type

Recirculating ball bearingmmHolding force, power off

20

N

typ.

Push/pull force Fx, Fy power on

100

N

max.

Load capacity

200

N

max.

Permissible torque Mx in θX

130

N·m

max.

Permissible torque My in θY

130

N·m

max.

Permissible torque Mz in θZ

90

N·m

max.

Drive properties
Motor typeDC motor

Operating voltage, nominal

24

V

nom.

Operating voltage, max.

48

V

max.

153

MOTION|POSITIONING

Stages with DC motor
Miscellaneous
Operating temperature range
Material
Mass
Moved mass in X, unloaded
Moved mass in Y, unloaded
Connection
Recommended controllers / drivers

Stages with stepper motor

L-738.053111

L-738.053112 / L-738.053132

Unit

5 to 40
Aluminum, black anodized
24
14.6
5.8
2 × HD Sub-D 26 (m) (motor)
2 × Sub-D 15 (f) (sensor)
SMC Hydra (double axis)
C-891 (single axis)
C-885 with C-891.10C885(up to 20 axes)
ACS modular controller

5 to 40
Aluminum, black anodized
24
14.6
5.8
2 × HD Sub-D 26 (m)(motor/sensor)
C-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885(to 40 axes)
ACS modular controller°C

L-738.051100 / L-738.051111 / L-738.051112

Tolerance

kg
kg
kg

±5 %
±5 %
±5 %

Unit

Tolerance

MotionActive axes

X, Y

Travel range

102 × 102mm

Angular error xry (pitch)

±40

μrad

typ.

Angular error xrz (yaw)

±20

μrad

typ.

Angular error yrx (pitch)

±40

μrad

typ.

Angular error yrz (yaw)

±20

μrad

typ.

Straightness / ﬂatness

±2

μm

typ.

Orthogonality±96.963

μrad

typ.

Velocity

35

mm/s

max.

Stages with stepper motor

L-738.051100

L-738.051111

L-738.051112

Unit

Tolerance

Integrated sensor–

Incremental linear
encoder

Incremental linear
encoder

Sensor signal–

Sin/cos, 1 V peakpeak, 20 μm signal
periodA/B quadrature,
TTL

Design resolution

10.0

0.001

0.01

μm

Minimum incremental motion

0.2

0.05

0.05

μm

Unidirectional repeatability

0.2

0.05

0.05

μm

typ.

Bidirectional repeatability

±2

±0.5

±0.5

μm

typ.

μm

typ.

Unit

Tolerance

Positioning

Reference point switch repeatability

<1

<1

<1

Reference and limit switches

Optical

Optical

OpticalStages with stepper motor

L-738.051xxx

typ.

Mechanical properties
Drive screw type

Ball screw

Drive screw pitch

2

Guide type

Recirculating ball bearingmmHolding force, power off

60

N

typ.

Push/pull force FX, FY power on

100

N

max.

Load capacity

200

N

max.

Permissible torque Mx in θX

130

N·m

max.

Permissible torque My in θY

130

N·m

max.

Permissible torque Mz in θZ

90

N·m

max.

Drive properties
Motor type

Stepper motor, 2-phase

Operating voltage, nominal

24

V

nom.

Operating voltage, max.

48

V

max.

Step resolution

200

Full steps/
rev.

154

W W W. P I . W SStages with stepper motor

L-738.051100

L-738.051111

L-738.051112

Unit

Tolerance

Operating temperature range

5 to 40

5 to 40

5 to 40°C

Material

Aluminum,
black anodized

Aluminum, black anodized

Aluminum,
black anodized

Mass

22

22

22

kg

±5 %

Moved mass in X, unloaded

13.8

13.8

13.8

kg

±5 %

kg

±5 %

Moved mass in Y, unloaded

5.8

5.8

5.8

Connection

2 × HD Sub-D
26 (m) (motor)

2 × HD Sub-D
26 (m) (motor)
2 × Sub-D
15 (f) (sensor)

2 × HD Sub-D
26 (m) (motor/
sensor)Recommended controllers / drivers

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

SMC Hydra(double axis)
ACS modular
controller

C-663.12(single axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

XY Stages

Miscellaneous

All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

L-738, dimensions in mm

155

MOTION|POSITIONING

V-738 PIMagg® High-Precisiong
XY Stage
Clear Aperture, High Travel Accuracy and Stability, Magnetic Direct Drive
Driv■

Travel range 102 mm × 102 mm (4”)■

Large aperture, 150 mm × 150 mm■

Unidirectional repeatability to 0.1 μm■

Velocity to 500 mm/s■

Ironless 3-phase linear motor■

Incremental linear encoder with 1 nm resolution

V-738, dimensions in mm

Applications>> Incremental Encoder■ Automated Optical Inspection (AOI)■ Medical Industry■ Biotechnology■ Metrology / Testing■ Laser Cutting■ Scanning>> PIMag® Magnetic Linear Motors■ Laser Marking

Technology Glossary ...................... page 290

156

W W W. P I . W S

V-738.056111

Unit

Travel range

102 × 102mm

Integrated sensor

Incremental linear encoder

Design resolution

0.001

Sensor signal

Sin/cos, 1 V peak-peak,
20 μm signal period

Tolerance

Motion and positioning

Minimum incremental motion

0.02

μm

typ.

Unidirectional repeatability

0.1

μm

typ.

Bidirectional repeatability

±0.25

μm

typ.

Angular error xry (pitch)

±40

μrad

typ.

Angular error xrz (yaw)

±20

μrad

typ.

Angular error yrx (pitch)

±40

μrad

typ.

Angular error yrz (yaw)

±20

μrad

typ.

Straightness / ﬂatness

±2

μm

typ.

Orthogonality±96.963

μrad

typ.

Velocity

500

mm/s

max.

Acceleration in X, Y, without load

10

m/s²

max.

Reference and limit switches

OpticalXY Stages

μm

Mechanical properties
Load capacity

100

N

max.

Permissible torque in θX, θY

130

N·m

max.

Permissible torque in θZ

90

N·m

max.

Guide

Recirculating ball bearing

Drive properties
Motor type

Ironless 3-phase linear motor

Operating voltage, nominal

48

V

nom.

Operating voltage, max.

48

V

max.

Peak force

200

N

max.

Nominal force

87

N

typ.

Peak current, effective

15

A

typ.

Nominal current, effective

4.4

A

typ.

Motor constant

71

N/√W

typ.

Electrical time constant

0.4

ms

Resistance phase-phase

3.6

Ω

typ.

Inductance phase-phase

1.2

mH

typ.

Back EMF phase-phase

16

V·s/m

max.

Pole pitch N-N

30mm

Operating temperature range

5 to 40°C

Material

Aluminum, black anodized

Moved mass in X, unloaded

16.8

kg

Moved mass in Y, unloaded

8

kg

±5 %

Overall mass

24

kg

±5 %

Connection

2 × HD Sub-D 26 (m) (motor)
2 × Sub-D 15 (f) (sensor)hRecommended controller

SMC Hydra (double axis)
C-891 (single axis)
C-885 with C-891.10C885 (up to 20 axes)
ACS modular controller

Miscellaneous±5 %All cables required for operation with the ordered controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

157

MOTION|POSITIONING

A-311 PIglide IS Planar Scanner with Air Bearing
High-Performance, Compact XY Nanopositioning System■

Ideal for scanning applications or
high-precision positioning■

Cleanroom compatible■

Travel ranges to 200 mm × 200 mm■

Load capacity to 147 N■

Low profile■

Resolution to 1 nm■

Optional granite base plates

A-311.xxx, dimensions in mm

A-311.Dxx
A-311.Axx
A-311.Bxx
A-311.Cxx

Applications

A

B

C

D

E

F

300
350
400
450

232
282
332
382

100
150
200
250

275
325
375
425

25
50
75
100

30
55
80
105

>> Absolute Encoder■ Electronics Manufacturing■ Scientific Instrumentation>> Incremental Encoder■ Laser Marking■ Semiconductor>> PIglide Air Bearing Technology>> PIMag® Magnetic Linear Motors■ Scanning

Technology Glossary ...................... page 290

158

W W W. P I . W S

A-311.Dxx

A-311.Axx

A-311.Bxx

A-311.Cxx

Unit

Tolerance

Travel range

50 × 50

100 × 100

150 × 150

200 × 200mm

Pitch (1)

20

30

40

50

μrad

max.

Yaw (1)

5

10

15

20

μrad

max.

Straightness (1)

±0.25

±0.25

±0.5

±0.5

μm

max.

Straightness per 10 mmtravel range (1)

±10

±10

±10

±10

nm

max.

Flatness (1)

±0.5

±0.5

±1

±1

μm

max.

Flatness per 10 mm travel
range (1)

±10

±10

±10

±10

nm

max.

XY orthogonality

25

25

25

25

μrad

max.

Velocity, unloaded (2)

2

2

2

2

m/s

max.

Acceleration of the upper axis,
unloaded (2)

27.5

27.5

27.5

27.5

m/s²

max.

Acceleration of the lower axis,
unloaded (2)

15

13

11

10

m/s²

max.

Load capacity in z (3)

147

147

147

147

N

max.

Moved mass, upper axis

3

3

3

3

kg

XY Stages

MotionMechanical properties

Moved mass, lower axis

5.5

6.5

7.5

8.5

kg

Overall mass

14.5

18.5

22.5

27.5

kg

A-311.xAx

A-311.xBx

A-311.xCx

Integrated sensor

Incremental linear encoder

Absolute encoder

Incremental linear encoder

Sensor signal

Sin/cos, 1 V peak-peak,
20 μm signal period

BiSS-CA/B quadrature, TTL

Sensor resolution

1.2 nm (4)

1 nm

50 nm

Bidirectional repeatability±0.05 μm (4)±0.05 μm

±0.05 μm

Accuracy, uncompensated (5)A-311.Dxx: ±1 μm
A-311.Axx: ±1.5 μm
A-311.Bxx: ±2 μm
A-311.Cxx: ±2.5 μm

A-311.Axx: ±1.5 μm
A-311.Axx: ±1.5 μm
A-311.Axx: ±1.5 μm
A-311.Axx: ±1.5 μm

A-311.Dxx: ±1 μm
A-311.Axx: ±1.5 μm
A-311.Bxx: ±2 μm
A-311.Cxx: ±2.5 μm

Accuracy, with error
compensation (5)±0.5 μm±0.5 μm±0.5 μm

Positioning

A-311

Unit

Tolerance

Drive properties
Drive typeLinear motor, ironless, 3-phase

Intermediate circuit voltage,effective

48, nominal
80, max.

V DC

Peak force

85

N

typ.

Nominal force

39

N

typ.

Force constant, effective

12.3

N/A

typ.

Resistance phase-phase

3.6

Ω

Inductivity phase-phase

1.24

mH

Back EMF phase-phase

10.1

V·s/m

Cabling

External, movable drag chain

max.

Miscellaneous
Operating pressure (6)60 to 70 psi (415 to 485 kPa)

Air consumption<2 SCFM (56 SLPM)

Air quality

see A-322 datasheet, next page

Materials

Hardcoat aluminum, stainless steel fasteners(1) Dependent on the flatness of the surface, on which the stage is mounted.
(2) Can be limited by the payload, controller or drive.
(3) Assumes payload CG is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only.
(4) Assumes 16384x interpolation. Contact PI for the use of other factors.
(5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.
Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.
(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.
All specifications apply per axis, if not otherwise described.

MOTION|POSITIONING

159

A-322 PIglide HS Planar Scanner with Air Bearing
XY Positioning System with 1 nm Resolution■

Ideal for scanning applications or
high-precision positioning■

Cleanroom compatible■

Travel ranges to 500 mm × 1000 mm■

Load capacity to 245 N■

Resolution to 1 nm■

Velocity up to 2 m/s

A-322.xxx, dimensions in mm
A-322.Axx
A-322.Bxx
A-322.Cxx
A-322.Dxx

Applications

A

B

C

D

E

F

G

H

J

960
1110
1110
1610

960
960
1110
1110

348
459
459
709

480
480
555
555

175
250
250
500

200
275
275
525

182
182
257
257

175
175
250
250

175
175
250
250

>> Absolute Encoder■ Electronics Manufacturing■ Scientific Instrumentation>> PIglide Air Bearing Technology■ Laser Cutting■ Semiconductor>> PIMag® Magnetic Linear Motors■ Scanning

Technology Glossary ...................... page 290

160

W W W. P I . W S

A-322.Axx

A-322.Bxx

A-322.Cxx

A-322.Dxx

Unit

Tolerance

Motion and positioning
X, Y

X, Y

X, Y

X, Y

Travel range(bridge axis × gantry axis)

350 × 350

350 × 500

500 × 500

500 × 1000

Integrated sensors

Absolute
Encoders

Absolute
Encoders

Absolute
Encoders

Absolute
Encoders

mm

Sensor resolution

1

1

1

1

nm

Bidirectional repeatability

±0.08

±0.08

±0.08

±0.08

μm

Accuracy*

±0.5

±0.5

±0.5

±0.5

μm

max.

Pitch

15

20

30

40

μrad

max.

max.

Yaw*

5

5

7

7

μrad

max.

Straightness*

±0.5

±0.5

±1

±1

μm

max.

Straightness per
10 mm travel range*

±10

±10

±10

±10

nm

max.

Flatness

±0.5

±1

±1.5

±2.5

μm

max.

Flatness per 10 mm travel
range

±10

±10

±10

±10

nm

max.

XY orthogonality

25

25

25

25

μrad

max.

Velocity**

2

2

2

2

m/s

max.

Acceleration, bridge axis**

20

20

20

20

m/s²

max.

Acceleration, gantry axis**

15

15

12

12

m/s²

max.

Load capacity in Z***

245

245

245

245

N

max.

Moved mass, bridge axis

14

14

14

14

kg

XY Stages

Active axes

Mechanical properties

Moved mass, gantry axis

40

40

43

43

kg

Overall mass

610

700

1075

1525

kg

Guide typeAir bearings

Air bearings

Air bearings

Air bearings

A-322
Drive properties
Drive typeLinear motor, ironless, 3-phase, 1 × to bridge axis, 2 × to gantry axis

Intermediate circuit voltage,effective

48, nominal
80, max.

VDC

Peak force #

298

N

typ.

Nominal force #

87

N

typ.

Force constant, effective #

19.9

N/A

typ.

Resistance phase-phase #3.6

ΩInductivity phase-phase #

1.2

mH

Back EMF phase-phase #

16

V·s/m

Cabling

moved ribbon cable, cleanroom compatible

max.

Motion and positioning
Operating pressure ##80 psi (552 kPa)

Air consumption withexternal vacuum supply<2 SCFM (56 SLPM)

Air consumption withinternal vacuum supply<3.2 SCFM (100 SLPM)

Vacuum10.8 psi (74.7 kPa), <0.5 SCFM (14 SLPM)

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1
Class 1 Oil free – ISO 8573-1 Class 1
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials

Hardcoat aluminum and nickel-plated steel with stainless steel
mounting material, granite base*

Improved accuracy can be obtained with controller-based error compensation. Stage must be ordered with controller.
Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.
** Unloaded. Can be limited by the insulating system payload, controller or drive.
*** Assumes payload CG is centered no more than 50 mm above the stage table.
# Specifications for the drive apply per motor. Two motors are located at the gantry axis.
## To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.
All specifications apply per axis, if not otherwise described.

161

MOTION|POSITIONING

Rotation Stages

162

W W W. P I . W S

164

M-116 Precision Rotation Stage ....................................................................................
RS-40 Compact Rotation Stage .....................................................................................
DT-34 Miniature Rotation Stage ....................................................................................
DT-80 Compact Rotation Stage .....................................................................................
M-060 / M-061 / M-062 Precision Rotation Stage ...........................................................
L-611 Precision Rotation Stage ......................................................................................
PRS-200 Precision Rotation Stage .................................................................................
UPR-100 Ultraprecision Rotation Stage .........................................................................
UPR-120 Ultraprecision Rotation Stage .........................................................................

164
166
168
170
172
174
178
180
182

Rotation Stages with Torque Motor and Air Bearing .............................................................................................................

184

UPR-120 Air Ultraprecision Rotation Stage with Air Bearing .........................................
A-62x PIglide RM Rotation Stage with Air Bearings ......................................................
A-63x PIglide RL Low-Profile Rotation Stage with Air Bearing ......................................

184
186
190

Goniometer Stages ..................................................................................................................................................................

192

WT-85 Motorized Precision Goniometer ........................................................................
WT-100 Motorized Precision Goniometer ......................................................................
WT-90 Motorized Precision Goniometer ........................................................................
WT-120 Motorized Precision Goniometer ......................................................................

192
194
196
198

163

MOTION|POSITIONING

Rotation Stages

Rotation Stages .......................................................................................................................................................................

M-116 Precision Rotation Stage
Compact, for Multi-Axis Combinations with M-110

Dimensions of the M-116.AL1 lens adapter for 0.5” optic devices such as polarizers.
Dimensions in mm. Note that the decimal places are separated by a comma in thedrawings.

Applications■

Compact Design■

Unlimited travel range■

Clear aperture for transmitted-lightapplications■

Backlash-compensated worm drive■

Compact multi-axis combinations with M-110■

Noncontact reference point switch

M-116, dimensions in mm>> Incremental Encoder■ Automation■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

164

W W W. P I . W S

M-116.DG

M-116.DGH

Rotation

Rotation

Rotation range

>360

>360

Integrated sensor

Rotary encoder

Rotary encoder

Active axes

Unit

Tolerance

Motion and positioning°

Sensor resolution

2048

2048

Cts./rev.

Design resolution

2.45 (0.00013)

3.16 (0.00018)

μrad (°)

Minimum incremental motion

50

25

μrad

Backlash

1000

500

μrad

Unidirectional repeatability

12

10

μrad

Velocity

20

20

°/s

max.

Worm gear ratio

44:1

44:1

Gear ratio

28.444:1

22.0335:1

Rotation Stages

Mechanical properties

Load capacity / axial force

±15

±15

N

Max. torque (θX, θY)

±1.5

±1.5

N·m

max.

Max. torque clockwise (θZ)

0.4

0.4

N·m

max.

Max. torque counterclockwise
(θZ)

0.8

0.8

N·m

max.

Drive properties
Motor typeDC gear motor

DC gear motor

Operating voltage

0 to ±120 to ±12

V

Motor power

1.75

1.75

W

Reference point switch

Optical

OpticalOperating temperature range–20 to 65–20 to 65

Material

Aluminum

Aluminum

Mass

0.4

0.4

Recommended controllers /drivers

C-863
C-884

C-863
C-884

Miscellaneous°Ckg

Ask about custom designs!

165

MOTION|POSITIONING

RS-40 Compact Rotation Stage
Precision Positioning

RS-40 rotation stage, dimensions in mm■

Unlimited travel range■

Repeatability to 87 μrad■

20 mm Ø aperture■

Reference point switch

RS-40 rotation stage, DC motor,
dimensions in mm

RS-40 rotation stage, stepper motor,
dimensions in mm

Applications>> Incremental Encoder■ Automation■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

166

W W W. P I . W S

321691001-0000

321692001

Unit

Tolerance

With DC motor

With stepper motor

Rotation

Rotation

Rotation range

>360

>360

°

Design resolution

0.45

38

μrad

Sensor resolution rotary encoder

2048

–

Cts./rev.

Minimum incremental motion

87

87

μrad

typ.

Unidirectional repeatability

87

87

μrad

typ.

Bidirectional repeatability

±700

±700

μrad

typ.

Angular velocity

7

5

°/s

max.

Eccentricity

±5

±5

μm

typ.

Flatness

±5

±5

μm

typ.

Wobble

±35

±35

μrad

typ.

Bearing

Ball bearings

Ball bearings

Gear ratio

76:1

76:1

Worm gear ratio

90:1

90:1

Load capacity / axial force

20

20

N

max.

Permissible lateral force

5

5

N

max.

Holding torque in θZ, power off

0.20

0.20

N·m

typ.

Active axes
Motion and positioning

Permissible torque Mx in θX, θY

2

2

N·m

max.

Torque MZ in θZ, power on

0.2

0.2

N·m

max.

Moment of inertia

0.01550.0155kg·mm²

±20 %

nom.

Rotation Stages

Mechanical properties

Drive properties
Motor typeDC motor

2-phase stepper motor

Operating voltage, nominal

12

24

V

Operating voltage, max.

24

24

V

max.

Nominal current, effective

0.04

–

A

typ.

Peak current, effective

0.16

–

A

typ.

Torque constant, effective

0.00826

–

N·m/A

typ.

Electrical time constant

35

–

ms

Resistance phase-phase

60

12.5

Ω

typ.

Inductance phase-phase

0.4

6.3

mH

typ.

Back EMF phase-phase–

4.4

V/kRPM

max.

Reference point switch

Hall effect

Hall effectOperating temperature range

5 to 40

5 to 40

Material

Aluminum

Aluminum

Miscellaneous
°C

Mass

0.4

0.4

kg

Moved mass

0.088

0.088

kg
h

MTBF

10000

10000

Connection

Sub-D 15 (m)HD Sub-D 15 (m)Recommended controllers /driversC-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885(to 40 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885(up to 20 axes)
ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

Direction of the axes andtorques for rotation stages

167

MOTION|POSITIONING

DT-34 Miniature Rotation Stage
Compact Dimensions, with DC or Stepper Motor

DT-34 with DC motor,
dimensions in mm■

Clear aperture, 10 mm Ø■

Compact design■

Unidirectional repeatability to 350 μrad■

Angular velocity to 675 °/s■

Integrated optical reference point switch

DT-34 with stepper motor,
dimensions in mm

Applications>> Incremental Encoder■ Automation■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

168

W W W. P I . W S

Active axes

3215910030

3215920030-0000

With DC motor

With stepper motor

θZ

θZ

Unit

Tolerance

Motion and positioning
Rotation range

360

360

°

Design resolution

69.62

1724.8μrad

Integrated sensor

Rotary encoder–

Sensor resolution rotary encoder

2048

–

Cts./rev.

Minimum incremental motion

700

350

μrad

Unidirectional repeatability

700

350

μrad

typ.

Bidirectional repeatability

±1400

±1000

μrad

typ.

Angular velocity

675

195

°/s

max.

Eccentricity

±50

±50

μm

typ.

Flatness

±8

±8

μm

typ.

Wobble

±100

±100

μrad

typ.

Reference point switch

Optical

OpticalBearing

Ball bearings

Ball bearings

Worm gear ratio

24986:567

774566:5103

Load capacity / axial force FZ

15

15

N

max.

Permissible lateral force FX, FY

2.5

2.5

N

max.

Permissible torque Mx in θX, θY

2.5

2.5

N·m

max.

Drive torque

0.9

0.3

N·m

max.

Motor typeDC motor

2-phase stepper motor

Rotation Stages

typ.

Mechanical properties

Drive properties

Operating voltage, nominal

12

12

V

nom.

Operating voltage, max.

48

48

V

max.

Step resolution–

24

Full steps/
rev.

Operating temperature range

5 to 40

5 to 40°C

Material

Aluminum, black anodized

Aluminum, black anodized

Mass

0.15

0.15

kg

±5 %

Moved mass

0.1

0.1

kg

±5 %

Connection

Sub-D 15 (m)Sub-D 15 (m)Recommended controllers /driversC-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885(to 40 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885(up to 20 axes)
ACS modular controller

Miscellaneous

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

169

MOTION|POSITIONING

DT-80 Compact Rotation Stage
Large clear aperture■

Unlimited travel range■

Repeatability to 175 μrad■

Maximum velocity 40°/s■

Reference point switch

DT-80 rotation stage, dimensions in mm

DT-80 rotation stage, DC motor,
dimensions in mm

RS-80 rotation stage, stepper motor,
dimensions in mm

Direction of theaxes and torques forrotation stages

Applications>> Incremental Encoder■ Automation■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

170

W W W. P I . W S

64439100

Active axes

64439200

With DC motor

With stepper motor*

θZ

θZ

Unit

Tolerance

Motion and positioning
Rotation range

>360

>360

°

Design resolution

17.453174.53μrad

Integrated sensor

Rotary encoder–

Sensor resolution rotary encoder

2000

–

Cts./rev.

Minimum incremental motion

69.8

69.8

μrad

Unidirectional repeatability

175

175

μrad

typ.

Bidirectional repeatability

±3491

±3491

μrad

typ.

Angular velocity

40

30

°/s

max.

Eccentricity

±30

±30

μm

typ.

Flatness

±30

±30

μm

typ.

Wobble

±100

±100

μrad

typ.

max.

Rotation Stages

typ.

Mechanical properties
Worm gear ratio

180:1

180:1

Load capacity / axial force

20

20

N

Permissible lateral force

10

10

N

max.

Permissible torque Mx in θX, θY

5

5

N·m

max.

N·m

max.

Drive properties
Drive torque

0.1

0.1

Guide type

Ball bearings

Ball bearings

Motor typeDC motor

2-phase stepper motor

Operating voltage, nominal

24

24

V

nom.

Operating voltage, max.

48

48

V

max.

Reference point switch

mechanicalmechanical

Operating temperature range

5 to 40

5 to 40

Material

Aluminum, black anodized,
red bronze

Aluminum, black anodized,
red bronze

Mass

0.8

0.8

kg

±5 %

Moved mass, unloaded

0.3

0.3

kg

±5 %

Connection

HD Sub-D 15 (m)HD Sub-D 15 (m)Recommended controllers /driversC-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885(to 40 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885(up to 20 axes)
ACS modular controller

Miscellaneous°C* Max. 1.7 A/phase; 200 full step/rev.
Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

171

MOTION|POSITIONING

M-060 / M-061 / M-062
Precision Rotation Stage
Unlimited Travel Range

M-06x, dimensions in mm

DIMENSIONS

M-060.PD M-060.DG M-061.PD

A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P

90
29
25
35
12,5
70
60
20
50
38
20
39
80,8
19
59,3
7

90
29
25
35
12,5
70
60
20
50
38
20
34
83,8
15
51
7

130
34
30
55
15
110
100
35
90
50
20
39
80,8
19
59,3
4,5

■

Unlimited travel range■

Very high resolution■

Max. velocity 90°/s■

Backlash-compensated worm drive■

ActiveDrive or DC motor■

Direction-sensing reference point switch

M-061.DG M-062.PD M-062.DG
130
34
30
55
15
110
100
35
90
50
20
34
83,8
15
51
4,5

150
42
38
65
21,5
130
120
45
110
60
28
39
80,8
19
59,3
–

150
42
38
65
21,5
130
120
45
110
60
25
34
83,8
15
51
–

Applications>> ActiveDrive■ Optical Alignment>> Incremental Encoder■ Precision Micro Assembly■ Scientific Instrumentation

Technology Glossary ...................... page 290

172

W W W. P I . W S

Unit

M-060.PD /M-061.PD /M-062.PD

M-060.DG /M-061.DG /M-062.DG

Rotation

Rotation

Rotation range

>360

>360

Integrated sensor

Rotary encoder

Rotary encoder

Sensor resolution

4000

2000

Cts./rev.

Design resolution

32 (0.0018) /17.5 (0.001) /15 (0.0008)

2.1 (0.00012) /1.2 (6.9 × 10–5) /0.96 (5.5 × 10–5)μrad (°)

Active axes

Tolerance

Motion and positioning

Minimum incremental motion

32 / 17.5 / 15

6.3 / 6 / 5

μradBacklash

200 / 200 / 240

200 / 200 / 240

μradUnidirectional repeatability

50 / 50 / 60

50 / 50 / 60

μrad

Velocity90

16 / 9 / 7.5°/sRotation Stages

°

max.

Mechanical properties
Worm gear ratio

50:1 / 90:1 / 110:1

50:1 / 90:1 / 110:1

Gear ratio–(28/12)4:1

Load capacity / axial force±500 / ±550 / ±650

±500 / ±550 / ±650

NMax. torque θX, θY±6 / ±6 / ±7

±6 / ±6 / ±7

N·m

max.

Max. torque θZ±4 / ±6 / ±8

±4 / ±6 / ±8

N·m

max.

Drive properties
Motor typeDC motor, ActiveDrive

DC gear motor

Operating voltage

24

0 to ±12

V

Motor power

30

3

W

Reference point switch

Hall effect

Hall effectMiscellaneous
Operating temperature range–10 to 40–10 to 40

Material

Aluminum

AluminumMass

0.94 / 1.88 / 2.76

0.94 / 1.88 / 2.76

Recommended controllers /driversC-863 (single axis)
C-884 (up to 6 axes)

C-863 (single axis)
C-884 (up to 6 axes)

°C
kg

173

MOTION|POSITIONING

L-611 Precision Rotation Stage
High Travel Accuracy■

Unlimited travel range■

Very high resolution■

Maximum velocity 200°/s■

Optional angle measuring
ng system fordirect position measurement
ment■

ActiveDrive DC, DC, BLDC,
C, and stepper motors■

Direction-sensing reference
nce point switch

Direction of the axes andtorques for rotation stages

Applications>> ActiveDrive■ Medical Industry■ Precision Micro Assembly>> Incremental Encoder■ Metrology / Testing■ Sample Inspection>> Vacuum-Compatible Versions■ Photonics

Technology Glossary ...................... page 290

174

W W W. P I . W S

L-611

Unit

Tolerance

MotionθZ

Rotation range

>360

°

Wobble±15

μrad

Flatness±1μm

Eccentricity

±2.5

μm

Angular velocity

L-611.xxSD: 50
L-611.xxAD: 200
L-611.99xxxx: 200

°/s

max.

L-611.9ASD
L-611.993261

L-611.94AD

L-611.90AD
L-611.xxx232

L-611.90SD

Unit

Tolerance

Integrated sensor

Incremental angle
measuring system

Incremental angle
measuring system

Rotaryencoder–

Sensor signal

Sin/cos,
1 V peak-peak

A/B quadrature,
TTL

A/B quadrature, TTL–

Sensor resolution
rotary encoder

–

–

20000

–

Cts./rev.

Sensor resolution angle
measuring system

9000

9000

–

–

Lines/
revolution

Design resolution

0.174

3.49

3.49

349

μrad

Minimum incremental
motionL-611.9ASD: 0.87
L-611.993261: 3.5

17.45

35

8.72

μrad

typ.

Unidirectional
repeatability

L-611.9ASD: 0.87
L-611.993261: 3.5

17.45

35

20

μrad

typ.

Bidirectional repeatability±3.5±17.45

±175

±175

μrad

typ.

Reference point switch

Hall effect

Hall effect

Hall effect

Hall effect

Reference point switch
repeatability

<2

<2

<2

<2

μm

typ.

Unit

Tolerancemax.

Positioning

L-611
Mechanical properties
Bearing

Ball bearings

Worm gear ratio

90:1

Load capacity / axial force

100

N

Permissible lateral force

50

N

max.

Permissible torque Mx
in θX, θY

40

N·m

max.

Permissible torque Mz
in θz

3

N·m

max.

Moment of inertia

770

kg·mm²±20 %175

MOTION|POSITIONING

Rotation Stages

Active axes

L-611.xxSD

L-611.xxAD

L-611.xx3xxx

L-611.xx5xxx

Motor type2-phase stepper
motor *

DC motor with
PWM control

DC motor

BLDC motor

Operating voltage,
nominal

24

24

24

24

Unit

Tolerance

V

nom.
max.

Drive properties

Operating voltage, max.

48

24

48

48

V

Motor resolution

200

–

–

–

Full steps/
rev.

L-611.9xSD

L-611.xxAD

L-611.993xxx

L-611.995232

Unit

Operating temperature
range

5 to 40

5 to 40

5 to 40

5 to 40°C

Material

Aluminum,
black anodized,
stainless steel,
red bronze

Aluminum,
black anodized,
stainless steel,
red bronze

Aluminum,
black anodized,
stainless steel,
red bronze

Aluminum,
black anodized,
stainless steel,
red bronze

Mass

2.6

2.6

2.6

2.6

kg

±5 %

Moved mass

1.1

1.1

1.1

1.1

kg

±5 %

Connection

HD Sub-D 26 (m)L-611.9ASD
additional
Sub-D 9 (m)(sensor)Sub-D 15 (m)HD Sub-D 26 (m)L-611.993261
additional
Sub-D 9 (m)(sensor)HD Sub-D 26 (m)Recommended
controllers / drivers

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-891(single axis)
C-885 with
C-891.10C885(up to 20 axes)
ACS modular
controller

Tolerance

Miscellaneous* Max. 1.2 A/phase
All cables required for operation with the recommended controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

176

W W W. P I . W SRotation Stages

L-611 with stepper motor, dimensions in mm

L-611 with ActiveDrive, DC, and BLDC motor,
dimensions in mm

177

MOTION|POSITIONINGPRS-200 Precision Rotation Stage
Large Aperture, High Travel Accuracy■

Unlimited travel range■

Repeatability to 0.5 μrad■

Load capacity to 50 kg■

Option: Direct position measurementwith angle measuring system

PRS-200 precision rotation stage, dimensions in mm

PRS-200 precision rotation stage,connection for angle measuring system

Direction of theaxes and torques
fo rotation stages

PRS-200 precision rotation stage,
DC motor, dimensions in mm

PRS-200 precision rotation stage,
stepper motor, dimensions in mm

Applications>> Incremental Encoder■ Medical Industry■ Precision Micro Assembly■ Metrology / Testing■ Sample Inspection>> Vacuum-Compatible Versions■ Photonics

Technology Glossary ...................... page 290

178

W W W. P I . W S

6449911011

6449921011

6449921111

With DC motor

With stepper motor

With stepper motor
and angle measuringsystemθZ

θZ

θZ

Rotation range

>360

>360

Integrated sensor

Rotary encoder

Sensor signal

A/B quadrature,
RS-422–

Sin/cos,
1 V peak-peakSensor resolution rotary encoder

20000

–

–

Cts./rev.

Sensor resolution angle
measuring system

–

–

23600

Lines/
revolution

Design resolution

1.75

175.00

0.017

μrad

Minimum incremental motion

8.72

8.72

0.50

μrad

typ.

Unidirectional repeatability

17.44

17.44

0.5

μrad

typ.

Bidirectional repeatability

±175

±175

±5

μrad

typ.

Wobble

±17.5

±17.5

±17.5

μrad

typ.

Flatness

±1

±1

±1

μm

typ.

Eccentricity

±2.5

±2.5

±2.5

μm

typ.

Angular velocity

75

35

35

°/s

max.

Bearing

Crossed roller
bearings

Crossed roller
bearings

Crossed roller
bearings

Torque, power on

4

4

4

N·m

max.

Worm gear ratio

180:1

180:1

180:1

Load capacity / axial force

500

500

500

N

max.

Permissible lateral force

200

200

200

N

max.

Permissible torque in θX, θY

60

60

60

N·m

max.

Permissible torque in θZ

4

4

4

N·m

max.

DC motor

2-phase stepper
motor

2-phase stepper
motorOperating voltage, nominal

24

48

48

V

nom.

Operating voltage, max.

48

48

48

V

max.

Limit switches

2 × Hall effect

2 × Hall effect

2 × Hall effectOperating temperature range

5 to 40

5 to 40

5 to 40

Material

Aluminum, blackanodized, stainlesssteel, red bronze

Aluminum, blackanodized, stainlesssteel, red bronze

Aluminum, blackanodized, stainlesssteel, red bronze

Active axes

Unit

Tolerance

Motion and positioning>360°

Rotation Stages

Incremental angle
measuring system

Mechanical properties

Drive properties
Motor type

Miscellaneous
°C

Mass

8

8

8.7

kg

±5 %

Moved mass, unloaded

4.3

4.3

4.7

kg

±5 %

Connection

Sub-D 7W2 (m)(motor)M23 12-pin (m)(sensor)Sub-D 15 (m)Sub-D 15 (m)(motor)HD Sub-D 26 (m)(sensor)Recommended controllers /driversC-863 (single axis)
with C-863.AD12
line driver
C-884 (to 6 axes)
with C-863.AD12
line driver
C-885 with
C-863.20C885(to 40 axes)
and C-863.AD12
line driver
ACS modular
controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

179

MOTION|POSITIONINGUPR-100 Ultraprecision Rotation Stage
High Dynamics due to Magnetic Drive, High Stability■

Unlimited travel range■

Velocity to 360 °/s■

Repeatability to 1.4 μrad■

Clear aperture with 20 mm diameter■

Direct drive

UPR-100 ultraprecision rotation stage, dimensions in mm

Directions of the axes and torques
for rotation stages

Applications>> Incremental Encoder■ Automation■ Precision Micro Assembly■ Biotechnology■ Sample Inspection■ Medical Industry■ Scientific Instrumentation■ Metrology / Testing■ Semiconductor>> Torque Motor

Technology Glossary ...................... page 290

180

W W W. P I . W S

680591111

Unit

Tolerance

Motion and positioning
Active axes

θZ

Travel range>360

Integrated sensor

Incremental angle
measuring system

Sensor signal

Sin/cos, 1 V peak-peakSensor resolution

15744

°

Minimum incremental motion

1.4

μrad

typ.

Unidirectional repeatability

1.4

μrad

typ.

Bidirectional repeatability

±1.75

μrad

typ.

Flatness

±2.5

μm

typ.

Eccentricity

±3.5

μm

typ.

Wobble

±25

μrad

typ.

Angular velocity

360

°/s

max.

Reference point switch

Encoder index

Rotation Stages

Lines/
revolution

Mechanical properties
Bearing

Crossed roller bearings

Torque, power on

0.25

N·m

Load capacity / axial force

20

N

Permissible lateral force

15

N

max.

Permissible torque in θX, θY

5

N·m

max.

max.

Drive properties
Drive type

Ironless 3-phase torque motor

Intermediate circuit voltage

48

V DC

max.

Nominal current, effective

1.2

A

typ.

Peak current, effective

3.8

A

typ.

Torque constant, effective

0.13

N·m/A

typ.
typ.

Motor constant

0.04

N·m/√W

Electrical time constant

0.1

ms

Resistance phase-phase

6.6

Ω

typ.

Inductance phase-phase

0.7

mH

typ.

Back EMF phase-phase

0.67

V/kRPM

max.

Number of pole pairs

14

Miscellaneous
Operating temperature range

5 to 40

°C

MTBF

20000

h

Material

Aluminum, black anodized

Mass

1.2

kg

±5 %

Moved mass

0.4

kg

±5 %

Connection

Sub-D 17W2 (motor)
HD Sub-D 26 (m) (sensor)

Recommended controller

SMC Hydra (double axis)
C-891 (single axis)
C-885 with C-891.10C885(up to 20 axes)
ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

181

MOTION|POSITIONINGUPR-120 Ultraprecision Rotation Stage
Excellent Stability and Travel Accuracy■

Unlimited travel range■

Velocity to 360 °/s■

Incremental angle measuring systemwith 0.017 μrad resolution■

Clear aperture with 35 mm diameter■

Cleanroom compatible■

Direct drive

UPR-120, dimensions in mm

Directions of the axes and torques
for rotation stages

Applications>> Incremental Encoder■ Biotechnology■ Precision Micro Assembly■ Automation■ Sample Inspection■ Medical Industry■ Scientific Instrumentation■ Metrology / Testing■ Semiconductor>> Torque Motor

Technology Glossary ...................... page 290

182

W W W. P I . W S

6808911130

Unit

Tolerance

Motion and positioning
Active axes

θZ

Travel range>360

Integrated sensor

Incremental angle-measuringsystemSensor signal

Sin/cos, 1 V peak-peakSensor resolution

15744

°

Minimum incremental motion

1.4

μrad

typ.

Unidirectional repeatability

1.4

μrad

typ.

Bidirectional repeatability

±1.4

μrad

typ.

Flatness

±1

μm

typ.

Eccentricity

±3

μm

typ.

Wobble

±25

μrad

typ.

Angular velocity

360

°/s

max.

Reference point switch

Encoder index

Limit switches

OpticalRotation Stages

Lines/
revolution

Mechanical properties
Bearing

Crossed roller bearings

Torque, power on

0.5

N·m

Load capacity / axial force

200

N

max.

Permissible lateral force

100

N

max.

max.

Drive properties
Drive typeIron-core 2-phase torque motor

Intermediate circuit voltage

48

V DC

Nominal current, effective

7.7

A

typ.

Torque constant, effective

0.26

N·m/A

typ.

Resistance phase-phase

2.2

Ω

typ.

Inductance phase-phase

1.17

mH

typ.

Back EMF phase-phase

0.18

V·s/radmax.

Operating temperature range

5 to 40°C

Material

Aluminum, black anodized

MTBF

20000

h

Mass

6

kg

±5 %

Moved mass

0.8

kg

±5 %

Connection

Sub-D 9W4 (m) (motor)
Sub-D 15 (m) (sensor)

Recommended controller

SMC Hydra (double axis)
C-891 (single axis)
C-885 with C-891.10C885(up to 20 axes)
ACS modular controller

Miscellaneous

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

183

MOTION|POSITIONINGUPR-120 Air Ultraprecision
Rotation Stage with Air Bearing
Excellent Stability and Travel Accuracy■

Unlimited travel range■

Velocity to 360 °/s■

Incremental angle measuring systemwith 0.017 μrad resolution■

Clear aperture with 35 mm diameter■Air bearings for optimized flatness■

Cleanroom compatible■

Direct drive

UPR-120, dimensions in mm

Directions of the axes and torques
for rotation stages

Applications>> Air Bearing■ Biotechnology■ Precision Micro Assembly>> Incremental Encoder■ Automation■ Sample Inspection>> Torque Motor■ Medical Industry■ Scientific Instrumentation■ Metrology / Testing■ Semiconductor

Technology Glossary ...................... page 290

184

W W W. P I . W S

6824911130

Unit

Tolerance

Motion and positioning
Active axes

θZ

Travel range>360

Integrated sensor

Incremental angle-measuringsystemSensor signal

Sin/cos, 1 V peak-peakSensor resolution

15744

°

Minimum incremental motion

0.35

μrad

typ.

Unidirectional repeatability

0.7

μrad

typ.

Bidirectional repeatability

±0.7

μrad

typ.

Flatness

±0.05

μm

typ.

Eccentricity

±0.1

μm

typ.

Wobble

±1.25

μrad

typ.

Angular velocity

360

°/s

max.

Reference point switch

Encoder index

Limit switches

OpticalRotation Stages

Lines/
revolution

Mechanical properties
Bearing

Air bearing

Torque, power on

0.7

N·m

Load capacity / axial force

200

N

max.

Permissible lateral force

40

N

max.

max.

Drive properties
Drive typeIron-core 2-phase torque motor

Intermediate circuit voltage

48

V DC

Nominal current, effective

7.7

A

typ.

Torque constant, effective

0.26

N·m/A

typ.

Resistance phase-phase

2.2

Ω

typ.

Inductance phase-phase

1.17

mH

typ.

Back EMF phase-phase

0.18

V·s/radmax.

Operating temperature range

5 to 40°C

Material

Aluminum, black anodized

MTBF

20000

h

Mass

6.5

kg

±5 %

Moved mass

1.1

kg

±5 %

Connection

Sub-D 9W4 (m) (motor)
Sub-D 15 (m) (sensor)

Recommended controller

SMC Hydra (double axis)
C-891 (single axis)
C-885 with C-891.10C885(up to 20 axes)
ACS modular controller

Miscellaneous

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

185

MOTION|POSITIONING

A-62x PIglide RM Rotation Stage
with Air Bearings
Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology■

Cleanroom compatible■

Motion platform diameter from 50 mm to 300 mm■

Load
oad capacity to 4170 N■

Eccentricity
ccentricity and flatness <200 nm■Can
an be mounted vertically or horizontally

A-627.075xx, dimensions in mm

Applications>> Absolute Encoder■ Metrology / Testing■ Scanning>> Incremental Encoder■ Optical Alignment■ Scientific Instrumentation>> PIglide Air Bearing Technology>> Torque Motor■ Sample Inspection

Technology Glossary ...................... page 290

186

W W W. P I . W S

A-621.025

A-623.025

A-623.050

A-624.050

A-627.075

Unit

Tolerance

Travel range

unlimited,>360°

unlimited,>360°

unlimited,>360°

unlimited,>360°

unlimited,>360°

Motion platform diameter

50

100

100

150

300

Journal length

25

25

50

50

75

mm

Eccentricity (1)

300

175

175

100

75

nm

Flatness

100

75

75

50

40

nm

max.

Wobble

5

3

3

2

1

μrad

max.

Load capacity, axial

134

536

536

1206

4244

N

max.

Load capacity, radial

57

115

229

344

1203

N

max.

Load torque MX,Y

0.57

1.7

4.52

22.6

141.3

N·m

max.

Axial stiffness

26

96

96

210

788

N/μm

Radial stiffness

8

18

35

64

204

N/μm

Moment of inertia

125

1485

1530

8790

210850kg·mm²

Motionmm
max.

Moved mass

0.4

1.2

1.4

3.2

21.5

kg

Overall mass

1.2

3.1

4.5

8.6

50

kg

Guide typeAir bearing

Air bearing

Air bearing

Air bearing

Air bearing

Drive type

Torquemotor,
3-phase,brushless,ironless,slotless

Torquemotor,
3-phase,brushless,ironless,slotless

Torquemotor,
3-phase,brushless,ironless,slotless

Torquemotor,
3-phase,brushless,ironless,slotless

Torquemotor,
3-phase,brushless,ironless,slotless

Intermediate circuit
voltage, effective

48, nominal
80, max.

48, nominal
80, max.

48, nominal
80, max.

48, nominal
80, max.

48, nominal
80, max.

Rotation Stages

Mechanical properties

Drive properties

V DC

Peak torque

0.21

2.1

2.1

4.71

8.46

N·m

typ.

Nominal torque

0.07

0.7

0.7

1.57

2.82

N·m

typ.

Force constant, effective

0.03

0.26

0.26

0.59

0.61

N·m/A

typ.

Resistance phase-phase

2.7

4.2

4.2

6.7

4.5

Ω

Inductance phase-phase

0.1

0.4

0.4

0.9

0.6

mH

Back EMF phase-phase

4.1

31.8

31.8

71

74

V/kRPMmax.

A-62x.xxxAx

A-62x.xxxBx

A-62x.xxxCx

Incremental angle measuringsystemAbsolute-measuring angle
measuring system

Incremental angle measuringsystemPositioning
Integrated sensor
Sensor signal

Sin/cos, 1 V peak-peak

BiSS-CA/B quadrature, TTL

Lines/revolution

A-621: 8192
A-623: 15744
A-624: 23600
A-627: 47200–

A-621: 8192
A-623: 15744
A-624: 23600
A-627: 47200

Velocity (2)A-621: 2500 RPM max.
A-623: 1200 RPM max.
A-624: 600 RPM max.
A-627: 500 RPM max.

A-621: 2500 RPM max.
A-623: 1200 RPM max.
A-624: 600 RPM max.
A-627: 500 RPM max.

A-621: 550 RPM max. (3)A-623: 300 RPM max. (3)A-624: 175 RPM max. (3)A-627: 75 RPM max. (3)Sensor resolution

A-621: 0.047 μrad (4)A-623: 0.024 μrad (4)A-624: 0.016 μrad (4)A-627: 0.008 μrad (4)A-621: 0.0015 μrad
A-623: 0.0015 μrad
A-624: 0.0015 μrad
A-627: 0.0015 μrad

A-621: 1.94 μrad (5)A-623: 1.02 μrad (5)A-624: 0.68 μrad (5)A-627: 0.33 μrad (5)Bidirectional repeatability±4 μrad±4 μrad±4 μradAccuracy, with error
compensation (6)±8 μrad±8 μrad±8 μradReference point switch

1 / revolution, differential
pulse over one sensor signal
period, 1 V peak-peak–

1 / revolution, one countover one step of the encoder,synchronized to output signal

187

MOTION|POSITIONING

A-62xMiscellaneous
Operating pressure (7)75 to 85 psi (515 to 585 kPa)

Air consumption<2 SCFM (56 SLPM)

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 8573-1 Class 1
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials (8)Hardcoat aluminum, stainless steel fasteners(1) Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside. Pleasecontact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load.
(2) Can be limited by imbalance of the payload or the controller and the drive.
(3) Assumes a sampling rate of 50 MHz.
(4) Assumes 16384x interpolation. Contact PI for the use of other factors.
(5) Uses 400x interpolation. Alternative digital encoder resolutions on request. Please contact PI for a quote.
(6) The specified values are based on error compensation controlled by the controller. The stage must be ordered with a controller from PI toreach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.
(7) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.
(8) Customer-specific materials such as rust-free steel on request. Please contact PI for a quote.

A-621.025xx, dimensions in mm

188

W W W. P I . W SRotation Stages

A-623.xxxxx, dimensions in mm
A-623.025xx: A=75 mm; B=90 mm
A-623.050xx: A=100 mm; B=115 mm

A-624.050xx,
0xx, dimensions in mm

189

MOTION|POSITIONING

A-63x PIglide RL Low-ProﬁleRotation Stage with Air Bearing
Friction-Free, Motorized■

200 mm or 300 mm motion platform diameter■

Low profile, 60 mm■

Eccentricity and flatness <100 nm■

Option for self-locking at rest by magnetic preload■

Direct Drive

A-635.x100
A635.x100 , dimensions in mm

Drawing for A-637.x100
available on www.pi.ws

Applications>> Absolute Encoder■ Metrology / Testing■ Scanning>> Incremental Encoder■ Optical Alignment■ Scientific Instrumentation>> PIglide Air Bearing Technology■ Sample Inspection■ Semiconductor>> Torque Motor
Technology Glossary ...................... page 290

190

W W W. P I . W S

A-635

A-637

Unit

Tolerance

Travel range

unlimited,>360°

unlimited,>360°

Motion platform diameter

200

300

Eccentricity (1)

100

100

nm

max.

Flatness (1)

50

50

nm

max.

Wobble (1)

2

1

μrad

max.

Load capacity, axial (2)

200

500

N

max.

Load capacity, radial (2)

50

200

N

max.

Load torque, MX,Y (2)

5

10

N·m

max.

Moment of inertia

25820

72000

kg·mm²

Moved mass

4.2

6.4

kg

Overall mass

7.5

14

kg

Guide typeAir bearing, magnetic preload

Air bearing, magnetic preload

Motion

mm

A-63x

Unit

Tolerance

Drive properties
Drive type

Torque motor, 3-phase, brushless, ironless, slotless

Intermediate circuit voltage,effective

48, nominal
80, max.

V DC

Peak torque

9

N·m

typ.

Nominal torque

3

N·m

typ.

Torque constant, effective

0.66

N·m/A

typ.

Resistance phase-phase

4.5

Ω

Inductance phase-phase

0.6

mH

Back EMF phase-phase

80

V/kRPMmax.

A-63x.A100

A-63x.B100

Integrated sensor

Incremental angle-measuring system

Absolute angle-measuring system

Sensor signal

Sin/cos, 1 V peak-peak

BiSS-C

Lines/revolution

A-635: 31488
A-637: 47200–

Velocity (3)A-635: 500 rpm max.
A-637: 500 rpm max.

A-635: 500 rpm max.
A-637: 500 rpm max.

Sensor resolution

A-635: 0.05 μrad (4)A-637: 0.03 μrad (4)A-635: 0.0015 μrad
A-637: 0.0015 μrad

Positioning

Bidirectional repeatability±2 μrad±2 μradAccuracy, with error
compensation (5)±6 μrad±6 μradReference point switch

1 / revolution, differential pulse over one
sensor signal period, 1 V peak-peak

–

A-63x
Miscellaneous
Operating pressure (6)75 to 85 psi (515 to 585 kPa)

Air consumption<2 SCFM (56 SLPM)

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 8573-1 Class 1
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners(1) Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside.
Please contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load.
(2) The loads listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are required.
(3) May be limited by the payload, payload imbalance, controller or drive.
(4) Assumes 4096x interpolation. Contact PI for the use of other factors.
(5) The specified values are based on error compensation controlled by the controller. The stage must be ordered with an A-8xx series controller
from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.
(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

191

MOTION|POSITIONING

Rotation Stages

Mechanical properties

WT-85 Motorized Precision Goniometer
Compact, Clear Aperture■

Rotation range 10°■

Repeatability to 8.7 μrad■

Load capacity to 2 kg■

Option: Direct position measurementwith angle measuring system■

Combination with WT-100 with
common pivot point

WT-85 goniometer stage, dimensions in mm

Direction of the axes andtorques for goniometer stages

WT-85 goniometer stage, DC motor,
dimensions in mm

WT-85 goniometer stage, stepper motor,
dimensions in mm

Applications>> Direct Metrology>> Vacuum-Compatible Version■ Sample Inspection■ Photonics■ Precision Micro Assembly■ Optical Alignment■ Metrology / Testing■ Scientific Instrumentation

Technology Glossary ...................... page 290

192

W W W. P I . W S

65409100

65409101

65409200-0000

65409201-0001

DC motor withrotary encoder

DC motorwith angle
measuringsystem androtary encoder

Stepper motor

Stepper motor
and angle
measuringsystem

θX

θX

θX

θX

Rotation range

10

10

10

10

Integrated sensor

Rotary encoder

Incremental
angle measuring system
Rotary encoder–

Incremental
angle measuring system

Sensor signal rotary
encoder

AB quadrature,
RS-422AB quadrature,
RS-422––

Sin/cos, 1 V
peak-peak–Sin/cos, 1 V
peak-peak

Active axes

Unit

Tolerance

Motion and positioning

Sensor signal periods angle
measuring system

–

211

–

211

μrad

Sensor resolution rotary
encoder

2000

2000

–

–

Counts/rev.

Design resolution

4.65

2.11

46.5 (full step)

2.11

μrad

Minimum incremental motion

17.5

2

17.5

2

μrad

typ.

Unidirectional repeatability

69.8

8.7

69.8

8.7

μrad

typ.
typ.

Bidirectional repeatability

±69.8

±8.7

±69.8

±8.7

μrad

Wobble

±125

±125

±125

±125

μrad

typ.

Angular velocity

15

15

7

7

°/s

max.

Limit switches

2 × mechanical2 × mechanical2 × mechanical2 × mechanical

Drive screw type

Ball screw

Ball screw

Ball screw

Ball screw

Drive screw pitch

1

1

1

1

Guide type

Ball bearings

Ball bearings

Ball bearings

Ball bearings

Rotation Stages

Sensor signal angle
measuring system°

Mechanical propertiesmm

Gear ratio

675:1

675:1

675:1

675:1

Load capacity

20

20

20

20

N

max.

Torque Mx, power on

0.75

0.75

0.75

0.75

N·m

max.

Permissible lateral force

15

15

15

15

N

max.

Permissible torque in θy, θz

4

4

4

4

N·m

max.

DC motor

DC motor

2-phasestepper motor

2-phasestepper motor

Drive properties
Motor typeOperating voltage, nominal

24

24

24

24

V

nom.

Operating voltage, max.

48

48

48

48

V

max.

Step resolution

–

–

200

200

Full
steps/rev.

Operating temperature range

5 to 40

5 to 40

5 to 40

5 to 40°C

Material

Aluminum,
black anodized

Aluminum,
black anodized

Aluminum,
black anodized

Aluminum,
black anodized

Mass

0.9

0.9

0.9

1.1

Connection

HD Sub-D 15(m)(motor/sensor)

HD Sub-D 15(m) (motor)
Sub-D 9 (m)(sensor)HD Sub-D 15(m)

HD Sub-D 15(m) (motor)
Sub-D 9 (m)(sensor)Recommended controllers /driversC-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

Miscellaneous

kg

±5 %

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

193

MOTION|POSITIONING

WT-100 Motorized Precision Goniometer
Compact, with Large Aperture■

Rotation range 10°■

Repeatability to 8.7 μrad■

Load capacity to 2 kg■

Option: Direct position
measurement with angle
measuring system■

Combination with WT-85
with common pivot point

WT-100 goniometer stage, DC motor,
dimensions in mm

WT-100 goniometer stage,
dimensions in mm

WT-100 goniometer stage,
stepper motor,dimensions in mm

Applications>> Direct Metrology>> Vacuum-Compatible Version■ Sample Inspection■ Photonics■ Precision Micro Assembly■ Optical Alignment■ Metrology / Testing■ Scientific Instrumentation

Technology Glossary ...................... page 290

194

W W W. P I . W S

65419100

65419101

65419200-0000

65419201-0001

DC motor withrotary encoder

DC motorwith angle
measuringsystem androtary encoder

With stepper
motor

Stepper motor
and angle
measuringsystem

θX

θX

θX

θX

Rotation range

10

10

10

10

Integrated sensor

Rotary encoder

Incremental
angle measuring system
Rotary encoder–

Incremental
angle measuring system

Sensor signal rotary encoder

AB quadrature,
RS-422AB quadrature,
RS-422––

Sensor signal angle measuringsystem–Sin/cos, 1 V
peak-peak–Sin/cos, 1 V
peak-peakSensor signal periods angle
measuring system

–

157

–

157

Sensor resolution rotary
encoder

2000

2000

–

Design resolution

3.49

1.57

34.9

1.57

Minimum incremental motion

17.5

8.7

17.5

8.7

μrad

typ.

Unidirectional repeatability

70

8.7

70

8.7

μrad

typ.

Bidirectional repeatability

±70

±8.7

±70

±8.7

μrad

typ.

Wobble

±125

±125

±125

±125

μrad

typ.

Angular velocity

15

15

7

7

°/s

max.

Limit switches

2 × mechanical2 × mechanical2 × mechanical2 × mechanical

Active axes

Unit

Tolerance

Motion and positioning°μrad

Rotation Stages

Cts./rev.
μrad

Mechanical properties
Drive screw type

Ball screw

Ball screw

Ball screw

Ball screw

Drive screw pitch

1

1

1

1

Guide type

Ball bearings

Ball bearings

Ball bearings

Ball bearingsmmGear ratio

900:1

900:1

900:1

900:1

Load capacity

20

20

20

20

N

Permissible lateral force

15

15

15

15

N

max.

Permissible torque in θY, θZ

4

4

4

4

N·m

max.

DC motor

DC motor

2-phasestepper motor

2-phasestepper motor

max.

Drive properties
Motor typeOperating voltage, nominal

24

24

24

24

V

nom.

Operating voltage, max.

48

48

48

48

V

max.

Step resolution

–

–

200

200

Full steps/
rev.

Operating temperature range

5 to 40

5 to 40

5 to 40

5 to 40°C

Material

Aluminum,
black anodized,
steel

Aluminum,
black anodized,
steel

Aluminum,
black anodized,
steel

Aluminum,
black anodized,
steel

Mass

0.9

0.9

0.9

0.9

Connection

HD Sub-D 15(m)

HD Sub-D 15(m) (motor)
Sub-D 9 (m)(sensor)HD Sub-D 15(m) (motor)

HD Sub-D 15(m) (motor
Sub-D 9 (m)(sensor)Recommended controllers /driversC-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

Miscellaneous

kg

±5 %

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

195

MOTION|POSITIONING

WT-90 Motorized Precision GoniometerLong Travel Range■

Rotation range 90°■

Repeatability to 2.7 μrad■

Load capacity to 8 kg■

Option: Direct position measurementwith angle measuring system■

Combination with WT-120 with
common pivot point

WT-90 goniometer stage, dimensions in mm

Direction of the axes and torques
for goniometer stages

WT-90 goniometer stage, DC motor,
dimensions in mm

WT-90 goniometer stage, stepper motor,
dimensions in mm

Applications>> Direct Metrology>> Vacuum-Compatible Version■ Sample Inspection■ Photonics■ Precision Micro Assembly■ Optical Alignment■ Metrology / Testing■ Scientific Instrumentation

Technology Glossary ...................... page 290

196

W W W. P I . W S

65509100

65509200

65509201

With DC motor

With stepper motor

With stepper motor
and angle measuringsystemθX

θX

θX

Rotation range

90

90

90

Integrated sensor

Rotary encoder–

Incremental angle
measuring system

Sensor signal rotary encoder

AB quadrature,
RS-422–––

Sin/cos, 1 V peak-peakActive axes

Unit

Tolerance

Motion and positioning

Sensor resolution rotary
encoder

20000

–

–

Sensor signal periods angle
measuring system

–

–

269.3

μrad

Design resolution

1.047

105

2.69

μrad

Minimum incremental motion

52.4

4.8

2.7

μrad

typ.

Unidirectional repeatability

87

9.6

17.5

μrad

typ.

Bidirectional repeatability

±350

±175

±17.5

μrad

typ.

Wobble

±125

±125

±125

μrad

typ.

Angular velocity

15

10

10

°/s

max.

Limit switches

2 × mechanical2 × mechanical2 × mechanical

Guide type

Ball bearings

Ball bearings

Ball bearings

Drive screw type

Worm gear

Worm gear

Worm gear

300:1

300:1

300:1

Torque, power on

2.5

2.5

2.5

N·m

max.

Holding torque, power off

2.5

2.5

2.5

N·m

max.

Load capacity

80

80

80

N

max.

Permissible lateral force

50

50

50

N

max.

Permissible torque in θY, θZ

12

12

12

N·m

max.

Motor typeDC motor

2-phase stepper
motor

2-phase stepper
motor

Step resolution

–

200

200

Full steps/
rev.

Operating temperature range

5 to 40

5 to 40

5 to 40°C

Material

Aluminum, blackanodized, stainlesssteel, red bronze

Aluminum, blackanodized, stainlesssteel, red bronze

Aluminum, blackanodized, stainlesssteel, red bronze

Mass

2.8

2.8

3

Connection

Sub-D 15 (m)HD Sub-D 15 (m)HD Sub-D 15 (m)(motor)
Sub-D 9 (m) (sensor)

Recommended controllers /driversC-863 (single axis)
C-884 (up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-663.12 (single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

Rotation Stages

Sensor signal angle
measuring system°

Mechanical properties

Drive screw pitch
Worm gear ratiommDrive properties

Miscellaneous

kg

±5 %

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

197

MOTION|POSITIONING

WT-120 Motorized Precision GoniometerLong Travel Range, High Loads■

Rotation range 90°■

Repeatability to 17.5 μrad■

Load capacity to 20 kg■

Option: Direct position measurementwith angle measuring system■

Combination with WT-90 with
common pivot point

WT-120 goniometer stage, dimensions in mm

Direction of the axes and torques
for goniometer stages

WT-120 goniometer stage,
DC motor, dimensions in mm

WT-120 goniometer stage,
stepper motor, dimensions in mm

Applications>> Direct Metrology>> Vacuum-Compatible Version■ Sample Inspection■ Photonics■ Precision Micro Assembly■ Optical Alignment■ Metrology / Testing■ Scientific Instrumentation

Technology Glossary ...................... page 290

198

W W W. P I . W S

65609110

65609200

65609211

With DC motor

With stepper motor

With stepper motor
and angle measuringsystemθX

θX

θX

Rotation range

90

90

90

Integrated sensor

Rotary encoder–

Incremental angle
measuring system

Sensor signal rotary
encoder

AB quadrature,
RS-422–––

Sin/cos,
1 V peak-peakActive axes

Unit

Tolerance

Motion and positioning

Sensor resolution rotary
encoder

20000

–

–

Sensor signal periods angle
measuring system

–

–

150

μrad

Design resolution

1.745

174.5

1.5

μrad

Minimum incremental motion

69.8

69.8

17.5

μrad

typ.

Unidirectional repeatability

87

87

17.5

μrad

typ.

Bidirectional repeatability

±350

±350

±17.5

μrad

typ.

Wobble

±125

±125

±125

μrad

typ.

Angular velocity

30

25

25

°/s

max.

Limit switches

2 × mechanical2 × mechanical2 × mechanical

Guide type

Ball bearings

Ball bearings

Ball bearings

Drive screw type

Worm gear

Worm gear

Worm gear

Worm gear ratio

180:1

180:1

180:1

Torque, power on

8

8

8

N·m

max.

Load capacity

200

200

200

N

max.

Permissible lateral force

90

90

90

N

max.

Permissible torque in θY, θZ

25

25

25

N·m

max.

Motor typeDC motor

2-phase stepper
motor

2-phase stepper
motor

Step resolution

–

200

200

Full steps/
rev.

Operating temperature range

5 to 40

5 to 40

5 to 40°C

Material

Aluminum, blackanodized, stainlesssteel, red bronze

Aluminum, blackanodized, stainlesssteel, red bronze

Aluminum, blackanodized, stainlesssteel, red bronze

Mass

11.5

11.5

11.5

Connection

Sub-D 15 (m)LEMO ERA.3S.316
16-pinLEMO ERA.3S.316
16-pin (motor)

Recommended controllers /driversC-863 (single axis)
with C-863.AD12
line driverC-663.12 (single axis)

C-663.12 (single axis)

SMC Hydra(double axis)

SMC Hydra(double axis)

C-884 (to 6 axes)
with C-863.AD12
line driver

C-885 with
C-663.12C885(up to 20 axes)

C-885 with
C-663.12C885(up to 20 axes)

C-885 with
C-863.20C885(to 40 axes)
and C-863.AD12
line driver

ACS modular
controller

ACS modular
controller

Rotation Stages

Sensor signal angle
measuring system°

Mechanical properties

Drive screw pitch

mm

Drive properties

Miscellaneous

kg

±5 %

Sub-D 9 (m) (sensor)

ACS modular
controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.
Ask about custom designs!

199

MOTION|POSITIONING

Linear Actuators

200

W W W. P I . W S

202

V-900KPIC PIMag® VC Vertical Linear Actuator ..............................................................
V-273 PIMag® Voice Coil Linear Actuator .......................................................................
V-275 PIMag® Voice Coil Linear Actuator .......................................................................
V-277 PIMag® High-Load Linear Actuator ......................................................................

202
204
208
212

Screw-Drive Precision Actuators .............................................................................................................................................

216

L-220 High-Resolution Linear Actuator ..........................................................................
M-227 High-Resolution Linear Actuator with DC Motor ................................................
M-228 / M-229 High-Resolution Linear Actuator with Stepper Motor ............................
M-230 High-Resolution Linear Actuator with DC Motor ................................................
M-232 High-Resolution Linear Actuator with DC Motor ................................................

216
218
220
222
224

High-Load Screw-Drive Actuators ...........................................................................................................................................

226

M-235 High-Resolution Linear Actuator with DC Motor ................................................
L-239 High-Load Linear Actuator ...................................................................................
M-238 High-Load Linear Actuator with DC Motor ..........................................................

226
228
230

201

MOTION|POSITIONING

Linear Actuators

Voice Coil Actuators ................................................................................................................................................................

V-900KPIC PIMag® VC Vertical Linear Actuator
Compact with Integrated Position Sensor■

Travel range 1.5 mm■

High scanning frequencies, fast step-and-settle■

Integrated linear encoder with 0.1 μm resolution■

Wear-free flexure guide for long lifetime■

Compact dimensions■

OEM linear actuator

V-900KPIC, dimensions in mm

Applications>> Flexure Guiding System■ Sample Inspection■ Metrology / Testing>> Incremental Encoder■ Precision Micro Assembly■ General Automation>> PIMag® Voice Coil

■ Electronics Manufacturing

Technology Glossary ...................... page 290

202

W W W. P I . W S

V-900KPIC
Active axes

Unit

Tolerance

Z

Motion and positioning
Travel range

1.5

Integrated sensor

Optical linear encodermm

Servo update rate

10*

kHz

Resolution, open loop

10*

nm

Resolution, closed loop

100

nm

typ.

Linearity error, closed loop

±1

%

typ.

Repeatability

±500

nm

typ.

Motion straightness

±5

μm

±5

Velocity, open loop

250

mm/s

max.

Velocity, closed loop

45

mm/s

typ.

Mechanical properties
Moved mass

10

g

typ.

Average push/pull force

0.5

N

nominalPush/pull force

0.8

N

max.

Force constant

4

N/A

typ.

Drive properties
Motor type

PIMag® Voice Coil Drive

Magnet material

NdFeB (N38SH)

Coil resistance

8.8

Ω

typ.

Coil inductance

0.8

mH

typ.

Average continuous current

120**

mA

max.

Peak current (max. 3 s)

200

mA

Operating temperature range

10 to 45

°C

Material

Aluminum

Mass

40

g

Cable length

0.2m

Motor / sensor connection

Molex 12 pins

Lifetime>108

Recommended controller

C-413 (plug adapter required)cyclesLinear Actuators

Miscellaneous

±5 %

min.

* With C-413 controller.
** Do not exceed for continuous operation.

The settling time for a 100 μm step is approx. 50 ms.

203

MOTION|POSITIONING

V-273 PIMag® Voice Coil Linear Actuator
High Dynamics and Inexpensive■

Travel ranges to 20 mm■

Velocity to 100 mm/s■

Integrated linear encoder, 0.01 μm resolution■

Optional force sensor with 1 mN resolution

PIMag® Voice Coil
Voice coil drives consist of 2 essential components: A permanent magnet anda coil, which is located in the air gap of the magnetic field. When current flows
through the coil, it moves in the magnetic field of the permanent magnet.
The direction of motion depends on the polarity. Thanks to their low weight
and friction-free drive principle, voice coil drives are particularly suitable forapplications, which require high dynamics and high velocities at limited travel
ranges. High scan frequencies and precision positioning are also possible withthese drives, because they are free of the effects of hysteresis.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the actual position directly at the
motion platform with the greatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on position measuring.

Applications

V-273.441 with force sensor>> Incremental Encoder■ Sample Inspection■ Metrology / Testing■ Precision Micro Assembly■ General Automation>> PIMag® Voice Coil

■ Electronics Manufacturing

Technology Glossary ...................... page 290

204

W W W. P I . W S

V-273.440
V-273.441 with force sensor
Active axes

Unit

Tolerance

Z

Motion and positioning
Travel range

20

Integrated sensor

Optical linear encodermm

Sensor resolution

10 (1)

nm

max.

Minimum incremental motion

100

nm

typ.

Linearity error, closed loop

1

%

typ.

Repeatability

±0.5

μm

typ.

Velocity

100

mm/s

max.

Force sensor resolution (optional)

1

mN

max.

Smallest force step (optional)

5

mN

typ.

Mechanical properties
Bearing / guide

Recirculating ball bearings

Motion straightness

±20

μm

±5 %

Moved mass without load

100 (230 with force sensor)

g

typ.

Motor type

PIMag® Voice Coil Drive, moving coil

Coil resistance16Ωtyp., at 20 °C

Coil inductance6mH

typ., at 20 °C

Time constant

0.375

ms

Back EMF

8

V·s/m

Force constant8

N/A

Motor constant

2

N/(√W)

Current constant

0.125

A/N

typ.

Average continuous current

375 (2)mA

max.

Peak current (max. 3 s)

800

mA

Average push/pull force

3

N

Power dissipation of the coilwith 100 % duty cycle

2.25

W

Maximum push/pull force

6

N

Operating temperature range

10 to 60

°C

Material

Aluminum

Linear Actuators

Drive properties

typ.

nominalmax.

Miscellaneous

Mass

660 (790 with force sensor)g

Cable length1mMotor / sensor connection

Sub-D 15 (m) with force sensor: 2 × Sub-D 15 (m)Lifetime>107

Recommended controller

C-413.2x

cycles±5 %min.

(1) With C-413 controller.
(2) Do not exceed for continuous operation.

205

MOTION|POSITIONING

V-273.440, dimensions in mm

206

W W W. P I . W S

Linear Actuators

V-273.441, dimensions in mm

207

MOTION|POSITIONING

V-275 PIMag® Voice Coil Linear Actuator
High Dynamics, with Optional Force Control■

Push force up to 10 N■

Velocity to 600 mm/s■

Integrated linear encoder, 0.01 μm resolution■

Weight force compensation■

Optional force sensor with 1 mN resolution

PIMag® Voice Coil
Voice coil drives consist of 2 essential components: A permanent magnet anda coil, which is located in the air gap of the magnetic field. When current flows
through the coil, it moves in the magnetic field of the permanent magnet.
The direction of motion depends on the polarity. Thanks to their low weight
and friction-free drive principle, voice coil drives are particularly suitable forapplications, which require high dynamics and high velocities at limited travel
ranges. High scan frequencies and precision positioning are also possible withthese drives, because they are free of the effects of hysteresis.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the actual position directly at the
motion platform with the greatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on position measuring.

Applications>> Incremental Encoder■ Sample Inspection■ Metrology / Testing■ Precision Micro Assembly■ General Automation>> PIMag® Voice Coil

■ Electronics Manufacturing

Technology Glossary ...................... page 290

208

W W W. P I . W S

V-275.430
V-275.431 with force sensor
Active axes

Unit

Tolerance

Z

Motion and positioning
Travel range

10

Integrated sensor

Optical linear encodermm

Sensor resolution

10 (1)

nm

max.

Minimum incremental motion

100

nm

typ.

Linearity error, closed loop

1

%

typ.

Repeatability

±0.5

μm

typ.

Velocity

600

mm/s

max.

Force sensor resolution (optional)

1

mN

max.

Smallest force step (optional)

5

mN

typ.

Mechanical properties
Bearing / guideLinear recirculatingball bearings

Motion straightness

±5

μm

±5 %

Moved mass without load

150

g

typ.

Drive properties
PIMag® voice coil drive,
moving coil

Coil resistance5.7

Ω

typ., at 20 °C

Coil inductance

3.75

mH

typ., at 1 kHz

Time constant

0.65

ms

Back EMF

10

V·s/m

Force constant

10

N/A

Motor constant

4.2

N/(√W)

Current constant

0.1

A/N

typ.

Average continuous current

700 (2)mA

max.

Peak current (max. 3 s)

1500

mA

Average push/pull force

7

N

Power dissipation of the coilwith 100 % duty cycle

4

W

Maximum push/pull force

15

N

Operating temperature range

10 to 60

°C

Material

Aluminum

Linear Actuators

Motor type

μm

typ.

nominalmax.

Miscellaneous

Mass

800

g

Cable length3mMotor / sensor connection

Sub-D 25 (m), with force
sensor Sub-D 9 (m)Lifetime>107

Recommended controller

C-413.1x

cycles±5 %min.

(1) With C-413 controller.
(2) Do not exceed for continuous operation.

209

MOTION|POSITIONING

V-275.430, dimensions in mm

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W W W. P I . W S

0WKUHDG
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211

MOTION|POSITIONING

V-277 PIMag® High-Load Linear Actuator
Voice Coil Drive for High Velocity■

Force up to 20 N■

Velocity up to 750 mm/s■

Integrated linear encoder, 0.01 μm resolution■

Weight force compensation■

Optional force sensor with 1 mN resolution

PIMag® Voice Coil
Voice coil drives consist of 2 essential components: A permanent magnet anda coil, which is located in the air gap of the magnetic field. When current flows
through the coil, it moves in the magnetic field of the permanent magnet.
The direction of motion depends on the polarity. Thanks to their low weight
and friction-free drive principle, voice coil drives are particularly suitable forapplications, which require high dynamics and high velocities at limited travel
ranges. High scan frequencies and precision positioning are also possible withthese drives, because they are free of the effects of hysteresis.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the actual position directly at the
motion platform with the greatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on position measuring.

Applications>> Incremental Encoder■ Sample Inspection■ Metrology / Testing■ Precision Micro Assembly■ General Automation>> PIMag® Voice Coil

■ Electronics Manufacturing

Technology Glossary ...................... page 290

212

W W W. P I . W S

V-277.630
V-277.631 with force sensor
Active axes

Unit

Tolerance

Z

Motion and positioning
Travel range

15

Integrated sensor

Optical linear encodermm

Sensor resolution

10 (1)

nm

max.

Minimum incremental motion

100

nm

typ.

Linearity error, closed loop

1

%

typ.

Repeatability

±0.5

μm

typ.

Velocity

750

mm/s

max.

Force sensor resolution

1

mN

max.

Force resolution, closed-loop

5

mN

typ.

Mechanical properties
Bearing / guideLinear recirculating ballbearings

Motion straightness

±5

μm

±5 %

Moved mass without load

190

g

typ.

Drive properties
PIMag® voice coil drive,
moving coil

Coil resistance6.3

Ωtyp., at 20 °C

Coil inductance

2.70

mH

typ., at 1 kHz,at 20 °C
typ.

Time constant

0.43

ms

Back EMF

14

V·s/m

Force constant

13.5

N/A

Motor constant

5.6

N/(√W)

Current constant

0.072

A/N

typ.

Average continuous current

740 (2)mA

max.

Peak current (max. 3 s)

1500

mA

Average push/pull force

10

N

Power dissipation of the coilwith 100 % duty cycle

3.2

W

Maximum push/pull force

20

N

Operating temperature range

10 to 60

°C

Material

Aluminum

Linear Actuators

Motor typetyp.

nominalmax.

Miscellaneous

Mass

1850

g

Cable length3mMotor / sensor connection

Sub-D 25 (m), with force
sensor Sub-D 9 (m)Lifetime>107

Recommended controller

C-413.1x

cycles±5 %min.

(1) With C-413 controller.
(2) Do not exceed for continuous operation.

213

MOTION|POSITIONING

V-277.630, dimensions in mm

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214

W W W. P I . W S

0WKUHDG
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215

MOTION|POSITIONING

L-220 High-Resolution Linear Actuator
Suitable for a High Number of Cycles■

Forces up to 125 N■

Travel ranges 13 to 77 mm(½” to 3”)■

DC or stepper motor■

Nonrotating tip■

Vacuum-compatible versions
to 10–9 hPa on request

L-220, dimensions in mm

L-220.10SG
L-220.10DG
L-220.20SG
L-220.20DG
L-220.50SG
L-220.50DG
L-220.70SG
L-220.70DG

Travel

A

B

C

13
13
26
26
52
52
77
77

26
26
39
39
65
65
90
90

148,3
155,2
161,5
168,4
186,6
193,5
211,6
218,5

13
19,9
13
19,9
13
19,9
13
19,9

Applications>> Incremental Encoder■ Electronics Manufacturing■ Precision Micro Assembly■ General Automation■ Scientific Instrumentation■ Optical Alignment■ Semiconductor>> Vacuum-Compatible Versions

Technology Glossary ...................... page 290

216

W W W. P I . W S

L-220.x0DG

L-220.x0SG

High precision, with DC gear
motor

Stepper motor with gearhead

X

X

Travel range

13 / 26 / 52 / 77

13 / 26 / 52 / 77

Integrated sensor

Rotary encoder–

Motion axes

Unit

Tolerance

Motion and positioningmm

Sensor resolution

2048

–

Cts./rev.

Design resolution

0.022

0.55 (full step)

μm

typ.

Minimum incremental
motion

0.1

0.1

μm

typ.

Unidirectional repeatability

0.5

0.5

μm

typ.

Bidirectional repeatability

±1

±1

μm

typ.

Velocity

3.5

0.8

mm/s

max.

Mechanical properties
Drive screw type

Ball screw

Ball screw

Thread pitch1

1

Gear ratio

12493:567

387283:5103

Motor resolution–

384 (29184)*

Push/pull force

125

125

N

max.

Holding force

80

125

N

typ.

Permissible lateral force

1

1

N

max.

DC motor with gearhead

2-phase stepper motorwith gearheadmm

Linear Actuators

Steps/rev.

Drive properties
Motor typeOperating voltage, nominal

12

12

V

nom.

Operating voltage, max.

24

48

V

max.

Step resolution–

24

Full steps/rev.

Limit and reference pointswitches

Hall effect

Hall effectOperating temperature
range

5 to 40

5 to 40

Material

Stainless steel, red brass

Stainless steel, red brass

Mass

0.21 / 0.23 / 0.26 /0.29

0.23 / 0.25 / 0.28 /0.32

kg

±5 %

Moved mass

0.02 / 0.02 / 0.025 / 0.030

0.02 / 0.02 / 0.025 / 0.030

kg

±5 %

Cable length

0.5

0.5

m

±10 mmConnector

HD Sub-D 26 (m)HD Sub-D 26 (m)Recommended
controllers / drivers

C-863 (single axis)
C-884 (up to 6 axes)
C-885 with C-863.20C885(to 40 axes)
ACS modular controller

C-663.12 (single axis)
SMC Hydra (double axis)
C-885 with C-663.12C885(up to 20 axes)
ACS modular controller

Miscellaneous°C

All cables required for operation with the recommended controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

217

MOTION|POSITIONING

M-227High-Resolution Linear Actuator with DC Motor
With Optional Piezo Drive■

Min. incremental motion 0.05 μm■

Nonrotating end piece■

Flat tip included■

Subnanometer resolution with optionalpiezo drive■

For installing into mechanical systems
with external limit switches

M-227, dimensions in mm

Applications>> Incremental Encoder■ General Automation

Technology Glossary ...................... page 290

218

W W W. P I . W S

M-227.10
M-227.25
M-227.50

Unit

Travel range

10 / 25 / 50mm

Integrated sensor

Rotary encoder

Tolerance

Motion and positioning

Sensor resolution

2048

Cts./rev.

Design resolution

0.0035μm

Minimum incremental motion

0.05

μm

typ.

Backlash

10

μm

typ.

typ.

Unidirectional repeatability

±0.1

μm

typ.

Velocity

0.75

mm/s

max.

Mechanical properties
Drive screw

Leadscrew

Thread pitch

0.5

Gear ratio

69.12:1

Push/pull force (1)

40

N

max.

Permissible lateral force

0.1

N

max.

mm

Motor typeDC gear motor

Operating voltage

0 to ±12

V

Motor power

1.78

W

Operating temperature range–20 to 65°C

Material

Aluminum anodized,
chrome steel

Linear Actuators

Drive properties

nominalMiscellaneous

Mass

0.16 / 0.22 / 0.26

kg

±5 %

Cable length

0.1 m + 3 m extension
cable (included)m±10 mmConnector

Sub-D 15

Recommended controllers / drivers

C-863
C-884

(1) Higher forces on request.
Ask about custom designs!

219

MOTION|POSITIONING

M-228 / M-229 High-Resolution
Linear Actuator with Stepper Motor
Compact and Extremely Inexpensive
xpensive■

Travel ranges 10 and 25 mm■

High load capacity 80 N■

Resolution 0.36 nm with gearhead
head version■

Velocity to 4 mm/s■

Direct drive versions include handwheel■

Noncontact limit and referencece point switches

M-228.11S, dimensions in mm

M-228.10S, dimensions in mm

M-229.26S, dimensions in mm

M-229.25S, dimensions in mm

Applications>> Incremental Encoder■ General Automation■ Scientific Instrumentation

Technology Glossary ...................... page 290

220

W W W. P I . W S

M-228.10S

M-228.11S

M-229.25S

M-229.26S

Slim design

Lower cost,higher velocity

Slim design

Lower cost,higher velocity

Unit

Tolerance

Motion and positioning
Travel range

10

10

25

25

mm

Design resolution (1)0.000360.000610.000360.00061μm

typ.

Min. incremental motion (1)

1

1

1

1

μm

typ.

Backlash (2)

5

10

10

10

μm

typ.

Unidirectional repeatability

±2

±2

±2

±2

μm

typ.

Velocity

1.5

4

1.5

4

mm/s

max.

Reference point switch
repeatability

1

1

1

1

μm

typ.

Drive screw type

Leadscrew

Leadscrew

Leadscrew

Leadscrew

Drive screw pitch

0.5

0.5

0.5

0.5

Gear ratio

256/9

–

256/9

–

Push/pull force capacity

20

50

50

80

2-phase stepper
motor

2-phase stepper
motor

2-phase stepper
motor

2-phase stepper
motor

Mechanical properties
mm
N

max.

Motor typeLinear Actuators

Drive properties

Step resolution

24

400

24

400

steps/rev.

Nominal current per phase

250

850

1000

850

mA

Limit and reference pointswitches

Hall effect

Hall effect

Hall effect

Hall effectOperating temperature range–20 to 65–20 to 65–20 to 65–20 to 65

Material

Al (anodized),
steel, brass

Al (anodized),
steel, brass

Al (anodized),
steel, brass

Al (anodized),
steel, brass

Mass

0.23

0.36

0.4

0.61

kg

±5 %

Cable length

0.5 m, incl. 3 m
cable

0.6 m, incl. 3 m
cable

0.5 m, incl. 3 m
cable

0.6 m, incl. 3 m
cable

m

±10 mmConnector

Sub-D 15

Sub-D 15

Sub-D 15

Sub-D 15

Recommended controller

C-663.12

C-663.12

C-663.12

C-663.12

max.

Miscellaneous°C(1) With recommended controller.
(2) With preload.
Avoid lateral forces on the pusher!
Ask about custom designs!

221

MOTION|POSITIONING

M-230 High-Resolution
Linear Actuator with DC Motor
Nonrotating Tip, Limit Switches■

Min. incremental motion 0.05 μm■

Travel ranges 10 and 25 mm■

Nonrotating end piece■

Velocity 0.8 mm/s■

MTBF >20000 h

M-230, dimensions in mm

Applications>> Incremental Encoder■ General Automation■ Optical Alignment■ Scientific Instrumentation

Technology Glossary ...................... page 290

222

W W W. P I . W S

M-230.10
M-230.25

Unit

Tolerance

High precision, with DC gear motor
Motion and positioning
Travel range

10 / 25

Integrated sensor

Rotary encodermm

Sensor resolution

2048

Cts./rev.

Design resolution

0.0046μm

Minimum incremental motion

0.05

μm

typ.

Backlash

2

μm

typ.

typ.

Unidirectional repeatability

±0.1

μm

typ.

Velocity

0.8

mm/s

max.

Reference point switch repeatability

1

μm

typ.

Mechanical properties
Drive screw

Leadscrew

Thread pitch

0.4

Gear ratio

42.92063:1

Push/pull force capacity

70

N

max.

Permissible lateral force

30 / 20

N

max.

mm

Motor typeDC gear motor

Operating voltage

0 to ±12

V

Motor power

1.78

W

Limit and reference point switches

Hall effectLinear Actuators

Drive properties

nominalMiscellaneous
Operating temperature range–20 to 65

Material

Al (anodized), steel, brass

°C

Mass

0.3 / 0.35

Connector

15-pin sub-D, incl. encoder driverkg

Recommended controllers /drivers

C-863
C-884

±5 %

Ask about custom designs!

223

MOTION|POSITIONING

M-232 High-Resolution
Linear Actuator with DC Motor
Compact due to Folded Drive■

Travel range 17 mm■

Min. incremental motion 0.1 μm■

Velocity to 1.5 mm/s■

Closed-loop DC motors■

Rotating end piece, rotating pusher■

MTBF >5000 h

M-232, dimensions in mm

Applications>> Incremental Encoder■ General Automation■ Optical Alignment■ Scientific Instrumentation

Technology Glossary ...................... page 290

224

W W W. P I . W S

M-232.17

Unit

Tolerance

High resolution, closed loop
Motion and positioning
Travel range

17

Integrated sensor

Rotary encodermm

Sensor resolution

2048

Cts./rev.

Design resolution

0.007

μm

Minimum incremental motion

0.1

μm

typ.

Backlash

2

μm

typ.

typ.

Unidirectional repeatability

±0.2

μm

typ.

Velocity

1.5

mm/s

max.

Mechanical properties
Drive screw

Leadscrew

Thread pitch

0.4

Gear ratio

28.44444:1

Motor resolution–

steps/rev.

Push/pull force

40

N

mm

max.

Motor typeDC gear motor

Operating voltage

0 to ±12

V

Motor power

1.78

W

Limit switches

Hall effectLinear Actuators

Drive properties

Miscellaneous
Operating temperature range–20 to 65

Material

Aluminum anodized, chrome steel

°C

Mass

0.17

kg

±5 %

Cable length

0.5 + 3 m extension cable (included)m±10 mmConnector

15-pin sub-D, incl. encoder driver

Recommended controllers /drivers

C-863
C-884

Avoid lateral forces on the pusher!
Ask about custom designs!

225

MOTION|POSITIONING

M-235 High-Resolution
Linear Actuator with DC Motor
Highly Dynamic, High Forces up to 120 N■

Travel ranges 20 and 50 mm■

Min. incremental motion to 0.1 μm■

DC motor allows high velocities■

Push/pull force capacity to 120 N■

MTBF >10000 h■

Nonrotating end piece■

Recirculating ball screw






 K

M-235.2DD, M-235.2DG, M-235.5DD
and M-235.5DG, dimensions in mm



0





PLQ

0[

 0'[ 0'[ 0'[ 0'[Applications>> Incremental Encoder■ General Automation■ Optical Alignment■ Scientific Instrumentation

Technology Glossary ...................... page 290

226

W W W. P I . W S

M-235.2DG
M-235.5DG

M-235.2DD
M-235.5DD

High precision,
with DC gear motor

High dynamics

Travel range

20 / 50

20 / 50

Integrated sensor

Rotary encoder

Rotary encoder

Unit

Tolerance

Motion and positioningmm

Sensor resolution

2048

2048

Cts./rev.

Design resolution

0.016

0.5

μm

typ.

Minimum incremental
motion

0.1

1.5

μm

typ.

Backlash

2

2

μm

typ.

Unidirectional repeatability

±0.1

±0.5

μm

typ.

Velocity

2

30

mm/s

max.

Gear ratio

29.6:1–

Push/pull force

120

50

N

max.

Permissible lateral force

8

8

N

max.

Motor typeDC gear motor

DC motor

Operating voltage

0 to ±120 to ±12

V

Motor power

4

17

W

Limit and reference pointswitches

Hall effect

Hall effectOperating temperature
range–20 to 65–20 to 65

Material

Aluminum anodized,
chrome steel

Aluminum anodized,
chrome steel

Mass0.55 / 0.7

0.5 / 0.65

kg

±5 %

Cable length

0.5 m, 3 m cables incl.

0.5 m, 3 m cables incl.

m±10 mmConnector

15-pin sub-D,
incl. encoder driver

15-pin sub-D,
incl. encoder driver

Recommended
controllers / drivers

C-863
C-884

C-863
C-884

Mechanical properties

Linear Actuators

Drive properties

nominalMiscellaneous°C

Ask about custom designs!

227

MOTION|POSITIONING

L-239 High-Load Linear Actuator
Dynamic, High-Resolution Precision Drive

L-239.50SD with stepper motor, dimensions in mm■

Robust design for industrial
environments■

High feed force to 300 N■

Travel range 52 mm (2”)■

Minimum incremental motion
0.1 μm■Velocity to 50 mm/s■

Preloaded, low-friction ball screw■

Vacuum-compatible versions to
10–9 hPa on request■

Stepper, DC and BLDC motors

L-239.50AD with ActiveDrive DC motor, dimensions in mm

L-239.033232 with DC motor and L-239.035232 with brushless DC motor, dimensions in mm

Applications

L-239 shaft, dimensions in mm>> ActiveDrive■ Electronics Manufacturing■ Precision Micro Assembly>> Incremental Encoder■ General Automation■ Scientific Instrumentation>> Vacuum-Compatible Versions■ Optical Alignment■ Semiconductor

Technology Glossary ...................... page 290

228

W W W. P I . W S

L-239.50AD
L-239.033232
L-239.035232

L-239.50SD

Unit

Active axis

X

X

Travel range

52

52

mm

Velocity

50

25

mm/s

Tolerance

Motionmax.

Positioning
Integrated sensor

Rotary encoder–

Sensor resolution

20000

–

Counts./rev.

Design resolution

0.05

5 (full step)

μm

typ.

Minimum incremental
motion

0.2

0.1

μm

typ.

Unidirectional repeatability

0.2

0.1

μm

typ.

Bidirectional repeatability

±1

±1

μm

typ.

Limit and reference pointswitches

Hall effect

Hall effect

Guide type

Recirculating ball bearings

Recirculating ball bearings

Drive screw type

Ball screw

Ball screw

Drive screw pitch

1

1

mm

Push/pull force

300

300

N

max.

Holding force, power off

4080

Permissible lateral force

10

10

N

max.

Unit

Tolerance

L-239.50AD

L-239.50SD

L-239.033232

L-239.035232

DC motor with
PWM control

2-phasestepper motor

DC motor

BLDC motor

Linear Actuators

Mechanical properties

Drive properties
Motor typeOperating voltage, nominal

24

24

24

24

Operating voltage, max.

24

48

48

48

V

nom.

Step resolution

–

200

–

–

Full steps/rev.

Operating temperature
range

5 to 40

5 to 40

5 to 40

5 to 40°C

Material

Aluminum,
stainless steel

Aluminum,
stainless steel

Aluminum,
stainless steel

Aluminum,
stainless steel

Mass

1.72

1.65

1.75

1.75

kg

±5 %

Moved mass

0.155

0.155

0.155

0.155

kg

±5 %

Connector

Sub-D 15 (m)HD Sub-D 26(m)

HD Sub-D 26(m)

HD Sub-D 26(m)

Recommended
controllers / drivers

C-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-663.12(single axis)
SMC Hydra(double axis)
C-885 with
C-663.12C885(up to 20 axes)
ACS modular
controller

C-863(single axis)
C-884(up to 6 axes)
C-885 with
C-863.20C885(to 40 axes)
ACS modular
controller

C-891(single axis)
C-885 with
C-891.10C885(up to 20 axes)
ACS modular
controllermax.

Miscellaneous

All cables required for operation with the recommended controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
Ask about custom designs!

229

MOTION|POSITIONING

M-238 High-Load Linear Actuator with DC Motor
Dynamic, High-Resolution
ion Precision Drive■

Optional linear encoder for direct position
measurement■

High load capacity to 400 N■

Travel range 50 mm■

Resolution to 0.1 μm■

Velocity to 30 mm/s■

Nonrotating end piece■

Recirculating ball screw

M-238, dimensions in mm

A

B

336,2
347,2

90
67,6

Applications>> ActiveDrive■ General Automation>> Incremental Encoder■ Optical Alignment>> Linear Encoder■ Scientific Instrumentation

Technology Glossary ...................... page 290

230

W W W. P I . W S

M-238.5PG

M-238.5PL

Rotary encoder
on motor shaft

Highest precision
with linear encoder

Travel range

5050Integrated sensor

Rotary encoder

Linear encoder

Unit

Tolerance

Motion and positioningmm

Sensor resolution

4000 cts/rev

0.1 μmDesign resolution

0.13

0.1

μm

typ.

Minimum incremental
motion

0.5

0.3

μm

typ.

Backlash

3

1

μm

typ.

Unidirectional repeatability

±1

±0.3

μm

typ.

Velocity

30

30

mm/s

max.

Reference point switch
repeatability

1

1

μm

typ.

mm

Drive screw pitch2

2

Gear ratio

3.71:1

3.71:1

Push/pull force

400

400

N

max.

Permissible lateral force

100

100

N

max.

Motor typeDC motor, ActiveDrive

DC motor, ActiveDrive

Motor voltage

24 V

24 V

V

Motor power

80

80

W

Operating temperaturerange–10 to 50–10 to 50°C

Material

Aluminum anodized, chrome
steel

Aluminum anodized, chrome
steelLinear Actuators

Mechanical properties

Drive properties

nominalMiscellaneous

Mass

2.4

2.4

kg

±5 %

Cable length

3

3

m

±10 mmConnector

Sub-D 15

Sub-D 15

Recommended
controllers / drivers

C-863
C-884

C-863
C-884

Ask about custom designs!

The repeatability of the M-238.5PL with linear encoder is less than 0.3 μm.

The velocity constancy of an M-238.5PL at 30 mm/s.

231

MOTION|POSITIONING

Motion Control

232

W W W. P I . W S

234

Solutions for Motion Centric Industrial Automation ......................................................
Overview of Available ACS Motion Control Modules ....................................................
ACS Motion Control for Motion Centric Industrial Automation .....................................
A-81x PIglide Motion Controller for 1, 2 or 4 Axes ........................................................
A-82x PIglide Motion Controller for 4, 6 or 8 Axes ........................................................
SMC Hydra Universal Motion Controller .......................................................................
C-891 PIMag® Motion Controller for Magnetic Direct Drives .........................................

234
236
238
242
244
246
248

Modular Multi-Channel Piezo Controllers ...............................................................................................................................

250

C-885 PIMotionMaster ...................................................................................................

250

Stepper Motor Controllers .......................................................................................................................................................

252

C-663.12 Mercury Step Stepper Motor Controller, 1 Axis ..............................................

252

DC Motor Controllers ...............................................................................................................................................................

254

C-863 Mercury Servo Controller ....................................................................................
C-884.4DC / C-884.6DC Motion Controller for DC Motors, 4 or 6 Axess .........................

254
256

Voice Coil Controllers ..............................................................................................................................................................

258®

C-413 PIMag Motion Controller ....................................................................................

258

233

MOTION|POSITIONING

Motion Control

Industrial motion control .........................................................................................................................................................

Solutions for Motion CentricIndustrial Automation

Positioning and motion tasks in industrial automation such as those in assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive manufacturing
demand solutions that need to be robust and reliable. Submicrometer accuracy, exact position reproducibility,
high dynamics, and throughput are just as essential. This is particularly the case with industry 4.0 where
safety and simple networking options play an important role.

SMARTER MOTION
AND POSITIONING
What makes a positioner and motion solution smart? What functions and features
must a high-performance control solution
offer to make smart motion and positioning possible? PI has identified the following list of basic requirements that makeit possible to offer solutions for industrial
applications that fulfill the high demands
for precision and dynamics irrespective of
the number of motion axes.

■

Functional safety■

Communication via fieldbus interfaces■

Autotuning■

Synchronization of the individual axes in the system■

Multidimensional motion profiles■

3-DOF compensation of the position error■

Yaw compensation for gantry solutions■

Suppression of system oscillation■

Robust control behavior■

Easy integration into the higher-level automation
environment

234

W W W. P I . W SCOMPLETE SOLUTIONS FOR HIGH-THROUGHPUT
AND HIGH-PRECISION MULTI-AXIS APPLICATIONS
Those requirements can only be fulfilled when the mechanics, drive technology, and control electronics ofthe positioning system are perfectly matched to each other.
A solution from a single-source supplier does not just offer the customer sophisticated positioning technology
and high-performance control solutions, but also faster start-up and high flexibility when implementing new
requirements.

UDMnt

Motion Control

SPiiPlusEC

HIGH-PERFORMANCE MOTION CONTROL SYSTEMSACS Motion Control offers distributed-architecture motion control systems, completely modular, with components organized over three levels: The first level is the user interface. This is basically the host softwareand allows communication with the motion system.
The devices on the second level are called motion controllers. The motion controller is responsible for communication with the host software and also takes care of everything related to profile generation, trajectory,
macros, diagnostics, and so on. The position commands are sent to the universal drive modules on the thirdlevel via an EtherCAT real-time network. In some products, the motion controller, the drives, and the power
supplies are integrated into one housing. These products are called control modules.
The universal drive modules on the third level include the digital servo processor (DSP). It performs the servo
positioning of the axes. The drive modules power and actuate the motors, handle the feedback devices,manage the I/Os, and analyze the sensor signals for closed-loop positioning control.

235

MOTION|POSITIONING

Overview of Available ACS Motion Control Modules
PI offers complete systems that implement the ACS motion control solutions

EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.

236

W W W. P I . W SMotion Control

237

MOTION|POSITIONINGACS Motion Control
for Motion Centric Industrial Automation
Available Modules

EtherCAT® Motion Controller

SPiiPlusEC Powerful Motion
Controller and EtherCAT®
Network Manager
up to 64 axes and thousandsof I/O’s

SPiiPlusES High Performance Multi-Axis Controller
with Built-in EtherCAT®-toEtherCAT® Bridge
up to 64 axes and thousandsof I/O’s

SPiiPlusSC Software BasedPowerful Motion Controller
and EtherCAT® Network
Manager
up to 64 axes and thousandsof I/O’s

SPiiPlusCMnt 32-Axis
EtherCAT® Master Control
Module with 2 Built-in Drives
1, 2 drives 85 – 265 V-AC,
up to 7.5/15 A

SPiiPlusCMhp/ba 32-Axis
EtherCAT® Master Control
Module with 3 Built-in Drives
1 to 3 drives, 85 – 265 V-AC,
up to 15/30 A

Control Modules

MC4Unt Customized Multiaxis Control Using Standard
Components
2 to 8 drives, wide power
range

User Interface Software Applications
SPiiPlusSPC Smart
Processing Commander
Machine Control Interface
for High-Precision Laser
Processing Applications

SPiiPlusSMC Smart
Motion Commander
Customizable CNC HMI
Platform for High-Precision
Machining and Processing
Applications

238

W W W. P I . W S

SPiiPlusCMhv 32-Axis
EtherCAT® Master Control
Module with 2 Built-in
High-Voltage Drives
1, 2 axes, 230 – 480 V-AC, up to
15/30 A, or 230 V-AC, 20/60 A

Drives with ±10 V Interface

NPApc Single/Dual Axis
NanoPWM Drive with ±10 V
Current Commutation
Commands
1,2 drives, 12 – 100 V, up to
13.3/40 A, PCB mount

NPApm Single/Dual Axis
NanoPWM Drive with ±10 V
Current Commutation
Commands
1,2 drives, 12 – 100 V, up to
13.3/40 A

NPArm 2 to 8 Axis NanoPWM
Drive system with ±10V Current
Commutation Commands andPower Supply
2 to 8 drives, up to 96 V, up to
13.3/40 A, rack mount

PDMnt EtherCAT® Quad
Axis P/D Interface Module
4 axes, Pulse/Direction
interface to external motor
drivesPDIcl EtherCAT® Dual/Quad
Axis Interface Module for
P/D with Feedback
2, 4 axes, Pulse/Direction
interface to external motor
drivesMotion Control

Interfaces

UDIhp/lt EtherCAT®
Dual/Quad Axis Motor
Drive Interface
2 to 4 axes, ±10 V interface
to external motor drives

IOMnt EtherCAT®
Digital I/O Module
up to 32 digital inputs
and outputs, 24 V-DC

239

MOTION|POSITIONINGACS Motion Control
for Motion Centric Industrial Automation
Available Modules

Universal Drive Modules with 48 V DC

UDMlc EtherCAT® Dual/
Quad Axis Drive Module
2, 4 drives, 12 – 48 V, up to
5/10 A

UDMsd EtherCAT® Dual/
Quad Axis Drive Module
2, 4 drives, 12 – 48 V, up to
2.5/5 A

UDMpc EtherCAT® Single/
Dual Axis Drive Module
1, 2 drives, 24 – 48 V, up to
10/20 A, PCB mount

Universal Drive Modules with 80 V DC

UDMnt EtherCAT® Single/
Dual Axis Drive Module
1, 2 drives, 12 – 80 V, up to
10/20 A

UDMmc EtherCAT® Drive Module,
Compact, Cost Effective
2, 4 drives, 12 – 80 V, up to
20/40 A

Universal Drive Modules with AC

UDMpm EtherCAT®
Single/Dual Axis Drive
Module1, 2 drives, 85 – 265 V,
up to 7.5/15 A

UDMhp/ba EtherCAT®
Drive Module, Compact,
Powerful
1 to 3 drives, 85 – 265 V-AC,
up to 15/30 A

UDMhv EtherCAT® Single/
Dual Axis High Voltage Drive
Module1, 2 drives, 230 – 480 V-AC,
up to 15/30 A or 230 V-AC
20/60 A

240

W W W. P I . W S

Universal Drive Modules with NanoPWM

NPMpc EtherCAT® Single/Dual
Axis NanoPWM Drive Module
1, 2 drives, 12 – 100 V, up to
13.3/40 A, PCB mount

NPMpm EtherCAT® Single/Dual
Axis NanoPWM Drive Module
1, 2 drives, 12 – 100 V, up to
13.3/40 A

UDMcb Economical EtherCAT®
Single/Dual Axis Drive Module
1, 2 drives, up to 100 V,
13.3/40 A, PCB mount

Motion Control

Other U
Universal Drive Modules

UDMpa EtherCAT® Single/
Dual Axis Drive Module
1, 2 drives, up to 100 V,
13.3/40 A

Stepper Drive Module

SDMnt EtherCAT® 4/8 Axis
Stepper Drive Module4, 8 unipolar stepper motor
drives, 40 V, 3 A

241

MOTION|POSITIONING

A-81x
PIglide Motion Controller for 1, 2 or 4 Axes
For Stages with Direct Drive, TCP/IP Interface■

1, 2, & 4 motion axes■

Fully integrated closed-loop servo control, amplifier module,
and power supplies■

For voice coil drives, DC motors and brushless 3-phase motors■

Quiet PWM drives■

Encoder inputs support sine/cosine and BiSS-C■

5 A continuous current / 10 A peak output current per axis

Overview

Options

The A-81x motion controller series from PI offers a fully integrated electronics
solution with controller, drives, and power supplies in a compact 19-inch rack
unit. The A-81x controllers are designed and optimized for PIglide air bearing
stages that are equipped with direct drive linear and rotation servo motors, andhigh-resolution encoders.

■Absolute encoders or incremental encoders(can be combined individually according tocustomer specifications for all axes of thecontroller)■

G-Code programmingStandard options include inputs for incremental sine/cosine and absolute
encoders that use the BiSS-C data protocol. Support for sine/cosine encoders
has an integrated interpolation factor of 16384x. All controllers feature integrated flash memory for stored motion programs and parameters.

■

Input shaping■

Additional control axes for external drives
via EtherCAT®

■

Alternative customized packaging for OEM
designs

The A-81x controllers can be operated in stand-alone mode running stored
programs, or controlled via an external PC. A PC is required for programmingand startup. All software is supplied with the controller.
If the controller is purchased together with a PIglide air bearing stage or positioning system, PI will perform the servo tuning, startup of the controller, anderror calibration, and supply a complete ready-to-use positioning system.
The A-81x motion controller features the state of the art ACS SPiiPlusEC motion
controller and EtherCAT® master, and includes ServoBoost™ for up to eightaxes of motion. ServoBoost™ provides better, more consistent servo performance that is insensitive to noise or changes in the system.

>> Extensive Software Package
Technology Glossary ...................... page 290

242

W W W. P I . W S

A-811.21x00

A-812.21x00

A-814.21x00

Number of axes

1

2

4

Controller type

Closed-loop servo control(PID), parameter changing
during operation

Closed-loop servo control(PID), parameter changing
during operation

Closed-loop servo control(PID), parameter changing
during operation

Servo-frequency position
control

10 kHz

10 kHz

10 kHzServo frequency current
control

20 kHz

20 kHz

20 kHzTrajectory proﬁlesPoint-to-point, jog, s-curve

Point-to-point, jog, s-curve,interpolated coordinatedmulti-axis proﬁlesPoint-to-point, jog, s-curve,interpolated coordinatedmulti-axis proﬁles

Cooling

Fan on the side (continuous
operation, constant speed)

Fan on the side (continuous
operation, constant speed)

Fan on the side (continuous
operation, constant speed)

Drive type

PWM

PWM

PWM

Motor types

Voice coil
Brushed DC motor
Brushless 3-phase motorwith sine commutation

Voice coil
Brushed DC motor
Brushless 3-phase motorwith sine commutation

Voice coil
Brushed DC motor
Brushless 3-phase motorwith sine commutation

Encoder options(factory default)(Can be conﬁgured individually for combinations
according to customer
speciﬁcations)

Incremental sine/cosine(1 Vpp)A/B quadrature (RS-422)(on request),
Absolute encoder BiSS-C

Incremental sine/cosine(1 Vpp)A/B quadrature (RS-422)(on request),
Absolute encoder BiSS-C

Incremental sine/cosine(1 Vpp)A/B quadrature (RS-422)(on request),
Absolute encoder BiSS-C

Output current (per axis)

5 A continuous operation,
10 A peak

5 A continuous operation,
10 A peak

5 A continuous operation,
10 A peakCommunication

Ethernet: TCP/IP,
100/1000 Mbps
Ethernet/IP
ModbusEthernet: TCP/IP,
100/1000 Mbps
Ethernet/IP
ModbusEthernet: TCP/IP,
100/1000 Mbps
Ethernet/IP
ModbusUser I/O (without reference
and limit switch)

2 × digital input, 24 V DC, sink
2 × digital output, 24 V DC,
source1 × analog input, differential,
12 bit1 × analog output, differential,
10 bit
1 × RS-422 high-speed output
for position trigger (PEG)

2 × digital input, 24 V DC, sink
2 × digital output, 24 V DC,
source1 × analog input, differential,
12 bit1 × analog output, differential,
10 bit2 × RS-422 high-speed output
for position trigger (PEG)

4 × digital input, 24 V DC, sink
4 × digital output, 24 V DC,
source2 × analog input, differential,
12 bit2 × analog output, differential,
10 bit
4 × RS-422 high-speed output
for position trigger (PEG)

Interlock / motion-stop

1 × 24 V DC sink

1 × 24 V DC sink

1 x 24 V DC sink

Connector interface

Rear panel connectors
Sub-D for motor and signal
connections
IEC 60320 type C14 for power
supplyRear panel connectors
Sub-D for motor and signal
connections
IEC 60320 type C14 for power
supplyRear panel connectors
Sub-D for motor and signal
connections
IEC 60320 type C14 for power
supply120 – 240 V AC,
single phase,
50 – 60 Hz (factory default),
600 W

120 – 240 V AC,
single phase,
50 – 60 Hz (factory default),
600 W

120 – 240 V AC,
single phase,
50 – 60 Hz (factory default),
600 W

Mass (approx.)

8.5 kg

8.5 kg

9.3 kgDimensions

19” rack unit,
483 mm × 88 mm × 487 mm(incl. handles)

19” rack unit,
483 mm × 88 mm × 487 mm(incl. handles)

19” rack unit,
483 mm × 88 mm × 487 mm(incl. handles)

Miscellaneous
Power supply

243

MOTION|POSITIONING

Motion Control

Interfaces

A-82x
PIglide Motion Controller for 4, 6 or 8 Axes
For Stages with Direct Drive and High Power Requirements, TCP/IP Interface■

4, 6 or 8 high-performance motion axes■

Fully integrated closed-loop servo control, amplifier module,
and power supplies■

For voice coil drives, DC motors and brushless 3-phase motors■

Quiet PWM drives■

Encoder inputs support sine/cosine and BiSS-C■

10 A continuous current / 20 A peak output current per axis

Overview

Options

The A-82x motion controller series from PI offers a fully integrated electronics
solution with controller, drives, and power supplies in a compact 4-U-high19-inch rack unit. The A-824 supplies continuous power of 2 kW. The A-82x
controllers are designed and optimized for PIglide air bearing stages that are
equipped with direct drive linear and rotation servo motors, and high-resolution
encoders.

■

Absolute encoders or incremental encoders(can be combined individually according tocustomer specifications for all axes of thecontroller)■

G-Code programming■

Input shaping■

Additional control axes for external drives
via EtherCAT®

■

Alternative customized packaging for OEM
designs

Standard options include inputs for incremental sine/cosine and absolute
encoders that use the BiSS-C data protocol. Support for sine/cosine encoders
has an integrated interpolation factor of 16384x. All controllers feature integrated flash memory for stored motion programs and parameters.
The A-82x controllers can be operated in stand-alone mode running stored
programs, or controlled via an external PC. A PC is required for programmingand startup. All software is supplied with the controller.
If the controller is purchased together with a PIglide air bearing stage or positioning system, PI will perform the servo tuning, startup of the controller, anderror calibration, and supply a complete ready-to-use positioning system.
The A-82x motion controller features the state of the art ACS SPiiPlusEC motion
controller and EtherCAT® master, and includes ServoBoost™ for up to eightaxes of motion. ServoBoost™ provides better, more consistent servo performance that is insensitive to noise or changes in the system.

>> Extensive Software Package
Technology Glossary ...................... page 290

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A-824.21x00

A-826.21x00

A-828.21x00

Number of axes

4

6

8

Controller type

Closed-loop servo control(PID), parameter changing
during operation

Closed-loop servo control(PID), parameter changing
during operation

Closed-loop servo control(PID), parameter changing
during operation

Servo-frequency position
control

10 kHz

10 kHz

10 kHzServo frequency current
control

20 kHz

20 kHz

20 kHzTrajectory proﬁlesPoint-to-point, jog, s-curve,interpolated coordinatedmulti-axis proﬁlesPoint-to-point, jog, s-curve,interpolated coordinatedmulti-axis proﬁlesPoint-to-point, jog, s-curve,interpolated coordinatedmulti-axis proﬁles

Cooling

Fan on the side (continuous
operation, constant speed)

Fan on the side (continuous
operation, constant speed)

Fan on the side (continuous
operation, constant speed)

Drive type

PWM

PWM

PWM

Motor types

Voice coil
Brushed DC motor
Brushless 3-phase motorwith sine commutation

Voice coil
Brushed DC motor
Brushless 3-phase motorwith sine commutation

Voice coil
Brushed DC motor
Brushless 3-phase motorwith sine commutation

Encoder options(factory default)(Can be conﬁgured individually for combinations
according to customer
speciﬁcations)

Incremental sine/cosine(1 Vpp)A/B quadrature (RS-422)(on request),
Absolute encoder BiSS-C

Incremental sine/cosine(1 Vpp)A/B quadrature (RS-422)(on request),
Absolute encoder BiSS-C

Incremental sine/cosine(1 Vpp)A/B quadrature (RS-422)(on request),
Absolute encoder BiSS-C

Interpolation factor
sine/cosine encoder

4 x to 16384x (can be
adjusted by software)

4 x to 16384x (can be
adjusted by software)

4 x to 16384x (can be
adjusted by software)

Output voltage

72 VDC

72 VDC

72 VDC

Output current (per axis)

10 A continuous operation,
20 A peak (<1 s)

10 A continuous operation,
20 A peak (<1 s)

10 A continuous operation,
20 A peak (<1 s)

Output power (total)

1100 W continuous operation
3900 W peak

1700 W continuous operation
3900 W peak2000 W continuous operation
3900 W peak

A-82x

Communication

Ethernet: TCP/IP, 100/1000 Mbps
Ethernet/IP
ModbusUser I/O (without reference
and limit switch)

4 × digital input, 24 V DC, sink
3 × digital output, 24 V DC, source
2 × analog input, differential, 12 bit
2 × analog output, differential, 10 bit
4 × RS-422 high-speed output for position trigger (PEG)

Interlock / motion-stop

1 × 24 V DC

Connector interface

Rear panel connectors
Sub-D for motor and signal connections
IEC 60320 type C20 for power supply

Motion Control

Interfaces

A-824.2x00

A-826.21x00

A-828.21x00

200 – 240 V AC, single phase,
50 – 60 Hz

200 – 240 V AC, single phase,
50 – 60 Hz

200 – 240 V AC, single phase,
50 – 60 Hz

Miscellaneous
Power supply
Mass (approx.)13.6 kg

14.4 kg

15.2 kg

Dimensions

19” rack unit, 483 mm ×
171 mm × 495 mm(incl. handles)

19” rack unit, 483 mm ×
171 mm × 495 mm(incl. handles)

19” rack unit, 483 mm ×
171 mm × 495 mm(incl. handles)

245

MOTION|POSITIONING

SMC Hydra Universal Motion Controller
For Electromagnetic Motors■

2-D vector motion with linear interpolation, independent
single-axis
i li motioni■

For DC servo and brushless DC motors (BLDC), linear
and torque motors (2 / 3 phases), 2-phase stepper motors■

Digital inputs and outputs■

Optional: Encoder-based trigger output■

Optional: Position capture input: Position detection
in real time via digital input■

Optional: Dynamic position correction■

Joystick operation via CAN bus

Compact SMC Hydra CM
2-axis motion controller>> Extensive Software Package
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SMC Hydra TT

SMC Hydra CM

SMC Hydra RM

Function

Motion controller forelectromagnetic motors
Benchtop device withintegrated power supply

Motion controller forelectromagnetic motors
Compact device

Motion controller forelectromagnetic motors
19” rack unit withintegrated power supply

Axes

2

2

2/4

Sensor channels

2

2

2/4

Operating voltage

90 – 260 V, integrated widerange-input power supply

24 V / 48 V, external power supply (not in scope of delivery)

90 – 260 V, integrated widerange-input power supply

Max. power consumption

300 W

120 W

1000 W

Max. current consumption

11 A

11 A

11 A

Operating temperature range

10 to 40 °C

10 to 40 °C

10 to 40 °C

Miscellaneous

Weight2.65 kg

0.45 kg

6 kg

Dimensions

225 mm x 515 mm x 56 mm

76 mm x 156 mm x 56 mm

84 HP, 2 RU, 310 mm depth

Motion and control
Supported functions

Linear vector motion, independent point-to-point motion. Automatic detection of the motor phase.

Controller type

PID controller, also adaptive for position and velocity as well as velocity and acceleration
feed-forward, parameter changing during operation

Servo frequency

4 kHz

Proﬁle generator

Trapezoidal velocity proﬁle, setting of maximum velocity and acceleration
2-D vector control with linear interpolation

Encoder input

Analog signals (sin/cos) max. 150 kHz (line count)
Digital signals (A/B differential via RS-422) max. 4 MHz (line count)
Positioning range: ±4.3*1012 mm / deg

Stall detection

Position error, peak current, I2t limit

Microsteps per full step

3000

Limit switches

2 per channel, 5 to 24 V (programmable polarity); N/O contact / N/C contact; NPN / PNP

Reference point switch

Index signal of the encoder

Motor brake

1 x per channel, TTL, conﬁgurable via software

Maximum output voltage

24 V / 48 V

Maximum output power
per channel

200 W

Maximum output current
per channel

10 Arms

Safety features

Switch-off via external switch. Overload protection of the motor driver.
Overheat protection of the motor (I2t). Overcurrent protection of the system.

Motion Control

Electrical properties

Interfaces and operation
Communication interfaces

TCP/IP: 10/100 Mbit; RS-232: Sub-D 9 (m), 9.6 to 115.2 kBaud. Hydra RM: USB as wellMotor connection per channel

Sub-D 15 (f)Sensor connection per channel

Sub-D 15 (f)I/O lines

6 inputs, opto decoupled, 5 – 24 V (2 each reserved per channel for limit switch)
Input for motor switch-off on all axes, opto decoupledOpen drain output (100 mA)
2 TTL outputs
4 analog outputs, 10-bit resolution, 0 to 3.3 V (not for Hydra TT)
With DeltaStar interface as factory default option:
Fast trigger output, max. 400 kHz, equidistant or from freely deﬁnable table(max. 3000 axis positions)
Position capture input, max. 4 kHz (>3,000,000 axis positions)With the factory default DeltaStar Eco interface option: Trigger output, 2 kHz,equidistant, jitter 10 – 30 μs

Command set

Venus-3 ASCII interpreter; dynamic library for PI General Command Set (GCS)

User software

Venus-3 demo program LabVIEW (source code & executable)
Terminal program (Venus-3 DLL)PIMikroMove via dynamic libraries for Windows

Software drivers

LabVIEW drivers, dynamic libraries for Windows and Linux (GCS)
GCS2 DLL 32/64-bit
Venus3 DLL 32/64-bit / .net wrapper DLL incl. example source code

Manual operation

Joystick via CAN bus (accessory)

247

MOTION|POSITIONING

C-891 PIMag® Motion Controller
for Magnetic Direct Drives
1 Axis, for 3-Phase Linear Motors with Medium Power Consumption■

Maximum average current consumption 3 A■

20-kHz control bandwidth■

USB interface for sending commands and for configuration■

Digital inputs and outputs■

Optional analog input■

Encoder inputs: A/B or sine/cosine and BiSS-C

Digital motion controller for PIMag® linear motors
1 motor channel, 1 sensor channel. For three-phase linear
motors, maximum current consumption 3A (rms) per phase.
Sine-commutated operation, field-oriented current control. Automatic detection of the motor phase. PID controller for positionand velocity. Servo update rate 20 kHz.

C-891.10C885 Plug-in module
for C-885 PIMotionMaster>> Extensive Software Package
Technology Glossary ...................... page 290

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C-891.120200

Motor channels
Sensor channels
Supported functions
Safety features

Motion and control
Controller type
Servo frequency
Proﬁle generator
Encoder input
Reference and limit switches
Electrical properties
Max. output voltage
Max. output current
Interfaces and operation
Communication interfaces
Motor connector
Sensor connection
I/O port
Command set
User software
Application programming
interfaces
Miscellaneous
Operating voltage
Max. current consumption
Operating temperature range
Max. mass
Dimensions

PIMag® Motion Controller for 3-phase linear motors,
sine-commutated, ﬁeld-oriented current control
1
1
Point-to-point motion. Data recorder. Wave generator.
Automatic detection of the motor phase.
Switch-off via external switch. Overload protectionof the motor driver. Overheat protection of the motor.
Overcurrent protection of the system.
PID controller for position and velocity, parameter changing
during operation
20 kHzTrapezoidal velocity proﬁle, setting of maximum velocity
and acceleration
Analog (sin/cos) or digital signals (A/B differential, TTL,
or BISS interface)TTL
24 V
3 ArmsUSB, RS-232
HD Sub-D 26 (f)Sub-D 15 (m)4 x digital input, 4 x digital output
Optional analog input, –10 to 10 V
PI General Command Set (GCS)PIMikroMove
API for C / C++ / C# / VB.NET / MATLAB / python, drivers
for LabVIEW

Motion Control

Function

24 V, external power supply included in the scope of delivery
4.5 A
5 to 40 °C
1.0 kg
190 mm × 83 mm × 110 mm(with rubber feet and connection for supply voltage:
206 mm x 83 mm x 112 mm)

Ask about custom designs!

249

MOTION|POSITIONING

C-885 PIMotionMasterRack with Processor and Interface Module for Modular Multi-Axis Controller System■

Easy configuration and startup

Easy to expand■

Modular design for versatile expansion■

Efficient communication with the controller modules■

Greatly reduced wiring effort■

Saves space and costs

The system is easily scalable. An additional controller module
can be inserted into any free slot and expands the overall systemby the corresponding functions. Optional digital inputs and outputs can be installed for every controller module.
Controller modules

Easy installation■

C-863.20C885 DC Motor Controller Module, 2 Axes

Plug-and-play installation of the controller modules in the C-885
PIMotionMaster. The processor and interface module communicates with the PIMikroMove software and with the controller
modules. It detects the available controller module type automatically. Grouping the controller modules in one housing ensuresinternal communication and reduces the wiring effort becauseof the common power supply and external communication via asingle USB or Ethernet interface.

■C-867.10C885 PILine® Controller Module■

E-861.11C885 NEXACT® Controller Module■

E-873.10C885 Q-Motion® Controller Module for
C-885 PIMotionMaster■C-663.12C885 Mercury Step Stepper Motor Controller
Module>> Extensive Software Package
Technology Glossary ...................... page 290

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C-885.R2

C-885.R3

Function9.5” chassis for C-885
PIMotionMaster19” chassis for C-885
PIMotionMaster19” chassis for C-885
PIMotionMaster

Number of card slots

1 C-885.Mx module (required)
4 controller modules (max.)

1 C-885.Mx module (required)
20 controller modules (max.)

1 C-885.Mx module (required)
19 controller modules (max.)Dimensions

269.04 mm × 133.14 mm ×349.5 mm (incl. handles)

Without modules:
482.6 mm × 132.55 mm ×265.3 mmWith modules:
482.6 mm × 132.55 mm ×278.55 mm

Without modules:
482.6 mm × 132.55 mm ×265.3 mmWith modules:
482.6 mm × 132.55 mm ×278.55 mm

Operating voltage

24 V DC from external power
supply24 V DC from external power
supply24 V DC from external power
supplyalso optional:
48 V DC from external power
supplySupply voltage for controller
modules

24 V DC

24 V DC

24 V DC / 48 V DC

Current consumption, max.

32 A

32 A

32 A

Mass without modules

3.2 kg

2.9 kg5.08 kg

Operating temperature range

10 to 40 °C

10 to 40 °C

10 to 40 °C

C-885.M1

C-885.M2

Function

Digital Processor and Interface Module
for C-885 PIMotionMaster

Digital Processor and Interface Module
for C-885 PIMotionMasterCommunication interfaces

Ethernet, USB

Ethernet, USB

Command set

PI General Command Set (GCS)PI General Command Set (GCS)

User software

PIMikroMove

PIMikroMove

Software drivers

LabVIEW drivers, dynamic libraries
for Windows and LinuxLabVIEW drivers, dynamic libraries
for Windows and Linux

Indicators

LEDs for Power, Error

LEDs for Power, Error

Operating temperature range

10 to 40°C

10 to 40°C

Mass

132 g

270 g

Dimensions

186.42 mm × 128.4 mm (3 RU) × 19.98 mm(4 HP)

186.42 mm × 128.4 mm (3 RU) × 19.98 mm(4 HP)

Motion Control

C-885.R1

Ask about custom designs!

251

MOTION|POSITIONING

C-663.12
Mercury Step Stepper Motor Controller, 1 Axis
For Closed-Loop and Open-Loop Operation, HD Sub-D 26, 48 V■

High microstep resolution■

Operating voltage up to 48 V■

Closed-loop operation of 2-phase stepper motors■

Support for external sensors■

Daisy chain networking

C-663.12C885 Mercury Step Stepper
Motor Controller Plug-in Module for
C-885 PIMotionMaster>> Extensive Software Package
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C-663.12
Function

Mercury Step stepper motor controller

Drive types

2-phase stepper motor

Axes

1

Supported functions

Point-to-point motion. Startup macro.
Data recorder for recording operating data such as velocity,
position or position error.
Internal safety circuitry: Watchdog timer.
ID chip detection (for future use).

Motion and control
Controller type

PID, parameter changing during operation

Servo cycle time

50 μs

Dynamics proﬁleTrapezoidal velocity proﬁleMicrostep resolution

1/2048 full step

Encoder input

A/B quadrature, TTL, RS-422; 60 MHz

Limit switches

2 × TTL, programmable

Reference point switch

1 × TTL, programmable

Index switch

1 × RS-422 for index pulse

Stall detection

Automatic motor stop when a programmable position error
is exceeded (only in conjunction with sensor)

Electrical properties
Max. output voltage*

0 V to operating voltage, for direct control of stepper motors

Max. output power

60 W

Average output power

48 W

Power consumption, full load

48 W (max.)

Power consumption without load

3W

Current limitation per motor phase

2.5 A

Communication interfaces

Motion Control

Interfaces and operation
USB, RS-232

Motor / sensor connection

HD Sub-D 26 (f)Controller network

Up to 16 units on a single interface**

I/O lines

4 analog / digital inputs (0 to 5 V / TTL), 4 digital outputs (TTL)

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / python,drivers for LabVIEW

Manual control

Joystick, Y-cable for 2-D motion, pushbutton box

Miscellaneous
Operating voltage

24 to 48 V DC from external power supply(48 V DC power supply in scope of delivery)

Max. current consumption

40 mA without load (when supplied with 48 V)
80 mA without load (when supplied with 24 V)

Operating temperature range

5 to 50 °C (temperature protection switches off at excessively
high temperatures)

Mass

0.48 kg

Dimensions

130 mm × 76 mm × 40 mm (incl. mounting rails)* Depending on the power supply used** 16 units with USB; 6 units with RS-232

253

MOTION|POSITIONING

C-863 Mercury Servo Controller
1 Axis, for DC Motors and Brushless DC Motors■

High-speedHihd encoderd iinput to 60 MH
MHz■Powerful macro programming language,e.g., for stand-alone operation■

Nonvolatile EEPROM for macros and parameters■

Data recorder■

Daisy chain networking■

Connection for joystickC-863.20C885 2-Axes DC Motor
Controller, Plug-in Module for C-885
PIMotionMaster>> Extensive Software Package
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C-863.11 / C-863.12
Function

DC motor control, servo control

Axes

1

Supported functions

Point-to-point motion. Startup macro. Data recorder for recording operating data such as
motor voltage, velocity, position or position error. Internal safety circuitry: Watchdog timer.
C-863.12 additional: ID chip detection

Motion and control
Controller type

PID controller, parameter changing during operation

Servo cycle time

50 μs

Proﬁle generator

Trapezoidal velocity proﬁleEncoder input

A/B quadrature single-ended or differential TTL signal acc. to RS-422; 60 MHz

Stall detection

Automatic motor stop when a programmable position error is exceeded

Limit switches

2 × TTL (programmable polarity)

Reference point switch

1 × TTL

Motor brake

1 × TTL, can be switched by software

Interfaces and operation
Communication interfaces

USB; RS-232, Sub-D 9 (m)Motor connection

C-863.11: Sub-D 15 (f) / C-863.12: HD Sub-D 26 (f)Controller network

Up to 16 units** on a single interface

I/O lines

4 analog / digital inputs, 4 digital outputs (TTL), 5 V TTL

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming
interfaces

API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW

Manual control

Joystick, Y cable for 2-D motion, pushbutton box

C-863.12

Max. output voltage*

0 to ±15 V for direct control of DC motors

0 V to operating voltage,for direct control of DC motors

Max. output power

30 W

60 W

Average output power

45 W

48 W

Power consumption, full load

30 W

48 W

Power consumption without load

2W

3W

Current limitation

2A

2.5 A

Operating voltage

15 to 30 V from external power supply(15 V DC power supply in scope of delivery)

24 to 48 V DC from external power supply(48 V DC power supply in scope of delivery)

Max. current consumption

80 mA without load(when supplied with 24 V)

40 mA without load(when supplied with 48 V)
80 mA without load(when supplied with 24 V)

Operating temperature range

5 to 50 °C

5 to 50 °C (temperature protection switches
off at excessively high temperatures)Mass

0.3 kg0.48 kg

Dimensions

130 mm × 76 mm × 40 mm(incl. mounting rails)

130 mm × 76 mm × 40 mm(incl. mounting rails)

Motion Control

C-863.11
Electrical properties

Miscellaneous

255

MOTION|POSITIONING

C-884.4DC / C-884.6DC
Motion Controller for DC Motors, 4 or 6 Axes
For Positioners with Closed-Loop DC Motor, USB, RS-232, TCP/IP, SPI, I/O, Joystick■

PID servo control with dynamic parameter switching

Motion profiles■

Powerful macro programming language, e.g., forstand-alone operation

Point-to-point, trapezoidal velocity profile. User-definable trajectories (e.g., circles, sine curves) from externally fed points.

■

Data recorder■

Integrated interfaces: USB, RS-232, Ethernet, SPI, I/O,
joystick■

Trajectory support for 1 or 2 D motion patterns

Interfaces and communication
Interfaces: TCP/IP, USB and RS-232 for commands. A/B quadrature encoder input. TTL inputs for limit and reference pointswitches. I/O lines (analog/digital) for automation. USB interface
for human interface devices.

Digital motion controller for DC servo motors

Extensive functions, software support

4 or 6 axes. Dual-core architecture for increased performanceand flexibility by separating command processing and position
control. Simple adaptation / extension possible for OEM products. Motion control of PI positioning systems with DC motors:
Direct motor control, PWM control for PI positioning stages withintegrated ActiveDrive amplifiers or integrated block commutation (brushless motors). Supports motor brake.

Powerful macro command language. Nonvolatile macro storage,e.g., for stand-alone operation with autostart macro. Data recorder. ID chip detection for fast startup. PID controller, parameterchanging during operation. Extensive software support, e.g., for
LabVIEW, C, C++, MATLAB, python. PIMikroMove user software.

>> Extensive Software Package
Technology Glossary ...................... page 290

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C-884.4DC / C-884.6DC
Function

Position control for closed-loop DC motors

Processor

Dual core architecture. Controller on a DSP core, withextendable command interpreter in an ARM core under Linux

Axes

C-884.4DC: 4 / C-884.6DC: 6

Supported functions

Linear vector motion. Point-to-point motion.
User-deﬁnable trajectories.
Startup macro. PI Python. Data recorder for recording operating
data such as motor voltage, velocity, position or position error.
ID chip detection.

Motion and control
Controller type

PID controller, parameter changing during operation

Servo cycle time

100 μsProﬁle generator

Trapezoidal velocity proﬁleEncoder input

A/B quadrature (TTL differential according to RS-422), 50 MHz;BiSS interface

Stall detection

Automatic motor stop when a programmable position error
is exceeded

Limit switches

2 × TTL per axis (programmable polarity)

Reference point switch

1 × TTL per axis

Motor brake

1 × TTL per axis, can be switched per software

Electrical properties
Max. output voltage*

24 V

Max. output power

240 W

Current limitation

2.5 A per axis

Communication interfaces

TCP/IP: RJ45 / Ethernet; USB: Mini-USB type B;
RS-232: Sub-D 9 (m); SPI: DisplayPort

Motor connector

Sub-D 15 (f)I/O lines

4 analog inputs (–10 to 10 V), 4 digital outputs (5 V TTL)
4 digital outputs (5 V TTL)

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / python,drivers for LabVIEW

Manual control

USB interface for HID-compliant devices

Motion Control

Interfaces and operation

Miscellaneous
Operating voltage

External power supply 24 V / 5 A (120 W) included in the scopeof delivery

Max. current consumption

C-884.4DC: 11 A / C-884.6DC: 16 A

Current consumption, no load

500 mA

Operating temperature range

5 to 50 °C

Mass

C-884.4DC: 1.77 kg / C-884.6DC: 1.97 kg

Dimensions

312 mm × 153.4 mm × 59.2 mm (incl. mounting rails)* The output voltage depends on the connected power supply.

257

MOTION|POSITIONING

C-413 PIMag® Motion Controller
Control of Force, Position and Velocity

Digital motion controller for PIMag® voice coil drives■

1 or 2 motor channels

C-413.1: 1 motor channel, 2 sensor channels, for the V-275 and V-277 linear
actuators; C-413.2: 2 motor channels, 4 sensor channels. PID controller for force,
position, velocity. Servo update rate selectable between 5 to 10 kHz.

■Up to 4 sensor channels for 2 force and2 position sensors each■

Depending on version, TCP/IP or USB
interface for configuration and sending
commands■

Depending on version, real-time SPI
interface for sending commands■

Digital inputs and outputs■

Optional analog inputs and outputs

Force control
The force control allows operation of PIMag® drives and stages with a defined
holding or feed force. The force and position sensors can be read simultaneously and the values processed. In addition to pure force control, subordinate
position and velocity control is also an option. PI offers PIMag® actuators witha force sensor. The C-413.20A / .2GA models enable external force sensors
to be read via analog inputs.
Extensive functionality
Data recorder: Recording of operating data such as motor current, velocity,
position or position error. Wave generator: Saves and outputs periodical
motion profiles. Auto-zero function defines the holding current, at which
the drive outputs a force of 0 N in open-loop operation, e.g., for compensating the weight force. ID chip support: Identifies the connected stages andsimplifies configuration and exchangeability. Supports direction-sensing reference point switches. Extensive software support, e.g., for LabVIEW, dynamic
libraries for Windows and Linux.
Interfaces
Depending on the version, commanding via TCP/IP, USB 2.0, SPI. Digital inputs
and outputs for automation. Optional analog inputs and outputs, e.g., forsensors, commanding or position feedback.

>> Extensive Software Package>> PIMag® Voice CoilTechnology Glossary ...................... page 290

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C-413.1G

C-413.20 / C-413.20A
C-413.2G / C-413.2GA

Function

PIMag® motion controller for voice coil drives,
1 channel, housed device

PIMag® motion controller for voice coil drives,
2 channels
C-413.20/.20A: OEM board
C-413.2G/.2GA: Housed device

Motor channels

1

2

Sensor channels

24Servo characteristics

PID controller for force, position and velocity;
parameter changing during operation

PID controller for force, position and velocity;
parameter changing during operation

Servo cycle time

100 μs to 200 μs, selectable in 4 steps

100 μs to 200 μs, selectable in 4 steps

Proﬁle generator

Trapezoidal velocity proﬁle, speciﬁcation of the
maximum velocity and acceleration

Trapezoidal velocity proﬁle, speciﬁcation of the
maximum velocity and acceleration

Encoder input

SPI sensor interface

SPI sensor interface

Reference point switches

2 × TTL, direction-sensing

4 × TTL, direction-sensing

Max. output voltage

24 V

24 V

Max. output current±1.5 A (regulated)±1.5 A (regulated)

Communication interfaces

TCP/IPUSB 2.0, real time SPI

Motor / sensor connection

Sub-D 9 (f) for motor, Sub-D 25 (f) for sensor

Sub-D 15 (f) combined for motor and sensor

I/O port

2 × analog output, –10 to 10 V, 17 bit, 1 kHz
4 × digital input, 24 V
6 × digital output, 24 V

2 × analog input, –10 to 10 V, 16 bit, 1 kHz(only .20A and .2GA)
2 × analog output, –10 to 10 V, 17 bit, 1 kHz(only .20A und .2GA)
6 × digital outputs (open collector, voltage
range 5 V to 24 V, 33 kΩ internal pull-up to 5 V)
4 × digital input (5 V TTL level, to 24 V max.
input voltage, 10 kΩ input resistance)

Command set

PI General Command Set (GCS)PI General Command Set (GCS)

User software

PIMikroMove

PIMikroMove

Application programming
interfaces

API for C / C++ / C# / VB.NET / MATLAB / python,drivers for LabVIEW

API for C / C++ / C# / VB.NET / MATLAB /python, drivers for LabVIEW

Supported functions

Point-to-point motion. Data recorder. Wave
generator. Auto zero. ID chip detection.

Point-to-point motion. Data recorder. Wave
generator. Auto zero. ID chip detection.

24 V DC from external power supply (included)

24 V DC from external power adapter (includedin the scope of delivery for C-413.2G and .2GA)

Motion and control

Electrical properties

Motion Control

Interfaces and operation

Miscellaneous
Operating voltage
Max. current consumption

2A

2A

Operating temperature range

5 to 50 °C

5 to 50 °C

Mass

0.3 kg

0.3 kgDimensions

210 mm × 28 mm × 105 mm

189 mm × 28 mm × 105 mm (.2G/.2GA)
160 mm × 18 mm × 100 mm (.20/.20A)

Ask about custom designs!

259

MOTION|POSITIONING

Gantry Systems

260

W W W. P I . W S

262

Throughput, Precision and Reliability ...........................................................................

262

Gantry Systems

Gantry Systems .......................................................................................................................................................................

261

MOTION|POSITIONING

Throughput, Precision and Reliability
Solutions for Motion-Centric Industrial Automation

XY and Gantry Systems from PI
Positioning and motion tasks in industrial automation such as those in assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive manufacturing demand solutions thatneed to be robust and reliable.
PI offers a broad range of in-house drive and motion control technologies suchas EtherCAT-based industrial controllers by ACS, where PI holds the major
shares, or air bearing technology for optimized guiding accuracy. Systemengineering for customization and a global service and training network areadded-value offers. PI is therefore the ideal partner for motion-centric industrial
solutions.

Gantry Systems – High-Dynamic Precision
Positioning in 3 Axes■

Linear motor or brushless drives, optionallywith air bearings■

Individual travel ranges in XY up to 2 m■

Z-axis with pneumatic counterweight,
DC or Stepper motor■

Piezomotor for fine adjustment■

Incremental or absolute encoders■

Controlled by ACS Motion Control

The specifications below are an example ofwhat is feasible. Contact PI to discuss yourrequirements!

Applications>> Absolute Encoder■ Electronics Manufacturing>> Air Bearing■ Laser Cutting>> Linear Motor■ Sample Inspection

Technology Glossary ...................... page 290

262

W W W. P I . W SUnit
Active axes

Tolerance

X

YZ

Travel range

508

508

155

Integrated sensor

Optical linear
encoder, incremental

Optical linear
encoder, incremental

Optical linear
encoder, incremental

Sensor resolution

0.002

0.002

0.002

Unidirectional repeatability

0.5

0.5

0.5

μm

typ.

Max. velocity*

3000

3000

2000

mm/s

typ.

Max. acceleration**

30

30

20

m/s2

typ.

Bearings

Ball bearing

Ball bearing

Cross roller bearings

Load capacity

5

kg

max.

Motor type

Ironlesslinear motor

Ironlesslinear motor

Ironless linear motorwith pneumaticcounterbalance

Motion and positioningmm

μm

Mechanical properties

Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
Maximum speed of the z-axis is specified without pneumatic counterbalance.
** No load. Maximum acceleration of the z-axis is specified without pneumatic counterbalance.

Gantry Systems*

263

MOTION|POSITIONING

Components & Accessories

264

W W W. P I . W S

Air Bearings ..............................................................................................................................................................................

266

A-10x PIglide RB Linear Air Bearing Module .................................................................
A-10x.MNT Mounting Feet .............................................................................................
A-41x PIglide FPC: Flat, Circular Air Bearing Modules ...................................................
A-60x PIglide RT Rotary Air Bearing Module .................................................................
A-65x PIglide HB: Hemispherical Air Bearing ................................................................

266
269
270
274
278

280

A-60x.MTT PIglide Manual X-Y-Tilt Platform ..................................................................
A-80x PIglide Filter and Air Preparation Kits ..................................................................

280
282

Adapter Brackets for Multi-Axis Combinations ......................................................................................................................

286

L-500 Adapter Bracket ...................................................................................................

286

Components &Accessories

Accessories for Air Bearings and Stages .................................................................................................................................

265

MOTION|POSITIONING

A-10x PIglide RB Linear Air Bearing Module
Friction Free, Ideal for Positioning, Scanning, Metrology■

Ideal for scanning applications or high-resolution positioning■

Cleanroom compatible■

Size of the motion platform to 300 mm × 300 mm■

Travel ranges to 1 m■

Load capacity to 775 kg■

Straightness / flatness to 0.5 μm per 25 mm■

Pitch / roll / yaw to 1.2 μrad per 25 mm

Linear air bearings of the PIglide RB series are exactly right for applications thatneed smooth, precise, linear motion. The air bearing modules replace ball or
crossed roller guides and are easy to integrate. They offer improved straightness, angular deviation, and repeatability compared to stage units with ballguides, especially for travel ranges longer than 100 mm.
Because air bearings are basically friction free, they work without stiction on
approach or during operation, even under maximum load. Air bearings workwithout making contact and with purified air, and are virtually maintenanceand wear free.

Applications

Accessories and options■

Air preparation kit■

Mounting Feet■

Custom configurations on request■

Several motion platforms on one guide■

Constructions with moving guide>> PIglide Air Bearing Technology■ Sample Inspection■ Optical Alignment■ Scanning■ Flatpanel Inspection■ Metrology / Testing

Technology Glossary ...................... page 290

266

W W W. P I . W SSize of the motion
platform / mm × mm

Travel range / mm

Vertical load
capacity* / N

Lateral load
capacity* / N

A-101

50 × 50

50 to 200

130

75

A-102

50 × 100

50 to 300

260

260

A-103

75 × 75

50 to 300

350

195

A-104

75 × 115

50 to 300

540

540

A-105

100 × 100

50 to 300

630

370

A-106

100 × 150

50 to 600

950

950

A-107

150 × 150

50 to 750

1580

790

A-108

200 × 200

50 to 1000

2950

1475

A-109

300 × 300

50 to 1000

7600

2210

Travel ranges
to 300 mm

Travel ranges
to 600 mm

Travel ranges
to 1000 mm

Straightness / ﬂatness**±1.25 μm±2.5 μm±5 μm

Straightness / ﬂatness,per 25 mm travel
range**±0.25 μm±0.25 μm±0.25 μm

Position stability**±0.05 μm

±0.05 μm

±0.05 μm

Pitch / yaw, per 25 mmtravel range**

1.2 μrad1.2 μrad1.2 μradPitch / yaw, overall**

10 μrad20 μrad30 μradA-10x.xxx
Operating pressure

80 psi (550 kPa) nominal

Air consumption<1.0 SCFM (28 SLPM)

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 8573-1 Class 1
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners

The specified load capacities assume an operating pressure of 80 psi (550 kPa).
For an alternative operating pressure, contact PI for determining other load capacities.
** Precision specifications depending on load, orientation, and external forces on the bearing.
Contact PI for application-specific parameters.
Ask about custom designs!

Components &Accessories*

267

MOTION|POSITIONING

A-10x.xxx, dimensions in mm

Model

A

B

C

D

E

F

G

H

J

K

L

M

N

P

Q

R

S

T

U

V

W

X

A-101
A-102
A-103
A-104
A-105
A-106
A-107
A-108
A-109

50
100
75
115
100
150
150
200
300

50
50
75
75
100
100
150
200
300

35
45
55
75
75
100
100
130
140

15
25
25
45
35
60
50
70
70

25
25
45
45
60
60
100
140
240

5
5
7.5
7.5
10
10
10
10
10

15
15
30
30
40
40
75
100
200

CL
CL
12.5
12.5
20
20
50
50
100

4x M3 C’BORE
4x M3 C’BORE
4x M5 C’BORE
4x M5 C’BORE
4x M6 C’BORE
4x M6 C’BORE
6x M6 C’BORE
6x M6 C’BORE
6x M6 C’BORE

2x M3
2x M3
2x M5
2x M5
2x M6
2x M6
4x M6
4x M6
4x M3

80
130
115
155
150
200
200
250
350

15
15
35
50
50
50
50
50
50

40
40
N/A
N/A
N/A
N/A
N/A
N/A
N/A

N/A
60
N/A
N/A
N/A
110
110
150
150

N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
250

40
40
60
60
80
80
125
170
270

6x M3
10x M3
4x M5
4x M5
4x M6
8x M6
8x M6
8x M6
12x M6

12
12
14
14
14
14
14
14
14

21
46
37.5
57.5
50
75
75
100
150

30
40
47.5
67.5
37.5
50
50
65
65

10
10
15
15
20
20
20
20
20

4 (5/32”)
6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)268

W W W. P I . W S

A-10x.MNT Mounting Feet
For Mounting the Air Bearing Modules of the A-10x Series■

Hardcoat aluminum■

Matched exactly to the respective
air bearing module

Compatible with

Width / mm

Overall mass (one set) / kg

A-101.MNT

A-101.xxx

10

0.03

A-102.MNT

A-102.xxx

10

0.03

A-103.MNT

A-103.xxx

15

0.08

A-104.MNT

A-104.xxx

15

0.08

A-105.MNT

A-105.xxx

20

0.13

A-106.MNT

A-106.xxx

20

0.13

A-107.MNT

A-107.xxx

20

0.27

A-108.MNT

A-108.xxx

20

0.46

A-109.MNT

A-109.xxx

20

0.94

Components &Accessories

Model

269

MOTION|POSITIONING

A-41x PIglide FPC:
Flat, Circular Air Bearing Modules
Friction-free, modular air bearings■

Diameters from 25 mm to 300 mm■

Load capacity to 15500 N■

Stiffness to 860 kN/mm■

Cleanroom compatible■

Mounting hardware, customizations,and accessories available

The PIglide Flat Pad Circular air bearing series is suitable for applications that
require friction-free, accurate linear or planar motion. The modular concept ofthese air bearings allows the user to build their own motion system. Several
bearings can be combined to increase the load capacity or to create multi-axis
motion platforms.

Applications>> PIglide Air Bearing Technology■ Sample Inspection■ Optical Alignment■ Scanning■ Flatpanel Inspection■ Metrology / Testing

Technology Glossary ...................... page 290

270

W W W. P I . W S

Air
consumption /l/h (SCFH)

Mass / gPart #

Diameter / mm

Ball interface
diameter / mmLoadcapacity / N

Stiffness /N/μm

A-411.025

25

13

88

17.5

60 (2)

16

A-411.040

40

13

220

28.0

60 (2)

42

A-411.050

50

13

330

52.5

85 (3)

66

A-411.065

65

13

660

78.8

115 (4)171

A-411.080

80

13

1010

111

170 (6)

259

A-411.100

100

20

1710

175

170 (6)505

A-411.125

125

20

2780

254

230 (8)1105

A-411.150

150

20

4000

350

285 (10)1590

A-411.200

200

20

7700

520

570 (20)4040

A-411.300

300

20

15500

860

850 (30)12000

Air supply
Operating pressure

80 psi (550 kPa) nominal

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 8573-1 Class 1
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Miscellaneous
Guideway surface ﬂatness<1μm / 300 mm

Nominal ﬂy-height

10 – 15 μm

Materials

Hardcoat aluminum, stainless steel fasteners

Recommended
guideway materials

Guideways are supplied by the customer.
Granite, hardcoat aluminum, stainless steel,ceramics, nickel-plated steel, nickel-plated cast ironAir bearing type

Discrete oriﬁce

Mounting Hardware(sold separately)Part #

Description

Ball interface diameter

A-412.013S

Threaded ball studassembly

13

A-412.013N

Mounting nut

13

A-412.013P

Retaining plate

13

A-412.020S

Threaded ball studassembly

20

A-412.020N

Mounting nut

20

A-412.020P

Retaining plate

20

Components &Accessories

The loads listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are required.

271

MOTION|POSITIONING

Model

A

B

C

D

E

F

A-411.025
A-411.040
A-411.050
A-411.065
A-411.080
A-411.100
A-411.125
A-411.150
A-411.200
A-411.300

25
40
50
65
80
100
125
150
200
300

13
13
13
20
20
25
35
35
66
66

13
13
13
13
13
20
20
20
20
20

N/A
21.6
21.6
21.6
21.6
31.6
31.6
31.6
31.6
31.6

6.4
7
7
8
8
9
9
9
9
9

1.5
1
1
1
4.5
6.4
6.4
6.4
25
25

272

W W W. P I . W SMounting hardware dimensions: 13 mm ball interface diameter

Components &Accessories

Mounting hardware dimensions: 20 mm ball interface diameter

273

MOTION|POSITIONING

A-60x PIglide RT Rotary Air Bearing Module
Frictionless, Nonmotorized■

Motion platform diameter from 50 mm
to 300 mm■

Load capacity to 425 kg■

Eccentricity / flatness <200 nm■

Can be mounted vertically or horizontally■

Cleanroom compatible

Product Overview

Accessories and options

The PIglide RT series of nonmotorized passive rotary air bearings are designed
for accuracy, precision, high stiffness, and ease of use. They can be used in any
orientation and are easy to integrate with motors and encoders for complete
positioning solutions.

■

Encoder for precise acquisition of stage
angle during manual operation■

Mounting base for horizontal mounting
onto optical tables and flat surfaces

The bearings of the RT series offer superior eccentricity, flatness, and wobble
performance. Because they are completely friction-free, they exhibit no breakaway torque and no frictional resistance during operation. They are ideal foruse in cleanrooms, require no maintenance or lubrication, and have unlimited
lifetime.

■

PIglide filter and air preparation kits■

Customized mounting flanges andsquare housings

Applications>> PIglide Air Bearing Technology■ Sample Inspection■ Metrology / Testing■ Scanning■ Optical Alignment

Technology Glossary ...................... page 290

274

W W W. P I . W SSize andloads

Motion platform
diameter /mm

Journal length /mmLoad capacity (1)axial / radial /N

Permissible tip / tilt
torque (1) / N·m

Stiffness axial /radial / N/μm

A-601.02550

25

134 / 57

0.57

26 / 8A-602.03875

38

299 / 132

1.13

57 / 22

A-603.025100

25

536 / 115

1.70

96 / 18

A-603.050

100

50536 / 229

4.52

96 / 35

A-604.050

150

501206 / 344

22.6

210 / 64

A-604.090

150

901206 / 605

36.7

210 / 113

A-605.065

200

652144 / 577

39.6

385 / 110

A-605.100

200

100

2144 / 917

67.8

385 / 175

A-607.075300

754244 / 1203

141.3

788 / 204

A-607.175

300

175

4244 / 2789

282.5

788 / 475

Performance
specifications

Eccentricity (2) /nm

Flatness (2) /nm

Wobble (2) /
μrad

Max.
velocity (3) /rpm

Momentof inertia /kg·mm²

Rotating
mass / kg

Overallmass / kg

A-601.025

300

100

5

3000

35

0.15

0.4

A-602.038

250

75

4

3000

231

0.4

1.2

A-603.025

175

75

2.5

3000

705

0.7

1.5

A-603.050

175

75

2.5

3000

750

0.8

2.5

A-604.050

100

50

2

3000

4715

2.1

5.4

A-604.090

100

50

2

3000

5050

2.6

8.2

A-605.065

100

50

1.5

2000

17900

4.6

11.6

A-605.100

100

50

1.5

2000

18800

5.3

16.3

A-607.075

75

40

1

1000

18190019.4

38.1

A-607.175

75

40

1

1000

20670026.0

59.0

Optional
encoders

Sensor signal

Sensorresolution /
μrad

Max.
velocity /rpm

Reference point switch

A-601.xxxH

A/B quadrature, differential,
RS-422, 4 MHz

192

2500

1 / revolution, one count over one step ofthe encoder, synchronized to output signal

A-602.xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

133

2000

1 / revolution, one count over one step ofthe encoder, synchronized to output signal

A-603.xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

100

1500

1 / revolution, one count over one step ofthe encoder, synchronized to output signal

A-604.xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

66.4

1000

1 / revolution, one count over one step ofthe encoder, synchronized to output signal

A-605.xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

50

800

1 / revolution, one count over one step ofthe encoder, synchronized to output signal

A-607.xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

33.5

500

1 / revolution, one count over one step ofthe encoder, synchronized to output signal

A-60x

Operating pressure

75 to 85 psi (515 to 585 kPa)

Air consumption<2.0 SCFM (57 SLPM)

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 8573-1 Class 1
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials (4)Hardcoat aluminum, stainless steel fasteners

Components &Accessories

Miscellaneous(1 Capacities listed assume supply pressure of 80 psi. Please contact PI if other pressures are required.
(2) Precision specifications are dependent on quality of mounting base, payload, orientation, and external forces on the bearing.
For application-specific parameters, please contact PI. Values shown are static (no rotational velocity during measurement).
(3) Velocity may be limited by the encoder option or payload imbalance. Please contact PI for further details.
(4) Alternate stage surface materials, such as stainless steel, are available. Please contact PI for a quote.

275

MOTION|POSITIONING

A-60x.xxx, dimensions in mm

Model

A

B

C

D

E

F

G

H

J

K

L

M

N

A-601.025
A-602.038
A-603.025
A-603.050
A-604.050
A-604.090
A-605.065
A-605.100
A-607.075
A-607.175

50
75
100
100
150
150
200
200
300
300

25
38
25
50
50
90
65
100
75
175

50
65
55
80
95
135
125
160
150
250

70
100
125
125
185
185
240
240
355
355

25
30
50
50
75
75
100
100
150
150

40
50
75
75
125
125
150
150
250
250

60
87.5
112.5
112.5
170
170
220
220
330
330

8
12.5
25
25
40
40
60
60
75
75

M3x0.5, 6 DEEP
M3x0.5, 6 DEEP
M4x0.7, 8 DEEP
M4x0.7, 8 DEEP
M5x0.8, 10 DEEP
M5x0.8, 10 DEEP
M6x1.0, 12 DEEP
M6x1.0, 12 DEEP
M6x1.0, 12 DEEP
M6x1.0, 12 DEEP3x M3 SHCS, 30 LG. MIN
3x M4 SHCS, 40 LG. MIN
3x MS SHCS, 30 LG. MIN
3x MS SHCS, 50 LG. MIN
4x M6 SHCS, 50 LG. MIN
4x M6 SHCS, 90 LG. MIN
6x M6 SHCS, 70 LG. MIN
6x M6 SHCS, 100 LG. MIN
6x M8 SHCS, 80 LG. MIN
6x M8 SHCS, 150 LG. MIN

3x M3x0.5, 6 DEEP3x M4x0.7, 8 DEEP
3x M5x0.8, 10 DEEP
3x M5x0.8, 10 DEEP4x M6x1.0, 12 DEEP4x M6x1.0, 12 DEEP6x M6x1.0, 12 DEEP6x M6x1.0, 12 DEEP
6x M8x1.25, 16 DEEP
6x M8x1.25, 16 DEEP

6
9.5
6
12.5
12.5
22.5
16
23.5
17.3
58.5

30
30
30
30
68
68
5
5
5
5

276

W W W. P I . W S

Model

A

B

C

D

E

F

G

H

J

A-601.025 M or H
A-602.038 M or H
A-603.025 M or H
A-603.050 M or H
A-604.050 M or H
A-604.090 M or H
A-605.065 M or H
A-605.100 M or H
A-607.075 M or H
A-607 175 M or H

50
75
100
100
150
150
200
200
300
300

65
80
65
90
100
140
130
165
155
255

26.5
28.5
25
25
27.5
27.5
35
35
42.5
42.5

82
106
135
135
185
185
240
240
355
355

74
104
125
125
185
185
240
240
355
355

55
80
100
100
150
150
200
200
300
300

70
100
-

35
50
-

M3 SHCS, 25 LG. MIN
M4 SHCS, 30 LG. MIN
M5 SHCS, 25 LG. MIN
M5 SHCS, 25 LG. MIN
M6 SHCS, 30 LG. MIN
M6 SHCS. 30 LG. MIN
M6 SHCS, 35 LG. MIN
M6 SHCS, 35 LG. MIN
M8 SHCS, 40 LG. MIN
M8 SHCS, 40 LG MIN

Components &Accessories

A-60x.xxxH and A-60x.xxxM, dimensions in mm

277

MOTION|POSITIONING

A-65x PIglide HB: Hemispherical Air Bearing
Friction-free, ideal for rotary motion on three axes■

Cleanroom compatible■

Low inertia■

Diameter up to 300 mm■

Rotatable in three directions■

Load capacity to 635 kg■

Tip / tilt range to ±45°■

Operating pressure from 30 psi to 90 psi(207 kPa to 621 kPa)■

Ideal for satellite control and simulationof weightlessness

Overview
The spherical bearings, which are often used inresearch on weightlessness in satellites, are also
used in systems for precision chip contacting andoptical alignment. Due to the use of sphericalbearings at both ends of the drive screw shaft, it
is possible to build extremely stiff drive screws.
This arrangement allows precision alignment of
the drive screw shaft due to the motion of one
spherical bearing relative to the other.
Accessories and options
A-65x.PED Matching pedestal for each
A-65x model, dimensions in mm

Applications■ Semiconductor■ Optical Alignment■

Air preparation kit■

Custom configurations on request

Model

Mass / kgCompatible with

A-651.PED
A-652.PED
A-653.PED
A-654.PED
A-655.PED
A-656.PED
A-657.PED

3.1
4.0
16
16
17
43
44

A-651.xxx
A-652.xxx
A-653.xxx
A-654.xxx
A-655.xxx
A-656.xxx
A-657.xxx>> PIglide Air Bearing Technology■ Scientific

Instrumentation
Technology Glossary ...................... page 290

278

W W W. P I . W S

ModelSpherediameter / mm

Rotation
range**/ °Loadcapacity* / kg

Base mass / g

A-651

50

±45

15

115

70

0.02

A-652

75

±45

35

235

216

0.14

A-653

100

±45

65

550

475

0.58

A-654

150

±45

160

1350

1475

4.21

A-655

200

±45

265

2500

3350

17.2

A-656

250

±45

405

4000

5525

46.3

A-657

300

±45

635

6500

8100

103

Operating pressureperating pressure

80 psi (550 kPa) nominal, 90 psi (621 kPa) maximum

Air consumption<1.0 SCFM (28 SLPM)

Air quality

Clean (ﬁltered to 1.0 μm or better) – ISO 8573-1 Class 1
Oil free – ISO 8573-1 Class-1
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners
alternative materials on request

Spheremass / gMoment ofinertia*** / g·m2*

The specified load capacities assume an operating pressure of 80 psi (550 kPa).
For an alternative operating pressure, contact PI for determining other load capacities.
** Other travel ranges on request.
*** Around the center of the sphere.

Components &Accessories

A-65x.045, dimensions in mm

Model

A

B

C

D

E

F

G

H

I

A-651
A-652
A-653
A-654
A-655
A-656
A-657

50
75
100
150
200
250
300

30
50
70
110
150
200
250

42
55
70
95
125
150
175

55
70
100
140
170
210
250

23
27
30
40
50
55
65

M3
M3
M4
M5
M5
M6
M6

38
60
85
125
175
225
275

M3
M3
M4
M5
M5
M6
M6

45
60
85
125
150
190
230

279

MOTION|POSITIONING

A-60x.MTT PIglide Manual X-Y-Tilt Platform
Compatible with A-60x and A-62x■

Motion platform diameter 75 to 300 mm■

Manual operation■

4 degrees of freedom: X, Y, θX, θY■

Clear aperture■

Can be mounted directly onto an A-60x and A-62x

Applications>> PIglide Air Bearing Technology■ Sample Inspection■ Metrology / Testing■ Optical Alignment

Technology Glossary ...................... page 290

280

W W W. P I . W S

ModelMotion platform
diameter /mm

Travel range X,YTravel range θX, θY

Overall mass /kg

Moment ofinertia /kg·mm²

A-602.MTT

75±1.5 mm±1.25°

0.8

620

A-603.MTT

100±1.5 mm±1.25°

1.5

2090

A-604.MTT

150

±3 mm

±1.25°

4

12900

A-605.MTT

200

±3 mm

±1.25°

8.6

52100

A-607.MTT

300

±3 mm

±1.25°

25

319000Model

Motion platform
diameter /mm

Compatible
with A-60x

Compatible
with A-62x

A-602.MTT

75

A-602.xxx

A-603.MTT

100

A-603.xxx

A-623.xxx

A-604.MTT

150

A-604.xxx

A-624.xxx

A-605.MTT

200

A-605.xxx

A-607.MTT

300

A-607.xxx

A-627.xxx

A-60x.MTT, dimensions in mm

A-604 through A-607

Components &Accessories

A-602 / A-603

Model

A

B

C

D

E

A-602.MTT
A-603.MTT
A-604.MTT
A-605.MTT
A-607.MTT

75
100
150
200
300

25
30
35
45
55

30
50
75
100
150

50
75
125
150
250

M3x0.5, 6 DEEP
M4x0.7, 8 DEEP
M5x0.8, 10 DEEP
M6x1.0, 12 DEEP
M6x1.0, 12 DEEP

281

MOTION|POSITIONING

A-80x PIglide Filter and Air Preparation Kits
Multi-stage Filtration System with Pressure Regulation

282

W W W. P I . W S■

Cleans and filters the compressed
air supply■

Controls the supply pressure■

Optional pressure switch■

Recommended for use with all
PIglide air bearing products■

Customized adaptations possible

A-801

A-802

4-stage air preparation kit

2-stage air preparation kit

Maximum ﬂow

60 SCFM(1680 SLPM)

10 SCFM(300 SLPM)

Compressed air supply quality(ISO 8573-1)

As desired

Class 3 or better

Max input pressure

150 psi(1035 kPa)

150 psi(1035 kPa)

Description
Air supply

MiscellaneousPrimary construction

Aluminum

Polycarbonate

Mass

4.2 kg

0.7 kgOptions
Option 1 pressure switch

1 = none

2 = N/O contact, adjustable threshold value

Option 2 Air input connection

0 = quick connection, 6 mm and 8 mm
outer diameter in the scope of delivery

3 = quick connection 1/4” and 3/8” outer
diameter in the scope of delivery

Option 3 Air output connection

0 = quick connection, 6 mm and 8 mm
outer diameter in the scope of delivery

3 = quick connection 1/4” and 3/8” outer
diameter in the scope of delivery

All modules require a compressed air supply with dry air according to ISO 8573-1 Class 3 or better (dew point no greater than 0°C).

Components &Accessories

A-801.100, dimensions in mm

283

MOTION|POSITIONING

A-801.200, dimensions in mm

A-802.100, dimensions in mm

284

W W W. P I . W S

A-802.200, dimensions in mm

Components &Accessories

Air pressure below the threshold value, pressure switch opened (left).
Air pressure above the threshold value, pressure switch closed (right).

285

MOTION|POSITIONING

L-500 Adapter Bracket
For Vertical Mounting of Linear and Rotation Stages

286

W W W. P I . W S

L-500.AV1(Angle to axis)

L-500.AV1(Axis to angle)

L-500.AV3(Angle to axis)

L-500.AV3(Axis to angle)

Linear stages
HPS-170

X

X*

X

–

L-406

–

–

X

X

L-408

–

–

–

X

L-412

X

X

X

–
–

L-417

X

–

–

V-412

X

X

X

V-417

X

–

–

–

L-509

–

–

X

X

L-511

X

X*

X

–

LS-180X–

X–

UPL-120

–

–

–

X

Rotation stages
DT-80

–

–

–

X

L-611

–

X

X

–

UPR-100

–

–

–

–

UPR-120

–

X

X

–

UPR-120 AIR

–

X

X

–

WT-85

–

–

X

X

WT-90

–

–

X

–

WT-100–––X

WT-120

–

–

X

–

L-306

–

–

X

–

L-310

–

–

X

–

Goniometers

Z stage

XY stage
L-731

X

–

X

–

V-731

X

–

X

–

L-741

X

–

X

–

V-741

X

–

X

–

Components &Accessories* to 155 mm stroke
Ask about custom designs!

287

MOTION|POSITIONING

L-500.AV1, dimensions in mm

Top view of the L-500.AV1 adapter bracket,
dimensions in mm

Bottom view of the L-500.AV1 adapter bracket,
dimensions in mm

288

W W W. P I . W S

L-500.AV3, dimensions in mm

Bottom view of the L-500.AV3 adapter bracket,
dimensions in mm

Components &Accessories

Top view of the L-500.AV3 adapter bracket,
dimensions in mm

289

MOTION|POSITIONINGTerms and Technology GlossaryA
Absolute encoder
Absolute encoders are used for detecting the position and provide information on the absolute position of a motion platform.
For example, this can be realized optically by using an additional
Pseudo Random Code (PRC) scale.
ActiveDrive motor
The ActiveDrive Motor also integrates a servo amplifier into
the motor housing, which is driven in PWM mode (Pulse Width
Modulation). The operating voltage, which is mostly 24 V for
ActiveDrive motors, is supplied by a separate power supply.
Advantage: Lower costs, more compact design and higher
reliability compared to an externally cabled amplifier; a higher
degree of efficiency due to elimination of power loss between
the amplifier and motor; avoidance of radiation interference
because the amplifier and motor are built into the same shielded housing.
Air bearing
An air film of a few micrometers is used as bearing. Therefore,
air bearings are free of friction and, compared to mechanicalbearings, allow a considerably higher guiding accuracy. See“PIglide Air Bearing Technology”.
Average current

amplifier are used for position control instead of block commutation, the term synchronous servo motor (SSVM) is often
encountered. Compared to DC motors, it is possible to realize asmaller and lighter design and provide the same performance,
which results in a high ratio between the torque and the motor
size. At the same time, the drivetrain can be shorter for the same
travel range because the drive shaft is located inside the motor.

C
Capacitive sensor
Capacitive sensors allow contactless measuring, do not introduce much energy into the drive system and have a flat design.
Their direct position measurement eliminates drift effects fortravel ranges of up to 1.5 mm. The overall system, which consists of the stage, sensor technology, and electronics, gains on
performance and precision. Due to noncontact measuring in
the 10 μm up to approx. 2 mm range, it is possible to mount thecapacitive sensor in the stage at the point where the motion
actually takes place. The design consists of two conductive
surfaces: A high-frequency alternating current generates ahomogenous electric field between the two surfaces. Customers
from the semiconductor industry also appreciate the small andversatile design as well as the lack of thermal build-up in thesystem. See “Sensor linearization”.
Closed-loop operation

Current that is available reliably over a longer period. Given as
measured value. For multi-axis controllers, it is specified perchannel.

B

Additional position feedback makes it possible to operate motors
in a closed servo loop. Feedback of the corresponding encoder
signals is necessary for this purpose. Basically, this concept
makes it possible to control the rotational speed, the position,and the torque, which allows realization of a high position resolution, a uniform feed rate, and a large dynamic range for velocity and acceleration at a constant torque.

Ball screw
In the case of ball screws, only rolling friction occurs, whichallows higher speeds, drive performance, and longer lifetime
than leadscrews. They are however, not self-locking. The backlash can be minimized adjusting the ball diameter and the thread
profile.
Brushless DC Motor (BLDC)
Compared to conventional DC motors, BLDC motors manage
without wear-prone brushes meaning that a considerably longer lifetime is possible. Commutation is fully electronic and isgenerated completely by a rotating magnetic field in the statorthat drags the rotor; the motor is based more on the conceptof a synchronous machine. If sine commutation and a servo

Creep
An unwanted change in the displacement over time.
Crossed roller guide
Crossed roller guides are comparatively stiff and manage withlow preload. This results in reduced friction with high load capacity, high guiding accuracy, and smooth running. An additional
forced cage control helps to prevent the roller bearing from creeping. Nevertheless, this shortens the possible travel range overthe same axis length.

290

W W W. P I . W SCrosstalk

Drift

Deviation from the ideal motion in axes perpendicular to thedirection of motion.
Angular errors are xrx = roll, xry = pitch, xrz = yaw. Linear errors
are lateral runout such as xty = straightness, xtz = flatness. See“Linearity error”.

See “Creep”.

Current consumption
Current consumption of the system on supply end. It is specified
for controller without load. Alternatively, power consumption.

Drive typeDefines the types of drive supported by the controller / driver,such as voice coils, linear motors, DC/BLDC motors, stepper
motors and others.

E

Current limitation

Encoder

Short-circuit protection.

D

An encoder is used for determining the position. Basically, adifference is made between linear and rotary encoders, which,depending on the configuration, operate either incrementallyor absolutely.

DC motor

Encoder input

A DC motor exploits the force effect of the electrical current via
a pivoted conductor loop in a magnetic field. In conjunction with
servo controllers (see “servo motor”) , these types of motors
allow high torques at lower motor speeds, good dynamics overa large speed range, faster response, lower heat generation as
well as smooth and vibration-free operation. The disadvantage
is the wear-prone brushes used for commutation that does
result in a comparatively shorter lifetime. However, due to their
low holding force, DC motors (without gearhead) are generally
not suited for vertically oriented axes.

Maximum bandwidth (-3 dB) of the input signals for the encoder
input.

Design resolution
The theoretical minimum movement that can be made. Design
resolution must not be confused with minimum incremental
motion. In indirect position measurement methods, values for
spindle pitch, gear ratio, motor or sensor / encoder resolution,for example, are included in the calculation of the resolution;
normally it is considerably below the minimum incremental
motion of a mechanical system. Indirect measurement methods,
the resolution of the sensor is specified.

Extensive software package
To make systems more user friendly, software plays an important role in positioning systems. Customers expect a plug-andplay solution even if several positioning systems are combinedor different drive systems need to interact, and that is why PI(Physik Instrumente) provides PIMikroMove® host software. You
only need to enter your parameters into the application to avoid
programming altogether. Also supports a number of text-based
languages, has its own LabVIEW, Python and Matlab drivers,
and the software is compatible with Windows, Linux, and OSX.
However, not all software tools may be available for all controller versions.

F
Flatness
See “Crosstalk”.

Position measuring is performed with the highest accuracy
directly at the motion platform so that nonlinearity, mechanical play or elastic deformation have no influence on position
measuring. This is achieved by noncontact optical linear encoders. Precision positioning systems use different encoder types
as position sensor: Incremental encoders with different accuracy
levels, absolute-measuring encoders that additionally make referencing unnecessary when a machine is switched on again, andfor travel ranges under 2 mm, capacitive sensors.

Flexures
The motion of a flexure is based on elastic deformation of asolid. This avoids any static, rolling or sliding friction. Flexureelements have high stiffness and load capacity and are very
insensitive to shocks and vibrations. They do not wear, require
no maintenance, are completely vacuum compatible, function
in a wide temperature range, and do not require any lubricants.

291

MOTION|POSITIONING

Terms and Technology
Glossary

Direct metrology

Terms and Technology GlossaryG

Leadscrew

GearheadGearheads allow adjustment of the speed and the torque. However, the transmission ratio, which is the proportion between the
speed and the gear input, is decisive and the speed is definedat the gear output. In the case of transmission reduction, thisratio is greater than one, which results in a lower speed with ahigher torque. The opposite applies in the case of higher speeds.
Typical types of gears include for example, worm gears, spur
gears, planetary gears, bevel gears, and belt gears.

I
ID chip

Leadscrews can achieve very high resolutions with smooth running and are often preloaded by springs to minimize backlash.
This results in sliding friction and therefore a self-locking effect.
However, this reduces the speed, performance, and the lifetime.
Limit switch
Function: Optical, magnetic.
Linear ball guiding
Linear ball guides require exact tolerances between the guideand bearing in order to keep the play and friction as low as
possible. This limits the load capacity. Due to the simple design,
they are only suitable for inexpensive applications with comparatively low requirements.
Linear encoder

An ID chip is located in the connector of many stages. Whenthe stage is calibrated at the factory with a digital controller, thecalibration data is saved together with specific product information on the ID chip. When switched on, digital electronics
read the data from the ID chip of the connected stage. Stages,
whose ID chip contains the calibration data, can therefore beconnected to any suitable digital electronics without renewed
calibration.

Linear encoders measure the position directly at the motion platform. As a rule, this means that a higher accuracy is achieved
compared to rotary encoders, because nonlinearity, mechanicalplay, and elastic deformation have no influence.
Linear motor

Permissible input level for digital interfaces.

A linear motor is an electromagnetic direct drive that generates
straight linear motion. The range of a linear motor is practically unlimited. A linear measuring system is always required formotion and positioning; open loop operation of a linear motor
is not possible. The linear motor does not require mechanicalcoupling elements to convert the rotation of the motor into linear motion as is the case with servo motors. Typically, 3-phasemotors are used.
Typical applications are found in the electronics and semiconductor industry, medicine and biotechnology, in tool machineswith a strong focus on laser cutting but also in other fields where
precision, dynamics, and productivity are important.

Integrated feedback sensor

Linearity error

Absolute measuring capacitive, piezo resistive (PRS) or strain
gauge (SGS) and optical (absolute and relative) sensors are used
to provide position information to the controller.

Deviation in motion direction, of measured position from commanded position (positioning accuracy). Measured with an
external, traceable device. The value is given as a percentageof the entire measuring range.
Measurement of the linearity error: The target and measured
actual values of the positions are plotted against each other,a line is drawn through the first and last data point, and the
maximum absolute deviation is determined. A linearity error of
0.1 % corresponds to an area of ±0.1 % around the ideal line.
Example: A linearity error of 0.1 % over a measuring range of
100 μm produces a possible maximum error of 0.1 μm.

Incremental encoder
When incremental encoders are in motion, they generate impulses that are counted by the controller. However, in contrast to
absolute encoders, it is a question of determining a relative
position. To determine an absolute position, a limit switch orreference point switch signal must also be referenced.
Input level

L
Lateral force, max.
Maximum lateral force perpendicular to the operating direction.
For XY stages the push/pull force capacity of the other module(in its operating direction) limits the lateral force that can be
tolerated.

Load capacity
Maximum vertical load, when the stage is mounted horizontally.

292

W W W. P I . W SMOvertemperature protection
Switch-off temperature for voltage output. No automatic restart.

Magnetic bearing
Magnetic levitation allows excellent linear and rotational guiding
accuracy on a plane. The passive runner hovers of a magnetic
field and is then actively guided by it. Flatness errors are measured and compensated by very accurate noncontact sensors. Contrary to air bearings, which are also very accurate, magnetic
bearings can also be used in vacuum.

P

Measurement range extension factor

Parallel kinematics, hexapods

For capacitive sensors, used by PI.

Hexapods are parallel-kinematic systems with six drives that areconnected directly to a single platform. This makes it possible
for users to position objects automatically in all degrees of freedom, X, Y, Z, and rotatory and, depending on the drive, with anaccuracy in the micrometer range or lower. The parallelkinematic
system is very stiff, with only a low passive weight to move and,with the corresponding design, can carry loads of up to several
tons. Users are able to arbitrarily choose the reference coordinate system and, today, workers are now working together withhexapods on the production line. The user integrates the system
into the automation environment via EtherCAT.

N
Noise
For capacitive sensors. In extended measurement ranges, noise
is considerably higher than in the nominal measurement range.
Nonlinearity
See “Linearity error”.

Patents
PI owns a large variety of patents on piezo and motor technology.

Parallel metrology
Each sensor measures the position of the same moving platform in the respective degree of freedom. This keeps the off-axis
runout, or crosstalk, of all actuators inside the servo-control loop
and allows it to be corrected automatically.

Open-loop operation
The actuator is used without a position sensor. Displacement
roughly corresponds to the drive voltage. Creep, nonlinearityand hysteresis remain uncompensated. Open-loop operation is
ideal for applications where fast response and very high resolution with maximum bandwidth are essential. Here, commanding
and reading the target position in absolute values is either notimportant or carried out by external position sensors. Open-loop
operation is not possible for electro-magnetic direct drives, suchas linear motors and voice-coil drives.
Operating temperature range
In any case, the device can be operated safely in the maximum
permissible temperature range. To avoid internal overheating
however, full load is no longer available above a certain temperature (maximum operating temperature under full load). Nevertheless, recalibration or zero-point-adjustment may be required
if the system is operated at different temperatures. Performance
specifications are valid for room temperature range. Please referto individual datasheets and contact PI for more details.
Operating voltage
Allowed control input voltage range (also input frequency) for
the supply of the device.

Peak current
Only available for very short times, typically under a few milliseconds. It is used to estimate the possible dynamics with acertain capacitive load. Note: In this case, the controller / driver
does not necessarily work linearly.
Piezoresistive sensor (PRS)
Strain gauge sensors that consist of a semiconductor foil. See“Strain gauge sensors”.
PIglide Air Bearing Technology
The PIglide air bearing technology allows friction-free positioning with a high guiding accuracy of up to 5 μrad over 100 mm.
The technology improves the position resolution and it is possible to realize constant-velocity scanning. The repeatability is only
a few encoder impulses. A similar precision in the nanometer
range is also possible with flexure-guided piezo nanopositioners, however, only over considerably shorter travel ranges. The
developers at PI (Physik Instrumente) adapt high-precision, air
bearing positioning stages and motion control systems according to customer requirements.

293

MOTION|POSITIONING

Terms and Technology
GlossaryOTerms and Technology Glossary
PIMag® Magnetic Linear Motors
Magnetic direct drives from PI (Physik Instrumente) provide a
direct and stiff connection between the load to be moved andthe drive. The industry demand is particularly high when objects
need to be positioned with high dynamics and precision. Thanks
to the smooth-running precision linear guides with crossed roller bearings, these types of linear motor stages are particularly
suitable for applications that require constant-velocity scanning.
The drives operate without contact and therefore very reliable.
Users can integrate the magnetic direct drives into existing machines and systems quickly and easily via standardized fieldbus
systems. See “Linear motor”, “Torque motor”
PIMag® Voice CoilThanks to their low weight and friction-free drive principle, voicecoil drives are small and particularly suitable for applications
that require high dynamics and high velocities over limited
travel ranges – for example, in medical technology. Voice coildrives have a greater advantage for the customer when compared to traditional drive screw-based solutions, particularly
with respect to wear and dynamics. High scan frequencies andprecision positioning are possible with these drives, because
they are free of hysteresis effects. See “Voice Coil Drive”.

R
Recirculating Ball Bearing
Due to their design, recirculating ball bearings are alreadyinsensitive to creeping. For example, they are suitable for highprecision axes, which are often used for scanning smaller areas.
When assembled correctly, they offer a high load capacity and at
the same time, long lifetime, no maintenance, and high guiding
accuracy.
Reference point switch
Function: Optical, magnetic.
Repeatability
Typical values in closed-loop operation mode (RMS, 1 σ). Repeatability is a percentage of the total distance or angle traveled. For
small ranges, repeatability may be significantly better.
Resolution
Position resolution relates to the smallest change in displacement that can still be detected by the measuring devices. Values
are typical results (RMS, 1 σ).

Pitch

Roll

See “Crosstalk”.

See “Crosstalk”.

Power consumption

Rotational runout

Maximum power consumption under full load.

See “Crosstalk”.

Profile generator

Rotary encoder

Functionality of motor controllers that allows motion profiles
such as linear interpolation, point-to-point, trapezoid, double
bends. For several axes: Electronic gearing.

Rotary encoders measure the position indirectly because forexample, they are mounted directly on the motor shaft. Thatmeans that they are attached to a rotating part of the drivetrain.
Easy installation of the sensors is an advantage but backlash andmechanical play affect the resulting measurement.

Pulse width modulation (PWM)
PWM-controlled motors allow control of the (motor) performancewith a high-frequency-signal. This means that the power signal
can be separated from the digital control signal.
PWM control is used for example for controlling electric motors
such linear motors or voice coil drives. The “ActiveDrive Motor”
is a special feature from PI, see there.
Push/pull force capacity (in operating direction)
Specifies the maximum forces that can be applied to the systemalong the active axis. If larger forces are applied, damage to theactuator can occur. The force limit must also be considered indynamic applications.
Example: the dynamic forces generated by sinusoidal operation
at 500 Hz, 20 μm peak-to-peak, 1 kg moved mass, are approximately ±100 N.

S
Stepper motor
Stepper motors only take discrete positions within one revolution. A position can be commanded with a constant step size
without an additional encoder. The achievable step size is specified by the motor control. Intelligent wiring of the individual
poles allows a so-called microstep mode, which, depending on
the type, is able to realize several hundreds of thousands ofmicrosteps between the full steps by electrical interpolation.
However, step losses and the associated positioning errors canbe the result in the case of excessively high loads and accelerations as well as resonance effects if an additional encoder is294

W W W. P I . W S

not used. High speeds are only possible with high numbers of
steps, which however, prevents reaching the achievable torque.
A mechanical damper on the motor shaft, which also works as
handwheel, supports smooth running. To hold position without
a self-locking gearhead, stepper motors must be supplied withcurrent, which can then lead to jittering. Nevertheless, stepper
motors offer a very long lifetime and, compared to DC motors,
are especially suited to applications with reduced dynamics andin a vacuum.

Specification
Performance specifications are valid for room temperature(22 ±3 °C) and closed-loop systems are calibrated at this temperature (specifications for different operating temperatureson request). Recalibration is recommended for operation atsignificantly higher or lower temperature. Custom designs forultralow or ultrahigh temperatures on request.
Straightness
See “Crosstalk“.

Measured value that specifies the frequency, with which theamplitude decreased by -3 dB.
Sensor linearization
For capacitive sensors, the signal conditioning electronics
demonstrates a notably low noise level. The integrated linearization system (ILS) compensates for the influences of parallelism
errors between the capacitor plates.
Sensor resolution
The smallest calculable increment that can be detected by themeasuring system used. Rotary encoder: Number of counts per
screw rotation. Linear encoder: Smallest increment still detectedby the sensor system used. The sensor can be the critical element in position resolution, for this reason the sensor resolution
is specified separately if necessary. See “Design resolution”.
Serial kinematics
Each actuator acts on its own platform. There is a clear relationship between actuators and motion axes. The advantages are
the relatively simple assembly and multi-axis control. The dynamic characteristics depend on the individual axis. Guiding
errors cumulate and the overall guiding accuracy is poorer if
compared to “Parallel kinematics”, see there.
Serial metrology
One sensor is assigned to each moving axis to be servo-controlled. Undesired off-axis motion, guiding error or crosstalk, go
unnoticed and uncorrected. See “Parallel metrology”.
Servo motor
A motor with position detection and control is called a servo
motor. The motor itself is often a DC motor. Servo motors offer
high torques at a low speed, good dynamics over a large speed
range, fast response, low heat generation as well as smooth andvibration-free operation. Either rotary or absolute encoders areused for detecting the position. A servo amplifier takes care of
amplifying the signal and controlling the motor parameters. This
is normally a PID controller (Proportional, Integral, Derivative)
with additional filters in order to exploit the above-mentioned
characteristics as best as possible.

Synchronous servo motor (SSVM)
A servo motor that is designed as a synchronous machine. This
type of motor for example, can be realized from a brushless DC
servo motor with sine commutation (see brushless “DC motor”
and “servo motor”).

T
Threaded roller drive screw
In the case of threaded roller drive screws, the contact surface
between the drive screw, roller, and nut is considerably larger
than with ball screw drives. This results in a very high stiffnessand higher loads are possible. There are various versions, forexample, guided planetary rollers without roller recirculation or
rotating rollers, i.e., with roller recirculation, which allow evensmaller pitches.
Torque motor
Torque motors are mainly brushless DC motors that are optimized for high torques or classical servo drives with a high numberof poles. On the other side, it is possible to envisage torquemotors as rolled-up linear motors. In contrast to conventional
servo drives, torque motors achieve lower speeds but are able toachieve very high torques at medium to low speeds. The torquegenerated by a torque motor increases squared to the rotor
diameter. As a rule, the rotor is a hollow shaft. When comparedto the usual servo drives, the length of the installation space is
not used and this allows low-profile dimensions. Torque motors
represent a zero-play and stiff direct drive and can reach highpositioning and repeatability with a high load. The high drive
torque also allows higher accelerations and the associated highdynamics.
Trajectory control
Provisions to prevent deviation from the specified trajectory.
Can be passive (e.g., flexure guidance) or active (e.g., using
additional active axes and sensors).
Translator
A linear actuator.
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Terms and Technology
Glossary

Sensor bandwidthTerms and Technology Glossary
U

Voice coil drives

User software and functions
PIMikroMove®, PI General Command Set (GCS). Drivers for LabVIEW, shared libraries for Windows and Linux. Compatible with
μManager, MetaMorph, MATLAB. Wave Generator. Linearization. Data recorder. Auto zero. Trigger I/O. Software configurable
servo parameters. See “Extensive software package”.

V
Vacuum-compatible versions
In a large number of industry sectors, production in a vacuum is
becoming increasingly more important. Therefore, PI (Physik
Instrumente) offers various different drive technologies to
its customers that can be operated in a vacuum of 10 –7 oreven 10–10 hPa. This applies to specially designed motors andactuators.

These friction-free electromagnetic linear drives are characterized by their good dynamics, albeit with relatively low holding
force.
Voice coil motors are direct drives. The drive principle is thetechnical implementation of the Lorentz force: The force thata live conductor exerts in a permanent magnetic field is proportional to the magnetic field strength and the current. The
motion controller controls the force via PWM control. The drive
is combined with a measuring system for precision positioning
and operated in a closed loop. The travel ranges of voice coildrives are therefore limited by the technology and are between
0.5 mm and 25 mm.
Typical applications include short-range motion with fast settling times, applications with low noise generation, or sensitive
programmable force controls.

Y
Yaw
See “Crosstalk”.

Physik Instrumente (PI) GmbH & Co. KG
Auf der Roemerstrasse 1, 76228 Karlsruhe
Germany
Phone +49 721 4846-0
Fax+49 721 4846-1019
info@pi.ws
www.pi.ws
General Management: Dr. Karl Spanner, Dr. Peter Schittenhelm, Markus Spanner;
Commercial Register: Reg.-Gericht Mannheim: HRA 104804; VAT-No.: DE 1431 828 03;
WEEE-Reg.-No.: DE 93978928;
General Partner: Physik Instrumente (PI) Verwaltungs GmbH;
Commercial Register: Reg.-Gericht Mannheim: HRB 109941;
Although the information in this document has been compiled with the greatest care, errors cannot be ruled out completely.
Therefore, we cannot guarantee for the information being complete, correct and up to date. Illustrations may differ
from the original and are not binding. PI reserves the right to supplement or change the information provided without
prior notice.
The company names or marks listed below are registered trademarks of Physik Instrumente (PI) GmbH & Co. KG: PI®, PIC®,PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, PInano®, NanoCube®, Picoactuator®, Nanoautomation®, NEXSHIFT,
PicoCube, PiezoMove, PIMikroMove, PIMag®
The company names or marks listed below are registered trademarks of their owners:
μManager, EtherCAT, LabVIEW, Leica, Linux, MATLAB, MetaMorph, Microsoft, National Instruments, Nikon, Olympus, Windows, Zeiss.
CAT132E Precision Positioning and Motion Control 03/2018 4.2. ® Physik Instrumente (PI) GmbH & Co. KG 2018.
Subject to change without notice.
All contents, including texts, graphics, data etc., as well as their layout, are subject to copyright and other protective laws.
Any copying, modification or redistribution in whole or in parts is subject to a written permission of PI.

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Headquarters

Subsidiaries

GERMANY

USA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax+49 721 4846-1019
info@pi.ws
www.pi.ws

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax+49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax+49 36604 882-4109
info@piceramic.com
www.piceramic.com

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY

NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

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www.pi.ws/benelux

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JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA
Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

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Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

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Singapore LLP
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For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
Taipeiwww.pi-taiwan.com.tw

KOREA
PI Korea Ltd.
Seoul
www.pikorea.co.kr

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